CP-SP-1153E - Azbil Corporation
Contents
1. EV2 Event output 2 DI1 External switch input 1 Switching input OPEN GND DI2 External switch input 2 1 AI 1 Analog setting voltage input 1 For the model with analog I O function 2 DA 2 RS 485 communications DA 0to5Vor1to5V 2 For the model with RS 485 communication function 2 1 AO 1 Analog flowrate voltage output 2 DB 2 SIGNAL GND Signal ground Input output signal common Signal ground is connected with power supply ground inside this device RS 485 communications DB 3 6 Chapter 3 MOUNTING AND WIRING Wiring e Power supply 24 Vdc POWER 24 V 2 POWER GND Event output Load G Event output 1 Load 4 Event output 2 9 SIGNAL GND 0 Handling Precautions e Be sure that the event output does not exceed the specified output rating of this controller When driving a relay use the relay with a built in diode for coil surge absorption Doing so might cause faulty operation e External switch input oo External switch input 1 0_0 _ External switch input 2 0 SIGNAL GND O Handling Precautions When using a relay for external switch input always use a relay designed for micro current use with gold contacts Failure to do so cold cause faulty contact resulting tn malfunction Analog input output only for the model with analog I O function Oto 5Vor 7 Analog input 1to5Vinput2. L min standard L min standard Argon 0 10 to 5 00 0 4 to 20 0 Carbon dioxide CO2 0 06 to 3 00 0 3 to 16 0 Chapter 7 SPECIFICATIONS MPC0005 MPC0020 7 Vdc max maximum output when flowrate exceeds range 0 5 FS The input impedance of the connected device must be at least 100 kQ Total output accuracy Indication accuracy 0 5 FS 2 points 30 Vdc 15 mA max open collector non insulated output 100 ms 10 when the integrated pulse output is selected 0 1L 1 pulse 1L 1 pulse 2 points Non voltage contact or open collector 2 0 0 5V Approx 0 5 mA contact current Max 2500 Min 100 kQ Max 1 0 V with open collector Max 50 pA with open collector 1 Loader communication 5 2 RS 485 communications 3 wire 6 2400 4800 9600 19200 38400 bps only 19200 bps for loader communi cation 24 Vdc current consumption 300 mA max 22 8 to 25 2 Vdc ripple 5 max Brass Ni plated stainless steel Teflon Viton Rc1 8 Display surface must be placed vertically inlet port lower side outlet port upper side Approx 300 g Mounting bracket 81446917 001 wiring connector EN61326 1 2006 EN61326 2 3 2006 2 Differential pressure required for obtaining full scale flowrate 3 Operation is possible even under the required differential pressure However the controllable flowrate range will
3. 3 s or more t DISP key Item Setting value lt key 3 s or more GEEH 2888 DISP key Multi setting flowrate display Setting flowrate No O f mi SP No O 5 oO OO O 0 05 0 Setting flowrate SP value Valve drive output display Instantaneous flowrate pap 888 Hog Valve drive output LOO LB DISP key inking 5 1 Chapter 5 ADVANCED OPERATION 5 1 Function Setup Follow the procedure below to set the functions such as event output type and external switch input assignments 1 Press the DISP key to display the integrated flowrate value gt gt L lamp lights 2 Keep the lt key pressed for 3 seconds or more gt gt E re is indicated on the upper display Parameter setup mode 3 Keep the lt key pressed for 3 seconds or more gt gt The item No amp is indicated on the upper display and the function setup mode is entered 4 Press the A key or V key to select the target setup item No and then press the ENT key gt gt The current setting value being indicated on the display blinks 5 Press the A key or V key to display the target setting value and then press the ENT key gt gt The setting value is stored If other items are required to set up return to the step 4 and repeat the procedure Otherwise proceed to the step 6 6 Press the DISP key gt gt The mode
4. No CP SP 1153E MPC9500 0002 0005 0020 Panel Mount Mass Flow Controller User s Manual for Installation and configuration Thank you for purchasing this product This manual contains information for ensuring correct use of the product It also provides necessary information for instal lation maintenance and troubleshooting This manual should be read by those who design and maintain devices that use the product Be sure to keep this manual nearby for handy reference Azbil Corporation NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbidden The information and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions If you should find an error or omission please contact the azbil Group In no event is Azbil Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2004 2013 Azbil Corporation All Rights Reserved The uF is a trademark of Azbil Corporation in Japan Micro Flow Sensor and MPC are trademarks of Azbil Corporation Conventions Used in This Manual M To prevent injury to the operator and others and to prevent property damage the following types of safety precautions are indicated Warnings ar
5. the integration calculation is started automatically However if a reset contact ON is carried out by external switching input inte gration is resumed by the contact turning OFF Valve drive output display The valve drive output value can be displayed in the unit of 0 0 to 100 0 The increase or decrease of supply pressure and the choking of piping can be detected e Alarm display output shut off The flowrate deviation alarm can be output by detecting the deviation between setting flowrate and control flowrate The alarm judgment delay time can also be set When a flowrate alarm occurs or an alarm occurs during controller self diag nostics the event signal is output the valve can be forcibly fully closed or fully opened at your choise also e Event lamp light up output Two of the following event types can be output e Alarm output When the flowrate deviation alarm or self diagnostics occurs e Flowrate upper lower limit output Output by comparison to the optional upper lower flowrate limit setting value e Integration count up output When the integration setting flowrate is exceed ed e Integration pulse output Pulse can be output for each integration display unit e OK output When the control flowrate is within the set point allowable range e The operating mode can be identified and output externally as an event The output ON delay time can also be set However the delay cannot be set to integratio
6. v key gt gt The digit currently being changed blinks You can move to the digit to be changed by pressing the lt key 3 When the target value is displayed press the ENT key gt gt The SP value is fixed At this point the SP value is updated e Direct setup function The control can be executed using the SP value currently being changed indi cated by blinking display when the Direct setup function is enabled is selected at direct setup function switching in the function setup The ENT key does not need to be pressed to fix the SP value However to switch the display by pressing the DISP key press the ENT key to fix the SP value and switch the display This function is useful when changing the SP value little by little The factory setting is set to Direct setup function is enabled For the function setup method refer to gt Chapter 5 ADVANCED OPERATION Multi SP setting mode number of SPs 2 to 4 according to function setup 7 Up to four SP values setting flowrate values can be switched by key operation and by external switch inputs Follow the procedure below to change the SP No and SP value 1 Press the DISP key gt gt The instantaneous flowrate value and SP value are displayed Same as the display at power supply ON 2 Keep the DISP key pressed for 1 second or more gt gt The SP No currently being selected setting flowrate No SP 0 to SP 3 is indicated on th
7. vents e Locations directly subject to mechanical vibration or shock e Locations subject to direct sunlight and rain e Locations subject to splashing of oil or chemicals e Locations close to sources of electrical noise e Locations where strong magnetic or electrical fields are generated Chapter 3 MOUNTING AND WIRING Joint connection e Connect the joint by holding the hexagonal section of the pipe connection port of the body with a spanner or wrench J Handling Precautions Do not hold the case of the controller with your hand when screwing the joint into the connection port Doing so might deform the body Screw the joint with an appropriate torque as recommended by the joint manufacturer Exceeding the torque limits will cause damage the connection port e Apply appropriate amount of sealant Do not coat the top most thread of the screw Remove any dirt or burrs from inside the joint Good example Bad example 3 3 Chapter 3 MOUNTING AND WIRING External dimensions unit mm 9 sce RE i CD TI a gt a Connector accessory Mounting bracket acc
8. 7 Operation selec tion at alarm occur rence Slow start setup Control continued alarm ignored Move to fully closed Move to fully open 0 Slow start disabled 1 to 8 Slow start enabled equivalent to approx 1 to 6 sec onds settling time Alarm output turns ON even if O is selected Slow start is enabled when the exter nal contact input turns ON in case of slow start operation switching is ane selected att Mandi iL Gas type selection Conversion factor for each gas type set by the user Air Nitrogen Argon Carbon dioxide CO2 If the flowrate range changes due to a change in the gas type the flowrate OK range and flowrate alarm range in the parameter setup must be changed When 0 is selected set the conver sion factor in the parameter setup mode Flowrate display 20 C 101 325 kPa 1 atm 0 C 101 325 kPa 1 atm 25 C 101 325 kPa 1 atm 35 C 101 325 kPa 1 atm Setup Item and Factory Description Setting Display Item Item Description Inlet pressure 0 to 0 1 MPa adjustment 0 05 to 0 15 MPa 0 15 to 0 25 MPa 0 25 to 0 35 MPa 0 35 to 0 45 MPa 0 45 to 0 5 MPa Chapter 5 ADVANCED OPERATION Remarks The accuracy drift caused by the influence of pressure can be compen sated by adjusting the inlet pressure setting to the actual inlet pressure Instantaneous Function disabled flowrate direct Function
