CONTROLweb 3u Modular I/O User Manual
Contents
1. sna esa ses sess 19 4 1 I O USER INTERFACE 20 4 2 COMMUNICATION PORT IRIS RT 20 4 3 MODULE CONFIGURATION escas uiu seers MI 22 TO Moabu TOP Data MAINO UNUM nS 22 etw Ue __ ____ 23 B MODBUS TCP INTERFACE unus 24 6 TOOLWEB 25 6 1 peoem i8zc zie eI 25 6 1 1 iee RRRC 25 OU 25 ERECEEER CR eoi CERE 26 61 4 Data Collection Flan 27 CNO ADDO sass rE E E E TAE O EEEO E EON TEE EO EN EA 27 Downoad Dala to Local PE EEES EN E Nai 28 6 2 TOOLWEB TOOLSIDE INTERFACE ME RUM ME DIS 29 APPENDIX A CONTROLWEB SPECIFICATIONS 30 APPENDIX B INTERLOCK CARD MAPPING u 0 cccceccecesceccscesceccscescnscnccecesensenceceseucesensenseeeesensenseeensensensensss 31 NY ricis Rh deem daceesccecennecs 322. RR SR RR Ress RR Rara Oa 4 1 1 OFERA TION 5 1 2 CONTROLWEB SU ARCHITECTURE 6 2 JINSTALLATION S SETUP A 8 2 1 CONTROLWEB INTERFACE DESCRIPTION ccccccccssssececeeeeccccccccccccccussssstesseececcccceccccecauauusstseceeeeeececcececeeeeauaeaaeeeeees 8 2 2 MECHANICAL INSTALLATION cccccccseeeeecccccccccccececccccccaasseeeccccccuascesecccccccuuaceeecccccsuuaseeecesecsuuseeeecesecauaaeeeeecesccuaaaceeecess 9 2 3 ELECTRICAL INSTALLATION secncecsesncoanaie usui e en etn aea eas duros 10 ZR MEN ado c M 10 QU 10 Lg CONT POM UON 13 2 3 4 Ethernet 616 111 6 13 2 4 NETCOM CARD cccccccccccccesececcccccccsseeccccccensstseecccccccausteeeccececsauseseeccccecuauscececcecuauseeecececeuauueeecececeuaauceeecececuaauateececs 14 2 4 1 IP Address Rotary 5 15 2 4 2 Operation Mode Rotary 5 15 24 4 LEDS ee eee LE I 16 3 e Eig 17 4 CONTROLWEB USER
3. 3 of 32 MKS Instruments CIT Products 2004 All rights reserved emks CONTROLweb User Manual O Z oZ Z 1 General Information CONTROLweb is a system for providing high density networked I O in standard 4U or customer specific modules Each system consists of the following components e NetCom card O cards o Digital o Analog o Interlock e Card cage with rear and or side signal distribution Each node communicates to a master using Modbus TCP protocol Setup and data is also available through standard web browser and through the TOOLweb ToolSide Interface XML over HTTP 4 of 32 MKS Instruments CIT Products 2004 All rights reserved h V 01 TO ducti TV CONTROLweb User Manual 1 1 Theory of Operation A CONTROLweb unit operates mainly as Ethernet controlled remote I O addition several features have been added which extend its functionality to provide a unique distributed control architecture and independent monitoring for Fault Detection and Correlation FDC Each of these functions falls under two main technology categories CONTROLweb features e Modbus TCP slave I O e Distributed logic and peer to peer control future e diagnostics and manual control Note CONTROLweb data is related to raw physical entities All scaling and logical assignment exists in the module controller which hosts the Modbus TCP master TOOLweb features e Up to 64 variables for offl
4. SIGCOMM 15COMM AI 24 SIGCOMM AI 25 AI 18 15V AI 19 15V 15COMM SIGCOMM 15COMM AI 26 SIGCOMM AI 27 AI 20 15V AI 21 15V 15COMM 4 F14 2 n CJ1 14A J22 F142 WT12 CJ1 15C J2 23 4 F15 2 W11 2 CJ1 15D J2 26 UU 15 2 W11 2 CJ1 15E J2 29 VV 1AL F15 2 W11 2 CJ1 16A J2 32 Y F15 2 1 2 CJ1 16B J2 35 14 2 Y n W11 2 CJ1 16C J2 38 F14 2 VV l F25 2 Y CJ2 13E W22 2 CJ2 11D J4 23 F26 2 CJ2 12D J4 6 Wiel CJ2 17A W22 2 CJ2 10A J4 29 F26 2 CJ2 11A J4 12 y CJ2 17A W22 2 CJ2 10C J4 35 CJ2 13D 100 4 36 CJ2 11C J4 18 F25 2 Y NODE NAME PIN NAME P PIN NAME L emks Technology for Productivity PIN NAME NODE M ET xc iiu AQ F15 2 424V WTI 2 24COMM 41 CJI 16D J2 41 _ DI O 37 F16 2 24V 4 W11 2 24COMM CJT 19A J2 62 DI O 44 2 4249 WTT 2 24COMM CJI 16E J2 44 01 0 38 F F16 2 24V 4 W11 2 24COMM CJT 19B J2 65 DI O 45 AC 2 4247 WTT 2 24COMM 4 T8A J2 4 DI O 39 F16 2 24V AR W11 2 24COMM CJ1 19C J2 68 DI O 46 5 2 _ 424V 711 2 24COMM CJT TBB J2 50 DI O 40 7 F16 2 24V W11 2 24COMM CJI 19D J2 71 DI O 47 O 24V WTT 2 24COMM CJ1 18C J2 53 DI O 41 WTTZ 4coM gt gt 15 KEY ES F16 2 424V 5 KEY fb CJ1 18D J2 56 DI O 42 7 WTTZ acom gt gt 15 2162 424V gt gt 15 OMM CJ1 18E J2 59 D DI O 43
