CCM501 User Manual - InstruTech®, Inc.
Contents
1. The following chart shows the graphical results of table and formulas above Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure Output Signal Volts dc 0 0 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 Pressure Torr 1 0E 01 1 0E 00 oo 10 VDC See conditions described above which cause the output to switch to 10VDC InstruTech Inc Page 23 Instruction Manual 7 2 2 1 8 to 8 7 Vdc 0 8 V decade analog output mbar CCM501 Hornet A The log linear output signal and pressure are related by the following formulas when units of measurement is in mbar p 1g 1 25 volts 12 75 V 10 2 0 8 logio P Where P is the pressure in mbar and V is the output signal in volts When using this scaling any output higher than 8 7 volts is an over range condition The output voltage is 10 Vdc under the following conditions 1 The sensor is turned off 2 The gauge has not stabilized and no valid pressure signal is detected Log Linear Analog Output Pressure mbar Voltage 1 00E 08 3 80 1 00E 07 4 60 1 00E 06 5 40 1 00E 05 6 20 1 00E 04 7 00 1 00E 03 7 80 1 00E 02 8 60 1 30E 02 8 70 Sensor is off 10 00 The following chart shows the graphical results of table and formulas above Pressure i2. e g 01 5 00E 06 lt CR gt READ MODULE Finds out the cause of the xxRS lt CR gt xx_00_ST_OK lt CR gt STATUS controller shutdown e g 01RS lt CR gt xx_01_OVPRS lt CR gt xx_04_HIVLT lt CR gt xx_08_POWER lt CR gt xx_20_CURFL lt CR gt xx_40_DISCH lt CR gt READ SW Read the revision number of the xxVER lt CR gt xx_nnnn vvwv lt CR gt VERSION firmware e g O1VER lt CR gt eg 01_1596 100 lt CR gt SET FACTORY Force unit to return ALL settings xxFAC lt CR gt xx_PROGM_OK lt CR gt DEFAULTS back to the way the factory e g 4O1FAC lt CR gt programmed them before shipment Reset the device as if power was xxRST lt CR gt No response cycled Also used to switch from e g OLRST lt CR gt RS485 mode to another IG CNTL mode Notes 1 When using RS485 commands if you try to set the RLY LO TRP point to a value higher than RLY HI TRP value the CCM501 will set both relay trip points to the RLY LO TRP value you have set The device will display the message 01 MIN HYS indicating zero hysteresis To do this correctly so that the CCM501 will accept the new setting for the RLY LO TRP point you must ensure that the set command value for RLY HI TRP is a number higher than the set command value for RLY LO TRP you are trying to set 2 When using RS485 commands if you try to set the RLY HI TRP point to a value lower than RLY LO TRP value the CCM501 will set both relay trip points to the
3. Knurled Knob Anode Assembly Engraved line on anode assembly Polish this anode surface only m o ring Wavy Washer Ewam Flat Washer Magnet Assembly Note Align arrow with the engraved line on Anode Assembly Ha End Plate Envelope Assembly InstruTech Inc Page 32 Instruction Manual CCM501 Hornet 10 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at support instrutechinc com For the safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot work on gauges that have been exposed to hazardous materials 11 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified wit
4. User should ensure that values physically marked on the instrument match the CAL FACTORS C programmed in the device HV TIMEOUT Factory default 10 min The cold cathode gauge will exhibit some level of activation time delay when the sensor is being activated at pressures below 1 0E 5 Torr This is the time needed for the electrical discharge to establish itself at low pressures A rough estimate for this time delay can be determined by the following equation T seconds 1 pressure Torr Example If the pressure at which the gauge is being activated is 1 00E 07 Torr 1 00E 07 X 1 000 000 0 1 uTorr then T 1 0 1 10 indicating that it may roughly take at least 10 seconds or more for the sensor to turn on The HV TIMEOUT is the time allowed for the gauge to activate during which time the unit will attempt repeatedly to turn on the anode voltage If the gauge has not been activated after this time has elapsed the unit will stop attempting to turn on the anode voltage and the user will be prompted with DISCHARGE FAIL or CURRENT FAIL error messages If this is the case the user must clear the error and repeat the process of turning on the anode voltage again RLY I LO TRP Factory default 1 00E 06 TORR This setpoint corresponds to the turn on point for the relay The relay will turn on when the pressure drops below this setting Note When using the front panel push buttons if you try to set the RLY LO TRP point t
5. C1 C2 C3 C4 C5 actual sensor calibration factors factory set HV TIMEOUT Factory default 10 min RLY I LO TRP Factory default 1 00E 06 TORR RLY HI TRP Factory default 5 00E 06 TORR RELAY TEST Factory default OFF ANALOG MODE Factory default 0 8 VLOG SETUP COMMS BAUD RATE Factory default 19200 8 N 1 ADDR Factory default 1 ADDR OFFSET Factory default 0 SERVICE MENU INFO Factory default FIRMWARE VERSION OP TIME Factory default TOTAL TIME OPERATIONAL lt hours gt 0 0 InstruTech Inc Page 14 Instruction Manual CCM501 Hornet 5 5 Programming This section provides detailed information on programming and configuration of various menus and submenus of the device 5 5 1 SETUP DISP SET CONTRAST Factory default 10 This function sets the display contrast Use the ENTER KEY to access the CONTRAST menu and use the UP and DOWN Keys to select a number between 1 and 255 The contrast setting of 255 provides the highest contrast brightest and 1 the lowest Select the ENTER KEY again to save the value selected Note Factory default setting optimizes display life MODE Factory default NORMAL Use the ENTER KEY to access the MODE menu and use the UP and DOWN Keys to select the NORMAL or RESEARCH display mode Select the ENTER KEY again to save the desired mode Normal This mode displays the most commonly used parameters These are the measured pressure th
6. CCM501 Hornet 5 5 Weien 15 5 5 1 SETUP IS Ee eegener 15 5 5 2 SETUP ENEE 16 5 5 3 SETUP 1G ii iener ea EE T A e EE gg 17 5 5 4 SETUP COMM LE 19 5 5 5 GEIER 19 5 6 Activating the S l SOL 3 5154 xy lll kanala NR ka k ka kalen 2k r k Aka Ken e subacute Xu H EA eE ENPE KOE E 20 6 Using the gauge with different TT 21 ZEHREN keyan k key ek wak rak kw k 22 7 1 Oto8Vdc 1 V decade analog output iA kek kek k k e keke kek KE KAKA KAKA KAK KA KA 22 7 2 1 8 to 8 7 Vdc 0 8 V decade analog output Ei kk kk ek keke keke keke kl kA KEK KA KA 23 7 2 1 1 8 to 8 7 Vdc 0 8 V decade analog output Tor 23 7 2 2 1 8 to 8 7 Vdc 0 8 V decade analog output mar keke keke kek 24 7 2 3 1 8 to 8 7 Vdc 0 8 V decade analog output paSCca lS keke kke 25 8 RS485 serial communications eu ee 26 8 1 Device Specific Serial Communication Info 26 8 2 RS485 Command Protocol SUmmary geed eenegen NEE 27 J o pe eo o pepe r 9 eeeoeo oo op r m mm m_ 28 9 1 SH lat ___aam imggggrn 28 9 2 MAINGGN ANOS t oao ll eaemmm mn 28 9 3 Troubleshooting Error Meer aset deeg cevecedvauie said kk ka k KAKA KA KA KAKA KA Kl KA A KA KA KA KA KWA 28 9 4 Troubleshooting Operation E 29 95 ln L tel E Le 30 9 6 Cold Cathode Sensor Replacement sccccccscsccscccsccecccdsiscacsssiesciussetsences doncedevsdensnanvescaeesuuenseendsssidenets 31 9 7 Col
