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Installation and Operation Manual for GF100

1. E 4X 8 32 UNC 70 12 3 0mm Fitting Option Code Dim A Dim B Dim C Dim D DimE DimF Dim G Dim H Dim J vx 69mm 2 72in 82mm 3 24in 18mm 0 72in 38mm 1 48in 83mm 3 28in 31mm 1 21in 127mm 5 0in 13mm 0 50in 124mm 4 88in Figure 1 3 Dimensions GF100 GF120 GF125 Series Section 1 Introduction Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Model GF135 DeviceNet C Seal Connections i T OP CHA 1 EE 1 00in 121in 25mm 31mm O D 187in 5mm Model GF135 DeviceNet VCR Connections BROOKS INSTRUMENT 4X 8 32 UNC 2B V 421N 3 0MM 88in 22mm b d in 1000000300 POM TA 18mm E 2 72in 69mm 1 14 Figure 1 4 Dimensions GF135 DeviceNet Installation and Operation Manual X TMF GF100 Series MFC eng
2. I Base Model Code GF High Purity Ultra High Purity Digital Mass Flow Controllers II Package Finish Specifications 101 Flow range 55 300 slm N Eq 10 Ra HP wetted flow path 121 Flow range 55 300 slm N Eq 5 Ra UHP wetted flow path 126 Flow range 55 300 slm N Eg 5 Ra UHP wetted flow path 8 integrated pressure measurement III Configurability MultiFlo capable X Not configurable IV Special Application XX Standard V Valve Configuration C Normally Closed valve M Meter No Valve VI Gas or SH MultiFlo Bin XXXX XXXX Specific Gas Code amp Range i e 0004 Argon and 100L 100 slpm SH51 055L Standard Configuration 51 55 001 sccm N2 Eguivalent 0 C Reference Special Bin for low density gases e g 73 002 120 000 He 100 002 170 000 H2 SH52 100L Standard Configuration 52 55 001 100 000 sccm N2 Eguivalent 0 C Reference SH53 200L Standard Configuration 53 100 001 200 000 sccm N2 Equivalent 0 C Reference SH54 300L Standard Configuration 54 200 001 300 000 N2 Eguivalent 0 C Reference VII Fitting v1 1 1 2 body width 134mm 1 2 VCR male V2 1 1 2 body width 150 4mm 1 2 VCR male v3 1 1 2 body width 166mm 1 2 VCR male V4 1 1 2 body width 168 6mm 1 2 VCR male C1 1 1 2 body width 92mm 3 8 C Seal C2 1 1 2 body width 114mm 3 8 C Seal VIII Downstream Condition A Atmosphere V Vacuum IX Sensor 0 Default Sensor Orientation X Connector BX Cable adapter
3. lt 0 5 F S per year Settling Time to within 2 F S 300ms lt 860 sccm N2 Eguivalent 400ms 861 7200 sccm N2 Eguivalent 500ms 7201 10000 sccm N2 Eguivalent Warm Up Time Minimum of 30 minutes Leak Integrity 1X107 atm cc sec He Valve Shut Down Leak by lt 0 5 FS Operating Conditions GF125 HA Max Operating Pressure 100 psia max Pressure Insensitivity 5 S P for up to 5 psi sec upstream press spike DifferentialPressure High Pressure Gases Low Pressure Gases 7 45 psid N O CL HBr H gt 100 Torr SiCL Valve Configuration Normally Closed Ambient Temperature Range 10 C 50 C Zero Temperature Coefficient Span 0 05 S P per C Zero 0 005 F S per C Table 1 5 Specifications for Safe Delivery System SDS GF120 Series Performance GF120XSL GF120XSD Full Scale Flow Range N Eg 4 25 sccm gt 25 to 1 slpm Gases Supported ASH PH BF SiF Ar Xe N O N GeF4 AsF5 PF3 H2Se HMDSO HMDSN H20 MultiFlo Programmable Flow Accuracy Not Configurable 0 35 S P lt 35 F S Repeatability 8 Reproducibility 1 S P gt 35 F S lt 0 15 S P Zero Stability lt 0 6 F S per year Settling Time to within 2 F S lt 3 sec Warm_Up Time minimum of 30 minutes Leak Integrity 1X10 atm
4. M tare p 25mm eller 1 inch eller mindre faller under Sound Engineering Practice SEP God Teknisk Praxis European Electromagnetic Compatibility EMC Elektromagnetisk kompatibilitet Brooks Instrument elektriska elektroniska CE m rkta anordningar har redan genomg tt ett framg ngsrikt prov enligt regleringar under Electromagnetic Compatibility EMC directive 2004 108 EC Man m stre dock gna s rskild uppm rksamhet till valet av signalkabeln som skall anv nds f r CE m rkta anordningar Signalkablars packboxars och kontakdons kvalitet Brooks Instrument levererar h gkvalitativa kablar som verensst mmer med specifikation f r CE intygade produkter Om man anv nder sin egen signalkabel d b r man anv nda en kabel som r fullst ndigt sk rmad med en 100 avsk rmning D eller Cirkelformiga kontakdon skall vara sk rmade med metalliska avsk rmningar Om det r anv ndbart b r metallpackboxar som ger en bra fastsp nning f r kabelsk rmar anv ndas Kabelavs rmningen m ste kopplas till den metalliska sk rmande anordningen eller packboxen och sk rmas vid b da ndar runt omkring Avsk rmningens avsp nning m ste jordas Card Edge Kontaktdon r icke metalliska F r att verensst mma med krav p CE intyg skall de kablarna som anv nds vara sk rmade med 100 sk rmning Sk rmningen m ste jordas Vad g ller stiftkonfigurationen Se den bifogade Instruktionshandboken ESD Elektrostatiska url
5. 1 5 Product Warranty Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www Brookslnstrument com This information provides general warranty information limitations disclaimers and applicable warranty periods according to product group 1 6 How to Order a GF100 Series Device Refer to Section 5 1 7 Industry Standard References Refer to Table 1 1 1 8 GF100 Series Gas Table Refer to Appendix A 1 9 Glossary of Terms and Acronyms Refer to Table 1 2 Installation and Operation Manual Section 1 Introduction X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Table 1 1 Industry Standard References MIL STD 810 Method 514 4 Category 1 Transportation Reguirement Method 516 4 Procedure 1 Functional Shock Test Reguirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates SEMI E17 Guideline for MFC transient characteristics tests SEMI E18 Guideline for temperature specifications of the MFC SEMI E27 Standard for MFC and MFM linearity SEMI E28 Guideline for pressure specifications for the MFC SEMI E52 Practice for referencing gases used in digital MFCs SEMI E54 Sensor actuator network connections for DeviceNet SEMI E56 Test method for detemining accuracy linearity repeatability short term reproducibility hystereses of thermal MFCs SEMI E66 Test method for determining particle co
6. 2 4 40 H 878 3 C2H4 He 3 Ethylene Helium 19 7 19 7 13 14 40 41 125 126 375 3 1 881 10 B2H6 Ar 5 Diborane Argon 24 7 29 7 1 36 105 106 3 1000 1001 3000 3001 8100 897 2 7 C2H4 He 2 7 Ethylene Helium 19 7 19 7 1 40 41 125 126 377 378 1158 1159 3502 3503 10700 10701 898 1 GeH4 H2 1 Germane Hydrogen 20 7 20 7 30 31 91 92 275 27 850 851 2530 2531 8000 8001 910 5 GeH4 H2 0 5 Germane Hydrogen 20 7 20 7 30 31 92 93 280 860 861 2600 2601 8000 8001 16300 16301 916 2 PH3 H2 2 Phosphine Hydrogen 21 7 21 7 30 31 91 92 275 850 851 2530 2531 8000 8001 16200 16201 917 50 C3H6 b N2_ 50 Propylene Nitrogen 5 21 7 17 18 53 54 16 500 501 1500 1501 4100 4101 860 8601 925 10 C3H6 b N2 10 Propylene Nitrogen E 21 7 26 27 82 24 760 761 2300 2301 6400 6401 13100 13101 929 10 CH4 N2 10 Methane Nitrogen A 21 7 29 30 273 850 851 2520 2521 7200 7201 15000 15001 930 3 9 H2 N2 3 9 Hydrogen Nitrogen d 29 7 30 92 281 860 861 2600 2601 7400 7401 15100 15101 10 B2H6 He 10 Diborane Helium 19 7 19 7 1 965 2918 2919 9000 9001 18400 18401 30 C2H4 He 30 Ethylene Helium 1 276 850 7800 7801 16000 16001 o E 10 H2 He 10 Hydrogen Helium 3500 3501 10700 10701 22200 22201 15 H2 B2H6 15 Hydrogen Diborane A 130 13 17 CH4 CO2 17 Methane Carbon Dioxide 211 2000 2001 20 CH6Si H2 20 Methylsilane MONO Hydrod 2000 2001 50 CH3SiHGI2 H450 Dichlor
7. Argon gas applications reguire higher differential pressure Low vapor pressure gases reguire an inlet pressure of gt 100 Torr with vacuum on outlet example SiCl4 Contact Brooks Technical Support for more information Maximum Operating Pressure 100 psia max Pneumatic Valve Operating Pressure 43 5 psia 72 5 psia Leak Integrity external 1x10 10 atm cc sec He Mechanical Valve Type Normally Closed Wetted Materials SEMI F20 UHP Compliant 316L VIM VAR Hastelloy C 22 316L Stainless Steel 304 Stainless Steel KM 45 Surface Finish 4u inch Ra 0 1 um Ra Diagnostics 8 Display Status Lights MFC Health Network Status Alarms Sensor Output Control Valve Output Over Temperature Power Surge Sag Network Interruption Sensor Drift Flow Error Valve Leak Display Type Top Mount Electronically Rotatable Integrated LCD Viewing Distance Fixed 10 feet Units Displayed Resolution Flow 2 0 Temp C Pressure psia kPa 0 1 unit Electrical Electrical Connection Analog RS 485 via 9 Pin D connector DeviceNet via 5 Pin M12 connector Digital Communication RS485 model specific DeviceNet model specific RS485 Diagnostic Port all models Diagnostic Service Port RS485 via 2 5 mm jack Power Supply Consumption DeviceNet 11 25 Vdc 545 mA max 1
8. Os equipamentos el ctricos electr nicos da Brooks Instrument que t m a marcac o CE passaram os testes comprovativos dos requisitos de compatibilidade electromagn tica Directiva EMC n mero 2004 108 EC Todavia ao utilizar os aparelhos compete lhe a escolha dos cabos de sinal adequados para os eguipamentos com marcac o CE Qualidade dos cabos de sinal bucins e conectores A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marcag o CE No caso de utilizar os seus pr prios cabos de sinal assegure uma blindagem a 100 Os conectores do tipo D ou circular t m que ser blindados por uma malha met lica Se precisar de usar bucins estes t m que permitir a crimpagem da malha blindagem do cabo A blindagem do cabo deve ser ligada ao corpo met lico ou bocal e assegurando a blindagem em 360 A blindagem deve terminar numa ligag o terra Os conectores ligados a cart es ser o em geral n o met licos Os cabos utilizados devem ter fita de blindagem a 100 para satisfazer a marca o CE A blindagem dever terminar numa ligac o terra Atribuic o de pinos Veja as instrug es de operag o anexas Descarga Electrost tica ESD A ATENCAO Alguns componentes deste equipamento s o susceptiveis acc o da electricidade est tica podendo ficar danificados Ao remover colocar ou manipular placas de circuitos electr nicos dever ter em atenc o os seguintes procedimentos Desligar o equip
9. The Brooks GF Series patented flow sensor combined with a high speed ARM processor and fast acting diaphragm free valve assembly enables Faster response and settling time for improved wafer throughput Ultra fast 1 2 second etch step processing Reduced diverted gas consumption and associated abatement costs Time sensitive gas delivery steps in Atomic Layer Deposition e User programmable start up function for processes requiring a slow ramped gas turn on or time critical transitions between flow rates MultiFlo Gas and Range Configurability The Brooks MultiFlo technology delivers exceptional improvement in process gas accuracy for linear and non linear gases This is achieved through advanced gas modeling and optimized through actual gas testing Brooks MultiFlo allows the device to be quickly and easily configured for another gas and or flow range without sacrificing accuracy or rangability Selecting a new gas automatically creates a new calibration curve establishes optimized PID settings for dynamic control automatically compensates for gas density effects and ensures smooth overshoot free transitions between flow rates with excellent steady state stability Brooks MultiFlo technology offers unparalleled flexibility An extensive gas database is provided and a single device can be quickly programmed for thousands of different gas and flow range combinations Process benefits achieved Mass flow controller full scale fu
10. Valve Shut Down N O Valve 2 of ES Zero Stability lt 0 5 F S per year Temperature Coefficient Span 0 05 S P per C Zero 0 005 F S per C Ratings Operating Temperature Range 10 50 C Differential Pressure Range 3 860 sccm 7 45 psid 861 7200 sccm 10 45 psid 7201 55000 sccm 15 45 psid Argon gas applications reguire an additional 10 psid differential pressure Low vapor pressure gases reguire an inlet pressure of gt 100 Torr with vacuum on outlet example SiCl4 Contact Brooks Technical Support for more information Maximum Operating Pressure 500 psia max 100 psia max Leak Integrity external 1x10 atm cc sec He Mechanical Valve Type Normally Closed Normally Open Meter no valve Wetted Materials GF100 SEMI F20 HP Compliant 316L VIM VAR Hastelloy C 22 3161 Stainless Steel 304 Stainless Steel KM 45 GF120 GF125 SEMI F20 UHP Compliant 316L VIM VAR Hastelloy C 22 3161 Stainless Steel 304 Stainless Steel KM 45 Surface Finish 10u inch Ra 4u inch Ra 0 1 um Ra Diagnostics 8 Display Status Lights MFC Health Network Status Alarms Control Valve Output Network Interruption Display Type Viewing Angle Viewing Distance Units Displayed Resolution Top Mount Integrated LCD Fixed 10 feet Flow 2 0 Temp C Pressure psia kPa 0 1 unit Electrical Elect
11. adapts SX base BB DeviceNet Analog Not Available on 79 8mm fitting DX YX EX DeviceNet Standard Configuration Parameters Poll 10 Poll 10 Poll 10 External Power On Full Scale Full Scale Full Scale Instance Instance State Baud 1 0 Connector State Setting Setting Setting Producer Consumer Transition Rate DO DeviceNet 5 Pin Micro Idle Count nteger 6000h 2 7 Executing 500KB D1 DeviceNet 5 Pin Micro Idle Count nteger 6000h 21 7 Executing 500KB D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB D3 DeviceNet 5 Pin Micro Idle Count nteger 6000h 22 7 Executing 500KB D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB D5 DeviceNet 5 Pin Micro Idle Count nteger 6000h 6 8 Executing 500KB D6 DeviceNet 5 Pin Micro Idle Count nteger 7EFEh 3 7 Executing 500KB D7 DeviceNet 5 Pin Micro Idle Count nteger 7FFFh 6 8 Executing 500KB D8 DeviceNet 5 Pin Micro Idle Count nteger 6000h 3 7 Executing 500KB D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB DA DeviceNet 5 Pin Micro Idle Count nteger 7FFFh 22 7 Executing 500KB DB DeviceNet 5 Pin Micro Idle Count nteger 6000h 22 8 Executing 500KB DC DeviceNet 5 Pin Micro Idle Count nteger 7FFFh 3 7 Idle 500KB DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB DE DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB DX DeviceNet 5 Pi
12. e Installare apparecchiatura in base alle istruzioni riportate nel Manuale d Uso e alle prescrizioni locali e nazionali in vigore Collegare i prodotti esclusivamente ad un adeguata sorgente di pressione ed alimentazione elettrica e Procedimento 1 mettere lentamente sotto pressione il sistema Aprire lentamente le valvole di servizio per evitare l oscillazione del flusso 2 Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso Se non ci sono perdite caricare il sistema alla pressione d esercizio Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione Se avete bisogno di pezzi di ricambio il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument Attivit e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza La sostituzione con pezzi di ricambio non originali pu causare incendi pericolo di scosse elettriche o funzionamento improprio e Tutti gli sportelli dellimpianto devono essere chiusi le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali tranne quando il personale specializzato esegue lavori di manutenzione A ATTENZIONE In caso di apparecchiature in cui scorre un liquido se per qualsiasi motivo bisogna chiudere le valvole d entrata e uscita accanto all apparecchiatura allora si deve
13. helyettesit s t zet ram t svesz lyt vagy el gtelen m k d st eredmenyezhet e A berendez s sszes ajtaja mindenk ppen legyen z rva a v d burkolatok pedig legyenek a hely k n az ram t s s a szem lyi s r l sek elker l se rdek ben kiv ve ha szakk pzett szakember v gez rajta karbantart si munk kat A FIGYELEM Folyad kot ramoltat berendez sek eset ben ha b rmilyen okb l el kell z rni a berendez s melletti ki s bel p szelepeket a berendez st teljesen le kell r teni Ennek elmulaszt sa a folyad k h t gul s t okozhatja ami k ros thatja a berendez st s szem lyi s r l shez vezethet Nyom start berendez sekre vonatkoz eur pai ir nyelv PED Minden 0 5 bar n l g magasabb bels nyom s s 25 mm n l vagy 1 h velykn l nagyobb nyom start berendez s a nyom start berendez sekre vonatkoz eur pai ir nyelv PED hat lya al tartozik e Ag pk nyv M szaki adatok fejezete tartalmaz a PED ir nyelvre vonatkoz utas t sokat e Ag pk nyvben megadott m r eszk z k megfelelnek a 97 23 EK EU ir nyelvnek e Minden Brooks tfoly sm r az 1 es folyad kcsoportba tartozik e A25mm n l vagy 1 h velykn l nagyobb m r eszk z k megfelelnek a PED I II vagy III kateg ri nak e A 25 mm es illetve 1 h velykes vagy kisebb m r eszk z k az elfogadott m rn ki gyakorlatot SEP k vetik Elektrom gneses kompatibilit sra vonatkoz eur pai i
14. par un blindage int gral Les connecteurs rectangulaires ou circulaires utilis s doivent avoir un blindage m talligue S il y a lieu des presse toupes m talligues doivent faire office de serre cran de c ble L cran du c ble doit tre raccord enveloppe m tallique ou au presse toupe et blind aux deux extr mit s sur 360 degr s Le blindage doit s achever sur une prise de terre Les connecteurs de carte standards sont non m talliques Les c bles utilis s doivent tre prot g s par un blindage int gral pour se conformer la certification CE Le blindage doit s achever sur une prise de terre En ce qui concerne la configuration des broches veuillez vous reporter au manuel d utilisation joint ESD d charge lectrostatique ATTENTION cet instrument contient des composants lectroniques sensibles a lectricit statigue Des proc dures de manipulation ad quates doivent tre respect es pendant le retrait installation ou la manipulation des cartes de circuits imprim s ou des dispositifs internes Proc dure de manipulation 1 L alimentation lectrique de appareil doit tre coup e 2 Le personnel doit tre mis la terre au moyen d une bande de poignet ou d un autre moyen s r et ad quat avant installation le retrait ou le r glage de toutes les cartes de circuits imprim s ou autres dispositifs internes 3 Les cartes de circuits imprim s doivent tre transport es dans un r cipien
15. uziemiony Z cza kraw dziowe s standardowo niemetaliczne Stosowane przewody musz by w pe ni ekranowane zgodnie z certyfikatem CE Ekran przewodu powinien by uziemiony Konfiguracja styk w jest podana w niniejszej instrukcji obs ugi Wy adowania elektrostatyczne ESD A UWAGA Urz dzenie zawiera cz ci elektroniczne podatne na uszkodzenia spowodowane adunkami elektrostatycznymi Przy obchodzeniu si z wewn trznymi podzespo ami i cz ciami elektronicznymi nale y przestrzega nast puj cych zasad post powania Nale y od czy zasilanie od urz dzenia 2 Osoba wykonuj ca czynno ci musi zosta uziemiona za pomoc opaski na przegubie d oni lub w inny bezpieczny spos b zanim przyst pi do instalacji wyj cia lub regulacji obwod w drukowanych lub innych wewn trznych podzespo w elektronicznych urz dzenia 3 Obwody drukowane nale y transportowa w przewodz cym pojemniku P ytki drukowane nale y wyjmowa z opakowania ochronnego bezpo rednio przed ich monta em Wymontowane p ytki nale y niezw ocznie umie ci w opakowaniu ochronnym s u cym do transportowania sk adowania lub odsy ania do producenta Uwagi Fakt e urz dzenie zawiera cz ci nieodporne na wy adowania elektrostatyczne ESD jest rzecz normaln Wi kszo nowoczesnych urz dze elektronicznych zawiera komponenty wykonane w technologii tlenk w metali NMOS SMOS itp Jak pokazuje praktyka nawet niew
16. 4000 Carbonyl Fluoride 19 7 A B 500 501 1500 1501 4000 Boron Trifluoride 19 7 A Fluoroform Freon 23 24 7 E 445 1345 3600 Nitrogen Trifluoride 24 7 46 140 141 430 431 1300 1301 3600 3601 Ethane 177 R 153 154 469 470 1418 1419 4000 4001 Diborane 19 7 116 117 358 359 1082 1083 3100 3101 Phosgene 5 Phosphorus Trifluoride E z 400 401 1200 1201 3200 372 Carbon Tetrafluoride Freon 14 373 1123 1124 3010 Dichlorosilane Propylene R 338 339 1022 1023 2800 Boron Trichloride 289 290 874 875 2230 CIO3F Perchloryl Fluoride 350 351 1060 1061 2800 2801 CIF3 Chlorine Trifluoride ja E 35 327 328 1000 1001 2560 2561 C2H7N Dimethylamine d 34 310 311 960 961 2530 2531 SiF4 Silicon Tetrafluoride E 34 316 317 2600 2601 C3H8 Propane E 2 300 301 2420 2421 C2F4 Tetrafluoroethylene 300 301 2300 2301 Si2H6 DISILANE 282 283 104 C4H8 Butene 20 7 24 7 5 108 SiCI4 Silicon Tetrachloride 87 For reference only consult factory on the latest tables 990 100 0082 R17 A 1 Appendix A GF100 Series Gas Table Installation and Operation Manual X TMF GF100 Series MFC eng i Part Number 541B137AAG GF100 Series November 2015 Table A 1B GF100 Series Gas Table Codes 109 875 Bins SH40 to SH50 Min inlet pressure for vac exhaust PSIA SH48 SH49 SH50 Gas Symbol Gas Name SH40 SH47 SH48 SH
17. Are system valves open or is the Use tool software to verify purge input activated Is the setpoint correct for the Use tool software to verify Installation and Operation Manual Section 4 Maintenance 8 Troubleshooting X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Table 4 2 GF100 Series Troubleshooting Guide Continued 4 No gas flow above some set point NOTE When the setpoint is increased beyond this point the GF100 Series signal remains at some value lower than the set point Is the gas inlet outlet differential Verify that the pressure is correct for pressure sufficient the gas and range If required adjust regulator to achieve proper pressure NOTE If the pressure reading is too low the valve voltage to the GF100 Series will be at its maximum output This condition will cause internal GF valve heating and inability to properly reach desired flow setpoints Is the GF100 Series calibrated for the Check GF100 Series side label Run a flow check to verify gas flow If flow is incorrect replace the GF100 Series with a unit that is calibrated properly 5 No gas fow below some setpoint TT NOTE When the setpoint is decreased below this point the GF100 Series signal remains at some value higher than the setpoint Is the gas inlet outlet differential Verify that the pressure is correct for pressure too high or above published this gas and range If required adjust se
18. Damaged components even though they appear to function properly exhibit early failure Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Dear Customer We appreciate this opportunity to service your flow measurement and control reguirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liguid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest guality available offering superior performance reliability and value to the user lt is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www Brooksinstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Ser
19. cigu izstradajuma sniegumu izstradajuma uzst di anu lieto anu atjaunin anu programm anu un apkopi uzticiet veikt tikai kvalificetam person lam Pirms izstradajuma uzst di anas lieto anas un apkalpo anas izlasiet visus noradijumus Ja ST instrukciju rokasgr mata nav pareiza izstr dajumam atbilsto rokasgramata l dzu skat aizmugur jo v ku kur ir sniegta viet ja tirdzniecibas biroja kontaktinform cija 4 BRIDIN JUMS Nelietot instrumentu rpus Instrukciju un lieto anas rokasgr mat nor ditajiem parametriem i bridinajuma neiev ro anas rezultata var rasties traumas un vai aprikojuma bojajumi Ja j s nesaprotat kadu no instrukcijam sazinieties ar Brooks Instrument p rst vi un l dziet izskaidrot to lev rojiet visus bridin jumus piesardzibas m rus un instrukcijas kas noraditi uz izstr d juma vai piegadati kopa ar to Uzst diet aprikojumu ta ka tas noradits attiecigaj instrukciju rokasgr mat ieklautaja uzst di anas instrukcija un atbilsto i piem rojamajam vietejam un nacion laj m norm m Pievienojiet visus izstradajumus pareiziem elektriskajiem un spiediena avotiem Lieto ana 1 L n m uzs ciet pl smu sist m Lai izvair tos no straujiem pl smas k pumiem l n m atveriet procesa v rstus 2 P rbaudiet vai nav nopl des ap pl smas m r t ja iepl des un izpl des savienojumiem Ja nopl des nav uzst diet sist m darba spiedienu P rliecinieties par to
20. zgodne z dyrektyw EN 97 23 EC Wszystkie mierniki przep ywu firmy Brooks Instrument nale do 1 szej grupy cieczy Urz dzenia pomiarowe o wielko ci powy ej 25 mm lub 1 cala nale do kategorii I II lub III dyrektywy PED Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom Uznanej Praktyki In ynierskiej SEP Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej EMC Urz dzenia elektryczne elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE przesz y pozytywnie testy pod k tem spe niania przez nich wymog w kompatybilno ci elektromagnetycznej Dyrektywa EMC 2004 108 EC Jednak e szczeg ln uwag nale y po wi ci przy doborze przewod w sygna owych kt re maj by stosowane z urz dzeniami ze znakiem CE Jako przewodu sygna owego d awic oraz z czy przewodu Firma Brooks Instrument dostarcza wysokiej jako ci przewody kt re spe niaj wymagania zawarte w specyfikacji dla certyfikatu CE Je eli stosuje si w asne przewody sygna owe to powinny one by w ca o ci w pe ni ekranowane Z cza typu D lub okr g e powinny zawiera metalowy ekran Je li to mo liwe nale y stosowa metalowe d awice przewodu zapewniaj ce mocowanie jego ekranu Ekran przewodu powinien by po czony z metalow os on lub d awic zapewniaj c ca kowite dook lne ekranowanie na obu ko cach przewodu Ekran przewodu powinien by
