SEM basic operation guide (User`s manual)
Contents
1. SEM basic operation guide User s manual This document is intended to guide for the basic operation of the system information refer to approved by Dr Hongshan He EECS SDSU Basic Operation Procedure for SEM Starting the system Turn key to Start then release to On like starting a car Turn on the computer monitors login ID pc sem password sem A window will pop up to launch pc sem software just click ok no password leave blank Turn on IR camera illumination and screen Watch if stage is down and chamber looks normal if NOT please DO NOT proceed call for help Preparing sample for imaging 1 Cut your sample to appropriate size length width amp height that can appropriately fit in the system Make sure the sample is free of contamination before putting in chamber 3 Mount sample on a sample holder appropriate to its size Affix the sample to sample holder with carbon tape or silver paint Necessary If the sample and substrate is insulating it is recommended to deposit 5 10 nm Gold on the sample before start imaging Do not use any sample without permission which can majorly contaminate the chamber especially volatile samples biological or dairy samples SPECIAL PERMISSION WILL BE REQUIRED TO IMAGE SUCH SAMPLES Loading sample 1 2 Screw sample holder onto the brass pedestal Measure sample size length width amp height using SEM measu2. V is ready Please DO NOT TURN HV ON BEFORE VACUUM GETS READY It will be dangerous for both user and the system to turn it on before HV gets ready Adjust the voltage in operational panel appropriate to the sample being imaged Preferred voltages for biological and other insulating and soft samples 5 kV good conducting samples 15 30 kV Maximum range of voltage is 30 kV Recommended important parameter setting instructions in the operation panel Advanced training required to play with these parameters a Filament current Less than 80 b Gun bias 0 Please DO NOT change this setting at all c Probe current PC 30 lt PC lt 80 depending on your sample d DO NOT use change ABS AFS Degauss Resolution Working distance and Auto gun bias settings in ANY CIRCUMSTANCES Please DO NOT use manual aperture settings from the knob in SEM in ANY CIRCUMSTANCES Advanced training required to use this Once the HV is turned on and above mentioned settings are performed appropriately you are ready to start imaging Use Magnification coarse amp fine focus brightness amp contrast and astigmatism correction knobs to get images Capturing amp saving images 1 Press the Image Capture button to capture images 2 The SEM will capture an image of the current picture 2 4 Press the Run button on tool bar to resume back to imaging To save the captured images click the thumbna
3. il version of it and then click PCI to save it Specify path for saving it users folder is in the C drive Any images saved other than your specified location in the users folder is subject to deletion without any information It is users responsibility to create their own folder in users and save their data in their own folders USE PCI to save images Turning off the system Turn OFF the HV VERY IMPORTANT Press HOME Z 65 button in the stage panel The stage panel will be deactivated and the sample stage will start going down to reset the system Once the system will be reset the stage panel will be activated 5 Press Air button as mentioned in section 3 of loading sample DO 10 11 12 13 14 15 NOT PRESS AIR BUTTON BEFORE HV IS TURNED OFF Follow the procedure 1 5 of Loading sample section Take the sample out with sample holder Close the chamber gently and follow the procedure 8 of section of Loading samples Wait up till vacuum gets ready follow the instruction mentioned in part 1 of section Imaging the sample Once the HV is ready Exit the software from File menu Shut down the computer Turn off the monitor Turn off the IR camera Turn the SEM key to off position Clean the sample preparation area Safety Notes 1 2 DO NOT go behind the SEM DO NOT turn on high voltage without vacuum DO NOT air the chamber while HV is on DO NOT leave
4. rement gauge kept on SEM table IMPORTANT 3 Press the Air button on front panel of SEM and hold for 1 second 10 11 Wait until the chamber is purged completely You can hear the three beep sound and also can look the message in the down left corner of system chamber is aired and ready to change sample Open the chamber by pulling gently with both hands DO NOT force open the chamber Place sample firmly into stage Close the chamber Press the chamber door gently with one hand and press the Evac button on the front of SEM Input sample size and sample height in the pop up window of SEM software Make sure to input accurate data measured in step 2 of Loading sample section then press ok Using the stage tab on the SEM application raise the stage to 12 mm When raising the stage CAREFULLY WATCH THE IR CAMERA IMAGE If a sample were to be raised too far and strike the backscatter detector the damage would be catastrophic Keep the mouse cursor on the large STOP button in the right hand corner of the screen and prepare to stop the sample if it gets too close to the detector Imaging the sample 1 Wait up till high vacuum gets ready You will hear a long beep and receive a message in the bottom left corner of pc sem window HV ready Once the display shows HV ready wait for 30 sec then press HV ON in the operation panel of pc sem which is usually available after H
5. the HV on when not in use for long time DO NOT leave the system when HV is on OM HO pa If you are not an authorized user please DO NOT use the system unsupervised 7 Be very careful not to allow the sample to hit the backscatter detector Watch the IR camera carefully when the stage is in motion Additional readings required to operate SEM Please refer to the following pages of the SEM manual located near SEM in clean room Pages 3 1 till 3 4 3 9 till 3 30 3 46 till 3 49 3 57 and 3 157 till 3 159 For visual instructions please refer to the tutorials posted on the MCL website
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