9. 999 999 9 L 0 to 99 999 999 L 0 1L 1L 1 At each 50 L count 1 At each 200 L count 2 At each after 1 hour from the previous backup 0 to full scale flowrate scaling available 0 to 5 Vdc 1 to 5 Vdc selectable by function setup 7 3 Chapter 7 SPECIFICATIONS Model No MPC9500 MPC0002 Flowrate output Max output voltage 7 Vdc max maximum output when flowrate exceeds range Accuracy 0 5 FS The input impedance of the connected device must be at least 100 kQ Total output accuracy Indication accuracy 0 5 FS Number of outputs 2 points Output rating 30 Vdc 15 mA max open collector non insulated output Integrated pulse output width 100 ms 10 when the integrated pulse output is selected Integrated pulse rate 0 01L 1 pulse 0 1L 1 pulse External switch input Number of inputs 2 points Circuit type Non voltage contact or open collector Contact OFF terminal voltage 2 0 0 5 V Contact ON terminal current Approx 0 5 mA contact current Allowable ON contact resistance Max 250 Q Allowable OFF contact resistance Min 100 kQ Allowable ON residual voltage Max 1 0 V with open collector Allowable OFF leakage current Max 50 uA with open collector Communi cation System 1 Loader communication 5 2 RS 485 communications 3 wire 6 Transmission speed 2400 4800 9600 19200
10. W Ath edition Apr 2013 V
11. event output is ON lt V Alkeys Used when incrementing decrementing the digit or moving to a desired digit ENT key Used when setting the SP value and storing the value It also can be used for the integrated flowrate resetting and alarm resetting Note e The definition of the terms used in this manual is as follows SP Set Point Set flowrate value PV Process Variable Instantaneous flowrate value control flowrate Operation mode 3 mode of valve fully closed valve control valve fully open Rear view Loader jack Connects to a personal computer by using a dedicated loader cable sold separately 2 Pipe connection outlet port This is the out flow side port Connector Pipe connection inlet port This is the in flow side port 6 8 9S PE Cl B 2 1 Chapter 3 MOUNTING AND WIRING A WARNING Never allow gases that are within explosive limits to pass through this controller Doing so might result in explosion accidents Do not use this controller for gases other than standard compatible gas types Air Nitrogen argon and carbon dioxide CO A CAUTION Prevent foreign matter from entering the controller If the rust water droplet oil mist or dust in the piping flows into the controller measurement error might occur and result in damaging the controller If there is a possibility that are any foreign matter flows into the contro
12. might cause malfunction or faulty operation The part between the power supply circuit of this controller and the I O circuit is not isolated Therefore ensure that the power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation For the model with analog I O function do not apply a negative voltage or large voltage more than 5V to the analog setting input terminal Doing so might cause malfunction or faulty operation This device is a precision instrument Do not drop it nor subject it to shock Doing so might damage the device Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction Q If there is a risk of a power surge caused by lightning use a surge absorber surge protector to pre vent fire or device failure 3 1 Chapter 3 MOUNTING AND WIRING E Mounting Avoid mounting this controller in the following locations e Locations subject to high and low temperature and humidity e Locations subject to sudden changes in temperature and condensation e Locations subject to be filled with corrosive gases and flammable gases e Locations whose atmospheres contain large amounts of dirt and dust salt con ductive substances such as iron powder water droplets oil mist and organic sol
13. mode display 2 no D L Instantaneous flowrate Operation mode g DISP key Integrated Valve drive flowrate display 3 i Integrated flowrate via V key Instantaneous 00O I 3 s or more flowrate Integrated flowrate g 5 5 Valve drive output a 34 0 Lights l DISP key DISP key 1 The operation mode display is not displayed when the 0 The operation mode selection by key oparation is disabled is selected at the operation mode selection 2 in function setup 2 If no key is pressed while the operation mode is displayed the display will automatically return to the instantaneous flowrate display after approximately 10 seconds 3 When the ENT key is pressed for 3 seconds or more while the integrated flowrate is displayed the integrated flowrate value is reset 4 The multi setting flowrate is displayed only when the multi setting 1 to 3 is selected at flowrate setup number selection ATI i in function setup For details on function setup method refer to gt Chapter 5 ADVANCED OPERATION 5 If no key is pressed while the multi setting flowrate is displayed the display will automatically return to the instanta neous flowrate display after approximately 10 seconds Instantaneous flowrate display setting flowrate display When the power is turned ON the instantaneous flowrate value is indicated on the upper display and the setting flowrate valu
14. seconds or more while the integrated flowrate is displayed Valve drive output display instantaneous flowrate display When the V key is pressed for 3 seconds or more while the integrated flowrate is displayed the valve drive output value indication range 0 0 to 100 0 is indi cated on the lower display The instantaneous flowrate is indicated on the upper display In order to distinguish from other indication the decimal point indication blinks while the valve drive output is displayed Multi setting flowrate display only when the multi setting is enabled When the DISP key is pressed for one second or more while the instantaneous flowrate display the setting flowrate number SP No currently being selected is indicated on the upper display and the setting flowrate value SP value is indicated on the lower display If no key is pressed for 10 seconds or more while the multi setting flowrate is displayed the display will automatically return to the instanta neous flowrate display 4 2 4 2 Chapter 4 BASIC OPERATION Setting the Flowrate E Procedure for changing flowrate in digital setting Single SP setting mode number of SPs 1 according to function setup Note Follow the procedure below to change the SP value setting flowrate 1 Press the DISP key gt gt The instantaneous flowrate value and SP value are displayed Same as the display at power supply ON 2 Press the A key or
15. setting value is stored If other items are required to set up return to the step 3 and repeat the procedure Otherwise proceed to the step 6 6 Press the DISP key gt gt The mode is returned to the instantaneous flowrate display C Handling Precautions 5 6 If you do nothing for one minute after entering the parameter setup mode the display automatically returns to the regular instantaneous PV display If you press the DISP key without pressing the ENT key after carrying out the operation in step 5 the setting remains at the previous value without being updated Chapter 5 ADVANCED OPERATION Parameter setup item list Factory Referential Setting Seung Range function setup Kemang Description Flowrate OK 2 FS 0 5 to 100 FS Unit L min standard judgment range 11 11 Flowrate OK 1 FS 0 5 to 100 FS judgment hysteresis 11 11 Flowrate deviation 10 FS 0 5 to 100 FS upper limit alarm 11 11 Flowrate deviation 2 FS 0 5 to 100 FS upper limit alarm 11 11 hysteresis Flowrate deviation 10 FS 0 5 to 100 FS lower limit alarm 11 11 Flowrate deviation 2 FS 0 5 to 100 FS lower limit alarm 11 11 hysteresis Flowrate deviation 10 05 1 0 to 999 95 alarm judgment delay time Event output 1 0 0s 0 0 to 999 9 s Even if the delay time is set it is dis delay time abled during selection of integration Event output 2 0 0s 0 0 to 999 9 s pulse outp
16. the number of SPs is two set either one of amp or to 3 Switching of SP No However in this case the SP No cannot be updated using the A key or v key Only the SP value can be updated External switch input state SP to be selected Input 1 DI1 Input 2 DI2 GU Handling Precautions If the DISP key is pressed while the settings are being changed when a digit is blinking the SP No and SP value will not be saved and will revert to the previous values When 1 Analog setting is selected at the flowrate setup method selection 3 in the function setup and the operation is carried out using the SP value according to the analog setting voltage the operation to change the SP value and SP No using the A key or V key cannot be accepted If no key is pressed for 10 seconds or more after performing the operation while the multi setting flowrate is displayed on the previous page the display will automatically return to the instantaneous flowrate display 4 4 Chapter 4 BASIC OPERATION E Procedure for changing flowrate in analog setting a model with analog input out put function To change the SP value setting flowrate value using an external setting voltage 1 Analog setting is selected at the flowrate setup method selection 3 in the function setup For the function setup method refer to gt Chapter 5 ADVANCED OPERATION The setting voltage rang
