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1. cccccccccccccccccccccccececeeeeeeeeeeeeeeseeesesesseeeeseeseseeseeeeees 297 reaming a new pen array LY OC sccseses sects Guanes E E a 300 Delete 4 DEn Array Ty Pe sinen E N 301 A pen setina error MCSA CC eos six re ctca annual nie tialussinat wctasansesaua i eeceviasneralhesienes 301 Using the Control aD jaciaias det isc sacetressicc E memati 301 Page 10 4 18 2006 NSCRIPTOR user manual PRD CICK GA GOSS APY aa sheneneheeeacsaiueus 307 Appendix B Sample and pen handling with MHA ce eeeccccccccceceeeeeeeceeeeeeeeeeeees 323 Fe NCS ae cea soe saahctach E T E E 323 Pandino sammle earne imemesedet tices hia acimaciattt sansa saateueeattaanabsareceecat aesaaneiteres 323 Avoiding typical problems with MHA sesiis AE 324 Makine piranha solon sisi 5 2 ras ssvaaics E vs ceded ies ead necesita usc saded uc aos ead 324 Making RAZ SOOM saa a di lek Sed datnh all dcueit a 325 Appendix C Understanding AC Mode casi cescenaticntaceedenheta cede toh 327 AC MOJE DISC eaten ericasita ait eike nda ie tances h aati h diate Rake Sian ch h casas rascals 327 Physical t rces arrectime AC MO iseasi a E 329 About AC mode s negative setpoint ccccccsssssssseccccceeeeessseccccceeeeeesseeececeesneeesseeees 330 aL We Fre GUCIIC Y SWEEP PEOCES S anoa 330 Prequene ys Weep Process OV CLV 1e Wit sass gicate cantina i E E aceeend Agee 332 Recommended parameter Senes oeieiisiieniai a Seana cteeac E 332 Detailed frequency Sweep process descripti
2. NSCRIPTOR DPNWriter NSCRIPTOR user manual Page 2 Preface All information herein is the property of NanoInk Inc All unauthorized use and reproduction is prohibited Copyright 2002 2006 NanoInk Inc All rights reserved This product has been built to the high standards of NanoInk Inc Any use or operation of this product in contravention of this document is at your own risk By accepting this product you hereby assume all liability consequent to your use or misuse of this product NanoInk Inc assumes no liability for incidental special or consequential damage of any kind Specifications applications and options are subject to change at the sole discretion of NanoInk Inc without notice NanoInk Inc makes every effort to ensure that this document is accurate but the information it contains is subject to change without notice NanoInk Inc makes no warranty of any kind with regard to this material including but not limited to the implied warranties of merchantability or fitness for a particular purpose NanoInk Inc shall not be liable for errors contained herein or for damages in connection with the furnishing performance or use of this material USS patents 6 635 311 6 642 129 and 6 827 979 Taiwan patents NI 150 875 and NI 190 487 U S and international patents pending Portions of this document Pacific Nanotechnology Inc and ThermoMicroscopes Veeco NanolInk Inc 4901 Searle Parkway Skok
3. an active pen actuated by heating the cantilever See Active pens on page 279 for more information on this pen type Description This is a brief description of each pen array type You can modify this by double clicking on it Page 298 4 18 2006 NSCRIPTOR user manual Editing cantilever properties B This is the table that appears in the Pens tab of the Pen Settings window Reader Offset 0 a a Pitch Pens on noe whe al The columns in this table are Column Description Pen This column shows the pen numbers Each row represents a different pen in the array type Reader This column has a checkmark for any pen designed to be a reader pen Reader pens generally have wider cantilevers to aid in laser beam deflection Note This is not the same thing as the feedback pen which is the pen you will put into feedback For more information on these concepts please see About active pens on page 279 Offset In some pen arrays not all of the pens in an array are the same length This column is a length offset A value of O means that the pen is the default length A positive value is how much longer in microns a pen is than the default and a negative value is how much shorter a pen is For example suppose you have these values Peri Reader Offset 1 v Toy E li i 3 L LL The graphic at the top of the window shows the relative lengths of these pens Default length Editing pen ar
4. An InkCAD component in which you can design patterns to draw on a substrate In Structure Designer you can add modify and delete objects such as structures and elements structure reference A structure plus a number of added properties not found in structures The properties apply to all elements contained in a structure reference making it a useful tool for defining and changing the properties of a group of elements A structure reference is always inside a structure substrate Another term for sample sweep Another term for frequency sweep switch box Another term for the bias control switch box T target oscillation amplitude In AC mode imaging this is the peak pen vibration amplitude See also frequency sweep thermal actuator The component on the top of an active pen that makes a cantilever extend An electrical signal heats the actuator bending the pen toward the substrate tip A tiny sharp nib at the end of a cantilever In the DPN method an ink coated tip deposits ink on the substrate surface Most tips have inverted pyramid shapes some pens do not have tips See also pen topography A description of the three dimensional surface profile of a sample The NSCRIPTOR instrument tracks the surface topography 4 18 2006 NSCRIPTOR user manual V van der Waals force An inter atomic force seen when objects such as a pen tip and a sample are extremely close to each other video monitor
5. SPM imaging Note Setting Description Move Above This option is only available if you are using inkwells and have Inkwell selected the inkwell stage map See the Chapter 8 section on setting the background graphic for the Stage Control tab for more information on this The option positions the pen s over the center of the inkwell Previous Position This option moves the pen to where it was before the last move These options only move the pen along the x and y axes They do not move it in z up and down One of the Instrument window s most important functions is creating and displaying scanned images of areas on the substrate You can use this feature to assist fine alignment or to image your DPN results This section describes how to create scan images The Instrument window supports both contact mode and AC mode imaging It collects and displays all of the instrument s available data channels scan types This is the set of available scans some are specific to the contact or AC scanning modes Topography forward and reverse this channel shows a surface profile of the sample Note the DPN process can draw very thin layers of ink as thin as one molecule which may be hard to see in a topography image LFM data below is often more useful for imaging monolayers of ink but topography scans are useful for imaging other thicker Structures Note since topography scans show changes in feature heights the t
6. A second monitor connected to the master PC which normally displays a live video image from the instrument view An InkCAD window that displays all or a portion of a document You specify what part of the document appears in a view when you open it W withdraw Using the instrument motors to move the pen s away from the substrate surface taking the pen s out of feedback Contrast with approach and lifting writer pen In multi pen arrays passive or active this is an inked pen that draws on the sample Contrast with reader pen 4 18 2006 Page 321 NSCRIPTOR user manual Page 322 4 18 2006 NSCRIPTOR user manual Warning Handling pens Handling samples Appendix B Sample and pen handling with MHA This appendix contains information on working with samples and pens when drawing with MHA one of the most commonly used DPN inks The chemicals discussed in this appendix are highly corrosive Use approved protective gloves goggles and lab coats when you work with them No special pen handling or cleaning is required before you coat a pen or multi pen array with ink You can use pens out of the box However NanoInk does not recommend that you subsequently use coated pens without cleaning If pens with MHA coating have been stored for extended period of time there might be some MHA oxidation on the tips which would lead to unsuccessful lithography To avoid this problem we recommend using the follow
7. One common cause of this problem is inaccurately measuring the smallest dots or thinnest lines in the test pattern Your curve fit might work better if you temporarily remove the outlying data point from the calculations If you asked InkCal to draw a pattern of Dots and Lines you can do this by first looking at the graph to determine the approximate x and y values for the outlying point Then click on the Back button to return to the previous InkCal window In the Dots or Lines tables of that window look at the dot area or line width values to identify the stray data point De select its Enable checkbox to disable it Enable iw You can also disable a dot or a line by setting its area or width to zero This is how to disable outliers if you asked InkCal to draw a pattern of Dots or a pattern of Lines If none of the preceding sections help you to get a curve fit without error messages you could still try DPN drawing with the coefficients from the closest fitting model You may also contact NanoInk or your NanoInk distributor if you need help with calibration You can find NanoInk contact information in the preface Your ink s diffusion characteristics might not match the current set of ink models NanoInk plans to add new models to future versions of InkCAD 4 18 2006 NSCRIPTOR user manual Using the online helo Chapter 5 More about InkKCAD Now that you have been introduced to InkCAD and have done some DPN drawing you
8. either by line width or drawing speed Please see About the line display style on page 137 for information about this property LineWidth The desired width of the line in microns If you change this value InkCAD automatically recalculates the Speed Note You cannot change this value if you are using the Non diffusive ink model Points You can click on this property to see or edit information on the line s endpoints See Working with the Points property on page 137 Printable This property determines whether InkCAD draws the line when drawing the current layer Please see Printable visible settings for more information Repeat The number of times you want to re draw the line Repeating a line can sometimes ensure that it is drawn without defects It also may increase the width or thickness of the line A Repeat of 0 tells InkCAD to draw the line once Speed This is how fast the pen s will move in microns per second while drawing the line If you change this value InkCAD automatically recalculates the LineWidth Page 136 4 18 2006 NSCRIPTOR user manual Property Description Visible This determines whether InkCAD displays the line in its window Please see Printable visible settings LayerNumber This indicates which layer the line belongs to StructureDefault If this is True the element inherits the layer number from the layer and you can t change LayerNumber If it is False you can set the layer number t
9. x offset um 0 000 Rotation deg 0 0 l Scan Y offset um 0 000 Resolution 256 X p a ra meters Feedback Control I l I l I l l l l I Setpoint w o oo Propertional 2 a l l l l l I I I I I l C LFM Gain 5 inegal e a suag uiy JA Sunu puiu W sjonuod pigs Kt snowy oep Image Error Gain fi pear foo display area Drive Ampl 020 Phase Deg 00 H Al Default Settings The scanned images appear in windows in the scan display area A above A red icon next to any of the scan parameters usually means that you have entered a value outside the range of a field Pause the pointer over the icon to see a short explanation Image display area A The left portion of the Instrument window shows a number of data channel images one for each channel enabled on the instrument The window updates all active data channels during a scan Each image shows a different data channel from the same scan area Dis jek y Help Stage Conan SPM Imager GPM Setup 6 xj P E gt eS r Fis s 3 F 3 Sa E Mig fen S Penbo PenUp Pok tad ii Sean iraa E j Sean Sine fur 5000 Seanse 100 H Xolek 000 H Rotation ide 00 H a h d i Volt fun O00 Aesolutisn z i E MB Feedback Conil i aa O ee oo amwa E LIM Gaii 5 Topegteanha isi IERA EA Ence sn 1 A Diwani Tal Skage M 101 77
10. 41 281 tips for handling 41 281 unloading from instrument 36 Flip Vertical structure ref property 147 148 Focus control in Instrument window 194 4 18 2006 font settings 224 force applied by pens 126 154 163 forward scan direction 173 Fourier transforms of scan data 236 free air resonance 22 191 329 frequency sweeps See also AC mode as a part of setting AC mode parameters 333 how they work 332 other fields affected by 340 overview of 191 friction on sample surface 175 from ink database option in ink properties 90 Full Approach inkwell dipping method 255 Full Auto button 193 333 339 full oscillation amplitude 336 Full Spread line repeat model 92 full size scan images 174 182 full text search in online help 120 function keys See keyboard shortcuts G gains demodulation gain 187 error gain 186 in DPN options 154 in layer properties 126 integral gain 186 GDS II CAD file format 122 General tab in DPN options 158 glossary of terms 307 glove box See E chamber gloves and corrosive chemicals 323 GO button in main nkCAD window 63 goggles and corrosive chemicals 323 gold as a sample material 323 gold as an active pen element 279 Goto buttons in InkFinder 201 Goto Dengo 201 graphs of diffusion data 110 graphs of line scans 183 green circles in Structure Designer 76 See also handles green color in E chamber control 44 green cross in Instrument windo
11. 83 DPN stage AC mode of See AC mode aligning laser of 29 and active pen flex cable See flex cable and bias control See bias control and DPN server 59 and other NSCRIPTOR components 26 and x and y axis motors 27 cable connections for 45 changing the substrate in 32 components of 19 components of for active pens 281 connecting cables for 26 connecting software to 209 constant force mode of 18 controller for 26 59 controlling stage position 168 disconnecting software from 209 ground connection for 46 introduction to 13 17 laser alignment knobs on 31 lights in See lights magnet on stage 169 motors in See motors moving the stage of 27 168 moving while in feedback 158 objecting lens of 44 picture of key components in 27 picture of in Instrument window 169 powering up 28 raw video image from 194 resetting from InkCAD 209 rotating scanner head of 34 sample puck on See sample holder puck scan range of 27 setup parameters for 187 size of stage 27 status indicator for 84 video in 155 DPNWriter system 13 drag and drop InkCAD feature 148 drag zooming and scanning 81 drawing area in main InkCAD window 61 drawing status icon 84 Drawing Time field in main InkCAD window 61 Drawing Time layer property 125 Drawing Time viewing options 74 123 NSCRIPTOR user manual drive amplitude of AC mode piezo and the frequency sweep process 330 definition of term 328 field description 186 339
12. 92 introduction to layers 65 123 layer display options 125 layer numbers of 123 125 list of layers using an ink definition 111 moving elements between layers 148 names of 123 125 overriding boundary properties of 141 properties of 102 125 rotating 75 selecting in InkCal 98 translating 75 when the Layers menu is available 125 working with layers 125 Leave Light On in DPN options 155 left tabs in Instrument window 166 Page 350 lens in instrument 27 44 leveled scan graphs 183 leveling a multi pen array 255 272 levelness of sample 242 LFM See lateral force microscopy Lift Pen s After Litho fields 127 157 Lift Pen s Between Elements fields 127 156 234 lights in DPN stage 155 194 Limits Exceeded message 276 line profiles in Image Analysis 238 Line Roughness field in IA application 240 Line Scan tab in scan window 183 Linear ink model 95 Linear with offset ink model 95 162 linearity of piezo scanners 19 190 lines See also dots Dots amp Lines elements and contact width 97 and ink diffusion 88 as drawing elements 67 as non GDS II objects 122 as part of fine alignment marks 133 color of in layer properties 129 132 contact width for See contact width creating in Dots amp Lines 211 creating in Structure Designer 76 deleting in InkCal 103 diffusion coefficient for See inks how drawn 87 88 measuring thickness of 104 109 183 minimum width of 14 multiple drawi
13. After Lithography setting affects what happens after drawing Note This setting only takes effect after completing DPN lithography It does not change the way the instrument lifts the pen s before making coarse positional moves such as moving from a region of interest to the park position The layer specific field for this variable is Lift Pen s After Lithography in the layer properties See page 127 for more information Pen Lift This item is the default value for how InkCAD should lift the Method pen s between elements and after lithography Choose Scanner if you want the instrument to lift the pen s with the piezo or if you are not using the active pen feature described in Chapter 9 Choose Active Pen if you are using active pens and you want to lift by retracting extended pens The layer specific field for this variable is Pen Lift Method in the layer properties See page 127 for more information Reset to Default Click on this button to reset all values in this tab to their factory button settings Apply to button Click on this button to apply your changes in InkCAD without exiting from the DPN options See About the Apply to button on page 155 for more information Bias Control tab This tab contains settings for the NSCRIPTOR bias control feature which applies an electrical bias during DPN drawing Item Description Control Bias This item is the default value specifying whether you want to use During
14. InkCAD displays a grey selection box where you dragged For example To pan move the mouse pointer over the grey box hold down the eft mouse button and drag the selection box to a different area Video Video Pee c cece ccc cccccccccencccscceee You can click on the Reset Zoom button to reset the zoom pan feature and zoom the video back out This expands the selection box to cover the entire zoom pan pane Height and Width are the dimensions of the selection box About the video controls D These are the controls for the video image Control Description Ea This slider controls the overall amount of light in the video AR image Raise the brightness to make the image lighter or lower it to make it darker Oo This control alters the difference in brightness between dark and light areas of the video image bd InkFinder displays a pen mark on the video screen lt This X lt slider controls the brightness of the pen mark against the video image A separate dialog box has other controls for video saturation and hue Please see Miscellaneous video controls for more information 4 18 2006 Page 199 NSCRIPTOR user manual Miscellaneous video controls You can change InkCAD s settings for video hue and color saturation by going to the Instrument window s Tools menu and selecting Video Settings This dialog box appears These are the settings in the dialog box Contr
15. With Subnoac Ii To delete the dot choose the Delete Selected Structure s option Note You can use this method to delete other objects besides elements but be careful about deleting structures and structure references Both these object types have property settings that are not available in the element properties Drag zooming and scanning In InkCAD you can select a region of the main window s drawing area and then either zoom in on the selected area or perform an SPM scan of it To do this go to a viewer in the main InkCAD window the feature is not available in Structure Designer Then right drag click the right mouse button and hold it down while moving the mouse to select a region InkCAD highlights the region as you select it When you release the right mouse button a small pop up menu appears 200m paran 4 18 2006 Page 81 NSCRIPTOR user manual These are your options in this menu e Zoom If you select this option nkCAD zooms in closely on the selected area e Phs Hk XR A 3 127 3 524 1 969 2 156 a Dd Mouse Position 1 081 Y 0 871 Center 0 1 0 01 Drawing Time 0 2 46 e Scan Use this option to automatically open the Instrument window and perform an SPM scan on the selected region The main InkCAD window passes the selected scan size and coordinates to the Instrument window so all you have to do is tell it to begin the scan See Chapter 6 for info
16. and the pitch the distance between pens is constant 4 18 2006 Loading a multi pen array Pen array selection and setup Array drawing preview NSCRIPTOR user manual Other arrangements are possible that vary the pen length pen width and pitch Generally speaking if one pen is different from the others you will probably make that pen the reader pen NanoInk s pen and pen array data sheets contain detailed descriptions and specifications for each available pen array There are no significant differences in the loading process between single pens and passive multi pen arrays Use the loading procedure in Chapter 2 After loading it is very important to level a pen array as described in Leveling a pen array page 272 Probe array configuration for passive and active arrays is available in the Pen Settings window which is described in another chapter See the Chapter 9 section on using the Pen Settings window InkCAD s multi pen preview feature lets you see the pattern that would be drawn by a multi pen array Suppose you want to draw this simple pattern with a pen ry Dd Also suppose that you have selected the highlighted pen array in the Pen Settings window Name Number ot Pens Default Pitch Curent Pen Type Description amp 3E 3 ro 2 Passive Contact Passive Pen Array Passive Contact Passive Pen Array 4 18 2006 Page 271 NSCRIPTOR user manual Leveling a pen arr
17. d Boundary 5 dP Boundary 6 a Boundary 7 d Boundary 8 4 18 2006 Page 225 NSCRIPTOR user manual Using InkMap The InkMap module allows InkCAD to draw a DPN version of a bitmapped image It works by converting pixels in the bitmap to dots in a pattern InkMap can import two common types of bitmapped graphics files Windows bitmaps BMP extension and JPEG files JPG extension This is the initial InkMap window InkMa Fie Maps Tools Help Bitmap pane Dotmap pane Toolbar Status messages d What InkMap does Page 226 Original bitmap Dotmap The appearance of the dotmap depends on settings in the InkMap options You can have a sparse dotmap with space visible between the dots as seen in the dotmap above or you could increase the dot size to leave no gaps between dots This creates the truest reproduction of the original bitmap but it may take a good deal longer to draw and it uses more ink When you close InkMap a certain way by going to the File menu and selecting Export and Close it exports the dotmap to the main InkCAD window Once there the dotmap becomes a series of separate dot elements in the same layer Then from main window you can modify the dotmap delete or change any of the dots draw the dotmap to the substrate or perform other operations like 4 18 2006 NSCRIPTOR user manual adding other elements When InkCAD draws the dotmap to the substrate it does it row by row
18. in Instrument window 202 NS Active USB connector 47 NSCRIPTOR system active pen feature of See active pens bias control feature of See sample bias cable connections for 45 components of 26 environmental chamber of See E chamber hose connections for 45 Image Analysis program of 235 InkCAD software of See InkCAD inking feature of See inkwells instrument of See DPN stage introduction to 13 lithography controller of 26 magnifier shipped with See magnifier master computer of 26 moving the system 45 multiple pen operation of See multi pen arrays nebulizer of 46 non InkCAD components of 25 online help for 119 optional items for 27 continued Page 352 NSCRIPTOR system cont pens of See pens software for See InkCAD startup sequence for 28 video monitor in See video monitor Number of Cells in Dots amp Lines 216 Number of Dots field in Lattice 222 Number of Pens fields in Pen Settings 298 300 O object outlines 105 object property pane See property pane objective lens in instrument 44 objects in InkCAD 64 See also elements Oblique line profile mode 239 Oddfellows Local 151 64 Offset column in Pen Settings window 299 offsets for cells in an array 216 for lattice locations 221 for SPM signals 188 for text location 223 ON OFF buttons in Instrument window 170 One or more of the coefficients message 115 online help for NSCRIPTOR 119 Open button in JA application 235 op
19. it will be made in constant height mode if the pen is not in feedback when scanning begins In constant height mode it can be difficult to get the pen to the proper height above the surface NanoInk suggests that you slowly lower it while looking at the Instrument window s Align Laser tab see Chapter 6 for its indication of cantilever bending This is an iterative process using progressively smaller increments to get the pen as close to the surface as possible Z Control tab Field Description Approach Approaching a pen or pen array 1s using motors and the scanner Pen s Before for fine positioning very close to the substrate surface This field Lithography is the default setting for whether you want the pen s to approach the sample before DPN drawing operations Multi layer drawing If you want to draw multiple layers in one operation only the first layer s Approach Pen s Before Lithography setting affects what happens before drawing The layer specific field for this variable is Approach Pen s Before Lithography in the layer properties See page 127 for more information Withdraw Withdrawing is using a motor to lift the pen s out of feedback Pen s After farther than lifting This field is the default value for whether Lithography you want the pen s to withdraw when the system finishes drawing a pattern Multi layer drawing If you want to draw multiple layers in one operation only the last layer s Withdraw Pe
20. st ot 75 Se T These are the buttons in this toolbar Button Function Create a view for the current selection A view is a display window that appears in the right side of the main InkCAD window A view displays the contents of a selected tree object whether it is simple an element or complex an entire document To create a view simply select a tree object and click on this button When you do this the tree view displays a new tree view with the selected object at the root This does not change the actual structure of the document only what appears in the tree view at any given time The structure in the tree view is tied to the contents of the active view window You can create as many views as you wish The three buttons in the view s upper right corner have the same standard minimize resize and close functions as they do in most Windows applications For example you can click on this button to close the current view 4 18 2006 Page 73 NSCRIPTOR user manual Page 74 Button w e e e i Function You may also use the Window pull down menu to display a different view or to show multiple views at once You can open a view for any part of a document tree For example if you want a view that just shows a structure reference and everything contained in it just select the structure reference and click on il Note Design changes you make from such a view can affect either the whole document or jus
21. structure references children of 77 creating 74 introduction to 65 selecting 77 80 styles for displaying dots and lines See Display Style subnodes in tree view 74 substrate See sample sulfuric acid 324 support from NanoInk 3 SUR file format 208 235 Surface Deviation Surface Value fields and approach 189 337 and push past movement 338 how affected by a frequency sweep 340 overview of 188 sweeps See frequency sweeps switch box See bias control switch box syringes See ink dispensing kit System ON OFF button in E chamber control 44 system tray icons appearing in 84 4 18 2006 T T shaped guide on inking puck 252 table air See air table tabs in Instrument window 166 Target Layers in InkCal 110 target oscillation amplitude 336 340 TEC POWER connector 46 technical support 3 TEMP SENSOR connector 46 temperature as a factor in DPN experiments 14 how controlled in the DPN process 44 recording with ink properties 94 sensor for in E chamber 48 tessellating objects in Lattice 219 test pattern for InkCal default patterns available 98 introduction to 97 measuring after drawing 104 preview of 101 text GDS II data type 122 text drawing on a substrate See NanoWord The selected combination of pens msg 287 There are not enough valid data points msg 116 There is no SPM image msg 205 thermal actuators in active pens 20 279 281 thiols 15 323 324 three dimensional scan
22. the pen relative to the substrate surface in microns per second Click on the toolbar s rightmost button to select which parameter appears in this column The number of extra times you want Dots amp Lines to draw the line With a Repeat of 0 Dots amp Lines draws the line once only Repeating a line can sometimes ensure that it is drawn without defects It also may increase the width or thickness of the line The amount of ink deposited depends on how much the ink diffuses If this value is greater than 1 Dots amp Lines shows estimated minimum and maximum line widths The black line represents the estimated minimum line width and the surrounding grey area is the estimated maximum width 4 18 2006 Page 215 NSCRIPTOR user manual Array tab The Array tab is where you set up the array of identical cells The tab does not have the same toolbar that the Dots and Lines tabs have The following fields help you control the overall operation and the repetition of cells in the array Item Description Number of Cells Per This is the number of rows and columns of cells you want row Per column to draw each one of which will look like the cell preview pane Total number of cells The number of cells in the array calculated by the software Offset of the first cell This is where the first cell s origin should be located as a X Y horizontal and vertical distance in microns from the available scan range s 0 0
23. tuning 336 drive frequency 331 339 Drive Frequency Offset field 335 340 drops of ink 259 Dw Time field in InkCal 103 dwell times and ink diffusion 89 and ink models 95 DWELL_TIME display style 135 in dot properties 134 135 in Dots amp Lines 215 in Lattice 222 minimum dwell time 159 E E chamber and rest of NSCRIPTOR system 26 cable amp hose connections for 46 controlling conditions in 44 introduction to 14 nebulizer in See nebulizer sensors in 48 starting up 28 use of nitrogen with 27 E chamber control application 44 94 E chamber controller box 45 46 EChamber icon 44 edit mode for elements 76 editable elements 77 e DPN 23 94 effective scan range See also available scan range displaying in the Instrument window 284 295 estimating the size of 284 introduction to 283 electrical bias See bias control elements See also boundaries dots lines paths colors of in layer properties 129 copying elements 148 deleting from tree view 80 de selecting in Structure Designer 79 editing 76 introduction to 67 moving elements 148 non editable elements 77 selecting and modifying 77 80 showing in tree view 74 4 15 2006 Page 345 NSCRIPTOR user manual e mailing error data to NanoInk 164 Emergency Stop button in status box 83 Enable Stage During Feedback in options 158 engaging the pen s See approaching the sample environment for doing DPN 25 environmental chamber Se
24. which makes it easier to locate and work with your DPN experiments Bias control page 50 describes how to use the optional bias control feature to apply voltage during DPN drawing This complete document is available as online help easily accessed from the InkCAD Help menu To learn how to use the more advanced help features please see Chapter 5 4 18 2006 Page 25 NSCRIPTOR user manual System components This drawing shows the relationships between NSCRIPTOR components Temperature amp humidity controller E chamber Bias control switch box Windows L XP optional Main monitor InkCAD as Second monitor live video Master Lithography Air table computer controller These are the main components e Master computer The PC runs Windows InkCAD and all other application software including image analysis software and a program that controls the temperature and humidity inside the environmental chamber e Monitors The master computer has two monitors One you use with the PC software and another for viewing live video from the instrument e DPN stage A state of the art scanning probe tool optimized for DPN patterning It includes a scanner pen s sample puck optical video microscope and the scanner s real time calibration sensors The instrument has a three motor pen leveling feature and it can scan in both x and y directions Most of the instrument s software con
25. writer Pen 1 s range Pen 2 Pen 1 cannot cannot reach this reach this area area 4 18 2006 NSCRIPTOR user manual The effective scan range 1s the common region that both pens could reach the intersection of the two ranges l Effective I scan l range l l d Notice that the effective range is smaller than the scan range for a single pen In fact it shrinks for each added pen 7 e l l 1 1 l l l 1 1 l l l l a A EE eer Oper 2 writer pens 1 feedback pen 3 writer pens 1 feedback pen For a given number of feedback and writer pens in order to draw and scan a pattern the pattern must fit in the effective range To make the effective range as big as possible you should normally use contiguous pens Overall each of NanoInk s pen arrays is wider than the instrument s available scan range Every array type has pens of different widths and inter pen gaps with different sizes Thus each array type has a different effective range for a given number of pens See Estimating the effective range to learn how to have InkCAD automatically determine the effective range for a particular set of pens 4 18 2006 Page 283 NSCRIPTOR user manual Estimating the effective range This section shows how you can use InkCAD to find out what the effective range would be for a given set of pens Suppose you want to draw a pattern with NanoInk s T2 type active pen array and you want to draw
26. 18 2006 NSCRIPTOR user manual Active pen settings A Selecting pens in the active pen table immediately It only applies your changes to the Extend and Retract fields when you then click on an appropriate extend or retract button near the lower left corner of the window InkCAD does not let you retract or extend a pen that is currently in feedback These are the settings in the Pen Control table Column Description Pen Each row represents a different pen in the array This column shows the pen numbers Retract This is the amount of current you want the system to apply to retract each pen To change this value for one or more pens see Retracting and extending pens on page 304 Extend The amount of current you want the system to apply to extend each pen To change this value for one or more pens see Retracting and extending pens page 304 Feedback This column shows which pen in an active array is the feedback pen the one put under feedback control To change this click twice on the check box of the pen you want to make the feedback pen Then click on the pencil icon to the left to get InkCAD to refresh the data and de select the previous feedback mark Status This item shows whether each pen is currently retracted or extended If this column says Undefined it means that the pen is currently not retracted or extended This usually happens after you modify the Actual value on the right side of the tab Sle
27. 2 The DPN environme D Chapter 3 Getting started with E Chapter 4 Inks and ink calibrati C ha pter 6 s nstru ment control Chapter 5 More about InkCAD Chapter 6 Instrument control Instrument control Chapter 7 Using the other InkC This chapter shows you how to control the operation of the NSCRIPTOR Chapter 8 Inking and multi prob system s scanning probe instrument The Instrument window contains the 7 Chapter 9 Active pens following instrument control functions Appendix Glossary Appendix B Sample and probe F About the Instrument window Appendix C Understanding AC image databases Page 120 4 18 2006 NSCRIPTOR user manual Field and property help The windows and modules that have these Help menus include e The main InkCAD window e The InkCal calibration module described in Chapter 4 e The Instrument window described in Chapter 6 e InkCAD s Dots amp Lines Lattice NanoWord and InkMap modules described in Chapter 7 e The Pen Settings window described in Chapter 9 You can also get help on individual screen items in certain InkCAD dialog boxes such as the DPN options Look for a button QG x If you click on this button the mouse pointer changes to this R Position it over a field you want help on like this Approach Fenals Ne Then when you click a popup help topic appears Bring the probe into contact with Fe t
28. 2 1 Marker 1 Marker 2 Horizontal a ao E M Vertical Y 5 z um C Oblique Clear zaj o ooo C Polygonal E 40 42 um Circular Average Display Mode z es ore Fit Vertical Scale zl es ae um V Fit Horizontal Scale M Invert Z data i 80 84 um Z range 2 37 um Line Roughness Dum 40 42 um 80 84 um Line profile parameters These line profile modes are available e Horizontal The line scan graph shows the profile of a horizontal line located where you click in the image e Vertical The graph shows the profile of a vertical line located where you click e Oblique The graph shows the profile of a line segment you define by holding down the left mouse button and dragging e Polygonal The graph shows the collective profile of a series of connected line segments You click in the image once to define the start point Then each click defines the end of another line segment e Circular The graph shows the profile of the border of a circle you create by dragging across the image The left side of the graph corresponds to the circle s 9 00 position The line profiler gives you these other display options Mode Description Fit Vertical This re scales the graph so that the upper and lower limits are the Scale line s maximum and minimum z values Fit Horizontal This only affects the Oblique profile mode above It re scales the Sca
29. 2006 NSCRIPTOR user manual 3 The system lifts the pen s when you click on Stow The Stow button changes to Restore when done Fress the Restore button to return to the original position 4 Click on Restore to move the pen array back down 5 When the Restore button changes back to Stow close this Tip Exchange window by clicking on the X button in its upper right corner 4 18 2006 Page 277 NSCRIPTOR user manual Page 278 4 18 2006 NSCRIPTOR user manual About active pens Chapter 9 Active pens This chapter describes how to use NSCRIPTOR s optional Active Pens Active pens bend downward in response to an electrical signal When the signal is on thermal actuators on top of the cantilevers generate heat that extends them toward the substrate When the electrical signal stops the pens retract back away from the surface 4 Retracted A gt Extended q Retracted In this chapter the following sections will give you an introduction to this type of pen and show you how to work with it About active pens Active array drawing process page 288 Pen array alignment page 293 About the Align Pens tab page 295 Using the Pen Settings window page 297 The amount of bending for an active pen is a function of the electrical signal strength The stronger the electrical signal the more it bends down The gold thermal actuator is attached to the top of the silicon nitride cantilever An active pen lo
30. 21 0 1 0 486 22 0 2 0 292 23 0 4 0 122 24 0 8 0 073 25 eZ 0 073 26 1 6 0 024 2E 2 0 024 28 2 4 0 024 4 18 2006 Page 113 NSCRIPTOR user manual Saving the ink definition to the ink database Curve fitting troubleshooting Page 114 InkCAD maintains a database of ink definitions You can add the current definition to the database if you are ever likely to use the same ink or an ink with similar characteristics To add the ink definition to the database go to the property pane in the upper right corner of the window Right click on the Ink entry this should be the first entry in the list Then select Transfer Ink to Ink Database from the resulting pop up menu E n Ink a s andy Description Transfer Ink To Ink Database If you modify the properties of the current ink after saving it in the ink database it does not affect the values stored in the database unless you save it again after changing it InkCAD essentially copies and pastes ink definitions to or from the ink database Ink definition export and import allow you to copy calibration data from one InkCAD document to another You can also use the database as a catalog of calibration information for your multiple DPN inks or as an historical experimental record If InkCal has a problem fitting a curve to the dot and line size measurements it displays an icon in the Fit Curve button Fit Curve amp You can follow this basic process to fix a
31. 293 and flex cable See flex cable and laser red dot alignment 31 composition of 279 controlling from red dot tab 31 extending and retracting 20 279 302 continued NSCRIPTOR user manual Index active pens cont extending manually 304 features not supported with 22 23 281 handling without breaking 41 281 hardware for 281 indicator on DPN status window 292 installing pen arrays 34 introduction to 20 leveling an active pen array 273 loading into instrument 34 range of 282 replacing pen arrays 34 retracting manually 304 selecting in Instrument window 296 303 settings for 302 size of arrays and available scan range 283 Slew rate for 303 specifications for 281 specifying in pen array definitions 298 unloading from instrument 34 Actual field in Pen Settings window 302 actuators for active pens See thermal actuators adhesion on sample surface 175 AFM application software 208 AFMs See DPN stage A frame cantilever shape 20 air compressor 27 air gun 27 air table 26 Align Laser tab of Instrument window 29 Align Pens tab of Instrument window 295 Align Sample button in Instrument window 202 aligning layers alignment phases 203 overview of 124 rotational alignment 204 theory of alignment 203 translational alignment 204 aligning pens in a pen array 293 alignment marks See coarse alignment marks fine alignment marks alignment wizard 205 All Colors but White InkMap field 2
32. B i 125 000 0 000 E I 3 l 165 000 0 000 E lo This is the general l 205 000 0 000 I location where the i aa Jka 290 000 _ 0 000 al i feedback pen will draw z the first alignment mark f y E If you need to re run the Mignment Procedure a al Ig nment p rocedure Select the Pens to be aligned from the table above and gt just change Yb ya few press the Start Alignment button to begin alignment microns first Alignment mark fo i gt i size width amp Ix 0 000 u l Size 2000 Jum I i Click here to start e 0 000 und l eed 0 100 um s e a a l M O lll g drawing speed pen array alignment Start Alignment S Location of the center Effective Scan Range oe of the effective scan r This is a picture range relative to the 1X 000 umg of the feedback p v feedback pen s tip j 0 00 _ _ uml pen s scan see below viet 000 uml range The red were 000 um box is the current Dimensions of la J effective scan effective scan range range Feedback Off For a description of the effective scan range see Pen ranges on page 282 By default the system centers the writer pens in the effective scan range 4 18 2006 Page 295 NSCRIPTOR user manual The toolbar A This is the toolbar in the Align Pens tab Click to set all table values back to the default values from the pen array specifications x pa Reset Notes Click to add or edit notes on the selected active p
33. Before drawing a pattern containing both dots and lines NanoInk recommends that you calibrate for both element types This is easy to do simply set InkCal to draw a pattern of dots and lines for its test pattern see InkCal part 1 Choose options draw and scan test pattern on page 12 An ink definition stores the result of an ink calibration in InkCal It is specific to a particular substance used in DPN patterning and a given set of experimental conditions Some of this data is information you enter while other parts of it are provided by the InkCal module There are several places in InkCAD where you can look at ink definitions the InkCAD document properties the layer properties and two InkCal dialog boxes described later in this chapter An InkCAD document may contain one or more ink definitions 4 18 2006 Page 89 NSCRIPTOR user manual Ink definitions and layers Page 90 This is the relationship between ink definitions and layers in a DPN document e A layer only uses a single ink definition all elements in a given layer share the same calibration data e However an ink definition can be shared by multiple layers This allows you to use layers to logically organize the different parts of a design even if you are using a single ink By default all layers in a new document share the same ink definition since the most common experiments use a single ink and identical lithography parameters However you c
34. Complete Structures menu option 77 Select Layer dialog box 155 Select Structure to Edit dialog 152 Select with Subnodes menu option 74 4 18 2006 Page 355 NSCRIPTOR user manual Selected Color InkMap field 230 selecting elements in Structure Designer 76 77 in tree view 71 in views 75 servo gain See Integral Gain Servo Tom 126 Setpoint Instrument window field 186 Setpoint at Mark 7 field 336 340 setpoints for temp amp humidity control 44 setpoints in scanning as cantilever deflection force 18 in AC mode 339 in DPN options 154 in layer properties 126 negative value of in AC mode 330 setting for AC mode 330 336 Settings tab of Instrument window 187 setup tabs in Instrument window 166 shaker piezo See AC mode piezo shortcuts See keyboard shortcuts Show Elements Printable Visible options 74 Si N as an active pen element 279 SIGNAL ACCESS connectors 45 silicon nitride as an active pen element 15 279 Slew Rate for active pens 303 slow scan direction 179 183 See also fast scan direction snap to grid feature 131 158 162 software components 59 software correction 19 sol gels as inks 15 Spacing column in Pen Settings window 300 sparse dotmaps 226 234 Speed field in Dots amp Lines 215 Speed field in InkCal 104 SPEED field in line properties 137 SPM See scanning probe microscopy SPM Controls tab of Instrument window 199 SPM Image Missing message 205 SPM Images t
35. Dot specifications E These are the dot specification items Field Description X Y This appears in Dots and Lines patterns only These are the x and y coordinates for the center of a dot relative to the X Offset and Y Offset values Dw Time The dwell time is the amount of time the pen stays stationary in contact with the surface to create the dot in seconds Enable This appears in Dots and Lines patterns only Uncheck this item for any dot you want to temporarily exclude from the test pattern After changing any of these values for a particular dot click on another entry in the table to see how the change affects the preview Line specifications F Each row in the line specification area describes one line in the test pattern Field Description X1 Y1 These appear in Dots and Lines patterns only They are the x and y coordinates for one endpoint of a line relative to the X Offset and Y Offset values X2 Y2 These appear in Dots and Lines patterns only They are the x and y coordinates for the other line endpoint also relative to the X Offset and Y Offset values 4 18 2006 Page 103 NSCRIPTOR user manual Field Description Speed Repeat The speed of the pen as it draws a given line in microns per second This appears in Dots and Lines patterns only This is the number of extra times to draw a line With a Repeat of 0 InkCal draws the line once Normally the Repeat values should be the
36. E eea 119 Usmo Tie OS Mpasi a a 119 Contex Se SIONE De Parana A eateeaenee 120 Field and property Wel i acsxuewehcnne a alana E ek 121 Mapori COAT Tiles va tie ices cand a a a ne oul ha acai A S 122 LOST A GK SaR 2 bids mpc pares Oem ney were E Or nee E Mr AN ay E A THN E E EE RET ry See Te 123 WW OI Wy AU AY CTS nerodas tasaea asian chad dais nabciad disuse seaside nahi egiadsdae 125 Layee DEO PCE CS cao sed act sahsanatetaachahectgocientencast tascounaeba dca dasctekohan suscientabcuaeaabosoemoucechane 125 Drawing miuiltipledayersal ONC oreren e E S 129 Multieink DPN Process oora anna a adneaemueenenacoueee 129 Mulu MK Proce S een a dacsehslaatatisonsiuuieans 129 Desiree amili nk patte Miers A eee asennad 131 Default layer COlOLS aen a a a A 132 Inserune a fme alhenment Mark issiria aa aaee aaia 133 Aboutstructure Destener ODIECIS sarsa a EN 134 DPOC PrOpe E S aeien E E tment kere te tnt a ane 134 LE Prope ESen A O ee Mera en Oe Sener 136 PATI PrOpEr IE Sinta a N E a Ea N 139 4 18 2006 NSCRIPTOR user manual How nkCAD draws DOUNCALICS s e accscrecnconsassosashesnnedanecacanchonnadasarsadadneraeteneiaceaceess 139 Boundary Properties seseina a a a N aas 141 DEN DOUG ary Pe VICW S cedhsc atesceadaa neds n a a 146 DUPUCUUITS TETEreNCe PhO Perle Sisner senses twa E E 147 Using dras and dropin the tree VieW scsi siiesiec iane aa eA e aaea doa 148 Opening Designer with other layers visible cccccccccccssseseseccecceeeeeeseecee
37. Fit Curve button InkCal re draws the graph to reflect the changed values In addition to the ink definition properties the following fields control the appearance of the graph They appear under the X and Y Range heading Item Description AutoScale Set this item to False if you want to manually change the range of the x or y axes If AutoScale is True InkCal automatically calculates the X and Y ranges based on the current data points X Range This is the range of values on the graph s x axis This axis shows either dwell time for dots or inverse pen speed for lines Enter the minimum and maximum values of the desired range separated by a comma Make sure AutoScale is disabled before doing this Y Range The range of values on the graph s y axis This is either dot area or line width Statistics This section which appears below the ink properties lists a variety of statistics related to InkCal s curve fitting operation Some of these may be helpful in determining which ink model is most appropriate for the ink calibration data Like other InkKCAD windows InkCal has on screen help text describing fields and properties including the calibration statistics 7 FA Rando OF Cit Chatiotioe zi Max Iterations Maximum number of iterations allowed when performing regression Curve Fitting Algorithm St Max Iterations Page 112 4 18 2006 NSCRIPTOR user manual Item Description To see brief descriptions of the
38. Increase this to zoom in or out by more or decrease it to zoom in or out by less To set the zoom factor select this item enter a new value and press Enter 4 Select one of the objects in the view window To pick an object click on this button and drag the pointer over the area near the object InkCAD changes the object s colors so you can tell what you selected You can also select an object by clicking on it in the tree view Ed Add a fine alignment mark In multi layer DPN drawing fine alignment marks help you locate previous layers drawn on the substrate Click on this button to translate the selected layer move it in x and or y before drawing it Rotate the layer before drawing You usually don t need this unless you use multiple inks and you moved the sample between inks For more information see the section on alignment in Chapter 6 Please see Half toning options page 77 for information about this button 7 aa amp Note If you do not see this toolbar it is probably because you have Structure Designer open Look for Structure Designer in the InkCAD title bar Use the Window pull down menu to select a view or close Structure Designer by clicking on this button 2 028 A x 4 18 2006 Page 75 NSCRIPTOR user manual About the designer toolbar This is the designer toolbar which only appears when you are using Structure Designer PIZA O rale These are the buttons on the toolbar For i
39. Please see Boundary properties on page 141 for information on the boundary properties Page 128 4 18 2006 NSCRIPTOR user manual Element colors Drawing multiple layers at once Multi ink DPN process Multi ink process The properties in this group let you specify the colors for elements in a layer You can pick fill and border colors for dots lines paths and boundaries when they are selected and not selected You can pick from a set of pre defined colors or enter your own RGB red green and blue values InkCAD allows you to draw two or more layers at a time but NanoInk does not generally recommend it There are a few times when you might need to draw all layers at once however e To test a multiple layer pattern with one ink before starting a complex multi ink experiment or e To draw elements with the same ink but with different lithography properties One example is lithography with bias control using different bias settings for various elements See the bias control section in Chapter 2 for more information about this feature This section takes you through how to use InkCAD to create a multi ink pattern and draw it on a substrate This section describes a multi ink experiment using coarse and fine alignment Multi ink experiments are the most common use of the alignment features but they are not the only use For example you might want to do one or both of the alignment procedures without changing
40. Redp Retur 11 You have these three choices e Ifyou want to go back to the sample now and draw with this ink click on the Return button Continue with the next step in this procedure step 12 e Ifyou want to re dip in the same microwell s click on Redip InkCAD dips the pen or array again then raises it back to the re dip distance It enables the Redip and Return buttons as before and you have the same three choices e Ifyou want to re dip in another microwell and if you have more than one defined select this other microwell in the Inking tab list This moves the pen or pen array over the other microwell s Click on Redip and InkCAD dips the pen or array then raises it back to the re dip distance When it finishes this the software enables the Redip and Return buttons again and you have the same three choices 12 The rest of this procedure describes returning to the sample When you click on the Return button InkCAD lifts the pen s to the withdraw distance described in Inking option settings and the dipping process on Page 266 4 18 2006 Re inking after drawing 13 NSCRIPTOR user manual page 253 It then moves the pen s back to their location when you clicked on the Dip button before still over the inkwell To move to the sample first click on the Move Stage item s ON button if it is not already enabled Then in the Move To pick list just to the right select Move Above Sample Move Stage ON OF
41. See grid pixels in a bitmap 226 plane correction in Image Analysis 242 Point Editor dialog box 138 polarity of bias 50 polarity of sample bias 52 53 Polygonal line profile mode 239 polynomial surface plane correction 242 position sensitive photodetectors See photodetectors power strips 45 powering up the NSCRIPTOR system 28 Prescan Lines field in Instrument window 188 previews of output for boundaries 146 from multi pen arrays 271 in InkCal 101 in Lattice 220 in NanoWord 223 Previous Image Database menu option 166 Previous Position list option 173 Primary Inking Pen field 263 Printable property and tree view options 74 as a structure reference property 147 for alignment marks 134 in Structure Designer 136 when InkCAD applies it 148 printer icon in main InkCAD window 84 printing scan images 237 probes See pens Process menu in IA application 237 Profiles field in IA application 239 profiles of scan lines 238 properties of drawing objects 134 Page 354 properties of structure references 66 property pane of main InkCAD window 61 69 proportional gain settings 186 332 proteins as inks 15 PSPDs See photodetectors puck sample See sample holder puck push past movement while approaching 337 338 pyramidal probes 20 R radius of a dot 135 ranges for pen arrays 282 raw video image 194 RCA connectors 45 RCA2 solution 324 325 reader pens See also feedbac
42. Supplies Be sure to have the following items ready before using the inking procedures e The custom inking sample puck which holds both the inkwell and sample see About the inking puck on page 248 for a picture e A supply of all inks you plan to use if you wish you can put different inks in various reservoirs for multi ink experiments e An inkwell appropriate for the pen configuration and ink you plan to use e An ink dispensing kit IDK with one or more syringes or micropipettes If you want to use multiple inks you should either have one syringe or micropipette per ink or clean the syringe micropipette with a solvent before switching inks e The optical magnifier you received with your NSCRIPTOR system which can help you put ink into the correct reservoirs About the ink dispensing kit The ink dispensing kit IDK contains equipment and supplies for delivering ink to inkwells This is the IDK Syringe Out of plane z micropositioner knob Syringe thumbscrews In plane micropositioner knobs Slot in base for loading inking puck Base movable magnetized The reservoirs on some NanoInk inkwell designs are large enough to fill with a micropipette rather than the IDK Page 250 4 18 2006 Working with the syringe and needle Instrument and video orientation NSCRIPTOR user manual A few tips for using syringes and needles e To clean the syringe and needle first empty out any remaining ink Then
43. The first step in using it is to open a view that includes the boundary you are interested in Suppose this boundary is in your pattern To see the hatch lines go to the View pull down menu and select DPN Preview Here is how the preview might look with certain boundary property settings J This boundary has Hatch Angle Type and Step Type set to Fixed Border disabled and a HatchAngle of 45 The variation in hatch line darkness is a reflection of the boundary s DPN Preview Step property If DPN Preview Step is equal to 3 the shade cycles from light to dark every 3 hatch lines This does not effect how the instrument draws the boundary If your boundary preview is a solid color and shows no clear hatch lines it may be that there are so many hatch lines or the hatch lines are so thick that there is no gap between them Try zooming in closer on the boundary If that does not help temporarily set Hatch Angle Type to Fixed and Step Type to Fixed or Regular To edit the boundary properties from a view just select the boundary in the tree view and modify the properties shown below You may also want to increase the step size which results in fewer hatch lines If you temporarily change these settings be sure to reset them to their previous values when you are done previewing the boundary 4 18 2006 NSCRIPTOR user manual Remember that DPN boundary previews only show the pen s route while drawing They do not show the effects of ink
44. Workime in Structure Desle NEL es csctaassiactancuncsacusaden n a R T1 Delete Objects Onr MO TOE inae E A N ie aia 80 Dr g Zooming and SC AMNIN 8 sosse a a N 81 Drawno Om tie substa eera ascitic a 82 THe draw ie statis WwNdO Wessen A A 83 The drowine SaS COs ear A 84 Chapter d Inks and ink caHbrat oeseri e a O 87 How InkC AD draws dots and MeS eesis a 87 A DOut mk CISION pringis n E A E E Ea E 88 ME Chetan tON Ss atssncetit ie acncsc lids A 89 Wink COLIC OTS ana VAY CLS vata ade tisaieat ashen ds aed valent ta ces beastie leads dealin sine add tos E 90 TORPO STOLE Sa a a a a e a O 92 Cali DE ATION PAra ETS oreina pa aa eoehiads 94 NA E EE E E E A ge ecoetoneeennts 95 lnk Cal process OVERVIEW nersini i E A Ei 97 InkCal part 1 Choose options draw and scan test pattern cccccccseeseseeeeeceeeeeeeeeeees 98 lnKkCal part 2 Analyze the test pattern 4 453 wet E 104 InkCal part 3 Fit to a curve and display the results cc ccccccccccccceeeseseeeeeeeeeeeeeeeeees 110 Saving the ink definition to the ink database cecceccccesssesseeeeceeceeeeaeeeseeeeeseeees 114 Curve tune troubleshooune c 422 sasoagic aa aa eaieean a 114 Using the Curve MIU INESS age iiss sic eceseencacectnans A I 115 Tyme aditeen Ink MOE wishsncadessiy hd atid lea owineatenlnndcnten E 117 Disable Outil yine data POMS cereza ones 118 Contacting NanoInk about curve fitting problems 2 0 0 ceeececcccecceeeseeeeeeeeeeeenees 118 Chapter S More about nkCA D esras
45. a a l ideo Ta 3 NIZ l Oo XI i i ja al allj l il l z l l I l l l l EEF PESE Height 480 00 um 9 Zoom wWidth 640 00 um Laser Light lt Feedback 0 Turn laser on or off Focus amp zoom motor controls Video controls D Turn video light on or off InkCAD continuously acquires raw video images from the instrument s camera processes them with the settings in this tab and displays the processed image on the video monitor 2 Raw Processed image image 4 18 2006 Page 195 NSCRIPTOR user manual Using the motor controls Page 196 Motor locations InkCAD s processing includes applying settings such as brightness and hue adding a pen mark when necessary and zooming and panning This drawing shows the location of most of the motors you can manipulate in this tab Z motor 1 Z motor 3 These are the controls for the z and focus motors Click once to move all the way___ to the top of the motor s range A Click to move motor up or down Click here to gt STF by one step Hold stop this down to move movement multiple steps Step size gt 5 um lt 4 Click here to pick from recently used step sizes The instrument has three z motors You can move them one at a time by choosing Z 1 Z 2 or Z 3 in a pick list You can also move them all together by choosing Z All You can use the Zoom motor c
46. a pattern with two inks To do this you would need to find the T2 array s effective range for three consecutive pens two writers one feedback pen Here is how to do it 1 If itis not open already open the Instrument window Click on the Align Pens tab on the right side of the window Reset Notes x Offset Y Offset Feedback Notes 0 000 0 000 45 000 0 000 85 000 0 000 125 000 0 000 165 000 0 000 205 000 0 000 245 000 0 000 290 000 0 000 sjonuog WS Ki sooj capi E Alignment Procedure Select the Pens to be aligned from the table above and press the Start Alignment button to begin alignment Sunu apuu W Alignment Mark x 10 000 tum Size 15 000 um Y 10 000 tum Speed 0 500 um s Effective Scan Range sua u5 x 10 00 um Y 0 00 um width 90 00 um Height 90 00 um v Feedback Off This tab s main function is to do an array alignment for active or passive arrays as described in Pen array alignment on page 293 but the tab also shows some data on the effective range 2 Just below the toolbar is an indicator of the current pen or pen array type Pen 2 If this is the array type you want to use skip ahead to the next step If this is not the correct array type go to Changing the pen array type page 287 In this example you would change the array type to T2 Page 284 4 18 2006 NSCRIPTOR user manual 3 With the correct array type selected note the Effective
47. alternative method with certain inks when it s OK to dip all pens including the reader pen It works as described in the previous sections except that you mark and dip into a microchannel rather than microwell s 4 18 2006 Page 269 NSCRIPTOR user manual Using passive multi oen arrays Pen array contigurations Page 270 A multi pen passive array is a pen chip with a certain number of passive not active pens Several configurations are available from NanoInk For details please see NanoInk s multi pen passive array data sheet You can find it at www nanoink net or call us to get a copy The instrument still has only one laser beam for sensing cantilever deflection To do multi pen DPN patterning you first need to pick a reader pen the cantilever that will reflect the laser beam Then when you select the array type in the Pen Settings window described in Chapter 9 you specify which pen the laser strikes When you ink the pen array this pen can be either inked or ink free Some NSCRIPTOR users reflect the laser off an un inked pen that they later use for SPM scanning This is how it might look from in front of the pen array Laser beam Reader pen can be inked or ink free it s ink free here The system does not support AC mode imaging with multi pen arrays NanoInk offers a number of different passive pen array configurations Some of them are uniform each pen has the same length and width
48. are ready to explore a few of the more powerful features of the software These are the main subjects of this chapter e Using the online help e Importing CAD files page 122 e Using layers page 123 e Multi ink DPN process page 129 e About Structure Designer objects page 134 e Using drag and drop in the tree view page 148 e Opening Designer with other layers visible page 151 e About the DPN options page 152 e Propagating changes from views page 159 e Keyboard shortcuts page 161 e About the Outputs window page 162 and About the error reporter page 163 From the InkCAD application you can get access to this documentation at any time by pressing F1 or going to the Help menu Help p Nanoink InkC4AD Help Fi NSCRIPTOR Help ManoInk on the Web Upgrade Abou Usually the first entry in a Help menu is for getting specific help on the window you re using There s also an NSCRIPTOR Help option that opens the help at its opening topic 4 15 2006 Page 119 NSCRIPTOR user manual The NSCRIPTOR online help is an online version of this document Bookmark help topics Full text search you return to frequently Eo NSCRIPTOR user s guide Open the table m cig el of contents Hide Back Print Option Contents index Search Favorites gt Preface Chapter 1 Introduction Use the index Chapter 2 The DPN enviro NE Chapter 3 Getting started w to se
49. area ex C u d ed Polynomial surface Y leveling l Ot Polynomial X line leveling Do not change Z offset a fe e a S Polynomial Y line leveling Subtract plane offset Polynomial order 14 Set Minimum Z to zero i Create a conc NeW image with these Apply chosen correction settings settings amp display in right pane There are a number of correction methods available If you select 3 point plane correction first click on three spots in the original graphic Then click on Apply To include or exclude specific areas for correction first pick a shape for the selection area Area marker Then use the mouse to drag over one or more regions in the original graphic 4 18 2006 Image filtering Display in 3 D NSCRIPTOR user manual You can click on JA s button to filter scan data Several filtering methods are available This is the filtering window Filter 2 C scans 6 8 err fwd sur 2 POS fwd Graphic oe with filter Original applied scan graphic Include or exclude areas from i filtering see below Z range 2 37 um Z range 0 04 um Wseec Fier JSN mm mma 1 Pee Arcate Lay7 i C Blur simple neighborhood averaging l Entire Scan Area Area marker i l z Include Area dande Choose Average fs polumns f ows l l z ET Rectangl h Fi il ter ING Predefined Filter Gradient vertical Prewitt 3x l j E E a JS l p rocess Convo
50. cannot tell if the ink on a pen has run out If you want to be certain that all elements were drawn with an inked pen you need to inspect the completed pattern Ink characteristics play a big role in this e If you want to use more than one ink you do not have to re ink in the same microwells each time The only restriction is that your initial inking process must identify all microwells to be used You also need to select the correct microwell record in the Inking tab before each re inking 4 15 2006 Page 267 NSCRIPTOR user manual Page 268 Procedure e Coarse alignment is not required when the pen returns to the sample InkCAD returns the pen right to the location where you were drawing so you only need to do fine and possibly rotational alignment See Chapter 6 for information on alignment Here is a procedure for re inking after drawing a layer l If you need to first replenish the ink supply in the inkwell repeat the procedure in Inking part 2 Dispensing ink page 259 Return here after executing this other process If they are not already open open the Instrument window and its Inking tab Select a microwell record from the table by clicking to the left of the one you want to use Click on the Dip button This causes InkCAD to lift the pen or pen array move it directly to the microwell location on the inkwell and dip it in the microwell s It holds the pen or array there for the specified dipping tim
