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Granville-Phillips 830 VQM User Manual (830231)

1. lseeesseeeeeee e 67 55 5 USB Port LED au esae edo ei el nose A ete RRA d e ES 68 5 5 6 External Total Pressure Connector LED 0 00 cece eee een e 69 Rear Panel Controls and Interconnects 1 2 0 0 cece eee cece EREE ee ene tenet ene eees 69 5 6 1 TOTAL PRESSURE Connector rerit ced a a ae hh tenn 70 5 62 MASS SPEC Connectors siese ier eeng A A Sl eas ol a da 71 5 6 3 24 Vdc 75 W GConriectorz sse a PERE TS Raced had A dee alate 71 5 6 4 Grounding Wig cc eoe net eee eee Ee ee Te VE OE eine ed were 72 MS Gauge Ion Trap Power Supply Settings 0 0 0 cece tee eens 72 5 7 1 Filament Overpower Detection 00 ccc cece nnn ete e teens 74 57 2 RE Signal Generator iius os sa iS a e ed e e eese ule Rd cnius 74 57 3 Electiometet eek reor ey peter o EY e DR MAHER GE He EORR RR oT Wd e es 76 Power Modes iA eim n s be nba ue e rdc dr a e ande p REL 77 Power ON OFF Sequence cessere RelessebexRe4 e RET Ia 79 5 9 Power ON Sequence us RA V REC E E e TERE e gob hea APR 79 5 9 2 Power ORBE Sequence ite t go nh m9 Rn de etti eee 80 5 9 3 Power On Self Test iu led cs see es de lA AE oat Rl OR lec 80 Total Pressure Measurement Kit TPMK Operation sssseeeeeeee I 80 5 10 T Autopressure Mode ooi e eae E RR ERG RE M UE RN ote le AR RUS 81 5 10 2 Overpressure Protection siio m a ise ee ae dei ne 82 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 11 5 12 Chapter 6 6
2. Interconnect Cable Controller ES to Mass Spectrometer Gauge VQM lon Trap Mass Spectrometer Gauge Quick Installation AC to 12 Vdc and Startup Guide USB Interconnect Cable Power Supply Figure 6 1 VQM System Components The MS Gauge is a specially engineered form of an Autoresonant lon Trap Mass Spectrometer ART MS sensor that connects directly to a high vacuum system and operates at gas pressures between UHV and 10 5 Torr It is mostly constructed of series 304 stainless steel and high purity alumina and mounts directly onto a 2 75 ConFlat port of a high vacuum chamber The MS Gauge is available in two different configurations Nude and Demountable Envelope See Figure 6 2 NOTE The Mass Spectrometer Gauge is a precision instrument Always handle the Gauge with care For the Nude Gauge configuration the inside diameter of the ni vacuum port to which the MS Gauge is mounted MUST be 1 430 A inches 3 632 mm or larger and the insertion length must be 4 inches or longer Damage to the gauge will result if the inside diameter and the length are less than specified Verify that the vacuum port to which the Gauge is mounted is electrically gt grounded It is essential for personnel safety as well as proper operation that the gt N envelope of the gauge be connected to a facility Earth ground Use a ground lug on a flange bolt if necessary Series 830 Vacuum Quality Monitor Instructio
3. Entry Mirror Entry Cup Transition Plate RF Signal Exit Cup Central Lens Mass Separator Exit Mirror Pressure Plate Exit Plate Electron Multiplier Shield Electron Multiplier Electron Multiplier Anode Cup 2 75 ConFlat Feedthrough Flange Detector Assembly NOTE The Repeller is not shown in this illustration Figure 6 3 Components of the Mass Spectrometer Gauge The total sensor equipment consists of three major parts 1 the lonizer 2 the Autoresonant lon Trap and 3 the lon Detector These parts reside inside the vacuum space where the gas analysis measurements need to be made Nude MS Gauge configurations allow direct insertion of the internal components into the vacuum system provided the inside diameter of the vacuum port is at least 1 43 inches in diameter and the available depth clearance exceeds four inches For MS Gauges in a demountable envelope a stainless steel tube covers the probe assembly and provides electrical isolation from other ion sources in the high vacuum system Filament Off Axis Entry Repeller Filament Assembly Slit Plate Figure 6 4 MS Gauge lonizer The ionizer relies on electron impact to produce ions from sample gas molecules The factory default setting for the electron energy is 100eV Off axis electron beam geometry provides high quality mass spectra without significant baseline offset contribution The electron current 0 070 mA Series 830 Vacuum
4. Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview The VQM Controller 1 controls the operation of the MS Gauge 2 stores all required mass axis and electrometer calibration information 3 stores and sets all MS Gauge settings and 4 processes and transmits mass spectrometry data in real time to a host computer for analysis and display During normal operation of the VQM system several current and voltage supplies built into the VQM Controller set the electron emission current the voltage biases on the ion trap electrode structures and the high voltage bias across the electron multiplier detector The VQM Controller also includes a Direct Digital Synthesis RF Signal Generator required to produce mass selective ion ejection from the ion trap A fast electrometer measures electon currents produced by the detector and converts them into voltage signals that are read by a built in A D converter A microprocessor controls all the internal workings of the controller and transmits the mass spectral data to the Host PC in real time over a serial USB 2 0 communication interface Default factory settings are stored in the internal memory of the VQM Controller The VQM Controller includes a TOTAL PRESSURE DB 15 pin connector on the rear panel to power and interface RS485 with the optional Micro lon Gauge TPMK The total pressure and status information provided by the 390802 Micro lon Gauge can be used
5. 830231 Rev F Chapter 1 Safety Instructions 1 1 Safety Introduction BEGIN BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES Additional safety notices and information is provided at appropriate points throughout this instruction manual These safety alert symbols in this manual or on the rear panel of the VA IN Product mean caution personal safety property damage or danger from electric shock Read these instructions carefully Throughout this instruction manual the word product refers to the Series 830 Vacuum Quality Monitor VOM and all of its approved parts and accessories NOTE These instructions do not and cannot provide for every contingency that may arise in connection with the installation operation or maintenance of this product If you require further assistance contact Brooks Automation Inc at the address on the page 3 and Section 1 5 of this manual This product is designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions Failure to comply with these instructions may result in serious personal injury including death or property damage These safety precautions must be observed during all phases of operation installation and service of this product Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of de
6. Averaging Mode Ayos to Collect Avgs Collected Running Avg Vv 25 25 gt lt a 2 a i al as a a4 a a2 a a X Response Time 2109 wo 700 Mass amu Figure 8 11 Summary of Current Data 8 4 4 1 Clear History and Zoom Functions 1 Clears the chart history 2 Sets the current scale to include all plots 3 amp 4 Restore default scale The Zoom factor can be changed by editing the axes labels or by using the mouse cursor to sweep through the area of interest Series 830 Vacuum Quality Monitor 163 Instruction Manual 830231 Rev F 164 8 Viewer Software amp Initial Operation Histogram 8 4 5 Histogram The Histogram Screen displays a larger version of the mass spectrum Histogram that appears on the Summary Screen No additional information is provided but it may be easier to read 830 YOM Viewer Software gt a LEPE lt Total Pressure Average Total Pressure 9 40E 9 Torr WA Current Total Pressure 9 40E 9 Torr Post Processing Averaging Mode Avgs to Collect Avgs Collected Running Avg Y le 100 100 Response Time 8 422 5 Summary Histogram Trend Leak 4 XxX BB Settings Tune Log Data Save 10 Simplicity Solutions rer scale Y 60 0 70 0 Mass amu Figure 8 12 Histogram Screen Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Vi
7. The VQM Mass Spectrometer Gauge is manufactured to high mechanical tolerances and operated with very precise electronics Each MS Gauge is individually tested at the factory and delivers accurate mass spectra based on factory default values for the Mass Cal Factor To perform automated gas identification with the VQM Viewer Software a single gas mass axis calibration is required after the VQM System is first installed A calibrated Mass Cal Factor is required so the peaks associated to each gas species appear at mass locations that closely match their known mass to charge ratios stored in the gas library To perform a mass axis calibration procedure the user must 1 have access to a Host PC with the VQM Viewer Software 2 have a system pressure between 2x10 8 and 1x10 6 Torr 3 display good quality mass spectra i e with adequate averaging 4 identify select a mass peak for which the exact mass to charge ratio is known i e assigned to a known gas species and 5 use the built in Calibration facility Tune Panel to shift the peak location as needed to its known mass to charge position on the mass axis For example select the parent peak for water at 18 amu which is present in most vacuum systems and use the calibration facility to shift the peak location on the mass axis to exactly 18 01 amu Placing the water peak at 18 01 amu calibrates the Mass Cal factor and simultaneously places all other peaks at their proper mass axis location i
8. save csv Date modified Type e ken file 5 26 2010 11 08 AM File folder E ken file csv 5 10 20104 56 PM CSV File E El ken csv 5 26 2010 10 28 AM CSV File El patl csv 7 2 2010 4 37 PM CSV File Desktop El rer csv 6 18 2010 2 42 PM CSV File Help Adobe PDF ld 2 Arial Recent Places Libraries da Ma 1 2 Date a 3 Time 00 51 4 4 Total Pres 1 00E 00 En 5 Mass Intensity aS Sa B 09749 31 64 7 0 9755 30 32 8 0 9762 25 8 29 109768 20 44 Figure 8 21 Save Scan Data Screen 172 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation 8 4 12 Status Error Reporting and Contextual Help The bottom bar of the viewer application display provides Status Help and Error Event information in three distinct side by side areas Status Indications include Disconnected The VQM Viewer Application is not currently connected to a VOM Controller Mass Spec OFF The VOM Viewer Application connected to a VOM Controller but there is no power on the MS Gauge You may have Total Pressure information if a TMPK is being used Mass Spec ON The VOM Viewer Application is connected to a VOM Controller and power is applied to the MS gauge You are ready to scan Scanning The VOM Viewer Application connected to a VOM Controller MS Gauge is powered up and controller is actively collecting partial and total pressure information
9. 358 at 40 AMU M AM 111 10 20 30 40 50 Mass Amu Figure 6 18 AC Excitation Voltage Effects The top spectrum with large RF V i e far above ejection threshold shows superharmonic peak for the ejection of N at 7 amu The superharmonic peaks disappear from the spectra as the RF V is lowered from 100 mV to 50 mV Resolution also improves as the RF V voltage is reduced The factors that lead to the appearance and mitigation of superharmonics are 1 RF Vy Superharmonic peaks appear when the RF V is increased above a certain threshold that allows the ions to be ejected by multiples of their fundamental ejection frequency In general the superharmonic peaks are the first to disappear from the spectrum as the RF V is reduced since they have the highest ejection thresholds In other words since the threshold value for ejection of superharmonics is larger than for the ejection at twice the natural oscillation frequency of the ions the superharmonic peaks are the first to drop out of the spectrum as RF V is reduced 2 Exit plate voltage The presence of superharmonics is affected by the voltage on the exit plate As the voltage on the exit plate drops i e becomes more negative for positive ions the relative abundance of superharmonic peaks increases Lowering the exit plate voltage setting the exit plate bias more negative lowers the threshold for the ejection of superharmonics Very often it is possible to make sup
10. 6 lon Trap Mass Spectrometer Gauge 6 8 Ion Detector Assembly Positive ions auto resonantly ejected through the exit plate of the ion trap mass separator are directed towards the ion detector assembly which includes an electron multiplier device specially designed for the VQM Mass Spectrometer Gauge lon Trap EM Cup EM Detector Assembly EM Clip HV EM Clip Ground EM Anode Cup amp Feed Through Figure 6 14 MS Gauge Electron Multiplier The detector assembly consists of three components 1 Electron Multiplier Shield 2 Electron Multiplier Detector 3 Anode Cup The VQM Mass Spectrometer Gauge is a very fast scanning device that requires a high bandwidth electrometer to record ion current output without peak signal distortion i e amplitude and phase distortion Since transimpedance amplifiers have a limited gain bandwidth product the current output of the ion trap mass separator i e picoAmp range must be amplified to match both the gain and bandwidth of the Controller s electrometer See Section 5 7 3 The input to the detector is the ion current ejected from the ion trap during frequency chirps The output of the detector is an electron current proportional to the ion current generated by a state of the art electron multiplier The electron multiplier gain factor defined as gain electron current ion current is dependent on the electron multiplier bias voltage a user adjustable setting S
11. Adjust the Mass Cal Factor until the red fitted peak and the scanned peak in black appear in the correct amu position on the Tuning Spectrum Graph Calibration occurs as you perform the activity The calibrated Mass Cal Factor can be stored on the 830 Controller as a user setting via the Save User Settings to EEPROM button See Mass Axis Calibration in the Initial operation Procedure of this chapter The Advanced View of the Tune Screen includes three buttons that provide interaction with the 830 Controller s EEPROM e Flash User Settings to EEPROM Use this button to save Calibration and other gauge settings on the controller box These settings will be used each time the 830 Controller is reset The buttons remain disabled while the EEPROM values are stored Do not turn off the 830 Controller while the buttons are disabled Restore User Settings Use this button to restore the current 830 Controller settings from the most recently stored user settings Restore Factory Settings Use this button to restore the current 830 Controller settings from Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 181 182 8 Viewer Software amp Initial Operation the factory defaults Use this button when you are connecting a new gauge to protect the gauge electronics from damage 8 5 13 Diagnostics Diagnostics are available only on the Tune Screen The Diagnostics provide information about how the Viewer Application is
12. CAL VAL 100E 9 sets the Electron Multiplier Electrometer gain to 100 nA V if the EMEL logical instrument is selected VALue MIN MAX Query the current calibration factor or Electron Multiplier Electrometer gain or the respective minimum and maximum values Response is in the format D DDDDDDESDD where D is an integer O 9 and S is either or Example 6 160000E 02 the current calibration factor is 616 kHz if the MSP logical instrument is selected Example 2 000000E 08 the current Electron Multiplier Electrometer gain setpoint is set to 20 nA V if the EMEL logical instrument is selected MEASure Defined only for the Electron Multipler Electrometer Measures the actual gain the electrometer is set to The MSP logical instrument must be OFF Response is in the format D DDDDDDESDD where D is an integer 0 9 and S is either or Example 2 163079E 08 the actual Electron Multiplier Electrometer gain is 21 63079 nA V Series 830 Vacuum Quality Monitor 191 Instruction Manual 830231 Rev F 192 9 830 VQM Command Set 9 5 FETCh Subsystem The Fetch command transfers the last Mass Spectrometer measurement to the output buffer Table 9 4 Fetch Commands Keyword Parameter Form Comments FETCh Defined only for the MSP logical instrument Returned data is in Data Interchange Format and represents the last mass spectrum and the environment in which the data was ta
13. Example 14 56 27 344 the current time is 2 56 27 344 PM Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 9 830 VQM Command Set Table 9 2 830 VOM Basic Commands Keyword Parameter Form Comments RESet Resets the microcontroller Close the COM Port before the 830 controller is re enumerated by the Operating System STATus INSTrument ETPRessure RSX Queries the status of the 390802 This is the same status that is returned by the 390 RS485 RSX command The returned value is a 32 bit integer representing the 390802 status See RSX in Chapter 5 of the 390001 Instruction Manual provided with the 390802 TPMK or can be download at http www brooks com pages 3064_module_manuals cfm Example 0 No errors events reported by the 390802 9 4 CALibration Subsystem The Calibration subsystem has the functions required to perform system calibration Table 9 3 Calibration Commands Keyword Parameter Form Comments CALibration Commands to calibrate the logical instrument Most logical instruments will have at least one set of gain offset values VALue lt numeric value gt MIN Defined only for the MSP adjust the calibration factor and MAX DEF EMEL adjust the electromenter gain MSP logical instrument must be OFF logical instruments Example CAL VAL 625 sets the calibration factor to 625kHz if the MSP logical instrument is selected Example
14. External Trigger The VOM Viewer Application connected to a VOM Controller MS Gauge is powered up Partial Pressure data will be processed as it is received after an extranl trigger is detected by the controller The Help area displays a short help message each time you hover over a control with the mouse pointer on the Viewer Application screen Additional Help may be accessed by typing ctl H The Error Event area displays a count of events or errors as listed in the Viewer Application list or the most recent error Clicking on this area brings up a popup window that displays the contents of the list The list holds the most recent 100 configurable events until the Clear button is pressed or the Viewer Application is connected to a new sensor or reconnected to the same sensor The list is cleared for each new connect because its contents are gauge specific A daily log of events and errors is maintained in the C Data ErrorLogs directory If multiple connects are performed in a single day error status changes will be appended to the daily log file 8 5 Viewer Application Components 8 5 1 Results Table The results table is the most complex control in the Viewer Application Its basic function is to display the ten most prevalent gases or masses in the system but its behavior depends on how it is configured and used The color key to the right of the table identifies the color and width of the Trend Graph plot for that gas The colors cannot
15. MEAR Electromater Gar Mass Peak Location 18 01 Resckiton 104 43 GF 0 99 Intensity 100 pmm 017 SR 11553 HA Loop Time s 0 090 Analysis Backlog 0 Start Raw Logging Scanning i i 90 0 1000 1100 Figure 8 7 7 Click on the Flash User Settings button of the Tune Panel to save the Mass Cal Factor into the controller s User Settings 8 Proceed to the Summary panel The VOM System is ready to use Series 830 Vacuum Quality Monitor 159 Instruction Manual 830231 Rev F 160 8 Viewer Software amp Initial Operation 8 4 Using the Viewer Application e Connect 8 4 1 Connect Press the Power button on the VQM Controller to apply power to the Controller and MS Gauge NOTE Press the Power button on the Controller to turn ON power to the Controller before clicking the Connect icon Power is also applied to the Micro Ion Gauge TPMK if used when power is turned ON to the VOM Controller Wait for the VOM Controller to complete its Power On Self Test Click the Connect icon on the Viewer Application to establish communications between the VQM Controller to the Viewer Aplication via the USB link Click on Use This Device If multiple VQM Instruments are connected to the Host PC scroll through the list in the Select from detected selection box y 830 VOM Viewer Software File Help ptt e pa c amp e simppitura y C
16. The default electron multiplier bias voltage setting is 925 V Most VQM Systems will require Bias Voltages between 925 and 1100 V to deliver peak amplitudes of 50 nA for gas pressures between 2x10 and 1x10 Torr The bias voltage can be safely decreased to the 1350 V limit Further decreases in bias voltage can lead to potential problems such as internal arcing and rapid gain degradation and should prompt the user to perform an electron multiplier replacement at the earliest convenient time The lower voltage limit for the electron multiplier high voltage supply is 1500 V 8 3 4 2 Procedure NOTE The Electron Multiplier Gain adjustment should be performed in the presence of 1 to 3 x10 7 Torr of pure gt 90 nitrogen gas monitoring the peak amplitude at 28 amu NOTE The Electron Multiplier Gain Adjustment procedure requires adjustment of the Electron Multiplier Bias Voltage setting A Host PC and the VQM Viewer software provide the easiest access to all VOM Controller Settings Alternatively the electron multiplier voltage can be modified using a standard communication program such as Hyperterminal Section 9 17 or voltage setting commands Section 9 16 NOTE 830 VOM users relying on stand alone operation i e no Host PC Connection should contact the factory for additional information NOTE The filament and electron multiplier components of the MS Gauge must be regarded as consumables Both devices undergo irreversible gain d
17. check the Windows firewall and anti virus settings on the PC 4 2 Install the Viewer Application Software Recommended computer requirements are given in Section 2 4 4 When the software installation is complete an icon for the Viewer Application is placed on the desktop of your computer VA SimpliGty Solutions 830 VOM Figure 4 1 Simplicity Solutions Icon for the VOM Viewer Application 1 Insert the CD labeled VOM Software Suite into your computer 2 Use Windows Explorer to open the CD 3 Double click the Setup exe icon to begin the installation See Figure 4 2 Series 830 Vacuum Quality Monitor 45 Instruction Manual 830231 Rev F 4 Software Installation Ele Edt Yew Favorites Tools Help Qa O 1 seach p Folders FFs Size 22 KB 958 KB 1 336 KB 4 837 KB 73 0x0409 ini 9 230 Driver 32 bit msi 52830 Driver 64 bit msi 830 VOM Viewer Software msi Type File Folder File Folder File Folder File Folder File Folder Configuration Settings Windows Installer P Windows Installer P Windows Installer P Date Modified 11 17 2010 2 46 PM 11 17 2010 2 43 PM 11 17 2010 2 43 PM 11 17 2010 2 42 PM 11 17 2010 2 42 PM 3 23 2010 3 44 PM 11 9 2010 4 22 PM 11 9 2010 4 16 PM 11 17 2010 2 37 PM Autorun inf Emytest htm setup exe S Setup ini 1 KB 1 KB 1 427 KB 6 KB Setup Information HTML Document Application Configuration Settings 11 17 2010 2 37 PM 10 26 2010 5 22 PM
18. exit plate voltage and RF V adjustments are recommended as the pressure rises above 3x10 Torr The hard upper limit of the exit plate bias is the entry plate bias Setting the exit plate bias at a voltage above the entry plate bias will result in all peak signals rapidly dropping away from the spectra as the ions are lost to collisions with the back plane of the entry plate before reaching the exit grid for ejection Dropping the potential of the exit plate far below the entry plate bias i e below the recommended 7V differential will generally cause two undesirable effects 1 increases in baseline offset signal and 2 the appearance of super and sub harmonic peaks in the spectra at higher masses Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge 6 9 6 Electron Multiplier Shield Bias V8 in Figure 6 16 The electron multiplier shield plate consists of 1 a flat circular plate with a centrally located aperture and 2 an off axis ion deflection plate located inside a square metal box attached to the center of the plate The purpose of this electrode assembly is to optimize the transfer of the ejected ions into the Top Cone i e conversion dynode of the electron multiplier and to shield the cone from unconfined ions not ejected from the trap The electron multiplier shield operates at a voltage very close to the exit plate voltage Changes to the electron multiplier shield
19. while a 24 Vdc power is connected to the instrument Press the Power button to toggle between the ON and Stand by power modes of the VOM Controller See Section 5 2 for a list of all available power modes for the VQM Controller Note The Power button is not a hard power switch and requires 24 Vdc power to operate in the manner described in this section Pressing the Power button while 24 Vdc power is not delivered to the VOM Controller unit will have no consequence on the power mode of the VOM Controller The Power button illuminates with a single color LED Green which indicates three possible power status conditions for VOM Controller Table 5 2 VQM Controller Power Modes LED Illumination Green Power Status Description OFF Stand by The Controller is in Stand by mode assumes the 24 Vdc power supply is connected to Controller ON Power ON The Controller power and USB port are fully enabled Blink Power On Self Test The Controller is in Power ON Self Test POST mode The LED blinks ON OFF while the self test procedure is performed and until completed POST takes approximately 13 seconds The Power button also controls power to the Micro lon Gauge TPMK If power is turned OFF to the VQM Controller Stand by mode power is also turned OFF to the TPMK Users requiring dedicated power control for the Micro lon Gauge controller will need to use a different wiring setup where power is provided from an indep
20. 1 6 2 6 3 6 4 Chapter 7 7 1 7 2 7 3 7 4 Mass Spectrometry Scan Control 4 5 40 ate pe bbe dat wide a emis 83 5 111 Manual Scan Control enri nai AM Rorate nae rt kia es 84 5 11 2 External Trigger Scan Control 1 rr 84 5 TT 3 Remote Scan Control asta Ba eed RII a RI LAE ee PEE aA Ris 84 5 11 4 Mass Spectrometry Scan Count see pecie pi cent eet e A 85 5 115 Single Scan ati tho ee ce aia labio 85 511 6 Continuous AS es er eee ee ee ee eR He e 85 Typical System Configurations 1252s eR cle ce ha pd er ha RU EG Mes ree e wa ne 85 SAQA Standard Setup isset reete a eo dates a 85 5 12 2 Standard Setup with External Trigger Pulses 1 ee cee eee ee 87 5 12 3 Stand Alone Setup ii oe Hep ethane A 88 5 12 4 Stand Alone Setup with External Pulses 0 2 cence ene eee 89 Timing Diagrams for MS Scan Control 0 0 rr 90 5 13 1 Internally Generated Trigger nee eene Vata es ce e tete en 90 5 13 2 Internal Trigger with No USB Data oo pue ro 91 5 13 3 Internal Trigger with USB Data i usi ii a weet ened 92 5213 4 Buffer Overwnte ierse reid vec e p ee mre Up ea qe dee eU eee etis Here aed 92 Ion Trap Mass Spectrometer Gauge 0 0 ec Hh hh 97 Introduction to the MS Gauge i uoo n oe See eee eH pU bate bale RR dtes 97 Terms used in this Captor terre V repere tue Re RR RR PH PH WU MIR eres 97 MS Ga ge Overview s s eer ees RE a Rr Rer ht aep ea do aa 97 MS Gauge Principles of Operation sseeeeeee n
21. 5 9 6 9 7 9 8 9 9 9 10 9 11 9 12 9 13 9 14 9 15 85 1 Results Tablets y ette tre cP peace reda ed Ra 173 8 52 Total Pres x Ge elem ROUES PATI I e Pues 174 8 5 3 Averaging aka Post Processing eeseeeeeeeeee e nett nee 175 8 5 4 Short Term Trend Graph 0 rr 176 8 5 5 Long Term Trend Graphic a whee nes he ER ea el eee 176 8 5 6 Histogram xeu eve hee hotel qe eta eee ie eae eae EN ae vs 177 89 7 Leak Parameters ts ol bates Vb MARS RID a RR UOS ea a RR que 178 8 5 8 Leak Trend Gtaph i ici theca o eet p eo dare Wen ee eere ede hes 178 8 5 9 Mass Spectr m Libra conri aid eec ex e EI ape X pU T oe e 179 8 5 10 Pressure Setup configuration seeeeeeeee hh 180 8 5 LI Selected Peak Parameters 5 esca ea a vus 181 8 5 12 Calibration Controls mein iaa es eR ete dadtedeesega daw ees 181 8 5 13 DIOSES oor t ec pesi pru epu ie esee dul 182 8 5 14 Raw Logging s ote a San erac etica eue e Ao d RA CR se 183 8 5 15 Tuning Spectrums ciiam gares cede du Cane Ra e e ei eer atc fe rad 183 8 5 16 830 Headet i coetui A eee rac PA e P aeq IS Coe e ub 184 Popup Dialogs i is e mei Rer Ree t eL ec etta eet eint R 184 8 6 1 Log Data cic nite pe ee ty RO WI det eq ERR DOE I E pi 184 8 62 iSdve ur pv ERR PENA EVA A AAA PER UE ERE RD RR 184 8 6 3 Error Event Litunia AU eA E e UE RUPTA 185 8 6 4 Log Raw Data uses RI e E e RE e aa ER ts 186 830 VOM Command Set ess Le e RR a UAR EIU SET ERE 187 Introduct
22. 75 ConFlat Port of a high vacuum chamber The following list includes all the materials utilized in the construction of the Mass Spectrometer gauge and exposed to the vacuum environment during operation e 304L stainless Steel 316L stainless Steel e Alumina Ceramic Al O3 98 Min Nickel e Molybdenum e Ag Cu Eutectic Braze Gold e Iridium e Yttria Y203 99 95 Min e Lead silicate Glass Electron Multiplier SiO doped with Pb Chromium Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 109 6 lon Trap Mass Spectrometer Gauge 6 6 Ionizer Positive ions are formed directly inside the lon Trap volume by continuously bombarding gas molecules with energetic electrons generated from a heated filament i e thermionic emission A fraction of the ions formed inside the ion trap are confined into oscillatory motions and contribute to the mass spectral output of the gauge autoresonant ejection Ceramic Plate Filament Region 2 Figure 6 12 VOM MS Gauge lonizer Figure 6 12 illustrates a cross section of the ionization region within the ion trap electrode assembly The blue arrow traces the ionization path of an off axis electron beam and defines two regions where ions are created between the entry plate and entry cup lons formed in the region close to the axis of the trap Region 1 are confined into oscillatory motion and contribute to the mass spectrometer sign
23. A Acronyms Terms and Definitions 19 27 58 97 C Command Set Error Event Codes 202 Compliance Environmental 26 Components System 20 Controller Connections 38 Front Panel Connectors 65 Front Panel Controls 60 Overview 57 58 Power Modes 77 Power ON OFF Sequence 79 Rear Panel Interconnections 69 Signal Input Output Connections 42 Customer Service Support 3 218 D Damage Requiring Service 15 213 Dimensions VOM Controller 21 VOM Gauge 21 Directives EC Low Voltage 26 EMC 26 RoHS 26 WEEE 26 E Electrical Discharge 12 Electron Multiplier Overpressure Conditions 57 Environmental Compliance 26 Error Event Codes Command Set 202 Explosion Implosion 13 Explosive or Combustible Gases 14 F FCC Verification 16 G Gauge Advanced User Settings 118 Bakeout Procedure 132 Connection Procedure 36 Dimensions 30 Index Electron Multiplier Detector 135 Electron Multiplier Illustration 116 Environmental Requirements 134 Filament Assembly Replacement 140 Filament Overpower Detection 74 Filaments Replace 214 Installation 30 Installation Requirements 31 lon Detector Assembly 115 lonizer 110 lonizer Settings 111 Maintenance 131 Mass Separator 112 Materials 109 Mounting Procedure 32 Operational Parameters 119 Operational Requirements 32 Overpressure Conditions 57 Overview 97 Power Supply Settings 72 Principles of Operation 104 Repeller Voltage Optimization 144 Storage Recommendations 131 Gr
24. AMP Voltage setting is the only adjustable parameter for the RF source Multiply this voltage setting by 0 12 to obtain the RF Vop applied to the transition plate in units of mV the trap are modified There is a very slight dependence between RF RF Amp Voltage and mass axis creates a potential for the appearance of superharmonic peaks in the spectra The RF Amp Voltage should be optimized every time the potential gradients inside calibration Increasing the RF Amp Voltage high above the ejection threshold value Positive ions are formed inside the ion trap volume in an ionization region located between the entry plate and the entry cup as illustrated in Figure 6 9 Electrons are thermionically generated outside the ion trap hot filament source and directed into the ion trap volume through an off axis slit located on the entry plate A fraction of the positive ions are confined inside the ion trap volume by the electrostatic potential well The rest of the ions are not confined by the electrostatic potential well and are mostly lost to neutralizing collisions with the pressure plate lons of all masses and energies created and stored inside the ion trap are mass selectively excited and ejected using an autoresonance method A small RF signal 60 millivolt peak to peak typical from programmable frequency RF supply is AC coupled into the negatively biased transition plate and scanned from high to low frequency with a fixed peak
25. Bolt Kit 801274 1 Includes 6 flange bolts and washers 3 plate nuts and 1 copper gasket Heater Jacket 120 VAC for the 830 Gauge 801203 Heater Jacket 240 VAC for the 830 Gauge 801204 1 North American 115 Vac amp Japan 100 Vac 2 North American 240 Vac 3 Universal European 220 Vac 4 United Kingdom 240 Vac KK eek RK eek RAK KK kkk ES eek RAK RAK RAK RAK Total Pressure Measurement Kit 390802 2 YG T Absolute amp Ratiometric Pressure 10 to ATM RS 485 gauge filament protection di ital display dual Yttria coated Iridium ion gauge filaments 2 75 inch NW35CF ConFlat type flange Torr Cables 830 VQM Controller to Micro lon ATM Module 1 meter 3 28 ft 802301 0010 3 meters 9 84 ft 802301 0030 ES 2K 2K AAA RAK AK 22k KK ES eek RA RAK KK RAK Windows Windows XP and Windows 7 are registered trademarks of Microsoft Corporation LabVIEW is a registered trademark of National Instruments Corporation Chapter 1 1 1 1 2 1 3 1 4 1 5 1 6 Chapter 2 2 1 2 2 2 3 2 4 2 5 2 6 Chapter 3 3 1 3 2 3 3 3 4 3 5 3 6 3 7 3 8 Table of Contents Safety Instr c ons oS eio p MVP A A I RU REPRE ek ld 11 Safety Introduction i euet ep DER CER RURSUM REGI e E e eme eg abe e Tn 11 Equipment GLORIOSA A A ada 13 Implosion Explosion mesire da E a ola dba coa 13 Damage Requiring Service otra Ri NS Sak REA E a Bee hv 15 Service Guidelines 4 ed a a glad bg 15 PCG Verificati
26. Connection to a vacuum system occurs through a standard 2 75 ConFlat port The MS Gauge with a demountable envelope can be attached directly to any standard 2 75 ConFlat port A NOTE The nude version of the MS Gauge does not fit into the optional Tee Flange Use the demountable envelope to attach a Nude MS Gauge to the standard Tee Flange or to any 2 75 ConFlat flange that does meet the minimum internal diameter and insertion length requirements For systems including the optional Micro lon ATM Total Pressure Measurement Kit TPMK connect the MS Gauge and the Micro lon Gauge in close proximity to each other and without conductance restrictions between them Ideally the MS Gauge and the Micro lon Gauge must be exposed to identical vacuum conditions An optional Tee Flange adapter is available to connect both sensors to a single vacuum port For systems relying on analog output signals from a Granville Phillips Series 370 ionization gauge controller to provide total pressure readings to the control unit connect the MS Gauge in close proximity to the ionization gauge sensor and without vacuum conductance restrictions between them If necessary use an optional Tee Flange to connect the ionization gauge and MS Gauge to a single port If an optional Tee Flange adapter and Total Pressure Measurement Kit TPMK are included in the installation procedure evaluate the best possible orientation and configuration for the Tee Fla
27. Controller transmits MS data to the Host PC for each outstanding FETCh command The Host PC is responsible for data collection 1 With power ON the SCAN button enabled and the trigger IN port enabled LED Green provide an external trigger pulse to the VQM Controller to execute a single scan 5 11 3 Remote Scan Control Scans can be initiated with commands sent from a Host PC that is connected to the VQM Controller Unit via the USB link Commands are available to initiate both single and continuous scanning The external trigger IN port is automatically disabled when continuous MS scanning is executed under Host PC scan control e With power ON and the SCAN button enabled issue a command INITiate CONTinuous Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview ON from the Host PC to execute MS scanning in single or continuous scanning mode e To stop continuous scanning issue a command INITiate CONTinuous OFF to interrupt execution of continuous scanning e Use the FETCh Command to collect MS Data with the Host PC during continuous scanning 5 11 4 Mass Spectrometry Scan Count The VQM system allows for two different scan count modes single and continuous scan 5 11 5 Single Scan One MS scan is executed e Send an external trigger pulse to the VQM Controller or send a command from the Host PC to execute a single one MS scan There are two different available commands that allow
28. ERR ALL 9 16 11 Reset Current Settings to Factory Settings from NVRAM The RST command resets the instrument to a known configuration Among the settings it changes is the Current Settings the Current Settings are replaced with the Factory Settings from NV RAM e INST MSP e OUTP OFF e RST e SYST ERR ALL 206 Series 830 Vacuum Quality Monitor Instruction Manual 83023 1 Rev F 9 830 VQM Command Set 9 17 Using a Terminal to Communicate with the VQM System Since the 830 Controller looks like a Virtual COM Port to Windows Figure 1 through the USB interface any program that can access serial ports through Windows like HyperTerminal can be used to communicate with the 830 Controller using the provided command set There are many terminals available some free that can accomplish this task This section focuses on HyperTerminal available on Windows XP or http www hilgraeve com hyperterminal html but terminals such as TeraTerm http ttssh2 sourceforge jp and Termie http www codeproject com KB mobile Termie aspx can also be used 2 Device Manager Action View Help m amp us ss Disk drives Display adapters 2 DVD CD ROM drives a Human Interface Devices 3 IDE ATA ATAFI controllers gt Keyboards Mice and other pointing devices 9 Monitors E E Network adapters E Ports COM amp LPT Y Communications Port COM1 Y ECP Printer Port LPT1 E Intel R Active Management Technology SOL CO
29. Helium Hydrogen Krypton Oxygen Water 0 000 0 000 0 000 0 000 0 000 ec e o ec wa f e o nom ce o ee o non 0 000 fer Library Spectrum on E Pressure Setup Pressure Source 390 TPMK Ext Pressure Y Xenon Normalized Pressure Limit 165 Pressure Units Torr T T T T T 1 600 700 T f 100 0 1100 120 0 Mass amu Figure 8 15 Settings Display Screen Series 830 Vacuum Quality Monitor 167 Instruction Manual 830231 Rev F 168 8 Viewer Software amp Initial Operation Tune The Tune Screen is used for calibration electron multiplier gain adjustment electrometer gain adjustment and ion trap configuration The tune screen provides access to the raw spectral output of the mass spectrometer and also to the header information which provides specific information on parameters status and hardware The tune screen also provides access to the factory default and User Settings of the VOM Controller and the raw mass spectra logging engine NOTE The gain of the electron multiplier degrades over time and periodic gain adjustments will be required to restore detection limits and dynamic range The electrometer gain is somewhat temperature sensitive and a periodic recalibration is recommended in the presence of large temperature shifts in the environment Raw Mass Spectra Logs are large and require sufficient hard disk resources to log the desired data before starti
30. Instruction Manual 830231 Rev F 75 76 5 VQM Controller Overview Table 5 11 Frequency Range Time msec Frequency Hz ee Mass amu amp 46 353908 109 54 566 48 341113 105 58 736 50 329180 101 63 071 52 318111 98 67 537 54 307759 95 72 157 56 297983 92 76 969 58 288782 89 81 952 60 280156 87 87 076 62 272105 84 92 305 64 264485 82 97 701 66 257297 80 103 24 68 250396 78 109 00 70 243927 76 114 86 72 237745 74 120 91 74 231850 72 127 14 76 226243 70 133 52 78 220924 69 140 03 80 215892 146 63 NOTE The exact atomic mass of hydrogen is 1 00794 amu amp The mass calculation assumes ejection of water 18 01 amu at 616 kHz i e typical for default trap settings The above frequency table assumes that the instrument is operating under default ion trap operational conditions i e ejection frequency for water is 616 kHz 18 01 amu Since the frequency sweep profile is fixed the mass range of the mass spectrometer will change each time the trap parameters are modified and the ejection frequency of the Ids EMR REMENE general large frequency shifts should be expected any time bias voltagdtqgr ANSE DAS Hesin AHE the ion storage volume of the trap are changed xaxes dat in the data directory of the VOM Viewer Software The VOM Controller provides a single frequency sweep profile but allows changes to the RE amplitude through
31. It is very important to be aware of the fact that both the filament and the electron multiplier are powered every time the Mass Spectrometer Gauge is turned ON i e there are no separate controls for the filament and the electron multiplier Users wanting to activate the filament while keeping the electron multiplier OFF must reduce the High Voltage Bias to the electron multiplier before turning the MS Gauge ON A minimum bias voltage of 685 V is required so that repeller bias control is still available over its full adjustment range See the Filament Outgassing procedure in the Initial Operation Procedure in Chapter 8 7 5 7 Contamination The electron Multiplier detector relies on the availability of a clean and unobstructed secondary electron generation channel The active surface of the electron multiplier can withstand repeated exposures to ambient air without degradation However long term exposure to ambient air gt 3 months has been known to cause irreversible damage to the detector Oxidizing agents in the air water and oxygen adsorb onto the active layer of the channel and oxidize the lead atoms responsible for the high secondary electron yields of the device The MS Gauge storage recommendations in this chapter are strictly designed to protect the electron multiplier from such irreversible damage The electron multiplier active channel must be kept free of dust lint or any other particulates Organic compounds such as pump oil or
32. Jacket for the Mass Spectrometer Gauge Field replacement Filament Assembly Kit Demountable envelope Full Nipple for the Nude Mass Spectrometer Gauge Tee Flange adapter Hardware bolt kit Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 Hardware Installation 830 VOM TOTAL Usa SCAN PRESSURE a rs o 9 TRIGGER GRANVILLE PHILLIPS and Startup Guide Interconnect Cable Controller to Mass Spectrometer Gauge USB Interconnect Cable VOM lon Trap Mass Spectrometer Gauge AC to 24 Vdc Power Supply Figure 3 1 Standard Components of the Vacuum Quality Monitor System Micro lon Total Pressure Gauge TMPMK Catalog 390802 Interconnect Cable Micro lon Gauge to VOM Controller Catalog 802301 0010 for 1 meter long or 802301 0030 for 3 meters long Tee Flange Catalog 801272 and 3 Bolt Kits Catalog 801274 1 Demountable Envelope Nipple Catalog 801270 for Nude MS Gauge Figure 3 2 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Optional Components of the Vacuum Quality Monitor System 30 3 Hardware Installation 3 4 MS Gauge Installation A Verify that the vacuum port to which the Gauge is mounted is electrically IS grounded It is essential for personnel safety as well as proper operation that the x envelope of the gauge be connected to a facility Earth ground Use a ground
33. Manual 830231 Rev F 8 Viewer Software amp Initial Operation 830 VOM Viewer Software Fe Help DD gt ow 2 Connect Mass Spec Scan Summary Histogram Trend 830 Trap Parameters FilamentEmesion 0070 m FiamentBlas 30 00 Repeller Bias 25 00 Entry Plata Blas 13000 Pressure Plato Blas 75 00 Ops Blas 27 00 Transition Blas 685 00 Exit Plate Bias 125 00 EM Shield Bias 127 00 EM Blas 1050 00 RFAmpPP E 0500 Mass Cal Factor 609 000 Hash User ettings to EEPROM I232232223 Forometw Gin 20 000 Location 18 01 Intensity 1 00 HW Loop Time 6 0 090 Analysis Backlog 0 ttn Scanning Mass Peak Resolutian 104 43 Gor 0 99 AWM 017 SIR 11553 Averager Backlog D Log Data Backiog O Advanced Y Leak Settings amp 48 Tune Log Data Save 98 95 9 0 8 5 C9 Cabae P Simp licituPa Solutions rar sa Y Figure 8 4 Tune Screen Advanced Settings 4 Turn ON the MS Gauge 1 Press the Mass Spec Button on the front panel of the instrument or 2 click on the Mass Spec button on the Viewer Software control bar Wait for the unit to warm up see Warm up Periods Section 7 4 4 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 157 158 8 Viewer Software amp Initial Operation 830 VOM Viewer Software 830 Trap Parameters FilamentEmission 0070 mA 0070 Filament Bias 3000
34. Messages Error or Event ode or Event Number of Averages Set Number of Averages Set Averaging Mode Set 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter Averaging Mode Set Number of Averages Set Number of Averages Set Number of Averages Set Averaging Mode Set Averaging Mode Set 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 830 Set Parameter 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 2010 11 29 Troubleshooting Details Value Value Value Electr Electr 100 1000 Cumulative Moving Avg ameter Gain 1 000000E 8 ometer Gain 1 200000 8 Mass Cal Factor 610 900000 Mass Cal Factor 610 800000 Mass Cal Factor 610 700000 Mass Cal Factor 610 600000 Electr Electr Value Value Value Value Value Value on Multiplier Bias Voltage 1500 000000 ometer Gain 1 500000E 8 p 10 100 1000 Cumulative Moving Avg Running Avg Mass Cal Factors 610 500000 Mass Cal Factor 610 600000 Mass Cal Factor 610 700000 Mass Cal Factors 610 800000 Mass Cal Factor 610 900000 Mass Cal Factor 611 000000 ee Raw St
35. Procedute 5s oi ge cased RR e a A a 32 Total Pressure Measurement Kit Installation 0 cece e 34 3 5 T Introductionis sat RR 34 3 5 2 Installation Requirements lesse mh 35 3 5 5 Moun ng Procedure so ene by RA E E EEA 35 VQM Controller MS Gauge amp TPMK Connections eeeeeee I 35 3 6 1 Introduction exc seno aerate ed wah ENNIO acca UN VE Sede VPE een ee 35 3 6 2 Connection Requirements lesse 35 3 6 3 MS Gauge Connection Procedure 1 1 0 0 eee cee he 36 3 6 4 Micro Ion Gauge TPMK Connection Procedure 37 VQM Controller 24 Vdc Power Connection ooooooooorrrr he 38 3331 IO UC ii A AS baa T e ere ath 38 3 7 2 Connection Requirements prenn oi us Dhen eee hh 38 3 7 3 Connection Procedure 1i de REEF RR ERREUR E NEN RS 39 System Grounding Procedure c soeesiekiei ek A ESI 39 3 8 1 VQM Controller Ground Connections 000 c ccc en 40 3 8 2 System Ground Test Procedure serros sisse e eet eee teen eens 41 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 9 3 10 Chapter 4 4 1 4 2 43 Chapter 5 5 1 5 2 5 8 5 4 5 5 5 6 5 7 5 8 5 9 VQM Controller Signal Input Output Connections eeeeeee ee 42 3 9 I Trigger Input 2r de cesis tees e aes ada ace Re ace Ear ese Lagos 42 3 9 2 Trigger Outputs ois enh bb eee epic idee dor red epi pa euren redis 42 3 9 8 Analog Input External Total Pressure 0 e 42 3 9 4 Analog Outputs i200 san Lelensteteeil
36. Pulse Width 1 ms The Trigger IN LED illuminates with a single color Green which indicates 1 whether the external trigger IN port is enabled or disabled and 2 if valid external trigger pulses are being delivered to and detected by the VOM Controller Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 65 66 5 VQM Controller Overview Table 5 5 Trigger IN Connector LED LED Illumination Trigger Input Green Port Status Description OFF Disabled The Trigger IN port is disabled External trigger pulses delivered to the VQM Controller using the external Trigger IN port are ignored Note The Trigger input port is disabled when continuous MS Scanning is executed ON Enabled The Trigger IN port is enabled default state External trigger pulses delivered to the Controller using the external Trigger IN port are processed by the Controller and used to trigger single scans Note The Trigger IN port is enabled as soon as continuous MS scanning is interrupted Blinking Scanning The Trigger IN port is enabled and valid external trigger pulses are actively being delivered to and detected by the Controller to execute scans The Trigger IN LED blinks each time a valid trigger pulse is detected and a single scan is triggered The Trigger IN port is enabled as the factory default when the VQM Controller is turned ON The external Trigger IN port becomes disabled when continuous MS
37. Scanning is started from manual scan control MS Scan Start or from the Host PC Missed triggers due to over triggering i e a new trigger issued before the previous MS Scan is completed are detected accumulated in a dedicated counter and prompted through the System Error LED of the MASS SPEC Button If trigger pulses are delivered at a rate faster than the scan rate the system error LED blinks each time a trigger is received before the previous scan is completed This allows real time debugging of over triggers e the user must slow down trigger rate until the System Error LED stops blinking 5 5 2 Trigger OUT BNC Connector LED Use the Trigger OUT port to access the output trigger pulses available to time frame the MS Analog Out signal available from the VQM Controller or to trigger external data acquisition display devices and time frame the MS analog out signal The output trigger pulse frames the start and end of the ion trap frequency sweep Output trigger pulses can also be used to trigger time frame the MS analog out signal digitized with oscilloscopes analog to digital converters and data loggers The Trigger OUT port is enabled when the VQM Controller is first turned ON There is no input programmability of the trigger logic on the VQM Controller e Connector Type BNC Output Impedance 50 Ohm Trigger Logic TTL Active HIGH The Output level becomes High as the MS scan is initiated The output becomes Low again at
38. Spectrometer Gauge 7 15 Pin D connector for the optional Total Pressure Measurement Kit LEDs on front panel EXT TP USB Trigger IN Trigger OUT Analog IN Analog OUT Buttons on front panel Power Scan Mass Spec Input Power Controller and MS Gauge Only 24 Vdc 15 Watts required 8 Watts typical NOTE The System MUST be properly grounded See Section 3 8 and Figure 3 15 on page 41 Input power when using the optional Series 390802 Micro lon ATM Gauge 24 Vdc 75 Watts maximum NOTE The System MUST be properly grounded See Section 3 8 and Figure 3 15 on page 41 Input Power Plug DC power jack 5 5 mm OD x 2 5 mm ID x 11 mm long Operating Temperature 0 C to 40 C 32 F to 104 F Non operating Temperature 0 C to 80 C 32 F to 176 F Relative Humidity lt 90 non condensing Physical Dimensions See Figure 2 4 Weight 720 grams 25 ounces Specifications and dimensions are subject to change without notice USB cable must meet the specifications for USB 2 0 USB IF Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 2 Introduction amp Specifications 2 4 2 Mass Spectrometer Gauge Specifications Table 2 3 VOM MS Gauge Specifications Parameter Specification Measurement Range Partial Pressure UHV to 1 x 10 Torr Total Pressure with optional Total Pressure Measurement Kit ATM to 1 x 10
39. TSOurce EXTernal FPA CSINgle CCONtinuous OSCan CVALue lt Mass axis calibration factor OCO unter over trigger counter gt Information about the Data TSOurce indicates the source of the trigger that initiated the mass spectrum scan EXTernal External trigger FPA Front Panel trigger CSINgle Command line single trigger CCONtinuous Command line continuous trigger OSCan Old Scan mass spectrum data is old Mass axis calibration factor Calibration factor in kHz over trigger counter Number of over triggers detected MEASurement TSETtings VALues emission current gt lt filament bias voltage filament power gt lt DDS amplitude gt lt repeller voltage gt lt entry plate voltage gt lt cups voltage transition voltage gt lt exit plate volt age gt lt electron multiplier shield voltage gt lt electron multiplier voltage gt lt electron multiplier electrometer gain gt lt pressure plate voltage gt Contains information about all of the lon Trap Settings All values are reported in the format SD DDDDESDD where S is either or and D is a number within 0 9 MEASurement ETPRessure DATE 2010 01 03 TIME 16 04 14 000 UNITs TORR BAR PAL VALues lt total pressure measurement gt lt ETPR status gt lt 32 bit value representing 390 status gt Contains information about the total pressure if available DATE and TIME timestamp of when the total pressure
40. Torr The MS Gauge can be mounted in any orientation The MS Gauge must be located in a position close to where the partial pressures are to be measured The MS Gauge must be distanced or shielded from all other instruments that could potentially affect the mass spectrometry readings The MS Gauge must be protected from evaporation sources that could provide line of sight contamination into the gauge Allow enough clearance for the MS Gauge Controller interconnect cable connector Allow enough thermal clearance for 1 a heater jacket to be mounted on the MS Gauge and 2 the heat generated during operation to be dissipated The location of the MS Gauge relative to the VOM Controller must be compatible with the available interconnect cable length To obtain accurate total and ratiometric partial pressure measurements from a common gas environment connect the MS Gauge and the ionization gauge responsible for simultaneous total pressure readings in close proximity to each other and without vacuum conductance restrictions between them 3 4 4 Mounting Procedure I Determine the best placement for the MS Gauge following both the Installation and Operational Requirements Install the optional Tee Flange adapter for the Micro lon Gauge TPMK on the vacuum port if required Mount the MS Gauge on one of the vacuum ports of the Tee flange and mount the Micro lon Gauge on the other port Series 830 Vacuum Quality Monitor Instruction Manu
