User Manual MP86E - Physik Instrumente
Contents
1. Command test moves to check out the maximum possible velocity for your individual application m Reduce the acceleration m Reduce the load on the mechanics The Mechanics Did Not Stop in Time and Ran into a Hard Stop The velocity is too high see also Limit Switches p 12 the limit switch is out of order or the controller ignores the limit switch signal m Stop the motor Command the mechanics out of the end zone www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 15 Troubleshooting Piezo Nano Positioning PI m If this is not possible disconnect the motor from the controller and move the mechanics out of the end zone manually NOTE Only with M 228 11S and M 229 26S you can move the pusher manually as these mike actuators are provided with a handwheel refer to the figure in Mounting p 8 www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 16 Maintenance Piezo Nano Positioning PI 5 Maintenance The actuator is designed for protection class IP4x When operated in this environment no maintenance is required If the actuator must be operated in extremely dusty or humid environments we recommend contacting your PI representative www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 17 Technical Data Piezo Nano Positioning PI S Technical Data 6 1 Specifications M 228 10S M 228 11S M 229 25S M 229 26S Units Active axes X X X X Motion and positioning Displacement 10 10 25 25 mm De2. Compared to conventional rotating tip micrometer drives the non rotating tip design offers several advantages m Elimination of torque induced positioning errors m Elimination of sinusoidal motion errors m Elimination of wear at the contact point m Elimination of tip angle dependent wobble M 228 and M 229 MP86E Release 1 1 0 Page 2 Product Description Piezo Nano Positioning PI Limit and Reference Switches For the protection of your equipment non contact Hall effect limit and reference switches are installed The direction sensing reference switch supports advanced automation applications with high precision Low Cost of Ownership The combination of these actuators with the networkable C 663 Mercury Step controller offers high performance for a very competitive price in both single and multi axis configurations NOTE In this manual the following product names are used synonymously positioner linear actuator mike actuator 1 1 Prescribed Use Correct operation of the M 228 and M 229 mike actuators is only possible in combination with a suitable stepper motor controller ordered separately and software The controlling device must be able to read out and process the signals from reference and limit switches to ensure proper performance Based on their design and realization the M 228 and M 229 mike actuators are intended for single axis positioning adjusting and shifting of loads at various velocities M 228
3. Karlsruhe Germany a eet Dr Karl Spanner Presidert Pisik lastrame it Ph GmbH amp Co KG Aatder R merst 1 76228 Kark rube Gemary W P a Phone 49721 48 46 0 Fax 49 721 43 46 299 E m all Intppl ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA PliLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabView 2009 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 05 11 2009 Document Number MP86E NPa Release 1 1 0 M 228 M 229 User_MP86E110 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws About This Document Users of this Manual This manual is designed to help the reader to install and operate the M 228 and M 229 Stepper Mike Linear Actuators It is assumed that the reader has a fundamental understanding of motion control concepts and applicable safety procedures The manual describes the phys
4. and M 229 25S the motor is integrated into the shaft 2 Shaft 3 Mounting shaft with b Clamping width 6 mm c Diameter 9 5 mm with M 228 10S and M 228 11S 12 mm with M 229 25S and M 229 26S 4 Mounting nut 5 Pusher non rotating with d Threaded hole for mounting the tip www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 8 Start Up www pi ws Piezo Nano Positioning PI Preparation Provide your application with a suitable mounting for the mounting shaft of the mike actuator Refer to the figure of the mechanics components for the mounting shaft dimensions Mounting 1 Loosen the mounting nut from the mounting shaft of the mike actuator see figure of the mechanics components 2 Position the mike actuator in the mounting of your application 3 Fasten the mounting nut to clamp the mike actuator A torque of 15 Nm is sufficient Changing the tips m Affix the tip to the mike actuator with an open end wrench SW5 We recommend using a defined torque of 2 Nm for fixation M 228 10S and M 229 25S come with the flat tip already mounted M 228 11S and M 229 26S have no tip mounted On delivery the spherical tip is included with all mike actuators M 228 and M 229 MP86E Release 1 1 0 Page 9 Start Up Piezo Nano Positioning PI 2 2 Startup WARNING CRUSH HAZARD Ensure that no body parts and no objects can be trapped by the moving tip or any object connected to it CAUTION A crash at the
