使用マニュアル - 東京工業大学 機械制御システム専攻 吉野・山本研究室
Contents
1. 90 Fig 3 Evac SEM E Image rotation Stage rotation Acc Voltage button Acc Voltage knob Gun Alignment Y Emission current knob Gun Alignment X Emission current reset button Flash b Main panel Stigma X Stigma y Re Probe current a Contrast amp Brightness Magnification c Controller Fig 3 SEM control panel 1 2 2 Acc Voltage EXTRACT V 122. EBSD CCD SEM WD 15mm Forcuns WD 15mm 16mm 15mm 15mm 16mm 8 15mm 4 Hig 1 WD SEM Fig 3 a IMAGE ROTATION 13 on 135 X stage Y stage WD EBSD
3. EBSD manual flash manual flash gun alignment Contrast Brightness 100 EBSD PC Fig 5 3 EBSD PC OIM wD 1Smm Fig 5 FORWARD REVERSE FORWARD EBSD SEM EBSD OIM OIM OIM Data Collection 2 Fig 5 SEM OIM OIM EBSD 1Gamma 9 INPUT GAIN
4. BLACK LEVEL LED 1 9 2 2 Gamma 12 FRAMES 128 3 LIVE PROC LIVE INT AVG INT CLEAR LED 4 B FRAMES 8 INT AVG AVG 5 A B A Gamma CONTRAST BRIGHT GAMMA 2 3 Phase copper mat es 4 TInteractive SEM 7 5 Scan STEP i 7 FE SEM Gamma SEM OIM FORWARD REVERSE A B INPUT GAIN CONTRAST BLACK LEVEL BRIGHT GAMMA FRAMES LIVE PROC INT AVG CLEAR Fig 5 EBSD equipment EBSD CCD REVERSE 2 SEM 1000 3 Fig 3 a Image rotation off Initia
5. holder for EBSD Fig 2 CA EA I a Plunger b Specimen holder Fig 2 Plunger Specimen holder 1 Hig 3 Evac Evac 90 i i 2 Evac TF Fig 3 Inserting the plunger rod in to the SEM chamber
6. 1 7 V7G Fig 1 WD WD 15 8 V7G focus 1000 lt 2000 9 3000 stisma x stigma y Stigma focus stigma x stigma y focus 7000 10000 10 FE SEM EBSD Manual flash EBSD Fig 4 Setting of specimen holder for EBSD 100 Hig 3 a STAGE ROTATION Hig 1 X stage Y stage Hig 4
7. A 150 flash 20 strong flash Flash flash manual flash 8 3 EXTRACT 12u A EXTRACT V C JJ EXTRACT V CONST Y 4 Acc Voltage 25kV 1 2 5 Fig 1 V7G 6 CLcoarse 4 10 gun alisnment x gun alisnmenty contrast brightness CL coarse CL coarse
8. Field Emission Scanning Electron Microscopy FE SEM and Electron Back Scatter Diffraciion EBSD 1 6 2010 6 25 FE SEM kr iiyama t aa m titech ac jp FE SEM SEM monitoring panel SEM chamber Y stage X stage Main controller V7G 1 3 Fig 1 FE SEIM equipment 5 3 EBSD 1000 BBSD specimen Specimen
9. l stage 4 V7 5 Acc voltage off Acc Voltage 0V 6 Fig 1 WD X stage Y stage x 25mm y 35mm z 39mm 7 EBSD 8 FE SEM 2 FE SEM EBSD MF 7
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