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Model 8020 High Power Interface Panel User`s Manual

1. The following diagram demonstrates how to make connections between the device connections panel of the Model 8020 and the DUT Figure 44 Off state characterization of a power MOSFET using the Model 2657A and Series 2600B 4200 SMU instruments up to 3 kV See note regarding which cable assemblies i J L to use per installed connector card Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX Or Model 4200 TRX 6 6 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Off state characterization of a power MOSFET using the Series 2600B 4200 SMU instruments up to 200 V This example illustrates how to make local sense connections to a MOSFET using two Series 2600B or 42x0 SMU instruments The following diagram demonstrates how to make connections between the device connections panel of the Model 8020 and the DUT Figure 45 Off state characterization of a power MOSFET using series 2600B 4200 SMU instruments up to 200 V WTEM OCK QOO A A O 6 5 Cc CORNERED 2 1 MCOMMON LO o m iv e He E XP3NSION 6 Q Q COM ar LOMO DEVICE CONNECTIONS H H amp See note regarding which cable assemblies to use per installed connec
2. 8 2 Can break the parallel connection of the high current z1718 M n 8 2 Can operate the 8020 with the top cover off 8 2 Why is the pulse rising edge so slow for my SMU 8 3 Why don t get a signal at the output My measurements appear to be an open circuit ccccccccseseeeeeeeeeeeeeeeaeeeeeeseaaees 8 3 Why are my contact check measurements failing when the SMUS are connected to the high voltage and 200 V channels 8 3 Why is the high current LO terminal not connected to the Common LO terminal of the 8020 cccccecsssseeeeeseeeeeeeeees 8 3 Why does my instrument generate an interlock error warning The interlock error on the SMU instrument indicates that the interlock circuit has been disengaged and that either the interlock signals from the SMU instruments have not been correctly connected or that a user access point is open The top cover of the Model 8020 High Power Interface Panel contains two switches that control the interlock of the Model 2657A and Series 2600A SourceMeter instruments Removing the top cover opens the switches and disengages the interlock Lifting one end of the top cover will also disengage the switch installed at that end Additionally the Model 8020 contains an Interlock Out connection on the Instrument Connections panel where a user supplied normally open switch must be connected The normally open s
3. Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 800 935 5595 www keithley com KEI TI HLEY A Tektronix Company A Greater Measure of Confidence 8 14
4. side NOTE If there are multiple access points to the device under test the user must tie each of their Model 2651 Or Connect Wc interlock switches in series DIGITAL uo Interlock W Model 2657 cables CA 558 W 3 places aaaea Connect to z INTERLOCK OUT 6020 Unterminated g 4 pin circular Interlock Gable as socket Mode amp 020 ILC UNT f N to al Im v A INTERLOCK Connect to 3 Pn ne D l a n E DIGITAL VO typic 21 ae a T hee U E R A 7 8020 interlock Expansion Connectta Connect to Termination Plug device under test INTERLOCK Model B020 ILC 5 access point EXPANSION SYSTEM 4 pin circular INTERLOCK socket n E E gl Model 2600 Connecting 2 Model 8020 units The 8020 High Power Interface Panel can be connected with another 8020 unit when you have a need for more than 1 Model 2657 in the test configuration or more than 3 Series 2600 or 4200 SMUs The Model 8020 allows you to expand the common LO SLO reference signal as well as the interlock system to a second Model 8020 This ensures that the instruments have a common LO reference and are triggered from a common interlock Both the common LO SLO signals and the interlock signal of the Model 8020 can be daisy chained between units Expansion is via the common SLO LO standard triaxial interlock OUT and EXPANSION connectors on the device side of the 8020 units The system interlock
5. A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 5 Using the Model 8020 for DC and HV C V tests For pulsed DC measurements with the 8020 CVU installed install a short or a resistor to ensure that there is signal continuity in the DC Input path on the 8020 motherboard see the previous figure This path bypasses the inductor of the bias tee which can have an adverse effect on pulse shape See the next figure Figure 36 8020 DC signal path on motherboard to enable pulsed DC measurements 1a DC Input DC Switch AC Switch AC Input o NOTE Configuring the Model 8020 for pulsed DC measurements will disable AC measurement capabilities Discharge bias tee and system capacitance The 8020 CVU option has internal capacitance that can hold charge A shock hazard exists if a proper discharge is not performed and the user removes the 8020 top cover or in other ways accesses a live terminal in the system Use the SMU instruments to safely discharge the capacitance A WARNING Do not ever assume that the safety interlock discharges the system A best practice is to discharge system capacitance with the SMU output on Configure the SMU to force 0 V and measure current with a current limit of at least 1 mA A current measurement of approximately 0 mA indicates a proper discharge Keithley s ACS Basic software executes this discharge procedure after completing a CV test Be sure to use t
6. A October 2014 7 5 Section 7 Measurement considerations Model 8020 High Power Interface Panel Applications Manual Perform open and short compensation whenever the test setup changes This includes cabling and adapter changes as well as changes to the bias tee configurations High capacitance low impedance devices are especially susceptible to inductance in the test system Cable movement or changes may affect the test system inductance and can therefore impact measurement accuracy In these cases perform short compensation more often For measurements of three terminal devices such as MOSFETs note that each capacitance measurement type Ciss Coss Crss Cgs and Cds requires its own open and short connection compensations ACS basic software version 2 1 and later contains built in compensation routines that permit you to save the compensation data for each of these measurements Therefore you can perform the complete open and short compensation routines for all measurements The Model 4210 CVU C V instrument also includes cable length compensation for its supplied coaxial cables that allows it to compensate for phase errors in the cables up to the point at which the 4 wire measurement point ends 7 6 8020 900 01 Rev A October 2014 Section 8 Frequently asked questions In this section Why does my instrument generate an interlock Error ijs P T 8 1 Why are my DC current measurements unstable
7. Ciss block diagram schematic Ciss 2600 4200 1 HI E LCUR LPOT 2657 HI CUR A HCUR Bias T HV d a POT HPOT POT CUR HI 2600 4200 2 8020 900 01 Rev A October 2014 lications Manua Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Coss Figure 63 Coss connection diagram HV C V 3 Terminal Coss measurement connections 90 O M M SMA Cable 33 cm gt CA 406 SMA F to SMB F Adapters 4 131936200 TYP B B SMB M to SMA M j i Adapters 131936100 TYP B B d POT POT 8020 900 01 Rev A October 2014 6 23 Section 6 A lications Model 8020 High Power Interface Panel Applications Manual 6 24 Figure 64 Coss block diagram schematic 2657 HI CUR A HCUR Bias T HV i a BT HPOT Y Coss 2600 4200 1 D HI ula LCUR LPOT POT CUR HI 2600 4200 2 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Device connections for power MOSFET capacitance measurements For both component level and circuit level capacitance measurements the connections between the device connections panel of the Model 8020 and the DUT are the same The following diagram illustrates connections for high voltage C V measurements up to 3 kV For measurements up to 200 V make connections between the 2600 4200 channels 1 2
8. sense These connectors are Qo designed for connection to a CV measurement instrument The connectors are only present with the integrated 8020 CVU bias tee option Device connections panel overview Device under test connections are made to the device connections panel of the Model 8020 The device panel of the Model 8020 is shown below Descriptions of the device panel connections are provided after the graphic Figure 15 Model 8020 device connections panel 6 rm COMBINE D n5 1 ai SiD Sbt PAN Soc Il m 99 H m DEVICE CONNECTIONS 8020 900 01 Rev A October 2014 3 3 0 Section 3 Connecting to the Model 8020 Model 8020 High Power Interface Panel Applications Manual A m COMBINED 2651 4 SLO SHI LO HI COMMON LO SLO EXPANSION INTERLOCK 0 EXPANSION OUT LO The connectors provide the combined output of the Model 2651 You can use these connections to connect the Model 8020 to 1 or 2 Model 2651 units Connections are as follows e SLO Sense LO e SHI Sense HI e LO LO e HI HI The Common LO SLO expansion triaxial connector provides an additional terminal for common LO and SLO This is useful when connecting 2 or more Model 8020 units The OUT interlock connector provides an interface to control the interlock of Series 26XX and 4200 instruments The EXPANSION interlock is used in a test configuration system using 2 or more Model 8020 units Th
9. 13 Instrument connections for power MOSFET capacitance measurements 6 15 Device connections for power MOSFET capacitance measurements sss 6 25 Open and short compensation ccceccccccccceeeeeeceeceeceeeeseceeeeeeeaeseceeeeessaeaseeeeeeeesseaeeeeeeeeeesaas 6 26 Measurement considerations 1 cesses eee eene nnn nnn nn hara enhn n enun nun 7 1 Iure s seq Umm 7 1 2 wire local vs 4 wire remote sensing for DC l V measurements 7 1 Optimizing cables and connections for low current DC measurements 7 3 ouppressing device oscillations for DC and pulsed DC measurements 7 3 Optimizing connections Tor high current DC PUISES ussessen eei traarisai cuia riri uda kiki 7 4 Optimizing cables and connections for high voltage C V measurements 7 4 Model 8020 High Power Interface Panel Applications Manual Table of Contents Frequently asked dquesliIOHS ieesis iex diues ado masa aE saves Oki ortentiwcadanssansecaiaenesaniaanseasiaans 8 1 Why does my instrument generate an interlock error warning sssssssse 8 1 Why are my DC current measurements unstable ccceceeeeeeeeeeeeeeeeeeeeeeeeaeeneeeeeeeeeees 8 2 Can break the parallel connection of the high current SMUS 8 2
10. 2 2 Pin Phoenix Connector for 2651A Sense CA 568 120 Safety Earth Ground Cable Assembly 8020 ILC UNT Unterminated Interlock Cable 6 8020 ILC S HO Interlock Expansion Termination Plug i 1 8020 900 01 Rev A October 2014 1 3 Section 1 Model 8020 overview Model 8020 High Power Interface Panel Applications Manua KEITHLEY 1 0 Model C5 1502 2 tg 0 Pin Female Hug Housing Termination Block mum 1 1 Model 8020 1 C 8 tem Interlock Expamion Termination Plug Cafaty Standards Conformance A800 Bes E arany 28615 LI Apupongen wT A Y phit MBATHEIJ dp Outta I TEESE bia eG Ts ti px NAOT KEEP WITH Poitier tagn paus m vironmental Disclosure Rep KEITHLEY i Em poe Bap ues Crea mne rakal arean end icum perc iy va 1 0 Tries Mordy amp 20 ILC UNT a WE i ng de mene ae nated Interlock Cable F M a ia A AAA a A Untonminated Interlock C law qms Lu Perry denim mI m dir i Gamsi ee nier iet Ba Pide ied pola i E amii RI Ce O OO OO OO pd E gari LU inar itd p vM Takes Lem C5 1195 8 4d L c i a a De r pres Phoanix Connector far 26514 Sense Lp t 878 arcem Ainii 3 Di z HT s mau i aeara Lee Model B 2 RES KIT X d 7 z HV Rabed Resistors Jur rg Argen oat waj Cri ER IN M pami nd is pecudis ji pend replied An TR anc il LT ep eee amu erty hares bas make us badi CO os fare i Doscriptian j i nibii id hy
11. DC path between nodes 1a and 2 on the 8020 motherboard assembly This is necessary whether or not the 8020 CVU option is installed 2 The overcurrent protection on the 8020 connector cards slows the rise time of pulses from the SMU This overcurrent protection is designed to protect sensitive equipment at the device interface from transient overcurrent conditions due to rapid change in device impedance or discharge of system capacitance For pulsed DC sourcing and measurement with a SMU instrument bypass the overcurrent protection by installing the 10 A fuse The connector cards for the 8020 are supplied with the overcurrent protection bypassed Why don t I get a signal at the output My measurements appear to be an open circuit Be sure to install a short or a resistor between nodes 1 and 2 on the 8020 motherboard assembly so that there is continuity between the instrument panel and the 8020 device connections panel Why are my contact check measurements failing when the SMUs are connected to the high voltage and 200 V channels The high voltage and 200 V channels include a 1 KQ resistor in series with the Sense HI lead This additional series resistance will cause the contact check operation to fail When using the 8020 it is best to disable the contact check feature on the high voltage and 200 V SMU instruments Why is the high current LO terminal not connected to the Common LO terminal of the 8020 The high current that flows through
