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Edwards nEXT240D Turbo Turbomolecular Pump Manual

1. dcs 8831 013 1 Standby speed increase button 5 Alarm LED 2 RS485 RS232 switch 6 Status LED 3 Controller connector socket 7 Normal LED 4 Standby speed reduce button CAUTION When connecting the nEXT pump to a PC remember that the 0 V pin on the RS232 connector may well be connected to earth through the PC If this is the case ensure that the 0 V rail of the 24 48 V supply is not also connected to earth at some other point such as at the power supply If you do not wish to have the 0 V rail of the 24 48 V supply connected to earth at the PC an opto isolated interface to the PC should be used The nEXT pump can connect directly to the RS485 or RS232 serial input on your control equipment a PC as shown in Figure 13 and 14 In this configuration the PC is the serial link master and the nEXT pump is the slave The distance over which the serial link will work is dependent on any difference in voltage between the 0 V at the sending and receiving end If the 0 V reference at the receiving end is within 0 3 V of the 0 V Control Reference pin on the nEXT pump control connector then the serial link should be capable of operating at distances up to 6 m An interface circuit external to the nEXT pump may be required for longer distances The software in the nEXT pump is capable of operating with several pumps connected to a single serial link master This is referred t
2. 64 Mallitelallee sciiciacidecsssicetaunbsniinideddedesedabhieciddaswaasestememioinnhiidadcacseebbacdde 67 e 67 Bearine and oil cartidge ERYRER 67 CP c 67 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 7 1 7 2 7 2 1 1 2 2 7 3 7 3 1 7 3 2 7 3 3 7 3 4 7 4 7 4 1 7 4 2 7 4 3 7 4 4 7 4 5 7 4 6 7 4 7 7 4 8 7 4 9 7 4 10 7 4 11 Clean the external surfaces Of the PUMP OE ETE E E RA Sr PN esI Re SR TS 67 Fault findilg 2 12 oor re dant xa Re psc a RR RR NRI RR X RM INR TOR IER ERR oa INNEN ARAS 68 Flashing Service 5 et CM 71 Decoding Service status WOAS beUcevebedveasteeesy 71 Controller TUN TIME sas ccs 72 PUMP rUn Ume Eee 72 PUMPCYCIES 12 eiae 72 RIS ERIT 73 Oil Cartridge TUN tile i e coe rp n rhe REPE eps e E E su EDS 73 Flashing error CodeS sss roo pie recevant Pere eve UD x Funes Ui mu eur 73 Decoding system Status Words n con i 74 Useful service infOrmatlO
3. 13 i Vent gas specification and yent Control eiseressen pee se ne rro reper Re x TR ex Rare E REO FREE Re EPUM EE 22 8 Purge eas specification 1 1 cete ae e REI Re Des Pra I 23 9 Cooling water specifICatlOl Po p EROR vases Ke SEEN SR 23 10 l ogic interface technical data 24 11 logic interface connector RR RR 25 12 Controller technical data T M H 27 13 Indicator LED S E 28 14 Operating and storage envirotrimert eorr nn rh en een 28 15 Checklist of components re aer 29 16 Summary of commands that can be sent to the NEXT pump 42 17 Command abbreviations 1 ter erus 43 18 Error COdeS RR ROREM 44 19 E 48 20 Vent restrictor orifice diameter with atmospheric pressure at the inlet of the vent valve 48 21 Power E RANNE 51 22 Analogue signal Options 25 22 caeco odere pado Rr IRR 55 23 Serial Cable sr sienes eve deca eu 61 24 Behaviour of a pump when the power is re in
4. Natural convection 7 sccm 7 sccm 20 sccm 20 sccm 28 sccm 20 sccm 30 C Ambient Maximum continuous backing pressure at ultimate inlet pressure Www Water cooling 40 Ambient 2 75 mbar 6 75 mbar 4 75 mbar Force air cooling 35 Ambient 4 75 mbar 2 75 mbar 9 mbar Natural convection 1 mbar 0 4 mbar 2 75 mbar 1 mbar 4 mbar 1 25 mbar 30 C Ambient ou cual 2 Water cooling 40 C Ambient 4 75 mbar 2 75 mbar 3 75 mbar 30 C Ambient Operation attitude Sound pressure level 1 metre away 45 dB A x 3dB A Declared dual number noise emission values in accordance with 1504871 Values for maximum continuous inlet pressure obtained using a RV12 backing pump at sea level in negligible magnetic field Values for maximum continuous backing pressure obtained under no flow conditions at sea level in negligible magnetic field Refer to Section 3 9 for cooling conditions Above these pressures rotational speed drops below nominal t Cooling water temperature 15 C at flow rate of 301 hrt Edwards Limited 2011 rights reserved Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS Page 14 Pumping Speed l s Pumping Speed l s Figure 1 nEXT240 performance curve 300 250 200 150 100 50 10 6 10 5 10 4 10 3 10
5. 4 1 5 Normal speed setting The normal speed is a user configurable setting and can be set to any value between 50 and 100 full rotational speed When you receive the pump it will be configured with a normal speed of 80 full rotational speed To change the normal speed setting send the following command where the characters d represent the value as a percentage of full rotational speed command s se The reply you receive will be as follows Rev S EMEN o The normal speed is now stored in memory within the nEXT pump To check what normal speed is set you can send a query as follows 715 c The reply you receive will be as follows Reply 5 lt gt Edwards Limited 2011 rights reserved Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 4 1 6 Timer setting and options Refer to Section 1 4 3 for a full description of timer functionality The timeout period is a user configurable option and can be set to any value from 1 to 30 minutes When you receive the pump it will be configured with a default timeout period of 8 minutes To change the timer setting send the following command where the characters 4 represent the timeout period in minutes Command The reply you receive will be as follows Reply The timer setting is now stored
6. WARDS B800 00 880 Issue C Figure 4 nEXT 240 dimensions mm figure legend 1 Earth point 7 Booster port A 2 LED indicators on drive unit 8 Backing port 3 Removable cap RS485 RS232 switch vent valve 9 24 48 V Supply socket 10 Body purge port 4 Base mounting holes and fan mountings 11 Electrical drive unit 5 Booster port B 12 Envelope vent port 1 8 inch BSP 6 Interstage port 13 Envelope vent Edwards Limited 2011 All rights reserved Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C Figure 5 nEXT 300 dimensions mm WARDS 195 159 9 TO PORTS 152 8 TO PURGE 87 65 INTERSTAGE PORT Page 18 Rane dcs 8831 002 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C Figure 5 nEXT 300 dimensions mm figure legend 1 Earth point 7 Booster port A 2 LED indicators on drive unit 8 Backing port 3 Removable cap RS485 RS232 switch vent valve 9 24 48 V Supply socket 10 Body purge port 4 Base mounting holes and fan mountings 11 Electrical drive unit 5 Booster port
7. enn 6 1 5 5 Controller configuration serial configuration ERE E E EO SEREDE 6 2 Technical 9 2 1 GONE AL 9 2 2 PUMPING MEDIA vases aes 9 2 3 Vent gas specification and dat cese ire hai eR 22 2 4 Purg sas sp cification auae 23 2 5 COOLING Water E HR 23 2 6 Materials exposed to gases pumped ra er hern rhe enin 23 2 7 Electrical data SIESS 24 2 8 logic interface 24 2 9 Controller connector SOCket i 27 2 10 rq H 28 2 11 Operating and storage environment reo no rh puo 28 3 Installation og TITER 29 3 1 EE ERA sud a 29 3 2 Typical installation 22 eos i e Ir puce tees 29 3 3 Connection to the VACUUM System 30 3 3 4 Inlet screen supplied fitted on CF only eene ehe enhn hh ehh eren hne erre 31 3 3 2 Mechanical 31 3 3 3
8. 30 11 Logic interface connections parallel control enhn eterne 35 12 Controller status infOrmmatiOn eatur leal rm eine dite ul eu d semen kw vix el 37 13 Logic interface connections RS232 serial control 38 14 Logic interface connections RS485 serial control 38 15 Conceptual diagram for multi drop connection using RS232 interface 40 16 RS485 multidrop Connection xs e eres y EVES ONES EEEE Yea ne V kr e veau 41 17 Logic interface connection mixed parallel and serial operation 45 18 Maximum relative humidity to avoid condensation with water cooling 50 19 Serial and parallel control flowchart FER sE 62 20 NEXT exploded accessories VIEW 84 21 NEXT exploded accessories VIeW 85 Tables Table Page 1 Power limits synseta EUR 3 2 General M R 9 3 NEXT 240 pumps technical e 10 4 nEXT 300 pumps technical data Roo Pa 33 a aca ed ike a P RE 11 5 NEXT 400 pumps technical data 12 6 NEXT pumps technical data
9. Lsssss Controller internal software mismatch Cycle the power to the pump and see whether the error code appears again If it does contact your supplier or Edwards Controller failed internal configuration Cycle the power to the pump and see and calibration operation whether the error code appears again If it does contact your supplier or Edwards ssLsss Failure to reach or maintain half full Check whether the pump is too hot or speed within the timer setting value whether the inlet pressure is too high sssLss Overspeed or overcurrent trip Cycle the power to the pump and see activated or other hardware fault whether the error code appears again If it does contact your supplier or Edwards Edwards Limited 2011 All rights reserved Page 73 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C ED WARDS Table 28 Flashing error codes Error flash Error flash TA Comments position code ssssLs Pump internal measurement system Cycle the power to the pump and see disconnected or damaged whether the error code appears again If it does contact your supplier or Edwards sssssL Serial enable becomes inactive Re activate serial enable and send a following a serial start command serial stop command to clear the error code Note alarm LED error flash sequence is capable of signalling multiple fail conditions F
10. 7 3 4 NW16 and NW25 Ports lt nEXT pumps are supplied with NW25 exhaust and booster ports The item numbers of replacement ports are given A below Table 37 16 and NW25 ports JO Pot JRemNMumbr fy B800 00 806 7 4 Accessories 2 Q 7 4 1 Installation D The accessories available for use with the nEXT pumps are described in the following section Figure 20 and 21 shows how the accessories are fitted to the pump n 7 4 2 e An ACX air cooler can be fitted to the nEXT pump refer to Section 3 10 to check the suitability of air cooling in a particular application D Table 38 ACX air cooler ACX nEXT radial fan B580 53 175 ACX nEXT axial fan B580 53 185 ACX nEXT radial fan with Phoenix connector B580 53 170 ACX nEXT axial fan with Phoenix connector B580 53 180 7 4 3 WCX water cooler A water cooler can be fitted to the nEXT pump refer to Section 2 5 to check the suitability of the cooling water supply Table 39 WCX water cooler WCX nEXT water cooling kit B800 00 815 Edwards Limited 2011 rights reserved Page 81 Edwards and the Edwards logo are trademarks of Edwards Limited pue saJeds 9521 95 59110559226 B800 00 880 Issue ED WARDS 7 4 4 BX bakeout band A BX bakeout band accelerates the degassing of the pump to enable it to achieve lower pressures It may also be used to protect the pump from condensation of contaminants T
11. B800 00 880 Issue C Table 16 Summary of commands that can be sent to the nEXT pump continued Object name Command Parameter Factory Data Comments rang setting type Speed control Timer options Analogue signal options Close vent valve Service status Controller run time Pump run time Pump cycles Bearing run time Oil cartridge run time decimal Set target speed to full speed Set target speed to standby speed decimal Timer disabled Timer enabled Note that the timer is permanently enabled on ramp up decimal Analogue output measured speed Analogue output measured power Analogue output measured motor temp Analogue output measured control temp decimal Closes the vent valve for delayed start and overrides the current vent option There is no open vent valve command but the stop command 1C852 0 will clear the override 32 bits hex 0 999999 decimal 0 999999 decimal 0 999999 decimal 0 999999 decimal 0 65535 decimal 0 65535 decimal 0 999999 decimal 0 999999 decimal 0 999999 decimal Service status word Hours run by controller Hours until controller service due Hours run by pump Hours until pump service due Cycles run by pump Cycles until pump service due Hours run by bearing Hours until bearing service due Hours run by oil cartridge 0 999999 decimal Hours until oil cartridge service due Table 17 Command abbreviations Abbreviation Mean
12. EA RIP Eaa RR eere Y 82 42 Vent Festi IGEOL S a wig ete etie e heit tnde Me wae die 82 43 Vent port adaptor 83 44 PRX 83 45 C clamp adaptor tool Kit rosna SEMEREMEEEENE DA RI EEEE E FERRENT 83 46 C clamp adaptor port kit EEE sarees 83 Edwards Limited 2011 All rights reserved Page v Edwards and the Edwards logo are trademarks of Edwards Limited U9 U07 B800 00 880 Issue C Ep WARDS This page has been intentionally left blank Page vi Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 1 introduction 1 1 Scope and definitions This manual provides installation operation maintenance and storage instructions for the Edwards nEXT Turbomolecular Pumps You must use the nEXT pumps as specified in this manual If you do not the protection provided by the nEXT pumps may be impaired Read this manual before you install and operate the nEXT pump Important safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below WARNING Warnings are given where failure to observe the instruction could result in injury or death to people CAUTION Cautions are given where failure to observe the instruction
13. To maintain the cleanliness of your vacuum system we recommend that whenever you switch the pump off you vent the pump or vacuum system when the speed of the nEXT pump is between full rotational speed and 50 of full rotational speed Over this speed range the rotor spins fast enough to suppress any backstreaming of hydrocarbon oil from your backing pump Do not connect the vent valve to the backing pipeline this may lead to contamination Connect the inlet of the vent valve to the vent gas supply refer to Section 2 3 for the vent gas specification Venting may be accomplished by using one of the following methods described in Section 3 9 1 to 3 9 4 3 9 1 Manual vent valve A manual vent valve is supplied with the nEXT pump It is not possible to accurately control the rate of pressure rise using the manual vent valve so take care not to open it too quickly We recommend that you open the manual vent valve only after the pump speed has fallen to 50 of full rotational speed 3 9 2 TAV5 or TAV6 solenoid vent valve The TAV5 and TAV6 solenoid valves can be purchased as accessories refer to Section 7 4 The solenoid valves can be used in the following ways e Use a TAV5 or TAV6 solenoid valve in place of the manual vent valve on the pump e Use a TAV5 or TAV6 solenoid valve connected to a convenient flange on your vacuum system If you connect a vent valve to your vacuum system select a point upstream of the nEXT pump to prevent bac
14. HKemnumbr e B580 66 021 B580 66 022 B580 66 023 B580 66 024 B580 66 025 Page 82 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited oa Gowarps 8800 00 880 Issue D 7 4 7 Vent port adaptor lt The vent port adaptor has a 1 8 inch BSP male thread that can screwed into both the vent port and purge port A making them suitable for NW10 fittings D Table 43 Vent port adaptor Vent port adaptor NW10 1 8 inch BSP male B580 66 011 7 4 8 PRX purge restrictor D The PRX10 is a modified DN1ONW centring ring that filters the purge gas and restricts its flow rate to the D recommended flow of 25 sccm You must fit a vent port adaptor to the purge port in order to connect a purge restrictor to the pump Q Table 44 PRX purge restrictor Q O PRX10 purge restrictor B580 65 001 7 4 9 C Clamp Adaptor NW25 exhaust and booster port of the nEXT pump can be removed and replaced with C clamp connection D The following tool and parts are available Table 45 C clamp adaptor tool kit Tool kit Port removal and insertion tool B800 00 807 Table 46 C clamp adaptor port kit C Clamp and NW25 flange adaptor B800 00 813 7 4 10 Interface Cable An interface cable allows you to connect the nEXT pump to a PC Serial commands are then used to control and monitor the nEXT pump Table 47 Interfac
15. If the nEXT pump receives an unrecognisable message between the start and stop characters it will return an appropriate error message Refer to Section 3 7 6 for more information about operating the nEXT pumps in multi drop mode Edwards Limited 2011 rights reserved Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited 1 B800 00 880 Issue eo WARDS Figure 15 Conceptual diagram for multi drop connection using RS232 interface A RS232 Rx 1 2 RS232 Rx 4 5 6 RS232 Tx 7 1 2 5232 Rx dcs 8831 016 RS232 interface on control equipment 3 nEXT pump 2 Buffer 4 OR gate Page 40 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C Figure 16 RS485 multidrop connection 85232 Rx 65232 Tx d 9 5 8831 017 1 RS485 interface on control equipment 2 nEXT pump logic interface 3 7 4 Message structure The message structure and command set are the same for RS485 and RS232 options To communicate a message to the nEXT pump you must send the characters in a specific order If the message does not conform to the correct structure it will be ignored and no reply will be sent The correct structure to use is as follows e a valid start character either a character for a store opera
16. Maximum relative humidity to avoid condensation with water cooling 100 90 80 5 70 5 60 Cooling Water g 505 Temperature S 7 40 5 30 20 3 20 15 10 gt 0 5 5 10 15 20 25 30 35 40 8 Ambient Temperature 3 50 Edwards Limited 2011 rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited i Ep WARDS B800 00 880 Issue C 4 Operation WARNING Do not operate the nEXT pump unless it is connected to your vacuum system If you do the pump rotor can cause injury The pump rotor rotates at very high speeds and the rotating blades might not be visible Before operating the pump it is worthwhile configuring the various controller settings so that they are suitable for your application If your system is designed to operate with parallel control and monitoring you will not have the facility to change the majority of the controller settings once the nEXT pump is installed on your system The pump is supplied with all settings at factory default values as shown in Table 16 If you wish to change any of the controller settings make sure you do this separately before installing the nEXT pump on your system To configure the nEXT pump you could use your own serial system Section 4 1 details the commands that you will need to configure the controller Alternatively you could use the Edwards TIC Turbo and Instrument
17. 0 8 V d c lout 0 29 mA nominal 4 to 26 4 V d c Internal pull up to 3 2 V nominal Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited EDWARDS Table 10 Logic interface technical data continued Logic interface item Analogue output Output voltage 0 to 10 V d c directly proportional to measured parameter Motor speed 0 1000 Hz 0 100 Input power 0 200 W Motor temperature 0 100 Controller temperature 0 100 Voltage accuracy 0 2 V Output current 5 mA for specified accuracy NORMAL status output Type Open collector transistor plus pull up resistor Refer to Figure 8 lt Normal speed default 80 Off 2 2 internal pull up to 12 V d c gt Normal speed On 0 8 V d c sinking 20 mA Current rating 20 mA to Voltage rating 28 8 Vdc maximum external pull up voltage FAIL status output Type Open collector transistor plus pull up resistor Refer to Figure 8 Fail Off 3 3 kO pull up to 12 V d c OK On 0 1 V d c sinking 1 7 mA 0 8 V d c sinking 20 mA Current rating 20 mA to 0 V Voltage rating 28 8 Vdc maximum external pull up voltage Mating half of connector not supplied Table 11 Logic interface connector pins 2 ovControtreference OV reference for all control and status signals below START STOP controtinput _ ComecttoPin2tostertpump o
