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1. EC DEVIS ORE 13 Dimens onal DEGWIBES Des edP PARU DNE PPAR UDIN EDD PAM QUE TUE 14 Assemblv D AMY esse seen a EM ENDE MERI OPE 15 Optical Encoder IE UNI NACE ES TE IAE UI 16 Mlapnetie Encoder Elli MM P m 17 Part and Serial Number Location sauce ne eee re 18 C aucon and Warn no Kabels 18 Maintenance and Lite Expectdli6y ee ee ar ee es euere 19 SPALTE Par IS en 19 omplianee Documents ae er 1 LS LL er ee ee 20 Restriction of Hazardous Substances 20 CE Declaration Or ee een 20 Mfr na EEE 21 3 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide REVISON NOTES REV INITIAL RELEASE 5 15 15 4 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Introduction The mSR is a series of linear positioners that fits a miniature foot print but delivers large value for cus tomers looking to move a relatively light payload with high precision All key components are integral to the unit residing within the body of the stage to provide a clean looking reliable unobstructed package At the heart of the mSR is an innovative non contact linear servo motor This direct drive
2. Yangjae Tower 949 3 Dogok 1 dong Gangnam gu Seoul 135 860 Korea Tel 82 2 559 0454 Fax 82 2 556 8187 Mexico Parker Hannifin de Mexico Eje uno Norte No 100 Parque Industrial Toluca 2000 Toluca CP 50100 M xico 52 722 275 A200 Fax 452 f22 2 79 0316 Singapore Parker Hannifin Singapore Pte Ltd 11 Fourth Chin Bee Road singapore 619702 Tel 65 6687 6300 Fax 65 6265 5125 6261 4929 Taiwan Parker Hannifin Taiwan Co Ltd No 40 Wuchiuan 3rd Road Wuku Industrial Park Taipei County Taiwan 246 ROG Tel 88622298 8987 Fax B862 2208 8982 25 Thailand Parker Hannifin Thailand Co Ltd 1023 3rd Floor TPS Building Fattanakarn Road Suanluang 10250 Thailand Te 66 02717 8140 Fax 66 02717 B148 UK Parker Hannifin Ltd Tachbrook Park Drive Tachbrook Park Tel 44 0 1926 317970 Fax 44 0 1926 317980 USA Parker Hannifin Electromechanical Automation Division Main Office Compumotor CTC 5500 Business Park Drive Rohnert Park 84928 USA TH 707 584 7 55H 800 358 9070 Fax 707 584 8015 Email emn supportiparker com Parker Hannifin Electromechanical Automation Division Daedal 1140 Sandy Hill Road Irwin PA 15642 Ta 724 BB1 8200 800 245 6003 Fax 124 861 3330 Email ddicat parker com WWW PARKERMOTION COM PH 724 861 8200
3. Center Driven Ironcore Linear Motor The mSR 80 offers both a4 and 8 pole ironcore linear motor based upon the application thrust requirements Each of these motors have been optimized operate on 48 Volts Di Dual Precision Square Rails Two precision aligned square rail bearings to support the payload and provide superior straightness and flatness Tapped Holes and Dowel Pinning mSR080 An Optional Magnetic Counterbalance The 80 with 25 mm stroke has an optional magnetic counterbalance that can be used for Z axis applications The magnetic counter balance is amore robust solution when compared to spring or pneumatic driven alternatives High Flex Cabling The uses high flex cabling as standard to ensure maximum life of the stage regardless if it s integrated into a multi axis system Integrated Home and Limit Sensing Home and limit sensors have been integrated into the mSR 80 encoder read head and signale are passed through the same cable minimizing ihe amount of cables requiring cable The has tapped holes in both the top management and base for ease of mounting and dowel pins to ensure repeatable mounting when CE and RoHS Compliance configuring systems made with mSR The mR conforms to both Five Different Linear Encoder Technologies The 80 provides maximum versatility with three different optical encoder resolutions 1 07 and 0 07 micron an analog sine Cosine op
4. motor has been optimized for force speed and acceleration to deliver outstanding performance and response A variety of high precision non contact linear encoders provides sub micron resolution and repeatability Selectable resolutions range from 10 nanometers to 1 micron Precision linear square rails provide extremely smooth precise linear translation Travel limit and home sensors are conven iently designed into the unit for easy adjustment over the entire travel of the stage Each stage has been fitted with hi flex cabling to address cable flexing concerns associated with multi axis system The mSR is intended to be integrated as a component into a machine with separate power electron ics and motion controller As such the mSR is an incomplete machine requiring proper power elec tronics to be added as well as necessary machine guarding The mSR is only rated for use in rela tively clean environments moving relatively light payloads s 8 kg General Information Thank you for your interest in the products and systems offered by Parker Hannifin Electromechanical Automation Division Our products and systems are recognized around the world for their functionality performance and reliability Our products can be combined to form single or multi axis systems with a full support of custom applications The intent of this guide is to provide general information for our MSR product line including safety basic maintenance and featur