12. Instrument side interlock connectors INTERLOCK ENGAGED S NONTER RLOCK I nne RR LI For proper interlock functionality any instruments connected to the interlock must be powered on or else disconnected from the interlock The Model 8020 also has internal interlock circuitry to detect whether the top cover of the 8020 is installed or not When the 8020 top cover is installed the external interlock system controls the state of the interlock However when the 8020 top cover is removed the interlock is disengaged regardless of the state of the external interlock A WARNING An interlock connection is required when a 2657 Series instrument is connected and a Series 2600 4200 SMU is used to make measurements beyond 20 V 8020 900 01 Rev A October 2014 2 5 S ection 2 Configuring and installing the Model 8020 Model 8020 High Power Interface Panel Applications Manual On the device connections side of the 8020 there are 2 circular 4 pin connectors The OUT connector is used for the system interlock and the EXPANSION connector is used for extending interlock functionality in a test configuration with 2 or more Model 8020s The EXPANSION connector is also used with the supplied model 8020 ILC S Interlock Expansion Termination Plug when the test configuration contains only one Model 8020 See the below graphic Figure 8 8020 device side interlock connections INTERLOCK gt ENGAGED 500 EXPANSION OU
13. LO SLO channel top shield view COMMON LO SLO CHANNEL HV LO m 200V 1 LO 0 200V 2 LO 200V 3 LO HV SLO 200V 1 SLO 200V 2 SLO 200V 3 SLO HC SLO Common LO and Sense LO are clamped to 42 V from chassis and can be tied to chassis using the binding posts and link at the device connections panel of the instrument See the below graphic Figure 18 LO connector connected to chassis ground lug The high current channel can accept up to two Model 2651A 50 A SMU instruments and places these instruments in parallel to allow up to 100 A pulses Connectors for this model on both the instrument and device connection panels are Phoenix screw terminal This makes it easy to connect banana or unterminated cables to the connector of your choice The channel resistance is very low so 50 A DC and 100 A pulses can be transmitted with little voltage drop across the Model 8020 4 2 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 4 Using the 8020 for DC tests Ensuring continuity in the measurement channel To ensure channel continuity for DC I V tests on the high voltage and 200 V channels install a short or resistor in the DC path between nodes 1A and 2 on the 8020 main board See the below graphic as well as How to insert a series resistor in the 8020 on page 4 4 The 8020 RES KIT resistor kit supplied with the Model 8020 includes a 0 Q resistor among several other resistor val
14. October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications On state characterization of a power MOSFET using 2 Series 2600 4200 SMU instruments up to 10 A pulse This example illustrates how to make remote sense connections to a MOSFET using two Series 2600B or 42x0 SmU instruments The following diagram demonstrates how to make connections between the Device Connections Panel of the Model 8020 and the DUT Figure 47 On state characterization of a power MOSFET using 2 Series 2600 4200 SMU instruments up to 10 A pulse i o Lo ih A Oe miii E kPa Pal SC r ron IM Terie RETIRE EE M un m in m PERCN T BA WO 1 COMME Ka DEVICE CONNECTIONS See note regarding which cable assemblies to use per installed connector card Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX or Model 4200 TRX 8020 900 01 Rev A October 2014 6 9 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual 2 terminal device connections for C V measurements ae The factory installed 8020 CVU option must be installed to make the connections illustrated in this sub section This example illustrates how to make connections to a two terminal device for 3 kV C V measureme
15. To Device DC Input SMU DC Switch Bias tee modes Each Model 8020 CVU bias tee can be configured in one of four modes 1 IV mode see I V mode on page 5 5 2 C V mode on page 5 5 3 CV Hi I mode see C V Hi mode on page 5 6 4 AC guard with DC bias mode on page 5 6 Configure the bias tee mode by programming the DC bias voltage provided by the C V instrument at the AC bias tee input The Model 4210 CVU capacitance voltage instrument has built in DC bias capability that can be utilized to configure the bias tee mode In the Model 8020 CVU bias tee option the 4210 CVU DC bias is not available to the DUT and may only be used as a control voltage For more information on Keithley software that automatically controls the bias tee mode see the HV C V measurement software on page 5 7 topic The next table provides an overview of the four available bias tee modes 8020 900 01 Rev A October 2014 5 3 Section 5 Using the Model 8020 for DC and HV C V tests Model 8020 High Power Interface Panel Applications Manual Table Four available bias tee modes Mode Application Use for best DC low current measurement performance l V mode on page 5 5 Ideal for any DC measurements made with the 8020 CVU installed DC currents up to 1 A are permissible in this mode Example tests Idss Vds ld Use for C V measurements with a maximum DC bias current of 100 uA Frequency range of 10 kHz 2 MHz possible E
16. VU bias tee overview on page 5 1 for more information Channel description The following are the Model 8020 DC test channels e High voltage channel e 200 V channels 1 2 and 3 e Common LO channel e High current channel For DC measurements the high voltage channel passes the high voltage signal at the instrument connections panel directly to the designated connector card at the device connections panel The 200 V channels incorporate overvoltage protection when used in conjunction with a high voltage SMU instrument during device testing a breakdown at the device will not damage the SMU instruments routed through the 200 V channels The common LO channel see the below graphic combines the sense LO of all channels to a common sense LO terminal and combines LO of the high voltage and 200 V channels to a common LO terminal These common terminals are also available via a binding post connector and a 3 lug triaxial connector on the device connection panel of the Model 8020 The binding post connector is useful when DC current above 1 5 A travels via common LO The 3 lug triaxial connector is useful for expanding continuity to other 8020 units in a test configuration See Configuring and installing the 8020 see Connecting 2 Model 8020 units on page 2 7 for detailed information on connecting multiple 8020 units Section 4 Using the 8020 for DC tests Model 8020 High Power Interface Panel Applications Manua Figure 17 8020 common
17. applications measurement conditions that benefit from a series resistor see Section 7 Measurement considerations see Introduction on page 7 1 Me When the series resistance is greater than 0 Q disconnect sense HI of the instrument at the device connections panel The instrument can remain in remote sense as remote sense connections are maintained to node 1a 4 4 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 4 Using the 8020 for DC tests How to insert a series resistor in the 8020 A WARNING Before installing cards or components make sure you remove all electrical connections to the test fixture and follow the discharge procedure outlined in the next section of this manual The following instructions explain how to install a resistor in a path of the Model 8020 1 Remove any external power that is connected to the interface through connected devices or devices under test DUTs 2 Loosen the 4 thumb screws securing the top cover to the unit Remove the top cover and set aside 4 Place the series resistor on the Model 8020 motherboard nodes according to your application See the following conditions and graphic Without 8020 CVU bias tee option e Place the series resistor between nodes 1a and 2 With 8020 CVU bias tee option e Fora static DC signal on the gate place the series resistor between nodes 1b and 2 d e Fora pulsed DC signal on the gate place
18. are important for low current measurements Read more about this topic in the Measurement Considerations see Optimizing cables and connections for low current DC measurements on page 7 3 section For high current measurements noisy measurements could be a symptom of device oscillation see How do I remedy oscillation at the DUT for more details or a result of improper timing between pulses at different device terminals When testing transistors ensure that either the gate or drain is stable before turning on the pulse to the other terminal For example make sure that the gate has fully turned on before starting the drain pulse Otherwise changes to the gate voltage during turn on can present a modulated signal in the drain voltage waveform Can break the parallel connection of the high current SMUs No The parallel connection of the high current channel is fixed within the Model 8020 high power interface panel The two SMU instruments are connected in parallel to allow you to achieve up to 100 A pulse This connection cannot be reconfigured Can I operate the 8020 with the top cover off The top cover of the Model 8020 high power interface panel isolates the operator from hazardous voltages and charge sources that are potentially present on the high voltage and 200 V channels including the integrated bias tees of the 8020 CVU bias tee option The interlock circuitry of the Model 8020 high power interface panel is designed to be en
19. cables to any combination of the 4 screw terminals on either panel side of the Model 8020 See the below 2 figures 2 Connect the other 2 lugged ends of the ground cables to protective earth safety ground Figure 5 Instrument side connections to protective earth INSTRUMENT CONNECTIONS 2651 HIGH Seman LOS EA d Uu a Connect ground cable lt lt CA 568 120 lugs to protective earth Figure 6 Device side protective earth terminals You can also connect ground cable lugs to these terminals on the device connections panel of the 8020 2 4 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 2 Configuring and installing the Model 8020 Connecting the instrument and output interlocks The 8020 has an interlock system to control the interlock of 26xx and 4200 instruments On the instrument connections side of the Model 8020 there are 6 26xx interlock 3 pin connectors and one circular 3 pin connector for the 4200 interlock See the below graphic Use Keithley CA 558 and 236 ILC 3 interlock cable assemblies to connect to Series 2600 and 4200 sCS instruments For proper interlock functionality any instruments connected to the interlock must be powered on or else disconnected from the interlock NOTE For proper interlock functionality any instruments connected to the interlock must be powered on or else disconnected from the interlock Figure 7
20. for the Model 42XX SMU series of source measurement units In a test configuration having both a 200 V SMU and a Model 42XX SMU connected to the DUT this circuitry protects the SMUs from high voltage from the Model 2657 Model 4210 CVU When the Model 8020 CVU option is installed the Model 4210 CVU Capacitance Voltage Instrument connects to the CUR and POT SMA connectors which are the AC inputs of the bias tee Please refer to Section 5 see Bias tee theory overview on page 5 2 for more detail on using the 8020 CVU bias tee option 8020 900 01 Rev A October 2014 3 Section 4 Using the 8020 for DC tests In this section EO I EE ANAA E N AE A A E A TOT 4 1 Channel GeSCription cccccceeeeeccceeeceeeeseeeeeeeeeeeeeeeeeeessaaaaeees 4 1 Ensuring continuity in the measurement channel 4 3 Connecting the high current channel 4 6 Using connector cards to interface to the device 4 6 Connecting to common LO for applications gt 1 5 ADC 4 7 LOVETCUITEREPTODEOPE stessi pentu i RM Rash vE pv Ua Sis 4 8 internal protection CUCUINY iuis soverv eto vit apr ERE wine 4 8 Overview The Model 8020 High Power Interface Panel offers a convenient way to combine SMU instruments and C V instruments to perform a variety of DC I V tests and HV C V tests This section will discuss the configuration of the 8020 to make DC l V tests See Model 8020 C
21. gate and source terminals In this compensation we are only compensating for the largest capacitance of the two terminal combination Note the location of the short in the following figure After installing the short run a short compensation in the ACS Basic software Figure 69 Ciss measurement short compensation 2657 2600 4200 1 Remove the POT device then short these two terminals at the Jl device under test LCUR LPOT 2600 4200 2 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Coss To perform an open compensation for a Coss measurement remove the DUT or lift the probes ona probe station to disconnect from the device and then run an open compensation in the ACS Basic software To perform a short compensation for a Coss measurement remove or disconnect from the device and place a short between the connections to the drain and source terminals In this compensation we are only compensating for the larger of Cgd and Cds typically Cds Note the location of the short in the following figure After installing the short run a short compensation in the ACS Basic software Figure 70 Coss measurement short compensation 2657 HI CUR HCUR Bias T HV a POT HPOT Bias T Remove the device then 2600 4200 short these two 1 HI e terminals at the device under test JL LCUR LPOT N POT CUR HI 2600 42
22. installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the factory for proper cleaning servicing Safety precaution revision as of January 2013 Table of Contents juere Boitranol i i X X 1 1 VUEIDDINIS e amena eoqicietarneba ied emEmIMHEEN CE DINE TIPS RI MINUS INIM ARIS E REN ET RrMN T ORUM 1 1 Organization of arta SEI 1 cQ TEE OE o SS 1 2 Wa COR m Rm m mS 1 2 Wiperuteek igebinezcle Um ERE 1 3 Configuring and installing the Model 8020 2 1 Locating and mounting the Model 8020 cccccccccssseeeeeeeeeseeeeeeeeaeeeeeseseauseeeeeseaseeeeessaaees 2 2 Connecting to protective earth eeeeeessssesssesssseeee nennen nennen nennen nnne nnns 2 4 Connecting the instrument ana output TEerlOCKS iiec eod uskucoanesgu d acu as uax R0 a pp COGO Pad acier iE cod 2 5 deg aero gle a wells 10 24 ND 0 LN E mom 2 6 Conneegna 2 Model 8020 Unlls s suosxcesrariunua Eau ER IS innin Ei d quU AETHER UR EIN DOM LEUR ep IE EEEE 2 7 Connecting multiple 8020 units sucia een o repo iter pe rtu eH Rt i pa n En Eu poen Pa pus tcn eei n terae epp rentes 2 9 lucir gogo etde CNN DR E AE E ELT 2 11 Connecting to the Model 8020 1 eese Lees L eese seen nennen nnn nhan
23. instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as protective earth safety ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock If a screw is present connect it to protective earth safety ground using the wire recommended in the user documentation The A symbol on an instrument means caution risk of danger The user must refer to the operating instructions located in the user documentation in all cases where the symbol is marked on the instrument The A symbol on an instrument means caution risk of electric shock Use standard safety precautions to avoid personal contact with these voltages The A symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The 7 7 symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly disposed of according to federal state and local laws The WARNING heading in the user documentat
24. not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are measurement control and data I O connections with low transient overvoltages and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages Measurement Category ll as referenced in IEC 60664 connections
25. overview eeeeeeeeeees 5 1 HV C V measurement software sese 5 7 Configuring the 8020 for HV C V measurements 5 7 Discharge bias tee and system capacitance 5 9 Use the Model 8020 DP to discharge system capacitance 5 10 Model 8020 CVU bias tee overview The Model 8020 C VU bias tee is a factory installed option for the Model 8020 High Power Interface Panel The 8020 CVU bias tees couple the DC bias from a SMU instrument with the AC measurement of an impedance measurement instrument to enable capacitance voltage C V measurements with DC bias up to 3000 V and AC measurement frequencies from 10kHz to 2MHz This bias tee option is intended for use with the Keithley Series 26xx and 4200 SMU instruments and the Keithley Model 4210 CVU C V instrument The 8020 CVU includes four bias tees A bias tee is installed in circuit with the high voltage SMU channel and each of the 200 V SMU channels of the Model 8020 as shown in the below figure Using all four bias tees enables C V measurements with DC bias at up to four device terminals and allows complete characterization of circuit level and component level capacitance parameters of power devices without connection changes at the device When the 8020 CVU is installed the front panel contains nine SMA connectors Four pairs of SMA connectors that are the AC inputs to the four bias tees and an AC guard con
26. the Model 8020 2 2 The Model 8020 is designed to be installed on a probe station or as close as possible to a probe station to ensure optimal C V and DC measurements See the below figures for unit dimensions and mounting specifications The fully populated weight of the Model 8020 is 5 7 kg 12 5 Ibs Figure 3 Model 8020 mounting specifications instrument and device panels 431 29 mm 16 98 in 437 64 mm 17 23 in 100 84 mm 3 97 in 117 85 mm 4 64 in 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 2 Configuring and installing the Model 8020 Figure 4 Model 8020 mounting specifications unit sides OS ee E lj al 22 1 mm 87 in 66 3 mm 2 61 in LJ n4 B UJ E 101 6 mm 60 45 mm pire hn 4 0 in 2 38 in NR 222 50 mm 8 76 in MOUNTING LOCATIONS 8 32 BOTH SIDES IDENTICAL 369 06 mm 14 53 in 286 51 mm 11 28 in 280 16 mm 11 03 in 8020 900 01 Rev A October 2014 2 3 Section 2 Configuring and installing the Model 8020 Model 8020 High Power Interface Panel Applications Manua Connecting to protective earth A WARNING The Model 8020 must be connected to protective earth safety ground using both of the supplied green yellow ground cable Model CA 568 120 1 Connect one lugged end of both of the supplied Model CA 568 120 ground
27. the component level involves a characterization of capacitance between every device terminal Looking at the capacitance at the circuit level involves a characterization of the combination of component level capacitances As an example the below figure illustrates the component level capacitances of a power MOSFET Figure 51 Component level capacitances for power MOSFET Cep Cos Ces The next 3 figures illustrate the relationship between the component level and circuit level capacitances for a power MOSFET Similar capacitance measurements can also be made for BJT and IGBT devices Figure 52 Diagram of input capacitance for a power MOSFET Ciss Ces Cop 8020 900 01 Rev A October 2014 6 13 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Figure 53 Diagram of output capacitance for a power MOSFET Coss Cop Cps A Figure 54 Diagram of reverse transfer capacitance for a power MOSFET Crss Ccp s Device capacitance typically varies with applied voltage Complete characterization of the DUT requires knowledge of the capacitance at the maximum rated voltage The remainder of this section will review the connection diagrams between the instrumentation the Model 8020 and the DUT for high voltage capacitance measurements 6 14 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Instrument connections for p
28. the high current LO terminal could cause perturbations in the voltage at the LO terminal of the 200 V SMU channels To prevent perturbations and the errors that these may cause in the measurement of 3 terminal devices such as MOSFETs and IGBTs the 8020 isolates the force leads of the high current channel Additionally this isolation makes it possible to optimize the path for high current by keeping lower resistance If there are limited contacts to the DUT the LO and Sense LO of the gate SMU can be connected to the Sense LO terminal of the high current channel for MOSFETs and IGBT as there is minimal current flowing through the gate terminal For BJTs there must be a separate LO connection for the SMU instrument that connects to the base terminal 8020 900 01 Rev A October 2014 8 3 A accessories included 1 3 B bias tees discharging 5 10 modes 5 3 5 4 overcurrent protection 4 8 8 3 theory 5 2 C connecting instruments and outputs 2 5 2 6 2 7 2 9 connections 2 4 2 5 2 6 2 7 2 9 to instrument panel 3 5 3 7 connectors 8020 CVU e 3 3 device panel 3 3 3 4 instrument panel 3 1 3 2 3 3 contact information 1 2 D dimensions 2 2 F FAQs 5 1 I interlock 2 5 2 6 2 7 2 9 M maintenance 6 1 mounting 2 2 multiple instruments connecting 2 7 2 9 O output cards installing 2 11 protective earth connecting to 2 4 T troubleshooting FAQs 5 1 Index
29. the series resistor between nodes 1a and 2 Figure 22 Model 8020 motherboard resistor between nodes 1 and 2 Install resistor here when 8020 CVU bias tee option is not installed or when generating pulsed DC signals on the device gate terminal AD Be S a 4 mt Dc amp 7 ike te terminal 5 Tighten the screws that secure the resistor leads Install resistor here when 8020 CVU bias tee option P is installed or when generating static DC signals on the device is 6 Bend the exposed leads back toward the resistor body CAUTION The resistor lead must point back toward the resistor body to reduce the possibility of current leakage from the bias tees in the adjacent 8020 CVU if installed 7 Replace the unit top cover 8 Tighten the 4 thumb screws at the corners of the top cover 9 Reconnect any external connections to the Model 8020 8020 900 01 Rev A October 2014 4 5 Section 4 Using the 8020 for DC tests Model 8020 High Power Interface Panel Applications Manual Connecting the high current channel The LO of the high current channel is isolated from the common LO of the Model 8020 This eliminates the possibility of voltage errors on the 200 V channels due to high current pulses For optimal voltage measurement on all connected SMU instruments keep the high current force connections both HI and LO isolated from connections to other SMU instruments For multi terminal devices tie together th
30. to INTERLOCK 3 pin rectangular Interlock sockcts cables CA 558 1 Connect to COMMON LO SLO Model 2651 he u EXPANSION ain omar a 4 or iaxial socket c f 7078 TRX Connect to Connect to Model 2657 INTERLOCK INTERLOCK 3 pin circula OUT socket 4 CENE 4 pin circular a socket x 8020 Interlock Expansion Termination Plug Praga Mode 8020 ILC S EXPANSION m 4 pin circular lt Model 236 ILC 3 socket Model 2600 D When the common LO current exceeds 1 5ADC please use the LO binding post to link the LO terminals of the two Model 8020 interface panels Model 4200 SCS Connect to INTLK 3 pin circular socket 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 2 Configuring and installing the Model 8020 Connecting multiple 8020 units More than 2 8020 units may be connected so that any of the connected units interlocks will enable or disable the interlock feature for all connected instruments The common LO SLO may also be maintained with this configuration as well The connections are the same as those used for 2 Model 8020 units with 2 differences e An 8020 1 ILC expansion cable connects the first unit in the series interlock EXPANSION connector to the interlock OUT of the next 8020 This connection is repeated for all successive 8020 units e The common LO S
31. using the Model 2600 4200 Lo M PANINI Poe E DEVICE CONNECTIONS a PRA ae E See note regarding which cable assemblies to use per installed connector card Cable assemblies will depend upon the connector card the user installs Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX Or Model 4200 TRX 6 4 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Using the Model 2651A This example illustrates how to make remote sense connections to a 2 terminal device using the Model 2651A SMU instrument Figure 43 2 terminal connections using the Model 2651A i COMBINED AM SS ana sasac L y W EIPAN LE f A La OW eS O User 3 defined gt amp user supplied cables 8020 900 01 Rev A October 2014 6 5 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual 3 terminal device connections for l V measurements Off state characterization of a power MOSFET using the Model 2657A and Series 2600B 4200 SMU instruments up to 3 kV This example illustrates how to make local sense connections to a MOSFET using one Model 2657A and up to two Series 2600B SMU instruments through the Model 8020 High Power Interface Panel
32. 00 2 8020 900 01 Rev A October 2014 6 31 Section 7 Measurement considerations In this section RE CO DETTO TT 7 1 2 wire local vs 4 wire remote sensing for DC I V WEISS AUTANT ho eee m sear ne ee eae ere eee rrrncer er rnc mare 7 1 Optimizing cables and connections for low current DC measure Meme MN ME T ee geey a Rear er eee ee een 1 3 Suppressing device oscillations for DC and pulsed DC Ghote UPS eee ee eee DT 1 3 Optimizing connections for high current DC pulses 7 4 Optimizing cables and connections for high voltage C V BN s EIE d MERE ETT 7 4 Introduction The following topics describe some considerations to be aware of when taking measurements 2 wire local vs 4 wire remote sensing for DC l V measurements This information is relevant for DC IV measurements only HV C V measurements made through the 8020 are 2 wire local sense only The 2 wire sensing method requires only two test leads However as shown in the following figure test lead resistance can seriously affect the accuracy of 2 wire resistance measurements particularly when measuring smaller resistance values Figure 71 Two wire resistor sensing SourceMeter Instrument Test current 1 Lead Resistance l V resistances V l under test Current sourced Va Voltage measured V Voltage across resistor V Measured resistance 7 R 2 Reap Me l Actual resis
33. 014 6 17 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Figure 58 Cds block diagram schematic 2657 HCUR HPOT 2600 4200 Cos 1 LCUR LPOT 2600 4200 2 6 18 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Cgd Crss Figure 59 Cgd Crss connection diagram HV C V 3 Terminal CRSS CGD measurement connections 90 O M M SMA Cable 33 cm CA 406 SMA F to SMB F Adapters 131936200 TYP gt SMB M to SMA M t Adapterrs 131936100 TYP gt t B AC GUARD 8020 900 01 Rev A October 2014 6 19 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Figure 60 Cgd Crss block diagram schematic 2657 Crss Ccp 2600 4200 1 LCUR LPOT AC GUARD 2600 4200 2 6 20 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Ciss Figure 61 Ciss connection diagram HV C V 3 Terminal CISS measurement connections 2s MM A 50 Q M M SMA Cable 33 cm CA 406 SMA F to SMB F Adapters 131936200 TYP gt B SMB M to SMA M t Adapters 131936100 TYP gt B v I oz t Or co POT 8020 900 01 Rev A October 2014 6 21 Section 6 A 6 22 lications Model 8020 High Power Interface Panel A Figure 62