41. Trigger Timing Diagram External Trigger with no USB Data The externally triggered timing diagram can be broken down further into three sections Start Scan T1 3 5 ms The start of the scan is triggered by an external pulse through the Trigger IN connector on the front panel Before the actual Analog OUT MS Scan is triggered a number of tasks must be completed During this time data interrupts are detected the segments for the DDS MS scan are initialized all timers are configured the DIF header is setup possibly the most time consuming with all measurements including any Analog IN and External Total Pressure data and the actual RF scan is triggered and time stamped The time stamp is inserted into the DIF header NOTE The Analog IN and External Total Pressure data is asynchronous with respect to this timing diagram The data retrieved for the DIF header is the most recent data the VOM System has received Series 830 Vacuum Quality Monitor 93 Instruction Manual 830231 Rev F 94 5 VQM Controller Overview T1 T2 80 ms The RF sweep takes place during this time and an output trigger pulse frames the frequency sweep The output trigger pulse is coincident with the RF sweep and is available at the Trigger OUT connector on the front panel marked by a low to high transition TTL pulse The output of the electrometer is also ported to the Analog OUT connector during this time The data collected from the Analog OUT during the f
42. Vpp ejection threshold 3 mass range 4 mass spectrum baseline offset levels and 5 presence of ba and superharmonics in the spectra The exit plate voltage should be adjusted when 1 Superharmonic peaks appear in the mass spectra See Superharmonics on page 128 2 The pressure gets close to the 1x10 Torr upper pressure limit typically gt 3x10 6 Torr Increasing the exit plate voltage also increases the RF V ejection threshold for ions Since superharmonic peaks have higher ejection thresholds than fundamental peaks increasing the exit plate voltage is an excellent way to eliminate superharmonic peaks from the spectra lon peak intensities drop as the exit plate voltage is increased and superharmonic peaks drop out of the spectra as the exit plate voltage is increased In general the RF Amp peak to Peak values must be increased to restore peak height though usually at the expense of resolution and some recurrence of superharmonics A mass axis Calibration is required after the exit plate voltage is modified See the Initial Operation Procedure in Chapter 8 The electron multiplier shield plate bias voltage must be optimized each time the exit plate bias is modified See Section 6 9 6 An increase in exit plate voltage is required to minimize the amplitude of the baseline offset signal as the pressure in the system increases This is generally followed by a small increase in the RF Vp values to restore peak amplitudes In general
43. a filament wire is powered in a vacuum system If the contaminant levels are high the sudden burst of gas can lead to premature degradation of the electron multiplier gain response The purpose of the Filament Outgassing procedure is to turn ON the MS Gauge with full emission current and repeller control but with the electron multiplier biased at a voltage setting at which it cannot be compromised by the sudden release of contaminants from the filament assembly The electron multiplier bias voltage is set to 750V before the MS Gauge is turned ON At this electron multiplier bias voltage setting 1 the electron multiplier exhibits no detectable gain 2 is unaffected by the sudden release of contaminants from the filament assembly and 3 full adjustment range is still available for the Repeller electrode The Filament Outgassing procedure is recommended 1 The first time the MS Gauge is turned ON after initial installation 2 After long periods of storage inside plastic containers 3 Every time a Filament Assembly replacement procedure is completed NOTE The filament outgassing procedure requires modification of the Electron Multiplier Bias Voltage setting A Host PC and the VOM Viewer software provide the easiest access to all VOM Controller Settings Alternatively the Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation electron multiplier voltage can be modified using
44. a standard communication program such as Hyperterminal Section 9 17 or voltage setting commands Section 9 16 NOTE Sudden gas releases might cause overpressure conditions the very first time the MS Gauge is turned on Repeat the turn on procedure a couple of times if necessary Consult the factory if the gauge fails to turn on after a third Mass Spec power cycle 8 3 2 2 Procedure 1 Pump down the vacuum chamber to lt 1x10 Torr Install the VQM Viewer Software in your Host PC See Software Installation in Chapter 4 Turn ON the VQM Controller but do Not turn ON the MS Gauge at this time Connect the VQM Controller Unit to the Host PC using a compatible USB interface cable Launch the VQM Viewer Software Connect the VQM Viewer Software to the VQM System but do not turn ON the MS Gauge at this time Qv Eni EA coco 7 Access the Tune panel of the VOM Viewer Software Advanced Display Advanced Tuning Display Mode Raw nA 8 Restore the VQM Controller to default settings by clicking on the Restore Factory Setting button 9 Set the EM Bias voltage to 750V 10 Turn ON the MS Gauge 1 Press the Mass Spec Button on the front panel of the Controller or 2 click the Mass Spec icon on the Viewer Software control bar The MS Gauge will turn ON with full emission current but with a reduced electron multiplier bias voltage which does not provide observable peaks in the mass spectra 11 Allow the MS Gauge to operate for 2 h
45. about the mass spectrum DATE and TIME timestamp of when mass spectrum scan was initiated buffer overwrite counter 16 bit integer indicating how many mass spectrum scans were not transferred to the host This counter rolls over to 0 when it reaches its maximum value mass spec data Array of 16 bit Little Endian ADC counts representing voltage readings from the electrometer This data is in binary and needs to be manipulated to determine the actual ADC counts The ADC counts need to be correlated with the correct frequency and AMU with the mass calibration factor to interpret the mass spectrum correctly CR Example DIF lt LF gt VERSion 1999 0 lt LF gt IDENtify DATE 2010 02 05 TIME 14 22 29 585 UUT ID 830P0000 DESign 0A 01 001 00782 lt LF gt IOSTatus VALues 007 0000253948 lt LF gt REGisters VALues 098 129 00000 00000 00000 00000 lt LF gt ERRors COUNt 00 lt LF gt DIMension FREQuency TYPE IMPLicit UNITS HZ lt LF gt DIMension AMPLitude TYPE EXPLicit UNITS lt LF gt DATA TSOurce OSCan CVALue 6 3100E 02 OCOunter 00000 MEASure ment TSETtings VALues 7 0000E 05 2 9993E 01 1 9915E 00 5 0000 01 2 4983E 01 1 3001E 02 2 3049E 01 7 4995E 02 1 2503E 02 1 2701E 02 1 0501E 03 4 5887E 08 7 4 848E 01 MEASurement ETPRessure DATE 2010 02 05 TIME 14 22 29 564 UNITS TORR VALues 4 45E 08 0000000025 0000000000 MEASurement ESIGnal DATE 2010 02 05 TIME
46. aen tl a tags 134 7 42 Temperature Range oec bom sate od Re PE 134 7 4 3 Humidity Range sut Lh Ret rea a d a ERST d hase re Roe 135 7 44 Narmeup Periods one nee ie eb Rem ep eae oe Le dados ord e a 135 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Table of Contents 7 5 7 6 Chapter 8 8 1 8 2 8 3 8 4 Electron Multiplier Detectot ovina oe ve aoii iae bee id se E R 135 A o o ie Ree aa ete a aa I Ty MN Ca ERAS eia 135 Taa Best Know Practices s e EEEE oa ele A E E 135 753 Operating Pese cit A BE aD EAA RANTA KERA E aS EENS 136 7 34 Operating Temperature mii cee ee dae bb eye eb ey ese be e Rep 136 755 Bakeout Temperat rez us is esie sev rp ES ea et Lea a adi d n ei CR d a 136 756 Operating Voltage ses ereer res PERE EENE EEEE emere eeepc e RA ree ee 137 SY A cete tud he age ete usable Rutas usas fa datus 137 7 5 8 Initial Operation viii e ere eem et pee C me Shere ae e Re e ice ERN 138 7 59 Gam Adjustments iine eee Uere dida Ted aeo leot s 138 Eilameut Assembly 5 rete AA EORNM A A UO ERE UR Ig 139 7 6 L Introduction c ze Er D e P dd edd SSR AA RU CAU Ce in es 139 7 6 2 Filament Assembly Replacement leesseeeeeeeeee teen e eee e es 140 7 6 3 Repeller Voltage Optimization sese 144 7 6 4 Filament Operation 5s s rep eee PR ne A E D ERE tre E YR eee 144 Viewer Software amp Initial Operation 0 ccc eee enn 145 VQM Viewer Application Software for the VQM S
47. analog out signal This Operational Mode supports Manual ion trap control Manual scan control MS Analog out signal data acquisition storage and real time display 5 12 4 Stand Alone Setup with External Pulses This setup builds on the previous one and adds the ability to perform external trigger scan control using external trigger sources This mode provides access to manual and external trigger MS scan control While this mode of operation does not require a Host PC to perform MS scans it does allow synchronization with external trigger pulses originating from the same setup 830 VQM System Stand Alone Mode w External Trigger Pulses Optional GP 390 TPMK Series 830 Micro lon Gauge for VQM Controller Total Pressure Measurement DB 15 Cable Analog OUT H re zc Analog IN Vacuum Trigger OUT gt Chamber Trigger IN 7 External USB Trigger Pulses Oscilloscope or Data Channel1 Trigger Recorder Logger Figure 5 14 Basic System Stand Alone with External Trigger Pulses Use Case 4 In this configuration 1 The MS Gauge is mounted on the vacuum system 2 The interconnect cable connects the MS Gauge to the VOM Controller Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 89 90 5 VQM Controller Overview 3 No Host PC is connected to the VQM Controller 1 no USB link is enabled 2 no MS data is transmitted out of the USB po
48. and provides focusing of the electron beam as required to clear the entrance slit The ionization energy of the electrons is calculated as the difference between the entry plate and the filament bias voltage 100 eV factory default Changes in the electron energy can be affected by changing either one or both of those voltages and will generally have significant impact on the output of the gauge Series 830 Vacuum Quality Monitor 111 Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge The electron current 0 070 mA factory default is generated by thermionic emission from a single filament The electron emission current is user adjustable In general currents higher than the factory default value might be required at UHV levels total pressure lt 1x10 9 Torr and current settings lower than factory default might be desirable at pressures gt 1x10 Torr The repeller voltage must be optimized each time the electron emission current is changed in the ionizer The electron emission current is regulated by a tight feedback control loop which dynamically adjusts the temperature of the filament to control the thermionic emission of electrons The filament is made of air resistant Yttria coated Iridium wire which operates at low temperature and can be over pressured in air without the risk of immediate burnout The filament and the repeller are part of a field replaceable assembly Once the filament wears out the assembly ca
49. and ratiometric gas compositional analysis e Auxiliary analog voltage signals connected to the Analog IN signal port can be digitized synchronously with MS data acquisition 830 VQM System Standard Setup Series 830 VQM Controller c Optional GP 390 TPMK Micro lon Gauge for Total Pressure Measurement DB 15 Cable Analog OUT y Analog IN 7 H pu Am cae _ 830 MS Gauge Cable 1 meter long Trigger OUT J Trigger IN Vacuum Chamber USB eries 8330 MS Gauge PC with Windows fl amp the VQM Viewer f Application Software USB Link wem uuu m ec m fa Oscilloscope or Data Channel 1 Recorder Logger Trigger Figure 5 11 Basic System Standard Setup Use Case 1 This Operational Mode supports l SO Or ues er a 8 Manual MS Gauge control Host PC MS Gauge control Manual MS scan control Host PC scan control MS analog out signal data acquisition storage and real time display External total pressure data acquisition and display optional TPMK required Host PC full MS data acquisition and display Analog input signal digitization Comments Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview The Trigger Out port and the Analog Out port are enabled by factory default The External Trigger In port is disabled when manual Scan Start is exe
50. be changed but the user can configure which gas appears on which line Norm Absolute a 3 1000 369 75089 A a 9 10 600 222 SES a 20 0 531 196 3 9869 8 A a is 0 454 168 34069 A ak 10 123 4 56 92510 A a 5 fF A N amp a af Figure 8 22 Results Table Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 173 174 8 Viewer Software amp Initial Operation 8 5 1 1 Gas Mass Selector The Results Table can be configured to display either fitted gases or masses If you configure it for gases masses will still appear on the table but they represent residual masses after gases are fit In other words if you have a Water fit you might still see 18 amu but the value displayed for it will be much less than the value displayed for 18 in mass mode Select between the modes by pressing either the Gas or Mass buttons on top of the first column of the table 8 5 1 2 Locks Along the left side of the Results Table are 10 Locks When a gas or mass is not locked the line updates based on the prevalence of the gas or mass If you click on the lock the line s background will turn green and the line s gas or mass is now locked onto the table That is even if the gas or mass is not one of the 10 most prevalent it will appear on the table and on the Trend Graph Locked gases and masses appear at the top of the Results Table The remaining positions w
51. be replaced in the field without a need to return the MS Gauge to the factory The filament is part of a filament assembly that 1 assures proper alignment of the wire with the entry plate slit 2 protects its coating from mechanical damage during shipment and installation and 3 provides a repeller plate with an adjustable bias to optimize the focusing of electrons through the entry slit NOTE Even though the delicate filament coating is protected users must still be extremely careful while handling the filament assembly and strictly follow all instructions and warnings Filament assemblies are manufactured following strict high vacuum practices and outgassed in a dedicated test station prior to shipment Thermal pre treatment of the filament assemblies hardens the Yttria coating on the filament wire and minimizes the initial release of contaminants into the vacuum system the first time the filament is powered up Filament replacement is a fairly simple procedure that is described in the following section Once filament replacement is completed the user should perform the Initial Pumpdown and Filament Outgassing and Repeller Volage Optimization procedures are described in the Initial Operation Procedure in Chapter 8 Repeller Voltage Optimization completes the replacement process and corrects against slight variations in filament to slit alignment that might take place between filament assemblies Series 830 Vacuum Quality Monitor Instruc
52. bias voltage are only required if 1 the electron multiplier bias voltage changes or 2 the exit plate bias voltage changes To optimize the electron multiplier shield bias voltage start with a plate bias voltage value about 5 Volts higher than the exit plate bias and decrease the bias voltage in 1 V increments until maximum peak amplitude is achieved throughout the mass spectrum Since the electron multiplier shield plate is located outside the mass separator s electrode structure no detectable shift takes place in the position of the mass spectrometer peaks once this adjustment is performed Mass Axis calibration would not be required 6 9 7 Filament Bias V2 in Figure 6 16 The filament bias is the electrical potential of the filament wire and sets the initial potential energy of the ionizing electrons The filament is part of the electron acceleration structure for the ionizer The electron energy in the ionizer is defined as Electron Energy eV Entry Plate Bias minus Filament Bias In general changes in electron energy are achieved by changing the filament bias while keeping the entry plate bias at a constant value The repeller bias must be optimized each time the filament bias is modified Since the filament is located outside the mass separator s electrode structure changes in the Filament Bias do not have a detectable impact on the position of the mass spectrometer peaks The filament bias relative to the vacuum system s wall
53. contains all the necessary voltage supplies required to independently bias each ion trap component and a programmable RF supply to deliver the frequency chirp required for autoresonant ejection of ions All ion trap settings are user adjustable through the Tune Settings of the VQM Viewer Software and through the VOM Command Set Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge Table 6 3 lon Trap Mass Separator Default Values lon Trap Setting zie a Comments Entry Plate Bias V 30 Electron energy eV Entry Plate Bias Filament Bias Default 100eV Pressure Plate Bias V 75 Both pressure plates are electrically connected and biased thru a single feed through pin capacitively coupled from the transition plate into the Cups The coupling capacitors are located inside the gauge connector of the Controller to Gauge interconnect cable Cups Bias V 27 RF Both Cups are electrically connected and DC biased through a single pin RF is also Transition Voltage V 625 RF The transition plate is negatively biased High Voltage A coupling transformer located inside the gauge connector of the Controller to Gauge interconnect cable AC couples RF into the plate for parametric autoresonant energy pumping Exit Plate Bias Voltage V 125 The exit plate bias voltage is typically set a few Volts lower than the entry plate voltage RF Amp Voltage V 0 5 The RF
54. data in the buffer is transmitted a timeout applies The SCAN Button LED illuminates as soon as the MASS SPEC Button is pressed on the front panel and voltages start to be applied to the MS Gauge electrodes Allow a minimum of 20 seconds before starting to scan to make sure the bias voltages are properly established on the electrodes i e accurate mass axis calibration and up to 60 minutes for the electron multiplier detector and filament assembly to completely warm up See Warm up Periods Section 7 4 4 If the SCAN button is illuminated the VQM Controller is ready to scan and will respond to MS Scan requests from any control mode There is no special hierarchy To interrupt a scan in the middle of its mass range press the MASS SPEC button on the front panel turn OFF the MS Gauge through a command or simply turn OFF the unit 5 11 1 Manual Scan Control Manual scanning is performed in the continuous mode of operation The external trigger IN port is automatically disabled when the SCAN button is pressed to execute manual scanning 1 With power ON and the SCAN button enabled SCAN button LED illuminated Green press the SCAN button to execute continuous scans 2 Press the SCAN button to STOP continuous scanning 5 11 2 External Trigger Scan Control Triggered scanning performs one full scan each time a signal pulse is received at the trigger IN port of the VQM Controller See Section 5 5 1 If a valid USB link is available the VQM
55. display as green 8 5 8 Leak Trend Graph The Leak Trend Graph is a 5 minute trend of the Average Partial Pressure of the selected Leak Mass See Mass Select above The Leak Trend Graph and its associated controls do not work unless Total Pressure is available 178 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation Log Scale Y CLEAR AUTOSCALE Pressure 1 000E 9 1 000E 10 Lu L 1 1 y D 10 12 09 10 12 55 10 13 20 10 13 45 10 14 10 10 14 35 10 15 00 10 15 25 10 15 50 10 16 15 10 16 40 10 17 07 Time Figure 8 30 Leak Trend Graph e CLEAR Use the CLEAR control to erase Leak Graph history e AUTOSCALE Use AUTOSCALE to set the graph y axis to show the leak limit and the current average partial pressure values of the selected leak mass Log Scale Linear Scale Select between a Log and Linear scale for the Y axis The default is Log Scale e Y Zoom via Mouse You can zoom in on the Y axis by clicking and holding the left mouse button dragging through the desired Y range and then releasing the button e Y Zoom via axis modification The user may select and edit the text for the upper or lower Y axis legend to identify the Y axis zoom factor This method allows zooming out as well as in 8 5 9 Mass Spectrum Library The Mass Spectrum Library is available only on the Settings Screen It can be used to display a mass spectrum for ex
56. exposed to an air environment for long periods of time i e longer than 3 months will experience irreversible detector degradation The gain medium of the electron multiplier internal channel s relies on the presence of a reduced lead oxide glass layer that will degrade irreversibly when exposed to oxidizing agents such as oxygen and water The output signal levels of the electron multiplier will degrade over time and will require operating the detector at higher bias voltages to achieve nominal output signal levels Contamination buildup during storage due to plasticizer outgassing from storage containers will require an extensive pumpdown and bakeout to eliminate background hydrocarbon contributions to mass spectra See the Bakeout Procedure procedure below 7 3 Bakeout Procedure Bakeout of the MS Gauge is recommended in the following cases e After first installation of the MS Gauge into a vacuum chamber e After prolonged exposure of the mass spectrometer gauge to open air e When background contamination is evident in the mass spectra When performance degradation due to contamination is evident Every time a new component or instrument is introduced into a vacuum system or the vacuum chamber is vented to air outgassing of molecules mostly water from the walls will determine the time it takes the pumping system to achieve its targeted base pressure A vacuum system bakeout expedites the outgassing of molecules from chamber walls and
57. for a variety of purposes 1 Display store and graph total pressure on the Host PC screen along with the ratiometric mass spectral data provided by the MS Gauge 2 Combine ionization gauge total pressure data with ratiometric gas analysis information to provide absolute partial pressure measurements 3 Provide overpressure protection for the MS Gauge An analog input port on the front panel of the VOM Controller enables users to digitize analog voltage signals in synchronicity with mass spectral scans Each mass spectrum transmitted to a Host PC contains 1 mass spectral data 2 total pressure measurement when using the optional TPMK and 3 analog input voltage signal The combination of the three sources of data can be used to derive vacuum quality measurement information from the VOM System The front panel of the VOM Controller includes 6 LED indicators 3 buttons with LED indicators 4 BNC connectors and one USB connector See Figure 5 2 and Figure 5 3 The active LEDs on the front panel of the controller provide real time feedback on 1 MS Gauge status 2 trigger and analog port status and 3 system error status conditions The buttons on the front panel allow activation and operation of the MS Gauge continuous scan mode and VOM Controller without the need for a Host PC connection manual SCAN start stop The rear panel of the VOM Controller includes three connectors MASS SPEC for the MS Gauge TOTAL PRESSURE fo
58. increase as the electron Multiplier Bias Voltage becomes more negative However any gain increase in the electron multiplier occurs at the expense of electron multiplier lifetime and gain stability As in all mass spectrometry applications relying on electron multiplier detectors the user must carefully weigh the interplay between signal amplitude and detector lifetime while optimizing the mass spectrometer gauge detector Adjustments to the electron multiplier bias are recommended 1 When gain losses due to aging or contamination severely impact the dynamic range of the device 2 When higher signal dynamic range is necessary to improve the detection limits of the sensor When operation of the repeller is required without electron multiplier gain i e set Electron Multiplier Bias to 750V 4 When the electron multiplier is replaced with a new one The VQM MS Gauge electron multipliers provide their best compromise between gain and long term performance when the peak amplitudes in the mass spectra remain below 60 nA For a new electron multiplier this typically represents an electron multiplier bias voltage between 900 and 1000 Volts To adjust the gain of an electron multiplier see the Initial Operation Procedure in Chapter 8 Series 830 Vacuum Quality Monitor 127 Instruction Manual 830231 Rev F 128 6 lon Trap Mass Spectrometer Gauge 6 9 11 Filament Emission The filament emission current is a critical adjustment f
59. ion peak signal amplitudes in a mass spectrum should not be expected to scale with the absolute partial pressures of the gas components in the mixture Figure 6 11 shows an example of the charge density saturation effects that occur in Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge the ion trap The front trace Red corresponds to a spectrum of nitrogen enriched air at a pressure of 3 5x107 Torr The rear trace Blue corresponds to a spectrum obtained for the same air sample but with an additional 4x10 7 Torr of Argon added to the gas mixture The two gases are detected in proper ratios i e native ratiometric data but the addition of argon ions to the trap volume displace nitrogen and oxygen ions from the confined beam in order to keep the ion density at the same total level As a result of this charge saturation effect quantitative operation of the MS Gauge requires knowledge of the absolute total pressure in the system to normalize the native ratiometric information provided by the mass spectrum and to provide absolute partial pressure readings An optional Total Pressure Measurement Kit TPMK is available as part of the VQM System which provides ionization gauge based total pressure readings in synchronicity with MS scans 6 5 Construction Materials The Mass Spectrometer gauge is mostly constructed out of stainless steel 304 and high purity alumina and mounts directly onto a 2
60. locate the Brooks Automation office nearest you 10 2 Damage Requiring Service Disconnect this product from the power source and refer servicing to Qualified Service Personnel if any the following conditions exist The gauge cable power supply cord or connector is damaged Liquid has been spilled onto or objects have fallen into the product The product does not operate normally even if you have followed the Operation Instructions Adjust only those controls that are covered in this instruction manual The product has been dropped or the enclosure has been damaged Replacement Parts When replacement parts are required be certain to use the replacement parts that are specified by Brooks Automation Granville Phillips or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 213 214 10 Service amp Maintenance Safety Check Upon completion of any service or repairs to this product ask the NM Qualified Service Person to perform safety checks to assure that the product is in safe operating order 10 3 Troubleshooting The service and repair information in this manual is for the use of Qualified VA Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you a
61. lug on a flange bolt if necessary 3 4 1 Introduction The Mass Spectrometer Gauge MS Gauge connects to a high vacuum system and is designed to operate at gas pressures between UHV and 10 5 Torr The MS Gauge is available in two different configurations nude and demountable envelope Figure 3 1 illustrates a Nude MS Gauge mounted in a demountable envelope nipple 1 40 Dia 830 VQM Nude Gauge Gauge Structure Catalog 801100 NYG 1 50 Dia Cable Connector 2 75 Dia NW35CF Conflat Flange 0 265 Dia 6 Holes Demountable Nipple for Nude Gauge with 2 75 NW35CF Flange on each end Catalog 801270 Q Og 20 Cable O 3 O Connector 5 4 O Connector Flange Bolt Pins Mount Bolt 6 Places 1 4 28 Bolts and Nut Plates Tightening Pattern 2 75 inch NW35CF ConFlat Fitting Figure 3 3 VQM Mass Spectrometer Gauge and Connector Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 Hardware Installation 3 4 2 Installation Requirements For best results locate the MS Gauge close to the point where gas composition needs to be analyzed Gas sources long tubulation and other constrictions can cause large errors in indication Note that if placed near a pump the pressure in the gauge may be considerably lower than in the rest of the system If placed near a gas inlet or source of contamination the pressure in the gauge may be much higher
62. on the detector side is called the exit mirror The entry compensation plate called entry plate has an off axis slit to allow the entry of electrons into the ionization region located inside the trap The exit compensation plate called the exit plate has a gridded on axis circular aperture to allow the autoresonant ejection of confined ions The central lens electrode structure called the transition plate is a flat plate with an axially located aperture and is connected to the RF signal The field replaceable filament assembly is located outside the electrostatic ion trap assembly directly above the entry plate An electron multiplier detector assembly is located at the opposite end of the ion trap directly below the exit plate and above the feed through flange The detector assembly consists of an electron multiplier shield plate a continuous dynode electron multiplier and the electron multiplier anode cup which collects the electron current signal and is connected to the Controller s electrometer input Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge Entry Cup Exit Cup xe Exit rig Plate Entry Plate Eo hacc EM O Electron Beam Confi ved lons Transition Plate Anharmonic Trapping Potential Figure 6 9 Cross Section of MS Gauge and Electrostatic Trapping Potential Well Figure 6 9 illustrates a cross section of the ion trap electrode as
63. provides the shortest possible pumpdown times A proper bakeout should include heating up both the MS Gauge and the vacuum system walls so that contaminants do not condense on cold surfaces and continue to contribute to the base pressure and background mass spectra A custom silicone jacket is available from the factory to heat the MS Gauge probe to 180 C for extended bakeouts As the MS Gauge is used deposits can slowly accumulate on the internal electrode structures of the sensor particularly around the ionization area The performance of the MS Gauge is affected by the build up of contamination The typical symptoms of contamination buildup include 1 decreased signal levels 2 decreased peak resolution 3 distorted peak shapes 4 increased baseline offset and 5 increased background gas contribution to the spectra Periodic MS Gauge bakeouts keep the sensor clean and minimize those problems The recommended bakeout procedure includes 1 Turn OFF the MS Gauge and disconnect the MS Gauge to Controller interconnect cable 2 Attach the heating jacket 180 200 C Do not exceed 200 C with any heating systems 3 Make sure the chamber pressure is below 1x10 3 Torr 4 Establish a slow flow of dry N gas scrubber gas in the vacuum chamber 1x10 5 or less 5 Bake the probe for at least 12 hours i e overnight Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 7 MS Gauge Maintenance 6 Remove the heati
64. range of the sensor The mass resolution of the device is calculated as the ratio between the particular mass M and the width of its mass peak at 50 full height R M AMsoo Mass resolution depends on a variety of ion trap and environmental settings 1 total pressure 2 RF Amp Voltage and 3 Transition Plate Voltage In general a user should expect to see the resolution R decrease as the pressure in the system increases and as the RF Amp Voltage is increased see more below The MS Gauge delivers its highest resolving power at UHV pressure levels and while operating with RF source levels close to ejection thresholds The resolution for an VQM MS Gauge operated 1 at factory default settings and 2 measured on the 28 amu peak for pure N at 2x10 Torr is typically 150 See the factory specifications in Chapter 2 The pressure range of the device is set by the ability of the trap to store and eject ions as the pressure increases The highest operational pressure for the device is presently specified as 1x10 3 Torr As the total pressure in the system increases beyond its operational sweet spot i e total pressure 2x10 Torr users should expect to see a decrease in signal levels and mass resolution and an increase in baseline offset levels and noise Advanced setting adjustments will be required to extend the range of the device into the high 10 6 Torr range Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F
65. required 1 5 Service Guidelines Some minor problems are readily corrected on site If the product requires service please contact our Customer Service Department at 303 652 4400 for troubleshooting help over the phone If a product must be returned to the factory for service request a Return Material Authorization RMA from Brooks Automation Granville Phillips Do not return products without first obtaining an RMA For vacuum gauges including the VOM lon Trap Mass Spectrometer Gauge a hazardous materials document may be required The Brooks Automation Granville Phillips Customer Service Representative will advise you regarding the required hazardous materials document and procedures When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the VOM Controller chassis must be handled using proper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility Before you return products to the factory obtain an RMA number by contacting Granville Phillips customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Phone 1 800 36
66. settings the ejection frequency for singly charged water ions at 18 011 amu corresponds to 616 kHz typically In Figure 6 10 the ejection of singly charged water ions takes place at f 571 kHz The VQM Viewer Software uses the ejection frequency for water ions to calculate the square root dependence factor K and to display calibrated mass spectra across the entire mass range Whereas the presence of strong anharmonicity in the potential trapping well is a basic prerequisite for ion excitation through autoresonance there are no strict or unique requirements or conditions to meet in terms of the exact functional form of the trapping potentials present inside the trap Tune settings in the VQM Viewer Software are available to modify the bias voltages of each electrode structure and the exact shape of the anharmonic potential well through the VQM Viewer Software as well as through the Controller s VQM Command Set Autoresonance theory provides an excellent theoretical framework to explain the basic operational principles of anharmonic electrostatic traps and the foundation for instrument design and functional optimization The principles of autoresonance 1 direct the adjustment and optimization of gauge performance and 2 predict the effects that variations in operational parameters might have on mass spectral output lon Space Charge Effects 0 50 The front trace Red corresponds to a spectrum of nitrogen enriched air at a press
67. the Filament Power Supply such that the Filament power is controlled to a certain Emission Current Bias voltage MODE Defined only for the FIL logical instrument Queries which control mode is used to control Filament power Responds with either ADJustable or FIXed VOLTage LEVel IMMediate AMPLitude lt voltage gt DEF MIN MAX Defined only for the FIL DDS REP ENTR PPL CUPS TPL EXIT EMSH and EMUL logical instruments Used to set filament bias voltage DDS amplitude and lon Trap voltages Example SOUR VOLT 130 sets the Entry Plate voltage to 130 V if the ENTR logical instrument is selected 198 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Table 9 9 Source Commands 9 830 VQM Command Set Keyword Parameter Form Comments AMPLitude MIN MAX Defined only for the FIL DDS REP ENTR PPL CUPS TPL EXIT EMSH and EMUL logical instruments Queries the voltage setpoint or the respective minimum and maximum for the selected logical instrument Response is in the format D DDDDDDESDD where D is an integer 0 9 and S is either or Example 1 300000E 02 the Entry Plate setpoint voltage is 130V assuming the ENTR logical instrument is selected POWer LEVel IMMediate AMPLitude lt power gt DEF MIN MAX Defined only for the FIL logical instrument Sets
68. the VOM Command Set A dedicated calibration command triggers a calibration of the electrometer gain against a reference current source built into the VOM Controller at any time Note the MS Gauge needs to be turned OFF The gain of the electrometer is also recalibrated during each Power ON procedure The last calibrated electrometer gain value is available through a command query and is also incorporated into the MS Scan Data Header when FETCh commands are used to collect data from the instrument The output of the electrometer ADC counts combined with the electrometer gain can then be used to calculate and display electron multiplier currents for each scan 5 8 Power Modes The VOM Controller has three different power modes of operation See Table 2 2 on page 22 for recommended power input requirements Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 78 5 VQM Controller Overview Table 5 12 Controller Power Modes Power Button the Controller and all gauge functionality and the USB port is enabled External 24 Vdc Power is available The power LED is ON The USB LED is ON and the USB link is enabled e The Trigger and Analog I O LEDs are ON Power is available to the TPMK unless the user turns the TPMK logical instrument OFF sending the appropriate command from the Host PC The EXT TP LED per user set configuration activity Pressing the Power button in this s
69. the detector Electron multipliers are extremely sensitive to certain chemical species Contamination by organic compounds and interaction with highly reactive gases must be avoided Electron multipliers have a long history of applications in mass spectrometry However to achieve maximum useful lifetime and optimal performance it is very important to handle them with extreme care See the Electron Multiplier section in the Maintenance Chapter Series 830 Vacuum Quality Monitor 117 Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge 6 9 MS Gauge Advanced User Settings The VQM System is shipped preloaded with factory default settings for all its Mass Spectrometer Gauge voltage current and calibration settings Users can operate the instrument straight out of the box without any parameter optimization being required Adjustments to the operational settings might be occasionally required to Optimize settings for a new VQM System new MS Gauge or a new electron multiplier e Optimize the performance outside the pressure range of 1x10 9 Torr to 1x10 5 Torr Optimize resolution or peak shape in specific amu ranges e Shift the mass range Mass Range adjustments e Remove superharmonic peaks or perform other spectrum improvements e Perform a specialized application leak checking isotope ratio measurements trace analysis etc Cross section of lon Trap lonizer Mass Separator Detector E Ll HA
70. the equipment into an outlet on a circuit different from that to which the receiver is connected Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 2 Introduction amp Specifications Chapter 2 Introduction amp Specifications 2 1 General Description The Vacuum Quality Monitor VQM by Granville Phillips combines the highest performance gas analysis technology with outstanding instrumentation functional design that transforms complex measurement into actionable information The VQM System is the world s fastest lowest power gas compositional analysis instrument with full data collection spectral decomposition and data logging over the full 1 135 amu measurement range The VQM System is a mass spectrometer consisting of an Autoresonant lon Trap Mass Spectrometry ART MS Gauge hereafter referred to as the MS Gauge the VQM Controller an interconnnect cable and a VQM Viewer Software application The MS Gauge mounts directly onto any standard 2 75 ConFlat port of a vacuum chamber All of its internal components reside in the vacuum space where the gas analysis measurements are performed The VQM Viewer Software application provides most of the functionality required to operate the system In addition a high level VOM Command Set along with a serial USB interface port provides full control of the VOM System from a Windows based host PC A full range total pressure measurement kit the Micro lon ATM vacuum gaug
71. this Instruction Manual 2 See Section 3 6 4 to electrically connect the Micro lon Gauge to the VOM Controller using the Micro lon Gauge VQM Controller interconnect cable 3 6 VQM Controller MS Gauge amp TPMK Connections 3 6 1 Introduction The VQM Controller is designed for benchtop mount operation The Controller connects to the Mass Spectrometer Gauge MS Gauge and the Micro lon Gauge TPMK using two individual interconnect cables This section describes the process of connecting the VQM Controller to the MS Gauge and the Micro lon Gauge 3 6 2 Connection Requirements The distance between the VQM Controller the MS Gauge and the optional TPMK must be compatible with the interconnect cable lengths available Provide adequate ventilation for the VQM Controller to dissipate up to 75 Watts The VQM Controller should be mounted in a location with unrestricted air flow and ambient temperature less than 40 9C 104 F Do not mount the VQM Controller above other equipment that generates excessive heat Do not locate the VOM Controller where it will be exposed to corrosive gases such as mercury vapor or fluorine Do not locate the controller in areas where liquid spills are possible Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 35 3 Hardware Installation 3 6 3 MS Gauge Connection Procedure NOTE The VQM Controller should be mounted in a location with adequate air flow and ambient temperatur
72. to a 24 Vdc power supply and automatically reinstates the same power mode when a power connection is re established 2 The Power LED will illuminate but will turn OFF after a few seconds if the most recent power mode was Standby 3 Assoon as the Power button is pressed the user settings are transferred from NV RAM into Controller memory memory check is invoked as well and the electrometer gain is set and calibrated If the Power Mode ON 24 Vdc is applied to the TOTAL PRESSURE port to activate a TPMK that may be connected to the VOM Controller and the Power ON Self Test POST procedure is activated The Power button Green LED blinks until POST is completed When the self diagnostic procedure is complete 13 seconds the Analog I O Trigger I O and Power Button LEDs turn ON 4 Once POST is completed the Controller tries to establish a valid RS 485 connection with a TPMK If communication with a TPMK is successfully established the EXT TP LED blinks repeatedly to indicate the presence of active communication with the Micro lon Gauge i e Autopressure Mode ON Filament overpressure protection is available as long as a Autopressure Mode ON If no TPMK is found power is removed from the TOTAL PRESSURE port until the next Power ON sequence or until the ETPR Logical instrument is reactivated through the command interface 5 n addition to the POST procedure the VOM Controller also looks for a valid MS Gauge connection by detecting the prese
73. ui Sa Electron J Multiplier ye Electrometer Figure 6 16 lon Trap Voltages The VQM Controller is shipped with a copy of the factory default operational parameters stored in its User Settings i e NV RAM Each time the VQM System is turned ON the User Settings are transferred into volatile memory locations and used to control the instrument The Controller operational parameters are stored in volatile memory used to control the mass spectrometer gauge and can be changed adjusted at any time using 1 the Tune Settings panel of the VQM Viewer Software or 2 the VQM Controller s comprehensive VQM Command Set New operational Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge parameters become effective immediately and can also replace the User Settings when flashed into NV RAM i e Flash user settings to NV RAM in the VQM Viewer Software An extra copy of the factory default settings is always available in the non volatile memory and can be used to restore factory default values for the operational parameters i e Restore Factory Settings in the VQM Viewer Software NOTE Flashing operational parameters into the NV RAM User Settings requires turning OFF the power momentarily to the Mass Spectrometer Gauge Table 6 5 summarizes the Operational Parameters available to the user Figure 6 16 shows the corresponding Mass Spectrometer Gauge connections for the VQM
74. will provide pressure and status information at a deterministic 50 msec update rate Pressure update rates will typically oscillate between 50 and 150 msec A communication failure between the VOM Controller and the TPMK is only assumed if pressure and status data fail to be received by the VOM Controller for a period longer than 150 msec The VOM Controller receives both pressure and status information from the Micro lon Gauge during Autopressure Mode ON but does not use the Status information to drive front panel warnings or errors or to interrupt the Autopressure mode Warnings from the Micro lon Gauge are not displayed by the VOM Controller but are reported on the display panel of the Micro lon Gauge The Status register from the Micro lon Gauge is included into the data header when a FETCh Command is received by the VOM Controller and is also available through the command interface 5 10 2 Overpressure Protection One of the most critical functions of the Micro lon Gauge is to provide overpressure protection for the MS Gauge The MS Gauge has pressure sensitive components 1 the electron multiplier detector and 2 the filament which can be damaged if the pressure exceeds certain upper limits In addition the MS Gauge cannot provide reliable gas compositional information as the pressure in the vacuum chamber exceeds 1x10 Torr As a general rule there is no good reason to turn the MS Gauge ON if the pressure exceeds 5x10 Torr as no useful
75. with a measured value FWHM The width of a mass peak at the 50 amplitude points Gas Library The Viewer Application software has a library of 10 gases The 10 gases are Hydrogen Helium Nitrogen Oxygen Water Carbon Monoxide Argon Carbon Dioxide Krypton and Neon Selecting a particular gas in the library will display its properties if it is in the vacuum chamber Gas Measurement The relative partial pressure of one or more amu peaks For example Air could be defined as a ratiometric relationship of 78 Nitrogen amu peak 28 21 Oxygen amu peak 32 and 0 9 Argon amu peak 40 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 19 20 2 Introduction amp Specifications Table 2 1 Acronyms and Definitions Term Meaning Gauge Sensor The Mass Spec Gauge is a gas sensor device transducer mounted to the vacuum chamber that provides partial pressure readings to the Series 830 VQM Controller Gauge also indicates the Total Pressure Measurement Gauge Host PC Remote user interface being executed on a PC to the VQM Controller lon Trap A physical device that captures and stores ions based on electrostatic electrodynamic or magnetic confinement fields Most ion traps used for analytical purposes also offer the capability to mass selectively eject the stored ions ITMS lon Trap Mass Spectrometry MDPP Minimum Detectable Partial Pressure Mas
76. 0 Log Data Y Use this control to log all data in two ASCII Files Files include a header file with all status of the VQM System and a data file that contains the following logged percentages of each mass Log Data peak amu found in the system The Log Data icon will appear blue while the logging is active The base filename for the saved files is entered by the user through a pop up window The extension for the header file is Date Time Controller Time Instantaneous Total Pressure Averaging Mode Number of Averages Collected Average Total Pressure Error Count Mass Spectrum hdr The extension for the percentages file is csv The data capture times are in hours minutes and seconds Log All records data for every data fetch Enter file name in the Log File Name box and click on the browse folder icon to select or assign a location to store the file 8 Viewer Software amp Initial Operation Enter logging parametrers dj X aw HS GE Toobar options Al E Wicrosotl Excel Tog csv S Be gat View Insert Format Tools Data Window Help Adobe PIF Ur BIU SESS Sx VRE B Directory C Data Duration 00 01 00 HH MM SS Interval 00 01 MM SS 7 Log All Continue Cancel 02 139 1 00E400 Running A 02 150 1 00 00 Running A 02 16 0 1 00E400 Running A 02 17 0 1 00400 Running AY 0218 0 1 00 00 Running A 02 19 0 1 00400 Running A 0220 0 1 00 00 Run
77. 0 Windows Installation Notice Series 830 Vacuum Quality Monitor 55 Instruction Manual 830231 Rev F 56 4 Software Installation is 830 Driver 32 bit InstallShield Wizard Installing 830 Driver 32 bit The program features you selected are being installed Please wait while the InstallShield Wizard installs 830 Driver 32 bit This may take several minutes Status C Installsimeld Figure 4 21 5 Click Finish to complete the installation of the USB driver The InstallShield Wizard has successfully installed 830 Driver 32 bit Click Finish to exit the wizard Figure 4 22 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 5 VQM Controller Overview 5 1 Introduction This chapter describes the basic components and functionality of the VQM Controller The Series Vacuum Quality Monitor VQM System is a gas analysis instrument based on Autoresonant lon Trap Mass Spectrometry ART MS technology that generates mass spectrometry MS scans between 1 and 135 amu in lt 100 msec The basic VQM System includes 1 VQM Controller 2 lon Trap Mass Spectrometer Gauge MS Gauge 3 Controller to MS Gauge interconnect cable and 4 Viewer Software a Es VQM Mass Spec Controller Interconnect Cable VQM Quick Installation Optional Series 390802 and MS Gauge Controller to MS Gauge and Startup Guide Micro lon ATM Gauge TPMK Figure 5 1 VOM System C
78. 11 17 2010 2 37 PM 11 17 2010 2 37 PM Figure 4 2 Files on the Installation CD 4 Simply follow the prompts to install all of the necessary software components The InstallShield Wizard will install the necessary Windows drivers and then the VOM Viewer Application software If Windows Installer 4 5 is already on your computer you will not see the screens illustrated in Figures 4 3 and 4 4 830 Viewer Software InstallShield Wizard i 830 Viewer Software requires the following items to be installed on your computer Click Install to begin installing these requirements Pending Windows Installer 4 5 for Windows XP SP2 and later x86 Windows Installer 1st Screen Figure 4 3 46 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 4 Software Installation 830 Viewer Software InstallShield Wizard E SEE 830 Viewer Software requires the following items to be installed on your computer Click A Install to begin instaling these requirements arem S Status Requireme Installing Windows Installer 4 5 for Windows XP SP2 and later x86 Figure 4 4 Windows Installer 2nd Screen 830 Viewer Software InstallShield Wizard p Preparing to Install 830 Viewer Software Setup is preparing the InstallShield Wizard which will guide you through the program setup Configuring Windows Installer Figure 4 5 InstallShield Wizard Preparing to Install all Software Components Ser
79. 14 22 29 586 UNITS V VALues 0 0000E 00 CURVE DATE 1970 01 01 TIME 00 00 00 100 BOCoun ter 00000 VALues 514372 lt mass spec data gt lt LF gt NOTE mass spec data is not shown in this example for clarity CR 194 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 9 6 1 1 An Example of Little Endian 9 830 VQM Command Set Electron Multiplier Current 10 235 V 10 196 3 V 0140 o108 Mass a Controller m 4001 0BOI Electrometer The byte order is swapped when transferred to the PC Figure 9 2 Little Endian Circuit Example 9 7 INSTrument Subsystem The Instrument subsystem allows the user to select the different logical instruments that make up the VQM System Table 9 5 Instrument Commands Keyword Parameter Form Comments INSTrument SELect MSPectrometer lONizer Selects one of the following Instruments MSEParator DETector Mass Spectrometer Ionizer Mass Separator Detector ESIGnal ETPRessure DDS External Signal External Total Pressure DDS Filament FlLament REPeller Repeller Entry Plate Pressure Plate Cups Transition ENTRyplate PPLate CUPS Plate Exit Plate Electron Multiplier Shield Electron TPLate EXITplate Multiplier Electron Multiplier Electrometer EMSHield EMULtiplier Example I
80. 231 Rev F 9 830 VQM Command Set 9 13 TRIGger Subsystem The Trigger subsystem controls input triggering on the VQM Controller Table 9 11 Trigger Commands EMEL 1 8000E 00 1 9885E 00 2 2000E 00 lt LF gt REP 5 0000E 01 0 0000E 00 0 0000E 00 lt LF gt TPL 5 0000E 01 2 9184E 01 2 0000E 01 lt LF gt EMUL 5 0000E 01 4 3423E 01 2 0000E 01 lt LF gt DIO 0 ls lt LF gt AIO 0 0000E 00 0 0000E 00 0 0000E 00 lt LF gt AIO 1 3264E 00 1 3975E 00 1 4660E 00 lt LF gt FILB 1 5540E 01 1 9858E 01 2 3310E 01 lt LF gt FILB 2 4165E 01 2 9067E 01 3 6248E 01 lt CR gt Keyword Parameter Form Comments INITiate IMMediate ALL Defined only for the MSP logical instrument Immediately initiate a single mass spectrum scan CONTinuous ALL OFF ON Defined only for the MSP logical instrument Continuously initiate mass spectrum scans TRIGger OCOunter Defined only for the MSP logical instrument Returns a 16 bit number indicatingthe number of ignored triggers detected while the 830 Controller was busy performing another scan The counter rolls over to 0 if the maximum value has been reached The counter is set to O after this command is executed
