User Manual - Pascal Technologies, Inc
Contents
1. Mounting the head to Vacuum Nipple a vacuum chamber Customer Vacuum Chamber 3 Orient the barrel notch in the 12 o clock position 4 Bolt the analyzer head flange into place using the 6 14 28 x 1 1 2 screws and washers provided Tighten in a star pattern to ensure a good seal Mounting the Electronics Unit to the Head Power to the analyzer must be off Always remove 24 VDC power from the electronics before removing TCR the electronics from the sensor 1 Align the key on the LC D electronics unit to the notch on the collar end of the head 2 Push the electronics unit onto the head until firmly seated do not twist 3 Lock the electronics unit to the head using the tightening knobs on the side of the unit until it is securely hand tightened Never twist the electronics Always insert it straight in and pull it straight back CAUTION 4 Connect the electronics unit to the power supply Installation 3 3 Figure 3 2 Power input pinouts 3 4 DycorLC D Series Connecting the LC D to the AC Line Power Before connecting the 24 VDC power to the electronics ensure that the electronics are connected to the sensor Otherwise damage to the electronics is possible CAUTION The LC D requires 24 Volts DC 1 Volt and 3 2 Amps If you have your own 24 Volt DC power supply Figure 3 2 shows the pinouts for the LC D power input connection A braided shielded cable is recommended If you pu2. 3 2 DycorLC D Series If you are not familiar with high vacuum systems and procedures and with handling the analyzer head to prevent contamination refer to Chapter 6 of this manual for proper handling procedures before continuing CAUTION The LC D is shipped wrapped in a protective covering Check all parts to ensure that nothing has been damaged If you discover damage report it to the factory immediately 1 Install the sensor assembly into vacuum system 2 Attach the LC D electronics to the analyzer head 3 Connect the LC D electronics to 24 VDC power gy If the analyzer is a 230 Volt type the power cord plug must be changed to the proper type to match your country and or electrical NOTE code Connecting the Head to the Vacuum System The head is already assembled andconnected to the AMETEK vacuum system at the factory Instructions for mounting the head to NOTE an alternate vacuum system are provided below Mounting the head to a vacuum chamber 1 Using a new copper gasket fasten the stainless steel shipping nipple to the vacuum chamber with 6 4 28 x 1 screws or bolts and nuts 2 Using a new copper gasket install the head into the nipple so that the repeller clears the chamber walls Customer 2 3 4 CF Port Detector Flange Assembly 6 1 4 28 Open Source Screws N Assembly J Barrel Notch Up N Copper Gasket Copper Gasket not shown Figure 3 1 AMETEK Supplied
3. e o The check should be performed on the pins on the atmosphere side of the unit Figure 5 1 e The pins should be electrically isolated from each other and from ground e There should be approximately one ohm continuous circuit between the filament Pins 3 and 8 They should be isolated from ground Disassembling the Source e Remove the filament see instructions in this chapter e Loosen the set screws on the barrel connectors that hold the three leads com ing down from the source elements The repeller source and focus plate can NOTCH FOCUS CLENS NN F SOURCE 2 REPELLER LENS 2 ae MULTIPLIER 3 FILAMENT lt gt o 8 FILAMENT HEAD f Figure 5 1 Analyzer head gt Pi pinout view of flange 4 DC STS 7 DC atmosphere side 7 5 SPARE 6 EXIT LENS Repeller gz Tg TER ee cma fe i ai li m a i ie m to Th eg a i i gi T Pa Fj ik Barrel Figure 5 2 Connectors LC D source 1 10 Spacing Repeller T 1 10 Spacing EFTEREN i od 4 e mm Tp Detector Flange Assembly o Ceramic Collar Focus Plate 5 4 Dycor LC D Series now easily be removed Assembly and Installation of the Source Refer to Figures 5 1 and 5 2 l Install the focus element first so that its long wire engages the correct barrel connector at 1 Figure 5 1 The back surface of the focus plate should rest against the ceramic collar of the m
4. 3 Bolt the head flange in place using the 6 4 28 x 1 screws and washer pro vided Tighten in a star pattern to ensure a good seal 4 Install the appropriate inlet components to the analyzer head end of the vacuum chamber if they are not already installed These consist of a 74 thick VCR flange a blank flange a manual high conductance valve or electro pneumatic EP high conductance valve two copper gaskets and fastener hardware Inlet details can be found in the Chapter 5 Troubleshooting the LC D Things to Check First In many cases a system failure 1s not due to a problem with an electronic compo nent but rather to one of the following e Operation at too high pressure greater than 1 x 10 Torr e Improper setting of parameters on a source or calibrate button Detector Flange Open Source Assembly Assembly Mass Filter Barrel Notch alm KL Copper Gasket AMETEK Vacuum Manifold 6 1 4 28 Screws Figure 5 3 Mounting the head to an AMETEK vacuum chamber Maintenance amp Troubleshooting 5 7 5 8 DycorLC D Series Incorrect or improper cable connection Burned out filament Shorted out source parts usually resulting from an incorrect filament or source replacement Quick and Easy Solutions The first step in providing a solution to the problem is performing the following checks 1 Make sure the rod assembly is properly supported within the vacuum hous ing
5. compactly packaged in a steel frame To be used where an oil free pumping station is needed Sampling System 4 7 This page intentionally left blank 4 8 DycorLC D Series MAINTENANCE AND TROUBLESHOOTING This section includes information on e maintaining the analyzer head e changing the filament e disassembling the source e cleaning the source reassembling the source e cleaning the electron detector e troubleshooting the LC D The rest of the LC D system should require no routine maintenance during nor mal use Disconnect all power from the analyzer before starting these proce MARNINC dures Touching any part of the source or mass filter with your fingers will leave dirt and oil on the parts resulting in contamination of the head CAUTON Use clean plastic latex gloves when handling components Dymaxion Electronics and Sensor Before connecting the 24 VDC power to the electronics ensure that the electronics are connected to the sensor Otherwise damage to the CAUTION a electronics is possible Always remove 24 VDC power from the electronics before removing CAUTION the electronics from the sensor Maintenance amp Troubleshooting 5 1 Analyzer Head Maintenance Filaments 5 2 DycorLC D Series e The analyzer head requires periodic maintenance This maintenance can be performed by anyone familiar with vacuum system standard practices e The entire head can be disassembled with
6. of a head and electronics unit with different configurations and to automatically set a default configuration for the combined components However when mixing components with different configurations such as a multiplierelectronics unit and a Faraday cup head the default configuration is always the Faraday cup configu ration e Do not mix components that come from different Dycor models Maintenance amp Troubleshooting 5 11 This page left intentionally blank 9 12 DycorLC D Series BOARD REPLACEMENT The LC D electronics unit contains five boards Figure 6 1 that can be replaced in the field if damaged or found to be not working properly These boards can be replaced using only a 1 Phillips screwdriver and a 1 4 nut driver The boards are e Ethernet Master Board Located on the left behind the front panel on the front of the unit e Control Board Located behind the front heat sink and LED panel on the left side e Scan Board Located behind the front heat sink and LED panel on the right side e Amp Card Located behind the rear heat sink and under the Amp cover e RF Board Located behind the rear heat sink and separated from it by the conductor guide Master Board Control Card Small pattern kep nut Scan Card must be used LOY YI OE Figure 6 1 LC D board locations Service and Parts 6 1 Master Board 6 2 DycorLC D Series The Master
