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Keysight Technologies E5250A 低リーク・スイッチ・メインフレーム

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1. 2 18 Keysight E5250A 12 3 KEYSIGHT TECHNOLOGIES NOTE EAC Keysight E5250A LED 3 ES3230A E35250A
2. Figure 4 2 INTLK Interlock switch LED Connector side Wiring side SMU
3. SCPI 1 HP BASIC SP MUX M GET GET SP MUX M 2 2 FIND CALL Bias _ source on CArr Bia8 source off 3 OUTPUT SOUR XXX
4. 23 C 5 C lt 60 RH 10 2 Keysight E5250A 12 001 501 5 C 40 C 40 C 70 C 5 80 RH 5 90 RH 65 C 0 2 000 m 6 500 ft 0 15 240 m 30 000 fD 100 240 V E10 30 60 Hz 100 VA EMC IEC 61326 1 EN 61326 1 ICES NMB 001 AS NZS CISPR 11 KC RRA Notification amending Radio Waves Act Article 58 2 IEC 61010 1 EN 61010 1 CAN CSA C22 2 No 61010 1 4 30 mm 001 30 mm uN x 424 mm 301 30 mm
5. Keysight Keysight Keysight FAR 12 211 12 212
6. hpe3230a_ compenC p 6 27 ViStatus VI FUNC hpe5250a selectCompenFile ViSession Vi ViString file name vi hpe5250a_init file name NULL DATA0S 06 DATA07 08
7. 8 Figure 7 3 ES250A STATUS SUMMARY SRQ to Controller MESSAGES Not Used RQS js read by Y Y Y 0 Serlal Poll Se VIC RQS Request 7 16 EsBMAM 3121110 Status Byte Reglster Generatio MSS MSS js read by XSTB Logical OR Service Request Enable Register 7 51413121110 xSRE XSRE PGO04003 120x120 Keysight E5250A 12 7 53 re Figure 7 4 Table 7 4
8. 3000 Card0 initialization fail ES250A 3001 Card1 initialization fail E5250A 1 E325SA DIP 3002 Card2 initialization fail E5250A 2 E325SA DIP 3003 Card3 initialization fail E5250A 3 E5255A DIP
9. 1 2 3 4 5 6 5 4 Keysight E5250A 12 Keysight E5250A HP BASIC
10. Device No XX can be used Device No XX shall not be used 1dlin Gmmax Vtext Vtci Figure 9 7 Figure 9 7 BRAPHALIST BEHAPHILS MEETIMH B5FEB17 11 PH 1H11n BmBK VtBKt YEF1 HBHSUPBBHt MaRKER EURBDR BlB 553BE3BEmWV 1 HUUUUUUUUUA 7 5nUUUUDUnnu MARKER 94U UUUUUUUUWV 179 H7UUUUUUUA BiB I75UUUUUU DN ta Td1in 175B05BOD0ODWA i MARKER g DDm 1 5UW MTNJMAW THTER Ip Gm F
11. OFF ROUTe BIAS STATe 7 1 2 CO 6 5 12 Keysight E5250A 12 Figure 5 2 C on Input 01 Bias Port e Input 02 Input 03 Input 10 OO Output Port w _ 0 0 Open 2 Close Connect to Bias port Connect to Input 3 Connect to Input 1 Figure 5 2
12. MM it 4 9 4 Keysight E5250A 12 Vth Vth ES250A 4133 4156 ES230A ES252A 1 10101 10202 10303 10404 2 3 4 4155 4156 L gt EX E ES3232 MES 4135 4136 4133 4156 GET SMU 1H E SMU VNAME INAME MODE FUNCTION Source Setup SMU1 Vd Id V CONST SV SMU2 Vg lg V VAR1 0 5 VS0 mV SMU3 Vs Is COMMON CONST Common SMU4 Vsb Isb V CONST 0V
13. 2001 Invalid channel number E5250A 2006 Command not supported on this 2009 Too many channels in channel list ES3252A x 120 E5255A x48 2011 Empty channel list 2012 Invalid channel range ES3230A Keysight E5250A 12 11 11 Table 11 6 TR
14. 3 ES23SA BIAS BNC 0 SCPI Table 3 2 DIAG DIAG E5250A NORMAL AUTO ALL Fail LED E5250A 3 6 Keysight E5250A 12 2 Table 3 2 SCPI
15. Fail B3250A LED ES250A EE 1 4 Keysight E5250A 12 CAUTION Figure 1 2 Keysight E5250A Figure 1 2 E5250A 4 10 SMU INPUT AUX INPUT SMU INPUT
16. 6 12 Keysight E5250A 12 Figure 6 1 ZN E5252A E3230A Figure 6 1 BE3S250A E5252A MOSFET to 2 Instrument a 3 2 3 Drai n Substrate Source ES250A 1 E3252A 2 4 E5250A SMU 1 4 SMU 5 6 AUX ES2S2A 1 4 1
17. MEMORY SETUP PANEL CHANGE Current Setup Memory CHAN H COMMENT NEXT CARD SWITCH 49 96 PAGE 1 48 49 96 NEXT SETUP ES250A PREV SETUP ES250A GOTO
18. NN I EE ana A MN ee Rh i ON i E TISO A
19. Keysight 41SS 41S6 4155 4156 Keysight 16493 4155 4156 Intlk 4 10 Keysight E5250A 12 NOTE Keysight 4153 4156 1 4155 4156 Intlk 2 system CALIB DIAG SYSTEM SELF CALIBRATION DIAGNOSTICS EXECUTE CALIB DIAG DIAG CATEGORY 1O PERIPH
20. Keysight 16495 Installation Guide 5 8ch 16494E E325SA DUT DUT ES230A ES250A E5250A ES J o 4 2
21. WARNING WARNING CAUTION gt gt I i 2 1
22. hpe3230a errorQueryDetect ViStatus VI FUNC hpe 230a error query ViSession vi ViPInt32 error number ViChar VI FAR error message Vi hpe3230a init error number error messagel 236 hpeS2S0a errorOueryDetect ViStatus VI FUNC hpe5250a errorQueryDetect ViSession vi ViBoolean errorQueryDetectD Vi hpe3230a init errorOueryDetect VI TRUE VI FALSE hpeS2S0a errorOueryDetect Q ViStatus VI FUNC hpe5250a errorQueryDetect_Q ViSession vi ViPBoolean pErrDetect
23. 0 1 ROUTe CLOSe LIST channel list channel_list p 5 1 close_status lt newline gt lt END gt 1 0 OUTPUT Hp5250 ROUT CLOS 10101 10202 OUTPUT Hp5250 ROUT CLOS 10101 10102 10201 10202 ENTER Hp5250 AS A L000 Keysight E5250A 12 7 33 She v ROUTe CONNection RULE ROUHel CONNection RULE p 5 1 RST ROUTe CONNect1on RULE card number rule card_number
24. SELF TEST 4133 4156 E5250A SELF TEST MENU CARD1 1 NN CARD2 2 BREAY CARD3 3 RELAY CARD4 4 RELAY CONTROLLER FRONT PANEL MAIN MENU 4155 4156 P F N
25. 1 2 E5250A INPUT 3 10 em Close 1 2 3 12 1 2 3 12 oS Open E5252A Card 1 Output E5252A Card 2 Output CAUTION 1 ES250A 5 10 Keysight E5250A 12 NOTE Table S 3 p 5 10 ROUTe CONNection SEQuence p 7 1
26. 10 ViStatus VI FUNC hpe5250a testExec_ Q ViSession vi Vilnt16 framecard exec ViPInt16 exec result vi hpe5250a_init framecard exec 1 1 2 3 4 gt J0 WW Ww tw exec_result 0 hpeS2S0a timeOut IO ViStatus VI FUNC hpe5230a timeOut ViSession vi Vilnt32 timeOut vi hpe5250a_init timeOut 0 2147483647
27. p 1 p 7 1 Table 6 1 SCPI E3250A ROUTe E5250A DIAGnostic SYSTem SCPI p 7 1 Keysight E5250A 12 6 5 Pi HP BASIC Table 6 1 1 ROUT FUNC channel_config NCON 2 ROUT CONN RULE cg77 7o ru
28. ES2S2A 1 2 3 4 5 6 1 Tr 6 18 Keysight E5250A 12 10 Example Using Couple Port 20 30 TNTEGER Complete 40 DIM Channe1S 100 50 Substrate Gate Drain Source 60 Channe18 101 202 303 505 70 80 Put Instrument Initialize Routine here 90 100 ASSIGN Hp5250 TO 722 110 OUTPUT Hp5250 RST 120 OUTPUT Hp5250 ROUT FUNC ACON 130 OUTPUT Hp5250 ROUT CONN RULE ALL SROU 140 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM 40 channel_ list Channels 60 eg77e7 zs7 80 110 E5250A 120 130
29. p 5 1 ROUTe COUPle STATe card number card_ number 0 1 2 3 4 mode_status lt mnew11ne gt lt END gt 0 OFF 1 ON OUT OUT EN PUT Hp5250 ROUT COUP STAT PUT Hp5250 ROUT COUP STAT ER Hp5250 A A 1 ALL ON 2 Keysight E5250A 12 7 39 er Fo ROUTe FUNCtion ROUTel FUNCtion c gzze list card_number p 5 1 ROUT FUNC SYSTem CPON ALL
30. 7 50 Keysight E5250A 12 Figure 7 2 ES E5250A ESB MAV Output Queue 6 RQS E5250A Figure 7 2 Table 7 3 ES250A STATUS MMARY MESSAGES from Not Used RQS js read by lt Serial Pol MAV Status Byte 4 3 2 0 Register MSS lt MSSis read by xSTB Not Used RQS 6 Standard Event Output Queue Tl OT
31. 300 Device specific error 311 Memory error E5250A 350 Queue overflow Error Queue 11 8 Keysight E5250A 12 Query Query ES230A Output Queue 4XX
32. Lo 1 ro OFF RST OFF ROUTe BIAS Cg7 77777 e state STATe cg7 number state 0 ALL 1 2 3 4 ALL ON 1 ON OFF 0 OFF OUTPUT Hp5250 ROUT BTAS STAT ALL ON 7 30 Keysight E5250A 12 ROUTel BIAS STATe ROUTe BIAS STATe ON OFF ROUTe BTAS STATe cg7 number card_number 0 1 mode_status lt mnew11n
33. ES250A ON E5250A Local Self Test 1 BS250A ON 2 Local Self Test LED System Fail LED Fail LED ES5250A E3250A 301 BNC ES23SA 1 3 1 ES250A 2
34. eg7ze list 1 0 ROUTe BIAS CHANne DTSab e LIST channel list channel_Tlist channel ist p 5 1 cgzze 7s7 disable_status disable_status lt new11ne gt lt 0 EE END gt 1 OUTPUT Hp5250 ROUT BTAS CHAN ENAB CARD ALL OUTPUT Hp5250 ROUT BTAS CHAN DTS OUTPUT Hp5250 ROUT BTAS CHAN DTS ENTER Hp5250 AS 10101 10101 10102 10201 A 0 10101 10201 7 24 Keysight E5250A
35. E5250A 0 60 Hz 100 240 V 10 AC B1300A 100 VA WARNING 3 NOTE AC AC
36. 2 12 Keysight E5250A 12 24 1IV 1 Figure 2 3 24 3 BIAS 1 IV 1 24 1 BIAS 1 IV 1 96 1 BIAS 1 IV 4 24 T 3 lt P BE ES255A 1 IAS 1 IV Ivin1 cable 1 SMU5 rF SMU3 2 Ivin2 cable IVin3 cable 3 BIAS Figure 2 3 SMU INPUT 1 IV 0 Q
37. Keysight 4284A LCR E3250A CV1 CV2 HP BASIC 4284A 1 p 6 27 VFP VFP ES250A HP BASIC HP BASIC Cp 6 21
38. ES325SA BIAS INPUT ES3252A Es250A INPUT 1 10 ON ON oo 1 GAC CO
39. Figure 5 3 1 2 ON 0105 2 0105 0206 0105 4 0105 0106 0205 0206 2XN 1 INPUT 2XN 2XM 1 2XM OUTPUT OUTPUT 1 Connect condition 2 Disconnect condition N 1 to 5 O SR M 1 to 6 for Normal Config Open M 1 to 24 max for Auto Config E5250A ES3232A Keysight E5250A 12 5 15 Table 5 5 NOTE ES5252A ES252A ES5252A
40. 5 35 x RNN DELETE SETUP Input setup memory number to be deleted ENTER to cancel Enter 12 12 13 24 24 Open All gnter INSERT SETUP Input setup memory number to be ingserted ENTER to cancel Enter 12
41. Vgstr Vdstr Vgstr 2 Vdstr Id Vd 9 28 2 Idlin Gmmax Vtext Vtci PARAM MES 3 1 2 100 000 Idlin 10 Gmmax 10 Vtext 20 mV Vtci
42. CLOSE ROW MORE 1 RETURN Table 5 10 3 OPEN ALL DISABLE ROW ENABLE ROW MORE 1 RETURN Table 5 10
43. ViStatus VI FUNC hpe5250a openList O ViSession Vi Vilnt32 VI FAR openchan list Vilnt32 VI FAR open status vi hpe5250a_init openchan list 5 ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 open status openchan list 1 0 Keysight E5250A 12 8 27 VXTplug amp play hpe5250a readStatusByte O hpeS2S0a_readStatusByte Q ViStatus VI FUNC hpe5250a readStatusByte_ Q ViSession vi ViPInt16 statusByte Vi hpe5230a init statusByte
44. E5252A hpe5230a_ coupleState ViStatus VI FUNC hpe5250a couplePort ViSession Vi Vilnt16 coupleport cardno Vilnt16 portl ViInt16 port3 Vilnt16 port5 Vilnt16 port7 Vilnt16 port9 vi hpe3230a init coupleport cardno 1 2 3 4 5 0 hpe3230a func portl 1 1 2 0 1 2 port3 1 3 4 0 3 4 ports 1 5 6 0 5 6
45. Keysight E5250A 12 11 9 E Query ES2S0A E5250A E3230A Error Queue 3 SCPI p 11 8 11 10 Keysight E5250A 12 Table 11 5 2000 Invalid card number
46. Keysight E5250A 12 3 9 Table 3 3 Keysight 4153 4136 TBASIC ES325S0A Table 3 1
47. 223 Too much data BE3S5250A 224 Illegal parameter value E5250A 260 Expression error Keysight E5250A 12 11 7 eR E3230A 3XY Error Queue 3 SCPI E32350A E3230A 11 10 Table 11 3
48. card_number 0 arr 1 2 3 4 Ar ROUT BTAS CHAN ENAB LIST channel fist cg77e 7 7s ROUT BIAS CHAN ENAB LIST channel ist 0 1 channel_ist ROUT BTAS PORT card number bias_port ES5252A card_number 0 Ar 1 2 3 4 ALL gs port 1 10 ROUT BIAS PORT card number E3252A card_number 0 1 2 3 4 12 4 Keysight E5250A 12 SCPI ROUT BTIAS STAT card number state
49. SCPI SCPI SCPI p 7 1 GPIB BNC E5255A 1 3 1 E3230A Figure 3 1 Relay Test 2
50. HP BASIC E3230A Keysight 4155 4156 Keysight 4284A LCR HP BASIC Ni 9 2 Keysight E5250A
51. 3 Figure 3 1 ES3230A 4 Relay Test 5 ES255A a BIAS b BIAS BNC 6 Remote LED Local Self Test 7 Local Self Test 8 Local Self Test LED 3 4 Keysight E5250A 12 NOTE Fail LED ES32
52. BLOCK1 BIAS 1 51 1 8 BLOCK2 BIAS 2 52 9 16 BLOCK3 BIAS 3 53 17 24 Figure 1 6 ES2SSA BIAS INPUT OUTPUT mer mmm om Sree dh ee WARNING ES2S0A ES2SSA 200 Vac CAUTION 200 Vdc 1 Adc 300 Vdc I EN 1 Adc 1 10 Keysight E5250A 12 WARNING ES2SSA 1 ES2SSA 1
53. OR EHP 3 ViStatus VI FUNC hpe5250a biasState ViSession vi Vilnt16 biasstate cardno Vilnt16 state Vi init biasstate cardno 2 1 2 3 4 5 0 hpe5250a func state 0O OFF 1 ON 8 10 Keysight E5250A 12 2 VXTplug amp play hpe3230a close hpeS2S0a close E5250A E5250A ViStatus VI FUNC hpe5250a close ViSession vi vi hpe5250a_init hpeS2S0a closeCard Q closecha
54. 6 CS80 702 1 MST CS80 702 1 7 SP _ MAT GET PROG P MAT GET SP MAT RE STORE P MAT 8 C COMPEN GET PROG C COM GET C_ COMPEN RE STORE C COM p 6 27 Keysight E5250A 12 9 9 1 MAT LOA
55. DFARS 252 227 7015 DFARS 227 7202 3 Declaration of Conformity http www key sight com go conformity Search Keysight Technologies http Www keysightcom www keysight jp KEYSIGHT TECHNOLOGIES COMPLIANCE WITH GERMAN NOISE REQUIREMENTS This js to declare that this product is in conformance wrth t
56. SCPI ES250A SCPI HP BASIC ES250A HP BASIC ES250A E5250A VFP ES230A SCPI p 7 1 E5250A 9 1 E3230A
57. VFP HP BASIC 6 2 Keysight E5250A 12 NOTE SCPI SCPI Keysight E5250A SCPI HP BASIC SCPI HP BASIC SCPI SCPI ROUT CONN RULE ROUT CONN 1 RULE 2
58. ROUTe BIAS CHANne1 DTSab1e LIST channel_list channel list channel list p 1 channel list OUTPUT Hp5250 ROUT BTAS CHAN DTS 10301 10402 1 1 2 Keysight E5250A 12 7 23 Zs PR ROUTe BIAS CHANnel DISable LISTI ROUTHel BIAS CHANnel DISablel LIST egze list
59. B sb
60. ROUTe CONNection RULE p 7 34 RST Break before make ROUTe CONNection SEQuence card number sequence card_number 0 ALL 1 2 3 4 ALL segquence NSEQ BBM MBBR OUTPUT Hp5250 ROUT CONN SEO ALL MBBR ROUHel CONNection SEOuence ROUTe CONNection SEQuence card number card_number 0 1 2 3 4 Sequence_status lt newline gt lt END gt NSEQ BBM MBBR OUTPUT Hp5250 ROUT CONN SEO ALL MBBR OUTPUT Hp5250 ROUT CONN SEQ 0 ENTER Hp5250 AS A MBBR Keysight E52
61. BS230A 24 1 24 1 MOSFET Vth 1 ES3230A VFP 4153 4136
62. 3004 Card4 initialization fail E5250A 4 E 25SA DIP 3011 Bad couple port number 1 3 7 9 3012 Bad bias port number 1 10 11 12 Keysight E5250A 12 9 0 3013 Cannot connect multiple channels in SROUTe mode 1
63. ROUT CONN RULE ALL FREE SEQ ALL BBM 2 ROUT CONN RULE ALL FREE ROUT CONN SEQ ALLJBBM Keysight E5250A 12 6 3 Ps HP BASIC HP BASIC ASSIGN E5250A LO l 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 7 ES250A GPIB 22 10 ASSTGN Hp5250 TO 722 E5250A SCPI OUTPUT E5250A ENTER RS ASSIGN PU PU PU PU PU OUTPU H H H H H H H REAL Complete p5250 TO 722 Dp5250 RST p5250 p5250 p5250 p5250 ROUT ROUT ROUT ROUT FUNC NCO