5. Ensure proper ventilation of cage Air flow moves from bottom fan tray to top perforated cover Keep at least 1 open on top and bottom of the cage For thermal verification running temperature of cards can be monitored from the web based interface PHI IBEX E 7 See Gra pr m qp AD So JI A E 25 Ee EC EE 20065 aC i XD Ie a PTS C I aC 196 90 101 60 Ds 3 90 7 DC 21 DD XD m 2030 B06 One POER HEE HEEE HELE EEE e e ieee Poo E fl z NEE UU E 9 of 32 MKS Instruments CIT Products 2004 All rights reserved no gy 1 Jl ro ducti TV CONTROLweb User Manual 2 3 Electrical Installation 2 3 1 Power Wiring Power connector provides inputs for 24 15 15 VDC Cage Connector AMP Mate n Lok 194018 1 Mating Connector Mate n Lok 770016 1 Pins AMP Socket 770251 3 Power Connector Pinout Pin Description _ 24V IN 24V COMM 15V IN 15V COMM 15V IN 2 3 2 I O Wiring Each I O card slot is assigned to 2 rear signal distribution connectors Use the below pinouts in conjunction with the manual for each I O card which designates the electrical specifications for that card Cage Connector AMP 748831 1 Mating Connector 10 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual SIGNAL NAME NODE NAME BUSS NAME 15V
6. O Ps Whee 5 ME Nz Google Mhsexchweh Cm Eh needed E i opens t Phot Collection Flan OP emm RICE nu Dunt on Toomet FF Cheek all B E g 1 acr ih J 4 upp arai Pause Last data 07 2005 4 593717 958 2 005 nm 11 457 Copyright C 158955 7007 M amp S Insiniment CIT Products HETCIHA 111719 manda 8 com img T4 1 UTC AE 6 1 6 Download Data to Local PC Collection plan data can also be downloaded in CSV format E3 Microsoft Excel cpdata 1 SEE File Edit Insert Format Tools Data Window Help Adobe PDF question for help B x 4 100 6 f Collection Plan Default CP Period 500 milliseconds E Collection Plan Default Time Seq VID 0 VID 200 VID 201 VID 202 VID 211 VID 212 VID 213 VID 214 VID 222 VID 223 VID 224 VID 225 VID 226 VID 227 VID 228 VID 229 3 57 51 0 11734 5846 0 0 0 02 0 0 004 0 4 88E 05 0 0 0 0 009 0 D 004 0 14 57 51 5 11735 5846 0 0 0 0 004 0 0 004 0 0 004 5 57 52 0 11736 5847 0 004 0 0 02 0 004 0 0 009 57 52 5 11737 5847 0 0 004 0 0 004 0 004 0 7 57 53 0 11738 5848 0 0 0 0 004 8 57 53 5 11739 5848 00 004 0 02 0 9 57 540 11740 5849 0 004 0 02 0 004 10 57 54 5 11741 5849 0 004 0 0 11 57 55 0 11742 5850 0 0
7. CIGNAL NAME PIN NAME NODE NAME l BUSS NAME in CJ2 17B SIGCOMM y en T8B J4 60 AO 11 41 CJ2 10E J4 41 28 G F27 2 15V 49 CJ2 BA J4 42 29 4 5 2 15V gt 15V W22 2 15COMM CJZ37D sicco 15 4 W22 2 15COMM cs CJ2 18C J4 65 12 GE T8D J4 66 AO 13 BB J4 47 AI 30 F272 415V AB CJ2 BC J4 48 31 49 Z 35V gt gt 15 W22 2 15COMM CJZ 37E EIGGOMM gt gt 15 W22 2 15COMM CJ2 18E J4 71 14 z SIGCOMM CJ2 16A J4 72 AO 15 190 34 53 AO 8 4 CJ2 19E J4 54 9 gt gt 24 ES iis F27 2 415V 24V 5 15V S KBY W22 2 15COMM 2 CJ2 17C _ SIGCOMM CJ2 T8A J4 59 10 11 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual Technology for Productivity Interlock Signals Slot 3 SIGNAL NAME PIN NAME SIGNAL NAME SIGNAL NAME PIN NAME SIGNAL NAME l NODE NAME 4 PIN NODE NAME HEE Y NODE NAME ha PIN NODE NAME lum QU ot 1 1 QU Y Di IN1 CJ3 20A J5 1 W32 2 24COMM IN 13 CJ3 18C J6 1 27 W32 2 24COMM IN 11 CJ3 18A J521 cy c W32 2 24COMM IN 23 CJ3 15C J621 cy cL Bn W32 2 24COMM 24COMM W32 120 UNC 9 24COMM W32 Ce 41 CJ3 7D J6 41 UNC 29 24COMM W32 Cy 61 CJ3 10D J5 61 UNC 19 24COMM W32 81 CJ3 5D J6 61 UNC 39 IN 2 C J3 20D J5 IN 14 18D Jb A IN 12 CJ3 18B J5 23 9 9 amp IN 24 CJ3 15D J6 23 cm 2 24COMM W322 o
8. CJ4 12E J7 43 UNC 45 24COMM W42 2 lao 43 CJd 7E J8 43 UNC 65 24COMM W42 2 cuz CJA 10E J7 53 UNC 55 24COMM W42 2 4 63 6 63 N C IN 27 CJ4 20C J7 n W42 2 24COMM IN 39 1 T8E J8 me W42 2 24COMM N C T4A J7 e Gs W42 2 24COMM UNC 56 e cL W42 2 24COMM 24COMM W42 Lee 45 CJA 11A J7 45 46 24COMM WAZ 45 45 UNC 66 24COMM W42 2 lt Cy cy 65 7 65 24COMM W422 CJ4 13A J8 65 IN 28 CJ4 20D J7 7 T IN 40 8 7 AC CJ 4B J7 27 O 4 98 7 56 D gt 24V UNC 57 CJ4 8B J8 27 9 5 CJ4 T38 J6 56 D gt 24 24COMM W42 ala A 47 7 47 UNC 47 24COMM WAZ 676 47 CJ4 bB J8 47 UNC 67 24COMM 42 Cy 67 C4 8C J7 87 24COMM WAZ 5 6 IN 29 TESS o c n W42 2 24COMM N C 766 789 9 4 in W42 2 24COMM N C CJ4 14C J7 29 Cy cy CJ4 8D J7 68 UNC 58 CJ4 8C J8 29 20 6 4 136 8 68 24COMM 742 2 E Las io 49 CJ4 11C J7 49 UNC 48 24COMM W42 2 imt CJ4 6C J8 49 UNC 68 24COMM W422 24 W42 2 7 IN 30 CJA TUA J7 04 dui B B 424V wooo D gt gt 24V 2 24 N C CJ4 T4D ex Lan KEY UNC 59 BD J8 umi ET ker 24COMM WAZ C CJ4 11D J7 51 UNC 49 24COMM WAZ CJa 8D J8 51 UNC 69 24COMM W42 2 e 24COMM 42 0 eol KEY IN 31 CJ4 19B J7 13 W42 2 24COMM 24V N C CJ4 16D J8 13 te f W42 2 24COMM N C CJ4 14E J7 33 3 0 24V