7. 2 3 YY NE YANE YEDE YE YE MRNA CHAPTER 4 SAMPLING SYSTEMS sampling e NE YY E Inlet Option Descriptions amm kani lm mc I EE sc pr arisen NE A ARNE neon TA OCIS EMEA A ME O AYA CHAPTER 5 CHAPTER 6 OLS Ce Oe ee eee YMY ete ere re 4 6 BL CONAUCION CE Ee onar ye E E li orga na 4 6 Ponpa oy O eeen soon osaada imimine edeli Mide alien meleinimekil edek elanin 4 7 High Vacuum Pumping Systems 4 7 Model VPS70 pumping SCI kaale kek inme gede anil ilik 4 7 Model VPS70D dry pumping SVSTCM vrczsscnssrasqasszancstansasanginaasnaaniea 4 7 MAINTENANCE AND TROUBLESHOOTING Analyzer Head Maite gine ce sesim asel inenen indiene in Nere ikeli ETE AAA EEE 5 2 PE e E Zara E E la E Mm ula ei a 5 2 Eguipmentreguiredtoreplaceaf lamenit 5 2 Removing tiheLC Delectronicsfromtihehead 5 3 EE 2 2g NANA YARN NANAY 5 3 Disassembling the OG A A AYA AY 5 5 AssembiyandlastallattonoftheSource 5 5 Teme GNSS OU e sas a al ll 5 5 WSS Et CL AN EMRE DAM EEE YANAN E PE EO AA R A PECE SAMSUNA 5 6 Eee POM DVL GE pek oem EA A A 5 6 Mounting the Head on the AMETEK Vacuum Chamber 5 7 FROM OICS MOOS He LC ep EEA EEN dale 5 8 ak va a a GG Cie he acorns PN NER A 5 8 Quick and Easy Solutions A ME A 5 8 LC D Communications anid LEDS A Tee tent rt err MP SANAYA 5 10 Filament Trip Overpressure and LENS esme onama Gesi 5 11 Caution Aga
8. 7 Insert the RF assembly into the unit casing and secure using the 6 1 4 screws for the top and bottom of the unit and the 2 3 16 screws for the sides 6 8 DycorLC D Series SPARE PARTS KITS AND ACCESSORIES Start Up This section includes spare parts for start up and normal operation as well as maintenance parts kits and some options Normal Operation Part 95381 VE GAS0001 GAS0002 95319VE Model Description M102 M042 Spare dual filament Standard 2 4 conflat gasket Turbopump gasket Capillary Kit 2 I meter sections of tubing 3 fer rules Normal Maintenance Part 95500TE Model DM1102 Description Ionizer Replacement Kit includes thoriated iridium filament source grid repeller grid and focus plates Service and Parts 6 9 LC D Manifold Kits Part 73804SE 73805SE 73806SE Part 90383 VE 90384VE 90385VE 90386VE 90387VE 90388VE 6 10 DycorLC D Series Model M250 M240 M240EP M260 M260EP M270 M270EP Spare Analyzer Heads Model DM 106 DM206 DM306 DM106M DM206M DM306M Description Manifold Kit No high conductance valve Manifold Kit Manual high conductance valve Manifold Kit Electropneumatic high conduc tance valve Aperture Bypass Inlet Manifold Includes valve bypass tee and aperture Aperture Bypass Inlet Manifold with Electro pneumatic Bypass Valve and aperture Capillary Bypas
9. EMC Directive Strict compliance to the EMC Directive requires that certain installation techniques and wiring practices are used to prevent or minimize erratic behavior of the Analyzer or its electronic neighbors Below are examples of the techniques and wiring practices to be followed In meeting the EMC requirements the various Analyzer configurations described in this manual rely heavily on the use of metallic shielded cables used to connect to the customer s equipment and power Foil and braid shielded I O and DC power cables are recommended for use in otherwise unprotected situ ations In addition hard conduit flexible conduit and armor around non shielded wiring also provides excellent control of radio frequency disturbances However use of these shielding techniques 1s effective only when the shielding element 1s connected to the equipment chassis earth ground at both ends of the cable run This may cause ground loop problems in some cases These should be treated on a case by case basis Disconnecting one shield ground may not provide sufficient protection depending on the electronic environment Connecting one shield ground via a 0 1 microfarad ceramic capacitor is a technique allow ing high frequency shield bonding while avoiding the AC ground metal connection In the case of shield ed cables the drain wire or braid connection must be kept short A two inch connection distance between the shield s end and the nearest grounded chassis
10. conductance inlet Figures 4 1 and 4 2 can be fitted to the sample chamber This inlet consists of a length of tubing installed between the sample chamber port and the mass spectrometer Connection of the high con ductance inlet makes it possible for the LC D to sample from the sample chamber without being directly fitted to the sample chamber When the pressure in the sampling chamber is greater than 10 Torr but be low atmospheric pressure the high conductance valve is closed tightly and the aperture inlet is opened The aperture inlet consists of a small aperture within a valve that connects the sampling system to the vacuum environment of the mass spectrometer The aperture inlet should be opened slowly to evacuate the bypass arm Once this volume has been evacuated the pressure in the test chamber the diameter of the aperture and the pumping speed determine the pressure of the LC D Aperture diameters and their corresponding sample chamber pressures are provided in Figure 4 3 Manual Aperture Bypass i Valve Inlet t High Conductance Aperture Valve Vent to Pump or Exhaust e To Process Electropneumatic Sweep Tee Valve inlet Solenoid Valve To Process ala Solenoid Valve f To Air Supply Figure 4 2 e a 70 PSIG High conductance Electroneumatic j S a inlet with High Conductance ilim electropneumatic Maliye Inlet valves Electropneumatic Aperture Byp
11. in an existing vacuum chamber A mass spectrometer consists of the following components e Sampling System e Mass Spectrometer Hardware e Data System Sampling System The Sampling System serves as a connection between the outside sample envi ronment and the vacuum environment that the mass spectrometer requires The Dycor LC D can be equipped with a variety of inlet systems All of these systems are configured to bring the required number of sample streams into the LC D at the specified pressure while maintaining the high vacuum necessary for proper mass spectrometry operation Mass Spectrometer Hardware Once the sample reaches the mass spectrometer hardware three processes take place e Jonization Separation e Detection lonization During ionization sample molecules are turned into ions which are then focused towards the quadrupole to be detected The process occurs in the ionizer which consists of a filament filament electron repeller source grid and focus plate See Figure 1 1 The filament produces electrons As current flows through the filament it is electrically heated to incandescence and emits free electrons Once the electrons are free they are accelerated towards the source grid by the potential differ ence between the filament and the source grid As a cloud of electrons accelerates towards the source grid the electrons collide with the sample and create ions Figure 1 1 Repeller Fil
12. insulator on the rear of the heat sink It is very important to remember to replace this screw and insulator ni when reassembling the unit after replacing the board The insula tor is coated with thermally conductive joint compound If it is not replaced the unit will not work 10 Separate the RF card from the conductor guide x It is very important to remember to retain the conductor guide as it is not part of the replacement board NOTE Service and Parts 6 7 Replacing the RF Card 1 Using the 1 4 nut driver loosely attach the conductor guide to the RF card using the 5 8 standoffs 2 Plug the analyzer head onto the loosely assembled guide conductor and RF card Tighten the standoffs using the 1 4 nut driver Failure to secure the assembly to the analyzer head at this point can result in failure of the unit through cracking of the feedthrough If the feedthrough is cracked a leak will develop CAUTION 3 Screw in the 1 2 screw in the upper right corner of the RF card to connect to the aluminum oxide insulator Failure to install this screw and aluminum oxide insulator will cause TER the unit not to operate AA 4 Using the 1 4 nut driver attach the Amp card shield to the RF card using the 3 8 standoffs 5 Attach the Amp Card to the amp card shield using the 4 1 4 screws 6 Attach the amp card cover to the Amp card using the 2 1 4 self tapping sheet metal screws