64. ES5252A Table 5 5 1 2 2 5 ES2S2A 5 4 1 2 2 1 1 01 10 01 12 2 2 01 10 01 12 3 3 01 10 01 12 4 4 01 10 01 12 1 1 4 4 2 01 10 2 01 12 Figure 5 4 1 SMUS HF1 CV1 0 07 09 SMU6 HF2 CV2 06 08 10
65. BBM Break Before Make OFF E5252A 10 E5255A OFF card_number 7 46 SYSTem CPON card number 0 ALL OUTPUT Hp5250j SYST CPON ALL 1 2 3 4 ALL Keysight E5250A 12 EPIAR SYSlem CTYPe SYSTem CTYPe ID SYSTem CTYPe card number card_number 0 1 2 3 4 HEWLETT PACKARD model 0 revision lt new11ne gt lt END gt model ES252A ES235A revision A 01 00
66. Keysight 4153 4136 E5250A 4133 4136 TBASIC Keysight 4153 4136 ES 250A 1
67. ES250A E5250A Keysight ES2S0A 200 Vdc ES2S0A 3 AC ES2S0A ES2S0A eR 2 2 Keysight E5250A 12 Keysight E5250A
68. 11 3 14 11 lt 10 3 63 5 8 2 i 4 6 Keysight E5250A 12 Table 4 2 12352 1419 6 N1254A 402 3101 3241 1430 0641 LED Vr 2 1 V Ir 10 mA 8150 5680 24 AWG 600 V 150 C E5252A 1250 2457 8121 1191 E5255A 1251 2367 1231 0179 1 8 0380 3070 1 2 2260 0002 1 2 2190 0913 1 2 8121 1191 Keysight E5250A 12 Figure 4 2 WARNING
69. 6 32 Keysight E5250A 12 7 KEYSIGHT TECHNOLOGIES Ss Keysight ES250A Keysight ES250A SCPI SCPI Standard Commands for Programmable Instruments IEEE 488 1 IEEE 488 2 NON SCPI 2 IEEE 488 2 RST Keysight E5250A
70. p 7 49 10 10 0 1 OPC Operation Complete 1 2 2 4 QYE Query Error 3 8 DDE Device Dependent Error 4 16 EXE Execution Error 5 32 CME Command Error 6 64 7 128 PON Power On 4 CME OUTPUT Hp5250 ESE 32 10 OUTPUT Hp5250 ESE H20 16 OUTPUT Hp5250 ESE Q40 8 OUTPUT Hp5250 ESE B100000 Query OUTPUT Hp5250 ESE ENTER Hp5250 A 7 6 Keysight E5250A 12 ESR PIT ESR
71. END 7 56 Keysight E5250A 12 8 VXlplug amp play KEYSIGHT TECHNOLOGIES VXTplug amp play Keysight E5250A VXlplug amp play Keysight E5250A 12 NOTE VXTplug amp play Microsoft Windows 7 Professional Windows Vista Business Windows XP Professional VISA IO Microsoft Visual Basic Microsoft Visual C Borland C Builder National Instruments LabWindows National Imstruments LabVIEW Keysight VEE VISA IO oO GPIB IEEE 4
72. 1 a o Keysight E5250A 12 E Keysight Technologies http www keysight com ES230A 1 13 E5250A VFP Keysight 4153 4136 IBASIC E3230A VFP VFP HP BASIC WS HP BASIC WS Keysight 4284A LCR ES250A E5252A HP BASIC WS
73. Tdc Keysight E5250A 12 9 33 3 1 Tdc 1 4133 4156 Figure 9 9 4155 4156 DAT 4 Continue 3 ALL 4155 4136 3 4133 4136
74. UP LEFT RIGHT DOWN 4155 4156 1 IVS Input HF1 Input 7 CV1 Imput 9 2 IV6 Input 6 HF2 Input 8 CV2 Imput 10 IVS HF1 CV1 1 OPEN CLOSE NN EN ON ON
75. lt VFP o Keysight E5250A 12 NOTE HCI MOSFET Hot Carrier Induced degradation JEDEC 29 JULY 93 MOSFET HCI 2 SP MUX M JEDEC 29 JULY 93 SP MUX A E3233A ES250A Keysight 4155 4156
76. E5250A 1 E5255A 24 8x3 3 4155 4156 1 41301 SMU PGU 1 16494A 001 1 002 1 5m 3m 16494A 003 80 cm 3 16494D 001 8ch 9 002 1 5m 3m 16495D 1 10833A B C GPIB 5 E5250 17002 ES5250A 1 3 BNC 3 3 5 a 9 22 Keysight E5250A 12
77. VEP HP BASIC p 6 1 VFP Break Before Make Keysight E5250A 12 5 27 VFP Keysight Keysight 4155 4156 1 10833A B C GPIB 1 E5250 17003 E5250A 1 VFP 1 Keysight E5250A Keysight 4155 4156 ON
78. MEMORY SAVE LOAD QUIT VFP SHOW CONFIG SHOW CONFIGURATION MENU ES25S0A E5252A E5252A 10x12 Matrix Switch E5255A E5255A 24 8x3 Block 1 Tnpu 1 Block 2 Tnpu 2 Block 3 Tnpu 3 mputN N 1 6 Channe Multiplexer No Resistance No Resistance No Resistance With Resistance No Resistance Keysight E5250A 12
79. TIEEE 488 2 Qp 7 4 SCPI Output Queue SRQ OPC Keysight E5250A 12 7 49 Figure 7 1 rer Re E5250A
80. p 5 1 channel_list OUTPUT Hp5250 ROUT OPEN 10101 10202 ROUTel OPENI LIST 0 0 1 1 ROUTe OPEN LIST channel list p 5 1 channel_list open_status lt newline gt lt END gt 0 1 OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 ROUT CLOS 10101 10202 OUTPUT Hp5250 ROUT OPEN 10101 10102 10201 10202 ENTER Hp5250 AS A 0 0 7 42 Keysight E5250A 12 SYSTem SYSTem SYSTem E3230A ID
81. AC AC 100 Vac 240 Vac J 2 4 Keysight E5250A 12 Option 900 Plug BS 1363 A Option 901 Option 902 Plug AS NZS 3112 Plug IEC 60277 1 Option 903 Plug NEMA 5 15P 250 V 10A 125V 10 A 250V 10 A 250 V 10A PN 8120 4420 PN 8120 4419 PN 8121 1226 PN 8120 6825 Option 904 Option 906 Option 912 Option 917 A Plug NEMA 6 15P Plug SEV 1011 Plug SB 107 2 D1 Plug IS 1293 and 250 V 10 A 250 V 10A 250 V 10 A IS 6538 250 V 10 A PN 8120 3996 PN 8120 4416 PN 8121 1653 PN 8121 1690 Option 918 Option 919 Option 920 Option 921 Plug JIS C 8303 125 V 12 A PN 8121 0743 N Plug Israel SI 32 250 V 10 A PN 8121 0724 Plug IRAM 2073 250 V 10 A PN 8121 0725 Plug CEI 23 16 250 V 10 A PN 8121 0722 Option 922 Plug GB 1002 figure 3 250 V 10 A PN 8120 8376 Option 923 Plug SANS 164 1 250 V 10 A PN 8121 0564 Option 927 Plug NEMA WD 6 250 V 10 A PN 8120 0674 Option 930 Plug NBR 14136 250 V 10 A PN 8121 1809 Option 931 Plug CNS 10917 2 12
82. Figure 7 4 ES250A DD 3 3 o a 8 5 oi a 5 EE 2a8u gt sg 5 5 As gt Zz G PONURQCMEEXEDDEIQY QCDPc Standard Event 7161514 2 1 1 0 Status Heglster 1 ESR 8 PP lt 8 Standard Event amp Status Enable Register PONURQCMEEXEDDEQYERQCOPC xESE 7161514 2 110 XESE2 Y Summary Message to Event Summary Bit ESB BIt 5 of Status Byte Register p904004 100x100 7 54 Keysight E5250A 12 Table 7 4 ER ES250A 0 Operation Complete OPC OPC 7 9 1
83. RST ROUTe FUNCtion channel config channel_config ACONfig NCONfig OUTPUT Hp5250 ROUT FUNC ACON ROUTe FUNCtion p 5 1 i ROUTe FUNC channel_config lt new11ne gt lt END gt ACON NCON OUTPUT Hp5250 ROUT FUNC ACON OUTPUT Hp5250 ROUT FUNC ENTER Hp5250 AS A ACON 7 40 Keysight E5250A 12 ROUTe OPEN CARD ROUTe l OPEN CARD ON ROUTe BIAS STATe p 5 1
84. Error Queue 2 Table 11 4 400 Query error 410 Query INTERRUPTED INTERRUPTED E5230A DAB GET 420 Query UNTERMINATED UNTERMINATED E3250A 430 Query DEADLOCKED DEADLOCKED E5250A 440 Query UNTERMINATED after indefinite response
85. 0 len usrtrx 1 DUT low 0 len usrcoax h DUT high 0 len usrcoax 1 DUT low 0 TaW C F raw_g S compen Cc F compen g S Keysight E5250A 12 8 19 VXTplug amp play hpe5250a connRuleSeq hpeS2S0a connRuleSeq ViStatus VI FUNC hpe5250a conn
86. ON channel 7s7 HH ROUTe BIAS STATe p 7 30 RST ROUTe BIAS CHANne ENAB1e LIST channel list C72777767 757 c gze list p 5 1 cgzze 7s7 OUTPUT Hp5250 ROUT BTAS CHAN ENAB 10401 10502 1 1 2 7 2 6 Keysight E5250A
87. p 5 1 ES3252A ROUT COUP PORT card no input port no input port no SMU ROUT COUP STAT card no ON ON ROUT COUP STAT card_no OFF OFF 100 OUTPUT Hp5250 ROUT COUP BORT ALL 1 3 110 Sets up two coup1e portg 1 amp 2 and 3g4 on all cards 120 OUTPUT Hp5250 ROUT COUPB STAT ALL ON 130 Turns on the couple por mode for all cards 6 10 Keysight E5250A 12 Zn
88. p 7 49 ESR register lt new11ne gt lt END gt 10 10 10 0 1 OPC Operation Complete 1 2 2 4 QYE Query Error 3 8 DDE Device Dependent Error 4 16 EXE Execution Error 5 32 CME Command Error 6 64 7 128 PON Power On OUTPUT Hp5250 ESR ENTER Hp5250 A Keysight E5250A 12 IDN IDN E5250A TDN HEWLETT PACKARD model 0 revision lt mnew11ne gt lt END gt model E5250A revision A 01 00 OUTPUT Hp5250 IDN ENTER Hp5250 AS 7 8 Keysight E5250A 12 ES
89. DUT DUT E3230A ES252A ES250A E3230A 2 ES252A 10x24 3 10x36 4 10x48 ES252A Figure 1 3 Figure 1 4 4 Figure 1 3 ES252A 0UTPUT 5 6 7 8 12 INPUT SMUu1 Ha 1 SMU2 Dh smu3 SMU4 sMU5 A BF Hb i HF1 Ci OS P 1 6 Keysight E5250A 12
90. bias_status bias_status biaschan list ViStatus VI FUNC hpe3230a biasChanList Q ViSession vi Vilnt16 bias disen VilInt32 VI FAR biaschan list ViInt32 VI FAR bias status Vi bias disen biaschan list bias status hpeS230a init 0 1 5 ABCDE BC DE 0 A 0 B C 01 DE 01 00101 101
91. p 5 1 ROUT CLOS channel_ 7 57 channel_ist ROUT OPEN channel 57 eg7e 7s7 ROUT OPEN CARD card 7o cg 7 zo 100 OUTPUT Hp5250 ROUT CI 110 Closes relays to Crea Keysight E5250A LOS 10101 10202 te channels 10101 and 10202 12 6 11 i HP BASIC ES250A 93 BE3230A 3
92. ON OFF card_number 0 AT 1 2 3 4 Ar state ON or 1 ON OFE or 0 OFF ROUT BIAS STAT card_number 0 OFF 1 ON card_number 0 1 2 3 4 ROUT CLOS CARD card number c gz7e7 77s card_number a eNO 1 2 3 4 ROUT ChO8 LIST channel list c a77e7 77s7 cg77e 7 7s ROUT CLOS LIST channel list 0 1 cg77e 7 7s ROUT CONN RULE cg7 77477 e7 rule
93. hpe5250a_readStatusByte_Q ES250A hpe5250a_opc_Q hpe250a_func hpe5250a connRuleSeq Keysight E5250A 12 8 5 VXTplug amp play hpe5250a biasPort hpe5250_biasChanCard hpe5230 biasChanList hpeS250a biasState hpe3230a biasChanList Q hpe5250a couplePort hpe5230a coupleState hpe
94. 110 ES250A 120 130 140 Break Before Make 160 Channel 170 180 200 220 240 260 ES250A 6 14 Keysight E5250A 12 Figure 6 2 Keysight E5255A BIAS Input IM Input to Instrument ES2S0A 1 E3255A 2 4 ES2S0A SMU 1 SMU 2 6 AUX
95. 4155 4156 EE 4155 4156 Vth tT VFP Init setting Hpib_sc GPIB 7 Ad41Sx 4155 4156 GPIB 17 Ad4284 4284A GPIB 24 AdS230 ES250A GPIB 22 Init settmng Figure 9 2 Usercomm Vth C Meas Sample Program Test num 0
96. 900 pF SMU E3250A E3230A gt SMU 1 640 pF ES232A 4 145 pF 8 pF x3 16494A 003 75 pF 16494A 001 123 pF 8121 1191 2 m 130 pF x2 10pF 145 8 x 3 75 125 130 x 2 10 pF 639 pF lt 900 pF Keysight E5250A
97. 1 Figure 4 3 Figure 4 4 2 1 2 3 Figure 4 2 Keysight 4155 4156 Intlk 40 V 40 V 4 8 Keysight E5250A 12 Figure 4 3 N1254A 402 18 8 59 4 S x 1 5 J ww Units mm UGIG1911255 9 Figure 4 4
98. Keysight E5250A 12 8 17 VXTplug amp play hpe5250a cmdReal64 Q hpeS2S0a cmdReal64 Q E5250A E5250A result 64 ViStatus VI FUNC hpe5250a cmdReal64 O ViSession vi ViString cmd str ViPReal64 result vi hpe3230a init cmd str ES250A 256 result E5250A hpeS2S0a cmdString O E5250A E5250A result ViStatus VI FUNC hpe5250a cmdString O ViSession vi ViString cmd str Vilnt32 size ViChar VI FAR result vi hpe5250a_init cmd str ES250A 236 size result 2 32767 result E5250A 8 18 Keysight E5250A
99. Agilent E5250A Test Utility SELF TEST MENU CARD1 RELAY Start Slotl E5255A Relay Test N CARD2 RELAY Start Slot2 E5255A Relay Test N CARD3 RELAY Start Slot3 E5255A Relay Test N CARD4 RELAY Start Slot4 E5255A Relay Test N CONTROLLER Start E5250A Controller Test P FRONT PANEL Start E5250A Front Panel UTE Test N MAIN MENU Return to MATN MENU P indicates test was passed F indicates test was failed N indicates test was not executed Prepare the relay test adapters before you select CARDn RELAY key Select desired softkey 3 12 Keysight E5250A 12 CONTROLLER F ES5250A Mi HL XN Rt RH 1 PN lt 1 1 FRONT PANEL
100. Keysight E5250A 12 Keysight E5250A Figure 1 1 2 4 LED LINE Local Self Test Remote Remote Cp 3 1 LED Line ES250A Remote GPIB System Fail
101. ON OFF p 5 1 ON ROUTe BIAS CHANnel ENABle CARD p 7 25 ROUTe BIAS CHANnel ENABle LIST p 7 26 ROUTe BIAS PORT p 7 28 ON ROUT OPEN ROUT CLOSE
102. 0 test messagel 256 oO hpeS2S0a testClear E5250A framecard clear ViStatus VI FUNC hpe5250a testClear ViSession vi Vilnt16 framecard clear vi hpe5250a_init framecard clear 0 1 1 2 3 4 gt 8 30 Keysight E5250A 12 VXTplug amp play hpe5250a_testExec_ Q hpeS2S0a testExec Q E5250A
103. E5250A p 4 1 Figure 9 1 Table 9 4 E3250A 1 ES5252A Table 9 3 Figure 9 1 PS250A 1 E5252A 10x12 1 413574156 1 16494A 003 80 cm 4 16494A 001 6 002 1 5m 3m 1649SF 1 4284A 006 LCR 1 16048D E 1 1250 2405 BNC T 2 10833A B C GPIB 3 Keysight E5250A 12 9 7 Figure 9 1 Vth GPIB Cable Total 3 ea HP
104. Keysight 2 0 16493H 1 GNDU ES230 60044 1 TRIAX DUAL TRIAX 1 TRIAX DUAL TRIAX ES3230A Figure 4 7 TRIAX DUAL TRIAX SMU SMU INPUT 1 2 3 4 6 2 GNDU GNDU TRIAX DUAL TRIAX Keysight E5250A 12 4 17 GNDU 4 Figure 4 7 GNDU TRIAX DUAL TRIAX To To Keysight E5250A GNDU SMU INPUT TRIAX DUAL TRIAX SMUINPUT AUX Adapter AO oO SMU From Keysight 16493H Cable SMU INPUT E3230A SMU SMU INPUT 1 3 3 Force
105. p 6 27 E5250A C Compensation coefficient data table CAUTION Do not add or delete REVISION line and DATAxx line Change the value for R L C of DATAO5 06 07 or 08 RI EVISION A 03 00 R ohm L H C F DATA00 74 65E 3 140 00E 9 58 44E 12 Frame Path 1 DATAO1 75 41E 3 90 00E 9 67 13E 12 Frame Path 2 DATA02 231 41E 3 450 00E 9 178 85E 12 Card Path High DATA03 177 56E 3 390 00E 9 135 45E 12 Card Path Low DATAO4 100 70E 3 400 00E 9 80 00E 12 Triax Cable m DATA05 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl H m DATAO06 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl L m DATA07 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl H ml DATA08 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl L ml DATA09 0 00E 3 0 00E 9 1 20E 12 Stray Capacitance END of Data Keysight E5250A 12 8 29 VXTplug amp play hpe5250a self test hpeS2S0a self test E5250A ViStatus VI FUNC hpe5250a self test ViSession vi ViPInt16 test result ViChar VI FAR test message Vi hpe3230a init test result
106. BE3230A ES250A ES5250A ViStatus VI FUNC hpe5250a_dcl ViSession vi vi hpe5250a_init hpeS2S0a error message ViStatus VI FUNC hpe3230a error message ViSesslon vi V1Status error number ViChar VI FAR message vi hpe5250a_init error number message 256 8 22 Keysight E5250A 12 VXTplug amp play hpe5250a_error_query hpeS2S0a error query E5250A Error Queue p 11 1
107. F 3 14 Keysight E5250A 12 NOTE Table 3 4 2 E5250A i oi E5250A 1 10 Vdc Table 3 4 ES3250A 4155 4156
108. UP LEFT RIGHT DOWN MORE 2 3 ON 3 2 RETURN Table 5 10 5 40 Keysight E5250A 12 Table S 12 Table S 13 2 OPEN ALL ON OPEN ROW ON