81. 30231 Rev F 3 Hardware Installation 3 5 2 Installation Requirements For systems including an optional Micro lon Gauge TPMK connect the MS Gauge and the Micro lon Gauge in close proximity to each other and without conductance restrictions between them Ideally the MS Gauge and the Micro lon Gauge must be exposed to identical vacuum conditions An optional Tee Flange is available to allow connection of the Micro lon Gauge to the same port as the Mass Spectrometer Gauge Any mounting orientation may be used Allow enough clearance for the interconnect cable connector The Power button on the VQM Controller also controls power to the Micro lon Gauge If power is turned OFF to the Controller power is also turned OFF to the Micro lon Gauge Users requiring independent power control for the Micro lon Gauge need to use a different wiring setup where power is provided from an independent source The connector on the Micro lon Gauge is illustrated in Figure 3 11 3 5 3 Mounting Procedure 1 If a Granville Phillips 390802 Micro lon ATM Total Pressure Measurement Kit is bundled with your system install the gauge on your system following the instructions in Instruction Manual 390001 The Instruction Manual for the Micro lon Gauge was provided with the gauge and can also be downloaded from the Brooks Automation website For additional assistance contact Brooks Customer Support the contact information is listed in the front and the back of
82. 7 4887 within the USA 24 hours per day seven days per week Email co csr amp brooks com For Global Customer Support go to www brooks com and click on Services to locate the Brooks Automation office nearest you Series 830 Vacuum Quality Monitor 15 Instruction Manual 830231 Rev F 16 1 Safety Instructions 1 6 FCC Verification This equipment has been tested and found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense If this equipment does cause harmful interference to radio or television reception which can be determined by turning the equipment off and on the user is encouraged to try to correct the interference by one or more of the following measures Reorient or relocate the receiving antenna Increase the separation between the equipment and the receiver Connect
83. 7 MS Gauge Maintenance 6 Remove the plasma screen Be careful not to damage the plasma screen when removing it from the gauge Retaining Ring Removed Plasma Screen Removed Figure 7 4 Snap Ring and Plasma Screen Removed 7 Unlatch the filament assembly so it can be removed from the gauge Use tweezers or small needle nose pliers to rotate the latch counterclockwise See Figure 7 5 Do Not use excessive force when unlocking or locking the filament latch Filament Assembly Alignment Pin Latch Filament Assembly Latch Filament Latch Locked Closed Filament Latch Unlocked Open Figure 7 5 Filament Assembly Latch 8 Carefully lift the filament assembly from the gauge Use tweezers or small needle nose pliers Note the position of the alignment pin and center pin latch pin Also note the position of the filament which is between the two large holes See Figure 7 5 142 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 7 MS Gauge Maintenance Alignment Pin Filament NOTE The Filament Assembly is shown up side down y in this illustration Latch Pin Figure 7 6 Position of the Filament and the Alignment Pins 9 Insert the replacement filament assembly Trying to insert the replacement filament when not properly oriented will cause damage to the replacement filament a BeSURE the replacement filament assembly is oriented in the exact position as the one you just rem
84. 9 830 VQM Command Set Gauge Load Disconnected Keyword Parameter Form Comments 224 Illegal Parameter Value 232 Invalid Format Format of parameter is invalid 240 Hardware Error Internal hardware error 350 Queue Overflow Error queue overflow 101 Invalid Logical Instrument Command not valid for current logical instrument 102 Invalid Output State Logical instrument output state is invalid 103 Invalid Mode Filament mode is invalid to execute command 104 RS 485 Communication Unsuccessful 105 NV RAM Communication Unsuccessful 109 RS485 Communication Error 114 Bad CRC in NV RAM Cyclic Redundancy Check failed in the NV RAM 115 NV RAM Limit Error Illegal value in the NV RAM 116 NV RAM Load Error Unable to load value from NV RAM 200 Post Unsuccessful run TEST Power On Self Test failed Run TEST to get a full test report 300 Input Buffer Overflow USB receive buffer overflow 350 Command Queue Overflow Too many commands 800 Extreme Over Pressure Extreme over pressure detected 801 Over Pressure Over pressure detected 802 MS Gauge ON Request at Unsafe Pressure 900 Filament Burn Limit Reached Filament power greater than or equal to 4 W for more than 0 5 seconds 901 FIL Gauge Load Disconnected Filament disconnect detected 902 MS Gauge On Request with FIL Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 203 9 830 V
85. Adjust the bias voltage to compensate against gain degradation Increase the electron multiplier voltage to improve detection limits for trace gas components EM Shield EM Cup EM Clip HV EM Clip Ground EM Anode Cup amp Feed Through HV Feedthrough Figure 6 15 MS Gauge Electron Multiplier The electron multiplier detector consists of a straight single or multichannel tube made of a special resistive glass with a cone of the same material attached to the top end It is placed upright and off axis relative to the cylindrical axis of symmetry of the ion trap It is held in place by two clips that deliver the required bias voltages The top clip is connected to a high voltage feedthrough and Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge is responsible for 1 biasing the top cone i e conversion dynode to a negative high voltage and 2 providing the detector biasing current The bottom clip connects to the instrument s analog ground and provides the return path for the biasing current that flows through the detector when High Voltage bias is present Chrome electrical coatings deposited on the electron multiplier s outer surfaces provide the required electrical contact to the clips The MS Gauge must be returned to the factory repair center for replacement of the electron multiplier A small anode cup located at the exit of the multiplier and bias
86. D x 11 mm long See Controller Power Section 3 7 in Chapter 3 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 72 5 VQM Controller Overview Minimum DC power requirements are listed in Chapter 2 Section 2 4 2 Table 2 2 and depend on whether the optional Micro lon Gauge Total Pressure Measurement Kit TPMK is being used The power requirements are 24 Vdc 15 W for MS Gauge operation only and 24 Vdc 75 W when using the additional TPMK NOTE Under most circumstances MS Gauge only operation i e without a TPMK requires as little as 7 5 W to operate However a 15 W minimum requirement is listed under the connector to allow for enough power headroom in case the power supply being used becomes deregulated by operation at the high operating temperature limit of the instrument 5 6 4 Grounding Lug Use the grounding Lug on the rear panel of the VQM Controller to properly ground the system Follow the Grounding Requirements instructions in Chapter 3 Section 3 8 1 NOTE A 14 AWG ground wire green and yellow is provided with the VOM Controller which MUST be used to connect the VQM Controller chassis to an Earth ground Figure 5 7 Ground Connection on the Rear of the VQM Controller 5 7 MS Gauge Ion Trap Power Supply Settings The VQM Controller is a densely packed box of electronics which includes several regulated power supplies in a single electronics board design During normal operat
87. Granville Phillips Series 830 Vacuum Quality Monitor GRANVILLE PHILLIPS Instruction Manual Instruction manual part number 830231 Revision F March 2013 Brooks e 830 Vay TOTAL y PRESSURE S8 v s PTS ANALOG or EC IN OU 2 830 VOM x TOTAL USB PRESSURE 0 7 TRIGGER ANALOG 10 3 gt SR OS GRANVILLE PHILLIPS 24V 75W ARAN 15W EX X Granville Phillips Series 830 Vacuum Quality Monitor This Instruction Manual is for use with all Series 830 Vacuum Quality Monitors A list of applicable catalog numbers is provided on the following page GRANVILLE PHILLIPS Customer Service Support For customer service within USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Granville Phillips 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email co csr brooks com Brooks Automation Inc 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 41 978 262 2400 For customer service 24 hours per day 7 days per week every day of the year including holidays within the USA Phone 1 800 367 4887 www brooks com www brooks com vqm Instruction Manual O 2010 2013 Brooks Automation Inc All rights reserved Granville Phillips VOM and Micro lon are registered trademarks of Brooks Automation Inc VQI Vacuum Quality Index and Vacuum Quality Monitor are tra
88. In port then overpressure protection can also be executed through the Host PC viewer controls See Chapter 8 Principles of Operation for additional details 5 11 Mass Spectrometry Scan Control The VQM Controller provides three distinct Mass Spectrometry MS Scan control options Series 830 Vacuum Quality Monitor 83 Instruction Manual 830231 Rev F 84 5 VQM Controller Overview Scans can be performed 1 by pressing the SCAN button on the front panel of the VQM Controller Manual Scan or 2 using external trigger input signals pulses to initiate scans External Trigger Scan or 3 using Host PC commands to trigger commands and gather the MS scan data Remote Scan Events During MS Scanning e The SCAN button LED blinks OFF every time an MS Scan is executed The Trigger OUT LED blinks OFF every time an MS Scan is executed This indicates that a Trigger OUT time framing pulse is available for each scan e The Analog OUT LED blinks OFF every time an MS Scan is executed This indicates that fresh MS analog OUT signal is available for each scan e Scans are executed back to back with minimal delay in between See the Timing Diagrams in Section 5 13 A timeout between scans provides a wait period until all of the data in the buffer is transmitted to the Host PC while scanning Thus it is not required to overwrite the buffer each time the data is not transmitted fast enough Instead a new scan is not triggered until all of the
89. Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation 8 3 Initial Operation Procedure The following sections describe the recommended actions to optimize the VQM System during an initial installation Some of the actions must be repeated after maintenance procedures or when the MS Gauge ion trap is operated away from factory default settings The filament assembly and the electron multiplier are the two most sensitive components of the MS Gauge and both must be protected from 1 overpressure conditions 2 reactive corrosive gas loads 3 contamination sources and 4 overpowering conditions To assure optimal performance and long term stability for both components it is very important to perform the procedures described in the following sections after the Hardware Installation activity described in Chapter 3 is completed The Electron Multiplier must be regarded as a consumable item that will eventually need to be replaced it suffers irreversible gain degradation over time The lifetime of an electron multiplier will vary depending on 1 the user s specific application and 2 adherence to Best Known Practices see Section 7 5 2 described in the Electron Multiplier section of the MS Gauge Maintenance Chapter The VQM Controller electrometer has an input current range of 60 nA under factory default settings The output of the MS Gauge detector must be optimized so that peak amplitudes do not exceed the input ran
90. M Controller to Host PC Connection To use the VQM System with a Host PC and the Viewer Application connect a USB cable to the VQM Controller and the Host PC See the software installation instructions in Section 4 A Host PC can be used to control the VQM System using the Viewer Application see Chapter 8 or a custom software application and the instrument s VQM Command Set see Chapter 9 3 9 6 USB Port The USB port is a type B 2 0 full speed 12 5 Mb sec connection to interface with a Host PC e The USB cable must meet the specifications for USB 2 0 USB IF NOTE If the USB cable becomes disconnected while the VOM Controller power is ON the VOM Controller may need to be turned OFF and restarted to reestablish proper communication with the Host PC 830 VQM TOTAL PRESSURE Usa Figure 3 17 Connect the USB Cable to the VOM Controller 3 10 Initial Startup Refer to Chapter 4 and Chapter 8 for detailed instructions regarding the VQM Viewer Application installation and Initial Operation Procedures Before turning ON power to the VQM Controller make sure all components of the system are properly grounded as outlined in Section 3 8 and all electrical cables are properly connected 1 Plug in the DC power supply to the VQM Controller to an AC outlet but do NOT turn ON power to the VQM Controller at this time 2 Turn ON power to all components of the vacuum system and pump down the chamber to normal p
91. M3 J Simplicity Solutions 830 VQM COM19 E Processors 2 9 Sound video and game controllers w System devices m he Universal Serial Bus controllers 0 8 0 8 0 0 0 Figure 9 5 COM Port Descriptions in Device Manager Series 830 Vacuum Quality Monitor 207 Instruction Manual 830231 Rev F 9 830 VQM Command Set V COM19 9600baud Tera Term VT File Edit Setup Control Window Help idn Brooks Automation Inc 838 MSI 830P8804 90338 Figure 9 6 Tera Term E Termie COM19 115200 bps 8N1 no handshake idn Srooks Autcmaticn Inc 830 MSI 23070004 00330 eH J Sendiile Figure 9 7 Termie 9 17 1 Using HyperTerminal Open HyperTerminal and choose an appropriate name for the connection Select OK 208 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 9 830 VQM Command Set Connection Description wy New Connection Enter a name and choose an icon for the connection Figure 9 8 HyperTerminal New Connection Choose the COM Port representing the VQM Controller Select OK Connect To B 230 VQM Enter details for the phone number that you want to dial Country region Unded States 1 Ares code EM Figure 9 9 COM Port Selection Choose the following Port Settings Since the VQM Controller is a Virtual COM Port the Bits per second and Flow Control settings do not matter Select OK Series 830 Vacuum Quality Monitor 209 I
92. MS Gauge Table 6 5 Operational Parameters z Label Fig Min Max Default Mass Parameter Units 6 20 iV tievement Value RE Comments Filament Emission mA 0 001 mA 0 070 Electron emission current used for 1 5 mA ionization 0 001 mA Repeller Bias Volts V1 10mV 20 25 mV 025 mV Filament Bias Volts V2 10V 70V 30 Electron energy eV Entry Plate 20 mV Bias Filament Bias Entry Plate Bias Volts V3 123 153 130 X 30mV Pressure Plate Bias Volts VA 49 127 75 X 30mV Cup Bias Volts V5 15 85 20 27 X mV Transition Bias Volts V6 1000 400 685 X Potential well depth V Entry 250 mV Plate Bias Transition Plate Bias Exit Plate Bias Volts V7 68 154 125 X 30mV Electron Multiplier Volts V8 27 147 127 Shield Bias 30 mV Electron Multiplier Volts V9 1500 500 925 Bias 250 mV RF Amp Peak to Peak Volts RF 0 1 2 1 0 5 Multiply by 0 12 to obtain the mV approximate peak to peak RF Voltage signal applied to the transition plate in mV The RF amplitude has a very slight effect on mass axis calibration Figure 6 16 suggests that establishing the desired anharmonic electrostatic potential to confine ions to trajectories at natural oscillation frequencies involves designing a proper electrode structure and applying the proper bias voltages and RF signals to the electrodes Some of the operational settings i e marked with X in the Mass Axis column of Table 6 5 have a dir
93. MS Gauge Both the MASS SPEC Button LED Green and the SCAN button LED Green turn OFF since the VQM Controller is now disabled to execute MS scans Use the MASS SPEC button to turn the MS Gauge power ON OFF from the front panel of the VQM Controller This is very useful to turn the filament and electron multiplier OFF before venting the vacuum system and to turn the MS Gauge back ON directly from the front panel after a system pump down The VQM Controller is often located closer to the vacuum system than the Host PC Front panel manual control of MS Gauge power provides 1 Safety in case of sudden overpressure events 2 Access to MS Scan functionality when a Host PC is not connected or available stand alone setup 3 Warm up time savings when the MS Gauge power is enabled before the Viewer Software takes control of the instrument s operation The MS Gauge must be enabled before the SCAN button becomes enabled voltage settings stored in the VQM Controller Factory default values are used when y Total Pressure must be at or less than 5x10 5 Torr The gauge is turned ON to the the unit is turned ON allow 2 minutes after turning OFF the MS Gauge before disconnecting the cable or b l Bias voltages include high voltage and are a shock hazard To avoid shock hazard handling the MS Gauge NOTE The Mass Spec button does not affect the Micro Ion Gauge status Pressing the MASS SPEC button does not turn the
94. Micro Ion Gauge power ON OFF The MASS SPEC button illuminates with a dual color LED Green or Red indicating four possible status conditions The Red LED of the MASS SPEC button is also referred to as the System Error LED The Green LED of the MASS SPEC Button is also referred to as the MASS SPEC status LED Series 830 Vacuum Quality Monitor 63 Instruction Manual 830231 Rev F 64 5 VQM Controller Overview Table 5 4 MASS SPEC Button Power Modes LED Illumination Power Status Description OFF Power OFF The MS Gauge is turned OFF 1 There is no bias voltage on the MS Gauge electrodes 2 The electron multiplier detector is turned OFF 3 The filament emission is turned OFF 4 The MASS SPEC status LED is turned OFF 5 The SCAN Button LED is turned OFF MS Scan is disabled ON Green Power ON The MS Gauge is turned ON 1 The bias voltages are present on the ion trap electrodes 2 The electron multiplier detector is turned ON 3 The filament emission is turned ON 4 The MASS SPEC status LED is illuminated 5 The SCAN Button LED is illuminated MS Scan is enabled ON Red Power OFF No filament wire is detected by the controller unit prompting a MS Gauge MS Gauge connection error Connection Error 1 The MS Gauge is turned OFF MASS SPEC Status LED is turned OFF 2 The SCAN Button LED is turned OFF MS Scan is disabled 3 The System Error LED Red is illuminated The Controller Unit constantly checks
95. NST MSP selects the Mass Spectrometer logical EMELectrometer instrument PPElectrometer SELect Queries the name of the selected logical instrument Example EMEL the Electron Multiplier Electrometer logical instrument is selected NSELect 1 2 3 4 5 6 7 8 9 Selecta logical instrument by number 10 11 12 13 14 15 Example INST NSEL 1 selects the Mass Spectrometer logical 16 17 18 instrument NSELect Queries the number of the selected logical instrument Example 1 the Mass Spectrometer logical instrument is selected STATus Defined only for the ETPR logical instrument Queries whether the External Total Pressure instrument is connected or disconnected Replies Connected or Disconnected Example Connected A valid External Total Pressure instrument is connected Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 195 9 830 VQM Command Set 9 8 MEASure Subsystem The Measure subsystem gives high level commands to make basic measurements configuration and triggering is determined automatically by the instrument Table 9 6 Measure Commands Keyword Parameter Form Comments MEASure SCALar VOLTage DC Defined only for the following logical instruments FIL in FIXed Mode filament voltage in ADJustable Mode filament bias voltage REP ENTR PPL CUPS TPL EXIT EMSH and EMUL Measures the voltage of the currently selected logical instrum
96. QM Command Set 9 16 Simplified Programming Overview This section gives basic examples to operate the VQM Controller using the VQM Command Set 9 16 1 General Guidelines Query the error queue periodically to verify that commands executed correctly Wait at least 10 ms between commands to allow the VOM Controller to access the command Use corresponding query commands to verify that the settings in the unit actually changed 9 16 2 Bias Voltages The bias voltages of the sensor are logical instruments that perform like power supplies For example to set the voltage of the Electron Multiplier to 750 V and check the voltage to verify the setpoint changed e INST EMUL e SOUR VOLT 750 e SOUR VOLT To measure the actual voltage e MEAS VOLT 9 16 3 Emission Current The Emission Current is the current between the Filament wire and the Entry Plate To set the Emission Current to 100 pA and check the Emission Current setpoint e INST FIL e SOUR MODE ADJ e SOUR CURR 100E 6 e SOUR CURR 9 16 4 Filament Bias Voltage To set the Filament Bias voltage to 30 V and check the Filament Bias setpoint e INST FIL e SOUR MODE ADJ e SOUR VOLT 30 e SOUR VOLT To measure the actual Filament Bias Voltage e MEAS VOLT 9 16 5 Mass Spectrum To trigger a single mass spectrum scan and read the data e INST MSP e OUTP ON e MEAS ARR SPEC Or e INST MSP e OUTP ON 204 Series 830 Vacuum Quality Monitor Instruct
97. Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge factory default is generated by thermionic emission from a single Yttria coated Iridium filament which is part of a field replaceable assembly A focusing electrode called the repeller provides an adjustable bias voltage setting which is available to the user to optimize the focusing of the electron beam through a narrow slit into the ion trap volume Several overpressure protection algorithms built into the VOM Controller protect the filament from dangerous operational conditions In addition the power delivered to the filament by the VQM Controller is continuously monitored by its microprocessor and used to protect the filament wire from overpower conditions E Filament Assembly lon Trap Entry Cup lon Trap Exit Cup Electron Multiplier Figure 6 5 MS Gauge lon Trap The ion trap relies on 1 electrostatic potentials to confine ions in oscillatory motions along its cylindrical axis and 2 a small 100 mV range RF signal frequency sweep to mass selectively eject ions Autoresonance principles are responsible for the ejection of ions and the RF signal is delivered from the VOM Controller to the transition plate of the ion trap through the Controller to MS Gauge interconnect cable Under factory default settings the MS Gauge is capable of scanning from 1 to 135 amu in 80 milliseconds Under factory default settings the ion trap de
98. See Section 5 5 4 Series 830 Vacuum Quality Monitor 25 Instruction Manual 830231 Rev F 26 2 Introduction amp Specifications 2 5 Environmental Compliance All components of the Vacuum Quality Measurement System are compliant with the following RoHS Compliant e RoHS Directive 2002 95 EC e CE Compliant EMC Directive 2004 108 EC e WEEE Compliant e WEEE Directive 2002 96 EC EC Low Voltage Equipment Compliant EC Low Voltage Equipment Directive 2006 95 EC Brooks Automation Granville Phillips recommends the use of interconnect cables of 3 meters or less in length for connection to the VOM Controller The attachment of any cable greater than 3 meters in length will result in failure of the system to meet CE Compliance specifications more specifically the ability to meet the Conducted RF Immunity standard IEC 61000 4 6 The test for this standard couples RF into I O cables over the same RF frequency range that we inject into our lon Trap directly affecting our signal This includes all generic cables such as USB and BNC cables that are connected to the VOM Controller Use of cables longer than 3 meters should not affect the performance of the system but the system will not be CE Compliant 2 6 Warranty Information Brooks Automation Inc warrants that new 830 Series VOM Products shall be free of defects in material and workmanship for a period of 24 months excluding consumables from the date of shipment from the ma
99. Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 201 9 830 VQM Command Set IDLE INITiated eo amp z S S o A 5 TRIGger o o 60 2 c amp o E o O Figure 9 4 Trigger Model 9 14 Reset State The Reset State occurs when the RST command is received The current logical instrument is set to MSP MSP is set to OFF The Filament power supply is set to ADJustable e The MSP Settings are set to the factory defaults See Table 5 10 9 15 Error Event Codes The Error codes exist in 215 215 1 Negative numbers are defined by the SCPI Specification positive numbers are instrument dependent The instrument returns Codel Error Description Device Dependent Info when reporting errors events Table 9 12 Error Event Commands Keyword Parameter Form Comments 100 Command Error Unable to parse command 104 Data Type Error Unable to accept command parameter 110 Command Header Error Unable to parse command 113 Undefined Header Invalid command 115 Unexpected Number of Parameters Number of parameters incorrect 120 Numeric Data Error Error in command parameter 200 Execution Error Command execution error 203 Command Protected Command is password protected 222 Data Out of Range Command parameter is out of range 202 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Table 9 12 Error Event Commands
100. The time will be slower by some multiple of the optimum time if backlogs are detected and exceed some threshold If the value is higher than the optimum consider turning off the Library Spectrum disable computer screen savers or other background tasks and stop using other applications If you are remotely logged on from another computer the Internet access may cause unacceptable CPU useage You might want to setup the computer to log the data and disconnect the remote connection e Averager Backlog If the value is greater than 0 the averager is not able to keep up with the fetch rate If the condition persists the application will automatically slow the fetch rate If a backlog continues further throttling may occur The Viewer Application will attempt to recover to the original fetch rate if the backlog clears Analysis Backlog If the value is greater than 0 the denoising peak finding peak fitting and gas fitting are not able to keep up with the averager rate See the discussion under HW Loop Time for possible mitigation Log Data Backlog If the value is greater than 0 logging is not able to keep up with the analysis rate This may be aggravated by logging to a server location or a badly fragmented disk You might try logging to a local disk or logging less information That is use a larger Time interval for the data you are collecting Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software a
101. To continue click Next WARNING This program is protected by copyright law and international treaties Figure 4 18 4 3 2 Installing the 830 Driver from a Download Location 1 Download the 830 Driver at http www brooks com pages 4124_downloads cfm 2 Double click the downloaded installer file 3 Follow the prompts to install the 830 Driver See Figures 4 18 through 4 22 54 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 4 Software Installation ie 830 Driver 32 bit InstallShield Wizard Ready to Install the Program The wizard is ready to begin installation Click Install to begin the installation Tf you want to review or change any of your installation settings click Back Click Cancel to exit the wizard Figure 4 19 Driver InstallShield Wizard 4 An installation notice will appear to install the 830 Driver see Figure 4 20 Click Continue Anyway Software Installation A The software you are installing has not passed W indows Logo testing to verify its compatibility with Windows XP Tell me why this testing is important Continuing your installation of this software may impair or destabilize the correct operation of your system either immediately or in the future Microsoft strongly recommends that you stop this installation now and contact the software vendor for software that has passed Windows Logo testing Continue Anyway STOP Installation Figure 4 2
102. Torr Mass Range 1 to 135 amu Relative Partial Pressure or Partial Pressure Mass Separator Type Autoresonant lon Trap with purely electrostatic ion storage Resolution m Am 150 typical 100 minimum Dynamic Range 2 decades for single scan gt 3 decades with averaging Response Time lt 100 msec for 1 135 amu at default VQM Controller settings Filament Single Yttria coated Iridium field replaceable Operating 0 C to 50 C 32 F to 122 F non condensing Temperature Detector Type Continuous Dynode Electron Multiplier Bakeout Temperature 200 C maximum non operating with the cable disconnected degas not required Mounting Flange NW35CF 2 75 inch ConFlat type Interconnect cable 1 meter long 11 6 oz 3 meters long 28 oz Physical Dimensions See Figure 2 4 Weight 420 grams 14 8 ounces Materials exposed to process environment 304 L Stainless Steel 316 L Stainless Steel Alumina Ceramic AI2O3 98 Min Nickel Molybdenum Ag Cu eutectic braze Gold Iridium Yttria Y2O3 99 95 Lead Glass multiplier body Chromium Specifications and dimensions are subject to change without notice Measured at 28 amu N at 2 x107 Torr at default VOM Controller settings Am measured at FWHM Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 23 2 Introduction amp Specifications 2 4 3 Viewer Software Specif
103. Viewer Application Icons 8 2 1 1 Connect See Section 8 4 1 Connects Disconnects to from the VQM System Controller and MS Gauge via USB With no active connection click on the Connect icon to display a connection pop up window that lists the COM port number and Controller serial number for all VQM Systems presently connected to the Host PC Select the desired device and click on Use this Device to establish a communication link between the Viewer Application and the Controller 8 2 1 2 Mass Spec See Section 8 4 2 Applies Removes all voltages to MS Gauge Clicking the Mass Spec icon is equivalent to pressing the Mass Spec button on the front panel of the Controller The MS Gauge filament and electron multiplier are powered when the Mass Spec icon is clicked or the Mass Spec button is pressed Both components filament and electron multiplier are consumables that degrade irreversibly over time as the MS Gauge remains active NOTE Do not turn on the MS Gauge until directed by the Initial Operation Procedure Do not keep the MS gauge turned ON unless measurements are required If the reported total pressure is too high the software interlock will disable all the voltages in the device overriding a request to enable them The default value for the software interlock is 1x10 Torr Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation The MS Gauge turn ON procedure is protected
104. Volts 3002 Repeller Blas y 25 00 Vols 25 01 Entry Plate Bias 130 00 Vol 129 99 Pressure Plate Blas 7500 Volts 75 00 Cups Blas amp 2700 Vols 2708 Transition Blas y 685 00 Volts 695 03 Exit Plato Blas 12500 Vols 12499 E shai as y 127 00 Volts 127 00 y 1050 00 Volts 1050 00 REAPER Y osoo Volts 0 500 Mass Cal Factor 609 000 kHz 609 000 Elecyovawr Gan 20007 MAN 21347 Selected Peak Parameters Resolution 10443 Gor 0 99 FWHM O01 SW 11553 Diagnostics HW Loop Time 0 090 Analysis Backlog O Start Raw Logging 74 Cabrate Simplicity utions tres Scale F 100 0 110 0 Figure 8 5 5 Setthe Tuning Spectrum graph Section 8 4 9 to Linear Scale and Autoscale the y axis 830 VOM Viewer Software Fle Help go boQ um Connect Mass Spec Scan 4 486 830 Trap Parameters Filamentemission 0 070 mA 0 070 Filament Bias 30 00 Volt 3002 Summary Histogram Trend Leak Settings Tune Repeller Bias Entry Pla Bias y Pressure Plate Blas Cups Blas Transition Bias Exit Plato Blas EM Shiokd Blas EM Blas RF Amp P P y Mass Cal Factor Elecrometer can 250 vols 190 00 Volts 7500 Volts 2700 Volts 695 00 Volts 125 00 Volts 127 00 Volta 1050 00 Volts 0 500 Vols 25 01 129 99 75 00 20 000 mun 609 000 kHz 609 000 21347 Tuning Spectrum LogData Save Selected Peak Pa
105. XT TP LED blinks as the initial communication attempt takes pace If communication is successfully established the VQM Controller continues to query the Micro lon Gauge for pressure and status information every 50 milliseconds i e Autopressure Mode ON and the EXT TP LED blinks persistently to reflect the exchange of data between both devices Autopressure must be ON for Overpressure Protection to work properly See Autopressure Mode on page 81 and Overpressure Protection on page 82 NOTE The VOM Controller will only power and communicate with a Micro Ion ATM Model 390802 Any attempt to connect a different product version to the VOM Controller will result in power being removed from the TOTAL PRESSURE port and an error report generated by the VOM Controller The TPMK cable 1 or 3 meter lengths is part of the TPMK and must be used to connect the VOM Controller to the Micro Ion Gauge For maximum safety and reliability secure the TPMK cable to the TOTAL PRESSURE connector using the connector screws The 60W label below the connector indicates the amount of 24 Vdc power that is required to operate a TPMK from the VOM Controller That power is in addition to the power required to operate the MS Gauge Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview 5 6 2 MASS SPEC Connector The MASS SPEC connector provides power electrical biases and ion current connections for the MS Ga
106. a negative potential Optimization of the repeller voltage setting may be required when 1 A new Filament Replacement Assembly is installed 2 Changes in the filament location take place inside the gauge For example due to aging severe prolonged overheating or extreme vibration Changes are made to the filament or entry plate bias Changes are made to the emission current Changes in the repeller alignment take place E ME ood Unexpected peak amplitude changes are observed 7 Operation of a different MS Gauge with the VOM Controller It is always a good idea to perform a repeller voltage optimization when a filament assembly is operated for the first time on an ion trap and each time the emission current is changed For best results allow the filament to warm up for at least 20 minutes before performing a repeller optimization procedure Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge 6 9 9 RF Amplitude Peak to Peak A small amplitude RF signal i e RF V 0 mV to 144 mV is AC coupled into the Transition plate and used to eject confined ions through parametric autoresonant excitation Transformer AC coupling is used to inject the RF V signal into the transition plate on top of the negative DC Transition Bias Voltage The coupling transformer is located inside the gauge connector plug of the MS Gauge to Controller interconnect cable AC coupling the RF into the cent
107. al 830231 Rev F 3 Hardware Installation 3 Break the hermetic seal of the Mylar Bag and remove the hard plastic shell that mechanically protects the MS Gauge 4 Remove the MS Gauge from its hard plastic shell Do not talk directly at an open vacuum port At this point the internal components of the MS Gauge are exposed to ambient air and particles 5 An additional plastic cylinder protects the electrode structure of the Nude MS Gauge Remove the plastic cylinder prior to mounting 6 Hold the MS Gauge in an upright position and visually inspect both ends of the cylindrical unit checking for damage that might have occurred during shipment including loose damaged or misaligned components Inspect the quality of the knife edges in the vacuum port and in the MS Gauge mounting flange 7 Position the copper gasket align the holes in both flanges and tighten the six bolts using standard ConFlat flange sealing procedures 8 For the Nude MS Gauge it is also good practice to use an ohmmeter to check for electrical shorts between the feed through pins and the vacuum chamber walls There should be no electrical connection between any of the pins and the vacuum system walls 9 Begin the initial pumpdown of the vacuum chamber as soon as the flange connection is sealed The MS Gauge is pre cleaned and leak checked at the factory and should only contribute to the chemical composition of the vacuum gas environment through normal outgassing fr
108. al 830231 Rev F 4 Software Installation i B30 VOM Viewer Software InstallShield Wizard Ssimplicitu g license agreement carefully z alu t i n 5 Simplicity Solutions Software License Agreement IMPORTANT READ CAREFULLY This Simplicity Solutions Software License Agreement Agreement is between you User or You and Brooks Automation Inc its subsidiaries aifiliates suppliers and assigns Licensor Us or We By installing or using the Simplicity Solutions Application Software any associated software services madia nrintant veatnrial nltra nio dnesumoantation and rlata mathanan S T accept the terms in the license agreement O 1 do not accept the terms in the license agreement Cea InscallBmeld Figure 4 8 Software License Agreement 6 Choose the location to install the software application The default location is the Program Files folder on the C drive ie 830 VOM Viewer Software InstallShield Wizard 2 mp r is folder or click Change to install to ag U t o ns Install 830 VQM Viewer Software to C Program Files Simplicity Solutions Installsmeld Figure 4 9 Software Installation Location 7 Click Install to begin the installation of the VOM Viewer Application 49 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 4 Software Installation i 830 VQM Viewer Software InstallShield Wizard Simnlicitu Solutions begin in
109. al lons formed away from the axis Region 2 are directed towards the pressure plate and do not contribute to the mass spectrum since they are neutralized on impact Continuous ionization means that ions are continuously added to the oscillating beam replacing ions lost to 1 collisions 2 electrostatic repulsion and 3 autoresonant ejection The rate of ion formation inside the trap is directly related to the electron emission current and the pressure inside the trap Off axis electron beam geometry provides high quality mass spectra without significant baseline offset contribution The main function of the pressure plate is to absorb ions that are formed within Region 2 of the ionization volume The pressure plate shields the entry cup from the unconfined ions so that better voltage control is available on the cups The pressure plate is discussed in more detail within the ion trap mass separator section since it can also be used to provide subtle adjustments in peak intensity and resolution The ionizer has an open configuration that assures unrestricted conductance between the vacuum environment and the ionization region 110 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge Table 6 2 MS Gauge lonizer Settings lonizer Settings Dou Comments Value Repeller Bias V 25 Use the repeller bias voltage setting to optimize the coupling of the electron bea
110. al pressure indicators e Averaging settings e Response time NOTE An optional TPMK is required to provide absolute partial pressure measurements 8 2 1 5 Histogram See Section 8 4 5 Displays the Histogramscreen which provides The Results table which contains the normalized intensity percentage and absolute partial pressure for either the Top User Select Gases Masses A histogram of the Mass Spectrum e Average and instantaneous total pressure indicators e Averaging settings e Response time Use the Autoscale X and Autoscale Y buttons scale the graph 8 2 1 6 Trend See Section 8 4 6 Displays the Trend screen which provides The Results table which contains the normalized intensity percentage and absolute partial pressure for either the Top User Select Gases Masses A long term historical trend graph of the total pressure and the ratiometric or absolute partial pressures for the entries in the Results Table e Average and instantaneous total pressure indicators e Averaging settings Series 830 Vacuum Quality Monitor 147 Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation e Response Time 8 2 1 7 Leak See Section 8 4 7 Displays the Leak Screen which provides A Mass Select control A leak Limit control e A display of the averaged total pressure e A leak Trend Graph showing the current leak limit and graph of the leak gas s amu s partial pressure 8 2 1 8 Settings Se
111. ameter Minimum Recommended Processor Intel Core Duo or Intel Core 2 Quad Core i7 or later AMD Athlon 64 AMD Athlon 64 Phenom X3 or later RAM 2 GB 4 GB or better Operating System Windows XP 32 bit Windows XP 32 bit Windows 7 32 bit or 64 bit Windows 7 32 bit or 64 bit Communications USB 2 0 USB 2 0 Disk Space 1 GB 2 GB 7200 SATA 4Gb s or better 64 MB buffer Display Resolution 1280 x 1024 pixels 1280 x 1024 pixels The Recommended platform is required for high speed operation Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 2 Introduction amp Specifications 2 4 5 Trigger Input Output Specifications Table 2 6 Trigger Input and Output Connections Port Specification Trigger IN port BNC e Input Impedance 50 Q Trigger Logic Edge Trigger Low to High TTL Levels Minimum Pulse Width 1 msec Trigger OUT port BNC Output Impedance 50 Q Trigger Logic Low to High TTL Levels Trigger IN Use the Trigger IN port to deliver valid external trigger pulses to the VOM Controller to execute single mass spectrometry scans synchronous with external events See Section 5 5 1 for more information Trigger OUT Use the Trigger OUT port to access the output trigger pulses available to time frame the MS analog out signal available from the VOM Controller See Section 5 5 2 for more information Logic Lev
112. ample a target mass spectrum The mass spectrum may be a sum of gases and masses Series 830 Vacuum Quality Monitor 179 Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation Library Gas Names Rel Intensities Addni Masses Rel Intensities Argon 0 000 i Bl co 0 000 co2 0 000 Nitrogen 0 000 Helium 0 020 Hydrogen 0 010 Krypton 1 000 Neon 0 000 Oxygen 0 000 Water 0 000 E Library Spectrum On 7 Figure 8 31 Mass Spectrum Library Relative Intensities Set the value of the intensity of the mass or gas normalized to 1 0 The values for gases and masses are summed This means that calculated Relative Intensities may be adjusted based on the highest sum for an amu Additional Masses Enter a mass value for intensities not provided by gas relative intensity settings If you enter a mass that is provided by one or more gases be aware that the intensities are summed If you enter a mass more than once the intensities will be summed Library Spectrum On Check this box to display the Mass Spectrum Library Displaying the Mass Spectrum Library consumes CPU cycles A backlog may result Clear Additional Masses Clear Relative INtensities and their amu values from the Additional Masses part of the control 8 5 10 Pressure Setup configuration Pressure Setup is available only on the Settings Screen Use these controls to configure your total pressure measurement and ove
113. and checked internally to make sure they deliver the proper output The Direct Digital Synthesis generator responsible for the RF signal is not tested during POST The sequence of tests is as follows 1 Positive voltage supplies 2 Negative high voltage supplies 3 Repeller voltage supply 4 Emission control circuitry If an error is detected during POST the system Error LED MASS SPEC Button is not illuminated but the error counter is incremented and an error is added to the Error queue error Code 200 POST Unsuccessful run TEST If a POST Error is logged use the TEST Command to obtain a list of the modules that generated errors Note that there is no command available to initiate a POST procedure See Chapter 9 VOM Command Set 5 10 Total Pressure Measurement Kit TPMK Operation The VOM System includes an optional TPMK which connects directly to the VOM Controller and provides full range total pressure readings from atmospheric to high vacuum pressure levels The TPMK consists of 1 Micro lon ATM Gauge Model 390802 2 Interconnect cable 1 meter or 3 meter length options NOTE The TOTAL PRESSURE Connector on the rear of the VOM Controller will power and communicate with a Micro Ion ATM model 390802 Other versions of the Micro Ion Gauge product line will not be powered by the VOM Controller and will generate errors if connected to the VOM Instrument Series 830 Vacuum Quality Monitor Instruction Manual 830231 Re
114. ange drastically See Tune Settings in Chapter 8 before modifying any operational parameters in your system 7 4 1 1 UHV Operation Operation at UHV levels will provide clean mass spectra with reduced baseline offset levels and excellent resolution However it may require an increase in the electron emission current if the mass peak amplitudes drop significantly and the dynamic range is too small As the pressure in the system enters the UHV range the rate of ion formation decreases and starts lagging behind the ion loss ejection rates An increase in the electron emission current produces a proportional increase in ion formation rate and in peak intensities The repeller voltage should be optimized each time electron emission current is modified See Tune Settings in Chapter 8 before modifying any operational parameters in your system 7 4 1 2 Operation at Close to Upper Pressure Limit Operation at pressures above 3x10 Torr will lead to spectra with lower resolution increased baseline offset levels and decreased dynamic range DNR while operating under factory default settings As the pressure in the systems reaches the upper pressure limit of the sensor the following parameter modifications are typically required 1 increase the RF Amp Voltage and Exit plate voltage 2 decrease the electron emission current and 3 optimize the repeller and electron multiplier shield voltages See Tune Settings in Chapter 8 before modifying any operati
115. as the proper Virtual COM port drivers installed and can communicate with the VOM Controller through text based commands The Controller provides full MS data records via the USB interface at the end of each MS scan FETCh The user interacts with the VOM Controller 1 through the VOM Viewer Application Software package bundled with the instrument 2 through a user developed custom software application or 3 through specially developed LabView Virtual Interfaces Users interested in collecting or displaying MS data with their own fast data acquisition systems i e scopes or fast DAQs also have the option of using the Trigger Out and Analog Out signal ports to collect store and display MS analog out signals Series 830 Vacuum Quality Monitor 85 Instruction Manual 830231 Rev F 86 5 VQM Controller Overview Manual scan control allows users to execute manual scans from the front panel of the VOM Controller while collecting MS data with the Host PC and or auxiliary fast DAQ equipment Manual scan control is ideal for applications in which synchronization with external events relies on direct user observations and synchronization during a process experiment e An optional Micro lon Gauge Total Pressure Measurement Kit TPMK can also be connected to the VQM Controller providing access to independent Host PC over the USB link total pressure information to the There is real time synchronization between the total pressure
116. at might be outgassed from the filament assembly the first time it is powered up NOTE Failure to follow these recommended procedures the first time the MS Gauge is powered up can lead to gain instabilities and potential irreversible gain degradation in the electron multiplier Mass Spectrometer Gauges exposed to ambient air for long periods of time gt 1 month must be treated the same way as a new gauge when first turned ON i e the Initial Operation Procedure in Chapter 8 7 5 9 Gain Adjustment The lifetime and the rate of gain degradation of the electron multiplier is inversely proportional to its output signal intensity gain Output ion currents below 60 nA are recommended to avoid fast degradation while still providing adequate dynamic range and detection limits for signal acquisition Gain adjustment is recommended and described in the Initial Operation Procedure in Chapter 8 for each new MS Gauge The output of the electron multiplier must be checked periodically and readjusted as necessary through increases in its high voltage bias See the Electron Multiplier Gain Adjustment procedure in the Initial Operation Procedure in Chapter 8 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 7 MS Gauge Maintenance 7 6 Filament Assembly 7 6 1 Introduction The VQM Controller constantly monitors the MS Gauge for failed filament operation Once the filament coating wears out and or its wire breaks open it can
117. ata is received The Host PC s resources are locked up and another FETCh can not be sent for 100 ms 100 ms is enough time to trigger another scan not transfer the data and then trigger another scan The data that was in the buffer is overwritten The later scan is received but one was missed in between This will increment the buffer overwrite counter in the DIF header By looking at consecutive buffer overwrite counters a user can determine whether or not they are missing scans External Trigger 100 ms example The use of an external trigger can cause a new event called over triggering This case will be discussed in the sections to follow The external trigger timing diagram can be broken down into two different cases The first case is when no USB data i e no FETCh command received is sent and when the FETCh command is received and data is transferred over USB Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview Start End Scan Scan I Total Scan Ti H Z t Pp ha s e e f I 9 I I i 80 ms Framing Puse gt I 8 1 2 f I 1 8 amp 8 I Oo 1 2 I AAA A O y 1 5 I p Can recieve FETCH any co H gt i Buffer Size and Transfer Time Increasing Mse o 0 025 0 05 0 075 0 1 Time s Figure 5 16 External
118. ate component of the MS Gauge and must be continuously protected while it is electrically biased Operation of the electron multiplier at high pressures can cause irreversible reduction of its gain The Overpressure and filament Overpower Protection Modes described for the VQM Controller shut down the electron multiplier in addition to the filament in the case of an overpressure condition Electron multipliers are also sensitive to long term exposure to atmospheric air Dedicated long term storage precautions and best known operational practices are provided in Chapter 10 to assure long and optimal operation of the detector The MS Gauge must be returned to the factory repair center for replacement of the electron multiplier The maximum operational temperature of the electron multiplier must not exceed 100 C while bias is present across the detector Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge Figure 6 7 MS Gauge with Heater Jacket The VQM MS Gauge is assembled at the factory using the highest standards of cleanliness and vacuum compatible manufacturing Critical components are cleaned and vacuum fired prior to assembly to eliminate the potential of internal outgassing Filament assemblies are tested and outgassed in a dedicated test vacuum system to avoid irreversible contamination of ion trap electrode structures during initial operation Hands free factory tooling
119. ation of a vacuum system with this or any similar high voltage producing product Verify that the vacuum port to which the MS Gauge and all vacuum gauges are mounted are electrically grounded It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground Use a ground lug on a flange bolt if necessary NOTE All components of the Vacuum System MUST be properly grounded See Section 3 8 and Figure 3 15 on page 41 1 3 Implosion Explosion Install suitable devices that will limit the pressure to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand Glass ionization gauges if roughly handled may implode under vacuum causing flying glass which may injure personnel If pressurized above atmospheric pressure glass tubes may explode A substantial shield should be placed around vacuum glassware to prevent injury to personnel Danger of injury to personnel and damage to equipment exists on all vacuum systems that incorporate gas sources or involve processes capable of pressurizing the system above the limits it can safely withstand For example danger of explosion in a vacuum system exists during backfilling from pressurized gas cylinders because many vacuum devices such as ionizati
120. below or mounted inside a demountable envelope full nipple See Figure 2 4 Figure 3 3 and Figure 3 4 Nude Gauge The Mass Spectrometer Gauge that is connected to the vacuum chamber but the sensors of the gauge are inside the chamber rather than inside a nipple that is mounted to the chamber See Figure 2 4 Figure 3 3 and Figure 3 4 Power On Self Test POST A test that the Controller runs at power up or reset See Section 5 9 3 Ratiometric A ratio of the concentration of gases Tee Flange An optional mounting flange for the purpose of mounting the MS Gauge and the Micro lon Gauge at the same location on the vacuum chamber See Figure 2 2 TPMK Total Pressure Measurement Kit which includes the Micro lon ATM Gauge and the necessary cable for connecting the gauge to the VQM Controller See Micro lon above TPMK and Micro lon Gauge are used interchangeably throughout this instruction manual UHV Ultra High Vacuum usually referring to pressures below 10 Torr VQM Vacuum Quality Monitor refers to the VQM System which consists of the VOM Controller and the VQM Mass Spectrometer Gauge 5 3 VOM Controller Overview The VQM Controller contains all the electronics required to 1 power and operate the VQM Mass Spectrometer Gauge MS Gauge 2 power and communicate with the Micro lon Gauge Total Pressure Measurement Kit TPMK and 3 communicate with a Host PC over a serial USB communication link
121. by an overpressure software interlock engine The VQM Viewer Application includes total pressure measurement capabilities and uses the total pressure readings provided by 1 a TPMK or 2 a G P Series 370 Controller to protect the MS Gauge from dangerous overpressure conditions If the measured total pressure at the turn ON time is too high i e above pressure limit setting the software interlock will disable MS Gauge power The default value for the software interlock is 1x10 5 Torr but can be easily changed through the Settings screen Pressure Limit setting 8 2 1 3 Scan See Section 8 4 3 Starts Stops data acquisition continuous scanning from the VQM System Clicking the Scan icon is equivalent to pressing the SCAN button on the front panel of the Controller Mass spectrometry data is immediately available for display and used for gas identification Select a display mode using Summary Histogram Trend and Leak Icons Display the raw mass spectral output of the MS Gauge and check modify gauge parameters accessing the Tune screen 8 2 1 4 Summary See Section 8 4 4 Displays the Summary screen which provides The Results table which contains the normalized intensity percentage and absolute partial pressure for either the Top User Select Gases Masses A 15 minute graph of the absolute or ratiometric 96 pressures for the entries in the Top Gas Select Gas table A histogram of the Mass Spectrum e Average and instantaneous tot