13. BY THIS WARRANTY This page intentionally left blank x DycorLC D Series OVERVIEW Dycor LC D Residual Gas Analyzer The Dycor LC D is a compact quadrupole mass spectrometer primarily used as a residual gas analyzer The LC D offers the most cost effective solution to process monitoring needs LC D Analyzer The standard configuration LC D residual gas analyzer consists of the following components Open ion source quadrupole mass spectrometer analyzer head in 100 200 or 300 AMU range and electronics unit Faraday cup detector or Faraday cup with microchannel plate electron multi plier System 200 LC D Software Integrated System 200 LC D Software that provides variety of operating modes including Analog and Bar Meter Annunciator Tabular Trend and Leak Detection auto tune capabilities Dynamic Data Exchange DDE automation for limited control by Windows applications customized displays and single or continuous scan with user defined interval Overview 1 1 Mass Spectrometer Theory 1 2 DycorLC D Series The mass spectrometer allows you to identify the masses of individual atoms and molecules that have been converted to ions from a given sample This technique is unique in that it provides a fingerprint identification for the structural and chemical properties of these molecules The quadrupole mass spectrometer is one of a specialized subset of mass spectrometers that measure background gases
14. Check for leaks in the vacuum system The system will not work properly emission current control if the vacuum system pressure is higher than 1 x 104 Torr Power is automatically shut off from the unit above 2 5 x 10 Torr if used with the AMETEK sensor mani fold Make sure all cables are connected properly to the electronics unit Make sure that the electronics unit is fully pushed onto the feedthrough contacts Reset the LC D by unplugging the power cable from the electronics unit and plugging it back in Check the continuity between the filament feedthroughs Although protected the filament will eventually wear out The best way to determine if this 1s the case 1s to check the filament continuity The check should be performed on the pins on the atmosphere side of the unit Figure 5 4 The pins should be electrically isolated from each other and from ground There should be approximately one ohm continuous circuit between the filament Pins 3 and 8 They should be isolated from ground Ifno continuity exists between Pins 3 and 8 remove the head from the vacuum system and replace the filament assembly If the problem persists after going through these steps you will have to localize the problem area These potential problem areas are LC D Communications and LEDs Filament Trip Overpressure and LEDs NOTCH 1 FOCUS LENS a 7 SOURCE 2 REPELLER LENS 2 ae MULTIPLIER LL ME sa e 8 rl EMEK oF HEA
15. D i Figure 5 4 gt Analyzer head gt pinout view of flange 4 DE tr 7 DC 45 atmosphere side x 2 SPARE G EXIT ENS LC D Communications and LEDs 1 Make sure the power supply cable between the LC D and the power supply is plugged in at both ends 2 Make sure the LC D to PC Ethernet communications cable is secure 3 Check the LEDs on the back of the electronics unit to make sure that all lights are green The second light should be blinking green Refer to LED section below for LED details 4 Ifthe problem persists call the factory or your local manufacturer s represen tative for assistance The LEDs are listed below in the order in which they appear top to bottom on the back of the electronics unit Maintenance amp Troubleshooting 5 9 CPU Indicates CPU and system status e OFF LC D power is off e RED CPU has stopped e FLASHING RED Battery backed RAM has been cleared Check battery e GREEN Normal operation Comm Shows the status of communications between the LC D and the PC It flashes green when receiving data from the PC It remains off when the LC D is inactive A red light indicates a communications error RF Shows the status of the RF circuit The LED is green if the RF amplifier is operating properly and turns red if you have an RF failure The LED is yel low during automatic RF tune a If you are having a problem in this area please contact your service T engineer Filame
16. Dycor LC D Residual Gas Analyzer 90548VE Rev F User Manual AMETEK Process Instruments 150 Freeport Road Pittsburgh PA 15238 Offices USA HEADOUARTERS AMETEK Process Instruments 150 Freeport Road Pittsburgh PA 15238 USA Phone 412 828 9040 Fax 412 826 0399 USA Delaware AMETEK Process Instruments 455 Corporate Boulevard Newark Delaware 19702 USA Phone 302 456 4400 Main 800 537 6044 Service 800 222 6789 Ordering Fax 302 456 4444 USA Texas AMETEK Process Instruments 4903 W Sam Houston Pkwy North Suite A 400 Houston Texas 77041 USA Phone 713 466 4900 Fax 713 849 1924 CANADA AMETEK Process Instruments 2876 Sunridge Way N E Calgary Alberta Canada TIY 7H9 Phone 403 235 8400 Fax 403 248 3550 2007 AMETEK GERMANY AMETEK GmbH Postfach 2165 D 40644 Meerbusch OR Rudolf Diesel Strasse 16 D 40670 Meerbusch Germany Phone 49 21 59 9136 0 Fax o 49 21 59 9136 39 SINGAPORE AMETEK Singapore PVT Ltd 10 Ang Mo Kio Street 65 05 12 Techpoint Singapore 569059 Republic of Singapore Phone 65 484 2388 Fax Oo 65 481 6588 FRANCE AMETEK SAS Rond Point de l pine des champs Buroplus Bat D 78990 Elancourt France Phone 33 1 30 68 89 20 Fax 33 13038 89 29 CHINA AMETEK Process Instruments Room 408 Metro Tower No 30 Tian Yao Qiao Road Shanghai 200030 Phone 8621 6426 8111 Fax 8621 6426 7818 This manual is a guide for the use of t
17. ament Source Grid Focus Plate Source Grid Repeller Focus Plate Zil ED e SO SD SD VS SE AS lt E yata Z EI Z K 5 Filament Z S ee lt gt o gt SKK SOP SA o acco I Top Alumina Collar gt SSK x gt xo gt soe SS a See E VS SE S ST GR GG A G ARAR YAR Mass Filter lonizer components Once the positive ions are formed they are extracted from the ion region and fo cused towards the quadrupole mass filter by a difference in potential This focus plate has an applied negative voltage that due to a difference in electrostatic po tential attracts the newly formed positive ions passing them into the quadrupole El lonization The energy of the bombarding electrons is much greater than the bonds that hold the molecule together When a single electron is removed a positive ion is cre ated this is referred to as a molecular ion When the bombarding electrons cause the molecular bonds to break fragment ions form This ionization process is known as electron impact ionization EI Operation of the mass spectrometer depends on maintaining low vacuum pres sures These pressures take into account not only the operational pressures of the mass spectrometer but also the pressures of the sampling system environments Separation Once the ions reach the quadrupole mass filter they are filtered according to th
18. aration and detection are software controlled All data acquisition parameters are also set using the soft ware LC D Configuration LC D The LC D Figure 1 3 is available in 100 200 or 300 AMU ranges using a Fara day cup or optional channel plate multiplier detector Overview 1 5 Communications The System 200 LC D software communicates directly to the PC using an Ethernet crossover CAT 5 cable plugged into an Ethernet port on the PC Communication can also be established through a network LAN using a standard Ethernet cable between the LC D and the network 3 cru comm Gir o Filament n o SS gt i ey er E ETHERNET RASERI i C l e 24 VDC 3 2A bh SS Soa eme a a4 iiaiai vini rY b Figure 1 3 LC D R in r 4 wae edd Senay d en l vd a M 3 T dil b a E An Ethernet card must be installed in your PC to establish communi cation between the LC D and the PC NOTE LEDs The LC D LEDs are located on the back of the electronics as shown in Figure 1 3 When first started the LC D cycles through the LEDs turning them green red and yellow This allows you to check that each LED is working properly When the unit is through cycling the top LED turns green For further help on LED error messages see Chapter 6 of this manual The LEDs that follow are listed in the order in which they appear top to bottom on the bac
19. ass Valve Inlet Inlets The LC D offers a wide variety of inlet options to suit many applications The sensor manifold can support up to three different inlets at one time reducing the amount of time spent breaking vacuum and changing fittings All inlets are physically interchangeable on the same sensor manifold so they can be upgraded or replaced without disturbing the rest of the system Figures 4 1 and 4 2 show two possible inlet configurations one has manual valves and the other all electro pneumatic valves for remote operation Sampling System 4 3 Aperture Size Pressure Ratio Max Sample Microns Chamber Pressur 6 0 x 10 600 1 0 x 10 100 2 5 x 109 29 10 20 50 100 200 6 0 x 10 6 1 0 x 10 1 2 5 x 107 ZO 6 0 x 10 6 0 x 10 900 1 0 x 10 1 0 x 10 1000 2 5 x 10 2 Xx 10 Figure 4 3 Pressure reduction ratios for aperture inlet diameters Mathematically aperture size and sample chamber pressure are clearly related through the equation below This relationship calculates the diameter of the aper ture needed to maintain a pressure of 10 Torr in the quadrupole region Aperture Size microns 50 sample chamber pressure gt 4 4 Dycor LC D Series Sampling at Atmosphere Atmospheric sampling is possible using a capillary tube inlet The gas inlet is a fused silica capillary The diameter and length of the capillary can be changed to accommodate specific applications but any adjustmen