7. Hornet 3 2 Electrical Installation 3 2 1 Grounding A Be sure the vacuum gauge and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings when not used with metal clamps may not produce a good electrical connection between the gauge and the chamber it is connected to Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary 3 2 2 Connectors Good recommended practice is to remove power from any cable prior to connecting or disconnecting it The CCM501 is provided with two D sub connectors used for I O interface as shown below 1 9 pin D sub DE 9P male for analog interface 2 15 pin D sub DA 15P male for RS485 serial communications RS 485 COM ANALOG CCM501 1 0 Interface When using InstruTech s power Supply PS501A connect the power supply to the ANALOG connector If using a power supply other than InstruTech s PS501A connect your power supply to either the RS485 or the ANALOG connector as shown on the next page Do not connect power to both connectors Fabricate a cable according to your interface requirements For analog signals and digital input use the 9 pin D Sub connector For serial communications use the 15 pin D Sub connector Refer to the following page for detailed explanations of the connectors pin out InstruTech Inc Page 10 Inst
8. INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 33 Instruction Manual CCM501 Hornet InstruTech Inc Page 34 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 001587 104
9. a SET command to turn the anode voltage on must be sent to the CCM501 in order for the gauge to auto switch to the RS485 mode Sending READ commands such as read gauge pressure will not accomplish this task When operating in the RS485 mode all other inputs are ignored Note To change from the RS485 to another IG CNTL mode the reset command must be sent to the CCM501 or power must be turned off and on This will reset IG CNTL to DIGI RS485 factory default setting with the default state of this selection being the Digital Input D G again HV ON OFF Factory default OFF This allows the user to turn the anode voltage on and activate the sensor manually using the front panel soft keys This is achieved by selecting HV ON OFF in the IG CNTL submenu of the SETUP UNIT menu In this case the HV ON OFF overrides any other input and the DIGI RS485 inputs are ignored The message OFF will appear if HV ON OFF is selected indicating the anode voltage is off Use the UP or DOWN arrow soft keys to select ON and ENTER to activate the sensor Note To change from HV ON OFF control back to Digital DIGI control turn off HV by selecting HV On Off in the SETUP UNIT IG CNTL menu use the UP or DOWN arrow key to select OFF and press ENTER Return to the IG CNTL menu and highlight DIGI RS485 and press ENTER then press ENTER again to select DIGI control Press MENU several times to return to the main screen 5 5 3 SETUP IG SENSITIVITY Factory defa
10. and a natural progression of setup parameters This section gives a brief explanation of operation for added clarity There are four soft keys located on the front panel below the display These keys are used to select and program the various functions available During programming of the CCM501 the display will identify what each function key represents To begin programming press the MENU key Press the ENTER key to access the parameters and save the new settings Press the UP and DOWN key to select the desired menu and change the parameters Press the MENU Key to return to the previous menu or press repeatedly to return to the main screen To continue setting additional parameters scroll with the UP and DOWN keys until you reach the desired parameter Programming soft keys InstruTech Inc Page 13 Instruction Manual CCM501 Hornet 5 4 Factory Set Default Parameters The following is a summary of all factory set default values in the CCM501 display menu SETUP DISP SET CONTRAST Factory default 10 MODE Factory default NORMAL FLIP SCREEN Factory default NORMAL SETUP UNIT UNITS Factory default TORR DEFAULTS Factory default MENU TO EXIT GAS TYPE Factory default N2 CLR IG ERROR Factory default OFF OVER PRESS Factory default 1 00E 02 TORR IG CNTL Factory default DIGI RS485 SETUP IG SENSITIVITY Factory default 10 CAL FACTORS C Factory default CO
11. been enabled InstruTech Inc Page 19 Instruction Manual CCM501 Hornet 5 6 Activating the sensor Before you turn on the anode voltage and activate the sensor make sure you understand all instructions and information provided in this manual You can activate the sensor by one of the following methods 1 HV ON OFF Manually using front panel soft keys see HV ON OFF in section 5 5 2 2 Digital Input see IG CNTL in section 5 5 2 3 RS485 commands see IG CNTL in section 5 5 2 4 Using a Convection gauge relay to activate the cold cathode sensor Digital Input mode Because the useful operating range of the InstruTech s cold cathode CCM501 is from 1 00 x 10 Torr to 1 00 x 10 Torr another vacuum gauge capable of measuring pressures above 1 00 x 10 Torr should be used to determine when to turn on the anode voltage and activate the sensor This can simply be a manual operation by the operator using the programming soft keys or automated by having the CCM501 in the Digital Input mode and using control signals from another gauge such as an InstruTech convection enhanced pirani CG gauge The latter is a recommended method of operating the cold cathode gauge For example you may use an InstruTech CVM211 Stinger or the CVM201 Super Beem convection gauge to activate or deactivate the cold cathode sensor The setpoint relay from the CVM211 or CVM201 can be physically wired to the cold cathode ANALOG connector see typical
12. conductor of electricity A person could be seriously injured or killed by coming in contact with an exposed ungrounded electrical conductor at high voltage potential This condition applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel 2 3 1 Proper Equipment Grounding A WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuum processes Verify that the vacuum connection port on which the ion gauge is mounted is electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The vacuum gauge transducer and enclosure of any control module must be connected directly to a good quality equipment earthing conductor Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary A WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 3 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used in a safe manner Always double check the system set up before using any s
