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MagnaTran 7.1

1. A B Cc D E TN 1S9 0 39 IN P 0 31 RN1 REV DESCHPTION DATE BY APP U1 24 Inputs to Robo
2. REV DESCHPTION DATE BY APP D REVISE PER EC 13657 08730798 JR R 1 I O uses internal power when no jumpers present or no customer power present VCcO Ri 47k 1 vec H8 ce I O uses cust ower when pri it provid full isol at O uses customer power when present provi
3. NOTICE PROPRIETARY INFORMATION REV DESCRIPTION DATE BY APP Rue um Nu NN RELEASE SER EC Es Se MN INC IT MAY NOT BE REPRODUCED IN WHOLE OR IN PART A RELEASE PER EC 13276 6 21 98 BW MV OR DISCLOSED TO ANY THIRD PARTY OR USED WITHOUT B RELEASE PER EC 15563 8 31 99 RS MJV THE PRIOR WRITTEN CONSENT OF BROOKS AUTOMATION INC PC104 A B01 Tocueuk LA01 GND IOCHCHK B02 RESETDRV D7 ne PC104 CPU BOARD
4. P2 P s EXT INO J EXT IN1 INPUT TO CPU 424V ISO E 3 ip M Lade BN 180s ASSY 002 4674 06 3 PIE 2 2 LLL EXTINS INPUT 10K AC FAIL UPS 4VCC 24VDC EXT INA 24V ENABLE ROBOT S 5 5 SE CIRCUT COM 18 6 6 EXTINS Hh J1 zm mar 5 XUN di 1b 4 EXTINS WY UIA b z gees xk BS MAG 7 1 LOW SIDE I O BOARD x45 BEL CDM EXT INTO TXB 232 11 11 11 EXT IN11 BYPASS PCBD 002 3758 01 RXB 232 a4 4p SAFETY te 12 12 EXT INT2 JUMPE de 2 SWITCH MISC I O E EXT NI 91 2 STOP 9 7 s MISC I O 15 if 14 EXT IN14 M 12 12 Ha EXT IN15 24V 18 8 EXT INTG 17 TYPICAL WIRING CONFIGURATION 17 17 z MINIMUM WIRING CONFIGURATION 48 118 18 EN 7 ROBOT 19 POSSIBLE SAFETY SWITCHES 19 19 EXT_IN19 MAX zz 20 5y 20 EXT IN20 BOARD ID 0001 vec J2 1 EXT IN21 1 BYPASS INTERLOCK 22 o l o o l o 22 22 l J7 9 E 8 I 2 Eri 57 IOPORT A0 d A1 A TX232 422RXN 216 24V USER IOPORT A1 WA S 25 25 25 4 C PEOHTAR O B B9 5 ONERU x6 2 Rm trac MN eru s wea He SIO1 oF 27 27 a X 0O A2 RX232 422RXP Sa lao 24VRTN_USER IOPORT AA SS Saale A 28 28 IOPORT A5 A b 9l o 29 OPTIONAL USER SUPPLIED 29 29 324V IOPORT A8 C2 Cio 422TXN 422TXN Bis 730 VO POWER WITH FULL 730 30 pRv_OUTO IOPORT A7 A3 A11 P TXB 232 31 31 31 DRV OUTI IOPORT
5. Issues y v v v Armset has jerky Armset sways from i Armset overshoots a s Armset oscillates motion or vibrates taught position side to side during when halted during motion gntp motion v v Verify that the configuration Verify that the configuration of the robot is correct of the robot is correct Look for and adjust or Was Issue Resolved YES YES Was Issue Resolved remove any physical obstruction that may interfere with the robot s movement Verify that the armset YES m me mounting bolts are torqued to Was Issue Resolved Verity it the motion is 75 88 in Ibs repeatable YES v Was Issue Resolved YES Verify that the system DONE Was Issue Resolved alignment was taught properly A Verify that armset was YES Verify that the end effectors installed properly Was Issue Resolved are level and not scraping any objects YES Was Issue Resolved YES Verify that the Encoder and Was Issue Resolved Sync Phase values are consistant with the robot QR NO v Inspect the elbow bearings for Inspect the wrist bearings for Verify that the wrist band excessive wear or rough motion excessive wear or rough motion tension is adjusted properly Verify that the wave washer between the T2 arm adapter and the bearing installed between the T1 and T2 shafts is present NO Was Issue Resolved Was Issue Resolved W
6. Hs Opeon Drogol QOpuetonsl DID Cantel 1 EXT INO input 1 ACC PAN B 26 PWR_ISOL spare 2 EXT INI input 2 ACCPANA 27 PWR RET 3 EXT IN2 input 3 Z POSITION 28 PWR RET spare 4 EXT ING input 4 R POSITION 29 24V RET 5 EXT IN4 input 5 STN BIT 0 30 24VDC 6 EXT INS input 6 STN BIT 1 31 DRV OUTO output 1 Z POS BIT 0 7 EXT ING input 7 STN BIT 2 32 DRV OUTI output 2 Z POS BIT 1 8 EXT IN7 input 8 STN BIT 3 33 DRV OUT2 output 3 R POS BIT 0 9 EXT INS input 9 STN BIT 4 34 DRV_OUTS3 output 4 R POS BIT 1 10 EXT IN input 10 ARM 35 DRV_OUT4 STN BIT 0 RETRACT PIN output 5 11 EXT IN10 input 11 MOVE BIT 0 36 DRV OUTS output 6 STN BIT 1 12 EXT IN11 input 12 MOVE BIT 1 37 DRV OUTS6 output 7 STN BIT 2 13 EXT IN12 input 13 MOVE 38 DRV_OUTT7 output 8 STN BIT 3 14 EXT INI13 input 14 RESET 39 DRV OUTS output 9 STN BIT 4 ERROR 15 EXT INI14 input 15 ENABLE 40 DRV OUT output 10 ATSTATION 16 EXT INI15 input 16 41 DRV_OUT10 output 11 ARM IN USE 17 EXT IN16 input 17 42 DRV_OUT11 output 12 COMMANDS 18 EXT IN17 input 18 43 DRV_OUT12 output 13 REFF STAT 19 EXT INI18 input 19 44 DRV_OUT13 output 14 ERROR BIT 0 20 EXT INI input 20 45 DRV_OUT14 output 15 ERROR BIT 1 21 EXT
7. dg Part Number Description Oty 2 803 5014 00 SCREW SHCS M3 0 X 14mm LG SST 4 3 803 0000 10 WASHER M3 SPLIT LOCK ST 4 4 803 0000 00 WASHER M3 FLAT SST 4 5 002 3752 01 Personality Board Assembly 1 6 170 0027 03 CPU PC 104 Module Board Assembly 33 40 MHz 386sx 1 7 904 4000 90 4 40 HEX NUT SST 4 8 904 0000 10 WASHER 4 SPLIT LOCK SST 4 9 904 0000 00 WASHER 4 FLAT SST 4 Brooks Automation Revision 2 2 12 13 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Figure 12 7 Z Driver Board Removal Brooks Automation 12 14 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawings Illustrated Parts Catalog Table 12 7 Z Driver Board Parts List dg Part Number Description Oty 1 002 4234 XX Z Driver Board Assembly 24 48V Type 1 1 2 803 5014 00 SCREW SHCS M3 0 X 14mm LG SST 2 3 803 0000 10 WASHER M3 SPLIT LOCK ST 2 4 803 0000 00 WASHER M3 FLAT SST 2 Brooks Automation Revision 2 2 12 15 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Figure 12 8 Radial Axis Board Removal Brooks Automation 12 16 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawin
8. NVRAM BIN NVRAM BIN STRNGLOG BIN STRNGLOG BIN ERRORLOG BIN ERRORLOG BIN ERR LOG BIN CUR CNFG BIN ERR LOG BIN N CAUTION Prior to either upgrading or downgrading using the below proce dures it is advisable to back up all the files on the robot This can be accomplished by using the REMOTE EXE utility and copying all robot files one by one to a temporary directory with the following command COPY RC filename filename Instructions for upgrading downgrading software versions using any version prior to V2 2 The following procedures use the REMOTE EXE file transfer utility When upgrading or downgrading and at least one of the versions is prior to V2 20 REMOTE U should not be initially used REMOTE no options is used until otherwise stated Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Firmware Upgrade Upgrading to V2 2 from a previous pre V2 2 version 1 Using the aforementioned file lists ensure that there are no extra files on the robot Files on the robot can be displayed by typing the following command DIR RC If there are extra files present delete them one by one using the following com mand DEL RC filename Delete the MAG7 MCC OUT file as follows DEL RC MAG7 MCC OUT Ensure that the latest version of REMOTE EXE is loaded onto the robot as fol lows COPY REMOTE EXE RC R1 EXE COPY RC R1 EXE RC REMOTE EXE D
9. Was Issue Resolved YES Inspect the elbow bearings for t Inspect the wrist bearings for Verify that the wrist band excessive wear or rough motion excessive wear or rough motion tension is adjusted properly Verify that the wave washer NO NO between the Us arm adapter and Was Issue Resolved Was Issue Resolved Was Issue Resolved the bearing installed between the T1 and T2 shafts is present v YES Was Issue Resolved DONE NO ND CALL BROOKS LLL y The Theta Driver PCB has failed Was Issue Resolved gt TECHNICAL SUPPORT Figure 10 4 Theta Motion Troubleshooting Brooks Automation Revision 2 2 10 11 Troubleshooting MagnaTran 7 1 User s Manual Z Motion Related Issues MN 003 1600 00 Z Motion Related Issues Symptoms Robot is able to move in the Z direction but any of the following armset motion characteristics are observed Armset has jerky motion OR Armset oscillates OR Armset overshoots taught position Troubleshooting Process Verify robot application number is correct Check for physical obstruction Remove or adjust physical obstruction to prevent interference Verify that motion is repeatable Refer to Position Repeatability Test on page 10 33 Verify system alignment has been taught properly Refer to Chapter 7 Alignment and Calibration Verify end effector is level and not hitting or scraping any objects Refer to Chapter 7 Align
10. Brooks Automation Revision 2 2 Was Issue Resolved Issues No Response No Response Through Serial lO gt Through CDM Connection v v Verify the communication Check for proper connection software s settings to be 9600 N 8 1 between robot and CDM YES YES Was Issue Resolved Was Issue Resolved NO NO v v Verfiy that the CDM is turned off Check for proper grounding and power connection with robot Was Issue Resolved YES Was Issue Resolved NO v Verify proper serial v connection between the robot and host PC i e correct i comm port is selected on DONE The CDM must be host PC terminal software reprogrammed serial cable is functional etc x Was Issue Resolved YES YES Was Issue Resolved NO Verify that the RS232 RS422 Switch SW1 on the Personality PCB is set correctly UP RS232 DOWN RS422 The I O PCB had failed Replace board Verfiy that the robot was configured to the proper NO YES communication settings to Was Issue Resolved communicate with the controlling software YES Was Issue Resolved Theta Driver PCB has failed TECHNICAL SUPPORT YES The Disk on Chip of the PC 4 M Inpect UART at U40 on 104 Card has failed Personality Board NO NO Was Issue Resolved The DCDC Converterof the Was Issue Resolved NO CALL BROOKS Figure
11. Indicator Function 24V Indicates 24VDC power is being supplied to the robot power on TX Indicates the robot is replying to the host port SIO1 RX Indicates the robot is receiving communications from the host port SIO1 Brooks Automation 6 22 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Operational Interlocks Operational Interlocks The MagnaTran 7 robot is provided with optional operational interlocks to ensure the safety of the robot These interlocks are provided as part of the discrete communica tions option and must be set up by the user Identification Interlocks are divided into three command groups command types related to Sensors at a station I O State OUTPUTS and Miscellaneous These interlocks are detailed in Table 6 5 A maximum number of 170 interlocks is accepted This allows for the pos sibility of using each I O type available at each station as well as all generic DIO options A station mapped or assigned an I O without assigning the pan will always default to arm A On a dual arm arm B will not be mapped unless arm B is specifically mapped Brooks Automation Revision 2 2 6 23 Operation Operational Interlocks MagnaTran 7 1 User s Manual MN 003 1600 00 Table 6 5 Operational Interlocks Command Type Bit yo I O State Station Sensors WAF SEN SINGLE INPUT BLOCKED NOT BLOCKED VLV SEN SINGLE INPUT CLOSED NO
12. mass seen by the z motor in kg Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Code Reference Error 414 Error 415 Error 416 Error 417 Error 418 Robot Internal Errors Error 508 Error 509 Error 527 Error 528 Error 550 Error 551 Error 552 Error 554 Error 555 Error 557 Error 558 Z motor spring constant Extension arm Angle Retract arm Angle Push value must be Positive Station R PUSH value is Invalid Station not initialized Offset too large Bad retract position Invalid RTRCT2 Wafer sensor not defined No Z axis on robot MCC communication error MCC Queue Full Station parameter out of range Servo parameter out of range Sensor out of range Cannot resume due to unsuccessful HALT Cannot resume because robot not HALTED Robot did not respond Robot unknown Dispatcher Communications Errors Error 602 Error 603 Error 604 Error 605 Error 606 Error 607 Brooks Automation Revision 2 2 Command sequencer busy Wait for the robot to complete its last operation If the error persists reset the robot by issuing the RESET command or toggling power Command halted A HALT command was issued to stop robot motion The robot remains referenced CDM in control of the robot The command issued requires control of the robot Turn off the CDM
13. 1 p Removing Protective Covers exposes hupata 7 Electrical Shock Hazard SS A Figure 2 1 Locations of Hazardous Points on the MagnaTran 7 Brooks Automation 2 4 Revision 2 2 MagnaTran 7 1 User s Manual Safety MN 003 1600 00 Disconnect Devices and Interlocks Disconnect Devices and Interlocks Disconnect Devices The facility is responsible for the robot s main disconnect device ensuring it complies with the correct electric codes Personnel servicing this equipment are responsible for the status of the robot s main disconnect device as specified on the facilities lockout tagout procedure Lockout Tagout The MagnaTran 7 utilizes an electrical power supply Use of lockout tagout procedures for the power supply when servicing the MagnaTran 7 is recom mended by Brooks to ensure the safety of personnel servicing this robot Interlocks N WARNING The MagnaTran 7 does not provide any personal safety or obstruction interlocks as a stand alone unit However safety interlocking capabilities exist for user safety See Safety Interlock on page 5 17 for instructions on connecting the robot motion emergency off safety inter lock Operational interlocking capabilities exist through the discrete I O The flexibility of the interlocks is left up to the user to set up and manage See Operational Interlocks on page 6 23 in Chapter 6 for instructions on setting up the interlocks
14. 000005 2 16 Material Salety InPO EATDORL cus cia das cow eGee tebe Ghee eda RUE cee ER 2 17 Brooks Automation Revision 2 2 2 1 Safety MagnaTran 7 1 User s Manual Safety Considerations MN 003 1600 00 Safety Considerations Personnel Safety Guidelines The MagnaTran 7 may provide several direct safety hazards to personnel if not prop erly installed or operated Persons operating and servicing the MagnaTran 7 should be properly trained Possible injury can result from the automatic operation of the robot Know the location of the following Fire extinguisher First Aid Station Emergency eyewash and or shower Emergency exit Be aware of sharp edges while working around the location of the robot The following safety equipment should be donned prior to operating or servic ing the robot Eye protection Safety Shoes Hard Hat Observe the facility guidelines pertaining to loose clothing while working around the robot Perform a complete review of the Material Safety Data Sheets MSDS for each material used with the product These individual sheets are provided by the supplier It may be recommended that the use of hazardous materials such as cleaning fluids be used during routine maintenance procedures Perform a complete review of the Safety Information Sheet provided at the end of this chapter for each recommended substance Ergonomic hazards may exist with certain operations pert
15. Hard Tracking Error While Finding Phase for Theta Drive AA T1 T2 Shafts Do Not Move Together or Pauses During Pinging v Verify that all cabling from the Theta Motors and Encoders are connected properly and have proper continuity YES Check the Theta Driver PCB for a shorted FET Is Threre A Shorted FET NO v Verify that the arms have been removed from the robot Are the LED s lit P DS1 through DS6 are lit on Verfiy that all six phase LED s the Theta Driver PCB v The Personality PCB has failed Issue the command RDMCC 0x0 YES Did the robot respond Was Issue Resolved NO v The PC 104 Card has failed YES Was Issue Resolved Remove the arms and repeat the Find Phase command insta Were the arms v lled NO hand look move Turn the T1 and T2 Shafts by for rough ment Is there rough movement YES Verify that the DC DC Converter on the Theta Driver PCB is not shorted Call Is the DC DC Converter Shorted The DC DC Converter of the Theta Driver PCB has failed DONE CALL BROOKS gt TECHNICAL SUPPORT Figure 10 6 Find Phase Theta Drive Troubleshooting
16. Arguments station The number of the station from which to pick Range 1 16 arm The arm A or B which will perform the pick Leaving the arm unspecified results in CHECK LOAD checking both pans Description This command is available only when at least one station has been set up with an R MT Wafer Presence Sensor This command is used on single and dual arm sets CHECK LOAD will find a station that has an R MT type wafer sensor assigned The robot will extend each arm to the load sensing position to determine if there is a load present on each arm The edge of the wafer is checked rather than the center of the wafer to minimize the length of the extension Based on the sensor information the robot will update it s arm load status memory map This command will cause the robot to query all assigned radial motion sensors and position the pan over a sensor to determine if a wafer is present Use the RO LOAD command to request the results of the query The CHECK LOAD command first tries to find stations for arm A or the specified arm that have wafer sensors mapped If a station was specified it will only check that station At each station where it finds a wafer sensor it will check to see if the extend enable slot valve and or poppet valves are clear The INTLCK option is used to Firmware Version V2 12 Brooks Automation Revision 2 2 8 23 Command Reference MagnaTran 7 1 User s Manual Check Load MN 003 1600 00 eith
17. Figure 10 7 Find Phase Z Drive Troubleshooting Brooks Automation Revision 2 2 10 17 Troubleshooting MagnaTran 7 1 User s Manual Home Z Axis Related Issues MN 003 1600 00 Home Z Axis Related Issues Symptoms Command Failed error while homing Z axis Troubleshooting Process Ensure cable 002 2196 01 is plugged into both Z home flag sensor board 001 1957 03 designation P14 and Z driver board 002 1655 01 designation P5 Check cable for proper continuity Verify red LED of Z home flag sensor board designation U2 illuminates when the Z home flag sensor designation U1 is blocked If not replace Z home flag sensor board Refer to Z Home Flag Sensor Board Replacement Procedure on page 9 50 Verify home flag trips the Z home flag sensor at proper home gap 0 062 Refer to Z Home Flag Sensor Board Replacement Procedure on page 9 50 Replace Personality Board Refer to Personality Board Replacement on page 9 37 Call Brooks Technical Support Brooks Automation 10 18 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Troubleshooting Home Z Axis Related Issues YES Z Home Axis Related Issues v Command Failed Error While Homing the Z Axis i and the Z Driver PCB Verify connection of the cable between the Z Home Sensor PCB DONE YES Was Issue Resolved NO v Verify that the red light
18. Personality Board Replacement NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools Performing the Personality board replacement procedure requires the following tools Medium flat head screwdriver M3 hex wrench Removal Procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power to the robot and disconnect the power and communications connections to the robot A N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 2 Remove the protective covers as shown in Figure 12 2 N CAUTION Observe proper ESD precautions when handling any electronic device 3 Remove the Lower Cover Mount Assembly Loosen the lower captive screws of the I O board Loosen the three upper cap Brooks Automation Revision 2 2 9 37 Maintenance and Repair MagnaTran 7 1 User s Manual Personality Board Replacement MN 003 1600 00 tive screws of the Lower Cover Mount Assembly See Figure 12 4 Gently allow the Lower Cover Mount Assembly to drop down Disconnect the following cables from the Personality printed circuit board T1 encoder J1 T2 encoder J2 Z encoder J4 J3 not used Remove 4 M3 x 14mm SHCS with MG split and flat
19. Bellows T1 Drive T2 Drive ere ct Figure 4 2 T1 I2 Drive assembly Brooks Automation 4 6 Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Mechanical System Z Axis Drive Assembly The Z axis drive is coupled beneath the T1 T2 drive assembly A mechanical bellows located between the mounting flange and the top of the drive assembly isolates the vacuum allowing the Z axis drive to move the T1 T2 drive along the Z axis The Z axis drive consists of a brushless DC servo motor and ball screw system that moves the T1 T2 drive assembly along a vertical plane causing the arm set to move up and down Control electronics coupled with the rotary encoder allow precision movement in the Z axis A fail safe brake freeze the movement of the drive when power is removed The Z axis drive is attached and located below the T1 T2 drive assembly and is surrounded by the printed circuit boards The Z axis drive assembly and related components which pertain to Z axis movement of the arm set are listed below Z axis drive carriage part of frame Z axis linear slides part of frame ball screw fail safe break direct drive D C motor two Z axis over travel sensors part of frame Z home flag part of frame Hall Effect sensor The frame of the robot has a carriage and rails The motor driven ball screw is mounted to the bottom of the T1 T2 drive assembly Brooks Automation Rev
20. NOTE This list contains error messages that may be generated by the robot in all configu rations It is possible that a specific configuration of the robot will never generate some of these error messages In PKT mode the error codes will appear as numbers in MON mode the error codes will appear as messages Additional troubleshooting procedures are located in Chapter 10 Error listings for the MagnaTran 7 Robot NOTE Previous users of the MagnaTran 6 and the MultiTran VacuTran 5 robots refer to Appendix D Robot Compatibility for obsoleted and equivalent codes Success Codes Error 1 Command failed This is a generic command that requires the operator to have a knowledge of the events leading to the failure For example the operator must know if the robot failed during a theta motion or during Z homing or other Normally the last command issued to the robot will provide this information Next the operator is to refer to the appropriate failure mode in Symptoms of Observed Errors Types on page 10 2 Station Errors Error 210 Not at Station Station based command issued while robot was not at a station ex GOTO R EX Verify that the command used is designed to go to a station These commands include GOTO PICK PLACE XFER LFTST Select an appropriate station number 1 16 Error 220 Radial axis not at retract position Robot must be retracted prior to executing desired move Error 221 Invalid arm selection ex
21. 10 16 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Find Phase Related Issues Find Phase Issues Z Drive Y Y Command Failed Hard Tracking Error Error While Finding While Finding Phase Phase for Z Drive for Z Drive Y Verify that cabling from the Z Motor Encoder and Brake are connected properly and have proper continuity VES M m NO Verfiy that all three phase Was Issue Resolved LED s DS1 DS2 and DS3 are lit on the Z Driver PCB YES Are the LED s lit mP The Personality PCB has failed DONE v Check the Z Driver PCB for a Shorted FET Issue the command RDMCC 0x0 Was Issue Resolved Is Threre A Replace the Z Driver PCB Shorted FET H I2 Did tne robot respond The PC 104 Card has failed NO v Perform a Z Brake Binding Test to determine if there is excessive friction in the Z Drive YES Was Issue Resolved Verify that the DC DC Converter on the Theta Driver PCB is not shorted Is There Excessive Frition Present YES Is the DC DC Converter Shorted The DC DC Converter of the i p Theta Driver PCB has failed DONE CALL BROOKS gt TECHNICAL SUPPORT
22. CALL BROOKS TECHNICAL SUPPORT Was Issue Resolved YES DONE je Brooks Automation Revision 2 2 Figure 10 11 Power Pak Troubleshooting Troubleshooting MagnaTran 7 1 User s Manual Station Value Orientation Related Issues MN 003 1600 00 Station Value Orientation Related Issues Symptom Arm B moves 180 degrees from desired theta station value Troubleshooting Process Verify station values are correct Verify correct coordinate system is being used by issuing the command RO COM PATIBILITY ALL Change coordinate system accordingly by issuing the commands SET COMPATIBILITY COORDT VT5 or Mag6 and STORE COMPATIBILITY ALL Refer to the Appendix D Robot Compatibility on page 11 5 for additional information on the compatibility command Brooks Automation 10 26 Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Z Brake Binding Test Z Brake Binding Test TOOLS Laptop computer with Procomm or equivalent PROCEDURE This procedure determines if the Z brake is inhibiting the Z leadscrew motion 1 Connect laptop to robot via serial communications port 2 Ensure the robot is referenced by issuing the command HOME ALL 3 Move the robot upward to the maximum Z height by issuing the following command MOVE Z ABS 25000 NOTE Note the maximum Z height is normally 25 mm or 35 mm pending the user application The units of measure for the followin
23. Error 1602 Error 1603 Error 1604 Error 1605 Error 1606 Error 1607 CDM Related Errors Error 1800 Error 1801 Error 1802 Error 1803 Brooks Automation Revision 2 2 Bad mail message received by MCC Command halted MCC Queue Full Could not calculate MCC command ID Dual Ported RAM lock fail Unable to send to MCC Error opening MCC code Error reading MCC code MCC task can t access DP RAM MCC DP RAM memory size is too small Bad date format Enter the date using a two digit number to represent the month day and year Separate the month day and year using the character For example February 28 1998 would be entered by issuing the command SET DATE 02 28 98 Bad time format Enter the time using a two digit number to represent the hour minute and second Separate nun the hour minute and second using the character For example thirty minutes past noon would be entered by issuing the command SET TIME 12 30 00 Year out of range Enter the year using a two digit number in the range of 00 through 99 Month out of range Enter the month using a two digit number in the range of 01 through 12 Day out of range Enter the day using a two digit number in the range of 01 through 31 Hour out of range Enter the hour using a two digit number in the range of 01 through 23 Minute out of range Enter the minute using a two digit number in the range of 01 through 59 Secon
24. Format RO REF RI TI Z or RQ ALL Response REF r reference status t reference status z reference status or REF r reference status t reference status z reference status Arguments r reference status Field size 1 character Y referenced N unreferenced t reference status Field size 1 character Y referenced N unreferenced z reference status Field size 1 character Y referenced N unreferenced Example Command RQ REF ALL Response Radial N Theta N Z N Brooks Automation 8 100 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Retract 2 Value Request Retract 2 Value Purpose Requests the second retract value R2 for the Pick and Place with an Offset com mands Format RO RTRCT2 Response RTRCT2 value Arguments value Second retract location value in microns Description This command requests the value of the second retract location when using the Pick with an Offset and Place with an Offset commands Brooks Automation Revision 2 2 8 101 Command Reference MagnaTran 7 1 User s Manual Request Revision MN 003 1600 00 Request Revision Purpose Returns the current Brooks part number and software revision number Format RO RVSN Response RVSN version date Arguments version The Brook Automation software version number date The revision date of the software Example Command RQ RVSN Response date 11992 Rev 4
25. LIPHSMN ASSY360 0010 11 REF SD 360 0010 15 T2 ENCODER se Bie Ae J2 RED S1 ooo d en T 7 P2 J2 T2 N o 1 i BLK Oo L1 X 9 8 8 P _x VCCA 1 1 RED BLK 2 2 2 X T2SIN ORG BLK SW SPDT NA NZ PWR Pe J6 EMITTER ESN 8 2 BLU BLK l 12V MOTOR DISABLE COM x o 1 1 T2PH1MP T2COS 1 4 YEL BLK M vO INTERLOCK LOWER LIMIT SWITCH TO IO BOARD NER NN d2 2 T2PH1MN T2COSV RED WHT SEE NOTE 1 Pa J3 S2 12V K1 a DISABLE T2PH2MP THX 5 5 GRN WHT COM NC RED e 1 1 9 A T2PH2MN AMP GND 9 S B GRN t a 2 BLK o 8 O5 5 T2PH3MP 5V o g 8b WHT o 3 3 x 10 6 T2PH3MN DETECTOR CASE GND 9 9 SW SPDT ues T CZ iR EE fo 19 a i ASSY 0022186 0 dpi 2 2 002 2201 01 H E 6 4 E z VW 45V x 212 P2 5 5 14 P14 NA NU T2PH1MP RED d4 1 RED T2 A 1 1 RED 1 1 Z HONE TPHIMN BLU 2 1 BLU TZA Z AXIS DRIVER BOARD GND 2 8 amp k x12 2 MOTOR DISABLE T2PH3MN ORG d3 3 o3 3 3 3 EXTERNAL INTERLOCK T2PH2MP WHT o a E b WHT T2 MOTOR Z MOTION CHASSIS 002 4234 01 A E 4 4 SEE NOTE 1 T2PH2MN GRN VIO T2 C ASSY 002 2203 01 001 1957 03 POWER e Bik ASSY 002 2196 01 CONNECTION v CHASSIS i 4 T J p2 IO P1 ASSY 002 4950 01 Tus es u vo 32 2 gi UPDATED6 25 98 uus Ble ce ASSY 002 2197 02 amp 58 UPDATED REF DES FOR REV A sE POWER 24V 5 5 Ex COM RELEASE 4 3 2e gap 4 acie FAN 2 2 BATT LOW UPS 2 E 2 2 RED Et AC FAIL UPS 112 FO x NA a ai H x1 ait Md A2 7 x 7 A x 77 24V FAN M 6 8 4 8 4 sin po 31600 00 SCH P1 S AN oh Ti W
26. MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set Mount the MagnaTran 7 1 BiSymmetrik Arm Set Hub Style N CAUTION Do not operate the robot until all set up procedures have been com pleted as damage to the robot or arms may result The mount position of the robot is preset at the factory The purpose of the mount position is to provide the operation clearance from the bottom of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a height of 10mm or 10000 counts other custom configurations for the mount position may exist To mount the arms to the robot power connections and communications connections must be complete and verified Communication may be through the serial port with a computer or through the CDM The following procedure identifies the commands for both methods Required Tools M3 6 inch T Handle Allen Wrench Torque Wrench with M3 Allen Key Extension Brooks Automation Revision 2 2 3 29 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 Mount Serial Communication ls Apply power to the robot 2 Ensure the arm state of the robot is off Issue the following command SET ARMS OFF 3 Install adapter to T2 if provided with arm or if not already mounted to the T2 shaft 4 Move the robot to the mount position
27. RQ STN 5 A OPTION WAF SEN EX Brooks Automation Revision 2 2 8 107 Command Reference MagnaTran 7 1 User s Manual Request Station Sensor MN 003 1600 00 Request Station Sensor Purpose Displays the current parameters or the current state of the specified wafer presence sensor Format RO STNSENSOR station ARM arm TYPE ACT SEN POS Optional Parameters Arguments station The robot station number being configured for use with wafer sensors arm The arm that is active for this sensor A Arm A B Arm B Arm A is the default Responses TYPE The sensor s usage during PICK and PLACE commands NONE sensor not referenced EX Extend sensor referenced during PLACE RE Retract sensor referenced during PICK R MT Referenced motion sensor referenced when robot arm is in motion requires R coordinates ACT The sensor s active state HI signal present when wafer present LO signal absent when wafer present SEN The sensor I O bit number in which the sensor is connected STATE The current state of the sensor ON current state matches configured state Brooks Automation 8 108 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Station Sensor OFF current state does not match configured state POS The sensor s R and T coordinates in the chamber determined by the sen sorlocation This option is available only if the TYPE is set to R MT Description The RO STNSENSOR
28. BI Two state mode TRI Three state mode Description This command requests the mode for reporting the load status of the arm The load status is used to determine the speed of all motion commands If the SET LOAD MODE has been set for BI ON or OFF will be the responses to the RO LOAD command If the SET LOAD MODE has been set for TRI ON OFF or will be the responses to the RO LOAD command See Also RQ LOAD SET LOAD STORE LOAD MODE SET LOAD MODE Example RO LOAD MODE Brooks Automation 8 88 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Mount Request Mount Purpose Returns the setting for the height to which the arm moves in response to the MOUNT command Format RO MOUNT Z Response MOUNT mount height Arguments mount height Field size 6 characters The vertical Z height to which the arm moves relative to the Home position when it receives the MOUNT command prior to mounting or dismounting the arm Description The mount height cannot exceed the vertical position limit set by the SET LIM Z MAX command The default for the vertical limit is the actual mechanical limit indicated in the robot specifications See also SET MOUNT Example Command RQ MOUNT Z Response Z Mount height 10000 Brooks Automation Revision 2 2 8 89 Command Reference MagnaTran 7 1 User s Manual Request Position Absolute MN 003 1600 00 Request Position Abso
29. Brooks Automation Magnalran M 7 1 User s Manual FOR SALES AND SERVICE PLEASE CALL PTO SALES Ti 880 992 0500 po B2B 334 2151 abe View our inventory MN 003 1600 00 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Serial Number Serial Number indicates date of construction of the MagnaTran 7 1 The first two characters are the year next two characters are the month remaining characters are a unique identifier If there is no Serial Number recorded above this manual should be considered generic and not associated with a specific robot Information provided within this document is subject to change without notice and although believed to be accurate Brooks Automation assumes no responsibility for any errors omissions or inaccuracies If you have any questions or comments about this manual please complete the Reader s Comment Form pro vided at the back of this manual and return it to the Technical Publications Dept at Brooks Automation MagnaTran BiSymmetrik Leapfrog Marathon Marathon Express Atmospheric Express PASIV and Time Optimal Trajectory are trademarks of Brooks Automation All other trademarks are properties of their respective owners Brooks Automation 1998 All Rights Reserved The information included in this manual is Brooks Proprietary Information and is provided for the use of Brooks customers only and cannot be used for distribution reproduc tion or sale wit
30. Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Maintenance and Repair End Effector Replacement Wrist Mounting Plate Pan Mounting Plate bottom side e Installation Screws flathead 4 places 9 Wrist Plate Mounting Plate Oa Installation Screws flathead 4 places LU o 9 Clamping Plate Figure 9 1 End Effector Mounting Hardware Brooks Automation Revision 2 2 9 31 Maintenance and Repair MagnaTran 7 1 User s Manual End Effector Pad Removal Replacement MN 003 1600 00 End Effector Pad Removal Replacement The wafer supports may need to be replaced if they show significant wear or if they are damaged Depending upon the application the MagnaTran 7 Robot is being used in the End Effector may use either grommet style or adhesive backed wafer supports This procedure provides directions for replacing both types of supports Required Tools Performing the Wafer Support Removal Replacement procedure requires the follow ing tools e A set of Allen wrenches in metric sizes e A Philips head screw driver Removal Replacement Procedure N WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 N WARNING Failure to ensure that the robot is not under remote control could result in automatic oper
31. Electrical Hazard Classifications Power Connector ITT Pin Assignments RS 232 and RS 422 Connector Pin Assignments 5101 Discrete I O Communications High Side Low Side I O Assignments Emergency STOP CDM Connector Pin Assignments CDM Connector Pin Assignments GOTO with MAT Option Scenarios DIJA oa useatoo us Tian du PR a Brooks Automation Revision 2 2 Tables xvii Tables MagnaTran 7 1 User s Manual MN 003 1600 00 Gls DIOSGDOD SIOCDOIL ico d ddhrdeo d Ceo RC EE A E Eb CP oe d deb dedo aa 6 49 PIE DO waa d uci end desine EVA one Fe ID TELA aeq EPIS 6 50 Bs BL TLMIIUN wives pd EdVAREQS Gees ode ad Eds pei dd gs 6 50 6 16 DIO Acceleration Arm A ossooeoe beret rre eR eth den 6 51 6 17 DIO Ae err ss 434 3532 9 73 23 CR CIR ROCA HR LR aE 6 51 es LIOSevaConDIOL 6 5x05 dr d dado d aoi OE Ra dopo ded HOC CHER OR 6 52 Ore ECG vd eobed ot dauar 599 bbed Pd dada iyd ridande creas 6 52 G20 DIO Emor Reports 4 i02440034 9645443 4644444 ENAEATURSZTARARE RA anes 6 52 Cal Eror 0 m 6 53 6 22 DMO Referenced Statis ici 6aGe vau ed ph ERR ie dude sees eia aD dE 6 53 ous DIOCommand DULDUSA 42a bk doo bd ERU CE EROL S pick dob d De So b Ule d 6 54 BO LL se 4 23 2h sha Bee ego eb a 8 Oeo e aor Ed Oeo ede 6 54 odo LIO Ariat Sanon cererii tbai trier Xi xEPRRU EAE ERE E EU PER VER DES 6 54 6 26 R Position Status ses a reres eb EASIER RR aE a ani aa a nears 6 55 por Pet ASer pee ee een ETENE ETT EEFT 6 55 628 Reserved Workspace N
32. Issue the following command SET ARMS OFF B Move the robot to the mount position Issue the following commands Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set MOUNT SET SERVOS OFF 4 Install the arms on the robot For the following procedure the alignment fixture must be installed on the arm set Verify the T1 adapter wave spring and T2 adapter are in place factory installed Align the pins located on the T1 and T2 drive shafts so they line up with the pattern on the underside of the arms Position the arms with the arm Mount ing Storage bracket attached onto the drive spindle in the center of the robot ensure that the locating pins for both T1 and T2 are fully seated into the arm 5 Tighten the M4 mounting bolts for the T1 and T2 axes until the lock washer is fully seated then torque 25 inch pounds 6 Remove the alignment fixture by loosening it s hardware NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped to another location the original fixture must be used Also keep the fixture close to the robot Additional procedures will require the use of this fixture A Set the arm state of the robot to on Issue the following command SET ARMS ON 8 Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the a
33. Low Side Logical Inputs Compatible with any open collector driver refer to the Input Circuit in Figure 5 5 that can satisfy the following requirements Logic zero 0 3 to 0 6 V DC driver must sink 2 mA Logic one Open circuit 24V 20 Low Side Logical Outputs Low side driver using ULN2803 refer to the Output Circuit in Figure 5 5 and user connects load from output pin to 24V within the following requirements Brooks Automation 5 12 Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 MISC I O Communications Logic zero Refer to specification for ULN2803 Logic one Refer to specification for ULN2803 All discrete input signals connected to the MagnaTran 7 must be open collector as shown in the circuit in Figure 5 5 All discrete output signals from the MagnaTran 7 are open collector NPN circuits as shown in the circuit in Figure 5 5 24V R l EN CO INPUT CIRCUIT YPICAL INPUT Veg 24V R 24V Q LOAD TYPICAL OUTPUT iy A O fb oe ee OUTPUT CIRCUIT Figure 5 5 Low Side I O Circuit Brooks Automation Revision 2 2 5 13 Operational Interfaces MagnaTran 7 1 User s Manual MISC I O Communications MN 003 1600 00 High Side Low Side Interfaces The following interfaces are the same for the High Side and the Low Side I O boards MISC I O Power The high side board and the low side boa
34. QCO sr i00 QO QCO stro QO Qc sti0 0 29919959292 Ea Tee n BA BRB RBRSHREEEOOCSSESSSOOOOOSO E E 299192192052 ea T ETTITA RETT 000 00000000000 o o P1 0000 0000000000 o o o o ll iii f LTS p2 LTT LTT ii n iii ZAXIS ENCODER ASSY 002 2142 01 100 348 xxx T1 AXIS ENCODER L4 4 44 44 ASSY 360 0010 11 REF SD 360 0010 15 T1 ENCODER 1 4 SHIELD J4 P4 24V EN gt 424VZ PHASE AN GRN H HH 2 J2T1 PHASE_AP a v BLK VCCA PHASE BN YEL T28IN 1 1 12V PHASE BP 3 3 RED Z AXIS MOTOR T1 T2 AXIS DRIVER BOARD _ toaic EMITTER T2SINV A a PHASE CN da z BLU ia T2COS ISOLATION 6 PHASE CP WHT 002 3754 01 NE GOM T2COS AND LOGIC MOTOR DRIVE d ASSY 002 2140 01 T24VOFF2 N 6 1S0 AMP _GND d EE BLK oTo 4 4 Z24VOFF N 6 ISO 5V 7 f RED SNS1 A BRN DETECTOR usn 3 pian woe TIE ae Mau ereot 2 SNS3 C 2 vec ASSY INDEX 10 10 ORG WHT 45V d 3 RED ili 002 2200 01 u 2 CPU 5V ms 5 BIK J1 T1 P1 424VZ DISABLE 24 5V TIPH1MP RED 1 1 RED Tt A 9 F2 RXEO75 SF J3 P3 pepe TIPHIMN BLU 3 iB BRU LILA CABLE ASSY 002 2204 01 INPUT o N 6 y di i a ZAXIS BRAKE 1 S9 ATED TIPH2MN ORG 3 2p BRN Ti B T1 MOTOR POWER E 92 2 P5 TIPHSMP WHT d P B WHI T1 C ASSY 002 2203 01 12V Ka 12V J5 T1PHS3MN GRN o6 eb VIO T1 C 9 1O POWER eo PAN ST 1 TIBHIME 45V 1 S xe a DRIVE rJ T P RXE075 4 d3 3 mE JD NIE E p DESERUIT ITO d l 100 o 5 HL12 93 jr e uA yt 4b TiPHamp T2 ENCODER COM 3 Go T1 MTR o6 6 P
35. 11 Appendices Overview The following appendices are included to provide the user with a single location for specific information related to the MagnaTran 7 Robot Contents Appendix A Factory Default Setings ova deesa a sake irendi rerepi ven OR 11 2 Appendik B TOON Ls ad chris debui 30 ER OE UA OR God ao beo aaa oad eee 11 3 Pes Torge SOLE ooo d asi a S04 es ka eee 4 EDI EPA sana Ves 11 4 Appendix Lx Robot Compatibility ux44e233 xA 3A e ER Er dread AR havens 11 5 Appendix E User Setting ISDleS ioioesaovesesdatN SAXA ANNEER E SA RA R 11 17 Appendix F Relay VO ODDO 142x244424Ax RATER dU qu ER R43 A dd ERAS da 11 24 Brooks Automation Revision 2 2 11 1 Appendices MagnaTran 7 1 User s Manual Appendix A Factory Default Settings MN 003 1600 00 Appendix A Factory Default Settings Default Robot Settings The Quality Report shipped with the robot contains a list of all the factory default set ting Refer to the OR to reset to the default Serial Communications Default Settings Table 11 1 RS 232 RS 422 Protocol Port Configuration RS 232 or RS 422 Handshake No Baud Rate 9600 Parity Bits None Data Bits 8 Stop Bits 1 Parity None RTS CTS No XON XOFF No Pin Assignments RS 422 See Serial Communication SIO1 on page 5 5 If using the Relay I O board see Appendix F Relay I O Option on page 11 24 Brooks Automation 11 2 Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix
36. 4 Disengage the robot servos Issue the following command SET SERVOS OFF 5 Verify M6 Arm to M7 Drive adapters are installed T1 adapter wave washer and T2 adapter 6 Install the arms on the robot For the following procedure the red arm mounting fixture must be installed on the arm set N CAUTION The mounting fixture is an installation fixture It does not provide precise alignment for the Radial Home If the arms are being changed Brooks Automation recommends reteaching the robot all stations Using the red arm mounting fixture place the arms on the T1 T2 shafts posi tioning the 4 locating pins of the shafts into the arm set Slightly loosen the black knobs of the mounting fixture and seat onto shafts The arm set must be fully seated 7 Secure the arms to the T2 shaft inner shaft using six M4 x 20 SHCS and six lockwashers Secure the arms to the T1 shaft outer shaft using six M4 x 25 SHCS and lockwashers Torque all using Appendix C Torque Settings on page 114 8 Remove the red arm mounting fixture NOTE Save the mounting fixture for possible future use If the robot is returned to Brooks for service or shipped to another location the original mounting fix ture must be used Also keep the fixture close to the robot Additional pro cedures will require the use of this fixture 9 Set the arm state of the robot to on Brooks Automation Revision 2 2 3 39 Installation MagnaTran 7 1 User s Manual Mou
37. Brooks Automation may use and distribute any of the information provided in any way it deems appropriate Please specify by Page any errors you have found Please suggest any topics or information that is not covered Brooks Automation Revision 2 2 Reader s Comments MagnaTran 7 1 User s Manual MN 003 1600 00 Additional comments Name Title Company Address City State Zip Country Phone Fax Brooks Automation Inc 15 Elizabeth Drive Chelmsford MA 01824 Phone 978 262 2400 Fax 978 262 2500 Brooks Automation Revision 2 2
38. Disconnect the following cables from the T1 T2 printed circuit board fan P1 T1 motor P5 T2 motor P6 24V IN P3 and Z Axis Driver Board P4 Remove the M3 x 14mm SHCS with M3 flat and lock washer 4 places that mount the T1 T2 driver board to the bottom of the PCB Mounting Bracket See Figure 12 4 Disconnect the T1 T2 driver board from the Personality board Replacement Procedure 9 42 1 2 Connect the T1 2 Board to the Personality Board P2 Install the T1 T2 Board using the M3 SHCS with locks and flats 4 places Connect the cables Replace the Lower Cover Mount Assembly Install the robot protective covers Connect the robot power cable and communication cables Apply power to the robot This completes the T1 T2 Axis Driver Board replacement procedure Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Z Driver Board Replacement Z Driver Board Replacement NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools Performing the Z Driver Board replacement procedure requires the following tools Medium flat head screwdriver M3 hex wrench Removal Procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power to the robot and disconnect the power and c
39. Field size 20 max The name assigned to physical I O using the MAP command io state Field size 20 max The status of the I O referenced by the io name Note that the I O state returned will be defined by the type of I O being referenced See Table 6 5 for responses to each I O state and descriptions of each response NOTE At least one argument must be specified Description This command is used to monitor the current status of physical I O by referencing the I O names defined using the MAP command The response from issuing this command is defined by the I O command type being referenced refer to Table 6 5 for a list of Operation Interlock I O types their ROI O STATE responses and a description of the responses NOTE Using the ALL variable will cause a list of all I O names and their states to be gen erated following the response format shown above Request commands display the current value stored in RAM See Also SET IO STATE MAP Brooks Automation 8 84 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request I O State Examples The following examples provide an overview of the responses for the different types of I O Note that the current arm status of the robot does not apply to this command The following example returns the current status of the I O defined by P GAUGE 1 set using the MAP command which in this case is a pressure sensor indicating that there is a high pre
40. Format CREATE WSPACE name Arguments name Specifies the alphanumeric 20 character name of the new work space Description This command is used to create a new work space See Also PASIV M Safety Feature Operation on page 6 58 The following names are reserved for the robot and may not be used with this command HOME WORK SPACE ALL STN11A STNO6B STNO1A STN12A STNO7B STNO2A STN13A STNO8B STN03A STN14A STNO9B STNO04A STN15A STN10B STNO5A STN16A STN11B STNO06A STNOIB STN12B STNO7A STNO2B STN13B STNO8A STNO3B STN14B STN09A STNO04B STN15B STN10A STNO5B STN16B Brooks Automation 8 26 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 DIO Start DIO Start Purpose Turns on the Discrete I O DIO control interface of the robot Format DIO START Description The MagnaTran 7 robot may be controlled and monitored using discrete I O lines instead of using the serial communications link This command disables all serial control functions and enables Discrete I O control A programmed 4 second delay follows the DIO START command while internal func tions ensure proper power up Outputs are driven low for this period See Also DIO Stop on page 8 28 MISC I O Communications on page 5 9 Discrete I O Control DIO on page 6 45 Example The following example turns on the Discrete I O control function DIO START Brooks Automation Revision 2 2 8 27 Command Refere
41. MN 003 1600 00 Discrete I O Control DIO ACCELERATION ARM A Changes the arm A speed Arm motions may have two speeds Slow velocities and accelerations safe for wafer transport Fast higher velocities and accelerations when no wafer is on the end effector NOTE The actual speed of the arms is determined by both the End Effector A and End Effector B parameters Full speed will only be achieved if both end effectors are empty Table 6 16 DIO Acceleration Arm A LOW HIGH OPTION A HIGH speed LOW speed OPTION B LOW speed HIGH speed ACCELERATION AT ARM B Changes the arm B speed Arm motions may have two speeds Slow velocities and accelerations safe for wafer transport Fast higher velocities and accelerations when no wafer is on the end effector NOTE The actual speed of the arms is determined by both the End Effector A and End Effector B parameters Full speed will only be achieved if both end effectors are empty Table 6 17 DIO Acceleration Arm B LOW HIGH OPTION A HIGH speed LOW speed OPTION B LOW speed HIGH speed Brooks Automation Revision 2 2 6 51 Operation MagnaTran 7 1 User s Manual Discrete I O Control DIO MN 003 1600 00 DIO Output Signals POWERED Indicates the robot servos are turned on or not Table 6 18 DIO Servo Control LOW HIGH OPTION A Servos ON Servos OFF OPTION B Servos OFF Servos ON
42. Maintenance and Repair MagnaTran 7 1 User s Manual Robot Calibration Procedure MN 003 1600 00 Robot Calibration Procedure All calibration on the robot is performed at Brooks Automation by trained personnel The following procedure is used to calibrate the MagnaTran 7 on Brooks Technical Support recommendation only N CAUTION The following commands are NOT used in the initial set up or the nor mal operation of the robot These commands are used in repair oper ation only Brooks Automation recommends contacting Brooks Technical Support before beginning this procedure Required Tools and Test Equipment Performing this procedure does not require any tools Setup Strategy This procedure will calibrate the robot All current values will be reset Read all procedures before beginning Z N WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 Calibration Procedure Perform the following procedures in the presented order 1 Encoder Setup on page 9 66 2 Motor Electrical Phase Calibration on page 9 69 3 Reset the Home Position to the User Preference on page 9 73 4 Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 5 Resetting Mount Position on page 9 76 Brooks Automation 9 36 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Personality Board Replacement
43. Retroct Figure 6 12 Control Display Module with Emergency Stop No Emergency Stop Button optional An optional CDM is obtainable without the EMS button This CDM will not meet SEMI 92 93 safety standards STOP Key The STOP key stops any action in progress as fast as possible based upon the wafer presence status of each arm After a stop the MagnaTran 7 robot remains referenced allowing it to execute any additional commands NOTE STOP and Emergency Off are the only commands the MagnaTran 7 will respond to when it is in the midst of carrying out a command The robot will ignore all other keys including the Off key unless it has finished the Brooks Automation Revision 2 2 6 65 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 previous command Control Modes 6 66 The CDM has two operating modes a Control mode and a Monitor mode After briefly displaying the power on message the CDM will display the Mode Selec tion Prompt for selection of an operating mode with the following message GET CONTROL FOR THE CDM YES NO CDM Control Mode Selecting YES will enable Control Mode providing access to all control and monitoring functions on the CDM and will restrict the host controller to moni toring functions only If Control Mode has been entered select the desired control or monitoring function from the left
44. SVLV SEN etc name Response field size 20 max The name of the sensor at the specified location If there is no sensor at the specified location NONE will be returned state The current state of the specified sensor BLOCKED Water blocking the sensor Brooks Automation 8 106 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Station Option CLEAR The sensor is not being blocked SAFETY PUSH Response field size 6 Specifies the distance in microns the end effector may move within the zone of a Process Module SAFETY The distance the end effector will stop short of a station s R position during a PLACE PUSH The distance the end effector may push the wafer past a station s R position during a PLACE POST The theta coordinate of the VIA point in milli digress POSR The radial coordinate of the VIA point in microns Description This command requests the optional station related parameters NOTE Request commands display the current value stored in RAM See Also Set Station Option on page 8 142 Set Station Option VIA Point on page 8 145 Store Station Option on page 8 167 Example In the following example arm A is currently extended in station 3 slot 2 and in the down position The robot returns the current configuration and status of the Station 5 Wafer Sensor at the Extend position Since the wafer sensor has not been configured NONE is returned
45. See Also PASIV M Safety Feature Operation on page 6 58 Brooks Automation Revision 2 2 8 155 Command Reference MagnaTran 7 1 User s Manual Set Z Brake MN 003 1600 00 Set Z Brake Purpose Controls the brake for the Z drive N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format SET ZBRAKE state Arguments state ON Activates the Z drive brake OFF Releases the Z drive brake Description This command is used for troubleshooting and maintenance purposes only With the Z brake OFF manual movement of the of the Z axis is permitted See Also See Restore the Home Position to the Factory Settings on page 9 71 for instructions on the proper use of this command Brooks Automation 8 156 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Communication Store Communication Purpose This command is used to store the current setting of the serial communications and command execution modes Format STORE COMM M B FLOW LF ECHO CHECKSUM ERRLVL I DREP Arguments M B Stores the serial I O communications mode FLOW Stores the command execution mode LF Stores the linefeed mode CHECKSUM Stores the checksum DREP Stores the data reporting mode NOTE At least one argument must be specified Description Stores the current I O configuration in non
46. The robot will move the A arm to the R axis coordinate 13 500 mm 531 in MOVE R ABS 13500 Brooks Automation Revision 2 2 8 53 Command Reference MagnaTran 7 1 User s Manual Pick MN 003 1600 00 Pick Purpose Causes the 3 Axis robot arm to pick a wafer from a specified station and slot number Format PICK station SLOT slot ARM arm Arguments station The number of the station from which to pick Range 1 16 SLOT slot The number of the slot from which to pick At a multi slot station the slot number must be specified only to target a slot number other than one ARM arm Ihe arm A or B which will perform the pick The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional Description 8 54 The speed and acceleration at which the robot moves during a PICK operation is dependent on the status of the pans with or without wafers In any case the robot always moves at with wafer slow speed and acceleration for all three axes when there is a wafer on one of the arms If both arms are empty the robot uses high speed for all three axes If a PICK failure occurs all motions will be performed at with wafer speed until a successful material hand off has been accomplished NOTE The PICK command is meant to be used with robots that have the Z Axis option installed If using a 2 axis robot this command may also be used for PICK and PL
47. a cleanroom environment Remove the bag from the robot and carefully inspect the robot for signs of damage that may have occurred during shipping Brooks Automation Revision 2 2 3 7 Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 Installation Procedure The MagnaTran 7 Robot is supplied in either the two axis configuration or it is avail able in a three axis configuration The following procedures provide the information required to install either configuration of the robot The MagnaTran 7 robot is supplied in a top mount configuration allowing the robot body to be lowered into the chamber where it will be used Once in place in the cham ber the mounting flange is bolted into place from the bottom side of the chamber and the arms are lowered into the chamber and attached to the robot Prepare Surface for Mounting Refer to Figure 3 3 for detailed dimensions and finish specifications for top mounting the robot Inspect the location cut and finish of the appropriate clearance hole seal flange and mounting and alignment holes in the chamber to accept the robot NOTE Both the two axis robot and the three axis configurations of the MagnaTran 7 robot require the same chamber preparations 1 Ensure that all clearance holes mounting holes and alignment holes are the proper size burr free and are properly located 2 Ensure that all surfaces are properly finished per notes in Figure
48. and all servo position and transition data is stored in a table that may be read at any time Only one sensor may be configured to collect servo position data at a time Enabling another sensor will clear all existing data from the Seroo Position Table Sensor Interface Specifications The robot is designed to accept inputs from any sensor that provides an open collector current sink The sensor must be capable of meeting the requirements described in MISC I O Communications on page 5 9 The robot provides power and ground for all sensors refer to the connector pin outs provided in Chapter 5 Operational Interfaces for more information Ex Re Sensor Commands The following commands are used to create define and verify the Extend Retract Sensors Set Station Sensor on page 8 147 Request Station Sensor on page 8 108 Go To on page 8 33 Set Interlock on page 8 128 Request Interlock on page 8 80 Brooks Automation Revision 2 2 6 37 Operation MagnaTran 7 1 User s Manual Wafer Presence Sensors Radial Motion MN 003 1600 00 Wafer Presence Sensors Radial Motion Radial Motion Sensors detect wafer presence on the specified arm while the arm is traveling in radial R axis motion The R MT sensor will verify the success of any wafer transfer operation PICK PLACE GOTO XFER The Radial Motion Sensor R MT feature was designed to determine the load on the end effector of the Brooks Automation Leapfrog arm set Because of the sam
49. baud Press the NEXT key until 9600 baud is displayed and press the SAVE key 4 The screen now should display the communications parity Press NEXT if necessary until Even is displayed and 5 Press SAVE 6 The screen now should display the character format Press NEXT if necessary until 80 characters is displayed and Jf Press SAVE 8 The three key labels should now disappear and the screen will display only a blinking cursor in the upper left corner 9 The CDM is now fully reset RESET THE ROBOT 1 Press the reset button on the robot or turn the power off and on and wait 30 seconds 2 Press the OFF ON key on the CDM keypad and confirm proper operation Brooks Automation 9 82 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Maintenance and Repair Firmware Upgrade Firmware Upgrade Brooks Automation provides upgrades for the MagnaTran 70 77 firmware which can be downloaded on line The upgraded firmware will contain all of the latest com mands new revisions version label and build dated embedded in the software Tools Personal Computer PC user provided Serial Cable see Serial Communication SIO1 on page 5 5 Remote Software Update Procedure Call Brooks Automation Technical Support for access to downloading the firmware upgrade and additional instructions on setting up the PC the robot and transmis sions The following procedure exp
50. m 001 mm NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Brooks Automation 8 92 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Position Destination Description The numbers given represent the physical destination location of the pan for the cur rent particular motion The destination location will depend on where the arm is in the move cycle If the request is made after an abort or the robot is standing still the last move desti nation will be displayed The number and order of the data fields returned will reflect the number and order of the Request Use of ALL implies that the return data values will appear in the stan dard order ARM R T Z See Also RQ POS ABS Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot returns the current position of the A arm in absolute coor dinates RQ POS DST ALL POS DST 175003 181007 21032 Brooks Automation Revision 2 2 8 93 Command Reference MagnaTran 7 1 User s Manual Request Position Station MN 003 1600 00 Request Position Station Purpose Returns the current position of the pan in station coordinates Format RQ POS STN ARM arm R T SLOT Z Or RQ POS STN ARM arm ALL Response POS STN ex re location station slot up dn location or POS S
51. materials to determine proper handling 1 Remove any hazardous materials from the MagnaTran 7 s surfaces following the facility s procedures for those materials 2 Clean all exposed surfaces using cleanroom wipes moistened with isopropyl alcohol N CAUTION Wipe must be moistened only squeezing the wipe should not cause any isopropyl alcohol to drip Do not allow alcohol to come in contact with bearings seals etc 3 Once all contaminates have been removed use cleanroom wipes moistened with DI water to remove any residues Brooks Automation Revision 2 2 9 13 Maintenance and Repair MagnaTran 7 1 User s Manual Robot Cleaning Procedure MN 003 1600 00 9 14 N CAUTION Wipe must be moistened only squeezing the wipe should not cause any water to drip Do not allow water to come in contact with bearings seals etc Once all residues have been removed use dry cleanroom wipes to dry all sur faces Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 End Effector Pad Cleaning Procedure End Effector Pad Cleaning Procedure Collection of debris and other contaminants on the End Effector pad surface may cause wafer slippage For optimum robot and system performance pads should be cleaned as a part of normal servicing or to remove contaminates deposited on it from the process or other sources Cleaning procedures depend on the type of pads Kal rez Stainless St
52. same time and with the same velocities and accelerations For radial motion how ever the situation is more complex Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Theory of Operation Although the arms are driven simultaneously by the shoulder shafts one always extending while the other will stay at the retracted position the linear motion profile of the two arms will differ as the arms move from Arm A fully extended to Arm B fully extended The software set velocities and accelerations for radial motion apply only to the veloc ity and acceleration applied to the shoulder shaft rotation The speeds for arm motion are based upon the robot s knowledge of wafer presence on the end effectors Wafer presence on each end effector is determined in several ways wafer presence will be assumed after a PICK wafer presence will be assumed after power up and wafer absence will be assumed after a PLACE The rotary motion of the shaft is profiled to accomplish smooth motion as the arms are accelerated from or brought to rest The software set profile always applies to both arms the profile of one arm cannot be set to a different value than that of the other arm since they are coupled at the shoul der shaft The fact that the linear motion profiles of the two arms differs at various points along the path of motion is strictly a result of the kinematics of the Bisymmetrik arm struc tu
53. the maximum Z travel of the robot by issuing the command RQ ARMS ALL The maximum Z travel for the robot will be provided in the miscellaneous arm data in the following example format total z travel 0 035000 Dimen sions are given in meters With the robot in the maximum Z position use either shims or gap feeler gauges to verify the following dimensions have been maintained 0 024 0 6mm between the Z upper microswitch and the z upper microswitch flag 0 040 1 0 mm between the Z upper hard stops qty 2 and the top of the robot T1 T2 motor assembly If these dimensions are not correct see Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 Procedure complete Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Z Hard Stop and Overtravel Limit Switch Adjustment Z Hard Stop and Overtravel Limit Switch Adjustment The following procedure is used when the Z Home position is reset This procedure adjusts the Z hard stops and the Z microswitch to the new Z Home position NOTE It is not necessary to remove the robot to perform this repair procedure 1 Turn off power to the robot and disconnect the power and communications connections to the robot 2 Remove the protective covers as shown in Figure 12 2 N CAUTION Observe proper ESD precautions when handling any electronic device 3 Reconnect robot power cable and CDM or serial communications
54. 1 m II INIT 436 d pi pis pie pu J QUE s a 9 13 SR ItoopF H OOpF h OOpF hoopF mee 9 14 4 E m x39 15 d 16 IN30R9 ohm ds o ppt inst c D IN16 d IN17 d 19 INTRLOCK SRC mE 9g 20 RN7 IN19 A yeeo i 1 OPUPO IN20 21 2 OPUP1 IN21 Q 22 3 OPUP2 IN22 9 23 4 7KNET 4 OPUP3 IN23 x 5 OPUP4 IN10 O 25 amp OPUP5 IN13 d BVP4 OPID CDM Not Present EMO BYPA i aa m 9 Becs QFND lot Present YPA 8 OPUP7 F1 FUSE IN25 9 28 9 OPUPS 29 1 8 4 o 24V ROBO 10 OPUP9 24V ISOO o N o t d 30 wF i PORE s Loire BESS CFP ia 4 fags AX wx 3 4 12 OPUPT11 RX 4 CDM PRRSENT ue IOPORT D2 36 3 IN P26 SPARE IN1 13 OPUP12 pr m da AERE MA n 3 1E IOPORT_D3 35 IN P27 SPARE IN2 14 OPUP13 OUTZ 4 iP le ISPORT D4 33 44 IN Pag AC EAE Yp PS 15 OPUP14 OUTS d OUT a see 2 38 Que r r aa Vpickuptmax 16 8 V D7 pa SPARE INS ane 9 al 8 a5 CSRNE OUTS d WZ RD PBO d IOPORT AO zi A tas BERE NG q IOPORT A1 9 P1 RNE IN15 A A1 PB3 d 39 RESET BBA P2RNE OUTS 716s pps 26 QUT PS P3RNE NL ISO OUT d OUTPUT pBe 27 OUT P6 P4 RNE 9 OUTT2 d PAREOUTS OUTPUT 5 PB7 28 OUT_P7 P5 RNE OPUPO 1 U22 8 4 U23 OUT10 d PAREOUT1 OUTPUT RS DB50 RAX x TX 1 CS pco 16 QUT P amp P6 RNE OUT f 2 Lad NN 7 n OUT ISO0 1 20 OUT R10 ohm q ERA MX deg Sus Peo 17 QUT P9 RNE OPUP1 3 BT OUT ISO1 2 9 OUTI q 2 pco 18 QUT P10 SPAREQUT1 Ea wy OUT 1802 a 2 02 Mig OUT lt z o SIO2 bog 9 OUT P11 SPAREOUT2 OUT PI 4 Na hal 5 x OUT I
55. 11 27 124 Battery Pack InstallallOft 5 5 460095 hhed ERRARE ERES ERE OR n 12 2 LL Protective over Removal 424 a beri cou bd DRE ec acceda He 12 4 PERS TAM SWS 2244s C242 IE 4 PILAE d LU VER S Trad PRA Rd eur Ela ewes 12 6 12 4 Lower Cover Mount I O Board Removal 00 00008 12 8 1250 Theta Board Removal j 4425322524244342 244443 stea nin daeina ada 12 10 Brooks Automation xiv Revision 2 2 MagnaTran 7 1 User s Manual Figures MN 003 1600 00 126 Personalty PCl04 board Removal 5 254452 RE ERR ERR 12 12 12 7 lt 2 Du mverboard Removal 25255229224 iep EE v eR qid vice d cR a 12 14 1259 Radial Axis Board Removal cic cd ep CEP RR CE 12 16 Brooks Automation Revision 2 2 XV Figures MagnaTran 7 1 User s Manual MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation XV1 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Table Title 1 1 2 1 2 2 Emergency Action Matrix 2 3 Material Safety Information 3 1 Packing Checklist Reference 3 2 Arm Set Mounting Kits 5 1 5 2 RS 232 RS 422 Protocol 5 3 5 4 Switch Settings 5 5 RS 232 Pin Assignments SI02 5 6 5 7 5 8 Marathon Express Connector 5 9 CDM RS 232 Protocol 5 10 5 11 6 1 Arm Speeds 6 2 Arm Speed Script File 6 3 Station Parameters 6 4 Indicator Functions 6 5 Operational Interlocks 6 6 Slot Valve Interlock States 6 7 6 8 DIO Drive Enable 6 9 DIO Reset Error 6 10 DIO MOVE 6 11 DIO Move Type 6 12 Standard MagnaTran 7 Models
56. 1600 00 Mount the Arm Set NOTE Save the mounting fixture for possible future use If the robot is returned to Brooks for service or shipped to another location the original mounting fix ture must be used Also keep the fixture close to the robot Additional pro cedures will require the use of this fixture Set the arm state of the robot to on Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arms should be 180 apart This can be verified by observing the wrist plates relative to the center of the robot If vibration is observed or the alignment is off the radial home must be reset Follow the procedure Reset Stations When the Home Position is Reset on page 9 75 Brooks Automation Revision 2 2 3 45 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 T1 PINS Figure 3 9 MagnaTran 7 MOUNT Position Brooks Automation 3 46 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Install End Effector Install End Effector 1 Verify flatness using the procedure Verifying Flatness of Robot s End Effector on page 7 5 2 Install the end effector using the procedure End Effector Replacement on page 9 29 Brooks Automation Revision 2 2 3 47 Installation M
57. 179 User I O Command Parser Errors 6 Loobde as vd RARE RE WEd d V EEdasdqu 8 179 Station betup EOTS cese sbecremrrkete9 Re ERR EORR Tra Rare d 8 180 Robot Merial ENRORSL 4443 xe ki exl EE Ad dai bd e4k PE Rhaida des 8 181 Dispatcher Communications BEEOIB i242 od A ER E RO REA RR 8 181 Robot Wafer Sensor EO odd poaae Eesdd aa eterda Ade RESG ADR Y EES a dpa 8 182 COnlpuragDDn EOTS nak cebad ba Shaded AnI OE EHE ER o ab 8 184 MOOL PIU Sins aca heat haere aso eed RU rad eae pees eE EEES 8 185 I O Mapping ETOT 242 244 ciara SORS RO LER RE RR Ad cones SRM A aes 8 185 Inclusion Zones Workspace Errors secet menthe 8 186 Motion Command Task Errors iid dress ad Xanh er ka Ee 8 187 IA Tunc C lock EmO i ose XIX VEDRVRSDED ME EIE ERI REIP S 8 187 CDM Related PCOS orantes aebtr fear tr k 4sdieigddeRke ds d 8 187 COInm Port EVER o a9 bc up deena EC EOS EE NE Xd RA 8 188 System Task Kernel Related BIfOIES sco 2vesea eve v er a ses 8 188 Won Volatile Memory Errors Lisa sux V EE ERRAT CERT EEP EET Aq da 8 188 Mail System Related Errors a3 454045004 P E REOEROR ERREUR ERRARE RIVE 8 188 Monitor Trace Error COdES i ead Cb wE a 44038 ERGO seas RAE Ea ERA 8 188 System Initialization and Error Log Errors amp i22sadua dade dr RR ws 8 189 Brooks Automation Revision 2 2 ix Contents MagnaTran 7 1 User s Manual MN 003 1600 00 Robot Motion Control Processor EEfols 422224 2 azar PR ERR n 8 189 Maintenance and Repair Preventive Maintenance
58. 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Command and Response Structure Error Response Errors fall into two categories Command Specific Errors and Generic or Multi Command Errors In either case return codes for all errors are unique A complete listing of the error codes appears at the end of this chapter If an error occurs during either command processing or opera tion the robot sends an error signal to the host controller followed by a carriage return The response shown below indicates that the response is a Packet Mode error response ERR and the error 0002 ERR 0002 Ready Responses Regardless of whether an error has occurred the robot returns a Ready string at the time the command is acknowledged The response shown below indicates that the response is a Packet Mode ready response _RDY Command and Response Compatibility The following guidelines have been established by Brooks Automation to ensure compatibility between customer software programs and future revisions of the Mag naTran 7 Robot s command and response structure 1 Old command mnemonics and data fields will not be deleted New functions may be added to the command tree by providing additional options on any mnemonic level Customer controller software should not therefore interpret unknown mnemonics as errors New variables may be added to existing commands When using ALL in a REQUEST command the software will r
59. 2 2 MagnaTran 7 1 User s Manual Contents MN 003 1600 00 Bohbot INS ANON i 4243229 CURE AHOCE ERRORS CUORE ER RO PR 3 10 PD CONES sooo rada d Rt uq FERT AQEPRIEEA SA TEC PEN 3 10 Fleca Connec O iud cates prdu pads Cad d db edd a pd p bed dir 3 10 Communication Connections cea odere ckers RES a RS PRRS 3 14 Control Display MODUS 66 45 da Dx VOCE RERU EEE a ER eas 3 17 Software Installation iia da i44 FER ERAATRERREAX DAR RR RE d RE TR RRERAA RR 3 19 LIU oois4Epes3Ote or orb DRIED PCIE Pbed TOT HR PRe REOS 3 20 Mechamcal C Dee S adsaad ha doped e yd ERR ERE RERRR ER ir pi kA FR 3 20 ig Check UTEM 3 20 Initial Powerup Beguelee 143444 inde hae idied eae debe neds ERE HR CHE Roe de 3 21 Conte uration Compabbilily 56 0 ciendey ener etr e reo RR 3 22 Mouii HEAT BE Lora qain d ett edd o ER E opc dede ERO dE doo a 3 23 Mount the Mapnalran 7 Leapfrog Arm Set iisasce isa ena 3 24 Mount the MagnaTran 7 1 Bisymmetrik Arm Set Hub Style 3 29 Mount Magnalran 6 BiSymmetrik Arm S bi ssviseiectiseesessaaees 3 34 Mount the Mapna Tran 6 Frogleg Arm Seti i cicccansciadeanieaasens 3 38 Mount the MagnaTran 7 BiSymmetrik Arm Set Cone Style 3 42 stal End PISBIOE asa cow d HEP Sea Eb d pP gon pb a HEP 3 47 Aue ond Callbrallot cua sqa daa dx ede p E UAE RAE VEA ERE EXER Kd d 3 48 Subsystems M echanieal oyo ei aaas 422944 aeons teat eye beak eae awe eees ERE d qa 4 2 iUc i MEM 4 2 luis ei oleo nm 4 3 Frame ASSQINDLS ida dde b
60. 43 Z Encoder Replacement 9 45 I O Board Replacement 9 48 Z Home Flag Sensor Board Replacement Procedure 9 50 Z Hard Stop and Overtravel Limit Switch Adjustment 9 53 Fuse Replacement 9 56 PC 104 CPU Board Replacement 9 58 Power Pak Replacement 9 63 Encoder Setup 9 66 Motor Electrical Phase Calibration 9 69 Restore the Home Position to the Factory Settings 9 71 Reset the Home Position to the User Preference 9 73 Reset Stations When the Home Position is Reset 9 75 Resetting Mount Position 9 76 Uploading and Downloading Station Values 9 77 Control Display Module Resetting 9 81 Firmware Upgrade 9 83 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Robot Removal Replacement Robot Removal Replacement The MagnaTran 7 Robot may be easily removed for servicing This allows complete access to all robot subsystems without having to work within the confined spaces of the system NOTE It is not necessary to remove the robot to perform any repair procedures Required Tools Performing the Robot Removal Replacement procedure requires the following tools A set of Allen wrenches in metric sizes Adjustable lift or hoist depending upon robot mounting style Removal Replacement Procedure 1 If this procedure is being used to replace a MagnaTran 7 with a MagnaTran 7 robot in the same cluster tool all station values from the old robot can be easily loaded into the new robot See Uploading
61. 45 for references on setup and descriptions of commands Connection of external devices to the MagnaTran 7 Robot for monitoring and control through discrete I O lines is done through the 50 pin connector located on the I O panel of the robot The Low Side interface requires the input to be grounded to the switch state See Figure 5 5 for a diagram of the low side circuit Marathon Express High Side Interface Board The custom designed Interface for the Marathon Express Cluster Tool provides access to the serial communication ports through the same connector as the digital I O portion This connection from the robot is taken to an I O distribu tion hub where signals are separated The discreet I O interface is accessed by a 50 pin D subminiature connector on Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Electrical System the face plate This connector provides 20 optically isolated high side inputs and 20 optically isolated high side outputs designed to operate at 24VDC nominal The 24 VDC operation is provided through the system The high side board has the following connectors POWER Main Power Connector on the face plate but not actually on the I O board CDM Dedicated Control Display Module CDM port SIO1 Main Serial Communications port RS 232 or selectable RS 422 SIO2 Secondary RS 232 port MISC IO Discrete I O Port The high side board has the following indicators 24
62. 7 1 User s Manual Command Reference MN 003 1600 00 Place Place Purpose Causes the 3 Axis robot arm to place a wafer at a specified station and optionally slot number Format PLACE station SLOT slot ARM arm Arguments station The number of the station to which to place Range 1 16 SLOT slot The number of the slot to which to place if this station has been estab lished as a multi slot station At a multi slot station the slot number must be specified only to target a slot number other than one ARM arm Ihe arm A or B which will perform the pick The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional Description The speed and acceleration at which the robot moves during a PLACE operation is dependent on the status of the pans with or without wafers The robot always moves at with wafer slow speed and acceleration for all three axes when there is a wafer on the active arm If the active arm is empty and the inactive arm contains a wafer the robot moves at medium speed for the R axis but slow speed for T and Z If both arms are empty the robot uses high speed for all three axes If a PLACE failure occurs all motions will be performed at with wafer speed until a successful mate rial hand off has been accomplished NOTE The PLACE command is meant to be used with robots that have the Z Axis option installed If using a 2 axis robot
63. Also see the Brooks Automation Marathon Express Cluster Tool Integration Platform User s Manual for additional interlocks if purchased with the Brooks System of components Brooks Automation Revision 2 2 2 5 Safety MagnaTran 7 1 User s Manual Mechanical Hazards MN 003 1600 00 Mechanical Hazards 2 6 The Brooks Automation MagnaTran 7 robot is a complex electromechanical device Only persons with the proper training should attempt to service or operate the robot All power to the robot must be disconnected as outlined in the facilities lockout tagout procedure before servicing or injury may result from the automatic operation of the equipment The proper precautions for operating and servicing remotely con trolled electro mechanical equipment must be observed These precautions include wearing safety glasses and any other precautions specified within the facility where the robot is being used N DANGER Moving mechanisms have no obstruction sensors and can cause seri ous personal injury or death Whenever power is applied to the robot the possibility of automatic movement of the robot arms exists which could result in personal injury HEAVY LIFTING Ergonomic Hazard The MagnaTran 7 Drive weighs 29 5 kg 65 Ibs 3 axis or 21 kg 46 5 Ibs 2 axis Failure to take the proper precautions before moving it could result in personal injury PINCH POINT Moving Parts Present Do not operate the robot without the p
64. Automation Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix F Relay I O Option The J7 connector of the Relay I O board 002 4212 01 contains the OUTPUT pins for the robot The pin outs functions and hexadecimal representations for the J7 connec tor are presented in the following table Table 11 21 Relay I O Output J7 Connectors Discrete I O Outputs yr Genercruncion ReltyVOQpertional Hee 1 OUTPUT 0 DIR2_GV_CLS_INHBT 0x01 2 OUTPUT 1 DIRA4 GV CLS INHBT 0x02 3 OUTPUT2 DIR6 GV CLS INHBT 0x04 4 OUTPUT3 DIR8 GV CLS INHBT 0x08 5 OUTPUT 4 POWER_DOWN 0x10 6 OUTPUT 10 BATTERY_LOW 0x400 7 OUTPUT 11 0x800 8 24 V host 9 OUTPUT 5 DIR3_GV_CLS_INHBT 0x20 10 OUTPUT 6 DIR5_GV_CLS_INHBT 0x40 11 OUTPUT 7 DIR7_GV_CLS_INHBT 0x80 12 OUTPUT 8 DIR9_GV_CLS_INHBT 0x100 13 OUTPUT 9 DIR1_GV_CLS_INHBT 0x200 14 OUTPUT 12 0x1000 15 OUTPUT 13 0x2000 Brooks Automation Revision 2 2 11 29 Appendices Appendix F Relay I O Option MagnaTran 7 1 User s Manual MN 003 1600 00 11 30 The PowerPak 002 4037 02 a robot accessory communicates to the robot through pins located in the main 24 volt power cable of the robot These pins are internally linked to the Relay I O board at the J6 connector The J6 connector is internal to the robot The pin outs functions and hexadecimal representations for the J6 connector are prese
65. Automation Revision 2 2 12 5 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Figure 12 3 Limit Switches Brooks Automation 12 6 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawings Illustrated Parts Catalog Table 12 3 Limit Switch Parts List dg Part Number Description Oty 1 002 2194 01 Upper Limit Switch Assembly roller switch with cable 1 2 002 2976 01 Limit Switch Mounting Bracket 2 3 002 2195 01 Lower Limit Switch Assembly roller switch with cable 1 4 802 4010 10 Screw PHS M2 x 10mm slotted SST 8 5 802 0000 10 Washer M2 Lock SST 8 6 802 0000 00 Washer M2 Flat SST 8 7 002 2977 02 Top Z Travel Adjustment Bracket 1 8 002 2977 01 Bottom Z Travel Adjustment Bracket 1 9 805 8025 A0 Screw M5 x 08 x 25mm hex 2 10 803 5008 00 Screw SHCS M3 x 8mm SST 4 11 803 0000 10 Washer M3 Lock SST 4 12 803 0000 00 Washer M3 Flat SST 4 13 780 0022 04 Bumper Self stick PVC Black Cyl 09H x 5d 4 14 808 1216 30 Screw SFHS M8 x 16mm 4 Brooks Automation Revision 2 2 12 7 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Figure 12 4 Lower Cover Mount I O Boa
66. Automation Revision 2 2 9 77 Maintenance and Repair MagnaTran 7 1 User s Manual Uploading and Downloading Station Values MN 003 1600 00 Uploading Station Values Using a Computer 9 78 If a CDM is not available to upload and download station values then a computer with a terminal emulator program may be used The following procedures upload and download station values using a computer 1 Ensure the computer has a terminal emulator program Establish serial com munication between the computer and serial port 1 of the robot Reference the Magnatran 7 User s Manual Operational Interfaces Section for additional information on establishing serial communication The communication set tings for the Magnatran 7 robot are Port Configuration RS 232 or RS 422 Handshake No Baud Rate 9600 Parity Bits None Data Bits 8 Stop Bits 1 Parity None RTS CTS No XON XOFF No When serial communication is established the robot will respond with one of the following prompts pending the robot communication settings Robot Communication Prompt Monitor Mode RDY Packet Mode Monitor mode is a user friendly communications mode All responses from the robot are descriptive and easy to understand Therefore it is recom mended but not necessary to set the robot communication settings to Monitor Mode using the following command Do NOT store this change to the commu nication setting SET COMM M B MON Request the station va
67. BTO The Z axis location in microns of the Wafer Transfer Plane which is also the Up position of the robot arm in Station 1 LOWER The distance in microns below the Wafer Trans fer Plane at which the Down position of the robot arm is located NSLOTS The number of slots at that station PITCH The uniform distance in microns between the slots Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Theory of Operation Station Coordinate System The station coordinate system provides a convenient shorthand for identifying spe cific locations for the robot to move to or from Each station is identified by its Theta position angle from Home its Radial position amount of arm extension and optionally its Z position vertical distance from Home and Lower By identifying the stations in this manner it is only necessary to provide the robot with the station num ber instead of the complete coordinate set each time a command is issued to the robot The shorthand system assigns a coordinate location for T R Z up and Z down Station numbers are assigned to the robot that represent the modules connected to the system where the MagnaTran 7 robot is installed All station assignments are depen dent upon the specific system configuration Assigning a station number for each module connected to the system allows that module to be referenced by station num ber instead of by coordinates Thi
68. CW CCW T UP DN Z JOG UNREFERENCED Z Brooks Automation Revision 2 2 6 71 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 To insure that the arm can move from difficult positions Jog mode allows the user to move the arm even if it has lost its referencing Since the location of an unreferenced arm is undefined motion beyond the allowed limits is possible conceivably resulting in impact with the Z axis mechanical stops top and bot tom or the chamber interior The module warns the user that the user is oper ating in an unreferenced mode Wafer Xfer Allows the user to execute a wafer transfer to or from a specified station There are two transfer options available PICK and PLACE When Wafer Xfer is selected the CDM will request selection of the arm to be used with the fol lowing message TRANSFER USING WHICH ARM 1 ARMA 2 ARMB Press either 1 or 2 on the numeric keypad to select the arm to be used Once the arm to be used is selected the CDM will request selection of the sta tion with the following prompt TRANSFER WITH ARM _ STATION _ enter STN lt CR gt NOTE In the preceding display presented on the CDM the _ indicates that the CDM will display the selected arm and station Enter the number of the station to be involved in the transfer using the numeric keypad and press the lt CR gt key Once the station is selected the CDM w
69. Color Description Part Green 75 Durometer Urethane 001 0929 03 Red 55 Durometer Silicone 001 0929 04 Black 65 Durometer Silicone 001 0929 05 Blue Green 75 Durometer Silicone 001 0929 06 Table 9 3 Adhesive Backed Pads Diameter Thickness Part 0 25 in 0 006 in 000 5281 01 0 25 in 0 012 in 000 5281 02 0 13 in 0 006 in 000 5281 03 0 13 in 0 012 in 000 5281 04 NOTE Part numbers provided in the pad replacement tables are for 1 piece Most end effec tors require 3 pads Grommet Style Pad Replacement Replacing the pads requires no special tools or materials They are press fit by hand into holes in the end effector When installing a new pad note that one side has a molding burr on it This burr must face down away from the wafer Be sure to orient the pad as shown in the figure so that the molding burr is on the bot tom of the end effector where it will not interfere with wafer handling Brooks Automation 9 34 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 End Effector Pad Removal Replacement Figure 9 3 End Effector Pad Grommet Style Adhesive Backed Pad Replacement The adhesive backed pads may be pulled from the end effector and the metal surface cleaned with ethanol or isopropyl alcohol Carefully remove the backing from the new pads and install in the same location on the end effector Brooks Automation Revision 2 2 9 35
70. EEAAPCITEDPREE VEI CEDE d snes 9 24 Robot Removal Replacement a ios cssad tesa aae EX aradr PES ERR dd d a rt 9 25 Arm Bemoval Replacenenit 1224s aaa bre RERO ERRARE EERAR ELA PERS 9 27 End Eitetor Replacement a a 220lides ora ad ECRIRE oa ac a cR 9 29 End Effector Pad Removal Replacement 21 2224osa dk ces RR eda 9 32 Robot Calibration Procedure 0 0 ccc cece eee 9 36 Personality board Replacement 122222 5243244 EXeAd AE PER Y ARRRA ads 9 37 Wrist Band Aisne aio boa dca eR E DoLE KEE ETE RNa d eda 9 39 11 12 Axis Driver Board Replacement 42orre pedir brbRi p Ra ER 9 41 Z Driver Board Beplacement iii cina skies pEROERE ERROR CERE ER Rd 9 43 A Encoder Bepiace melli ocosdedaastvadQu eS EEEKERPURI RATED TE GAS 9 45 VO Dosard Beplsetienb a ivo edu biles er Ee ERE dob FER Rd Pau 9 48 Z Home Flag Sensor Board Replacement Procedure 0 64 4 0604008 o00as 9 50 Z Hard Stop and Overtravel Limit Switch Adjustment 9 53 Brooks Automation X Revision 2 2 MagnaTran 7 1 User s Manual Contents MN 003 1600 00 Puse Replacemerii 6 65434544449 D GEEHRTE HUC PEE ope TR 9 56 PC 102 CPU Board Replacement cade vesuer Qu hein v e En ua 9 58 Power Pak Replacement i ciis cud o edd a ade Rxube ax sui d db tide red 9 63 Encoder SGebipia s idend eee E LEER C OAERE S ESTA RR ERET T IRSE 9 66 Motor Electrical Phase Calibration 0 0 ccc cee eee eee 9 69 Restore the Home Position to the Factory Settings iicet 9 7
71. ER 8 22 ano Eee S aad d doredoe bu Ub 545 ee bs evades by diee Lydia 8 23 Configure Robot AppleallDt 2429242424 EXER ARA EAR PASEEAT 8 25 Create WOTKSpaCE cd LXX EEPVAEHECUPI CERA VEENA E OX PET TERR MEE 8 26 BS C SERRE IIR III 10 LL LT 0 ISTIS TETTE UPES 8 27 DIO SIOP obs de pica dei e ERERERER E EU ERR E Pad EORR REEF RODA ERE Te 8 28 DEDERIT a 1 4444 939 9 940094362 3 OU KR RE EAE IR od OC KE oboe ao 8 29 DRIIDRU BP esxqucpEPCREEERERERERTREPERIEPAS oo sees RC EPPPDAME 8 30 Find TS a ooa qa dee Sardo 0 Rp de Eo RR cede rk EHE ater eden d ee d 8 31 DN BD cessare eee ee eee ee eee ee ee ee eee ee ee d do udo d 8 32 Rae EE a eee PEIPER eb eae Gt ea Oe ee E 8 33 Go To Stanton Wih WTS ds 6 ooo 049 54490445 Eee ERAS ERA RETE tases 8 36 IQ eee eee Cee ee eT ee ee re eee a eee ee re ere er ee eee eee re 8 39 Pele te a chs ETE A E EEEE eee isi aaa eae 8 40 is ba oa be oa oa bey 0 9G S Ra Fed PX ee cae ces 8 41 ID TE hath ee ede ad exes hae tba ed eo eked edad dd 8 43 MiP ee se er errr errs Serr errr errr ere Teer eet errr errs ee 8 44 Map Pass Thronplt aiodaaaaaad dt 444 FA EE ODE ded d dob Re obe 8 49 BENE alssaAd 214234 Ebdactabiop ES ada dc bd addon iq haod beatae 8 51 hzc a eee re ee ee Pe ee ee ee TTD TTD 8 52 PER hades Soba oan dedita bi aoa ee dd es bees eee ia et 8 54 Fek es hea cub OT S d dd se Ronee Cae 8 56 La ee eee Tae eS a Oe ee a eee Se ee ee meee Ree hee a mee ee eee 8 59 Placewithan sas d 2mesiado qi e de 53 2 oes need cot Ges Ode a
72. HOME on T or Z NOTE To stop the robot from pinging and abort the HOME command enter lt CTRL gt lt C gt on the user keyboard Examples The following example homes the arm s R Axis by moving the arm to the home ref erence position HOME R In the following example arm A is currently extended and in the down position The robot will retract the arm and home the R axis If the Z Axis option is present the robot will lower the arms and home Z The robot will then rotate the arms clockwise or counterclockwise whichever is the shortest distance and home the T axis HOME ALL Brooks Automation 8 42 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Life Test Life Test Purpose Performs a continuously cycling life test on the robot s systems Format LFTST Description This test is used to exercise all mechanical systems within the MagnaTran 7 robot The life test performs continuous PICKS and PLACES between Station 1 and Station 2 NOTE Stations 1 and 2 must be defined before executing a life test Slot valves must be opened PICK STN 1 ARM A PLACE STN 1 ARM B PICK STN 2 ARM B PLACE STN2 ARM A To prepare for the test place a wafer at station 1 station 2 and arm B Example The following example starts the predefined life test sequence LFTST Brooks Automation Revision 2 2 8 43 Command Reference MagnaTran 7 1 User s Manual Map MN 003 1600 00 Map Purpos
73. IN2O0 input 21 46 DRV_OUT15 output 16 ERROR BIT 2 22 EXT IN21 input 22 47 DRV_OUT16 output 17 ERROR 23 Safety 48 DRV OUTI7 output 18 DISC CONTR Interlock 24 Safety 49 DRV_OUT18 output 19 SERVO Interlock CONTR 25 PWR_ISOL 50 DRV_OUT19 output 20 Brooks Automation 5 16 Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 MISC I O Communications Safety Interlock This feature provides an industry SEMI standard Safety Interlock for robot motion For example when the cluster tool s transport chamber lid is opened robot motion will stop and no other motion of the robot can be commanded Safety Interlocks may be connected to the MISC I O at pins 23 and 24 These pins are hardware connected to the safety interlock circuit See Figure 5 7 for the wiring con figuration Also see the Wiring Diagram in Chapter 12 for the typical external connec tions Minimum Wiring Typical Wiring Configuration Configuration P2 P2 22 IN TLK T INTLK2 22 25 mm ea 25 24 24 25 NORMALLY CLOSED 25 LL SWITCHES L OPEN MOTORS OFF Figure 5 7 Safety Interlocks The Safety Interlock feature provides a motor enable interlock to disable all the robot motors R T and Z axis motors for desired applications More specifically pins 23 and 24 of the MISC I O port must be electrically connected in order for the robot motors to receive power If
74. Interlocks The following example demonstrates single pin addressing Input designation 1 EXT IN1 DIGITAL IN 0x pin 2 DIGITAL IN 0x2 Input designation 23 EXT IN23 DIGITAL IN 0x pin 24 DIGITAL IN 0x800000 Output designation 0 DRV OUTO0 DIGITAL OUT Ox pin 31 DIGITAL OUT 0x1 Output designation 19 DRV_OUT19 DIGITAL_OUT 0x pin 50 DIGITAL_OUT 0x80000 The following example demonstrates multiple pin addressing Input designation 14 21 NUMERIC IN Ox pin 15 22 NUMERIC IN 0x3fc000 where 3 2 1 f 15 8 4 2 1 c 12 8 4 0 empty block 0 empty block 0 empty block In the following example if a slot valve is closed the robot will not attempt to extend at a station The following is assumed The slot valve sensor at Station 2 will have the assigned name STN_2_SLOT Slot valve sensor is a switch which is closed when the valve is open The switch is wired between a EXT INO pin 1 and GND pin 29 1 Establish serial communication NOTE DIO mode and CDM mode do not support the mapping functionality Brooks Automation Revision 2 2 6 29 Operation MagnaTran 7 1 User s Manual Operational Interlocks MN 003 1600 00 Map the command 2 Enter the following command MAP STN 2 SLOT SBIT SVLV SEN LOW TO DIGITAL IN 0X3 Refer to Map on page 8 44 for a complete description of command usage 3 To verify that the signal is present at the assigned digital input issue the fol lowing comm
75. Issue the following command MOUNT 5 Set the servos off SET SERVOS OFF 6 Install the arms on the robot For the following procedure the alignment fixture must be installed on the arm set Inspect the under side of the arm set and verify the mounting hardware is pro truding at 6 places If not work the screws until they protrude Position the arms so that when looking down on the robot the I O panel is facing you and arm A is to your right See Figure 6 7 on page 6 19 Using the alignment fixture place the arms on the T1 T2 shafts positioning the locating pins of the outer shaft into the arm set Seat onto the T1 shaft The arm set must be fully seated 7 Secure the arms to the T1 shaft outer shaft Using the M3 wrench fit the wrench into the 4 thruway holes and tighten the mounting hardware 8 Secure the arms to the T2 shaft inner shaft Using the M3 wrench fit the wrench into the 2 thruway holes and tighten the mounting hardware 9 Torque all 6 screws to 18 inch lbs Brooks Automation 3 30 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set 10 11 12 13 Remove the alignment fixture by loosening it s hardware NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped to another location the original fixture must be used Also keep the fixture close to the robot Additional procedures will require the use