20. ass filter Tighten the barrel connector set screw snugly but do not overtighten Install the source so that its plate is spaced about 0 1 above the focus plate with its long wire in the correct barrel connector at 10 Figure 5 1 Tighten the connection Install the repeller so that its plate is spaced about 0 1 above the source grid with its long wire in the correct barrel connector 2 Figure 5 1 Tighten the connection Install the filament as described earlier in this chapter Insert the head into the vacuum chamber and secure using the six bolts originally removed Tighten the bolts using a cross pattern to ensure proper tightening and a leak tight connection The maximum torque required is 110 in lb 9 ft lb Check for electrical isolation between the feedthrough pins Cleaning the Source Because of the delicate nature of the source s construction it is impractical to clean off any deposits that might be on the source These deposits will cause the source to lose sensitivity and so the source must be replaced when these deposits occur Mass Filter Deposits can form at the entrance to the mass filter rods when they are operated at high pressures or over a long period of time Deposits can sometimes be seen as discolorations on the metal In some Maintenance amp Troubleshooting 5 5 atmospheres the rods might be coated with an invisible layer that will keep the mass filter from operating properly Thi
21. board assembly into the unit making sure that the connectors for all three boards are secure Replace the board assembly by inserting it into the electronics box and secure the front panel in place using the 1 4 screws for the top and bottom of the unit and the 3 16 screws for the sides There are adhesive gap pads on the back side of the front heat sink NOTE and the LED panel to ensure that all fixtures are secure and in place Amp Card Removing the Amp Card The Amp Card is part of the RF assembly at the rear of the unit It is located under the Amp cover See Figure 6 3 To remove the Amp card follow these steps 1 There are eight screws holding the RF assembly in the unit casing Remove the 3 top 1 4 and 3 bottom 1 4 screws 2 Remove the 2 3 16 screws from each side 3 Grab hold of the rear heat sink and pull hard to remove the assembly from the casing 4 You now have the complete RF assembly in your hand Refer to Figure 6 3 5 Remove the Amp cover by removing the two 1 4 self tapping sheet metal Al Oxide Insulator Amp Card Shield Amp Cover conductor gg PA T Guide RGO A Amp Card Shield 7 Amp Card gt 4 N ei Amp Cover Front Heat Sink Figure 6 3 Amp card and RF board replacement screws The Amp card 1s underneath 6 Remove the Amp card by removing the 4 1 4 screws holding it to the Amp card shield Service and Parts 6 5 6 6 Dyco
22. board is found behind the front panel of the LC D electronics to the left of the heat sink see Figure 6 1 Removing the Ethernet Master Board To remove the Ethernet Master board follow these steps 1 You must remove the entire front panel to access the Ethernet Master board Remove the 3 1 4 screws from the top and bottom of the unit and the 3 16 screws from the left and right side of the unit see Figure 6 1 These screws hold the front panel in place 2 Pull out the front panel Attached are the Ethernet Master board the Control board and the Scan board Replacing the Ethernet Master Board 1 The Ethernet Master board is mounted to the front panel with a bracket Dis connect the bracket from the front panel by removing the screws that hold it 2 Next remove the Ethernet Master board from the bracket 3 Attach the Ethernet Master board replacement to the bracket and reattach the bracket to the inside of the front panel making sure that the connectors for all three boards are secure 4 Replace the board assembly by inserting it into the electronics box and secure the front panel in place using the 1 4 screws for the top and bottom of the unit and the 3 16 screws for the sides Control Board and Scan Board Removing the Control Board and the Scan Board The Control board and the Scan board are both located behind the front heat sink and the LED panel on the front panel To remove the Control board
23. each end of the heater jacket Figure 9 Figure 10 14 Plug the thermocouple wire and heater power cord into the ProLine electronics box Figure 10 15 The capillary tube heater will turn on when the ProLine is turned on It takes approximately 30 minutes to reach temperature Figure 11 Installation 3 11 This page intentionally left blank 3 12 Dycor LC D Series SAMPLING SYSTEMS There are a variety of ways to introduce gas samples to the mass spectrometer The sampling system serves as a bridge between the sample environment and the vacuum environment of 10 to 10 Torr required by the mass spectrometer If a sample is at the same operating pressure as the mass spectrometer the sample can be analyzed directly However when the sample environment pressure 1s greater than 10 Torr a pressure reduction sampling system is required This chapter includes information on Sampling under vacuum e nlets e Sampling at atmosphere e Inlet option descriptions e Pumping systems Sampling System 4 1 Sampling Under Vacuum Figure 4 1 High conductance inlet with manual valves 4 2 DycorLC D Series If the sample environment total pressure is less than 10 Torr the mass spectrom eter can be directly fitted into the sampling environment without an inlet with a differential pumping system If the sampling environment is greater than 10 Torr an inlet is required For these applications a high
24. eir mass to charge m z ratio Each ion has an identifiable mass The quadrupole Overview 1 3 Figure 1 2 Quadrupole mass filter 1 4 DycorLC D Series mass filter is constructed of four electrically conducting parallel cylindrical rods A constant direct current DC voltage and an alternating radio frequency RF voltage is applied along the length of the rods Through proper electronic tuning these voltages set the criteria for the ions that pass through the quadrupole As an ion enters the quadrupole mass filter the RF and DC fields cause it to undergo oscillations Depending upon the criteria set for motion through the quadrupole an ion passes through the quadrupole where it is neutralized on the walls of the vacuum housing Ions meeting the m z criteria have stable trajecto ries and emerge from the mass filter assembly Figure 1 2 Ions with other m z values have unstable trajectories and are neutralized as they strike the walls of the vacuum housing Ions that successfully pass through the quadrupole are again focused towards the detector using an exit aperture which has an applied negative voltage that attracts the positively charged ions Detection The simplest detection setup consists of a Faraday cup detector An electron mul tiplier is used for amplified sensitivity A Faraday cup detector is a closed structure except for an opening that allows the ions to enter As the positive ions exit the quadrupole mass fi
25. es a shielded Category 5 cross over Ethernet ca ble This cable connects to the Ethernet port on the PC If connecting to multiple LC Ds using a network LAN you will need a standard Ethernet cable for each of the analyzers to connect to the network Installation 3 5 LEDS 3 6 DycorLC D Series The LC D LEDs are located on the back of the electronics unit as shown in Figure 3 3 When first started the LC D cycles through the LEDs turning them green red and yellow This allows you to check that each LED is working prop erly When the unit is through cycling the top LED turns green and then the third LED RF turns green as well The LEDs are listed below in the order in which they appear top to bottom on the back of the electronics unit Figure 3 3 CPU Indicates CPU and system status e OFF LC D power 1s off e RED CPU has stopped e FLASHING RED Battery backed RAM has been cleared Check battery e GREEN Normal operation Comm Shows the status of communications between the LC D and the PC It flashes green when receiving data from the PC It remains off when the LC D is inactive A red light indicates a communications error RF Shows the status of the RF circuit The LED is green if the RF amplifier is oper ating properly and turns red if there is an RF failure The LED is yellow during automatic RF tune If you are having a problem in this area contact your service engi neer NOTE Filament Th