13. connection scheme below The relays in the CVM211 or CVM201 can be configured to energize at the desired pressure at which the cold cathode sensor will be activated The cold cathode sensor is activated operational by applying a continuous ground thru the relay connections of the CVM211 or CVM201 The sensor is deactivated when relay is de energized discontinuing the application of ground HV ON OFF Relay N O Sensor Enable Super Boo o A KZ Super Bee or ANALOG Stinger Relay Common Power Ground DE 9P D sub DE 9P connector Using a convection gauge to activate the cold cathode sensor CAUTION The anode voltage may be turned on and the sensor activated when the pressure drops below the OVER PRES value programmed in the SETUP UNIT menu Activating the sensor at pressures higher than 1 00 x 10 Torr may result in contamination buildup and incorrect pressure measurement InstruTech Inc Page 20 Instruction Manual CCM501 Hornet 6 Using the gauge with different gases InstruTech gauge transducers and modules are calibrated for nitrogen gas Read the following information very carefully if you intend to use a gas other than nitrogen or air The CCM501 offers the user the choice to use the factory default gas type N or select from a table of 16 most commonly used gases in the menu 1 Selecting a specific gas other than nitrogen If a specific gas other than N is selected from the menu the CCM501 will automatically apply the con
14. regardless of whether the IG CNTL mode below is set to Front Panel Digital Input or RS485 OVER PRESS Factory default 1 00E 02 TORR This allows the user to set a pressure value at which the gauge anode voltage will automatically turn off No value higher than 1 00E 02 TORR can be set IG CNTL Factory default DIGI RS485 This allows the user to choose the source of control for the IG The IG can be controlled via digital inputs RS485 commands or front panel DIGI RS485 The DIGI RS485 allows the application of a digital input or RS485 communication commands to operate the CCM501 The default state of the DIGI RS485 selection is Digital input This requires grounding pin 1 of the 9 pin D sub ANALOG connector to turn on the anode voltage and activate the sensor User should verify the DIGI RS485 is selected in the IG CNTRL submenu of the SETUP UNIT menu When InstruTech Inc Page 16 Instruction Manual CCM501 Hornet operating in the Digital Input D G mode the anode voltage can be turned on only by applying continuity to ground to pin 1 of the 9 pin D sub ANALOG connector To change from Digital Input to RS485 communication mode use the RS485 D sub RS485 15 pin D sub connector The user should verify DIGI RS485 is selected in the IG CNTL submenu of the SETUP UNIT menu In order to operate in the RS485 mode the user must send an RS485 SET command which will cause the CCM501 to automatically switch to RS485 mode For example
15. 107 Torr Incorrect Sensitivity or CAL FACTORS C Ensure correct values programmed Displayed pressure is significantly lower The gauge sensor is contaminated Clean or replace sensor than expected pressure Incorrect Sensitivity and CAL FACTORS C Ensure correct values programmed Gauge cannot be activated unable to turn Pressure exceeds value programmed for Decrease pressure below required value anode voltage on OVER PRESS in the SETUP UNIT menu Chamber pressure higher than 1 00 x 10 Decrease chamber pressure below Torr value programmed for OVER PRESS in the SETUP UNIT menu Gauge will not start at low pressure Pressure is too low to initiate discharge Repeat step to activate sensor Increase HV TIMEOUT to allow more time for sensor activation Increase pressure Research Screen shows anode Voltage is Defective electronics Repair or replace electronics present but total current stays at 0 Setpoint does not actuate Incorrect setup Check setpoint setup InstruTech Inc Page 29 Instruction Manual CCM501 Hornet 9 5 Contamination The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings lower than expected measurements and total gauge failure are all possible indications of gauge contamination Contamination can be generally characterized as either A Areaction of process gases with sensor elements or B An accumulation of material on the sensor elements Sensors that f
16. Ir mo om mmmW orm 3 1 2 FSD dille en CN 3 1 3 Bil Ee LE 4 ent 4 1 5 OPptiOns amp ACCESSOMES ss cscccsiieicdecseidevecsdaieesesacedcetiateeins ye iees ll gbbggg mpgm bemmrmmm 4 2 Important Safety Information E kk xek keka k keke ke k kake kk EES 5 SL Safety Precautions General a isi leki ane guerten kewa nen nnn salek anea an kaeed naa eke 5 2 2 Safety Precautions Service and operation kk kk kk kk k kek k KAKE A KAKA KA KA 6 2 31 El ctrical Condit i oy n xak la yadan EE 7 2 3 1 Proper Equipment EENEG 7 2 3 2 Electrical Interface and reene dE 7 2 4 Overpressure and use with hazardous gases EE keke kk keke kek k KAKA KA KA KAKA KA KA KAKA KA 7 2 5 Ga sotherthan Nitrogen Eed 8 ME E 9 2 4 Mechanical Installa tille i H s n Aly danl keka Ki dal na ee Eege 9 3 2 _Electrical InStall tiOi TT 10 3 2 1 e rel et 10 3 2 2 GEREENT 10 3 2 3 Conn ctors DIn O k iEL kirk ke kekekkaele kad ke keneke nika nsn n keke kena ked kalane We neke c na nane ke kala en kuca kinn ne e k n 11 GW 12 5 Se UP and Opera tlO kuy lula dk lake ed Nae blen niana ledan kk S e ekle d e Rv alive kb nex ew kak w y we u a dek ys ba 13 5 1 Appiying DOWA6FE N lc 4 11440340a x0454 ente vin cen Qiz ege eene Eesen 13 52 Ov rpress re SRUt TOW EEN 13 5 3 User eg 13 5 4 Factory Set Default Parameter 14 InstruTech Inc Page 1 Instruction Manual
17. RATURE LIMITED BY VITON O RING TO VACUUM SYSTEM UNDER KNURLED KNOB RT MAGNET ANODE ASSEMBLY ENGRAVED LINE 4 40X 1 4 SOCKET SENSOR STAYS ON ELECTRONICS HEAD CAP SCREWS VACUUM SYSTEM AND ENCLOSURE 4 EACH InstruTech Inc Page 12 Instruction Manual CCM501 Hornet 5 Setup and Operation 5 1 Applying power Connect power to the CCM501 using the designated pins 4 and 2 of either the 9 pin D sub Analog or the 15 pin D sub RS485 connector Do not connect power to both connectors simultaneously Alternatively you can power the device by connecting InstruTech s PS501 A power supply to the Analog connector of the CCM501 When you connect power the display will show UNIT STATUS OFF This indicates the display is on but the anode voltage is not turned on and the sensor has not been activated yet Read this user manual in its entirety before activating the sensor Refer to section 5 6 titled Activating the sensor for further details 5 2 Overpressure shut down The CCM501 is provided with factory set default values for overpressure shut down The gauge will shut off automatically should the pressure reach or rise above the pressure shut down values shown below Factory set overpressure shut down values Overpressure Shut Overpressure Shut Overpressure Shut Down Torr Down mbar Down Pa 1 00 x 10 1 33 x 10 1 33 5 3 User Interface Basics The user interface is designed for easy operation
