the advanced energy rfg 5500 generator with display
Contents
1. 25 9 1 1K2 gt Y Y Y 1008PF NNN 9 16K NN A R MONITOR se ami 1v 199 3 01K la AN OP200GP 10K SL 1ek 1 pe 107 2 dd Y NN AN 120K 120K v 2 SETPOIN s AR AA gos A WV 50 20K B K t L AD768JN 4 1000PF Ro Y EXTERNAL BIAS gos AN 5 62 FIGURE 2 2 User Port Electrical Diagrams RF ON STATUS RF ON BIAS 7 6 g EESTI S 2 MOC207 x ai 2 4 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY OPERATOR PANEL FUNCTIONS A numeric display and eight status LEDs are provided on the front of the unit for monitoring the basic generator functions DISPLAY 3 digit numeric display seven segment used to display one of three selected generator functions see definition of the DISPLAY SELECT switch below DISPLAY SELECT This momentary push button switch is used to select the desired parameter for display subsequent depressions of the switch cycle through the three selections There are three LEDs adjacent to the switch for indicating the currently selected display mode The displayable parameters are Setpoint 9 Fwd Load Pwr e Refl Pwr INDICATORS AC ON This LED indicates that ac power is available within the unit all three phases are present the main contactor is energized the ac voltage to the inverter section is within the allowable voltage range and all interlock c2. ADVANCED ENERGY RFG 5500 GENERATOR WITH DISPLAY User Manual PN 5706045 C December 2000 ADVANCED ENERGY RFG 5500 GENERATOR WITH DISPLAY User Manual ADVANCED ENERGY INDUSTRIES INC 1625 Sharp Point Drive Fort Collins Colorado 80525 970 221 4670 PN 5706045 C December 2000 2000 Advanced Energy Industries Inc All rights reserved Printed in the United States of America This manual instructs the reader on how to safely install and operate the equipment described herein Making copies of any part of this manual for any purpose without permission is a violation of U S copyright law In the interest of providing even better equipment Advanced Energy Industries Inc reserves the right to make product changes without notification or obligation To the best of our knowledge the information contained in this manual is the most accurate available as of the date on the title page For more information write Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins CO 80525 WARNING SAFE OPERATING PROCEDURES AND PROPER USE OF THE EQUIPMENT ARE THE RESPONSIBILITY OF THE USER OF THIS SYSTEM Advanced Energy Industries Inc provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high cu
3. The setpoint signal from the user pin 5 is a Oto 10 volt signal scaled to represent the desired forward power from the generator refer to the signal description table for details The driver circuit must be capable of operating into a high capacitance load condition cable capacitance plus 1000 at the EMI filter in the generator The status signals provided by the generator pins 1 and 7 are opto coupled with NPN transistor outputs industry type 4N37 The emitter of each transistor is biased to ground with a 2 kQ resistor The collector of each transistor is tied to 5 1 V in the generator Each transistor can provide a minimum of 8 mA of collector current and may be operated with a collector to emitter voltage of up to 30 V Refer to the attached signal description table for signal definitions The RF PWR ON control signal pin 4 is opto coupled industry type 4N37 The user s signal drives the LED in the opto coupler through a 1 resistor A signal level of 4 V to 30 V applied to pin 4 enables the RF power The interlock signal pin 11 is opto coupled industry type MOC207 The anode of the LED in the opto coupler is tied to 15 V in the generator through a 475 Q resistor The user s signal is tied to the cathode Grounding pin 11 contact resistance of less than 1 2 ohms energizes the contactor that enables ac power within the generator P N 5706045C December 2000 2 3 ADVANCED ENERGY
4. s 15 pin User port to the system controller must be a shielded 15 wire I O cable Twisted pair wiring may be used but this is not mandatory Signal losses should be minimized by keeping the cable length as short as possible The maximum recommended cable length between the generator and the controller is 10 m 33 To minimize interference from adjacent electrical equipment the EMI shield in the cable must be terminated to the metal shells of the cable s D connectors Additionally the chassis of the RFG 5500 must be tied to a local earth ground through an adequately sized copper grounding strap 3 4 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY OPERATION CONTENTS First Time Operation kK kk KK KK KK KK KK KK KK KK KK cd 4 1 FIRST TIME OPERATION DANGER The RFG 5500 must be hooked up to a properly configured chamber or a 50 resistive load before you turn RF on Before powering up the RFG 5500 verify that the ac power connections the output connections and the cooling water connections are made correctly Make sure that the cooling water is turned on and that the minimum flow rate and water temperature requirements are satisfied To initially turn on your RFG 5500 generator use the following steps Verify that the RF Pwr On signal at the User port pin 4 is disabled and that the Set point signal pin 5 is set to zero De activate the generator s interlock loop by leaving pin 11
