クリーンルーム用 エキゾーストフィルタ
Contents
1.2. 1 I 3
3. ec Rr ait ai
4. 1 1 2 1 X 9 3 1 L min ANR 200 300 400 500 600 700 800 mm s g32 400mm s 0 5MPaG 1 95L min ANR 2
5. NBR 2 SFE11 M5 EE me 0 01um 7 200 M 30dB A XxX AMP XX SFE Series CAT S120 6B New PEE EZ 130 200 Tu x pe_ t e e SFE Series
6. ISO IEC IS 2 4 1 ISO 4414 Pneumatic fluid power General rules relating to systems ISO 4413 Hydraulic fluid power General rules relating to systems N i oe no A IEC 60204 1 Safety of machinery Electrical eduipment of machines Part 1 General requirements ISO 10218 1992 Manipulating industrial robots Safety JIS B 8370 JIS B 8361 JIS B 9960 1 1 JIS B 8433 1993 2 I I I I I I g
7. SFE 0 1MPa 1 2 P 2 3 4 SFE SFE 5 6 3 SFE11 SFE42 52 53 73 SFE4B 5C 7D SFE series mm A B C SFE42 R1 8 SFE52 R1 8 SFE53 R1 4 SFE73 NU mm A B C SFE4B 6 73 16 5 SFE5C 8 84 20 5 SFE7D 24 SFE Series
8. 2 SFE MPaj 20 40 60 80 100 120 140 160 180 200 L min AN R 80L min ANR SFE5 SFE7 SFE5 SFE7 SFE Series SFE _ 3 SFE3H_ 4 a 5 SFE5L _ rr SFE11 SFE3H _ SEE4H SFEBH __ SFE7L 3L min ANR lt 30L min ANR 65Lmin ANR 130L min ANR 200L min ANR 0 0 1um 99 99 30dB A 4 PBT PP EPDM 5 0 ig 5 5g 8g 16g9 249 12g 2 5g 3 59 5 5g a a TE PPA
9. 30 0 2N m EA P EB AM AMD AMH http www smcworld com SMC
10. N 1 2 3 4 5 6 1 1 1 2 2 2 SFE 0 1MPa 3 lt
11. 1 2 3 4 2 SMC M 03 3
12. 0 5 0 1 95 Ws 114L min ANR 2 3 i 9 SR
13. 1 1 5 3 3 3 5 1 1 mn e
14. SFE3F g4 KP SFE4G 5H 7J gA KP SFE7J _ 10 189 24 SFE BR3 SFE series 1 1 2 M
15. N KP KP CC KP
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