IMS-LM User Manual - Newport Corporation
Contents
1. E L A 9 9 o o 2 amp p o o 7 09 Q 180 o 9 o c o Oo o a oo o o O o OO o o o o Y eee 7 05 179 gt 9 9 83 83 lt 21 21 lt 5 91 150 5 91 150 ai 5 91 150 gt n r n rs EN L A gt i n1 2HOLESCIR FOR M6 SCREW 5 91 6 0 150 152 4 n2x2 HOLES CLR FOR 1 4 20 SCRE V A eee 1 T lt 5 0 127 xis 5 0 127 gt lt 5 0 127 gt MODEL METRIC ni n2 TRAVEL L M IMS300LM 4 4 11 81 300 21 85 555 M IMS400LM 4 4 15 75 400 25 79 655 M IMS500LM 4 6 19 69 500 29 72 755 M IMS600LM 6 6 23 62 600 33 66 855 M IMS800LM 6 31 49 800 44 48 1130 M IMS1000LM 7 39 36 1000 52 35 1330 M IMS1200LM 8 47 23 1200 60 22 1530 M IMS800LM SA 4 HOLES ON 26x6 600x150 31 49 800 44 48 1130 M IMS1000LM SA 4 HOLES 28x6 750x150 39 36 1000 52 35 1330 M IMS1200LM SA 4 HOLES ON 34x6 900x150 47 23 1200 60 22 1530 EDHO208En1030 09 15 IMSSOOLM SA stage 14 Newport Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages 8 2 Top Plate Interface 5 HOLES M5 THD ON 96 85 172. IMS LM Series High Performance Long Travel Linear Motor Stages PLANT Ws Q USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed IMS LM Series High Performance Long Travel Linear Motor Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDHO208En1030 09 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Lo
3. IMS LM stages we have provided wiring conventions and motor characteristics below It should be noted damage caused by improper configuration or operation while in use with non Newport controllers is not covered by the warranty Please refer to Design Details and Specifications for more information to help configure the stage with your controller Newport also provides a tech note on configuring third party stages with Newport controllers on IMS LM website which may be useful as a reference WARNING Newport takes no responsibility for improper functioning or damage of a stage when it is used with any non Newport controllers WARNING e Maximum peak voltage 100 Vpeak Maximum rms current 3 1 Arms Newport Experience Solutions EDHO208En1030 09 15 6 IMS LM Series High Performance Long Travel Linear Motor Stages m Characteristics 6 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angula
4. RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The M IMS LM stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The M IMS LM stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your M IMS LM stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your M IMS LM stage to Newport once a year for recalibration to its original specifications Newport 1 6 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authoriza
5. f the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time QD Newport EDHO208En1030 09 1 5 4 Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts 4 3 Connection On each stage is represented a label which indic
6. Experience Solutions 7 EDH0208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages 6 2 6 3 EDHO208En1030 09 15 Design Details Base Material Extruded Aluminum Bearings Recirculating bearings with caged balls Drive System 3 phase synchronous ironcore linear motor no Hall effect sensors otor Initialization Has to be done by the controller without using Hall effect sensors Feedback Linear steel scale 20 um signal period 1 Vpp Limit Switches Optical Home Switch Optical on encoder s fiducial track located at center of travel ESP Compatibility Yes Cable 5 m long cables included TBF 20 000 hours NOTE This product complies with the RoHS directive Restriction of Hazardous Substances RoHS Compliant Mechanical Specifications IMS LM IMS LM SA Travel Range mm 300 400 500 600 800 1000 1200 800 1000 1200 Minimum Incremental Motion nm 20 Bidirectional Repeatability IMS300 to 600 LM 0 5 or 0 25 1 or 40 5 IMS800 to 1200 LM 1 or 0 5 On Axis Accuracy um IMS300 LM 9 or 4 5 IMS800 LM SA 20 or 10 IMS400 LM 11 or 5 5 IMS1000 LM SA 25 or 12 5 IMS500 LM 15 or 47 5 IMS1200 LM SA 30 or 15 IMS600 and 800 LM 20 or 10 IMS1000 LM 25 or 12 5 IMS1200 LM 30 or 15 Maximum Speed No Load mm s 1000 refer to chart below Maximum Acceleration No Load m s 40 Moving m