5. command a velocity which is higher than the specified maximum velocity of the mechanics then the motor will stall Although no movement is performed any more the controller still keeps on counting steps As stepper motors do not have position encoders the position counter will continue to increment The controller s motor position may not correspond with the actual motor position and this might endanger your application The maximum velocity depends on various influences like operating voltage phase current setting and mechanical load Datasheet values are for orientation only and may not work in all applications Note that the C 663 uses microsteps which are 1 16 the size of the full steps given in the hardware datasheets 1 full step 16 microsteps Command test moves to check out the maximum possible velocity for your individual application If it should be necessary to set stage dependent parameters you can use the following values Mike Actuator M 228 11S and Parameters M 229 26S Max acceleration 9 ll a motor current current determined with C 663 stepper motor controller www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 11 Special Hardware Information Piezo Nano Positioning PI 3 Special Hardware Information 3 1 Limit Switches All M 228 and M 229 linear actuators are equipped with non contact Hall effect limit switches Each limit switch sends an overtravel signal on its own dedicated line
6. the product needs to be shipped again 1 5 Controller A controller is necessary for each mike actuator CAUTION Connect a stepper motor mike actuator only to a suitable stepper motor controller Otherwise the controller could be damaged Use only controllers which are able to process limit switch signals For best performance and system compatibility we recommend using PI controllers Contact your PI representative or write to info pi ws if you want to order the following controller Order Number Description C 663 10 Mercury Step Stepper Motor Controller 1 Channel with Wide Range Power Supply 24V single axis 1 6 Additional Components Contact your PI representative or write an e mail to info pi ws if you need the following additional components Order Number Description M23010116 Flat tip www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 7 Start Up Piezo Nano Positioning PI r Start Up 2 1 Mechanical Mounting CAUTION During mounting or operation of the mike actuator ensure that the cables are not bend too much or the cable could break CAUTION Avoid lateral forces at the tip of the mike actuator The guiding accuracy can be reduced or the mike actuator can be damaged Figure 3 M 228 M 229 components of mechanics 1 Only with M 228 11S and M 229 26S separate motor with a Handwheel for moving the pusher manually with M 228 10S
7. the reference points when approached from the positive or the negative side is about 0 2 mm to 0 4 mm See the controller user manual and or associated software manuals for the commands which make use of the reference signal NOTE It is recommended to approach the reference point always from the same direction to obtain best position repeatability M 228 and M 229 MP86E Release 1 1 0 Page 13 Troubleshooting Piezo Nano Positioning PI 4 Troubleshooting 4 1 Customer Service Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system m Current firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present 4 2 What if The following information refers to a C 663 10 controller If you use a different controller refer to the instructions in its manual The Mechanics Does Not Move Cables not connected properly m Check the connecting cables The axis is not referenced m Reference the axis as described in controller and user manuals Incorrect configuration m Check the parameter settings of the controller SPA in the GCS command set refer to the controller and the software manuals Wrong command or wrong syntax m Check the error code with PI GCS command set use ERR see controller and software
8. 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente Pl GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 23 Glossary of Terms Piezo Nano Positioning PI S Glossary of Terms Backlash Position error that appears upon reversing direction Backlash is caused by play in the drive train components such as gearheads or bearings or by friction in the guiding system Design Resolution The theoretical minimum movement that can be made This is a calculated value based on the drive components drive screw pitch gear ratio motor angular resolution etc and does not account for nonlinearities like friction backlash etc Design resolution must not be confused with minimum incremental motion In systems with high gear ratios or microstepping motors the design resolution can be in the subnanometer range In practice incremental motion of less than 0 1 um is prevented by guiding system friction except