21. 1 2 Terms and Acronyms Definition Customer Special Requirement Chemical Vapor Deposition SP DeviceNet A 5 wire local network I O communication device that employs a command response communication protocol Digital Signal Processor EPI Epitaxy EPI A process technology where a pure silicon crystalline structure is deposited or grown on a bare wafer enabling a high purity starting point for building the semiconductor device MultiFlo Configurator I O communication software package that configures gas and flow ranges MultiFlo Technology A physics based calibration methodology that enables gas and flow range configuration within a defined standard configuration Fm Proportonalintegral Derivative Gonroler Pounds per Sguare Inch Absolute Pounds per Sguare Inch Differential Pressure Transient Insensitive Reduces the effect of pressure fluctuations in gas flow Applicable to GF125 only As pressure increases flow increases at a pressure rate of rise or ROR HC Standard Configuration w Hastelloy sensors to reduce reaction to corrosive gases S P Setpoint tep Technology Enables fast set point control through a high speed DSP and low volume drive circuit IU i i S Vertical mounting attitude with inlet side facing up Installation and Operation Manual Section 1 Introduction X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series 1 10 Description ES em ma m Ultra Fast Response
22. 12 Section 2 Installation GF100 Series PI 9 PIN MALE DSUB 3 SPECIFICATIONS TEREO PLUG STRIPPED 8 TINNED SHIELDED Figure 2 10 MultiFlo Cable Adapter Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 1 793 039 250 max sal 11 360 020 I 433 012 JI 2 5mm AUDIO PLUG 2X 4 40 UNC 2A THUMB SCREWS Using the MultiFlo Configurator software configure the gas and flow rate according to Table 2 3 The MultiFlo Configurator interfaces to the GF Series device through RS485 or DeviceNet communications There are various ways to connect the device regardless of device configuration Devices may be connected through the diagnostic port using cables in one of the two Basic MultiFlo Configurator Kits or DeviceNet devices can alternatively be connected using a National Instruments or SST DeviceNet scanner card 778Z010ZZZ Basic MultiFlo Configurator Kit A331710003 Cable Assembly 2 5mm 214FO27AAA USB RS485 Converter with DB 9 female 7782011ZZZ Basic MultiFlo Configurator Kit w Power Supply and Adapter Cables A331710003 Cable Assembly 2 5mm 214F027AAA USB RS485 Converter with DB 9 female A 332295001 Power Supply MFC A332297002 Cable Power 9 Pin A332297001 Cable Power DeviceNet Connect the MultiFlo Cable Adapter 2 5mm jack to the Diagnostic Port on the top of the device See Figure 2 12 Connect the RS485 end of the converter to the 9 Pin RS48
23. 2 82in 79 8mm13 14in 22mm 0 86in 28mm 1 12in 72mm 2 82in 92mm 3 62in 30mm 1 18in 39mm 1 5311 83mm 3 28in 92mm 3 62in 30mm 1 18in 39mm 1 5311 83mm 3 28in 92mm 3 62in 22mm 0 86in 28mm 1 12in 83mm 3 28in cx C SEAL EX W SEAL WX W SEAL DX C SEAL YX W SEAL AX C SEAL BX W SEAL LX C SEAL 105mm 4 13in 93mm 3 66in 105mm 4 13in 93mm 3 66in 93mm 3 66in 105mm 4 13in 105mm 4 13in 105mm 4 13in 25mm 1 00in 25mm 1 00in 25mm 1 00in 25mm 1 00in 25mm 1 00in 25mm 1 00in 25mm 1 00in 25mm 1 00in VCR Configurations Electrical Connector DX BB Specific Dimensions 3 66in 93mm g Electrical Connector G1 GX TX Specific Dimensions Electrical Connector SX Specific Dimensions 3 29in 84mm O BROOKS INSTRUMENT 9000000000099 9900000000000 0000000000000 9000000000000 9000000000000 9000000000000 2 000000000000 9000000000000 3000000000009 2500000000007 9 00000000000 9000000000099 9900000000000 9000000000000 9000000000000 9000000000000 0000000000000 0000000000000 0000000000000 60000000000 2000000000009 90009000090 9800000000000 9000000000000 9000000000000 9000000000000 0000000000000 0000000000000 9000000000000 0900000000000 3000000000009 2000000000000 le a a e e e
24. A B constant The full scale flow rate of the device is established by selecting a restrictor with the correct pressure differential for the desired flow The flow sensor is a very narrow thin walled Hastelloy tube Onto this tube are built upstream and downstream temperature sensing and heating elements During no flow conditions the amount of heat reaching each temperature sensor is equal so temperatures T1 and T2 Figure 3 1 are equal Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor The temperature difference T2 T1 is directly proportional to the gas mass flow GF100 Series operating principles are described in Figure 3 1 3 1 Section 3 Operation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Setpoint if DeviceNet serial data Setpoint if RS485 analog signal Sensor Simulator Pressure n a a PID Control Transducer Valve Pressure Fluctuation Operating principles are listed below by following 1 5 1 The GF125 uses a pressure transducer and support circuitry that sums the transducer signal in the sensor path transducer not included in the GF100 and the GF120 Incoming pressure fluctuation results in a signal that is proportional to fluctuation 2 The signal from the pressure transducer is inverted and then summed in with the original sensor signal 3 The tw
25. By selecting No the commissioning process will end GF135Commission 1 0 0 5 After numerous checks are performed the auto volume will start This will take approximately 5 minutes to complete The K1 setpoints will then begin This process will run for approximately 40 90 minutes Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Section 2 Installation GF100 Series Fr 6 Once the auto volume and the K1 set points are complete the program will go back to the initial screen In addition the overall run time will be displayed From here another device or the same one again may be selected for commissioning 2 21 2 22 Section 2 Installation GF100 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 3 1 General Section 3 Operation GF100 Series After the device has been properly installed in the process it is ready for operation When initiating flow slowly open any upstream shutoff valve to avoid a flow surge A bypass is helpful in bringing the flow on smoothly Avoid starting a pump to supply the device without the use of a valve upstream of the device A CAUTION Any sudden change in
26. I II alebo III kateg riu PED Meracie pr stroje men ie alebo rovn ako 25 mm alebo 1 zodpovedaj zau vanej meracej praxi SEP Eur pska smernica vz ahuj ca sa na elektromagnetick kompatibilitu EMC Elektrick elektronick zariadenia Brooks Instrument ktor si zasl ili zna ku CE spe ne splnili sk obn testy po iadaviek elektromagnetickej kompatibility smernica EMC 2004 108 EC Pritom treba venova zvl tnu starostlivos na v ber sign lnych k blov zariadenia s ozna en m CE Kvalita sign lnych k blov k blov ch spojov a pr pojov Brooks Instrument pon ka vysoko kvalitn k ble ktor sp aj po iadavky kvalitat vneho zaradenia CE Ak pou ijete vlastn sign lne k ble maj ma 100 n tienenie s pln m filtrovan m Pr pojky kruhov alebo tvaru D maj ma kovov tienenie V pr pade potreby treba pou i kovov k blov spojky k upevneniu k blov ho filtra K blov filter treba pripoji ku kovov mu telesu alebo k puzdru na oboch stran ch zabezpe i tienenie v kruhu 360 Tienenie m by ukon en uzemnen m Pr pojky ved ce ku kart m pod a noriem s nekovov Pou it k ble pre vyhovenie predpisom CE musia ma 100 n filtrovanie tienen m Tienenie m by ukon en uzemnen m Konfigur cia kontaktov Vi prilo en n vod na obsluhu Elektrostatick v boj ESD A UPOZORNENIE Pr stroj obsahuje s iastky ktor m u by po k
27. Il Package FinishSpecifications 135 Pressure Transient Insensitive PTI Ultra High Purity Advanced Diagnostic MFC III Configurability X Gas specific IV Special Application XX Standard Application V Valve Configuration C Normally Closed Valve VI Specific Gas Code 8 Range XXXX XXXX Specify Gas Code 8 Range i e 0004 Argon and 010L 10 slpm VII Fitting VX 1 1 2 VCR 1 4 CX 1 1 8 C Seal 92mm WX 1 1 8 W Seal 92mm FUTURE RELEASE VIII Downstream Condition A Atmosphere Vacuum IX Sensor 0 Default Orientation X Connector DeviceNet Standard Configuration Parameters Poll 10 Poll 10 Poll lO External Power On Full Scale Full Scale Full Scale Instance Instance State Baud 1 0 Connector State Setting Setting Setting Producer Consumer Transition Rate DO DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB D9 DeviceN
28. Komponenten die die Metalloxidtechnologie NMOS SMOS etc verwenden Die Erfahrung hat gezeigt dass schon geringe Mengen elektrostatischer Energie ausreichen um diese Ger te zu besch digen oder zu zerst ren Besch digte Teile fallen fr h aus obwohl sie funktionsf hig zu sein scheinen Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Greek Bacik c odnyies AiapdoTe Tpiv OUVEXIOETE H Brooks Instrument oxedidZel TTAP VE KAI OKI L E TA TTPOIOVTA TNG OE OUNN PPWON pe TTA BOC EOVIKWV Kai iEBVOV TIPOTUTTWV H OWOT EVKAT OTOON XP ON Kai OUVT PNO TOUS ATTOTEAEI aTTApa TNTA TTPO TT BEON TNG AEITOUPVIAG EVT G TWV KAVOVIKWV opiwv Ol TTAPAK TW O NVIEG TIPETTEI VA TNPO VTAI KAI TTP TTEI VA EVOWHATWBOUV oro TTP VPAUHA AOPG EIGG TNG epyac as cag KATA Tnv EYKAT OTAON xp on Kal OUVT PNON Trpo vrwv TNG Brooks Instrument Tia OWOT ATTOTEAEONA n EVKAT OTOON Aeiroupyia evnu pwon TTPOYPAHHATIOH G KAI CUVT PNON TTP TTEI VA VIVETAI OTTO EI IKEUUEVO TTPOOWITTIK MAB OTE NEG TIG O NYIEG rrpiv EVKOTOOTIJOETE AEITOUPY OETE KAI OUVTNPAOETE TO rrpoi v E v TO rrap v Eyxelpidio Dev Eival TO OWOT EYXEIPIOIO OUUBOUAEUBEITE TO TOW EGUIPUMO VIA TA OTOIXEIA ETTIKOIVWVIAG TOU TOTTIKO AVTITTPOOWITTOU PUAGETE TO EYXEIPI IO AUTO VIA HEAAOVTIKF AVAPOP A NPOEIAOMOIHEH Mn As roupyeite Tn O
29. NMOS SMOS ir pan Patirtis rodo kad net ir ma as statin s elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti Sugadinti komponentai net jei atrodo kad jie veikia tinkamai anksti nustoja veikti Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 MR o SSS Zalecenia wst pne Prosimy przeczyta przed rozpocz ciem u ytkowania Brooks Instrument projektuje wytwarza i testuje swoje produkty tak aby spetniaty wymagania licznych norm krajowych i mi dzynarodowych Te produkty musz by poprawnie instalowane obs ugiwane oraz konserwowane aby zapewni ich prawid owe dzia anie zgodnie ze specyfikacj techniczn Podczas instalowania obs ugiwania i konserwowania produkt w firmy Brooks Instrument nale y przestrzega nast puj cych zalece Aby zapewni w a ciwe dzia anie sprz tu instalacja obs uga aktualizacje programowanie i konserwacja powinny by wykonywane przez przeszkolony personel Przed instalacj obs ug i czynno ciami serwisowymi nale y zapozna si ze wszystkimi zaleceniami producenta Aby uzyska instrukcj obs ugi odpowiedni dla danego sprz tu nale y skontaktowa si z lokalnym przedstawicielem handlowym producenta Instrukcj obs ugi nale y zachowa do p niejszego u ycia A OSTRZE ENIE Nie wolno przekracza podanych w instrukcji zakres w dzia ania
30. Ne m k dtesse a berendez st az zemeltet si utas t sban megadott zemi tartom nyokon t l Ennek megs rt se s lyos szem lyi s r l shez vagy a berendez s meghib sod s hoz vezethet e Amennyiben a gepk nyv utas t sai nem egy rtelm ek l pjen kapcsolatba Brooks Instrument k pvisel j vel hogy tiszt zz k a probl m t e Tartsa be a berendez sen felt ntetett vagy azzal egy tt sz ll tott sszes figyelmeztet st felh v st s utas t s e A megfelel telep t si utas t sban megadott utas t sok valamint a hat lyos helyi s nemzeti el r sok szerint telep tse a berendez st A term keket kiz r lag a megfelel elektromos s nyom sell t forr sra k sse Menete 1 Lassan helyezze nyom s al a rendszert Lassank nt nyissa ki az zemi szelepeket az raml singadoz s elker l se rdek ben 2 Ellen rizze nincs e sziv rg s az raml sm r be s kimeneti bek t sein l Ha nincs sziv rg s t ltse fel a rendszert az zemi nyom sra e Szervizel s el tt mindenk ppen ellen rizze hogy az zemi vezet k nincs e nyom s alatt Amennyiben cserealkatr szekre van sz ks g mindenk ppen szakk pzett szem lynek kell kezelnie a Brooks Instrument ltal meghat rozott cserealkatr szeket A nem enged lyezett alkatr szek s tev kenys gek befoly solhatj k a term k teljesitm ny t illetve vesz lyeztethetik a biztons gos zemeltetest A puszt n hasonl alkatr szekkel t rt n
31. Po asi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka 2 Preverjajte ima li curljanja pri povezu vstopa in izstopa merilca toka Ce ni curljanja naplonite sistem na pogonski tlak Pred servisom vsekakor preverjajte ali je pogonski vod pod tlakom e je potreben rezervni del svekakor strokovna oseba mora rokovati z rezervnimi deli odrejenimi od Brooks Instrument Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na u inek izdelka oziroma ugro avajo varnostni pogon Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico po ar nevarnost elekti nega oka ali nedovoljno funkcioniranje Vsa vrata naprave svekakor morajo biti zaprta za itni ovitki morajo biti na svojem mestu zaradi izogibanja oku in osebnim po kodbam razen e na njej strokovnjak opravija dela vzdr evanja A OPOMBA V primeru naprave za tok teko ine e je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi naprava se mora celotno izprazniti Zamuda tega lahko provzro i toplotno pro irjenje teko ine kar po koduje napravo in lahko povrzo i osebno po kodbo Europske smernice za naprave ohranjanja pritiska PED Vsaka naprava ohranjanja pritiska z notranjim pritiskom ve od 0 5 bara g in ve jim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska PED Poglavje priro nika Tehni ni podatki vsebuje navodila ki se nana ajo na smernice PED Merilni instrumenti navajani v priro n
32. beiden Enden rundherum 360 abgeschirmt werden Die Abschirmung sollte geerdet werden Randstecker auf Platinen sind standardm ig nicht aus Metall Die verwendeten Kabel m ssen mit einer 100 Abschirmung versehen werden um die CE Vorgaben zu erf llen Die Abschirmung sollte geerdet werden Klemmenbelegung Siehe beigef gtes Handbuch ESD Elektrostatische Entladung ACHTUNG Dieses Ger t enth lt elektronische Komponenten die durch elektrostatische Entladungen besch digt werden k nnen Ordnungsgem e Verfahrensanweisungen m ssen w hrend des Ausbaus der Installation oder anderer Handhabung der eingebauten Platinen oder Ger te eingehalten werden Verfahrensanweisung 1 Trennen Sie das Ger t von der Stromversorgung 2 Das Personal ist vor dem Einbau Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden 3 Platinen sind in speziellen Beh ltern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern Platinen d rfen erst kurz vor dem Einbau aus der Schutzh lle entfernt werden Ausgebaute Platinen m ssen umgehend in Schutzbeh lter zum Transport zur Lagerung oder R cksendung an das Werk gelegt werden Anmerkung Dieses Ger t ist wie viele andere elektronische Ger te auch mit Komponenten best ckt die anf llig f r elektrostatische Entladung sind Die meisten modernen elektronischen Ger te enthalten
33. blessures Directive europ enne quipements sous pression PED Tous les quipements sous pression dont la pression interne est sup rieure 0 5 bar pression relative et dont la taille d passe 25 mm ou un pouce entrent dans le cadre de la directive PED La section Specifications de ce manuel contient les instructions relatives a la directive PED Les appareils de mesure de ce manuel sont conformes la directive EN 97 23 EC Tous les d bitm tres Brooks Instrument fonctionnent avec des fluides de groupe 1 Les appareils de mesure d une taille sup rieure a 25 mm ou un pouce entrent dans la cat gorie PED I Il ou III Les appareils de mesure d une taille inf rieure ou gale a 25 mm ou un pouce rel vent des bonnes pratigues ing nierie SEP Compatibilit lectromagn tigue europ enne CEM L quipement Brooks Instrument lectrique lectronique portant le marquage CE r pond a la r glementation en mati re de compatibilit lectromagn tique directive CEM 2004 108 EC Il faut cependant pr ter une grande attention au choix du cable d interconnexion utiliser avec l quipement marqu CE Qualit du c ble d interconnexion des presse toupes et connecteurs Brooks Instrument fournit un ou des c bles de qualit sup rieure qui r pondent aux sp cifications exig es pour la certification CE Si vous utilisez votre propre c ble d interconnexion ce c ble doit tre prot g
34. body width 92mm 0 440 large bore C Seal only for bins SH45 SH50 VIII Downstream Condition A Atmosphere V Vacuum Default for SD SL and HA special application IX Sensor 0 Default Sensor Orientation 5 1 5 2 Section 5 Product Description Code Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Table 5 1 GF100 GF120 amp GF125 Series Product Description Code Continued Code Description Code Option Option Description X Connector BX Cable adapter to 15 pin D Brooks Unit B N adapts G1 base EX Cable adapter to Card Edge w out VTP RS485 through RJ11 jacks Unit E IN L R adapts GX base FX Cable adapter with 9 pin STEC pin out 8 jack screws w VTP Unit F O adapts SX base GX 9 Pin D with RS485 Unit G display and overlay 180 orientation G1 9 Pin D with RS485 Unit G JX Cable adapter with 9 pin STEC pin out 8 jack screws w VTP Unit W adapts SX base KX Cable adapter to MKS 15 Pin D Unit K adapts G1 base SX 9 pin D with STEC pin out w VTP Unit S Q TX 9 pin D with UDT9 pin out UDT9 T1 Cable adapter to 15 pin D IFlow DB15 amp TN 15 pin adapts TX base UX Cable adapter to 15 pin D w VTP Unit 8 TN U
35. cc sec He Valve Shut Down Leaky by lt 1 ES Operating Conditions GF120XSD GF120XSL Minimum Operating Inlet Pressure 4 to 20 sccm lt 10 Torr gt 20 to 50 sccm lt 20 Torr gt 50 sccm to 1 slpm lt 50 Torr Maximum Pressure 500 psia max Pressure Insensitivity Not Available DifferentialPressure 10 Torr 30 psid typical 1 33 207 kPa typical Valve Configuration Normally Closed Ambient Temperature Range 10 C 50 C Zero Temperature Coefficient Span 0 05 S P per C Zero 0 005 F S per C Part Number 541B137AAG November 2015 Consult Technical Support for details Typical pressure drop Actual pressure drop will be gas and flow dependent Performance at minimum inlet pressure will be gas and flow range dependent Consult Technical Support for details Typical pressure drop Actual pressure drop will be gas and flow dependent Consult Technical Support for details Consult factory for other gases Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Table 1 6 Specifications for GF135 Series Performance Section 1 Introduction Full Scale Flow Range 3 sccm to 5 slm N2 Eq Gasses Supported N2 02 Ar H2 SF6 NH3 CO2 Cl2 HBr NF3 CF4 CH4 CH3F CH2F2 SiCl4 100 Torr C4F6 g 800 Torr C4F8 O 1200 Tor
36. cifications normales Les instructions qui suivent doivent tre respect es et int gr es votre programme de s curit lors de installation utilisation et entretien des produits Brooks Instrument Afin d assurer un fonctionnement correct faites appel du personnel qualifi pour l installation l utilisation la mise jour la programmation et l entretien du produit Lisez toutes les instructions avant l installation l utilisation et l entretien du produit Si le pr sent manuel d utilisation n est pas le bon consultez la derni re page de la couverture pour conna tre le point de vente le plus proche Conservez ce manuel d utilisation pour pouvoir vous y reporter par la suite AVERTISSEMENT n utilisez pas cet instrument au del des sp cifications num r es dans le manuel d utilisation Le non respect de cet avertissement peut entrainer de graves blessures et ou endommager guipement Si vous ne comprenez pas une des instructions prenez contact avec un repr sentant de Brooks Instrument pour obtenir des explications Tenez compte de tous les avertissements pr cautions et instructions marqu es sur le produit et fournies avec celui ci Installez votre quipement de la fa on indiqu e dans les instructions d installation du manuel d utilisation et conform ment la l gislation en vigueur au niveau local et national Branchez tous les produits aux sources d lectricit et de pression agr es Util
37. ciu prev dzku programovanie aktualiz ciu a dr bu zariaden m vykon va v lu ne odborne kvalifikovan person l e Pred in tal ciou prev dzkou a servisu zariaden je potrebn pre ta v etky pr kazy Ak t to pr ru ka nie je spr vna tak na zadnej strane treba n js miestneho distrib tora kontaktova ho pre al ie inform cie Pre neskor ie inform cie uschovajte pr ru ku A UPOZORNENIE Neprev dzkova zariadenie v rozsahu mimo rozsahu uvedenom v prev dzkovej pr ru ke Poru enie tohto ozn menia m e ma za n sledok a k ujmu na zdrav a vedie k po kodeniu zariadenia Ak pr kazy v n vode nie s jednozna n kontaktujte z stupcu Brooks Instrument na objasnenie probl mov Dodr ujte v etky upozornenia prikazy a usmernenia uveden na zariadeni alebo s nim dodan Zariadenia in talujte pod a n vodu uveden ho v pr kaze na in tal ciu v s lade s miestnymi a n rodn mi predpismi Zariadenie pripojte v lu ne len na vyhovuj ci elektrick a tlakov zdroj Postup 1 Pomaly natlakujte syst m Prev dzkovy ventil otvorte pomaly na zamedzenie kolisania prietoku 2 Prekontrolujte tesnost vstupn ho a v stupn ho zapojenia prietokomeru Ke nie je presakovanie spoje s tesn naplni syst m na prev dzkov tlak Pred vykon van m servisn ch pr c kontrolova i syst m nie je pod tlakom V pr pade e je potrebn v mena s iastky v menu dielov ur en
38. markeret eller leveret sammen med udstyret Installer udstyret efter den angivne installationsvejledning og gaeldende lovgivning for anvendelsesomrade Udstyret ma kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen e Ibrugtagning 1 bn langsomt for trykket i systemet bn langsomt for alle procesventiler for at forhindre ustabil gas flow 2 Tjek systemet for l kage ved tilsluttet m leinstrumenter samlinger og andet tilsluttet udstyr Derefter gg trykket i systemet indtil arbejdstrykket er opn et For reparation tjek altid at procesledningen ikke star under tryk Hvis der er brug for at udskifte defekte dele m kun kvalificeret personale udfore arbejdet og af sikkerhedsmeessige arsager ma der kun anvendes originale Brooks reservedele Det er ikke tilladt at anvende reservedele eller udfore arbejde der pa nogen made kan aendre produktet fra dens oprindelige specifikationer Manglende overholdelse af de foreskrevne procedurer kan resultere i braend og fare for elektrisk stad eller kortslutning e Af sikkerhedsmaessige rsager s rg for at alle sikkerhedsforanstaltninger er overholdt Eksempelvis at alle afskaermninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift A Advarsel Ved brug af udstyr som anvendes til v ske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket p samme tid i forbindelse med aftapning S fremt dette ikke ove
39. of the liquid that can rupture the device and may cause personal injury All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Specifications Section of this manual contains instructions related to the PED directive Meters described in this manual are in compliance with EN directive 97 23 EC All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with PED category I II or III Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP European Electromagnetic Compatibility EMC The Brooks Instrument electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 2004 108 EC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks Instrument supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screened with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the m
40. reach setpoint Oscillation Zeroing problems Indicated zero is not stable Temperature shift steady state or transient Inlet pressure shift steady state or transient Power supply problem Electrical interference Dirty gas chamber Changes in gas Differential pressure not within operating range Inlet pressure not stable Temperature shift steady state or transient Inlet pressure shift steady state or transient Power supply problem Electrical interference 2 Check supply voltage and check for a consistent ground 3 Insure OEM tool setpoint matches the setpoint at the GF100 Series Observe for consistency 4 Verify isolations valves are open and the gas supply is turned on Then verify operating pressures are within operating ranges 5 Check GF100 Series voltage response by moving the setpoint back and forth Observe for voltage changes 4 3 Section 4 Maintenance 8 Troubleshooting Installation and Operation Manual X TMF GF100 Series MFC eng i Part Number 541B137AAG GF100 Series November 2015 4 5 GF100 Series Troubleshooting Guide Table 4 2 GF100 Series Troubleshooting Guide Symptoms amp Possible Causes 1 No gas flow Is the gas supply turned on Check shut off valve and pressure readout Open the gas supply Is the regulator turned on at the Turn off the regulator and reset it to the correct operating pressure recommended pressure as described in the Data Sheet Are any upstream
41. tegemine v ivad kahjustada toote t omadusi ja p hjustada riski tootmistegevuse ohutuse tagamisel Originaalvaruosadele sarnaste osade kasutamine v ib p hjustada tule v i elektril giohtu v i seadme v rtalitlust Elektril gi ja vigastuseohu v ltimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal va seadme hooldamisel kvalifitseeritud isikute poolt HOIATUS voolava vedelikuga seadmete kasutamisel kui seadmega k lgnevad sisend ja valjundklapid on vaja mingil p hjusel sulgeda tuleb seadmed vedelikust t iesti t hjaks lasta Vastasel korral v ib vedelik soojuse m jul paisuda niiv rd et seade puruneb See v ib p hjustada t siseid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub k ikidele surveseadmetele mille sisesurve on le 0 5 baari g ja l bim t le 25 mm v i 1 tolli K esoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid K esolevas kasutusjuhendis kirjeldatud m turid vastavad EN direktiivi 97 23 E n uetele Brooks Instrument i voolukulum turid kuuluvad vedelike 1 gruppi M turid l bim duga le 25 mm v i 1 tolli vastavad surveseadmete direktiivi kategooriale I II v i III M turitele l bim duga alla 25 mm v i 1 tolli kohaldatakse h id inseneritavasid Euroopa elektromagnetilise hilduvuse direktiiv EM Brooks Instrument i elektri