5. s published instructions The seller expressly excludes any warranty whatsoever con cerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from AE In all cases the seller has sole responsibility for determining the cause and nature of the failure and the seller s determination with regard thereto shall be final Index A AC Power Input 1 2 Ambient Temperature 1 4 Analog Input 2 3 Analog Outputs 2 3 Atmospheric Pressure 1 4 Check First 5 1 Circuit Breaker Lockout 1 2 Clearance 1 2 Command Power Repeatability 1 3 CONNECTING COOLING WATER 3 3 Connecting Input Power 3 3 Connecting Output Power 3 3 CONNECTING USER PORT 3 4 Connector Cable Specifications 1 2 CONNECTORS CONTROLS AND INDICATORS 2 1 Contaminates 1 4 Coolant Connectors 1 2 Coolant Requirement 1 4 D Demonstrated Open Loop Power 1 3 Digital Input 2 3 Digital Outputs 2 3 DISPLAY 2 5 DISPLAY SELECT 2 5 E ELECTRICAL SPECIFICATIONS 1 2 ENVIRONMENTAL SPECIFICATIONS 1 4 F First time Operation 4 1 Flow Rate 1 4 Frequency 1 2 Front Panel 2 6 Full Rated Output Power 1 2 G GENERAL DESCRIPTION 1 1 Grounding 3 1 H
6. y e 0 a o 4 i S N NA Ir E X 2 SZ SZ D O 8 lt o NO I PE NE TN 7 1 OG f O E Nu 7 E we f b 2 nas 1 n i LE 5 is E N 8 ap ES O 3 38 o 2 3 o I 9 5 3 2 E w E M as gt e eS Coy GS a Go a 9 3 9 a 5 2 UJ a 3 EM 9 e E N ZA e msn lat a w v a zama J EM is 8 E B i N FIGURE 2 4 Rear panel P N 5706045C December 2000 2 7 ADVANCED ENERGY 2 8 December 2000 P N 57060456 RFG 5500 GENERATOR WITH DISPLAY INSTALLATION AND SETUP CONTENTS Setting D 5444 04 ex L ev ped 3 1 Groundint viens cect A STN 3 1 Connecting Cooling Water coe inve nd ae TUR Boyce KK KK KK KK KK es 3 3 Connecting Input Power Lises he E 3 3 Connecting Output Power KK KK KK 3 3 Connecting User Pork ciye r ka ke cw EMI N 3 4 SETTING UP Unpacking Unpack and inspect your generator carefully Check for obvious physical damage If no damage is apparent proceed with the unit connections If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately Save the shipping container for submitting necessary claims to the carrier Grounding The RFG 5500 provides an RF EMD ground stud It is recommended that a suitable ground connection be made to this stud to prevent or minimize radio frequency
7. 18 This device must be installed and used only in compliance with the standards listed VDE 0113 EN 60204 and applicable requirements P N 5706045C December 2000 1 3 ADVANCED ENERGY 1 4 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY SPECIFICATIONS CONTENTS General Description cov pa SO 1 1 Physical Specifieationssatsisruarsnsa d obe prece KK M kk 1 2 Electrical Speci Cantons Gs tas KK KK ka KK KK eg 1 2 Environmental Specifications KK KK KK 1 4 GENERAL DESCRIPTION The RFG 5500 is a 13 56 MHz RF generator designed to regulate its output power based on forward power The RFG 5500 provides up to 5000 W into a 50 Q non reactive load The RFG 5500 includes a clamp circuit to guarantee that the RF output is less than 1 W if the requested setpoint is zero The unit is controlled through a 15 pin analog digital user port There is no operator control panel provided on this unit A numeric display and eight status LEDs are visible from the front of the unit for monitoring the generator functions The RFG 5500 is designed for 19 rack mounting with a panel height of 7 AC power for the RFG 5500 is supplied from a 4 wire 3 Q with ground 208 V ac nominal power source No neutral connection is required The unit is water cooled with no provisions or requirements for forced air cooling The RFG 5500 provides a system interlock connection through its 1
