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Thermal TRACK™ 4 - MHz Electronics, Inc

1. H hardware overview 1 1 I indicator memory 2 2 ISIS indicator 1 7 overview 1 1 ISIS calibration calibration check C 2 overview C 1 performing calibration C 3 Thermal TRACK 4 User Manual Index Li ion battery replacing A 2 line power 1 6 Link Options menu item 8 8 Link to PC using Connection Utility version 2 5 2 version 3 5 1 Link to PC menu item 8 8 linking to PC 5 1 5 3 list logged data display 7 2 list display 6 8 lithium batteries replacing A 3 log on connection utility 3 6 device 2 2 logged data displaying 7 2 7 5 opening 7 1 spreadsheet 5 6 transferring 5 4 5 7 logging data 6 3 6 5 rate 6 3 tests 6 14 logging off 2 4 Log off 8 9 Manage Files 8 4 Measure milliVolts 8 2 Measure Ohms 8 2 Measure Temperature 8 1 Measure Timed 8 2 Scan Period 8 2 Settings 8 6 Utilities 8 7 View Data 8 4 milliVolts measuring 6 13 modem speed 8 8 OHM files download 5 4 Ohms measuring 6 13 main battery replacing A 2 manage data logs 7 7 managing data locating files 7 7 manual conventions 2 using this 1 2 map logged data display 7 2 measurement connecting wafer 6 2 logging data 6 3 6 5 milliVolts 6 13 modes 6 1 Ohms 6 13 overview 6 1 selecting system 6 2 starting 6 3 timed 6 12 viewing data 6 5 6 8 memory available 8 8 indicator 2 2 memory initialization A 6 Menu About 8 8 C
2. 855638017 errWceFileXfer FileNotOpen 855638018 errWceFileXfer InvalidArguments 855638019 errWceFileXfer MissingHeaderInfo DTLG 6 855638022 errWceFileXfer FilePointerNotInData SensArray The software attempted to access an open file that was not open A subroutine in the software did not receive the expected data This error appears only if a bug exists in the software You should report this bug to SensArray along with all relevant information about the occurrence of the bug When retrieving a Thermal TRACK data log file from the device or viewing the file on the device the software did not find the expected descriptive data from the file The error indicates either a bug in the Thermal TRACK software or a corrupted data file When retrieving a Thermal TRACK data log file from the device or viewing the file on the device the software did not find the expected measurement data from the file The error indicates either a bug in the Thermal TRACK software or a corrupted data file Thermal TRACK 4 User Manual Appendix D Error Codes Data Acquisition Errors Error a Name Description 805306369 IsisErrPortAlreadyOpen Attempted to open the serial port for the ISIS when the port was already open DAQ 2 805306370 IsisErrCannot0penSerialPort The software could not open the serial port for measurement This error appears if the device is connected to the PC with Windows CE Services T
3. Appendix A Maintenance and Troubleshooting Troubleshooting Problem Need to exit Thermal TRACK software on PDA Solution Shutdown PDA software with Connection Utility You can exit the Thermal TRACK software running on the PDA device through the PC Connection Utility e Verify that the device is connected to the PC with Microsoft ActiveSync See Microsoft ActiveSync Installation in Chapter 2 for more information e On the Connection Utility select Device Shutdown Device Software When you want to restart the software access the Thermal TRACK item on the PDA s Start menu or choose Device Launch Device Software on the PC Connection Utility or simply reset the PDA Problem Device Freezes Up Note Solution Perform a Normal Reset A reset a process similar to rebooting a PC should be performed when the device does not operate correctly such as when the device freezes up or the hourglass icon remains on the screen for an extended period of time 1 Remove the PDA from the ISIS unit 2 Power on the PDA The reset will not occur unless the device is powered on 3 Turn the PDA over 4 Using the stylus press the RESET button near the upper left corner on the back of the PDA 5 If the reset was successful the Startup screen and then the Thermal TRACK Logon Screen should appear on the display 6 Replace the PDA in the ISIS unit If the reset does not rectify the problem you may need to perfo
4. chart Table Info SensArray 7 5 Thermal TRACK 4 User Manual Chapter 7 Viewing and Managing Logged Data Managing Files By selecting Menu Data Manage Files you can manage files that are stored on the Thermal TRACK device On the File Management screen you can delete test definitions wafer configurations calibration and resistance calibration standards files Simply select the file type from the pull down menu select the file name and tap the Delete button Datalog Files Test Definitions Wafer Sensor Configurations Calibration Files Resistance Calibration Standards Managing Data Logs Data log files contain temperature measurements For data log files you have the option of deleting renaming or adding comments On the File Management screen select Datalog Files from the pull down menu File Management Datalog Files Litho 1 Pre Spin_ 19981204 094800 log Rename Comment Delete OK By default the names of saved data files include the system and module name followed by the date year month day and time hour minute second of the acquisition To rename a log tap the Rename button and use the keyboard to revise the name Thermal TRACK 4 User Manual 7 6 SensArray Chapter 7 Viewing and Managing Logged Data File Management Rename File System 1_Module 1_20000822_142232 log Cancel o To edit the comment stored with the log tap the Comment bu
5. Comments ica a e a hoe cmon es 4 8 Selecting Modules Tor Tetu pions hitch hao ch ees in ASD eo Ea a aan ee 4 8 Opening System Module Distinciones 4 9 Selecting Waters Tor Ted A tie 4 9 Saving the Test Definition e les 4 10 Transferring Test Definitions to the Device uma e des dt dada dai 4 10 Chapter 5 Downloading and Retrieving Data ooooocoonnccoononoonnnconnconannnonancconancnnnanconacncnnnccnanananos D L Setup Considerati ns ao E 5 1 Connecting the Communication Cable 0 cccecccesccssecssecseeseeeneeseeeecessensecnaecnaecnaecaaecaeecaeeeneceneseeeseeeneenaeeeaeenseenaes 5 1 Preparing the PC and Thermal TRACK 4 Device for Transfer 0 0 0 cessessessseseceeeeeceeeeeceaecaeesecaeeeecneeeeceaeeeeeeeeaees 5 1 Preparing the PC and Thermal TRACK 2 Device for Transfer 00 0 ccesecsescesseseceererceeeecaeceeesecaesseseaeeeceaeeeeeeeeaees 5 2 Downloading Files to the Device necios coin rra nidad ceed nds votes 5 3 Downloading Wafer Configuration Files ccccescceseeeseesseeseeeseeeeeeeceseensecnsccnaecsaeceaecaeecaecsaecaaecaeeeaeeneenaeeeaeenaeenaes 5 3 Downloading Calibration Files iii 5 3 Downloading Ohm Files dit 5 4 Downloading User System and Test Lists sesirik ieres enee e Ee aE E ea EE pa EaR PES EEE N S ees 5 4 Downloading System Distintas di a a e aaa eea eaor saae lush sites 5 4 Downloading User B E cect A A A E E 5 4 Retrieving E EEE E E E A EE E A EAR 5 4 Rare Data EET E A E E E assests cusus busta stan ant
6. MCASUte ie iced dios 8 1 FCT SA EEA a aia AREEN EEEE ett 8 1 OTS A A A E ITANE E E A E EEE EE EEE 8 2 vrai ERAO h AAAA ni EAEE E EE EE AE 8 2 A O lech cde E AES 8 2 VNA 62054 E E A NO 8 2 Cal A RR E O OA 8 2 W afer Config ad E lidad died desatado 8 3 Di A A E Ad si 8 4 Manage Files ta 8 4 VIEW Dd A A A isis E 8 4 SECOND AA A a IAS 8 5 O dace ci ec ehh A ea Te 8 6 CON AN 8 6 Set Contrasts is A A e ea a 8 6 Set Time Date A A A oe ee ede RE 8 6 til A A A A A A AA EA eS 8 7 Calibrate Cr AA A AA AAA a eh oe age Oe ets 8 7 Eik tO A eee Re RLS a eh aa ae Te a ek Se ies en 8 8 LinKk Options A iia de 8 8 ABOU EA A EE E A aot ck A ii att IA aa 8 8 COn Oia A A e EA e aia iaa 8 9 SensArray iii Thermal TRACK 4 User Manual Table of Contents Appendix A Maintenance and Troubleshooting sscccsssccssssccsssescecscecsssecccssecscssccccssesecsers A Calibrating DEVICES A dei RA es A 1 For Devices Me s rie TOS iii id de Ai AA e ai A 1 For Devices Meas rime RED Simi a A Ati aci A 1 Removing PDA from Case ia a iio ES A 1 Replacing Bai e OS A Ai A Stes ae ons Bate E E E A A 2 Replacing Main Ll ion Battery P tku iie mii e N a E A E A E E O E A 2 Replacing Back up Battery ce nornen a a o i da cv ieee eed ici ici A 3 Re instal ling SoftWare menn oa A tn a aia A 3 Upsrading SoftWare iii A A E Dia o iets A 4 Setting Device Caparo airis A 4 Installing CompactFlash RAM Catds 0 cccccesccsseesseeseesees
7. Once disabled the sensor remains disabled for all subsequent measurements until re enabled List Display The List Display shows the readings in a tabular format You can view readings associated with the specific sensor name To access the List Display while acquiring data tap the List tab on the Data Display screen As each measurement registers the readings appear in the list TC1 227 6 TC2 227 8 TCS 227 8 TC4 228 0 TCS 228 0 TC6 228 0 TC 228 6 TCS 228 8 TCS 229 1 TC10 228 3 TC11 227 9 TC12 229 8 TC13 228 7 TC14 229 3 TC15 229 3 TC16 228 2 TC17 228 7 Map List Stats 12 20 03 PM CIC Temp 28 1 2000 08 23 gt Stop Thermal TRACK 4 User Manual 6 8 SensArray Chapter 6 Making a Measurement Strip Chart Mode To view a strip chart of the measurements tap the Chart tab on the Data Display screen All temperature measurements sweep across the chart moving right to left The chart represents the most recent 240 samples To erase the chart and start a fresh sweep tap the Clear button 248 1 auto ala 0 08 02 0 248 4 auto Map List Chart Period 2 sec 9 18 37 PM 2000 08 23 Menu 0 06 47 0 Stop By tapping on areas of the chart the status bar below the chart displays details about the readings Strip Chart Scaling To view a varied range of readings you can change the scale of the strip chart by tapping on the maximum and minimum readings The numeric value for the maxi
8. SensArray Index averaging computed by test 4 5 setting time 4 7 window 6 11 6 12 system list 4 1 4 3 system requirements 1 2 systems and modules 4 1 4 3 test definitions 4 5 4 10 user lists 4 4 with TMAP 3 7 back up battery replacing A 3 batteries description 1 6 replacing A 3 CAL files download 5 3 calibrate screen 8 8 calibration check C 2 check files deleting 7 8 dates 8 9 overview C 1 performing C 3 starting C 1 CAP files A 4 carrying case 1 7 chart 6 9 logged data display 7 3 scaling 6 10 scope mode 6 10 zooming 7 4 CJC Temp 6 5 cold junction compensation 6 5 comments before logging data 6 4 for tests 4 8 setting 8 5 writing on screen 2 1 communication set up 5 1 5 3 communication cable connecting 5 1 CompactFlash cards installing A 5 components additional 1 8 overview 1 1 standard 1 4 1 7 Connection Utility 5 7 default password 3 6 Device menu A 3 installing 3 5 SensArray data display screen 6 5 data files exporting 5 7 data logs managing 7 7 device power supply 2 1 serial communications 1 7 shutting down software 3 7 turning on 2 1 device capabilities A 4 disabling wafer sensors 6 7 6 8 download calibration files 5 3 OHM files 5 4 test files 5 4 WAF files 5 3 downloading files 5 3 5 4 E error codes D 1 D 8 exit device software 3 7 exporting spreadsheet files 5 7
9. view data and transfer data to and from the PC host e Intelligent Sensor Interface System ISIS Converts and calibrates the sensor s analog signals to high precision 24 bit digital values and communicates sensor data to the PDA e Integrated power management hardware Manages the battery and DC line power that powers the system and charges the batteries The power management circuitry is integrated with the ISIS electronics Thermal TRACK Software Device Software SensArray Utilizing a touch screen interface the device software is intuitive and straightforward With a pen like stylus you can select menus buttons and enter comments You can easily change settings initiate measurements and log data During the measurement you can view the readings from sensor maps lists strip charts and statistics in real time l 1 Thermal TRACK 4 User Manual Chapter 1 Overview PC Connection Utility Software Before running tests with the Thermal TRACK you ll use the PC based Thermal TRACK Connection Utility software to create system user and test parameters as well as to transfer configuration information from the PC to the device To help you become familiar with the software before actual use SensArray installs a default operator list and system configuration at the factory Installing and using the connection utility software is explained in Chapter 3 Connection Utility Software Connection Utility Syste
10. Appendix B Scan Periods and Accuracy Discusses recommended scan periods for measurements with the highest accuracy Appendix C Using Resistance Calibration Standards Performing on site checks and calibrations of your Thermal TRACK device Appendix D Error Codes Describes error codes that may occur on the Thermal TRACK device Index An alphabetical listing of terms and concepts in this manual and the page number where the terms and concepts can be found y Thermal TRACK 4 User Manual Using This Manual Conventions Used in this Manual The following conventions are used in this manual Note Highlights important information Boia Bold text indicates button names icon names and menu items talic Italic text indicates the section and or chapter name in a cross reference For example See the Creating User Lists section of this manual for more information Italic text can also emphasize a word or phrase Courier Courier typeface indicates file names directories and text that you enter For Typeface example The file is located in the C TMAP DATA directory lt Key gt A word offset by angle brackets indicates a key on the keyboard For example After you specify the parameters press the lt Enter gt key The twin arrow symbol indicates menu navigation For example To initiate a voltage measurement select Menu Measure Measure milliVolts Warning ndicates potential for product
11. Don t record comment on the Comment screen To record comments use the keyboard on the screen Memory Indicator With the Memory Indicator at the lower right of the display screen you can view how much memory remains on the Thermal TRACK device for logging data The amount of shading indicates the amount of data already stored The icon indicates the following e Ifthe icon is less shaded or gray the device has more available memory e Ifthe icon is more shaded or gray the device has less available memory To view the amount of available memory tap on the icon and a dialog box will state the remaining storage capacity in kilobytes Note When available memory drops below 100 kilobytes the memory indicator flashes At this point you can still acquire data however the software will automatically stop acquiring data when all available memory is exhausted Refer to Managing Files in Chapter 7 and Retrieving Files in Chapter 5 for information on transferring files from the Thermal TRACK unit to the PC to free up memory Thermal TRACK 4 User Manual 6 4 SensArray Chapter 6 Making a Measurement Log Name The automatic naming convention for data logged is lt System Name gt _ lt Module Name gt lt Date gt lt Time gt You can rename a file later from the Manage Files screen or when you load the file to the PC Viewing Data in Real Time During a measurement you can view sensor readings in real time in the fo
12. data check the Delete After Successful Transfer box on the Select Files to Retrieve dialog You also have the option of deleting files at a later time See Managing Data Logs in Chapter 7 for more information 3 Press OK to select the files 4 Select the directory to save the file Select a Directory xi Directories cAtmaptthermal track pda software fer Thermal TRACK PDA Software a New Dir Drives c Cargo y Network SensArray 5 5 Thermal TRACK 4 User Manual Chapter 5 Downloading and Retrieving Data Retrieving Other Files On the Connection Utility select Retrieve Test Results Cal Check User List or System List 1 Select the file to retrieve 2 Name the file 3 You have the option of deleting files Viewing Data in Thermal MAP Spreadsheets Note You can use a Thermal TRACK data file like any Thermal MAP data file or a spreadsheet file If you load the data file into a spreadsheet application the data appears similar to the illustration below Cc lt Attribute Section Marker Attribute Values Other attributes Last Attribute ID Last Attribute Value Data Section Column i Marker Headers i In the Thermal MAP spreadsheet format the data is saved with attributes that specify the wafer configuration time and date of acquisition and other acquisition parameters As shown above these attributes are saved in the first part of the data file in a sectio
13. of this problem may indicate hardware failure ISIS 7 822083591 See description above ISIS 8 822083592 See description above ISIS 9 822083593 IsisAckCommandBusy ISIS was not able to process previous request before receiving new request This may indicate a bug in the ISIS firmware or in the device software ISIS 10 822083594 IsisAckCommandInvalid ISIS received a corrupt communications packet This may indicate electrical noise in the environment If the problem continues to occur it may indicate a bug in the ISIS firmware or in the device software ISIS 11 822083595 FsisackCommandUnableToBxecute ISIS firmware malfunction ISIS 12 822083596 IsisAckDatalnvalid ISIS received a corrupt communications packet This may indicate electrical noise in the environment Continued recurrence of this problem may indicate a bug in the ISIS firmware or in the device software Thermal TRACK 4 User Manual D 6 SensArray Appendix D Error Codes Error Number Name Description 822083597 IsisAckDataRange See description above ISIS 14 822083598 IsisAckSelfTesting ISIS is performing a self test typically after turning on power ISIS 15 822083599 IsisAckSystemCal ISIS is calibrating itself typically immediately after initiating a measurement on the device ISIS 16 822083600 IsisAckCommandFailed ISIS was not able to successfully process previous request This may indicate a bug in the ISIS firmware or in the device softwa
14. only Possibly the file is open from another program FILE 4 536870916 fileErrFileAlreadyOpen The software subroutines used to open a file presently had a file open Indicates a bug in the software SensArray D 7 Thermal TRACK 4 User Manual Appendix D Error Codes Error Number Name Description 536870917 fileErrNoFileOpen File should be open but it will not Indicates a bug in the software FILE 6 536870918 fileErrCannotAllocMem Unable to allocate necessary Can indicate a corrupt data file or an PER E system malfunction FILE FILE 7 536870919 536870919 filemrrnatalottoaded filemrrpatanottoaded Unable to load Unable to load required data data FILE 8 536870920 ErrUserMemException The memory given to a subroutine by its caller was inappropriate or too small Can indicate a corrupt data file or a bug in the software FILE 9 536870921 fileErrBadUserParameter subroutine in the software did not receive the expected data Error appears only if a bug exists in the software You should report this bug to SensArray along with all relevant information about the occurrence of the bug FILE 10 536870922 ileErrCannotSeekFile Unable to find an expected location within a data file This may indicate a corrupt data file or a bug in the software FILE 11 536870923 fileErrFailedWrite Unable to write a file Typically the error indicates that storage is full Thermal TRACK 4 User Manual D 8
15. the changes Transferring Test Definitions to the Device See Chapter 5 Downloading and Retrieving for more information Thermal TRACK 4 User Manual 4 10 SensArray Chapter 5 Downloading and Retrieving Data Note In addition to creating system user and test configurations you use the Connection Utility to transfer data between Thermal TRACK devices and the PC host You can download multiple wafer configuration files system user and test configurations to the Thermal TRACK device and upload data files and test results to the PC Before performing tasks discussed in this chapter with Thermal TRACK 3 or 4 devices you must install Microsoft ActiveSync on your PC For more information see the Installing Microsoft ActiveSync in Chapter 3 You do not need to install Microsoft ActiveSync if you plan to connect to Thermal TRACK 2 devices only When the Thermal TRACK device is connected to the PC using Microsoft ActiveSync the device will not go to sleep Consequently if connected to the PC and Microsoft ActiveSync is active and the line power is not plugged into the Thermal TRACK the batteries will eventually drain Setup Considerations Before transferring files you should connect the necessary equipment and prepare the components Connecting the Communication Cable To set up the system for data transfer first connect the communication cable by completing the following procedures 1 Locate the Interface Cab
