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User Manual PZ219E - Physik Instrumente

1. DANGER HIGH VOLTAGE E 616 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Working with these devices requires adequately trained and educated operating personnel Follow general accident prevention rules WWW pi ws E 616 PZ219E Release 1 0 3 Page 7 Introduction WWW pi Wws Piezo Nano Positioning PI B Do not touch the pins of the sub D connector which carry the piezo output voltage and the sensor signals The high voltage output may be active whenever the controller is turned on Voltages between 30 V and 130 V can be present on the sub D connector m Because grounding is not assured over the power connection the ground stud on the rear panel must be connected to a Protective Ground Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 616 from power when opening the case and when resetting internal switches or jumpers When the E 616 must be operated with the case open voltages of up to 130 V can be exposed Do not touch internal conductors Connect the AC power cord of the external power supply to the wall socket 100 to 240 VAC To disconnect the system from the supply voltage completely remove the power plug from the wall socket Install the system near the AC outlet and such that the AC power plug can be reached easily CAUTION The product described is an ESD sensitive electr
2. Now change the control input signal for OX respectively OY in the range from 0 V to 10 V The overflow LEDs should no longer glow Permanent glow may indicate failure of the device Bm With E 616 S0G 1 Display the monitor signal V MON of the amplifier channel with an overflow V MON 1 V MON 2 V MON 3 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete contraction expansion cycle by commanding a vertical motion Apply a control input signal with a voltage range from 3 V to 3 V to Z Offset SMB socket Z Apply a control input voltage of 0 V to Z Offset E 616 PZ219E Release 1 0 3 Page 28 Piezo Nano Positioning PI Calibration 4 Apply a control input voltage of 0 V to X Input SMB socket OX and to Y Input SMB socket OY to set the platform back to its initial position 5 Adjust the Zero potentiometer corresponding to the chosen V MON channel until you obtain 40 5 V as V MON signal corresponds to 50 V amplifier output voltage repeat this procedure for each of the three V MON channels 6 Now change the control input signal for OX and OY in the range from 5 V to 45 V The overflow LEDs should no longer glow Permanent glow may indicate failure of the device Zero Point Adjustment in Open Loop Mode CAUTION SGS MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector SGS MON X
3. Nano Positioning PI Starting Operation Selection of Open Loop and Closed Loop Operation By default all E 616 Controllers are set to closed loop mode and are calibrated To change to open loop mode open the device and use the internal DIP switches If these switches are set to open loop mode an external selection of the operation mode is possible using the rear Analog Interface connector To open the device proceed as follows B Disconnect from line voltage by removing the external power supply from line voltage B To remove the top cover of the E 616 Controller case unscrew the six labeled and the two rear cross head screws see Figure 4 below Figure 4 The top cover of the case is removed via the six labeled and two rear cross head screws The DIP switches for operating mode selection are marked in the Figure 5 below WWW pi Wws E 616 PZ219E Release 1 0 3 Page 18 Piezo Nano Positioning PI Starting Operation Servo control SS module 1 for tilt gt Servo control module 2 for tilt gt axis OY M Figure 5 Assignment of servo control modules to tilt axes and DIP switches to select Servo OFF ON m To change from closed loop servo on mode to open loop servo off mode use DIP switch 1 for servo control module 1 and DIP switch 2 for servo control module 2 Servo control module 1 is assigned to X tilt axis servo control module 2 is assigned to Y tilt axis To deactivate control of
4. 616 PIEZO ER e Figure 6 Potentiometer Zero 1 to Zero 3 for zero point adjustment and overflow LEDs CAUTION V MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector WWW pi Wws E 616 PZ219E Release 1 0 3 Page 27 Calibration WWW pi ws Piezo Nano Positioning PI V MON X pin 1 V MON Y pin 2 and V MON 1 to V MON 3 pins 3 4 5 V MON X V MON Y Output impedance is 11 KQ per channel V MON 1 to V MON 3 Output impedance is 1 KQ per channel Your measurement device may get damaged if you measure without appropriate input impedance The device is shipped calibrated and factory set to closed loop operation Following instructions refer to zero point adjustment in closed loop operation For zero point adjustment proceed as follows Bm With E 616 SS0G Display the monitor signal V MON of the amplifier channel with an overflow V MON 1 V MON 2 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete tip tilt motion of both tilt axes Apply a control input voltage in the range of O V to 10 V to X Input SMB socket OX respectively to Y Input SMB socket OY Apply a control input voltage of O V to X Input and Y Input to set the platform back to its initial position Adjust the corresponding Zero potentiometer until you obtain O V as V MON signal corresponds to 0 V amplifier output voltage
5. F r r r f r r F F r F f f H f r r F F f F F F F f F r r F r F r r r F r f r r r r F r F r F r r r r r r r r r r r r r r r r r r r f r D SS ee ae sl a F r f F r r r r 10 110 700 G I S m Arepngdiug 10 oe on ne ew n TR J J 10 d in uF IS measure capacitance PZT loads open loop Figure 9 gt a O cC c m EZ O c o 9 o GAS Q QD Oud pO CO D ON c O C quU oO co D ec Oe H v Oy 5 Oo opc 0e amp SKS E3 aeS o OO e E UO e Oo TSO O ONLE Op ao cay O Coes ovo RR ODL g CoN E oe ONCE Oo O5 o O O QD oO r SS H GO o ES ez b DH O DEO S E oC OO o kO EC oO E CO A C wv oroo Qi OD o a 0 D o2590t SECHER KS OO CH SoNgo gaco EHS e Z s25 C gt C uu um Or au c gt oo CO Or Wn TCO D o gt c C gt gt OC O OD Soe C eae 2 coa dE eg O OQ OO CH DZ o OD o gge f O 288 Of O n o D o gt oO C x GO YO Ce O D oO o Sex GO go gt O Uo 2 O pz Dw zO E2320 2oQc 297909 H pct U Benn OO Se o 0 ZO ZG a Lego Pa C Umax Up p f ion Is idal operati INUSOI Peak power for s Pmax 11 C Umax Up p f Page 41 E 616 PZ219E Release 1 0 3 www pi ws Technical Data WWW pi ws Pie
6. pin 9 SGS MON Y pin 10 and SGS MON 1 to SGS MON 3 pins 11 12 13 oGS MON X SGS MON Y Output impedance is 50 per channel SGS MON 1 to SGS MON 3 Output impedance is 10 KQ 10 nF Your measurement device may deliver false values if you measure without appropriate input impedance NOTE To avoid an overflow of the amplifier in open loop mode do not exceed the allowable control input range Zero point adjustment can be performed in open loop mode as well To do so proceed as follows m With E 616 SS0G 1 Display the sensor monitor signals SGS MON for the sensor channel to be adjusted SGS MON 1 SGS MON 2 2 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete tilt motion of both tilt axes Apply a WWW pi ws E 616 PZ219E Release 1 0 3 Page 29 Calibration Piezo Nano Positioning PI control input signal in the range from 2 V to 12 V to X Input respectively to Y Input 3 X Apply a control input voltage of 0 V to OX and OY to set the platform back to its initial position 4 Adjust the corresponding Zero potentiometer until you obtain 0 V as SGS MON signal The OFL LEDs no longer glow if you change to closed loop mode B With E 616 S0G 1 Display sensor monitor signal SGS MON of the sensor channel to be adjusted SGS MON 1 SGS MON 2 SGS MON 3 2 To avoid an offset to the sensor signals caused by hysteresis effects perform a complete contraction expansion cycle by c