26. he Dycor LC D Residual Gas Analyzer Data herein has been verified and validated and is believed adequate for the intended use of this instrument If the instrument or procedures are used for purposes over and above the capabilities specified herein confirma tion of their validity and suitability should be obtained otherwise AMETEK does not guarantee results and assumes no obligation or liability This publication is not a license to operate under or a recommendation to infringe upon any process patents li DycorLC D Series Table of Contents CHAPTER 1 OVERVIEW YE Eye L L m e gam ni Mele mi b ayle Mass Spectrometer Ki e m EE MN EA RE POE DP YE POR PM Me Sampling YL a mi nr aaa Mass Spectrometer Hardware asarken elenir alara mavi isodesl a aaunik TOTO OV RE EN ANE EE E as oe taney esas daeese sees LLON ZO OW op MEY ME REP MR EE OYMA SPERM ME AR E MERE OW RA A ANNEM AM DD OTC O A PE YY SE EPEY YAR Y VE Ep BAR Data XL ll yin ER a a A MR A A NE EPMRMM CHAPTER 2 SPECIFICATIONS CHAPTER 3 INSTALLATION Ele emen e ill semra a a en mk elm alam lm Connecting the Head to the Vacuum SySten 2c0 0000se0esee0eceee00 MountingthekFlectronicsUnittotheHead Connecting the LC D to the AC Line POW Cinan ccrsacvscesivansesswocesiacans Communications e e EY EE On EEE MY Direct Ethernet Communications gmail dm dea LocalAreaNetwork LAN TIA CTCL 01 1
27. ients RF welding equipment static and walkie talkies yii EC Declaration of Conformity Manufacturer s Name AMETEK Inc Process Instruments ISO 9001 Registered 1995 Manufacturer s Address Process amp Analytical Instruments Division 150 Freeport Road Pittsburgh PA 15238 USA Phone 412 828 9040 Fax 412 826 0686 declares that the product Product Name Dycor LC D Residual Gas Analyzer Model Number s LCD100 100 AMU LCD100M 100 AMU Multiplier LCD200 200 AMU LCD200M 200 AMU Multiplier LCD300 300 AMU LCD300M 300 AMU Multiplier complies with the requirements of EMC Directive 2004 108 EC EN 61326 1 Radio Frequency Emissions EN50011 CISPR 11 Radiated and Conducted Class A Group 2 ISM Device EN61000 3 2 Harmonic Current EN61000 3 3 Voltage Fluctuation Flicker EN61326 1 EN50082 1 Immunity EN61000 4 2 Electrostatic Discharge 4kV 8kV contact air EN61000 4 3 ENV 50204 Radiated Radio Frequencies 3V m EN61000 4 4 Electrical Fast Transient Burst 5kV 1kV EN61000 4 5 Surge 1kV to Shields 1kV 2kV AC Differential Common EN61000 4 6 Conducted Radio Frequencies 3 V m EN61000 4 8 Magnetic Immunity EN61000 4 11 Voltage Dips and Variations 100 95 60 and 30 and with the low voltage directive 2006 95 EC EN 61010 1 Safety Requirement for Electrical Equipment Manufacturer s Address in Europe AMETEK Precision Instruments Europe GmbH Rudolf Diesel Strasse 16 D 40670 Meerbusch Germany 7 Contact D
28. inst SwappingClComponenis 5 12 BOARD REPLACEMENT Macie IDO AIG EA PN AE A EE YEM EE MENE EEE MEAN 6 2 Control Board and Scan DO M eee ee ae lk al ele e 6 3 PR A EA NE MN 6 5 iy MEN AEE MERE MUMLA YA A AMA YEN AR E MAR EA YARMA 6 7 SPARE PARTS ACCESSORIES KITS PPO E E A A 6 9 Normal ARMA A ANE EA ANN a SUN EM 6 9 Normal Mamtenance eee 6 9 LC D Manifold Kits seansa dasemeaie sed san yerek abanie damask dendi e i 6 10 Spare Analy zer m NE RM 6 10 lt lt A AR MMA NE E 6 11 ECD e A RR eee er 6 11 iv DycorLC D Series Safety Notes WARNINGS CAUTIONS and NOTES contained in this manual emphasize critical instructions as fol lows WARNING ronmental contamination An operating procedure which if not strictly observed may result in damage to the equip CAUTION ment Important information that should not be overlooked NOTE Electrical Safety An operating procedure which if not strictly observed may result in personal injury or envi Up to 5 kV may be present in the analyzer housings Always shut down power source s before perform ing maintenance or troubleshooting Only a qualified electrician should make electrical connections and ground checks Any use of the equipment in a manner not specified by the manufacturer may impair the safety protection originally provided by the equipment Dymaxion Electronics and Sensor L nected t
29. is LED indicates the status of the filament The LED is green if the filament is on and is working properly The LED appears red if the filament 1s off due to an overpressure open or short condition The LED appears yellow if half of the filament has failed Capillary Inlet Heater Option Controller Settings m Cc O S Lin SAEC SPLo Fire Giri Ftbt PSLI PSH1 AFT Unit FAIL 2 8 amp ry O olulsi gt lwlololslelslal l lolmlelzlelolrle TI g S a Gai Baa ols 2 gt O gt O TI gt nin TI O ri gt E E gt i O TI TI O 4 87 61 O Installation 3 7 3 8 DycorLC D Series Installation Figure 1a Figure 1b Figure 1c 1 Unwrap the Velcro straps on the ends of the insulated heater jacket Figures 1b and 1c to expose the heater and inner tubing 2 Gently feed the fused silica capillary tube through the Swagelok fittings and stainless steel tube until approximately 1 inch 2 54 cm of capillary tube is exposed at each end Figures 2a and 2b ee ae JE ae aM E e a e e in aS ee es ee ee aA oe eS e 3 3 Figure 2a Figure 2b Do not force the capillary tube into the steel fittings If the capillary tube gets stuck pull it back a few centimeters and then continue feeding it through 3 Install a graphite ferrule on each exposed end of the capillary tube with the cone shaped end of the ferrule facing away from the end of
30. k of the electronics unit 1 6 DycorLC D Series CPU Indicates CPU and system status e OFF LC D power is off e RED CPU has stopped e FLASHING RED Battery backed RAM has been cleared Check battery e GREEN Normal operation Comm Shows the status of communications between the LC D and the PC It flashes green when receiving data from the PC It remains off when the LC D is inactive A red light indicates a communications error RF Shows the status of the RF circuit The LED is green if the RF amplifier is oper ating properly and turns red if there is an RF failure The LED is yellow during automatic RF tune If you are having a problem in this area contact your service engi neer NOTE Filament Indicates the status of the filament The LED is green if the filament is on and is working properly The LED appears red if the filament 1s off because of an over pressure open or short condition The LED appears yellow if half of the filament has failed Overview 1 7 This page intentionally left blank 1 8 DycorLC D Series LC D SPECIFICATIONS Mass Range 1 100 AMU standard 1 200 and1 300 AMU optional Operating Pressure Range 10 Torr to ultrahigh vacuum Minimum Detectable Partial Pressure 5 x 10 Torr 5 x 10 4 Torr for electron multiplier units Resolution Adjustable to constant peak width 0 5 AMU at 10 height Emission Current 0 1 to 10 mA 50 mA to degas Electron Ene
31. l settlement the purchase price thereof paid by Buyer Process photometric analyzers process moisture analyzers and sampling systems are warranted to perform the intended measurement only in the event that the customer has supplied and AMETEK has accepted valid sample stream composition data process conditions and electrical area classification prior to order acknowledgment The photometric light sources are warranted for ninety 90 days from date of shipment Resale items warranty is limited to the transferable portion of the original equipment manufacturer s warranty to AMETEK If you are returning equipment from outside the United States a statement should appear on the documentation accompanying the equipment being returned declaring that the goods being returned for repair are American goods the name of the firm who purchased the goods and the shipment date The warranty shall not apply to any equipment or part thereof which has been tampered with or altered after leav ing our control or which has been replaced by anyone except us or which has been subject to misuse neglect abuse or improper use Misuse or abuse of the equipment or any part thereof shall be construed to include but shall not be limited to damage by negligence accident fire or force of the elements Improper use or misapplications shall be construed to include improper or inadequate protection against shock vibration high or low temperature overpressure exces