16. to Remove PDA RTD Connector View of Thermal TRACK Device From the Connector End Communication Status Indicator Flashing yellow Communication in progress Green ISIS circuitry is powered Serial Communications Port Battery Status Green Fully Charged Red Charging Power Connector Stylus in Stored Position View of Thermal TRACK Device from the Base End Thermal TRACK 4 User Manual 1 4 SensArray Chapter 1 Overview TC only or TC RTD configurations place an interface adapter with only one wafer socket on the top of the unit as shown in the figure below In dual configurations the interface adapter would be installed or removed according to the type of wafer being measured TC Interface Adapter TC Interface Mounting Thumbscrews Connector View of Thermal TRACK Device with TC Interface Adapter Installed PDA Security Plate Also included with the unit not illustrated is a security plate which replaces the connector end plate of the unit and prevents the removal of the PDA without using tools to remove the plate The plate completely covers the PDA access while leaving the RTD connector accessible The plate attaches to the unit with four 4 40 screws using a 1 16 inch Allen wrench The security plate is provided for customers to limit removing and possibly misplacing the PDA unit thus rendering the Thermal TRACK unit unusable Process Probe Wafers The standard Thermal TRACK configura
17. y Process 44 148 Offset 1 100 Setpoint 41 100 Other Data Installed 9 10 1998 El Test Uniformity Test y 10 53 15 AM 2000 08 23 Test The Pre Test screen opens with test instructions and test To save the test measurements check the Log test data checkbox When the Log test data checkbox is enabled the Log settling data checkbox becomes available When this is checked in addition to logging the primary data during the test it will also log during the settling period Thermal TRACK 4 User Manual 6 14 SensArray Chapter 6 Making a Measurement L Log test data E Log settling data System System 1 Module Module 1 Setpoint 0 000 Process Settling Time O secs Average Time O secs Scan Period 2000 millisecs Start Test Cancel Test Set up for test To begin the test tap on the Start Test button on the Pre Test screen Running the Test After tapping the Start Test button the acquisition begins At this point the connected wafer is checked against the wafer restrictions of the test parameters to ensure a suitable test If the wafer is not compatible with the restrictions the test is canceled and a message displays that describes the problem If the wafer meets the restrictions the test begins and the Wafer Display screen appears with a display counting how much settling time remains After the settling time has expired the message displays how much averaging time remains befor
18. you can open and view the data log file for analysis on the Thermal TRACK screen Viewing options include the following maps lists charts and tables In addition Thermal TRACK provides easy management of logged data and other files You have the option of adding comments that remain with the data file and renaming and or deleting files Opening Logged Data To view logged data select Menu Data View Data Note that the option is not available when you perform measurements or when you are logged off From this menu item the File Selector opens Select a File Litho 1_Pre Spi Litho 1_Pre Spin_19981204_094710 log The File Selector displays all files data log saved on the Thermal TRACK device including files saved on internal storage and the CompactFlash RAM card if installed To view a specific data file highlight the file by tapping on its name in the File Selector and tap the OK button With the file open you have the option of changing the data view by tapping the following tabs Map List Chart Table and Info SensArray 7 1 Thermal TRACK 4 User Manual Chapter 7 Viewing and Managing Logged Data Additionally when viewing a data file you can perform the following e To change the name of the file select the File Rename item e To edit the comments associated with the file select Edit Comment item e To return to the Select a File screen tap the Folder icon Map Display T
19. 24 6 RTD2 224 8 RTD3 224 9 Map List Chart Table info Chart Display The Chart display shows the spatial difference between readings The highest readings appear at the top of the chart the lowest readings appear at the bottom As with the Map and List formats the horizontal scroll bar allows you to change the time intervals Fie En Display zoom A 229 8 auto 224 6 auto EN PEA AA Map List Chart Table nfo To read any measurement point on the chart tap on that point and the reading displays in the status bar at the bottom of the screen SensArray 7 3 Thermal TRACK 4 User Manual Chapter 7 Viewing and Managing Logged Data Chart Scaling Like the real time data chart you can change the scale of the strip chart by tapping on the maximum and minimum readings The numeric value for the maximum temperature appears at the right top of the chart the minimum value appears at the right bottom of the chart Tapping on the top values opens the Maximum Y scale box Tapping on the bottom value opens Minimum Y The strip chart scale defaults to Auto scale To change the scale to a specific maximum or minimum reading uncheck the Auto scale box and enter your value Note if you enter a maximum value that is numerically smaller than the minimum value the software will adjust the minimum value to slightly less than the new maximum you entered Likewise if you enter a minimum value tha
20. AEO E EA E E A E E 3 1 Installing AU O tele Ses 3 1 Installing the Connection Utility ccceccececsseesseeseeesceesceseeeseeseceseceseensecnaeceaecsaecssesaeceaecaaecsaeceeeseeeeneeesesesseeaeeeaeenseenaes 3 5 Starting the Connection Utility 0 0 ccceccecceescesseesceesceeecesecesecesecsaecsaecaeecaecsaecseecaeeeseceeeseeesseeeaeeneecaeesaecaeesaecaeecaeeeneeses 3 5 Exit Device Software with Connection Utility ccccccceescesscsssceseceseeecesecnsecaecsaecaecsaecssecseecaeeeseeeaeseseeneeseaeeeaeenaeenaes 3 7 Running the Connection Utility and Thermal MAP cococncnccnicononononncononnnconccn nono nnnn nono no nn nono ronn nono nn rr rra nr nr narran nino 3 7 SensArray i Thermal TRACK 4 User Manual Table of Contents Chapter 4 Creating System User and Test Lists cccsscsssssccsssscssccccssscccsscccsssssesscsssssseeees Fa Creating System eo 4 1 Defining Systems and Modales chee sede ck cc dep vetecabeces n a a r a a E i ie 4 2 Defining Modules da 4 2 Saving and Editing System Lists aia 4 3 Downloading System Lists to the Device ecceecceeseesscessceseceseceaecececseeeaeeeaeeaecaeeeaeeeaeseeeeeeesaeenseeeaeenaeceeeeeentenes 4 3 Creating User Lists a cd E decs cotcuecvesiee cad E E ccd lesa dedi e i oes 4 4 Saving User Lists x cesses ice ce ees ea see Sk ak eee ease ase ee SG a SR A 4 4 Editing User List s 4 4 Creating Test Definitions aid 4 5 Setting Test Parameters esc 2cs5 2h ies e ie eR 4 6 Inserting Pest
21. Calibration Standards you can obtain NIST traceable calibrations For more information see Appendix C Using Resistance Calibration Standards Removing PDA from Case SensArray You must remove the PDA from the Thermal TRACK ISIS unit before changing the PDA batteries or installing CompactFlash RAM cards 1 Turn the device power off 2 If the TC interface adapter is attached loosen the thumbscrews on the front of the adapter and remove the interface adapter 3 Ifthe PDA security plate is installed on the front of the ISIS unit to prevent easy removal of the PDA use a 1 16 inch Allen wrench to remove the four 4 40 screws securing the plate 4 Grasp the pull tab attached to the PDA and pull the PDA straight out of the end of the ISIS unit A 1 Thermal TRACK 4 User Manual Appendix A Maintenance and Troubleshooting Replacing Batteries The rechargeable Li ion battery pack in the Thermal TRACK PDA may need to be replaced if it can no longer take a charge If battery levels are low the software displays a warning when you perform a measurement Data stored in memory can be lost if the device is used after the low battery message appears Before replacing the battery pack retrieve all data from the PDA using the Retrieve menu on the Thermal TRACK Connection Utility Warning To prevent the loss of all data stored in memory never remove the Li ion battery pack and the back up battery from the PDA at the same time I
22. ISIS ID e Wafer Serial Number e Setpoint e Settling Time e Averaging Period e Mean High Limit e Mean e Mean Low Limit e Mean Result PASSED or FAILED e Range e Range Limit e Range Result PASSED or FAILED To transfer test results from the device to the PC perform the following procedures 1 Connect the interface cable and prepare the PC and Thermal TRACK device for data transfer as described in the Setup Considerations section starting on page 5 1 2 On the Connection Utility choose Retrieve Data File 3 On the Select a Directory dialog enter the name of the data file and the directory If the file you specify already exists the transferred results are appended to the existing file When appending results you should select a test results file to append Verify that the file you selected is not open in another application which may cause the transfer to fail After closing the other application attempt the transfer again You can open the test results file in any spreadsheet program that recognizes tab delimited data You can also open the file in a word processing program or text editor 5 7 Thermal TRACK 4 User Manual Chapter 5 Downloading and Retrieving Data NOTES Thermal TRACK 4 User Manual 5 8 SensArray Chapter 6 Making a Measurement You can use the Thermal TRACK device as a meter that measures wafer temperature and displays temperature and statistics in real time In addi
23. Measurements The timed measurement option is designed for collecting measurements over a long duration To measure the wafer without physically attending the Thermal TRACK device during the entire period use a timed measurement by selecting Menu Measure Timed Set Up Timed Measurement Duration HH MM 55 Y Log Data When complete Thermal TRACK 4 User Manual 6 12 SensArray Note Chapter 6 Making a Measurement To specify the duration of measurement tap on the time display Each tap adds or subtracts the time by one unit Tapping the bottom of the number decreases the value Tapping on the top of a number increases the value After tapping the Start button the software collects data for the length of time you specify Optionally you can log the data and set the Thermal TRACK device to turn off automatically when the measurements are complete to conserve battery power With the When complete pull down menu you can select the action you want the system to perform when the measurement is complete The menu defaults to Stay Ready which keeps the system powered until the normal sleep interval expires You can also elect to log off power down or log off and power down Log Off and Power Down For extremely long measurement periods you can connect the external power supply to the Thermal TRACK device so that you are not limited by battery charge Typically you can operate the Thermal TRACK device for up to t
24. SIS Response Codes ii iaa D 6 General Thermal TRACK File Errors iii a la ear did sate cnc diera dba did dde D 7 Thermal TRACK 4 User Manual iv SensArray Using This Manual This manual contains the following chapters and appendices SensArray Chapter 1 Overview An introduction to system components Chapter 2 Getting Started Discusses connecting the power supply turning on and operating the Thermal TRACK device and logging on and shutting down Chapter 3 Introduction to the Connection Utility Software Installing and logging on to the PC based software Chapter 4 Creating System User and Test Lists Describes using the PC based Thermal TRACK editors to customize user accounts process equipment definitions and testing procedures Chapter 5 Downloading and Retrieving Data Provides a step by step approach to transferring files and data from the Thermal TRACK device to a PC Chapter 6 Making a Measurement Describes measuring and displaying wafer temperature as it is acquired Chapter 7 Viewing and Managing Logged Data Discusses displaying saved data files in a variety of formats and adding comments renaming and deleting logged data files Chapter 8 Thermal TRACK Menu Items Lists and describes all functions accessible from the Thermal TRACK device Menu Appendix A Maintenance and Troubleshooting Performing periodic maintenance such as changing batteries and troubleshooting problems
25. Software ti 1 2 Connection Utility System Requirements 0 cccceeccesccesecsseeseeeseeeseeeeecseeeneeecesscesseceseenseeaeeseceeeeseceaecaeeeaeeeseeass 1 2 Software Requirements tr s 1 2 Hardware Requirements ic 1 2 Thermal TRACK Configurations aia 1 3 How to Upgrade adi 1 3 New for Thermal TRA ai 1 3 Thermal TRACK Component resorin eiin E E EE sek pic RE EEE E E EE R EEES 1 4 Process Prode a aia 1 5 O 1 5 POWer COMPA tia 1 6 Recharging ds 1 6 Battery LOW ia 1 6 Line Power Suppl ysis sccccieccecccces cedecccuca te cducvteevancessccel EAE E RE ies EE de desta eeakas R EEE E 1 6 ISIS Status cado aia aer 1 7 Device Serial CAMA aos 1 7 CO so 1 7 Additional Components A codes 1 8 TE Process Probe Wafers and Substrates a 1 8 RTD Proc ss Probe Wafers and SU ode 1 9 Resistance Calibre ace 1 9 Chapter 2 G ete S bar ted ni e al Connecting PO WE e e des let ee lea e ad Dedo et ee ee 2 1 T rning On the Devi ira 2 1 Tapping on the Touch SM R a 2 1 Monitoring Memory Capac O et a eee ee 2 2 Logging Onto Therma TRACK oia 2 2 Changing User PIN reni nanen a a A Heese io Oo 2 3 Shutting Down Thermal TRACK Devices cccccccecccesscesscesseesceseeesecesecsaecsaecaeesaecsaecaeecaeesaeseaeseeeeeseaeeseaeceseseeeeeeneeaes 2 4 Getting Started Flow Chat RA 2 4 Chapter 3 Connection Utility Software sseessoessoesssesssecssoossoossseessocesoossoossssesssesssoessoosssossssesssese J L BeforesInstalling the Softwares R
26. Thermal TRACK 4 Hand held Instrumentation For System and Process Monitoring User Manual SensArray 47451 Fremont Blvd Fremont CA 94538 510 360 5600 Fax 510 360 5601 info sensarray com www sensarray com SensArray 2000 O SensArray Corporation All rights reserved info sensarray com UM TT4 A This manual applies to the following versions of Thermal TRACK software 4 0 2 SensArray Corporation reserves the rights to modify change or improve any or all specifications procedures or features published in this document without notice Important Notices Warranty Thermal TRACK Software The Thermal TRACK Software media Software are warranted not to fail to execute programming instructions due to defects in material or workmanship for a period of 12 months after acceptance SensArray will repair or replace Software that does not execute programming instructions if SensArray received notice of such defects during the Warranty Period Faults caused by unauthorized modification misuse or abuse of products or problems due to software not supplied by SensArray are not covered by this Warranty SensArray does not warrant that the operation of the Software shall be uninterrupted or error free During the Warranty Period the purchaser may return failed Software to SensArray for repair or replacement at SensArray s option The purchaser will first notify SensArray of the nature of the problem and obtain
27. User Manual Chapter 3 Connection Utility Software Connection Settings x a Click Get Connected to connect your mobile device to this Ls computer Status Waiting for device to connect Get Connected 0M1 Status COM port is available T Allow network Ethemet and Remote Access Service RAS server connection with this desktop computer Status Network connections are disabled M Show status icon in Taskbar Status icon OK Cancel Help 17 Set the Allow serial cable or infrared connection to this COM port box as selected or not depending on whether you want the connection active You may want to deselect the connection when not connecting to the Thermal TRACK device as it may interfere with the use of the port by other devices 18 Click the OK button to implement the change and close the settings dialog Installing the Connection Utility The Connection Utility software ships on 3 1 2 inch diskette s To install the software on the host PC insert the disk into the computer s floppy drive Select Start Settings Control Panels Add Remove Programs For proper interaction with Thermal MAP systems and wafer configuration file installation programs the software is installed into the default directory of C SensArray Thermal TRACK The setup program creates the directory if it does not exist Optionally you can install the software in any other directory Starting the Connectio
28. a Returned Materials Authorization RMA number The purchaser will pay the costs of shipping returned Software to SensArray SensArray will pay the cost of shipping repaired replaced Software to the purchaser No other warranty is expressed or implied SensArray specifically disclaims the implied warranty of merchantability and fitness for a specific application The Thermal TRACK Software Documentation Materials Documentation are subject to revision and change without notice SensArray agrees to make a best effort attempt to keep the purchaser advised of changes to the Documentation Under the Copyright Laws the Thermal TRACK Software or Documentation may not be copied photocopied reproduced translated in whole or in part without the prior written permission of SensArray Thermal TRACK Hardware SensArray warrants that Thermal TRACK devices Products sold will be free from defects in material and workmanship and perform to SensArray s applicable published specifications for a period of one 1 year from the date of shipment to the purchaser The liability of SensArray hereunder shall be limited to replacing or repairing at its option any defective Products that are returned F O B SensArray s plant in Santa Clara CA In no case are Products to be returned without the purchaser first obtaining SensArray s permission and Returned Materials Authorization RMA number In no event shall SensArray be liable for any consequent
29. about the equipment To create system parameters or modify existing parameters select Window Systems on the Connection Utility window to open the System Editor j System Editor A ES File Edit Window Help Name New System New Module New System SensArray 4 1 Thermal TRACK 4 User Manual Chapter 4 Creating System User and Test Lists Defining Systems and Modules Within a System List you can build a registry of all systems and modules that you measure with Thermal TRACK A system can be an individual process machine or a series of machines that you routinely test Within each system you can have one or more modules A module is a specific component that you test such as a hot plate or a chill plate To define a system right click on the item in the list and select Properties from the list or select Edit Properties from the menu System Properties x Name Model Track DUW 3 200M Manufacturer SDK Other Data Process SRAM 8 1 Firmware Load 3 1 Field Change C installed In the System Properties window define the model and manufacturer In the Other Data field enter information that describes the process version etc or the system To add additional systems select the Edit New System menu item Defining Modules Within each system you can define modules To define a module right click on the item in the list and select Properties from the list or select Edit Properties El Lit