7. 25 581 205 732 5 M IMS800LM SA 144 5 16025 564 5 025 565 025 970 25 980 5 M IMS1000LM SA 144 5 160 05 664 5 025 665 025 1170 05 1180 50 M IMS1200LM SA 1445 160 05 764 5 025 765 025 1370 05 1380 50 Sensor Positions ka Stage Travel Range gt Negative Home Position Positive Software Limit Origin Software Limit 06 1 5 for M IMS300 to 600LM 06 1 5 for M IMS300 to 600LM gt 197 5 for M IMS800 to 1200 LM SA 197 5 for M JIMS800 to 1200 LM SA gt 02 5 gt la i QD Newport i T 1 End of Run Limit i l End of Run Limit Li Mechanical Zero nsa c e A iios urse Pe IN IN NN E NS INR LEES EE ESSE ESSI RE ER Index Pulse 1 97 gt 50 pe Direction Motion gt Direction Dimensions in inches and millimeters 11 EDHO208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages El Connectors and Cables 7 1 Pinouts Sub D pin outs for M IMS LM stages are provided in the following tables Motor Connector P1 SUB D9 Male U Motor U Motor V Motor V Motor Thermistor 1 W Motor W Motor Shield Ground Thermistor 2 ojlo Oo ol S Be e Max voltage 96 V e Max rms Current 3 1 A WARNING GROUNDING The stage s protective ground is located on pin 8 of the motor power connector If you are using gr
8. 4 5 HOLES M5 THD 95 39 137 EQUIDISTANT AT 60 EQUIDISTANT AT 60 5 HOLES M4 THD DEPTH 35 9 DEPTH 35 9 ON 93 62 92 EQUIDISTANT AT 60 DEPTH 31 8 eee oo Qi 975 d SQR 7 05 7 SN 179 7 9 9 9 X Summis mid rm ET on 2 0 4 0 3 0 i z 50 248 75 3 62 100 6 0 63 92 150 225 4 25 4 CLEARANCE HOLES FOR 6 SCREW BACK SIDE 4 HOLES M4 THD bh ON 3 94x2 95 100x75 ED E DEPTH 31 8 37 HOLES 1 4 20 M6 THD k 4 q Mj DEPTH 39 10 LI 40 li lt 100 lt ss DIMENSIONS IN INCHES MILLIMETERS 8 3 Cable Chains NOTE IMSLMC for stages with a travel of 300 to 600 mm IMSLMC2 for stages with a travel of 800 to 1200 mm IMSLMC cable chain for routing cables to the stationary base For cable management of XY assemblies please call Newport CARRIAGE FASTENING 2 CHC M4x 31 8 SCREWS gt CABLE CHAIN INTERFAI REVERSIBLE CABLE CHAIN MODEL SHOWN IMS600LM DIMENSIONS IN INCHES AND MILLIMETERS HOLDER FOR RIGHT HAND OUTPUT HOLDER FOR LEFT HAND OUTPUT STAGE FASTENING 2 CHC M4x 39 10 SCREWS Newport Experience Solutions 15 EDH0208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages m Maintenance 9 1 9 2 EDHO208En1030 09 15
9. 8En1030 09 1 5 x Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages High Performance Long Travel Linear Motor Stages IMS LM Series m Introduction This manual provides operating instructions for the IMS LM stage that you have purchased Inside this manual you will find useful information and technical references It is recommended the user download all support documentation from the IMS LM page of the Newport website to have as reference M IMS600LM amp M IMS300LM Stages RECOMMENDATION We recommend you carefully read the chapter Connection to electronics before using the M IMS LM stage GO Newport Experience Solutions 1 EDHO208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages 20 Description EDH0208En1030 09 15 The IMS LM series of linear motor stages are designed for self supporting applications with travel ranges from 300 mm to 1200 mm The stages feature a robust design with high performance at low cost making them cost effective solutions for precision industrial applications such as semiconductor wafer inspection microelectronics test and assembly pick and place DNA sequencing or laser machining The IMS LM SA version with 4 point mounting is ideal for delay lines and other applications with non flat mounting surfaces The IMS LM series utilizes an FEM optimized extruded aluminum body that is extremel