8. indicates approximately 200 W of power Note The display is scaled by a factor of 1000 200 W is displayed as 20 Use the DISPLAY SELECT push button to display the setpoint value The forward power and setpoint values should agree with each other within the allowable regula tion tolerance of the generator 1 If the displayed forward power and setpoint values are in agreement continue to increase the setpoint value slowly Stop periodically to verify that the forward power and setpoint values are continuing to track together Also verify that the reflected power readings remain near zero this assumes that the test load is purely resistive Continue this process until 5000 W is reached Setpoint signal equals 10 V At no point during the test should the ALARM indicator light If for any reason the gener ator does not perform properly shut off the circuit breaker and refer to the trouble shooting section in this manual for further guidance Inactivate the RF Pwr On signal at the User port and verify that the RF ON indicator extinguishes The forward and reflected power readings on the display go to zero regardless of the value of the Setpoint signal Move the circuit breaker to the off 0 position to complete this initial test Turn off the cooling water if no further testing is required 4 2 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY TROUBLESHOOTING CONTENTS Check Pitst tai LA kra AA
9. the unit must actually be returned for the problem to be cor rected Such technical consultation is always available at no charge Units that are returned without authorization from AE Customer Service and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibra tion fee and all shipping charges Upgrading Units AE s products are continually changing as ways to improve them are discovered AE is happy to upgrade older units so that they reflect recent improvements The fee for upgrading a unit will be a percentage of the current list price based on the age of the unit Such an upgraded unit will carry a 6 month warranty which will be added to any time remaining on the original warranty Contact Customer Service for specifics on getting an older unit upgraded to the current revision level Warranty The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in confor mity with the seller
10. unconnected Move the circuit breaker on the rear of the RFG 5500 to the on 1 position The display on the front of the generator illuminates and the Setpoint Watts and X1000 indicators are lit All other indicators are unlit The numeric display indicates 0 W because the setpoint signal is at zero Depress the DISPLAY SELECT push button once The Setpoint indicator extin guishes and the Fwd Load Pwr indicator is on Depress the button one more time to select Refl Pwr mode verify that Fwd Load Pwr indicator extinguishes and that the Refl Pwr indicator lights Subsequent depressions of the push button repeatedly cycle through the three display modes Select the Fwd Load Pwr mode before proceeding to the next step Close the interlock loop by grounding pin 11 at the User port The AC ON indicator illuminates Activate the RF Pwr On signal at the User port pin 4 The RF ON indicator on the front panel illuminates Slowly increase the setpoint voltage pin 5 while monitoring the front panel display NOTE The RFG 5500 incorporates a clamp circuit that guarantees that less than 1 W of RF power is present when the setpoint is zero This clamp circuit triggers at a setpoint of approximately 50 W so the Setpoint signal must be greater than this before a noticeable change in the front panel display occurs P N 5706045C December 2000 4 1 ADVANCED ENERGY Continue to increase the setpoint until the display
11. 5 pin User port interface A contact resistance of 1 2 KQ or less between the interlock pin 11 and chassis ground enables the unit The RFG 5500 protects itself from damage under the following conditions e Any internal overcurrent condition not directly related to the output load condition as protected by current limiting or fuse e Excessive internal temperature may be caused by lack of proper cooling water flow excessive ambient operating temperature or other causes e Any combination of input AC line phase drop out e Input line brown out under voltage or over voltage P N 5706045C December 2000 1 1 ADVANCED ENERGY PHYSICAL SPECIFICATIONS Size Weight Mounting Clearance Connector Cable Specifications RF Output Connector AC Power Input Circuit Breaker Lockout User Port Connector Coolant Connectors RF Grounding Connector 17 8 cm H x 48 3 cm W x 58 4 cm D 7 H x 19 W x 23 D 52 2 Kg 115 pounds maximum Rack mounting ears provided for standard 19 instrumentation rack Side handles are provided to assist in lifting Clearance of 4 at rear of panel required for interconnects No additional clearance about unit for ambient air flow is required Type LC Female 4 6 m 15 4 wire cord SO 8 4 90C type or equivalent with Hubbell CS8365C connector A bracket for holding the breaker handle in the on or off position is included 15 pin subminiature D femal