5. 12 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Optical Encoder iai ern Ground 2 9 E Incremental Signals P NEN DESI e Positive Limit Limits i TE Negative Limit Used in installation 1 1 Error Output 3 Reference Mark Sine Cosine Encoder Function Signal Ping O Volts DC 1215 Cosine Incremental Signals Sine 2 Positive Limit Limits ue UNE Negative Limit BEE Used in installation 6 Error Output NPN Reference Mark Magnetic Encoder Reference Mark Kerr en Home Inn 12 Error Output NPN 3 Limits WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Dimensional Drawings mSR080 mm 14 x 0 7 Tap x 5 0 0 24 Deep _ Qty G Holes Outer Pattern 21 8 0 667 24 0 10 94 70 0 50 0 25 35 40 mm strokes only 18 010 771 MAX 0 7 Tap x 6 0 0 24 Deep Qty Hoes Inner Pattern 4mm Slip Fit of Dowel Pin Hab and 1X Slot 2 2 0 091 Optical Encoder NEL 0 127 Magnetic Encoder EE 0 Qty E Holes for hid Socket Head Cap Screw 70 0 2 76 35 0 Pu 1 38 4 mm Press Fit of Dowel Pin n EX Hole B Dimensions mm in Hardware M4x8 Torque Oindbs Wrench Size Allen 14 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Assembly Diagram
6. General Safety Because linear motors can accelerate up to 3 g s and operate at high speeds and sometimes positioners move without warning keep all personnel away from dynamic travel range of positioner Product does have pinch areas where moving elements relative to each other come together Moving Cables If the cables are to be moving the use of high flex cabling is recommended to ensure long life Strain Relieve Electrical Components All electrical components such as motor halls encoders and limit home switches must be strain re lieved Failure to strain relieve electrical wires or cables may result in component failure and or possible personal injury Pinch Points Unit may have a pinch point because the top extends over the base of the table as well as moving ele ments relative to stationary elements Proper care should be exercised 7 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Specification Conditions Minimum to maximum continuous operating temperature range with NO guarantee of any specification except motion Proper mounting of the mSR is essential to optimize product performance All specifications are based on the follow ing conditions e The positioner must be bolted down to a flat surface which supports the entire length of the base using all mounting holes provided e At a minimum for basic motion the positioner must be mounted to a flat stable surface with a flatness
7. error less than or equal to 0 025mm 300mm specifications will be greatly varied from published specification with this flatness e To meet catalog specifications the surface must have a flatness error less than or equal to 0 003mm 300mm for Standard grade and 0 001mm 300mm for Precision grade 8 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Specifications gu EL Lee Travel Size WxH gt PeakThrust Mx NO 12 R 24 24 24 7 PRE VE E _ RE ma GAME Precision grade E ER NE NE NE Carriage Mass E Stage Mass kg 0 525 0 5815 07395 1 0665 1 403 _ 1 Precision grade version stage mounted to granite surface 0 01 micron optical encoder Continuous Power 9 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide mSRO80 Specifications Travel amp Encoder Dependent Travel mm Specification Units 25 35 50 100 150 Magnetic Encoder 1 Micron Resolution 10 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Part Number Nomenclature mSR 080 Part Number MSR 080 L 050 CD EB Hi Example 1 Series 6 Motor 0 Cable Options MSR Series cs Ironcore single 25 and 35 CMO01 No cable management mm travels only 1 meter 2 Size cD Ironcore double 50 100 CMO3 No cable management 80 80 mm wide profile and 150 travels only 3 meter 3 Drive Train 7 Encoder nm Other Opt