10. Direction T C Positive Temperature Coefficient Thermistor resistance as a function of temperature Motor heating is typically restricted to 20 C with Newport Controllers NOTE The values above indicate voltage induced by energized coil of one phase on next phase coil A positive value for U V would indicate a higher voltage on U relative to V 10 Newport Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages 6 8 Encoder Signal description Voltage wiring Heidenhain standard 1 Vpp Reference mark position see drawing Sensor Positions Resolution Scale pitch 20 um Maximum speed 8 m s Encoder Feedback Signal Position Encoder Phase A Encoder Pao o o 9 Phase A Direction Encoder Lis Phase m Encoder Phase B Direction Motion gt Direction 6 9 Sensor Positions P Y HORA Direction y lt lt X X Values Hard End of Run Mech Home End of Run Hard mm Limit Limit Zero Position Limit Limit M IMS300LM 126 5 128405 279 025 279 5 025 431 05 732 55 M IMS400LM 126 5 128405 3299 329 5925 481 5 732 5 M IMS500LM 126 5 128405 379 025 379 5 025 531 05 732 5 M IMS600LM 126 5 128405 429 025 429 5 0
11. R RRS NA tani BN EN A SOR IQS IQS LILIA SIRI IR IORI IRR Eo IMS LM Series CYS ES a EC Declaration of Conformity Newport SA following Annex 1 Experience Solutions 60 of Directive 2006 42 EC on machinery 49 SALAD 0 The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description IMS LM Function High performance linear stage Models M IMS300 400 500 600 LM the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A EN ISO 60204 1 Safety of machinery Electrical equipment of machines Part 1 General requirements V EDHO208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Sta
12. Sub D15M Connector Encoder coc 4 2 Connector Cap Phase U Motor Phase U Motor Phase V Motor Phase V Motor Phase W Motor Phase W Motor Ground Connector Cap Sub D15F Connector Sub D9F Connector End of Runs amp Thermistance 7 Connector Cap Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B Index Pulse Index Pulse 1 5V N C NC Ground Connector Cap Sub D9M Connector End of Run End of Run Mechanical Zero 1 45V Thermistance 1 Thermistance 2 Ground Connector Cap This is the wiring of the cables that provided with the connection to Newport Controllers for third party controllers we recommend using a cable with similar characteristics Chapters 7 1 Pinouts and 7 2 IMS LM Cable Wiring 13 EDHO208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages m Dimensions 8 1 MODEL SHOWN IMS300LM DIMENSIONS IN INCHES AND MILLIMETERS SIDE VIEW M IMS300LM TO M IMS600LM SIDE VIEW M IMS800LM SA TO M IMS1200LM SA aA 4 36 a gt f 111 IQ Newport yo LJ f y JL 7 09 a 180 ET M IMS LM Stages
13. ad on the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages Table of Contents Warranty octauo I nasa aa e eka cay SR EOUIBED Gere ete vr ah kas ake He Ord es ii EC Declaration Of CODIOEPIIE teo ko k Definitions and Sym Dols ii n e ease FERAE NUS vi d ye kk ea Do sy vii CalitiOn A E ia oo ge is been kone l good ensiy e pie ge ix 1 0 Introduction 7 sse 1 2 0 DeScPFIDIOB co
14. allowed by the hard stops is 8 mm When the stage is used with Newport controllers the factory settings of the software limits prohibit any commanded motion beyond this travel range Nevertheless for safety reasons follow the recommendations Maximum Speed for Hard Stoppers above to minimize risk of mechanical damage in case of failure or incorrect adjustment of parameters 1000 920 The maximum speed of the stage must be limited so that the EL hard stops will always stop the carriage in 8 mm or less to E M avoid any shock between the carriage and stage body I 600 3 520 The graph at left provides stage speed as a function of applied 440 load This curve defines allowed operating conditions to stop 360 within the 8 mm over travel allowed by the hard stops To stop 280 within this distance the user must maintain speed and load NE e m de A CER within this tolerance This graph assumes correct wiring of the electrical end of runs will cut motor power before contact with the hard stop Load on Carriage kg 6 5 Load Characteristics and Stiffness Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications IMS LM IMS LM SA Cz Normal center load capacity on bearings 600 N 100 N kax Angular stiffness Roll 1 urad Nm 2 prad Nm kay Angular stiffness Pitch 0 2 prad Nm 2 yrad N