17. use under such conditions or in such environments as not stated in technical documents including catalogs specification and instruction manuals 2 For use of specific purposes such as Nuclear energy radiation related facilities For use outside nuclear energy controlled areas For use of Azbil Corporation s limit switch for Nuclear Energy Machinery or equipment for space sea bottom Transportation equipment Railway aircraft vessels vehicle equipment etc Antidisaster crime prevention equipment Burning appliances Electrothermal equipment Amusement facilities 3 Supply systems such as electricity gas water supply systems large scale communication systems and traffic air traffic control systems requiring high reliability 4 Facilities that are to comply with regulations of governmental public agencies or specific industries 5 Machinery or equipment that may affect human lives human bodies or properties 6 Other machinery or equipment equivalent to those set forth in items 1 to 5 above which require high reliability and safety 4 Precautions against long term use Use of Azbil Corporation s products including switches which contain electronic components over a prolonged period may degrade insulation or increase contact resistance and may result in heat generation or any other similar problem causing such product or switch to develop safety hazards such as smoking ignition and electrification Although acceleratio
18. 38400 bps Only 19200 bps for loader communication Power supply Rating 24 Vdc current consumption 300 mA max Allowable voltage range 22 8 to 25 2 Vdc ripple 5 max Material of gas contacting parts Brass Ni plated stainless steel Teflon Viton Connection method Rc1 8 Mounting direction Display surface must be placed vertically inlet port lower side outlet port upper side Mass Approx 300 g Accessories Applicable standard Mounting bracket 81446917 001 wiring connector EN61326 1 2006 EN61326 2 3 2006 1 L min standard indicates the volume flowrate per minute L min converted to 20 C and 101 325 kPa 1 atm The refer ence temperature can also be changed to 0 C 25 C and 35 C The controllable flowrate range varies according to the gas type Refer to the following table Air Nitrogen MPC9500 Control flowrate range L min standard 0 020 to 0 500 Setting indication resolution MPC0002 Control flowrate range Setting indication resolution L min standard L min standard 0 08 to 2 00 L min standard Argon 0 020 to 0 500 0 08 to 2 00 Carbon dioxide CO2 Air Nitrogen 0 012 to 0 300 MPC0005 0 040 to 1 200 MPC0020 Control flowrate range L min standard 0 10 to 5 00 Setting indication resolution Control flowrate range L min standard 0 4 to 20 0 Setting indication resolution
19. 55 5 only Number of SPs 2 5P 2 SP 0 Number of SPs 3 SF i to SF 2 Number of SPs 4 5P 8 to SP 3 Input voltage range selection at analog setting Analog SP input range selection 0 to 5V input 1 to 5V input Flowrate analog output voltage range selection PV analog output range selection 0 to 5 V output 1 to 5V output Event output 1 type assignment Event output 2 type assignment Not used OFF at all times ON when alarm occurred Integration pulse output On when PV is in flowrate OK judge ment range ONin control mode ONin fully open mode ONin control mode or fully open mode 7 ONin fully closed mode 8 Instantaneous PV upper limit event 9 Instantaneous PV lower limit event 1 10 Instantaneous PV lower limit event 2 11 Integrated flowrate event 1 to 11 Reverse output of 1 to 11 At no events ON At event occurred OFF Flowrate OK judgment range upper lower limit event flowrate integrated event flowrate and event output delay time are set in the parameter setup mode F 5 2 Parameter setup page 5 7 for the details Note the delay time cannot be set to integration pulse output 9 Events are outputted even in fully closed operation mode 10 Events are not outputted in fully closed operation mode 1 to 11 Always OFF during power supply OFF Chapter 5 ADVANCED OPERATION Display Item Item Description
20. 971 C2 0 02981 MPC 0020 C1 0 16740 C2 0 08357 Example When using the MPC0020 with inlet pressure 120 kPa gauge and outlet pressure 0 kPa gauge P1 221 3 kPa abs P2 181 3 kPa abs P2 P1 0 819 Q 0 1674X 221 3 181 3 X 181 3 14 3 L min Standard When used with the gases other than air convert the flowrate using the fol lowing formula Flowrate Flowrate in air specific gravity of gas to be controlled Example When using the MPC0020 with CO inlet pressure 100 kPa gauge and outlet pressure 0 kPa gauge 16 8 L min standard 1 1 53 13 6 L min standard Specific gravity standard compatible gas air is taken as 1 0 Argon 1 38 Carbon dioxide CO gt 1 53 Revision History of CP SP 1153E Feb 2004 A Mar 2008 2 Overall revision 2nd ed 2nd Jp ed Company name changed The title of this manual was changed ii A CAUTION was changed i 1 1 3 8 MPC Series gt MPC ii 1 4 3 1 7 4 Dioxide was changed to Dioxide CO3 7 6 iv Section The Role of This Manual was changed 1 4 7 4 1 atmospheric pressure was changed to 1 atm 2 1 3 4 MPC was deleted from the figure A WARNING was changed A handling precaution was changed The table was changed The table was changed A handling precaution was changed Specifications were changed 101 3 kPa was changed to atmospheric pressure Terms and Conditions We would like to express our appreciati
21. External switch input 1 function assignment External switch input 2 function assignment Setup Item and Description 0 Not used 1 Reset integration 2 Stop integration count operation 3 Switching of SP No 4 Switching of flowrate setup method 5 Valve fully closed 6 Valve fully open 7 Switching of slow start operation 8 Switching of operating mode Contact ON control mode Contact OFF fully closed mode Factory Setting Remarks 3 To select an SP No of 3 or more setting assign 3 both the Z ii andt il 4 The 3 analog digital setting is reversed when the contact is ON 7 Slow start ON must be selected in wo L du 5 6 8 When the valve fully closed input and the valve fully open input are put in at the same time by two contact the both inputs are disabled Valve automatic shut off when the integration event occurred Function disabled Function enabled When the integrated count value reaches the integrated event setting value the valve is fully closed Resetting the integrated value at start of control Function disabled Function enabled When control is resumed from the fully closed mode the integrated value is automatically reset Flowrate alarm setup type Not used Only upper limit alarm used Only lower limit alarm used Upper lower limit alarm used Set the alarm flowrate in the param eter setup mode KCF page 5
22. Precautions The Role of This Manual Organization of This User s Manual Chapter 1 Chapter 2 Chapter 3 Chapter 4 4 1 4 2 4 3 Chapter 5 5 1 5 2 Chapter 6 Chapter 7 INTRODUCTION M Iintroductioni s csc 1 1 E FUNCHIONS cirie 1 1 HM Model selection guide eee cre rr rrre recare cere re cere recente 1 4 NAMES AND FUNCTIONS OF PARTS B Display titan rar 2 1 MOUNTING AND WIRING M Mounting lt ssssigiaasaate tare ni a a nt 3 2 MULETTO 3 6 BASIC OPERATION Switching DisplayS cece cece cece cece ere rece re sere cere cere cecereneeee 4 1 Setting the Flowrate cece cece cece ere rr cece sere cere rese rece renenee 4 3 E Procedure for changing flowrate in digital setting 0000000 4 3 E Procedure for changing flowrate in analog setting a model with analog input output function cece cece cere cece ewes 4 5 Selecting the Operating Mode 0000000 rece crrrrcererereciceeeno 4 6 ADVANCED OPERATION Function Setup eee 5 2 E Function setup item list 0000 esere secc rr errore re cere rereseseo 5 3 Parameter Setupi i sicari ina 5 6 E Setupmethod crise 5 6 TROUBLESHOOTING E Alarm code display 000000 cre rc cre rr cere re rece cere rece cerereete 6 1 M Othertroubles rain cre a 6 2 SPECIFICATIONS M Specifications i e 7 1 E Relationship between flowrate and differential pressure wi
23. W O Analog output Oto5Vor 1 to 5 V output ad SIGNAL GND GU Handling Precautions Do not apply a negative voltage or a voltage exceeding 5 V to the analog I O terminals Doing so might cause malfunction or equipment failure Chapter 3 MOUNTING AND WIRING e RS 485 communication only for the model with RS 485 communication func tion DA ______7 DA DB DB sG SIGNAL GND Note e For details on how to connect the RS 485 communications CF MPC9500 0002 0005 0020 Panel Mount Mass Flow Controller Communications Functions CP SP 1154E Wtiring example 24 Vdc 1 Internal circuit POWER 24 V POWER GND EV1 Event output 1 EV2 Event output2 Output common eco DU ev Die Analog setting voltage input DA ALDA Analog flowrate voltage output DB RGU SIGNAL GND Analog input output common SG 3 8 Chapter 4 BASIC OPERATION 4 1 Switching Displays Each press of the DISP key switches the display as shown below The display shown below is an example Instantaneous Multi setting flowrate display flowrate display 4 5 DISP key 1 i Instantaneous n l Ikey 1 s or more Nee aoe 5 p g flowrate n O D L DISP key or no key is pressed o W for 10 s or more Setting flowrate h 8g a SP value pgg Setting flowrate No key is pressed for io second or DISP key less than 1 s more Operation