9. WARRANTY AGAINST INFRINGEMENT OF ANY PATENT 32 of 32 MKS Instruments CIT Products 2004 All rights reserved
10. in Netcom mode 2 or 3 only dynamic http 10 112 0 131 Slot 3 DO 1 32 Microsoft Internet Ex B Slot 3 Discrete Outputs 1 2 3 4 5 6 T 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 12 15 1 http 10 112 0 131 Slot 3 DI 1 Sele Slot 3 Discrete Inputs 7 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 Auto Refresh Internet Internet 4 2 Communication Port Interface Click on a port to establish communication using your local Telnet server Serial Ports SM 111239 Setup 2005 02 24 19 59 08 UTC amp Done Internet 20 of 32 MKS Instruments CIT Products 2004 All rights reserved e mks CONTROLweb User Manual lechnology tor Productivity A serial communication session will be established which allows you to communicate to connected serial devices Te 10 112 0 124 HyperTerminal Ld wem Cal Transfer nep Dg et bed 0 00 04 detect TCPyIF 21 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual Technology for Productivity 4 3 Module Configuration The Configuration tab provides access to all configurable settings for the module This includes Modbus TCP Data Mapping Serial port settings TOOLweb control access TOOLweb l O bindings Changes to configu
11. lt lt 15V lt lt 15V lt lt 15V lt 15V K 15V lt 15V lt lt V PIN 4 1 424V F11 2 24COMM WIT 9 DI O 0 2 24 F112 O 24COMM W11 2 DI O 7 GJ1 6C J1 23 24 24COMM WIT nk DI O 1 ZEJT 24 F122 9 24COMM W11 2 DI O 8 CJT 6D J126 26 24V 24COMM WIT DI O 2 SCE i 24V F122 24COMM WITZ DI O 9 CJi 8E J129 59 24V 1 24COMM WIT DI O 3 24 F122 9 24COMM W11 2 DI O 10 CJI 7A J1 32 9 24V 24COMM WITT DI O 4 BEJT 24 F122 AT 24COMM DI O 11 CJ1 7B J1 35 424V FMZ ar 24COMM WIT DI O 5 EA JT 24V z Q 24COMM WITZ DI O 12 CJ1 7C J1 38 ag 24 11 2 C 24COMM WIT T DI O 6 58 1 20 SIGNAL NAME NODE NAME PIN NAME 15V 15COMM SIGCOMM 15COMM AI 6 SIGCOMM AI 7 AI 0 15V AI 1 15V 15COMM F23 2 CJ2 16C J3 6 W22 CJ2 9C W22 2 CJ2 15E J3 29 160 183 23 2 CJ2 16E J3 l J3 12 D ip CJ2 14B J3 35 CJ2 9B CJ2 15B J3 F22 2 W22 18 PIN NAME PIN NAME 40 D F12 2 WT11 2 CJ1 7D J1 41 F13 2 W11 2 DIDO Signals SIGNAL NAME BUSS NAME l 24V 24COMM DI O 13 24V 24COMM CJ1 10A J1 62 DI O 20 r2 F132 Wi1 2 2 F13 2 W11 2 WTT 2 OU F13 2 W11 2 24V 24COMM DI O 14 24V 24COMM CJ1 10B J1 65 DI O 21 24V 24COMM DI O 15 24V 24COMM C
12. 04 0 02 0 004 12 57 55 5 11743 5850 0 004 0 0 13 57 56 0 11744 5851 0 004 0 02 0 004 14 57 56 5 11745 5851 0 0 02 0 004 15 57 57 0 11746 5852 0 004 0 02 0 004 18 57 57 5 11747 5852 0 004 0 17 57 58 0 11748 5853 0 004 0 18 57 58 5 11749 5853 j 0 004 0 02 19 57 59 0 11750 5854 0 004 0 02 20 57 59 5 11751 5854 0 004 0 02 21 58 00 0 11752 5855 0 0 02 22 58 00 5 11753 5855 0 23 58 01 0 11754 5856 i 24 58 01 5 11755 5856 0 02 25 58 02 0 11756 5857 0 02 26 58 02 5 11757 5857 0 27 58 03 0 11758 5858 0 02 28 58 03 5 11759 5858 0 02 29 58 04 0 11760 5859 0 0 004 30 58 04 5 11761 5859 0 02 0 4 88E 05 31 58 05 0 11762 5860 0 02 0 0 32 58 05 5 11763 5860 0 02 0 0 33 58 06 0 11764 5851 0 0 004 4 88E 05 gt 1 Ready e 0 0 0 0 0 0 0 0 0 0 009 0 004 0 0 009 0 i gt I cOOoococoooococcocococZso e 0 0 0 0 0 4 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 ce e LA goa ccc eg CCC cc 0c 00 28 of 32 MKS Instruments CIT Products 2004 All rights reserved lechnology for Productivity CONTROLweb User Manual 6 2 TOOLweb To
13. 4 All rights reserved emks CONTROLweb User Manual lechnology for Productivity CONTROLweb 3U Functional Architecture 7 of 32 MKS Instruments CIT Products 2004 All rights reserved emks Ta D rf 2 Installation amp Setup The base operation of a CONTROLweb 3U unit is to provide remote slave I O to a control system This section describes electrical installation and software configuration to provide operation of I O 2 1 CONTROLweb Interface Description Installation instructions will be based upon a standard configuration of modules Part Number AS00482 02 Card cage 4U 4 I O Slots CDN491 C E Card DIDO CDN500 x C E Card Interlock Slt 00 