12. A ADA arek 5 1 Troubleshooting Flowchart aia KK KK KK KK KK SA FEST 5 1 Other Technical Problems coro ES nv E 5 5 Returning Units for Repair serasa Gea casa KK KK KK KK 5 5 CHECK FIRST Power Off 1 Check for visible damage on the unit cables and connectors 2 Check to ensure that all connectors are installed correctly and tightly fastened 3 Check the position of all switches and be sure they are in the correct position 4 Check input power to be sure that it is present and meets specifications 5 Check ground connections and ensure that they are adequate and secure Power On 1 Check input power connection to ensure the proper power is being supplied to the unit 2 Check LEDs and determine that the proper ones are lit See First Time Operation in the preceeding chapter TROUBLESHOOTING FLOWCHART The following flowchart will assist you in determining whether the generator is faulty or there are system problems Be sure to follow this chart completely before sending the generator back in the event you are experiencing difficulties with your installation P N 5706045C December 2000 5 ADVANCED ENERGY START Is the AC ON LED lit Unit could have experienced an overtemperature condition due to high water temperature or low flow while the system was sitting at idle Cycle the circuit breaker on the unit off and then on again Is the generator s interlo
13. EAD THIS PAGE We know that some of you want to start the generator now and that you don t feel you have the time to read the entire manual Following are sub sections you need to read in order to get started Overview of the Manual and Interpreting the Manual are short sections intended to guide you through the manual Overview of the Manual explains the organization of the manual so you can more quickly find what you need Interpreting the Manual explains the type conventions what it means when a word appears in capitalized italic type for instance and what the icons symbols mean OVERVIEW OF THE MANUAL The main table of contents is an outline of the major topics covered in the manual It contains only the chapter titles and the first heading levels within each chapter so you can skim it and get an idea of what is contained without being overwhelmed by several heading levels When you turn to a chapter a table of contents lists each sub heading in the chapter and its page number INTERPRETING THE MANUAL Type Conventions To help you quickly pick out what is being discussed the manual presents certain words and phrases in type that are different from the rest of the text P N 5706045C December 2000 1 1 ADVANCED ENERGY Pin and signal names appear in capitalized italics RF PWR ON CMD D Labels that are on the unit switches indicators etc generally appear in boldface capital letters Exception
14. Harmonics 1 3 Heat Removal 1 4 Humidity 1 4 l INDICATORS 2 5 Input Power Specifications 1 2 INSTALLATION AND SETUP 3 1 Interface Cabling Recommendations 3 4 INTERFACE CONFIGURATIONS 2 1 Interlock 2 3 INTERPRETING THE MANUAL 1 INTRODUCTION 1 L Line Current 1 2 Line Frequency 1 2 Line Powe 1 2 Line Voltage 1 2 M Mounting 1 2 3 1 Mounting hole locations and dimensions 3 2 0 Operating 1 4 OPERATION 4 1 OPERATOR PANEL FUNCTIONS 2 5 OTHER TECHNICAL PROBLEMS 5 5 Output Impedance 1 2 Output Power Cable Recommendations 3 3 Output Power Derating Curve 1 3 Output Power Range 1 2 Overcurrent Protection 1 2 OVERVIEW OF THE MANUAL 1 P PHYSICAL SPECIFICATIONS 1 2 Power Margin 1 3 Power Off Check 5 1 Power On Check 5 1 Pressure 1 4 R READ THIS PAGE 1 Rear Panel 2 7 Reflected Power 1 3 Regulation 1 3 REGULATORY REQUIREMENTS 3 Response Time 1 3 Returning Units for Repair 5 5 RF Grounding Connector 1 2 RF Output Connector 1 2 RF Output Specifications 1 2 S SAFETY 3 Setting Up 3 1 Size 1 2 SPECIFICATIONS 1 1 Spurious Signals 1 3 Storage 1 4 Symbols 2 T Temperature 1 4 Transient Response 1 3 Transportation 1 4 TROUBLESHOOTING 5 1 Troubleshooting Table 5 1 Type Conventions 1 U Unpacking 3 1 User Port 2 1 User Port Connector 1 2 2 1 User Port Electrical Characteristics 2 2 User port pin discription table 2 1 W Warm Up Time Delay 1 3 Weight 1 2
15. ck loop NO being satisfied Confirm that pin 11 on the unit s interface is grounded Once the problem has been identified and corrected you may resume your process YES Is water temperature 5 to 27 C and flow volume 4 gpm Is the line cord plugged in tightly and is the voltage 187 to 229 V 34 Complete the procedure to return the unit to AE customer service 5 2 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY Is the RF ON LED lit When the AC circuit breaker is cycled is the alarm LED lit The unit may have been in a overtemp condition Once the problem has been identified and corrected you can resume your process Is there 4 to 15 Vdc on pin 4 referenced to pin 6 of the interface connector Complete the procedure to return the unit to AE END customer service The fault is in the system interface cable or the system interface board Once the problem has been identified and corrected you can resume your process Is there 15 Vdc on pin 9 referenced to pin 6 of the interface connector Complete the procedure to return the unit to AE customer service P N 5706045C December 2000 5 3 ADVANCED ENERGY Does the unit meet calibration specs at setpoint YES Ifa different problem exists other than what was co