7. Panel of the E 616 Controller esses 16 23 Open Loop and Closed Loop Operation 17 24 Analog GoDtrobInplib EE 20 25 Ata e Een EE 21 26 Download of Analog GCS LabVIEW Driver Set 23 2 7 MOMO SIG IM EE 24 Calibration 27 31 ZEO FON AGUSNON een 27 32 Servo Controller Dynamic CGallraton 31 System Description 33 41 The E 616 SS0x Controller eee 33 42 The E 616 S0x Controller eee menn 33 Troubleshooting 36 Customer Service 37 Old Equipment Disposal 38 Technical Data 39 Dee de 39 92 PRU e EEN 40 83 Frequency Response Diagram ccccccsscceccsecceeeceeecseeceeeneeeseees 41 8 4 8 5 8 6 8 Block Diagram for E 616 SS0X ccccccsececceecseeeesceeseceesecceeesceeeess 43 Block Diagram for E Gip Gs 45 Dimensions of E 616 Bench Top Controller 47 Itt JASSIODITIOLI EE 48 8 1 PZT amp Sensor Connector of eE Gip 48 8 2 Pin Assignment of Analog Interface cccceccecsseseeeeseeeeeseeeeeeeseees 49 Introduction Piezo Nano Positioning PI 1 Introduction 1 1 Overview The E 616 is a special controller for piezo based tip tilt mirrors and tip tilt platforms with high resolution strain gauge sensors A high peak output power of 10 W per channel allows dynamic operation of the tip tilt mirrors for applications such as laser beam steering or
8. Piezo Nano Positioning PI oGS MON 1 to SGS MON 3 Output impedance is 10 k KQ 10 nF Your measurement device may deliver false values if you measure without appropriate input impedance Monitoring the Sensor Signals The sensor signals can be displayed related to channels SGS MON 1 oGS MON 2 and with E 616 50 SGS MON 3 and related to axes SGS MON X SGS MON Y The corresponding monitor channels are available on the rear 15 pin main connector Be sure to choose a suitable input impedance for your measurement device when you measure the monitor voltage m E 616 SS0 The sensor channels can be assigned to the tilt axes X and Y ina 1 to 1 ratio Therefore SGS MON 1 equals SGS MON X SGS MON 2 equals SGS MON Y Channels SGS MON X pin 9 and SGS MON Y pin 10 display the differential sensor signals for the X and the Y axis Each sensor signal is based on a pair of sensors each pair is assigned to the corresponding tilt axis B E 616 S0 A transformation unit connects the three sensor channels and both tilt axes The sensor monitor channels SGS MON 1 pin 11 SGS MON 2 pin 12 and SGS MON 3 pin 13 display the signals of the sensors attached to the piezo actuators The sensor monitor signals SGS MON X pin 9 and SGS MON Y pin 10 display the position of the tilt axes calculated by the transformation unit The axis related sensor signals SGS MON X and SGS MON Y are derived from the channel related sensor signals a
9. Release 1 0 3 Page 6 Introduction Piezo Nano Positioning PI 12 Prescribed Use Based on their design and realization E 616 bench top controllers for piezo multi axis tip tilt platforms are intended to drive capacitive loads in the present case piezoceramic actuators E 616 Controllers must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads Observe the safety precautions given in this User Manual The E 616 is a laboratory apparatus as defined by DIN EN 61010 It meets the following minimum specifications for safe operation any more stringent specifications in the technical data table are of course also met B Indoor use only B Altitude up to 2000 m B Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C B Line voltage fluctuations not greater than 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 1 3 Safety Precautions Carefully read also the user manuals and or technical notes of all other components involved as e g of mechanics and software Failure to heed warnings in this manual can result in bodily injury or material damage or loss of warranty
10. a tilt axis in principle set the corresponding DIP switch from On to Off NOTE Separate Control of the Tilt Axes Separate control of each of the two tilt axes is possible for both versions of the E 616 Controller For example X tilt axis can be operated in closed loop mode while Y tilt axis is in open loop mode NOTE Selection of Operating Mode by Analog Interface Connector When DIP switches 1 and 2 are in OFF position then servo control can be activated deactivated by pins 6 Servo 1 OFF ON and 7 Servo 2 OFF ON of the rear Analog Interface connector Use TTL signals for these pins 0 V to 0 5 V LOW Servo ON 3 V to 5 V HIGH Servo OFF WWW pI ws E 616 PZ219E Release 1 0 3 Page 19 Piezo Nano Positioning PI Starting Operation NOTE Note that the vertical motion commanded by the E 616 Controller for tripod design Z Offset always is in open loop mode independent from the operation mode of the X and Y tilt axes 24 Analog Control Input For all E 616 models tip tilt motion of the mirror platform is commanded by analog signals Control input signals generated by external signal sources are connected to SMB sockets OX Input X OY Input Y and with the E 616 S0G tripod controller to Z Z Offset Computer control can be implemented using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with th
11. amp Sensor Zero we 90 me OFL1 4 2 3 Power Figure 2 Front panel of the E 616 Controller WWW pi ws E 616 PZ219E Release 1 0 3 Page 14 Starting Operation WWW pi ws Piezo Nano Positioning PI Front panel element Function 25 pin sub D socket PZT amp For connection of tip tilt platforms with SGS oensor sensors appropriate tip tilt platform i e differential drive or tripod drive depends on E 616 Controller model For pin assignment see PZT amp Sensor Connector of the E 616 p 48 Zero 1 to Zero 3 For zero point adjustment of the SGS sensor potentiometers channels 1 to 3 OFL1 and OFL2 LED Green light for overflow of the amplifier see Zero Point Adjustment p 27 for more information POWER LED Green light glows permanently indicates connection to power supply NOTE Note that sensor channel 3 SGS MON 3 and potentiometer Zero 3 are deactivated with the E 616 Controller based on differential drive NOTE Overflow is Possible in Open Loop Mode In open loop operation exceeding the allowable control input range will cause an overflow condition of the corresponding amplifier In this case the maximum amplifier output voltage is reached and cannot be exceeded For further information see sections Analog Control Input respectively Zero Point Adjustment p 27 E 616 PZ219E Release 1 0 3 Page 15 Starting Operation Piezo Nano Positioning PI 222 Rear Panel of the E 616