51. curve fitting problem If a step fixes the error you do not need to go on to the following steps See what the See Using the curve fit message message tells you Try a different ink See Trying a different ink model page 117 model Disable outliers See Disabling outlying data points page 118 Contact NanoInk See Contacting NanoInk about curve fitting problems page 118 4 18 2006 NSCRIPTOR user manual Using the curve fit message The first thing you can do to troubleshoot a curve fit problem is to hover the mouse pointer over the Fit Curve button s icon This brings up a message Fit Curve Curve Fitting was unsuccessful Please see This table describes the messages you might see Message Curve fitting was unsuccessful Please see if you can provide better initial estimates of the model coefficients One or more of the coefficients obtained by curve fitting are out of range i e negative Please verify that you entered the data in the right order You may also want to provide different initial estimates of the model coefficients Explanation There are two common problems that lead to this message e The current ink model is not appropriate for the ink Please see Trying a different ink model on page 117 Or e The coefficients from the last ink calibration from which InkCal calculates coefficients do not match the experimental data very closely InkCal s curve fitting algorithm tak
52. diffusion and thus they do not show exactly what the boundary will look like when drawn on a substrate When you are done with boundary previews disable the preview mode by going back to the View menu and selecting DPN Preview again Structure reference properties These are InkCAD s standard structure reference properties Property Description Flip Vertical Set this property to True if you want InkCAD to flip the structure reference s elements vertically or False otherwise Here s how one path would look if flipped vertically See Applying properties when drawing starts page 148 for other information on this property Magnification An enlargement factor for the elements in the structure reference A value of tells InkCAD to draw an element at its defined size A value less than 1 would cause it to draw smaller than the defined size and greater than 1 would draw it larger than the default size If you change this property the size or thickness of the structure reference s dots and lines could change depending on their Display Style properties See About the dot display style page 135 and About the line display style page 137 for more information on this See Applying properties when drawing starts page 148 for other information on this property Printable This property determines whether InkCAD will draw the structure reference s elements when drawing the current layer Please see Printable visible settings
53. do not touch the cable end marked as the pen location above Use the safe region shown above to hold the cable at the narrow end Also do not put the flex cable down on a surface with the bottom side up i e with the connector visible as this will break the pens Test 2 The active pen cantilevers are generally 150 microns long with varying widths and gaps between pens For detailed layouts and dimensions on all array designs please see NanoInk s active pen array data sheet 4 18 2006 Page 281 NSCRIPTOR user manual Pen ranges Page 282 The instrument s scanner is the only component in the microscope that operates with nano scale precision The motors do not move with this level of precision The only way to draw multi pen or multi ink patterns with nano scale precision is to use the scanner by itself to move the pens relative to the sample This means that to draw with multiple pens all the pens you want to use must be able to reach a common physical region on the sample using only the scanner Also your pattern must be small enough to fit in this region Example Consider a pen s available range the region it can reach using only the scanner When positioned at the center this is the scanning range for a pen The scanner in the NSCRIPTOR instrument has roughly a 90 micron range If pen 1 is the feedback pen and you add a writer pen these would be the reachable areas for each of them Pen 1 Pen 2 feedback
54. does not the affect the lithography parameters and Pattern Generation Settings There is one set of lithography parameters for all three pattern types However InkCAD keeps the Pattern Generation Settings and dot line properties separately for the Dots Lines and Dots and Lines patterns For example if you change some x and y offset values for the Dots and Lines pattern it does not affect those settings for patterns of Dots or patterns of Lines If you want to draw a DPN pattern with multiple inks you should calibrate each ink before drawing with it If you want to use a multi pen array rather than a single pen make sure to select a writer pen that is close enough to the reader pen the pen that reflects the laser so that the instrument can image the test pattern without difficulties You can look at or modify general application parameters or DPN default settings while using InkCal To do this go to InkCal s Tools menu and select Options See Chapter 5 for a description of the DPN options dialog box 1 Before drawing the InkCal test pattern you need to ready the instrument This usually includes placing a sample on the puck reflecting the laser off the back of the cantilever doing a laser red dot alignment approaching the sample with the pen and placing it at the park coordinates See Chapter 2 for more details 4 18 2006 Page 99 NSCRIPTOR user manual Page 100 2 Assign pens to layers In the main window s docum
55. done some DPN drawing and you want to do an SPM scan of the area where the objects should be you can right drag to select the region you want to scan then select Scan in the resulting pop up menu See Drag zooming and scanning page 81 to learn more about this InkCAD also displays the scan parameters in Last Selection 4 18 2006 NSCRIPTOR user manual The main toolbar This is the top toolbar o OPY SRNL lt Below are the buttons in the main toolbar Button Function Click on this button to start a DPN drawing operation Stop a lithography operation currently underway This button does not appear until you start to draw Open InkCAD s InkFinder function in the Instrument control window InkFinder assists in coarse and fine alignment other functions in the Instrument window let you make scans of the substrate See Chapter 6 for more information Open the pen setup window in which you can make settings for the type of pen or pen array you want to use Chapter 9 Click here to calibrate inks by using the InkCal module as described in Chapter 4 You should generally calibrate before every time you draw Open the Dots amp Lines module see Chapter 7 Dots amp Lines allows you to create arrays of cells each containing a pattern of dots and lines When you finish designing an array of cells Dots amp Lines exports it to InkCAD Ik Open the Lattice module Chapter 7 Lattice creates and exports to t
56. e Color Palette Use this option to pick a color palette to use for all open images IA comes with a number of pre defined palettes to choose from e Palette Manager View color palette settings and preview how the open images would look with different color palettes applied A s Window menu lists the full directory path and file name for each sur data file currently open Setting the default inout directory By default the IA application looks for input sur files in one of its own directories You can change this default to a different directory if you wish To do this start the Windows Notepad application and open this file c program files pacific nanotechnology pscan2002 master ini Look for the following lines near the beginning of the file MAGE FILES R DI RECTORY ScanData 4 15 2006 Page 237 NSCRIPTOR user manual Line profiles Page 238 This DIRECTORY line tells A where to look for scan files The location is everything in that line after the sign Change this to the directory you want to use for saving scans For example if you want IA to look in InkCAD s default directory for storing scan data use this MAGE FILES DI RECTORY c Nanolnk mages When you are done changing this DIRECTORY line save the file and re start the IA application You can click on A s im button to view profiles of individual scan lines This dialog box appears Extract Profile 1 C scans 6 8
57. e DAC cable This cable carries the bias signal from the microscope to the switch box It s a coaxial cable with a BNC connector that goes to the bias control switch box on DAC in and a Molex connector which plugs into a board inside the instrument DAC is short for digital to analog converter One of the microscope s DACs generates a bias specified by the instrument controller e Stage cable This cable transmits the bias signal to the puck and pen It is a Y cable One end has a BNC connector that plugs into the switch box at Bias out The cable terminates with a pin connector that goes to the sample puck and a sub miniature phono plug that runs to the back of the scanner assembly See System cable and hose connections page 45 for more information on these cables If you will not use bias control for an extended period of time NanoInk recommends that you disconnect the DAC cable from the scanner assembly This keeps the pen or pen array grounded which helps dissipate static charge Page 54 4 18 2006 NSCRIPTOR user manual Setting up bias control NanoInk takes care of the initial setup and configuration of the bias control hardware These are the tasks you need to do after that Disconnecting and reconnecting the scanner assembly and puck ends of the stage cable as needed for your experiments Bias control works on signal differential current moves from the pen to the puck or vice versa This means that to sup
58. eee A ee ee ee reboe ssossssasa Lattice I Li Li Li eds ae ee a 22 Ande 80 deg definition ee eee ee i gt gt gt gt gt gt gt gt gt A y y y g g 4 E L sR m AR se M e c 0 1 aal ee enb ee ee ee ee ee eee Y um i laane a M Sant OT ey Se Sa oe ee a Ca Weer eee ee E Te E l ESA E e A A AA E nee E E E E E E T E E E E i i f j 3 f A p F eee 7 Number of Dots Drawing Time Misc fields b s b d a a a th ee ee ee i set a i D E E E E E E E amp E E E E R p amp amp amp amp lll amp amp i lt Y Offset 0 um x 00 07 49 I Ea I 10 13 10 13 I Image Size 24 um a l Exit options There are two ways to exit from Lattice e Ifyou want to export the dots to InkCAD go to Lattice s File menu and select Export and Close You can create a new InkCAD document New Document export the Dots amp Lines pattern to a new layer in the existing document New Layer or export the pattern to an existing layer of your choice in the current document Select Layer e If you do not want to export the lattice simply click on the Exit button About the preview pane A The colored lines in the preview pane indicate the origin and axes for the available scan range Their position depends partly on the settings for Lattice s X Offset and Y Offset fields described later Lattice does not create any elements outside of the drawing area shown in the preview pane Page 220 4 18 2006 NSCRI
59. enabled when a dip completes 4 18 2006 Page 263 NSCRIPTOR user manual e Return Click here to return the pen s to the sample rather than dip again See Inking option settings and the dipping process page 253 for more information This button is enabled when a dip completes Procedure 1 At this point in inking the inking puck should contain the sample and an inkwell with ink in one or more of its reservoirs Replace the inking puck on the stage by setting it so the bottom peg fits into the groove then sliding it into position Groove Important note Make sure the inkwell puck s sample clips are on the left side as you face the instrument away from the pen s Sample clips Sample Pen approach direction lt __ _ _ Inkwell 2 If you are using a single pen skip ahead to step 3 If you are inking a multi pen array use the stage and video controls to find the desired microwell s on the video monitor Iteratively rotate the puck and translate the stage until the pens are parallel to the microwell array You might find it easier to do this with the laser off You can turn it off in the Video Motors tab In this image the pen and microwell arrays are parallel to each other there is a constant distance between the pen ends and the microwells Page 264 4 18 2006 3 NSCRIPTOR user manual If the pen array blocks your view of the microwells use the stage controls to move it a slig
60. file Export and Close transfer the dot and line specifications back to the main InkCAD window and close Dots amp Lines You can create a new InkCAD document New Document export the Dots amp Lines pattern to a new layer in the existing document New Layer or export the pattern to an existing layer of your choice in the current document Select Layer Close close Dots amp Lines without exporting the dot and line data to the main InkCAD window e Tools menu O Options opens the InkCAD options dialog box see Chapter 5 e Help menu O O Dots and Lines Help opens the Dots amp Lines topic in the NSCRIPTOR online help The help has the same material as the manual NSCRIPTOR Help opens the NSCRIPTOR online help at the beginning This section describes various parts of the Dots amp Lines window The cell preview pane shows the dots and lines defined and enabled for each cell This pane also shows the path taken by the pen or pen array as it moves from one element to the next 4 18 2006 Page 213 NSCRIPTOR user manual The array preview pane B The other preview pane shows the location of the identical cells and the available scan range For clarity it shows only the cell boundaries It also displays the pen s travel path from the initial approach or parking coordinates as well as the paths it takes traveling from cell to cell The two red lines in this pane show the vectors that
61. fit p 02 521 O O O O E fF all layers in of the current ink FitCuve I document model s equation t eaa ee ees those using the the data points A aa lt Back j SERER Eancel current ink are problem indicator checked by may also appear on default this button Click here to save the calibration coefficients and close InkCal Use this window to find the ink model and the values of the calibration coefficients that most closely fit the experimental data e Select which ink model to use via the ink model drop down list see About the ink definition properties on page 112 e When you use InkCal s automated curve fitting feature InkCal may or may not succeed at fitting the model s equation to the experimental data This depends on the quality of this data the appropriateness of the current ink model for the data and the previous values for the calibration coefficients InkCal uses them as a starting point when computing a best fit e You can manually change any coefficients you wish as described later in this section Page 110 4 18 2006 NSCRIPTOR user manual Procedure Note 1 Atthe end of InkCal part 2 you click on the Next button to exit from the measurement form see InkCal part 2 Analyze the test pattern on page 18 InkCal immediately graphs the data points and tries to fit the current ink model equation to them The characteristics of the resulting curve determine the calibration coefficients If In
62. following table lists the cables and hoses that connect NSCRIPTOR components in case you ever move the system or need to disconnect parts of it The cables are labeled with the cable numbers shown below Before connecting cables be sure to turn the power off for the master computer monitors lithography controller and E chamber controller Cable From To number Stage cables 1 DIGITAL I O on stage 40 pin DIGITAL I O on lithography ribbon cable controller 2 MOTORS on stage 50 pin MOTORS on lithography controller ribbon cable 3 VIDEO on stage RCA connector on master computer 4 SIGNAL ACCESS on stage SIGNAL ACCESS on lithography 60 pin ribbon controller 5 CALIBRATION SENSORS CALIBRATION SENSORS on serial 9 pin connector lithography controller 6 SCANNER on stage 25 pin SCANNER on lithography controller cable with D shaped connector 7 Main power strip Power connector on lithography controller 4 18 2006 Page 45 NSCRIPTOR user manual Cable number 8 Monitors amp PC 10 1 12 13 14 chamber 15 16 17 18 19 20 21 Page 46 From Ethernet port on lithography controller cable might be yellow or orange Chassis ground connector on stage might be green Video connector on monitor A Video connector on monitor B Power connector on monitor A Power connector on monitor B Power connector on master computer TEMP SENSOR on E chamber controller RH SENSOR on E cha
63. for the appropriate amount of time 4 Rinse the sample or pen with water then with methanol Page 324 4 18 2006 NSCRIPTOR user manual 5 Dry it with nitrogen When it s dry the sample or pen is ready to use again Making RCA2 solution Remember the safety warning at the beginning of this appendix The RCA2 solution is a 5 1 1 mixture of de ionized water concentrated ammonium hydroxide and 30 hydrogen peroxide Follow this procedure to prepare and use it to clean a pair of tweezers 1 Measure the desired volumes of the components into a glass beaker and mix them gently at room temperature 2 Heat the mixture slowly on a hot plate until you see effervescence 3 Place the ends of your tweezers in the bubbling solution for five minutes 4 Rinse the tweezers with de ionized water and methanol and allow them to dry 4 15 2006 Page 325 NSCRIPTOR user manual Page 326 4 18 2006 NSCRIPTOR user manual AC mode basics Appendix C Understanding AC mode AC mode is a good way to scan a sample after DPN patterning with fragile molecules that would be damaged by traditional contact mode imaging You select AC mode scanning in the Instrument window s Settings tab and configure it by running a frequency sweep using fields and controls in the Frequency Sweep tab You can easily run an accurate frequency sweep without understanding AC mode in depth by clicking on the tab s Full Auto button If you want mor
64. for the lines in your main pattern in the main InkCAD window Also you should use the same Repeat value for all lines in the table Spacing For patterns of Dots and patterns of Lines this is the amount of space in microns between the dots or lines For Dots and Lines patterns this is the spacing for each subsequent dot or line you add to the test pattern it does not affect the spacing between the pre defined dots or lines the ones that appeared when InkCal opened Increment For all three test pattern types this is the percentage to increase the dwell time for dots and the pen speed for lines by for each subsequent dot or line you add to the test pattern This does not affect the dwell times or pen speeds of the pre defined dots and lines the ones that appeared when InkCal opened Page 102 4 18 2006 NSCRIPTOR user manual The InkCal toolbar D This is the toolbar for Dots and Lines patterns Add a new dot Add anew line to pattern to pattern oe o f i Delete selected Delete selected dot from pattern line from pattern The appropriate buttons also appear for patterns of Dots or patterns of Lines When you add a dot or line a new entry appears at the bottom of the dot or line list To delete a dot or line first click in the grey border to the left of the object you want to delete so it s highlighted y Dw Time Enable oe 225 Then you can click on the appropriate delete button to delete the dot or line
65. have the tree show elements whose Visible property is set to true You might use this with fine alignment marks which appear in the tree for all layers They are visible and printable in the first layer and visible but not printable for the other layers e Select with Subnodes In the tree view a node is any object an element a structure or structure reference a layer etc that appears in the tree Some InkCAD nodes contain other nodes called subnodes Enable this item if when you select a node you want to also select the node s subnodes e Expand Selected Enable this option if when you select a structure you want the structure to automatically expand to show the objects inside the structure e Drawing Time This item speeds up the processing of InkCAD and or GDS II type CAD files If you select Disabled InkCAD does not calculate the estimated time to draw the pattern If you choose Fast InkCAD computes the estimated time much quicker 4 18 2006 NSCRIPTOR user manual Button Function than normal though not as accurately as usual See Chapter 5 for information on GDS II CAD files About the view toolbar This is the view toolbar which appears below the main toolbar but is only visible when you are using a view 2 Ppa tik KES The buttons are as follows Button Function Zoom in on the displayed elements Zoom out on the displayed elements a 25 This is the zoom factor
66. images 243 three point plane correction 242 Time column in Inking tab 262 Time field in Instrument window 266 time for completing pattern drawing disabling the calculation of 74 123 in Dots amp Lines 214 in Lattice 222 in layer properties 125 in main InkCAD window 61 tip bias See bias control Tip Exchange dialog box 34 276 tips on cantilevers See pens tip to tip alignment for pen arrays 293 TO CHAMBER NEBULIZER connectors 46 toolbars active pen toolbar 296 in InkCal 103 in InkMap 227 in Instrument window 185 in main InkCAD window 61 63 70 in Structure Designer 76 in views 75 inking toolbar 263 tree view toolbar 73 NSCRIPTOR user manual topographical scan images 173 188 Topography Gain in Instrument window 188 torsion of cantilevers 21 transistor example for structure references 66 translating layers in InkCAD 75 204 tree view deleting elements from 80 introduction to 61 62 nodes and subnodes in 74 toolbar of 73 using drag and drop in 148 Trigger Out connector on bias switch box 53 trigger signal for external bias control 52 53 tripod stack piezo systems 18 Tune button in Instrument window 339 tutorials 64 129 tweezers 324 325 Type column in Instrument window 201 U Undefined active pen status 303 unfilled text 224 uniform multi pen arrays 270 USB cable for active pen configuration 281 USB cable for E chamber controller 46 Use Layer s S
67. in feedback This item indicates whether to have the scanner lift the pen s between elements in a pattern This reduces the amount of ink drawn on the surface between elements Note When drawing boundaries this item does not affect whether the pen or pen array lifts between hatch lines There is a field for this in the boundary properties The default setting for this variable is Lift Pen s Between Elements in the InkCAD options See page 156 This item tells InkCAD how to raise the pen s between elements and after lithography Choose Scanner if you are not using the active pen feature described in Chapter 9 or you want the instrument to lift the pen s with the piezo Choose Active_Pen if you are using active pens and you want to lift by 4 15 2006 Page 127 NSCRIPTOR user manual Property Withdraw Distance Withdraw Pen s After Lithography Bias control properties Property Control Bias Lithography Bias Rest Bias Boundary properties Description retracting extended pens The default setting for this variable is Pen Lift Method in the InkCAD options See page 157 Withdrawing is using a motor to lift the pen s out of feedback farther than lifting This item is the height above the surface in microns to which the pen s should move when the scanner withdraws them The default setting for this variable is Withdraw Distance in the InkCAD options See page 156 This field indicates
68. in is to right drag over an area then release the right mouse button Page 70 4 18 2006 NSCRIPTOR user manual Then choose Zoom from the pop up menu The drawing area should look something like this id o e 4 gt i 4 Ya In the tree expand the D amp L Cell structure and select the first dot Notice that the view changes the appearance of the dot that you have selected f Nanolnk InkCAD View 4 i File Edit Yiew Insert Layers Instrument Tools Window Help oO 2BOeY lt Imported Document pha ik X x 3 De 5 921 Dot 2 Dot 3 Dot 4 Dot 5 Dot 6 Dot 7 Dot 8 Dot 9 Center 2 2 DisplayStyle DWELL_TIME DwellTime 1 Printable INHERITED Center d Coordinates in microns of the center d of the dot n Mouse Position 02 531 Y 3 91 Center 0 27 0 43 Drawing Time 0 3 17 Last Selection Manipulating the pattern If you wish you can also modify the dot by changing its properties in the lower left corner of the InkCAD window Go to the properties pane and click on the Radius property O General Center 2 2 Display Stile RADIUS D wellT ime 3 927 Printable INHERITED 4 18 2006 Page 71 NSCRIPTOR user manual Double click on the number change it to 0 75 and press lt Enter gt Here s how it should look Please see the Chapter 5 section on Structure Designer objects for information on th
69. in microns per second for the pen s to go in x y as they move when not drawing from sample to inkwell for example 4 18 2006 NSCRIPTOR user manual Item Description Dipping into Choose one of three available dipping methods Microwells e Full Approach With this method the system uses the motors to drop the pen or pen array until cantilever deflection indicates that it is nearing the surface At that point it uses the piezo to move the pen or pen array slowly closer until there is a significant enough change in the laser signal strength Full Approach is useful when inking multi pen arrays When the array lowers far enough for the feedback pen to go into feedback the other pens are dipped in the ink You can also use this setting to ink a lone pen When lowered toward an ink deposit you may see a message about the pen not going into feedback but it will nonetheless be dipped in ink e Fast Approach This method is like Full Approach except that the approach stops when the system first detects a change in the laser signal which usually indicates cantilever deflection Approaching usually takes less time with this method e Blind Approach This method simply lowers the pen s down a certain distance the Blind Approach Distance below You should generally use this dipping option only if the other two methods fail to ink your pen s or if you want to ink your pens manually Use caution with this method as
70. inks or you may need to do some other experimental work such as cleaning the sample or pen tip applying heat immersing the sample in chemicals etc at some point during an experiment We have created modular procedures for maximum flexibility 4 15 2006 Page 129 NSCRIPTOR user manual InkCAD provides various methods for performing simple multi ink experiments This is one way to do it though not the only way Using multiple pens coated with different inks Design multi layer pattern Add fine alignment mark Load pen with first ink Select first layer in InkCAD Run InkCal to calibrate ink Write the first layer Select next layer in InkCAD Run coarse amp fine alignment procedure Includes e Saving fine position e Saving coarse position Switching pens Laser alignment Coarse alignment Fine alignment Run InkCal to calibrate ink Write layer Page 130 4 18 2006 See the tutorial in Designing a multi ink pattern page 131 See Inserting a fine alignment mark page 133 See Chapter 4 See Chapter 6 See Chapter 4 NSCRIPTOR user manual Designing a multi ink pattern This section shows you how to create a simple multi ink pattern in InkCAD The example uses the two layer pattern described in previous sections To begin create a new DPN document by going to the File menu and choosing New Click the lt button to zoom in until the drawing area is roughly
71. it easier to do InkFinder alignment and video calibration See Chapter 6 for information on these two features Support for constant height lithography See Chapter 5 to learn more about this To see a detailed description of how the InkCAD software application has changed for this version use Windows Explorer to look at the installation CD that came with the system On the CD double click on a file called nkCAD v3 2 New Features This file is also available in the InkCAD installation directory normally at c program files nanoink inkcad docs 4 18 2006 Page 5 NSCRIPTOR user manual Page 6 4 18 2006 NSCRIPTOR user manual Contents PRCT ACE 3 snesoet Sane rd case T no saenen anes seucoeemea AA T 2 sey SC Ae Le e a a a a ensbeneauogse 3 Cermo CMI Al SU Ob eaa a A cuaiaut ea seaiaaaeh ca tecuaenasaseiea suas 3 PADOUU THES COCUIMEIIE asi 55 sa oe visa wad E E ivan aS pa des bias dena desea ews 4 A DOUT TNIS PLOdUCE versi ON seretii e a aadeneaaiades 5 Chapter 1 Intr ducu On es ms sascecsensee siasmeaennoe sn eam knee 13 Jbayu mere Lb ei a hea DPN dexeengenee errr wicmepeiee a sere Ue Carne Re 13 FHS fOriCal GEVElO PING ME sisone epaa sama E N 13 About scanning probe microscopes SPMS ccccccccccssseeseecceceeeeeeeeeeeeceeeeeeaeeeeeeees 16 APOE E NM eG heel ar oh eT aha uN aatunes Lic daa danaseea nc N uenert 17 Lateral force microscopy LEM hecenin a aceeetacnenaaoe ee 21 TK ANON CRY LOW acs te ies cal cic uaiantta inste
72. new layer the layer s bias settings are the defaults from the Bias Control tab but you can choose new and different values for each layer You can enable or disable bias control and specify the lithography and rest bias values for each layer If you want a DPN pattern that has objects drawn with different bias values the simplest way to do this is to define a separate layer for each set of bias values Then you can define each element in the layer with the appropriate bias settings The DPN options window has a Bias Control tab in which you can set default values for new layers whether InkCAD will apply bias control when drawing a new layer and specifying the default rest and lithography bias values For more information on any of these InkCAD functions please see Chapter 5 Note Since the microscope s DAC output only provides positive voltage signals the InkCAD software does not accept negative values for the rest bias and lithography bias fields If you want to apply negative bias to the pen with respect to the puck simply set the switch box s bias switch to apply positive voltage to the puck set Polarity to Neg on the front side of the box To apply negative bias to the puck with respect to the pen set the bias switch to send positive voltage to the pen set Polarity to Pos Remember to first set the switch box s Ext Bias to Off Page 56 4 18 2006 NSCRIPTOR user manual System bias states This table shows t
73. of dots based on parameters you specify In Lattice you specify a base pattern as a combination of two vectors invisible lines defined with a specific length and direction The vectors called al and a2 start at an origin Lattice repeats a dot pattern along these vectors Generally you will configure the vectors so they form an angle of a certain value this value is called alpha or a al In Lattice the al vector is always the horizontal unit vector You simply enter the endpoint of the a2 vector and the software automatically calculates the angle a For example suppose you had the following two vectors a1 defined as 1 0 and a2 specified as 0 5 1 Vector a2 0 5 1 7 et aie Vector a1 Origin point 1 0 The Lattice program starts by calculating the coordinates of the vectors at the center of its drawing area and then fills the area defined by the boundary coordinates and x y offset parameters Lattice tessellates replicates objects at the vector endpoints in all directions from the origin 4 18 2006 Page 219 NSCRIPTOR user manual How to use Lattice This is Lattice s window Lattice Generator G a se ee Boundary l I coordinates ee grrr rsssss x Offset A um Min 10 um Max 10 um B 10 13 1 J Eee Se ee R l O A E a E ea S a I ee Y Offset O um Y Min 10 um Max 10 um s ee I Preview Se eas ees width 20 um Height 0 um i pane ee ee ee ee
74. on page 136 for more information See Applying properties when drawing starts page 148 for other information on this property Rotation If you wish InkCAD can rotate the structure reference elements This is the number of degrees counter clockwise that InkCAD should rotate the elements for the structure reference s elements See Applying properties when drawing starts page 148 for other information on this property Structure Name This is the name of the object that the structure reference is a part of Visible This property determines whether InkCAD will display the structure reference elements in viewers showing the current 4 15 2006 Page 147 NSCRIPTOR user manual Property Description layer See Printable visible settings for more information X_Offset This value is the x axis offset distance for the elements in the structure reference relative to the origin See Applying properties when drawing starts page 148 for other information on this property Y_Offset The y axis offset distance for the elements in the structure reference See Applying properties when drawing starts page 148 for other information on this property DefaultLayer This is the layer number that new structure reference objects will be put in by default Layers This is a list of the layers in which the structure reference s objects appear Applying properties when drawing starts Some of the structure reference properties descri
75. oo 9 BY BOweY S Toolbars S4bl ae e 25 itt _ a wra Window viewing Tree Layer 1 controls view Drawing area InkCAD DisplayByLayer True gri id DisplayElement True PER Object DisplayPrintable False Orig n p ro p e rty DisplayVisibleOr True pane DisplayByLayers Scan parameters for last selection see below X Y position of x y coordinates of Estimated time to draw pointer center of window the pattern hh mm ss In the drawing area of the main InkCAD window you can create and work with drawing elements designing a pattern to draw on a substrate You can also import two dimensional CAD drawings see Chapter 5 for details 4 18 2006 Page 61 NSCRIPTOR user manual Page 62 InkCAD has several toolbars The top one with the large buttons 1s for starting or stopping a DPN drawing operation starting up some other modules that work with the main InkCAD window designing DPN patterns and setting InkCAD options InkCAD can work with simple patterns containing just a few drawing elements or complex ones with numerous interrelated elements The tree view pane shows and lets you modify the pattern s structure and the relationships between its objects In the object property pane in the lower left corner you can view or modify the characteristics of a selected drawing element or other object InkCAD updates the Last Selection item in the lower right corner whenever you drag to select a region of the drawing area If you have
76. open InkCAD closes it before opening the GDS II file you have the option to save it before closing if it has changed This dialog box appears Look in Docs My Recent Documents Desktop My Documents 3 My Computer a J My Network File name Po Places Files of type nkCAD Project INK v Cancel a You can use this dialog box to open InkCAD projects or GDS II files Since some CAD applications save their files with a GDS extension and others use a CAL extension you can choose either extension here The format of the data is the same Page 122 4 18 2006 NSCRIPTOR user manual Using layers Note When you select and open a GDS II file the new document replaces whatever had been in the tree view A at te SB m LEAF ADE From there you can examine the structure of the document open a view to see its contents modify objects add new elements draw it on a substrate and so on If you make changes be sure to save the file as a new InkCAD document see Chapter 3 for more information on this In the tree view the new document has the same layers and layer numbers as the original GDS II file had in the CAD application Pe wat ek 2S F P LEAF _A D6 a Layer 13 a Layer 19 a Layer 21 de Layer 24 a Layer 26 a Layer 49 dae eee ees Since InkCAD closes the open document before opening a GDS II file you cannot add a G
77. or extend PenControl Pen Retract Extend Feedback Status Slew Rate msec Extend 9 020 1 0 0 017 Iv Retracted 500 A E AA Retractea 500 0 017 Retracted 0 017 i oo Sa Retracted 0 017 Retracted Warning Pens can 0 017 Retracted be manually extended Actualfg 900 2 A z 0 017 Retracted same EIEEE operating range Retract Extend All All Selected Selected Slew Rate electe electe ae Config Contro Retract Extend selected selected pens pens If you want to retract and extend different pens at the same time do this step twice once for retracting the other time for extending 4 18 2006 Page 305 NSCRIPTOR user manual Page 306 4 18 2006 NSCRIPTOR user manual Appendix A Glossary A AC mode An instrument imaging mode in which a stiff cantilever vibrates a pen near the sample surface without actually touching it The instrument images the surface by measuring changes in vibration amplitude AC mode is useful for DPN patterns drawn with fragile molecules Contrast with contact mode AC mode piezo The NSCRIPTOR instrument s special piezo that vibrates the pen for AC mode imaging active pen A type of pen with a thermal actuator the cantilever bends down toward the sample in response to an electrical signal AFM An acronym for atomic force microscope air table A platform that uses compressed air to provide a vibration free surface alignment Fo
78. pen follow the procedure in Mounting new passive pen s in the pen clip page 41 to exchange pens in the clip e For active pens Locate the active pen flex cable which should be attached to the scanner assembly Disconnect the wide end of the cable by pulling it up with your thumb and middle finger like this The narrow end should pull off easily once the wide end is disconnected See About the active pen flex cable on page 40 for more information on this cable Page 36 4 18 2006 NSCRIPTOR user manual 7 Replacing a passive pen or pen array If you are inserting an active pen array skip ahead to step 9 If you are loading a pen not manufactured by NanoInk use tweezers to pick up the pen substrate If you re loading a NanoInk manufactured pen use tweezers to pick up the pen clip on the longer side Then rotate the clip horizontally 180 degrees Place the pen or pen clip onto a magnetic mount on the bottom of the scanner assembly with the pen chip pointed to the left Mount detail 8 Use the tweezers to push the pen or pen clip down and to the right as far as it will go The next few steps are for active pens only Skip ahead to step 12 4 18 2006 Page 37 NSCRIPTOR user manual 9 Replacing an active pen array Carefully pick up the new flex cable by the small tab at the narrow end as shown in the picture below Do not touch the end where the pens are Active pens are here See About the
79. point If you want the first cell to be centered on the available scan range s center enter 0 and Q In the Array tab there are three buttons that let you pick the spacing between cells Specify X amp Y Specify a lattice distance between vector see cell borders below ET OF Es Specify distance between cell centers You can use the rightmost button to specify a lattice of cells It works just like the InkCAD Lattice module described in Using Lattice on page 219 except that there is a cell at the origin of the lattice and the two vectors locate the centers of two other cells For example if the first vector is 10 0 and the second vector is 5 10 the cell lattice might look something like this You can specify the two vectors or the angle Any time you change one of these parameters the software automatically updates the others and re draws the array preview pane Page 216 4 18 2006 Selecting columns and rows NSCRIPTOR user manual If you see a red G symbol next to any of the scan parameters pause the mouse pointer over the icon to see a short message It usually means that you have entered a value outside the range of a field In the dot and line specifications you can select an entire row or column by clicking in the appropriate heading area Click in here to select a column 3 i Enabled 1 Y HI YI Width Repeat l ee e e e ee Right click for mate 3 3 3 3 0 2 0 menu see eae ie 3 3
80. polycrystalline PZT ceramics Several other design geometries exist The NSCRIPTOR instrument has a tripod stack piezo system in which separate x y and z piezos are driven by voltage ramps along three separate axes The available scan range 1s the area on the substrate that the piezo scanner can reach at any given time The pen s can reach areas outside this range only with the help of the motors When using the optional multi pen arrays you select one pen for reflecting the laser beam This pen can be inked or non inked The NSCRIPTOR system can level the array to keep all pens in contact with the sample 4 15 2006 Page 17 NSCRIPTOR user manual SPM limitations Nanolithography applications require a high degree of positioning linearity Piezoelectric scanners present several problems for these requirements e They are inherently non linear If you plot scanner extension as a function of applied voltage the ideal scanner would show a linear relationship between these variables However real scanner behavior often deviates from this ideal Extension wt Ideal Voltage e Piezo scanners exhibit creep As the controller applies a level of voltage to the scanner to move it a certain amount the scanner typically overshoots the desired target and then settles back to the target area e Piezo scanners are prone to hysteresis If you start with no voltage to the scanner then apply an increasing voltage up to a certain
81. produces a signal correlated with the surface topography Torsional twisting motions of the cantilever is related to the amount of lateral force applied to the tip during image itself a function of the friction between the tip and the sample The frictional response changes as the tip drags across different surfaces as shown below Lateral force imaging rather than topographical imaging 1s usually the best way to scan completed DPN patterns because the system can deposit ink in thin layers as thin as one molecule that may be hard to find topographically LEM operates well under fast scan conditions Quick imaging with an inky pen minimizes spurious ink deposition On the photodetector the laser beam moves left and right in response to torsion Position sensing photodetector Cantilever torsion KA Cantilever seen ee oe in profile from back or front Surface with two different materials With NSCRIPTOR s optional inking feature the DPN stage holds two substrates the sample and an inkwell chip This is the view from above when using the special inkwell version of the sample holder puck Center of puck Sample p Inkwell chip 4 18 2006 NSCRIPTOR user manual AC mode Note You can ink your pen s before drawing DPN patterns and you may later re ink if you want to replenish the supply or use a second ink You put ink into the inkwell s macro scale reservoirs with a special inking appara
82. same for each line NanoInk recommends that you use the same value here for the lines in the test pattern as that for the lines in your drawing pattern in the main InkCAD window Enable This appears in Dots and Lines patterns only Uncheck this item for any dot you want to temporarily exclude from the test pattern After changing any of these values for a particular dot click on another entry in the table to see how the change affects the preview InkCal part 2 Analyze the test pattern After completing part 1 of the ink calibration procedure see InkCal part 1 Choose options draw and scan test pattern on page 98 you have defined a test pattern drawn it on the sample and scanned an image of it This is how it might look at this point after drawing a test pattern of dots and lines View Image Tools Help Layer to Calibrate Scan ScanSie Jeo Scan of 522an n pattern from Measurement Tool i Object De Cime aji the InkFinder measurement l Aa 302 Y 1 365 ae controls and Rea Gy results l oi atanh E loaded from disk see below Calibration Pattern D fS O a AT Dw Time Area Enable i 0 5 Iv List of drawn o5 Ov dots and or a8 z lines o5 W 0 5 vV ns Iv Click here z Y2 Speed Repeat Width Enable to re open ee e InkFinder pi lt Back Next gt Cancel Lithography Completed The task in part 2 of the InkCal proces
83. section introduces you to the Image Analysis program About the toolbar This is the IA toolbar 2 Aa 2 e The toolbar has these buttons Description Click on this button to display a sur scan image file You browse to and select a file and IA displays it in its window Save the selected file to disk You can do this to save an image you modified in IA This button opens a window showing detailed scan line profile data For more information on this please see Line profiles on page 238 4 18 2006 Page 235 NSCRIPTOR user manual Button Description This button opens a window displaying a histogram of the z heights in the scan file See Histogram of z heights on page 241 Performs plane correction in which IA adjusts for the sample s levelness Please see Plane correction on page 242 This button lets you filter the scan data in various ways See Image filtering on page 243 Click on this button to perform a fast Fourier transform on the scan data and display the resulting image This button opens a three dimensional image of the selected scan file For more information see Display in 3 D on page 243 Adjusts the brightness and or contrast in the selected image See Controlling contrast and brightness on page 244 This opens an info card window containing miscellaneous scan parameters scan resolution line rate scan direction etc E
84. statistics move the mouse pointer over them right click and select Description from a pop up menu E Clive ee iar Description Then when you click on a statistic in the list help text appears in a box just below Applying the results to multiple layers The Target Layers area of the window lists all layers in the document and by default it checks all layers that use the current ink definition Before closing InkCal via the Save and Exit button click on the checkboxes for all layers to which you want to apply the calculated diffusion coefficients Note For the best DPN results if you apply the results to multiple layers make sure that these layers have similar lithography parameters e g bias to those used during calibration Exporting calibration data In the third InkCal window you can export the calibration data to a disk file that spreadsheet applications can open This allows you to keep hard copies of calibration data or track calibration values over time To do this go to the InkCal Data menu select Export Calibration Data and specify a directory and file name Here is how it might look in a spreadsheet A E D E 1 Ink IModel Params Date Dw Time Area 3 Ink 3 A 0 050 t 3 25 2004 10 33 4 0 1 0 5 0 5 0 048 6 1 0 093 r 2 0 148 5 3 0 215 g 4 0 315 10 6 0 41 11 8 0 568 12 10 0 642 13 12 0 865 14 16 1 084 15 20 0 5 16 ite 16 Ink Model Params Date Speed Width 19 20 Ink 3 w 0 051 v 3 25 2004 10 33
85. structure If you select Existing Structure choose a structure to edit in this dialog box Existing Structures Structured ka 4b Here s how it would look if you had a view showing layer 2 and then chose the previous layer s structure If you click on IA again it appears with the dots in the new Structure Designer window It s now easy to move the new dot to the correct location This section describes the Options dialog box which is common to the entire InkCAD application It lets you specify various parameters that affect DPN drawing and the general operation of the modules In most of them you open this dialog box by selecting Options from the Tools menu In the main InkCAD window though you would just click on the L button When you use this dialog box the changes you make affect all the InkCAD modules So if you open this dialog box from NanoWord for example any changes you make will also affect the main InkCAD window Lattice Dots amp Lines etc 4 18 2006 NSCRIPTOR user manual Note Lithography tab Lithography 2 Control Bias Control General Inking Grid and Anes Limits Iw View Axes f Points ECO EWE EE Minimum D well Time 0 01 3 t Lines f None Maximum Dot Diameter 20 um Grid Parameters Masxinum Pen Speed O umis al 40 A Masimurn Line Width 5 Ti 1 40 Define the smallest and largest dots and lines sa maoo that can be created in Ink CAD Top right comer Y2 40 Grid P
86. the entire line is drawn without defects It also may increase the width or thickness of the line The amount of ink deposited depends on how much the ink diffuses To set this value do one of the following e If you are looking at ayer properties enter the default number of times to draw each hatch line e If you are looking at boundary properties first click on the field s initially hidden L button Then enable or disable Use Layer s Settings to indicate whether or not you want to use the default layer setting If not set Value to the number of times to draw each hatch line In boundary properties L indicates that this value is the layer default This is the distance in microns between consecutive hatch lines Note The value of Step Type determines whether this field has any effect To set this value do one of the following e If you are looking at layer properties enter the desired default distance between hatch lines in microns e If you are looking at boundary properties first click on the field s initially hidden Ld button Then enable or disable Use Layer s Settings to indicate whether or not you want to use the default layer setting If not set Value to the number of times to draw each hatch line In boundary properties L in this field indicates that the value is the layer default This item tells InkCAD how to fill boundaries Your choices for this field are e LayerSettings in bound
87. the center of the dotmap in microns relative to the scanner origin Export DotMap gt x oo um T 0 000 um Cancel Then if you chose to export with the Select Layer option InkMap asks you to choose a layer k os Select Layer Layer ji 4 18 2006 NSCRIPTOR user manual When you finish this procedure the dotmap should appear in the InkCAD window Note If you close the InkMap window by clicking on I instead of one of the export methods described in step 5 above the dotmap will not appear in the main window InkMap options There are several InkMap items in the InkCAD Options dialog box Lithography Z Control Bias Control General Inking InkCAD Bitmap to Dot Map Color kep f All Colors but white C Selected Color E The pitels with the selected colore will be converted into dots Scaling 0 1 micron piel Relates the size of the bitmap with the size of the dot map Overfill factor o5 Ratio of the amount of ink deposited to the amount necessary to fill the area of one pixel An overfill factor smaller than 1 0 will result in a sparse amay Reset to Default OF Cancel Note After changing settings in the InkMap tab click on the J convert to dotmap button to see their effect The option fields are as follows Field Description All Colors but Enable this item if you want InkMap to export a dot for every White non white pixel in the original b
88. the clip indentation and hold it down 2 With a pair of tweezers place the substrate in the location shown above Push it right up against the T shaped guide Be sure to orient the substrate the way you want it 3 Release the clip Page 252 4 18 2006 NSCRIPTOR user manual Inking option settings and the dipping process This is the Inking tab of the DPN options O00 Lithography 2 Control Bias Control General Inking InkCAD InkMap Redip Distance 5 urn Height above microwell when waiting for redipping i H Height above the sample during s motion between sample Withdraw Distance um E E sT Motion Speed i 200 Umg Speed of the r stage motion between sample and inkwell Dipping into Microwells f Full Approach f Fast Approach The penje i are lowered in the microwell s until contact i detected f Blind Approach The penje is are lowered a specified distance into the microyvell s Blind Approach Distance i 0 um Reset to Default OF Cancel To better understand the top three parameters it helps to know that InkCAD supports re dipping immediately after dipping This flowchart shows how it works Dip pen s in microwell s Lift pen s to re dip distance Wait for user instructions Return to sample Move pen s back to sample During an inking operation the system dips the pen s into microwell s then lifts them back out a certain distance above the inkwell At t
89. the light source move continuously To stop it click on Rotate again Controlling contrast and brightness Contrast controls alter the visual difference between dark and light areas of an image and brightness controls make the image darker or lighter overall Click on JA s button to create a new image with different brightness and contrast settings This dialog box appears Use these sliders to modify contrast and brightness This pane ie a Click here image will to create look as new image modified with these settings Click here to reset contrast and brightness to previous levels You create a new image in this window leaving the original unchanged Page 244 4 18 2006 Choosing the stage control background NSCRIPTOR user manual Chapter 8 Inkwells and multi pen arrays Note This chapter describes how to use NSCRIPTOR s optional multi pen arrays and inkwells Multi pen arrays allow you to draw several instances of a single pattern onto a substrate Inking lets you dip a tip into an inkwell without changing pens The material in this chapter is meant for advanced NSCRIPTOR users NanoInk recommends that you not read this chapter until you have mastered the concepts and procedures in the preceding chapters The major sections in this chapter are e Choosing the stage control background e Using inkwells page 246 e Using passive multi pen arrays page 270 The Instrument wi
90. these requency Sweep une Amplitude uto Se z settings for Start Sweep Tune Auto Set r Start Sweep o Twe __ Auto Set its AC illati Drive F Offset Start Biia kHz Hkh from Peak Leet se mode scan 328 1 4 1 000 10 gt End Frequency kHz E eek Bal etpoint at Mark Below 338 1 Full Oscillation Amplitude 55 a Reset to Full Range When InkCAD finishes the frequency sweep operation it updates the values of fields that appear in the Settings sub tab described in General instrument setup on page 188 4 18 2006 NSCRIPTOR user manual Using the video and misc motor controls In the Instrument window s Video Motors tab you can control all instrument motors not related to x y stage control level a multi pen array and set up how images appear on the video monitor This is the tab Select which Z motor s you want to move here Z axis height indicator amp controls B Controls for leveling multi pen arrays see Chapter 8 Video zooming amp panning pane C How the software creates the video image Toolbar A l Eie wesa sinea caaea eo o I ey Step Sizefdeg 0 04 2 Approach Withdraw Exchange Stop Capture lt SE Z pao e i Wg EER Se A l Z All ii Focus l Z Position i l S l 1000 0 um A i A Zoom Ne Aig 4 A ZSurface Nom m 1 2 o l Ep Ya y gt I x 6 500 00 um 15um l5um v AT ee ee aT St Pen Leveling a 4 2
91. use the J load bitmap button to open the bitmap Ge E Ele Hes Took x k at vi y e 4 18 2006 Page 231 NSCRIPTOR user manual 2 Click on the 2 button to open the InkMap options Click on Selected Color then on the color box next to it In the resulting color selection window click on yellow CTD OO Basic colors ETEEN EN ee fe Ee EE EEE Ee EEE E Custom colors BEEHEEEEE BEEHEEEEE Define Custom Colors gt gt 3 When you close the options window and click on InkMap s H convert to dotmap button InkMap creates a dotmap of the pixels of that color w Em wo rh Se TUH dels adar She mean lo bi wilian 23S ele oap aih m erh AD AT 4 You can now save this dotmap and close InkMap go to the File menu and select Export and Close and New Document The dotmap appears in a new DPN document 0454 aari Page 232 4 18 2006 NSCRIPTOR user manual 5 Open InkMap again and load the same bitmap In the InkMap options choose orange as the selected color COD OO Basic colors E EN ee SESTE ine Li DoR E E mE i a BEE Ej Custom colors BEEEEEEE BEEEEEEEH Define Custom Colors gt gt 6 When you close the InkMap options and click on the LJ convert to dotmap button InkMap creates a new dotmap for the orange pixels Inka i EH w Fh e TE dots nacar SEA man bo bo valian mri Se 2 eins D
92. user manual Property Description coefficients For more information on inks and ink calibration please see Chapter 4 Integral Gain This is a number multiplied by the error signal values to find how much directional error correction to apply in feedback A gain set too low could cause unresponsive surface tracking while too high a value could lead to scanner oscillation The default setting for this variable is Integral Gain in the InkCAD options See page 154 Litho Mode This is a pick list in which you can choose from the following operating modes e Constant Force this is the normal feedback mode where the system tries to keep the pen s downward force constant e Constant Height in this mode the pen is not under feedback control Instead it stays at a particular height above the sample For information on how to use this mode please see Using constant height lithography page 155 The default setting for this variable is Litho Control in the InkCAD options See page 153 Park Coordinates This specifies the micron x and y coordinates for the location in the available scan range where you want to park initially approach the pen s before and after drawing This is usually a coordinate within the available scan range but outside the area where you plan to draw such as 40 40 The default setting for this variable is Park Coordinates X Y in the InkCAD options See page 154 Pen Arr
93. video objective relative to the substrate Adjustment screws Controlling the environmental chamber The NSCRIPTOR system comes with hardware and software to control the temperature and humidity inside the E chamber To use the control software double click on this desktop icon EChamber This is the chamber control application Current temperature amp humidity Green indicates reading is within range of sponi lf 22 2 C see below Blue indicates otherwise Click here to turn the heating cooling unit s fans on or Off Click here to turn all temp and humidity gs ene ee alee controls on or off A i e o o o a E Temperature and aus ae humidity setpoints Click on one of these buttons to enable disable control of that variable To change a setpoint you can move a slider or enter a numerical value below the slider The maximum and minimum values appear at the ends of each slider Page 44 4 18 2006 NSCRIPTOR user manual Control hardware System cable and hose connections CAUTION The temperature reading appears in green if the present value is 0 5 of the setpoint The humidity tolerance is 0 2 of the setpoint This is the E chamber controller which maintains your temperature and humidity settings inside the chamber Please see System cable and hose connections page 45 for information on how the controller connects to the rest of the NSCRIPTOR system The
94. whether you want the pen s to rise off the surface under motor control when the system finishes drawing a pattern Multi layer drawing If you want to draw multiple layers in one operation only the last layer s Withdraw Pen s After Lithography setting affects what happens after drawing The default setting for this variable is Lift Pen s After Lithography in the InkCAD options See page 157 Description This item specifies whether you want to use the system s bias control feature for this layer The bias feature in effect applies a voltage while drawing For more information on bias control please see Chapter 2 The default setting for this variable is Control Bias During Lithography in the InkCAD options See page 157 The desired bias value in volts when doing lithography for this layer This field may not have a negative value The default setting for this variable is Lithography Bias in the InkCAD options See page 157 This is the desired bias value in volts when not doing lithography This field may not have a negative value Take care when using a non zero value When the bias control feature is enabled the system applies the rest bias at all times except during lithography The default setting for this variable is Rest Bias in the InkCAD options See page 157 The boundary properties are default values for the boundaries in a layer Individual boundary elements can override these defaults if needed
95. window Font settings From the NanoWord window you can click on the Font Setup button to change the font and text characteristics A standard font selection dialog box appears in which you can choose a font the lettering style italic bold etc and text size There are a number of available fonts it depends on which fonts are installed on the master PC and most of them have a few font styles We suggest that you experiment with the Size parameter to find a good text height To do this type some text in NanoWord set it to a particular size in the font dialog box and export it to InkCAD Then use the InkCAD grid to measure how big the letters are you can then adjust the font size setting accordingly Each setting made in this Font window applies to all the text in the NanoWord window You cannot apply certain font settings to a portion of the text though you can use NanoWord more than once to create multiple text strings with different font settings Saving font settings Once you find a set of font parameters you like you can save them to disk for future use To do this go to NanoWord s File menu and select Save Font Parameters Enter a name for the new font settings file and save the new file If you later want to use a saved font settings go to the File menu select Load Font Parameters and select a font file Saving entered text When you export NanoWord output to InkCAD remember that NanoWord sends back the text on
96. 10 microns high This tutorial shows you how to use InkCAD s grid markings and snap to grid feature which make it easier to design precise patterns First go to the View menu and select Snap to Grid Then click on the button to open the InkCAD options In the InkCAD tab enable View Axes and set View Grid as to Points Verify that Grid Pitch in X and Grid Pitch in X are both set to 1 This tells InkCAD to display grid marks one micron apart Close the InkCAD options dialog box The first DPN element will be the dot Click on the oO button move the pointer near the origin and drag out a dot After updating the dot the drawing area should look like this If you did not start dragging the dot exactly from the origin notice that InkCAD s snap to grid feature moved the center to the nearby grid mark the origin Now close Structure Designer by clicking on this button At this point the tree view should show one layer containing a structure a structure reference and a dot Now it s time to design the second layer Click on the tree view s button creating a new layer while showing the elements from 4 18 2006 Page 131 NSCRIPTOR user manual the first layer InkCAD creates the new layer and opens Structure Designer Zoom in again until the drawing area is about 10 microns wide Next draw the square as a path with four line segments Start it at the coordinates 1 1 and make each segment two microns long It shoul
97. 11 Au on 2 BEF 50 afd 00 The optimal frequency is in this peak area To isolate it more InkCAD runs another sweep in the narrow frequency range where the resonant frequency occurs The optimal frequency is generally somewhat less than the frequency that causes the highest oscillation amplitude Frequency sweep procedure Follow this procedure to perform a frequency sweep 1 Load an appropriate cantilever into the instrument AC mode cantilevers are stiffer than those used for contact mode scanning 2 Put InkCAD into AC scanning mode To do this go to the Settings tab and set SPM Mode to AC Mode 4 18 2006 Page 193 NSCRIPTOR user manual Page 194 3 Align the laser Follow the procedure in Chapter 2 4 Go to the Frequency Sweep tab Click on the Full Auto button to run a fully automated frequency sweep Or if you want to have more control over the process run it manually See the instructions in Appendix C This is how it might look when the operation is done The yellow vertical line is the optimal resonance frequency File Tools View Help Stage Control SPM Images SPM Setup Settings Align Laser Calibrate Frequency Sweep Frequency kHz 1200 N m 407 S r a Optimal 387 328 333 338 epee eee ee InkCAD Drive Amplitude Setpoint v Drive Freg kHz will use l 0 586 0 449 333 40 lt F g Tune Ampitude Auto Set _
98. 15 Dock Control Panel menu option 209 documents See also layers and ink definitions 89 copying calibration data between documents 114 creating upon module exit See exit options ink properties of 92 introduction to 64 viewing an entire document 72 dotmaps 226 227 dots See also dotmaps elements lines and contact diameter 97 as drawing elements 67 as non GDS II objects 122 color of in layer properties 129 132 contact diameter for See contact diameter creating in InkCAD 76 deleting in InkCal 103 diameter of 162 diffusion coefficient for See inks drawing on substrate 211 dwell time for See dwell times editing 134 how created 87 in InkMap 226 lattices of dots See Lattice module measuring size of 104 108 182 number of in a lattice 222 properties of 134 red dot See red dot alignment size of 215 222 too small to draw 162 using in calibration 98 104 Dots amp Lines module exiting from 213 fields and controls for 213 how to use 213 in InkCAD tutorial 68 introduction to 211 seeing x y axes in 158 selecting columns and rows in 217 tabs in window 214 Dots and Lines InkCal test pattern 98 DPN See Dip Pen Nanolithography DPN Lithography Status window 83 DPN options See Options dialog box DPN preview feature 146 DPN Preview Step property 142 146 DPN server bias at server startup 57 continued 4 18 2006 DPN server cont introduction to 59 messages from 84 status window of
99. 18 2006 NSCRIPTOR user manual Revision Date Description of changes printed for this version of the doc F 11 2004 Revised for active pen feature InkCAD version 3 0 G 4 2006 Updated for InkCAD v3 2 Safety statement LASER OPERATION AFM SCANNING HEAD LASER WARNING NEVER LOOK DIRECTLY INTO THE LASER BEAM ANGER IN ORDER TO AVOID THE POSSIBILITY OF THE USER INADVERTENTLY LOOKING INTO THE LASER ALWAYS USE THE SOFTWARE OR HARDWARE preemie TO SWITCH THE LASER OFF BEFORE RAISING THE HEAD TO EYE LEVEL EYE CONTACT The diode laser in the NSCRIPTOR scanning head complies with US 21 CFR 1040 10 and is certified as a Class Ila laser The laser wavelength is 670nm and the maximum power is 3 mW In addition to the above please follow laser safety control measures in American National Standards Institute Z136 1 1986 Wherever high voltage is present on the system extreme care should always be taken to avoid direct contact while the instrument hardware is powered on Always power off the equipment before attempting to remove any panels or PC boards and before touching any connectors by hand or with electrically conductive tools Many of the chemicals used in the DPN process are corrosive or otherwise dangerous if not used properly Always use approved protective gloves goggles and lab coats Getting technical support At NanoInk we value our customers and their satisfaction with our products If you are h
100. 2 filling via micropipettes See micropipettes filling with ink 259 inking without inkwells 207 inkwells shipped with system 27 introduction to 246 leveling a pen array to 255 272 loading into inkwell puck 252 moving above during inking 173 option settings for inking 253 overview of inking process 21 249 positioning pens over 255 preparing for inking 250 re dipping into 253 where placed on puck 248 in plane micropositioner in IDK 250 instrument See DPN stage Instrument pull down menu 166 NSCRIPTOR user manual Instrument window See also InkFinder Align Laser tab of 29 Align Pens tab of 295 alignment wizard of 205 and ink calibration process 101 Calibrate tab of 190 choosing background image for 245 crosshairs in 169 Frequency Sweep tab of 191 full size scan images from 174 182 how to open 166 images captured by 200 InkFinder tab of 200 Inking tab of 262 introduction to 63 165 laser alignment in 29 New Alignment button in 205 opening with existing image database 166 opening with new image database 166 pull down menus in 208 Reset Instrument menu option 209 Settings tab of 187 SPM Controls tab of 199 SPM Images tab of 173 SPM Setup tab of 186 Stage Control tab of 168 surface scans from 173 toolbars in 165 185 Video Motors tab of 194 working with images in 167 insulating layer of sample bias pucks 53 integral gain and frequency sweeps 332 as a scanning parameter 186 i
101. 29 alpha size of lattice angle 219 222 alternating current imaging mode See AC mode ammonium hydroxide 325 amplitude of cantilever resonance See AC mode Angle field in Lattice 222 angle of boundary hatch lines 142 application software See InkCAD 4 15 2006 Page 341 NSCRIPTOR user manual Apply to button in DPN options 155 approach point See park coordinates approaching the sample approach parameters 188 approaching before lithography 127 how to approach 42 in the Instrument window 208 array references 66 Arrayer See Dots amp Lines arrays in Dots amp Lines 212 214 See also cells arrays of pens See multi pen arrays arrays of points 138 arrow buttons in Instrument window 170 aspect ratio of scan image 244 atomic force microscopes AFMs See DPN stage attractive inter atomic force 330 Au as an active pen element 279 Auto Range feature in scanning 179 180 181 Auto Set button in Instrument window 340 AutoScale field in InkCal 112 available scan range See also effective scan range and InkCAD grid 158 and linearing the scanner 191 description of 18 in Lattice 220 in main InkCAD window 61 in multi pen array preview 272 in NanoWord 223 B Before closing this window message 301 bending of cantilever 17 bias control feature and active pens 281 and drawing all layers at once 129 and ink calibration 94 and pen replacement procedure 34 40 and puck removal procedure 33
