PhotriX Series
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1. PhotriX Series Ultra accurate precise infrared thermometer with unmatched low temperature capability The PhotriX series of intrared thermometers trom Mikron offers best in class radiation pyrometry in a robust and flexible package designed for ease of integration The superior perform ance allows users to have insight into process behavior previ ously not possible Lowest temperature capability short wavelength pyrometer Five 5 spectral response options e 650nm 400 C up to 2600 C e 880nm 220 C up to 2600 C e 900nm 210 C up to 2600 C e 1550nm 70 C up to 2600 C e 700 1650nm 30 C up to 2400 C Configurable collection optics e Lens Lightpipe and or Fiber Optics Precision Optics e Spot size as small as 0 5mm e Narrow beam width capability High speed 1ms Shorter wavelength Higher accuracy MIKRON INFRARED a tLUMASENSE TECHNOLOGIES Company When choosing an infrared temperature sensor one of the most important factors to consider is what wave length should be used for the measurement The physics of infrared thermometry govern that the shorter the measurement wavelength the higher the measurement accuracy No instrument design can violate this principle For further technical background please read Technical Note TN 830 Designed for ultimate process control By using both short and narrowband wavelengths the Photrix Series of pyrometers allows Mikron to push th2. o Fiber Optic connection between Bent Tip Lightpipe Right Angle Electrical Cable detector and collection optics Connection to DEM Lens or Lightpipe standard cable is straight Visit LumaSenselnc com for local sales representation North Central and Europe Middle East India China South America Australia Africa Asia Sales amp Support Center Sales amp Support Center Sales amp Service Center Sales amp Service Center LumaSense Technologies LumaSense Technologies Mikron Infrared Division IMPAC Infrared Division Mumbai India Shanghai China Oakland USA Frankfurt Germany Ph 91 22 67419203 Ph 86 20 3468 3518 Ph 1 201 405 0900 Ph 49 69 97373 0 Fax 91 22 67419201 Fax 86 20 3468 3566 Fax 1 201 405 0090 Fax 49 69 97373 167 e mail india lumasenseinc com e mail china lumasenseinc com mikroninfo lumasenseinc com impac lumasenseinc com ML PX Rev X4 May 09
3. CIM e Power Supply standard system includes a universal AC DC power supply but CIM can be powered directly with 12 VDC e Electrical connection cables e PC software included Four Collection Optics Options The optics capture the thermal radia tion from the measurement target and deliver it to the detector The Photrix series collection optics can be contig ured in four distinct forms to better Suit an application s requirements 1 Lens Optics For viewing targets through windows or viewports The working distance and spot size of the Lens is specified at time of order Spot sizes as small as 0 5mm standard 2 Lightpipe Optics The lightpipe is an optical rod constructed of a single crystal sapphire These are ideal for Insertion into vacuum chambers or to view difficult to reach targets Light pipes can be factory bent inserted through small holes or vacuum fittings and can survive harsh temperature and pressure environ ments This is also compatible with most cleaning processes used in semi conductor process chambers 3 Fiber Optics to Remote Lens For applications where environment near window is too harsh for electronics when there is not enough space for electronics or when concern for explosion requires the electronic components to be located far from the point of measurement 4 Fiber Optics to Lightpipe For applications where space around furnace or reactor is either too harsh for electronics
4. e accuracy of infrared thermometry to the natural limits The accuracy improvement can be more than an order of magnitude moving from 8 14um to 0 9um 900nm measurement wavelengths Further the Photrix Series unmatched signal to noise ratio SNR allows the meas urement of significantly lower temperatures compared to other commercially available sensors using the same short wavelengths The Photrix uses short wavelength narrow bandwidth detectors that minimize the effect of emissivity errors and improve accuracy of the measurements The Photrix also offers ambient temperature compensation to combat drift for unmatched longterm stability and reproducibility Tailored solution for your application The Photrix Series offers a wide variety of options and optical designs that allow it to be configured for the best possible measurement in a given application The optics are of the highest quality For example using the highest quality optics measurement spot sizes smaller than 0 5mm in diameter with excellent rejection of stray light are offered for long process cycle applications like crystal growth and for repeatable results run after run With the above mentioned 900nm wavelength the Photrix offers better than 0 01 C resolution at Ims response time at temperature 550 C and above Typical Applications Semiconductor e RTP e MBE e CVD MOCVD e PVD Solar PV cells e Thin film deposition e Boule growth Cry