30. ad the new battery in the compartment in the same orientation Load the new battery making sure that the side of the battery is facing up toward the back of the PDA Push the cover back into place ensuring that the release lever re engages Verify that the PDA powers up You may need to reset the PDA 10 Reinstall the PDA into the Thermal TRACK device Re installing Software SensArray To re install the current version of Thermal TRACK software on the device perform the following 1 2 3 4 5 Connect the Thermal TRACK device to your computer with Microsoft ActiveSync On the Connection Utility select Device Install Software Select the TTP device software description file and press OK The Connection Utility will download the software to the Thermal TRACK device If necessary set the Device Capability See the Setting Device Capability section below A 3 Thermal TRACK 4 User Manual Appendix A Maintenance and Troubleshooting Upgrading Software To install upgrades of your Thermal TRACK software perform the following 1 2 3 Exit the Thermal TRACK Connection Utility on the PC Insert the Thermal TRACK Software diskette into the PC disk drive Run the Setup exe from the diskette this will copy the files to the C Sensarray Thermal TRACK directory Run the Thermal TRACK Connection Utility on the PC Open the Mobile Devices window on your PC and verify that Microsoft ActiveS
31. anual Chapter 6 Making a Measurement information on scan periods and data integrity see Scan Periods and Accuracy in Appendix B When logging data to a file data is logged at the rate you selected When running a predefined test the software overrides the selected scan period with the scan period specified in the test definition Start Logging For most measurement modes you begin logging measurements after you initiate the measurement During the measurement you can start logging by selecting Menu Start Logging This menu item appears only during measurement If the Set Comment screen is set to prompt for a comment before recording the Set Comment screen opens in which you can enter a comment After initiating the measurement you can log data from all measurement modes When logging the Thermal TRACK device screen displays the number of samples that have been logged To stop logging select Menu Stop Logging This menu item appears only during acquisition Logging will also stop automatically when you stop measurements Comments before Logging Data Before you start logging you may want to enter comments that describe the measurement The factory setting is to prompt you for a comment after you initiate logging but you have the option of changing this feature from the Comment screen Menu Comments If you do not want a prompt after selecting Menu Start Logging pull down the Record this comment with no prompt option or
32. ards 1 Insert the OHM Files diskette into the PC disk drive 2 Run the Setup Exe on the diskette this copies the OHM files into the directory C Sensarray Configs directory 3 On the Connection Utility select Download Ohm File and select the files you want to download and press OK Starting the Calibration Measurement SensArray To start calibration insert one of the resistance modules into the Thermal TRACK device s 62 pin connector port To initiate a calibration measurement on the device tap the Test Measure button or selecting Menu Measure C 1 Thermal TRACK 4 User Manual Appendix C Using Resistance Calibration Standards Note Even if the Test Measure button states Test because a valid test exists for the selected system and module the Thermal TRACK software detects the calibration standard and initiates the calibration The Thermal TRACK device recognizes the connection of the resistance calibration standard and displays a calibration selection screen where you can perform a calibration check a calibration or cancel the operation Perform Calibration E Resistance Calibration Standard detected Would you like to calibrate or just perform a calibration check Full Calibration Cancel Calibration Check The following sections describe using the Calibration Check and Full Calibration buttons on the Perform Calibration screen Performing a Calibration Check By tap
33. ause there are 10 ADCs present in the ISIS Measuring more than 9 sensors in addition to the cold junction compensation sensor requires multiplexing Settling time must occur twice during each multiplexed measurement This reduces the effective acquisition period to 1 10 of the scan period The following examples illustrate scan period in relation to acquisition periods 1 You are measuring a wafer with five sensors and you set the scan period for 200 milliseconds The Thermal TRACK device sets the ISIS acquisition period to 200 milliseconds 2 You are measuring a wafer with 17 sensors and you set the scan period for two seconds The Thermal TRACK device sets the ISIS acquisition period to 200 milliseconds Both examples have the same acquisition period and the same accuracy yet in the multiplexed Example 2 much more time must occur between each reading SensArray B 1 Thermal TRACK 4 User Manual Appendix B Scan Period and Accuracy Recommended Scan Periods To achieve maximum accuracy you should use the following recommendations for scan periods e For wafers with nine or fewer sensors at least 500 milliseconds The ADCs longest acquisition period is 500 msec Longer scan periods set the ADCs to a 500 msec acquisition period and only request data at the scan period e For wafers with more than nine sensors at least 5 seconds Multiplexed operation will be used You can perform experimental measurements at fast
34. ay tap on the top You can change the orientation repeatedly prior to saving Accept Rotation Cancel Rotation Period 2 sec 9 12 08 PM 2000 08 23 Menu 0 00 18 5 Stop After changing the orientation tap the Accept Rotation button to set the default wafer orientation when the wafer is measured Wafer rotation information is stored separately for each individual wafer Setting the rotation for one wafer does not affect other wafers Once stored the rotation is set for that wafer until modified and remains active the next time you measure with that wafer Wafer rotation is strictly cosmetic and has no effect upon logged data or measurement values Disabling Wafer Sensors SensArray If a sensor on the wafer returns measurements that vary greatly from those of surrounding sensors you can disable the sensor to prevent logging erroneous readings and prevent invalid measurement statistics By disabling a sensor no values are stored for that sensor nor is it calculated into any statistics To disable a sensor tap the sensor on the Data Display screen and select Disable RTD or Disable TC from the pop up menu 6 7 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement 228 5 229 5 227 3 227 6 228 Disable TC9 228 4 228 0 A disabled sensor s value shows as OFF on the Data Display screen To enable a disabled sensor tap on OFF and select the Enable RTD or Enable TC item from the pop up menu Note
35. bility by ensuring that changes in temperature do not significantly affect resistance See Appendix C Using Resistance Calibration Standards for more information 1 9 Thermal TRACK 4 User Manual Chapter 1 Overview NOTES Thermal TRACK 4 User Manual 1 10 SensArray Chapter 2 Getting Started This chapter explains how to connect power to the device log on use the touch screen and set up your Thermal TRACK device Connecting Power Thermal TRACK operates for approximately 10 hours on the internal batteries when fully charged The system operates indefinitely when connected to the DC power supply To supply power and charge the batteries plug the DC power supply into the input socket on the base of the unit When long periods of non operation are planned more than a week the DC power supply should remain connected to prevent depleting the batteries Turning On the Device To turn the device on or off press the Power button Tapping on the Touch Screen In describing how to operate the Thermal TRACK user interface this manual refers to tapping the stylus operation similar in functionality to clicking with a mouse button Y ou tap on the PDA screen to operate a button open a menu select from a menu or to place the cursor for text entry To tap touch the stylus to the screen For example when logging on you tap the Log On button on the screen To avoid breaking the glass display when tapping or wri
36. copyrighted material Under the Copyright Laws the Thermal TRACK Software or accompanying written materials may not be copied photo copied reproduced translated in whole or in part without the prior written permission of SensArray You are granted a license to use one copy of the PDA Software installed on your Thermal TRACK hardware You are granted a license to use an unlimited number of copies of the Thermal TRACK PC Connection Utility Software installed on an unlimited number of computers You may make one copy of the Software solely for backup or archival purposes You may make ten copies of the written materials accompanying the SensArray Corporation produced Software provided that such copies are solely for use by personnel using the Thermal TRACK device All rights not expressly granted to you in this Agreement are reserved to SensArray Corporation Third Party Software Licenses for any software which was provided but not produced by SensArray Corporation are granted solely and only by the original supplier or manufacturer and solely and only with the supplier s limitations and rights Copying restrictions for such software are governed solely and only by the original supplier or manufacturer s license or any other supplier approved agreements as applicable Trademarks SensArray Thermal TRACK Thermal MAP and Process Probe are trademarks of SensArray Corporation Windows Windows CE Excel and CompactF
37. cted to a 62 pin high density sub miniature D type plug with a four wire resistance measurement configuration e An integral ROM identification chip that enables the Thermal TRACK device to identify the wafer After identifying the wafer Thermal TRACK selects compatible calibration and sensor configuration data files automatically e From one to 17 sensors are available on wafers from a 3 millimeter chip to a 300 millimeter diameter wafer For square substrates dimensions up to 650 by 650 millimeters are available Resistance Calibration Standards SensArray With SensArray s resistance calibration standards you can perform on site checks and calibrations of your Thermal TRACK devices that measure RTD sensors The standards enable calibrations that are traceable to National Institute of Standards and Technology NIST standards Having the calibration standards on hand allows the user to keep the Thermal TRACK unit as accurate as possible without having to return it to SensArray Corporation for calibration The resistance calibration standards consist of two modules that are similar in appearance to the connector that terminates each Process Probe wafer except that the connector shell houses high precision high stability calibration resistors The modules contain 17 resistors one per ISIS channel each soldered to the connector pins The resistors have a low temperature coefficient of resistivity TCR providing measurement sta
38. damage Thermal TRACK 4 User Manual vi SensArray Chapter 1 Overview Thermal TRACK 4 is a Pocket PC based tool that accurately measures semiconductor process and equipment parameters When connected to SensArray Corporation s Process Probe instrumented substrates Thermal TRACK measures in situ process wafer temperature in real time providing a powerful tool for troubleshooting temperature related critical dimension problems Because of its portable size and high capacity batteries Thermal TRACK is ideal for measurements of both short and long duration In conjunction with Thermal TRACK you can use the SensArray Thermal MAP system to analyze Process Probe wafer or substrate temperature profiles and system conditions Thermal MAP is a PC based hardware and software system that monitors wafer or substrate temperature and system conditions during semiconductor device or liquid crystal display LCD process equipment operation With the Thermal MAP Analysis software you can evaluate spatial and temporal temperature variations to solve process problems base upon the data collected by your Thermal TRACK device This chapter details the standard and optional components of Thermal TRACK Thermal TRACK Hardware The Thermal TRACK device has the following hardware components e Personal Digital Assistant PDA Hand held device that controls displays computes and stores data With the PDA you can collect data perform tests
39. device The software measures all channels even if the wafer has only a few sensors and displays the measurements in units of milliVolts You must download voltage calibration files prior to measuring milliVolts See Downloading Calibration Files in Chapter 5 for more information Measuring milliVolts from RTD sensors produces meaningless results 6 13 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement Running Predefined Test Parameters If you have created a test and downloaded the test file to the hand held device the test appears in the Test menu on the Thermal TRACK setup screen If multiple test files are loaded on the device you can select a test from the pull down menu After selecting a test from the menu tap the Test button to run it See Creating Test Definitions in Chapter 4 for more information on how to create a predefined test and download the parameters to Thermal TRACK If you downloaded the test definition but it does not appear in the Test menu verify that a compatible System list is also downloaded A test will not show up in the menu if you limited the test to systems that are not on system lists currently loaded Starting a Test On the Setup Screen the selected system has an available test The operator can run this test by tapping the Test button System Litho 1 Mfg Acme Model SuperMicro Other Data Full production system E Schedule downtime with process group Module Pre Spin
40. devices voids the warranty and can create hazards Use only the power supply provided with the device Thermal TRACK 4 User Manual 1 6 SensArray Chapter 1 Overview ISIS Status Indicators The base of the Thermal TRACK device contains the following LED indicators e Battery Status a two color LED When the LED turns Red it indicates that the DC line is inserted and that the battery pack is charging When the LED turns green it indicates that the rechargeable main battery pack is almost fully charged The light turns green at roughly 90 percent charge For about one additional hour of battery life you can charge the device for one hour after LED turns green If the batteries are completely depleted the LED turns green after about two hours of charging A full charge yields approximately 10 hours of usage time e Communications Status a two color LED When the LED is flashing yellow it indicates communication between ISIS and the PDA When the LED is green it indicates ISIS circuitry is powered Device Serial Communications The serial interface cable connects the Thermal TRACK device to the PC Using a cable other than the cable provided may prevent the Thermal TRACK device from communicating with the PC Carrying Case Transport and store the Thermal TRACK system in its impact resistant carrying case SensArray recommends that you store the Thermal TRACK system when not in use in the carrying case to
41. e device If the problem continues report the problem to SensArray 805306379 IsisErrorPacketDataTooLong A data packet sent from the ISIS contained more bytes in the packet than expected This should not occur The error can indicate a corrupted data packet possibly because of Thermal TRACK 4 User Manual D 2 SensArray z gt Q o0 E gt Q O z gt Q gt z gt Q Appendix D Error Codes Number Description electrical noise If the problem continues to occur it indicates either a hardware problem in the PDA or the ISIS or a problem in either the PDA software or the ISIS firmware and should be reported to SensArray DAQ 12 805306380 IsisAlreadyWaitingForIsisResponse Indicates a bug in the device software The device attempted to request information from the ISIS but the device was processing another request This should be reported to SensArray DAQ 13 805306381 IsisPacketReadTimeout The device did not receive communication from ISIS within the expected time This can indicate a variety of problems most typically the error indicates insufficient charge in the Thermal TRACK Lithium Ion batteries Try recharging batteries If the problem persists after connecting the Thermal TRACK to power attempt resetting the Thermal TRACK If the problem still persists it may indicate hardware failure DAQ 14 805306382 IsisPacketBadChecksum Corrupt communications packet was received fro
42. e the test completes You can create and redefine wafer restrictions with the Connection Utility See the Selecting Wafers for Test in Chapter 4 for more information SensArray 6 15 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement Test Results When the test is complete you can view the results in the Test Results screen Mean Upper Limit 222 000 Mean 227 922 Mean Lower Limit 218 000 Failed est temperature too far from setpoint El erify oven setting and repeat test when oven temp stabilizes f it still fails oven will need repair E Range Limit 1 500 Range 2 252 Failed Oven uniformity unacceptable Ensure El afer is positioned in oven properly en repeat test f it still fails oven will need repair Save Results Delete Results Ready By tapping on the Save Results button you elect to add the results to the history file for the system You can discard the result by tapping the Delete Results button You can customize messages that appear on the Pre Test screen and the Test Results screen See Creating Test Definitions in Chapter 4 for more information Transferring Test Results to the PC You can transfer test results to the PC using the Connection Utility See the Retrieving Logged Data in Chapter 5 for more information Thermal TRACK 4 User Manual 6 16 SensArray Chapter 7 Viewing and Managing Logged Data After acquiring and logging the measurements into a file
43. e wafer has an ID chip you should cancel the selection plug in the wafer and re initiate measurement When the measurement starts the acquisition display appears See the Viewing Data section Logging Data You have the option of logging wafer measurements By logging the results you can open the data log file for analysis later This section discusses setting scan period initiating logging and defining comments for logged data Set Scan Period Note SensArray You have the option of setting or changing the rate at which the Thermal TRACK device acquires data Select Menu Scan Period to open the Scan Period menu During measurements and tests you can observe your current scan period at the bottom of the main display 100 msec 200 msec 500 msec 1 sec 2 sec 5 sec 10 sec 30 sec 1 min 2 min 5 min You cannot change the scan period after measurement begins You must stop active measurements before you can change the scan period The scan period may not match the rate at which data updates on the screen For performance reasons the data display updates with a minimum period of one second When measuring for periods greater than five seconds new data displays every five seconds yet is logged to a file at the rate you set With short scan periods the ISIS has less time to perform measurements and subsequently accuracy and precision of the measurements are reduced For more 6 3 Thermal TRACK 4 User M
44. eadings over a specified time interval the average of the mean temperature for each scan during the interval e Average Range Value the cumulative average of Sensor Temperature Range over the same interval the average of the range of each scan during the interval To determine test success or failure you can compare the Average Mean Value Average Range Value or both to specific limits The Average Mean comparison is useful when testing for conformance to a set point With the Average Range comparison you can assess temperature uniformity With the Test Editor you enter information about the system configuration including set point and tolerance temperatures and setting and averaging times To open the Test Editor select Window Tests from the Connection Utility window m DUY Test tst Test Editor Miei x File Edit Window Help Test Definition File Test Name ENTMAPIDUV Test tst Peep uy Apply Test to these Modules Use Module Process NO a Process Post Exposure Bake Setpoint Settling Time 30 secs Averaging Time 30 secs Use Module Setpoint NO Setpoint 98 000 Tolerance on Average Mean Value 0 200 C Above Setpoint 0 200 C Below Setpoint Tolerance on Average Range Value 0 400 C y Test Comments Pre Test Install the 18404 8 5004 wafer on the chuck Carefully close the chuck cover on the wafer s flat cable PASSED Mean Tolerance Check Good FAILED Mean Tolerance Check Bad PASSED Ran