24. aking efforts to improve the quality and reliability of Azbil Corporation s products there exists a possibility that parts and machinery may break down You are required to provide your Equipment with fool proof design fail safe design anti flame propagation design safety design or the like so that the said Equipment may satisfy the level of the reliability and safety required in your use whereby preventing any occurrence of physical injuries fires significant damage and so forth 3 Precautions and restrictions on application Azbil Corporation s products other than those explicitly specified as applicable e g azbil limit switch for Nuclear Energy shall not be used in a nuclear energy controlled area radiation controlled area Any Azbil Corporation s products shall not be used for with medical equipment In addition you are required to conduct a consultation with our sales representative and understand detail specifications cautions for operation and so forth by reference to catalogs specifications instruction manual etc in case that you intend to use Azbil Corporation s products for any purposes specified in 1 through 6 below Moreover you are required to provide your Equipment with fool proof design fail safe design anti flame propagation design and other designs of protection safety circuit on your own responsibility to ensure the reliability and safety whereby preventing problems caused by failure or nonconformity 1 For
25. annot be mounted on a panel Doing so will deform or damage the case e When leak check is performed using leak check liquid ensure to avoid spillage or contact of liquid on to the case electrical wires and connectors Doing so might cause malfunction or faulty operation 3 5 Chapter 3 MOUNTING AND WIRING Be sure to turn the power supply source OFF before wiring connection Doing so might cause faulty operation The power supply circuit of this controller and the I O circuit are not isolated each other Therefore ensure that the power supply of this controller is isolated from the power supply for external devic es insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction Connector specifications e Part No MCVW1 5 9 STF 3 5 Phoenix Contact Mfg e Wire type Either of single core wire or stranded wire applicable e Compatible cable 0 08 to 1 5 mm AWG 28 to 16 e Appropriate length of stripped wire 7 mm e Compatible screw driver Tip size 2 5 x 0 4 mm a flat head driver Connector signal names Pin number Signal name Description Remarks 1 POWER 24 V Power 24 Vdc 2 POWER GND Power supply ground 3 4 5 6 7 8 9 EV1 Event output 1 Open collector non insulated output
26. at alarm occurrence amp in the function setup is forcibly switched to Except Fin ti The upper display alternately indicates the alarm codes shown in the table below and the regular display Alarm code Countermeasure Flowrate deviation lower limit alarm Insufficient alarm judgment delay time insufficient power voltage insufficient inlet pressure excessive operating tem perature etc Request for repair service if there is no problem on the items listed on the left Flowrate deviation upper limit alarm Insufficient alarm judgment delay time valve trouble sensor trouble etc Request for repair service if there is no problem with the delay time Valve overheat prevention limit is operated During the control or fully open mode the gas is forcibly shut off by external device When the gas is continuously shut off by external device set the set flowrate to zero or valve fully closed mode Sensor error Sensor trouble foreign object attached to sensor or entering of hydrogen or helium gas If sensor is not restored after turn ing the power OFF then request for repair service I O correction data error Data corrupted due to electrical noise Request for repair service a Mi an Sensor calibration data error Data corrupted due to electrical noise Request for repair service User setup data error C Handling Precautions Power shutoff during writin
27. autions Prior to your use of Azbil Corporation s products you are required to understand and comply with specifications e g conditions and environment of use precautions warnings cautions notices as set forth in the technical documents prepared for individual Azbil Corporation s products such as catalogs specifications and instruction manuals to ensure the quality reliability and safety of those products 7 Changes to specifications Please note that the descriptions contained in any documents provided by Azbil Corporation are subject to change without notice for improvement or for any other reason For inquires or information on specifications as you may need to check please contact our branch offices or sales offices or your local sales agents 8 Discontinuance of the supply of products parts Please note that the production of any Azbil Corporation s products may be discontinued without notice For repairable products we will in principle undertake repairs for five 5 years after the discontinuance of those products In some cases however we cannot undertake such repairs for reasons such as the absence of repair parts For field instruments we may not be able to undertake parts replacement for similar reasons Azbil Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http www azbil com azbil Specifications are subject to change without notice 09 Ist edition Feb 2004
28. become small For details refer to Em Relationship between flowrate when valve is fully open and differential pressure next page 4 Applicable only to the model with analog input output function 5 The MLP200A100 Loader Package sold separately for the MPC is required 6 Applicable only to the model with RS 485 communications function Chapter 7 SPECIFICATIONS E Relationship between flowrate and differential pressure with valve fully opened in air MPC9500 MPC0002 0005 150 kPa gauge 150 kPa gauge 1 0 50 kPa gauge 8 50 kPa gauge E XNIIHTILI 0 kPa gauge a B 0 kPa gauge 3 3 S 5 50 kPa gauge 3 50 kPa gauge E E 4 3 a g g 3 2 2 LL u 0 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Diffrential pressure kPa Diffrential pressure kPa MPC0020 3 Four parameter show outlet pressure n c sg E E a v 9 2 LL Diffrential pressure kPa e If the outlet pressure is diffrent from the values graphed on the above calcu late the flowrate using the appropriate formula below 1 When P2 P1 gt 0 53 Q C14 P1 P2 X P2 2 When P2 P1 lt 0 53 Q C2 X PI P1 Inlet absolute pressure kPa abs P2 Outlet absolute pressure kPa abs Absolute pressure gauge pressure atmospheric pressure Q Flowrate L min standard C1 and C2 Constant values by model MPC 9500 C1 0 01054 C2 0 00526 MPC 0002 C1 0 05971 C2 0 02981 MPC 0005 C1 0 05
29. de Follow the procedure below to select the operation mode 4 6 1 Press the DISP key to display the operation mode 2 Press the A key or v key gt gt The display is changed as shown below Akey AY ivikey suo on 5 Control mode AY V key GFF Fully closed mode iii Fully open mode 3 Select the target operating mode gt gt Display blinks 4 Press the ENT key to fix the operating mode gt gt The operating mode is changed C Handling Precautions Note When 0 The operating mode selection by key operation is disabled is selected at the operation mode selection 2 in the function setup the operating mode is not displayed even if the DISP key is pressed When the DISP key is pressed during the operation in step 3 the operating mode indicated by blinking display the operating mode selection is cancelled When the operating mode selection 5 6 or 8 is selected at the external switch input function assignment and in the function setup the operating mode selection valve fully closed fully open by the ON OFF operation of external switch inputs can be performed For the function setup method refer to gt Chapter 5 ADVANCED OPERATION When each operation mode is entered ever while the instantaneous flowrate is displayed the operation mode is indicated on the upper display as shown below The OK lamp blinks in fully open mode Table of o
30. e can be selected at the analog input voltage range selection 55 in the function setup The analog setting voltage value to the SP value can be calculated from the calcula tion formulas in the following table 05 Voltage range Setting voltage formulas Setting voltage V Setting flowrate Full scale flowrate X 5 00 Setting voltage V Setting flowrate Full scale flowrate X 4 00 1 00 Note When the 1 Function enabled is selected at the analog optional scaling function 2 in the function setup the full scale flowrate at analog setting can be optionally changed In this case the full scale flowrate of analog flowrate output voltage PV output voltage is also changed as same as input voltage The scaling flowrate is set in the parameter setup mode For the function setup and parameter setup method refer to CF Chapter 5 ADVANCED OPERATION CJ Handling Precautions Do not apply a negative voltage or a large voltage exceeding 5 V to the analog setting voltage input terminal Doing so might cause faulty operation or malfunction 4 5 Chapter 4 BASIC OPERATION 4 3 Selecting the Operating Mode When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed same as the dis play at power supply ON the instantaneous flowrate indication on the upper display is not changed and the lower display shows the operating mode enabling the selection of operation mo