5. e g strong RF field or if there is simply limited space and therefore the fiber optics allow the electronics to be located remote from the lightpipe shown with fixed focus lens i Working Distance Light Pipe 2 T Fiber Optics to Remote Lens Fiber Optics to Light Pipe 4 m Power Supply Wavelength Tailored for Precise Process Control A PhotriX system is available in five different spectral response ranges Four of these ranges offer narrow spec tral bandpass Choosing the shortest wavelength possible for an application offers the following benefits e Better sensitivity e Enables use of fiber optics in collection optics path and e Smaller measurement errors due to emissivity e Ability to measure Silicon and other semiconductor uncertainty materials that are transparent at longer wavelengths Spectral Sensitivity Temperature Range Code Response Celsius Fahrenheit Typical Applications 065 400 C 2600 C 752 F 4712 F High Temperature Metals Solar SiC 088 220 C 2600 C 428 F 4712 F Compound Semiconductor 3 F F 090 210 C 2600 4712 F Semiconductor Silicon 155 1550nm 70 C 2600 C 158 F 4712 F Metal and Ceramic Processes Requiring Highest Accuracy Precision Standard 700 1650nm 2400 C 86 F 4712 F Low Temperature Metals Ceramics and Metal Oxide Processes Temperature range is configured at factory Higher temperatures can be special order
6. ed up to 4000 C See Technical Note TN 831 for further details on specific temperature ranges for different product configurations PhotriX Lightpipe Version Tip of lightpipe positioned close to target Stainless steel sleeve is used for mounting in vacuum pressure fittings Sheaths of stainless steel quartz or sapphire are optional Purging gas can be used to protect against deposition onto the lightpipe optics Vacuum Sleeve Sheath 25 35 mm Purge gas inlets Optional can optionally be incorporated into Available in Stainless Steel Quartz or the sleeve piris Aa Lightpipe 2 mm ore i Customer Defined H 115mm Customer Defined Length Standard lengths available up to 225mm Lengths up to 375mm available with extended lead times Please consult factory PhotriX Fixed Focus Lens Version Custom spot sizes and working distances available per OEM requirements Sensor mounted using integrated threads on body English or Metric threads 33 5 mm Thread 1 3 8 28 UN 2A US Customers amp Aixtron 25 35 mm or M36 1 5 Others Clear Aperture 20 5 mm j 48 mm __ gt x 56 mm gt x _Worrking Distance gt 165 mm gt gt 65mm Clearance Required for Straight Connector Shown Optional right angle connector requires 32mm for clearance Technical Specifications Collection Optics L
7. ightpipe Celsius C 400 1500 220 1300 210 1300 70 1100 30 670 490 2600 280 2150 270 2150 125 2600 32 S409 Fahrenheit F 752 2732 428 2372 410 2372 158 2012 86 1238 914 4712 536 3902 518 3902 257 4712 SEO Accuracy 1 5 C or 0 15 of reading Response Time User adjustable up to 1ms Drift lt 0 15 C per year Output RS 232 standard Modbus protocol supported Analog Output optional Electronics Ambient 10 60 C 50 140 F Weight 310 grams 500 grams Power 110 220 VAC 50 Hz and 60 Hz also accepts 10 30 VDC See Technical Note TN 831 for additional temperature range options Temperautre range is factory configured and calibrated Standard System Includes Measurement Options e Detector Electronics Module DEM e See Technical Note TN FS831 for a full listing of available standard e Communications Interface Module CIM temperature range configurations e Universal switching power supply e Custom cable lengths available for surcharge e PC software e Fiber optic cable connection between collection optics and electronics e 4m electrical cable to connect DEM to CIM e Bent tip lightpipes see photo below e 3m RS 232 cable to connect CIM to PC e Protection sheaths with optional purge for lightpipes e User s Manual Optional Accessories 4 Analog output module supports Sapphire or Quartz Sheath to Multi channel Interface Module both 4 20mA and 0 10V Protect Lightpipe MCI a T
8. stal growth Optical coatings processing Laser based welding and heating Aluminum Microwave processes e ALD e Implantation e Packaging e Magnetic media film deposition Solutions from The Infrared Pros With more than 40 years experience providing tempera ture measurement solutions for the most demanding and hostile applications Mikron Infrared specializes in providing the optimal solution for industrial applications Mikron offers the broadest selection of IR temperature products and accessories Our highly experienced team of applications engineers provides custom design and inte gration support to adapt our products to your application For more information on the Photrix and other Mikron temperature measurement products visit our web site at www mikroninfrared com You can learn more about temperature and gas measurement solutions from LumaSense Technologies at www LumaSenselnc com System Description A PhotriX system can be used as a single channel meas urement device or multiple units can be networked together using a mutli channel interface module The PhotriX system is composed of the following standard hardware components e Collection Optics e Detector Electronics Module DEM Communication options supported e Analog 4 20mA or 0 10V e Serial RS 232 or RS 422 e PC based GUI software e Modbus e Easy to use with LabView e Ethernet with optional MCI module e Communications Interface Module
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