42. urz dzenia Nieprzestrzeganie tego zalecenia mo e doprowadzi do powa nego zagro enia ycia lub zdrowia personelu i lub uszkodzenia sprz tu e Je eli jakie zalecenia w instrukcji obs ugi urz dzenia s niezrozumia e prosimy o skontaktowanie si z przedstawicielem firmy Brooks Instrument aby wyja ni problem e Nale y post powa bior c pod uwag wszystkie ostrze enia uwagi i zalecenia umieszczone na produkcie lub do czone do niego e Instalacj urz dzenia nale y przeprowadzi zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowi zuj cymi lokalnymi i narodowymi oznaczeniami Wszystkie urz dzenia mo na pod cza wy cznie do odpowiednich r de energii elektrycznej oraz ci nienia e Pierwsze czynno ci obstugowe 1 Nale y powoli w czy przep yw w instalacji Nast pnie powoli otworzy zawory robocze tak aby unikn waha przep ywu 2 Nale y teraz sprawdzi czy nie wyst puj nieszczelno ci przy pod czeniach wej ciowym i wyj ciowym miernika przep ywu Je eli nie ma adnych nieszczelno ci mo na zwi kszy ci nienie w instalacji do warto ci ci nienia roboczego e Przed przyst pieniem do czynno ci serwisowych nale y upewni sie e ci nienie robocze jest od czone Je eli konieczna jest wymiana cz ci zamiennych nale y zawsze stosowa cz ci zamienne specyfikowane przez firm Brooks Instrument a czynno ci ich wymiany powinien w ka dym przyp
43. 00 Series Ordering Instructions Refer to the Product Description Codes on the previous pages Starting from the left choose the product code options as follows 1 Required performance model a Standard Performance non PTI GF100 b High Performance non PTI GF120 c High Performance w PTI GF125 d High Performance w PTI w ROD GF135 e Standard Performance High Flow Non PTI GF101 f High Performance High Flow Non PTI GF121 g High Performance High Flow w PTI GF126 2 Configurability a Disabled X b Enabled C Standard not an option for GF135 3 Specialty Application a High Accuracy for GF125 only HA b Safe Delivery for GF120 only SD c No Specialty App XX 4 Valve Configuration a Normally Closed C b Normally Open O c Meter M 5 Gas or SH MultiFlo Bin a If Gas Specific enter SEMI gas code ex 0013 for N2 b If SH MuliFlow Bin SHnn nn being the required SHBin 40 50 or 51 54 High Flow Maximum Flow a If Gas Specific enter maximum range in sccm C or slm L ex 500C b If SH Bin enter defined maximum flow ex 860 choosing SH44 281 860 sccm 7 Fitting a Enter 2 character option code as defined ex CX 1 1 8 C Seal 92mm 8 Downstream Condition a Outlet to Vacuum V b Outlet to Atmosphere A 9 Sensor a Orthogonal O this is default non selectable 10 Connector a Enter 2 character option code as defined ex DX DeviceNet 11 CSR a Customer Special Requirement contact Brooks App
44. 00h 2 7 Executing 500KB DA DeviceNet 5 Pin Micro Idle Count nteger 7FFFh 22 U Executing 500KB DB DeviceNet 5 Pin Micro Idle Count nteger 6000h 22 8 Executing 500KB DC DeviceNet 5 Pin Micro Idle Count nteger 7FFEh 3 7 Idle 500KB DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB DE DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB DX DeviceNet 5 Pin Micro To be defined by CSR Installation and Operation Manual Section 5 Product Description Code X TMF GF100 Series MFC eng Part Number 541B137AAG i November 2015 GF100 Series Table 5 3 GF101 GF121 amp GF126 Series Product Description Code continued Code Description Code Option Option Description XI Customer Special Reguest XXXX Customer Special Reguest Number XII Auto Shut Off A Auto Shut Off Included X Auto Shut Off Not Included Must be selected for meter XIII Auto Zero A Auto Zero Included X Auto Zero Not Included XIV Reference Temperature 000 0 C Reference Calibration Standard Default Setting Sample Standard Model Code I Il Ill IV van VI VII VIII IX X XI XII XIII XIV GF 101 C XX C SH52 100L v1 A 0 G1 XXXX A X 000 5 5 5 6 Section 5 Product Description Code Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 GF1
45. 1 Vdc 250 mA max 24 Vdc Analog RS485 15 Vdc 10 6 Watts max or 24 Vdc 10 Compliance EMC EC Directive 2004 108 EC CE EN61326 2006 FCC Part 15 8 Canada IC subset of CE testing Environmental Compliance RoHS Directive 2011 65 2006 Reach Directive EC 1907 2006 Section 1 Introduction Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Table 1 7 Specifications for GF101 GF121 GF126 Series Performance GF101 GF121 GF126 Full Scale Flow Range N Eg 51 to 300 slm Flow Accuracy 1 S P gt 35 100 0 35 F S 2 35 Repeatability 8 Reproducibility lt 0 15 S P Linearity 0 5 F S included in accuracy Response Time Settling Time Normally Closed Valve lt 1 sec Pressure Transducer Ability to measure inlet pressure Control Range 5 100 Normally Closed Valve MultiFlo Standard ALL typical high flow rate process gases 8 mixtures supported of Bins 4 Bins Control Range 5 100 Normally Closed Valve Valve Shut Down N C Valve lt 2 of F S 30 N2 psig atm out Zero Stability lt 0 5 F S per year Temperature Coefficient Span 0 05 S P per C Zero 0 005 F S per C Pressure Coefficient 0 03 per psi 0 50 psi N2 R
46. 17 GF135 Series Showing Inlet Outlet Pneumatic Isolation Valve Lines 2 17 3 1 GF100 Series Operating Principles aaa 3 2 Table Page Number Number 1 1 Industry Standard References iii 1 3 1 2 Terms And ACONYMS Sinai la e 1 4 1 3 Specifications for Standard GF100 GF120 GF125 Series 1 9 1 4 Specifications for High Accuracy HA GF125 Series i 1 10 1 5 Specifications for Safe Delivery System SDS GF120 Series lt lt lt 1 10 1 6 Specifications for GF135 Series iii 1 11 1 7 Specifications for GF101 GF121 GF126 Series aaa 1 12 2 1 KI Series Fasteners n s a akis aa d iden irai Si takka sneer Fan alt da SEK i a aed a Ea a t a 2 7 2 2 K1 Substrate Torque Data iii 2 7 2 3 Gas and Flow Ranges MultiFlo Configurable N2 Equivalent mn taanneet 2 11 4 1 Environmental Factors ilaele a a AA omeen i ea E 4 3 4 2 GF100 Series Troubleshooting Guide sis 4 4 5 1 GF100 GF120 8 GF125 Series Product Description Code nana 5 1 5 2 Model GF135 Product Description Code 5 3 5 3 GF101 GF121 8 GF126 Series Product Description Code 5 4 AJA GF100 Series Gas Table Codes 1 108 Bins SH40 to SH50 naene A 1 A 1B GF100 Series Gas Table Codes 109 875 Bins SH40 to SH50 eee eee eneen eneen A 2 A 1C GF100 Series Gas Table Codes 878 5022 Bins SH40 to SH50 ereta A 3 B 1 GF100 Series Patents in Aen nass li
47. 41B137AAG November 2015 GF100 Series Lithuanian Pagrindines instrukcijos Perskaitykite prie tesdami Brooks Instrument projektuoja gamina ir i bando savo gaminius kad jie atitikty jvairius nacionalinius ir tarptautinius standartus Sie gaminiai turi b ti tinkamai montuojami eksploatuojami ir pri i rimi kad ir toliau veikty pagal jiems b dingus techninius parametrus Toliau pateikty nurodymu reikia laikytis ir jtraukti juos saugos programa montuojant eksploatuojant ir pri i rint Brooks Instrument produktus e Siekiant u tikrinti tinkam veikim montuoti eksploatuoti naujinti programuoti ir pri i r ti gamin turi tik kvalifikuoti darbuotojai Perskaitykite visus nurodymus prie montuodami eksploatuodami ir pri i redami gaminj Jei gavote netinkama instrukcija galiniame jos vir elyje i rekite vietin s prekybos atstovyb s kontaktin informacij I saugokite i instrukcij pasi i rejimui ateityje A SP JIMAS nenaudokite io prietaiso vir ydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis Nesilaikydami io sp jimo galite sunkiai susi eisti ir arba sugadinti rang Jei nesuprantate koki nors nurodym kreipkit s Brooks Instrument atstov kad paai kint e Paisykite vis sp jimo persp jim ir nurodym pa ym t ant gaminio arba pateikt su juo rang montuokite taip kaip nurodyta atitinkamos instrukcijos mon
48. 4901 Xe Xenon 24 7 1651 1652 4210 Hydrogen 14 7 2600 2601 8000 Air 24 7 Carbon Monoxide 24 7 Hydrogen Bromide 24 7 Hydrogen Chloride 24 7 Hydrogen Fluoride 14 7 282 7400 Nitrogen 24 7 i 7200 Deuterium 14 7 94 33000 Oxygen 24 7 E E E 30000 Nitric Oxide 24 7 Hydrogen lodide 24 7 1305 1306 3340 6961 Fluorine 24 7 A 2358 2359 6700 14001 Chlorine 24 7 532 1604 1605 4850 4851 10101 Hydrogen Sulfide 24 7 232 233 713 714 2155 2156 5900 Hydrogen Selenide 24 7 202 20 620 621 1874 1875 4770 4771 Carbon Dioxide 24 7 69 642 643 1942 1943 5300 22000 22001 28000 28001 Nitrous Oxide 24 7 E 611 612 1849 1850 5100 21000 21001 25000 25001 Methane 24 7 A E Ammonia 24 7 74 223 224 685 686 2072 2073 6000 6001 25000 Phosphine 19 7 67 68 205 206 629 630 1901 1902 5200 5201 21300 Sulfur Dioxide 19 7 3 52 53 157 158 483 484 1459 1460 3800 3801 792 15800 Methyl Fluoride 24 7 L 67 68 204 205 625 626 1890 1891 5200 5201 Carbonyl Sulfide 24 7 E 60 61 183 184 562 563 1700 1701 4500 4501 Arsine 24 7 A 55 56 170 171 510 511 1550 1551 4000 4001 7 5 Cyanogen Chloride 14 7 4 142 143 435 436 1320 1321 3400 3401 706 5 163 164 501 502 1516 1517 4400 4401 Ethylene 24 7 Silane 24 7 B 56 170 171 523 524 1581 1582 4400 4401 Acetylene 16 7 Germane 24 7 495 496 1500 1501
49. 5 end of the MultiFlo Cable Adapter Connect the USB end of the converter to a laptop or PC The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at www Brookslnstrument com MultiFlo Please reference the Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Section 2 Installation GF100 Series Figure 2 11 USB RS485 Converter 214F027AAA Diagnostic Port 500Kb pam 250Kb e e e 8 6 150 DATA RATE Figure 2 12 Diagnostic Port MultiFlo Configurator Quick Start Guide for installation and operation details Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www Brookslnstrument com MultiFlo Install the MultiFlo Configurator as described in the MultiFlo Configurator Quick Start Guide and use the guide as a reference for operation details A CAUTION DO NOT make any connections to unlabeled connector pins Any failure to comply could damage the GF100 Series and or the mating electrical device Before connecting the cable make sure that all pin connections of the mating cable have the same pin out connections When installing and removing cables to and from your computer make sure the power is turned off on your computer This will prevent damage to your computer and associated equipment 2 13 2 14 Section 2 Installati
50. 50 Low h Low High Low High C3H9N Trimethylamine 72 721 1910 4001 8100 SF6 Sulfur Hexafluoride 71 716 1900 4001 8000 8001 8200 8201 C4H10 d Isobutane 65 7600 7601 8200 8201 C4H10 c Butane C2F6 Hexafluoroethane Freon 116 3700 3701 WF6 Tungsten Hexafluoride C3F8 Perfluoropropane C4F8 Octafluorocyclobutane 1170 C3F6 Hexafluoropropylene 1470 PENTAFLUOROETHANE FRE 1900 CH2F2 Difluoromethane 4300 CH6Si Methylsilane MONO 2800 CH3 3SiH Trimethylsilane TMSi C5F8 Octafluorocyclopentene C4F6 Hexafluoro 2 butyne C4F6 q Hexafluoro Butadiene 1 3 1270 1271 2640 C5F80 Epoxyperfluorocyclopentene 1000 1001 210 Si3H9N Trisilylamine TSA 60 61 1410 1411 3000 C4H11N Dimethylethylamine 63 64 191 1530 1531 3200 10 GeH4 H2 10 Germane Hydrogen 260 261 801 2401 7200 7201 10 PH3 H2 10 Phosphine Hydrogen 2 275 276 814 2501 7600 7601 10 PH3 N2 10 Phosphine Nitrogen 271 851 2511 7100 7101 4 5 PH3 N2 4 5 Phosphine Nitrogen 881 2601 7200 7201 20 02 He 20 Oxygen Helium 3 1103 3332 10000 10001 1 PH3 Ar 1 Phosphine Argon 5 H2 N2 5 Hydrogen Nitrogen 280 15100 1 B2H6 H2 1 Diborane Hydrogen 16100 1 PH3 H2 1 Phosphine Hydrogen 3 B2H6 N2 3 Diborane Nitrogen 3 H2 N2 3 Hydrogen Nitrogen 30 He O2 30 Helium Oxygen 30 02 He 30 Oxygen Helium 9700 20000 20001 4 H2 He 4 Hydrogen Helium 1000 23000 23001 4 H2 N2 4 Hydrogen Nitrogen 7400 5 B2H6 Ar 5 Diborane Argon 3 8900 5 PH3 Ar 5 Phosphine Argon 9500 50 PH3 SiH4 50 Phosphine S
51. 7 mm 3 43 in C1 3 8 C Seal 92 mm 3 62 in 106 mm 4 17 in C2 3 8 C Seal 114 mm 4 49 in 127 mm 5 00 in D42 1 65 1 2 VCR V 1 16 Figure 1 6 Dimensions GF101 GF121 GF126 Installation and Operation Manual Section 2 Installation X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series 2 1 General EE EEE EN This section provides installation instructions for the Brooks GF100 Series Thermal Mass Flow Devices The installation process consists of purging the gas supply line prior to installation unpacking and inspecting the device connecting the device to the gas supply line and testing for leaks 2 2 Receipt of Eguipment When the instrument is received the outside packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding their liability A report should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www Brooksinstrument com Europe Asia Brooks Instrument GmbH Brooks Instrument Korea Lid Zur Wetterwarte 50 Haus 377 B
52. AOQAA Aerroupy a AVTIKATAOT OEIG HE PAIVOLIEVIK HOIA avraAAakrIK EV EXETAI VA TTPOKAAEOOUV TTUPKAYIG Kiv uvo N EKTPOTTANEIAG AVETTAPKN Aerroupy a BeBalwBeg te T AA Ta avoiyuata TOU ESOTTAIOHO EIVAI KAEIOT KAI TA TTPOOTATEUTIK KAAUNNATA Eiva orn GEON TOUS TTPOKEIN VOU va ATTOPEUXBE o kivduvos NAEKTPOTTAN IAG KAI TTPOOWTTIKWV TPAUHATIOHUWV EKTOG V EKTEAOUVTAI EPYAOIEG OUVTIIPNONS ATT EIDIKEUH VO TTPOOWTIIK 4 NPOEIAONOIHZH Mpoksiu vou yia OUOKEUEG HE POH PEUGTO TAV via OTTOLOVS TTOTE A yo TTP KEITAI VA KAEIDOUV oi BaABides EIGOYUY S KAI E 0yWY G KOVT OTIG OUOKEUEG OI OUOKEUEG TTP TTEI VA ATTOOTPAYYIOTOUV EVTEAWG H un cupup pouon Hrropei va TIPOKOA OEI BEPLIK SIAOTOAN TOU UYPOU Trou TTEPI XOUV HE ATTOTEAEONA va PAVIDEI n OUOKEUN kai va TTPOKANdOUV TrpoowTrikoi Tpauparicpo Eupwrra kh O nyia via rov 80OTTAIGN urr Trigon PED K BEe EGOTTAIOH G UTT Trigon HE EOWTEPIKI TTIEON vw rou 0 5 bar g kal uey Gouc HEVAA TEPOU Twv 25 mm TNG 1 IVTOAG ELITT TITE orig IAT EEIG TNG eupwrraik c O nyiag via Tov egorrAioH ut Trigon PED To kep ka o Mpodiaypap s rou rrap vrog EVXEIPI IOU rrepihauB vel OONVIEG OXETIK UE Tnv O nyia PED Ol HETPNTEG TTOU TTEPIYP POVTAI oro rrap v EYXEIP IO GUUHOPPWVOVTAI HE TNV EUPWTTAIKI O nyia 97 23 EK Oka ra po uerpa TNG Brooks Instrument av kouv OTNV op a PEUOTWV 1 METPNT S ueyaAUTepol arr 25 mm 1 ivr
53. Adjust inlet pressure up or down by 2 psig increments until hunting disappears Verify common gas pressure is within range NOTE Hunting or oscillation can be contributed to multiple GF100 Series sharing a common gas manifold Therefore inspect gas delivery sources to the gas box for example two tools sharing a common gas bottle and calling for gas at the same time Valve leak Unregulated gas pressure from Facilities 7 GF100 Series does not read zero pressure when gas is shut off Is the differential pressure across Verify that the pressure is correct for the GF100 Series really zero the gas and range If the GF100 Series has been contaminated it may not be able to close and therefore will not zero Equalize the pressure across the GF100 Series by opening it briefly Set up the GF100 Series for zeroing Then perform the zeroing procedure in Section 2 14 Is the GF100 Series configured properly Use the tool software to verify in the tool software Is the GF100 Series mounted to the Refer to the side can label on the GF100 Series proper attitude The GF100 Series should be calibrated in the attitude it will be operating at 8 OEM tool does not read correct GF100 Series zero reading Is the differential pressure across the GF100 Series valve leakage GF100 Series really zero Incorrect MFC zero Is the supply voltage within specified range Is the GF100 Series mounted in the proper attitude Is the flow output signal of
54. Common 15 Vdc Setpoint 0 5 Vdc Signal Common No Connection No Connection Valve Control Output 0 5 Vdc 15 Vdc 24 Vdc Pwr Com NC 15 Vdc Pwr Com Setpoint 0 5 Vdc Signal Common Signal Common Valve Test Point ajs o m ko oo 4 o 3 RS 485 DX 4 RS 485 DX Flow Out AGND GPIO CAPO GHD Earth All Base I O options include Diagnostic port communication RS485 via 2 5mm G1 TX or SX configuration depending on the product being replaced Figure 2 16 GF100 Series Electrical Interface Options PDC Ordering Code UX Description SX base 1 0 with 7003550 adapter for compatability with Unit UDU15 VALVE OFF OUTPUT 0 5 VDC 15 VDC POWER COMMON 15 VDC SETPOINT 0 5 VDC SIGNAL COMMON ZERO ALARM VALVE TEST POINT CASE GROUND NO CONNECTION PDC Ordering Code EX Description GX base I O with 7003083 adapter for compatability with Unit E IN L R VALVE OFF OUTPUT 0 5 VDC 15 VDC POWER COMMON 15 VDC SETPOINT 0 5 VDC SIGNAL COMMON CASE GROUND NOT CONNECTED NOT CONNECTED KEY WAY O re a e 3 RS 485 DX 4 RS 485 DX PDC Ordering Code T1 Description TX base I O with 7003551 adapter for compatability with IFlow DB15 amp TN 15 pin VALVE OFF OUTPUT 0 5 VDC 15 VDC SETPOINT 0 5 VDC COMMON COMMON CASE
55. D 406 Bundang Techno Park 151 01109 Dresden Sungnam Kyungki do 463 070 Germany Korea Tel 49 0 351 215 20 442 Tel 82 31 708 2522 In case you need technical assistance USA A 888 275 8946 Taiwan A 886 3 5590 988 Europe 49 351 215 2040 China A 86 21 5079 8828 Japan 81 3 5633 7100 Singapore TV 6297 9741 Korea 82 31 708 2521 Remove the envelope containing the packing list Outside of your clean area carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing material Inspect the contents for damaged or missing parts This device has been assembled calibrated and double vacuum bagged in a Class 100 clean room In your semi clean area remove the outer bag only Pass the device into your clean area Remove the second clean room compatible bag only when the device is ready to be tested and or installed in your clean system 2 3 Recommended Storage Practice i LL e If intermediate or long term storage of the device is required it is recommended that it be stored in accordance with the following conditions Within the original shipping container Ambient temperature 21 C 70 F nominal 32 C 90 F maximum 7 C 45 F minimum Relative humidity 45 nominal 60 maximum 25 minimum 2 1 2 2 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 2 4 Return Shipm
56. E C 1 Warranty Local Sales Service Contact Information rr narr sn nns ana Back Cover Figure Page Number Number 1 1 GF100 Series High Performance Gas Flow Controller Analog and Digital 1 1 1 2 LCD Displays aaa i ae a Baia 1 7 1 3 Dimensions GF100 GF120 GF125 Series i 1 13 1 4 Dimensions GF135 DeviceNet aaa samas saika ro dd a i a a t 1 14 1 5 Dimensions GF135 RS485 awa sd id kaun ta a ii aaa luat ja sat ada 1 15 1 6 Dimensions GF101 GF121 GF 126 reren ee i a i i 1 16 2 1 Typical Gas Supply Arrangement with Non PTI MFC i 2 4 2 2 Typical Gas Supply Arrangement with PTI MFC e 2 4 2 3 GF100 Series Mounting Attitude Positions e eee enma nana 2 6 2 4 GF100 Series Mounted to K1 Series Substrate Blocks nn 2 7 2 5 Mounting Screws Torque Pattern iii 2 8 2 6 Display with ESI Reading zundert i i nd i ii 2 9 2 7 Display Reading Zero PSI ia ir ae tt sedes aaa tit en tiet a li td ai aa 2 10 2 8 Display Sehto GES tiritas s o ira 2 10 2 9 Flow Display Seb TO ZENO zr ii asis iai a ai ala ee la a 2 10 2 10 MultiFlo Cable Adapter us een nalen 2 12 2 11 USB RS485 Converter 214FO27AAA i 2 13 212 Diagnostic PON tad 2 13 2 13 GF100 Series DeviceNet Connection uses 2 14 2 14 GF100 Series with 9 Pin Analog Connector us 2 15 2 15 Analog 9 Pin Connector M nn on aaa 2 15 2 16 GF100 Series Electrical Interface Options enama 2 16 2
57. GROUND NO CONNECTION 11 12 13 NO CONNECTION PDC Ordering Code KX Description G1 base I O with 7003298 adapter for compatability with Unit UDK15 VALVE CONTROL OUTPUT 0 5 VDC POWER COMMON SETPOINT 0 5 VDC SIGNAL COMMON CASE GROUND NO CONNECTION PDC Ordering Code FX JX Description SX base 1 0 with 7003069 FX 7001814 JX adapter for compatability with Unit UDF9 UDJ9 VALVE CONTROL OUTPUT 0 5 VDC 15 VDC POWER COMMON 15 VDC SETPOINT 0 5 VDC SIGNAL COMMON SIGNAL COMMON VALVE TEST POINT PDC Ordering Code BX Description G1 base I O with 7003590 adapter for compatability with Brooks 15 Pin D VALVE OVERRIDE OUTPUT 0 5 VDC POWER COMMON 15 VDC SETPOINT 0 5 VDC SIGNAL COMMON NO CONNECTION NO CONNECTION Other adapter options are available for the GF 100 Series Please contact Brooks Customer Service for more Installation and Operation Manual Section 2 Installation X TMF GF100 Series MFC eng Part Number 541B137AAG i November 2015 GF100 Series 2 20 GF135 Inlet Valve Installation ne AAA ij When installing the GF135 1 Connect the MFC tubing labeled IN to a CDA or N2 supply of 90 3 psi 2 Next the MFC tubing labeled OUT should be connected to the customer upstream pneumatic isolation valve Note The air passes through a failsafe normally open valve
58. Ha U3NCKBAHUATA 3A enekTpoMarHuTHa CbBMECTUMOCT AupekTuBa EMC 2004 108 EC Oco6eHo BHUMaHUe Tpa Ba na ce O pbuja o6aue Ha M36MpaHeTO Ha curHanHuTe KABENU n3non3BaHu c o6opynBaHero HOCELLIO 3Haka CE KauecrBo Ha curHanHure Kabenn Ka eNHMTE CanHUUM M cbeguHuTenn Brooks Insturment npeanara BMCOKOKAMECTBEHM kaGenu OTTOBAPALIY Ha M3MCKBAHMATA Ha CE cepruchukaunsta Ako u3non3BaTe CO CTBEH curHaneH ka6en rpsi Ba na n36epere TakbB KOMTO e HarrenHo 3aLynTeH cec 100 0Bo ekpaHupaHe CbeauHuTenure Tun D unu KpbroB TpaOBA na OBNAT ekpaHupaHu c MeTaneH ur pu Heo6xoAumocT 3a cpukcupaHeTo Ha ura Ha Kabena TPA BA na ce NZNONZBAT METAJIHU ka6enHu CATIHULIM LLIMTBT Ha ka6ena Tpa6Ba na CE cBbpXe C METAJIHOTO NOKPUTUE UIN METANHNA CANHUK M B ABATA Kpas Aa ce ekpaHupa B 360 LLIMTbT Tpa6Ba na OBE 3a3eMeH CbennHuTenuTe 3a nedaTHi NNATKU ca craunaprHo HeMeTanHu W3non3BaHuTe ka6enn rpa6Ba Aa OBNAT santenn cec 100 0Bo ekpaHnpaHe 3a aa orroBapsr Ha CE ceprucpukauusta LUNTbT Tpa Ba na 6bne 3a3eMeH Kondurypauus Ha KOHTAKTUTE Bux NPUNOKEHATA MHCTPYKUMA 3A EKCNNOATALINA EnekTpocTaTuueH pa3paa ESD BHMMAHME Mpu6opbT cbabpxa eNeKTPOHHH KOMNOHEHTU KONTO CA YYBCTBUTEJIHU KLM CTATMUHOTO ENEKTPUYECTBO M Morar ma ce NOBPEAAT OT Hero TpaOBa ga ce CHAZBAT CboTBeTHWTe npouenypu no BpeMe Ha N3BaKAaHe cnaraHe unu Apyro GopaBeHe C B bTPELUHMTE MOHTaXHU NNaTKU U VCTPONCTBA Mpouenypa 3a paGora 1 MakntoueTe oGopyaBaneTo 2 Mep
59. I BAGBEG va KATAOTPEWEI TIG OUOKEUEG AUTEG EGAPT LATA trou UTTEOTNOAV BA Bn ak un kal av Hol Gouv va EITOUPYO V OWOT KIV UVEUOUV ATT TTPWIUN AOTOXIA na A 9 A 10 Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Hungarian e Alapvet utas t sok El sz r olvassa el ezeket A Brooks Instrument olyan m don tervezi gy rtja s teszteli term keit hogy azok megfeleljenek sz mos belf ldi s nemzetk zi szabv nynak Ezeket a berendez seket megfelel en kell telep teni zemeltetni s karbantartani ahhoz hogy mindenk ppen a norm l m k d si tartom nyuknak megfelel en zemelhessenek Az al bbi utas t sokat be kell tartani s be kell p teni a munkav delmi programba a Brooks Instrument term keinek telep t se zemeltet se s karbantart sa sor n A megfelel teljes tn ny garant l sa rdek ben kiz r lag szakk pzett szem lyzet v gezze a term k telep t s t zemeltet s t friss t s t programoz s t s karbantart s t Valamennyi utas t st el kell olvasni a term k telep t se zemeltet se s szervizel se el tt Amennyiben ez a k zik nyv nem a megfelel kiadv ny a h ts bor t n keresse meg a helyi forgalmaz t s tov bbi t j koztat s rt l pjen kapcsolatba vele rizze meg ezt a k zik nyvet k s bbi t j koztat sk nt A FIGYELEM
60. Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Brooks GF100 Series High Purity Ultra High Purity Digital Thermal Mass Flow Devices S e Model GF135 Analog I O Model GF121 Analog I O BROOKS www Brookslnstrument com INSTRUMENT Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Essential Instructions Read before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards These products must be properly installed operated and maintained to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing operating and maintaining Brooks Instrument products To ensure proper performance use qualified personnel to install operate update program and maintain the product Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference A WARNING Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual Failure to heed this warning can result in serious personal injury and or damage to the eguipme
61. L s alla instruktioner innan produkten installeras startas upp och underh lls Om du finner att denna instruktionshandbok inte r den r tta instruktionsboken titta p i slutet av p rmen f r information om hur man kan kontakta lokala representanter Spara denna instruktions manual f r senare behov 4 VARNING K r inte detta instrument utanf r dess specifikationer som r angiven i Instruktionsboken Undvikande att ta denna varning kan leda till allvarliga personliga skador och eller skada utrustningen e Om du inte f rst r n gon av dessa instruktioner kontakta din representant f r Brooks Instrument f r klarl ggande o F lj alla varningar och instruktioner som f ljer med leveransen av denna produkt Installera din utrustning p s ttet som anges i den g llande handbokens installationsanvisningar och enligt till mpliga lokala och nationella f reskrifter Koppla varje produkt till f reskriven str m och tryckk llan e Igangs ttning 1 Koppla l ngsamt p fl de i systemet Oppna processventiler sakta f r att undvika f r h ga fl den 2 Kontrollera l ckor vid m tarens anslutningar f r in och utlopp Om inget l ckage f rekommer k r systemet upp till drifttrycket Kontrollera att processledningens tryck r bortkopplat f re service I fall det beh ves kompletteras med nya delar se till att komponenter f reskrivna av Brooks Instrument anv nds Samt att kvalificerad personal utf r arbetet Ej rekommenderade kom