122. ce and affects the secondary electron emission yields 7 5 6 Operating Voltage The gain of an electron multiplier is controlled through bias voltage adjustments There is a nonlinear relationship between gain and high voltage bias In general higher output signals i e higher gains correlate with faster gain degradation and shorter detector lifetimes A new electron multiplier will typically operate at a bias voltage between 900 and 1050 V The negative high voltage level will need to be increased on a regular basis to adjust against gain degradation The typical operating range for the VQM MS Gauge electron multiplier is 900 to 1350 V Operation of the electron multiplier at bias voltages beyond the 1350 V limit is acceptable but not recommended for long periods of time since it increases the risk of arcing inside the sensor and leads to accelerated gain degradation especially in the presence of contaminants Notes a The maximum output available from the electron multiplier high voltage power supply is 1500 V b As the bias voltage in the electron multiplier reaches the 1350 V limit the user should start planning the factory replacement of the electron multiplier detector at the earliest convenient time c The electron multiplier high voltage supply is linked to the repeller voltage supply and the electron multiplier bias voltage must be at least 750 V for the repeller bias to be able to span its entire specified range
123. cleaning solvents are particularly deleterious to the long term performance of the detector Reactive compounds such as fluorine HF and fluorinated hydrocarbons are damaging to the filament and to the electron multiplier A Filament Outgassing procedure is described in the Initial Operation Procedure in Chapter 8 that was specifically designed to minimize exposure of the electron multiplier to the initial gas load evolved from the filament assembly the first time the filament is powered up Use this procedure on any new gauge or after a filament assembly replacement procedure Series 830 Vacuum Quality Monitor 137 Instruction Manual 830231 Rev F 138 7 MS Gauge Maintenance Idle MS Gauges must be protected from the environment using 1 isolation valves against contaminants or 2 baffles or shutters against line of sight contaminants 7 5 8 Initial Operation To best assure high gain and long term stability of electron multipliers it is very important to complete the procedures described in the Initial Operation Procedure in Chapter 8 the first time a MS Gauge is powered up 1 Initial Pump Down 2 Filament Outgassing and 3 EM Preconditioning The Initial Pumpdown and Pre conditioning procedures are required to outgas water molecules from the internal surfaces of the detector s channel s and to assure best possible gain stability Filament outgassing prevents exposure of the electron multiplier to the initial gas load th
124. ctrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a y copper wire connection A person may be seriously injured or even killed by i merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product Provide a connection to ground for each ungrounded metal component in on or around the vacuum system including the gauge envelopes which personnel may gt N touch and which can potentially be exposed to high voltage electrical discharges within the vacuum system Compliance with the usual warning to connect the power cable only to a properly A grounded outlet is necessary but not sufficient for safe operation of a vacuum VA system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at Earth ground high voltage electrical discharges must either be shielded at all times to protect 72 All conductors in on or around the vacuum system that are exposed to potential personnel or must be connected to Earth ground at all times 3 8 1 VOM Controller Ground Connections 1 Connect a 14 AWG ground wire provided from the ground lug 6 32 thread on the rear panel of the VQM Controller to a known Earth ground Do NOT connect a ground wire directly between the VQM Controlle
125. ctrometer Gain 20 899 130 00 75 00 27 00 685 00 125 00 127 00 75 00 27 00 685 01 124 99 127 01 1049 90 0 500 610 400 20 899 Setting Restore Factory Setting Tuning Display Mode Raw Counts Y Electomeler car 20 000 nag Pressure Params r lo qs 15 17 19 970 Selected Peak Parameters paeng Pressure Units TORR Mass Peak Location 18 06 Resolution 106 14 GoF 0 98 Pressure 9 2069 P 18 Intensity 1 00 FWHM 0 17 SNR 296 81 Diagnostics HW Loop Time s 0 084 Analysis Backlog o Averager Backlog 0 Log Data Backlog Advanced Display Vni 830 Header Filament Emission Current 0 070000 Instr Status Reg 5TB Reg SESR Reg OPER COND Reg_OPER EVENT Reg_QUES COND Reg QUES EVENT ETPR Status 390 Status Error Count FE Signal Params 114 17 19 975 Ext Signal TS 12 9 2010 Ext Signal Unts y Ext Signal 1 45E 4 J Simplicity UH ution Scan Params J 14 17 19 973 Curve Timestamp l 12 8 2010 overwrite Counter 1244 Freq Units HZ AmplUnits TSource CCONtinuous _ Over Trig Counter 0 Block Length 17186 Filament Power 2 0174 Date 112082010 Time 141719 977 Serial Number 630P0000 HW Rev Toa E FW Rev 02 000 00841 Figure 8 19 Tune Function Header Screen The FETch Header information is parsed and annotated for easy interpretation Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 4 1
126. cuted e The full MS data record transmitted over USB at the end of each MS scan must be processed in real time by the Host PC at the end of each scan This requires fast data collection systems 5 12 2 Standard Setup with External Trigger Pulses This setup builds upon the Standard Setup adding the ability to perform external trigger scan control and provides access to the entire functionality of the Mass Spectrometer including the three independent means for MS scan control that are available for the instrument 830 VQM System with External Trigger Pulses Optional GP 390 TPMK Series 830 Micro lon Gauge for VQM Controller Total Pressure Measurement T e DB 15 Cable Analog OUT y Analog IN H Qm abe on as oe premem Trigger OUT 3 N External Trigger Source 1 L Vacuum Chamber Trigger IN 4 USB Series 830 MS Gauge O 1 b E M T we PC with Windows mata J M amp the VQM Viewer E Getillossese ae p Au SM Application Software or Data Channel Trigger Recorder Logger Figure 5 12 Basic System Standard Setup with External Trigger Pulses Use Case 2 This Operational Mode supports 1 Manual MS Gauge control Host PC MS Gauge control Manual MS scan control Host PC Scan control External trigger scan control MS analog out signal data acquisition storage and real time display Ext
127. cuum Quality Monitor 189 Instruction Manual 830231 Rev F 190 9 830 VQM Command Set 9 3 Basic Commands Basic commands perform general operations such as resetting the microcontroller identifying the instrument querying errors etc Table 9 2 830 VOM Basic Commands Keyword Parameter Form Comments IDN Identification query returns four fields delimited by commas Manufacturer Model Serial Number and Firmware version Example Brooks Automation Inc 830 MSI 830P0000 02 000 00854 RST Resets the settings to a known configuration the MSP logical instrument is set to OFF the Mass Spectrometer settings are reset to the factory settings from non volatile memory the current logical instrument is set to MSP and the Filament Power Supply mode is set to ADJustable See Table 5 10 TST Self Test Query Response is an unsigned 8 bit number Each bit corresponds to a pass or a fail for a particular subsystem under test 0 for a bit indicates a pass 1 for a bit indicates a fail See TEST Subsystem to produce a complete test report Bit O Diagnostic Mode Bit 1 High Voltages for Trap less than 170 V Bit 2 Electron Multiplier Electrometer Bit 3 Negative High Voltages for Trap less than 0 V Bit 4 Trigger Input and Trigger Output Bit 5 Analog Input and Analog Output Bit 6 Filament Emission Control Bit 7 Not Used Example 40 gt 0b00101000 bit 3 and b
128. d by the absorption of RF Series 830 Vacuum Quality Monitor 125 Instruction Manual 830231 Rev F 126 6 lon Trap Mass Spectrometer Gauge power by the ions which drives RF field levels below their ejection threshold for the most abundant ions Ratiometric information is affected by this depletion phenomenon since it selectively affects the amplitudes of the most prominent peaks Figure 6 17 shows an example of a water spectrum in which the ratio between the 18 amu to 17 amu peaks change depending on the RF V selected to operate the trap Operation with RF Vp values above threshold i e RF Amp P P gt 0 5 at factory default values minimizes this problem Mass Spectrum RF amp P P 0 500 V RF amp P P 0 385 V 10 20 30 40 50 60 70 80 90 100 110 120 130 Mass amu M AM 117 Normalized Signal arb M AM 141 M AM 175 15 16 17 18 19 20 Mass amu Proper ratiometric information is observed for RF Amp P P 0 500 V However RF field depletion is obvious for RF Amp P P 0 385 V which is very close to threshold The peaks drop in amplitude and the resolution of the reduced peaks is much higher than the resolution for other peaks in the spectra Figure 6 17 RF Field Depletion Effect As the pressure in the system increases peak amplitudes are often improved by an increase in RF Vpp Voltage The increase in RF Vpp reduces the time required for the ions to be ejected from t
129. data will be available from the instrument The VOM Controller automatically enables Overpressure Protection Mode as Autopressure Mode ON Overpressure protection mode operates even if no Host PC is connected to the VOM Controller providing gauge protection in Stand Alone Mode of operation NOTE Users cannot change the Autopressure status through the VOM Command Set The total pressure information provided by the Autopressure Mode ON is used by the VOM Controller to provide real time overpressure protection of the MS Gauge The overpressure protection mode is used to decide 1 whether it is safe to turn ON the MS Gauge and 2 whether it is safe to keep the MS Gauge ON The overpressure protection logic is based on three independent total pressure thresholds Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview 1 Low Pressure Threshold PL 5x10 Torr The MS Gauge will only turn ON if the last pressure reading reported by the Autopressure Mode is below the Low Pressure threshold Alternatively the MS Gauge will not turn ON if the last pressure reading obtained from the Autopressure mode exceeds the Low Pressure Threshold Failure to turn ON an MS Gauge due to an overpressure condition generates a pressure too high error code 802 which is reported in the Error event queue 2 Extreme High Pressure Threshold PEH 5E 4 Torr The MS Gauge will immediately turn OFF if the last pressure readin
130. demarks of Brooks Automation Inc All other trademarks and registered trademarks are the properties of their respective owners Brooks Granville Phillips Series 830 Vacuum Quality Monitor Catalog numbers for Series 830 VQM Controllers Gauges and Accessories Product Description Catalog Number VQM Controller for one MS Gauge benchtop mount 830501 U1 0 USB 2 0 1 135 amu no setpoints VQM Controller for one MS Gauge benchtop mount 830501 U1 0 with universal power supply and power cord select power cord Universal Power Supply for 830 VQM System CE Compliant AC to 24 Vdc select power cord 801201 Cables VQM Controller to Mass Spectrometer Gauge 1 meter 3 28 ft 830301 0010 2 meters 9 84 ft 830301 0030 Cable for log linear analog output 1 8 miniature phone jack 801202 0100 Interconnect from a G P Series 370 lon Gauge Controller to the analog input on the VQM Controller 10 meters long CD 830 Viewer Application Software 830251 ARA ok KK RRA KKK KKK KK KK AR ARO KKK KKK KKK KKK 830 MS Gauge 1 135 amu Channel Electron Multiplier Detector Yttria coated iridium filament 2 75inch NW35CF flange Configuration Nude 830100 NYG In demountable envelope 830100 DYG Field Replaceable Filament Assembly Kit 830105 Y K Demountable Envelope 4 inch nipple for Nude Gauge 801270 2 75 inch NW35CF ConFlat flange includes port screen kit T Flange 801272 2 75 inch NW35CF ConFlat flanges Hardware
131. e ratio The resolution at a specific mass to charge M Q is measured as the FWHM 50 peak height for its mass peak in the spectrum Higher resolution values are desirable Resolving power m Am Resolution is measured as resolving power which is a given mass to charge M Q defined as the ratio m z and the FWHM AM 50 R M AM Large resolution power is desirable to fully differentiate the mass peaks Session Interactive monitor control transactions occurring between the Host and a specific VQM Controller TP or Total Pressure Total pressure is equal to the sum of the partial pressures Total pressure can be provided to the box via the TPMK or Analog Input configurable TPMK Micro lon Gauge Total Pressure Measurement Kit A Granville Phillips Wide Range Series 390802 Micro lon ATM Gauge with RS485 interface to provide vacuum chamber total pressure measurement The kit includes a 1 meter or 3 meter long interconnect cable The TPMK connects to the VQM Controller via a 15 pin D connector on the rear of the 830 VQM Controller Trend A plot of a single or multiple values against time Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 2 Introduction amp Specifications 2 4 Specifications 1 582 in 40 i 4 130 in 6 156 in 104 902 mm 156 362 mm 830 VOM 2 oz oz oZ oz oA OOl a The VQM Controller is a benchtop mount u
132. e Analog Output port Stand Alone Mode of operation See Section 2 4 5 and Section 5 5 2 for more information 3 9 3 Analog Input Fxternal Total Pressure The Analog IN connector is a BNC type The analog input port is used to digitize external analog signals in synchronicity with mass spectral scans Connect the analog input port to any external transducer capable of delivering analog output signals A common application of the analog Input port is to connect the analog output of Granville Phillips lonization Gauge Controllers to the VQM Controller An optional cable is available to connect the analog output of Granville Phillips Series 370 ionization gauge controller to the Analog Input port of the VOM Controller The VOM Viewer Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 Hardware Installation Application can read analog voltages digitized by the Analog Input port and convert them into ionization gauge total pressures for Granville Phillips Series 370 ionization gauge controllers See Section 2 4 6 and Section 5 5 3 for more information 3 9 4 Analog Output The Analog OUT connector is a BNC type The Analog Out port provides a voltage signal proportional to twice the output of the electrometer connected to the mass spectrometer detector Connect the Analog Output Signal to a fast data acquisition system triggered by the Trigger Output pulses See Section 2 4 6 and Section 5 5 4 for more information 3 9 5 VQ
133. e Controller until indicated later in this manual 3 7 3 Connection Procedure 1 Connect the 24 Vdc Power supply to the back panel of the VQM Controller Plug in the DC power plug on the rear panel of the VQM Controller 24 Vdc 75 W connector but do NOT plug in the AC power supply at this time o e 24V 75W o S o Figure 3 13 DC Power Plug 2 Follow the System Grounding Procedure described in the following section 3 8 System Grounding Procedure A strict ground protocol is required due to the electronic circuits within the VQM System and the process by which data is gathered and output The emission current ion trap voltage gradient and detector are all precision signals relative to the Mass Spectrometer Gauge vacuum system ground The proper system electrical grounding procedure must be adhered to for proper VQM System operation data integrity and personnel safety Improper grounding can cause product damage or personal injury Follow the ground network requirements for the facility Maintain all exposed conductors at Earth ground Connect the power cord to a properly grounded outlet fa Make sure the vacuum port to which the gauge is mounted is properly grounded Connect the gauge envelope to a facility ground If necessary use a ground lug on the flange bolt Series 830 Vacuum Quality Monitor 39 Instruction Manual 830231 Rev F 3 Hardware Installation Be aware that an ele
134. e Section 8 4 8 Displays the Settings Screen which provides e The Mass Spectrum Library Builder Pressure Setup controls including pressure source over pressure limit external pressure valid indicator and pressure display units A histogram of the Mass Spectrum 8 2 1 9 Tune See Section 8 4 9 Displays the Tuning screen for Initial Operation Calibration and Advanced Configuration The Tune screen provides e A section to check modify ion trap operational parameters e Buttons to read load settings from to NVRAM Araw mass spectral output display including a single gass mass axis calibration facility Options to display raw mass spectral output as normalized Raw nA or Raw counts Mass peak analysis on selected mass Option to trigger raw data logging e Advanced display options e Diagnostics 8 2 1 10 Log Data See Section 8 4 10 Logs all data in two ASCII files Files include a header file with all status and voltages of the VQM System and a data file that contains the intensities Y axis values The X axis values the masses can be saved with the Save Command The icon will appear blue while the logging is active The base filename is entered by the user The extension for the header file is hdr The extension for the intensities file is csv 8 2 1 11 Save See Section 8 4 11 Saves a single set of result data mass vs intensity to a user named comma delimited file 148 Series 830 Vacuum Quality Monitor
135. e black line looks like a wide up arrow to the right of the units indicates the color of the Average Total Pressure on the Trend Graph The second line is the instantaneous Total Pressure The Current Total Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation Pressure is used to determine if the Total Pressure is above the Pressure Limit as configured on the Settings Screen If it is above the limit the Mass Spec gauge will be turned OFF to protect the electronics Note When the MS Gauge is first turned ON a pressure spike associated with outgassing when the filament is first powered may be seen This pressure should drop quickly although its effects could be momentarily reflected in the averaged total pressure if the number of averaged buffers is relatively high Average Total Pressure 2 00E 8 Torr WX Current Total Pressure 2 00E 8 Torr Figure 8 24 Total Pressure 8 5 3 Averaging aka Post Processing The Post Processing area of the Left Pane can be used to change the averaging options The left most dropdown control allows the user to select a type of averaging OFF Running Average Cumulative Moving Average and Accumulator The Avgs to Collect control allows the user to set the number of scans to average Averaging Mode Angs to Collect Avgs Collected Cumulative Moving Avg 1000 634 Response Time 84 221 5 Figure 8 25 Post Proce
136. e in the system Series 830 Vacuum Quality Monitor 155 Instruction Manual 830231 Rev F 156 8 Viewer Software amp Initial Operation 8 3 5 2 Procedure NOTE A Host PC and the VQM Viewer Software are required to complete this procedure VOM users relying on stand alone operation i e no Host PC Connection should contact the factory for additional information 1 Complete the Electron Multiplier Gain Adjustment procedure in Section 8 3 4 2 Access the Summary panel Figure 8 3 of the VQM Viewer Software Averaging Mode Running Average Avgs to Collect 25 B30 VOM Viewer Software Fie Help gc bu ow 6 e A BEB Simplicity s Leu iso tiui Elio ri b A asain toate AG ADIRE Gane Solutions TI NR E al EI EEE Norm 0 Absolute 22255552 il j i i i i i i i ia 13 59 21 13 59 22 13 59 23 13 59 24 13 59 25 13 59 26 13 59 27 13 99 28 13 59 29 13 59 30 Time Histogram thew e Y 1 0 Total Pressure 0 9 0 8 Average Total Pressure 1 04E 8 Torr A 0 7 Current Total Pressure 1 03E 8 Torr jo 0 5 Post Processing Averaging Mode Avgs to Collect Avgs Collected Running Avg Y 25 25 0 4 0 3 0 2 Response Time 2109 Figure 8 3 Summary Screen 3 Access the Tune Panel Section 8 4 9 of the 830 Viewer Software Advanced Display Advanced Tuning Display Mode Raw nA Series 830 Vacuum Quality Monitor Instruction
137. e less than 40 C 104 F 1 Place the VQM Controller on a clean benchtop close to the MS Gauge and the Micro lon Gauge 2 Connect and secure the VQM Controller to the MS Gauge using the MS Gauge interconnect cable Insert the gauge connection plug into the metal guard located on the receptacle of the MS Gauge Use the alignment pin inside the metal guard of the receptacle on the MS Gauge and the matching slot on the plug to assure proper orientation of the connector sockets relative to the feedthrough pins before pushing the plug into the metal receptacle Lock rotate the connector collar with the integral pin guard Connect the other end of the MS Gauge interconnect cable to the VQM Controller Insert the cable plug into the VQM Controller s back panel connector labeled MASS SPEC The thumb screws of the plug are Male and Female to match with the connector on the VQM Controller Connector on MS Gauge MS Gauge Connector on Controller 00000 0 0 0 0 MS Gauge Cable OPO 0 0 Male Threads Female Threads Figure 3 7 Cable Connectors on the MS Gauge and the Rear of the VOM Controller Figure 3 8 Cable Connected to the MS Gauge 36 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 Hardware Installation 2 A ce PAN a TOTAL PRESSURE MASS SPEC 24V 75W 4 Micro lon Gauge MS Gauge Connector TPMK Connector Figure 3 9 VOM Controll
138. e module see Figure 2 3 is available from Granville Phillips to provide vacuum system pressure readouts and process control functions absolute partial pressure measurements and mass spectrometer gauge overpressure protection 2 830 VQM TOTAL USB PRESSURE TOTAL PRESSURE US O 74 TRIGGER o PN Q T mow 0 k 9 s ur IN LLE PHILLpg Our N Our 6 Figure 2 1 VOM Controller Front and Rear Panels Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 17 18 2 Introduction amp Specifications o GRANVILLE PHILLIPS Interconnect Cable Controller to Mass Spectrometer Gauge VOM lon Trap Mass Spectrometer Gauge Quick Installation AC to 24 Vdc and Startup Guide USB Interconnect Cable Power Supply Figure 2 2 Standard Components of the Vacuum Quality Monitor System Interconnect Cable Micro lon Gauge to VOM Controller Tee Flange Catalog Micro lon Total Pressure Gauge Catalog 802301 0010 for 1 801272 and 3 Bolt Kits TMPMK meter long or 802301 0030 Catalog 801274 1 Catalog 390802 for 3 meters long Demountable Envelope Nipple Catalog 801270 for Nude MS Gauge Figure 2 3 Optional Components of the Vacuum Quality Monitor System 2 2 Receiving Inspection Inspect all materials received for shipping damage Confirm that your shipment includes all the materials and options that were ordered If materials are mis
139. eaks feed through damage during shipment 2 high outgassing levels due to packing material outgassing or dirty storage conditions and 3 vacuum system problems NOTE The Initial Pump Down procedure is also recommended after long storage periods outside a high vacuum environment NOTE Do not turn ON the MS Gauge until directed in this procedure 8 3 1 2 Procedure 1 Select a high vacuum system capable of reaching a target pressure 1x10 Torr i e below the upper pressure limit of the instrument and below the overpressure limit of the VQM Viewer Software The VQM System provides optimal performance at its pressure sweet spot of 2x10 7 Torr and is fully compatible with UHV operation Series 830 Vacuum Quality Monitor 149 Instruction Manual 830231 Rev F 150 8 Viewer Software amp Initial Operation 2 Track the pumpdown process with an ionization total pressure gauge until the targeted base pressure i e lt 1x10 Torr for the vacuum system is reached Proceed to Step 5 if base pressure cannot be attained 3 For HV applications total pressure gt 1x10 9 Torr continue pumping the MS Gauge for a minimum of 8 hours at or below the target pressure Bakeout of the Mass Spectrometer Gauge Section 7 3 is optional if UHV level operation is not required For UHV applications total pressure lt 1x10 9 Torr a Bakeout Procedure described in Section 7 3 is highly recommended to accelerate pumpdown to the targeted UHV
140. ect impact on mass axis Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 119 120 6 lon Trap Mass Spectrometer Gauge calibration and mass range of the mass spectrometer and require a single gas mass axis calibration procedure after their values are changed See Mass Axis Calibration in the Initial Operation Procedure in Chapter 8 NOTE There is a recommended warm up time of 20 minutes for the system once power is applied to the MS Gauge 6 9 1 Transition Bias V6 in Figure 6 16 The Transition plate is one of the most important components of the electrode assembly The Transition Bias Voltage is the negative High Voltage DC bias applied to the transition plate which determines the depth of the electrostatic potential well and has significant impact on 1 ejection frequency of ions 2 mass axis calibration factor 3 RF Vp ejection threshold and 4 Mass Range of the instrument An RF signal is also applied on top of the DC bias and is responsible for the parametric autoresonant ejection of ions from the trap See RF Amplitude Peak to Peak on page 125 for details The factory default setting for the transition plate bias voltage was optimized based on the geometrical design of the trap and rarely requires adjustment For the VQM System the voltage on the transition plate is factory set to 685 V corresponding to a 815 V potential well depth Such voltage provides the specified performance without requiri
141. ection 8 3 2 and 3 Repeller Voltage Optimization Section 7 6 3 Series 830 Vacuum Quality Monitor 143 Instruction Manual 830231 Rev F 144 7 MS Gauge Maintenance 7 6 3 Repeller Voltage Optimization Perform the Repeller Voltage Optimization procedure each time 1 a new filament assembly is installed 2 the filament assembly is repositioned 3 a change in filament bias takes place 4 a change in entry plate bias takes place or 5 a change in electron emission current takes place The repeller plate was specifically designed to 1 mechanically protect the filament coating and 2 optimize the focusing of electrons into the ionization region and through the off axis slit of the entry plate The mechanical alignment between the filament wire and the entry plate slit plays an important role in the coupling efficiency of electrons into the ionization region Small variations in alignments between the filament wire and the entry slit result in 1 decreased peak amplitudes and 2 distorted peak shapes i e shoulders The Repeller bias voltage can often be used to compensate against slight filament variations in alignments Use the following procedure to optimize the coupling of electrons into the ionization region 1 Starting from the Tune panel of the VQM Viewer Software select Advanced Display Advanced and Tuning Display mode Raw nA 2 Set the Repeller bias voltage to 20 V and collect a spectrum Focus on the amp
142. ectra Failure to Z perform the procedure may result in premature sensor degradation and inaccurate data collection The 830 VQM Viewer Application Software provides the fastest and easiest path to access and explore the full functionality of the VQM System The Viewer Software is required for the Initial Operation Procedures described in this chapter Mass spectrometry experts will find that the full set of adjustments advanced settings and peak analysis functions embedded into the Tune screens provide very convenient way to characterize and optimize the performance of the system Vacuum technologists will immediately benefit from the data mining functions built into the application including mass peak finding and gas identification The VQM Viewer Software application provides a full set of functions that quickly and accurately report the 10 most prevalent gases and their partial pressures in a vacuum chamber A data logging engine can track vacuum system pumpdowns including both total and partial pressure information Gas analysis results can be displayed as ratios normalized percentages and absolute values Graphical screen displays show the total pressure partial pressure and full spectral data Partial pressure trend graphs and a leak testing screen allow monitoring specific gas concentrations and partial pressures as a function of time A single gas mass axis calibration engine allows all users to easily calibrate the mass axi
143. ectrometer gauges that have been sitting in ambient air for a few months To minimize gain degradation while no mass spectrometry data is being collected 1 lower the bias to the electron multiplier to 685 V if the filament needs to remain turned ON or 2 remove power from the MS Gauge if the filament does not need to be powered Idle gauges should be proactively protected from 1 contaminant condensation and 2 line of sight deposits Use isolation valves or shutters to protect the MS Gauge from contaminants Use the minimum detector output level i e electron multiplier gain compatible with your detection limit and dynamic range requirements Operating the electron multiplier at high gain creates two potential risks 1 peak clipping due to electrometer saturation i e unreliable data and 2 lifetime and gain stability reduction Use the optional total pressure measurement kit TPMK to actively protect the filament and electron multiplier from overpressure conditions e Perform routine bakeouts of your MS Gauge and vacuum system Do not operate above the maximum recommended pressure or temperature Minimize exposure to contaminants especially hydrocarbons and reactive gases Follow the recommended storage and handling procedures for the MS Gauge and spare electron multipliers See Section 7 2 Do not exceed the maximum recommended bias voltage Note the bias voltage is a negative voltage 7 5 3 Operating Pressu
144. ectron multiplier replacement procedure e After detectable losses in the detection limits of the instrument due to gain degradation e After long storage periods at ambient pressure conditions see Storage Recommendations in Section 7 2 1 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation e When the number of peaks in the spectra increases or decreases significantly relative to the last adjustment procedure During the Electron Multiplier Gain Adjustment procedure the electron multiplier bias voltage is adjusted until maximum peak amplitudes in the mass spectrum reach the 50 nA level i e below the input range of the electrometer this provides the optimal detection limit for the present gas mixture Users able to compromise on detection limits can select lower peak amplitudes i e as low as 10 nA to extend the lifetime of their detectors Since peak amplitudes vary widely with pressure and gas composition the Gain Adjustment Procedure should be repeated each time large changes in pressure range or gas composition are noticed in the vacuum system The gain of an electron multiplier will irreversibly degrade over time and periodic Gain Adjustments will be required in order to preserve peak amplitudes and detection limits The mean time between gain adjustments will be extremely dependent on pressure levels gas composition of the high vacuum environment and peak amplitudes
145. ed at analog ground voltage collects the secondary electrons generated inside the multiplier The electron current is collected by the anode cup and directed into the electrometer s input through a dedicated feedthrough pin The electron multiplier gain is controlled by adjusting the amplitude of the negative high voltage bias applied across the electron multiplier which is a user adjustable setting Increasing the gain of an electron multiplier has two very important consequences on the instrument s performance 1 the sensitivity and dynamic range of the instrument increases and 2 the stability and lifetime of the electron multiplier decreases Most mass spectrometer users are familiar with this delicate interplay between electron multiplier gain stability and lifetime The bias current established by the voltage drop across the resistive glass replenishes the lost charge as secondary electrons are ejected by the avalanche process inside the electron multiplier tube Electron multipliers operate linearly i e fixed gain until their output current is approximately 10 of that bias current For example considering a typical channel resistance of 50 MOhm and a bias voltage of 1100V the bias current is 22 microAmps and the output current must not exceed 2 microAmps In practice the electron multiplier bias voltage is selected so that peak heights in the mass spectra never exceed 60 nA A high electron multiplier gain typically 1000X is re
146. ee eee nee ees 104 Construction Materials oo bck hie Na op qe is Bed wala get neat eS el ad eas 109 lonizer eras ge t A e abate 110 Ion Trap Mass Sep rator e prio er daa dame E wale ek 112 Ton Detector Assembly x2 A Daw ob TOP PEN ae 115 MS Gauge Advanced User Settings icula dee EOV EE ATAKEA PEAREN 118 6 9 Transition Bias io Erran I eer E EEE EEEE EE EEEE AE a PEE 120 6 99 25 Gup Biasi cus An ii a e E ida 120 6 9 3 Pressure Plate Bias eria e yina A ph eae N 121 6 94 Entry Plate Bias Er RR ok ald is Aue EA Vd 121 6 9 5 Exit Plate Blas et A ai wee ea E dida 122 6 9 6 Electron Multiplier Shield Bias 2 cence eena 123 6 9 7 Filament Biase ie iae o ees iad dees E E a a EE EE E SEE eae E ER 123 6 9 8 Repeller Plate Bias voor ii wR a p IRR ua RR Rr e 124 6 9 9 RF Amplitude Peak to Peak sseeeeeeeeeeee nent eet e eens 125 6 9 10 Electron Multiplier Bl s ta da dert exe a RV E A RL ea 127 6 911 Filament Emisiones Be eye ee ina we De A E D es 128 6 9 12 Superharmoniesys cis id ade a y A E eS UR UR Aen aed IUS ee 128 MS Gauge Maintenance nai id isda A A de See UMS 131 Introduction cicer e A ene D eere res Re eO I OUR eq a al d o 131 Unpacking Handling and Long Term Storage 131 7 2 1 Storage Recommendations 0 eee he 131 Bakeout Procedures cts e bere er red aed d ei ed e seda e dad ree a 132 Environmental Requirements ois essa pan eoe ce ee tenet eee a 134 7 4 Pressure Ranges cai A Vid eked an
147. egradation over time as the MS Gauge is operated The MS Gauge should be turned OFF when not in use to extend the lifetime of the Gauge and minimize the mean time between services 1 Complete the Electron Multiplier Preconditioning procedure See Section 8 3 3 2 Access the Summary panel of the VQM Viewer Software Averaging Mode Running Average Avgs to Collect 25 or higher 3 Access the Tune Panel of the Viewer Software Advanced Display Advanced Tuning Display Mode Raw nA Restore the controller to default settings clicking on the Restore Factory Setting button If necessary set the EM Bias voltage to 925 V Turn ON the Mass Spectrometer Gauge 1 Press the Mass Spec Button on the front panel of the instrument or 2 click on the Mass Spec button on the Viewer Software control bar Wait for the unit to warm up See Section 7 4 4 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 154 8 Viewer Software amp Initial Operation 7 Press the Scan button on the Controller or click the Scan icon in the Viewer Application to enable continuous scanning 8 Step the EM Bias Voltage in 20 V increments until any of the peaks in the mass spectrum reaches a 50 nA amplitude WE 830 VQM Viewer Software Simplicity s Solutions AUTOSCALE X AUTOSCALE Y amp Leak LogData Save dh 7 Trend i Summary Histogram Hash User Settings to EEPROM Restore User Sett
148. el Outputs Trigger Logic TTL Active HIGH The output level becomes High as the MS scan is initiated The output becomes Low again at the end of the scan Use the rising edge to trigger external DAQ systems Use the length of the pulse to frame the scan The output trigger pulse remains low between completion of the previous scan and the start of a new scan in continuous scan mode 2 4 6 Analog Input Output Specifications Table 2 7 Analog Input Output Connections Port Specification Analog IN port BNC Input Impedance 10K Q Voltage Range 0 10 V ADC Specs 12 bit resolution Analog OUT port BNC Output Impedance 100 2 Voltage Range 0 5 V Trans impedance Gain 2X electrometer voltage output with 30kHz low pass filter Analog IN Use the Analog IN port to connect sensors with analog voltage signal outputs to the VOM Controller This functionality allows sensor integration and signal synchronization The Analog IN port is electrically connected to a 12 bit ADC converter and can be treated as a total pressure input by the VOM Viewer Software See Section 5 5 3 Analog OUT Use the Analog OUT port to monitor the voltage output of the electrometer during MS Scans The Analog OUT port is electrically connected to the voltage output of the electrometer via a gain 2X voltage amplifier which also has a 30 kHz low pass filter attached to its output The MS analog out signal is available for each executed MS scan
149. endent source A dedicated command is also available to turn the Micro lon Gauge OFF while the VQM Controller is ON Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 61 5 VQM Controller Overview 5 4 3 SCAN Button LED Toggle the SCAN button to manually Start Stop Mass Spectrometry MS Scans MS Scan START When the SCAN Button LED is illuminated press the SCAN button to initiate continuous MS scanning The SCAN button LED Trigger out LED and Analog I O Out LED blink ON OFF each time an MS Scan is executed The TRIGGER IN port becomes disabled while continuous scanning is active MS Scan STOP Press the SCAN button to interrupt execution of continuous MS scanning The TRIGGER IN port becomes enabled once continuous MS Scanning is interrupted The SCAN button illuminates with a single color LED Green which indicates the status of the MS Scan functionality of the instrument Table 5 3 SCAN Button LED Power Modes LED Illumination Green Power Status Description OFF Disabled The MS Gauge is turned OFF and the instrument is unable to initiate MS scans The Controller is unable to execute MS Scans because 1 The MS Gauge is turned OFF or 2 System errors prevent the Controller from executing MS scans ON Enabled The MS Gauge is turned ON and the instrument is ready to produce MS scans MS scans can be initiated by 1 Pressing the Scan Button continuous scanning 2 Applying external t
150. ent Response is in the format D DDDDDDESDD where D is an integer 0 9 and S is either or Example 1 302883E 02 the voltage of the Entry Plate is 130 2883V if the ENTR is the current logical instrument SCALar CURRent DC Defined only for the FIL logical instrument In FIXed mode measures Filament Power Supply current In ADJustable mode not available Response is in the format D DDDDDDESDD where D is an integer 0 9 and S is either or Example 4 256928E 00 the Filament Power Supply current is 4 25W SCALar POWer DC Defined only for the FIL logical instrument Measures the Filament power in FIXed mode Not defined in ADJustable mode Example 5 044541E 01 the Filament power is 0 5W SCALar PRESsure Defined only for the ETPR logical instrument Responds with the current total pressure if available in the current ETPR pressure units 9 999999E 99 if the total pressure is not available The response format is D DDDDDDESDD where D is an integer 0 9 and S is either a or Example 2 190000E 08 the current total pressure is 2 19E 08 Torr assuming the current ETPR units are Torr ARRay SPECtrum Defined only for the MSP logical instrument Responds with the current mass spectrum in the Data Interchange Format See Section 9 6 196 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 9 9 MEMory Subsystem T
151. ent at 303 652 4400 for troubleshooting help over the phone If a product must be returned to the factory for service request a Return Material Authorization RMA from Brooks Automation Granville Phillips Do not return products without first obtaining an RMA For vacuum gauges including the VQM lon Trap Mass Spectrometer Gauge a hazardous materials document may be required The Brooks Automation Granville Phillips Customer Service Representative will advise you regarding the required hazardous materials document and procedures When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the VQM Controller chassis must be handled using proper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility Before you return products to the factory obtain an RMA number by contacting Granville Phillips customer service Phone 1 303 652 4400 or 1 800 776 6543 within the USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Phone 1 800 367 4887 within the USA 24 hours per day seven days per week Email co csr brooks com For Global Customer Support go to www brooks com and click on Services to
152. er Rear Panel 3 6 4 Micro Ion Gauge TPMK Connection Procedure 1 Connect the Micro lon Gauge TPMK to the VOM Controller using the TPMK interconnect cable DC power and communications with the Micro lon Gauge are provided through the 15 pin connector labeled TOTAL PRESSURE on the rear panel of the VOM Controller Connect and secure the TPMK interconnect cable between the VOM Controller and the Micro lon Total Pressure Measurement Gauge NOTE Be sure that the DC power to the VOM Controller is 24 Vdc 75 Watts when using the Micro Ion Gauge See Table 2 2 on page 22 NOTE The Power button on the VOM Controller also controls power to the Micro Ion Gauge If power is turned OFF to the VOM Controller power is also turned OFF to the Micro Ion Gauge Users requiring independent power control for the Micro Ion Gauge need to use a different wiring setup where power is provided from an independent source The connector on the Micro Ion Gauge is illustrated in Figure 3 11 15 Pin Total Pressure Pin assignments Measurement Kit Connector 2 amp 8 24 Vdc Output to 390802 5 amp 15 24 V Power Ground 7 amp 12 Signal Common 13 RS 485 A 14 RS 485 B Figure 3 10 External Total Pressure Gauge Connector on the Rear of the VOM Controller Series 830 Vacuum Quality Monitor 37 Instruction Manual 830231 Rev F 38 3 Hardware Installation 24 Vdc Power Input Calibration Degas ON RS 485 A Rela
153. er operation of the Overpressure Protection Mode that is available when a TPMK is connected to the VOM Controller See Autopressure Mode on page 81 and Overpressure Protection on page 82 5 6 Rear Panel Controls and Interconnects There are three connectors and a grounding lug on the back panel of the VOM Controller 1 TOTAL PRESSURE Connector Section 5 6 1 A O N MASS SPEC Connector Section 5 6 2 24 Vdc 75 W Connector Section 5 6 3 Grounding Lug Section 5 6 4 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 69 5 VQM Controller Overview 5 6 1 TOTAL PRESSURE Connector The TOTAL PRESSURE connector 15 pin D type provides power and an RS 485 communication link for the optional Micro lon Gauge TPMK 15 Pin Total Pressure TOTAL PRESSURE Measurement Kit Connector Figure 5 4 Total Pressure Connector on the rear of the VOM Controller The TOTAL PRESSURE port provides 24 Vdc power to the TPMK when 1 the VQM Controller is powered up front panel 2 power is cycled front panel or 3 when the ETPR logical instrument is turned ON VOM Command Set The 24 Vdc power is routed from the power supply connected to the 24 Vdc 75 W connector which is located on the rear panel Once 24 Vdc power is applied and the TPMK powers up the VQM Controller attempts to establish communication with the Micro lon Gauge module through the RS 485 address 2 communication link during POST The E
154. er plate is preferred because it simplifies the electrical scheme required to symmetrically distribute the RF through the trap and also has been shown to eject ions at twice the natural frequency of oscillation of the ions Center plate excitation has also been shown to produce fewer spurious peaks due to sub and super harmonic excitation i e parametric excitation The peak to peak amplitude of the RF signal RF Vy is controlled through the RF Amp P P adjustment in the Tune Settings of the VQM Viewer Software RF Vip 0 12 x RF Amp P P Where RF Amp P P 0 1 2 V Tune Settings Adjustment V RF Vpp 0 144 mV Peak to peak RF signal on the transition plate mV The VQM MS Gauge operated under default bias voltage settings operates with roughly 60 mV of RF Vip i e RF Amp P P 0 5 V between 2 65 MHz and 215 KHz in an 80 msec scan time The frequency range and scan profile are fixed The RF Vpp may need to be occasionally adjusted to 1 Modify optimize peak intensities and resolution in the mass spectra Adapt to pressures close to the 1E 5 Torr upper limit of the sensor Correct against transition cup pressure plate bias voltage changes Correct against changes in trapping potential symmetry i e exit plate bias changes Correct against changes in filament slit alignment at the entry plate Q Em ms eorom Minimize the contribution of sub and superharmonic peaks to mass spectrum see Section 6 9 12 The RF V ad
155. er within A Z and D is a number within 0 9 Hardware revision Not used Firmware revision Indicates the revision of the firmware DD DDD DDDD where D is a number within O0 9 lOSTatus VALues physical IO Logical Instruments lt LF gt Indicates the input output status of the physical I O and the logical instruments physical IO Not Used Logical Instruments 32 bit number representing the output state of the logical instruments Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 9 830 VQM Command Set Bit 0 Not Used Bit 1 Not Used Bit 2 EMUL Bit 3 EMSH Bit 4 EXIT Bit 5 TPL Bit 6 CUPS Bit 7 PPL Bit 8 ENTR Bit 9 DDS Bit 10 REP Bit 11 FIL Bit 12 ETPR Bit 13 Not Used Bit 14 DET Bit 15 MSEP Bit 16 ION Bit 17 MSP Bit 18 31 Not Used REGisters VALues lt STB gt lt SESR gt lt OPERation Condition gt lt OPERation Event QUEStionable Condition QUEStionable Event gt lt LF gt Status Event Registers not currently used ERRors COUNt number of errors gt lt LF gt Status of the Error Event queue number of errors integer indicating the number of errors DIMension FREQuency TYPE IMPLicit UNITS HZ lt LF gt DIMensionzAMPLitude TYPE EXPLicit UNITS lt LF gt Information about the x axis and y axis of the data The x axis is in hertz and the y axis is unitless ADC counts DATA
156. erharmonics dropout of a spectrum by increasing the voltage on the exit plate 3 Electron energy The threshold for ejection of superharmonics is related to how deep within the potential well the ions are formed lons formed closer to the entry plate i e higher energy require less excitation to exit the trap resulting in lower ejection thresholds As a result any time the electron energy is reduced and ions are formed closer to the back surface of the entry Series 830 Vacuum Quality Monitor 129 Instruction Manual 830231 Rev F 130 6 lon Trap Mass Spectrometer Gauge plate a relative increase in the contribution from superharmonics is observed This is also the reason why superharmonic peaks become more noticeable i e increase in magnitude when the exit plate voltage is reduced i e made more negative As the electron energy is reduced and the electrons track shorter arches ions are formed closer to the entry plate s back plane and it is easier to eject them from the trap This is also conducive to increased levels of superharmonics Filament Alignment Filament alignment also affects the ejection threshold of the ions since it defines the exact location within the potential trapping well where the ions are formed Filament alignments that push electrons further into the trap generally increase the ejection threshold for ions and reduce the chances of having superharmonics in the spectra Trap potential well As the poten
157. eries 830 Vacuum Quality Monitor 115 Instruction Manual 830231 Rev F 116 6 lon Trap Mass Spectrometer Gauge The combination of 1 electron multiplier negative high voltage bias and 2 electron multiplier shield bias voltage directs the ions ejected from the trap into the multiplier s conversion dynode secondary electron generation and converts the impinging ion current into a proportional electron current through an avalanche electron multiplication process The VQM Controller contains all the necessary voltage supplies required to independently bias each detector component and a high speed electrometer to collect the output of the electron multiplier All detector settings are user adjustable through the Tune Settings of the VQM Viewer Software and through the VQM Command Set Table 6 4 lon Detector Default Values Detector Assembly Default a Comments Settings Value Electron Multiplier 127 The electron multiplier shield is typically biased at a voltage within a few volts of Shield Voltage the exit plate bias voltage The electron multiplier shield voltage is adjusted to optimize the coupling of ions into the conversion dynode Adjust the EM Shield voltage each time the Electron Multiplier bias voltage is changed to provide maximum signal levels Electron Multiplier 925 The electron multiplier bias voltage defines the gain of the multiplier Bias Voltage The electron multiplier gain degrades over time
158. ernal total pressure data acquisition and display OO CON ue X O Host PC MS data acquisition and display 9 Analog input signal digitization Comments e Valid external trigger pulses can be used to execute single MS scans If a valid USB Link is Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 87 5 VQM Controller Overview present MS data is transmitted to the Host PC at the end of each scan if requested with a FETCh Command e The user must be careful not to over trigger during external trigger MS scan control or a system error is generated and the over trigger counter is incremented Manual Scan Start disables the external trigger input port NOTE When the Scan button is pressed to initiate a Manual Scan the Trigger IN LED is turned OFF The Output trigger port and Analog signal output port are enabled by factory default The VOM Viewer Software supports displaying and capturing externally triggered scan via MS Power ON and Scan OFF 5 12 3 Stand Alone Setup This setup takes advantage of the fast pulsed scan operation of the MS Gauge and does not require a Host PC for data acquisition and control This setup relies exclusively on manual MS scan control and uses external fast DAQ systems to collect store display all MS data This setup is useful for users who do not have access to space for or the power required to operate a Host PC do not have a USB port in their embedded comp
159. es as required for autoresonant ejection of ions from the MS Gauge The 1 f scan profile is optimized to provide efficient ejection of ions across the entire mass range of the instrument For default instrument settings i e 616 kHz ejection frequency for water at 18 01 amu typical this frequency range provides ejection of ions between 1 and 146 amu In actual implementation the phase continuous 80 msec frequency sweep profile is approximated with a sequence of 40 linear frequency sweep segments 2 msec increments as described in the following table Phase continuity is guaranteed through all segment transitions The overall sweep time is 80 msec and a framing pulse available from the TRIGGER OUT port indicates the beginning and end of the frequency sweep Table 5 11 Frequency Range Time msec Frequency Hz ee Mass amu amp 0 2650001 663 0 97321 2 2078405 546 1 5821 4 1691510 462 2 3886 6 1432731 400 3 3294 8 1244541 353 4 4125 10 1098762 316 5 661 12 983748 286 7 0621 14 890444 261 8 6196 16 813817 240 10 319 18 748690 222 12 193 20 693628 207 14 205 22 645897 193 16 382 24 604349 182 18 712 26 567832 171 21 196 28 535845 162 23 834 30 506588 154 26 631 32 480710 146 29 576 34 457276 139 32 685 36 435998 133 35 953 38 416590 127 39 381 40 398907 122 42 949 42 382661 117 46 674 44 367709 113 50 546 Series 830 Vacuum Quality Monitor
160. es for emergent ions f will follow a strict fe proportional to 1 sqrt M q dependence Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge Ia Ejection Frequency vs Mass N3 28 amu Hj 2 amu Freq 1713 kHz 0 84 S 064 gt oO jo 4 o N E 04 o CO 44 amu z Freq 364 kHz 0 24 0 0 T T 400 600 800 1000 1200 1400 1600 1800 Ejection Frequency kHz The ejection frequency for water was 571 kHz The inner plot shows the linear relationship between mass and 1 sqrt M q Figure 6 10 Mass Spectrum Representing the Relationship Between Ejection Frequency kHz and Mass AMU In the VQM System the RF drive is applied to the transition plate so that ion energies are excited parametrically i e ejection frequencies correspond to twice the natural oscillation frequency NOF Since the transition plate electrode is biased at a negative high voltage potential transformer coupling is used to float the RF signal frequency chirp on top of the DC bias voltage The high voltage compatible RF transformer is located inside the gauge connector plug of the Controller to MS Gauge interconnect cable The RF frequency is swept non linearly with time in an effort to 1 equalize the number of RF cycles used in ejection of each M q unit and 2 minimize the dependence of ion ejection efficiency on mass to charge value In addition the RF signal is ramped fro
161. eter is also ported to the Analog OUT connector during this time The data collected Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 91 92 5 VQM Controller Overview from the Analog OUT during the framed Digital Output pulse represents the spectrum as Analog OUT voltage vs time data The time scale must be converted to frequency and then mass to obtain mass information See Table 5 11 This is the most predicable case because all activities involved are deterministic to within a few microprocessor clock cycles therefore the data output will be very regular 5 13 3 Internal Trigger with USB Data Regardless of whether or not the FETCh command is received the VQM Controller continuously fills a fixed buffer with the current scan DIF header and scan data All timing described in the previous section holds This section will discuss only how the FETCh command affects the timing when internal triggering while asking for data via USB The situation is very similar to internally triggering except that the VQM System can receive a query for the data collected to be transmitted to a host computer at any point during the Total Scan Time If a FETCh command is received a new trigger will not be initiated until the VQM System detects that the entire data buffer has been transmitted to the Host PC Start Scan T1 3 5 ms If a FETCh command is received in this region only the DIF header is available The DIF header wi