45. ection between your mobile device and this computer Click Finish to exit this wizard Sancel Help Thermal TRACK 4 User Manual 3 2 SensArray Chapter 3 Connection Utility Software 7 An ActiveSync shortcut appears on your desktop and ActiveSync automatically starts trying to connect to your PDA The New Partnership dialog box appears as shown below New Partnership Set Up a Partnership Before you can synchronize information between your mobile device and this computer you must set up a partnership between them Would you like to set up a partnership Set up a partnership so that can synchronize information between my device and this computer C No don t want to synchronize information Set up my device as a quest so that can copy or move information between my device and this computer 8 Select the Yes Option and click Next New Partnership Select Number of Partnerships Select whether you want to synchronize with just this computer Do you want your mobile device to be synchronized with only this computer Remove any existing partnerships on my device and set up a new partnership with just this computer C No want to synchronize with two computers Set up a partnership with this computer but do not remove any existing partnerships on my device lt Back Cancel Help 9 Select Yes I want to synchronize with only this computer and click Next The S
46. eeescceseceseensecuaeceaecnaecnsecsaecaeecseeeaeeeaeseeeeaeeeeeenseenaeeeaeenaeenaes A 5 Installing RAM Cards inthe PDA isinne Soh ae ites a Te eA a eb Recs A 5 TOUS AMA A tek tov sch an ies Suk io aa A 6 Problem Need to exit Thermal TRACK software on PDA 0oocooccnnoninncoonooononnnonnonnonnnco nono nono non n cono nn nnnnnrann rin nn A 6 Problem Device Ereezes Una Es A 6 Problem Bad Operation Continues after Reset ccccecccesceseceseessecseecseeeseeeseeeeeeseceseenseensecaecaecaecneeceeeeeeseenes A 6 Problem Resistance Calibration Needed Dialog Appeat csccssccsseesseesseeseeeseeseceeeesecesecesecaecnseceecaeeeeeeneeaes A 7 Appendix B Scan Periods and AccuUra2Cy oomoccmmmmss B L Scan Periods and Multiplexing 2 0 cceccsseesseescesseeesceecesecesecesecsaeeseceaeceaecsaecaaecaeeeaeeneseeesaeeeaecneeeeaeeaecaeeaeceeeaeeeneeaes B 1 R commended Scan Periods AMM vase sisncedubesebeevieasagacsesviveatassiiters B 2 Appendix C Using Resistance Calibration Standards ooocoonnconnnconnconncononcnnnnconancnnoconaconanocanoconooo Cl Downloading OHM Fil Sron a da A ER EE C 1 Starting the Calibration Measurement ias C 1 Performing a Calibration Checks cennin e E E Ea EE EEEE E REE EE EE Se C 2 Performing Full Calibre ERE C 3 Appendix D Error COGES sisssiccecseondatesecsscosdsssouessscasosesesnpesubess evessenonusenedsecesisevsvestedssesecssooussseusbeveouvee DEL Datalog File Error diia D 1 Data Acquisition Eros diia D 2 I
47. elect a Personal Information Manager dialog will appear SensArray 3 3 Thermal TRACK 4 User Manual Chapter 3 Connection Utility Software New Partnership Select a Personal Information Manager aa Select a program for synchronizing personal information t This computer has more than one personal information manager PIM that can be used to synchronize personal information on your mobile device For each of the following mobile device programs select the PIM you want to use for synchronization Calendar None Contacts None X Tasks None coe 10 Set all three options in the Select a Personal Information Manager to None and click Next The Select Synchronization Settings dialog appears New Partnership Select Synchronization Settings Select the type of information you want to synchronize To synchronize a particular type of information select its check box To stop synchronization of that information clear its check box Mobile Device DesktopComputer dd A AvantGo AvantGo Channels Calendar Not Installed Contacts Not Installed Internet Explorer OEY Files Synchronized Files E Inbox Microsoft Outlook r Notes Microsoft Outlook y To find out more about and to customize what gets synchronized click Settings on that information type in the list and then click Settings _ ee eee ee a 11 Verify that all options in Select Synchro
48. en hours without recharging If you check the Log Data box the Thermal TRACK software logs data immediately after starting data acquisition Data logs at the rate selected for the scan period select Menu Set Scan Period A dialog box notifies you when the timed measurement is complete Measuring Ohms Note For RTD wafers you can measure and view readings in terms of Ohms instead of temperature The Measure Ohms feature allows on site diagnosis of acquisition problems such as wafer sensor leads or wafer identification ID ROM errors After selecting Menu Measure Ohms the Thermal TRACK software begins measurements whether or not a Process Probe wafer is plugged in All measurements display as the resistance is measured across the RTDs The software measures all channels even if the wafer in use has fewer sensors The software ignores the identification chip in the wafer connector Measuring Ohms from TC sensors produces meaningless results Measure milliVolts Note SensArray For TC wafers you can measure and view readings in terms of milliVolts instead of temperature With the Measure milliVolts feature you can perform on site diagnosis for acquisition problems such as faulty wafer sensors leads or the wafer identification chip in the wafer connector By selecting Menu Measure milli Volts the Thermal TRACK software begins measurements whether or not a Process Probe wafer is connected to the Thermal TRACK
49. er rates to determine if a period shorter than 5 seconds is acceptable Thermal TRACK 4 User Manual B 2 SensArray Appendix C Using Resistance Calibration Standards To ensure accuracy of the Resistance Temperature Detector RTD measurement system the Thermal TRACK device should be periodically calibrated With SensArray s Resistance Calibration Standards you can obtain NIST traceable calibrations of the Thermal TRACK device without sending the system to SensArray for calibration The Thermal TRACK device automatically calibrates the input voltage range of the A D circuits prior to each data acquisition session However resistance calibration standards calibrate the current sources between the ISIS acquisition device and the Process Probe wafer RTDs Inside the plug in standards calibration resistors built of highly accurate and highly stable thin metal foil are connected in a four wire measurement configuration With a ROM identification device built into each standard module the Thermal TRACK device automatically detects the presence of the calibration standard and performs calibration checks and calibrations of the ISIS Two separate standards are needed to calibrate the system e 1000 Q 0 C module e 1375 Q 100 C module Each module contains 17 calibration resistors Downloading OHM Files Before using the SensArray Resistance Calibration Standards you must download Ohm files associated with the stand
50. ermal TRACK to power attempt resetting the Thermal TRACK The recurrence of this problem may indicate hardware failure DAQ 51 805306419 IsisExecUserCancelledCal User cancelled an operation that cancelled an ISIS resistance calibration DAQ 52 805306420 User attempted a measurement that is not part SensArray D 5 Thermal TRACK 4 User Manual Appendix D Error Codes Number Description of the device capability For example attempting to measure an RTD wafer with a Thermal TRACK TC DAQ 53 805306421 IsisExecMissingSensorEnableConfig No device capability information has been downloaded to the PDA ISIS Response Codes Error Number Name Description 822083585 IsisAckAttention ISIS is requesting attention ISIS 2 822083586 IsisAckImitializing ISISwasinitializing unexpectedly ISIS 3 822083587 Isisackstackoverflow ISISfirmwaremalfunction ISIS 4 822083588 IsisAckPacketTruncated Corrupt communications packet was received by the ISIS This may indicate electrical noise in the environment The recurrence of this problem may indicate hardware failure ISIS 5 822083589 IsisAckOverrun ISIS was not able to process previous request before receiving new request This may indicate a bug in the ISIS firmware or in the PDA software ISIS 6 822083590 IsisAckCommErr Corrupt communications packet was received by the ISIS This may indicate electrical noise in the environment The recurrence
51. es teetaets lados 5 5 Retrieving Other E O N A EEA 5 5 Viewing Data in Thermal MAP Spreadsheets ss nenseeseneesseeeessesesseeresstseessesetstssteresstsresresesststessestestestesresestestsseene 5 6 Moving Test Results to Spreadsheet File sns nessseseeseeeesseseeseeseesessteresstsesrestestssteresstsestenesststesstseteressesesestesesseent 5 6 Chapter 6 Making a Measurementl cccsccsccscssccccsccsccscccsscccccsccccssccecssccecssscecssscesscssesscseeees L Overview of Measurement Mode aN E A EEE ES 6 1 Overview of Defined Tests A R N ys 6 1 Initiating Measurements ioeie eie e E EE REE E KE EE OE EEEE Et 6 2 Connecting Process Probe Wafers icenic ieg e E EA E asi 6 2 Selecting System and Module R E EREE E EEEE EEG 6 2 Starting the Measurement iaa 6 3 Logging D ta a 6 3 Set Scan Ptas 6 3 Start Lob gih g one e E E A E E E EE a Theses E a AE AE E E ed Meee 6 4 Comments before Logging Data aii 6 4 Memory Indicators 6 4 Log Naci a A E EEE EEE AIEEE A EL EE EEEE 6 5 Viewing Data imReal TIME A io 6 5 Changing Precision Displayer o Gee od 6 5 C ld Junction Compensation netere a E ode 6 5 Viewmge MM oa ees 6 6 Show Sensor Labels isorotan eeaeee i cdo 6 6 Thermal TRACK 4 User Manual ii SensArray Table of Contents A O dimes Uaioe 6 7 Disabling Water Sensors eel adoos 6 7 A erase cach wae sbi oe owe Ria od neon fan ee aes A edema peerage Aaa ae aes 6 8 Strip Chart Model A 6 9 Strip Chart Scaling cias 6 9 Stri
52. f both types of batteries require replacement always replace the main Li ion battery pack first Replacing Main Li ion Battery Pack You need one new battery pack 1 Turn the device power off 2 Remove the PDA see the Removing PDA from Case section of this Appendix 3 Place the PDA face down on a clean surface 4 Insert the stylus into the hole directly below the main battery cover Push the stylus in to unlock and pull up on the end of the cover Remove the cover from the case 5 Remove the main battery and load the new battery in the compartment in the same orientation 6 Replace the main battery cover and press down firmly until the cover locks in Failure to fully lock the cover will prevent the PDA from powering on 7 Verify that the PDA powers up You may need to reset the PDA 8 Reinstall the PDA into the Thermal TRACK device Thermal TRACK 4 User Manual A 2 SensArray Appendix A Maintenance and Troubleshooting Replacing Back up Battery You need a new CR2032 lithium battery 1 2 3 4 8 9 Turn the device power off Remove the PDA see the Removing PDA from Case section starting on page A 1 Place the PDA face down on a clean surface Insert the stylus into the hole directly above the back up battery cover Push the stylus in to unlock and pivot the battery compartment cover Swing the battery compartment cover out to completely expose the battery Remove the main battery and lo
53. fers with ID chips be used because of the unique calibration information associated with each RTD wafer When Thermal TRACK detects a wafer that has no ID chip the default action is for the PDA to display a selection list showing all the wafer configurations installed on the PDA Select one of the listed names This must be done each time a measurement is made By tapping on Menu Wafer Config Options the Wafer Config Options screen appears When wafer panel has no ID chip O Display selector O Cancel operation O Always use this selection Select When wafer panel DOES have ID chip O If auto selection Fails display selector O If auto selection Fails cancel operation O Always display selector O Always use this selection ESA Select Cancel The Wafer Config Options screen provides the user with greater flexibility than just having default settings The options break down as follows When wafer panel has no ID chip This group of options are effective when a measurement is initiated with no ID chip present e Display selector The wafer selection list is displayed at measurement time and the user is to select one of the wafers Default e Cancel operation The software will refuse to make a measurement 8 3 Thermal TRACK 4 User Manual Chapter 8 Thermal TRACK Menu Items e Always use this selection This is used in conjunction with the Select butto
54. ft ActiveSync Install Connection Utility Software See Chapter 3 Insert the wafer configuration file diskette that ships with your wafer and run the installation program Install Wafer Configuration File Download Wafer Configuration File to PDA See the Downloading Configuration Files section of Chapter 5 Thermal TRACK 4 User Manual 2 4 SensArray Chapter 3 Connection Utility Software The Connection Utility software is an application program you run on a host PC to create user system and test parameters that run on the Thermal TRACK system Additionally you can transfer configuration files and data between the host PC and the Thermal TRACK device with the Connection Utility You can also install Thermal TRACK software onto the device The Connection Utility can be used with Thermal TRACK 2 3 and 4 Before Installing the Software Note Before installing the Connection Utility perform the following items e Verify that your PC and operating system meet the system requirements See the Connection Utility System Requirements section in Chapter 1 for more information e Install Microsoft ActiveSync the program is provided with the system on a CD ROM If you do not have Thermal TRACK 4 devices and are only using Thermal TRACK 2 or 3 devices you can continue to use Microsoft Windows CE Services instead of ActiveSync ActiveSync provides much more reliable connectivity and SensArray strongl
55. ge Tolerance Check FAILED Range Tolerance Check 4 5 Thermal TRACK 4 User Manual Chapter 4 Creating System User and Test Lists Enter a name for the test in the Test Name block If you save the test definition without a test name the program will automatically assign the name Not Named to the test definition that appears in the setup screen Setting Test Parameters stParameters To define test parameters including set point and tolerance temperature and setting and averaging times press the Test Parameter button to open the Edit Test Parameters window Edit Test Parameters Ed Process oa OK Post Exposure Bake Setpoint Use Module Process Cancel Setpoint 98 000000 Scan Period 1 sec bi Use Module Setpoint CES Tolerance On Average Mean Value Ti age 0 200000 C Above Setpoint Settling Time secs 0 200000 C Below Setpoint Averaging Time secs Tolerance On Average Range Value Eo lod O E The following table describes the fields and check boxes on the Edit Test Parameters Because the device s display has limited space you should limit text entries to the area provided Fields Check box Function Process The process step performed with the equipment If you check the Use Module Process box the process description associated with the system in the System Editor is used and you do not need
56. he Map represents an overview of the entire log of sensor measurements shown from the sensor location on the wafer or substrate By moving the scroll bar at the bottom of the Map you can view separate snap shots of wafer temperature acquired at the same time interval By moving the scroll bar from left to right the Map shows measurements from the earliest to latest ART on 2281 OA RTD2 RTDIS 227 3 228 8 f RTDS N 228 3 A RTDS RTD12 j 227 5 229 3 Rro RTD4 RTD9 RTD14RTD17 RTD6 RTD13 j 227 4 228 1 RTD10 4 i 227 8 RTD3 RTDI6 227 3 227 7 pipe ME A D A A CUD elapsed time 0 00 00 5 elapsed time 0 00 28 0 Map List Chart Table Info Map List Chart Table Info Tapping on the Display menu allows the user to chose between the Label view left and the Data view right List Display With the List display you can view temperature measurements in relation to its sensor identification such as TC7 The List display has two scroll bars e Horizontal scroll bar changes the time interval Notice that the Time field advances or declines according to how you move the scroll bar e Vertical scroll bar changes the view of the sensors The List displays 14 sensors on the screen For example if you want to view TC1 move the scroll bar up Thermal TRACK 4 User Manual 7 2 SensArray Chapter 7 Viewing and Managing Logged Data a Time 0 00 00 5 RTD1 2
57. hermal TRACK device Downloading Files to the Device This section discusses transferring files from the host PC to the Thermal TRACK device Downloading Wafer Configuration Files When you receive a new Process Probe wafer from SensArray the wafer configuration file WAF is located on the accompanying diskette The WAF file contains information for your specific wafer including identification parameters After installing on the PC you should download the wafer configuration files to each Thermal TRACK device that will use the wafer 1 Insert the Wafer Configuration diskette into the PC disk drive 2 Run the Setup Exe on the diskette 3 On the Connection Utility select Download Wafer Config choose the file you want to download and press OK Downloading Calibration Files Voltage Calibration CAL and Resistance Calibration RTD files store coefficients that are determined during calibration of Thermal TRACK ISIS hardware and are used to correct the ISIS electrical values during acquisition 1 Insert the Calibration File diskette s into the PC disk drive 2 Run the Setup Exe on the diskette SensArray 5 3 Thermal TRACK 4 User Manual Chapter 5 Downloading and Retrieving Data 3 On the Connection Utility select Download Calibration File and select the file you want to download and press OK You have the option of selecting file types from the following pull down menu Files of type fan Calibrati
58. ho 1 Duplicate Delete Rename New Module Properties Thermal TRACK 4 User Manual 4 2 SensArray Chapter 4 Creating System User and Test Lists Selecting Properties opens the following Module Properties window where you enter information including system set point and correction offset For example on a Post Exposure Bake process the Setpoint could be 100 C with an Offset of 1 35 C Module Properties Ed Name PEB 7 Process Post Exposure Bake Setpoint Offset fi 00 000000 fA 3A Other Data Typically the Setpoint matches the recipe setpoint of the modules The Offset field can be used to store the setpoint correction offset if applicable to your equipment Press the OK button to save the information To add additional modules to the list select the Edit New Module menu on the System Editor window or right click in the System List window and select New Module If your list includes several similar systems or modules you can click on the system or module name and select Edit Duplicate A copy of the system parameters appears in the list To change the parameters of the new system select Edit Properties You can duplicate individual systems as well as modules You can delete systems by clicking on the system name and selecting Edit Delete or right clicking on the name and selecting Delete Optionally you can press the lt Delete gt key Saving and Editing System Lists After complet
59. ial or incidental damages Products that have been subject to abuse misuse accident alteration neglect or unauthorized repair or installation are not covered by this warranty SensArray will make the final determination as to the existence and cause of any alleged defect SensArray is not responsible for maintaining or supplying any consumable materials used in conjunction with this hardware and SensArray is not liable for expendable items such as fuses lamps paper ink etc No warranty is made with respect to any customized equipment or Products supplied with Thermal TRACK where produced to Purchaser s specifications except as specifically stated in writing by SensArray in the contract for such Products The purchaser will pay the shipping costs of returned materials to SensArray SensArray will pay the cost of shipping repaired replaced material to Purchaser This Warranty is the only warranty made by SensArray with respect to the Product delivered hereunder and may be modified only by a written instrument that is signed by a duly authorized officer of SensArray and accepted by Purchaser Except as provided above SensArray makes no warrantees expressed or implied including any warranty of merchantability for a particular purpose Software License Agreement The Software is owned by SensArray Corporation and is protected by United States copyright laws and international treaty provisions Therefore you must treat the Software like any other