16. e 0 5 female NPT 14 20 ground stud located on the rear of the unit ELECTRICAL SPECIFICATIONS Input Power Specifications Line Voltage Line Frequency Line Current Line Power Overcurrent Protection RF Output Specifications Frequency Full Rated Output Power Output Power Range Output Impedance 187 to 229 V ac nominal 208 V 3 50 to 60 Hz 23 typical at 5 kW 8300 W at full rated RF output power AC to RF efficiency 60 40 A circuit breaker 13 56 MHz 0 005 5000 W forward power minimum into a 50 Q non reactive load 100 to 5000 W RF output is less than 1 W if the requested setpoint is 0 50 Q for maximum power transfer See Figure 1 1 for power derating into non 50 Q loads 1 2 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY Regulation Response Time Warm Up Time Delay Reflected Power Harmonics Spurious Signals Transient Response Command Power Repeatability Forward power regulated at 1 of setpoint or 5 W whichever is greater into a 50 Q load lt 40 ms rise and fall time from RF on or RF off Approximately 500 ms from AC On to RF On Automatic foldback forward power limiting occurs if the reflected power at the generator output exceeds 1000 W The generator is capable of generating 850 W of reflected power into an open circuit At full rated output all harmonics are 55 dBc below the RF output signal when operated into a 50 Q non r
17. eactive load Non harmonic spurious and noise signals are 50 dBc below the RF output signal when operated into a 50 Q non reactive load Less than 0 1 change in output power for 10 change in the ac line voltage lt 0 5 over time for same generator 1 generator to generator Demonstrated Open Loop Power 10 kW into a 50 Q load Power Margin 100 RFG 5500 5kW Scaling Power Derating 1 1 5 2 m 4000 Forward Power Reflected Power a AAA 2000 amp i A n 0 q qu m 2 5 3 3 5 4 4 5 5 Voltage Standing Wave Ratio VSWR FIGURE 1 1 Output Power Derating Curve P N 5706045C December 2000 1 3 ADVANCED ENERGY ENVIRONMENTAL SPECIFICATIONS Ambient Temperature Operating Storage Transportation Humidity Atmospheric Pressure Operating Storage Transportation Coolant Requirements Heat Removal Temperature Flow Rate Pressure Contaminates 5 C to 40 C 41 F to 1049F 25 C to 55 C 13 F to 131 F 25 C to 55 C 13 F to 131 F 15 to 85 relative humidity non condensing gt 745 mbar lt 2500 m 8 203 equivalent altitude gt 585 mbar lt 4000 m 13 124 equivalent altitude 2 480 mbar lt 5000 m 16 405 equivalent altitude 11 270 BTU hr 3300 W at full rated RF output power 5 C to 25 C 41 F to 779F inlet temperature 15 1 liters 4 gallons per m
18. eakers supplying input power to the RFG 5500 Also ensure that the circuit breaker on the rear panel is in the off or 0 position Mate the Hubbell CS8365C connector with the ac power source by aligning the keyed pins inserting the power cord connector until it is fully seated and then rotating the connector clockwise until it is securely latched CONNECTING OUTPUT POWER A DANGER Once the connections are complete and power is turned on lethal voltages are present at the output connector Be sure this connector is terminated and follow normal safety precautions when the system is operating A Before connecting or disconnecting the RF output cable make sure the ac power is turned off the circuit breaker should be in the off or 0 position Attach the mating RF cable connector to the generator by threading it onto the generator s output connector Make sure the mating connector is completely engaged and fully tightened before proceeding Output Power Cable Recommendations The recommended RF cable for the REG 5500 is type RG 393 because of its high insulative values small size and high reliability P N 5706045C December 2000 3 3 ADVANCED ENERGY CONNECTING USER PORT Connect this 15 pin subminiature D shielded female connector labeled User1 to your control unit If this cable is disconnected RF output power will not come on Interface Cabling Recommendations The cable used to connect the generator