Card DIDO 1 Interfaces Interfaces Ethernet Interface Monitor LED indicators Interlock status scrolling Serial Port Monitor Power input DC Ethernet Interface Control Com 1 connectors connectors Com 2 Com 3 Com 4 8 of 32 MKS Instruments CIT Products 2004 All rights reserved emks CONTROLweb User Manual Technology for Productivity 2 2 Mechanical Installation Install all cards into their correct slots Note card cage can be configured for any combination of I O cards Zero ohm resistors are located on the backplane to route the correct power for each type of card Contact an MKS application engineer for details Mount card cage using the 4 front slotted mounting holes
14. CJ9 12E 5 43 UNC 10 24COMM W322 0 37 5 43 UNC 30 24COMM W322 o 5 CJ9 10E J5 63 UNC 20 24COMM W322 6 63 UNC 40 IN 3 20C J5 O O AA W32 2 24COMM IN 15 T8E J6 4 W32 2 24COMM UNC 1 CJ3 14A J5 o o Ls W32 2 24COMM UNC 21 BA J6 o Ls W32 2 24COMM 24COMM W32 C O O CJ3 11A J5 45 UNC 11 24COMM W32 O O A 5A J6 45 UNC 31 24COMM W322 B 07 iow KEY 24COMM W322 OG les CJ5 13A J6 65 CJ320D J57 E IN 16 CJ3 16A J67 AG UNC 2 CJ3 14B J5 27 O D gt 24 UNC 22 CJ3 8B J6 27 5 CIS T3B J6 66 D gt 24 24COMM W32 CJ3 18 5 47 UNC 12 24COMM W32 676 BB J6 47 UNC 32 24COMM X Cj 24COMM WV C KEY IN 5 ZUE J539 An W32 2 24COMM IN 17 T6B J6 3 W32 2 24COMM UNC 3 CJ3 14C J829 59 2 sa CJ3 88 J5 68 UNC 23 CJ3 8C J6 29 oq 24COMM W322 2 CJ3 11C 55 48 UNC 13 24COMM 732 2 D c 28 CJ9 6C J6 49 UNC 24COMM W322 n Cy c CJ3 8C J5 69 24COMM W322 0 69 CJ5 13C J6 69 IN 6 T9A J5 IN 18 T6C J6 UNC 4 CJ3 T4D 9D J5 70 gt gt 24V UNC 24 BD J6 2a ta D J6 70 gt gt 24V 24COMM W32 5 O D UNC 14 24COMM W32 O O CJ3 6D J6 51 UNC 34 24COMM W32 2 24COMM W32 2 CJ3 19B J5 13 O O W32 2 24COMM D gt 24V IN 19 CJ3 16D J6 13 W322 gt gt 24V UNC 5 3 14E J5 33 T 24v UNC 25 CJ3 8
15. E J6 33 24V 24COMM W322 te CJ3 11E J5 53 UNC 15 24COMM W322 CJ3 BE J6 53 UNC 35 i Dn 5 24 m E M MS d gt gt 24V UNC 6 CJ3 12A J5 24COMM UNC 26 l A J6 O QH 24COMM 24COMM W322 Te e CJ3 10A J5 55 UNC 16 24COMM W322 Lone CJ3 5A J6 55 36 24COMM W322 z 24COMM W322 IN 9 CJ3 19D J5 17 O W32 2 24COMM D gt 15V IN 21 CJ3 15A J6 17 TE W322 omm gt gt 19V UNC 7 12D J5 UNC 27 78 6 24COMM 7732 e UNC 17 22 15V 24COMM W3Z E La 5J657 UNC 37 22 15V 24COMM W32 a S 24COMM WZ T IN 10 ESN 50 GOT IN 22 V UNC 8 CJ3 12C J5 39 39 E CRI UNC 28 CJ3 C J6 39 381 24COMM W322 LI CJ3 10C 5 58 UNC 18 24COMM W322 LL o CJ3 5C JE 58 UNC 38 Interlock Signals Slot 4 CIGNAL NAME PIN NAME SIGNAL NAME SIGNAL NAME PIN NAME SIGNAL NAME NODE NAME l PIN NODE NAME gt NODE NAME PIN WODE NAME IN 25 CJ4 20A J7 1 AQ W42 2 24COMM IN 37 CJ4 18C J8 1 AC W42 2 24COMM IN 35 CJ4 18A J7 21 60 W42 2 24COMM N C CJ4 15C J8 21 W42 2 24COMM 24COMM W42 n 41 CJ4 12D J7 41 UNC 44 24COMM W42 ne 41 CJA 7D J8 41 UNC 64 24COMM WAZ O O 51 CJ4 10D J7 61 UNC 54 24COMM W42 4 50 18 61 26 1 20B J7 IN 38 1 18D J8 IN 36 CJ4 18B J7 23 9 9 16 dern N C CJ4 15D J8 23 9 9 Ls 2 ied 24COMM W422 Ela g 43
16. J1 10C J1 68 DI O 22 24V 24COMM DI O 16 24V 24COMM CJ1 10D J1 71 DI O 23 2 VV 24V 24COMM CJ1 8C J1 53 DI O 17 T 5 CJ1 8D J1 56 DI O 18 W11 2 F13 2 W11 2 F13 2 OMM 9 CJ1 8E J1 59 NODE NAME KEY 24COMM KEY 24V gt 15 gt 15 15V 24COMM 24V DI O 19 SIGNAL NAME NODE NAME 24V 24COMM DI O 24 24V 24COMM DI O 31 24V 24COMM DI O 25 24V 24COMM DI O 32 24V 24COMM DI O 26 24V 24COMM DI O 33 24V 24COMM DI O 27 24V 24COMM DI O 34 24V 24COMM DI O 28 24V 24COMM DI O 35 24V 24COMM DI O 29 24V 24COMM DI O 36 24V 24COMM DI O 30 AIAO Signals SIGNAL NAME SIGNAL NAME CJ2 9D STGCOMM 20D J3 60 AO 3 CJ2 14D J3 41 12 F24 2 415V CJ2 14E J3 42 AI 13 up gt 15 W22 2 15COMM CJZ 33A gt gt 19V W22 2 15COMM CJ2 20E J3 65 4 3D sIccomm 366 5 T2A J3 47 14 F24 2 415V CJ2 12B J3 48 15 Zu 22 15 W22 2 15COMM CJ2 13 gt gt 15V W22 2 15COMM CJ2 19B J3 71 AO 6 JE T9C J3 72 7 ZU0A J3 53 AO 0 KEY CJ2 20B J3 54 AO 1 F242 sy 2 24V KEY W22 2 15COMM 15V J2 9E SIGCOMM 2 BUSS NAME BUSS 4 15V lt lt 15V lt lt 15V lt lt 15V lt lt 15V K 15V lt 15V 15V 15COMM SIGCOMM 15COMM AI 22 SIGCOMM AI 23 AI 16 15V AI 17 15V 15COMM