162. ewer Software amp Initial Operation 8 4 6 Trend Trend The Trend Screen displays a Trend graph with a longer history than the Trend graph on the Summary screen It may be valuable for tracking pumpdowns or other longer term vacuum processes To fit a longer time scale on the graph graph points may be discarded Use the Trend graph on the Summary Screen to capture view transient behavior 830 VQM Viewer Software File Help f 5 b w 6 5 amp UB simniicitula ue Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save utions EAS ad Norm Absolute ede PLIN S gt gt gt a e a a v a m m a a Total Pressure Average Total Pressure 1 30E 8 Torr WX Current Total Pressure 1 30E 8 Torr Post Processing Averaging Mode Avgs to Colect Avgs Collected Cumulative Moving Avg A 10 10 i i D i i i Response Time 0 10 04 40 10 04 42 10 04 44 10 04 46 10 04 48 10 04 50 10 04 52 10 04 53 Time Autoscale Y Axis 1 Events Figure 8 13 Trend Screen Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 165 8 Viewer Software amp Initial Operation D Leak 8 4 7 Leak The Leak Detection Screen provides a visual indication of whether the user selected leak mass is above or below a user selectable leak limit The partial pressure of the leak mass is compared to the leak pressure limi
163. external signal is applied to the Trigger IN port 8 2 VQM Viewer Application Icons and Screen Displays When the VQM System is connected to a Host PC with the VQM Viewer Software the displays on the computer monitor enable the user to select and view many functions and readouts A row of icons across the top of the screen provide quick links to operation and preference functions Different live displays of scan data show the pressures trends and the gases in the vacuum chamber up to 10 gases 830 VOM Viewer Software File Help cu bod uw 6 Y 3 4 a Simplicitu Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune LogData Save So utions Figure 8 1 Program Control Icons The icons listed across the top of the screen allow the user to select numerous functions and settings when using the VQM System The first group of icons on the left side of the screen are the main primary functions The second group of icons control the data display modes of operation and system settings preferences The third group of icons are the logging and save functions The icons have an up slightly elevated state indicating that it is currently inactive and a down slightly depressed state indicating that it is currently active Help files are available at any time the Viewer Software is active Press Control H on the keyboard and hover the cursor over any of the icons for a short description of its function 8 2 1
164. for the presence of a filament wire The first filament connection check takes place right after Power On Self Test POST and is continuous as long as the Controller is powered up If an MS Gauge connection error is detected the MS Gauge is automatically turned OFF MS Scan is disabled and the System Error LED Red is illuminated Blink Red POWER ON The MASS SPEC Button Red LED System Error LED blinks for Over trigger Error each external trigger pulse received before the ongoing scan is completed When external pulses are used to trigger MS Scans it is important to assure that the previous scan is completed before a new trigger is issued If triggers are delivered at a rate faster than the MS Scan rate the System Error LED Red blinks every time an over trigger is detected Adjust the trigger rate from the external source until the blinking stops An over trigger counter keeps track of the problem NOTE The SCAN button illuminates as soon as the MASS SPEC Button LED turns ON Wait for a minimum of 15 seconds before starting to perform mass spectrometry scans This is to allow time for the voltages and currents to be properly set on the trap electrode structures and to assure proper mass axis calibration in the mass spectrometry system Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview 5 5 Front Panel Connectors There are four BNC connectors and one USB port on the f
165. g reported by the Autopressure Mode exceeds the extreme High Pressure Threshold Operation of an MS Gauge at a pressure above PEH compromises the filament and the electron multiplier detector and also creates the possibility of internal arcing inside the electrode structure An Extreme Overpressure Code 800 error is added to the Error event queue when an MS Gauge is turned OFF by an extreme overpressure event 3 High Pressure Threshold The MS Gauge will be turned OFF if the pressures reported by the TPMK starts above the High Pressure threshold stays above the Low Pressure threshold and stays below the Extreme Pressure threshold for more than 2 seconds An overpressure code 801 error is added to the error event queue when an MS Gauge is turned OFF due to this sort of error Total Pressure Torr The MS Gauge is immediately turned OFF in the Exfi me Extreme High Pressure range and 800 Extreme High Over Pressure is added to the error event queue 9 Pressure High Pressure Low Pressure Time Figure 5 10 VOM System Overpressure Diagram NOTE Overpressure protection for the MS Gauge is a standard function of the VOM Controller when an optional TPMK is used Overpressure protection is also available through the VOM Viewer Application Software If total pressure is available to the Viewer Software i e TPMK or an external Granville Phillips Series 370 ion gauge controller is connected to the Analog
166. ge of the electrometer during initial operation The Electron Multiplier Gain Adjustment procedure must be executed to avoid electrometer overloads and peak clipping in the mass spectra The Mass axis calibration factor must be verified and recalibrated if necessary during the initial operation procedure for the gas identification routines of the VQM Viewer Application Software to operate properly NOTE A Host PC and the VQM Viewer Software are required to complete some of the procedures described in the following sections For Stand Alone operation i e without a Host PC connection consult the factory for instructions that do not require the VQM Viewer Application Software 8 3 1 Initial Pump Down 8 3 1 1 Background Each individual Mass Spectrometer Gauge is 1 cleaned 2 leak checked and 3 operated under high vacuum conditions during a thorough test verification procedure which includes monitoring the outgassing levels from the internal structures of the mass spectrometer gauge all sensors must deliver UHV compatible performance prior to shipment However surface accumulation of contaminants such as water and plasticizers i e from packaging material should be expected during transport Thus it is very important to perform an initial pump down of the MS Gauge prior to its first activation The initial pump down procedure requires the presence of a high vacuum compatible total pressure gauge on the vacuum chamber to detect 1 l
167. h poor conductance paths or connections are used 5 7 2 RF Signal Generator The VQM Controller includes a Direct Digital Signal Synthesizer DDS capable of delivering phase continuous RF frequency sweeps of constant amplitude to the MS Gauge as required for autoresonant ejection of ions from the ion trap The RF signal is applied to the transition plate of the Autoresonant lon trap on top of the negative HV DC trapping potential transformer coupling resulting in ejection of ions at twice their natural oscillation frequency NOF The amplitude of the RF signal is kept constant throughout the frequency sweep and can be adjusted by the user through the VQM Command Set DDS_Ref adjustment Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview NOTE The RF coupling transformer is located inside the MS Gauge connector of the gauge controller interconnect cable Placement of the transformer close to the MS Gauge head allows efficient transfer of the RF power to the gauge and reduces power consumption The VQM Instrument offers a single frequency sweep profile Frequency Span 2 65 MHz to 216 kHz phase continuous Amplitude Constant throughout the scan user adjustable between 5mVpp 150mVpp Scan Profile 1 f meaning that d 1 f dt constant throughout the scan Sweep length 80 msec 40 segments 2 msec each The DDS chip starts at high frequencies and scans towards lower frequenci
168. h reading every 2 688 milliseconds average of 32 digitizations which is added into an eight register moving average array Note in a moving average register array the oldest reading is replaced by the latest reading on each 2 688 ms update The eight register values are averaged and time stamped each time the user requests an analog input voltage value from the command interface and each time a FETCh Command is received by the VQM Controller The Analog IN LED illuminates with a single color Green and is permanently ON e Connector Type BNC Input Impedance 10K Ohm Voltage Range 0 10V e ADC Specs 12 bit resolution A common application of the Analog IN port is to collect total pressure readings from the analog output signal of ionization gauge controllers An optional cable is available from Granville Phillips to allow connection of the Analog IN port of the VOM Controller to the analog output signal port of Series 370 Stabil lon Controllers The Viewer Software is able to convert the analog voltage signal from Series 370 Controllers into total pressures that are then used to display total pressure provide overpressure protection and allow absolute partial pressure calculation from ratiometric gas composition data 5 5 4 Analog OUT BNC Connector LED Use the Analog OUT port to monitor the voltage output of the VOM Controller s electrometer during MS Scans The analog OUT port is electrically connected to the voltage output of t
169. he trap before scattering collisions prevent them from being effectively extracted Kicking the ions harder with higher RF values forces them to exit the trap sooner and without losses to scattering collisions If the depth of the trapping potential is increased the amplitude of the RF excitation needs to be increased as well since the ions need to be excited out of a deeper well In other words the ejection threshold increases as the ions need to gain more energy to get out of the trap The AC excitation amplitude RF Vpp should also adjusted based on the exit plate voltage setting As the exit plate bias voltage decreases i e goes further below the entry plate it becomes easier to eject ions with lower RF V values i e their ejection thresholds decrease However as the exit Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge plate voltage drops it is also common to see a higher presence of mass peaks due to superharmonics and increased contribution of baseline offset to the signal There is a strong relationship between RF Vip and exit plate bias voltage when off axis electron ionization is used The reason is simple the ions are formed deep within the potential well when off axis ionization is used As a result higher RF V thresholds are required to eject ions from the trap than when off axis electron ionization is used As the voltage on the exit plate is dropped more nega
170. he ETPR logical instrument is selected autopressure mode and over pressure protection is enabled Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 197 9 830 VQM Command Set 9 11 SOURce Subsystem The Source subsystem provides control for all logical instruments that primarily source signals such as all the power supplies that create the ion trap voltage gradient Table 9 9 Source Commands Keyword Parameter Form Comments SOURce CURRent LEVel IMMediate AMPLitude current DEF MIN MAX Defined only for the FIL logical instrument Not defined in FIXed mode Sets the Emission Current in ADJustable mode Example SOUR CURR 70E 6 sets the Emission Current setpoint to 70pA AMPLitude MIN MAX Defined only for the FIL logical instrument Queries the Emission Current setpoint or the minimum and maximum possible setpoints in ADJustable mode Not defined in FIXed mode Response is in the format D DDDDDDESDD where D is an integer 0 9 and S is either or The number will be prefixed with a minus sign if the value is negative Example 7 000000E 05 the Emission current setpoint is 70 pA MODE ADJustable FIXed Defined only for the FIL logical instrument See Figure 9 3 Used to determine if Filament power is adjusted to establish a particular Emission Current Filament Bias voltage or fixed to a set power Example SOUR MODE AD sets
171. he MASS SPEC button to turn ON the MS Gauge assuming pressure is below 1x10 Torr Once the MASS SPEC button becomes illuminated the SCAN LED button becomes illuminated to indicate that the instrument is ready to scan Press the SCAN button to perform MS Scan Start or apply external trigger pulses to the external trigger IN port to perform external trigger MS Scan Start Use the VQM Viewer Software or custom application to control the MS Scan or to acquire MS Data provided by the external trigger or manual MS Scan control 5 9 2 Power OFF Sequence The power OFF sequence for the VQM Controller 1 removes power charge from the MS Gauge 2 removes power from the Micro lon Gauge TPMK 3 disables all front panel input and outputs including the USB link and 4 puts the VOM Controller into standby mode 1 Press the Power button to turn OFF power to the VQM Controller All operation and scan functions are disabled and the VQM Controller enters the Stand by power mode All scan trigger and I O functions are disabled and all LEDs are OFF not illuminated 5 9 3 Power On Self Test A Power ON Self Test POST procedure is executed as soon as the VQM Controller is first turned ON POST does not require an MS Gauge connection to operate The purpose of the POST procedure is to make sure the power supplies voltage and current built into the VOM Controller operate properly During POST power modules are powered sequentially to safe voltages
172. he Memory subsystem controls access to the VQM non volatile memory NV RAM Table 9 7 Output Commands 9 830 VQM Command Set Keyword Parameter Form Comments MEMory STORe Store current settings in RAM as User Settings in NV RAM The MSP logical instrument must be OFF LOAD Load stored User Settings in NV RAM to current settings in RAM New settings take affect immediately The MSP logical instrument must be OFF 9 10 OUTPut Subsystem The Output subsystem controls the output for the currently selected logical instrument Table 9 8 Output Commands Keyword Parameter Form Comments OUTPut STATe OFF ON Only defined for the MSP and ETPR logical instruments Disables or Enables the output for the selected instrument Example OUTP OFF disables all the lon Trap voltages and the Filament Power Supply if the MSP logical instrument is selected Disables the power to the External Total Pressure instrument if the ETPR logical instrument is selected this disables Autopressure mode and over pressure protection STATe Only defined for the MSP and ETPR logical instruments Responds with 1 or O to indicate if the currently selected logical instrument s output is ON or OFF Example 1 the lon Trap voltages and the Filament Power Supply is enabled if the MSP logical instrument is currently selected Power is applied to the External Total Pressure instrument if t
173. he RF V also applied to the transition plate required to auto resonantly eject ions The RF Vpp threshold is the minimum RF peak to peak voltage amplitude required to eject ions from the trap and is a critical specification for the MS Gauge In general the RF V threshold increases in amplitude as the potential well gets deeper i e the ions need to be kicked harder to eject them from the trap As the potential well gets shallower the amplitude of the RF Vpp required to eject ions gets smaller 6 9 2 Cup Bias V5 in Figure 6 16 The two cups entry and exit are 1 electrically connected inside the gauge 2 biased to identical DC voltages through a single feed through pin and 3 AC coupled to the transition plate through high voltage HV capacitors The two coupling capacitors along with two DC isolation resistors are located inside the gauge connector plug of the Gauge to Controller interconnect cable Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge The Cup Bias voltage generally does not need to be adjusted unless changes in the transition plate voltage take place Cup Bias must be optimized each time the Transition Bias V6 is modified The optimal voltage is selected by adjusting the cup potential until the maximum intensity is achieved for all peaks in the mass spectrum There is usually a narrow range of cup voltages i e a few volts that leads to optimal trap
174. he communication interface The Power ON sequence includes a Power On Self Test POST procedure The LED blinks ON OFF while POST is performed If a TPMK is available power is applied to the TPMK before POST Starts but communication with the Micro lon Gauge first occurs after POST to allow the Micro lon Gauge to establish communication A dedicated command is available to turn the TPMK logical instrument OFF i e remove power when the Controller is ON Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview 5 9 Power ON OFF Sequence Be aware that the Mass Spectrometer Gauge MS Gauge will not always be under vacuum when the VQM Controller is first turned ON NOTE Do not apply power to the MS Gauge until the pressure in the vacuum chamber is 1x1075 Torr and instructed to do so in the Initial Operation Procedure in Chapter 8 5 9 1 Power ON Sequence The power ON sequence for the VOM Controller 1 performs a complete Power On Self Test POST of the Controller 2 confirms the presence of an MS Gauge connection 3 searches for an available TPMK connection 4 allows troubleshooting in case of a system error 5 enables stand alone functionality i e analog and trigger I O signals and 6 allows connection to Host PC via the USB Link 1 Connect a 24 Vdc power supply to the VOM Controller The VOM Controller remembers the power mode from the last time it was connected
175. he desired rate It is recommended to use an external trigger rate of 10 Hz 100 ms period or less USB Data Transfer Behavior When using USB for data transfer there are cases that could arise if the USB cable is removed while triggering or transferring data If the user is not FETCh ing and internally triggering continuously and the USB cable is removed the unit will continue triggering and the buffer overwrite counter Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview will continue to increment If the user is FETCh ing and the USB cable is removed the VQM Controller will lockup if all of the data has not been transferred The VQM Controller should be power cycled at this point and the USB cable should be plugged back in Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 95 96 5 VQM Controller Overview Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 6 Ion Trap Mass Spectrometer Gauge 6 1 Introduction to the MS Gauge This chapter describes the design and principles of operation of the VQM lon Trap Mass Spectrometer Gauge 6 2 Terms used in this chapter Table 6 1 Terms and Definitions Term Meaning Controller The VQM Mass Spectrometer Gauge Controller See Figure 6 1 lonizer The region of the ion trap where ions are formed from gas molecules by electron impact ionizati
176. he electrometer through a 2X voltage amplifier with 30kHz low pass filter response An MS Analog OUT signal is available for each executed MS scan time framed by the Trigger OUT pulse e Connector Type BNC Series 830 Vacuum Quality Monitor 67 Instruction Manual 830231 Rev F 5 VQM Controller Overview Output Impedance 100 Ohm Voltage Range 0 5 V e Trans impedance Gain 2X trans impedance gain of the electrometer Filter 30 kHz low pass Table 5 7 Analog Out Connector LED LED Illumination Analog OUT Port Description Green Status OFF Disabled The Analog OUT port is disabled No analog output signal is available from the Analog OUT port ON Enabled The Analog OUT port is enabled The output of the electrometer is connected to the Analog OUT port through a 2X voltage amplifier buffer Blinking Scanning The Analog OUT LED blinks OFF each time an MS scan is executed The Analog OUT port is enabled when the VOM Controller is turned ON Digitize the MS analog output signal using an oscilloscope fast ADC or data logger Use the external trigger OUT pulses to frame the MS Analog OUT signal provided during each scan 5 5 5 USB Port LED Use the USB port to connect the VOM Controller to a Host PC Connector Standard Type B e Data rates Full Speed 2 0 12 Mb sec NOTE Windows PC users must install a Virtual COM port driver to be able to communicate with the VOM Controller over USB An i
177. ical Instruments The VOM System can be thought of as several instruments in one the same way a digital multi meter is an ohmmeter voltmeter ammeter etc The system contains power supplies voltage biases on the ion trap electrodes and power for the filament ammeter electrometer and a waveform generator RF source These components make up the lower level logical instruments The VOM System uses these lower level logical instruments to create higher level logical instruments the Mass Spectrometer lonizer Mass Separator Micro lon TPMK and External Signal Analog input Since the VOM System is many instruments in one the Command Set interface is separated into many different logical instruments using the INSTrument Subsystem Section 9 7 This allows the same command to perform different actions depending on the currently selected logical instrument All commands in the VOM Controller are sequential Execution of a command finishes before starting the execution of the next command If a command is received before the previous command is finished executing it will queue to be processed 187 188 9 830 VQM Command Set lonizer Entry Plate Repeller Filament Mass Spectrometer Mass Separator Pressure Plate Transition Plate Exit Plate External Signal External Total Pressure Detector Electron Multiplier Electron Multiplier Electrometer Electron Multiplier Sh
178. ications Table 2 4 VQM Viewer Software Specifications Parameter Specification Top Ten Gases Display Table Automatic listing by species or amu The Viewer Application software has a library of 10 gases Hydrogen Helium Nitrogen Oxygen Water Carbon Monoxide Argon Carbon Dioxide Krypton and Neon Total Pressure Trend Graph Range ATM to 10 Torr Requires Micro lon ATM Gauge Total Pressure Measurement Kit TPMK Pressure Trend of User Selected Gases or Masses 10 maximum user selection in display table Sensor Spectrum Displayed 1 135 amu Capture Display Information 1 135 scan total pressure timestamp Logging VQM Data Comma separated variable csv MS Excel Compatible 1 135 scan total pressure analog input timestamp settings VQM Controller Configuration Mass Spec Mode ON OFF Acquisition via application control or external trigger control Mass Spectrometer Calibration single gas mass manual Leak Detection User assigned detection mass Specifications and dimensions are subject to change without notice 2 4 4 Host PC Requirements The VQM System can be used without a Host PC A Host PC is required 1 to use the VQM Viewer Application Software 2 control the VQM Controller from a remote location or 3 program additional control functions that provide process automation or input output data Table 2 5 Host PC Requirements Par
179. ield The Entry Plate is used in the lonizer to establish emission and in the Mass Separator as part of its voltage gradient Figure 9 1 VOM System Logical Level Hierarchy Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 9 830 VQM Command Set 9 1 3 Command Format used in this Instruction Manual The command syntax shows most commands and some parameters as a mixture of upper and lower case letters The upper case letters indicate the abbreviated spelling for the command For shorter program lines send the abbreviated form For better program readability send the long form Commands are not case sensitive Each command consists of a header and zero or more parameters The header and the parameters are separated by a white space ASCII code 0x20 The headers consist of one or more keywords separated by colons Queries are formed by directly appending a question mark to the header All commands are terminated by pressing the return key on the keyboard CR 0x0D The return format for responses formatted with CR except for FETCh are explained in Section 9 2 Sample Command VOLTage DC RANGe lt range gt MINimum MAXimum CR In the sample syntax statement above VOLT and VOLTAGE are both acceptable terms You can use upper or lower case letters VOLTAGE volt and Volt are all acceptable Other forms such as VOL or VOLTAG will generate an error Table 9 1 Symbols used in SCPI Comma
180. ies 830 Vacuum Quality Monitor 47 Instruction Manual 830231 Rev F 4 Software Installation i 830 VOM Viewer Software InstallShield Wizard Welcome to the InstallShield Wizard for 830 QM Viewer Software Simp icity n The InstallShield R Wizard will install 830 YOM Viewer Software Solutions on your computer To continue click Next WARNING This program is protected by copyright law and international treaties om Cees Figure 4 6 VQM Viewer Application Software Installer 5 Click I accept the terms in the license agreement on the Granville Phillips License Agreement screen see Figure 4 8 and click the Next button i B30 VQM Viewer Software InstallShield Wizard Simplicity Pa g license agreement carefully u t j Ke Simplicity Solutions Software License Agreement IMPORTANT READ CAREFULLY This Simplicity Solutions Software License Agreement Agreement is between you User or You and Brooks Automation Inc ifs subsidiaries affiliates suppliers and assigns Licensor Us ar We By installing or using the Simplicity Solutions Application Software any associated software services madia nrintant mataria nlmeotranio dnciurmoantation and ralatad mntharno w O accept the terms in the license agreement 5 do not accept the terms in the license agreement Irrseallemeld Figure 4 7 Software License Agreement 48 Series 830 Vacuum Quality Monitor Instruction Manu
181. igh Voltage power supply The electron multiplier must be biased to at least 750V for the repeller voltage to become regulated over its entire specified range Filament Bias 10V 70V 25 mV 30V The Filament bias is used to set the electron energy The electron energy in eV units is equal to the difference in voltage between the entry plate and the filament bias voltages Entry Plate Bias 125V 150V 20mV 130V The default electron energy for ionization is 100eV 130V 30V default settings Pressure Plate 49V 100V 25 mV 75V Cups 20V 85V 25 mV 27 V Transition Plate Bias 400 V 1000 V 25 685 V V Exit Plate Bias 68V 154V 25mV 125V The exit plate bias sets the asymmetry of the trap In general the difference between the Entry and Exit plate must remain between 0 and 20 V Higher asymmetries will lead to larger baseline offset Electron Multiplier 27V 146V 25mV 127V The electron multiplier shield bias is required Shield Plate Bias to optimize the coupling of the ion current into the top cone of the electron multiplier Electron Multiplier 500 1500 25 V 925 V The Electron Multiplier bias voltage sets the Negative HV Supply gain of the detector Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 73 74 5 VQM Controller Overview All MS Gauge settings can be modified by the user at any time through dedicated commands and also through the Tune Screen of
182. ing Controller The VQM Mass Spectrometer Gauge Controller See Figure 3 1 Micro lon The Series 390802 Micro lon ATM total pressure measurement gauge See TPMK below Figure 2 3 Figure 3 2 and Figure 3 6 Micro lon Gauge and TPMK are used interchangeably throughout this instruction manual MS Gauge The Mass Spectrometer Gauge that is connected to the vacuum chamber The MS Gauge can be configured as a nude gauge see below or mounted inside a demountable envelope full nipple See Figure 2 4 Figure 3 3 and Figure 3 4 Nude Gauge The Mass Spectrometer Gauge that is connected to the vacuum chamber but the sensors of the gauge are inside the chamber rather inside a nipple that is mounted to the chamber See Figure 2 4 Figure 3 3 and Figure 6 2 Tee Flange An optional mounting flange for the purpose of mounting the MS Gauge and the Micro lon Gauge at the same port on the vacuum chamber See Figure 2 3 and Figure 3 2 TPMK Total Pressure Measurement Kit which includes the Micro lon ATM Gauge and the necessary cable for connecting the gauge to the VQM Controller See Micro lon above TPMK and Micro lon Gauge are used interchangeably throughout this instruction manual UHV Ultra High Vacuum usually referring to pressures below 10 Torr VQM Vacuum Quality Monitor refers to the VQM System which consists of the VQM Controller and the VQM Mass Spectrometer Gauge Series 830 Vacuum Quality Monitor Inst
183. ing the bakeout procedure Do NOT turn ON the MS Gauge while bakeout in progress Always use a high quality heater with a built in temperature limit switch to avoid the risk of component damage and the risk of fire Use only metal gasket seals during a bakeout procedure rr gt gt Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 133 134 7 MS Gauge Maintenance 7 4 Environmental Requirements The VQM System must be operated within certain environmental conditions to operate safely and to perform within its published specifications 7 4 1 Pressure Ranges The VQM Mass Spectrometer Gauge MS Gauge is an Autoresonant lon Trap Mass Spectrometer ART MS ART MS ion traps are intrinsically UHV sensors which operate under 1x10 5 Torr of total pressure The system is tested and calibrated at the factory at its pressure sweet spot corresponding to 2x10 7 Torr of pure nitrogen and under factory default settings Adjustments to the ion trap s operational settings will be required to optimize the performance of the system into lower and higher vacuum pressure ranges Operation of the electron multiplier at pressures above 1x10 Torr is not recommended by the electron multiplier manufacturer A Tune Settings panel on the VOM Viewer Software or voltage setting commands in the VOM Command Set allow VQM users to modify the trap operational parameters when the pressure conditions in a chamber ch
184. ings B Connect Mass Spec Scan Settings Tune 830 Trap Parameters Linear Scale Y 0 070 m 30 00 25 00 Filament Emission 0 070 Filament Bias Repeller Bias Entry Plate Bias Volts 30 01 Volts Volts 25 04 130 00 130 01 75 00 27 00 Pressure Plate Bias volts a Cups Bias y Transition Bias k 74 99 Volts 26 95 Restore Factory Settings 685 00 Volts Exit Plate Bias EM Shield Bias 125 00 Volts 127 00 Volts Li EM Bias y 988 00 Volts Tuning Display Mode RF Amp P P E Volts Raw n Mass Cal Factor i kHz Selected Peak Parameters Location 28 05 Resolution 164 07 GoF 0 99 Mass Peak 28 Intensity 1 00 FWHM 0 17 SNR 4 51E 3 HW Loop Time s 0 084 Averager Backlog 0 Analysis Backlog 0 Log Data Backlog 0 Advanced Display tor Advanced Scanning T T T 100 0 110 0 120 0 Figure 8 2 Electron Multiplier Gain Adjustment at 50 nA 9 Click on the Flash User Settings button of the Tune Panel to save the optimized electron multiplier bias voltage into the controller s User Settings 10 Schedule an Electron Multiplier replacement Service at your earliest convenience if the Electron Multiplier voltage exceeds the 1350 V safe operation limit Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation 8 3 5 Mass Axis Calibration 8 3 5 1 Background
185. ion The right pane offers three different display options dependent on the Advanced Display mode selector 1 Basic and Advanced Graph of fitted peaks including the histograms of normalized partial pressure the denoised signal a blue diamond peak height indicator and the Gaussian fitted signal for the detected peak 2 Advanced only Raw i e not denoised or fitted Mass Spectrometry signal with nanoAmps Raw ADC counts or normalized y axis units 3 Header only the current header information from the controller FETch Command header 830 VOM Viewer Software Fie Help 46 da 6 4 se YU a Simplicity Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save So utions 830 Trap Parameters Tuning Spectrum Calbrate P Linear Scale Y Filament Emission 0 070 mA 0 070 m 10 Filament Blas 30 00 Volts 30 00 Settings to EEPROM Repeller Bias 25 00 Volts amp Entry Plate Bias y 130 00 Restore User Pressure Plate Bias y 75 00 Settings Cups Bias 27 00 Transition Bias 685 00 Restore H Factory Exit Plate Bias y 125 00 Settings EM Shield Bias lt 127 00 EM Bias p 1050 00 Tuning Display Mode RF Amp P P y 0 500 h Normalized Mass Cal Factor k 610 400 ometer Gain Selected Peak Parameters Mass Peak Location 18 06 Resolution 105 64 GoF 0 98 Intensity 1 00 FWHM 0 17 SNR 298 97 HW Loop Time s 0 084 Averager Backlog 0 3 Analysis Backl
186. ion iiie eU LEE mee qui dep vui ed qr bcr oo ER dy 187 TIA USB Driver Installation sii ei Leer ep er tace et Leo a 187 9 1 2 Logical Instruments eese fo ate sens a ice oe ew e e Oe e IH oc n 187 9 1 5 Command Format used in this Instruction Manual selle esee 189 St tus Error Reporting oi seat ae eE ee nemen A e neu EO P A P e obe 189 9 2 1 Eyent Etfor Queuez oscila a 189 Basic Commands viii uan eee ge RE OC Re DPA e E ERA IEEE rrr 190 CALibration Subsystet cue aec a Boke E RU E GARE RU A I UR RSs ARR 191 FETCh Subsystetnz A Eee Worse boe VOU due V EURO e E RR Tt 192 Data Interchange Format DIE vota corri tet ket et ne oh RR ee eee aua 192 9 6 1 DIF Sample Data Set Examples occ ee enseseb e bvestoPDYIe ea ee 192 INSTrurment Subsystei 215 va ee HEU e CR RE e e a e eR ER eR RS NC RO ROO ae eae 195 MEASure Subsystetm ie eta eT pie E pet pte pd e UCET ERR rale eR bns td 196 MEMory S bsystem a i ERI eeu mes ea ac ie tea aa a p o ete d o a 197 OUT Put Subsystem dmt ek OE HOUR RS eR et Re Ao ERR E NO Peg 197 SOURce SUD stc saan RC ARCU eh E RC ER RU AA Aen ER REN CLA ad 198 TES ESubsystefnz 44i nd Sr Reeve er g 200 9 12 1 Test Report iio i eee ee ees a e et e e Leeds 200 TRIGeerSubsystem Len oe ee oe ee Rae duas e tocado eue ol ces TOS 201 Reset tati ii a eoe s gia to rin C Y Nx able Bu a ICE RS UE e RR SENA Re a 202 Error Event Codes i iii MR Ret RERO RUM RISE AE e epe 202 Series 830 Vacuum Quality Mo
187. ion Manual 83023 1 Rev F 9 830 VQM Command Set e INIT e FETC To perform continuous mass spectrum scans and read data e INST MSP e OUTP ON e INIT CONT ON e FETC this command fetches one mass spectrum scan the command must be looped to get multiple mass spectrum scans Data from the MEAS ARR SPEC and FETC commands are in the Data Interchange Format DIF See Section 9 6 9 16 6 External Total Pressure To get the total pressure from an external instrument TPMK e INST ETPR e MEAS PRES 9 16 7 External Signal To get a voltage reading from the Analog Input e INST ESIG e MEAS VOLT 9 16 8 Mass Calibration Factor To set the mass calibration factor to 630kHz e INST MSP e CAL VAL 630 To get the mass calibration factor e INST MSP e CAL VAL 9 16 9 Electron Multiplier Electrometer Gain To get the current electrometer gain setpoint e INST EMEL e CAL VAL To measure the current electrometer gain e INST MSP e OUTP OFF e INST EMEL e CAL MEAS To set the current electrometer gain to 100 nA V e INST MSP e OUTP OFF e INST EMEL e CAL VAL 100E 9 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 205 9 830 VQM Command Set 9 16 10 Store and Load User Settings in NVRAM To store User Settings INST MSP e OUTP OFF e MEM STOR e SYST ERR ALL To load User Settings INST MSP OUTP OFF e MEM LOAD e SYST
188. ion of the MS Gauge regulated power supplies set the electron emission current the voltage levels on the ionizer and ion trap electrodes and the high voltage bias across the electron multiplier lon Trap Mass Spectrometry Gauges are electrostatic ion storage devices and as such require low power from their voltage supplies Most of the electrical power consumed by the VQM Controller is used to heat up the filament in the MS Gauge and produce electron emission current for the ionization process The VQM Controller is shipped with default factory values for all voltage and current settings of the MS Gauge The default settings are stored in NVRAM user settings and transferred into the Controller s memory when the unit is first powered up The settings present in memory are used to operate the ion trap when the MS Gauge is turned ON A VQM System operated under default settings will provide a mass range typically extending from 1 to 135 amu minimum The user can change the lon Trap settings in memory through the VOM Command Set and can also choose to replace the values stored in NVRAM at any time settings are transferred from memory into NVRAM The user settings stored in NVRAM are transferred into memory and used to configure the ion trap every time the VQM Controller is powered back up Since the VQM Controller offers a fixed RF signal frequency sweep and the mass dependent ejection frequency of ions depends on the ion trap settings changes in
189. is used throughout the assembly process to minimize chances of contamination A custom silicone jacket is available from the factory to heat the MS Gauge probe to 180 C for extended bakeouts Users relying on custom built heating jackets or tapes must be careful not to exceed 200 C during bakeouts as recommended by the detector manufacturer NOTE Bakeout temperatures exceeding 200 9C will cause irreversible damage to the sensor resulting in reduced signal output and degraded resolution A removable plasma screen located on the mounting port of the MS Gauge protects internal components from electrical fields present inside the vacuum system and from ions originating from neighboring ionization sources The presence of the screen is not necessary for operation but is recommended for best results See Figure 6 8 The operational specifications of the VQM System were derived assuming the MS gauge is connected to a standard VQM Controller and operated under factory default settings Users expecting to operate the sensor at pressure conditions that deviate from the specifications or wishing to optimize the performance of the device for a targeted application will find it useful to adjust the settings of the ion trap to achieve optimal performance This chapter includes an extensive and detailed discussion of all MS Gauge settings available to the user In all cases it is important to remember that a set of factory default values is stored in VQM C
190. it 5 are 1 indicating that all systems passed except for the Negative High Voltage and Analog Input Output systems SYSTem ERRor NEXT Get and clear the next error in the queue If no error then 0 No error is reported Example 113 Undefined header ALL Get a comma delimited list and clear all the errors in the queue If no error then 0 No error is reported Example 113 Undefined header 101 Invalid logical instrument COUNE Queries the error queue for the number of unread items Returns an integer Example 2 DATE lt year gt lt month gt Set the date lt year gt must be 1902 2037 lt month gt must be 1 12 lt day gt must lt day gt be 1 31 An non existent day in a month will roll over to the next month For example if lt month gt is set to 2 and lt day gt is set to 31 the resulting date will be set to March 3 Example SYST DATE 2010 7 14 sets the current date to July 14 2010 DATE Queries the current date in lt year gt lt month gt lt day gt format Ex 2010 02 05 the current date according to the 830 controller is February 5 2010 TIME lt hour gt lt minute gt Set the time lt hour gt must be 0 23 lt minute gt and lt second gt must be 0 59 lt second gt Example SYST TIME 06 00 00 sets the current time to 6 00 00 AM TIME Queries the current time in lt hour gt lt minute gt lt seconds gt format lt seconds gt is a floating point number
191. ith blue backgrounds are the most prevalent gases or masses You may lock all 10 positions if you so desire You can change the locked gas or mass with the Locked Gas Mass Identifiers 8 5 1 3 Locked Gas Mass Identifiers To change the locked gas or mass click on the lock for a line in the table the line will turn green Place the cursor over the name of the gas or the number of the mass the cell in the first column that identifies the gas or mass and click A popup will appear Gas Mode If you are in Gas mode you can set the locked value to either a gas or a mass To select a gas click the Select Species radio button and then select the gas from the Species Select dropdown menu at the top of the popup To select a mass click the Select Mass radio button and then enter the mass into the Mass in amu field Finally exit with Continue to make your selection or Cancel to cancel the change Mass Mode If you are in Mass mode you can only set a mass Enter the mass you want to lock into position Click Continue to save your selection and Cancel to cancel the change Select Species Hydrogen Mode Select Species Select Mass bbbPbbbbbbb Figure 8 23 Select Gas Species or Mass 8 5 2 Total Pressure The Total Pressure region of the Left Pane has no user configurable controls The top line is the Average Total Pressure If averaging is OFF it is identical to the Current Total Pressure Th
192. itor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation Trend log scale V 1 000E 7 1 000E 8 Pressure Torr 1 000E 10 i i i i i 10 04 37 10 04 40 10 04 42 10 04 44 10 04 46 10 04 48 10 04 50 10 04 52 10 04 53 Time Figure 8 27 Long TermTrend Graph 8 5 6 Histogram The mass spectrum Histogram Graph can be viewed on the Summary Screen the Histogram Screen or the Settings Screen Histogram Linear Scale Gee CUA 0 07 1 1 1 1 g 1 1 1 1 E 0 0 10 0 20 0 30 0 40 0 50 0 60 0 70 0 80 0 90 0 100 0 110 0 120 0 135 5 Mass amu Figure 8 28 Histogram Graph e AUTOSCALE X Display full mass range 1 through 135 amu e AUTOSCALE Y Change the scale of the Y axis to optimize the setting for the displayed X axis zoomed area To force AUTOSCALE Y to reset to its default first click AUTOSCALE X Then the X axis zoomed area includes the entire field of values Log Scale Linear Scale The Log Linear control allows you to select the display mode for the graph Default is Linear Series 830 Vacuum Quality Monitor 177 Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation e X Zoom via Mouse The user can zoom in on the X axis using the mouse Click and hold the left mouse button and sweep through the zoom area Release the left mouse button to complete the zoom area selection The AUTOSCALE X control will res
193. ity Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation 2 Settings 8 4 8 Settings preferences The Settings screen provides a mechanism to identify modify the system configuration Use the Settings screen to identify the total pressure source set the overpressure limit and select the pressure display units It also provides the Library Spectrum Definition Controls and an indicator that is ON when an external Total Pressure source is detected and OFF when no valid External Total Pressure is detected On the Mass Spectrum Library area of the screen you can select from the library of gases and the relative intensity of the gases Click Library Spectrum On to overlay the library gases and library intensities over the mass spectrum display The library gases will show as a red overlay on the graph For species not in the library the user can manually input the additional masses and relative intensities On the Pressure Setup area of the screen you can set the pressure units total pressure source and pressure limit before turning OFF the Mass Spec 830 VOM Viewer Software File Help C b da 6 s amp Y BB Simp icitu 94 Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save So utions Mass Spectrum Libra i A Library Gas Names Rel Intensities Addni Masses Rel Intensities 10 a ee m co 0 000 co2 0 000 Nitrogen 0 000
194. jacent electrode structures Changes in the ion trap length translate into changes in the ejection frequency of ions 7 5 Electron Multiplier Detector 7 5 1 Introduction Continuous dynode electron multipliers have an excellent track record of high performance and dependability in mass spectrometry instrumentation By following the simple recommendations described in the following sections VQM users should be able to experience long useful lifetimes from their detectors Electron multipliers must be regarded as a consumable item that will eventually need to be replaced they suffer irreversible gain degradation over time The lifetime of an electron multiplier will vary depending on the user s specific application and adherence to Best Known Practices described in this chapter A factory replacement service for electron multipliers is available and strongly recommended The MS Gauge must be returned to the factory repair center for replacement of the electron multiplier 7 5 2 Best Known Practices To optimize the performance and lifetime of the electron multiplier VOM users must adhere to the following best known practices Series 830 Vacuum Quality Monitor 135 Instruction Manual 830231 Rev F 7 MS Gauge Maintenance Perform the Initial Pump Down and Pre conditioning procedures on any new MS Gauge as described in the Initial Operation Procedure in Chapter 8 Perform the Initial Pump Down and Pre conditioning procedure on Mass Sp
195. jection frequency on M q is strongly dependent on the shape of the trapping potential well which is a function of 1 trap geometry fixed by design and 2 bias voltages applied to the electrodes Recalibration of the spectrometer s mass axis will be required every time a bias voltage is changed inside the trap There is a very slight dependence of mass axis calibration factor on RF Amp Voltage setting NOTE In the VOM System the Mass Axis Calibration factor consists of the ejection frequency value for singly ionized water molecules The factory default ejection frequency for singly charged water ions at 18 01 amu corresponds to 616 kHz The mass calibration factor must be checked periodically and recalculated each time Ion Trap voltage settings are modified The critical operational parameters of the ion trap mass separator include 1 mass range 2 mass resolution and 3 pressure range The Mass Range is determined by the interplay between 1 the bias voltages present on the electrode components user adjustable and 2 the fixed RF Chirp frequency range The VOM System offers a single i e no user adjustment nonlinear proprietary RF frequency sweep profile that is scanned in 80 milliseconds and spans from 2 65 MHz to 216 kHz Under factory default settings the mass range for the VQM System spans from 1 to 135 amu minimum Changes in ion trap electrode voltages will require recalibration of the mass axis and will impact the mass
196. justments are designed to control the interplay between 1 resolution 2 intensity and 3 relative contribution from sub and superharmonics to mass spectra Changes in the RF Amp P P settings have a minimal effect on ejection frequency however mass axis calibration is recommended after large RF Amp P P changes As predicted by autoresonance theory the RF V needs to operate above the autoresonance threshold for ions to be ejected from the trap The ejection thresholds for superharmonic peaks are larger than for fundamental peaks See Superharmonics on page 128 The ejection threshold depends on 1 scan speed i e fixed for VOM System 2 the initial energy of the ions 3 the depth of the potential well 4 the shape and symmetry of the trapping potential and 5 the total pressure As the RF V increases above threshold the peak amplitudes increase until an intensity plateau is achieved Further RF V increases cause 1 the peaks to broaden i e loss of resolution without any significant amplitude gains and 2 the appearance of superharmonic peaks Operation close to threshold provides the highest mass resolution at the expense of peak amplitudes and often ratiometric information quality As the RF Vpp gets closer to threshold it is not unusual to see the highest peaks in the spectra drop in intensity before the lower intensity peaks start to drop out This effect is caused by RF Field depletion inside the trap which is cause
197. ken timestamp total pressure analog input voltage etc 9 6 Data Interchange Format DIF The data interchange format is block structured The following major blocks are used for the VOM Controller DIF identifies the expression as a dif expression and contains the version of the standard used to create the data set IDENtify names the data set and describes the environment in which it was generated e DIMension specifies the structure and format of the data in the DATA block DATA contains the actual data 9 6 1 DIF Sample Data Set Examples Within each block are sub blocks that contain more information about the data The following is the DIF structure used lt LF gt 0x0A is used to represent Line Feed lt CR gt 0xOD is used to represent Carriage Return and italics represent comments It is recommended to look for lt LF gt lt CR gt to determine the end of the DIF Data Set since CR OxOD could be within mass spec data DIF lt LF gt VERSion 1999 0 lt LF gt Version of DIF specification used IDENtify DATE 2010 01 03 TIME 16 04 14 000 UUT ID lt serial number gt DESign lt Hardware revision gt lt Firmware revision gt lt LF gt Identifies the controller used to take the data and the time the data was requested DATE and TIME timestamp of when the data set was requested serial number Serial Number of the unit 830ADDDD where A is a charact
198. larger and the ions oscillate closer to the end plates as energy is transferred from the RF field into the oscillatory system Eventually the oscillation amplitude of the ions exceeds the length of the ion trap and the ions leave the trap through the semi transparent mesh of the exit plate Setting the bias potential of the exit plate a few volts lower than the entry plate assures that all ions excited through autoresonance are ejected from the trap through the exit plate mesh lower energy instead of colliding with the back wall of the entry plate higher energy 6 The RF Drive frequency at which the ions are ejected from the trap is defined as the ejection frequency of the ions fg f which is dependent on the trap s bias potentials and the mass to charge ratio of the ions The previous methodology implies that by simply ramping the RF signal frequency i e programmable RF supply fy down we can cause all ions with same mass to charge ratio M q to leave the trap in synchronicity at a frequency f irrespective of when or where the ions were initially generated within the ionization region There is a one to one mapping between mass and ejection frequency each M q has its unique fe Once the ions leave the trap their currents are detected and amplified as required by the electron multiplier detector to produce a mass spectrum Many M q values will contribute to a typical mass spectrum For a fixed trapping potential the ejection frequenci
199. levels Continue pump down at or below target pressure for a minimum of 8 hours after target pressure is attained 4 Perform the Filament Outgassing procedure Section 8 3 2 following successful completion of the Initial Pump Down Section 8 3 1 activity 5 If the pumping system is operating properly failure to reach the targeted base pressure might indicate 1 the presence of a leak in the MS Gauge 2 the presence of surface contaminants on the gauge internal structures If the total pressure reaches below 1x10 5 Torr use the MS Gauge to diagnose the cause of the slow Pumpdown rates in your vacuum system Consult the factory if necessary If the base pressure cannot drop below 1x10 Torr upper limit do not operate the gauge until the pumpdown issue is corrected Consult the factory for additional information 8 3 2 Filament Outgassing 8 3 2 1 Background Filament assemblies are manufactured following best known vacuum practices and outgassed at high temperatures in a dedicated test station prior to installation and shipment Thermal pretreatment of the filament assemblies hardens the Yttria coating and minimizes the release of particulate material and contaminants into the chamber the first time a MS Gauge is turned ON Surface contaminants can accumulate on the internal surfaces of the MS Gauge during shipment and long term atmospheric pressure storage and a sudden release of contaminant gases can be experienced the first time
200. lg Out Can recieve FETCH any Une aAa Fetch Buffer Size and Transfer Time increasing D 0 02 0 04 0 06 0 08 Time s Figure 5 15 Internally Generated Trigger Timing Diagram 5 13 2 Internal Trigger with No USB Data This is the simplest and most predictable case where scans are triggered internally with no requests for data to be sent over the USB The internal triggered timing diagram can be broken down further into two sections Start Scan T1 3 5 ms Before the actual Analog OUT MS Scan is triggered a number of tasks must be completed During this time the segments for the DDS MS scan are initialized all timers are configured the DIF header is setup the most time consuming with all measurements including any Analog IN and External Total Pressure data and the actual RF scan is triggered and time stamped The time stamp is inserted into the DIF header NOTE The Analog IN and External Total Pressure data is asynchronous with respect to this timing diagram The data retrieved for the DIF header is the most recent data the VOM Controller has acquired i e MS Scan T1 T2 80 ms The RF sweep takes place during this time and an output trigger pulse frames the frequency sweep The output trigger pulse is coincident with the RF sweep and is available at the Trigger OUT connector on the front panel marked by a low to high transition TTL pulse The output of the electrom
201. litude and shape of the mass peaks in the spectra 3 Decrease the repeller bias voltage in increments of 5 V until the maximum peak amplitude is achieved without peak shape distortions i e optimum voltage setting 4 Set the repeller to the new optimum value and Flash the new Setting to NV RAM using the Flash Settings to NV RAM Button 7 6 4 Filament Operation There are two critical settings for the operation of the filament 1 Emission Current 0 070 mA default 2 Filament Bias Voltage 100 eV default The emission current defines the number of electrons that pass through the ionization region per unit time The filament bias voltage defines the electron energy Electron Energy eV Entry Plate Bias V minus Filament Bias V which affects the efficiency of ionization for the energetic electrons The factory default setting for the emission current was selected based on operation at the sweet spot of the ion trap i e 2x107 Torr Deviations in pressure away from the sweet spot will generally benefit from changes in the emission current 1 increase the emission current as the pressure drops below 1x10 Torr and 2 decrease the emission current as the pressure approaches the 1x10 3 Torr Upper limit Low emission currents result in lower filament temperatures which in turn improves filament lifetime and reduces contamination build up due to thermal decomposition of chemicals on the filament surface Adjustments to the electro