31. e function setup 5 This item can be set only when 0 User setting is selected at gas type selection amp in the function setup 6 This item can be set only when 8 Instantaneous PV upper limit event 9 Instantaneous PV lower limit event1 and 10 Instantaneous PV lower limit event 2 is selected for the 1 7 and event output type assignment in the function setup 7 This item can be set only when 1 Function enabled is selected for the analog optional scaling function in the function setup 8 This item can be set only when 11 Integrated flowrate event is selected at the event output type assignment 47 and 4 in the function setup or when 1 Function enabled is selected at the valve automatic shut off function 3 9 This item can be set only when 1 Function enabled is selected at the PV forced zero function 24 in the function setup 10 This item can be set only if suitable limit type is selected for the 35 SP limit function in the function setup 11 The factory setting and setting range becomes the flowrate obtained by multiplying the full scale flowrate by the per centage in parentheses The factory setting and setting range vary according to the gas type 5 8 Chapter6 TROUBLESHOOTING Alarm code display When a flowrate deviation alarm occurs or when an alarm occurs during controller self diagnostics the operating mode currently selected at Operation selection
32. e indicated when mishandling this product might result in WARNING death or serious injury Cautions are indicated when mishandling this product might result in CAUTION minor injury to the user or physical damage to the product E In describing the product this manual uses the icons and conventions listed below o gt O Note gt gt OK lamp ENT key Use caution when handling the product The indicated action is prohibited Be sure to follow the indicated instructions Handling Precautions Handling Precautions indicate items that the user should pay attention to when handling the MPC Notes indicate information that might benefit the user This indicates the item or page that the user is requested to refer to The numbers with the parenthesis indicate steps in a sequence or indicate corresponding parts in an explanation This indicates the contents shown on the personal computer or unit as a result of operation or unit status after completion of operation This indicates 7 segment indication on the setup display This indicates an LED lamp on the setup display This indicates a key on the setup display Safety Precautions Safety precautions are intended to ensure the safe and correct use of this product to prevent injury to the operator and others and to prevent damage to property Be sure to observe these safety precautions Please make sure you understand the safety guidelin
33. e is indicated on the lower display The number of effective digits which are displayed differs according to the flowrate range The operating mode is also indicated on the upper display when the operating mode is changed For details refer to gt 4 3 Selecting the Operating Mode page 4 6 4 1 Chapter 4 BASIC OPERATION Operating mode display instantaneous flowrate display When the DISP key is pressed for less than 1 second while the instantaneous flowrate is displayed the upper display maintains the instantaneous flowrate and the lower display indicates the operation mode The table below shows the display contents to each operation mode For the operating mode selection method refer to gt 4 3 Selecting the Operation Mode page 4 6 If no key is pressed while the operation mode is displayed the display will automat ically return to the instantaneous flowrate display after approximately 10 seconds Operation mode Lower display Fully closed mode Control mode Fully open mode Integrated flowrate display When the DISP key is pressed while the operation mode is displayed the L lamp lights and the integrated flowrate value is indicated on the upper display and lower display For instance if the integrated flowrate is 1 234 567 8 L the 427 is indicated on the upper display and the 57 8 is indicated on the lower display Integrated flowrate reset operation Keep the ENT key pressed for 3
34. e upper display and the SP value is indicated on the lower display 3 Press the A key or v key to change the SP No 4 When the target value is displayed press the ENT key 5 Press the A key or v key to change the SP value gt gt The digit being changed blinks You can move to the digit to be changed by pressing the lt key 6 When the target value is displayed press the ENT key gt gt The SP value is fixed At this point the SP value and SP No are updated 4 3 Chapter 4 BASIC OPERATION Note e Direct setup function The control can be executed using the SP value currently being changed indi cated by blinking display when the Direct setup function is enabled is selected at direct setup function switching in the function setup The ENT key does not need to be pressed to fix the SP value However to switch the display by pressing the DISP key press the ENT key to fix the SP value and switch the display This function is useful when changing the SP value frequently or little by little The factory setting is set to Direct setup function is enabled For the function setup method refer to gt Chapter 5 ADVANCED OPERATION e As shown in the following table up to 4 SP values can be switched according to the ON OFF state of the external switch inputs when the 3 Switching of SP No is assigned at the external switch input function assignments 7 and Z in the function setup If
35. enabled setup function switching Instantaneous flowrate can be con trolled by instantaneous SP being change blinking PV filter Without filter Sampling 2 times moving average Sampling 4 times moving average Sampling 8 times moving average If the PV filter is used in a 2 or 3 setting the operation differential pressure must be lower than the standard differential pressure Do not change the setting under the control Analog optional Function disabled scaling function Function enabled The flowrate at analog input output 100 5 V can be optionally set The flowrate is set in parameter setup mode CF page 5 7 for details PV forced zero Function disabled function Function enabled When the setting flowrate is zero or when the valve fully closed mode is entered the PV is forcibly made to zero after delay time The shifting of PV by influence of pressure can be cancelled The delay time is set in the parameter setup mode gt page 5 7 for details Station address 0 Communications function disabled setting 1 to 127 Station address Transmission speed 0 38400 bps selection 1 19200 bps 2 9600 bps 3 4800 bps 4 2400 bps Communications 0 8 data bits even parity 1 stop bit conditions selec _ 1 8 data bits no parity 2 stop bits tion SP limit function 0 SP limit function disabled 1 Upper limit only 2 Lower limit only 3 Both upper and lower limi
36. es before reading the rest of this manual The use of this product in a manner not specified by the manufacturer will impair its built in safety features WARNING Never allow gases that are within explosive limits to pass through this controller Doing so might result in explosion accidents Do not use this controller for gases other than standard compatible gas types Air Nitrogen argon and carbon dioxide CO3 gt O OO Do not use this device for medical instruments CAUTION Prevent foreign matter from entering the controller If the rust water droplet oil mist or dust in the piping flows into the controller measurement error might occur and result in damaging the controller If there is a possibility that are any foreign mat ter flows into the controller provide a filter or mist trap capable of eliminating more than 0 1 um foreign matter at the upstream and periodically inspect and replace the filter Use this controller within the operating differential pressure range Also do not apply pressure out side the pressure resistance range Doing so might damage this controller The valve on this device cannot completely stop a flow If complete shutoff is required provide a separate shutoff valve Also if an external shutoff valve is closed it is necessary also to fully close this device s valve using either of the following methods e Set the flow rate to zero e Set the operation mode to f
37. essory 2 S 61 12 7 a 44 8 gt Connection glie Loader port OUT 48 Z jack 3 5 w eae A No 1 ee x T l au i D 7 AAA TO o o o o e r al sp e fo t 19 SABERE 3 3 CR AR A i ii a GICISIO si a 4 ev azbil i i J Y O i Connection am D No 9 13 5 10 portIN Applicable panel plate thickness is 2 to 7 mm Panel cutout unit mm Vertical gang mounting TIE Horizontal gang mounting 20min 45725 48 XN 3 9 Individual mounting 45 85 45 05 N Number of mounted units 20 min Chapter 3 MOUNTING AND WIRING Mounting on a panel The mounting panel should be used with a thickness of 2 to 7 mm of steel k Mounting bracket Mounting bracket Panel cutout J Handling Precautions To fasten this controller onto the panel tighten a mounting bracket screws and turn one more half turn when there is no play between the bracket and panel Excessively tightening the screws might deform the controller case Piping connection e When this controller is mounted on a panel use piping which does not give a stress to the controller case during and after the piping work e Connect the piping so that the gas flows in the direction from IN to OUT as indi cated on the body e After connecting piping check for any gas leaks GU Handling Precautions e When metal piping is directly connected to the piping connection port this controller c