32. lter they strike the detector creating a current This current 1s then sent to the preamplifier for ampli fication and then to the data system for display Exit Detector Lens Quadrupole o lonization Chamber IO E When an electron multiplier is used the ions are attracted to the multiplier be cause of its negative charge As the ions strike the multiplier secondary electrons are emitted This creates a cascading effect as each secondary electron generates more secondary electrons as they move down the multiplier wall amplifying the signal by approximately one thousand The Dycor system uses a microchannel plate MCP electron multiplier It con sists of an array of millions of small glass capillaries fused together in the shape of a disk The inside wall of each channel has a resistive electrically semi con ductive layer forming independent electron multipliers As the ions are approach ing the MCP a positive electrical gradient pulls the electrons into the MCP As they cascade down and strike the channel walls they generate secondary electrons The Dycor MCP has the advantage in that it is stable and is especially beneficial for detection of low level species Data System Overall control of the system acquisition of data and access to collected data is accomplished through the Dycor System 200 software Adjustment of all instru ment parameters that affect sampling ionization sep
33. lve allows the analyzer to be attached to a high vacuum process The large bore of the valve permits good molecular flow to the analyzer Installing one of the inlets will allow sampling from higher pressure samples after the high con ductance valve is closed Pumping Systems Pressure vacuum levels reguired by the mass spectrometer are achieved by using a pumping system when the sample chamber is operating above 10 4 Torr Figure 4 5 These pumping systems are application dependent Each system has a 70 l sec liter second turbomolecular pump that is connected directly to the inlet manifold The turbomolecular pump can be backed by a rota ry vane mechanical pump This provides a 10 Torr pumping capacity that brings the system into a vacuum range in which the turbomolecular pump can operate Using the two pumps together achieves a final operating vacuum of around 10 Torr Rotary vane pumps are durable and inexpensive For applications that require an ultra clean environment a diaphragm dry sys tem is used in place of a conventional rotary vane pump The diaphragm elimi nates the possibility of oil contamination High Vacuum Pumping Systems Model VPS70 pumping system Includes the turbomolecular pumping station with 70 Vs compound with 1 4 CFM roughing pump compactly packaged in a steel frame Model VPS70D dry pumping system Includes a turbomolecular pumping station with 70 I s compound with 0 42 CFM diaphragm roughing pump
34. nt This LED indicates the status of the filament The LED is green if the fila ment is on and is working properly The LED appears red if the filament is off due to an overpressure open or short condition The LED appears yellow if half of the filament has failed Filament Trip Overpressure and LEDs 1 Check the LEDs on the back of the electronics unit Filament status can be determined by the color of the lights Refer to the previous section for LED details 2 Make sure the filament is turned on by checking the Light Bulb icon on the toolbar in the Dycor System 200 software to make sure it is yellow ON Check the filament status and emission current by cl icking Edit on the tool bar and selecting Add Display Click Head Status 3 Restart the entire system and recheck the filament status and emission cur rent 4 Ifthere is no filament current turn off the analyzer pull the electronics from the analyzer head and check the continuity between Pins 3 and 8 5 10 Dycor LC D Series 5 Ifthe filament is burned out LED is red open the vacuum system and re place the filament assembiy If the filament checks out OK do the following e Check the LEDs on the back of the electronics unit Ifthe LEDs are green and there is no overpressure and the filament has not tripped call the factory for assistance Caution Against Swapping Components The Dycor System 200 software has been programmed to accept the combination
35. o the sensor Otherwise damage to the electronics is possible CAUTION Sensor Cables and Wiring Use only shielded Category 5 cable This is required to minimize electromagnetic interference and com ply with the EMC Directive Grounding Instrument grounding is mandatory Performance specifications and safety protection are void if instru ment is operated from an improperly grounded power source Verify ground continuity of all equipment before applying power WARNING AN Before connecting the 24 VDC power to the electronics ensure that the electronics are con o Always remove 24 VDC power from the electronics before removing the electronics from the V Warning Labels These symbols may appear on the instrument in order to alert you of existing conditions PROTECTIVE CONDUCTOR TERMINAL BORNIER DE LECRAN DE PROTECTION Schutzerde CAUTION Risk of electric shock AT TENTION RISQUE DE DECHARGE ELECTRIQUE Achtung Hochspannung Lebensgefahr CAUTION Refer to accompanying documents ATTENTION SE REFERER AUX DOCUMENTS JOINTS Achtung Beachten Sie beiliegende Dokumente CAUTION Hot Surface AT TENTION SURFACE CHAUDE Achtung Hei e Oberfl che gt gt eap Environmental Information WEEE This AMETEK product contains materials that can be reclaimed and recycled In some cases the product may contain materials known to be hazardous to the environment or human health In order to prevent the
36. or the Scan board follow these steps l Figure 6 2 Master Control and Scan boards Remove the 1 4 screws from the front top and bottom casing of the unit and the 3 16 screws from the sides Gently remove the board assembly from the unit casing The Control board and the Scan board are both attached to the front panel under the heat sink The Ethernet Master board is connected on the other side of the panel Once the assembly has been removed from the unit casing remove the upper left and bottom right 3 8 screws with internal tooth lock washer from the heat sink See Figure 6 1 Gently pull on the front heat sink to remove it The LED panel is now visible Remove the 1 4 screw from the bottom left of the LED panel to remove the Control board Remove the 1 4 screw from the middle of the LED panel to remove the Scan board Figure 6 1 Gently pull the Control board or Scan board away from the adhesive gap pad on the back of the LED panel Figure 6 2 Service and Parts 6 3 6 4 DycorLC D Series Replacing the Control Board and Scan Board l Once the old board has been replaced and the new board attached to the front panel for the Control board attach the LED panel at the bottom left using the 1 4 screw For the Scan board attach the LED panel at the middle using the 1 4 screw Replace the front heat sink using the 3 8 screws and lock washers on upper left and bottom right Insert the
37. point ground bar or terminal is highly recommended An even greater degree of shield performance can be achieved by using metallic glands for shielded cable entry into metal enclosures Expose enough of the braid foil drain where it passes through the gland so that the shield materials can be wrapped backwards onto the cable jacket and captured inside the gland and tightened up against the metal interior Inductive loads connected to the low voltage Alarm Contacts are not recommended However if this becomes a necessity adhere to proper techniques and wiring practices Install an appropriate transient voltage suppression device low voltage MOV Transzorb or R C as close as possible to the inductive device to reduce the generation of transients Do not run this type of signal wiring along with other I O or DC in the same shielded cable Inductive load wiring must be separated from other circuits in conduit by using an additional cable shield on the offending cable In general for optimum protection against high frequency transients and other disturbances do not allow installation of this Analyzer where its unshieled I O and DC circuits are physically mixed with AC mains or any other circuit that could induce transients into the Analyzer or the overall system Examples of elec trical events and devices known for the generation of harmful electromagnetic disturbances include mo tors capacitor bank switching storm related trans