102. 3 3 0 2 0 below To select consecutive rows or columns select the first one press the lt Shift gt key and click on the last one To select non consecutive rows or columns select the first one then hold down the lt Ctrl gt key as you select others You can manipulate a row by right clicking to the left of the desired row which brings up this menu Delete Cue Copy Paste Insert adds a row above the currently selected row and Delete removes the selected row The other menu options work as they do in most other Windows applications 4 18 2006 Page 217 NSCRIPTOR user manual Scaling values Dots amp Lines can apply a scaling factor to the numerical columns the x y coordinates element sizes etc The scaling factor allows you to multiply all values in one or more columns by a certain number To do this first select your column s Then right click in one of the selected column headings and choose Scale from the resulting menu YI Speed a This dialog box appears Enter or select the scaling Factor gt 2 t OF Cancel The list of scaling factors includes the factors most recently entered in this dialog box if any Choose a scaling factor or enter one of your own Then click on OK to apply it Page 218 4 18 2006 Using Lattice What Lattice does NSCRIPTOR user manual A lattice is a regular repeated array of objects InkCAD s Lattice module creates a lattice
103. 8 2006 Page 9 NSCRIPTOR user manual URNEM a se A E AR 226 WICK Map Ges siuna eaa a E AS 226 OW touse Ink MAP encina e A 221 PONV Z OSCAR IMACS a n A E E eee cure ae 235 USINE TA eea S eased peas co Niel uiisi haat eiealocban 235 Sete he deint niput GITCClOLY eiir wana ven ih cecawecsssenecsaaey euch anata 237 Ee POCO NE Soenen a E Pavone misasennsehiatad nace seesaameey 238 Pistoranr of 2 Doe DiS csat aaa a delckie Mena ees 241 PTS COLT eiD i ace Actas E E A E TEI AAEE EE EA A A ARE E E EA T 242 inace Mer eon a a a T N A 243 Pipli We Deen a me orn Pres r ee Per en re aa ne Ne 243 Controlling Contrast and Of oNtness aececi tatac cues toca cacuie eaters 244 Chapter 8 Inkwells and multi pen arrays cccccesseessecececceeeeeeeeceeeeeeaaaeeseeeeeeeeseaeeees 245 Choosing the stage control background ccccccssseseeececcceceeeeeseeceeeeeeaaeeeseeeceeeeeeaas 245 Usine AIK WEIS ssri aE e Eaa Na Aa 246 IMGFOGUMET OM 1O TK WEES g E E a dhe bien tte boasbaas 246 PA DOUE TIS MEMO PU Ke oso ieee ates cence a saeaadem E eae e eee tag eaee 248 Loading the inkwell sample Puck ccccccssesssecccccceeeeeeeeecceeceeeaeeeeeeceeeeeeauaneeeeees 248 Initial inking vs re inking after CrawINg ce ecccccccccccaseseeeecececeeaeeeeeeeceeeeeeeeeeenenes 248 The Dasicinkino PL OCESS 20440 consustdcanscelnes a a ae aE 249 Getme ready TOP 1 0 esnan api a ae T 250 Inking part 1 Positioning the Pen S jissie aE E 255 linki
104. Bias During Lithography field 157 Control Bias property 128 Control tab of the Pen Settings window 301 controller of DPN stage See lithography controller controller of E chamber See E chamber controller box coordinates for creating dots 215 for drawing lines 215 for lattices 221 for parking pen s See park coordinates copying elements 148 Correct Rotation items in Instrument wndw 206 corrections for piezo behavior 19 Created column in Instrument window 201 creep and piezo scanners 19 crosshairs in InkCAD 124 182 crosshairs in Instrument window 169 Current field in Pen Settings window 298 301 current electrical applying to substrate 23 Curve fitting was unsuccessful message 115 curves in InkCal 110 114 D Dac 1 field in Instrument window 189 DAC cable for bias control 54 DAC In connector on bias control switch box 53 data channels 173 Data field in Options dialog 158 data points in InkCal 110 116 118 4 15 2006 Page 343 NSCRIPTOR user manual data sheets how to get 247 data structures in InkCAD See objects data types in GDS II files 122 databases of images See image databases default field in scan window 179 Default button in Instrument window 199 Default column in Pen Settings window 300 Default Dwell Time for non diffusive inks 96 Default Lithography Speed field 96 Default Pitch field in Pen Settings window 298 DEFAULT property setting 136 Default Sam
105. D s grid if enabled Y2 Page 158 4 18 2006 NSCRIPTOR user manual Field Description Grid Pitch in X In InkCAD s display if you enable the grid it appears as a series of marks or lines This field specifies the number of microns between marks along the x axis Grid Pitch in Y The number of microns between grid marks along the y axis Minimum Dwell This is the shortest amount of time allowed for the pen s to Time remain stationary while creating a dot This is an instrument specific value Maximum Dot The largest diameter a dot may have in microns Diameter Maximum Pen This is the fastest x y speed the instrument can achieve when Speed moving the pen relative to the sample This is an instrument specific value Maximum Line The largest width a line may have Width Reset to Default Click on this button to reset all values in this tab to their factory button settings InkMap tab InkMap is an InkCAD module that creates a DPN version of a bitmap graphic file For information on the fields in the InkMap tab please see Chapter 7 Propagating changes from VIEWS When you open a view InkCAD makes a copy of the part of the tree you selected This allows you to change the drawing parameters without affecting the main tree Suppose this is your document tree a Layer H A Structure ts Structures 1 Struct Ref Dot Z Line 2 Layer 2 h Structured ie Structur
106. DS II file to an existing pattern However you can open a GDS II file add InkCAD objects to it and save the pattern as a document If your InkCAD projects or GDS II files are large you can improve InkCAD performance by changing how it displays the estimated time to draw the pattern The main InkCAD window s tree view pane has a BH button If you click on it select Drawing Time from the resulting pop up menu You then have two options Disabled tells InkCAD to not calculate estimated time and Fast makes it compute the estimated time much quicker than normal though not as accurately as usual One of InkCAD s most useful features is layering A layer is a grouping of objects The idea behind layering is that you make a pattern consisting of one or more separate layers Then when you draw on the substrate you draw each layer separately If you want to do multi ink DPN patterning you change pens between layers You can also use layers to vary other properties besides ink type For example you can design a pattern that draws some elements while applying bias essentially providing an electric charge while drawing for one layer then not applying bias for other layers 4 18 2006 Page 123 NSCRIPTOR user manual Page 124 Note Suppose you want to draw the dot and square image out of two different inks one for the dot and the other for the path and four lines surrounding the dot Ink 1 a Ink 2 To make the dot out o
107. F Sample Loading Move Above 5S ample gt Move bove Inkwell Previous Position InkCAD moves the pen over the sample Since this procedure describes an initial inking operation from there you can use the live video and the stage position controls to pick a location for drawing In addition to the initial inking process described in the previous several sections InkCAD allows you to return to the inkwell and re ink after DPN drawing There are a few important things to note about this e Be careful with terminology here re inking is returning to the inkwell after drawing while re dipping is dipping the pen s in ink again immediately after dipping discussed earlier in this chapter Re inking involves moving the pen s from the sample to the inkwell re dipping does not e You must go through the initial inking process before you can re ink after drawing InkCAD needs to know the location of the microwells you want to use so you have to identify all the microwells in the initial inking See The basic inking process page 249 for more information e InkCAD does not support re inking midway through drawing a layer You can only return to the inkwell and re ink between layers If you want to draw a pattern one time with parts of it in different inks the pattern must have multiple layers It may take some experimentation to determine how many elements you can draw in each layer before re inking e The NSCRIPTOR system
108. InkCAD has the following types of elements e Dots The system draws a dot by leaving the pen s stationary for a short time e Lines The system draws a line by depositing ink as the pen or pen array moves from one endpoint to another e Paths A path is a set of one or more interconnected lines Here are a few examples NIINE e Boundaries A boundary is a filled object consisting of a series of connected border lines The line endings are the vertices AB You define the vertices and specify how InkCAD should fill the element during drawing It fills the shape by drawing a series of parallel lines called hatch lines By default InkCAD draws hatch lines parallel to the longest side of the element like this For detailed information about how boundaries work see Chapter 5 s section on how InkCAD draws boundaries 4 18 2006 Page 67 NSCRIPTOR user manual Design example Defining a pattern in another Page 68 module e Fine alignment marks A fine alignment mark is an X shaped element that enables the precise alignment of different layers You can only draw a fine alignment mark as part of the first layer Then you align each following layer to the first by scanning the substrate to find the alignment mark s exact location drawing it relative to that location Generally you should only add a fine alignment mark to a document after its design is complete You can get more familiar with the design c
109. InkCal process overview page 97 e InkCal part 1 Choose options draw and scan test pattern page 98 e InkCal part 2 Analyze the test pattern page 104 e InkCal part 3 Fit to a curve and display the results page 110 e Curve fitting troubleshooting page 114 In InkCAD the two basic elements of any drawing are dots and lines Other more complex elements like paths and boundaries are made of one or more lines To draw a dot InkCAD moves the pen to the desired location and stays stationary for a period of time the dwell time For lines the pen contacts the surface at a first point and moves toward a second point at a fixed speed You can watch this pen motion on the video screen during lithography InkCAD s computer assisted design environment allows you to define dots and lines in two ways e You may enter the dwell time or pen speed for the instrument to use when drawing a dot or line or 4 18 2006 Page 87 NSCRIPTOR user manual About ink diffusion Page 88 e You can specify element dimensions dot diameter or line width This is the most common method and it is InkCAD s default With this method InkCAD calculates the appropriate dwell time and pen speed to draw the object as desired DPN dot diameter and line width depend on multiple factors including the following among others e Environmental conditions like the ambient temperature and relative humidity e The chemical composition of th
110. M Setup tab on the left side of the Instrument window allows you to configure the instrument These are the functions available e General setup Set the scanning mode feedback approach and other parameters in the first setup tab See General instrument setup for more information on this 4 15 2006 Page 187 NSCRIPTOR user manual e Laser red dot alignment Adjust where the laser light appears on the position sensitive photodetector See Chapter 2 for more information e Calibration Adjust the instrument for non linearity issues common to scanning probe microscopes and reset the stage position so the instrument knows exactly where the stage is Please see Scanner and stage calibration on page 191 e AC mode setup Perform a frequency sweep to calibrate the instrument for non contact scanning See Frequency sweeps AC mode setup page 192 for more information General instrument setup The first of the SPM setup tabs is the Settings tab in which you can specify a variety of instrument settings If the computer is communicating with the instrument controller InkCAD gets the initial values for most of these fields from the controller This is the tab File Tools View Help Stage Control SPM Images SPM Setup SPM Mode AC Mode Settings f Contact Mode Demodulator Gain C AC Mode Demodulator Filter Imaging Approach Settings Overscan Points i Surface Value i 000 lt Prezcan Lines i H
111. OR can apply bias to the pen tip or sample puck bias control switch box In the optional NSCRIPTOR bias control feature this 1s a small box that applies electrical bias to either the pen tip or sample puck boundary An InkCAD element that is a filled object with a series of connected lines as borders InkCAD fills a boundary by drawing parallel lines inside the borders bubble trap On a DPN Inkwell this is a cavity between microchannels that keeps ink free of bubbles as it flows from reservoir to microwell C calibration coefficient A numerical value that accounts for an ink s flow rate which affects the size of and thickness of elements drawn by the DPN process InkCAD s InkCal application calculates and applies calibration coefficients using several ink diffusion models There are separate calibration coefficients for dots and lines cantilever A microscopic springboard or V shaped lever holding a sharp tip which deposits ink on and or scans images of a substrate surface closed loop scan correction A method of correcting the pen position for scanner non linearity using hardware based feedback from a secondary monitoring system or sensor In the DPN process the feedback is usually based on cantilever deflection 4 18 2006 NSCRIPTOR user manual coarse alignment A type of alignment that moves the pen near on a micron scale to a pattern previously drawn by DPN Contrast with fine alignment coarse a
112. PTOR user manual About the boundary coordinates area B There are two things you can specify about Lattice s drawing area its offset from the center of the available scan range and its size Defined by X amp Y gt min and max Coordinate grid values for available scanrange AENEA Defined by X amp Y offsets These items are related to the boundaries of the drawing area all sizes are in microns Field Description X Offset If you want to move the origin of the drawing area away from the center of the available scan range enter a positive or negative horizontal offset here Y Offset This is the vertical offset between the available scan range s origin and the drawing area s Width The width of the drawing area in microns This is X Max minus X Min X Min This is the horizontal distance between the drawing area s origin and its lower left corner This does not include the X Offset Y Min The vertical distance between the drawing area s origin and its lower left corner This does not include the Y Offset Height The height of the drawing area in microns This is Y Max minus Y Min X Max This is the horizontal distance between the drawing area s origin and its upper right corner This does not include the X Offset Y Max The vertical distance between the drawing area s origin and its upper right corner This does not include the Y Offset 4 18 2006 Page 221 NSCRIPTOR user manua
113. Pens tab you can select a single pen by clicking to the left of the appropriate row Pen z 1 Offset Y Offset gt 2 40 000 0 000 Page 296 4 18 2006 NSCRIPTOR user manual To select consecutive pens begin by selecting the first one Then press the lt Shift gt key and click on the last one 1 Offset Y Offset 0 000 0 000 40 000 oo 80 000 o 000 120 000 0 000 To select non consecutive pens select the first one and hold down the lt Ctrl gt key as you click on others to select them ooo ooo 40 000 0 000 120 000 0 000 If a message appears when you select see Out of range message on page 287 Using the Pen Settings window In the Pen Settings window you can tell InkCAD what type of pen or pen array you will use You can also specify settings like designating the reader pen and you may manually retract or extend Nanolnk active pens There are several ways to open the Pen Settings window by clicking on the l button in the main InkCAD window by going to that window s Instrument menu and selecting Pen Settings or by going to the Instrument window s Align Pens tab and clicking on the Pen Settings button This is the window Graphical representation of the selected pen or pen array type A red dot r i SEN shows which pen will a reflect the laser beam Click to add or ms Ff 8 8 a8 A 5 O delete pen or List of a vailable pen Or pen Name Number
114. RIPTOR user manual Expand the tree to see that the line and its structure reference is now in layer 1 and is no longer in layer 2 New Document Layer H h Structure ai Structures 1 5truct Ret IEE DEE h Structure A Line HII Tater As 7 7 hy Copy of Structures Dot Opening Designer with other layers visible Suppose you have the following multi layer pattern Layer 1 contains the dot and layer 2 contains the other elements Now imagine that you want to add a dot centered on the upper right corner of the square It has to be in the same ink as the other dot so you add it to layer 1 After adding the dot this is what a view of that layer might look like If you wanted to fine tune the location of the new dot you could select layer 1 and click on the Structure Designer button CA You d end up with this 4 18 2006 Page 151 NSCRIPTOR user manual About the DPN options Page 152 Note The problem with this is that only layer 1 is visible You can t see the square so it s hard to tell if the new dot is in the correct place To avoid this InkCAD lets you open Structure Designer with other layers visible To do this first close Designer then open a view showing the elements you want to display Go to the Tools menu and select Structure Designer with Background Finally choose either New Structure to create a new structure or Existing Structure to modify an existing
115. RRR C F rege oct SEM mages SEM Set a noO s ta bs mz a a E z E g ha O S Settings Alig ng ser Cali rate Freq uency Sweep l buu withdraw Exchange Stop Capture a a ee e rode noting z L va ZAll v Focus Contact Mode Demodulator Gain a Z Position 1000 0 Zoom Se tup C AC Mode Demodulator Filter ji A tabs Imaging Approach Settings Z Surface 1 000 00 n ot Overscan Points 1 Surface Value V 1 000 Ez z ith R I g ht xix y pe a ways E Prescan Lines 1 Surface Deviation v 1 000 lt zl 3 t a b S n og d 8 500 00 um 15um 15um VI S I b l e a ei Vv Povanee i Pen Leveling Aoga a uxiliary 1 Iv LFM Settings a a J Offset 1 eS mepa mega aea 7 2x Topography Gain Iv i m T Step Sizefdeg 0 04 Filter 1000 Hz v z m x Video r 7 Bias Control Z Piezo z amp oO X n Daimy f ZExtension um 00 24 alal alja t a E fas a Ej z E z zl zl Reset Height 480 00 um an 9 a Zoom width 640 00 um Laser Light a Feedback tedak it lt NAicator 4 18 2006 Page 165 NSCRIPTOR user manual The feedback indicator Opening the Instrument window Page 166 Two different sets of tabs at the top and along its right side control the left and right sides of this window When the SPM Setup tab is open on the left toolbar a setup sub tab appears below it The window s lower right corner has a feedback indicator which tells you
116. Scan Range area of the tab It shows the dimensions of the current effective scan range Width and Height and a graphical representation of the feedback pen s scan range The red box in the graph is the effective scan range Since the feedback pen is initially the only pen selected the width of the effective range is the system default scan range and the red box 1s the size of this range Effective Scan Range s 0 00 um 0 00 um 5 Height 90 00 um 4 Now select pens 2 and 3 You do not need to select pen 1 since the software automatically includes the feedback pen in the effective range calculation Hold down the lt Shift gt key while clicking in the grey area to the left of the second and third lines in the table so it looks like this Pen 2 Offset Y Offset 0 000 0 000 a 4 30 000 0 000 This decreases the estimated width of the effective scan range considerably both in the Width item and the graphical representation Effective Scan Range 30 00 uum Y 0 00 um fidh 30 00 um Height 90 00 uni Effective scan range as part of the feedback pen s range 4 18 2006 Page 285 NSCRIPTOR user manual Page 286 If you now close the Instrument window this effective range appears in the main InkCAD window View toolbar e Pls Hk XXSI 89 973 88 623 49 538 Main Effective grid scan ei range yi 4 gt This view allows you to tell whether your pattern will fit into t
117. See the Chapter 1 section on SPM limitations for more information on scanner non linearities Keep in mind that this linearization function does not correct other SPM problems discussed there such as hysteresis and creep it only corrects time independent non linearity For the best results NanoInk recommends that you linearize the scanner 2 hour after starting the system We also suggest running the calibration a second time to make sure the results are right If you plan to draw large complex patterns with features smaller than 100 nm you should wait 2 hours after running this procedure before you start drawing The NSCRIPTOR instrument keeps track of the stage location adjusting for stage movements To make this work the instrument sometimes needs to home the motors move the stage to a known location and reset its current stage coordinates to match There is generally no need to home the motors unless the stage has been moved If you need to home the motors click on the appropriate Run button The window shows the x and y coordinates to which the stage will move It may take a few moments to move the stage When it finishes this message appears to the right of the x and y coordinates Status Home completed The NSCRIPTOR system supports AC mode scanning where the cantilever vibrates rapidly just above the substrate Each cantilever has its own resonance frequency and optimal scanning frequency which you can determine by run
118. Surface Deviation see Pen approach settings page 190 Fast Approach is the percentage of z error signal change the software looks for to transition from a fast approach motors only to an incremental one using motors and the piezo If this transition happens too early the approach can take a long time For the LFM channels e Offset is a shift setting which adjusts the window of available data detection relative to the actual detectable data values 4 15 2006 Page 189 NSCRIPTOR user manual Pen approach settings Group of fields Description e Filter settings help you clean up the image data from the data channel Bias Control The system s optional bias control feature allows it to apply a voltage while drawing The Dac 1 field lets you test the sample bias feature by setting a bias voltage with no DPN drawing in progress If the system is communicating with the instrument controller this field shows the bias being currently applied To set the bias to a different value simply enter the new value in Dac 1 Note the units on this field are mV rather than volts Z Piezo Z Extension is InkCAD s estimate of the distance downward the pen must go to get into feedback To better understand the Surface Value and Surface Deviation parameters it helps to know a little about how the system does an initial pen approach in contact scanning mode The instrument senses the surface by measuring the deflection force There is a
119. Surface Deviation 0 i 000 Nonlinear Image iw Fast Approach g Correction e a 1 i LFM Settings Offset E 2x Topography Gain m Filter 000Hz Bias Control Piezo Dac 1 m i Extension um 1 000 These are brief descriptions of the groups of items in this tab Group of fields Description SPM Mode Select the mode you want the instrument to use for surface scans In contact mode the pen or pen array touches the substrate surface In AC mode the instrument rapidly vibrates the pen just above the surface without directly touching it For more information on these scanning modes see Chapter 1 AC Mode Settings This group contains items related to AC mode imaging a gain value to boost the amplitude voltage signal and a noise filter to smooth out the demodulation signal These items are only enabled if you select AC Mode in the SPM Mode area Page 188 4 18 2006 NSCRIPTOR user manual Group of fields Imaging Approach Settings LFM Settings Description You can use Overscan Points to minimize distortion of SPM images in the fast scan direction Overscan Points is the number of data collection points to bypass before data collection starts for the forward and reverse directions For example this is the path the pen follows with Overscan Points set to 1 Overscan Pen Data collection points Distance between data collection points scan length collection points Overscanning ensure
120. V You need to use NanoInk s modified sample puck for this feature see Sample puck on page 53 You can control bias with electrically conductive pens such as metal coated pens or pens made of highly doped silicon NanoInk s standard single pens multi pen arrays and active pen arrays do not support bias control The NSCRIPTOR system normally applies bias only when it draws on the substrate However in the Instrument window s Settings tab there is a field that allows you to set the bias to a specified value when lithography is not in progress This is a good way to test the bias control feature before drawing 4 18 2006 NSCRIPTOR user manual How bias control works Stopping lithography External bias control In normal use the bias voltage comes to the switch box from the microscope The microscope sets the bias voltage according to commands from InkCAD The software has a separate lithography bias applied while drawing a dot or a line and rest bias applied when not doing DPN drawing e g when moving the pen to the location of the next element Suppose this is a pattern you want to draw and these are the values of these variables in the layer properties El Control Bias True _ Lithography Bias 45 Rest Bias 1 Pattern Layer bias settings If bias control is enabled this graph shows the system s bias settings as it draws the pattern Drawing Drawing Drawing 1st line dot 2nd line Litho bias 5 V Pd Res
121. a chip with a row of pens Multi pen arrays increase DPN throughput by allowing you to draw several copies of a pattern at once Various configurations are available with different pitches and numbers of pens For more information on the optional multi pen array feature please see Chapter 8 The Active Pen is another pen variety An active pen is a pen with a thermal actuator built into the cantilever When activated by an electrical signal an active pen bends down toward the substrate Retracted Extended When the signal is not applied the pen 1s retracted a retracted active pen normally curls upward slightly When the system applies the electrical signal the pen extends downward The thermal actuator heats the cantilever which bends it down Active pens come in eight pen arrays only You can ink all of them except for two reader pens Reading pens perform SPM scans of patterns drawn by the 4 18 2006 Page 19 NSCRIPTOR user manual Lateral force microscopy LFM Inking overview Page 20 other pens the writer pens and one of the reading pens is the only pen in the array that the system puts into feedback Active pens are an optional NSCRIPTOR feature and Chapter 9 describes them in detail A passive pen does not have the thermoelectric element and its cantilever does not normally bend down toward the substrate on command Please see Chapter 9 for more information on active pens Vertical cantilever deflection
122. a set of objects back to InkCAD allowing you to modify them before drawing These are the other InkCAD modules e Dots amp Lines see Using Dots amp Lines in this program you can create an array of identical cells each containing a pattern of dots and lines e Lattice Using Lattice on page 219 this module allows you to design and draw a grid of dots e NanoWord Using NanoWord on page 223 a module for adding text to a DPN pattern e InkMap Using InkMap on page 226 InkMap lets you can create DPN versions of bitmapped graphics using dots in place of pixels e Image Analysis Analyzing scan images on page 235 describes how to use NanoInk s Image Analysis application which helps you examine the data from SPM scans In the Dots amp Lines module you can create an array of nano scale design cells containing an arbitrary number of dots and line segments O 2 When you re done designing your pattern Dots amp Lines can export dots and lines to InkCAD To export the pattern back to InkCAD you need to exit Dots amp Lines by going to the module s File menu and clicking on Export and Close When you return to the main InkCAD window you may then modify the pattern optionally combine it with other objects and draw it to the substrate 4 18 2006 Page 211 NSCRIPTOR user manual This is the main Dots amp Lines window Cell preview pane Array preview pane A B 4 Dots Lines Array Generato
123. ab Click here to tilt Click here to tilt counter clockwise one step clockwise one step raising the left side raising the right side PenLeveling Shows the tilt Pao O eee direction if you lt gt Ay aD gt SEs click on the or I I l button l step Sizefdeg 0 04 Tilt step size in degrees This is how it looks when seen from the front of the pen array movement is exaggerated here Axis of rotation You may change the step size as needed to increase or decrease the applied tilt Array leveling procedure Before you start this procedure you should already have loaded a multi pen array into the instrument as described in Chapter 2 and the array should be located over the substrate you want to level to either the sample or an inkwell Follow this procedure to level the pen array 1 Open InkCAD s Instrument window 1f it is not already open Go to the Video Motors tab on the right side of the window 2 Ifyou are working with an active pen array extend the pens at either end of the series you plan to use Extend these pens the same amount See Leveling an active array page 273 and Chapter 9 for more information Page 274 4 18 2006 NSCRIPTOR user manual Leveling works best if you start by moving the array vertically to roughly halfway between the z axis upper and lower limits To do this first raise the array to the upper limit In the Instrument window s Video Motors tab choos
124. ab of Instrument window 174 SPM Setup tab of Instrument window 186 spreadsheet applications and InkCal data 113 spring mechanism in pen clip 41 Stacked line repeat model 92 stage See DPN stage stage cable for bias control 54 55 Stage Control tab 168 245 stage map 169 245 Stanford pyramidal probe 20 Start Lithography button 63 82 Start Sweep button in Instrument window 339 startup sequence for NSCRIPTOR system 28 Page 356 Statistics section of ink properties 112 Statistics on dotmaps 228 status box for DPN drawing operations 83 Status column in Pen Settings window 303 Step Size boundary parameter 140 144 Step Type boundary parameter 143 144 step wise stage movement 170 STOP button in Instrument window 192 195 STOP button in main InkCAD window 63 Stop Lithography button in InkCAD 82 stopping DPN operations 51 63 83 Stow button in Tip Exchange dialog 34 276 stray data points in InkCal 118 Structure Designer green circles in 76 how to open 63 opening with other layers visible 151 selecting objects in 77 sending scan images to 177 toolbar in 76 Structure Designer with Background option 152 Structure Name structure reference property 147 structure references See also structures as array reference components 66 in drag and drop operations 149 introduction to 65 properties of 148 transistor example 66 Structure of documents See tree view structures See also elements
125. aches the external device the device then emits its bias signal through the switch box to the pen and puck Here is how the bias level might look with an external device external device The maximum external bias voltage is 200V When you use an external device to provide bias the polarity switch on the front of the switch box has no effect This section describes the special equipment for bias control This is the bias control switch box 4 18 2006 NSCRIPTOR user manual The switch box is normally inside the environmental chamber The box has switches and BNC connectors on two sides This is the front Connector or INANI N aul Boiarty the bias input a cable from ae oa I the microscope Bias out l l l Connector for Switch for bias polarity To send positive voltage to the output the pen select Pos up position To send positive bias This is a voltage to the puck in effect sending negative Y cable to voltage to the pen select Neg down position the pen and Note This switch has no effect when generating puck bias with an external device The back side of the box has connectors and a switch for controlling bias with an external device see External bias control on page 51 for more information on this ag eee a ar ee Ext Bias NANOINK T I On l l I WE Connector I for the l external I device s bias I Off i signal Switch for external bias control Trigger sign
126. active pen flex cable on page 40 for information on this cable 10 Holding the wide end of the flex cable s with your free hand place the narrow end onto this magnetic mount on the scanner assembly Then push the narrow end down and to the right as far as it will go It should look like this Page 38 4 18 2006 NSCRIPTOR user manual 11 Now you need to plug the connector on the underside of the flex cable to the one on the scanner assembly Holding the wide end of the cable with your thumb and middle finger put the two connectors together Then press with your index finger to seat the connector 12 Move the scanner assembly back into position Hold the scanner head by the handles and rotate it back down to the level position 13 Gently slide the scanner back towards the stage until you feel some resistance 14 Turn the pen exchange knobs up 1 4 turn to lock the scanner head into place 15 Replacing the sample puck Set the puck down so the bottom peg fits into the groove Then slide the puck into position Groove Important note If you are inserting an inkwell puck make sure the puck s sample clips are on the left side facing away from the pen s 16 Rotate the puck so the sample is square with the scanner head 4 18 2006 Page 39 NSCRIPTOR user manual 17 If you want to use the optional bias control feature with this pen connect the pen bias cable to the back of the scanner assembly if it is no
127. al To supply bias from an external connected to DAC in device select On up position inside the switch box To use InkCAD s rest and lithography bias values instead select Off down Note If you are not controlling the bias with an external device that is if the Ext Bias switch is set to Off be aware that Trigger Out is directly connected to and parallel with Bias In and Bias Out Nanolnk recommends that you not use the Trigger Out signal to monitor the bias being sent to the instrument Sample puck A different puck configuration is needed to support the delivery of bias These are the two main differences between a bias puck and a normal puck e The bias puck has a top segment electrically connected to the cable from the switch box and e Ithas a special insulating layer below the top segment which isolates the rest of the puck from the top segment 4 18 2006 Page 53 NSCRIPTOR user manual This is one of NanoInk s modified sample bias pucks Connect switch box cable here electrically connected to puck s top layer Insulating layer The insulating layer accepts the puck cable from the switch box s Bias Out connector When using bias control the top layer can be either the default segment shown or an inkwell substrate segment Note The NSCRIPTOR system does not currently support sample bias with the NETS sample puck Cables NanoInk supplies two cables for the bias control feature
128. al compound name Calibration This field stores information about the last calibration performed Parameters for this ink environmental conditions such as temperature and humidity and the lithography parameters used For more information on this please see Calibration parameters Description This is a text description of the ink You might use it to record the ink composition and details about the substrate and pen used An abbreviated version of the description appears in parentheses next to the name when you collapse the Ink property by clicking on the El button Ink Model This is the model currently in use See About the ink models on page 95 for more on ink models This item expands to show the most recent calibration coefficients either entered manually or calculated by InkCal The actual number of diffusion coefficients depends on the ink model in use but each model has at least one dot coefficient and one line coefficient Below the line diffusion coefficients is an item called Repeat Model This describes how the ink acts when you repeat the drawing of a line by setting its Repeat property to a non zero value It determines how InkCAD calculates the width of lines paths and boundary hatch lines as a function of the pen speed and vice versa The Repeat Model choices are e Stacked with this model repeatedly drawing a line does not make it wider but might make it taller as ink bonds to the deposits from previous p
129. ampbell P M AFM fabrication of sub 10 nanometer metal oxide devices with in situ control of electrical properties Science 1995 270 1639 1641 e Snow E S Campbell P M Perkins K Nanofabrication with proximal probes Proceedings of the IEEE 1997 85 601 611 e Held R Heinzel T Studerus P Ensslin K Holland M Semiconductor quantum point contact fabricated by lithography with an atomic force microscope Applied Physics Letters vol 71 issue 18 Nov 3 1997 p 2 689 91 e Piner R D Xu F Zhu J Hong S Mirkin C A Dip Pen Nanolithography Science 1999 283 661 663 e Lee K B Park S J Mirkin C A Protein Nanoarrays Generated by Dip Pen Nanolithography Science 2002 in press e Demers L M Mirkin C A Combinatorial Templates Generated by Dip Pen Nanolithography for the Formation of Two Dimensional Particle Arrays Angew Chem 2001 40 3069 3071 Page 22 4 18 2006 NSCRIPTOR user manual Mirkin C A Bioinspired Two and Three Dimensional Nanostructures Journal of Nanoparticle Research 2000 2 121 122 Ivanisevic A Mirkin C A Dip pen nanolithography on semiconductor surfaces J Am Chem Soc 2001 123 77887 7889 Liu X Fu L Hong S Dravid V P Mirkin C A Arrays of Magnetic Nanoparticles via Dip Pen Nanolithography Advanced Materials 2002 3 C3229 Mirkin C A Hong S Demers L What d
130. ample Suppose that you created the second view described in the example above This makes a second copy of that layer If you then change parameters while this view is open the copy would have some different property values from the original For example Original objects Copy Layer 2 Layer 2 Integral gain 2 Integral gain 3 Setpoint 0 5 Setpoint 1 0 Dot 1 Dot 1 Page 160 4 18 2006 NSCRIPTOR user manual Original objects Copy Radius 0 5 Radius 0 8 Visible INHERITED Visible TRUE Path 2 Path 2 LineWidth 0 1 LineWidth 0 5 Repeat 0 Repeat 1 When you close the new view InkCAD propagates property values as described above and deletes the layer copy These are the values for the original objects Note that the layer properties don t propagate but the dot and path properties do Original objects Layer 2 Integral gain 2 Setpoint 0 5 Dot 1 Radius 0 8 Visible TRUE Path 2 Line Width 0 5 Repeat 1 The one exception to the propagation rule is if you open a new view of the entire document tree In this case InkCAD would propagate all changes you make in the view Keyboard shortcuts The main InkCAD window has the following keyboard shortcuts to give you immediate access to frequently used functions Shortcut Function Working with DPN documents Ctrl N Create a new DPN file Ctrl O Open an existing DPN file F7 Open the DPN options F8 Open the Instrument window Viewi
131. an change which ink is assigned to a layer by using the Ink property in the layer properties To do this click once in the left part of the ink property El Ink Ink 3 Integral Gain T Then click on the z button on the right InkCAD displays a list of all inks in the current document Ink Ink 3 z Integral Ginka Coren irom ink database There are two special items in this drop down list e new ink lets you create a new ink definition This is the first step in designing a multiple ink experiment Ink definitions created this way use the default ink model settings specified in the InkCAD options Note If you want to save the new ink definition in the ink database you have to do it at the end of the InkCal process See Saving the ink definition to the ink database page 114 for instructions e from ink database is for importing an ink definition from the ink database a collection of saved ink definitions InkCAD has a single ink database that contains data on all inks used on this computer This database is not connected to any InkCAD document 4 18 2006 NSCRIPTOR user manual When you choose from ink database this dialog box appears 9o00 CUCAIR IG 4 Ink 3 Saved 4 21 2004 gi gt n arved expand an 2 Ink 4 Saved 472172004 ink definition Click here to delete the definition Th Delete Cancel See Ink properties for more information on these properties If the window is empty it means
132. an with contact mode as shown here Inter atomic forces damp reduce the amplitude when the pen approaches the surface This drawing shows how the oscillation amplitude changes the AC mode piezo is applying the same drive amplitude 4 18 2006 NSCRIPTOR user manual To get accurate scan readings it is important to choose a good oscillation frequency Each pen has a unique resonance frequency at which it vibrates most strongly This is a typical graph of amplitudes over a range of oscillation frequencies Frequency kHz 2011 1072 au 10a Z BEF 50 afd S00 For maximum sensitivity the pen should vibrate at near the peak resonance frequency but not exactly at it as explained later This specific frequency is different from pen to pen and it can also change slightly for the same pen each time you use it You tune the frequency and other resonance settings with the pen in free air far enough above the sample to keep inter atomic forces from interfering with measurements Physical forces affecting AC mode In AFM imaging inter atomic forces between the tip and sample typically make the cantilever deflect In AC mode forces affect the oscillation amplitude The force most commonly linked to atomic force microscopy is the van der Waals force This graph shows how the van der Waals force varies with the distance between the tip and the sample Contact regime Repulsive Tf force Distance from tip
133. and rest of NSCRIPTOR system 26 and the InkCAD software 56 cables for 54 control by external device 51 53 56 default settings for 157 features not supported with 281 how it works 50 how to use 55 introduction to 23 layer specific settings for 128 maximum external voltage for 52 pen puck supplied bias 50 puck for 53 continued Page 342 bias control feature cont setting bias when not drawing 189 testing without DPN drawing 189 trigger signal for external control 52 bias control switch box and external bias control 52 53 connectors and switches on 53 front amp back sides of 53 introduction to 50 Bias Out connector on bias switch box 53 54 bibliography of papers on DPN process 23 bitmapped images 226 Blind Approach inkwell dipping method 255 blue color in E chamber control 44 blue color in Instrument window background 169 BMP file format 208 226 BNC connectors 54 bookmarking substrate locations 206 borders on boundaries 141 142 Both Axes Alignment option 183 boundaries See also elements angle of hatch lines in 142 as a NanoWord output format 224 borders of 141 142 color of in layer properties 129 132 creating in Structure Designer 76 how InkCAD draws them 139 introduction to 67 overfilling 140 previewing hatch lines for 146 properties of 141 unevenness at borders of 141 box GDS II data type 122 brightness controls 198 244 bubble traps on inkwells 246 bub
134. arch for information R Introduction to InkCAD S D Getting started in InkCAL In INnkKCAD you can Designing a simple patte Drawing Si the substrate Design patterns containing dots lines and other drawing elements The drawing status wind and or import files from third party computer aided design CAD The drawing status icon programs e Chapter 4 Inks and ink calit Chapter 5 Manipulate the objects in your patterns Getting started with InkCAD gt Introduction to InkCAD Chapter 6 Draw patterns to a substrate oS Chapter Chapter 8 Perform coarse and fine pattern alignment oS Chapter 9 Active pens 2 Appendix 4 Glossary Set up and execute multi ink drawing with layered DPN techniques Image your nano scale patterns The online help has all of the same information as the manual covering the entire NSCRIPTOR system It also has convenient features like live hypertext links and full text search Context sensitive help Several of the windows in the InkCAD software have Help pull down menus NSCRIPTOR Help a In this and other Help menus choosing NSCRIPTOR Help opens the help file at the beginning The other option opens the help at a topic related to the window you re using like this NSCRIPTOR user s guide Te gf Hide Back Print Options Contents Index Search Favorites oC Chapter 1 Introduction Chapter
135. ary properties only The boundary uses the layer s Step Type setting which can be any of the following choices e Optimized InkCAD calculates its own hatch line width based on the layer specific or system wide calibration coefficients and line lithography speeds All of the hatch lines have the same width This can be a convenient option because you do not have to set the hatch line width or step size if you use it e Regular InkCAD adjusts the step size when the element s width is not an even multiple of the user specified StepSize which is usually the case This simplified example shows how InkCAD adjusts the line 4 18 2006 NSCRIPTOR user manual Property Description width The hatch line widths end up less than the step size Object to fill J O CY O N Original StepSize Adjusted line widths line width O O A O A e Fixed If the element s width is an even multiple of the user specified StepSize the width of all hatch lines equals StepSize If it is not an even multiple the step size equals the user specified value for all hatch lines but the last one InkCAD adjusts the steps size the last hatch line so it just fills up the boundary This usually means that InkCAD draws the last hatch line with a different lithography speed than the others LayerNumber This indicates which layer the boundary belongs to This is not a layer property StructureDefault If this is True the element i
136. ase you could lose images and alignment data About the scanning parameters C The software scans a square area of the substrate at a specified location in the available scan range This table describes the scan parameters Field Description Scan Size This is the edge length of the square scan area in microns X offset The distance in microns along the x axis from the origin of the available scan range to the center of the intended scan area Y offset The y axis distance in microns from the center of the available scan range to the center of the intended scan area Scan rate This is the number of line scan cycles per second A cycle includes both the forward and reverse movements Note NanoInk recommends that you not use a scan rate greater than 5 6 Hz Page 186 4 18 2006 NSCRIPTOR user manual Field Rotation Resolution Setpoint LFM Gain Error Gain Drive Ampl Proportional Gain Integral Gain Derivative Gain Phase Default Settings SPM setup Description This is the number of degrees to rotate the scan area around its center This is the number of horizontal passes in the scanning operation as well as the number of measurements to take for each horizontal pass Each measurement becomes one pixel in the scan images This sets the amount of cantilever bending force for the DPN stage to maintain as it scans The instrument s feedback control keeps the cantilever bending
137. ase see Printable visible settings page 136 for more information This is not a layer property Visible This property determines whether InkCAD displays the boundary in its window Please see Printable visible settings for more information This is not a layer property DPN Preview Step Boundary previews sometimes do not tell you much about the angle of the hatch lines there are so many hatch lines that the boundary appears to be one solid color on screen This field affects how boundary previews look by cycling the hatch lines successively lighter shades of color DPN Preview Step is the number of shades for each color cycle If you want InkCAD to rotate through 10 color shades enter 10 here Note This field only affects the boundary preview It does not affect how boundaries are drawn on the substrate In boundary properties L in this field indicates that the value is the layer default Hatch Angle This is the angle of the hatch lines measured in degrees counterclockwise from horizontal Here are some examples of hatch lines of various angles F X 0 45 90 135 Note You can use InkCAD s DPN Preview feature described after this table to see the effect of changing this angle Note The value of Hatch Angle Type determines whether this field has any effect To set this value do one of the following e If you are looking at layer properties enter a default angle value between 0 and 360 e If you ar
138. asses Mathematically this can be expressed as W W where W and W are the line widths after the first pass and the nth repeat respectively e Full Spread each repeated drawing makes the line wider by the same amount Mathematically this is W n 1 Wo Page 92 4 18 2006 NSCRIPTOR user manual Property Description e Partial Linear Spread with this model each successive pass makes the line wider in a linear fashion but not by as much as with Full Spread This is an appropriate ink type for some alkanethiol inks The formula for this repeat model is W 1 cn Wo where c is the ratio of the width change to Wo the initial line width You can enter your own c value in the Coefficient Ratio field in the ink properties Time Stamp The date and time when the calibration coefficients were last updated either by InkCal or manually by editing the diffusion coefficient values in the properties You cannot directly edit the dot or line calibration equations displayed in the Ink Model properties but each of its subsections Dots and Lines expands as shown above to reveal editable fields for all calibration coefficients The set of calibration parameters changes from one ink model to another 4 15 2006 Page 93 NSCRIPTOR user manual Calibration parameters Page 94 If you are looking at ink properties and you want to see information on the environmental conditions and lithography from the last
139. ausing the mouse pointer over the list that appears to the right of the word Points El Pi Displays tyle LINE_WIDTH i Line idth 0 1 Points 3 321 27 79741 0231 024 1 0 563 2 37 9t11 275 2 561 Printable INHERITED 4 15 2006 Page 137 NSCRIPTOR user manual To edit the points first click on Points Then click on the button that appears Paints 3 321 2 77 x This opens the point editor Click here to move the selected point up or down in the order Point Editor Thi 1 a a3 321 e 779 Properties e m Edit the f an i ORS S321 Yee TI T oe l i coordinates ists a sd 3 321 element 0 583 Y 2 319 aj i 2 779 g of the 4 S 1 275 Y 2 361 selected endpoints Ei l point here Click here to Add mene add nother ae i point to the element see Cancel below Click here to delete the selected point from the element If you click on the Add button to insert a new line endpoint InkCAD adds it to the end of the list You can select it and then use the right side of the window to change its x and y coordinates You may also click on the up and down arrow buttons to change its position in the point list Paths and boundaries have two or more endpoints This message appears if you try to close the point editor after using the Remove button to leave the path or boundary with less than two validation Error G amp Invalid Number of Foints For the Element Path propertie
140. available scan range If you are closely zoomed in on your pattern zoom out until the planned mark location is visible in the drawing area Then click on the view toolbar s button Move the mouse pointer to the chosen location and click once creating a cross haired mark The mark is a structure reference that contains two lines If you expand it in the tree view you can see that the fine alignment mark has a structure a structure reference and the two lines i Layer 1 D amp L n Alignmernth ark ni Alignment ark1_1 1 Struct Ret ff Linet A Line 2 4 18 2006 Page 133 NSCRIPTOR user manual You will use the fine alignment mark during the InkFinder alignment procedure described in Chapter 6 Editing a fine alignment mark If you need to modify an existing fine alignment mark select its structure reference in the tree view These marks have the standard structure reference properties described in Structure reference properties page 147 There are a couple of things to keep in mind with the properties of fine alignment marks e The marks use the Printable property in a unique way InkCAD generally sets this property to True for layer 1 s fine alignment mark structure reference and False for fine alignment mark structure references in all other layers e The two line elements in the fine alignment mark also have their own separate properties About Structure Designer objects The main InkCAD win
141. aving technical difficulties with any aspect of our products please contact us or your distributor for customers outside the U S Here is how you can contact NanoInk e Send e mail at support nanoink net e Call at 847 679 NANO 6266 Monday through Friday between 8 00 AM and 5 00 PM Central time 4 18 2006 Page 3 NSCRIPTOR user manual About this document Page 4 Fax anytime 847 679 8767 When e mailing telephoning or faxing NanoInk or your distributor please provide or have available the following information Your name and contact information 3 or 4 digit software version number Date of purchase Precise technical information about the problem including detailed error messages and error code What you were doing and what happened when the problem occurred How you have tried to solve the problem Our support staff will review the information and contact you promptly This guide contains these chapters Introduction Chapter 1 The document begins with some basic information about your Dip Pen Nanolithography system and introduces you to scanning probe microscopy and the DPN method The DPN environment Chapter 2 A chapter that introduces you to the NSCRIPTOR instrument and supporting equipment Getting started with InkCAD Chapter 3 A series of illustrated tutorials leads you through your first DPN experiments with the InkCAD software Inks and ink calibration Chapter 4 An intro
142. ay Page 272 For a preview of the multi pen pattern go to InkCAD s View menu and select MultiPen Preview This command is only available when you have a view open It is not available if you are using Structure Designer A preview window appears Click on one of these buttons to zoom in or out 76 026 104 661 Edge of the available scan range 52 914 Preview of multi pen pattern The reader pen appears in a different color Ae Boe Mouse Position 896 502 Y 31 141 Center 14 32 0 12 Drawing Time 203 34 This is the area normally used for pattern drawing The area outside this box is normally used for parking the pen and doing InkCal diffusion calibration This preview puts the reader pen in the center of the scan range Notice how the preview shows that the multi pen pattern will go beyond the limit of the available scan range This means that the reader pen will not be able to reach everything with just the scanner If you want to scan an area beyond the available scan range you will need to use the x y stage motors to get there To avoid damaging the pens in a multi pen array it is very important to ensure that the array is precisely aligned with any surface you approach it with whether that is a sample substrate or an inkwell This section shows you how to level a passive or active array to a substrate 4 18 2006 How array leveling works Leveling an active array NSCRIPTOR user manual L
143. ay This section has settings related to active and passive multi pen arrays The primary pen is the main pen that will draw the current layer You can also select additional pens which will draw the layer in parallel not part of the pattern drawn by the primary pen Positioning Speed This is the relative speed in microns per second between the pen and the substrate after finishing the drawing of an element as the pen moves into position to start the next element The default setting for this variable is Positioning Speed in the InkCAD options See page 154 Retract Setpoint This is the value used for lifting the tip while in feedback constant force mode The units are volts The default setting for this variable is Retract Setpoint in the InkCAD options See page 154 Setpoint The force to apply to the pen s by feedback control in volts The default setting for this variable is Setpoint in the InkCAD options See page 154 Z Piezo Extend In constant height mode 1 e not in feedback this is the Page 126 4 18 2006 NSCRIPTOR user manual Property Z Piezo Retract Z axis control properties Property Approach Pen s Before Lithography Lift Pen s After Lithography Lift Pen s Between Elements Pen Lift Method Description number of microns to lower the pen when you want to extend it The default setting for this variable is Z Piezo Extend in the InkCAD options See page 154 In c
144. ays a partial copy of the properties for the chosen layer This list includes most InkCAD layer properties except for the boundary settings since InkCal only draws dots and lines and element colors There are a couple of important things to keep in mind about these lithography properties e There is one set of lithography parameters for all three InkCal pattern types so if you change one of these values it affects InkCal s operation for all pattern types Dots Lines and Dots and Lines e Changes you make here will become the new InkCAD settings for that layer See Chapter 5 for more information on the layer properties General pattern parameters C This table describes the fields in the Pattern Generation Settings part of the InkCal window Field Description X Offset Y This is the x and y position relative to the scanner where InkCal Offset should start drawing the test pattern NanoInk recommends that you draw the test pattern a distance away from the main pattern drawing area Length This appears only in Lines and Dots and Lines patterns In these pattern types this is the length in microns of all lines that InkCal draws in the test pattern Repeat This appears only in Lines and Dots and Lines patterns This is the number of extra times to draw each new line you add to the test pattern With a Repeat value of 0 InkCal draws each added line once NanolInk recommends that you use the same value here as that
145. bed in Structure reference properties page 147 only take effect when InkCAD draws their elements on a substrate They do not affect how the pattern appears in the main InkCAD window The properties that behave this way are e Flip Vertical e Magnification e Printable e Rotation Using drag and drop in the tree VIEW InkCAD s drag and drop feature lets you use your mouse to copy and move objects in the tree This section demonstrates how it works Start by creating a new InkCAD document with two layers Layer 1 should contain a dot and layer 2 a line like this Page 148 4 18 2006 NSCRIPTOR user manual This is how it would look in the fully expanded tree view A at Te Se Layer 1 y Structure Ta Structure 1 Struct A ef A Dot 1 J Layer 2 y Structures Te Structure H1 Struct A ef z Line 1 The first thing you will do is make a copy of the layer dot in layer 2 The method is to drag the dot s structure reference not the element itself to the other layer Start by selecting the dot s structure reference in the tree view New Document Layer H gt Dot 1 Layer 2 N Structures A Structured 7 Struct Ret f Line 1 Now right click hold down the right mouse button and drag the mouse pointer to the entry for Layer 2 New Document Layer H Structured Layer HA y strut SP Smeti 1 Struct Ref fo Line 1 No
146. blers 26 bubbling nebulizer mode 48 buttons in main InkCAD window See toolbars C cable connections for system 45 cables for bias control feature 54 CAD files importing into nkCAD 122 CAL files importing into InkCAD 122 Calculate boundary property setting 143 Calibrate tab in SPM setup 190 calibration coefficients and boundary filling 140 and ink models See ink models and InkMap dot size 230 description of diffusion 88 continued 4 18 2006 bias control feature cont independence of dot amp line coefficients 89 96 negative coefficients 115 old coefficients as basis for new ones 115 Calibration Parameters in ink properties 92 Calibration Pattern field in InkCal 98 CALIBRATION SENSORS connectors 45 camera video See video image cantilever tip See pens cantilevers See also pens and AC mode See AC mode as DPN stage components 17 characteristics of 297 deflection of 17 29 diving board type 32 heated cantilevers See active pens in active pen arrays See active pens lengths of 299 modulation frequency of 22 properties of 299 resonating frequency of 191 stiffness of and AC mode scanning 330 types of 20 capillary transport of ink 14 Capture button in Instrument window 185 196 cells in Dots amp Lines See also arrays as passed back to InkCAD 68 definition of term 212 lattices of cells 216 preview of 213 chamber See E chamber changing the sample substrate 32 chann
147. calibration of the current ink click on Calibration Parameters Then click on the l button that appears opening this window Parameters Used During Ink Calibration gt Be j El a Relative Humidity 30 0 i Temperature 20 0 C El Active Array Motes Insert your comments here O Cancel InkCal automatically stores the lithography parameter values that were used to fabricate the calibration test pattern Although the list includes most lithography parameters only a few may influence the calibration coefficient values depending on your experimental setup For example the bias control values will be very important if you attempt oxidation lithography or e DPN All fields are filled in by InkCal except the ambient temperature the relative humidity and the bottom Notes section You may enter the temperature and humidity displayed by the E chamber control application described in Chapter 2 The Notes field is for storing an informational short description of the current calibration InkCal clears the notes every time you perform a new calibration You may use the Calibration Parameters information to make sure that the ink assigned to the current layer contains the proper calibration data For example if you plan to draw with electrical bias you must verify that the current bias settings in the layer lithography properties are identical to what is stored in the calibration parameters 4 18 2006 NSCRIPTOR user
148. ce with elements rotated by 45 degrees A structure does not need to have a structure reference but a structure reference is always inside a structure InkCAD automatically creates a structure reference when you add the first element to a structure To show you how useful structure references can be suppose you are using InkCAD to design and draw an electrical circuit Your design will require a number of transistors all of them identical and consisting of several elements such as lines or paths each Rather than defining all of those elements for each transistor in the circuit you could define them once in a transistor structure then have numerous structure references that point to that structure Another advantage of this is that if you need to change the design of the transistor you would only change it in one place the transistor structure rather than in a large number of instances In InkCAD an array reference is a repeated group of elements and structure references The software arranges the elements into a specified number of rows and columns Here is a 2 by 2 array of a structure reference with a simpler set of elements 4 18 2006 NSCRIPTOR user manual It looks like this 1n the tree view New Document Layer 1 H Structure ajA Structures ArravHolderl 42 5truct Aet kd Structures 1 Array Ref Cott A Line 2 Elements Elements are the most simple basic objects you can work with
149. control to the experimental process by providing controls for humidity and temperature in an environmental enclosure called the E chamber This enclosure is an integral part of the NSCRIPTOR system Without it the user is often left to guess what the nano pattern results will be Furthermore NSCRIPTOR s InkCAD software offers an empirical means of calibrating ink diffusion with its patent pending InkCal process In later experiments Northwestern University s Mirkin Group deposited multiple inks in direct alignment with one another with strikingly high resolution Molecular line widths can be only 12 nm with line separations of only 5 nm High resolution two ink experiments often use hydrophobic water repelling and hydrophilic water seeking ink molecules to make it easy to distinguish between them when imaging the nanopatterns see Lateral force microscopy LFM on page 20 You can perform multi ink experiments by swapping pens For a two ink experiment where the inks are in spatial registry with one another pen 1 draws a partial pattern next to an alignment structure After switching pens and Page 14 4 18 2006 NSCRIPTOR user manual locating the alignment structure pen 2 then fills in features with the second ink see figure below The microscale and nanoscale alignment tasks required for multi ink DPN experiments were not a trivial matter when using a commercial AFM The NSCRIPTOR system makes these alignment tasks eas
150. created each image Notes Your comments and notes about the image appear in this column See Adding notes for more information Page 202 4 18 2006 NSCRIPTOR user manual About the Alignments section In the bottom section of the InkFinder tab you can perform coarse and fine alignments Each entry in the bottom table is a record of a coarse alignment operation Here is the toolbar for this section O KXK X x New Alignment Notes Remove Reset Align Sample These are the buttons in the bottom toolbar e New Alignment Click on this button to open the InkCAD alignment wizard and begin the first phase of the alignment process described in Performing an alignment on page 204 e Notes The table has the notes feature described in Adding notes page 204 e Remove Click on this button to delete the selected alignment from the table e Reset This button resets the coarse and fine alignment adjustment numbers back to zero for the selected alignment e Align Sample Click on this button to begin the second phase of the alignment process returning the pen to its previous position These are the columns in the bottom table Alignment fine s fine r fine 2 coarse Column Description Alignment This is an alignment name created by InkCAD Fine X and Fine The fine coordinates of the alignment mark relative to the center Y of the available scan range Fine A The rotation angle measured i
151. d 51 Extemal DIAS COMULOM sie Sesconnsiceasancaseechchacthoa a cuentas sonedenassocaneteuckannese 51 Bias control hardware and CQuipMent ie ninenin iee e 52 Sene Up DIAS CONTO locen a iawn a ete aaa 55 Bias control and the InkCAD software cccccccssssssssnsssssssesseeeeeceeeeeeeseseeaaaaees 56 SV SCCM Das SE oa A E E ag adeassueanatesnmahansceeaet 57 For more bias control information sesssseeeeessssssseeerrssssssscerrssssssscerresssssseerrresssssees 57 Chapter 3 Getting started with INKCAD ic eeececsssseeecceeeeceeeeeeeeeeaaaasaeseeeseeeseeeeeeees 59 SOLEW IOC ONIPORTAS 59 THe base DEN Proce ssanie E a maceundaawseaeace 60 Introduction to MKCAD serca E E E E 6l 4 18 2006 Page 7 NSCRIPTOR user manual Page amp About MCAD Wind wW sous acsnsuesns dsvassagaseheontesuoppnon decacencuepne asses acetoheoeten aeeacansnepee 61 Toeman o0lDar 32ce vane slas acucaat sean E sanenaceacatintoaicnidebesusenaanezeteteetinet se 63 Gettin Startedsin MKCA D iscsi seocdaisatahd sana thqyaciesastecasdaowdsieaehsinwe Naaeaaueaawnade dageaensatanccedatens 64 PKC ADO Dy CCS eeen E to woes es eaters neuakens cad arenes eas ees eaatiee 64 Desin example ies 305 esa Oe as Spies ea as wea Sea near a eth doa eet aes 68 About Te MCS VIEW 1001 Di sexisiepeet seat trectet ea easier assent sealtamates wal ese east eel ctaces 73 PO OUE AME VIEW LOO IDI sssr at ve way Sek Gonnenn ue ences Sonat a a E TEE 75 A DOUE THE dese ner OO DAN siei a a S 76