38. for use the reading value is required to convert by a specific calculation formula However these inconve nient operation is no more required with the mass flow control e Multi setup function Up to four preset flowrate settings can be instantaneously switched to by key operation or external switching input e Gas type switching function The gas type to be used can be selected from the standard compatible gases by key operation Gas type setting function The user can set any gas type conversion factors to accommodate the gases other than standard compatible gases or mixed gases Valve forced open close function selecting the operation mode The valve can be forcibly fully opened or fully closed by key operation or external switching input e Slow start function Sudden changes in the control flowrate when control is started or when the flow rate setting value is changed can be suppressed The control speed can be changed in eight stages within the range from about 1 to 6 seconds 1 1 Chapter 1 INTRODUCTION 1 2 e Flowrate integration function The fowrate can be integrated up to eight digits 99 999 999 count The display is switched in four digits at a time MPC9500 0 01 L in unit MPC0002 0005 0 1 L in unit MPC0020 1 Lin unit The count can be reset by key operation or external switching input Integration start stop reset can be remote controlled by external switching input After a reset by key operation
39. g of data Set data again The alarm code is displayed only during the instantaneous flowrate operating mode and integrated flowrate are displayed x The timing for activation of the valve overheating limit 14 varies depending on the model As long as the conditions causing FLW remain the current to the valve will be forcibly limited regardless of the setting for amp in the function setup If this situation continues the final result will be that the valve is fully closed If FL sensor error occurs the flowrate value will become indefinite Therefore the control flowrate becomes indefinite even if 0 Control continued alarm ignored is selected at amp in the function setup When 1 Move to fully closed or 2 Move to fully open is selected at 5 in the function setup the alarm display and the operating mode at alarm occurrence can be maintained even after the cause of alarm is removed When canceling the alarm make the alarm reset operation Canceling the alarm Keep the ENT key pressed while the instantaneous flowrate is displayed The alarm can be cancelled after 3 seconds Chapter 6 TROUBLESHOOTING E Other troubles Flowrate display does not become zero even in spite of an actual zero flowrate Display does not become OFF even if the valve is fully closed e Zero point shift due to the influence of pressure e Gas type setup is incorrect e Condensa
40. ing major functions and settings operating procedures troubleshooting and detailed specifications MPC9500 0002 0005 0020 Panel Mount Mass Flow Controller User s Manual for Communication Functions Manual No CP SP 1154E Those using the communications functions of the MPC should read this manual This manual describes an outline of communications wiring communications procedures a list of MPC communications data how to remedy trouble and communications specifications Organization of This User s Manual This manual is organized as follows Chapter 1 Chapter 2 Chapter 3 Chapter 4 Chapter 5 Chapter 6 Chapter 7 INTRODUCTION This chapter briefly describes this device its features and the model selection guide NAMES AND FUNCTIONS OF PARTS This chapter describes the Names and functions of parts on this device MOUNTING AND WIRING This chapter describes installation mounting wiring and initial settings on this device BASIC OPERATION This chapter describes the basic operations for using this device ADVANCED OPERATION This chapter describes how to set the functions and parameters on this device TROUBLESHOOTING This chapter describes how to investigate and remedy trouble that may occur dur ing operation of this device SPECIFICATIONS This chapter describes the specifications and external dimensions of this device Contents Conventions Used in This Manual Safety
41. is returned to the instantaneous flowrate display C Handling Precautions If any operation is not performed for one minute after entering the function setup mode the display automatically returns to the regular display instantaneous flowrate display If the DISP key is pressed while the operation in step 5 is performed indicated by blinking display the setting value remains at the previous value without being updated 5 2 E Function setup item list Display Item Item Description Key lock Setup Item and Description 0 Unlocked 1 Settings other than flowrate setting are locked 2 All settings locked Factory Setting Chapter 5 ADVANCED OPERATION Remarks The key lock can be canceled even while it is enabled Lal is indicated on the display during the key locked setting Operating mode selection selection by key operation 0 Operating mode selection by key operation is disabled Operating mode selection by key operation is enabled The operating mode fully closed control fully open by key operation is selectable gt 4 3 Selecting the Operating Mode page 4 6 Instantaneous flow rate setup method instantaneous SP setup method selec tion Digital setup set by key operation or RS 485 communications Analog setup set by external analog voltage input Number of instan taneous flowrate setups selection number of SPs selection Number of SPs 1
42. ized N C Standard full scale flowrate nitrogen conversionvalue 0 500 L min standard 2 00 L min standard Standard compatible gas types Air Nitrogen argon carbon dioxide CO2 Note The gas must be a dry gas not containing corrosive components chlorine sulfur acid The gas must also be a clean gas not containing dust or oil mist Control range 4 to 100 FS 1 Response Within 1 0 s typ to set point 2 FS Accuracy 2 FS max at standard temperature and differential pressure Repeatability 1 FS max Temperature influence A maximum of 0 1 FS per C Pressure influence Q gt 40 FS 0 7 FS max 0 4 FS max per 0 1 MPa 10 FS lt Q lt 40 FS 1 2 FS max 0 7 FS max Q flowrate Q lt 10 FS 2 FS max 1 2 FS max Pressure Standard differential pressure 0 2 MPa 290 PSI Inlet pressure 0 2 MPa 290 PSI gauge outlet pressure 0 0 MPa 0 PSI gauge Required differential pressure 2 0 05 MPa 72 5 PSI Operating differential pressure range 3 0 3 MPa 435 PSI max Pressure resistance 0 5 MPa 725 PSI gauge Standard temperature 25 C 77 F Allowable operating temperature range 10 to 50 C 14 to 122 F 0 to 50 C 32 to 122 F when RS 485 communication Allowable storage temperature range 10 to 60 C 14 to 140 F Humidity All
43. ller provide a filter or mist trap capable of eliminating more than 0 1 um for eign matter at the upstream and periodically inspect and replace the filter Use this controller within the operating differential pressure range Also do not apply pressure out side the pressure resistance range Doing so might damage this controller The valve on this device cannot completely stop a flow If complete shutoff is required provide a separate shutoff valve Also if an external shutoff valve is closed it is necessary also to fully close this device s valve using either of the following methods e Set the flow rate to zero e Set the operation mode to fully closed If this valve remains in control mode when the external shutoff valve is closed zero flow rate there will be an excessively large momentary flow when the external shutoff valve is opened Also in control mode or with the valve forced fully open if the external shutoff valve is closed con tinuously the MPC s overheating prevention limit 717 will be activated and the electrical current driving the valve will be forcibly limited When this controller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work If a metal piping is directly connected to the pipe connection port of this controller the case might be deformed or damaged Do not allow lead clippings chips or water to enter this controller case Failure to do so
44. n of the above situation varies depending on the conditions or environment of use of the products you are required not to use any Azbil Corporation s products for a period exceeding ten 10 years unless otherwise stated in specifications or instruction manuals 5 Recommendation for renewal Mechanical components such as relays and switches used for Azbil Corporation s products will reach the end of their life due to wear by repetitious open close operations In addition electronic components such as electrolytic capacitors will reach the end of their life due to aged deterioration based on the conditions or environment in which such electronic components are used Although acceleration of the above situation varies depending on the conditions or environment of use the number of open close operations of relays etc as prescribed in specifications or instruction manuals or depending on the design margin of your machine or equipment you are required to renew any Azbil Corporation s products every 5 to 10 years unless otherwise specified in specifications or instruction manuals Field instruments sensors such as pressure flow level sensors regulating valves etc will reach the end of their life due to aged deterioration of parts For those parts that will reach the end of their life due to aged deterioration recommended replacement cycles are prescribed You are required to replace parts based on such recommended replacement cycles 6 Other prec