38. r Jurgen Gassen Mark Coppler Sr Compliance Engineer AMETEK Process Instruments viii Dycor LC D Series WARRANTY AND CLAIMS We warrant that any equipment of our own manufacture or manufactured for us pursuant to our specifications which shall not be at the time of shipment thereof by or for us free from defects in material or workmanship under normal use and service will be repaired or replaced at our option by us free of charge provided that written notice of such defect is received by us within twelve 12 months from date of shipment of portable analyzers or within eighteen 18 months from date of shipment or twelve 12 months from date of installation of permanent equipment whichever period is shorter All equipment requiring repair or replacement under the warranty shall be returned to us at our factory or at such other location as we may designate transportation prepaid Such returned equipment shall be examined by us and if it is found to be defective as a result of defective materials or workmanship it shall be repaired or replaced as aforesaid Our obligation does not include the cost of furnishing any labor in connection with the installation of such repaired or replaced equipment or parts thereof nor does it include the responsibility or cost of transportation In addition instead of repairing or replacing the equipment returned to us as aforesaid we may at our option take back the defective equipment and refund in ful
39. rLC D Series Replacing the Amp Card l p Secure the Amp card onto the Amp card shield using the 4 1 4 screws Attach the Amp card cover to the Amp card using the two 1 4 self tapping sheet metal screws Insert the RF assembly into the unit casing and secure using the 6 1 4 screws for the top and bottom of the unit and the 2 3 16 screws for the sides RF Card Removing the RF Card The RF card is located directly behind the rear heat sink and separated from it by the conductor guide See Figure 6 3 Follow these steps to remove the RF card for replacement 1 There are eight screws holding the RF assembly in the unit casing Remove the 3 top 1 4 and 3 bottom 1 4 screws 2 Remove the 2 3 16 screws one from each side 3 Grab hold of the rear heat sink and pull hard to remove the assembly from the casing 4 You now have the complete RF assembly in your hand Refer to Figure 6 3 5 Remove the Amp cover by removing the two 1 4 self tapping sheet metal screws The Amp card is underneath 6 Remove the 4 1 4 screws holding the Amp Card to the Amp card shield 7 Using the 1 4 nut driver remove the 4 3 8 standoffs from the Amp card shield You can now see the RF card 8 Using the 1 4 nut driver remove the 4 5 8 standoffs holding the RF card to the connector guide 9 Remove the 1 2 screw on the top right of the RF card This holds the card to the aluminum oxide
40. rchased the Dycor DC power supply module follow the directions below to connect to the AC line power 1 Connect the DIN connector from the DC power supply module to the power input connection on the LC D electronics 2 Align the key and push in the connector 3 Push the outer ring over the connector and rotate clockwise until the ring locks in place Figure 3 2 The Dycor DC power supply model accepts either 110 or 220 Volts 50 60 Hz AC input 4 Plug the DC power supply module into the appropriate AC power outlet PIN 1 24VDC PIN 2 24VDC PIN 3 24V RETURN PIN 4 24V RETURN O Communications Setup Figure 3 3 Ethernet port and LEDS This section describes how to connect the LC D analyzers to the PC running the System 200 LC D software to accept the incoming data The LC D supports either a a direct connection using an shielded Ethernet CAT 5 cross over cable supplied or a network LAN connection using an installed network or a hub e Connect the LC D electronics Ethernet port to the PC using the cable pro vided e Use System 200 LC D software to read LC D data An Ethernet card must be installed in the PC to allow communication between the LC D and the PC NOTE Direct Ethernet Communications or Local Area Network LAN Ethernet Connection a ee ers LEDs Ee comm lt Ethernet Port On i u E fe SS d q NRA Heat E o lt lt Sink The LC D Ethernet port reguir
41. release of harmful substances into the environment and to conserve our natural resources AMETEK recommends that you arrange to recycle this product when it reaches its end of life Waste Electrical and Electronic Equipment WEEE should never be disposed of in a municipal waste system residential trash The Wheelie Bin marking on this product is a reminder to dispose of the prod uct properly after it has completed its useful life and been removed from service Metals plastics and other components are recyclable and you can do your part by one of the following these steps e When the equipment is ready to be disposed of take it to your local or re gional waste collection administration for recycling n some cases your end of life product may be traded in for credit towards the purchase of new AMETEK instruments Contact your dealer to see 1f this program is available in your area e Ifyou need further assistance in recycling your AMETEK product contact our office listed in the front of the instruction manual vi Dycor LC D Series Electromagnetic Compatibility EMC Read and follow the recommendations in this section to avoid performance variations or damage to the internal circuits of this eguipment when installed in harsh electrical environ ments CAUTION The various configurations of the Dycor LC D should not produce or fall victim to electromagnetic dis turbances as specified in the European Union s
42. rgy 30 to 150 volts to operate 200 volts to degas Specifications 2 1 2 2 DycorLC D Series lon Energy 1 to 10 volts Source Sensitivity Faraday Cup 2 x 10 amps per Torr at detector measured with nitrogen at mass 28 with peak width 0 5 at 10 height and 1 x 10 amps emission current Power Requirements 24VDC 3 2 Amps 110 120 VAC 50 60 Hz adaptor available Stability Mass stability 0 1 AMU after 30 minute warm up Peak Height 2 per 5 hours after 30 minute warm up Ethernet Connectivity 10 100BASE T Ethernet Auto Sensing RJ 45 connector Always use a shielded Category 5 cable for Ethernet connections This is required to minimize electromagnetic interference NOTE Physical Dimensions Weight 4 6lb 2 1 kg without quad head 74lb 3 4 kg with quad head Width 4 5in 11 4 cm Length 9 0in 229cm Height 5 25in 13 3 cm INSTALLATION This chapter contains information on the installation and initial operation of the LC D system including the following e Mechanical installation e Communications setup e LEDs Dymaxion Electronics and Sensor Before connecting the 24 VDC power to the electronics ensure that the electronics are connected to the sensor Otherwise damage to the electronics is possible CAUTION Always remove 24 VDC power from the electronics before removing CAUTION the electronics from the sensor Installation 3 1 Mechanical Installation
43. s Inlet Manifold Includes valve and bypass tee Capillary Bypass Inlet Manifold with Electro pneumatic Valve and bypass tee Description For use with 100 AMU Faraday Cup only sys tem For use with 200 AMU Faraday Cup only sys tem For use with 300 AMU Faraday Cup only sys tem For use with 100 AMU Multiplier system For use with 200 AMU Multiplier system For use with 300 AMU Multiplier system LC D Accessories M95 Mobile Cart Includes complete packaging of Dycor analyzer inlet system and pumping sta tion into one completely integrated package LC D Pumping Systems Part Model Description 90526VE VPS70 Oil Vane Pumping System Includes turbomolecular pumping station with 70 Vs compound turbopump and control with 1 4 CFM roughing pump and autovent valve compactly packaged in aluminum frame To be used with user s vacuum or process chamber Call Factory o VPS70D Dry Pumping System Includes wide range turbomolecular pumping station with 70 Vs compound turbopump and control with 0 42 CFM diaphragm roughing pump and autovent valve compactly packaged in aluminum frame To be used where an oil free pumping system is needed on user s vacuum or process chamber Service and Parts 6 11 This page intentionally left blank 6 12 DycorLC D Series