76. MN 003 1600 00 Mount Mount Purpose Causes the robot to move to the mount new arms position which is defined as an R axis shaft angle of 90 and a Z position as established by the SET MOUNT Z com mand Format MOUNT Arguments None Description The actual executed sequence is Home R axis Home T axis Home Z axis Move slow speed along Z to the vertical mount position as established by the SET MOUNT command The default setting for SET MOUNT is 10 000 mm above the Home position Brooks Automation Revision 2 2 8 51 Command Reference MagnaTran 7 1 User s Manual Move MN 003 1600 00 Move Purpose Moves one or more axes to a specified location in physical coordinates If more than one axis is specified the move is one axis at a time N CAUTION MOVE is not interlocked Simultaneous three axis moves are allowed which could result in physical contact between the robot s arms and the chamber Format MOVE RITI Z ABS REL value ARM arm Arguments RITIZ Specifies the axis to be moved NOTE In single axis moves at least one argument must be specified ABSIREL Specifies the reference method to be used The options are ABS use absolute location REL use relative distance from previously commanded position NOTE One argument must be specified value Specifies the distance or location to which to move in integer value For the REL move type the amount is a relative dist
77. MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 Mount the MagnaTran 7 BiSymmetrik Arm Set Cone Style 3 42 N CAUTION Do not operate the robot until all set up procedures have been com pleted as damage to the robot or arms may result The mount position of the robot is preset at the factory The purpose of the mount position is to provide the operation clearance from the bottom of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a height of 10mm 10000 counts To mount the arms to the robot power connections and communications connections must be complete and verified Communication may be through the serial port with a computer or through the CDM The following procedure identifies the commands for both methods Mount Serial Communication 1 Ensure the arm state of the robot is off Issue the following command SET ARMS OFF 2 Move the robot to the mount position Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set Issue the following command MOUNT When the robot is in the mount position the 4 locating pins of the robot shafts should be oriented as indicated in Figure 3 9 3 Disengage the robot servos Issue the following command SET SERVOS OFF 4 Install the arms on the robot For the following p
78. MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set I O State The current status of the I O defined by SLT 1 DRV set using the MAP command which in this case is a SVLV CTRL is set to CLOSE SET IO STATE SLT_1_DRV CLOSE The current status of the I O defined by STN 4 WAFR SEN set using the MAP com mand which in this case is a NUMERIC_OUT is set to 13 indicating that wafer sen sors 1 3 and 4 are not blocked by a wafer SET IOSTATE STN 4 WAFR SEN 13 Brooks Automation Revision 2 2 8 131 Command Reference MagnaTran 7 1 User s Manual Set Load MN 003 1600 00 Set Load Purpose To set the load status for the specified arm Format SET LOAD ARM arm status Arguments ARM arm The arm A or B for which parameters are being set the default arm is A The ARM identifier is optional status Sets the load status for the specified arm ON Arm has a load on the specified end effector OFF Arm does not have a load on the specified end effector all moves will be at high speed UNKNOWN Unsure of load status default ON Description 8 132 This command sets the load status for the arm The load status is used to determine the speed of all motion commands The UNKNOWN status option is only available if the LOAD MODE is set to TRI Note that at power up the robot s arm s are assumed to be loaded The robot will continue to assume the arm s are loaded until either a PLACE or a
79. Newton Foot Size Meters Pounds Meters Pounds Meters Pounds 1 4 20 22 587 16 67 15 808 11 67 11 856 8 75 5 16 18 46 860 34 58 27 664 20 42 21 454 15 83 3 8 16 83 558 61 67 44 038 32 50 33 875 25 00 7 16 14 134 371 99 17 65 492 48 33 1 2 13 203 250 150 00 132 122 97 50 127 031 93 75 5 8 11 383 917 283 33 225 833 166 67 211 719 156 25 3 4 10 677 500 500 00 259 708 191 67 Table 2 Metric Coarse Thread Tightening Torque Socket Head Cap Screw Flat Head Screw Button Head Screw Metric Newton Inch Newton Inch Newton Inch Size Meters Pounds Meters Pounds Meters Pounds 2x 0 4 690 6 1 2 5 x 0 45 1 425 12 6 3x0 5 2 475 21 9 1 125 10 0 938 8 3 4x0 7 5 850 51 8 2 550 22 6 2 175 19 3 5 x 0 8 12 000 106 2 5 175 45 8 4 425 39 2 Metric Newton Foot Newton Foot Newton Foot Size Meters Pounds Meters Pounds Meters Pounds 6x1 0 20 250 14 94 9 000 6 64 7 500 5 54 8x1 25 48 750 35 98 21 000 15 50 18 000 13 28 10x 1 5 97 500 71 96 42 000 31 000 36 000 26 57 12 x 1 75 165 000 121 77 74 250 54 80 63 000 46 49 16 x 2 0 412 500 304 43 184 500 136 16 155 250 114 57 11 4 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix D Robot Compatibility Appendix D Robot Compatibility The following information is for users replacing a MultiTran 5 VacuTran 5 or Mag naTran 6 with the Brooks Automation MagnaTran 7 Series robot Table 1
80. O BOARD TXB 232 93 3 pP X 11 11 11 EXT IN11 SSK TBD BYPASS 002 3756 01 RXB 232 24 DA SAFETY 12 12 12 EXT IN12 JUMPEI Q9 5 SWITCH 13 13 13 EXT IN13 STOP1 6 6 14 MISC I O 14 14 EXT IN14 x 1 912 dE 7 2 MISC I O a8 w Suec EXT INTG 17 TYPICAL WIRING CONFIGURATION 17 17 a ae z MINIMUM WIRING CONFIGURATION 1 li amp is ROBOT 19 POSSIBLE SAFETY SWITCHES 19 19 EXT INI9 MAX 2 2n 20 EXT IN20 BOARD ID 0002 vec J2 EXT IN21 1 BYPASS INTERLOCK 22 o l o o o 22 22 l p1 9 Aeg eds E 53 E IOPORT_AO ro AS MCC_RD TX232 422RXN 216 24V_USER OPORA 9 WR x L o OPORA 9 p mewe E 1 E e 1 1 IOPORT A2 5 Bl B b IOINTERUPT RX232 422RXP 3 5 SIO1 37 I 27 7m 1 24VRTN USER IGPORT A AZ ATO P RXS oo XA So 28 28 28 OPORTAS XO B2 B10 P _ X 29 OPTIONAL USER SUPPLIED 29 29 324V loOPORT as 9 C2 C10 422TXN UE Eeo VO POWER WITH FULL 30 30 DRV OUTO IOPORT A7 X 9 A3 All o 31 31 31 DRY OUTI IOPORT Do 7 B3 B11 KONTON TO 200V sr 2 EE Ed ee eee E 35 l 33 33 PRV our oronro AA 12 ROBOT IOPORT D2 RXC 232 34 EXCEED MAXIMUM RATINGS 34 34 ae COM OPORTD3 9 B4 B12 PF J3 E Ld Rz DRV OUTA OPOR D3 g b x 38 1 38 36 BBV OUTS PoR bs AS A13 p TXA DRIVEN x 37 Lg 37 BREF ours PoR 4 B9 BI3p HXADRIVEN TXA 232 0 oUr IoBORT Dz 9 CB C13 P RBXp RAW o 38 38 38 DRV OUTS IOPORT D7 RX
81. O Board description 4 12 replacing 9 48 I O Commands 8 7 I O Errors 8 179 I O State 6 24 6 25 Indicators 6 21 Installation 3 8 Interface Board See I O Board Interlocks 2 5 6 23 Internal Errors 8 181 Internal Power 5 14 IO ECHO 8 81 IO MAP 8 82 8 82 L Leak Rate specification 1 13 Leapfrog Arm Set installing 3 23 operation 6 6 LFTST 8 43 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Index Lockout Tagout 2 5 Logical Inputs 5 10 Logical Outputs 5 10 Low Side Interface Board 4 12 Low Side Logical Inputs 5 12 Low Side Logical Outputs 5 12 Low Speed 6 13 M MagnaTran 6 compatibility 11 5 installing arms 3 23 MagnaTran 7 accessories 1 14 features 1 3 overview 1 2 specifications 1 12 types of 1 2 Maintenance Schedule 9 2 MAP 6 26 8 44 MAP PASSTHROUGH 8 49 Mapping Errors 8 185 Mapping the Interlocks 6 29 Marathon Express 5 19 Marathon Express High Side Interface Board 4 12 Marathon Express I O 5 19 Material Safety Information 2 17 MCC 4 11 MCC Errors 8 187 Mechanical Specification 1 13 Medium Speed 6 13 Metric Dimension 1 7 MISC I O Power 5 14 Monitor Errors 8 185 Monitor Mode 8 4 Motion Control 6 13 Motion Control Computer Board 4 11 MOTION IND 6 24 Motor Electrical Phase Calibration 9 69 9 69 MOUNT 8 51 MOUNT position 3 46 Mount the Arm Set 3 23 Mount Z Position 9 76 MOVE 8 52 Brooks Automation Revision 2 2 MT5 See MultiTran 5 VacuTran 5 Mul
82. P3 38 DIO P3 RNE 6 DIO P4 RE EN 23 DIO SS P4 39 DIO P4 RNE 7 DIO P5 RE EN 24 DIO SS P5 40 DIO P5 RNE 8 DIO P6 RE EN 25 DIO SS P6 41 DIO P6 RNE 9 DIO SV AL OPND 26 DIO SV P1 OPND 42 DIO SV BL OPND 10 DIO SV P2 OPND 27 DIO SV P4 OPND 43 DIO SV P3 OPND 11 DIO SV P5 OPND 28 DIO PP CS OPND 44 DIO SV P6 OPND 12 DIO CS RNE 29 DIO PP CS CLSD 45 DIO RNE 13 DIO 30 24VDC 46 14 DIO 31 24VDC 47 15 24V RIN 32 24V RTN 48 16 SER RSGND M7 33 SER RXD RB T 49 SER TXD RB T 17 SER RTS RB R 50 SER CTS RB R Cable connections are included with the Marathon Express system See also the Brooks Automation Marathon Express User s Manual Brooks Automation Revision 2 2 5 19 Operational Interfaces MagnaTran 7 1 User s Manual Control Display Module MN 003 1600 00 Control Display Module The connection to the MagnaTran 7 Robot from the Control Display Module CDM uses standard factory made RS 232 serial communications The configuration for the robot s CDM communications protocol is described in Table 5 9 Table 5 9 CDM RS 232 Protocol Port Configuration RS 232 Baud Rate 9600 Data Bits 8 Parity None Stop Bits 1 The standard module CDM allows complete control of all robot functions The stan dard module CDM has an Emergency Stop button which will turn off the servos to the robot See Control Displ
83. Repair MagnaTran 7 1 User s Manual Reset the Home Position to the User Preference MN 003 1600 00 9 74 under each forearm of the armset Make sure that the Z lower hard stops are very low before pressing down on the armset Press the arm set down slowly avoiding impact so that the forearms touch the shims creating a 0 062 gap between the flange and forearm Loosen and manually locate the Z home flag located to the right of the I O board on the the T2 motor housing so that the red LED of the Z home flag PCB goes on Remove the shims Set the Z hard stop and adjust the microswitch using the procedure Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 After this procedure has been performed the Resetting Mount Position on page 9 76 procedure MUST be performed Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Reset Stations When the Home Position is Reset Reset Stations When the Home Position is Reset If the values for SYNC ZERO are not available and the home position must be found again a quick shortcut can be used to reset the stations for the robot N WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 Reset the home position where Pan A is located 180 opposite the power con nector and record the values for SYNC ZERO Record t
84. Repair MagnaTran 7 1 User s Manual Z Encoder Replacement MN 003 1600 00 9 46 10 N CAUTION Observe proper ESD precautions when handling any electronic device Reconnect robot power cable and CDM cable Power up robot Using the CDM jog the robot in Z direction so that the 4 40 x 3 16 SHCS qty 2 that secure the Z encoder assembly collar to the Z leadscrew shaft are acces sible Brooks recommends positioning these 2 screws opposite the personality PCB for best accessibility Power down robot Disconnect robot power cable and cdm cable Remove the theta driver PCB Disconnect the following cables from the theta driver PCB fan J1 I O power J2 PWR T1 motion P1 T2 motion P2 Z power P4 Remove the 4 M3 SHCS that mount theta driver PCB Disconnect theta driver PCB from the personality PCB Disconnect the Z encoder cable from the personality PCB J4 Disconnect the Z encoder cable ground lead from the robot chassis Remove the 4 40 x 3 16 SHCS qty 2 that secure the Z encoder collar to the Z leadscrew shaft Note these 2 SHCS are secured with removable strength Loctite Remove the Z encoder from its mounting flange by removing 3 M3 SHCS Inspect the new Z encoder assembly Ensure that the sheet metal mounting flexure has 3 large slots does NOT sit on the center ring that protrudes from the Z encoder housing If it does loosen 3 small black phillips head screws and re center the sheet metal mountin
85. Resolved Verify that the interlocked items are operational i e slot valves can open wafer sensor sensitivity is within spec EMO buttons are operational Verify that power is supplied to the Miscellaneous I O either externally or via jumpers on the Miscellaneous VO connector Was Issue Resolved Check the wafer sensor cables for proper connection and continuity Verify that all fiber optic cable is fully seated at all connections Was Issue Resolved CALL BROOKS TECHNICAL SUPPORT YES YES YES YES Figure 10 9 Operational Interlock Troubleshooting Brooks Automation Revision 2 2 10 21 Troubleshooting MagnaTran 7 1 User s Manual Repeatability Related Issues MN 003 1600 00 Repeatability Related Issues Symptoms Wafer is not placed to same position repeatedly Troubleshooting Process Inspect for physical obstruction interfering with robot arms and wafer placement Verify process module and its wafer pins are level Verify robot wrist bands are adjusted properly Inspect robot wrist bearings and elbow bearings for excessive wear Verify that robot encoder values are repeatable to the desired station Refer to Position Repeatability Test on page 10 33 Reference Radial Motion Related Issues on page 10 8 and Theta Motion Related Issues on page 10 10 Brooks Automation 10 22 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 0
86. SEN TO DIGITAL IN 0X3 This example command maps STN 1 SLOT as a SBIT SVLV SEN input to I O DIGITAL IN 0 and 1 represented by hex 3 The input is wired to connec tor MISC I O EXT INO and EXT INI pins 1 and 2 The io num 0X3 is deter mined by the example in the figure below SUP PI O 8 15 SUP PI O 0 7 13 12 11 4 3 VO 0 0 0 0 0 MASK Bit Weight 2 1 8 1 8 HEX Brooks Automation Revision 2 2 8 47 Command Reference MagnaTran 7 1 User s Manual Map MN 003 1600 00 Example 4 MAP Command MAP PRESSURE NUMERIC IN TO DIGITAL IN OXF00 This example command maps PRESSURE as a NUMERIC IN input to I O DIGITAL IN lines 11 10 9 and 8 represented by hex F00 The input is wired to connector MISC I O EXT INS EXT IN9 EXT IN10 and EXT IN11 pins 9 10 11 and 2 The io num 0XF00 is determined by the example in the figure below PI O 8 15 SUP PI O 0 7 12 11 6 413 0 VO oH o o MASK 1 l8 1 8 Bit Weight HEX Brooks Automation 8 48 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Map Pass Through Map Pass Through Purpose The MAP PASSTHROUGH command allows the flexibility to send information through the robot This command also assigns the the specific characteristics of the I O Format MAP name PASSTHROUGH DIGITAL
87. STORE HOME POS Z Example To request the Z Axis HOME RO HOME POS Z The reply is 17500mm 17500 Brooks Automation Revision 2 2 8 79 Command Reference MagnaTran 7 1 User s Manual Request Interlock MN 003 1600 00 Request Interlock Purpose Reports the state of the interlock Format RQ INTER INTLCK ALL WAF SENI TZ Response state mode Arguments state Y Wafer Sensing is Enabled N Wafer Sensing is Disabled mode ON Robot will execute all T moves before Z moves OFF Robot will execute T and Z move simultaneously Description This command requests the current setting for interlocking capabilities See Also SET INTLCK Example To request the state of the wafer sensor interlocks RO INTLCK WAF SEN Brooks Automation 8 80 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request I O Echo Request I O Echo Purpose This command is used to display the serial communications echo option Format RO IO ECHO Response In Monitor Mode ECHO STATUS YIN In Packet Mode IO Y N Arguments status Displays the current status of the I O Echo option Y Specifies the echo option is on all commands echoed N Specifies the echo option is off no commands echoed Description The I O echo option is used to request full or half duplex communications If the ter minal or terminal emulator displays double characters for all user entered text IO ECHO should be set of
88. Settings 11 4 Transfer Time Specification 1 15 TX Indicator 6 22 U Unpacking Instructions 3 7 UPS_BATTERY_SEN 6 24 User Setting Tables 11 17 V VacuTran See MultiTran 5 VacuTran 5 Vacuum hazards 2 13 specifications 1 13 Variable Fields 8 6 Vibration 2 15 I 5 Index MagnaTran 7 1 User s Manual MN 003 1600 00 VLV SEN 6 24 VT5 See MultiTran 5 VacuTran 5 W WAF SEN 6 24 Wafer Sensor Errors 8 182 Wafer Transport Plane 7 13 Warnings 1 10 Workspace 6 58 Workspace Errors 8 186 WTP See Wafer Transport Plane X XFER 8 176 XFER offset 8 177 XON XOFF 5 6 Z Z Vertical Axis 1 12 Z Axis Drive 4 7 Z Axis Driver Board description 4 11 replacing 9 43 Z Axis Driver Board Replacement 9 45 Z Axis Subsystem Removal 9 29 9 32 Z Encoder Replacement 9 37 Z Motion 6 12 I 6 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Reader s Comments MN 003 1600 00 Reader s Comments Brooks Automation Inc attempts to provide documentation that meets the needs of our customers We continually strive to upgrade the quality of our documentation and would appreciate your help Please use this form to report any documentation errors or to make suggestions for improvement Mail or fax completed copies of this form to the Technical Publications Manager at the address on the other side Your comments and suggestions are always welcome All comments and suggestions become the property of Brooks Automation Inc
89. The plane coincident with the bottom surface of the substrate as T Axis T1 Drive T2 Drive TM Torr Transport Module the substrate is being transported See Wafer Transport Plane The axis of rotational movement of the robot s arms The lower drive subsystem on a MagnaTran robot which transmits its power to the arms through the inner drive shaft Operating with the T2 Drive this axis drives the arms in both the Rotational T and Radial R axes The upper drive subsystem on a MagnaTran robot which transmits its power to the arms through the outer drive shaft Operating with the T1 Drive this axis drives the arms in both the Rotational T and Radial R axes See Transport Module Pressure measurement The central hub of a Cluster Tool Typically a large horizontal chamber with a centrally located wafer handler All wafer handling and Process modules are attached to the external facets of the chamber Top Reference Flag See Flag Ultra High Vacuum Pressure ranges from about 10 Torr to less than 10 Torr G 10 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Glossary MN 003 1600 00 Universal Cassette Locator An elevator platform mounted device that facilitates position ing 3 inch through 150 mm cassettes Vacuum Gauge A gauge used to measure the vacuum within a chamber See Convectron Gauge and Ion Gauge Vacuum Pump Mechanical pump used to remove gases in an enclosed chambe
90. User Preference on page 9 73 Mount CDM 1 Ensure the arm state of the robot is off Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO 2 Move the robot to the mount position Enter the following path SETUP CONFIG ROBOT ARM MOUNT ARE THE ARMS CURRENTLY ON NO When the robot is in the mount position the 2 locating pins of the robot outer shaft should be oriented as indicated in Figure 3 9 Brooks Automation 3 26 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set 10 Disengage the robot servos Enter the following path SETUP CONFIG ROBOT SET SERVOS OFF Install adapter to T2 if not factory installed Install the arms on the robot For the following procedure the alignment fixture must be installed on the arm set Inspect the under side of the arm set and verify the mounting hardware is pro truding at 4 places If not work the screws until they protrude Position the arms so that when looking down on the robot the I O panel located on the robot drive is facing you and the end effectors would be facing to your right Using the alignment fixture place the arms on the T1 T2 shafts positioning the locating pins of the outer shaft into the arm set Seat onto the T1 shaft The arm set must be fully seated Secure the arms to the T1 shaft outer shaft Using the M3 wrench fit the wrench into the 3 thruway holes and tighten the mounting har
91. User s Manual MN 003 1600 00 11 10 Table 11 3 Command Comparison COMMAND MAG6 MAG7 VT5 MT5 STORE IO ECHO V5 M6 7 are V5 M6 7 are V5 M6 7 are same same same STORE STN M6 7 are M96 7 are No ARM should same ARM is same ARM is be used optional optional STORE STN M96 7 are same M6 7 are same N A OPTION STORE STNSEN M6 7 are M96 7 are ARM is a must SOR same ARM is same ARM is optional optional XFER M6 7 are M6 7 are ARM is a must same ARM is same ARM is optional optional Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Appendices Appendix D Robot Compatibility Error Code Comparison Table 11 4 compares the error code differences of the MT5 VT5 to the MagnaTran 7 Table 11 4 Error Code Comparison MT5 VT5 Error No Existing MT5 VT5 Error Code Error No Mag 7 70 77 Error Code 411 Interlock Calc Overflow 408 Bad R Position 412 Invalid Arm Locate No equiv 413 Invalid Wafer Size No equiv 501 Internal Error No equiv 502 ESC CDM Error No equiv 503 Void Error No equiv 602 Command Overrun 650 Busy 707 Pick Fail 721 Pick Failed 708 Place Fail 722 Place Failed 709 Interlock Calc Overflow No equiv 710 Interlock Violation Slot valve closed prior to Brooks Automation Revision 2 2 PICK PLACE GOTO XFER 11 11 Appendices Appendix D Robot
92. Verify that the armset mounting bolts are torqued to 75 88 in Ibs Was Issue Resolved NO v Verify that armset was installed properly Inspect the elbow bearings for excessive wear or rough motion Was Issue YES YES YES YES Y Verify that the application number of the robot is correct Was Issue Resolved Verify the operation of the over travel limit switches by manually tripping the Switches when the robot is referneced receive error 10022 Was Issue Resolved Verify that the Z hard stops home flag and limit switches are set correctly Figure 10 5 Z Motion Troubleshooting Was Issue Resolved YES YES Was Issue Resolved Verify that the Encoder and Was Issue Resolved Sync Phase values are consistant with the robot QR Reenter the robot application number Inspect the wrist bearings for Verify that the wrist band excessive wear or rough motion tension is adjusted properly NO Was Issue Resolved Resolved Was Issue Resolved Was Issue Resolved v YES YES YES gt DONE YES N CALL BROOKS The Z Driver PCB has failed Was Issue Resolved TECHNICAL a SUPPORT 10 14 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Find
93. Vertical These motion parameters are grouped in the second column on the CDM key pad R R is the absolute radial extension of the center of the wafer relative to the center of the robot Note that due to the nature of the Brooks frog leg arm it is not possible to set R 0 T T is the absolute rotational position of the robot relative to the Home position Z Associated Parameters Z BTO Z is the absolute vertical position relative to Home the lowest position The Base Transfer Offset BTO is defined as the distance between the Home posi tion and the Wafer Transfer Plane WTP The WTP is defined by the bottom surface of the wafer during wafer transport for a multi slotted station during transport to the first slot In the UP position therefore the upper surface of the robot s end effector is coincident with the Wafer Transfer Plane Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation Lower Slot Pitch All The distance between the Up position defined as coincident with the wafer Transfer Plane and the Down position of the robot end effector Used to set the distance of the end effector below the WTP Used after placing a wafer in a slot or before picking up a wafer in a slot The Slot key has two different meanings depending on the context in which it is used When used as a position parameter for a multi slotted station it stan
94. Vox da QE EERTRuRA Eli d2d E esPEdas D kbtg 2 5 12 High Side Low Side IniedidEeS a ausi i a esr REEEUREREN REDE ERR RAS 5 14 SAID IDESHOUR aa bs 4dzadae ed khao ker iaaah iiaa ke krade teaks 5 17 React DH iind ree oe ee ee ee rrr ere Seer ere ee d Eder 5 18 Marathon Express V O 615404 d QE ERE ches ih ET been reese cel ACERO 5 19 Conteal Display Module iu veexusac te ox Va ek teow ER OP POCUS TORIO HR acd 5 20 Emergency Stop CO Misses a 2dbri aun sees eee REFERRE RE OE E ERN E dace 5 20 Lipional CDM 4 640 dues herd rdi nE HEU d RIA Hn 5 21 Operation Magna Iran 7 1 Water Handling Robot Overview 2 2 22 co aora rn 6 2 Arm DOSCUDIOB 14a dead vd P o RARE QUA exe PERO CU PR OR d dd p dnt 6 2 Magna tan 7 1 Application NuMDEr iaas daas 4d a aa ER S db E Eq Rd PERRA R 6 8 Theory of Opera ont ea dee CE EUER DEAE SOR DURER PELA E d d 6 9 Single ALM MONON amp see cose chere meen ERR HE nS ene Ret 6 10 Dial Arm MOOR 4 veste suERRATSARONAKETESAANAAFESA XaAP E TAA qd 6 10 Molon COMO iocos eritin ET YePSTA QUERER FREE IEEE IE 6 13 cio PET ekira eked krenite iaa air aa aere 6 13 Hardware Memory SEPUCDUEE i443 axe rpER FREE IREREREE OA PERPE eS 6 16 Slaton Coordinate 3 95M ioa daas ees CHER hago RARE Hn REG Els 6 17 Factory oet HOME POSIDDIL Laeda d q d edd oS Quce et dE IE RS EORR 6 19 HOME Operablon censere re rb rre erae rd 6 20 Contrals and ICIS daa Ses ine hers tee q ekresabr bad habt E FRE ERE th 6 21 COVEY IE P TrTMT 6 21 LODDOB
95. a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn of the power supply to the robot and unplug the power and communica tion connections Z N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 2 Two fasteners hold the Power Pak to the robot These fasteners are located below the MagnaTran 7 Pull the Power Pak to align the fasteners to the holes of the Power Pak See Fig une 12 1 3 Tip the Power Pak down slightly to clear the fasteners and pull the Pak away from the robot Brooks Automation Revision 2 2 9 63 Maintenance and Repair MagnaTran 7 1 User s Manual Power Pak Replacement MN 003 1600 00 Replacement Procedure 1 To replace or install a Power Pak on a MagnaTran 7 robot first locate the two fasteners on the bottom of the robot and hold the Pak so that the fasteners are aligned with the holes on the Pak Slide the opposite end of the Pak over the locating pin in the bottom of the robot Refer to Figure 12 1 for Battery Pak Installation drawing With the pin supporting the back of the Power Pak push up the Pak to the robot and align the two fasteners to the corresponding holes in the robot Slide the Power Pak to secure the fasteners Plug in the power connector from the robot power supply to the Power Pak Plug in the cable from the Power Pak to the robot power connector Fh 4 RE
96. a number For example the robot generates an error such as ERR 10009 Hard tracking error T1 motor These types of failures are listed in the following section Error Code Reference on page 8 179 Troubleshooting Observed Symptoms Failures that are observed by the operator but do not generate an error code identified by a number The specific symptoms for each failure type can be categorized These types of failures are listed in the following section Table 10 1 Symptoms of Observed Errors Types Observed Symptoms Page Number Communication e No response from robot using PC e No response from robot using CDM See Communication Related Issues on page 10 4 Power e 24 volt LED not illuminated Failure for robot to operate e No communication using PC or CDM See Power Related Issues on page 10 6 Radial Motion See Radial Motion e Armset has jerky motion Related Issues on e Armset oscillates page 10 8 e Armset overshoots taught position e Armset sways from side to side during motion e Robot is unable to move in the R direction Theta Motion See Theta Motion e Armset has jerky motion Related Issues on e Armset oscillates page 10 10 e Armset overshoots taught position e Armset sways from side to side during motion e Robot is unable to move in the T direction Motion See Z Motion Related Z e Armset has jerky motion e Armset oscillates e Armset overshoots taught position
97. and Z axes for arm B by calculating their positions based upon the values obtained for arm A Brooks Automation MagnaTran 6 and MTR VTR5 users can employ the same teaching techniques used on these previous robots while using one of the compatibility modes see Configuration Compatibility Com mands on page 11 13 Table 7 1 Arm B Teaching Procedure Robot mode Teaching Procedure MagnaTran 7 standard commands Teach Arm B Procedure I MagnaTran 7 using MTR VTR5 compatibility dual Teach Arm B Procedure I coordinate system MagnaTran 7 using MagnaTran 6 compatibility Teach Arm B Procedure II singe coordinate system Teach Arm B Procedure I 1 Set the R Z and LOWER position for each station to the same values used for the arm A 2 Verify all stations for pan B by repeating the alignment procedures for pan B using the station definitions just entered from pan A as a starting point Calculate new theta positions for pan B by adding 180 to the Theta val ues obtained for pan A if the Theta value is lt 180 Brooks Automation 7 18 Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Teaching Arm B of the Dual Arm Sets Calculate new theta positions for pan B by subtracting 180 from the Theta values obtained for pan A if the Theta value is gt 180 Set the T position for each station for arm B to the calculated Theta posi tion 3 Adjust R T Z and LOWE
98. be used or an error message will be generated If the ALL specifier is used the order of the variables must be the order presented in the command description Command Syntax The command syntax is flexible with minimal formatting conventions In all cases the Command Field must come first variables with their associated data may be placed in any order however Brooks Automation recommends that the variable order presented in this manual for each command be maintained for consistency and clarity Examples of the various formats a command may take are illustrated by the examples below Note that in all instances the robot will interpret the command the same Standard form standard order both variables PICK 1 SLOT 4 ARM A Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Command and Response Structure Only 1 variable PICK 1 SLOT 4 Non standard order PICK 1 ARM A SLOT 4 Response Types and Syntax The robot returns three types of signals to the host controller Data Error signals and Ready signals All commands sent to the robot will be acknowledged with a Ready Response appropriate to the current operating mode If the command was a Request Command the response to that request as described in the command ref erence will be provided before the Ready Response If a command of any type cre ates an error condition an Error Response will be provided before the Ready
99. be used in a high temperature environment Allow the system chamber and robot to completely cool before performing maintenance involving volatile chemicals Brooks Automation 2 12 Revision 2 2 MagnaTran 7 1 User s Manual Safety MN 003 1600 00 Vacuum Hazards Vacuum Hazards The MagnaTran 7 robot is designed for use in high vacuum applications N WARNING Whenever any vacuum pump exhaust is vented the facilities envi ronmental procedures must be followed regarding the venting of gases The standard vacuum safety measures for the application in which the robot is being used should be applied N DANGER Implosion may result from equipment damage It is essential that a complete inspection of the equipment be performed prior to use N WARNING Opening an unequalized slot valve may result in severe damage to the equipment N CAUTION The Brooks MagnaTran 7 is designed specifically for high vacuum environments and has no overpressure protection Internal pressures must never exceed normal atmospheric pressure It is the user s responsibility to provide overpressure protection in the equipment where the robot is installed Brooks Automation Revision 2 2 2 13 Safety MagnaTran 7 1 User s Manual Fire and Explosion Hazards MN 003 1600 00 Fire and Explosion Hazards The MagnaTran 7 provides no direct fire or explosion hazard However the use of Isopropyl alcohol or other flammable solvents around the robot while
100. choice from among the options offered For example Y N indicates that the user should choose the Yes key or the No key Some menus present multiple choices such as L S P or 11234 which indicates that the user should choose from among the keys labeled Lower Slot Pitch or 1 2 3 4 as appropriate In all cases the choices will refer to dedicated keys there is never any need to spell out commands Figure 4 7 shows a functional block diagram of the CDM controls The following tables list the keys provided on the CDM and are intended to be a quick lookup refer ence only For a full description of these keys including examples and details on their use see the individual key descriptions that follow these tables Table 6 29 Major Control Keys Key Description Page On Off On Off key turns the CDM on or off 6 63 Quit Quit key returns CDM display to Main Menu 6 80 STOP Stop key stops all robot actions immediately 6 65 Escape Escape key moves CDM display back one menu 6 80 Backspace Backspace key allows entered characters to be deleted 6 80 Brooks Automation Revision 2 2 6 67 Operation Control Display Module CDM Operation MagnaTran 7 1 User s Manual MN 003 1600 00 6 68 Table 6 30 Left Column Major Function Keys Key Description Page Home Home key selects the Home Menu 6 69 Move Move key selects the Move Menu 6 70 Wafer Xfer Wafer Xfer key selects the Wa
101. command execution type SEQ Sequential mode BKG Background mode BKG Background Plus mode linefeed Reports the linefeed state ON Linefeed enabled OFF Linefeed disabled echo Reports the echo state ON Echo enabled OFF Echo disabled checksum Reports the checksum option state ON Checksum enabled Brooks Automation Revision 2 2 8 71 Command Reference MagnaTran 7 1 User s Manual Request Communication MN 003 1600 00 OFF Checksum disabled data rep Reports the data reporting flag This command in supplied for VT5 com patibility only See Appendix D Robot Compatibility on page 11 5 AUT Automatic mode REQ Request mode errorlevel Reports the error reporting level 1 5 Automatic mode baudrate Reports the baud rate 9600 Serial communication 19200 LonWorks NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description Requests the specified I O configuration in RAM NOTE Request commands display the current value stored in RAM See Also SET COMM STORE COMM Examples The following example requests the current serial I O communications mode The status is returned as Monitor Mode RO COMM M B COMM MON The following example requests the current command execution mode The current status is returned as Background RO COMM FLOW COMM BKG Brooks Automation 8 72 Revision 2 2 MagnaTran 7 1 User s Manual Command Refer
102. command is complete use the RO BG command This command returns the busy status of the background command YIN and if RDY any errors that may have occurred Brooks Automation Revision 2 2 8 3 Command Reference MagnaTran 7 1 User s Manual Description MN 003 1600 00 Background Plus Mode The Background Plus mode works exactly like the background mode except for one addition when the action command is done the prompt BKGRDY is returned If an error occurred during the background action command then a _BKGERR response with the error number or error string depending on packet or monitor mode is returned along with the prompt _BKGRDY on the next line Thus the robot does not need to be polled with RO BG to determine if an action has been completed A CDM warning will be displayed as ERR instead of BKGERR eg BKGRDY goton 1 _RDY _BKGERR if an error occurs _BKGRDY when the action completes Operating Modes The MagnaTran 7 provides two modes for serial communications with the robot There is a user friendly mode referred to as Monitor Mode and a computer friendly mode referred to as Packet Mode Sequential or background operation can be selected when using either communications mode Monitor Mode Monitor mode is a user friendly communications mode All responses from the MagnaTran 7 are descriptive and easy to understand This mode is best used when a person is communicating with the robot through a
103. commands SET SERVOS OFF and ZBRAKE OFF to release both the servos and zbrake so that the operator can manually lift the T1 T2 motor housing assembly to remove the shims Brooks Automation Revision 2 2 9 51 Maintenance and Repair MagnaTran 7 1 User s Manual Z Home Flag Sensor Board Replacement Procedure MN 003 1600 00 9 52 16 WARNING Warning Do not lift the robot upward by the armset Armset damage will occur Only lift the T1 T2 motor housing assembly from below Remove the arm mounting fixture from the armset and issue the following command HOME ALL Verify that the distance between the uppermost plane of the robot top flange and the armset forearms is 0 062 If not repeat the pro cedure NOTE IMPORTANT The following robot settings are dependent upon a properly set home position With the robot in the home position use gap feeler gauges to verify that the fol lowing dimensions have been maintained 0 024 0 6mm between the Z lower microswitch and the z lower microswitch flag 0 040 1 0 mm between the Z lower hard stops qty 2 and the bottom of the robot T1 T2 motor assembly If these dimensions are not correct see Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 Move the arms to the maximum Z height by issuing the command MOVE Z ABS position value where position value is in microns meters x 109 The maximum Z height may vary pending user s needs To determine
104. cooling and service Examples of 2 Axis and 3 Axis clearance requirements and the center of gravity are shown in Figure 3 1 Height 53 34 cm 21 00 inches to allow for cable service Diameter 35 56 cm 14 00 inches to allow for service access Weight 29 5 kg 65 lbs 3 axis or 21 kg 46 5 lbs 2 axis Deets E tees uM ap SON Es eee ger RE A AR el m ri ip Simo Sio t cape ao BR RE oa a GET 1 CHAMBER FLOUR the ae eee ke 000 8 00 e Axis 14 75 7 2 AXIS 17 75 i 3 Axis 18 00 zbexee d 3 AXIS 21 00 Figure 3 1 Space Requirements Brooks Automation Revision 2 2 3 3 Installation MagnaTran 7 1 User s Manual Site Requirements MN 003 1600 00 BiSymmetrik Arms The chamber the arms will be used in must meet the minimum dimensions shown below to provide proper clearance for operation and installation An example of necessary clearance for a single arm MagnaTran 7 is demonstrated in Figure 3 2 Height Dependent on arm type Extension Up to 1050mm dependent on arm type Weight single 3 2 4 5 kg 7 10 lbs double 4 5 5 4 kg 10 12 lbs C mu i 7 cI gt ECR 435mm m EXT 1050mm ECR Elbow Clearance Radius EXT Arm Extensi
105. data Command Fields consist of the name of the command and the logical branch of the command if required Data Fields consist of the data required by a variable or the data being returned for a variable Variable Fields consist of a variable name used to specify a specific item for the command In the following command example the SET is the command the STN is the log ical branch the T is a variable and the 4 and 270000 are the data fields SET STN 4 T 270000 In the following response example the STN is a variable indicating the type of response and the type of data following the ARM is also a variable indicating the type of data following and the 4 A and 270000 are the data fields STN 4 ARM A 270000 The robot s commands have a multi level tree like structure Each level may have data fields and or a logical branch to a lower level This approach to the command structure allows great flexibility in designating commands and unlimited ability to add commands in the future as customer needs arise Adding a new branch to the tree can provide a whole new category of control or information retrieval The example of a typical command tree shown in Figure 8 1 provides the tree for the RO POS Request Position command In the example the RO POS is the command the ABS STN and TRG are the logical branches of the command and ARM R T SLOT and Z are the variables that may be specified
106. e Robot is unable to move in the Z direction e Robot hits Z hard stops during operation in Z e Robot hits Z hard stops during homing in Z Issues on page 10 12 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Troubleshooting Overview Table 10 1 Symptoms of Observed Errors Types Observed Symptoms Page Number Find Phase See Find Phase e Command Failed error occurs Related Issues on e T1 T2 shafts do not move together while ping page 10 15 ing in theta direction Home Z Axis See Home Z Axis e Command Failed error occurs Related Issues on page 10 18 Operational Interlock See Operational e Operational Interlock is not functional Interlock Related e Operational Interlock state is not valid Issues on page 10 20 Station Orientation See Station Value e Arm B moves 180 degrees from desired theta Orientation Related station value Issues on page 10 26 Repeatability See Repeatability Wafer is not placed to same position repeatedly Related Issues on page 10 22 Power Pak See Power Pak e Arms drift after halted by Power Pak when Related Issues on main robot power is turned off page 10 24 3 Troubleshooting commands the Magnatran 7 has three commands that pro vide additional information from the robot that is useful in troubleshooting These commands are RQ HISTORY see page 8 76 this command displays the errors and no
107. electronics Continuous rotation capability no dynamic seals drive belts or moving cables in effective operation The MagnaTran 7 wafer transfer robot is designed for applications where a maximum reach of 1050 mm from the center line of the robot to the center line of the wafer is required Wafer sizes from 100mm to 300mm may be handled This robot is supplied with either the Brooks Automation Single Pan Arm Set the pat ented BiSymmetrik Dual Pan Arm Set or the patented Leapfrog same side Dual Arm Set The Single Pan Arm Set has Brooks Automation patented Frogleg arm assembly with a single end effector providing high reliability and throughput The BiSymmetrik arm set has two arms addressing opposite directions and offering very high throughput The Leap Frog has the unique dual end effector arm configuration one above the other addressing the same direction and supplying maximum throughput The MagnaTran 7 Frogleg robot and the Bisymmetrik robot may be 2 axis Radial and Rotational or 3 axis Radial Rotational and Vertical Table 1 1 Standard MagnaTran 7 Models Module Standard Arm Axis Options MagnaTran 7F Frogleg Arm Assembly 2 Axis Or 3 Axis MagnaTran 7B BiSymmetrik Arm Set 2 Axis Or 3 Axis MagnaTran 7X Leapfrog Arm Set 3 Axis Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 MagnaTran 7 Robot Overview The MagnaTran
108. equivalent PROCEDURE 1 2 Connect laptop to robot via serial communications port Determine if the Mag7 is currently configured for Z axis operation by issuing the following command RO ARMS ALL The robot will respond with a large list of arm settings An example of the last 7 lines on this robot response list are shown below Pan B ctr of mass Y coordinate Pan B pad offset total z travel mass seen by the z motor in kg Z motor spring constant Extension arm Angle Retract arm Angle The Z axis is configured if the robot response includes the line total z travel This line will always be the 5th line from the bottom of the robot response The Z axis is NOT configured if the robot response does NOT include the line total z travel If the Z axis configuration is not correct contact Brooks Technical Support for the correct application number The application number is entered into the robot by issuing the following command CONFIG ROBOT APPLIC application number Procedure is complete Brooks Automation Revision 2 2 10 29 Troubleshooting MagnaTran 7 1 User s Manual Z Binding Test Using the Trace Command MN 003 1600 00 Z Binding Test Using the Trace Command TOOLS Laptop computer with Procomm or equivalent PROCEDURE This procedure uses the diagnostic command TRACE to dete
109. for the MagnaTran 7 robot see Motion Control on page 6 13 NOTE The operator can force a uniform high speed throughout the PLACE operation by Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Place with an Offset first invoking the SET HISPD command The set speed remains in effect only until the completion of the action command following the set speed command N CAUTION Setting the HISPD command prior to a PLACE command will cause all motion during the PLACE command to be to be executed at high speed which may cause wafers to slip or break See Also GOTO MOVE PICK SET RETRACT2 Brooks Automation Revision 2 2 8 63 Command Reference Reference MagnaTran 7 1 User s Manual MN 003 1600 00 Reference Purpose References the specified axis Format REF R T Arguments R Field size 1 character Radial Axis T Field size 1 character Theta Axis Description The robot reference function will reference the robot at the current position and then hold the arm at that position Example REF R 8 64 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Release Release Purpose Releases servo control of the robot Format RELEASE Description The RELEASE command will perform a controlled stop of any motion in progress turn the servos off and remain referenced A background ready response will b
110. from database Unable to write to database Bad database handle found Database full Database not initialized Configuration files have different stamps Bad parameter passes to memory system No memory available for memory system Partition currently in use Unexpected mail received by monitor No monitor resources available Unknown monitor event type Monitor event canceled Event time out occurred Monitored event occurred Bad monitor function received Unknown I O State type Check host controller software for proper I O state type Refer to Operational Interlocks on page 6 23 for available types Unknown I O name Choose a correct I O name A list of existing I O names can be obtained by issuing the com mand RQ IO MAP ALL I O name already in use If appropriate delete existing I O name using the REMOVE IO command Choose a different I O name See Remove IO on page 8 66 for command usage 8 185 Command Reference MagnaTran 7 1 User s Manual Error Code Reference MN 003 1600 00 Error 1004 I O system out of memory Error 1005 Name reserved by I O system Error 1006 Illegal number of bits for I O type Assign the proper number of bits for the I O type specified Refer to Operational Interlocks on page 6 23 Error 1007 Unknown I O block name Error 1008 Bad I O bitmask Error 1009 Unknown I O type Error 1010 I O type mismatch Error 1011 Incorrect I O channel specified Error 1012 Bad I
111. in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory Brooks Automation 8 172 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Workspace Store Workspace Purpose This command is used to store the current parameters of the specified work space name Format STORE WSPACE name ALL STATEIINTLCK ARMISTNIRMIN RMAX TMIN I TMAXIZMIN ZMAX Arguments name Specifies the work space name Description Stores the current setting of the specified work space parameter or parameters for either the specified work space name or all defined work spaces NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also Store Communication on page 8 157 Brooks Automation Revision 2 2 8 173 Command Reference MagnaTran 7 1 User s Manual Store Workspace AutoCreate MN 003 1600 00 Store Workspace AutoCreate Purpose Stores the current status of the automatically created work space mode Format STORE WSPACE AUTOCREATE Description This command is used to store the automatically created work spaces NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also Store Communication on page 8 157 Br
112. indicating that the robot is ready for another command This mode allows execution of only one command at a time Error codes are reported if in Packet mode and error messages are reported if in Monitor mode In Background mode for certain commands the robot will return a READY string immediately after it has received the command and typically before the command has been completed This command task is then placed in the back ground and other foreground commands may be executed sequentially while the background command is in progress Only syntax errors and busy errors will be displayed automatically Using the RO BG command will dis play any other errors The Background Plus mode works exactly like the background mode except for one addition When the action command is done the prompt BKGRDY is returned If an error occurred during the background action command then a BKGERR response with the error number or error string depending on Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Communication packet or monitor mode is returned along with the prompt _BKGRDY on the nextline Thus the robot does not need to be polled with RO BG to determine if an action has been completed A CDM warning will be displayed as ERR instead of BKGERR Linefeed Specifies the linefeed execution mode as enabled or disabled Linefeed mode is set to disabled by default Checksum The checksum
113. interlocks that are active through the Mis cellaneous I O connector of the robot These include wafer sensors slot valve sensors retract arm sensor emergency stop function etc Refer Operational Interlocks on page 6 23 Symptoms Operational Interlock is not functional or Operational Interlock state is not valid Troubleshooting Process 10 20 Verify that the appropriate operational interlock has been properly set and stored in the robot via the MAP command by issuing the command RQ IO MAP ALL If neces sary properly set and store the operational interlock per the host controller require ments by issuing the MAP command Refer to Map on page 8 44 Verify that the operational interlock is set to the appropriate active state hi or lo per the host controller requirements Verify that the operational interlock is set to the appropriate pin of the Miscellaneous I O connector per the host controller requirements Verify that the operational interlock state will toggle by issuing the RO IO STATE ALL command while physically changing the operational interlock state For exam ple if using the WAF SEN operational interlock issue the RO IO STATE ALL com mand while physically blocking and not blocking the appropriate wafer sensor For slot valves check that slot valve is functional For wafer sensors and retract sen sors check wafer sensor sensitivity adjustments For emergency off EMO buttons check that button is functiona
114. is on This function allows enabling or disabling of the Discrete I O Output while the serial I O is in control of the robot See Also Request DIO Output on page 8 75 Store DIO Output on page 8 159 High Side Low Side I O Assignments on page 5 16 Example The following example turns on the Discrete I O Output function SET DIO OUTPUT Y Brooks Automation Revision 2 2 8 125 Command Reference MagnaTran 7 1 User s Manual Set High Speed MN 003 1600 00 Set High Speed Purpose Sets the force hi speed option on Format SET HISPD Y N Arguments Y N Y forces the next motion complex or primitive to operate at the with out wafer high speed N forces the next motion complex of primitive to operate at the normal speed for that command Description This command is only provided to provide backwards compatibility with other Brooks Automation robots and should be avoided The preferred method of control ling the robot s speed is to use the SET LOAD command NOTE HISPD is always set to No at power up NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory See Also RQ LOAD SET LOAD Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot will execute the next motion command at high speed The HISPD option will return to NO after execution of the next comm
115. is valid Refer to robot Quality Report QR that is shipped with the robot Database checksum error Issue an EEPROM RESET command See EEPROM Reset on page 8 29 for command usage Arm not configured Servo not configured Motor not configured Illegal configuration for this command Cannot open Master configuration file Cannot read from Master configuration file Cannot open Object data file Cannot read Object data file Cannot open Object master file Cannot read Object master file Cannot open Current configuration file Cannot read from Current configuration file Cannot write to Current Configuration file Object checksum error Could not send generic object to MCC Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Code Reference Error 821 Error 822 Error 823 Error 824 Error 825 Error 826 Error 827 Error 850 Error 851 Error 852 Error 853 Error 854 Error 855 Error 857 Error 860 Error 861 Error 862 Monitor Errors Error 950 Error 951 Error 952 Error 953 Error 954 Error 955 Error 956 I O Mapping Errors Error 1001 Error 1002 Error 1003 Brooks Automation Revision 2 2 Object not found Object not valid for current configuration Bad group type Bad group name Group not found Group not valid for current configuration Configuration message to MCC timed out End of database found Unable to read
116. it is configured for use with the active arm it will check the sensor configuration at that station for the sensor type and then read the sensor status A flowchart of the Pre Extend Test is shown in Figure 6 10 Brooks Automation Revision 2 2 6 33 Operation MagnaTran 7 1 User s Manual Wafer Presence Sensors Extend and Retract MN 003 1600 00 Sensor Configuration EXtend type sensor Sensor state should be ON indicating that there is a wafer at the station REtract type sensor Sensor state should be OFF indicating that there is no wafer on the end effector If the robot does not receive the appropriate signal from the sensor an error message will be generated and the PICK operation will be stopped If the robot does receive the appropriate signal from the sensor the PICK operation will proceed After the PICK operation is complete the robot will perform a Successful Action Test Successful Action Test If the station has a sensor and it is configured for use with the active arm the robot will check the sensor configuration at that station for the sensor type and then read the sensor status A flowchart of the Successful Action Test is shown in Figure 6 10 EXtend type sensor Sensor state should have changed to OFF REtract type sensor Sensor state should have changed to ON If the robot does not receive the appropriate signal from the sensor an error message will be generated and the PICK operation is considered
117. location Response field size 6 The target T axis location of the robot arm in 0 001 degrees or if unreferenced z location Response field size 6 The target Z axis location of the arm in microns m or if unrefer enced Brooks Automation 8 96 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Position Target NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description The numbers given represent the physical location of the end effector in absolute coordinates to which the robot was commanded The position to which the robot actually moves may vary slightly from the position to which the robot was com manded see RO POS ABS to request the actual position The number and order of the data fields returned will reflect the number and order of the Request Use of ALL implies that the return data values will appear in the stan dard order ARM R T Z See Also RO POS ABS RO POS STN Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot returns the position the A arm was commanded to go to in absolute coordinates Note that this position may vary from the actual position of the robot RQ POS TRG ARM A ALL POS TRG ARM A 175000 181000 21000 Brooks Automation Revision 2 2 8 97 Command Reference MagnaTran 7 1 User
118. low areas e Stop leak if possible using a self contained breath ing apparatus SCBA Inhalation e Move victim to fresh air and call emergency med ical care If victim is not breathing perform artifi cial respiration Skin Contact Contact with liquid may cause frostbite If con tact occurs treat for frostbite Brooks Automation 2 18 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Safety Material Safety Information Isopropyl Alcohol Safety Information Hazard Emergency Action Fire Flammable combustible material may be ignited by heat sparks or flames Vapors may travel to a source of ignition and flash back Container may explode in heat of fire Fire may produce irritating or poisonous gases Small fires may be put out with a CO or dry chemical type extinguisher Large fires may be extinguished with water spray fog or foam Move the container from fire area if this can be performed without risk Leak Shut off ignition sources No flames or smoking in hazard area Stop leak if possible For small spills take up with sand or other non combustible absorbent material and dispose of properly Inhalation May be poisonous if inhaled Vapors may cause dizziness or suffocation Move victim to fresh air and call emergency med ical care If victim is not breathing perform artifi cial respiration Skin Contact Brooks Automation Revis
119. most keys on the CDM A N WARNING There are no safety interlocks available when using the CDM to con trol movement of the robot The user is directly responsible for ensur ing that conditions are correct for safe operation of the robot Visually inspect for obstructions and do not allow access to persons in the arm motion areas Monitor Mode Selecting NO will enable Monitor Mode providing access to the CDM s INFO function only and does not restrict the host controller If Monitor Mode has been selected select the INFO key to use the CDM s monitoring functions NOTE Attempting to access any function other than INFO after selecting Monitor Mode will cause the Mode Selection Prompt to be re dis played Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation Once the operating mode has been selected the CDM will prompt for selection of a function with the following message CHOOSE FUNCTION FROM LEFT COLUMN KEYS Key Descriptions Once the operating mode has been established the CDM will prompt for additional selections or input The CDM provides access to a multi level functional command structure as shown in the simplified command flow chart in Figure 4 7 The screen will display menus in descending order that prompt the user for choices and data entries The menus list and identify the options available and prompt the user for a
120. nor does it have to be on The CDM needs only to be plugged into the robot to allow access to the E STOP function N CAUTION The CDM Emergency Stop button will release the servos If the robot was in motion when the Emergency Stop button was pressed inertial motion will continue and risk of collision exists Plugging the CDM into the robot with the Emergency Stop button pressed will cause the robot to perform an Emergency Stop While the Emergency Stop Circuit is active the encoders remain powered This allows the arms to be physically moved but remain referenced The current arm posi tion will be updated on the CDM When control of the robot is regained the robot is able to recover from floating inertia and physical movement without having to home The robot will first retract then plot out the new motion To re establish the interlock pull the Emergency Stop button out To regain control of the robot press ESC The robot will remind the user that the current condition is in the Emergency Stop mode by reporting the error message The arms will remain without servo power until a motion command is entered Brooks Automation 6 64 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation pm ERGENCY STOP rey m OF xS ES EE S 3 2 3 5 E A a c 3 Ni 8 Up xo bo m EZ o It o ER 5 85
121. o coxa re E ee ore we eet RH ES TRE IIS dE QE UAE 6 21 o2 M eu Top 6 21 Operational Inferlocks iu iios bead cuta ERR EUER RO CERAETERRUDCRV IE C Ad PE d 6 23 cpu 0 IPC 6 23 CresBas the Operational Inter IoeKa 64244542445 bel d e Xa dI ao qns 6 26 Related Commands eei Sues RE Ea CE EREK Eu RAE E eU EH GO e A 6 26 Pass UNG er Feature 1442224 USA 4 404 1RRR LE LR ERE ARR FERAE 6 26 iv Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Contents MN 003 1600 00 ppecial Notes on RETRACT PIN 2525424342 REE dE REESE RETE ER s 6 26 Special Notes pn the Lower Pak ioacsesouguss a tu rkb re hr ERE acp 6 27 Mapping the Inferlogks cado Edda ak P gnere AA ETATE P ERE d da 6 29 Wafer Presence Serisors Exterid and Rettacts s4 2 09 sees ar Rn 6 32 go i102 CPP 6 32 WPIC E oaa REEL HOOK CedUFADORC Rd IRA RAUREER 3 ed kd qq Ad 6 33 Waer PLAC Pm 6 36 ervo Position BOcOR Ml 14 04 esas Ed ec UC Rad ERR EE E REA do edd 6 37 Sensor Interface DDECIDCADOPIS LL e dopo eo eb ER CER ea 6 37 Ex R Sensor Commands eeso 2044604 krahinat exa REG d hide beds oes 6 37 Water Presence Sensors Radial MODBOD iae Free ROCHE 9 6 38 I MT Water bensmp Technique aacra RERO RR ra Rad 6 38 R MT Placement Criteria eese Re 6 38 E ED Capa sso avi Veios gv edema veda odis td 6 39 Radial Mobon Setup PrOCedUte asa vas ieee devices eeevewss tweed 6 41 Ott Center PICK and PLACE ese uai OR REREOCVERE
122. of this fixture Set the arm state of the robot to on Issue the following command SET ARMS ON Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the procedure again Check the alignment of the arm and the position of home by entering the fol lowing command HOME ALL If the home position is not where desired use the procedure Reset the Home Position to the User Preference on page 9 73 Mount CDM 1 2 Apply power to the robot Ensure the arm state of the robot is off Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO Move the robot to the mount position Enter the following path SETUP CONFIG ROBOT ARM MOUNT ARE THE ARMS CURRENTLY ON NO Brooks Automation Revision 2 2 3 31 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 When the robot is in the mount position the 2 locating pins of the robot outer shaft should be oriented as indicated in Figure 3 9 4 Disengage the robot servos Enter the following path SETUP CONFIG ROBOT SET SERVOS OFF 5 Install adapter to T2 if not factory installed 6 Install the
123. order of the Request Use of ALL implies that the return data values will appear in the stan dard order ARM R T Z See Also RQ POS TRG Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot returns the current position of the A arm in absolute coor dinates RQ POS ABS A ALL POS ABS 0224312 000000 000000 Brooks Automation Revision 2 2 8 91 Command Reference MagnaTran 7 1 User s Manual Request Position Destination MN 003 1600 00 Request Position Destination Purpose Returns the destination position for the current stage of the action command Format RQ POS DST ARM arm R T Z Or RO POS DST ARM arm ALL Response POS DST ARM arm r destination t destination z destination or POS DST ARM arm r destination t destination z destination Arguments ALL Specifies R T and Z in the order presented in the command format ARM arm Field size 1 The arm for which the end effector DESTINATION is being requested If unspecified the response will be for the default arm Arm A The ARM identifier is optional r destination Response field size 7 The current R axis DESTINATION of the robot arm in microns m 001 mm t destination Response field size 6 The current T axis DESTINATION of the robot arm in 0 001 degrees z destination Response field size 6 The current Z axis DESTINATION of the arm in microns
124. page 3 24 Hub style Mag 7 Kit Mount the MagnaT Mag 7 1 Mounting kit supplied ran 7 1 Bisymmetrik BiSymmetrik with the robot drive Arm Set Hub Style Arm Set on page 3 29 MagnaTran 6 Mag 6 Kit Mount MagnaTran 6 BiSymmetrik Mounting kit supplied BiSymmetrik Arm Arm Set with the robot drive Set on page 3 34 MagnaTran 6 Mag 6 Kit Mount the MagnaT Frogleg Mounting kit supplied ran 6 Frogleg Arm Arm Set with the robot drive Set on page 3 38 Non hub Cone Mag 7 Kit Mount the MagnaT Style Mag 7 Mounting kit supplied ran 7 Bisymmetrik BiSymmetrik with the robot drive Arm Set Cone Style Arm Set on page 3 42 These Mounting Kits are installed at Brooks Automation before shipment Brooks Automation Revision 2 2 3 23 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 Mount the MagnaTran 7 Leapfrog Arm Set 3 24 N CAUTION Do not operate the robot until all set up procedures have been com pleted as damage to the robot or arms may result The mount position of the robot is preset at the factory The purpose of the mount position is to provide the operation clearance from the bottom of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a height of 10mm 10000 counts To mount the arms to the robot power connections and communications connections must be complete and ve
125. power is applied does present the possibility of fire or explosion Cleaning fluids may leave a flammable residue If they are being used during servicing the robot the proper pre cautions for use of that fluid must be observed N CAUTION Whenever any cleaning fluid is used during service of the MagnaTran 7 robot all power to the robot should be disconnected and the stan dard precautions for use of that fluid must be employed N WARNING Never use isopropyl alcohol to clean hot parts due to the risk of fire or explosion Allow the robot to completely cool before performing maintenance involving flammable cleaning fluids N WARNING Maximum power consumption for the MagnaTran 7 is 24 VDC at 20 Amps 480 Watts Improper handling of the power source or connect ing devices may cause electric arching creating a fire hazard Brooks Automation 2 14 Revision 2 2 MagnaTran 7 1 User s Manual Safety MN 003 1600 00 Environmental Hazards Environmental Hazards Noise Emission The MagnaTran 7 provides no direct noise hazard during operation When operating normally the robot produces a noise level that is less than 70 db Vibration The MagnaTran 7 provides no direct vibration hazard during operation Any vibra tions produced during normal operation are minimal and cause no hazardous condi tions Brooks Automation Revision 2 2 2 15 Safety MagnaTran 7 1 User s Manual Matrix of Emergency and Corrective Response Act
126. prior to continuing Digital I O in control of robot To release digital I O control of robot enter the command DIO STOP Refer to DIO Stop on page 8 28 for additional information Serial I O in control of robot To initiate digital I O control of robot enter the command DIO START Refer to DIO Start on page 8 27 for additional information MCC processor not alive Verify that no FETs of the theta driver board have shorted out For each FET apply an ohmme ter between pins 1 and 3 to verify resistivity If a FET has shorted out replace theta driver 8 181 Command Reference MagnaTran 7 1 User s Manual Error Code Reference MN 003 1600 00 Error 608 Error 610 Error 611 Error 612 Error 613 Error 652 Error 653 Error 654 Error 655 Error 656 board If FETs are not shorted replace PC104 Card Refer to PC 104 CPU Board Replacement on page 9 58 Robot halting A halt command has been issued to the robot which stops robot motion If the robot is operat ing in the compatibility mode COMPATIBILITY HALT VT5 then the robot must be homed prior to its next move If the robot is operating in the compatibility mode COMPATIBILITY HALT MAG6 then the robot will remain referenced and is ready for the next move Emergency stop on The EMER_STOP interlock for the robot has been activated Refer to Operational Interlocks on page 6 23 The PowerPak accessory has been programmed using the EMER_STOP interlock
127. provides logic and encoder power to the rest of the system The T board has three glass fuses that provide special protection for power distribution Brooks Automation Revision 2 2 4 11 Subsystems MagnaTran 7 1 User s Manual Electrical System MN 003 1600 00 I O Interface Board 4 12 The MagnaTran 7 I O board provides optically isolated serial port access I O access status indicators and some special function access The board has a face plate with the appropriate labeling for user access The Interface Board is connected to the Personality Board via a 48 pin DIN connector which provides address databus and control lines Three types of Interface boards may be purchased with the MagnaTran 7 high side low side and Brooks Automation Marathon Express High Side Interface Board The high side interface provides general purpose digital Input and Output functions for use when high side sourcing logic is required The discrete I O interface is accessed by a 50 pin D subminiature connector on the face plate This connector provides 22 high side inputs and 20 high side outputs See Figure 5 4 for a diagram of the high side circuit Low Side Interface Board A low side switching board is available using active low signals instead of the CE compliant standard active high See Chapter 12 Attached Drawings for the pin out of the connector and refer to MISC I O Communications on page 5 9 and Discrete I O Control DIO on page 6
128. remaining ten parameters is as follows Brooks Automation Revision 2 2 6 59 Operation MagnaTran 7 1 User s Manual PASIV Safety Feature Operation MN 003 1600 00 STATE INACTIVE Interlock NONE Arm NONE Station 0 indicating no stations associated with this workspace Rmin 0 microns Tmin 0 millidegrees Zmin 0 microns Rmax 0 microns Tmax 0 millidegrees Zmax 0 microns The user can now change the default parameters with the SET WSPACE com mand Again the name of the newly created workspace must be a part of the command This command only updates the volatile memory of the workspace definition To store the workspace definition to nonvolatile memory the user must use the STORE WSPACE command which also requires the workspace name as part of the command When changing the radial and Z axis parame ters their respectively minimum values must be equal to or less than their respective maximum values For the theta axis the minimum can be greater than the maximum Auto Create To take advantage of workspace auto create the mode must be turned on The SET WSPACE AUTO CREATE command is used to turn the auto create on or off In auto create mode a workspace is automatically created for a station when the station is defined Station Definitions in Auto Create Serial Interface If stations are set up using the serial interface a vola tile memory copy of the workspace will be created for the SET STN com mand The S
129. rens 5 6 I O 24V Power lInte flaee i2 cud aye 3 hn ov Sul ISTO cue vie sta EH ARR ERO RR rd 61 Magnalrmn7Sungle Attn caicossasssasesu2 PATERE xA 62 Mapenalran Dual ATM vai oocsosesQa ah REA ve ERE Go Maghnalran 7 Leapirog Ast ioscoosade aueh qoe dd 6 4 MagnaTran 7 Z Axis VCE Parameters ss 6 5 MagnaTran 7 Coordinate System Dual Arm Brooks Automation Revision 2 2 Figures xiii Figures MagnaTran 7 1 User s Manual MN 003 1600 00 6 6 Example of Station Coordinate Numbering ees 6 18 be Factory Set HOME Postion d4x ied vdes rad ra OC a eeu RES 6 19 po Mapnalran y Indcslole x6 ons ceases RE ERARA CETERAE ea ERE 6 22 6 9 Typical REtract and EXtend Sensor Locations eeeesees 6 33 6 10 Pre Extend and Successful Action Flowchart 42252 daa 6 35 601 OmCenter FICK and PLACE a2a424 949444 1393 XAR RICO EROR RA 6 43 6 12 Control Display Module with Emergency Stop 0000 6 65 D 13 PowerPak Timing Diagram raicsrsotasrs ditg ndd Ada S4R Rau ka a 6 84 6 14 PowerPak Controls and Indicators 12 4 5 io2oska roh an an 6 86 fel Locating the Dial IndicatOf 24 1k khe oC DERE ERU ERE LEO ER d 7 8 7 2 End Effector Measurement Locations Two Types Shown 7 10 7 3 Positioning the End Effector in the Module 5 2522 rrr es 7 14 7 4 Posiboning the End Effector to Set BIO Lii iseesece enm hehe 7 14 Sl Magnalran 7 Command SEPUCUMEE Iva es tr tunaren i Ena ETTEN 8 7 92 Daley
130. s Manual MN 003 1600 00 Leak Rate Leapfrog LED Lift Linear Rail Load Lock Load Port Module Low Speed Lower LPM m microns Medium Speed MTR Measurement of mass flow through an orifice in torr liters per second Brooks Automation s patented same side dual end effector robot arm system Light Emitting Diode LEDs are used to indicate the presence of volt ages on the control circuit board monitor serial communication trans missions and detect substrate presence in cassette slots or slide out from the cassette Movement upwards For the robot this is movement of the arm to the Up position For the elevator this is movement of the platform to the Up position A precision rail used to provide support and direction to a moving mechanism See Elevator Factory interface tool meeting SEMI factory interfacing requirements for open cassettes SMIF pods or FOUPs delivered manually or via fac tory automated handling systems Usually slightly faster than Homing speed the speed at which the robot moves when a substrate is on the end effector For dual end effector robots the speed at which the robot moves along the T or Z axis when a substrate is present on either or both end effectors or along the R axis when a substrate is present on the active arm Movement downwards For the robot this is movement of the arm to the Down position For the elevator this is movement of the platform
131. s Manual Request Radial Motion Sense MN 003 1600 00 Request Radial Motion Sense Purpose Requests the size of the sensing window for Radial Motion sensors Format RO R MT SENSE LIMITS INNER OUTER WAFER SIZE Response invalue outervalue size Arguments INNER invalue Length from the edge of the wafer to the start of the wafer sens ing window in microns OUTER outervalue Length of the wafer sensing window in microns WAFER SIZE size Wafer size in microns 200000 for 200mm wafers 300000 for 300mm wafers Description Displays the current settings for the Radial Motion detection sensing limits These values along with the position where the R MT type sensor is located in the chamber determine the sensing window Examples To request the inner and outer limits of the Radial Motion sensor RO R MT SENSE LIMITS INNER OUTER WAFER SIZE Response In Monitor Mode R_MT SENSE INNER 10000 OUTER 20000 WAFER SIZE 300000 Brooks Automation 8 98 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Radial Motion Sense In Packet Mode R MT SENSE INNER 10000 OUTER 20000 WAFER SIZE 300000 See Also Set Radial Motion Sense on page 8 138 Brooks Automation Revision 2 2 8 99 Command Reference MagnaTran 7 1 User s Manual Request Reference MN 003 1600 00 Request Reference Purpose Returns the referenced status of the specified axis
132. s Manual Command Reference MN 003 1600 00 Request History most recent record to be displayed If both CMD and ERR are selected they will be sent concomitant by date Latest infor mation is transmitted last If TOT is selected these totals will be transmitted after any CMD and ERR information Order TOT information by axis is fixed not based on date of last error for given axis If number of records is not specified all available records will be displayed Example The following example requests all available history information Command RQ HISTORY CMD ERR TOT Response CMD 10 17 1998 00 20 set sync zero t1 2 956904 t2 2 588184 z 0 000000 ERR 10 17 1998 00 29 place 2 Z MOVING TO STN2 RRE TTOOZUP SLOT1 ARMA 10009 Hard tracking error Z motor 217015 R371204 T 179972 Z 759 CMD 10 17 1998 00 30 store servo all ERR 10 17 1998 00 31 pick 1 R MOVING TO STN 1 REX TTOOZDN SLOT1 ARM A 10009 Hard tracking error T2 motor 217019 R464114 T91173 Z59 ERR 10 17 1998 00 40 xfer 1 2 T MOVING TOSTN2 RRE T TOOZUP SLOT1 ARMA 10009 Hard tracking error T2 motor 217026 R374223 T 140896 Z 4940 ERR 10 17 1998 00 42 move t rel 24464 T MOVING TO STN N RNAS TNASZNASSLOTN ARM A 10009 Hard tracking error T1 motor 217028 R368097 T 241115 Z0 ERR 10 17 1998 00 44 goto n 1 rex z dn slot 3 R MOVING TO STN 1 REX TTOOZDN SLOT3 ARM A 10009 Hard tracking error T2 motor 217028 R 408986 T91947 Z 12676 ERR 10 17 1998 00 48 command syntax error NON AC
133. s Manual Installation MN 003 1600 00 Installation Procedure Serial Communication All communications for operation of the MagnaTran 7 robot by an external controller may be accomplished using a standard RS 232 or RS 422 serial com munications link Connect the cable for serial communications to the connector on the front I O panel as shown in Figure 3 5 Host Communication 1 Connect the serial communications cable to the robot at SIO1 2 Route and connect the serial communications cable to the unit that will be controlling the robot OQ Serial I O 1 RS 232 RS 422 Host Communication MagnaTran 7 Serial I O 2 RS 232 Peripheral Communication Figure 3 6 Serial Connection Locations Peripheral Communication jn Connect the peripheral serial communications cable to the robot at Brooks Automation Revision 2 2 3 15 Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 SIO2 2 Route and connect the peripheral communications cable to the periph eral unit Brooks Automation 3 16 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Installation Procedure Control Display Module Connect the CDM cable to the robot for local control of robot operations to the connector labeled CDM on the front I O panel as shown in Figure 3 7 1 Locate the CDM at an accessible loca
134. s Manual Maintenance and Repair MN 003 1600 00 Z Home Flag Sensor Board Replacement Procedure 10 11 12 13 14 15 Turn off power and disconnect the power and communications connections to the robot J DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock Remove the protective covers as shown in Figure 12 2 N CAUTION Observe proper ESD precautions when handling any electronic device Disconnect the single cable to the Z home sensor PCB P14 Remove the Z home sensor PCB by removing the 2 M3 SHCS Loosely install the new z home sensor PCB using 2 M3 SHCS M3 lock wash ers and M3 flat washers Connect the single cable to the z home sensor PCB P14 Ensure that the robot power cable and cdm cable are connected to the robot Power up the robot Caution the arm mounting fixture is installed Do NOT move the arms Manually position the Z home sensor PCB side to side ensuring that the Z home flag runs through the center of the black sensor Manually position the Z home sensor PCB up and down until its red LED CR3 JUST turns on Carefully tighten the Z home sensor PCB ensuring that the PCB does not move during tightening Note that both the Z home sensor PCB and the Z home flag are slotted for adjustment Remove the 0 062 shims from under the armset forearms If necessary issue the following
135. should move Use a value of 1 or 0 for a non slotted station 1 to n for a slotted station where n the num ber of slots previously set for the particular station ARM arm Indicates the arm that should move Use a value of A the default or B If no arm is specified Arm A will move The ARM identifier is optional NOTE At least one of the optional arguments N R Z or Slot must be specified or the robot will return an error message Brooks Automation 8 36 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Go To Station with Offset Description Any or all of the data fields may be specified on a single command line If the arm is not already at a station N must be specified as part of the command Otherwise a not at station error will occur All motions will follow the speed and acceleration profile appropriate for the currently defined load NOTE The LOAD command may be used to define the load status of the robot s arms before executing the GOTO command The software applies the following limit checks Theta position between the minimum and maximum allowed 0 and 360 Z position between the minimum and maximum allowed based on the arm geometry R position between the minimum and maximum allowed based on the arm geometry For multi axis moves the following sequence of checks and motions occur in the order given for the currently defined load If N is specified s
136. standards include hardware notation software notation document numbering and descriptive warnings These notation standards identify tasks to be performed by the user during a service installation or operation procedure or as a specific input to the robot Hardware Notation The hardware notation system includes identification of dimensioning conventions and naming conventions This notation system is used when describing hardware to simplify descriptions of user actions and robot responses The notation system includes the following typographical and presentation conventions Dimensions Dimensions are shown in metric and English units with the metric dimension first and the English dimension in parentheses This order of presentation is used because metric dimensions are a more universal dimensioning standard this order is not meant to imply that the metric dimension should be consid ered the primary dimension Ex 175 0mm 6 89 in 79 38 mm 3 125 in NOTE Drawings and sketches contained within this manual are not drawn to scale Naming Conventions All hardware names follow industry standard naming conventions These naming conventions include all electrical cabling and identification of mount ing hardware Ex J15 Jack female side of connection P3 Plug male side of connection Ex SST Stainless Steel SHCS Socket Head Cap Screw Brooks Automation Revision 2 2 1 7 Introduction MagnaTran 7 1 User s Ma
137. the application number presently entered in the robot If the application number is shaft7z or shaft7 then the arm state is OFF If the application number is a specific user application number then the arm state is ON An example of a user specific application number is F65 K42 43 1 73 To set the arm state via serial communication issue the following commands SET ARMS ON this command will set and automatically store the arm state to ON The robot will default to the user specific application number previ ously stored in the robot If however the default remains shaft7z or shaft7 re enter the configuration number from the OR SET ARMS OFF this command will set and automatically store the arm state to OFF The robot will default to either the shaft7z or shaft7 configura tion number To request set and store the arm state via the CDM refer to the CDM flow chart on Figure 4 7 on page 4 19 Follow the CDM path SETUP CONFIG ROBOT ARM STATE Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Verifying Robot Calibration Parameters Verifying Robot Calibration Parameters The following procedure can be used to verify that the robot calibration parameters are the same as when the robot was shipped from the Brooks factory TOOLS Laptop computer Robot Quality Report QR PROCEDURE 1 Establish serial communica
138. the log file from Step 1 still open issue the command RQ VERSION to download the firmware revision of the robot to the log file Close the log file Verify that all the information displayed in Steps 1 through 5 is stored within the log file by viewing the file in a document editing program Brooks Automation Revision 2 2 9 5 Maintenance and Repair MagnaTran 7 1 User s Manual Ball Screw Inspection MN 003 1600 00 Ball Screw Inspection The Ball Screw of the Z Drive Assembly is designed for long life and high reliability It is important to verify the operation and alignment of the Ball Screw periodically so that it will operate efficiently Required Tools PC with a serial terminal program with log file capture capabilities Serial or Null Modem cable See Appendix B Tooling on page 11 3 Medium Phillips Head and regular screw drivers Metric set of Allen Wrenches Flashlight Foam swabs and or lint free cleanroom wipes Follow these procedures to inspect the Ball Screw 1 2 9 6 Attach a PC to the robot with the Serial I O cable Open a terminal software program and verify communication with the robot with the command HLLO Setup the communication protocol with the command SET COMM FLOW SEQ M B MON LF ON ERRLVL 5 and the command SET IO ECHO Y Home the robot with the command HOME ALL Move the robot to its maximum Z position with the command MOVE Z ABS 35000 for 25mm robots use the command MOVE Z AB
139. the robot Format HOME ALL R T Z Arguments ALL Performs an integrated home sequence R Specifies homing in the R axis Z Specifies homing in the Z axis T Specifies homing in the T axis NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description The HOME command performs multiple absolute position pattern acquisitions in order to reliably establish the initial position of each axis The absolute reference sys tem for each axis of the robot is established by moving as much as 10mm 1 2 the robot forward backward repeatedly pinging centered about the initial starting position unit the HOME command is either successfully completed or an error is gen erated The sequence to determine its location is described below Sequence for multi axis Homes R axis homes toward retract position Z axis homes downward only on robot s with the Z Axis option T axis homes counterclockwise If a HOME command is entered and the robot is already at the HOME position no motion will occur Brooks Automation Revision 2 2 8 41 Command Reference MagnaTran 7 1 User s Manual Home MN 003 1600 00 N CAUTION The inter axis interlocks used during HOME ALL are not active dur ing individual axis HOME operations The robot will respond to a HOME Z or HOME T command even if the arm is extended The user should verify that the arm is retracted before attempting to
140. the robot s arms or the robot is replaced A complete check of the robot if it was involved when an Emergency Off EMO occurs A partial alignment at the appropriate station s whenever any component such as a cassette elevator the degass module or a robot is replaced A partial check at the problem station when a wafer transfer error occurs A complete check of the robot if it was involved in a collision Required Tools and Test Equipment 7 2 Performing the alignment procedure requires the following tools and materials A set of Allen wrenches in inch sizes A set of Allen wrenches in metric sizes The MagnaTran 7 Robot User s Manual The robot s Control Display Module CDM One wafer of the size for which the system is being set up Granite surface block Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Robot Alignment Dial indicator and base as shown in Figure 7 1 A 6 in steel ruler graduated in hundredth inches The User s Manual s for any devices the robot will interface with Eye Protection Alignment Strategy A complete and accurate alignment ensures that no part of the robot or of any wafer contacts any of the systems interior parts and that no sliding motions occur between a wafer and any support surfaces Completing the alignment in the following order is critical to the final performance of the robot These adjustments will be made using the using
141. to be 0 001 max imum for each inch of wafer diameter Therefore for an end effector that is transport ing an eight inch diameter wafer the end effector s TIR is 0 008 maximum The end effector s TIR is the sum of it s dip and twist Interaction of Adjustments Any adjustment of the end effectors Adjustment Screws or Mounting Screws to cor rect a problem in one axis may affect another axis Adjustment Strategy This procedure uses the bottom surface of a transfer or process module as a reference point to determine planar movement within the wafer delivery zone on the module Brooks Automation Revision 2 2 7 7 Alignment and Calibration MagnaTran 7 1 User s Manual Adjusting the Robot s End Effector MN 003 1600 00 This procedure assumes that the wafer delivery zones of all modules is at approxi mately the same radial extension of the robot s arms The arm should be extended while measuring the end effector runout Adjustment Procedure 1 Set an indicator base on the inside bottom of the module chamber being used i e Vacuum Cassette Elevator Process Module as shown in Figure 7 1 NOTE To ensure the accuracy of all measurements once the indicator base is set up it should not be moved Dial Gauge Module Loadlock Chamber Access Slot NT End Effector Figure 7 1 Locating the Dial Indicator 2 Using the CDM jog the robot s end effect
142. to the user with the following message BROOKS AUTOMATION Next it prompts for selection of the control mode to allow control and moni toring of the robot When the CDM is turned off it relinquishes control of the robot to the host con troller NOTE The CDM does not relinquish control of the robot until it is turned off Unplugging the CDM while it is turned on will not return control of the robot to the host controller The CDM will run an internal check upon power up to determine if the robot is in DIO control mode Emergency Stop Standard The CDM Emergency Stop EMS button is located on the top of the CDM as shown in Figure 6 12 To initiate an Emergency Stop press down on the but ton The CDM Emergency Stop button will halt any robot motion currently in progress and release servo control of the robot arms An Error Emergency Stop circuit is Active error 10029 will be displayed on the CDM if the CDM is turned on and on the serial controller All arm position data and arm refer encing will remain Brooks Automation Revision 2 2 6 63 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 J DANGER The Emergency Stop button will remove power to the motors It does NOT remove DC power to the robot Electrical hazards still exist when the Emergency Stop circuit is active NOTE The CDM does not need to be in control of the robot for the Emergency Stop button to work
143. tools A set of Allen wrenches in metric sizes Replacement Procedure Z N WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 N WARNING Failure to ensure that the robot is not under remote control could result in automatic operation of the robot resulting in personal injury Removal 1 Loosen but do not remove the 4 in line flathead screws used to secure the end effector in the robot wrist Do not loosen the end effector adjustment hardware unless necessary 2 Slide the end effector out of the mounting plate Replacement 1 Carefully slide the end effector between the mounting plate and clamping plate Refer to Figure 9 1 shows both types of End Effector Installation avail able with the MagnaTran 7 NOTE Do not disturb the flatness of the end effector during installation Ensure that the end effector is centered and fully seated against the wrist mounting plate Brooks Automation Revision 2 2 9 29 Maintenance and Repair MagnaTran 7 1 User s Manual End Effector Replacement MN 003 1600 00 9 30 While holding the end effector in place tighten the 4 in line flathead screws starting with the 2 inside screws Do not tighten the single flathead screw it is for adjustment only Verify the levelness of the end effector following the procedure Adjusting the Robot s End Effector on page 7 7
144. unable to move in the theta direction and generates the following error Error 10009 MCC hard tracking error Troubleshooting Process Refer to Communication Related Issues on page 10 4 Brooks Automation 10 10 Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Theta Motion Related Issues Theta Motion Related Issues NS pei E Armset overshoots a Gan eae Armset oscillates a A taught position p 9 when halted during motion motion v Verify that the application Verify that the application number of the robot is correct number of the robot is correct Look for and adjust or NO remove any physical obstruction that may interfere with the robot s movement YES YES Was Issue Resolved Was Issue Resolved Verify that the armset mounting bolts are torqued to 75 88 in lbs YES NO Verify if the motion is repeatable Was Issue Resolved DONE Was Issue Resolved Verify that the system alignment was taught properly NO Was Issue Resolved Verify that armset was installed properly Verify that the Encoder andSync Phase values are consistant with the robot QR NO Was Issue Resolved
145. used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format FIND ENCODER T1 T2 MANI AUTO Arguments T1 Theta 1 axis to be changed T2 Theta 2 axis to be changed MAN Manual data gathering AUTO Automatic data gathering Description Collects the minimum and maximum data for the T1 or T2 motors In manual mode the user must manually turn the motor axis In automatic mode the robot will automatically turn the specified motor NOTE The minimum Z value is found using a home flag N CAUTION Once these positions are changed all stations must be retaught See Also Encoder Setup on page 9 66 for instructions on the use of this command Brooks Automation 8 30 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Find Phase Find Phase Purpose Performs a Find Phase on individual or all linkages N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format FIND PHASE ALL RIT Z Arguments ALL Performs FIND PHASE on all linkages RITIZ Performs FIND PHASE on individual linkages Description This command may be aborted via lt CTRL gt lt C gt at the user keyboard N DANGER This command is NOT used in the normal operation of the robot See Motor Electrical Phase Calibration on
146. wafer speed and pan speed is used for PICK and PLACE only Response Com VT5 SET STORE RQ p atibility COMPATIBILITY COMPATIBILITY COMPATIBILITY RESP VT5 RESP RESP Sets the Response to RQ CPTR RQ POS ABS ALL and RQ STNSENSOR commands to be compatible with VT5 Checksum Mode OFF SET COMM STORE COMM RQ COMM CHECKSUM CHECKSUM CHECKSUM OFFA6 The ALL option is also available for each of the COMPATIBILITY commands For example to request all of the settings RO COMPATIBILITY ALL or to store all set tings STORE COMPATIBILITY ALL or to set all SET COMPATIBILITY ALL VT5 11 14 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Appendices Appendix D Robot Compatibility Table 11 6 shows the commands used to configure the standard MagnaTran 6 com patibility for the MagnaTran 7 Arm A and B Theta positions are 0 apart servos hold position at HALT Table 11 7 Standard MagnaTran 6 Compatibility Brooks Automation Revision 2 2 Parameter Tops Settin Command to Command to Command to yP 8 SET STORE REQUEST Communications RS 232 none with Dip none none Protocol Switch Serial Communi Monitor SET COMM M B STORE COMM RQ COMM M B cations Mode MON M B Command Flow Sequential SET COMM FLOW STORE COMM RQ COMM FLOW Mode SEQ FLOW Terminal Echo ON SET IO ECHO Y STORE COMM RQ COMM ECHO Mode ECHO Linefeed After ON S
147. will be lit If the initialization sequence executes without error then the MagnaTran 7 robot has been properly installed and is ready for final set up Establish serial communication with the robot 1 The TX and RX LED s will flash as communications are sent and received Brooks Automation Revision 2 2 3 21 Installation MagnaTran 7 1 User s Manual Configuration Compatibility MN 003 1600 00 Configuration Compatibility The MagnaTran 7 is compatible with the Brooks Automation VT5 MT5 or MagnaT ran 6 robots The robot configuration compatibility is set at the factory according to user specifications Configuration Compatibility allows the MagnaTran 7 to communicate in the same manner as the VI5 MT5 or MagnaTran 6 robot NOTE This procedure must be performed before installing the arm set See the Configuration Compatibility Commands on page 11 13 on establishing and verifying the appropriate protocol Brooks Automation 3 22 Revision 2 2 Installation Mount the Arm Set MagnaTran 7 1 User s Manual MN 003 1600 00 Mount the Arm Set Use the proper procedure for mounting the arm set to the robot Arm sets from Brooks Automation MagnaTran 6 robots are able to be mounted on the MagnaTran 7 robot drive Table 3 2 Arm Set Mounting Kits Arm Set Mounting Kit Procedure Leapfrog Leapfrog Kit Mount the MagnaT Arm Set Mounting kit supplied ran 7 Leapfrog Arm with the arm set Set on