60. ing the system list save the parameters by selecting File Save or Save As System list files have a stm extension To edit a system list open the System Editor Window Systems select File Open and choose the list to edit with the file dialog box Downloading System Lists to the Device See Chapter 5 Downloading and Retrieving Data for more information SensArray 4 3 Thermal TRACK 4 User Manual Chapter 4 Creating System User and Test Lists Creating User Lists You use the User List Editor to set a registry of Thermal TRACK operators and establish a Personal Identification Number or PIN for each After setup the Thermal TRACK device uses the operator data to record the name of operator performing a given test or measurement Each Thermal TRACK device has a default operator account called Guest The guest account has no PIN and cannot be modified or deleted With the guest access privileges an operator can perform all Thermal TRACK functions except changing preferences The Guest account does not appear in the User List Editor From the Connection Utility main window select Window Users to open the User List Editor User List Editor lx File Users Window Help User List Name NewUser EEEE In the Name field enter the user s name and select a four digit PIN for the user in the right side of the window To add users select Users Add Above or Add Below To delete a user click on the na
61. iods for data measurement To change the period of time for scans tap Menu Scan Period to open the Scan Period screen 100 msec 200 msec 500 msec 1 sec 2 sec 5 sec 10 sec 30 sec 1 min 2 min 5 min For performance reasons the data display updates at the maximum period of one second At faster scan rates the ISIS has less time to perform measurements which may affect accuracy and precision of the measurements See Scan Rates and Accuracy in Appendix B for more information on scan rates and data integrity When logging data to a file data is logged with the period specified with this selection You can observe your current scan at the bottom of the main display When measuring with periods greater than five seconds new data displays every five seconds yet is logged to a file at the slower rate you set Thermal TRACK 4 User Manual 8 2 SensArray Chapter 8 Thermal TRACK Menu Items Wafer Config Options SensArray Process Probe wafers made by SensArray Corporation have an ID ROM embedded in the wafer connector to automatically identify the wafer to the Thermal TRACK device Configuration files are provided with these wafers and those files are then used with Thermal TRACK systems to provide the system information such as sensor configuration calibration etc Some wafers may not have the ID ROM embedded but may still be used by a customer At this time it is recommended when using RTD wafers only wa
62. iption expected error and means that the device checked for information from the ISIS but no information was currently available The error indicates that the device is successfully synchronized with the rate of communications packets arriving from the ISIS DAQ 23 805306391 Indicates a bug in the device software DAQ 24 805306392 IsisPinNumberOutOfRange Indicates a faulty wafer configuration file Specifically one or more of the connector pins specified in the file was out of range Allowed range is to 17 DAQ 25 805306393 Indicates a bug in the device software DAQ 26 805306394 Indicates a bug in the device software DAQ 27 805306395 IsisMissingVoltCal DAQ 28 805306396 IsisMissingOhmCal The PDA required a voltage calibration file CAL for the ISIS that was not available Try loading the correct file The PDA required an RTD calibration file RTD for the ISIS that was not available Try loading the correct file DAQ 29 805306397 Indicates a bug in the device software DAQ 30 1805306398 IsisNoChannelsEnabled DAQ 31 805306399 IsisInvalidPacket Format DAQ 32 805306400 IsisInvalidMethodRequest DAQ 33 805306401 IsisTooManyCoefs DAQ 34 805306402 IsisTooManyChannels DAQ 36 805306404 IsisSetupDuplicateChannel Thermal TRACK 4 User Manual D 4 Indicates a faulty wafer configuration file WAF Specifically the file contains no sensors information in the wafer configuration Corrupt co
63. is option is not typically useful but is provided in case a customer wants it e Always use this selection This is used in conjunction with the Select button Click on the Select button and select a wafer config file from the list This config file will be used for measurements when there is no ID ROM detected until the selected file name is changed or the option is changed This option is particularly useful when a customer routinely makes measurements with a wafer that does not have an ID chip Select the options desired in the two categories and click OK Data Manage Files By selecting Menu Data Manage Files you can rename or delete data logs and configurations See Managing Files in Chapter 7 for more information View Data By selecting Menu Data View Data you display a screen for viewing the contents of a data file See Opening Logged Data in Chapter 7 for more information Thermal TRACK 4 User Manual 8 4 SensArray Chapter 8 Thermal TRACK Menu Items Set Comment Y ou can include comments with each data file that Thermal TRACK logs You can enter the comments prior to performing acquisition and set the manner in which the software processes the comments when data logging begins In addition you can modify the comments after Thermal TRACK finishes logging data When you select Menu Set Comments the Set Comment screen displays Set Comment Prompt For comment before recording
64. ither a bug in the software or a problem with the operating system or a problem with the hardware Try resetting the PDA If this continues report the problem to SensArray DAQ 40 805306408 See description above DAQ 41 805306409 IsisReceived68333AD_data The user should never see this error code This error indicates a communications packet from the ISIS contained supplementary data besides normal scan data DAQ 42 805306410 IsisBadPacketDataLength Corrupt communications packet was received from the ISIS This may indicate electrical noise in the environment The recurrence of this problem may indicate hardware failure DAQ 43 805306411 IsisInvalidPacketFormatAtReadIsisC Corrupt communications packet was received onfig p AN gt from the ISIS This may indicate electrical noise in the environment The recurrence of this problem may indicate hardware failure DAQ 44 805306412 See description above D DAQ 45 805306413 See description above areVersion DAQ 46 805306414 See description above ID DAQ 47 805306415 See description above a DAQ 48 805306416 See description above ag DAQ 49 805306417 See description above DAQ 50 805306418 IsisExecPacketReadTimeout PDA did not receive communication from ISIS within the expected time This can indicate a variety of problems typically the error indicates insufficient charge in the Thermal TRACK Lithium Ion batteries If the problem persists after connecting the Th
65. l TRACK CompactFlash RAM card has 32 megabytes of storage space you may opt for more storage or maintain backup copies of the system The CompactFlash RAM card is mandatory The Thermal TRACK software will not run without the card You must purchase any additional RAM cards through your own vendor SensArray does not sell or supply the RAM cards other than the RAM card included with the system Using the PC Connection Utility and device software you can access all files stored in the RAM card storage If a card is removed and re inserted all the software and data log files remain intact on the card However you can delete the files from the device The PC Connection Utility and Thermal TRACK device s Data Viewer display all data log files on the RAM card Installing RAM Cards in the PDA SensArray This section describes installing a new or replacing an existing RAM card 1 Turn off the Thermal TRACK device 2 To install the RAM card remove the PDA from the ISIS unit as explained in the Removing PDA from Case section starting on page A 1 3 Carefully remove the existing RAM card using your fingernail to pry the card up Fully insert the new RAM card with the label on the card as shown Compag Computer Corporation 4 Replace the PDA into the ISIS unit 5 After installing the RAM card use Thermal TRACK as normal you do not need to apply any special settings to use the RAM card A 5 Thermal TRACK 4 User Manual
66. lash are trademarks or trade names of their respective companies Any other terms mentioned in this document that are known to be trademarks or service marks have been appropriately capitalized Use of a term in this document should not be regarded as affecting the validity of any trademark or service mark FCC Note This equipment has been tested and found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense CE Marking This equipment has been tested to EMC directives and standards EN55011 and EN61326 1 Table of Contents Using This Manta colada ita secdassaciecsesnsdocsasassdescadsiuctosucesevesdssdnsasscnatsssiscsccesose V Conventions Used in this Manual oooonnnoncccnonocaccnonnncnnnonnnnnonnnncnnnnnoconnnnnoronnnnnronnn a a e eana a aadi vi Chapter LOVE Lod Thermal TRACK Hire dio e 1 1 Thermal TRACK Soft ware A ti 1 1 Device SON Ware dede ol 1 1 PC Connection Utility
67. le Use the interface cable that shipped with your Thermal TRACK device 2 Plug the round mini DIN connector end of the interface cable into the Thermal TRACK device 3 Plug the 9 pin D connector end of the interface cable into the PC s 9 pin serial port socket For PCs with 25 pin serial ports you will need a suitable 9 pin to 25 pin adapter Preparing the PC and Thermal TRACK 3 or 4 Device for Transfer Note Note SensArray These instructions pertain to Thermal TRACK 3 and 4 devices only Interface cables for Thermal TRACK 2 are not compatible with Thermal TRACK 3 and 4 and vice versa Use the interface cable that shipped with your Thermal TRACK device To prepare the PC and device for data transfer complete the following procedures 1 Exit all software applications including the Thermal MAP Acquisition module that use the serial port to which you have the cable connected 5 1 Thermal TRACK 4 User Manual Chapter 5 Downloading and Retrieving Data 2 On the PC select Start Menu Programs Thermal TRACK Thermal TRACK Connection Utility 3 Select Communications Version 3 4 Communications Sel v Versions 3 amp 4 Version 2 gt 4 Turn on the Thermal TRACK device Open the Mobile Devices window from the PC desktop The connection may take a minute 6 If Communications are disabled select File Communications on the Mobile Devices window check the Enable Mobile Devices communica
68. lick on the ActiveSync Icon in the system tray and select Allow serial cable or infrared connection to this COM port e To use the Thermal MAP system 1 Disconnect the Thermal Track ISIS unit from the serial port 2 Right click on the ActiveSync Icon in the system tray and deselect Allow serial cable or infrared connection to this COM port 3 Connect the Thermal MAP ISIS unit to the serial port and 4 Start the Thermal MAP program Thermal TRACK 4 User Manual 3 8 SensArray Chapter 4 Creating System User and Test Lists Before initiating tests with Thermal TRACK you must first use the Connection Utility to create the measurement parameters With the Connection Utility you can also define tests for specific system equipment that include process information and detailed test instructions This chapter discusses using Connection Utility editors to create system user and test lists that you download from the PC to the device Creating System Lists The System Editor may be used to customize Thermal TRACK for the layout of the equipment in the production facility You can list specifications including manufacturer model numbers and other information about the system After saving the configuration as a system list file you can download the file to one or more Thermal TRACK devices When using Thermal TRACK devices operators can select the systems and modules that they are testing and view information
69. llowing formats wafer maps list displays strip charts and statistics After tapping the Measure or Test button or selecting one of the Menu Measure items the Data Display opens and allows you to select display modes by tapping the Map List Chart and Stats tabs Changing Precision Display During the measurement select Menu Display Precision to change the number of digits in the reading from zero to three digits for the Map List Chart and Statistics displays 0 Digits 1 Digit 2 Digits 3 Digits Cold Junction Compensation When viewing data from measurements from thermocouple sensors in real time wafer maps list displays strip charts and statistics you can check the Cold Junction Compensation Temperature CJC Temp The CJC Temp is the temperature of the connector socket where the wafer s thermocouple wire meets copper pins CIC Temp 28 1 Menu 0 05 16 0 Because the connector socket temperature affects the thermocouples actual measurement the CJC Temp compensates for changes to the connector socket temperature SensArray calibrates the reference junction sensor in the connector socket prior to shipment to provide very reliable and accurate data SensArray 6 5 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement Viewing the Wafer Map To view the Wafer Map select Map on the Data Display screen The Wafer Map shows an outline of the Process Probe wafer with readings that corre
70. m Requirements Software Requirements The Thermal TRACK Connection Utility software operates with the following operating systems only e Windows 95 e Windows 98 e Windows NT 4 0 e Windows 2000 Hardware Requirements e 486 33DX processor or greater Intel Pentium P90 or greater recommended e 32 MB of memory or greater for Windows NT 4 0 or 64 MB of memory or greater Windows 2000 e 8 MB of memory or greater for Windows 95 at least 12 MB recommended e 16 MB of memory or greater for Windows 98 at least 24 MB recommended e Hard drive with 15 MB of available hard disk space e Available 9 or 25 pin communications port adapter required for 25 pin communication port or mini DIN type connectors e CD ROM drive necessary for installing Microsoft ActiveSync software e If used in conjunction with Thermal MAP analysis software on the PC Windows NT 4 0 must be installed with 64 MB or greater of RAM and Windows 2000 must be installed with 128 MB or greater of RAM Thermal TRACK 4 User Manual 1 2 SensArray Chapter 1 Overview Thermal TRACK Configurations Currently Thermal TRACK is available in configurations that interface with the following sensor types Resistance Temperature Detector RTD Process Probe instrumented wafers and substrates only Thermocouple TC Process Probe instrumented wafers and substrates only using an Interface Adapter RTD and TC Process Probe instrumented wafers and subs
71. m the ISIS This may indicate electrical noise in the environment If the problem continues to occur it may indicate hardware failure DAQ 15 805306383 IsisOperationCancelled User cancelled an operation or the software automatically cancelled an operation DAQ 16 805306384 isisStillWaitingForPacket Device attempted to wait for a data packet from the ISIS when in the process of waiting Typically this error should not appear Try resetting the device After resetting the recurrence of this error may indicate a software error DAQ 17 805306385 IsisUnableToLaunchReadEngine Indicates an error in the device operating system Try resetting device DAQ 18 805306386 IsisBadAgentReturnParameter A subroutine involved with ISIS communications received bad data from its caller Indicates a bug in the software DAQ 19 805306387 IsisUnableToCreateAgent Indicates an error in the device operating system The device should be reset If the problem continues it indicates a bug in the software DAQ 20 805306388 Indicates a bug in the device software DAQ 21 805306389 IsisUnexpectedIsisPacketCode Corrupt communications packet was received from the ISIS This may indicate electrical noise in the environment If the problem continues to occur it may indicate hardware failure DAQ 22 805306390 The user should never see this error This is an SensArray D 3 Thermal TRACK 4 User Manual Appendix D Error Codes Number Descr
72. me in the window and select Users Delete Saving User Lists Select File Save or File Save As to save the configuration to a file User List Files have a usr extension Editing User Lists After you have created and downloaded a user list to the device you can edit the user list However to safeguard against losing any changes to PINs currently loaded on the device you should first upload the user list by selecting Retrieve User List and selecting the list Once the user list is uploaded open the User Editor Window Users make the necessary changes and download the list on the device Download User List Thermal TRACK 4 User Manual 4 4 SensArray Chapter 4 Creating System User and Test Lists Creating Test Definitions Note SensArray Using the Test Editor you can define routine maintenance tests that Thermal TRACK performs You can establish test parameters comments and applications The predefined test scripts help to ensure that operators consistently perform routine tests on specific system equipment Before defining a test you must define the system configuration for the process equipment and save the configuration to a file After defining and transferring to the Thermal TRACK device the operator can select and execute the test before initiating a measurement on the device The test computes the following values e Average Mean Value the cumulative average of Sensor Mean Temperature r
73. mmunications packet was received from the ISIS This may indicate electrical noise in the environment If the problem continues to occur it may indicate hardware failure Indicates a faulty wafer configuration file Specifically a data conversion method sensor type listed in the file was invalid Indicates a faulty wafer configuration file Specifically for data conversion methods that use polynomials the order of 30 is the highest order polynomial The wafer configuration file contains more coefficients than for one or more polynomial conversion methods Indicates a faulty wafer configuration file Specifically the number of sensors listed in the wafer configuration file exceeds the capacity o the Thermal TRACK ISIS 17 maximum sensors Indicates a faulty voltage CAL or RTD RTD calibration file Indicates a faulty wafer configuration file Specifically a connector pin was listed two or SensArray Appendix D Error Codes Number Description more times in the file for multiple sensors DAQ 37 805306405 IsisSetupInvalidNumber0fCoefs Indicates a faulty wafer configuration file Specifically the number of coefficents listed for a sensor was less than zero DAQ 38 805306406 IsisNoWaferAttached Indicates a measurement was attempted but no wafer was attached The user should never see this error code DAQ 39 805306407 IsisErrorCannotSetrTS Problem initializing the serial port Indicates e
74. mum temperature appears at the right top of the chart the minimum value appears at the right bottom of the chart Tapping on the top values opens the Maximum Y scale box Tapping on the bottom value opens Minimum Y 7 Auto scale Fa a nr maA a i SensArray 6 9 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement The strip chart scale defaults to Auto scale To change the scale to a specific maximum or minimum reading uncheck the Auto scale box and enter your value Note If you enter a maximum value that is numerically smaller than the minimum value the software will adjust the minimum value to slightly less than the new maximum you entered Likewise if you enter a minimum value that is numerically greater than the maximum value the software adjusts the maximum value to a new minimum greater than the value you entered Strip Scope Mode You can change the view of the strip chart to scope mode in which data is updated on the screen from left to right continuously After data fills the screen the update point moves to the left of screen and then advances across the screen again The most recent measurements appear to the left of the update point the least recent measurements appear to the right of the update point This function can only be used while in the Chart display To view the scope mode select Menu Display Scope Mode To change back select Menu Display Strip Mode eae 224 537 List Cha