45. n pulse output In addition the output logic can be reversed at nor mal state ON at event occurrence OFF However the output is always OFF during power OFF e OK lamp light up output The OK lamp can be made to light when the control flowrate is within the set ting value allowable range This function is very handy for verifying at a glance whether or not the new setting value is being followed properly when a setting value is changed The OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and loading it to a sequence program Chapter 1 INTRODUCTION e Automatic shut off function The valve can be shut off automatically under the following conditions 1 When the integration count value reaches the setting value 2 When one of the alarms including flowrate alarms occurs However the valve of this device does not have a capability of complete shut off When the complete shut off is required provide a separate shut off valve exter nally Automatic reset of integration count at start of control function Start of control and integration count reset can be carried out simultaneously by a single action key operation or external switching input Combining this func tion with the automatic shut off function described above is handy for shutting the valve off when a fixed number of integration values have been counted repeat edly e Direct setup f
46. on for your purchase and use of Azbil Corporation s products You are required to acknowledge and agree upon the following terms and conditions for your purchase of Azbil Corporation s products field instruments control valves and control products unless otherwise stated in any separate document including without limitation estimation sheets written agreements catalogs specifications and instruction manuals 1 Warranty period and warranty scope 1 1 Warranty period Azbil Corporation s products shall be warranted for one 1 year from the date of your purchase of the said products or the delivery of the said products to a place designated by you 1 2 Warranty scope In the event that Azbil Corporation s products has any failure attributable to azbil during the aforementioned warranty period azbil shall without charge deliver a replacement for the said product to the place where you purchased or repair the said product and deliver it to the aforementioned place Notwithstanding the foregoing any failure falling under one of the following shall not be covered under this warranty 1 Failure caused by your improper use of Azbil Corporation s products noncompliance with conditions environment of use precautions etc set forth in catalogs specifications instruction manuals etc Failure caused for other reasons than Azbil Corporation s products Failure caused by any modification or repair made by any person other than azbil or azbil s s
47. ot containing corrosive compo nents chlorine sulfur acid The gas must also be a clean gas not containing dust or oil mist 2 to 100 FS Within 1 0 s typ to set point 2 FS 2 FS max at standard temperature and differential pressure 1 FS max A maximum of 0 1 FS per C 0 2 FS max 0 2 FS max 0 3 FS max 0 2 FS max 0 5 FS max 0 2 FS max 0 2 MPa 290 PSI Inlet pressure 0 2 MPa 290 PSI gauge outlet pressure 0 0 MPa OPSI gauge 0 1 MPa 145 PSI 0 15 MPa 217 5 PSI 0 3 MPa 435 PSI max 0 05 to 0 3 MPa 72 5 to 435 PSI Chapter 7 SPECIFICATIONS 0 5 MPa 725PSI gauge 25 C 77 F 10 to 50 C 14 to 122 F 0 to 50 C 32 to 122 F when RS 485 communication 10 to 60 C 14 to 140 F 10 to 90 RH no condensation allowed 1 Key operation 2 External setup voltage input only for the model with analog I O function 3 Loader communication 5 4 RS 485 com munications only for the model RS 485 communications function 6 0 to 5 Vdc 1 to 5 Vdc selectable by function setup Input impedance 1 MQ 10 only for the model with analog I O function 7 segment LED 8 digits For the instantaneous flowrate display 4 digits and for the setting flowrate display 4 digits 1 2 FS 1 digit at standard temperature and differential pressure 0 0 to 9
48. owable operating humidity range 10 to 90 RH no condensation allowed Flowrate setup Setup method 1 Key operation 2 External setup voltage input only for the model with analog I O function 3 Loader communication 5 4 RS 485 com munications only for the model RS 485 communications function 6 Setup resolution 1 Setup input voltage range 0 to 5 Vdc 1 to 5 Vdc selectable by function setup Input impedance 1 MQ 10 only for the model with analog I O function Flowrate display Display method 7 segment LED 8 digits For the instantaneous flowrate display 4 digits and for the setting flowrate display 4 digits Indication resolution 1 Indication accuracy 2 FS 1 digit at standard temperature and differential pressure Integra tion function Indication range 0 00 to 999 999 99 L 0 0 to 9 999 999 9 L Indication resolution Data backup timing 0 01 L 0 1L 1 At each 5 L count 1 At each 20 L count 2 At each after 1 hour from the previous backup Flowrate output 4 7 2 Output scale Standard output voltage range 0 to full scale flowrate scaling available 0 to 5 Vdc 1 to 5 Vdc selectable by function setup MPC0005 MPC0020 Proportional solenoid valve Normally closed when de energized N C 5 00 L min standard 20 0 L min standard Air Nitrogen argon carbon dioxide CO2 Note The gas must be a dry gas n
49. peration mode displays while the instantaneous flowrate is displayed Operating mode Upper display OK lamp Remarks Fully closed mode STI off 211 is displayed at all times after flowrate zero is confirmed Control mode BH Dx onoroff is displayed for 1 second when the control mode is entered Fully open mode Blinking Dee EI Fitts is displayed for 1 second when the fully open mode is entered Chapter 5 ADVANCED OPERATION When the following operation is performed while the integrated flowrate is displayed the parameter setup mode and function setup mode are entered and each setting value can be changed Power ON Instantaneous flowrate display DISP key 1 s or more mm HOGG instantaneous j Sel flowr Ba S i c EE O J eta DISP key or no key is pressed for 10 s or more O peratio n Setting flowrate 8888 No key is pressed for 10 seconds or DISP key less than 1 s more Operation mode display Instantaneous im li flowrate O ps la cone HOAR Operation mode D O Integrated DISP key flowrate display Integrated flowrate vini im O m V key J 1 0 3 s or more Integrated flowrate g 55 ea o ole Lights PERI DISP key lt key 3 s or more Parameter setup display Advanced GHAEB operation pregi Setting value ggg Function setup display lt key
50. rsion 1 L min standard indicates the volume flowrate per minute L min converted to 20 C and 101 325 kPa 1 atm The reference temperature can also be changed to 0 C 25 C and 35 C 2 The Air Nitrogen is set as a factory setting The MPC can be used for argon and carbon dioxide CO2 by setup change Chapter 2 NAMES AND FUNCTIONS OF PARTS E Display m Upper display Displays the instantaneous flowrate value 7 segment display When the display is switched it also displays the integrated flowrate value upper 4 digits aS parameter setup item function setup item or alarm details td PV l l Lower display Displays the set flowrate 7 segment display When the display is switched it also o o o yo es displays the operation mode sp integrated flowrate values lower 4 digits DISP key Used when switching TO value drive output parameter setup values the details of display gt A a j 7 fi 3 i function setup values L OK SPI SP2 SP3 EVI EV2 pera lon amp i y Indicates that the integrated flowrate is displayed lt Vv A lt gt Flashes when an integration event occurs ae OK Lights when the control flowrate is within the setting value alowable range Flashes when the operating mode is valve fully open SP1 to SP3 The lamp corresponding to the SP No which is used at multi setup is lit EV1 EV2 Lights when the
51. s device is a precision instrument Do not drop it nor subject it to shock Doing so might dam age the device Be sure to check that the wiring is correct before you turn the power ON Incorrect wiring might cause damage or malfunction oo v0 If there is a risk of a power surge caused by lightning use a surge absorber surge protector to pre vent fire or device failure The Role of This Manual A total of 3 different manuals are available for the Panel Mount Mass Flow Controller MPC Read them as necessary for your specific requirements If a manual you require is not available contact the azbil Group or its dealer MPC 9500 0002 0005 0020 Panel Mount Mass Flow Controller User s Manual Manual No CP SP 5317E This manual is supplied with the product Personnel in charge of design and or manufacture of a system using this device must thoroughly read this manual This manual describes the safety precautions installation wiring and primary specifications For further information about operation refer to other manuals Installation MPC9500 0002 0005 0020 Panel Mount Mass Flow Controller User s Manual for Installation and configuration Manual No CP SP 1153E This manual This manual is optional sold separately Personnel in charge of design manu facture operation and or maintenance of a system using this device must thor oughly read this manual This manual describes the installation wir