34. 3 Connecting to the Model 8020 Model 2611 and Model 2612 connection notes The Model 8020 includes overvoltage protection circuitry for the Model 2611 and 2612 SMUs Ina test configuration having both a 200 V SMU and a Model 2657 connected to the DUT this circuitry protects the SMUs from high voltage from the Model 2657 NOTE The LO terminal is connected to chassis ground if you connect the Model 2611 or Model 2612 to the Model 8020 through the Model 2600 TRX SMU Connector Model 2635 and Model 2636 connection notes The Model 8020 includes overvoltage protection circuitry for the Model 2635 and 2636 SMUs Ina test configuration having both a 200 V SMU and a Model 2657 connected to the DUT this circuitry protects the SMUs from high voltage from the Model 2657 Model 2651 connection notes The Model 8020 connects up to 2 Model 2651 instruments in parallel for up to 100 A pulsed current output ae There is no safety interlock on the Model 2651A the safety interlock is not necessary because output voltage of the Model 26514 is below hazardous levels The CA 558 2 cable is shown here in case you want to use Output Enable to shut off the output when the Model 8020 top cover is removed To activate Output Enable refer to the Model 2651A Reference Manual Output Enable can be activated using the front panel or by remote control Model 4200 SCS connection notes Model 42XX SMUs The Model 8020 includes internal protection circuitry
35. 3 and the DUT In cases where only 2 2600 4200 SMU instruments are available make connections between 2600 4200 channels 1 and 2 the Common LO channel and the DUT Figure 65 3 terminal power MOSFET capacitance measurements connections a BIZI Hv ALIS Red ia LI TF T ua OP A Lt dc a EI HIA M ies i CHO I LL k DEVICE CONNECTIONS a R See note regarding which cable assemblies to use per installed connector card Cable assemblies will depend upon the connector card the user installs Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 0 8 TRX or Model 4200 TRX 8020 900 01 Rev A October 2014 6 25 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Open and short compensation Perform open and short compensation to remove error due bias tee impedance as well as the stray resistance Capacitance and inductance in the test setup For more information on the importance of open and short compensation refer to Optimizing cables and connections for high voltage C V measurements in Section 7 The following sections detail the connections in order to properly perform open and short compensation for HV C V measurements using the Model 8020 High Power Interface Panel 6 26 8020 900 01 Rev
36. 4200 Series instruments Connections are as follows e SHI Sense HI e HI HI e LO SLO LO sense LO The INTERLOCK connectors provide and enable interlock functionality for the Model 26XX series of instruments An illuminated LED beneath the ENGAGED label indicates that the interlock is engaged and active The 2651 high current 1 connectors provide Model 2651 input connections for source LO source HI LO and HI Connections are as follows e SLO Sense LO e SHI Sense Hi e LO LO e HI HI 8020 900 01 Rev A October 2014 lications Manua Model 8020 High Power Interface Panel Applications Manual Section 3 Connecting to the Model 802 The 2651 high current 2 connectors provide Model 2651 input connections for source LO source HI LO and HI Connections are as follows e SLO Sense LO e SHI Sense Hi e LO LO e HI HI a r T AN D Ground screws for connections to protective earth safety ground E The HV bias tee input connectors provide SMA input connections for AC POT HV CUR force and HV POT sense These connectors are designed for connection to a CV measurement instrument CUR Model 8020 CVU option The AC guard SMA connector provides an AC guard for connection to a bias tee This connector is only present with the integrated 8020 CVU bias AC GUARD tee option Q The bias tee input connectors 1 2 and 3 provide SMA input 1 connections for AC CUR force and POT
37. 8020 for DC and HV C V tests Model 8020 High Power Interface Panel Applications Manual C V Hil mode This mode is ideal for performing C V measurements where DC bias current up to 1 A is required This high current may be useful for making C V measurements on a semiconductor device in the on state In this mode both bias tee AC and DC switches are closed Compared to the off state C V mode C V measurements in this mode are degraded below 100 kHz The next figure shows the basic bias tee electrical block diagram in on state C V mode Figure 30 8020 bias tee C V Hi I mode AC Input C V Instrument AC Guard Switch J AC Switch DC Input AC DC Output SMU To Device AC guard with DC bias mode This mode allows an AC guard to be placed at a device terminal while allowing for DC bias at that terminal This can be useful for characterizing C V between two device terminals that have three or more terminals This is shown using a network of three capacitors in the next two figures with the goal of accurately measuring Cdut The C V instrument applies AC voltage at one terminal and measures the AC current at the device s second terminal However capacitance to the third terminal causes some current leakage Without the AC guard the measured current leads to erroneous impedance measurements Using the AC guard routes the leakage capacitance current away from the AC measurement terminal Figure 31 8020 without AC guard leakage p
38. A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Cgs To perform an open compensation for a Cgs measurement remove the DUT or lift the probes ona probe station to disconnect from the device and then run an open compensation in the ACS Basic software To perform a short compensation for a Cgs measurement remove or disconnect from the device and place a short between the connections to the gate and source terminals Note the location of the short in the following figure Then run a short compensation in the ACS Basic software Figure 66 Cgs measurement short compensation 2657 HI Bias T HV i AC GUARD 2600 4200 1 Remove the device then short these two terminals at the device under test LCUR LPOT HPOT 2600 4200 2 8020 900 01 Rev A October 2014 6 27 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual 6 28 Cds To perform an open compensation for a Cds measurement remove the DUT or lift the probes ona probe station to disconnect from the device and then run an open compensation in the ACS Basic software To perform a short compensation for a Cds measurement remove or disconnect from the device and place a short between the connections to the drain and source terminals Note the location of the short in the following figure Then run a short compensation in the ACS Basic software Figure 67 Cds measurem
39. Applications Manual Section 7 Measurement considerations Optimizing cables and connections for low current DC measurements Ensuring proper connections between the instrumentation and the device under test DUT is key to optimizing low current DC measurements Leakage currents are caused by stray resistance paths between instruments and the DUTs Leakage current can occur through parasitic or nonparasitic leakage paths An example of parasitic resistance is the leakage path across the insulator in a coaxial or triaxial cable An example of nonparasitic resistance is the leakage path through a resistor that is connected in parallel to the DUT A driven guard is important for maintaining low leakage measurements Each of the HV and 200 V channels of the 8020 brings in the driven guard from each SMU instrument on the triaxial connector inner shell This driven guard is always enabled and provides a buffered voltage that is at the same level as the HI or sense HI for remote sense voltage Guard is typically used to drive the guard shields of cables and test fixtures Guard is extended to a test fixture from the cable guard shield This is only true for triaxial cable connections When using coaxial connector cards such as the Model 8020 SHV guard is not carried to the DUT Therefore measurements made through coaxial connector cards will include the error due to leakage paths that occur between the connector card and the DUT For optimal low curre
40. CA 558 INTLK 3 pin circular socket P d Connect to INTERLOCK 3 pin rectangular socket Model 8020 CONNECTIONS UU Model 8020 ca Model 2 e 36 ILC 3 Model 8020 DEVICE Device under test red access point NOTE If there are multiple access points to the device under test the user must tie each of their interlock switches in series Triaxial SLO LO C cable 4 onnect to 7078 TRX COMMON LO SLO IJ Connect to gt connector card y SLO triaxial socket Connect to COMMON LO SLO 8020 Unterminated EXPANSION Interlock Cable triaxial socket Model 8020 ILC UNT Y z _f Connect to UM Connect to Connect to INTERLOCK device under test INTERLOCK OUT access point EXPANSION 4 pin circular SYSTEM 4 pin circular Socket INTERLOCK Socket 8020 Interlock Expansion Cable Model 8020 1LC 1 Connect to COMMON LO SLO connector card SLO 3 triaxial socket Connect to COMMON LO SLO P st EXPANSION triaxial socket Triaxial cables 7078 TRX A 2H m a x Connect to Connect to INTERLOCK INTERLOCK OUT EXPANSION 4 pin circular 4 pin circular Socket Socket 8020 Interlock Expansion Cable Model 8020 ILC 1 When the common LO current exceeds 15 ADC please use the LO binding pos
41. Can operate the 8020 with the top cover Off ccccccssseeeeeeceeseeeeeeceeeeeeeeeseeaseeeessaeaeeees 8 2 Why is the pulse rising edge so slow for my SMU sseeeeeeeeeeeeeees 8 3 Why don t get a signal at the output My measurements appear to be an open circuit 8 3 Why are my contact check measurements failing when the SMUs are connected to the high voltage and 200 V channels cccccccsssecccesseeeceeeececceseecseaeeeessegeeessegeeeeseaes 8 3 Why is the high current LO terminal not connected to the Common LO terminal SUG Ugo 0 1 TTE 8 3 Section 1 Model 8020 overview In this section NN NN RE 1 1 Organization of manual sections esseeeeeeeeesse 1 2 Contac eom t T 1 2 Unpacking and InebDeollollosuasdessissass ie viu PARES E YR DEM niania 1 3 Welcome Thank you for choosing a Keithley Instruments product The Model 8020 High Power Interface Panel provides a highly accurate flexible and easy to use interface between the Keithley Instruments SourceMeter instruments and a variety of semiconductor probe stations or custom test fixtures The Model 8020 High Power Interface Panel has six measurement pathways accommodating 3 kV 200 V and 100 A measurements You can configure five of the pathways with a variety of output connector types to match your probe station You can configure four pathways with the optional bias tees This provides high voltage C V m
42. DC Output DC Input To Device SMU 0 2 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 5 Using the Model 8020 for DC and HV C V tests Isolating the C V instrument and SMU from each other is not foolproof or completely stable across the range of frequencies used by the C V instrument Balancing the performance of DC I V and AC C V signal path needs can result in compromises in the usable frequency range for AC C V measurements and the minimum current sensitivity for DC low current measurements Also bias tees are typically coaxial and not triaxial which further compromises low current DC measurements by removing the ability to use a driven DC guard to shunt extraneous leakage currents Such performance compromises often prompt users to remove the bias tee before DC l V characterization These measurement setup changes are time consuming and prone to error The 8020 CVU bias tee option has multiple operation modes that optimize the performance for each measurement type while nearly eliminating measurement configuration changes between DC l V and C V measurements Additionally the bias tees are fully guarded and configured for triaxial connections so that the low current DC measurements may be performed through the bias tee see the following figure Figure 27 8020 CVU single bias tee block diagram AC Input C V Instrument AC Guard Switch i Switch AC DC Output
43. FET For a Ciss input capacitance measurement of a power MOSFET the software programs the bias tee for C V mode 8020 900 01 Rev A October 2014 5 7 Section 5 Using the Model 8020 for DC and HV C V tests Model 8020 High Power Interface Panel A Configuring the 8020 for HV C V measurements lications Manua A WARNING You must discharge the system capacitance before installing resistance in the Model 8020 See Use the Model 8020 DP to discharge system capacitance on page 5 10 in this section for details and instructions To enable high voltage C V measurements with the 8020 CVU bias tee options ensure that there is continuity in the correct path between nodes 1 and 2 on the 8020 motherboard for the high voltage and 200 V channels For C V measurements install a short to ensure that continuity is in the AC DC Output path between nodes 1b and 2 on the 8020 motherboard see the following two figures For static DC measurements you may want to install a resistor See How to insert a series resistor in the 8020 on page 4 4 for details Figure 34 8020 AC DC signal path on motherboard to enable C V measurements DC Input AC Input Figure 35 8020 signal path nodes 1a 1b and C on motherboard Install resistor here for static DC measurements DISCONNECT OUTPUT SENSE HANI m t N 1 LA MERITI T SOL rp 4 AC DC Output Install short here for C V measurements 5 8 8020 900 01 Rev
44. LO signal is maintained by connecting the second unit s SLO LO channel to the next unit s common LO SLO expansion This connection is repeated for all successive 8020 units When the common LO current exceeds 1 5 ADC please use the LO binding post to link the LO terminals of the Model 8020 interface panels See Connecting to common LO for applications gt 1 5 ADC see Connecting to common LO for applications gt 1 5 ADC on page 4 7 The interlock EXPANSION connector of the final 8020 unit must be terminated with the 8020 ILC S Interlock Expansion Termination Plug see the following diagram for a test array using 3 Model 8020 units 8020 900 01 Rev A October 2014 2 9 Section 2 Configuring and installing the Model 8020 Model 8020 High Power Interface Panel Applications Manual 2 10 Figure 12 8020 interlock connections multiple units INSTRUMENT CONNECTIONS side Model 2651 or Connect to DIGITAL UO Interlock Model 2657 typical cables CA 558 H L Ad Connect to A diens onnec z a DIGITAL I O lr i i Model 2600 typical 4 places i 1 o i Model 2600 i D 0 Model 2600 i 0 Model 2651 or Model 2657 Model 2600 Model 4200 SCS Model2600 Connect to INTERLOCK 3 pin rectangular 4 Interlock sockets cables a CA 558 1 Connect to INTERLOCK 3 pin circula socket Interlock cable Connect to