15. ass kg Carriage 3 5 Interface 1 4 5 Drag force torque Approx 15 N Pitch 8 urad IMS300 to 500 LM 150 or 75 IMS800 LM SA 400 or 200 IMS600 LM 250 or 125 IMS1000 LM SA 450 or 225 IMS800 LM 500 or 250 IMS1200 LM SA 500 or 250 IMS1000 LM 550 or 275 IMS1200 LM 600 or 300 Yaw urad IMS300 LM 100 or 50 300 or 150 IMS400 to 600 LM 150 or 75 IMS800 to 1200 LM 300 or 150 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer Speed depends on the driver 3 To obtain arcsec units divide urad value by 4 8 NOTE The following specifications are controller driver dependent Minimum Incremental Motion MIM Maximum Speed Maximum Acceleration Refer to the IMS LM Series page on www newport com for specifications achievable with specific Newport controller driver combination Newport 8 Eyperience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages CAUTION To reach stated specifications the stages must be fixed on a plane surface with a flatness of 5 pm 6 4 Hard Stop Speed Limitation Versus Load M IMS LM stage uses electrical end of run and elastomer hard stops to stop the carriage as smoothly as possible past the end of runs The overtravel
16. ates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely QD Newport m Experience Solutions EDHO208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages 4 4 Cables M IMS LM stages are delivered with a set of three 5 meter cables that can be directly connected to the Newport controller WARNING IMS LM Series translation stages can only operate with cable lengths of 5 or less WARNING These cables are shielded For correct operation make sure to lock connectors ground continuity provided by cables WARNING Keep the cables at a safe distance from other electrical cables in your environment to avoid potential cross talk Connection to Non Newport Controllers Newport stages can be operated with Non Newport controllers However under such operational conditions Newport makes no guarantee regarding achievable specifications To aid Newport customers using non Newport Controllers with M
17. controllers with outstanding 20 nm Minimum Incremental Motion repeatability and stability Absolute home position and limit signals are incorporated to improve repeatability and reliability while simplifying the design with less electronics and mechanical parts Newport 2 Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages Stage Installation 3 1 3 2 CY Newport Experience Solutions Unpacking The M IMS LM stage will be delivered to your site in packaging designed for safe transport Attached to the body of the stage are handles for safe removal from packaging It is recommended to carefully lift the stage from packaging using these handles The stage will come delivered with a control report that indicates performance of your stage within guaranteed specification These measurements were taken in a controlled environment under flat mounting conditions Mounting Conditions M IMS LM SA stages feature a four point mounting which is ideal for operation on non flat surfaces However it is recommended for all M IMS LM and M IMS LM SA stages that the following mounting conditions be adhered to for best performance Installation Considerations Mounting surface flatness 5 um Payload surface flatness 10 um Mounting Screw torque 7 Nm 3 EDH0208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages m Connection to N
18. e Long Travel Linear Motor Stages WARNING When the IMS LM stage is installed or combined with other instruments in a machine additional testing to directive 2006 42 EC may be required It is the responsibility of the end user or integrator to perform a risk analysis and the necessary tests to conform to the EC directives Newport is not liable for damages caused by not executing this responsibility Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING The magnetic channel included in this device has the potential to disrupt pacemakers Consequently it is recommended that individuals maintain a distance of 1 meter or more from the stage as a precautionary measure WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Never