52. t The upper and lower limit values of the flowrate setup range can be set to desired levels The upper and lower limits are set in parameter setup mode gt page 5 7 for details 1 When 4 Switching of flowrate setup method is selected at the external switch input function assignment T ori i the switching by external switch input takes precedence 2 These items can be set only on the models with analog input output function 3 These items can be set only on the models with RS 485 communication function 4 This function is invalid for the controller shipped before Dec 2006 Chapter 5 ADVANCED OPERATION 5 2 E Setup method Parameter Setup Follow the procedure below to set the parameters such as flowrate deviation alarm upper and lower limit flowrate and event output delay time 1 Press the DISP key to display the integrated flowrate gt gt L lamp lights 2 Keep the lt key pressed for 3 seconds gt gt et is indicated on the upper display Parameter setup mode 3 Press the A key or v key to select the target setup item and press the ENT key gt gt The setting value currently being indicated on the lower display blinks 4 Press the a key or v key to select the target setting value You can move to the digit to be changed by pressing the lt key 5 When the target setting value is displayed press the ENT key to fix the setting value gt gt The
53. th valve fully opened in air 7 6 vi Chapter 1 E Introduction E Functions INTRODUCTION The MPC high performance digital mass flow controller has been developed for the general industrial market featuring high speed and wide range flowrate control the following features are offered e The MPC integrates the advanced technologies of an ultra high speed response flow velocity sensor the uF Micro Flow sensor made using Azbil Corporation proprietary technology an ultra compact proportional solenoid valve a new flow channel structure and advanced actuator control technology achieves the realiza tion of the mass flow controller which can be mounted on the panel of the equip ments e This is a compact 48 X 48 mm mask size and light weight approx 300 g mass flow controller e Easy operation and easy mounting can be realized in good harmony when replac ing from a float type flow meter In addition the automatic control of mass flow rate and remote flow setting change can be performed e There is almost no influence of temperature and pressure fluctuations by integrat ing a uF sensor e A wide variety of functions are provided as a standard function to respond to the various needs of the users e In case of a float type flow meter the pressure and temperature compensation is inevitable In addition if the design conditions gas specific gravity secondary back pressure etc are different from the conditions
54. tion on sensor e Foreign object attached to sensor Countermeasure e Adjust the inlet pressure setting func tion setup 24 with the actual inlet pressure used or use the PV forced zero function function setup 29 e Adjust the gas type setting function setup 4 with the actual gas used Insert a mist trap upstream e Request for repair service Flowrate does not stabilize e Operation differential pressure range is exceeded e Large inlet pressure fluctuations e Regulator interference e Large pressure loss between regulator and this device Large fluctuation in inlet pres sure according to flowrate e Reduce the inlet pressure e Install a regulator upstream e Change the regulator pressure setting or apply the PV filter function setup lt 3 e Change the pipe bigger diameter Poor accuracy 6 2 e Temperature reference does not match the reference flowmeter e Regulator is vibrating slightly e Foreign object attached to sensor e Adjust the temperature reference It can be changed in the function setup i 9 e Change the regulator pressure set ting e Request for repair service Chapter 7 E Specifications SPECIFICATIONS Specifications are given on the next page 7 1 Chapter 7 SPECIFICATIONS Model No Valve type MPC9500 MPC0002 Proportional solenoid valve Valve operation Normally closed when de energ
55. ubcontractors Failure caused by your use of Azbil Corporation s products in a manner not conforming to the intended usage of that product Failure that the state of the art at the time of Azbil Corporation s shipment did not allow us to predict or Failure that arose from any reason not attributable to Azbil Corporation including without limitation acts of God disasters and actions taken by a third party Please note that the term warranty as used herein refers to equipment only warranty and Azbil Corporation shall not be liable for any damages including direct indirect special incidental or consequential damages in connection with or arising out of Azbil Corporation s products 2 3 4 CL 5 6 ct 2 Ascertainment of suitability You are required to ascertain the suitability of Azbil Corporation s products in case of your use of the same with your machinery equipment etc hereinafter referred to as Equipment on your own responsibility taking the following matters into consideration 1 Regulations and standards or laws that your Equipment is to comply with 2 Examples of application described in any documents provided by Azbil Corporation are for your reference purpose only and you are required to check the functions and safety of your Equipment prior to your use 3 Measures to be taken to secure the required level of the reliability and safety of your Equipment in your use Although Azbil Corporation is constantly m
56. ully closed If this valve remains in control mode when the external shutoff valve is closed zero flow rate there will be an excessively large momentary flow when the external shutoff valve is opened Also in control mode or with the valve forced fully open if the external shutoff valve is closed con tinuously the MPC s overheating prevention limit Fi 7 will be activated and the electrical current driving the valve will be forcibly limited When this controller is mounted on a panel use piping which does not give stress to the controller case during and after the piping work If a metal piping is directly connected to the pipe connec tion port of this controller the case might be deformed or damaged The power supply circuit of this controller and the I O circuit are not isolated each other Therefore ensure that the power supply of this controller is isolated from the power supply for external devices insulate the power supply If a common power supply is used for the controller and the external devices it might cause malfunction or faulty operation 9S Do not allow lead clippings chips or water to enter this controller case Failure to do so might cause malfunction or faulty operation CAUTION For the model with analog I O function do not apply a negative voltage or large voltage more than 5 V to the analog setting input terminal Doing so might cause malfunction or faulty operation Thi
57. unction This function allows users to easily change the flowrate setup This function is useful when you frequently change setting values for example when you adjust the preset flowrate during trial operation e Loader communication function Connecting a loader cable sold separately to the loader jack at the rear side of this device enables direct communication with a personal computer in the form of one to one using the communication program made by user By using this loader communication various settings in the function setup and the flowrate setup can be configured from a personal computer and the control flowrate or alarm status can be read out with the personal computer Chapter 1 INTRODUCTION E Model selection guide Control Connec Option Option Option Option flow range tion 1 2 3 4 Description Panel mount mass flow controller 0 020 to 0 500 L min standard 0 08 to 2 00 L min standard 0 10 to 5 00 L min standard 0 4 to 20 0 L min standard Model with integrated display Brass Rc1 8 Air Nitrogen 2 None With analog input output function without RS 485 communication function With RS 485 communication function without analog input output function Without optional function Without optional function 0 Without optional function Inspection certificate Traceability certification Product ve
58. ut delay time User setup conver 1 000 0 100 to 9 999 sion factor Event output 1 0 FS 0 to 100 FS Unit L min standard upper lower limit 11 11 flowrate setup Event output 2 0 FS 0 to 100 FS upper lower limit 11 11 flowrate setup Analog optional 100 FS 10 to 100 FS The flowrate of analog input output scaling 11 11 100 5 V is set Unit L min standard n ad Integrated event 0 to 9999 flowrate lower 4 digits aa A Integrated event 0 to 9999 flowrate upper 4 digits PV forced zero 3 05 0 0 to 999 9 s function SP upper limit flow 100 FS 10 to 100 FS Unit L min standard rate 11 11 When the upper limit flowrate is set lower SP lower limit flow 0 FS 10 to 100 FS than the lower limit flowrate the upper rate 11 11 limit flowrate is prioritized than the lower 1 Operation during judgment of flowrate OK OHYS OHSS pa ON OK Def PV Def 2 Operation during judgment of flowrate deviation upper and lower limit alarms RL RM ON ALM ALL OFF A La AH N Chapter 5 ADVANCED OPERATION 3 This item can be set only when other than 0 Not used is selected at the flowrate alarm setup type in the function setup 4 This item can be set only when other than 0 Not used is selected at the event output type assignment 5 and in th
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