109. VXTplug amp play Keysight E5250A VXlplug amp play Table 8 1 Table 8 1 ES250A E5250A hpe5250a_init ES230A hpe3250a close ES250A hpe5250a_reset E5250A hpe5230a self test E5250A hpe5250a_error query hpe5230a error message ES5250A hpe5230a_revision_query hpe5250a timeOut hpe3250a timeOut Q hpe5250a errorQueryDetect hpe5230a errorQueryDetect Q hpe5230a_dcl ESR hpe3230a esr Q ES5250A
110. close_status closechan list ViStatus VI FUNC hpe5250a closeList_O ViSession vi Vilnt32 VI FAR closechan list ViInt32 VI FAR close status vi hpe5250a_init closechan list 3 ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 close status closechan list 0 1 Keysight E5250A 12 8 13 VXTplug amp play hpe5250a_cmd hpeS2S0a_ cmd ES5250A
111. AC E v E IO E
112. CLEAR ALL 5 36 Keysight E5250A 12 Figure S 12 MODIFY SETUP MEMORY SETUP PANEL Figure 12 Figure 5 14 1 p 5 32 Figure 5 10 1 E3230A MEMORY SETUP PANEL ES252A 10x48MAT Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup
113. ROUTe OPEN CARD card number card_number 0 ALL 1 2 3 4 ALL OUTPUT Hp5250 ROUT OPEN CARD ALL Keysight E5250A 12 7 41 eR PR ROUTe OPEN LIST ROUTe OPEN LIST p 5 1 ON ROUTe BIAS STATe p 7 30 ROUTe OPEN LIST channel list
114. openchan list 5 ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 8 26 Keysight E5250A 12 VXTplug amp play hpe5250a openList Q hpeS2S0a_openList Q openchan list 0 0 100 open_status open status openchan list
115. 200 Vdc Keysight E5250A 12 1 7 ES2SSA Keysight E5255A 24 8x3 E3S2350A ES5255A 2 8 3 DUT E3250A E5255A 4 ES255A 6 16 4 24 3 32 2 48 1 96 TFigure 1 5 ES255A BIAS Input de ac 2x8
116. 3 2 Keysight E5250A 12 3 Table 3 1 ES250A E5250A E5250A p 3 4 1 SCPI p 3 6 p 3 10 E5250A SCPI p 3 6 LED a a p 3 10 ES250A Local Self Test p 3 4 Ea RS a Scpr p 3 6 p 3 10 Keysight E5250A 12 3 3 402
117. 4 BIASin BIASout 1 3 IV NO NE BIAS INPUT p 2 13 6 1IV
118. Attach the relay test adapter and the BNC short cap to E5250A E5255A input And open all output of slot n n 1 4 CONTINUE CANCEL 2 ES230A E3255A BIAS BNC 3 4 CONTINUE CANCEL 5 1 4
119. 1 4155 4156 PARAM MES GET 2 SOURCE SETUP VB 3 ANALYSIS SETUP LINE1 VG mput Parameters No of devices A RR E5250A p 2 1 Stress duration setup DATA DATA 10 20 50 DATA 100 200 500 DATA 1000 2000 5000 DATA 10000 20000 50000 DATA 100000 Keysight E5250A 12 9 37 4155 4156 DATA
120. PGO4002 120x80 STB2 H HP BASIC Status SPOLL Hp5250 STB SPOLL 6 RQS STB 6 MSS Keysight E5250A 12 7 51 Table 7 3 Re RQS MSS 2 STB ES250A
121. ES5250A 4 LED LED Remote LED System Fail LED Fail LED Local Self Test LED 2 10 Local Self Test 10 Fail LED 10 Fail LED Local Self Test Keysight E5250A 12 3 13 1 CARDn RELAY n 1 4 4155 4156 Attach the relay test adapter on input terminal and open all output of slot n
122. V Drain stress voltage should be determ1ned by Id Vvd charact eristics Vdstr 5 Drain stress voltage Vdstr RE STORE Keysight E5250A 12 9 29 Figure 9 6 1 SP MUX RUN Enter directory name for saving data default test_ data 2 Enter Enter test data
123. 141 Invalid character data 144 Character data too long 12 148 Character data not allowed 150 String data error 151 158 151 Inyalid string data 158 String data not allowed 160 Block data error 161 168 161 Invalid block data 168 Block data not allowed 170 Expression error 171 178
124. Keysight E5250A 12 IVinl SMU1 ES525SA 4 1 ES250A SMU INPUT 1 IV 32 TIVin2 IVin3 2 11 ES525SA BIAS IV Figure 2 2 0 6 DIP 4 OFF 0 1 0 Q 2 3 8 4
125. eeeeee BIASout2 terminal To BIAS INPUT 51 M To BIAS INPUT 52 To BIAS INPUT 53 Keysight E5250A 12 E5255A Table 2 1 IVin IVout DIP ky BlASin BIASout Block 1 holder 1 BIASoutl IVinl IVoutl DIP SW1 Block 2 holder 2 BIASin2 BIASout2 IVin2 IVout2 DIP SW2 Block 3 holder 3 BIASin3 IVin3 IVout3 DIP SW3 Table 2 2 Keysight ES2SSA IVin BIASin BIASout 1 SMU1 BIAS INPUT 51 0 0 2 SMU2 BIAS INPUT 52 0 0 3 SMU3 BIAS INPUT 53 0 lt IV TIV Figure 2 2 IVin ONI p 2 13 DIP 4 4 DIP BIAS
126. 16494A m DUT High m 0 DUT Low m 0 DUT High m 0 DUT Low m 0 4284A F 4284A S F S Keysight E5250A 12 4284A
127. SCPI SP MUX M 3 GPIB 701 702 703 Keysight E5250A 12 9 23 WM I Bias source on SUB B1a8 source_ on Bias Source On COM Meas infFo5 REAL Vdstr Vgstr Vdd Vbb Gate 1ength Gate w idth OUTPUT 701 SOUR amp VALS Vgstr Set Gate Stress Voltage OUTPUT 702 SOUR amp VALS Vdstr Set Drain Stress Voltage OUTPUT 703 SOUR 0 0 Set Substrate Stress Voltage 1 SUBEND COM Meas infFo5 REAL Vdstr Vgstr Vdd Vbb Gate 1ength Gate w idth 0
128. Set 250init 9 14 Keysight E5250A 12 VFP VFP VFP VFP VFP p 5 p 6 21 1 ENTER Meas_vth Test_comm MOSFET Vth Measurement Constant Definition Channe1 10101 10202 10303 10404 Meas vth OUTPUT Hp5250 ROUT CLOS amp Channel Connect to DUT OUT
129. http about keysight com en companyinfo environment Keysight E5250A 1 E5250A 2 E5250A 3 E5250A 4 E5250A E5250A 5 E5250A 6 E5250A is 7 E5250A SCPI 8 VXlplug amp play E5250A VX
130. 5 4 2 2 SW 1 I 2 2 1 1 3 SMU1 0 IV 01 01 24 2x48MUX BIAS 11 2 1 3 SMU1 0 IV 01 25 48 BIAS 11 3 1 SMU2 0 IV 02 01 08 4 BIAS 12 1 2x16MUX 2 SMU3 0 IV 03 01 08 4 BIAS 13 2 2x16MUX 3 SMU4 0 IV 04 01 08 2x8MUX BIAS 14 4 1 SMU2 0 IV 02 09 16 3 BIAS 12 1 2x16MUX 2 SMU3 0 IV 03 09 16 3 BIAS 13 2 2x16MUX 3 SMUS 0 IV 05 01 08 2x8MUX BIAS 15 5 24 Keysight E5250A 12 E5255A Figure S 8 BIAS Input 1101 1102 1103 11147 1148 IV Input SMU1 01 0101 0102 0103 0147 0148 Output B
131. port7 1 7 8 0 7 8 port9 1 9 10 0 9 10 Keysight E5250A 12 8 21 VXTplug amp play hpe5250a coupleState hpeS2S0a coupleState ES5252A ViStatus VI FUNC hpe5250a coupleState ViSession vi Vilnt16 couplestate cardno Vilnt16 couple state vi hpe5250a_init couplestate cardno 1 2 3 4 5 0 hpe3230a func couple state 1 ON 0 OFF hpeS2S0a_dcl E5250A DCL
132. ES25SA 4 TFigure 4 1 Figure 4 1 DUT Shielding Ground Input A B SMU Force Guard BIAS Bias line Bias line B J A MN N 1 7 7 6 DUT Ground Total8 ea NOTE i Keysight E5250A 12 4 5 a KeysightE5250A
133. 403 INT Interlock LED 1 LED 1 LED STOP BNC Keysight 16435A 1 Keysight 16493J 1 1 16345A BNC 16435A BNC 2 16493J 16435A Keysight E5250A 12 4 11 DUT DUT
134. CLS p 7 1 Keysight E5250A 12 11 3 Table 11 1 Re SCPI SCPI SCPI 1XY Error Queue ee 100 Command error 101 Inyalid char
135. 1 6 n IVn 1 6 CONTINUE CANCEL 3 18 Keysight E5250A 12 8 4155 4156 SMU 4 ES250A 9 CONTINUE 4155 4156 REPORT CRT 4155 4156 LEAK TEST 10
136. OFF ES2S0A Keysight E5250A 6 SMU 4 AUX Table 4 3 ES250A ES250A Table 4 3 Keysight 4156 ES270 SMU Keysight 41501 HPSMU Keysight 4142B SMU 4156 41301 Keysight 16494B 003 4142B Keysight 16494C 001 E5270 Keysight 16494B 001 E3250A SMU SMU INPUT 1 2 3 4 5 6 SMU FORCE SMU SENSE 4 14 Keysight E5250A 12
137. TIV E5250A SMU E3255A BIAS IV 5 29 CAUTION SETUP MODE NORMAL AUTO E5252A ES5255A ON OFF ES3232A 1 10 E5255A 1 4 0 CHANGE CONFIG CARDn n 1 4 BIAS STATE BIAS PORT
138. 4284A 006 1 kHz 1 MHz Cp G ES2S0A Keysight 16048D E BNC T Keysight 1250 2405 Keysight 16048D E ES2S0A CV1 CV2 16494A i Keysight 8121 1191 R L C 1 4284A R L C
139. Keysight E5250A Table 3 3 Ni lo ES250A Break Before Make 1 BBM 2 3 Make Before Break 1 MBBR 2 3 No Sequence 1 NSEQ 2 Keysight E5250A 12 5 11 NOTE Break Before Make
140. 0 0 1 0 2 0 3 0 4 Message Available MAV Queue Summary Message Output Queue Output Queue p 7 6 5 Standard Event Status Bit ESB Summary Message 1 6 Request Service RQS Message SRO Master Summary Status MSS Summary Message 1 STB 0 7 52 Keysight E5250A 12
141. firmware is bad E5250A GPIB GPIB E5250A Must execute Init vfp_setup before Init vfp setup Connect vfp Connect vijp 6 26 Keysight E5250A 12 NOTE E e HP BASIC 1 0 5 pF CV 1 kHz 1 MHz 1000 pF E5252A
142. hpeS2S0a_reset E5250A ES5250A hpe 230a dcl ViStatus VI FUNC hpe5250a reset ViSession vi Vi hpe3250a init hpeS2S0a revision query BS5250A ViStatus VI FUNC hpe5250a revision query V1Sesslon vi ViChar VI FAR driver rev ViChar VI FAR instr rev vi hpe5250a init driver revl 256 instr rev E5250A 256 8 28 Keysight E5250A 12 VXIplug amp play hpe5230a selectCompenFile hpeS2S0a selectCompenFile A 03 00 E5252A hpe5250a compenC 6
143. A 4raA CAT IEC I C CE CE CSA US C Tick N10149 Radio Communication Act 1992 EMC ICES NMB 001 ISM ICES 001 ICES NMB 001 Cet appareil ISM est conforme a la norme NMB 001 du Canada eRouP 1 Industrial Scientific and Medical Group 1 Class A CISPER 11 IS CLASSA oO EMC
144. ES2SSA IV Viml E5250A SMU 1 BIAS BIAS 51 ES2SSA 1 1 8 2 3 Keysight E5250A 12 6 15 10 Example Using Bias Mode 20 30 TNTEGER Complete 40 DIM Channe1S 100 50 Channe18 10101 10108 60 70 Put Instrument Initialization Routine here 80 90 ASSTGN Hp5250 TO 722 100 OUTPUT Hp5250 RST 110 OUTPUT Hp5250 ROUT FUNC NCON 120 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 130 OUTPUT Hp5250 ROUT BIAS PORT 1 7 140 OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD 1 150 OUTPUT Hp5250 ROUT BIAS STAT 1 ON 40 channel 7 s7 Channel 30 cgz7e 7 s7 70 100 E5250A
145. 16494D 001 8 1 5 m 16494D 002 8 3 m Figure 4 11 Keysight 16494D 8 FEMALE MALE To To E5255A Connector Plate 4 22 Keysight E5250A 12 E5255A Keysight 4153 4136 Keysight 4142B DC Keysight E5270 SMU SMU SMU FORCE SENSE Table 4 6 ES230A 4153 4156 4142B ES270
146. 3 2 VISA DO IO 3 GPIB IO 4 5 VXlplug amp play a E3230A Plug amp Play Driver b SETUPEXE lt install folder gt Winnt Hpe5250a lt install folder gt echo VXIPNPPATH hpe5230a bas hpe5230a c hpe5230a def hpe5230a fp hpe5230a GID hpe5230a h hpe5230a hlp readme txt DelsL1 isu 8 4 Keysight E5250A 12 NR
147. 40 FNGet vfp comment Comment 100 MAT48 110 E3230A 140 160 180 Comment 6 24 Keysight E5250A 12 0 VFP 1 VFP E5250A ASCII a UPLOAD GET UPLOAD b U LIB
148. DUT Dis 8 SENSE FORCE CAUTION Common Common Guard H Guard Force Force i Triaxial Common connector Guard M Sense lt Insulator lt Plate Coaxial cable DUT
149. NAME UNIT DEEINITION SORTTQ SORT Td GRAD DIFF SQRTId Vg VTH V LI1X BETA L1G 2 Keysight E5250A 12 9 5 Xaxis Ylaxis Y2axis NAME Vg SORTId GRAD SCALE LINEAR LINEAR LINEAR IMIN 0 V 0 0 MAX SV 200 m 80 m DATA VARIAVLES VTH BETA TTNE1 TANGENT 1ine on Y1 at a point where GRAD MAX GRAD LINE2 MARKER At a point where GRAD MAX GRAD Interpolate OFF ES250A 4284A ES230A ES252A 1 10905 11006 2 3 4 4284A 100 kHz 0 03 V Cp G 9 6 Keysight E5250A 12 Table 9 3
150. Table 9 6 24 MOSFET 1 GNDU GNDU CR 0 0 0 lt 9 18 Keysight E5250A 12 Table 9 6 NOTE 4 ES2SSA 1 2 3 24 1 2 3 24 25 26 27 48 49 50 51 72 GNDU GNDU GNDU GNDU HCI 24 25 MOSFET 3
151. test data MSI test_data l 2 RUN Enter number of devices default 24 RIN 24 Enter Idlin Idlin Tdc Gmmax Gmmax Tdc Vtext Vtext Tdc Vtci Vtci Tdc ALL Tdc END Tdc
152. 3101 3241 a 10 2 4 3 3 2 Switch off i Swltch on 20 Units mm UGIO1012 85x60 Keysight E5250A 12 4 9 LED Figure 4 5 4 Keysight 4153 4156 Intlk LED LED LED 4 5 6 40 V LED LED 1 LED Figure 4 5 2 LED 4 6 Figure 4 2 LED 14S0 0641 6 11 10 5 0 Y 5 6 Units mm UGIQ1913 50x50 athodg Anode
153. 8 8 Figure 7 4 Keysight E5250A 12 7 55 Figure 7 5 RA Output Queue Output Queue Output Queue 4 1 4 Figure 7 5 ES2S0A Output Queue Last Data Byte Entered Last Data Byte to be read Queue Non Empty Next Data EDD Byte Entered First Data Byte to be read Output Queue Summary Message to Message Available MAV Bit 4 of Status Byte Registep PO04005 120x100 Query
154. E5250A E5250A 0 100 199 200 299 300 399 400 499 100 32767 ES230A E5250A Brror Queue RS 4 3 2 E5250A 3 11 2 Keysight E5250A 12 9 SYSTem ERRor
155. Keysight E5250A 12 ROUT BIAS CHAN DISA CARD card no ROUT BIAS CHAN DISA LIST channel_ 7 57 ROUT BIAS STAT card no ON ON ROUT BIAS STAT card no OFF OFF 100 OUTPUT Hp5250 ROUT BTAS PORT ALL 1 110 Selects SMU1 input port to be input Bag Port for all cards 120 OUTPUT Hp5250 ROUT BIAS CHAN ENAB CARD ALL 130 Biag enables all output portg on all cards 140 OUTPUT Hp5250 ROUT BTAS STAT ALL ON 150 Turns on the Bias Mode for all oardg Keysight E5250A 12 6 9 Pn
156. RE STORE U LTB c HP BASIC d LOADSUB LOADSUB ALL FROM U LTB Load vfp data CS80 701 1 MSI MSI C880 701 1 Load vfp data Setup_data LOAD_FILE Load vfp_data Address_ 5250 LOAD FILE CS80 701 1 Setup_datas Keysight E5250A 12 6 25
157. 05 07 09 5 16 Keysight E5250A 12 RK TT lt NN Ww E5252A Figure S 4 Input Port Channel No Output Port Output Port No Input Port No 5 17 Keysight E5250A 12 Table S 6 ES252A Keysight E5252A ES250A 1 1 2 1 3 1 4 ES5252A Table 5 6 1 2 2 5 E5252A 5 4 4 4 ee OT 4
158. 41S6 HRSMU 2V 500 LV 0 5 x lout V 280 LV 0 5 x Iout V HRSMU 10 pA 0 4 pA 0 2 x Vout pA 0 1 pA 0 2 x Vout pA 100 pA 0 4 pA 0 2 x Vout pA 0 1 pA 0 2 x Vout pA 1 nA 0 7 pA 0 2 x Vout pA 0 5 pA 0 2 x Vout pA 10 nA 4pA 0 2 x Vout pA 2pA 0 2 x Vout pA 100 nA 40 pA 0 3 x Vout pA 20 pA 0 3 x Vout pA 10 10 Keysight E5250A 12 11 KEYSIGHT TECHNOLOGIES i RE Keysight E5250A E5250A SCPI SCPI 2 3
159. 171 Invalid expression 178 Expression data not allowed 11 6 Keysight E5250A 12 Table 11 2 SCPI E5250A 2XX Error Queue 4 Ss 2 200 Execution error 220 Parameter error E3230A 222 224 222 Data out of range E5250A
160. 200 210 230 250 OFF 260 280 300 E5250A Keysight E5250A 12 6 17 Figure 6 3 to Instrument Source E5250A 1 ES252A 2 4 ES2S0A SMU 1 SMU 2 SMU 3 4 SMU 6 AUX
161. OPC OPC OPC 1 0 OPC OPC OPC CLS p 7 49 WAI p 7 14 OPC 1 lt new11ne gt lt END gt Output Queue 1 Output Queue p 7 49 OUTPUT Hp5250 OPC Query