12. up To cause tip tilt motion of the X axis respectively Y axis apply signals in the following control input ranges to SMB sockets OX respectively OY 0 V to 10 V for E 616 SSO0G 5 V to 5 V for E 616 50G If at least one of the green overflow LEDs glows then a zero point is necessary Follow the instructions for zero point adjustment see Zero Point Adjustment in Closed loop Operation with E 616 Controllers p 27 2 6 Download of Analog GCS LabVIEW Driver Set Updated releases of GCS LabVIEW drivers for analog controllers from PI and the corresponding manuals are available for download at www pi ws While the manuals are freely accessible you need a password for the WWW pi Wws E 616 PZ219E Release 1 0 3 Page 23 Starting Operation 2 7 WWW pi ws Piezo Nano Positioning PI software download This password is provided in the E500T0011 Technical Note delivered with the controller To download from the PI Website proceed as follows 1 On the www pi ws front page click on Download Support in the Service section on the left On the Download Support page click on Manuals and Software Downloads On the PI Download Server page enter the Username and the Password which are provided in the separate Technical Note and click on Login Click on Download in the navigation bar across the top Click on the E Piezo Drivers amp Nanopositioning category Click on E 500 Click on Software if you cli
13. 01 1 Technical Note contains access information for downloading the latest version of GCS LabVIEW driver set for analog controllers Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact Pl immediately Save all packing materials in case the product need be shipped again WWW pi ws E 616 PZ219E Release 1 0 3 Page 13 Piezo Nano Positioning PI Starting Operation 2 Starting Operation 2 1 Calibrated System If an E 616 Controller is ordered together with a tip tilt platform the system will be fully calibrated at Pl according to your specifications before being shipped and will come with a calibration information sheet CAUTION CALIBRATION If you inform PI about your application your E 616 will be fully calibrated before being shipped Tip tilt platform and controller are matched and calibrated together Do not interchange controller whole devices or individual modules and or tip tilt platforms when they are calibrated together Respect the assignment of the tip tilt platforms to the controllers as indicated by the serial numbers on the labels affixed to the devices Re calibration should only be done by adequate trained personnel and after consultation with Pl Otherwise preset data will be lost Only if an overflow LED OFL1 OFL2 glows a zero point adjustment will be necessary 2 2 Front and Rear Panel Elements 221 Front Panel of the E 616 Controller 5 PIG PZT
14. 09 Karlsruhe Germany d tegen Dr Karl Spanner President Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI amp PIC PICMA PlLine8 PIFOCG PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties LabVIEW The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 2012 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 11 01 2012 Document Number PZ219E KSch Release 1 0 3 E 616 benchtop User PZ219E103 in arbeit doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws About this Document Users of this Manual This manual is designed to help the reader to install and operate the E 616 Bench Top Controller for Piezo Multi Axis Tip Tilt Platforms It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures Furthermore the manual describes the p
15. C to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The PI Analog Controller drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards The driver set is also available for download from the PI Website Access to HyperBit Functionality for Enhanced System Resolution Supports Certain D A Boards Pie patented HyperBit technology for providing position resolution higher than that of the D A board is in the E 500 ACD driver set Activating HyperBit requires purchase of the password which can be obtained from Pl under Order No E 500 HCD Unpack the E 616 bench top controller for piezo multi axis tip tilt platforms with care Compare the contents against the items covered by the contract and against the packing list The following components are included E 616 PZ219 PZ150E C 663 PS in ordered configuration User Manual for E 616 SSO0G E 616 S0G this document User Manual for E 802 Servo Control Submodule Power supply 24 V DC E 616 PZ219E Release 1 0 3 Page 12 Piezo Nano Positioning PI Introduction E 692 SMB 3 adapter cables for SMB BNC 1 5m 819007423 15 pin sub D connector with shell without cable 2515 E500T0
16. Controller Figure 3 Rear panel of E 616 bench top cotnroller Rear panel element Analog Interface Control Input O X OY Z DC IN Ground stud NOTE Function Sub D socket 15 pins includes monitor outputs for amplifier output voltage internal control voltage and sensor signals and inputs for activation deactivation of servo control For pin assignment see Pin Assignment of Analog Interface p 49 SMB sockets for control input see Analog Control Input p 20 24 V DC 2 A connector for power supply For connection to a Protective Ground since grounding is not assured over the power connection Note that SMB socket Z for commanding a vertical motion is deactivated with the E 616 SS0 Controller for differential drive design WWW pi Wws E 616 PZ219E Release 1 0 3 Page 16 Starting Operation Piezo Nano Positioning PI NOTE Note that the vertical motion commanded by the E 616 Controller for tripod design Z Offset always is in open loop mode independent from the operation mode of the X and Y tilt axes 2 3 Open Loop and Closed Loop Operation Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 616 from power when opening the case and when resetting internal switches or jumpers When the E 616 must be operated with the case open voltages of up to 130 V can be exposed Do not touch internal conductors CAUT
17. E 616 SS0 The amplifiers PA1 and PA2 are assigned to the tilt axes in a one to one ratio whereas the output of amplifier PAS is set fixed to 100 V The monitor channels V MON 1 to V MON 3 display one hundredth of the actual output voltage V MON 1 is assigned to pin A 18 and amplifier PA1 V MON 2 is assigned to pin C 18 and amplifier PA2 V MON 3 is assigned to pin A 16 and amplifier PA3 BH E 616 S0 The three amplifier channels are related to the tilt axes X and Y via the transformation unit The output voltage V MON 1 to V MON 3 is split by a voltage divider and one hundreath of the actual output voltage is displayed as V MON signal V MON 1 is assigned to pin 3 and amplifier PA1 V MON 2 is assigned to pin 4 and amplifier PA2 V MON 3 is assigned to pin 5 and amplifier PA3 The channel related monitor signals V MON 1 V MON 2 and V MON 3 are calculated by the axis related signals V MON X and V MON Y as follows V MON 1 0 1 Y V MON 2 0 1 40 867 X 0 5 Y V MON 3 0 1 0 867 X 0 5 Y where X V MON X X Out Y V MON Y Y Out CAUTION SGS MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector SGS MON X pin 9 SGS MON Y pin 10 and SGS MON 1 to SGS MON 3 pins 11 12 13 oGS MON X SGS MON Y Output impedance is 50 per channel WWW pi Wws E 616 PZ219E Release 1 0 3 Page 25 Starting Operation WWW pi ws