19. eri ED Reed 13 CY Newport Experience Solutions iii EDH0208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages 8 0 Dimensions 1 ctn 14 8 1 M IMS LM Stages sss rnnt 14 82 Top Plate Interface 15 8 3 Cable erect a tant Ee eue tU 15 9 0 Maintenance 1 2 tte 16 9 1 Mainten t e t eC retia ee PD dsi 16 9 2 ERE E ER YER eek das 16 INEI eY ALOT o E reete terere d deeem aaa a he NNE ate 16 Service POM NT TT UL UT 17 EDHO208En1030 09 15 Newport iv Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages EC Declaration of Conformity 9 ONG S OND ONG QU e SO Se Se Se W S y NS NA YON NS NA QD Newport Experience Solutions NAN SAIS OLS KA S was designed and built in accordance with the following other standards Q0 NF EN 61000 4 2 A SA NF EN 61000 4 3 RAS gt NF EN 61000 4 4 Gr S NF EN 61000 4 6 9 OS NF EN 61000 4 8 oe e amp ORIGINAL DECLARATION 5 x OAS Done in Beaune La Rolande on 26 June 2015 oe Dominique DEVIDAL S Quality Director S AS S L A la FSO OIA CCCo CSS SR
20. ewport Controllers NOTE Visit www newport com for compatible Newport controllers 4 1 Operating with Newport Controllers Drives Newport provides detailed documentation for connecting and configuring M IMS LM stages with compatible Newport controllers drives Newport controllers proprietary plug and play ESP technology will automatically load configuration parameters for the stage based on best factory settings in a no load condition These configurations can be adjusted for optimal operation under various applications and load conditions Refer to documentation available on the IMS LM Series Page for additional information 4 2 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions Specifications listed in this guide are based on operation with Newport Control and Drive Electronics The Newport controllers with ESP technology are delivered with a configuration file that has been developed at the factory for operation in a no load condition for immediate plug and play operation WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way
21. g Travel Linear Motor Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C e Storage Operating altitude 1000 m Storage Operating humidity 85 Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year Newport Experience Solutions ix EDH0208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages QD Newport EDH020
22. ges Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0208En1030 09 1 5 vi Experience Solutions IMS LM Series High Performanc
23. m kaz Angular stiffness Yaw 1 urad Nm 1 urad Nm Q Off center load 0 Cz 1 D 90 D Cantilever distance in mm 6 6 Stage Weights Weight Ib kg LM LM SA IMS300 37 5 17 IMS400 41 9 19 IMS500 46 3 21 IMS600 50 7 23 IMS800 52 9 24 52 9 24 IMS1000 61 7 28 61 7 28 IMS1200 70 5 32 70 5 32 Newport Experience Solutions 9 EDH0208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages EDHO208En1030 09 15 Motor characteristics Direct Drive Brushless Motor agnet Pitch Commutation period 24 mm otor constant 180 N2 W Force sensitivity 38 9 N Arms Back emf constant 31 7 V m s otor resistance 5 6 Q otor inductance 36 mH Thermal resistance 0 7 C W Max speed Max voltage 8 m s 560 V Peak current 6 Arms Peak force 210N ax rms current 3 1 Arms Max rms force 120N Temperature Sensor PIC 1 kQ CAUTION High RMS current will generate motor heating which will degrade characteristics of the stage including such attributes as repeatability accuracy etc Induced Voltages Coil Moving U V Vw U w EHA07248 2 2500 15 2000 1 o 05 1500 8 8 0 E E c lt 0 5 1000 1 500 1 5 2 0 50 0 50 100 150 Motion 39