162. 12 VXTplug amp play hpe5250a compenC hpeS2S0a compenC A 03 00 E5252A Keysight 4284A LCR a 6 1 hpe3230a selectCompenFile ViStatus VI FUNC hpe5250a compenC ViSession vi ViReal64 frequency ViReal64 len hptrx ViReal64 len usrtrx h ViReal64 len usrtrx 1 ViReal64 len usrcoax h ViReal64 len usrcoax 1 ViReal64 raw c ViReal64 raw g ViPReal64 compen c ViPReal64 compen_g Vi hpe3250a init frequency 1E 3 1E 6 Hz len hptrx Keysight 16494A 1 5 3 0 m len usrtrx h DUT high
163. 12 VXTplug amp play hpe 250a cmdInt16Arr Q hpeS2S0a cmdInt16Arr Q E5250A ES5250A result 16 ViStatus VI FUNC hpe5250a cmdInt16Arr Q ViSession vi ViString cmd str Vilnt32 size Vilnt16 VI FAR result ViPInt32 count vi hpe3230a init cmd str E5250A 236 Size result 1 2147483647 result E5250A count result hpeS2S0a cmdInt16 Q E5250A EBS5250A result 16 ViStatus VI FUNC hpe5250a cmdInt16 O ViSession vi ViString cmd str ViPInt16 result vi hpe5250a init cmd str E5250A 236 result E5250A Keysight E
164. 12 7 37 rv ROUTe COUPle STATe ROU1el COUPlel STATel NOTE E3S252A ES3253A ON OFF p 5 1 ROUTe COUPle PORT p 7 36 RST OFF ROUTe COUP1e STATe cg7 number state card_number 0 ALL 1 2 3 4 ALL state ON 1 ON OFF 0 OFF OUTPUT Hp5250 ROUT COUP STAT ALL ON 7 38 Keysight E5250A 12 NOTE Re ROUTe COUPle STATe ROUTel COUPle STATe BS252A TS5233A
165. ES250A Summary Message from Standard Event Queue Status Register Non empty utput SRQ to Controller 1 Queue Not Used Not Use Y 1 RQS is read by ad 1 lt Service nod _ Serial Poll Request 7 16IESBMAM 31211101 Status Byte Register Generatlon MSS A MSS is read by XSTB F FE EO Service Request Enable Register 5 7 k4 51413121110 xsmE XxSRE PGO4001 120x120 ES250A RQS 6 SRQ GPIB 9 GPIB
166. ES250A INPUT INPUTnLABEL ES250A m 1 10 MORE INPUTn LABEL n 1 5 INPUTn LABEL n 6 10 RETURN DEFINE LABEL MENU INPUTn LABEL n 1 10 Input Label Name Enter 5 32 Max 5 char string gnter 1 Keysight E5250A 12 ES25SSA Figure S 10 CARDn INPUT n 1 4 BIASn LABEL CARDn INPUT E5255A
167. INPUT 2 ON RS i ON MN CO RR II 1 Keysight E5250A 12 5 13 NOTE Table S 4 ES5252A i ER 2 SMU INPUT 1 2 A OUTPUT 1 2 ROUTe A PORT 0 ROUTe COUPle STATe A WE 6
168. RS 0 1 2 3 4 ROUT FUNC channel config channel_config ACON NCON ROUT ACON NCON ROUT OPEN CARD card number card_number 0 ALL 1 2 3 4 AT Keysight E5250A 12 12 7 SCPI ROUT OPEN LTST channel list cZg77e7 77s7 channel list ROUT OPEN LIST channel list 0 1 channel_ist SYST CCON cg7 number ES252A E3233A
169. RST E5250A 1 2 2 5 E5250A 1 1 2 1 3 1 4 1 1 E5252A 1 3 3 1 36 0 1 2 E5252A p 5 16 E3
170. ENTER Meas vth Save Measurement Data OUTPUT Hp415x MMEM STOR TRAC DEF VTH DAT DISK OUTPUT Hp415x OPC ENTER Hp415x A Vth 4155 4156 VTH DAT VTH DAT 9 12 Keysight E5250A 12 Vth Meas vth Constant Definition Test comm MOSFET Vth Measurement Param file 4155 4156 E5252 MES Vth max Vth V 2 0 Vth min Vth V 0 1
171. Keysight E5250A 12 Figure 4 9 Figure 4 10 ES255A Keysight 16494B NN gt 6 UV Connector Plate Side E5252A Side ES2SSA ES255A Figure 4 10 ES3230A SMU ES25SA Figure 4 10 ES3255A ES2SSA mel gt uH 9 99 6 E5252A Table 4 5 Ground E3233A 1 8 1 8 9 16 1 8 17 24 Keysight E5250A 12 4 21 E5255A 4 Table 4 5 ES2SSA
172. VXTplug amp play hpe3230a init hpeS2S0a init E5250A E3250A E5250A vi VI NULL ViStatus VI FUNC hpe 5230a init ViRsrc InstrDesc ViBoolean id query ViBoolean do reset ViPSession vi InstrDesc GPIB0 1 INSTR id query VI TRUE VI FALSE do_reset VI TRUE ES230A VI FALSE E5250A vi VI NULL hpeS2S0a opc OO OPC ViStatus VI FUNC hpe5250a_opc_Q ViSession vi ViPBoolean result vi hpe5250a init result VI TRUE VI FALSE Keysight E5250A 12 8 25
173. card_number 0 ALL 1 2 3 4 AD rule FREE SROUte Keysight E5250A 12 12 5 SCPI ROUT CONN RULE card number EREE SROU card_number 0 1 2 3 4 ROUT CONN SEQ card number sequence card_number 0 ALL 1 2 3 4 AT sequence NSEQ No Sequence BBM Break Before Make MBBR Make Before Break ROUT CONN SEQ cg7 number TL NSEO No Sequence BBM Break Before Make MBBR Make Before Break card_number oO 1 2 3 4 ROUT COUP PORT card number couple port 6 ES3232A card_nu
174. oO p 6 1 p 7 1 O x x p 6 1 p 7 1 VXIplug amp play p 8 1 VFP x x x VFP p 26 a b PC c 4155 4156 BASIC Keysight E5250A 12 5 3 CAUTION Keysight E5250A 7 SCPI Table 5 1 p 6 1 HP BASIC E3230A VFP
175. 0 ALL 1 2 3 4 ALL rule FREE SROUte OUTPBUT Hp5250 ROUT CONN RULE ALT SROU ROUHel CONNection RULE ROUTe CONNect1on RULE card number card_number 0 1 2 3 4 rule_status lt newline gt lt END gt FREE SROU OUTPUT Hp5250 ROUT CONN RULE ALL SROU OUTPUT Hp5250 ROUT CONN RULE 1 ENTER Hp5250 AS A SROU 7 34 Keysight E5250A 12 ROUTe CONNection SEOuence ROUHel CONNection SEOuence p 5 1
176. 12 9 10 Keysight E5250A 12 KEYSIGHT TECHNOLOGIES Keysight ES250A E5252A ES255A ES230A ES3232A ES2SSA 1 2 Keysight E5250A 12 ES2S0A Keysight E5250A dc 1H Keysight ES250A Table 1 1 4 10 48 2 9e E3230A Table 1 1 E5252A 10x12 ES255A 24 8x3 Figure 1 1 ES250A
177. Connect vfp Init_ vVfFp setup Setup data Setup_dataS 14000 CALL Init VFD seEup Mat48 data 6 22 Keysight E5250A 12 Connect vfp Connect vfp Load vfp data connect yvfp Setup data Setup num Setup_data 14000 Setup num 1 24 cArr Connect yvfp Mat48 datas 1 FNGet vfp comment Load vfp data FNGet vfp comment Setup da
178. DIP 4 1 lt Block 1 2 DIP SW1 SW2 4 ON 1 4 E3255A 1 16 W ES255A 32 W
179. GPIB GPIB lt 10 lt x2m gt 10 lt 20 m 4m Keysight E5250A 12 2 17 1 E TI ES250A HAN
180. MORE MAIN MENU GOTO SETUP Input setup memory number to De connected gneer Current Setup Memory ES230A COPY SETUP Input CODY src amp dest setup memory number Enter src dest Enter 1 5 1 5 gnter Keysight E5250A 12
181. NONE NONE 0 0 OUTPUT Hp5250j SYST CTYPE 1 ENTER Hp5250 AS Keysight E5250A 12 7 47 SS Re SYSTem EBRRor SYSlem ERRor SYSTem ERRO err_no message lt mew11ne gt lt END gt err_ no message 4 0 No error OUT EN SYSTem VERSion PUT Hp5250 8SYST ERR ER Hp5250 A BS E ES250A SCPI SYSTem VERS1on YYYYV lt new1ine gt lt END gt YYYY 1995 OUT PUT Hp5250 SYST VI EN ER Hp5250 AS 7 48 ERS Keysight E5250A 12 E3230A
182. SMU INPUT 1 IV 0 Q 24 1 BIAS 1 IV 5 S 1 1 1 1 IVin2 cabl IVin3 cabl in2 cable in3 cahle 4 sws SWf1 pm in1 cable IVout1 oO IVout2 Block 1 Block 2 Block 3 BIASin2 BIASin3 MM IM oO ll J ll INI 123456 78 9 101112 13 14 15 16 17 18 19 20 21 22 23 24 BIASout1 BIASout2 1 IVinl SMU1 2 14 Keysight E5250A 12 Figure 2 5 IVin2 IVoutl IVin3 IVout2 DIP SW1 2 3 1 ON 1 2 4 OFF 0 BIASoutl BIASin2 BIASout2 BIASin3
183. VXTplug amp play hpe5250a openCard hpeS2S0a openCard ON ViStatus VI FUNC hpe5250a openCard ViSession Vi ViInt16 open cardno vi hpe5250a_init open cardno 1 2 3 4 5 0 hpe5250a func hpes250a openList openchan list 0 0 100 ViStatus VI FUNC hpe5250a openList ViSession vi Vilnt32 VI FAR openchan list vi hpe5250a_init
184. E5250A lt newline gt lt END gt NN Keysight E5250A 12 7 3 SS E5250A Keysight E5250A ES2S0A E5250A CLS ESE ESR IDN ID OPC OPC RST SRE SRE STB TST WAI
185. IGLEAK MES Idleak file IDLEAK MES Param file PARAM MBSY 9 36 Keysight E5250A 12 Vtei Idlin Gmmax Vtci 1 4155 4156 PARAM MES GET 2 ANALYSIS SETUP LINE2 TD TID TD 1 mA Xx W L W m L m 3 Device geometries II Gate length m 1 E 6 Gate width m 1 E 5 Idin Gmmax
186. MOSEFET HCI E HCI H 5 Idlin Gmmax Vtext Vtci 1 4155 4156 SMU PARAM MES SMU V NAME INAME MODE FUNCTION Source Setup SMU1 VG IG V VAR1 0 5V 20mV SMU3 VD ID V CONST 0 1 V SMU4 VB IB V CONST 0 V GNDU VS IS COMMON CONST Common Keysight E5250A 12 NOTE NAME UNIT DEFINITION Gm 8S DIFF ID VG Vtext V MX MY1 MY2 AT VD 1 2 Gmmax 8
187. oO SW3 mM IVout1 Block 1 Block 2 Block 3 NN QO Il Il MM oooooooo O O ll 123456 78 9 10111213 141516 718 19 20 21 22 23 24 1 IVinl SMU1 2 IVin2 IVoutl Keysight E5250A 12 2 13 24 1 BIAS 1IV 1 Figure 2 4 IVin3 IVout2 DIP SW1 2 3 1 ON 1 2 4 OFF 0 1 p 2 8 ES525SA 1 2 BNC 2 1 Figure 2 4
188. 12 ON WU ROUTe BIAS CHANnel ENABle CARD ROUTHel BIAS CHANnel ENABle CARD ON ROUTe BIAS STATe p 7 30 RST ROUTe BTAS CHANne1 ENAB1e CARD card number card_number 0 ALL 1 2 3 4 ALL OUTPUT Hp5250 ROUT BTAS CHAN ENAB CARD ALL Keysight E5250A 12 7 25 es ROUTe BIAS CHANnel ENABle LIST ROU1el BIAS CHANnel ENABlel LIST channel_ist
189. E5252A 16494A 001 1 5 m Keysight E5250A 12 4 19 E5252A 16494A 002 3 m 16494B 001 1 5 m 16494B 002 3m Table 4 4 1 3 5 7 9 11 2 1 1 Force 2 Sense 3 3 Force 4 Sense 9 5 Force 6 Sense 7 7 Force 8 Sense 9 9 Force 10 Sense 11 11 Force 12 Sense Figure 4 9 ES252A Keysight 16494B 4 20
190. INPUT ES252A 10 6 SMU1 SMU4 SMU5 HF1 CV1 SMU6 HF2 CV2 2 3 1 SMUS HF1 CV1 SMU1 SMU2 OUTPUT ES252A 12 6 OUTPUT1 OUTPUT2 OUTPUT3 OUTPUT4 OUTPUTS OUTPUT6 OUTPUT7 OUTPUTS OUTPUT9 OUTPUT10 OUTPUT11 OUTPUT12 Figure 1 4 ES2S2A 1 1Ox2 MATRIX SWITCH OUTPUT 200 14 Max WARNING ES5250A ES2S2A
191. a RO b c 4 p 3 1 CAUTION NN EN E5250A 2 8 Keysight E5250A 12 Figure 2 1 Keysight E5252A ScrewHole for Module Btractor Module Extractor Keysight E5255A
192. 01 SMU 5 22 Keysight E5250A 12 01 E5255A 01 0 00101 101 Figure 7 Table 5 9 Figure 5 8 4 E3233A 1 2 H 6 2x48 IV SMU1 3 4 2 1 2x
193. 1 2 3 4 6 7 8 9 10 ROUTe COUPle PORT 1 1 2 1 es SMU1 01 01 12 SMU2 01 48 SMU3 03 01 12 SMU4 01 48 SMUS 05 01 12 SMU6 01 48 HF1 HF2 07 01 12 01 48 CV1 CV2 09 01 12 01 48 5 14 Keysight E5250A 12 Figure S 3 NOTE ROUT CLOS
194. 16 8 10 enable_number enable_number lt new11ne gt lt END gt 10 OR 5 Keysight E5250A 12 7 5 eR ESE 16 8
195. 16494A 001 1 5 m 16494A Keysight E5250A 12 6 27 LCR ES250A HP BASIC Keysight 4284A 4284A Ccompen 5250 Freq Ll L2 h L2 1l L3 h L3 1 C m G m C c G C Freq L1 L2 h L2 1 L3 h L3 1 Cm Gm Cc Ge 6 28 Hz 1000 Hz 1000000 Hz 1 MHz
196. 3014 Cannot directly specify Bias Port channel ON 3015 Bad channel number combination on ES2S2A card 5 7 9 6 i 9 5 7 3016 Config error Re install Keysight ES2SSA E5255A 3017 Too many relays closed Max 200 200 3018 Can t change to ACONfig mode Check card config a N 3019 Cannot us
197. RoHS 6 MCV HM gt RoHS MCV EFUP Environmental Friendly Use Period 40 CFB J CFB PET WEEE 2002 967EC WEEE 1 6
198. 12 ROUTe BIAS CHANnel ENABle LIST ROUTel BIAS CHANnel ENABle LIST egze s7 eg77e 7 s7 1 0 ROUTe BIAS CHANne1 ENAB1e LIST channel list c7277e 757 e7g77e7 zs7 p 1 cgzze 7s7 enable_status enable _status lt new11ne gt lt END gt 1 0 OUTPUT Hp5250 ROUT BTAS CHAN DTS CARD ALL OUTPUT Hp5250 ROUT BTAS CHAN ENAB 10101 OUTPUT Hp5250 ROUT BTAS CHAN ENAB 10101 10102 10201
199. 12 23 12 Open All 24 gnter CLEAR SETUP Tnpu setup memory number to be oleared ENTER to cancel Enter Open All CLEAR ALL Clear all setup memory OK CLEAR ALL CANCEL
200. GPIB 4155 4156 Vtci Idlin Gmmax 4155 4156 GPIB Setup Hpib_sc 4155 4156 GPIB 7 Hpib_addr 4153 4156 GPIB 17 Swm sc ES250A GPIB 7 Swm addr E5250A GPIB 22 4155 4156 Definition of measurement and stress setup files Ibvg file Vgstr IBVGMES Igleak file
201. Load vfp_data Load vfp_data VFP HP BASIC 24 ES3230A Load vfp_data Address_ 5250 LOAD FTTLE Setup daa Address S2S0 ES250A GPIB LOAD FILE Setup_data 14000 CALL Load vfp data 722 MAT48 1 Mat48 daas Init vfp setup Load _vfp data E3230A Break Before Make ON OFF 1 10
202. 12 5 KEYSIGHT TECHNOLOGIES Keysight E5250A E5250A E5250A VFP E5250A VFP VFP Keysight 4155 4156 ITBASIC E5250A 5 2 Keysight E5250A 12 Keysight E5250A Table 5 1 E3230A Table S 1 y A HP BASIC a f RMB UX or IBASIC Windows b
203. 12 7 11 SPA SRE 10 0 1 1 2 2 4 3 8 4 16 MAV Message Available Summary Message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 7 12 Keysight E5250A 12 STB PR STB p 7 49 STB register lt new11ne gt lt END gt 10 10 10 0 1 1 2 2 4 3 8
204. Keysight 4155 4156 10833A B C GPIB ES250 17003 E5250A Ji E5250A 301 E5250 60002 1250 0929 BNC a 3 a BNC ES5255A ES255A 1 Keysight E5250A 12 2 Keysight ES250A Keysight 4155 4156 GPIB 1 4155 4156 ES250A ON 2 4155 4156 SYSTEM MISCELLANEOUS 4153 4156 SYSTEM CONTROLLER 3 ES250A 4135 4136 4 4155 4156 IBASIC pisplay 2
205. Triaxial Coaxial cable Common COnnector Wire Le Insulator lt Plate DUT A 4 12 SMU Keysight E5250A 12 NOTE DUT RR Keysight
206. 4 5 4 5 4 6 4 8 DUT 3 LM LRE VVT092990000 9 2 OONobob 4 12 ES230A RR lt 4 14 E5250A 4 14 E5255A 4 17 GNDU 4 17 E5250A 4 19 ES252A 4 19 E5255A 4 21 4 23 2 Keysight E5250A 12 3 2 2 ME OR 4 Dae 5 5 VFP 5 5 5 6 KAAA 5 7 kii Ai tii 5 10 5 11 NAT kk 5 12 VDI TI RE 5 14 E5252A SE RE 5 16 E5255A
207. 4155 4156 3 j 1 1 4155 4156 2 E5250A OFF 2 IBVGMES 3 HCI IGLEAK MES IDLEAK MES 4 PARAM MES PARAM MES Id Vg MOSEET Vgstr 5 HCI HCI
208. N ch MOSFET 1 Vth 4155 4156 1 4284A Keysight E5250A 12 Table 9 2 Vth 1 1 4155 4156 2 4284A 3 ES250A OFF BBM 2 Vth 4155 4156 Vth ES250A Vth MOSFET Vth ES2S0A ND oO tt 4284A E5250A E5250A
209. OUTPBUT Hp5250 OPC ENTER Hp5250 A Keysight E5250A 12 7 9 es RST RST ES250A Table 7 1 RST BBM Break Before Make OFF E5252A 10 E5255A OFF RST OUTPUT Hp5250 RST 7 10 Keysight E5250A 12 ld SRE SRE 1 0 SRE enable number enable_number
210. Table 9 5 ES2S0A 4133 4156 Table 9 5 4153 4156 GET p 9 23 Keysight E5250A 12 9 17 Table 9 5 2 NOTE 3 HCI
211. 1 4 ES525SA Table 5 8 1 2 5 ES2SSA IV 4 MD d 2 2 SMU1 1 0 IV 01 01 96 BIAS 11 SMU2 2 0 IV 02 01 96 BIAS 12 SMU3 3 0 IV 03 01 96 BIAS 13 SMU4 4 0 IV 04 01 96 BIAS 14 SMUS 5 0 IV 05 01 96 BIAS 15 SMU6 6 0 IV 06 01 96 BIAS 16 1 0 4 2 IV BIAS IV SMU BIAS IV 10 2