18. 1 Introduction Edwards products spares and accessories are available from Edwards companies in Belgium Brazil France Germany Hong Kong Italy Japan Korea United Kingdom USA and a worldwide network of distributors The majority of these employ service engineers who have undergone comprehensive Edwards training courses Order spare parts and accessories from your nearest Edwards company or distributor When you order please state for each part required e Model and Item Number of your equipment e Serial number if any pue saJeds 9514 95 e Number and description of the part 7 2 Service Edwards products are supported by a worldwide network of Edwards Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment that has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide Edwards engineers to support on site maintenance service or repair of your equipment 59110559228 For more information about service options contact your nearest Service Centre or other Edwards company 7 2 1 Returning a pump for service If you need to send your pump to a Service Centre use the returns procedure included at the end of this manual The instruction in the returns procedure to drain all fluids does not apply to the lubricant in the pump oil reservoir
19. 2 10 1 100 Inlet Pressure mbar dcs 8831 005 1 2 Ar 3 He 4 Figure 2 nEXT300 performance curve 10 6 10 5 10 4 10 3 10 2 10 1 100 Inlet Pressure mbar 1 2 3 4 H2 dcs 8831 006 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS Figure 3 nEXT400 performance curve B800 00 880 Issue C e Q N Q Pumping Speed 1 5 m o e 10 6 10 5 10 4 10 3 10 2 Inlet Pressure mbar 2 Ar 3 He Edwards Limited 2011 rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited 100 dcs 8831 007 Page 15 B800 00 880 Issue 012 WARDS Figure 4 nEXT 240 dimensions mm 0159 5 150100 83 14 81 5 TO VENT 189 48 154 6 TO PORTS 147 3 TO PURGE 116 c of g 133 LINT TT 197 5 H Page 16 Pon INTERSTAGE 100 c of g dcs 8831 001 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited
20. 24 V for driving accessories from Controller socket Inlet strainer fitted in the NW25 interstage and booster port only 3 2 Typical installation A typical pumping system with a nEXT pump is shown in Figure 10 The accessories available for the nEXT pumps are detailed in Section 7 4 the accessories are shown in Figure 20 and 21 Edwards Limited 2011 rights reserved Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 3 3 Connection to the vacuum system WARNING Ensure that all wires and piping are routed appropriately to avoid the risk of tripping WARNING Install the pump in the vacuum system before the logic interface cable is connected to the control equipment and before the electrical supply is connected This will ensure that the pump cannot operate accidentally causing injury We recommend that the system is leak tested after installation has been completed Figure 10 Typical pumping system with a nEXT pump 17 10 11 1 Vacuum system 10 Rotary backing pump E E 2 High vacuum gauge 11 Mist filter 3 Vibration damper 12 Vent valve 8 4 Inlet screen 13 Alternative position for 5 nEXT pump vent valve 6 Backing valve 14 Air cooler 7 Vacuum gauge 15 PRX purge restrictor 8 Flexible bellows 16 Regulated purge gas supply 9 Foreline trap 17 WCX water cooler and connections Page 30 Edwards Limited 2011 All righ
21. B 12 Envelope vent port 1 8 inch BSP 6 Interstage port 13 Envelope vent Edwards Limited 2011 rights reserved Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited je iuu2a B800 00 880 Issue C Figure 6 nEXT 400 dimensions mm WARDS i ax _ 27 87 65 72 5 T 7 87 INTERSTAGE PORT Page 20 0202 4 160 5 2 5 T 7 EX Ere ETE dcs 8831 003 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C Figure 6 nEXT 400 dimensions mm figure legend 1 Earth point 7 Booster port A 2 LED indicators on drive unit 8 Backing port 3 Removable cap RS485 RS232 switch vent valve 9 24 48 V Supply socket 10 Body purge port 4 Base mounting holes and fan mountings 11 Electrical drive unit 5 Booster port B 12 Envelope vent port 1 8 inch BSP 6 Interstage port 13 Envelope vent Edwards Limited 2011 All rights reserved Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited B800 0
22. Delayed Start 1 rene re unu 58 015 P 77 E Earth ground connections 34 Electrical data 55 rore rr nn en 24 Electrical installation tones 33 Electrical supply failure 64 Electronic braking options 55 F Factory settilgs 55 Fault finding en 68 Flashing error CodeS erronee 71 Forced air cooling 49 Indicator LEDS 28 Edwards Limited 2011 rights reserved B800 00 880 Issue C Inlet connection and orientation 31 Inlet flange seals ether 80 Inlet screen supplied fitted 31 Inlet SEtralllel sore vov 80 Installation rer nnn 29 81 Interstage connection iDX variants only 33 INCFOUUCKION sp 1 ISX inlet Sree 80 L Link parameter readings 60 Logic interface connector eere enn 24 M MAINTENANCE sae HE ORSONK 67 Manual vent valve ntn ein 47 Materials exposed to gases pumped 23 Measured motor speed 60 Mechanical fixing 31 Message protocol 41 Multi dro
23. Take care and use safe lifting practices when manually handling the pump WARNING The inlet screen is a coarse filter for debris and should not be used as a finger guard Take care when you unpack the pump to avoid excessive shocks that could damage the bearings and reduce the life of the pump The pump is supplied with the inlet and outlet sealed to prevent entry of dust and vapour Do not remove these seals until you are ready to install the pump on your vacuum system Remove all packing materials and check the pump If the pump is damaged notify your supplier and the carrier in writing within three days state the Item Number of the pump together with your order number and your supplier s invoice number Retain all packing materials for inspection Do not use the pump if it is damaged Check that your package contains the items listed in Table 15 If any of these items is missing notify your supplier in writing within three days If the pump is not to be used immediately store the pump in suitable conditions following the procedure described in Section 6 1 Do not discard the packing materials retain them to re package the pump should you need to return it for service Table 15 Checklist of components Quantity check 7 nEXT pump with inlet screen fitted fitted to CF pumps only Inlet seal either trapped O ring with integral inlet screen Co seal or copper compression gasket suitable for the inlet flange type Connector
24. a serial Start command The system status word used in the example above was obtained with the pump at rest By decoding the word we can learn more about the state of the pump Refer to Table 31 Edwards Limited 2011 rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Page 75 B800 00 880 Issue C ED WARDS Table 31 Example decoding of system status words Bit number Status of bit We can deduce in example The pump has not failed The pump is at rest Speed is below normal speed The vent valve is open There is no active start command Serial enable is active Standby is not active Speed is below 50 of full rotational speed The pump is not in parallel control mode 0 1 2 3 4 9 6 7 8 9 The pump is not serial control mode There is no controller internal software mismatch O O O O O a O O Controller passed internal configuration and calibration operation The timer has not timed out Overspeed and overcurrent trip not activated Pump internal temperature measurement system is fine Serial enable has not become inactive during serial control 5 5 10 Useful service information If you are using the serial communications link you can access information about your pump such as pump type and internal controller software versions This information is particularly useful for service personnel to determine what
25. a service is required the standard once per revolution flash on the yellow status LED is replaced with a service flash code The service flash codes are specified in Table 26 Table 26 Flashing service codes LED on 1sec Oil cartridge service recommended It is recommended that the oil LED off 1sec cartridge is replaced Refer to Section 7 2 LED on 3sec Bearing and oil cartridge service It is recommended that the bearing LED off 1sec recommended and oil cartridge are replaced Refer to Section 7 2 LED on 3sec Pump service required The turbo impeller or controller has LED off 3sec reached its expected life It is recommended that the pump is returned to an Edwards service centre for service Refer to Section 7 2 5 5 2 Decoding service status words The service status may be accessed directly via the serial link This method of accessing service status will give the most complete picture of current and future service requirements and will allow preventative maintenance activities to be scheduled summary of the current pending service status is provided in response to the service status command command lt You will receive the following reply Reply sr cr The service status word is made up of 8 hexidecimal digits To decode this word you must convert each digit into 4 digit binary number as described in Section 5 5 9 Each binary digit bit represents
26. could result in damage to the equipment associated equipment and process The units used throughout this manual conform to the SI international system of units of measurement where appropriate US equivalent units of measurement are also given When flow rates are specified the abbreviation sccm is used to mean standard cubic centimetres per minute This is a flow of 1 cm min at an ambient temperature of 0 and a pressure of 1013 mbar 1 013 x 105 Pa In accordance with standard EN61010 the following warning label appears on the nEXT pump Warning refer to accompanying documentation Edwards Limited 2011 All rights reserved Page 1 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 1 2 General description WARNING Improper use of the equipment could cause damage to it or injury to people The user is responsible for the safe operation installation and monitoring of the system WARNING The drive contains electrolytic capacitors and under certain fault conditions may emit dangerous fumes Ensure that the drive is operated in a well ventilated area CAUTION Do not attempt to separate the controller from the pump since this will cause damage to the electrical connections The nEXT pumps consist of the turbomolecular pump with a permanently attached controller containing drive electronics The controller controls t
27. in memory within the nEXT pump To check what timeout period is set you can send a query as follows Command 5 MM The reply you receive will be as follows Reply The timer is permanently enabled during ramp up however it is optional whether you have it enabled at other times When you receive the pump it will have the timer enabled by default If you wish to disable the timer send the following serial command command 115 The reply you receive will be as follows Reply The state of the timer option is stored memory within the nEXT pump To enable the timer again send the following serial command Command 15 The reply you receive will be as follows Reply To check whether the timer is enabled or disabled send the following query Command T TS E The reply you receive will be as follows where 4 0 means disabled and 4 1 means enabled Reply 5 Page 54 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C 4 1 7 Analogue signal options The analogue output can be used to monitor one of four different parameters as detailed in Table 22 Table 22 Analogue signal options Option number Description of analogue output number 0 Measured pump rotational speed Note Thisisthe factory default setting 1 Measured sy
28. interlock function only operates with serial start commands and therefore only in serial control mode In serial control mode the pump cannot be commanded to standby speed by the standby line instead a serial standby command must be used The parallel normal and analogue output signals provide valid pump status information at all times under mixed parallel and serial operation The analogue output voltages are described in Table 10 Edwards Limited 2011 All rights reserved Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited uoreJedo B800 00 880 Issue C ED WARDS Figure 19 Serial and parallel control flowchart Power applied NONE IN CONTROL Pump decelerating Or stopped Serial link enabled if serial enable active Parallel Start Active Serial Enable active AND Serial start command Parallel Start Inactive Serial Enable active AND Serial stop command PARALLEL CONTROL MODE Pump running Serial link enabled if Serial Enable active SERIAL CONTROL MODE Pump running Serial link enabled Serial Enable Active AND Serial stop command Serial Enable Inactive SERIAL CONTROL MODE Pump decelerating Or stopped with Serial Interlock Alarm Serial link enabled if Serial Enable active dcs 8831 004 4 7 Operation with a TIC For operation with an Edwards Turbo Instrument Controller or TIC Turbo Controller the nEXT pump can be c
29. model of pump you have Send the following query to find out pump type command 5 AMNEM The reply you will receive is as follows where string1 is the pump type string2 is the DSP software version number and string3 is the designated full speed of the pump in revolutions per second Reply 5 BUNSEN String Stag cr Send the following query to find out the boot loader software version command 5 The reply you will receive is as follows where string1 is the boot loader software version number s lt gt lt Page 76 Edwards Limited 2011 rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 6 Storage and disposal CAUTION Use of non Edwards spares may result in reduced reliability and performance and will invalidate your warranty 6 1 Storage Use the following procedure to store the pump 1 Place protective covers over the inlet outlet interstage for the 4 nEXT only purge booster for the nEXT only and vent ports 2 Place the pump in its packing materials For fastest pump down when the pump is put back into service seal the pump inside a plastic bag together with a suitable desiccant 3 Store the pump in cool dry conditions until required for use Refer to Table 14 for recommended storage environment When required prepare and install the pump as
30. not supplied to connect your control equipment to the connector on the logic interface cable refer to Table 10 When you make the electrical connections to the nEXT pump described in the following sections refer to Table 11 for full details of the logic interface connector pins You can control the nEXT pump using a hardware parallel control interface and or via commands sent over a serial interface If you wish to control the nEXT pump using the hardware parallel interface refer to Section 3 6 for more information If you wish to use the serial interface see the instructions given in Section 3 7 The logic interface provides the facility to work with a mixture of parallel and serial control refer to Section 3 8 3 5 5 Connect the electrical supply WARNING This product requires a separate power supply not included The power supply should be adequately protected against a hazardous live condition for example in case of a short circuit WARNING Incorporate a suitable isolation device in the electrical supply Locate the switch in an easily accessible position and mark it as the disconnecting device for the nEXT pump If you do not you will not be able to switch off the nEXT pump in an emergency WARNING Incorporate a suitable fuse as specified in Section 2 8 in the 24 48 V supply line to the nEXT pump To fully protect the pump in case of a fault a suitable rated fuse should be used refer to Table 10 The power supply
31. number of hours until the next service is due is estimated by the controller based on the operating conditions of the pump and therefore may reduce at more or less that 1 hour per hour The dominant factor in extending controller life is reduced pump temperature 5 5 4 Pump run time You can monitor the run hours and recommended service time of the impeller in the nEXT pump by sending the following query Command You will receive the following reply where the first number is the hours run by the impeller and the second is number of hours until service is recommended Reply gt 5 5 5 Pump cycles You can monitor the number of start stop cycles completed and the number remaining until the next service is due by sending the following query lt You will receive the following reply where the first number is the start stop cycles completed by the pump and the second is the number of start stop cycles until service is recommended Reply sr cr Page 72 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 5 5 6 Bearing run time You can monitor the run hours and recommended service time of the bearing in the nEXT pump by sending the following query eS lt You will receive the following reply where the first number is
32. of Edwards Limited B800 00 880 Issue eo WARDS The inlet connections for the nEXT pump are CF flange ISO flange and VG flange e f the pump has a CF flange use the copper compression gasket supplied with the pump and use a full complement of bolts to connect the inlet flange of the pump to the vacuum system e f the pump has ISO flange use the Edwards combined inlet screen and trapped O ring supplied with the pump and use a minimum of four claw clamps each torqued to 30 Nm to connect the inlet flange of the pump to the vacuum system Alternatively use a rotatable collar and the combined inlet screen and trapped O ring supplied with the pump to connect the inlet flange of the pump to the vacuum system use a full complement of bolts with the rotatable collar e f the pump has a VG flange use a full complement of 8x M10 bolts and washers to connect the pump to the vacuum system Flange fixings bolts must be a minimum of 700 MPa tensile strength and evenly tightened in a cross pattern in 3 tightening stages to a final torque of 30 Nm to ensure even compression of the O ring and clamping of the flanges All inlet flange bolts must be re tightened once the system is under vacuum Ensure that no torques or other forces are transmitted to the pump from the vacuum system or the associated pipelines If necessary fit an inlet vibration damper between the pump inlet and the vacuum system In t
33. options and assignment of a multi drop address Refer to the TIC PC program Instruction Manual for more information 4 3 Before starting the pump Irrespective of the system you use to control the nEXT pump work through the following steps before starting the pump 4 3 1 Close the vent valve e f you are using a manual vent valve turn it clockwise to close it e f you are using your own control system to drive vent valve make sure that the vent valve is closed e f you are driving a solenoid valve from the controller the TAV valve will automatically shut when the pump is started e f you are using the TIC to operate the vent valve refer to Section 4 7 Note The backing pump and nEXT pump can be started at the same time the nEXT pump will not be damaged and can operate as an effective baffle However if the vacuum system is large 100 litres or larger it will be more efficient to allow the backing pump to reduce system pressure to 10 mbar before starting the nEXT pump In this case it will be necessary to close the vent valve in advance of starting the backing pump If you are using the controller to control a TAV solenoid valve but you are operating with parallel control and monitoring you will NOT be able to shut the valve in advance of starting the nEXT pump because you do not have the facility to send the appropriate serial command If you have the facility to send serial commands you can perform