148. with all attached subsystems including the CDM and the Command Set Verify that the entire system is level Ensure the system is at room temperature and at atmospheric pressure NOTE Ensure that the system the robot is installed in is level before starting the alignment procedure To ensure accuracy and repeatability do not home the robot during the alignment procedure It is crucial that the alignment is performed in the given sequence for maximum oper ating performance of the robot 1 2 3 7 4 Power up and initialize the MagnaTran 7 robot Power up and initialize all devices the robot will interface with Follow the remaining alignment procedures provided in this chapter in the order presented Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Verifying Flatness of Robot s End Effector Verifying Flatness of Robot s End Effector The end effector s must be flat to ensure proper support of the wafers being handled by the robot This procedure checks for the top surfaces of the wafer supports on the end effector to be within 0 076 mm 0 003 in of each other and that no part of the end effector rises above the lowest wafer support This procedure must be performed during initial setup if the end effector is suspected of damage during shipment and at any time that the robot s arms or end effector s are damaged removed and replaced or changed whi
149. 0 Troubleshooting Repeatability Related Issues DONE Repeatability Related Issues Y Wafer is Not Placed To The Same Place Repeatedly v Inspect for any physical obstructions that could interfere with the robot arms and wafer placement YES Was Issue Resolved NO v Verify that the process module and its wafer pins are level YES Was Issue Resolved NO v Verify that the robot s end effector is level and the pads do not show excessive wear YES Was Issue Resolved NO v Verify that the wrist bands are aligned properly YES Was Issue Resolved NO v Inspect the robot wrist bearings and elbow bearings for excessive wear YES Was Issue Resolved NO v Verify that the Encoder and Sync Phase values are consistant with the robot QR Was Issue Resolved CALL BROOKS TECHNICAL SUPPORT Figure 10 10 Repeatability Related Troubleshooting Brooks Automation Revision 2 2 10 23 Troubleshooting MagnaTran 7 1 User s Manual Power Pak Related Issues MN 003 1600 00 Power Pak Related Issues Symptoms Arms drift after halted by Power Pak when main robot power is turned off Troubleshooting Process Verify robot compatibility command is set for a Mag6 halt configuration by issui
150. 0 25 8 0 0 1 1 1 24 9 0 1 0 0 0 23 10 0 1 0 0 1 22 11 0 1 0 1 0 21 12 0 1 0 1 1 20 13 0 1 1 0 0 19 14 0 1 1 0 1 18 15 0 1 1 1 0 17 16 0 1 1 1 1 16 17 1 0 0 0 0 15 18 1 0 0 0 1 14 19 1 0 0 1 0 13 20 1 0 0 1 1 12 21 1 0 1 0 0 11 22 1 0 1 0 1 10 23 1 0 1 1 0 9 24 1 0 1 1 1 8 25 1 1 0 0 0 7 26 1 1 0 0 1 6 27 1 1 0 1 0 5 28 1 1 0 1 1 4 29 1 1 1 0 0 3 30 1 1 1 0 1 2 31 1 1 1 1 0 1 32 1 1 1 1 1 Brooks Automation Revision 2 2 6 49 Operation Discrete I O Control DIO MagnaTran 7 1 User s Manual MN 003 1600 00 R POSITION Used in MOVE Type GOTO The arm will extend or retract at the spec ified station NOTE The EXTEND position is defined using the CDM or the serial interface The RETRACT position is usually the factory set retract position Table 6 14 DIO R POSITION LOW HIGH OPTION A GOTO EXTEND GOTO RETRACT OPTION B GOTO RETRACT GOTO EXTEND Z POSITION Used in MOVE Type GOTO The arm will move up or down in the Z axis at the specified station Z motion is performed at the RETRACT position if radial motion is also specified Any Z motion may be per formed if the arm is already EXTENDED at the station NOTE Up and down positions are defined using the CDM or the serial interface Table 6 15 DIO Z POSITION LOW HIGH OPTION A GOTO UP GOTO DOWN OPTION B GOTO DOWN GOTO UP 6 50 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation
151. 0 OUT PD 7 4 7KNET 4 IN_P31 OPUPT1 8 1 D4 of of 5 BUTTON TXRX 1N5242 6 BUTT_PUP OUT Pt 5 7 DISABLE LOGIC 8 l l Y 9 OPUP12 1 uUo 8 4 AVAL S Xa 11 OUT P 2 b 7 pM OX OPUP14 3 6 DRAWN BY ENA 18 x X EA NX UNLESS OTHERWISE SPECIFIED BROOKS AUTOMATION INC LAYA _14 8 8 424V ROBOT LANA MOCD 17 RESISTORS ARE 1 4W VALUESN OHMS ee 15 ELIZABETH DRE J6 OPUP13 i UT 8 S RESISTOR TOLEANCES 5 CHECKED BY CHELMSFORD MA 01824 4185 iv Na 12V_ISO CAPACITOR VALUESN uFARADS pee as T RS OUT PB 2 Lr PME CAPACITOR TOLERNCES 10 DWG TITLE 3 Pe x v 3 8 APROVED BY pipes oy aov v rs SCHEMATIC PCB I O MAG 7 MX BOARD V 24VDC PWR pu Ocp217 DWG NO NT SD 002 7394 01 MagnaTran 7 1 User s Manual MN 003 1600 00 Glossary This Glossary provides a list of common terms and acronyms used in this document and their definitions Abort Command A command to the product which causes any action in progress to halt and resets any error condition The product is left unreferenced after an abort command Absolute Coordinates The distance from Home the reference position in millimeters or Action Commands Aligner ASCII Assign Commands Atmosphere Backing Pump Brooks Automation Revision 2 2 degrees as appropriate For a robot this is the location of the arm along the three axes R radial T rotational and Z vertical For an elevator this is th
152. 00 00 Set Radial Motion Sense Purpose Sets the size of the sensing window for Radial Motion sensors Format SET R MT SENSE LIMITS INNER invalue OUTERoutervalue WAFER SIZE size Arguments invalue Length measured from the edge of the wafer to the start of the wafer sensing window in microns outervalue Length of the wafer sensing window in microns Size Enter the wafer size in microns 200000 for 200mm wafers 300000 for 300mm wafers Description The Sense Limits along with the position where the R MT type sensor is located in the chamber determine the sensing window The sensing window must be at least 20mm Therefore the outervalue must be greater than 20mm Examples SET R MT SENSE LIMITS INNER 10000 OUTER 20000 WAFER SIZE 200000 See Also Request Radial Motion Sense on page 8 98 Store Radial Motion Sense on page 8 163 Brooks Automation 8 138 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Retract 2 Value Set Retract 2 Value Purpose To set the second retract value R2 for the Pick and Place with an Offset commands Format SET RTRCT2 value Arguments value Sets the second retract location value in microns Description This command sets the value of the second retract location when using the Pick with an Offset and Place with an Offset commands NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original set
153. 1 Reset the Home Position to the User Preference 0005 9 73 Reset Stations When the Home Position is Reset usus 9 75 Resetting Mount Posion se de ss ewes E AR ER VERNA ERATPEAA E A e pia 9 76 Uploading and Downloading Station Values 0005 9 77 Coritrol Display Module Resetting 4122222 e Rh pee unnur 9 81 Ende tbid an cda 2e iaa cbe Edo OP ed ed aedi dCi cios 9 83 Troubleshooting Troubleshooting LOVOFVIOW L raa ak ea ck deb d eia baa oc b dde cb kd adel 10 2 Communication Related Issues uo bapbo sw ep QOL PRU REP CERE S d 10 4 Power Related estes 22e peg eden pei rg eade eke pice eR d p ebbe 10 6 Radial Motion Related IsSl8 amp 25d2as swa qu ER Ed EAS RS RU RU RU ERG x 10 8 Theta Motion Related Issttes 41242 prsoR ER Ra OE Edx D EE dae Ob rdg dra 10 10 Z Motion Related Issues 5452259 LESE er EE baud bEY eb Ade E reme EET 10 12 Find Phase Related 535168724 psp da d E Ed ead rq e a pde deas 10 15 Homie Z Axis Related ISetiesc suas direndbXa Raw Oa EE UR OW dade qd 10 18 Operational Interlock Related 158098 551 43 cerrara PREX RR EPOD VI e ds 10 20 Repeatability Related I5Su86 eisat iri CECK RAO CET KERG EO VR OE CEOs 10 22 Power Pak Related 5508s cad os ohare S EIAS CORRE dE RS db a acd 10 24 Station Value Orientation Related Issues 0 0 0 eee ee eee eee 10 26 Z Brake Dinding Tests 634 erae b AER koninin s enri Tise CDI REPRE E KE 10 27 Determine if the Z Axis is Configured P
154. 1 3 compares the commands used to operate the MagnaTran 6 and MT5 VT5 to the MagnaTran 7 robot and notes any behavioral differences Table 11 4 and Table 11 5 compare the error code differences of the MagnaTran 6 and MT5 VT5 to the MagnaTran 7 robot Table 11 6 and Table 11 6 list the Compatibility Commands used to setup the MagnaTran 7 robot to use the communication protocol of the MagnaTran 6 or the MT5 VT5 Brooks Automation Revision 2 2 11 5 Appendices Appendix D Robot Compatibility MagnaTran 7 1 User s Manual MN 003 1600 00 Command Comparison 11 6 Table 11 3 Command Comparison COMMAND MAG6 MAG7 VT5 MT5 DIO START M6 7 are same N A DIO STOP M6 7 are same M6 7 are same N A FIND PHASE must enter options must enter options GOTO ARM optional ARM optional ARM is a must Wafer speed is used regardless of load status HALT VT5 Mag 6 Mag 7 command structure is the same In VT5 mode the robot comes to a control stop and the arm set servos disengage armset is free moving In Mag 6 mode the robot comes to a control stop and the arm set servos remain engaged armset is under servo control Hilo N A Returns Hello Returns ready string string only HOME V5 M6 7 are same LFIST V5 M6 7 are same MAP M6 7 are same M6 7 are same N A MOVE ARM optional ARM optional ARM is a must Wafer speed is used regardless of load status PICK ARM option
155. 10 1 Communication Troubleshooting 10 5 Troubleshooting MagnaTran 7 1 User s Manual Power Related Issues MN 003 1600 00 Power Related Issues Symptoms 24 volt LED not illuminated located on robot I O board Failure for robot to operate No communication using personal computer or CDM Troubleshooting Process Check facilities power to power supply Verify power supply rating is 24 volt 30 amperes Verify voltage output at power supply is 24 2 volts Verify voltage at robot power connector is 24 2 volts Refer to Power Connections on page 5 3 for power connector pin outs Check power cables for proper connection and continuity Replace robot I O board Refer to I O Board Replacement on page 9 48 Call Brooks Technical Support Brooks Automation 10 6 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Troubleshooting Power Related Issues Power Related Issues No communication through serial connection or CDM v Robot will not operate Check that the robot is properly grounded A v Verify connection between the Internal Power Cable and the Theta Driver PCB 24 Volt LED on the I O PCB not illuminated NO Was Issue Resolved Was Issue Resolved NO Verify connection between the I O and Personality PCB s Was Issue Resolved NO T
156. 1600 00 Start up Start up The MagnaTran 7 robot is started by applying power Once this is done the robot is ready to operate If the host controller is in control of the robot it will accept com mands through the RS 232 serial port or the discreet I O ports If the CDM has been turned on the robot will accept commands from the keypad entries Zh CAUTION All switch settings communication connections and power connec tions should be made before power is applied NOTE Once power is applied the robot will enter a start up state which assumes that wafers are present on the end effectors The speed of all arm motions are governed by this start up state until the robot is either commanded to place the wafers or 3 Axis instructed that the end effectors are empty using the LOAD command 2 Axis Power should be applied by a person trained in the proper use of the MagnaTran robot Operational Check out Verify CDM can be turned on See Control Display Module CDM Operation on page 6 63 Verify Serial I O port is functional See Serial Communication SIO1 on page 5 5 and Set Communication on page 8 121 If operating in parallel mode verify discreet I O ports are functional See MISC I O Communications on page 5 9 and DIO Start on page 8 27 Brooks Automation Revision 2 2 6 87 Operation MagnaTran 7 1 User s Manual Normal Running MN 003 1600 00 Normal Running The exact usage of the MagnaTran 7 robot must be d
157. 18 6 26 RETRACT PIN 6 24 6 25 6 26 RETRACT SEN 6 24 Robot Arms 4 9 Robot Removal Replacement 9 25 RQ BG 8 69 RQ COMM 8 71 RO CONFIG 8 74 RQ CPTR 8 70 RQ DIO OUTPUT 8 75 RO HISTORY 8 76 RO HOME POS Z 8 79 I 4 RO INTLCK 8 80 RQ IO ECHO 8 81 RO IO MAP 8 82 RQ IO STATE 8 84 RO LOAD 8 86 RO LOAD MODE 8 88 RQ POS ABS 8 90 RQ POS DST 8 92 RQ POS STN 8 94 RQ POS TRG 8 96 RQ R_MT SENSE 8 98 RQ ROBOT APPLIC 8 103 RQ RTRCT2 8 101 RQ STN 8 104 RQ STN OPTION 8 106 RQ STNSENSOR 8 108 RQ SYNC PHASE 8 110 RQ SYNC ZERO 8 111 RQ VERSION 8 112 RQ WARN CDM 8 113 RQ WHO 8 114 RQ WSPACE 8 115 RQ WSPACE AUTOCREATE 8 116 RQ WSPACE MODE 8 117 RS 232 Connector 5 6 5 8 RS 422 Connector 5 6 RTS CTS 5 6 RX Indicator 6 22 S Safety Guidelines 2 2 2 3 Safety Interlock 5 17 5 17 SBIT SVLV SEN 6 24 Sequential Mode 8 2 Serial Communication 3 15 Serial SIO1 5 5 SET ARMS 8 119 SET COMM 8 121 Set Commands 8 7 SET CPTR 8 120 SET DIO OUTPUT 8 125 SET HISPD 8 126 SET HOME POS Z 8 127 Set I O State 6 26 SET INTLCK 8 128 SET IO ECHO 8 129 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Index SET IO STATE 8 130 SET LOAD 8 132 SET LOAD MODE 8 134 SET LOSPD 8 135 SET MESPD 8 136 SET R MT SENSE LIMITS 8 138 SET RTRCT2 8 139 SET STATION OPTION VIA 8 145 SET STN 8 140 8 140 SET STN OPTION 8 142 operating 6 26 SET STNSENSOR 8 147 SET SYNC PHASE 8 149 S
158. 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Controls and Indicators Controls and Indicators Overview The MagnaTran 7 Robot is designed to be installed in multi station transport modules and remotely controlled and monitored by either a host controller or through the Control Display Module Therefore very few user accessible controls or indicators are needed Those controls and indicators available are only expected to be used dur ing testing of the robot prior to installation in a system or during service Depending on the I O board type provided the Interface Panel will be different Figure 6 8 shows the I O Panel for a High Side I O board Others look similar Controls All settings are controlled by the command set No user controls are accessible on the robot Indicators All user visible indicators are located on the front panel of the robot See Table 6 4 for indicator functions Brooks Automation Revision 2 2 6 21 Operation MagnaTran 7 1 User s Manual Controls and Indicators MN 003 1600 00 Communication Send Receive 24V Indicator of O O QO 24V IX RX POWER O CDM ISC 1 0 N pe fae MagnaTran 7 SIO 2 SIO 1 md Su Su O O Q uis 3 Q Figure 6 8 MagnaTran 7 Indicators Table 6 4 Indicator Functions
159. 2 port for hand held control module CDM Additional RS 232 port for operation of peripheral devices SIO2 Discrete I O for wafer sensing and safety interlocks MISC I O Discrete I O for parallel I O control Open Collector MISC I O Brooks Automation Revision 2 2 1 13 Introduction MagnaTran 7 1 User s Manual Specifications MN 003 1600 00 Accessories Hand held Control Display Module CDM for control teaching and trouble shooting Power Fault Management Power Pak battery backup Arm Mount Fixture Custom designed End Effectors Brooks Automation 1 14 Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Specifications Standard Arms Operating Specifications Load Capacity in addition to end effector mass 1 0 kg 2 2 Ibs each end effector High Capacity option 4 6 kg 10 0 Ibs for Single Frogleg and BiSym metrik arms Wafer Sizes 100mm 125mm 150mm 200mm 300mm SEMI standard compatible end effectors are available for each size Extension Limit 1050 mm armset dependent Exposed Materials Aluminum Stainless Steel Quartz Kalrez Viton Teflon Temperature Range Maximum Operating 120 C Maximum Exposure 120 C Wafer Transfer Time Single Frogleg Arm with typical PICK and PLACE sequence 735mm extension 180 rotation 0 4 second Z motion for 200mm wafer size 5 8 seconds typical at 0 3g acceleration limit 8 4 seconds typical at 0 1g acceleration limit BiSym
160. 21 kg 46 5 Ibs 2 axis Failure to take the proper precautions before moving it could result in personal injury Safety glasses should be worn at all times when installing the robot 1 Prepare to lower the robot into the chamber by using a crane and the M8 eye bolts secured to the top of the flange If the robot has the PowerPak installed it may be temporarily removed See Power Pak Replacement on page 9 63 for instructions on how to remove and replace the pak 2 Lower the robot into the chamber slowly and ensure that all alignment pins are properly located before fully seating the robot into the chamber 3 Insert and tighten all mounting bolts until the lock washers are fully seated then tighten the bolts an additional 1 4 turn Facilities Connections The MagnaTran 7 robot requires electrical power and communications connections The following procedures provide the information required to make all facilities con nections to the robot The power supply should be tested and the connection to 24V power and ground should be connected and tested prior to connecting to the robot Electrical Connections The MagnaTran 7 robot operates from a single voltage power source 1 Locate the power supply for the robot such that the 24V power cable can be cleanly routed from the robot to the power supply See Power Connections on page 5 3 for pin out of the power connector and Brooks Automation 3 10 Revision 2 2 MagnaTran 7 1 Use
161. 217 10uF tant 35 e ug IN ISO10 T IN PI e Collector Anode1 b NAE IN P11 5 Emitteri Cathodei 2 1 IN isOt1 P wale 51 Collector2 Anode2 4 1 Emitter2 Cathode2 MOCD217 U10 IN P13 IN IS012 ae Collector1 Anode1 1 m f 1 Emitter1 Cathode1 S 4 IN ISO13 INP 8 Collector2 Anode2 2 DF2E DC24V Emitter2 Cathode2 5 i 8 L 8 0 24V ROBG MOCD217 24y_is00 19 _ Uti i9 O424V CUST IN ISO14 24V CUSTO P3 Collector1 Anode1 gt J H t 6 In pif 6 Emittert Cathodei 1 IN ISO15 amp Collector Anode2 7 TUST UST i Emitter2 Cathode2 F MOCD217 U12 IN ISO16 IN PIS Collector1 Anode1 4 LLL IN P1 g Emittert Cathode1 725 711 IN ISO17 5 Collector2 Anode2 4 P2 Emitter2 Cathode INO input 1 MOCD217 ins 2 U13 INS 3 IN P18 IN ISO18 INA a 3 Collectort Anodet ING 5 IN P1 g Emittert Cathode 2 71 IN ISO19 ING 6 nput 6 Collector2 Anode2 IN7 7 input Emitter2 Cathode2 IN8 8 linput8 e INS input MOCD 17 IN1G 10 inburio uds IN11 linput11 IN P20 8 Collectort Anodet Hi IN ISO20 HAES ni 13 REI N Pf 6 Emitter1 Cathode1 3 T IN ISO21 3 INT4 14 Collector2 Anode2 4 INT5 15 1 Emitter2 Cathode2 J7 INTS 16 aam ear 17 MOCD217 Bu Q1 ees NTS 18 U15 L 9 2 uias INTS 1 IN_IS022 IN Pee o e Collector1 Anode1 4 hoy 21 IN P2 g Emittert Cathod
162. 270 but wishes to adjust it visually The operator would first select Setup and indicate Station 3 The operator would then choose Learn then T then Go To If an approximate location such as 270 is entered the robot arm would physically rotate to 270 The operator can then select Jog which causes the arm to move in small increments by pressing the circular arrow keys for rotational motion Holding the key down causes continual Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation motion until it is released the actual position of the arm is displayed as it moves When the operator has adjusted the arm to the desired position the Store option should be selected to indicate that the value should be stored as the value of Theta for Station 3 Pressing Store returns to the previous menu giving the operator the opportunity to establish another variable The operator might then select R to set the Extended position of the arm The operator can then select Jog and hold down the Extend or Retract key until the arm is extended to the proper distance then press Store which would Store that value of R as the extended position for Station 3 and return to the previous menu Suppose the values of the other station parameters are already known The operator might then press Escape to return to the previous menu where Assign can be selected and the remaining parameters
163. 3 Command Reference MagnaTran 7 1 User s Manual Store Retract 2 Value MN 003 1600 00 Store Retract 2 Value Purpose To store the second retract value R2 for the Pick and Place with an Offset commands Format STORE RTRCT2 Description This command stores the value of the second retract location when using the Pick with an Offset and Place with an Offset commands NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory Brooks Automation 8 164 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Station Store Station Purpose Transfers from RAM to non volatile memory the values of the various station related parameters Format STORE STN station ARM arm R T Z LOWER NSLOTS PITCH or STORE STN station ARM arm ALL Arguments ALL Specifies all station variables for the indicated station station the number of the station for which parameters are being specified ARM arm the arm A or B for which parameters are being stored R the station s radial extend location in microns m T the station s rotational axis location in 0 001 degrees Z the z axis location of the Wafer Transfer Plane For a station with a cas sette the Wafer Transfer Plane is a half wafer thickness below the center the center of the first slot LOWER the distance in microns bel
164. 3 3 3 Ensure that all mounting surfaces and seal surfaces on both the robot and the chamber are clean by following the Robot Cleaning Procedure on page 9 13 4 Ensure that all seals are properly installed Brooks Automation 3 8 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Installation Installation Procedure i L 09 13 DO NOT TOUCH BOTTOM OF O RING GROOVE FULL R DETAIL V SCALE 2 1 F 211125 er tue tie 236 241 ote 210 475 R 03 MAX SEE NOTE 1 i Z Ay n 72 t ent E AK ZA Js 158 168 G 29 50 R035 MAX PEN FULL R TYP SECTION J J 2520 2525 Ap DETAIL P AY ROTATED DETAIL 90 SCALE 2 1 SLOT THRU 375 THRU 12 PLACES EQ SP ON A 9 10 000 B C NOTES 1 SURFACE FINISH OF O RING SURFACES SHALL BE 38 MICROINCH OR BETTER WITH RADIAL LAY OR LAY PARALLEL TO RUN OF GROOVE 9 2520 2525 THRU THERE SHALL BE NO SCRATCHES OR CHATTER MARKS ACROSS ANY SEAL SURFACE VISIBLE WHEN VIEWED WITH THE NAKED EYE 2 SURFACE FINISH UNLESS OTHERWISE SPECIFIED 63 MICROINCH SEE DETAIL P Figure 3 3 Top Mount Details CSK FARSIDE 06 X 45 Brooks Automation Revision 2 2 3 9 Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 Robot Installation HEAVY LIFTING Ergonomic Hazard The MagnaTran 7 Drive weighs 29 5 kg 65 Ibs 3 axis or
165. 44 Indicates that the date of the firmware revision is 11992 and the version num ber is 4 44 Brooks Automation 8 102 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Robot Application Request Robot Application This command is for VT5 compatibility only Mag 7 Mag 6 compatibility users see Request Configuration on page 8 74 Purpose Returns the application number of the robot Format RO ROBOT APPLIC Response application number Arguments application number The Brooks Automation customized application number Description Application Number f42 s41 m40 40 73 o cP 9o nD 3 3 B iw 9 92 1 oO y Ue Ro s y f g a RR Ha Example Command RQ ROBOT APPLIC Response 142 s41 m40 40 73 Brooks Automation Revision 2 2 8 103 Command Reference MagnaTran 7 1 User s Manual Request Station MN 003 1600 00 Request Station Purpose Requests for the specified variable the absolute coordinate values of the various sta tion related parameters Format RQ STN station ARM arm R T Z LOWER NSLOTS PITCH Or RQ STN station ARM arm ALL Response STN station r location t location bto lower n slots pitch or STN station r location t location bto lower n slots pitch Arguments ALL Specifies R T Z LOWER NSLOTS and PITCH in the order presented in the command format station Field size 4 The number of the station for wh
166. 56 STORE HOME POSZ Stores the Z axis home position 8 160 STORE SYNC PHASE Stores the Sync Phase for the T1 T2 and Z 8 170 motors STORE SYNC ZERO Stores the home reference for T and Z 8 171 Brooks Automation Revision 2 2 8 21 Command Reference MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Command Reference 8 22 This command reference provides a detailed description of each command supported by the MagnaTran 7 robot All commands within this reference are listed in alphabet ical order The following information is provided for each command where appropri ate Purpose Provides a brief description of the command Format Shows the format of the command to the robot including the names of any arguments required by the command Response Shows the standard response from the robot to REQUEST commands detailed in the Format section Arguments Provides a description of each argument listed in the command syntax Description Provides an in depth description of the command and its features Examples Provides samples of the command s usage Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Check Load Check Load This command is for the Radial Motion Sensors only Purpose Updates the arm load status to the correct state Format CHECK LOAD station arm INTLCK ALL DIS ENB EX ENABLE DIS ENB SBIT SVLV SEN DIS ENB VLV SEN DIS ENB
167. 600 00 Serial Issue the following command SET SERVOS OFF CDM Use the following path SETUP CONFIG ROBOT SET SERVOS OFF 4 Install the arm mounting fixture 5 Loosen the T1 outer shaft screws Loosen the T2 inner shaft screws If these screws do not readily unbolt provide a small amount of play to the arms by slightly loosening the two black knobs of the arm mounting fixture Mag 7 1 LeapFrog arms T1 has 3 screws T2 has 2 screws Mag 7 1 BiSymmetrik arms T1 has 4 screws T2 has 2 screws Mag 6 arms remove M4 SHCS 12 places 6 Using the mounting fixture remove the arms from the robot T1 T2 shafts To avoid possible damage to the arm set do not lift on the arms 7 Set the arm state to off Serial Issue the following command SET ARMS OFF CDM Use the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO 8 Re engage the servos Serial Issue the following command HOME ALL CDM Use the following path HOME ALL To install the arms use the Mount Arm procedures in Chapter 3 Installation for instal lation of the appropriate arm set Brooks Automation 9 28 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 End Effector Replacement End Effector Replacement This procedure indicates the proper method for installing and adjusting the end effec tor on the robot arms Required Tools Performing the end effector replacement procedure requires the following
168. 600 00 Appendices Appendix D Robot Compatibility Table 11 3 Command Comparison COMMAND MAG6 MAG7 VT5 MT5 In Monitor Mode the response is VT5 STN 01 ARM A TYPE RE ACT LO SEN 01 STATE OFF MAG6 STN1ARM A TYPE RE ACT LO SEN 1 STATE OFF In Packet Mode the response is VT5 STN 01 ARM A TYPE RE ACT HI SEN 01 STATE OFF MAG6 STN 1 ARM A TYPE RE ACT HI SEN 1 STATE OFF SET COMM DREP is sup DREP is sup Has DREP ported also anew ported alsoa new AUT REQ option LF option LF option SET HISPD V5 M6 7 are V5 M6 7 are V5 M6 7 are same same same SET LOSPD V5 M6 7 are V5 M6 7 are V5 M6 7 are same same same SET IO ECHO V5 M6 7 are V5 M6 7 are V5 M6 7 are same same same SET IO STATE M96 7 are same M6 7 are same N A SET LOAD M6 7 are same M6 7 are same N A SET STN M6 7 are M96 7 are No ARM should same ARM is same ARM is be used optional optional SET STN OPTION MG6 7 are same M6 7 are same N A SETSTNSENSOR MG6 7 are M6 7 are ARM is a must same ARM is same ARM is optional Theerror optional The error codes are differ codes are differ ent from that in ent from that in VT5 VT5 STORE COMM DREP isnotsup DREP isnotsup Has DREP ported but witha ported but witha AUT REQ new option LF new option LF option Brooks Automation Revision 2 2 11 9 Appendices Appendix D Robot Compatibility MagnaTran 7 1
169. 7 is made up of several functional subsystems designed for ease of use maintenance and repair These subsystems are modular in design to allow ease of maintenance and to minimize Mean Time To Repair MTTR The individual mod ules that make up the robot are described in Chapter 4 Subsystems Special Features The Brooks Automation MagnaTran 7 provides the latest Brooks advancements in robot technology Special features of the MagnaTran 7 include Brooks Automation patented Time Optimal Trajectory motion control allows very high operating speeds with passive wafer support Special commands simplifying robot installation and setup MagnaTran 7 PASIV M safety feature provides user programmable access zones limiting travel of the robot arm to user programmed zones Software diagnostic functions improving Brooks Automation serviceability Advanced firmware for local or remote monitoring and diagnostics Operational interlocks providing equipment and wafer safety Safe recovery from power failure with optional uninterrupted power supply High reliability coupled with Brooks Automation Global Serviceability Brooks Automation Revision 2 2 1 3 Introduction MagnaTran 7 1 User s Manual Operation Overview MN 003 1600 00 Operation Overview The MagnaTran 7 robot may be operated in either of two ways directly by the host controller or through the use of the hand held Control Display Module CDM When bei
170. 803 418 o3 OUTS DDMZS0PNK 7 s alo Pea 15 QUT P12 SPAREOUT3 OCD217 x OUT ISO4 5 4 04 16 OUT x80 DG 14 OUT P13 OUTPUT ENABLE RESET QUT IS04 8 is DS purs Qandil s bee L13 OUT P14 SPAREOUT4 OPUP2 1 U24 8 OUT ISO6 7 16 06 14 OUTS PC7 NS P OUT _ISO7 a 07 OUT Z ETEN OUT P 2 Naha 7 Le Faut anp 12 8255PLCC OPUPS UL Rv5 Rve Y a 2 wit ASET_FAULL 10 0ER vs H 19 C20 21 EB OUT BB Ww Ni EE 5 5 Hocb217 SUNG gH l hoopFhoopF hoops J DEMZ9SNA197 Eb OPUP4 1 U25 8 J4 J5 Vv 1 4 OUT Pt 2 ly x 7 BYPASS 1 SABLE RC 91 MOTION INTERLOC K YPASS 9 N INTERLOC K OPUP5 3 6 4 U26 x Interlock c22 cs 77 OUT P 4 Natal 5 OUT ISO8 1 20 outs Defeat OCD217 7 OUT 1SO9 2 O1 19 OUTS ltoopF toopF x OUT 1S01 312 Q2 i8 OUTIO OPUP6 1 U7 Ja OUT 1901 4 03 717 OUT1T a Y OUT ISO12 54 04 16 OUTTA OUT Fo 2 Nah 7z OUT ISO1R 8 i 95 15 OPUP7 3 S 64 iu 07 H x BUTT FRJP ai OUT E 4 wx 5 9 08 12 424V ISO a OCD217 10 FAULT GND 1 1 FOR J8 U9B 2N7002 Hc CE 2 NS T CEMVCISO REFERENCE TERN 9 D OPUP8 1 U28 8 ULN2987 1 BATT LOW IN28 TxD 13 Y BZ J7 i t ONLY 2 B TXA DRIVEN 15 S M 5 TXA DRIVEN ww p 1 BUTTON TXRX d OUT FB 2 SAL 7 i RELAY 3 INTRLOCK SRC Nag RXA DRIVEN TEN ME RXA DRIVEN i iBUTTON OPUPS 3 e o aes 4 9 NA RN8 s p24 pes 26 27 md a 3 qe 4 70543 0001 OUT 4 wha 5 12KNET E UPS L J OCD217 2 hoor oopF hoopF hoopF 74ALS240 RN9 A 2n7002 D3 veco 16 1 M RESET OPUP10 1 U29 8 i 1N5232 2 ID PUP NZ J 3 IN_P3
171. 9 8 z prane p 8 ig i DISABLE MO 24v KA CIE 6 IN P20 ees UOS T ET 24V ROBG 24V Present enable d E Fa IN_P21 OPUPIO 19 acl ri A8 A16 p Ut 0 24V_CUST S Be 8 IN P22 EE EEEE 5 ls 9 IN P23 IN P14 8 1 INPUP14 1 dF C8 c16 P m OPUS S Collector1 Anode1 F5 Tis 1 OPUP18 IN P13 g_ Emitter Gathode1 INPUP1S 100 348 033 12 OPUP17 5 Collector2 Anode2 F S10 18 OPUP18 Emitter2 Cathode2 D 14 OPUP19 Eee nee VEN EERE NB 14 PUPI MOCD217 RXA_DRIVEN ur TXA DRIVEN IN P18 3 Colector Anodet H INPUP16 Emitter1 Cathode1 IN P1 E Collector2 Anode2 3 INPUP17 ira P2 R5 R6 Emitter2 Cathode2 INO di TAS QT m MOCD217 INT o 2 vcco o u13 IN3 g 3 i IN P1g 8 INPUP18 IN4 4 psiu E imer quen Ne SIO1 RX d mitter athode EE 4 39 4 CDM NPI 8 Collector2 Anode2 INPUP19 Mood ine 7 DS1 T 5 Emitter2 Cathode2 INS 8 6 NC 9 INS od RN3 MOCD217 10 flat spot Z e iRV1 Ave 1 OPUPO IN10 Catho M i 8 ENO Switch veco 2 OPUP1 U14 INTI 11 ae RUB 3 OPUP2 IN Pad Bi exc pum INPUP20 IN12 i t 1 OFA ROBT ESTE E OPUPA IN Pei 5 Emittert Cathodet 3 INPUP21 Nia 14 6 OPUPS 5 Collector2 Anode2 IN21 IN15 O 15 CDM PRESE 7 OPUP6 1 Emitter2 Cathode2 JZ IN16 16 SII Ir s 17 NTR Ini lock INTELOG 5 QEUPT MOCD217 Oi ue NI q 18 10 OPUPS U15 See A INt9 E 11 OPUP10 IN P22 8 1 AC FAIL ISO RZ 11k IN20 Intrlock src is als o 12 OPUP11 7_ Collector Anodet gt IN21 21 EMO CDM 13 OPUP12
172. A voc oda ea es when ewes bh die re de EORR a ia 12 18 SOY aT Cnr G 1 IOS Loa ee eee er ee ret RU eee sere Te ere eee re rT eee ree Terre TT ere ter ri Reader s Comments Brooks Automation x11 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Figure Title 2 1 Locations of Hazardous Points on the MagnaTran 7 ol Space Begubemenis oo pb AR HORCUIHOOUEECROR RA ae et De Amm Space Requirements seda saa Leda bt rr da ER 3 lop Mount Debs ssosodekoth eb RR EIER RR HR 3 4 Power Connections 0 0 ccc ccc hne 3 5 Power Connection Location aanas aasa saaana 3 6 Serial Connection Locations 0 0c eee eee ee 3 7 CDM Connection Location cis sao bre a EY sands 28 DIO Connection LocaBonia eaa xad p trer tari 29 Maepnalran 7 MOUNT POSIDOR 444 52x rari ka Ead 4 1 Protective COVES ouenscelQUAIRPRE FA Wage vui eer d daa 4 2 TINISDVeSSSEDDIS aeserd ded abo ERE RERAUCCAET REOS 4 3 LDnveassembly eiiseb boe bL HERE HER HERE aks T4 Mapnalran 7 Arm Set TV PGS siiis cuiua Lbs REA 4 5 Printed Circuit Board Locations i225 4 4 oe RR 4 6 Power Pak Sub SysteM ceeeeses eter rh Rech RES 4 7 CDM Command Flow Chatt si cciicaccscaascaavanionas 5 1 Robot Interface Panel i44 i4 444444 bes rprka E RES ER FER 5 2 PowertCableInsallall lice kscsh seAdassstuticirehk vana So Power Contecter inti ada sewn sews news kge e Rex o4 Mipn cide lO Crt 1 ssscieess cewseadiaw Ed pad 5 5 Low Side I O Circuit 4456 6 d440a Hee sens
173. ACE commands but no Z Axis motion will occur No error will be issued During a PICK operation the MagnaTran 7 robot executes the following sequence of moves Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load Simultaneously moves downward and rotates to the Down position at the Sta tion and Slot number specified using a speed and acceleration profile appropri Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Pick ate for the currently defined load Extends the arm using a speed and acceleration profile appropriate for the cur rently defined load to the R position for the station Moves to the Up position using a speed and acceleration profile appropriate for the currently defined load and picks up a wafer Defines the arm executing the PICK as being loaded Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load For a discussion of speed and acceleration profiles for the MagnaTran 7 robot see Motion Control on page 6 13 NOTE The operator can force a uniform high speed throughout the PICK operation by first invoking the SET HISPD command The set speed remains in effect only until the completion of the action command following the set speed command N CAUTION Setting the HISPD command prior to a PICK command will cause all motion during the PICK command t
174. ALL and RQ SYNC PHASE ALL for the values stored in the robot For additional troubleshooting steps refer to Radial Motion Related Issues on page 10 8 Theta Motion Related Issues on page 10 10 or Z Motion Related Issues on page 10 12 MCC soft tracking error Error motor is already moving Error motor is not configured Error motor is not referenced Home the robot by issuing the command HOME ALL Error motor is already referencing Error motor is currently moving Error unable to calculate trajectory Illegal number of polls calculated Unable to calculate absolute position Error Encoder off by many sectors Error Encoder failed multiple times Check if failure location is repeatable Record position of failure For Z encoder failure Verify Z encoder is secured to leadscrew via two 4 40 SHCS and Loctite Verify Z encoder is tightly secured to robot chassis via three M3 SHCS Replace Z encoder Refer to Z Encoder Replacement on page 9 45 Call Brooks Technical Support For T1 or T2 encoder failures Record which encoder T1 or T2 failure occurred Error Board Power Failure Blown Fuse Check if fuse is blown by inspecting fuses or if respective LED is not illuminated Refer to Fuse Replacement on page 9 56 Replace fuse as needed Check if robot cables and or board set have a good ground to the chassis Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Cod
175. Automation Revision 2 2 G 11 Glossary MagnaTran 7 1 User s Manual MN 003 1600 00 robot s arms For an elevator it is the up and down of the platform Brooks Automation G 12 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Numerics 24V Indicator 6 22 A AC FAIL 6 85 Accessories 1 14 Action Commands 8 7 Alignment 3 48 Application Number 6 8 Arm Removal 9 27 Arms 4 9 description 6 2 installation 3 23 load capacity 1 15 weight 1 16 B Background Mode 8 3 Background Plus Mode 8 4 BATT LO 6 85 BiSymmetrik Arm Set 3 23 6 4 Brooks Factory Repair Services 9 23 Buffer Board Replacement 9 41 C Calibration Procedure 9 36 Cautions 1 10 CDM Connector 5 20 5 21 Center of Gravity 3 3 CHECK LOAD 8 23 Cleaning end effectors 9 15 general 9 13 vacuum seals 9 17 Command Brooks Automation Revision 2 2 Index fields 8 6 flow 8 2 syntax 8 8 Communications options 3 14 specifications 1 13 CONFIG ROBOT APPLIC 8 25 Configuration Compatibility 3 22 Configuration Errors 8 184 Configuration Number See Application Number Control Display Module connecting 5 20 description 4 17 Emergency Stop 6 63 installation 3 17 Controls 6 21 CREATE WSPACE 8 26 D Data Bits 5 6 Data Fields 8 6 Default Settings 11 2 Depot Field Repair 9 23 Dial Indicator 11 3 Dimensions 1 7 1 9 DIO Assignments 5 15 DIO Control 3 18 5 15 DIO Monitoring 5 15 DIO START 8 27 8 75 DIO STOP 6 46 8 28 Discrete I O Com
176. B STN11B Station 12 Arm A STN12A Station 12 Arm B STN12B Station 13 Arm A STN13A Station 13 Arm B STN13B Station 14 Arm A STN14A Station 14 Arm B STN14B Station 15 Arm A STN15A Station 15 Arm B STN15B Station 16 Arm A STN16A Station 16 Arm B STN16B The values associated with the remaining ten workspace definition parameters are as follows STATE ACTIVE Interlock Same as STATION OPTION SBIT SVLV SEN Arm Same as station arm Station Station number Rmin Rob ot retract value Tmin Station T value Zmin Station Z value Station lower value Rmax Station R value Brooks Automation Revision 2 2 6 61 Operation MagnaTran 7 1 User s Manual PASIV Safety Feature Operation MN 003 1600 00 Tmax Station T value Zmax For slots 2 Station Z value For slots gt 1 Station Z value pitch slots 1 Defining Tmin and Tmax Tmin can be set to a value less than equal to or greater than Tmax The robot will consider the area starting from Tmin and rotating clockwise to Tmax as the valid theta workspace By this definition workspaces starting from Tmax and rotating clockwise to Tmin or starting from Tmin and rotating counterclockwise to Tmax are outside of the workspace Assigning an Interlock to a Workspace To define an interlock to a workspace the corresponding input signal must already be mapped The mapped input signal must be of wither SVLV_SEN or S
177. B Tooling Appendix B Tooling The following special tools and fixtures are supplied with the MagnaTran 7 Robot for use during transport and maintenance Table 11 2 Tools and Fixtures Part Number Description Dependent on Arm Mounting Shipping Bracket arm set 001 1865 01 Serial or Null Modem Cable 000 1262 01 Dial Indicator with base as shown in Figure 7 1 002 4576 01 Gap setting fixture as used in Z Hard Stop and Over travel Limit Switch Adjustment on page 9 53 002 5791 01 Motor Enable Interlock Bypass Jumper optional Brooks Automation Revision 2 2 11 3 Appendices MagnaTran 7 1 User s Manual Appendix C Torque Settings MN 003 1600 00 Appendix C Torque Settings There are no user serviceable bolts requiring tightening to specific torque settings All user serviceable bolts use lock washers and should be tightened until the lock washers are fully seated then tighten the bolts an additional 1 4 turn Table 1 American UNC Thread Tightening Torque Socket Head Cap Screw Flat Head Screw Button Head Screw Newton Inch Newton Inch Newton Inch Size Meters Pounds Meters Pounds Meters Pounds 2 56 847 7 5 722 6 4 722 6 4 4 40 1 801 16 0 1 073 9 5 790 7 0 6 32 3 387 30 0 2 145 19 0 1 411 12 5 8 32 6 201 55 0 3 387 30 0 2 597 23 0 10 24 8 919 79 0 7 339 65 0 5 081 45 0 Newton Foot Newton Foot
178. BIT SVLV SEN type Refer to Operational Interlocks on page 6 23 for the description and operation of the MAP command Once an interlock as been defined to a workspace then the ability to access that work space is dependent on the state of the interlock If the interlock signal indicates that the slot valve is closed then the workspace is considered inactive and movement into it is prohibited If the interlock signal indicates that the slot valve is open then access into the workspace is permitted PASIV commands 6 62 The following commands are used to create define and verify the PASIVTM work spaces Create Workspace on page 8 26 Remove Workspace on page 8 68 Request Workspace Mode on page 8 117 Request Workspace AutoCreate on page 8 116 Set Workspace on page 8 153 Set Workspace AutoCreate on page 8 154 Set Workspace Mode on page 8 155 Store Workspace on page 8 173 Store Workspace AutoCreate on page 8 174 Store Workspace Mode on page 8 175 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation Control Display Module CDM Operation The CDM may be plugged into or removed from the robot at any time All major functions available through the robot s control software are available through the CDM The CDM is designed to be easy to use and self explanatory Power Control On Off CDM Mode When the CDM is turned on it will identify itself
179. Bos D5 aed ASSY 170 0027 03 B06 p A06 07 07 D2 BE Bt PARE ow iocHRDY 419 B12 RN A12 PC104 B b B13 A13 C00 Tanp cND 9 AC FAIL UPS HALT B14 AT ATA C01 SBHE MEMCS16 9 ARTT LOW Ue I O BOARD Bis A16 als C02 1OCSt6 4 Se EROS B18 Aja A18 C05 IRAI D05 DBOi A13 IRQ12 B20 REFRESH A20 cor Bo Rar 2 ROBOT NOTE a Hn em 9 ASSY 002 4854 01 x o SEE SHEET 2 FOR I O BOARD CONFIGURATION B24 IRQ4 A24 Cit D11 e 25 A25 C12 D12 a B26 OSs A26 C13 D13 B27 A27 C14 D14 B29 A29 C16 D16 B30 A30 C17 D17 B31 A31 C18 D18 B32 A32 C19 D19 ESQ 132 14 G D ESQ 120 14 G D PC104 A CONNECTOR REI PC104 B CONNECTOR Ka Mtmon aa reer ee amywonwa r ALILO amemonaarr CLOS TC CC eC ECC CCC CCC CMO HMM OHHH Ho ooMAMaOOOCCOCCOOOCOOOOO ELUCET ULLA l l LUG 24V EN INTERLOCK OK ZPH1 MAG PH MAG rd e 1j 4 4 PERSONALITY BOARD ata ZPHRSE CP 8 8 BEN 7 TI1PH1MAG ZPHASE CN is e GRY TE 002 3752 01 2053 3 LE T2PHIMAG ZPHASE AP 4 4 ORG T2PH2MAG ZPHASE_AN E 2 GRN T2PHSMAG TIPHIDIR INDEX VCCA o 1 1 RED TIPH2DIR INDEX T2SIN x Tee Be i T1COSV 24V EN nie CPU GND CPU_ 5V INDEX i 100 348 xxx P2 MANN MN MAUI OOOOOQO o e e T C2 E10 QQ P 00 O2 O QL CO t LO COO QI CO st LO Co P OQO LOO t LO CO 77 LOO sf LO CO I 00 0 O QOO xf 10 CO NOSIDOMOOO TNCS IDQPMOO0O CK CO t L0 C0 77 QN CO SE L0 CO I 00 0 O QI CO s 0 CO z321922229 0070 9588d8 nd br s sr 00000000005 BBDBBD a mm inamnan799999995555555 r r T QC st 10 CO QO
180. CH mode Arguments mode Sets the speed of the robot to the CDM jog speed ON Jog speed OFF Normal speeds Description This command will set the robot into the teach speed mode The robot arm will move at CDM jog speeds for all three axis Using the off option will revert the robot to the previously set speeds Brooks Automation Revision 2 2 8 151 Command Reference MagnaTran 7 1 User s Manual Set Warning CDM Status MN 003 1600 00 Set Warning CDM Status Purpose To enable the warning feature of the CDM Format SET WARN CDM status Arguments status Sets the status of the CDM warning feature ON enabled OFF disabled Description This command is used to turn the CDM warning feature on or off If the feature is enabled the host will receive an unsolicited error message CDM has control of the robot when the CDM is turned on Additionally when the CDM is turned on or off warning messages CDM has been turned on and CDM has been turned off will be displayed appropriately Brooks Automation 8 152 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Workspace Set Workspace Purpose This command is used to create work space parameters Format SET WSPACE name STATE statelINTLCK intlck ARM armlSTN stn RMIN rmin RMAX rmax TMIN tmin TMAX tmax ZMIN zmin ZMAX zmax Arguments name state intlck arm stn rmin rmax tmin tmax zmin ZMAX De
181. CHELMSFORD O o5 POWER DOWN K Ste Ga AD fAfS SQ Hees CAPACITOR VALUES IN uFARADS MJV 10 21 97 OUTPUTS o 13 DIRE GV CLS INHIBIT En 4 24V ENABLE a a Bie p T 5 To CAPACITOR TOLERANCES 10 DWG TITLE 6 otiz SPARE 3 OUTPUT FROM CPU 1 AB A16 APROVED BY WIRING DIAGRAM MAG7 1 o pz SPARE 2 c B8 B16 j ocs SPARE 4 a q cs C16 3 OPTIONS SHOWN o8 RELAY COMMON ROBOT PERSONALITY DWG NO DBi5 F COM BOARD WD 003 1600 00 MAG 7 1 RELAY I O BOARD E IN P 0 23 QPUPIO 20 QUT P 0 19 Ui 47k I O uses internal power when no jumpers present or no customer power present R1 m 8 I O uses customer power w
182. CHO state ON Echo enabled OFF Echo disabled checksum Specifies the checksum option state ON Checksum enabled OFF Checksum disabled data rep Specifies the data reporting flag in VI5 compatibility format only See Appendix D Robot Compatibility on page 11 5 AUT Automatic mode Brooks Automation Revision 2 2 8 121 Command Reference MagnaTran 7 1 User s Manual Set Communication MN 003 1600 00 REQ Request mode NOTE At least one argument must be specified If the ALL argument is specified no other Description 8 122 argument name may be specified Sets the specified serial I O configuration in RAM only A description of both the communications modes available and the command execution modes available are provided below Refer to Operating Modes on page 8 4 for an in depth discussion of these modes Mode Flow Monitor mode is a user friendly communications mode All responses from the robot are descriptive and easy to understand This mode is best used when a person is communicating with the robot through a terminal and is recognized by the prompt Packet mode is a computer based communications mode All responses from the robot are short with minimal descriptive information provided This mode is best used when a host controller is communicating with the robot and is rec ognized by the RDY prompt In sequential mode the robot executes the command completely before return ing a READY signal
183. CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the procedure again Check the alignment of the arm and the position of home by entering the fol lowing command HOME ALL If the home position is not where desired use the procedure Reset the Home Position to the User Preference on page 9 73 Brooks Automation Revision 2 2 3 33 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 Mount MagnaTran 6 BiSymmetrik Arm Set 3 34 The MagnaTran 6 Robot s Arms may be installed on the MagnaTran 7 using the fol lowing procedure N CAUTION Do not operate the robot until all set up procedures have been com pleted as damage to the robot or arms may result To mount the arms to the robot power connections and communications connections must be complete and verified Communication may be through the serial port with a computer or through the CDM The following procedure identifies the commands for both methods Arm Removal Replacement Procedure 1 Apply power to the robot 2 Ensure the arm state of the robot is off
184. CTOR 1200HM 24V 180 12V_ISO IOPORT D 0 7 11 IN P23 16 1 INPUP15 l raise 2 _ _ POT 2 INPUP16 IN P7 g Emittert Cathodet l3 INPUP7 AIO 8255PLCC 3 INPUP17 5 Collector2 Anode2 2 D9 154004 4 INPUP18 Emitter2 Cathode2 General purpose I O po rt 5 INPUP19 GP10 6 INPUP20 ME LM340AT 120 16 1 IN PO 7 INPUP21 1 3 P1 Veco IN P1 A ALB IN P8 8 INPUPB N QUE IOPORT A0 MCC RD 3 IN P2 9 7 Collector Anode1 5 A1 A9 D NK Emitteri Cathode 2 IOPORT A1 MCC WR RN1 4 IN P3 AS ACCU IN P9 6 INPUPS z B1 B9 p IOINTERUPT 5 IN P4 11 5 Collector2 Anode2 4 C6 6 7 X O C1 C9 P X Txoa2 422RN 6 IN P5 row X Emitter2 Cathode2 10uF_ tant 0 1uF tant Ah AD RX232 422RXP 7 IN P6 A aeRO U7 Sa og x 9 B2 B10 D B AT K MOCD217 422 XP 8 IN P7 14 X o c2 C100 4227 IN P8 DAVANE ne imei ATI TXB 232 a IN P9 gt IN Pig 8 1 INPUP10 1 lOPORT po 9 B8 BITH HXB 232 11 1N P10 10KNET i celeetor Anpdst rs C3 C11 4 Emitteri Cathode1 gontor or RD aea He nett E Emme Peg 1 NEUE IOPORT D3 a RIS R DISABLE LOGIC 4 IN P13 Emitter2 Cathode2 IOPORT D4 b status to MCC IN P14 IOPORT D5 a A13 PS TXA DRIVEN MOCD217 IOPORT D6 65 cia D RXA DRIVEN u10 IOPORT D7 pe pode RXD RAW 16 1 IN P15 IN P12 CE ET POE INPUP12 IOSELO TXD RAW 2 IN P16 72 Coll 2 IOSEL1 Be BIA p RN2 3 IN P17 IN P1 g Emittert Cathode1 5 INPUPIS JOSEL C6 C14 B 1 vec JIN PIA Collector2 Anode H3 4 DF2E Dc24v A7 A15 D Emitter2 Cathode2 5 IN P1
185. CYCLE The PowerPak contains sealed lead acid batteries Dispose of or recycle in accordance with federal state and local requirements Initial Installation 9 64 If installing a Power Pak on a MagnaTran 7 that did not previously have a Power Pak some minor changes must be performed first 1 2 Turn off power to the robot Disconnect all cables to the robot Remove the robot covers Replace the internal power cable from the interface panel to the T1 T2 board with a power and communications cable from the interface panel to the T1 T2 board and the I O board Replace the covers Install plastic fasteners and clamp bar to bottom plate of MagnaTran 7 Install Power Pak as described above in Replacement Procedure Verify that the switch is in the off position 0 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Power Pak Replacement Install power cables Install power cable from 24V OUT of Power Pak to 24V IN or the robot inter face panel Install power cable from the 24VDC power supply to the 24V IN of the Power Pak Power supply must be off while making connections Turn on the power supply Turn on the Power Pak power switch The power to the robot is now controlled by the Power Pak When the power switch is turned off there is a 2 second delay before power is removed from the robot Brooks Automation Revision 2 2 9 65 Maintenance and Repa
186. Communication SIOL Luo ug ier rs Hp CR ER a RR ER b 5 5 Serial Communication SIL Loue aquse ea edere boo eoo edem eC rd 5 8 MISC I O Communicati iau d Saa end bd Ra des E adsensu bus Ru Aus 5 9 Con Display Module a Voas eed EH Ea nied ERR E I ht ed acted 5 20 Brooks Automation Revision 2 2 5 1 Operational Interfaces MagnaTran 7 1 User s Manual Interface Overview MN 003 1600 00 Interface Overview All operational interfaces to the MagnaTran 7 robot are connected to the robot Inter face Panel as shown in Figure 5 1 The chapter provides instructions for fabricating these interfaces For installation of these interfaces refer to Installation Procedure on page 3 8 MagnaTran 7 Interface Panel Figure 5 1 Robot Interface Panel Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 Power Connections Power Connections If the MagnaTran 7 1 was purchased with the Brooks Automation Marathon or Marathon Express Cluster Tool or with a Brooks Power Supply module the power cable is included with the power supply Disregard this step If the power supply is user supplied the power cable must be fabricated using the fol lowing procedures See Specifications on page 1 12 for the power supply require ments The CE compliant MagnaTran 7 applies improved product reliability by using kn
187. Compatibility MagnaTran 7 1 User s Manual MN 003 1600 00 Table 11 5 compares the error code differences of the MagnaTran 6 to the MagnaTran 7 Table 11 5 Error Code Comparison Mag 6 60 Error No Existing Mag 6 60 Error Code Error No Mag 7 70 77 Error Code 411 Station Not Initialized 416 Station Not Initialized 412 Offset Too Large 417 Offset Too Large 413 Invalid RTRCT2 418 Invalid RTRCT2 501 MCC COMM Error 527 MCC COMM Frror 502 MCC Queue 528 MCC Queue 503 MCC No ID 529 MCC No ID 707 Not used No equiv 708 Pick Failed 721 Pick Failed 709 Place Failed 722 Place Failed 11 12 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Appendices Appendix D Robot Compatibility Configuration Compatibility Commands The following commands may be used to ensure the communication protocol of the MagnaTran 7 to be the same as the MT5 VT5 Arm A and B Theta positions for a given station are 180 apart servos freewheel at HALT Table 11 6 shows the commands used to configure the standard VT5 MT5 compati bility for the MagnaTran 7 Table 11 6 Standard VIS MT5 Compatibility Payatneter Tope Settin Command to Command to Command to yP 8 SET STORE REQUEST Communications RS 232 none with Dip none none Protocol Switch Serial Communi Monitor SET COMM M B STORE COMM RO COMM M B catio
188. D RAW Z9 30 l4 38 Bay eur voc TYPICAL jst 9 88 BI4 p pa ee SIO2 41 41 41 DRY OUTT o OUTPUT psp 9 C6 C14 x B o 42 42 42 DBV OUT2 CIRCUT ua AL A15 eT 43 43 43 DRV OUTIS PF 9 B7 B15 9 8 SEA TEM sepes _ o Ec 8 45 45 DRV OUTIS J v I 348 Ke 46 46 46 DRV OUTIS TBD B8 Bl6b 1 47 47 47 DRV OUTI 168 amp 18 9 48 48 DRV OUTIS OUTPUT FROM CPU 120 56 8 8 PRV ouTI9 16 UDN2987A PERSONALITY DB50 MALE BOARD TYPICAL EXTERNAL CONNECTIONS MAG 7 1 HIGH SIDE I O BOARD J6 TNCS 424v ISO J6 24V BATT LOW UPS n ROBOT AC FAIL UPS 4VCC 24VDC EE MTR EMO 0 5A ROBOT o 14 MTR EMO SRC JU MAX COM 9 SE R EXT NHB SRC iea o b 1 15 LEXT x o INPUT 1 1 3 DIR2 EXT INHIBIT s Tie DIR2 EXT INHIBIT SRC CIRCUT MAG 7 1 RELAY I O BOARD wr 2 20 x 4 3 3 p x gA DIR3_EXT_INHIBIT TXB 232 2 3 CDM EE rd DIR3 EXT INHIBIT SRC__ 002 4212 01 RXB 232 X o LS DIR4 EXT INHIBIT 10K INPUT TO CPU x D 9 5 50 L18 DiB4 EXT INHIBIT PERENNE 6 6 05 18 DIR4 EXT INHIBIT SRC STOP1 DISCRETE Se DIRS EXT INHIBIT 1 AT Eus 1 0 INPUTS o 19 DIRS EXT INHIBI
189. DISCRETE CONTROL Indicates the robot is in DIO control or not Table 6 19 DIO Control LOW HIGH OPTION A DIO control other control OPTION B other control DIO control ERROR Indicates there is a current error condition see ERROR NUMBER below Table 6 20 DIO Error Report LOW HIGH OPTION A No error ERROR OPTION B ERROR No error Brooks Automation 6 52 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation Discrete I O Control DIO ERROR NUMBER 0 2 Indicates the error that has occurred Table 6 21 Error Codes Error Condition Bit 2 Bit 1 Bit 0 OPTION A No Error Robot commanded to move before being homed Home sync failed Motion error wafer not detected wafer detected Valve interlock error Other errors OPTION B No Error oO Robot commanded to move before being homed OOo oO CO oO O OO o Home sync failed eo Motion error wafer not detected wafer detected oO oO Valve interlock error Other errors REFERENCED STATUS Indicates the robot is referenced Table 6 22 DIO Referenced Status LOW HIGH OPTION A Referenced Not referenced OPTION B Brooks Automation Revision 2 2 Not referenced
190. DN2987A Logic one Refer to specification for UDN2987A All discrete input signals connected to the MagnaTran 7 must be open collector as shown in the circuit in Figure 5 4 All discrete output signals from the MagnaTran 7 are open collector NPN circuits oS o R TYPICAL INPUT INS INPUT CIRCUIT N LOAD a E 1R OUTPUT CIRCUIT Figure 5 4 High Side I O Circuit Brooks Automation Revision 2 2 5 11 Operational Interfaces MagnaTran 7 1 User s Manual MISC I O Communications MN 003 1600 00 Low Side I O The Low Side interface requires the input to be grounded to the switch state A low side switching board is available using active low signals instead of the CE compliant standard active high See Chapter 12 Attached Drawings for the pin out of the connector and refer to MISC I O Communications on page 5 9 and Discrete I O Control DIO on page 6 45 for references on setup and descriptions of commands Connection of external devices to the MagnaTran 7 Robot for monitoring and control through discrete I O lines is done through the 50 pin connector located on the I O panel of the robot There are 22 DIO IN and 20 DIO OUT lines I O external and internal power is discussed in MISC I O Power on page 5 14 NOTE An LED turned ON is 0 LOW and an LED turned OFF is 1 HIGH This is because the output is also ACTIVE LOW The signals are logic levels defined as follows
191. Dei Ea CERCA S ERGOE dob d Pope RO M oed ba 4 4 11 12 Drive Assembly c sini cer dated aca rb ened ober ERR anaes 4 5 Z AXIS DYING ASSO siosasa qas ssa EE Pdaeriddaa ed e ddasqqirtd 4 7 J ls col RR TM CP mm 4 9 PISCE System cccoroi dave e dide veo e KON GaSe SE EENE EEEE EEEN rN 4 11 PCIORCPU Supervisor DOU Lio daas iade 3 14r R P cede eda edd d 4 11 Personality Motion Control Computer Board 0005 4 11 T1 T2 Axis Driver Board and Z Axis Driver Board 4 11 L OIDUer ute DOR 53 4 4 RE EORR bo ERR HER eh pedes d 4 12 lo 4 eTRPFM 4 15 lower QUDDy 2a daakegaa axe ddaseXxPA x en TE dexcateddaxdadeda 4 15 voir e rm 4 16 Control Display Mod le 4443 25 EE ERA IE EO HOHER EROR CE Eoo aoo 4 17 Pureonal BIpek DIBEEMIS 22esuaadsdixwcekdi da erac orb eee SC d 4 18 Brooks Automation Revision 2 2 iii Contents MagnaTran 7 1 User s Manual MN 003 1600 00 Operational Interfaces Interface OVERVIEW 24294 9 asa base een dees KENIA ER HAS ER LAKE HER AO 5 2 Power Suge eee eee ee ee eee eee ee ee HOP EE RIDES 5 3 senal Cemmuticatlon SIC 641269 x eR TREVATECEPET REPE RA RARAEPET RA uous 5 5 OWT PONG aae Li4da 444 Exact de Ed Ear Eid Peer ad bw 5 7 Sera mia DILU aas vd bee Rd PURTAVE N E ERA D pEdqbR ees Geeks 5 8 MISC V O Communica lofiBu dodo cubed pened edu bud edi esq e edes 5 9 niter 4515 rm 5 10 Low del D ooosd4
192. Do 7 9B3 B11 RXB 232 132 ISOATION TO 200V MUST BE 32 32 PRV QUT x RdG5ORI DO o 68 G14 b 33 24V WARNING DO NOT 33 33 BRV BUT4 C oBOT TOPORT D2 9 A4 34 EXCEED MAXIMUM RATINGS 34 34 DpRV OUTA COM IOPORTDS B4 J3 LE bic d e DRV OUT4 IOPORTD3 g 6 L88 S8 2evours RTOS Q AS Aia D P S 186 8 87 be outs ooro 9 B5 B13 P M FXR DRIVEN TxA 232 3 BR OUr Poro 0 C5 C13 o RORWw Fo 38 38 38 DRV OUTS IOPORT D7 RXD RAW 7 39 39 39 DRV_OUT9 IOSELO Q A6 Ai4p TXD_RAW RXA 232 ER 40 40 40 DRV OUTO VCC TOSEL1 B6 B14 P 8 SIO2 41 at M DBV OUT TYPICAL oe RS Rig B 31 oe gs ae es 43 43 43 PROUT OUTPU 24V ENABLE a B7 ee 3 a 1 44 44 DRV OUT14 CIRCUT e U1A 7 15 p _ 48 2 45 DRV OUTI5 am 948 AIG p gt 8 46 46 DRV OUT16 B8 BI65 1 47 47 47 DRV OUTIS C8 C16 4s 48 48 DRV OUTIS dd 38 E DRV OUTI9 TO PERSONALITY eis TYPICAL EXTERNAL CONNECTIONS TE DOS X g MASS DESDA RIDEI BRARD eNO P2 EXT INO 1 1 1 EXT IN1 INPUT TO CPU 424V ISO le 72 2 EXT IN2 BATT LOW UPS 3 7 2 EXT IN3 AC FAIL UPS VCC 24VDC EXTIN4 TYPICAL 10K 24V ENABLE ROBOT 5 5 5 EXT INS COM 9 c8 T 6 EXr Ne INPUT E C er 1 Jt 7 g f EXT IN7 CIRCUT 1 1 EXTINS 2 p 5 58 a i 1 CDM EXT IN9 10 10 10 EXT INTO wK ua MAG 7 1 HIGH SIDE I
193. Documentand Drawing Numbering 2023229 AXE CO E ERE 1 9 Notes Cautions Warnings and Pictograms 6 0000 00 1 10 Mandal USQEO L4 kno Eder RES ada bes aA Rr RECS I PERO 1 11 PSC 44 244 14 ERE EA Re VEA 404 RT ERROR ENTE 4E QE EEUU ER doa 1 12 RODO TIVO 1o odo od hae AES dE did bi US be 65a ees 1 12 Sia 3r XINIB IU ceci d has id ded cedro va a c LU Red s a 1 15 Company OVEIVIEW aid ees dex Veo tbbex es aere ade e a E Per da 1 17 Quality POCO ee ee ee ere ee ee re ere re ap ded 1 17 Vision Statement 0 cc ec ee eee es 1 17 Duchess Ti oere santa adsis Owe eee bee eee See Rea bere 1 17 Brooks Automation Revision 2 2 i Contents MagnaTran 7 1 User s Manual MN 003 1600 00 Safety Safety Consideras ai avs d ERR OERRER EORR ERROR E dre RE d oo EO 2 2 Personnel Safety Guidelines ioieeosdedese are rhe E aa 2 2 Equipment Safety Guidelines aaesassexaxdda aketdsisaK dde dad 2 3 Disconnect Devices dnd Inte Iocka i iua 3 eds RR RORERDELDREEE EORR HORERO 2 5 Disconnect Devices 1049239 ERE VOR REFER Ses iw P ERE ees eee es 2 5 MM OO 2 5 Mechardcal Hasaid 1222 9 edd et qa oronbo itorik En CUL CER edd bR RE P duas 2 6 Electrical Hazards peri kasd de ya Shed eer eek E ddaa P daa Pd R d ta da d dores 2 7 Electrical Hazard Classificato e Leaders y as brania kysk rias Pedo 2 8 Laser Hazarde 94950944 054505 Fate ke rE 054 SHS R ee PIT AEERqUE NVETP ERE Y 2 9 Los HOS loses eee CROP cae ewes Ida do edd bm pes
194. EL RC R1 EXE Power cycle the robot and begin the standard upgrade procedure using REMOTE U from the host Downgrading from V2 2 to a previous pre V2 2 version 1 Ensure that the host PC is using the latest version of REMOTE EXE i e the version on the robot not the version associated with the software version that is being downgraded to If necessary retrieve it from the robot using the fol lowing command COPY RC REMOTE EXE REMOTE EXE Using the aforementioned file lists ensure that there are no extra files on the robot Files on the robot can be displayed by typing the following command DIR RC If there are extra files present delete them one by one using the following com mand Brooks Automation Revision 2 2 9 85 Maintenance and Repair MagnaTran 7 1 User s Manual Firmware Upgrade MN 003 1600 00 DEL RC filename Delete the three main bin configuration files unused prior to V2 2 as follows DEL RC OBJ_MAST BIN DEL RC OBJ_DATA BIN DEL RC MAST_CFG BIN Delete the MAG7_MCC OUT file as follows DEL RC MAG7_MCC OUT Begin the standard upgrade procedure using REMOTE to transfer files one by one from the host to the robot Do not use the U option when downgrad ing Initial booting of the robot with the new software 1 When upgrading or downgrading between software versions where one is prior to V2 20 two errors may be reported Database Checksum Error and Cannot
195. ET 1 5 v y v TOE sats U14 ius X 9Q c1 tb TIS TXMZ RN6 44 x 44 of X o a2 AD i 46 1 IN P15 OCD217 OCD217 X 0 B2 B10 RXMZ 2 IN P16 P B2 Paras 4 7KNET 3 IN P17 IN P20 8 U17 1 IN ISO20 IN P28 8 U18 1 IN ISO28 1 2 UM A11 P X TxB a2 E IN E 7 w w X 9O B3 B11 IOPORT DO des Bil EXE osa 8 IN P20 IN P211 6 3 IN ISO 1 IN P291 6 3 IN ISO29 IOPORT D2 AS RXC 232 8 IN P22 v 4 4 v 4 TD 1 IOPORT D3 status to MCC DISABLE LOGIC 9 IN P23 Mocpeiz t MocDeiz voco A A M9 Lu IOPORT D4 cac ris Q IN P24 PR TER A xe IOPORT D5 TXA DRIVEN IN P25 IN P22 U19 IN ISO22 LOW o B5 B13 8 1 IN P30 8 U20 1 IN ISO30 YELLOR owm BT a des Erg p RX DAEN EE uy vy oe IOSELO PAS A14 TXD RAW 13 IN Par Z e 24 Z x 24 BED R4 S1 x 3 SIO SERVICE IOSELO alee Bid 4 IN P28 IN P23l 6 3 IN ISO23 IN P31 T6 3 IN ISO31 1 DS2 2 Sx T5ISO 8 IOSELZ o c6 C14 vcc 15 IN P29 A v A v v 2k Bes A O A7 A15 5 Kx Pag 5 Kiwi 4 OUT FAULT Q8 X 91 OCD217 OCD217 SS P a DISABLE g 87 B15 i t 5 o C7 C15 ES i Elis d o4 DB9 RX 9 Bn Bie IN_P30 F Z 5 2 amp ko bo 8 m es S le E R6 4 7k GT21MVXE hoopFhoopF hoops J DEMZ9SNA197 100 348 033 IN P31 dd s eg N7510 E 4 cg 4 ETT TXA DRIVEN E RXA_DRIVEN 4 P2 R7 R8 77 gn tc pis 1k 1k FOR IN Aa hoopFhoopF hoop s2 REFERENCE No E voco ol 4 ONLY IN3 9 3 INA psiu ps2u 9 SIOl RX SIOl TX xO 3 INS e of of 4 4 O4 ING oe pss ps4 f 1 ds pu 9 8 R ds 99 INS d 4 Rv2jjRvs
196. ET COMM LFON STORE COMM LF RQ COMM LF Carriage Return Error Reporting 2 SET COMM STORE COMM RQ COMM Level ERRLVL 2 ERRLVL ERRLVL Data Reporting REO SET COMM STORE COMM RQ COMM DREP DREP REQ DREP Terminal Echo MAG6 SET STORE RQ Compatibility COMPATIBILITY COMPATIBILITY COMPATIBILITY ECHO MAG6 ECHO ECHO Theta Coordinate MAG6 SET STORE RQ Compatibility COMPATIBILITY COMPATIBILITY COMPATIBILITY COORDT MAG6 COORDT COORDT Theta coordinate system defines theta HOME for Arm A and Arm B as 0 HALT Compati MAG6 SET STORE RQ bility COMPATIBILITY COMPATIBILITY COMPATIBILITY HALT MAG6 HALT HALT Capture MAG6 SET STORE RQ Response Com COMPATIBILITY COMPATIBILITY COMPATIBILITY p atibility CPTR MAG6 CPTR CPTR Wafer Speed MAG6 SET STORE RQ Compatibility COMPATIBILITY COMPATIBILITY COMPATIBILITY SPEED MAG6 SPEED SPEED 11 15 Appendices Appendix D Robot Compatibility MagnaTran 7 1 User s Manual MN 003 1600 00 Table 11 7 Standard MagnaTran 6 Compatibility Command to Command to Command to Parameter T in arameter Type Seting SET STORE REQUEST Sets the speed for MOVE and GOTO action commands to be com patible with MAG6 pan speed is always used when LOAD is OFF Response Com MAG6 SET STORE RQ p atibility COMPATIBILITY COMPATIBILITY COMPATIBILITY RESP MAG6 RESP RESP Sets the Response to RO CPTR RO POS ABS ALL and RQ STNSENSOR commands to be compatible with MA
197. ET SYNC ZERO 8 150 8 156 SET TEACH 8 151 SET WARN CDM 8 152 SET WSPACE 8 153 SET WSPACE AUTOCREATE 8 154 SET WSPACE MODE 8 155 SET ZBRAKE 8 156 Setting the Station Option 6 30 Setting the Station Sensor 6 31 Shut down 6 91 Single Arm Motion 6 10 Single Pan Arm Set 6 2 SIO1 6 22 Site Requirements 3 2 Slot Valve Interlock States 6 30 Software Installation 3 19 Software Notation 1 8 Specifications 1 12 Speed 6 13 Standard CDM Connection 5 20 5 20 Station Coordinate System 6 17 Station errors 8 179 Station Sensors 6 24 6 25 Station Setup Errors 8 180 Stop Bits 5 6 STORE COMM 8 157 Store Commands 8 8 STORE DIO OUTPUT 8 159 STORE HOME POS Z 8 160 STORE IO ECHO 8 161 STORE LOAD MODE 8 162 STORE R_MT SENSE LIMITS 8 163 STORE RTRCT2 8 164 Brooks Automation Revision 2 2 STORE STN 8 165 STORE STN OPTION 8 167 STORE STNSENSOR 8 169 STORE SYNC PHASE 8 170 STORE SYNC ZERO 8 171 STORE WARN CDM 8 172 STORE WSPACE 8 173 STORE WSPACE AUTOCREATE 8 174 STORE WSPACE MODE 8 175 Success codes 8 179 SUP 4 11 Supervisor Board 4 11 SVLV_CTRL 6 24 Switch Settings 11 2 T T Rotational Axis 1 12 T1 T2 Axis Driver Board description 4 11 operation 4 5 replacing 9 41 T1 T2 Buffer Board Adjustment 9 43 9 45 T2 Drive Subsystem Removal 9 29 9 32 Temperature maximum exposure arms 1 15 maximum exposure drive 1 12 maximum operating 1 12 Theta Motion 6 12 Time Optimal Trajectory 1 3 6 13 Torque
198. G6 Checksum Mode OFF SET COMM STORE COMM RQ COMM CHECKSUM CHECKSUM CHECKSUM OFFA6 The ALL option is also available for each of the COMPATIBILITY commands For example to request all of the settings RO COMPATIBILITY ALL or to store all set tings STORE COMPATIBILITY ALL or to set all SET COMPATIBILITY ALL MAG6 11 16 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix E User Setting Tables Appendix E User Setting Tables The Brooks Automation MagnaTran 7 is customized at the factory to the users speci fied parameters Accompanying the robot is a Brooks Automation Quality Report OR which lists all the factory assigned parameters In the occurrence that the user re configures the robot the new parameters should be recorded below in the event that a failure occurs and robot parameters must be restored Wafer Size 100mm 125mm 150mm 200mm 300mm other Version Number Table 11 8 Robot Configuration CONFIG Configuration Value APPLIC ARM SERVO SPEED WINDOW MOTOR T1 MOTOR T2 MOTOR Z NAME Brooks Automation Revision 2 2 11 17 Appendices MagnaTran 7 1 User s Manual Appendix E User Setting Tables MN 003 1600 00 Table 11 9 Current HOME Settings DATE Z Axis Table 11 10 User Setting Sync Zero Home Position SYNC DATE SYNC ZERO T1 SYNC ZERO T2 ZER
199. IN P243 6 eer eid 3 BATT LOW IS R8 11k l 22 g when CDM is presen t 14 OPUP13 i 5 Emitter2 Cathode2 4 4 4 INTRLOCK_SRC 24 pprional ndi Supplie jii 15 OPUP14 141A 20 a JO Power For Full Isolati on CDM Not Present EMO BYPAS S m EN Fi MD100 I d 25 la 25 005 T K15 24V ROBG r k MOCD217 VE x24V CUST o 2 Z 24V RTI Pig RX232 4228X 3 SIO1 QUIB PO 19 12V ISO Q QIQ 19 Wrest Fused at sourc e gt O28 m 3 a 17 l22z xP 8 20 Outputs to Worl d U20 9 u21 IA OHOBGO gt Ed OUT_ISO0 z OUTO Lt PRESENTI z 5 ge IOPORT DO 38 T OUTB PO 35 OUT oo zi Anodet Collector OUT ISO0 OUT ISO1 Ln O1 x OUTI qs PA le h22 5 IOPORT D1 a7 DO PAO 4 OUTB P1 OUTB RF 212 ivi i8 QUI OPUP1 gx Canad cem e OUT 1802 31 95 516 OUT2 2 D29 7 IOPORT D2 36 p Pas OUTB P2 OUTB PI 4 12 n OUT PI OUT Pi 4 Cathod A Paes 5 OUT ISO1 OUT IS03 Al 93 pis OUTS 3 1N4004 DF2E DC24V DEMZ9SNA197 IOPORT D3 35 ps pag 2 OUTB P3 OUTB P 6 143 1Yvs 14 OUT P anode miter OUT IS04 Sis os p14 OUT4 35 2880 ohm TOPORT_D4 33 D4 44 OUTB P4 OUTB B 8 12 OUT B MOCD217 OUT ISO5 6 ig 66 p13 OUTS Vpickup max 16 8 v RV3 JRV4 IOPORT D5 82 De a 48 OUTB P5 OUTB Rt 11 at ove 9 OUT R OUT ISO6 25 07 p12 OUT6 3e IOPORT D6 31 pe pag 42 QUTB P6 OUTB P5 13 2a ve LL 9UT B u23 RN6 OUT 1807 8 is 68 pil QUT A IOPORT D7 30 41 OUTB P7 OUTB F5 15 5 OUT P OPUP2 1 8 16 1 OUT ISO0 9 10 OUTS D7 PA7 2A3 2Y3 Anodet Collectort 5 4 GND COM 39 vA OUTB E 17 3 OUT E OUT E 2 x 7 OUT I
200. IN io num in TOI NOT DIGITAL OUTT o num out Arguments name Specifies the user reference name to be assigned to the specified I O 20 characters maximum io num Specifies the I O channels being mapped or assigned This vari able is an eight digit maximum hex number of the form 0x12345678 representing the specific I O channel s See the examples in the Map command for assistance in designating the io num Note that leading zeros may be dropped from this number TO Assigns the same polarity of the input bit to the output bit NOT Assigns the opposite polarity of the input bit to the output bit Description This command is used to pass information through the robot from valves etc The I O types are defined as performing specific functions with the settings and responses defined by those functions Pass Through items are updated every 1mSec Examples Same polarity MAP DIG 1 PASSTHROUGH TO DIGITAL IN 0X40 TO DIGITAL OUT 0X30 In this same polarity example the input which is high is passed through the robot and output as high Brooks Automation Revision 2 2 8 49 Command Reference MagnaTran 7 1 User s Manual Map Pass Through MN 003 1600 00 Opposite polarity MAP DIG 1 PASSTHROUGH NOT DIGITAL IN 0X40 TO DIGITAL OUT 0X30 In this opposite polarity example the input which is high is passed through the robot and output as low Brooks Automation 8 50 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference
201. IS00 IN IS00 IN Po 8 Collectori Anode1 iH IN_ISO1 T 8 m IN P1 g Emitteri Cathode1 75 IN_ISO1 IN_ISO2 11 6 IN2 5 Collector2 Anode2 77 IN 1803 12 5 IN3 1 Emitter2 Cathode2 IN ISO4 13 4 INA IN IS05 14 3 INS MOCD217 IN ISOG 15 2 IN6 us IN 1507 16 1 IN7 voc IN_P2 8 1 IN ISO2 7 Collector1 Anode1 IN P3 tT Emitteri Cathode1 2 4 iN i503 10k 9 Collector2 Anode2 4 m RNS Emitter2 Cathode2 IN ISO8 1 16 IN8 D c1 62 p C3 C4 C5 IN_ISO9 2 15 INS 10uF tant 10V MOCD217 NEO 2 15 NEM 0 01uF 0 01uF 0 01uF 0 01uF u5 IN ISO11 4 13 IN11 IN P4 8 1 IN ISO4 IN S012 5 12 IN12 7 Collectori Anode1 75 IN ISOT3 6 11 IN13 IN P5T g Emittert Cathodet 3 1 IN ISO5 IN ISO14 T 10 IN14 Collector2 Anode2 5 1 4 IN_ISO15 8 9 IN15 1 Emitter2 Cathode MOCD217 10k u6 RN6 IN P6 8 1 IN IS06 IN ISO16 1 16 IN16 7 Collector1 Anode1 5 IN 15017 2 15 IN17 24V ISO 12V ISO Emitter1 Cathodet 72 IN ISO7 IN P7 6 3 E IN ISO18 3 14 INTS g Collector2 Anode2 7 IN ISO19 4 13 INTS Dj 154004 1 Emitter2 Cathode2 IN ISO20 5 12 IN20 t IN_ISO21 6 11 IN21 USAN IN 15022 7 10 IN22 L4 78L12 IN_ISO23 8 9 IN23 R9 1 3 IN P8 8 1 IN ISO8 RRA 4 IN OUT 2 4 7 Collector1 Anode1 2 B IN 91 5 4 Emitter 2 Cathodet F 1 IN IsO9 10k INDUCTOR 1200HM g 5 Collector node c6 c7 4 Emitter Cathode2 4 NAN p U7 0 1uF tant MOCD
202. ITITITTT CT IT 10022 2020010 7 UT 6 91 Brooks Automation Revision 2 2 6 1 Operation MagnaTran 7 1 User s Manual MagnaTran 7 1 Wafer Handling Robot Overview MN 003 1600 00 MagnaTran 7 1 Wafer Handling Robot Overview The MagnaTran 7 robot is a vacuum compatible central wafer handling robot that can service up to 16 stations per arm along a 360 circular path with superior vibra tion free motion If desired it is possible to configure the robot for multiple stations with the same station coordinates The two main axes of motion Radial R and Rota tional T are transmitted into the vacuum region through direct drive D C motors which uses no rotary seals The drive and control mechanisms for all three axes are completely outside the vacuum envelope The Brooks Automation proprietary single DSP controller performs Time Optimal Trajectories delivering the maximum throughput possible This mechanical design allows the robot to move in the rota tional axis for an unlimited distance providing enhanced throughput All three axes are fully controllable through the robot s software allowing the robot to position the wafer located on the end effector anywhere within its reach Advanced high level features provide control and monitoring of the devices and collision avoidance The MagnaTran 7 robot provides control for either a single arm or dual semi indepen dent arms through a single concentric shoulder shaft mechanism The shoulder shaft me
203. Interlocks MISC I O Connector 122 rg o RR 11 21 11 16 Standard Brooks RS 422 Interface e irae aastosdkhesth a re nr 11 25 11 17 Optional R5 D7 Inlerfaee cosas as ERE REIR ER RREERIRE PE RPES 11 25 11 18 User Specific Communication Switch Settings 1 s40s cassaeee ices 11 26 11 9 Rod Setup SUMMA Y LL coa da r4 da ERR ERE ORPE EET ER PRETEREA 11 26 11 20 Relay I O Input Connectors aseezeeckrr debe reo Rer tei 11 28 IL Belay YO Output ConneclOrme iusexexesecsat a t exthRAes kies 11 29 1122 Power Fak Inputs Biauaas ada EO CRACK EIOS ECHO nT eas Rte Fe d 11 30 121 Battery Pack Installation Parts List pip itscas deor CR CR Ee n 12 3 12 7 Protective Cover Parts LiSb oa oca LR v ab rU R ERAT ch0eeaue eeu dan 12 5 12 3 Le Paris ho wh ho eS AG RS es Ep Ys Seed 12 7 12 4 Lower Cover Mount I O Board Parts List 00005 12 9 120 Theta Board Paris LIRE a 4 cisiue4e ees sw os ooes seed cee A EPer ks 12 11 126 Peronabty PCIDS Board Parts List iara hn a Rn 12 13 I Z Driver Boat PansLlsb 2lireaossaa4 56234 REED EYEQeqhRPachdbdep bas ova 12 15 128 Radial Axis Board Parts LEE i ua4EAETARARERERERARAXRERAGGRR RR EA FA a 12 17 Brooks Automation Revision 2 2 X1X Tables MagnaTran 7 1 User s Manual MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation Xx Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Changes Overview Changes may be made to this manual to ensure that it will continu
204. Maintenance and Repair MN 003 1600 00 Z Hard Stop and Overtravel Limit Switch Adjustment Upper microswitch Move the robot to its maximum Z up position Adjust the Z Travel Upper Adjustment bolt to create a 0 024 0 6mm gap between the Z Upper microswitch activation point clicking sound and the bolt as shown in Figure 9 7 See Appendix B Tooling on page 11 3 for gap setting fixture Upper Hard Stop 2 places 040 in 1 0mm T1 Motor Housing i Upper Limit Switch 0 I 024 in 0 6mm J C LL J Z Travel Upper Adjustment V ll k 2 Figure 9 7 Upper Overtravel Adjustment Upper hard stop Move the robot to its maximum Z up position Adjust the upper hard stop to create a 0 040 1 0mm gap between the Z upper hard stop 2 places and the top of the T1 motor housing Brooks Automation Revision 2 2 9 55 Maintenance and Repair MagnaTran 7 1 User s Manual Fuse Replacement MN 003 1600 00 Fuse Replacement NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools Performing the fuse replacement procedure requires the following tools Medium phillips head screwdriver Medium flat head screwdriver M3 hex wrench Removal Procedure N WARNING When
205. NT Brooks Automation 9 76 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Uploading and Downloading Station Values Uploading and Downloading Station Values The following procedure may be used to copy station values from a robot and after replacing the robot load these station values into the new robot Required Tooling CDM or Computer with a terminal emulator program Computer serial cable Itis easiest to upload and download the robot station values using a CDM Following are the procedures using a CDM Uploading Station Values using the CDM 1 Using the CDM request the station values and the station value options for sta tion 1 by using the following CDM path INFO STATIONS SELECT ARM SELECT STATION 2 Record the station values and station value options for station 1 Appendix E User Setting Tables provides blank tables to record the information 3 Repeat Step 1 and Step 2 for all the robot stations taught in the cluster tool Downloading Station Values Using a CDM 1 The station values and station options obtained in the previous section can be input into the desired robot using the following CDM path SETUP STATIONS SELECT ARM SELECT STATION ASSIGN STATION LOCATION The station values are automatically STORED in the robot when using the ASSIGN STATION LOCATION function of the CDM 2 Repeat Step 1 for all the robot stations taught in the cluster tool Brooks
206. O D1 Degas Device ID DI Water Discrete I O Dog Clamp Dual Pan Arm Set EEPROM Elbow Brooks Automation Revision 2 2 A device used to cool wafers placed into it This is typically done after processing in a hot process to prevent damage to the wafer cassette See Cassette Present Sensor The pressure point in a vacuum system when the rough vacuum is switched to high vacuum Mechanical vacuum pump used to achieve High Vacuum Cluster Tool Controller See Cassette Type Offset A SEMI standard dimension the distance from a cassette s base to the centerline of slot 1 A device used to heat wafers placed into it This is typically done before processing to boil off any contaminants or to pre heat the wafer to minimize processing time An optional identification code in an product transmission which serves to distinguish the product from other devices connected to the same host This number is only used when the product is using RS 485 com munications De ionized water Discrete I O provides monitoring and control of external device func tions using individual I O pins for each function with no additional control or handshaking lines Typically if a pin is being used for an input to the product it is not used as an output also A metal bar with a bolt through one side and a gripping shape on the other side These are used to attach modules to process chambers The Brooks Au
207. O handle Error 1013 Unknown I O state Check host controller software for proper I O state Refer to Operational Interlocks on page 6 23 for available types Error 1014 I O is write only An attempt was made to write to an output Error 1015 I O is read only An attempt was made to read from an input Inclusion Zones Workspace Errors 8 186 Error 1100 Error 1101 Error 1102 Error 1103 Error 1104 Error 1105 Error 1106 Error 1108 Error 1109 Error 1110 Error 1113 Error 1114 Error 1115 Error 1118 Error 1119 Current position not within work space Destination position not within work space Work spaces do not overlap Work space interlock occurred No more work spaces available The work space volume must be specified Radial maximum is less than radial minimum Z maximum is less than Z minimum Radial minimum is greater than stored radial max Radial maximum is less than stored radial min Z minimum is greater than stored Z maximum Z maximum is less than stored Z minimum Work space name does not exist Invalid station number Reserved work space name used Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Code Reference Motion Command Task Errors Error 1300 Error 1302 Error 1307 Error 1308 Error 1309 Error 1310 Error 1311 Error 1312 Error 1313 Error 1314 Real Time Clock Errors Error 1600 Error 1601
208. ON Observe proper ESD precautions when handling any electronic device Carefully disconnect the PC 104 board from the Personality Board by removing the 4 40 nuts and split and flat washers 2 places and gently pulling the PC 104 board off Use caution not to bend the long pins of the header connectors See Figure 12 7 4 RECYCLE The PC 104 board contains a Lithium battery Dispose of the battery in accordance with federal state and local requirements Replacement Procedure 1 Carefully plug the new PC 104 Board to the 50 pin header connector of the Per sonality Board Replace and tighten the 4 40 nuts split and flat washers to the PC 104 stand offs Install the robot body covers and connect power and communications cables Brooks Automation Revision 2 2 9 59 Maintenance and Repair MagnaTran 7 1 User s Manual PC 104 CPU Board Replacement MN 003 1600 00 3 Power up the robot 4 Enter the correct robot application number using the following commands EEPROM RESET this will clear the EEPROM thus ensuring that the robot will be configured reliably CONFIG ROBOT APPLIC application number 5 Enter the calibration parameters requested in step 2 via the serial communi cation using the following commands Encoder and Sync Phase Parameters SET ENCODER T1 ALL sinmin sinmax cosmin cosmax STORE ENCODER T1 ALL SET ENCODER T2 ALL sinmin sinmax cosmin cosmax STORE ENCODER T2 ALL SET SYNC PHA
209. OUT _ISO9 2 19 pure OUT ISO1 3 02 18 DUT10O DDWZSGENIS U25 OUT _ISO1 418 93 1 DUTT OPUP6 FINS 1 OUT ISO15 OUT ISO12 51 04 16 QUT12 1 8 16 P OUT F6 2 Anodet Collector1 OUT ISO6 2 OUT 15016 OUT 1SO1B 8 amp 1 05 15 OUTIS OPUP7 3 Cathodet Emiteri e 77 3 OUT 1S017 OUT ISO1 7 06 14 DUT14 OUT E 4 Anode2 Collector2 7 OUT ISO7 4 OUT 15018 OUT ISO15 ai 7 o7 1 DUT15 Cathode2 Emitter2 18 O8 5 OUT ISO19 i 9 ULT GND 12 MOCD217 2 4 10 og vs M s a uer 8 ULN2987 bALYA 8 X OPUP8 1 8 AYA 9 OUT F8 p Andel Collector z T QUT ISOB ASA 40 u30 OPUPS gj anode muero e 11 OUT ISO15 1 20 pur16 OUT A 4 Anode2 Collector2 F5 1 OUT ISO9 nd 12 OUT_ISO17 2 O1 Mig DUT17 trathipdes Emitera AVAL 18 OUT ISO18 ae Q2 18 QUTI18 MOCD217 AA 14 OUT ISO1P 1 ia O4 n OUT19 U28 NUES STEM 15 05 42x 6 l6 66 15 OUT O 19 OPUP10 a 1 Anodet Collectort 4 TAKNET Ig 07 x J4 244 ROBOT OUT PD 2 x 7 OUT_IS010 8 18 PUPU 3 Rnode2 collectore ES 21 faut ano O24 1 X node ollector JL E QUT PY 4 Cathode2 Emitter2 QUT 19011 RSET FAULT 4 10 oR vs H s 24V_ISO ORO c 2p 4 7k Ss 3 5 x MOGD217 t ULN2987 A W GiLwayY E35 u29 x 24VDC PWR cur pz Us z Anodet Colectort2 1 our 18012 OPUP13 3 Cathode1 Emitter1 6 NA OUT PS 4 Anodez Colletor2 577 our is018 Cathode2 Emitter2 J6 MOCD217 1 24V ROBG 033 UPS Status 2b MERE m 3b OPUP14 INTRLOCK SRC OUT PW z Anodet Collector 4 4_our_iso14 4E x OPUP15 3 Gathod
210. OZ Table 11 11 Encoder Values DATE ENCODER1 ENCODER2 ENCODER 3 Table 11 12 Phase Values DATE PHASE T1 PHASE T2 Brooks Automation 11 18 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Appendices Appendix E User Setting Tables Table 11 13 Push and Safety Values for Station DATE STATION R PUSH SAFETY Brooks Automation Revision 2 2 11 19 Appendices MagnaTran 7 1 User s Manual Appendix E User Setting Tables MN 003 1600 00 Table 11 14 Station Assignments E hs d T 3 Axis 3 Axi STN DATE Station Name Arm xren Theta BTO Ka Retract degrees millimeters LOWER millimeters millimeters A 1 B A 2 B A 3 B A 4 B A 5 B A 6 B A 7 B A 8 B A 9 B A 10 B A 11 B A 12 B A 13 B A 14 B A 15 B A 16 B Brooks Automation 11 20 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Appendices Appendix E User Setting Tables Table 11 15 Operational Interlocks MISC I O Connector Brooks Automation Revision 2 2 Pin ID Function Signal Name Pin ID Function Signal Na
211. Operation TO STATION MOVE TO STN 1 enter STN lt CR gt NOTE Move always goes to Slot 1 of the specified station However Wafer Xfer does support access to multiple slots at a multi slotted station Location Mode enables moving the robot in Absolute Coordinates relative to the Home position defined as a location determined by the specified numeri cal values for R T and Z Once Location Mode is selected the CDM will request the axis to be moved and the coordinate for that axis with the following prompt LOCATE AXIS R R 0 T ELA an 0 Z S NES 0 NOTE In the preceding display presented on the CDM the _ indicates that the CDM will display the value for each setting Press either R T or Z on the axis section of the keypad to select the desired axis and then enter the desired location for that axis Once all axes are specified as desired press lt CR gt to initiate the move Jog Mode enables moving the robot incrementally from its current location using the keys labeled Extend or Retract R motion Up or Down Z motion and the Circular Arrow keys T motion Although Jog mode allows moving with the arm extended such motion is more likely to result in inadvertent col lision with the chamber or access port walls the Module will suggest that the user retract the arms before moving in T or Z Once Jog Mode is selected the CDM will display the following prompt JOG RET EXT R
212. Phase Related Issues Find Phase Related Issues Symptoms A Command Failed Error occurs while traveling in the Z direction Troubleshooting Process Inspect lower Z travel microswitch for proper adjustment and operation Refer to Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 Refer to Communication Related Issues on page 10 4 Error 10009 Z Axis Hard Track ing Error Symptoms T1 T2 shafts do not move together while pinging in theta direction Troubleshooting Process Inspect robot shafts for a physical obstruction in the theta direction Replace theta driver board Refer to T1 T2 Axis Driver Board Replacement on page 9 41 Symptoms The Z drive does not move when commands are issued Troubleshooting Process Perform Z Brake Binding Test on page 10 27 If the brake does not disengage check connection to Z Driver board User 24V supply to verify brake disengages when power is applied If the brake disengages replace the Z Driver board If the brake does not disengage replace the Z brake Call Brooks Technical Support Brooks Automation Revision 2 2 10 15 Troubleshooting Find Phase Related Issues MagnaTran 7 1 User s Manual MN 003 1600 00 Find Phase Related Issues Theta Drive v Command Failed Error While Finding Phase for Theta Drive v DONE YES Was Issue Resolved No Replace the Theta Driver PCB
213. Pua DDOIABONua oia peas baeqtedkiuaskrfkxrduaba kde bea d 8 143 S End Elector Mountne HardWare joo cedi IER CREER rer iD ORAE i 9 31 92 Waler Support Removal iiessaab aa s eddad ids bdkbie ba dd LES UD E e 9 33 9 3 End Effector Pad Grommet Style cose es rer re Rb 9 35 94 Ae Assembly Side VIEW csius 444424 SXXRTAANAARARTAR A SRRA RR NANA 9 40 95 AmmAssembly Top View iadibe xr REQUE DECR RAO EROR E pes 9 40 9 6 LowerOverravel Adjustment 24 ised eere ET ER Rd REA RR Ep d 9 54 9 7 ipperOvertrayel Adjustment cic sdet dike ER REOR RR ORE I ea den 9 55 10 1 Communication Troubleshooting i644 codo ao reae REIR Earn 10 5 10 22 Power Troubleshooting i cooeceneco rok eR rentie eenei rn 10 7 103 Radial Motion TroubleshoOHIBps siad eres act etixeaa Eberexdc ed 10 9 10 4 Iheta Motion Troubleshooting esie sabre E Y Ea dI ORE E Ia 10 11 10 5 Moon ues HOODIE aaa ceca a ebd era FER LER ERA T RR ks es 10 14 10 6 Find Phase Theta Drive Troubleshooting 2 asa aseo hh 10 16 10 7 Find Phase Z Drive Troubleshooting 2 2 2 vas er Arx x ewe vows 10 17 10 8 Z Home Axis Troubleshooting 112osdesddka sek ehh RAE REPRE ARR 10 19 10 9 Operational Interlock Troubleshooting 2242s ba pa an 10 21 10 10 Repeatability Related Troubleshooting 52 aote 10 23 10 11 PowerPak Troubleshooting is 5444445 d d OCDE EEAGCE keai OA CE ede sae 10 25 L4 RdaylneHacB 21144 ieaddhass eR RRRREETRSAAADAdARATVRAE dd EE d 11 24 Tie Keay VOCU aoaqddaepbwtese pas dq ndetRq oa LATE CPI d ERU
214. R a os d o ENS UNLESS OTHERWISE SPECIFIED DRAWN BY TAE BROOKS AUTOMATION NT RXEO75 1 2 2p RESISTORS ARE 1 4W VALUES IN OHMS MJV 10 14 97 INC 15 ELIZABETH E3 oA RESISTOR TOLERANCES 5 CHECKED BY DATE CHELI RD MA En to _ T2 PWR CAPACITOR VALUES IN uFARADS MIY ror WETTE CAPACITOR TOLERANCES 10 10 21 97 24VZ 8AWG E4 e M APROVED BY DATE WIRING DIAGRAM GRN YEL 4 N 6 MAGNATRAN 7 1 424VP POWER F1 LUG TO FRAME COM i CPUPWR e NOTES SIZE DWG NO REV 1 REF C SIZE DWG WD 002 5648 01 FOR DETAILS ON D WD 003 1 600 00 B POWER DISTRIBUTION THE MOTOR DISABLE INTERLOCK ser 4 OF D 8 7 6 5 4 3 2 1 NOTICE PROPRIETARY INFORMATION REV DESCRIPTION DATE BY APP THIS DOCUMENT AND THE INFORMATION ENCLOSED HEREIN SEE SHEET 1 FOR REVISION HISTORY I8 CONFIDENTIAL AND PROPRIETARY TO BROOKS AUTOMATION INC IT MAY NOT BE REPRODUCED IN WHOLE OR IN PART OR DISCLOSED TO ANY THIRD PARTY OR USED WITHOUT P3 Los THE PRIOR WRITTEN CONSENT OF BROOKS AUTOMATION INC
215. R values for arm B by verifying the position of each station for arm B as required 4 Store all values Teach Arm B Procedure II 1 Set the R T Z and LOWER values for each station to the same values used for arm A 2 Adjust R T Z and LOWER values for arm B by verifying the position of each station for arm B as required 3 Store all values Brooks Automation Revision 2 2 7 19 Alignment and Calibration MagnaTran 7 1 User s Manual Final Checkout MN 003 1600 00 Final Checkout Verify Proper PICK and PLACE of Wafer Once the robot s R T and Z axes have been set up for all transfer and process modules it is necessary to verify proper transfer of wafers to and from all modules within the system the robot is installed in NOTE This procedure must be performed during initial setup and at any time that the robot s arms or end effector s are damaged removed and replaced or changed Required Tools and Test Equipment The robot s Control Display Module CDM Expendable wafer N WARNING Breaking wafers may produce flying shards of glass When using wafers in a set up or test procedure protective eye wear should be worn at all times to guard against possible eye injuries Adjustment Calibration Strategy This procedure verifies proper operation of wafer transfer between all modules by observing system operation during wafer transfers Adjustment Procedure 1 Using the robot s CDM PICK the wafers from one mo
216. R1 Normal retract R2 Second retract location default R1 RO r offset Specifies the positive or negative offset from the extend retract location for that station Maximum allowable R offset 4000 microns TO t offset Specifies the positive or negative offset from the theta location for that station Maximum allowable T offset 2000 microns Brooks Automation 8 56 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Pick with an Offset Description The speed and acceleration at which the robot moves during a PICK operation is dependent on the status of the pans with or without wafers The robot always moves at with wafer slow speed and acceleration for all three axes when there is a wafer on the active arm If the active arm is empty and the inactive arm contains a wafer the robot moves at medium speed for the R axis but slow speed for T and Z If both arms are empty the robot uses high speed for all three axes If a PICK failure occurs all motions will be performed at with wafer speed until a successful material hand off has been accomplished NOTE The PICK command is meant to be used with robots that have the Z Axis option installed If using a 2 axis robot this command may also be used for PICK and PLACE commands but no Z Axis motion will occur No error will be issued During a PICK operation the MagnaTran 7 robot executes the following sequence of moves Retracts the arm usin
217. RES ARR RES RES 8 155 P DEUM PEE E as 6 Le Se bes pP QPOF ERES ee f d i ad 8 156 Sere COBRE DICA LLTOED ao 03392 eee 4 ORE d acie ORE Sod ona 8 157 olore DRO OU daa Rad dr Ead dad bodies obese rbd brita 8 159 Store Home PosIBonm ZHAN i ved Ed nE RSV AURA A SEED 8 160 es beta ora ee os a ees eee qiia qid 8 161 Sore Load Mode os hr es so ok Po pau Ga eee eS Ck eae 8 162 Store Radial Moton Sense iicaaa beides ib eia b ORG oR ORES 8 163 Store Retract VAIO 1 222 edn ace EE VERO Sos Be E E GR 8 164 PHOS SIABODL Cx add ER EACUS pad HV a Dei ebsites IM gs 8 165 Store Station DDEOD aese cca cena ern b ink ceed eke Rot P ee esa 8 167 aore EDU DENSO road be RE T2 PENES A ARE EAS 2d E FORI eee 8 169 Sue SUBE TIER Las 14a CEA TERR EAE ER TRRECEEV EIE ERPPRDQUEM E 8 170 Store D De ERI a iert adep ALEI TR SERRANT ENDE ER E eda 8 171 Store Warning CDM Status 424 4 bdo ER RH ER PROP PEERS ER RH xd E Ru 8 172 Aore W 011 nm 8 173 Store Workspase A WTOLPORTB Loose dae dd hah RE REPE QU P CET ER Y 8 174 Store Workspace MO e errertri edet e cte REA Rr ndn xa 8 175 TI NEP o ossa ee ee one eee Terre ere were errs Teer eT Tee 8 176 Tamer er uan oo eo REA beter i dE OR SERE 8 177 Errot Code Reference o doeet PI ORE ieni EE ws ded doe Vp vdd iie Esa eee 8 179 Error listings for the Magnaltan 7 RODOL oi cduosas scabra Pea 8 179 qup DB 25ddsdd QERUFLES IU UEPOL SEU d dE aad did ied x ORE E Pes 8 179 Sa ENOS ized pa dau dq Cad ubi doppi us E zd Lee eq ad usd 8
218. RI 18 IN_P18 SS Pl IN P5 T6 3 IN ISO5 IN P131 6 3 IN ISO13 4 a2 y2 pis IOPORT D1 bog L19 IN P19 SS P2 vw ip 10k 4 8 A3 y3 b14 IOPORT D2 pos 15 IN_P20 SS P3 45 e 44 5 pdx 44 RN3 pais 4 8 a4 va D42 pos 14 IN P21 SS P4 OCD217 OCD217 IN ISO16 1 ie IN16 10uF tant C1 C2 c3 C4 C5 Bee 13 IN P22 SS p5 IN 18017 2 15 INI7 B 0 01uF 0 01uF 0 01uF 0 01uF ida PCS L11 IN P28 SS P6 IN P6 8 U10 1 1 IN ISO6 IN P14 8 UTT 1 IN ISO14 IN 15018 3 14 N18 1 1 l l v v x v IN 1S019 4 13 N19 74ALS240 8255PLCC zx 24 zx 24 IN_ISO20 5 12 N20 IN P7 T6 3 IN ISO7 IN Pi5 6 3 IN ISO15 IN 1021 6 11 IN21 RN4 vA v IN 15022 7 10 N22 16 1 IN PO 5 x Xv 4 5 pdx 4 IN 18023 8 9 N23 VCCco 4 L44 L44 2 IN P1 MOCD217 MOCD217 4 7KNET 3 IN P2 4 IN P3 IN Pte 8 Ui2_ 1 IN Iso16 IN P24 8 U13 1 IN ISO24 TOR 8 IN p c vi E RN5 24V ISO 12V ISO 6 7 2 7 2 IN ISO24 1 16 IN24 9 Di 9 IOPORT D 0 7 2 NPS IN P171 6 3 1 IN ISO17 IN P251 6 31 IN ISO25 IN 1025 2 15 N25 l 1 153004 l 8 A MA IN_ISO26 3 14 IN26 IOPORT A 0 7 9 IN P8 5 v 4 5 dK v 4 IN 19027 4 13 N27 10 IN P9 OCD217 OCD217 IN ISO28 5 12 IN28 LM340AT 120 General purpose 1 0 po rt 11 IN P10 IN 19029 6 11 IN29 1 3 GPIO 12 IN P1 IN P18 8 U15 1 IN ISO18 IN P26 8 U16 1 IN ISO26 IN 19030 7 10 IN30 1 IN our 1 13 IN P12 A A 8 9 a P1 14 IN P13 dz 21 LL 2 amp IOPORT AO O A1 A9 m RD 4 IN P14 IN P191 6 3 IN ISO19 IN P271 6 3 1 IN ISO27 Tok c7 06 DEBT B9 TOINTERU
219. Referenced 6 53 Operation MagnaTran 7 1 User s Manual Discrete I O Control DIO MN 003 1600 00 COMMAND STATUS Indicates if the robot is moving or stopped Table 6 23 DIO Command Status LOW HIGH OPTION A Stopped Moving OPTION B Moving Stopped ARM IN USE Indicates robot arm is in use Table 6 24 DIO Arm in use LOW HIGH OPTION A ARM B in use ARM A in use OPTION B ARM A in use ARM B in use AT STATION Indicates the robot is at the specified station or not Table 6 25 DIO Arm at Station LOW HIGH OPTION A Robot at Station Robot not at Station OPTION B Robot not at Station Robot at Station TARGET STATION Specifies the station to be accessed by the robot during a move Refer to Table 6 13 for the station assignments Brooks Automation 6 54 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation Discrete I O Control DIO R POSITION STATUS Indicates the current position of the arm in the R radial axis Table 6 26 R Position Status Position Bit 1 Bit 0 OPTION A Not at EXTEND or RETRACT position At the RETRACT position At the EXTEND position of the current station not used OPTION B Z POSITION STATUS Not at EXTEND or RETRACT position At the RETRACT position At the EXTEND position of the current station not used Indicates
