LTA User Manual - Newport Corporation
Contents
1. 12 1 2 LTA HS and LTA HL AGUUatOrs eiat erret 12 7 3 LTAHSPPV6 and LTAHLPPV6 Actuators sess 13 7 4 Feedback Signal Position 5 n enano Po Pei eere eU eas 13 iii EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators EDH0216En1021 09 15 8 0 3 Dimensions 1 1 5 uA 0C trennen 14 8 1 LTA HL amp LTA HS Actuators eeeeeeeeeeeeeeee nennen een nennen nenne 14 8 2 LTAHSPPVO6 Actuator EP EFE PE EE ELE ERG 15 8 3 LLIAHEPPVO AGt altOE coiere tet eerte tert ie einer terri Ee evvev arnis 15 9 0 Accessories eerte 16 9 1 LTA M12 Adapter for LTA HS 16 9 2 ADAPT BM17 375V6 Adapter for _ 17 10 0 Setting of the Travel Range 18 10 1 LTA HL amp LTA HS Actuators eene 18 10 2 LTAHLPPV6 amp LTAHSPPV6 Actuators eene nenne 19 11 0 Dismantling of the Ball 20 11 1 LTA HL amp LTA HS Actuators ccccccccccsssssssssssssssssssssesssssssssceesencs 20 11 2 ETAL SR PV GA CUUat OL eee ie como trei eed 21 12 0 Maintenance 1 1 nter 22 12 1 Matt OMAN CO eee mte En eser re eo oret prex e roodo EP Fe a 22 12 2 5 ned r2. Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 23 EDH0216En1021 09 15 NNevvport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
3. EN X gt NC 25 17 Red End of Run 18 Grey X X End of Run 21 1 Brown 5 V Encoder 22 7 White i 1 Ground Connector 1 PE Connector Cap Cap 1 Pin 13 of Newport Sub D25M is reserved for internal logic for Newport controller 2 Open collector type with a 5 6 V protective Zener diode For connection to non Newport electronics When a LTA actuator is used with pin 17 and 18 End of Runs must be non Newport controllers using the connected to 5 V with a pull up resistor For SUD D25M connector provided pin some non Newport controllers the 5 V 13 must be connected to 5 V with output signal may be pulled up internally a pull up resistor er _ End of Run EEPROM Enable Newport Stage ln max 16 mA Newport Stage lin max 10 mA Vimax 56V SUB D25M Connector 30V Pin 17 Pin 13 18 1 aol Pull Up Resistor Pull Up Resistor gt 5V gt 5V ee QD Newport EDH0216En1021 09 15 12 xii bins LTA Series Precision Long Travel amp High Speed Motorized Actuators QD Newport Experience Solutions 7 3 7 4 LTAHSPPV6 and LTAHLPPV6 Actuators SUB D25M Connection Connector UE16PPHxV6 gi N C
4. 10 I 1 NC 11 at r i N C 12 N C E Hed Phase 1 2 Red Phase 1 3 1 Phase 1 4 T Green X 1 Phase 1 5 White Phase 2 6 White 1 Phase 2 7 Orange 1 Phase 2 8 I range 1 Phase 2 4c NE 1 Ground 6 1 Ground 3 Blue Reserved 9 X 1 1 Purple Encoder Phase A 23 1 Purple Encoder Phase A 20 Black 1 Encoder Phase B 24 I Black Encoder Phase B 5 1 gt N C 25 N C 1 Pink T End of Run 8 Grey End of Run 21 Brown x 1 45V 22 X Green Ground Connector Connector I LL LLATAAL S Cap 1 Pin 13 of Newport Sub D25M is reserved for internal logic for Newport controller Open collector type with a 5 6 V protective Zener diode For connection to non Newport electronics pin 17 and 18 End of Runs must be connected to 5 V with a pull up resistor For some non Newport controllers the 5 V output signal may be pulled up internally To enable End of Run when a LTA actuator is used with non Newport controllers a pull up resistor must be connected between pins 13 and 21 ex 4 99 kQ Reserved fe fee End of Run Enable Newport Stage lin Max 16 mA Newport Stage lin Max 10 mA Vmax 5 6V 30 Pin 17 Pin 18 R Pull Up Res
5. Incorrect usage Driven load greater than maximum specified load Actuator speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the actuator or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators Table of Contents QD Newport Experience Solutions Warranty CHO I CIT cay decors Gre ede vr ah exei He Ord es ii EC Declaration Of teo al ee v Definitions and Symbols 3 2 9 e hn e ease EH EEEH ERREUR ERREUR AE ERE FEES NUS vi GS TR vii CalatiON ss M S viii 1 0 Introduction serene 1 2 0 DESSC
6. LTA Series Precision Long Travel amp High Speed Motorized Actuators 10 2 LTAHLPPV6 amp LTAHSPPV6 Actuators D Position the actuator at the mechanical zero position Operate a displacement at the needed travel then move of 2 mm Disconnect the actuator from the controller With the Allen key unscrew the lock screw and move it on the rod until the mechanical end of run position Lock it without operating any lateral stress Move back the rod with the manual knob Now you can connect your LTAHxPPV6 actuator to the controller and use it with the new travel range CY Newport Experience Solutions 19 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators 11 0 Dismantling of the Ball Tip WARNING The actuator must be disconnected from any controller before dismantling of the ball tip 11 1 LTA HL amp LTA HS Actuators If you dismantle the ball tip at the end of the actuator rod you will get a M4 LTA HS or M6 LTA HL threaded interface instead LTA HS BALL TIP 5 2 5 ON FLAT SURFACE 0 EC LIES
7. Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0216En1021 09 15 vi Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this actuator when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the actuator immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the actuator yourself as this can be dangerous WARNING Make sure that this actuator is not exposed to moisture and that liquid does not get into the actuator Nevertheless if any liquid has entered the actuator switch off the motor power and then disconnect the ele
8. Run 18 End of Run 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 21 5 V Encoder 21 5 V Encoder 22 Ground 22 Ground 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 25 N C 25 N C D Pin 13 of SUB D25M is reserved for internal logic for Newport controller WARNING The SUB D25 connector supplied with LTAHxPPV6 actuators is not designed for using in a vacuum environment The customer has the responsibility to link the actuator to the bulkhead coupling with its cable removing the supplied connector then to connect the bulkhead coupling and the controller with a cable equipped with the removed SUB D25 connector Newport Experience Solutions 9 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators m Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spille
9. temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this actuator if its motor power is on Make sure that the cable to the electronics is disconnected before moving the actuator Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the actuator is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this actuator always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0216En1021 09 15 viii Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators Precision Long Travel amp High Speed Motorized Actuators LTA Series 1 0 Introduction This manual provides operating instructions for the actuator that you have purchased in the LTA Series e LTA HL LTAHLPPV6 LTA HS LTAHSPPV6 LTA HL down and LTA HS up LTAHxPPV6 motorized actuators vacuum compatible actuators RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the LTA actuator The LTA Series actuator is compatible with most standard Newport manual stages and opto mechanical components like the M 426 Series
10. 0 stage or on a SK or SL optical mount you must use the LTA M12 adapter To do that you have to remove the collet delivered with the LTA HS and put the adapter instead STANDARD LTA HS COLLET TO REM LTA M12 ADAPTER E LTA HS FOR M UMR8 M MVNB80 SL OR SK Newport EDH0216En1021 09 15 16 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators 9 2 ADAPT BM17 375V6 Adapter for LTAHSPPV6 This adapter is designed for the LTAHSPPV6 actuator It allows for mounting to a UMR8V6 MVN80V6 stage and a SLV6 or SKV6 optical mount 9 59 35 B 15 gt 8 D e Sex b J 12 0 5 Y r 83 21 lt 63 gt 16 Y 0 35 20 002 _ _ TE 3 8 40 UNS 2B 9 9 00 24 _ 20 a 2000 lt 6 Adapter Mounting for LTAHSPPVG NOTE The ADAPT BM17 375V6 adapter can only be used with the LTAHSPPVG actuator When you have to fix a LTAHSPPV6 actuator on a M UMR8V6 or M MVN80V6 stage or on a SKV6 or SLV6 optical mount you must use the ADAPT BMI 7 375V6 adapter To do that you have to remove the nut delivered with the LTAHSPPV6 and place the adapter instead STANDARD