18. ION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Open Loop Operation All E 616 versions can be operated in open loop mode Open loop operation of the tip tilt plattorm axes means that any control input provided by the user OX OY and for E 616 S0 Z as well determines the output voltage directly Closed Loop Operation Closed loop operation requires a position sensor and a servo module Any control input provided by the user determines the position of the tip tilt platform axes The output voltage required to reach this target position is calculated internally by the servo loop based on the given target and the feedback of the position sensors In position control operation non linearity and drift effects are compensated E 616 Controllers feature one E 802 55 servo control module per tilt axis You find a description of the servo control modules in the E 802 User Manual PZ150E WWW pi Ws E 616 PZ219E Release 1 0 3 Page 17 Piezo
19. LLER Figure 12 Dimensions of E 616 bench top controller in mm front panel decimal places separated by commas in drawings Analog Interface Control Input 2 12V 2 12 Figure 13 Dimensions of E 616 bench top controller in mm rear panel left side view right decimal places separated by commas www pi ws E 616 PZ219E Release 1 0 3 Page 47 Technical Data Piezo Nano Positioning PI 8 7 Pin Assignments 87 1 PZT amp Sensor Connector of the E 616 The 25 pin sub D connector of the E 616 Controller for tip tilt platforms features pin assignment as follows y w OND n E E i i L i i 20 2 22 23 24 PZT2 GND 25 PZT3 GND SGS B1 corresponds to the SGS1 sensor bridge signal connected to the positive input of the strain gauge amplifier The SGS1 B signal is connected to the negative input of the strain gauge amplifier Further sensor channels are connected accordingly GND zech KS LM 8 9 10 EN 12 AEN M 5 ME E 8 9 20 2a 22 239 24 E WWW pi ws E 616 PZ219E Release 1 0 3 Page 48 Technical Data 8 72 WWW pi ws Piezo Nano Positioning PI NOTE Pins 1 SGS3 B1 and 14 SGS3 B2 are not active with E 616 SSOG Controllers for differential drive of tip tilt platforms Pin Assignment of Analog Interface The following pin assignment is valid for the 15 pin Analog Interface connector of the E 616 bench top controller Pin nc ctio n 8
20. ON Y Output impedance is 50 per channel oGS MON 1 to SGS MON 3 Output impedance is 10 KQ 10 nF Your measurement device may deliver false values if you measure without appropriate input impedance 1 4 Model Survey WWW pi ws The following standard configurations of E 616 controllers are available E 616 S980G Multi Channel Servo Controller Driver for Piezo Tip Tilt Mirror Platforms with SGS and Differential Drive Bench Top E 616 S0G Multi Channel Servo Controller Driver for Piezo Tip Tilt Mirror Platforms with SGS and Tripod Drive Bench Top E 616 PZ219E Release 1 0 3 Page 10 Introduction Piezo Nano Positioning PI Both versions are also available as OEM modules E 616 SS0 E 616 S0 see Figure 1 below Figure 1 E 616 Sx Controller module with S 334 tip tilt mirror The OEM modules are described in a separate manual PZ200E You can download it from the PI website One E 802 55 servo module per tilt axis is integrated in the E 616 analog controllers Find more information on these servo modules in the separate User Manual PZ150E included in the contents of delivery WWW pi Wws E 616 PZ219E Release 1 0 3 Page 11 Introduction 15 1 6 WWW pi ws Piezo Nano Positioning PI Optional Accessories for E 616 E 500 ACD E 500 HCD Unpacking LabVIEW driver set for analog controllers available free of charge upon request Computer control can be implemented using a DAC board in a P
21. PZ219E User Manual E 616 SSOG E 616 S80G Bench Top Controller for Piezo Multi Axis Tip Tilt Platforms Helease 1 0 3 Date 11 01 2012 This document describes the following products B E 616 SSOG Multi Channel Servo Controller for Piezo Tip Tilt Plattorms with SGS and Based on Differential Drive Bench Top E 616 S0G Multi Channel Servo Controller for Piezo Tip Tilt Mirror Stages with SGS and Based on Tripod Drive Bench Top Declaration of Conformity according to DIN EN ISO IEC 17050 2005 01 GmbH amp Co KG Manufacturer s Auf der R merstrasse 1 C Germany The manufacturer hereby declares that the product Product Name Controller for Piezo Multi Axis Tip Tilt Platforms Model Numbers E 616 Product Options all complies with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Electrical equipment which is intended to be integrated in other electrical equipment only conforms to the cited EMC Standards and normative documents if the user ensures a compliant connection when implementing the total system Possible necessary measures are installation of the component in a suitable shielded enclosure and usage of suitable connectors March 23 20
22. X Out whereas V MON Y represents the servo control output Y Out SGS MON X represents X In SGS MON Y represents Y In The formulas for calculation of the axis position SGS MON X SGS MON Y from the three sensor signals SGS MON 1 to SGS MON 3 are in section The E 616 S0x Controller p 33 as well as the calculation of the channel related amplifier output voltage V MON 1 to V MON 3 from the axis related V MON X and V MON Y channels To obtain the maximum tilt range the actuators of the tripod drive are supplied with an offset voltage when the system is calibrated For valid control input ranges see below NOTE CONTROL INPUT RANGE FOR E 616 S0 AND E 616 S0G With calibration of the tripod controllers E 616 S0x an offset voltage is applied to the piezo actuators to achieve a maximum tip tilt range By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop RM and E 616 S0G following control input ranges are valid Closed loop mode for tilt axes B X Input Y Input 5 to 5 V B Z Offset 3 to 3 V Open loop mode for tilt axes B X Input Y Input 7 to 7 V B Z Offset 3 to 3 V If you apply voltage exceeding these ranges the overflow LEDs glow WWW pi ws E 616 PZ219E Release 1 0 3 Page 46 Technical Data Piezo Nano Positioning PI 8 6 Dimensions of E 616 Bench Top Controller PZT amp Sensor h 30 130V b E 616 PIEZOICONTRO
23. ck on Documents you will get the latest manuals Click the Download button below the latest CD mirror includes the manuals that were with the release Monitor Signals CAUTION V MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector V MON X pin 1 V MON Y pin 2 and V MON 1 to V MON 3 pins 3 4 5 V MON X V MON Y Output impedance is 11 KQ per channel V MON 1 to V MON 3 Output impedance is 1 KQ per channel Your measurement device may get damaged if you measure without appropriate input impedance Monitoring the Output Voltage The monitor channels of the rear Analog Interface connector display the output voltage of the servo control modules as well as the output voltage of the amplifiers Be sure to choose a suitable input impedance for your measurement device when you measure the monitor voltage E 616 PZ219E Release 1 0 3 Page 24 Starting Operation Piezo Nano Positioning PI The output voltage of both servo control modules is axis related for E 616 SS0 and for E 616 S0 The corresponding monitor voltages are displayed by pins 1 V MON X and 2 V MON Y of the Analog Interface connector The amplifiers multiply the servo control output voltage by 10 With the E 616 S0 Controller the axis related V MON signal is transformed to a channel related voltage first Monitor channels of the amplifier output voltage m