34. or RS485 can be selected using the RS485 RS232 slide switch located on the controller refer to Section 3 7 The logic interface can be plugged directly into the Edwards TIC Turbo Controller or TIC Turbo Instrument Controller and then use the functionality that they provide Alternatively the logic interface can be connected to a customers own control system The most useful arrangements are described in the sections below For more information about the logic interface refer to Section 2 8 1 5 1 Parallel control and monitoring The simple parallel interface is a quick and easy way to control the pump this is the same interface used on existing 24 V Edwards Turbo Pumps The controls that are available to use are start and standby You can monitor the system status using the normal fail and analogue output signals Note The serial enable switch MUST be open no connection and the slide switch must be in the RS232 position refer to Section 3 7 Refer to Section 3 6 for more detailed instructions of how to use the parallel interface Edwards Limited 2011 All rights reserved Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS A system operating with only a parallel connection has no facility to adjust the configuration settings stored in the controller for example power limit setting or controlled venting options This would place a res
35. restart when the electrical supply is restored after an electrical supply failure Ensure that people cannot be injured by the rotating blades of the pump If the electrical supply to the nEXT pump fails when the pump is rotating the motor of the pump is used as a generator The regenerated power is used to maintain the output signals on the logic interface such as the normal signal and serial communications to power the three indicator LEDs on the controller and to maintain power at the controller output to control the vent valve if fitted As the pump rotational speed decreases the motor s ability to generate power also decreases until it is no longer able to maintain power to the logic interface or LEDs This will occur at speeds below 50 full rotational speed Therefore you will not have any indication about pump rotational speed yet the impeller may still be turning When the power is reinstated after a power failure the behaviour of the pump will depend on the control mode at the time of failure parallel or serial and the length of time the pump was without power Table 24 shows a number of scenarios 4 10 gt Bakeout WARNING Do not touch the bakeout band or surrounding surfaces during the bakeout process as they will be hot CAUTION Pumps with ISO flanges are not suitable for bakeout only pumps with CF flanges must be used When baking the pump to above 70 at the inlet flange the pump must be water cooled to p
36. speed Table 20 Vent restrictor orifice diameter with atmospheric pressure at the inlet of the vent valve Vacuum system volume litres Orifice diameter mm 20 10 5 2 Page 48 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 3 10 Cooling 3 10 1 Introduction CAUTION When using an alternative cooling arrangement other than a standard Edwards cooling accessory please ensure the cooling is NOT solely directed or ducted onto the pump controller CAUTION You must ensure that the pump is adequately cooled to prevent damage to the rotor and bearing e Natural convection cooling For some light pumping duties with an ambient air temperature less than 30 C natural convection cooling may be adequate to cool the nEXT pump e Forced air cooling The ambient air temperature when using forced air cooling must be 5 C to 35 C You must ensure that there is an adequate supply of cooling air to the pump e Water cooling You must use water cooling with an ambient air temperature greater than 35 C or when using a bakeout band CF variants only When using water cooling ambient air temperature must be less than 40 C and the water temperature must be between 10 C and 20 C e recommend that wherever possible you cool the pump by forced air cooling or water cooling Refer to Table 6 for further performance info
37. the gases will not react or combine to form dangerous gases and substances WARNING Do not exceed the maximum continuous operating pressure Doing so can result in dangerous rotor temperatures and will shorten the life of the pump Edwards Limited 2011 rights reserved Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C eno WARDS WARNING Do not expose any part of the human body to vacuum WARNING Do not use a nEXT pump to pump mercury vapour and do not allow mercury for example from a McLeod gauge to come into contact with the pump If you do the pump rotor may corrode and fail Note Concentrations of gases may be modified by the compression of the pump The pumps are designed to pump the following residual gases normally used in high vacuum systems e Air e Carbon dioxide e Methane e Neon e Propane e Krypton e Butane e Helium e Carbon monoxide e Ethane e Nitrogen e Argon e Hydrogen You can use the pump to pump oxygen and water vapour subject to the following conditions e Oxygen when the pump is purged an inert gas oxygen can be pumped at concentrations above 20 by volume Refer to Section 2 4 for Purge gas specification However if the pump is not purged the oxygen concentration must be less than 20 by volume e Water vapour you must ensure that vapour does not conde
38. the hours run the bearing and the second is the number of hours until service is recommended v 5 5 7 cartridge run time You can monitor the run hours and recommended service time of the oil cartridge in the nEXT pump by sending the following query Emm You will receive the following reply where the first number is the hours run by the oil cartridge and the second is the number of hours until service is recommended URGERE 5 5 8 Flashing error codes Whenever a fail condition becomes active the red alarm light continuously or shows a flashing sequence If the error light is on continuously this indicates a problem has been found with the embedded software In this case try cycling the power If cycling the power does not clear the indication a software download will be required contact your supplier or Edwards If the alarm LED is flashing identify the error flash code and consult Table 28 There is a sufficient off period between each subsequent cycle repetition to clearly mark the start of a new flash sequence The duration of a long flash L is equal to 3 times the duration of a short flash 0 5 s Table 28 Flashing error codes Error flash Error flash Comments 555555 The speed fell below 50 of full Check whether the pump is too hot or rotational speed with the Timer whether the inlet pressure is too high disabled
39. the power supply and isolate any other power sources before you remove the pump from your vacuum system for maintenance or fault finding procedures gt ooo 5 1 Introduction Instructions for bearing maintenance and surface cleaning for the nEXT turbomolecular vacuum pump are described in the following sections The inlet screens inlet strainer and inlet flange seals are available as spares refer to Section 7 3 5 2 Bearing and oil cartidge maintenance The oil cartridge and oil lubricated bearing will need to be replaced when it reaches the end of its service life This is typically more than 17 500 hours for the oil cartridge and 35 000 hours for the bearing When the oil cartridge and or bearing need replacing we recommend that you either e Send your pump to an Edwards Service Centre for a bearing and or oil cartridge replacement e Purchase a oil cartridge or bearing service kit and replace the bearing and or oil cartridge on site refer to Section 7 2 5 3 Rotor life The fatigue life of nEXT Turbo pump rotors is typically 40 000 to 50 000 cycles As a precautionary measure Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of acceleration to full speed and back to a stop or after ten years of use whichever occurs first 5 4 Clean the external surfaces of the pump WARNING Clean the external surfaces of the pump in a well ventilated location When you use cleaning solut
40. your control equipment for example to operate other components in the pumping system at preset values You can only monitor one system parameter at a time using the analogue output However it is easy to configure the controller to monitor a different system parameter refer to Section 4 1 7 1 4 5 Automatic vent options An Edwards TAV vent valve can be connected directly to the nEXT pump s controller The controller is capable of providing a number of different venting options The drive electronics can control the rate of venting Using this feature the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings Once the pump rotational speed has dropped to below 50 of maximum speed it is safe to hard vent open the vent valve fully Page 4 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C There are many venting options available to you such as e Hard vent when rotational speed drops below 50 e Controlled vent when above 50 speed and hard vent below 50 speed e Hard vent immediately through a suitable restrictor Controlled venting gives the benefit of a quicker ramp down time by controlling the vent rate through a single large orifice across the pump speed range A full list of the venting options is given in Section 3 9 In addition there is a feature that allows a delayed start of th
41. 0 880 Issue C ED WARDS 2 3 Vent gas specification and vent control data Although the pump may be vented to atmosphere high relative humidity of the air may greatly increase the subsequent pump down time To reduce pump down times you should vent with dry clean gases Refer to Section 3 9 for a description of the vent options and the vent valve connection refer to Section 4 1 3 for configuring the venting options Table 7 Vent gas specification and vent control Vent gas specification and control Reference data Vent gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 Maximum size of particulates 1 Maximum concentration of oil 0 1 parts per million Recommended time for rotational speed to reach 50 15 seconds Maximum allowed rate of pressure rise Refer to Figure 7 Figure 7 Max allowed rate of pressure rise during venting pressure against time pump initially at full speed Pa mbar 2 10 1 2x 103 1x105 1 103 8x104 8 102 04 6x102 Inlet Pressure e X 4x104 4x102 2x104 2x102 3 0 50 100 150 200 250 300 350 8 Time s is Page 22 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited EDWARDS ET 2 4 Purge gas specification Table 8 Purge gas specification Purge gas specification Reference data Purge gas Dry air nitrogen argon or o
42. 50 of full rotational speed and will prevent the pump from venting at full speed It also ensures that the serial link and signals on the parallel interface remain active until the pump speed falls below 50 1 4 Operational features In addition to the basic start and stop commands the nEXT pumps have several other features which allow you to tailor the pump operation to your particular application Refer to Table 10 for factory default settings of the parameters discussed in the following Sections OEM supplied pumps may have drive parameters and default user selectable settings which differ from those stated in this instruction manual in order to suit certain process requirements Please contact the OEM in the first instance for further information and advice 1 4 1 Power limit setting You can select the maximum power that will be drawn by the pump refer to Section 4 1 1 The more power you supply the quicker the pump will accelerate to reach full speed Therefore if your application requires fast cycling you should set the power limit to the maximum value If ramp time is not important in your application you can use a lower power limit down to a minimum value refer to Table 1 Table 1 Power limits mm Standard default setting ibo Minimum value setting nEXT240 nEXT300 and nEXT400 160 W 200 W 50 W You must make sure that the power supply you use is capable of delivering sufficient power to the nEXT pump By choosi
43. B800 00 880 Issue Original Instruction Manual nEXT Turbomolecular Pumps nEXT240 nEXT300 and nEXT400 Description nEXT240D B812XXXXX nEXT240T B813XXXXX nEXT300D B822XXXXX nEXT300T B823XXXXX nEXT400D B832XXXXX nEXT400T B833XXXXX vacuum products mA 505 ae DON WARDS WWW EOWARDSVACUUM COM WARDS Declaration of Conformity Edwards Manor Royal Crawley West Sussex RH10 9LW UK declare under our sole responsibility as manufacturer and person within the EU authorised to assemble the technical file that the product s B812 XXXXX nEXT 240D B813 XXXXX nEXT 240T B822 XXXXX nEXT 300D B823 XXXXX nEXT 300T B832 XXXXX nEXT 400D B833 XXXXX nEXT 400T to which this declaration relates is in conformity with the following standard s or other normative document s EN ISO 12100 2 2003 Safety of Machinery Basic Concepts General Principles for A1 2009 Design Technical Principals EN1012 2 1996 A1 2009 Compressors and Vacuum Pumps Safety Requirements Vacuum Pumps EN61010 1 2001 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory Use EMC requirements General requirements C22 2 61010 1 04 2004 Safety requirements for electrical equipment for measurement Control and laboratory use Part 1 General requirements UL61010A 2002 Safety re
44. B800 00 880 Issue C 4 5 2 Start the pump To start the pump send the following command over the serial communications link command c 8 The reply you receive will be in the following format Reply EU E LE The pump will then accelerate to full operating speed The green indicator LED will illuminate when the pump reaches Normal speed This is 80 of full rotational speed by default but you may have selected a different value to suit your application 4 5 3 Standby speed To run the nEXT pump at standby speed send the following command over the serial communications link command c The reply you receive will be as follows Reply If the pump is currently below standby speed then it will accelerate until it reaches standby speed If it is running faster than standby speed it will decelerate until standby speed is reached To return the pump to full speed send the following command Command 1 The reply you receive will be as follows Reply ic 4 5 4 Stop pump To stop the nEXT pump send the following command over the serial communications link Command 5 ON The reply you receive will be in the following format Reply c On successful receipt of the stop command the pump rotor will decelerate to rest 4 5 5 Temperature readings You can monitor the temperatures of both the pump motor and the inter
45. Controller or TIC Turbo Controller Further information regarding this is detailed in Section 4 2 Note The standby speed may be adjusted using the button on the controller as described in Section 4 1 4 If you intend to operate the nEXT pump with parallel control and monitoring and you do not wish to reconfigure the controller settings straight to Section 4 3 4 1 Configuring the nEXT pump using serial commands Refer to Table 16 for a summary of the full set of serial commands parameter ranges and factory defaults for each setting The following sections describe the settings in more detail 4 1 1 Power limit setting Table 21 shows the power limit setting options for the nEXT pumps The pump is supplied to you with a default power limit as shown If this limit is not suitable for your application you can change it to any value between the maximum and minimum shown Table 21 Power limit setting Maximum value setting Minimum value setting Default power setting 700 ow Send the command as follows where the d characters represent the value in Watts that you are trying to set For example if you want to set the limit to 90 W type 90 command 5 The reply you receive will be in the following format EMEN ENG The power limit setting is now stored in memory within the nEXT pump To check what power limit is set you can send a query as follows command s lt Edwa
46. Inlet connection and OfTentatiol 31 3 3 4 MOUNEING IT 32 3 3 5 Backing eR 32 3 3 6 interstage connection variants only Rr Rn e UR E DOE E ADR S E MEE 33 3 4 P rge sas connectiol UA ER 33 3 4 1 Connect the p rge gas E pi oc Pe RIRRRI NOR INR P NR PER E NEA IER PIE 33 3 4 2 Recommended purge eas flOW SERRE ENS 33 3 5 Electrical installation VV SEO E CUR Y 33 3 5 1 INGFOGUCHION 33 3 5 2 Earth aro rd connectiols vise seco uon ep 34 3 5 3 Connect the logic interface to the 34 3 5 4 Connect the logic interface to your control equipment 34 3 5 5 Connect the electrical SUPPLY Re 34 3 6 Connection for parallel control and monitoring eene eene emen 36 3 7 Connection for serial control and monitoring hh ehh ethernet 36 Edwards Limited 2011 All rights reserved Page i Edwards and the Edwards logo are trademarks of Edwards Limited 3091007 S U91U0 5 B800 00 880 Issu
47. O Serial RX RS485 A is inactive and RS485 RS232 switch is in the RS232 position Corect to Pin2 to enable the serati Logic high when fail condition exists and serial enable is inactive and RS485 RS232 switch is in the RS232 position Analogue output Positive 0 10 V output proportional to measured output 15 NORMAL status output EH Logic low when pump rotational speed is at normal speed or above Edwards Limited 2011 rights reserved Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C WARDS Figure 8 Interface circuits for nEXT turbo pump controllers START INPUT SERIAL INPUT STANDBY amp RS232 RX INPUT SERIAL 5V STANDBY RS232 RS485 SWITCH IN RS232 POSITION RS485 INTERFACE Page 26 RS485 RS485 A 15K RS232 RS485 SWITCH IN RS485 POSITION ANALOG OUTPUT 10K 0 10V OUTPUT 5 mA MAX CURRENT OV_CTRL NORMAL OUTPUT 12V NORMAL OV_CTRL FAIL amp RS232 TX OUTPUT 12V RS232 TX amp FAIL RS232 RS485 SWITCH IN RS232 POSITION OV CTRL OV CTRL dcs 8831 009 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ep WARDS B800 00 880 Issue C 2 9 Controller connector socket The nEXT pump has a 3 way controller conne
48. Table 11 logic interface connector pins when you connect the electrical supply to your connector mating half Figure 11 Logic interface connections parallel control 1 2 3 4 5 6 7 8 9 dcs 8831 012 24 V d c electrical supply 6 nEXT pump logic interface Fuse 7 Start switch Optional LED indicator system OK 8 Optional standby switch Optional LED indicator normal speed 9 Optional voltmeter Current limit resistor for LED to monitor analogue output Note The pump controller may be supplied from voltages above 24 V as specified in Table 10 however the circuitry connected to the normal and fail lines must still respect the maximum external pull up voltage rating given in Table 10 Edwards Limited 2011 rights reserved Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited WARNING Do not exceed the maximum supply voltage Excessive supply voltage will cause permanent damage to the control electronics and may result in a mechanical hazard in some failure B800 00 880 Issue ED WARDS 3 6 Connection for parallel control and monitoring CAUTION you use the normal and fail lines to drive the coils of d c relays you must include a back EMF suppression diode in parallel with each relay coil to protect the nEXT pump 1 Connect your control equipment to the control input pins of your logic interface mating half Refer to T
49. a delayed start refer to Section 4 5 1 4 3 2 Pre start checks 1 Turn on the appropriate cooling device fan or cooling water supply Note f you have configured the controller to drive a fan the fan will automatically start when power is supplied to the nEXT pump 2 Start the backing pump 3 Switch on the power supply to the pump Check that the three LEDs on the controller light up for approximately 0 5 seconds and then extinguish If the LEDs do not light up as expected or if the red or yellow LED begins to flash a repeated sequence or if the red LED is lit refer to Section 5 5 Edwards Limited 2011 rights reserved Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue Ep WARDS 4 4 Operation with parallel control and monitoring 4 4 1 Start the pump Start the nEXT pump by linking the start stop control input to the 0 V control reference on the logic interface connector The pump will then accelerate to full operating speed The green indicator on the controller will illuminate when the pump reaches normal speed this is 80 of full rotational speed by default but you may have selected a different value to suit your application 4 4 2 Running at standby speed To run the nEXT pump at standby speed link the standby control input to the 0 V control reference on the logic interface connector If the pump is currently below standby speed then it will