75. n Click on the Select button and select a wafer config file from the list This config file will be used for measurements when there is no ID ROM detected until the selected file name is changed or the option is changed This option is particularly useful when a customer routinely makes measurements with a wafer that does not have an ID chip When wafer panel DOES have ID chip This group of options are effective when a measurement is initiated with a ID chip present Auto selection refers to the default action of TTRACK where it reads the ID chip then finds the wafer config file for that ID chip Auto selection will fail if there is no wafer config file loaded on the PDA for that ID chip When Auto selection is enabled and is successful the user does not have to interact The software will determine the correct wafer config load it and then begin measurements e If auto selection fails display selector If there is no wafer config file loaded for that wafer then put up the wafer config selection list identical to that Display selector operation for no ID chips Default e If auto selection fails cancel operation If no wafer config file can be found for the ID ROM that was found then the software will refuse to make a measurement Identical to Cancel Operation mode for no ID chips e Always display selector The software will not attempt auto selection but will rely upon the user the select a wafer config from a list Th
76. n Utility To start the Connection Utility select Start Menu Programs Thermal TRACK Thermal TRACK Connection Utility The Thermal TRACK Connection Utility main window appears Thermal TRACK 4 User Manual 3 6 SensArray Chapter 3 Connection Utility Software Thermal TRACK Connection Utility 3 aca Iernstes Initially the Connection Utility window is locked The safe icon indicates the security status the safe door is closed when locked and open when unlocked When locked only a few features are accessible features that are useful to maintenance personnel on a daily basis such as downloading configuration files and retrieving log and test data files B Process engineers maintenance managers and related personnel can access the advanced features by selecting Security Unlock and entering a password Or click on the safe icon and the Enter Password screen opens Note You can use only one password You cannot assign unique passwords for individual users When first installed the default password is sensarray Passwords are case sensitive Passwords are stored on the PC in an encrypted state If you forget your password contact SensArray Corporation for recovery instructions In the Enter Password screen enter the password and press the OK button Enter Password After entering the correct password the door on the safe icon opens indicating the software is unlocked lante Iansier Ready for
77. n with the key characters ATTRIBUTES These key characters are called the Attribute Section Marker Within each section there are individual attributes that are identified by a single asterisk such as Time Below the attribute line is the data such as 10 57 AM After the attribute section is the data section marker paTa Under the data section marker is a line of column headings for the data followed by the data itself The data section is variable length and contains as many samples as the number in the Samples attribute If you intend to import the data to Thermal MAP edit the data items only and do not edit the markers or attributes Do not change the position or contents of the Attribute Section Marker the Data Section Marker the column headers or the attribute IDs Thermal MAP cannot import the data if these items have been altered You should only edit a copy of your data file Keep a backup present in the event of mistakes or other loss Thermal TRACK 4 User Manual 5 6 SensArray Chapter 5 Downloading and Retrieving Data Moving Test Results to Spreadsheet File Note Note SensArray You can transfer test results from predefined tests that you perform on the Thermal TRACK device to a spreadsheet compatible text file on the PC Each row in the spreadsheet file represents one test result The file logs the following fields e Date e Time e System e Module e Operator e Test e Process e
78. next action SensArray 3 7 Thermal TRACK 4 User Manual Chapter 3 Connection Utility Software To accomplish specific tasks with the Connection Utility refer to e Chapter 4 Creating System User and Test Lists e Chapter 5 Downloading and Retrieving Data e Appendix A Maintenance and Troubleshooting for using the Device menu Exit Device Software with Connection Utility You can exit the Thermal TRACK software running on the PDA device with the PC Connection Utility e Verify that the device is connected to the PC with Microsoft ActiveSync See Installing ActiveSync for more information e On the Connection Utility select Device Shutdown Device Software When you want to restart the software access the Thermal TRACK item on the PDA s Start menu or choose Device Launch Device Software on the PC Connection Utility or simply reset the PDA Running the Connection Utility and Thermal MAP You can use the Connection Utility for Thermal TRACK 4 and SensArray s Thermal MAP system on a computer running Windows NT 4 0 or Windows 2000 When using the software perform these procedures e To use the Connection Utility 1 Exit the Thermal MAP program 2 Disconnect the Thermal MAP ISIS unit from the serial port 3 Connect the Thermal Track ISIS unit to the serial port 4 Turn on the Thermal Track ISIS unit and 5 Verify that a connection is established with Microsoft ActiveSync If needed right c
79. nization Settings and NOT checked Uncheck any that are checked as needed and click Next The Setup Complete Dialog will appear Thermal TRACK 4 User Manual 3 4 SensArray Chapter 3 Connection Utility Software New Partnership Setup Complete You are now ready to start exchanging information between your mobile device and this computer Upon exiting this wizard Microsoft ActiveSync will open and If your device is a quest click Explore on the toolbar and start exploring your device If your device has a partnership synchronization starts Please wait until synchronization is complete before using your device Click Finish to exit this wizard 12 Click Finish to complete the partnership setup 13 Your desktop PC and PDA will be automatically connected and the Microsoft ActiveSync window appears and tells you that your unit is connected Microsoft ActiveSync File View Tools Help 9 o Ba E Sync Stop Details Explore Options Pocket_PC Connected Synchronized 1206PM 14 Locate the ActiveSync icon in the icon tray at the bottom of the display 15 Right click on the ActiveSync icon The ActiveSync popup menu appears Open Microsoft ActiveSync Synchronize Stop Resolve items Connection Settings Explore 16 Click on Connection Settings to view the settings dialog The Connections Settings dialog box appears SensArray 3 5 Thermal TRACK 4
80. omments 8 5 Thermal TRACK 4 User Manual parameters system 4 1 4 3 tests 4 6 4 7 PC based software 5 7 PDA overview 1 1 removing from ISIS A 1 tapping 2 1 PIN changing 2 3 power supply 1 6 RAM cards installing A 5 recharging circuit 1 6 re installing software A 3 reset the device A 6 Resistance Calibration Standards overview 1 9 using C 1 C 4 retrieving files 5 4 5 5 RTD files download 5 3 saving data 6 3 scale chart display 6 10 scan period affect on accuracy B 1 for a specific test 4 7 recommended settings B 2 setting 8 4 scope mode 6 10 screen SensArray calibrate 8 8 set contrast 8 6 sensor disabling 6 7 6 8 set device capabilities A 4 setting time 4 7 shut down 2 4 shutting down 3 7 sleep mode 8 6 software overview 1 1 spreadsheet files attributes 5 6 exporting 5 7 transferring data 5 6 5 7 standard components 1 4 1 7 statistics viewing 6 11 strip chart 6 9 stylus 1 5 system selecting for measurement 6 2 system lists 4 1 4 3 creating 4 1 modules 4 2 Index transferring data connecting cable 5 1 logged data 5 4 5 7 spreadsheet files 5 6 5 7 Thermal MAP files 5 6 troubleshooting A 6 memory initialization A 6 reset A 6 TTP files A 3 upgrading software A 3 uploading files 5 4 5 5 user changing PIN 2 3 defining information 4 4 user list creating 4 4 editing 4 4 table di
81. on the screen Refer to Managing Files in Chapter 7 and Retrieving Files in Chapter 5 for information on transferring files from the Thermal TRACK unit to the PC to free up memory Logging On to Thermal TRACK To log on to Thermal TRACK tap on the Operator menu to select a user name and tap the Log On button By using the Guest operator account anyone can acquire measurements however Guest operators may not be able to access protected functions of the software Therma TRACK 10 39 09 AM 2000 09 01 Ready LogOn When logging on as an operator other than Guest the Enter PIN prompt opens in which you enter your Personal Identification Number or PIN Thermal TRACK 4 User Manual 2 2 SensArray Chapter 2 Getting Started Enter PIN Note The default PIN for a new account is 0000 Y ou must enter the PIN correctly to log on Enter the PIN by tapping on the appropriate digits and tapping the Enter button Use the backspace button when necessary PINs when entered display as bullets All PINs must have four digits To add a new user to the user list see the Creating User Lists section in Chapter 4 Thermal TRACK systems ship from the factory with a non Guest account called User 1 This account has the default PIN of 0000 This account can be deleted when you create your own user list Changing User PIN After you log on as a user you can change the PIN By tapping Menu Change PIN a nume
82. on Files All Calibration Files Voltage Calibration Files Resistance Calibration Files Adapter Calibration Files Downloading Ohm Files Before using the SensArray Resistance Calibration Standards you must download Ohm files associated with the standards 1 2 3 Insert the OHM File diskette into the PC disk drive Run the Setup Exe on the diskette On the Connection Utility select Download Ohm File and select the file you want to download and press OK Downloading User System and Test Lists To use the user system and test lists that you created these list files must be downloaded to the Thermal TRACK device Use the Download menu to transfer the file Downloading System Lists While each Thermal TRACK device stores one system list you can download the individual system list to multiple Thermal TRACK devices To transfer a system list select Download System List and choose the stm file from the dialog box Downloading a new system list removes the previous list from the device Downloading User Lists While each Thermal TRACK device stores one user list you can download the individual user list to multiple Thermal TRACK devices To transfer a user list select Download User List and choose the usr file from the dialog box Downloading a new user list removes the previous list from the device Downloading Test Definitions While each Thermal TRACK device stores one test definition you can do
83. onfiguration Files section in Chapter 5 Selecting System and Module Before making a measurement select the System and Module you want to measure from the Setup screen The Setup screen opens after you log on System Litho Mfg Acme Model SuperMicro Other Data Full production system El Schedule downtime with process group Module Pre Spin Process 4 148 Offset 1 100 Setpoint 41 100 Other Data Installed 9 10 1998 El Test Uniformity Test y 10 53 15 AM 2000 08 23 Test Select valid systems modules and tests from the respective menu items If the menus do not display your tests or system lists verify that the test or system list was created and downloaded with the Connection Utility See Chapter 4 Creating System User and Test List and Chapter 5 Downloading and Retrieving Data for more information Thermal TRACK 4 User Manual 6 2 SensArray Chapter 6 Making a Measurement Starting the Measurement After connecting the Process Probe wafer and selecting a system and module tap on the Measure button or select Menu Measure to start a measurement If you selected a predefined test in the setup window tap the Test button To run measurements without a predefined test select Menw Measure If you start a measurement before connecting a Process Probe wafer the Thermal TRACK device displays a wafer configuration selection screen to manually select the configuration If th
84. p Scope Modez 62 ccs2eFscececesssuss atedeas cabs acekeg E vecsa gee dee eae aca E E E te vsac dues EE ee enced ahve 6 10 Viewing Waller Statistics a aii 6 11 SS A 6 11 Performing Other Measurements ceceo iiei o i EE A E EEE EE EE EEE E T EEE 6 12 Timed Measuiremientt a ta 6 12 Meas ring AA is 6 13 Measure milliv Ol 25 sieve ete Sterne ete revs aches tapioca ss ch cepa KE read AE de eee ee 6 13 Running Predefined Test Parameters iaa 6 14 Starting a ESti onore dagees ce R beets vse ER E EEN RER A dd eu Gav scc eve EEG nae Eds ev 6 14 Rumming the Test cic sccc ssc lecs ai 6 15 Test Results in ARE 6 16 Transferring Test Results to the Plus A E 6 16 Chapter 7 Viewing and Managing Logged Data ocoococcoonnccoonnococnnccocnoconnnoncancnanacccnaccconnaccnnacanos Do Opening Logged Dita A leo 7 1 Map Display e aE E EES E Ben teh oes sen ie eens ho enc cee ae 7 2 Eist Display deog a a a SAG Wass Hest antes ase ia cost coh Ses eaten ots doi Roi 7 2 Chart Displayen ees BGs Ses i ed et a ee eed 7 3 Chiat e cd 7 4 Zooming on Chart Display ii A E eee ee 7 4 A A O 7 5 AA A O 7 5 Ma es e eee 7 6 Managing Data Lo io eee 7 6 Managing Test Wafer and Calibration Files ccccccscecsseesceseeeseeseceeeesecencenaeceaecaaecaeecaeeeaeeeaeseeeeeenaeenaeenseenaeenaes 7 8 WransterrngDatarto the PC a sic actos ye ao 7 8 Chapter 8 Thermal TRACK Menu temS eessoesssesssessoossoosssossssesssecesoossoossssesssesssoessoosssossssesssees S L
85. ping the Calibration Check button on the Calibration Selection screen the Thermal TRACK device performs the following e Measures the resistance of the connected calibration standard e Compares the measurement with the known values of the resistors e Displays any deviation in C equivalent This process takes approximately 60 seconds When a calibration measurement is in progress a progress indicator shows how much time remains in the measurement You can stop the measurement before completion by tapping the Stop button When the calibration check measurement is complete the results display on the Cal Check Results screen Thermal TRACK 4 User Manual C 2 SensArray Appendix C Using Resistance Calibration Standards Cal Check Results 1 0 014 2 0 004 3 0 007 4 0 006 5 0 008 6 0 008 7 0 001 8 0 004 9 0 005 10 0 008 11 0 010 12 0 004 13 0 007 14 0 004 15 0 005 16 0 006 17 0 002 OK In general if any channel shows a difference greater than 0 05 C you should allow Thermal TRACK device to settle to the temperature at which the device was calibrated or you can perform a new calibration Performing Full Calibration To calibrate a Thermal TRACK device perform the following 1 Plug a resistance calibration standard into the 62 pin connector port of the Thermal TRACK device Note You use both modules to perform a calibration but the order in which the modules a
86. pires 2000 10 06 volt Cal Date not available Adapter Cal Date not available 2000 07 08 12 15 57 AM Log Off SensArray To log off select Menu Log off The log on menu reappears A new user can now log on 8 9 Thermal TRACK 4 User Manual Chapter 8 Thermal TRACK Menu Items NOTES Thermal TRACK 4 User Manual 8 10 SensArray Appendix A Maintenance and Troubleshooting This appendix explains how to perform periodic maintenance for the Thermal TRACK device and troubleshoot problems Calibrating Devices Periodically the Thermal TRACK device should be calibrated To check the date of the most recent calibration open Menu About and tap on the Cals tab For Devices Measuring TCs Note To maintain measurement accuracy Thermal TRACK devices that measure TCs must be calibrated once each year After one year from the previous calibration the device will display a warning message such as The ISIS is overdue for voltage calibration You can perform measurements but the results may be inaccurate At this point you should send the Thermal TRACK device to SensArray for a voltage calibration Unlike the resistance calibration described below voltage calibrations must be performed at the factory For Devices Measuring RTDs To maintain measurement accuracy you can periodically calibrate Thermal TRACK devices that measure RTDs With SensArray s Resistance
87. protect it from damage The carrying case has pockets for storing power cables and the interface adapters SensArray 1 7 Thermal TRACK 4 User Manual Chapter 1 Overview Additional Components SensArray Process Probe instrumented wafers and substrates and Resistance Calibration Standards are sold separately TC Process Probe Wafers and Substrates With Thermal TRACK devices you can measure a variety of SensArray thermocouple instrumented Process Probe wafers and substrates that are designed to meet your specific test needs The thermocouple instrumented wafers and substrates include the following features e Thermocouple sensors connected to a 37 pin sub miniature D type plug e An integral ROM identification chip that enables Thermal TRACK devices to identify the wafer After identifying the wafer the Thermal TRACK software selects compatible calibration and sensor configuration data files automatically e From one to 17 sensors are available on wafers from a 3 millimeter chip to a 300 millimeter diameter wafer For square substrates dimensions up to 650 by 650 millimeters are available Thermal TRACK 4 User Manual 1 8 SensArray Chapter 1 Overview RTD Process Probe Wafers and Substrates SensArray s Process Probe RTD instrumented wafers and substrates are designed for use with the Thermal TRACK device The RTD instrumented wafers and substrates include the following features e 1000 Q RTD sensors conne
88. re ISIS 20 822083604 IsisAckRequiresCalibration ISIS received command to begin scanning but has not performed a self calibration Indicates a bug in the device software ISIS 21 822083605 ISIS has data available for the device ISIS 22 822083606 fisisackBufferoverrun ISIS firmware malfunction ISIS 23 822083607 IsisAckInvalidScanRate Device requested an invalid scan rate from the ISIS Indicates a bug in the device software ISIS 24 822083608 ISIS firmware malfunction ISIS 25 822083609 ISIS firmware malfunction ISIS 26 822083610 IsisAckAwaitingTrigger Device still waiting for trigger to begin measurement Indicates either a bug in the PDA software or in the ISIS firmware ISIS 27 822083611 IsisAckNeedConfigData Indicates a bug in the device software Device did not properly configure ISIS before beginning measurement ISIS 28 822083612 IsisAckADErr ISIS hardware malfunction Analog to Digital converter error ISIS 29 822083613 IsisAckInvalidID ISIS factory configuration error The factory configuration information in the ISIS is faulty You should return the ISIS to the factory for re configuration General Thermal TRACK File Errors Error Number Name Description 536870913 fileErrFailedRead Unable to read from file Indicates either the file is corrupt or a bug exists in software FILE 2 536870914 Corrupt data file FILE 3 536870915 fileErrCannotOpen Unable to open a file Possibly the file is read