18. RLY HI TRP value you have set The device will display the message 01 MIN HYS indicating zero hysteresis To do this correctly so that the CCM501 will accept the new setting for the RLY HI TRP point you must ensure that the set command value for RLY LO TRP is a number lower than the set command value for RLY HI TRP you are trying to set InstruTech Inc Page 27 Instruction Manual H Service 9 1 Calibration CCM501 Hornet Every InstruTech module is calibrated prior to shipment using nitrogen Care should be exercised when using gases other than nitrogen N2 air See Section 6 titled Using the gauge with different gases 9 2 Maintenance In general maintenance is not required for your InstruTech module Periodic performance checks may be done by comparing the gauge to a known reference standard When using the gauge in gases containing contaminants periodic sensor cleaning is recommended See the following sections on contamination and cleaning 9 3 Troubleshooting Error Messages Possible Cause Possible Solution Indication OVERPRESSURE HV FAILURE CURRENT FAIL Pressure exceeds value programmed for OVER PRESS in the SETUP UNIT menu Chamber pressure higher than 1 00 x 10 Torr Chamber pressure higher than 1 00 x 10 Torr Defective Electronics Electrical discharge has not been established to activate sensor Defective Electronics Decrease chamber pressure below required value D
19. RNING There are no operator serviceable parts or adjustments inside the product enclosure refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified InstruTech service trained personnel Return the product to an InstruTech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made A WARNING Source power must be removed from the product prior to performing any servicing After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts are required ensure that the parts are specified by InstruTech Inc Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is damaged InstruTech Inc Page 5 Instruction Manual CCM501 Hornet Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could b
20. ail due to chemical reaction are generally not repairable Sensors that fail due to condensation coatings or particles may possibly be restored by cleaning A Reactive Gases If process gases react with the materials of construction of the sensor the result is corrosion and disintegration of the sensor over time Since the sensor material of construction is 304 stainless steel the sensor should handle most applications If 304 stainless steel is not compatible with the process gas cleaning can t solve the problem because the sensor has been destroyed you should consider using a different gauge than the CCM501 B Oil Condensation Coatings and Particles If the failure is due to an accumulation of material in the gauge you may be able to restore your gauge or module by cleaning Oils and hydrocarbons Exposure of the gauge internal surfaces to oils and hydrocarbons can result in sensor contamination Some of these types of contamination may be removed by cleaning the gauge Furthermore if there is the possibility of oil back streaming from wet vacuum pumps it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system In some vacuum processes desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line of sight transport especially under high vacuum conditions i e in the molecular flow regime To prevent materials th
21. and all normal responses from the module start with a character Error responses start with a A valid address must be used Factory default 1 The CCM501 will not respond to a command with an invalid address InstruTech Inc Page 26 Instruction Manual CCM501 Hornet 8 2 RS485 Command Protocol Summary COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ Read the current pressure in Torr xxRD lt CR gt xx_y yyEzyy lt CR gt READ CURRENT Read the gauge Current in xxRI lt CR gt xx_y yyEzyy lt CR gt amperes e g HO1RI lt CR gt e g O1_1 23E 06 lt CR gt TOGGLE SET Enable High Voltage and start xxIlGy lt CR gt xx_PROGM_OK lt CR gt MODULE reading pressure Activate or e g 01IG1 lt CR gt STATUS deactivate sensor y 1 Turn ON y 0 Turn OFF SET OVER Set overpressure turn off point xxSOy yyE yy lt CR gt xx_PROGM_OK lt CR gt PRESSURE e g 01S04 00E 03 lt CR gt SETPOINT SET TRIP POINT Set the RLY LO TRP pressure xxSLzy yyEzyy lt CR gt xx_PROGM_OK lt CR gt 1 point and set the RLY HI TRP e g 01SL 1 00E 06 lt CR gt pressure point for relay e g 01SL 5 00E 06 lt CR gt STATUS reading e g 01IGS lt CR gt xx_1_IG_ON lt CR gt READ TRIP Read the RLY LO TRP pressure xxRLz lt CR gt xx_y yyEzyy lt CR gt POINT 1 point and read the RLY HI TRP e g 01RL lt CR gt e g 01 1 00E 06 lt CR gt pressure point for relay e g 01RL lt CR gt
22. at may be transported via line of sight momentum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In many cases a simple 90 elbow may help prevent or reduce the transport of particles from entering your vacuum gauge In the event of gauge contamination you can attempt to clean the sensor Refer to the following section for information on sensor cleaning InstruTech Inc Page 30 Instruction Manual CCM501 Hornet 9 6 Cold Cathode Sensor Replacement The CCM501 ion gauge module is factory calibrated for the specific ion gauge transducer sensor installed in it The CAL FACTORS C values of the new sensor must be re programmed in the CCM501 electronics Follow all instructions below in order to replace the sensor If you prefer you can contact the factory for return authorization and the replacement of the sensor will be done at the factory To replace the sensor use the following procedure Turn off power to the CCM501 Disconnect the cable from the CCM501 Remove the CCM501 from the vacuum system Use a 3 32 in size Hex key to remove the 4 40 socket head cap screws SHCS as shown below Detach the electronics from the sensor by sliding the metal electronics enclosure away from the sensor Pull the electronics enclosure with a continuous straight line motion away from sensor 6 Replace sensor Make sure the arrow on the magnet assembl
23. connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure A CAUTION If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmospheric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases 2 5 Gases other than Nitrogen air A WARNING Do not attempt to use with gases other than nitrogen N3 or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitrogen or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO2 unless you have programmed the device for the appropriate gas or use accurate conversion data for N to other gases Refer to section 6 titled Using the gauge with different gases for a more complete discussion InstruTech Inc Page 8 Instruction Ma
24. d Cathode Sensor Cleaning keke ees baassanadieunagaadeneaketdesassabanndes 32 10 Factory Service and Support euer EENEG KA AA 33 IL Warranty EEN 33 InstruTech Inc Page 2 Instruction Manual CCM501 Hornet 1 Introduction General Information 1 1 Description A cold cathode ionization gauge measures vacuum pressure by first ionizing gas molecules inside the vacuum gauge and then measuring the resulting ion current A large potential between the sensor anode and cathode will cause ionization to occur The amount of ion current generated from the ionized gas is proportional to the pressure in the vacuum system and is dependent on the type of gas used As the pressure inside the vacuum system drops the measured ion current drops The design of InstruTech s cold cathode transducer includes an internal O ring which will allow easy disassembly for cleaning The InstruTech CCM501 Hornet module provides the basic signal conditioning required to turn a cold cathode vacuum gauge into a complete measuring instrument The module provides a log linear analog output RS485 serial communications and one setpoint relay In addition a built in display provides a convenient user interface for setup and operation of the vacuum gauge The measurement range for the CCM501 cold cathode ionization gauge is 1 x 10 to 1 x 10 Torr 1 2 Specifications measurement range accuracy N typical repeatability typical display ma