212. 12 9 13 Meas c Constant Definiton Test comm Capacitance Measurement Capa_max F 2 0E 11 Capa_min F 8 0E 12 Sig_Volt V 0 03 Meas_fred Hz 0 Cable len 16048D E m 2 Clen_hptriax 16494A m 1 5 Clen usrtriax h H TRIAX m 0 Clen usrtriax 1 L TRIAX m 0 Clen usrcoax h H m 1 0 Clen usrcoax 1 L m 1 0 Channel 10905 11006 E5250A Channel E3230A
213. 2 3 4 Keysight E5250A 12 6 13 200 210 220 230 240 250 260 270 280 Example Creating Connection Channels TNTEGER Complete DTM Channe1S 100 Gate Drain Substrate Source Channe1S 10101 10202 10303 10404 Channels to Create Put Instrument Initialization Routine here ASSTGN Hp5250 TO 722 Assigns E5250A GPTB address to 722 OUTPUT Hp5250 RST OUTPUT Hp5250 ROUT FUNC NCON Sets Normal Config mode OUTPUT Hp5250 ROUT CONN RULE ALL SROU Sets Single rule OUTPUT Hp5250 ROUT CONN SEO ALT BBM Sets BBM sequence OUTPUT Hp5250 ROUT ChOS sgChanne18 Createg channels OUTPUT Hp5250 OPC ENTER Hp5250 Complete Put Measurement Routine here OUTPUT Hp5250 ROUT OPEN CARD ALL Opens all relayg OUTPUT Hp5250 OPC ENTER Hp5250 Complete OUTPUT Hp5250 RST 40 channel_list Channel 60 channel_ist 80
214. ROUTe COUPle STATe 7 38 1 RST ROUTe COUPle PORT card number couple port 6_ card_number 0 ALL 1 2 3 4 ALL couple_port 1 3 7 9 1 5 7 36 Keysight E5250A 12 NOTE PSR RS WU ROUTe COUPle PORT
215. 1 2 3 Keysight ES250A p 3 1 Keysight ES250A Keysight E5250A 12 2 3 EA E Kcysight E3250A
216. 10101 10103 10101 10102 10103 10112 10202 10112 10201 10202 11012 20102 11012 20101 20102 2 EE NOTE 0 00101 101 5 8 Keysight E5250A 12 2 ROUT FUNC 7 1 s
217. 110 120 FREE 130 ES25SA AUX HEF1 140 1 150 ON 1 6 16 Keysight E5250A 12 160 170 Put Bias Source Control Routine here 180 190 OUTPUT Hp5250 ROUT CLOS amp Channel 200 OUTPBUT Hp5250 OPC 210 ENTER Hp5250 Complete 220 230 Put Measurement Routine here 240 250 OUTPUT Hp5250 ROUT BTAS STAT ALL OFF 260 OUTPBUT Hp5250 ROUT OPEN CARD ALL 270 OUTPUT Hp5250 OPC 280 ENTER Hp5250 Complete 290 300 OUTPUT Hp5250 RST 310 320 END 170 190 IV
218. 2 NOTE IEC 61010 1 INSTALLATION CATEGORIYII INSTALLATION CATEGORIYI POLLUTION DEGREE 2 Keysight E5250A INDOOR USE 0 Safety Class 1 AC International Electrotechnical Commission IEC
219. C High Low CV1 2 BNC OUTPUT HF1 2 BNC OUTPUT AUX1 4 BNC Keysight E5250A 12 Figure 4 6 ES250A 4 AUX CV1 CV2 HF1 HF2 ES5250A 4142B HCU 41422A HVU 41423A 1 BNC Keysight 1251 2277 Keysight 4156 Keysight ES2S0A Figure 4 6 41S6 a Keysight E5250A Kelvin Triaxial Cable rn Triaxial Cable BNC Cable eT Keysight 4156 INTLK Cable oO Connector Plate 4 16 Keysight E5250A 12 CAUTION E5
220. I V 1013 5x1012 2x1012 I V 1012 5x10l 2x1011 C V HF 10 Sx10 2x108 10 4 Keysight E5250A 12 hh lt 0 1 pA I V lt 1000 pA IL V lt 0 3 pF EMF lt 80 LV TV 3 1 2 3 4 C3dB lt 110 nV LV 110 pV C V HF lt 145 pF I V lt 123 pF LV lt 1 0 5 pF C V 0V Electro Motive Force 5 ES232A 1 1 OY
221. SPIN w DIAGnostic TEST FRAMe STATe DIAGnostic TEST ERAIMe STATe 2 DTAGnog tio TEST FRAMe STATe CONTro11er FPANel CONTroller FPANel test result lt new11ne gt lt END gt 1 0 OUTPUT Hp5250 DIAG TEST FRAM STAT CONT ENTER Hp5250 A Keysight E5250A 12 7 19 ES so ROUTe ROUTe ROUTe ES3250A ROUTe ROUTe BTAS CHANne1 DTSAb1e CARD card_number ALL LIST channel_ list LIST channel_ list ENABle CARD card_number ALL LI
222. 6 Keysight 41334156 dc SMU INPUT 1 SMU INPUT 2 SMU INPUT 3 SMU INPUT 4 SMU INPUT 5 SMU INPUT 6 AUX INPUT BNC 4 CV1 CV2 HF1 HF2 200 Vdc 1 Adc el 300 Vdc io MOM RS NN 1 1 Adc ES250A Keysight E5250A 12 1 5 ES2S2A Keysight E5252A 10x12 B3250A 10 12 ES252A
223. 16 8 10 enable_number lt new11ne gt lt END gt 8 OR 6 MSS p 7 49 10 4 4 5 OUTPUT Hp5250 SRE 48 10 OUTPUT Hp5250 SRE H30 16 OUTPUT Hp5250 SRE Q60 8 OUTPUT Hp5250 SRE B110000 Query OUTPUT Hp5250 SRE ENTER Hp5250 A Keysight E5250A
224. 5 20 VEFP 5 26 VFP 5 27 5 28 VFP 5 28 29 oR 5 30 EE SO 5 32 eS 2VSRRRe222 eeCPAe2 eco 5 34 42 SCPI 6 3 SGPI SSS 6 3 HP BASIC 6 4 6 5 6 7 6 7 Keysight E5250A 12 3 lt 6 8 i 6 8 2 0 gt 6 10 6 11 DT TE OS monmon 6 12 WM NNEEBSDP2RSSRSSEDP EEE2 Re 6 13 Na 2 EEUI ee ee 6 15 RE
225. BIAS INPUT BNC BNC 2 16 Keysight E5250A 12 GPIB GPIB GPIB IEEE Std 488 Keysight E5250A GPIB E3230A OFF GPIB ADDRESS 0 30 GPIB ES2S0A GPIB 22 GPIB GPIB E5250A GPIB GPIB 15 GPIB
226. IV Input Output 1 8 BNC TN SMU INPUT SMU1 SMU6 DIP SMU INPUT DUT BIAS IV NO MM MM NM p 2 1 E5255A OE 0 10 3 1 2kQ 10 3 22kQ 10 3 0 Q 0Q Table 1 2 2x8 8 Figure 1 6
227. TIV 1 6 D 2 1 0 E 3 TIV 1 6 F 3 1 0 OUTPBUT Hp5250 SYST CCON 1 ENTER Hp5250 AS ENTER AS USTNG 3X 6A BS FOR I 1 TO 6 C NUM B 1 PRTNT BYTE No I C NEXT I 7 44 Keysight E5250A 12 PIE RU SYSTem CDEScription SYSIem CDEScription SYSTem CDESCr1Dtion card number card_number 0 1 2 3 4 card_description lt mnew11ne gt lt END gt ES2S2A E5252A 10x12 Matrix Switch E5252A 10x24 Matrix Switch
228. 2 Keysight E5250A 12 8 31 VXTplug amp play hpe5250a_timeOut_ Q hpeS2S0a timeOut Q ViStatus VI FUNC hpe5230a timeOut_Q ViSession vi ViPInt32 pTimeOut Vi pTimeOut 8 32 hpe3230a init Keysight E5250A 12 9 KEYSIGHT TECHNOLOGIES NOTE CAUTION NOTE Keysight E5250A E3S250A Vh HCI E3250A HPLIF 3 5 Keysight 4155 4156
229. 4 R 1kHz 1MHz P A B L SERIES A E C PARALLEL A C a Figure 6 4 b 1 c B F A E L B D A C L 3 Keysight E5250A 12 6 29 Figure 6 4 i 2 R ohm L H CIF 1 m 1420 1430 1440 1450 Low Rlc_ data DATA 1350 Rlc data 1360 R o
230. Enter 4155 4156 VFP ES250A 1 5 28 Keysight E5250A 12 SHOW ES250A CONFIG SBTUP VFP MODE DEFINE LABEL SETUP
231. 4 16 MAV Message Available summary message 5 32 ESB Event Status Bit 6 64 MSS Master Summary Status 7 128 OUTPUT Hp5250 STB ENTER Hp5250 A Keysight E5250A 12 7 13 SS Re TST TST ES250A RST TST UP LeZ 2 test result lt mnew11ne gt lt END gt 1 0 OUT EN PUT H WAI OPC 1 OPC p 7 9 WAT DS2507 TASTE ER Hp5250 A OUTPUT Hp5250 WAT Keysight E5250A 12 eS IN 0 DIAGnostc DIAGnosiic DIAGnostc NOTE DIAGnostic
232. 0 1 1 Keysight E5250A 12 9 11 41SS 4156 41SS 4156 Init seting GPIB Figure 9 2 Ad pm GPIB 1 Pm enab 0 1 0 ENTER TImit instrument CALL Cal415x DISP Agilent 4155 4156 Calibration Completed
233. 1 2 3 4 ALL DIAGnostic DIAGnostic TEST CARD CLEar c number ALL EXECute card number ALL STATe card_number FRAMe CLEar CONTroller FPANe1 EXECute CONTroller FPANe1 STATe CONTroller FPANel card_number 1 21314 Keysight E5250A 12 7 15 NOTE SS Re DIAGnostic TEST CARD CLEar DIAGnostic TEST CARD CLEar DIAGnostic TEST CARD CLEar card number card_number 1 2 3 4 ALL OUTPUT Hp5250 DIAG TEST CARD CLE 1l DIAGnostic TEST CARD EXECute SYST CPON DIAGno
234. 4 4 16495E Keysight E5250A 12 8ch Keysight 16494E 8 DUT DUT WARNING 16494E DUT DUT 16494E ES2SSA 16494E E3233A DUT DUT E5255A 8 1 16494E 1 E3233A 1 3 16494E DUT 16494E
235. ES250A A6J ANSI ZS40 E5250A UK6 1 12 Keysight E5250A 12 E5250A ES5252A ES5255A ES250A E5250A E5250A VXlplug amp play Driver a E5250A 3 5 LIF ES252A E5252A Installation Guide ES255A E5255A Installation Guide BNC BNC 2 2 0 0 10 1 2 kQ 10 22 kQ 10 3
236. 1 0 IJdlin Gmmax Vtext Vtci Setup for drawing saving data in main menu Save at last 0 Save at last 1 1 9 38 HCI Keysight E5250A 12 10 KEYSIGHT TECHNOLOGIES Keysight E5250A ES5252A E5255A Keysight E5250A Keysight E5252A 10x12 Keysight E5255A 24 8x3 Keysight 4155 4156
237. 1 2 3 4 ALL Zs port 1 10 OUTPUT Hp5250 ROUT BIAS PORT ALL 6 7 28 Keysight E5250A 12 NOTE ROUTel BIAS PORT ROUTe BIAS PORT ES5252A E5255A 1 10 ROUTe BIAS PORT cg7 number card_number 0 1 2 3 4 port number lt new11ne gt lt END gt 1 10 OUT OUT EN PUT Hp5250 ROUT BTAS PORT PUT Hp5250 ROUT BTAS PORT ER Hp5250 A ALL 4 1 A 4 Keysight E5250A 12 7 29 Ks ROUTe BIAS STATe ROUTel BIAS STATe
238. 12 4 23 E5255A Table 4 6 ES2S0A Keysight SMU 16494A 003 80 cm 75 pF IA 16494B 003 80 cm 20 pF 16494C 001 4142B 1 5m 140 pF E5250A E5252A 1 145 pF E5252A 2 1 8 pF E5255A 1 180 pF E5255A 2 1 60 pF 16494A 001 13m 125 pF 16494A 002 3 m 240 pF 16494B 001 1 5 m 140 pF 16494B 002 3 m 260 pF 16494C 001 4142B 1 5 m 140 pF 16494C 002 4142B 3 m 260 pF 16494D 001 1 5 m 125 pF 16494D 002 3 m 240 pF 16494E 003 3 m 240 pF 8121 1191 Xm 1m 130 pF 4 24 Keysight E5250A
239. 5 6 Keysight E5250A 12 Figure S 1 Kcysight E5250A Figure 5 1 M Card No Channel No Card No Channel No 1digit 4 digits 1digit 4 digits 5 1 0 4 E3250A Table 2 4
240. ANAHCI ASCII 4133 4136 4133 4156 3 Idqlin ANAHCI Vdstrr Vgstrt Idlin Device Vahdity Tdc idlm 0 1 Tdc 0 1 Tdc Averaged Tdc idlm Tdc iqlin 0 1 4 5 1 95 1 E 6 1 E 5 Td1in Devrce Va1idity Tdc idlin 1 2 3 4 0 835 5786 0 3401 432 0 6269 047 0 24366 79 Averaged Tdo 1d1in 8718 2119 Keysight E5250A 12 9 35 GPIB 41SS 41S6 SP MUX M PARAM MES
241. Input Save file name 8 gnter gnter LOAD EILE Input Load file name 8 Enter VFP VFP ES3230A 1 gnter 5 42 Keysight E5250A 12 6 KEYSIGHT TECHNOLOGIES CAUTION TIT SCPI Standard Commands for Programmable Instruments IEEE 488 1 IEEE 488 2 Keysight E5250A SCPI
242. OUTPUT 701 SOUR 0 0 Se Gate Voltage to 0 0V OUTPUT 702 SOUR 0 0 Set Drain Voltage to 0 0V OUTPUT 703 SOUR 0 0 Set Substrate Voltage to 0 0V SUBEND 4 3 5 SP MUX RE STORE SP MUX NOTE 9 24 Keysight E5250A 12 1 Table 9 7 2 ES25SA DIP Figure 9 3 3 E5255A IVin1 Figure 9 3
243. 20 mV p 9 36 i 3 1 10 10 8 1000 2000 2 10 20 9 3000 5000 3 30 50 10 5000 10000 4 50 100 11 10000 20000 5 100 200 12 30000 50000 6 300 500 13 50000 100000 7 500 1000 Keysight E5250A 12 9 21 Table 9 7 IDXY Idlin GMXX Gmmax VTEXX Vtext VTLXX Vtci XX Table 9 7
244. B3S250A 1 Table 4 2 2 Table 4 1 Keysight 16494B 2 3 3 p 4 8 4 DUT DUT p 4 12 Table 4 1 mm mm 11 14 2 8 10 3 SN ee 1 2 11 3 A 8 mm mm
245. CAUTION E5250A Keysight E5250 60003 1 2 Keysight E5250A 12 2 9 Figure 2 2 Module pins SMU input connectors BIT2 2 BIT3 4 BIT4 R BIT1 1 ES255A E5255A Keysight E5255A 2 8 ES25SA ES3253A
246. E5250A Table 4 3 ES2S0A ES2S0A s 0 2 DC 4135 MPSMU SMU1 6 16494A 003 VSU AUX1 4 BNC VMU AUX1 4 BNC Intlk 16493J INTLK 4156 HRSMU SMU1 6 16494B 003 16494A 003 VSU AUX1 4 BNC VMU AUX1 4 BNC Intlk 16493J INTLK 41301 HPSMU SMU1 6 16494B 003 16494A 003 MPSMU SMU1 6 16494A 003 PGU HF1 2 BNC GNDU SMU1 6 16493H GNDU ES3250 60004 16493H GNDU 4142B SMU SMU1 6 16494C 001 16494A 001 VSU AUX1 4 BNC VMU AUX1 4 BNC GNDU SMU1 6 16493H GNDU E3230 60044 16493H GNDU Intlk 16435A INTLK 16493J INTLK
247. SP_MUX Mp 701 702 703 ON HP BASIC p 9 23 NR A 2 na MSI CS80 702 1 MST C880 702 1 SP MUX LOAD SP MUX EDIT E5250A 4155 4156 IDVD MES GET OUTPUT 722 ROUT CLOS 10101 20101 30101 4155 4156 Single Id Vd 4155 415
248. 140 Break Before Make Keysight E5250A 12 6 19 Pn 150 160 170 180 190 200 210 220 230 240 250 260 270 280 290 300 OUT OUT OUT OUT EN OUT OUT EN OUT PUT Hp5250 ROUT COUP PORT AL 13 5 PUT Hp5250 ROUT COUP STAT AL ON PUT Hp5250 OPC ER Hp5250 Complete Put Measurement Routine here PUT Hp5250 OPC ER Hp5250 Complete PUT Hp5250 RST END PUT Hp5250 ROUT CLOS sgChanne18 PUT Hp5250 ROUT OPEN CARD ALL 150 SMU 3 4 SMU 5 6 160 ON 180 Channel 190 200 220 240 260 280 ES2S0A 6 20 Keysight E5250A
249. Continue Figure 9 9 HCI RAPHI LIST RAPHI GS MEDI UM docTod 08 14Phi HEI mmax ShiiltSITr 1Qnn0gsc Hayies 1 CURSORL 10 OOo hk ss MARKERT 1m nnnnnnnks lt 1 GmlhnT 3 Tas H MAHKEH LE 1 PMS 3 ON ARKE 109 hl NT MAX I NTER POLATE on GmsFT BI REGT MaHKEH CURSOR MaHKE SKIP UT LT S15 CURSOR 10 0 Slress 61 dacades 1 di 10 Ok SHORT MARKER LINE GALT NG DI SPLAY ISWEEP TI ML NG CONST CURSOR SETUF SETUF ETUP SETUP NOTE Pause to save 0 ST Tdc 9 34 Keysight E5250A 12
250. I 20 es VFP Cannot configure for AUTO Normal mode used File name is wrong Instrument at address XXX is not GPIB XXX E5250A ES250A E5250A GPIB XY Load vfp data 44 ess 5250 File data is not VFP format or is VFP broken GPIB address connection or
251. 0 2 Query Brror Output Queue QYB 3 Device QYE EXE CME DependentError DDE 4 Execution Error ES250A EXE 5 Command Error CME 6 0 7 Power On PON E5250A ON 8 15 0 8 OR ESB 5
252. 12 p 5 1 ROUT CONN SEO card_no NSEQ ROUT CONN SEQ card_no BBM Break before Make ROUT CONN SEQ card_no MBBR Make before Break 100 OUTPUT Hp5250 ROUT CONN SEQ ALL BBM 110 Sets all cards to Break before Make connection sequence p 5 1 ROUT BIAS PORT card no input port no input_port no ROUT BIAS CHAN BNAB CARD card 7o ROUT BIAS CHAN ENAB LIST channel list
253. 16 W ES2SSA 32 W Keysight E5250A 12 1 11 E5250A ES250A E5250A ES250A 301
254. 16494D 001 1 5m 16494D 002 3m 16494E 8 16494E 001 3m 16495C 16494D 6 16495D 16494D 12 16495E 16495F 12 Triax Intlk GNDU 1649SF 001 16495F 002 16495G 24 Triax Intlk GNDU 1649SG 001 16495G 002 Keysight E5250A 12 1 16 Keysight E5250A 12 KEYSIGHT TECHNOLOGIES WARNING Keysight E3250A 3 E5250A E5250A
255. GPIB p 4 1 2 4155 4156 ES250A ON 3 4155 4156 SYSTEM MISCELLANEOUS 4155 4156 SYSTEM CONTROLLER 4 E5250A 4135 4156 5 4155 4156 IBASIC pisplay 2 IBASIC 6 IBASIC GET GET 7 GET VFP gnter 8 4155 4156 IBASIC Run Input Agilent E5250A GPIB Address default 722 9 ES2S0A GPIB Enter E5250A 722
256. REPORT CRT LEAK TEST MENU LEAK TEST 3 9 Keysight E5250A 12 3 19 2 3 20 Keysight E5250A 12 4 KEYSIGHT TECHNOLOGIES Keysight ES250A E5250A E5252A E5255A Keysight 16494E 8 ES255A
257. ROUTe CLOSe LIST ROUHel CLOSel LISTI channel_ist p 5 1 ON channel ist ROUTe BIAS STATe p 7 30 ROUTe CLOSe LIST channel list channel_list p 5 1 OUTPUT Hp5250 ROUT CLOS 10101 10202 ROUTel CLOSel LIST channel_ist