89. re inserted does not matter 2 Tap the Test Measure button or selecting Menu Measure on the screen 3 On the Perform Calibration screen tap the Full Calibration button SensArray C 3 Thermal TRACK 4 User Manual Appendix C Using Resistance Calibration Standards When the calibration measurement on the first resistance calibration standard is complete the following screen displays Thermal TRACK of First calibration point determined Insert second Resistance Calibration Standard and perform a measurement to complete calibration Tap OK to close the screen Unplug the first module connect the second one and start a measurement When measurement of the second module is complete the following message appears Thermal TRACK 4 User Manual D Calibration file has been updated successfully C 4 SensArray Appendix D Error Codes This index contains the following Thermal TRACK error codes datalog file errors data acquisition errors ISIS response codes general Thermal TRACK file errors Typically you will not need these codes However in certain error conditions this information may be useful Some of the codes do not indicate actual error conditions but indicate stages of normal operation You may never see some of these codes because the PDA software handles many of the codes completely Datalog File Errors Number Error Name Description
90. rent batteries to power the system e Rechargeable main pack Lithium Ion battery pack that powers both PDA and ISIS e PDA main battery Rechargeable Lithium Ion battery pack The PDA will not boot without this battery If the software is not running and the main pack becomes depleted the PDA will run from these batteries e PDA backup battery Small non rechargeable Lithium coin sized cell that protects the contents of PDA memory if the main pack and the PDA main batteries become depleted However the PDA backup does not provide sufficient power to run the PDA Warning The PDA indicates when the backup battery reaches low levels at which time you should replace the backup battery If the unit will not be used for an extended period leave the Thermal TRACK device connected to the power supply to prevent depleting the batteries See Appendix A Maintenance and Troubleshooting for more information Line Power Supply The line power supply is connected through the DC Power Connection Socket on the base of the Thermal TRACK device You can use the line power supply in the US and Japan without adapters A worldwide input power rating of 100 VAC 240 VAC 50 60 Hz eliminates the need for country specific power supplies With an output of 12 VDC at 2 5 amps the supply sends power to the Thermal TRACK device through a 72 inch 183cm line cord and a 42 inch 107cm DC cable Note Connecting other types of power supplies to Thermal TRACK
91. ric keypad displays on which you can change your PIN number This keypad is identical to the keypad that displays when you log on to Thermal TRACK To change your PIN complete the following steps 1 Enter the original PIN in the prompt and tap the Enter button 2 Enter a new PIN by tapping the digits and tap the Enter button 3 To confirm the choice enter the new PIN again Note While you cannot determine a forgotten PIN directly on the device you can obtain the PIN numbers stored on the Thermal TRACK device by retrieving the device s user list with the PC based Connection Utility See Creating User Lists in Chapter 4 for more information SensArray 2 3 Thermal TRACK 4 User Manual Chapter 2 Getting Started Shutting Down Thermal TRACK Devices You do not need to log off prior to powering down To shut down the Thermal TRACK device just press the Power button on the front of the ISIS unit If the device has no user or data acquisition activity during the sleep interval set with the Menu Settings Sleep In command the Thermal TRACK device turns off automatically Note Thermal TRACK devices do not power off during a data transfer or measurement even if the sleep interval expires Getting Started Flow Chart Before using Thermal TRACK you need to perform the tasks outlined in this flow chart Connect Power See Connecting Power section of Chapter 2 See Chapter 3 Installing ActiveSync EJ Install Microso
92. rm a full memory initialization See the next section for details Problem Bad Operation Continues after Reset Solution Perform a Full Reset If the device does not work correctly after performing a normal reset you may need to perform a full reset of memory A full reset restarts the PDA and removes all information stored on the internal memory This does not effect the program files and data stored on the CompactFlash RAM card 1 Remove the PDA from the Thermal TRACK device Thermal TRACK 4 User Manual A 6 SensArray Appendix A Maintenance and Troubleshooting 2 Verify that the PDA is turned OFF and not connected to any external source of power 3 Turn the PDA over 4 Remove both the main battery and the backup battery from the PDA as explained in this appendix 5 Wait at least one minute then replace the batteries 6 Turn the PDA over to the front and press the power button to restart the device 7 The startup screen and the Thermal TRACK software should reappear indicating a successful reset 8 Replace the PDA in the ISIS unit Problem Resistance Calibration Needed Dialog Appears Solution Perform Calibration with Calibration Standards With SensArray s Resistance Calibration Standards you can perform on site checks and calibrations of your Thermal TRACK device that measures RTD sensors See Using Resistance Calibration Standards in Appendix C for more information If you need Resistance Calibration S
93. rolling average of the most recent Mean values Similarly the Average Range represents a 2 10 30 60 or 120 second rolling average of the most recent Range values 6 11 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement Note Ifthe scan period is greater than the averaging window the time averaged values are the last reading made If you select the Cumulative item on the Averaging menu the samples are averaged until you select Menu Reset to begin averaging with the next scan The Reset menu item only appears when the Cumulative item is set for the Averaging window Note Values for all averaging windows are computed continually even when a value is not selected You can safely switch between various averaging windows without affecting averaging computations adversely If logging data the Averaging window calculates the values stored for Average Range and Average Mean Changing the averaging window selection during data logging can cause misleading results in the resulting data file for Average Mean and Average Range The length of the averaging window is recorded to data log files so you can detect such switches Changing the Averaging Window has no effect upon values stored or displayed for the individual sensors or for the Mean Max Min and Range statistics Performing Other Measurements In addition to temperature measurements you can perform timed measurements and Ohms and milliVolts measurements Timed
94. rt 12 39 17 PM CIC Temp 28 1 2000 08 23 gt Stop Thermal TRACK 4 User Manual 6 10 SensArray Chapter 6 Making a Measurement Viewing Wafer Statistics SensArray When making measurements and viewing the Data Display tap the Stats tab to view measurement calculations Mean Max Max Sensor Min Min Sensor Range Mean of Means Mean of Ranges Window hh mm ss Chart Stats Period 100 msec 7 57 46 PM CJC Temp 21 4 2000 08 23 Menu 0 01 49 3 Stop The Statistics Display shows mean temperature of all enabled sensors on the Process Probe wafer along with the following Mean arithmetic mean temperature calculated from all enabled sensors Minimum and Maximum temperature for all enabled sensors Minimum and Maximum sensors the sensors that exhibit the minimum and maximum temperatures Range between minimum and maximum temperature Mean of Means the average of the means of each scan during the interval specified by the Averaging Window Mean of Ranges the average of the ranges of each scan during the interval specified by the Averaging Window Window hh mm ss the duration for which the measurements were averaged See the Averaging Window section below Averaging Window For averaged measurements you can change the Mean and Range by selecting Menu Averaging By setting the rate for the Averaging window the Average Mean represents a 2 10 30 60 or 120 second
95. ry disconnecting the serial cable from the PDA DAQ 3 805306371 IsisErrorCannotGetCommstate Problem initializing the serial port This error indicates either a bug in the software or a problem with the operating system or a problem with the hardware Try resetting the device If the problem continues report the problem to SensArray 805306372 IsisErrorCannotSetCommState See description above 805306375 IsisErrorCannotClosePort Problem closing the serial port This error indicates either a bug in the software or a problem with the operating system or a problem with the hardware Try resetting the device If the problem continues report the problem to SensArray 805306376 IsisErrorPortNotInitialized Problem initializing the serial port This error indicates either a bug in the software or a problem with the operating system or a problem with the hardware Try resetting the device If the problem continues report the problem to SensArray 805306377 IsisErrorCannotReadPort Problem reading from the serial port This error indicates either a bug in the software or a problem with the operating system or a problem with the hardware Try resetting the device If the problem continues report the problem to SensArray 805306378 IsisErrorCannotWritePort Problem writing to the serial port This error indicates either a bug in the software or a problem with the operating system or a problem with the hardware Try resetting th
96. s not important enter large positive values that exceed expected conditions such as 1000 Both above and below values must be greater than or equal to zero Thermal TRACK applies the tolerances as follows Upper Limit Setpoint Above Setpoint Tolerance Lower Limit Setpoint Below Setpoint Tolerance Tolerance On Average Range Value A positive number that defines the largest average range value that is within specification If the tolerance of the Average Range value is not important enter a large positive value that is unlikely to be exceeded by Average Range such as 1000 When you finish entering test parameters press the OK button The test parameters display in the box under the Test Parameter button of the Test Editor window Inserting Test Comments Test Comments To associate comments with a particular test press the Test Comments button to open the Edit Test Comments window The comments will appear on the Thermal TRACK device screen when a test passes or fails SensArray Edit Test Comments x Pre Test Comment Install the 18404 8 5004 wafer on the chuck Carefully close the chuck cover on the wafer s flat cable Cancel gi Mean Check PASSED Mean Check FAILED Good Bad l Range Check PASSED Range Check FAILED l 4 7 Thermal TRACK 4 User Manual Chapter 4 Creating System User and Test Lists The following table describes the fields and check boxes on
97. splay 7 5 tapping 2 1 tests creating inserting comments 4 8 selecting system modules 4 8 setting parameters 4 6 4 7 definitions storing 7 8 logging data 6 14 managing parameters 7 8 parameters 4 6 4 7 running 6 15 setting definitions 4 5 4 10 specifying wafers 4 9 starting 6 14 6 15 viewing results 6 16 Thermal MAP spreadsheets 5 6 using with Thermal TRACK 1 1 with Connection Utility 3 7 Thermal TRACK configurations 1 3 time date setting 8 6 timed measurement 6 12 tolerance 4 7 transfer rates 8 8 SensArray version number 8 8 viewing data 6 5 6 8 statistics display averages 6 12 tests results 6 16 viewing real time data list display 6 8 scaling 6 10 statistics 6 11 strip chart 6 9 strip scope mode 6 10 WAF files download 5 3 wafer configuration files managing 7 8 RTD instrumented 1 9 specifying tests 4 9 thermocouple instrumented 1 8 wafer map disabling sensors 6 7 6 8 writing on screen 2 1 Z Zoom control 7 4 Thermal TRACK 4 User Manual Index NOTES Thermal TRACK 4 User Manual 4 SensArray
98. spond to the sensor temperature in C With the Wafer Map you can change the sensor labels and the wafer rotation 228 8 227 9 229 8 227 6 228 0 229 1 229 3 228 7 227 9 228 7 228 3 227 9 Map List Chart Stats 11 57 31 AM CIC Temp 28 1 2000 08 23 Menu 0 03 14 0 Stop Show Sensor Labels During the measurement you can change the Wafer Map display to read the sensor labels such as TC 1 by selecting Menu Display Show Labels To change the display back to readings select Menu Display Show Data TCS TCS TC12 TCO TC14 TC17 TC13 TC10 TC11 Map List Chart Stats 12 18 25 PM CIC Temp 28 1 2000 08 23 Stop Thermal TRACK 4 User Manual 6 6 SensArray Chapter 6 Making a Measurement Rotating the Wafer Map Note When viewing a Wafer Map during a measurement by selecting Map on the Data Display screen you can change the rotation of the wafer s appearance on the map You can change the orientation of the wafer display to match the placement of the actual Process Probe wafer in the system equipment To rotate the orientation of the wafer on the screen select Menu Display Rotate The Wafer Rotation function only appears during a measurement and when Map is selected on the Data Display screen After activating Wafer Rotation you tap on a portion of the map to change the orientation of the wafer notch For instance 1f you want to move the wafer notch to the top of the displ
99. t is numerically greater than the maximum value the software adjusts the maximum value to a value greater than the new minimum you entered Zooming on Chart Display With the Zoom control you change the horizontal time resolution of the Chart Display to focus on specific measurements To access the control tap on the Zoom menu and the following menu opens File Edit Display Pry Best Fit 1 66 X Custom 0 01 X 0 02 X 0 05 X 0 1 X 0 2 X 0 5 X 1x 2X 5X map List chart Table Info The Zoom control defaults to Best Fit which displays all measurements on the chart You can select Custom to enter a resolution of your choice or one of the predefined zoom resolutions 0 01 X to 10 X Thermal TRACK 4 User Manual 7 4 SensArray Table Display Chapter 7 Viewing and Managing Logged Data For a spreadsheet treatment of the measurement data tap the Table tab To view additional sensor data operate the horizontal scroll bar To view additional time stamps operate the vertical scroll bar Information Display The Information screen displays data pertinent to the acquisition including the time date wafer information and comments x Filename Comment System 1_Module 1_20000822_142232 l0g A A Date Time Operator wafer Part Wiafer Serial Sensors 2000 08 22 2 22 32 PM Guest 18404 8 5004 33793 17 Map List
100. tandards contact SensArray SensArray A 7 Thermal TRACK 4 User Manual Appendix A Maintenance and Troubleshooting NOTES Thermal TRACK 4 User Manual A 8 SensArray Appendix B Scan Periods and Accuracy Thermal TRACK can measure data at several scan periods 100 200 and 500 milliseconds 1 2 5 10 and 30 seconds and 1 and 5 minutes The periods can affect data accuracy With longer acquisition periods the ISIS performs more accurate measurements However there is a distinction between acquisition periods and scan periods An acquisition period is the length of time for the ISIS analog to digital converters ADC to make the measurements A scan period is the increment in which Thermal TRACK requests readings from the ISIS hardware To set the scan period for your measurement see Scan Period in Chapter 8 for more information Scan Periods and Multiplexing When reading wafers with nine or fewer sensors the acquisition period matches the scan period up to the maximum acquisition period available 500 msec However when reading wafers with more than nine sensors Thermal TRACK devices perform multiplexed acquisition resulting in an actual acquisition period that is 1 10 of the scan period Unless you use longer scan periods for wafers with more than nine sensors the accuracy of the data may be adversely affected because of settling time constraints for the ADCs in the ISIS The multiplexing occurs bec
101. the Allow All Modules box and click on the items in the Modules column that you want to include The systems PEB 6 and PEB 8 are selected To select multiple modules press the lt Shift gt and lt Ctrl gt keys Thermal TRACK 4 User Manual 4 8 SensArray Chapter 4 Creating System User and Test Lists Opening System Module Lists Select System Module List If you later choose to change the system list associated with the test press the Select System Module List button on the Select Modules screen From the dialog box select the system list file For more information on system track lists see the Creating System Lists section starting on page 4 1 Selecting Wafers for Test Note SensArray You can specify a list of SensArray wafers from which the operator selects to perform tests By restricting the test applications to certain wafers or wafer part numbers the operator cannot perform tests with wafers outside of the parameters you establish If the operator attempts to perform a test with a non specified Process Probe wafer a warning appears and the test is not performed In order for the wafer information to appear in the Select Wafers screen the configuration files associated with the wafers must be loaded in the c Sensarray Configs directory on the PC See the Downloading Wafer Configuration Files section of Chapter 5 for more information To specify Process Probe wafers for a certain test select the Apply Test
102. the Edit Test Comments window Fields Check box Function Pre Test Comment appears on the Thermal TRACK device after you select the test but before the test starts The comment can include instructions Mean Check Comment appears when the Average Mean Check measures within the PASSED tolerance range Mean Check Comment appears when the Average Mean Check measures outside the FAILED tolerance range Range Check Comment appears when the Average Range Check measures within the PASSED tolerance range Range Check Comment appears when the Average Range Check measures outside the FAILED tolerance range Selecting Modules for Test Ace Testtothese Modes You can apply individual tests to specific modules within the system list By restricting the test to certain modules the operator s test menu displays only the tests for the systems that you selected To specify a test for specific modules press Apply Test to these Modules on the Test Editor window When you first access the Select Modules a file dialog box opens from which you select the system list to associate with the test This system list must be the same one that you downloaded to the device Select Modules Ea Track DUYW 3 PEB 7 Track DU W 7 P EB 8 Track DUY 8 Cancel Allow All Modules Select System Module List To apply the test to all modules check the Allow All Modules box To apply the test to specific systems uncheck
103. the time by moving the hands of the clock or editing the digital time Set the date by tapping on the arrow beside the date to display a calendar Thermal TRACK 4 User Manual 8 6 SensArray Chapter 8 Thermal TRACK Menu Items Settings 10 58a ok Seattle WA y GMT 8 Pacific US v 10 58 08 4M l 8 22 2000 v Paris v GMT 1 Paris Madrid a 22 2000 Use the Home tab to locate or enter the name of your home city Use the Visiting tab to locate or enter the name of a city you plan to visit Utilities Calibrate Screen Determine how the stylus and the touch screen interact by selecting Menu Utilities Calibrate Screen align screen Tap the target firmly and accurately at each location on the screen The target will continue to move until the screen is aligned L SensArray 8 7 Thermal TRACK 4 User Manual Chapter 8 Thermal TRACK Menu Items When finished press the Actions button on the left side of the Thermal TRACK device If you enter the Calibrate Screen by mistake press the Exit button on the left side of the device to exit Link to PC The menu item Menu Utilities Link to PC initiates communications with Microsoft ActiveSync Typically you use this function only when having difficulty initiating communications between the PC and the device Link Options In order for the Thermal TRACK device and the PC to communicate correctly the transfer rates on each end must be set