8. if the rated load of the stage is not exceeded the typical bearing life is on the order of 2 540 km in a clean environment Contamination or solvents on the bearings can result in lower life performance Spare Parts it 002 3545 01 it 002 3546 01 002 2238 01 002 2240 01 19 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Compliance Documents RoHS Compliance Statement RoHS We hereby certify that the following item s produced by Parker Hannifin Corporation com plies with the requirements of the EU Directive 2002 95 EC on the restriction of the use of certain hazardous substances in the electrical and electronic equipment RoHS and other na tional and international legislation similarly restricting the use of materials RoHS Threshold Cadmium Cd 0 01 or 100ppm Lead Pb 0 1 or 1000ppm Mercury Hg 0 1 or 1000ppm Hexavalent Chromium Cr VI 0 196 or 1000ppm Polybrominated biphenyls PBB 0 196 or 1000ppm Polybrominated diphenyl ethers PBDE 0 1 or 1000ppm DECLARATION OF INCORPORATION ACCORDING TO EC DIRECTIVE 2006 42 EC ANNEX Il PART 1 SECTION B FOR PARTLY COMPLETED MACHINERIES ENISO12100 of Machinery basic concepts EN349 of Machnery Minimum gaps to avoid crushing of parts of the human bod 20 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Notes 21 WWW PARKERMOTION COM PH 724 861 8200 User Informatio
9. Image 1 16 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Setting the Magnetic Encoder Limits The mSRO80 with the magnetic encoder option comes equipped with adjustable end of travel limit sensors and a home sensor The sensors are activated by magnetic targets on the side of the stage as shown in image 2 below The factory setting location of the limit sensor targets provide the full nomi nal travel of the stage with approximately 2mm of over travel before the stage encounters the hard stop The home sensor is set such that during a positive direction move the home sensor trips ap proximately in the center of the travel of the stage To adjust travel simple loosen both screws on the targets 1 4 turn using a Philips screw driver slide the target to the desired position push the target upward toward the carriage top to seat the target on the bottom side of the carriage see image 2 and tighten the screws NOTE The active length of the target is approximately 9mm if the target is moved greater than 9 mm from the stage hard stop the stage can move beyond the active area of the target and shut off on the other side of the target This can lead to having the stage behind a limit sensor Caution in setup and programming should be taken to avoid this potential issue Limit sensor hysteresis Limit sensor can have up to 2 mm of hysteresis which means after activation the stage must move more than 2 mm away from the a
10. MANUAL NO 102 6195 01 REV EFFECTIVE 5 15 2015 User Information Guide a e mSROS8O User Information Guide Important User Information WARNING FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND OR SYSTEMS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH PERSONAL INJURY AND PROPERTY DAMAGE This document and other information from Parker Hannifin Corporation its subsidiaries and authorized distributors provide product and or systems options for further investigation by users having technical expertise It is important that you ana lyze all aspects of your application and review the information concerning the product or system in the current product catalog Due to the variety of operating conditions and applications for these product systems the user through its own analysis and testing is solely responsible for making the final selection of the products and systems and assuming that all performance safety and warning requirements of the application are met The products described herein including without limitation product features specifications designs availability and pric ing are subject to change by Parker Hannifin Corporation and its subsidiaries at any time without notice The information in the product manual including any apparatus methods techniques and concepts described herein are the proprietary property of Parker Hannifin Corporation Electromechanical Auto mation Parke
11. ctivation point to release the limit sensor from being active Home sensor hysteresis Home sensor can have up to 0 6 mm of hysteresis which means after activa tion the stage must move more than 0 6 mm away from the activation point to release the home sen sor from being active Positive Direction of Travel E sue dh Negative mi Positive Limit L it e Target ut Home Target Targa 17 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Part and Serial Number Location The mSR 80 part number and serial number can be located at the negative end of travel be tween the square rail bearings Negative End of Travel Part Number Serial Number Caution and Warning Label The mSR Caution and Warning label is located on the motor phase an hall cable 9 pin D Sub as pictured below 18 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Maintenance and Life Expectancy Maintenance The mSRO80 is designed to be a maintenance free device The drive train is a non contact linear motor and does not need maintenance of any kind The linear bearings are designed with internal lubricators which provide lubrication of the bearings for the life of the stage Beside normal cleaning of surfaces if needed no other maintenance is required Life The operational life of the mSRO80 is limited by the linear bearings