258. Te 7 54 7 55 Output Queue 7 56 8 VXlplug amp play OT RN 8 3 6 Keysight E5250A 12 2 8 4 23 ET TL TL SI LIE Sk 8 5 hpe5230a biasChanCard So oR EE EE 8 8 hpe5230a biasChanList 8 8 hpe5250a biasChanList Qn 8 9 hpes2504 biasROM SS RT SS SEE RS 8 10 hpe52504 biasState oo on EE RE EE EE 8 10 hpe52908CI0S6S So ER RE EEE SE 3 ti 8 11 hpe5250a closeCard QL 8 11 hpeS2308icloseH1S ea 8 12 hpe5230a closeList Or 8 13 hpe52504a cmd oo EE SE 8 14 hpes250a4 emdData OL oR REE 8 14 hpeS250a cmdInt 8 14 hpe5250a cmdInt16Arr OL 8 15 hpe5250a cmdnt16 OO 1 8 15 hpeS230 cmdInt32ATr O 5 ooo 8 16 hpe32308 cmdIn632 Se AO 602 5 ss 8 16 hpe3230a cmdReal oe TE 6 17 hpe5250a cmdReal64Arr O ES 6 17 hpe5250a cmdReal64 OL 8 18 hpe5250a cmdString Qa 8 18 hpes2504d compenGC bd LR 8 19 hpe5250a connRuleSed 8 20 hpe52508 ieouplePort S oa SR oS SE rir 2 hd 8 21 hpe52504 coupleState 8 22 HpeS25085dCES SE 8 22 hpe5250a error message 8 22 hpeS250aserrot qUe ER RE EE
259. card_number 1 2 3 4 SYST CDES card number card_number 0 1 2 3 4 SYST CPON card number card_number 0 ALL 1 2 3 4 ALL SYST CTYP cg7 number ID card_number 0 1 2 3 4 SY8T ERR SBY8T VERS ES250A SCPI 12 8 Keysight E5250A 12 Keysight Technologies 1995 2014 12 2014 10 AI HI TKR LA EK AAI AK KK HAK HR I KEYSIGHT E5250 97000 TECHNOLOGIES www keysight com
260. 1 BNC BIAS INPUT 52 53 BIAS INPUT 51 BIAS BIAS INPUT BIAS INPUT BIAS INPUT BIAS INPUT BNC BNC BIAS BIAS INPUT BIASin out Figure 2 5 BNC
261. 2 2 ES252A Gp 5 16 E5255A p 5 20 Keysight E5250A 12 5 7 Table S 2 gt NN RN 1 1 2 2 3 3 4 4 1 4 0 C 10101 10102 10103 10101 10102 10103 10112 10202 10112 10202 11010 20102 11010 20102
262. 2 4 i 2 4 2 2 6 2 6 E9250 GN 2 7 6 2 2 7 DSN RE a 2 8 Co 2 9 E5255A BE its lk 1 2 10 2 11 2 0 2 0 2052 502 2 12 Sa 2 13 INK 2 17 GPIB 2 17 Keysight E5250A 12 1 5 2 18 eo 2 18 2 18 OD 3 3 RR 3 4 3 6 3 10 0 LOAOA 5 O 3 10 3 11 ET Ii 3 12 3 15 RG 4 3 8ch
263. 8121 1191 Conductive Layer Center Conductor msulator Clear Cover here using sleeve Insulator black in 2 Cent duct min 2 mm enter conductor for Force Sense signal 1 Nu approx 10 to 15 mm Outer conductor Insulator clear 2 CO So gt lt 2 90 lt 6 eX for Guard signal Conductive layer black Keysight E5250A 12 4 13 WARNING ES250A ES2S0A Keysight ES250A ES250A ES255SA GNDU 4 E5250A E5250A
264. Keysight E5250A 12 Figure 1 5 ES2SSA BLOCK 1 BIAS Input1 Resistor 9 3 L 4 IV Input 1 Ss ovmt OO BLOCK2 BIAS Input2 Resistor Q IVInput 2 8 SS 8 4 omt 9 10 11 12 13 14 15 16 BLOCK3 BIAS Input3 Resistor gt IV Input 3 OS 4 0utput 17 lt w Keysight E5250A 12 1 9 Table 1 2 ES2SSA 2x8
265. Keysight E5250A 12 5 41 SAVE LOAD CATALOG 4155 4156 SAVEFILE 4155 4156 LOADFILE 4153 4136 1 o RETURN SAVE FILE
266. OPC 1 Keysight E5250A 12 PIT CLS CLS Error Queue p 7 49 OPC CL8 OUTPBUT Hp5250 CLS ESE 1 0 p 7 49 ESE enable number
267. 1 Hi SMU5 05 WE A Y HF2 08 p801 D802 cv1 Yr ns cv2 1005 Input Port Input Port No Output Port Output Port No 2X Channel No Keysight E5250A 12 5 19 Table S 7 E5255A ES2SSA E5255A ES525SA Table 5 7 1 2 2 5 E5255A ES2SSA 1 4 2 2 1 IV 01 BIAS 51 IV 02 BIAS 52 IV 03 BIAS 53 01 08 IV 01 BIAS 51 IV 02 BIAS 52 IV 03 BIAS 53 01 08 IV
268. 1 kHz 1 MHz 1000 pF ES232A Keysight 16494A 0011 5m lt 10 MHz C V HF gt 108 lt 3 5 I V 10 V 400 fA Keysight E5250A 12 10 5 AL gt 501 A 23 2C S 9C 5 60 RH B 5 C 18 C 28 C 40 C 5 gt 60 RH C 28 C 40 C 60 80 RH A B C A 1 0 1 0 1 0 V 200 200 200 300 300 300 Q TI V 0 6 0 6 0 6 1 0 1 0 1 0 O IL V 10B 5x1
269. SCPI DIAG TEST FRAM EXEC CONT DIAG TEST FRAM STAT CONT DIAG TEST FRAM CLE CONT DIAG TEST FRAM EXEC 7 FPAN DIAG TEST FRAM STAT FPAN DIAG TEST FRAM CLE FPAN DIAG TEST CARD EXEC ATL Card No 1 4 DIAG TESTECARD STAT 7 ALL Card No 1 4 DIAG TEST CARD CLE ALL Card No 1 4 DIAG TEST FRAM EXEC FPAN ES250A 4 LED 10
270. 01 BIAS 51 IV 02 BIAS 52 IV 03 BIAS 3 01 08 IV 01 BIAS 51 IV 02 BIAS 52 IV 03 BIAS 53 01 08 5 20 Keysight E5250A 12 E5255A 1 1 4 4 2 IV BIAS IV 01 03 BIAS 51 53 IV SMU 2 01 08 Figure 5 6 Figure 5 6 ES2SSA Block 1 BIAS Input Channel No Keysight E5250A 12 5 21 Table 5 8 E5255A Keysight E5255A E5250A 1 1 2 1 3
271. 6 31 2 ES525S0A ASCII 1 C COMPEN GET C_COMPEN 2 C COM RE STORE C_COM 3 HP BASIC 4 LOADSUB LOADSUB ALL FROM C COM Parameter Out of Range
272. 1 Current Setup Memory E5250A NEXT SETUP BS250A PREV SETUP E5250A GOTO SETUP E5250A MODIFY SETUP MORE MAIN MENU SETUP MEMORY MENU Agilent E5250A Virtual Front Panel Utility SETUP MEMORY MENU Current Setup Memory 1 Setup Comment Setup Comment 1 Open All 13 Open All 2 MOSFET 1 14 Open All 3 MOSFET 2 5 Open All 4 MOSFET 3 16 Open All 5 MOS CAP 1 17 Open All 6 MOS CAP 2 18 Open All 7 MOS CAP 3 19 Open All 8 Open A11 20 Open All 9 Open A11 21 Open All 10 Open All 22 Open All 11 Open All 23 Open All 12 Open All 24 Open All Se
273. 12 PR SYSTem CCONfig SYST CCON ROUTe l BIAS PORT ROUT BIAS PORT BIAS PORT ES525S0A cg7 number ES5250A close_status close_status 1 e ose status
274. Keysight E5250A 12 7 17 NOTE ee v DIAGnostic TEBST FRAMe EXECute DIAGnostic TEST FERAMel EXECute RST rocarselfTest 10 DTAGnogt1o TEST FRAMe EXECute CONTro11er FPANel CONTroller FPANel test result lt new11ne gt lt END gt 1 0 OUTPBUT Hp5250 DTAG TEST FRAM CONT 7 18 Keysight E5250A 12
275. Vi hpe3230a init DErrDetect VI TRUE VI FALSE Keysight E5250A 12 8 23 VXIplug amp play hpe5250a esr Q hpeS2S0a esr Q ESR ViStatus VI FUNC hpe5250a esr Q ViSession vi ViChar VI FAR errstr Vi hpe5230a init errstr E5250A 1 ESR_OPC 2 ESR RQL 4 ESR QYE ERROR 8 ESR DEVICE DEPENDENT ERROR 16 ESR EXECUTION ERROR 32 ESR COMMAND ERROR 64 ESR URQ 128 ESR_PON ESR_MULTI EVENT hpeS2S0a_func ViStatus VI FUNC hpe5250a func ViSession vi ViInt16 channel config vi hpe5250a_init channel confip 0 1 8 24 Keysight E5250A 12
276. 1 0 unit CONT FPAN DTAG TEST FRAM STAT unit 1 0 1 unit CONT FPAN ROUT BIAS CHAN DTS CARD cg7 number card_number 0 AL 1 2 3 4 AT ROUT BIAS CHAN DTS LTST channel 757 egze7 list Keysight E5250A 12 12 3 SCPI ROUT BIAS CHAN DTS LIST channel ist 1 0 channel_ist ROUT BIAS CHAN ENAB CARD card number
277. 1 2 a 24 23 26 48 2 7 1 MI op 72 NDL N A 5 6 Device1 Device2 Device24 Total 24ea NOTE SP MUX M Devicel Vdstr Vgstr Devicel Keysight E5250A 12 9 27 1 GPIB 4155 4156 717 E5250A 722
278. 11 12 J 10 3 001 10 4 NE 10 4 10 5 Sui 10 5 501 EK 1 10 6 1 10 6 10 7 10 7 FL 10 8 Keysight 4155 4156 J 10 9 4155 10 9 4156 10 10 SCPI LL 11 4 NR RTOOKNK KN 11 4 CGC 11 7 eo 1 2 11 8 Query EE 11 9 E5250A LL 11 10 11 11 KKKKKO La 11 12 SCPI Keysight E5250A
279. BIAS n 1 3 RETURN DEFINE LABEL MENU BIASn LABEL n 1 3 Input Label Name Max 5 ohar string Enter gnter DEEINE LABEL MENU Agilent E5250A Virtual Front Panel Utility DEFINE LABEL MENU E5250A TNPUT1T IVl INPUT2 sv RU SEMW2 NE TNPUT3 EV INPUT4 IV4 TNPUT5 TV5 INPUT6 TV6 TNPUT 7 Y INPUT8 HF2 INPUR9 s VTL TNPUT10 CV2 CARD1 E5252A CARD2 E5252A CARD3 E5255A CARD4 E5255A No Bias Input Port No Bias Input Port BTAS1 C3B1 BIAS2 C3B2 BIAS3 C3B3 BTAS1 C4B1 BIAS2 C4B2 BIAS3 C4B3 Select desired softkey Keysight E5250A 12 5 33 Figure S 11 SETUP MEMORY SETUP MEMORY MENU E5250A
280. ENTER Hp5250 AS A 0 10101 10201 Keysight E5250A 12 7 27 NOTE Zs ROUTe BIAS PORT ROUHel BIAS PORT ES3252A E5255A 1 10 6 5 1 RST ES252A 10 O ROUTe BTAS PORT cg7 number bias_port card_number 0 ALL
281. Figure 2 2 3 Table 2 1 E3233A Table 2 2 Keysight ES2SSA DIP SW3 pl sw1 1 DP SW2 1 IVout1 IVout2 IVout3 connector Ivin1 connector IMn2 connector in3 cable cable cable Block 1 Block 2 Block 3 Resistor holder 1 Resistor holder 2 Resistor holder 3 IVin cable DIP SW setting connection BIT1 BIT2 BIT3 SMU1 1 0 0 SMU2 0 1 0 SMU3 1 1 0 SMU4 0 0 1 SMU5 1 0 1 SMU6 0 1 1 Resistors BIT4 0 ohm 0 other 1 Screws Total 48 Resistors Total 24 BIASin2 terminal BIASout1 terminal BIASin3 terminal
282. SMU1 2 6 2 8 3 BNC 1 BIAS INPUT 51 BIAS INPUT 52 4 BNC BIAS INPUT 51 4 BIAS INPUT 53 3 BIAS INPUT 51 3 BIAS INPUT 53 2 BIAS INPUT 51 2 BIAS INPUT 53 1 4 BIAS INPUT 53 BIAS 96 1 BIAS 1 IV BNC open caps 3 BNC cables 4 1 BIAS INPUT 51 __ slot number BNC cable from Bias Source
283. SYSTem SYSTem CCONfig card_number CDEScription card number CPON card_number ALL CTYPe card_number ERRor VERSion card_number 0 1121314 Keysight E5250A 12 7 43 EPS SYSTem CCONfig SYSlem CCONfig E5250A SYSTem CCONF1 cg7 number card_number 1 2 3 4 card_configuration lt mew11mne gt lt END gt E5252A 0 E5255A 164BCDEF 4 8 A 1 TIV 1 6 B 1 1 0 C 2
284. input_port no ROUT BIAS PORT 1 10 ROUT COUP PORT 1 3 5 7 9 6 6 Keysight E5250A 12 p 5 1 i ROUT FUNC NCON ROUT FUNC ACON 100 OUTPUT Hp5250 ROUT FUNC NCON 110 Sets E5250A to Normal channel configuration mode p 5 1 1 ROUT CONN RULE cg77 no FREE ROUT CONN RULE cg77 7o SROU 100 OUTPUT Hp5250 ROUT CONN RULE ALL FREE 110 Setg all cards to Free Connection rule Keysight E5250A
285. 50 C 200 C 40 C 70 C 5 80 RH 5 90 RH 65 C 10 8 Keysight E5250A 12 4155 Keysight 41SS 41S6 Keysight 4155 4156 E5250A LV Iout A Vout 41SS MPSMU H V 2V 960 WV 0 5 x Iout V 780 WV 0 5 x Iout V MPSMU lnA 3pA 0 2 x Vout pA 3pA 0 2x Vout pA 10 nA 7pA 0 2 x Vout pA 5SpA 0 2 x Vout pA 100 nA 50pA 0 4 x Vout pA 30pA 0 4 x Vout pA Keysight E5250A 12 10 9 4156
286. If any setting parameter of this menu is changed all setup memory will be cleared Select desired softkey CHANGE CONFIG AUTO NORMAL BIAS PORT Input Bias Port Number gnter 1 10 gnter BIAS STATE ON OFF MAIN MENU Changing mode will olear all setup
287. 1 1 IVinl SMU1 2 IVinl SMU3 3 IVinl SMU4 DIP SW1 SW2 SW3 Figure 9 3 3 Figure 9 4 Table 9 8 p 4 1 Keysight E5250A 12 9 25 Figure 9 3 ES2SSA DIP 3 5 Nul M 2 IVin2 cable 3 IVin3 cable SW3 pe IVoutl IVinl cable IVout2 For E5255A in Slot 1 Connect IVinl to SMU1 and set SW1 SW2 SW3 to im For E5255A in Slot 2 Connect IVin1 to SMU3 and set SW1 SW2 SW3 to d For E5255A in Slot 3 Connect IVin1 to SMU4 an set SW1 SW2 SW3 to pr OO 1 Hn ol PO 9 9 nc OoOoOOoOoOo
288. 100 ViStatus VI FUNC hpe5250a closeList ViSession vi Vilnt32 VI FAR closechan list vi hpe5250a_init closechan list 5 ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 oO 8 12 Keysight E5250A 12 VXTplug amp play hpe5250a closeList Q hpeS2S0a closeList Q closechan list 0 0 100 close_status
289. 2 2 1 10x12 0 01 10 01 12 1 2 10x24 0 01 10 01 24 1 3 10x36 0 01 10 01 36 1 4 10x48 0 01 10 01 48 1 0 4 2 01 10 2 01 48 Figure 5 5 0 00101 101 5 18 Keysight E5250A 12 ES5252A NOTE 1 SMUS HF1 CV1 0 07 09 SMU6 HF2 CV2 06 08 10 05 07 09 Figure 5 5 ES252A 10x48 5
290. HP BASIC WS 3 ES252A Vth C ES255A HCI Keysight 4155 4156 TBASIC ES250A 1 14 Keysight E5250A 12 ES250A ES252A 10x12 ES255A 24 8x3 16494A 16494A 001 1 5m 16494A 002 3m 16494A 003 80cm 16494B 4156 ES230 16494B 001 1 5m 16494B 002 3m 16494B 003 80cm 16494C 4142 ES230 16494C 001 1 5m 16494C 002 3m 16494D 8
291. ViStatus VI FUNC hpe5250a cmd ViSession vi ViString cmd str vi hpe5250a_init cmd sfr ES250A 256 hpeS2S0a_ cmdMData Q E5250A E5250A result ViStatus VI FUNC hpe5250a cmdData Q ViSession vi ViString cmd str Vilnt32 size ViChar VI FAR result vi hpe5250a_init cmd sfr ES250A 256 SiZe result 2 32767 result E5250A hpeS2S0a cmdInt E5250A TImt16 Imt32 Int16 ViStatus VI FUNC hpe5250a cmdInt ViSession vi ViString cmd str Vilnt32 value vi hpe5250a init cmd str ES250A 256 value 2147483647 2147483647 8 14 Keysight E5250A
292. All ITBASIC 5 4155 4156 GET GET 6 GET SELE TEST gnter 7 4135 4156 IBASIC Run mpuE Agilent E5250A GPIB Address default 722 8 ES250A GPIB Enter E5250A 722 Enter 4155 4156 SELF TEST LEAK TEST QUIT Keysight E5250A 12 3 11 Figure 3 2
293. Isub Vg 4155 4156 Vgstr Figure 9 6 Isub Vg Isub Vg RAPHILLI ST RAPHI GS MEDI UNM ducTos oo2 30F lb Vgq Measuremenl MAaRKER MRKEFRT 1Y 81 nu 1 on i Ss nnnnnnnn W haRKER Es es es es oe cs os os oe I y 4 LNTER 13 UB POLATE OFF BI REGT 8 MaRKER i CURSOR ha RKER SRIP TO LY 5315 CURSOR ya WI 1 on dw 1 n OFF FHRKE RHJ LI NE SGaLI NG DISPLAY SWEEP TI MI Ha GONST GUHEOH ET UP ET UP ET UP ET UP 3 BE3233A 1 25 49 Device1 Connect HCI degradation test devices 9 30 Keysight E5250A 12 4 Continue
294. Keysight E5250A 12 5 25 E5255A VEP VFP Keysight E5250A Keysight 4155 4156 BASIC VFP ES250A VFP VFP VFP 5 26 Keysight E5250A 12 VFP VEP VFP E5250A VFP ES32S0A
295. OUTPUT Hp5250 ROUT COUP PORT ALL 1 31 OUTPUT Hp5250 ROUT CLOS 10104 1 3 2 4 ROUT CLOS ROUHel COUPle PORT ES3252A 2 ROUTe COUPle PORT card number card_number 0 1 2 3 4 port number port number lt new11ne gt lt END gt 1 3 5 7 9 OUTPUT Hp5250 ROUT COUP PORT ALL 1 3 OUTPUT Hp5250 ROUT COUP PORT 1 ENTER Hp5250 AS A 1 3 Keysight E5250A
296. p 9 1 VFP VFP VFP Keysight 4155 4156 TBASIC ES250A ITBASIC VFP E3230A VEP p 5 26 Keysight E5250A 12 5 5 VFP Keysight E5250A ES5252A E5255A
297. x 395 mm x 424 mm 230 mm x 430 mm x 600 mm 2 0 11 2 kg 001 2 0 kg 501 2 1 kg IIV 2 TV 4 C V 2 HF 2 12 TV 3 3 24 8 x 3 Keysight E5250A 12 10 3 KK 001 A 23 C 5 9C S 60 RH B 5 C 18 C 28 C 40 C 5 gt 60 RH C 28 C 40 C 60 80 RH A B C A 1 0 1 0 1 0 V 200 200 200 300 300 300 LV 0 6 0 6 0 6 IIJV 1 0 1 0 1 0 CV HF 1 0 1 0 1 0 Q
298. 3 BNC T 2 BNC T Keysight 1250 0781 Keysight 1250 2405 BIAS INPUT Keysight E5255A Keysight E5250A 12 2 15 96 1 BIAS 1IV 4 Figure 2 6 EA Xx ES255SA 4 8 BNC BNC 3 SMU INPUT 1 TIV 0 Q 1 24 1 BIAS 1 IV 1 2 14 24 4 IVinl
299. 4156 GPIB gnter 817 pgnter LEAK TEST MENU START TEST MAIN MENU 3 START TEST Select TV Por of Leak Tes by softkey IVn E5250A n 1 6 E5255A TV CANCEL 3 16 Keysight E5250A 12 2 4 ES250A 1IVn n