50. a flag that is either active state 1 or not active state 0 To help decode the service status word each bit is numbered starting with 0 for the least significant to 31 for the most significant as shown in Section 5 5 3 The meaning of each bit in the service status word is given in Table 27 Table 27 Service flags E pem mmm 0 1 2 3 4 5 6 Oil cartridge service due Set when hours until oil cartridge service due 0 Bearing service due Set when hours until bearing service due 0 Pump service due Set when hours until pump service due 0 or cycles until pump service due 0 Controller service due Set when hours until controller service due 0 Reserved Reserved Reserved Edwards Limited 2011 rights reserved Page 71 Edwards and the Edwards logo are trademarks of Edwards Limited 4 B800 00 880 Issue ED WARDS Table 27 Service flags continued 7 Service due Service is due Specific operation required should be determined by checking the bits above 31 Reserved 5 5 3 Controller run time You can monitor the run hours and recommended service time of the controller on the nEXT pump by sending the following query Emme 7 You will receive the following reply where the first number is the hours run by the controller and the second is the number of hours until service is recommended Reply Ha I H C9 LE Note that the
51. able 11 which identifies the logic interface connector pins The control inputs are as follows e Start e Standby speed To activate either of these control inputs you must connect the control input pin to the 0 V control reference To start the pump connect pin 3 Start Stop to pin 2 0 V Reference To stop the pump break the connection between pin 3 and pin 2 To put the pump into standby connect both pin 4 Standby and pin 3 Start Stop to pin 2 0 V reference Notes 1 Serial enable is also a control input but is not required in a system operating purely under parallel control Make sure that there is no connection to serial enable pin 5 2 5485 5232 slide switch must be in the default RS232 position to use the standby fail parallel interface signals refer to Section 3 7 1 2 To monitor analogue output connect your control equipment to the pump analogue output pin 9 and to pin 2 of your logic interface mating half When you receive your pump the analogue output will be configured to monitor pump rotational speed If you wish to monitor any other parameter you must re configure your nEXT pump using commands over the Serial Interface Refer to Section 3 7 for further details 3 To monitor the normal status output connect your control equipment to the Normal status output pin 15 and to pin 2 of your logic interface mating half You can use the output to control other devices in your pumping system Th
52. accelerate until it reaches standby speed If it is running faster than standby speed it will decelerate until standby speed is reached To return the pump to full speed disconnect the standby control input from the 0 V control reference on the logic interface connector 4 4 3 Stop the pump Stop the nEXT pump by disconnecting the start stop control input from the 0 V control reference on the logic interface connector The pump rotor will decelerate to rest 4 4 4 Parallel monitoring It is possible to monitor the following parameters e Analogue output e Normal signal e Failsignal Refer to Section 3 6 for instructions on how to monitor these signals The analogue output is described in Table 10 4 5 Operation with serial control and monitoring 4 5 1 Delayed start If you are using a TAV solenoid valve controlled by the controller you may wish to close it before starting the nEXT pump This will allow the backing pump to reduce the pressure in your vacuum system To close the vent valve send the following command Command The reply you receive will be in the following format Reply Note This command overrides the current vent option and closes the vent valve There is no open vent valve command but when you send a stop command to the pump the override is cleared Page 58 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS
53. against damage that would be caused by debris entering the pump The nEXT pumps have a vent port for venting the pump and vacuum system to atmospheric pressure The pump is supplied with a manual vent valve fitted this can be replaced with a TAV5 or TAV6 solenoid operated vent valve available as accessories refer to Section 7 The TAV valve can be directly controlled by the on board controller The nEXT pumps have a purge port an inert purge gas can be introduced to protect the bearing and motor from corrosion An optional vent port adapter and purge restrictor can be fitted to the purge port to control the flow rate of the purge gas and to filter the gas supply Refer to Section 7 Air coolers and a water cooling block are available as optional accessories to cool the nEXT pumps Refer to Section 7 Page 2 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 1 3 Pump controller The pump controller contains the drive electronics that control the pump operation and the TAV vent valve There is a connector socket on the side of the controller where the TAV vent valve can be plugged in Refer to Section 2 9 The controller has three indicator LED s that signal the general status operation and service status of the pump that can also be used for fault finding if a problem should occur Refer to Section 2 10 The drive electronics system has a n
54. al connection instructions given in the Accessories Manual supplied with the TAV valve and refer to Figure 9 Plug the connector into the socket at the side of the controller refer to Figure 12 The controller is capable of controlling a number of different venting options these are defined in Table 19 Edwards Limited 2011 rights reserved Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue Ep WARDS Table 19 Vent options Option number Description of vent function Vent valve opens fully below 50 full rotational speed for either stop command or fail Note Thisis the factory default setting Controlled venting from 100 to 50 full rotational speed vent valve opens fully below 50 for either stop command or fail Vent valve fully opens immediately stop command is received vent valve opens fully below 50 full rotational speed if fail Vent valve fully opens immediately stop command is received controlled venting from 100 to 50 full rotational speed if fail then vent valve opens fully below 50 Vent valve fully opens immediately if fail vent valve opens fully below 50 full rotational speed if stop Vent valve fully opens immediately if Fail controlled venting from 100 to 50 full rotational speed if Stop command received then vent valve opens fully below 50 4 Vent valve fully opens immediately for either St
55. andby Speed een ev er va nea pev nsa peo Uer Yd CREE 58 Stop 58 rE E FEET 58 Operation with serial control and monitoring eei a e nera eI aae Rr Rao ese ceases 58 Delayed Start T n SR 58 Start the PUMP RR ea sas 59 Standby T 59 Stop the PUMP 59 readings 59 Link parameter readings S 60 Measured motor Speed 60 Mixed parallel serial Operation 60 Operation With oa becuse cane canes 62 Decelerating and Venting 62 Operation at extreme conditiors 63 Operation with 63 Operationiat high temperatllres o RR 63 Protection against over speed 1 2 oer er a isa oma en Pa eR a ERR 63 Electrical supply failure rrr enirn rx nep 64
56. cked if the cooling water contains too much calcium carbonate or if it contains particles that are too large Corrosion of the water cooling circuit may occur if there is too little calcium carbonate and oxygen in the water Good quality drinking water is usually suitable If in doubt check the quality of your cooling water supply and if necessary provide treatment and filtration Connect the cooling water supply to the water cooler on the pump as described below Either of the two push fit connectors on the water cooler can be used for the water supply or return connections Edwards Limited 2011 All rights reserved Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS Push nylon hose approximately 10 mm outer diameter into the ends of the hose connectors on the water cooler on the pump Alternatively remove the hose connectors from the water cooler and make direct connections to the 1 8 inch BSP female threaded fittings on the water cooler If you want to remove the pump for maintenance and you do not want to break the cooling water circuit unscrew the two M4 fixing screws and remove the water cooler from the pump CAUTION Condensation may occur if a water cooling block is used in high humidity environments Protect the pump and other equipment by considered design of the installation refer to Figure 16 for recommendations Figure 18
57. corporate this link into your serial communications cable so that the serial enable is only activated when the serial cable is connected When you subsequently remove the cable serial enable will become inactive Serial Enable acts as an interlock for start commands sent over the Serial Interface If the pump is running in serial control mode having been sent a Serial Start command and the Serial Enable subsequently becomes inactive the pump will trigger a fail condition and will decelerate to rest To clear this fail condition you must re activate the serial enable and send a serial stop command 3 7 3 Serial protocol The serial interface link is set to 9600 Baud 8 bits 1 stop no parity with no handshaking The commands are made up from printable ASCII characters The maximum message size you can send is 80 characters including start and end characters Note All alphabetical characters must be sent in upper case format Response may contain lower case characters Every complete command message you send will receive a response either a status code or a data return The nEXT pump can only deal with one message at a time It will only accept a new message once the response to the previous message has been returned If the nEXT pump receives characters that are not framed inside start and stop characters it will ignore them Messages with the stop character missing will be discarded with no response when a new start character is received
58. ction 5 5 9 for advice on decoding the system status word 4 6 Mixed parallel and serial operation In mixed parallel and serial operation the pump may receive commands from both serial and parallel interfaces To understand how these commands control the pump refer to Figure 19 The pump will power up with None in Control From this state a parallel start signal or a serial Start command may be received resulting in the pump moving to parallel control mode or serial control mode respectively Serial start commands will only be received if the serial enable line is active The state of the serial enable line may be switched between active and inactive whilst in mixed parallel and serial operation The primary function of the serial enable line is to enable the serial link It has no direct effect on the control mode The pump will receive and respond to serial commands whenever the serial enable line is active and conversely will not receive or respond to serial commands when the serial enable line is inactive Availability of the parallel standby and fail signals depends on the state of the serial enable line and the position of the RS485 RS232 switch as described in Table 23 Page 60 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C Table 23 Serial enable matrix Standby and fail lines are used for RS232 data Standby and fail lines are used f
59. ctor socket in the side of the controller When you receive the pump this connector will be concealed by a black protective cover If you intend to use the connector this cover should be removed by levering with a small screwdriver The mating plug for this connector is supplied with the pump The connector is intended to drive a vent valve or fan connected to the three pins The connector mating plug is shown in Figure 9 with the polarity of the pins marked when the vent valve fan is energised The 24 Vdc output on the controller connector is protected against overload or short circuit to 0 Vdc 24 Vdc Rtn chassis The output is guaranteed to supply the current given in Table 12 but for higher currents the output voltage will be reduced and may turn off completely to limit current Table 12 Controller technical data Description Connector plug Phoenix part number FK MC1881338 Voltage output 24 V d c 25 10 18 V dc to 26 4 Vdc Current output 500 mA Figure 9 Controller connector showing pin numbers dcs 8831 010 24 Vdc Out Chassis 24 Vdc Rtn Edwards Limited 2011 rights reserved Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C ED WARDS 2 10 Indicator LED s The nEXT pump has three indicator LED s shown in Figure 12 Table 13 Indicator LED s Normal LED This green LED remains on all the time that the pump rotational s
60. decimal decimal decimal decimal decimal string address minutes Watts C C 0 1 Volts 0 1 Amps 0 1 Watts Multi drop address 0 disable multi drop address 99 wildcard Pump type DSP software version number D396496XXX for nEXT Full speed RPS 1000 for nEXT Stop the pump Start the pump Measured motor speed System status word Hard vent only when lt 50 speed Controlled vent if gt 50 speed or hard vent if lt 50 speed Hard vent if stop or hard vent if fail and lt 50 speed Hard vent if stop or controlled vent if fail and gt 50 speed or hard vent if fail and lt 50 speed Hard vent if fail or hard vent if stop and lt 50 speed Hard vent if fail or controlled vent if stop and gt 50 speed or hard vent if stop and lt 50 speed Hard vent if stop or fail Same as option 6 Vent Permanently enabled Fan Timeout period for both initial ramp up and if speed drops below 50 Link power maximum Normal speed as a percentage of full speed Standby speed as a percentage of full speed Measured motor temperature Measured controller temperature Measured link voltage Measured link current Measured link power Reset all configuration options and parameters to the factory settings Boot loader software version number D374796XXX Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS 00
61. described in Section 3 4 Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir 5 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal WARNING In the unlikely event of a failure of the pump rotor use appropriate personal protective equipment when handling and disposing of the pump and ensure that all pump inlets and outlets are capped off before disposal Dispose of the nEXT pump and any components and accessories safely in accordance with all local and national safety and environmental requirements Particular care must be taken with any components that have been contaminated with dangerous process substances Take appropriate action to avoid inhalation of any particles that may be present in the pump Do not incinerate the pump The pump contains phenolic and fluorosilicone materials that can decompose to very dangerous substances when heated to high temperatures Edwards Limited 2011 rights reserved Page 77 Edwards and the Edwards logo are trademarks of Edwards Limited esodsip pue 928 036 B800 00 880 Issue C Ep WARDS This page has been intentionally left blank Page 78 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 7 Service spares and accessories 7
62. dwards Limited 2011 All rights reserved Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C Ep WARDS This page has been intentionally left blank Page 8 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 2 Technical data 2 1 General Table 2 General data General items Reference data Performance Refer to Table and 5 Figure 1 2 and 3 Dimensions Refer to Figure 4 4 and 6 Maximum inlet flange temperature nEXT240 75 C nEXT300 80 C nEXT400 70 C Maximum permitted external magnetic field 5 mT Radial Pollution degree EN61010 Pollution degree 2 Equipment type Fixed equipment for indoor use only Enclosure protection installed 40 Reduce gas load when operating in magnetic field 2 2 Pumping media WARNING Vent dangerous gases and gas mixtures safely do not expose people to these gases If pumping hazardous gases or vapours observe the safety recommendations of the supplier of the gas vapour WARNING Do not use the nEXT pump to pump pyrophoric or explosive gas mixtures as it is not suitable for this purpose The pump and its connections are not designed to contain an explosion WARNING In the interstage and booster versions of the nEXT pumps gas pumped through the interstage port will mix with gas pumped through the pump inlet Ensure that
63. e C eo WARDS 3 7 1 3 7 2 3 7 3 3 7 4 3 7 5 3 7 6 3 8 3 9 3 9 1 3 9 2 3 9 3 3 9 4 3 10 3 10 1 3 10 2 3 10 3 4 1 4 1 4 1 4 1 4 1 4 1 4 1 4 1 4 1 4 1 4 2 4 3 4 3 1 4 3 2 4 4 4 4 1 4 4 2 4 4 3 4 4 4 4 5 4 5 1 4 5 2 4 5 3 4 5 4 4 5 5 4 5 6 4 5 7 4 6 4 7 4 8 4 9 4 9 1 4 9 2 4 9 3 4 9 4 4 10 5 1 5 2 5 3 Page ii Connect the serial interface to your control equipment 36 Serial PR BBEUUUIUEEIUME 39 Serial Protocol MCCC 39 Message SCEUCEUEO cts bau e IN Ru EU NIRE WEN YN VE dead Vive FR I x Rise 41 COMMANA SEU M aE 42 M lti drop operatiOl 46 Connection for mixed parallel and serial operation 46 Vent valve selection connection and control eee senses 46 Manual vent yalve nn 47 TAV6 solenoid vent yaly dissesse rero rannira SEIS 47 Vent valve P coristi s ennn asis n E KESSE ENSE ESE EEES aS 47 Alternative valve connected to the vacuum system 48 ool 49 Introduction rr 49 Forced AIF Te E c RUD Er
64. e cable nEXT Interface Cable B800 00 808 7 4 11 TIC PC Program The TIC PC program is a piece of PC based software that can be used fore retrieving and setting the user configurable parameters in the pump It also enables monitoring and data logging of the pumping system Edwards Limited 2011 rights reserved Page 83 Edwards and the Edwards logo are trademarks of Edwards Limited pue saJeds IIMS 59110559226 B800 00 880 Issue Page 84 WARDS Figure 20 nEXT exploded accessories view dcs 8831 020 1 BX 250 bake out band DN100CF envelope shown 2 BX250 bake out band position 3 WCX water cooling accessory Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS Figure 21 nEXT exploded accessories view DN1ONW adaptor VRX vent restrictor Manual vent valve fitted TAV solenoid vent valve Purge plug fitted Edwards Limited 2011 rights reserved COON PRX restrictor DN10NW adaptor ACX nEXT air cooler radial ACX nEXT air cooler axial Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C dcs 8831 019 Page 85 pue saJeds 9514 95 59110559228 B800 00 880 Issue C Ep WARDS This page has been intentionally left blank Page 86 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trade
65. e nEXT pump With this feature you can close the vent valve before you start the nEXT pump This allows the backing pump to reduce the pressure in the vacuum system before starting the nEXT pump If you do not wish to use the controller to control a TAV vent valve you could use it to run a fan instead You can configure the controller so that the fan is permanently enabled 1 4 6 Normal speed setting The normal speed is a user selectable parameter that can be set anywhere from 50 to 100 of full rotational speed When the pump reaches normal speed a signal is available on the Normal pin of the logic interface connector You can use this signal to control your application since it shows that pump speed and therefore vacuum performance has reached a specific minimum level The default setting is 80 of full rotational speed Refer to Section 4 1 5 for instructions on altering the normal speed setting 1 5 Logic interface The pump controller can only be operated through the logic interface The signals on the logic interface are of three types e Control inputs these are switch type signals that are used to control the pump e Status outputs these outputs identify the status of the system Analogue output this provides a 0 10 V output for a number of pump parameters The logic interface has been designed to support both serial and parallel control and monitoring operating through one connector For serial control either RS232 default