220. Response If a Request Command creates an error condition only the Error Response and Ready Response will be returned Response Types Request Response are responses that return information requested by the host controller Error Response are responses that indicate an error has occurred and indicate what the error was Ready Response are responses that indicate that the robot is ready to receive another command Software responses consist of a series of ASCII fields The number of charac ters in each field is flexible Therefore a space ASCII 32 indicated in the fol lowing example by lt gt is required to indicate the end of one field and the beginning of the next A carriage return ASCII 13 indicated in the following example by lt Return gt is used to indicate the end of the response The responses are always upper case NOTE Spaces and carriage returns will not be indicated within the command ref erence The use of a space will be implied by a separation between fields and a carriage return is implied at the end of every string Brooks Automation Revision 2 2 8 9 Command Reference MagnaTran 7 1 User s Manual Command and Response Structure MN 003 1600 00 8 10 Example RQ lt gt POS lt gt ABS lt gt ARM lt gt A lt gt R lt gt T Return POS lt gt ABS lt gt ARM lt gt A lt gt 185000 lt gt 1340530 lt gt Return The command instructs the Magna
221. Revision 2 2 8 167 Command Reference MagnaTran 7 1 User s Manual Store Station Option MN 003 1600 00 See Also Set Station Option on page 8 142 Set Station Option VIA Point on page 8 145 Request Station Option on page 8 106 Example 8 168 Both following commands are identical and store the station options at station 4 for arm A for sensor number 17 in the extended position to active high STORE STN 4 ARM A OPTION WAF SEN EX STN 4 WAFR SEN Or STORE STN 4 A OPTION WAF SEN EXSIN 4 WAFR SEN The following command stores the station option at station 4 for arm A for the pre viously defined safety value STORE STN 4 ARM A OPTION SAFETY The following command stores all station options at station 4 for arm A STORE STN 4 OPTION ALL The following command stores all station options at station 4 for arm B STORE STN 4 B OPTION ALL Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Station Sensor Store Station Sensor Purpose Stores the setup for the specified sensor including station assignment usage type active state and the sensor coordinates in the chamber Format STORE STNSENSOR station ARM arm TYPE ACT SEN POS R T Arguments station The robot station number being configured for use with wafer sensors arm The arm that is active for this sensor A Arm A B Arm B Arm A is the default Description Stores the previously defi
222. S 232 or RS 422 Baud Rate 9600 Data Bits 8 Parity None Stop Bits 1 Optional Parameters Handshake No RTS CTS No XON XOFF No There are three serial communication ports labeled SIO1 and SIO2 and one hand held Control Display Module port labeled CDM The main serial communications cable for Host Control and PC Control uses a stan dard 9 pin male D connector at the end that plugs into the robot in the connector labeled SIO1 The pin out for this cable is provided in Table 5 3 Note that pins not identified with a signal name are to be left unconnected Table 5 3 RS 232 and RS 422 Connector Pin Assignments S101 Pin ID RS 232 Signal Name RS 422 Signal Name 1 2 TX RX 3 RX RX 4 5 GND TX 6 7 8 TX 9 Brooks Automation 5 6 Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 Serial Communication SIO1 Switch Settings Serial communications options are set using SW1 on the Personality Board Access to these switches is obtained by removing the robot protective covers See Chapter 12 for the location of the Personality Board The robot is shipped in RS 232 mode Table 5 4 Switch Settings Switch Setting Communication Mode UP RS 232 DOWN RS 422 Brooks Automation Revision 2 2 5 7 Operational Interfaces MagnaTran 7 1 User s Manual Serial Communication SIO2 MN 003 1600 00 Serial Communication SIO2
223. S 25000 During this movement check for errors reported by the robot and for any noise that may be generated by the robot Release the brake for the Z Drive with the command ZBRAKE OFF and note if the arms drop in the Z direction Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Ball Screw Inspection 10 11 12 N WARNING The robot will free fall in the Z direction Ensure that personnel and physical obstructions are clear of the robot s armset and internal theta motor housing Press down on the arms and note if there is any increase in friction To stop the robot during its free fall issue the command HOME Z Do not press the arms down so that the arms strike the bottom of the chamber however the over travel sensor will engage before the arms strike the chamber If the lower over travel sensor is tripped the command HOME Z will reset the Z Axis Again move the robot to its maximum Z position with the command MOVE Z ABS 35000 for 25mm robots use the command MOVE Z ABS 25000 Once the maximum Z position is reached remove power from the robot Disconnect the Power Cable Serial I O Cable CDM Cable and Power Pak if applicable from the robot Unscrew the bolts x4 and remove the front and back covers from the robot Inspect the Ball Screw for any excessive wear along the length of the screw s surface especially scratches or deep scrapes The Ball Screw is
224. SE ALL t1 t2z STORE SYNC PHASE ALL Home Position Parameters SET SYNC ZERO ALL t1 2 z STORE SYNC ZERO ALL Operational Interlock Parameters MAP name type characteristic TO io name i0 num Communication Parameters SET COMM M B MON FKT SET COMM FLOW SEQ BKG BKG SET COMM LF ON OFF SET COMM ECHO ON OFF SET COMM CHECKSUM ON OFF a6 SET COMM DREP AUT REQ STORE COMM ALL Compatibility Parameters SET COMPATIBILITY COORDT MAG6 VT5 SET COMPATIBILITY ECHO MAG6 VT5 Brooks Automation 9 60 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 PC 104 CPU Board Replacement 10 11 SET COMPATIBILTY HALT MAG6 VT5 SET COMPATIBILTY CPTR MAG6 VT5 SET COMPATIBILTY SPEED MAG6 VT5 STORE COMPATIBILTY ALL Define the MOUNT position coordinates by issuing the following commands HOME ALL MOVE Z ABS 10000 FIND MOUNT wait for prompt to be returned STORE MOUNT Enter the Birth Certificate data by issuing the following commands SET SERIAL NUMBER xxxx yyyy SET OPERATOR NAME aaaa bbb SET DOB mm dd yy SET BIRTH CONFIG xx xx xx xx xx xx GIVE BIRTH Enter and store the station coordinates using either the CDM or serial commu nication SET STN station ARM arm R loc T loc Z bto LOWER NSLOTS PITCH STORE STN station ARM arm ALL Enter and store the station options using either the CDM or serial communica tion Fo
225. SET LOAD OFF command is executed Once the arm s are defined as empty the robot will continue to assume they are empty until a PICK or a SET LOAD ON command is executed The UNKNOWN option is for Brooks Automation Marathon Express users only Set ting the load to will cause the robot to move at slow speed until it passes a radial motion sensor and can determine the true status of the end effector NOTE This is a dynamic command and cannot be stored Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Load See Also RO LOAD Example The robot software will assume that arm A is carrying a wafer during all subsequent motion command until either the load is turned OFF or a PLACE is performed SET LOAD ARM A ON The robot software will assume that arm A is not carrying a wafer during all subse quent motion command until either the load is turned ON or a PICK is performed SET LOAD ARM A OFF Brooks Automation Revision 2 2 8 133 Command Reference MagnaTran 7 1 User s Manual Set Load Mode MN 003 1600 00 Set Load Mode Purpose To set the load mode for the specified arm Format SET LOAD MODE BI TRI Arguments MODE Sets the load mode type BI Two state mode TRI Three state mode Description This command sets the mode for reporting the load status of the arm The load status is used to determine the speed of all motion commands The two state mode
226. SO2 2 OUT 1S01 OUTS t ER 2A4 2Y4 Cathode1 Emitter1 40 8 gb pgo 20 QUTB P8 OPUPS CE Kane Colleen Eg 3 OUT 1S02 ULRDSUSK OUT10 a N S10 40 2 OUTB P9 1o OUT B 4 Anode ollector2 5 OUT ISO3 4 OUT ISO3 OUT11 WR PBI 1G Cathode2 Emitter2 O 42 IOPORT A0 10 ho bpp 22 OUTB PD T1995 26 5 OUT 1904 OUT12 p IOPORT A1 9 beg L24 OUTB Pi RE amp OUT 1805 OUT13 pr 39 a sET DB 25 OUTB P 74ALS244 7 OUT 1S06 OUT14 4e Z pps L26 OUTB PB U36 U24 8 OUT ISO7 OUTI5 ae 27 OUTB PW OUTB F8 2 18 OUT PB OPUP4 1 8 9 OUT 1808 OUT16 DB6 28 OUTB P OUTB P5 M 1v 16 OUT P OUT Ri pn anode Collector 7 QUT ISO4 10 OUT 1809 OUTI7 a 33 OUTB PD 8 tas ivs L14 OUT PD OPUPS 3 Pes eo t s eae 0 11 OUT ISO10 OUT18 49 ifo amp OUTB P amp OUTB Pit 8 OUT Pit OUT 5 node ollector2 5 OUT ISO5 12 OUT ISO11 OUT19 8l PCO 17 OQUIB Pf OUTB PP 11 144 1Y4 9 QUI PP Cathode2 Emittere 13 OUT 18012 9 50 he PC1 2A1 2Y1 7 SIO2 8 OUTB PB OUTB P8 1 OUT PB 14 OUT 18013 7 PC2 19 OUTB PP OUTB PK 18 242 2Y2 5 OUT PM MOQDI 15 OUT 1S014 HEADER 50 Lo PC3 2A3 2Y3 U25 U26 3 bog 15 OUTB P OUTB P5 az 2 NA OUT PB 8 14 OPUP6 1 8 4 7KNET OUT ISO8 1 18 X59 pcs H4 x OUT TE 2 Anodet Collectori 2 3 our 1806 OUT T8569 iu 01 p 4 pce Hx 1G Cathode1 Emittert OUT ISO1 12 02 P x o PC7 x 199 2G QPUP7 3 Anode2 Collector2 2 34 313 03 pls 5 En MC OUT F7 4 Cathode Emitter 5 OUT ISO7 RN7 OUT ISO1 Alm O4 p45 S 2 8255PLCC 74ALS244 athiode miter
227. Schedule iie xa 6545555555 ER RTI ECEG E C Xd 9 2 Schedule eeeeeeeeeee RR ees 9 2 PAGS Goa ges deumE4 desDIa2lsddQ4Q3 E ed S5 ddl Edad aded 9 3 Dala LOB i214 eos 4 bbeeR b opts ba shee dense EHE RES EE xS E PIER ERR buses 9 4 Ball Screw Inspeccion i244 da bep HU ERA HER aseiden RUE REDE ER ER dra 9 6 Encoder and Motor Coil Cables Inspection es eee rrr mms 9 8 Cover InSDecllUn o cessate eub ker P cbareuwe Gaa a a aiaa A a 9 9 Wrist Band Iuspeenr saa dd er ER YA auae V VEDI LEHRER ERA ERREV LAU 9 10 Pads orn End Erectors InBDeelimt 443 24adua a bestiis aor eh EAR ee 9 11 Conneccion Inspec Dolus bue wb RAS ER CER YA P EETE VE FER RE PE aud 9 12 Robot Clearing PROUOTUFG Lube a kdo Ed FRE DECR CEU SV HERUNTER FAIR 9 13 Pie Eleetorl ad Cleaning Procedure aaaadue dia Eo EOAAA TOR ERA EROER dE xn 9 15 O Ring Removal Beplacement L leatthg aa ada voa E E XE RR EPT TER RES 9 17 End Bieco Alene oua iex erste Ree ATEXUPERTERR RU ews DEC ERE ER PET 9 20 Power Fak Nainbelaticesod deesse ober bed Pee emos qeu sese pa dx qe 9 21 Repair Philosophy ss csagdas eqeTesw e qe ho E dq EEqEPSITE EP eres D HPDETI E RM S 9 22 LIacltated Field Bepalyans qas dabas ced ops tuu ER RT d and PES Gaus 9 22 Depot Field Repais io accesio eain km E poder ace e drin eee ais 9 23 Priory Paris BOTVIOE oreca ipera od Dea ac Ee Va ede dO HIE 9 23 Brooks Factory Repair Services qas aaxextrkereaktbe RrkkRerapead des 9 23 Repair Procedures Lus aque s dt ote D ave Faq ORE d
228. Sensors to the user for selection SET EXTEND WAFER SENSOR Enables the user to configure the wafer sensor in the extend posi tion at the specified station The CDM will display the list of pre viously configured Extend Sensors to the user for selection SET RADIAL MOTION SENSOR Enables the Radial Motion Sensor R MT feature used to deter mine the load on the pan of the Leapfrog arm set SET SLOT VLV SEN Enables the user to configure the slot valve sensor at the specified sta tion The CDM will display the list of previously configured Slot Valve Sensors to the user for selection NOTE The sensors must be configured using the MAP command before they can be assigned using the CDM ARM RETRACT SEN Enables the user to configure the arm retract sensor at the specified sta tion The CDM will display the list of previously configured sensors to the user for selection Brooks Automation Revision 2 2 6 75 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 NOTE The sensors must be configured using the MAP command before they can be assigned using the CDM ARM EXTEND ENABLE Enables the user to configure the arm extend sensor at the specified sta tion The CDM will display the list of previously configured sensors to the user for selection NOTE The sensors must be configured using the MAP command before they can be assigned using the CDM SET VLV SEN Enables the user to con
229. Stores the current sensor information 8 169 Table 8 4 Compound Move VIA Commands Command Description Page SET STN OPTION VIA Sets the compound move command opera 8 145 tional parameters RQ STN OPTION VIA Requests the compound move command 8 106 operational parameters STORESTN OPTION VIA Stores the compound move command oper 8 167 ational parameters Brooks Automation Revision 2 2 8 15 Command Reference Command Quick Reference Tables MagnaTran 7 1 User s Manual MN 003 1600 00 8 16 Table 8 5 Request Commands Command Description Page RO BG Returns the status of background tasks 8 69 RQ CPTR Displays the data in the Servo Position 8 70 Table RO COMM Returns the current status of the serial com 8 71 munications modes RO CONFIG Returns the current configuration number 8 74 RQ IO ECHO Returns the current status of the serial com 8 81 munications echo option RO HISTORY Returns the history of events 8 76 RO LOAD Returns the load condition of the specified 8 86 arm RQ LOAD MODE Returns the current load mode 8 88 RO POS ABS Returns the actual position of the robot s 8 90 arm in absolute coordinates RQ POS DST Returns the destination of the current action 8 92 command RO POS STN Returns the actual position of the robot s 8 94 arm in station coordinates RO POS TRG Returns the target position of the robot s 8 96 arm in absolute coordinates the target is the location to which the
230. T 18014 4E 74ALS240 f x M OPUPIS 2 Cathodet Emitteri 5 pP _ Anode2 Collector2 7 7 4 ULN2803A 4 OUT Yb 4 Cathode2 Emitter2 OUT IS018 vt UPS Der ei y u38 MOCD217 4 1N5242 R11 U33 DISABLE 1 8 DISABLE LOGIC A Anode1 Collector1 7 OPUP16 1 8 4 7k 3 Cathode1 Emitter1 6 OUT P 2 Anode1 Collector1 7 4 OUT 18016 R9 NA X4 Anode2 Collector2 5 mE OPUP17 3 Cathode1 Emitter1 6 x 4 Cathode2 Emitter2 9 X OUT PT So Anode2 Collector 5 our 18017 DATE 4 7k Cathode2 Emitter2 DRAWN BY MOCD217 oar UNLESS OTHERWISE SPECIHIE Secure 213786 BROOKS AUTOMATION on RESISTORS ARE 1 4W VALUESN OHMS INC 15 ELIZABETH OPUP18 1 A RESISTOR TOLRANCES 5 CHECKED BY DATE CHEL RD MA OUT P8 2 pence Career 7___ OUT IS018 CAPACITOR VALUESN uFARADS WE OPUPTS 3 6 CAPACITOR TOLERNCES 10 M OUT PB 4 eaan OE 5 OUT IS019 APROVED BY AG 7 LOW SIDE INPUT OUTPUT Louvut INTERFACE ELECTRONICS DWG NO l SD 002 3758 01 A B c D
231. T CLOSED SBIT SVLV SEN SINGLE INPUT OPEN CLOSED RETRACT SEN SINGLE OUTPUT RETRACTED NOT RETRACTED EX ENABLE SINGLE INPUT ENABLED DISABLED I O State OUTPUTS SVLV CTRL DOUBLE OUTPUT null OPEN CLOSED null DISCRETE OUT SINGLE OUTPUT ACTIVE INACTIVE NUMERIC OUT MULTIPLE OUTPUT numeric string RETRACT PIN SINGLE OUTPUT IN OUT Miscellaneous Interlocks DISCRETE IN SINGLE INPUT ACTIVE INACTIVE NUMERIC IN MULTIPLE INPUT numeric string EMER STOP SINGLE INPUT ENABLED DISABLED POWER IND SINGLE OUTPUT ON OFF UPS BATTERY SEN SINGLE INPUT NORMAL LOW MOTION IND SINGLE OUTPUT ON OFF 1 DOUBLE Requires 2 consecutive bits to be defined MULTIPLE requires multiples consecutive bits to be specified 2 INPUT Host controller provides status to the robot read OUTPUT robot provides status to the host controller sent 3 ACTIVE input or output pin is assigned to active state INACTIVE input or output pin is assigned to inactive state Brooks Automation 6 24 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Operational Interlocks Description Station Sensors WAF SEN Individual monitoring of wafer sensors inputs VLV SEN Allows monitoring of the poppet valve when robot is extending If poppet valve is not closed an error message will occur and the robot will stop SBIT SVLV SEN Allows monitoring of the slot valve when robot is extending If s
232. T SRC a8 Ep x mam DIR6 EXT INHIBIT o 20 DIR6_EXT_INHIBIT_SRC__ 8 DIR7 EXT INHIBIT WK UIA oS bei DIR7 EXT INHIBIT SRC__ WSK Ted BOARD ID 0003 o9 DIR EXT INHIBIT 24V J2 o 22 DIRB EXT INHIBIT SRC ROBOT voc 1G o 10 DIR9 EXT INHIBIT ROBOT P1 9 Sg o9 123 DIR9 EXT INHIBIT SRC COM IQPORT Ad o A1 pe MGO BD Tx 422RXN_ 6 2 15 11 AC FAIL 7 b WF rZ 9 24 AC FAIL SRC IOPORT A2 B1 B9 IOINTERUPT RX232 4oonxp 73 o x 4 C1 C9 P x o SIO1 12 SPARE IOPORT A3 TX232 422RXN 8 oes IOPORT A4 AZ A10p RX232 422RXP 41 13 IOPORTAS 9B2 B10p 422TXP X gT OA lOPORT A6 7 4 C2 C10 p 422TXN 422TXN cones Pe IOPORT A7 3S A9 A11p DXB 2 2 DB25 F IOPORT Do 79 B3 B11 TYPICAL OPORTDi O IOPORT D2 OQA4 A12P RXC 232 5 7 pr 1 DIR2 GV CLS INHIBIT OUTPUT IOPORT D3 9 B4 B12 J3 o l9 DIR3 GV CLS INHIBIT CIRCUITS oora 9 C4 C12 Px wo o2 DIR4 GV CLS INHIBIT Ka TOPORT_D5 pe ais TXA_DRIVEN 6 DEAWNEY m o 10 DIR5_GV_CLS_INHIBIT TOPORT_D6 C5 C13 RXA_DRIVEN TXA 232 216 UNLESS OTHERWISE SPECIFIED B ROO KS AUTO MATION els DIR6 GV CLS INHIBIT lOPORTD7 9 e G RXD_RAW 7 MJV 10 14 97 DISCRETE Sean DIR7 GV CLS INHIBIT a OUTPUT FROM CPU oo 3 AG Ay D T TXD_RAW RXA 232 A ans SIO2 RESISTORS ARE 1 4W VALUES IN OHMS INC 15 ELIZABETH 0 4 be Gv CLS ET d 1 SELE 9 C6 C14 x B o RESISTOR TOLERANCES 5 CHECKED BY DATE CHELMSFORD MA oc 112 DIR9 GV CLS INHIBIT IOSEL2 4 5
233. TERR T RP REFERT 6 42 Discrete VO Control DIO ups qox WOOD rege waren eee rere OE RHODE Ra 6 45 DIO Cono Sy a Ludo vada dd CERA dA d ERR qEE Pa dd ai 6 45 DIO Control Programming 64 4 4 dos euet re ARE he eme a 6 45 Initial DIO C ontipuranon Procedure ii oiiaaodad4 dao AXE Ria RAA taan 6 45 DIO Fault COndIUOIS 1i3us242423 2056505445 4205544540055 4 098 DAS RR 6 45 DIO SA UD a4 ed Abd dr barbae h Eh be pER E O94 bed epaia 6 46 DIO Signal DBDBRUDOIS 4 a4 ipei Oe EREORER ORERR Ros DERE ERE EP RE RR 6 46 Enable DIO Initialization Sequence 1522222 xke EREE EN ener UE ES 6 56 Bobet Motion LIO IAMBO Ls aas e dero de eda d beu ERRAT E uA T NE 6 56 PASIV Sally Feature DraDOl ciao praeda bb Rw o pd P Ead TETUR d Eds 6 58 The Workspace Overview 2cicoerrkrr m RRERRRRRR CREER ERR 6 58 resting YVOTESDACES esasi repai axaMdlbreisCtazevesRibkbexdGddda 6 59 Reserved Workspace Names diu aided COE ACE EROR RE Tin Eni ra E 6 60 Dentin Demand EE 64e ni y3 14d Ep heen hydr iar e Feed 6 62 Assigning an Interlock toa Workspace i4 2s keeper RR RE Rn 6 62 PAST ema 4294 44 I EA VERA VRP uS EC pC ERR HE QR d d dd 6 62 Control Display Module CDM DORADO ia ria caidas caren E DER 6 63 Pawsrt antea 2222259 24424 RE Ed AAGO ERE Ead E RIEXAM URS XA MK 6 63 Control MOS La deam redet eres HER EMT ACUARIO RR RA 6 66 Key DSS iaa dkkSaak ataddace4TA3da da FA quA NqEPAd da sddcddda 6 67 Lett Golumu Keys Lbs kessawee trent ERECTA FEE news ERE PE EET E ES 6 69 Axis P
234. TION COMMAND 305 Unknown command 2170031 R371124 TO Z0 TOT 10 17 1998 00 44 R 5 TOT 10 17 1998 00 47 T 5 TOT 10 17 1998 00 30 Z 5 Brooks Automation Revision 2 2 8 77 Command Reference Request History MagnaTran 7 1 User s Manual MN 003 1600 00 See Also System State Abbreviation LOG NO AXIS ERR N LOG R AXIS ERR R LOG T AXIS ERR T LOG Z AXIS ERR Z LOG X AXIS ERR X LOG TZ AXIS ERR TZ STN NOT AT STATION N station num e g 1 R AXIS NOT AT STATION NAS RETRACTED RE EXTENDED EX R SAFETY SAF R PUSH PSH RETRACT 2 RE2 R MAP MAP Z AXIS NOT AT STATION NAS Z DOWN DN Z UP UP Z MAP STRT MPS Z MAP END MPE 8 78 Table 8 12 for abbreviation information Table 8 12 System states recorded on motion errors System State TAXIS NOT AT STATION ARM SENSOR TOO TO1 TO2 X AXIS NOT AT STATION LEFT RIGHT SLOT NOT AT STATION slot num 1 slot num 12 ARM ARM B ARM A Abbreviation NAS ARM SNS TOO TO1 TO2 NAS LT RT 12 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Home Position Z Axis Request Home Position Z Axis Purpose Requests the Z Axis Home position Format RO HOME POS Z Response value Arguments value Absolute position value in microns Range 0 to 35000 microns Description The Z Axis HOME position can be requested through a command line entry See Also HOME SET HOME POS Z
235. TN ex re location station slot up dn location Arguments ALL Specifies R T SLOT and Z in the order presented in the command for mat ARM arm Field size 1 The location of the specified arm or Arm A If unspecified the response will be for the default arm Arm A The ARM identifier is optional exlre location Response field size 2 The location of the arm on the R axis extended or retracted The return values are EX for extended RE for retracted robot is not at a station station Response field size 2 The current station number being addressed The return value will be 0 if no station is addressed slot Response field size 4 Brooks Automation 8 94 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Position Station The current slot number of the arm The return value will be 1 for a for a station with no slots specified 0 if the robot is not at a station upldn location Response field size 2 The up or the down position of the arm The returned values indicate UP for up DN for down not at a station NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description If the robot has been commanded by a station oriented command such as PICK PLACE or GOTO the position for the specified axis for the specified arm is returned The number and order of the data fields returned will
236. TORE STN command must be issued to create a nonvolatile memory copy of the workspace or the STORE WSPACE with the workspace name as part of the command CDM Interface Defining station from the CDM interface will automat ically create a volatile memory and nonvolatile memory copy of the workspace definition Reserved Workspace Names Once a station had been defined and a workspace has been automatically created the name associated with the workspace definition is dependent on the station and arm being defined Brooks Automation 6 60 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation PASIV Safety Feature Operation The following names are reserved names and cannot be used by the user with the CREATE WSPACE command Table 6 28 Reserved Workspace Names Station and Arm Workspace Station and Arm Workspace Name Name Station 1 Arm A STNO1A Station 1 Arm B STNOIB Station 2 Arm A STN02A Station 2 Arm B STNO2B Station 3 Arm A STN03A Station 3 Arm B STNO3B Station 4 Arm A STNO4A Station 4 Arm B STNOAB Station 5 Arm A STN05A Station 5 Arm B STNO5B Station 6 Arm A STN06A Station 6 Arm B STNO6B Station 7 Arm A STNO7A Station 7 Arm B STNO7B Station 8 Arm A STN08A Station 8 Arm B STNOSB Station 9 Arm A STN09A Station 9 Arm B STNO9B Station 10 Arm A STN10A Station 10 Arm B STN10B Station 11 Arm A STN11A Station 11 Arm
237. TPUT Allows output function in serial mode 8 125 STORE DIO OUTPUT Stores the current output mode 8 159 Table 8 3 Operational Interlock Commands Command Description Page MAP Allows a name and use to be specified for 8 44 discrete I O points MAP Allows information to pass through the 8 49 PASSTHROUGH robot REMOVE IO Deletes an assigned I O 8 66 RO INTLCK Reports the state of interlocking 8 80 RO IO MAP Returns the current I O map 8 82 RO IO STATE t the current status for the specified 8 84 I O Brooks Automation 8 14 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Command Quick Reference Tables Table 8 3 Operational Interlock Commands Command Description Page RO R MT SENSE Requests Radial Motion Sensor information 8 98 RO STN OPTION Returns the station option parameters 8 106 RO STNSENSOR Returns the station sensor parameters 8 108 SET INTLCK Enables or disables interlocking 8 128 SET IO STATE Sets the current status for the specified I O 8 130 SET R MT SENSE Sets the sensor window limits and wafer size 8 138 of the Radial Motion Sensor SET STN OPTION Sets the optional station related parameters 8 142 SET STNSENSOR Define the setup for the specified sensor 8 147 including station assignment usage type and active state STORE R MTSENSE Saves the Radial Motion Sensor information 8 163 STORE STN OPTION Saves the various station option parameters 8 167 STORE STNSENSOR
238. This port may be used to control peripheral devices such as an Aligner through the serial communications port The following cable is needed Male to male 9 pin Null Modem Serial I O cable Table 5 5 RS 232 Pin Assignments SIO2 Pin ID Signal Name 1 2 TX 3 RX 4 5 GND 6 7 8 9 Brooks Automation 5 8 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operational Interfaces MISC I O Communications MISC I O Communications Discrete I O provides monitoring and control of external device functions using indi vidual I O pins for each function with no additional control or handshaking lines Inputs and outputs are specifically assigned and cannot be changed The MagnaTran 7 robot offers four types of discrete communication high side low side relay and an exclusive type for Brooks Automation Marathon Express users Each type of I O board is explained in the following Table 5 6 Discrete I O Communications Brooks Automation Revision 2 2 I O Board Interface Procedure High Side High Side I O on page 5 10 High Side Low Side Interfaces on page 5 14 Low Side Low Side I O on page 5 12 High Side Low Side Interfaces on page 5 14 Relay Appendix F Relay I O Option on page 11 24 Marathon Express Marathon Express I O on page 5 19 5 9 Operational Interfaces MagnaTran 7 1 User s Manual MISC I O Communications MN 003 1600 00 High S
239. Tran 7 robot to return the absolute position of the A arm for the R and T axes The response shows the type of response the arm the data is being provided for and the data requested If the arm is not specified the robot will use Arm A as the default arm Note that the example just given shows all spaces as and the carriage return as lt Return gt all remaining examples within this manual will show all spaces as with a carriage return implied at the end of the command The number and order of the data fields within a response is variable and the response will follow the order provided in the command If the ALL speci fier was used the order of the variables being returned will be the order pre sented in the command description Response Syntax The syntax for a response varies depending upon the type of response being generated however in all cases the robot will issue a carriage return after the response Request Response The response to a Request Command mirrors the format of the Request The command illustrated below shows several requests for the Commu nication parameters and the format of the response that will be gener ated The response shown below indicates that it is in response to a RO COMM command the Command Mode is Packet and the Operating Mode is Background in both cases Request RO COMM M B FLOW RO COMM ALL Response COMM PKT BKG COMM PKT BKG Brooks Automation Revision 2
240. V Power on indicator TX SIO1 transmit green indicator RX SIO1 receive green indicator The high side interface is designed to operate at 24VDC This power may be sup plied through the connector by the user When supplied externally full optical isola tion is achieved Optionally the user may use the I O interface without supplying power The I O board will automatically switch to internal power Isolation will then be defeated Nominal current requirements for each input is 2mA each Output current is nominal 200mA per pin The I O board is also offered as a low side switching interface See Appendix F Relay I O Option on page 11 24 for a description of the low side board Brooks Automation Revision 2 2 4 13 Subsystems MagnaTran 7 1 User s Manual Electrical System MN 003 1600 00 Personality Board I O Board PC104 CPU Board T1 T2 Axis Driver Board Z Axis Driver Board Figure 4 5 Printed Circuit Board Locations Brooks Automation 4 14 Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Electrical System Power Pak The Brooks Automation Power Pak is a battery back up power source for the Mag naTran 7 robot This compact power fault manager mounts directly on the side of the robot drive and connects between the robot s DC power supply and t
241. VY LIFTIN Moving Parts Present Do not operate the robot PINCH POINT without the protective covers in place or per sonal injury could result in the squeezing or compression of fingers or hands between mov ing parts Electrical Hazard Hazardous voltage Follow lockout tagout procedures i FLAMMABLE MATERIAL gt e ee Figure 1 1 Notes Cautions and Warnings Brooks Automation 1 10 Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Manual Usage Manual Usage This manual is designed to be used as an Engineering Maintenance and Operator s reference General information relating to all functions of the MagnaTran 7 is provided in Chapter 2 Safety Chapter 4 Subsystems Engineering information is provided in Chapter 3 Installation Chapter 5 Operational Interfaces Chapter 8 Command Reference Chapter 11 Appendices Chapter 12 Attached Drawings Maintenance information is provided in Chapter 3 Installation Chapter 5 Operational Interfaces Chapter 7 Alignment and Calibration Chapter 9 Maintenance and Repair Chapter 10 Troubleshooting Chapter 12 Attached Drawings Operational information is provided in Chapter 5 Operational Interfaces Chapter 6 Operation Brooks Automation Revision 2 2 1 11 Introduction MagnaTran 7 1 User s Manual Specifications MN 003 1600 00 Specifications The Brooks Automation MagnaTran 7 is a high reliability robot The specificati
242. XD RAW 16 1 IN P15 IOSELO TXD RAW 2 IN P16 B6 B14 o ARa IOSEL1 pe BE NS 3 IN Pi7 IOSELZ b 4 IN P18 A7 A15 D 4 NPIS low disables FETs 9 B7 B15 P 6 IN P20 C7 c15 5B IN pot 1 ga AB RN2 8 IN P22 B8 B16 P CE Cie 9 IN_P23 P 10 OPUP 5 11 OPUP16 100 348 033 i SEUBTS S10 13 OPUP18 14 OPUP19 15 OPUP20 RXA DRIVEN TXA DRIVEN 4 7KNET 16 1 OPUPO tds 2 OPUP1 Ji 3 OPUP2 R5 R6 4 OPUP3 1k 1k V6GO 91 5 OPUP4 6 OPUPS 5 2 CDM OPUP6 1 8 OPUP7 4 ol 5 Ds1u ps2u Ia RN3 9 OPUP8 SIO1 RX NC 10 OPUP9 IRV Ave iib 11 OPUP10 DS1 DS2 EMO Switch 12 OPUP11 RUE 13 OPUP12 flat spot K K 14 OPUP13 cathode 4 1 TAAVCRORDT 15 OPUP14 4 7KNET CDM PRESEN T INTRLOCK c o J2 when CDM is presen t 553 CDM Not Present EMO BYPA SS Lo 15 24V ROBO 5 8 Q9 SIO1 20 Outputs to Worl d INTRLOCK SRC 10 U22 3 L5 IOPORT DO 38 OUT Fo Do PAO 127m 5 IOPORT D1 37 4 OUT PI 4 1 gb 22TXN Aug IOPORT D2 36 D de OUT E Pale IOPORT D3 35 D pag L2 OUT Pj D29 i DEMZ9SNA197 IOPORT D4 33 D3 pay L44 OUTA 1N400 DF2E DC24V IOPORT D5 32 43 OUT P5 c8 2880 ohm RV3 4JRv4 IOPORT D6 a1 pe Hid 4 OUT FS 4 Vpickup max 16 8 V IOPORT D7 30 p7 pay Al OUT E SZ S OUT PB 10uF 1 ae RD PBO A OUT N10 IOPORT_A0 10 WR PBI 32 OUT P IOPORT A1 9 PB2 54 OUT PH 3 1 PB3 Si OUT PE RESET PB4 OUT PB bee 27 OUT PM PBS 28 OUT PS J3 pco HS OUT P gt OUT PT X B e Pel n OUT P8 2 SIO2 19 OUT PB PC3 Hig x L 9 PC4 13 4 31 PC5 g
243. a wafer properly centered on the end effector will be centered on the platform If not use the CDM to jog or hand locate the end effector until it is centered on the platform 6 Using the CDM slowly extend the robot arm in the R radial direction until a wafer properly centered on the end effector will be centered on the platform 7 Once the end effector is properly located use the CDM to store the R radial and T rotational axis locations for this station NOTE Be sure to store the robot position for the R and T axes Also record and save the R and T axes locations as displayed on the CDM in Appendix E User Setting Tables 8 Retract the robot s arms 9 Verify the stations are properly taught by perform PICK and PLACE com mands 10 Remove the wafer from the robots end effector Brooks Automation Revision 2 2 7 17 Alignment and Calibration MagnaTran 7 1 User s Manual Teaching Arm B of the Dual Arm Sets MN 003 1600 00 Teaching Arm B of the Dual Arm Sets Once the robot s R T and Z axes have been set up for all stations transfer and process modules for arm A it is necessary to teach all stations for arm B NOTE This procedure must be performed during initial setup and at any time that the robot s arms or end effector s are damaged removed and replaced or changed Required Tools and Test Equipment The robot s Control Display Module CDM Adjustment Calibration Strategy This procedure sets the R T
244. afer sensor error after a PLACE Wafer Sensed EX wafer sensor error prior to a PLACE Wafer Sensed EX wafer sensor error after a PLACE No Wafer Sensed R_MT wafer sensor error on a PLACE No Wafer Sensed during EXtend 8 183 Command Reference MagnaTran 7 1 User s Manual Error Code Reference MN 003 1600 00 Error 735 R_MT wafer sensor failure Error 736 R_MT wafer sensor error on a PLACE Wafer Sensed during REtract Error 738 Active option in GOTO supported for R MT wafer sensor only Error 739 R MT wafer sensor error Wafer Sensed on MAT OFF move Error 740 RE wafer sensor error prior to a PICK Wafer Sensed Error 741 RE wafer sensor error after a PICK No Wafer Sensed Error 742 EX wafer sensor error prior to a PICK No Wafer Sensed Error 743 EX wafer sensor error after a PICK Wafer Sensed Error 744 R_MT wafer sensor error on a PICK Wafer Sensed during EXtend Error 745 R_MT wafer sensor error on a PICK No Wafer Sensed during REtract Error 749 R MT wafer sensor error No Wafer Sensed on MAT ON move Error 750 No station with R MT wafer sensor found for Arm A Error 751 No station with R MT wafer sensor found for Arm B Configuration Errors 8 184 Error 800 Error 801 Error 802 Error 803 Error 804 Error 805 Error 810 Error 811 Error 812 Error 813 Error 814 Error 815 Error 816 Error 817 Error 818 Error 819 Error 820 Bad configuration name Verify robot application number
245. age to the robot will occur due to a HALT command the HALT command may result in abrupt motions and may cause the misalignment of a wafer that is on the end effector Purpose Available when the robot is in Background Mode only this command immediately halts all robot motion operations Format HALT Description A controlled stop is applied to halt all robot motion while minimizing wafer move ment on the end effector and the Z axis brake applied Referencing is maintained after a HALT all axes that were referenced before the HALT will still be referenced after the HALT A ready response will be returned when the halt action is complete NOTE To stop the robot enter CT RL C on the user keyboard Example The following example stops all current movement The arms may be moved manu ally in the R and T axes HALT Brooks Automation Revision 2 2 8 39 Command Reference MagnaTran 7 1 User s Manual Hllo MN 003 1600 00 Hllo Purpose Used as a non intrusive command to determine if a robot is responding to communi cations Format HLLO Description Performs no operation may be used as a non intrusive command for determining if the robot is responding No errors are returned Examples HLLO Response Hello or prompt Brooks Automation 8 40 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Home Home Purpose Establishes the absolute reference system for
246. agnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Alignment and Calibration The Brooks Automation MagnaTran 7 robot must be aligned with the system that it will be operating within to prevent misplacement of the wafers or collision of the end effector or wafers with other parts of the system NOTE Even a small misalignment can interfere with proper system operation and may cause wafer breakage The user must perform a complete alignment as part of installing the robot in a sys tem Additionally proper alignment should be verified after servicing the robot Refer to Chapter 7 Alignment and Calibration for the required alignment procedure 7 CAUTION Do not attempt to operate the robot until it has been properly aligned Chapter 7 Alignment and Calibration must be read and understood prior to commanding robot motion Brooks Automation 3 48 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Overview Subsystems This chapter provides a review of all major subsystems within the Brooks Automation MagnaTran 7 Robot The robot s design creates a set of major field replaceable mod ules with all module repair being done in house by Brooks These field replaceable modules include the mechanical system the electrical system and the hand held Control Display Module CDM Chapter Contents Mechanical Posen i424 95139 o COE CD ERE IRR Eo CECI E CP E Ead 4 2 DUDSUBDUME La idee Ea koh OL HERD eee ee Red
247. agnaTran 7 1 User s Manual Operation MN 003 1600 00 Emergency Conditions Emergency Conditions Issuing a HALT Command in Background Mode The HALT command causes the robot to immediately stop any action in progress The HALT command will cause the following effects a controlled stop Z Axis brake is applied Encoder referencing is maintained See also the command Halt on page 8 39 Issuing an Emergency Off EMO N CAUTION The robot is not provided with an Emergency Off EMO device The user is accountable for the EMO circuit Issuing an EMER STOP in DIO Mode If communicating the with the robot in DIO mode activating the EMER STOP pin will immediately cause the following effects a controlled stop Z Axis brake is applied Encoder referencing is maintained This pin may be connected to a user supplied EMO button See also Operational Interlocks on page 6 23 Issuing a STOP in CDM Mode If communicating the with the robot in CDM mode pressing the STOP key will imme diately cause the following effects Brooks Automation Revision 2 2 6 89 Operation MagnaTran 7 1 User s Manual Emergency Conditions MN 003 1600 00 a controlled stop referencing is maintained See also CDM STOP Key on page 6 65 Issuing an EMERGENCY STOP on the CDM Mode During any mode of communication if the CDM is plugged in the Emergency Stop button is effective Pressing the button will immediately cause the follo
248. ail system Monitor Trace Error Codes Error 3000 Error 3001 Error 3002 8 188 Trace currently running Trace variable already set Trace variable not set Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Code Reference Error 3003 Error 3004 Error 3005 Error 3011 Bad trace variable name Bad trace trigger name No trace variables set Bad trace period System Initialization and Error Log Errors Error 4001 Error 4002 Error 4003 Error 4004 Error 4005 Error 4006 Error 4007 Error 4008 Error 4009 Error 4010 Error 4011 Error 4012 Serial number not set System not configured System already born Operator name not set Message log bad record Message log not found Message log write error Message log seek error Message log read error Checksum error in message log Beginning of message log encountered Error log not initialized Robot Motion Control Processor Errors Error 10000 Error 10001 Error 10002 Error 10003 Error 10004 Error 10005 Error 10006 Error 10007 Error 10008 Error 10009 Brooks Automation Revision 2 2 Default debug message from the MCC Sync error motor moving or encoder noisy MCC board memory allocation error MCC board unexpected event error MCC board bad command state MCC Board Sync error can t move motor MCC encoder VABS adjusted small Warning unable to obtai
249. aining to the robot Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Safety Safety Considerations Equipment Safety Guidelines The MagnaTran 7 user is accountable for the following safety concepts If hazardous materials are to be present users must take responsibility to observe the proper safety precautions and insure that the material used is com patible with those from which the robot is fabricated The user shall determine if the MagnaTran 7 will be employed in an quake environment and rectify equipment installation accordingly N CAUTION The robot is not provided with an Emergency Off circuit EMO device The user is accountable for the EMO circuit N DANGER Potential danger exists to operators in the path of the robot arms Two motors are directly coupled to each of the two upper arm seg ments Each motor has a potential maximum torque capability of 9Nm In normal operation the motors are limited by the power cir cuitry and firmware to a lesser torque However if the servo system fails the maximum torque could be applied momentarily At either of these torque limits significant power levels are present that could cause serious personal injury or equipment damage Brooks Automation has designed the control system to be robust and safe and to prevent uncontrolled robot movements in any situation However the potential hazard of out of control motions should be taken very
250. al MN 003 1600 00 Safety Material Safety Information Krytox amp DuPont Safety Information Hazard Emergency Action Fire A Non combustible material Decomposition at flame temperature may form toxic Fluorine compounds Small fires may be put out with a CO or dry chemical type extinguisher Large fires may be extinguished with water spray fog or foam Inhalation Move victim to fresh air If victim is not breath ing perform artificial respiration Skin Contact Flush skin with water after contact Wash con taminated clothing before reuse Eye Contact Brooks Automation Revision 2 2 Immediately flush eyes with plenty of water for atleast 15 minutes Call a physician 2 21 Safety MagnaTran 7 1 User s Manual Material Safety Information MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 2 22 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 3 Installation Overview This chapter provides complete installation procedures for the Brooks Automation MagnaTran 7 Robot including facility requirements unpacking set up and check out Chapter Contents DUE ROTUPODIIDIIS 42424544 CERTE DEST DEA ERE HERR SEEN RR P PEEL ER E EE P dS 3 2 Unpacking end Inspection e 1ascickiaascreednas AD RIA ERA AREE rad bara 3 6 Bis ACT Procede a idu d dd HERR a FEE OO RE RHODE KR RO prd 3 8 SNe 8 e X ER ERE ENDE SP En S RI aa UMS E eT 3 20 In
251. al ARM optional ARM is a must SLOT number SLOT number SLOT number starts with one starts with one starts with zero PLACE see pick see pick Initial motions of PLACE will be performed at with wafer speed REMOVE IO M6 7 are same M6 7 are same N A Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix D Robot Compatibility Table 11 3 Command Comparison COMMAND MAG6 MAG7 VT5 MT5 RESET M6 7 are same M6 7 are same V5 returns differ Returns Brooks Returns Brooks ent string Automation Automation RQ BG V5 M6 7 are same RQ COMM DREP is not sup DREP is not sup Has DREP ported but witha ported but witha option new option LF new option LF RQ CPTR VT5 Mag 6 Mag 7 command format is the same but the return formats are different In Monitor Mode and Packet Mode RQ CPTR response is VT5 CPTR R 1234567 T 1234567 Z 1234567 L Mag 6 R 1234567 T 1234567 Z 1234567 L RQ IO ECHO VT5 Mag 6 Mag 7 command format is the same but the return formats are different In Monitor Mode RQ IO ECHO response is VT5 Echo status Y Mag6 IO ECHO Y In both VT5 and Mag 6 mode the response to RQ COMM ECHO is COMM ECHO ON In Packet Mode RO IO ECHO response is VT5 IO Y Mag 6 IO ECHO Y In both VT5 and Mag 6 mode the response to RQ COMM ECHO is COMM ON RO IO MAP M6 7 are same M6 7 are same N A RQ IO STATE M6 7 are same M6 7 are s
252. al Cable O Ring Mounting Hardware Power Cable I O cable Power Supply Power supply Power supply cable Installation Kit Ps PS b ae Mes c pasan ae ctos qot ns Robot lifting ring Mounting Hardware for Arms Eyebolts Copy of OR Certificate of Performance Test ing 3 6 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Unpacking and Inspection Unpacking Instructions 1 Remove the cover of each shipping crate Unpack inspect and verify contents against the OR NOTE Save the shipping crate for possible future use If the robot is returned to Brooks for service or shipped to another location the original shipping crate must be used The OR is a permanent record of the MagnaTran 7 as it was manufactured by Brooks Automation In addition to providing information about serial number model number etc it also provides critical data Make copies of the form and keep a copy close to the robot Should maintenance be required data from the OR will be needed HEAVY LIFTING Ergonomic Hazard The MagnaTran 7 Drive weighs 29 5 kg 65 lbs 3 axis or 21 kg 46 5 Ibs 2 axis Failure to take the proper precautions before moving it could result in personal injury Move the robot to its final location NOTE The MagnaTran 7 was assembled and bagged in plastic in a cleanroom environment To ensure the cleanliness of the robot only remove the bag in
253. al current drawn will depend upon the use of the robot An external Emergency Off circuit should be installed with EMO switch close to the robot and easily accessible Communications The robot requires a single RS 232 or RS 422 communication connection if operating in serial mode or connection to MISC I O if operating the robot in discrete I O mode DIO Refer to Chapter 5 Operational Interfaces for complete specifications of the com munications requirements Brooks Automation Revision 2 2 3 5 Installation Unpacking and Inspection MagnaTran 7 1 User s Manual MN 003 1600 00 Unpacking and Inspection The MagnaTran 7 robot is shipped in separate packages which are individually sealed to maintain cleanroom conformance These packages are the robot Drive the Arms the CDM and the Installation Kit which includes the OR this manual cables etc Unpack the crate carefully inspect and verify its contents against the checklist pro vided on the front page of the OR Report any damage immediately to the shipper and to Brooks Automation The following table is for reference only Table 3 1 Packing Checklist Reference Package Contents Robot Robot Drive Body Arm Assembly Arms Arm Mounting Fixture s End Effector 1 or 2 depending on arm type Power Pak Power Pak unit Interconnect cable CDM Control Display Module CDM optional CDM cable Operating Package User s Manual Seri
254. all robots even though they have dif ferent style arms The sequence is described below 1 Assert DRIVE ENABLE 2 Set MOVE Type to HOME 3 Assert MOVE Arm moves to Radial R Home Arm moves to Vertical Z Home Arm moves to Rotational T Home Robot asserts HOME STATUS and COMMAND STATUS signals Robot Motion DIO Inhibition The motion of the robot can be halted or inhibited to ensure the safety of the robot and or wafers in several ways as follows 1 In DIO mode any motion can be halted by dis asserting the MOVE command bit This action will halt any motion with profiled velocity While this profiled Brooks Automation 6 56 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Discrete I O Control DIO velocity does not allow the robot to stop immediately it minimizes decelera tion and consequently reduces the possibility of wafer motion relative to the end effector and of subsequent wafer damage If a fault or error condition occurs and any axis becomes un referenced nor mal motion is not resumed following re assertion of the DRIVE ENABLE bit The robot must be re referenced according to the Enable DIO Initialization Sequence in the previous section If CDM control is released to DIO control while the robot arm is not fully retracted then the robot proceeds in a safe sequence to the position defined by the current DIO inputs However Brooks Automation does not recommend that the CDM control be release
255. also used to Jog Counter Clockwise 6 80 8 Up Enters 8 also used to Jog Up 6 80 9 C Enters 9 also used to Jog Clockwise 6 80 0 Enters 0 also used to set value to a Negative number 6 80 Enters 6 80 CR Yes Used to indicate numerical entry is complete also used 6 80 to respond Yes to prompts Left Column Keys The Main Menu prompts the user to press any function key from the left column of the keyboard shown in Figure 6 12 These left column keys select the top level func tions Home Moves arms to the Home reference position along the specified axis and resets the coordinate system for that axis Home is also capable of performing an interlocked 3 Axis Home When HOME is selected the CDM will request the selection of an axis with the following message HOME AXIS ALL R T 2 Once an axis is selected the robot will immediately start homing that axis If ALL is selected the robot will home R first then T and finally Z If an error is encountered during HOME the error will be displayed on the screen Pressing a CDM key will display the previous screen or a wait for Brooks Automation Revision 2 2 6 69 Operation Control Display Module CDM Operation MN 003 1600 00 MagnaTran 7 1 User s Manual 6 70 Move motion to complete screen will appear This ensures that the CDM will pro cess one command at a time max CAUTION There is no interlock
256. ame N A RQ LOAD M6 7 are same M6 7 are same N A Brooks Automation Revision 2 2 11 7 Appendices Appendix D Robot Compatibility MagnaTran 7 1 User s Manual MN 003 1600 00 11 8 Table 11 3 Command Comparison COMMAND MAG6 MAG7 VT5 MT5 RQ POS ABS M6 7 are same M6 7 are same No ARM should ARM is ARM is be used The optional optional return does not Always returnsin Alwaysreturnsin include ARM RTZ order RTZ order string either Returns RTZ in order requested Monitor Mode response to RO POS ABS ALL VT5 Radial xxxxxx Theta xxxxxx Zu XXXXX MAGO POS ABS RADIAL xxxxxx THETA XXXXXX Z XXXXXX Packet Mode response to RO POS ABS ALL VT5 and MAGO POS ABS xxxxxx XXXXXX XXXXXX RQ POS STN M6 7 are M6 7 are No ARM should same ARM is same ARM is be used optional optional RQ POS STR M6 7 are M6 7 are No ARM should same ARM is same ARM is be used The optional optional return does not include ARM string either RQ STN M6 7 are M6 7 are No ARM should same ARM is same ARM is be used The optional optional return does not include ARM string either ROSTN OPTION M6 7 are same M6 7 are same N A RQ STNSENSOR MG6 7 are M6 7 are ARM is a must same ARM is same ARM is Response is differ optional optional ent Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1
257. ames lt 644 604 sees ev ERE WR YT EVER EN 6 61 Dus Major Control Key S r Lada REEEAREERSEREERRAZEREELR AE ER F E REQUE EA s 6 67 6 30 Let Column Major Function Keygisi eodd epe EECEESRP HOEREEREER E REN 6 68 Dol Axis Parameter Selecon EO9B oia ad CRCCeE WT LEE Geor vg d Ee 6 68 632 Data Enity Axis Control Keys 125444 s3aah Qus etd aV EE CAR E Edu 6 68 6 33 PowerPak Controls and Indicators 0 6 see eee eee ee 6 85 6 34 Sample session Software Control iiscsosdas soar Rad E ERARRAS EX 6 88 JV Ami D leaching Procedure qaLi4 tie ivsah qa bbdaebae ir yd Ra Ed 7 18 Bd Achion Comm Ses eae ows beeen E THECHPIAY caw ecenn i RECEPIT ERES 8 13 8 2 DO Control Ca oa oque bey ew ae beritat a ADS Gu 8 14 8 3 Operational Interlock Commands isrceeesmre rk mIRC RE Rt 8 14 5 4 Compound Move VIA Commands cres ber err EPI e RR 8 15 oo Request COmmalulia a iade ELE AER EE HORA RE OUR ded bcd 8 16 Po BECCA 645 hn op benh b pddp ibd ERR E RRTAddAq cpxbrEe REIR 8 17 PI Oe i LI LVazib 4A Rd ERTPEPRCUEDNE SARI DEUEEEL EA DESTREIK ERR 8 17 5s Workspace Commands ios rev ds e sense oes bee enews EA Erba ewes 8 18 8 9 Radial Motion Sensor R MD Commands caesus ra hp 8 19 8 10 Compatibility Commande iie prr ER REEREHERHEEKH ORE DRE EORR Eod 8 19 eld Senp SONI PED EE E AAD 8 20 8 12 System states recorded on motion efrOrS i e ai era anna 8 78 9 1 Preventive Maintenance Schedule i 2 o ssaassae cae aa Ed RARI 9 2 Od Grommet Style Pads d
258. an 7 Robot to reduce unscheduled down time It is recom mended that the preventive maintenance procedures and schedule provided in this section be followed to extend the operating life of the Magna Tran 7 and to minimize unscheduled down time If additional procedures are required they will be supplied along with their maintenance schedules by Brooks Automation Before beginning any procedures in this chapter read and understand Chapter 2 Safety NOTE The following Preventive Maintenance Schedule is based on a certified clean dry environment The user should adjust the Preventative Maintenance Schedule to account for any deviations from this environment Schedule Table 9 1 is provided as a quick reference listing all maintenance procedures the page number of the procedure and the frequency for performing the procedure Table 9 1 Preventive Maintenance Schedule Procedure Page Frequency Data Log 9 4 3 months Ball Screw Inspection 9 6 3 months Encoder and Motor Coil Cables Inspection 9 8 3 months Cover Inspection 9 9 3 months Wrist Band Inspection 9 10 3 months Pads on End Effectors Inspection 9 11 3 months Connection Inspection 9 12 3 months Robot Cleaning Procedure 9 13 As required End Effector Pad Cleaning Procedure 9 15 As required O Ring Removal Replacement Cleaning 9 17 As required Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Preventive Maintenance S
259. ance For ABS it is an absolute position The range for R motion depends on the geometry of the arms arm Specifies which arm will move the ARM identifier is optional A Arm A B Arm B Brooks Automation 8 52 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Move NOTE At least one argument must be specified Description MOVE is a primitive motion command regardless of the axes being moved no interlocking is in force This means that the arm will move both rotationally and ver tically while in the extended position Take great care when using MOVE to avoid impact against the chamber or valve walls NOTE The LOAD command may be used to define the load status of the robot s arms before executing the MOVE command The REL and ABS move types require that the axis be homed This is the nor mal mode of operation and is recommended for safe reliable motion All motions will follow the speed and acceleration profile appropriate for the currently defined load N CAUTION Due to the nature of the MOVE command only single axis moves should be performed See Also GOTO PICK PLACE LOAD Examples In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot will extend the A arm 100 mm 004 in MOVE R REL 100 In the following example arm A is currently extended in station 5 slot 2 and in the down position
260. and RO IO STATE STN 2 SLOT Refer to Request I O State on page 8 84 for a complete description of command usage The following truth table illustrates the possible sensor states Table 6 6 Slot Valve Interlock States Slot Valve State Switch OPEN ACTIVE low CLOSED INACTIVE high Setting the Station Option 4 Enter the following command SET STN 2 OPTION SBIT SVLV SEN STN 2 SLOT This will assign the created mapped name of STN 2 SLOT to Station 2 Now the robot will not extend at Station 2 if the sensors report that the slot valve is closed and error 710 will be reported See Error Code Reference 1 O Mapping Errors on page 8 185 for a list of Interlock Error Codes B Store the new interlock sensor with the following command STORE STN 2 OPTION SBIT SVLV SEN STN 2 SLOT Brooks Automation 6 30 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Operational Interlocks See Store Station Option on page 8 167 for a complete description of command usage In this example a retract wafer present sensor located in the transfer chamber is set to report the status of a specific arm The following is assumed The wafer present sensor is a laser detector which is on when a wafer is not detected and is off when a wafer obstructs the beam The wafer present sensor is wired between a EXT_IN1 pin 2 and GND pin 29 This is digital in bit 1 1 Establish serial communication NOTE DIO mo
261. and SET HISPD Y Brooks Automation 8 126 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Home Position Z Axis Set Home Position Z Axis Purpose Changes the Z Axis Home position Format SET HOME POS Z value Arguments value Absolute position value in microns Range 0 to 35000 microns Description The Z Axis HOME position can be changed through a command line entry NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory See Also HOME RO HOME POS Z STORE HOME POS Z Example To set the Z Axis HOME to 17500 microns SET HOME POS Z 17500 Brooks Automation Revision 2 2 8 127 Command Reference MagnaTran 7 1 User s Manual Set Interlock MN 003 1600 00 Set Interlock Purpose Sets the state of specific interlocking capabilities Format SET INTER INTLCK WAF SEN YI N TZ ONI OFF Arguments Y N Y Enables Wafer Sensing N Disables Wafer Sensing ON OFF ON The robot will execute all T moves before performing Z moves OFF The robot will execute all T and Z moves simultaneously Description Wafer Sensing Three types of wafer sensing is available EXtend sensor REtract sen sor and R MT Radial Motion sensor Each of these sensors is explained in PASIV Safety Feature Operation on page 6 58 The normal operating mode is wafer sensing enabled Disabling
262. and Downloading Station Values on page 9 77 for this procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 2 Disconnect the power and communications connections to the robot A N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 3 Remove the arms from the robot as described in the following procedure Brooks Automation Revision 2 2 9 25 Maintenance and Repair MagnaTran 7 1 User s Manual Robot Removal Replacement MN 003 1600 00 Top Mount 1 Attach the lifting eye bolts to the robot s mounting collar 2 Attach a hoist to the lifting bolts HEAVY LIFTING Ergonomic Hazard The MagnaTran 7 Drive weighs 29 5 kg 65 Ibs 3 axis or 21 kg 46 5 Ibs 2 axis Failure to take the proper precautions before moving it could result in personal injury 3 Unscrew the twelve captive M6 mounting bolts from the chamber do not remove the mounting bolts from the robot s mounting collar and raise the robot body To install the MagnaTran 7 robot reverse the preceding steps Be sure that the align ment pins are properly aligned before seating and bolting the robot s mounting collar Tighten all mounting bolts until the lock washers are fully seated then tighten the bolts an additional tu
263. and Inspection on page 9 10 Inspect armset wrist bearings for missing ball bearings Inspect armset elbow bearings for missing ball bearings Inspect armset wrist bearings and elbow bearings for excessive wear Verify wave washer is located between the robot T2 shaft and the T2 arm mounting flange for arms with a bearing installed between the T1 and T2 shafts Replace theta driver board Refer to T1 T2 Axis Driver Board Replacement on page 9 41 Call Brooks Automation Technical Support Symptom Robot is unable to move in the radial direction and generates the following error Error 10009 MCC hard tracking error Troubleshooting Process Refer to Communication Related Issues on page 10 4 Symptoms Arm looses reference and servo position on extension 10 8 Troubleshooting Process Check EMO switches Check pins 23 and 24 of I O con nector Verify the arm speed when error occurred Attempt to duplicate the failure under the same conditions If error occurred at high speed replace the T1 T2 Axis Driver Board if error occurred at medium or low speed call Brooks Automation Technical Support Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Radial Motion Related Issues Radial Motion Related
264. arameter Selecpon RBVS iaa eo 4rd dep aa edad EE RR EA etd 6 78 Moving in The Menu DPA LLL 43 dex GEHE REA ERRARE RH E 6 80 lunczan 4 mj MEM 6 80 Serme Up ON us espe dud VR iia A REOR Pd PEE Pd as Db p quA MUS 6 81 Example of Teaching a Station with the CDM 00 6 82 Brooks Automation Revision 2 2 V Contents MagnaTran 7 1 User s Manual MN 003 1600 00 PowerPak Power Fault MAnaper 24 iie db p ERER OO HER PER den 6 84 Operaio nnm 6 84 tonos and Iai aes Cu ea fad eid bote bx ded dud pp Cad 6 85 Operational Intetlocks 62 2440 eene arn ar RR re Rt her cents 6 86 oll E A 6 87 Operational Check out 1522222434422 249433 ARA tenes CAM ERA veers 6 87 Normal RUNING 1vixessdsee4I ARR RARE Rd aAA AR GET RES S Edd dd snakes 6 88 A Sample Sessi cosa Cx quae t ER VERA REA PORT DEKA Rad ap REPEAT RES 6 88 Enron TODO OUS cog ceti a5 Oea HE OMA REDE VIR ERO EP dq 6 89 Issuing a HALT Command in Background Mode 6 89 Issuing an Emergency Off EMO 0043 660 rr m ERR ERR aden 6 89 Issuing an EMER STOP in DIO Mode cccechecaxseesscaxeesaavans 6 89 Issuing a SLOP mM CDM MO 42i id ud d ORE ERA RR A 6 89 Issuing an EMERGENCY STOP on the CDM Mode 6 90 Bhub dI aoe Seno bee dod see hee REM AE E a EEEE OE dep deg b du 6 91 Alignment and Calibration Robot ANNEN ereksi desu ceed Ceewae sd C POE KA DPA CIR DC a pedo 7 2 Required Tools aud Test Patient isaasi 3e
265. argument is specified no other Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Station argument name may be specified Description All stations being used must be set for both Arm A and Arm B Fora station at a given physical location the T parameter for Arm B may be different from the T parameter for Arm A The specified values for Base Transfer Offset BTO Pitch and Number of Slots are legality checked according to the following formula BTO NSLOTS 1 PITCH lt maximum allowed vertical travel This command requires the station number and one or more data fields ALL applies only to the data fields after station number and arm descriptor When using ALL be sure to specify the variables in the standard order ARM R T Z LOWER NSLOTS PITCH NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory N CAUTION If station coordinates are set using the SET STN or STORE STN com mands they should be verified before performing any wafer transfers to ensure accurate station definition See Also RQ STN STORE STN Example If the absolute coordinates of the station are known using the ALL option provides a quick method of setting up a station The following command sets station 4 parameters for arm A to the arm extended to 46843 microns 46 mm the angular station p
266. arm has been sent RO REF Returns if axis is referenced 8 100 RQ RTRCT2 Returns the second retract value 8 101 RO ROBOT APPLIC Returns the current configuration number 8 103 RQ RVSN Returns the software revision number 8 102 RO STN Returns the station configuration parame 8 104 ters RQ VERSION Returns the software version number 8 112 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Command Reference Command Quick Reference Tables Table 8 5 Request Commands Brooks Automation Command Description Page RO WARN CDM Returns the CDM warning feature state 8 113 RO WHO Returns BROOKS AUTOMATION Revision 8 114 Table 8 6 Set Commands Command Description Page SET CPTR Sets a capture sensor on off 8 120 SET COMM Sets various communication parameters 8 121 SET HISPD Sets the force high speed option on 8 126 SET IO ECHO Sets the serial communications echo option 8 129 SET LOAD Sets the load condition for the specified arm 8 132 SET LOAD MODE Sets the state of the load mode 8 134 SET LOSPD Sets the force low speed option on 8 135 SET MESPD Sets the force medium speed option on 8 136 SET RTRCT2 Sets the second retract value 8 139 SET STN Sets the various station related parameters 8 140 SET TEACH Sets the robot to CDM teach speed 8 151 SET WARN CDM Sets the state of the CDM warning feature 8 152 Table 8 7 Store Commands Command Description Page STORE COMM Stores the seria
267. arm will move at medium speed throughout an entire command such as PICK or PLACE To ensure the safest operation slower forced speed commands will overwrite faster forced speed options but faster forced speed commands will not overwrite slower forced speed commands To turn off any of the forced speed options use the N argu ment NOTE This option cannot be stored in non volatile memory since it toggles back to N after the subsequent action command MESPD is always set to No at power up Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Mount Set Mount Purpose Sets the position to which the arm moves in response to the MOUNT command cur rently only the vertical position is selectable Format SET MOUNT Z height Arguments height The vertical Z height to which the arm moves relative to the Home position when it receives the MOUNT command prior to mounting or dismounting the arm Description The mount height cannot exceed the vertical position limit set by the SET LIM Z MAX command The default for the vertical limit is the actual mechanical limit indicated in the robot specifications See also RMOUNT NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory Brooks Automation Revision 2 2 8 137 Command Reference MagnaTran 7 1 User s Manual Set Radial Motion Sense MN 003 16
268. arms on the robot For the following procedure the alignment fixture must be installed on the arm set Inspect the under side of the arm set and verify the mounting hardware is pro truding at 6 places If not work the screws until they protrude Position the arms so that when looking down on the robot the I O panel is facing you and arm A is to your right See Figure 6 7 on page 6 19 Using the alignment fixture place the arms on the T1 T2 shafts positioning the locating pins of the outer shaft into the arm set Seat onto the T1 shaft The arm set must be fully seated T Secure the arms to the T1 shaft outer shaft Using the M3 wrench fit the wrench into the 4 thruway holes and tighten the mounting hardware 8 Secure the arms to the T2 shaft inner shaft Using the M3 wrench fit the wrench into the 2 thruway holes and tighten the mounting hardware 9 Torque all 6 screws to 18 inch lbs 10 Remove the alignment fixture by loosening it s hardware NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped to another location the original fixture must be used Also keep the fixture close to the robot Additional procedures will require the use of this fixture Brooks Automation 3 32 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set 11 12 13 Set the arm state of the robot to on Enter the following path SETUP
269. as Issue Resolved Y YES YES YES YES Was Issue Resolved DONE YES CALL BROOKS gt TECHNICAL SUPPORT NO The Theta Driver PCB has failed Was Issue Resolved Figure 10 3 Radial Motion Troubleshooting Brooks Automation Revision 2 2 10 9 Troubleshooting MagnaTran 7 1 User s Manual Theta Motion Related Issues MN 003 1600 00 Theta Motion Related Issues Symptoms Robot is able to move in the theta direction but any of the following armset motion characteristics are observed Armset has jerky motion Armset oscil lates Armset overshoots taught position Troubleshooting Process Verify robot application number is correct Verify that motion is repeatable Refer to Position Repeatability Test on page 10 33 Check for physical obstruction Remove or adjust physical obstruction to prevent interference Verify system alignment has been taught properly Refer to Chapter 7 Alignment and Calibration Verify armset mounting bolts are torqued to 75 88 in Ibs Verify armset is installed correctly Refer to Mount the Arm Set on page 3 23 Inspect armset wrist bearings for missing ball bearings Inspect armset elbow bearings for missing ball bearings Verify wave washer is located between the robot T2 shaft and the T2 arm mounting flange Replace theta driver board Refer to T1 T2 Axis Driver Board Replacement on page 9 41 Call Brooks Technical Support Symptoms Robot is
270. as described below Speed The MagnaTran 7 is a servo controlled robot where the maximum speeds are deter mined by a combination of torque limit maximum acceleration limits and jerk limits 3rd time derivative of distance These limits are factory set in the firmware To ensure optimal performance and efficient motion sequences the actual arm motions occur at three different speeds Additionally when the system references itself during a Home sequence the motion is a special slow Homing Speed to insure maximum positional accuracy The slowest speed usually somewhat faster than Homing speed the with wafer or Low Speed is used for wafer transfer motions e The Medium Speed is used for motions that occur when the active arm is empty and the inactive arm is occupied dual arms only The fastest speed the without wafer or High Speed is used for motions that occur when no wafer is on the End Effector Brooks Automation Revision 2 2 6 13 Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 6 14 Table 6 1 Arm Speeds Single Arm Dual Arm Speeds Speeds HIGH Speed HIGH Speed SC D MEDIUM Speed MEDIUM Speed LOW Speed To set speed control 2 Axis SET LOAD 3 Axis PICK PLACE High Speed motions occur during the automatic wafer transfer sequences PICK and PLACE only at points in the sequence when no wafer is on the end effector s Since the robot has no dire
271. ation is observed or the alignment is off the radial home must be reset Follow the procedure Reset the Home Position to the User Preference on page 9 73 Mount CDM 1 Ensure the arm state of the robot is off Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO 2i Move the robot to the mount position Enter the following path SETUP CONFIG ROBOT ARM MOUNT ARE THE ARMS CURRENTLY ON NO When the robot is in the mount position the 4 locating pins of the robot shafts should be oriented as indicated in Figure 3 9 3 Disengage the robot servos Enter the following path SETUP CONFIG ROBOT SET SERVOS OFF 4 Install the arms on the robot For the following procedure the red arm mounting fixture must be installed on the arm set Using the red arm mounting fixture place the arms on the T1 T2 shafts posi tioning the 4 locating pins of the shafts into the arm set Slightly loosen the black knobs of the mounting fixture and seat onto shafts The arm set must be fully seated Ensure that the arms remain symmetrical about the mounting fixture during installation 5 Secure the arms to the T2 shaft inner shaft using one 5mm SHCS and lock washer Secure the arms to the T1 shaft outer shaft using two 5mm SHCS and lockwashers Torque all three screws to 75 88 inch pounds 6 Remove the red arm mounting fixture Brooks Automation 3 44 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003
272. ation of the robot resulting in personal injury Refer to Figure 9 2 and follow the directions below for the appropriate type of end effector Pad being replaced Brooks Automation 9 32 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 End Effector Pad Removal Replacement Wafer Support BN amp Figure 9 2 Wafer Support Removal End Effector Pad Replacement Repeated wafer transfers will eventually wear away the friction pads In time the sur face of the wafer may touch the surface of the End Effector resulting in abrasion and particle generation To prevent this abrasion of the wafer surface periodic replace ment of the pads according to the maintenance schedule is recommended There are three different styles of end effector pads used on MagnaTran robots metal pins grommet style and adhesive backed The metal pins do not require any regular service The grommet style require replacement every 50 000 if silicone or 100 000 if urethane cycles The adhesive backed pads require replacement every 100 000 cycles Part numbers for these pads may be found in the tables below Table 9 2 Grommet Style Pads Color Description Part Clear 55 Durometer Urethane 001 0929 01 Blue 65 Durometer Urethane 001 0929 02 Brooks Automation Revision 2 2 9 33 Maintenance and Repair MagnaTran 7 1 User s Manual End Effector Pad Removal Replacement MN 003 1600 00 Table 9 2 Grommet Style Pads
273. available with the GOTO commands only when using the MAT option When the MAT option is specified during an Extend or Retract motion the robot monitors the R_MT wafer sensor to determine if the load matches that of the MAT option If the load status and the expected load status do not match an error will be generated See Table 6 7 for the possible scenarios of the GOTO command with MAT option Table 6 7 GOTO with MAT Option Scenarios Command If a wafer is detected If a wafer is NOT detected GOTO REX MAT OFF GOTO operation is GOTO operation is com aborted soft stop and pleted an error is reported Brooks Automation 6 39 Operation Wafer Presence Sensors Radial Motion MagnaTran 7 1 User s Manual MN 003 1600 00 Table 6 7 GOTO with MAT Option Scenarios 6 40 Command If a wafer is detected H awaleris NOT detected GOTO REXMATON GOTO operation is com GOTO operation is pleted aborted soft stop and an error is reported GOTO R RE MAT OFF an error is generated GOTO operation is com pleted GOTO REX MATON GOTO operation is com an error is generated pleted 1 Because of the possible high arm speed and high inertia the arm may not be able to stop without going into the station completely or partially during a soft stop Hence for motions carried out at high speed a collision may not be avoided During a PICK operation the R MT wafer sensor will be activ
274. ay Module CDM Operation on page 6 63 for instructions on using the CDM Emergency Stop CDM The CDM communications cable to the Emergency Stop CDM is attached to the pen dant with an 8 pin modular connector which plugs into the robot The pin out for both ends of this factory made cable are provided in Table 5 11 Note that pins not identified with a signal name are to be left unconnected Table 5 10 Emergency STOP CDM Connector Pin Assignments Robot End Pin ID Signal Name Vcc TX RX GND STOP 24V DC oo do Oi AI WO NY e Brooks Automation 5 20 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operational Interfaces Control Display Module Optional CDM The optional CDM does not have an Emergency Stop button The communications cable uses a standard 9 pin female D connector at the end which plugs into the robot at the connector labeled CDM and a 6 pin modular connector at the end that plugs into the CDM The pin outs for both ends of this cable are provided in Table 5 11 Note that pins not identified with a signal name are to be left unconnected Table 5 11 CDM Connector Pin Assignments Brooks Automation Revision 2 2 Robot End CDM End Pin ID Signal Name Pin ID Signal Name 1 Vec 1 Vcc 2 TXD 2 3 RXD 3 4 4 TXD 5 GND 5 RXD 6 6 GND 7 8 9 5 21 Operational Interfaces MagnaTran 7 1 Use
275. azardous materials involved The following hazardous materials may be recommended for use with the robot The following material safety information is provided as a guideline for proper conduct when working with hazardous materials and corrective action if exposed to them Brooks recommends that MSDS sheets for these materials be obtained from the mate rials supplier Table 2 3 Material Safety Information Material MSDS Title MSDS ID Page Number Helium Helium compressed 1046 2 19 Isopropyl alcohol Isopropyl alcohol 1219 2 19 Nitrogen Nitrogen compressed 1066 2 20 High Vacuum Krytox DuPont DU002667 2 21 Grease Corporate Number Brooks Automation Revision 2 2 2 17 Safety MagnaTran 7 1 User s Manual Material Safety Information MN 003 1600 00 Helium Safety Information Hazard Emergency Action Fire e The cylinder may explode in a fire e Fire may cause irritating gases e Small fires may be put out with a CO or dry chemical type extinguisher e Large fires may be extinguished with water spray fog or foam Move the container from fire area if this can be performed without risk e Stay away from the ends of the tanks Withdraw immediately in case of rising sound from the venting safety device or any discolora tion of the tank due to fire Leak e Vapors may cause dizziness or suffocation Isolate area and deny access to unnecessary per sons Stay upwind and avoid
276. bles from the robot I O face plate 3 Remove the two robot covers via the four captive screws 4 Remove the Lower Cover Mount Assembly Loosen the lower captive screw of the I O board Loosen the three upper cap tive screws of the Lower Cover Mount Assembly See Figure 12 4 Gently allow the Lower Cover Mount Assembly to drop down 5 Locate the Z driver board Locate the FET designated Q1 and measure its resis tance by applying an ohmmeter across pin 1 and pin 3 of the FET Record the resistance in ohms 6 Repeat Step 5 for the FETs designated Q1 through Q12 on the Z driver board For each FET record the resistance in ohms Ta If any FET ohms out at less than 1k ohms then the FET has a short circuit and the Z driver board must be replaced Refer to Z Driver Board Replacement on page 55 8 If no FETs are short circuited then continue to Step 9 9 Reinstall the base plate using four captive screws 10 Reinstall the base plate using four captive screws 11 Reinstall the two robot covers using four captive screws 12 Reconnect all power and communication cables to the robot I O face plate 13 Turn robot power on Procedure is complete Brooks Automation Revision 2 2 10 37 Troubleshooting MagnaTran 7 1 User s Manual Checking for FET Short Circuits on the Z Driver Board MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 10 38 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00
277. by the command Note that this command POS is just one of the logical branches of the request RQ command type Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Command and Response Structure RQ POS ABS STN TRG ARM ARM ARM R R R T T T z SLOT LZ ALL ae ALL ALL Figure 8 1 MagnaTran 7 Command Structure Command Types and Syntax The robot accepts five types of software command transmissions from the host con troller Action commands Set Commands Store commands Request commands and I O commands Each of these command types serves a different purpose A list of the available commands organized by type appears in the Quick Reference Tables in this chapter Command Types Action Commands move or otherwise act upon some physical robot component I O Commands define the I O structure and save and request I O val ues for the robot s I O Request Commands request the operational status or the value of an operational parameter Set Commands save an operational parameter to RAM Parameters saved to RAM will not be restored after a power interruption Brooks Automation 8 7 Revision 2 2 Command Reference MagnaTran 7 1 User s Manual Command and Response Structure MN 003 1600 00 8 8 Store Commands transfer the value of an operational parameter from RAM to no
278. cable Power up robot 4 Establish communications with the robot with the CDM or serial port N WARNING When equipment is energized and live circuits are uncovered the robot is at a Type 3 hazard category See Electrical Hazards on page 2 fs Brooks Automation Revision 2 2 9 53 Maintenance and Repair MagnaTran 7 1 User s Manual Z Hard Stop and Overtravel Limit Switch Adjustment MN 003 1600 00 Lower microswitch Issue the following command HOME ALL Adjust the Z Travel Lower Adjustment bolt to create a 0 024 0 6mm gap between the Z Lower microswitch activation point clicking sound and the bolt as shown in Figure 9 6 See Appendix B Tooling on page 11 3 for gap setting fixture f Z Travel Lower Adjustment 024 in 0 6mm M o l 9 Lower Limit Switch 040 in 1 0mm m T2 Motor Housing iw Lem Lower Hard Stop 2 places J Figure 9 6 Lower Overtravel Adjustment Lower hard stop Issue the following command HOME ALL Adjust the lower hard stop to create a 0 040 1 0mm gap between the Z lower hard stop 2 places and the bottom of the T2 motor housing Do not over adjust Brooks Automation 9 54 Revision 2 2 MagnaTran 7 1 User s Manual
279. cable 002 2198 01 to the input power connector of the robot Secure the 24 volt power lead red of the MagnaTran 7 power cable to the 24 volt DC terminal of the power supply Reference Figure 1 Secure the 24 volt return lead black earth ground lead green and the logic ground lead white of the MagnaTran 7 power cable to the 24 volt return ter minal of the power supply Reference Figure 1 Ensure that the 24 volt return terminal of the power supply is connected to the power supply s chassis ground Reference Figure 1 Plug the robot s 24 volt DC power supply in and turn power ON Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Position Repeatability Test Position Repeatability Test TOOLS Laptop computer with Procomm or equivalent PROCEDURE This procedure determines if the robot is repeatable to its encoder position 1 2 Connect laptop to robot via serial communications port Move the robot to a desired station by issuing the command GOTO N station number Extend the robot into the desired station by issuing the command N WARNING Warning Ensure that the slot valve is open and any physical obstruc tions are removed prior to extending the robot armset GOTO R EX Request the present absolute position of the robot s encoders by issuing the command RQ POS ABS ALL Record the position values Move the robot to another location Move th
280. cations mode in RAM to half duplex SET IO ECHO N Brooks Automation Revision 2 2 8 129 Command Reference MagnaTran 7 1 User s Manual Set I O State MN 003 1600 00 Set I O State Purpose Sets the current status for the specified I O Interlocks Format SET IO STATE io name setting Arguments io name The name assigned to physical I O using the MAP command setting The output value for the I O referenced by the io name Note that the output set will be defined by the type of I O being referenced See I O State Outputs in Table 6 5 Description This command is used to set the physical I O by referencing the I O names defined using the MAP command The values used when issuing this command are defined by the I O type being referenced their settings and a description of the settings This command is available for trouble shooting or testing purposes allowing the user to toggle output bits for verification or to operate devices through the commands interface NOTE No in type I O state can be set See Also RQ IO STATE MAP SET STN OPTION Example The following examples provide an overview of the settings for the different types of I O Note that the current arm status of the robot does not apply to this command The current status of theI O defined by PUMP CTRL set using the MAP command which in this case is a DISCRETE OUT is set to ACTIVE SET IO STATE PUMP CTRL ACTIVE Brooks Automation 8 130 Revision 2 2
281. ce of the end effector to ensure that no portion of it exceeds the height of the lowest wafer support Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Adjusting the Robot s End Effector Adjusting the Robot s End Effector The end effector of the robot must be adjusted for planar motion within the wafer delivery zone of any transfer or process module This adjustment procedure must be performed at either a transfer or a process module s wafer delivery zone that gives complete access to the robot s end effector typically at full extension of the arm This procedure must be performed during initial setup and at any time that the robot s arms or end effector s are damaged removed and replaced or changed It is also recommended to perform this procedure every 90 days as a preventative mainte nance procedure NOTE This procedure assumes that the end effector is properly located in the arm is flat and that the top surfaces of the wafer support pads are within 0 076 mm 0 003 in of each other Required Tools and Test Equipment A set of Allen wrenches in metric sizes The robot s Control Display Module CDM Dial indicator and base as shown in Figure 7 1 refer to Appendix B Tooling on page 11 3 Limits and Tolerances The end effector s runout specification is dependent on the size of the wafer to be transported The Total Indicator Runout TIR of the end effector is
282. ce parameter s for the requested name or for all defined work spaces See Also Set Workspace on page 8 153 Store Workspace on page 8 173 Brooks Automation Revision 2 2 8 115 Command Reference MagnaTran 7 1 User s Manual Request Workspace AutoCreate MN 003 1600 00 Request Workspace AutoCreate Purpose Requests the current status of the automatically created work space mode Format RO WSPACE AUTOCREATE Response WSPACE AUTOCREATE ON OFF Arguments ONIOFF Specifies the mode of AUTOCREATE operation on or off Description This command is used to requests the automatically created work space mode of operation on or off See Also Store Communication on page 8 157 Store Workspace AutoCreate on page 8 174 Brooks Automation 8 116 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Workspace Mode Request Workspace Mode Purpose This command is used to request the current setting of the work space mode of oper ation Format RQ WSPACE MODE Response WSPACE ON OFF Arguments ON OFF Specifies the mode of operation on or off Description Indicates the current setting of the work space mode See Also Set Workspace Mode on page 8 155 Store Workspace AutoCreate on page 8 174 Brooks Automation Revision 2 2 8 117 Command Reference MagnaTran 7 1 User s Manual Reset MN 003 1600 00 Reset Purpose This command is used to perform a softwar
283. cedure Chapter Contents Robot APOIO 1144 dob Eb DEDREA E EEHERREE ER DPDUR EHE ERI p ER deed doe 7 2 Verifying Flatness of Rohot s End Effector 14145064 iube ERE ERE RR RDECEA KS 7 5 Adjusting the Robots End Effector iee rack rd ree 7 7 Setting the Robot to the Wafer Transport Plane 22i22soci socer hr m n 7 13 Setting the Transfer and Process Modules T and R Coordinates 7 16 Teaching Arm B of the Dual Atm 98618 oaqocakoas4dt Abe ER ELESq ERA eres 7 18 Pipa C hegboUE 1225239447 pio ibd d Ped KEY CER AE Redde sd e Rd x 7 20 Brooks Automation Revision 2 2 7 1 Alignment and Calibration MagnaTran 7 1 User s Manual Robot Alignment MN 003 1600 00 Robot Alignment The Brooks Automation MagnaTran 7 Robot must be aligned with the system that it will be operating in to prevent misplacement of the wafers or collision of the robot with other parts of the system Note that even a small misalignment can interfere with proper system operation The user must perform the following alignment procedure as part of installing the robot in a system during routine maintenance whenever the robot s arms or end effectors require replacement or when one of the system modules requires replace ment Brooks Automation recommends an alignment check under the following cir cumstances A complete alignment when the MagnaTran 7 robot is first set up at the user s site A complete check at all stations when the robot s end effector
284. ceed by performing a Successful Action Test Successful Action Test After the PLACE operation is complete the robot will perform a Successful Action Test If the station has a sensor and it is configured for use with the active arm the robot will check the sensor configuration at that station for the sensor type and then read the sensor status A flowchart of the Successful Action Test is shown in Figure 6 10 EXtend type sensor Sensor state should have changed to ON REtract type sensor Sensor state should have changed to OFF If the robot does not receive the appropriate signal from the sensor an error message will be generated and the PLACE operation is considered to have failed Brooks Automation 6 36 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Wafer Presence Sensors Extend and Retract NOTE If the Successful Action Test fails all robot motion will have been com pleted There is no need to clear the error before issuing another command Servo Position Recording During any operation the robot performs the position of the servos for all three axis may be recorded at a specific sensor location Each time the specified sensor makes a state transition from either a high to a low or from a low to high the servo position data and the type of sensor transition will be recorded for a maximum of ten transi tions NOTE The sensor s configuration does not affect the triggering of servo data collection
285. chanism provides the drive to the left and right arm mechanisms on both the single and dual arms The single arm referred to as Arm A and the dual arms referred to as Arm A and Arm B are configured in software for full motion in three axes Radial R Rotational T and optionally Vertical Z Arm Description The MagnaTran 7 robot may be equipped with either the Brooks Automation pan tented Single End Effector Arm Set the Bisymmetrik Dual End Effector Arm Set or the Leapfrog Dual End Effector Arm Set Single Pan Arm Set On all three axis of motion radial R rotational T for Theta and the optional vertical Z both the left and right upper arm segments are driven simulta neously and with the same velocity The rotary motion of the independent drive shafts is coordinated by the Personality Board and profiled to provide smooth motion to the arms as the end effector is accelerated from or brought to rest While the maximum radial extension is dependent on the geometry of the arm specified by the user the MagnaTran 7 may be supplied with a Single End Effector Arm Set that meets the specification of a 1050 mm reach from the cen ter line of the robot to the center line of the wafer This version of the arm accommodates loads of up to 1 0kg 2 2Ibs on the end effector The actual extension and retraction positions of the arm is software selectable Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Ope
286. chedule Table 9 1 Preventive Maintenance Schedule Procedure Page Frequency End Effector Alignment 9 20 3 months Power Pak Maintenance 9 2 3 years or when it is indicating a LOW battery Parts Brooks Automation can provide all parts required for Preventive Maintenance Fora list of parts required for preventive maintenance contact Brooks Automation Cus tomer Support To obtain additional information about parts for preventive mainte nance contact your local Brooks sales representative or call Brooks Automation Customer Support at 1 978 262 2900 Required Tools PC with a serial terminal program with log file capture capabilities Serial or Null Modem cable See Appendix B Tooling on page 11 3 Medium Phillips Head and regular screw drivers Metric set of Allen Wrenches Flashlight Foam swabs and or lint free cleanroom wipes Brooks Automation Revision 2 2 9 3 Maintenance and Repair MagnaTran 7 1 User s Manual Data Log MN 003 1600 00 Data Log In order to accurately track the usage of the robot several internal counters and logs should be downloaded for analysis This data will aid in diagnosing problems that may occur during future PM sessions Required Tools PC with a serial terminal program with log file capture capabilities Serial or Null Modem cable See Appendix B Tooling on page 11 3 NOTE Follow these steps to setup for Steps 1 through 5 to follow eAttach a PC to the robot wi
287. command is used to determine the current parameters of a specified sensor and to read the current state of the specified sensor If the specified station does not have a sensor configured the optional parameters will return the following values TYPE NONE ACT HI SEN 1 STATE NONE Examples In the following example the sensor requested has not been associated RQ STNSENSOR 1 ARM A TYPE ACT SEN STATE STN 01 ARM A TYPE NONE ACT HI SEN 1 STATE NONE Brooks Automation Revision 2 2 8 109 Command Reference MagnaTran 7 1 User s Manual Request Sync Phase MN 003 1600 00 Request Sync Phase Purpose Requests the Sync Phase for the T1 T2 and Z motors N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format RQ SYNC PHASE ALL T1 I T212Z Response tlvalue t2value zoalue Arguments t1value The calculated average T1 value t2value The calculated average T2 value zvalue The calculated average Z value Description This command is used to request the current value of the motors 7x DANGER This command is NOT used in the normal operation of the robot See Motor Electrical Phase Calibration on page 9 69 and PC 104 CPU Board Replacement on page 9 58 for instructions on this command Brooks Automation 8 110 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request S
288. coordinates are not defined or are defined as zero an error will be returned See Set Radial Motion Sense on page 8 138 The SET STNSENSOR command automatically creates a new I O in the robot I O map The new I O will name will appear as SET station arm STNSENSOR where sta tion is the tow digit station number and arm is the arm letter To un set a wafer sensor enter the following command SET STNSENSOR TYPE NONE Notes If the sensor type is R_MT and r coord is not defined an error is reported If the sensor type is R MT and ft coord is not defined the t_coord is set to zero and no offset for that station is assumed If the sensor type is not R_MT then the r_coord and t_coord options are not available See also Operational Interlocks on page 6 23 for a complete description of how to setup this command with examples Request Station Sensor on page 8 108 Store Station Sensor on page 8 169 Examples In the following command the automatic I O name will be set as STNO3BSENSOR SET STNSENSOR 3 ARM B TYPE R MT ACT LO SEN 17 POS R 700000 POS T 10000 Brooks Automation 8 148 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Sync Phase Set Sync Phase Purpose Sets the Sync Phase for the T1 T2 and Z motors 7 CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command For
289. ct location for that station PKTO t offset Pick theta offset specifies the positive or negative offset from the Brooks Automation Revision 2 2 8 177 Command Reference MagnaTran 7 1 User s Manual Transfer with an Offset MN 003 1600 00 theta location for that station PLTO t offset Place theta offset specifies the positive or negative offset from the theta location for that station Description This function picks the wafer from one station and places it to another station with offset values for R and T NOTE The XFER command is meant to be used with robots that have the Z Axis option installed Using the XFER command with 2 Axis robots will result in an error being generated See Also GOTO MOVE PICK PLACE Example In the following example the pick station and the place station are the same XFER 1 1 ENRT NR PLTO xxx PLRO xxx When the ENRT NR option is specified in the above example the retract is removed NOTE Since no arm descriptor is provided in the example the robot will move the default arm Arm A Brooks Automation 8 178 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Code Reference Error Code Reference The MagnaTran 7 Robot will generate error messages in the form of a hexadecimal number when a problem with a software command is encountered The following table lists all Error Codes in numeric order which also provides a grouping of error codes by error type
290. ct robot power and visually inspect the red LED s for illumination Visually inspect the entire robot board set frame and interconnecting cables for any short circuits That is a circuit board shorting against a frame member a screw shorting against a circuit board a frayed or broken cable etc Reinstall the Lower Cover Mount Assembly Reinstall the two robot covers via the four captive screws Connect all power and communication cables from the robot I O face plate Turn on robot power The following table indicates the function part number location and amperage of the 3 replaceable fuses on the Magnatran 7 robot A red LED is linked to each fuse When a fuse blows the respective red LED will not illuminate Table 9 5 Theta Board Fuse Functions Main Board LED reer Brooks Part Function Designation Designation perag Number Main Power F3 DS7 5 Amps 430 0003 10 CPU T1 Motor FA DS8 10 Amps 430 0003 09 T2 Motor F6 DS10 10 Amps 430 0003 09 Z Motor F5 DS9 10 Amps 430 0003 09 Brooks Automation Revision 2 2 9 57 Maintenance and Repair MagnaTran 7 1 User s Manual PC 104 CPU Board Replacement MN 003 1600 00 PC 104 CPU Board Replacement NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools and Test Equipment 7 32 nut driver Laptop computer with ProComm or equivalent Small flat head screwdriver Medium phillips head screwdriver R