9. Piezo Nano Positioning PI MP86E User Manual M 228 and M 229 Stepper Mike Linear Actuators Release 1 1 0 Date 2009 11 05 This document describes the following products E M 228 10S Stepper Mike Linear Actuator 10 mm Stepper Motor Gearhead Limit Switches E M 228 11S Stepper Mike Linear Actuator 10 mm Stepper Motor Direct Drive Limit Switches E M 229 25S Stepper Mike Linear Actuator 25 mm Stepper Motor Gearhead Limit Switches E M 229 26S Stepper Mike Linear Actuator 25 mm Stepper Motor Direct Drive Limit Switches Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Moving the NanoWorld www pi ws Tel 49 721 4846 0 Fax 49 721 4846 299 ae info pi ws www pi ws PI Declaration of Conformity according to DIN EN ISO IEC 17050 2005 01 Manufacturer s Auf de Romerstrasse C Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Stepper Mike Linear Actuator Model Numbers M 228 M 229 Product Options all comples with the following European directives 200695 EC Low voltage directive LYD 200441 08 EC EMC Directive 98 37 EC Machinery Directive The applied standards certifying the conformity ae listed below Efactromaquotic Emission EN 61000 6 3 EN 55011 Efecto notic fea unity EN 61000 6 1 Safi ow Voaqe Directive EN 61010 1 Safety of Michinery EN 12100 October 23 2009
10. and M 229 mike actuators can be mounted in any orientation Operation other than instructed here may cause personal injury or damage of the equipment The mike actuators may only be used for applications suitable according to the device specifications The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases M 228 and M 229 are laboratory apparatus as defined by DIN EN 61010 They meet the following minimum specifications for safe operation m Indoor use only m Altitude up to 2000 m m Temperature range 5 C to 40 C www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 3 Piezo Nano Positioning PI Product Description m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations not greater than 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 These data are no limitations for the specifications in the technical data table p 18 1 2 Safety Instructions Install and operate the Stepper Mike Linear Actuator only when you have read the operating instruction Always keep the user manua
11. end stop can damage the mechanics especially at high velocity Do not disable limit switch processing on the controller Be aware that the function to stop automatically at the limit switch may not be supported by the controller Check limit switch operation at about 10 or 20 of the maximum velocity CAUTION When you connect the mike actuator to the controller be aware that the mike actuator could perform an undesired move CAUTION Ensure that the mike actuator is mounted correctly before startup NOTE The mike actuator comes with an extension cable You can connect this extension cable between the controller and the mike actuator Prior to operation read the documentation for the controller If you use the C 663 Mercury Step stepper motor controller proceed as described in Starting Operation Section of the C 663 User Manual MS138 www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 10 Start Up Piezo Nano Positioning PI The following list contains steps which you should generally perform for the startup 1 If you are going to use a host computer install the host software on the host computer 2 If it is necessary connect the controller to the host computer 3 Connect the mike to the controller With multi axis systems we recommend to note the axis assignment of the connection 4 Switch on the controller 5 Command a few test moves to make sure everything is working properly NOTE If you
12. ical specifications and dimensions of the M 228 and M 229 Stepper Mike Linear Actuators as well as the procedures which are required to put the associated motion system into operation The latest version is available for download at www pi ws Please direct any inquiry to your PI representative or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion controller and the software tools which might be mentioned in this documentation are described in their own manuals All documents are available as PDF files via download from the PI Website www pi ws http www pi ws For updated releases contact your PI representative or write info pi ws mailto info pi ws Contents Product Description 1 1 Prescribed USC eeeeeeeeeeeeeeeseeeeeeeeeeeneeeeeeees 1 2 Safety Instruction ascites iveseconn sco teed enesesse neee 13 Model Survey veiccccincasdeiccileacie cine 14 Contents of Delivery ccccc cece eeeceeeeeeee rete 1 5 Controler a a adtaraikeies 16 Additional Components sssesssesrrer
13. l safe and close to the described device If the user manual is lost or damaged contact your PI representative for a new copy or download it from the PI homepage http www pi ws Also keep and add all further information e g extended instructions or Technical Notes to the User Manual Read carefully the user manuals of all other components involved such as controllers or software WARNING CRUSH HAZARD T Ensure that no body parts and no objects can be trapped by the moving tip or any object connected to it CAUTION When you connect the mike actuator to the controller be aware that the mike actuator could perform an undesired move CAUTION Connect a stepper motor mike actuator only to a suitable stepper motor controller Otherwise the controller could be damaged www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 4 Product Description Piezo Nano Positioning PI CAUTION During operation the Stepper Mike Linear Actuator produces heat which might disturb your application CAUTION During mounting or operation of the mike actuator ensure that the cables are not bend too much or the cable could break CAUTION Avoid lateral forces at the tip of the mike actuator The guiding accuracy can be reduced or the mike actuator can be damaged CAUTION Ensure that the mike actuator is mounted correctly before startup CAUTION A crash at the end stop can damage the mechanics especially at high velocity D