24. d WWW pi Wws E 616 PZ219E Release 1 0 3 Page 32 System Description Piezo Nano Positioning PI 4 4 1 4 2 www pi ws System Description The E 616 SS0x Controller The E 616 SS0 controller module and the E 616 SS0G bench top controller are designed for tip tilt platforms based on differential drive The differential drive of the S 330 and S 334 series tip tilt platforms is based on two pairs of actuators operating in push pull mode to realize tilt motion Each pair of actuators is interconnected electrically so that one actuator expands while the other contracts With this principle of operation pure vertical motion in the Z axis is not possible Each pair of actuators i e each tilt axis is assigned to one E 802 55 servo control module to one sensor channel and to one amplifier channel To bring both axes in their initial position the output of the third amplifier channel is fixed to 100 V The following assignment is valid for E 616 SS0x Controllers B Tilt axis X Control input X Input Sensor monitor signal oGS MON 1 equals SGS MON X One tenth of internal control voltage V MON X One hundredth of amplifier output voltage V MON 1 Servo control Servo control module 1 Overflow display OFL 1 Zero point adjustment Potentiometer Zero 1 B Tilt axis Y Control input Y Input Sensor monitor signal SGS MON 2 equals SGS MON Y One tenth of internal control voltage V MON Y One hundredth of amplifi
25. deactivated The tip tilt plattorm stops moving After a cooling down period at a hardware temperature of 60 C 140 F the voltage output is reactivated automatically How to avoid overheating B To avoid overheating reduce the ambient temperature Note that the difference in ambient temperature and hardware temperature is about 20 Kelvin 1 Kelvin corresponds to 1 C a temperature difference of 20 Kelvin equals a difference of 36 F B E 616 Sx OEM Controller modules need to be installed with a suitable air circulation area Forced air cooling must be provided to prevent internal heat build up B Place the E 616 bench top controllers in a location with adequate ventilation to prevent internal heat build up Allow at least 10 cm 4 inches clearance from the top and the rear of the unit and 5 cm 2 inches from each side If this is not possible reduce the ambient temperature E 616 PZ219E Release 1 0 3 Page 36 Piezo Nano Positioning PI Customer Service 6 Customer Service Call your PI representative or write to info pi ws please have the following information about your system ready B Product codes and serial numbers of all products in the system B Current firmware version of the controller if present B Version of drivers and or host software if present B Operating system on host PC if present WWW pi ws E 616 PZ219E Release 1 0 3 Page 37 Piezo Nano Positioning PI Old Equipment Disposal 7 O
26. e PI General Command Set GCS driver set available for all newer controllers from PI A further option includes the patented HyperBit technology providing enhanced system resolution Download instructions are in Download of the GCS LabVIEW Driver Set for Analog Controllers p 23 NOTE RANGE OF CONTROL INPUT FOR E 616 8S0 AND E 616 SS0G By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop mode For E 616 880 and E 616 SS0G following control input ranges are valid B X Input Y Input closed loop 0 to 10 V B X Input Y Input open loop 2 to 12 V If you apply voltage exceeding these ranges the overflow LEDs glow NOTE CONTROL INPUT RANGE FOR E 616 S0 AND E 616 S0G With calibration of the tripod controllers E 616 S0x an offset voltage is applied to the piezo actuators to achieve a maximum tip tilt range WWW pi ws E 616 PZ219E Release 1 0 3 Page 20 Starting Operation Piezo Nano Positioning PI By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop mode For E 616 S0 and E 616 S0G following control input ranges are valid Closed loop mode for tilt axes B X Input Y Input 5 to 5 V B Z Offset 3 to 3 V Open loop mode for tilt axes B X Input Y Input 7 to 7 V B Z Offset 3 to 3 V If you apply voltage exceeding these ranges the ove
27. e is 50 Q per channel oGS MON 1 to SGS MON 3 Output impedance is 10 KQ 10 nF E 616 PZ219E Release 1 0 3 Page 22 Starting Operation Piezo Nano Positioning PI Your measurement device may deliver false values if you measure without appropriate input impedance Do not interchange controller whole devices or individual modules and or tip tilt platforms if they are matched and calibrated together Controller and tip tilt platforms that were calibrated together are not exchangeable The serial number of the corresponding tip tilt platform is given on the calibration label of the E 616 The device is factory set to open loop mode Getting Started 1 Connect the ground stud on the rear panel of the bench top device to a Protective Ground Optionally To read the monitor channels connect the Analog Interface sub D connector via the included connector order no 819007423 Respect the corresponding pin assignment see Pin Assignment of Analog Interface Connect the rear SMB inputs OX X Input OY Y Input and with E 616 S0 G Z Z Offset to a suitable power supply for control input range see step 7 Connect the E 616 to the tip tilt platform via the 25 pin sub D Socket on its front panel Connect the DC IN power supply socket rear panel of the E 616 to the included C 663 PS power supply Connect the C 663 PS power supply to line power Permanent glow of the green Power LED indicates that the device is powered
28. er output voltage V MON 2 oervo control Servo control module 2 Overflow display OFL 2 Zero point adjustment Potentiometer Zero 2 The E 616 S0x Controller The E 616 S0 controller module and the E 616 S0G bench top controller are designed for open loop and closed loop control of the S 325 series tip tilt plattorms These tip tilt plattorms are driven by three piezo actuators arranged symmetrically around the center point of the mirror platform The E 616 PZ219E Release 1 0 3 Page 33 System Description Piezo Nano Positioning PI WWW pi ws controller features two servo control modules for both tip tilt axes as well as one sensor channel and one amplifier channel for each of the three actuators The combination of this controller version with an S 325 tip tilt platform offers the following advantages compared to systems based on differential drive firstly internal coordinate transformation facilitates direct commanding of angles without any calculation efforts for the user Seconaly a simultaneous vertical motion of the three actuators is possible NOTE Note that the vertical motion commanded by the E 616 Controller for tripod design Z Offset always is in open loop mode independent from the operation mode of the X and Y tilt axes Coordinate Transformation The E 616 S0x Controller is designed to command S 325 series tip tilt platforms based on a tripod design This controller version integrates a circuit performing trans