24. oper tne bi on on eld orans 2 3 0 Stage Installation onerare e babeo tons 3 31 Unpacking m 3 3 4 Mounting Conditions ooi a aE EEEE E 3 4 0 Connection to Newport ControlletS 4 4 1 Operating with Newport Controllers Drives eese 4 42 Warnings on Controllers eene 4 4 3 COMECON caos arm tied van asa depan IG ee erts 5 penc 6 5 0 Connection to Non Newport Controllers 6 6 0 Characteristics sse 7 D finitions oen en tenete t E i 6 2 Design Details 5 enmt nere e e E P e eds 8 6 3 Mechanical Specifications seen 8 6 4 Hard Stop Speed Limitation Versus 9 6 5 Load Characteristics and Stiffness sese 9 SROMESTEDISR ETONE Sit e a ka SU ok a 9 6 7 Motor characteristics Direct Drive Brushless MOotoFr 10 6 8 EnO a kar t 11 6 9 Sensor POSItiOIS iiie itera 11 7 0 Connectors and Cables 1 12 Micky edo ote o o ene OU RD DROVE D 12 Motor Connector PI SUB D9 Male sese 12 Encoder Connector P2 SUB D15 Male 12 End of Runs amp Thermistor Connector SUB D9 Female 12 1 2 IMS LM Cable Wiring oin Gita e
25. ounds other than those provided by Newport you must connect pin 8 to a ground connection Encoder Connector P2 SUB D15 Male 1 Encoder Phase B 2 Shield Ground 3 EncoderPhase A 4 Encoder Power 5 V 5 gt 1 8 6 7 ndex Pulse 1 Es Encoder Phase 3 n 10 11 Encoder Phase A 12 C 13 14 Index Pulse 15 End of Runs amp Thermistor Connector P3 SUB D9 Female 1 End of Run 2 End of Run 3 Mechanical Zero 4 5 EORPower 51 6 7 8 9 Thermistor 1 Shield Ground Thermistor 2 Shield Ground Newport EDH0208En1030 09 15 12 Experience Solutions IMS LM Series High Performance Long Travel Linear Motor Stages QD Newport Experience Solutions 7 2 IMS LM Cable Wiring All M IMS LM stages are delivered with the three cables required for operation The wiring diagrams and connectors for these cables are provided in the following diagrams When operating the non Newport controllers it is recommended to adhere to the wiring conventions presented here and to use cabling with similar characteristics WARNING Newport guarantees compliance of the M IMS LM translation stages only if they are used with Newport cables and controllers Sub D9M Connector Motor 8 Sub D9F Connector
26. r deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com Newport
27. theless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs Newport tiefe Solone vii EDHO208En1030 09 15 IMS LM Series High Performance Long Travel Linear Motor Stages EDHO208En1030 09 15 WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit WARNING Do not exceed speed and load limitations as specified in this manual Newport viii Experience Solutions IMS LM Series High Performance Lon
28. tion Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions Ti EDHO208En1030 09 15 Newport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
29. y stiff and minimizes bending caused by different thermal expansion coefficients of the aluminum body and steel rails Unlike screw driven stages the IMS LM employs a center driven linear motor This linear motor is absolutely noise free and has the advantage of higher speed acceleration and system responsiveness without wear on motor brushes or drive screws Due to the fully integrated linear motor the IMS LM is more than 100 mm shorter in length than a comparable screw driven stage Thus the IMS LM is the optimum solution for space constrained applications that require high throughput high reliability and ultra quiet operation The IMS LM uses a high efficiency 3 phase synchronous ironcore linear motor While ironcore linear motors are often criticized for their cogging and high attractive forces their efficiency is almost twice the efficiency of ironless linear motors This results in higher acceleration capability and significantly less heat generation which often limits performance of rapid point to point positioning Recirculating ball bearing slides with caged balls provide excellent payload capacity and long life The ball separators in the recirculating elements ensure superior smooth movement lower noise and longer service life compared to uncaged ball bearing slides Precision position feedback is supplied by a highly repeatable linear scale mounted inside the stage The encoder signals are interpolated by Newport s motion
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