62. MMpaHE A BHAMAHME He paGorere c OGOPyABAHETO M3BBH AMana3OHHTE yka3aHu B MHCTPYKLIMATA M P LKOBOACTBOTO NO ekcnnoaTauva Hen3nbnHeHneTo Ha TOBA MOXE na JOBEJE HO cepuo3zHu TenecHu NoBpeg U unu noBpexaaHe Ha OGOPVABAHETO Ako He pa36upare HAKOM UHCTPYKLUUTE cBepxere Ce c npencraBurena Ha Brooks Instrument 3a NZACHABAHE Ha npo nema CnaaBa Te BCUUKU npeaynpexgenna NPH3OBH M MHCTPYKUMM OZHAHEHU Bepxy ODOpy ABaHeTo NNN nocraBeHM 3aenHo C Hero WHcranupa re oOopyaBaHeTo CbOTBETHO HA YKAZAHNATA B UHCTPYKLINATA 3A UHCTANUPAHE U Ha AE CTBALINTE Ha MECTHU U HaumoHanHu npeanucaHua CBLP3BA TE NPOAYKTHTE CAMO KbM NO XO A LLIM UZTOHHULIU Ha ENEKTPUHECTBO V HanaraHe Xon 1 BaBHo BbBenere cucremata nog HanaraHe baBHo orBopere pa6orHure knananu 3a na ce M36erHaT korie aHuaTa Ha noToka 2 MposepeTe gann HAMA U3TH4AHE MPV BXOAHOTO U M3XO HOTO CbheJMHEHMe Ha pa3xonoMepa AKO HAMA M3TUYAHE HanbnHeTe CHCTEMATA no pa6oTHO HanaraHe Mpean n3BbpWBaHe Ha nonApbxkaTa HenpemeHHo NPOBEPETE JANU paGoTHUAT TPB6OMPOBOJ He ce Hamupa nog HanaraHe Ako ca HEOGXOAUMU pesepBHM yactu c onpenenenure or Brooks Instrument pe3epBHu Yactu Tpa68a na GopaBu camo KkBanupuunpaH nepconan HepaspeuleHuTe acra U Npouenypu morar Aa okaxar BANAHNE Bepxy pa6orara Ha nponykra U cbuuo Aa 3aCTPALLAT OeaonacHocrTa Ha EKCNNOATALINATA 3aMeCTBAHETO c HeopuruHanHu YACTU Moxe Aa AoBene AO NOXAP OMACHOCT OT TOKOB yAap unu HenpaBunHa paGora Bcuuku BpaTu Ha O60pyABaHeTO Hen
63. ORT ZERO DISPLAY 500Kb pgm DATA RATE Figure 2 6 Display with PSI Reading 2 9 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 the last two digits flickering at different values The pressure transducer zeroing procedure can be done while the display is either in PSIA or kPA output Refer to Figure 2 6 Figure 2 7 Display Reading Zero PSI After completion of the pressure transducer zeroing the LCD display will read 0 0 with the last two digits flickering as shown in Figure 2 7 2 15 2 Zeroing GF100 Series Flow from LCD Display Panel 1 Place the GF100 Series under normal inlet operating pressure Close the down stream valve to prevent any flow Figure 2 8 Display Set to FS 2 Looking at the top of the GF100 Series press the Display button until the LCD display label is FS as shown in Figure 2 8 Three button depressions from the MACID label display Figure 2 9 Flow Display Set to Zero 2 10 Installation and Operation Manual Section 2 Installation X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series 3 Press and hold down the Zero button for a minimum of 5 seconds or until the FS display reads 0 0 as shown in Figure 2 9 The FS label will flash during this procedure 2 16 Performance Checks This section describes how to zero and sequence the GF100 Series devices for pr
64. Part Number 541B137AAG November 2015 Model GF135 RS485 C Seal Connections S nan oe FRK Section 1 Introduction GF100 Series A 1 00in 121in 25mm 31mm Model GF 135 RS485 VCR Connections N 1 48in L 38mm 4X 8 32 UNC2B V 12 IN 3 0MM 88in 22mm 3 50in 89mm 4 86in 124mm 1 91in al 48mm 30000006300 poor Figure 1 5 Dimensions GF135 Series RS485 Section 1 Introduction Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 DNET 93 3 67 x gt R 3 INSTRUMENT ROOS BROOKS BROOKS BROO 132 5 20 146 5 75 ki 40 3 8 C SEAL Fitting Option Code Seal Type DimA DimB VI 1 2 VCR 134 2 mm 5 28 in 87 mm 3 43 in V2 1 2 VCR 150 4 mm 5 92 in 87 mm 3 43 in v3 1 2 VCR 166 mm 6 54 in 87 mm 3 43 in va 1 2 VCR 168 6 mm 6 64 in 8
65. Series MFC eng Part Number 541B137AAG November 2015 GF100 Series B BRO OKS GF135Commission 1 0 0 2 Select the single device that you want to perform the commissioning and click on Connect to Device The Commissioning button becomes enabled Current Inlet pressure is 25 37 PSIA Set inlet pressure to 26 16 PSIA 2 or No to override pressure or Cancel to end commissioning M 3 Click on the Commission button to begin the process Some intermediate messages will appear on the bottom mesage bar You will then be presented the option to override the current inlet gas pressure Selecting Yes will keep the current inlet pressure Selecting No will allow the user to override the pressure Selecting Cancel will end the commissioning process 2 19 2 20 Section 2 Installation GF100 Series Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 BROOKS GF135Commission 1 0 0 E Commission S Exit Connect To Warning The leakage is out of range for this device Expected to be less than 0 022 value is 0 050 Would you like to continue anyway 4 The user will be presented the option to override a few of the parameters being tested prior to actual commissioning Selecting Yes will continue the process
66. UOKEUN OUTI KGB UTT P ACN TUV opiwv Trou avayp dqovrai GTO Eyxsip io OSNVIWV Kai Nerroupyiag H un ouuu pewon pe TNV TTPOLI OTTOINON AUT Hrropei va oSny oe of ooBap TTPOOWITIK TPAUHATIOHO KAI Znui oTov EEOTTAIO H E TEPITTTWON UN karav nong K TTOIAG ATT TIG O NVIEG NTAOTE IEUKPIVIOEIG ATT TOV TOTTIKO AVTITTP OWTTO TNG Brooks Instrument Tnpe te NEG TIG TIPOEIDOTTOINOEIG TPOPUAGEEIS KAI O NVIEG Tou AVAYP POVTAI OUVOodEUOUV TO rrpoi v EVYKATAOTTJOTE TN CUOKEU TTWG TTPOB ETTETAI orig O NVIEG EYKAT OTAONG TOU OWOTOU EVXEIPI IOU O NYIWV KAI OTIC KE UEVEG TOTTIKEG KAI E VIK G IAT EEIG UVO OTE TA TTPOIOVTA OTIG EKGOTOTE OWOTEG TTAPOX C PEUHATOG KAI TTIEONG Aiadikagia 1 AgfjoTe va EEKIVAOEI apy n po oro oUoTnya Avoigte apy TIG BaABidec Aerroupy ag VIA va ATTO P VETE TIG ATT TOLIEG AUEOJEIWOEIG pons 2 EAEVETE yia IAPPOEG TIG OUVOEOEIG EIO DOU KAI EEO OU rou PO JIETPOU Av dev UTT PXOUV IAPPOEG VEHIOTE To G OTNUA H XPI n Trigon va PT OEI Tnv KAVOVIKI Trigon EPVAOIAG Mpiv arr TN ovvr pnon BeBalwBg te Sri ypappr epyaoiag Exel TEBE EKT G TIIEOEWG E TTEPITTTWON AVTIKAT OTAONG AVTAAAOKTIKWV BEBAIWBEITE GTI TO TTPOOWITTIK EIVAI EI IKEUJEVO KAI xpnoiporroie AVTAAAOKTIKA TTOU TTPOBA TTE n Brooks Instrument Mn eykekpiu va AVTAAAGKTIKG KOL ETTEUB OEIG EVOEXETAI VA ETINPEGOOUV TIG ETTI OEIG TOU TTPOI VTOG KAI VA TIPOKAAEOOUV Kiv uvo via TNV
67. a jungti prie metalinio apvalkalo ar riebok lio ir ekranuoti abiejuose galuose 360 laipsni Ekranas turi baigtis j eminimu Standartin s kra tin s jungtys yra ne metalin s Naudojami kabeliai turi b ti ekranuoti 100 ekranu kad atitikt CE sertifikavim Ekranas turi baigtis jZeminimu Keturi kontakt konfig racija r prid t instrukcij ESD elektrostatinis i lydis A PERSPEJIMAS iame prietaise yra elektronini komponent kuriuos gali sugadinti statin elektra ISimant ar dedant vidines spausdintin s plok tes ar renginius arba atliekant su jomis kitus darbus reikia laikytis tinkam darbo proced r Darbo proced ra 1 Atjunkite renginio maitinim 2 Darbuotojai turi pasir pinti eminimu naudodami rie o juostel ar kitas saugias tinkamas priemones prie jd dami i imdami ar reguliuodami bet koki spausdintin s plok t s kortel ar kit vidin komponent 3 Spausdintin s plok t s korteles reikia transportuoti laid iame konteineryje Neleid iama i imti plok t s i apsauginio d klo nebent prie pat d jim I imtas plok tes reikia nedelsiant d ti apsaugin konteiner transportavimui ar saugojimui arba gr inti gamykl Pastabos is instrumentas n ra unikalus d l jame esan i ESD elektrostatiniam i lyd iui jautri komponent Daugelyje iuolaikini elektronini gamini yra komponent kuriuose naudojama metalo oksid technologija
68. addningar A OBS Denna utrustning inneh ller elektroniska komponenter som r l ttp verkade av skada orsakad av statisk elektricitet L mplig hanteringsprocedur m ste f ljas n r man tar bort installerar eller p n got annat s tt hanterar inre kretskort eller andra anordningar 1 Str m till enheten m ste kopplas fran 2 Personalen m ste jordas med hj lp av ett armband eller n got annat s kert medel innan n got kretskort eller andra inre anordningar installerras tas bort eller justeras 3 Kretskort maste transporteras i en speciell f rpackning f r elektronik Kort skall ej tas bort fran deras skydsskapa innan man skall installera dem De borttagna korten b r omedelbart l ggas i speciell f rpackning f r transport lagring eller terl mnande till fabriken Anm rkningar Dessa instrument r ej unika vad g ller dess ESD Elektrostatiska urladdningar k nsliga komponenter De flesta samtida konstruktioner inneh ller komponenter som utnyttjar metalloxid teknologi NMOS SMOS o s v Erfarenhet har visat att ven sm m ngder av statisk elektricitet kan skada eller f rst ra dess komponenter Skadade komponenter ven om de annars verkar fungera ordentligt har ofta en kortare livsl ngd Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG i November 2015 GF100 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF GF100 Series e
69. adku dokonywa przeszkolony personel Stosowanie nieautoryzowanych cz ci i procedur serwisowych mo e niekorzystnie wp yn na dzia anie produktu oraz zagrozi bezpiecze stwu instalacji Korzystanie z podobnie wygl daj cych zamiennik w mo e doprowadzi do po aru pora enia pr dem lub nieprawid owego dzia ania urz dzenia e Nale y upewni sie ze wszystkie otwory urz dzenia s zamkni te a os ony umocowane na swoich miejscach aby zapobiec obra eniom cia a lub pora eniu pr dem personelu Zalecenie to nie dotyczy przeszkolonego pracownika wykonuj cego prace serwisowe lub konserwacyjne 4 OSTRZE ENIE W przypadku miernik w przep ywu cieczy je eli znajduj ce si na nich zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te to urz dzenie musi zosta ca kowicie opr nione z ciek ego medium Niedope nienie tego zalecenia mo e doprowadzi do termicznego zwi kszenia obj to ci cieczy co z kolei mo e spowodowa uszkodzenie urz dzenia i obra enia personelu Europejska dyrektywa dotycz ca urz dze ci nieniowych PED Wszystkie urz dzenia ci nieniowe pracuj ce przy ci nieniu wewn trznym wzgl dnym wi kszym ni 0 5 bara i wielko ci powy ej 25 mm lub 1 cala podlegaj dyrektywie europejskiej dotycz cej urz dze ci nieniowych PED Rozdzia Specyfikacja techniczna niniejszej instrukcji zawiera zalecenia dotycz ce dyrektywy PED Mierniki opisane w tej instrukcji s
70. ako konstruira izdeluje in terstira svoje izdelke da oni ustrezajo tevilnim doma im in mednarodnim standardom Te naprave se morajo ustrezno instalirati koristiti in vzdr evati da vsekakor delajo ustrezno normalnom podro ju funkcioniranja Naslednjih navodil se mora dr ati in potrebno je vgraditi v program varstva pri delu pri instaliranju kori enju in vzdr avanju izdelkov proizvajalca Brooks Instrument O Za jemstvo ustreznega u inka naj izklju no strokovno osobje opravlja instaliranje kori enje osve enje programiranje in vzdr evanje izdelka Potrebno je prebrati vsa navodila pred instaliranjem kori enjem in servisiranjem izdelka V kolikor ta priro nik ni ustrezna publikacija na zadnji strani poi ite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt Prihranite ta priro nik za poznej e informacije 4 OPOMBA Ne koristite napravo izven podro ja iz navodila za uporabo Prekr ek tega lahko privede do osebnih po kodb ali okvare naprave V kolikor navodila priro nika niso enosmiselna stopite v kontakt z zastopnikom dru tva Brooks Instrument da raz istite problem Dr ite se vseh opozoril povabil navodil ki so navedena na napravi ali skupaj z njim izporo ena Napravo instalirajte shodno navodilom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje Izdelek spojite izklju no na ustrezni izvir elektrike in obskrbo tlaka Proces 1 Po asi polo ite sistem pod tlak
71. al v re afsk rmet med skal af metal Stikket skal v re afsk rmet p alle sider Al afsk rmning skal jordes Card Edge tilslutninger er if lge standarden ikke metalliske De anvendte kabler og stik skal v re 100 afsk rmet for at opfylde CE kravene De skal ligeledes jordes For stik konfigurationen se vedlagte brugsvejledning Elektrostatisk afladning ESD A OBS Udstyret indeholder tilbeh r som kan skades ved elektrostatisk elektricitet Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter b de under drift og vedligeholdelse Behandlingsproceduren 1 Sluk for al str mtilf rsel til udstyret 2 Personer som skal i kontakt med udstyret skal v re jordet eller b re anden form for elektrisk beskyttende udstyr Manglende overholdelse af dette kan medf re skader p alle elektriske komponenter 3 Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader Emballagen m ikke bnes f r komponenten skal installeres i udstyret Ved afslutning af vedligeholdelse reparation af udstyret skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal p lager eller transporteres Bem rkninger Dette udstyr er ikke unik i den hensigt at det indeholder for elektrostatisk afladning ESD sensitive reservedel de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel NMOS SMOS m m Erfa
72. amento da rede O utilizador antes de qualquer intervenc o que envolva os cart es de circuitos ou outros dispositivos internos ter que se ligar terra por meio duma bracelete de pulso ou outro dispositivo adequado Os circuitos impressos dever o ser transportados numa embalagem condutiva Os cart es s dever o ser retirados da embalagem protectora imediatamente antes da sua inserg o O cart o retirado dever ser recolocado imediatamente na embalagem protectora que servir para o seu transporte armazenagem ou retorno a f brica Observac es Tenha presente que este equipamento poder n o ser o nico objecto capaz de ser portador de pecas sens veis a descargas electrost ticas ESD Na maioria dos dispositivos electr nicos Brooks encontram se pegas de tecnologia de xidos met licos NMOS SMOS etc A experi ncia mostra que at pequenas quantidades de electricidade est tica s o capazes de danificar ou destruir esses dispositivos Os componentes danificados embora inicialmente funcionem aparentemente bem acabam por ter falhas prematuramente A 15 Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Romanian Indicatii de referint Cititi le intai pe acestea Brooks Instrument igi proiecteaz produce si testeaz produsele intr un mod ce respect un mare num r de standarde autohtone si internationale Ac
73. ate of the art low pressure drop devices for the delivery of sub atmospheric safe delivery system gases used in Implant and Etch processes The Brooks GF120 SDS models are available in full scale flow ranges 4 sccm 1 slpm Advanced Thermal Flow Measurement Sensor Brooks proprietary highly corrosion resistant Hastelloy C 22 sensor with an enhanced sensor manufacturing and burn in process incorporates a unique orthogonal sensor mounting orientation to eliminate sensor drift caused by valve heating effects and eliminates thermal siphoning effects This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition This design results in Enhanced signal to noise performance for improved accuracy at low set points Superior reproducibility at elevated temperature through new isothermal packaging and onboard conditioning electronics with ambient temperature sensing and compensation Improved long term stability Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Section 1 Introduction GF100 Series High Purity Flow Path The Brooks GF Series has an all metal corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C 22 valve seat and jet orifice The GF120 GF125 8 GF135 devices are constructed with a 4u inch Ra max surface finish while the GF100 is constructed with a 104 inch Ra Overal
74. atings Operating Temperature Range 10 50 C Differential Pressure Range 30 90 psid Maximum Operating Pressure Controller 75 psig Meter 150 psig Leak Integrity external 1x10 atm cc sec He Mechanical Valve Type Normally Closed Meter no valve Wetted Materials GF101 SEMI F20 HP Compliant 316L VIM VAR Hastelloy C 22 3161 Stainless Steel 304 Stainless Steel KM 45 GF121 GF126 SEMI F20 UHP Compliant 316L VIM VAR Hastelloy C 22 316L Stainless Steel 304 Stainless Steel KM 45 Surface Finish 10u inch Ra 5u inch Ra 0 1 um Ra Diagnostics 8 Display Status Lights MFC Health Network Status Alarms Control Valve Output Network Interruption Display Type Viewing Angle Viewing Distance Units Displayed Resolution Top Mount Integrated LCD Fixed 10 feet Flow Temp C Pressure psia kPa 0 1 unit Electrical Electrical Connection RS485 Analog via 9 Pin D connector DeviceNet via 5 Pin M12 connector Digital Communication RS485 model specific DeviceNet model specific RS485 Diagnostic Port all models Diagnostic Service Port RS485 via 2 5mm jack Power Supply Consumption DeviceNet 545 mA max 11 25 Vdc 250mA max 24 Vdc Under typical operating conditions RS485 Analog 6 Watts max 15 Vdc 10 Under typical operating conditions Compliance EMC EC D
75. bben e Als u en of meer instructies niet begrijpt vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument Neem alle waarschuwingen voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd e Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften Sluit alle producten aan op de juiste elektrische voedings en drukbronnen e Bediening 1 Laat het systeem langzaam volstromen Open de procesafsluiters langzaam om drukstoten te voorkomen 2 Controleer op lekkages rondom de inlaat en uitlaataansluitingen van de stromingsmeter Als er geen lekkages zijn kan het systeem op de bedrijfsdruk worden gebracht Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren Als vervangingsonderdelen nodig zijn zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen Niet goedgekeurde vervangingsonderdelen kunnen brand elektrische schokken of een onjuiste werking tot gevolg hebben Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen behalve als gekwalificeerd pers
76. cestui lucru poate avea ca efect dilatarea termic a fluidului care poate defecta instalatia si poate produce r niri de persoane Directiva european pentru instalatiile sub presiune PED Toate instalatiile si sistemele presurizate ce se afl sub presiuni interne ce dep sesc 0 5 mbar g si au mai mult de 25 mm sau 1 tol cad sub incidenta normei europene corespunz toare PED La capitolul Date tehnice din cartea masinii se g sesc indicatiile corespunz toare directivei PED Mijloacele de m surare mentionate in cartea masinii corespund directivei 97 23 EK EU Toate debitmetrele Brooks corespund clasei 1 de fluide Mijloacele de m surare mai mari de 25 mm sau 1 tol corespund categoriei PED II sau III Mijloacele de m surare mai mici de 25 mm sau 1 tol se conformeaz practicii ingineresti acceptate SEP Directiva european privitoare la compatibilitatea electromagnetic EMC Instalatiile electrice electronice ce poart marca Brooks Instrument CE indeplinesc cu succes cerintele testelor de verificare ale compatibilit tii electromagnetice Cf directivelor europene EMC cu nr 2004 108 EC In acelasi timp trebuie acordat o atentie deosebit la alegerea cablurilor de semnalizare utilizate pentru instalatiile ce poart marcajul CE Calitatea cablurilor de semnalizare a leg turilor prin cablu si a conectoarelor Brooks Instrument ofer cabluri de calitate ridicat care corespund cerintelor calitative ale CE In m sura in ca
77. ch Brooks Instrument mus vykona kvalifikovan osoba Pou itie nepovolen ch dielov a vykon vanie nepovolen ch aktiv t ohrozuj bezpe nos prev dzvky a maj negat vny vplyv na v kon zariadenia Nahradenie s iastok len podobn mi komponentmi m e ma za n sledok po iar raz elektrick m pr dom alebo nedostato n funkciu zariadenia V etky ochrann kryty dvierka zariadenia maj by zatvoren na zabezpe enie ochrany proti razu elektrick m pr dom a proti poraneniam obsluhy V nimku tvor vykon vanie dr by kvalifikovan m odborn kom A UPOZORNENIE Pri zariadeniach s prietokom kvapal n ke z ak hoko vek d vodu je nutn uzavrie vstupn a v stupn ventily zariadenie je potrebn plne vypr zdni Zanedbanie vyp ania m za n sledok po kodenie zariadenia s mo nos ou zranenia obsluhy z d vodu tepelnej roz a nosti n plne Eur pska smernica vz ahuj ca sa na tlakov zariadenia PED V etky zariadenia s vy m vn torn m pretlakom ako 0 5 bar g a v ieho rozmeru ako 25 mm alebo 1 anglick palec podliehaj pod Eur psku smernicu vz ahuj cu sa na tlakov n doby PED Kapitola Technick daje n vodu na obsluhu obsahuje pr kazy vz ahuj ce sa na smernicu PED Meracie prostriedky uveden v n vode na obsluhu vyhovuj smernici 97 23 ES E V etky prietokomery Brooks patria do 1 skupiny kvapal n Meracie pr stroje presahuj ce rozmery 25 mm alebo 1 spl aj
78. coHambr Tpa6Ba ga ce 3a3emu c rpuBHa nnn npyro 6esonacHo U NOAXOAALIO 3A yenta CPE CTBO npean na MHcTanupa U3BAKAA nnn perynupa MOHTAXHA nnarka un npyro BbTpeLuHO YCTPO CTBO 3 le4aTHuTe MOHTaxHu nnaTKU TPA BA Aa CE TPAHCNOPTUPAT B NPOBOJAILIA onaKOBKA leuaTHuTe NNATKU Morar Aa Ce H3BAKAAT OT 3ALLINTHOTO nokputue CAMO HENOCPEACTBEHO npegn UHCTANUPAHETO OTCTPAHEHUTE NEHATHMU NNATKU He3a6aBHO TPAGBA Aa ce crioxar B 3ALIMTHA OMAKOBKA enyxeuja 3a TPAHCNOPTUPAHE cknannpaHe unu BpbujaHe Ha NPON3BOANTENS 3a6enexku He e yHukanHo ABNEHNE Ye TOZU npu6op cbabpxa UYBCTBUTEJIHM KLM ENEKTPOCTATMUHMA 3apan ESD KOMNOHEHTU BOJILIMHCTBOTO OT ceBpeMeHHure ENEKTPOHHU npu6opu CHALPKAT KOMNOHEHTU M3roTBeHM NO TexHonorna Meran okuc NMOS SMOS u T H OnuTbT noka3Ba ue Daxe n manko KOJIMUECTBO CTATMUECKO ENIEKTPNYECTBO Moxe na NOBPEJM nnn cecune Te3u npu6opu loBpegeHuTe KOMNOHEHTU Jake ako MpuBUAHO paGoTaT NPABUNHO NPOABABAT HAHANHM HENZNPABHOCTM Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Czech Z kladni instrukce Pred instalaci si prect te n sledujici instrukce Spole nost Brooks Instrument konstruuje vyrabi a testuje tento produkt tak aby splnil mnoho n rodnich a mezin rodn ch standard Pr stroje mus byt dn nainstalov ny pou v ny a udr ov ny tak aby byl zaji t n jejich nep etr it provoz v
79. d available for GF100 GF120 GF125 This combination of features results in limiting service interruption and reduced downtime 1 7 Section 1 Introduction Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Communication Interfaces The GF100 Series supports analog 0 5 Vdc RS485 and DeviceNet M communication protocols Analog connections can be accessed via the DeviceNet or RS485 or Analog only connector options DeviceNet and RS485 are multi drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network Brooks Instrument s DeviceNet profile has been certified by the ODVA Open DeviceNet Vendor s Association A range of low profile adapter cables facilitate replacing previously installed devices eliminating the need to carry multiple devices of the same gas range but different electrical connectors 1 11 Specifications for GF100 Series Devices A WARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the eguipment A CAUTION It is the user s responsibility to select and approve all materials of construction Careful attention to metallurgy engineered materials and elastomeric materials is critical to safe operation See Table 1 3 for specifications for standard GF 100 Se
80. das System dicht ist auf Betriebsdruck hochfahren Sicherstellen dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird Wenn Ersatzteile ben tigt werden stellen Sie sicher dass qualifizierte Personen Ersatzteile verwenden die von Brooks Instrument vorgegeben sind Nicht genehmigte Teile und Verfahren k nnen die Leistungsf higkeit des Produkts beeintr chtigen und den sicheren Betrieb Ihres Prozesses gef hrden hnlich aussehende Austauschteile k nnen zu Br nden elektrischen Gefahren oder nicht sachgerechtem Betrieb f hren Stellen Sie sicher dass alle T ren der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind um Stromschlage und Personensch den zu vermeiden es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgef hrt WARNUNG Werden die Ein und Auslassventile neben Durchflussmessger ten aus irgendwelchen Gr nden geschlossen so m ssen die Ger te komplett entleert werden Durchflussmessgeraete muessen vor dem Schliessen von Ein und Auslassventilen komplett entleert werden anderenfalls kann es zu einer thermischen Ausdehnung der Fl ssigkeit und damit zum Bruch des Ger tes kommen Personensch den k nnen die Folge sein Europ ische Druckger terichtlinie PED Alle Druckger te mit einem internen Druck von mehr als 0 5 bar g und einer Gr e von mehr als tin 1 in 25 4 mm unterliegen der Druckger terichtlinie Das Kapitel zu den technischen Daten in dieser An
81. e G1 GF135 use Code G2 Description Industry standard Analog RS485 interface Valve Control n Output 0 5 Vdc 15 Vdc Power Common 15 Vdc el PDC Ordering Code GX Description OEM specific Analog RS485 interface Display and top plate re oriented 180 Setpoint 0 5 Vdc Signal Common o o ujo n a o RS 485 DX RS 485 DX Valve Control 15 Vdc Power Common Signal Common Offoo go o SE PDC Ordering Code DX GF135 use Codes DO D9 and DA DX Description Industry standard ODVA compliant DeviceNet interface ee o 1 0 Options Using Base Model and Adapter Cable A range of low profile adapter cables have been deveoped to support replacing older generation MFC s with different pinout configurations The base MFC will be either a RS 485 DX RS 485 DX Drain V 11 25 Vdc V CAN H PDC Ordering Code TX Description Industry standard Analog only interface ji PDC Ordering Code SX Description Industrv standard Analog 9 Pin Sub D connector and dual R 11 RS485 ports PDC Ordering Code BB Description Industry standard ODVA compliant DeviceNet interface Plus a separate Analog 0 5 Vdc Connector Ai Valve Control Output 0 5 Vdc 15 Vdc Power