29. formation of the commanded tilt angles into corresponding linear motion of the individual actuators The three actuators are supplied by corresponding amplifier output voltage A complicated external calculation of the linear motion of the three actuators is omitted Due to the internal transformation unit of E 616 S0 controllers there is no one to one assignment of tilt axes to sensor and amplifier channels Multiple amplifiers and multiple sensors can be involved in the motion of one tilt axis just as one amplifier or one sensor can participate in the motion of more than one tilt axis Therefore the axis related sensor signals SGS MON X SGS MON Y are calculated from the channel related sensor signals SGS MON 1 to SGS MON 3 This is done applying following formulas SGS MON X 0 867 S2 S3 oGS MON Y 1 0 5 82483 where S1 SGS MON 1 sensor signal 1 S2 SGS MON 2 sensor signal 2 S3 SGS MON 3 sensor signal 3 Monitor signals of the amplifier output voltage V MON 1 to V MON 3 are calculated using the output voltage of the axis related servo control modules V MON X V MON Y E 616 PZ219E Release 1 0 3 Page 34 System Description Piezo Nano Positioning PI Calculation is performed using the following formulas V MON 1 0 1 Y V MON 2 0 1 40 867 X 0 5 Y V MON 3 0 1 0 867 X 0 5 Y where X 2 V MON X X Out Y V MON Y Y Out Commanding Vertical Motion With the E 616 S0x vertical mo
30. hysical specifications of the E 616 Bench Top Controller for Piezo Multi Axis Tip Tilt Platforms Conventions The notes and symbols used in this manual have the following meanings N Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death Indicates the presence of high voltage 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The mechanics submodules and the software tools which might be mentioned in this documentation are described in their own manuals Current releases can be downloaded from the PI Website as PDF files htt p www pi ws For updated releases contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introduction 6 IE ep TE 6 12 AqrescHbed RR EE 7 13 ale d e EE 7 E E Oe e RTE 10 15 Optional Accessories for E GIp 12 TO WIM DACKING or P a 12 Starting Operation 14 21 e ee EE EOS 14 22 Frontand Rear Panel Elements cere oot eux ETE 14 221 Front Panel of the E 616 Controller een 14 222 Rear
31. i 2 VMONY Analog Interface 2 412 V 6 Sevot1OFFON 8 Laun 15 9 9 SGS MON X V MON X and V MON Y correspond to the signals X Out and Y Out on the block diagram see Block Diagram of the E 616 SS0x Controller p 43 respectively Block Diagram of the E 616 S0x Controller p 45 V MON 1 to V MON 3 correspond to one hundredth of the output voltage of the amplifiers PA1 to PA3 With E 616 SS0G Controllers for differential drive the following is valid oGS MON 1 equals SGS MON X SGS MON 2 equals SGS MON Y Note SGS MON S is not active here With E 616 S0G Controllers for tripod drive the following is valid SGS MON X corresponds to X In SGS MON Y corresponds to Y In on the block diagram SGS MON 1 to SGS MON 3 represent the the amplified sensor signals measured between strain gauge amplifiers and transformation board E 616 PZ219E Release 1 0 3 Page 49 Piezo Nano Positioning PI Technical Data NOTE Note that sensor channel 3 SGS MON 3 and potentiometer Zero 3 are deactivated with the E 616 Controller based on differential drive NOTE Selection of Open Loop and Closed Loop Mode Servo OFF ON Pins By default E 616 Controllers are set to closed loop mode by an internal DIP switch Selection of open loop mode requires to open the device see section Open Loop and Closed Loop Operation p 17 When DIP switches 1 and 2 are in OFF position then servo control can be ac
32. kHz signal Amplifier bandwidth large See frequency diagram signal Ripple noise 0 to 100 kHz 20 mVpp 2 mVrms Amplifier resolution lt 1 mV E 616 PZ219E Release 1 0 3 PI Positioning E 616 SSOG Controller for piezo tip tilt mirror systems with strain gauge sensors differential drive 2 P analog notch filter SGS 2 200 kHz TTL 2 V to 12 V 30 V to 130 V 3 10 W 5W 100 mA 50 mA Short circuit proof 10 3 kHz See frequency diagram lt 20 mVpp lt 2 mVrms lt 1 mV Page 39 Technical Data Interfaces and operation Piezo sensor connector Analog input Sensor monitor output Sensor monitor socket Display Miscellaneous Operating temperature range Overheat protection Dimensions Mass Operating voltage Power consumption Piezo Nano 25 pin sub D connector 3 x SMB 0 to 10 V for nominal displacement 15 pin sub D connector LEDs for Power and Overflow 5 C to 50 C Max 75 C deactivation of the piezo voltage output 205 mm x 105 mm x 54 1 mm without feet 1200 g 23 V to 26 V DC 30 W Positioning PI 25 pin sub D connector 2x SMB 0 to 410 V for nominal displacement 15 pin sub D connector LEDs for Power and Overflow 5 C to 50 C Max 75 C deactivation of the piezo voltage output 205 mm x 105 mm x 54 1 mm without feet 1200 g 23 V to 26 V DC 30 W 82 Rating Maximum operating frequency without Maxi
33. ld Equipment Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old Pl equipment that was first put into circulation after 18 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany WWW pi ws E 616 PZ219E Release 1 0 3 Page 38 Technical Data 8 8 1 WWW pi ws Piezo Nano Technical Data Specifications E 616 S0G Function Controller for piezo tip tilt mirror systems with strain gauge sensors tripod drive Tilt axes 2 Sensor Servo characteristics P I analog notch filter Sensor type SGS Sensor channels 3 Ext synchronization 200 kHz TTL Amplifier Control input voltage range X Y tilt axes 7 V to 7 V Z Offset 3 V to 3 V Output voltage range 30 V to 130 V Amplifier channels 3 Peak output power per 10 W channel Average output power per 5W channel Peak current 100 mA Average current per 50 mA channel Current limitation Short circuit proof Voltage gain X Y tilt axes 10 Z Offset 20 Amplifier bandwidth small 3
34. mum power consumption Maximum operating voltage Barrel 24 V DC 30 W connector WWW pi ws E 616 PZ219E Release 1 0 3 Page 40 Nano Positioning Piezo Technical Data Frequency Response Diagram IS 5 tant to ensure that the amplitude of higher frequency control f the output waveform reduced in proportion to the fall off of the output voltage at these lon O distort In order to achieve minimum IS Input frequency witha ing t idual operating ion on maximum opera impor frequencies For exact informat t graphs Imi IV load capacitance refer to the ind o O O D S oO D i c o o o amp DH r r r r r H r H r A ENN G S S a r r F r F r r r r F r F r F r r F r F r r r F r F r r F r r J r r F r F r F r F r f F f F F F F f F F r F F f F f F F F F f f F F f F f F f F F J F F F F F F F f F f r H r r r r r r r r H r r f H r r r F r r r r H r H H r r J r r H r r H r H r r f F F F F r F f F F r r F f F r F r r F f r F F r F r F r F r J F r f F r F F r r F r T H H r H F Lk H H J H H H H T H F H H H SS SS eS ae ee s a A F r r r r r H H 10 r F r r r r r r F r r F r