44. s voltage and the like or operating the equipment with or in a corrosive explosive or combustible medium un less the equipment is specifically designed for such service or exposure to any other service or environment of greater severity than that for which the equipment was designed The warranty does not apply to used or secondhand equipment nor extend to anyone other than the original purchaser from us THIS WARRANTY IS GIVEN AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES WHETHER EXPRESS OR IMPLIED INCLUDING WITHOUT LIMITATION AND WARRANTIES OF FITNESS OR OF MERCHANT ABILITY OTHER THAN AS EXPRESSLY SET FORTH HEREIN AND OF ALL OTHER OBLIGATIONS OR LI ABILITIES ON OUR PART IN NO EVENT SHALL WE BE LIABLE UNDER THIS WARRANTY OR ANY OTHER PROVISION OF THIS AGREEMENT FOR ANY ANTICIPATED OR LOST PROFITS INCIDENTAL DAMAGES CONSEQUENTIAL DAMAGES TIME CHANGES OR ANY OTHER LOSSES INCURRED BY THE ORIGINAL PURCHASER OR ANY THIRD PARTY IN CONNECTION WITH THE PURCHASE INSTALLATION REPAIR OR OPERATION OF EQUIPMENT OR ANY PART THEREOF COVERED BY THIS WARRANTY OR OTHERWISE WE MAKE NO WARRANTY EXPRESS OR IMPLIED INCLUDING WITHOUT LIMITATION ANY WARRAN TIES OF FITNESS OR OF MERCHANTABILITY AS TO ANY OTHER MANUFACTURER S EQUIPMENT WHETHER SOLD SEPARATELY OR IN CONJUNCTION WITH EQUIPMENT OF OUR MANUFACTURE WE DO NOT AUTHORIZE ANY REPRESENTATIVE OR OTHER PERSON TO ASSUME FOR US ANY LIABILITY IN CONNECTION WITH EQUIPMENT OR ANY PART THEREOF COVERED
45. s will result in a loss of sensitiv ity over the full range of the spectrum If the peaks disappear at high scan speeds an insulating layer may have developed on the surface of the rods e Unless the nature of these discolorations can be identified exactly the only sure way of removing them is with a fine abrasive e The entire analyzer head assembly must be taken apart to clean the rods We recommend that the head assembly be returned to the factory where the rods can be cleaned properly NOTE Electron Multiplier The multiplier is immune to up to air cycling and routine low level ion bombard ment However over time the system will begin to lose gain When this becomes unacceptable a new multiplier will restore the original gain of the system Call AMETEK Process Instruments or your local representative to arrange for factory service to replace the multiplier Because of the NOTE complexity of the head assembly we recommend that the multiplier be replaced at the factory Mounting the Head on the AMETEK Vacuum Chamber The analyzer head is mounted to the AMETEK vacuum chamber at the factory before shipment If you have to re mount the head follow these instructions 1 Using a new copper gasket install the head into the AMETEK vacuum chamber so that it resides inside the long end of the chamber Be sure the repeller clears the chamber walls 5 6 Dycor LC D Series 2 Orient the barrel notch in the 12 o clock position
46. the capillary tube 4 Loosen one end of the 1 8 Swagelok tube fitting located at each end of the stainless steel tubing Figure 3 o Feed the end of the capillary tube where the heater s electrical connec tions are located into the valve end of the ProLine System Figure 3 Figure 4 6 Tighten the 1 16 nut at the end of the heater assembly onto the 1 16 threaded stub of the ProLine Figure 4 i Retighten the 1 8 Swagelok fitting located at the Proline side of the heater assembly Figure 4 8 Feed the remaining free end of the capillary heater assembly into the customer process fitting Figure 5 Figure 5 Installation 3 9 Figure 6 9 Tighten the 1 16 nut at the end of the heater assembly onto the 1 16 customer process fitting Figure 6 10 Retighten the 1 8 Swagelok fitting located on the customer side of the capillary heater assembiy Figure 6 Figure 7 11 Make sure the spiral stretch to length heater covers all the tubing and fittings beginning at the ProLine valve stub Figure 7a and continu ing to the customer process fitting Figure 7b The heater should Figure 8 3 10 DycorLC D Series Figure 9 12 Close up the insulated heater jacket The jacket should extend approximately 1 inch 2 54cm onto the ProLine valve stub and 1 inch 2 5cm onto the customer fitting Replace the Velcro straps Figure 8 13 Install the stainless steel tube clamps at
47. the exception of the mass filter subassembly Most parts can be replaced if necessary e As the head is used deposits will form on the source parts and on the mass filter The lifetime of the source parts varies with application exposure time and vacuum pressure Do not place the mass filter in an ultrasonic cleaner The filter parts can become loose during ultrasonic cleaning This will significantly degrade analyzer performance A loosened mass filter must be replaced CAUTION The Dycor source contains a dual wire filament so the analyzer can continue to function if one side of the filament burns out The replacement filament comes in a protective container and can easily be replaced in the field Equipment required to replace a filament e needle nose pliers e 1 16 hex wrench supplied by AMETEK Dycor e filament assembly kit supplied by AMETEK Dycor e latex gloves powder free optional Handling the filament by the shorting tabs on the filament plate will ensure against contamination through handling since these tabs will NOTE eventually be discarded Removing the LC D electronics from the head Always remove 24 VDC power from the electronics before removing we the electronics from the sensor After powering down the LC D carefully use the tightening knobs on the sides of the electronics unit to unlock the electronics from the head Once loosened gently pull straight back on the electronics without twisting
48. ts must meet the 10 Torr pressure requirement inside the vacuum system of the LC D The low conductance of the capillary decreases the sample gas pressure from atmospheric pressure to the pressure required by the LC D A heated capillary is available to prevent sample condensation desorption within the capillary Inlet Option Descriptions Capillary This inlet delivers sample to the analyzer using a small bore capillary with an ID tailored to suit the sample pressure It is available with either a manual or elec tropneumatic valve Figure 4 4 shows the manual and electropneumatic capillary inlets These can be mounted on any LC D manifold Electropneumatic Valve Solenoid Valve Manual Valve Capillary Inlet Figure 4 4 Electropneumatic and manual capillary valves Sampling System 4 5 4 6 DycorLC D Series Aperture This inlet allows a high pressure sample to be delivered right to the analyzer Its effective pressure 1s reduced by using a very small diameter aperture The sample is switched on using the manual or electropneumatic valves Sweep tee This inlet is similar to the aperture inlet except that an upstream tee fitting is installed to provide fresh sample to the analyzer aperture at all times The sample is flushed past the aperture valve as a result of a pressure drop in the sample line A vacuum pump creates the pressure drop for sub atmospheric sampling High conductance valve This va
49. until it is free of the head Do not remove the cabling from the electronics Replacing the filament l Remove the six 6 4 28 bolts that fasten the head 10 pin feedthrough to the vacuum system Remove and discard the copper gasket DO NOT TRY TO REUSE THE GASKET Position the head so that it is pointing up and is secure Removing the old filament The filament plate is held in place by two 2 stainless steel rods that carry the current to the filament Using the hex wrench provided loosen the two small set screws on the barrel connectors that hold these rods in place and slide the rods out of the head Be sure to remove all residual pieces of the old filament l Install the new filament being careful not to bend or break the delicate fila ment wires Handle only the shorting tabs on the filament plate Tighten the set screws that hold the new filament in place Remove the shorting tabs on the filament by gently bending them back and forth with needle nose pliers until the tabs break at the notches at their bases Install a new copper gasket on the analyzer head feedthrough flange Be sure it remains centered on the flange as the head is installed into the vacuum system Tighten the bolts using a cross pattern to ensure proper tightening and a leak tight connection The maximum torque required is 110 in lb 9 ft lb Check for electrical isolation between the feedthrough pins Maintenance amp Troubleshooting 5 3
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