152. d a a 21 ACTO r E HUNTS URI EET MOA EE Noten ener etree RE 22 Bids CONUOL seta ic cinscscsdascstnas a suiessacuandenseas a a A 23 NO Ey aces paahecaciat enced o e ane nace coed an eee acaeh seusanecett easaionsee 23 Chapter 2 The DEN SpvViTronme n siea a a 25 A OOU We INNING 1G aA neem 25 SV SCENT COMPONEN Snia a a a e E sneha tudes a deere ge 26 PXDOWE THE TIS CUE IG 2s Sse oh iene ecu Ac ceyal Saiaioledcusiand aeasetehcd S 21 a tamen operi HONS sanaa ahha a A nm Ra ean ce 28 Slana p segue NC eaa tua sausanhap cep ssaasaueamnss ues aatseneamhanautace 28 MSI MIMI WG LES a ccc anton aadatascepiooacuadteeasescsenunee scone sence seenssaenes N 28 ASE CEG GOL AMO MING IE oana E T S 29 Chan sine the Sample ssieccnt ec analent cw rrseecaag i coaaeeeicccas einen ak eee ae 32 Replacing Pe Mesci a E tea dcahey cata cedacind oe ben desea c cake 34 Mounting new passive pen s in the pen chp ou eeeeeeeeccccccceeeseeeceeeeeeeaeeeeeeeeess 4 FNP PEO ACHING INE SAID Leis ck sadn oie dvchons r E nedaleganntecesesas seas 42 FACIUSUITIG ANE objec Uve TENS onran tines eaatedecagaanstbaeherewaaneainds 44 Controlling the environmental Chaim De beses a AS 44 Systmcable and hose connects eissai a aa A E iE SEER 45 About the NanoInk DPN substrate c cc cccssssssecceccceceeesseececccesaaeesseeceeseesaaeeseeees 49 VAS COn Oat ee A es 50 HowDia s contol WOT Sisters yatcsatuite Salta a hssen laa Sse valissalaisaRaatty sak soan saad Ss uasaadaidaakadeeen e
153. d look like this before you update it i LI After you update the path add the triangular boundary at the top of the square Close Structure Designer In the tree view select the top entry in the tree and open a view After zooming in the pattern should look like this A d gt With the main design completed continue in nserting a fine alignment mark page 133 Default layer colors Here are the default colors InkCAD uses for each layer lines and paths are slightly darker than dots and boundaries 1 Blue 2 Magenta Page 132 4 18 2006 NSCRIPTOR user manual Inserting a fine alignment mark Note Note Layer Color 3 Olive green 4 Orange 5 Light pink 6 Goldenrod dark yellow 7 Purple 8 Brown 9 Dark gray 10 Red In InkCAD you can change the default colors for any existing layer To do so select a layer in the tree view Then go to the property pane and scroll down to the Element Colors Do not add a fine alignment mark until you have designed all the layers of your pattern If you add a new layer after inserting the fine alignment mark you will not be able to align that layer when drawing it on the substrate Fine alignment marks are part of InkCAD s InkAlign feature and they enable fine alignment To add a fine alignment mark first display your entire document in a view Then decide on a location for the mark generally away from the pattern but still inside the
154. ded It also is where you assign pens to layers Align the pens First open the Instrument window if it is not already open Then go to the Align Pens tab To avoid drawing the array alignment marks over the marks drawn by InkCal adjust the Y coordinate directly above the Start Alignment button increase or decrease it by a few microns If you took the pens out of feedback since finishing the InkCal process approach the sample with the feedback pen Then do the tip to tip alignment by following the procedure in Array alignment procedure page 294 Pen array alignment on page 293 has an introduction to this alignment process Verify pen layer assignments You probably already assigned pens to all your layers when running InkCal earlier but it s a good idea to make a final check to ensure that the assignments are correct In the main window s document tree select a layer you intend to draw Below the tree in the layer properties expand the Pen Array section It should look like this EO Pen Array Primary Per 1 Additional Pens If this is not the number of the pen you want to draw this layer with click on the number next to Primary Pen and change it El Pen Array Primary Per F Additional Fens If you want to do parallel drawing of this layer with more than one pen click on Additional Pens The click on the LJ button and select the other pen s Repeat this step for each layer in the document you plan to draw Use the l
155. define the location of each cell relative to the others For more information see Array tab page 216 The tabs and toolbar C The three tabs in the bottom half of the window allow you to view dot specifications line specifications and the arrangement of cell arrays See the descriptions below The toolbar has the following functions Delete selected Cut Paste row Toggle the dot line db P ee display style ji see below Copy Add a new row The Cut Copy and Paste buttons are disabled if no row is selected in the table in the bottom half of the window The toolbar s rightmost button lets you switch between display styles Display styles determine which element size parameter appears in the table below the toolbar For dots you can view either the dwell time or the dot width for lines you can choose the line width or the pen speed Miscellaneous fields area E Item Description Imaging fields After you draw the pattern to the substrate you can use Imaging size X Y these values to create a scan image of the final result Total Drawing Time This is InkCAD s estimated time to draw the cell array as defined by the settings Dots amp Lines tabs The bottom part of the Dots amp Lines window has three tabs Dots tab Click on the Dots tab to set up the dots that appear in each cell The following fields are available for each dot Column Description Enabled Check the box next to each do
156. dling pens and samples NanoInk recommends periodically cleaning your tweezers with RCA2 solution see Making RCA2 solution on page 325 for more information We also suggest using separate tweezers for sample and pen handling This helps you avoid cross contamination of gold samples after dipping pens in MHA solution e Do not store gold substrates with sources of thiols either in ink containers or on pre coated pens Thiol exposure causes the DPN process to fail a thiol monolayer forms on the substrate and the gold surface passivates e Be sure to wear gloves when handling pens and samples If your gloves become contaminated with MHA solution while coating the pens change them before handling the sample to avoid contaminating the surface e When you finish a DPN lithography operation avoid parking coated pens over the sample for prolonged periods of time more than a few minutes Molecular transport from the pen s to the sample can cause surface passivation of the gold Making piranha solution Remember the safety warning at the beginning of this appendix The piranha solution is a 3 1 mixture of sulfuric acid and hydrogen peroxide Here is how to prepare it and use it to clean a sample or pen 1 Measure 2 mL of 30 hydrogen peroxide and transfer the solution to a small Petri dish 2 Carefully add 6 mL of concentrated sulfuric acid gently swirling the mixture 3 Place the sample or pen in the Petri dish and treat it
157. dots with a diameter smaller than the contact diameter or lines with a width smaller than the contact width If you attempt to draw a pattern containing such undrawable dots and lines lithography fails and an error during lithography message appears in the main InkCAD status bar See the lithography error message section in Chapter 3 for information on how to solve this problem If you change ink models you should be aware of how InkCAD copies any coefficients it can from the old model to the new one For example if you change from the Linear model to Linear with offset InkCAD copies the dot and line diffusion coefficients from the old model to the new one If the model you switch to has coefficients which the previous model does not have InkCAD sets them to default values This happens with the Contact Diameter and Contact Width parameters when you switch from the Linear model to the Linear with offset model If you switch from a model that has certain parameters to one that does not have them and then later switch back to the first model the old values for those parameters are lost For example if you switch from Linear with offset to Linear then later change back to Linear with offset the contact diameter and contact width end up with default values rather than their initial values One way to avoid this is to save the ink definition to the ink database before switching to the Linear model InkCal is an InkCAD module that guides you
158. dow s Structure Designer component lets you create patterns containing a set of pre defined drawing objects called elements This section contains miscellaneous information about the Structure Designer objects the elements as well as structure references e Dots see Dot properties e Lines see Line properties on page 136 e Paths see Path properties on page 138 e Boundaries see How InkCAD draws boundaries on page 139 and Boundary properties on page 141 e Structure references see Structure reference properties on page 147 Dot properties These properties are available for dots Property Description Center The x and y coordinates of the dot s center Display Style This item controls how InkCAD calculates the instrument control parameters and the size of dots from one another either by dot diameter or dwell time Please see About the dot display style on page 135 for information about this property DwellTime The amount of time the software will hold the pen in place while creating the dot in seconds If you change this value InkCAD automatically recalculates the Radius Printable This property determines whether InkCAD draws the dot when drawing the current layer Please see Printable visible settings Page 134 4 18 2006 NSCRIPTOR user manual Property Description page 136 for more information Radius This is the dot s radius in microns If you change this value InkCAD automatically recalculates the D
159. dows in Image Analysis program 236 INHERITED property setting 136 initial inking process 248 ink database 97 114 Ink Database window 91 ink definitions how saved to ink database 114 how shared by layers 90 introduction to 89 saving to disk 97 continued 4 15 2006 Page 347 NSCRIPTOR user manual ink definitions cont saving to ink database 114 ink dispensing kit See also micropipettes how used 259 introduction to 250 replacing needles in 251 unpacking needles for 251 ink models and InkCal process 97 changing ink models 97 choosing appropriate models 117 in ink properties 92 introduction to 95 selecting default model 154 InkCAD See also main InkCAD window NSCRIPTOR active pen feature of See active pens alignment wizard of 205 and bias control feature 56 and multi ink drawing 123 131 and system startup sequence 28 and the overall DPN process 61 bias at startup amp shutdown 57 common options for modules 152 default directory for storing scan data 238 documents in 64 Dots amp Lines module of See Dots amp Lines DPN server component 59 drag and drop feature 148 enhancements for latest version 5 error messages from 163 how it draws boundaries 139 how to use 61 icons displayed by in system tray 84 importing CAD files in 122 InkCal module of See InkCal InkFinder component of See InkFinder InkMap module of See InkMap introduction to 59 Lattice mod
160. duction to concepts related to DPN inks and step by step instructions for using InkCal to perform ink calibration More about InkCAD Chapter 5 This chapter helps you gain more advanced knowledge about using InkCAD Instrument control Chapter 6 This chapter shows you how to use the Instrument window to make instrument settings scan the substrate and locate and align to previously written DPN patterns Using the other InkCAD modules Chapter 7 A chapter describing how to use other programs within InkCAD to create patterns of various types of objects Inking and multi pen arrays Chapter 8 This chapter describes how to work with inkwells and linear arrays of pens 4 18 2006 NSCRIPTOR user manual About this product version Active pens Chapter 9 This chapter shows you how to use the NSCRIPTOR active pens which bend downward toward the substrate in response to electrical signals Glossary Appendix A Definitions of DPN and NSCRIPTOR related terms Sample and pen handling Appendix B This appendix contains instructions for working with sample substrates pens and the chemicals often used with the DPN process Understanding AC mode Appendix C Tips and suggestions for one method of scanning a sample surface Index The index is the best way to find information in the document quickly and easily This version of NSCRIPTOR has these major new features New wizards to make
161. e Chapter 5 s section on Structure Designer object gives more detail on editing element properties Opening Structure Designer Any time you want to use Structure Designer to modify elements or structures you can simply select them in the tree view and click on the l button in the main toolbar Your ability to modify elements in Structure Designer sometimes depends on what you select before clicking on the 4 button In particular if you select a structure before clicking on that button all the structure s elements are visible but you cannot edit them InkCAD shows them in a dimmer color to indicate that they are non editable You can avoid this problem by selecting structure references rather than structures before opening Structure Designer Deleting objects from the tree This section shows you how to use the tree view to delete objects from a document Start by using Structure Designer to add a dot anywhere in the example pattern like this Page 80 4 18 2006 NSCRIPTOR user manual This is how the tree structure should look with the new dot appearing at the bottom a Layer H h Structure is Structures 1 Struct Aet DoH f Line 2 f Line 3 Up Path 4 df Boundary 5 gt i Dot 2 To delete this new dot first select it by clicking on it once in the tree view Then right click on it A pop up menu should appear pare A Delete Selected Structuretsi or and Elermentis
162. e then raises it to the re dip distance At this point InkCAD enables the Redip and Return buttons 7 2 a Redp Retur You have these choices e Ifyou want to go back to the sample now and draw with this ink click on the Return button The pen s move back to the sample and over your pattern but the system does not put them under feedback control You may need to perform a fine alignment before drawing again see Chapter 6 for the procedure e Ifyou want to re dip in the same microwell s click on Redip InkCAD dips the pen or array again then raises it back to the re dip distance It enables the Redip and Return buttons as before and you have the same three choices e If you want to re dip in another microwell and if you defined more than one during the initial inking process select this other microwell in the Inking tab list This moves the pen or pen array over the other microwell s Click on Redip and InkCAD dips the pen or array raising it back to the re dip distance When it finishes this the software enables the Redip and Return buttons again and you have the same three choices 4 18 2006 NSCRIPTOR user manual Dipping in a microchannel If you are using a multi pen array and you do not want to dip the pens in microwells you can instead dip them in the microchannels that bring ink from reservoirs to microwells This is a picture of a pen array over a microchannel rather than microwells This is a good
163. e a total width or height greater than about 90 microns About the misc fields These are the items on the NanoWord window OO Item Description Offset X amp Y If you leave these values at 0 NanoWord centers the pattern at the 0 0 origin point of the available scan range If you want to center the text at a different location enter x and y offsets here 4 18 2006 Page 223 NSCRIPTOR user manual Item Description For example if you want the text to center at 1 5 microns to the left and 0 75 microns above the origin enter 1 5 and 0 75 here If you later want to scan the drawn pattern containing the text you can enter these two values as the scan offsets in the Instrument window Outline Only Enable this field if you do not want InkCAD to fill the text characters when it draws them to the substrate Note If you disable this item NanoWord exports the output to InkCAD as boundaries which InkCAD will fill when it draws the pattern If you enable this field it exports paths that are not filled when drawn Line Width If Outline Only is enabled this is the width of the lines that outline the characters in microns Recommended This is a rough estimate of the size of the text when drawn on the Image Size substrate If this value is for example 5 it means that the text should fill a square 5 microns wide If you later want to scan the drawn pattern you can enter this value as the scan size in the Instrument
164. e Created x xX Notes Remove Reset Align Sample l New Alignment coarse di 0 000 fine Y 0 000 fine 8 0 00 Alignment fine X Default 0 000 x Feedback Off In the top part of this tab you can work with these types of images e Video images saved by clicking on the Capture button of the Video Motors tab see Using the video and misc motor controls on page 195 and e SPM scans created by clicking on the Capture button of the SPM Controls tab see SPM imaging on page 173 Note Images created since the last time you clicked on either Capture button are not saved to the image database To be sure that InkCAD saves all images and alignment data click on a Capture button first before saving You can save by going to the File menu and selecting Save Image Database InkCAD automatically saves all images of both types to its image database The alignment marks shown below are associated with particular video and SPM images So if you select a different video or SPM image in the top part of the tab InkCAD displays only the alignment mark records associated with that image below 4 18 2006 Page 201 NSCRIPTOR user manual This is the toolbar for the top section of the tab Move to location where Opens a video image in a selected image was separate window or a set Add notes for captured or scanned of SPM scan images in selected image see below SPM Images tab x E oe B Notes Re
165. e E chamber Error Gain field 186 error messages from InkCAD 115 163 172 error signal and gain setting 126 154 description of 18 viewing in scan images 173 Error Signal field 30 Ethernet network between components 26 46 evaporation of ink 249 event logging See logging Exchange button 34 196 276 Existing Structure menu option 152 exit options from InkCAD modules exiting from Dots amp Lines 213 exiting from Lattice 220 exiting from NanoWord 225 Expand Selected field 74 Export and Exit option in Dots amp Lines 68 exporting dotmaps to InkCAD 228 exporting InkCal data spreadsheets 113 exporting scan images 208 exporting text 223 225 exporting video images 208 Ext Bias In connector on bias switch box 53 Ext Bias switch on bias switch box 53 Extend field in Pen Settings window 302 303 extending active pens in laser red dot alignment 31 in the Pen Settings window 302 introduction to 20 279 manually extending 304 settings for 302 external device driving bias 51 53 56 Extra Pens column in Inking tab 262 F F connectors on E chamber housing 46 FALSE_ALL property setting 136 Fan ON OFF button in E chamber control 44 Fast Approach inkwell dipping method 255 Fast Approach SPM setup parameter 188 Fast Approach Only item 196 fast Fourier transforms 236 fast scan direction 179 183 See also slow scan direction Page 346 feedback as part of pen array leveli
166. e components e The basic DPN process page 60 e Introduction to InkCAD page 61 e Getting started in InkCAD page 64 e Drawing on the substrate page 82 e The drawing status window page 83 and The drawing status icon page 84 The NanoInk DPN software has these major components e The user interface or InkCAD which is a collection of programs that you interact with to do Dip Pen Nanolithography The user interface contains the main InkCAD window and other modules such as Dots amp Lines Lattice NanoWord and InkMap e The DPN server which handles communications between the user interface and the instrument You will rarely if ever have direct interaction with the server The DPN server communicates with a controller unit that manages the instrument itself Here is how communication takes place from the user interface to the instrument User interface DPN server lt gt a Instrument Controller 4 18 2006 Page 59 NSCRIPTOR user manual The NSCRIPTOR system has a few auxiliary software applications e The video server displays live video from the instrument on the second monitor and also provides still video images to InkCAD e The E chamber software controls the temperature and humidity inside the environmental chamber The basic DPN process This picture shows a high level view of how to use InkCAD for simple experiments Edit your design in main InkCAD window and or other InkCAD
167. e desired line width in microns e If you are looking at boundary properties first enable or disable Use Layer s Settings to indicate whether or not you want to use the default layer setting If not enable Calculate if you want InkCAD to compute the line width Otherwise disable Calculate and set Value to the desired line width in microns In boundary properties L in this field indicates that the value is the layer default If this is True InkCAD lifts the pen or pen array away from the substrate as it moves from one completed hatch line to the start of the next It does not lift the pen between hatch lines if False To set this value do one of the following e If you are looking at layer properties select True if you want the pen to withdraw between hatch lines by default or False if not e If you are looking at boundary properties first click on the field s initially hidden button Then enable or disable Use Layer s Settings to indicate whether or not you want to use the default layer setting If not enable Value if you want to withdraw the pen s between hatch lines or disable it if not 4 18 2006 Page 143 NSCRIPTOR user manual Page 144 Property Repeat Step Size Step Type Description In boundary properties L in this field indicates that the value is the layer default This is the number of times you want InkCAD to draw each hatch line Repeating a line can sometimes ensure that
168. e devices also need a way to quickly bring the pen s close to the surface with coarse positioning The approach routine which gets the pen s into feedback with the sample would be relatively slow if the pen s were not initially positioned a reasonable distance from the sample surface A coarse approach motor brings the pen s near the sample before fine approach control can begin There are several things to know about DPN pens The most commonly used pen for contact mode imaging is the Stanford pyramidal probe It is often made of silicon nitride Si3N and the cantilever usually has an A frame shape Diving board or I beam pen geometries are available with a similar composition and there are A frame contact mode pens made of silicon NanoInk has licensed intellectual property from Stanford University to make and sell DPN pens One common element of all contact mode pens is that the cantilever is a very weak spring because it is only several microns thick k the spring constant is less than 0 5 nN nm and can be as low as 0 03 nN nm This is ideal for contact mode since the pen must quickly bend while tracking the surface topography without gouging the surface An overly stiff cantilever can damage the surface by scratching a softer substrate On the other hand too weak a spring does not pull off the substrate as required during DPN experiments as the meniscus makes the pen s stick to the surface A multiple pen array is
169. e dot properties The next thing to try is viewing the whole document rather than just a single cell The tree view currently shows only the cell and its components Click on the E button in the tree view toolbar to display the entire document structure in the pane With the whole document now appearing in the tree view select D amp L ArrayHolder Then click on the J button to open another view which should look like this after zooming in e Pele zam a en pp al cal EA fad GA a EA CCFC EFFERRI 19 ou ea 19 pon uag HEC Bog fea gi a a 19 aud gagn 19 uug aun fea 0 Kr n 2 Though you can t see it at the moment the previous view showing a single cell still exists in InkCAD To see both views at once click on the middle button in the view s upper right corner Page 72 4 18 2006 NSCRIPTOR user manual About the tree view toolbar Now you can see both views NanoInk InkCAD File Edit Yiew Insert Layers Instrument Tools Window Help o OMS 2 BNewy Imported Document phs he x xs a Alt tP SS Caen 2 D amp L ArrayHolder 3 D amp Lcell1 H View 8 Name of the current document Notice the other view window behind the first window in the drawing area You can close minimize or maximize either view with the window controls You may also use InkCAD s Window menu to maximize a view or change view display modes This is the tree view toolbar mM
170. e information on AC mode though this appendix gives details on how it works and how to set it up This appendix covers the following topics e AC mode basics e Physical forces affecting AC mode page 329 e About AC mode s negative setpoint page 330 e The frequency sweep process page 330 e Pen approach in AC mode page 337 e About the Frequency Sweep tab page 339 AC mode also called non contact mode 1s an alternate method for making surface scans Instead of the contact SPM methods where the pen touches the substrate as it traces across it in AC mode the pen vibrates rapidly near the surface without actually touching it Contact mode AC mode 4 15 2006 Page 327 NSCRIPTOR user manual Page 328 A special z axis piezo called the AC mode piezo or the shaker piezo vibrates the pen as shown in this conceptual drawing AC mode piezo Oscillation amplitude amplitude The drive amplitude is the vertical movement of the AC mode piezo while the oscillation amplitude is the resulting up and down movement of the pen tip The system measures the oscillation amplitude with the photodetector monitoring the high frequency up and down movement of the deflected laser beam The NSCRIPTOR system can generate topographical error and phase images in AC mode During imaging the system adjusts the AC mode piezo to maintain a constant amplitude The process yields topographical data and sometimes the results are different th
171. e ink being deposited and e The surface chemistry and morphology of the substrate These variables affect the diffusion of ink on the substrate away from the region where the pen tip contacts the surface Diffusion is the process by which ink molecules spread onto the substrate radially from the pen onto the substrate Ink diffusion Pen Diffusion also plays a role in drawing lines Lateral ink diffusion Pen trajectory Another factor that can affect dot diameter or line width is the geometry of the tip substrate contact region itself a function of the geometry of the DPN pen apex The finite diameter of the tip apex often results in a minimum line width or dot diameter called the contact width or contact diameter 4 18 2006 NSCRIPTOR user manual Ink definitions With inks that diffuse dot area generally increases with how long the pen stays stationary to draw the dot Longer Longer still Lines usually get narrower with increased pen speed during drawing Slower Faster Some inks are known to diffuse either poorly or not at all For these inks line width and dot diameter are essentially independent of the pen speed and dwell time and are equal to the contact width or diameter In certain circumstances dots and lines drawn with the same ink and calibration parameters can have different diffusion rates Because of this nkCAD keeps separate sets of calibration coefficients for dots and lines
172. e looking at boundary properties first click on the field s initially hidden fe button Then enable or disable Page 142 4 18 2006 NSCRIPTOR user manual Property Hatch Angle Type Hatch Line Width Lift Pen s Between Hatch Lines Description Use Layer s Settings to indicate whether or not you want to use the default layer setting If not enter an angle value between 0 and 360 In boundary properties L in this field indicates that the value is the layer default This item tells InkCAD how to determine the angle of the hatch lines Your choices are e Layer Settings in boundary properties only The boundary uses the layer s Hatch Angle Type setting which can have one of the following values e Optimized InkCAD determines the hatch line angle making the hatch line s parallel to the boundary s longest edge e Fixed InkCAD uses the hatch line angle in HatchAngle If this value is Calculate InkCAD chooses the width of the hatch lines making the line width equal to the step size below If this is a numeric value it is the width of the hatch lines in microns Note This field is affected by the value of Step Type To set this value click on its initially hidden L button In the resulting dialog box do one of the following e If you are looking at layer properties enable Calculate if you want InkCAD to compute the line width by default Otherwise disable Calculate and set Value to th
173. e objective lens page 44 Use this procedure each time you start your NSCRIPTOR system for best results follow this procedure exactly l 2 Using inkwells Turn on the master computer and its two monitors When the master computer finishes booting up log on to the system Turn on the lithography controller This also turns on the DPN stage When you hear a series of beeps from the lithography controller you can start the master computer s InkCAD software Do not start it until the lithography controller beeps several times Power up the E chamber s temperature and humidity controller and 1f desired start up the E chamber control application described in Controlling the environmental chamber on page 44 For information on loading filling and working with inkwells please see Chapter 8 Page 28 4 18 2006 NSCRIPTOR user manual Laser red dot alignment The instrument uses a laser to measure the deflection of the cantilever Laser beam 7 sh Position sensing ao photodetector Cantileve MEE Sample topography See the Chapter 1 introduction to atomic force microscopy for more information on deflection Note If you use multi pen arrays be sure to select a reading pen deflect the laser light off it and set up the array data before you perform laser alignment See Chapter 8 for information on multi pen arrays and their configuration This section describes how to align the reflected laser
174. e or touch the pen s af loaded slide the sample puck towards you and then lift it up out of the groove that holds it on the stage If you have not done so already load the pen s and perform a laser red dot alignment See Chapter 2 for the procedures If they are not already loaded on the inking puck mount the sample and inkwell on the puck See Placing the sample and inkwell onto the inking puck page 252 for instructions If you have not already done so tell InkCAD you re going to use the inking puck Follow the procedure in Choosing the stage control background page 245 The inking puck is 1 5 mm taller than the standard puck If you removed a standard puck in step 2 above raise the pen s an extra 2 mm to avoid breaking them 4 18 2006 Page 256 NSCRIPTOR user manual 7 Replace the inking puck on the stage by setting it down so the bottom peg fits into the groove shown below Then slide the puck into position Am g A P Par Groove SESSE a Important note Make sure the inkwell puck s sample clips are on the left side facing away from the pen s This is the recommended orientation Sample clips Sample Pen approach direction lt lt Inkwell 8 Move the pen s in z so you can see them and the substrate in focus 9 If you are using a multi pen array and you plan to level to the sample translate the pens over the sample You can do this from the Stage Control tab on the lef
175. e tells the software to pick one to the right a higher frequency 4 18 2006 Page 335 NSCRIPTOR user manual The peak amplitude is called the target oscillation amplitude while the amplitude at the chosen drive frequency is the full oscillation amplitude rrr ere rrr ere terre rr rrr rrr terre rrrrrrrrrrrrrerrerr rrr ri rr rrr irr rrr rrr reir rrr rrr Full oscillation amplitude Target oscillation amplitude F ae c For the new setpoint InkCAD uses the other Auto Set field Setpoint at Mark Below Full Oscillation Amplitude 40 This item helps the software compensate for the vibration damping that will occur when the pen approaches the sample Setpoint at Mark Below Full Oscillation Amplitude is the percentage to reduce the full oscillation amplitude Full oscillation amplitude Pig The Setpoint is the resulting damped resonance amplitude 8 The next step is to tune the drive amplitude the up and down movement of the AC mode piezo which vibrates the cantilever See AC mode basics on page 327 for more information on this If you are doing a manual sweep click on the Tune button The system determines how much the AC mode piezo must move to vibrate the pen tip at the target oscillation amplitude It displays this in the Drive Amplitude field 9 If this is your first time through this procedure since you loaded the pen NanoInk recommends that you run another narrow range sweep at this po
176. e the Z All motor setting and click on this button 1 Select Z All z All 2 Click this button es F F 41 0 15um The pens will stop moving when they reach the upper limit of one of the z motors When this happens use the z motor controls to lower the pen by about 2 000 microns This should put the pen array near the middle of the z range Deflect the laser off a pen at either end of the array or the series if you are working with active pens and perform the red dot laser alignment as described in Chapter 2 Click on the Approach button to lower the array toward the surface and put it into feedback Important To prevent damage to the pens immediately move the mouse pointer over the Stop button and click on Stop to halt the approach at the first sign of cantilever deflection Click on the Laser button to temporarily turn off the laser Then check for deflection of the end pens If the pens at each end are the same color and the array is in contact with the substrate the array is level and you are finished To see if the array is in contact move it slightly in z by clicking on the SPM Controls tab s Pen Up and Pen Down buttons if enabled If the pens change color when you do this the array is in contact with the surface If the pens are in feedback and the end pens are not the same color the leveling process is not yet finished Use the z motor controls in the Video Motors tab to raise the pen array e Ifyou
177. e video on the video monitor You can use the controls in the Video Motors tab to adjust the video focus and zoom You may click on the ReturnXY button to return the pen to its previous x y position or on the ReturnZ button to return it to its previous z axis height You will see a couple of Correct Rotation checkboxes as you perform the alignment Enable Correct Rotation if you want to perform rotational alignment which is needed if you move or remove the puck between the first and second phases For more information on rotational alignment please see Alignment theory on page 204 To see if the system s park feature is enabled go to the Lithography tab of the DPN options If you use the motors to move the pen at any point in the fine alignment process you will need to cancel the alignment and start another In the second phase of the alignment the wizard may ask you to do a sample approach Also in the second alignment phase you need to turn the laser back on before starting the SPM scan If you initiate an SPM scan manually in the second phase not by using the alignment wizard s scan button NanoInk recommends first doing wide scans 10 15 microns to help you find the nano scale alignment feature Still video captures are important in coarse alignment and inkwell operations but you can also use them to bookmark locations on the substrate You use InkFinder s video capture facility to save the location of an impor
178. ear Spread line repeat model 92 passive pens 21 298 302 See also active pens pens paths See also elements as a NanoWord output format 224 color of in layer properties 129 132 inserting in InkCAD 76 introduction to 67 properties of 139 Pattern Generation Settings 98 100 102 patterns 61 PC of NSCRIPTOR system See master computer pen approach in AC mode 337 pen arrays See multi pen arrays pen clip 36 41 Pen column in Inking tab 262 Pen Down Up options 185 208 275 Pen item on DPN status window 292 Pen Lift Method fields 127 157 pen marks 198 Pen Settings button in Instrument window 296 Pen Settings window 297 Pen Type field in Pen Settings window 298 pens See also active pens cantilevers multi pen arrays passive pens adding new pen definitions 300 aligning 203 continued 4 15 2006 and AC mode See AC mode and bias control See sample bias and contact diameter width 88 95 163 and diffusion 88 and mounting block 41 and torsion 21 approach of in AC mode 337 approaching the sample with 188 bias applied by 50 cleaning after use 323 deleting pen definitions 301 description of 13 dipping into ink 262 electrically conductive pens 50 force applied by See force forward scan direction of 173 graphical representation of in Pen Settings 297 how held into pen clip 41 how long dipped in inkwells 265 indicator of pen height 197 inking pens See inkwells inserting into pen c
179. ear in the right side of the Instrument window Scan Size um 1 008 offset urn 1 371 Y offset urn 0 948 24 InkCAD automatically begins this new scan creating images for all enabled scan channels 4 18 2006 Page 185 NSCRIPTOR user manual The scanning toolbar B This toolbar is in the upper right corner of the window Z X Scan Stop Pen Down PenUp Park Capture These are the buttons Button Description Scan Click here to start a scanning operation using the settings of the scanning parameters below the toolbar Stop Use this button to halt a scan operation in progress Clicking this button does not take the pen out of feedback control Pen Down Click on this button to move the pen s to the surface while remaining in feedback control The button is disabled in the pen is not in feedback Pen Up This button moves the pen s a small distance away from the substrate surface keeping it in feedback control The button is disabled in the pen is not in feedback Park Click here to have the instrument lift the pen and use the piezos to move it to the park coordinates from the Lithography tab of the DPN options Capture Save the current image It appears in the Images tab on the right side of the window From there you can save it to disk The Capture button is disabled if there are currently no completed scanned images Note If you do not click on this button before saving an image datab
180. ectrical signals for extension and retraction from the scanner assembly to the pens frequency sweep In AC mode imaging this is an operation which determines the ideal scan settings including the oscillation amplitude full oscillation amplitude In AC mode imaging this is the ideal pen vibration amplitude as determined in a frequency sweep G gain A numerical multiplier that helps set the sensitivity of various instrument functions GDS II A widely used industry standard format for storing CAD computer aided design data InkCAD uses a DPN specific version of the GDS II standard H hydrophilic Water seeking readily absorbing or dissolving in water hydrophobic Water repelling not able to absorb or dissolve in water IA The NSCRIPTOR system s image analysis program IDK An acronym for ink dispensing kit 4 18 2006 NSCRIPTOR user manual ink A colloquial term for the molecular material deposited on a substrate during the DPN process DPN can use a wide variety of inks ink dispensing kit An apparatus that fills inkwells InkAlign A feature of NanoInk s InkCAD software that allows you to locate and draw the various layers of a pattern together after changing pens InkCAD The DPN software for the NSCRIPTOR product InkCAD can design and draw highly complex patterns and import CAD designs from third party applications InkCal A component of NanoInk s InkCAD software that calculates the calibrati
181. ed 1 Struct Ret Dot 1 Up Path 2 4 15 2006 Page 159 NSCRIPTOR user manual You can open new views containing various subsets of these objects for example the layer the structure the structure reference etc If you select Layer 2 and click on the J button your new view would contain just the objects in the second layer This is the tree for this new view i Laver H2 H Structured 4 Structured A Struct A et Dot 1 Up Path 2 When you create this new view InkCAD makes a separate copy of the selected objects The second tree has its own set of drawing parameters One way you can use this is to draw elements in the subset view with different values for some of the properties For some drawing parameters the changes propagate they are passed back to the original objects when you close the subset view Other properties do not propagate as shown here Action Do changes propagate to the original objects Changes to structure reference offsets x y distances Yes from the scanner origin in which to draw elements in a structure reference Adding alignment marks Yes Dot property changes Yes Line property changes Yes Path property changes Yes Changes to general boundary properties everything Yes but the hatch line properties Changes to boundary hatch line properties No Layer property changes No Translational and rotational alignment offsets No described in Chapter 6 Ex
182. ed system architecture makes the DPN process easier to use 4 18 2006 Page 15 NSCRIPTOR user manual About scanning probe microscopes SPMs Page 16 The first SPMs appeared in the early 1980s helped along by the convergence of related technologies such as personal computers piezoelectric positioning devices semiconductor based probe fabrication technology and integrated circuitry for control systems based on DSP digital signal processing There are several types of SPMs but they all essentially have the same components e A sensing apparatus for measuring the optical deflection and tip sample interaction e A feedback system for approaching the substrate and tracking the probe sample distance while scanning e A scanner usually piezoelectric for high resolution positioning between the tip and sample e An electronic control station for driving the SPM hardware e A computer system for giving instructions to the electronic control station and for processing and displaying the SPM data e A coarse positioning tool to quickly bring the probe s near the surface before approach e An x y stage positioning device that laterally moves the probe s relative to sample features An SPM requires a probe to sense an interaction with the sample surface The first SPMs were scanning tunneling microscopes that placed a metal probe within a few angstroms of a conductive surface to establish a tunneling current across the tip samp
183. eezers to remove and store the old pen s 4 With tweezers carefully pick up the new pen array 5 Push down lightly again upon the mounting block cover to lift the spring and insert the new pen array as far as it will go The pen s should be straight and centered in the mount s small recess 6 Lift the block s rotating cover The pen clip is now ready to install in the scanner head Use the following procedure to bring the pen s to the substrate and into feedback control Be sure you have performed a laser red dot alignment before using this procedure see Laser red dot alignment on page 29 1 In InkCAD open the Instrument window if it is not already open Click on the button to do this 2 Inthe Video Motors tab on the right side of the Instrument window use the focus controls to bring the pen s into focus on the video monitor Focus Click once to move all the way ___ i to the top of the A motor s range Click to move D motor up or down Click here to by one step Hold stop this down to move movement F multiple steps 15 um Step size Be careful not to drive the lens all the way into the scanner 4 18 2006 NSCRIPTOR user manual CAUTION 3 While carefully monitoring the pen sample distance by eye use the z motor controls to lower the scanner until the pen array is about 1 2 mm above the sample surface z All A E Thun 4 Now focus the video on the sam
184. els See data channels chapters in this document 4 characters See NanoWord chemicals used in DPN 323 Choose a Stage dialog box 245 Circular line profile mode 239 clean backgrounds in views 74 cleaning pens and samples 323 cleaning syringes and needles 251 clipboard copying scan images to 237 clips for holding sample onto puck 248 252 clips for pens See pen clip Close and Update option Instrument wndw 101 closed loop correction 19 coarse alignment marks See also fine alignment marks and image databases 167 listed in the Instrument window 200 where stored 167 Coarse X and Coarse Y columns 202 collagen as an ink 15 NSCRIPTOR user manual collar for video camera 27 Color Palette option in IA application 237 color palettes 209 237 colors of elements 129 132 columns in Dots amp Lines 217 completion time for patterns See time composition of sample surface 175 compressing a bitmap in InkMap 227 computer aided design See CAD files connecting to the DPN stage 209 constant force mode 18 constant amplitude AC mode imaging 328 constant force mode 126 153 constant height mode 126 153 155 173 contact diameter for dots 88 95 162 contact mode 14 29 187 See also AC mode contact point See park coordinates contact regime in inter atomic forces 329 contact width for lines 88 95 162 contacting NanoInk 3 contamination of pens and samples 324 contrast controls 198 244 Control
185. en see below To add notes for a certain pen select it in the table above and click on the Notes button See Chapter 6 for more information on the notes feature The Pen Settings button opens the window described in Using the Pen Settings window page 297 The pen table B These are the columns in the top part of the Align Pens tab Each row represents one pen in the array Column Description Pen This is the number of each pen InkCAD numbers the pens from left to right as seen on the live video starting at 1 X Offset Y These are the x and y axis offsets for each pen s tip in microns Offset relative to the tip of the feedback pen Initially these are estimated distances based on the specifications for the array type When you complete a pen array alignment the software updates these columns with measured values allowing you to draw patterns with nano scale precision Feedback A check mark in this column indicates the feedback pen There can only be one pen checked in this column You cannot change the feedback pen in this tab instead click on the Pen Settings button to open the pen settings window described in Using the Pen Settings window on page 297 Notes This column displays your notes on each pen To add notes for a pen select the pen and click on the Notes button See Chapter 6 for more information on notes Selecting pens in the pen table In the pen specification table in the top half of the Align
186. en loop scanning 19 optical magnifier See magnifier optimal resonating frequency of pens 191 Optimized property setting 143 144 optional items for NSCRIPTOR system 27 Options dialog box in InkCAD Apply to button 155 description of 152 inking related options 253 InkMap options 229 orange marks in Instrument window 265 order of dot line selection in InkCal 105 orientation of pens 251 oscillation amplitude of AC mode pen 328 Outline Only NanoWord field 224 outlines of drawn objects See object outlines Outlook e mail program 164 outlying data points in InkCal 118 out of plane micropositioner for syringe 250 Outputs window 162 Overfill Factor InkMap field 230 overfilling boundaries 140 Override Range field in options 158 overriding layer properties 141 Overscan Points field 188 4 18 2006 NSCRIPTOR user manual p pens cont palettes color 209 237 panel windows 182 panes in Dots amp Lines 213 in InkMap 226 in Instrument window 194 in Lattice 220 in main InkCAD window See property pane tree view in NanoWord 223 panning in Instrument window 197 paper See sample parallel pen arrays See multi pen arrays Parameters Used During Ink window 94 park coordinates in DPN options 154 in Instrument window 185 in layer properties 126 returning to after DPN halt 83 returning to in instrument control 209 shown in Dots amp Lines 214 parking pens after DPN 324 Partial Lin
187. enclosed space in which temperature and or humidity are controlled for DPN The instrument is generally inside an environmental chamber error signal A signal that represents the difference between the cantilever deflection signal and the desired setpoint Also called a feedback signal it measures deviation from the setpoint extend To make an active pen bend down toward the sample in response to an electrical signal F feedback In a control loop this is a signal compared to a setpoint In contact mode the feedback is a measurement of cantilever deflection In AC mode feedback is the current oscillation amplitude feedback amplitude In AC mode scanning this is the oscillation amplitude at which the AC mode piezo vibrates the pen It is one of the outputs of a frequency sweep feedback pen In NSCRIPTOR active pen arrays this is the pen designated to go into feedback This is also the pen normally used for SPM scanning of patterns 4 18 2006 Page 311 NSCRIPTOR user manual Page 312 fine alignment A type of alignment that moves the pen near on a nanometer scale an area with previous DPN drawing Contrast with coarse alignment fine alignment mark In a multi layer pattern this is an element drawn as part of the first layer which provides a reference point for the fine alignment of subsequent layers See also coarse alignment mark flex cable In the active pen feature this is the cable that carries el
188. ent tree select a layer you intend to draw Below the tree in the layer properties expand the Pen Array section It should look like this E PenAray Primary Per 1 Additional Pens If you will draw with an active or passive multi pen array and this is not the number of the pen you want to draw this layer with click on the number next to Primary Pen and change it E Pen Array Fi Additional Fens If you want to do parallel drawing of this layer with more than one pen click on Additional Pens Then click on the LJ button and select the other pen s Repeat this step for each layer in the document you plan to draw Open InkCal by clicking on the button in the main InkCAD window In Layer to Calibrate select the layer you want to calibrate for When you select a layer you select its ink definition and lithography properties Just below Layer to Calibrate is a pane containing lithography parameters for the layer You can change the settings for drawing pen approach and withdrawal bias control etc Set the values here the way you want them Changes you make here to any fields will become the new InkCAD settings for that layer Set the Calibration Pattern in the middle of the InkCal window specifying whether you want to calibrate by drawing dots only lines only or both dots and lines Set values for the Pattern Generation Settings fields See General pattern parameters C page 16 for more information on this Bel
189. er Measurement Tool select the type you haven t yet measured InkCal automatically selects the first entry in the other table Return to step 2 above to measure the elements of that type When you have measured all the dots and lines you want click on the Next button at the bottom of the window Continue on to part 3 of the ink calibration process 4 18 2006 Page 109 NSCRIPTOR user manual InkCal part 3 Fit to a curve and display the results After you have drawn a test pattern scanned it and measured the dots and or lines InkCal opens its final window It graphs the data points you measured in part 2 showing the ink s relationship between dot area and dwell time or between line width and inverse of the pen speed over the calibration range InkCal plots a calibration curve which represents the current ink model equation View the dot or line graph only available if you drew a test pattern of both dots and lines Calibration Wizard aaa Ink definition Graph of dot lE nk and misc Name Ink 4 area vs dwell i Calibration Parar grap h time or line l Description I parameters width vs l El Ink Model Linear l i l E Dot 4 0 050 t inverse pen l Dot Diffusi 0 050 ur s speed I E Line w 0 054 y l Line Diffus 0 054 um s D i Repeat Mc Stacked l ata points I I Select the layers to apply pp fe Laver the coefficients Click here to re or Lx vi Layer 2 I to list includes calculate the best
190. err fwd sur Z POS fwd P 0 um R Markers nee Diff 2 1 Marker 1 Marker 2 Profiles Hori orizontal F Vertical Oblique Clear Polygonal Circular Average 3 Marker 3 Marker 4 Display Mode P Fi Vertical Scale JV Fit Horizontal Scale Invert Z data 80 84 um Z range 2 37 um Line Roughness 40 42 um 80 84 um To see a line profile left click in the main image in the upper left corner at the location of the scan line you want to see A marks the image with a red line and displays the line profile below Extract Profile 1 C scans 6 8 err fwd sur Z2 POS fwd f Markers eter Diff2 1 Marker Marker 2 Horizontal Profiles lorizonta P H C Vertical C Oblique C Polygonal Circular M Average iff 4 3 Marker3 Marker 4 Fit Vertical Scale IV Fit Horizontal Scale M Invert Z data E Mode 80 84 um F Line Roughness 40 42 um 80 84 um 4 18 2006 NSCRIPTOR user manual Right click anywhere in the main image to remove the red line and clear the line profile You can then left click again for a new line profile Profile multiple scan lines at once by changing the Profiles field Each click you make in the image area selects a different scan line Here s how it might look with two scan lines profiled A eh ens re fu y 1 tl j aN Extract Profile 1 C scans 6 8 err fwd sur Z POS fwd O19 fan gt m Markers Profile Mode Diff
191. es into 101 using InkFinder 199 InkFinder Alignment Database message 167 inking puck and inking process 21 as shipped with system 27 introduction to 248 loading sample amp inkwell onto 252 replacing on the stage 257 264 Inking tab of Instrument window 262 InkMap module 4 18 2006 closing 226 dot drawing order from 227 drawing time for dotmaps 234 exporting data from 226 ink used by 226 introduction to 226 options for 229 continued InkMap module cont procedure for using 228 statistics displayed by 228 tips for using 234 toolbar of 227 what it does 226 window of 226 working with three or more colors in 231 inks See also calibration coefficients and bias control 23 cleaning out of syringe and needle 251 contact diameter width for See contact diameter contact width definitions for See ink definitions diffusion of 88 dispensing into inkwells 259 evaporation of in inkwells 249 how deposited on substrate 14 hydrophilic hydrophobic inks 14 line repeat model for 92 materials used as 15 non diffusing inks 89 96 properties of 92 selecting inks 90 thin layers of 173 using ink types as layer names 125 inkwells See also microwells alternative inking methods 207 and active pens 280 291 and bias control feature 54 and multi pen arrays 15 background graphic for inkwell puck 245 cleaning syringe and needle 251 data sheets for 247 designs of 247 dipping pens into 26
192. es regular The following parameters tell InkCAD how to draw a boundary These can be properties both of layers and individual boundaries In the layer properties they define the defaults for boundaries in a layer You can override the layer settings for an individual boundary by modifying that boundary s properties Please see How InkCAD draws boundaries page 139 for an introduction to boundaries Two of the following properties Hatch Angle Type and Step Type affect other properties or determine whether they have any effect 4 18 2006 Page 141 NSCRIPTOR user manual Most of these are both layer and boundary properties there are default settings in the layer properties and boundary specific settings in the boundary properties Property Description Border If this item is True InkCAD draws a border around the boundary If False it does not draw a border In boundary properties L in this field indicates that the value is the layer default See Using layer boundary settings on page 145 for more information on this Border Width This is the width of the border lines in microns if borders are enabled This is not a layer property Points You can click on this property to see information on the boundary s border endpoints See Working with the Points property on page 137 This is not a layer property Printable This property determines whether InkCAD draws the boundary when drawing the current layer Ple
193. es the current values of the calibration coefficients as initial estimates If these initial estimates are different enough from the experimental values InkCal is unable to fit a curve Here is an example with the Linear ink model Remember that the slope of the curve is the coefficient with this model X 4 Current calibration readings x InkCal s calculated curve based on data from previous calibration If you think this might be the problem try manually modifying the values of the coefficients in the ink properties with values that more closely fit the data See Modifying the coefficients on page 116 for more information on this Then click on Fit Curve again to see if the curve fit works One scenario that could cause this message is using the Linear with offset model with data that would lead to an invalid negative y intercept Another possible cause of this problem is assigning measurements to the wrong dots and or lines One way this could happen is not measuring the dots or lines in exactly the order InkCal drew them 4 18 2006 Page 115 NSCRIPTOR user manual Message There are not enough valid data points for curve fitting Data points equal to zero were ignored Modifying the coefficients manually Explanation Here is an example Order drawn by InkCal mmml i O 60 Order measured This would lead to a curve with an invalid negative slope x R To see if there was a problem with
194. ettings fields 143 user interface of InkCAD 59 user provided supplies 27 V Value fields 143 van der Waals force 329 vectors 216 219 222 Vertical line profile mode 239 vibration of DPN stage See air table VIDEO connectors 45 video image of the substrate See also image databases video monitor and bookmarking substrate locations 206 and DPN stage light 155 capturing in Instrument window 194 controls for 194 198 list of video images 200 monitor for viewing 26 orientation of pens on 251 raw video image of 194 video camera for 27 zooming and panning on 197 Video Images Enabled field 172 video monitor 26 46 194 video server of NSCRIPTOR 60 4 18 2006 Page 357 NSCRIPTOR user manual Video Motors tab of InkFinder 194 view toolbar 70 views and boundary previews 146 and the Layers menu 125 opening 70 73 toolbar for 75 windows for 72 viscoelasticity on sample surface 175 Visible property 74 136 W Warning message 162 water and DPN See de ionized water humidity meniscus We are Hugh 199 We ll leave the light on for you 155 What s this online help 121 wheel on mouse See mouse wheel width of lines and Display Style property 137 and ink diffusion 89 and Non diffusive ink model 136 for boundary hatch lines 143 in Dots amp Lines 215 in InkCal 162 in line properties 136 in NanoWord 224 in path properties 139 windows in InkCAD See Instrument wind
195. eveling is an iterative process Done To tell if the pen array is level you will look on the live video for signs of pen deflection This is how it might look for a passive array that is not leveled to the substrate a alial lil a i m io PrE E ak Pa Notice how the pens at one end are lighter than those at the other end This is the result of pen deflection and it tells you that the lighter end is too low This is the same array after some leveling It s closer to level but not fully so i Ti om Tiii mit je T 7 ara my wih Lares a Here is a level array in contact with the sample Being in contact is important because all array pens are the same color when the array is far from the surface k ti ai ga I Tis Leveling is just as important with active pen arrays but you do it in a different way When you draw with an active pen array you will normally use a consecutive series of pens For more information on this see the section on pen ranges in Chapter 9 To level an active array you need to extend the pens at either end of the series then compare the colors of these two pens See Chapter 9 for more information on active pen arrays 4 18 2006 Page 273 NSCRIPTOR user manual Using the leveling controls You level a pen array by tilting it slightly until it is parallel to the substrate surface The leveling controls are in the Instrument window s Video Motors t
196. f a different ink than the lines you could put them in different layers One of the most critical issues in the multi ink DPN process is alignment Before it can draw each new layer the system must return to the area on the substrate where it drew the previous layer s To enable this you can add a fine alignment mark a crosshair mark away from the main pattern but still within the available scan range For each subsequent layer 2 1 the software uses this fine alignment mark to precisely place the elements where they should be relative to elements in other layers In InkCAD a placeholder for the alignment mark appears when you view each subsequent layer by itself The fine alignment mark also appears for each layer in the tree view You can add a fine alignment mark to any layer but you should only add one to layer l of your pattern Also NanoInk recommends that you add a fine alignment mark only after the rest of the pattern design is complete One exception to this is if your first layer 1s imported from a GDS II file and you do not intend to draw that layer 4 15 2006 NSCRIPTOR user manual Working with layers The main InkCAD window s Layers menu is available when you are in a view It has the following commands Command Function Add Insert a new layer InkCAD adds the new layer after the last existing layer You can also create a new layer by clicking on the tree view s J button when available Trans
197. face field 197 z axis motors 195 Z axis scan resolution 188 Zoom control in Instrument window 194 zoom motor 195 Zooming in or out drag zooming 81 in JA histogram 241 in InkCAD 161 in InkCal 107 in Instrument window 170 197 in scan images 184 in Structure Designer 76 in views 75 motor for on instrument 195 4 18 2006
198. fill and empty the syringe at least three times with an appropriate solvent e The NSCRIPTOR system comes with several replacement needles To unpack the needles from the shipping container pull out the wire that runs through each needle e To replace a needle in the syringe first unscrew and remove the metal hub between it and the syringe Then remove the old needle replace it with the new one replace the hub and screw it back in e The needles are sharp be careful not to poke yourself with one It s important to keep in mind the orientation differences between the instrument and the image displayed on the video monitor When you move the pen s into position over the sample puck they move in this direction in the physical instrument as seen from the front This movement would look like the following on the live video monitor The video optics are on the same assembly as the pen array so the substrate moves beneath the seemingly stationary pens eeceecececcccce eeeeeeeoone 4 18 2006 Page 251 NSCRIPTOR user manual Placing the sample and inkwell onto the inking puck This is the inkwell sample puck without the sample and inkwell The puck has two sample clips Press here to open clips Inkwell The spring action of the sample clips holds the inkwell and sample in place To load the inkwell and sample repeat this procedure for each substrate 1 Using a pen or other pointed object push down on
199. force constant as it moves across the substrate A larger positive setpoint increases the contact force and cantilever bending For more information on this process please see Chapter L This is a gain applied to amplify the torsion readings during LFM scanning This is the overall gain applied to the error signal before the PID gains below This field which applies only to AC mode imaging is the maximum voltage for the instrument to apply to the oscillation piezo to make the pen vibrate These gain fields help you manage the instrument s PID proportional integral and derivative process control of the main z feedback loop What follows is a brief description of these gains but not a detailed explanation of the theory behind them Integral Gain is the most important of these NanoInk recommends using the same value for integral and proportional gain on flat substrates Values of 5 to 15 are usually best use 5 for LFM scanning or up to 15 to generate high quality topography data We recommend that you set the Derivative Gain to zero Note If you plan to use AC mode imaging NanoInk has some recommended settings for these fields Please see the section on recommended parameter settings in Appendix C for more information This item applies in AC mode scanning only For more information please see Appendix C When you click on this button InkCAD returns the settings in the SPM Controls tab to their factory values The SP
200. from top to bottom in this manner Path of pen _ iia 0 0 6 0 0 By default InkMap creates dots for all of the bitmap s non white pixels However you can also import a bitmap with three or more colors A setting in the InkMap tab of the Options dialog box determines which pixels are included in the resulting export See InkMap options on page 229 to learn about this InkMap tab Patterns converted by InkMap are strictly composed of dots This means that thin lines in the original bitmap may not be continuous when drawn on the substrate and the edges of patterns might not be well defined How to use InkMap Toolbar buttons These are InkMap s toolbar buttons Button Function Load a bitmap from disk into the bitmap pane Compress the bitmap reduce by half in both width and height the number of pixels displayed in the bitmap pane which leads to a smaller dotmap that takes less time to draw the dotmap will have 14 Y2 x Y2 the original number of pixels If you want to return the bitmap to its original state press to re load the bitmap from disk Clear the bitmap pane Click on the J load bitmap button to open a new bitmap in the pane x Open the bitmap conversion options in a tab in the InkCAD options For more information please see InkMap options on page 229 Convert the bitmap to a dotmap using the InkMap configuration settings see InkMap options on page 229 Clear the dotmap pane Cl
201. g enough for your DPN pattern Look at Width and Height near the bottom of the Align Pens tab and also check the graphical representation of the feedback pen s scan range If you want to change the location or size of the alignment marks that the pens will draw during alignment do so now in the Alignment Mark section of the tab 9 If itis not already loaded load the puck into the instrument See Chapter 2 for more information on this 10 Prepare to draw the alignment pattern First perform the red dot laser alignment being sure to do two things reflect the laser beam off the selected feedback pen and extend the feedback pen which you can do in the tab where you do the red dot laser alignment Manipulating the feedback pen Page 290 4 18 2006 NSCRIPTOR user manual 11 12 13 14 15 16 17 during laser alignment page 292 describes controls in the red dot tab that let you retract and extend the feedback pen See Chapter 2 for laser alignment instructions Apply ink to the selected pens You would normally do this with the three part inking process described in Chapter 8 This includes positioning the pens over the inkwell dispensing ink into the inkwell dipping the pens into the ink and moving them back over the sample Use the InkCal module to calibrate the diffusion of all inks you plan to draw with See Chapter 4 for more information InkCal automatically retracts and extends active pens as nee
202. g list option 172 sample for drawing and bias control 23 approaching with the pen s 42 bookmarking locations on 206 changing in instrument 32 cleaning samples 323 clip for holding onto puck 248 252 diffusion onto 88 how ink is deposited on 14 inking directly from the sample 207 intentionally scratching 206 layout of NanoInk s DPN substrate 49 leveling a pen array to 255 272 levelness of correcting for 242 loading into inkwell puck 252 materials used as samples 15 moving pen over 172 returning pen s to after inking 266 sample puck it rests on See sample holder puck tips for handling 323 where placed on inking puck 248 SatU and SatV fields 199 saturation in video image 199 Save amp Exit button in InkCal 110 111 Save button in IA application 235 Scaling field in InkMap 230 Scaling field in Lattice 222 scaling values in Dots amp Lines 218 scan range See available scan range scanner See also AC mode piezo as a DPN stage component 16 configuration of 18 description of 18 linearizing 191 picture of scanner assembly 27 rotating the scanner head 34 scanner controlled movement 156 SCANNER connectors 45 Scanner range exceeded message 287 scanning an image 81 101 173 See also Image Analysis program image databases scanning probe microscopy SPM 16 187 190 scanning tunneling microscopes STMs 16 scientific papers relating to DPN 23 screen captures of video image 194 Select