11. 0 08 Uni directional Repeatability um 0 5 0 5 0 5 0 6 Bi directional Repeatability um 20 1 2 or 1 2 or 1 2 or 1 On Axis Accuracy um 10 or 5 8 or 3 10 or 5 5 or 2 5 Maximum Speed mm s 5 1 0 5 0 25 Axial Load Capacity Cx 50 120 40 100 Side Load Capacity 5 20 5 10 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 After backlash compensation 3 Avoid side loads during motion 4 With SMC100PP 0 1 mm s for LTAHLPPVG 0 2 mm s for LTAHSPPV6 9 MIM in closed loop 0 15 mm for LTAHLPPV6 0 3 mm for LTAHSPPVG CAUTION Values in the table above are indicated for actuators operating with the rod in Cx direction 3 3 Axial Load Capacity Maximum load an actuator can move while maintaining specifications This value is given with speed and acceleration specified for the actuator LTA HS LTA HL LTAHSPPV6 LTAHSPPV6 Specified Speed mm s 5 1 0 5 0 25 Specified Acceleration mm s 20 4 2 1 This value is given for load along the direction of the motion LTA HS LTA HL LTAHSPPV6 LTAHSPPV6 Cx N 50 120 40 100 Cx N 40 100 40 100 CAUTION Do not apply alternatively Cx and Cx loads during an operating cycle Newport Experience Solutions 5 EDH0216En1
12. 021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators 3 4 Minimal Axial Load CAUTION To reach the specifications stated for LTA actuators a minimum axial load must be applied at the end of the rod LTA HS LTA HL LTAHSPPV6 LTAHSPPV6 Min Cx 25 5 25 2 5 3 5 Actuator Weights Weights indicated are values for actuators with their cable Weight Ib kg LTA HS 0 99 0 45 LTA HL 1 14 0 52 LTAHxPPV6 0 77 0 35 m Drive 4 1 DC Motor Drive LTA HS and LTA HL actuators are driven by a DC servo motor Resolution Speed Mot otor um mm s LTA HS 0 035 5 UE18CC LTA HL 0 0074 1 UE18CC R2 4 2 Stepper Motor Drive LTAHxPPV6 actuators are driven by a stepper motor Resolution Speed Mot otor mm s LTAHSPPV6 0 08 2 0 5 UE16PPHSV6 LTAHLPPV6 0 08 0 25 UE16PPHLV6 D With SMCIO0PP 0 1 mm s for LTAHLPPV6 and 0 2 mm s for LTAHSPPV6 2 MIM in closed loop 0 15 um for LTAHLPPV6 and 0 3 um for LTAHSPPV6 QD Newport EDH0216En1021 09 15 6 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators mn Motor 5 1 Stepper Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport C Phase A Q mH Utilization UE16PPHxV6 15 0 18 12 5 5 5 Mini step 5 2 Command Signals for the Stepper Motors Phase 1 E Direction Phase 2 gt
13. 03 1 97 50 nS 19 5 gt 177 45 HAPA MODEL SHOWN LTAHSPPV6 5 DIMENSIONS IN INCHES AND MILLIMETERS A m gt lt 463 1175 __ gt lt 0 375 3 8 40 UNS THD n 0 9 538 39 0 67 20 2 0 17 A BALL 9 19 5 8 3 LTAHLPPV6 Actuator CABLE LENGTH 4 9 FT 1 5 M AND SUB D25 CONNECTOR 52 40 012 gt g TRAVEL 13 3553 98 25 If VAS 49 5 gt 1 77 45 AY MODEL SHOWN LTAHLPPV6 39 10 DIMENSIONS IN INCHES AND MILLIMETERS A 89 A e gt E 225 2 4 63 117 5 12 lt M12x0 5 THD 39 0 67 20 33 17 A A BALL o 19 5 CY Newport Experience Solutions 15 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators m Accessories NOTE These adapters are not included with LTA actuators and must be ordered separately 9 1 LTA M12 Adapter for LTA HS Actuator This adapter is designed for the LTA HS actuator It allows for mounting to a UMR8 or MVN80 stage and a SL series optical mount MODEL SHOWN LTA M12 DIMENSIONS IN INCHES AND MILLIMETERS M12x0 5 THD 61 9 25 15 5 6 4 NUT 55 gt gt Adapter Mounting for LTA HS When you have to fix a LTA HS actuator on a M UMR 8 or M MVN8
14. 1 E US 49 12 4 USABLE DEPTH 2 5 LTA HL BALL TIP 26 7 ON FLAT SURFACE uy D S 1 1 ES b T 5 BET sra earar 54 13 6 M6 THD USABLE DEPTH 26 7 Cb To do that two flat surfaces are available on both actuator rod and ball tip to remove Lock the rod actuator with a wrench and unscrew the ball tip with an other one Ball tip of the LTA HL actuator CY Newport Experience Solutions EDH0216En1021 09 15 20 LTA Series Precision Long Travel amp High Speed Motorized Actuators 11 2 LTAHSPPV6 Actuator NOTE The dismantling of the ball tip can only be operated on the LTAHSPPV6 actuator If you dismantle the ball tip at the end of the actuator rod you will get a M4 threaded interface instead LTAPPV6 BALL TIP 2 5 ON FLAT SURFACE qa ae M4 THD 12 4 USABLE DEPTH 2 5 To do that two flat surfaces are available on both actuator rod and ball tip to remove Lock the rod actuator with a wrench and unscrew the ball tip with an other one Ball tip of the LTAHSPPV6 actuator Newport Experience Solutions 21 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators 12 0 Mainten