12. e positioner to mist spray or submersion in liquids DO NOT disassemble positioner Unauthorized adjustments may alter the positioner s specifications and will void the product warranty DO NOT transport a long axis without proper support as excessive deflection may occur 6 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Warnings and Precautions gt B Hot Surfaces DO NOT touch motor coils located in the positioner after high duty operation Motor temperature may approach 60 C The unit itself may become warm or hot to the touch Electrical Shock DO NOT take apart or touch any internal components of the positioner while unit is plugged into an elec trical outlet SHUT OFF power before replacing components to avoid electrical shock High Magnetic Field Unit may be HAZARDOUS to people with Pace Makers or any other magnetically sensitive medical de vices Unit may have an effect on magnetically sensitive applications Ferrous Materials The positioner will NOT keep out small ferrous materials in applications with air born metallic particles The customer must take additional precautions in these applications to prevent intrusion of these ferrous particles Vertical Operation Depending upon your load and counter balance selection the carriage and load may drop when mounted vertically in power loss situations potentially causing product damage or personal injury
13. ed product may be heavy Please observe the following guidelines for handling and mounting of your new positioner Proper mounting of the positioneris required to reduce risk of injury and provide optimal performance Positioners should be mounted to a flat stable surface by using thru holes counter bored holes or tapped holes on the base of the unit Unless otherwise specified the standard installation of the linear drive is horizontal DO NOT allow the positioner to drop onto any surface Dropping the positioner can generate impact loads that may result in flat spots on bearing surfaces or misalignment of drive components drastically effecting the per formance of the product DO NOT drill holes into the positioner Drilling holes into the positioner can generate particles and machining forces that may effect the operation of the positioner Parker will drill holes if necessary contact your local author ized distributor DO NOT subject the unit to impact loads such as hammering riveting etc Impacts loads generated by hammer ing or riveting may result in flat spots on bearing surfaces or misalignment of drive components drastically effect ing the performance of the product DO NOT lift the positioner by cables or cable management system Lifting positioner by cables or cable manage ment system may effect electrical connections and or cable management assembly The unit should be lifted by the base structure only DO NOT expos
14. es Not all of this information may be applicable to your product If you have any questions or challenges please call our factory support team at 800 245 6903 It is the responsibility of the end user to ensure that equipment is installed and operated in accordance with both local and federal safety codes and guidelines Return Information Returns All returns must reference a Return Material Authorization RMA number Please call your local author ized distributor or Parker Customer Service Department at 800 245 6903 to obtain a RMA number Repair Information Out of Warranty Repair Our Customer Service Department repairs Out of Warranty products All returns must reference a RMA number Please call your local authorized distributor or Parker Customer Service Department at 800 245 6903 to obtain a RMA number You will be notified of any cost prior to making the repair gt WWW PARKERMOTION COM PH 724 861 8200 User Information Guide A Unpacking and General Installation Carefully remove the positioner from the packaging materials and inspect the unit for any evidence of shipping damage Report any damage immediately to your local authorized distributor Please save the shipping con tainer for damage inspection or future transportation Incorrect handling of the positioner may adversely affect the performance of the unit in its application Standard handling and lifting practices should be employ