19. hrough a 1 21 resistor The intended use of this pin is to enable RF power by externally junpering it to pin 4 Reserved for future use INTERLOCK This pin is part of a series interlock string which must be satisfied to enable ac power in the generator Pin 11 must be grounded to enable RF power a contact resistance of 1 2 kQ or less to ground will satisfy the interlock criteria Reserved for future use Reserved for future use Reserved for future use Reserved for future use User Port Electrical Characteristics The User port on the RFG 5500 provides analog and digital signals for control and monitoring of the generator functions Figure 2 2 shows the electrical diagrams for 2 2 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY the interface circuitry in the generator The following are descriptions of the signal types used in the RFG 5500 Analog Outputs Analog Input Digital Outputs Digital Input Interlock The analog readback signals from the generator pins 2 and 3 are driven by precision low offset operational amplifiers industry type OP200GP These devices are capable of driving high capacitance loads such as those expected in shielded interface applications The user s receiver must present a 10 kQ or greater impedance to these signals The readback signals which represent the forward and reflected power as measured at the output of the generator are scaled to 1 V per kW
20. interference NOTE We recommend copper strap material 0 5 or wider For more information about grounding refer to AE Application Notes titled Grounding p n 5600031A Mounting Figure 3 1 provides the mounting hole dimensions as well as dimensions of the unit to aid in installation P N 5706045C December 2000 3 1 ADVANCED ENERGY 0 N P 3 9 o r DA w la FE a Lg n d p L 2 o D s o N O 2 VE y a Ta U N E E le E LO gt N o gt cn o M o k S e o lt B x 9 e 19 LE o o 0 k j I2 O J lt o O N o APA De x DO O a e r a y lt J 6 Di o NL Do o og s AF z 9 e FIGURE 3 1 Mounting hole locations and dimensions 3 2 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY CONNECTING COOLING WATER The RFG 5500 generator is water cooled A Do not operate the RFG 5500 until water is connected and the cooling requirements are met Connect the input and output water connections and tighten securely Turn on the water and ensure that there are no leaks Be sure that the flow rate and temperature are within the minimum specifications required to operate your RFG 5500 generator CONNECTING INPUT POWER A DANGER Before making any input line power connection turn off building circuit br
21. inute minimum 100 psi 6 9 bars maximum inlet pressure The following specifications are recommended for the water used to cool the RFG 5500 e pH between 7 and 9 e total chlorine 20 ppm e total nitrate 10 ppm e total sulfate lt 100 ppm e total dissolved solids lt 250 ppm e total hardness expressed as calcium carbonate equivalent less than 250 ppm e specific resistivity of 2500 per centimeter or higher at 25 C e total dissolved solids TDS as estimated by the following TDS lt 640 000 specific resistivity in Q cm 1 4 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY CONNECTORS CONTROLS AND INDICATORS CONTENTS Interface Configurations W kK KK KK KK KK KK KK KK KK KK varaner 2 1 Operator Panel Functions 2 5 bront Panel oci e ERE e E Ned 2 6 Rear Panel vnu eot eS eu dene dee ere oO tete enata 2 7 INTERFACE CONFIGURATIONS The following table provides the connector pinouts for the User port connector on the RFG 5500 User Port Connector type 15 pin subminiature D shielded female FIGURE 2 1 User Port Connector Pin Name Description 1 SETPOINT STATUS DIGITAL OUTPUT A logic high level 5 V indicates that an internal power limit has been encountered When RF power is enabled a low level 0 V indicates that the generator is at setpoint 2 REFL PWR MONITOR ANALOG OUTPUT This signal represents the reflected power as measu
22. is sis inss KK KK KK KK KK bas 3 1 Setting deu tae TN 3 1 Utipac KIBg piston AT A Roe di 3 1 SAA d NR RA E AG Re Gel ROLE 3 1 NIOUHUTS ida Ria 3 1 Mounting Hole Locations and Dimensions 3 2 Connecting Cooling Water pla KK KK 3 3 3 3 Connecting Output Power evi ad 3 3 Output Power Cable Recommendations 3 3 Connecting User Port KK KK KK KK KK KK KK pug 3 4 Interface Cabling 3 4 OperatiOl svarar al 4 1 P N 5706045C December 2000 TOC 1 ADVANCED ENERGY Pirst Tim Operation es edad taco n 4 1 Troubleshooting sour Di h wada W k a 5 1 Check RI a A 5 1 Power Of se soi iawn ee eee Beet ae aea 5 1 Power DM a ee W dM c Ae o MIA 5 1 Troubleshooting Flowchartt ce eee K KK 5 1 Other Technical Problems bt 5 5 Returning Units for Repair KK KK KK KK KK 5 5 Warranty Index TOC 2 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY INTRODUCTION CONTENTS Read TS ves a scrobe thee a ben deh n b I 1 Overview of the Manual ts KK KK KK KK KK K I 1 Interpreting the Manual 43e oases KK KK KK KK KK KK KK KK KK KK KK I 1 Sc odi MA t md Ld a 13 Regulatory Requirements Spa KK KK KK KK KK me Rn es 13 R