66. e output can drive a low power relay of up to 24 V coil rating up to 20 mA 4 To monitor the fail status output connect your control equipment to the fail output pin 7 and to pin 2 of your logic interface mating half You can use the output to control other devices in your pumping system The output can drive a low power relay of up to 24 V coil rating 3 7 Connection for serial control and monitoring The serial interface allows you to control the nEXT pump and to interrogate its operational status using a number of serial commands There is a multi drop mode that allows you to connect more than one nEXT pump to a single serial port on your control system 3 7 1 Connect the serial interface to your control equipment The serial interface is available RS485 RS232 options which can be selected using the slide switch located above the controller connector shown in Figure 12 To adjust the slide switch simply remove the plastic connector cover on the controller and toggle the slide switch using a small tool Sliding the switch to the right will enable RS232 serial interface and to the left will enable RS485 serial interface The controller default setting is 5232 serial interface Page 36 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C Figure 12 Controller status information mmn Wi SCLC
67. e reinforced epoxy resin fire retardant polypropylene polyamide PVC Titanium Silicon Torlon and Ceramic Edwards Limited 2011 rights reserved Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C 2 7 Electrical data nEXT pumps can be driven either by your own system or by the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller If you wish to use your own system the size of the power supply required depends on your application The power limit setting determines how quickly you can ramp up the pump and dictates the size of power supply you will need If you have serial communications capability or have access to an Edwards TIC you can select the power limit setting of the nEXT pump Refer to Table 10 for the maximum power limit settings for pumps If your application requires rapid cycling of the pump you can achieve faster ramp times if you use a power supply that delivers higher current up to a maximum in accordance with Table 10 If you do not have the facility to adjust the power limit setting you must use a power supply capable of delivering enough current to meet the Edwards factory default power limit setting shown in Table 10 If you intend to drive the nEXT pump using an Edwards TIC be aware that there are several variants Contact Edwards to determine which is most suitable for y
68. es nU dE E Und 49 Water cooling 2 5 io pot ei Rete rc E AE EREE REEE I RD RR S I KR 49 Me 51 Configuring the nEXT pump using serial commands 51 Power limit setting dees canes I NK SANE PER 51 Powering a fan from the Controller hh ehh eren enne 52 Controlled ases ex Aes Ce ues Ur RES 52 Standby speed settini aS 53 Normal speed Setting ee PIX Rep DR RIP e 53 Timer setting and nep nene eer nenne xa vereor ese sn ay nau 54 Analogue signal options sss crever asesore rE ERE E ENE S 55 Factory Settings 55 Assienins amtlti drop addiess 55 Configuring the nEXT pump using a TIG 56 Before starting the PUMP eee enr reo ss 57 Close the vent valve n npe ih ehh 57 5 57 Operation with parallel control and monitoring 58 Ela ESE 58 Running at st
69. et screen is a coarse filter for debris and should not be used as a finger guard WARNING Position system viewports and vulnerable components away from the pump inlet to safeguard against damage from possible ejected parts in the unlikely event of a pump rotar failure There are two ways in which the nEXT pumps can be securely fixed The ideal fixing for a nEXT pump is via its inlet flange to a rigid firmly fixed vacuum system refer to Section 3 3 3 If this is not possible because of the nature of the vacuum system then the base of the pump must be fixed to a firm support refer to Section 3 3 4 for instructions on base mounting the pump 3 3 3 Inlet connection and orientation The pump can be securely fixed to the vacuum system via the inlet flange The pump can be mounted in any attitude from the vertical and upright through to horizontal 2 If the pump is mounted horizontally and you are using a rotary vane backing pump you should ensure a foreline trap is installed to prevent condensed oil in the backing line from entering the turbo pump If you are unable to fit a foreline trap you must mount the pump with the backing port pointing vertically downward 45 Make sure that the pump inlet and all components fitted to the pump inlet are clean and dust free If the pump inlet is not kept clean the pump down time may be increased Edwards Limited 2011 rights reserved Page 31 Edwards and the Edwards logo are trademarks
70. flow The recommended purge gas flow for typical applications is 25 sccm 0 42 mbar 5 1 42 Pa Ls 1 This flow will protect the pump when pumping oxygen in concentrations above 20 by volume The flow rate of the purge gas must be limited to the allowed range specified in Section 2 4 To limit the flow rate use a flow controller or a pressure regulator and calibrated flow restrictor The PRX10 purge restrictor accessory refer to Section 7 4 is suitable for this purpose 3 5 Electrical installation 3 5 1 Introduction WARNING You must make sure that the pump is electrically bonded to earth If you do not the system could become hazardous live in the event of a live conductor touching a metallic surface The electrical installation must be carried out by a suitably qualified person Always make the electrical connections to the nEXT pump after the pump has been installed on your vacuum system Always disconnect all electrical connections from the nEXT pump before removing it from the vacuum system Earth the pump using the connection provided and refer to Section 3 5 2 You can operate the nEXT pump using the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller refer to Section 3 5 3 You can also control the nEXT pump using your own system refer to Section 3 5 4 for information about control and to Section 3 5 5 for instructions on how to connect your electrical supply Edwards Limited 2011 rights reserved Pa
71. g that is either active state 1 not active state 0 To help decode the system status word each bit is numbered starting with O for the least significant to 31 for the most significant as shown below Table 30 contains a list of the lower 16 status flags that will be useful for fault finding The upper 16 status flags are reserved by Edwards Binary digits VVUVVVVVVVVVVVVVVVVVVVVVVVVVVVV VY 3 2 1 Bit numbers Table 30 Status flag AN DUO O EC O Fail Stopped speed Normal speed Vent valve closed Start Serial enable Standby Half full speed Parallel control mode Serial control mode Invalid Controller software Controller upload incomplete Timer expired Hardware trip Thermistor error Serial control mode interlock Fail status condition active Below stopped speed Above normal speed Vent valve energised Start command active Serial enable active Standby active Above 50 full rotational speed Exclusive control mode selection Exclusive control mode selection Controller internal software mismatch Controller failed internal configuration and calibration operation Failure to reach or maintain half full speed within the timer setting value Overspeed or Overcurrent trip activated Pump internal temperature measurement system disconnected or damaged Serial enable has become inactive following
72. g to the pump inlet flange size You cannot replace the inlet screen on a pump with an NW inlet flange Table 34 Inlet screens Flange Size DN100CF Coarse inlet screen B800 00 821 DN100CF Fine inlet screen B800 00 822 DN160CF Coarse inlet screen B800 00 823 DN160CF Fine inlet screen B800 00 824 7 3 2 Inlet strainer The interstage pumps are supplied with an inlet strainer for the interstage port The Item Number for a replacement inlet strainer is given below Table 35 Inlet strainers DN25ISO K B706 10 817 7 3 3 Inlet flange seals and integrated inlet screens nEXT pumps are supplied with an inlet seal The Item Numbers of replacement seals are given in Table 36 Table 36 Inlet flange seals and integrated inlet screens iet ange Sel Rem number DN100ISO K 150100 trapped O ring with integrated coarse inlet screen B810 00 808 DN100ISO K 150100 trapped O ring with integrated fine inlet screen B810 00 809 16050 150160 trapped O ring with integrated coarse inlet screen B800 00 825 DN160ISO K 150160 trapped O ring with integrated fine inlet screen B800 00 826 DN100ISO K 150100 trapped O ring 105 23 001 DN160ISO K 150160 trapped O ring C105 24 001 DN100CF 100CF copper compression gasket pack of 5 C082 00 003 DN160CF 160CF copper compression gasket pack of 5 C083 00 003 Page 80 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited EDWARDS T
73. ge 33 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 3 5 2 Earth ground connections We recommend that you fit a separate earth ground conductor to earth the nEXT pump Use an un insulated braid or a separate insulated green yellow conductor with a minimum 10 AWG 5 3 mm conductor to comply with US and Canadian installation codes and use the M5 x 10 screw and shake proof washer supplied fitted to the earth hole on the pump to secure the earth conductor to the pump The impedance between the pump body and the earth connection point must be 0 1 Ohm 3 5 3 Connect the logic interface to the TIC If you are using the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller to power and control your pump the nEXT pump logic interface cable connects directly into the back of the TIC Refer to the TIC Instruction Manual for further information The RS485 RS232 slide switch must be in the RS232 position if the TIC is to be used to control the nEXT pump Refer to Section 3 7 1 If the switch is in the RS485 position the TIC will connect to the pump in parallel mode indicating the pump type as nEXTp The serial connection will be disabled but start and stop will be possible 3 5 4 Connect the logic interface to your control equipment If you wish to operate the nEXT pump using your own control system use a suitable connector mating half
74. he bakeout bands are available in 110 120 V or 220 240 V versions Note The bakeout band is only for use with CF variants Table 40 BX bakeout band Bakeout Band BX250 110 V B580 52 041 BX250 240 V B580 52 061 BX300 110 V B800 00 814 BX300 240 V B800 00 816 BX450 110 V B580 52 043 BX450 240 V B580 52 063 7 4 5 TAV vent valve and vent port adaptor Two solenoid operated vent valves are available for system venting The valves are 24 V d c normally open and can be driven by the controller The solenoid valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and can be used with any suitable NW10 flanged port on your vacuum system TAV5 is suitable for smaller vacuum systems TAV6 has a higher conductance and is suitable for larger vacuum systems typically with volume greater than 10 litres Table 41 TAV vent valve and vent port adaptor TAV5 vent valve 0 5 mm B580 66 010 TAV6 vent valve 1 0 mm B580 66 020 7 4 6 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict flow of vent gas into the pump You can fit a VRX vent restrictor to the inlet of a TAV5 or TAV6 vent valve or to a PRX10 purge restrictor Refer to Table 20 for information on the selection of the correct VRX vent restrictor and to Table 42 for the item numbers of the vent restrictors available Table 42 Vent restrictors Vent restrictor Orifice diameter mm
75. he electrical supply to the pump with the exception of standby speed control It has no manual controls and can only be operated through the logic interface To operate the nEXT pump you must connect it to your own control equipment and power supply or alternatively use the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller The controller drives the brush less d c motor in the pump There are three main variants of the nEXT pump e The 5 or Simplex variant contains only turbomolecular blades e The D or Duplex variant contains turbomolecular blades and a drag mechanism allowing operation at higher backing pressures than pure turbomolecular pumps e The T or Triplex variant contains turbomolecular blades a drag mechanism and a regenerative mechanism The regenerative stage offers the option to utilise boost mode Also available is an iD or iT interstage variant which provides an interstage port between the turbomolecular blades and drag mechanism For SEM and TEM applications an L variant is available which offers considerably lower vibration and stray magnetic field emissions nEXT pumps are supplied with an inlet screen fitted into the centering O ring for ISO version pumps and into envelope for CF version pumps nEXT pumps with an NW25 interstage port are supplied with an inlet strainer that fits into the interstage port The inlet screen and inlet strainer protect the pump
76. his case you must fix the base of your pump to a firm support as described in Section 3 3 4 3 3 4 Base mounting The base of the nEXT pump can be fixed to a firm support using the tapped fixing holes Refer to Figure 4 4 and 6 for fixing hole details Note The four rubber feet must be removed from the four tapped fixing holes before the pump can be base mounted We advise the following requirements should be met to ensure the pump remains secure in the event of a total pump seizure Support must withstand a destructive torque of 6 KNm Fixing screws 4 off M8 to ISO898 1 strength class 12 9 nom tensile strength 1200 MPa Screw engagement length 6 mm minimum Fastening torque 15 Nm 1 53 kgf m This method of fixing must be used if your pump supports the weight of the vacuum system The weight of the vacuum system must be no more than 20 kg 3 3 5 Backing connection WARNING Ensure safe ducting of the backing line if oil mist or hazardous substances are present WARNING To avoid over pressurising the pump the exhaust line should not be restricted when venting from a positive pressure gas supply CAUTION Do not use the nEXT pumps with a backing pressure below 5 x 1074 mbar 5 x 10 2 Pa Lower backing pressures will increase the evaporation rate of the lubricating oil and so may reduce the life of the bearings Page 32 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Ed
77. ial MADE pe movie 39 Serial interface mode 36 Serial DFOLOCOL ossa iren rU rSv ONE 39 aged 79 79 Simultaneous parallel and serial operation 46 60 SPANOS ees 80 Standby 59 Standby speed setting 53 Start th Dump rne nnn Ra eres 58 59 Start up eae 57 Stop the PUMP 58 59 Storage RES tee 77 Storage and disposal 77 T TAV vent valve and vent port adaptor 82 TAV5 or solenoid vent valve 47 Temperature readings 59 5 PUMPS isses cero nere 2 Timer setting and options 54 Typical installation 29 U Unpack and inspect 29 Useful service information 76 V Vent gas specification and vent control data 22 Vent options vent valve connection and control 46 Vent port adaptor 83 VRX vent restriCtOl 82 W Water cooling 49 WCX water cool r eso o nothin rune 81 Page 88 WARDS Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademar
78. ing s y h r 5 string carriage return character characters decimal ASCII character Note Fields showing multiple d characters are to indicate typical length AII data fields have a maximum of 5 decimal characters prefixed by a minus number for negative numbers hexadecimal ASCII character Returned error code refer to Table 16 space character may have several ASCII characters Edwards Limited 2011 rights reserved Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C ED WARDS Table 17 Command abbreviations Multi drop decimal ASCII character Note Fields showing multiple X characters are to indicate maximum length and not fixed length 5 Table 18 Error codes No error Invalid command for object ID Invalid Query Command Missing parameter Parameter out of range Invalid command in current state e g serial command to start stop when in parallel control mode Page 44 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ED WARDS B800 00 880 Issue C Figure 17 Logic interface connection mixed parallel and serial operation 1 RS232 interface on control equipment 7 Optional serial link selector 5 2 24V d c electrical supply 8 nEXT pump x 3 Fuse 9 Optional voltmeter 4 Optional LED i
79. ions and solvents to clean the pump observe all precautions specified by the manufacturer Avoid inhalation of any particulates that may be present in the pump Edwards Limited 2011 rights reserved Page 67 Edwards and the Edwards logo are trademarks of Edwards Limited 92UEUu9g urew B800 00 880 Issue C ED WARDS CAUTION Do not attempt to clean any parts of the pump other than external surfaces Do not disassemble the pump or remove the controller from the pump Use of solvents may damage internal pump components If the nEXT pump is contaminated inside it may not be possible to achieve the specified ultimate vacuum or pump down time may increase The pump should be returned to an Edwards Service Centre where the pump will be dismantled and cleaned You can use any organic solvent to clean the external surfaces of your pump We recommend that you use non CFC solvents such as isopropanol or ethanol Use a cleaning solution that is suitable for the contaminants on the pump surfaces For environmental reasons keep wastage of cleaning solutions and solvents to a minimum 5 5 Fault finding CAUTION Do not remove the controller from the pump as you may cause damage to the controller Refer to Table 25 for the possible causes of faults and the recommended actions to rectify faults Table 25 Fault finding Symptom The controller LEDs do not flash for the electrical supply failed Ensure that the electrical s
80. it i caeno take RI pa danse dassecneea hes teaadanssaneaccaacensss 83 Interface Cable avo le meer ovale vu Que ea 83 TIC PC PrOSFAlTi EE 83 n 87 For return of equipment complete the HS Forms at the end of this manual Illustrations Figure Page 1 240 performance CUVE en 14 2 performance epe 14 3 400 performance conse Pee ass ace a RR eI RA 15 4 NEXT 240 GIMENSIONS MIM NES mem 16 5 300 dimensions MM Rh pi ass ened 18 6 NEXT 400 GIMENSIONS MM eeved EP PUT bs ER EYE ETE KERES 20 7 Max allowed rate of pressure rise during venting pressure against time pump initially at full speed 22 8 Interface circuits for NEXT turbo pump controllers enne enne nennen 26 Edwards Limited 2011 rights reserved Page iii Edwards and the Edwards logo are trademarks of Edwards Limited 3093009 53493409 B800 00 880 Issue C eo WARDS 9 Controller connector showine pin numbers 27 10 Typical pumping system with a NEXT PUMP v 1 eicere he rta or aen sra lt y ee I Rate rr
81. king pump 6 x 1078 mbar 5 x 10 10 mbar 6 x 1078 mbar 5 x 10 10 mbar Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2 stage rotary vane backing pump Note Pumping speeds quoted are without an inlet screen Edwards Limited 2011 rights reserved Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C ED WARDS Table 5 nEXT 400 pumps technical data 150160 160 150160 160 Inlet pumping speed 400 Us 400 Us 400 Us 400 Us 390 Us 390 Us 390 Us 390 Us 325 Us 325 Us 325 Us 325 Us Inlet compression ratio Interstage pumping speed Peak booster Pumping speed nitrogen RV12 backing pump 26 mh 26 mn XDS10 backing pump 24 mh 24 mih 1 x 1078 mbar 1 x 10 10 mbar 1 x 108 mbar lt 2 x 10 10 mbar Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2 stage rotary vane backing pump Note Pumping speeds quoted are without an inlet screen Page 12 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited EDWARDS eet Table 6 nEXT pumps technical data _ at ultimate backing pressure L Natural convection 10 sccm 10 sccm 35 sccm 25 sccm 45 sccm 25 sccm 30 C Ambient