82. echende Leistung zu gew hrleisten setzen Sie qualifiziertes Personal f r die Installation den Betrieb die Aktualisierung Programmierung und Wartung des Produkts ein Lesen Sie alle Anweisungen bevor Sie das Produkt installieren in Betrieb nehmen und warten Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt schauen Sie bitte auf der R ckseite nach den Kontaktdaten Ihres Vertriebsb ros vor Ort Bewahren Sie dieses Handbuch auf falls Sie sp ter etwas nachschauen m chten WARNUNG Dieses Ger t nicht auBerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben Wird diese Warnung nicht beachtet kann dies zu schweren Personensch den bzw Sch den des Ger tes f hren Falls Sie Anweisungen nicht verstehen wenden Sie sich zur Kl rung an Ihren Brooks Instrument Vertreter Befolgen Sie alle Warnhinweise und Anweisungen die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden Installieren Sie Ihr Ger t wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gem der g ltigen regionalen und nationalen Gesetze Schlie en Sie alle Produkte an eine geeignete Strom und Druckluftversorgung an Bedienung 1 Langsam den Zufluss zum System starten Die Ventile langsam ffnen um einen sprunghaften Anstieg der Durchflussmenge zu verhindern 2 Bereich der Anschl sse Zufluss und Ausfluss des Durchflussmessers auf Undichtigkeiten berpr fen Wenn
83. ecks for re zeroing instructions A WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure 4 2 Section 4 Maintenance 8 Troubleshooting Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 AWARNING If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the controller thoroughly with a dry inert gas such as Nitrogen before disconnection the gas connections Failure to correctly purge the controller could result in fire explosion or death Corrosion or contamination of the mass flow controller upon exposure to air may also occur A WARNING If it becomes necessary to remove the instrument fro
84. ectiv cu respectarea prevederilor nationale Echipamentul se conecteaz exclusiv la surse de energie electric si de presiune corespunz toare e Succesiune 1 Presurizati lent instala ia Deschide i ncetul cu ncetul supapa de func ionare pentru evitarea fluctuatiilor de flux 2 Controlati dac nu sunt prelingeri la intrarea sau ie irea debitmetrului de bran are Dac nu sunt scurgeri presurizati instala ia la presiunea de lucru Inaintea exploat rii intretinerii verificati neap rat dac conducta uzinal nu este sub presiune In m sura in care este nevoie de piese de schimb este neap rat necesar ca manevrarea pieselor de schimb s fie f cut de personal cu calificare profesional agreat de Brooks Instrument Utilizarea altor piese de schimb dec t cele originale si licentiate poate avea efecte asupra performantelor instalatiei gi asupra sigurantei sale n exploatare Utilizarea de piese asem n toare de substituire poate avea ca rezultat pericol de incendiu si electrocutare In toate cazurile toate usile instalatiei trebuie s fie inchise custile de protectie s fie puse la locurile lor pentru evitarea electrocut rii si r nirii de persoane except nd situatiile cand un specialist efectueaz lucr ri de intretinere A ATENTIE in cazul instalatiilor cu flux de fluide dac din orice motiv este necesar inchiderea valvelor de intrare si iesire limitrofe instalatiei instalatia trebuie complet golit Neglijarea a
85. eive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www Brookslnstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance USA D 888 275 8946 Taiwan F 886 3 5590 988 Europe 49 351 215 2040 China 86 21 5079 8828 0 Japan 81 3 5633 7100 Singapore B 6297 9741 Korea D 82 31 708 2521 Due to Brooks Instrument s commitment to contin
86. ely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases contaminants moisture and oxygen The purge gas must be free of moisture and oxygen to less than 100 ppb Purge the gas lines as follows or in accordance to prescribed company and safety procedures 1 Shut off the process gas supply valve s upstream of the GF100 Series If such a valve is not available shut the valve on the gas panel Tag the valve at this point to prevent accidental re exposure of the process gas to the gas line 2 Cycle purge the gas line with dry nitrogen or argon to fully flush out the process gas Cycle purging consists of evacuating to a low pressure adequate to induce out gassing and then purging to remove adhered moisture and oxygen If a toxic or reactive gas is present and a clogged GF100 Series is suspected then proceed with caution Pump down and purge the GF100 Series from both downstream and upstream lines If check valves are present in the gas line both pumping down and purging are required Pumping down without purging is inadeguate If a good vacuum source is not available the GF100 Series can be de contaminated by purge only 3 Repeat the purge cycle several times within 2 4 hours to complete the cleaning For toxic and corrosive gasses it is recommended to use 2 5 2 6 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series Novembe
87. ent Prior to returning any device to the factory visit the Brooks web site www Brooksinstrument com for a Return Materials Authorization Number RMA or contact one of the locations provided on p 2 1 Prior to returning the device it must be purged in accordance with the following AWARNING Before returning the device purge thoroughly with a dry inert gas such as Nitrogen before disconnecting gas connections Failure to correctly purge the instrument could result in fire explosion or death Corrosion or contamination may occur upon exposure to air All flow devices returned to Brooks reguire completion of Form RPR003 1 Brooks Instrument Decontamination Statement along with a Material Safety Data Sheet MSDS for the fluid s used in the instrument Failure to provide this information will delay processing by Brooks personnel Copies of these forms can be downloaded from the Brooks website www Brookslnstrument com or are available from any of the Brooks Instrument locations provided on p 2 1 2 5 Transit Precautions ZEE 83 To safeguard against damage during transit transport the device to the installation site in the same container used for transportation from the factory if circumstances permit 2 6 Removal from Storage SS CE EEE ESSES EEB Upon removal of the device from storage a visual inspection should be conducted to verify its as received condition If the device has been subject to storage condition
88. ervi os indicadas Ao n o respeitar esta advert ncia poder provocar avarias no equipamento e ou danos pessoais Se as instrug es deste manual nao estiverem suficientemente claras contacte o representante Brooks Instrument para esclarecer as suas d vidas e Tenha sempre presente todas as advert ncias apelos e instru es indicadas no equipamento e ou fornecidas junto com o mesmo e A instala o do equipamento dever ser efectuada cumprindo todas as instru es indicadas no manual assim como as normas e regulamentos locais e nacionais vigentes Ligue o equipamento exclusivamente a fontes de energia el ctrica e ou pneum tica adequadas Procedimento 1 Pressurize lentamente o sistema Abra lentamente as v lvulas para evitar variag es bruscas de caudal 2 Verifique se ha fugas nas ligac es de entrada e saida do medidor de caudal Se n o detectar fugas poder colocar o sistema a press o de trabalho e Antes de efectuar qualquer opera o de manuten o verifique sempre a possibilidade do equipamento estar sob press o No caso de ser preciso substituir pegas estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substituig o dever ser efectuado por t cnicos qualificados Procedimentos e pecas n o conformes poder o alterar o desempenho do equipamento danific lo ou colocar em risco a sua seguranca ou de outros Substituir pecas por outras n o originais meramente semelhantes poder originar choques el ct
89. este instalatii trebuie amplasate exploatate si intretinute corespunz tor pentru ca in toate situatiile domeniul lor de lucru s corespund operarii normale In ceea ce priveste instalarea operarea si intretinerea produselor Brooks Instrument indicatiile de mai jos trebuie respectate si trebuie introduse in programul de protectia muncii Pentru garantarea prestatiei corecte instalarea operarea actualizarea programarea si intretinerea produsului poate fi realizat doar de c tre personal calificat Instructiunile de instalare ale produsului trebuie citite integral inainte de punerea in serviciu si exploatarea sa In m sura in care editia acestui manual nu este cea adecvat identificati pe ultima copert coordonatele distribuitorului local si pentru l muriri suplimentare adresati v acestuia P strati acest manual pentru referinte ulterioare 4 ATENTIE Nu utilizati instalatia in afara intervalului de functionare indicat n instructiunile de operare Nerespectarea acestui lucru se poate solda cu r niri grave de persoane sau defectarea instalatiei In m sura in care indicatiile c rtii masinii nu sunt suficient de l muritoare luati leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei P strati toate avertismentele avizele si instructiunile livrate odat cu instalatia sau inscriptionate pe aceasta Efectuati instalarea echipamentului in conformitate cu indicatiile de instalare corespunz toare resp
90. et 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB DA DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB DE DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB DX DeviceNet 5 Pin Micro To be defined by CSR G2 Analog RS485 9 PinD NA NA NA NA NA NA NA NA XI Customer Special Reguest XXXX Customer Special Reguest Number XII Auto Shut Off A Auto Shut Off Included X Auto Shut Off Not Included XIII Auto Zero A Auto Zero Included X Auto Zero Not Included XIV Reference Temperature 000 0 C Reference Calibration Standard Default Setting Example Model Code l Il Ill IV V VI VII VIII IX X XI XII XIII XIV GERS RX XX G XXXX XXXX VX A 0 D1 XXXX A A 000 5 3 5 4 Section 5 Product Description Code GF100 Series Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Table 5 3 GF101 GF121 8 GF126 Series Product Description Code Code Description Code Option Option Description
91. etal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to an earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to an earth ground For pin configuration Please refer to the enclosed Instruction Manual ESD Electrostatic Discharge A CAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices
92. gauge 6910381 m for a digital capacitance diaphragm gauge B 1 B 2 Appendix B GF100 Series Patents GF100 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Bulgarian OCHOBHH UHCTPYKLNNM Mpouerere npenu paGora Brooks Instrument npoekrupa nponsBexga U TECTBA nponykTure CU no TakbB HayuH Ye Te na OTTOBAPAT Ha MHOFO PO HM HALJMOHAJIHU M MEXOYHAPOJHU cTaHqapTu Tesu o6opynBaHua TPA BA npaBunHo na ce UHCTANUPAT EKCNNOATUPAT U NOAAbPXAT 3a na ce rapaHTupa Ye me morar na paGoTAT CBOTBETHO Ha TEXHUTE HopManHu cneuucpukaumu Cnengauyure MHCTPYKUMV TPA BA na ce CNAZBAT U TPAGBA na ce BKNIOUAT B nporpamara 3a 6esonacHocT Ha Tpyaa npn UHCTANUPAHETO EKCNNOATALINATA U nonnpexkara Ha nponykrure Ha Brooks Instrument e 3anacerapaHTupa xapakTepHaTa NPOU3BOAUTENHOCT UHCTANUPAHETO eKCNNOATALMATA AKTYANM3UPAHETO nporpamupaneTo U nonapbxkara Ha nponykra TPA BA na ce N3BbpLUBaT CAMO OT KBanucpuumpaH nepcoHan e TIPOJETETE BCHYKU MHCTPyKUMM npegn UHCTANUPAHETO EKCNNOATALUATA U nonnpbxkaTra Ha MPOAVKTA AKO TOBA PBKOBOACTBO He e CbOTBETCTBALJOTO NZHAHNE BUKTE Ha sannaTa o6noxka uHcbopMaLiuaTa 3a KOHTAKT C MECTHMA TbproBcku OC 3anasere TOBA PLKOBOACTBO 3a NO KBCHO MHWOP
93. gramatu ESD elektrostatiska izl de 4 IEV ROT PIESARDZIBU is instruments satur elektriskos komponentus kas ir jutigi pret statisko elektribu Iznemot un uzstadot iek j s k des plates un ierices vai ka cit di darbojoties ar tam ir j iev amp ro noteikta darba kartiba Darba kartiba 1 lek rta jaatsledz no baro anas 2 Pirms jebk das druk tas sh mas kartes vai citas iek j s ier ces uzst d anas iz em anas vai regul anas person lam kas veiks os darbus ir j b t iezem tam piem izmantojot aproces vai citus dro us piem rotus l dzek us 3 Druk t s sh mas kartes ir j transport vado iepakojum Pl ksnes no aizsargkorpusa dr kst iz emt tikai tie i pirms uzst d anas Transport jot uzglab jot vai atgrie ot r pn c no iz emt s pl ksnes ir nekav joties j ievieto aizsargiepakojum Koment ri Instruments nav unik ls taj aspekt ka tas satur pret ESD elektrostatisko izl di jut gus komponentus Vairums m sdienu elektroiek rtu satur komponentus kuru ra o an izmantota met la oks du tehnolo ijas NMOS SMOS u c Pieredze r da ka pat neliels daudzums statisk s elektr bas var nodar t boj jumus d m ier c m vai piln b saboj t t s Boj tie komponenti pat tad ja tie ietami darbojas pareizi ir pak auti tr kai atteicei Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 5
94. gulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions The Brooks GF125 8 GF135 PTI devices utilize a patented control algorithm that inverts the pressure signal compares it to the pre fluctuation signal and drives real time valve position compensation to maintain stable flow Enhanced pressure transient is achieved through faster sensing guicker processing and a reduction in internal dead volume between the sensors and valve orifice GF101 121 126 based on the same technology and design as the low flow GF s same sensor same electronics low power support e Smaller footprint than competitive MFC s Handles flow rates up to 300 slpm Metal seal for durability and high leak integrity Proprietary sensor technology Precise flow control with fast sub 1 second settling time 1 of reading accuracy Corrosion resistant Hastelloy C 22 sensor tube Optional High Accuracy HA GF125 model only The GF125 High Accuracy HA is a gas and range specific model for critical gas process applications requiring the widest working range with tightest flow control accuracy A typical application is for multi step processes requiring a high flow rate up to 10 slpm and a very accurate low flow rate Optional Safe Delivery System SDS GF120 model only The Safe Delivery System SDS enhanced GF120 model is a st
95. ielkie wy adowanie elektrostatyczne mo e uszkodzi lub zniszczy takie urz dzenie Uszkodzone cz ci nawet je eli na poz r dzia aj poprawnie szybko doprowadzaja do nieprawidtowej pracy urzadzenia Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Portuguese Instruc es B sicas Ler antes de proceder A Brooks Instrument projecta fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais Estes equipamentos devem ser instalados utilizados e mantidos de forma adequada e devem funcionar dentro da sua gama de utilizac o As instrug es seguintes devem ser durante a instalac o uso e ou manuteng o dos equipamentos da Brooks Instrument apreendidas e integradas no plano de protecg o e seguranca no trabalho Para assegurar o desempenho adequado a instala o explora o actualiza o e ou manuten o do equipamento deve ser realizada exclusivamente por pessoal qualificado e Antes de instalar utilizar e ou executar opera es de manuten o devem ser lidas todas as instru es do equipamento No caso do presente manual n o ser apropriado procure na capa traseira o distribuidor mais pr ximo e contacte o para obter informa es adicionais Guarde este manual para futura refer ncia ATEN O n o sujeite o equipamento a condi es fora das gamas de s
96. ies November 2015 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Contents X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Paragraph Page Number Number Section 1 General Information 1 1 Introduetioni assi ano a a a a S aa ta 1 1 1 2 Howto Use This MANUAL ion As 1 1 1 3 Product Support References 1 2 1 4 Notice and Caution Statements ee aan 1 2 1 5 Product Warranty er ee m 1 2 1 6 How to Order a GF100 Series Device iii 1 2 1 7 Industry Standard References sis 1 2 1 8 GF100 Series Gas Table ui ee iia 1 2 1 9 Glossary of Terms and Acronyms iii 1 2 1 10 Description c 1 5 1 11 Specifications for GF100 Series Devices i 1 8 Section 2 Installation 2 1 General wew ra nalen ee 2 1 2 2 Recept of EQUIPMENT oa aaa EE a a aci 2 1 2 3 Recommended Storage Practice siisii iaiia aN aan ba ka ask v s s 2 1 2 4 Return Shipiment socia 2 2 2 5 Transit Precautions une nahe 2 2 2 6 Removal from Storage LEEDS aaa aaa aaa RE 2 2 2 7 Gas CONMSG ONS ran cata ana tat bat a i a i i al a 2 2 2 8 Inline EOT snai O 2 2 2 9 Mechanical Installation 44 34 nica ci t ze ae da Pai t i a e a 2 3 2 10 Flow Controller Installation Arrangement us 2 4 2 11 Purge the Gas Supply Line Before GF100 Series Installation 2 5 2 12 Position and Mount the GF100 Series ui 2 6 2 13 Performa Leak Testi ds 2 8 2 14 Zeroing Se
97. ies voor de CE markering Als u zelf voor signaalkabel zorgt moet u altijd een volledig afgeschermde kabel gebruiken Stekkers van het type D of ronde stekkers moeten zijn voorzien van een metalen afscherming Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd De afscherming moet aan de aardpotentiaal worden aangesloten Card Edge Connectors zijn standaard niet van metaal De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE markering De afscherming moet aan de aardpotentiaal worden aangesloten Voor de pinconfiguratie Raadpleeg de bijgevoegde handleiding VOORZICHTIG Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit Neem de juiste procedures in acht bij Elektrostatische ontlading het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten Procedure 1 Schakel de voeding van de eenheid uit 2 Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden ge nstalleerd verwijderd of aangepast 3 Printplaten moeten in een geleidende verpakking worden vervoerd De platen mogen pas vlak voor de eigenlijke instal
98. iku ustrezajo smernicam EU tevilke 97 23 EK Vsaki merilec pretoka Brooks sodi v skupino teko in tevilke 1 Merilni instrumenti ve ji od 25 mm ali 1 palca ustrezajo kategriji PED I II ali III Merilni instrumenti manj i od 25 mm oziroma 1 palca ali manj i sledijo sprejeti in enjeski praksi SEP Evropska smernica za Elektromagnetno kompatibilnost EMC Naprave Brooks Instrument ki so zaslu ile CE ozna bo elektri ni elektronski so uspe no izpolnile testove zahteve o elektromangnetni kompatibilnosti t 2004 108 EC smernice EMC Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla ki se uporabljajo za naprave z ozna bo CE Kakaovost signalnih kablov povezav kablov priklju kov Brooks Insturment nuja kabele visoke kakovosti ki ustrezajo zahtevam kvalificiranja CE V kolikor se uporbalja lastni signalni kabel treba je izbrati ki za 100 senco v polni meri filtriran Priklju ki D olika kroga morajo biti zasen eni kovonskom sencom e bo potrebno uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba priklju iti na kovinsko ohi je ali pla t in na obe polovici je treba sen iti v 360 Sen enje mora zavr iti v ozemljitvi Priklju ki ki sodijo karitcam normalno nisu kovinskik Kori eni kabli moraju biti filtrirani s 100 senco da odgovarjajo CE kvalifikaciji Sencanje mora imat konec v ozemljitvi Konfiguracija stika Vidi prilo eno navodilo za uporabo Elektrosta
99. ilane 10 02 He 10 Oxygen Helium 2 SiH4 N2 2 SILANE NITROGEN 5 B2H6 N2 5 Diborane Nitrogen 8 B2H6 N2 8 Diborane Nitrogen 15000 15001 10 PH3 He 10 Phosphine Helium 7 5 PH3 SiH4 7 5 Phosphine Silane 175 176 54 541 1611 4500 4501 5 PH3 He 5 Phosphine Helium 380 381 1150 1151 3501 10500 10501 2 B2H6 N2 2 Diborane Nitrogen 280 281 87 871 2601 7200 7201 10 GeH4 Ar 10 Germane Argon 115 350 351 1 1071 3301 8700 4 H2 Ar 4 Hydrogen Argon 131 390 391 1 1201 3701 9800 10 B2H6 H2 10 Diborane Hydrogen 82 241 242 2301 7000 5 H2 He 5 Hydrogen Helium 23000 23001 5 B2H6 He 5 Diborane Helium E 21000 21001 5 SiH4 He 5 Silane Helium E A 22000 22001 1 B2H6 Ar 1 Diborane Argon 3600 3601 20000 20001 15 B2H6 H2 15 Diborane Hydrogen l 13300 13301 2 SO2 N2 2 Sulfur Dioxide Nitrogen 5 2600 2601 15000 15001 30 GeH4 Ar 30 Germane Argon A 2600 2601 14100 14101 20 02 Ar 20 Oxygen Argon 1120 1121 3400 3401 19000 19001 Table A 1C GF100 Series Gas Table Codes 878 5022 Bins SH40 to SH50 Min inlet pressure for vac exhaust Gas PSIA SH SH41 SH42 SH43 SH44 SH45 SH46 SH47 SH48 SH49 Bl SH50 Code Gas Symbol Gas Name SH40 SH47 SH48 SH49 SH50 Low ow High Low High Low High Low High Low High Low High Low High Low High ow High OW ig 0
100. inside the GF135 and is connected back to the inlet isolation valve For safe operation and in line with S2 compliance the GF135 cannot override and open the inlet isolation valve Outlet Pneumatic Isolation Valve Line Inlet Pneumatic Isolation Valve Line Figure 2 17 GF135 Series Showing Inlet Outlet Pneumatic Isolation Valve Lines 2 17 2 18 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng i Part Number 541B137AAG GF100 Series November 2015 2 21 GF135 Commissioning a EM Download the GF135 commissioning software part number 805 C 026 from the Brooks Instrument website The software will need to be downloaded onto a computer with a Windows based operating system Necessary eguipment Computer that runs a Windows operating system Power either DeviceNet or RS485 to the device or M8 EtherCAT power Need gas supply for pneumatic valve 90 3 psi BB 485 to 232 converter or approved USB to 485 converter 9 pin to diagnostic cable In order to ensure best results commission the GF135 at operating temperature and pressure on tool Ts GF135 Commission Application 805 C 026 1000 i All MAC s located select device and connect to it 1 Start up the GF135 Commission Application and select a port This will bring up all of the devices on this port Installation and Operation Manual Section 2 Installation X TMF GF100
101. irective 2004 108 EC CE EN61326 2006 FCC Part 15 amp Canada IC subset of CE testing Environmentat Compliance ROHS Directive 2011 65 EU REACH Directive EC 1907 2006 Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Downport Configurations Electrical Connector G1 GX TX Specific Dimensions Electrical Connector DX BB Specific Dimensions 3 67in 93mm Section 1 Introduction GF100 Series Electrical Connector SX Specific Dimensions 3 29in 84mm m GO BROOKS INSTRUMENT 9900000000009 9900000000099 9000000000000 0900000000000 0000000000000 0000000000000 9000000000000 2900000000000 500000000000 220000000000 220000000008 2009000000004 00000000 9000000000009 9000000000009 0000000000000 0000000000000 9000000000000 9900000000000 9000000000000 9000000000000 3090000000009 0000000008 00 e 7 a Dim F DimG 127mm 5 00in 127mm 5 00in 127mm 5 00in 127mm 5 00in 127mm 5 00in 127mm 5 00in 127mm 5 00in 127mm 5 00in Fitting Option Code Seal Type Dim A Dim B Dim C Dim D Dim E 92mm 3 62in 22mm 0 86in 28mm 1 12in 83mm 3 28in 79 8mm13 14in 30mm 1 18in 387mm 1 525in 72mm 2 82in 92mm 3 62in 22mm 0 86in 28mm 1 12in 83mm 3 28in 79 8mm13 14in 22mm 0 86in 28mm 1 12in 72mm
102. isation 1 Faites lentement entrer le d bit dans le systeme Ouvrez progressivement les vannes de proc d pour viter des pics de d bits 2 V rifiez gu il n y a pas de fuite au niveau des branchements d entr e et de sortie du d bitm tre S il n y a pas de fuite amenez le syst me a sa pression d utilisation Avant de proc der entretien assurez vous que la conduite de proc d n est plus sous pression Lorsqu il faut remplacer une piece assurez vous que les pieces de rechange sont celles indiqu es par Brooks Instrument et que des personnes gualifi es effectuent le remplacement Les pieces et proc dures non autoris es peuvent porter atteinte au fonctionnement du produit et mettre en p ril la s curit de votre proc d Les remplacements par des pi ces d apparence similaire peuvent entra ner des incendies des risques lectriques ou un mauvais fonctionnement V rifiez que toutes les trappes de l quipement sont ferm es et que les couvercles de protection sont en place pour viter les chocs lectriques et les blessures sauf lorsque entretien est r alis par des personnes qualifi es AVERTISSEMENT dans le cas d appareils coulement liquide si les vannes d entr e et de sortie adjacentes aux appareils doivent tre ferm es pour une raison quelconque les appareils doivent tre compl tement vidang s Si cela n est pas fait une ventuelle dilatation thermique du fluide peut casser l appareil et provoquer des
103. l reduced surface area and un swept volumes for faster dry down during purge steps Long term sensor and device stability for maximum yield and throughput Extensive Mechanical Configurations GF Series supports all metal seal UHP industry gas connection interface standards for full OEM and process coverage Downport 79 8mm and 92mm C seal and W seal on 1 1 8 and 1 1 2 bodies 124mm 4 VCR on 1 1 2 body r ra e 500Kb pom 2508 LX e PI e MSD 150 DATA RATE Figure 1 2 LCD Display Enhanced Diagnostics and User Interface The mass flow controller is one of the most complex and critical components in gas delivery systems When dealing with ultra high purity gas distribution or highly toxic or corrosive gases removing the mass flow controller to assess functionality should be the last resort Brooks GF Series devices provide for in line device evaluation and instantaneous troubleshooting through e Embedded self test routines and independent diagnostic service port High visibility LCD display with easy accessible push button for local indication of Flow Temperature C Pressure PSIA kPa and Network Address Zero button to easily re zero the device during scheduled maintenance Rotatable display with a push button to enable improved readability based on how the MFC is mounted Simply hold button down for at least 3 seconds to rotate display This featue is standard for GF135 and GF101 GF121 GF126 an
104. lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens Ja ir nepiecie ams veikt k du da u nomai u nodro iniet lai tiktu izmantotas Brooks Instrument nor d t s da as un da u nomai u veiktu kvalific ts person ls Neat autu da u un proced ru izmanto ana var ietekm s ra ojuma sniegumu un samazin t procesa dro bu L dz gu bet ne identisku da u nomai as lieto ana var izrais t ugunsgr ka elektrisko trauc jumu riskus un nepareizu izstr d juma darb bu Nodro iniet lai b tu aizv rtas visas durvis un b tu pareizi uzst d ti visi aizsargp rsegumi t d j di nov r ot elektro oka un traumu risku Iz mums ir gad jumi kad kvalific ts person ls veic ra ojuma apkopi 4 BR DIN JUMS Ja idr s pl smas ier u tuvum eso os iepl des un izpl des v rstus k da iemesla d ir jaaizver no ier c m ir j izlai viss idrums Pret j gad jum idrums var termiski izplesties p rraut ier ci un rad t traumas Eiropas spiedieniek rtu direkt va PED Uz vis m spiedieniek rt m kuru iek jais spriegums p rsniedz 0 5 bar g un ir liel kas par 25 mm jeb 1 collu attiecas Eiropas spiedieniek rtu direkt va PED s rokasgr matas tehnisko parametru noda ir sniegtas a PED Direkt vu saist t s instrukcijas Saja rokasgr mat aprakstitie m ritaji atbilst EN Direktivas 97 23 EK prasibam Visi Brooks Instrument pl smas merttaji ietil
105. latie uit de beschermende verpakking worden gehaald Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd opgeslagen of teruggestuurd naar de fabriek Opmerkingen Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie NMOS SMOS enz Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen Beschadigde componenten zelfs als ze goed lijken te functioneren raken eerder defect Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Estonian Olulised juhised Enne kasutamist lugege hoolikalt l bi Brooks Instrument konstrueerib valmistab ja katsetab oma tooteid selliselt et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite n uetele Ainult n uetekohane paigaldamine kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames Brooks Instrument i toodete paigaldamisel kasutamisel ja hooldamisel tuleb t ita allj rgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi N uetekohase talitluse tagamiseks tohib toodet paigaldada kasutada t iustada programmeerida ja hoo
106. ldada ainult kvalifitseeritud personal Enne toote paigaldamist kasutamist ja hooldamist lugege k ik kasutusjuhised hoolikalt l bi Kui k esolev kasutusjuhend ei vasta teie tootele p rduge kohaliku edasim ja poole kelle kontaktandmed leiate kasutusjuhendi tagakaanelt Hoidke see kasutusjuhend edaspidiseks alles 4 HOIATUS rge kasutage seda instrumenti v ljaspool kasutusjuhendis spetsifitseeritud piirv rtusi Selle hoiatuse eiramine v ib p hjustada t siseid kehavigastusi ja v i kahjustada seadet Kui te saa m ne juhise m ttest aru p rduge selgituste saamiseks kohaliku Brooks Instrument i edasim ja poole J rgige k iki hoiatusi t helepanule manitsusi ja juhiseid mis on tootele peale kantud v i tootega kaasa antud Seadme paigaldamisel j rgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju hendage tooted n uetekohaste toite ja surveallikatega Talitlus 1 Avage aeglaselt vool s steemi Vooluimpulsside v ltimiseks avage t ventiilid aeglaselt 2 Kontrollige et voolukulum turi sisend v i v ljund henduste mber ei ole lekkeid Kui lekkeid ei ole laske s steemil saavutada t surve Enne seadme hooldamist veenduge et kogu s steem on surve alt vabastatud Varuosasid tohib vahetada ainult kvalifitseeritud personal kasutades selleks Brooks Instrumenti poolt heakskiidetud varuosi Mitteoriginaalvaruosade kasutamine ja ebap dev toimingute
107. le se pot scoate din ambalaj doar nemijlocit naintea amplas rii lor Cartela demontat trebuie pus neint rziat n ambalajul de protec ie n vederea transport rii a depozit rii sau return rii la produc tor Observa ii n echipamente se g sesc adesea componente sensibile la desc rcare electrostatic ESD Majoritatea echipamentelor moderne includ componente electronice realizate n tehnologie metal oxid semiconductor NMOS SMOS etc Experien a a dovedit c acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slab intensitate Componentele defectate cu toate c n aparen sunt func ionale duc n timp la defec iuni incipiente Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Slovak Z kladn pr kazy Pre ta pred in tal ciou Brooks Instrument svoje v robky projektuje vyr ba a testuje tak m sp sobom aby tieto vyhoveli dom cim aj medzin rodn m norm m Tieto zariadenia je potrebn predp san m sp sobom in talova prev dzkova a udr iava na zabezpe enie ich spo ahlivej a norm lnej prev dzky v celom pracovnom rozsahu Ni ie uveden pr kazy je potrebn dodr iava a za leni do programu bezpe nostn ch predpisov v priebehu in tal cie prev dzky a dr by v robkov Brooks Instruments V z ujme zabezpe enia vyhovuj ceho v konu in tal
108. leitung enth lt wichtige Sicherheits und Betriebsanweisungen in Bezug auf die Druckger terichtlinie Messger te die in diesem Handbuch beschrieben sind erf llen die europ ische Richtlinie 97 23 EG Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1 Messger te die gr er als 25 mm oder 1 inch sind erf llen die Kategorien I II oder III der Druckger terichtlinie PED Messger te mit einer Gr e von 25 mm oder 1 inch oder kleiner sind Sound Engineering Practice SEP Europ ische Verordnung zur elektromagnetischen Vertr glichkeit EMV Ger te von Brooks Instrument elektrischer und elektronischer Art mit CE Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Vertr glichkeit EMV Richtlinie 2004 108 EC erfolgreich bestanden Dennoch muss bei der Wahl des Signalkabels f r das Ger t mit CE Zeichen auf folgende Dinge geachtet werden Qualit t von Signalkabel Kabeldurchf hrung und Anschl sse Brooks Instrument liefert qualitativ hochwertige Kabel die den Anforderungen f r eine CE Zertifizierung entsprechen Sollten Sie eigene Kabel einsetzen so sollte das Kabel berall mit einer 100 Abschirmung versehen sein D oder Rundstecker sollten eine Metallabschirmung aufweisen Wenn m glich m ssen Kabeldurchf hrungen aus Metall mit Kabelschirmgeflechts Klemmen verwendet werden Der Kabelschirm sollte an die Metallh lle oder durchf hrung angeschlossen werden und an
109. lised elektroonilised seadmed millele on omistatud CE t his on edukalt l binud asjakohased katsed ja vastavad elektromagnetilise hilduvuse n uetele EMU direktiiv 2004 108 EC Kuid signaalkaabli valimisel on vaja p rata suurt t helepanu CE t hisega seadmetele Signaalkaabli l biviigutihendite ja konnektorite kvaliteet Brooks Instrument turustab k rgekvaliteedilisi kaableid mis vastavad CE sertifikaadi n uetele Olemasoleva kaabli kasutamisel j lgige et kaabel oleks t ielikult mbritsetud varjestusega D v i Ring t pi konnektorid peavad olema varustatud metallvarjestusega Kus kohaldatav tuleb kasutada metallist l biviike mis tagavad kaabli varjestuse henduse Kaabli varjestus hendatakse metallkesta v i l biviigutihendiga ja on m lemast otsast kaitstud 360 ulatuses Varjestus peab olema maandatud Mikroskeemide serva hendused on ldjuhul mittemetallist Vastavuse tagamiseks CE sertifikaadi n uetele peavad kasutatud kaablid olema 100 varjestatud Varjestus peab olema maandatud Klemmide konfigureerimine vt komplekti kuuluvat kasutusjuhendit Elektrostaatiline laeng T HELEPANU seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente Seadmesse paigaldatud tr kkplaatide eemaldamisel ja paigaldamisel samuti tr kkplaadi v i seadmega muude toimingute teostamisel j rgige n uetekohase k sitsemise juhiseid K sitsemisjuhised 1 Lahutage seade toiteallikast 2 E
110. lit conformi ai requisiti della certificazione CE Qualora vengano utilizzati cavi di segnale propri devono essere scelti con schermatura al 100 e interamente filtrati I connettori D o rotondi devono essere schermati con schermatura metallica In caso di necessita bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo La schermatura del cavo deve far contatto col guscio metallico o col pressacavo il cavo deve essere schermato su entrambi i lati a 360 La schermatura deve essere effettuata con messa a terra connettori Card Edge normalmente non sono di metallo cavi utilizzati devono essere filtrati con schermatura al 100 per essere conformi alla marcatura CE La schermatura deve essere effettuata con messa a terra Configurazione pin Vedi Manuale d uso allegato Scarica elettrostatica ESD A ATTENZIONE II dispositivo contiene componenti elettronici che possono essere danneggiati da elettricita statica Bisogna rispettare le adeguate procedure durante la rimozione l installazione o altra manovra delle schede del circuito elettrico interno Procedura di manovra 1 Togliere alimentazione elettrica all apparecchiatura La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare togliere o impostare la scheda del circuito elettrico o altri dispositivi interni 3 Le schede del circuito stampato devono essere
111. ll range can be rescaled down typically by a factor of 3 1 with no impact on accuracy turndown or leak by specifications Optimum process and inventory flexibility resulting in dramatically reduced inventory costs Fewer configurations bin sizes required to support many different processes e Less down time with rapid process recovery MultiFlo Support References Brooks MultiFlow Configurator Quick Start Guide X SW MultiFlo Config QS eng Part Number 541B167AAG MultiFlo Configurator Accessory Kits 7782010ZZZ Basic MultiFlo Configurator Kit Software MultiFlo Configurator A331710003 Cable Assembly 2 5mm 214F027AAA USB RS485 Converter with DB 9 female 778Z011ZZZ Basic MultiFlo Configurator Kit w Power Supply and Adapter Cables Software MultiFlo Configurator A331710003 Cable Assembly 2 5mm 214F027AAA USB RS485 Converter with DB 9 female A332295001 Power Supply MFC A332297002 Cable Power 9 Pin A332297001 Cable Power DeviceNet MultiFlo Configurator Software is available on the Brooks Instrument website at www BrooksInstrument com MultiFlo www BrooksInstrument com Documentation amp Downloads Section 1 Introduction GF100 Series Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Pressure Transient Insensitivity PTI Included with all GF125 8 GF135 models Cost and space constraints are driving gas panel designers to remove point of use pressure re
112. m the system power to the device must be disconnected A CAUTION It is important that this device only be serviced by properly trained and gualified personnel ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Installation and Operation Manual Section 4 Maintenance 8 Troubleshooting X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 4 3 Troubleshooting GF100 Series This section includes a Troubleshooting Checklist and a GF100 Series Troubleshooting Guide that identifies symptoms possible causes and corrective actions NOTICE OEM tool problems are often caused by something other than the GF100 Series Therefore Brooks recommends that you review both the Troubleshooting Checklist and the GF100 Series Troubleshooting Guide before removing the GF100 Series from your system It is also suggested to contact your Brooks Service representative before removing the GF100 Series from your system 4 4 Troubleshooting Checklist 1 Check environmental factors that could affect changes to GF100 Series performance The most common environmental factors are listed in Table 4 1 Table 4 1 Environmental Factors GF100 Series Performance Possible Causes Inaccurate flow Control problems Can not
113. mente directamente antes de la instalaci n Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulaci n almacenamiento o devoluci n a la f brica Notas Esto equipo no es el nico contenido de piezas susceptibles a la descarga electroest tica ESD En la mayor a de los medios electr nicos modernos se encuentran piezas fabricadas por tecnolog a de xido met lico NMOS SMOS etc Las experiencias confirman que incluso una m nima electricidad est tica puede da ar o destruir dichos medios Las piezas averiadas aunque funcionen aparentemente bien indican una falla inicial A 20 Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Swedish V sentliga anvisningar L s detta innan du forts tter Brooks Instrument konstruerar tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder Dessa produkter m ste installeras p r tt s tt handhas och underh llas f r att de skall fungera kontinuerligt enligt deras normala specifikation De f ljande anvisningarna b r f ljas och integreras till Ert s kerhetsprogram varje g ng n r Brooks Instruments produkter installeras handhas och underh lls F r att garantera angiven funktion anv nd kvalificerad personal till att installera handha uppgradera programmera och serva produkten o
114. n ranga kurios vidinis sl gis didesnis nei 0 5 bar g o dydis didesnis nei 25 mm arba 1 colis yra reglamentuojama sl gin s rangos direktyvos PED Sios instrukcijos dalyje Techniniai duomenys pateikiami nurodymai susije su PED direktyva e Sioje instrukcijoje apra yti matuokliai atitinka Europos S jungos direktyv 97 23 EB Visi Brooks Instrument srauto matuokliai priklauso 1 skys i grupei e Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I II arba III kategorij 25 mm arba 1 colio ar ma esni matuokliai atitinka tinkam in inerijos praktika SEP Europoje taikomi elektromagnetinio suderinamumo EMC reikalavimai CE enklu pa ym ta Brooks Instrument elektrin elektronin ranga buvo s kmingai i bandyta pagal elektromagnetinio suderinamumo reikalavimus EMC direktyv 2004 108 EC Bet reikia ypatingo d mesio renkantis signalizavimo kabel kuris bus naudojamas su CE enklu pa ym ta ranga Signalizavimo kabelio kabeli riebok li ir jung i kokyb Brooks Instrument tiekia kokybi kus kabelius kurie atitinka CE sertifikavimo specifikacijas Jei naudojate savo signalizavimo kabel jis turi b ti visi kai ir visas ekranuotas 100 Y ekranu Naudojamos D arba apskrito tipo jungtys turi b ti ekranuotos metaliniu ekranu Jei taikoma reikia naudoti metalinius kabeli riebok lius u tikrinan ius kabelio ekrano suspaudim Kabelio ekran reiki
115. n ventily postupn 2 P ekontrolujte t snost vstupn ho a v stupn ho pfipojeni pr tokom ru Pokud nezjistite adn net snosti postupn zvedejte tlak na provozn hodnotu P ed prov d n m servisn ch prac zkontrolujte zda syst m nen pod tlakem V p pad pot eby v m ny d l zajist te aby byly pou ity n hradn sou sti specifikovan spole nost Brooks Instrument a v m nu prov d la kvalifikovan osoba Pou it neschv len ch d l a postup m e negativn ovlivnit efektivitu a bezpe nost procesu Pou it n hrad za origin ln d ly m e zp sobit po r raz elektrick m proudem nebo nespr vnou funkci Pokud nen zrovna prov d na dr ba kvalifikovanou osobou ujist te se Ze zafizeni je opatfeno v emi pfedepsanymi kryty UPOZORN N Pokud je u za zen s pr tokem kapalin nutno z jak hokoli d vodu uzav t vstupn a v stupn ventily je nutn za zen kompletn vypr zdnit Pokud tak neu in te m e z d vodu teplotn rozta nosti zbytk m dia v za zen doj t k jeho po kozen nebo k ohro en zdrav osob Evropsk sm rnice pro tlakov za zen PED Na ve ker tlakov za zen s vnit n m tlakem vy m ne 0 5 baru g a velikosti v t ne 25 mm nebo 1 palec se vztahuje platnost sm rnice o tlakov m za zen PED Kapitola Technick daje v t to p ru ce obsahuje d le it bezpe nostn a prov
116. n Micro To be defined by CSR Code Description Code Option Option Description XI Customer Special Request XXXX Customer Special Request Number required with DX BB Conn Option to define DNet settings XII Auto Shut Off A Auto Shut Off Included Default for SD and SL special application X Auto Shut Off Not Included Must be selected for meter XIII Auto Zero A Auto Zero Included X Auto Zero Not Included XIV Reference Temperature 000 0 C Reference Calibration Standard Default Setting Sample Standard Model Code Il Ill IV V VI VII VIII IX X XI XII XIII XIV GF 100 C XX M SH40010C VX A 0 GX XXXX A X 000 Sample High Accuracy HA Model Code I Il lil IV V VI VII VIII IX X XI XII XIII XIV GF 125 X HA C XXXXXXXX CX V 0 FX XXXX A X 000 Sample Safe Delivery System SDS Model Code Il Ill IV V VI VII VIII IX X XI XII XIII XIV GF 120 X SD C XXXXXXXX EX V 0 SX XXXX A X 000 Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Table 5 2 Model GF135 Product Description Code Section 5 Product Description Code GF100 Series Code Description Code Option Option Description I Base Model Code GF
117. n XXXX XXXX Specific Gas Code 8 Range i e 0004 Argon and 0101 10 slpm must select w SD SL or HA special application SH40 010C Standard Configuration 40 3 10 sccm Nitrogen Equivalent 0 C Reference SH41 030C Standard Configuration 41 11 30 sccm Nitrogen Equivalent 0 C Reference SH42 092C Standard Configuration 42 31 92 sccm Nitrogen Eguivalent 0 C Reference SH43 280C Standard Configuration 43 93 280 sccm Nitrogen Eguivalent 0 C Reference SH44 860C Standard Configuration 44 281 860 sccm Nitrogen Eguivalent 0 C Reference SH45 2 6L Standard Configuration 45 861 2600 sccm Nitrogen Equivalent 0 C Reference SH46 7 2L Standard Configuration 46 2601 7200 sccm Nitrogen Eguivalent 0 C Reference SH47 015L Standard Configuration 47 7201 15000 sccm Nitrogen Eguivalent 0 C Reference SH48 030L Standard Configuration 48 15001 30000 sccm Nitrogen Eguivalent 0 C Reference SH49 040L Standard Configuration 49 30001 40000 sccm Nitrogen Eguivalent 0 C Reference SH50 055L Standard Configuration 50 40001 55000 sccm Nitrogen Eguivalent 0 C Reference VII Fitting VX 1 1 2 body width 124mm 1 4 VCR male CX 1 1 8 body width 92mm C Seal DX 1 1 8 body width 79 8mm C Seal EX 1 1 2 body width 79 8mm W Seal WX 1 1 8 body width 92mm W Seal YX 1 1 8 body width 79 8mm W Seal AX 1 1 2 body width 92mm C Seal BX 1 1 2 body width 92mm W Seal LX 1 1 8 body width 92mm C Seal w Poke Yoke AS 1 1 2
118. nce inlet pressure is a potential source for zero errors the pressure transducer on each GF100 Series should be correctly set to zero after installation The zeroing process is performed from the backlight LCD display on top of the GF100 Series OEM tools using a microprocessor or computer for operating the GF100 Series should seguence the GF100 Series off between processes To accomplish this simply provide a zero set point The GF100 Series will shut off automatically A NOTICE Make sure you perform the zeroing set up process outlined in Section 2 17 before zeroing the GF100 Series Shut off valves whether upstream or downstream from the GF100 Series should be programmed to turn on before the GF100 Series is turned on and turned off after the GF100 Series is turned off 2 15 1 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel AE EZZ BEE 1 Place the GF100 Series under a strong vacuum with the GF100 Series set to 100 set point Make sure that upstream valve is closed and the downstream valve is open Allow time for the upstream pressure to bleed off 2 Looking at the top of the GF100 Series press the Display button starting at the MACID four times to PSI or five times to kPa or until the LCD displays the labels PSI or kPa The GF100 Series will display pressure in units of PSIA or kPa Press and hold down the Zero button a minimum of 5 seconds or until the display reads 0 000 with O O o P
119. nd mixtures As a result MultiFlo technology enables the user to reduce unique inventory requirements 1 Gas Source 6 GF100 or 120 2 Regulated Gas Supply 7 Downstream Shut Off Valve 3 Point of Use POU Regulator 8 Tool 4 Filter 9 Vacuum Pump 5 Upstream Shut Off Valve 1 Gas Source 5 GF125 2 Regulated Gas Supply 6 Downstream Shut Off Valve 3 Filter Optional 7 Tool 4 Upstream Shut Off V alve 8 Vacuum Pump Figure 2 2 Typical Gas Supply Arrangement with PTI MFC Installation and Operation Manual Section 2 Installation X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series 2 11 Purge the Gas Supply Line Before GF100 Series Installation FE zz Sa A CAUTION For additional safety it is recommended to close the two valves between the charged gas line and the GF100 Series to be installed See Figures 2 1 and 2 2 for more details A NOTICE It is recommended to archive service and calibration documentation for the GF100 Series in order to determine the contamination state of each gas line and to assist service personnel A CAUTION DO NOT remove the shipping caps covering the inlet outlet for VCR fittings or DO NOT remove the blue tape on the bottom ofthe device for downported fittings before the GF100 Series is actually being installed Failure to comply will introduce contaminants into the GF100 Series Before operating the GF100 Series the gas supply line must be complet
120. ne B 1 Installation and Operation Manual Section 1 Introduction X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series 1 1 Introduction Designed for semiconductor MOCVD and other gas flow control applications that reguire a high purity all metal flow path the Brooks GF100 Series mass flow controllers and meters deliver outstanding performance reliability and flexibility Process throughput and yield are maximized while process costs are reduced by the GF100 Series featuring Ultra fast settling time for quick start up and very rapid process steps MultiFlo gas and range configurability enabling reconfiguration without removing device from the gas line e An independent diagnostic service port to troubleshoot or change flow conditions without removing the mass flow controller from service Long term stability due to extremely low wetted surface area and corrosion resistant Hastelloy sensor and valve seat Optional model variations including pressure transient insensitivity PTI High Accuracy HA Safe Delivery System SDS Figure 1 1 GF100 Series High Performance Gas Flow Controller Analog and Digital 1 2 How to Use This Manual This manual is intended to provide the user with all the information necessary to install operate troubleshoot and maintain these thermal mass flow devices The manual is organized in the following sections Section 1 Introduction Section 2 Ins
121. ng Part Number 541B137AAG GF100 Series November 2015 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers rec
122. nne tr kkplaadi v i m ne muu siseelemendi paigaldamist eemaldamist v i konfigureerimist peab personal olema maandatud l bi randmepaela v i m ne muu sobiva vahendi 3 Tr kkplaate transporditakse voolujuhtivas konteineris V tke tr kkplaat kaitsvast konteinerist v lja vahetult enne selle paigaldamist Seadmest eemaldatud tr kkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks hoiustamiseks v i tehasesse tagasisaatmiseks Kommentaarid See seade ei ole ainus mis sisaldab staatilise elektri suhtes tundlikke elemente Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente mille valmistamiseks on kasutatud metalloksiidtehnoloogiat NMOS SMOS jne Kogemused n itavad et isegi v ike kogus staatilist elektrit v ib neid seadmeid kahjustada v i isegi h vitada Kuigi v ib n ida et kahjustatud komponendid t tavad n uetekohaselt hakkavad talitlush ired ilmnema juba varakult A 5 A 6 Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Finnish Perusohjeet Lue ensin ohjeet huolellisesti Brooks Instrument suunnittelee valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainv listen standardien vaatimuksia Tuotteet tulee asentaa k ytt ja huoltaa k ytt ohjeiden mukaan jotta niiden toimivuus taataan Brooks Instrumentin laitteiden asennuksessa k
123. nt If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Please make sure that the process line pressure is removed prior to service When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury except when maintenance is being performed by qualified persons A WARNING For liquid flow devices if the inlet and outlet valves adjacent to the devices are to be closed for any reason the devices must be completely drained Failure to do so may result in thermal expansion
124. ntribution by MFCs SEMI E67 Test method for determining reliabilty of MFCs SEMI E68 Test method for determining warm up time of MFCs SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs SEMI E80 Test method for determining attitude sensitivity of MFCs SEMI E16 90 Guidelines for determining and describing mass flow controllers leak rates SEMI F19 Specification for the finish of the wetted surface of electro polished 216L stainless steel components SEMI F20 Specifications for 316L stainless steel bar extruded shapes plate and investment castings for components used in ultra high purity semi manufacturing applications SEMI F36 Guide for dimensions and connections of gas distribution components SEMI F37 Method for determination of surface roughness parameters for gas distribution system components SEMI F44 Guideline for standardization of machined stainless steel weld fittings SEMI F45 Guideline for standardization of machined stainless steel reducing fittings SEMI F47 Specifications for semiconductor processing equipment voltage sag immunity SEMI S2 Environmental Health and Safety Guidelines SEMI S9 Dielectric testing SEMI S10 Risk assessment SEMI S12 Decontamination of fielded products Section 1 Introduction GF100 Series Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Table