203. get the total number of elements in the drawing area multiply these two values Drawing Time The software s estimated time for creating the lattice on the substrate in minutes Page 222 4 18 2006 NSCRIPTOR user manual Using NanoWord NanoWord creates nano scale text for your patterns You enter the text and specify how it should appear When you finish NanoWord returns the text to InkCAD as a series of boundaries or paths depending on how you set a field called Outline Only NanoWord provides a long list of fonts to choose from n This is the main NanoWord window Pattern p D OOO Ee Fie Edit Tools Help pane T e Text to be Drawn Preview Window he j Font Setu Click y E BE IC text 5 i here for here ee ie font i w oun settings l l I D Qutline ony i I Lingidh l l I 1 Recommended an Image Size ee m Misc fields You type your text in the left pane and NanoWord displays how it will look on the right Click on the Font Setup button to enter font settings See Font settings on page 224 for more information on this Unlike word processors text in the left pane does not wrap to the next line when you reach the right side of the pane A new line only starts when you press lt Enter gt Note When you enter text keep in mind that you cannot draw beyond the maximum horizontal and vertical scan ranges of the instrument Your text should not hav
204. gives a high level picture of how inking works Part 1 Position the pen s for inking Part 2 Dispense ink into inkwell Part 3 Ink and return pen s Here are some brief descriptions of these parts Position the pens for inking Move the pen s away from the sample and over the microwell s See Inking part 1 Positioning the pen s page 255 Dispense ink Place a small amount of ink into reservoirs on the inkwell from which it flows to microwells See Inking part 2 Dispensing ink page 259 Ink pen s and return Dip the pen s into the microwell s and return them to the sample substrate for drawing See Inking part 3 Inking the pen s and returning to the sample page 262 With the small amounts of ink used in the DPN process evaporation can be a problem with some inks This is why the inking procedure that follows has you use the NSCRIPTOR to position the pen s over the inkwell on the sample puck before dispensing ink This preliminary step minimizes the time between ink dispensing and dipping which reduces evaporation If you want to use NSCRIPTOR to re ink several minutes after the initial dip for example after doing some DPN drawing you may need to use an ink that doesn t evaporate rapidly 4 18 2006 Page 249 NSCRIPTOR user manual Getting ready for inking This section gives some background information on inking and describes the preparations to make before using inkwells Equipment and
205. gnification scaling which is a structure reference property e For dots with Display Style set to RADIUS the dot size changes when you modify the magnification property e For dots with Display Style set to DWELL_TIME the dot size does not change when you modify the magnification 4 15 2006 Page 135 NSCRIPTOR user manual Printable visible settings There are Printable and Visible properties for all Structure Designer elements dots lines paths and boundaries as well as other objects such as structure references These properties determine whether InkCAD draws them on the substrate or displays them in InkCAD This table describes the settings available for the Printable and Visible properties Setting Description TRUE InkCAD will draw or display the element This is the default value FALSE InkCAD will not draw or display the element FALSE _ALL For elements dots lines paths and boundaries this has the same meaning as FALSE For other objects such as structure references it means that none of the elements included in the object are printable or visible DEFAULT InkCAD uses its default printability or visibility property to determine whether the element is drawn or displayed INHERITED The element inherits the layer s printability or visibility property Line properties These are the line properties Property Description DisplayStyle This item controls how InkCAD displays information about the line
206. gs which should look something like this 1104 au song gt Notice that this graph has a much smaller range than the first one Note The graph might show the data from two sweeps at the same time If so the red line is the current plot and the green one is the previous plot 7 The next step is to determine the best drive frequency for scanning If you are doing a manual sweep click on the Auto Set button InkCAD draws a vertical yellow line at the ideal drive frequency near the peak reading and sets the Drive Freq field to that value It also computes a new Setpoint aw ong gt Page 334 4 18 2006 NSCRIPTOR user manual Here is how InkCAD derives those values or how you can derive them for a manual sweep a The software first finds the frequency where the amplitude peaks 1104 p P m 259 E 565 l Peak frequency b The Frequency Sweep tab has this field Dive Frequency Offset from Peak iA 0 For increased scan sensitivity InkCAD does not use the peak value as its AC mode frequency Instead it finds a frequency whose amplitude is a certain percentage the Drive Frequency Offset from Peak less than the peak frequency Here is how it picked its frequency in this example Chosen drive frequency 10 of peak amplitude A negative Drive Frequency Offset from Peak value tells InkKCAD to pick a drive frequency to the left in the graph a lower frequency A positive valu
207. he coefficient calculation find its entry in the tables and click twice in the Enable column Enable 4 18 2006 NSCRIPTOR user manual Sizing tips and tricks The more you can enlarge the dots and lines in the scanned pattern the more accurate the resulting measurements can be especially for small dots and thin lines You can use the rotating wheel on the mouse to quickly modify the Scan Size and X Y Offset values For example if you click on Scan Size the mouse wheel zooms the image in or out and if you first click on X Y Offset the wheel moves the image in x or y This does not cause the software to make a new scan unless you click on the InkFinder button in the lower left corner of the window You can also use the mouse to resize sections of the InkCal window or enlarge the window overall Cohbr otion Wizard Sean Sine RS SAY Othe res ise a Maquurement Tool Con Line Chem aar E BG I um Vi 1 305 uma hi Dum Gah Calibration Patten i Drag here to enlarge the window Procedure At this point in the process the InkCal window should show a scan of the test pattern banjos E KIY iet fer i avi w Ex Heanrerere Tool Cin Une Fiind a Y 1 Wu Waah Dun 4 18 2006 Page 107 NSCRIPTOR user manual Page 108 If your test pattern from part 1 contained both dots and lines you need to measure all instances of one element type then a
208. he effective scan range In this example if we want the pattern to draw correctly with the pens you selected in the Instrument window we need to move the pattern into this effective range You can do this by translating the layers To do this first open a view of the whole document Then select all layers in the document tree In the View toolbar shown in the image above click on the button and use the mouse to drag a line from the pattern s current location into the effective scan range Here s how the example pattern might look after doing this e Pps ak XS 89 973 88 623 49 538 47 576 Another approach would be to first define the effective range for the pens you want to use then design your pattern to fit in that range as shown in the main InkCAD window Once you have picked active pens in the Align Pens tab of the Instrument window you can enable or disable the display of the effective scan range in the main InkCAD window by opening the View menu and selecting Effective Scan Range 4 18 2006 NSCRIPTOR user manual Changing the pen array type Out of range message Note In the Instrument window s Align Pens tab the current pen or pen array type appears just below the toolbar Per If this is not the array type you want to use follow this procedure to change it 1 From the Align Pens tab of the Instrument window start by clicking on the toolbar s Pen Settings button 2 This button opens
209. he feedback amplitude This drawing shows what happens as the system puts the pen in feedback Starting to Still Z piezo backs off to approach the approaching reestablish Surface the surface feedback amplitude Full oscillation Pen reaches Senses surface Feedback amplitude 0 9V feedback amplitude 0 395V amplitude driving in free air amplitude 0 495V 0 495 push past 0 495V Ready to value of 0 1 image Other notes There are a few other things to keep in mind about AC mode approach e The push past value Surface Value Surface Deviation must be less than the setpoint s absolute value In the example 0 4 0 3 lt 0 495 If this is not the case the system will over attenuate the amplitude causing the approach to fail and probably crashing the pen onto the sample e Surface Deviation cannot be negative Its minimum value is 0 1 e Surface Value can be negative but this causes the system to falsely sense the surface before actually reaching the feedback amplitude If Surface Value Surface Deviation the system effectively senses the surface at the feedback amplitude setpoint This is not effective Surface Value should therefore be gt Surface Deviation 4 18 2006 NSCRIPTOR user manual About the Frequency Sweep tab e When you image in AC mode NanoInk suggests that the product of the scan rate and scan size not exceed 40 Thus for a 20 um scan the scan rate should probably be 2 Hz
210. he main InkCAD window a regular array of identical dots cre EEG Open NanoWord Chapter 7 a module in which you can enter text and export it back to the main InkCAD window Open the InkMap module Chapter 7 which returns to the main InkCAD window a bitmapped graphic converted to a pattern of dots 3 This button opens a Structure Designer window in which you can J create a free form pattern with a set of drawing objects View and modify the InkCAD options general application parameters and DPN settings For more information see Chapter 5 4 18 2006 Page 63 NSCRIPTOR user manual Getting started in InkCAD The tutorials that follow introduce you to the InkCAD software describe how to work and navigate in it and guide you through your first DPN experiment As you work through the following sections you will use one of InkCAD s other modules and learn about the information that appears in the tree view and object property panes of the main window This is the InkKCAD window when it first opens NanoInk InkCAD Structure Designer VA Fie Edit View Insert Elements Instrument Tools Window Help 21 8 xX o OPF SNRA DisplayByLayer True DisplayElement True DisplayPrintable False DisplayVisibleOr True DisplayB yLayers Mouse Position lt 4 626 Y 5 245 Center 0 0 Drawing Time 0 0 0 InkCAD initially opens Structure Designer Structure Designer is a function that ru
211. he motorized stage before b sharting lithography When you click on a property in a properties pane such as the one in the main InkCAD window a text description of the selected property appears Display Style RADIUS al Drag this to increase or eee INHERITED El decrease the Radius 2 293 Visible INHERITED space for the g help text Ptintabe 77 Help lDeternmines if the current element is text drawn during lithography 4 18 2006 Page 121 NSCRIPTOR user manual Importing CAD files InkCAD gives you the option to design a pattern in a computer aided design CAD package rather than in InkCAD If you save your pattern in the GDS T format you can import it into InkCAD and do DPN with it GDS II is a widely used industry standard format for storing CAD data It is ideal for describing and manipulating highly complex structures containing vast numbers of objects If you want to design patterns in a CAD application please note that InkCAD does not support the following GDS II data types InkCAD simply ignores them e text e node e box Note Youcan use InkCAD s NanoWord module to add text to your patterns See Chapter 7 for details InkCAD also has some data types dots lines and fine alignment marks that are needed for the DPN process and are not part of the normal GDS II standard To import CAD files go to InkCAD s File menu and select Open If you already have a document
212. he new mark position InkCAD adds a new entry to the microwell table Microwell Time Pen amp i H 2009 z 97 172 feo At this point you can add notes about the microwell by clicking on the Notes button see Chapter 6 for more information on the notes feature You may also modify how long the pen s should stay dipped in this microwell 4 18 2006 Page 265 NSCRIPTOR user manual To do this simply click on the microwell s Time entry which brings up this dialog box Edit Dipping Time Dipping Time 5 000 Cancel Set the desired dipping time and click on OK 8 If you want to dip the pen s in another microwell after this one translate the stage until the new microwell is visible on the live video monitor Then go back to step 5 above to create a mark for that next microwell 9 When you are ready to ink the pen or pen array make sure the correct microwell is selected indicated by a mark to the left side in the microwell table If the laser is off turn it back on in the Video Motors tab 10 Click on the Inking tab s Dip button to dip the pen s If the button is not enabled check that you have completed all of the previous steps InkCAD moves the pen or pen array to the microwell s lowers it into the microwell and holds it there for the specified dipping time It then lifts the pen array to the re dip distance At this point InkCAD enables the Redip and Return buttons a oe
213. he oscillation frequency that causes a pen s greatest vibration amplitude retract With passive pens this is another term for withdraw With active pens this is the act of shutting off the actuating signal causing the bend to bend up away from the sample S sample The material on which the pen deposits ink in the DPN process Also called the substrate sample bias Another term for bias control sample holder puck The puck shaped metal disk on which users place the sample substrate In addition to the standard puck NSCRIPTOR supports special pucks for inking and NETS scanner The instrument component that moves the pen relative to the stage Most instrument scanners use piezoelectric components servo Another term for the instrument s feedback system setpoint The target value that the feedback controller tries to reach species In the DPN process this is a specific category of molecule or material stage The instrument component on which the sample rests The pen moves relative to the stage on some instruments including the one used in NSCRIPTOR systems the stage moves and the pen is stationary 4 18 2006 Page 319 NSCRIPTOR user manual Page 320 structure A named collection of drawing objects A structure can contain any number of structure references array references elements and other structures A structure may contain a structure reference though it does not have to Structure Designer
214. he output bias after various NSCRIPTOR events Event Bias value Bias value Bias value 0 Rest Bias Litho Bias InkCAD startup X InkCAD shutdown X DPN server started X Pen exchange started X Lithography started X Moving pen to lithography position X Drawing a feature pen down X Lithography finished X Drawing a layer that has bias control No change in bias status disabled InkCAD s DPN server component handles communication with the instrument controller See the software components section of Chapter 3 for more information on the DPN server See Replacing pens on page 34 for more information on the pen exchange process For more bias control information You can learn more about bias control by reading NanoInk s data sheet and tech note on the subject The tech note describes how to create bias induced oxidation patterns on silicon substrates 4 18 2006 Page 57 NSCRIPTOR user manual Page 58 4 18 2006 NSCRIPTOR user manual Software components Chapter 3 Getting started with InkCAD This chapter shows you how to use InkCAD NanoInk s main DPN application InkCAD displays a main window to work in and also gives you access to several other specialized pattern design modules In InkCAD you can design nano scale patterns calibrate inks control instrument operations draw patterns and perform SPM scans among other things These sections will further introduce you to InkCAD e Softwar
215. he video monitor You set a pen mark by clicking in the video image typically on a pen or a reference surface feature 4 15 2006 Page 197 NSCRIPTOR user manual Z axis indicator and controls B In the Motors section of this tab there is a z height indicator and several controls related to z axis positioning Current Z axis pen position Enter a value here to move the pen s to that height Indicates current pen height The range is I the Z axis motor i Use these range A red band l controls to shows the lowest i K move the height since InkFinder I pen s in Z has been running the l safe level The dark l blue area indicates l Height of the the current height l sample a numerical representation of the indicator s red Click here to move Click here to band the pens 25 manually reset the microns above the safe level to the safe level current height InkCAD automatically resets the Z Surface height and the indicator s red band any time you move the pen s with the z motors Zooming and panning C In the Video pane you can control what part of the raw image appears on the video monitor The following example shows how it works The Instrument window starts with no zooming or panning applied displaying a video image like this Video Page 198 4 18 2006 NSCRIPTOR user manual Now zoom in by holding down the right mouse button while dragging over part of the Video Zoom amp Pan pane
216. his point the 4 18 2006 Page 253 NSCRIPTOR user manual software gives you the opportunity to re dip if you wish You tell InkCAD whether to re dip or return the pen s back to the sample To move the pen s from the sample to the inkwell and vice versa the system lifts them up to a withdraw distance before moving in x y Withdraw Distance Site ere te ert EAN Ch te es Des Des Des Nes Nes Nes Des Cee ee ee ed ed ed ed ed dd The items in the bottom part of the inking options specify how to dip the pen s into the ink These are the values you can set in the inking options Item Redip Distance Withdraw Distance XY Motion Speed Page 254 Description This is the height in microns for the system to raise the pen s to after dipping while waiting for a command to re dip or return to the sample Note A value of 10 15 microns is a good starting point to ensure that the pen s are moved by the piezo rather than the motors The height in microns to raise the pen s to before moving between the sample and the inkwell see pictures above Note Keep in mind that there can be significant surface height differences between the sample and inkwell For initial inking described in Initial inking vs re inking after drawing on page 248 use a value of 10 30 microns For inking operations where the pen moves from the sample to the inkwell or vice versa the recommended value is 100 microns The speed
217. ht distance away Do an approach to bring the pen s close to the inkwell surface using the Approach button in the Video Motors tab Then use the controls in that tab to withdraw a short distance 5 15 microns Turn off the laser so you can see the pen s clearly In the live video click on the location of the tip or if using a multi pen array the tip of the first pen to ink keeping in mind the description of how the system numbers pens see Pen array selection and setup on page 271 On NanoInk diving board pens the tip is at the center of the cantilever 3 5 microns from the end In this image the center of the cross mark is at the correct location The second image shows how it might look in less ideal lighting conditions The next step is to mark the microwell or the first microwell if you are using a multi pen array Start by clicking on the Capture button in the Video Motors tab This transfers the current video image to the Stage Control tab Go to the Inking tab and click on the New button Then left click at the center of the microwell InkCAD puts an orange mark where you clicked along with an identification number for it Note If you are using a multi pen array you only need to mark the location of the first microwell You may find that it 1s easier to correctly mark the microwell position if you Zoom in on it first If you want to re mark the microwell click on the Move button above and click on t
218. ic locations on the substrate Here are the markings and dimensions on the sample substrate NANOINK AHJ AIJ BIJ 250 um gt Ti ABJ 250 um 4 18 2006 Page 49 NSCRIPTOR user manual Bias control Page 50 Notes NSCRIPTOR s bias control feature applies a controlled voltage between the tip and sample while drawing DPN patterns In its internal mode in which the NSCRIPTOR system supplies the bias it uses two cables connected to the pen and sample puck You can switch between two basic modes e Pen supplied bias in this mode positive voltage goes to the pen switch i A Switch box Bias voltage The electrical signals are routed from their source by a Nanolnk supplied box called the bias control switch box The box has a polarity switch that allows you to easily reverse the bias polarity from one mode to the other e Puck supplied bias you can supply positive voltage to the puck by flipping the switch box s polarity switch This is equivalent to having a grounded puck and a negative voltage on the pen switch a a Switch box Bias voltage The InkCAD software has some settings for bias control but it does not determine whether positive bias goes to the pen or the puck This is controlled only by settings on the switch box which switches the polarity of the signal The switch box has this bias polarity switch because the microscope s DAC output can only provide signals at 0 10
219. ick on one of the images to view a full sized version A full sized image looks like this for a completed scan wot L 7 When the scan is done if you want to add the image to the image database click on the Capture button in the SPM Controls tab You can then save the database by opening the File menu and selecting Save Image Database 4 18 2006 Page 177 NSCRIPTOR user manual 8 If you want an image to appear on the grid in the main InkCAD window select the image you want to pass back by clicking in the title bar this makes the chosen scan the selected image 6250 0 4 a Topography 7 Then exit from the Instrument window by going to the File menu choosing Close and selecting either Insert in Designer to display the image in a new Structure Designer window or Insert in Existing View to display it in the view that was displayed before you opened the Instrument window if there is an open view in InkCAD The InkCAD window shows the image at the scan coordinates note the InkCAD grid marks Page 178 4 18 2006 NSCRIPTOR user manual Using the scanning controls This is the Instrument window just before starting a scan 3 Vf Sd unnamed xad Instrument OO X File Tools Yiew Help Stage Control SPM Images SPM Setup f g 3 i jal Toolbar i Scan Stop PenDown PenUp Park zji B SE can Aaa A ee ee eee ee a I J l Scan Size um 5 000 Scan rate Hz 10 0 I I
220. ick on the L clear dotmap button to create a new dotmap in the pane A re 4 18 2006 Page 227 NSCRIPTOR user manual InkMap procedure The following procedure shows how to use InkMap to convert a bitmap modify it and pass it into the InkCAD window See Tips on using InkMap on page 234 for helpful InkMap hints Ii 7 Page 228 From the main InkCAD window open InkMap by clicking on the main toolbar s l button Click on the load bitmap toolbar button to load a bitmap into the left pane Browse to and select a BMP or JPG file Click on convert to dotmap to create a dotmap in the right pane InkMap displays dotmap statistics in the status message area at the bottom of the dialog box Depending on the values of the statistics you might wish to modify the InkMap settings and create a new dotmap You could click on the l button one or more times to reduce the size of the dotmap or you could click on to change conversion settings in the InkMap options See InkMap options on page 229 for information on this When you are satisfied with the dotmap export it back to InkCAD and close InkMap To do this go to InkMap s File menu and select Export and Close In addition to exporting to a new document New Document you can also export to a new layer in the current document New Layer or to an existing layer in the current document Select Layer The following dialog box appears Enter the x and y offsets for
221. ick on the button for raising the pen as shown here 1 Set this value 2 Click here 4 18 2006 Page 259 NSCRIPTOR user manual 2 Being careful not to touch the pen or pen array if loaded slide the sample puck towards you and then lift it up out of the groove that holds it on the Stage 3 Insert the inkwell puck into the base of the ink dispensing kit IDK To do this set the puck down so its bottom peg fits into the groove on the assembly s base Slide the puck in all the way 4 If you are using a syringe loosen the thumbscrews and remove it 5 Fill the syringe or micropipette with a small amount of ink If you are using a syringe replace it in the assembly Important For a syringe assure the correct needle height by lifting it up as far as it will go in the bracket until the metal sheath touches the bracket It should look like this Thumbscrews lt Bracket Tighten the thumbscrews to secure the syringe 6 On the inkwell identify the reservoir you plan to use 7 If you are using a syringe coarse position the needle tip to the inkwell by moving the magnetized base of the syringe assembly 8 Form a drop of ink at the end of the needle For a syringe lightly tap on the plunger You can adjust the size of the drop by gently moving the plunger up or down A small drop is usually better 9 Position the needle tip over the chosen inkwell reservoir If using a syringe do this with the IDK s mic
222. ics micro scale alignment Another term for coarse alignment microchannel On a DPN Inkwell this is a channel connecting an ink reservoir to a microwell micron A unit of distance equal to one millionth of a meter or a thousand nanometers Also called a micrometer microwell The smaller structure on a DPN Inkwell into which the system dips the pen tip for inking Ink comes through a microchannel from an inkwell reservoir monolayer A layer of material that is one atom or molecule thick N nano Newton A unit of force equal to one billionth of a Newton InkCAD measures the force applied by the pen to the sample in nano Newtons nano scale alignment Another term for fine alignment nanolithography A process that creates patterns or structures with at least one dimension measured in nanometers 4 15 2006 Page 315 NSCRIPTOR user manual Page 316 nanometer A unit of distance equal to one billionth of a meter or one thousandth of a micron NanoWord A component of NanoInk s InkCAD software that creates patterns of text characters NETS Short for Nano scale Experimenter s Testing System this is a NanoInk product for nano scale electronics research Newton A basic unit of force Specifically it is the amount of force needed to accelerate a mass of one kilogram at a rate of one meter per second per second nm An abbreviation for nanometer nN An abbreviation for nano Newton non contac
223. ie IL 60077 Phone 847 679 NANO 6266 Fax 847 679 8767 www nanoink net support nanoink net Please send comments on this document to documentation nanoink net NanoInk the NanoInk logo Dip Pen Nanolithography DPN DPNWrite DPNWriter NSCRIPTOR InkCAD InkCal InkAlign InkMap InkFinder Inkwell Nanoscale Experimenters Test System NETS Active Pens and NS Active are trademarks or registered trademarks of NanoInk Inc Microsoft Windows NET and Outlook are trademarks or registered trademarks of Microsoft Corporation Pentium is a registered trademark of Intel Corporation InstallShield is a registered trademark and service mark of InstallShield Corporation Acrobat is a registered trademark of Adobe Systems Inc Stanford is a registered trademark of Stanford University Ethernet is a registered trademark of Xerox Corporation Molex is a registered trademark of Molex Inc All other trademarks are the property of their respective owners Revision log NSC RIPTOR user manual Revision Date Description of changes A 6 2003 First version of this document B 10 2003 Document revised for new product features including inkwells and multi probe arrays C 2 2004 Revised for sample bias feature Added two appendices D 4 2004 Revised for new ink diffusion models and simplified InkFinder procedures E 8 2004 Revised for maintenance release and a new ink model InkCAD version 2 6 Help only version no manual was 4
224. ilever 329 rest bias See also lithography bias as a layer property 128 example of 51 in DPN options 157 software settings for 56 Restore button in Tip Exchange dialog 40 277 Retract field in Pen Settings window 302 303 Retract Setpoint items 126 154 retracting active pens in laser red dot alignment 31 in the Pen Settings window 302 introduction to 20 279 manually retracting 304 settings for 302 Return toolbar button 264 266 ReturnXY button in alignment wizard 206 ReturnZ button in alignment wizard 206 RGB values for colors 129 RH SENSOR connector 46 ribbon cables 45 right tabs in Instrument window 166 Rotate button in IA 3 D images 244 rotating layers in InkCAD 75 rotating the scanner head 34 Rotation Instrument window field 186 Rotation structure reference property 147 148 rotational alignment 204 roughness of line profiles See line roughness rows in Dots amp Lines 217 S safe level in Instrument window 197 safe region on flex cable 41 281 sample bias See bias control sample clips 248 252 sample holder puck See also inking puck bias applied by 50 insulating layer in 53 modified version for bias control 50 53 moving or removing during alignment 203 206 moving pen to puck 172 removing while changing pens 204 continued NSCRIPTOR user manual sample holder puck cont removing while changing sample 33 256 260 specifying the puck in use 245 Sample Loadin
225. in on a part of the graph position the sliders at the endpoints of the range you re interested in Move sliders to zoom endpoints Apply Auto Then click on the Apply button 4 18 2006 Page 241 NSCRIPTOR user manual Plane correction Page 242 Notice the changed numerical values for the z color range IA resets the color scale for the new range This usually changes the color composition of the image at left Plane correction is useful when the scanned sample was not completely level Here is an example image from such a scan 3 C scans te s 96 18 um Y 96 18 um Z Tr2 24 om Notice that the image gets darker as you move from the upper left corner to the lower right This was probably caused by the stage being slightly tilted To correct for this click on IA s button This is the plane correction dialog box Plane Correction 1 C scans test30 sur Z POS fwd Image with Original correction scan applied image Include or exclude areas from correction see below Z range 772 24 nm Z range 703 88 nm ca Areato Analyze 3 Point Plane Correction I i ais ia ji ae C O r r e ct j O n Average data inthe proximity of Fe Exclude Area C h O O S e h O Ww m et h O ds z aes surface leveling l Correct Al to p ro ce S S iil lad surface X Y brono l l Keep original data in excluded area Polynomial surface X leveling C Assign mean value to excluded
226. ing pen cleaning procedure 1 Soak the pens in piranha solution for five minutes See Making piranha solution on page 324 for more information on this solution 2 Rinse them with de ionized water 3 Rinse with methanol 4 Dry the pens in a gentle 2 5 psi stream of nitrogen gas You can then either store the pens for later use or re coat them with the NanoInk MHA solution There is no special handling needed for freshly evaporated gold substrates stored in methanol rinsed polypropylene or polyethylene containers provided that e You use the samples within 30 45 days of their initial evaporation period and e The samples have not been exposed to any thiol containing compounds This is the procedure for cleaning a sample 1 Soak the substrate with piranha solution for 20 minutes See Making piranha solution page 324 for more information 2 Rinse it with de ionized water 3 Rinse with methanol 4 15 2006 Page 323 NSCRIPTOR user manual 4 Dry the sample with a stream 10 psi of nitrogen gas Note Prolonged cleaning or multiple cleanings with piranha solution can change the gold grain roughness and degrade the lithography quality This is especially true if you try drawing fine lines lt 65 nm width on recycled cleaned substrates Avoiding typical problems with MHA A few other things to keep in mind when working with MHA e You may have lithography problems if you use common tweezers for han
227. ink draw that layer then load a pen array coated with the second ink and draw the second layer The first layer drawn to the substrate is the only layer in which InkCAD draws a fine alignment mark element described below Each layer has one or more structures There is more information about layers in Chapter 5 An InkCAD structure is simply a collection of drawing objects The purpose of a structure is to group things together This is a conceptual drawing Dot Line Line Dot Structure A structure has only a few properties it s mostly just a name A structure can contain any number of structure references array references elements and other structures A structure reference contains a pointer to a structure and an added group of properties Structure reference Structure 4 18 2006 Page 65 NSCRIPTOR user manual Structure reference example Page 66 Array references Here is how this would look in the main InkCAD window s tree view Layer 1 A Structure 29 Stucturecitt Struct Ref This is the a structure that ra Line e the structure f Line 3 reference D Dot 2 points to Structure references have a number of properties that structures do not have With structure references you can easily change the drawing location relative to the origin of the DPN scan range as well as the angle of rotation and a magnification factor For example you could create a structure referen
228. int To do this click on either Full Auto for an automated sweep or Start Sweep for a manual sweep Return to step 6 page 334 Page 336 4 18 2006 NSCRIPTOR user manual Pen approach in AC mode Example If this is your second time through this procedure since loading the pen the frequency sweep process is done InkCAD saves the parameter values for AC mode scanning You can avoid many AC mode imaging problems by understanding where the tip is while imaging relative to the sample and how it approaches the sample As it lowers the pen to the surface the system detects changes in the vibration amplitude The setpoint determines the height of the pen relative to the surface once in feedback A higher negative setpoint moves the tip farther away from the surface For example a setpoint of 0 5 leaves the tip higher than one of 0 4 This graph shows the pen s oscillation range as it approaches the sample height Push past region t Setpoint Approach time Notice that the lower boundary moves down steadily until it reaches the setpoint Just as in contact mode approaches the pen overshoots the target height and has a slight push past movement to return to it The overall amplitude decreases as the tip approaches the sample a result of the attenuation described in step 7c of the Detailed frequency sweep process description page 333 The Instrument window s Settings tab has two fields that affect AC mode a
229. ion to 15 20 270 length of pens in 271 leveling 255 272 loading into instrument 271 numbering of pens in 297 pitch between pens 298 positioning over inkwells 255 preview of array output 271 reading pen of See reading pens re dipping in ink 253 returning to sample after inking 253 rotating for leveling 274 settings for 297 spacing of pens 270 types of 297 N n button in main nkCAD window 63 NanoInk IA icon 235 NanoInk how to contact 3 Nano scale Experimenter s Testing System See NETS product nanotechnology 13 4 18 2006 Page 351 NSCRIPTOR user manual NanoWord module 223 nebulizer in E chamber 46 48 needle of syringe See ink dispensing kit negative sample bias 56 negative setpoint for AC mode 330 NETS product 54 245 New Alignment button in InkFinder tab 202 New Alignment button in Instrument windw 205 new ink option in ink properties 90 New Pen Array dialog box 300 nitrogen and humidity control 27 and nebulizer 46 as a drying agent 323 325 No Current Pen Selected message 301 No Image Database menu option 166 node GDS II data type 122 nodes in tree view 74 noise in signals See filters non contact regime in inter atomic forces 329 non contact scanning mode See AC mode Non diffusive ink model 96 136 non editable elements 77 80 Nonlinear Image Correction field 188 non linear InkCal curves 95 Notes feature how to use 203 in ink calibration parameters 94
230. is False you can set the layer number to another value How InkCAD draws boundaries A boundary is a filled polygon such as these ili To draw a boundary on a substrate InkCAD first draws a series of parallel hatch lines The boundary fills by ink diffusion as InkCAD draws the hatch lines The vertical lines show the route the pen might take for the polygon Border __ Vertex Step size Line width 4 18 2006 Page 139 NSCRIPTOR user manual To fill the polygon completely the ink from one hatch line must diffuse to reach the ink from its neighboring lines Pen travel anaes gt Diffusion If you wish you can set up a boundary to overfill where there is more than enough ink for neighboring hatch lines to touch You can also configure a boundary to leave space between hatch lines like this In general when InkCAD finishes drawing a hatch line it starts the next line from the closest endpoint So the pen or pen array moves like this as it draws hatch lines Page 140 4 18 2006 NSCRIPTOR user manual Boundary borders Boundary properties Note When it finishes drawing hatch lines InkCAD optionally draws an outside border around the shape depending on how the Border property is set One thing to keep in mind about this process is that DPN lines are usually rounded at the ends This can make boundary edges uneven this is an exaggerated example A border makes the edg
231. is Setpoint in the layer properties See page 126 for more information This is the default value used for lifting the tip while in feedback constant force mode The units are volts This field applies to constant force mode see above The layer specific field for this variable is Retract Setpoint in the layer properties See page 126 for more information This is the default value for a number multiplied by the error signal values to determine how much directional error correction to apply A gain set too low could cause unresponsive surface tracking while too high a value could lead to scanner oscillation This field applies to constant force mode see above The layer specific field for this variable is Integral Gain in the layer properties See page 126 for more information In constant height mode 1 e not in feedback this is the default value for the number of microns to lower the pen when you want to extend it The layer specific field for this variable is Z Piezo Extend in the layer properties See page 126 for more information In constant height mode 1 e not in feedback this is the default value for the number of microns to lift the pen when you want to retract it The layer specific field for this variable is Z Piezo Retract in the layer properties See page 127 for more information This is the default relative speed between the pen and substrate after it finishes drawing an element as the pen mo
232. is located in the center of the puck to make it easy to rotate which is important when aligning multi pen arrays to inkwells Loading the inkwell sample puck When working with the inkwell puck you can avoid damaging the pen s by approaching the sample and inkwell without passing over the sample clips This is the recommended orientation to load the puck in Sample clips Sample Pen approach direction Inkwell Initial inking vs re inking after drawing There are two common inking scenarios e Initial inking Before you can do any ink dipping you need to find the reservoirs put ink in them load the filled inkwell into the instrument and tell the system where the microwells are that you want to use Only after going through this process can you dip your pens Initial inking is described in The basic inking process and several sections that follow Page 248 4 18 2006 The basic inking process NSCRIPTOR user manual Re inking after drawing After you have gone through the initial inking process and performed some DPN writing on the sample you may optionally return the pen s to the microwell s and re coat them with ink This is useful with inks that are quickly exhausted or for patterns requiring relatively large amounts of ink You can only re ink if you have already performed the steps in the initial inking process For more information please see Re inking after drawing page 267 This flowchart
233. it can cause broken pen tips Blind Approach If you choose the Blind Approach dipping method above Distance this is the distance to lower the pen s for inking Reset to Default Click on this button to reset all values in this tab to their button factory settings Inking part 1 Positioning the pen s This section shows you how to get the pens in position over the inkwell the first major step in the inking process Leveling issues If you are working with a multi pen array you need to level the row of cantilevers with the surface plane of either the sample or the inkwell usually to the sample If you are concerned about having as little force deviation as possible across the multi pen array then level to the sample If you feel that the sample and inkwell substrates are quite parallel to each other then you may find it more convenient to level to the inkwell 4 18 2006 Page 255 NSCRIPTOR user manual Procedure This is the pen positioning procedure l If there is no sample puck currently loaded skip ahead to step 3 below If one is loaded start by lifting the pen s a distance away from it Go to the Instrument window s Video Motors tab on the right side of the window Set the z motor step size to 300 microns and click on the up arrow button as shown here 1 Set this value 2 Click here I UU umn See Chapter 6 for more information on these instrument controls Being careful not to lift the sampl
234. itch in 2 God Pitch in r 2 Reset to Default i Cancel There are several tabs in this dialog box In each tab there is a Reset to Default button that returns all option settings in the current tab to their original values The Options window contains default settings for some variables Layer specific settings appear in the layer properties The following sections describe the fields in each tab Field Description Litho Control This part of the window has a pick list in which you can choose the default operating mode e Constant Force this is the normal feedback mode where the system tries to keep the pen s downward force constant e Constant Height in this mode the pen is not under feedback control Instead it stays at a particular height above the sample For information on how to use this mode please see Using constant height lithography page 155 The layer specific field for this variable is Litho Mode in the layer 4 18 2006 Page 153 NSCRIPTOR user manual Page 154 Field Setpoint Retract Setpoint Integral Gain Z Piezo Extend Z Piezo Retract Positioning Speed Default Ink Model Park Coordinates X Y Disable Park Description properties See page 126 for more information This is the default force to apply to the pen s by feedback control in volts This field applies to constant force mode see above The layer specific field for this variable
235. ither case this is the procedure and the InkCAD processing it initiates l Begin by using the controls in the Video Motors tab to raise the pen to 50 100 microns above the substrate On the left side of the window click on the SPM Setup tab then the Frequency Sweep tab If you want to run a fully automated sweep the process starts when you click on the Full Auto button For a manual sweep begin by clicking Start Sweep InkCAD starts the process by picking a small initial value for the Drive Amplitude to prevent over driving the cantilever The system next performs a sweep by vibrating the pen at a range of frequencies between the Start Frequency and the End Frequency values Initially those fields specify a wide frequency range InkCAD records and graphs the oscillation amplitude for each tested frequency Frequency kHz 201 1072 Aw 0u B67 100 250 400 In an automatic sweep the software analyzes the readings to find the spike at the resonance frequency It resets the Start Frequency and the End Frequency values to specify a narrow range surrounding the spike frequency If you are performing a manual sweep set the Start Frequency and End Frequency so they specify a range below and above the spike 4 18 2006 Page 333 NSCRIPTOR user manual 6 If you re running a manual sweep click on the Start Sweep button InkCAD performs a narrow sweep of the specified frequencies and graphs the resulting readin
236. ition adhesion friction and viscoelasticity This makes phase imaging useful not just on the fragile or soft molecules commonly imaged in AC mode Instead you may want to use it even with non fragile inks that can tolerate contact mode scanning For example here are two channels from an AC mode scan of a surface feature One shows AC mode topographic data and the other is a phase image a amp 2 59 0 00pm 1 30pm 2 60pm AC mode topographical image AC mode phase image 6 00om 1 49pm These are images of an MHA line drawn on gold with substrate RMS roughness of 0 78nm In the topographic image it is hard to distinguish the line from the other surface features The phase image is much clearer as it is here gt 0 00pm 0 29pm 0 58pm 0 00pm 0 29pm 0 58pm AC mode topographical image AC mode phase image 4 18 2006 Page 175 NSCRIPTOR user manual Note If you want to use AC mode to generate phase images of your DPN patterns keep in mind that contact mode pens do not work in AC mode To create a phase image you will need to use the InkCAD InkFinder functions described in Performing an alignment on page 204 to save your pattern location then switch to an AC mode cantilever and return it to that location Image scanning procedure Note If the pen is not under feedback control when the scan begins the system will scan in constant height mode For more information on this see the section on using constant height lith
237. itmap Use this option if the bitmap s main subject or shape is clearly identifiable against a white background 4 18 2006 Page 229 NSCRIPTOR user manual Field Selected Color Scaling Overfill Factor Reset to Default button Page 230 Description Enable this item if you would like InkMap to export dots only for pixels of a particular color Click on the neighboring unlabeled button to specify this color You can choose from a palette of predefined colors or specify a color s RGB or HSL values See Bitmaps with three or more colors on page 231 for an example of how you can use this feature Note When you enable Selected Color InkMap makes an exact color match to convert pixels into dots It does not create dots for pixels in colors that are even slightly different from the selected color This is the ratio of the final dotmap height to the height of the original bitmap A value of 1 0 tells InkMap to treat each pixel as one micron in the dotmap If you set Scaling to 1 0 and the original bitmap is 90 pixels high the resulting dotmap will be 90 microns high If you set Scaling to 0 5 for this 90 pixel bitmap the dotmap would be 45 microns high This value expresses how much of a pixel s allocated space is filled by the drawn dot in the dotmap If each pixel in the bitmap is allocated the square space shown below here is how various overfill values affect the final result Smaller overfill factor Larger overfil
238. ive video screen and the controls in the Instrument window s Stage Control tab to move the pens to where you want to draw your pattern on the substrate Extend the feedback pen see Retracting and extending pens on page 304 for instructions and approach the surface with it Then draw your pattern You can draw it layer by layer or do all layers at once by selecting the entire document in the tree view and clicking on the co button InkCAD automatically retracts and extends active pens as needed 4 15 2006 Page 291 NSCRIPTOR user manual Manipulating the feedback pen during laser alignment Status window indicator Page 292 The red dot laser alignment described in Chapter 2 takes place in the Instrument window s Align Laser tab When an active pen array is selected in the Pen Settings window two buttons appear in the Align Laser tab Stage Control SPM Images SPM Setup Settings Align Laser Calibrate Frequency Sweep Max l F Fr l Retact Extend The buttons allow you to retract and extend the feedback pen without having to open the Pen Settings window This is the pen number of the currently designated feedback pen ma Max Active Feedback Per 1 a sYT etract Esten Click here to retract Click here to retract the feedback pen the feedback pen When drawing with active pens the DPN drawing status window has an indicator of what pen is currently extended and drawing oa oF f
239. k on D amp L Cell itself to select it then click on its button to see what it contains Line 10 4 Line 11 Jf Line 12 Jf Line 13 J Line 14 You can scroll down to see that the cell definition contains the correct number of dots and lines With D amp L Cell selected in the tree view look at the properties pane in the lower left corner of the window This pane shows the properties of whatever object is selected in the tree view In this case verify that the array has the correct number of columns and rows Flip Vertical False Magnification 1 Printable INHERITED Rotation g 4 18 2006 Page 69 NSCRIPTOR user manual Viewing the pattern Now you can look at the pattern in the main InkCAD window s drawing area To do this you need to open a view A view is a window that appears in the drawing area showing how elements or structures will look when drawn with DPN The view displays whatever element or structure is selected in the tree view With D amp L 3 selected the view will show a single cell To create the view click on the J in the tree view s toolbar This creates a new view toolbar See About the view toolbar on page 75 for information about this toolbar Next click on the view toolbar s zoom in button a few times BARGE e ie al ae TTT Ea sers fae oad e EH RE a i CERP a A I ECU ES foe ea Ee a Fea SHS fs ccs a Es Fe ES i ECEEF ELIA 4 Another way to zoom
240. k on these Length amp width Controls for step wise buttons to of view area stage movement see zoom in or out see below below an Curent Positiorr f a Sten Size Move Stage P _P kom tam 222 7 fon oF SS000 um Ff U 0 um J Co A J Current pen coordinates If Push ON button to enable Click here to move the Move Stage is ON you can manual stage movement or pen to various locations move the pen by entering new OFF to disable it see below coordinates here The Move Stage OFF button is a safety switch that helps prevent stage movement while the pen s are in contact with the sample You should set it to OFF before putting the pen s in feedback control If it is OFF the pen does not move to a different location when you click on the stage map and Current Position the eight arrow buttons and the Move To pick list are disabled You can use the pick list below the zooming buttons to select the size of the view area Use Fit to Screen to make the viewing area big enough to show the entire stage Note that you may need to use the scroll bars to see it all Click on the step wise arrow buttons above to move the stage a certain direction and distance Step Size is the distance the stage moves in that direction under the pen or pen array and Speed is how fast it moves while doing so note that the Speed units are millimeters per second The arrow directions indicate where the stage will move relative to the pen s For exa
241. k pens multi pen arrays writer pens and laser red dot alignment 29 how shown in multi pen preview 272 in active pen arrays 20 280 introduction to 270 length of pen 299 number of in a pen array 297 specifying in multi pen array definitions 299 rebooting the DPN stage 209 Recommended Image Size field 224 red dot alignment 29 red light in system tray icon 84 red line in Frequency Sweeps tab 334 Redip Distance field 254 Redip toolbar button 263 266 references See array references structure references regimes in inter atomic forces 329 Regular property setting 144 re inking See inkwells Relative Humidity in calibration parameters 94 Remove button in InkFinder tab 202 Repeat column in Dots amp Lines 215 Repeat field in InkCal 102 104 Repeat Model ink property 92 Repeat properties for boundaries 144 for lines 136 for paths 139 replicating objects in Lattice 219 repulsive inter atomic force 330 Requested stage tilt exceeds message 276 Requested zoom level message 172 Reserved menu in A application 237 reservoirs 246 259 See also inkwells Reset button in Instrument window 202 Reset Instrument menu option 209 4 18 2006 Reset to Default button in InkCal 99 resetting the DPN stage 209 Resolution Instrument window field 186 resonance frequencies of pens and AC mode 22 as shown during frequency sweeps 333 how they change over time 191 uniqueness for each cant
242. kCal does not successfully fit a curve a icon appears in this button Fit Curve amp If you see this icon on the button see Curve fitting troubleshooting page 27 for information on what to do If this icon does not appear you will see the ink diffusion curve for the data set from which InkCal has calculated the calibration coefficients Calibration Wizard OJ Data Help Dots Lines E Ir l EEA ink Ink 4 Inverse Speed s um Name Ink 4 Calibration Parar Description E Ink Model Linear E Dot 4 0 050 t Dot Diffusi 0 050 un s z E Line w 0 054 7 v Line Diffus 0 054 um s ba Repeat Mc Stacked EJ z ee ETE Target Layers v Layer 1 v Layer 2 0 22 5 21 10 19 lt Back Save amp Exit Cancel 3 The layer list in the window s lower right corner shows all the layers in the document By default the layers that use the current ink definition are checked Enable each layer you want to apply the coefficients to See Applying the results to multiple layers page 26 for important information on this 4 Important To save the calibration data and use it for DPN drawing close InkCal by clicking on the Save amp Exit button If you do not use this button to close InkCal you will lose the new calibration coefficients and the next DPN drawing you do will use the coefficients from the last saved ink calibration This is the end of the ink calibration process InkCal performs a curve fit aut
243. l The lattice definition area C The following fields define the lattice Field Description al X Y This is the specification for the al vector which is pre set by the software to be a horizontal line with a length of one micron For an explanation of this please see What Lattice does on page 219 a2 X Y The coordinates for the second vector which defines the lattice s pattern Angle Every time you change the a2 coordinates Lattice calculates the corresponding a value see What Lattice does for more information If you want to get a particular a value modify the a2 coordinates as needed Scaling If you want to change the overall spacing between all elements in the drawing area enter a scaling factor here For example a value of 2 doubles the space between elements Dwell Time This is how long in seconds you want the pen or pen array to dwell in one spot as ink diffuses to create a dot This determines the size of the dots See Chapter 4 for more information on diffusion and dot creation About the misc fields D These are the miscellaneous fields items in grey are calculated by the program Item Description Imaging X After you draw the pattern on the substrate you can scan the final Offset Y Offset result by entering the X Offset Y Offset and Image Size values Image Size in the Instrument window Number of Dots This is the number of elements along the x and y axes of the drawing area To
244. l factor Even larger overfill factor The lower the value the more ink free space there will be between dots Overlap between dots generally occurs when the overfill factor is greater than pi 4 approximately 0 785 Note The preview image shown in the dotmap pane is an approximation of how the drawn dotmap will appear The results depend on ink diffusion characteristics and the chemical relationship between the ink and the substrate You will probably need to experiment to find an appropriate overfill factor for your application You should also consider the trade off between the value of the overfill factor and the drawing time and amount of ink used Click on this button to reset all values in this tab to their factory settings 4 18 2006 Bitmaps with three or more colors Example NSCRIPTOR user manual This equation shows the relationship between the dot area A the dot radius r the scaling factor S and the overfill factor O A pir S O One common way to use InkMap is to convert a two color bitmap pixels in one of the colors become dots in a DPN pattern However you can use InkMap on bitmaps with three or more colors Suppose you created a bitmap with yellow orange and red pixels on a white background You can use InkMap to create a multi layer DPN pattern from this bitmap with each color assigned to a different layer Here s how you might do it 1 Create a new document open InkMap and
245. l overview followed by a more detailed description 4 18 2006 Page 331 NSCRIPTOR user manual Frequency sweep process overview Recommended parameter settings Page 332 This flow chart gives a high level picture of the frequency sweep process Initialize drive amplitude Do full range sweep to find the oscillation peak Sweep a narrow range of frequencies near the peak Calculate the best drive frequency amp setpoint Tune the amplitude First time Do another narrow through range sweep procedure Done save results for next AC mode scan Some of these steps repeat because Nanolnk has found that this process produces more reliable results 1f you run an extra narrow range sweep For a description of any of these steps see the detailed process description For the best frequency sweep results NanoInk recommends the following settings for fields in the Instrument window s SPM Controls tab Field name Recommended value Proportional Gain Integral Gain Derivative Gain Z Error Gain 4 18 2006 15 10 NSCRIPTOR user manual Detailed frequency sweep process description The following procedure shows the details of how InkCAD computes the AC mode parameters There are two ways to do this e Click on the Full Auto button to run an automatic sweep or e Run the process manually by clicking on the Start Sweep Auto Set and Tune buttons as described below In e
246. late With this command you can use the mouse to move a selected layer Rotate This command allows you to rotate an entire layer around a point The main use for this is in rotational alignment described in Chapter 6 Layer properties This section describes the layer properties which appear in the properties pane when you select a layer in the tree view These values are inherited from the InkCAD options see About the DPN options on page 152 for more information General properties Property Description Drawing Time This is InkCAD s estimated time to draw the elements in the selected layer Label This is the name of the layer InkKCAD provides a default layer name but you can click on this field to enter a name that describes each layer If you are doing a multi ink DPN operation for example you could identify the ink used for each layer LayerNumber This is the number of the selected layer InkCAD numbers layers from 1 to n the total number of layers Lithography settings Property Description Disable Park This specifies the ayer specific value for whether you want the pen s to move to the park coordinates when the system finishes drawing the layer The default setting for this variable is Disable Park in the InkCAD options See page 154 for more information Ink This is the ink to use for this layer In InkCAD an ink is defined as a set of properties including the calibration 4 18 2006 Page 125 NSCRIPTOR
247. ld be able to see the tip to tip alignment mark in one or more of the images Specify the location of the alignment mark by clicking once at the intersection of the two lines the mouse pointer changes to a sign B31 LFM rev zE Auto Range EE Ea Then click on the Next Pen or Done button depending on whether you re working with the alignment mark for the last pen in the Align Pens tab 4 18 2006 NSCRIPTOR user manual InkCAD calculates the alignment offsets for the pen and starts scanning the next mark if there is one If an alignment mark does not appear in the scans you can adjust the scan parameters and repeat the scan To scan a smaller area right drag over a region in one of the scan images then right click inside the box and edit the scan parameters as needed To scan a larger area go to the SPM Controls tab on the right side of the window Adjust the scan parameters as needed and click on the Scan button 4 If this is not the last writer pen to align return to step 2 above Otherwise the array alignment process is done About the Align Pens tab You use the Instrument window s Align Pens tab to perform a pen array alignment and estimate the size of the effective scan range MD OS Toolbar A 222 i I Indicates the IReset Notes 4 5 n current pen array J type Pen XOffset YOffset Feedback Notes 1 b 0 000 0 000 v JE I 45 000 0 000 a i l 85 000 0 000 E l Pen table
248. le gap when at bias Tunneling however requires a sample and a probe made of conductive materials Scanning probe methods are ubiquitous within the field of nanotechnology As one researcher said Anyone who wants to be involved with nanotechnology will have to have a scanning probe microscope No other tool effectively characterizes nano scale dimensions with the same accuracy and precision We can go one step further and say that with DPN methods scanning probes not only characterize nano scale structures they actually make them With NSCRIPTOR scanning probe technology originally designed for mapping surface features now makes nano scale patterns The entire NSCRIPTOR user experience is different from an AFM user s experience With an AFM the user loads a sample then scans the surface and maybe measures the 3 D data that makes up the picture With NSCRIPTOR the user is on a completely different journey with the following key steps e Nano scale pattern design e Environmental and scanning probe preparation e Inking and re inking optional 4 18 2006 NSCRIPTOR user manual About AFMs e Ink calibration e Drawing plotting e Microscale and nanoscale alignment e Inspection of the DPN patterns Error Not a valid filename You can tune the response time of the scanner device with gain settings to immediately negate cantilever deflection in the z direction This is an important process that prevents the pen
249. le graph so that its left and right boundaries are the endpoints of the line segment 4 18 2006 Page 239 NSCRIPTOR user manual Page 240 Mode Description Invert Z Data This mode flips the graphed profiles vertically Line roughness If you enable Line Roughness the line profile window displays amplitude statistics below the graph RRR a hn Gare raat Z range 2 37 um W Line Roughness 19 um 0 um 12 79 um 25 56 UM Roughness Average Ra 0 094 all Surface Kurtosis Riku 3 754 I Root Mean Square Rr E Trum Peak Peak Ry 0 852 Um i l Surface Skewness Rak 0 888 Ten Point Height Rz 0 307 ol l EEEE i Using markers You can click in the line profile to set up to four markers 0 um 40 42 um 0 54 um A separate area of the window shows the marker locations the line profile readings at these points and the difference in readings between each marker Markers Diff 2 4 Marker 1 Marker 2 d 4 03 30 h 2 949 37 287 sl Z i oe 0 526 h Sra am z 0 1 01 h aioe i 2 sll 4 18 2006 NSCRIPTOR user manual Histogram of Z heights If you click on the button IA displays a new window with a histogram of the z heights in all scan lines in the selected data file Range of Z heights Number of occurrences in data file gt of each height Histogram 1 etaoare 6 oer tad caw 2 POS fwd iy vr Z range shows which Z height is represented by each color Auto Cancel To zoom
250. le puck toward you and then lift it up out of the groove that holds it on the stage Use a pair of tweezers to remove the sample Replacing the sample Use tweezers to mount the new sample on the center of the puck The center has a magnet to hold the sample in place if it is metallic For non metallic samples NanoInk recommends attaching the sample to a small metal plate using double sided tape Then you can place the plate over the center of the puck Replace the puck on the stage by setting it down so the bottom peg fits into the groove Then slide the puck into position Groove Important note If you are inserting an inkwell puck make sure the puck s sample clips are on the left side facing away from the pen s 4 18 2006 Page 33 NSCRIPTOR user manual 7 If your system has the bias control feature and you want to use bias with this sample insert the puck bias cable in the pin hole like this Replacing pens The pen replacement procedure uses the DPN stage s rotating scanner head which turns toward you to expose the pen s Notes The following procedure applies to passive and active pens or pen arrays If you are using active pens there is important information in About the active pen flex cable page 40 If you are inserting passive pen s and want to use the optional bias control feature with the new pen s be sure to select an electrically conductive pen or pen array For safety InkCAD set
251. le s Pen column the following dialog box appears Select the first pen to ink and click on OK Active Pens Primary Inking Pen i If you click in the Extra Pens column this window opens Select Additional Pens to Ink Click on the button for each additional active pen you want to ink You do not need to click on the button for the first pen the one shown in the table s Pen column Some of the buttons on the inking toolbar are only enabled when their functions are allowed For example if you have not yet done a dip you can t re dip so that button is disabled at first These are the buttons on the inking toolbar e New Click on this button to create a new microwell mark e Notes Add notes for the selected microwell mark For more information on this see the section on adding notes in Chapter 6 e Remove This button deletes the selected microwell mark from the table e Move Click on this button to move the active microwell mark to another location Then you simply click on the mark s new location e Dip Click here to dip the pen s into the microwell s This button is disabled if you have not yet marked the locations of the pen array and the microwell s e Redip After a dip is complete clicking on this button tells InkCAD to perform another dip into the selected microwell s See Inking option settings and the dipping process on page 253 for more information on re dipping This button is
252. lection mi i This table describes the printer icon and another status indicator that appears during drawing Indicator Meaning Ear This means that InkCAD is preparing the lithography T job for drawing par This icon appears while the lithography job is in Page 84 4 18 2006 NSCRIPTOR user manual Indicator Meaning progress SS When this appears in the InkCAD window s lower left Lithography Completed corner it means that drawing has successfully finished 4 18 2006 Page 85 NSCRIPTOR user manual Page 86 4 18 2006 NSCRIPTOR user manual How InkCAD draws dots and lines Chapter 4 Inks and ink calibration The characteristics of an ink and in particular its diffusion properties are a critical factor to the success of DPN patterning This chapter describes the concept of an InkCAD ink and shows you how to use the InkCal module for ink calibration This is the process of empirically establishing the relationship between dot diameter and dwell time or between line width and pen speed for a given ink and set of experimental conditions Ink calibration makes it possible for InkCAD to draw patterns as you design them These are the major topics in this chapter e How InkCAD draws dots and lines e About ink diffusion page 88 e Ink definitions page 89 and Ink definitions and layers page 90 e Ink properties page 92 e Calibration parameters page 94 e About the ink models page 95 e