202. livers typical resolutions m Am 150 typical which is well matched to the mass range of operation supported by the VOM Controller The small RF signals required make it possible to operate the sensor remotely from its VOM Controller using fairly long interconnect cables Series 830 Vacuum Quality Monitor 101 Instruction Manual 830231 Rev F 102 6 lon Trap Mass Spectrometer Gauge EM Shield EM Cup EM Clip HV EM Clip Ground EM Anode Cup amp Feed Through HV Feedthrough I Figure 6 6 MS Gauge Electron Multiplier Assembly The standard ion detector is an electron multiplier with a continuous dynode design The electron multiplier assembly consisting of the electron multiplier EM and the EM shield plate directs the ions ejected from the trap into a conversion dynode and converts the impinging ion current into a proportional electron current with a typical gain 1000x The high gain is required to provide current signals compatible with the wide bandwidth gt 30kHz electrometers demanded by the high scan rates The actual gain is determined by the magnitude of the HV bias applied across the electron multiplier which is a setting available to the user The gain of an electron multiplier is known to degrade over time due to a variety of well known reasons but can be restored in the field by adjusting increasing its bias voltage The electron multiplier detector is generally the most delic
203. ll be sent with the understanding that the scan data to follow will be sent as it becomes available T1 T2 80 ms In the case that the FETCh command has already been received the scan data will be transmitted as it becomes available in small data packets If the FETCh command is received shortly after the initial trigger pulse the data in the buffer up to that point will be sent in one transaction followed by the rest of the scan data as it becomes available The later in time that the FETCh command is received the larger the initial data buffer is so it will take more time to transmit If a FETCh is received late into a trigger pulse it is possible that the amount of time to transmit the data buffer may exceed the time remaining until the next expected trigger pulse In this case the trigger pulse will not be sent until the entire data buffer has been transmitted It is possible that this could delay the trigger pulse beyond the 100 ms scan time This case is more unpredictable because the timing of the trigger pulses depends on the non deterministic timing of a complete USB transfer 5 13 4 Buffer Overwrite The use of an internal trigger can cause an event called buffer overwrite The buffer overwrite case occurs when a user is internally triggering and data is not requested before the next trigger pulse The previous data in the buffer is overwritten with the current scan data Consider the case that a FETCh command is sent and d
204. lutions icon on the desktop to open the Viewer Application Figure 4 17 Desktop Icon Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 53 4 Software Installation 4 3 Install the USB Driver A specific driver is required for a USB communication link with the VQM Controller If you have installed the Viewer Application software the proper driver was installed during that procedure In some cases a Windows operating system may block the installation of the driver This will become evident when you open the Viewer software and try to connect to an VQM Mass Spectrometer Gauge If you cannot connect to an MS Gauge the driver will have to be installed See Section 4 3 1 below To communicate with the VQM Controller without using the Viewer software the 830 Driver needs to be installed See Section 4 3 1 below 4 3 1 Installing the 830 Driver from the CD 1 Insert the CD labeled VOM Software Suite into your computer Use Windows Explorer to open the CD Double click the appropriate driver 32 bit or 64 bit to access the Driver installer See Figure 4 2 4 Simply follow the prompts to install the 830 Driver See Figures 4 18 through 4 22 5 The InstallShield Wizard will install the necessary Windows driver i amp 830 Driver 32 bit InstallShield Wizard Welcome to the InstallShield Wizard for 830 Driver 32 bit The InstallShield R Wizard will install 830 Driver 32 bit on your computer
205. m high to low frequencies over a frequency range selected to eject all M q ions between land 135 amu for factory default settings with every scan cycle As predicted by autoresonance theory a minimum RF signal amplitude i e RF ejection threshold dependent on the RF frequency sweep rate will be required to eject ions out of an ion trap The VQM System offers a fixed non linear proprietary RF frequency sweep profile that is completed in 80 milliseconds and spans from 2 65 MHz to 215 kHz The only user adjustable parameter for the frequency sweep is the RF amplitude which can be controlled from the Tune Settings of the VQM Viewer Software or through the Controller s VOM Command Set Mass axis calibration is very straightforward lon ejection frequencies are strictly proportional to the inverse of the square root of mass to charge ratio M q Mass calibration is performed based on a single mass peak in the spectrum linking its ejection frequency to the square root of the mass f K sqrt M q The square root dependence K between mass and frequency is then applied to assign Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 107 108 6 lon Trap Mass Spectrometer Gauge masses to all other peaks in the spectrum based on their unique ejection frequencies The Mass Calibration factor used by the VQM System consists of the ejection frequency value for singly ionized water molecules M q 18 011 amu For factory default
206. m into the ionization region Optimize the repeller voltage each time the filament emission setting is modified Optimize the repeller voltage each time a new filament assembly is installed in a sensor Filament emission mA 0 070 Increase the emission current at UHV levels to achieve higher signals Decrease the emission current setting starting at pressures above 1x10 6 Torr Filament Bias V 30 Electron energy eV Entry Plate Bias Filament Bias Entry Plate Bias V 130 Default 100eV Pressure Plate Bias V 75 See the Tune Settings section The main components of the ionizer are 1 the filament 2 the repeller 3 the entry plate with off axis slit and 4 the pressure plate The VOM Controller contains all the necessary voltage and current supplies required to bias the ionizer s electrodes and establish a regulated electron emission current All ionizer settings are user adjustable through the Tune Settings of the VOM Viewer Software and through the VOM Command Set See the Tune Settings section in Chapter 8 for details Filament Off Axis Entry Repeller Assembly Slit Plate Figure 6 13 MS Gauge Filament Assembly A single filament is located outside the ion trap volume and the electron beam is directed into the ionization region through a narrow off axis slit aperture located on the entry plate A negatively biased focusing electrode called the repeller directs all emitted electrons to the entry plate
207. measurement was read UNITs Indicate the units of the total pressure measurement Torr Bar or Pascal lt total pressure measurement gt total pressure in the format D DDESDD where D is an integer within 0 9 and S is either or ETPR status 32 bit number indicating status of the ETPR logical instrument Bit 0 RS485 connection established Bit 1 Scanning RS485 addresses for acceptable instrument Bit 2 Communication timeout Bit 3 Periodically querying instrument for pressure Bit 4 Over pressure condition exists Bit 5 7 Not used 390 status 32 bit number indicating status reported by a 390802 if available See RSX in Chapter 5 of the 390001 Instruction Manual provided with the 390802 TPMK or can be download at http www brooks com pages 3064 module manuals cfm Series 830 Vacuum Quality Monitor 193 Instruction Manual 830231 Rev F 9 830 VQM Command Set MEASurement ESIGnal DATE 2010 01 03 TIME 16 04 14 000 UNITS V VALues lt external signal value gt Contains information about the Analog Input DATE and TIME timestamp of when Analog Input voltage average was calculated lt external signal value gt Voltage of the Analog Input in the format D DDDDESDD where D is an integer within 0 9 and S is either or CURVE DATE 2010 01 03 TIME 16 04 14 000 BOCounter lt buffer overwrite counter gt VALues lt mass spec data gt lt LF gt Contains information
208. mp Initial Operation 8 5 14 Raw Logging The Raw Logging controls are available only on the Tune Screen Raw logging uses a lot of disk space very quickly Many applications will be unable to open the Log file because of its size That is the line lengths are very large and the number of lines in the file can also be very large For example users of Excel 2003 or WordPad may not be able to view the files Start Raw Logging Raw Logging Off Figure 8 35 Raw Logging 8 5 15 Tuning Spectrum The Tuning Spectrum is available only on the Tune Screen The Tuning Spectrum Graph provides three alternative ways to view the same data Normalized the Raw nAmp or the Raw Counts view To select among them use the Advanced Display control and change the Basic selection to the Advanced selection Advanced Display Advanced Display Basic y Advanced Change this to this Figure 8 36 Tuning Spectrum Tuning Display Mode Normalized Use the Tuning Display Mode to select the desired graph view Figure 8 37 Tuning Spectrum e Normalized View The Normalized view contains several plots on a single graph the histogram gray bars the fitted peaks blue diamonds the denoised raw data black trace and the Gaussian fit of a selected peak red trace This graph is the one often used for calibration You can use the mouse to zoom in on a piece of the x axis Use the Selected Peak Parameters to select the Gaussian
209. n Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge Nude MS Gauge in Demountable Envelope 4 inch Nipple Figure 6 2 MS Gauge Configurations The MS Gauge uses purely electrostatic fields to store ionized gases within a cylindrical ion trap lons are generated directly inside the trap by electron impact of gas molecules An anharmonic trapping potential well confines the ion trajectories of all ion masses and of a wide range of initial energies to stable oscillatory motions along the axis of the trap Mass selective ejection is achieved through an autoresonant energy pumping process The mass spectrometer has unlimited mass range is capable of achieving high sensitivity at high and ultrahigh vacuum levels fast scan rates is very compact and requires extremely low power to operate as it uses only static bias potentials and very small RF signal levels in the 100 mV range The MS Gauge sensor is natively a ratiometric measurement device that provides detailed compositional analysis of a gas mixture To measure absolute partial pressure readings the VQM System requires 1 auxiliary total pressure measurements from an ionization gauge i e TPMK and 2 advanced data analysis built into the VQM Viewer Software Series 830 Vacuum Quality Monitor 99 Instruction Manual 830231 Rev F 100 6 lon Trap Mass Spectrometer Gauge m _ Filament Assembly Entry Plate Pressure Plate lonizer
210. n be easily replaced in the field see Filament Replacement instructions in Section 7 6 2 Several overpressure protection algorithms built into the controller s firmware protect the filament from dangerous overpressure conditions In addition the power delivered to the filament by the controller 2W typical is continuously monitored by its microprocessor and used to protect the filament wire from overpower conditions See Section 5 7 1 and Section 5 10 2 for additional information on Filament Protection modes 6 7 Ion Trap Mass Separator The ion trap is the cylindrical multi electrode structure extending from the entry plate to the exit plate see Figure 6 5 The main components of the ion trap structure are Entry Plate Pressure Plates Entry and Exit Cups e Transition Plate e Exit Plate The on trap components are made of type 304L stainless steel plates and cups Precise plate placement is assured by high precision gt 98 pure Alumina spacers Compressed springs secure the integrity of the electrode stack up at all times The cylindrical structure has an open design to assure unrestricted gas flow between the electrodes The main function of the pressure plates is to absorb unconfined ions in the ionization region of the ion trap However adjustments to the pressure plate can be used to improve signal levels and resolution in the sensor See the Tune Settings section in Chapter 8 for additional details The VQM Controller
211. n energy can be affected by changing the filament or entry plate bias Modifying the entry plate bias has a large impact on the performance of the trap as it requires changes to all electrode voltages inside the trap and is not recommended In general changes to the filament bias are recommended instead The filament bias is set to 30 V as factory default so that electrons emitted from the filament cannot reach grounded surfaces in the vacuum system i e minimizes cross talk with other ionizing sources Changes in the filament bias voltage must be followed by a Repeller Voltage Optimization procedure see Section 7 6 3 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 8 Viewer Software amp Initial Operation 8 1 VOM Viewer Application Software for the VOM System This chapter introduces the user to the operation of the VQM System via the Viewer Application Software The 830 VQM Viewer Software provides the fastest and easiest way to access the full functionality and optimize the performance of the instrument The subjects addressed in this chapter include Application Icons and Basic Screen Displays Section 8 2 Initial Operation Procedure for the instrument Section 8 3 Using the Viewer Application Section 8 4 Details of the components of the Viewer Application Section 8 5 Be SURE to complete the Initial Operation Procedure Section 8 3 BEFORE using the 830 VQM System to collect mass sp
212. n the spectra Remember to store the Mass Axis Cal factor into the User Settings at the end of the Mass Axis Calibration procedure so it is automatically used by the controller the next time the VQM System is power cycled Table 8 1 shows some of the typical mass peaks that are often found in mass spectra and can used to perform a single gas Mass Axis Calibration of the mass spectrometer Table 8 1 Parent Peaks from Gas Species Commonly used for the Mass Axis Calibration Procedure Gas Species o Charge Comments amu H2 Molecular 2 02 Calibration based on molecular Hydrogen is only recommended for UHV Hydrogen systems where other species might not be present with enough abundance H20 Water 18 01 Water is always present in a vicuum system Use the parent peak at 18 amu to calibrate the Mass Cal Factor N2 Nitrogen or 28 00 Nitrogen is the calibration gas used for manufacturing verification CO Carbon The 830VQM system cannot differentiate i e not enough resolution Monoxide between the parent peaks for nitrogen and carbon monoxide O2 Oxygen 31 99 Ne Neon 19 99 Often present in lon Pumped systems Ar Argon 39 96 Often present in ion pumped systems and also in air leaks The mass axis calibration procedure is required During the Initial Operation procedure if the VOM Viewer software will be used Each time the ion trap operational parameters are changed When large pressure changes take plac
213. nce of its filament The MASS SPEC button LED turns Red briefly to indicate the start of the search and turns OFF if a filament is detected If a filament connection is not detected the MASS SPEC Button LED remains Red indicating a system error However note that the error counter is not incremented and that no error code 901 is added to the queue if a filament connection is not detected upon Power Up 6 If a USB connection to a Host PC is available the USB LED turns ON if a valid enumeration of the USB port occurs with the Host PC A valid enumeration requires the presence of all required Simplicity Solution USB drivers in the Host PC Follow the Software Installation procedure of Chapter 4 to assure all the required drivers are available in the Host PC If a USB connection is not present or proper enumeration does not take place the USB LED remains OFF NOTE It is good programming practice to wait for POST to be completed before sending commands to the VOM Controller Do not apply power to the MS Gauge until the pressure in the vacuum chamber is Ix10 75 Torr and instructed to do so in the Initial Operation procedure Series 830 Vacuum Quality Monitor 79 Instruction Manual 830231 Rev F 5 VQM Controller Overview Once the Power ON procedure is completed successfully the VQM Controller is ready for operation of the MS Gauge and TPMK Gauge for Stand Alone operation and for communication with a Host PC over USB serial link Toggle t
214. nds Symbol Function Comments Braces Braces enclose the parameter choices for a given command string The braces are not sent with the command string Square Brackets Square brackets indicate that a parameter is optional and can be omitted The square brackets are not sent with the command string Triangle Brackets lt gt Triangle brackets indicate that you must specify a value for the enclosed parameter The triangle brackets are not sent with the command string Vertical Bar l The vertical bar separates multiple parameter choices for a given command string Only one parameter choice can be used at a time Colon i Keyword A colon separates a command keyword from a lower level Separator keyword Insert a blank space to separate a parameter from a command keyword If a command requires more than one parameter separate the adjacent parameters with a comma For example CONF VOLT DC 10 0 05 Question Mark 2 Query A question mark at the end of a command header signifies a query For example TRIG COUN or TRIG COUN MAX BOLD System default value or setting 9 2 Status Error Reporting 9 2 1 Event Error Queue The Error Event Queue is a FIFO First In First Out queue that tracks a finite number 20 in the VQM Controller of errors and events defined in this instruction manual The user uses commands in the SYSTem subsystem to access the queue See Table 9 2 Series 830 Va
215. nergy of the electrons increases the electrons reach further inside the trap i e lower potential energy values and higher RF V is required to eject the ions from the trap within the same scan time i e the RF Vp ejection threshold increases If the electron arch gets too short the end of the electron arch can Series 830 Vacuum Quality Monitor 123 Instruction Manual 830231 Rev F 124 6 lon Trap Mass Spectrometer Gauge reach the back plane of the entry plate and form ions within line of sight of the confined beam As a result some of the ions formed close to the back wall are then ejected from the trap without confinement resulting in 1 increased baseline offset 2 signal noise and 3 reduced electron multiplier lifetime The ions formed close to the back of the entry plate also have low ejection thresholds and might be more easily ejected as superharmonics contributing to superharmonic peaks at low masses Low energy electrons that hit the back plane of the entry plate can also form energetic ions through Electron Stimulated Disorbsion ESD where the electrons impinging on the back plane knock free and ionize molecules and ions on the surface of the entry plate ESD ions generated in line of sight with the exit plate aperture are very energetic and can contribute to baseline offset levels signal noise and reduced electron multiplier lifetime A natural consequence of off axis ionization is that the section of the electr
216. nformation file provided with the VOM Viewer Application Software is used by Windows to identify the proper COM port driver to use See Section 4 3 The Host PC must have the required virtual COM port drivers pre installed to properly enumerate the instrument Once the VOM Controller is enumerated and a COM port is assigned the Host PC can communicate with the instrument through a high level VOM Command Set The USB LED illuminates with a single color Green to indicate that 1 a valid USB physical Link is established between the VOM Controller and a Host PC and 2 that the VOM Controller is properly configured by the Host PC Table 5 8 USB Port Status LED EEO umninglion USB Port Status Description Green OFF Device Not The VQM Controller is not connected to a Host PC or the Configured proper COM drivers are not installed in the Host PC ON Device Configured The VQM Controller is connected to a Host PC and ready to communicate through an assigned virtual COM port Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview NOTE Suddenly disconnecting the USB cable from a VQM Controller that is running continuous scans can cause the VQM Controller hang up lock up or freeze if communication is aborted after a FETCh command is issued but before all of the data buffer is transmitted to the Host PC Stop all continuous scanning before disconnecting the USB plug from a VQM C
217. ng The duration of the raw logging is set in the associated dialog but Raw Logging may also be stopped manually 8 4 9 Tune Settings 830 VOM Viewer Software S 0 ane 6 t 9 486 Simplicity s Solutions Linear Scale Y AUTOSCALE Y R Mass Cal Factor y 610 400 kHz 610 400 Sos 1 Be The blue diamonds highlight found peaks The red trace shows Selected Peak the Gaussian fit to the currently selected peak at 18 07 amu The grey rectangle shows the normalized area under the curve vu Sea d for each found peak Location 18 07 Resolution 105 17 GoF 0 98 Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save Intensity 1 00 FWHM 0 17 SNR 279 93 HW Loop Time s 0 084 Averager Backlog Analysis Backlog 0 Log Data Backlog 0 D Y T 1 1 1 ispi 5 60 0 70 0 80 0 100 0 110 0 120 0 Advanced Display E Mass amu ma te Scanning Autoscale X Axis Figure 8 16 Tune Function Basic Screen Advanced Display Advanced Display Basic Y Advanced Figure 8 17 Tune Function Basic Advanced Selection The left pane of the Tune screen includes several different Advanced Display modes Advanced Gauge Controls Mass Peak Metrics and Performance metrics Basic Mass Calibration Factor and 830 Header FETch Header information Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operat
218. ng jacket and wait for the sensor to cool down to room temperature 7 Connect the MS Gauge to Controller interconnect cable and wait for the pressure to drop below 1x10 Torr and reach the targeted base pressure 8 Perform a few mass spectrometry scans and use the gas analysis outputs to check the integrity of the spectrometer and measure contamination levels Repeat the bakeout if necessary Notes a Foran initial installation of a VOM Mass Spectrometer Gauge see the Initial Operation Procedure in Chapter 8 b The VOM System does not include a Degas function The MS Gauge does not build contamination in its ionizer region in a fashion that benefits from electron bombardment cleanup The only effective way to reduce contamination levels in a Mass Spectrometer Gauge is to perform an overnight bakeout as described in this section C Severe contamination of the probe with non volatile components may not be effectively mitigated by a probe bakeout procedure Contact the factory if persistent contamination in your vacuum system is not reduced by the bakeout procedure d Electron Multiplier detectors are affected by hydrocarbon contamination Periodic bakeouts are the best way to minimize the presence of volatile hydrocarbon species in the gauge area Do NOT exceed 200 C during bakeout of the MS Gauge Exceeding 200 C may cause damage to the Electron Multiplier Disconnect the cable connector from the MS Gauge before start
219. ng sophisticated or specialized HV insulation components cables and connectors Possible reasons to adjust the transition plate voltage 1 shift the ejection frequencies for ions and 2 modify the mass range of the instrument The difference in potential between the entry plate bias and the transition plate bias defines the depth of the electrostatic potential well The natural oscillation frequency of the ions is related to the depth of the trapping potential well Any change in the transition plate bias voltage results in a shift in the natural oscillation frequency of the ions i e the round trip time for ions of a fixed M q ratio is related to the square root of the trapping potential As the trapping potential well gets shallower the round trip for the ions gets longer and the ejection frequency shifts to lower values i e the peaks in the spectrum move to lower frequencies as the transition plate voltage magnitude decreases becomes less negative As a consequence the mass axis of the ART MS device needs to be recalibrated every time the transition plate bias voltage is changed Changes in Transition Bias voltage affect the mass axis calibration factor and must be followed by a single gas Mass axis calibration procedure The VQM System uses a fixed RF signal frequency sweep thus changes in the transition plate voltages also affect the mass range of the instrument The depth of the trapping potential well influences the minimum value of t
220. ng the system above safe limits It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Carefully check manual operation of the system and the set point programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 1 Safety Instructions 1 4 Damage Requiring Service Disconnect the product from all power sources and refer servicing to Qualified Service Personnel under the following conditions a When any cable or plug is damaged b If any liquid has been spilled onto or objects have fallen into the product c If the product has been exposed to rain or water d If the product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the operation instructions Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation e If the product has been dropped or the enclosure has been damaged f If the product exhibits a distinct change in performance service may be
221. nge connection and verify that enough room is available to mount both the MS Gauge and the TPMK to the same Tee Flange adapter To eliminate chances of contamination during shipment and to minimize the exposure of the electron multiplier detector to air the MS Gauge is shipped in a sealed evacuated and metalized Mylar bag Do not break the seal until you are ready to mount the MS Gauge on the vacuum port Use proper vacuum procedures while installing the MS Gauge Wear dust free gloves work in a clean area do not talk or breathe into open vacuum ports and use clean tools For Nude gauges avoid contact with the exposed surfaces of the gauge Handle the gauge by its mounting flange and wear dust free gloves at all times To minimize the possibility of leaks with ConFlat flanges use high strength stainless steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces Do not use nonmetal gaskets Finger tighten all 6 bolts then continue tightening each about 1 8 turn in crisscross order e g 1 4 2 5 3 6 4 1 5 2 6 3 until the flanges are in contact After contact further Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 31 32 3 Hardware Installation tighten each bolt about 1 16 turn It is the user s responsibility to install cables to from the VOM Controller and Mass Spectrometer Gauge whether provided by Brooks Automation Inc Granville Phillips or not in accordance with
222. ning A 0221 0 1 00400 Running A 02 220 1 00 400 Running A 02 230 1 00E 400 Running A 02 24 1 00E 400 Running A 2 257 02 251 1 00E 00 Running A 02 261 00E 400 Running A 0227 1 1 00E400 Running A 02 281 1 00E400 Running A 02 29 1 00 400 Running A 02 30 1 1 00 400 Running A 02 311 1 DOE 400 Running A 02 321 1 00E400 Running A 02332 100E400 Running A 02342 100E400 Running A G 25 1 0000 25 1 00E 00 25 100E400 25 1008400 25 1 00E400 25 1 00E 00 25 100E400 25 1 008400 25 00E 0n 25 1 00E 00 25 00E 00 25 1 00E 00 25 100E400 25 00E 00 25 100E400 25 100E400 25 1 00E400 25 00E400 25 1 00E400 25 1 00E 00 25 100E400 R H Ciir Timesinst Total Average N Number Ax Avg Total F Error Cour 2 Figure 8 20 Log Data Screen and Sample Spectrum Data File Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 171 8 Viewer Software amp Initial Operation 8 4 11 Save 6 Save Saves the current scan data that is displayed on the screen and the settings to a file in a user defined location on the computer The saved file is a comma separated ASCII X Y Mass Intensity snapshot of the averaged non denoised mass spectrometry data which can be viewed with MS Excel or another program The file name and location can be selected or set by the user The signal intensities are reported as raw ADC counts for the electrometer output STI Ei Microsoft Excel
223. nit 7 028 in 178 511 mm 1 40 Dia Gauge Structure Nude Gauge 2830100 NYC 2 75 Dia NASCE and demountable envelope Conflat Flange 1 50 Dia Cable Connector 0 265 Dia 6 Holes For the Nude Gauge configuration the inside diameter of the vacuum port to which the Gauge is mounted MUST be 1 430 inches 3 632 mm or more Damage to the gauge will result if the inside diameter is less than specified Demountable Nipple for Nude Gauge with 2 75 NW35CF Flange on each end Catalog 801270 NOTE Illustrations are Not to Scale Figure 2 4 VQM Controller and MS Gauge Dimensions Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 22 2 Introduction amp Specifications 2 4 1 VQM Controller Specifications Table 2 2 VQM Controller Specifications Parameter Specification Mass Range Scan Time 1 135 m z in 100 msec Scan RF Frequency 2 65 MHz to 216 kHz Inputs and Outputs 1 Trigger In BNC Trigger Out BNC Analog In BNC Analog Out BNC USB Type B MS Gauge 7 Ext TP Gauge nu BR WN Analog I O Trigger I O USB Mass Spec Gauge External Total Pressure Gauge 1 50 Q positive TTL 1 msec minimum pulse width 2 50 Q Active High TTL frame scan 3 10K Q 0 10 V 12 bit resolution 4 OV to 5 V with 30 KHz 3 db bandwidth 5 2 0 full speed 12 Mb sec 6 14 Pin connector for the Mass
224. nitor Instruction Manual 830231 Rev F Table of Contents 10 9 16 Simplified Programming Overview 0 0 cect hl 204 9 16 1 General Guidelines i nia e et ee ee Mtb Jobe ee Ra 204 9 16 2 Bias Voltages sie be SIGS ONS ee yel Dade hee Peale sae RR A ee s 204 9 16 3 Emission UI ia o eke RR e ERIS X RENE aa a ee 204 9 16 4 Filament Bias Voltage lees teen ene e teen nnn es 204 9 16 5 gt Mass Spectritri ts iss tail 204 916 6 External Total Pressure cce eese RUE ode hee I ARNE eo he E ace e 205 9 16 7 External Signal ga iio hive a Hibs ek CRI Rea ba i S RECEN E 205 9 16 8 Mass Calibration Factor crego cetus cc eee e 205 9 16 9 Electron Multiplier Electrometer Gain esee 205 9 16 10 Store and Load User Settings in NVRAM sseeeseee eh 206 9 16 11 Reset Current Settings to Factory Settings from NVRAM 0 000 eee eee eee eee 206 9 17 Using a Terminal to Communicate with the VQM System 0 0c eect eee eee 207 917 1 Using Hyper Terminal 224 a ta dde Spruce knee 208 Chapter 10 Service amp Maintenance lesse he 213 LOL S tyice Guidelines onin 12e deep eee dendpen qutd aee ROC IUD Ro aite eed 213 10 2 Damage Requiring Service eeu ee eee hk m eR ae A ey ra Ro one SE e 213 10 3 Troubleshooting secessu e eee PH yea pU de PRO GR o ROO RR AS e n 214 Chapter Inde ruote ED dure eU eee daos edite dire o o a ee ege O s 215 Series 830 Vacuum Quality Monitor Instruction Manual
225. nstruction Manual 830231 Rev F Initial Operation Procedure 149 Introduction 145 Overview 145 Popup Dialogs 184 Using the Viewer Application 160 VQM Command Set Basic Commands 190 Error Event Codes 202 Introduction 187 Logical Instruments 187 Programming Overview 204 Ww Warranty Information 16 Granville Phillips Series 830 Vacuum Quality Monitor GRANVILLE PHILLIPS Customer Service Support For customer service within USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Granville Phillips 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email co csr brooks com Brooks Automation Inc 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 For customer service 24 hours per day 7 days per week every day of the year including holidays within the USA Phone 1 800 367 4887 www brooks com www brooks com vqm Instruction Manual Instruction manual part number 830231 Revision F March 2013 Brooks
226. nstruction Manval 830231 Rev F 9 830 VQM Command Set COM19 Properties Port Settings Bas per second Data bits 8 Panty Stop bits Flow control Hardware v Figure 9 10 COM Port Settings Go to File gt Properties gt Settings gt ASCII Setup Make changes as shown for clarity Select OK ASCII Setup ASCII Sending v Send line ends with line feeds Echo typed characters locally Line delay 0 miliseconds Character delay 0 miliseconds ASCII Receiving C Force incoming data to 7bit ASCII Wrap lines that exceed terminal width Figure 9 11 ASCII Setup Type IDN and press Enter commands are not case sensitive The VQM Controller should respond with its identity could be slightly different than shown 210 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 830 VOM HyperTerminal Ele Edit View Call Transfer Help Da 3 05 9 830 VQM Command Set idn Brooks Automation Inc 830 MSI 830P0004 00330 Connected 0 04 12 Auto detect 2400 8 14 1 Figure 9 12 IDN Query Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 211 212 9 830 VQM Command Set Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 10 Service amp Maintenance 10 1 Service Guidelines Some minor problems are readily corrected on site If the product requires service please contact our Customer Service Departm
227. nstrument by connecting its analog output signal to the ANALOG IN port of the VQM Controller This connection scheme provides total pressure information in synchronicity with MS Scans but does not include any exchange of status information between the ion gauge and the VOM Controller Use a standard TPMK Kit 390802 Micro Ion Gauge to obtain total pressures with the VOM System While Autopressure Mode ON the VQM Controller continues to query the TPMK for pressure and status data every 50 msec Failure to obtain a pressure status update for longer than 150 msec is considered a communication failure If communication between the TPMK and the VOM Controller fails after 3 consecutive tries 1 all RS 485 communication is interrupted i e Autopressure Mode OFF 2 power is removed from the TOTAL PRESSURE connector and 3 the EXT TP LED turns OFF If power to the Micro lon Gauge is removed by turning OFF the ETPR logical instrument through the VOM Command Set the EXT TP LED also turns OFF to reflect the loss of RS 485 communication with the TPMK and the Autopressure mode is set to OFF Power is not automatically restored to the TOTAL PRESSURE connector until the VOM Controller is power cycled or until the External Total Pressure ETPR logical instrument is turned back ON from the command interface While Autopressure ON the VOM Controller continuously queries the TPMK every 50 msec however this does not mean that the 390802 Micro lon Gauge
228. nt ioo Exi Plate Bias Voltage 124 99 Electron Multipler Shield Voltage 127 01 Electron Muttipler Bias Voltage 1049 90 RF Amp Voltage 0 500 Mass Cal Factor 610 400 390 status Ho Electrometer Gain 20 899 Error Count 0 Scan Params Curve Timestamp patre Instr Status DapFrc Overwrite Counter 244 Reus fe Freq Units HZ Ampl Units TSource CCONtinuous Over Trig Counter 0 Block Length 7166 Filament Power 2 0174 Reg_QUES conD o Reg_Ques eyenT Wo ETPRStaus flo Device Specific Version 1999 0 Pressure Params Ext Signal Params Date 12082010 14 17 19 970 Time 141719 977 14 17 19 975 Pressure TS 12 8 2010 Ext Signal TS 3 9 2010 Pressure Unts TORR Pressure 9 20 9 Ext Signal Units 1V Ext Signal 1 45E 4 Serial Number 830P0000 HW Rev DA FW Rev 02 000 00841 Figure 8 38 Tuning Header 8 6 Popup Dialogs 8 6 1 Log Data A Log Data Popup appears when the Log Data icon is clicked Configure the log by setting the directory for the log file the log file name the length of time to log hh mm or infinite manually stop and the log interval mm ss or Log All The file name will always end in csv although a separate hdr file of the same name is created to hold a snapshot of the header Use the Continue button to continue with the logging operation and the Cancel button to exit without logging 8 6 2 Save A Save Popup appears when the Save icon is clicked Select the directory and filename fo
229. ntaneous amplitude of oscillation related to its energy and 4 the depth of the potential trap defined by the voltage gradient established between the mirror electrodes and the transition plate The depth of the potential well i e between the end plates and the transition plate under factory default settings is 815 V The exact shape of the electrostatic trapping potential well is defined by the combination of 1 trap geometry and 2 bias voltages The ion trap uses strong anharmonicity in the ion oscillatory motion as a means for ion trapping i e red trace but also for mass selective autoresonant excitation and ejection of ions In a nonlinear axial field negative nonlinearity the ions with larger oscillation amplitudes have lower Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 105 106 6 lon Trap Mass Spectrometer Gauge oscillation frequencies than same mass ions with smaller oscillation amplitudes In other words trapped ions will experience a decrease in oscillation frequency and an increase in oscillation amplitude if their energy increases i e anharmonic oscillations lons of all masses and energies created and stored inside the ion trap are mass selectively excited and ejected using an autoresonance method Implementation of the autoresonant approach is simple and relies on the application of a small RF signal 60 millivolt peak to peak typical programmable frequency RF supply on the
230. ntry side of the trap absorbs the charge from ions formed outside the confinement beam i e shielding the entry cup from unconfined ion bombardment The pressure plate on the exit side provides symmetry to the trapping potential as required to minimize the chances of detecting superharmonic peaks in the spectra The Pressure Plate voltage can be biased at a potential starting around 0 32 x Entry Plate Bias Entry Cup Bias Entry Cup Bias where resolution is generally optimal but peak intensities are fairly small Increasing the pressure plate bias results in 1 decreased resolving power 2 higher peak amplitudes 3 shifts in the ejection frequency of the ions and 4 reductions in the RF Vj ejection threshold The factory default setting for the pressure plate bias voltage 75 V was carefully selected to provide a good balance between peak amplitude and resolution Changes to the pressure plate are generally unnecessary unless the cup or entry plate voltages are modified first Adjust the mass axis calibration after changing the pressure plate bias voltage and check RF V levels against ejection thresholds 6 9 4 Entry Plate Bias V3 in Figure 6 16 The Entry Plate Bias is part of the electron beam acceleration structure for the ionizer The electron energy in the ionizer is defined as Electron energy eV Entry Plate Bias V minus Filament Bias V The entry plate bias is generally equal or higher than the exit plate bias See Exi
231. nual control MASS SPEC button and 2 Host PC control VQM Command Set Mass Spectrometry scanning can be controlled in three different ways 4 1 Manual control MASS SPEC button on the front panel of the VOM Controller continuous scanning 5 2 External trigger pulse control single scan 6 3 Host PC Control VOM Command Set single or continuous scan The flexible connectivity of the VQM Controller allows operation of the VQM System under many different experimental conditions One unique advantage of this instrument is its ability to generate and provide mass spectrometry data without the need for Host PC connection 5 4 Front Panel Controls Interconnects and LEDs 5 4 1 Buttons Three buttons on the front panel of the VQM Controller allow manual operation of the instrument directly from the front panel and enable MS Gauge operation in Stand Alone setups Each button includes LED illumination and provides information on the status and activity of the function it controls Power button See Section 5 4 2 SCAN button See Section 5 4 3 MASS SPEC button See Section 5 4 4 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview e 830 VaM wa E TRIGGER e Ae A Mog io UC CAT GRANVILLE PHILLIPS IN amp Figure 5 3 VQM Controller Front Panel 5 4 2 Power Button LED Use the POWER button to turn the VOM Controller ON or OFF OFF Standby
232. nufacturer or from a Brooks Automation Inc regional office or supply center The gauge filament and electron multiplier are consumables and are not warranted against wear due to use accelerated failures in harsh environments or misuse through improper handling or configuration Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 3 Hardware Installation 3 1 Introduction Initial installation and setup requires mounting the VQM Mass Spectrometer Gauge MS Gauge to your vacuum chamber and making the necessary interconnections to the bench top mounted VQM Controller This chapter describes the process of unpacking checking and installing the VQM System on a vacuum chamber Initial installation and setup requires mounting the MS Gauge and optional Total Pressure Measurement Kit TPMK on a vacuum chamber and making the necessary interconnections to the bench top mounted VQM Controller Read and follow all installation instructions and safety procedures listed in this chapter to assure operator safety and optimum performance for the instrument NOTE Do not apply power to the instrument Controller until specifically directed in the Initial Operation Procedure in Chapter 8 NOTE Do not operate the VOM System if the pressure in the vacuum system exceeds 1x10 5 Torr Use a Pressure Reduction System if higher pressures are present 3 2 Terms used in this chapter Table 3 1 Term and Definitions Term Mean
233. of ion trap electrode structures when first activated Factory tooling handles all assembly stages i e hands free assembly to minimize chances of contamination The completed gauge assembly is fully tested and calibrated at the factory in an UHV compatible vacuum system located in a clean room The finished product is packed inside a hard plastic shell to provide mechanical protection and stored in an evacuated hermetically sealed metalized Mylar bag prior to shipment To eliminate the chances of contamination during shipment and storage and to minimize exposure of the electron multiplier detector to air and water i e oxidizing agents the MS Gauge is shipped in a sealed and evacuated metalized Mylar bag NOTE Do not break the bag seal until you are ready to mount the MS Gauge on a vacuum port Do not discard the hard plastic shell and resealable Mylar bag as they might be required for storage of the sensor if removed from a vacuum system or for returns to the factory Long term storage of the MS Gauge must take into consideration the chances of 1 chemical contamination of the internal structures 2 build up of particulate inside the probe 3 damage to the electron multiplier due to exposure to oxidizing agents such as Oxygen and Water and 4 degradation of the electron multiplier due to exposure to light particularly UV Users in areas of high humidity levels must take extra precautions to avoid the effects of water on the elect
234. of the danger of introducing additional hazards do not install substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Brooks Automation Inc for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications Replacement Parts When replacement parts are required be certain to use the replacement parts that are specified by Brooks Automation Inc or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Safety Check Upon completion of any service or repairs to this product ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond the manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks chafing or other signs of deterioration Do not use if the electrical insulation has become unsafe gt P A Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unle
235. og 0 LogDataBackog O 7 1 n i 7 Advanced Display 0 0 i o soo 600 700 900 900 1000 1100 120 0 Mass amu Start Raw Logging Raw Logging Off Advanced Scanning Figure 8 18 Tune Function Advanced Screen The ion trap settings are displayed and can be modified Mass Peak metrics are available through the Selected peak Parameters panel Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 169 170 8 Viewer Software amp Initial Operation B30 YOM Viewer Software File Help e ex UB Leak 0 gt uw Connect Mass Spec Scan Summary Histogram Trend Settings Tune LogData Save 830 Trap Parameters B30 Header Filament Emission Filament Bias Repeller Bias Entry Plate Bias Pressure Plate Bias Cups Bias Transition Bias Exit Plate Bias EM Shield Bias EM Bias RF Amp P P Mass Cal Factor 0 070 m Volts Volts Volts Volts Volts Volts Volts Volts 1050 00 Volts 0 500 Volts 610 400 kHz 0 070 Flash User BX Idi 30 05 Sensor Values 25 00 130 00 30 00 25 00 FiementBiasVokage 30 05 Repeller Bias Voltage 25 00 Entry Plate Bias Voltage 130 00 Pressure Plate Bias Voltage 75 00 Cups Blas Voltage 27 00 Transition Voltage 685 01 Exit Plate Bias Voltage 124 99 Electron Multipler Shield Voltage 127 01 Electron Multiple Bias Voltage 1049 90 RF Amp Voltage 0 500 Mass Cal Factor 610 400 Ele
236. om its walls mostly water If available use a total pressure ionization gauge to monitor the pressure of the vacuum system into the high vacuum levels required for safe MS Gauge operation Contact the factory if a leak in the feed through flange is detected or suspected See the Section 8 3 in Chapter 8 for additional information and recommendations for the initial pumpdown and Section 7 3 in Chapter 7 for recommended Bakeout Procedures 10 Attach the optional Heating Jacket see Figure 3 5 if being used See Section 7 3 for bakeout procedures and the instruction guide that was included with the Heater Jacket 11 See Section 3 6 3 to electrically connect the MS Gauge to the VQM Controller using the MS Gauge interconnect cable Figure 3 4 MS Gauge on a Vacuum Chamber Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 34 3 Hardware Installation Figure 3 5 Heater Jacket on a VQM MS Gauge 3 5 Total Pressure Measurement Kit Installation 3 5 1 Introduction The VOM System includes an optional total pressure measurement kit TPMK which consists of a Series 390802 Micro lon ATM Total Pressure Measurement Module The TPMK connects to the same high vacuum system as the Mass Spectrometer Gauge and is designed to operate between UHV and atmospheric pressures Figure 3 6 Micro lon Gauge Mounted on a Vacuum Chamber Series 830 Vacuum Quality Monitor Instruction Manual 8
237. omponents An optional Total Pressure Measurement Kit TPMK is also available as part of the VQM measurement system See Section 5 10 Figure 2 3 and Figure 5 1 The instrument communicates with a Host PC via a USB 2 0 link All communications between the VQM System and the Host PC take place over a fast USB Full Speed serial interface using an intuitive text based VQM Command Set which allows both instrument programmability and data acquisition The VQM System is a versatile gas analysis instrument which can also be operated in stand alone mode without requiring a Host PC connection An external trigger input port TTL Logic on the front panel of the VQM Controller allows users to execute single mass spectrometry scans triggered by external events An analog output signal proportional to the voltage output of the mass spectrometer s electrometer is available over the analog output port and an output trigger port provides external trigger pulses that can be used to synchronize external data acquisition systems and time frame MS data collected with digital data loggers See Section 2 4 5 for specifications Several built in checks constantly monitor the proper operation of the system and its operating environment For example the filament emission and electron multiplier are immediately shut down in the event of an overpressure condition The total pressure readings provided by the TPMK are automatically used by the VQM Controller to protect
238. on See Figure 6 3 through Figure 6 6 M q Mass to charge ratio See page 105 Mass Separator The region of the on trap where ons are separated based on their mass to charge ratios MS Gauge The Mass Spectrometer Gauge that is connected to the vacuum chamber The MS Gauge can be configured as a nude gauge see below or mounted inside a demountable envelope full nipple See Figure 6 2 NOF Natural oscillation frequency See page 105 Nude Gauge The Mass Spectrometer Gauge that is connected to the vacuum chamber but the sensors of the gauge are inside the chamber rather than inside a nipple that is mounted to the chamber See Figure 6 2 RF Amp P P Radio Frequency Amperage Peak to Peak Amplitude setting in the VQM Viewer Software RF Vip Radio Frequency Voltage Peak to Peak on the Transition Plate mV RF V 0 12 RF Amp P P VQM Vacuum Quality Monitor refers to the VQM System which consists of the VQM Controller and the VQM Mass Spectrometer Gauge 6 3 MS Gauge Overview The Vacuum Quality Monitor VQM System is a gas analysis instrument consisting of 1 VQM Controller 2 lon Trap Mass Spectrometer Gauge MS Gauge 3 Controller to MS Gauge Interconnect Cable and 4 VQM Viewer Software An optional Total Pressure Measurement Kit TPMK is also available as part of the VQM System Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 97 98 6 lon Trap Mass Spectrometer Gauge
239. on beam arch that produces ions in line with the oscillating ion beam does not have electrons at the maximum electron energy possible At the turn around point of the arch line of sight exposed to the beam the electron beam has lost the axial velocity component but still retains the initial component of radial velocity The voltage difference between the filament and the entry plate must not be used to calculate ionization potentials for different gases because appearance potentials calculated in this way will always be over estimates 6 9 8 Repeller Plate Bias The repeller plate is designed to optimize the coupling of electrons emitted from the filament into the ionization volume through the entry plate off axis slit The repeller plate focuses the electron beam emitted from the filament through the entry plate slit and has an adjustable bias voltage setting that can be used to compensate against filament location changes that are possible when filament replacement assemblies are exchanged NOTE The repeller bias voltage supply is electrically linked to the electron multiplier bias voltage supply The electron multiplier bias voltage must be at least 750V for the VOM Controller to be able to access the entire adjustment range for the repeller bias In other words operating the electron multiplier with a bias voltage less negative than 750 V will result in a more limited adjustment range for the repeller plate The repeller operates at
240. on gauge tubes glass windows glass bell jars etc are not designed to be pressurized Install suitable devices that will limit the pressure from external gas sources to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below that pressure which the system can safely withstand Suppliers of pressure relief valves and pressure relief disks can be located via an internet search and are listed in the Thomas Register under Valves Relief and Discs Rupture Series 830 Vacuum Quality Monitor 13 Instruction Manual 830231 Rev F 14 1 Safety Instructions Confirm that these safety devices are properly installed before installing the product In addition check that a The proper gas cylinders are installed b Gas cylinder valve positions are correct on manual systems and c The automation is correct on automated gas delivery systems Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite NM safety hazard Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizi
241. on ni ii a a Ss 16 Introduction amp Specifications oooooocoroocorrrcaraocarao teen eee hh n 17 General Description 5 elei A ede PAN UAE 17 Receiving Inspection oux RER URS se Mies BME Ka ESI ORE IH RORIS UD URGE RU See eae Tes Et 18 Glossary of Terms do ai 19 Specifications so ciclo ss Ue Melee EM ER eH Ia ex nets e tA ide taunt RS FUNDO 21 2 4 1 VOM Controller Specifications ceeeeeeeeee m 22 2 4 2 Mass Spectrometer Gauge Specifications sseeeeeeeee e 23 2 4 8 Viewer Software Specifications ce hh 24 2 4 4 Host PC Requirements cling WEE eee es Soya ae ees eee Be OEE eee ees oy 24 2 4 5 Trigger Input Output Specifications 0 ro 25 2 4 6 Analog Input Output Specifications 0 cence e 25 Environmental Complianic teo oho uss ee eu e Ere ee a me i MOAR a PR ER as 26 Warranty Informa oR s eoe a iep a qeaied a lelg doce a Gals 26 Hardware Installation coa da ene elated laa ER wo ga 27 Introduction ii A Ge ree mede 27 Tetmsusedanthis chapter st cerien 6 deta bae oalt ti hada bacon ts 27 Unpacking the Components avionetas ne e RR E Uam re eta bes ee see REN AS 28 3 3 1 Before You Open the Boxes ocasion 28 3 32 Checklist of Components coeli RR Rer erem eb eR EU ERE RES 28 MS Gauge Installation amic ap pivenzere eee Oe Me e ter 30 3 4 1 Introducti n i i oe t oA a Pannen FAL a 30 34 2 Installation Requirements ra ia a E pipe bee HS eles Paes 31 3 4 3 Operational Requirements 0 ec he 32 3 4 4 Mounting
242. onal parameters in your system ART MS ion traps operate under space charge saturation at pressures above 1x10 Torr under factory default settings As a result ion traps do not provide a strict proportionality between peak heights and partial pressures over the entire pressure range of the sensor The MS Gauge ion traps are native ratiometric partial pressure measurement devices and rely on auxiliary total pressure data from ionization gauges to provide absolute partial pressure readings 7 4 2 Temperature Range e The MS Gauge is specified to operate over a temperature range spanning 0 C to 50 C non condensing The cable connector plug that attaches to the feed through flange on the MS Gauge is made of high temperature plastic capable of withstanding temperatures as high as 180 C However the connector plug houses a circuit board with passive components an HV RF coupling transformer and ceramic capacitors which are rated for operation at temperatures below 105 C Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 7 MS Gauge Maintenance The electron multiplier detector will be irreversibly damaged if operated i e electrically biased at temperatures exceeding 100 C The electron multiplier detector will be irreversibly damaged if heated above 200 C e Disconnect the cable connector from the MS Gauge before starting the bakeout procedure Do NOT turn ON the MS Gauge while bakeo