15. Direction Motion gt gt Direction 5 3 DC Motor Characteristics Moto Nominal Max RMS Max Peak Resistance Inductance Y Voltage V Current A Current A Q mH UEI18CCCR2 24 0 15 0 21 54 6 1 19 5 4 Command Signals for the DC Motors Motor v Motor v Motor v pO Displacement Direction Direction Displacement Direction In the above drawings Motor signal is referred to Motor signal Motor v When the actuator moves Direction the Motor voltage is higher than Motor voltage When the actuator moves in Direction the Motor voltage is lower than Motor voltage Newport Experience Solutions 7 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators 5 5 Sensor Position m Home Position H Travel Range gt Displacement Direction End of Run are 5 V open collector type CAUTION End of Run are active signals and should not be connected to any other source 5 6 Feedback Signal Position Encoder Phase A Encoder Phase A Direction a Encoder Phase B Encoder Phase B Direction Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage m
16. FIDIOSB oops addon fi cation pn ead auus 2 2 1 Design Details 1 2 ie I RR nea M FREIER EVER innate 3 3 0 Characterislics eeeen etras 4 Sel Delinitions os eerie eR ENNE 4 3 2 Mechanical Specifications rn 5 3 3 Axial Eoad Capacity indo go eie tn rie re e er e 5 3 4 Minimal Axial eee 6 3 5 Actuator u 5 3 o n a n ERR IE EHE DEBERE Ee BERE ERR FERE DE 6 20 Drive 6 DC Motor Drive rente nee neve ee deinen 6 4 2 Stepper Motor Drive tener ertet ron eter e e eter een 6 50 MOLOE odd deu Una battute tete 7 5 1 Stepper Motor Characteristics essere 7 5 2 Command Signals for the Stepper Motors sss 7 5 3 DC Motor Characteristics essent enne T 5 4 Command Signals for the DC Motors esssseeseeeenees 7 5 5 Sensor uia cen oeste Ye eor ee ede P eee epos 8 5 6 Feedback Signal Position 22i emi s 8 5 7 9 6 0 Connection to Newport 10 6 1 Warnings on 10 6 2 Connection ER REC HERE EXER IERI 11 6 8 11 7 0 Connection to Non Newport Electronics 12 Hil COMMECH OMS iet beers
17. LTA Series Precision Long Travel amp High Speed Motorized Actuators G 54 COMPATIBLE Compliant GO USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed LTA Series Precision Long Travel amp High Speed Motorized Actuators Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDH0216En1021 09 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from
18. LTAPPV6 NUT TO REMOVE C D ADAPT BM17 375V6 ADAPTER r4 LTAHSPPV6 FOR M UMR8V6 M MVN80V6 SLV6 OR SKV6 3 Bu CY Newport Experience Solutions 1 T EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators 10 0 Setting of the Travel Range 10 1 Mir Moira Ti wae Minn Monim aera E EDH0216En1021 09 15 WARNING The actuator must be disconnected from any controller before setting the limit switch LTA HL amp LTA HS Actuators D Position the actuator rod at the travel range required read on the translucent window then move forward the rod of 2 mm Example For a 10 mm travel range place the cursor at the position 12 mm Q Remove the translucent window unscrewing with an Allen key both M2 screws located on each side don t remove the metallic plate located under this window With the Allen key unscrew the lock screw and move it on the rod until the mechanical end of run position Lock it without operating any lateral stress Put back the translucent window and fix it with both screws Move back the rod with the manual knob Now you can connect your LTA actuator to the controller and use it with the new travel range T Q Newport Experience Solutions
19. ance 12 1 12 2 12 3 EDH0216En1021 09 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The LTA actuator requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The LTA actuator must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your LTA actuator to Newport s After Sales Service after every 2000 hours of use for lubrication If your actuator is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the actuator that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your actuator please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a actuator without prior authorization will void your warranty Calibration CAUTION It is recommended to return your LTA actuator to Newport once a year for recalibration to its original specifications T Newport Experience Solutions Service Form Your Local Representative Tel Fax
20. atability Motor LTA HL DC servo UE18CC LTAHLPPV6 Stepper UE16PPHLV6 LTA HS DC servo UE18CC R2 LTAHSPPV6 Stepper UE16PPHSV6 Cable Length 3m 1 5 m SUB D25 connector not vacuum compatible xxxVacuum Compatibility 105 hPa 0 7x107 Torr MTBF 10 000 h at 25 N load and a 10 duty cycle 10 000 h at half load and with a 10 duty cycle 1 See section Setting of the Limit Switch RoHS Compliant NOTE This product complies with the RoHS directive Restriction of Hazardous Substances LTAHxPPV6 into its sachet packaging EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on
21. axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com QD Newport EDH0216En1021 09 15 4 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators 3 2 Mechanical Specifications LTA HS LTA HL LTAHSPPV6 LTAHLPPV6 Travel mm 50 25 50 25 Minimum Incremental Motion um 0 1 0 05 0 08
22. ctronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this actuator this may cause an electric shock or lock the drive Do not use this actuator if any foreign objects have entered the actuator Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this actuator in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this actuator has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this actuator this may cause an electric shock or downgrade its performance Newport tiefe Solone vii EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators Cautions CAUTION Do not place this actuator in a hostile environment such as X Rays hard UV or in any vacuum environment Only LTAHxPPV6 actuators are compatible and can be used in a vacuum environment up to 105 hPa CAUTION Do not place this actuator in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this actuator in places subject to extremely high
23. d on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts QD Newport EDH0216En1021 09 15 10 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators 6 2 Connection On each actuator is represented a label which indicates its name and its serial number This label is located on th
24. e e REESE ED CREER ERREUR RE EH EET ERES 22 12 3 CAND ALI OR rne Ee ertet E e exeo ted Le nen ex ee ERE Decr rad 22 POEM DA vn Api Eee dre 23 Newport iv Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators EC Declaration of Conformity MAS PSO 60 ONG fe DA S NS e A L3 Cy as K SS SUN AS QU OS QU OAS ONG x NAT de NA QD Newport Experience Solutions RRS ROS AS NYIA LTA Series EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description LTA Function Precision long Travel amp High Speed Motorized Actuators Models LTA HS LTA HL LTAHSPPV6 LTAHLPPV6 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measuremen
25. e sachet of the LTAHxPPV6 actuators WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables LTA HS and LTA HL are delivered equipped with a 3 meter cable LTAHSPPV6 and LTAHLPPV6 actuators are delivered with a 1 5 meter cable These cables are equipped with a SUB D25M connector so they can be directly connected to our controllers drivers lt 2 28 58 gt DISCONNECTED LOCKING gt KNOBS 9 24 STAGE CABLE CONNECTOR SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING m STATIC CABLE 2 94 24 CABLE IN MOTION 22 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk WARNING The SUB D25 connector supplied with LTAHxPPV6 actuators is not designed for using in a vacuu
26. istor Pin 13 R Pull Up Resistor 45V Feedback Signal Position Encoder are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 13 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators m Dimensions 8 1 LTA HL amp LTA HS Actuators CABLE LENGTH 5 8 FT 3 M AND MODEL SHOWN LTA HS SUB D25M CONNECTOR DIMENSIONS IN INCHES AND MILLIMETERS 1 77 45 dB Y 39 10 89 fg 4 63 117 5 22 5 0 63 19 m 16 PES LTA HS ROD LTA HL ROD 188002 gt 22 4293 lt 52 20 012 62 gt I 13 3303 gt 15 8 lt gt t ms 9 5 gt lt BALL 19 5 BALL 9 19 5 Lj M12x0 5 THD 37505 3 8 40 UNS THD 9 53 4 QD Newport EDH0216En1021 09 15 14 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators 8 2 LTAHSPPV6 Actuator CABLE LENGTH 4 9 FT 1 5 M AND SUB D25 CONNECTOR gom TRAVEL gt 22 42
27. m environment The customer has the responsibility to link the actuator to the bulkhead coupling with its cable removing the supplied connector then to connect the bulkhead coupling and the controller with a cable equipped with the removed SUB D25 connector Newport Experience Solutions 1 1 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators El Connection to Non Newport Electronics 7 1 7 2 Connections WARNING Newport is not responsible for malfunction or damage to a LTA actuator when it is used with non Newport controllers WARNING Newport guarantees compliance of the LTA actuators only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a LTA actuator is used with non Newport controllers LTA HS and LTA HL Actuators SUB D25M Connection Connector UE18CC R2 9 e 10 i NC 1 2 NC 12 p NC 1 N C 27 1 7 NC 3 1 1 x N C 4 c 1 NC 5 Black i Motor 6 f Black 1 Motor T ma Purple i Motor 8 T Purple i 1 1 Motor 14 f Ground 16 7 White Ground 13 Blue Reserved 19 Yellow Encoder Phase A 23 i Yellow l 1 Encoder Phase A 20 7 Pink 1 Encoder Phase B 24 Pink Encoder Phase B 15