291. ct the robot power cable and serial communications cables Apply power to the robot This completes the I O Board replacement procedure Brooks Automation Revision 2 2 9 49 Maintenance and Repair MagnaTran 7 1 User s Manual Z Home Flag Sensor Board Replacement Procedure MN 003 1600 00 Z Home Flag Sensor Board Replacement Procedure NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools Performing the I O board replacement procedure requires the following tools Medium phillips head screwdriver Small flat head screwdriver M3 hex wrench 0 062 shims or feeler gauge qty 2 0 024 feeler gauge 0 040 feeler gauge Removal Procedure 1 2 9 50 Issue the command HOME R T Issue the command SET SERVOS OFF Install the arm mounting fixture to the armset ensuring that the arms are sym metrical about the arm mounting fixture Place two 0 062 shims between the uppermost plane of the robot top flange and the armset forearms Issue the commands ZBRAKE OFF Manually press the arm set down slowly avoiding impact so that the fore arms touch the shims effectively creating a 0 062 gap between the robot top flange and the forearm N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 Brooks Automation Revision 2 2 MagnaTran 7 1 User
292. ct wafer sensing ability it keeps track of the PICK and PLACE history for the arms When the robot is first powered on it assumes that the pan or both pans of a BiSymmetrik or Leapfrog arm are occupied and will not move at high speed until a PLACE has been performed on both pans Additionally if an arm has performed a PICK operation the robot assumes that the pan is occupied until it performs a PLACE operation Issue SET LOAD ON to indicate a wafer is on the End Effector and all subsequent moves will be at low acceleration Issue SET LOAD OFF to allow all subsequent moves to be at high acceleration The syntax for a move is GOTO N 1 R EX to extend the arm to station 1 and GOTO N 2 R EX to extend the arm to station 2 A command script example follows Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Theory of Operation Table 6 2 Arm Speed Script File Command Action User Module GOTON 1 Rotates to station 1 GOTO N 1 REX Extend arm Place wafer on End Effector SET LOAD ON Set slow speed GOTO N 2 REX Retract rotate to station 2 and Remove wafer extend arm SET LOAD OFF Set fast speed GOTON2 RRE Retract arm Process wafer GOTON 2 REX Extend arm Replace wafer SET LOAD ON Set slow speed GOTO N 1 REX Retract arm rotate to station 1 Remove wafer and extend arm Brooks Automation Revision 2 2 6 15 Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 Hardwa
293. ction points report a discrepancy call Brooks Automation Customer Support 6 Y Reinstall the covers onto the robot Do not reinstall damaged covers Reattach the Power Cable Serial I O Cable CDM Cable and Power Pak if applicable Apply power to the robot Home the robot through the CDM Brooks Automation Revision 2 2 9 9 Maintenance and Repair MagnaTran 7 1 User s Manual Wrist Band Inspection MN 003 1600 00 Wrist Band Inspection The Wrist Bands of the arms can become damaged or misaligned from impacts or crashes These situations can weaken the strength of the bands and cause motion errors during operation Required Tools none Follow these procedures to inspect the Wrist Bands 1 Extend the robot into a load lock or process module so that the End Effector is readily available 2 Inspect the surface and ends of the Wrist Bands for nicks scratches creases or tears 3 Inspect the alignment of the bands against the forearms they should be aligned with and equally spaced from the edges of each forearm To adjust the wrist band see Wrist Band Adjustment on page 9 39 Brooks Automation 9 10 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Pads on End Effectors Inspection Pads on End Effectors Inspection Over time repeated wafer transfers will wear away the surface of the pad and decrease its friction It is necessary to inspect these pads to preve
294. d as no active background tasks and no errors RQ BG BG N 0000 Brooks Automation Revision 2 2 8 69 Command Reference MagnaTran 7 1 User s Manual Request Capture MN 003 1600 00 Request Capture Purpose Displays the data in the Servo Position Table Format RQ CPTR sensor Description The RQ CPTR command will list all valid entries up to the maximum of ten in the Servo Position Table if there are any entries If there are no entries the RO CPTR com mand will indicate that the capture function has not been triggered All servo positions are recorded in microns or millidegrees The state the sensor tran sitions to is recorded after the servo positions Examples RQ CPTR 1 CPTR R 0036379 T 0090232 Z 1234 H CPTR R 0036458 T 0090325 Z 1256 H CPTR R 0036567 T 0090343 Z 1245 H RO CPTR3 CPTR NOT TRIGGERED Brooks Automation 8 70 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Communication Request Communication Purpose This command is used to display the serial communications and command execution modes Format RO COMM M BI FLOW LF ECHO CHECKSUM DREP ERROR LEVELI BAUD RATE Response COMM mode flow linefeed echo chksum data_rep errorlevel baudrate Arguments ALL Reports all options in the order presented in the command format mode Reports the serial I O communications mode MON Monitor mode PKT Packet mode RDY flow Reports the
295. d dolo OE eo 4 2 Protective COVES asa a e nce e EORR rakiri ad au UR Ede ace Ro 4 3 Frome Assemb y eee ee Se ee ere cere Te ere ete eee rr d da 4 4 IL 12 Dive Assembly aad queues tete usmetestoetexddee pde tape hu 4 5 Z AXIS Dive SENA eaa Ledshaqe teases bys enue b Ed Ad Rd bestias 4 7 Pe RE ida dish PES RAUS iR IRA Henne ae didi iid edis S Rd 4 9 Elecmical Syste Laid ee freee eee eee eee ee ee eee eer eee eee eei 4 11 POCIO PU Supervisor DOBEI uses cidreira irie esi esL seus ase vd 4 11 Personality Motion Control Computer Board 0005 4 11 T1 T2 Axis Driver Board and Z Axis Driver Board 4 11 EO nee DONNE addo Rd r wd dco EX Fach a CEA REEF S 3 ER Ed 4 12 ewer Pal nad Raed hee Med E oe d foster e eK este I RU icd 4 15 PONI SUD LL Lbs 4 rad do Ed dad ER tetas bl dA dd pe xd rak SA 4 15 UH PE a qas Gast boats dure bp oda buiddr o Su qst bt Od aed adopts bai ad 4 16 Conttol Display Module 4 i29 odo RO S ub iG CR IR IET LEE ka dA Ea RA 4 17 Punctonal Block Diagram 1e encmrbh EHE ERR Rel 4 18 Brooks Automation Revision 2 2 4 1 Subsystems MagnaTran 7 1 User s Manual Mechanical System MN 003 1600 00 Mechanical System The design of the MagnaTran 7 robot is such that the robot s drive mechanism and control electronics are completely isolated from the vacuum envelope without the use of any rotary seals The statically sealed metal bellows within the robot allows verti cal movement of the arms wh
296. d out of range Enter the second using a two digit number in the range of 01 through 59 CDM already initialized CDM escape key entered CDM quit key entered CDM bad parameter 8 187 Command Reference Error Code Reference MagnaTran 7 1 User s Manual MN 003 1600 00 Error 1804 Error 1805 Comm Port Driver Error 1900 Error 1901 Error 1902 Error 1903 Error 1904 Error 1905 Error 1910 Error 1911 Error 1912 Error 1920 CDM move aborted CDM Has Control of Robot Unknown serial port Unable to open serial port Unable to close serial port Can t allocate serial port semaphore Serial port overflow Serial port empty Secondary Serial Port mode Secondary Serial Port is busy Secondary Serial Port response timeout No serial communication with remote MCC System Task Kernel Related Errors Error 2000 Error 2001 Error 2002 Error 2003 Error 2004 Error 2005 No memory available for multi tasker Multi tasking kernel error Bad parameter passed to multi tasker Timeout occurred Illegal task block requested No resources available Non Volatile Memory Errors Error 2100 Error 2101 Error 2102 Unable to read from NonVolatile RAM Unable to write to NonVolatile RAM NonVolatile RAM overflow Mail System Related Errors Error 2200 Error 2202 Error 2203 No memory available for mail system Error initializing mail system Unknown task ID passed to m
297. d while in non station coordinate mode such as JOG or ABS This could result in a fault or error condition under certain cir cumstances Instead Brooks recommends placing the robot into station coor dinate mode by selecting the MOVE function before releasing the CDM Brooks Automation Revision 2 2 6 57 Operation MagnaTran 7 1 User s Manual PASIV Safety Feature Operation MN 003 1600 00 PASIV Safety Feature Operation The MagnaTran 7 s PASIV safety feature limits travel of the robot arm to user pro grammed access zones or workspaces To ensure the safety of high value wafers and equipment safety zones are created preventing access to defined zones thereby preventing collisions These zones are contained in a transferable data file which can be used to minimize down time during service The Workspace Overview 6 58 A workspace is defined as a three dimensional volume of space around the robot s home position in which the robot is allowed to access Attempting to send the robot to any space outside of the PASIV M environment will cause an error message The PASIV feature is an optional mode that must be enabled by the user By default the robot will not operate in the workspace mode Once the workspace feature is enabled one pre defined workspace will exist called the home workspace This workspace defines the safe travel area around the robot home position The user then defines the workspaces around t
298. de does not support the sensor setting functionality Setting the Station Sensor 2 Enter the following command SET STNSENSOR 1 A TYPE RE ACT LO SEN 2 This creates a mapped name of STNO1ASENSOR and assigns it to Station 1 In this example SEN is set to input 2 EXT IN1 pin 2 as shown in Table 5 7 Now if the sensor reports that a wafer is present the robot will not perform a PICK at Station 1 and an error will be reported See Error Code Reference Robot Wafer Sensor Errors on page 8 182 for a list of Interlock Error Codes 3 Store the new interlock sensor with the following command STORE STNSENSOR 1 ARM A TYPE ACT SEN See Store Station Sensor on page 8 169 for a complete description of command usage Brooks Automation Revision 2 2 6 31 Operation MagnaTran 7 1 User s Manual Wafer Presence Sensors Extend and Retract MN 003 1600 00 Wafer Presence Sensors Extend and Retract Overview The MagnaTran 7 robot provides an optically isolated interface for discrete external sensors The firmware of the robot will accept sensor inputs and use them to verify wafer status determine the success of any wafer transfer operations collect servo position data for all three axes of the robot NOTE Each sensor is configured for use with a specific arm Any wafer handling per formed with a different arm will be ignored by that sensor In addition to the wafer present data provided by the sensor interface the position of t
299. designated U2 of the Z Home Sensor PCB illuminates when the sensor designated U1 is blocked The Z Home Sensor PCB has failed Did the Light Illuminate Was Issue Resolved Reset the Z Home Flag Limit Switches and Hard Stops YES Was Issue Resolved CALL BROOKS TECHNICAL SUPPORT Verify that the Z Home Flag trips the Z Home Flag Sensor when the robot is homed Did the Sensor Trip Was There Any Movement in the Z Axis NO When the Command Was Issued y Verify connection of the Z Motor the Z Brake and the Z Encoder with the Z Driver PCB Verify that the LED s designated DS1 DS2 and DS3 on the Z Driver PCB are lit after homing in Z Axis Was Issue Resolved IES Are the LED s Lit Verify the connection of the power cable between the Z Driver PCB and theTheta Driver PCB YES y The Z Driver PCB has failed YES YES Was Issue Resolved Was Issue Resolved NO y The Personality PCB has failed Figure 10 8 Z Home Axis Troubleshooting DONE Brooks Automation Revision 2 2 10 19 Troubleshooting MagnaTran 7 1 User s Manual Operational Interlock Related Issues MN 003 1600 00 Operational Interlock Related Issues Operational Interlocks pertain to all robot
300. ding full iso ion x NG cc HK X gt NC RESET Xx 4 5 RESET GND RESET INPUPIO 21 MAX701CSA 24 Inputs to Robo t NIQ IN P 0 23 ue U3 IOPORT DO 38 5 IN PO IN PO 8 1 INPUPO Board ID set to 000 IOPORT D1 37 DO PAO 4 IN P1 7 Collector1 Anode1 2 INO IOPORT D2 36 D DAS 8 IN P2 INP1 re Emitter Cathodes INPUP1 EP U31B IOPORT D3 35 p3 pag 2 IN P3 RN4 i Beiter Cathode2 2 uta v b2 IOPORT DO IOPORT D4 33 Da Pag 44 IN P4 424v 1S00 ___16 1 INPUPO mingr eggs vec 13 bz IOPORT D1 IOPORT D5 32 43 N P5 2 INPUP1 15 45 ve bs IOPORT D2 IOPORT D6 31 De pag 42 IN PS INPUP2 MOGD21 TAA Ya D3 IOPORT D3 IOPORT D7 30 5S pA 41 IN P7 4 INPUP3 Ua 5 INPUP4 IN P2 8 1 INPUP2 19 8 ap 20 N P8 6 INPUPS l 7 Collector Angdat s 10UF taRtT C 1 M02 ASe AS 65 6 RD RBO IN_P9 INPUP6 IN_P3 Emiteri Cathode INPUPS 40 21 6 3 0 01uF 0 01uF 0 01uF 0 01uF IOPORT AO 10 WR PBI 22 IN P10 8 INPUP7 5 Collector2 Anode2 4 74ALS240 IOPORT AT 9 0 PB2 24 IN PTI INPUPS 1 9 Emitter2 Cathode2 39 25 IN P12 10 INPUPS cs PBs 26 IN ES 11 INPUP10 MOCD 17 ppg 27 IN P14 12 INPUP11 US bee 28 IN P15 13 INPUP12 IN P4 amp resin Andean INPUP4 14___INPUP13 i BE COD Ig 16 IN P16 15 INPUP14 IN P5 6 Cm ter athocer 3 INPUPS PCO 17 IN P17 5 Collector2 Anode2 4 per 18 IN P18 10KNET 1 Emitter2 Cathode2 19 N P19 L4 PC3 MOCD217 beg 15 IN P20 US R92 bos L14 IN P21 poe 3N E22 RN5 IN P6 8 Collectort Anodet H INPUPS INDU
301. distance the end effector will stop short of a sta tion s R position during a PLACE PUSH value Specifies the distance in microns the end effector may move within the zone of a Process Module as shown in Figure 8 2 PUSH The distance the end effector may push the substrate past a station s R position during a PLACE The distance value is equal to or less than the station value radial distance plus the push value distance The push value cannot be negative A Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Station Option check for push distance value is included to insure the push dis tance is within the maximum radial distance lt Push s Safety Station R Value Robot Figure 8 2 Safety Push Operation SBIT SVLV SEN name Specifies the name of the slot valve sensor at the specified station using a single bit RETRACT SEN name Specifies the name of the retract sensor at the specified sta tion EX ENABLE name Specifies the name of the extend sensor at the specified station This command is designed for the Extend type sensor used in the Mara thon Express only VLV SEN name Specifies the name of the valve closed sensor at the specified sta tion NONE name Eliminates an already defined sensor WAF SEN Specifies the location and name of the wafer sensor at the specified sta tion EX name Sensor at the extended position in the Process M
302. ds for the Slot number that is the vertical location in station coordinates When used as a description parameter in a multi slotted station it means the total number of slots assigned to that station For a multi slotted station the distance between the slots assumed to be a uni form spacing This parameter does not apply to single slot stations The All key allows the operator to set all the available variables using an auto matic sequence that prompts for the values of all the parameters one by one SELF TEST LIFE TEST Allows the user to initiate a life test routine with continuous display of the cycle count on the CDM while in progress NOTE Stations 1 and 2 must be defined before executing a life test Slot valves must be opened PICK STN 1 ARM A PLACE STN 1 ARM B PICK STN 2 ARM B PLACE STN2 ARM A Brooks Automation Revision 2 2 6 79 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 Moving in the Menu Tree Making choices moves the user down the menu tree shown in Figure 4 7 Completing an action will typically leave the user at the same function Two keys are useful in moving back up the tree Escape Moves back one level Quit Moves back to the Main Menu Entering Data Values 6 80 Keypad Some menus require that the user enter numerical data using the keypad in the lower right part of the CDM key pad In all cases the menu first appears with
303. dule and PLACE them into another module During the PICK and PLACE procedures observe the system to verify proper operation Repeat the procedure to transfer the wafers back to their original location NOTE If the module is a Cassette Elevator or a multi slotted module the wafers should be picked and placed in all slots 2 Repeat the procedure for each module in the system Brooks Automation 7 20 Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Final Checkout 3 Repeat the procedure for arm B The system manual may have additional alignment procedures related to the robot such as using an aligner to verify offsets and allow a better teach of the robot Brooks Automation Revision 2 2 7 21 Alignment and Calibration MagnaTran 7 1 User s Manual Final Checkout MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 7 22 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 8 Command Reference Firmware Release 2 24 Overview This chapter provides an overview of the control software for the Brooks Automation MagnaTran 7 Robot Software control of the robot provides a broad range of com mand options including a number of sophisticated integrated command sequences The robot s control software also allows monitoring and control of external devices by the robot Communications between the MagnaTran 7 Robot and the host controller is accomplished using standa
304. dware Secure the arms to the T2 shaft inner shaft Using the M3 wrench fit the wrench into the 2 thruway holes and tighten the mounting hardware Torque all five screws to 18 inch lbs Remove the alignment fixture by loosening it s hardware NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped to another location the original fixture must be used Also keep the fixture close to the robot Additional procedures will require the use of this fixture Set the arm state of the robot to on Brooks Automation Revision 2 2 3 27 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 3 28 11 12 Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the procedure again Check the alignment of the arm and the position of home by entering the fol lowing command HOME ALL If the home position is not where desired use the procedure Reset the Home Position to the User Preference on page 9 73 Brooks Automation Revision 2 2
305. e The MAP command allows the flexibility to create interlocks and assign a name to physical I O This command also assigns the use of the I O and defines the specific characteristics of the I O Sensors must be configured using the MAP command before they can be assigned using the CDM Format MAP name type characteristic TO io name i0 num Arguments name Specifies the user reference name to be assigned to the specified I O 20 characters maximum type Specifies the type of I O by its specific function Command Types of I O interlocks and a description of each are listed in Table 6 5 on page 6 24 characteristic The characteristic defines the active state of the I O device being assigned as defined by the type of argument To allow flexibility the user may define the characteristic as active HI or active LOW depending on the hardware functionality io name Specifies the physical name of the I O device being mapped or assigned The I O devices available to the robot are DIGITAL IN DIGITAL OUT io num Specifies the I O channels being mapped or assigned This vari able is an eight digit maximum hex number of the form 0x12345678 representing the specific I O channel s See the examples that follow for assistance in designating the io num Note that leading zeros may be dropped from this number Brooks Automation 8 44 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Map Desc
306. e Reference Error 10022 Error 10023 Error 10024 Error 10025 Error 10026 Error 10028 Error 10029 Brooks Automation Revision 2 2 Verify that power to robot is 24 x2 VDC Inspect robot power cable for proper connection and continuity Check all FET s for short circuits See Checking for FET Short Circuits on the Theta Driver Board on page 10 36 Error Z axis overtravel limit reached Reissue motion command Inspect appropriate Z overtravel limit switch for possible obstruction resulting in switch acti vation Adjust the Z axis overtravel limit switch Refer to Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 Move robot so that Z overtravel limit switch is not activated Manually toggle switch to verify operation If switch does not toggle replace Z axis overtravel limit switch Replace Z driver board Refer to Z Driver Board Replacement on page 9 43 Arm actual position impossible check sync zero Determine the sync zero values presently stored in the robot by issuing the command RQ SYNC ZERO ALL Record the values All robot stations must be retaught after completing the next step Redefine the home position to the desired location Refer to the Restore the Home Position to the Factory Settings on page 9 71 Error MCC watchdog timed out Error defective R_MT type wafer sensor Verify that the radial and theta positions taught for the R_MT type wafer sensor are accurate Check h
307. e and Repair MN 003 1600 00 Reset the Home Position to the User Preference Reset the Home Position to the User Preference This procedure will allow the user to hand locate the arms to the desired home posi tion and store the new values This procedure is used in two circumstances when the user prefers to establish the HOME position in a location other than the factory set position and when the robot arms are not exactly aligned after an arm set is replaced Z N WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 1 Install the mounting fixture to the armset Observe the wrist plates Visually verify that the wrist plates are equal dis tance from the center and parallel with each other 2 Enter the following command FIND ZERO T 3 Move the arms so that the robot s end effector Pan A points in the direction that will be defined as zero Position the arms within 20 seconds The arms must be moved by at least 15 Hold the arms in the HOME position until the RDY prompt appears 4 Request the Sync Zero values RQ SYNC ZERO ALL An example of the response is as follows SYNC ZERO diy eo 7 646136 Perry 4 162485 d aps 0 106358 5 Store the values STORE SYNC ZERO ALL 6 To set the Z axis home position for the MagnaTran 7 place two 0 062 shims Brooks Automation Revision 2 2 9 73 Maintenance and
308. e block when resting on the end effector Moving the gauge block should not cause the wafer to move If the BTO value needs adjustment use the setup function from the CDM to jog to the appropriate height and store the BTO value NOTE Be sure to store the robot s BTO value Also write down the BTO value as displayed on the CDM for future reference in Appendix E Use the INFO function on the CDM to verify that the BTO value has been saved Remove the wafer and if required the gauge block and retract the robot s arm Assign a value to LWR lower that will allow the end effector to clear the wafer after placing it in the module Note that this calculated value for the lift lower Z move for the end effector should be as small as possible to avoid excessive Z axis travel while ensuring a proper hand off Brooks Automation Revision 2 2 7 15 Alignment and Calibration MagnaTran 7 1 User s Manual Setting the Transfer and Process Modules T and R Coordinates MN 003 1600 00 Setting the Transfer and Process Modules T and R Coordinates This procedure is used to teach the robot the exact rotational axis T and radial axis R coordinates of each transfer and process module It includes rotating and extend ing the robot arm until its end effector is positioned over the center of the module s wafer platform and then storing this position in the robot controller s memory NOTE This procedure must be performed during initia
309. e during the extend and the retract at the specified station In a PICK operation the robot arm will first be retracted in the R direction if required Then the robot arm will move in the T and Z directions to the specified station Once at the specified T and Z coordinates for the station the arm will extend into the station During the extend motion the robot monitors the R_MT wafer sensor to determine if a wafer is on the end effector If the robot detects a wafer the PICK will be aborted and an error code will be generated If the robot does not detect a wafer during the extend motion the PICK will proceed After the robot extends into the station performs the pick operation and the arm is retracted the PICK operation is completed During the retract motion the robot will monitor the R_MT sensor to determine if a wafer is present and the PICK oper ation was successful If successful the robot memory map is updated to LOAD ON If the robot does not detect a wafer on the retract motion an error is gen erated and the PICK is considered a failure During a PLACE operation the R_MT wafer sensor will be active during the extend and the retract at the specified station In a PLACE operation the robot arm will first be retracted in the R direction if required Then the robot arm will move in the T and Z directions to the specified station Once at the specified T and Z coordinates for the station the arm will extend into the station During t
310. e following command stores the previously set values for arm A at station 5 using the ALL specifier STORE STN 5 A ALL Brooks Automation 8 166 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Station Option Store Station Option Purpose Transfers from RAM to non volatile memory the values of the various optional sta tion related parameters Format STORE STN station ARM arm OPTION SBIT SVLV SENIRETRACT SENI WAF SEN REI EX R MT EX ENABLE I VLV SEN Or STORE STN station ARM arm OPTION SAFETY PUSH Or STORE STN station ARM arm OPTION VIA POST POSR or STORE STN station arm OPTION ALL Arguments station The number of the station for which parameters are being specified Range 1 16 ARM arm The arm A or B for which parameters are being set the default arm is A The ARM identifier is optional Description The STORE STN OPTION command requires the station number and all variables This command is used to store the location and operation of all wafer sensors used in the system the robot is installed in This command can also be used to store the amount that the wafer may be moved on the end effector during a PICK or PLACE operation at the specified station NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory Brooks Automation
311. e location of the platform along Z vertical and depending upon the options installed along R radial All commands that cause the product to execute physical actions A device used to ensure the proper centering and alignment of a wafer Mechanical contact aligners use pins or other fixtures to ensure proper wafer position by mechanically moving a wafer placed into them Non contact aligners scan the wafer and pass information regarding the wafer s position to the host controller which then directs the system wafer handler on how to pick up the wafer to ensure that it will be prop erly positioned American Standard Code for Information Interchange An assignment of alphanumeric characters to 8 bit data byte values Used by many communication protocols including RS 232 which is used to control the VCE 5 All commands that both set a parameter in RAM and EEPROM The average pressure exerted on the earth s surface The mechanical pump used to discharge gases at atmospheric pressure Glossary MagnaTran 7 1 User s Manual MN 003 1600 00 from a turbo pump or other pump Bakeout The degassing process by which a vacuum system is heated during the pump down process Base Transfer Offset A dimension used by robots it is the distance between Z Axis Home and the Substrate Transfer Plane Batch Transfer Arm A robotic arm designed with a set of multi level end effectors or tines used for transporting entire batches of subs
312. e or LOW side and how the robot logic mapping was configured active HIGH or active LOW A HIGH SIDE I O BOARD with ACTIVE HIGH will behave the same as a LOW SIDE I O BOARD with ACTIVE LOW A HIGH SIDE I O BOARD with ACTIVE LOW will behave the same as a LOW SIDE I O BOARD with ACTIVE HIGH The following signal definitions will be discussed as two options OPTION A HIGH side board with active HIGH or LOW side board with active LOW OPTION B HIGH side board with active LOW or LOW side board with active HIGH Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation Discrete I O Control DIO DIO Input Signals DRIVE ENABLE Enables the robot to respond to input commands Table 6 8 DIO Drive Enable DRIVE ENABLE HIGH DRIVE ENABLE LOW OPTION A Motors are DISABLED Motors are ENABLED OPTION B Motors are ENABLED Motors are DISABLED RESET ERR Resets any error conditions provided that the cause of the error condi tion has been cleared The signal must be held for a minimum of 100ms to be valid Table 6 9 DIO Reset Error Rising Edge of Signal Falling Edge of Signal OPTION A Not applicable Error is CLEARED OPTION B Error is CLEARED Not applicable MOVE Causes the robot to move as specified by the MOVE TYPE command The signal must be held for the duration of the move or a minimum of 100ms to be valid If this signal changes state before
313. e reset of the robots s firmware Format RESET Description Performs a software reset of the robot s firmware that is functionally equivalent to turning the power off and then back on All parameters stored in RAM will be replaced by the values stored in non volatile memory After approximately 30 sec onds a ready response is returned when reset as complete Example The following example resets the MagnaTran 7 and loads the user s default settings stored in non volatile memory for all parameters RESET Brooks Automation 8 118 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Arms Set Arms Purpose Changes the robot armset configuration Format SET ARMS ON OFF Arguments ON Sets robot armset configuration to original values OFF Sets the state to shaft7 or shaft7z Description This command is used in mounting the robot arms See Also Mount the Arm Set on page 3 23 Request Configuration on page 8 74 Brooks Automation Revision 2 2 8 119 Command Reference MagnaTran 7 1 User s Manual Set Capture MN 003 1600 00 Set Capture Purpose Enables or disables servo position high speed polling capturing triggered by the specified sensor Format SET CPTR sensor ON OFF Arguments sensor The number of the sensor ONIOFF The required action for the command Description The SET CPTR command will enable or disable capturing of servo position data
314. e returned Brooks Automation Revision 2 2 8 65 Command Reference MagnaTran 7 1 User s Manual Remove IO MN 003 1600 00 Remove IO Purpose Removes the specified I O name from the current map of all named I O Format REMOVE IO io name Arguments io name Field size 20 max The name assigned to physical I O using the MAP command Description This command is used to remove a previously defined I O name defined using the MAP command from the I O map Removing a name from the I O map frees that name for redefinition If an I O was defined for a station sensor or a station option first remove it at the sta tion then REMOVE I O See Also MAP RQ IO MAP Example The following example removes the name P GAUGE 1 from the I O map REMOVE IO P_GAUGE_1 Brooks Automation 8 66 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Remove Station Remove Station Purpose Removes the previously defined stations Format REMOVE STN ALL station Arguments station The number assigned to the physical station Description This command is used to remove a previously defined station and it s values defined using the SET STN command All station values will be set to zero Removing the sta tion number frees that number for redefinition See Also Set Station on page 8 140 Example The following example removes station 11 and it s station values REMOVE STN 11 Brooks Automa
315. e robot back to the position in Step 3 Request the present absolute position of the robot s encoders by issuing the command RQ POS ABS ALL Record the encoder values Repeat Steps 5 through 7 a minimum of ten times Verify that the encoder positions are repeatable to within 20 units for all axes If not call Brooks Technical Support Procedure is complete Brooks Automation Revision 2 2 10 33 Troubleshooting MagnaTran 7 1 User s Manual Verifying Arm State of Magnatran 7 MN 003 1600 00 Verifying Arm State of Magnatran 7 10 34 The arm state of the Magnatran 7 robot indicates whether the armset is installed or not installed on the robot drive If the armset is installed on the robot and the arm state is set to on then the servo control table per the user specific application number controls robot motion If the armset is not installed on the robot and the arm state is set to off then the servo control table identified as either shaft7z or shaft7 controls robot motion The differences in the servo control tables is governed by the mass of the robot armset If the incorrect arm state is entered in the robot a hard tracking error will occur due to the significant difference in mass The arm state of the robot can be set via both serial communication or the CDM 1 To request the arm state via serial communication issue the following com mands RQ CONFIG this command will provide
316. e side design of the Leapfrog it is not possible to determine which arm has a wafer on the end effector when the arms are retracted However the R MT sensors may be used in any application where the sensors are placed outside of the normal robot retract position R MT Wafer Sensing Technique The R_MT type wafer presence sensors work with the PICK PLACE XFER and GOTO with MAT option commands only During MOVE operations no wafer sen sor are active During these operations all motions will follow the speed and acceler ation profiles according to the arm load status in the robot memory map The speed and acceleration that the robot moves during the PICK PLACE XFER and GOTO operations is dependent on the load status of the end effector as discussed in Speed on page 6 13 R MT Placement Criteria 6 38 The placement of the wafer sensor with respect to the robot retract position deter mines the success of the sensing technique The best position for the R MT wafer sensor is as close as possible to the wafer outer edge while the arm is retracted With this criteria the robot can check the sensor to determine if an operation has failed early in the beginning of the motion where the robot has not reached it s maximum velocity acceleration or inertia If the above scenario is not possible as in the case of Leapfrog same side arms the sensor can be placed underneath the wafer at the retracted position In this scenario the waf
317. e telephone style connector at the CDM base 3 Hold down the Self Test Pitch and Home keys at the same time while plug ging in the connector at the bottom of the unit an assistant may be needed to perform this step The following warning appears on the display LOAD DEFAULT DATA ARE YOU SURE 4 Press the HOME key to clear the memory After a self test the CDM will dis play a small blinking square in the upper left corner Resetting Brooks Automation Factory Parameters 1 Simultaneously press SELF TEST and PITCH The screen will display a small symbol consisting of a C and a T close together blinking 2 Press the decimal point key The screen will then display labels above three keys on the keyboard with an arrow pointing to its corresponding key These labels indicate that the function of these keys is altered during this procedure The labels and keys are NEXT over the HOME key The NEXT function changes the value of the setting currently displayed on the screen ESC over the STOP key The ESC function is not used in this procedure Brooks Automation Revision 2 2 9 81 Maintenance and Repair MagnaTran 7 1 User s Manual Control Display Module Resetting MN 003 1600 00 SAVE over the ON OFF key The SAVE function stores the new value of a setting and proceeds to the next one 3 The screen should also indicate that the current communication speed is 9600
318. e the best peo ple the best practices and the best products Business Profile Brooks Automation Inc is an independent supplier of substrate material handling robots modules software controls and fully integrated cluster tool platforms to semiconductor flat panel display and data storage manufacturers worldwide Founded in 1978 the Company has distinguished itself as a technology and market leader particularly in the demanding cluster tool vacuum processing environment By working with and focusing on increasing the productivity of our customers device fabrication equipment we ve been able to set and constantly upgrade industry substrate material handling thermal conditioning and software controls standards In addition to corporate facilities in Chelmsford Massachusetts Brooks Automation maintains a software technology center in Richmond British Columbia as well as sales and service offices located in the United States Europe Japan Korea and Tai wan Brooks Automation Revision 2 2 1 17 Introduction MagnaTran 7 1 User s Manual Company Overview MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 1 18 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 2 Safety Overview This chapter describes safety guidelines for the Brooks Automation MagnaTran 7 Robot All personnel involved in the operation or maintenance of the robot should be familiar with the safety precautions outlined in
319. e to provide the most complete documentation possible for the Brooks Automation MagnaTran 7 wafer transfer robot This section provides a brief description of each change The following table lists the various revisions made to this manual as of the most recent major revision The date revision and the chapters affected are indicated from left to right The dagger t indicates which chapters were changed Rev 1 0 Initial release no changes have been made Rev 2 0 Incorporated latest firmware revisions updated procedures Rev 2 1 Incorporated latest firmware revisions add RO HISTORY delete RO EVENT RECORDS add error codes 221 551 802 803 804 Add PowerPak to Preventa tive Maintenance Change Special Notes on PowerPak Chapter 6 Add OCP features updated STNSENSOR procedures expanded Compatibility section add SIO2 connections Rev 2 2 Chapter 6 Miscellaneous I O bit SVLV SEN was removed DIO table 6 8 oe column is LOW table 6 21 Option A and B reversed Home sequence changed to RTZ pictograms added for safety compliance Brooks Automation Revision 2 2 XX1 Changes MagnaTran 7 1 User s Manual MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation xx11 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 1 Introduction Overview This Introduction provides a brief overview of Brooks Automation MagnaTran 7 highlighting its features operation and specifications Additionally
320. e1 7 1 IN ISO23 D DISABLE 22 5 Collector2 Anode2 77 DS4 INTRLOCK SRG 23 tional Customer Supplied Emitter2 Cathode2 7 o 12 ipe 7 Ww 95 I O Power For Full Isolati MOCD217 x RED F1 SMD100 I 2 zn 2 ST v 24V cus 13A 200 28 412V ISO 24V RIN CUST U20 OUT ISO 0 19 m Fused at source 28 OPUPO 1 He d 24V ROBGO sor o 30 OUT FD 2 Anodet Collector OUT ISO0 OUT ISO0 1 o OUTO TARN OUTO Cathode1 Emitteri n 01 31 OPUP1 3 6 OUT 1501 21 9 19 OUTI OUTI at OUT Pi 4 Anode2 Collector2 5 1 OUT ISO1 OUT 1S02 3 18 OUT2 CUST OUT2 Cathode2 Emitter2 OUT ISOS 2 8 03 35 OUTS OUTS 33 RN7 T 14 04 34 MOCD217 16 1 OUT ISO0 OUT ISO4 5 te Gs 18 OUT4 OUT4 2 2 OUT 1501 OUT 1505 6 15 OUTS OUTS u23 3 OUT_ISO2 OUT 1S06 is os 4 OUT6 OUTS 35 OPUP2 ia e 4 OUT 1503 OUT 1507 8 O4 13 OUT7 OUT7 a4 OUT F2 2 x 7 OUT ISO2 5 OUT_ISO4 9 12 OUTS OPUPS g Cathode Emitteri Fg 6 OUT_ISO5 10 FAULT GND 1 OUTS 39 OUTS 1 Anode2 Collector 5 4 OUT ISO3 7 OUT ISO6 OER VS OUTIO 40 Cathode2 Emitter2 41 tmt 8 OUT i507 ULNZGST OUTTT utput11 MOCD217 9 OUT ISO8 5 OUTI2 a utput12 10 OUT_ISO9 zl OUT13 utput13 U24 11 OUT ISO10 OUT14 an utput14 OPUP4 1 8 12 OUT_ISO11 m OUT15 butput 15 OUT Ri 2 Anodet Collector1 T OUT ISO4 1 OUT _ISO12 a OUT16 46 butputie Cathode1 Emitter1 47 bs OPUP5 3 6 14 OUT _ISO13 OUT17 utput17 OUT 5 45 Anode Collectors ER OUT ISO5 15 OUT ISO14 u26 OUTIS 48 Dutputis athode mitter OUT_ISO8 NS o 20 UTS OUTIS RA putput19 M GD217 12KNET
321. eas d EXE RO Era 7 2 nume SAIC sob rao ktORERERRERERTEREREAd FL EE RE RR ER d 7 3 Alignment Procedure iiis ed sged A RR AR EAETRAxEAz EE dob doi doe wears 7 4 Verifying Platness of Kobot s End Effector i224 ko bob pass ERE REIR 7 5 Adjust ng the Robots End BHOCDOR 4 446243 dio EE M HORRORE EU odor 7 7 Setting the Robot to the Wafer Transport Plane cose eee rm emn 7 13 Setting the Transfer and Process Modules T and R Coordinates 7 16 Teaching Atm D of the Dual Art Set vausaae usud L au ERE VER RERC EA d ER 7 18 Teach Anm E Procedure 1432 ipeckrbda PIENE Sd d d bep cease 7 18 Teach Arm ice te U 2s edRP ieee couse eee soe eee eree A 7 19 our Ey orroe 2G s 4 ee POS 4 HOw EA IGa chon ERO 7 20 Verity Proper PICK and PLACE of Water vests Curae etx ERA eda 7 20 Command Reference bugle cee eee errr eer eet er reer eter rer errr rer TU AGI da d dias 8 2 Robot Operaio ose diveednaresicsereyeniwstkeweeenseeregowcneasd 8 2 Gs ge boire ETE DES qid ERE 8 2 Operating Modes ie DEDERE EORR ERR EGRE dee RR pod 8 4 Brooks Automation vi Revision 2 2 MagnaTran 7 1 User s Manual Contents MN 003 1600 00 Command and Response SIPHEDUTE 192 hdd keh IETEN OE EE RO UE ROS 8 6 Response l ypes and Syntax oeeno d der s tu Nine VE QU OA VERE ee ees 8 9 Command and Response Compatibility 4 222 a a Ar RR 8 11 Command Quick Reference Tables co recorrencia rine ror 40d64459004545 8 13 Lommand Reen so do oe 9 8 aa a dL ARN SHE CURE HR ERO
322. ection Brooks Automation 4 16 Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Control Display Module Control Display Module The Control Display Module CDM shown in Figure 6 12 is a separate pendant type unit that plugs into the robot The CDM is capable of performing two main func tions when connected to the MagnaTran 7 robot The first function allows monitoring of the robot s performance and location while it is being controlled by the Cluster Tool Controller through the use of the INFO menus The second function allows direct local control of the robot Robot speed is not greater than 10 inches per second It can be used to set up test and generally gain familiarity with the robot The CDM is used to teach the robot the various stations that the robot will be servicing Additionally it may be used to test robot operations and to manually cycle the robot The CDM has a four line 80 character display and 30 dedicated keys laid out in a color coded pattern with similar functions grouped together Additionally the CDM provides a retractable hanger which allows it to be stored on the side of the machine the robot is mounted in For convenience a brief overview of the instruction set and the motion parameters is located on the back of the CDM for reference The CDM connects to the robot See Control Display Module on page 3 17 for con nection and Control Display Module on page 5 20 for the operational int
323. ed in Chapter 8 Command Reference The characters in each command are converted to sets of binary bits 1 s and 0 s and the bits for each char acter are transmitted down the wire in single file No additional control or hand shaking wires are used The Baud Rate see Table 5 2 indicates the speed of the connection in bits per second Serial port SIO1 is optically isolated Serial and logic commons are tied together with a resistive connection between the two grounds thereby preventing a charge building up on the wires and causing a permanent failure This isolation may be defeated by removing the 1 2K resistor See Wiring Diagram in Chapter 12 Attached Drawings In situations where the Command Display Module and the Host Controller are unavailable a personal computer running a serial communications application may be connected to the robot s serial communication port using the same cable and com mands to communicate with the robot as the Host Controller The connection to the MagnaTran 7 Robot from the external controller uses selectable RS 232 or RS 422 serial communications The MagnaTran 7 robot is initially set to RS 232 The configuration for the robot s serial communications protocol for all serial connectors is described in Table 5 2 Brooks Automation Revision 2 2 5 5 Operational Interfaces MagnaTran 7 1 User s Manual Serial Communication SIO1 MN 003 1600 00 Table 5 2 RS 232 RS 422 Protocol Port Configuration R
324. ed on Brooks Automation Revision 2 2 8 113 Command Reference MagnaTran 7 1 User s Manual Request Who MN 003 1600 00 Request Who Purpose To request who the robot is by it s firmware version number Format RO WHO Response BROOKS AUTOMATION V version Arguments version The installed firmware version Description This command is used to request the current version of the firmware installed in the robot Brooks Automation 8 114 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Workspace Request Workspace Purpose This command is used to request the current setting of the specified work space parameter s for either the specified work space name or all defined work spaces Format RO WSPACE name ALL STATE INTLCK ARMISTN I RMINIRMAX ITMIN TMAXI ZMIN ZMAX Response name state intlck arm stn rmin rmax tmin tmax zmin zmax Arguments name Specifies the work space name state ACTIVE or INACTIVE intlck Name of a mapped SVLV SEN or SBIT SVLV SEN type input arm A B or BOTH stn 1 16 rmin Robot retract value to robot maximum extension value in microns rmax Robot retract value to robot maximum extension value in microns tmin 0 360000 microns tmax 0 360000 microns zmin 0 to robot maximum Z vertical height in microns zmax 0 to robot maximum Z vertical height in microns Description Indicates the current setting of the specified work spa
325. eel or Quartz Required Tools Kal rez pads use de ionized water Stainless Steel pads use Isopropyl Alcohol Quartz pads use Isopropyl Alcohol Lint free clean room Wipes Clean room gloves Cleaning Kal rez Procedure N DANGER The MagnaTran 7 may be used in an environment where hazardous materials are present and surfaces may be contaminated by those materials Refer to the facility s Material Safety Data Sheets for those materials to determine proper handling 1 Dampen a cleanroom wipe with de ionized water N CAUTION Wipe must be moistened only squeezing the wipe should not cause any water to drip Do not allow water to come in contact with bearings seals etc 2 Clean the entire end effector paying special attention to the Kal rez pads Do not apply excessive pressure or force to the pads while cleaning Excessive force may dislodge or bend the end effector Brooks Automation Revision 2 2 9 15 Maintenance and Repair MagnaTran 7 1 User s Manual End Effector Pad Cleaning Procedure MN 003 1600 00 Once all residues have been removed use dry cleanroom wipes to dry all sur faces Cleaning Stainless Steel or Quartz Pads Procedure 9 16 N DANGER The MagnaTran 7 may be used in an environment where hazardous materials are present and surfaces may be contaminated by those materials Refer to the facility s Material Safety Data Sheets for those materials to determine proper handling Da
326. ees everest ree jEr ent EEEE ERRAT TRA WARE 9 33 95 Adhesive Backed PROB 24539234 dackordop b d dore Rod ad b dere e ed 9 34 Gy Bond O rareti ha eas os 4 994 0 So dS oo 94s 9 39 9 5 Theta Board Fuse PUNCHONG 5 22k adoro e 3d dase iad DIDI eeu 9 57 ee Reken 01 0 rm 9 83 10 1 Symptoms ot Observed Errors Types icouesaaa sae 34322 41a RR 10 2 XVili Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Tables MN 003 1600 00 Il 1 RS 232 RS 422 Protocol va whe ow Gow a See oer RUNE eL ERE DEVE 11 2 12 Wnohand Fe La sq PF Sah edd pi d ERR Rad E PCET REPRISES V 11 3 11 9 Command Comparison cessere Eher vd edarhbes n ES oe Rr 11 6 114 BrortodetomparsonMIS VIS sosebutsa n VR EE RO kasiate s 11 11 11 5 EuortodeComparson Mag 6 00 iiada diea pA RERGOE GER Ce Rd 11 12 1146 Standard VIS MIS Compatibility 5 2asaze rra RR Rer hr 11 13 1L7 Standard Magnalran 6 Compatibilly ss ssicccadeaaindsaeeaena aden 11 15 Ties JRobotionlgardDOn iussa be zuo chia v EEROFQATVOACERE TE DA dE en es 11 17 119 Current HOME Setinps 1s cia oa qd eeu EE Y awe ee S A stis T ROC 11 18 11 10 User Setting Syne Zero Home l OSIUOfL base rar RR HORROR CER 11 18 Il 11 Encoder Values 6 4 hos rodane ona dak bo EE CO Ae OC he oC m 11 18 IPLE Phase Ves ns shee na ce we ee eS 11 18 11 13 Push and 5alety Values for Station 0 0 0 0 00 rseeteenr he hen 11 19 11 14 Station Assignments 4444445404054 Ce EAR db Fc Eo blc dedo Sade 11 20 11 15 Operational
327. eference MN 003 1600 00 Go To Examples In the following example arm A is currently extended in station 5 slot 2 and in the down position The arm will move to the up position without retracting NOTE Since no arm descriptor is provided in the example the robot will move the default arm Arm A GOTOZUP In the following example arm A is currently retracted The robot will move arm A to station 5 GOTON5 ARMA In the following example material is expected during active material hand off for sta tion 1 GOTO N 1 R EX MAT ON Brooks Automation Revision 2 2 8 35 Command Reference MagnaTran 7 1 User s Manual Go To Station with Offset MN 003 1600 00 Go To Station with Offset Purpose Moves to an offset specified station referenced location This command performs all interlocking necessary to maintain safe wafer handling Format GOTO N stn R EX RE RO r offset TO t offset Z UP DN SLOT num ARM arm Arguments N stn Specifies station number Range 1 16 The N identifier is optional R EX RE Specifies radial position of arm EX extended RE retracted RO r offset Specifies the positive or negative offset from the extend retract location for that station TO t offset Specifies the positive or negative offset from the theta location for that station Z UPI DN Specifies vertical deployment of arm UP up DN down SLOT num Indicates the slot to which the arm
328. efined Optimal Trajectory segments where a single constraint is active Figure 6 11 shows that the end effector first moves through an intermediate VIA point on the way to its final destination Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Off Center PICK and PLACE Feature Final Destination VIA Point Figure 6 11 Off Center PICK and PLACE To set up the OCP feature two positions must be defined 1 Set the station values 2 Set the VIA value a location radially outward from the station to which the robot will travel in a straight path in order to remove a wafer without interfer ence The travel path of the arm is adjusted for optimal travel in relation to the origin and destination of these two taught positions This travel path is followed for both PICK and PLACE functions Set the Station Values 1 Teach the robot the station using the CDM OR use the command Set Station on page 8 140 2 and Store the values Brooks Automation Revision 2 2 6 43 Operation MagnaTran 7 1 User s Manual Off Center PICK and PLACE Feature MN 003 1600 00 Set the VIA Values 1 Set the servos to OFF SET SERVOS OFF 2 Manually move the end effector to the desired VIA point location 3 Request the current absolute location RQ POS ABS ALL 4 Set the VIA point See Set Station Option VIA Point on page 8 145 and Store Station Option on page 8 167 Brooks Automation 6 44 Revi
329. el eito 6 5 P _ node ollector af OUT Pe 4 Cathode2 Emitter2 OUT_ISO15 MOCD217 U33 OPUP16 1 8 OUT PS 23 Anode i Collector 7 f OUT IS016 OPUP17 3 anode Cae 6 node ollector af OUT PT 4 Cathode2 Emitter2 9 OUT_ISO17 MOCD217 at DRAWN BY OPUP18 HIE OUT PB 3 Ai pectori 3 1 OUT ISO18 UNLESS OTHERWISE SPECI BROOKS AUTOMATION OPUP19 athode miter VCC GUTES 3 Anode2 Collector2 9 34 GUT 18019 RESISTORS ARE 1 4W VALUESN OHMS INC 15 ELIZABETH Cathode2 Emitter2 T RESISTOR TOLRANCES 5 CHECKED BY CHEL RD MA Rg CAPACITOR VALUESN uFARADS 01824 4185 u usos n ea e SCHEMATIC MAG 7 HIGH SIDE Br OPUPRD 4 A Sak APROVED BY Anode1 Collector1 1 0 INTERFA E ELECTRONICS 4 7k 2 Cathode1 Emitteri 2 DiS LOG 3 6 DISABLE LOGIC l 4 Anode2 Collector2 5 Cathode2 Emitter2 DWG NO MOCD217 SD 002 3756 01 E Notes
330. emoval Procedure 9 58 1 2 Connect the laptop to the robot via the serial communications port Retrieve present calibration parameters firmware version and configuration number by opening a log file and entering the following commands RO CONFIG ensure the robot is set to ARMS ON for armset configuration data as opposed to SHAFT7Z configuration data RO ENCODER T1 ALL RO ENCODER T2 ALL RQ SYNC PHASE ALL RQ SYNC ZERO ALL RO IO MAP ALL RO COMM ALL RO COMPATIBILITY ALL RO MOUNT for reference only this procedure will redefine the MOUNT position RO BIRTH RQ VERSION For every robot station taught on the system retrieve the station coordinates and station options using either the CDM or serial communication For serial communication enter the following command for each station RQ STN station ARM arm ALL RQ STN station ARM arm OPTION ALL RQ STNSENSOR station ARM arm ALL Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 PC 104 CPU Board Replacement NOTE Exerciser software for the MT5 VT5 is not compatible with the MagnaTran 7 1 Turn off the power to the robot and disconnect power and communication cables N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 Remove the protective covers as shown in Figure 12 2 N CAUTI
331. ence MN 003 1600 00 Request Communication The following example requests the serial I O communications mode and the com mand execution mode using the selected specifiers The status is returned as the fol lowing M B Monitor Mode FLOW Background LF on ECHO on RQ COMM M B FLOW LF ECHO Response COMM MON BKG ON ON Brooks Automation Revision 2 2 8 73 Command Reference MagnaTran 7 1 User s Manual Request Configuration MN 003 1600 00 Request Configuration Purpose Requests the application number of the robot Format RO CONFIG Response application number Arguments application number The Brooks Automation customized application number Description Application Number f42 s41 m40 40 73 Y v 9 On Pu gt YO oss 9 8 8 st S5 e d E Qo t Y R SE o RR e Example Command RQ CONFIG Response f42 s41 m40 40 73 See Also Configure Robot Application on page 8 25 Brooks Automation 8 74 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request DIO Output Request DIO Output Purpose Requests the current mode set for the Discrete I O DIO output monitoring function Format RO DIO OUTPUT Response DIO OUTPUT YIN Arguments YES DIO Output has been enabled NO DIO Output has been disabled Description This function requests the current mode set for the enabling or disabling of the Dis crete I O Output while the serial I O is in c
332. ent is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 1 Power up the robot and establish serial communications 2 Enter the following command to begin collecting values Brooks Automation Revision 2 2 9 69 Maintenance and Repair MagnaTran 7 1 User s Manual Motor Electrical Phase Calibration MN 003 1600 00 9 70 FIND PHASE ALL The Z drive will move to the home position then up 10mm and begin pulsing When the Z drive is complete the Z brake will click on Then the T1 T2 shafts will start rotating first in the clockwise direction CW in order to reference each other then in the CCW direction Both shafts should move together and at the same speed and for approximately one full revolution It is also possible to use the FIND PHASE T or FIND PHASE Z to find the indi vidual axis phase values NOTE To stop the robot from continuing through the stepping portions of the FIND PHASE enter lt CTRL gt lt C gt at the user keyboard Request the values by entering the following command RQ SYNC PHASE ALL An example of the response SYNC PHASE Jo aes 0 280613 T2 0 184195 Zipi 0 846788 Record the values Repeat steps 2 4 three or more times Verify that the each of the values are within 0 001 units for T1 or T2 and 0 002 units for Z of each other to demonstrate repeatability Calculate the average of all readings Inp
333. ently extended in station 5 slot 2 and in the down position The robot will retract the arm rotate to station 1 extend the arm raise the arm pick ing up the wafer retract the arm rotate to station 6 extend the arm lower the arm placing the wafer and retract the arm XFER 1 6 Brooks Automation 8 176 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Transfer with an Offset Transfer with an Offset Purpose Transfers a wafer from one specified station to another specified station with an off set Format XFER ARM arm station a station b STRT NRIR1lIR2 ENRT NRIR1 R2 PKRO r offset PKTO t offset PLRO r offset PLTO t offset Z UP DN SLOT num Arguments ARM arm The arm A or B which will perform the transfer The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional station a Station number for pick operation station b Station number for place operation STRT Start retract location NR No retract R1 Normal retract R2 Second retract location default R1 ENRT End retract location NR No retract R1 Normal retract R2 Second retract location default R1 PKRO r offset Pick radial offset specifies the positive or negative offset from the extend retract location for that station PLRO r offset Place radial offset specifies the positive or negative offset from the extend retra
334. ep 1 by issuing the following commands STORE STN station ARM A ALL STORE STN station ARM A OPTION SAFETY STORE STN station ARM A OPTION PUSH 4 If the robot has dual arms then issue the following commands for arm B Brooks Automation Revision 2 2 9 79 Maintenance and Repair MagnaTran 7 1 User s Manual Uploading and Downloading Station Values MN 003 1600 00 STORE STN station ARM B ALL STORE STN station ARM A OPTION SAFETY STORE STN station ARM A OPTION PUSH 5 Repeat Step 1 through Step 4 for all the robot stations taught in the cluster tool Brooks Automation 9 80 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Control Display Module Resetting Control Display Module Resetting Control Display Modules may occasionally experience problems with their internal memory These problems are typically due to the CDM s factory configured parame ters in memory becoming corrupt CDM s which have had factory configured param eters corrupted may not operate at all may display random characters or may be missing characters on the screen Any CDM that displays these symptoms may be easily reset Resetting the CDM s internal memory is a two step process First all existing and possibly corrupted parameters must be cleared and then the Brooks factory settings must be reloaded Cleaning the Memory 1 With the CDM connected turn on power to the robot 2 Disconnect th
335. equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off power and disconnect the power and communications connections to the robot Z N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 2 Remove the protective covers as shown in Figure 12 2 N CAUTION Observe proper ESD precautions when handling any electronic device 3 Remove the Lower Cover Mount Assembly Brooks Automation 9 56 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Fuse Replacement Loosen the lower captive screw of the I O board Loosen the three upper cap tive screws of the Lower Cover Mount Assembly See Figure 12 4 Gently allow the Lower Cover Mount Assembly to drop down Visually inspect each of the fuses located on the Theta driver board Reference the table below for the board designations of the fuses Replace any blown fuses Reference the table below for the fuse amperage and Brooks part number NOTE If a fuse cannot be identified as operational or blown by visual inspection red 9 10 LED s are located on the theta driver board that illuminate only when their respec tive fuses are operational Reference the table below for the locations of the red LED s If necessary reconne
336. er Handling Robot Overview End Effector Forearm Upper Arm Wrist Elbow Shoulder q ARMA ARM B N ge T LD D k j Figure 6 3 Magnalran 7 Leapfrog Arm Brooks Automation 6 7 Revision 2 2 Operation MagnaTran 7 1 User s Manual MagnaTran 7 1 Application Number MN 003 1600 00 MagnaTran 7 1 Application Number Whether arms are single ended BiSymmetrik or Leapfrog geometries vary considerably in length weight and location of the wafer To ensure Time Optimal Trajectories work properly Brooks Automation assigns an APPLICATION NUMBER to each robot The Application Number also maps radial displacement in micro limits Record the part number of the arm set supplied and the Application Number on the QR document supplied with the robot in Appendix E User Setting Tables Should robot memory be lost these numbers will be required to return to normal operation Brooks Automation 6 8 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Theory of Operation Theory of Operation The MagnaTran 7 Robot provides control for either a single arm or dual semi inde pendent arms through a single concentric shoulder shaft mechanism The shoulder shaft mechanism provides the drive to the left and right arm mechanisms on both
337. er ckercrR rh eh RR ERE Er nbn 8 92 eques Posion SIS aves dod Or um Eai a DEREN RAOEOC RR ada 8 94 Request Position AIC aa dad oca DRG bad CA Re COACH RUE d 8 96 Request Radial Moton Sense ident Va FERRAEPECHIEE REF FERE b ddi 8 98 Request RerexeneQ a osaasostad a4 EARAAqXPe ARE RAXRATERVRERERAT PAK 8 100 Request Beuact a ValuB 4 oscsteckohwa bay e a qERE TEE T A ERCNIQEA V ERE T 8 101 Request SOVIIOD qe dab Vg d Fiet ai PIERDE T Ld PI d vdd pa ciu 8 102 Request Robot Application 24i et E RIO RREHORE ER REA 8 103 Iequest SIABOIT 164 4 2605943 4 e do Leo dbee doe Petar obe 8 104 Request Station Option cioe ker RE RA RRERERLTRRARA d DRE AHEA S 8 106 Bequest Stalon SENSO essasi 469440446 CHEER Rh REEL EEE REE 8 108 Bequest Sync Th Esseri ntr ien eTe 4qEGEAR VEA FE E JbxobKReEd EAE 8 110 Request SYNE FOO coa dues ewe lee ER REA QUPRECNqEQI HEP TE Dead TQ QE E 8 111 Request VerSJOll siad exi v eap ER RH EHETRRERERERERARQREFAERRRERRPRS 8 112 Request Warning CDM St t S Liess rob RPRCREGERRER RR ERI E en 8 113 Request T1 DE oii vi Ed vro Obl dd Cav bae EO ua qid Lad uad gabe ig 8 114 Request WOIRSDEOE 1152s o a datb P SAT ERA ERR RQUE E Id ATE PIqE Ea 8 115 Request Workspace AutoCreale csoc crs cesse orbe rer n eden 8 116 Request Workspace Mode i22 aatedas ve ceeds XX ARResdddd das saa 8 117 iol 8 118 Der Ue MEM T eren 8 119 cas gn ee ee er eee ee ee ree eer ere eer ee 8 120 Sel C CoC Ais a 044 ved ud etr dI se hereon kW eres eee
338. er sensors are validated during the T axis part of the motion to a station The sensor should be placed as close as possible to the outer edge of the wafer while in the retract position and in the same T coordinates as the station If the sensor has to be off set from the station T coordinates then the offset must be specified in the station setup Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation Wafer Presence Sensors Radial Motion R MT Commands The following commands are used to create define and verify the Radial Motion Sen sors Check Load on page 8 23 Store Station Sensor on page 8 169 Request Station Sensor on page 8 108 Set Radial Motion Sense on page 8 138 Store Radial Motion Sense on page 8 163 Request Radial Motion Sense on page 8 98 Go To on page 8 33 Set Interlock on page 8 128 Request Interlock on page 8 80 The CHECK LOAD operation checks the status of any mapped Extend Enable Poppet Valve or Slot Valve Sensor at each station where it finds a Radial Motion Sensor If any valve sensors are blocked that station will be considered Not Available for Check Load and will cycle to the next station The CHECK LOAD command may be used to set the robot arm state to the correct load sta tus on power up or after a failure The following commands use R_MT sensing Pick on page 8 54 Place on page 8 59 Go To on page 8 33 Transfer on page 8 176 R_MT wafer sensing is
339. er turn off interlock checking completely ALL or allows the user to turn off checking of the interlocks individually For example if the VCE s are turn off then the extend enable signal will not be present so the EX extend enable sensor interlock may be disabled for CHECK LOAD to avoid errors If the robot cannot find any sta tions with a wafer sensor mapped the command will fail and report an error stating that no station with R MT sensors could be found Otherwise if no R_MT wafer sen sor equipped stations succeeded due to sensor errors the reason the last station was rejected is reported If no arm was specified or the search for arm A is successful for a dual pan arm set arm B s stations are checked using the same procedure If both arms successfully find stations which have valid sensor readings then the robot will carry out the CHECK LOAD command If an error is received by the user after trying a CHECK LOAD command and the error is addressing a problem with the slot valve poppet or extend enable sensors it is important to remember that the error is only relevant to the last station that had a wafer sensor mapped See Also Wafer Presence Sensors Radial Motion on page 6 38 Examples The following command updates the load status CHECK LOAD Examples 8 24 The following command checks the load at station 1 and ignores interlocks CHECK LOAD 1 INTLCK ALL DIS The following command checks the load at the fi
340. eration MN 003 1600 00 Theory of Operation Motion Control The design and operation of the MagnaTran 7 robot uses a minimum of moving parts to ensure minimal maintenance requirements The T1 and T2 drives are concentri cally mounted to the drive shafts in the vacuum environment eliminating the need for rotary seals Since there are no mechanical or electrical connections to the T1 and T2 drive shafts unlimited rotation of the arms is allowed The optional Z Axis Drive is coupled to the T1 T2 drive assembly The MagnaTran 7 Robot uses three digitally encoded servo systems T1 Axis Encoder T2 Axis Encoder and Z Axis Encoder which are controlled by the DSP microproces sor on the Personality PCB to govern the motion of the robot s arm s The servo sys tems for the T1 and T2 drives utilize directly mounted disk encoders in each drive unit Position monitoring circuits in all three servo loops signal an out of tolerance motion profile disabling the servos and setting a latched fault condition This error is usually caused by physical obstruction of the arm motion of greater than 4 and will stop the servos and report a hard tracking error Small bumps to the robot will cause it to settle back into position without excessive vibration or overshoot The MagnaTran 7 robot uses the Brooks patented Time Optimal Trajectory motion control algorithms to determine all robot motion The speed of the robot is determined by wafer tracking
341. erface A full operational description on operating the CDM can be found in Control Display Mod ule CDM Operation on page 6 63 By A wows There are no safety interlocks available when using the CDM to con trol movement of the robot The user is directly responsible for ensur ing that conditions are correct for safe operation of the robot Visually inspect for obstructions and do not allow access to persons in the arm motion areas zs CAUTION The CDM is a delicate electronic instrument Mishandling of the CDM may damage it or cause it to malfunction NOTE While the CDM is in control of the robot the Cluster Tool Controller is able to request status information from the robot through the use of the RO commands However it is not able to control the robot until the CDM is turned off which relin Brooks Automation Revision 2 2 4 17 Subsystems MagnaTran 7 1 User s Manual Control Display Module MN 003 1600 00 quishes control of the robot The CDM will display any error messages generated by the robot The CDM provides access to a multi level functional command structure as shown in the simplified command flow chart in Figure 4 7 The screen will display menus in descending order that prompt the user for choices and data entries The choice and data entry menus list and identify the options available and prompt the user for a choice from among the options offered For example Y N indicates that the user should choose
342. erial commands or CDM See Set Station on page 8 140 for serial and Setting Up Stations on page 6 81 for CDM Store the station parameters Assign a Radial Motion Station Sensor for each arm to each station See Set Station Sensor on page 8 147 for serial and SET WAFER SENSOR on page 6 75 for the CDM Store the R MT sensor parameters Once all station sensors have been defined verify that each is functioning cor rectly This can be done by toggling each sensor and requesting its state RQ STNSENSOR station ARM arm STATE Perform a CHECK LOAD to initialize the arm load status in memory See Check Load on page 8 23 Brooks Automation Revision 2 2 6 41 Operation MagnaTran 7 1 User s Manual Off Center PICK and PLACE Feature MN 003 1600 00 Off Center PICK and PLACE Feature 6 42 The Time Optimal Path Off Center PICK and PLACE OCP feature allows the robot to execute compound move trajectories which are not limited to pure radial moves Eliminates Traverser requirement Simultaneous rotation and extension combination of straight lines and curves works with all Brooks MagnaTran robots and arm sets Allows PICK and PLACE to cassettes and pods off the radial axis without interference Utilizes Time Optimal Path trajectories Utilizes BAI command structures Minimizes unnecessary acceleration and deceleration experienced with sequential moves Computational efficient implementation using pre d
343. erted and at the end of 2 sec onds power is removed from the robot 24V IN 50mS T24V OUT AC FAII ROBOT RUNNING OFF Figure 6 13 PowerPak Timing Diagram Brooks Automation 6 84 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation PowerPak Power Fault Manager The battery voltage is 24V nominal Battery life is 2 5 years The PowerPak operates as follows Loss of power to the PowerPak i e power supply failure controlled shut down of the robot is executed and AC_FAIL signal is sent to the host Power removed after 2 seconds Normal power up sequence of the robot when power is reapplied No motion of the robot will occur until the robot is issued the proper commands Battery voltage is less than 23 5VDC controlled shutdown of the robot is exe cuted and BATT LO signal is sent to the host Normal power up sequence of the robot when power is reapplied No motion of the robot will occur until the robot is issued the proper commands Controls and Indicators All controls and indicators are located on the user interface panel as shown in Figure 6 14 Table 6 33 PowerPak Controls and Indicators Control Indicator Function Power Switch Circuit Breaker LED Switches power on off and indicates power on Batt Lo Lights when battery power is less than 23 5VDC Z N WARNING Energy Source Do not remove the protective c
344. es 12 14 Radial Axis boand Removals sesascedvtezdg rer i30bXaddecd xad Edad 12 16 Lero AU ac ren E oaa vacet a ab edu bo vb Ia co da rd oai dba 12 18 Brooks Automation Revision 2 2 12 1 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Illustrated Parts Catalog Figure 12 1 Battery Pack Installation Brooks Automation 12 2 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawings Illustrated Parts Catalog Table 12 1 Battery Pack Installation Parts List dg Part Number Description Oty 1 002 4913 02 MagnaTran 7 1 Standard Drive 1 2 002 4037 02 Power Fault Manager Module Assembly 1 Brooks Automation Revision 2 2 12 3 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Rear View 4 4 7 D AA N TAI T 0 PF 4 BB E Jj Front View Figure 12 2 Protective Cover Removal Brooks Automation 12 4 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawings Illustrated Parts Catalog Table 12 2 Protective Cover Parts List dg Part Number Description Oty 1 002 2312 03 REAR COVER 1 2 002 2313 03 FRONT COVER 1 Brooks
345. es 8 61 eens one a ie eden ha een DOTT OL TO LO OTT OTT 8 64 PGs sebo Et bade beet dtee sted arbor tedind eee p aeesadiaade 8 65 en oaa beeen bte ETa didit udis vibrat beara sa 8 66 Nune DD od add Vp RA ERA I EC ee ee Bere dam 8 67 Remove WOLKSPOUG is e eos da ER bobbed eae elies SERRE IA Ed Ea 8 68 Request Background 14244 d e GEROEE obe dE ECHO t 8 69 BR guest APOE i case seas OR HEIAWERS Le DEVE ER VIR ER Ld es dard 8 70 Request Communicd Iob 454244404 44 da RR AUDIRE HEAR E ERR RR 8 71 Request Configuration ous sss duberebeenh t abacendhs ede R rait edd 8 74 Request DIO Opi osaaos diss das oar Saa AXE RAesGddddad Xa EVE Eas 8 75 Reguest HISTOrY perec e back I REx UA VR RA WLENEEER RAE E OU EEESE EE 8 76 Request Home Poston Z AXIS vaa erstaunt bad kr pbEPbRF RA EE kads 8 79 Reguest InIerlosk o nxsc cb e b EE bo CE Ed HERR pied 8 80 Bagues DC BOB 4 ns sod Gace PP Ha qd ERE Mop ao Ehe pie d 8 81 Request VO MID aas edam LR ra teti Ep bon Ia rr ER E Rd wun 8 82 Bequest 1 0 SING 6 4 54 duree rende E Hp AO AER RR ERES 8 84 Request Load 222vaas sau sek sad Xxad4ua dAq4 NNI D VedAeqq vae uada 8 86 Brooks Automation Revision 2 2 vil Contents MagnaTran 7 1 User s Manual MN 003 1600 00 Request Load MOS Lise idR pEERRRREEEEEFRERRQRPELE UELLE I oEOR 8 88 Request MODE erges 4480s TEC e ER WEES 4 del PERO ERE ET ERE 8 89 Request Posiion ADSODIIB iu seda asd 3 LERRA RA Cae dA FREUT ER P rar 8 90 Request Position Destination 4 cess
346. es low When signal is LOW no robot motion is permitted A warning will be generated upon robot power up only if the UPS battery is detected low MOTION IND Will be on as long as the robot arms are in motion Output will be HI or LOW 1 CAUTION The RETRACT PIN is controlled by the robot motion controller and should not be set by the user Brooks Automation Revision 2 2 6 25 Operation MagnaTran 7 1 User s Manual Operational Interlocks MN 003 1600 00 Creating the Operational Interlocks Creating the Operational Interlocks is a two step process The first step maps an assigned name to a specific pin on the discreet I O connector and defines its behavior If the interlock is related to a sensor a second step will assign the mapped I O to a specific station Related Commands Each group of command types shown in Table 6 5 has Setup Request and Store com mands related to that particular group Sensor Set Station Option Request Station Option on page 8 106 Store Station Option on page 8 167 I O State OUTPUTS Set I O State on page 8 130 All types Map on page 8 44 Remove IO on page 8 66 Request I O State on page 8 84 Request I O Map on page 8 82 Pass Through Feature An added feature of the I O is to pass information from valves etc through the robot These I O channels are mapped or assigned as discussed in this section and also have the option of changing the polarity of the output bit See Map Pass Through o
347. eteaching the robot all stations Using the red arm mounting fixture place the arms on the T1 T2 shafts posi tioning the 4 locating pins of the shafts into the arm set Slightly loosen the black knobs of the mounting fixture and seat onto shafts The arm set must be fully seated Secure the arms to the T2 shaft inner shaft using one 5mm SHCS and lock washer Secure the arms to the T1 shaft outer shaft using two 5mm SHCS and lockwashers Torque all three screws to 75 88 inch pounds Remove the red arm mounting fixture NOTE Save the mounting fixture for possible future use If the robot is returned to Brooks for service or shipped to another location the original mounting fix ture must be used Also keep the fixture close to the robot Additional pro cedures will require the use of this fixture Set the arm state of the robot to on Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arms should be 180 apart This can be verified by observing the wrist plates relative to the center of the robot If vibration is observed or the alignment is off the radial home must be reset Follow the procedure Reset the Home Position to the User Preference on page 9 73 Brooks Automation Revision 2 2 3 41 Installation
348. etermined by the user The fol lowing information is provided as a reference for most standard applications A Sample Session The following is a sample exchange between the robot and a host controller The fol lowing sequence was copied from an actual robot session The MagnaTran 7 was con nected to a PC running a terminal emulator program All commands sent to the product are terminated with an Enter character Detailed explanations of all the commands and responses shown in the sample session can be found in Chapter 8 Command Reference Table 6 34 Sample Session Software Control Host Controller Robot Descrivti Command Response escription HOME ALL Controller instructs robot to refer ence itself to home position in all _RDY axes RQ LOAD A Controller requests wafer tracking status for arm A LOAD A ON Robot responds that arm A is cur rently assumed to have a wafer on it PLACE 1 A Controller instructs robot to place _RDY wafer at Station 1 RQ LOAD A Controller requests wafer tracking _RDY status for arm A LOAD A OFF Robot responds that arm A is cur rently assumed to have no wafer on it PICK 2 A Controller instructs robot to pick a _RDY wafer from Station 2 RQ LOAD A Controller requests wafer tracking _RDY status for arm A LOAD A ON Robot responds that arm A is cur rently assumed to have a wafer on it Brooks Automation 6 88 Revision 2 2 M
349. eturn the increased number of vari ables Customer controller software should not therefore interpret extra returned variables as errors 2 The list of error codes may be extended New error messages may be added as support for existing commands or to support new commands Customer controller software should not therefore Brooks Automation Revision 2 2 8 11 Command Reference MagnaTran 7 1 User s Manual Command and Response Structure MN 003 1600 00 interpret unknown error messages as errors NOTE Brooks Automation may implement different command structures in newer gener ations of a particular robot type Therefore commands that work with a MagnaT ran 6 VacuTran 5 MultiTran 5 may not work or may function differently with a MagnaTran 7 Brooks Automation 8 12 Revision 2 2 Command Reference Command Quick Reference Tables MagnaTran 7 1 User s Manual MN 003 1600 00 Command Quick Reference Tables The following tables list the Standard Commands available for use with the MagnaT ran 7 Robot and are intended to be a quick lookup reference only For a full descrip tion of these commands including examples and details on the use and syntax of each command see the individual command descriptions that follow these tables Table 8 1 Action Commands Command Description Page GOTO Moves arm to a location in station coordi 8 33 nates GOTO offset Moves arm to a location in station coo
350. f If the terminal or terminal emulator displays no characters for all user entered text IO ECHO should be set on NOTE Request commands display the current value stored in RAM See Also SET IO ECHO STORE IO ECHO Examples The following example returns the current setting of the I O Echo option RO IO ECHO Response Monitor Mode Echo Status Y N Packet Mode IO Y N Brooks Automation Revision 2 2 8 81 Command Reference Request I O Map MagnaTran 7 1 User s Manual MN 003 1600 00 Request I O Map Purpose Returns the current map of all named I O Interlocks Format RO IO MAP ALL name Response IO MAP name type characteristic io name io num Arguments ALL name type characteristic io_name io_num Specifies all defined I O points The I O name assigned to the specified I O 20 characters maxi mum The type of the I O Specifies the I O characteristic as defined by the type argument I O Type To allow flexibility characteristics may be active HI or active LOW depending on the hardware functionality Refer to Table 6 5 Specifies the physical name of the I O device assigned The I O devices available to the robot are DIGITAL_IN DIGITAL_OUT or MCC_IN Specifies the I O channels assigned This variable is an eight digit hex number of the form 0x12345678 representing the spe cific I O channel s NOTE At least one argument must be specified Description Thi
351. fer Transfer Menu 6 72 Setup Setup key selects the Setup Menu 6 73 Info Info key selects the Information Menu 6 77 Self Test Self Test key selects the Self Test Menu 6 79 Table 6 31 Axis Parameter Selection Keys Key Description Page R R axis key specifies the R axis for data entry or query 6 78 T T axis key specifies the T axis for data entry or query 6 78 Z BTO Z axis key specifies the Z axis for data entry or query 6 78 this key is also used to specify BTO for data entry or query Lower Lower key is used to specify the Lower value for a spe 6 79 cific station for data entry or query Slot Slot key is used to specify the Slot number for a specific 6 79 station for data entry or query Pitch Pitch key is used to specify the Pitch between slots for a 6 79 specific station for data entry or query All All key is used to specify ALL values for data entry or 6 79 query Table 6 32 Data Entry Axis Control Keys Key Description Page 1 Enters 1 6 80 2 Down Enters 2 also used to Jog Down 6 80 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Operation Control Display Module CDM Operation Table 6 32 Data Entry Axis Control Keys Key Description Page 3 No Enters 3 also used to respond No to prompts 6 80 4 Retract Enters 4 also used to Jog Retract 6 80 5 Enters 5 6 80 6 Extend Enters 6 also used to Jog Extend 6 80 21 9 Enters 7
352. figure the valve sensor at the specified station The CDM will display the list of previously configured sensors to the user for selection NOTE The sensors must be configured using the MAP command before they can be assigned using the CDM CONFIG ROBOT Enables the user to configure the robot Currently there are two choices Application not available at this time and Speed setting Speed setting allows the user to set the acceleration and speed for R T and Z for both wafer and pan This option is not available for this robot Config Robot 1 APPLICATION 2 SPEED SETTING 3 COMM SETTING 4 ARM MOUNT 5 ARM STATE 7 SET SERVOS OFF ENABLE DIO The MagnaTran 7 robot may be controlled and monitored using discrete I O lines instead of using the serial communications link This com mand disables all serial control functions and enables Discrete I O con trol Brooks Automation 6 76 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation INFO A programmed 4 second delay follows the DIO START command while internal functions ensure proper power up Outputs are driven low for this period Z AXIS STATE This command is not supported Allows the user to request operating and status information about both the CDM and the robot There are three options available CDM SPEED STA TIONS and LOCATION When Info is selected the CDM will request se
353. for Station 3 can be entered directly Finally pressing Quit will end the station setting session and return to the Main Menu At this point the operator should issue a Move Station command to the station just set to check that the values Learned are correct The operator should then use Setup Station Assign to make any required minor adjustments and again check the position using a Move Station command Brooks Automation Revision 2 2 6 83 Operation MagnaTran 7 1 User s Manual PowerPak Power Fault Manager MN 003 1600 00 PowerPak Power Fault Manager The Brooks Automation MagnaTran 7 PowerPak provides power allowing a con trolled shutdown of the robot during loss of 24V power The PowerPak does not require any hardware to replace The PowerPak mounts directly to the MagnaTran 7 drive while access to the robot I O panel remains Operation Upon loss of primary power the PowerPak will supply a maximum of 20A for 2 sec onds and signal the robot to start a controlled shutdown After two seconds the Pow erPak removes battery power from the robot The following timing sequence is initiated in these instances When 24VDC power is less than 22VDC the Power Pack is switched on When 24VDC power is less than 22VDC and lasts more that 50mS the Power Pack is switched on and AC FAIL UPS is asserted When 24VDC power is less than 22VDC and lasts more that 2 seconds the Power Pack is switched on AC_FAIL_UPS is ass
354. for the specified sensor When a SET CPTR ON command is issued the Servo Position Table is cleared to accept new data A maximum of ten entries may be made into the Servo Position Table Attempting to store additional data will cause that data to be lost All servo positions are recorded in microns or millidegrees The state the sen sor transitions to is recorded after the servo positions NOTE Only one sensor may be enabled at a time Issuing multiple SET CPTR commands will result in only the last sensor being active for capture Examples SET CPTR 4 ON SET CPTR 7 OFF NOTE The capture trigger may be enabled if any servo is unreferenced however if any servos become unreferenced before or during a capture operation the capture trig ger will be disabled Brooks Automation 8 120 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Communication Set Communication Purpose This command is used to set the serial communications and command execution modes Format SET COMM ALL M B mode FLOW flow LF linefeed ECHO echo CHECKSUM checksum ERRLVL level DREP data_rep Arguments mode Specifies the serial I O communications mode MON Monitor mode PKT Packet mode _RDY flow Specifies the command execution type SEQ Sequential mode BKG Background mode BKG Background Plus mode linefeed Specifies the linefeed state ON Linefeed enabled OFF Linefeed disabled ECHO Specifies the E
355. for this sensor A Arm A B Arm B Arm A is the default type The sensor s usage during PICK and PLACE commands NONE sensor not referenced EX Extend sensor referenced during PLACE RE Retract sensor referenced during PICK R MT Referenced motion sensor referenced when robot arm is in motion requires R and T coordinates state The sensor s active state HI signal present when wafer present LO signal absent when wafer present Sensor The sensor I O bit number in which the sensor is connected r coord The sensor s R coordinate in the chamber determined by the radial loca tion in microns For R MT sensors only t coord The sensor s T coordinate in the chamber determined by the offset from the station s T value location in microns For R MT sensors only Brooks Automation Revision 2 2 8 147 Command Reference MagnaTran 7 1 User s Manual Set Station Sensor MN 003 1600 00 Description The SET STNSENSOR command is used to assign a sensor to a specific robot station and configure the sensor for operation The sensor must be fully configured if it will be used for wafer detection or for triggering servo position data collection The sensor number corresponds to I O input For example number 1 corresponds to I O input 1 sensor number 2 corresponds to I O input 2 etc The referenced Radial Motion sensor R MT requires POS R coordinates r coord and POS T coordinates t coord If sensor type is R MT and the
356. from the robot Background Mode In Background mode for certain commands the MagnaTran 7 will return a READY string immediately after it has received the command and typically before the command has been completed This command task is then placed in the background and other foreground commands may be executed sequentially while the background command is in progress Only certain commands have been assigned to the background and fore ground categories All Action commands can be placed in the background all Request commands and the HALT command can be executed in the fore ground while a command is executing in the background lt A typical sequence of communications in Background Mode appears below Host sends an Action motion command to the robot The robot sends a READY signal immediately while beginning the requested action Host requests information Robot returns information Robot completes background action Host requests operational status Robot sends message that the Action operation has been completed including an error code if an error occurred during the operation NOTE Background tasks do not stack If the Host Controller sends a second back ground command before the first background command is complete the robot will send an error message While a command is in background foreground commands are handled in a normal sequential manner To determine when the background
357. ful mate rial hand off has been accomplished NOTE The PLACE command is meant to be used with robots that have the Z Axis option installed If using a 2 axis robot this command may also be used for PICK and PLACE commands but no Z Axis motion will occur No error will be issued During a PLACE operation the MagnaTran 7 robot executes the following sequence of moves Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load Simultaneously moves upward and rotates to the Up position at the Station and Slot number specified using a speed and acceleration profile appropriate for the currently defined load Extends the arm using a speed and acceleration profile appropriate for the cur rently defined load to the R position for the station minus the Safety dis tance See Set Station Option on page 8 142 for setting the safety option Moves to the Down position using a speed and acceleration profile appropriate for the currently defined load depositing the wafer Extends the arm using with wafer speed and acceleration profile to the R position for the station plus the Push distance See Set Station Option on page 8 142 for setting the push option Defines the arm executing the PLACE as being unloaded Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load For a discussion of speed and acceleration profiles
358. function but the PowerPak is not properly connected to the robot Check PowerPak cables for proper connection and continuity Verify that a robot emergency off EMO button has been activated and deactivate as appropriate Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Warning CDM has been turned on Warning CDM has been turned off UPS Battery is low The UPS_BATTERY_SEN interlock for the robot has been activated Refer to PowerPak Power Fault Manager on page 6 84 for correct operation The Pow erPak accessory is programmed using the UPS_BATTERY_SEN interlock function and the internal PowerPak battery voltage is less than 23 5 volts Recharge or replace PowerPak as appropriate Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Unable to create command dispatcher Unexpected mail received by dispatcher Unknown command Bad parameter passed to dispatcher Command processing has finished Robot Wafer Sensor Errors 8 182 Error 700 Error 701 Error 705 Wafer detected No Wafer detected Wafer missing Ensure wafer is present in VCE or process module prior to issuing PICK PLACE GOTO XFER command Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Error Code Reference Error 706 Error 710 Error 711 Error 715 Error 721 Error 722 Err
359. g a speed and acceleration profile appropriate for the cur rently defined load Simultaneously moves downward and rotates to the Down position at the Sta tion and Slot number specified using a speed and acceleration profile appropri ate for the currently defined load Extends the arm using a speed and acceleration profile appropriate for the cur rently defined load to the R position for the station Moves to the Up position using a speed and acceleration profile appropriate for the currently defined load picking up a wafer Defines the arm executing the PICK as being loaded Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load For a discussion of speed and acceleration profiles for the MagnaTran 7 robot see Motion Control on page 6 13 NOTE The operator can force a uniform high speed throughout the PICK operation by first invoking the SET HISPD command The set speed remains in effect only until the completion of the action command following the set speed command Brooks Automation Revision 2 2 8 57 Command Reference MagnaTran 7 1 User s Manual Pick with an Offset MN 003 1600 00 N CAUTION Setting the HISPD command prior to a PICK command will cause all motion during the PICK command to be to be executed at high speed which may cause wafers to slip or break See Also GOTO MOVE PLACE SET RETRACT2 Brooks Automation 8 58 Revision 2 2 MagnaTran
360. g command are micrometers 25 mm 25000 units 4 Turn the servos off by issuing the following command SET SERVOS OFF 5 Place a thin protective cloth between the robot armset and the transfer cham ber to prevent scratching them in Step 6 6 Turn the Z brake off by issuing the following command ZBRAKE OFF N WARNING The robot will free fall in the Z direction Ensure that personnel and physical obstructions are clear of the robot s armset and internal theta motor housing The robot should move smoothly downward in the Z direction due to gravity Allow the robot to fall freely in the Z direction until it stops on its own Brooks Automation Revision 2 2 10 27 Troubleshooting MagnaTran 7 1 User s Manual Z Brake Binding Test MN 003 1600 00 7 After the robot has finished free falling in the Z direction measure the distance between the bottom of the robot armset and the top of the transfer chamber Record the measurement value 8 If the distance measured is less than 4 mm then the Z brake is not binding If the distance is greater than 4 mm call Brooks Technical Support 9 Reference the robot by issuing the command HOME ALL Procedure is complete Brooks Automation 10 28 Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Determine if the Z Axis is Configured Properly Via Software Determine if the Z Axis is Configured Properly Via Software TOOLS Laptop computer with Procomm or
361. g flexure around the center ring of the Z encoder housing Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Z Encoder Replacement 11 12 13 14 15 16 17 18 Secure the new Z encoder to the mounting flange using 3 M3 x 8mm SHCS M3 lock washers and M3 flat washers Ensure Z encoder wires are facing the Z driver PCB Ensure that the screw holes qty 2 located on the Z encoder collar are positioned at the flats of the Z leadscrew shaft Secure the Z encoder collar to the Z leadscrew shaft by installing and tighten ing 4 40 x 3 16 SHCS qty 2 with 1 drop of removable strength Loctite 242 Connect the Z encoder cable to the personality PCB J4 Connect the ground lead to the robot chassis Reinstall the Theta driver PCB using 4 M3 SHCS M3 lock washers and M3 flat washers Reconnect the following cables fan J1 I O power J2 PWR T1 motion P1 T2 motion P2 Z power P4 Reinstall the robot body covers Reconnect the robot power cable serial communication cable CDM cable and dio cable as necessary Power up robot The Sync Phase of the Z drive must be re calibrated Follow the procedure Motor Electrical Phase Calibration on page 9 69 Brooks Automation Revision 2 2 9 47 Maintenance and Repair MagnaTran 7 1 User s Manual I O Board Replacement MN 003 1600 00 I O Board Replacement NOTE It is not necessary to remove the