243. onnect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save utions Log Scale V id Norm Absolute M a E a 1 000E 7 a a i 1 000 8 a A a Finding Granville Phillips 830 Devices a AS i H i H 45 09 35 00 09 35 15 09 35 30 09 35 45 09 36 00 09 36 15 09 36 41 a Time a Lr T Total Pressure Average Total Pressure N A Torr N Current Total Pressure N A Torr Post Processing Averaging Mode Avgs to Collect Aygs Collected Cumulative Moving Avg Y de 2000 0 o i i i i i i i 1 Tora s 0 0 10 0 20 0 30 0 40 0 50 0 60 0 70 0 80 0 90 0 100 0 110 0 120 0 135 5 Mass amu Response Time 0 000 Figure 8 8 Initial Connection Screen NOTE If the USB cable becomes disconnected while the Controller power is ON the Controller may need to be turned OFF and restarted Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation o Mass Spec 8 4 2 Mass Spec Turns ON or OFF power to the MS Gauge The functions of the Mass Spec icon map to the MASS SPEC button on the Controller Thus once turned ON the MASS SPEC button on the Controller can also be used to turn OFF or ON the Mass Spec Gauge NOTE If the VOM System is being powered up for the first time do not apply power to the MS Gauge until directed in the Initial Operation Procedure Do not turn on the MS ga
244. ontroller memory to restore the instrument to factory default settings in case the device ceases to provide useful data or when a new MS Gauge or electron multiplier is introduced Series 830 Vacuum Quality Monitor 103 Instruction Manual 830231 Rev F 104 6 lon Trap Mass Spectrometer Gauge o Figure 6 8 Plasma Screen in the Demountable Envelope 4 inch Nipple 6 4 MS Gauge Principles of Operation The Mass Spectrometer Gauge consists of three basic components 1 lonizer electron impact 2 Mass Separator ion trap and 3 lon Detector electron multiplier lons are formed by electron impact ionization inside the ion trap mass selectively ejected by autoresonant ejection and detected outside the trap with an off axis electron multiplier The entire assembly has cylindrical symmetry and is mounted on a 2 75 ConFlat feed through flange The construction materials are predominantly 304 stainless steel and high purity alumina Figure 6 6 illustrates the basic electrode structure of the VOM lon Trap Mass Spectrometer Gauge The ion trap assembly includes two opposed mirror electrode structures and a central lens electrode structure Each mirror electrode structure is composed of a cup with an on axis aperture a pressure plate with an on axis aperture and a compensation plate The mirror structure located on the ionization end of the assembly is called the entry mirror The mirror electrode structure located
245. ontroller to avoid this potential problem If the instrument hangs up power cycle the VOM Controller using the Power button on the front panel 5 5 6 External Total Pressure Connector LED The EXT TP LED located on the upper left corner of the front panel indicates the status of the RS485 communication between the VQM Controller and an external Micro lon Gauge TPMK The EXT TP LED illuminates with a single color Green Table 5 9 External Total Pressure Connector LED LED Illumination D e Communication Description Green Status OFF Disabled There is no active communication between the VOM Controller and the TPMK Autopressure Mode OFF Blinking Active There are two conditions that lead to a blinking EXT TP LED 1 1 First Communication The VOM Controller was just 1 powered up front panel 2 power cycled front panel or 3 the ETPR logical instrument was just turned ON Host PC command and an attempt to communicate with the TPMK is underway 2 2 Autopressure Mode ON A valid RS485 communication between the Micro lon Gauge and the VOM Controller is established and real time pressure and status information are available from the TPMK NOTE Active communication between the VOM Controller and the TPMK i e a persistent blinking EXT TP LED indicates that Autopressure Mode is ON and the VOM Controller is receiving real time pressure and status data from the TPMK This is a requirement for prop
246. oop regulates the heating power delivered to the filament to keep the emission current at the requested value The heating power required by standard MS Gauge filaments is about 2W 1V 2A The amount of power required to operate the filament is affected by the work function of the filament s thermionic emission surfaces and by the pressure around the filament If the filament is worn out or the pressure is too high the filament will require higher heating powers to operate Even though heating powers slightly above nominal will not damage the filament wire powers above 4W are considered to be deleterious to the Iridium wire i e quick recrystallization and embrittlement of the wire are possible The VQM Controller continuously monitors the amount of power required to establish the requested emission current and turns OFF filament emission and trap operation if the heating power exceeds 4W for longer than 0 5 seconds A gauge shut down due to filament overpower increments the Error Counter adds an error code 900 Filament Burn Limit Reached to the Error Event code list but does not illuminate the System Error LED The Viewer Software continuously monitors the error counter and alerts users if an error 900 code is detected in the Error Event Code list NOTE Since part of the heating power provided by the VQM Controller is dissipated by the interconnect wire users must be aware that filament Overpower Errors can be generated in cases where wires wit
247. operation Cup voltage affects 1 peak intensity 2 ejection frequency and 3 resolution In general there is no reason to adjust the cup voltage to any value other than the one that provides maximum peak amplitudes unless higher resolution is desired at the expense of amplitude Since changing cup voltages changes the shape of the anharmonic potential curve it is expected that it will also affect the natural oscillation frequency of the ions As a consequence the mass axis of the mass spectrum needs to be recalibrated every time a cup voltage is modified even if the transition bias voltage did not change Changes in Cup voltage affect the mass axis calibration factor and must be followed by a single gas Mass axis calibration procedure Some users might adjust the Cup voltage to slightly shift the ejection frequency of the ions from the trap and effectively modify the mass range of the device The shape of the trapping potential well influences the RF V ejection threshold In general the RF Vpp threshold increases in amplitude as the cup bias is decreased See RF Amplitude Peak to Peak on page 125 for details 6 9 3 Pressure Plate Bias V4 in Figure 6 16 A pressure plate is located in the space between each end cup and end plate Both pressure plates 1 operate at the same bias voltage 2 are electrically connected inside the gauge and 3 are biased by the controller through a single feed through connector The pressure plate at the e
248. or the ion trap The emission current is equal to the number of electrons that leave the filament surface per unit of time i e measured at the filament The repeller plate bias is responsible for focusing the electron beam through the entry plate slit and into the ionization volume of the ion trap The number of ions stored inside the ion trap is the product of the balance between 1 ions being formed by electron ionization and 2 ions being lost through autoresonant ejection The rate of ion formation due to electron ionization is determined by the product of 1 the pressure in the system and 2 the electron emission current The ideal emission current produces enough ions during each scan to 1 replenish the ions emitted by autoresonant ejection and 2 to keep the trap filled with ions The default electron emission current i e 0 070 mA was selected at the factory assuming operation at the pressure sweet spot of 2x10 7 Torr Changes in electron emission current will be required to optimize performance as the pressure moves away from the sweet spot In general emission adjustments are required 1 As the pressure drops into the UHV levels i e lt 1x10 9 Torr Increase electron emission current 2 As the pressure gets close to the 1E 5 Torr upper limit of the ion trap Decrease electron emission current This adjustment usually is required at pressures gt 3x10 Torr The repeller bias voltage must be optimized each time the elec
249. ounding Equipment 13 System Requirements amp Procedure 39 Warnings 13 H High Voltage 12 214 Icons Viewer Application 146 Implosion Explosion 13 Installation Gauge 30 Hardware 30 Software 45 Total Pressure Measurement Kit 34 lon Trap Mass Separator Default Values 113 L Leak Check 166 M Mass Spectrometry Scan Control 83 Timing Diagrams 90 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F O Overpower Detection Gauge Filament 74 Overpressure Condition 102 Overpressure Conditions 13 Electron Electron Multiplier 57 Filament 57 Overview Controller 57 58 Viewer Application Software 145 P Pressure Relief Valves 13 R Replacement Parts 12 213 Return Material Authorization RMA 15 213 S Safety Alert Symbols 11 Electrical Discharge 12 High Voltage 12 214 Instructions 11 Introduction 11 Precautions 11 Service Guidelines 15 213 Specifications 21 Analog Input Output 25 Controller 22 Host PC 24 Mass Spectrometer Gauge 23 Trigger Input Output 25 Viewer Application Software 24 System Components 29 System Configurations 85 T Total Pressure Measurement Kit Connection Procedure 37 Installation 34 Operation 80 TPMK Total Pressure Measurement Kit 20 29 34 38 70 81 Troubleshooting 214 U Using a Terminal to Communicate with the VQM System 207 V Viewer Application Software Components 173 Icons and Screen Displays 146 Series 830 Vacuum Quality Monitor I
250. ource Pressure Units Use the dropdown list to select the units to use for pressure display and graphing NOTE Changing the display unit does not change the display units on the TPMK The LCD display on the TPMK will display Torr regardless of the pressure units selected in the Viewer Application Software 8 5 11 Selected Peak Parameters The Selected Peak Parameters are available only on the Tune Screen Use them to facilitate calibration and to collect metrics on a particular mass peak on the Tuning Spectrum Graph Select the Mass Peak of interest using the increment and decrement controls or by typing in the amu value Sejectec Pea Parameters Location 0 00 Resolution 0 00 GoF 0 00 Mass Peak D Intensity 0 00 FWHM 0 00 SNR 0 00 Figure 8 33 Selected Peak Parameters 8 5 12 Calibration Controls The Calibration Control is available only on the Tune Screen You must be actively scanning in order to calibrate the mass axis of MS gauge Calibration can be adjusted using the Mass Cal Factor adjustment control on the left pane or by clicking the green left and right arrows on the Tuning Spectrum Graph These controls are available in both Basic and Advanced display modes on the Tune Screen See Figure 8 16 and Figure 8 17 To facilitate calibration select a calibration peak by entering the amu value for the peak into the Selected Peak Parameters Mass Peak control Then zoom in to the selected peak s portion of the graph
251. ours minimum under these conditions 12 Perform the Electron Multiplier Preconditioning Procedure as outlined in Section 8 3 3 8 3 3 Electron Multiplier Preconditioning 8 3 3 1 Background All electron multipliers undergo an initial cleanup phase during which loosely adsorbed molecules are removed from the active channel surface If during this time the detector is exposed to high input ion current or operated at high bias voltage settings permanent gain degradation may result In order to maximize lifetime the electron multiplier should be preconditioned During this process loosely bonded water molecules are released from the surface Failure to perform the pre conditioning process could lead to early detector degradation and large signal fluctuations during the initial hours of operation of a mass spectrometer NOTE The preconditioning procedure is not peculiar to the VOM Mass Spectrometer Gauge In fact preconditioning is recommended by all manufacturers of continuous dynode electron multipliers NOTE The Electron Multiplier Preconditioning procedure requires adjustment of the Electron Multiplier Bias Voltage setting A Host PC and the VOM Viewer software provide the easiest access to all VQM Controller Settings Alternatively the electron multiplier voltage can be modified using a standard communication program such as Hyperterminal Section 9 17 or voltage setting commands Section 9 16 Series 830 Vacuum Quality Monitor 151 Ins
252. oved b Make sure the center hole in the ceramic disk of the filament assembly fits completely down onto the latch pin so the latch closes easily If the ceramic disk becomes trapped in the notch of the latch pin the latch will not close Do NOT force the latch to close Carefully reposition the ceramic disk so it is properly seated at the bottom of the latch pin 10 Rotate the latch clockwise to lock the replacement filament in place Use tweezers or small needle nose pliers Make sure the latch is in the closed position as shown in Figure 7 5 11 Insert the new plasma screen Be careful not to damage the plasma screen or scratch the ConFlat knife edge of the gauge 12 Install the new retaining ring Hold the retaining ring down on a clean flat surface and grasp both retaining ring tabs with notched tweezers held at a right angle to the surface vertical Close the tabs tightly together so the retaining ring can be securely picked up Insert the retaining ring over the plasma screen and carefully release the tabs so the retaining ring expands into the groove above the plasma screen 13 Install the gauge on the vacuum chamber Be sure to use a new copper gasket when attaching the MS Gauge to the vacuum chamber 14 Connect the gauge cable and pumpdown the chamber to the 10 5 range 15 Connect the power cord to the rear of the VOM Controller 16 Perform the 1 Initial Pumpdown Section 8 3 1 2 Filament Outgassing S
253. performing The information can be used to diagnose CPU load problems The Viewer Application is designed to run on a minimum computer configuration and runs best on faster CPUs with more memory and disk space Nevertheless you may find that you can get adequate performance on a computer with a slower CPU less memory etc Similarly you may be running the Viewer Application on a computer that meets the minimum requirements or better but you are still losing data or seeing sub optimal performance HW Loop Time s 0 084 Averager Backlog 0 Analysis Backlog uU Log Data Backlog 0 Figure 8 34 Diagnostics The Viewer Application is designed to throttle back its requests for data if it is experiencing Backlogs When this happens a notification will be added to the Event Error list and log Note that it is okay to run in this degraded mode if the performance still meets your rquirements However if collecting all the raw data available from the controller is a requirement you may be able to use the following controls along with the log to determine how to improve performance sufficiently to meet your requirements HW Loop Time The minimum HW Loop Time is approximately 0 084 0 001 These values mean that all requests for scan data are successful and they are occurring at the fastest possible time If you are scanning via External Trigger this time will be equivalent to the trigger time unless you are overtriggering the controller
254. placed by a different gas or mass If the entry is locked but has a value below 1x10 Torr it will appear as a blank space on the Trend Graph The Trend Graph will display percent for the Y axis units if pressure is not available Y 1 00067 Pressure Torr E Sys ee E eo ed 1 000E 10 1 1 1 i D 1 08 27 50 08 30 00 08 32 00 08 34 00 08 36 00 08 38 00 08 40 00 08 42 42 Time Figure 8 26 Short Term Trend Graph CLEAR If you are not using the accumulate mode and you want to track transient behavior you can clear the Trend Graph by clicking the CLEAR control at the top e AUTOSCALE You can force the graph to autoscale the Y axis by clicking the AUTOSCALE control e Log Scale Linear Scale The Log Linear control allows you to select the display mode for the graph It will default to Log if pressure is available and to Linear if pressure is not available 8 5 5 Long Term Trend Graph The Long Term Trend Graph appears only on the Trend Screen Its controls are identical to those for the Short Term Trend Graph The difference is that the timescale for the Long Term Trend Graph continues to grow until it is cleared either via the button or because the Viewer Application has no Total Pressure or Partial Pressures to plot NOTE Data on the Long Term Trend graph is compressed to fit the space with the data collection rate adjusting as a greater amount of data is collected 176 Series 830 Vacuum Quality Mon
255. plifier 60dB decade Rolloff 28 kHz to 32 kHz Bandwidth 20 dB decade Rolloff Figure 5 8 MS Gauge Electrometer Simple Schematic An electrometer built into the VOM Controller converts the electron current output of the electron multiplier into a voltage signal that is then filtered and fed into an A D converter and the Analog Output The gain and bandwidth of the electrometer are optimized to accommodate the range of peak amplitudes and widths that are typical in the VOM System over the 1 135 amu scan range The gain factor for the two stage transimpedance amplifier of the electrometer can be set and calibrated commands between 10 and 121 nA V with a factory default value of 20 nA V The bandwidth of the transimpedance amplifier is typically between 28 kHz and 32 kHz over the available range based on simulations and is fully compatible with the bandwidth of the current signals provided by the MS Gauge The output of the transimpedance amplifier is fed into a 3 pole 30 kHz Low Pass filter with a 60 dB decade roll off The filtered analog signal is then connected to a 12 bit A D converter with a 0 3 V input voltage range 3 V 4095 counts and the Analog Output A 0 5 nA DC Offset current is continuously added into the input of the electrometer to assure a positive baseline offset at all times The electrometer gain is set and calibrated to 20 nA V at the factory but the user can readjust the electrometer gain value between 10 and 121 nA V using
256. ponents of the Filament Replacement Kit 140 Series 830 Vacuum Quality Monitor Instruction Manual 83023 1 Rev F 7 MS Gauge Maintenance 1 Turn OFF power to the VQM System and vent the vacuum chamber to atmosphere a Press the POWER Button on the front of the VQM Controller to turn OFF the power b Unplug the power input cord on the rear of the VQM Controller c Wait at least 10 seconds before disconnecting the Gauge cable step 2 Disconnect the cable from the MS Gauge Remove the MS Gauge from the vacuum chamber See Figure 7 2 ___ Gauge Cable nam Connector rm m m Do NOT Loosen or Remove These Bolts Remove the Gauge from the Vacuum Chamber Vacuum Chamber Figure 7 2 Remove the VQM MS Gauge from the Vacuum Chamber 4 Look closely at the port of the MS Gauge and make note of the position of the components as shown in Figure 7 3 Orient the gauge as shown in Figure 7 3 Retaining Ring Alignment Pin See Figure 7 5 Plasma Screen NOTE The filament z i assembly is under the Filament Latch V plasma screen See Figure 7 5 Figure 7 3 VQM MS Gauge Components 5 Remove the retaining ring Use the tweezers provided in the kit to squeeze the tabs together and carefully lift the retaining ring from the gauge Be careful not to damage the plasma screen or to scratch the ConFlat knife edge when removing the retaining ring Series 830 Vacuum Quality Monitor 141 Instruction Manual 830231 Rev F
257. pply connected to the 24 Vdc 75 W connector NOTE A 24 Vdc 80 W power supply is available from Brooks Automation which provides enough power to operate the MS Gauge as well as the TPMK The TOTAL PRESSURE port delivers 24 Vdc power to the TPMK when 1 the VOM Controller is powered up front panel 2 power is cycled front panel and 3 when the ETPR logical instrument is turned ON VOM Command Set Once 24 Vdc power becomes available the TPMK becomes active and 5 seconds later the VOM Controller attempts to establish communication with the Micro lon Gauge through the RS 485 address 2 communication link If communication is successfully established i e a response is received within 150 msec the VOM Controller continues to query the Micro lon Gauge for pressure and status information every 50 milliseconds i e Autopressure Mode ON Autopressure must be ON for overpressure protection to function as specified NOTE The RS 485 address for the TPMK Micro Ion Gauge must be set 2 the factory default value for successful communication with the VOM Controller The Micro Ion Gauge must be model 390802 to operate with the VOM Series 830 Vacuum Quality Monitor 81 Instruction Manual 830231 Rev F 82 5 VQM Controller Overview Controller as a TPMK Other Micro Ion models will not be recognized and will not be powered by the VQM Controller Any Series 390 Micro lon ATM Gauge powered separately can be interfaced to the VOM I
258. quired to achieve such output levels Signal levels above 60 nA exceed the factory default input range of the electrometer causing peak clipping and compromising the stability and lifetime of the electron multiplier The gain of an electron multiplier is known to degrade over time but can be restored in the field by adjusting increasing its voltage bias An adjustable Electron Multiplier High Voltage setting is available to restore detector gain Gain degradation limits the lifetime of all electron multipliers Eventually the gain drops to unacceptable levels and the multiplier needs to be replaced The electron multiplier voltage can be decreased without risks down to 1350 V However voltage settings below this can lead to internal arcing reduced and erratic signal levels and unreliable operation The electron multiplier detector is generally the most delicate component of the MS Gauge and must be continuously protected while it is actively biased Operation of the electron multiplier at high pressures can cause irreversible reduction of its gain The overpressure and filament overpower protection modes built into the VOM Controller shut down the electron multiplier and filament power in the case of an overpressure condition Electron multipliers are sensitive to long term exposure to atmospheric air Dedicated long term storage precautions and best known operational practices are provided in the Maintenance Chapter to assure optimal operation of
259. r and the vacuum chamber See Figure 3 14 and Figure 3 15 Figure 3 14 Ground Connection on the Rear of the VOM Controller 2 Plug in the VQM Controller AC power supply making sure that the ground pin of the power cord is connected to known Earth ground 3 Do NOT turn ON the VQM Controller at this time 4 Perform the System Ground Test Procedure described in the following section 40 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 Hardware Installation Optional Total Pressure Measurement Gauge E PO e DB 15 Cable ne T Chamber 0 gt 5 830 VQM Controller 830 VQM Mass Spec Gauge Note Use the 14 AWG O Use a Copper ground wire and connector Gasket or 14 provided with the Controller Ground Wire Caution Do NOT connect a ground wire directly between the Controller and the vacuum chamber The Ground Pin of the Power Cord MUST connect to 3 a Known Earth Ground AC to 24 Vdc Power Supply Figure 3 15 VQM System Grounding Diagram 3 8 2 System Ground Test Procedure Use the following procedure to test vacuum systems that incorporate a VOM System NOTE This procedure uses a digital multimeter DMM and a 10 Ohm 10 Watt resistor 1 Examine the grounding of both the VOM Controller and the vacuum chamber Make sure there is a heavy duty ground connection to all exposed conductors on the chamber 2 With the VOM Con
260. r the optional TPMK and 24 Vdc 75 W power connector A grounding lug completes the connections to the back panel See Figure 5 2 Low power requirements combined with simplicity of operation allow remote operation of the MS Gauge using interconnect cable lengths of 1 meter or 3 meters The ability to locate and operate the VOM Controller remotely from the MS Gauge is considered a very important advantage The VOM Controller is designed for bench top operation and is powered by a 24 Vdc power supply Use the 24 Vdc 75 W connector on the back panel of the controller unit to provide power to the instrument Minimum DC power requirements are listed in Chapter 2 Section 2 4 1 on page 22 and depend on whether the optional Micro lon TPMK is being used The power requirements are 24 Vdc 15 W for MS Gauge operation only and 24 Vdc 75 W for the additional TPMK Brooks Automation offers a universal external DC power supply 24 Vdc 80 W which provides enough power to operate both the MS Gauge and the optional TPMK Series 830 Vacuum Quality Monitor 59 Instruction Manual 830231 Rev F 60 5 VQM Controller Overview 2 830 VQM O EGO DE PRESSURE TRIGGER 7 ANALOG 10 830 Vay TOTAL y PRESSURE d 6 FM TRIGGER D t r TI ANALOG vo 2 o TOTAL PRESSURE MASS SPEC Figure 5 2 VQM Controller Front and Rear Panels The VQM Controller provides two different ways to turn the MS Gauge On Off 1 ma
261. r the save data No additional information is required for this operation Use the Select button to continue with the save data operation and the Cancel button to exit without saving the data 184 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation Bltc19 csv Bte22 csv fSjtc81 csv Sltes2 csv S tc82cum500 csv Sitc82noavg csv S tc95 csv Stest csv f twentythouavg csv Save as type Comma Separated Value csv Figure 8 39 Save Data Popup Dialog Box 8 6 3 Error Event List Clicking the right box the status bar at the bottom of the screen causes the Error Event List to be displayed Significant events and errors are logged to a log file and the most recent entries appear in this on screen list The length of this list is configurable The user can also clear the list The entries are preserved in the Error Event Log file Errors in this list have associated troubleshooting guidelines Click on the error line and the exact text associated with the error is displayed in a text box at the bottom of the popup Just above the text of the message is the troubleshooting guide Some troubleshooting guides are scrollable Series 830 Vacuum Quality Monitor 185 Instruction Manual 830231 Rev F 186 8 Viewer Software amp Initial Operation W 830 Message Window MEE Message Log Directory Es Data ErrorLogs Double click to operi Recent
262. ramed Digital Output pulse represents the spectrum as voltage vs time data The time scale must be converted to mass manually to obtain mass information T2 T3 15 17 ms for 100 ms example The System remains idle External Trigger with USB Data Regardless of whether or not the FETCh command is received the VQM Controller continuously fills a fixed buffer with the current scan DIF header and scan data This section describes the situation of external triggering and asking for data via USB All timing described in the previous section holds This section will discuss only how the FETCh command affects the timing Start Scan T1 3 5 ms If a FETCh command is received in this region only the DIF header is available The DIF header will be sent with the understanding that the scan data to follow will be sent as it becomes available T1 T2 80 ms In the case that the FETCh command has already been received the scan data will be transmitted as it becomes available in small data packets If the FETCh command is received shortly after the initial trigger pulse the data in the buffer up to that point will be sent in one transaction followed by the rest of the scan data as it becomes available The later in time that the FETCh command is received the larger the initial data buffer is so it will take more time to transmit T2 T3 15 17 ms This time period is mainly used to finish transferring the remaining data and to prepare for
263. rameters Mass Peak Location 18 01 Resolution 10443 Go 0 99 an 18 Intersity 100 FWHM 0 17 HW Loop Time s 0 090 T Averager Backlog o Analysis Backlog O Log Data Backlog 0 r 7 Do Crees Sw 11553 usc e simp icituMa utians 100 1100 Figure 8 6 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation 6 Identify a peak in the tuning spectrum corresponding to a known gas species see Table 8 1 For example select the peak at 18 amu which is commonly present in most vacuum environments and corresponds to the parent peak for water molecules In the Selected Peak Parameters area select Mass Peak 18 and use the Left and Right Calibrate Arrows i e Top of Tuning Spectrum to move the peak until the location window indicates 18 01 amu 830 VOM Viewer Software Fie Help 6 uw 6 UB Simplicity 4 Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save So utions 620 Trap Parameters Tuning Spectrum 7 Cabrate gt inex Sab Y 98 95 Filament Emission 0 070 Filament Bias 3000 Repeller Blas Entry Plate Bias 7 Pressure Plate Biss 75 00 Cups Blas 27 00 Transition Blas 685 00 Exit Plato Blas 125 00 EM Shield Bias 127 00 EM Blas Y 1050 00 RFAmpP P 0 500 Mast Cal Factor y 609 000 ME Restore Factory etting
264. re The lifetime of an electron multiplier is inversely proportional to system pressure The maximum recommended operating pressure for the electron multiplier is lt 1x10 5 Torr NOTE Never apply high voltage to an electron multiplier at a pressure exceeding 1x10 4 Torr since it might cause irreversible damage to the detector due to high voltage arcing 7 5 4 Operating Temperature The safe operating temperature for an electron multiplier is lt 100 C Never apply bias voltage to an electron multiplier at a temperature above 100 C Electron multipliers have a negative temperature coefficient of resistance and can experience a run away thermal burnout if operated at temperatures above 100 C 7 5 5 Bakeout Temperature The bakeout temperature must be less than 200 C with no bias voltage applied across the detector An optional heating jacket is available from the factory which provides safe regulated bakeout temperatures between 180 C and 200 C Do NOT exceed 200 C during bakeout of the MS Gauge Exceeding 200 C may cause damage to the Electron Multiplier 136 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 7 MS Gauge Maintenance The active layer i e secondary electron generation layer on the surface of the internal channel relies on the presence of reduced Lead atoms on its surface Heating the electron multiplier above 200 C induces migration of lead atoms away from the surfa
265. re qualified to do so Do not substitute parts or modify the product parts or perform any unauthorized modification to the product Return the product to a service facility designated by Brooks Automation Granville Phillips for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications Because of the danger of introducing additional hazards do not install substitute Because the VQM System contains static sensitive electronic parts the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for personal protection Use conductive or static dissipative envelopes to store or ship static sensitive devices or printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely necessary and only when wearing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron Gauge capable of causing injury or death Use extreme caution while Pe A High voltages are present within the VOM Controller and Mass Spectrometer troubleshooting when power is applied Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F
266. rigger pulses single scan 3 Sending MS Scan START commands from the Host PC single and continuous scanning Use the enabled SCAN button to execute manual MS Scan Start The MS Gauge scans in continuous mode until the SCAN button is pressed again Manual MS Scan Stop or a Host PC Scan Stop command is received by the Controller Note External Trigger MS Scan is disallowed while the unit is in continuous scan mode Blinking Scanning The SCAN Button LED blinks each time a MS Scan is executed The SCAN button ANALOG I O OUT and TRIGGER OUT LEDs blink together once each time an MS scan is completed Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview 5 4 4 MASS SPEC Button LED Press the MASS SPEC button on the VQM Controller to manually turn ON the Mass Spectrometer Gauge MS Gauge Both the MASS SPEC Button LED Green and the SCAN button LED Green become illuminated to indicate that the instrument is enabled to execute MS scans NOTE If a TPMK is being used the MS Gauge will turn ON only if the total pressure reported by the Micro Ion Gauge is below the pressure limit expected by the Overpressure Protection Mode If a TPMK is not being used the MS Gauge tries to turn ON and will stay ON if an overpressure condition is not present See Autopressure Mode on page 81 and Overpressure Protection on page 82 Press the MASS SPEC button to manually turn OFF the
267. ring Figure 8 40 Error Event List 8 6 4 Log Raw Data A Log Raw Data popup appears when the Start Raw Logging button is pushed Raw logs are large Be sure that you have sufficient disk resources to log the desired data before starting Also be sure that you have a plan for how to parse the file Stop the Raw Logging activity manually Use the popup to identify the directory and filename of the raw log file e Enter logging para Ed Log File C Data Duration 00 01 HH MM Cancel Infinite Figure 8 41 Raw Log Popup Dialog Box Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 9 830 VQM Command Set 9 1 Introduction This chapter describes how to program the VQM System from a host computer using the Controller s Command Set and a USB link The VQM System includes a standard USB 2 0 Full Speed communications port on the front panel A host computer interfaced to the instrument can easily configure calibrate diagnose and operate the system using an intuitive ASCII based instrument VOM Command Set The command language described in this chapter allows integration of all the VOM System functions into any processing or monitoring application 9 1 1 USB Driver Installation Installation of a specific driver is required for Windows to recognize the VOM Controller as a Virtual COM Port See Section 4 3 in the Software Installation chapter 9 1 2 Log
268. rocess pressure typically 10 or lower 3 Turn ON the Host PC if used to communicate with the VOM Controller Series 830 Vacuum Quality Monitor 43 Instruction Manual 830231 Rev F 44 3 Hardware Installation 4 Press the Power button on the VQM Controller to turn ON power to the VQM Controller and the Total Pressure Measurement Kit if used Do NOT press the Scan or Mass Spec buttons until instructed to do so in the Initial Powerup Procedure in Chapter 8 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 4 Software Installation 4 1 Introduction to the Software Installation The VQM Viewer Software is a Windows software package that communicates with the VQM Controller through a USB 2 0 Full Speed 12 5 Mb sec interface allowing data acquisition and full Mass Spectrometer Gauge control Advanced users can also access the full functionality of the VQM Controller using the VQM Command Set see Chapter 9 a USB link a Host PC and custom designed software packages and GUIs Due to the User Access Control in Windows 7 the USB Driver for communication between the VQM Controller and the Host PC may not automatically install during the Viewer software installation procedure See Section 4 3 if the USB Driver does not install during the software installation The person installing the Viewer Software must have Administrator access If complications are experienced while installing the Viewer Software
269. ron multiplier Nude gauges stored in bright locations must be shielded from the damaging effects of light on the electron multiplier sealable metalized Mylar bags are recommended Particle free desiccant cartridges are required Keep the plastic plug on the sensor port at all times to eliminate particulate contamination buildup 7 2 1 Storage Recommendations The following options are available for long term storage 1 Most desirable Store the MS Gauge under high vacuum conditions at all times An isolation valve between the vacuum system and the MS Gauge is recommended to protect the sensor in cases where condensation of contaminants on to the gauge s internal components might be possible during process Series 830 Vacuum Quality Monitor 131 Instruction Manual 830231 Rev F 132 7 MS Gauge Maintenance 2 If high vacuum storage is not available consider storing the sensor in a vacuum desiccator glove box or general purpose dry box with a steady flow of oxygen free dry nitrogen or Argon Use the plastic hard shell to mechanically protect the sensor and keep all particulates away from the gauge 3 Least desirable Store the gauge in a metalized Mylar bag that has been purged with dry nitrogen or argon and sealed from ambient air One option is to use the Metalized bag that was received with the product Another option is to procure metalized Mylar bags with re closeable zippers from a reliable source www alinebags com MS Gauges
270. ront panel of the VQM Controller Unit 1 Trigger IN BNC See Section 2 4 5 for specifications and Section 5 5 1 for details 2 Trigger OUT BNC See Section 2 4 5 for specifications and Section 5 5 2 for details 3 Analog IN BNC See Section 2 4 6 for specifications and Section 5 5 3 for details 4 Analog OUT BNC See Section 2 4 6 for specifications and Section 5 5 4 for details 5 USB Type B 2 0 12 5 Mb sec See Section 5 5 5 for details The Trigger IN connection allows the external trigger pulses responsible for external trigger Mass Spec Control The Trigger OUT and Analog OUT connections are used together to synchronize external data acquisition systems DAQs to collect the MS analog output signal only during the time framed by the output trigger pulses generated each time an MS scan is executed The Analog IN connection allows input auxiliary analog voltage signals into the VQM Controller Use the auxiliary signals to synchronize MS data acquisition with independant analog signals Use the USB connector to connect to a Host PC with a USB interface 5 5 1 Trigger IN BNC Connector LED Use the external Trigger IN port to deliver valid external trigger pulses to the VQM Controller to execute single mass spectra scans synchronous with external events There is no input programmability of the trigger logic on the VQM Controller Input Impedance 50 Ohm Trigger Logic EDGE Trigger Low to High TTL levels Minimum
271. rpressure protection setup Pressure Source 390 TPMK Ext Pressure UY Pressure Limit 183 Pressure Units Torr Figure 8 32 Pressure Setup 180 Pressure Source Select the source for your total pressure reading Available options include the 390802 Total Pressure Measurement Kit TPMK the Analog output of a Granville Phillips 370 Total Pressure Source i e connected to the controller s analog in port and None It is strongly recommended that you use a Total Pressure Source to protect the MS Gauge Powering the MS Gauge at total pressures above 1E 5 is not recommended and does not provide useful data Powering the MS Gauge at pressures above 5E 5 will result in automatic shutdown through the overpressure protection mode built into the controller unit Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation e Pressure Limit Enter a pressure value at which power will be removed from the MS Gauge This is a soft protection engine that works in addition to the embedded pressure protection provided by the 830 Controller The recommended setting is 1x10 3 Torr e External Pressure This indicator informs the user if external pressure is available If the Total Pressure Source is a TPMK unreasonable values will result in the Viewer Application turning OFF the indicator and failing to display total pressure The indicator is always off if you select None as your total pressure s
272. rt at the end of each scan and 3 no Host PC control of the MS Gauge or MS scan is available Manual scan control can be used to execute MS scans External trigger control is also allowed to perform MS scan control Press the MASS SPEC button to turn ON the MS Gauge and enable the SCAN button For manual operation Wait 20 seconds and press the illuminated SCAN button to MS Scan Start i e continuous scan mode is executed The external trigger input port becomes disabled Press the blinking SCAN button to MS Scan Stop The external trigger input port reverts to its pre scan state ola Oe SE E 8 For external trigger provide a valid external trigger pulse while the SCAN button is illuminated and while the external trigger input port is enabled to perform single scans 9 Auser provided fast data acquisition system is required to acquire store and display all MS data Examples of fast DAQ systems include oscilloscopes fast DAQ data logger etc 10 Use the output trigger pulses to trigger the data acquisition system and to time frame the MS analog out signal This Operational Mode supports e Manual MS Gauge control e Manual MS Scan control External trigger scan control MS Analog out signal data acquisition storage and real time display NOTE The manual scan is in continuous mode and external trigger input generates a single scan 5 13 Timing Diagrams for MS Scan Control The Mass Spectrometer is a pulsed device that output
273. ruction Manual 830231 Rev F 27 28 3 Hardware Installation 3 3 Unpacking the Components 3 3 1 Before You Open the Boxes Adhere to good high vacuum practices throughout the Mass Spectrometer Gauge installation procedure Select a clean and dust free area next to the vacuum port before the Mass Spectrometer Gauge installation process begins To reduce the chances of contamination and to maximize the lifetime of the electron multiplier detector do not break the seal of the metalized Mylar9 bag used to package the mass spectrometer gauge until you are ready to install it on the vacuum chamber Take a moment at this time to review the Electron Multiplier Detector in Section 7 5 Inspect all components of the VOM System upon unpacking Report any damage or missing components to Brooks Automation Inc 3 3 2 Checklist of Components 3 3 2 1 Standard Equipment See Figure 3 1 VQM Mass Spectrometer Gauge in a vacuum sealed metalized Mylar bag VQM Controller Unit bench top mount Cable interconnect VQM Controller to Mass Spectrometer Gauge Cable interconnect USB VQM Controller to Computer Universal Power Supply for VQM System AC to 24 Vdc CD VQM Viewer Application Software Optional Equipment Micro lon ATM Total Pressure Measurement Gauge TPMK Cable interconnect VQM Controller to Micro lon ATM Module Cable for Log Linear analog pressure output from a Granville Phillips Series 370 lon Gauge Controller Heater
274. s performed on the Entry Plate ENTR in the low range The minimum acceptable voltage is 24 464V the maximum acceptable value is 31 36V The measured value is 27 659V The measured value falls within the acceptable range and therefore the Entry Plate in the low range passes the test as indicated by the character Legend Pass Fail 2 Cannot determine Pass or Fail Example Test Report lt LF gt indicates a Line Feed character ASCII OxOA CR indicates a Carriage Return character ASCII OxOD ENTR 2 4640E 01 2 7659E 01 3 1360E 01 lt LF gt ENTR 3 9600E 01 4 4010E 01 4 8400E 01 lt LF gt PP 9 4690E 00 1 1013E 01 1 2811E 01 lt LF gt PP 3 8772E 01 4 2581E 01 4 7388E 01 lt LF gt CUPS 1 6080E 00 1 9756E 00 2 4120E 00 lt LF gt CUPS 3 0600E 01 3 5519E 01 3 7400E 01 lt LF gt EXIT 1 4490E 01 1 5973E 01 1 7710E 01 lt LF gt EXIT 4 0362E 01 4 2917E 01 4 6438E 01 lt LF gt EMSH 5 2615E 00 6 0530E 00 7 1185E 00 lt LF gt EMSH 3 8403E 01 4 2371E 01 4 6937E 01 lt LF gt EMEL 0 0000E 00 0 0000E 00 1 0000E 02 lt LE gt Series 830 Vacuum Quality Monitor Instruction Manual 830
275. s a full mass spectrum scan 1 135 amu under default instrument settings in 80 msec A scan can be triggered internally i e single or continuous scan mode from a Host PC or can be triggered externally by a logical signal supplied by the user Data can be collected via the Analog OUT connection on the front panel or digitally via USB link One of the main features of the VQM Controller is the ability to collect a full range mass spectrum in 100 ms or less During this 100 ms time period a wide range of actions take place The following timing diagrams show the sequence of events that occur when different triggering mechanisms are initiated The timing diagrams focus mainly on the timing of the four front panel BNC outputs as they progress from initiation of a scan to the time when a user can expect data and the possible variations Data transfer over USB using the FETCh command is also discussed 5 13 1 Internally Generated Trigger The internal trigger timing diagram can be broken down into two different cases 1 when no USB data i e no FETCh command received is sent to a Host PC and 2 when the FETCh command is received and data is transferred over USB to a Host PC Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview Start End Scan ui 8 3 lt O2 OoO Tot Scan Time _ gt e co n n n mis Framing Prts s gt Dig Out RF Sweep An
276. s is an important parameter since it defines the possibility of electrons reaching the walls of the vacuum system and other ionization based devices in the system The factory default bias voltage for the filament is 30 Vdc A positive bias voltage assures that all electrons emitted from the filament are directed towards the entry plate and cannot reach the vacuum system walls This is identical to what is done with filament assemblies in ionization gauges and minimizes cross talk between ionizing instrumentation Careful control of the filament bias voltage is very important in off axis ionization sources In this case the difference in voltage between the filament and the entry plate sets the maximum energy of the electrons as they enter the trap and also sets the trajectory arch the electrons will track through the trap The initial energy of the ions is intimately related to the exact location within the trap volume where the ions are formed Changing electron energy has been shown to have very minimal effect on the ejection frequency of the ions but it has a substantial influence on 1 peak heights 2 superharmonic contributions and 3 baseline offset levels In an off axis ionization trap the ions are typically formed deep within the trapping potential well i e 20 to 30 Volts deep The exact origin of the ions depends on the angular orientation of the filament relative to the entry plate s plane and the energy of the electrons As the e
277. s of the spectrometer using common mass peaks found in high vacuum systems The Viewer Software is a Windows based application that communicates with the VQM Controller through a USB 2 0 virtual Com port The USB port on the VQM Controller is a type B 2 0 full speed 12 5 Mb sec connection to interface with a Host PC The USB cable must meet the specifications for USB 2 0 USB IF NOTE Ifthe USB cable becomes disconnected while the VOM Controller power is ON the Controller may need to be turned OFF and restarted to reestablish proper communication with the Host PC Users can also access the functionality of the instrument using the VOM Command Set see Chapter 9 a USB link a Host PC and custom designed software packages or GUIs The VQM Viewer Software can collect data from VQM Systems operated under 1 manual control i e front panel buttons 2 external trigger control i e external trigger input signal and 3 full software control i e command set interface The trigger IN port on the Controller is automatically Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 145 146 8 Viewer Software amp Initial Operation disabled when continuous MS scanning is executed under Host PC or Manual scan control To enable the Trigger IN functionality make sure that continuous Scanning is not enabled and apply an external trigger signal to perform individual scans Single MS scans will be performed each time an
278. s range Smallest to largest mass that can be measured with the VQM system Mass Spectrometry An analytical technique that measures the mass to charge ratio of charged particles It is used to determine masses of particles or to determine the elemental composition of a sample or molecule Maximum pressure The maximum total pressure where the device operates with a known and acceptable accuracy MS or Mass Spec Mass Spectrometer An instrument that can measure the masses and relative concentrations of atoms and molecules MS Gauge Mass Spectrometer Gauge The vacuum sensor used by the 830 VQM System to determine and measure the gases in the vacuum chamber msec or ms Millisecond 1000th 10 3 of 1 second m z or m Q Mass to charge ratio defined as the atomic weight of an ion devided by its charge A number defining how a particle will respond to an electric or magnetic field that can be calculated by dividing the mass of a particle by its charge PP or partial pressure The partial pressure of a component in a gas mixture is the pressure that the gas would exert on the vacuum system if all other gases were removed from the chamber Ratiometric partial pressure A partial pressure display of gases in a chamber showing the contribution of each gas relative to the others Units parts per million etc Resolution Resolution measures the ability to distinguish peaks of very similar mass to charg
279. s9 agerent Haw ae haa Haas 43 3 9 5 VQM Controller to Host PC Connection eesse annerer eee 43 3 9 6 USB PA Ma God ee alee hela he o ear 43 Initial Start p ii eod ua eR eU A A a aes A ka de ed AREA 43 Software Installation 2c ie reri k peau rev RU as 45 Introduction to the Software Installation cesses 45 Install the Viewer Application Software 1 0 cee tenn ee teen nee n ees 45 Install the USB Driveszz ooh eot inen pec eR eR CER GR Rod ated P Rb dus 54 4 3 1 Installing the 830 Driver from the CD sseeeeeeeeeee e 54 4 3 2 Installing the 830 Driver from a Download Location 0c eee esee 54 VOM Controller Overview esee IH Hh 57 Introduction rta tes Mic Riis ns be eed ba dd rr un 57 Tetis used in this chaptet o ce nt ee eS SS OE Ve A PERI SPI Tm 58 VOM Controller Overview 2 0 ene ene eee hh hr rn 58 Front Panel Controls Interconnects and LEDs 0 0c cece cent I 60 5 4 l Buttons Ed ta nee a ede aur rer a tea St t d c dd 60 5 42 Power Button LED si cca oe SECO bee Sa PA QU Ran eye A oe 61 5 4 9x SCAN Button LED su A Rede gana eae Ate S RE 62 5 4 4 MASS SPEC Button LED 0 ec cece a e e mere 63 Front Panel Connectors cu ceu feces m E ek a e pee a bsc oh d ad aen a 65 5 5 1 Trigger IN BNC Connector LED cries skinai ie ea i E e 65 352 Trigger OUT BNG Connector LED ocn aE EAA Rete m OR E 66 5 5 3 Analog IN BNC Connector LED 67 5 5 4 Analog OUT BNC Connector LED
280. screen before you click Finish When you click Finish an installation notice will appear See step 9 and Figure 4 15 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 51 4 Software Installation iz 830 VOM Viewer Software InstallShield Wizard InstallShield Wizard Completed The InstallShield Wizard has successfully installed 830 vOM Viewer Software Click Finish to exit the wizard Simp icity The readme file displayed below can be Found in the Solutions C Program Files Simplicity Solutions data directory The manual 830231 Instruction Manual pdf is located in the install directory data directory in pdf format To register the software please go to http www brooks com pages 4111 e Registration of this software is required to receive important product updates Your browser will display the software registration page when the Finish button is pressed Figure 4 14 Finish the Software Installation 9 An installation notice will appear to install the 830 Driver see Figure 4 15 Click Continue Anyway Software Installation A The software you are installing has not passed Windows Logo testing to verify its compatibility with Windows lt P Tell me why this testing is important Continuing your installation of this software may impair or destabilize the correct operation of your system either immediately or in the future Microsoft strongly recommends that you stop this in
281. sembly The blue arrow depicts the ionization path of the electron beam and represents how ions are created between the entry plate and entry cup directly inside the trap volume i e continuous ionization Notice that electrons are thermionically generated outside the ion trap hot filament source but directed into the ion trap volume through an off axis aperture located on the entry plate Figure 6 9 also illustrates a potential curve depicting the negative high voltage HV trapping potential well that develops along the cylindrical axis of the trap The purely electrostatic ion trap confines the ions of different mass to charge M q ratios and kinetic energies within an anharmonic potential well lons of all masses and a wide range of energies oscillate along the cylindrical axis of the trap confined by the electrostatic potential well The red trace depicts the oscillatory path for a single ion modeled by SIMION and demonstrates that radial focusing of the ion motion along with uniaxial oscillation are responsible for providing stable oscillatory trajectories The natural oscillation frequency NOF of an ion in such a potential well depends on the amplitude of oscillation and results in anharmonic oscillatory motion This means that the NOF of a specific ion trapped in such potential well is determined by four factors 1 the details of the trap geometry i e mechanical design 2 the ion s mass to charge ratio M q 3 the ion s insta