25. e compromised over time It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised 2 2 Safety Precautions Service and operation Ensure the CCM501 is properly connected to earth ground Do not turn on the anode voltage and try to activate the sensor when pressure exceeds 1 00 x 10 Torr A WARNING The power supply used in the Cold Cathode Gauge Module CCM501 is subject to high voltages which could cause severe injury or death In order to prevent electric shock and bodily harm the user should wait 1 minute after power is removed before touching the CCM501 power supply components A WARNING When the anode voltage is turned on and the sensor activated 3 900 Vdc is present at the power supply and other components DO NOT operate the CCM501 with the CCM501 enclosure removed Contact with exposed electrical circuits in the CCM501 could result in death or serious injury Use an appropriate power source of 20 to 28 Vdc 7 2 W minimum Turn off power to the unit before attempting to service the module Turn off power to the unit before detaching the electronics from the sensor for sensor replacement sensor cleaning or bake out purposes Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual Contact qualified InstruTech se
26. e pressure unit the gas symbol and the relay status All these variables will be displayed on the main screen simultaneously In the following example the measure pressure is 6 45E 8 Torr gas is nitrogen and Relay Lis on Negative Exponent Indicates Pressure Unit 6 4 pa Measured Pressure 4 8 TORR Gas Symbol fe N2 RLYI Tedas Relay is On Note The indication RLY I is not shown in the display when the relay is not energized turned off RESEARCH This mode displays the measured pressure anode voltage and total current In the following example the measured pressure is 1 00E 8 Torr pressure unit is based on selected units in SETUP UNIT menu Anode voltage is 3 90E 3 Vdc and total current is 1 00E 7 amperes Negative Exponent Anode Voltage Vdc PT 1 OOE 8 4 Measured Pressure Total current value amperes HV 3 90E 3 C 1 00E 7 InstruTech Inc Page 15 Instruction Manual CCM501 Hornet FLIPSCREEN Factory default NORMAL This allows the user to select a NORMAL display or have the pressure measurement data displayed UPSIDE DOWN When the CCM501 is mounted upside down this selection is used to invert the display screen 180 degrees for user convenience Note When Upside Down is selected the user has to save the setting and exit the menu before the measured values are displayed 5 5 2 SETUP UNIT UNITS Factory default TORR Select from Torr mbar or pascal Units select
27. ecrease chamber pressure below value programmed for OVER PRESS in the SETUP UNIT menu Decrease pressure below 1 00 x 10 Torr Repair or replace electronics Repeat step to activate sensor Increase HV TIMEOUT to allow more time for sensor turn on Repair or replace electronics DISCHARGE FAIL Electrical discharge has not been established to activate sensor Defective Electronics Repeat step to activate sensor Increase HV TIMEOUT to allow more time for sensor activation Repair or replace electronics InstruTech Inc Page 28 Instruction Manual CCM501 Hornet 9 4 Troubleshooting Operation Indication Possible Cause Possible Solution Display is off blank Check cable connections and verify that power is being supplied The connector may not be wired correctly Check cable connections and verify that power is being supplied Displayed pressure appears very different Sensor not in the proper location to Ensure the sensor is located in from expected pressure measure system pressure appropriate location The process gas is different from the gas Apply gas sensitivity correction factor if nitrogen used to calibrate the CCM501 applicable Sensor has been dropped causing Replace the Cold Cathode gauge sensor mechanical damage The gauge sensor is contaminated Clean or replace sensor Leak in the vacuum system Re check for leak in the system Re check that all metal seals are used when operating below 1x
28. ed are used for all other settings DEFAULTS Factory default MENU TO EXIT The module can be returned to the original factory settings by using the ENTER Key to set factory defaults Note You must re enter the actual sensor CAL FACTORS C values marked on the sensor tube GAS TYPE Factory default N2 Use the UP and DOWN Keys to select from a table of 16 commonly used gases Gas choices are N2 Air O CO H20 NO Ar CO Kr SFg Xe Hg He Ne D2 and H3 A CAUTION If you intend to use nitrogen as the default gas setting even though the gas in use is not nitrogen you can select N2 from the menu but you must manually apply a gas sensitivity correction factor to the displayed measurement and outputs Refer to section 6 titled Using the gauge with different gases CLR IG ERROR Factory default OFF When the CCM501 lonization Gauge IG experiences an error condition such as OVERPRESSURE HV FAILURE or CURRENT FAIL the voltage to the CCM501 s anode will turn off and the module will stop measuring pressure Error messages will be displayed on the CCM501 screen showing the error This is intended to prompt the user to determine what the error condition is before the anode voltage can be turned on again Once the cause of the error has been determined and resolved the error must be cleared before the anode voltage can be turned on again The CLR IG ERROR allows the user to clear the IG error using the front panel push buttons
29. elays InstruTech Inc Page 4 Instruction Manual CCM501 Hornet 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact InstruTech This device meets FCC part 15 requirements for an unintentional radiator class A 2 1 Safety Precautions General Hazardous voltages are present with this product during normal operation The product should never be operated with the covers removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided A WA
30. ground using digital input RS485 serial commands or manually using front panel programming soft keys 20 to 28 Vdc 7 2 W protected against power reversal and transient over voltages 9 pin D sub male for analog and 15 pin D sub male for RS485 EMC Directive 2004 108 EC EN61326 1 EN55011 Low Voltage Directive 2006 95 EC EN61010 1 RoHS compliant InstruTech Inc Page 3 Instruction Manual 1 3 Dimensions E 3 47 in 88 mm 3 81 in 97 mm A E E CCM501 Hornet fitting dimensionA 1in Tube 2 56 in 65 mm NW16KF 2 63 in 67 mm NW25KF 2 63 in 67 mm NW40KF 2 82 in 72 mm 11 3 in Mini CF 2 11 in 54 mm 2 3 4 in Conflat 2 63 in 67 mm 1 4 Part Numbers CCM501 Fittings Flanges Cold Cathode Replacement Module Sensor 1in Tube 1 in O D O ring compression CCM501TD CCST NW16KF CCM501BD CC5B NW25KF CCM501CD CC5C NW40KF CCM501DD CC5D 1 1 3 in Mini CF NW16CF Mini Conflat CCM501ED CC5E CCM501FD CC5F 2 3 4 in CF NW35CF Conflat 1 5 Options amp Accessories PS501 A Description Power supply Compatibility Powers the CCM501 Hornet vacuum gauge module Power Input 100 240 Vac Power Plug North American 115 Vac plug Output 24 Vdc 750 mA 18 W Connector 9 pin D sub female to mate with and power the CCM501 module Cable length 6ft 2 m Note 9 pin D sub connector backshell can be opened to enable connections to signals and r