14. manuals for the error code explanations Wrong axis commanded m Check if commanded axis is that of the desired mechanics www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 14 Troubleshooting Piezo Nano Positioning PI Mechanics or its cable is defective m Replace mechanics with a working mechanics of the same type to test a new combination of controller and mechanics mechanics of a different type may malfunction due to unsuitable parameter settings on the controller m Test cable and or replace with a working cable of the same type The Mechanics Does Not Move But Creates Noise Values for velocity acceleration and or load are too high m Reduce the velocity If you command a velocity which is higher than the specified maximum velocity of the mechanics then the motor will stall Although no movement is performed any more the controller still keeps on counting steps As stepper motors do not have position encoders the position counter will continue to increment The controller s motor position may not correspond with the actual motor position and this might endanger your application The maximum velocity depends on various influences like operating voltage phase current setting and mechanical load Datasheet values are for orientation only and may not work in all applications Note that the C 663 uses microsteps which are 1 16 the size of the full steps given in the hardware datasheets 1 full step 16 microsteps
15. o not disable limit switch processing on the controller Be aware that the function to stop automatically at the limit switch may not be supported by the controller Check limit switch operation at about 10 or 20 of the maximum velocity www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 5 Product Description Piezo Nano Positioning PI 1 3 Model Survey The following standard configurations of M 228 and M 229 mike actuators are available Gearhead Limit Switches Direct Drive Limit Switches Gearhead Limit Switches Direct Drive Limit Switches Figure 2 From left to right M 229 26S M 228 11S M 229 25S M 228 10S 1 4 Contents of Delivery Unpack the Stepper Mike Linear Actuator with care Compare the contents against the items covered by the order and against the packing list The following components are included m M 228 or M 229 Stepper Mike Linear Actuator according to the order m C 815 38 extension cable for the connection to the controller Sub D connector 15 pin 3 m cable m M23010117 spherical tip Furthermore a flat tip comes with the M 228 10S and the M 229 25S m MP86 User manual for M 228 and M 229 this document in printed form www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 6 Piezo Nano Positioning PI Product Description If parts are missing or you notice signs of damage contact your PI representative or write to info pi ws immediately Save all packing materials in case
16. rrrrrrrrrrrrrrrene Start Up 21 Mechanical Mounting sssseessseesseeeseesseesseeeeeerreeseeene 22 gt lt SlAMUP vv sivise tes hee rine ent Bakes Special Hardware Information Ol LIMIRS WITCHES aeea aa raia 3 2 Reference Switch ce cceceecececeeeeeeeseeeeeneeeneees Troubleshooting 41 Customer Service cccccccccecececececececeeeeeeeneeeneeeneees AD Wa Pat a itsncte tt avn vel aan oot Het stins Maintenance Technical Data 6 1 SPSCHICATONS ae E aea 6 2 DimensionS sesesssesrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrrnrnnt 6 3 Pin Assignment ssssssssssrrrnsisirrnrrnrresdererrreeseeseseeces Old Equipment Disposal Glossary of Terms Product Description 1 www pi ws Piezo Nano Positioning PI Product Description 5 Figure 1 From left to right M 229 26S M 228 11S M 229 25S M 228 10S M 228 and M 229 series linear actuators provide a travel range of 10 resp 25 mm and are equipped with high resolution stepper motors The stepper mikes can push or pull loads up to 80 N and provide speeds up to 5 mm s Models featuring gearhead stepper motor combinations offer the same stroke in a more compact package Cost Effective Design Valuable Features The cost effective design offers many useful features such as a non rotating tip limit and reference switches and a mechanical position display A spherical tip and a 3 m extension cable are included in the delivery Non Rotating Tip
17. sign resolution 0 046 0 078 0 046 0 078 yum Min incremental 1 1 1 1 um motion Backlash 5 10 10 10 um Unidirectional 2 2 2 2 um repeatability Max velocity 1 5 5 1 5 5 mm s Reference switch 1 1 1 1 um repeatability Mechanical properties Drive screw Leadscrew Leadscrew Leadscrew Leadscrew Thread pitch 0 5 0 5 0 5 0 5 mm rev Gear ratio 28 44444 1 28 44444 1 Motor resolution 384 6400 384 6400 steps rev Max push pull force 20 50 50 80 N Drive properties Motor type 2 phase 2 phase 2 phase 2 phase stepper stepper stepper stepper motor motor motor motor www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 18 Technical Data Piezo Nano Positioning PI M 228 10S M 228 11S M 229 25S M 229 26S Units Operating voltage BUI 24 24 24 v Reference and limit Hall effect Hall effect Hall effect Hall effect switches Miscellaneous Operating temperature 20 to 65 20 to 65 20to 65 20to 65 C range Material Al anodize Al anodize Al anodize Al anodize d steel d steel d steel d steel brass brass brass brass Mass 0 23 0 36 0 4 0 61 kg Cable length 0 5 0 6 0 5 0 6 m Connector 15 pin sub 15 pin sub 15 pin sub 15 pin sub D connector D connector D connector D connector Recommended C 663 C 663 C 663 C 663 controller single axis single axis _single axis single axis Avoid lateral forces at the tip with C 663 stepper motor controller with preload Max 0 25 A phase 24 f