45. NC cables will remove protection from SourceMeter Instrument voltages and may result in instrument damage You must use triaxial cables for connections to the Model 8020 8020 900 01 Rev A October 2014 3 5 lications Manual Model 8020 High Power Interface Panel A Section 3 Connecting to the Model 8020 Connections to the 8020 instrument panel Figure 16 LSS lapon ypes aasayjoid o Enj oz L 885 v2 ages puncuB j3auua7 S2S 00zf APON gss vo S929 yaoa SNS 0z08 9Iqe2 xoopaju LI v LG9Z pJeno asuac yea aAmosejnJd o sbni oz L B85 v2 ajgeo punoJb jeuuoD Lb v2 Uu GL eiqe vis W N OOF XH1 8 D AQE jEeixeu ooo aqe xoopaju 955 2 AGEI xooperul sjajdepwy XH1 8404 sa qea EWELL sajqea EIXE 01 ssues O1 0J asuag v o H 1H 8808s pSS v2 AH Z5jge2 Bixe aeaa yBiy a TTA F i 4 Eis HE onsoT th wise yea aA ead aj ag Bn DzL 8965 v2 6 Be a aged punojB j2auunz F oJ i 5 OOLGEGLEL sjapdepwy d WIWWS er Nans _ i 21 i ze E Ap Jo T ge Ej I i OT oso amp lt ee EIC 1592 lapow L6 1 82 o0z9EBLEL 3 N 3 siadepy sjajydepw aal vis 4 giWs o1 4 viNS suomnoeuuoo juaulaJnseaui eEululla Z ADAH 8020 900 01 Rev A October 2014 3 6 Model 8020 High Power Interface Panel Applications Manual Section
46. T The Model 8020 interlock OUT connector on the device connections side of the unit is designed for use with the supplied 8020 ILC UNT interlock to unterminated cable The interlock enables the high voltage outputs of the connected instruments when the normally open switch at the DUT access point is closed The Model 8020 interlock is satisfied only when e The top cover to the 8020 is correctly installed and any top covers to other Model 8020s in the test configuration are also correctly installed e The system interlock is engaged all normally open switches are closed at DUT access points of the test configuration When the 8020 interlock is satisfied LEDs on the instrument connections and device connections panels of the 8020 are illuminated Connecting a single 8020 unit 2 6 NOTE For a test configuration using a single Model 8020 the 8020 ILC S Interlock Expansion Termination Plug must be connected to the EXPANSION jack to enable interlock functionality See the below graphic Figure 9 8020 interlock plug installed 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 2 Configuring and installing the Model 8020 Instrument side and device side connections for a single Model 8020 are shown in the below figure Figure 10 8020 interlock connections single unit INSTRUMENT Device under test d connections Model 8020 CONNECTIONS access point EP o
47. WifeXe c1 R107210 High Power Interface Panel User s Manual 8020 900 01 Rev A October 2014 DM 8020 900 01 A Greater Measure of Confidence www keithley com KEI I HLEY A Tektronix Company Model 8020 High Power Interface Panel Applications Manual 2014 Keithley Instruments Cleveland Ohio U S A All rights reserved Any unauthorized reproduction photocopy or use of the information herein in whole or in part without the prior written approval of Keithley Instruments is strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Other brand names are trademarks or registered trademarks of their respective holders Document number 8020 900 01 Rev A October 2014 KEITHLEY LIET Safety precautions The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with nonhazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer to the user documentation for complete product specifications If the product is used in a manner
48. and either of the 8020 units top cover interlocks will enable or disable the interlock feature for all connected instruments The following example diagram uses 2 8020s One additional triaxial cable is used in this instance Additionally note that the 8020 ILC S Interlock Expansion Termination Plug must be connected to the interlock EXPANSION connector of the second unit 8020 900 01 Rev A October 2014 2 7 Section 2 Configuring and installing the Model 8020 Model 8020 High Power Interface Panel Applications Manual 2 8 Figure 11 8020 interlock connections 2 units Device under test INSTRUMENT DEVICE is d CONNECTIONS Model 8020 CONNECTIONS access point side side NOTE If there are multiple access points to the device under test the user must tie each of their interlock switches in series Model 2651 or Connect to DIGITAL UO Interlock Model 2657 typical cables CA 558 D 4 places P e 8020 Unterminated EXPANSION Interlock Cable r a triaxial socket Model 8020 ILC UNT Connect to INTERLOCK 4 R Connect to M PEDE E 3 pin rectangula Sockets Model 2600 typical 4 places Connect to INTERLOCK device under test INTERLOCK OUT access point EXPANSION 4 pin circular SYSTEM 4 pin circular socket INTERLOCK socket Model 2600 8020 Interlock Expansion Cable Model 8020 ILC 1 Model 8020 Model 2600 Connect
49. ath causes measurement errors Icaut Caut AC Current Measurement of ACV Source of C V Instrument C V Instrumen Imeasured lcaut Cleakage Cleakage 7 5 6 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 5 Using the Model 8020 for DC and HV C V tests Figure 32 8020 AC guard eliminates measurement errors laut C dut AC Current Measurement of C V Instrument measured lout ACV Source of C V Instrumen ICleakage AC Guard Programming the bias tee to AC guard mode requires a 12 V signal an SMA connector on the 8020 CVU labeled AC Guard has a 12 V output signal Connect the POT or CUR terminal of the bias tee to the AC Guard terminal The next figure shows the basic bias tee electrical block diagram in AC Guard mode Figure 33 8020 AC guard mode block diagram AC Input AC Guard AC Guard Switch AC Switch DC Input AC DC Output SMU DC To Device Switch HV C V measurement software The multi bias tee and multi mode capability of the Model 8020 CVU allows you to use the C V characterization with variety of devices ACS Basic Edition software version 2 1 or higher includes a large device test library and automatically controls the mode of the bias tee with each test For example the software programs the bias tee mode to l V mode before measuring the Idss drain to source current test of a
50. below Descriptions of the connections are provided after the graphic Figure 14 Model 8020 Instrument Panel 8020 CVU option installed oa Rn x AN o mice CK i ae AF se ces Foe ees The Model 2657 high voltage connectors provide sense HI HI LO and sense LO input connections for the Model 2657 instruments Connections are as follows e SHI Sense HI e HI HI e LO SLO LO sense LO Section 3 Connecting to the Model 8020 1 SHI HI LO SLO 2 SHI HI LO SLO gt O SHI HI LO SLO INTERLOCK ENGAGED l ZNwrERLoCK 1 3 2 Model 8020 High Power Interface Panel A The Model 2600 4200 1 connectors provide sense HI HI LO and sense LO input connections for the Model 2600 4200 instruments These connections are intended for use with 200 V compatible 2600 4200 Series instruments Connections are as follows e SHI Sense HI e HI HI e LO SLO LO sense LO The Model 2600 4200 2 connectors provide sense HI HI LO and sense LO input connections for the Model 2600 4200 instruments These connections are intended for use with 200 V compatible 2600 4200 Series instruments Connections are as follows e SHI Sense HI e HI HI e LO SLO LO sense LO The Model 2600 4200 3 connectors provide sense HI HI LO and sense LO input connections for the Model 2600 4200 instruments These connections are intended for use with 200 V compatible 2600
51. d slot the Model 8020 STC card will not fit in the HV output channel right most card slot on the device connections side of the unit Only output cards with a maximum voltage rating of 3 kV or higher can be used in the HV output channel 4 Using a slot screwdriver tighten the screw at the lower left corner of the output card 5 Place the output module guide retainer back onto the unit chassis and tighten the three screws 6 Reinstall the top cover of the Model 8020 8020 900 01 Rev A October 2014 Section 3 Connecting to the Model 8020 In this section Instrument panel overview eeeeeeeeeeeeennneeeen nne 3 1 Model 8020 CVU option esses 3 3 Device connections panel overview eseeeeesese 3 3 Connections to the instrument panel 3 5 Instrument panel overview A WARNING The input output terminals of the Model 8020 are rated for connection to circuits rated Installation Category I only with transients rated less than 1500 V peak above the rated input Do not connect the Model 8020 terminals to CAT Il CAT lll or CAT IV circuits Connection of the terminals to circuits higher than CAT I can cause damage to the equipment or expose the operator to hazardous voltage Instrument connections are made to the instrument panel of the Model 8020 The instrument panel of the Model 8020 with 8020 CVU option installed is shown
52. e ENGAGED LED illuminates when the interlock is engaged and active The LO connector provides a common LO connection This jack may be connected to the chassis ground lug connector see below via the ground lug link This connector is useful when LO may carry more current than can be passed through the LO triaxial connector This connection supports up to 4 5 ADC or 10 A fuse The chassis ground lug connector provides a grounding point for the chassis of the Model 8020 You can connect this lug to the common LO jack with the supplied connector link Five connector card slots are available on the device panel side of the Model 8020 The card slot in which the connector card is installed corresponds to a set of connections on the instrument side of the 8020 For more information on this topic see Using the 8020 for DC tests see Channel description on page 4 1 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 3 Connecting to the Model 8020 Connections to the instrument panel This section describes the connections you can make to the instrument connections panel of the Model 8020 High Power Interface Panel A WARNING The ground wires must be attached to a known protective earth safety ground before powering on instruments Failure to attach the ground wires to a known protective earth may result in electric shock Do not convert triaxial cables to BNC cables Using B
53. e common LO to the LO of the high current channel at the device terminal or as close as possible to the device terminal Using connector cards to interface to the device 4 6 The connector cards interface each instrument or measurement channel to the connector or terminal at the device under test Each connector card is designed for Kelvin connectors and thus has separate force and sense connections There are several connector cards available A WARNING All card slots must have connector cards installed or the Model 8020 BLK blank card faceplate installed Refer to the Model 8020 specifications for a complete list of compatible connector cards The high voltage channel is keyed so that only high voltage connector cards or cards with ratings of at least 3 kV can be installed To install a new or different connector card refer to Section 2 Configuring and installing the 8020 BIO For optimal accuracy in making low current measurements use triaxial connector cards such as the Keithley Instruments Model 8020 KHV Model 8020 STC or Model 8020 AHV 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 4 Using the 8020 for DC tests Connecting to common LO for applications gt 1 5 ADC Some connector cards are not rated for the full current capability of the Model 8020 This is especially important to remember as you consider the connector card for the Common LO channel Refer to the c
54. e manual For more information about bookmarks see Adobe Acrobat or Reader help Contact information If you have any questions after you review the information in this documentation please contact your local Keithley Instruments office sales partner or distributor or call Keithley Instruments corporate headquarters toll free inside the U S and Canada only at 1 800 935 5595 or from outside the U S at 1 440 248 0400 For worldwide contact numbers visit the Keithley Instruments website http www keithley com 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 1 Model 8020 overview Unpacking and inspection Each Model 8020 was carefully inspected electrically and mechanically before shipment After you unpack all items from the shipping carton check for any obvious signs of physical damage that may have occurred during transit Report any damage to the shipping agent immediately Save the original packing carton for possible future shipment See the following 2 graphics and accompanying table to verify that you have received all accessories and documentation NOTE Depending on your system configuration your shipping carton may contain additional accessories and documentation What you should have received Figure 1 Hardware accessories Figure 2 Documentation Graphic Quantity Description number shipped 8020 SNS X 8 Pin to 2 Pin Phoenix Cables CS 1195