82. ks of Edwards Limited
83. kstreaming of oil from the backing pump If using the TAV5 vent valve the pump may only be hard vented when it is at full speed if the vacuum system has a volume of 5 litres or more If using the TAV6 vent valve the pump may only be hard vented when it is at full speed if the vacuum system has a volume of 10 litres or more If the volume of your vacuum system is less than 5 litres when using a TAV5 vent valve or if the volume of your vacuum system is less than 10 litres when using a TAV6 vent valve you can incorporate a suitable vent restrictor and vent the pump when it is at full speed or you must use the controlled venting option Table 20 gives an indication of the appropriate orifice size to be fitted to the vent valve for given vacuum system volumes in order that the rate of pressure rise remains within the limits shown in Figure 7 Note If you use a vent restrictor you may find that the time required to vent your vacuum system is unacceptably long You may be able to reduce the vent time if you use a vent valve without a vent restrictor and wait until the pump speed has fallen to 50 of full rotational speed before you open the vent valve 3 9 3 Vent valve control The TAV5 or TAV6 solenoid valve can be controlled by the controller electronics To use this function fit the electrical connector supplied with the pump to the lead of the TAV5 or TAV6 solenoid valve To ensure cable cores and screen are wired correctly follow the electric
84. l speed falls below 50 output signals during the power failure The pump will ramp to its designated speed as quickly as possible after the power has been restored Power is reinstated after pump Either parallel or serial control Regenerative power maintains all rotational speed falls below 50 but mode timer disabled output signals during the power before regenerative power ceases failure As the timer is disabled the controller will go into fail condition as soon as speed falls below 50 and will display flashing error code 0 When the power is reinstated the pump will not ramp up until the error is cleared To clear the error send a stop command either parallel or serial depending on the control mode Then send a start command to ramp the pump up to designated speed Either parallel or serial control Regenerative power maintains all mode timer enabled output signals during the power failure If power is reinstated before the timer period expires the pump will ramp up to its designated speed as quickly as possible If the timer period expires the controller will go into fail condition and will display flashing error code 3 As above when the power is reinstated the pump will not ramp up until the error is cleared To clear the error send a stop command either parallel or serial depending on the control mode Then send a start command to ramp the pump up to designated speed Power is rei
85. l the pump via the serial link whilst monitoring these signals in the parallel interface The serial link uses the same connector pins as the parallel signals standby and fail so these parallel control and monitoring signals are not available The serial enable signal MUST be linked to 0 V and the parallel start signal will be left unconnected 1 5 4 Parallel control with serial monitoring or serial configuration This method of control is best for users who normally wish to operate the pump in parallel control mode but occasionally want to adjust the configuration settings stored in the controller or to monitor operational status of the pump via the serial link The serial enable signal must be linked to 0 V for serial communications to take place Whilst operating under parallel control with the serial link active the parallel start control signal is available as described in Section 1 5 1 but the standby control line is not since it is used as a serial data line If the serial enable line is deactivated at any time whilst the RS485 RS232 slide switch 15 in the RS232 position the serial link should also be disconnected We suggest that you make a special cable for serial communications that includes a link between serial enable and 0 V This way serial enable is automatically activated when the cable is connected and then deactivated when the cable is removed 1 5 5 Controller configuration serial configuration All the configuration set
86. lean leaks and contamination the contamination Remove the pump from the system If inlet pressure is poor check the and test the ultimate pressure of the pump for contamination and refer to pump alone refer to Section 2 Section 5 Leak test the pump If the leak rate gt 1x107 mbar l 1x10 Pa 51 contact your supplier or Edwards The pump is very noisy or there is Is the pump rotational speed the If so change the natural frequency excessive vibration or both same as the resonant frequency of of the system or isolate the pump the attached system using flexible bellows Is the vibration being transmitted If so fit flexible bellows or a from the rotary backing pump vibration isolator in the backing line Is the noise irregular and getting If so a bearing is defective Contact progressively worse your supplier or Edwards Edwards Limited 2011 rights reserved Page 69 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue No serial comms Fail signal or standby signal not working WARDS Table 25 Fault finding continued 15 the pump making a constant high so the rotor is out of balance pitched noise Contact your supplier or Edwards Check that the electrical supply is on that the serial link is connected and that the serial enable line is active Check slide switch is in the correct Left for 5485 position for RS232
87. marks of Edwards Limited WARDS Index A Descr 81 COOLER 81 Alternative valve connected to the vacuum system 48 Analogue signal options 55 Assigning a multi drop address 55 B Backing connection 32 crc 64 Base mounting 22 cereo 32 Bearing maintenance 67 bakeout 82 Clean the external surfaces of the pump 67 Close the vent VALVE 2 57 Command Set isi sss sesee FER e rure SERERE E US 42 Configuring the DX pump using a TIC 56 Connect the electrical supply 34 Connect the logic interface to the TIC 34 Connect the logic interface to your control equipment 34 Connect the purge gas 33 Connect the serial interface to your control equipment 36 Connection to the vacuum system 30 Controlled Venting 47 Controlled venting options 52 COOLING Water 23 D Decelerating and venting 62 Decoding system status words 74
88. mer is disabled the pump will immediately shutdown and display a fail signal if the speed drops below 50 of full rotational speed Refer to Section 2 11 for pump operating ranges and Section 3 10 for advice on pump cooling 4 9 3 Protection against over speed Control software within the controller regulates the pump rotational speed and prevents the pump operating above its normal full rotational speed In the unlikely event of a failure of this control software the controller has a built in safety circuit that checks whether the pump is running at over speed If an over speed condition is detected the controller automatically shuts down power to the pump motor and slows it down to rest The controller will signal a fail condition if over speed has been detected If you suspect that your pump may be running at over speed you should switch it off and consult Edwards or your supplier Edwards Limited 2011 rights reserved Page 63 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 4 9 4 Electrical supply failure WARNING the power supply fails when the pump is running the impeller could continue to spin for approximately 30 minutes The control circuit may not give any indication that the impeller is still running WARNING If the parallel start control signal on the logic interface connector is set to start the pump may automatically
89. mited B800 00 880 Issue ED WARDS Note The address can be any decimal number from 1 to 98 The address number 0 is used to disable multi drop mode The address number 99 is reserved as a wild card and is used in the query set up detailed later The reply you receive will be as follows multi drop address is stored within the nEXT pump You can also send a query to the pump to find out whether it already has a multi drop address Send the following command s If you receive the reply shown below your pump has multi drop mode disabled Reply s AEN If your pump already has a multi drop address you will receive no reply and you must then communicate with your pump in multi drop message protocol Refer to Section 3 7 6 for more information about multi drop mode and multi drop message protocol Use the following query using wild card address 99 which means any node to find out the multi drop address of the nEXT pump Command NEN 5 The reply you receive will be as follows where dd denotes the multi drop address of the pump S NENNEN You can disable multi drop mode by assigning the pump an address 0 To do this send the following command where dd denotes the multi drop address of the pump and XX denotes the address of the node that is sending the command comma
90. multaneously For example if you start the pump by sending a start command over the serial interface you cannot then stop the pump by using the start stop switch on the parallel interface The pump will ignore the state of the start stop switch on the parallel interface To stop the pump you must send a serial stop command Only when the serial stop command has been received by the pump can any commands sent via the parallel interface be acted on Similarly if you start the pump by using the start switch on the parallel interface you cannot then stop the pump by sending a stop command over the serial interface The pump will ignore any start or stop commands received over the serial interface To stop the pump you must use the parallel stop switch Only when the pump has been stopped using the parallel interface switch will any start or stop commands be accepted via the serial interface 3 9 Vent valve selection connection and control CAUTION If the pump is vented when it is at full rotational speed and the rate of pressure rise is too high the pump could be damaged and its life may be reduced We therefore recommend that either the rate of pressure rise is limited refer to Figure 7 or that the vent valve is only opened after the nEXT pump speed has fallen to 50 of full rotational speed Page 46 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C
91. n uses dee veo e tnim E e tate no Ve P ASE 76 Storage disposal 77 77 Disposal eios esae e ree 77 Service spares and accessories 79 7 79 frc ES 79 Returning a PUMP VADE 79 Bearing and oil cartridge on site MAINTENANCE 79 5 ET 80 ISXANLEC SCLECN 80 E 80 Inlet flange seals and integrated inlet screens eher 80 ado t 81 ACGESSONES ge 81 MSCALLACION 81 ie eius cM M 81 WGX Water cooler sackman 81 82 vent valve and vent port adaptor ari ee ea I a esae Re Ro E a SR IRR De AD rre 82 VRX vent restrictor uuo eyes Peoria eeu tee xir n v eiie e veluti ee tens be eee eade ere one iHe 82 er 83 PRX perse e Ne EFC 83 G Clamp Adaptor K
92. nal electronics of the nEXT pump by sending the following query Command KAEA The reply you receive will be as follows where the first number is the motor temperature and the second number the internal controller temperature both measured in Edwards Limited 2011 rights reserved Page 59 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue Ep WARDS Reply lt 4 5 6 Link parameter readings You can monitor the internal voltage current and motor power of the nEXT pump by sending the following query Emme 2 lt You will receive the following reply where the first number refers to voltage measured in 0 1 Volts i e divide the number by 10 to get an answer in Volts the second number refers to current measured in 0 1 Amps and the third number refers to motor power measured in 0 1 Watts 4 5 7 Measured motor speed You can monitor the measured rotational speed of the motor inside the nEXT pump by sending the following query Emme 7 You will receive the following reply where the first returned number refers to motor rotational speed in revolutions per second Hz V lt gt Note The second return number is a 32 bit system status word set of 8 hexadecimal characters which is useful for fault finding Refer to Se
93. nd 5 AM NEN r The reply you receive will be as follows ev 3 NENNEN Once multi drop mode is disabled the pump will no longer respond to multi drop commands 4 2 Configuring the nEXT pump using a TIC The nEXT pump can be configured using the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller Refer to Section 3 5 3 It is possible to set the following parameters of the nEXT pump using the TIC e Power limit setting e Controlled venting options including running a fan from the Controller e Standby speed setting e Normal speed setting e Timer settings both enabling disabling the timer AND setting the timeout period e Electronic braking options Factory default settings Page 56 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C For information on how to perform these settings refer to the TIC Turbo and Instrument Controller or TIC Turbo Controller Instruction Manuals Note It isnot possible to configure the analogue output options using the TIC There is also no facility within the TIC to assign a multi drop address to the nEXT pump There is a further option of connecting the TIC to a PC and using the TIC PC program to configure the nEXT pump The TIC PC program allows you to configure all the settings shown in the list above as well as allowing configuration of the analogue output
94. ndicator system OK 10 Optional serial enable switch 5 Optional LED indicator normal speed 11 Optional standby switch 6 Current limit resistor for LED 12 Start switch Note The pump controller may be supplied from voltages above 24 V as specified in Table 10 however the circuitry connected to the normal and fail lines must still respect the maximum external pull up voltage rating given in Table 10 Edwards Limited 2011 rights reserved Page 45 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 3 7 6 Multi drop operation Using multi drop mode a single computer system can communicate with more than one nEXT pump Each nEXT pump must be assigned its own individual address before it can be fitted into a multi drop system The command to assign the multi drop address is sent in standard nEXT message format as detailed in Section 4 1 9 The message protocol in multi drop mode is marginally different to that described for serial messages in single pump systems The main differences in multi drop message protocol are detailed below e All multi drop commands queries or replies have the first character e All commands queries and replies contain a header containing the address of the node that the message is to followed by the address of the node that the message is from e There is a delimiter character colon which separates the two multi drop addresse
95. ng a lower power limit setting you could use a smaller power supply For more information refer to Section 2 7 Edwards Limited 2011 rights reserved Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS 1 4 2 Standby speed In standby mode the pump rotational speed is lower than the full rotational speed The default setting for standby speed is 70 of full speed Note that in order to run at standby speed the pump must also be in the start condition If your application does not require the pump to be running at maximum speed at all times you can use the standby speed feature rather than switching the pump off This feature can be used for vacuum system tuning or as a system power saving option The standby speed is a user selectable value refer to Section 4 1 4 1 4 3 Timer When the pump is started an internal timer is automatically started within the drive electronics The default timer setting is 8 minutes If the pump fails to reach 50 of full rotational speed within the timeout period the controller will signal a Fail and will decelerate the pump to rest This feature prevents the controller from driving the pump at maximum power for a long time The pump may fail to reach 50 speed if the gas load is too high for example if there is a leak in the system if the backing pump fails or if the pump is too hot The timeout pe
96. nse inside the pump refer to Section 3 10 3 If you wish to pump a gas not in the list above contact your supplier for advice If you do not contact your supplier you may invalidate the warranty on the pump The pump is not suitable for pumping aggressive or corrosive gases Table 3 nEXT 240 pumps technical data 150100 100 150100 100 Booster port DN25NW DN25NW DN25NW DN25NW Inlet pumping speed 240 Us 240 Us 240 Us 240 Us 230 Us 230 Us 230 Us 230 Us 165 Us 165 Us 165 Us 165 Us Inlet compression ratio Page 10 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited EDWARDS DUE Table 3 nEXT 240 pumps technical data continued Parameter nEXT240D nEXT240D nEXT240T nEXT240T 150100 100 150100 CF100 Interstage pumping sSpeed Peak booster pumping speed nitrogen RV12 backing pump 26 mih XDS10 backing pump 24 mh 6x 108 5x 1010 mbar 6x10 mbar 5x 1010 mbar Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2 stage rotary vane backing pump Note Pumping speeds quoted are without an inlet screen Table 4 nEXT 300 pumps technical data Inlet pumping speed 300 Us 300 l s 300 1 5 300 1 5 340 Us 340 Us 340 Us 340 Us 280 Us 280 1 5 280 1 5 280 1 5 Inlet compression ratio Peak booster Pumping speed nitrogen RV12 backing pump XDS10 bac
97. nstated after pump Either parallel or serial control mode Regenerative power ceases and fails rotational speed falls below 50 and to maintain output signals When the regenerative power ceases power is reinstated the pump with parallel control will automatically restart if the start control on the logic interface is set to start The pump with serial control will require a new start command to ramp the pump up to the designated speed Any fail signals that were triggered during the regenerative power period are lost when the power is reinstated Edwards Limited 2011 rights reserved Page 65 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue C Ep WARDS This page has been intentionally left blank Page 66 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 5 Maintenance WARNING When removing the pump ensure personal protective equipment is used to safeguard against damage from failed components and possible accumulation of hazardous material that may have been pumped Check that the pump is vented to atmosphere and at a safe temperature Be wary of possible spillages sharp edges and debris Removal of the pump inlet screen will always expose the risk of injury from sharp edges WARNING Allow the pump rotor to stop then disconnect the logic interface cable from
98. o as multi drop mode The RS485 option is recommended for multidrop mode With the RS232 option selected some additional hardware will be required to link several nEXT pump units to a single serial link master A concept drawing of one possible arrangement is shown in Figure 15 Conversely when the RS485 option is selected connecting several nEXT pumps to a single master becomes a simple wiring exercise as shown in Figure 16 Edwards Limited 2011 rights reserved Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ARAWN WARDS Figure 13 Logic interface connections RS232 serial control RS232RX RS232TX dcs 8831 014 1 RS232 interface on control equipment 3 Fuse 2 24 48 V d c electrical supply 4 nEXT pump logic interface Figure 14 Logic interface connections RS485 serial control dcs 8831 015 1 RS485 interface on control equipment 3 Fuse 2 24 48 V d c electrical supply 4 nEXT pump logic interface Page 38 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 3 7 2 Serial Enable To send a serial message you must first activate serial enable This is achieved by linking the serial enable input signal pin 5 to pin 2 of your logic interface mating half We recommend that you in