362. g the set screws If the dip of the end effector is high lower it by backing off the set screws If the twist is not level loosen or tighten the outside set screws and use the middle screw as a pivot point If necessary loosen the 4 end effector mounting screws before making the adjustment Be sure to tighten the mounting screws after making any adjustments BOTTOM VIEW shown in Figure 7 2 Twist Adjustment 1 Loosen the twist securing screws 2 Back out the twist adjusting screws until the end effector mount ing plate bottoms out against the wrist plate 3 Tighten the twist securing screws until lock washers make con tact but do not compress 4 Begin leveling by tightening the twist adjustment screw on the side of the end effector that needs to be raised If one side is raised too much do not loosen the twist adjustment screw To compensate tighten the opposite twist adjustment screw 5 Tighten the twist securing screws completely 6 Check adjustment with gauge and adjust if necessary Dip Adjustment Brooks Automation Revision 2 2 7 11 Alignment and Calibration MagnaTran 7 1 User s Manual Adjusting the Robot s End Effector MN 003 1600 00 1 Loosen the dip securing screw 2 To raise the dip of the end effector tighten the dip adjustment set screw To lower the dip of the end effector loosen the dip adjust ment set screw 3 Tighten the dip securing screw and torque to 20 23 in lbs 4 Check adjustment wit
363. gs Illustrated Parts Catalog Table 12 8 Radial Axis Board Parts List dg Part Number Description Oty 1 001 1957 03 Radial Axis HOME Sensor Board 1 2 803 5008 00 SCREW SHCS M3 0 X 8mm LG SST 4 3 803 0000 10 WASHER M3 SPLIT LOCK ST 4 4 803 0000 00 WASHER M3 FLAT SST 4 5 002 1799 01 FLAG Z HOME 1 Brooks Automation Revision 2 2 12 17 Attached Drawings MagnaTran 7 1 User s Manual List of Attachments MN 003 1600 00 List of Attachments Wiring Diagrams WD 003 1600 00 Wiring Diagram Mag 7 11 SD 002 3756 01 High Side I O Board SD 002 3758 01 Low Side I O Board SD 002 7394 01 Marathon Express I O Board End effectors and arms are specialized Call Brooks Automation Customer Support for drawings and part numbers If this robot was purchased as part of a Brooks Automation Marathon or Marathon Express see system User s Manual for cus tomized robot drawings and parts lists Brooks Automation 12 18 Revision 2 2 4
364. h that station may be specified Sensors may be specified at the extend and retract posi tions and may be specified as being either active high or active low The user sets station parameters using the Setup function There are six setup func tions available ASSIGN LOCATION LEARN R T BTO LEARN LOWER SET REWAF SEN SET EXWAF SEN SET SLOT VLV SEN Once the arm and station have been specified the CDM will request selection of the parameters to be set up with the following message SETUP STN _ ARM 1 ASSIGN LOCATION 2 LEARN R T BTO 3 LEARN LOWER gt 4 SET WAFER SENSOR gt 5 SET SLOT VLV SEN 6 ARM RETRACT SEN gt 7 ARM EXTEND ENABLE 8 SET VLV SEN gt NOTE In the preceding display presented on the CDM the _ indicates that the CDM will display the selected station and arm and the gt indicates that pressing the lt CR gt key will cause the next set of menu selections to be dis played Using Assign mode If the actual coordinate values of the station parameters are known the opera tor can use the Assign option to enter those values directly The operator can enter and automatically save or change one or more of the variables presented by the CDM on the following display SET UPSTN_ ARM _ Brooks Automation Revision 2 2 6 81 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 S zx 2 NOE gt 0 SAFE 1 PUSH NOTE I
365. h gauge and adjust if necessary 8 Repeat the above procedure for the other end effector on a BiSymmetrik Arm set or a Leapfrog Arm set NOTE The height of end effector B may be different than A This can be compen sated by a Z adjustment in the station settings of the robot at each station It is important to follow leveling procedures as depicted in arm A to ensure that both end effectors are co planer Brooks Automation 7 12 Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Setting the Robot to the Wafer Transport Plane Setting the Robot to the Wafer Transport Plane A robot controller parameter called the Base Transfer Offset BTO determines the height of the robot s Wafer Transport Plane WTP for each station The BTO is the vertical distance from the robot s home position to its UP or wafer transport position NOTE This procedure must be performed during initial setup and at any time that the robot s arms or end effector s are damaged removed and replaced or changed Required Tools and Test Equipment A 6 in steel ruler graduated in millimeters and hundredth inches The robot s Control Display Module CDM Expendable wafer N WARNING Breaking wafers may produce flying shards of glass When using wafers in a set up or test procedure protective eye wear should be worn at all times to guard against possible eye injuries Adjustment Calibration Strategy This procedure uses t
366. have a load on the specified end effector UNKNOWN Arm cannot determine of a load is present Description The UNKNOWN status is only available if the LOAD MODE has been set to TRI When the active status is UNKNOWN the robot will move at with wafer slow speed When LOAD MODE is set to TRI at power up the robot arm loads are set to UNKNOWN The robot will continue to assume the load is UNKNOWN until either a PICK PLACE CHECK LOAD or SET LOAD ON OFF command is executed This command is used to determine the current load status of the robot s arm s Note that at power up the robot s arm s are assumed to be loaded The robot will con tinue to assume the arm s are loaded until either a PLACE or a SET LOAD OFF com mand is executed NOTE Request commands display the current value stored in RAM See Also SET LOAD Brooks Automation 8 86 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Load Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot responds that it currently assumes that a wafer is on arm A RQ LOAD A LOAD A ON RQ LOAD ARM A LOAD A ON Brooks Automation Revision 2 2 8 87 Command Reference MagnaTran 7 1 User s Manual Request Load Mode MN 003 1600 00 Request Load Mode Purpose Requests the load mode Format RO LOAD MODE Response type Argument type Requests the load mode type
367. he robot should never be operated without the covers Screw locations 4 places i I Wt WH i i Figure 4 1 Protective Covers Brooks Automation Revision 2 2 4 3 Subsystems MagnaTran 7 1 User s Manual Mechanical System MN 003 1600 00 Frame Assembly The frame assembly supports the Z axis carriage and linear slides which attach to the side of the T1 T2 drive assembly allowing for movement in the Z axis The frame assembly also provides the mounting support for the fan the Z drive motor housing and the electronics PCBs located in the lower section on each side and under the robot The robot s Mounting Flange serves as the top of the robot s frame and cover and provides the seal between the robot and the transfer chamber The bottom surface of the Mounting Flange also provides the seal surface for the bellows Brooks Automation 4 4 Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Mechanical System T1 T2 Drive Assembly The T1 T2 drive assembly is located at the top of the robot s body directly below the bellows This assembly consists of two main drive units Each unit consists of three elements the drive motor the drive shafts and the rotary position encoder The drive motor is a direct drive motor with an external drive shaft extending into the vacuum chamber without the need for rotary seals The T1 drive shaft is hollow and extends directly into the vac
368. he Disk on Chip of the PC 104 Card has failed Was Issue Resolved NO The DC DC Converter of the Theta Driver PCB has failed YES Vv ee gt DONE k YES YES Was Issue Resolved NO Figure 10 2 Power Troubleshooting gt CALL BROOKS TECHNICAL SUPPORT YES Brooks Automation Revision 2 2 10 7 Troubleshooting MagnaTran 7 1 User s Manual Radial Motion Related Issues MN 003 1600 00 Radial Motion Related Issues Symptom Robot is able to move in the radial direction but any of the following armset motion characteristics are observed Armset has jerky motion Armset oscillates Arm set overshoots taught position Armset sways from side to side during motion Troubleshooting Process Verify robot application number is correct Check for physical obstruction Remove or adjust physical obstruction to prevent interference Verify that motion is repeatable Refer to Position Repeatability Test on page 10 33 Verify system alignment has been taught properly Refer to Chapter 7 Alignment and Calibration Verify end effector is level and not hitting or scraping any objects Refer to Chapter 7 Alignment and Calibration Verify armset mounting bolts are torqued to 75 88 in Ibs Verify armset is installed correctly Refer to Mount the Arm Set on page 3 23 Verify armset wrist band tension is adjusted properly Refer to Wrist B
369. he Home Position to the User Preference on page 9 73 Brooks Automation Revision 2 2 3 37 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 Mount the MagnaTran 6 Frogleg Arm Set 3 38 N CAUTION Do not operate the robot until all set up procedures have been com pleted as damage to the robot or arms may result The mount position of the robot is preset at the factory The purpose of the mount position is to provide the operation clearance from the bottom of the transport cham ber when installing or removing the armset By definition the robot s mount position has the radial and theta axes at the Home position coordinates and the Z axis is at a height of 10mm 10000 counts To mount the arms to the robot power connections and communications connections must be complete and verified Communication may be through the serial port with a computer or through the CDM The following procedure identifies the commands for both methods Mount Serial Communication 1 Install the arm mount fixture 2 Ensure the arm state of the robot is off Issue the following command SET ARMS OFF 3 Move the robot to the mount position Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set Issue the following command MOUNT When the robot is in the mount position the 4 locating pins of the robot shafts should be oriented as indicated in Figure 3 9
370. he MagnaTran 7 One cable carries all DC power ground and interface signals to the MagnaTran 7 The Brooks Automation Power Pak provides a safe recovery of the robot arms within two seconds after power loss The Power Pak also provides immediate removal of power to the robot after EMO actuation When the primary power is returned the robot will power up in its normal condition The Power Pak has a 2 5 year life and a built in charging circuit SO ly o A LI II m I Figure 4 6 Power Pak Sub System Power Supply The robot s power supply provides 24 VDC 10 at a current rating of approxi mately 20 amps A power converter in the robot delivers all internally required operating voltages throughout the control system The actual current drawn by the robot will vary and depends upon the specific function the robot is performing Brooks Automation Revision 2 2 4 15 Subsystems MagnaTran 7 1 User s Manual Software MN 003 1600 00 Software The software supplied with the MagnaTran 7 robot is in the form of internal control programs that reside on the PC 104 CPU board as flash memory The user interface to this software is through either the Serial Communications Port using the software commands described in Chapter 8 Command Reference or through the Control Dis play Module described in the next s
371. he arms to the T1 shaft outer shaft Using the M3 wrench fit the wrench into the 3 thruway holes and tighten the mounting hardware 7 Secure the arms to the T2 shaft inner shaft Using the M3 wrench fit the wrench into the 2 thruway holes and tighten the mounting hardware 8 Torque all five screws to 18 inch lbs 9 Remove the alignment fixture by loosening it s hardware Brooks Automation Revision 2 2 3 25 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped to another location the original fixture must be used Also keep the fixture close to the robot Additional procedures will require the use of this fixture 10 Setthe arm state of the robot to on Issue the following command SET ARMS ON 1l Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the procedure again 12 Check the alignment of the arm and the position of home by entering the fol lowing command HOME ALL If the home position is not where desired use the procedure Reset the Home Position to the
372. he extend motion the robot monitors the R MT wafer sensor to determine if a wafer is on the end effector If the robot does not detect a wafer the PLACE will be aborted and an error code will be generated If the robot detects a wafer during the extend motion the PLACE will proceed After the robot extends into the station performs the place operation and the arm is retracted the PLACE operation is completed During the retract motion the robot will mon itor the R MT sensor to determine if a wafer is not present and the PLACE operation was successful If successful the robot memory map is updated to Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Wafer Presence Sensors Radial Motion LOAD OFF If the robot detects a wafer on the retract motion an error is gen erated and the PLACE is considered a failure The XFER command is a combination of the PICK and PLACE operations Robot sensing behaves as described above for PICK and PLACE Wafer presence sensors are not active during any MOVE type commands Radial Motion Setup Procedure 1 Setup the Radial Motion Sensor R_MT sensing parameters SET R_MT SENSE LIMITS OUTER xxxxx INNER xxxxx STORE R_MT SENSE LIMITS OUTER INNER SET R MI WAFER SIZE xxxxxx STORE R MTWAFER SIZE Connect the wafer sensors for each station to the MagnaTran 7 MISC I O con nection See MISC I O Communications on page 5 9 Teach each station to the robot using s
373. he floor i e bottom surface of a module access slot as a refer ence point for determining the BTO to the WTP The WTP is typically located 374 inches 9 5mm above the slot center line Adjustment Procedure Teach the robot the appropriate Base Transfer Offset value using the CDM as follows 1 Move robot End Effector A to the appropriate module station number 2 Move the Z axis to the UP position 3 Jog the radial R axis outward until the end effector is located inside the mod ule access slot as shown in Figure 7 3 Brooks Automation Revision 2 2 7 13 Alignment and Calibration MagnaTran 7 1 User s Manual Setting the Robot to the Wafer Transport Plane MN 003 1600 00 Module Access Slot End Effector Wafer Module Chamber Figure 7 3 Positioning the End Effector in the Module 4 Set the height of the end effector above the access slot floor using a ruler or a gauge block made for the appropriate vertical height as shown in Figure 7 4 Slot Center Line wafer End Effector Figure 7 4 Positioning the End Effector to Set BTO Brooks Automation 7 14 Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Setting the Robot to the Wafer Transport Plane If a gauge block is being used place a wafer on the end effector and sight along the bottom of the wafer The bottom of the wafer should almost touch the top of the gaug
374. he mating ITT Bee Cannon DAME7W2SA197 connec BE tor DBM9W45A109 shell y d X D DM53744 6 contacts on the power b li cable The pin out for the power M O cable is provided in Table 5 1 l A2 O A3 O mE eee ed T ie ao lea uox pe S nue lc ug oso amp CJ 7 N P Figure 5 3 Power Connector Pin Out ee Table 5 1 Power Connector ITT Pin Assignments Pin ID Purpose Function Al no connection A2 Earth Ground Connected to Earth GND at Power Supply Internal Earth GND to robot frame chassis bolt A3 24V RET Connected to Earth GND at Power Supply and RET post on power sup ply A4 24V 20 Amps 1 no connection PowerPak defeat jumper 2 no connection 3 no connection 4 no connection 5 no connection If the robot is configured for the PowerPak but the PowerPak has been removed pins 1 2 and 5 must be jumpered together to defeat the battery interlocks Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 Serial Communication SIO1 Serial Communication SIO1 Serial communication between the robot and a Host Controller is accomplished by connecting the robot via a 3 or 4 wire serial communications cable at port SIO1 to a serial I O port on the Host Controller Serial communications allows the Host Controller to communicate with the robot using the commands detail
375. he robot s radial R rotational T and vertical Z motion servos may be recorded when the state of any specified sensor changes Once this positional data is recorded it may be reviewed at any time by issuing the appropriate software command The Multiple Sensor Interface accepts inputs from discrete external sensors providing full optical isolation of all signals and multiplexing of data for use by the robot The Multiple Sensor Interface has been designed to monitor wafer handling servo data collection and signal buffering High speed parallel I O enables direct interfacing to substrate sensors and other modules such as slot valves Real time information enables position referencing by leading and trailing edge sensing of moving components Dynamic sensing in user specified radial positions enable independent wafer sensing on Leapfrog arms Wafer presence may be referenced in macro sequences for safety Brooks Automation 6 32 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Wafer Presence Sensors Extend and Retract EXtend Sensor Location REtract Sensor Location Figure 6 9 Typical REtract and EXtend Sensor Locations Wafer PICK During a wafer PICK operation the robot will retract if required and move T and Z to the specified station The robot will then perform a Pre Extend Test Pre Extend test If the station has a sensor and
376. he robot s total move ment to each work station This workspace may be created by one of two methods the user may define the desired workspace by manually entering desired values or the workspace may be automatically around the taught work stations A workspace is defined by eleven parameters 1 Name A maximum 20 character alphanumeric name unique to the workspace pA State Specifies whether the workspace is active or inactive 3 Interlock A maximum 20 character alphanumeric name of a defined slot valve type mapped input signal 4 Arm Associates an arm to the workspace may be A B or both 5 Station Indicated which station if any is associated with the work space 6 Rmin The minimum radial axis limit for the workspace 7 Tmin The minimum theta axis limit for the workspace Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 PASIV Safety Feature Operation 8 Zmin The minimum Z axis limit for the workspace 9 Rmax The maximum radial axis limit for the workspace 10 Tmax The maximum theta axis limit for the workspace 11 Zmax The maximum Z axis limit for the workspace HOME Workspace The home workspace is a pre defined volume of space enclosing the robot around the home position Within this workspace the robot is limited to an extend length equal to its retract value for the radial axis a vertical lift height equal to the maximum Z axis height and no rota
377. he values for all the stations R T Z LOWER SLOTS PITCH Setup station 1 and record the new values for this station Setup station 1 for arm B also if applicable Compare the change in the values from the old values to the new values This change will be most likely be in the T axis and possibly in the Z axis as well Manually set the values for the other stations through the CDM with the same change found in station 1 Double check the accuracy of these changes with the other stations and adjust as necessary Store the station values Brooks Automation Revision 2 2 9 75 Maintenance and Repair MagnaTran 7 1 User s Manual Resetting Mount Position MN 003 1600 00 Resetting Mount Position The following procedure allows the mount Z position to be redefined WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 1 Enter the following command to home the Z axis HOME ALL 2 Enter the following command to move in the absolute Z direction 10mm this example distance may vary by user MOVE Z ABS 10000 3 Request the current position and verify the value RQ POS ABS ALL 4 Issue the following command FIND MOUNT The mount command will now be set to the present position of the arms all three axes R T Z 5 Request the new mount values RQ MOUNT 6 Store the values STORE MOU
378. hen present providing full isol ation veco 2 HIA NC 7 o vcc X 3J NC RESET x 4 GND RESET 2 BESET MAX701CSA 24 Inputs to Robo t IN PO IOPORT DO 38 5 Board ID set to 000 2 IOPORT D1 37 00 PAO 74 INPI IOPORT D2 36 Di BAT 3 IN P2 U31B IOPORT D3 a5 D Bag 2 N P3 TEN 9 IOPORT DO IOPORT D4 93 53 PAS 44 IN P4 18 5 Ya bz IOPORT D1 IOPORT D5 32 D DA 43 IN P5 1 15 45 va bs I OPORT D2 IOPORT D6 31 Da pag 42 IN P6 MEO TOPORT_D3 IOPORT D7 30 DB pas 41 IN P7 199 G gp pgo 20 IN P8 40 RR PBO 21 IN P9 IOPORT A0 10 22 IN P10 TRESNO IOPORT A1 g 40 PB2 54 _IN_P11 39 PBS 55 _IN_P12 1 392 RESET PB4 S IN PT3 cs PBS Bee 27 IN P14 PES 28 IN PI5 16 IN P16 PCO 47 LIN P17 PC 18 IN P18 PC2 19 IN P19 PC3 145 IN_P20 PC4 14 IN P21 bee 13 IN P22 OPORT DIO pc 44 IN P23 IOPORT A 0 7 8255PLCC General purpose I O po rt GPIO 16 1 IN PO P1 veco 2 INPI IOPORT A0 ai a MCC RD 3 IN PZ IOPORT A1 5 MCC WR 4 IN P3 B1 B9 p IOINTERUPT IN P4 X 901 C9 P X TX232 422MN 6 N P5 X O A2 A10 P RX232_422RXP IN P6 X 9Q B2 B10 P 422 TXP 8 IN P7 X 9Q c2 c10P 4227 9 IN P8 X 89 AS TXB 232 RN1 10 IN P9 X 9Q B3 B11 P e BH RXB 232 11 N P10 IOPORT D1 br 215 5 TXC 22 12 NPT IOPORT D2 n AA RXC 232 18 IN P12 IOPORT D3 C12 ind DISABLE LOGIC 14 IN P13 IOPORT D4 oe alo status to MCC IN P14 IOPORT D5 e A13 B TXA DRIVEN IOPORT D6 5 RXA DRIVEN 4 7KNET IOPORT D7 co verde R
379. her of the following two aspects of the robot 1 To utilize various robot operational interlocks 2 To operate the robot under Digital I O DIO control Reference Discrete I O Control DIO on page 6 45 for additional information per taining to both operational interlocks and DIO control The J1 connector of the Relay I O board contains the INPUT pins for the robot The pin outs functions and hexadecimal representations for the J1 connector are pre sented in the following table Brooks Automation Revision 2 2 11 27 Appendices MagnaTran 7 1 User s Manual Appendix F Relay I O Option MN 003 1600 00 Table 11 20 Relay I O Input J1 Connectors Discrete I O Inputs jt GenercFuneion Relay VO Operational Hee 1 INPUT 0 MTR_EMO 0x01 2 INPUT 1 DIR1_EXT_INHIBIT 0x02 3 INPUT 2 DIR2_EXT_INHIBIT 0x04 4 INPUT 3 DIR3_EXT_INHIBIT 0x08 5 INPUT 4 DIR4_EXT_INHIBIT 0x10 6 INPUT 5 DIR5_EXT_INHIBIT 0x20 7 INPUT 6 DIR6_EXT_INHIBIT 0x40 8 INPUT 7 DIR7_EXT_INHIBIT 0x80 9 INPUT 8 DIR8_EXT_INHIBIT 0x100 10 INPUT 9 DIR9_EXT_INHIBIT 0x200 11 INPUT 10 AC_FAIL 0x400 12 INPUT 11 0x800 13 no connection 14 24 V robot 15 24 V robot 16 24 V robot 17 24 V robot 18 24 V robot 19 24 V robot 20 24 V robot 21 24 V robot 22 24 V robot 23 24 V robot 24 24 V robot 25 no connection 11 28 Brooks
380. hese procedures are not adequate to determine the source of the problem refer to the MagnaTran 7 operational descriptions in Chapter 4 Sub systems for in depth descriptions of the various subsystems of the robot Once the failed unit or part has been identified it can be removed from the MagnaTran 7 Refer to the Repair Procedures section in this chapter for basic removal replacement proce dures A number of alternatives are available for obtaining replacement FRUs IRCs and other parts to repair the MagnaTran 7 The following replacement parts options are available for the MagnaTran 7 Facilitated Field Repair using Field Replaceable Units Depot Field Repair using Individual Component Level Parts Brooks Priority Parts Service PPS Preventive Maintenance PM Parts Brooks Factory Repair Services Finally if MagnaTran 7 downtime is not critical individual replacement parts can be ordered from Brooks Customer Support 978 262 2900 as required The difference between each of these approaches is how much time on average is required to diagnose and repair the MagnaTran 7 A description of each option fol lows Facilitated Field Repair 9 22 The Facilitated Field Repair approach offers the fastest way to fix a hardware problem in the field through the use of Field Replaceable Units FRUs The Field Replaceable Units are designed to enable a trained technician to remove and replace the FRU The FRUs are des
381. hole Once a section of the o ring is free of the groove gently remove the rest of the o ring by hand being careful not to damage or scratch the o ring or the seal area N CAUTION Use only a tool made of brass plastic or similar soft material The o ring groove is aluminum and EXTREMELY sensitive to ANY small scratches left in the surface Brooks Automation Revision 2 2 9 17 Maintenance and Repair MagnaTran 7 1 User s Manual O Ring Removal Replacement Cleaning MN 003 1600 00 Replacement Cleaning Procedure 9 18 1 Clean the o ring seal surface and the o ring groove with isopropyl alcohol refer to Robot Cleaning Procedure on page 9 13 Clean the o ring with DI water prior to installation in the system 7x CAUTION Clean the o ring by wiping down with DI water only Do not use alcohol or other solvents as they may cause the o ring to become brit tle Lightly lubricate the o ring using Krytox LVP grease there should be no lumps of grease on the o ring Install the o ring in the groove provided The o ring groove is a dove tail slot with the narrow portion of the slot at the top The o ring has to be compressed in order for it to be placed into the groove NOTE Do not allow the o ring to twist during installation The easiest method for placing the o ring in the groove is o ring 1 Insert a small portion of the O ring into the groove at opposite ends of the ring 2 Insert a s
382. hout the express written permission of Brooks Automation This information may be incorpo rated into the user s documentation however any changes made by the user to this information is the responsibility of the user Author B Varnum Brooks Automation 15 Elizabeth Drive Chelmsford MA 01824 Phone 978 262 2400 Fax 978 262 2500 P N MN 003 1600 00 June 26 1998 Revision 1 0 Initial Release per EC 13293 October 30 1998 Revision 2 0 Released per EC 13841 September 14 1999 Revision 2 1 Released per EC 15660 May 17 2001 Revision 2 2 Released per EC 19565 This manual is available in the following formats Standard Printed Cleanroom Printed and CD Printed in the U S A Brooks Automation MagnaTran 7 1 User s Manual Contents MN 003 1600 00 Contents giorno e M xv yr ra op board sig kee dhs a amp i a aaa node ae bein xvii 5 00 METTE T xxi Introduction Marna lran 7 RODO OVEIVIEW ias eaa sdb edad arbia eA A RR P RE 1 2 opecial Features isco nd tb d hb RR RE T art t he ow edem 1 3 Operation OVervileW scceecembeEk rex IDEE ER ERRARE erasa 1 4 Documentation Overview csetera eene a 1 5 Supplementary and Related Documentation 2 222220 499 abba ore d ERE ERAS 1 6 NEA OEC c iod sara itp onde eat Ewe par a bod but Rr Pd b A 1 7 Hardware lNOLI3dOota las dues RR REG bad Raa od ERE SED E RES CRETE RES 1 7 Software Notaio sisted eas ad Loe aed Pius EROR ERG Eia aub 1 8
383. ich parameters are being requested ARM arm Field size 1 the arm A or B for which parameters are being requested if unspeci fied the information will be returned for the default arm Arm A The ARM identifier is optional r location Response field size 7 The station s radial extend position in microns t location Response field size 6 The station s rotational axis position in units of 0 001 degrees bto Response field size 6 The z axis position of the Wafer Transfer Plane in microns For a station Brooks Automation 8 104 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Station with a cassette the Wafer Transfer Plane is at the center of the first slot lower Response field size 6 The distance in microns below the Transfer Plane that becomes the down position location n slots Response field size 4 The number of slots in the cassette A value of 0 or 1 indicates a non cas sette single slot type station pitch Response field size 6 The pitch in microns between slots NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description Requests for the specified variable the absolute coordinate values of the various sta tion related parameters Displays the parameters for the requested station ALL applies only to the data fields after station number which will be returned in stan dard orde
384. ide I O The high side switching board is CE Compliant Connection of external devices to the MagnaTran 7 Robot for monitoring and control through discrete I O lines is done through the 50 pin connector located on the I O panel of the robot There are 22 inputs and 20 output lines Inputs accept 24V with a nominal current draw of 2mA each Outputs are buffered and protected against output faults using intelligent high side drivers If an output fault is detected the outputs of the affected device turn off and a red indicators on the face plate will light A fault message is sent to the host controller Additionally the outputs will be disabled at power up The outputs must be enabled and thereby clear the fault I O external and internal power is discussed in MISC I O Power on page 5 14 The signals are logic levels defined as follows High Side Logical Inputs Compatible with any open collector driver refer to the Input Circuit in Figure 5 4 that can satisfy the following requirements Logic zero 0 3 to 0 6 V DC driver must sink 2 mA Open circuit Logic one 24V 20 High Side Logical Outputs High side driver using UDN2987A refer to the Output Circuit in Figure 5 4 and user connects load from output pin to ground within the following requirements Brooks Automation 5 10 Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 MISC I O Communications Logic zero Refer to specification for U
385. ieee dA 8 121 e Oh i vk xa E EEEE G Re dae orns UR Nee RM d 8 125 Ser MeN Speed as ausu ene rk d bdo pene doceo di ebd a 8 126 Set Home Postion Ze OUS nos cave as Goods Ped a ao er eas ped 8 127 Set Interlock Ru E ine trer Ee R E i Eo A 8 128 SUL BEBO o dpReP ERE eR EREERRSRRR ELES4 COS ERR RA FERRE FRAG 8 129 v Sl9r Mp 8 130 SOLON T ere re ere eee Or ee ee T REDI ER S NH Pi 8 132 DUELESS o P E E A ohn sy Eod datos dq ped at iq P eii 8 134 Set LOW Speed 66 iss needs ands aA Ted EE anGee os sabes Ed ERR UP Rs 8 135 Set CG MEC 8 136 Set MOUM 23d cashed RHEURCEHO ERR baer Shades aes tends RE AULA ORE EA 8 137 Set Radial Motion Sense iiio d exediebv n nior 9 edo oO EO ahs 8 138 ser Renac 2 Valu rsa iore aredd nT odd kedA eX VAd do sed F daasep 8 139 cz c 0 M00 8 140 oet SIBBOD ODDO qa a raa 33D ERA RC Ph ERA e ih 8 142 set Stanon Opon VLA PORT 414 opes p dc bebe ROCHE Re RP oe 8 145 DEO Oe tT uaa Cel esad Ear eens qucd Osan d Geen sens tours 8 147 e ora MET 8 149 SOL VIE FOI o ui ide 050th YEAR HENCE dee E ae cA 8 150 Dor Teach SOOO cand Res Va 3323 TLT aT adieu PRXx x39 Crd dque Eds 8 151 m Brooks Automation vill Revision 2 2 MagnaTran 7 1 User s Manual Contents MN 003 1600 00 ser Warning CDM Sigs os 6465 ud HOEE REEL HORE REPRE LR EET EE KS 8 152 Sol ONE Ce 2a hoe Vend reps de o Te E PRETI EAR 8 153 Det Workspage AutoL Teale 1445 dead ERA REP RUE E PMdATARO CERE RE 8 154 set Workspace Mods coss odit ier etr rore be RR E
386. ields an invalid value when multiplied by the number of slots Bad T Position Invalid Theta value T 360 or T 0 Enter a theta position within the range of 0 to 360000 where 360000 represents 360 degrees Robot theta positions are represented in millidegrees Thus 1 degree of robot travel equals 1000 units Bad R value Value is either too small or too large for the arm to reach or an attempt was made to drive arm past its limits Enter a radial position within the range of the radial home position and the max imum extension of the armset The radial home position and maximum extension will vary pending the size of the armset Robot radial positions are represented in microns Thus 1 mm of robot travel equals 1000 units Bad Z value Value is either too small or too large for the arm to reach or an attempt was made to drive arm past its limits Enter a Z position within the range of 0 to the maximum Z height Maximum Z heights vary pending robot model In most cases the maximum Z height is 25mm or 35mm Robot Z positions are represented in microns Thus 1 mm of robot travel equals 1000 units If the maximum Z height is unknown issue the command RQ ARMS ALL The maximum Z height is indicated in the line total z travel The response is in meters An example of the last 7 lines of the robot response list are shown below Pan B ctr of mass Y coordinate Pan B pad offset total z travel
387. ific I O channel using multiple MAP commands where the function of that I O is defined differently in the different MAP commands This allows an I O channel to be referenced in different ways depending upon the func tion being performed For example it may be convenient to identify the Wafer Sensors as both Brooks Automation Revision 2 2 8 45 Command Reference MagnaTran 7 1 User s Manual Map MN 003 1600 00 WAF SEN and as NUMERIC allowing individual monitoring of the sensors using RO IO STATE WAF SEN and monitoring of the sensors as a group using RO IO NUMERIC See Also Examples REMOVE IO SET STN OPTION To request the current settings see Request I O Map on page 8 82 To request the current status see Request I O State on page 8 84 Tables are provided in Appendix E User Setting Tables on page 11 17 displaying all connector pins and supplying space for the user to enter assigned interlocks The same connectors used in Operational Interlocks are also used in the DIO Operational Interface Although the same pin may be used for either DIO or Interlocks refer to MISC I O Communications on page 5 9 for tables displaying the factory assigned DIO bits Many pins on the connectors are not used It may be recommended to use unused pins for interlocking See Discrete I O Control DIO on page 6 45 for a step by step example of how to assign interlocks The following examples provide an overview of the usage of I O t
388. igned to keep MTTR and therefore MagnaTran 7 downtime to a mini mum A series of FRUs has been identified for the MagnaTran 7 to reduce Mean Time To Repair MTTR and to simplify repair procedures in the field Some of these FRUs may comprise a complete assembly such as the Electronics Enclosure for the Mag naTran 7 NOTE Maintenance training classes on how to trouble shoot and repair a MagnaTran 7 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Repair Philosophy to an FRU level are available from Brooks Automation at the Chelmsford Ma facil ity Contact Brooks Automation for information about these classes Depot Field Repair The next fastest way to repair a MagnaTran 7 is the Depot Field Repair approach This option assumes that the MagnaTran 7 or a specific FRU can be removed from the sys tem in which it is installed and repaired to an Individual Component Level ICL at the user s repair facility Parts are available to enable the FRUs to be repaired to an Individual Component Level ICL in the field by a trained technician NOTE Maintenance training classes on how to trouble shoot and repair a MagnaTran 7 to the Depot Field Repair level are available from Brooks Automation at the Chelmsford Ma facility Contact Brooks Automation for information about these classes Priority Parts Service The next fastest approach is to obtain the appropriate FRU through Brooks Au
389. ile maintaining the vacuum environment in the cham ber The mechanical design and operation of the MagnaTran 7 robot uses a minimum number of moving parts to ensure minimal maintenance requirements Subsystems The MagnaTran 7 is made up of several functional subsystems designed for ease of use maintenance and repair These subsystems are modular in design to allow ease of maintenance and to minimize Mean Time To Repair MTTR The mechanical system for the robot breaks down into several basic subsystems These subsystems are Protective Covers Frame Assembly e T1 T2 Drive Assembly Z Axis Drive Assembly Robot Arms Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Mechanical System Protective Covers There are two protective housing covers encircling the full length of the robot body The covers are secured to each other using four captive screws This allows quick removal and easy access to the subsystems within The covers surrounding the robot body were designed to provide protection to the moving mechanisms and electronics of the robot and to provide optimal cooling by directing the air flow over the subsystems within A cooling fan resides in the bottom section of the robot Air is directed through the robot by the fan and vent holes in the protective covers to provide efficient cooling NOTE Since proper air flow for cooling is dependant upon the covers being in place t
390. ill request selection of the transfer type described below with the following prompt WITH ARM _ 1 PERFORM PICK 2 PERFORM PLACE NOTE In the preceding display presented on the CDM the _ indicates that the Brooks Automation 6 72 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation Setup CDM will display the selected arm Press either 1 or 2 on the numeric keypad to initiate the desired transfer type Refer to the descriptions below for a definition of each transfer type Pick moves the specified arm to the specified station and slot extends at the lower height raises the arm to pick a wafer and retracts the arm at the BIO height Place moves the specified arm to the specified station and slot extends at the BTO height lowers the arm to place a wafer and retracts the arm at the lower height NOTE Refer to Table 6 1 Arm Speeds on page 6 14 Chapter 8 Command Refer encefor a discussion of robot movement speeds which are based on the robot s tracking the Pick and Place history for each arm Allows the user to set up both the CDM and the robot for operation There are six setup options available These options are displayed in the following mes sage when the Setup function key is depressed on the CDM SET UP 1 CDM SPEED 2 STATIONS 3 CONFIG ROBOT 4 ENABLE DIO 5 Z AXIS STATE Make an option selection f
391. ines a set of Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Manual Notation options one of which is required as an input to the system Do not type the parenthesis or the vertical line Ex EXIRE Type only the desired option exactly as shown Optional Entries Text in brackets defines an optional input to the system All text within the brackets must be entered exactly as shown do not type the brackets Ex PRINT Type PRINT if the print option is desired Do not type the brackets Italicized text in brackets defines the name of an optional variable used as an input to the system Enter the value for that variable Ex print Type the name of the item to be printed if the print option is desired Do not type the brackets Text in parenthesis separated by a vertical line within brackets defines a set of optional inputs to the system Do not type the brackets parenthesis or the vertical line Ex EXIRE Type only the desired option exactly as shown Do not type the brackets parenthesis or the vertical line Document and Drawing Numbering The Document and Drawing Numbering system used by Brooks Automation is struc tured to allow easy identification of any item The format is shown below XX XXX XXXX XX The first two digits are optional and define the document type The next three digits are the commodity code which indica
392. ing provided on a single axis HOME Check to ensure that the Arm is retracted before issuing a HOME T or HOME Z command Using the HOME ALL command insures interlocking and is the safest command to use Allows the user direct control of the robot There are three movement options available Move to Station Move to Specified Location and Jog When MOVE is selected the CDM will request selection of the arm to be moved with the following message MOVE 1 ARMA 2 ARMB Press either 1 or 2 on the numeric keypad to select the arm to be moved Once the arm to be moved is selected the CDM will request selection of the move type described below with the following prompt MOVE ARM 1 TO STATION 2 TO LOCATION 3 JOG NOTE In the preceding display presented on the CDM the _ indicates that the CDM will display the selected arm and station Press either 1 2 or 3 on the numeric keypad to select the desired move type Refer to the following descriptions for a definition of each move type Station Mode enables moving the robot in Station Coordinates which are defined as R Extended or Retracted T defined for a particular station num ber Z Up or Down Once Station Mode is selected the CDM will request the station number then will request confirmation of movement before executing Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM
393. inside the coiled portion of the three cables for wear and signs of pinch ing Inspect the areas of the coils near the black clamps these clamps attach the Coil cables to the underside of the Theta Drive and to the Coil cable shelf Inspect the white clamps that attach the Coil cables to the side of the Theta Drives look for signs of wear and check that the screws attaching them to the Theta Drives are secure If any of the above inspection points report a discrepancy call Brooks Automation Customer Support Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Cover Inspection Cover Inspection The covers can sometimes become damaged during installation or removal The inside of the covers can also come in contact with moving parts of the Theta Drive which can cause black Nickel paint particles to deposit on the Theta Drive or on the Z Drive Mounting Plate Required Tools none Follow these procedures to inspect the covers 1 2 Inspect the outside of the covers for cracks or damage Turn power to the robot off Remove the Power Cable Serial I O Cable CDM Cable and Power Pak if applicable Remove covers Inspect the inside surface of the covers for scratches or patches of missing black paint Inspect the drive for signs of black particles generated from the covers in the vicinity of the Theta Drives and Z Drive Mounting Plate If any of the above inspe
394. ion 2 2 May be poisonous if absorbed through the skin Contact may irritate or burn skin and eyes In case of contact with eyes flush eyes with run ning water for at least 15 minutes In case of contact with skin wash skin with soap and water Remove and isolate clothing and shoes at the site 2 19 Safety MagnaTran 7 1 User s Manual Material Safety Information MN 003 1600 00 Nitrogen Safety Information Hazard Emergency Action Fire e The cylinder may explode in a fire e Fire may cause irritating gases e Small fires may be put out with a CO or dry chemical type extinguisher e Large fires may be extinguished with water spray fog or foam Move the container from fire area if this can be performed without risk e Stay away from the ends of the tanks Withdraw immediately in case of rising sound from the venting safety device or any discolora tion of the tank due to fire Leak e Vapors may cause dizziness or suffocation Isolate area and deny access to unnecessary per sons Stay upwind and avoid low areas e Stop leak if possible using a self contained breath ing apparatus SCBA Inhalation e Move victim to fresh air and call emergency med ical care If victim is not breathing perform artifi cial respiration Skin Contact Contact with liquid may cause frostbite If con tact occurs treat for frostbite Brooks Automation 2 20 Revision 2 2 MagnaTran 7 1 User s Manu
395. ions MN 003 1600 00 Matrix of Emergency and Corrective Response Actions The following matrix provides emergency and corrective actions for safety issues that may arise regarding the MagnaTran 7 only Emergency and corrective actions required for the equipment the robot is installed in should be provided with that equipment Table 2 2 Emergency Action Matrix Emergency Corrective Response Electric Shock Fire A Mechanical Pinch Disconnect from power source Use a non conductive fire extin guisher Class C Perform one of the following Press EMO button user account able circuit Issue a HALT command Turn off power from source Press Emergency Stop button on CDM Then either free the pinched object or physically push the arms in reverse direction to free the pinched object 2 16 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Safety MN 003 1600 00 Material Safety Information Material Safety Information Hazardous materials may be present during the operation of the MagnaTran 7 or dur ing maintenance Hazardous material distributors provide a Material Safety Data Sheet MSDS for all materials they supply These sheets provide crucial information pertaining to the hazardous material used in your equipment The facility where the product is to be used is responsible for the maintenance and distribution of each MSDS Ensure there is a copy in each workplace for all h
396. ir MagnaTran 7 1 User s Manual Encoder Setup MN 003 1600 00 Encoder Setup The following procedure is used to find the encoder amplitudes for all position encod ers in the MagnaTran 7 N CAUTION The following commands are NOT used in the initial set up or the nor mal operation of the robot These commands are used in repair oper ation only Brooks Automation recommends contacting Brooks Technical Support before beginning this procedure Required Tools and Test Equipment Performing this procedure does not require any tools Setup Strategy This procedure will find the encoder values and report them to the operator Three runs of each procedure are performed and then the average value will be set Read the entire procedure before beginning Find T1 Encoder Value N CAUTION The following commands are NOT used in the initial set up or the nor mal operation of the robot These commands are used in repair oper ations only Brooks Automation recommends contacting Brooks Technical Support before beginning this procedure 1 Power up the robot and establish serial communications 2 Enter the following command to begin collecting values FIND ENCODER T1 9 Rotate the T1 motor shaft the outer shaft slowly Rotate the shaft and attempt to complete one full revolution within 30 seconds Brooks Automation 9 66 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Encoder Setup After 30
397. is chapter Brooks Automation 3 20 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Initial Power up Sequence Initial Power up Sequence After the MagnaTran 7 robot has been installed and configured it should be powered up and all connections should be checked out before proceeding any further with the installation process N CAUTION Do not attempt to operate the MagnaTran 7 robot until all installation procedures described in this chapter have been completed Check to ensure that all of the installation procedures previously described in this chapter have been completed Check to ensure that robot has been properly configured as described in the previous sections of this chapter Plug in the robot s power supply to the facility s electrical services Refer to the power supply instructions for correct termination Following the manufacturers directions turn on the power supply or throw the breaker switch on the Brooks Automation power supply Initialization sequence performs correctly 1 The MagnaTran 7 has a 15 to 20 second delay to the power up prompt The robot has a microprocessor similar to that in a computer and takes this time to initialize before it has to handle an action command 25 The power supply and robot cooling fans will make an audible sound 3 The 24 VDC light on the robot interface panel will be lit On the Brooks Automation power supply the POWER ON light on the front panel
398. is used to define the distance between slots When using the Slot and Pitch parameters the total number of slots may not exceed the vertical distance that the robot is capable of traveling Brooks Automation Revision 2 2 6 9 Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 Slot 2 Slot 1 Wafer Transport Plane WTP bottom surface of Wafer Center Line Lower Base Transfer Offset BTO Robot Home Z Axis Figure 6 4 MagnaTran 7 Z Axis VCE Parameters Single Arm Motion The software set velocities and accelerations for radial motion apply only to the veloc ity and acceleration applied to the shoulder shaft rotation The rotary motion of the shaft is profiled to accomplish smooth motion as the arm is accelerated from or brought to rest The speeds for arm motion are based upon the robot s knowledge of wafer presence on the end effector Wafer presence is determined in several ways wafer presence will be assumed after a PICK wafer presence will be assumed after power up and wafer absence will be assumed after a PLACE Note that the SET LOAD command can be used by an operator to specify the presence or absence of a wafer on the end effector Dual Arm Motion 6 10 On all three axes of the MagnaTran 7 the A and B arms are driven simultaneously For Theta T motion and for the vertical Z motion therefore the arms move at the
399. ision 2 2 4 7 Subsystems MagnaTran 7 1 User s Manual Mechanical System MN 003 1600 00 Z Zee Ball Lead Screw Ball Screw nut Motor Fail Safe Brake Encoder Figure 4 3 Z Drive assembly The robot incorporates motor overcurrent protection into the Z servo controller When an overcurrent situation is detected the corresponding servo is shut off and an error message is generated This protection is a safety feature designed to prevent blown fuses due to excessive load i e the robot arm is obstructed during a regular move or jog move Brooks Automation 4 8 Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Mechanical System Robot Arms The arms supplied with the MagnaTran 7 are designed for a vacuum environment for 100mm to 300mm wafers Various arm sizes end effectors and configurations are available Arm sets follow the basic design of the Brooks Automation frog leg arms and pro vide a maximum extension of 1050 mm from the center line of the robot to the center line of the wafer being handled Patented arm styles are available in either the Single Pan Arm Set the Bisymmetrik Dual Pan Arm Set or the Leap Frog same side Dual Arm Set Figure 4 4 displays the various arm configurations available Arm sets are controlled in the R and T axes by the T1 and T2 drives The vertical motion is controlled by the Z axis drive Arm motion in the T axis rotation is provided by synchro
400. ith the proper electrical codes compliant connec tions Z N WARNING All power to the robot must be disconnected per the facilities lock out tagout procedure before servicing to prevent the risk of electrical burn or shock Brooks Automation Revision 2 2 2 7 Safety Electrical Hazards MagnaTran 7 1 User s Manual MN 003 1600 00 Lockout Tagout Use of lockout tagout procedures when servicing the robot is recommended by Brooks to ensure the safety of personnel servicing this product See Power Connections on page 5 3 for power supply connections Electrical Hazard Classifications The following table describes electrical hazard classifications as per SEMI S2 0200 Brooks Automation has designed the robot to require minimum need to conduct test ing or maintenance on subsystems that may be energized Calibrations and adjust ments are performed with the power on and live circuits covered No equipment should ever be repaired or replaced with the power on The following are the four types of electrical hazards Table 2 1 Electrical Hazard Classifications 2 8 Classification Description Type 1 Equipment if fully de energized Type 2 Equipment is energized Energized circuits are covered or insu lated Type 3 Equipment is energized Energized circuits are exposed and inad vertent contact with uninsulated energized parts is possible Potential exposures are no greater than 30 volts RMS 42 2 v
401. itial Power Seguente 14d eee br ERR ERN VER REIHE XAT ES dE RA YE a 3 21 ContbumbDor Compabblly eus dude EET THE IHRWRPEA Y KP TERR 3 22 Moum the ATM el caa rinra ED es dq se d IUDICIO Ep e d od eara 3 23 Install End Effector sad countess ass ewes Ea Ww HERE VEO EO OK VPE Ea Dad 3 47 Aldigument and CalDealiOti i 145400 dde a xb ERARRNREEERAPeQETARA A ERERRRA 3 48 Brooks Automation Revision 2 2 3 1 Installation MagnaTran 7 1 User s Manual Site Requirements MN 003 1600 00 Site Requirements Before the MagnaTran 7 Robot may be installed the site where the robot will be located must be properly prepared This preparation includes ensuring that the proper facilities including electrical and communications connections are available and are properly prepared for the robot Space The chamber where the MagnaTran 7 Robot will be installed must meet the minimum space requirements specified in Figure 3 1 to ensure proper clearance for operation and servicing of the robot N CAUTION All drawings within this manual are generic and may not reflect spe cific builds of the robot To obtain a complete and current set of draw ings and documents contact Brooks Customer Support Brooks Automation 3 2 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Site Requirements Robot Drive The area under the chamber the robot will be mounted in must provide the minimum dimensions shown below to provide proper clearance for
402. jump pin 29 to pin 27 Power is fuse protected by a 1 1A self resetting polyfuse A power status indicator green LED is located on the face plate labeled 24V High Side Low Side Discrete I O Assignments Table The discrete I O communications cable uses a standard 50 pin female D connector at the end that plugs into the robot at the connectors labeled MISC I O The pin out for these cables are provided in Table 5 7 DIO Control Table 5 7 lists the factory programmed DIO commands and their associated pin assignments for the MISC I O connector located at P2 of the Interface board For a complete description of how each command will function and to enter DIO operation see section Discrete I O Control DIO on page 6 45 DIO Monitoring Outputs 0 19 pins 31 trough 50 shown in Table 5 7 can be monitored when in serial communication mode See Set DIO Output on page 8 125 Operational Interlocks Table 5 7 shows the MISC I O 50 pin connector that contains 22 input pins pins 1 22 I O designation 0 21 20 output pins pins 31 50 I O designation 0 19 and 6 power pins pins 25 30 individually designated These inputs and outputs are user programmable to assigned Operational Interlocks as described in Operational Interlocks on page 6 23 Brooks Automation Revision 2 2 5 15 Operational Interfaces MISC I O Communications MagnaTran 7 1 User s Manual MN 003 1600 00 Table 5 7 High Side Low Side I O Assignments
403. justment TOOLS Small Phillips head screwdriver Force gauge 5 in lbs resolution Dial Caliper or small 6 scale 1 16 resolution PROCEDURE 1 Measure the wrist band thickness as shown in Figure 9 4 Use a small scale or dial caliper to determine the proper specification from Band Size Table N CAUTION While measuring the wrist bands use caution so as not to nick or scratch the wrist bands Table 9 4 Band Size Band Size Specification 1 8 1 5 3 0 in Ibs 3 16 3 0 4 5 in Ibs 1 4 3 5 5 0 in Ibs Brooks Automation Revision 2 2 9 39 Maintenance and Repair MagnaTran 7 1 User s Manual Wrist Band Adjustment MN 003 1600 00 Arm Assembly Side View bond thickness in L S i N Eng Ef Wrist Band Figure 9 4 Arm Assembly Side View 2 Apply the plunger extension of the force gauge onto the tab located next to the spring loaded screw as shown in Figure 9 5 As soon as the tab moves slightly inward observe the force gauge reading If the force gauge reads less than specified in Table 9 4 adjust the spring loaded screw clockwise 1 8 to 1 4 turn at a time Repeat step 2 of this proce dure If the force gauge reads greater than specified amount adjust the spring loaded screw counter clock wise 1 8 to 1 4 turns at a time Repeat step 2 of this procedure Force Gauge i Wi Jl Arm Assembly TOP WIE Ww Pa
404. l Check wafer sensor cables for proper connection and continuity Verify that power is supplied to Miscellaneous I O via external power source or Mag naTran 7 robot For external supplied power place 24V on pin 25 and 24V RTN on pin 27 For MagnaTran 7 supplied power jump pin 25 to pin 30 and jump pin 27 to pin 29 Refer to MISC I O Communications on page 5 9 Verify that all fiber optic cable is fully seated at all connections Call Brooks Technical Support Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Troubleshooting Operational Interlock Related Issues YES YES YES YES Operational Interlock Related Issues Y Operational Interlock is Not Functional y Operational Interlock State is Invalid Was Issue Resolved Was Issue Resolved Was Issue Resolved Was Issue Resolved Verify that the interlock has been properly set and stored via the MAP command Verify that the interlock is set to the proper active state hi or lo according to the host controller s requirements Was Issue Resolved Verify that the interlock is set to the corresponding pin of the Miscellaneous I O connector according to the host controller s requirements Verify that the interlock s state will toggle using RQ IO STATE ALL while physically changing the interlock s state Was Issue
405. l 16 1 our I 015_ NOUT ISOP rupe os D14 Rv5 fve DEMZ9SNA197 u3 2 OUT I8016 XOUT ISO1 6 P13 OUTB P AP wi 18 Our P MODE 3 OUT 15017 N NOUT ISOT 7 08 Pia OUTB PT 4 iA ivo 16 QUT PT U27 4 OUT 15018 OUT IS01 8 ig SA P11 OUT 18019 P 1 SUIE PE a 143 193 H2 OUT PS aE Z Anodet Collector OUT ISO8 h 2 E Heno coM p19 4 o 24V 180 Sato iit 1A4 1Y4 Fg R10 D94 2 OPUPS 3 Cathodet Emitteri 6 Pia EE s 1H 241 2 i 3 A vec OUT SH Anode2 Collector2 5 1 our isoo mA NR ULN2803A 18 2 2 2Y2 pe Xx A Cathode2 Emitter2 M ue ME 2A3 2Y3 3 X un NS ee 17 1 a4 2YA 3 xX EU MOCD217 IS x PACA x i a 19 OPUP10 Ps PAARE d 24V ROBO 199 2G OUT PD 37 Anodet Collector 4 our iso10 mA R2 ETIE TT 77 Cathode1 Emitter1 READ eee A 1P RXD R3 R4 74ALS244 OPUP11 3 6 i 15 FROM THETA b 14k VT ATK OUT Pi au Adeo ODER B OUT ISO11 Y e BOARD eere ps3 4 7KNET W ciways E35 l di Md X 24VDC PWR o vec OPUP12 1 a 4 OUT ISO1B 1 18 U31A ls 2N7002 9 OUT P P dM Cole SEL B OUT ISO12 OUT ISO17 2 17 2 18 D OPUP13 gj eamnoge me ig 4 OUT ISO1B 3 16 NZ TxD 4 Y1 Pie J5 OUT PB 4 Anode2 Collector2 5 OUT ISO13 OUT ISO1B 4 15 I5 TXA DRIVEN 6 42 X5 pi TXA DRIVE BUTTONTXRX J R93 Camodes Emhtere 5 14 y J6 RXA DRIVEN 8 ya b12 RXA DRIVE a Ol gt iBUTTON 47k MOCD217 s 13x 1 D garr TOW pet 24V _so mo Qe HEADER 2 use 8 11 PE AC FAIL UPS G OPUP14 1 8 9 10 7 3p INTRIOCK SRC E 2N7002 D26 OUT PX g Anode1 Collector lez OU
406. l communications mode 8 157 STORE IO ECHO Stores the serial communications echo 8 161 option 8 17 Revision 2 2 Command Reference MagnaTran 7 1 User s Manual Command Quick Reference Tables MN 003 1600 00 Table 8 7 Store Commands Command Description Page STORE LOAD MODE Stores the current load mode 8 162 STORE RTRCT 2 Stores the current value set 8 164 STORE STN Saves the various station related parameters 8 165 STORE WARN CDM Stores the current warning feature state of 8 172 the CDM Table 8 8 Workspace Commands Command Description Page CREATE WSPACE Creates a new Workspace 8 26 REMOVE WSPACE Removes a Workspace 8 68 RO WSPACE Returns current setting of specified Work 8 115 space RO WSPACE MODE Returns the Workspace state 8 117 RO WSPACE AUTO Returns state of automatically created Work 8 116 CREATE spaces SET WSPACE Sets the automatically created Workspace 8 153 parameters SET WSPACE AUTO Creates a Workspace around the home posi 8 154 CREATE tion SET WSPACE MODE Turns the Workspace mode on or off 8 155 STORE WSPACE Stores the current Workspace parameters 8 173 STORE WSPACE Stores the current automatically created 8 174 AUTOCREATE parameters STORE WSPACE Stores the current Workspace mode 8 175 MODE Brooks Automation 8 18 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Command Quick Reference Tables Table 8 9 Radial Motion Sensor R MT Commands C
407. l setup and at any time that the robot s arms or end effector s are removed and replaced N CAUTION Transfer and process modules may have specific wafer placement requirements Refer to the appropriate User s Manuals while per forming this procedure Required Tools and Test Equipment The robot s Control Display Module CDM Expendable wafer N WARNING Breaking wafers may produce flying shards of glass When using wafers in a set up or test procedure protective eye wear should be worn at all times to guard against possible eye injuries Adjustment Calibration Strategy This procedure sets the R and T position for arm A based upon the required position for a wafer on the end effector in each module Adjustment Procedure 1 Place a wafer on the end effector in the position required 2 Using the CDM move the robot to the initial module T axis position using the MOVE command Brooks Automation 7 16 Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Setting the Transfer and Process Modules T and R Coordinates 3 Using the CDM put the robot into learn mode so that it can be taught the coor dinates for the module 4 Using the CDM extend the robot s end effector until it approaches the center of the module s wafer platform This may be performed using the JOG feature or the hand locate feature 5 Visually check the end effector s T rotational position to determine whether
408. lains the correct usage of REMOTE EXE to perform the software update Section File Lists lists the files that should reside on the Disk On Chip storage device on the robot for each software release version The second section lists the procedure for performing the software update File Lists The file names in italics are created and managed by the robot The file ERR LOG BIN underlined in the V2 1x and V2 2x columns is resident on the robot only if it was upgraded from V2 1x or earlier Files that you might see that should be deleted are A1 BAT C1 SYS H1 SYS and R1 EXE these are created during the auto download process and then later deleted unless an error occurs Table 9 6 Resident Files Brooks Automation Revision 2 2 V2 0x and earlier V2 1x and later V2 2x and later AUTOEXEC BAT AUTOEXEC BAT AUTOEXEC BAT CONFIG SYS CONFIG SYS CONFIG SYS HIMEM SYS HIMEM SYS HIMEM SYS COMMAND COM COMMAND COM COMMAND COM SIM VGA SIM VGA SIM VGA 9 83 Maintenance and Repair Firmware Upgrade MagnaTran 7 1 User s Manual MN 003 1600 00 Table 9 6 Resident Files V2 0x and earlier V2 1x and later V2 2x and later PARSERV EXE PARSERV EXE PARSERV EXE STD TRP STD TRP STD TRP REMOTE EXE REMOTE EXE REMOTE EXE MAG7 EXE MAG7 EXE MAG7 EXE MAG7_MCC OUT MAG7_MCC OUT MAG7_MCC OUT NVRAM BIN OBJ_MAST BIN OBJ_MAST BIN ERR_LOG BIN OBJ_DATA BIN OBJ_DATA BIN MAST_CFG BIN MAST_CFG BIN
409. lange alignment pins This change will affect the Theta Home position location The Theta Home reference location can be re config ured but this may not be necessary since the Theta axis has unlimited rotation HOME Operation 6 20 Homing the robot references all axes The HOME command performs multiple abso lute position pattern acquisitions in order to reliably establish the initial position of each axis The absolute reference system for each axis of the robot is established by moving as much as 10mm 1 2 the robot forward backward repeatedly pinging centered about the initial starting position unit the HOME command is either success fully completed or an error is generated The sequence to determine its location is described below NOTE HOME ALL will safely home the robot from any location providing the sequence of each axis can be performed in order If a collision hazard exists HOME each axis separately The sequence for a multi axis HOME performs an integrated sequence in the follow ing order R axis homes toward retract position T axis homes counterclockwise Z axis homes downward only on robot s with the Z Axis option In all cases the robot will move the shortest distance required to reach the home posi tion If a HOME command is entered and the robot is already at the HOME position no motion will occur See Home on page 8 41 for a description on the use of the HOME command Brooks Automation Revision
410. le PROM PSS R Axis Radial Movement RAM Brooks Automation Revision 2 2 See Process Module The cool chamber cover designed to raise and lower the wafer The position the wafer is placed in after processing Priority Parts Service A user supplied module for processing wafers attached to the Transport Module Programmable Read Only Memory The PROM is a device which is used to store the product s software The PROM retains its memory dur ing power off periods See EPROM See Partial Step Size The axis of radial movement For a robot it is the in and out of the robot s arms For an elevator it is the rotation or in and out of the plat form Linear movement of the robot s arm in and out of a station Random Access Memory Parameters set with set commands are stored in RAM until transferred to the EEPROM with a corresponding store Glossary MagnaTran 7 1 User s Manual MN 003 1600 00 command Parameters stored in RAM are erased when power is removed Ready String In the Serial Mode the string of ASCII characters the product sends when it is ready for the next command Record Type A single character field in an product transmission which identifies it as either action A set S store P request R response X or a system abort E command Request Commands A software command used in serial communications with the prod uct that requests information from the product Reticle Glas
411. le in the system It is also recom mended that this procedure be performed every 90 days as a preventive maintenance practice NOTE To successfully align the robot and to obtain consistent and precise handling of wafers the limits and tolerances stated in this verification procedure must be met Required Tools and Test Equipment Granite surface block Height gauge Limits and Tolerances Maximum deviation between supports 0 076 mm 0 003 in No point on the end effector s surface will be higher than the lowest support Adjustment Calibration Strategy This procedure uses the granite surface block as a reference point to determine the height of each wafer support on the end effector and to ensure that no part of the end effector rises above the wafer supports Measurement Procedure 1 Remove the end effector from the robot arms and place the end effector on a granite surface block with the wafer supports facing up 2 Using the height gauge measure the height of each wafer support Brooks Automation Revision 2 2 7 5 Alignment and Calibration MagnaTran 7 1 User s Manual Verifying Flatness of Robot s End Effector MN 003 1600 00 Verify that all supports are within 0 076 mm 0 003 in of each other Replace any supports that are out of specification using the procedure provided in End Effector Pad Removal Replacement on page 9 32 Once all wafer supports are within specification measure the height of the top surfa
412. le of the response is as follows ENCODER T2 SINE MIN 1425 SINE MAX 1348 COSINE MIN 1286 COSINE MAX 1254 The values should be between 1500 and 1950 for MagnaTran 7 1 robots Record the values for future calculations Perform the steps 2 4 three times Take the average of all three responses and input the average values using the following command SET ENCODER T2 ALL sinmin sinmax cosmin cosmax Store the values using the following command STORE ENCODER T2 ALL Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Motor Electrical Phase Calibration Motor Electrical Phase Calibration The following procedure is used to find the phase angles for the T1 and T2 motors N CAUTION The following commands are NOT used in the initial set up or the nor mal operation of the robot These commands are used in repair oper ation only Brooks Automation recommends contacting Brooks Technical Support before beginning this procedure Required Tools and Test Equipment Performing this procedure does not require any tools Setup Strategy This procedure will move the Z drive upwards and then the T1 and T2 shafts simul taneously in the counterclockwise CCW direction for one revolution and report the sync phase values Read the entire procedure before beginning N CAUTION The robot arms MUST be removed before issuing the FIND PHASE command Procedure J WARNING When equipm
413. lection of the type of information required with the following message INFO 1 CDM SPEED 2 STATIONS 3 LOCATION Press either 1 2 or 3 on the numeric keypad to select the type of infor mation desired Once the information request is specified the CDM will either display the associated information or request selection of additional parame ters Refer to the appropriate sections below for descriptions of each type of information CDM SPEED Displays the currently configured baud rate for the CDM STATIONS Displays robot position information and sensor set up for the specified station and arm The CDM will present all station variables with the fol lowing display STN ARM Loc P us Aa gt 0 SAFE 1 PUSH Brooks Automation Revision 2 2 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 RE SENSOR ASSIGNED NOT PRESENT OBJECT NOT DETECTED gt EX SENSOR ASSIGNED NOT PRESENT OBJECT NOT DETECTED gt NOTE In the preceding display the indicates that the CDM will display the selected station arm and value for each setting and the gt indicates that pressing the lt CR gt key will cause the next display selection to be displayed LOCATION Displays robot position information for the selected axis and arm Axis Parameter Selection Keys 6 78 The MagnaTran 7 robot has motion capabilities in three axes R Radial T Rota tional and Z
414. lignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the procedure again 9 Check the alignment of the arm and the position of home by entering the fol lowing command Brooks Automation Revision 2 2 3 35 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 HOME ALL If the home position is not where desired use the procedure Reset the Home Position to the User Preference on page 9 73 Mount CDM 1 Ensure the arm state of the robot is off Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO 2 Move the robot to the mount position Enter the following path SETUP CONFIG ROBOT ARM MOUNT ARE THE ARMS CURRENTLY ON NO When the robot is in the mount position the 2 locating pins of the robot outer shaft should be oriented as indicated in Figure 3 9 3 Disengage the robot servos Enter the following path SETUP CONFIG ROBOT SET SERVOS OFF 4 Install adapter to T2 if not factory installed 5 For the following procedure the alignment fixture must be installed on the arm set Verify the T1 adapter wave spring and T2 adapter are in place factory installed Align the pins located on the T1 and T2 drive shafts so they line up with the pattern on the underside of the arms Position the arms wi
415. lity Refers to sealed environment containers for transporting wafers See Substrate Present Sensor See Substrate Slide Out Sensor The default order in which parameters are listed when using the ALL option The specific standard order is shown in the reference entry for each command that supports the ALL option The robot s identification of a specific set of R T and Z coordinates Station Coordinates The location of the robot s arm relative to station parameters that is Brooks Automation Revision 2 2 Theta Station Number R Extended or Retracted and Z Up or G 9 Glossary MagnaTran 7 1 User s Manual MN 003 1600 00 Store Command STP Subcategory Substrate Down and Slot A software command used in serial communications with the product that stores a selectable parameter to the EEPROM See Substrate Transport Plane In the context of the product a subcategory is a variable parameter in a transmission to or from the product Subcategories often describe a position to be acted upon or a variable to be set A thin quartz glass sheet used for producing Liquid Crystal Displays Can also refer to a silicon wafer See Wafer Substrate Present Sensor An optical sensor that senses substrate presence See Wafer Present Sensor Substrate Slide Out Sensor An optical sensor that senses when any substrate is out of a cassette slot See Wafer Slide Out Detector Substrate Transport Plane
416. lot valve is closed an error message will occur and the robot will stop A fault response will be given RETRACT SEN Individual sensor monitoring of robot retract EX ENABLE Individual process module sensor allowing robot to extend I O State OUTPUTS SVLV CTRL Open and close slot valves using serial operational software commands as opposed to logic control i e robot actions Null indicates bit state is undefined DISCRETE OUT Individual OUTPUT monitoring of interlocking devices i e vacuum gauges NUMERIC OUT Allows monitoring of sensors as a group Binary number converted to decimal and presented on multiple consecutive OUTPUT channels RETRACT PIN Allows configured slot values to close only when the robot is in the retracted state HI or LOW characteristic dependent Miscellaneous Interlocks DISCRETE IN Individual INPUT monitoring of interlocking devices i e vacuum gauges NUMERIC IN Allows monitoring of sensors as a group Binary number converted to decimal and pre sented on multiple consecutive INPUT channels EMER STOP Emergency Stop sends the HALT command to the robot If activated the signal must be cleared before executing next move command Intended for use with a user supplied EMO button POWER IND Will be on as long as robot is powered up Output will be HI or LOW UPS BATTERY SEN NORMAL when battery signal remains high LOW when signal from the UPS bat tery go
417. lues and the station value options for station 1 by issu ing the following commands to the robot RO STN station ARM A ALL RO STN station ARM A OPTION ALL Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Uploading and Downloading Station Values 4 If the robot has dual arms then issue the following commands for arm B RQ STN station ARM B ALL RQ STN station ARM B OPTION ALL 5 Record all the station values and station value options for station 1 Appendix E User Setting Tables provides blank tables to record the information 6 Repeat Step 3 through Step 5 for all the robot stations taught in the cluster tool 7 To return to the original communication setting reset the robot by issuing the RESET command The robot will take approximately 25 to 30 seconds to reset RESET Downloading Station Values Using a Computer 1 The station values and station options obtained in the previous section can be input into the desired robot using the following commands SET STN station ARM AR r loc Tt loc Z bto LOWER lower NSLOTS slots PITCH pitch SET STN station ARM A OPTION SAFETY value PUSH value 2 If the robot has dual arms then issue the following commands for arm B SET STN station ARMBRr loc T t loc Z bto LOWER lower NSLOTS slots PITCH pitch SET STN station ARM B OPTION SAFETY value PUSH value 3 Store the station values and station options that were inputted in St
418. lute Purpose Returns for the specified axis the actual position of the pan in absolute coordinates for the specified arm Format RQ POS ABS ARM arm R T Z Or RO POS ABS ARM arm ALL Response POS ABS r location t location z location or POS ABS r location t location z location Arguments ALL Specifies R T and Z in the order presented in the command format ARM arm Field size 1 The arm for which the pan location is being measured If unspecified the response will be for the default arm Arm A The ARM identifier is optional r location Response field size 7 The current R axis location of the robot arm in microns m 001 mm t location Response field size 6 The current T axis location of the robot arm in 0 001 degrees z location Response field size 6 The current Z axis location of the arm in microns m 001 mm NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Brooks Automation 8 90 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Position Absolute Description The numbers given represent the actual physical location of the end effector in abso lute coordinates This position may differ slightly from the position to which the robot was commanded see RO POS TRG to request the target position The number and order of the data fields returned will reflect the number and
419. m tering Loaded cree Figure 9 5 Arm Assembly Top View Brooks Automation 9 40 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 T1 T2 Axis Driver Board Replacement T1 T2 Axis Driver Board Replacement NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools Performing the T1 T2 board replacement procedure requires the following tools Medium flat head screwdriver M3 hex wrench Removal Procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 1 Turn off the robot and disconnect the power and communications connections to the robot DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 2 Remove the protective covers as shown in Figure 12 2 ran CAUTION Observe proper ESD precautions when handling any electronic device 3 Remove the Lower Cover Mount Assembly Loosen the lower captive screw of the I O board Loosen the three upper cap Brooks Automation Revision 2 2 9 41 Maintenance and Repair MagnaTran 7 1 User s Manual T1 T2 Axis Driver Board Replacement MN 003 1600 00 tive screws of the Lower Cover Mount Assembly See Figure 12 4 Gently allow the Lower Cover Mount Assembly to drop down
420. m will move at low speed throughout an entire command such as PICK or PLACE To ensure the safest operation slower forced speed commands will overwrite faster forced speed options but faster forced speed commands will not overwrite slower forced speed commands To turn off any of the forced speed options use the N argu ment NOTE This option cannot be stored in non volatile memory since it toggles back to N after the subsequent action command LOSPD is always set to N at power up Brooks Automation Revision 2 2 8 135 Command Reference MagnaTran 7 1 User s Manual Set Medium Speed MN 003 1600 00 Set Medium Speed Purpose Forces medium speed option on Format SET MESPD speed Arguments speed Y forces the next motion complex or primitive for the inactive arm to operate at medium speed N forces the next motion complex of primitive to operate at the normal speed for that command Description 8 136 Since the wafer is held in position on the pan only by friction high speed motion is likely to cause misalignment of the wafer relative to the pan To prevent this the only allowed high speed motions are as follows for the single arm the without wafer velocity and acceleration will be used only during the initial motions in a PICK and the final motions in a PLACE for the multi arm the speed selected by the robot is based on the PICK PLACE history of both arms The SET MESPD command allows the operator to ensure that the
421. mall portion of the o ring into the groove at 90 from the points above 3 Press the o ring into the groove evenly in each 90 segment Do not stretch the o ring to prevent excessive looping as the balance of the o Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 O Ring Removal Replacement Cleaning QO 5 In applications where the exposed surface of the o ring will be exposed to atmosphere after installation doors lids etc the exposed surface of the o ring must be wiped down with DI water to remove any traces of the vacuum grease ring is inserted Brooks Automation Revision 2 2 9 19 Maintenance and Repair MagnaTran 7 1 User s Manual End Effector Alignment MN 003 1600 00 End Effector Alignment Perform the following procedures to check the end effector 1 Verifying Flatness of Robot s End Effector on page 7 5 and 2 Adjusting the Robot s End Effector on page 7 7 Brooks Automation 9 20 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Power Pak Maintenance Power Pak Maintenance Replace the Power Pak using the following procedure Power Pak Replacement on page 9 63 Brooks Automation Revision 2 2 9 21 Maintenance and Repair MagnaTran 7 1 User s Manual Repair Philosophy MN 003 1600 00 Repair Philosophy If a MagnaTran 7 malfunctions refer to Chapter 10 Troubleshooting in this manual for diagnostic procedures If t
422. mat SET SYNC PHASE ALL t1value t2value zvalue Or SET SYNC PHASE T1 t1value T2 t2valuel Z zvalue Arguments t1value The calculated average T1 value t2value The calculated average T2 value zvalue The calculated average Z value Description This command is used to enter the average calculated value from the FIND PHASE command zs DANGER This command is NOT used in the normal operation of the robot See Motor Electrical Phase Calibration on page 9 69 and PC 104 CPU Board Replacement on page 9 58 for instructions on this command Brooks Automation Revision 2 2 8 149 Command Reference MagnaTran 7 1 User s Manual Set Sync Zero MN 003 1600 00 Set Sync Zero Purpose Sets the zero or Home reference for the theta and Z axes Format SET SYNC ZERO position Arguments position The axis to be set T1 Theta axis outer shaft T2 Theta axis inner shaft Z Z Axis ALL Tt I2 Z Description N CAUTION The SET SYNC ZERO command is NOT used in the normal operation of the robot Stored values may be lost if used improperly The MagnaTran 7 robot Home position encoder counts can be reset See Also See Restore the Home Position to the Factory Settings on page 9 71 for instructions on the proper use of this command Brooks Automation 8 150 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Teach Speed Set Teach Speed Purpose To set the robot to teach speed mode Format SET TEA
423. me 1 EXT INO 26 PWR_ISOL 2 EXT_IN1 27 PWR RET 3 EXT_IN2 28 PWR RET 4 EXT_IN3 29 24V RET 5 EXT_IN4 30 24VDC 6 EXT_IN5 31 DRV_OUTO 7 EXT_IN6 32 DRV_OUT1 8 EXT IN7 33 DRV_OUT2 9 EXT_IN8 34 DRV_OUT3 10 EXT IN9 35 DRV OUT4 11 EXT IN10 36 DRV OUTS5 12 EXT IN11 37 DRV OUT6 13 EXT IN12 38 DRV_OUT7 14 EXT_IN13 39 DRV OUTS 15 EXT IN14 40 DRV OUT9 16 EXT IN15 41 DRV OUTI10 17 EXT_IN16 42 DRV_OUT11 18 EXT_IN17 43 DRV_OUT12 19 EXT_IN18 44 DRV OUTI13 20 EXT IN19 45 DRV_OUT14 21 EXT_IN20 46 DRV_OUT15 22 EXT IN21 47 DRV OUTI16 23 EXT IN22 48 DRV OUT17 24 EXT IN23 49 DRV OUTI18 25 PWR ISOL 50 DRV_OUT19 11 21 Appendices MagnaTran 7 1 User s Manual Appendix E User Setting Tables MN 003 1600 00 Additional Information Brooks Automation 11 22 Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix E User Setting Tables Additional Information Brooks Automation Revision 2 2 11 23 Appendices MagnaTran 7 1 User s Manual Appendix F Relay I O Option MN 003 1600 00 Appendix F Relay I O Option The following information is for user specific options This procedure identifies the communication interface settings for the Relay I O board The interface settings are used to switch between RS 232 and either of two possible RS 422 communication settings This procedure identifies
424. ment and Calibration Check for Z axis binding by performing Z Binding Test Using the Trace Command on page 10 30 Check for Z brake binding by performing Z Brake Binding Test on page 10 27 Verify armset mounting bolts are torqued to 75 88 in lbs Verify armset is installed correctly Refer to Chapter 9 Maintenance and Repair Verify Z encoder is properly tightened to the Z leadscrew shaft Refer to Z Encoder Replacement on page 9 45 Brooks Automation 10 12 Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Z Motion Related Issues Symptoms Robot is unable to move in the Z direction and generates the following error Error 10009 MCC hard tracking error Troubleshooting Process Refer to Communication Related Issues on page 10 4 Symptoms Robot is unable to move in the Z direction Troubleshooting Process Determine if the Z axis is configured Refer to Determine if the Z Axis is Configured Properly Via Software on page 10 29 Verify the application number is correct Reference the robot OR or contact Brooks Technical Support for the correct robot application number Symptoms Robot hits Z hard stops during operation in the Z Axis OR Robot hits Z hard stops during homing in the Z Axis Troubleshooting Process Verify the operation of the overtravellimit switches When actuated the robot will generate an Error 10022 Error Bottom overtravel reached for Z axis Verify that the Z ha
425. mentation package for selection installation opera tion maintenance and repair Changes An overview of the changes to this manual since its initial release Chapter 1 Introduction An overview of the robot and its various subsystems Chapter 2 Safety Safety concerns and requirements for the robot Chapter 3 Installation Site preparation unpacking and installation information for the robot This chapter includes all set up procedures including initial check out and alignment Chapter 4 Subsystems Detailed information on the various subsystems of the robot Chapter 5 Operational Interfaces Detailed information on the interfaces to the robot Chapter 6 Operation Operating procedures for the robot including an overview of all con trols and indicators Chapter 7 Alignment and Calibration All standard adjustments and calibrations required for proper operation of the robot Chapter 8 Command Reference The software control features for the robot and provides a complete Command Reference and Error Reference Chapter 9 Maintenance and Repair Maintenance schedules and procedures and basic repair procedures for the standard maintenance of the robot Chapter 10 Troubleshooting Troubleshooting guidelines for the robot Chapter 11 Appendices Additional information about the robot in several separate appen dices Chapter 12 Attached Drawings Drawings Schematics and BOMs supplied with the robot Illustrated Parts Ca
426. menu selection to be displayed Not all of the menu is visible at one time Press YES to display the rest of the menu Press 1 through 8 on the numeric keypad to select the type of setup desired Once the item to be setup is selected the CDM will request selection of setup functions for that device Refer to the appropriate sections below for descriptions of each device s set up ASSIGN LOCATION enables the user to directly assign the parameters for the previously specified station This command is useful when the station parameters are already known LEARN R T BTO Enables the user to teach the location for the previously specified station using the Jog function or using the Hand Locate function Hand Locate allows the user to position the robot s end effector by hand in both the R and T axes and then store that location Brooks Automation 6 74 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation LEARN LOWER Enables the user to teach the lower value for the previously specified station using the Jog function SET WAFER SENSOR Enter the type of wafer sensor NOTE The sensors must be configured using the MAP command before they can be assigned using the CDM SET RETRACTWAFER SENSOR Enables the user to configure the wafer sensor in the retract posi tion at the specified station The CDM will display the list of pre viously configured Retract
427. metrik with typical PICK and PLACE sequence 735mm exten sion 180 rotation 0 4 second Z motion for 200mm wafer size 5 3 seconds typical at 0 3g acceleration limit 7 8 seconds typical at 0 1g acceleration limit Brooks Automation Revision 2 2 1 15 Introduction MagnaTran 7 1 User s Manual Specifications MN 003 1600 00 Leapfrog with typical wafer exchange sequence 740mm extension no rotation for 200mm wafer size 3 8 seconds typical at 0 3g acceleration limit 5 6 seconds typical at 0 1g acceleration limit Mechanical Specifications Weight Single Frogleg Arm 3 7 kg 6 16 lbs BiSymmetrik Arm 4 9 kg 9 20 lbs Leapfrog Arm 4 9 kg 9 20 lbs Mounting Bolts directly to the MagnaTran 7 drive shafts Brooks Automation 1 16 Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Company Overview Company Overview Brooks Automation is ISO 9001 Certified Quality Policy Itis Brooks Automation s policy to provide only value rich solutions to all of our Cus tomers Our Quality System is founded on the premise that each individual is totally committed to meeting the needs and expectations of our Customers In support of our Company s mission we believe that the pursuit of quality requires a culture char acterized by understanding dedication personal initiative teamwork and mutual respect Vision Statement We are the recognized global leader in automation excellence we hav
428. mmands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory See the corre sponding STORE command to save permanently save parameters See Also ROCOMM STORE COMM Examples The following example sets the serial I O communications mode in RAM to Monitor SET COMM M B MON The following example sets the command execution mode in RAM to Background SET COMM FLOW BKG The following example sets both the communications mode to Monitor and the com mand execution mode to Background SET COMM M B MON FLOW BKG The following example sets both the serial I O communications mode and the com mand execution mode using the ALL specifier SET COMM ALL MON BKG The following example displays the Automatic Data Reporting string after a PICK 1 is performed PICK 1 RE 01 0001 DN EX 01 0001 DN EX 01 0001 UP RE 01 0001 UP Brooks Automation 8 124 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set DIO Output Set DIO Output Purpose Turns on the Discrete I O DIO output monitoring function while in serial mode Format SET DIO OUTPUT Y N Arguments Y Enables DIO Output N Disables DIO Output Description The MagnaTran 7 robot may be controlled and monitored using discrete I O lines instead of using the serial communications link In normal operation the serial con trol is disabled when the Discrete I O control
429. mpen a cleanroom wipe with Isopropyl N CAUTION Wipe must be moistened only squeezing the wipe should not cause any alcohol to drip Do not allow alcohol to come in contact with bearings seals etc Clean the entire end effector paying special attention to the pads Do not apply excessive pressure or force to the pads while cleaning Excessive force may bend the end effector Once all residues have been removed use dry cleanroom wipes to dry all sur faces Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 O Ring Removal Replacement Cleaning O Ring Removal Replacement Cleaning All o rings should be inspected periodically to ensure proper operation Occasionally o rings will need to be cleaned if contaminated with particulates or replaced if dam aged N CAUTION To maintain the extreme cleanliness achieved at the factory wear gloves when handling any of the MagnaTran 7 components that will enter the vacuum environment Required Tools Brass or plastic pick Isopropyl Alcohol 100 DI Water Krytox LVP Vacuum Grease Procedure Strategy The o ring replacement procedure requires removal of the existing o ring inspection of the seal area repair of the seal area if necessary inspection of the o ring and replacement of the o ring if necessary Removal Procedure 1 Using the pick pry the old o ring out of the o ring groove starting at the plunge
430. mum value is less than 0 750000 which is less than 75 of the Z motor duty cycle If any number is greater than 0 750000 then call Brooks Technical Support Reinstate the trace function by issuing the following command Note the trace command settings from Step 3 will be retained in the robot until the TRACE CLEAR command is issued START TRACE Move the robot downward to the minimum Z height by issuing the following command The minimum Z height is 0 mm The units of measure for the fol lowing command are micrometers 0 mm 0 units MOVE Z ABS 0 Stop the TRACE function by issuing the following command TRACE STOP Request the trace function results by issuing the command TRACE DNLD 200 The robot will provide 200 lines of duty cycle percentage data Calculate and record the average of the duty cycle percentage data for down ward motion Verify that all numbers are less than 0 750000 which is less than 75 of the Z motor duty cycle and similar to the average value calculated in Step 7 If either of these conditions is not met then call Brooks Technical Sup port Procedure is complete Brooks Automation Revision 2 2 10 31 Troubleshooting MagnaTran 7 1 User s Manual Main Power Grounding Scheme Requirements MN 003 1600 00 Main Power Grounding Scheme Requirements 10 32 1 Ensure that the robot s 24 volt power supply is unplugged and turn power OFF Connect the P3 connector of the MagnaTran 7 power
431. munications 5 9 Discrete I O Connection 3 18 DISCRETE IN 6 24 DISCRETE OUT 6 24 Dispatcher Communications Errors 8 181 I 1 Index MagnaTran 7 1 User s Manual MN 003 1600 00 Documentation related 1 6 Drive specifications 1 12 weight 1 13 Dual Arm Motion 6 10 Dynamic Sensing 6 32 E EEPROM RESET 8 29 Electrical See Power specifications 1 13 Electrical Hazard Classifications 2 8 EMER STOP 6 24 Emergency Action Matrix 2 16 Emergency Conditions 6 89 Emergency Machine Off EMO 2 3 6 25 6 89 EMERGENCY STOP CDM 6 90 Emergency Stop CDM 5 20 Emergency Stop See Control Display Mod ule EMO 5 17 6 89 EMS See Emergency Stop Encoder Setup 9 48 End Effector Adjustment 7 7 End Effector Pad Replacement 9 32 End Effector Replacement 9 29 English Dimension 1 7 Environmental 3 5 Ergonomic Hazard 2 6 3 7 3 10 9 26 Error Codes 8 179 Error Response 8 9 8 11 EX ENABLE 6 24 Extension Limit 1 15 F Facilitated Field Repair 9 22 Facilities Connections 3 10 Facility Checks 3 20 Factory Default Settings 11 2 FIND ENCODER 8 30 FIND PHASE 8 31 FIND ZERO 8 32 I 2 Firmware Upgrade 9 83 FLASH memory 4 11 4 16 G GOTO 8 33 GOTO Station with Offset 8 36 H HALT 6 89 8 39 Handshake 5 6 Hardware Notation 1 8 Hazard Points 2 4 High Side Interface Board 4 12 High Side Logical Inputs 5 10 High Speed 6 13 HLLO 8 40 HOME 8 41 operation 6 20 position 6 19 Work Space 6 59 Housing See Protective Covers I I
432. n action commands executed by the robot SET ERRLVL 5 this command sets the robot s error level response to a range of 1 through 5 where 1 yields the least number of error messages and 5 yields the maximum number of error messages The Brooks default error level is 2 For maximum wafer throughput the error level MUST be set at 2 after trou bleshooting by using the command SET ERRLVL 2 and STORE ERRLVL SET COMM SEQ or SET COMM BKG The Magnatran 7 must either be in the sequential or background communication flow setting to generate error code messages The Magnatran 7 will not generate error code messages when operating in the background communication flow setting The robot MUST be returned to the original communication flow setting after troubleshooting Refer to the Magnatran 7 User s Manual Command Reference Section for addi tional communication setting information Brooks Automation Revision 2 2 10 3 Troubleshooting MagnaTran 7 1 User s Manual Communication Related Issues MN 003 1600 00 Communication Related Issues Symptoms No response from robot using personal computer That is the robot does not ey display either a or _RDY response OR No response from robot using CDM That is the CDM display screen remains blank when turned on Troubleshooting Process 10 4 Verify personal computer communication settings are 9600 N 8 1 Verify personal computer is setup for its correc