18. to the controller Limit switch outputs are active low It is the controller that is responsible for stopping the motion If it does not do so in time the axis will run into the end stop CAUTION A crash at the end stop can damage the mechanics especially at high velocity Do not disable limit switch processing on the controller Be aware that the function to stop automatically at the limit switch may not be supported by the controller Check limit switch operation at about 10 or 20 of the maximum velocity Limit Switch Specifications Type magnetic sensor Supply voltage 5 V GND supplied by the motor connector Signal output TTL level Sink source capability 20 mA at 18 C Signal logic normal motor operation high overtravel low i e active low signal level changes from 5 V to 0 V when the switch is passed www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 12 Special Hardware Information Piezo Nano Positioning PI 3 2 Reference Switch www pi ws The M 228 and M 229 Stepper Mike Linear Actuators are equipped with direction sensing reference switches which are located at about the midpoint of the travel range These sensors provide a TTL signal indicating whether the mechanics is to the positive or negative side of a fixed point The rising or falling edge of this signal can be used as to indicate a known reference position within 0 5 um accuracy depending on the controller The difference in
19. ull steps rev Max 0 85 A phase 400 full steps rev Max 1 A phase 24 full steps rev www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 19 Technical Data Piezo Nano Positioning PI 6 2 Dimensions All dimensions are given in mm decimal places separated by commas in drawings 6 2545 9 5 100 3 8 40 53 115 8 Figure 5 M 228 11S pusher is positioned at the negative end of its travel range www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 20 Piezo Nano Positioning PI Technical Data M12x0 57 4 5 Figure 6 M 229 25S pusher is positioned at the center of its travel range Figure 8 Flat tip M23010116 only included with M 228 11S and M 229 26S mounted with open end wrench SW5 www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 21 Technical Data Piezo Nano Positioning PI ball tip Figure 9 Ball tip included mounted with open end wrench SW 5 6 3 Pin Assignment Connector type on mechanics D Sub 15m phase 1b motor aiai 1b oo o fe eme Pre S connected a a a a o S not connected a E Pe e a e o rum 0 supy rom controler zo eoo ground power e Mm _ ouput negative limit switch active ow TTL www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 22 PI Old Equipment Disposal Piezo Nano Positioning 7 Old Equipment Disposal In accordance with EU directive 2002
20. vantages lie in long lifetime and simple control electronics Most common are 2 and 4 phase designs which are very inexpensive 3 and 5 phase motors offer better performance in terms of dynamics torque stiffness resolution and noise generation but their manufacture is more complicated Unidirectional Repeatability The accuracy of returning to a given position from the same direction Because unidirectional repeatability is almost unaffected by backlash and hysteresis it is often considerably better than bidirectional repeatability M 228 and M 229 MP86E Release 1 1 0 Page 25
21. with air bearings and flexures Maximum Push Pull Force Active and passive force limit in operating direction at center of stage Some stages may be able to generate higher forces at the cost of reduced lifetime Minimum Incremental Motion The minimum motion that can be repeatedly executed for a given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution must be distinguished Design resolutions of 1 nm or better can be achieved with many motor gearbox and leadscrew combinations In practical applications however stiction friction windup and elastic deformation limit resolution to fractions of a micron Minimum incremental motion must be determined by actual measurements Repeatable moves in the nanometer and sub nanometer range can only be achieved with friction free flexure guidance For more information see the Nanopositioning amp Scanning Systems and Piezo Actuators Sections and the Flexure Guidance Section of the Tutorial www pi ws M 228 and M 229 MP86E Release 1 1 0 Page 24 Glossary of Terms www pi ws Piezo Nano Positioning PI Stepper Motor An electric motor providing motion in discrete angular steps without the need of position sensor or servo loop Compared to closed loop DC motors of the same size stepper motors provide poorer dynamic performance and dissipate more heat especially in steady state operation Their ad
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