17. S For the period commencing with the date of shipment of this equipment and ending two years later MKS will at its option either repair or replace any part which is defective in materials or workmanship or with respect to the date related operations warranty without charge to the purchaser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS CIT home office in Santa Clara CA This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment MKS shall not be liable under any circumstances for indirect special consequential or incidental damages in connection with or arising out of the sale performance or use of the equipment covered by this warranty THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES EXPRESSED OR IMPLIED INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE AND ANY
18. UNC 60 8 33 KEY 24COMM W422 CJA 11E J7 53 UNC 50 24COMM 42 2 Cy 8 CJ4 6E J8 53 UNC 70 24COMM W42 o6 24COMM 24COMM W42 7 o0 0 24COMM no OH pv 015 1515 TOO o a CO UNC 41 CJ4 12A J7 o 14 ___24COMM UNC 61 8 O O4 74__24COMM li 24COMM W42 2 Eon CJ4 10A J7 55 UNC 51 24COMM 042 2 g CJ4 5A J8 55 24COMM W422 24COMM W422 IN CJ4 19D J7 17 9 rT Wi22 z1coMH gt gt 15V N C CJ4 15A J8 17 9 WIZ2 gt gt 5V UNC 42 CJ4 12B J7 UNC 62 CJ4 7B J8 z 24COMM WAZ 1108 77 57 Nc 52 2 15V 24COMM WAZ I5B J amp 57 n 22 15 24COMM WIZ y c S 24COMM WAZ eol GO GO 0158 8199 SO by aay UNC 43 CJ4 12C J7 39 ac ie ET S 24V UNC 63 CJ4 7C J8 38 ac S 24 24COMM 1142 2 ile a CJ4 10C J7 58 UNC 53 24COMM 42 2 m e CJ4 5C J8 58 N C 12 of 32 MKS Instruments CIT Products 2004 All rights reserved lecnnology Tor Productivity CONTROLweb User Manual 2 3 3 Com Port Configuration There are 4 available serial communication ports Each is s w selectable for RS232 485 Use web browser configuration for all serial port settings Serial COM Connector Pinout C9 0 1uF 50V CHASSIS 2 3 4 Ethernet Connector CONTROLweb 3U contains a single 100BT Ethernet controller and an Ethernet switch The rear connector has highest
19. eemks Technology for Productivity CONTROLweb User Manual Copyright Preface h V 01 TO ducti TV This manual and the software described in it are copyrighted with all rights reserved Under the copyright laws this manual and software may not be copied in whole or part without the prior written consent of MKS Instruments The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all of the materials purchased may be sold given or loaned to another person Under the law copying includes translating into another language or format MKS Instruments CIT Products Group 2003 3350 Scott Blvd Bldg 4 Santa Clara CA 95054 About this manual This manual is designed to serve as a guideline for the installation set up operation and basic maintenance of the CONTROLweb Remote I O Unit The information contained within this manual including product specifications is subject to change without notice Please observe all safety precautions and use appropriate procedures when handling this product and its related software 2 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual echnology Tor Fn Table of Contents 1 GENERAL INFORMATION
20. etails see http www modbus org 24 of 32 MKS Instruments CIT Products 2004 All rights reserved h no V 0 Ti 0 i UC TV CONTROLweb User Manual 6 TOOLweb Interface TOOLweb is a system wide program for enabling and gathering real time data from all parts of a process and providing this data to factory based modules for analysis FDC and APC CONTROLweb modules utilize TOOLweb functionality for the following e Web based tools for data analysis and debug directly from the I O module e time data acquisition using XML over HTTP 6 1 TOOLweb User Interface TOOLweb functions are accessed and configured through the web browser interface Users must determine the I O points of interest those usually referred to as Key Process Variables Once these variables are named and scaled they are available for data collection and analysis 6 1 1 Control Access Create the allowed permissions to process data ToolWeb Write Access Control Access Control Any Controller Allowed he Designated controller 0000 IP Address Your IP Address 10 112 0 103 1188 CONFIGURATION ACCESS DENIED 6 1 2 I O Bindings Select the I O points which will be available for TOOLweb functions Each point is selected given a description and scaled to meaningful process units The list can be 1 64 variables 25 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual Technology for P