300. 6 18 6 21 VFP EE 6 21 Load vip da ES 6 22 It VfB setUD ER EE EG 6 22 GOhmeet VDI 6 23 FNGet Vib commen to ne el RR RR i i 6 23 ET ZD my 6 24 9 Oh 6 25 RDA EN 6 26 RSE kn 6 27 2 6 28 5 6 29 ESL 6 31 bb bk 6 32 TNE SE io 6 32 se SE 7 4 E5250A LL 7 4 CL ER 7 5 GR i 7 5 Re i i i Ee 7 7 4 Keysight E5250A 12 DN a RS Ot fons Sep oi 7 8 OP RR CC CE 7 9 RS LS A i ee 7 10 SRE RR RS 7 11 SB RR NR oR SR NG 7 13 2 7 14 WAN 7 14 DIAGnostie 4 7 15 DIAGnostic 7 15 DIAGnostic TEST CARD CLEar ee 7 16 DIAGnostic TEST CARD EXECute en 7 16 DIAGnostic TEST CARD STATe en 7 17 DIAGnostic TEST FRAMe CLEar 7 17 DIAGnostic TEST FRAMe EXECute 7 7 18 DIAGnostic TEST FRAMe STATe67 en 7 19 ROUHe 7 20 ROUGEKORS 7 20 ROUTe BIAS CHANnel DISableeCARD 7 22 ROUTe BIAS CHANnel DISable LIST 7 23 ROUTe BIAS CHANnel DISable LISTT7 7 24 ROUTe BIAS CHANnel ENABle CARD 7 25 ROUTe BIAS
301. 7 VXTplug amp play hpe5250a biasChanCard hpeS2S0a_biasChanCard ViStatus VI FUNC hpe5250a biasChanCard ViSession vi Vilnt16 disable enable Vilnt16 bias cardno vi hpe5250a_init disable enable 0 1 bias cardno 1 2 3 4 3 9 0 hpe5250a func hpeS2S0a _ biasChanList biaschan hist 0 0 100 ViStatus VI FUNC hpe5250a biasChanList ViSessi
302. BASIC Controller 16048DE 16495A a Output 4155 4156 Shielding Box or Test Fixture 16494A wiOpt 003 E5250AE5252A 0 Ont 002 6ea Table 9 4 MM 4155 4156 SMU 1 SMU INPUT 1 OUTPUT 1 MOSFET SMU 2 SMU INPUT 2 OUTPUT2 MOsEET SMU 3 SMU INPUT 3 OUTPUT 3 MOSFET SMU 4 SMU INPUT 4 OUTPUT 4 MOSEET 4284A Hp Hc AUX INPUT CV1 OUTPUT 5 H Lp Lc AUX INPUT CV2 OUTPUT 6 L 9 8 Keysight E5250A 12 1 GPIB 4153 4156 717 4284A 724 E32S0A 722 2 ON 3 HP BASIC 4 4153 4156 SYSTEM MISCELLANEOUS 4153 4156 NOT SYSTEM CONTROLLER 5 HP BASIC
303. CHANnel ENABle LIST 7 26 ROUTe BIAS CHANnel ENABle LIST17 7 27 ROUTel BIAS PORT ES ER EE 7 28 EROUTe BIAS PORED SR RE EE EE RE 7 29 ROUTe BIAS STATe en 7 30 ROUTe BIAS STATe ee 7 31 EROUTte iCEOSeiCARD7 AS SASS ER 7 32 EROUTej CLOSeELIST SS RR 7 33 EROUTe CLOSeEEISE NS Lb sae oe 7 33 ROUTe CONNection RULE 7 34 Keysight E5250A 12 5 ROUTel CONNection RULE27 Le 7 34 ROUTel CONNection SEOuenee 7 35 ROUTe CONNection SEOQuence7 7 35 ROUTel COUPle PORT oo DR EE EE 7 36 EROUTe COUPle PORT UN Ss ERS SE SESS 7 37 ROUTe COUPle STATe 7 38 ROUTe COUPle STATe 7 39 ROUTe FUNCtion i 7 40 EROUTe FUNCtU6R A oo Ws EE 7 40 ROUTeOPEN GARD oo NE No SRN SE I ERI SR ES 7 41 ROUTe OPEN LISTT oo So EE ES EE 7 42 EROUTGEOPBNIELIS oS RS SE Ei 7 42 SYSTem oC Se 7 43 SY STemM ENR 7 43 SSYSUenCOONID7 SS Se ER 7 44 SYSTem CDEScription 7 45 SY SemMCPON EESTI 7 46 YSNGCEYVPE LS 7 47 SYSTem ERROM SR LE EE EE 7 48 SYSlem VBRSion7 oR RS DES SE SE 7 48 7 49 Re Oi 7 49 4 7 51 TTA 7 53
304. E5252A 10x36 Matrix Switch E5252A 10x48 Matrix Switch E5252A 10x12 Matrix Switch ES2SSA lt E5255A 11 12 13 14 15 16 Channel Multiplexer E5255A 24 24 0 16 16 16 Channe Multiplexer E5255A 24 8x3 Channe Multiplexer No Card TPUT Hp5250 SY8T CDESoription 1 EN ER Hp5250 AS Keysight E5250A 12 7 45 Table 7 2 eR SYSTem CPON SYSlem CPON ALL SYST CPON
305. EE Ei 8 23 hpe5230a_errorQueryDetect 8 23 hpe5250a errorQueryDetect Qe 8 23 Keysight E5250A 12 7 hpe5250a esr OL 8 24 hpeS2608 ne ede EE 8 24 hpeS2504 MS eR RR 8 25 hpeS250a_ ope Qa Ea Ek 8 25 hpe92508 openCard rt 8 26 hpe92508 Opel8 LOSSEET SN 8 26 hpe5250a openList OL 8 27 hpe3250a readStatunsByte OL 8 28 hpe3250a TSE Ed EE EE 8 28 hpe5230a revision_query ios oroes ds eo EE Sk 8 28 hpe5250a selectCompenFile ee 8 29 hpes250a self Seo 8 30 hpes250a testGleat i SR NR 8 30 hpeS250a testExec 6 RE 8 31 hipe9250a timeOUt RR NR 8 31 hpe5250a timeOut Qi 8 32 9 V op 9 3 1 9 3 028 KKK K ET EK T3 TK 66 9 7 NN 9 9 0 9 11 HCI 9 17 ILL JAA 9 17 9 23 lt Vti iiiIi i iI HtItI ik lt I S N 9 25 RRBs 9 28 0 EE 9 36 10 8 Keysight E5250A 12
306. Keysight E5250A 12 BEB3250A E3230A Ei H Keysight 16495 Installation Guide Es252A 16495F 16495G 16495F 001 TRIAX 12 INTLK 1 GNDU TRIAX INTLK 1649SF 002 TRIAX 12 INTLK 1 GNDU 1 1649SG 0
307. Keysight E5250A 12 10 7 Keysight 16494A Keysight 16494B Keysight 16494C 4142B Keysight 16494D 8 Keysight 16495C 6 Keysight 16495D 12 Keysight 1649SE Keysight 1649SF 12 Keysight 1649SG 24 5 C 40 C 40 C 70 C 5 80 RH 5 90 RH 65 C Keysight 16494E 8 5 C 40 C
308. MAX Gm V to V L2X Idlin A LIYL Xaxis Ylaxis Y2axis NAME VG ID Gm SCALE LINEAR LINEAR LINEAR MIN 0V 0A 0S MAX SV 2 mA 1 5 mS DATA VARIAVLES Vtext Idlin LINEl GRAD 1ine on Y1 at a point where VG 5 Gradient 0 LINE2 NORMAL 1ine on Y1 at a point where ID 10u and a point WHERE ID fe 10u MARKER AE a point where Gm MAX Gm Interpolate ON PARAM MES 4155 4156 Idlin Vtci Idlin 5 V 0V Vtci 10 umy1 um p 9 36 9 20 Keysight E5250A 12 5 1
309. RETURN RETURN CARDn BIAS STATE ON OFF CARDn BIASPORT CARDn MAIN MENU VFP VFP 5 30 Keysight E5250A 12 Figure S 9 SETUP MODE MENU Agilent E5250A Virtual Front Panel Utility SETUP MODE MENU CONFIG MODE NORMAL BTAS STATE BTAS PORT CARD1 E5252 OFF 10 CARD2 E5252 OFF 10 CARD3 E5255 OFF CARD4 E5255 OFF CAUTTON
310. memory OK rr CHANGE MODE CANCEL Keysight E5250A 12 5 31 ES2S0A E5250A DEFINE LABEL DEFINE LABEL MENU E5250A INPUT CARDn INPUT ES5255A E3233A BIAS n 1 4 MAIN MENU
311. 0 2 2x1012 10 5x108 2x109 a 0 Q 10 6 Keysight E5250A 12 hh lt 0 1 pA LV lt 0 4pF I V lt SpF EMF lt 80 LV LV 1 2 3 lt 180 pF IL V lt 60pF TLV 0V Electro Motive Force 0 E5255A 1 1 gt 10 lt 3 3 I V 10 V 400 fA
312. 01 TRIAX 24 INTLK 1 GNDU TRIAX 1 INTLK 16495G 002 TRIAX 24 INTLK 1 GNDU 1 ES2SSA 16495C 16495D Keysight 16494D 8 6 INTLK 1 GNDU 1 Keysight 16494D 8 12 INTLK 1 GNDU 1 Keysight E5250A 12
313. 1 Meas vth Connection AllOpen Connect vVfFp Setup data Setup_num 2 Meas c COM VfFp com data Setup data 14000 Meas c Constant Definition Test comm FNGet vfp Comment Setup data Setup num 3 Meas c Connect to DUT Connect vVfFp Setup data Setup_num 3 Meas c Connection All Open Connect vVfFp Setup data Setup num 2 Set5230int COM VfFp com data Setup_ data 14000 Adrg Adrgs5250 CALL Toad vfp data Adrs VFP FILE Setup_datas CALL Init vfp_setup Setup_ datas 4 2 4 Setup_ num Vth Setup num Open All VFP Setup_ num VFP VFP FILE VFP Vth 1 Open Al 3
314. 1 6 4156 IV1 IV3 IV5 Ts TVn Port a Kelvin conneotion n 1 3 YES NO CANCEL YES NO Selec SMU channel for TVn leak measuremen by softkey n 1 6 SMUm 4155 4156 SMUm m 1 6 SMUS SMU6 41501 SMU CANCEL Keys
315. 12 VFP VFP VFP VFP VFP p 5 26 CAUTION VFP HP BASIC VFP VFP VFP HP BASIC 4 Load vfp data Imit vfp setup Connect vfp FNGet vfp comment Keysight E5250A 12 6 21
316. 12 Table 9 1 Vth Vth Table 9 1 Keysight 4153 4136 Keysight 4284A LCR ES252A E3250A Table 9 2 ES252 MES E5250A 4155 4156 4153 4136
317. 16 IV SMU2 2 2 2x16 J IV SMU3 3 3 2x8 IV SMU4 4 3 2x8 IV SMUs p 2 1 4 Figure 5 7 2x48 Multiplexer 2x8 Multiplexer 1 slot 1 slot 2 slot 3 slot 4 2x16 Multiplexer 1 2x16 Multiplexer 2 2x8 Multiplexer 2 Keysight E5250A 12 5 23 E5255A Table S 9 TV
318. 2 4 6 Sense 4 18 Keysight E5250A 12 WARNING Figure 4 8 Table 4 4 ES252A ES2S0A Kcysight ES252A Keysight E5255A ES3232A BS3255A ES250A ES25S0A OFF ES2S2A Keysight E5252A Figure 4 8 E3S250A BS232A Figure 4 8 E5250A SMU AUX E5252A ES2S2A Input B Signal line E5252A Table 4 4 Ground
319. 235A p 20 Keysight E5250A 12 5 9 1 ROUTe CONNection RULE p 7 1 Keysight E5250A 2 E3230A 1 1 ES5250A 1 2 ES252A
320. 255A ES2SSA Keysight E5255A BNC BNC E3255SA BNC Keysight 1251 2277 GNDU Keysight 4142B DC A Keysight 41501 GNDU 1A 1A Os GNDU Keysight 16493H GNDU 1 A GNDU ES230A GNDU ES3230A GNDU 1A 1 A
321. 30A ES25SA E5255A p 2 10 Figure 3 1 s QO Relay Test Adapter NOTE SYSTICPON SCPI p 7 1 Keysight E5250A 12 3 5 SCPI 2
322. 5 V 10 A PN 8121 1635 Option 932 Plug CS 0017 230 V 10 A PN 8121 1638 Keysight E5250A 12 2 5 EA Xx 5 C 40 C 5 80 RH 0m 2000m 40C 70 C 90 RH 65 CC 0m 13 240 m E5250A Dl 2 6 Keysight E5250A 12 WARNING CAUTION NOTE ES2S0A A EX Keysight E5250A ES25SA GPIB GPIB
323. 50A 12 7 35 NOTE eR ROUTe COUPle PORT ROUTel COUPle PORT ES3252A E3S25SA F Du p 5 1 MC Ii 2 1 3 4 S 6 ON OFF
324. 5250A 12 8 15 VXTplug amp play hpe5250a cmdInt32Arr Q hpeS2S0a cmdIn 32Arr Q E5250A E5250A result 32 ViStatus VI FUNC hpe5250a cmdInt32Arr O ViSession vi ViString cmd str Vilnt32 size Vilnt32 VI FAR result ViPInt32 count vi hpe5250a init cmd str E5250A 236 Size result 1 2147483647 result E5250A count result hpeS2S0a cmdIn 32 Q E5250A EB5250A result 32 ViStatus VI FUNC hpe5250a cmdInt32 Q ViSession vi ViString cmd str ViPInt32 result vi hpe5250a init cmd str E5250A 236 result E5250A
325. 5250a_closeList hpe5250a_openList hpe5250a_openCard hpe5250a_closeList Q hpe5230a openList Q hpe5230a closeCard Q C G C G hpe5250a compenC C G hpe5230a selectCompenFile hpe5230a testExec Q hpe5230a testClear 8 6 Keysight E5250A 12 VXIplug amp play hpeS250a cmd hpe5250a_cmdInt hpe5250a cmdRe
326. 6 Figure 9 5 9 28 Keysight E5250A 12 Id Vd GRAPHILI ST GRAPHI GS hEDI UM docTos 02 28Ph Ld vd Measuremenl MARHKE AREERT 5 490 3 1 4 ma 1 ON A ha REKER 10 0m hdl NI hax 1NTEH Dn POLATE FF DI _ RECT i MMAHKEHr DC CURSOR tdiw MAHKEH SKIP TT NALY SS n CURSOR o oo VH Yi snn m di 7 GFF haARKE RL LI RE SGALI NG DI SPL AaY SWEEFP TI hl NN GONST SURHSGOR ETUP ET UP SETUF SETUF 10 Id Vd Vdstr 0 5 V Vdstr SP MUX Vdst
327. 8 16 Keysight E5250A 12 VXTplug amp play hpe5250a cmdReal hpeS2S0a cmdReal E5250A Real32 Real64 Real32 ViStatus VI FUNC hpe5250a cmdReal ViSession vi ViString cmd str ViReal64 value vi hpe5250a_init cmd sfr ES250A 256 value 1E 300 1E 300 hpeS2S0a_ cmdReal64Arr Q E5250A ES5250A result 64 ViStatus VI FUNC hpe5250a cmdReal64Arr O ViSession vi ViString cmd str Vilnt32 size ViReal64 VI FAR result ViPInt32 count vi hpe5250a_init cmd str E5250A 236 Size result 1 2147483647 result E5250A count result
328. 88 VISA TO Keysight GPIB Keysight IO 4155 4156 2 MB E5270A 1 MB Keysight Technologies http www keysightcom ES250A Keysight E5250A 12 8 3 VXTplug amp play GPIB VISA IO 1 6 4 1 GPIB
329. BIAS PORT ROUT BIAS PORT BIAS PORT E35250A card number Keysight E5250A 12 SCPI DTAG TEST CARD CLE cg7 number card_number 1 2 3 4 ALL DIAG TEST CARD EXEC card number 1 0 card_number 1 2 3 4 ALL DIAG TEST CARD STAT card_number 1 0 1 card_number 1 2 3 4 DIAG TEST FRAM CLE unit unit CONT FPAN DTAG TEST FRAM EXEC unit
330. Channel Vth 10101 10202 10303 10404 BS525S0A Channel ES3230A Set 250init 4155 4156 Param fileS 4133 4156 4 VTH Vth VTH 4155 4156 ES3232 MES Meas vih Measurement OUT EN PUT H p415x TRAC VTH ER Hp415x Vth Meas vih Test measurement data IF Vth lt Vth min OR Vth gt Vth max THEN Meas vih Reset Imstrument OUTPUT Out gtr S USING Imgl Test num Result Vvth min Vth Vth _ max Test_comm Keysight E5250A
331. D TOAD P_MAT 2 C COM LOADSUB P _ MAT LOADSUB ALL FROM C_COM 3 4 4155 4136 Vth ES3232 MES 5 RUN 6 Figure 9 2 Figure 9 2 Vth Comment Vth amp C Meas Sample Program Test Time 30 Sep 1995 10 29 27 P F Min Meas Max Comment 1 PB 10 000E 002 18 255E 001 20 000E 001 MOSFET Vth Measurement 2 F 8 000E 12 2 164E 11 2 000E 11 Capacitance Measurement 9 10 Keysight E5250A 12 GPIB GPIB
332. DIAGnostic ROUTe SYSTem PD ID DIAG TESTLCARD RES IEEE 488 2 SCPI p 6 1 SCPI p 11 1 SCPI 12 7 2 Keysight E5250A
333. IAS Input 14 1401 1402 1403 1407 1408 IV Input 0401 0402 0403 SMU4 04 0407 0408 Output 1 2 Made from Cards in Slot 1 and 2 Block 1 to 3 of each card should be connected in series Output 1 BIAS Input 12 1201 1202 1203 1215 1216 IV Input 0201H 0202 0203 0215 10216 SMU2 02 Made from Block 3 of Card in Slot 3 BIAS Input 15 1501 1502 1503 1507 1508 IV Input 0501 0502 0503 0507 0508 SMU5 05 Output 1 Made from Block 1 of Cards in Slot 3 and 4 Block 1 of each card should be connected in series Made from Block 3 of Card in Slot Output 1 BIAS Input 13 1301 1302 11303 1315 1316 IV Input SMU3 03 0301 0302 0303 0315 0316 Made from Block 2 of Cards in Slot 3 and 4 Block 2 of each card should be connected in series SMU6 js not used XXXX Channel Number
334. Input Parameters Meas points Meas_points DATA Meas_points 13 Limits for leakage tests Igleak max A 2 E 10 ldleak max A 1 E 8 Setup for drawing saving data in main menu Show device 0 0 H 6 nm Show param OO
335. Keysight E5250A 12 2 7 EK 1 ES230A 10 2 a Figure 2 1 b c 3
336. Keysight lechnologies E5250A KEYSIGHT TECHNOLOGIES Keysight Technologies 1995 2014 Keysight Technologies E5250 97000 1995 11 2 1997 1 3 1997 8 4 2000 1 2000 5 2001 1 2003 8 2005 7 2008 5 0 2009 7 1 2011 8 2 2014 10 OO JO Keysight Technologies 1400 Fountaingrove Parkway Santa Rosa CA 95403 Keysight
337. LED Remote LED System Fail LED Fail LED Local Self Test LED LED LED Fail LED Fail LED LocalSelf 10 10 10 Local Self Test Test 4 Keysight E5250A 12 3 7 HP BASIC 2 4 10 Self
338. Memory 1 Comment MOSFET Vth Card Number 0 111111111122222222223333333333444444444 Input 123456789012345678901234567890123456789012345678 TV1 2 I RE SR RAR SRD Se TV2 NU SR SS CE SE RAS TV3 RD EE EE RR EE EE ER i TV4 SSR TV5 TV6 HF1 ER NR NR SC RN A WI CV2 Use softkeys to move Cur8or anQ to change status Keysight E5250A 12 5 37 Figure S 13 Figure S 14 MEMORY SETUP PANEL ES2SSA 2x24MUX Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number sd Input 12345678 TV1 BSl YA ER PS1 WE II Dee ss BBS Use softkeys to move Cur8or and to change status MEMORY SETUP PANEL ES2SSA 2x24MUX Agilent E5250A Virtual Front Panel Utility MEMORY SETUP PANEL Current Setup Memory 1 Comment MOS CAP Card Number 0 1111TT1T1T122222 Input 123456789012345678901234 W RR RA RN tit i BSl Use softkeys to move Cur8or anQ to change status 5 38 Keysight E5250A 12 Table S 10