125. nual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Section 5 Product Description Code GF100 Series Table 5 1 GF100 GF120 8 GF125 Series Product Description Code Code Description Code Option Option Description I Base Model Code GF High Purity Ultra High Purity Digital Mass Flow Controllers II Package Finish Specifications 100 Flow range 3 sccm 55 slpm N Eg 1 0 SP Accuracy 1 sec Response 10 Ra 120 Flow range 3 sccm 55 slpm N Eg 1 0 SP Accuracy 700 msec Response 4 Ra 125 Pressure Transient Insensitive PTI Flow range 3 sccm 55 slpm N Eg 1 0 SP Accuracy 300 500 msec Response 4 Ra Ill Configurability G MultiFlo capable Standard bins or specific gas range may be selected X Not MultiFlo capable Specific gas range required must select w SD SL or HA special application IV Special Application XX Standard HA High Accuracy Calibration GF125 only SL Safe Delivery System GF120 Only Full scale flow range 4 to 25 sccm Nitrogen Equivalent SD Safe Delivery System GF120 Only Full scale flow range gt 25 sccm to 1 slpm Nitrogen Eguivalent V Valve Configuration 0 Normally Open valve not available with SD SL or HA options G Normally Closed valve must select with SD SL or HA special application M Meter No Valve VI Gas or SH MultiFlo Bi
126. o summed signals cancel each other out 4 The sensor signal that is applied to the microprocessor is undisturbed 5 The flow of process gas is undisturbed by incoming pressure fluctuations Figure 3 1 GF100 Series Operating Principles Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 4 1 Overview 4 2 Maintenance Section 4 Maintenance 8 Troubleshooting GF100 Series No routine maintenance is reguired on the Brooks GF100 Series devices If an in line filter is used the filtering elements should be periodically replaced or cleaned Any precision unit such as a flow controller reguires occasional servicing especially if it has been operating for an extended period of time If reactive gases are being used it is recommended that you send the device to a Brooks Service Center for cleaning and recalibration Please follow the instructions for removal product packaging and product return instructions found in Section 2 Installation Return Shipment All active process instrumentation and eguipment is subject to aging and wear from their environment This includes temperature mechanical stress component tolerance shift contaminant buildup oxidation and other influences The effects are gradual but over time the changes can affect the accuracy of even the best eguipment Therefore it is recommended to re zero the device at 6 month intervals Refer to Section 2 18 Performance Ch
127. o the user interface display and MAC ID and baud rate switches if equipped at the top of the device Install the device in such a manner that permits easy purge and removal if the device requires servicing ACAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the instrument purged with clean dry N before use The GF100 Series is equipped with PTI technology which reduces the effect of pressure fluctuations on gas flow In PTI technology a signal from an integrated pressure transducer is combined with the standard thermal sensor output The combined signals allow precise and stable flow even when the line pressure is fluctuating The GF100 Series also utilizes MultiFlo technology that allows the user to configure standard configurations SHs or blanks for a variety of pure gases and mixtures As a result MultiFlo technology enables the user to reduce unique inventory requirements 2 3 2 4 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 2 10 Flow Controller Installation Arrangement Typical gas supply arrangements are shown in Figures 2 1 and 2 2 GF100 s are often arranged inside a gas panel Configure standard configurations SHs or blanks for a variety of pure gases a
128. oa GUHHOPPWVOVTAI HE TIG KATNVOPIEG I II kai III TIG Odnyiac PED Merpnr c uey 8oug 25 mm 1 vroag rj Kal HIKPOTEPOI KATAGKEV OVTAI OUUPWVA LIE TOUG KAV VEG TNG T XVNG SEP Eupwrraik O nyia via Tnv NAEKTPOHAYVNTIK OUHBATOTNTA EMC O nAekTpik c nAekTpovik c E OTTAIOH G TNG Brooks Instrument Trou PEPEI ro orjua CE XEI UTTOOTEI ETTITUXWG TIG OKINEG TTOU rrpofA rrouv OI IAT EEIG TNG O ny ag via Tnv nAekrpopayvnrikri ouuBar rnra Odnyia 2004 108 EC wa Tnv EMC M VTWG XPEI ETAI I IAITEPN TTPOOOXA OTNV ETTI OY rou KAAW IOU OFJHATOG VIA rov EEOTTAIOJI Trou PEPEI TO oua CE Not rnra TW KA W IWV OUATOG OTUTTIOBAITTTWV KAI BUOUATWV KAAW IWV H Brooks Instrument Trpocg pEe UWNANS TTOIOTNTAG KaAwdla TA orro a TTANPOUV TIG TPO IAYpag s CE Ze TEPITTTWON rrapoxris IKOU cag KAAW IOU orjparoc xpnoiporroie re KAAW IO HE TTA PN Owp kion 100 og Aa TA onpeia BUOHATA T TTOU D rj KUKAIK TTPETTEI VA EXOUV HETAAAIKH Bwp k on Na XPNOIKOTTOIN OUV KATA rrpor unon HETAAAIKOI OTUTTIOGAITITEG KAAWOIWV VIA TN OTEP WON TNG OWP KIONG Na ouv elgi n Owp kion TOU KAAW IOU oro HETAAAIK KEAUPOG OTUTTIOG ITTTN Kai va OWPAKIOTEI Kal ora d o kpa kata 360 poipes H Bwp k on TTPETTEI va TEPUATITEI oe yeiwon E POUG Ta B ouaTa kpou TNG TTAQKETOG EIVAI EK KATAOKEUNG un HETAAAIKA Ta XPNOIHOTTOIO HEVA KAAWOIC TTPETTEI va xouv 100 Owp kion VIA OUHHOPYWON HE TNV TTIOTOTTO NON CE H Owp kion
129. oden od elektrostatick ch n bojov Pri mont i odstra ovan alebo inej dr by vn torn ch obvodov ch kariet je potrebn dodr iava pr slu n postupy Postup o etrovania 1 Zariadenie odpoji od nap jania 2 Osoba vykon vaj ca dr bu m by uzemnen uzem uj cim n ramkom alebo in m na t to pr cu vyhovuj cim sp sobom pred vykon van m in tal cie demont e a nastavenia obvodov ch kariet alebo in ho vn torn ho prostriedku 3 Karty obvodov sa musia prepravova v elektricky vodivom balen Karty sa m u vybera z ochrann ho obalu v lu ne len tesne pred mont ou zasunut m Vybran kartu okam ite treba umiestni do ochrann ho obalu ur en ho pre dopravu skladovanie alebo pre sp tn prepravu do v robn ho z vodu Pozn mky Existencia prvkov ktor s citliv na elektrostatick v boje ESD v pr stroji je ast m javom U v iny modern ch elektronick ch prostriedkov s pou it prvky s technol giou oxidu kovov NMOS SMOS at Sk senosti dokazuj e aj nepatrn elektrostatick v boje po kodzuj zni ia tieto prostriedky Po koden s iastky aj ke zdanlivo pracuj bez chyby odkazuj na vznikaj ce poruchy A 17 A 18 Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Slovene Osnovna navodila Najprej preberite jih Brooks Instrument t
130. omethylsilane Hydrogi 131 1200 1201 20 GeH4 H2 20 Germane Hydrogen h 242 2240 2241 0 5 B2H6 He 0 5 Diborane Helium E 3700 3701 20 F2 Ar 20 Fluorine Argon 3400 3401 5 HF N2 5 Hydrogen Fluoride Nitrogen s 2600 2601 3 H2S CO 3 Hydrogen Sulfide Carbon Mon T 2600 2601 1 4 C2H2 Ar 1 4 Acetylene Argon 3 1 3600 3601 2 Ge2H6 H2 2 Digermane Hydrogen 2600 2601 38 SiCI4 02 38 Silicon Tetrachloride Oxygen 3 E 1400 1401 15001 25000 20 H2S 20 C02 20 Hydrogen Sulfide 20 Carbo 3 2400 2401 20 SiH2CI2 H2 20 Dichlorosilane Hydrogen 4 2100 2101 0 1 CI2 N2 0 1 Chlorine Nitrogen z 2600 2601 1 HCI N2 1 Hydrogen Chloride Nitrogen 2600 2601 3 BCI3 N2 3 Boron Trichloride Nitrogen N 2510 2511 7001 18 NO N2 18 Nitric Oxide Nitrogen i 2600 2601 7300 15000 9 NO 41 N2 H2 9 Nitric Oxide 41 Nitrogen H2 s 2610 2611 7700 7701 20 H2 Ar 20 Hydrogen Argon 40 3400 3401 9401 COS Special Carbonyl Sulfide Spe 5 E 1700 1701 S s aje a Ao For reference only consult factory on the latest tables 990 100 0082 R17 Installation and Operation Manual Appendix B GF100 Series Patents X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series B 1 GF100 Series Patents The GF100 Series may be protected by the following US patents and their international filings Table B 1 GF100 Series Patents estosor fiora digtet eapactance dlsphragm
131. on Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 2 19 Electrical Connections AAA A L 1 T 2 19 1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave Obtain a DeviceNet communication cable Micro M 12 and fasten it to the 5 pin connector as shown in Figure 2 13 DeviceNet M 12 DeviceNet 5 Pin M 12 Connector Cable Connector M Connection Drain V CAN H Pin 1 2 V 11 25 Vdc 3 4 5 CAN L A CAUTION DO NOT apply more than 10 Inch Pounds of torque to the cable coupling when connecting the cable to the device or damage may resultto the connector Figure 2 13 GF100 Series DeviceNet Connection Installation and Operation Manual Section 2 Installation X TMF GF100 Series MFC eng Part Number 541B137AAG N November 2015 GF100 Series 2 19 2 Analog RS485 Connections E s The GF100 Series devices are available with Analog 9 Pin D Connectors shown in Figure 2 14 Connector Refer to Figure 2 15 for Pin Out Details PIN Connection 6 Setpoint 0 5 Vdc 8 RS485DX 9 RS485DX Figure 2 15 Analog 9 Pin Connector M 2 15 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Base I O Options PDC Ordering Cod
132. on alle 25 mm tai 1 tuuma ovat hyv n konepajak yt nn n SEP mukaisia Eurooppalainen direktiivi s hk magneettisesta yhteensopivuudesta EMC Brooks Instrumentin CE merkin saaneet s hk s hk iset laitteet t ytt v t EMC direktiivin vaatimukset ja testit s hk magneettisesta yhteensopivuudesta 2004 108 EC EMC direktiivi Erityist huomioita on kiinnitett v CE merkittyjen laitteiden k yt ss olevien kaapelien valintaan Kaapelien kiinnikkeiden ja liittimien laatu Brooks Insturmentin kaapelit ovat korkealaatuisia ja t ytt v t CE merkint direktiivin vaatimukset Muun valmistajan kaapelia k ytett ess on k ytett v 100 suojattua kaapelia Liittimien tulee olla h iri suojattua tyyppi Tarvittaessa k ytet n metallisia kiinnikkeit kaapelin suojuksen kiinnitt miseen Kaapelin suojakuoren pit olla yhdistettyn metallisuojukseen tai laippaan ja sen pit olla molemmista p ist suojattuna 360 Suojaus p ttyy maadoitukseen Standardin mukaan korttien liittimet eiv t ole metallisia K ytettyjen kaapelien suojaus on oltava 100 jotta se t ytt isi CE merkinn n direktiivin vaatimukset Suojaus p ttyy maadoitukseen Napojen j rjestys Katso liitteen oleva k ytt opas Elektrostaattinen purkaus ESD VAROITUS Tuote sis lt elektroniikkakomponentteja jotka voivat vahingoittua staattisesta s hk st Sis isten piirilevyjen purkamisessa asennuksessa ja k sittelyss tulee n
133. oneel de onderhoudswerkzaamheden uitvoert WAARSCHUWING bij vloeistofstroomapparaten waarvan de inlaat en uitlaatkleppen om welke reden dan ook gesloten zijn moet de vloeistof volledig worden afgetapt Als dat wordt nagelaten kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED richtlijn Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn e In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED richtlijn De meters die in deze handleiding worden beschreven voldoen aan de Europese richtlijn 97 23 EG Alle stromingsmeters van Brooks Instrument vallen in groep 1 Meters met een diameter van meer dan 25 mm voldoen aan de categorie n I II of III van de PED richtlijn Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap Elektromagnetische compatibiliteit EMC De elektronische apparatuur van Brooks Instrument met de CE markering is succesvol getest in overeenstemming met de EMC voorschriften richtlijn EMC 2004 108 EC De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE markering verdient speciale aandacht Kwaliteit van de signaalkabel kabelafdichtingen en stekkers Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificat
134. ones indicadas en las respectivas instrucciones de instalaci n y con las pautas de las normas vigentes locales e internacionales Conectar el producto exclusivamente a la adecuada fuente el ctrica y presi n Proceso 1 Colocar lentamente flujo en el sistema Abrir lentamente las v lvulas de proceso para evitar oscilaci n del flujo 2 Verificar si hay fuga alrededor de las conexiones de entrada y salida del fluj metro Si no hay llenar el sistema con la presi n de operaci n Antes de efectuar el servicio verificar si hay presi n o no en la tuber a de la red Si se requiere realizar un recambio de piezas solamente el personal calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro El recambio realizado con piezas s lo similares pueden traer como consecuencias incendios choques el ctricos o funcionamiento bajo Todas las puertas de la instalaci n deben estar cerradas las cubiertas de protecci n tienen que hallarse en el debido sitio con el fin de evitar los da os personales y los choques el ctricos salvo cuando un especialista efect a el mantenimiento A ADVERTENCIA En caso de instalaciones que circulen l quido si por cualquier raz n se hubiera de cerrar las v lvulas de entrada y salida situadas al lado del equipo dichas instalaciones deber n ser completamente vaciadas La omisi n de es
135. oper operation ANOTICE If the GF100 Series has been in the purge mode for a long period of time wait until the GF100 Series has cooled down before zeroing The cool down period should be 30 minutes for purges up to five minutes and at least 60 minutes after purging overnight e The GF100 Series must be warmed up for at least 30 minutes e The active gas page must be correct e The GF100 Series pressure transducer must be correctly zeroed e The GF100 Series flow must be correctly zeroed This chapter describes how to zero and sequence the GF100 Series for proper operation 2 17 Introduction to the MultiFlo Configurator AAA A The MutliFlo Configurator application is used to configure the gas and range ofthe GF Series devices The following section describes the MultiFlo Configurator and its uses 2 18 Using the MultiFlo Configurator The MultiFlo Configurator application allows communication to GF Series devices through personal computer with serial COM Port and a Windows XP or Windows 7 operating system It s primary function is to configure gas and flow ranges within six defined standard configurations Flow ranges are configured to the Nitrogen equivalent Table 2 3 Gas and Flow Ranges MultiFlo Configurable N2 Equivalent Configurations Code N2 Equivalent 3 10 sccm 11 30 sccm 31 92 sccm 93 280 sccm 281 860 sccm 861 2600 sccm 2601 7200 sccm 7201 15000 sccm 15001 30000 sccm 30001 40000 sccm 2 11 2
136. or downstream Verify that the valves are open and operating shut off valves closed either by properly the system or because of failure Is the MOD LED light on the GF100 Series Observe the LED display panel on top of to lit solid green verify If the LED light is not lit cycle power the to reboot Use the tool software to verify Corrective Action Is the commanded setpoint from tool system at 0 00 Vdc Has the been commanded Use the tool software to verify off by an active valve closed input 2 Flow out of range Is the gas inlet outlet pressure differential Verify that the pressure is correct for the gas either too high or too low and range If required adjust inlet outlet pressure to achieve proper pressure reading NOTE If the differential pressure is too high voltage to the will be zero which is abnormally low for the setpoint If the differential is too low voltage to will be at its maximum value which is abnormally high for the set point Is the MOD LED light on the GF100 Series Observe the LED display panel attop of If the LED light is not lit cycle power the to reboot required gas flow Isthe zero correct Zero the according to zeroing UL LN procedure in Section 2 14 Verify leak check rates are OK semi CT above maximum Is the gas pressure across the Verify that the pressure is correct for the gas and too high range If required adjust inlet outlet pressure to achieve proper pressure reading
137. orjaamista v ltt ksesi killisen painep st n aiheuttaman loukkaantumisriskin Mahdollisten varaosien tulee olla Brooks Instrumentin hyv ksymi Vain valtuutettu huoltohenkil saa asentaa varaosat Ei hyv ksyttyjen varaosien k ytt voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin Samoin ei hyv ksyttyjen varaosien k ytt voi aiheuttaa tulipalon s hk iskun tai virhetoiminnan riskin e Varmista ett kaikki kaikki laitteen ovet luukut ovat suljettuina ja tarkista ett suojakannet ovat paikoillaan est ksesi mahdollisen s hk isku ja loukkaantumisvaaran VAROITUS Jos j rjestelm ss virtaa neste ja laitteen sis n ja ulosmenoventtiilit pit sulkea laite on ensin tyhjennett v kokonaan Tyhjent misen laiminly nti aiheuttaa nesteen l mp laajenemista joka saattaa johtaa laitteen rikkoutumiseen ja henkil vahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joidenpaine on suurempi kuin 0 5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED e PED direktiivi koskevat m r ykset l ytyv t k ytt oppaan Tekniset tiedot luvusta e K ytt oppaassa kuvatut mittarit ovat 97 23 EC EU direktiivin mukaisia e Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhm n 1 Laitteet jotka ovat suurempia kuin 25 mm tai 1 tuuma ovat PED I II III kategorien mukaisia e Mittarit joiden koko
138. oudattaa kaikkia m r yksi ja ohjeita Asennusohjeet 1 J rjestelm n s hk t katkaistaan 2 Laitteen kanssa ty skentelev henkil on suojattava s hk iskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sis osan asennusta poistamista tai korjaamista 3 Piirilevyt kuljetetaan konduktiivisessa pakkauksessa Piirilevyt puretaan paketista juuri ennen asennusta Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista varastoimista tai palautusta varten Huomautukset Tuotteen herkkyys elektrostaattiselle purkaukselle ESD ei ole ep tavallista Suurin osa elektroniikkatuotteista sis lt komponentteja jotka hy dynt v t metallioksiditekniikkaa NMOS SMOS jne Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite n ytt isi toimivan normaalisti Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series French Instructions essentielles A lire avant de commencer Brooks Instrument congoit fabrique et teste ses produits pour r pondre de nombreuses normes nationales et internationales Ces produits doivent tre correctement install s utilis s et entretenus pour pouvoir fonctionner dans le cadre de leurs sp
139. ozn pokyny souvisej c se sm rnic PED M ic p stroje popsan v t to p ru ce jsou v souladu se sm rnic EN 97 23 ES V echny pr tokom ry spole nosti Brooks Instrument spadaj do r mce Kapaliny skupina I M ic p stroje v t ne 25 mm nebo 1 palec jsou v souladu se sm rnic PED kategorii I II nebo III M ic p stroje s velikost 25 mm nebo 1 palec a men spadaj do r mce Spr vn ch technick ch postup SEP Evropsk sm rnice pro elektromagnetickou kompatibilitu EMC Elektrick elektronick za zen Brooks Instrument nesouc zna ku CE bylo sp n testov no dle p edpis pro elektromagnetickou kompatibilitu sm rnice EMC 2004 108 EC V b ru sign ln ch kabel pro pou it se za zen m ozna en m CE je nutn v novat zvl tn pozornost Kvalita sign ln ch kabel kabelov ch pr chodek a konektor Brooks Instrument dod v vysoce jakostn kabely spl uj c po adavky kvalitativn ho za azen CE Pokud chcete pou t vlastn sign ln kabely zvolte typy s kvalitn m st n n m v ech il a v cel d lce trasy V p pad pou it konektor kruhov ch nebo tvaru D mus m t tyto kovov st n n V p pad jejich pou it mus kovov kabelov pr chodky b t propojeny se st n n m kabelu St n n by m lo b t p ipojen ke kovov mu t lesu p stroje nebo krytu na obou konc ch kabelu a
140. peMeHHO Aa 6bAaT 3arBopeHM a 3aLynTHUTe NOKPUTUA Aa bAaT Ha MACTOTO CH 3a na ce u30erHaT TOKOBUTE yAapu U TENECHUTE NOBPEAM ocBeH ako KBANUDULINPAHU cneunanucru U3BbpLUBaT Pa6oTN NO HeroBOTO NOAAbpXaHe A BHAMAHUE Mpu o6opy BaHnaTa C NPOTKYALIM TeuHOCTM AKO NO HAKAKBA MPM4MHa e Heo6xoguMmo Aa Ce ZATBOPAT HaMMpalunTe ce JO o6opyaBaHeTo H3XOAHH M BXOAHH knanaHu 060pyABaHeTo TPA BA HanbnHo Aa ce W3npa3Hu Hen3NbNHEHMETO Ha TOBA Moxe na NPUYUHU TOMJIMHHO PaBLIMPEHME Ha TEYHOCTTA KOETO MOKE AO CMYKa OGOPVABAHETO M Aa AOBEAE AO TENECHH noBpegu EBpone cka AMpeKTMBa 3a ypenu nog HanaraHe PED Bcuuku CBOPBXKEHMA NOA HanaraHe C BbTPEWHO HanaraHe Han 0 5 bar g u c pa3mep no ronam or 25 mm unu 1 uu nonanaT NOA AEMCTBMETO Ha eBpone ckaTa AMPeKTWBa 3a ypenu nog HanaraHe PED nasa TexHn4eckn AaHHU Ha HACTOALLOTO PbKOBOACTBO CbAbpxa CBbp3aHWTe C AUpekTUBaTa PED uHucTpykL MW Yka3aHnTe B HaCTOALIOTO PbKOBOACTBO M3MEpWTEJIHM ypenu CbOTBETCTBAT Ha eBpone ckata AupekTuBa 97 23 E O Bcuuku pa3xonomepu Ha Brooks Instrument ce OTHACAT KLM nyugu OT rpyna 1 MameputenHuTe ypenu no ronemu OT 25 mm unu 1 uH4 CHOTBETCTBAT Ha I Il unu III kareropua cnopen PED MameputenHuTe ypenu c pasmepu 25 mm unu 1 UHY nnn no Manku cnegBar 06paTa uHKeHepHa npakTuka SEP EBpone cka AMPEKTMBA 3a enekrpoMarHuTHa CHBMECTHMOCT EMC Hoceujoro 3Haka CE enekTpuyecko enekTpoHHo oGopyaBaHe Ha Brooks Instrument e n3nbnHuno ycnewHo TECTOBETE 3a nposepka
141. po cel m jeho obvodu St n n by m lo b t uzemn no P pojky vedouc ke kart m podle norem jsou nekovov Pro spln n po adavk p edpis CE mus b t pou it kabely kompletn st n ny St n n by m lo b t uzemn no Konfigurace kontakt je uvedena v p ilo en m n vodu k obsluze Elektrostatick v boj ESD UPOZORN N Tento p stroj obsahuje komponenty citliv na po kozen statickou elekt inou P i mont i demont i i jin manipulaci s vnit n mi elektronick mi obvody je pot eba dodr ovat p slu n postupy Postup o et ov n 1 Odpojte p stroj od nap jen 2 Osoba prov d j c dr bu m b t p i instalaci vyj m n i pr ci na desce plo n ch spoj nebo jin vnit n elektronice uzemn na zemn c m n ramkem nebo jin m vyhovuj c m zp sobem 3 Desky plo n ch spoj je nutn p epravovat v elektricky vodiv m obalu Plo n spoje vyj mejte z vodiv ho obalu a bezprost edn p ed instalac do p stroje Plo n spoje vyjmut z p stroje a ur en pro dal vyu it op t neprodlen um st te do ochrann ho obalu Pozn mky Existence prvk citliv na elektrostatick v boje ESD v p stroj ch je ast m jevem Prvky s technologi oxidu kov NMOS SMOS jsou pou v ny u v t iny modern ch elektronick ch za zen Zku enosti dokazuj e i jen mal elektrostatick v boje mohou po kodit nebo zni i
142. ponden a los requerimientos de calificaci n CE Si se utiliza cable propio de la firma se ha de elegir uno que sea completamente filtrado con blindaje de 100 Las piezas de uni n de forma D o circular deben ser blindadas mediante blindaje met lica Si es necesario aplicar piezas de uni n de metal para sujetar el filtro de cable Conectar el filtro de cable a la caja o manguito de metal blind ndolo en ambas caras en 360 El blindaje debe terminar en tierra Los conectores que pertenecen a las tarjetas normalmente no son metalizados Los cables utilizados deben ser filtrados con una blindaje de 100 para responder a la calificaci n CE El blindaje debe terminarse en tierra Configuraci n de contacto V ase Instrucciones de operaci n adjuntas Descarga Electroest tica ESD A PRECAUCI N El aparato incluye piezas electr nicas que son susceptibles a los da os provocados por la electricidad est tica Observar los adecuados procesos para remover instalar o manipular las tareas y medios de circuitos el ctricos internos Proceso de operaci n Desconectar la fuente el ctrica de la unidad La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar sacar o ajustar el circuito impreso el ctrico u otro medio interno El circuito impreso debe ser transportado en embalaje conductivo Las tarjetas no pueden sacarse de la cubierta protectora exclusiva
143. ponenter och tg rder kan p verka produktens prestanda och s tta din drifts kerhet p spel Felaktiga ers ttningar kan orsaka eld elektriska skador samt felaktig funktion o Se till att anordningens k por och skyddslock ligger p sin plats med syfte att f rebygga elektriska kontakt och personliga skador det enda undantag g ller n r underh llsarbete utf rs av kvalificerad personal A VARNING I fall av fl desm tare regulatorer f r v tskor Ifall ventiler f re och efter skall st ngas av m ste alla ledningar t mmas p all v tska Att ej t mma ledningar alt koppla bort trycket kan g ra s att v tskans v rmeutvidgning kan spr cka skada utrustningen och orsaka personliga skador European Pressure Eguipment Directive PED R dets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar Alla utrustning f r tryck med ett tryck ver 0 5 Bar g bar och st rre demensioner n 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar PED Den h r Instruktionsbokens Sektion Specifikation inneh ller anvisningar g llande PED Direktivet M tare som beskrivs i denna Instruktionsbok r i verensst mmelse med EN Direktivet 97 23 EC Brooks Instruments alla fl desm tare faller under fl desgrupp nr I M tare som r st rre n 25 mm eller 1 inch verensst mmer med PED kategorier I II eller III