21. he manuals for CDN497 and CDN498 The table below shows a summary of resources for a complete dual slot interlock card CDN500 x Interlock Card Resources Rout DPDT Uncomitted Pins on J2 connector CDN497 8 sourcing 1 8 24 with readback CDN498 24 sinking 9 32 16 with readback Oo S OO TOTAL Input Map DIO 1 8 CDN497 Rin 1 24 CDN497 DIO 9 32 CDN498 Rin 1 16 CDN498 Output Map Output Location DIO 1 8 CDN497 DIO 9 32 CDN498 31 of 32 MKS Instruments CIT Products 2004 All rights reserved lechnology for Productivity CONTROLweb User Manual WARRANTY MKS Instruments Inc MKS warrants that for two years from the date of shipment the equipment described above the equipment manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date related operations including without limitation accepting data entry sequencing sorting comparing and reporting regardless of the date the operation is performed or the date involved in the operation provided that if the equipment exchanges data or is otherwise used with equipment software or other products of others such products of others themselves correctly perform all date related operations and store and transmit dates and date related data in a format compatible with MKS equipment THIS WARRANTY IS MKS SOLE WARRANTY CONCERNING DATE RELATED OPERATION
22. he first three numbers equal those of the IP address and the last equals to 1 in the above example the gateway will be set to 192 168 3 1 NOTE Some combinations of the rotary switch settings may yield to illegal IP address setting e g addresses reserved to local broadcast addresses Such combination should be avoided For example 192 168 0 255 is a reserved address hence the setting of 255 on the rotary switches must be avoided 2 4 2 Operation Mode Rotary Switch All even mode numbers enable the three IP address switches and allow them to override the current non volatile memory settings All odd mode values lead to using the non volatile memory setting instead of the switches Mode 0 1 Normal Production Operation Mode Diagnostics disabled Network Watch Dog Enabled Mode 2 3 Field diagnostic mode Normal operation with Watch Dog Diagnostics disabled Mode 4 5 Not Defined Mode 6 7 Not Defined Mode 8 9 Manual Configuration mode When the Mode switch is set to 9 and the IP address switches are set to 000 the factory configuration parameters serial number Ethernet hardware address can be changed 15 of 32 MKS Instruments CIT Products 2004 All rights reserved lecnnology Tor Productivity CONTROLweb User Manual 2 4 3 Indicator LEDs LOCAL STATUS LOC Off Power Off oteady Green Not Used Blinking Green Normal Operation Green Amber Local Auto Configuration in progress Solid Amber Soft
23. ine and real time data collection Logical names and scaling of selected input points Collection plans with selectable frequency Web browser based data plots and download to local host XML real time data streaming for FDC APC applications Note TOOLweb data is logical with all scaling and identification residing the I O module 5 of 32 MKS Instruments CIT Products 2004 All rights reserved lechnology for Productivity CONTROLweb User Manual 1 2 CONTROLweb 3U Architecture The 3U architecture provides a modular approach for creating high density modules of I O with combinations of DIDO AIAO Serial and Interlock A card cage hosts these 3U Eurocards and provides rear and or side signal distribution using standard or customer specific connection points Netcom card is the main processing card e Motorola Coldfire 32 bit processor e Ethernet connectivity and Ethernet switch 4UART s with s w selectable RS232 485 functionality e Internal CAN bus controller for plug and play I O Cards CDNA491 C E Digital Card o 48 in out points o Each point in out o 24V active low CDN496 C E Analog I O Card 32 analog in 16 analog out o 12 bit single ended e 0 497 Part of CDN500 x C E o Interlock Card dual slot o 36 68 Relays o 8 32 DIDO CONTROLweb 3U Physical Architecture Diagnostic RS232 Front Front side Ethernet 4 x RS485 Back 6 of 32 MKS Instruments CIT Products 200