35. nsport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging Dynamic calibration is necessary when the response time of the actuators has increased in case of overshoot or when the mechanics starts oscillating A change of applied load is the cause most often Dynamic calibration adjusts servo parameters as P term l Term and the notch filter frequency of the integrated E 802 55 servo control modules To adjust servo control parameters proceed as follows 1 Disconnect the device from power supply 2 Openthe device see Figure 7 3 Tune the corresponding potentiometers see Figure 8 Read Section 3 2 Equipment Needed for Calibration and Section 4 Dynamic Calibration in the servo control module User Manual PZ150E for more details E 616 PZ219E Release 1 0 3 Page 31 Calibration Piezo Nano Positioning PI Figure 7 The top cover of the case is removed via the six labeled and two rear cross head screws Servo control module 1 for tilt axis OX module 2 for tilt axisOY RICK Figure 8 Potentiometer assignment of E 802 55 servo control modules for adjustment of control parameters Assignment of function to potentiometer P1 olew Rate Limitation P2 Loop Gain P Term P3 Integration Time Constant I Term P4 Notch Frequency P5 is factory set for internal use is not to be changed P6 is factory set for internal use is not to be change
36. ommanding a vertical motion Apply an input signal with a voltage range from 3 V to 3 V to Z Offset SMB socket Z 3 X Apply a control input voltage of 0 V to Z Offset 4 Apply a control input voltage of 0 V to OX und OY to set the platform back to its initial position 5 Adjust the Zero potentiometer corresponding to the chosen SGS MON channel until you obtain approximately 5 V as SGS MON signal repeat this procedure for each of the three SGS MON channels The OFL LEDs no longer glow if you change to closed loop mode WWW pi ws E 616 PZ219E Release 1 0 3 Page 30 Calibration Piezo Nano Positioning PI 32 Servo Controller Dynamic Calibration WWW pi ws Procedures which require opening the case should be carried out by authorized qualified personnel only Disconnect the E 616 from power when opening the case and when resetting internal switches or jumpers When the E 616 must be operated with the case open voltages of up to 130 V can be exposed Do not touch internal conductors CAUTION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe tra
37. ostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging E 616 PZ219E Release 1 0 3 Page 8 Introduction Piezo Nano Positioning PI CAUTION AIR CIRCULATION Provide for sufficient ventilation Insufficient air flow will cause overheating and premature failure For detailed information on overheat protection see Troubleshooting p 36 second section CAUTION RESONANT FREQUENCY Most piezo actuators that can be connected to the E 616 can be destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately and follow the instructions in section Dynamic Calibration p 31 CAUTION CALIBRATION If you inform PI about your application your E 616 will be fully calibrated before being shipped Tip tilt platform and controller are matched and calibrated together Do not interchange controller whole devices or individual modules and or tip tilt platforms
38. remature failure For detailed information on overheat protection see Troubleshooting p 36 second section CAUTION RESONANT FREQUENCY Most piezo actuators that can be connected to the E 616 can be destroyed by uncontrolled oscillation near the mechanical resonant frequency If you observe resonance while configuring your system switch off power to the actuators concerned immediately and follow the instructions in section Dynamic Calibration p 31 CAUTION SYSTEM ASSIGNMENT Connect only a matching tip tilt plattorm to the corresponding E 616 Controller version tip tilt platforms such as S 325 3SD tripod design to E 616 S0x SD versions of S 330 series or S 334 tip tilt platforms differential design to E 616 9S0x CAUTION V MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector V MON X pin 1 V MON Y pin 2 and V MON 1 to V MON 3 pins 3 4 5 V MON X V MON Y Output impedance is 11 KQ per channel V MON 1 to V MON 3 Output impedance is 1 KQ per channel Your measurement device may get damaged if you measure without appropriate input impedance CAUTION SGS MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector SGS MON X pin 9 SGS MON Y pin 10 and SGS MON 1 to SGS MON 3 pins 11 12 13 oGS MON X SGS MON Y Output impedanc
39. rflow LEDs glow 25 Initial Operation DANGER HIGH VOLTAGE E 616 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Working with these devices requires adequately trained and educated operating personnel Follow general accident prevention rules B Do not touch the pins of the sub D connector which carry the piezo output voltage and the sensor signals The high voltage output may be active whenever the controller is turned on Voltages between 30 V and 130 V can be present on the sub D connector m Because grounding is not assured over the power connection the ground stud on the rear panel must be connected to a Protective Ground CAUTION The product described is an ESD sensitive electrostatic discharge sensitive device Observe all precautions against static charge buildup before handling these devices Avoid touching circuit components pins and PCB traces Discharge any static charge you may have on your body by briefly touching a conductive grounded object before you touch any electronic assembly Pose PCBs only on conductive surfaces such as ESD safe transport WWW pi Ws E 616 PZ219E Release 1 0 3 Page 21 Piezo Nano Positioning PI containers envelopes foam Electronic subassemblies must always be kept and transported shipped in conductive packaging CAUTION AIR CIRCULATION Provide for sufficient ventilation Insufficient air flow will cause overheating and p
40. s follows SGS MON X 0 867 S2 S3 SGS MON Y S1 0 5 S283 where S1 SGS MON 1 sensor signal 1 S2 SGS MON 2 sensor signal 2 S3 SGS MON 3 sensor signal 3 E 616 PZ219E Release 1 0 3 Page 26 Calibration Piezo Nano Positioning PI 3 Calibration 3 1 Zero Point Adjustment NOTE Zero Point Adjustment Only in Case of Overflow Performing a zero point adjustment is only required when at least one of the overflow LEDs OFL1 OFL2 glows A proper zero point adjustment is precondition for complete expansion of the piezo actuators over the maximum tilt range Performing zero point adjustment avoids exceeding the possible amplifier output range Thus an overflow of the amplifier is prevented Variation of temperature between calibration and operation of the controller may require a zero point adjustment The green overflow LEDs on the front panel indicate whether a zero point adjustment must be performed To adjust the zero point use the three Zero 1 to Zero 3 potentiometers on the front panel see Figure 6 below These potentiometers shift the sensor output signal SGS MON and in closed loop mode also the servo control output V MON X V MON Y and the amplifier output V MON 1 V MON 2 and with E 616 S0G V MON 3 With the E 616 SS0G Controller for tip tilt platforms based on differential drive potentiometer Zero 3 is deactivated since there is no third sensor channel sg PI PZT amp Sensor k