433. n profile at the T1 and T2 drive shafts that will obey the motion constraints for arm A and B defined by the user While the maximum radial extension is dependent on the geometry of the arm specified by the user the MagnaTran 7 is typically supplied with a BiSym metrik arm that meets the specification of a 1050 mm reach from the center line of the robot to the center line of the wafer This version of the arm accommo dates a load of up to 1 0kg 2 2Ibs on each end effector The actual extension and retraction positions of the arms are software selectable Brooks Automation 6 4 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 MagnaTran 7 1 Wafer Handling Robot Overview Wafer Center Bo A FN Wrist Forearm A End Effector Forearm B Upper Arm Elbow Shoulder N ae Upper Arm Figure 6 2 MagnaTran 7 Dual Arm Brooks Automation Revision 2 2 6 5 Operation MagnaTran 7 1 User s Manual MagnaTran 7 1 Wafer Handling Robot Overview MN 003 1600 00 Leapfrog Same Side Dual Arm Set On all three axis of motion radial R rotational T for Theta and vertical Z the left and right sides of the arm set for both arm A and arm B are driven simultaneously moving both end effectors as required For vertical Z and Rotational T motion the arms move at
434. n page 8 49 for the command string Pass through items are updated every 1 mSec Special Notes on RETRACT PIN 6 26 The RETRACT PIN is a different type of operational interface in that it is controlled by the robot motion controller This interlock is set up at the factory on pin 35 If an output pin is mapped as a RETRACT PIN then it will go active whenever the robot arm is referenced and retracted When the robot is not referenced an extend condi tion will occur to prevent slot valve closure in case the arms are extended when first powered on Upon power up the default status is NOT RETRACTED after HOME R status is RETRACTED The robot is considered extended when it extends a distance of 5 of its total exten sion from home position For example if a robot s total extension is 50mm from home then the RETRACT PIN considers the arm extended when it has move 2 5mm from home position 50mm x 5 2 5mm Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Operational Interlocks This interface can be removed by following the command Remove IO on page 8 66 It can also be moved to another output pin by following the procedure Mapping the Interlocks on page 6 29 Special Notes on the PowerPak The PowerPak provides a controlled stop of the robot see PowerPak Power Fault Manager on page 6 84 Two signals may be sent to the robot AC FAIL UPS The robot comes to a controlled stop as quickly as po
435. n position MCC unable to hold position MCC hard tracking error Verify that robot arm state is correct arms on or arms off Verify robot application number is correct Check for physical obstruction Remove or adjust physical obstruction to prevent interference While attempting theta or radial motion verify that all 3 phase LEDs of the T1 motor DS 1 DS 2 DS3 and all 3 phase LEDs of the T2 motor DS2 DS 4 DS6 are illuminated on the theta driver board 8 189 Command Reference Error Code Reference MagnaTran 7 1 User s Manual MN 003 1600 00 8 190 Error 10010 Error 10011 Error 10012 Error 10013 Error 10014 Error 10015 Error 10016 Error 10017 Error 10018 Error 10019 Error 10020 Error 10021 While attempting Z motion verify that all 3 phase LEDs of the Z motor DS1 DS2 DS3 are illuminated on the Z driver board Verify armset mounting bolts are torqued to 75 88 in lbs Verify armset is installed correctly Refer to Mount the Arm Set on page 3 23 Verify that no FETs of the theta driver board have shorted out For each FET apply an ohmme ter between pins 1 and 3 to verify resistivity If a FET has shorted out replace theta driver board Verify that the T1 T2 encoder values and T1 T2 Z sync phase values match those of the robot s Quality Report QR The OR is shipped with the robot or can be requested from Brooks Tech nical Support Issue the commands RQ ENCODER T1 ALL RQ ENCODER T2
436. n the preceding display presented on the CDM the _ indicates that the CDM will display the selected station arm and value for each setting and the gt indicates that pressing the lt CR gt key will cause the next set of menu selections to be displayed The ASSIGN mode will set and store value in one step Using Learn mode If the values of the station parameters are not known the operator can use the Learn option to move the robot arm into position and then Store that position value in EEPROM NOTE The radically different motion profiles followed in Learn mode compared to any other motion may result in the a slight variation between the actual location of the position learned and the same position attained via a different motion command Therefore the operator should issue a Move Station command to the position just learned and adjust it if necessary using Assign Pitch and Number of Slots cannot be learned they must be Assigned Using Wafer Sensor Setup The operator can enter one or more of the variables or by pressing All can have the CDM prompt for each of the required values The operator can enter the number of the Wafer Sensor to be associated with a station The location of the sensor extend or retract is then specified Finally the active state high or low for the sensor is specified Example of Teaching a Station with the CDM 6 82 Suppose the operator knows that Station 3 is located at about
437. n volatile memory Parameters saved to non volatile mem ory will be restored after a power interruption Software commands consist of a series of ASCII fields The number of charac ters in each field is flexible Therefore a space ASCII 32 indicated in the fol lowing example by lt gt is required to indicate the end of one field and the beginning of the next A carriage return ASCII 13 indicated in the following example by lt Return gt is required to indicate the end of the command The commands are not case sensitive the robot accepts either upper or lower case NOTE Spaces and carriage returns will not be indicated within the command ref erence The use of a space will be implied by a separation between fields and a carriage return is implied at the end of every string Example PICK lt gt 1 lt gt SLOT lt gt 2 lt gt ARM lt gt B Return This command instructs the MagnaTran 7 robot to pick a wafer from station 1 CM1 slot number 2 using arm B If the arm is not specified the robot will use Arm A as the default arm Note that the example just given shows all spaces as lt gt and the carriage return as lt Return gt all remaining examples within this manual will show all spaces as with a carriage return implied at the end of the command The number and order of the variables and data fields within a command is optional However most commands do require at least one data field
438. nce MagnaTran 7 1 User s Manual DIO Stop MN 003 1600 00 DIO Stop Purpose Turns off Discrete I O DIO control interface of robot Format DIO STOP Description The MagnaTran 7 robot may be controlled and monitored using discrete I O lines instead of using the serial communications link This command enables all serial con trol functions and disables Discrete I O control See Also DIO START Example The following example turns off the Discrete I O control function DIO STOP Brooks Automation 8 28 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 EEPROM Reset EEPROM Reset Purpose Re initializes the database N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format EEPROM RESET Description This command resets or changes various robot parameters and clears the database checksum error All user defined and mapped I O will NOT be removed NOTE This command is sometimes used when installing a new version of firmware or replacing specific hardware All instructions for this command are not included in this manual Brooks Automation Revision 2 2 8 29 Command Reference MagnaTran 7 1 User s Manual Find Encoder MN 003 1600 00 Find Encoder Purpose Finds the encoder amplitude for T1 and T2 position encoders N CAUTION This command is NOT
439. ned setup for the specifed sensor including station assign ment usage type active state and the sensor coordinates in the chamber to the robot s non volatile memory The STORE STNSENSOR command is used to save a sensor to a specific robot station and for a specific operation Before storing the sensor data the sensor must be fully configured if it will be used for wafer detection or for triggering servo position data collection By specifying specific parameters only those parameters will be updated If the sensor is a referenced motion sensor R must be stored otherwise an error will be issued NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory Example STORE STNSENSOR 3 ARM B TYPE ACT SEN Brooks Automation Revision 2 2 8 169 Command Reference MagnaTran 7 1 User s Manual Store Sync Phase MN 003 1600 00 Store Sync Phase Purpose Stores the Sync Phase for the T1 T2 and Z motors N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format STORE SYNC PHASE ALL T1 T212 Arguments ALL Stores all values T1 The T1 value T2 The T2 value Z The Z value Description This command is used to store the current value of the motors 71x DANGER This command is NOT used in the no
440. ng operated by a remote controller such as a CTC the robot will respond to the software commands it receives through the serial communications link When being operated by the CDM the robot responds directly to the commands entered manually on the CDM A typical sequence of events for the MagnaTran 7 Robot with the Z Axis option using remote control through the serial communications link might be as follows Command MOVE R ABS 575500 T ABS 97000 Z ABS 21000 ARM A sent to robot Robot moves Arm A to specified location Ready string _RDY returned by robot Command RQ POS ABS A ALL sent to robot Response POS ABS A 575500 97000 21000 returned by robot A typical sequence of events for the MagnaTran 7 Robot without the Z Axis option using direct control through the Control Display Module might be as follows Command Move selected e Arm A Selected e Location selected T Axis selected and 97 entered Robot moves to specified location R Axis selected and 575 5 entered Robot moves to specified location Command Info selected Arm A Selected Location selected Response R 575500 T 97000 displayed Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Documentation Overview Documentation Overview The documentation provided with the MagnaTran 7 Robot consists of this manual which provides a complete docu
441. ng the command RO COMPATIBILITY ALL If not set and store the cor rect compatibility by issuing the commands SET COMPATIBILITY HALT MAG6 and STORE COMPATIBILITY HALT MAG6 Verify that the Power Pak interlocks have been properly set by issuing the command RQ IO MAP ALL If not the Power Supply interlocks can be set and stored using the MAP command Refer to Map on page 8 44 For additional troubleshooting steps refer to Operational Interlock Related Issues on page 10 20 Brooks Automation 10 24 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Troubleshooting Power Pak Related Issues PowerPak Related Issues Arms Drift After the Robot is Halted By The Power Supply After a Loss of Power Verify that the robot s HALT compatibility is set correctly with the command RQ COMPATIBILITY ALL The robot will deservo the Theta and Z Motors and engage the Z Brake after the HALT command has been issued l Change the HALT compatibility with the command SET COMPATIBILITY HALT MAG6 and store it with the command STORE COMPATIBILITY ALL NO What is the HALT Compatibility Set To The robot will remain servoed in all axes after the HALT command has been issued y Was Issue Resolved YES Verify that the Power Pak s interlocks have been set properly with the command RQ IO MAP ALL
442. nous rotational movement of the T1 and T2 drives in the same direction Due to the unique design of these drives there is no limit to the rotational movement of the arm Arm motion in the R axis radial extension is also provided by the T1 and T2 drives However R motion is accomplished by rotating these drives in opposite directions causing the arms to extend or retract depending upon the direction of rotation The MagnaTran 7 robot arms are actuated by two direct drive servo motors with inde pendent coaxial shafts providing full two axis movement of theta unlimited arm rotation and radial extend and retract motion Z vertical axis motion of the arm set is accomplished by raising and lowering the drive motor assembly using a direct drive servo motor The unique design of the robot enables the drive shafts to interface with the arms without the use of rotary seals and allows unlimited motion in the T rotational axis Brooks Automation Revision 2 2 4 9 Subsystems MagnaTran 7 1 User s Manual Mechanical System MN 003 1600 00 BiSymmetrik Dual Pan Arm Set Frogleg Single Pan Arm Set Figure 4 4 MagnaTran 7 Arm Set Types Brooks Automation 4 10 Revision 2 2 MagnaTran 7 1 User s Manual Subsystems MN 003 1600 00 Electrical System Electrical System The MagnaTran 7 electrical system complies with all CE specifications RFI EMI ESD and SEMI 82 93 The board set includes communications motion control power contr
443. ns Mode MON M B Command Flow Sequential SET COMM FLOW STORE COMM RQ COMM FLOW Mode SEQ FLOW Terminal Echo ON SET IO ECHO Y STORE COMM RO COMM ECHO Mode ECHO Linefeed After ON SET COMM LF ON STORE COMM LF RO COMM LF Carriage Return Error Reporting 2 SET COMM STORE COMM RQ COMM Level ERRLVL 2 ERRLVL ERRLVL Data Reporting REQ SET COMM STORE COMM RQ COMM DREP DREP REQ DREP Terminal Echo VT5 SET STORE RQ Compatibility COMPATIBILITY COMPATIBILITY COMPATIBILITY ECHO VT5 ECHO ECHO Theta Coordinate VT5 SET STORE RQ Compatibility COMPATIBILITY COMPATIBILITY COMPATIBILITY COORDT VT5 COORDT COORDT Theta coordinate system defines theta HOME for Arm A as 0 Arm B as 180 HALT Compati VT5 SET STORE RQ bility COMPATIBILITY COMPATIBILITY COMPATIBILITY HALT VT5 HALT HALT Brooks Automation Revision 2 2 11 13 Appendices Appendix D Robot Compatibility MagnaTran 7 1 User s Manual MN 003 1600 00 Table 11 6 Standard VT5 MT5 Compatibility Command to Command to Command to Parameter T in Stameter TYPE setting SET STORE REQUEST Capture VT5 SET STORE RQ Response Com COMPATIBILITY COMPATIBILITY COMPATIBILITY p atibility CPTR VT5 CPTR CPTR Wafer Speed VT5 SET STORE RQ Compatibility COMPATIBILITY COMPATIBILITY COMPATIBILITY SPEED VT5 SPEED SPEED Sets the speed for MOVE and GOTO action commands to be com patible with VT5 action is performed at
444. nsion T rotational and the Z vertical axis values for each end effector at each station should be recorded for each type of wafer that will be used with the system NOTE The R value and possibly the other values may change for different size wafers Tables are provided in Appendix E User Setting Tables for recording station values Brooks Automation 6 18 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Theory of Operation Factory Set HOME Position The HOME position is set by Brooks Automation The HOME position is the absolute reference system for the robot The Brooks HOME position for the standard drive ori ents the robot arms 90 counter clockwise from the interface panel as shown in Figure 6 7 Two alignment pins located on the flange used for the alignment of the robot in a Transport Chamber are in the same orientation to the I O Panel Alignment Pins Figure 6 7 Factory Set HOME Position N CAUTION Other HOME positions may be configured at the factory for custom applications Brooks Automation Revision 2 2 6 19 Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 The flange may also be configured 180 out of this standard location without parts change This may be done to allow user access to the I O Panel The location of Pan B in this configuration is 270 counter clockwise from the I O Panel 90 counter clockwise from the mounting f
445. nt the Arm Set MN 003 1600 00 Issue the following command SET ARMS ON 10 Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arms should be 180 apart This can be verified by observing the wrist plates relative to the center of the robot If vibration is observed or the alignment is off the radial home must be reset Follow the procedure Reset the Home Position to the User Preference on page 9 73 Mount CDM 1 Ensure the arm state of the robot is off Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON NO 2 Move the robot to the mount position Enter the following path SETUP CONFIG ROBOT ARM MOUNT ARE THE ARMS CURRENTLY ON NO When the robot is in the mount position the 4 locating pins of the robot shafts should be oriented as indicated in Figure 3 9 3 Disengage the robot servos Enter the following path SETUP CONFIG ROBOT SET SERVOS OFF 4 Install the arms on the robot For the following procedure the red arm mounting fixture must be installed on the arm set N CAUTION The mounting fixture is an installation fixture It does not provide precise alignment for the Radial Home If the arms are being Brooks Automation 3 40 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set changed Brooks Automation recommends r
446. nt wafer slippage and loss of repeatability Required Tools e none Follow these procedures to inspect the Pads of the End Effectors 1 Extend the end effector into the load lock or process module 2 Visually inspect the surface of the pads for excessive wear or damage If any of the above inspection points report a discrepancy refer to End Effector Pad Removal Replacement on page 9 32 for the procedure for replacing Kalrez or Adhe sive backed pads Brooks Automation Revision 2 2 9 11 Maintenance and Repair MagnaTran 7 1 User s Manual Connection Inspection MN 003 1600 00 Connection Inspection Inspect all connections to the robot PowerPak and power supply Plugs should be fully seated and mating hardware tight Any locking devices should be in place Required Tools none Brooks Automation 9 12 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Robot Cleaning Procedure Robot Cleaning Procedure Occasionally the MagnaTran 7 will need to be cleaned This could be done as a part of normal servicing or to remove contaminates deposited on it from the process or other sources Required Tools Isopropyl Alcohol 100 DI Water Cleanroom Wipes Cleaning Procedure N DANGER The MagnaTran 7 may be used in an environment where hazardous materials are present and surfaces may be contaminated by those materials Refer to the facility s Material Safety Data Sheets for those
447. nted in the following table Table 11 22 Power Pak Inputs J6 Pin Generic Function Hex Address 1 24 V robot 1 AC FAIL 0x1000 3 BATT LOW 0X2000 4 5 Return Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 12 Overview Attached Drawings This section provides an Illustrated Parts Catalog IPC and lists any additional docu ments provided with the robot These documents are provided to allow service per sonnel to identify specific parts within the product All additional documents are found at the end of the manual zt CAUTION All drawings and other related documents provided with this manual are generic and may not reflect specific builds of the robot Refer to the QR shipped with the robot and the Purchase Order for the exact part number or to obtain a complete and current set of drawings and docu ments contact Brooks Customer Support Contents Illustrated Parts Catalog iis secet eth E RR RR RE Iis 12 2 Battery Pack Iustallalolia 3t Sekxii dae eXEbRhbercddaddaRex Ada 12 2 Protective Cover Removal oeeeeeeee titat ehe 12 4 Lt SWC ekesperi rdi Edu Ed aur Ed det auanin kody Gab hs qus 12 6 Lower Cover Mount I O Board Removal 4 0664603s5040s0000 12 8 Theta Board Removal 1234 24044244 Sdcreb Equos REGIE De ES Ee ERS 12 10 Personality PC104 Board Removal 1422 22 cadat ha AREA Ara 12 12 Z Driver Board Removal eeeeeeee
448. ntly defined load NOTE The LOAD command may be used to define the load status of the robot s arms before executing the GOTO command The software applies the following limit checks Theta position between the minimum and maximum allowed 0 and 360 Z position between the minimum and maximum allowed based on the arm geometry R position between the minimum and maximum allowed based on the arm geometry For multi axis moves the following sequence of checks and motions occur in the order given for the currently defined load If N is specified station or if SLOT is specified or if R RE retract is specified the arm will retract if it is not already retracted The rotation axis variable N and the Z axis variables SLOT and Z will move to their target locations simultaneously If N is specified and SLOT is not the slot is assumed to be 1 If N is specified and Z is not the position is assumed to be Down The arm will extend if so commanded If no arm is specified ARM A will extend This means that unless the arm is explicitly commanded to extend as part of a GOTO command that specifies a Station or Slot number it will remain in the retracted position This is true even if the arm is already at the specified Station or Slot number See Also MOVE PICK PLACE SET STNSENSOR Wafer Presence Sensors Radial Motion on page 6 38 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command R
449. nual Manual Notation MN 003 1600 00 Software Notation The software notation system includes identification of key strokes naming conven tions input requirements and system responses The responses can be physical actions performed by the robot or responses from the robot s internal firmware This notation system is used when describing software communications to simplify descriptions of user actions or input and robot responses The notation system includes the following typographical and presentation conventions Keystrokes Keystrokes of specific keys are identified by text in carets lt gt Ex Press lt Enter gt Press the Enter or Return key on the keyboard A lt Space gt B Press the A key then the spacebar then the B key lt Ctrl C gt Press and hold the Control key then press the C key System Responses All system responses are described with text in italics Ex Thesystem will prompt for input Entering Information Information data can be specified for entry in several ways Specific Entries Text in capital letters defines the exact text required as an input to the system Ex MAP The system requires MAP be entered exactly as shown Italicized text defines the name of the variable required as an input to the system Enter the value for that variable Ex GOTOstn Type GOTO exactly as shown and then enter the station number GOTO 1 s rd Text in parenthesis separated by a vertical line def
450. o be to be executed at high speed which may cause wafers to slip or break See Also GOTO MOVE PLACE RQ POS DST Wafer Presence Sensors Radial Motion on page 6 38 Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot will retract the arm rotate to station 2 extend the arm raise the arm picking up the wafer and retract the arm NOTE Since the slot and arm are not specified the robot will default to slot 1 and arm A PICK 2 Brooks Automation Revision 2 2 8 55 Command Reference MagnaTran 7 1 User s Manual Pick with an Offset MN 003 1600 00 Pick with an Offset Purpose Causes the 3 axis arm to pick a wafer from a specified station and slot number with a specified offset Format PICK station SLOT slot ARM arm STRT NR R11 R2 ENRT NR I R11R2 RO r offset TO t offset Arguments station The number of the station from which to pick Range 1 16 slot The number of the slot from which to pick At a multi slot station the slot number must be specified only to target a slot number other than one arm The arm A or B which will perform the pick The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional STRT Start retract location NR No retract R1 Normal retract R2 Second retract location default R1 ENRT End retract location NR No retract
451. odule RE name Sensor at the retracted position in the Transport Chamber name In all cases name specifies the existing name of the sensor assigned pre viously using the command Map on page 8 44 Description The SET STN OPTION command requires the station number and a variable to assign the related operation to a specific station Two types of assignments are allowed with this command Brooks Automation Revision 2 2 8 143 Command Reference MagnaTran 7 1 User s Manual Set Station Option MN 003 1600 00 1 This command is used to set the amount that the substrate may be moved on the end effector during a PICK or PLACE operation at the specified station 2 This command is used to define the location and operation of all sensors linked to the robot and used in the system where the robot is installed NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory See Also Operational Interlocks on page 6 23 for a complete description of how to setup this command and examples Request Station Option on page 8 106 Store Station Option on page 8 167 Example Both commands below are identical and set the station options at station 4 for arm A for sensor number 17 in the extended position to active high SET STN 4 ARM A OPTION WAF SEN EX STN 4 WAFR SEN Or SET STN 4 A OPTION WAF SEN EXSTN 4 WAFR SEN The next command sets the station
452. ol and discrete I O monitoring and control Additionally the electrical system provides all external connections for the robot including power and I O The robot is comprised of five major circuit boards as follows PC104 CPU Supervisor Board Personality Board Motion Control Computer e T1 T2 Axis Driver Board Z Axis Driver Board optional I O Interface Board PC104 CPU Supervisor Board The Supervisor SUP board is a 33 or 44MHz 386X based PC104 processor module This embedded computer supports Brooks Automation robot specific application software Upgrades to the firmware are performed through the interface board serial port onto a FLASH memory disk The Supervisor board s primary function is user interface and general control The Supervisor board is mounted and interfaced directly to the MCC Personality Motion Control Computer Board The Motion Control Computer MCC board a 60MHz DSP based motion control computer governs the motion of the robot arms and provides access to time sensitive I O functions such as wafer sensing The SUP board provides command information to the MCC and the MCC provides status and error information to the SUP board T1 T2 Axis Driver Board and Z Axis Driver Board The T1 T2 Axis Driver Board and Z Axis Driver Board if equipped provides power to the drive motors Main power is supplied to the T1 T2 board which distributes this power to the T and Z drive circuitry This board also
453. olts peak 60 volts DC or 240 volt amps in dry locations Type 4 Equipment is energized Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible Potential exposures are greater than 30 volts RMS 42 4 volts peak 60 volts DC or 240 volt amps in dry locations Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Safety MN 003 1600 00 Laser Hazards Laser Hazards The MagnaTran 7 does not use laser light during operation However low level laser light may be used and located in other devices within close proximity of the robot Other Brooks products containing these laser emitters produce low power visible red light Be aware of the lasers maximum power output and wavelength This informa tion is found in the Brooks equipment User s Manualin the safety section Under nor mal operation no hazardous levels of laser radiation emanate from the chamber The beam is safe for brief viewing but can cause damage to the eyes if viewed directly for long periods The proper precautions for operating and servicing lasers must be observed Any precautions specified within the facility where the robot is being used must also be observed AA WARNING Do not look directly at the laser beam for extended periods of time or permanent eye damage may result The following describes laser classifications general safety issues and laser handling precautions Laser diodes have three properties tha
454. ommand Description Page CHECK LOAD Checks for wafer presence 8 23 RO R MT SENSE Requests the sensor window limits of the 8 98 LIMITS Radial Motion Sensor SET R MT SENSE Sets the sensor window limits of the Radial 8 138 LIMITS Motion Sensor STORE R MTSENSE Saves the sensor window limits of the Radial 8 163 LIMITS Motion Sensor GOTO MAT Moves arm to a location in station coordi 8 33 nates RO STNSENSOR Returns the station sensor parameters 8 108 SET STNSENSOR Define the setup for the specified sensor 8 147 including station assignment usage type and active state STORE STNSENSOR Stores the current sensor information 8 169 SET INTLCK Enables or disables interlocking 8 128 Table 8 10 Compatibility Commands Command Description Page SET Allows backward compatibility of Appendix D Robot COMPATIBILITY command usage for the MagnaT Compatibility ran 6 or the VacuTran MultiTran 5 RO Requests the current compatibility Appendix D Robot COMPATIBILITY mode Compatibility STORE Stores the current compatibility Appendix D Robot COMPATIBILITY mode Compatibility Brooks Automation Revision 2 2 8 19 Command Reference Command Quick Reference Tables MN 003 1600 00 MagnaTran 7 1 User s Manual 8 20 zx CAUTION The MagnaTran 7 is setup at the factory according to user specifica tions The following commands are not used in the normal setup or the normal operation of the robot Brooks Automation recommends contacting Br
455. ommand Reference MagnaTran 7 1 User s Manual Store Load Mode MN 003 1600 00 Store Load Mode Purpose Stores the load mode Format STORE LOAD MODE Description This command stores the mode for reporting the load status of the arm The load sta tus is used to determine the speed of all motion commands NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also RQ LOAD SET LOAD SET LOAD MODE RO LOAD MODE Example STORE LOAD MODE Brooks Automation 8 162 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Radial Motion Sense Store Radial Motion Sense Purpose Stores the size of the sensing window for Radial Motion sensors Format STORE R_MT SENSE LIMITS INNER OUTER WAFER SIZE Description Stores the current settings for the Radial Motion detection sensing limits These val ues along with the position where the R MT type sensor is located in the chamber determine the sensing window Examples To stores the inner and outer limits of the Radial Motion sensor STORE R MT SENSE LIMITS INNER OUTER See Also See Set Radial Motion Sense on page 8 138 for instructions on the defin ing the Radial Motion Sensor limits and Set Station Sensor on page 8 147 for instructions on the defining the Radial Motion Sensor location Brooks Automation Revision 2 2 8 16
456. ommunications connections to the robot Z N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 2 Remove the protective covers as shown in Figure 12 2 ran CAUTION Observe proper ESD precautions when handling any electronic device 3 Remove the Lower Cover Mount Assembly Loosen the lower captive screw of the I O board Loosen the three upper cap Brooks Automation Revision 2 2 9 43 Maintenance and Repair MagnaTran 7 1 User s Manual Z Driver Board Replacement MN 003 1600 00 tive screws of the Lower Cover Mount Assembly See Figure 12 4 Gently allow the Lower Cover Mount Assembly to drop down Disconnect the following cables from the Z Driver printed circuit board Z axis motor drive J4 Z axis motor Hall effects P4 Z axis brake J3 upper limit switch P2 lower limit switch P3 Z home P5 and T1 T2 board J2 Loosen the captured screws 2 places that mount the Z driver board on the right side Loosen the M3 hardware on the left side 2 places and slide out the Z Driver board See Figure 12 7 Disconnect the Z Driver board from the Personality board Replacement Procedure 1 2 8 Connect the Z Driver Board P1 to the Personality Board J7 Slide the Z Driver Board under the loosened hardware Install the Z Driver Board by securing all hardware 4 places Connect the cables Route
457. on G 8 Revision 2 2 MagnaTran 7 1 User s Manual Glossary MN 003 1600 00 SEMI MESC Serial I O Servo Set Command Shoulder SEMI Modular Equipment Standards Committee Serial I O allows a Host Controller to communicate with the product using the commands detailed in Chapter 5 The characters in each com mand are converted to sets of binary bits 1s and 0s and the bits for each character are transmitted down a wire in single file Typically no additional control or handshaking wires are used The control loop that governs the motions of the drive motors A command which sets a parameter in RAM In general set commands can have their status requested with corresponding request commands and can have their values stored to the EEPROM with corresponding store commands On the robot arm the joint located at the drive shaft Single Pan Arm Set The Brooks Automation frog leg arm set with one end effector Slit Valve Slot Slot 0 Slot Valve SLPM SMIF SPS SSO Standard Order Station See Slot Valve One of the positions on the inside of a substrate cassette that holds sub strates Usually substrate cassettes have 25 slots The slot number of the home position See Home The valve located at a Transport Module facet that isolates the TM from the module connected to the facet Standard Liters Per Minute 28 SLPM equals 1 CFM Standard Mechanical Interface Faci
458. on Maximum RCL Retracted Arm Clearance BiSymmetrik Arms transporting a 300mm wafer Figure 3 2 Arm Space Requirements Brooks Automation 3 4 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Site Requirements Environmental Requirements The site for the MagnaTran 7 Robot must meet the environmental requirements spec ified below to ensure proper operation of the robot Maximum Exposure to drive 80 C Maximum Exposure to Arm and end effectors 120 C Humidity 50 to 80 relative non condensing Altitude The robot will operate in altitudes up to 1000 meters above sea level Lighting No special lighting is required to operate the MagnaTran 7 which normally is partially enclosed in a vacuum environment chamber Standard lighting provided in the cleanroom environment where the robot is installed is suf ficient for proper operation and maintenance Electrical The MagnaTran 7 robot requires a single electrical power connection as specified below The source should be line isolated Refer to Figure 5 2 on page 5 3 Two Axis Robot 24 VDC at 20 Amps Three Axis Robot 24 VDC at 20 Amps NOTE The current usage is dependent on the robot s application Refer to Power Connections on page 5 3 for complete specifications of the power con nections Service to the robot should have the appropriate fuse or circuit breaker rating These current requirements are maximum values 20 amps The actu
459. ons for the robot and its subsystems are detailed below Robot Drive Operating Specifications R Radial Axis Range Dependant upon arm set being used See Brooks Automation Specification Sheets or Brooks Automation Installation Drawings 802 for model dimensions Repeatability 20 05 mm 30 T 8 Rotational Axis Range Infinite rotation Repeatability 0 003 30 Z Vertical Axis 3 Axis models only Range 35 mm or 25 mm Repeatability 20 05 mm 30 Placement Repeatability 0 1mm TIR in horizontal plane at appropriate speeds Temperature Range Maximum Operating 50 C Maximum Exposure drive 80 C Maximum Exposure mounting flange 120 C Exposed Materials Aluminum Stainless Steel AM350 bellows Brooks Automation 1 12 Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Specifications Leak Rate 1 x 10 std cc sec He Base Vacuum 5 x 10 Torr potential Mechanical Specifications Weight of Drive without arms 2 Axis 21 kg 46 5 lbs 3 Axis 29 5 kg 65 lbs Mounting Top Mount Flange Brooks Automation MultiTran 5 MTR 5 compati ble Electrical Specifications Input Power 24 volts DC 10 20 amps 480 watts NOTE Current usage is dependent upon the robot s application Contact Brooks Automation Engineering for requirements Communications Specifications RS 422 RS 232 for control interface or remote linked service terminal SIO1 Dedicated RS 23
460. ontrol of the robot See Also Set DIO Output on page 8 125 Example The following example requests the current Discrete I O Output function mode and the response reports enabled Command RQ DIO OUTPUT Response DIO OUTPUT YES Brooks Automation Revision 2 2 8 75 Command Reference MagnaTran 7 1 User s Manual Request History MN 003 1600 00 Request History Purpose Requests the history of events performed by the robot Format RQ HISTORY CMD ERRI TOT records Response Commands CMD date command accepted time command accepted command received Errors First line ERR date time command being executed at time of error Second line System state to indicate where failure occurred Third line Error number description of error Forth line Cycle count position of each axis at time error occurred Total Errors for each axis TOT date of last error time of last error axis letter total number of errors Arguments CMD non action commands SET and STORE ERR errors TOT total number of motion errors for each axis records number of records to be displayed Description Information requests are treated independently to allow for a maximum amount of information for each type The argument for number of records to be displayed is optional If no value is entered all available records will be displayed If a 1 is entered only the last logged Brooks Automation 8 76 Revision 2 2 MagnaTran 7 1 User
461. ooks Automation 8 174 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Workspace Mode Store Workspace Mode Purpose Stores to nonvolatile memory the current setting of the work space mode Format STORE WSPACE MODE Description NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also Set Workspace Mode on page 8 155 Brooks Automation Revision 2 2 8 175 Command Reference MagnaTran 7 1 User s Manual Transfer MN 003 1600 00 Transfer Purpose Transfers a wafer from one specified station to another specified station Format XFER ARM arm station a station b Arguments ARM arm The arm A or B which will perform the transfer The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional station a Station number for pick operation station b Station number for place operation Description This function picks the wafer from one station and places it to another station Use slot 1 of multi slot stations NOTE The XFER command is meant to be used with robots that have the Z Axis option installed Using the XFER command with 2 Axis robots will result in an error being generated See Also GOTO MOVE PICK PLACE RQ POS DST Example In the following example arm A default is curr
462. ooks Technical Support before using these commands Table 8 11 Setup Commands Command Description Page CONFIG ROBOT Loads application specific information 8 25 APPLIC EEPROM RESET Resets or changes various robot parameters 8 29 to defaults and clears the database checksum error FIND ENCODER Collects amplitude data for T1 and T2 posi 8 30 tion encoders FIND PHASE Performs a Find Phase on individual or all 8 31 linkages FIND ZERO Changes the zero or Home reference for the 8 32 Theta and or Z axis RO HOME POS Z Requests the Z axis Home position 8 79 RO MOUNT Returns the setting for the height to which 8 89 the arm moves in response to the MOUNT command RQ SYNC PHASE Requests the Sync Phase for the T1 T2 and Z 8 110 motors RQ SYNC ZERO Requests the zero or Home reference for the 8 108 Theta and Z axes SET ARMS Changes the robot configuration to shaft 7 8 119 or original values SET HOME POS Z Changes the Z axis Home position 8 127 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Command Reference Command Quick Reference Tables Table 8 11 Setup Commands Command Description Page SET MOUNT Sets the height to which the arm moves in 8 137 response to the MOUNT command SET SYNC PHASE Sets the Sync Phase for the T1 T2 and Z 8 149 motors SET SYNC ZERO Sets the zero or Home reference for the 8 150 Theta and Z axes SET ZBRAKE Controls the brake for the Z drive 8 1
463. open Current Configuration File error In any case after an upgrade or downgrade the correct procedure to commission the robot is as follows a Execute an EEPROM RESET b When the robot comes back with a prompt configure the application of the robot again i e CONFIG ROBOT APPLIC F c Reset the robot using the RESET command or power cycle d When the robot comes back with a prompt it is ready for service NOTE Some previously stored information may need to be re entered depending upon the 9 86 age of the previous software version Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 10 Troubleshooting Overview Troubleshooting problems that might occur with the Brooks Automation MagnaTran 7 Robot is a two step process The first step is the initial troubleshooting of the robot which is used to determine the specific area where the problem exists The second step is to is to isolate the problem within the specific area identified during the initial troubleshooting Contents JupubleshopEne DOVePIONW arua dad d RC Hara ER CIV DERE Wa Kd va 10 2 Brooks Automation Revision 2 2 10 1 Troubleshooting Troubleshooting Overview MagnaTran 7 1 User s Manual MN 003 1600 00 Troubleshooting Overview Depending on the error type three troubleshooting options are described 1 10 2 Troubleshooting Specific Error Codes Failures that generate an error code identified by
464. option at station 4 for arm A for a 25 mm 001 in movement short of the station during a PLACE command was issued SET STN 4 ARM A OPTION SAFETY 250 Brooks Automation 8 144 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Station Option VIA Point Set Station Option VIA Point Purpose Sets for the specified station the VIA point for Off Center PICK and PLACE func tions The VIA is defined as the point which the end effector moves go through to per form a Compound Move curved move Format SET STN station ARM arm OPTION VIA POST POSR value Arguments station Station number Range 1 25 arm Arm descriptor Range A B Default A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional POST value The theta coordinate of the VIA point in millidegrees POSR oalue The radial coordinate of the VIA point in microns A non zero value for POSR causes Compound Moves to occur for the designated station Setting this value to zero causes only straight moves to occur for the designated station NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Description This command is used with additional stations setting to perform compound moves rather that traditional pure radial moves by introducing a VIA point This point acts as a calculation from which the end effector m
465. option sets the communications to checksum each received command The checksum is calculated for each character of the command string There should be no space between the last character of the command string and the checksum value The response similarly is supplied with a checksum The checksum algorithm starts with a zero value and adds the ASCII value of each character of the string to be checked During the summa tion process any overflow over 255 is ignored To turn off the checksum the proper checksum must be supplied e6 in low ercase as shown in the following example SET COMM CHECKSUM offe6 Data Reporting VT5 format only Automatic data reporting applies to the robot s movement in the station coor dinates In AUT mode the the robot will automatically report the statio posi tion for each PICK PLACE or XFER command The condition for the auto response generation is a change in the state of the robot arm location in terms of station coordinates during the commands The AUT response returns a string consisting of 14 characters including spaces on every change in state of the robot arm location in terms of station coordinates as follows EX I RE stn ssss slot UP DN where EX RE EX Extend or RE Retract stn decimal station number ssss slot number Brooks Automation Revision 2 2 8 123 Command Reference MagnaTran 7 1 User s Manual Set Communication MN 003 1600 00 UP DN Z location NOTE Set co
466. or 730 Error 731 Error 732 Error 733 Error 734 Brooks Automation Revision 2 2 Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Wafer sensed Ensure slot in VCE or process module is empty prior to issuing PICK PLACE GOTO XFER command Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Slot valve closed prior PICK PLACE GOTO XFER Ensure slot valve is open prior to issuing PICK PLACE GOTO XFER command Check slot valve for proper operation Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Slot valve not open Ensure slot valve is open prior to issuing PICK PLACE GOTO XFER command Check slot valve for proper operation Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Possible material on arm Pick failed Ensure wafer sensors are operating properly Ensure slot valve is operating properly Ensure slot valve is open prior to issuing PICK PLACE GOTO XFER command Check host controller software Refer to Operational Interlock Related Issues on page 10 20 Placed failed Ensure wafer sensors are operating properly Ensure slot valve is open prior to issuing PICK PLACE GOTO XFER command Check host controller software Refer to Operational Interlock Related Issues on page 10 20 RE wafer sensor error prior to PLACE No Wafer Sensed RE w
467. or command flow and Chapter 6 for opera tion DIO Fault Conditions A motion error on any of the three servos will trigger a latched clearable fault condi tion Common causes of obstruction during extension include a closed valve improper station configuration or improper sequencing Take all possible precau tions to avoid obstruction of the arm during rotation since damage to the arm or the robot mechanism may result Permanent damage to the robot is unlikely but the wafer should be checked for damage after any motion error has occurred Brooks Automation Revision 2 2 6 45 Operation MagnaTran 7 1 User s Manual Discrete I O Control DIO MN 003 1600 00 DIO Start up To use the DIO control feature of the robot a DIO START command refer to DIO Start on page 8 27 must be executed from the serial communications link or through the CDM A four second delay during power up drives all outputs low and renders the DIO function as not available To end the use of the DIO control feature a DIO STOP command refer to DIO Stop on page 8 28 must be executed from the serial communications link or through the CDM If power is shut off after DIO mode is started in order to restart DIO mode a DIO STOP and then a DIO START must be issued through the serial interface or CDM to restart the discreet interface DIO Signal Definitions 6 46 The actual signal definitions of DIO control depends on the I O board type in the robot HIGH sid
468. or into the module and rest the tip of the dial indicator on the end effector to measure dip where indicated in Fig ure 7 2 being careful not to deflect the end effector 3 Jog the robot s arm in and out radial direction of the module while watching the reading on the dial indicator The dip is measured in two places The Brooks Automation 7 8 Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Adjusting the Robot s End Effector total dip is the sum of the dip measurements Record the measurement For example If the end effector s right fork has a total dip of 0 004 inches and the left for has a total dip of 0 002 inches then the total dip runout is 0 006 TIR If the end effector s right fork has a total dip of 0 004 inches and the left fork has a total dip if 0 002 inches then the total dip runout is 0 004 TIR Position the tip of the dial indicator on the end effector to measure twist where indicated in Figure 7 2 being careful not to deflect the end effector Jog the robot s arm right and left theta motion in the module while watching the reading on the dial indicator Record the measurement Add the total dip and twist runout of the end effector If the total is less than the allowable TIR as indicated in Limits and Tolerances above then the end effector levelness is within specification If the total runout is more than the allowable TIR then the end effector levelnes
469. osition at 270 the BTO Wafer Transfer Plane to 200 microns above the Home position and the down position to 0 200 microns below the Wafer Transfer Plane The last two numbers indicate that it is an unslotted station only one slot and therefore that the pitch is zero SET STN 4 A ALL 46843 27000 200 200 1 0 NOTE The default factory setting for all stations is T Z 0 R the Retracted position Brooks Automation Revision 2 2 8 141 Command Reference MagnaTran 7 1 User s Manual Set Station Option MN 003 1600 00 Set Station Option Purpose Sets the various optional station related parameters Format SET STN station ARM arm OPTION SAFETY value PUSH value Or SET STN station ARM arm OPTION SBIT SVLV SEN name RETRACT_SEN namelEX ENABLE name VLV_SEN name NONE name Or SET STN station ARM arm OPTION WAF SEN EX name RE name NOTE The preferred method for setting EX and RE wafer sensors is with the single step command Set Station Sensor on page 8 147 The SET STN OPTION command on this page requires two steps Arguments 8 142 station The number of the station for which parameters are being specified Range 1 16 ARM arm The arm A or B for which parameters are being set the default arm is A The ARM identifier is optional SAFETY value Specifies the distance in microns the end effector may move within the zone of a Process Module as shown in Figure 8 2 SAFETY The
470. ost controller software Refer to Operational Interlock Related Issues on page 10 20 Error arm load not what expected Verify robot application number is correct by issuing the command RQ CONFIG The correct application number can be obtained from the Quality Report QR that shipped with the robot or by contacting Brooks Technical Support Remove wafer and repeat robot move If the robot armset moves properly the wafer is too large for the robot application number servos Error obstruction encounter for axis Inspect for physical obstruction Reteach the station to ensure the end effector is not scraping a surface particularly VCE cas sette slots Inspect the Z Driver board If the part number is 002 4234 01 then verify that a resistor has been placed on the back of the board Request TSB 259 from Brooks Automation Technical Sup port Error Emergency Stop circuit is active Verify that one of the following Motor Interlock Bypass mechanisms is in place Motor Interlock Bypass Jumper Block located at designation J7 on the I O board part 8 191 Command Reference MagnaTran 7 1 User s Manual Error Code Reference MN 003 1600 00 8 192 Error 10030 Error 10031 Error 10032 Error 10034 Error 10035 Error 10036 number 002 3758 01 MISC I O connector pins 23 and 24 Error excessive current detected Warning Z Home Sensor position moved MCC MAP failed Error encoder min max value out of range Error bad sync
471. overs There are no user serviceable parts in the PowerPak Brooks Automation Revision 2 2 Operation MagnaTran 7 1 User s Manual PowerPak Power Fault Manager MN 003 1600 00 POWER Switch Circuit Breaker POWER TI e 2074 lt Fuse Holder INN e Bott o 7 Battery Low Indicator 24V Out The PowerPak contains sealed lead acid batteries Dispose of or recycle in accordance with federal state and local requirements 24V In CC J Figure 6 14 PowerPak Controls and Indicators Operational Interlocks 6 86 Two operational interlock signals are provided by the PowerPak and sent to the robot BATT LO UPS Monitors the status of the battery backup power in the PowerPak Active LO when battery voltage drops below 23 5VDC and an error signal is sent AC FAIL UPS Active LO when the conditions described in Operation above are encountered The robot comes to a controlled stop as quickly as possible regardless of the position of the robot arm after receiving the signal To implement the operational interlocks see Operational Interlocks on page 6 23 To remove or replace the PowerPak see Power Pak Replacement on page 9 63 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003
472. ow the transfer plane that becomes the down position location NSLOTS the number of slots assigned to this station PITCH the pitch in microns between slots NOTE At least one argument must be specified If the ALL argument is specified no other argument name may be specified Brooks Automation Revision 2 2 8 165 Command Reference MagnaTran 7 1 User s Manual Store Station MN 003 1600 00 Description The STORE command operates in the same manner as the SET command except that no data values for variables are specified The values residing in volatile memory are used that is the values from reset or power up or the values subsequently SET The STORE STN command requires the station number and one or more variable names ALL applies only to the variable names after the station number NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory N CAUTION If station coordinates are set using the SET STN or STORE STN com mands they should be verified before performing any wafer transfers to ensure accurate station definition See Also RQ STN SET STN Example If the station parameters have already been set using the ALL option provides a quick method of storing a station The following command stores the station 4 parameters identifying each parameter to be stored STORE STN 4 ARM A RT Z LOWER N SLOTS PITCH Th
473. own noise reduction techniques such as upgraded grounding on the electronics special designed external covers and compliant power connectors The MagnaTran 7 robot requires 24 VDC 21076 20 amps 480 watts for operation The actual power being drawn will depend upon which motors are being used How ever all power wiring must be capable of carrying the full load Internal power con verters produce the different voltages required by the robot CHASSIS f JUMPER GRN YEL e m J3 24V 20A POWER SUPPLY MN Oy a 5 EARTH GND 24V RTN O ro POWER PAK L IF PRESENT 24V RIN ry ag OR I TO ROBOT FACILITIES o AC LINE LINE Bs NEUTRAL 24V PWR EN id 24VDC EARTH qr d Be a gy The 24V power supply shall be isolated from the power input lines AC utility The protective earth conductor should be passed to the robot drive as shown Figure 5 2 Power Cable Installation N WARNING DO NOT connect or disconnect the power cable at the robot interface panel with the power on Damage to internal components may result Brooks Automation Revision 2 2 5 3 Operational Interfaces Power Connections MagnaTran 7 1 User s Manual MN 003 1600 00 MagnaTran 7 The power connection used is an ITT Cannon DBM9W4PK87 connec tor on the robot and t
474. page 9 69 for instructions on this command Brooks Automation Revision 2 2 8 31 Command Reference MagnaTran 7 1 User s Manual Find Zero MN 003 1600 00 Find Zero Purpose Changes the zero or Home reference for the Theta Axis N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format FIND ZERO position Arguments position The axis to be changed T Theta axis Description The MagnaTran 7 robot Home position may be changed from the factory settings to accommodate the users requirements NOTE The minimum Z value is established with a mechanical adjustment of the home flag See Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 for setting the Z value 7 CAUTION Once these positions are changed all stations must be retaught See Also Reset the Home Position to the User Preference on page 9 73 for instruc tions on the proper use of this command Brooks Automation 8 32 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Go To Go To Purpose Moves to a specified station referenced location This command performs all inter locking necessary to maintain safe wafer handling Format GOTO N station R EX RE Z UP DN SLOT num MAT ON OFF ARM arm Arguments station Specifies station number Range 1 16 The N identifie
475. phase offset value Error robot links are not yet defined Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 9 Maintenance and Repair Overview This chapter provides complete maintenance schedules and procedures for the Brooks Automation MagnaTran 7 Robot The first section of this chapter provides preventive maintenance schedules and procedures The second section of this chap ter provides repair procedures for subsystem repair and replacement Brooks Automation offers training for troubleshooting and repair of the MagnaT ran 7 Only qualified properly trained persons should perform any maintenance or repair procedures PINCH POINT HEAVY LIFTING ELECTRICAL HAZARD Crush points pinch points mechanical hazards electrical hazards shock hazards exist on the MagnaTran 7 robot The procedures in this chapter should only be performed by qualified persons Read and understand Chapter 2 Safety before performing any procedure Chapter Contents Preventive Maintenance Dehedule a ud vac aded d er d ee E ede e ba 9 2 Depa LhesOPIS e ooae do vose244 PDRIVECEERE3A AD QEECEL ERE TR HC UE LEE a 9 22 Repair Procedures NETTO 9 24 Brooks Automation Revision 2 2 9 1 Maintenance and Repair Preventive Maintenance Schedule MagnaTran 7 1 User s Manual MN 003 1600 00 Preventive Maintenance Schedule This section provides the schedule and procedures for routine preventive mainte nance of the MagnaTr
476. que E pe ipt Cu 2 10 Chemical HORIS Lak ead Podaa d E buie Ap ERqR RERO brRE dL PEdd P pU bid 2 11 Thermal Hazards esos eda E ERE ES XFRSXPIAUPIRT RIDERE EPPRHIEC EK EMEU P PE 2 12 Vacum FOURS MP PET 2 13 Fire anid Explosion Hagatds escena esaet o Ta TEKRPERR dX E A LIWA ER PRI ATE 2 14 Hope Pitas 2 a dEUCKE Ie d ERA RED UA E IE TEASE ERN Edd we drea br 2 15 hc iiu oro MUST 2 15 bo c 0o rorrrEDUTSUTRMDSPTT 2 15 Matrix of Emergency and Corrective Response Actions 00 005 2 16 Material Safety Informalion inea dence rr ER D REL EA datas eI temas 2 17 Helium Safety Information 140610024 exi daa X RETUEXAVIA PARRA canes 2 18 Isopropyl Alcohol Safety Information 1 6 i sescces eo rar RA 2 19 Nitrogen Safety InIDEIADOD 4a dead 4 99 Rd E ERR HE KOH EROHE RR ERE 2 20 Rrytox DuPont Safety Information iud d oe PER CHEER 2 21 Installation Die Roequirentenis ibopebra see erGe sreeeiees eesti aka eee eee 3 2 DME qvaebbedivedpbbebusdRRR RPeRQPRS EF RSEREPA TERRE ES PERS PER 3 2 Enytronmental Requirements 2222434 vex4 dada E XAEERTERA RAE AER VEA 3 5 1 11 9 T 3 5 C OBDHEURES OD 2a odd Ead ERR kri PEE EqUEPEdd PRdpap bad Ee 3 5 Unpacking and Inspection isse ebur s XR CE ERE AG EUER T Ea 3 6 Unpackins InsttucbolS 2d ee dokrcertrrh ehm re H ER n rae o Re aeria 3 7 Installahon DIOC UID a aces d m XR Rr art epe RT Pe RP ea 3 8 Prepare Surface Dor MOUNTING Lou 4as sedo date red tipa s vex EA vdd 3 8 Brooks Automation 11 Revision
477. r ARM R T Z LOWER NSLOTS PITCH NOTE Request commands display the current value stored in RAM See Also SET STN STORE STN Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot returns the absolute position definition of station 5 for the A arm RQ STN 5 A ALL STN 0001 A 0675000 180000 032500 005000 0001 000000 Brooks Automation Revision 2 2 8 105 Command Reference MagnaTran 7 1 User s Manual Request Station Option MN 003 1600 00 Request Station Option Purpose Requests for the specified variable the status of the various station related parame ters Format RQ STN station ARM arm OPTION SBIT SVLV SENIRETRACT SENIWAF SEN EX RE EX ENABLE VLV SEN RQ SIN station ARM arm OPTION SAFETY PUSH RQ SIN station ARM arm OPTION VIA POST POSR Response STN station OPTION sensor name state or STN station OPTION SAFETY PUSH or SIN station ARM arm OPTION VIA POST value POSR value Arguments station Field size 4 The number of the station for which parameters are being requested ARM arm Field size 1 The arm A or B for which parameters are being requested if unspeci fied the information will be returned for the default arm Arm A The ARM identifier is optional sensor The sensor type for which parameters are being requested See Table 6 5 for station sensor command types ie WAF SEN
478. r Types of pumps roughing pump high vacuum pump ultrahigh vacuum pump VCE Vacuum Cassette Elevator See Flevator Vent Valve Valve used to let atmospheric air or other gas into a vacuum system VTR Vacuum Transport Robot See Robot Wafer A thin silicon disk used for producing semiconductors See Substrate Wafer Present Sensor An optical sensor that senses wafer presence See Substrate Present Sensor Wafer Slide Out Detector An optical sensor that senses when any wafer is out of a cassette slot See Substrate Slide Out Sensor Wafer Transport Plane The plane in which wafers are transported horizontally by a sys tem s transport arm The plane is established by the surface of the trans port arm end effector which supports the wafer If the robot is capable of vertical motion the up position of the end effector is the wafer transport position In the VCE the wafer transport plane is usually established at approximately one half wafer thickness below the center line of the first slot See Substrate Transport Plane with substrate speed and acceleration See Low Speed without substrate speed and acceleration See High Speed WPS See Wafer Present Sensor Wrist On the robot arm the joint two bearings located at the attachment to the end effector WSO See Wafer Slide Out Detector WTP See Wafer Transport Plane Z Axis The axis of vertical motion For a robot it is the up and down of the Brooks
479. r is optional R EXIRE Specifies radial position of arm EX extended RE retracted Z UPI DN Specifies vertical deployment of arm UP up DN down SLOT num Indicates the slot to which the arm should move Use a value of 1 or 0 for a non slotted station 1 to n for a slotted station where n the num ber of slots previously set for the particular station MAT Indicates the expected material status during active wafer hand off This MAT option is only valid for R MT type sensors For sensor types other than R MT if the MAT command is used the error Active option is not supported with RE EX type sensors is dis played ON Material is present on the end effector OFF Material in not present on the end effector ARM arm Indicates the arm that should move Use a value of A the default or B If no arm is specified Arm A will move The ARM identifier is optional Brooks Automation Revision 2 2 8 33 Command Reference MagnaTran 7 1 User s Manual Go To MN 003 1600 00 Description 8 34 NOTE At least one of the optional arguments N R Z or Slot must be specified or the robot will return an error message Any or all of the data fields may be specified on a single command line If the arm is not already at a station N must be specified as part of the command Otherwise a not at station error will occur All motions will follow the speed and acceleration profile appropriate for the curre
480. r s Manual Control Display Module MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 5 22 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 6 Operation Overview This chapter provides complete operation directions for the Brooks Automation Mag naTran 7 Robot The operation of the robot is covered for both normal conditions and emergency conditions Chapter Contents Magna Tran 7 1 Wafer Handling Robot Overview 2 5222 sack bara 6 2 Magia Tran 7 Application Number ai dao cd busdos4de ER ERE EO E b ROS 6 8 Theory of Operan aad aa dX EAGLE AGE OE ROC E ERE EC AGREE ao eR 6 9 CoU and ts os onto nko RI EUE PERSA POUR Ie Rd 6 21 Operaboua IBIetloCKS cod 1e LET V OPERE E PP EDE CER REX TER dE RE VERE 6 23 Wafer Presence Sensors Extend and Retract 0 sees eee eee eee 6 32 Water Presence Sensors Radial Moti n 4 isis sar adero e rr aeons 6 38 Off Center PICK and PLACE Pealufe iia reri rRuvR T EAR LI ERA 3G Re RPG 6 42 Pocero Ss DL DULL Pa eer eee eee ree eee wee ERA PEU EE E EE ee 6 45 PASIV Safety Feature Operation 4402 asado ERA RERAGASA RR RN EA IR d a 6 58 Lonttol Display Module CDM Operation i244 349 seins Rd ERE ER Hoa 6 63 PowetPak Power Fault Manager is exceeded ERR EROR ERR RR PCR R 6 84 cud P 6 87 Normal cran Ae PP r 6 88 Emergency Gon ona a Lodi Evam br dba dba bd Ada EE dri o baa d 6 89 x iei I RETETNTIT
481. r s Manual Installation MN 003 1600 00 Installation Procedure proper grounding of the power supply and robot N CAUTION Do not connect the robot power supply to facility power until ALL connections have been made Facility power will be connected on Ini tial Power up Sequence on page 3 21 MagnaTran 7 Power Connection with Power Pak Power Pak FACILITIES AC LINE Power 24V PWR t gt i4 Supply IN OUT MagnaTran 7 Power Connection without Power Pak FACILITIES AC LINE Power 24V PWR 31 i Supply POWER Figure 3 4 Power Connections 2 Follow the appropriate instructions for routing the power connection depend Brooks Automation Revision 2 2 3 11 Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 ing on the use of the Brooks Automation Power Pak as described below POWER PAK Install the Power Pak using the procedure Power Pak Replace ment on page 9 63 Connect the power cable to the connector labeled POWER IN on the Power Pak Connect the short cable shipped with the Power Pak from the Pak connector POWER OUT to the robot POWER connector on the front panel of the robot as shown in Figure 3 4 For the location of the POWER con nector on the robot see Figure 3 5 WITHOUT POWER PAK Connect the power cable to the connector labeled POWER located on the front panel of the robot as shown in Figure 3 4 For the loca
482. r serial communication enter the following commands for each station SET STN station ARM arm OPTION SAFETY value PUSH value SBIT SVLV SEN name RETRACT_SEN name WAF SEN EX namel RE name STORE STN station ARM arm OPTION ALL Ensure that the new PC 104 board has the correct firmware version RQ VERSION If not download the desired firmware version following the procedure Firm ware Upgrade on page 9 83 Enter and store the station sensor information from step 3 Brooks Automation Revision 2 2 9 61 Maintenance and Repair MagnaTran 7 1 User s Manual PC 104 CPU Board Replacement MN 003 1600 00 SET STNSENSOR station ARM arm TYPE type ACT act SEN sensor POS R r_value POS T t_value STORE STNSENSOR sensor ARM arm ALL This completes the PC 104 CPU Board replacement procedure Brooks Automation 9 62 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Power Pak Replacement Power Pak Replacement The Power Pak was designed to be replaced quickly and without setup The Power Pak has no user replaceable components inside Required Tools and Test Equipment No tools are required to replace the Power Pak Small screwdriver is required to remove and replace the cables Initial installation requires a set of Allen wrenches in metric sizes Removal Procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as
483. ration MN 003 1600 00 MagnaTran 7 1 Wafer Handling Robot Overview Wafer Center a Shoulder Forearm End Effector Upper Arm Wrist ii NN N N m IT Forearm A Figure 6 1 MagnaTran 7 Single Arm Brooks Automation Revision 2 2 6 3 Operation MagnaTran 7 1 User s Manual MagnaTran 7 1 Wafer Handling Robot Overview MN 003 1600 00 BiSymmetrik Dual Pan Arm Set On all three axis of motion radial R rotational T for Theta and the optional vertical Z the left and right sides of the arm set for both arm A and arm B are driven simultaneously moving both end effectors as required For vertical Z and Rotational T motion the arms move at the same time and with the same velocities and accelerations For radial motion the arms are driven simultaneously by the shoulder shafts one always extending while the other retracts Due to the kinematics of the arm the linear motion profile of the A and B arms will differ as the arms move from Arm A fully extended to Arm B fully extended with the inactive arm remaining in the retract position while the active arm extends or retracts The rotary motion of the independent drive shafts is coordinated by the Per sonality Board and profiled to provide smooth motion to the arms as the end effector is accelerated from or brought to rest The software produces a motio
484. rator can force a uniform high speed throughout the PLACE operation by first invoking the SET HISPD command The set speed remains in effect only until the completion of the action command following the set speed command N CAUTION Setting the HISPD command prior to a PLACE command will cause all motion during the PLACE command to be to be executed at high speed which may cause wafers to slip or break See Also GOTO MOVE PICK RO POS DST Example In the following example arm A is currently extended in station 2 slot 1 and in the up position The robot will retract the arm rotate to station 5 extend the arm lower the arm placing the wafer push the wafer into registration and retract the arm NOTE Since the slot and arm are not specified the robot will default to slot 1 and arm A 8 60 PLACE 5 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Place with an Offset Place with an Offset Purpose Causes the 3 axis robot arm to place a wafer at a specified station and slot number with an offset Format PLACE station SLOT slot ARM arm STRT NR R1 R2 ENRT NR R11 R2 RO r offset TO t offset Arguments station The number of the station to which to place Range 1 16 SLOT slot The number of the slot to which to place if this station has been estab lished as a multi slot station At a multi slot station the slot number must be
485. rd RS 232 serial communications protocols from the controller to access all robot software commands Chapter Contents B os 2 Ln AM 8 2 Command and Response Diractur 1252422444 aas o4 3d ExERTA REA ERE A RA 8 6 Command Quick Reference TableS 422322224444 33 AROEEARRR NATA RA VXAA AA 8 13 Command is oc ee op Hoo ee ee ee er ee err re eer 8 22 Error Code Relerenee 6464445 44 REDE PE REDE GRE REA RERO DEDERE E dob des 8 179 Brooks Automation Revision 2 2 8 1 Command Reference MagnaTran 7 1 User s Manual Description MN 003 1600 00 Description The Brooks Automation MagnaTran 7 provides a command set that allows complete control of all robot functions These commands provide a broad range of command options including a number of sophisticated integrated command sequences This chapter provides the control software communications between the host control ler and the MagnaTran 7 The normal and more flexible method of communications uses standard serial communications protocols from the host controller to access robot software commands The other method of communications uses discrete I O ports to provide direct control of the standard robot functions and is described in Dis crete I O Control DIO on page 6 45 Robot Operation The MagnaTran 7 2 Axis robot is controlled in the R Radial axis and the T Rota tional axis of movement to allow wafer transfer to modules Additionally the 3 Axis robot provides Z Vertical axi
486. rd Removal Brooks Automation 12 8 Revision 2 2 MagnaTran 7 1 User s Manual Attached Drawings MN 003 1600 00 Illustrated Parts Catalog Table 12 4 Lower Cover Mount I O Board Parts List dg Part Number Description Oty 1 002 2411 02 LOWER COVER MOUNT ASSEMBLY 1 2 002 4674 02 Marathon Express I O BOARD 1 002 4674 05 RELAY I O BOARD 002 4674 06 LOW SIDE I O BOARD 002 4674 07 HIGH SIDE I O BOARD 3 002 5781 01 Bottom Cover Shield 1 Brooks Automation Revision 2 2 12 9 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Figure 12 5 Theta Board Removal Brooks Automation 12 10 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawings Illustrated Parts Catalog Table 12 5 Theta Board Parts List dg Part Number Description Oty 3 002 3754 01 T1 12 Board Assembly 1 4 803 5014 00 SCREW SHCS M3 0 X 14mm LG SST 4 5 803 0000 10 WASHER M3 SPLIT LOCK SST 4 6 803 0000 00 WASHER M3 FLAT SST 4 Brooks Automation Revision 2 2 12 11 Attached Drawings MagnaTran 7 1 User s Manual Illustrated Parts Catalog MN 003 1600 00 Figure 12 6 Personality PC104 Board Removal Brooks Automation 12 12 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Attached Drawings Illustrated Parts Catalog Table 12 6 Personality PC104 Board Parts List
487. rd interface is designed to operate at 24VDC nominal The 24 VDC operation may be provided by the user or internally by the robot When provided by the user the inputs are optically isolated If user power is not supplied the board automatically switches to on board power With on board power however the ground isolation is defeated See Figure 5 6 for wiring the exter nal or internal power Also see 3 Options Shown Wiring Diagram in Chapter 12 Minimum Wiring Typical Wiring Configuration Configuration P2 P2 F1 25 24V USER M 25 1 14 20C 26 26 e aw O 24V USER 27 24V RTN USER 27 28 28 RTN USER OPTIONAL USER SUPPLIED l O POWER W FULL ISOLATION NA 29 24V RIN 29 RTN ROBOT ROBOT POWER INTERFACE v 30 24V 30 O 24V ROBOT FUSED AT SOURCE Figure 5 6 I O 24V Power Interface NOTE All power and grounds within a connector are internally jumpered together Out put circuits require that 24V power be applied The input and output pins provide for either user supplied power which guarantees Brooks Automation 5 14 Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 MISC I O Communications total isolation of the MagnaTran 7 supplied power or internal supplied power For user supplied power place 24V on pin 25 and 24V RTN on pin 27 For MagnaTran 7 supplied power jump pin 30 to pin 25 and
488. rd stops and overtravel limit switches are adjusted cor rectly Refer to Z Hard Stop and Overtravel Limit Switch Adjustment on page 9 53 Reenter the application number of the robot by issuing the command CONFIG ROBOT APPLIC configuration number Brooks Automation Revision 2 2 10 13 Troubleshooting Z Motion Related Issues MagnaTran 7 1 User s Manual MN 003 1600 00 Z Motion Related Issues v v v v v v Armset has jerky motion or vibrates during motion Armset overshoots a taught position Armset sways from side to side during motion Armset oscillates when halted Robot Hits Z Hard Stops During Operation Robot Hits Z Hard Stops During Homing DONE YES Y number of the robot is correct Verify that the application Was Issue Resolved Look for and adjust or remove any physical obstruction that may interferewith the robot s movement YES Was Issue Resolved Verify if the motion is repeatable Was Issue Resolved Verify that the system alignment was taught properly YES Was Issue Resolved Verify that the end effectors are level and not scraping any objects YES E Verify that the application number of the robot is correct Was Issue Resolved NO v
489. rdi 8 36 nate with an offset HALT Immediately aborts all robot motions avail 8 39 able only in Background mode HLLO Non intrusion command requesting 8 40 response HELLO HOME Returns robot to its home position 8 41 LFTST Performs a continuously cycling life test on 8 43 the robot s systems MOUNT Causes the robot to move to the mount new 8 51 arms position MOVE Moves arm along one or more discrete axes 8 52 in physical coordinates PICK Performs PICK operation at specified sta 8 54 tion arm must be specified PICK offset Performs PICK operation with an offset 8 56 PLACE Performs PLACE operation at specified sta 8 59 tion arm must be specified PLACE offset Performs PLACE operation with an offset 8 61 REF References the specified axis 8 64 RELEASE Releases servo control of the robot 8 65 Brooks Automation Revision 2 2 8 13 Command Reference MagnaTran 7 1 User s Manual Command Quick Reference Tables MN 003 1600 00 Table 8 1 Action Commands Command Description Page RESET Performs a software reset of the robot s firm 8 118 ware XFER Transfers wafers from one station to another 8 176 XFER offset Transfers wafers from one station to another 8 177 with an offset Table 8 2 DIO Control Commands Command Description Page DIO START Turns on discrete I O control 8 27 DIO STOP Turns off discrete I O control 8 28 RO DIO OUTPUT Returns the current output mode 8 75 SET DIO OU
490. re Example When both arms are at the retracted position the linear velocity is the same As one arm extends from the retracted to the extended position however the other remains nearly stationary near the retracted position When Arm A extends Arm B retracts and because the arms are semi independent and the stations are independent sending Arm A to Station 1 for example does not send Arm B to either Station 1 or the station directly opposite Station 1 NOTE The SET LOAD command can be used by an operator to specify the presence or absence of a wafer on each end effector The actual speed of the arms in all three axes is determined by both the Pan A and Pan B parameters Full speed will only be achieved if both pans are empty Arm A is the default When any software command is issued if no arm is specified the robot assumes Arm A and the action is performed using Arm A or information is returned set or stored for Arm A Brooks Automation Revision 2 2 6 11 Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 Theta Motion yo s Radial Motion ee im T Z Motion Optional a Figure 6 5 MagnaTran 7 Coordinate System Dual Arm Brooks Automation 6 12 Revision 2 2 MagnaTran 7 1 User s Manual Op
491. re Memory Structure 6 16 The internally mounted control boards feature both volatile and non volatile memory consisting of random access memory RAM and a disk on chip DOC The disk on chip holds the control program version build date a complete library of application specific parameters an event log and a factory loaded set of working parameters The default application specific parameters are listed in Chapter 8 with each specific command setting and on the QR The arm parameters have been set for the arm geometry ordered and the robot has been optimized for the specific application The user must set up the robot for the specific user configuration by storing the actual station parameter to non volatile memory on the disk on chip Every time the robot is started or reset the values of all parameters stored in non volatile memory are loaded into RAM for active use by the controller Using non volatile memory the robot is able to store a unique set of station parameters described in Table 6 3 for each of the sixteen possible stations The STORE command must be used to load the parameters into non volatile memory on the disk on chip NOTE Any or all of these values can differ from station to station Table 6 3 Station Parameters Station Storable Parameters Description R The full radial extension in increments of 0 001 mm T The rotational position Theta in increments of 0 001 degrees over a range of 360
492. reflect the number and order of the Request Use of ALL implies that the return data values will appear in the stan dard order ARM R T SLOT Z To position the arm in Station Coordinates use the GOTO command with the Station Number specified See Also RO POS ABS RQ POS TRG RQ STN SET STN STORE STN Example In the following example arm A is currently extended in station 5 slot 2 and in the down position The robot returns the current position of the A arm in station coor dinates RQ POS STN ARM A ALL POS STN ARM A EX 52 DN Brooks Automation Revision 2 2 8 95 Command Reference MagnaTran 7 1 User s Manual Request Position Target MN 003 1600 00 Request Position Target Purpose Returns for the specified axis the position in absolute coordinates to which the robot arm has been commanded Format RQ POS TRG ARM arm R T Z Or RO POS TRG ARM arm ALL Response POS TRG ARM arm r location t location z location or POS TRG ARM arm r location t location z location Arguments ALL Specifies R T and Z in the order presented in the command format ARM arm Field size 1 The arm that has been commanded to move to the specified location If unspecified information will be returned for the default arm Arm A The ARM identifier is optional r location Response field size 7 The target R axis location of the robot arm in microns m or if unreferenced t
493. repair on or near these surfaces Personal protective equipment such as gloves eye wear respirators self contained breathing apparatus etc may also be required When a chemical is used during servicing the robot the standard precautions for use of that chemical must be observed These safeguards include sufficient ventilation proper disposal of excess chemical and wipes and any other precautions specified for use of hazardous chemicals within the facility where the robot is being used AN N WARNING Whenever any cleaning fluid is used during service of the robot the facilities environmental procedures must be followed regarding the storage handling and disposal of this fluid along with any affected apparatus The robot may be used in a high temperature environment Allow the robot to completely cool before performing maintenance involving volatile chemicals Brooks Automation Revision 2 2 2 11 Safety MagnaTran 7 1 User s Manual Thermal Hazards MN 003 1600 00 Thermal Hazards The MagnaTran 7 does not use thermal heat during operation However heating ele ments may exist on the chamber or in one of the attached components Be aware of these areas during servicing of the robot N DANGER Heating elements could cause burns when in contact with skin Allow time for them to cool before servicing the robot This includes the elements found in Hot Cathode Ion Gauges and chamber heaters N WARNING The robot may
494. rified Communication may be through the serial port with a computer or through the CDM The following procedure identifies the commands for both methods Required Tools M3 6 inch T Handle Allen Wrench Mount Serial Communication 1 Apply power to the robot Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set 2 Ensure the arm state of the robot is off Issue the following command SET ARMS OFF 3 Move the robot to the mount position Issue the following command MOUNT 4 A T2 adapter must be in place This adapter is usually factory installed If how ever one is not installed on the T2 shaft use the following procedure for instal lation Install adapter to T2 Torque screws 3 places as per Appendix C Torque Set tings on page 11 4 5 Install the arms on the robot For the following procedure the alignment fixture must be installed on the arm set Inspect the under side of the arm set and verify the mounting hardware is pro truding at 4 places If not work the screws until they protrude Position the arms so that when looking down on the robot the I O panel located on the robot drive is facing you and the end effectors would be facing to your right Using the alignment fixture place the arms on the T1 T2 shafts positioning the locating pins of the outer shaft into the arm set Seat onto the T1 shaft The arm set must be fully seated 6 Secure t
495. ription This command is used to assign an internal reference name type or use and if required a characteristic to physical I O Referring to the I O by its reference name automatically references the I O by its type therefore defining the nature of the ref erence For I O types defined as active high Setting that I O to the ACTIVE state will cause the signal to go HI Setting that I O to the INACTIVE state will cause the signal to go LOW Reading that I O when the signal is HI will cause an ACTIVE response Reading that I O when the signal is LOW will cause an INACTIVE response For I O types defined as active low Setting that I O to the ACTIVE state will cause the signal to go LOW Setting that I O to the INACTIVE state will cause the signal to go HI Reading that I O when the signal is LOW will cause an ACTIVE response Reading that I O when the signal is HI will cause an INACTIVE response NOTE The actual terms used by the I O instead of ACTIVE and INACTIVE are defined by the I O type and are specified in the descriptions that reference the I O For example OPEN or NOT_OPEN RETRACTED or NOT_RETRACTED The I O types are defined as performing specific functions with the settings and responses defined by those functions NOTE When defining the NUMERIC I O type the I O channels being specified must be consecutive and the low order channel must be the least significant bit It is possible to define a spec
496. rmal operation of the robot See Motor Electrical Phase Calibration on page 9 69 and PC 104 CPU Board Replacement on page 9 58 for instructions on this command Brooks Automation Revision 2 2 8 170 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store Sync Zero Store Sync Zero Purpose Stores the zero or Home reference for the theta and Z axes Format STORE SYNC ZERO position Arguments position The axis to be stored T1 Theta axis outer shaft T2 Theta axis inner shaft Z Z Axis ALL T1 T2 Z Description The MagnaTran 7 robot Home position encoder counts may be stored in the non vol atile memory NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also Restore the Home Position to the Factory Settings on page 9 71 for instructions on the proper use of this command Brooks Automation Revision 2 2 8 171 Command Reference MagnaTran 7 1 User s Manual Store Warning CDM Status MN 003 1600 00 Store Warning CDM Status Purpose To store the current setting for the warning feature of the CDM Format STORE WARN CDM Description This command is used to store the current CDM warning feature status If the feature is enabled the host will receive an unsolicited error message CDM IS IN CON TROL when the CDM is turned on NOTE Store commands store the current setting
497. rmine the Z motor torque required to move the robot in the Z axis The trace command results provide the duty cycle percentage of the Z motor during a given move This duty cycle per centage must be less than 75 1 2 3 10 30 Connect laptop to robot via serial communications port Ensure the robot is in the home position by issuing the command HOME ALL Enter the appropriate trace settings by issuing the following commands TRACE CLEAR TRACE ADD ZACTTRQ TRACE TRIGGER TRJSTART TRACE PERIOD 5 TRACE START NOTE Note the TRACE function will initiate immediately following the robot s next movement Move the robot upward to the maximum Z height by issuing the following command MOVE Z ABS 25000 NOTE Note the maximum Z height is normally 25 mm or 35 mm pending the user application The units of measure for the following command are micrometers 25 mm 25000 units Stop the TRACE function by issuing the following command TRACE STOP Request the trace function results by issuing the command TRACE DNLD 200 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Z Binding Test Using the Trace Command 10 11 12 13 The robot will provide 200 lines of duty cycle percentage data An example of this data is shown below trace dnld 200 zIrq 0 586605 0 585223 0 585713 0 585382 0 586448 0 585883 0 585537 0 585722 0 585630 0 585806 Verify that the maxi
498. rn Brooks Automation 9 26 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Arm Removal Replacement Arm Removal Replacement The MagnaTran 7 arms may be removed for servicing or replacement with a different style arm and re taught all stations If the arms are being replaced with the same type of arm set that was removed no re homing or re teaching is required Required Tools and Materials Performing the Arm Removal Replacement procedure requires the following tools A set of Allen wrenches in metric sizes Red Arm Mounting Bracket Removal Replacement Procedure J WARNING When equipment is energized live circuits covered and work per formed remotely the robot is at a Type 2 hazard category See Electri cal Hazards on page 2 7 N WARNING Failure to ensure that the robot is not under remote control could result in automatic operation of the robot resulting in personal injury 1 Ensure the arm state of the robot is on Serial Issue the following command SET ARMS ON CDM Use the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES 2 Move the robot to the mount position Serial Issue the following command MOUNT CDM Use the following path SETUP CONFIG ROBOT ARM MOUNT ARE THE ARMS CURRENTLY ON YES 3 Disengage the robot servos Brooks Automation Revision 2 2 9 27 Maintenance and Repair MagnaTran 7 1 User s Manual Arm Removal Replacement MN 003 1
499. robot and com pletely down for Z For an elevator this is the position of the platform when it activates the home sensor This position is near the top of the elevator s travel The cassette offsets and all product operations including moves steps and partial steps are referenced to the Home position Usually the slowest speed the speed at which the product approaches Home position during a HOME command The user owned controller that controls the entire system including the product Individual Component Level A thermal conductivity vacuum gauge These gauges are used to mea sure high vacuum There are two types of ion gauges hot cathode and cold cathode Illustrated Parts Catalog A series of illustrations that shows the locations of parts and sub InCooler InLigner IPC IRC Isolation Valve Jog Leadscrew Brooks Automation Revision 2 2 systems within the component and identifies their part numbers In line cool module designed to be installed in a Cluster Tool between the Transport Module and another module See Cooler In line aligner module designed to be installed in a Cluster Tool between the Transport Module and another module See Aligner See Illustrated Parts Catalog Individual Replaceable Component A large diameter valve used to isolate the vacuum chamber from the pumps Move incrementally A precision screw used to move a mechanism G 5 Glossary MagnaTran 7 1 User
500. robot s Control Display Module CDM and the required controls for any devices the robot will interface with 1 2 5 6 Verify the flatness of the robot s end effectors Adjust the robot s end effector for planar motion Set the robot to the Wafer Transport Plane WTP Set the T and R coordinates for each station which represents the system s pro cess and transfer modules If the robot is equipped with the Z axis drive teach the Z axis coordinates for each station If required teach arm B of the robot all stations Final system check out NOTE Brooks Automation strongly recommends that the user become thoroughly familiar with the operation of the robot s CDM before attempting the alignment procedure as this remote control is used extensively during robot alignment N CAUTION There are no safety interlocks available while using the robot s CDM The user is responsible for any damage to the MagnaTran 7 robot or their system as a result of using the CDM incorrectly Brooks Automation Revision 2 2 Alignment and Calibration MagnaTran 7 1 User s Manual Robot Alignment MN 003 1600 00 Alignment Procedure This section describes the procedure for preparing the Brooks Automation Magna Tran 7 Robot for alignment Prior to beginning the alignment procedure verify the following Read and understand Chapter 2 Safety before beginning this procedure Read the alignment procedure thoroughly Become familiar
501. robot to perform this repair procedure Required Tools Performing the I O board replacement procedure requires the following tools Medium flat head screwdriver M3 hex wrench Removal Procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 da Turn off power and disconnect the power and communications connections to the robot N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock 2 Remove the protective covers as shown in Figure 12 2 N CAUTION Observe proper ESD precautions when handling any electronic device 3 Loosen the thumbscrews 2 places that mount the I O board and panel cover assembly to the Z Mounting Plate See Figure 12 4 Brooks Automation 9 48 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 I O Board Replacement Disconnect the I O board from the Personality Board Remove the grounding lug from the chassis Replacement Procedure 1 2 8 Plug in the I O Board to the Personality Board P3 Plug in J6 connector on the back of the board Install the I O board using the thumbscrews 2 places Connect the cables from the Theta board to JA Install the ground lug Install the robot protective covers Conne
502. rocedure the red arm mounting fixture must be installed on the arm set Using the red arm mounting fixture place the arms on the T1 T2 shafts posi tioning the 4 locating pins of the shafts into the arm set Slightly loosen the black knobs of the mounting fixture and seat onto shafts The arm set must be fully seated Ensure that the arms remain symmetrical about the mounting fixture during installation 5 Secure the arms to the T2 shaft inner shaft using one 5mm SHCS and lock washer Secure the arms to the T1 shaft outer shaft using two 5mm SHCS and lockwashers Torque all three screws to 75 88 inch pounds 6 Remove the red arm mounting fixture NOTE Save the mounting fixture for possible future use If the robot is returned to Brooks for service or shipped to another location the original mounting fix ture must be used Also keep the fixture close to the robot Additional pro cedures will require the use of this fixture 7 Set the arm state of the robot to on Issue the following command SET ARMS ON 8 Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arms should be 180 apart This can be verified by observing the wrist plates relative Brooks Automation Revision 2 2 3 43 Installation MagnaTran 7 1 User s Manual Mount the Arm Set MN 003 1600 00 to the center of the robot If vibr
503. rom 1 to 6 on the numeric keypad to select the device to be setup Once the device is selected the CDM will request selection of setup functions for that device Refer to the appropriate sections below for descriptions of each device s set up CDM SPEED This option is not available for this robot STATIONS Enables the user to Store in EEPROM the parameters for 16 stations per arm Each station has its own Extend position R Theta position T Base Transfer Offset BTO Lower position Number of Slots and Pitch Brooks Automation Revision 2 2 6 73 Operation MagnaTran 7 1 User s Manual Control Display Module CDM Operation MN 003 1600 00 Additionally the sensors for each station may be selected and config ured The CDM provides two methods of setting these parameters Learn mode and Assign mode These modes and the detailed use of Setup Station is discussed later in this section under Setting Up Sta tions When STATIONS is selected the CDM will request selection of the type of setup with the following message SETUP STN ARM _ 1 ASSIGN LOCATION 2 LEARN R T BTO 3 LEARN LOWER gt 4 SET WAFER SENSOR 5 SET SLOT VLV SEN 6 ARM RETRACT SEN gt 7 ARM EXTEND ENABLE 8 SET VLV SEN gt NOTE In the preceding display presented on the CDM the _ indicates that the CDM will display the selected station and arm and the gt indicates that pressing the lt CR gt key will cause the next