28. nual components A movable limit switch prevents equipment from over travel Its position can be changed in minutes to adjust the max travel position A manual adjustment knob permits quick and intuitive positioning of the actuator while the motor is off On LTA HL and LTA HS actuators convenient marked scales indicate coarse actuator position in both millimeters and inches For optimal performance we recommend the use of our motion controllers LTA actuators are equipped with a cable with a SUB D25 connector for connection to our motion controllers QD Newport EDH0216En1021 09 15 2 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators QD Newport Experience Solutions Design Details LTA HL amp LTA HS LTAHLPPV6 amp LTAHSPPV6 Base Material Stainless steel body Stainless steel body with polycarbonate cover Drive Mechanism Non rotating lead screw Non rotating lead screw rotating nut rotating nut Drive Screw Pitch mm 1 0 Reduction Gear HL Version 1 66 HS Version 1 14 Feedback Motor mounted rotary encoder Motor mounted rotary encoder 2048 cts rev 48 cts rev Limit Switches Optical switches both ends Optical switches both ends max travel limit is adjustable max travel limit is adjustable Origin Uses minimum travel limit for homing Uses minimum travel limit for homing typically lt 4 um repeatability typically lt 4 um repe
29. ove the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector User 0 Encoder Phase A 4 Pin 19 Le Encoder Phase A Pin 423 Encoder Phase Pin 20 T gt ps Encoder Phase B Pin 24 gt Output Signals 21 1 5 T o Encoders if 150 mA max amp Sensors i 0v Power Supply Encoder are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 QD Newport EDH0216En1021 09 15 8 Experience Solutions LTA Series Precision Long Travel amp High Speed Motorized Actuators 5 7 Pinouts The SUB D25 connection for LTA actuators is given in the following table LTA HS amp LTAHL LTAHSPPV6 amp LTAHLPPV6 UE18CCC R2 UE16PPHxV6 1 N C 1 Phase 1 2 N C 2 Phase 1 3 N C 3 Phase 1 4 N G 4 Phase 1 5 Motor 5 Phase 2 6 Motor 6 Phase 2 7 Motor 7 Phase 2 8 Motor 8 Phase 2 9 N C 9 N C ulo E 1 10 N C 10 N C e 11 N C 11 N C ce 12 12 13 Reserved 13 Reserved 14 Ground 14 Ground 9 E 15 N C 15 N C 25 5 16 Ground 16 Ground 17 End of Run 17 End of Run 18 End of
30. t control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director V EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur N The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on
31. translation stage CY Newport Experience Solutions 1 EDH0216En1021 09 15 LTA Series Precision Long Travel amp High Speed Motorized Actuators n Description The LTA actuators provide up to 50 mm motorized travel in a compact package They are designed to fit into your existing manual stages and other opto mechanical components as a direct replacement for manual micrometers The LTA series features a space saving design with the motor and lead screw side by side This cuts the actuator length in half and minimizes the negative effects of long cantilever loads on micro positioning equipment The non rotating tip furthermore prevents wear and avoids periodic motion variations which can be caused by variable contacts made between a rotating tip and the mating surface Precision motion is accomplished by a miniature motor with an optimized output torque e DC servo motor for LTA HL and LTA HS e Stepper motor for LTAHLPPV6 and LTAHSPPV6 This allows for faster motion with higher load capacity HL versions are especially recommended for heavy load applications They feature a stronger 8 mm diameter rod and a M12 x 0 5 thd mounting bezel that is compatible with our UMR8 and MVN80O linear stages and SK and SL series optical mounts HS versions are optimized for high speed applications and provide the longer travel range The mounting interface of these versions is compatible with a large number of Newport and others ma
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