41. stabilization Average output power is 5 W All multi axis piezo tip tilt mirrors of Pl are designed as parallel kinematics all actuators affect the same movable platform Two orthogonal rotation axes share a common pivot point For position controlled S 330 xSD or S 334 2SD tip tilt mirrors the differential evaluation of two sensors per axis provides an improved linearity and resolution E 616 Controllers together with tip tilt platforms from PI make an ideally matched system and are available in two versions B E 616 S0G bench top controller for tip tilt platforms based on tripod design e g 9 325 the platform is equipped with three piezo actuators spaced at 120 intervals BH E 616 SS0G bench top controller for tip tilt platforms based on differential design e g 9 330 or S 334 four actuators operate in push pull mode Internal Coordinate Transformation Simplifies Control of Parallel Kinematics Designs Parallel kinematics requires the transformation of the commanded tilt angles into the corresponding linear motion of the individual actuators In the E 616 S0G this is taken care of by an integrated circuit for the S 325 tip tilt plattorms featuring three actuators eliminating the need of additional external hardware or software Additionally with the E 616 S0G all actuators can be commanded by an offset voltage simultaneously As a result a vertical motion for example for optical path tuning is obtained WWW pi ws E 616 PZ219E
42. ta Piezo Nano Positioning PI NOTE RANGE OF CONTROL INPUT FOR E 616 8S0 AND E 616 SS0G By default E 616 Controllers are preset for closed loop mode There are different ranges of control input for closed loop and for open loop mode For E 616 880 and E 616 SS0G following control input ranges are valid B X Input Y Input closed loop 0 to 10 V B X Input Y Input open loop 2 to 12 V If you apply voltage exceeding these ranges the overflow LEDs glow The amplifier output voltage ranges from 30 V to 130 V WWW pi ws E 616 PZ219E Release 1 0 3 Page 44 PI Piezo Nano Positioning Technical Data Block Diagram for E 616 S0x 85 The block diagram shows the structure of the tripod E 616 S0x Controller s at a i tid T5808 uno E mg si rd Cu e y ce be F3 E pug Na C fu 9 nao NO 1J0 T OR e MOO 1 OA o E NOSI 6 i NOS 0 T NOl 9 amp 9 A HOH amp amp e X N E E n o WOH D e6 I Wun A Mi e i HOl n Amm p abre umg abe ueg t induy 4osue5 UGLIFE AD SUF Al H23 X 18 41U09 d Figure 11 Block diagram of the E 616 S0x Controller for S 325 3SD tip tilt UO TLE BAO fSUe Al OS 919 3 platforms Page 45 E 616 PZ219E Release 1 0 3 WWW pi Wws Technical Data Piezo Nano Positioning PI V MON X represents the servo control output
43. tion can be commanded using Z Offset irrespective of the current operating mode of the tilt axes Note that tilt angle and vertical motion are interdependent Values for nominal tilt motion respectively for nominal vertical motion in the data table of the tripod tip tilt platforms User Manual PZ148E for S 325 series tip tilt platforms refer to pure nominal tilt motion respectively to pure nominal vertical motion To calculate the actual possible tip tilt motion and vertical motion read section 5 Working Principle of User Manual PZ148E for S 325 tip tilt mirrors Note the maximum control input for Z Offset ranges from 3 V to 3 V without any additional tip tilt motion Z Offset input is multiplied by a gain of 20 WWW pi ws E 616 PZ219E Release 1 0 3 Page 35 Troubleshooting Piezo Nano Positioning PI 3 WWW pi ws Troubleshooting Positioner does not move Cables not connected properly B Check the connecting cables Check whether the allowable control input range was met B E 616 5S0 E 616 SS0G X Input Y Input closed loop O to 10 V X Input Y Input open loop 2 to 12 V B E 616 S50 E 616 S0G Closed loop mode of tilt axes X Input Y Input 5 to 5 V Z Offset 3 to 3 V Open loop mode of tilt axes X Input Y Input 7 to 7 V Z Offset 3 to 3 V The E 616 amplifier output channel is deactivated If the internal temperature goes out of range 75 C 167 F the voltage output will be
44. tivated deactivated externally by commanding pin 6 of the rear Analog Interface sub D connector Servo 1 OFF ON for tilt axis X and pin 7 Servo 2 OFF ON for tilt axis Y For example setting pin 6 to HIGH results in open loop mode of tilt axis X setting this pin to LOW results in closed loop mode WWW pi ws E 616 PZ219E Release 1 0 3 Page 50
45. when they are calibrated together Respect the assignment of the tip tilt platforms to the controllers as indicated by the serial numbers on the labels affixed to the devices Re calibration should only be done by adequate trained personnel and after consultation with Pl Otherwise preset data will be lost Only if an overflow LED OFL1 OFL2 glows a zero point adjustment will be necessary CAUTION SYSTEM ASSIGNMENT Connect only a matching tip tilt plattorm to the corresponding E 616 Controller version tip tilt platforms such as S 325 3SD tripod design to E 616 S0x SD versions of S 330 series or S 334 tip tilt platforms differential design to E 616 SS0x CAUTION V MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector V MON X pin 1 V MON Y pin 2 and V MON 1 to V MON 3 pins 3 4 5 V MON X V MON Y Output impedance is 11 KQ per channel V MON 1 to V MON 3 Output impedance is 1 KQ per channel Your measurement device may get damaged if you measure without appropriate input impedance WWW pi ws E 616 PZ219E Release 1 0 3 Page 9 Introduction Piezo Nano Positioning PI CAUTION SGS MON MEASUREMENT Be sure to use a suitable input impedance when you measure the following monitor voltages on the Analog Interface connector SGS MON X pin 9 SGS MON Y pin 10 and SGS MON 1 to SGS MON 3 pins 11 12 13 oGS MON X SGS M
46. zo Nano Positioning PI Where Pa average power W Pmax peak power W C piezo actuator capacitance Farad As v f operating frequency HZ Umax nominal voltage of the amplifier V Up p peak to peak drive voltage V E 616 PZ219E Release 1 0 3 Page 42 Piezo Nano Positioning PI Technical Data 84 Block Diagram for E 616 SS0x The block diagram shows the structure of an E 616 SS0x Controller for tip tilt mirrors with differential drive Tip Tilt Mirror Stage Fix 188U i 41 SH o ey lero mdi rho Pe FI ke D E c LU Va Santer X w z 8 wo 5 Li I sc A S MI 4 a z l 5 I E E 1 pou E i I ke i SE S D 55 ez xk E ci Ina 5 d x F H g H 13 zz Ji 7 Kee X o ee D D EK EK in ks A e pp SS Ss sg OG un eo t 5 EF ge E ES SE E oa e e D vo o 8 OQ OD OD Fk E k BD a Bil g TFT EREESER EGE ES s i M o 2 m ep ut an m SSsezs EN AU DD 7 co Se EIE a utm us VK d CN 4 kb d gh l i i 2 z i A am Uu i E I Li Ch c oc ug j Figure 10 Block diagram of the E 616 SS0x Controller for tip tilt platforms of S 330 and S 334 series V MON X represents the servo control output X Out whereas V MON Y represents the servo control output Y Out SGS MON X represents X In SGS MON Y represents Y In WWW pi Wws E 616 PZ219E Release 1 0 3 Page 43 Technical Da

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