104. ting do not tap forcefully Set Comment Prompt For comment before recording Type your comment here When entering comments attached to data files and renaming file names you can only enter characters on the PDA with the keyboard To use the keyboard tap the keys with SensArray 2 1 Thermal TRACK 4 User Manual Chapter 2 Getting Started the stylus As you type the software anticipates the word you are writing To insert that word tap on the word and it appears on the screen Monitoring Memory Capacity When you log measurements the data files are stored in memory on the Eg CompactFlash card The memory capacity indicator located on the right bottom portion of the screen helps you determine how much storage space remains in the E Thermal TRACK device The icon s quantity of gray shading indicates the lt q proportion of stored data to available memory The less shaded or gray the icon the more available memory the more shaded or gray the less available memory To view the amount of available memory tap on the icon and a dialog box will state the remaining storage capacity in kilobytes Note When available memory drops below 100 kilobytes the memory indicator flashes At this point you may continue to log data When available memory is exhausted the Thermal TRACK software stops logging In this state the device will not log measurements but will continue to make measurements and display the results
105. tion you can log the measurement data to a file Before performing a measurement you must use the Connection Utility to download the configuration files associated with the wafers See Downloading and Retrieving Data in Chapter 5 for more information To run a test you must create and download Defined Tests to the hand held device Overview of Measurement Modes You can initiate the following types of measurements from the Thermal TRACK menu e Measure Temperature Reads and displays the temperatures You have the option to log the data for later analysis e Measure Ohms A diagnostic measurement mode in which Thermal TRACK device reports the values in units of resistance Ohms without converting the measurements to temperature values See the Measuring Ohms section If your Thermal TRACK device is not configured for RTD sensors the Measure Ohms item will not be available e Measure milliVolts A diagnostic measurement mode in which Thermal TRACK device reports the measured values in milliVolts without converting the measurements to temperature values See the Measure milliVolts section starting on page 6 13 for more information If your Thermal TRACK device is not configured for TC sensors the Measure milliVolts item is not available e Timed Measurement A variant of Measure Temperature The Thermal TRACK device measures temperatures for a period of time that you specify See the Timed Measurements section You cannot s
106. tion is RTD only The RTD wafer connector plugs into the 62 pin sensor interface socket By using an optional Interface Adapter with a 37 pin D type connector socket the Thermal TRACK unit can connect to TC wafers To return to using RTD wafers the adapter must be removed Stylus You use the pen shaped stylus to operate most functions on the software by tapping at the appropriate location on the screen When not in use the stylus is stored in a sleeve on the base of the unit To remove the stylus from the sleeve pull out on the string Warning Use the stylus exclusively when tapping on the PDA screen Tapping with other SensArray objects can damage the screen and voids the warranty Do not damage the stylus tip If the stylus tip becomes damaged contact SensArray Corporation for a replacement 1 5 Thermal TRACK 4 User Manual Chapter 1 Overview Power Components This section describes how the device manages power including the recharging circuit batteries and line power supply Recharging Circuit The Thermal TRACK electronics include a battery charging and power management circuit for recharging the built in Lithium Ion battery and powering the device from a DC line source Note Recharge the built in Lithium lon battery using on y the recharging circuitry built into the Thermal TRACK device and with only the power supply provided with your Thermal TRACK device Battery Power Thermal TRACK uses three diffe
107. tions item and press OK 7 Verify that ActiveSync connects successfully by opening the Microsoft ActiveSync window The message bar should read Connected and display the user name Microsoft ActiveSync Me ES File View Tools Help o HRB Synce Stop Details Explore Options Guest Connected Preparing the PC and Thermal TRACK 2 Device for Transfer Note These instructions pertain to Thermal TRACK 2 devices only This version of the Connection Utility cannot be used to install new software on Thermal TRACK 2 devices Connect the interface cable that shipped with your Thermal TRACK device To prepare the PC and device for data transfer complete the following procedures 1 Exit all software applications including Windows CE Services and Thermal MAP Acquisition that use the serial port to which you have the cable connected 2 To exit Windows CE Services open the Mobile Devices window select File Communications uncheck the Enable Mobile Devices communications item and press OK 3 On the PC select Start Menu Programs Thermal TRACK Thermal TRACK Connection Utility Thermal TRACK 4 User Manual 5 2 SensArray Chapter 5 Downloading and Retrieving Data 4 Select the serial port under the Communications menu to which the cable is connected es Security Downle Versions 3 amp 4 v Version 2 COM 1 v COM 2 COM 3 COM 4 COM 5 COM 6 COM 7 CNM A 5 Turn on the T
108. to enter parameters in the Process field Setpoint The expected temperature of the module typically the setpoint of your recipe If you check the Use Module Setpoint box the test uses the setpoint that you specified in the System Editor and you do not need to enter parameters in the Setpoint field Settling Time The amount of time in seconds the Thermal TRACK device waits after the start of a test before measuring the wafer temperature The system acquires data during this period but the data does not influence the test results Averaging Time The length of time in seconds that the Thermal TRACK device averages wafer temperature readings to obtain the test results This excludes the settling time Scan Period The period between measurements during a test See the Set Scan Period section in Chapter 6 for more information Tolerance On You can specify Degrees C Above Setpoint and Degrees C Below Setpoint to set a Average Mean tolerance band delineated by an upper and lower limit around the setpoint Test Value result Average Mean values within the band are PASS and test results outside of Thermal TRACK 4 User Manual 4 6 SensArray Chapter 4 Creating System User and Test Lists Fields Check box Function the band are FAIL upper Limit Degrees C Above Setpoint Setpoint Do AAA EATE gt Degrees C Below Setpoint Lower Limit If the tolerance on Average Mean Value i
109. to the same speed With the Menu Utilities Link Options item you can set the serial transfer rate for the device The default rate is 115K Typically you will not need to change the transfer rate However the transfer rate of 115K must be verified when initially setting up the connection between the device and the PC For more information on transfer rates and initially setting up the connection see the Setting Modem Speed section of the Installing Windows CE Services document About By selecting Menu About information displays about the Thermal TRACK device including software firmware and calibration information SensArrav Thermal TRACK Thermal TRACK Hardware Cals Credits Application Version Available storage kilobytes 31484 0 Device Capability TC amp RTD Process Probe Instrumented Substrates Notice that you can gauge available memory storage and view the device capability Thermal TRACK 4 User Manual 8 8 SensArray Chapter 8 Thermal TRACK Menu Items From the Hardware tab view information about the device components The Cals tab displays the dates of calibrations From the Cals tab view calibration records for both voltage and resistance if applicable The Calibration About screen documents the date of the most recent calibration and its expiration date SensArrav Thermal TRACK Thermal TRACK Hardware Cals Credits RTD Cal Date ex
110. trates with the Interface Adapter and appropriate software and hardware configurations How to Upgrade If you purchased an RTD only configuration you can purchase an interface adapter and software that upgrades your Thermal TRACK to measure both TC and RTD Process Probe instrumented substrates Changes to the ISIS unit may be required to implement the new features Please contact SensArray Corporation for more information New for Thermal TRACK SensArray Thermal TRACK 4 has the following new features Connection Utility works with Thermal TRACK 2 3 and 4 thus simplifying the management of different versions of Thermal TRACK devices within the same workgroup A CompactFlash card is now used instead of the internal memory for storing data files This provides 32 megabytes compared to the six megabytes on Thermal TRACK 3 The user may upgrade the CompactFlash card to higher memory values 1f desired By using the CompactFlash card the program and data files are no longer subject to loss if the batteries are depleted 1 3 Thermal TRACK 4 User Manual Chapter 1 Overview Thermal TRACK Components This section discusses components included with Thermal TRACK 4 systems The drawings below display the location of indicators switches and controls on the Thermal TRACK device These drawings show a device with the RTD configuration and do not include the interface adapter Power Button Display Screen Tab
111. tton You can view or modify any comments stored with the log See Set Comment in Chapter 8 for more information Edit Comment To delete a log from the device tap the Delete button Note Deletions are permanent if you delete a log file it cannot be recovered SensArray 7 7 Thermal TRACK 4 User Manual Chapter 7 Viewing and Managing Logged Data Managing Test Wafer and Calibration Files To conserve memory on the device you should periodically review the test data wafer configurations and calibration files stored on the device Delete any files that are no longer needed Unnecessary files consume data space that could be used for logging measurements Open Menu Data Manage Files In the File Management screen select the file type from the pull down menu To delete files highlight the file and tap the Delete button File Management Rename Comment Delete Transferring Data to the PC See Downloading and Retrieving Data in Chapter 5 for more information Thermal TRACK 4 User Manual 7 8 SensArray Chapter 8 Thermal TRACK Menu Items The Menu is the starting point for performing tasks on the Thermal TRACK device This chapter provides a general description of each function on the menu For a detailed explanation of specific tasks see Chapter 6 Making a Measurement and Chapter 7 Viewing and Managing Logged Data The Menu resides at the lower left hand corner of the Thermal TRACK de
112. v Type your comment here ps112 3 4 5 6 7 8 9 0 Tabjajw e r t yvjujifojb cap a s a fjojh ilk i Shift ODIAN y With this screen you can enter comments that are added to the file when you begin logging by tapping on the keyboard From the pull down menu at the top of the screen you have the following options for handling the comments when you start logging data e Prompt for comment before recording Default Comments that you enter here are saved When you start logging data the software displays the comments allowing you to modify the comment or confirm them e Record this comment without prompt Comments are saved and when you begin logging data the log file automatically includes the comment without prompting you e Don t record comment Comments are ignored when you start data logging Select this option only if you do not want to enter comments into the data log files SensArray 8 5 Thermal TRACK 4 User Manual Chapter 8 Thermal TRACK Menu Items Settings Sleep In Select Menu Settings Sleep In to set the time interval in which the device screen turns off or sleeps after no activity Set Contrasts Adjust the screen contrast by selecting Menu Settings Set Contrasts Settings 11 15a ok Contrast To adjust the contrast drag the slider Set Time Date To adjust the time and date that appears on the device select Menu Settings Set Time Date Set
113. vice screen Tap once on this icon with the stylus to view the Menu To select an item on the menu tap on the item System System 1 y Mfg Model Other Data Measure Averaging Scan Period Wafer Config Options Data Set Comment Settings Utilities About Log Off Menu Note Individual menu items may not appear in certain modes of operation For example before logging on or when a measurement is in progress you cannot access certain menu items Measure Temperature Ohms milli olts Timed Temperature Selecting Menu Measure Temperature starts a General Temperature Measurement See Chapter 6 Making a Measurement for more information SensArray 8 1 Thermal TRACK 4 User Manual Chapter 8 Thermal TRACK Menu Items Ohms Selecting Menu Measure Measure Ohm starts a resistance measurement For TC only configurations this option is not available See Measuring Ohms in Chapter 6 for more information milliVolts Selecting Menu Measure Measure milliVolts starts a voltage measurement For RTD only configurations this option is not available See Measure milliVolts in Chapter 6 for more information Timed By selecting Menu Measure Timed you can start a Timed Measurement See Timed Measurements in Chapter 6 for more information Averaging See Averaging Window in Chapter 6 for more information Scan Period Thermal TRACK software offers various scan per
114. witch measurement modes when measurements are running To switch modes you must first stop the current measurements or wait for the measurements to complete before initiating measurements in the new mode Overview of Defined Tests SensArray In addition to the modes discussed above you can run defined tests the most organized approach to measurement You can define various measurement parameters such as scan period and specify the result parameters for pass fail type testing When performing a test all test data is saved to a file To predefine your test see Creating Test Definitions in Chapter 4 You have the option of using these menus to select a test that you created with the Connection Utility 6 1 Thermal TRACK 4 User Manual Chapter 6 Making a Measurement Initiating Measurement Connecting Process Probe Wafers Before acquisition verify that the wafer is connected to the device To connect a SensArray Process Probe wafer insert the wafer plug into the Thermal TRACK connector When you start a measurement the software determines the wafer s configuration by reading an ID chip in the Process Probe wafer plug If the plug does not have an ID chip a screen appears on the device in which you can select a wafer configuration manually once you initiate measurements Before using a Process Probe wafer for the first time you must download the configuration file associated with the wafer See the Downloading C
115. with these Wafers on the Test Editor window The Select Wafers dialog box appears Select Wafers X 1 003 Cancel 1840B 8 4 W01 9999 5 0001 ISIS Calibration Check C Allow Any Wafer Restrict by Part Number C Restrict by Serial Number Select All Select None On the Select Wafers screen you can restrict the test to one or more wafers by highlighting the wafer in this case the part number and pressing the OK button The software automatically determines the part and serial numbers of the wafer configurations you have installed You have the following options e Allow Any Wafer No restrictions are placed on any available Process Probe wafers e Restrict By Part Number Restricts the test to certain Process Probe wafer part numbers Select one or more items from the list You can select multiple items by holding down the lt Shift gt or lt Ctrl gt key 4 9 Thermal TRACK 4 User Manual Chapter 4 Creating System User and Test Lists e Restrict By Serial Number Restricts the test to certain Process Probe wafer serial numbers Select one or more items from the list You can select multiple items by holding down the lt Shift gt or lt Ctrl gt key Saving the Test Definition Select File Save or File Save As on the Test Editor window to save the test definition to a file If you select Open or Exit and have made changes to the current test definition a window prompts you to save
116. wnload the individual test definitions to multiple Thermal TRACK devices To transfer a test definition select Download Test Definition and choose the t st file from the dialog box Downloading a new test definition removes the previous test definition from the device Thermal TRACK 4 User Manual 5 4 SensArray Chapter 5 Downloading and Retrieving Data Retrieving Files After a measurement has been logged you can transfer the logged data to the PC ina format that Thermal MAP analysis software and conventional spreadsheets can read The Connection Utility stores the file on the PC in a tab delimited form From the Retrieve menu on the PC Connection Utility you can upload Data Files Test Results Calibration Checks and User Lists For measurements saved during acquisition the data consist of temperature readings from each sensor as well as statistical information min max mean range average mean average range and average time window Retrieving Data Files 1 On the Connection Utility select Retrieve Data File 2 Chose the file or files from the Select Files to Retrieve dialog box Select Files to Retrieve Cancel Lx Peto IV Delete After Successful Transfer Select All SensArray recommends that you delete the data from the Thermal TRACK device after a successful transfer Failing to delete files from the Thermal TRACK device will eventually consume all available memory on the device To delete the
117. y recommends upgrading any Thermal TRACK 3 installations to it especially since it is a free upgrade You can always install Windows ActiveSync on your PC in the future if you later need to communicate with Thermal TRACK 4 devices Installing ActiveSync SensArray Perform the following steps to install Microsoft ActiveSync on your computer and establish a connection 1 Connect the Thermal TRACK 4 to the serial port of your computer with the supplied connection cable 2 Place the Microsoft ActiveSync CD in the CD ROM drive of your computer 3 Run the Setup exe program to install ActiveSync on your PC 3 1 Thermal TRACK 4 User Manual Chapter 3 Connection Utility Software 4 If you already have Windows CE Services installed on the computer this message appears Microsoft ActiveSync be Upgrade Windows CE Services Replace Windows CE Services with Microsoft ActiveSync 3 0 An earlier version of Windows CE Services is installed on this computer Click Next to continue upgrading to Microsoft ActiveSync 3 0 Click Cancel to keep the existing installation and quit Setup 5 Click Next and the installer shuts down Windows CE Service and updates your system Follow the onscreen directions 6 A message appears that the installation is complete Click Finish Microsoft ActiveSync Installation Complete Setup has successfully installed all files necessary to run Microsoft ActiveSync and set up a conn
118. ync has a connection with Thermal TRACK On the Connection Utility select Device Install Software Select the TTP device software description file and press OK The Connection Utility will download the software to the Thermal TRACK device Setting Device Capability After the first installation of the Thermal TRACK device software or after performing a full memory initialization you need to establish the device s capabilities The Device Capability File CAP contains the configuration for your device Typically the device capabilities would be set when upgrading from a TC only or RTD only to TC RTD device To check the device capability of your device select Menu About on the PDA To set the device capability complete the following 1 2 3 4 Connect the Thermal TRACK device to your computer with Microsoft ActiveSync Insert the Thermal TRACK Device Capability File diskette into the PC disk drive On the Connection Utility select Device Set Device Capability In the file dialog open the floppy disk choose the device capability file and press OK Verify the information in the confirmation screen Especially verify that the serial number matches your Thermal TRACK device serial number If the information is correct press OK if not press Cancel Thermal TRACK 4 User Manual A 4 SensArray Appendix A Maintenance and Troubleshooting Installing CompactFlash RAM Cards Although the standard Therma

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