照射時間 4min十オゾン排気処理 2min のわずか6分で処理できます。
Contents
1. A 195 0062 56 A ea TRL 6 14 16 3F TEL 03 3830 7900 FAX 03 3830 7901 http Www uv asumi com Copyright ASUMI GIKEN Limited All Rights Reserved vol 13 01 Photonic Cleaner ASM40IliMP High accuracy and safety 185nm 546nm 185nm 254nm 185nm 185nm2. O1s Ti2p Ti O wm Carbon removable mu UV4 298 1856 291 9356 285 6856 279 4356 UV XPS Cls 2 400 3 400 Ols 350 300 o1zrro 250 O01s 0H 200 529 7eV gn Wm 532 8eV O15 origina 100 01s 0 539 4 5354 532 9 530 4 5279 OH COH COOH Imin Binding energyleV UV O1s ASTM F67 Grade4 1
3. gt Y X EE EE 01 100 400 700 10 nm a i 2 100 280 375 400 nm 160 200 240 280 0 400 440 480 a mY OH CHO COOH 0 EL LJ
4. ASM401iMP BE 3 li a oo 2 Photonic Cleaner ASM 40IliMP TEES O A 4min 2min 6 High accuracy and safety ASM401iMP 350 220 220 9 mn 7 oo er
5. ITO 0 Technology _ Facility amp Safety 6 Fixture The pursuit of function Cls
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