253. level then decrease the voltage back to zero the withdrawal during the decrease does not follow the same path as the extension during the increase Extension Increasing Ane Decreasing voltage voltage Voltage There are two ways to correct for this non ideal behavior One way is through software correction called open loop scanning which is usually adequate for basic imaging tasks but not for nanolithography The better way 1s to use closed loop correction in which a piezo scanner fitted with a secondary positional monitoring system that has its own feedback loop For DPN applications a closed loop scanner must perform not only with a high degree of linearity but it also must hold up to fast scan speeds while imaging DPN patterns with an inky pen The components described so far form the core of the DPN tool The rest of the components are critical parts that improve the performance of the DPN process For instance AFMs did not become commercially affordable until PC technology matured DSP based controller architecture also made it easier to design control units that would readily attach to PCs Integrated optics provide the critical ability to monitor the position of the pen s relative to the sample surface The x y staging capability works with the optics to allow the user to position the sample area of interest beneath the pen s Page 18 4 18 2006 NSCRIPTOR user manual DPN pens Active pens Scanning prob
254. light on the photodetector You will do this in the Align Laser tab of the Instrument window From InkCAD you can go directly to this tab by going to the Instrument pull down menu and choosing Laser Alignment This is the tab for contact mode scanning selected in the Settings tab of the Instrument window see Chapter 6 OW _instrument___ File Tools View Help Mar Representation of i the photodetector l Overall I intensity of Rectangle shows l laser light best dot region I on the for contact mode I sensor scanning K Min is the minimum intensit Red dot shows minl for im a location of peak to work laser intensity on the sensor This is the ideal aser contact mode position Turn laser on or off here 3 1 l Eror Signal T B 1 00 l Laser Sum 100v Iaea nR a G is ao e E Sensor signal readings described later The ideal position shown above is optimized for tracking force and LFM contrast 4 18 2006 Page 29 NSCRIPTOR user manual If an Active Feedback Pen box appears in the tab see Active pens and laser alignment on page 31 AC mode and laser alignment If AC mode is the current scanning mode the tab looks like this FM instrument O O File Tools wiew Help Stage Control SPM Images SPM Setup Ideal AC mode position Min Error Signal T B 1 00 Laser Sum 1 00 Y Lateral Signal L R 1 00 This tab is essentially disabled during AC mode appr
255. lignment mark An alignment mark that appears in InkFinder video images to assist in coarse alignment See also fine alignment mark contact mode A method of scanning and DPN drawing where the pen maintains steady contact with the substrate surface Contrast with AC mode controller Another term for lithography controller D DAC An acronym for digital to analog converter DACs convert the instrument controller s numeric voltages into actual analog voltages used by instrument electronics deflection The bending of the cantilever as it scans along a substrate The instrument uses deflection to position the cantilever and measure sample topography Designer Another term for Structure Designer diffusion coefficient See calibration coefficient Dip Pen Nanolithography NanoInk s patent pending process for depositing ink as a nano scale pattern on a substrate using a coated pen tip dipping The act of lowering the pen s into an ink microwell disengage See withdraw 4 15 2006 Page 309 NSCRIPTOR user manual Page 310 document In the InkCAD software this is the data defining a complete DPN pattern InkCAD stores each document as a separate disk file A document contains one or more layers dot A round filled InkCAD element created by leaving an inked pen stationary for a certain amount of time called the dwell time The size of a dot depends on the dwell time and the ink s diffusion properties d
256. lip 42 introduction to 13 length of in multi pen arrays 271 moving relative to stage 170 moving with Instrument window pick list 172 multiple pen operation See multi pen arrays numbering of in multi pen arrays 297 orientation of 251 oscillation of See AC mode parking over sample after DPN 324 pen height indicator 197 Pen Settings window 297 position of tip on 265 position of in Instrument window 169 positioning over inkwells 255 pre inked pens shipped with system 27 preventing damage to 172 putting into feedback control 42 reading pens See reading pens re dipping in ink 253 removing from pen clip 42 replacing 34 resonance frequencies of See resonance frequencies returning to sample after inking 253 settings for 297 suggestions for handling 323 thermoelectric element in 20 tips position of 265 continued Page 353 NSCRIPTOR user manual pens cont types of 297 using multiple pens 15 pens cont using out of the box 323 width of at apex 88 95 withdrawing See withdrawing the pen Pens tab of Pen Settings window 299 Phase field in Instrument window 186 phase imaging 22 175 See also AC mode Phasers Full spread 92 phases of alignment process 203 206 photodetectors 17 29 189 PID process control 186 piezoelectric scanner See scanner piranha solution 323 324 Pitch tab of Pen Settings window 299 pitch in multi pen arrays 271 298 299 pitch of main window grid
257. ll of the other Follow this procedure l In the bottom half of the InkCal window select the first entry in the element table If your test pattern contains both dots and lines look under Measurement Tool to see which element type is initially selected and pick the first element of that type What you see in the bottom half of the window depends on which calibration method you chose in InkCal part 1 Pattern of Dots Pattern of Lines Dwell Time Ares o Speed Width ee 0 Py D 0 2 0 E o 0 Pattern of Dots and Lines Measurement Tool C Dot Line Clear rl oyi x2 Y2 Speed Repeat width Enab fo a ec 1 15 25 15 45 iv tt 3 0 2 0 0 1 v Next measure the size of the selected element If you drew one of InkCal s standard patterns without changing dot or line settings in InkCal part 1 see Default element selection order page 20 to determine where that element is in the scanned pattern Zoom in or out as needed to make accurate measurements see Sizing tips and tricks on page 20 for more information on this To measure a dot With the mouse pointer near the center of the dot click once to begin creating the dot outline Move the pointer and click again when the outline is the same size as the dot It should look something like this To move the outline click on the crosshair then move the outline and click once m
258. lowing commands in its File pull down menu e New Open or Save Image Database these three commands work with InkCAD image databases See Image databases page 167 for more information Caution Images created since the last time you clicked on a Capture button either in the Video Motors or SPM Controls tabs are not saved to the database To be sure that all images and alignment data gets saved click on a Capture button first e Export Video Image this command exports the video image currently displayed in the Stage Control tab to a bitmapped graphic file Gn BMP format To export a video image use this command after selecting an image from the Alignment Map list in the Instrument window s SPM Images tab e Export SPM Image exports the current Default scan to a file in a variety of file formats including HDF which allows you to import the scan data into third party AFM software applications See SPM imaging page 173 for information on how to mark a scan image as the default Be sure an image is marked as the default before using this command e Export All SPM Images the previous command exports a single image the one marked as the default This command exports all data channels for the currently selected image It exports them to different files and adds file name suffixes to help you tell them apart For example the suffix _err_fwd indicates that it is the error signal in the forward direction with AC mode imagi
259. lution Kernel Browse l l C Assign mean value to excluded area l e XC lu de d SSS a ee l Nonlinear filters roan areas Medien Fiter h gpm l C Max Filter E l Create a C Min Filter l square l i Doe lt lt Po Co Fo oo es os os es ee a Undo Cancel new im ag e f l la with these Apply chosen filter settings settings amp display in right pane To include or exclude specific areas for filtering pick a shape for the selection area Area marker Then use the mouse to drag over one or more regions in the original graphic Click on the EI button to see the selected scan as a three dimensional image 3D View 2 C scans 6 8 err fwd sur 2 POS fwd a Material Color Gradient Palette C Gray Diffuse a C None Scale x cm V aspect ratio J m Light Rotate Iv Light On Intensity A l d 0 00 0 84 um Close 4 18 2006 Page 243 NSCRIPTOR user manual These are the groups of fields in this window Group Description Material Color Choose a display color scheme and intensity You can display the Gradient image in the palette colors a gray scale or no color gradient Scale If aspect ratio is enabled changing one of the scaling factors scales the image proportionally If aspect ratio is disabled you can scale the x y and z axes individually with the sliders Light This group has parameters for a light source above the image Click on Rotate to have
260. ly as a series of boundaries or paths t does not save the Page 224 4 18 2006 NSCRIPTOR user manual actual text unless you save it to a disk file yourself You can do this by going to NanoWord s File menu and selecting Save Text This dialog box appears Export Text File OG Save in InkCAD e ec Ea gt O AlignmentMaps EG Docs My Recent Dumps Documents G Desktop My Documents oC My Computer i My Network File name Nanowordi aa Places Save as type Text Files txt hd Cancel To use text from a file go to the File menu choose Load Text and select a text file Exiting and exporting There are two ways to exit from NanoWord e If you do not want to export the pattern to InkCAD simply go to NanoWord s File menu and select Close e If you do want to export the boundaries or paths go to the File menu and select Export and Close You can create a new InkCAD document New Document export the NanoWord pattern to a new layer in the existing document New Layer or export the pattern to an existing layer of your choice in the current document Select Layer If you export the pattern to InkCAD it appears in the tree view as a group of boundaries or paths contained in a structure and a structure reference There is at least one boundary or path for each character errr PrP er rr Peretti End Nanow ords Ret 1 1 Struct Aef a Boundary 1 aP Boundary 2 df Boundary 3 aP Boundary 4
261. manual About the ink models NanoInk has observed a wide variety of ink behaviors from inks that do not diffuse at all to inks that spread across a surface freely and easily InkCAD s set of ink models help you model ink behavior accurately Each ink model has two components an equation and set of calibration coefficients for dots and another one for lines The Ink Model field in the ink properties stores the calibration equations and coefficients You can set the ink model from the ink properties then by clicking on Ink Model and on the Lz button to the right Ink Model Linear Linear Integra 2nd order polynomial Park Q Linear with offset Positio Mon diffusive This version of InkCAD offers the following ink model types Model Description Linear In this model dot area and line width are assumed proportional to the dwell time and inverse pen speed The plot of the dot area as a function of the dwell time or line width as a function of the inverse speed is linear and goes through the origin Dot size or line width Dwell time or inverse pen speed For both dots and lines the calibration coefficient in this model is the slope of the curve 2nd order This model assumes a non linear relationship between the time polynomial factor dwell time or inverse tip speed and feature size dot size or line width You can connect the data points with a curve Dot size or line width Dwell time or inverse
262. marks in the Stage Control tab each indicating the exact position of a microwell When you create a new microwell mark InkCAD adds a record for it to the table Once there are microwell marks in the table a symbol on the left side of the table indicates the active or selected alignment mark the one that the toolbar buttons will act on These are the columns in the table each of which describes a microwell to dip in Column Description Microwell This number identifies the microwell you re marking Time This is the desired ink dipping time in seconds Pen The number of the pen you want to dip in the microwell If you want to dip multiple active pens enter the number for the first one here and specify the others in Extra Pens For more information on this please see Specifying pens and extra pens X Y The microwell s marked x and y coordinates Extra Pens If you want to dip multiple active pens at once this column lists the additional active pens you want to dip You should already have entered the number of the first one in Pens above For more information please see Specifying pens and extra pens Note This column does not apply to passive pen arrays 4 18 2006 Specifying pens and extra pens About the toolbar NSCRIPTOR user manual Column Description Notes Add notes for the selected microwell mark For more information on this see the section on adding notes in Chapter 6 If you click in the tab
263. matically opens the SPM Controls tab on the right side of the Instrument window a a Opening by dragging in the main window As described in the Chapter 3 section on drag zooming and scanning you can initiate a scan from a viewer in the main InkCAD window by right dragging over a region and selecting Scan from the resulting menu like this oom pacan InkCAD opens the Instrument window and passes the scan settings to it Here they are in the Instrument window Scan Size um 4 531 a offset um 0 021 Y offset um 0 610 See About the scanning parameters C page 186 for information on these settings Page 174 4 18 2006 NSCRIPTOR user manual About the next sections Phase imaging Phase imaging page 175 describes the phase imaging channel available when scanning in AC mode Image scanning procedure page 176 details the scanning process Using the scanning controls page 179 describes the images windows and controls you use when you perform a scan Phase imaging 1s an AC mode scan channel that shows the phase lag between the AC input signal which drives the cantilever and the photodetector output signal a function of cantilever resonance It is a powerful extension of AC mode that provides nanometer scale surface structure data often not revealed by other scanning techniques By mapping the phase shift of cantilever oscillations while scanning phase imaging detects variations in compos
264. mation on the DPN server The server displays this DPN drawing status box Status and remaining Name of alignment Click here for time for current DPN currently in use see immediate stop see operation below below DPN Lithography Status G alae Default emery sp Pen NANOIN P Click here to open Active pen number If Feedback status the DPN log view you re using active pens see below Job is in progress Estimated Time left 0 03 05 Alignment shows which coarse fine pattern alignment operation is active See Chapter 6 for more information on alignment Default indicates that no alignment operation is in progress If you are drawing with active pens the Pen item indicates which pen is currently extended and drawing If two or more pens are extended and drawing together the window lists just the primary pen See Chapter 9 for information on active pens Clicking on the Emergency Stop button immediately halts any operation in progress For an orderly stoppage where the pen optionally lifts off the surface and moves to the parking coordinates use one of these methods e If you are using the InkCal module go to InkCAD s Instrument menu and select Stop Lithography e If you are in the main InkCAD window simply click on the button or go to the Instrument menu and select Stop Lithography About the feedback status Next to the window s Emergency Stop button is a graphic indicator of
265. mber controller TO CHAMBER nitrogen hose connector on E chamber controller TO NEBULIZER nitrogen hose connector on E chamber controller INERT GAS HOOK UP nitrogen hose connector on E chamber controller USB on E chamber controller TEC POWER on E chamber controller 4 15 2006 To Ethernet port on master computer Chassis ground connector on lithography controller Video port 1 on master computer Video port 2 on master computer Main power strip Main power strip Main power strip E chamber housing see the picture in E chamber sensors later in this section E chamber housing see the picture in E chamber sensors Hose connector on E chamber housing just above the nebulizer bottle see the picture in Nebulizer later in this section Hose connector on E chamber housing s nebulizer bottle see the picture in Nebulizer on page 48 Nitrogen tank T connector USB connector on master computer E chamber s TEC thermoelectric cooling unit as follows e Red wire to F e Black wire to F e Green wire to 24 volts e White wire to 24 volts NSCRIPTOR user manual Cable From To number 22 MAIN POWER on E chamber Main power strip controller Misc 23 Air compressor or nitrogen tank 14 hose connector on back of air table 24 DAC in on the front of the bias M4 socket on microscope access control switch box for optional board inside instrument most users bias control featu
266. measurement order click on InkCal s Back button to return to the measurement screen Then check the measured sizes to make sure they are in the right order and assigned to the correct dots and or lines Default element selection order on page 105 shows InkCal s drawing order for the default test patterns of dots lines and dots and lines If you select one of the dots or lines in the tables InkCal highlights it in the O O preview To fit a curve to your measurements InkCal needs at least two or three data points depending on the ink model This message tells you that there weren t enough non zero data points InkCal excludes data points equal to zero from the curve fitting process If you want to manually set the initial calibration coefficients move the mouse pointer to the ink properties box in the upper right corner of the InkCal window Page 116 4 18 2006 NSCRIPTOR user manual From there you can click on the LI buttons to expand the ink properties until they are all visible El E Ink Ink 4 Name Ink 4 Calibration Parameters Description E Ink Model Linear El Dot 4 0 050 t Dot Diffusion Coe 0 050 ur s E Line w 0 054 fy Line Diffusion Co 0 054 um s RepeatModel Stacked Edit a coefficient by clicking on it and using the keyboard to enter a new value Remember that InkCAD keeps separate calibration coefficients for dots and lines Pick a value that you think will be close to the slope of a c
267. modules or in 3 party design tool When ready to draw Load pen s and prepare instrument optional Ink pen s Run InkCal to calculate calibration coefficients Draw design from Make an image of the InkCAD DPN pattern In addition to designing a pattern in InkCAD as described later in this chapter you can set up a pattern in a third party CAD tool see Chapter 5 for more information on this or you can create one in the Dots amp Lines Lattice NanoWord or InkMap modules described in Chapter 7 You can draw with NanoInk s pre inked pen products or use the NSCRIPTOR inkwell feature to dip pen tips in ink see Chapter 8 for more information Before drawing you need to use the InkCal module to calibrate inks See Chapter 4 for more on this Page 60 4 18 2006 NSCRIPTOR user manual Introduction to InkCAD Inkl 40 In InkCAD you can e Design patterns containing dots lines and other drawing elements and or import files from third party computer aided design CAD programs e Manipulate the objects in your patterns e Draw patterns to a substrate e Perform coarse and fine pattern alignment e Set up and execute multi ink drawing with layered DPN techniques e Image your nano scale patterns About the InkCAD This is the main InkCAD window as it first appears NanoInk InkCAD Structure Designer 2 Eile Edit View Insert Elements Instrument Tools Window Help Lo x
268. mowe Goto FitScreen OUpen Export Delete selected Zoom Stage Control Export selected image image from list display in on image to disk file several below location see below formats are available The Goto Fit Screen Open and Export functions are also available from a menu if you right click on a video or SPM image See Adding notes page 204 for more information on the notes feature You can use the Fit Screen button to zoom in on the location of an image in the Stage Control tab To do this simply select an image from the list and click on Fit Screen The stage view zooms in tightly on the selected image The action of this Goto button varies e Ifthe pen is currently under feedback control no movement is allowed e Ifan SPM image is selected above in the Video and SPM Images list the system moves the stage if necessary and InkCAD prepares for a scan operation by resetting its offset scan size and rotation variables However it does not begin a scan or use the scanner to move the pen relative to the stage e Ifavideo image is selected above the system moves the stage to return the pen to its previously marked position relative to the scanner The table below this toolbar describes each video or SPM image Image Type Created Notes Column Description Image This is a unique image ID number created by InkCAD Type The type of image Video for video images or SPM SPM scans Created The date and time when InkCAD
269. mple clicking on the button moves the pen s up and to the right relative to the stage If one button is dimmed you have reached the stage s limit in that direction InkCAD keeps a list of the Step Size and Speed values used since you opened the Instrument window making it easy to re use them For information on the Video Images Enabled field please see Displaying video images on the stage map on page 172 The Move To pick list lets you quickly move the pen to certain pre determined locations See About the Move To list page 172 for more information Page 170 4 18 2006 NSCRIPTOR user manual Zooming in the Stage Control tab In addition to clicking on the J and L buttons you can also zoom in by right clicking and dragging an area in the window When you release the mouse button InkCAD zooms in on the selected region So when the Stage Control tab displays a still video image you can zoom in on it by right dragging over the image 4458 908 4594 54 3611 207 af wn nn nn nn nn nn nn nn nn nn Pon nn nn nn nn nn nn nn nn yp nn nn nn nnn nn nn nn nn nn ne ne eee hn nn Me nn nn rn nn nn nnn nnn nnn oo town nnn nnn nnn nnn nnn nnn nnn nnn enn nnn a nnn e e e 3763 793 mi Ea This is how it looks when zoomed in 435 485 396 533 331 094 346 674 4 18 2006 Page 171 NSCRIPTOR user manual Error when moving while in feedback If you have the pen under feedback control when you try to move the pe
270. n appear here drawing time Page 98 4 18 2006 NSCRIPTOR user manual Dot specifications eae ee specifications Notes Using the DPN options Procedure The Dots pattern and the Lines pattern are subsets of the combined Dots and Lines calibration pattern Here is how the InkCal window looks for these other types Dots pattern Lines pattern PE Caihration wizard se Calibration Wizari Wee jo Help Wki Help Lape b5 Cakir Lapai bo aaa H l fi Ciritlaie Pink Fialac Diii Pit Faler E irk br 3 E i Ink 3 Irbegial b a 5 kiitis l Gea 4 Litas Mince Contatta Liher Misie Conahontl on Pak Coordinate A a Pat Coodn ss A0 40 Pen Avery a Speed M0 Praitinrang Spas AD Fanart Gagad To Fire Septet TO Tapiri Gejai fi cPemEded 10 z Feedid 10 2 Petr Aais E E Fechais D fa rel ir Apuh Benda FHI ii Approach Pande Halte Lit Perini ter Li Fade HER ETI Lift Pamir afer Li Faire i l Laera Keon O pis E rat D Doti pid Lira femudea Line Dee Y et Spacy Mncierent 3 Dev Tne Legh Repeal prore berereerd i Speed a G LE eee E Ding Tana HAT Durara Tinea 111 The spacing between the dots and or lines is the result of the Spacing field in the middle of the window You can edit the dot and or line properties to change the test pattern as needed The Reset to Default button returns the dot and line settings to their initial values This button
271. n DPN options 154 layer property for 126 inter atomic forces 329 Invert Z Data field in IA application 240 J JET nebulizer setting 48 JPEG files 226 K keyboard shortcuts 161 knobs on instrument 31 L L label in boundary properties 143 lab coats and corrosive chemicals 323 4 15 2006 Page 349 NSCRIPTOR user manual labels on cables 45 Laser Sum field 30 laser 1n instrument aligning for DPN 29 and measuring LFM torsion 21 and multi pen arrays 270 as an SPM component 17 turning off 29 194 Last Selection field 62 lateral force microscopy LFM introduction to 21 making scans 173 scanning from InkCal 101 why it s good for DPN 21 lateral ink diffusion with lines 88 Lateral Signal field 30 Lattice module how to use 219 showing x y axes in 158 what it does 219 lattices of cells in Dots amp Lines 216 Layer Settings property setting 143 144 Layer to Calibrate field in InkCal 100 Layers structure reference property 148 Layers menu in main InkCAD window 125 layers in InkCAD See also documents structures and dotmaps exported from InkMap 226 228 and ink definitions 90 applying calibration coefficients to 111 113 applying options settings to 155 bias settings for 56 boundary properties for 141 changing layer properties in InkCal 112 colors for 132 creating 74 125 drawing all layers at once 129 exporting to a new existing layer See exit options ink properties of
272. n Enable Then select either Dot or Line The dot and line measurement mechanism is the same as the one in InkCal described in Chapter 4 To measure a dot With the mouse pointer near the center of the next dot click once to begin creating the dot outline Move the pointer and click again when the outline is the same size as the dot It should look something like this After creating a dot outline there are two ways to manipulate it To move the outline click To re size the on the outline click on crosshair any part of its Move the edge Move the outline and pointer to re size click once the outline and more to lock click once more it in place to set its size 4 18 2006 Page 183 NSCRIPTOR user manual Page 154 To measure a line Click once in the scan image to get a blue vertical line Move it to the left edge of the drawn line and click once Then move the pointer to the line s right edge and click again If you want to move either blue line drag it from where it intersects with the red line then click once to re set it It should look like this The dot size or line thickness appears in the bottom part of the window f Line Width 0 342 um This is the panel window s Line Scan tab LFM Position ur 2 Y Max O amp a S Y Mid 30y pubis Y Min x Min x Mid x Max Raw Line Data v The graph shows the data readings during each horizontal scan While a scan operatio
273. n degrees counterclockwise from the horizontal axis applied in rotational alignment See Alignment theory on page 204 for more information Coarse X and The coarse coordinates of the alignment mark relative to the Coarse Y stage origin Coarse H The rotation angle measured in degrees counterclockwise from the horizontal axis applied in rotational alignment Notes Your comments and notes about the alignment appear in this column See Adding notes page 204 for more information 4 18 2006 Page 203 NSCRIPTOR user manual Adding notes Performing an alignment Alignment theory Page 204 The InkFinder and Inking tabs have a notes feature to help you remember what each table entry is You can save notes for video SPM images alignment marks or alignment operations in the Images tab and also for microwell marks in the Inking tab When you click on a Notes button InkCAD displays a dialog box like this one where you can add or edit notes for the selected table entry E Item Notes J Accept Cancel Date amp time when item was first captured or Before coarse alignment created ID 100 Type in your comments and notes in this dialog box Click on the Accept button to save them They appear in the Notes column of the relevant table you may have to scroll horizontally to see them Image Type Created Hotes Ie fe 100 Video 2004 0842710 3 Before coarse align This section shows you how to save the c
274. n is in progress the Instrument window re plots the graph with values from each line scan The pick list in the lower right corner lets you choose the type of data to appear in the graph These are the possible values e Raw Line Data The graph displays the numerical readings without any of the adjustments described in the remaining three options e Fast Axis Alignment InkCAD levels the graph along the fast scan horizontal axis e Slow Axis Alignment InkCAD levels the graph along the slow scan vertical axis e Both Axes Alignment the system levels the graph along both axes 4 18 2006 NSCRIPTOR user manual Zooming in on the scans As you make scan images you might notice a region of the scan that you d like to see in more detail Follow this procedure to re image a portion of a displayed scan 1 On any of the images right click and drag over the area you want to see closer 6250 0 Topography 2 If you wish left click inside this new selection box and drag it to pan move the box This changes the region for the re scan 3 When you have selected the re scan area right click once inside the selection box This window appears with the settings for the new scan Pan amp oom New parameters for image scar Press OF to confirm Offset 1 371 um Offset 0 9476 urn Scan Size 1 0081 ura mea 4 Click OK to accept the new scan parameters They then app
275. n s After Lithography setting affects what happens after drawing The layer specific field for this variable is Withdraw Pen s After Lithography in the layer properties See page 128 for more information Withdraw This is the distance upward that the instrument should move the Distance pen s when withdrawing The layer specific field for this variable is Withdraw Distance in the layer properties See page 128 for more information Withdraw The speed for raising the pen s when withdrawing in microns Speed per second Lift Pen s Lifting 1s using the scanner to raise the pen s a slight distance Between keeping them in feedback This item is the default value for Elements whether to have the scanner lift the pen s between elements in a pattern Lifting reduces the amount of ink lost between elements Note When drawing boundaries this item does not affect whether the pen or pen array lifts between hatch lines There is a field for this in the boundary properties The layer specific field for this variable is Lift Pen s Between Elements in the layer properties See page 127 for more Page 156 4 18 2006 NSCRIPTOR user manual Field Description information Lift Pen s This field is the default value for whether the instrument should After lift the pen s after drawing a complete pattern Lithography Multi layer drawing If you want to draw multiple layers in one operation only the last layer s Lift Pen s
276. n speed For both dots and lines the calibration coefficient calculated is the y intercept of the curve In this model InkCAD displays dot size as a dwell time and line thickness as a speed Jf you use this model you should enter experimentally appropriate values in the Default Dwell Time and Default Lithography Speed fields visible when you expand the Dot and Line sections of the ink properties if you have selected the Non diffusive model These values will be used during lithography Important notes about ink models There are a few things to keep in mind about these ink models e The calibration coefficients used for dots are independent of the line coefficients However if you do not want to calibrate both dots and lines and feel reasonably comfortable that the coefficients would be equal you can copy the values of corresponding coefficients from one section to the other To do this use InkCal to calculate the coefficients for either dots or lines then manually enter their values for the other element type e NanoInk recommends that you use the Linear model as the default ink model the ink model used when creating a new ink definition The Page 96 4 18 2006 NSCRIPTOR user manual Switching ink models Note InkCal process overview default ink model is in the InkCAD options see Chapter 5 for more information e In the 2nd order polynomial and Linear with offset models it is not possible to draw
277. n this tab to their factory Default button settings Apply to Click on this button to apply your changes in InkCAD without button exiting from the DPN options See About the Apply to button for more information Some of the tabs in the Options window have an Apply to button that lets you apply your changes in InkCAD without leaving the Options window The Apply to button is available in the Lithography Z Control and Bias Control tabs When you click on Apply to you need to pick one or more layers to apply them to For more information on layers see Chapter 5 InkCAD displays this dialog box Target Layers i Click here os i to select This lists all IO Layer 2 all layers layers in the 4 0 Layer 3 Al pattern l l M d cir here l to de l select all layers OK Click here to apply the Click here to close the changes to the dialog box without selected layers applying changes In normal lithography the pen is in feedback and the system moves it up and down in response to changes in applied force There is also a Constant Height mode available in the lithography options In this mode the pen is not in feedback and it remains at a user controlled height above the substrate during a scan 4 15 2006 Page 155 NSCRIPTOR user manual You can select constant height lithography by going to the Tools pull down menu choosing Options and going to the Lithography tab When you make a scan image of the substrate
278. n with the arrow buttons or the Move To list this message appears D You can withdraw the pen s with the Withdraw button on the Video Motors tab This tab is on the window s right side See Using the video and misc motor controls page 195 for more information Displaying video images on the stage map The Video Images Enabled field lets you choose whether still video images should appear on the stage map in the Stage Control tab Generally speaking you should enable this item except under any of these conditions e You have several video images displayed on the stage map e You are about to zoom in tightly on an SPM image or e This message appears when you zoom in or out ee information _ ne A Requested zoom level exceeds the system s limit If you see this message disable Video Images Enabled and try zooming again About the Move To list The Stage Control tab s Move To pick list lets you move the pen to certain useful locations in a few mouse clicks If Move Stage is ON these choices are available the list is disabled if Move Stage is OFF Setting Description Sample Loading Use this option when you want to remove the sample holder puck say to load a sample or an inkwell This protects the pen s from accidental damage by moving them beyond the edge of the puck Move Above This option positions the pen s over the center of the sample Sample substrate Page 172 4 18 2006 NSCRIPTOR user manual
279. nd Drive Freq items in the Frequency Sweep tab But a frequency sweep also changes the Surface Value and Surface Deviation fields in the Settings tab 4 15 2006 icons in Dots amp Lines 217 in InkCal 111 114 in Instrument window 178 from ink database in ink properties 90 L in boundary properties 143 n button in main InkCAD window See NanoWord new ink in ink properties 90 button 121 buttons in Instrument window 274 gt gt lt lt buttons in error message dialog 164 gt gt gt lt lt lt in alignment wizard 205 2nd order polynomial ink model 95 2x Topography Gain in Instrument window 188 3 D scan data views in IA application 243 3 point plane correction 242 A A serious error has occurred message 163 al and a2 vectors 219 222 AC mode See also contact mode frequency sweeps phase imaging and active pens 22 281 and multi pen arrays 22 and resonance frequencies 329 detailed description of 327 introduction to 22 key settings for 330 laser alignment for 30 330 parameters for 187 191 pen approach with 337 push past movement See push past movement sensitivity of 329 setpoint for 330 336 setting parameters for 333 stiffness of cantilevers for 330 suggestions for imaging in 339 AC mode piezo 328 339 Acquire Auxiliary 1 Channel field 188 Active Feedback Pen box in Instrument wndvw 31 active pens See also flex cable passive pens pens alignment of
280. ndow s Stage Control tab shows the pen position relative to the sample holder puck NSCRIPTOR supports multiple sample pucks for different applications the standard puck a puck for inkwells and another for NanoInk s Nano scale Experimenter s Testing System NETS In the Instrument window you can specify a puck by changing the stage map the background graphic showing the puck sample grid etc to match the puck youre using This is the dialog box that appears when you go to the Tools pull down menu and select Load Stage Image Choose a Stage Stage Default Sample Puck o Cancel 4 18 2006 Page 245 NSCRIPTOR user manual Using inkwells Note Introduction to inkwells Page 246 These are your options here F Y H 4 o BE T f Default Sample Puck Inkwell Sample Puck NETS Sample Puck If your NSCRIPTOR system supports inkwells this is an optional feature DPN nanolithography becomes easier and more convenient You can use the feature to ink a pen or pen array before starting an experiment and you can later re ink to help ensure that the tip has an adequate supply of ink Inkwells also make it easy to dip and draw with multiple inks without having to change pens For simplicity NanoInk recommends that you first try out the inking process with single pens rather than multi pen arrays In the DPN method an inkwell is an etched die with one or more sets of reserv
281. ndustry and doing magnetic particle deposition for storage and sensor technology The first paper on the DPN process published only a few years ago see the Bibliography on page 22 describes the basic capabilities and potential of the technique That early work used a coated pen in which the tip of the pen was the 4 15 2006 Page 13 NSCRIPTOR user manual drawing nib Molecules absorbed onto the pen became the ink and the sample substrate was the paper Coated AFM Tip Nanopattern During contact mode operation under ambient laboratory conditions a water meniscus naturally forms between the ink coated pen tip and the substrate The ink moves onto the substrate by capillary transport through the meniscus One key issue for successful DPN patterning is choosing an ink and substrate with an appropriate chemical affinity causing the ink molecules to chemisorb onto the substrate Proper binding self regulates the diffusion of ink onto and across the substrate thus controlling the resulting feature size and resolution There are several key experimental parameters that affect feature resolution including humidity temperature and the pen s drawing speed So even in its most basic form drawing with a single pen and a single ink DPN can be a complex experiment To ensure success with even the most basic DPN experiments you must pay proper attention to each of the control parameters NanoInk brings total
282. ne part2 Dispensine Merire a a E E RE 259 Inking part 3 Inking the pen s and returning to the sample eeeeeees 262 Reinking AIR COT A WIN Oeste Gaeta a aca eee nanese 267 Dippins in a miecrochanne ls 552 sostsacd tarsus ss ceaicnapcnids a a 269 Using passive MUMIA PEM arrays 5 27 cncvaccadondessanksiacsanchaaiensnestiargodasedeadsehaasachagdaarstecaeeasuenns 270 Penrarray Cont Gurations xc iadgo chit creas oc eset eee Weds Uae ean and 270 Loading a multipen array oiea caecum cnn 271 Pen array SeleCtiOn ANG Setup reinicia acai ines 271 Aav PAW INS DIC VIEW ons acd ssnssentaceninsessansasmectisind a aa 271 PC VCH apen Tay oaea e e E AARE Pays Chapter 927A Civ 676M S stece vies int sac tiet soe A E oop sens dade te stiows 279 PX DOUE ACH VE DEUS eia a a a cans testes 279 FO Wed CIV PCS W OL a sa iii n A E 281 PEN TANG eSa E ecu ates eh sa eae 282 ACUIVE array drawin PLOCESS sios i eet onan a eden cn tt eaaceues 288 ACTIVE atray drawine procedures oore Soe cede tates ra E eae datea atlases 289 Manipulating the feedback pen during laser alignment ee cceeeeeeneeeereees 292 SEATS Window indica OT enra a E 292 PPT AY ca OTC IM oy ene cee oak E nan cae E T E E 293 Array alignment process OVELVIEW conni A a ii 293 ATTAY al OnMeNt Procedir nencai n a a E A 294 About The Allen Pens a Dis2 6 hacchenies ue aceeseBenaaicussdcasatonaaes e A A 295 Selecting pensin the PEM table misen a EN 296 Using the Pen Settings Window
283. nformation on the basic drawing elements see InkCAD objects on page 64 Button Function Zoom in on the displayed elements Zoom out on the displayed elements obs This is the zoom factor Increase this to zoom in or out by more or decrease it to zoom in or out by less 4 This puts the selected element in the tree into edit mode where you can modify it by clicking and dragging To do this first select an element in the tree view Then click on this button Small green circles appear when the element is in edit mode showing either the center and edge for dots or the line endings for lines paths or boundaries 2 Click on and drag a green circle to move one of the points When you are done changing the element click on Update to save the changes or Cancel to abandon them You can also right click and choose Update from the pop up menu Select an element in the designer window To select click on this button and click on the element in the window to the right Insert a dot Insert a line Insert a path Insert a boundary a HIN el See Half toning options page 77 for information about this button EA 4 Ca Note If the designer toolbar is not visible it is probably because you are looking at a view Look for View in the InkCAD title bar To open Structure Designer select an object in the tree view and click on the 4 button in the main toolbar Page 76 4 18 2006 NSCRIPTOR user man
284. ng 273 Feedback column in Align Pens tab 296 getting the pen s into feedback 20 indicators of on screen 83 166 introduction to 16 moving stage while in 158 moving the stage while in 168 170 172 negative feedback response 17 putting the pen s into feedback 42 stage control based on 17 feedback amplitude 338 Feedback column for active pens 289 feedback pens and laser red dot alignment 31 designating for active arrays 289 303 designating for passive arrays 302 introduction to 280 Feedback Warning message 172 filled objects See boundaries filled text 224 filtering scan data 243 filters for signal noise 187 188 finding inked areas See InkFinder fine alignment 133 See also coarse alignment fine alignment marks See also coarse alignment marks adding to a pattern 75 and image databases 167 appearance of 133 as non GDS II objects 122 as structure references 133 editing properties of 134 in multi ink drawing 124 133 introduction to 68 location for 133 where stored 167 Fine X and Fine Y columns in InkFinder 202 Fit Curve button in InkCal 110 Fit Horizontal Vertical Scale fields in IA 239 Fit Screen button in Instrument window 201 Fit to Screen option in Instrument window 170 fitting curves in InkCal 110 114 Fixed property setting 143 144 flex cable for active pens See also active pens components of 40 introduction to 281 loading a new flex cable 38 safe region for holding
285. ng _phs_rev indicates a phase mode image in the reverse direction You can choose from several file formats including SUR which is used in the SPM industry and by the NSCRIPTOR Image Analysis software e Update image use this command to return to the main InkCAD window and display the current default image there e Close this command instructs the Instrument window to close without passing anything back to the module that opened the Instrument window InkCAD or InkCal These options are available from the Instrument window s Tools menu e Pen Down tells the instrument to use the scanner to bring the pen close to the substrate surface under feedback control 4 15 2006 Page 209 NSCRIPTOR user manual Page 210 Pen Up moves the pen a small distance away from the substrate surface keeping it in feedback control Park this moves the pen to a location within the available scan range but a distance away from where DPN drawing has been taking place The pen moves to the parking coordinates specified in the Lithography tab of InkCAD s Options dialog box described in Chapter 5 Connect initiates the software s connection to the instrument Disconnect cancels the software s connection to the instrument Load Stage Image you can use this option to specify which sample puck you are using and setting the background graphic for the Stage Control tab See the Chapter 8 section on choosing the stage c
286. ng DPN patterns F2 Zoom in F3 Zoom out 4 18 2006 Page 161 NSCRIPTOR user manual About the Outputs window Shortcut Function Editing drawing elements Ctrl C Copy selected element to clipboard Ctrl V Paste element from clipboard Ctrl A Select all elements Ctrl G Snap to grid Lithography control F9 Start lithography F12 Stop lithography When you draw a DPN pattern you might see this message box BE warning O U UU O A InkCAD Found problems in the current document during drawing preparation Some elements will not be drawn Press Cancel to abort lithography or OK to continue Cancel You can click OK to draw anyway or Cancel to stop the drawing operation When it displays this message InkKCAD may also open an Outputs window that shows a longer description of the problem 999 Severity Code Description 1001 The line between X 3 428 Y 2 562 and lt 4 059 Y 4 492001 may be too narrow to draw InkCAD uses this window to display messages that are too long for a normal message box To see the full message widen the Outputs window by dragging its left or right boundaries Then click on the message itself to expand it These messages usually appear when the desired dot diameter and or line width are not physically possible given the current calibration conditions For example the pattern might include dots that are too small or lines that are too narrow to draw Wi
287. ng of See Repeat profiles of 238 properties of 136 rounding at the ends 141 separation between 14 too thin to draw 162 using in calibration 98 104 width of See width of lines links in online help 120 Litho Control item 153 Litho Mode item 126 lithography bias See also bias control feature rest bias field in DPN options 157 field in layer properties 128 introduction to 51 software settings for 56 lithography controller 26 28 45 lithography stage See DPN stage Lithography Started Done messages 100 logging of events 158 4 18 2006 magnet in ink dispensing kit 250 magnet in sample puck 33 169 Magnification structure reference property and dot size 135 and line thickness 137 property definition 147 when InkCAD applies it 148 magnifier shipped with system 27 260 main InkCAD window See also InkCAD Instrument window Pen Settings window buttons in 63 description of 61 displaying effective scan range in 286 drag zooming in 81 keyboard shortcuts for 161 Last Selection field of 62 parts of the window 61 printer icon in 84 showing x y axes in 158 snap to grid feature of See snap to grid feature Structure Designer component See Structure Designer toolbars in See toolbars views in 70 72 MAIN POWER connector 47 markers in IA application 240 marks alignment See coarse alignment marks fine alignment marks marks microwell See microwells master computer of NSCRIPTOR 26 28 ma
288. nherits the layer number from the layer and you can t change LayerNumber If it is False you can set the layer number to another value This is not a layer property Using layer boundary settings InkCAD s layer properties include some default boundary settings that you can apply to some or all of the boundaries in a layer Any boundary can use its layer defaults if you wish There are several boundary properties that can inherit the layer defaults To set one of these properties you first click on its initially hidden l button Border L False yl A dialog box like this one appears A Enable or disable Use Layer s Settings to indicate whether or not you want to use the default layer setting If not set Value to the desired value for the property on or off 4 18 2006 Page 145 NSCRIPTOR user manual DPN boundary previews Page 146 Note InkCAD has a DPN preview feature that shows you how it will draw a boundary s hatch lines It shows where the pen or pen array will go as it draws a boundary given the current settings of the boundary parameters see Boundary properties on page 141 for information on these The DPN preview is not meant to be a highly accurate predictor of how a boundary will look when drawn In particular it does not show the effects of ink diffusion Its main purpose is to show the boundary s hatch line angles and step SIZe The DPN preview feature is only available from a view
289. ning a frequency sweep Whenever you want to make an AC mode scan you should run an automatic frequency sweep first Each cantilever has a different resonant frequency and a pen s frequency can change over time AC mode scanning is not supported for multi pen arrays or active pens Appendix C has a detailed description of AC mode imaging and frequency Sweeps as well as advice on how to successfully use AC mode on your NSCRIPTOR system In a sweep InkCAD oscillates the cantilever through a range of frequencies while measuring the vibration amplitude It does this in free air far enough 4 18 2006 NSCRIPTOR user manual above the sample that the data is not affected by tip sample interaction This is the Frequency Sweep tab of the Instrument window fy unnamed xad Instrument File Tools View Help Stage Control SPM Images SPM Setup Graph of amplitude vs frequency N T Click here to z start a fully automated frequency sweep an Drive Amplitude V Setpoint M Drive Freq kHz Full Auto Q h o lt 4 fasoo foco 4 Click here to sto p a sweep Frequency Sweep Tune Amplitude Auto Set in progress Start Sweep Tune Auto Set illati Drive F Off Start Beil kHz Jagat aT san Pak eet set poo 34 1 000 jo H End Frequency kHz S Mark Bel poo 4 Full Oscilain Amplitude Reset to Full Range jo Usually there is a narrow band of frequencies where the amplitude peaks Frequency kHz 28
290. ns in the main InkCAD window but it works like a separate InkCAD module You can learn how to use it later in these tutorials InkCAD objects The following paragraphs describe the types of basic drawing objects that InkCAD uses They appear here roughly in the order of the largest or most complex to the smallest or least complex Each of these object types has its own set of properties which you can view and edit in the main InkCAD window s property pane The properties are different for each type of object but all objects have at least a name Documents A document is a complete DPN pattern InkCAD stores each document as a separate disk file with a INK extension In InkCAD you can have only one document open at a time If you have a document open when you try to open another or create a new document InkCAD closes the first one automatically it asks if you want to save the first document before closing if it has changed since the last save A document contains one or more layers Page 64 4 18 2006 NSCRIPTOR user manual Layers Structures Structure references A layer is a group of related elements drawn on the substrate together The most common use of layers is with multi ink DPN patterns If you want to design a pattern drawn with two inks for example you would group the elements into two layers each of which corresponds to one ink When drawing the pattern you would load a pen or pen array coated with the first
291. nual 5 In the bottom left corner of this window click on the Control tab This box should appear in the middle of the window Pen Control Pen Fetract Extend Feedback Status Slew Rate msec d 1 0 O01 wt Retracted 500 2 0 O01 H Retracted 500 3 0 0 017 E Retracted 500 4 0 0 017 fa Aetracted 500 5 0 Ooo a Retracted 500 B 0 0 017 Retracted 500 Fi 0 0 017 a Retracted 500 a 0 0 017 a Aetracted 500 6 Look at the Feedback column to see which pen is currently the feedback pen To change this click twice on the check box for the pen you want to become the feedback pen This pen would typically be at one of the ends of the array Then click on the pencil icon to the left to have InkCAD refresh the data and erase the old check mark In the array picture at the top of the window the red dot indicator should move to the new feedback pen 7 Close the Pen Settings window by going to the File menu and choosing Close 8 Select the writer pens Back in the Instrument window s Align Pens tab Choose the writers you want to use See Selecting pens in the pen table page 296 for help with this You do not need to select the feedback pen when you do this the system assumes that the designated feedback pen is selected If you see a message about the scanner range being exceeded please see Out of range message on page 287 When you have selected all your pens check the estimated effective range to see if it is bi
292. nual For now suppose you have this pattern in a Structure Designer session InkCAD allows you to select and modify elements with the mouse but only in Structure Designer You can select an element by clicking on the L J button then moving the pointer over the element Click once to select the element Page 78 4 18 2006 NSCRIPTOR user manual Once you select an element you can de select it by right clicking and selecting Cancel from a popup menu Small green handles in the element indicate that you can modify it For example you could drag the middle handle to center the dot in the square To do this drag the handle until the dot is in the correct position and then update the dot You can also adjust the length of the line that forms the square s right border Click somewhere on the line to select it Then drag the bottom handle to the correct location and update the line Try reducing the height of the boundary Select it by clicking inside it Then drag its top point down and update it 4 18 2006 Page 79 NSCRIPTOR user manual If you need to select a group of elements located near each other you can left click and drag the pointer over them InkCAD displays a rectangle showing you the area you are selecting Selection rectangle When you release the left mouse button InkCAD selects all the elements that are entirely inside the green selection area in this case the boundary and top lin
293. o another value About the line display Style The Display Style item in the line properties has two possible values LINE_WIDTH and SPEED e When Display Style is LINE_WIDTH you enter the line width you cannot edit the Speed property InkCAD calculates the speed for these lines from the line width and the calibration coefficients e When Display Style is SPEED you enter the drawing speed you may not edit the LmeWidth property InkCAD calculates the widths for these lines from the speed and the calibration coefficients The Display Style setting affects the values of line properties when calibration coefficients or scaling factors change For example here is what happens if the calibration coefficients change e For lines with Display Style set to LINE_WIDTH the line width does not change but the drawing speed does e For lines with Display Style set to SPEED the line width changes but the speed does not The Display Style also affects how lines react to changes in magnification scaling which is a structure reference property e For lines with Display Style set to LINE_WIDTH the line width changes when you modify the magnification property e For lines with Display Style set to SPEED the line width does not change when you modify the magnification Working with the Points property For path and boundary elements you can use the Points property to display or edit the line segment endpoints You can view the endpoints by p
294. o the next element It starts out by selecting the first dot or line in one of the tables in the bottom half of the window ml TT He 2 Speed Repeat Width Enab d 0 25 0 45 0 1 0 0 413 v 1 5 25 1 5 45 0 2 0 0 1 v 4 18 2006 Page 105 NSCRIPTOR user manual Excluding dots and lines from analysis Page 106 When you save a dot area or line width the software automatically saves the area or width then selects the next row in the table First line s width is saved here Pal ri ae y2 en Repeat idth Enab Gave 2 5 0 oael fv l gt d gt Dis as Doo ot oe 25 45 0 4 0 1 we This is the order of the elements for the default InkCal patterns the pre defined ones shown when InkCal opens Pattern of Dots Pattern of Lines 2 000 First Last First Last selected selected selected selected Pattern of Dots and Lines Pattern of Dots and Lines Dot selection order Line selection order 1 2 1 2 3 oi D 6 g j 9 4 5 a ag 11 l 6 7 8 So the first dot you will measure is the smallest one and the first line is the thickest If you want to check the selection order for your test pattern you may click on the InkCal Back button near the bottom of the window to return to the pattern specification screen From there you can select any dot and or line and InkCal highlights the selected element in the preview If you want to leave a dot or line out of t
295. o you want to print tomorrow ChemPhysChem 2001 2 37 39 Binning G Rohrer H Helv Phys Acta 1982 55 726 Binning G Quate C F Gerber Ch Phys Rev Lett 1986 56 930 For a more complete list of DPN papers please see NanoInk s Web site www nanoink net 4 18 2006 Page 23 NSCRIPTOR user manual Page 24 4 15 2006 NSCRIPTOR user manual CAUTION About the online helo Chapter 2 The DPN environment This chapter introduces you to the hardware elements of your NSCRIPTOR system and describes how to use the non InkCAD components InkCAD is NanoInk s main DPN application Please read and understand all safety statements in the preface before using this system These are the sections in this chapter System components page 26 describes the elements of an NSCRIPTOR system About the instrument page 27 introduces you to some of the components of the system s scanning probe microscope Instrument operations page 28 describes how to perform instrument related tasks such as loading a sample replacing pen s etc Controlling the environmental chamber page 44 shows how to use the software that maintains the temperature and humidity in the environmental chamber System cable and hose connections page 45 lists the NSCRIPTOR cables in case you ever need to move the system About the NanoInk DPN substrate page 49 shows the layout and dimensions of NanoInk s custom substrate
296. oaches and scans as it is in this image When operating in AC mode the pen vibrates thousands of times per second The point where the laser beam strikes the photodetector moves just as quickly but this tab does not show it If AC mode is enabled and there is no approach or scan in progress InkCAD stops vibrating the pen while this tab is open With AC mode you might notice that turning the alignment screws moves the red dot in the opposite direction as in contact mode For more information on this see the section on the negative setpoint in Appendix C About the sensor signal readings In the Align Laser tab the fields below the photodetector are readings from the detector Item Description Error This is the y axis location of the dot s center This value is related to Signal the setpoint and the vertical position of the laser spot on the photodetector expressed as Z T B here Error Signal Setpoint Z T B Lateral This is the x axis location of the center of the dot Signal Laser Sum This is a measure of the total amount of light reaching the photodetector in all four quadrants It is also the value displayed in the light intensity meter above this field Page 30 4 18 2006 NSCRIPTOR user manual Note Active pens and laser alignment Laser alignment procedure To make reproducibly good approaches you should always use the same setpoint value during approach NanoInk suggests resetting the setpoint val
297. oblem occurs when running InkCAD you might see a dialog box like this HAFM465 A serous emor has occurred Could not find file C Documents and Settingsbwatson WaNOINEAD efault lignmentD atabase sad _ gt Quit Click here to close InkCAD Click here to go back to INnkKCAD This is the error reporter If an error message like this one appears feel free to contact NanoInk technical support for help See the technical support phone number and e mail address in the preface of the manual or at the bottom of every help topic 4 18 2006 Page 163 NSCRIPTOR user manual Page 164 4 18 2006 NSCRIPTOR user manual Chapter 6 Instrument control This chapter shows you how to control the operation of the NSCRIPTOR system s scanning probe instrument The Instrument window contains the following instrument control functions e About the Instrument window Image databases page 167 e Stage control page 168 e SPM imaging page 173 e SPM setup page 187 e Using the video and misc motor controls page 195 e Using InkFinder page 200 e Bookmarking substrate locations page 207 e Instrument window menus page 209 About the Instrument window This is the Instrument window which you can open by clicking on the main window s O button Left side Right side unnamed xad Instrument Left File Tools view Help geal E aiam Tnk E Sele Tink ee ee NNN PRP PRR
298. obrin ipa m Pretend 16 1 x 161 7 Save this dotmap to its own layer and close InkMap by going to the File menu and selecting Export and Close and New Layer 8 Re open InkMap load the bitmap go to the InkMap options and make red the selected color Create a dotmap of the red pixels and export it to another new layer in your document You can see all three dotmaps together when you view the whole document in the main InkCAD window Mn bk View a 3 Ble Et Yew peet Layers petrument Took Windom Hei zaxi o WY BS te U4 ie aie A Pps y k i E i 624 myra 4 18 2006 Page 233 NSCRIPTOR user manual Tips on using InkMap Reducing drawing time Color matching Avoiding moir effects Page 234 This section offers suggestions that should help you use InkMap more effectively When converting bitmaps to dotmaps it 1s not hard to create dotmaps that would take a long time to draw Here are some ideas for making dotmaps that draw quicker e Start with small bitmaps The system can draw a 90 x 90 pixel bitmap up to four times faster than a 180 x 180 pixel bitmap e Make the bitmap smaller in InkMap You can click on InkMap s compress bitmap button to reduce by half the bitmap s size as displayed in the bitmap pane The tradeoff for this is lower resolution e Make sparser dotmaps You can reduce drawing times by decreasing the overfill factor described in InkMap options on page 229 Less ink per dot mean
299. of Pens Default Pitch Current Pen Type Description lal array types to Sy 50 Passive Passive Pen Array 4 26 26 35 E Passive Passive Pen Array array types A aa C or from the top 4 3B 3 75 Passive Passive Pen Array i A 4 4 30 a Passive Passive Pen Array tabl e see H r oo T1 8 40 v Active Nanolnk Active Pen Use this tab to edit T2 8 we sae Pen b el ow cantilever properties TOHA p a 1 0 2 Use this tab to edit pen P an FA pitches gaps between 5 n 19 ah _ pens C contro 8 parameters appear in this area sala OOOO Use this tab to edit pen Use this tab to manually array properties extend or retract active pens see below See Creating a new pen array type page 300 or Deleting a pen array type page 301 for information on the New or Delete buttons Using the Control tab page 301 has information on using the window s Control tab One thing you can do there is manually retract and extend active pens 4 18 2006 Page 297 NSCRIPTOR user manual Note InkCAD comes pre configured with information on all current NanoInk pen and pen array types Call NanoInk to get updates for the latest pen or pen array types You normally shouldn t need to use the bottom half of this window except to select a feedback pen in the Control tab or test NanoInk active pens About the pen or pen array types A In the top table you can choose from all pen or pen array types the s
300. of the table The Control tab in the bottom half of the Pen Settings window has various settings and controls for active or passive arrays Unlike the other tabs in this window where you edit settings for pen or pen array types the Control tab affects a particular pen or array the one you will draw with This is where you designate the feedback pen for all pen array types active or passive You can also use this tab to manually retract or extend active pens which is useful for testing pen arrays NanoInk active pens are thermally actuated to extend a pen an electrical signal heats the top side of a cantilever bending the end down toward the substrate It is important to be aware that this heat can affect DPN drawing Too high an actuating current may damage pens and make them unusable Heat 4 18 2006 Page 301 NSCRIPTOR user manual tolerance varies with the active pen type the environmental conditions and other factors For passive pens and arrays This is what the Control tab looks like with a passive pen or array type selected in the top half of the window Pen Control Feedback miki oon non wh EE lt lt lt 1 lt 1 lt 1 lt 0 lt 0 lt 0 lt 0 771 r m r m _ l co Config Control The Feedback column indicates which pen is designated as the feedback pen the one that the system will put under feedback control Select Inked for each pen you plan to draw with Fo
301. ography in Chapter 5 Follow this procedure to scan and optionally save an image of a drawn pattern 1 First return to the main InkCAD window and look at the toolbar above the drawing area If it is the toolbar shown here click on the XJ button If this toolbar is visible click on this button P PPS alk Or Av 10 615 2 Right drag over the pattern design and select Scan from the resulting pop up window Delete zoom The Instrument window opens with the SPM Images tab selected on the right side of the window It should already have pre set scan parameters Scan Size um 4 531 24 offset um 0 021 Y offset um 0 610 Page 176 4 18 2006 NSCRIPTOR user manual 3 Ifitis not open already open the Instrument window and select the SPM Images tab Enter scan parameter values in the SPM Controls tab on the right side of the window 4 Goto the Video Motors tab on the right side Click on the Approach button to put the pen s into feedback control 5 Return to the SPM Controls tab and click the Scan button to begin scanning As the scan progresses the Instrument window updates images for all enabled several scan types 6 A few parameters stay enabled during the scan allowing you to make adjustments without restarting the scan If you want to stop and restart the scan click the Stop button change parameters as desired and click Scan again At any time you can double cl
302. oirs microwells and alignment marks This is a scanning electron microscope SEM image of one of NanoInk s inkwell designs Bubble trap SS Reservoir _ Microchannel Microwells and alignment gt marks eee p ji a id f You use a syringe or micropipette to fill the macro scale reservoir with ink as described later in this chapter Reservoirs are 1mm or more in diameter Ink flows from the reservoir through microfluidic channels to the smaller microwells Bubble traps keep air bubbles out of the flowing ink 4 18 2006 Inkwell designs and pen array combinations NSCRIPTOR user manual The system inks a pen by dipping the tip into a microwell Here are some microchannels and microwells Microwells NanolInk has several DPN Inkwell designs to support a wide range of uses We also have an inkwell data sheet that describes the function and layout of the available designs To get a copy of the data sheet you can look for it on our Web site www nanoink net or ask us to send you a copy The inkwell designs support single or multi pen inking Some multi pen arrays require you to use certain inkwells See the DPN pen data sheets for information on combinations of inkwells and pen arrays 4 18 2006 Page 247 NSCRIPTOR user manual About the inking puck An inkwell enabled instrument holds two substrates on its sample holder puck Motor range of motion Inkwell Center of puck The inkwell