31. he analog output signal that is not exactly equal to the displayed 2 digit resolution pressure This is because the analog output is equivalent to a 3 digit resolution of the displayed pressure available in the Research Mode Hence the analog output provides a better resolution than the equivalent 2 digit displayed pressure resolution 5 5 4 SETUP COMMS BAUD RATE Factory default 19200 8 N 1 This sets the baud rate for the RS485 communications The baud rate can be set to other values manually using the front panel soft keys ADDR Factory default 1 This is the lower nibble of the one byte RS485 device address e g setting this to a 5 would make the address be 0x05 in hex a 15 would be OxOF in hex if the address offset is equal to 0 ADDR OFFSET Factory default 0 This is the upper nibble of the one byte RS485 address e g setting this to a 5 with ADDR 0 would make the address 0x50 a 15 would be OxFO Eeer BINARY ADDRESS SI ADDRESS B RE SK EREK ERKA ONE BYT E 1 ADDRESS DECIMAL BINARY HEXADECIMAL ADDR OFFSET ADDR rUpper nibble rLower nibble 1 0 0 0 0 0 0 0 1 01 5 0 0 0 0 0101 05 15 0000 1111 OF 16 0001 0000 FO 5 5 5 SERVICE MENU INFO Provides information about the version number of the installed firmware OP TIME Provides information on how many hours the anode high voltage has
32. hin twelve 12 months after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS
33. i ji InstruTech Inc Cold Cathode lonization Vacuum Gauge CCM501 Module The Hornet ail User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 001587 104 Instruction Manual CCM501 Hornet Importa nt User Information There are operational characteristic differences between solid state equipment and electromechanical equipment Because of these differences and because there are a variety of uses for solid state equipment all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner In no event will InstruTech Inc be responsible or liable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrative purposes Because of the many variables and requirements imposed on any particular installation InstruTech Inc cannot assume responsibility or liability for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech Inc with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply internationally recognized symbols and safety messages to make yo
34. ignals to automate your process Perform a hazardous operation analysis of your system design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage 2 4 Overpressure and use with hazardous gases A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding The InstruTech CCM501 gauge should not be used at pressures exceeding 7000 Torr absolute pressure Failure to provide adequate overpressure protection may result in bodily injury and possible equipment damage due to forcible release of component parts or explosion of the pressurized vessel In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber DO NOT exceed pressures above 135 psia 7000 Torr 9 bars inside the sensor If your chamber vacuum vessel or connecting pipe goes to higher pressures you should install an isolation valve or pressure relief device to InstruTech Inc Page 7 Instruction Manual CCM501 Hornet protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick
35. nal Open collector transistor grounded emitter rated at 40 V max Mee 50 mA max Transistor off Gauge OFF transistor on Gauge ON InstruTech Inc Page 11 Instruction Manual CCM501 Hornet 4 Bakeout If desired a chamber bake may be performed for new systems or after routine maintenance The sensor can be baked out to 150 C but the bakeout duration should not exceed 5 hours to prevent damage to magnets Ensure the temperature of the sensor tube and the vacuum fitting to the sensor is at the same or above the chamber temperature The electronic module must be removed from the sensor if the bake out temperature is to exceed 70 C To bake out the sensor perform the following procedure A QI NS Turn off power to the CCM501 Disconnect the cable from the CCM501 Use a 3 32 in size Hex key to remove the 4 40 socket head cap screws SHCS as shown below Detach the electronics from the sensor by sliding the metal electronics enclosure away from the sensor Pull the electronics enclosure with a continuous straight line motion away from sensor Perform bake out with the electronics removed The bakeout duration should not exceed 5 hours to prevent damage to magnets Prior to reattaching the electronics make sure the arrow on the magnet assembly is aligned with engraved line on anode assembly Reattach the electronics enclosure Reinstall the 4 40 SHCS 4 ea Bakeout BAKEOUT TEMPE
36. nual CCM501 Hornet 3 Installation 3 1 Mechanical Installation Mount the CCM501 as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the CCM501 too close to a gas source inlet may also cause measurement and control instability The CCM501 can be mounted in any orientation however if possible mount the gauge with port down to help minimize the effect of any particles or condensation collecting in the gauge Do not mount the CCM501 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to components in the CCM501 Shield the CCM501 near ion or electron sources such as an electron beam or in a sputtering system For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber When using KF flanges metal clamps must be used to ensure proper grounding Do not attempt to modify your flange in order to use non metallic type flange clamps Fittings Flanges follow the fitting flange manufacturer s recommendations for installation and use Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1 00 x 10 Torr 1 33 x 10 mbar 1 33 x 10 Pa InstruTech Inc Page 9 Instruction Manual CCM501
37. o a value higher than RLY HI TRP value the CCM501 will revert back to the original RLY LO TRP value To do this correctly so that the CCM501 will accept the new setting for the RLY LO TRP you must first select the RLY HI TRP listed below and increase that value to a number higher than the value of RLY LO TRP you are trying to set RLY I HI TRP Factory default 5 00E 06 TORR This setpoint corresponds to the turn off point for the relay The relay will turn off when the pressure rises above this setting Note When using the front panel push buttons if you try to set the RLY HI TRP point to a value lower than RLY I LO TRP value the CCM501 will revert back to the original RLY HI TRP value To do this correctly so that the CCM501 will accept the new setting for the RLY HI TRP you must first select the RLY LO TRP listed above and decrease that value to a number lower than the value of RLY HI TRP you are trying to set RELAY I TEST Factory default OFF This allows the user to manually toggle the relay on and off to test for correct external circuit wiring and ensure polarity is as desired ANALOG MODE Factory default 0 8 V LOG This allows selection of analog output scaling Select 0 8 V LOG 1 V decade or 1 8 8 7 V LOG 0 8 V decade InstruTech Inc Page 18 Instruction Manual CCM501 Hornet Note that if the display Mode is set to Normal 2 digit resolution you may observe a voltage variation of t