282. sign manufacture and intended use of the instrument Brooks Automation Inc disclaims all liability for the customer s failure to comply with these requirements The service and repair information in this manual is for the use of Qualified Service gt Personnel To avoid electrical shock or personal injury do not perform any gt N procedures in this manual or perform any servicing on this product unless you are qualified to do so e Read Instructions Read all safety and operating instructions before operating the product e Retain Instructions Retain the Safety and Operating Instructions for future reference Heed Warnings Adhere to all warnings on the product and in the operating instructions e Follow Instructions Follow all operating and maintenance instructions e Accessories Do not use accessories not recommended in this manual as they may be hazardous Series 830 Vacuum Quality Monitor 11 Instruction Manual 830231 Rev F 1 Safety Instructions To reduce the risk of fire or electric shock do not expose this product to rain or moisture Objects and Liquid Entry Never push objects of any kind into this product through openings as they may touch dangerous voltage points or short out parts that could result in a fire or electric shock Be careful not to spill liquid of any kind onto the products P Do not substitute parts or modify the instrument Because
283. sing or damaged the carrier that made the delivery must be notified within 15 days of delivery in accordance with Interstate Commerce regulations to file a valid claim with the carrier Any damaged material including all containers and packaging should be held for carrier inspection Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 2 Introduction amp Specifications If your shipment is not correct for reasons other than shipping damage contact Brooks Automation Customer Service Department 6450 Dry Creek Parkway Longmont Colorado 80503 phone 1 303 652 4400 email csr coebrooks com 2 3 Glossary of Terms Table 2 1 Acronyms and Definitions Term Meaning VQM Vacuum Quality Monitor Vacuum Quality Measurement Series 830 VQM A combination of an ion trap mass spectrometer vacuum gauge and VQM Controller integrated into an operational system that measures gases in a vacuum chamber Absolute partial pressure A partial pressure display of gases in a chamber showing the absolute pressure of each gas ADC Analog to Digital Converter AMU amu Atomic Mass Units The atomic mass unit is defined as 1 12th the weight of a single carbon isotope 12 atom Anharmonic An oscillating system that is not undergoing simple harmonic motion not harmonic Analog Input The Series 830 controller has one analog input port that can be used to digitize analog voltage signals from e
284. ss all exposed conductors are maintained at 3 earth ground This hazard is not unique to this product Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product product are always used in a safe manner Carefully check the system programming i It is the user s responsibility to ensure that the automatic signals provided by the before switching to automatic operation Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 1 Safety Instructions 1 2 Equipment Grounding Proper Grounding All components of a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation The power cord of this product MUST be connected only to a properly grounded outlet Be aware however that grounding this product does not guarantee that other components of the vacuum system are maintained at Earth ground Have a licensed electrician check the entire system to assure proper and safe grounding of all electrical y components Complying with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe oper
285. ssing e OFF No averaging e Running Average AKA Finite Impulse Response FIR filter The N most recent scans are summed and divided by N where N is the number of scans to average You may perform a running average on from 2 to 100 scans e Cumulative Moving Average AKA Infinite Impulse Response IIR filter N 1 previous average current scan N where N is the number of buffers to average You may perform a cumulative moving average from 2 to 50000 scans e Accumulate Sum N scans and divide by N A new value is reported every N scans That is unlike the Running Average there are no intermediate values You may perform a cumulative moving average on from 2 to 50000 scans Results Table Trend Graphs and Histograms are only updated once per N scans Logging does not occur until the data is collected and the accumulator average calculated The Avgs Collected identifies how many scan are currently collected towards the average as configured The Response Time is a calculation of the number of scans x the hardware loop time Series 830 Vacuum Quality Monitor 175 Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation 8 5 4 Short Term Trend Graph The Short Term Trend Graph appears only on the Summary Screen It displays 15 minutes of history from the entries in the Results Table Note that gases and masses may come and go on the Results Table When an entry disappears from the Results Table it may be re
286. stallation Click Install to begin the installation If you want to review or change any of your installation settings click Back Click Cancel to exit the wizard InstallShield Figure 4 10 VOM Application Software Installer ie 830 VOM Viewer Software InstallShield Wizard Simplicity Solutions Please wait while the InstallShield Wizard installs 830 YOM Viewer Software This may take several minutes vou selected are being installed Status Installing MFC 10 redistributable COO Installsmeld Cancel Figure 4 11 Installing the Microsoft Foundation Class Library The installation routine will install 27 National Instruments components that are used by the VQM Viewer Application software This will take approximately three to five minutes 50 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 4 Software Installation WB Simplicity Solutions by Granville Phillips amp Overall Progress Currently installing NI Uninstaller Part 1 of 27 Copying new files Figure 4 12 Installing 27 National Instruments Runtime files Screen 1 of 27 Y Simplicity Solutions by Granville PhillipsE 5 xl nee eee Overall Progress i ip Currently installing NI TDMS Part 27 of 27 Figure 4 13 Installing 27 National Instruments Runtime files Screen 27 of 27 8 It is recommended that you read the messages displayed on the InstallShield Wizard Completed
287. stallation now and contact the software vendor for software that has passed Windows Logo testing Continue Anyway STOP Installation Figure 4 15 Windows Installation Notice 10 When the installation is complete the Registration screen will appear in your browser Registration is strongly recommended to receive important information product updates and access to helpful utilities and documentation 52 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Simplicity Solutions Software Registration Brooks Automation Ini je Ito liver brooks comipages 4111 smolicky solubons software regitrabon dim De Edt Yew Google Fares Tods Help m PTS GB eplcky Solon Sotware Regitration Brooks Aus 4 Software Installation R p Bam D ape g ronde Par 5 5 E 1 BONIN CAMEL Sim Sb eputer your Simphcty Sohtions gt PRODUCTS RS CONTACT US STAY INFORMEN QUICK LINKS icity utons Figure 4 16 Registration Screen 11 The Viewer Application is now installed and ready to use See the Quick Start Guide for initial startup and setup procedures and Chapter 8 for detail 12 Connect the USB cable between the computer and the ed operation instructions VQM Controller and turn ON power to the VQM Controller Detailed VQM Controller and Mass Spectrometer Gauge installation instructions are given in Chapter 3 Hardware Installat ion 13 Double click the Simplicity So
288. t Total pressure must be available for the leak function to work Use the Leak function when checking sniffing the vacuum chamber fittings for leaks Use a known gas such as helium to check suspected areas where leaks may occur Select a gas from the drop down menu to check for leaks Set the Mass and the leak limit in the Leak Check Parameters before beginning the leak check Total Pressure indication must be available for the leak check to function properly The Leak Graph indicator field is green if the leak mass level is below the leak limit and red if the leak mass level is above the leak limit F B3U YOM Viewer Software SimplicituPa 9v l Solutions Settings vim LogData Save b di u Connect Mass Spec Scan Summary Histogram Trend Leak Tune Leak Trend Pressure vs Time Log Scale Mass Select Leak Limit Avg Partial Pressure 28 amu Nitrogen 5 0E 9 3 08E 9 Torr Torr v CLEAR AUTOSCALE 1 000E 7 I d Avg Total Pressure 9 30E 9 Torr Em Select the mass to use for the leak check and the leak pressure limit The Leak Graph Indicator field is Green if the leak amu is below the leak limit and Red if the leak amu is above the leak limit 1 000 9 14 13 00 D D D D D p i D j i 14 13 05 14 13 07 14 13 10 14 13 12 141315 14 13 17 14 13 20 14 13 22 14 13 25 14 13 27 Time Figure 8 14 Checking for System Leaks 166 Series 830 Vacuum Qual
289. t Plate Bias on page 122 The entry plate bias is rarely modified or operated away from factory default settings Modification of the entry plate bias is not recommended Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 121 122 6 lon Trap Mass Spectrometer Gauge 6 9 5 Exit Plate Bias V7 in Figure 6 16 The Exit Plate has a centrally located semi transparent gridded aperture through which all detected ions are ejected from the trap The exit plate bias is generally a few volts i e 5 Volts factory default lower than the entry plate bias Operating the exit plate at a voltage bias lower than the entry plate assures that all excited ions are ejected from the trap through the exit aperture without being able to reach and get lost to the back plane of the entry plate In general the exit plate bias should be operated between 0 and 7 Volts below the entry plate potential lons are generally confined and mass peaks are detected as long as the exit plate is within 30 V of the entry plate However large bias differentials i e greater than 7 V between the end plates often causes the appearance of sub and super harmonic peaks in the spectra than can lead to false positive identification of mass peaks at low and high masses The difference in voltage between the entry and exit plates defines the Trap Potential Asymmetry and has significant impact on 1 ejection frequency i e mass axis calibration 2 RF
290. tart Use the Screen Selector Icons to display data in the preferred fashion 830 YOM Viewer Software File Help i o bud sd O60 amp UB Simplicity 94 Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save So utions P EEE Norm 9 Absolute m a B 1 s x ak he blue line relates to the 1st Mass a he red line relates to the 2nd Mass a he green linerelates to the 3rd Mass a a a i 1 16 00 21 16 00 22 16 00 23 a a 1 0 na 0 8 Average Total Pressure 2 49E 7 Torr WX 97 gt Current Total Pressure 2 49E 7 Torr Jas eae Averaging Mode Aygs to Collect Avgs Collected Cumulative Moving vg lt 100 100 Response Time 8 438 s pit i f l f 60 0 7060 Mass amu Sets the scale to log or linear Figure 8 10 Run a Scan Screen 162 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 Viewer Software amp Initial Operation dh Summary 8 4 4 Summary The Summary page is the main page showing all data currently being collected 830 YOM Viewer Software a 0x8 Simplicitu 4 Summary Histogram Trend Leak Settings Tune Log Data Save So utions Trend esse Pressure Torr ES P b E 1 000E 11 i 13 59 21 13 59 22 13 59 23 Histogram 1 0 Total Pressure o3 0 8 Average Total Pressure 1 04E 8 Torr A 0 7 Current Total Pressure 1 03E 8 Torr yes Post Processing
291. tate forces the Controller into Stand by power mode Power Mode LED Status Description Access OFF OFF No external 24 Vdc power available Remove 24 Vdc power from the to the Controller Controller to access this state Pressing the power button in this Note The VOM Controller saves its state has no consequence power state when 24 Vdc power is removed The instrument returns to the same state Stand by or ON when the power supply is reconnected to the Controller Standby OFF External 24 Vdc power is applied to External 24 Vdc power must be the Controller but all gauge available to the Controller to access this functionality and the USB port are state To place the Controller in stand by disabled All front panel LEDs are mode press the Power button on the OFF front panel of the Controller This is a state of minimal power consumption in which all Note The Controller cannot be functionality of the mass awakened from stand by mode through spectrometer TPMK and USB the USB interface communication are disabled The microprocessor is awake but uses the minimum possible amount of power Note No power is available for the TPMK in this state Pressing the Power button in this state forces the Controller into the ON power mode ON ON External 24 Vdc power is applied to External 24 Vdc power must be available to the controller unit to access this state Press the Power button on the Controller to turn the Controller ON and to activate t
292. the Filament power setpoint in FIXed mode Not defined in ADJustable mode Example SOUR POW 0 5 sets the Filament power setpoint to 500mW lonizing Region Cathode L e Entry Plate Adjustable Adjust Pf Ve x lp Fixed Fix Vr Figure 9 3 lonizing Region of the Mass Spectrometer Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 199 200 9 830 VQM Command Set 9 12 TEST Subsystem The Test subsystem provides commands for self test The diagnostic test exercises most channels on the instrument at a low voltage of lt 50V Table 9 10 Test Commands Keyword Parameter Form Comments TEST FULL Runs a self test that is a superset of the test run at POST and returns a complete test report See the sample report in Section 9 12 1 below 9 12 1 Test Report The test report consists of a Line Feed delimited list of tested systems or channels Each element except for the Digital Input Output indicates the channel that was tested using the same moniker as the logical instrument if possible if the test is in the low range or the high range the acceptable values the measured value and a sign indicating if the element passed or not The Digital Input Output element shows the low range value high range value and a sign indicating if the element passed or not For example ENTR 2 4640E 01 2 7659E 01 3 1360E 01 indicates that the test wa
293. the MS Gauge from overpressure conditions The amount of power delivered to the filament is constantly monitored and power to the MS Gauge is immediately removed if an overpower condition is detected Series 830 Vacuum Quality Monitor 57 Instruction Manual 830231 Rev F 58 5 VQM Controller Overview 5 2 Terms used in this chapter Table 5 1 Terms and Definitions Term Meaning Analog to Digital Converter ADC Analog to digital conversion is an electronic process in which a continuously variable analog signal is changed without altering its essential content into a multi level digital signal ART MS Auto Resonant lon Trap Mass Spectrometry A new mass separation technology used in the VQM System AutoPressure Pressure status information from the TPMK that is used to protect the MS Gauge See Section 5 10 1 Controller The VQM Controller See Figure 5 1 and Figure 5 2 DIF header Data Interchange Format See Section 9 6 ETPR External Total Pressure FETCh A command that tells the software program to go get some particular data See Section 9 5 Micro lon The Series 390802 Micro lon ATM total pressure measurement gauge See TPMK below Section 5 10 and Figure 2 3 Micro lon Gauge and TPMK are used interchangeably throughout this instruction manual MS Gauge The Mass Spectrometer Gauge that is connected to the vacuum chamber The MS Gauge can be configured as a nude gauge see
294. the VOM Command Set The amplitude setie Pasnensdurerke VOM ESHimand Set DDS Ref is related to the peak to peak voltage RF V expe EREDO NEIRA plate as RF Vy 0 12 DDS_Ref This means that if the RF amplita amp ll n amp deg Rey SO SCA 6254012 mV 60 mV RF_Vpp is present on the transition plate click the Save icon in the f a Viewer Software The first column NOTE The RF amplitude setting is adjustable through the VOM iewer Applicat on or the VQM Command Set omtaimg sva The effect of RF V amplitude on the Ion Trap Signal is discussed in Section 6 9 of this manual 5 7 3 Electrometer The typical output of the MS Gauge consists of a series of ion current peaks with amplitudes in the order of tens of picoAmps and bandwidths extending to 30 kHz An electron multiplier detector is required to amplify those ion currents into the nanoAmp range gain is approximately equal to Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview 1000X typical so that standard electrometers can be used to collect ion signals in real time without peak shifts and resolution degradation due to bandwidth limitations of standard transimpedance amplifiers Analog Output Output Electron Eel ve 60dB fag anawit Multiplier decade rolloff Signal e e e 0 5nA Output Offset Current f Two Stage Low Pass Filter 12 bit ADC Transimpedance 30 kHz 3 Pole 0 3V Input Range Am
295. the Viewer Software The VQM Command Set available for the VQM System allow users to vary settings on the ion trap and also provides an internal measurement of the actual voltages and currents delivered to the ion trap by the VQM Controller Built in diagnostics circuitry constantly monitors and measures the voltages and currents supplied to the MS Gauge and dedicated commands are available to query the measured values and to monitor the system for deviations between the requested and the actual settings present on the ion trap NOTE The power supplies are tested during the Power ON Self Test POST procedure and the results of that test are available through the VOM Command Set TEST All self diagnostic voltage checks are performed at low voltages 44V max allowing safe testing the operation of the Controller s power supplies even if no MS Gauge is connected to the VOM Controller 5 7 1 Filament Overpower Detection The Electron Emission Filament power supply is constantly monitored to detect overpower conditions To generate the requested emission current a low voltage high current filament power supply delivers heating power to the filament wire The filament wire heats up until it reaches a temperature at which thermionic emission produces the requested electron emission current The electrons are ejected from the filament focused through the entry plate slit and finally neutralized on the back plane of the entry plate A feedback l
296. the applicable local state and national safety requirements Under certain conditions dangerous high voltage can be coupled directly to an ungrounded conductor through a gas almost as effectively as through a copper wire connection This hazard which is not peculiar to this product is a consequence of the ability of an electric current to flow through a gas under certain circumstances A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential High voltage can couple through a gas to the internal electrodes of a gauge Do not touch the exposed pins on any gauge installed on a vacuum system where high voltage is present To avoid the chances of electrical shock all exposed conductors including the feed through pins of the MS Gauge must be maintained at earth ground before the cable connector is attached to the MS Gauge See System Grounding Procedure in Section 3 8 3 4 3 Operational Requirements Do not operate the MS Gauge in a corrosive gas environment Corrosive gases will limit gauge lifetime and degrade both filament and electron multiplier detector performance Do not operate the MS Gauge in the presence of strong magnetic fields The operating pressure range for the MS Gauge is between Ultra High Vacuum UHV and 1x10 Torr The VOM System provides optimal performance at its pressure sweet spot of 2E 7 Torr The maximum safe operating pressure for the MS Gauge is 10 4
297. the electrical continuity between these two ground systems 3 9 VQM Controller Signal Input Output Connections The VQM Controller includes four independent signal input output ports on the front panel The VQM Controller and MS Gauge can be used without a Host PC However only limited operating functionality is available See Section 5 12 3 and Section 5 12 4 for more information C 830 VaM a TRIGGER rqa v TR Mo fo a Ed SRA poo M IN E Figure 3 16 Front Panel of the VOM Controller 3 9 1 Trigger Input The Trigger IN connector is a BNC type The Trigger Input is a Transistor Transistor Logic TTL level input A single mass spectrometry scan is completed each time a low to high TTL transition is detected at the port 1 millisecond minimum pulse width The Trigger Input port is connected to external TTL trigger signals and used to synchronize mass spectrometry scans with external events See Section 2 4 5 and Section 5 5 1 for more information 3 9 2 Trigger Output The Trigger OUT connector is a BNC type The Trigger Output is a Transistor Transistor Logic TTL level output that frames the start and end of each mass spectrometry scan The output of the port goes high when a mass spectrometry scan is initiated and returns to its low state at the end of the mass spectrometry scan 80 milliseconds nominal scan time Use the Trigger Output pulses to trigger fast data acquisition systems connected to th
298. the end of the MS scan Use the rising edge to trigger external DAQ systems Use the length of the pulse to frame the MS scan The Trigger OUT LED illuminates with a single color Green which indicates 1 whether the Trigger OUT port is enabled or disabled and 2 if output trigger pulses are delivered by the VOM Controller each time a Mass Spec scan is performed Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview Table 5 6 Trigger OUT Connector LED LED Illumination Trigger Output Port Green Status Description OFF Disabled The Trigger OUT port is disabled No trigger output pulses are available from the Trigger OUT port ON Enabled The trigger OUT port is enabled Output trigger pulses are available from the trigger OUT port each time an MS scan is executed Blinking Scanning The trigger OUT port is enabled and output trigger pulses are actively being delivered by the VQM Controller that frame each MS scan that is executed The LED blinks OFF each time an MS scan is executed 5 5 3 Analog IN BNC Connector LED Use the Analog IN port to connect transducer voltage signals to the VQM Controller For example connect the port to pressure or temperature transducers This functionality allows sensor integration and signal synchronization The Analog IN port is electrically connected to a 12 bit analog to digital converter ADC The fast ADC provides a fres
299. the mass axis calibration and the mass range of the VQM System can be expected each time a user changes the voltage biases of the ion trap electrodes A single gas Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview calibration capability built into the VQM Viewer Software allows users to recalibrate the mass axis of the VQM when changes are made to the ion trap voltage settings A copy of the factory default settings is also stored in memory to allow users to revert to factory default settings in case the VQM Controller ceases to operate properly under user preferred settings The following table summarizes the power supplies voltage and current present in the VQM Controller electronics along with Min Max and Increment settings Table 5 10 Power Supply Settings for the MS Gauge lon Trap Min Max Power Supply PA Default Description Electron Emission 0 001 mA 1 5 mA 0 070 mA The electron emission source consists of a Current 0 001 mA filament heater power supply and a feedback loop system that allows regulation of the heating power based on requested emission current The emission current is measured as electron current leaving the filament wire Repeller Bias 10V 60V 25mV 25V The Repeller bias voltage is used to optimize the focusing of the electron beam into the ion trap through the entry plate slit The repeller bias voltage is derived from the Electron Multiplier H
300. the next trigger pulse In the case that a FETCh is received late into a trigger pulse it is possible that the amount of time to transmit the data buffer may exceed the time remaining until the next expected trigger pulse If the trigger pulse is received before the Transfer Complete Interrupt an over trigger will be issued and a scan will not start on that trigger pulse This is indicated by the Mass Spec button on the front panel blinking Red A new scan will not be initiated until the following trigger pulse This is one case that could generate an over trigger Over triggers There are two ways an over trigger can be generated First if a trigger is issued followed by a second trigger pulse issued prior to T2 in the diagram above an over trigger is certain This is indicated by the Mass Spec button on the front panel blinking Red momentarily The second way to generate an over trigger is illustrated in the previous section If the Transfer Complete Interrupt has not been received and another external trigger pulse is received an over trigger will be generated even if the trigger pulse comes after time T2 in the diagram above It was demonstrated in the section for internal triggering that a period of about 83 85 ms is obtainable If a user attempts to externally trigger at this rate the timing between the Transfer Complete Interrupt and next trigger pulse may overlap and cause an over trigger in which case the data will not be obtained at t
301. tial well gets deeper the threshold for the ejection of ions gets larger The superharmonic peaks are the first to disappear from the spectrum since their thresholds are already higher Keeping RF V constant it is possible to eliminate superharmonics by simply increasing the depth of the potential well Superharmonics are eliminated by 1 increasing the exit plate voltage setting it less negative 2 increasing electron energy and 3 reducing RF Vpp Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F Chapter 7 MS Gauge Maintenance 7 1 Introduction This chapter describes common maintenance and troubleshooting procedures as well as best known practices for the VQM Mass Spectrometer MS Gauge It also provides practical information regarding unpacking handling and storage of the MS Gauge 7 2 Unpacking Handling and Long Term Storage The MS Gauge is a high vacuum sensor that must be handled and stored following strict high vacuum industry standards to avoid 1 the buildup of contamination 2 performance degradation and 3 irreversible damage to its functional components The MS Gauge is assembled at the factory using the highest standards of cleanliness and vacuum compatible manufacturing Selected components are vacuum fired prior to assembly to eliminate the potential of internal out gassing Filament assemblies are tested and out gassed in a dedicated vacuum station to avoid irreversible contamination
302. tion Manual 830231 Rev F 139 7 MS Gauge Maintenance 7 6 2 Filament Assembly Replacement A failed filament in the Mass Spectrometer Gauge can be replaced If troubleshooting has revealed that the MS Gauge is inoperative follow the procedure below to replace the filament assembly High voltages are present within the Mass Spectrometer Gauge present a risk of electrical shock capable of causing injury or death Turn OFF and disconnect power to the VQM Controller and disconnect the cable from the MS Gauge VA before removing the Gauge from the vacuum chamber Do NOT disconnect the cable from the MS Gauge while power to the VOM Controller is ON Damage to the Gauge could result The MS Gauge is an Ultra High Vacuum instrument and MUST be handled as such Replacement of the filament should be done only in an environment suitable y N for UHV components Be sure to prevent contamination of the MS Gauge and components Use only clean room suitable tools wear clean room suitable gloves face mask and clothes during this replacement procedure i The components of the MS Gauge are fragile Be especially careful when A disassembling and reassembling the gauge Do NOT scratch the ConFlat knife edge on the gauge NOTE The filament replacement kit includes a custom pair of tweezers that are notched to grasp the retaining ring Tweezers to grasp the retaining ring Filament Assembly Figure 7 1 Com
303. tipliers are engineered to deliver high gain and low dark current The peak amplitudes in the mass spectra are directly related to the gain of the electron multiplier detector Gain is non linearly related to electron multiplier bias voltage The exact dependence between Peak Amplitudes and Bias Voltage varies widely from unit to unit and also as a function of gauge history To provide optimal dynamic range and detection limits the Electron Multiplier Gain must be optimized the first time the VQM System is activated under vacuum The VQM system is a ratiometric device therefore readjustment of the gain of the electron multiplier after it is initially set is not required until the detection limits of the instrument are compromised In general peak amplitudes must be adjusted to provide the desired detection limits The default trans impedance gain for the Controller s electrometer is 20nA V which provides a 60 nA input current range Mass peaks exceeding the 60 nA upper limit will cause electrometer input overload and result in peak clipping i e inaccurate ratiometric gas composition measurements The bias voltage of the electron multiplier must be carefully controlled to avoid electrometer input overload Electron Multiplier Gain Adjustment is a required procedure for the initial operation of the VQM System The electron multiplier gain adjustement must be performed Every time a new MS Gauge is installed in a vacuum system e After each el
304. tive the amount of excitation required to eject ions from the trap decreases and the amount of RF V required to eject ions also decreases for the same scan time RF V generally needs to be increased if ions are formed deeper within the potential well for example by misalignment of the filament entry slit assembly in the ionizer For example if the filament moves to a higher position relative to the slit and the electrons are injected into the trap with a steeper angle ions are formed deeper within the trapping potential well and peak intensity is reduced unless RF V is increased The reduction in peak amplitude is caused by the increase in ejection threshold that takes place when the ions need to be excited over a larger energy range 6 9 10 Electron Multiplier Bias V9 in Figure 6 16 The electron multiplier is a state of the art ion current amplifier device that collects a significant fraction of the ions ejected from the trap and converts each ion into many electrons with a gain factor which is nominally 1000X and controlled through the Bias Voltage setting The current emitted from the electron multiplier is collected with an anode cup biased at analog ground and connected to an electrometer with a default 20 nA V gain a 3 V input voltage range and a 60 nA output range The gain of the electron multiplier is controlled through its bias voltage The gain of the electron multiplier and the amplitude of the peaks in the mass spectra
305. to perform single scans 1 INITiate FETCh or 2 MEASure ARRay SPECtrum 5 11 6 Continuous Scans MS scans are continuously executed until a Stop command is issued Continuous MS scans can be executed manually or by command from a Host PC For manual continuous MS scanning press the SCAN button on the VQM Controller The Controller will perform scans continuously until the SCAN button is pushed again For Host PC commanded continuous scanning send a Continuous Scan command There is a single command sequence that allows continuous scans INITiate CONTinuous ON FETCh A Scan Stop command must be issued if a new Scan Start needs to be issued while continuous scanning or if access to external trigger scan control becomes necessary 5 12 Typical System Configurations The VQM System is a versatile instrument capable of providing mass spectrometry data under many different instrumentation setups and with a very wide range of data collection options The following sections describe 4 basic modes of operation for the VQM System 5 12 1 Standard Setup This is a very common configuration for the VQM System This operational mode provides access to both manual or Host PC MS Scan control In this configuration The MS Gauge is mounted on the vacuum system The interconnect cable connects the MS Gauge to the VOM Controller The VQM Controller connects to a Host PC via a USB link using standard USB device connection The Host PC h
306. to peak amplitude Excited ions are ejected from the trap through the exit plate s gridded aperture and are detected by the electron multiplier detector to produce a mass spectrum The exit plate is typically biased a few volts lower than the entry plate i e slight asymmetry in the electrostatic field to ensure that all excited ions are ejected through the exit plate before reaching the back surface of the entry plate Many M q values will contribute to a typical mass spectrum For a fixed trapping potential the ejection frequencies for emergent ions fe will follow a strict f proportional to 1 sqrt M q Changes in any of the electrode bias voltages inside the trap will alter the shape of the electrostatic trapping potential well and will result in a shift in the ejection frequency of all ions Since ion ejection frequencies are strictly proportional to the inverse of the square root of mass to charge ratio M q mass axis calibration is very straight forward mass calibration is performed based on a single mass peak in the spectrum mathematically linking its ejection frequency to the square root of the mass f K sqrt M q The calculated square root dependence K between mass and frequency is then applied to assign masses to all other peaks in the spectrum Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 113 6 lon Trap Mass Spectrometer Gauge based on their unique ejection frequencies The dependence of e
307. to view e Raw nAmp View To view the raw data on the current nanoamps scale select the raw nAmps view of the graph The y axis identifies the detected current for the full amu range This view displays unprocessed raw data i e not denoised No other overlay elements are available in this view The Selected Peak Parameters are maintained from the Normalized view Use this view to precondition the electron multiplier and to set the electron multiplier gain and the electrometer gain e Raw Counts View To view the raw data on the counts scale select the raw counts view of the graph The y axis identifies the ADC counts from the electrometer Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 183 8 Viewer Software amp Initial Operation 8 5 16 830 Header The 830 Header is received with each FETch data set You may log a single instance of it when you log data but to view in real time on the computer display select the 830 Header view The displayed fields are not editable Use this view to identify the revision of firmware the 830 controller is running and real time feedback on over trigger conditions 830 Header Sensor Values Status Filament Emission Current 0 070000 lostatus 7 Filament Bias Voltage 30 05 Repeller Bias Voltage 25 00 Entry Plate Bias Voltage 130 00 Pressure Plate Bias Voltage 75 00 Reg stsR fei Cups Bias Voltage 27 00 Reg OPER COND Ho Transition Voltage 685 01 Reg_opereve
308. tore the X axis to its default e Zoom via axis modification The user may select and edit the text for the upper or lower Y axis legend or the left or right X axis legend thus identifying both an X and Y zoom factor The Autoscale controls will restore the axes to their original defaults 8 5 7 Leak Parameters The Leak Parameters include the Leak Mass Select and the Leak Limit Also displayed in this area are the Average Partial Pressure of the selected mass and the Average Total Pressure Note that these controls will work if there is no total pressure but the leak graph itself will not update Leak Parameters Mass Select 2 amu Hydrogen Leak Limit 6 0E 9 Torr Avg Partial Pressure 8 55E 10 Torr Avg Total Pressure 1 28E 8 Torr Figure 8 29 Leak Parameters e Mass Select Use the dropdown list to select the leak gas or leak mass Note that it does not matter whether you are in Gas or Mass mode the monitored value is the amu before gas fitting is performed The Gas name that appears in parentheses is the gas most likely associated with the amu The gas partial pressure is not monitored only the mass Leak Limit Enter the pressure above which you want to declare a leak When the current Average Partial Pressure of the selected mass is above the limit the area below the pressure plot will display as red When the current Average Partial Pressure of the selected mass is below the limit the area below the pressure plot will
309. transition plate Autoresonant excitation of a group of ions of given mass to charge ratio M q is achieved in the following fashion 1 Electrostatically trapped ions undergo nonlinear oscillations within the anharmonic potential with a natural oscillation frequency fm 2 The RF drive is connected to the transition plate with an initial drive frequency fy greater than 2 times the natural oscillation frequency of the ions fy gt 2x fy 3 Continuously reducing the positive frequency difference between the drive frequency fy and twice the natural oscillation frequency of the ions 2x fy until the instantaneous frequency difference approaches nearly zero causing the oscillatory motion of the ions to phase lock into persistent autoresonance with the drive In an autoresonant oscillator the ions will then automatically adjust their instantaneous amplitude of oscillation by extracting energy from the drive as needed to keep their natural oscillation frequency phase locked to the drive frequency 4 Further attempts to change trap conditions towards a negative difference between the drive frequency and twice the natural oscillation frequency of the ions results in energy transfer from the RF field into the oscillatory system changing the oscillatory amplitude and frequency of oscillation of the ions 5 Fora typical electrostatic ion trap with a negative nonlinear potential such as depicted in Figure 6 9 the oscillatory amplitudes become
310. troller turned OFF test for both DC and AC voltages between the metal parts of the vacuum chamber and the VOM Controller chassis 3 If no voltages exist measure the resistance The resistance should not exceed 2 Ohms A resistance of 2 Ohms or less implies commonality of these grounds that should prevent a plasma from creating a dangerous voltage between them This test does not prove that either connection is at Earth ground only that they are the same If more than 2 Ohms is indicated check with a licensed electrician 4 If AC or DC voltages exist and are less than 10 volts shunt the meter with a 10 Ohm 10 Watt resistor Repeat the voltage measurement With the shunt in place across the meter if the voltage remains at 8396 or more of the un shunted value commonality of the grounds is implied Repeat the measurements several times to be sure that the voltage ratio is not changing with time This should prevent a plasma from creating a dangerous voltage between these grounds Make sure that no more than 10 volts exists between grounds VOLTAGE SHUNTED 2 0 83 OR MORE VOLTAGE UNSHUNTED Series 830 Vacuum Quality Monitor 41 Instruction Manual 830231 Rev F 42 3 Hardware Installation If the voltage change in step 3 is greater than 17 due to the placement of the shunt it complicates the measurement The commonality of the grounds may be satisfactory and the coupling poor or the commonality could be poor Be sure to check
311. tron emission current is changed 6 9 12 Superharmonics The VQM System was carefully designed to minimize the incidence of superharmonic peaks in the system Mass Peaks corresponding to the ejection of ions at frequencies corresponding to multiples of the fundamental ejection frequency i e twice the natural oscillation frequency of the ions for parametric excitation are called superharmonic peaks and generally appear at low masses in mass spectra collected with RF V values far above the ejection threshold For example under certain trap conditions a peak at 7 amu i e 28 22 amu may appear in the mass spectrum when a large peak at 28 amu corresponding to N ions is also present The peak at 7 amu corresponds to excitation at the second factor of 2 harmonic of the fundamental ejection frequency for 28 amu ions As a general rule superharmonic ejection of ions has higher RF V thresholds than ejection at the fundamental frequency i e twice the natural oscillation frequency if the RF excitation is applied to the transition plate so that lowering the RF V setting in the trap is the simplest way to selectively eliminate superharmonic peaks from mass spectra Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 6 lon Trap Mass Spectrometer Gauge 100 millivolts Vpp 7 Amu N Second Harmonic FWHM 538at 40 AMU M AM 73 5 50 millivolts Vpp Normalized Signal no N Second Harmonic Fs FWHM
312. truction Manual 830231 Rev F 152 8 Viewer Software amp Initial Operation NOTE To perform preconditioning a multiplier must be placed under the best possible vacuum conditions It is recommended that a vacuum of 1x10 6 Torr be used 8 3 3 2 Procedure 1 Complete the Filament Outgassing procedure as outlined in Section 8 3 2 2 Access the Tune Panel of the VQM Viewer Software Advanced Display Advanced Tuning Display Mode Raw nA 3 Restore the System to default settings by clicking on the Restore Factory Setting button 4 Set the EM Bias voltage to 750 V 5 Turn ON the Mass Spectrometer Gauge 1 Press the Mass Spec Button on the front panel of the instrument or 2 click on the Mass Spec icon on the Viewer Software control bar The gauge turns ON with full emission current but with a reduced electron multiplier bias voltage which does not provide observable mass speaks 6 Press the Scan button on the Controller or click the Scan icon in the Viewer Application to enable continuous scanning 7 Change the EM Bias setting 20 V every 1 minute until 1 the EM Bias voltage reaches 925 V i e factory default setting or 2 any of the peaks in the mass spectrum reaches a 50nA amplitude whichever comes first Run the VQM System under these conditions for at least 2 hours 9 Proceed to the Electrometer Multiplier Gain Adjustment procedure 8 3 4 Electron Multiplier Gain Adjustment 8 3 4 1 Background Electron mul
313. uge MS Gauge Connector on Controller uw YX x 00000 0 0 0 0 MASS SPEC Male Threads Female Threads Figure 5 5 Mass Spec Connector Power is delivered to the MS Gauge when the MASS SPEC button is pressed on the front panel or when the MS Gauge Logical instrument is turned ON from a Host PC through the VOM Command Set High voltages are present on some of the connector pins when the MS Gauge is ON A To avoid risks of electrical shock wait 30 seconds before removing the cable plug from the MASS SPEC connector after power is removed from the MS Gauge The VOM Controller constantly monitors the MASS SPEC connector for a filament connection and will indicate a system error i e MASS SPEC System Error LED Red if a filament wire is not sensed even when the MS Gauge is OFF A custom cable 1 or 3 meter lengths is available from the factory to connect the VOM Controller to the MS Gauge Thumb screws on the cable connector facilitate alignment and insertion of the cable plug into the MASS SPEC Connector and provide safe and reliable operation compatible with both industrial and research vacuum setups 5 6 3 24 Vdc 75 W Connector Use the 24 Vdc 75 W connector on the rear panel of the VOM Controller to provide power to the instrument A 24V 75W 24V 75W CO o Figure 5 6 24 Vde Connector The 24 Vdc power connector requires a DC power plug described as DC Power Jack 5 5mm OD x 1 5 mm I
314. uge unless measurements are required See the Warm up Periods in Section 7 4 4 1830 VQM Viewer Software TEE ront eI A Sd Log Seale Norm 96 Absolute Be Connect Mass Spec Scan Summary Histogram Trend Leak Settings Tune Log Data Save SEPP PS 10 i i i i i i 09 33 44 09 34 00 09 34 15 09 34 30 09 34 45 09 35 00 09 35 15 09 35 30 09 35 45 09 36 00 09 36 15 09 36 41 Time Histogram LG 1 0 I Total Pressure 0 9 0 8 gt gt gt Average Total Pressure N A Torr A 97 Current Total Pressure N A Torr j Ps 5 Post Processing 2 0 4 0 3 Averaging Mode Avgs to Colect Avgs Collected 0 2 Cumulative Moving Avg gt 2000 0 AF 0 0 i Response Time 0 000 x j i 0 700 800 Mass amu Figure 8 9 Mass Scan Control Screen Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 161 8 Viewer Software amp Initial Operation b 8 4 3 Scan Scan Enable or Disable continuous scanning When the Scan function is selected it maps directly to the scan button on the Controller allowing the operator to use either the scan command in the Viewer software or the scan button on the Controller to begin an MS scan MS Scans can also be commanded using trigger input signals instead of this control Data is displayed in the center main panel within a few seconds of Scan s
315. ure of 3 5x1077 Torr The rear trace Blue corresponds to a spectrum obtained for the same air 9 00 sample but with an 7 58 7 torr additional 4x10 7 Torr of Argon added to the gas 3 5e 7 torr mixture lon Signal 0 4 8 12 16 20 24 28 32 36 40 44 48 Mass amu Figure 6 11 Space Charge Saturation Effects The number of ions stored inside the ion trap is the result of the interaction between four competing processes 1 ionization rate gain function of electron emission current and pressure 2 autoresonant ejection efficiency loss function of controller settings 3 ion neutral scattering collisions loss function of pressure and 4 space charge saturation loss electrostatic repulsion One important characteristic of ion traps not peculiar to the VOM MS Gauge is the fact that electrostatic forces set an upper limit to the number of ions of any M q that can be stored in the oscillating ion beam The VOM Mass Spectrometer Gauge operated under factory default settings will typically achieve full charge capacity at pressures above 1x10 Torr and well before ion neutral scattering collisions set in Nonlinearities between partial pressure and peak intensity can be observed at vacuum levels as low as 1x10 Torr Since the amplitude of the mass peaks is directly related to the number of ions stored in the confined beam and since the number of ions stored does not scale with partial pressures of the components
316. ut in in process Do NOT bakeout of the MS Gauge at temperatures exceeding 200 C 7 4 3 Humidity Range Humidity is not an important factor affecting the performance of the Mass Spectrometer Gauge However it has a direct impact on the longevity of the electron multiplier during storage outside a high vacuum system and on the operation of the VOM Controller See Section 2 4 1 VOM Controller Specifications in Chapter 2 7 4 4 Warm up Periods The VQM System requires a minimum warm up time before a stable output is available The warm up time for the Controller MS Gauge is typically around 5 minutes and is defined as the time it takes its power supplies to provide stable voltage and current outputs The low power requirements of the ion trap sensor combined with an external 24 Vdc power supply connection minimizes the amount of power dissipated inside the VQM Controller and provides a very short warm up cycle The Mass Spectrometer Gauge is capable of providing spectra within 20 seconds from the time the gauge is turned ON However slight drifts in mass axis calibration are detectable for periods of time extending into 1 hour If mass accuracy requirements beyond 0 5 AM M x 100 are required over long periods of time users should wait for an entire hour before performing a mass axis calibration on the sensor The drift in mass axis calibration is due to the thermal expansion of the trap as heat dissipates from the filament into ad
317. uter e want to use their pre existing DAQ systems to collect MS data during scans 830 VQM System Stand alone Mode Optional GP 390 TPMK Series 830 Micro lon Gauge for VQM Controller Total Pressure Measurement Em 0 DB 15 Cable _ Vacuum py Chamber A OL Oscilloscope or Data Recorder Logger E Channel 1 Trigger Figure 5 13 Basic System Stand Alone Mode Use Case 3 In this configuration ll The MS Gauge is mounted on the vacuum system The interconnect cable connects the MS Gauge to the VQM Controller No Host PC is connected to the VQM Controller 1 no USB link is enabled 2 no MS data is transmitted out of the USB port at the end of each scan 3 no Host PC control of the ion trap or MS Scan is available Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 5 VQM Controller Overview NOTE The VQM Controller operates under nominal scan and trap conditions Manual scan control is the only option available to execute MS Scans Press the MASS SPEC button to turn ON the MS Gauge and enable the SCAN button 6 Wait 20 seconds and press the enabled SCAN button to MS Scan Start i e continuous scan mode is executed 7 Auser provided fast DAQ system is required to acquire store and display all MS data Examples of fast DAQ systems include oscilloscopes data logger etc 8 Use the output trigger pulses to trigger the data acquisition system and to time frame the MS
318. v F 5 VQM Controller Overview Figure 5 9 G P Series 390802 Micro lon ATM Total Pressure Measurement Kit Total pressure and status information provided by the TPMK can be used for a variety of purposes Display store and graph total pressure on the Host PC screen along with the ratiometric mass spectral data provided by the MS Gauge Combine ionization gauge total pressure data with ratiometric gas analysis information to provide absolute partial pressure measurements Provide overpressure protection for the MS Gauge Real time communication between the VQM Controller and the Micro lon Gauge takes place through the Autopressure Mode of communication built into the Controller s firmware which directs the VQM System to query the TPMK for total pressure and gauge status information every 50 msec as required to maintain the Overpressure Protection Mode active The Power button on the VQM Controller also controls power to the TPMK If power is turned OFF to the VQM Controller power is also turned OFF to the Micro lon Gauge Users requiring independent power control for the Micro lon Gauge need to use a dedicated wiring setup where power is provided from an independent source 5 10 1 Autopressure Mode The VQM Controller includes a TOTAL PRESSURE DB 15 pin connector on the rear panel to power and interface RS 485 with the optional TPMK The 24 Vdc power required to operate the TPMK is routed from the same power su
319. xternal sources A common use of the analog input port is to collect total pressure readings from the analog output of an ionization gauge controller See Section 2 4 6 Analog Output The Series 830 VQM Controller has one analog output When Enabled it is electrically connected to the voltage output of the electrometer and the signal is available for each executed MS scan See Section 2 4 6 ART MS Autoresonant lon Trap Mass Spectrometer An ion trap mass spectrometer that stores ions using purely electrostatic potentials and that relies on autoresonant excitation of ion motions in an anharmonic trapping potential for mass selective ejection See lon Trap Connection An established USB communication link between a Host PC and a specific VQM Controller or an RS 485 link between the VQM Controller and the Total Pressure Module Controller 830 The Series 830 VQM Controller DAQ Data Acquisition Data acquisition is the process of measuring an electrical or physical phenomenon such as voltage current temperature pressure or sound A DAQ is used to acquire analyze and present information DAQ systems typically use fast ADCs to digitize the analog voltage readings related to the signal being measured Data Output The Series 830 VQM Controller supports USB communication with a Host PC via a high level text based command set The data output means a digital message that contains information that is associated
320. y 1 Normally Closed RS 485 B 24 Vdc Power Ground Relay 1 Normally Open Gauge OFF Signal Common Relay 2 Normally Open Relay 2 Normally Closed Analog Output 1 Relay 2 Common Relay 1 Common Male Pins Figure 3 11 Connector Pinout on the 390802 Micro lon Gauge Figure 3 12 Connect the Cable to the Micro lon Gauge 3 7 VQM Controller 24 Vdc Power Connection 3 7 1 Introduction The VQM System requires 24 Vdc power for operation Power consumption depends on whether a total pressure measurement kit TPMK is included in the system Mass Spectrometer Gauge operation requires 24 Vdc 15 W power The addition of a TPMK increases the power requirement to 24 Vdc 75 W A factory provided DC power supply is available and recommended for operation of the VQM System including a TPMK 3 7 2 Connection Requirements e It is recommended that a factory provided DC power supply be used to provide power to the VOM System e Be sure that the DC power to the VQM Controller is 24 Vdc gt 75 Watts when using the optional TPMK e f you are not using the Brooks Automation Granville Phillips DC power supply be sure the DC power supply being used meets the requirements listed in Table 2 2 on page 22 of this Instruction Manual Power and ground connections are illustrated in Figure 3 13 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 3 Hardware Installation Do not apply power to th
321. ystem 1 eee eee 145 VQM Viewer Application Icons and Screen Displays 0 eee cece ee eee eee 146 8 231 Viewer Application Icons s i steer RR A a e ele e 146 Initial Operation Procede pe ere Ue RO VH ees 149 82331 Initial Pamp Downs 3v ome ete ee E vestes deett ec eot edes Les 149 8 9 2 Filament Outgassing 2 lees el ee cee een ee er eme e e e 150 8 3 8 Electron Multiplier Preconditioning 0 e 151 8 3 4 Electron Multiplier Gain Adjustment 152 8 3 5 Mass Axis Calibrations resce easy eR ek xk pb ewe ee he rd e eed eee ee Race 155 Using the Viewer Application iseina een S era e E IH E aY 160 BAE Connect ri A A A aa a pius ati Rodi AAE Rada dea 160 8 42 Mass Species cn sided ha VAAN A ER WE Sa d 161 SUEOS A ON 162 8 4 4 SUMMA A A A EE ae 163 8 445 Llstogramh it IA a ken Bolded i m e E area d RU AC Sonus 164 8 4 6 Trend ii ber pe re sen AR d dd perse a istae Loa 165 84 77 Leaks EIDEM 166 8 48 Settings preferences orere ett eee bee EE E eee a Pa Se ru EPI RP S E 167 84 9 TuneSet ngs xcix PR x ai LR ES tet neal ets AA tica eA 168 8410 Eog Data oec suckers a ad ers EER aN 171 ZAT P Saves eis tsi ec ee uiua bee A tad se an gea e erae 172 8 4 12 Status Error Reporting and Contextual Help 0 cece eee eee 173 Series 830 Vacuum Quality Monitor Instruction Manual 830231 Rev F 8 5 Viewer Application Components 00 eee tenet nee eens 173 8 6 Chapter 9 9 1 9 2 9 3 9 4 9

Granville-Phillips 830 VQM User Manual (830231)

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