303. oks like this Si3N4 Tip on prs i bottom E seen from above 4 18 2006 Page 279 NSCRIPTOR user manual Active pens are currently available in eight pen arrays The NSCRIPTOR system distinguishes between three types of pens in an active pen array Writer pens have narrow cantilevers designed specifically for DPN drawing Before drawing a pattern you select a subset of the array s writer pens to draw with You normally use inkwells described in Chapter 8 to ink these pens Reader pens are designed to go into feedback These pens are wider than writer pens allowing you to more easily focus the laser beam on them Each active pen array type has one or more reader pens usually there is one of them at each end of the array A feedback pen is a reader pen that you designate to put into feedback for DPN You will reflect the laser light off this pen There is only one feedback pen at a time The NSCRIPTOR system allows you to designate the narrower writer pens for feedback but it is harder to focus the laser on them You normally scan with the feedback pen so it is usually not inked Reader pens one is usually designated the feedback pen Active pens make DPN lithography more dynamic and flexible Here are some of the ways you could use them Page 280 Multi ink drawing with inkwells you could ink all writer pens with different inks before starting to draw You can also remove the sample between laye
304. ol Description SatV and SatU Saturation is the depth or richness of color Moving these sliders to the right makes the colors deeper while moving them to the left makes the colors less rich Hue The hue is the basic color of an image Moving this slider to the right makes the image redder and moving it to the left makes it greener Restore Defaults Click on this button to reset these three video controls to their button default values Using the SPM controls The SPM Controls tab on the right side of the Instrument window contains fields and controls generally used when making SPM scans There is detailed information on this scanning process in SPM imaging page 173 This tab opens automatically when the SPM Images tab opens on the left side of the window Using InkFinder InkFinder is a collection of data capture and alignment functions that ultimately help you find ink patterns on the substrate These are the major InkFinder sections e About the InkFinder tab page 201 e Performing an alignment page 204 e Bookmarking substrate locations page 207 Page 200 4 18 2006 NSCRIPTOR user manual About the InkFinder tab This is the Instrument window s InkFinder tab This area lists video and SPM images Perform micro and fine alignments in this area About the Video and SPM Images section Video and SPM Images ya x 8 Notes Remove Goto FitScreen Open Export Image Typ
305. olts This is a negative value see About AC mode s negative setpoint for more information on this A lower negative number closer to zero moves the pen toward the 4 18 2006 NSCRIPTOR user manual surface The absolute value of the setpoint correlates directly with the resonance amplitude e Drive frequency The specified oscillation frequency of the AC mode piezo This value which is near the resonance frequency stays constant during an AC mode scan This is the Instrument window s Frequency Sweep tab File Tools Yiew Help Stage Control SPM Images SPM Setup stecccccccescccescccesccsecocssscocesoesscoosees Nececcseccecseeeeseseesssesesessesessessensens Frequency kHz 100 Graph of amplitude vs frequency 3 Key AC mode variables Kee eS SS SS ss a eee l J Drive Amplitude v Setpoint Drive Freq kHz l Ful Auto Lf poe a aoe Frequency Sweep Tune Amplitude Auto Set Sweep Start Sweep Tune Auto Set variables and Start Frequency kHz Target Oscillation Drive Frequency Offset controls eID g Amplitude V from Peak 7 an 7 1 000 10 End Frequency kHz quency kHz Setpoint at Mark Below 500 0 Full Oscillation Amplitude 40 Reset to Full Range See About the Frequency Sweep tab page 339 for information on the fields and controls The following sections describe how InkCAD determines the values for the key AC mode variables First there is a high leve
306. omatically the first time the graph window opens You may use the Back button to return to the previous window described in InkCal part 2 Analyze the test pattern on page 104 There you can look at or modify the numeric values of the data points without losing your current calibration coefficients when you return to this window However InkCal only automatically fits the curve the first time you open this graph window If you go back to the previous window and then return to this one you have to click on Fit Curve to have InkCal re fit a curve 4 18 2006 Page 111 NSCRIPTOR user manual About the ink definition properties The ink properties in the upper right corner are the same as the ones found in the InkCAD layer properties See the layer property section in Chapter 5 for a description of these items A a El Ink Ink 4 Mame Ink 4 Calibration Parar Description El Ink Model Linear El Dot A 0 050 t Dot Ditfusi 0 050 ur s El Line w 0054 y Line Dittus 0 054 um s Repeat Mc Stacked El You can select the ink model to use for curve fitting by clicking the Ink Model field and picking from the drop down list See About the ink models on page 95 for a list of available ink models You may edit the current ink model s dot and line calibration coefficients here This is often useful when dealing with curve fitting error messages see Using the curve fit message on page 115 for more information If you then click on the
307. omponents in the previous section by creating and examining a pattern To start you will make a pre defined pattern in one of the other InkCAD modules Dots amp Lines Chapter 7 has a complete description of this module but in short in Dots amp Lines you can define an array of identical cells containing a set of dots and lines After you define the cell and array Dots amp Lines can return the entire pattern to the main InkCAD window Click on the Fy button to start Dots amp Lines Dots amp Lines opens with some default cell and array definitions The upper left image shows the cell and the image to the right shows the cell array By default the module creates three rows and three columns of cells each of which has nine dots and eight lines Exit from Dots amp Lines passing back these default elements by going to the File menu and selecting Export and Close and New Document 4 18 2006 NSCRIPTOR user manual Looking at the objects The tree view now shows new objects drag the divider to the right to see the whole description gt Imported Document Layer 1 D amp L 3 tif D L ArayHolder 2 1 Struct Ret From the Dots amp Lines data InkCAD created a new structure called D amp L and a structure reference called D amp L ArrayHolder Now click on the button for D amp L ArrayHolder to expand the structure reference exposing an array reference structure called D amp L Cell Clic
308. on sesssssssoeerssssssseeerrssssssseeresessss 333 Pen approach MAC MOJE as E Oa Aa 337 About the Frequency Sweep tab ccccccccsssssssecccecceceeesseecccceeeaaeeeseeecesessaaaeeseeees 339 Piclds armected Dy Tequency SWECDS onda i EA E 340 Eate e EREE L erie E EEE EN A eye ee mere een peer ce E terre ener oe eres 341 4 18 2006 Page 11 NSCRIPTOR user manual Page 12 4 15 2006 NSCRIPTOR user manual Introduction to DPN Historical development Chapter 1 Introduction This chapter introduces you to the Dip Pen Nanolithography DPN process and discusses the basic concept of a DPNWriter It also gives a general overview of how the DPN process is affected by the design of scanning probe technology the technology platform for the NSCRIPTOR DPNWriter Nanotechnology promises to be one of the leading research and industrial growth markets of this new century NanoInk is developing a process that places the company in a leadership role for enabling customers to succeed in the nanotechnology arena You can use NanoInk s NSCRIPTOR DPNWriter system to develop nanotechnology experiments with a high degree of nanofabrication process control You can think of nanotechnology as the utilization fabrication and control of devices or component arrays that have at least one physical dimension at the nanometer scale Scanning probe microscopes SPMs normally do not actively do nanofabrication even though they re
309. on coefficients for a given ink drawn on a particular substrate InkCal has several built in ink diffusion models that describe a wide range of inks InkFinder An InkCAD software component that performs a number of functions such as pattern alignment and substrate scanning InkMap A component of NanoInk s InkCAD software that creates patterns of dots corresponding to pixels in a bitmapped graphic file inkwell A DPN Inkwell is an etched chip used for coating a pen tip with ink The user fills a macro scale inkwell reservoir ink flows through microchannels to a smaller microwell and the system dips the pen into the microwell You mount the inkwell on the sample holder puck near the sample substrate instrument In NanoInk s NSCRIPTOR system this is the hardware that draws and images on a substrate This hardware is customized for the Dip Pen Nanolithography process An instrument includes a lithography controller L landing Another term for parking 4 15 2006 Page 313 NSCRIPTOR user manual Page 314 lateral force microscopy LFM A scanning method useful for imaging the substrate surface and looking at DPN results LFM scans show differences in friction between the tip and sample Lattice A component of NanoInk s InkCAD software that creates repeated patterns of dots layer A collection of one or more InkCAD elements drawn on the substrate together One common use of layers is with multi ink DPN pa
310. onstant height mode 1 e not in feedback this is the number of microns to raise the pen when you want to retract it The default setting for this variable is Z Piezo Retract in the InkCAD options See page 154 Description Approaching a pen or pen array 1s using motors and the scanner for fine positioning very close to the substrate surface Enable this item if you want the pen s to approach the sample before DPN drawing operations Multi layer drawing If you want to draw multiple layers in one operation only the first layer s Approach Pen s Before Lithography setting affects what happens before drawing The default setting for this variable is Approach Pen s Before Lithography in the InkCAD options See page 156 This field specifies whether there should be a scanner controlled lifting of the pen after drawing a complete pattern Multi layer drawing If you want to draw multiple layers in one operation only the last layer s Lift Pen s After Lithography setting affects what happens after drawing Note This setting only takes effect after completing DPN lithography It does not change the way the instrument withdraws the pen s before making coarse positional moves such as moving from a region of interest to the park position The default setting for this variable is Lift Pen s After Lithography in the InkCAD options See page 157 Lifting 1s using the scanner to raise the pen s a slight distance keeping them
311. ontrol background Select Palette select this menu option to choose the color palette used for scan images A large number of palettes is available This option opens a file browsing window for selecting a palette Video Settings this command opens a dialog box containing video saturation and hue controls See Miscellaneous video controls on page 200 for more information Options this command opens InkCAD s Options dialog box described in Chapter 5 Reset Instrument makes the instrument controller re start itself Use this command if the instrument does not appear to respond Here s what you can do from the View menu Dock Control Panel selecting this command splits the Instrument window s left and right sides into separate windows To restore it back to one window select Dock Control Panel again in the View menu This allows you to view six scan channels at once instead of four These commands are available from the Help menu Instrument Help opens the first Instrument window topic in the NSCRIPTOR online help The help has the same material as the manual NSCRIPTOR Help opens the NSCRIPTOR online help at its beginning 4 18 2006 NSCRIPTOR user manual Chapter 7 Using the other InkCAD modules Using Dots amp Lines In addition to the main InkCAD window InkCAD contains several other modules most of which design different types of nanoscale patterns Most of these modules export
312. ontrol to move the zoom motor to either end of its range If a button is dimmed it means that you have reached the motor limit in that direction 4 18 2006 NSCRIPTOR user manual About the toolbar A These are the buttons in the Video Motors toolbar Button Approach Withdraw Exchange Stop Capture Description This button brings the pen s close to the substrate and puts it them under feedback control The Fast Approach Only option allows you to place the pen near the surface without going into feedback The instrument just lowers the pen s until it detects cantilever deflection LY a _ ea Approach Wiithidrany Fast 4pproach Only This uses the motors to raise the pen s above the surface The withdraw distance comes from the DPN options see Chapter 5 Use the Z Piezo Retract option to raise the pen s with the piezo only without the motors does not put the pen s in feedback F Withdraw E schan Z Piezo Retract If you plan to exchange pens click on this button to do the exchange This lifts the pen s far enough above the substrate to safely change them See Chapter 2 for more information on changing the pen s Click on this button to stop the current operation This button captures the current video image to the current image database and sends it to Stage Control tab zoomed in closely on the video image This button does not work unless you have set a pen mark in t
313. opography channel is meaningless when the pen is in constant height mode 1 e not in feedback when the scan begins See Chapter 5 for information on constant height mode Error signal forward and reverse the instrument s error signal represents the difference between the cantilever deflection signal and the setpoint Lateral force microscopy LFM forward and reverse contact mode only in this data channel the image shows differences in tip sample friction as the pen or pen array moves relative to the substrate in the forward or reverse directions LEM images show good contrast when the ink has different frictional properties than the substrate and they are useful when you have a thin layer of ink Phase forward and reverse AC mode only this channel shows an image of the vibrational phase shift This channel is useful for examining the substrate surface in AC mode imaging For more information on this scanning mode see Phase imaging on page 175 4 15 2006 Page 173 NSCRIPTOR user manual When you request a scan the Instrument window automatically detects the set of available data channels and creates images for each channel You can also view enlarged scan images and line profile traces while the scan is in progress To open the scanning function from the main InkCAD window click on the button or go to the Instrument pull down menu and select InkFinder Then click on the Instrument window s SPM Images tab This auto
314. or less This table describes the fields and buttons in the Instrument window s Frequency Sweep tab Item Full Auto button STOP button Drive Amplitude Setpoint Drive Freq Frequency Sweep items Start Sweep button Start Frequency End Frequency Reset to Full Range button Tune Amplitude items Tune button Description Click on this button to perform an automated frequency sweep where InkCAD initiates the three steps that determine the settings for AC mode Click on this button to halt an automated sweep already in progress This is the input amplitude to drive the AC mode piezo to vibrate the cantilever at the desired amplitude The baseline oscillation amplitude during an AC mode scan with the pen in feedback Since inter atomic forces damp the amplitude when the pen is close to the sample this is a percentage of the full oscillation amplitude See Setpoint at Mark Below Full Oscillation Amplitude below This is the frequency to oscillate the AC mode piezo during an AC mode scan Click on this button to run a frequency sweep driving it at frequencies between the start and end frequency InkCAD records and graphs the oscillation amplitudes at each frequency This is the lower end of the frequency range to test in the next frequency sweep The upper limit of the frequency range to test in the next frequency sweep Click here to reset the Start Frequency and End Frequency fields to
315. ore to lock it in place To re size the outline click on any part of its outer edge Move the pointer to re size the outline and click once more to set its size 4 18 2006 NSCRIPTOR user manual To measure a line Click once in the scan image which creates a blue vertical line in the scan Drag it to the left edge of the drawn line and click once Then move the pointer to the line s right edge and click again creating another blue line If you want to move either blue line drag it from where it intersects with the red line then click once to re set it in a new position It should look like this To move one of the blue lines click once on the X where it meets the red line Then move the pointer as needed and click once to lock the line in place While you were measuring the dot or line you may have noticed InkCal updating the dot area or line width in the Results area To accept the final value click on the Save button InkCal stores the saved value in the table below and selects the next dot or line in the table Verify that InkCal saved the result for the correct dot or line before continuing If any unmeasured elements of the current type either dots or lines remain return to step 2 above to measure the next one If you drew a pattern of dots and lines in part of the ink calibration process and so far you have only measured one element type either dots or lines you now need to measure the other element type Und
316. otmap The dot pattern that InkMap creates for a specified bitmap image based on its conversion settings Dots amp Lines A component of NanoInk s InkCAD software that creates repeated patterns of dots and lines DPN An acronym for Dip Pen Nanolithography DPN stage Another name for an instrument DPNWrite NanoInk s first generation DPN software product which was the forerunner to the current InkCAD DPNWriter NanoInk s name for its complete DPN solution a product that includes a PC running InkCAD a scanning probe instrument an environmental chamber an air table and other supporting equipment and consumable supplies NSCRIPTOR is one type of DPNWriter drawing area In InkCAD this is the space in the main window where you add elements and design your pattern drive amplitude In AC mode imaging this is the amount the AC mode piezo extends to vibrate the pen dwell time The length of time that the pen stays in place to create a dot on the substrate 4 18 2006 NSCRIPTOR user manual E e chamber Another term for environmental chamber effective scan range The size of the area that can be reached by each pen in a set of active pens The more pens you select the smaller the effective scan range becomes element The simple basic InkCAD objects you can draw on a substrate There are four types of elements dots lines paths and boundaries engage See approach environmental chamber An
317. ove and below the scroll bar These two fields are disabled in Auto Range mode Whenever you change the range InkCAD automatically updates the scan image 4 18 2006 Page 181 NSCRIPTOR user manual Page 182 There are other things you can do with the scroll bar Drag this slider 57 42 to change the a upper end of the Click in this area range lt to decrease the brightness sabes ie Click in this area lower end of the to increase the range brightness e When you increase the size of the range it decreases the image contrast and makes it look smoother If you decrease the size of the range you get more image detail but also more noise The appearance of the mouse pointer depends on the Auto Range mode If the pointer looks like this when you hover it above the top slider or below the bottom one it means that Auto Range is on and you can t modify the range or change the brightness Om 4 18 2006 NSCRIPTOR user manual About enlarged scan images To see a full size image or panel double click on the appropriate image The panel window has two tabs along its right side This is the Image tab which has the same control buttons as the original image plus a few new ones Raconsed A 1 1 Enable Use this area to measure dots or lines see below You can use the controls at the bottom of this window to measure the size or thickness of a dot line or feature To do this first click o
318. ow main InkCAD window Pen Settings window Windows operating system 26 Withdraw Distance field 254 withdrawing the pen s and closing InkCAD 43 definition of term 128 distance to withdraw 128 from DPN options 156 from InkFinder 209 in InkMap 234 leaving light on after withdrawal 155 while drawing boundaries 143 withdrawing after lithography 156 wizards in InkCAD 205 wrapping text in NanoWord 223 writer pens 21 280 See also reader pens X X coordinates See coordinates Page 358 X Max field in Lattice 221 X Min field in Lattice 221 X_ Offset structure reference property 148 X1 X2 columns See coordinates XAD file extension 168 x axis motor 27 XP operating system See Windows XYZ Scale calibration 190 Y Y cable for bias control 54 Y coordinates See coordinates Y Max field in Lattice 221 Y Min field in Lattice 221 Y_ Offset structure reference property 148 Y1 Y2 columns See Dots amp Lines y axis motor 27 yellow line in Frequency Sweeps tab 334 Yellow Line to Skokie 334 yellow shading in Pen Settings window 302 Your current alignment data was message 167 Z Z All option for z motor zooming 195 Z Control tab in DPN options 156 Z Error Gain setting 332 Z Extension field in Instrument window 189 Z Piezo Extend items 126 154 Z Piezo Retract Instrument window option 196 Z Piezo Retract items 127 154 Z Position field 197 Z Sur
319. ow the Pattern Generation Settings edit the specifications for the dots and or lines in the test pattern Set the dwell time or pen speed for individual dots and lines InkCal updates the pattern preview when you select and modify dots and lines Disable any dots or lines you don t want in the test pattern add or delete dots or lines using the appropriate toolbar buttons see The InkCal toolbar D on page 17 for descriptions of these buttons For the best results your test pattern should have dots and lines with dimensions dot areas and line widths similar to those used in your main pattern Try to pick dimensions that are evenly spread over the area or width range When the dots and or lines are defined the way you want them click on the button to start drawing the test pattern A Lithography Started status message appears at the bottom of the window 4 18 2006 NSCRIPTOR user manual About the test pattern preview A 9 10 11 12 Two things happen when pattern drawing is done The Lithography Started message changes to Lithography Done and the Instrument window opens for you to make an SPM scan of the completed pattern See Chapter 6 for information on the Instrument window This window opens to its SPM scanning tabs and InkCal has already given it the appropriate parameters for the scan Length of the prear Size 6 076 um Square scan area Distances from the _w affset 27 4BE um stage origin for
320. p of ink on the sample itself out of the way toward the lower edge so that the pen or pen array does not run through it You could then set up bookmarks and use them to move between the drawing area and the ink drop e Another use is to keep track of where you have worked on a sample It can be confusing to draw over an existing pattern you didn t know was there when you scan the image contains stray marks from the other pattern Follow this procedure to set a bookmark 1 Look at the live video as you move the pen s over the desired sample position Use the focus controls on the Video Motors tab to focus clearly on the intended sample area In the live video click to place a pen marker on your reference pen In the Instrument window s Video Motors tab click on the Capture button The Stage Control tab displays a zoomed still video image The InkFinder tab lists the new image in its Video and SPM Images section You might want to add notes to help you identify the video image later Image Type Created Po 70 Wideo See Adding notes on page 204 for information on notes 4 18 2006 NSCRIPTOR user manual To move the pen s to a previously bookmarked location go to the InkFinder tab on the right side of the Instrument window In the Video and SPM Images section select the video image you want to move to and click on the Goto button Instrument window menus The Instrument window has the fol
321. pecified electrical bias during DPN drawing If the conditions are right this causes current to flow If included as part of your NSCRIPTOR system there are several ways to use this feature For example you could drive an electrochemical reaction in the tip substrate contact region You could also do e DPN where you apply a bias without depositing ink Or if you want to create a pattern out of a material that would not work by itself as an ink you could draw with a chemical precursor while applying a bias field thereby depositing the desired material on the substrate You can use this technique to create a metallic pattern for example Electrical bias is provided by an NSCRIPTOR bias control switch box connected to the microscope and its controller You can apply bias through either the pen tip or the sample puck There is more bias control information available e For information on the bias control switch box and how to operate it see Chapter 2 Chapter 5 contains other information on controlling the bias control feature including the InkCAD software fields that affect it e For more information on the e DPN see Li Y Maynor B W and Liu J Electrochemical AFM Dip Pen Nanolithography J Am Chem Soc 2001 123 2105 2106 Note The NSCRIPTOR system does not support bias control with active pens Bibliography The following articles provide detailed information about the topics covered in this chapter e Snow E S C
322. pen speed Linear with This model derives from the Linear model but it further assumes offset that the finite size of the tip apex the extremity of the pen in contact with the surface results in a minimum contact diameter for dots or contact width for lines The plot of the dot area as a function of the dwell time or line width as a function of the inverse speed is linear but intercepts the y axis at a positive value For both lines and dots InkCal calculates 4 18 2006 Page 95 NSCRIPTOR user manual Model Description two coefficients the slope of the curve Diffusion Coefficient and the location of the y intercept Contact Diameter or Width Dot size or line width Dwell time or inverse pen speed Please see the notes below for other information about this model Non diffusive This model is for 1 inks that do not diffuse laterally or 2 nanolithography processes in which substrate modification only occurs in the tip substrate contact region without ink The model assumes that the diameter of drawn dots is independent of the dwell time and equal to an empirically determined constant called the contact diameter Similarly in this model the width of drawn lines is independent of the pen speed and equals the contact width The plot of the dot area as a function of the dwell time or line width as a function of the inverse speed is a horizontal line Dot size or line width Dwell time or inverse pe
323. plan to tilt the array by 0 3 degrees or less per step raise the pen array 100 microns e Otherwise more than 0 3 degrees per step raise the array 200 microns 4 18 2006 Page 275 NSCRIPTOR user manual Resetting z motor limits Page 276 8 With the pen leveling controls raise the deflected side of the array a small amount 0 2 degrees is a good starting point The button to click depends on which end of the array is showing deflection Click here if Click here if the left side the right side deflected deflected o Note If you see a message about actuator limits being exceeded see Resetting z motor limits for instructions 9 Use the focus controls to bring the pens back into focus turn the laser back on and return to step 5 above When leveling a pen array you click on the or buttons to tilt it You might see this message when you do this O A Requested stage tit exceeds actuator limits If this message appears follow this procedure to raise and then lower the pen array which resets InkCAD s motor limits 1 Click on OK to close the message box 2 In the Instrument window s Video Motors tab click on the Exchange button This dialog box should appear 4 7 i Tip Exchange G Fress the Stow button to initiate the tip exchange procedure Earlier in this document you may have used this dialog box for exchanging pens but you will not exchange pens here 4 18
324. ple Puck option 245 246 Default Settings button in Instrument windw 186 definitions for inks See ink definitions deflection of cantilever and contact mode 17 and laser red dot alignment 29 as a feedback control mechanism 18 in pen array leveling process 273 de ionized water 323 325 delay time for drawing dots See dwell time deleting elements from tree 80 derivative gain settings 186 332 de selecting elements in Structure Designer 79 Designer See Structure Designer designing a pattern 131 Diameter field in Dots amp Lines 215 diffusion of ink See calibration coefficients inks DIGITAL I O connectors 45 digital signal processing DSP 16 Dip Pen Nanolithography DPN applications for 13 chemicals used in See chemicals controlling conditions for See E chamber description of 13 DPN options 152 environment for doing 25 factors affecting performance of 14 history of 13 multi ink DPN 123 process overview for 129 scientific papers related to 23 starting DPN draws in InkCAD 82 status of DPN drawing 83 stopping DPN operations 83 Dip toolbar button 263 266 Disable All fields in InkCal 98 disconnecting from the DPN stage 209 disengaging the pen s See withdrawing the pen s Display menu in IA application 237 Display Style property 134 135 137 Display the Complete Doc button 72 74 dithering in dotmaps 234 Page 344 diving board pen shape 20 32 DNA as an ink
325. ple surface and make sure the pen or pen array appears near the center of the live video image You can move the video objective to center the cantilever See Adjusting the objective lens for more information 5 In the Stage Control tab on the left side of the window use these step controls to move the sample until the area you re interested in appears on the video monitor 5 a Step Size 25 um T iig Speed ie A 12mm If necessary rotate the puck by hand to orient the sample 6 Repeat step 2 above 7 Click on the Approach button to put the pen s into feedback Once the approach is complete and the pen or pen array is in contact with the sample surface do not exit the InkCAD software or turn off the lithography controller without first withdrawing the pen Otherwise you may damage the pen scanner and or sample When you finish this procedure if you see a message saying that the approach failed an inadequate amount of light is reaching the photodetector One possible cause for this is the presence of ink or other foreign material on the top of the cantilever It may also help to try reflecting the laser beam off a different area of the cantilever If these suggestions do not help please contact NanoInk technical support 4 18 2006 Page 43 NSCRIPTOR user manual Adjusting the objective lens If you want to center the cantilever in the live video image the instrument has two screws that move the
326. ply bias you need to connect the wires for both the scanner assembly and the puck This picture shows where to connect the DAC cable to the scanner assembly here the assembly is rotated to show the bottom of the scanner Cable plug Puck end of stage cable Setting the polarity and external bias switches as needed on the bias control switch box as discussed in the switch box section of Bias control hardware and equipment page 52 Setting up bias control in InkCAD See Bias control and the InkCAD software page 56 for more information If the puck end of the stage cable is inserted in the sample puck and you need to remove the puck say to replace the sample or change the pen you may have to disconnect and reconnect the pin connector cable that plugs into the puck s insulation layer See Changing the sample page 32 or Replacing pens page 34 for details 4 18 2006 Page 55 NSCRIPTOR user manual Bias control and the InkCAD software If you want to generate bias with an external device you need to connect this device to the switch box and configure or program it to supply the bias patterns you want The trigger signal cable and the output bias cable both connect to the switch box with BNC connectors InkCAD has the following bias settings and controls Each InkCAD layer can have different bias settings A layer is a collection of one or more InkCAD elements drawn together on the substrate When InkCAD creates a
327. pproach Approach Settings Surface Yalue M 5 000 Surface Deviation 4 2 000 a Surface Value and Surface Deviation are two thresholds that help the system determine when the pen has gotten too close to the sample 1 e that it is into the push past region InkCAD calculates these values automatically If you subtract Surface Deviation from Surface Value you get the amount that the pen has to go past the setpoint to sense that it is in feedback Push past value Surface Value Surface Deviation NanoInk has optimized the relationship between the setpoint and surface deviation and the software automatically calculates these values during a 4 15 2006 Page 337 NSCRIPTOR user manual Page 338 frequency sweep But if you want to understand the details suppose you use these values for Surface Value and Surface Deviation e Surface Value 0 4 V e Surface Deviation 0 3 V e Push past value 0 1 V In an AC mode approach the system senses the surface when the cantilever oscillation amplitude attenuates so that the following is true aie ee Setpoint push past value If the full oscillation amplitude is 0 9 V an attenuation of 45 gives a setpoint of 0 495 V 0 495 is 55 of 0 9 Remember that InkCAD makes the setpoint negative for reasons given in About AC mode s negative setpoint page 330 The system establishes feedback at an oscillation amplitude equal to the absolute value of the setpoint 0 495 V This is t
328. push past movement where the force exceeds the setpoint Excess Force at force setpoint EE Now consider where the reflected laser beam strikes the instrument s position sensitive photodetector In the drawing below the dashed lines show the four regions of the photodetector This shows the locations of the red dot as the pen comes into feedback with the light reflecting off the bending cantilever Surface Value fT 4 Push past Surface br Deviation Ole 1 i Red dot position with Ideal free D pen in air position __ D feedback ofred dot i The pen is in feedback when the red dot returns to the x axis Surface Value and Surface Deviation are two thresholds that help the system determine that the pen has gotten too close to the sample When the pen is in feedback this condition is true Surface _ Surface Valie lt Deviation 4 18 2006 Page 190 NSCRIPTOR user manual Laser red dot alignment Scanner and stage calibration Push back behavior also occurs with AC mode scanning as explained in Appendix C For instructions on performing laser alignment please see Chapter 2 This is the Calibrate sub tab of the SPM setup functions Linearnze Scanner Pun Current Scan A ange 90 00 una Status Idle Home Motors Aun s o oo jum Status Idle aye Scale Sf Full Scale 1 35 um zZ Full Scale 3000 nm Oker 02 um Update i Video Calibra
329. quial term for a piezoelectric scanner The NSCRIPTOR instrument has separate piezos for x and y axis movement There are also three piezos for z movement and one for AC mode piezoelectric A characteristic of certain ceramic materials that expand when you apply electric potential Most scanners use piezoelectric components piranha A name for a chemical solution frequently used to clean pens and substrates A 3 1 mixture of sulfuric acid and hydrogen peroxide it is a highly corrosive solution If you work with it you must use approved protective gloves goggles and lab coats pixel In a bitmapped graphic a pixel is an individual picture element InkCAD s InkMap application converts the pixels in a bitmap to dots in a pattern 4 15 2006 Page 317 NSCRIPTOR user manual Page 318 position sensing photodetector PSPD A light sensor that receives a laser beam reflected off the cantilever In contact mode the PSPD measures cantilever bending probe See active pen pen PSPD An acronym for position sensing photodetector puck Short for sample holder puck push past motion During pen approach the system pushes the pen past the desired pen height determined by the setpoint before sensing that it has gone a bit too far Push past motion occurs in either contact or AC mode scanning R RCA2 A name for a chemical solution frequently used to clean pens and substrates A 5 1 1 mixture of de ionized water concen
330. r Misc fields area E Total Drawing Time 00 02 52 Tabs and toolbar C Dot amp line specification area D Dots amp Lines overview In Dots amp Lines you start by defining a cell containing a pattern of dots and lines As you do this Dots amp Lines updates the cell pattern in the cell preview pane A Then you can create an array of identical cells which appears in the array preview pane B You use the fields in the Array tab to set the number of rows and columns in the array and the spacing between cells The units on the length and size parameters are microns In each cell the module first draws all enabled dots in the order they appear in the window it then draws the enabled lines also in order Note When you define cells keep in mind that you cannot draw beyond the maximum horizontal and vertical scan range of the instrument Your cell arrays should not have a width or height greater than roughly 90 microns Page 212 4 18 2006 Pull down menus Using the Dots amp Lines window About the cell preview pane A NSCRIPTOR user manual You enable or disable dots or lines by clicking in the small checkboxes Enabled inf Cl inf These are the menu options available in Dots amp Lines e File menu O O Load open a Dots amp Lines parameter file from the disk Save save the current dot and line settings file to disk Save As save dot and line settings to a new
331. r active pen arrays Here is the Control tab with an active pen array type selected in the top table Light yellow shading indicates which Active pen settings A field is selected The slider affects whichever variable is selected PenControlh a G E a a Retract Extend Feedback Pen z Status Slew Rate msec Click in here to gt H 1 0 0 017 iv Retracted 500 Click on select one of the I 2 om7 Undefined 500 Extend 3 0 0 017 Retracted 500 d pens You can edit i Actual iheselecled ben s 4 0 007 Retracted 500 Revato ctual or i i pe h 5 0 007 Retracted 500 eee Retract settings in the right o 00m7 7 Retacted 500 I Then drag half of the tab 7 0 0 017 a Retracted 500 this slider t 8 0 0 017 p Retracted 500 IS SHGer tO Arme p am change the Click to retract or value extend all pens in the array Config Control Click to retract or extend Set how quickly you want just the active pens the system to retract and selected in the table extend each pen There are two ways to change the values for Extend Actual or Retract e Click on one of these fields and enter a new value with the buttons or the keyboard or e Click on one of these fields and change the value by dragging the slider up or down The value of Actual initially is the existing hardware reading for the selected pen When you change this field the system applies the new current value Page 302 4
332. r the DPN process this means locating the pen at the exact position of previously drawn patterns before doing more drawing It usually involves coarse alignment followed by fine alignment alignment mark InkCAD has two types of alignment marks coarse alignment marks which appear in InkFinder video images and fine alignment marks drawn on the substrate and scanned prior to fine alignment angstrom A unit of distance equal to one ten billionth of a meter or one tenth of a nanometer approach The use of the motors and the scanner to bring the pen to the substrate and put it under feedback control array reference A repeated group of elements and structure references 4 15 2006 Page 307 NSCRIPTOR user manual Page 308 atomic force microscope A type of scanning probe microscope that senses atomic forces between a pen and a substrate surface to image the surface structure NanoInk s first generation DPN software turned a standard AFM into a nanolithography tool The NSCRIPTOR system replaces the AFM with an instrument customized for Dip Pen Nanolithography available scan range The current physical range across which the scanner can move the pen The size of this space depends on the characteristics of the scanner B bias control An electrical bias between the substrate and the tip which normally causes current to be applied to the surface On NSCRIPTOR systems bias control is an optional feature NSCRIPT
333. ray pitches C In the window s Pitch tab you can view or edit the default distances between pens 2 Default Spacing iw G iw iw iw G iw 4 18 2006 Page 299 NSCRIPTOR user manual Creating a new pen array type Page 300 These are the columns Column Description Pen Each row in this table represents one inter pen gap This column shows the number of the pen to the eft of a gap For example the table s first row describes the gap between pens 1 and 2 In the pen array graphic near the top of the window thin blue stripes appear in the cantilevers to the left and right of the gap selected in the table Default This column indicates whether the pens are separated by the default spacing defined for the type of pen array To set up non default spacing uncheck this column and enter a new value in Spacing Spacing The tip to tip distance between pens in microns For pens with the default spacing this is the same as the Default Pitch in the window s top table To add a new pen or pen array type click on the New button in the Pen Settings window This dialog box appears og 0o00 Number of Pens a OF Cancel Enter the number of pens in the new type If you are defining a single pen type rather than a multi pen array enter 1 nkCAD adds a new pen type to the table Enter a name for the pen array type and provide values for the other columns For a description of these columns see About
334. re do not need to deal with this cable 25 Bias out on the front of the bias Pin connector on bias control puck control switch box for optional and sub miniature phono plug on the bias control feature scanner assembly this is a Y cable Disconnect the scanner assembly cable when not using bias control 26 NS Active USB connector on USB connector on master computer back of instrument for optional active pen feature Bias control is an optional feature If you want to control bias with an external device rather than using the NSCRIPTOR s signal you need to provide your own cables See Bias control on page 50 for more information xx Active pens are an optional feature See Chapter 9 for more information on this This is how the back of the E chamber should look with everything connected BNC connectors Ribbon cable pass through 4 18 2006 Page 47 NSCRIPTOR user manual E chamber sensors The temperature and humidity sensors enter the E chamber through holes on the side Temperature sensor Humidity sensor Nebulizer The nebulizer sits on the back of the E chamber The nebulizer has a switch for its two operating modes bubbling and misting labeled JET on the nebulizer bottle Page 48 4 18 2006 NSCRIPTOR user manual About the NanolInk DPN substrate NanoInk has developed optional samples pre marked with location labels These labels make it easy to find specif
335. rea as shown below On a diving board cantilever deflect the laser beam just above the small pit near the end of the cantilever 3 With the detector knobs move the photodetector so the peak laser intensity is in the vicinity of one of the ideal positions shown earlier in this section Remember that the ideal position is different for contact mode and AC mode scanning 4 Move the detector around that area looking at the Laser Sum value Stop moving the detector when Laser Sum is highest Changing the sample Use the following procedure to change the sample substrate Note If you want to use inkwells do not use this procedure see the Chapter 8 section on placing the sample on the inkwell puck 1 Removing the sample If a sample is currently loaded start by lifting the pen s a distance away from it If the Instrument window is not open open it by clicking on the J button in the main InkCAD window Then go to the Video Motors tab on the right side of the window Set the z motor step size to 300 microns and click on the button to raise the pen s as shown here 1 Set this value 2 Click here See Chapter 6 for more information on these instrument controls Page 32 4 18 2006 NSCRIPTOR user manual If your system has the optional bias control feature and if a bias cable is connected to the puck s dark colored insulating layer unplug this cable Being careful not to touch the pen s slide the samp
336. rmation on SPM scanning This Scan option also zooms in the main window s viewer on the selected region like Zoom Drawing on the substrate When you are ready to draw the DPN pattern load a sample and an ink coated pen or pen array into the instrument if this has not been done already With the sample and instrument ready follow this procedure 1 Ifit s not open already open your pattern file in the main InkCAD window 2 Use InkCal to calculate a calibration coefficient For instructions see Chapter 4 3 In the tree view select the layer you want to draw Chapter 5 introduces you to the concept of layers Thus far in the tutorial you ve been working with one layer patterns 4 Click on the Start Lithography button The DPN drawing status box should appear when you click on this button see The drawing status window for more information on this In addition a printer icon appears in the main InkCAD window see The drawing status icon on page 84 If you want to stop the drawing operation at any time click on the S button Note During drawing if you see an Outputs window open or if you get a message about a serious error please see the Chapter 5 sections on the Outputs window or the error reporter Page 82 4 18 2006 NSCRIPTOR user manual The drawing status window In InkCAD a component called the DPN server initiates drawing on the substrate See Software components on page 3 1 for more infor
337. rome NANOINK T INC w aphy Status Alignment Default Job is in progress Estimated Time left 0 03 05 l Pera i If two or more active pens are extended and drawing together the window lists just the primary pen 4 18 2006 NSCRIPTOR user manual Pen array alignment Each type of active or passive multi pen array has pre defined specifications for cantilever length and width spacing between cantilevers and tip locations Even so there are usually small variations between individual pen tips that make it difficult to draw multi pen patterns with nano scale precision This and the following sections describe pen array alignment or tip to tip alignment directly measuring a pen array s tip locations relative to each other and to the tip of the feedback pen The overall alignment process is similar to the InkFinder translational alignment described in Chapter 6 The system draws a series of alignment marks then makes SPM scans of the regions where they were drawn In the scan images you click on the location of the alignment marks and InkCAD calculates the alignment offsets Array alignment process overview This flowchart shows how pen array alignment works Draw all alignment marks at once Scan area of next alignment mark Mark its location in the scan image All marks measured Done Note If you perform this alignment and then change the pen array type or switch feedback pen
338. ropositioner knobs It might help you to use a magnifier Look for the reflection of the drop on the inkwell Page 260 4 18 2006 NSCRIPTOR user manual 10 When the needle tip is directly over the reservoir slowly lower the tip into the reservoir For a syringe use the out of plane z axis micropositioner knob 11 Stop lowering the needle when you see ink fall into the reservoir 12 Raise the needle away from the puck If you are using a syringe do this with the out of plane micropositioner knob Remove the puck from the ink dispensing kit 4 15 2006 Page 261 NSCRIPTOR user manual Inking part 3 Inking the pen s and returning to the sample About the Inking tab Page 262 This section shows you how to dip the pen or pen array in ink and move it to the sample Before using this procedure you should have moved the pen s over the microwell s see Inking part 1 Positioning the pen s on page 255 and put ink into an inkwell reservoir Inking part 2 Dispensing ink on page 259 You will use the Instrument window s Inking tab to complete the inking process This is how the tab looks when you first open it Toolbar Microwells D VTS IZ g en Notes Remove Move l Microwell Time Pen x Extra Pens r This area 2 lists all current microwell z m marks The basic process here is to capture a still video image showing the microwell s and pen s and then to create one or more microwell
339. rs for processing with heat or chemicals for example Separate feedback and writer pens allow you to scan a drawn pattern with a clean pen thereby reducing pattern contamination You can align new drawing layers with objects scanned on the substrate Multi pattern drawing you can make several parallel copies of the same pattern at once just as you could with passive pen arrays as described in Chapter 8 You could extend one writer pen for each copy you want to make 4 18 2006 NSCRIPTOR user manual Note The NSCRIPTOR system does not support bias control or AC mode scanning with active pens How active pens work This drawing shows the NSCRIPTOR components for active pens You do not need to set up the cables or other hardware yourself Scanner assembly Active pens InkCAD Master Instrument computer not drawn to scale InkCAD sends active pen commands through a USB cable to a circuit board in the instrument The active pen hardware turns these commands into electrical signals sent through the flex cable to the thermal actuators on the various pens in the array The flex cable carries each pen s actuator signals to the attached active pen array Top side Bottom side ae lm Safe region ctive pens Q see below are here d Pens i nanolNK Connector CAUTION The active pens at the narrow end of the flex cable are vulnerable to breakage Handle flex cables carefully and
340. s Each NSCRIPTOR ships with a pen clip to hold pens in the instrument and a set of pre inked pens for you to experiment with If you chose the optional multi pen feature you also should have some multi pen arrays If you asked for the optional inking feature you get some inkwell chips and a sample holder puck that supports inking Other optional items include an air compressor connected to the air table and an air gun for blowing dry nitrogen on samples and pens About the instrument The microscope uses a 2 sample holder puck and its piezo element provides a scan range of about 90 microns This drawing shows some of the instrument s key components Zoom motor Adjustable lens collar rane L Laser adjust Ae knobs Photodetector adjust knobs we Scanner eee gi rotation knob A ls for pen Pe exchange Z motor 1 5 De Z motor 2 E LE Scanner Z motor 3 body The three z axis motors allow the leveling of multi pen arrays The x and y axis motors move the stage and they are located under the stage 4 18 2006 Page 27 NSCRIPTOR user manual Instrument operations The following sections contain procedures for several common operations related to the DPN stage Startup sequence Startup sequence Laser red dot alignment page 29 Changing the sample page 32 Replacing pens page 34 Mounting new passive pen s in the pen clip page 41 Approaching the sample page 42 Adjusting th
341. s These are the path properties Property Description DisplayStyle This item controls how InkCAD displays information about the line either by line width or drawing speed Please see About the line display style on page 137 for information about this property Page 138 4 18 2006 NSCRIPTOR user manual Property Description LineWidth The desired width of the lines in microns Points You can click on this property to see information on the path s line segment endpoints See Working with the Points property Printable This property determines whether InkCAD draws the path when drawing the current layer Please see Printable visible settings page 136 for more information Repeat The number of times you want to re draw the lines in the path Repeating lines can sometimes ensure that they are drawn without defects It also may increase the width or thickness of the lines A Repeat of 0 tells InkCAD to draw the lines once Speed This is how fast the pen s will move in microns per second while drawing the line If you change this value InkCAD automatically recalculates the LineWidth Visible This property determines whether InkCAD displays the path in its window Please see Printable visible settings for more information LayerNumber This indicates which layer the path belongs to StructureDefault If this is True the element inherits the layer number from the layer and you can t change LayerNumber If it
342. s from crashing into larger topographic features and it allows the pen tip s to smoothly track the sample surface In addition this very feedback response voltage is best calibrated for topographic measurement Thus AFM topography images are typically not a direct measure of cantilever deflection Instead they represent the z voltage response of the piezo scanner as calibrated for feedback topography System operators select a pre determined amount of cantilever deflection while scanning This specific deflection is the setpoint As the cantilever scans the surface and deflects negative feedback minimizes the deflection to keep the cantilever bending force equal to the setpoint This 1s constant force mode In reality the feedback process is imperfect and deviations from the setpoint create a separate signal called the error signal which usually contains high frequency information representing fine structure on the surface as well as some noise Constant force contact mode has historically been the preferred method for performing DPN operations However that is not always the case see AC mode on page 1 21 for more information Two types of components cause the sample to move relative to the pen tip s the x y translation stage Sometimes with motors as described later in this section and the piezoelectric scanner The scanner is the active device that provides high resolution positioning Most piezo scanners are composed of tubular
343. s you will need to repeat this alignment before drawing your pattern 4 18 2006 Page 293 NSCRIPTOR user manual Array alignment procedure Page 294 Use the following procedure to align a pen array Before starting the procedure you need to open the Instrument window select the pen array type you want to use and select and ink the appropriate pens l Go to the Align Pens tab and click on the Start Alignment button For active pen arrays InkCAD extends all selected pens The system draws alignment marks with the selected pens displaying this status message Alignment Procedure Drawing alignment marks for Pens 7 6 When it finishes drawing all the alignment marks at once InkCAD immediately begins performing an SPM scan for one of them Alignment Procedure Scanning press Stop Scan for early image completion Curent Fen 1 of 2 Scan Offset 3 00 0 00 Size 6 50 Stop Scan Cancel Alignment On the left side of the Instrument window the SPM Images tab opens displaying the standard set of contact mode scan images These images have the controls described in the Chapter 6 section on SPM scanning you can enable or disable the auto range feature open an image in its own window right drag over a region to start a new scan modify the color range etc You can also modify the scanning parameters in the SPM Controls tab on the right side of the Instrument window When the scan is done you shou
344. s awe we Working with IA images When you open a scan image file in JA the application displays a small version of it in its window 1 C scans 6 J x and y scan dimensions and maximum Z height x You can view several scan files at once To expand one to the full size of the IA window click on its maximize button IA ADTA l DOG Maximize You can use IA s Window pull down menu to select scan images Page 236 4 18 2006 NSCRIPTOR user manual About the pull down menus These are the commands in IA s File menu e Save Image Use this option to save the currently selected image to disk e Open Image Opens and displays a scan data file with a sur extension from disk e Print This option prints either the currently selected scan image window or the entire IA window and all open scan images e Clipboard This copies a graphic to the Windows clipboard either the currently selected scan image window or the entire IA window e Reserved These options are normally used only by NanoInk support representatives e Exit This closes the IA application The commands in the Process pull down menu are mostly the same as the toolbar options described earlier line profile histogram etc The options available from the Display menu are e Contrast amp Brightness This alters the appearance of the image as described in Controlling contrast and brightness page 244
345. s each dot draws faster This can lead to significant time savings on dotmaps with hundreds or thousands of dots e Don t withdraw the pen s between dots This also speeds up the drawing time for each dot To turn off pen withdrawal disable the Lift pen s btw drawn objects field in the layer properties The tradeoff for this is that some ink may be deposited on the substrate as the pen moves from dot to dot If you want to select colors in the InkMap options that match the bitmap s colors this is usually easier if your bitmap contains only commonly used colors such as the default colors in the Windows Paint application If your dotmap has a large number of dots the preview image may appear dithered due to a moir effect between the pixel grid of your screen and the regular arrangement of the dots To avoid this effect you may resize the InkMap window by dragging its corner The content of the InkMap window will scale proportionally This issue does not affect the way the dotmap appears on the substrate 4 18 2006 NSCRIPTOR user manual Analyzing scan images Chapter 6 describes how to take scanning probe images and save them to disk If you save them in the sur format you can use NanoInk s IA Image Analysis application to study them Double click on this icon to open the Image Analysis program nm Manolnk 14 This is the IA application with a scan image open DODA un V 0084 un D257 um Using IA This
346. s field to browse to a different directory Enable Logging This field enables or disables InkKCAD event recording Enable Stage You can enable this item if you want the stage movement During controls while in feedback In normal operation the controls are Feedback disabled whenever the pen is in feedback which helps it keep the pen in feedback Override Range If you have enabled the previous item so that the stage controls work when the system is in feedback then this is the maximum move distance in microns Reset to Default Click on this button to reset all values in this tab to their factory button settings Inking tab The fields in the Inking tab affect inkwell dipping operations Please see the Chapter 8 section on inking options for more information InkCAD tab Field Description View Axes This item enables the display of x y axes in the main InkCAD window and in the Dots amp Lines and Lattice modules View Grid as If you want the main InkCAD window to display grid markings select Points or Lines If you do not want grid markings select None This also disables InkCAD s snap to grid feature Bottom left The X1 and Y1 fields are the horizontal and vertical coordinates corner X1 and for the lower left corner of InkCAD s grid if enabled This grid is Y1 not necessarily the same as the available scan range Top right The horizontal and vertical coordinates for the upper right corner corner X2 and of InkCA
347. s force can pull down more flexible cantilevers into the contact mode regime AC mode s negative setpoint is a potential source of confusion In AC mode a setpoint of zero would cause full attenuation of the pen vibrations pushing the pen tip into the sample surface This defeats the purpose of AC mode so AC mode setpoints must be non zero In keeping with the convention of the contact mode red dot display the NSCRIPTOR s AC mode behaves like contact mode in some respects In contact mode a more negative setpoint 1 e one with a higher absolute value moves the tip farther from the surface That s also how it works in AC mode setpoints are negative and a more negative setpoint moves the pen farther from the sample For this convention to work in AC mode it 1s necessary to reverse the red dot movement in the Instrument window s Align Laser tab When you turn the microscope s alignment screws it moves the red dot in the opposite direction from contact mode The pen should be 50 100 microns above the surface to perform a frequency sweep The purpose of the process is to get the current cantilever s optimized values for these key AC mode variables which will then be used in AC mode scans e Drive amplitude This is the voltage delivered to the AC mode piezo This voltage drives the cantilever oscillations e Setpoint This is the baseline oscillation amplitude during an AC mode scan with the pen in feedback expressed in v
348. s is to measure the areas of the dots and the width of the lines as drawn From this data InkCal characterizes how the ink diffused during the test Page 104 4 18 2006 NSCRIPTOR user manual The dot line measurement process Default element selection order If you want to analyze a scan previously saved to disk go to the window s Image menu select Load and specify a file to open You can also save a scan image to disk by going to the Image menu and selecting Save As Although the normal method is to measure the scanned test pattern objects InkCal also lets you manually enter dot area or line width values into the dot and line tables Simply click on a value in the Area or Width columns and enter a new number The basic method is to overlay outlines on the scanned dots and or lines as close to the actual size and thickness as possible For example you will measure a dot with covering it with a circular outline of the same size Scanned Dot dot outline With dots you need to create move and adjust an outline until it precisely covers a scanned dot For a line you place vertical boundary lines at either side Measurement boundaries Scanned line As you set the size of a dot outline or place measurement boundaries around a line InkCal updates the dot size or line width in a Results area on the window The process in InkCal part 2 is to select a dot or line measure its size or thickness store the results and move t
349. s itself to magnets in the scanner assembly This holds the active pen array in place for DPN Before you can load a new pen or pen array into the instrument you first need to remove the old one from the pen clip Then you can place the new pen array into the clip and load the clip into the instrument This section shows you how to replace a pen in the clip This section applies only to passive pens manufactured by NanoInk Active pens and third party pens do not use the pen clip The pen clip has a piece of metal that acts as a spring to hold the pen s in place Spring Cantilever Clip You will use a custom mounting block to hold the pen clip while changing pens The mounting block has a rotating cover Here is the block with a pen clip inside it Rotating cover _ gt Pen clip This is the procedure for replacing a pen or pen array in the clip It assumes you have already removed the clip from the instrument as described in Replacing pens on page 34 1 Rotate the mounting block s cover up and back to give you access to the block 4 18 2006 Page 41 NSCRIPTOR user manual Approaching the sample Page 42 Note 2 There is a small hole on one side of the pen clip Place the clip onto the mounting block so that the small pin on the block goes into that hole 3 Rotate the mounting block cover back over the clip and press down lightly on the cover This lifts the clip s metal spring Use tw
350. s not intentionally make contact with the surface Thus a bulk cantilever deflection does not create a sensor signal for feedback The signal the instrument uses to control pen height above the surface is the variation of resonance amplitude The system effectively measures amplitude demodulation of the laser on the photodetector The AC mode cantilever may also vibrate to measure the force between the pen and the surface during a scan When the pen is in feedback the setpoint is some percentage of free air resonance In other words the system demodulates the resonance to a constant value This process is like that of a simple dampened oscillator where a pen resonance phase shift can show the mechanical response of the tip sample interaction In fact phase imaging 1s a popular AFM method to image the structure of heterogeneous surfaces Phase imaging can examine the material content of the DPN patterns Phase imaging is to AC mode as LFM imaging is to contact mode ameans of surface material sensing It often provides the highest quality images even when working with non fragile inks that can tolerate contact mode scanning The NSCRIPTOR system does not support AC mode scanning with multi pen arrays or active pens For more information on AC mode see Chapter 6 and Appendix C 4 18 2006 Page 21 NSCRIPTOR user manual Bias control The NSCRIPTOR system supports an optional bias control feature 1n which the stage applies a user s
351. s that the pen is at full speed before data collection begins The range of values is 0 127 and the recommended value is 100 Note The higher this value is the faster the pen moves for a particular scan rate Prescan Lines is the number of scanning passes you want the system to take before starting to collect image data Enabling Nonlinear Image Correction tells InkCAD to perform a factory set adjustment on the x and y coordinates for imaging and lithography operations You should normally have this parameter enabled Enable Acquire Auxiliary 1 Channel if you want the scan to include an extra forward and reverse channel This item only works with the instrument simulator Enabling 2x Topography Gain doubles the z axis resolution on topography scans though it also cuts the z range in half The Surface Value and Surface Deviation parameters control the cutoff and threshold settings respectively for changes in the z axis error signal during approach In AC mode InkCAD calculates their values automatically In contact mode you can adjust these values to aid the pen approach process The Surface Value is the target value for the error signal to indicate that the pen or pen array has reached the surface The recommended value is 2 5 V the default value is 5 Surface Deviation is the acceptable error margin for the surface value The recommended value is 1 4 5 V and the default value is 4 5 For more information on Surface Value and
352. s the bias to 0 when the pen replacement process begins Below is the procedure for replacing a pen or pen array 1 Removing the pen or pen clip Start by opening the InkCAD Instrument window s Video Motors tab Click on the Exchange button to lift the pen s away from the sample puck a E schange InkCAD displays this small window Z E Fress the Stow button to initiate the tip exchange procedure It uses the z motors to lift the pen s when you click on Stow The Stow button also changes to Restore However don t click on it until told to do so later in this procedure Page 34 4 18 2006 NSCRIPTOR user manual 2 Being careful not to touch the pen s slide the sample puck towards you and then lift it up out of the groove that holds it on the stage 3 Turn the pen exchange knobs on the side of the scanner head down away from you 1 4 turn The scanner head should slide out a short distance The laser shuts off automatically as you do this 4 Grasp the handles on the front of the scanner head and gently slide it all the way toward you 4 18 2006 Page 35 NSCRIPTOR user manual 5 Carefully rotate the scanner head up 90 degrees t PErmited aperture N55 This 6 Removing the pen or pen array This step is different for passive pen s and active pens e For passive pen s Use a pair of tweezers to remove the pen or pen clip If you will be loading a NanoInk manufactured