55. easurements on up to 4 pins of the device under test The Model 8020 comes with a selection of resistors that you can install to provide stability and extra protection to the device Additionally the Model 8020 High Power Interface Panel offers the following e A common LO reference e Overvoltage protection for all 200 V channels ideal for device testing configurations using 200 V SMUS and higher voltage SMUs e A variety of connector types e A single interlock interface for multiple instruments e An interface for adding series resistor elements for measurement stability and absolute current limit e Optional transient overcurrent protection on the 200 V channels Section 1 Model 8020 overview Model 8020 High Power Interface Panel Applications Manual Organization of manual sections The first part of this user manual provides general information that helps you set up install and make connections to the high power interface panel The sections after the general sections provide information that helps you use the Model 8020 with specific SourceMeter Instruments This information includes applications that can help you set up your tests The last part of the user manual provides maintenance and troubleshooting information It also provides references to additional resources Bookmarks for each section of this manual are provided in the PDF The manual sections are also listed in the Table of Contents located at the beginning of th
56. ed this limit for very brief periods especially during events in which there is a very large change in device impedance Additionally high currents may be present in the test system due to rapid discharge of cable and system capacitance which may be at hundreds to thousands of volts The transient overcurrent protection is useful for suppressing such current transients The transient overcurrent protection is designed for use in low current applications It is not intended for applications in which there is continuous current greater than 100 mA as such current could result in voltage errors Additionally the overcurrent protection will degrade the pulse shape of pulses output from the SMU instrument bypass the overcurrent protection in these cases by installing the 10 A fuse on the connector card Internal protection circuitry The Model 8020 includes overvoltage protection circuitry that protects instruments in applications where a device breakdown or other potential failure could connect the high voltage output of a Model 2657 high voltage SMU to a lower voltage SMU The Model 8020 includes overvoltage protection circuitry for the Models 2611 2612 2635 2636 and 4200 SCS SMUs The protection circuitry is automatically connected whenever you make connections between the Model 8020 and these SMUs 4 8 8020 900 01 Rev A October 2014 Section 5 Using the Model 8020 for DC and HV C V tests In this section Model 8020 CVU bias tee
57. ent short compensation 2657 Remove the device then short these two terminals at the device under test 2600 4200 2 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Cgd Crss To perform an open compensation for a Cgd measurement remove the DUT or lift the probes on a probe station to disconnect from the device and then run an open compensation in the ACS Basic software To perform a short compensation for a Cgd measurement remove or disconnect from the device and place a short between the connections to the gate and drain terminals Note the location of the short in the following figure below Then run a short compensation in the ACS Basic software Figure 68 Cgd Crss measurement short compensation 2657 HCUR HPOT Remove the device then short these two terminals at the device under test 2600 4200 1 LI LCUR LPOT AC Bias T d GUARD 2 HI 2600 4200 2 8020 900 01 Rev A October 2014 6 29 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual 6 30 Ciss To perform an open compensation for a Ciss measurement remove the DUT or lift the probes ona probe station to disconnect from the device and then run an open compensation in the ACS Basic software To perform a short compensation for a Ciss measurement remove or disconnect from the device and place a short between the connections to the
58. essaaess 4 6 Connecting to common EO Tor applications gt 1 5 ADO eenesaxasuatacase ust bua irat koRt Iu S pRK ca eei 4 7 2 ieMiciere eie EMEN NER T TT RR 4 8 Juiidgcelieucie perta i 4 8 Table of Contents Model 8020 High Power Interface Panel Applications Manual Using the Model 8020 for DC and HV C V tests 5 1 Model 8020 CVU bias tee OVErVICW ccccccseececesececenececeneeeeeseetaneceteueceteneeenaneeteaseetsneeeteness 5 1 Bias tee theory Rd IQ E emm 5 2 Dis TEE DOES cucine er MU E er mee ee RED MM MEE 5 3 auTO 5 5 AS AO AG NRI ITem 5 5 dS Me M Rar E NT TETTE 5 6 AC guard with DC bias mode eesssssssssesssseseeeeeennnen nnne nnn nnne nnn nn nan n nnns nnn nans 5 6 HV C V measurement software osse inpe tcd aeviuahalcniudad eu box ed abi di xd seRbarxI C KRRdS HU RA EN CH PURA d EP Eua UU 5 7 Configuring the 8020 for HV C V measurements ssssesssseeeeeeeennnnneeennnnn 5 8 Discharge bias tee and system capacitance cccccseeeeccecceeeeeeeeeceeeeeeeeesuaeeeeeeseeeeeeeessaaees 5 9 Use the Model 8020 DP to discharge system capacitance sseesesssssssse 5 10 his rfe 6 1 Ble See 8 a7 Cel 6 cae ee uenis tn Seat aeRO qu Des tee MEN MUN CMM Nl LP MEI ME 6 1 Equipment options all GxaMiples i aec ied utres rna ioo ue sec oio
59. g the discharge probe handle touch each post for nodesia 1b and 2 of the high voltage channel on the 8020 main board and hold there for at least one second to safely discharge system capacitance See the following 3 graphics Figure 38 8020 DP node 1a s DISCONNECT 700 in GuTPuT SENSE H1 CHANN y 3 iF WANE i Y La A Figure 40 8020 DP node 2 8020 900 01 Rev A October 2014 5 11 Section 5 Using the Model 8020 for DC and HV C V tests Model 8020 High Power Interface Panel Applications Manual DITORE eT io Fo ag AN MG A f Oe 5 Repeat the discharge procedure for nodes 1a 1b and 2 of the 200 V channels on the Model 8020 main board 9 12 8020 900 01 Rev A October 2014 Section 6 Applications In this section Device COMMC CHONG A NT TT 6 1 Equipment options all examples 6 2 PUES ee eee es M I a EAE 6 2 2 terminal device connections for l V measurements 6 3 3 terminal device connections for l V measurements 6 6 2 terminal device connections for C V measurements 6 10 3 terminal device connections for C V measurements 6 12 Device connections This section of the manual provides several example connection diagrams to connect the Model 8020 High Power Interface Panel and the device under test using several multi instrument configurations The information is provided to assist you in mak
60. gaged when the top cover is installed If the top cover is off the interlock is disengaged and any SourceMeter instruments SMUS with outputs that are configured for high voltage will not turn on A WARNING Opening the top cover and disengaging the interlock does not necessarily discharge the capacitors of the 8020 CVU bias tee s Always perform the Discharge bias tee and system capacitance on page 5 9 procedure after removing the top cover of the Model 8020 Low voltage SMUs may still operate with the top cover off and without the interlock connected For example the Model 2651A will still operate if the output enable function is not activated Additionally the Models 2611A 2612A 2635A 2636A and 4200 SMU will operate if they are programmed to the 20 V range or lower For additional information on interlocks see Connecting the output interlock see Connecting the instrument and output interlocks on page 2 5 topic Also refer to the appropriate manual for your SMU instruments 8 2 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 8 Frequently asked questions Why is the pulse rising edge so slow for my SMU For the high voltage and 200 V channels there are two reasons for degraded pulses or rise time through the Model 8020 1 For pulsed DC sourcing and measurement with a SMU instrument on the high voltage and 200 V channels install a short or resistor in the
61. h 3 1 mesirument DANCY Cl EW S osisrreu Ei VU Ha FESYRI PO PEEHFIIE CEU WEL N FINU E NLPTIU EVI Fia EF maieret 3 1 Meets eis e 3 3 Device connections panel overview sseessssesssseeeeeeeen nennen nennen nena nnn nnns nnns 3 3 Connections to the instrument panel essesesesesseeeeee nennen 3 5 Model 2611 and Model 2612 connection NOTES ccccssseecccceeseeeeeceeeeeeeeceeeeeeesseaeeeeesaeaeeeenenas 3 7 Model 2635 and Model 2636 connection notes sess 3 7 Model 2651 connection notes ceecccccceeseeeecceesececcceeseceeecauseceessueaseeeessaueceesssaeeeessaaeesessssaass 3 7 Model 4200 509 CODne HOT NOIES sires anes ndeceddeeaanec erroreei neenon GOAR ere E ae Ria aeii 3 7 Using the 8020 for DC tests m 4 1 T E E N 4 1 aU de TOIT ae cece ge eoece tu sanetanee se esecs se8e aces aoe tees soetnnecsetesace sesancessenesuelceetenee sete 4 1 Ensuring continuity in the measurement Channel ccccccssseeeccseseecceeseeecseeseesseseesseess 4 3 How to insert a series resistor in the 8020 ccccccsseccceeseeeceeeeeeceeeeeceeeseeseeeessaseeesseseessaaeeeens 4 5 Connecting the high current channel iuueni oor touto tanda niin enr H o nan Con En adn deerat 4 6 Using connector cards to interface to the GOVICE ccccccccssseeeeeeeeeeeeeeeeeeeeseeeessaaeeee
62. h an increase in the test frequency The connection between the shields forms an inductive loop that is directly inserted in the measurement path Connect the cable shields together as close as possible to the DUT in order to minimize the inductive loop area See the following illustration for an example Figure 73 Inductive loop formed by connected shields Connect shields together Shield a B Shield B G K i ri a Ed i c NS A Capacitor on wafer 7 4 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 7 Measurement considerations Me The Model 8020 4 wire measurements for the C V instrument are terminated at the instrument panel From the instrument panel out to the DUTs the C V measurement is a 2 wire measurement Do not connect the Sense HI and Sense LO terminals to the DUTs Stray capacitance resistance and inductance in the test setup cause measurement errors These errors will vary with setup and their impact varies with frequency To remove these errors from the measurement perform connection compensation See the next figure that shows the parasitic elements in a typical test circuit and the simplified model used to derive the device impedance Figure 74 Parasitics and model to derive impedance Hcun Model 4210 CVU Small capacitance measurements are high impedance and are particularly affected by the stray capacitance in the test setu
63. he SMU to discharge the capacitance properly after each test and before opening the top cover of the 8020 and touching the 1a 1b and 2 nodes of the Model 8020 motherboard Note that an operator error a power outage or an unforeseen event can leave a dangerous charge in the system Use the 8020 DP discharge probe to manually discharge the bias tee capacitance and system capacitance prior to making adjustments on the 8020 motherboard or at the device interface 8020 900 01 Rev A October 2014 5 9 Section 5 Using the Model 8020 for DC and HV C V tests Model 8020 High Power Interface Panel Applications Manual Use the Model 8020 DP to discharge system capacitance A WARNING Prior to connecting the Model 8020 DP High Voltage Discharge Probe ensure that the Model 8020 is connected to protective earth Refer to Connecting to protective earth on page 2 3 in Section 2 1 Ensure proper connection from the 8020 DP to a protective earth safety ground screw on either the device or instrument side of the Model 8020 see graphic The device connections panel is shown in the below graphic Figure 37 8020 DP connected to protective ground 5 10 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 5 Using the Model 8020 for DC and HV C V tests 2 Loosen the thumb screws on the top cover of the Model 8020 Remove the top cover of the 8020 and set it aside 4 While holdin
64. ing connections for different measurements on power semiconductor devices For information on connecting the SMUs to the Instrument Connections Panel of the Model 8020 please refer to Connections to the instrument panel on page 3 5 in section 3 of this manual This section provides connection diagrams for the following examples e 2 terminal device characterization for l V measurements using a single SMU Using a 2657A Using a Series 2600B 4200 Using a 2651A Kelvin connections shown e 3 terminal l V Connections Off state characterization of a power MOSFET using a Model 2657A and Series 2600B 4200 up to 3 kV Off state characterization of a power MOSFET using a Series 2600B 4200 SMUs up to 200 V On state characterization of a power MOSFET using a Model 2651A and Series 2600B 4200 up to 50 A 100 A pulse On state characterization of a power MOSFET using a Series 2600B up to 10 A pulse e 2 terminal device characterization for C V measurements using two SMUs e 3 terminal C V connections of component level and circuit level capacitance parameters of a power MOSFET NOTE All 3 terminal examples are shown using a power MOSFET as an example device Similar connections can be made for measuring IGBT and BJT devices Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Equipment options all examples Depending on your testing needs you can order any of the following configurat
65. ion explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for