24. net Explorer versions less than 5 5 may not function as expected Note cn due to limitations of the browser The main page of the CONTROL web unit shows a top view of the module This is referenced as the Device tab O cards installed are shown in the center of the page e Netcom CPU status is shown on the right side of the page dynamic e Bottom toolbar shows module main clock and status dynamic CONTROLweb 1 0 Rack Microsoft Internet Explorer File Edit View Favorites Tools Help aw QJ 2 p Search Sf Favorites rel e 24 Address 48 http 10 112 0 124 Google mks a Go Links je search Web gf PageRank E 18 blocked 1 1 Ea Options A Configuration TOOLweb 1 0 Cards Installed Controller Model Version Serial Operating Mode IP Switch Modbus Connects Avg Ops sec Port Protocol Status Client IP Bytex Tx Rx URL SH 111239 Slot 3 Model jon 1 030184 WA EE DENIED EE opo oro oro 40002 10003 10094 2005 02 24 19 59 08 UTC Internet 19 of 32 MKS Instruments CIT Products 2004 All rights reserved smks echnology for Productivity 4 1 User Interface By selecting I O of interest from the main page a pop up will appear for each section of I O e Inputs can be read dynamic e Outputs can be set manually
25. olside Interface TOOLweb interface is relevant when a SenseLink is connected to a BlueBox in a Semiconductor process tool APC and e diagnostic system The following messages are supported via the TOOLweb ToolSide Interface The names and units as exposed in the CapabilitesResponse are the same as defined in the channel configuration Reference the BlueBox Manual for additional details on operating SenseLink with BlueBox 29 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual h V 01 TO ducti TV Appendix A CONTROLweb SPECIFICATIONS Processor CPU Memory Flash Communications Ethernet Port Ethernet Switch RS232 Port RS232 485 Ports General Power Supply Power Consumption Operating Temperature Storage Temperature CE 32 bit Motorola Coldfire 8MB SDRAM 2MB 100BaseT RJ45 connector with EMI filter LED indicators 100BT TXD RXD RTS CTS signals DB9 connector S W selectable RS232 TXD RXD or RS485 Serial Baud Rates 300bps to 115Kbps 38 4Kbps maximum with all 3 ports operating continuously 18VDC to 28VDC 10W minimum I O card requirements OC to 50C 20C to 85C pending 30 of 32 MKS Instruments CIT Products 2004 All rights reserved lect 10 1 T Togu ti hu CONTROLweb User Manual Appendix B Interlock Card I O Mapping Each interlock card represents a total of 72 inputs and 32 outputs For complete details see t
26. priority and is intended for all control functions The front connector located on the Netcom card is intended for monitoring functions 1000pF 2KV C10 CHASSIS 13 of 32 MKS Instruments CIT Products 2004 All rights reserved emks CONTROLweb User Manual NY 2 4 NetCom Card The Netcom card is the main processor of the 3U Ethernet I O system Netcom manages all connectivity with the master controller controls all I O functions and provides a user interface through a built in web browser Interfaces Status LED Local Module Status LED Remote Network Ethernet Port Monitoring Status LED s Front Ethernet Status LED s Rear Ethernet Serial Port Monitor 14 of 32 MKS Instruments CIT Products 2004 All rights reserved h V 01 TO ducti TV CONTROLweb User Manual 2 4 1 IP Address Rotary Switches IP Address Rotary Switches IP1 IP2 These three decimal digits form a number between 0 to 999 which specifies the last two network segments Example 192 168 y x 0 Use automatic IP address configuration using DHCP protocol 1 999 Set the IP address to 192 168 y x where W current setting of the three switches mod 256 y floor w 256 for example if the three rotary switches are set to 770 the IP address will be set to 192 168 3 2 The netmask will always be set to 255 255 255 0 and the default gateway will be configured so that t