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354. signed a multi layer pattern in the main InkCAD window before you Start this procedure l If you have saved your DPN pattern in a disk file open it by going to the File menu selecting Open and navigating to the file location If you have not loaded your active pen array do so with the instructions in Chapter 2 Also if you want to use any previously saved alignment data for example to align with surface features or patterns drawn earlier on the substrate open the Instrument window unless it is already open Then go to the File menu choose Open Image Database and choose an image database Select the active pen array type Open the Instrument window if it is not already open Go to the Align Pens tab on the right side of the window Look at the array type indicator just below the toolbar If this is not the type of array you loaded select a different type with the procedure in Changing the pen array type page 287 Identify the feedback pen In the table in the top half of the Align Pens tab look in the Feedback column to see which pen is currently designated as the feedback pen Feedback lw M E If this is the pen that you want to use as the feedback pen skip ahead to step 8 Otherwise click on the Pen Settings button to open the pen settings window which should look something like this re j Mariik fuckers Pie Handink Ace Pan 1 2 a 4 3 t q 4 18 2006 Page 289 NSCRIPTOR user ma
355. solve surface features at the nanometer scale The standard modes of atomic force microscopy AFM operation are merely means of characterizing a sample With the introduction of the NSCRIPTOR system NanoInk has turned scanning probe technology from analytical microscopy to a dedicated drawing tool Nanotechnology involves actively building nanoscale components preferably from the bottom up The Dip Pen Nanolithography method is a true bottom up nanofabrication process Scanning probe microscopes and nanolithography methods have developed rapidly over the last decade Early work focused on high density data storage solutions and developing a means to shrink current integrated circuit dimensions down to a smaller unit size In these areas nanolithography methods attempt to compete with and replace current technologies The DPN process however has the unique advantage of offering a direct method for delivering various molecular species onto a single surface in one experiment Moreover it can selectively place these molecules at specific sites within a particular nano structure or larger device Such a technique offers many new and uncharted experimental possibilities DPN techniques apply to a variety of major scientific fields such as creating protein nano arrays in the growing field of proteomics making templates for nano crystal growth in biotechnology and optics research depositing material onto semiconductor substrates for the electronics i
356. ster ini file for IA program 237 meniscus 14 methanol 323 324 325 MHA commonly used DPN ink 323 microchannels on inkwells 247 269 micropipettes for filling inkwells 250 259 See also ink dispensing kit micropositioning controls in IDK 250 microwells See also inkwells aligning pen arrays to 264 introduction to 246 marking position of 262 265 pictures of 247 Mirkin group 14 misting nebulizer mode 48 models for inks See ink models moir effect 234 Molex connectors 54 monitor video See video monitor monitors in system 26 MOTORS connectors 45 NSCRIPTOR user manual motors in instrument as an aid to pen positioning 20 homing the motors 191 how they affect alignment 206 location of 195 movement range of 248 moving manually 169 195 resetting z motor limits 276 mounting block for pen clip 41 Mouse fields in Instrument window 194 Mouse Position screen item 61 mouse wheel 107 Move Above Sample Inkwell 172 257 267 Move To pick list 172 moving an NSCRIPTOR system 45 moving elements 148 MPAs See multi pen arrays multi ink DPN 99 123 multi pen arrays See also active pens pens adding new pen array types 300 alignment procedure for 293 and AC mode scanning 22 and bias control 50 arrays shipped with system 27 configuration parameters for 297 configurations possible 270 deleting pen array types 301 dipping into microchannels 269 graphical representation of 297 introduct
357. t already connected Then insert the puck bias cable into the pin hole like this Fress the Restore button to return to the original position 7 atop i SS When the Restore button changes to Stow you can close this window by clicking on the X button 19 Tell InkCAD which type of pen or pen array you just loaded With the Instrument window still open go to the Align Pens tab and click on the Pen Settings button This opens the Pen Settings window described in Chapter 9 You may now approach the sample and put the pen s into feedback control see Approaching the sample on page 42 About the active pen flex cable These pictures show both sides of the flex cable Top side Bottom side Safe region Active pens see below are here Pens Page 40 4 18 2006 NSCRIPTOR user manual CAUTION Mounting new passive pen s in the pen clip Note The active pens at the narrow end of the flex cable are vulnerable to breakage Handle flex cables carefully and do not touch the cable end marked as the pen location above Use the safe region shown above to hold the cable at the narrow end Also do not put the flex cable down on a surface with the bottom side up i e with the connector visible as this will break the pens You hold the tab at the narrow end to position it on the instrument s scanner assembly The metallic wedge on the underside of the narrow end attache
358. t bias 1 V K N A Waiting at park Moving pen position moving to between elements drawing coordinates n gt Time Bias If bias control is enabled and you stop DPN lithography by clicking on a STOP or Emergency Stop button the system sets the bias to the rest bias as it stops drawing Rather than providing bias control from the microscope you can do it from an external voltage or current source such as a power supply not provided by Nanolnk You might do it this way if you want to use more complex bias voltage patterns than InkCAD s positive rest and lithography bias values For example you could program an external device to oscillate the bias during lithography 4 18 2006 Page 51 NSCRIPTOR user manual Notes Bias control hardware and equipment Bias control switch box Page 52 The switch box has two connectors for the external device The first is for the bias signal from this device The switch box routes this signal to its output bias cable For the second connector the switch box routes the input bias signal from the instrument directly to the other device You can use this as a trigger signal that tells the external device when DPN drawing begins and ends This drawing shows the connections Input bias signal Trigger signal BEBE EES signal device When DPN drawing begins the input bias signal from the microscope changes from the rest bias value to the lithography bias When this change re
359. t patterns to draw containing dots only lines only or both The Dots and Lines pattern is the most sophisticated because it draws both dots and lines in the same operation It also gives you control over the exact coordinates of the dots and lines Dots and Lines pattern Calibration Wizard ee ee Test pattern ayer to Calibrate i Select the next layer E preview A you plan to draw i E ae oe oe A le l Integral Gain 5 Litho Mode ConstantForce j l Park Coordinates 40 40 o D Lithography e par ameter S B J l Positioning Speed 20 Retract Setpoint 10 gt O Setpoint 0 Z Piezo Extend 10 l Z Piezo Retract 0 l E ZControl l l l l Approach Penfs False j l Calibration pattern _LittPenfsiaterLiFatse _ lt f 24 93 type dots only csitrsionPatem C Des C Lines assais I Besetiodelat General pattern lines only or both l Pattern Generation Settings k parameters C x Offset Y Offset Length Repeat Spacing Increment Dw Time Speed 30 2 0 2 25 A dl E E A E E E Click here to omit all dots or all lines Disable All Dot specifications from test pattern E and the preview I Disable All This does not affect I the Enable settings i ipi i gt 0 2 5 0 4 5 0 1 0 v Line specifications I AA ETE Ca F I 3 25 3 45 of 0 M l 0 8 0 vV Click here to draw the gt GO E test pattern EE am a ene eee Drawing Time 0 2 5 InkCal status messages Estimated test patter
360. t scanning Any method of imaging a substrate by oscillating a cantilever above the surface without touching it AC mode is a non contact scanning mode NSCRIPTOR A NanolInk product that provides a complete integrated environment for DPN work NSCRIPTOR is a type of DPNWriter O ODT Shorthand name for octadecanethiol commonly used as a DPN ink oscillation amplitude In AC mode imaging this is the bottom to top distance moved by the pen as it vibrates See also full oscillation amplitude target oscillation amplitude P paper In DPN this is a colloquial term for the substrate parallel pen array A parallel arrangement of multiple cantilevers 4 18 2006 NSCRIPTOR user manual park Moving the pen to a set of coordinates for example before or after DPN drawing passive pen A pen that is not an active pen that is its cantilever does not bend down toward the sample on command path An InkCAD element that consists of one or more connected lines pattern A collection of drawing objects already drawn or to be drawn on a substrate with the DPN technique pen The instrument component that deposits ink on a substrate in the DPN drawing process A pen consists of a cantilever and a tip phase imaging A scanning method that is active in AC mode Readings are driven by the phase detection component of the cantilever resonance signal photodetector See position sensing photodetector piezo A collo
361. t side of the Instrument window First click on the Move Stage ON button to allow the stage to move Then in the Move To pick list just to the right select Move Above Sample Move Stage ON OFF Sample Loading Move Above Inkwell Previous Position Next follow the instructions in Leveling a pen array page 272 to level the array to the sample 4 18 2006 Page 257 NSCRIPTOR user manual Page 258 10 If the pen or pen array is currently over the sample move it to the inkwell First make sure that the Move Stage ON button is pressed Then select Move Above Inkwell in the Move To list just to the right Move Stage Sample Loading Move Above Sample Previous Position The system moves the pen s over the inkwell 11 If you are using a multi pen array and you plan to level it relative to the inkwell rather than the sample follow the instructions in Leveling a pen array page 272 to level the array to the inkwell 12 In the live video identify the ink microwell s you want to use The inkwell data sheet shows the inkwell chip layouts Remember that you will put ink into reservoirs and dip the pen s into the microwells 13 If you are inking a multi pen array use the stage and video controls to find the desired microwell s on the video monitor Iteratively rotate the puck and translate the stage until the pen array is parallel to the microwell array You might find it easier to do this with the laser off Yo
362. t the objects appearing in the new tree For more information on this please see Chapter 5 s section on propagating changes from views Create a new layer with a clean background 1 e not showing elements from other layers For more information about layers see InkCAD objects on page 64 or look in Chapter 5 Create a new layer using the current view as a background This lets you see elements from other layers though you can t select or edit them without opening a new view for the other layer Create a new structure For information about structures please see InkCAD objects on page 64 Display the complete document tree Depending on what you selected when you created a view the tree view might only show a portion of the whole document structure Click on this button to show the entire document in the pane This does not create a new view though Open a new view by selecting an object and clicking B Open the tree view options menu which can help simplify or de clutter the appearance of the tree You can enable or disable the showing of several types of objects in the tree view only these settings do not affect the view or Structure Designer windows e Show Elements Enable this if you want elements to appear in the tree e Show Printable Enable this to have the tree show elements that would be drawn on the substrate more specifically whose Printable property is set to true e Show Visible Enable this to
363. t window s InkFinder tab you can start the alignment wizard by clicking on the New Alignment button Alignments Hew Alignment If this button is disabled it s likely that you already have done an alignment with the current image database There can be only one alignment per image database Create a new database from the File pull down menu The wizard does not run in a separate window Instead it runs in the bottom half of the InkFinder tab This area gives Save Alignment Site instructions or describes the next Fress Metto take the system out of feedback step and withdraw 5um to save a video image ofthe area Since the alignment is performed in a wizard that displays instructions and or other information at each step in the process this document does not give a detailed explanation of how to perform the alignment But there are some things to keep in mind during the alignment process e Before starting the alignment you must have the laser on with a good red dot signal You can enable the laser and check the red dot location in the Instrument window s Align Laser tab Page 206 4 18 2006 NSCRIPTOR user manual Bookmarking substrate locations You will see lt lt lt and gt gt gt notations in the wizard These are arrows pointing to where you should take the next action lt lt lt directs you to click in the left half of the Instrument window while gt gt gt tells you to do it in the liv
364. t you want to include in the cell Page 214 4 18 2006 Lines tab Column NSCRIPTOR user manual Description Y Diameter Dwell Time In this column enter the x horizontal coordinate for each dot relative to the cell s center rather than the origin of the available scan range shown in the array preview pane This is the y vertical coordinate for each dot relative to the cell s center Either the desired diameter of each dot in microns or the dwell time the number of seconds for the pen to stay stationary as ink diffuses to form a dot Click on the toolbar s rightmost button to select which parameter appears in this column In this tab you can set up the lines that appear in each cell The following fields are available for each line Column Description Enabled XI Y1 X2 Y2 Width Speed Repeat Check the box next to each line you want to include 1n the cell In this column enter the x horizontal coordinate for a line s starting point relative to the cell s center rather than the origin of the available scan range shown in the preview pane This is the y vertical coordinate for a line s starting point relative to the cell s center The x coordinate of the line s end point relative to the cell s center The y coordinate of the line s end point relative to the cell s center Either the desired width of each line in microns or the scan speed of
365. tacertbae ie hct en U conned T tates 178 SEM sePiene E on tecnelclne ceca ee eee cece 186 General THSCUIMENE SECU irene a a 187 Laser reddo a He nmEN sensara 190 Scanner and stage caliDralon sosise e aiaa a ETa EET 190 Frequency sweeps AC Mode SCUUP sre silo shone a a 191 Using the video and misc motor controls enessssssseoeeessssssseeressssssseeerssssssseeeessssssss 194 Miascellaneous video controls 55sec assess ieii A oaeeasectas 199 Uomo MES FM CONTO S renna A E E T E EETA 199 Usma NGC E a a a a E saauoaanepcavonssenkoe 199 About the MkEmder brese e a sedate 200 EEA E EEE EE E EE EEE E E E E E 203 Perrormine amale imne heee a E A A E A 203 Bookmarking substrate locations cccccssessseccccccceeeesseecceceeeaaseeseeceeeeeeasaeeseeeees 206 INSUPUMIENE window INENUS seeren E eden 208 Chapter 7 Using the other InkCAD modules cc cccccesseeeeeeeeeeceeeeeeeeeceeeeeeaeeees 211 Usme Dos Gz LING zene ceensencteanaeicesenra hcewansdesumehatanteas ne apeaceasebaneancumeActuateanaahoneeAceaatens 211 DOS So Lines OVERVIEW aie ster aceczstetietincadidaidabusatesnadeansterhe a E casensteec tees 212 Using the Dots hc Lines WINdOW axon tiieces saat teneensvaauanesnanstqnsclendanaednepowtiveseaceraaaeoaiadals 213 Usm E E ea E a os acesunasaan oouceuee 219 What LCE dOE Sasken a a mn veotiueeee 219 FOWO E a a Maree etn een Mere yerenrr ye Rare tree 220 Usm ENIO W ONG sei EA ae ia sosaca bene tinuedeasaagnesioman AERE 223 4 1
366. tant location on the sample Later when the pen or pen array is over a different part of the substrate you can quickly and easily return it to the bookmarked location Some examples of when you might find this useful If you have a smooth featureless sample you might intentionally scratch its surface to make it easier to find patterns and perform coarse alignment You might want to make several scratches draw near them in different experiments and move the pen s back and forth between locations Bookmarking helps you do this You can make a map of the substrate by capturing still video images of its corners or the edges of a region you plan to use This lets you easily tell where the pen or pen array is on the sample at any given time you 4 15 2006 Page 207 NSCRIPTOR user manual Setting and using bookmarks Page 208 can zoom out in the Stage Control tab until one of the still images appears You can also use this to avoid defects scratches and problem areas on the substrate This example shows several still images in the Stage Control tab Stage Cortal SPM images SPH Setup Tiori Potten a t BR Soto Nowe Stage Kum G Speed on OFF ROA uve MER PE Same M Nosio J gt A Pu 7 o oy I A g m aan e You may want to experiment with inks that would not work well in inkwells if they are too hydrophobic for example To ink pen s with such an ink you could simply put a dro
367. th the Linear with offset ink model the ink calibration process determines the current contact diameter for dots and or contact width for lines These values are essentially the minimum feature sizes for the current pen ink and environmental conditions If the contact diameter or contact width is larger than any of the dots or lines you re trying to draw this message appears You can see the InkCal calculated Contact Diameter and Contact Width by looking in the layer properties and clicking on all the LX buttons in the Ink section The contact diameter and contact width can be different each time you 4 18 2006 Page 162 NSCRIPTOR user manual About the error reporter Click here to save error information and optionally e mail it to NanolInk technical support run InkCal and they are affected by the pen type ink properties and environmental conditions humidity and temperature If you see these messages try modifying the pattern design so that no dots are smaller than the Contact Diameter and no lines are thinner than the Contact Width If this doesn t help or you don t want to do that try changing to a different pen or different type of pen You can also try to modify other experimental conditions such as the contact force the setpoint in the layer properties or DPN options and the humidity inside the environmental chamber in the E chamber control application described in Chapter 2 If a serious pr
368. that there are currently no ink definitions saved in the ink database Here s how the window looks with one of the definitions expanded 9o99 A JS Ink 3 Saved 4 71 20 Calibration Parameters I Ae 2004 11 04 E Ink Model Linear El Line w O 056 7 w Line Diffusion Co 0 056 um s El Dot A 0050 t Dot Diffusion Coe 0 050 umts Description Saved 472172004 11 0 Name Ink 3 2 Ink 4 Saved 47217200 Delete Cancel Select the ink you wish to import by clicking on its number Then click OK to return to the main InkCAD window Once you have put ink definitions into the global ink database these inks are always available to you However the system only adds an ink definition to the ink database when you request it as described in InkCal part 3 Fit to a curve and display the results on page 110 4 18 2006 Page 91 NSCRIPTOR user manual Ink properties The ink properties appear in a few places the document and layer properties the dialog box in which you load an ink definition from the ink database and two of the InkCal dialog boxes E Ink Ink 4 a Hame Ink 4 Calibration Parameters Description i E Ink Model Linear El Dot A 0 050 t Dot Diffuzion Coefficient 0 050 umts E Line w 0 050 7 w Line Diffuzion Coefficient 0 050 umts Repeat Model Stacked El These are the ink properties Property Description Name This is the name of the current ink usually an abbreviation of the chemic
369. the Start of the scan Y offset 27 532 uri Click on the Instrument window s Scan button on the right side of the window to begin the scan The left side of the window shows various images as the system scans the test pattern When the Scan button is re enabled the scan has finished Pick the image that shows the drawn features most clearly typically this is one of the LFM images Select that image by clicking on its title bar where the name of the scan channel appears turning the title bar blue grey Important Go to the Instrument window s File menu and select Close and Update This closes the Instrument window and passes the selected image back to InkCal Uf you close the Instrument window in any other way InkCal will not receive the scan and the ink calibration will not proceed InkCal should show the chosen scan Dran Gow a2 aj Mivthe ire aie Part 1 of the InkCal calibration process is now complete Proceed to InkCal part 2 Analyze the test pattern page 18 This upper right corner of the InkCal window shows an approximation of how the test pattern will look when drawn The dot sizes and line widths in the preview are based on the current calibration coefficients i e the coefficients calculated the last time you ran InkCal The drawn pattern might look different from the preview 4 18 2006 Page 101 NSCRIPTOR user manual Lithography parameters B Below Layer to Calibrate InkCal displ
370. the bias control feature while doing DPN drawing Lithography The layer specific field for this variable is Control Bias in the layer properties See page 128 for more information Rest Bias This is the default bias value in volts when not doing lithography This field may not have a negative value Take care when using a non zero value When the bias control feature is enabled the system applies the rest bias at all times except during lithography The layer specific field for this variable is Rest Bias in the layer properties See page 128 for more information Lithography The default bias value in volts when doing lithography This Bias field may not have a negative value 4 18 2006 Page 157 NSCRIPTOR user manual Item Description The layer specific field for this variable is Lithography Bias in the layer properties See page 128 for more information Reset to Default Click on this button to reset all values in this tab to their factory button settings Apply to button Click on this button to apply your changes in InkCAD without exiting from the DPN options See About the Apply to button on page 155 for more information General tab Field Description Data default This is a directory specification for where the InkCAD code data directory and script files are located Use a value of Gust a dot for the application s current working directory You can click on the small button next to thi
371. the feedback pen Note though that this still might not solve the problem See Pen ranges page 282 for an explanation of how selecting multiple pens shrinks the effective scan range 4 18 2006 Page 287 NSCRIPTOR user manual Active array drawing process Drawing all at once Page 288 This section describes the overall method of drawing with active pens This flowchart summarizes the process Open DPN file Load pen array amp select in software Select feedback and writer pens Prepare for drawing load sample align laser apply ink etc Use InkCal to calibrate inks Perform active pen alignment Verify pen to layer assignments Navigate to drawing site amp draw pattern Done Once you are ready to draw your pattern there are two ways to do it e Layer by layer assigning a pen to a layer drawing the layer assigning a pen to the next layer etc e All at once assigning pens to all layers in the DPN file then drawing them all in one operation The choice between these methods depends on your application The second method is useful if your pattern is large and would take a long time to draw or if it has a number of layers Keep in mind though that you would need to ink all pens before using the second method 4 18 2006 NSCRIPTOR user manual Active array drawing procedure Follow this procedure to draw with active pens NanoInk recommends that you already have de
372. the minimum and maximum values This makes the next sweep will be a full range sweep Click on this button to set the Drive Amplitude of the AC mode piezo to vibrate the pen at the target amplitude If you are running a manual frequency sweep do not use this 4 15 2006 Page 339 NSCRIPTOR user manual Fields affected by frequency sweeps Page 340 Item Target Oscillation Amplitude Auto Set items Auto Set button Drive Frequency Offset from Peak Setpoint at Mark Below Full Oscillation Amplitude Description button until you have clicked on the Auto Set button This is the desired peak vibration amplitude for AC mode scans not the drive amplitude for the AC mode piezo Click on this button to have InkCAD compute a new Drive Freq and Setpoint based on the displayed frequency sweep data and the settings of the two fields below The best way to make sensitive AC mode scans is to pick a drive frequency a certain percentage below or above the peak amplitude frequency This field is the percentage to use A negative value selects a frequency below the peak while a positive one selects a frequency higher than the peak This is the percentage to reduce the full oscillation amplitude to establish feedback This allows the system to compensate for amplitude attenuation as the pen moves from free air to the surface The goal of a frequency sweep is to find good values for the Drive Amplitude Setpoint a
373. the pen or pen array types A on page 298 When you finish entering new values in the top table be sure to also make settings in the Pens and Pitch tabs in the bottom half of the window gt eee 4 18 2006 NSCRIPTOR user manual Deleting a pen array type A pen settings error message Using the Control tab Heat and active pen operations If you want to delete a pen or array type from the top table select it by clicking to the left of its name so it s highlighted Then click on the Delete button InkCAD responds by asking you to confirm the deletion G X You are about to delete an Array and all its Settings Do you want to proceed i Cancel Click on OK if you want to delete the selected pen or pen array type You might see this message when you close the Pen Settings window Before closing this window you need to select a pen array as the current one Please mark the Current column For the pen array you want to use This message says that none of the pen or array types is now marked as the Current one This normally happens for one of these reasons e You have de selected the previously checked Current box without checking another box in that column or e You have not completed the process of selecting another pen or array type as the Current one To change the Current setting to another type you need to click twice on the new checkbox and then click on the pencil icon to the left
374. the previous drawing location Previous layers drawn New pen in this region va location Required correction Rotational alignment If you move or remove the sample puck between the first and second alignment phases you need to apply a rotational alignment in addition to translation This is because the sample normally ends up with a different orientation For NSCRIPTOR s rotational alignment you must specify the location of two sample surface features before and after moving the puck Translational New correction reference needed feature location Original reference Rotation feature angle location H alignment mark The angle 4 is the amount of counter clockwise rotation from the horizontal axis There are a couple of 8 related fields in the InkFinder tab 4 18 2006 Page 205 NSCRIPTOR user manual Using the alignment wizard You should generally only start the alignment process after performing an SPM scan in the SPM Images tab If you have not made a scan since the current image database was created this message appears A There is no SPM image would you like to sawe a wideo only alignment Cancel It is an unusual thing to do but if you see this message and you want to align using only micro scale video images without the nano scale precision of SPM scans click OK Otherwise click Cancel go to the SPM Images tab on the left side of the window and make a scan In the Instrumen
375. the range limits Page 180 The data values collected during a scan tend to cluster around certain ranges this is a simplified example Number of readings Scan reading values 4 18 2006 NSCRIPTOR user manual The Instrument window lets you add detail to the scan image by defining a range of readings of interest Lower end Upper end of range a of range Number of readings Scan reading values The scan image shows a color gradient for the values in the range EE O i A Everything to the left of Everything to the right this line appears as the of this line appears as darkest color the lightest color This gives you a way to get highly detailed data on a narrower range The exact color used depends on the current color palette You can select palettes by going to the Instrument window s Tool menu and choosing Select Palette Below is the scroll bar for each scan image The scroll bar shows the color range of the selected The numbers at the top and bottom of the scroll bar are the highest and lowest values the range Upper end era of range 0 Click in this area to decrease the brightness Shows the colors used for each value in the range Click in this area to increase the brightness Lower end of range RT 1 When an image is not in Auto Range mode there are a few ways to change the upper or lower ends of the range One way is to modify the numerical fields ab
376. through the ink calibration process InkCal calibrates by drawing a test pattern of dots lines or both This is the basic process for using the InkCal wizard 1 You start by defining the test pattern whether to draw dots lines or both how many of them to draw and where to draw them The test pattern contains dots and or lines with known dwell times and pen speeds When you re ready InkCal draws the specified pattern on the substrate It then opens the Instrument window and images the test pattern See InkCal part 1 Choose options draw and scan test pattern 2 You import the scan into InkCal and analyze it marking the outlines of the drawn dots and lines From this information InkCal measures their actual sizes See InkCal part 2 Analyze the test pattern on page 18 3 To finish the process InkCal graphs the experimental data fits it with one of InkCAD s ink models and computes the calibration coefficients If saved properly InkCAD uses these coefficients to calculate the dot dwell times 4 18 2006 Page 97 NSCRIPTOR user manual and line drawing speeds for drawing your pattern See InkCal part 3 Fit to a curve and display the results on page 23 InkCal part 1 Choose options draw and scan test pattern Before starting the calibration procedure make sure you have a sample substrate and an inked pen loaded in the instrument In InkCAD click on this button to start InkCal InkCal has three types of tes
377. tice that the mouse pointer changes when you do this When you release the right mouse button a pop up menu appears Cancel 4 18 2006 Page 149 NSCRIPTOR user manual Choose Copy from the menu InkCAD creates a new dot in layer 2 Notice where the dot appears in the tree structure once you expand it fully New Document Layer 1 A Structure nA Structure 1 Struct Aet DoH J a Layer 2 H Structured nA Structured 1 Struct Aet You may have noticed that the DPN pattern in the viewer looks similar to how it did before copying the dot It may look like InkCAD is not displaying the new dot but actually it s showing both dots The new dot has the same properties as the original including the x y coordinates of its center You can see this by selecting just the new dot in the tree then looking at the property pane EAE Be j El If you change the center s y coordinate here both dots are visible Center 10 533 2 0 gt Now that you can use drag and drop to copy objects the next step is to try moving them from one layer to another In layer 2 select the structure reference for the line Right click and drag it to layer 1 ih Hew Document a Layer 1 k Jy Stucky I A Structure 1 Struct Ref dot Layer 2 om Structures Pee rer rer rr er err errr errr roon Line 1 Then choose Move from the resulting menu a Layer 1 Page 150 4 18 2006 NSC
378. tion Masoom 1190 00 s 8952 00 Jum Calibrate Min Zoom 3280 00 285 00 um Nonlinear Image Correction Coethicients el 1 00000 a met 0 000056 Tal 1 00000 ye 0 000580 i i Update There are functions available in this tab e Linearization Have the instrument find its linear range of piezo movement See Linearization for more information on this e Homing the motors Make the instrument move the stage to a known location on the edge of its range of movement to reset its stage location data See below for more information e XYZ scaling Calibrate the instrument s piezo This relates the voltage applied to the piezoelectric actuator and the actual distance traveled This function will normally be run only by NanoInk support personnel e Video calibration This function is normally only used by NanoInk support personnel e Nonlinear image correction This function is normally only used by NanoInk support personnel 4 15 2006 Page 191 NSCRIPTOR user manual Linearization Note Homing the motors Frequency sweeps AC mode setup Page 192 Notes To properly draw DPN patterns the stage must move in a linear fashion when the instrument draws a line it needs to be straight The Linearize Scanner function limits the available scan range to the area in which the scanner is currently linear The function runs automatically when you click on the appropriate Run button
379. to sample Attractive I force UY Non contact regime There are two important distance regimes here the contact regime and the non contact or AC mode regime In the contact regime the cantilever is a few angstroms or less from the sample surface and the inter atomic force between 4 18 2006 Page 329 NSCRIPTOR user manual About AC mode s negative setpoint The frequency sweep process Page 330 the cantilever and the sample is repulsive In the non contact AC mode regime the cantilever is tens to hundreds of angstroms from the surface and the inter atomic force between it and sample is attractive mostly because of long range van der Waals interactions When the cantilever approaches the surface in the AC mode regime it increases the attractive damping force and attenuates the cantilever oscillation thus decreasing the vibration amplitude The total force between the tip and substrate in the non contact regime is very low generally about 10 N This makes AC mode especially useful for soft materials or inks that are disrupted smeared overwritten or destroyed by contact mode measurements However because the force between the tip and the sample is low it is more difficult to measure than the force in the contact regime which can be several orders of magnitude greater The cantilevers used for AC mode must be stiffer than those used for contact mode because the attractive van der Waal
380. tracted beyond their safe operating range Retract Extend All Al Selected Selected Slew Ratef500 msec 2 Nanolnk has provided default extension and retraction voltages that generally work well with active pens but you can change them if you wish To do this look at the values in the Retract or Extend columns for the pen s you want to retract or extend You can change the retract extend voltages by selecting a pen and changing the appropriate field on the right side of the tab 1 Select a pen 2 Select Extend or Retract PenControl Pen Retract Extend Feedback Status SlewRate msec lt sail 0 020 F y PEGEA 1 0 0 017 v Retracted 500 1B IRE DE o oo I Recte Actual p o00 3 0 0 017 B Retracted 500 A 4 0 0 017 al Retracted 500 Retradt 0 000 5 0 0o07 Retacted 500 A 3 Use slider to 6 0 0 017 E Retracted 500 EEEN change value T 0 0 017 ia Retracted 500 be manually extended 8 0 0 017 a Retracted 500 beyond their safe operating range Retract Extend All All Selected Selected Slew Ratef500 electe electe msec Config Control Repeat this step for each pen you want to retract or extend Page 304 4 18 2006 NSCRIPTOR user manual On the left side of the Control tab select the pen s you want to retract or extend See Selecting pens in the active pen table page 303 for more information Then click on the appropriate Selected button to retract
381. trated ammonium hydroxide and 30 hydrogen peroxide it is a highly corrosive solution If you work with it you must use approved protective gloves goggles and lab coats reader pen In passive multi pen arrays this is the pen on which you reflect the instrument s laser beam for feedback control It can be inked or non inked though non inked reader pens do not contaminate the scanned region In active pen arrays this is a pen whose cantilever is wider than the writer pens to aid in laser beam reflection When drawing with active pens one of the reader pens in the array is usually designated as the feedback pen re dipping When dipping pen s in ink re dipping is dipping them into the microwell s again before returning them to the substrate for drawing This is easily confused with re inking red dot alignment The process of calibrating the spot on the position sensing photodetector that receives the laser beam reflected off the cantilever In InkFinder a red spot represents the laser beam and a box represents the PSPD re inking While drawing a pattern on the sample re inking is returning the pen s to the inkwell to replenish the ink This is easily confused with re dipping 4 18 2006 NSCRIPTOR user manual reservoir On a DPN Inkwell this is a macro scale structure into which you deposit ink Ink flows from the reservoir to a microwell via a microchannel resonance frequency In AC mode imaging this is t
382. trols are in InkCAD s Instrument window See Chapter 6 for more information on this e Lithography controller The controller contains the electronics for communicating with and controlling the DPN stage It connects to the master computer by a standard Ethernet cable and to the DPN stage by five cables e Environmental chamber NanoInk s E chamber is a clear acrylic box that provides a tightly controlled environment for optimal DPN conditions A controller module works with a bubbler and a solid state heating cooling system to maintain environmental conditions See Controlling the environmental chamber page 44 for information on the chamber control hardware and software e Air table The table isolates the chamber and its contents from floor vibration e Bias control switch box If your system has the optional bias control feature electrical bias is applied by this switch box during DPN drawing For more information on this see Bias control on page 50 Page 26 4 18 2006 NSCRIPTOR user manual Not shown in the drawing e Nitrogen tank s Nitrogen is an essential part of the process of controlling the humidity in the environmental chamber This is not provided by NanoInk We recommend an input pressure of 15 20 PSI 30 is the maximum e Magnifier This is an optical magnifier that you can use when replacing pens or filling inkwells 1f your system has the inkwell feature e Supplies and miscellaneou
383. tterns each layer has elements for a particular ink LFM An acronym for lateral force microscopy lifting Using the scanner only to raise the pen s slightly above the substrate still keeping them in feedback Contrast with withdraw line An InkCAD element drawn on a substrate by depositing ink as the pen moves from one endpoint to another The line thickness depends on the speed of the pen and the ink s diffusion properties lithography controller The electronic system that controls the instrument in an NSCRIPTOR system The lithography controller receives commands from the master PC magnifier A desktop device shipped with an NSCRIPTOR system that visually enlarges objects For customers using the inkwell feature one common use is magnifying an inkwell to see if there is ink in a reservoir master PC The computer system that runs InkCAD and other software The master PC sends commands to the lithography controller MEMS An acronym for micro electromechanical systems 4 18 2006 NSCRIPTOR user manual meniscus A thin film of water that forms between the tip and the sample due to capillary attraction The meniscus is thought to be the medium that ink moves through from the tip to the sample MHA Shorthand name for mercaptohexadecanoic acid which is commonly used as a DPN ink micro electromechanical systems MEMS The design manufacture and use of micron scale mechanical structures and electron
384. tus Microfluidic channels on the inkwell carry ink from the reservoirs to smaller dipping microwells NanoInk recommends that you use the pre inked pens supplied with the system to learn how to use the core NSCRIPTOR features before you start experimenting with inkwells For more information on inking please see Chapter 8 AC mode is a scanning capability that can image more delicate structures with higher feature resolution It is a type of alternating current AC imaging mode For all AC imaging modes the cantilever is very stiff and has a high resonance frequency usually in the range of 100 350 kHz In the NSCRIPTOR instrument a special piezo in the pen holder mechanically shakes the cantilever using an AC voltage that oscillates it up and down The modulation frequency is near the pen s resonant frequency which is unique for every pen Sophisticated electronics lock into the resonance frequency feeding back on amplitude variances as the pen moves over the sample Amplitude variations occur as a function of the tip sample interaction AC mode is an important part of the DPN toolbox when working with more fragile macromolecules There is an advantage to scanning such materials by AC methods rather than with contact mode Also contact mode can smear DPN patterns of soft molecules while AC mode applies an order of magnitude less force to the surface In contrast with contact mode the AC mode cantilever of the NSCRIPTOR system doe
385. u Ys U era Scanner e101 72 ua Y N ue 4 18 2006 Page 179 NSCRIPTOR user manual These controls let you manipulate the images Current display range upper amp lower limits in nanometers for topography or Scan percentage for LFM amp channel error cgnal ae name of B500 1 opogra D i 6250 0 3 3 Topography Glick hereto make this the selected Sliders image the show the sy one passed range of back to readings SS InkCAD or displayed in n InkCal the image see below a sf Click to level f the scan in of Emm AutoRange e the fast ee i Meeaseet JA left and Click here to have Click to level the right InkCAD automatically scan in the direction set the range for Slow up and displayed readings down direction When you make one of the scan images the selected image that image is passed back to the module that initiated the scan or initiated image capture usually InkCal or the main InkCAD window Auto range InkCAD s auto range feature automatically sets the range boundaries by finding the mean reading and setting the range at one standard deviation above and below it By default the feature is enabled for all new scans When enabled the scan image only shows the readings in this range The color of the Auto Range bar indicates whether it s enabled or disabled for a particular scan Enabled Auto Disabled Auto Range bar is blue Range bar is grey Adjusting
386. u can turn it off in the Video Motors tab 14 Use the blue directional buttons to the left of the Move Stage buttons to move the pen s over the chosen microwell s Here s how it might look at this point for a multi pen array Note If you are using a multi pen array all of the pens should be directly over microwells If some of them are not the pen array and inkwell may not be compatible 4 18 2006 Inking part 2 Dispensing ink General approach Procedure NSCRIPTOR user manual By this point in the inking process you have located the pen or pen array over the inkwell This section shows you how to fill the microwell s with ink In the following procedure you can use a syringe or for certain inkwell designs a micropipette Once it is filled with ink and the needle tip is positioned close to a reservoir the basic ink dispensing method is to produce a single drop of ink at the end of the needle Then you lower the needle tip into the reservoir until the drop touches the reservoir bottom The ink instantly falls into the reservoir This method avoids damage by keeping the needle tip from directly touching the reservoir bottom Repeat this procedure for each ink you want to put into a separate inkwell 1 Start by lifting the pen s an adequate distance away from the sample puck Go to the Instrument window s Video Motors tab on the right side of the window Set the z motor step size to 300 microns and cl
387. ual Half toning options InkCAD has a few places where you can select half toning whenever you see one of these buttons jl View toolbar Designer toolbar There are a couple of options you can select when you click on one of these buttons e Half tone Non Editable or Hide Non Editable these two selections affect how InkCAD displays non editable elements In a Structure Designer session an element is non editable if it is not a direct member of the structure you are editing For example if you have selected structure A in the following drawing element B is editable but not elements D and E in structure C D and E would become editable if you selected structure C in the tree With the Hide Non Editable option InkCAD only displays the editable elements If you choose Half tone Non Editable instead it displays all the child elements but the non editable ones appear in a lighter color and you cannot select or edit them e Select Complete Structures This only applies when you drag the pointer in the drawing area to select elements Enable this if you want InkCAD to only select an entire structure when all of its elements are in the selection rectangle Working in Structure Designer Earlier you learned how to select objects by clicking on them in the tree view This section shows a few ways to use the mouse for selecting and modifying elements in Structure Designer 4 18 2006 Page 77 NSCRIPTOR user ma
388. ue to zero before aligning the laser The Setpoint item is in the SPM Controls tab on the right side of the Instrument window With NanoInk active pen arrays a designated feedback pen is put under feedback control The laser beam must be reflected off this pen and you need to extend it down toward the surface before starting laser alignment For convenience the Active Feedback Pen section of this tab has buttons to retract and extend the feedback pen These buttons appear to the right of the laser intensity meter if an active pen array is selected in the Pen Settings window described in Chapter 9 Max Active Feedback Fen 1 F ve See Chapter 9 for more information on active pens In laser alignment you move the laser and detector to get the red dot into the preferred darker region with as high a Laser Sum value as possible DPN patterning works with any Laser Sum value above the shown minimum but a higher value works better The instrument has four knobs that move the laser and photodetector Detector vertical Laser vertical ee aa i s r z a Detector horizontal Laser horizontal 4 18 2006 Page 31 NSCRIPTOR user manual Follow this short procedure to align the laser 1 Go to the SPM Controls tab on the right side of the Instrument window and change the Setpoint to zero 2 Use the two laser control knobs to move the laser beam until it reflects off the cantilever near the tip a
389. ule of See Lattice layers in 123 main window of See main InkCAD window NanoWord module of See NanoWord not exiting from until pen withdrawal 43 online help for 119 selecting objects in 77 snap to grid feature of 131 158 162 software components of 59 Structure Designer of See Structure Designer toolbars of See toolbars user interface of 59 continued Page 348 InkCAD cont views in 73 75 where it runs 26 windows in See windows InkCAD found problems in message 162 InkCal module analyzing diffusion in 105 and overall DPN process 61 calculating coefficients in 110 changing layer properties in InkCal 112 choosing options in 98 contact diameter width calculated by 162 data points in See data points default test patterns of 105 defining test pattern in 98 disabling outlying data points in 118 exporting data to spreadsheets 113 feedback control needed before using 99 fitting a curve in 110 114 lithography parameters in 102 lithography parameters recorded by 94 measuring drawn dots and lines 104 messages from 115 order of dot line selection in default patterns 105 process overview for 97 statistics on curve fitting 112 status messages in 98 test pattern drawn by 98 zooming in on scanned image 107 InkFinder See also Instrument window exporting data to third party software 208 InkFinder tab of Instrument window 200 role in phase imaging 176 scanning imag
390. unnamed xad Instrument File Tools wiew Help pregesecccsscssesesssseecscesseossces E R Zoom Position 5 t Ra Step Size Move Stage l 25 um v x 0 0 e 2 um PAR ON OFF l J 58000 um v Y OOum OE A 12ms v Move To I Stage map background graphic with Background puck outline turns blue grid etc when stage moves View area Sample puck outline Approx range of motion for X y motors Center reference point and Green crosshairs show the position of location of a stage magnet the center of the available scan range See Stage control fields and buttons page 170 for descriptions of the items near the top of the window The view area is a graphical representation of the stage as seen from above The bottom of the view area shows the region facing the front of the instrument If Move Stage is ON one way to move the center of the scan range to a particular location on the stage and move the pen s relative to the stage is to simply click there InkCAD initially draws a light green cross where you click Then as the instrument moves the stage to put the center of the scan range in the desired location relative to the sample it updates its current location until it reaches the spot you clicked on p 4 18 2006 Page 169 NSCRIPTOR user manual Stage control fields and buttons These are the buttons and screen items you can use in the Stage Control tab Clic
391. up a pen settings window which is described in Using the Pen Settings window page 297 For now look at this table in the upper half of the window Name WNumberofPens Default Pitch Current Pen Type Description A 3B 3 75 E Passive Passive Pen Array A 4 4 30 Passive Passive Pen Array b T1 G 40 lv Active Nanolnk Active Pen T2 8 30 Active Nanolnk Active Pen 3 Inthe Current column select the desired type by clicking twice in its row s check box Then click on the pencil icon to the left to get InkCAD to update the data and delete the previous check mark It should look like this when you re done Name NumberofPens Default Pitch Current Pen Type Description A 3B 3 75 A 4 4 30 E T1 8 40 B A ee ee ee E T3 8 23 a Passive Passive Pen Array Passive Passive Pen Array Active Nanolnk Active Pen Nanolnk Active Pen Active Nanolnk Active Pen You cannot change the Current setting if the Control tab is open in the bottom half of the window To correct this simply open the Config tab You might see this message when you select a pen in the Align Pens tab What this means is that the selected pen is too far away from the feedback pen The scanner s range is not large enough to allow the feedback pen to reach any part of the region that the selected pen could draw in You cannot continue with this set of pens so try selecting a pen that is closer to the feedback pen or designate a closer pen as
392. urrent pen position on the substrate then return to this location later This is useful when you want to switch pens move the sample puck or remove and replace the puck The alignment process uses a wizard that you can activate in the Instrument window InkCAD alignments have two distinct phases e In the first phase you record the pen s current location relative to the sample before changing the pen or moving the puck e Inthe second phase you move the pen back to this saved location relative to the sample 4 18 2006 NSCRIPTOR user manual InkFinder performs two types of alignments translational alignment and rotational alignment The latter is optional it s only needed if you will move or remove the puck during the process Translational alignment The most basic type of alignment is simple x y translation that moves the current pen back to the previous drawing location To do this it helps to draw your pattern near an easily identifiable spot on the sample such as one of the etched markings on a NanoInk custom substrate When you finish drawing a layer it might look something like this on the live video Previous layers drawn Current saved Reference in this region pen location surface feature for alignment Video image Entering the second phase of alignment the pen will likely be in a different spot relative to the surface feature A translational alignment applies a corrective move of the pen to
393. urve connecting the data points InkCal updates the graph automatically Trying a different ink model One thing that can happen in InkCal is using an ink model that is not appropriate for the data making a poor overall fit Here are some examples where it would help to choose a different model 2 Lo Using Linear with offset instead Using Linear instead of Using Linear instead of of 2nd order polynomial Linear with offset Non diffusive Length of the square scan area If you want to change ink models expand the ink properties and click on Ink Model Then click on the LH button and select a different model in the resulting pop up list E Ink Model Linear Dot Linear Dot D nid order polynomial El Line Linear with offset Line 0 Mon ditfusive m Finally click on the Fit Curve button to see the effect of changing models InkCal attempts to fit the new model s curve to the existing data points Note When switching between ink models it is usually best to go from simpler models such as Linear to more complex ones like 2nd order polynomial or Linear with offset 4 18 2006 Page 117 NSCRIPTOR user manual Disabling outlying data points Contacting Nano Ink about curve fitting problems Page 118 Sometimes you end up with one or more stray data points making curve fitting difficult for InkCal Inverse Speed rum 0 53 Outlying ae value wn ypa aur 0 01 0 22 5 2 10 14
394. ves into position to start the next one The layer specific field for this variable is Positioning Speed in the layer properties See page 126 for more information Select a default ink type from the list For more information on ink models see the InkCal section in Chapter 4 This specifies the default coordinates for the location in the available scan range where you can land initially approach the pen s before drawing This is usually set to a coordinate within the available scan range but outside the area where you will be drawing patterns such as 40 40 The layer specific field for this variable is Park Coordinates in the layer properties See page 126 for more information This specifies the default value for whether you want the pen s to move to the park coordinates when the system finishes a drawing operation 4 18 2006 NSCRIPTOR user manual About the Apply to button Using constant height lithography Field Description The layer specific setting for this variable is Disable Park in the layer properties See page 125 for more information Leave Light Enable this field if you want the instrument to leave its light on On while doing lithography This is not the laser it is the light that illuminates the video image of the substrate If the field is disabled the light is only on while approaching and withdrawing the pen or pen array Reset to Click on this button to reset all values i
395. w 169 green light in system tray icon 84 green line in Frequency Sweeps tab 334 Green Line to Harlem Lake 334 grid 131 158 groove in sample puck 33 257 ground connector for instrument 46 NSCRIPTOR user manual H Half tone Non Editable option 77 hatch lines 67 140 146 HDF file format 208 help for NSCRIPTOR 119 Hide Non Editable option 77 histograms in Image Analysis 241 histograms in Instrument window 178 homing the motors 191 Horizontal line profile mode 239 horizontal line in ink diffusion graph 96 hose connections for system 45 Hue control in Instrument window 199 humidity See also E chamber meniscus and contact diameter width 163 how controlled in the DPN process 14 44 recording with ink properties 94 role of nitrogen in humidity control 27 sensor for in E chamber 48 hydrogen peroxide 324 325 hydrophilic inks 14 hydrophobic inks 14 207 hypertext links in online help 120 hysteresis and piezo scanners 19 i button in Image Analysis 236 IA program See Image Analysis program I beam cantilever shape 20 icons in Windows system tray 84 ideal position for laser alignment 29 IDK See ink dispensing kit Image Analysis IA program 235 image databases 166 167 See also coarse alignment marks fine alignment marks Image tab in scan window 182 imaging fields 214 222 importing CAD files 122 Increment field in InkCal 102 INERT GAS HOOK UP connector 46 info card win
396. w Rate This is amount of time the system should take to retract or extend a pen To change this value for a particular pen select the pen in the table then modify the value on the right side of the tab In the active pen table in the Control tab you can select a single pen by clicking to the left of the appropriate row Pen Retract Extend Feedback gt 2 0 0 017 H To select consecutive pens begin by selecting the first one Then press the lt Shift gt key and click on the last one Pen Retact Extend Feedback pt fo Poo Tt Pie y a 4 d j 0 017 4 18 2006 Page 303 NSCRIPTOR user manual To select non consecutive pens select the first one and hold down the lt Ctrl gt key as you click on others to select them Pen lt Retract Extend 2 0 0 017 N 2 SET 0 017 4 0 0 017 Retracting and extending pens It s easy to retract or extend one or a group of active pens 1 Open the Pen Settings window 1f it is not already open Make sure that the correct active pen type is selected in the top half of the window and click on the Control tab near the bottom Pen Control Retract Extend Feedback Status Slew Rate msec a Extend 9 017 0 0 017 Retracted 500 e 0 017 Retracted 500 Actual lp 000 0 017 Retracted 500 A 0 017 Retracted 500 Retract 0 000 0 017 Retracted 500 A 0 017 Retracted 500 Warning Pens can 0 017 Retracted 500 be manually extended 0 017 Re
397. w opens with the SPM Setup and Align Laser tabs selected on the left and the SPM Controls tab selected on the right e Calibration the window opens with the SPM Setup and Calibrate tabs selected on the left and the SPM Controls tab selected on the right e Settings the window opens with the SPM Setup and Settings tabs selected on the left and the SPM Controls tab selected on the right This message appears if you try to close the Instrument window without saving changes to the open image database No Cancel An image database is a disk file containing any combination of video and SPM images as well as coarse alignment marks fine alignment marks and optionally microwell marks associated with them Here is an example Topo rev video image O 70 LFM rev amp Error Error rev video image Set of SPM images Image database x alignment mark InkCAD chooses the names for each image within the database this is the 60 70 etc in the above example An image database treats a set of SPM images from one scan as a single object in the database You can work with image databases in the Instrument window s File pull down menu File Tools Help Mew Image Database Open Image Database Save Image Database 4 18 2006 Page 167 NSCRIPTOR user manual Stage control Page 168 CAUTION These are your options in this menu e New Image Database use this option to create an empt
398. wellTime Visible This property determines whether InkCAD displays the dot on the screen Please see Printable visible settings for more information LayerNumber This indicates which layer the dot belongs to StructureDefault If this is True the element is on the same layer as its parent structure in the document tree and you can t change LayerNumber If it is False you can set the layer number to another value Elements from a structure can be in multiple layers About the dot display Style The Display Style item in the dot properties has two possible values RADIUS and DWELL_TIME e When Display Style is RADIUS you enter the radius you cannot edit the DwellTime property InkCAD calculates the dwell time for these dots from the radius and the calibration coefficients e When Display Style is DWELL_TIME you enter the dwell time you may not edit the Radius property InkCAD calculates the radius for these dots from the dwell time and the calibration coefficients The Display Style setting affects the values of dot properties when calibration coefficients or scaling factors change For example here is what happens if the calibration coefficients change e For dots with Display Style set to RADIUS the dot diameter does not change but the dwell time does e For dots with Display Style set to DWELL_TIME the dot diameter changes but the dwell time does not The Display Style also affects how dots react to changes in ma
399. whether the pen is currently in contact with the sample surface which tells you whether you can manually move the pen Feedback status Description This tells you that the pen is not currently under feedback control You may use the stage controls to move the pen The pen is currently under feedback control With this status you cannot move the pen without first taking it out of feedback 4 4 18 2006 Page 83 NSCRIPTOR user manual DPN server icon The DPN server displays this icon in the Windows system tray at one end of the task bar You can move the pointer over this icon to see a short DPN server status message DPN Server Ready a 12 55PM 4 The message text and the color of the light in this icon indicate what the DPN server is doing These are the values you could see Status Status message Meaning light color Green DPN Server Ready The DPN server has just started up and has not yet received any print jobs to process Red Job is in progress Estimated The server is executing an operation time left hh mm ss for InkCAD Red DPN Server Idle The DPN server has completed all requested operations but it still controls the instrument Green DPN Server Inactive The DPN server has released control of the instrument The drawing Status Icon When InkCAD starts drawing on the substrate a status icon appears in the lower right corner of the main InkCAD window Last Se
400. whether you can move the pen Feedback status Description This tells you that the pen is not currently under feedback control You may use the stage controls described in this chapter to move the pen r Feedback Uff The pen is currently under feedback control With this status you cannot move the pen without first taking it out of feedback JE Feedback On You can open the window by clicking on this button in the main InkCAD toolbar You can also open the window with different tabs selected by using InkCAD s Instrument pull down menu Instrument Tools Window Help Start Lithography F9 p am Stop Lithography Fiz f oOo InkFinder r Previous Image Database InkCal Mo Image Database Laser 4Slignment Calibration Settings Pen Settings These are the options in the Instrument menu which bring up the window and the tabs that are selected e InkFinder option the Instrument window opens with the Stage Control tab selected on the left and the InkFinder tab selected on the right You can choose whether to open the window with the existing image database Previous Image Database or with a new image database No Image Database No Image Database is useful if you have a very large database which can make the Instrument window slow to open See Image databases for more information on this subject 4 18 2006 NSCRIPTOR user manual Image databases e Laser Alignment the windo
401. y with NanoInk s semi automated patent pending tools InkFinder and InkAlign A Make alignment marks and pattern lines with 15t ink Use alignment marks to pattern lines with 2 ink Interleaved lines of 1st and 2 inks In addition to using multiple inks the Mirkin Group demonstrated the simultaneous use of multiple pens for making DPN structures in parallel They mounted a continuous rack of eight conventional silicon nitride pens onto the pen carrier chip The NSCRIPTOR system now works with a variety of optional multi pen array configurations enabling it to draw complex structures in parallel Furthermore arrays of inkwells now allow you to simultaneously dip multiple pens into multiple ink reservoirs Ultimately NanoInk believes that massively parallel pen arrays will make DPN patterns for industrial applications The optional Inkwell feature supports re inking which makes it possible to draw larger or more complex patterns than before It allows you to use multiple inks without changing pens manually and lets you work with inks that are too fragile to be pre deposited on pens To date experimenters have performed the DPN procedure on gold and silicon substrates using thiols proteins DNA sol gels and collagen among others NanoInk s contribution has significantly accelerated the DPN experimentation process which thereby helps the industry rapidly discover new compatible inks and substrates NSCRIPTOR s advanc
402. y new image database You can also create a new image database when you open the Instrument window as described in Opening the Instrument window e Open Image Database this option opens a database from disk e Save Image Database save the current database to disk The name of the open database appears in the Instrument window s title bar Image database file names have an extension of xad Each time you open the Instrument window it opens the image database you were previously using You can add a new image to the open image database by click on the Capture button in either the Video Motors or SPM Controls tabs You can delete an image from the current database by selecting it in the top part of the InkFinder tab then clicking on the Remove button You can use the Stage Control tab for coarse positioning of the DPN stage For safety reasons InkCAD does not allow you to move the pen s relative to the stage with the pen s in feedback You need to withdraw the pen s before moving the stage in this tab You can withdraw the pen s with the Withdraw button on the Video Motors tab on the right side of the window See Using the video and misc motor controls on page 195 for more information 4 18 2006 NSCRIPTOR user manual This is the Stage Control tab it looks different if you are using NanoInk s NETS product or the NSCRIPTOR inkwell feature described in Chapter 8 Stage control fields and buttons
403. ystem has information on Name NumberofPens Default Pitch Curent Pen Type Description 4 26 26 35 E Passive Passive Fen Array JA 3 50 E Passive Passive Fen Array A 3B 3 75 z Passive Passive Pen Array A 4 4 30 A Passive Passive Pen Array H T1 a 40 iv Active Nanolnk Active Pen Te 0 30 E Actve Nanolnk Active Pern Below are the columns in this table Several of them have pre configured default values Each row describes a different pen or pen array type Column Description Name This is the name of the pen or pen array type Number of Pens For multi pen arrays this is the number of pens in the array Default Pitch The default tip to tip distance between the pens in each type of pen array Current A check mark in this column indicates the pen or pen array type currently in use To select a different pen array type click twice on the checkbox for the type you want to select Then click on the pencil icon to the left to have InkCAD update it Note To specify a pen or array type you need to change the checkboxes rather than just select a row in the table In the following example the first type is selected in the table and shown graphically at the top of the window but the second one is the pen type currently in use Mame Numberof Pens Cetault Pitch Current ee T1 Mi Tw Pen Type This can have one of these values e Passive a passive pen designed for contact mode scanning e Active

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