66. ions Part number 8020 2600 PCT 3B PCT CVU 8020 CVU Part number 8020 2600 PCT 4B PCT CVU 8020 CVU Part number 8020 2600 PCT 2B PCT CVU 8020 CVU Part number 8020 2600 PCT 1B PCT CVU 8020 CVU Description Model 8020 High Power Interface Panel High Voltage Parametric Curve Tracer Parametric Curve Tracer Capacitance Voltage Unit Model 8020 CVU Integrated 3 kV and 200 V Bias Tees for Model 8020 Description Model 8020 High Power Interface Panel High Voltage and Current Parametric Curve Tracer Parametric Curve Tracer Capacitance Voltage Unit Model 8020 CVU Integrated 3 kV and 200 V Bias Tees for Model 8020 Description Model 8020 High Power Interface Panel High Current Parametric Curve Tracer Parametric Curve Tracer Capacitance Voltage Unit Model 8020 CVU Integrated 3 kV and 200 V Bias Tees for Model 8020 Description Model 8020 High Power Interface Panel Low Power Parametric Curve Tracer Parametric Curve Tracer Capacitance Voltage Unit Model 8020 CVU Integrated 3 kV and 200 V Bias Tees for Model 8020 1 The 8020 CVU option is required for the measurement examples in this section Software The ACS Basic software available from Keithley Instruments contains dozens of power semiconductor test libraries This software is recommended for configuring and controlling multiple SMU instruments to make measurements on semiconductor devices ACS Basic also includes many C V libraries for commo
67. is a simple schematic for 2 terminal C V measurements Figure 50 2 terminal C V measurement schematic 2657 HCUR HPOT 2600 4200 1 LCUR LPOT Open and short compensation Perform open and short compensation to remove error due to bias tee impedance as well as the stray resistance capacitance and inductance in the test setup For more information on the importance of open and short compensation refer to Optimizing cables and connections for high voltage C V measurements on page 7 4 in section 7 of this manual To perform an open compensation for a two terminal C V measurements remove the device under test or lift the probes on a probe station to disconnect from the device and then run an open compensation in the software To perform a short compensation for a two terminal C V measurement replace the device under test with a short circuit and then run a short compensation in the software 3 terminal device connections for C V measurements NOTE The factory installed 8020 CVU option must be installed to make the connections illustrated in this sub section 6 12 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Overview and theory There are two different ways to look at the capacitance of three terminal power semiconductor devices such as MOSFETs BJTs and IGBTs at the component level and at the circuit level Looking at the capacitances at
68. n capacitance measurements on power semiconductor devices 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications 2 terminal device connections for l V measurements Using the Model 2657A This example illustrates how to make local sense connections to a 2 terminal device using the Model 2657A 3 kV SMU instrument Figure 41 2 terminal connections using the Model 2657A Device side connections for l V measurement of 2 terminal devices l V TESTS Off state characteristics with a 2657 A 990 ve r _ COMMMED 2431 cca tcs o to 2D we C OEAMSCOR o o Mom cw Pan M S COMMON a Cw wj 2 DEVICE CONNECTIONS See note regarding which cable assemblies to use per installed connector J card Cable assemblies will depend upon the connector card the user installs Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX or Model 4200 TRX 8020 900 01 Rev A October 2014 6 3 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Using the Model 2600 4200 This example illustrates how to make local sense connections to a 2 terminal device using a Series 2600B or Series 4200 SMU instrument Figure 42 2 terminal connections
69. nce and the cables are recommended whenever the Model 2651A High Power System SourceMeter instrument is used When coaxial cable is not suitable for the probe station environment cables with at least a 12 AWG conductor are recommended You can also twist single conductors for HI and LO to minimize loop area inductance There may be some test system geometries in which it may not be possible to overcome the parasitic resistance and inductance such as probing to vertical devices and measurement error will result Excessive inductance may slow the rise time of a pulse and result in inaccurate fast ADC readings on the leading and falling edges of the pulse For a series resistance error take note of the maximum voltage that the SMU can tolerate between the force and sense leads Exceeding this voltage will result in a voltage measurement error Reduce the test current to stay within the force sense voltage limitation Optimizing cables and connections for high voltage C V measurements Successful C V measurements require a precise coaxial cabling setup The Model 4210 CVU C V instrument is a four terminal instrument that includes remote sense capability A C V meter includes an AC voltage source and an AC ammeter The sense leads are used to maintain the voltage at the device terminals As with all AC measurements ensure a connection between the shields of all the terminals at the DUT The integrity of this connection becomes increasingly important wit
70. nection The next figure shows the 8020 with the bias tees installed The AC inputs for each bias tee are labeled POT and CUR to represent the sense and force terminals of the 4210 CVU respectively However high voltage C V measurements done through the 8020 are two wire local sense measurements and the two AC inputs for each bias tee are shorted together in the bias tee Therefore for high voltage capacitance measurements Kelvin connections are terminated at the instrument side of 8020 NOTE When measuring capacitance through the Model 8020 disconnect the SMU Sense HI and Sense LO cables at the device connections panel of the Model 8020 Section 5 Using the Model 8020 for DC and HV C V tests Model 8020 High Power Interface Panel Applications Manual Figure 25 Model 8020 instrument connections panel High voltage bias tee ee mUpRHeqe e mammam a ee gros KEITHLEY 8020 HIGH POWER INTERFACE PANEL HIGH VOLTA HI LO SLO 200 V bias tees Bias tee theory overview The 8020 CVU bias tees combine C V measurement with DC bias while isolating the C V instrument and SMU instrument from each other A typical bias tee uses a capacitor to isolate the C V instrument from interfering with DC measurements and an inductor is used in series with the SMU instrument to isolate the SMU from interfering with AC measurement see the following figure Figure 26 8020 typical coaxial bias tee block diagram AC Input C V Instrument AC
71. nt DC measurements triaxial connections are recommended throughout the test system Low current DC measurements require additional settling time when performed with the Model 8020 CVU bias tee option installed Refer to the Model 8020 specifications for typical settling time values Suppressing device oscillations for DC and pulsed DC measurements Power transistors are prone to self oscillation under forward bias conditions In such cases there may be oscillations or ringing in the gate or drain voltage waveforms This would be visible using an oscilloscope or the Model 2651A high speed ADC when monitoring the drain waveform These oscillations often result in inconsistent or unrepeatable DC drain voltage and current measurements To dampen these oscillations and stabilize the gate some manufacturers recommend adding a resistor in series with the gate terminal between the device gate and the SourceMeter connected to the gate See How to insert a series resistor in the 8020 for details The device manufacturer may recommend a specific resistance value or you may determine an appropriate resistance value by trial and error Typical gate resistor values range from tens to hundreds of ohms The Model 8020 is supplied with a kit of resistors that can be used for this purpose See the 8020 RES KIT HV Rated Resistors PA or a list of supplied resistance values NOTE When series resistors are used to quell device oscillations 4 wire rem
72. nts using a Model 2657A SMU and a Series 2600 4200 SMU instrument The following diagram illustrates the connections between the 4210 CVU instrument card of the Model 4200 SCS and the instrument connections panel of the Model 8020 Figure 48 HV C V 2 terminal measurement connections HV C V 2 Terminal measurement connections i SMA Tee Adapters SMA F to SMB F F M F Adapters A M 131936200 CS 1391 SMB M to SMA M Adapters 131936100 PA Misi 8020 Hl H POWER INTERFACE PANEL j iaia impes 6 10 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications The following diagram illustrates the connections between the device connections panel of the Model 8020 and the device under test Figure 49 2 terminal device side C V measurement connections Lo H XlAMEZHL Poe as DEVICE CONNECTIONS um See note regarding which cable assemblies to use per installed connector card Cable assemblies will depend upon the connector card the user installs Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX Or Model 4200 TRX 8020 900 01Rev A October2014 BL Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Below
73. onnector card specifications for specific current limits The common LO channel is a sum of the LO terminals from the high voltage and 200 V SMU instruments The maximum current limit of the common LO channel is 4 5 A DC but this is only available at the binding post at the device connections panel See the graphic below If the sum of the DC current in the high voltage and 200 V channels exceeds the connector card specification access common LO from the LO binding post Figure 23 8020 common LO binding post lcoMMON LO SLO EXPANSION The LO output can also be connected to ground via the link attached to the chassis ground lug See the below graphic Figure 24 LO connector connected to chassis ground lug 8020 900 01 Rev A October 2014 4 7 Section 4 Using the 8020 for DC tests Model 8020 High Power Interface Panel Applications Manual Overcurrent protection Each connector card contains a 10 A fuse to allow maximum pulse current for each SMU instrument Removing this fuse enables transient overcurrent protection This transient overcurrent protection is useful for protecting probes and other sensitive interface hardware at the device under test Transient overcurrent protection is only available on the 200 V channels within the Model 8020 When using a connector card in the HV channel be sure that the 10 A fuse is installed Although each SMU instrument has a programmed current limit it is possible to exce
74. ote sense connections must terminate at the instrument side of the resistor Therefore disconnect sense HI at the DUT If the device oscillations remain after inserting a series resistor enable the high capacitance mode if available on the SMU connected to the gate If high capacitance mode is enabled the gate SMU cannot output pulsed DC signals 8020 900 01 Rev A October 2014 7 3 Section 7 Measurement considerations Model 8020 High Power Interface Panel Applications Manual Optimizing connections for high current DC pulses _ NOTE The Model 8020 is capable of carrying up to 100 A pulses from two Model 2651A SMU instruments You can connect two Model 2651A SMU instruments to the Model 8020 and the SMU instruments are connected in parallel High current pulses require low resistance and low inductance connections to minimize voltage drops and voltage errors in the measurements The series resistance of a cable is related to the thickness of the current carrying conductor To minimize error due to excessive series resistance use cables of sufficient thickness To maximize accuracy of voltage measurements made in a high current test setup use 4 wire remote sense connections between the high current SMU instrument and the DUT Observe that inductance is related to the loop area between the HI and LO leads of the high current conductor The Keithley Model 2651A KIT cable assembles are designed to have low resistance inducta
75. ower MOSFET capacitance measurements The graphics in this section illustrate the connections between the 4210 CVU instrument card and the instrument connections panel of the Model 8020 The graphics also assume that connections to the SMU have already been made For detail on how to connect SMU to the 8020 please refer to Connections to the instrument panel on page 3 5 in section 3 Cgs Figure 55 Cgs connection diagram HV C V 3 Terminal CGS measurement connections 1 l 50 Q M M SMA Cable 33 cm CA 406 SMA F to SMB F Adapters 131936200 TYP SMB M to SMA M Adapters 131936100 TYP Y BILL Q 0 56 4 5 Oin C it gt gt L3 8020 900 01 Rev A October 2014 6 15 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual Figure 56 Cgs block diagram schematic 2657 AC GUARD 2600 4200 1 LCUR LPOT 2600 4200 2 6 16 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 6 Applications Cds Figure 57 Cds connection diagram HV C V 3 Terminal CDS measurement connections 90 O M M SMA Cable 33 cm CA 406 SMA F to SMB F Adapters 131936200 TYP gt SMB M to SMA M Adapters 131936100 TYP _ CG Gt lt gt o gt 50 lt Om lt gt m c b A a 8020 900 01 Rev A October 2