23. or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must e be made within the applicable warranty period e include the product serial number and a full description of the circumstances giving rise to the claim e have been assigned a return authorization number see below by AE Customer Service All warranty work will be performed at an authorized AE service center see list of contacts at the front of the man ual You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AE is responsible for properly packaging and adequately insuring the unit Authorized Returns Before returning any product for repair and or adjustment call AE Customer Service and discuss the problem with them Be prepared to give them the serial number of the unit and the reason for the proposed return This consulta tion call will allow Customer Service to determine if
24. parts and labor carry our standard 18 month warranty If you have any other questions please contact an AE office at Advanced Energy Industries Inc Phone 970 221 0108 or World Headquarters 970 221 0156 1625 Sharp Point Drive Fort Collins CO 80525 USA Fax 970 221 5583 Advanced Energy Industries Inc Phone 512 719 3939 8403 Cross Park Drive Suite 2D Fax 512 719 4319 Austin TX 78754 USA Advanced Energy Industries Inc Phone 408 263 8784 491 Montague Expressway Fax 408 263 8992 Milpitas CA 95035 USA Advanced Energy Industries Inc Phone 508 371 1381 228 Oak Hill Circle Fax 508 371 0569 Concord MA 01742 USA P N 5706045C December 2000 5 5 ADVANCED ENERGY Advanced Energy Industries GmbH Raiffeisensstrasse 32 70794 Filderstadt Bonlanden Germany Advanced Energy Industries Japan KK TOWA Edogawabashi Building 347 Yamabuki cho Shinjuku ku Tokyo Japan Advanced Energy Industries United Kingdom Suite 412 Market Court Victoria Road Bichester Oxon OX6 7QB UK Phone 49 711 77927 0 Fax 49 711 7778700 Phone 81 3 32351511 Fax 81 3 32353580 Phone 44 1869 321622 Fax 44 1869 325004 5 6 December 2000 P N 5706045C Warranty Claims Advanced Energy products are warranted to be free from failures due to defects in material and workmanship for 18 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping
25. red at the output of the generator This signal is scaled at I kW per V The maximum reflected power is 1 kW 3 FWD PWR MONITOR ANALOG OUTPUT T his signal represents the forward P N 5706045C December 2000 2 1 ADVANCED ENERGY 10 11 12 13 14 15 RF PWR ON SETPOINT GROUND RF ON STATUS EXTERNAL BIAS RF ON BIAS Reserved INTERLOCK Reserved Reserved Reserved Reserved power as measured at the output of the generator This signal is scaled at 1 kW per V DIGITAL INPUT This signal is used to activate the RF output of the generator A voltage level of 4 V to 30 V on pin 4 enables the RF power If pin 4 is open or grounded RF power is inhibited ANALOG INPUT This 0 to 10 V signal defines the desired setpoint for the generator s RF output and is scaled to represent 0 to 5000 W GROUND REFERENCE This pin is referenced to the signal chassis ground in the generator DIGITAL OUTPUT A logic high level 5 V indicates that the RF power is present at the output of the generator A logic low level indicates that RF power is inhibited The interlock loop must be closed and the RF PWR ON signal must be active to enable RF power REFERENCE VOLTAGE T his pin is tied to the generator s 15 Vdc through a 5 62 resistor The intended use of this pin is for notifying the user that ac power is enabled within the generator REFERENCE VOLTAGE T his pin is tied to the generator s 15 Vdc t
26. riteria are satisfied When this indicator is lit the unit is ready to supply output power RF ON This LED indicates that RF power is on enabled Depending on the selected setpoint value RF power may or may not be present at the output connector ALARM This LED indicates that the unit is unable to satisfy the requested setpoint power due to some limit or alarm condition in the generator The conditions that can cause an alarm are high VSWR over temperature and internal power limits In the event of an over temperature condition the RF On command or ac circuit breaker must be toggled to reset the over temperature fault Watts This LED indicates that the value being displayed is in watts For the RFG 5500 this indicator is always lit X 1000 This LED indicates that the value being displayed has been scaled and must be multiplied by 1000 For the RFG 5500 this indicator is always lit P N 5706045C December 2000 2 5 ADVANCED ENERGY Front Panel O Watts O x1000 Fwd Lead Pwr Refl Pwr O Setpeint Bisplay Select O RFG 5500 ADVANCED ENERGY O NF n Alam O A FIGURE 2 3 Front panel 2 6 December 2000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY Rear Panel A ey 1096 D NY P di AN P O lt li e Q v A