38. ruction Manual CCM501 Hornet 3 2 3 Connectors pin out 15 pin D sub DA 15P male RS485 connector PIN NUMBER PIN DESCRIPTION 1 RS485 DATA B Input output 2 Power ground Also when using RS485 serial communications connect this pin to ground pin of your RS485 converter 3 RS485 DATA A Input output 4 Power input 20 to 28 Vdc 7 2 W Protected against power reversal transients and over voltages 5to15 Not used Do not connect 9 pin D sub DE 9P male ANALOG connector used for analog output and digital I O PIN NUMBER PIN DESCRIPTION 1 Sensor enable HV On Off The cold cathode sensor is activated by applying a continuous ground This will activate the CCM501 sensor and will turn on the high voltage HV to the anode The sensor is turned off by removing the ground See section 5 6 for other methods of activating the sensor Power ground amp sensor enable ground LA Analog output Log Linear 1 to 8 Vdc 1 V decade or 1 8 to 8 6 Vdc 0 8 V decade D Power input 20 to 28 Vdc 7 2 W Protected against power reversal transients and over voltages Relay NC Normally closed Relay NO Normally open Analog output ground Do not use for sensor enable ground Relay common O 00 N O U1 Sensor status This is an output signal to other external instruments to confirm the anode is on or off Sig
39. rvice personnel for any service or troubleshooting condition that may not be covered by this instruction manual Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation The most common cause of all vacuum gauge failures is contamination of the sensor Noisy abnormally low or erratic readings and total gauge failure are possible indications of gauge contamination Contamination can generally be characterized as either A Aphysical or chemical reaction of process gases with the sensor element If such is the case the sensor material is most likely not compatible with your application and a different gauge may be required B An accumulation of material on the sensor element In this case sensor cleaning may resolve the issue Refer to the section 9 7 titled Cold Cathode Sensor Cleaning for detailed cleaning procedure InstruTech Inc Page 6 Instruction Manual CCM501 Hornet 2 3 Electrical Conditions A WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded
40. s plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 9 0 8 0 7 0 g 2 60 9 50 2 Ed 40 5 O 3 0 2 0 1 0 0 0 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 Pressure mbar 10 VDC See conditions described above which cause the output to switch to 10VDC InstruTech Inc Page 24 Instruction Manual 7 2 3 1 8 to 8 7 Vdc 0 8 V decade analog output pascals CCM501 Hornet A The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals p 1g 1 25 volts 10 75 V 8 6 0 8 logio P Where P is the pressure in pascals and V is the output signal in volts When using this scaling any output higher than 8 7 volts is an over range condition The output voltage is 10 Vdc under the following conditions 1 The sensor is turned off 2 The gauge has not stabilized and no valid pressure signal is detected Log Linear Analog Output Pressure pascals Voltage 1 00E 06 3 80 1 00E 05 4 60 1 00E 04 5 40 1 00E 03 6 20 1 00E 03 7 00 1 00E 01 7 80 1 00E 00 8 60 1 30E 00 8 70 Sensor is off 10 00 The following chart shows the graphical results of table and formulas above Pressure is plotted on
41. terials exposed to gases sensitivity overpressure protection internal gauge volume operating temperature storage temperature bakeout temperature humidity weight housing electronics mounting orientation altitude operating storage serial communications analog Output setpoint relay status outputs input signal input power connectors CE compliance environmental 1x 10 to1x10 Torr 1 3x10 to 1 3 x 102 mbar 1 3 x 10 7 Pato 1 3 Pa 1x 10 to1x 107 Torr 30 of reading 5 of reading OLED graphical display 2 digits plus 1 digit exponent user selectable Torr mbar or Pa 304 stainless steel ceramic Viton O ring 10 Torr 1 also user adjustable between 1 to 99 gauge turns off at factory default setting of 1 x 10 Torr 1 965 in 32 2 cm 0 C to 40 C 40 to 70 C 150 C sensor only electronics removed Limit to 5 hours with magnets installed 0 to 95 relative humidity non condensing 1 7 Ib 0 77 kg with NW25 KF flange aluminum extrusion any 8 200 ft 2 500 m max 41 000 ft 12 500 m max RS485 ASCII protocol minimum command interval 50 ms user selectable scaling log linear 0 to 8 Vdc 1 V decade or 1 8 to 8 67 V 0 8 V decade one single pole double throw SPDT 1 A at 30 Vdc resistive or ac non inductive anode sensor on off status is determined by display messages via open collector transistor or RS485 serial communications sensor enable is set by continuity to
42. the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 0 9 0 8 0 7 0 6 0 5 0 4 0 Output Signal Volts dc 3 0 2 0 0 0 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 Pressure pascals 1 0E 00 1 0E 01 10 VDC See conditions described above which cause the output to switch to 10VDC InstruTech Inc Page 25 Instruction Manual CCM501 Hornet 8 RS485 serial communications 8 1 Device Specific Serial Communication Info The standard CCM501 model provides RS485 serial communications The following information and the RS485 command protocol summary listed on the next page can be used to establish serial communications with the device 10 11 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit Factory default 19 200 8 N 1 The baud rate can be set to different values using the front panel soft keys Minimum interval between commands sent out over 485 serial bus is 50 msec The stop bit is always 1 All Responses are 13 characters long xx is the address of the device 00 thru FF lt CR gt is a carriage return _ iS a space The z in the set or read trip point commands is a or The plus is the turns on below point and the minus is the turns off above point All commands sent to the module start with a character