27. ration can only happen in Netcom mode 2 3 AND you must gain access within the first 60 seconds after system boot Changes are locked out after 60 seconds Note wah 1A flack Mierszaft mimrnat X ee Faber ede Q O AAG Pe 003 632 0 Meses wen Eii TIE ALL en WETCON 5B 111715 BYTES Emn bers Ti FEE UTC i Dore Main Configuration Page 4 3 1 Modbus TCP Data Mapping Since CONTROLweb 3U is a modular i o system the Modbus TCP mapping is dynamic based upon the card content of each system To see the mapping details select Modbus Data Mapping 22 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual Technology for Productivity Modbus Data Mapping 4 3 2 Serial Port Settings Serial Port Status Raw TCP 85232 No Flow Control 38400 v Raw TCP 85232 No Flow Control 38400 v Raw TCP 85232 No Flow Control 38400 Raw TCP 85232 No Flow Control 38400 v 23 of 32 MKS Instruments CIT Products 2004 All rights reserved lecnnology Tor Productivity CONTROLweb User Manual 5 Modbus TCP Interface Use the Modbus mapping details provided through the web browser interface under the Configuration tab Manual section 4 2 1 Map this data in your Modbus TCP scanner For more d
28. roductivity Zh cie IIO Rack In De Eat Wew Faves O O 2 _______ ____________________ Googles help 6 1 3 Data Collection Plans A data collection plan selects the process variables of interest and the frequency of data collection Each collection plan can then be viewed using a Charting Applet or can be downloaded in CSV format to your local PC 26 of 32 MKS Instruments CIT Products 2004 All rights reserved eemks CONTROLweb User Manual NY f yew Ferte Took eo t Q O 96 Pwo term O 23 5 EMINET g Parfit 5 A ig E Mo di NETCOM SH 111258 mode possis M05 0196 72 57 03 UTC 6 1 4 Data Collection Plan Editing Create a collection plan and select the key process variables of interest Edit Collection Plan 0 Default CP Up time 200 25 201 wv S eUe cis IO IRE 4 6 1 5 Charting Applet Once a data collection plan is configured you can view the data using a built in charting applet 27 of 32 MKS Instruments CIT Products 2004 All rights reserved mks Tech lo Productivi 3 COA FRUL veu VO Hack Inigrnel Explorer Fie Edt View Favoker Took 1 a T
29. server address automatically Use the following DNS server a ddresses Preferred DNS Altemate DNS 2 IP Address of the CONTROLweb unit to be 192 168 1 2 and Mode for user diagnostics This is done by setting the Mode Switch to 2 and the IP Address Switches to 2 5 8 sets last 2 network segments as 1 2 3 Start up a web browser and point it to 192 168 1 2 You will see the main CONTROLweb configuration page showing an overview of the cards in the unit and status 17 of 32 MKS Instruments CIT Products 2004 All rights reserved CONTROLweb User Manual Technology for Productivity J COA FRULveul VO Hack Inigrnel Explorer O O AAO Paw tem Sa T3 secre M 13 wis S Crit 2 4 Click on the link to Digital Output access http 10 112 0 131 Slot 3 DO 1 32 Microsoft Internet Ex 9 Slot 3 Discrete Outputs a H 5 Change an output state by writing a 1 to that location Note LED on the DIDO card for that channel will turn green 18 of 32 MKS Instruments CIT Products 2004 All rights reserved echnology for Productivity CONTROLweb User Manual 4 CONTROLweb User Interface The user interface is web based You can access it by simply browsing to the IP Address of the CONTROLweb node al Microsoft Inter
30. ware initialization in progress Blinking Amber Self Diagnostics in progress Green Red Thermal Warning Amber Red Internal Communication Failure Blinking Red Safety Warning Interlock Failure REMOTE STATUS REM Off Power off unit self test oteady Green Not Used Blinking Green Network Good Master Connected Watch Dog Enabled Green Amber Network Good Master Connected Watch Dog Disabled Solid Amber Network Good Waiting for Master to connect Blinking Amber Network Configuration Error Wrong IP address no other network devices Green Red Network Auto Configuration In Progress Amber Red Network interface internal error Blinking Red Not Used Safety Warning 16 of 32 MKS Instruments CIT Products 2004 All rights reserved Technology for Productivity emks CONTROLweb User Manual 3 Quick Start This section provides a quick method to connect to a CONTROLweb I O module and manually turn on a digital output through the web browser interface 1 Modify your network TCP IP settings to match the following PC IP Address 192 168 1 1 PC Netmask 255 255 255 0 You can get IP settings assigned automatically if your network supports this capability Otherwise you need to ask your network administrator for the appropriate IP settings Obtain an IP address automatically IP address 192 158 2 Subnet mask 25h 255 255 0 Default gateway Obtain DNS
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