27. rrent radio frequency RE energy You should read this manual and understand its contents before you attempt to hook up or operate the equipment it describes Follow all safety precautions NEVER DEFEAT INTERLOCKS OR GROUNDS DANGER All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury DO NOT BE CARELESS AROUND THIS EQUIPMENT RFG 5500 GENERATOR WITH DISPLAY Contents a a SAY a AT 1 1 hades 1 1 Overview of the Manual eques ks uz a 1 1 Interpreting the Manual KK KK KK KK KK KK KK IK I 1 Type Conventions s expe iue x memo NU eg cq 1 1 a TELA dl Patas aie 1 2 j JM LERRA 13 Regulatory Requirements oscars ta ia REI 1 3 o serrr 1 1 General Description sia b ran Aes 1 1 Physical Specifications AS 1 2 Electrical Specifications si EQUES KK KK KK 1 2 Environmental RR RR KK 1 4 Connectors controls and Indicators 00000000005 2 1 Interface Configurations 5 et ees Re did KK 2 1 User Pori FTT 2 1 User Port Electrical Characteristics o oooo 2 2 Operator Panel Functions 224 KK KK KK KK 2 5 Front Panel xa eoe E E A M 2 6 Rear Patieb de had a dde 2 7 Installation and Setup s
28. s are port names which simply begin with a capital letter User port Functions are printed in boldface lowercase letters analog input filtering Symbols A This symbol represents important notes concerning potential harm to people this unit or associated equipment It is found whenever needed in the manual The following symbols may appear on your unit 1024 Short circuit protected Dangerous voltage Chassis EMI ground 1069 Non Ionizing elecstromagnetic radiation General Danger Refer to Manual 1 2 December 2000 P N 57060456 RFG 5500 GENERATOR WITH DISPLAY SAFETY Do not attempt to install or operate this equipment without having proper training first Make sure this unit is properly grounded Protective ground is accomplished through the green yellow ground wire in the ac power cord RF EMI grounding is accomplished by using a copper strap between earth ground and the ground stud on the unit s chassis Ensure all cables are connected and are tight NOTE Low voltage control cabling must be routed away from all ac and RF cables Verify that input line voltage and current capacity are correct before powering the generator Use proper ESD precautions DO NOT BE CARELESS AROUND THIS EQUIPMENT REGULATORY REQUIREMENTS This device has been tested and complies with safety standards DIN VDE 0160 DIN VDE 0160 Al prEN 50178 EMC standard s EN 50081 2 Class A Group 2 EN 50082 2 and FCC Part
29. t meet specs after setpoint signal is confirmed Complete the process to return the unit to AE customer service The fault is in the system interface cable or the system interface board Once the problem has been identified and corrected you can resume your process YES 5 4 December 2 000 P N 5706045C RFG 5500 GENERATOR WITH DISPLAY OTHER TECHNICAL PROBLEMS For technical support contact Advanced Energy Industries Inc Customer Support 1625 Sharp Point Drive Fort Collins CO 80525 Phone 970 221 4670 Fax 970 221 5583 Email support O ftc 1 aei com RETURNING UNITS FOR REPAIR Before returning any product for repair and or adjustment call Customer Service and discuss the problem with a representative Be prepared to give the serial number of the unit and the reason for the proposed return This cousultation call allows Customer Service to determine whether the problem can be corrected in the field or if the unit needs to be returned Such technical consultation is always available at no charge If you return a unit without first getting authorization from Customer Service and that unit is found to be functional you will be charged a re test and calibration fee plus shipping charges To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide All
30. vered please contact your nearest AE customer service Is there high reflected power indicated on the front panel display when the display in in the REFL PWR mode YES breaker in the off position and take a dc measurement at the output of the generator Place the circuit resistance Confirm that the proper setpoint from the system interface board is being sent to the generator interface the front panel display indicates the setpoint power requested when the display is placed in the SETPOINT mode If comparing actual output to setpoint voltage use the following formula setpoint V x 500 1 V 500 add the accuracy of the generator plus the accuracy of the power meter Example 1 03 Vdc is measured between pins 5 and 6 1 03 x 500 515 The setpoint power is 515 W Add the accuracy of the generator 1 and power meter Bird 43 together The total accuracy is 4 4 of 515 W 20 6 W If the power meter indicates between 494 4 and 535 6 the unit meets specs Verify the generator has the correct forward and reflected power readback signals 1 V 1 kW Unit is OK Check system coaxial cable match network pressure or gas mixtures and flow Once the problem has been identified and corrected you can resume your process Is the resistance between 12 and 1350 NO Does the uni
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