43. tor for argon is 1 29 Divide the displayed pressure 1 00E 6 Torr by the correction factor 1 29 to obtain the true pressure of argon gas in your 6 1 0 x10 vacuum chamber P argon ae 7 75 x 10 7 Torr true pressure of argon gas InstruTech Inc Page 21 Instruction Manual 7 Analog Output The CCM 501 provides one log linear analog output with two different scaling selections 7 1 Oto 8 Vdc 1 V decade analog output This scaling provides a 0 8 Vdc 1 V decade log linear signal proportional to pressure CCM501 Hornet A The log linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar p 10 t5 19 V logio P 10 Where P is the pressure in Torr or mbar and V is the output signal in volts B The log linear output signal and pressure are related by the following formulas when units of measurement is in pascals p LO H Ve logio P 8 Where P is the pressure in pascals and V is the output signal in volts The output voltage is 10 Vdc under the following conditions 1 The sensor is turned off 2 The gauge has not stabilized and no valid pressure signal is detected Log Linear Analog Output Pressure Torr Voltage 1 00E 08 2 00 1 00E 07 3 00 1 00E 06 4 00 1 00E 05 5 00 1 00E 04 6 00 1 00E 03 7 00 1 00E 02 8 00 Sensor is off 10 00 The following chart shows the graphical resul
44. ts of table and formulas above Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure Output Signal Volts dc TP 0 0 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 Pressure Torr 1 0E 01 1 0E 00 See the conditions described above which cause the output to switch to 10VDC 10 VDC InstruTech Inc Page 22 Instruction Manual 7 2 1 8 to 8 7 Vdc 0 8 V decade analog output CCM501 Hornet This scaling provides a 1 8 to 8 7 Vdc 0 8 V decade log linear analog voltage signal proportional to pressure 7 2 1 1 8 to 8 7 Vdc 0 8 V decade analog output Torr A The log linear output signal and pressure are related by the following formulas when units of measurement are in Torr p 19 2 25 volts 12 875 19 3 0 8 logio P Where P is the pressure in Torr and V is the output signal in volts When using this scaling any output higher than 8 7 volts is an over range condition The output voltage is 10 Vdc under the following conditions 1 The sensor is turned off 2 The gauge has not stabilized and no valid pressure signal is detected Log Linear Analog Output Pressure Torr Voltage 1 00E 08 3 90 1 00E 07 4 70 1 00E 06 5 50 1 00E 05 6 30 1 00E 04 7 10 1 00E 03 7 90 1 00E 02 8 70 Sensor is off 10 00
45. u aware of safety considerations A WARNING Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in death or serious injury property damage or economic loss A CAUTION Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic loss NOTICE Identifies information that is critical for successful application and understanding of the product shock HAZARD Labels may be located on or inside the device to alert people that dangerous voltages may be present InstruTech Inc Page 1 Copyright 2011 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Conflat is a registered trademark of Varian Inc Agilent Technologies Lexington MA p n 001587 104 Instruction Manual CCM501 Hornet Table of Contents 1 Introduction General Information kek eke E K k kK KA KAKE KAKA KAKE KA KAKA KA KA KA KA KA KRA 3 1 1 DescriptiON gt gt gt gt N N D KNKDPPPPNPDPD
46. ult 10 Factory pre set sensitivity is always 10 and maybe adjusted by the user if necessary lon Gauge pressure readings are calibrated for nitrogen If you use a different species of gas or mixture of gases other than the 16 gases listed under the GAS TYPE submenu of the SETUP UNIT menu you will be required to either make manual corrections to the pressure readout or compensate the reading The Sensitivity adjustment function of the CCM501 you are using to measure the pressure of a gas other than nitrogen air may be set to compensate the reading Compensating the pressure reading using the Sensitivity adjustment method may not be possible for certain gases if the sensitivity correction factor results in a calculated sensitivity outside the adjustment range User assumes all risks if sensitivity is set to a value different than the factory default setting of 10 CAL FACTORS C There are six sensor calibration factor constants referred to as CAL FACTORS C that are established during factory calibration and pre programmed in the CCM501 electronics These values are also physically marked on sensor assembly below the electronics enclosure The six calibration factors are designated CO C1 C2 InstruTech Inc Page 17 Instruction Manual CCM501 Hornet C3 C4 and C5 and are used to characterize the sensor response over the pressure measurement range of the device This results in enhanced and optimum performance over the entire measurement range
47. version factor to the measurement The specific gas symbol will also be displayed along with its measurement value In this case no correction factor needs to be applied to the CCM501 measurements The user must ensure all operators are aware the display measurement represents the true measurement value specific to the selected gas 2 Using nitrogen as the default gas If you intend to use nitrogen as the default gas even though the gas in use is not nitrogen you can select N2 from the menu but you must manually apply a gas sensitivity correction factor to the displayed measurement and analog output Post a label on your lon gauge display showing the correction factor if you intend to select N2 as the gas and apply manual correction factors verses selecting specific gases from the menu The following table provides some typical correction factors To correct the measurements divide the measured pressure by the correction factors Gas Sensitivity Correction Factors Gas Sensitivity Gas Sensitivity Correction Factor Correction Factor He 0 18 H O 1 12 Ne 0 30 NO 1 16 D 0 35 Ar 1 29 H2 0 46 CO 1 42 N 1 00 Kr 1 94 Air 1 00 SF 2 50 O 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example If the gas in use is argon Ar and the ion gauge display indicates a measured pressure of 1 00E 6 Torr from the table above for lon Gauge Gas Sensitivity Correction Factors the correction fac
48. y is aligned with engraved line on anode Assembly Reinstall the 4 40 SHCS 4 ea 7 Reprogram new sensor CAL FACTORS C values The C values are marked on the sensor End Plate MN AUNE Sensor Replacement ENDPLATE ANODE MAGNET ASSEMBLY ASSEMBLY 4 40X 1 4 SOCKET SENSOR ELECTRONICS HEAD CAP SCREWS AND ENCLOSURE 4 EACH InstruTech Inc Page 31 Instruction Manual 9 7 Cold Cathode Sensor Cleaning CCM501 Hornet The design of Instrutech s cold cathode includes an internal O ring which allows for easy disassembly for cleaning This makes the cold cathode gauge an attractive solution for use in a dirty gas application To clean sensor use the following procedure A Detach sensor from electronics Refer to previous section for instructions B Sensor Disassembly 1 Unscrew Knurled knob 2 Remove anode assembly and O ring 3 Remove flat and wavy washer with magnet Note Set magnet aside where nothing will be attracted C Cleaning Instructions 1 Polish the Anode surface as shown with fine emery paper 2 Polish the inner surface of the Envelope Assembly with fine Emery paper 3 Remove any cleaning debris or residue before Reassembly D Sensor Reassembly 1 Place flat and wavy washer on the magnet assembly 2 Place O ring back on the anode assembly 3 Reinstall anode assembly 4 Make sure the arrow on the magnet assembly is aligned with engraved line on anode assembly 5 Screw knurled knob
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