99. onnected directly to this type of unit which will provide the power necessary to drive the nEXT pump Instructions on the set up and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397 00 879 which is supplied with the TIC or TIC Turbo Controller 4 8 Decelerating and venting Immediately after applying the stop command whether by the parallel or serial interface or by the TIC switch off the backing pump Then the system may be vented in accordance with the advice given in Section 3 9 Page 62 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C CAUTION Do not open a manual vent valve until the pump rotational speed has fallen below 50 otherwise the rate of pressure rise may be too high which could damage the pump In an emergency only open the vent valve quickly to decelerate the pump rotor in the shortest possible time Note If you are using the controller to control TAV solenoid valve there is 2 second delay between either stop command being received or a fault condition being detected and the vent valve opening This delay allows time for gauges valves and other equipment to be switched off before venting occurs The green indicator LED on the controller will extinguish as rotational speed drops below normal speed At very low speeds you will see the yellow indicator LED flashing it will extingui
100. op command or Fail When you receive your pump the controller will be configured with the factory default vent option 0 as detailed in Table 19 You can configure your controller to one of the other venting options provided you can send commands via the serial interface or you have access to an Edwards TIC Turbo and Instrument Controller or Turbo Controller The controller only energises shuts the solenoid valve when it receives a start command Prior to that the valve will be in the open vent state If you have a large vacuum system you may wish to allow the backing pump to reduce the pressure in the system to an acceptable level before starting the nEXT pump In this case you can send a command via the serial interface to close the vent valve before you send a start command this is known as a delayed start If you are controlling your nEXT pump with an Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller you can drive your TAV solenoid valve from the TIC Refer to the TIC Instruction Manuals for more information 3 9 4 Alternative valve connected to the vacuum system If using another vent valve ensure that a suitable vent restrictor is fitted to your vacuum system to limit the rate of pressure rise Refer to Table 20 for information about vent restrictor sizes If you do not fit a suitable vent restrictor you must open the vent valve only after the speed of the pump has fallen to 50 of full rotational
101. or RS485 Right for RS232 communication Right for parallel control and monitoring Check baud rate and if operating in multidrop mode the node address matches those of the pump Check that the red light is not on If LED is on perform the checks flashing against the red alarm LED symptoms Check the serial enable line is Must be disconnected or driven high inactive for use of standby and fail lines Check slide switch is in the correct Left for RS485 position for the RS232 or RS485 Right for RS232 communication Right for parallel control and monitoring Yellow service LED is flashing a See flashing service codes in repeated sequence Section 5 5 1 The red alarm LED is on The red alarm LED is flashing Any other problems Page 70 Normal during the software upgrade during software upgrade then process complete the upgrade process At other times indicates a problem Otherwise cycle power and if this has been detected in the FLASH does not help then perform a memory software upgrade Note the position of the long flashes Look up the flashing error code in within the series of 6 flashes to work Section 5 5 8 and follow the advice out the error code given Contact your supplier or Edwards Contact your supplier or Edwards Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C 5 5 1 Flashing service codes Whenever
102. or example error flash code sLssLs signifies both error 2 controller failed internal configuration and calibration operation and error 5 pump internal measurement system disconnected or damaged 5 5 9 Decoding system status words If you are using the serial communications link you will be able to access further information that may be useful for fault finding When you send a query to monitor measured motor speed the pump also returns a system status word The send command is as follows Commana v e You will receive the following reply where the first returned number refers to motor rotational speed in revolutions per second Hz LZNEE A L1 na EH The system status word returned is made up of 8 hexadecimal digits To decode this word you must convert each digit into a 4 digit binary number Table 29 is provided as an aid Follow the example below s o jo Vy Vy Vy Vy Vy V v v 0 o 1 of1 o ojoo 1 1 o o ojo o o ojo o ojo o 1 Table 29 Hexadecimal conversion table o hb KM o 1 2 3 4 5 6 7 8 9 N Page 74 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C Table 29 Hexadecimal conversion table continued 1101 13 1110 14 1111 15 Each binary digit bit represents a fla
103. or parallel Standby control and fail indication Parallel standby control and fail indication are Serial communications are disabled disabled Standby and fail lines are used for RS485 data Standby and fail lines are RS485 high impedance state o N e N N a a Parallel standby control and fail indication are Serial communications are disabled disabled Pump target speed will switch between run speed and standby speed in response to any data driven onto the RS485 bus by other devices connected to the bus Activation of the parallel start line not recommended with the RS485 232 switch in RS485 position and serial enable Inactive Deactivation of the serial enable line is not recommended with the pump running following a start from the parallel start line when the RS485 232 switch is in the RS485 position In parallel control mode the pump will not accept serial stop commands but will accept all other serial commands When serial enable is active the pump will run at standby speed if it has been commanded to do so by a serial standby command When Serial Enable is inactive and the RS485 RS232 switch RS232 position the pump will run at standby speed when the parallel standby line is active In serial control mode the state of the parallel Start line will be ignored but the serial enable line provides an interlock function as shown in Figure 19 This
104. our application 2 8 Logic interface connector nEXT pumps have a 15 way logic interface connector on the end of the logic interface cable The logic interface connector can be plugged directly into the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller You must use a suitable connector mating half not supplied to connect the nEXT pump to your own equipment Refer to Table 10 for the connector mating half type to Table 11 for Logic Interface connector pins for the electrical connections and to Figure 8 for the connector interface circuit diagrams Table 10 Logic interface technical data Logic interface item Connector nEXT pumps electrical supply Allowable voltage range including any ripple Maximum voltage ripple Fuse rating Limit on power drawn from supply Factory default setting Maximum setting Minimum setting Accuracy of power regulation Start and serial enable control inputs Enabled control voltage low close Disabled control voltage high open Standby control input Enabled control voltage low close Disabled control voltage high open Page 24 15 way D type male 24 48 V d c 5 X 10 21 6 to 50 4 V d c 0 5 V m s 10 A for 24 Vdc supply 5 A to 10 A for 48 supply T IEC approved Time delay fuse UL CSA approved 160 W 200 W 50 W 10 0 to 0 8 V d c lout 0 55 mA nominal 4 to 26 4 V d c Internal pull up to 6 4 V nominal 0 to
105. p mode 46 N nEXT Turbomolecular Pumps 1 Normal speed setting 53 Operating and storage environment 28 Operation essen seo enia e nee 51 Operation at extreme conditions 63 Operation at high temperatures 63 Operation at over speed 63 Operation with high inlet pressure 63 Operation with parallel control and monitoring 58 Operation with serial control and monitoring 58 P Parallel interface mode 36 Parallel monitoring coiere tror rr te 58 Power limit setting eren iere 51 Powering fan from the podule 52 Pre start checks eo heh 57 PRX purge restrictor ecce eene 83 PUMPING MEA eire 9 Purge gas connection 33 Purge gas specification 23 R Recommended purge gas flow 33 Returning a pump for service 79 ato ror loi Rr 67 Running at standby speed 58 Page 87 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue S Scope and definitions 1 Ser
106. peed is above the normal speed setting irrespective of whether the pump is accelerating or decelerating Status LED This yellow LED flashes with a 50 duty cycle at the rotational frequency of the pump motor At high speeds it appears continuously on The LED switches off when the rotational speed is very low or stopped If a service is due this LED flashes in a sequence to indicate which service operation is required Refer to Section 5 5 Alarm LED This red LED flashes in a sequence to indicate an error code if a fail condition is preventing pump operation The error codes can be used for fault finding as described in Section 5 5 Note f an external electrical load is connected to the Normal output line the normal LED may illuminate 2 11 Operating and storage environment Table 14 Operating and storage environment Ambient operating temperature range 5 C to 40 Ambient operating humidity range 10 to 90 RH non condensing Maximum operating altitude 3000 m Ambient storage temperature range 30 C to 70 Page 28 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited 0 Ep WARDS B800 00 880 Issue C Installation WARNING The controller cable should not be used as a lifting device Do not attempt to lift or support the pump using the cable E 3 1 Unpack and inspect WARNING
107. pump fails whilst system runmng Is the pump running too hot Increase the cooling to your pump You may need to change from air cooling to water cooling refer to Section 2 for maximum inlet pressure and cooling requirements You may need to increase cooling water flow or decrease the water temperature or do both Check that external heat sources such as system bakeout heaters are not excessive Does the rotor rotate freely If not the pump bearings may be damaged Contact your supplier or Edwards Ultimate pressure cannot be reached Is the pressure limited by water Bake the system and pump vapour Are any of the vacuum gauges If so clean or replace them contaminated Is the pumping speed insufficient Increase the conductance or reduce due to poor conductance between the volume the pump and the gauge or too large a chamber Is the interstage inlet pressure If the interstage inlet pressure is too 0 5 mbar 50 Pa high inlet pressure at the turbomolecular inlet is increased ensure that the interstage inlet pressure is 0 5 mbar 50 Pa Is the backing pressure If so the backing pressure may be 10 mbar 1x103 Pa too high Check for backing pipeline leaks If the throughput is high you may need a larger backing pump Is the high vacuum area of the If so clean the high vacuum system system contaminated Check the rest of your system for If found repair the leaks and c
108. quirements for electrical equipment for measurement Control and laboratory use Part 1 General requirements and fulfils all the relevant provisions of 2006 42 EC Machinery Directive 2006 95 EC Low Voltage Directive 2004 108 EC Electromagnetic Compatibility EMC Directive 2002 95 Restriction of Certain Hazardous Substances RoHS Directive The material numbers cover a family of pumps where the following component features may vary according to the variant denotes combinations of variants of the geometry of pump inlet ports geometry position of exhaust port and the material and geometry of the pump casing The product s contain less than 0 1wt9ofor hexavalent chromium lead mercury and PBDE 0 01wt for cadmium in homogeneous materials subject to the exemptions allowed by the Directive This information relates only to products sold on or after the date of this certificate Edwards has taken all reasonable steps to confirm this statement which is based mainly on information from our suppliers Whilst the RoHS Directive does not legally apply to this vacuum equipment we recognize that component compliance is relevant to many of our customers Note This declaration covers all product serial numbers from the date this Declaration was signed onwards 2 C NS 9 December 2009 B D Brewster Technical Manager Date and Place Burgess Hill Products This product has been manufactured under a qualit
109. rds Limited 2011 rights reserved Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue ED WARDS The reply you receive will be in the following format Reply 4 1 2 Powering a fan from the Controller You can power a fan from the nEXT controller provided that you are not already using the controller to control a vent valve To enable the fan send the following command Command The reply you receive will be in the following format Reply 15 i The permanently enabled fan setting is now stored in memory within the nEXT pump When you receive the pump it will be set up to run a vent valve You can send a query to find out what the setting is as follows Command The reply you receive will be in the following format Reply cr If the character 4 is 8 then the fan is enabled If it is anything else you will need to configure the controller to run the fan 4 1 3 Controlled venting options If you are using the controller to automatically control a vent valve there are a number of varied venting options you can choose from refer to Table 19 To set a vent option send the following command where the character d refers to the option number shown in Table 19 Command S The reply you receive will be in the following format Reply s gt The venting option is now sto
110. red in memory within the nEXT pump To check what venting option is set you can send a query as follows Command The reply you receive will be in the following format Reply s Page 52 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 4 1 4 Standby speed setting The pump can be run at standby speed rather than full rotational speed The standby speed is a user configurable option and can be set to any value between 55 and 100 full rotational speed When you receive the pump it will be configured with a standby speed of 70 full rotational speed The standby speed setting can be changed using the STDBY and STDBY push buttons located on the controller shown in Figure 12 or by using a serial command If using the buttons each button press will adjust the speed by 10 Hz 1 To change the standby speed setting using serial command send the following command where the characters d represent the value as a percentage of full rotational speed command MINI The reply you receive will be in the following format 5 The standby speed is now stored in memory within the nEXT pump To check what standby speed is set you can send a query as follows commend The reply you receive will be as follows Reply 5 so
111. revent damage to the bearing lubricant If you heat your pump and your vacuum system you will speed up the degassing process so that the pump will reach ultimate vacuum in the shortest possible time If you heat the pump this will also prevent condensation of vapours inside the pump The Edwards BX bakeout band may be used to heat the pump refer to Section 7 4 Fit the appropriate band around the pump just below the CF inlet flange When baking the pump or the system make sure that the temperature of the inlet flange does not exceed the values specified in Table 2 When baking your vacuum system if the temperature of the system exceeds 200 you must put a radiation shield between the system and the pump This radiation shield will reduce the heat radiated onto the pump rotor Typically a bakeout of four hours is long enough to remove water condensation from the pump However the bakeout time will depend on the amount of condensation in the pump and the vacuum system and the ultimate pressure you want to achieve Page 64 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C Table 24 Behaviour of a pump when the power is re instated after an electrical supply failure Length of power failure Control mode Behaviour of pump Power is reinstated before pump Either parallel or serial control mode Regenerative power maintains all rotationa
112. riod is a user selectable feature refer to Section 4 1 6 so if your application requires the pump to ramp up slowly you can extend the timeout period The timer is permanently enabled for ramp up The timer has an additional function if the pump rotational speed drops below 50 full speed for any reason you may wish to allow the pump time to recover rather than trigger a fail condition The timer starts as soon as the speed drops to below 50 full speed If during the timeout period the pump recovers to above 50 full speed then the timer will be reset If the pump rotational speed fails to recover by the end of the timeout period the controller will trigger a fail condition and will decelerate the pump to rest When you receive the pump the timer function will be enabled however you can disable it if you wish to With the timer disabled the pump will fail and decelerate to rest as soon as pump rotational speed falls below 50 1 4 4 Analogue output The pump controller produces an analogue output that allows you to monitor four different system parameters e Measured pump rotational speed default condition e Measured motor power e Measured motor temperature e Measured controller temperature The analogue output signal ranges from 0 to 10 V and is directly proportional to the system parameter refer to Section 2 8 Connect the analogue output to a suitable meter or indicator to display the appropriate system parameter or connect to
113. rmation 3 10 2 Forced air cooling Air cooling accessories are available for nEXT pumps refer to Section 7 4 Fit the air cooler as described in the instruction manual supplied with it If you wish to use an alternative fan for air cooling ensure that the flow rate is above 100 mh 60 cfm The air cooler can be powered by your own external power supply the Edwards TIC Turbo and Instrument Controller the TIC Turbo Controller or by the nEXT Controller It cannot be powered by the controller if a TAV solenoid valve is already connected to the controller Follow the electrical connection instructions in the air cooler manual to wire the lead of the air cooler into the controller connector supplied with the pump refer to Figure 9 Plug the connector into the socket at the side of the controller refer to Figure 12 You can only configure your controller to drive an air cooler if you can send commands via the serial interface or you have access to an Edwards TIC Turbo and Instrument Controller or Turbo Controller 3 10 3 Water cooling CAUTION You must turn off the cooling water when you switch off the pump to prevent condensation inside the pump and controller A WCX water cooler accessory is available for the nEXT pumps refer to Section 7 4 Fit it as described in the instruction manual supplied with it The cooling water supply must comply with the specification given in Section 2 5 Pipes in the water cooling circuit may become blo