504. roperly Via Software 10 29 Z Binding lest Using the Trace Command ose else rh reete emn 10 30 Main Power Grounding Scheme Requirements 0 0 cece eee eee 10 32 Position Repeatability Tels 41 caoe s erae bas phisgiedi agp hed hh d ed 10 33 Ventum Arm Slate ol MAEIISEERD Taria by ad b aora rd ra 10 34 Vertyine Robot Calibration Parameters 12 422524 5434 4E RAWRRAT E EE RE 10 35 Checking for FET Short Circuits on the Theta Driver Board 2 cose 10 36 Brooks Automation Revision 2 2 xi Contents MagnaTran 7 1 User s Manual MN 003 1600 00 Checking for FET Short Circuits on the Z Driver Board i sies 10 37 Appendices Appendix A Factory Default Sens eoo d a PREMO UHR PE Y 11 2 Appendix B TOON 3a dad karotino r aripa e ae RR dC HE CR UC 11 3 Appendix C Dorgue Seting 129a d ur Eod AVR REA FRRNAE EE RR dd Ras 11 4 Appendix D Robot CompallDID Ladies crew ees Erw EP SdRHERRWA TENE REA 11 5 Command Compatis0I iceas edu EE E RFRECEERR RT PAR EQ sees 11 6 Error Code COmpariSOn seems kerar emet LERRA or Eie 11 11 Configuration Compatibility Commands 6 045 ces ies eren 11 13 Appendix Er User Seting Tables sive siekat ad Fd da EA CERO EROR TE ola 11 17 Appendix F Relay VO CDI cid ssxte x43 YER RA ERR RN ERE vs 11 24 Attached Drawings Illustrated Parts Catalog a aa cid asado Xu ERR d ebd ERE T EIUS ERR PER e caua 12 2 List of AttachmeniS aii duas ix HOCH HUE RE Mo EROR REA Reb E dba dC Rd d dts 12 18 Wine DC
505. rotective covers in place or personal injury could result in the squeezing or compression of fingers or hands between moving parts Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Safety MN 003 1600 00 Electrical Hazards Electrical Hazards The proper precautions for operating and servicing electrical equipment must be observed These precautions include following facility lockout tagout procedures and any other specified action within the facility where the robot is being used The MagnaTran 7 is a hazardous low voltage device Power Supplies converting facil ity power may be operating at higher levels of AC in close proximity of the product N DANGER Maximum power consumption for the MagnaTran 7 is 24 VDC at 20 Amps and 480 Watts Improper handling of the power source or con necting devices may induce electrical shock or burn resulting in seri ous injury or death or cause an equipment fire The proper precautions for operating and servicing electrical equipment must be observed These precautions include following facility lockout tagout procedures and any other specified action within the facility where the MagnaTran 7 robot is being used Ain HIGH VOLTAGE Electrical Hazard Power exceeds 240 VA Turn off power before servicing Improper electrical connection or connection to an improper electrical sup ply can result in electrical shock burns fire and damage to the equipment Always provide the robot w
506. rsonality switch down RS 422 and I O board switch down the following table shows the RS 422 connector pinout selected Table 11 17 Optional RS 422 Interface Pin Function TX RX TX a CO N wy N GND Brooks Automation Revision 2 2 11 25 Appendices MagnaTran 7 1 User s Manual Appendix F Relay I O Option MN 003 1600 00 The board options are set up in the following manner Table 11 18 User Specific Communication Switch Settings Switch Position Function Personality Selects operation for Serial I O Board UP e RS 222 if running RS 232 then Relay I O DOWN Board switch must be set to UP e RS 422 Relay Selects operation for Serial I O I O Board UP RS 42 Brooks standard pin out DOWN RS 422 Relay I O pin out Table 11 19 RS 422 Setup Summary Personality Board Relay I O Board Pin UP UP RS232 UP DOWN NOT ALLOWED DOWN UP Table 11 16 DOWN DOWN Table 11 17 Brooks Automation 11 26 Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix F Relay I O Option TYPICAL INPUT V ENS INPUT CIRCUIT TYPICAL OUTPUT LOAD OUTPUT CIRCUIT Figure 11 2 Relay I O Circuit This section provides the functions and hexadecimal representations for both the inputs and outputs of the Relay I O board 002 4212 01 These inputs and outputs can be used for eit
507. rst valid station and ignores the extend enable interlocks CHECK LOAD INTLCK EX ENABLE DIS The following command checks the load on arm A only at the first valid station and all interlocks are observed CHECK LOAD A Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Configure Robot Application Configure Robot Application Purpose Loads application specific information from the firmware into the robot for use dur ing normal operations for a specific robot N CAUTION This command is NOT used in the normal operation of the robot Call Brooks Automation Technical Support for instructions on the correct use of this command Format CONFIG ROBOT APPLIC application number Arguments application_number Specific number for the robot Description Application Number f42 s41 m40 40 73 S 3 eng o eo g gt Dx Iz 9 9 SU oe eo d g vn o P amp SE o RR Ha This command resets or changes various robot parameters NOTE This command is sometimes used when installing a new version of firmware or replacing specific hardware All instructions for this command are not included in this manual See also MagnaTran 7 1 Application Number on page 6 8 Firmware Upgrade on page 9 83 Brooks Automation Revision 2 2 8 25 Command Reference MagnaTran 7 1 User s Manual Create Workspace MN 003 1600 00 Create Workspace Purpose Creates a new work space
508. s lect Ar Srlech Ann Station Select Station Location Select Axis select Jog Direction Select Arm Select Station Pick Place CDM Speed E Assign Stn Stations Select Arn D Select Station Locatio tearn Str Store R T BIO R T BTD 7 m Jog Config Robot Application 3 Axis Config R T BTD Move Z less R T BIO Hanol LOCATE Speed Settings WAF Speeds Learn Store LOWER R T BIO PAN Speeds Jg R T BIO Comm Settings RS 232 Move R T BIO LonWorks Set WAF SEN RE Arm Mount Change Control Set slot VLV SEN EX Arm stote Enoble DIN Arm Retroct SEN RMT Set Servos Off Set EX ENABLE SEN Z Axis State Lock Z axis Set VLV SEN Unlock Z axis CDM Speed Stations Select Arn Location Select Arm Figure 4 7 CDM Command Flow Chart Brooks Automation Revision 2 2 4 19 Subsystems MagnaTran 7 1 User s Manual Control Display Module MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 4 20 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 5 Operational Interfaces Overview This chapter provides a detailed description of all operational interfaces to the Brooks Automation MagnaTran 7 Robot These interfaces provide communications to the robot from the external controller and allow the robot to monitor and control external devices such as wafer sensors and slot valves Chapter Contents Powert DECUS Loa ee ae ee TR POI a rere ee eae ee Id ER IL E d ix 5 3 Serial
509. s MN 003 1600 00 Store Home Position Z Axis Purpose Stores the Z Axis Home position Format STORE HOME POS Z Description The Z Axis HOME position can be stored through a command line entry NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also HOME RO HOME POS Z SET HOME POS Z Example To store the Z Axis HOME which is currently set at 17500 microns STORE HOME POS Z Brooks Automation 8 160 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store I O Echo Store I O Echo Purpose This command is used to store the current settings of the serial communications echo option Format STORE IO ECHO Description The I O echo option is used to set full or half duplex communications If the terminal or terminal emulator displays double characters for all user entered text IO ECHO should be set off If the terminal or terminal emulator displays no characters for all user entered text IO ECHO should be set on NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also RQ IO ECHO SET IO ECHO Examples The following example stores the current communications mode in non volatile memory STORE IO ECHO Brooks Automation Revision 2 2 8 161 C
510. s allows a convenient shorthand for directing all robot motion and ensures that all wafer movement to and from the stations remains consistent In the example shown in Figure 6 6 numbering of stations is done in a clockwise direction starting with the Cassette Module located on the right when looking at the system from the front Note that it is possible for a specific facet of the system the MagnaTran 7 is installed in to have more that one station associated with it if an inter module unit is connected between the main module and the system chamber If there are any intermodule stations they are numbered on a second clockwise circuit of the system chamber Brooks Automation Revision 2 2 6 17 Operation MagnaTran 7 1 User s Manual Theory of Operation MN 003 1600 00 Station 4 PNN zz Station 5 Station 6 Qe T Station Station 8 oO C F Station 2 Station 1 WY i j S tL Wg QS AEE LE E a RI 354 f li 3 B FH o Figure 6 6 Example of Station Coordinate Numbering The R radial exte
511. s at a Type 2 hazard category See Electri cal Hazards on page 2 7 1 Install the mounting fixture to the armset Visually verify that the wrist plates are equal distance from the center and parallel with each other 2 Locate the OR An attached sheet will contain a series of parameter values encoder sync phase etc that will be used to restore the original home posi tion If the OR cannot be located call Brooks Automation Customer Support 3 Enter the following command SET SYNC ZERO ALL t1 t2z The sync zero t1 t2 and z values are entered as 0 xxxxxx 4 Store the values STORE SYNC ZERO ALL Brooks Automation Revision 2 2 9 71 Maintenance and Repair MagnaTran 7 1 User s Manual Restore the Home Position to the Factory Settings MN 003 1600 00 9 72 Request the Sync Zero values RQ SYNC ZERO ALL An example of the response is as follows SYNC ZERO Thera 7 646136 decus 4 162485 y NE 0 106358 Verify that the values match the OR Cycle power Request the Sync Zero values and verify they are correct Home the robot and verify the home location is accessible NOTE To stop the robot from pinging and abort the HOME command enter lt CTRL gt C on the user keyboard or issue the HALT command See also Reset Stations When the Home Position is Reset on page 9 75 and Restore the Home Position to the Factory Settings on page 9 71 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenanc
512. s command is used to display the current I O map The definition of a specific named I O may be displayed by referencing that I O name or all I O names defined using the MAP command may be listed along with their definition by using the ALL Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request I O Map specifier NOTE Request commands display the current value stored in RAM See Also MAP REMOVE IO Examples The following example requests the current definition for all specified I O The robot returns the current map of all named I O including the definition of each I O name Command RQIO MAP ALL Response IOMAPP GAUGE 1 DISCRETE IN HI DIGITAL IN 0x00000004 IO MAP STN 1 WFRWAF SEN HI DIGITAL IN 0x00000040 IOMAP STN 1 SLOT SBIT SVLV SEN DIGITAL IN 0x00000003 IO MAP PRESSURE NUMERIC IN DIGITAL IN 0x00000F00 The following example requests the current definition for a specific I O point The robot returns the current map of the I O point named P GAUGE 1 Command RQ IO MAPP GAUGE 1 Response IOMAPP GAUGE 1 DISCRETE IN HI DIGITAL IN 0x00000004 Brooks Automation Revision 2 2 8 83 Command Reference MagnaTran 7 1 User s Manual Request I O State MN 003 1600 00 Request I O State Purpose Returns the current status for the specified I O Interlocks for all outputs and inputs Format RQ IO STATE io name Response IO STATE io name io state Arguments io name
513. s movement to allow pick and place operations Command Flows The basic MagnaTran 7 software command sequence consists of an interplay between Commands from the Host Controller to the robot and Responses from the robot to the Host over the serial communications line Software communications may be config ured in one of three modes of interaction Sequential Background and Background Plus In Sequential Mode the software commands and responses occur one at a time In the Background Modes certain types of commands may proceed in the back ground while other types of commands may be processed in the foreground Sequential Mode In sequential mode the MagnaTran 7 executes the command completely before returning a READY signal indicating that the robot is ready for another command This mode allows execution of only one command ata time A typ ical sequence of communications in Sequential Mode appears below The Host sends a command string to the robot The robot responds with information if the command was a Request or with an Error string if the command is incorrect or an error occurs dur ing processing The robot sends a READY string to the Host regardless of whether an error has occurred Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Description NOTE In Sequential Mode the Host should not attempt to send another command string until it receives the READY string
514. s must be adjusted as indicated in the next steps Brooks Automation Revision 2 2 Alignment and Calibration Adjusting the Robot s End Effector MagnaTran 7 1 User s Manual MN 003 1600 00 Mounting Screws 4 places Adjusting Screws 3 places Twist Adjusting Screws Set screws 2 places e G 4 z LJ Dip Adjusting Screw Set screw Dip Securing Screw Torque 20 23 in Ibs a Y Twist Securing Screws 5mm SHCS 2 places Measure Dip Here u p A 9 S T 5 E L m uo d l Measure Dip Here Measure Dip Here u gt 9 S T E E L 3 o D o Y Y Measure Dip Here Figure 7 2 End Effector Measurement Locations Two Types Shown 7 10 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Alignment and Calibration MN 003 1600 00 Adjusting the Robot s End Effector N CAUTION When moving the robots arm to make the following measure ments do not allow the arm or end effector to hit or contact the sides of the slots 7 If adjustments are necessary select the appropriate type of wrist plate supplied with the MagnaTran 7 and follow the procedure below TOP VIEW 1 The 3 set screws act as adjusting screws in the robot arm s wrist plate shown in Figure 7 2 and allow leveling of the end effector If the dip of the end effector is low raise it by tightenin
515. s plate that contains the patterns to be reproduced on the wafer Retract Movement inward For a robot this is movement of the robot s arm inward towards from the robot s body For an elevator this is move ment of the platform arm inward towards from the elevator s body Rough Vacuum Pressure ranges from atmosphere to 10 Torr Rough Vacuum Pump A mechanical vacuum pump used to provide the initial evacuation of a chamber Robot A device used to move wafers between various stations Within a Trans port Module the robot moves wafers between the modules connected to the facets Rotational Movement Circular movement of the robot s arm between the various stations RS 232 A serial communications protocol for communications between two devices This protocol uses one wire for transmitting one wire for receiving and a common ground in a shielded cable RS 422 A serial communications protocol for communications between two devices This protocol uses two twisted pair wires one for transmit ting and one for receiving RS 485 A serial communications protocol for communications between multi ple devices This protocol uses one twisted pair wire for both trans mitting and receiving All devices using this protocol must have an address to ensure that information is sent to the right device SCARA Selectively Compliant Articulated Robot Arm SEMI Semiconductor Equipment and Materials International Brooks Automati
516. scription Specifies the work space name ACTIVE or INACTIVE Name of a mapped SVLV_SEN or SBIT_SVLV_SEN type input A B or BOTH 1 16 Robot retract value to robot minimum retract value in microns Robot retract value to robot maximum extension value in microns 0 360000 microns 0 360000 microns 0 to robot minimum Z vertical height in microns 0 to robot maximum Z vertical height in microns Sets the specified work space parameter or parameters for the specified work space name See Also Store Workspace on page 8 173 Brooks Automation Revision 2 2 8 153 Command Reference MagnaTran 7 1 User s Manual Set Workspace AutoCreate MN 003 1600 00 Set Workspace AutoCreate Purpose This command is used to turn the automatically created work space mode of opera tion on or off Format SET WSPACE AUTOCREATE ON OFF Arguments ONIOFF Specifies the mode of AUTOCREATE operation on or off Description Creates a work space around the robot home position See Also PASIV M Safety Feature Operation on page 6 58 Brooks Automation 8 154 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Workspace Mode Set Workspace Mode Purpose This command is used to turn the work space mode of operation on or off Format SET WSPACE MODE ON OFF Arguments ONIOFF Specifies the mode of operation on or off Description Turns the safe Workspace area off or on
517. seconds have expired the robot will return a RDY prompt 4 Enter the following command to request the values RO ENCODER T1 ALL An example of the response is as follows ENCODER T1 SINE MIN 1340 SINE MAX 1400 COSINE MIN 1256 COSINE MAX 1328 The values should be between 1500 and 1950 for MagnaTran 7 1 robots Record the values for future calculations 5 Perform the steps 1 4 three times Take the average of all three responses and input the average values using the following command SET ENCODER T1 ALL sinmin sinmax cosmin cosmax 6 Store the values using the following command STORE ENCODER T1 ALL Find T2 Encoder Value N CAUTION The following commands are NOT used in the initial set up or the nor mal operation of the robot These commands are used in repair oper ations only Brooks Automation recommends contacting Brooks Technical Support before beginning this procedure 1 Power up the robot and establish serial communications 2 Enter the following command to begin collecting values FIND ENCODER T2 3 Rotate the T2 motor shaft the inner shaft slowly Rotate the shaft and attempt to complete one full revolution within 30 seconds Brooks Automation Revision 2 2 9 67 Maintenance and Repair MagnaTran 7 1 User s Manual Encoder Setup MN 003 1600 00 9 68 After 30 seconds have expired the robot will return a RDY prompt Enter the following command to request the values RQ ENCODER T2 ALL An examp
518. selecting Arm B on a single arm type Verify that arm A is being selected for single arm robot Arm B is available for dual arm Error 233 Extend to station not enabled Error 234 Valve not closed User I O Command Parser Errors Error 301 Mnemonic already used Brooks Automation Revision 2 2 8 179 Command Reference MagnaTran 7 1 User s Manual Error Code Reference MN 003 1600 00 Station Setup Errors 8 180 Error 305 Error 306 Error 309 Error 350 Error 351 Error 352 Error 353 Errors 390 Error 402 Error 405 Error 406 Error 407 Error 408 Error 409 Part of a command has been duplicated ex GOTO N 1 N 2 This command argument must be unique Input a different command argument Unrecognized command expecting a mnemonic An optional parameter where at least one parameter is required is missing Enter a valid com mand string Reference the Chapter 8 Command Reference for the correct command syntax Value out of range Enter a value within range for the desired function Command not supported Enter the command EEPROM RESET Parser error bad node in parse tree Parser error stack overflow Parse error no memory available Unexpected mail to UIO task Checksum is invalid Bad slot number Bad Lower Position The entered Lower value yields an invalid value when subtracted from the station s BTO ex BTO 17 502 Lower 18 000 Bad Pitch The entered Pitch value y
519. sen the lower captive screw of the I O board Loosen the three upper cap tive screws of the Lower Cover Mount Assembly See Figure 12 4 Gently allow the Lower Cover Mount Assembly to drop down 5 Locate the theta driver board Locate the FET designated Q1 and measure its resistance by applying an ohmmeter across pin 1 and pin 3 of the FET Record the resistance in ohms 6 Repeat Step 5 for the FETs designated Q2 through Q24 on the theta driver board For each FET record the resistance in ohms n If any FET ohms out at less than 1k ohms then the FET has a short circuit and the theta driver board must be replaced Refer to T1 T2 Axis Driver Board Replacement on page 9 41 8 If no FETs are short circuited then continue to Step 9 9 Reinstall the base plate using four captive screws 10 Reinstall the base plate using four captive screws 11 Reinstall the two robot covers using four captive screws 12 Reconnect all power and communication cables to the robot I O face plate 13 Turn robot power on Procedure is complete 10 36 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Troubleshooting MN 003 1600 00 Checking for FET Short Circuits on the Z Driver Board Checking for FET Short Circuits on the Z Driver Board TOOLS Ohmmeter Medium phillips head screwdriver Medium flat head screwdriver M3 hex wrench PROCEDURE 1 Turn off the power to the robot 2 Disconnect all power and communication ca
520. seriously particularity the potential of injuries or death to human operators in the path of the robot arms Brooks Automation recommends physical barriers to prevent human access to the robot path during all powered operations earth The following safety considerations are provided to aid in the placement and use of the MagnaTran 7 robot Do not place the MagnaTran 7 robot s power or communications cables they could cause a safety hazard Brooks Automation Revision 2 2 where 2 3 Safety MagnaTran 7 1 User s Manual Safety Considerations MN 003 1600 00 Do not place the MagnaTran 7 robot in a location where it may be subject to physical damage Ensure that all power connections to the MagnaTran 7 robot are properly grounded Ensure that the MagnaTran 7 robot receives proper air flow for cooling Do not remove any Warning Hazard or Equipment Identification labels Always operate the robot with the protective covers in place 7 CAUTION Use of the MagnaTran 7 robot for any purpose other than as a wafer transfer robot is not recommended and may cause damage to the robot or the equipment it is connected to Mechanical Hazard Pinch Points z axis 800 Ibs of force extend retract Automatic Movement Hazard F y Moving Mechanism Travel Limits Vacuum Hazard Gas Leak Seal Area
521. sidered Failed y y Indicates NO Wafer at Station Indicates Wafer Operations rat Proceed is on End Effector Figure 6 10 Pre Extend and Successful Action Flowchart Brooks Automation Revision 2 2 6 35 Operation MagnaTran 7 1 User s Manual Wafer Presence Sensors Extend and Retract MN 003 1600 00 Wafer PLACE During a wafer PLACE operation the robot will retract if required and move T and Z to the specified station and then perform a Pre Extend Test Pre Extend Test The robot will then perform a Pre Extend Test This test determines if the sta tion has a sensor and if it is configured for use with the active arm It will check the sensor configuration at that station for the sensor type and then read the sensor status A flowchart of the Pre Extend Test is shown in Figure 6 10 Sensor Configuration EXtend type sensor Sensor state should be OFF indicating that there is no wafer at the station coordinates where this wafer is to be placed REtract type sensor Sensor state should be ON indicating that there is a wafer on the end effector at the station coordinates ready to be placed If the robot does not receive the appropriate signal from the sensor an error message will be generated and the PLACE operation will be stopped If the robot receives the appropriate signal from the sensor the PLACE opera tion will pro
522. sion 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Discrete I O Control DIO Discrete I O Control DIO Discrete Control through the robot s 50 pin discrete I O port provides all the control functions necessary to operate the robot in a system Although serial control provides a more comprehensive command set DIO control is also useful in changing configu ration or troubleshooting the robot DIO Control System The robot has been designed for interface with a discrete I O control unit for auto matic sequencing Suitable devices include computers with parallel I O interface ports programmable logic controllers and discrete logic devices DIO Control Programming The DIO interface functions in a command acknowledge format Whenever possible the output signals should be checked for the appropriate acknowledgment signal before initiating the next command For example if a MOVE command has been asserted PI 0 21 Pin 25 LOW check for the COMMAND STATUSw response PO 0 21 Pin 24 LOW before proceeding Initial DIO Configuration Procedure Before operating the robot the values for the station parameters must be set The robot offers independent software selectable parameters for all stations These sta tion parameters may be set through either the serial port or the robot s Control Dis play Module CDM For serial control see Chapter 5 for connections and Chapter 8 for commands For CDM control see Chapter 4 f
523. specified only to target a slot number other than one ARM arm The arm A or B which will perform the pick The default is Arm A The arm descriptor must be specified only to pick with Arm B The ARM identifier is optional STRT Start retract location NR No retract R1 Normal retract R2 Second retract location default R1 ENRT End retract location NR No retract R1 Normal retract R2 Second retract location default R1 RO r offset Specifies the positive or negative offset from the extend retract location for that station Maximum allowable R offset 4000 microns TO t offset Specifies the positive or negative offset from the theta location for that station Maximum allowable T offset 2000 microns Brooks Automation Revision 2 2 8 61 Command Reference MagnaTran 7 1 User s Manual Place with an Offset MN 003 1600 00 Description 8 62 The speed and acceleration at which the robot moves during a PICK operation is dependent on the status of the pans with or without wafers The robot always moves at with wafer slow speed and acceleration for all three axes when there is a wafer on the active arm If the active arm is empty and the inactive arm contains a wafer the robot moves at medium speed for the R axis but slow speed for T and Z If both arms are empty the robot uses high speed for all three axes If a PLACE failure occurs all motions will be performed at with wafer speed until a success
524. ssible regardless of the position of the robot arm after receiving the signal BATT LO UPS Monitors the status of the battery backup power in the Pow erPak An error signal is sent when battery voltage is less than 23 5VDC To map the interlocks the type of I O board for the MagnaTran 7 robot must be known High Side I O Board example MAP AC FAIL UPS EMER STOP LOW TO DIGITAL IN 0X800000 MAP BATT LO UPS UPS BATTERY SEN LOW TO DIGITAL IN 0X400000 IN23 0x800000 AC FAIL UPS IN22 0x400000 BATT LO UPS Low Side I O Board example MAP AC FAIL UPS EMER STOP LOW TO DIGITAL IN 0X400000 MAP BATT LO UPS UPS BATTERY SEN LOW TO DIGITAL IN 0X800000 IN22 0x400000 AC FAIL UPS IN23 0x800000 BATT LO UPS Relay I O Board Appendix F Relay I O Option on page 11 24 example MAP AC FAIL UPS EMER STOP LOW TO DIGITAL IN 0X1000 MAP BATT LO UPS UPS BATTERY SEN LOW TO DIGITAL IN 0X20000 Marathon Express MX I O Board example MAP AC FAIL UPS EMER STOP LOW TO DIGITAL IN 0X20000000 Brooks Automation Revision 2 2 6 27 Operation MagnaTran 7 1 User s Manual Operational Interlocks MN 003 1600 00 MAP BATT LO UPS UPS BATTERY SEN LOW TO DIGITAL IN 0X10000000 IN29 0x20000000 AC FAIL UPS IN28 0x10000000 BATT LO UPS To remove the interlock REMOVE IO AC FAIL UPS REMOVE IO BATT LO UPS Brooks Automation 6 28 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Operational Interlocks Mapping the
525. ssure condition ROIOSTATEP GAUGE 1 IO STATE P GAUGE 1 ACTIVE The following example returns the current status of the I O defined by STN 1 WFR set using the MAP command which in this case is a wafer sensor indicating that there is a wafer present RO IO STATE STN 1 WFR IOSTATESTN 1 WFR BLOCKED The following example returns the current status of the I O defined by STN 1 WFR set using the MAP command which in this case is a slot valve indicating that the valve is open RO IO STATE STN 1 SLT IO STATE STN 1 SLT OPEN The following example returns the current status of the I O defined by PRESSURE set using the MAP command which in this case is a pressure sensor indicating that the pressure is 14 RO IO STATE PRESSURE IO STATE PRESSURE 14 The following example returns the current status of all named I O RO IO STATE ALL IO STATE P GAUGE 1 ACTIVE IO STATE STN 1 WFR BLOCKED IO STATE STN 1 SLT OPEN IO STATE PRESSURE 14 Brooks Automation Revision 2 2 8 85 Command Reference MagnaTran 7 1 User s Manual Request Load MN 003 1600 00 Request Load Purpose Requests the load status of the specified arm Format RO LOAD ARM arm Response LOAD arm status Arguments arm The arm A or B for which parameters are being set the default arm is A The ARM identifier is optional status Provides the load status for the specified arm ON Arm has a load on the specified end effector OFF Arm does not
526. t x80 poe 3 X 4lo PC7 Hx Nc 5 8255PLCC Rv5 fve DEMZ9SNA197 4 bi RXD R3 R4 47k 47k 4 4 at 2N7002 U31A L em 2M y pig ES i J5 TXA DRIVEN 6 42 V4 Di4 TXA DRIVEN BUTTON TXRX D RXA DRIVEN 8 5 y3 b12 RXA DRIVEN 1 e 1 moa 27002 70543 0001 74ALS240 Q2 x iBUTTON he 1N5232 D3 ol 1N5242 x REV DESCRPTION DATE BY APP B REVISE PER EC 2041 01 16 98 R WR c REVISE PER EC 2353 027167 R I R D REVISE PER EC B657 087317 R I R D1 REVISE PER EC 15 018 05 07 99 BW MV AV bn U3 RN4 IN
527. t IN 1SOO 9 8 INO IOPORT DO 38 5g pap LS _IN_Po AL RE EN IN 1801 10 7 INI A Initial Release IOPORT DI 375i IEE 1 BEREEN IN PO 8 U2 1 _IN_Isoo IN PB 8 U3 1 IN ISOB IN 1S02 11 6 N2 a 36 3 RE EN v x IN 1903 12 5 N3 B RELEASE PER EC 15281 07 01 99 JR JR IOPORT D3 35 DS hae 2 IN P3 P2RE EN z x 2 z x 2 IN 1904 13 4 N4 IOPORT D4 33 D PAS 44 IN P4 P3RE EN IN P1 6 3 IN ISO1 IN P9 6 3 IN ISO9 IN 1905 14 3 N5 IOPORT D5 32 Ds pag 43 IN P5 PARE EN x v v v IN_ISO6 15 2 INS IOPORT D6 31 pa pag 42N P6 P5 RE EN rd 4 x 4 IN 1807 16 LTN IOPORT D7 30 D pas 41 IN P7 P6RE EN OCD21 1 OCD217 u6 amp a5 20 IN P8 SV AL OPND IN P2 8 U4 1 IN ISO2 IN Ptol 8 U5 IN 10k RD PBO 1 ISO10 M RESET 1 zz 8 40 BD 21 IN P9 SV BL OPND MR vec ovcc WR PBI LA X v RN2 x 2 Nc Ne LZ X IOPORT A0 10 ay bao 22 IN P10 SV P1 OPID APTA PS Liv 21 IN IS08 i 16 IN8 3 AC rs IOPORT A1 9 24 IN Pi1 SV P2 OPND IN P3 T6 3 IN ISO3 IN Pii 6 3 IN ISO11 IN 1809 2 15 IN9 X 3 NC RESET 9 X RESET At PBS 3 GND MEBET 39 RESET ppg 25 IN P12 SV P3 OPND x A IN 19010 3 14 IN10 7 e 26 IN P13 SV P4 OPND 5 xxr 4 rd cs PBS 4 4 ts 44 IN 19011 4 18 INH MAX701CSA ppg 27 NP14 SV P5 OPND OCD217 OCD217 IN_ISO12 5 12 _IN12 bee 28 IN Pts SV P6 OPND IN 18013 6 11 IN13 EEE IN P4 B U7 1 IN ISO4 IN P12 8 Us 1 IN ISO12 IN 1S014 7 10 N14 lo TD ae 00 0 poo HS IN EIS ECTS A v 3 DE v IN ISO15 8 9 IN15 vcc ID PUP PAFF y p18 IOPORT_D0 E
528. t communication port CDM is turned on while attempting to communicate to robot through personal com puter Check CDM and or personal computer cables for proper connection and continuity Malfunctioning CDM Verify robot s communication settings are properly set and stored per requirements of system host controller software by issuing the command RO COMM ALL Verify RS232 RS422 switch SW1 on the robot personality board is set properly Up RS222 Down RS422 Verify that robot is properly grounded Refer to Power Connections on page 5 3 Verify the Personality Board has the correct UART installed at designation U40 The UART must have the letters BC stencilled on its surface UART s with the letter A are incorrect Disk on Chip of PC104 Card has failed Replace robot PC104 Card Refer to PC 104 CPU Board Replacement on page 9 58 DC to DC converter of theta driver board has failed Replace robot theta driver board Refer to T1 T2 Axis Driver Board Replacement on page 9 41 Call Brooks Technical Support Brooks Automation Revision 2 2 Troubleshooting MagnaTran 7 1 User s Manual Communication Related Issues MN 003 1600 00 Communication Related Was Issue Resolved NO YES Check for proper grounding and power connection with robot
529. t distinguish them from standard light emitting diodes First they can produce much brighter beams of light by a fac tor of 1000 or more Second the beam from a laser can be very narrow where the spot of light is almost the same size whether projected a few inches or many feet Third laser light is a very pure color with a single wavelength which makes the spot look speckled and shimmery National and international standards classify low power laser systems into the fol lowing classes Class I Very low power 4 x 10 7 Watt safe for continuous viewing Class II Low power visible lasers 4 x 10 6 Watt safe for 15 minutes of continuous viewing Class III Low power visible lasers only 1 x 10 2 Watt safe for brief viewing do not stare into the beam Brooks Automation Revision 2 2 2 9 Safety MagnaTran 7 1 User s Manual Gas Hazards MN 003 1600 00 Gas Hazards The MagnaTran 7 robot does not make use of any compressed gases However it may be recommended that Nitrogen gas be used for cleaning sections of the robot assembly to blow out any accumulated particles during routine mainte nance procedures The equipment where the Brooks Automation MagnaTran 7 is installed may use Nitrogen gas for venting when installed in a system Ensure all gases used are vented as specified by the facilities local environmental regulations N WARNING Whenever any gases are vented the facilities environmental proce dures m
530. tallation The MagnaTran 7 robot requires no software installation as all robot control software is pre loaded Upgrades to the software can be downloaded through the serial port or the parallel port See Firmware Upgrade on page 9 83 Brooks Automation Revision 2 2 3 19 Installation MagnaTran 7 1 User s Manual Check out MN 003 1600 00 Check out Before the robot is started for the first time or after servicing the robot it is necessary to verify that all systems of the robot are operating properly NOTE This verification of the robot s systems does not include any switch or configura Hon settings Mechanical Checks Ensure that the robot is properly mounted and that the mounting is properly sealed perform chamber leak test if required Ensure that the arms are properly mounted and that there are no obstructions to their movement Verify that the power cable is routed in a safe place and away from travel area Verify the shipping mounting fixture red has been removed from the armset Inspect all cables for restricted bend radius or excessive tension Verify all protective covers are in place Check connector securing screws to ensure good continuity Facility Checks Ensure that the power supply being used is capable of delivering the specified voltage and current at the connection to the robot Verify vacuum pressure is correct Ensure that all connections have been made as specified in th
531. talog IPC Glossary Definitions of terms used within this manual Index Cross reference to this manual organized by subject Brooks Automation Revision 2 2 1 5 Introduction MagnaTran 7 1 User s Manual Supplementary and Related Documentation MN 003 1600 00 Supplementary and Related Documentation 1 6 This User s Manual provides documentation for operation and maintenance of the Brooks Automation MagnaTran 7 While this document covers specific information and adjustments for the robot there may be information in other manuals which affect the settings or operating mode of the robot This is especially true for robots supplied as part of a complete system The robot is set to system specifications and acceptance tested with the Integrated Cluster Tool at Brooks Automation Before adjusting or changing settings on a MagnaTran 7 consult the following documentation Cluster Tool User s Manual Transport Module or Cluster Tool Controller User s Manual Cluster Tool Wiring Diagrams The MagnaTran 7 Robot User s Manual may refer the reader to these documents for additional information NOTE All documents cited shall be the latest publication Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Introduction MN 003 1600 00 Manual Notation Manual Notation This manual uses a standard notation system to provide consistent descriptions of all items and functions associated with all Brooks Automation devices These
532. tation or if SLOT is specified or if R RE retract is specified the arm will retract if it is not already retracted The rotation axis variable N and the Z axis variables SLOT and Z will move to their target locations simultaneously If N is specified and SLOT is not the slot is assumed to be 1 If N is specified and Z is not the position is assumed to be Down e The arm will extend if so commanded If no arm is specified ARM A will extend This means that unless the arm is explicitly commanded to extend as part of aGOTO command that specifies a Station or Slot number it will remain in the retracted position This is true even if the arm is already at the specified Station or Slot number See Also MOVE PICK PLACE RQ POS DST Examples In the following example arm A is currently extended in station 5 slot 2 and in the down position The arm will move to the up position without retracting Brooks Automation Revision 2 2 8 37 Command Reference MagnaTran 7 1 User s Manual Go To Station with Offset MN 003 1600 00 NOTE Since no arm descriptor is provided in the example the robot will move the default arm Arm A GOTO Z UP In the following example arm A is currently retracted The robot will move arm A to station 5 GOTO N 5 ARM A Brooks Automation 8 38 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Halt Halt N CAUTION While no dam
533. terminal A typical sequence of communications in Monitor Mode appears below RO COMM ALL COMM MU B casei MON FROW 2 BKG jp ERN EE ON ECHOS ON CHECKSUM XXXXXXXX DREP REQ ERROR LEVEL X BAUD RATE _XXXXXX Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Description Errors are reported as complete error messages and status messages Packet Mode Packet mode is a computer based communications mode All responses from the MagnaTran 7 are short with minimal descriptive information provided This mode is best used when a host controller is communicating with the robot A typical sequence of communications in Packet Mode appears below _RDY RQ COMM ALL COMM PKT BKG _RDY Errors are reported as codes without associated messages NOTE All command responses shown in this manual are the Packet Mode responses Brooks Automation Revision 2 2 8 5 Command Reference MagnaTran 7 1 User s Manual Command and Response Structure MN 003 1600 00 Command and Response Structure 8 6 A software command to the robot consists of a string of ASCII characters letters or numbers which are subdivided into fields A software response from the robot consists of a string of ASCII characters letters and numbers which are also subdi vided into fields These fields are for commands variables and data which indi cate the type of command specify a variable name or contain
534. tes the commodity type of the part The next four digits are the part number which uniquely identifies the document The last two digits are the dash variation number which identifies variations of the basic item The revision of the document is identified separately Brooks Automation Revision 2 2 1 9 Introduction MagnaTran 7 1 User s Manual Manual Notation MN 003 1600 00 Notes Cautions Warnings and Pictograms Notes cautions and warnings used within this manual have very specific meanings and formats A description of the meanings of these terms is provided below NOTE A note provides additional or explanatory information N 7x CAUTION A caution notes actions or situations where equipment damage could result if the proper precautions are not taken The type of warning symbol used indicates the type of hazard electrical or general NAN warnine A warning points out actions or situations where personal injury could result if the proper precautions are not taken The type of warn ing symbol used indicates the type of hazard electrical laser radia tion or general AA oen A danger notice emphasizes actions or situations where severe per sonal injury or death could result if the proper precautions are not taken The type of warning symbol used indicates the type of hazard electrical or general Ergonomic Hazard Failure to take the G Proper precautions before lifting could result in personal injury lew HEA
535. th the arm Mount ing Storage bracket attached onto the drive spindle in the center of the robot ensure that the locating pins for both T1 and T2 are fully seated into the arm 6 Tighten the M4 mounting bolts for the T1 and T2 axes until the lock washer is fully seated then torque 25 inch pounds 7 Remove the alignment fixture by loosening it s hardware NOTE Save the fixtures for possible future use If the robot is returned to Brooks for service or shipped to another location the original fixture must be used Also keep the fixture close to the robot Additional procedures will require Brooks Automation 3 36 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Mount the Arm Set 10 the use of this fixture Set the arm state of the robot to on Enter the following path SETUP CONFIG ROBOT ARM STATE ARE THE ARMS CURRENTLY ON YES Re engage the servos Issue the following command HOME R During the HOME action check for vibration After the arms are in the HOME position check the alignment The upper arm should be in line with the lower arm This can be verified by observing that the plane of the wrist plates are parallel relative to each other If vibration is observed or the alignment is off perform the procedure again Check the alignment of the arm and the position of home by entering the fol lowing command HOME ALL If the home position is not where desired use the procedure Reset t
536. th the serial I O cable Open a terminal software program and verify communication with the robot with the command HLLO Setup the communication protocol with the command SET COMM FLOW SEQ M B MON LF ON and the command SET IO ECHO Y Open a log file to save the responses from the robot name the file with the last four digits of the Brooks serial number and the date For example if the robot serial number is 9801 2323 and the date of the PM is 1 30 98 the file should be named 23230198 with the file extension TXT or CAP 1 Birth Certificate Information Issue the command RQ BIRTH CERT which will display the Birth Certificate information and download it to the log file The capture file should remain opened until the following information Steps 2 through 5 is logged to the file 2 Date and Time of PM With the log file from Step 1 still open issue the commands RO DATE and RO TIME to download the time and date to the log file 3 Cycle Counter With the log file from Step 1 still open issue the command RQ CYCLE COUNTER to download the present cycle counter value of the robot to the log Brooks Automation 9 4 Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Data Log file 4 History With the log file from Step 1 still open issue the command RQ HISTORY CMD see Request History on page 8 76 to download the content to the log file Firmware Revision With
537. the Yes key or the No key Some menus present mul tiple choices such as L S P or 1 2 3 4 which indicates that the user should choose from among the keys labeled Lower Slot Pitch or 1 2 3 4 as appro priate In all cases the choices will refer to dedicated keys there is never any need spell out commands Functional Block Diagram 4 18 The command flow chart shown in Figure 4 7 provides an overview of the opera tional structure of the CDM and the command sequences available Note that only the major selection options presented by the CDM are shown in the flow chart For a detailed description of each function available through the CDM refer to the com mand descriptions in the section Control Display Module CDM Operation on page 6 63 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Subsystems Control Display Module 5 SELF TEST gt S gt A Select Axi
538. the single and dual arms The single arm referred to as Arm A and the dual arms referred to as Arm A and Arm B are configured in software for full motion in three axes Radial R Rotational T and Vertical Z NOTE The major difference between the single and dual arms is the addition of Arm B for the dual arm The station coordinate system provides a convenient shorthand for identifying spe cific locations for the robot to move to or from Each station is identified by its Theta position its Radial position amount of arm extension and its Z position vertical dis tance from Home By identifying the stations in this manner it is only necessary to provide the robot with the station number instead of the complete coordinate set each time a command is issued to the robot When the Z Axis is being used there are a number of user definable parameters that must be provided for proper operation The Base Transfer Offset BTO provides the distance from the robot s Home position to the systems Wafer Transfer Plane WTP The Lower parameter provides the distance from the WTP that the robot must move down to deposit a wafer which also defines the height that the robot must enter a module to pick up a wafer The Slot parameter is used to define the number of slots in a station the default is one and to specify the slot the robot s operation will be performed on if none is spec ified the default is assumed The Pitch parameter
539. the Motor Enable Interlock Bypass Jumper To bypass the Motor Enable Interlock feature modify the Operational Interlock Cable so as to jumper pins 23 and 24 of the MISC I O port Retract Pin The Retract Pin interlock may be factory taught to the MISC I O at pin 35 See Special Notes on RETRACT PIN on page 6 26 Brooks Automation 5 18 Revision 2 2 MagnaTran 7 1 User s Manual Operational Interfaces MN 003 1600 00 MISC I O Communications Marathon Express I O The following table shows the MagnaTran 7 connector assignments used exclusively in the Brooks Automation Marathon Express Integrated Platform wafer transfer sys tem The MagnaTran 7 connector is a high side discrete interface as described in High Side I O on page 5 10 and includes the serial interface to the robot on the same connector The state of the peripheral devices such as slot valves robot extend enable robot retract enable and wafer presence sensor in the Marathon Express Transport Chamber are monitored Table 5 8 Marathon Express Connector Pin com Signal Name Pin com Signal Name Pin com Signal Name 1 DIO AL RE EN 18 DIO SS AL 34 DIO AL RNE 2 DIO BL RE EN 19 DIO SS BL 35 DIO BL RNE 3 DIO P1 RE EN 20 DIO SS P1 36 DIO P1 RNE 4 DIO P2 RE EN 21 DIO SS P2 37 DIO P2 RNE 5 DIO P3 RE EN 22 DIO SS
540. the chapter organization and a description of each chapter s contents is presented notation con ventions are explained and a reference copy of the standard Brooks Automation War ranty is provided Chapter Contents Magna lran Robe OVE ad 3 CUEG qm EEPROEE WA EE i a EPOD d oo da 1 2 Operation OVervieW 44343434 4434 C EGER OR Rd EUER ER HERES UE d EE ed 1 4 Documentation LIVBPIBW ace doa ded Op ORO HOO RR EHE Ea OR E bc e 1 5 Supplementary and Related Documentation 42444 s0siseasi a EV RARE E Rd 1 6 Munt DOUG e o9 weet gen dvo ONCE pH VPE PNEREMMRVRP S gees 1 7 Hardwae MO es She 4 555s RO aS DAP EE TRE b tS a EM Pra P dd 1 7 Software NOISBOIT 6445435650 LT AE ORCI REPE IEPRPERE EXER 1 8 Manual SAGs Liu loda oe Heth eeni E e E IH SOLA OR CR I RU Cd ea Rara 1 11 Specifications Lese pente re e dia dr ope d ae ee oops 1 12 Company era qaad aad kp A Vd oi d Ries ghee Sap TEN eee bad dede 1 17 Brooks Automation Revision 2 2 1 1 Introduction MagnaTran 7 1 User s Manual MagnaTran 7 Robot Overview MN 003 1600 00 MagnaTran 7 Robot Overview The Brooks Automation MagnaTran 7 wafer transfer robot is designed for produc tion environments requiring minimum vibration minimum particle contamination and high throughput with high reliability performance in an ultra high vacuum envi ronment The MagnaTran 7 is a compact cylindrical ergonomically designed robot utilizing a concentrically mounted drive assembly with integral DSP based control
541. the coil cable and Z drive cable around the circuit board and all other cables over the circuit board between the circuit board and Z Mounting Plate Replace the Lower Cover Mount Assembly Install the robot protective covers Connect the robot power cable and communication cables Apply power to the robot This completes the Z Driver Board replacement procedure 9 44 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Z Encoder Replacement Z Encoder Replacement NOTE It is not necessary to remove the robot to perform this repair procedure Required Tools Performing the Z Board replacement procedure requires the following tools Medium phillips head screwdriver Small flat head screwdriver M3 hex wrench Small Phillips head screwdriver 4 40 3 32 hex wrench Loctite removable strength 242 Removal Procedure N WARNING When equipment is off and power is secured per facilities lockout tagout procedure the unit is classified as a Type 1 hazard category See Chapter 2 Safety Table 2 1 Turn off power to the robot and disconnect the power and communications connections to the robot A N DANGER All power to the unit must be disconnected per the facilities lockout tagout procedure before servicing to prevent the risk of electrical shock Remove the protective covers as shown in Figure 12 2 Brooks Automation Revision 2 2 9 45 Maintenance and
542. the current position of the arm in the Z vertical axis Table 6 27 Z Position Status Position Bit 1 Bit 0 OPTION A Not at UP or DOWN position At the DOWN position of current station At the UP position of the current station not used OPTION B Brooks Automation Revision 2 2 Not at UP or DOWN position At the DOWN position of current station At the UP position of the current station not used 6 55 Operation MagnaTran 7 1 User s Manual Discrete I O Control DIO MN 003 1600 00 To change a robot to Active Low use the following serial commands REMOVE IO DIO IN MAP DIO IN NUMERIC IN LOW TO DIGITAL IN Ox7fffffff REMOVE IO DIO OUT MAP DIO OUT NUMERIC OUT LOW TO DIGITAL OUT Ox7ffff To change a robot to Active High use the following serial commands REMOVE IO DIO IN REMOVE IO DIO OUT RESET To check the current state of the robot RQ IO MAP ALL Enable DIO Initialization Sequence Upon start up a particular initialization sequence must be followed to enable the ser vos and reference all axes When the incremental encoders used in the robot are pow ered they are not referenced in absolute space Therefore part of the initialization sequence includes moving the robot s arm to a known HOME position on each axis and resetting the corresponding encoder This references the encoders in absolute space The initialization sequence is the same for
543. the current values of the variables showing on the screen To select a specific variable press the key indicated in parenthesis to the left of that variable To keep the original value press lt CR gt To change the value the current value will disappear when the new value is entered type in the desired numbers using the keypad To enter a negative number press the key which toggles between a plus or a minus sign in the digit preceding the decimal a negative value is allowed only for Theta T When the value is correct press lt CR gt to save the entry Units Theta in decimal millidegrees R and all Z parameters in micrometers Slot Stn are integers 1 99 The legal limits for all the parameters appear in the Appendix under Ranges and Units for Robot Parameters Backspace To correct a mistake entering an axis value use the Backspace key Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Control Display Module CDM Operation Setting Up Stations Setting up the stations involves assigning a station number to a particular device to be serviced by the robot and specifying its unique values for Base Transfer Offset BTO Theta position T Extended position R and Lower position If the device has mul tiple slots the operator must also establish the number of slots and the pitch between slots Once the physical parameters are defined for a station the sensors associated wit
544. the electrical connection between these two pins is opened the following will occur 1 Robot motors will not receive power and robot motion will automati cally stop 2 The robot will generate an error message ERR 10029 Error Emer gency Off Circuit Is Active 3 The robot encoders will remain referenced Power to the robot motors will be re established when the electrical connection between pins 23 and 24 of the MISC I O port is re established Since the robot Brooks Automation Revision 2 2 5 17 Operational Interfaces MagnaTran 7 1 User s Manual MISC I O Communications MN 003 1600 00 encoders remain referenced the next motion command can be issued to the robot WITHOUT the need to HOME reference the robot Bypassing the Safety Motor Enable Interlock Feature Brooks Automation highly recommends using the Safety Interlock However for those users who choose not to comply with these industry safety standards Brooks has provided an optional Motor Enable Interlock Bypass Jumper see Appendix B Tooling on page 11 3 Any of the following methods can be used to bypass this feature NOTE Brooks Automation ships all Magnatran 7 1 robots with this bypass jumper plugged into the MISC I O port of the robot 1 Install the Brooks Automation supplied Motor Enable Interlock Bypass Jumper into the MISC I O port of the robot 2 If the Operational Interlocks will be used see Operational Interlocks on page 6 23 discard
545. the move is completed the move will be aborted the robot will be brought to a controlled stop and the motors will remain on If this signal changes state after the move is com pleted the robot will stay at its current position Table 6 10 DIO MOVE Rising Edge of Signal Falling Edge of Signal OPTION A Not applicable MOVE begins OPTION B MOVE begins Not applicable Brooks Automation Revision 2 2 6 47 Operation MagnaTran 7 1 User s Manual Discrete I O Control DIO MN 003 1600 00 MOVE TYPE 0 1 Defines the type of move to be executed when the MOVE line is brought low Table 6 11 DIO Move Type Move Type Bit 1 Bit 0 OPTION A SYNC and HOME 1 1 GOTO 1 0 PICK 0 1 PLACE 0 0 OPTION B SYNC and HOME 0 0 GOTO 0 1 PICK 1 0 PLACE 1 1 ARM Specifies the arm to be used when the MOVE command is issued Table 6 12 DIO Arm LOW HIGH OPTION A Arm B is used Arm A is used OPTION B Arm A is used Arm B is used STATION NUMBER 0 4 Specifies the station to be accessed by the robot during a MOVE Brooks Automation 6 48 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Discrete I O Control DIO Table 6 13 DIO Station Selection Station Station OPTION A OPTION B Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 32 1 0 0 0 0 31 2 0 0 0 0 1 30 3 0 0 0 1 0 29 4 0 0 0 1 1 28 5 0 0 1 0 0 27 6 0 0 1 0 1 26 7 0 0 1 1
546. the same time and with the same velocities and accelerations For radial motion the arms are driven simultaneously by the shoulder shafts one always extending while the other retracts slightly Due to the kinematics of the arm the linear motion profile of the A and B arms will differ as the arms move from Arm A fully extended to Arm B fully extended with the inac tive arm remaining in the retract position while the active arm extends or retracts End effectors are spaced approximately 10 to 16mm apart depending on application and calibrated at the factory The rotary motion of the independent drive shafts is coordinated by the Per sonality Board and profiled to provide smooth motion to the arms as the end effector is accelerated from or brought to rest The software produces a motion profile at the T1 and T2 drive shafts that will obey the motion constraints for arm A and B defined by the user While the maximum radial extension is dependent on the geometry of the arm specified by the user the MagnaTran 7 is typically supplied with a Leapfrog arm that meets the specification of a 1050 mm reach from the center line of the robot to the center line of the wafer This version of the arm accommodates a load of up to 1 0kg 2 2Ibs on each end effector The actual extension and retraction positions of the arms are software selectable Brooks Automation 6 6 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 MagnaTran 7 1 Waf
547. the switch loca tions and positions on the MagnaTran 7 1 robot Relay I O board set that provide either RS 232 or RS 422 communication to the robot POWER INPUTS amp gq C a Oo CDM c TX OUTPUTS SI O 2 O S O a Q OQ BN B B 1 0 ENABLED Figure 11 1 Relay Interface RS 232 422 Board Switch Settings 11 24 There are two blue slide switches that determine RS 232 or RS 422 communication One is located on the personality board left side next to left edge of PC104 card The personality board switch selects RS 232 when in the up position RS 422 when in the down position Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Appendices MN 003 1600 00 Appendix F Relay I O Option The second switch is located on the I O board right side next to the personality board connector When the personality switch is up RS 232 the I O board switch must also be up When the personality switch is down RS 422 the I O board switch selects two different connector pin outs as described below RS 422 Pin outs With the personality switch down RS 422 and I O board switch up the fol lowing table shows the RS 422 connector pinout selected This is the standard Brooks interface Table 11 16 Standard Brooks RS 422 Interface Pin Function 2 RX 3 RX 5 TX 8 TX With the pe
548. the wafer sensor interlocking will allow the robot to ignore any type of wafer sensors during action commands This sensing interlock should be dis abled for testing purposes only NOTE This command cannot be stored T and Z moving In normal operation all T and Z moves are performed simulta neously See Also RQ INTLCK Example To ignore the wafer sensors during testing SET INTLCK WAF_SEN N Brooks Automation 8 128 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set I O Echo Set I O Echo Purpose This command is used to set the serial communications echo option Format SET IO ECHO status Arguments status Specifies the I O echo option status Y Sets the communications echo option on full duplex N Sets the communications echo option off half duplex Description The I O echo option is used to set full or half duplex communications If the terminal or terminal emulator displays double characters for all user entered text IO ECHO should be set off If the terminal or terminal emulator displays no characters for all user entered text IO ECHO should be set on NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory See Also RQ IO ECHO STORE IO ECHO Examples The following example sets the communications mode in RAM to full duplex SET IO ECHO Y The following example sets the communi
549. this chapter If any additional safety related upgrades or newly identified hazards associated with the robot are identified the Technical Support group will notify users with a Technical Support Bulletin NOTE These safety recommendations are basic guidelines If the facility where the robot is installed has additional safety guidelines they should be followed as well along with the applicable national and international safety codes Chapter Contents Safety ConsideratiOnS esi 24404415545 Ode ERE ERR IE E eR bol be 2 2 Personnel Sarees Cate es usa cay be cau veka Ope FERE du pl aos 2 2 Equipment Satety Guidelines i iius L4 ao 39 ra PEERS AR EE Ed 2 3 Disconnect Lieyices and Interior ae a4 4 4 bp ERR ERI REC EEd EX ERE EX RA 2 5 Posi PE II c rM n 2 5 Ree ance POENIS a3 equitis d ixrbev Qiu ERE P 640804 Edu b ad pad icd s 2 6 EISE RUE 14d d pd od b Dod obi e due bd eb rdc Ds 2 7 Electrical Hazard Classifications oi 4a e axe aa yr ka aont 2 8 Ln RB a bah tam ee a bast Sae ddp edu obere ad bett 2 9 EC az iit a Feb choo TET tT TOT TI TTE 2 10 LIUM ed en os ees Fr ok hk a ee 2 11 Thermal a ho bee ks ooo cee o e956 695695 EVedPie4 Qa 2d P eG Ops 2 12 Vacum obec ee ee ee ee rer err ee re eee eee eee 2 13 Pie and Explosion Avera cis edie Ed ore HERO Si ERR ieee BR Rede 2 14 Environmental Hazards s cic d dear over EROR deed a Rae eee ee C CR 2 15 Matrix of Emergency and Corrective Response Actions
550. this command may also be used for PICK and PLACE commands but no Z Axis motion will occur No error will be issued During a PLACE operation the MagnaTran 7 robot executes the following sequence of moves Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load Brooks Automation Revision 2 2 8 59 Command Reference MagnaTran 7 1 User s Manual Place MN 003 1600 00 Simultaneously moves upward and rotates to the Up position at the Station and Slot number specified using a speed and acceleration profile appropriate for the currently defined load Extends the arm using a speed and acceleration profile appropriate for the cur rently defined load to the R position for the station minus the Safety dis tance See Set Station Option on page 8 142 for setting the safety option Moves to the Down position using a speed and acceleration profile appropriate for the currently defined load depositing the wafer Extends the arm using with wafer speed and acceleration profile to the R position for the station plus the Push distance See Set Station Option on page 8 142 for setting the push option Defines the arm executing the PLACE as being unloaded Retracts the arm using a speed and acceleration profile appropriate for the cur rently defined load For a discussion of speed and acceleration profiles for the MagnaTran 7 robot see Motion Control on page 6 13 NOTE The ope
551. tiTran 5 VacuTran 5 compatibility 11 5 11 5 N Naming Conventions 1 7 Noise Emission 2 15 Notes 1 10 NUMERIC IN 6 24 NUMERIC OUT 6 24 O OCP See Off Center PICK PLACE Off Center PICK PLACE 6 42 Operational Check out 6 87 Operational Interlocks 5 15 6 23 creating 6 26 type 6 24 O Ring Replacement 9 17 P P97 See Marathon Express Packet Mode 8 5 Parity 5 6 Parking 6 91 PASIV 6 58 PC 104 CPU Board Replacement 9 58 PC104 4 11 Personality Board description 4 11 replacing 9 37 troubleshooting 11 26 PICK 8 54 PICK offset 8 56 Pictograms 1 10 Pinch Points 2 4 PLACE 8 59 PLACE offset 8 61 POS ABS 8 90 POS STN 8 94 Power Connection 3 13 5 4 Power Pak 6 27 description 4 15 installing 3 12 operating 6 84 I 3 Index MagnaTran 7 1 User s Manual MN 003 1600 00 replacing 9 63 Power Requirements 5 3 Power Supply 4 15 POWER IND 6 24 Priority Parts Service 9 23 Protective Covers 4 3 Q QR 3 7 R R Radial Axis 1 12 Radial Motion 6 12 Ready Response 8 9 8 11 Real Time Clock Errors 8 187 REF 8 64 Relay I O Board 11 26 Relay I O Circuit 11 27 RELEASE 8 65 REMOVE IO 6 26 8 66 REMOVE STN 8 67 REMOVE WSPACE 8 68 Repeatability 1 12 Request Commands 8 7 Request I O Map 6 26 Request I O State 6 26 Request Response 8 9 RESET 8 118 Reset Stations 9 75 Resetting Home Position 9 71 to user preference 9 73 Resetting Mount Position 9 76 Response Syntax 8 9 Retract Pin 5
552. ting to be loaded from non volatile memory Brooks Automation Revision 2 2 8 139 Command Reference MagnaTran 7 1 User s Manual Set Station MN 003 1600 00 Set Station Purpose Sets for the specified station the absolute coordinate values of the various station related parameters Format SET STN station ARM arm R r loc T t loc Z bto LOWER lower NSLOTS slots PITCH pitch Or SET STN station ARM arm ALL r loc t loc bto lower slots pitch Arguments 8 140 ALL station arm r loc t loc bto lower slot pitch Specifies r loc t loc bto lower slots and pitch in the order presented in the command format The number of the station for which parameters are being specified Range 1 16 The arm A or B for which parameters are being set the default arm is A The station s radial extend location in microns The station s rotational axis location in units of 0 001 degrees The Z axis location in microns relative to Home of the System Transfer Plane For a multi slotted station the System Transfer Plane is half a wafer thickness below the center of the first slot The distance in microns below the System Transfer Plane that becomes the down position location The number of slots in the cassette A value of 0 or 1 indicates a non cas sette type station The pitch in microns between slots NOTE At least one argument must be specified If the ALL
553. tion Revision 2 2 8 67 Command Reference MagnaTran 7 1 User s Manual Remove Workspace MN 003 1600 00 Remove Workspace Purpose Removes a work space Format REMOVE WSPACE name Arguments name Removes a specific defined work space Description This command is used to remove all or specific work spaces previously defined See Also Create Workspace on page 8 26 Brooks Automation 8 68 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Background Request Background Purpose This command is used to check the status of background tasks Note that this com mand will also clear any current errors Format RO BG Response BG status error Arguments status Background task status N Specifies that there are no active background tasks Y Specifies that there is an active background task error Current error number will display 0000 if there is no error See Error Code Reference on page 8 179 NOTE Errors are automatically cleared when the next Action Set Command is issued Description The current status of any background task may be determined by polling the robot Continuous polling will allow the user to determine when the next background task may be loaded NOTE This command also displays and clears any active errors Examples The following example requests the background task execution status and the current error status The status is returne
554. tion typically on the side of the chamber where the robot is installed 2 Connect the CDM communications cable to the robot 7 CAUTION If using the metal shelled connector shut off power before plugging or unplugging the connector at the robot end the metal shell may short out the robot reset drive if removed when power is on If CDM must be removed with the power on unplug at the CDM end MagnaTran 7 CDM Connection Location Figure 3 7 CDM Connection Location Brooks Automation Revision 2 2 3 17 Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 Discrete I O Communication DIO All discrete I O connections are made to the 50 pin connector MISC I O located on the front I O panel of the robot as indicated in Figure 3 8 1 Route the discrete I O communications cable from the units that will be monitored or controlled by the robot 2 Connect the discrete I O communications cable to the robot MagnaTran 7 Discrete I O Communication Connection Location Figure 3 8 DIO Connection Locations Brooks Automation 3 18 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Installation Procedure Software Ins
555. tion between the laptop and the robot 2 Request the encoder T1 and encoder T2 calibration parameters presently stored in the robot by issuing the following commands RQ ENCODER T1 ALL RQ ENCODER T2 ALL The robot will respond with four values for each encoder request 3 Compare the encoder T1 and encoder T2 values with those located on the last page of the robot Quality Report OR Verify that all the encoder values are identical 4 Request the synchronization phase calibration parameters presently stored in the robot by issuing the following commands RQ SYNC PHASE ALL The robot will respond with 3 values 5 Compare the synchronization phase values with those located on the last page of the robot Quality Report QR Verify that all the encoder values are identi cal If any of the above calibration parameters do not match those of the QR call Brooks Technical Support Brooks Automation Revision 2 2 10 35 Troubleshooting MagnaTran 7 1 User s Manual Checking for FET Short Circuits on the Theta Driver Board MN 003 1600 00 Checking for FET Short Circuits on the Theta Driver Board TOOLS Ohmmeter Medium phillips head screwdriver Medium flat head screwdriver M3 hex wrench PROCEDURE 1 Turn off the power to the robot 2 Disconnect all power and communication cables from the robot I O face plate 3 Remove the two robot covers via the four captive screws 4 Remove the Lower Cover Mount Assembly Loo
556. tion of the POWER connector on the robot see Figure 3 5 N CAUTION Never connect or disconnect the robot s power cable with power on as damage to internal components may result Brooks Automation 3 12 Revision 2 2 MagnaTran 7 1 User s Manual Installation MN 003 1600 00 Installation Procedure Power Connection MagnaTran 7 SSaq Figure 3 5 Power Connection Location NOTE Cable length from power supply to robot must not be longer than the power supply is capable of supporting to ensure proper operation of the robot Brooks Automation Revision 2 2 3 13 Installation MagnaTran 7 1 User s Manual Installation Procedure MN 003 1600 00 Communication Connections The MagnaTran 7 offers several methods of communication and operator interaction Serial Control The MagnaTran 7 robot is capable of RS 232 or RS 422 commu nications with the host controller or with peripheral devices Control Display Module The MagnaTran 7 has a Control Display Module CDM allowing monitoring of robot functions and user control through RS 232 Discrete I O Communication In addition the robot is capable of communica tions with discrete I O devices using open collector type inputs and outputs for interlocks or DIO Control of the robot Brooks Automation 3 14 Revision 2 2 MagnaTran 7 1 User
557. tional limit for the theta axis The home workspace is auto matically created by the firmware and may be different in volume from robot to robot since robots vary in arm sizes The home workspace can not be changed or deleted If the home workspace is the only workspace in existence the robot will only be per mitted to home and move about its home volume Other Workspaces Moving from workspace to workspace can be achieved only if the workspace are adja cent or overlapping Although a workspace may be adjacent or overlapping move ment between one and the other may still be prohibited if the the point of crossing is not common for both workspaces Movement between disjointed workspaces is always prohibited The only exception to this is when stations are being taught from the CDM interface Since workspaces may not yet be defined for station because the coordinated for the station are unknown movement of the robot from the learn station menus on the CDM will permit movement into the yet to be defined workspaces Creating Workspaces Creating workspaces can be achieved one of two ways manual create or auto create Manual Create Creating workspaces manually is always available to the user The manual creation of a workspace requires the use of several commands The first com mand is CREATE WSPACE which requires a unique workspace name as part of the command Once a workspace has been created the default values asso ciated with all the
558. to the Down position See Load Port Module 0 001 mm Only dual end effector robots radial motions have a medium speed option The speed at which the dual end effector robot performs radial motions when the active arm s end effector has no substrate but the inactive arm s end effector has a substrate Multi end effector Transport Robot See Robot Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Glossary MN 003 1600 00 MTTR Pan Parallel I O Partial Step Mode Partial Step Size Mean Time To Repair See End Effector Parallel I O allows a Host Controller to communicate with the product using the commands detailed in Chapter 5 The characters in each com mand are converted to sets of binary bits 1s and 0s and the bits for each character are transmitted down a set of wires as a set one wire per bit Additional wires are used for control or handshaking to direct the transfer of data Typically Parallel I O is bidirectional that is the wires carry data in both directions A mode that requires two steps to move the complete pitch distance In partial step mode each slot is divided into an up and down position The distance between the up and down positions is called the partial step size The distance between the up and down positions of a slot Physical Coordinates The location along the spatial axes R T and Z as appropriate PM Poppet Post Position PPS Process Modu
559. to have failed NOTE If the Successful Action Test fails all robot motion will have been com pleted There is no need to clear the error before issuing another command Brooks Automation 6 34 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Wafer Presence Sensors Extend and Retract Robot retracts if necessary Robot moves to Station T and Z Perform PICK z without check Does the Station Pre Extend Test Proceed a NO Have a Wafer Presence Sensor YES Is Sensor configured NO f i Proceed amp Or active arm i YES EXtend Sensor REtract Sensor Check Sensor Type ON OFF ON OFF Read Sensor Error Message Read Sensor State Generated lt t _ State PICK operation Stopped Y Y Indicates Wafer PICK Indicates NO Wafer at Station Complete at is on End Effector PICK Proceeds PICK Proceeds Successful Action Test Does the Station NO Have a Wafer Proceed 44 amp 4 Presence Sensor YES NO IsSensor configured Proceed 4 4 foractive arm i YES EXtend Sensor REtract Sensor Check Sensor Type OFF ON Read Sensor ON OFF Read Sensor State Error Message lt State Generated i Pick Operation Con
560. toma tion s Priority Part Service PPS PPS provides overnight shipment of parts directly from Brooks Chelmsford Ma facility Brooks Factory Repair Services The fourth alternative assumes that the failed FRU can be removed from the MagnaT ran 7 Once the failed FRU has been removed it can be returned to Brooks for diagno sis and factory repair Two alternatives are available for factory repair The Expedited Repair Services provides a typical one week repair turnaround for repair of the failed FRU from receipt of the FRU at Brooks Automation The Standard Repair Service provides a typical four week repair turnaround for repair of the failed FRU from receipt of the FRU at Brooks Automation Brooks Automation Revision 2 2 9 23 Maintenance and Repair MagnaTran 7 1 User s Manual Repair Procedures MN 003 1600 00 Repair Procedures 9 24 The following set of repair replacement procedures will provide the information required for standard user servicing of the Brooks Automation MagnaTran 7 Robot If additional procedures are required during the performance of any procedure they will be specified Procedure Title Page Robot Removal Replacement 9 25 Arm Removal Replacement 9 27 End Effector Replacement 9 29 End Effector Pad Removal Replacement 9 32 Robot Calibration Procedure 9 36 Personality Board Replacement 9 37 Wrist Band Adjustment 9 39 T1 T2 Axis Driver Board Replacement 9 41 Z Driver Board Replacement 9
561. tomation BiSymmetrik frog leg arm set with two end effectors Electrically Erasable Programmable Read Only Memory The EEPROM is the device which stores product configuration information after a store command is issued The EEPROM retains its memory during power off periods The joint on the robot s arms between the inner and outer arm members G 3 Glossary MagnaTran 7 1 User s Manual MN 003 1600 00 Elevator End Effector EPROM Extend Facet Find Bias Flag Flag Sensor Foreline Frog Leg FOUP FRU Full Step Mode Gate Valve High Speed High Vacuum A device used to vertically position a wafer cassette This is typically done to position cassette slots at a specific location for wafer transport The mechanical device at the end of the robot s arm that supports the substrate during transport see Pan Erasable Programmable Read Only Memory The EPROM is a device which is used to store the product s software The EPROM retains its memory during power off periods See PROM Movement outward For a robot this is movement of the robot s arm outward away from the robot s body For an elevator this is move ment of the platform arm outward away from the elevator s body The area on a Transport Module where Process Modules or other types of modules can be connected for access by the central wafer handler The distance that the elevator platform must move up
562. trates into and out of an elevator Bellows A flexible tube that can expand and contract lengthwise while with standing pressure radially BOLTS Box Opener Loader and Tool interface Standards Refers to SEMI E15 1 standard interface for 300mm substrates BTA See Batch Transfer Arm BTO See Base Transfer Offset BiSymmetrik Brooks Automation s patented dual end effector frog leg arm system Cassette Elevator See Elevator Cassette Present Sensor A sensor that detects the presence of a cassette in an elevator Cassette Type Offset The distance downward from the Home position the elevator plat form must move a particular type of cassette to position the bottom most wafer slot slot 1 for transport Category In the context of the product within a record type a category is used to identify a specific command CDM See Control Display Module Command Response A transmission from the product to the host controller Control Display Module A small hand held local controller for the robot It provides access to all robot functions required for setup and testing of the robot Convectron Gauge A thermal conductivity vacuum gauge that is gas dependant i e the gauge must be calibrated for the type of gas being used These gauges are used to measure vacuum to 1 millitorr Brooks Automation G 2 Revision 2 2 MagnaTran 7 1 User s Manual Glossary MN 003 1600 00 Cooler CPS Crossover Cryopump CTC CT
563. ust be followed regarding the storage handling and disposal of gases When handling compressed gases such as Nitrogen eye protection should be worn Whenever any gas is used during service of the MagnaTran 7 robot the facilities stan dard precautions for use of that gas must be employed N DANGER Harmful gases may reside in the system the MagnaTran 7 robot is installed in Under certain circumstances some gases can leave a flammable or poisonous residue refer to the Facilities Material Safety Data Sheets MSDS for these gases and follow the facilities standard precautions prior to performing any routine maintenance Exposure to Nitrogen gas may cause dizziness or suffocation Personal protective equipment such as gloves eye wear respirators self contained breathing apparatus etc may also be required Brooks Automation 2 10 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 Safety Chemical Hazards Chemical Hazards The MagnaTran 7 robot does not make use of any hazardous chemicals However it may be recommended that Isopropyl alcohol be used for cleaning sections of the product during routine maintenance procedures N DANGER Some chemicals may leave a flammable or toxic residue Robot arms and all surfaces inside the vacuum environment could have very hazardous contamination as a result of exposure to process gases Decontamination certification should be obtained prior to perform ing a
564. ust go through before entering a station Firmware Version V1 01 Brooks Automation Revision 2 2 8 145 Command Reference MagnaTran 7 1 User s Manual Set Station Option VIA Point MN 003 1600 00 To perform straight non compound moves to a specified station set the value of POSR to zero for that station The value for POST will be remembered by the robot but will not be used unless the POSR value is set to non zero again See also Off Center PICK and PLACE Feature on page 6 42 Request Station Option on page 8 106 Store Station Option on page 8 167 NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory N CAUTION If station coordinates are set using the SET STN or SET STN OPTION VIA commands they should be verified before performing any wafer transfers to ensure accurate station definition Brooks Automation 8 146 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Station Sensor Set Station Sensor Purpose Defines the setup for the specified sensor in one step Setup includes station assign ment usage type active state and the sensor coordinates in the chamber Format SET STNSENSOR station ARM arm TYPE type ACT state SEN sensor POS R r coord T t coord Arguments station The robot station number being configured for use with wafer sensors arm The arm that is active
565. ut the averages with the following command SET SYNC PHASE ALL tToalue t2value zvalue Store the values with the following command STORE SYNC PHASE ALL Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Restore the Home Position to the Factory Settings Restore the Home Position to the Factory Settings It is possible to restore the home position as it was set when the robot was first pow ered up The values for the SYNC ZERO the home positions found on the OR that accompanied the robot can be stored to restore the original home position This allows the home position to be restored after any problem It is important that if the home position has been changed from the original location set before shipment that the values for SYNC ZERO are recorded for future reference NOTE Each robot has unique values for the SYNC ZERO that can only be used with that particular robot Be sure to check the values for the encoders T1 T2 and Z as well as SYNC PHASE of the robot with the values recorded on the QR to be sure that the values entered for the SYNC ZERO are viable If the values do not coin cide then the home position must be found again This procedure will allow the user to enter the values of the OR to the desired factory default settings home position and store the values JN WARNING When equipment is energized live circuits covered and work per formed remotely the robot i
566. uum chamber The T2 drive shaft runs through the hollow T1 shaft and also extends into the vacuum cham ber The arms are concentrically mounted to these shafts The rotational theta and radial extend position of the arms is dependant upon the motion of the T1 T2 drive shafts When both shafts turn in the same direction theta movement is performed When the shafts turn in opposite directions radial movement occurs The rotational positions of the T1 2 drive shafts is determined by a highly accurate optical position encoder system located within the body of each drive Two circuit boards are located on each motor drive unit These boards amplify and filter the raw encoder signals Since there are no mechanical or electrical connections to the T1 T2 drive shafts unlimited rotation of the arms is allowed The robot incorporates motor overcurrent protection into the T1 T2 servo controllers When an overcurrent situation is detected the corresponding servo is shut off and an error message is generated This protection is a safety feature designed to prevent blown fuses due to excessive load i e the robot arm is obstructed during a regular move or jog motion NOTE The T1and T2 Drive Subsystems are an integrated unit They cannot be separated by the user Brooks Automation Revision 2 2 4 5 Subsystems MagnaTran 7 1 User s Manual Mechanical System MN 003 1600 00 te T1 Inner Shaft Bottom Motor Outer Shaft Top Motor Buffer Board
567. visible between the Theta drive and Z drive mounting plate Inspect the color and amount of grease on the Ball Screw Use a swab to remove a small amount of the grease The grease should be a golden to dark brown color and no contaminates or particles should be present in the sample taken from the screw There should be at least a light coating of grease on the screw If any of the above inspection points report a discrepancy call Brooks Automation Customer Support Brooks Automation Revision 2 2 9 7 Maintenance and Repair MagnaTran 7 1 User s Manual Encoder and Motor Coil Cables Inspection MN 003 1600 00 Encoder and Motor Coil Cables Inspection The Encoder and Motor Coil cables are the only moving cables within the MagnaTran 7 robot It is important to verify that these cables do not come in contact with the inside surface of the covers or any other stationary point in the system This can be done by inspecting for signs of wear or pinching along the cables and their clamps Required Tools 9 8 none Follow these procedures to inspect the Encoder and Motor Coil cables and clamps 1 With the covers removed look for wear and signs of pinching along the length of the Encoder and Motor Coil cables For the Encoder cable white inspect from the Encoder Buffer Boards down to the Coil cable shelf For the Motor cables black 2 places inspect from the Theta Motor cable bracket down to the Coil cable shelf Inspect
568. volatile memory A description of both the communications modes available and the command execution modes available are provided below Refer to Operating Modes on page 8 4 for an in depth discussion of these modes NOTE Store commands store the current setting in RAM to non volatile memory Reset ting the robot will cause the new setting to be loaded from non volatile memory See Also RQCOMM SET COMM Examples The following example stores the current serial I O communications mode in non volatile memory Brooks Automation Revision 2 2 8 157 Command Reference MagnaTran 7 1 User s Manual Store Communication MN 003 1600 00 STORE COMM M B The following example stores the current command execution mode in non volatile memory STORE COMM FLOW Brooks Automation 8 158 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Store DIO Output Store DIO Output Purpose Stores the current mode of Discrete I O DIO output monitoring function Format STORE DIO OUTPUT Description Stores the current function that allows enabling or disabling of the Discrete I O Out put while the serial I O is in control of the robot See Also Set DIO Output on page 8 125 Request DIO Output on page 8 75 Example The following example stores the Discrete I O Output function STORE DIO OUTPUT Brooks Automation Revision 2 2 8 159 Command Reference MagnaTran 7 1 User s Manual Store Home Position Z Axi
569. ward to place a substrate in the substrate present sensor beam for detection A piece of opaque material that interrupts the beam in an optical sensor when a moving mechanism reaches a defined point in its travel An electronic device which emits an optical beam from one side of a notch to a detector on the other side of the notch When a mechanical flag interrupts the beam the position of a mechanism is known The exhaust line of a vacuum pump in a vacuum system Brooks Automation s patented robot arm system Front Opening Unified Pods Refers to front opening pods designed to carry 300mm wafers Field Replaceable Unit An elevator mode in which when commanded to move one step the platform will increment by a distance equal to the pitch distance between cassette slots See Slot Valve Usually the highest speed the speed at which the robot moves when no substrate is on the end effector Pressure ranges from about 10 Torr to 10 Torr Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Glossary MN 003 1600 00 High Vacuum Pump Vacuum pump used to achieve High Vacuum See also Cryopump Home Homing Speed Host Controller ICL Ion Gauge The reference position at which the encoders are reset For a robot this position is considered to be 0 for T Home for R slightly past the retract position for a single end effector robot and equivalent to the mount position for a dual end effector
570. washer that secure the board 4 places See Figure 12 7 Unplug the T1 T2 Driver board the I O board and the Z Driver board from the Personality board The PC 104 CPU Board is connected to the Personality Board Remove the PC 104 Board by removing the 4 40 nut lock and flat 4 places and then gently lift ing the board off of the header pins Replacement Procedure 9 38 1 Connect the PC 104 Board to the new Personality Board Replace the nuts locks and flats 4 places Important The PC104 Card contains all the operating parameters of the robot such as station teach values encoder values home position etc Thus by using the original PC104 Card all this information will be retained in the robot Verify Switch 1 51 is in the same position as replaced board up for RS 232 or down for RS 422 Plug into the circuit boards T1 T2 Axis Driver Board J3 to Personality Board P2 Z Axis Driver Board P1 to Personality Board J7 I O Board to Personality Board P3 Replace the screws locks and flats Connect the cables Route the Z axis encoder cable under the circuit board Replace the Lower Cover Mount Assembly Install the robot protective covers Connect all cables to the robot Apply power to the robot This completes the Personality Board replacement procedure Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Maintenance and Repair MN 003 1600 00 Wrist Band Adjustment Wrist Band Ad
571. will report load status as ON or OFF The command WAF SEN is not required after homing The default on power up is ON The three state mode will report load status as ON OFF or UNKNOWN The CHECK LOAD command or the SET LOAD command must be executed after hom NOTE Set commands only store the specified setting in RAM Resetting the robot will cause the original setting to be loaded from non volatile memory See Also RQ LOAD SET LOAD STORE LOAD MODE RQ LOAD MODE CHECK LOAD Example SET LOAD MODE TRI Brooks Automation 8 134 Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Set Low Speed Set Low Speed Purpose Sets the force low speed option on Format SET LOSPD speed Arguments speed Y forces the next motion complex or primitive to operate at the with wafer low speed N forces the next motion complex of primitive to operate at the normal speed for that command Description Since the wafer is held in position on the end effector only by friction high speed motion is likely to cause misalignment of the wafer relative to the end effector To prevent this the only allowed high speed motions are as follows The without wafer velocity and acceleration will be used only during the ini tial motions in a PICK and the final motions in a PLACE and is selected by the robot based on the PICK PLACE history of both arms The SET LOSPD command allows the operator to ensure that the ar
572. wing effects e servos will be turned off referencing is maintained See also CDM Emergency Stop Standard on page 6 63 Brooks Automation 6 90 Revision 2 2 MagnaTran 7 1 User s Manual Operation MN 003 1600 00 Shut down Shut down The robot requires no special shut down procedures Once use of the robot is com plete power can be removed Ensure that the robot has completed all transfer operations and that there are no wafers left on the end effectors If the host controller is to be shut off the robot should be shut down first SET commands only load parameter values into RAM These values will be reset to default values if power is removed If permanent storage of values is desired STORE values using appropriate commands before shut down Brooks Automation Revision 2 2 6 91 Operation MagnaTran 7 1 User s Manual Shut down MN 003 1600 00 This Page Intentionally Left Blank Brooks Automation 6 92 Revision 2 2 MagnaTran 7 1 User s Manual MN 003 1600 00 7 Alignment and Calibration Overview This chapter provides complete alignment and teaching directions for the Brooks Automation MagnaTran 7 robot PINCH POINT HEAVY LIFTING ELECTRICAL HAZARD Crush points pinch points mechanical hazards electrical hazards shock hazards exist on the MagnaTran 7 robot The procedures in this chapter should only be performed by qualified persons Read and understand Chapter 2 Safety before performing any pro
573. ync Zero Request Sync Zero Purpose Requests the zero or Home reference for the theta and Z axes Format RQ SYNC ZERO T11T21Z Arguments position The axis to be requested T1 Theta axis outer shaft 12 Theta axis inner shaft Z Z Axis Description The MagnaTran 7 robot Home position encoder counts may be requested and recorded for reference in Appendix E User Setting Tables on page 11 17 See Also See Restore the Home Position to the Factory Settings on page 9 71 for instructions on the proper use of this command Brooks Automation Revision 2 2 8 111 Command Reference MagnaTran 7 1 User s Manual Request Version MN 003 1600 00 Request Version Purpose Requests the version and date Format RQ VERSION Response version date Arguments version VV VV date mm dd yy Description This command is supplied for backward compatibility 8 112 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Request Warning CDM Status Request Warning CDM Status Purpose To request the warning feature status of the CDM Format RO WARN CDM Response WARN CDM status Arguments status The status of the CDM warning feature Y enabled N disabled Description This command is used to request the CDM warning feature status If the feature is enabled the host will receive an unsolicited error message CDM IS IN CONTROL when the CDM is turn
574. ypes and how to assign the bits In each example provided the Least Significant Bit is considered to be Bit O The hex numbering scheme is 0 1 2 3 4 5 6 7 8 9 A 10 B 11 C 12 D 13 E 14 F 15 Example 1 MAP Command MAP P_GAUGE_1 DISCRETE IN HI TO DIGITAL IN 0X8 This example command maps the name P GAUGE 1 as a DISCRETE IN input Active HI to I O DIGITAL IN 3 represented by hex 8 The input is wired to connector MISC I O EXT ING pin 4 The io num 0X8 is deter mined by the example in the figure below 8 46 Brooks Automation Revision 2 2 MagnaTran 7 1 User s Manual Command Reference MN 003 1600 00 Map SUP PI O 16 23 SUP PI O 8 15 SUP PI O 0 7 21 20 19 18 13 12 11 VO 0 0 O O 0 0 0 MASK 2 1 8 4 2 1 8 Bit Weight HEX Example 2 MAP Command MAP STN 1 WFRWAF SEN HI TO DIGITAL IN 0X40 This example command maps STN 1 WFR asa WAF SEN input Active HI to I O DIGITAL IN 6 represented by hex 40 The input is wired to connector MISC I O EXT IN6 pin 47 The io num 0X40 is determined by the example in the figure below SUP PIO X 16 23 SUP PI O 8 15 SUP PI O 0 7 VO st 22 21 20 19 18 18 12 11 4 3 0 000 O 0 0 O 0 JO MASK 1 8 1 8 4 Bit Weight 2 1 8 4 4 2 HEX 0 Example 3 MAP Command MAP STN 1 SLOTSBIT SVLV

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