15. ions L Linear Motor Drive E1 1 optical incremental No counter balance E2 0 1p optical incremental X1 Magnetic counter balance Stroke Length mm E3 0 01p optical incremental 50 grams 025 25 mm 5 Sine Cosine x2 Magnetic counter balance 035 35 mm M1 lp magnetic incremental 200 grams 050 50 mm Available on precision grade only x3 Magnetic counter balance 100 100 mm Available on standard grade only 300 grams 150 150 mm X4 Magnetic counter balance Home Sensor 360 grams 5 Grade H1 Home Sensor X5 Magnetic counter balance P Precision Home sensor with M1 option 440 grams 5 Standard Index mark with E1 E2 E3 or SC options Magnetic counter balance 650 grams Limit Sensor Availale on 25 mm stroke only L1 End of travel limit sensors 11 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Electrical Specifications Meneses unts er Sopa Motor Specifications Continuous Force IN 4 8 oo Ua o Continuous Current 08 16 PeakCurrent Arms 24 48 Resistance MaxBusVoltage VDC 48 48 Motor Thermal Time Constant Minutes 08 08 1 25 C ambient and winding temperature at 125 C 2 Measured line to line 3 Value is measured peak of sine 4 30 Line to Line induction bridge measurement 1 Khz Phase Encoder Hall Signal While Moving in the Poitive Direction Phase mSROSO0 Hall mSROSO Hall 2 oe Hall 3
16. n Guide Notes 22 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide EM Sales Offices Australia Parker Hannifin Australia Pty Ltd 9 Canington Road Castle Hill NSW 2154 Australia Te 61 0 2 9634 7777 Fax 61 0 2 9634 3749 Brazil Parker Hannifin Ind Com Ltda Lucas Nogueira Garcez 2181 Esperan a 12325 900 Jacarei SP Te 12 3954 5100 Fax 12 3854 5262 Email automation brazl parker com Canada Parker Hannifin Canada Inc 160 Chisholm Dr Milton Ontario LOT 3G9 805 683 3000 Fax 905 876 1958 Email miltoncustservice parker com China Parker Hannifin Motion amp Control Shanghai Co Ltd 280 Yunqiao Rd Jin Qiao Export Processing Zone shanghai 201206 China Tel B6 21 50312525 Fax 86 21 64459717 France Parker SSD Parvex B avenue du Lac B P 249 F 21007 Dijon Cedex Te 33 0 3 80 42 41 40 Fax 33 0 3 80 42 41 23 Germany Electromechanical Europe Parker Hannifin GmbH amp Co KG Robert Bosch Strasse 22 D 77656 Offenburg Germany Tel 49 10 781 5090 Fax 49 0 781 509 93176 India Parker Hannifin India Pvt Ltd Automation Group SSD Drives Div 133 amp 151 Developed Plots Estate Perungudi Chennai 600 096 Te 044 4391 0799 Fax 044 4391 0700 Italy Parker Hannifin SpA Via Gounod 1 20092 Cinsello Balsamo Milano Italy Tel 39 02 361081 Fax 39 02 36108400 Korea Parker Hannifin Korea atn
17. r or its licensors and may not be copied disclosed or used for any purpose not ex pressly authorized by the owner thereof Since Parker Hannifin Corporation Electromechanical Automation Parker constantly strives to im prove all of its products we reserve the right to change this product manual and equipment mentioned therein at any time without notice For assistance contact Parker Hannifin Corporation Electro Mechanical Division 1140 Sandy Hill Road Irwin PA 15642 i Ph 724 861 8200 800 245 6903 E mail emn applications g parker com i www parkermotion com 2 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide MSR Series Product Manual ROC ec 5 General Nom es nad Usu adeo ipee Rad US Mad aT e Ub snis 5 ER R 5 RODi one 5 Unpacking and General Installation 2 ae 6 Warnings and PR CCAUUIODS e PHRm 7 Sbeercanom videre RE es das ar ess ces 8 Environmental Specifications eene s 8 Mounting Requirements eee ee 8 Judei doses comes ea ne ados nina Dada ns EEE TEE TEE RE 9 Part Number Nomenel lure a ee 11 ea ee ee 12 Standard Cabling and Wiring DAS RAS ec die
18. tion as well as an economical 1 GE and RoHs directives as standard micron magnetic option 15 WWW PARKERMOTION COM PH 724 861 8200 User Information Guide Setting the Optical Encoder Limits The mSRO80 with the optical encoder option comes equipped with adjustable end of travel limit sensors The sensors are activated by two magnetic targets on the side of the stage as shown in image 1 below The factory setting location of these sensor targets provide the full nominal travel of the stage with approximately 2mm of over travel before the stage encounters the hard stop To adjust travel simple loosen both screws on the targets 1 4 turn using a Philips screw driver slide the target to the desired position push the target upward toward the carriage top to seat the target on the bottom side of the carriage see image 1 and tighten the screws NOTE The active length of the target is approximately 9mm if the target is moved greater than 9 mm from the stage hard stop the stage can move beyond the active area of the target and shut off on the other side of the target This can lead to having the stage behind a limit sensor Caution in setup and programming should be taken to avoid this potential issue Limit sensor hysteresis Limit sensor can have up to 1 5 mm of hysteresis which means after activa tion the stage must move more than 1 5 mm away from the activation point to release the limit sensor from being active

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