114. s Do not return your pump with the accessories fitted Remove all accessories and retain them for future use Ensure that a completed HS2 form is returned with the pump If you have configured your pump to suit your application make sure you make a record of the configuration before returning your pump All replacement pumps will be supplied with default factory settings The TIC nEXT PC monitor program available as an accessory allows you to automatically download and save your configuration 7 2 2 Bearing and oil cartridge on site maintenance The oil cartridge and bearing of the nEXT pump can be serviced on site by any service engineer trained by Edwards The following service tool kits and service parts are available Table 32 Service tool kits Oil cartridge tool kit B800 00 812 Bearing tool kit B800 00 805 Edwards Limited 2011 rights reserved Page 79 Edwards and the Edwards logo are trademarks of Edwards Limited pue saJeds 9514 95 59110559228 B800 00 880 Issue ED WARDS Table 33 Service kits Oil cartridge B800 00 811 Bearing and oil cartridge B800 00 810 Note Both the oil cartridge and bearing tool kits are required when changing a pump bearing 7 3 Spares 7 3 1 ISX inlet screen An inlet screen is fitted to your CF pump as supplied to prevent damage from the entry of debris into the pump The Item Numbers of replacement inlet screens are given below Select the inlet screen accordin
115. s in the header e The remainder of the message command query or reply follows the same protocol as already described for single pump systems e The wild card address 99 is very useful and means any node After a nEXT pump has been assigned a multi drop address it will ignore any messages in the format for single pumps An individual nEXT pump will remain silent and ignore all command messages unless the multi drop address matches its own address 3 8 Connection for mixed parallel and serial operation You can control the pump using parallel interface control inputs and at the same time monitor various pump parameters using the serial interface Alternatively you can control the pump using commands sent over the serial interface while at the same time monitor the normal signal and analogue output over the parallel interface Figure 17 shows a schematic diagram of a system that would allow you to do this This connection is a hybrid of the parallel and serial connection which are described in detail in Section 3 6 and 3 7 respectively Many of the options described in those sections are available in mixed parallel and serial operation but note that whilst serial enable is active to enable the serial link the parallel standby and fail signals are not available The multidrop connection shown in Section 3 7 can also be used with mixed parallel and serial operation You cannot control the pump using both the parallel and serial interfaces si
116. sh when the pump has stopped 4 9 Operation at extreme conditions 4 9 1 Operation with high inlet pressure If the nEXT pump inlet pressure rises the power supplied to the pump motor will increase to counteract the gas frictional load The pump rotational speed will remain constant until the peak power level is reached beyond this level the speed of the pump will start to reduce If the pump speed falls to below 5056 of full rotational speed the timer will start if it is enabled If the speed does not recover to above 50 speed before the timeout period expires the pump will shut down and display a fail signal If the timer is disabled the pump will immediately shutdown and display a fail signal if the speed drops below 50 of full rotational speed Refer to Section 2 7 for the maximum power delivered to the pump and to Table 6 for maximum allowable inlet pressure 4 9 2 Operation at high temperatures Temperature sensors within the pump mechanism and electronics are monitored by an internal system If the system detects that any internal temperatures are too high the power supplied to the pump motor is reduced the pump may not therefore be able to maintain full rotational speed if it is too hot If the pump speed falls to below 50 of full rotational speed the timer will start if it is enabled If the speed does not recover to above 50 speed before the timeout period expires the pump will shut down and display a fail signal If the ti
117. should have a current rating capable of blowing the fuse If you do not and a fault develops the nEXT pump may develop a hazardous surface temperature or present a fire hazard Page 34 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C conditions WARNING When connecting the nEXT pump to the power supply ensure that all 3 pins for the 24 48 V connection and all 3 pins for the 0 V connection on your connector mating half are connected to the power supply Refer to Figure 11 for a schematic diagram of the logic interface connections The electrical supply you provide for the pump must meet the requirements of BS EN 61010 1 22 2 1010 1 Ensure that hazardous voltages as defined in EN61010 cannot be present on the electrical interface to the nEXT pump The nEXT pump V is not referenced to earth ground Ensure that there is only one path between 0 V and earth Multiple connections between and earth must be avoided in order to avoid unexpected offset voltages on control and status signals and possible problems with serial communications If no other connection is present between 0 V and earth the connection should be made at the power supply Be aware that other electrical equipment connected to the system could introduce a connection between 0 V and earth for example a personal computer or measuring equipment Refer to
118. stated after an electrical supply failure 65 25 MNANE 68 26 FlASMING service codes ks rn EEEE E EEEE EIU MR 71 27 71 28 Flashing Errol CodeS 73 29 Hexadecimal conversion table ento se oett t tran eno e e ca 74 30 Stats flad resserre 75 31 Example decoding of system status words 76 32 SEVICE p 79 33 Service Kits e P 80 34 5 I E RELIER E 80 35 Iis jer 80 36 Inlet flange seals and integrated inlet screens 80 37 NW16 and NW25 se 81 38 Pie eus 81 39 WGX Water cooler FEDERER spew MERUEEERURDNNRURRUNM DE EFE ES 81 Page iv Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 40 RE 82 4 vent valve and vent port adaptor 2 2 2
119. stem power 2 Measured motor temperature 3 Measured controller temperature To configure the analogue output send the following command where the character d denotes the option number detailed in Table 22 Komma 5 The reply you receive will be as follows Reply s The analogue output signal setting is now stored in memory within the nEXT pump To check which analogue output signal setting is enabled you can send a query as follows command The reply you receive will be as follows Reply S 4 1 8 Factory settings You can re configure your nEXT pump back to its original factory settings with one serial command To reset the controller to factory settings send the following command Command ce The reply you receive will be as follows Reply s so The factory settings are restored the memory within the nEXT pump 4 1 9 Assigning a multi drop address When you receive your nEXT pump it will have multi drop mode disabled by default Each individual pump must be programmed with its own multi drop address via a point to point connection before introduction into a multi drop network Send the following command to assign a multi drop address where the d characters represent the address command s cr Edwards Limited 2011 rights reserved Page 55 Edwards and the Edwards logo are trademarks of Edwards Li
120. ther inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 um Maximum concentration of oil 0 1 parts per million Allowable purge gas flow when required 20 to 50 sccm 0 33 to 0 84 mbar L s 33 to 84 5 1 Recommended purge gas flow 25 sccm 0 42 mbar 1 s 42 1 Maximum allowable purge gas supply pressure 1 bar gauge 14 5 psig 2 x 10 Pa Table 9 Cooling water specification Cooling water specification Reference data Quality Mechanically clean and optically clear with no deposits or turbidity pH value 6 0 to 8 0 Maximum calcium carbonate concentration 75 parts per million Maximum chloride concentration 100 parts per million Minimum oxygen concentration 4 parts per million Minimum cooling water flow rate at 15 C 15 Uhr Water temperature 10 to 20 Maximum water pressure 5 bar gauge 73 5 psig 6 x 10 Pa Materials exposed to cooling water Nickel plated brass 2 5 Cooling water Refer to Table 9 for the cooling water specification corresponds to a typical high quality drinking water specification Check with your water supply authority if you are in doubt about the quality of your supply 2 6 Materials exposed to gases pumped The following materials and component types are exposed to the gases pumped Aluminium alloys stainless steels fluoroelastomer and nitrile O rings hydrocarbon lubricant rare earth magnets silicon nitride carbon fibr
121. tings stored within the controller are retained even when power to the nEXT pump is removed This means that it is possible to use a separate system to configure the controller before fitting the nEXT pump to your application This gives the benefit of tailoring the pump functionality to a customer application and allows the pump to be operated using a simple parallel interface system To configure the nEXT pump either use your own simple serial system or use the Edwards TIC Turbo Controller or Turbo Instrument Controller The TICs have a feature which allows storage of a nEXT pump s configuration The configuration can then be downloaded to another nEXT pump This is useful when configuring a number of nEXT pumps with the same settings before they are fitted to a system Page 6 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C Note The RS485 RS232 slide switch must be in the default RS232 position if the TIC is to be used to configure the nEXT pump Refer to Section 3 7 1 The TIC is supplied with a Windows based PC program which allows the nEXT pump to be configured from a single PC The program has a simple user interface which means that it is not necessary to use the ASCII message protocol described in Section 3 7 The TIC PC program has a facility to save multiple nEXT pump configurations which can then be downloaded into other nEXT pumps E
122. tion or a character for a query operation followed by e acommand which will be an upper case alphabetical character followed by e an object number comprising three decimal digits followed by e for some commands only a data field comprising a sequence of characters separated from the object number by a space followed by e aterminating carriage return The message protocol in multi drop mode is marginally different refer to Section 3 7 6 Edwards Limited 2011 rights reserved Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited B800 00 880 Issue 3 7 5 Command set WARDS Table 16 shows a summary of the full set of commands available for controlling and monitoring the nEXT pump Table 17 shows the abbreviations that are used to define commands in the following sections and Table 18 shows the error codes that might be returned Table 16 Summary of commands that can be sent to the nEXT pump Parameter Factory Data Pump type Pump control Vent options Timer setting Power limit setting Normal speed setting Standby speed setting Temperature readings Link parameter readings Factory settings PIC software version Page 42 0 1800 32 bits 50 200 50 100 55 100 0 100 0 100 0 500 0 300 0 15000 1 10 decimal string string string decimal decimal hex decimal decimal decimal decimal decimal
123. triction in that all these features would be at their factory default settings It is possible to manually adjust the standby speed if standby mode is selected However the controller could be configured separately before fitting the nEXT pump to the system This is covered in more detail in Section 1 5 5 1 5 2 Serial control and monitoring The serial communications link provides complete control and monitoring by using just three signal lines The serial data lines share the same connector pins as the parallel signals standby and fail The serial data lines can be configured to provide an RS485 compliant or RS232 compatible interface by setting the position of the slide switch refer to Section 3 7 The serial enable signal MUST be linked to 0 V for the system to accept commands from the serial link This is a safety feature and acts as an interlock For pure serial control the parallel start signal will be left unconnected The controller will still provide the normal and analogue signals on the logic interface connector even when operating under serial control The status of the normal signal and the value of the system parameter on the analogue output can also be obtained by interrogating the system status via the serial link For more information about the serial interface refer to Section 3 7 1 5 3 Serial control with parallel monitoring Since normal and analogue signals remain available even using serial control it is possible to contro
124. ts reserved Edwards and the Edwards logo are trademarks of Edwards Limited Ep WARDS B800 00 880 Issue C 3 3 1 Inlet screen supplied fitted on CF only WARNING Removal of the inlet screen will expose the risk of injury from sharp edges Do not remove the inlet screen unless you can be sure that there is no danger that debris can fall into the pump If the inlet screen is removed the pumping speed will increase by up to 10 for course and 20 for fine inlet screens Do not remove the inlet screen until you are ready to mount the pump onto your system since the screen protects the pump from contamination To remove the inlet screen from a pump with CF inlet flange use a bent wire hook or small screwdriver to carefully lever the inlet screen out from the inlet flange To replace an inlet screen locate it as centrally as possible over the CF inlet flange and then with your fingers spread evenly around the edge of the screen push it firmly downwards If they are not already in place the tangs must be snapped into the locating groove in the inlet flange using a suitable tool to press them into position For ISO flanged pumps Edwards supply a combined inlet screen trapped O ring 3 3 2 Mechanical fixing WARNING Do not operate the pump until it is securely fixed If the pump seizes the stored energy of the rotor can cause rapid movement of the pump which may cause further damage and injury to people WARNING The inl
125. umber of built in safety features to protect the nEXT pumps from damage in the event of sustained high pressure or temperature e The electronics constantly monitors the temperature inside the controller and the temperature of the motor within the pump If either part becomes too hot the controller reduces the power supplied to the pump motor and the pump speed will drop If the pump rotational speed falls below 5056 full speed the electronics may trip into a Fail condition depending on how you have configured the system Refer to Section 1 4 3 e the nEXT pumps inlet pressure increases the power supplied to the pump motor increases to counteract the gas frictional load However when the built in maximum power limit is reached the speed of the pump will start to drop If the pump rotational speed falls below 50 full speed the electronics may trip into Fail condition depending on how the system has been configured Refer to Section 1 4 3 e Inthe event of an electrical supply failure the controller uses the motor within the pump as a generator This means the nEXT pumps have their own regenerative supply and do not require a separate battery for emergency power back up The regenerated energy is used to maintain the electrical supply to the controller and any vent valve or fan attached to the controller connector until the pump speed falls to below 50 of full rotational speed this will ensure that the vent valve remains shut until below
126. upply is 0 5 seconds when system switched switched on and the fuses and on current limiting devices have not been tripped Is the pump impeller rotating LEDs may not flash if pump is rotating The pump does not rotate after a Check that the electricity supply is If there is a fail signal check parallel start command is supplied on and whether the fail output is whether the red alarm LED is active flashing If it is refer to Section 5 5 1 If power is supplied there is no fail signal and the rotor still does not rotate then there is a fault with the pump The pump does not rotate after a Check whether the pump returnsa there is no reply then perform the serial start command is sent reply to your start command checks given under serial comms otherwise perform the checks under the pump does not rotate after a parallel start command is supplied The pump does not respond in multi Check that the multi drop is enabled Make sure the pump has a multi drop drop mode address and that commands are sent using the multi drop protocol Page 68 Edwards Limited 2011 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited WARDS B800 00 880 Issue C Table 25 Fault finding continued Symptom The green Normal LED does not light 15 the inlet pressure too high If so reduce the pumping load or or the pump is not rotating at full check for a gross leak into the speed or the
127. wards Limited Ep WARDS B800 00 880 Issue C Use suitable vacuum tubing and connectors to connect the NW flange of the backing port to your backing pump If necessary use flexible pipe or bellows to reduce the transmission of vibration from the backing pump to the nEXT pump We recommend that you use an Edwards EM RV or XDS Scroll backing pump The recommended size of backing pump required is indicated in Table A larger or smaller backing pump may also be suitable depending upon the application it is intended for The nEXT pumps are suitable for use with diaphragm backing pumps although the effect of higher backing pressure on the pump s performance and cooling requirements should be noted Refer to Table 6 and Section 2 1 3 3 6 Interstage connection variants only Use suitable vacuum tube and connectors to connect the interstage port to your vacuum system or to the outlet flange of another turbo or compound turbomolecular pump if using an 4 nEXT pump to back another pump Leave the inlet strainer in the interstage port unless you are sure that debris cannot be drawn into the interstage port 3 4 Purge gas connection 3 4 1 Connect the purge gas To supply a purge gas to the pump remove the plug fitted in the purge port fit a vent port adaptor refer to Section 7 4 and connect the purge gas supply to the vent port adaptor The purge gas must comply with the specification given in Section 2 4 3 4 2 Recommended purge gas
128. y system registered to 1509001 P200 03 600 Issue C dcs 8831 12 10 Ep WARDS B800 00 880 Issue C Contents Section Page 1 c T 1 1 1 Scope and definitions i oer reete ranae 1 1 2 General descriptio X socero nune 2 1 3 P mp controller e U UU 5SS 3 1 4 Operational features enn SER 3 1 4 1 Power Umit Setti g 3 1 4 2 Standby speed EE E ETE E EARRA 4 1 4 3 TIMER O EARE OESTE NRI ME M Ex 4 1 4 4 OUTPUT E EEE EE R E E E EEE EET EES 4 1 4 5 Automatic vent OPTIONS NESEN ox vie EN EEEE Vae EN ENEE ey v x le eer eld 4 1 4 6 Normal speed Setting 5 1 5 IMESTIACE 5 1 5 1 Parallel controland monitoring parit o pear IRR ree nt tea cen ere ds Yas a esa a Eii 5 1 5 2 Serial Control and monitoring teh eine ESRO ETENEE ENES 6 1 5 3 Serial control with parallel monitoring ee erronee 6 1 5 4 Parallel control with serial monitoring or serial configuration

Edwards nEXT240D Turbo Turbomolecular Pump Manual

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