76. p During open compensation stray capacitance is measured so that it may be removed from the calculation of the DUT capacitance Perform open compensation by removing the DUT connection This can be done by lifting the probes on a probe station or by removing or disconnecting the DUT Carefully remove the DUT connection without altering the connection to the test instrument For example the distance between the instrument terminals should remain the same Run the open compensation routine in ACS Basic Versions 2 1 and higher and it will measure impedance across the frequency to capture the stray capacitance Larger capacitance measurements are low impedance and are particularly affected by the stray series resistance and test setup inductance Short compensation measures the stray resistance and inductance as a function of test frequency Perform short compensation by shorting out the C V instrument terminals at the DUT Carefully short out the device terminals without altering the connections to the test instrument including the distance between the test instrument leads Run the short compensation routine in ACS Basic Versions 2 1 and higher and it will measure impedance across the frequency to capture the stray capacitance When performing C V measurements with the 8020 C VU option short and open compensation help to cancel the impact of the capacitance resistance and inductance of the bias tees from the device measurement 8020 900 01 Rev
77. ran coer Pra caen er med o Tha Krig calzaranti Made ROCCE HIT amp a A Eng ut Bua 1 uter suppres drra rahiri F leni rape i GR Hermes Ps an Par Mocha inia imr Vara Em red Mica Lal died wi en e ar ausi asd esheets ait Ves of ji PPa V we be ia cokes V Ta TON 1100 drin im a eres irs lade jarga Cigars A Bec ALT He rated raito Statement of Compliance 9 laser ipii erret serrer na na greed ihi MM fen pinhas neas ja dad xm SGM T O number shipped 8 Paess Environmental Disclosure Report Instruments 7 Systems jo PA1073 Statement of Compliance 2 Pin Female Plug Housing Termination Block PA 071323500 8020 900 01 Rev A October 2014 Section 2 Configuring and installing the Model 8020 In this section Locating and mounting the Model 8020 2 2 Connecting to protective Carth cccccccsseeceeeeesseeeeseeeeeeeeeees 2 3 Connecting the instrument and output interlocks 2 5 Connecting a single 8020 unit eeeeeeessseeeeeeeeesee 2 6 Connecting 2 Model 8020 units eeeeeesseeeeeeeeesss 2 7 Connecting multiple 8020 units eessseeeeeeeesse 2 9 installing Output COFUSL crastino mid ERU RUE On E chai USE 2 11 Section 2 Configuring and installing the Model 8020 Model 8020 High Power Interface Panel Applications Manual Locating and mounting
78. require protection for high transient overvoltages often associated with local AC mains connections Certain Keithley measuring instruments may be connected to mains These instruments will be marked as category ll or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30 V RMS 42 4 V peak or 60 VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000 V no conductive part of the circuit may be exposed Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance limited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install p
79. rotective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured For safety instruments and accessories must be used in accordance with the operating instructions If the instruments or accessories are used in a manner not specified in the operating instructions the protection provided by the equipment may be impaired Do not exceed the maximum signal levels of the
80. s is the default state for the bias tees Use this mode for performing any DC measurements through the 8020 C VU bias tees Low current DC measurements made with the 8020 CVU bias tee installed require additional settling time over those made without a Model 8020 C VU refer to the Model 8020 specifications for more detail This mode achieves low DC leakage current by opening the AC switch in the bias tee Do not use this mode for C V measurements The next figure shows the basic bias tee default mode electrical block diagram Figure 28 8020 bias tee I V mode block diagram AC Input C V Instrument AC Guard 71 AC Switch DC Input AC DC Output SMU DC To Device Switch C V mode This mode is preferred mode for most C V measurements This mode achieves an AC measurement frequency range of 10 kHz 2 MHz by opening the bias tee DC switch In this mode the maximum DC bias current from the DC SMU through the bias tee is 100 uA Though the DC switch is open full DC voltage can still pass through the DUT through the bias tee resistor This mode is not intended for DC l V measurements The next figure shows the basic bias tee electrical block diagram in off state C V mode Figure 29 8020 bias tee C V mode block diagram AC Input C V Instrument AC Guard Switch J AC Switch DC Input AC DC Output SMU To Device Switch 8020 900 01 Rev A October 2014 9 5 Section 5 Using the Model
81. t to link the LO terminals of the two Model 8020 interface panels Connect to COMMON LO SLO EXPANSION A triaxial socket Connect to oni INTERLOCK OUT c 4 pin circular socket Connect to 8020 Interlock Expansion INTERLOCK maaninen ry EXPANSION 4 pin circular socket 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 2 Configuring and installing the Model 8020 Installing output cards The following optional connector cards are available for use with the Model 8020 8020 AHV Kelvin Agilent HV Triaxial e 8020 SHV Kelvin SHV 8020 KHV Kelvin Keithley HV Triaxial e 8020 STC Kelvin Standard Triaxial Installation of the connector cards requires removal of the 8020 s top cover and output module guide retainer Refer to the following graphic and instructions Figure 13 Model 8020 output card installation Output module guide retainer MEM mu o m i 1 a i V Remove the top cover of the Model 8020 using the four thumb screws Using a slot screwdriver loosen the three screws on the output module guide retainer and set it aside Slide the output card into a vacant card slot as shown in the above figure Ensure that the captive screw on the card is backed out far enough so that it does not catch on the output card side rail ae While an HV card will fit in any available car
82. tance R Section 7 Measurement considerations Model 8020 High Power Interface Panel Applications Manual The 4 wire sensing method as shown in the following figure minimizes or eliminates the effects of lead resistance by measuring the voltage across the resistor under test with a second set of test leads Because of the high input impedance of the voltmeter the current through the sense leads is negligible and the measured voltage is essentially the same as the voltage across the resistor under test Figure 72 Four wire resistance sensing SourceMeter Instrument Test current I Sense current pA gt LEAD Lead V Resistance resistances under test Current sourced by SourceMeter V Voltage measured by SourceMeter V Voltage across resistor Because sense current is negligible V V V V and measured resistance Ei Eia R The 8020 includes 1 MQ auto sense resistors between Sense HI and HI and 1 KQ between Sense LO and LO These resistors ensure that there is always a connection to the Sense terminals and that improper connections do not result in unintended output NOTE If you have installed a resistor between nodes 1 and 2 on the 8020 motherboard to suppress device oscillations remove the Sense HI connection at the device connections panel of the 8020 The SMU will sense voltage at the instrument side of the resistor 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel
83. tor card Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX or Model 4200 TRX 8020 900 01 Rev A October 2014 6 7 Section 6 Applications Model 8020 High Power Interface Panel Applications Manual On state characterization of a power MOSFET using the Model 2651A and Series 2600 4200 SMU instruments up to 100 A pulse This example illustrates how to make remote sense connections to a MOSFET using one or two Model 2651A SMUs and one Series 2600B SMU or 42x0 SMU instrument The following diagram demonstrates how to make connections between the device connections panel of the Model 8020 and the DUT Figure 46 On State Characterization of a Power MOSFET using Model 2651A and Series 2600 4200 SMU instruments up to 100A pulse EDANHAEGM z DEVICE CONNECTIONS CS 1195 2 gt Ag user supplied 1 user supplied connector connector D SM y User gt See note defined regarding m lese which cable supplied assemblies cables to use per installed connector card Connector Card Connector Card Connector Card Connector Card 8020 AHV 8020 KHV 8020 SHV 8020 STC Cable Assembly Cable Assembly Cable Assembly Cable Assembly User supplied Model HV CA 554 User supplied Model 7078 TRX Or Model 4200 TRX 6 8 8020 900 01 Rev A
84. ues ranging from 20 Q to 1 MQ Figure 19 Resistor installed between nodes 1a and 2 DISCONNECT OUTPUT SENSE HI IF Some high gain devices are prone to oscillation during testing and a series resistor is useful for suppressing such oscillations You may also use series resistors to limit the absolute current from the SMU instrument such as for a breakdown voltage measurement The wide variety of resistor values in the Model 8020 RES KIT resistor kit is useful for suppressing oscillations or enforcing an absolute current limit You will need to experiment with different resistor values to identify the best resistance value for your application The following schematics illustrate the circuits created when series resistors are installed at a pathway node on the 8020 main board Figure 20 Resistor installed for on state characteristic measurements Uu serAnstalled serjes resistor Series 26005 4200 or 2551A Series 26008 or 4200 Using a series resistor for gate stabilization when measuring on state characteristics 8020 900 01 Rev A October 2014 4 3 Section 4 Using the 8020 for DC tests Model 8020 High Power Interface Panel Applications Manual Figure 21 Resistor installed for off state characteristic measurements U ser installed series resistor Series 2B500B or 4200 Using a series current limiting re sistor for measuring aff state characteristics with the 2657A For more information on the
85. un edo quamus Us iUud cvi e ed Sage pac nade 6 2 sor E 6 2 2 terminal device connections for l V measurements seesseeesseeeeeeenreeenne 6 3 Usno Mme Modol 2097A RN eerie lees tee tear rie a E d m to E 6 3 Using the Model 2600 4200 S 6 4 Using the Model Rec edo REPERI DEEP 6 5 3 terminal device connections for l V MEASUFEMENTS ccceececeseeceeeeceeeeeeeteneeteneeneeeeaes 6 6 Off state characterization of a power MOSFET using the Model 2657A and Series 2600B 4200 SMU instruments up to 3 KV ccccccceeseseseeeeeeeeeceeeeseeeeeeeesseeaeeeeeeeeesaas 6 6 Off state characterization of a power MOSFET using the Series 2600B 4200 SMU metrumens Up 10 m 6 7 On state characterization of a power MOSFET using the Model 2651A and Series 2600 4200 SMU instruments up to 100 A pulse cece eececceeeeeeeeeeeeeeeeeeeeneeeeeeeeeeaas 6 8 On state characterization of a power MOSFET using 2 Series 2600 4200 SMU instruments up to 10 A pulse RM TS 6 9 2 terminal device connections for C V measurements ccccceseeeceeseeecceeseeeseseeeesaueees 6 10 Open NC shori COMI 1 9 2E EET 6 12 3 terminal device connections for C V measurements cccceceecceceseeeeeeeeseeeeeseeeeesanees 6 12 Au VB aol EOI Beer eee eae lena setae M TEE 6
86. witch is intended to be connected to a test fixture on the enclosure of a semiconductor prober or device handler or on the doors of a test equipment rack When all of these switches are closed both interlock LEDs on the Model 8020 are lit Make sure the interlock cables part number CA 558 2 are properly connected between the instruments and the Model 8020 interface panel Also make sure that the interface panel top cover is fully closed and that any user access points connected to the Interlock Out connector on the Model 8020 are closed The interlock is designed so that it can be used with 2 or more Model 8020 units For more information on how the interlock works with more than 1 8020 unit in a test configuration see Connecting 2 Model 8020 units on page 2 7 and Connecting multiple 8020 units on page 2 9 For additional information on interlocks see Connecting the output interlock see Connecting the instrument and output interlocks on page 2 5 topic Also refer to the appropriate manual for your SMU instruments Section 8 Frequently asked questions Model 8020 High Power Interface Panel Applications Manual Why are my DC current measurements unstable several factors contribute to unstable current measurements Such factors vary based on whether the measurement is for low current or high current measurements For low current measurements triaxial cabling and connections enable shielded cables and guarding to the DUT which
87. xample tests Ciss Coss Use for C V measurements with a maximum DC bias current of 1 A Frequency range of 100 kHz 2 MHz possible Not for low current C V mode on page 5 5 C V Hi mode on page 5 6 DC measurements Example tests Ciss Coss AC guard see Use for measuring AC guard with capacitance between two DC bias mode terminals of a device with on page 5 6 three or more terminals This mode guards capacitance to third terminal by shunting AC current away from the AC measurement circuit Example tests Cgd Cgs Cds Block Control AC switch AC guard DC switch diagram voltage state switch state state Closed Il V mode 0 V default Open Open on page 5 state 5 C V mode 10V Closed Open Open on page 5 5 C V Hi 10 V Open Closed mode on page 5 6 412 V Closed Closed AC guard Closed see AC guard with DC bias mode on page 5 6 1 The control voltage is a DC voltage driven at the AC input of the bias tee Each control voltage must be maintained within 250 mV A minimum drive current of 15 mA is required to close any of the desired switches 2 Dependent on test system inductance 3 Dependent on test system inductance 4 Available at AC Guard terminal of 8020 CVU bias tee option 8020 900 01 Rev A October 2014 Model 8020 High Power Interface Panel Applications Manual Section 5 Using the Model 8020 for DC and HV C V tests l V mode Thi

Model 8020 High Power Interface Panel User`s Manual

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