339. N CONN RULE ALL FREE CONN SEQ ALL BBM CLOS 10101 10202 p5250 OpC ENTER Hp5250 Complete Complete E5250A IO ES250A E5250A EREE Break Before Make 10101 10202 12 0 130 6 4 Keysight E5250A 12 NOTE CAUTION HP BASIC Keysight E5250A 6 Table 6 1 E5250A
340. OLATE BN EBIHEET EID I 15n u MARKER diy ir EMRSE MAEKER SKIP AUTD A A NALY Ss15 n nn 9 00 Fipsph un Dn YE Vi BUU NW 1V 5 nn DFF aNIS MARKER LINE SCALIMEG ISFLATIISHEEF TIMIMEG EDN5T TEURSDE sETUF sETUP sETUP sETUP Keysight E5250A 12 9 31 Figure 9 8 9 32 4153 4156 Figure 9 8 HCI Degradation Test ig Completed HAPHT LIST RHaPHI GE MEDI UM ducTod 10F HOI Gmmas Shi ful Slr ioooonsec Hawi rs ll ha RKER Gm
341. PUT Hp5250 OPC ENTER Hp5250 A Meas vth OUTPUT Hp5250 ROUT OPEN CARD ALL Connection All Open OUTPUT Hp5250 OPC ENTER Hp5250 A Meas c Test_ oomm Capac1tanCe Measurement Constant Definition Channe18 10905 11006 Meas c OUTPUT Hp5250 ROUT CLOS sgChanne18 Connect to DUT OUTPUT Hp5250 OPC ENTER Hp5250 A Meas c OUTPUT Hp5250 ROUT OPEN CARD ALL Connection All Open OUTPUT Hp5250 OPC ENTER Hp5250 A Set5230init OUTPUT Hp5250 ROUT FUNC NCON OUTPUT Hp5250 ROUT BTAS STAT ALL OFF OUTPUT Hp5250 ROUT CONN RULE ALL SROU OUTPUT Hp5250 ROUT CONN SEO ALL BBM OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 OPC ENTER Hp5250 A Keysight E5250A 12 9 15 2 ENTER Meas vth COM Vfp com data Setup_ data 14000 Meas vth Constant Definitton Test Comm FNGet vfp Comment Setup data Setup num 1 Meas vth Connect to DUT Connect vVfFp Setup data Setup_ num
342. RuleSeq ViSession vi Vilnt16 cardno ruleseq ViInt16 rule ViInt16 sequence Vi hpe5230a init cardno ruleseq i rule sequence 1 2 3 4 5 0 hpe3230a func 0 1 0 NSEO No sequence 1 BBM Break before make 2 MBBR Make before break 8 20 Keysight E5250A 12 VXTplug amp play hpe5250a couplePort hpeS2S0a couplePort 2 1 CE 2 1 1 2 II NE a 1 1 2 2 oi RU
343. SETUP ES250A SETUP SETUP MEMORY MENU Figure 5 11 MEMORY COMMENT Input comment for this setup memory Max 20 Char 20 Enter gnter GOTO SETUP Input setup memory number to be connected Enter Enter CHANGE CHAN Keysight E5250A 12 5 39 NOTE NOTE Table S 11
344. SMU 1 ES232A 4155 IV1 IV2 4 12 pA IV3 IV4 IVS IV6 1 01 nA 4156 IV1 IV2 1 14 pA IV3 IV4 IVS IV6 1 01 nA IV1 IV2 2 24 pA IV3 IV4 IVS IV6 2 02 nA E5255A 4155 IV1 IV6 4 12 pA 4156 gt IV1 IV6 1 14pA Keysight E5250A 12 3 15 2 1 LEAK TEST Input Agilent 4155 4156 GPIB address defau1 817 2 4155
345. ST channel Tlist LIST channel list PORT card_number ALL bias_port PORT card_number STATe card_number ALL state STATe card_number CLOSe CARD card_number LIST channel list LIST channel_ list 7 20 Keysight E5250A 12 ROUTe ROUTe CONNection RULE card_number ALL rule RULE card_number SEQuence card_number ALL sequence SBEOuenoe card_number CoUPle PORT card_number ALL couple_port PORT card_number STATe card_number ALT state STATe card_number FUNCtion channel_config FUNCtion OPEN CARD card_number ALL LIST channel list LIST channel_ Tlist card_number channel_list state rule channel_config sequence 0 1121314 p 5 1 ON OFF 0 1 FREE SROU ACON NCON NSEQ BBM MBBR Keysight E5250A 12 7 21 se Po PY ROUTe BIAS CHANnel DISable CARD ROUTel BIAS CHANnel DI
346. Sable CARD ON ROUTe BIAS STATe p 7 30 RST ROUTe BIAS CHANnel DISable CARD card number card_number 0 ALL 1 2 3 4 ALL OUTPUT Hp5250 ROUT BTAS CHAN DTS CARD ALL 7 22 Keysight E5250A 12 PO NR U ROUTe BIAS CHANnel DISable LIST ROU1el BIAS CHANnel DISablel LIST cgz7e s7 channel 7s7 ON ROUTe BIAS STATe p 7 30 RST
347. Test by External Controller 20 30 REAL A 40 ASSIGN Hp5250 TO 722 50 OUTPUT Hp5250 DIAG TEST FRAM CLE CONT 60 OUTPUT Hp5250 DIAG TEST FRAM CLE FPAN 70 OUTPUT Hp5250 DIAG TEST CARD CLE ALL 80 DISP press Continue to go to Controller Test 90 PAUSE 100 Controller Test 110 OUTPUT Hp5250 DIAG TEST FRAM EXEC CONT 120 ENTER Hp5250 A 130 IF A 0 THEN GOTO 160 140 DISP Failed Press Continue to go to I F Test 150 GOTO 170 160 DISP Passed Press Continue to go to I F Test 170 PAUSE 180 Front Panel I F Test 190 OUTPUT Hp5250 DIAG TEST FRAM EXEC FPAN 200 DISP Press Local Self Test Key within 10 sec 210 ENTER Hp5250 A 220 IF A 0 THEN GOTO 250 230 DISP Failed Press Continue to go to Relay Test 240 GOTO 260 250 DISP Passed Press Continue to go to Relay Test 260 PAUSE 270 Relay Test 280 OUTPUT Hp5250 DIAG TEST CARD EXEC 1 290 ENTER Hp5250 A 300 IF A 0 THEN GOTO 330 310 DISP Card 1 failed Press Continue to test Card 320 GOTO 340 330 DISP Card 1 passed Press Continue to test Card 340 PAUSE 350 OUTPUT Hp5250 DIAG TEST CARD EXEC 2 360 ENTER Hp5250 A 370 IF A 0 THEN GOTO 400 380 DISP Card 2 failed Press Continue to test Card 390 GOTO 410 400 DISP Card 2 passed Press Continue to test Card 410 PAUSE 420 OUTPUT Hp5250 DIAG TEST CARD EXEC 3 430 ENTER Hp5250 A 440 IF A 0 THEN GOTO 470 450 DISP Card 3 failed Press Continue to test Car
348. acter 102 Syntax error 103 Invalid separator 104 Data type error 105 GET not allowed 108 Parameter not allowed 11 4 Keysight E5250A 12 9 a a 109 IMissing parameter 110 Command header error 111 114 111 Header separator error 112 Program mnemonic too long 12 113 U
349. al hpe5250a cmdData Q hpe5250a cmdString Q 16 hpe5250a_ cmdInt16 O 16 hpe3250a cmdInt16Arr Q 32 hpeS250a cmdInt32 Q 32 hpe5230a cmdInt32Arr Q 64 hpe5250a cmdReal64 Q 64 hpe3250a cmdReal64Arr Q HPE5250AHLP 3 Keysight E5250A 12 8
350. biaschan list bias disen bias disen 0 bias status 1 0 bias disen 1 bias status 1 0 Keysight E5250A 12 VXTplug amp play hpe5250a biasPort hpeS2S0a biasPort CC VA ES232A ViStatus VI FUNC hpe5250a biasPort ViSession vi Vilnt16 biasport cardno Vilnt16 bias por0 Vi DO init biasport cardno 1 2 3 4 5 0 hpe5250a func bias port 1 10 1 10 hpeS2S0a biasState ON
351. d 460 GOTO 480 470 DISP Card 3 passed Press Continue to test Card 480 PAUSE 490 OUTPUT Hp5250 DIAG TEST CARD EXEC 4 500 ENTER Hp5250 A 510 IF A 0 THEN GOTO 540 520 DISP Card 4 failed 3 8 2 2 4 4 Keysight E5250A 12 530 GOTO 550 540 DISP Card 4 passed 550 END 30 90 100 170 180 260 270 340 1 330 410 2 420 480 3 490 550 4
352. e gt lt END gt 0 OFF 1 ON 2 3 4 OUTPUT Hp5250 ROUT BTAS STAT ALT ON OUTPUT Hp5250 ROUT BIAS STAT 4 ENTER Hp5250 A A ll Keysight E5250A 12 7 31 SS Re ROUTe CLOSe CARD EROUTel CLOSe CARD egzze 7s7 ROUTe CLOSe CARD card_number card_number 0 1 2 3 4 channel list lt new11ne gt lt END gt p 5 1 OUTPUT Hp5250 ROUT OPEN CARD ALL OUTPUT Hp5250 ROUT CLOS 10101 10202 OUTPBUT Hp5250 ROUT CLOS CARD 1 ENTER Hp5250 AS A 10101 10202 7 32 Keysight E5250A 12
353. e same port for Couple and Bias mu Keysight E5250A 12 11 13 11 14 Keysight E5250A 12 12 SCPI KEYSIGHT TECHNOLOGIES SCPI Keysight ES230A SCPT SCPI p 7 1 channel_ist p 5 1 12 2 ROUTel
354. he German Regulation on Noise Declaration for Machines Larmangabe nach der MaschinenlI amp rminformation Verordnundg 3 GSGV Deutschland Herstellerbescheinigung GERAUSCHEMISSION Lpa lt 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T 19 Manufacturer s Declaration ACOUSTIC NOISE EMISSION Lpa lt 70dB operator position normal operation per IS0 7779 South Korean Class A EMC declaration This eduipment is Class A suitable for professional use and is for use in electromagnetic environments outside of the home A 2 A 2 I 2 gl 9 Keysiqht Technologies
355. hm L H C FF 1420 DATA 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl H 1430 DATA 100 70E 3 400 00E 9 80 00E 12 User Triax Cbl L 1440 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl H 1450 DATA 114 00E 3 544 00E 9 130 00E 12 User Coax Cbl 1 GUARD C GROUND E GROUND GUARD D FORCE or SENSE A RS FORCE or SENSE B 6 30 Keysight E5250A 12 100 Examp1e of Capacitance Compensation 110 120 Freqd 1 E 6 MEASUREMENT FREOUENCY 1MHz 130 Ll 1 5 E5252A OUTPUT CABLE 1 5m 140 L2 h 0 TRIAX CABLE High STDE none 0m 150 L2 l 0 TRIAX CABLE Low SIDE none 0m 160 L3 h 2 COAX CABLE High SIDE 2m 170 L3 l 2 COAX CABLE Low SIDE 2m 180 190 OUTPUT Hp4284 FEUNC TMP CPG SET Cp G FUNCTTON 200 OUTPUT Hp4284 FREO amp VALS Freq SET MEAS FREO 210 OUTPBUT Hp4284 CORR LENG 2M SET 16048D TLENGTH 220 OUTPBUT Hp4284 TRG 230 ENTER Hp4284 C m G m Stat 240 250 Ccompen 5250 Freq Ll L2 h L2 1 3 h T3 1 C m G m C co G C 260 DISP CORRECTED C DATA C C 270 DISP CORRECTED G DATA G C 280 290 END Keysight E5250A 12
356. ight E5250A 12 3 17 2 5 SMUm m 1 6 Disconnect Kelvin cable from IVn terminal And disconnect all cables from output terminals Disconnect cable from TVn terminal And disconnect all cables from output terminals n 1 6 CONTINUE CANCEL 6 ES250A 4153 4156 SMU 7 CONTINUE Connect SMUm to IVn by Kelvin cable Connect SMUm to TVn by cab1e m SMUm
357. l NT 292 08170000u8S BFF ha RKER 10n LAX 1NTER GmS FT FOLATE OFF decads 1 di MARKE SKIP UTO HALYT 1 5 10n m CURSOR 10 0 Str ag sael daeada dinv 1n k OFF 1 HARKER LI NE SDAALT NN DI SPLAY SWEEP TI hl a CONSsT CURSOR SETUP SETUP ET IP ET UP gt A Keysight E5250A 12 1 E5250A CS80 702 1 MST CS80 702 1 SP_MUX A GET GET SP MUX Ar
358. le ALL FREE 3 ROUT CONN SEQ card_no sequence ALL BBM 4 ROUT BIAS PORT cg77 no input_port_no ALL 10 ROUT BIAS CHAN ENAB CARD cg77 7o ALL ROUT BIAS CHAN ENAB LIST channel_ 7757 All ROUT BIAS CHAN DISA CARD cg 7o All ROUT BIAS CHAN DISA LIST channel list All ROUT BIAS STAT card no state ALL OFF 5 ROUT COUP PORT card_no input_port_no ROUT COUP STAT cg77 7o state ALL OFF 6 ROUT CLOS channel_ list open all ROUT OPEN channel_list open all ROUT OPEN CARD cg77 no ALL channel_config NCON ACON rule FREE SROU sequence NSEQ BBM MBBR state ON 1 OFF 0 cg77776 5 5 p 5 1 card no ALL 0 1 4
359. lect desired softkey 5 34 Keysight E5250A 12 CLEAR SETUP COPY SBTUP DELETE 1 SETUP 24 i All INSERT Open All SETUP 24 CLEAR ATL
360. lplug amp play 9 10 E5250A Ns RE E5250A 12 SGPI a E5250A SCPI front panel key Italic 1 ES250A uu AALTTT 1 3 DE RR 1 4 NT 1 5 0 1 5 E5252A 1 6 8 2 1 7 R5255A CS RE SSD 2 Se EEE Ra 1 8 ME 1 10 EF TE 1 12 5 2 2 2 3 OC 2 4
361. mber 0 Ar 1 2 3 4 ALD couple_port 1 1 3 5 7 9 1 5 12 6 Keysight E5250A 12 SCPI ROUT COUP PORT card number card_number 1 E3232A 0 1 2 3 4 ROUT COUB STAT card number state ON OFF E3232A card_number 0 arir 1 2 3 4 AT state oNor1 ON OFF or 0 OFF ROUT COUP STAT card number 0 OFF 1 ON card_number
362. n list 0 0 ViStatus VI FUNC hpe3230a closeCard O ViSession vi Vilnt16 close card VilInt32 VI FAR closechan list Vi hpe5230a init close card 1 2 3 4 0 hpe5250a func closechan list Keysight E5250A 12 8 11 VXTplug amp play hpe5250a closeList hpeS2S0a closeList closechan list 0 0
363. ndefined header 120 Numeric data error 121 128 121 Invalid character in number 123 Exponent too large 32000 124 Too many digits 10 255 128 Numeric data not allowed 138 Suffix not allowed E3250A 140 Character data error 141 148 Keysight E5250A 12 11 5 Ne
364. o O O OOoOOOoO 12345678 516 17 18 19 20 21 22 23 24 910 11 12 13 14 1 Table 9 8 ES2S0A 41SS 41S6 ES2S0A ES2SSA i a SMU1 SMU INPUT 1 Output1 24 1 Gate SMU3 SMU INPUT 3 Output 25 48 2 Drain SMU4 SMU INPUT4 Output49 72 3 Sub GNDU Source 9 26 Keysight E5250A 12 Figure 9 4 HCI BNC Cable 3ea 8 able 3ea 16494D 001 or 002 9 ea Shielding Box py BIAS SOURCE 1 Bias Input Output NA 1 SLOT2 1 24 1 to 24 Bias Input 1 BIAS SOURCE2 23 48 25 to 4g SLOT3 IN Bias Input E5250A 49 72 BIAS SOURCE 3 49 to 72 SMU GPIB Cable II 16 495D GNDU a 2 16494A 003 3ca 1 lt 4155 4156 J Gate Sub GNDU Source HP BASIC L501 16494A 001 or 002 CONTROLLER
365. on Vi Vilnt16 biaschan disen ViInt32 VI FAR biaschan list vi hpe5250a_init biaschan disen 0 1 biaschan list ABCDE A BC DE 0 A 0 BC 01 DE 01 00101 101 8 8 Keysight E5250A 12 VXIplug amp play hpe5250a biasChanList Q hpeS2S0a biasChanList Q biaschan list 0 0 100
366. stic TEST CARD EXECute card number card_number 1 2 3 4 ALL test result lt new11ne gt lt END gt 1 0 OUTPUT Hp5250 DIAG TEST CARD ALL 7 16 Keysight E5250A 12 SR WU DIAGnostic TEST CARD STATe DIAGnostic TEST CARD STATe DIAGnostic TEST CARD STATe card number card_number 1 2 3 4 7es7 result lt new11ne gt lt END gt 1 0 1 OUTPUT Hp5250 DIAG TEST CARD STAT 1l ENTER Hp5250 A DIAGnostic TEST FRAMe CLEar DIAGnostic TEST FRAMe CLEar CONTroller FPANel CONTroller FPANel OUTPUT Hp5250j DTAG TEST FRAM CLE CONT
367. ta Setup num Setup_data 14000 Setup num 1 24 Comment FNGet_ YfFp commentS Mat48 data 1 DISP Comment CommentS Keysight E5250A 12 6 23 i Se VFP 10 Example for using VFP Data Upload Library 20 30 COM Vfp com data Mat48_ data 14000 40 DIM CommentS 20 50 Address 5250 722 E5250A GPIB Address 722 60 Setup num 1 VFP Setup Memory Number 1 170 1 80 OUTPUT Address 5250 RST 90 100 CALL Load vfp_data Address_ 5250 MAT48 Mat48_datas 110 CALL Init vfp_setup Mat48_ datas 120 130 DTSP SETUP TN PROGRESS SETUP NO Setup num 140 CALL Connect YFp Mat48 data Setup num 150 160 Comment FNGet_ vfp Comment Mat48 Qdata SetuD num 170 180 DTSP SETUP WAS COMPLETED SETUP COMMENT Commen 190 200 END 30 Se ggfg5 Mat48 dataS

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