144. proyecta fabrica y prueba sus productos de manera que stos respondan a numerosas normas nacionales e internacionales Dichas instalaciones deben ser emplazadas operadas y mantenidas adecuadamente para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando operando y mantenimiento los productos Brooks Instrument Para asegurar el adecuado rendimiento para instalar operar actualizar programar y mantener tiene que realizarse exclusivamente por una persona calificada Antes de la instalaci n operaci n y servicio del producto leer todas las respectivas instrucciones Si el presente manual no es la adecuada publicaci n busque al distribuidor local que figura en la contraportada y p ngase en contacto con l para obtener informaciones Guarde el presente manual para tener informaciones tambi n en el futuro ATENCI N No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento El incumplimiento de estas ltimas puede conducir a graves da os personales o a la aver a del equipo Si las instrucciones del manual no son evidentes p ngase en contacto con el representante de Brooks Instrument para aclarar el problema Observar todas las alertas advertencias e instrucciones indicadas en el equipo o suministradas con el mismo Instale su equipo en conformidad con las recomendaci
145. pst 1 kidrumu grupa Uz 25 mm jeb 1 collu maziem un maz kiem m r t jiem attiecas labas in enierijas prakse SEP o 25 mm jeb 1 collu mazi vai maz ki m ritaji atbilst PED kategorijai I II vai III Eiropas elektromagn tisk s savietojamibas direktiva EMS Brooks Instrument elektrisk s elektronisk s iek rtas ar CE zimi ir iztur ju as p rbaudi un atzitas par atbilsto am Eiropas elektromagn tiskas savietojamibas direktivas EMS prasib m EMS 2004 108 EC Tomer izveloties sign lkabeli kas tiks lietots kopa ar CE mark juma iek rtu ir j iev ro Ipa a uzmanibaSignalkabela kabela blivsl gu un savienotaju kvalit te Brooks Instrument pieg d augstas kvalit tes kabelus kas atbilst CE sertifik cijas tehniskajiem parametriem Ja j s lietojat pats savu sign lkabeli tam ir j b t pilniba 100 ekraniz tam D un apal tipa savienotajiem ir jab t aprikotiem ar metala ekranizejumu Ja nepiecieSams ir jaizmanto metala blivsl gi ar kabela ekranizejuma skavojumu Kabela ekraniz jumam ir j b t savienotam ar metala apvalku un ab s pus s aizsarg tam 360 gr du diapazona Ekraniz jumam ir j beidzas pie iezem juma Card Edge savienot ji standarta izpildijuma ir nemet la Kabeliem ir j b t p rkl tiem ar 100 ekraniz jumu lai tie atbilstu CE sertifikacijas prasibam Ekraniz jumam ir j beidzas pie iezem juma Attieciba uz tapu konfigur ciju skat pievienoto instrukciju rokas
146. r N20 CHF3 SiH2Cl2 C5F8 He Flow Accuracy 1 0 S P 10 100 F S 1 S P plus 0 04 F S 2 10 F S Repeatability 8 Reproducibility lt 0 15 S P Linearity Included in accuracy Settling Time to within 2 FS lt 300ms lt 860 sccm N2 Equivalent lt 400ms 861 5000 sccm N2 Equivalent Pressure Insensitivity lt 1 S P up to 5 psi sec upstream press spike Control Range 1 100 Valve Shut Down lt 0 5 of F S N2 Zero Stability lt 0 5 F S per year Temperature Coefficient Span 0 05 setpoint per C Zero 0 005 F S per C Rate of Decay Performance ROD by default is disabled off It should not be enabled until after MFC is installed and properly commissioned Flow Rate Maximum flow rate for which an ROD measurement can be obtained is 800 sccm Temperature Sensitivity 0 04 S P Deg C Pressure Sensitivity 0 04 F S psi Minimum Detectable Change from Commissioning Baseline Zero Drift 0 02 F S Valve Leak 0 1 F S Repeatability 0 3 S P SiCl4 0 5 from 5 100 S P up to 100 sccm flow Ratings Operating Temperature Range 10 50 C Differential Pressure Range 3 860 sccm 7 45 psid 861 5000 sccm 10 45 psid Typical pressure drop Actual pressure drop will be gas and flow dependent
147. r 2015 100 120 cycles 2 12 Position and Mount the GF100 Series Position the GF100 Series so that the gas flow is pointed in the direction of the flow arrow on the GF100 Series rear S N label The various mounting HED Horizontal Either Down ou o Sn VIU VID HBD HLUH HLD Vertical Inlet Up Vertical Horizontal Horizontal Horizontal Horizontal Inlet Down Base Down Label Up Label Down Upside Down Front silk screened Front silk screened graphics are facing UP graphics are facing DOWN Rear polyester S N label Rear polyester S N label is facing DOWN is facing UP Figure 2 3 GF100 Series Mounting Attitude Positions positions are described in Figure 2 3 The standard orientation for the GF100 Series is Horizontal Base Down HBD The GF125 8 GF135 employ a proprietary algorithm that utilizes the internal pressure sensor to compensate for potential orientation effects when the MFC is used with certain higher density gases Non HBD mounting orientations can be selected by using the MultiFlo software In the case ofthe GF100 120 Series which does not have an internal pressure sensor it is recommended that the MFC is re zeroed with process gas following the recommended Brooks procedure see zeroing bulletin FSB 001 0015 for futher information If you
148. r mci norm ln ch technick ch specifikac Mus te dodr ovat n sleduj c pokyny a integrovat jejich obsah do sv ho bezpe nostn ho programu p i instalov n pou v n a udr ov n produkt spole nosti Brooks Pro zaji t n spr vn funkce zafizeni mohou jeho instalaci obsluhu programov ni dr bu a aktualizace firmwaru prov d t v hradn kvalifikovan osoby Pfed instalac provozem a dr bou produktu si prostudujte v echny pokyny Pokud tato pfiru ka neni tou spr vnou pfiru kou pro dan zafizeni informujte se na zadn stran ob lky o kontaktu na mistni prodejn kancel f Uchovejte si tuto pfiru ku pro pozd j i potfebu UPOZORN N Neprovozujte za zen v rozsahu mimo dan rozsah v provozn p ru ce Poru en tohoto upozorn n m e mit za n sledek v n jmy na zdrav a v st k po kozen za zen O Pokud n kterym pokyn m nerozumite kontaktujte sv ho prodejniho z stupce spole nosti Brooks a vy dejte si objasn ni Dodr ujte v echny v strahy upozorn n a pokyny uveden a vyzna en na produktu nebo s n m dodan e Namontujte zafizeni specifikovanym zp sobem podle spr vn mont ni pfiru kv a podle platnvch mistnich a n rodnich pfedpis Pfipojte v echny produkty ke spr vn m zdroj m elektrick energie a stla en ch m di Postup 1 Pomalu do syst mu p iv d jte m dium Pro zabr n n vzniku r z v syst mu otvirejte proces
149. r nyelv EMC A Brooks Instrument CE jel l st ki rdemelt elektromos elektronikus berendez sei sikeresen teljes tett k az elektrom gneses kompatibilit si k vetelm nyeket 2004 108 EC sz EMC ir nyelv vizsg l teszteket Ugyanakkor k l n s figyelmet kell ford tani a CE jel l s berendez sekhez felhaszn lt jelk belek kiv laszt s ra A jelk belek k bel sszek t k csatlakoz k min s ge A Brooks Insturment magas min s g k beleket k n l melyek megfelelnek a CE min s t s k vetelm nyeinek Amennyiben saj t jelk belt alkalmaznak olyat kell v lasztani amely 100 os rny kol ssal teljes m rt kben sz rt A D vagy k r alak csatlakoz knak f m rny kol val rny koltnak kell lennie Sz ks g eset n f m k bel sszek t ket kell alkalmazni a k belsz r r gz t s re A k belsz r t a f m h zhoz vagy h velyhez kell csatlakoztatni s mindk t fel n 3607 ban le kell rny kolni Az rny kol snak f ldel sben kell v gz dnie A k rty khoz tartoz csatlakoz k szabv nyosan nem f mesek Az alkalmazott k beleknek 100 s rny kol ssal sz rteknek kell lenni k hogy megfeleljenek a CE min s t snek Az rny kol snak f ldel sben kell v gz dnie rintkez konfigur ci L sd a mell kelt kezel si utas t st Elektrosztatikus kis l s ESD A VIGY ZAT A k sz l k olyan alkatr szeket tartalmaz melyek hajlamosak a sztatikus elektromoss g okozta k rosod s
150. r GF100 Series is configured with downported fittings follow Steps 1 though 4 below If your GF100 Series has VCR fittings proceed to Step 5 1 Refer to Figure 2 4 If downported fittings 1 are used the GF100 Series is mounted to K1 Series substrate blocks 2 with four screws 3 Metal C seals or W seals 4 as provided by integrator are inserted between the GF100 Series and substrate blocks before the screws are installed These metal seals must be replaced after each installation 2 Select the mounting screws noted in Table 2 1 below for downported devices M4 screws are used on 1 125 devices K1S M5 screws are used on 1 5 devices K1R2 and K1H 3 Refer to Figure 2 4 Insert the two mounting seals 4 over the gas flow path of the K1 block Carefully align the GF100 Series mounting holes Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Section 2 Installation GF100 Series Figure 2 4 GF 100 Series Mounted to K1 Series Substrate Blocks onto the K1 substrate blocks Using your fingers install the screws through the GF100 Series fitting and hand tighten 4 Using a torque wrench and a metric hex key tighten the screws to the Table 2 1 K1 Series Fasteners Connection Fastener Size GF 100 Series KTRZ to Subtstrate M4 x 34mm M5 x 30mm M5 x 37mm or M4 x 35mm torgue value as described in Table 2 2 and Torgue Pattern Figure 2 5 5 If your GF 100 Series i
151. ra Be kell tartani a megfelel elj r sokat a bels ramk ri k rty k s eszk z k elt vol t sa behelyez se vagy egy b kezel se sor n Kezel si elj r s 1 A berendez st ramtalan tani kell A szem lyt f ldelni kell csukl p nttal vagy egy b biztons gos s a c lra alkalmas eszk zzel miel tt ramk ri k rty t vagy egy b bels eszk zt telep tene venne ki vagy ll tana be 3 A nyomtatott ramk ri k rty kat vezet k pes csomagol sban kell sz ll tani A k rty k kiz r lag k zvetlen l a behelyez s el tt vehet k ki a v d burkolatb l A kiszerelt k rty t halad ktalanul el kell helyezni a mozgat sra rakt roz sra vagy a gy ri visszasz llit sra szolg l v d csomagol sba Megjegyz sek Nem egyedi jelens g hogy a k sz l kben elektrosztatikus kis l sre ESD rz keny alkatr szek tal lhat k A legt bb korszer elektronikus eszk zben f moxid technol gi s alkatr szek NMOS SMOS stb tal lhat k A tapasztalatok azt igazolj k hogy m g kis m rt k sztatikus elektromoss g is k ros thatja vagy t nkreteheti ezeket az eszk z ket A k rosodott alkatr szek m g ha l tsz lag megfelel en m k dnek is kezd d hib ra utalnak Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Italian Istruzioni fondamentali Leggerle subito La Brooks Instr
152. re folositi cabluri proprii trebuie alese acelea care sunt 100 ecranate si prev zute cu filtre Conectoarele D sau cele circulare trebuie sa dispun de ecrane metalice in caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu Filtrul de cablu trebuie conectat la carcasa metalic sau manson si in ambele cazuri trebuie asigurat ecranarea la 360 Ecranarea trebuie terminat cu o legare la p m nt Conform standardului conectoarele apartin nd pl cilor electronice nu sunt metalice Cablurile folosite trebuie s fie 100 ecranate si prev zute cu filtre pentru a corespunde clasific rii CE Ecranarea trebuie terminat cu o legare la p m nt Configuratie de contact Vezi instructiunile de operare atasate Desc rcare electrostatic ESD A ATENTIE Instalatia include piese care sunt predispuse la defectare sub influenta electricit tii statice Trebuie respectate metodele corespunz toare de extragere instalare sau alte manipul ri ale circuitelor electronice Procedur de manipulare 1 Instalatia trebuie scoas de sub tensiune naintea de inserarea scoaterea sau reglarea vreunei cartele electronice sau a altui dispozitiv intern persoana trebuie s se lege la p m nt cu banda pentru articula ia m inii sau alte dispozitive de siguran disponibile pentru acest scop 3 Cartelele cu cablaje electronice imprimate trebuie transportate n ambalaje anti electrostatice conductoare Cartele
153. rholdes er der risiko for at vesken p grund af varmeudvikling ekspanderer og dette kan forarsage skade pa udstyr og personer Det Europaiske direktiv for trykudstyr PED P alt udstyr hvis indgangstryk er storre end 0 5bar g og starre end 25 mm eller en tomme geelder det europaiske direktiv for trykapparater Manualens afsnit tekniske data indeholder anvisninger om PED direktivet I manualen angives m leinstrumenter der er tilpasset direktivet 97 23 EK EU Alle Brooks gennemstramningsmalere tilh rer vaeskegruppen nr 1 Alle malinstrumenter som er st rre end 25 mm eller en tomme beskrives i direktivet PED s kategorier I Il eller III Alle malinstrumenter som er pa 25 mm eller en tomme eller mindre beskrives i Sound Engineering Practice SEP Det europaiske direktiv for elektromagnetisk kompatibilitet EMC Alle Brooks instrumenter elektrisk elektronisk som har CE markering er godkendt og testet ifolge om elektromagnetiske kompatibilitets forskrifter EMC direktiv 2004 108 EC OBS Man skal v re opm rksom p hvilken type kabler der bruges til CE m rket udstyr Om kvalitet af signalkabler kabeltilslutninger og koblinger Brooks tilbyder kabler af h jest kvalitet som er tilpasset CEE kvalificeringens forskrifter Hvis man v lger at bruge egne kabler skal man v lge et kabel som har den n dvendige afsk rmning for at sikre 100 mod udefra kommende st j Tilslutningerne D eller rundformede tilslutninger sk
154. rical Connection RS485 Analog via 9 Pin D connector DeviceNet via 5 Pin M12 connector Digital Communication RS485 model specific DeviceNet model specific RS485 Diagnostic Port all models Diagnostic Service Port RS485 via 2 5mm jack Power Supply Consumption DeviceNet 545mA max 11 25 Vdc 250mA max 24Vdc RS485 Analog 6 Watts max 15Vdc 10 or 24 Vdc 10 Compliance EMC EC Directive 2004 108 EC CE EN61326 2006 FCC Part 15 8 Canada IC subset of CE testing Environmental Compliance RoHS Directive 2011 65 EU REACH Directive EC 1907 2006 NOTE See the following Safe Delivery System SDS and High Accuracy HA sections for optional detailed specifications 1 9 Installation and Operation Manual Section 1 Introduction X TMF GF100 Series MFC eng GF100 Series Table 1 4 Specifications for High Accuracy HA GF125 Series Performance GF125 HA Full Scale Flow Range 5 sccm 10 slpm N equivalent Gases Supported N2 02 Ar H2 SF6 NH3 CO2 CI2 HBr NF3 CF4 CH4 CH3F CH2F2 SiCI4 100 Torr SiH4 C4F6 g 800 Torr C4F8 1200 Torr MultiFlo Programmable Not Configurable Flow Accuracy 10 100 F S 1 0 S P 1 10 F S 2 1 S P plus 0 04 F S Repeatability 8 Reproducibility lt 0 15 S P Turn Down Ratio 100 1 Zero Stability
155. ricos fogo ou em funcionamento inadequado e Dever manter o equipamento intacto e fechado verificando se as coberturas de protec o est o nos seus lugares devidos de forma a evitar choques el ctricos e ou danos pessoais excepto no caso de se tratar de um t cnico qualificado e se estiver a executar trabalhos de manutenc o A ATEN O Se por qualquer raz o for necess rio fechar as v lvulas a montante e jusante do equipamento tenha em aten o que o mesmo dever ser previamente esvaziado do flu do que o atravessa Esta obrigac o surge do facto de existir a possibilidade de ocorrer dilatac o t rmica do l quido no interior do aparelho podendo provocar danos pessoais ou materiais graves Directiva Europeia para equipamentos sob press o PED Todos os equipamentos sujeitos a press o interior superior a 0 5 bar g e com calibre superior a 25 mm 1 polegada est o sob a vig ncia da directiva europeia de equipamentos sob press o PED O cap tulo Dados t cnicos do manual cont m instruc es relativas a Directiva PED O caudal metro objecto deste manual satisfaz a directiva 97 23 CE da UE Os caudalimetros Brooks pertencem ao grupo 1 de fluidos Os caudal metros com calibre superior a 25 mm 1 polegada pertencem s categorias PED II ou III Os caudal metros de 25 mm 1 polegada ou menores seguem as Boas regras de engenharia SEP Directiva Europeia sobre Compatibilidade electromagn tica EMC
156. ries See Table 1 4 for specifications for the high accuracy HA GF100 Series See Table 1 5 for specifications for the Safe Delivery System SDS GF100 Series See Table 1 6 for specifications for the GF135 Series See Table 1 7 for specifications for the GF121 Series See Figure 1 3 for dimensions for the GF100 Series See Figures 1 4 amp 1 5 for dimensions for the GF135 Series See Figures 1 6 amp 1 7 for dimensions for the GF121 Series Installation and Operation Manual Section 1 Introduction X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Table 1 3 Specifications for Standard GF100 GF120 GF125 Series Performance GF100 GF120 GF125 Full Scale Flow Range N Eq 3 sccm to 55 slm Flow Accuracy 1 S P gt 35 100 0 35 F S 2 35 Repeatability 8 Reproducibility lt 0 15 S P Linearity 0 5 F S included in accuracy Response Time Settling Time 300ms 3 860 sccm N2 Eg Normally Closed Valve lt 1 sec 700ms 400ms 861 7200 sccm N2 Eq 500ms 7201 30000 sccm N2 Eq lt 700ms 30001 55000 sccm N2 Eq Normally Open Valve lt 1 5 sec Pressure Insensitivity Not Applicable lt 5 SP up to 5 psi sec upstream press spike Control Range 2 100 Normally Closed Valve 3 100 Normally Open Valve MultiFlo optional standard of Bins 11 bins Valve Shut Down N C Valve lt 1 of ES
157. ringerne viser at selv den mindste statiske elektricitet kan skade eller del gge disse instrumenter Selv en fungerende elektrisk del kan have levetiden markant reduceret p grund af statisk elektricitet A 3 Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 BEE Essenti le instructies Lees ze voordat u verder gaat Brooks Instrument ontwerpt produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen Deze producten moeten correct worden ge nstalleerd bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken De volgende instructies moeten worden toegevoegd aan en ge ntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert bedient en onderhoudt Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren bedienen updaten programmeren en onderhouden Lees alle instructies voordat u het product gaat installeren bedienen en onderhouden Als dit niet de juiste handleiding is kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger Bewaar deze handleiding voor later WAARSCHUWING gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding Het niet naleven van deze waarschuwing kan ernstig letsel en of schade aan de apparatuur tot gevolg he
158. rrp rrel va TEPPATITEI oe yeiwon Ed POUG Tia Tn didra n TWV akidwv Zuu ouAeu eite TO OUVNUNEVO EYXEIPI IO O NYIWV HAEKTPOOTOTIKH EKKEVWON ESD A MPOOYAA H H ouokeun OUTI Trepi xel NAEKTPOVIKG E APTIJHATA ra orro a HTTOPOUV VA UTTOOTOUV EUKOAA BAGBEG ATTO rov OTATIKO NAEKTPIOHO Mp rrei va AKONOUBOUVTAI 01 OPBEG Siadikagies XEIPIOHOU KATA TNV apaipeon TOTTOB TNON AMO XEIPIGL TUV EOWTEPIKUV TTAQKETWV KAI IAT EWV Aiadikaoia XEIPIOHOU OEOTE TN OUOKEU EKT G T OEWC Gpovr ore yia TN YE WON TOU TPOGUTTIKO pe TTEPIK PTTIO M O AOPAAEG KAI KATAAANAO H OO TTPIV TOTTOBET OETE APAIPEOETE pUBLIOETE K PTEG TUTTWH VWV KUKAWH TWY f GAAN EOWTEPIK IATAEN 3 Ol K PTEG TUTTWHEVWV KUKAWHOTWV TTP TTEI VA HETAPEPOVTAI OE DUOKEVAC A OTTO AYWYINO UAIK OI K PTEG Dev TIPETTEI va apaipeBo v ATT TO TTPOOTATEUTIK TTEPIBANHA TTAP HOVO ANEOWG TTPIV ATT Tnv TOTTOBETNON Oi K PTEG TOU APAIPEONKAV TTPETTEI va TOTTOBETNBOUV AUEOWG OE TIPOOTATEUTIKI cuokeuao a yia HETAPOP arroOrjkeuon ETIOTPOP OTO EPYOOTAOIO Maparnp josig H urrap n egapTnudTwv euaicenTwv ora paiv jeva ESD NAEKTPOOTATIKIJG EKKEVWONG Dev EIVAI HOVA IK XAPAKTNPIOTIK TNG OUOKEU G aurric Ol TTEPIOO TEPEG OUYXPOVEG NAEKTPOVIKEG OUGKEU C TTEPIEXOUV EEAPTAUATA rexvoAoy ag HETAAAIKWV O eldiwv NMOS SMOS kd H rreipa xel arrodci el TI HIG HIKP TTOO TNTA OTATIKOU N EKTPIOHOU APKEI yia va TTPOKAAEOE
159. s Engineering for review of requirement and creation of CSR nnnn b If DNET connector CSR required to define DNET attributes 0924 generic ODVA Std configuration c None Required XXXX 12 Auto Shut Off a Enabled A b Disabled X 13 Auto Zero a Enabled A b Disabled X 14 Reference Temperature Operating Temperature in Degrees C a 0 C Reference Calibration Standard 000 default o Here is an example of a configured Product Description Code PDC for a GF125 Configurable no Specialty Application Valve Normally Closed MultiFlo for 281 860 sccm 1 1 8 C Seal 92mm outlet to Vacuum default sensor DNET no CSR Auto Shut Off enabled Auto Zero disabled and Default Reference Temperature GF125CXXC SH44860C CXVODX 0924AX 000 Installation and Operation Manual Appendix A GF100 Series Gas Table X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series A 1 GF100 Series Gas Table Table A 1 GF100 Series Gas Table Reference the following pages A 1 and A 2 Table A 14 GF100 Series Gas Table Codes 1 108 Bins SH40 to SH50 Min inlet pressure for vac exhaust Gas PSIA SH47 SH48 Code Gas Symbol Gas Name SH40 SH47 SH48 SH49 i Low High Low High 4 197 247 297 129 400 400 28 Ne Neon 24 7 43 129 130 1207 1208 3650 3651 10700 10701 22101 Ar Argon 24 7 29 7 39 7 4 43 130 131 400 401 1214 1215 3671 3672 10000 10001 2020 Kr Krypton 29 7 101 2800 2801 7160 7161 1
160. s configured with 14 VCR fittings secure the GF100 Series block to the gas panel with two 8 32 UNC 2B screws Table 2 2 K1 Substrate Torgue Data Torgue Pattern Torgue Inch Pounds GF125 to Use a sguare pattern as K1R2 Subtstrate shown in Figure 2 5 45 45 45 Start at 25 inch pounds and increase in increments of 10 inch pounds until proper value is obtained 2 7 2 8 Section 2 Installation Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Figure 2 5 Mounting Screws Torque Pattern Then connect the inlet outlet fittings to the gas supply line using two wrenches Tighten the fittings to manufacturer recommendations 2 13 Perform a Leak Test AWARNING Before operating the flow controller ensure all gas connections have been properly tightened and where applicable all electrical connections have been properly terminated It is critical to leak test the gas supply lines and GF100 Series connections before turning on the process gas supply after any new installation Check for leaks using a helium leak detector or any other appropriate leak test method Follow leak test specifications as defined by integrator 2 14 Zeroing Setup Process The following steps are required before the GF100 Series is zeroed mk Make sure that the GF100 Series has been installed inside the equipment panel for at least four hours and powered up at least one ho
161. s in excess of those recommended refer to 2 3 Recommended Storage Practice on p 2 1 it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes To maintain a devices ultraclean integrity this service should be performed by the factory or one ofthe certified service centers 2 7 Gas Connections EE UUIA PSSIYRU LV Prior to installation ensure that all piping is clean and free from obstructions Install piping in such a manner that permits easy access to the device if removal becomes necessary 2 8 In Line Filter EEE FEEDS SE PBS ESSES It is recommended that an in line filter be installed upstream from the device to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Installation and Operation Manual Section 2 Installation X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series 2 9 Mechanical Installation ee SEE FR A CAUTION When installing the Mass Flow Controller or Meter care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until the time of installation The recommended installation procedure guidelines are as follows e The device should be located in a clean dry atmosphere relatively free from shock and vibration Leave sufficient room for access t
162. spedite in contenitori conduttivi Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell installazione Le schede confezionate devono essere collocate immediatamente nell imballaggio protettivo per la movimentazione l immagazzinamento o resa alla fabbrica Note E un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica ESD Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo ossido NMOS SMOS ecc Le esperienze dimostrano che l elettrostaticit anche in piccola misura pu danneggiare o rovinare gli strumenti componenti danneggiati anche se all apparenza funzionano correttamente potrebbero manifestare il difetto rapidamente Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Mm a S S SS Svar ga instrukcija Pirms turpin t izlasiet Brooks Instrument projekt ra o un p rbauda savus ra ojumus atbilsto i daudziem nacion lajiem un starptautiskajiem standartiem Lai nodro in tu o izstr d jumu turpm ku darb bu atbilsto i noteiktajiem parametriem tie ir pareizi j uzst da j lieto un j apkopj Uzst dot lietojot Brooks Instrument izstr d jumus un veicot to apkopi ir j iev ro ie nor d jumi un j iek auj tie j su dro bas programm Lai nodro in tu pien
163. svuotare completamente apparecchiatura L inosservanza pu causare la dilatazione termica del liquido che pu danneggiare l apparecchiatura e provocare lesioni alle persone Direttiva europea relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e pi grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europea relativa alle apparecchiature a pressione PED II capitolo Dati tecnici del manuale contiene le disposizioni relative alla direttiva PED Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97 23 CE Ogni flussimetro Brooks appartiene al gruppo di fluidi 1 Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I Il o III della PED e GIi strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP Sound Engineering Practice Direttiva europea relativa alla compatibilita elettromagnetica EMC Le apparecchiature elettriche elettroniche Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilita elettromagnetica Direttiva EMC 2004 108 EC In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE Aualita dei cavi di segnale dei pressacavi e dei connettori La Brooks Instrument offre cavi d alta gua
164. system pressure may cause mechanical damage to elastomer materials Damage can occur when there is a rapid expansion of fluid that has permeated elastomer materials The user must take the necessary precautions to avoid such conditions WARNING Before operating the flow controller ensure all gas connections have been properly tightened and where applicable all electrical connections have been properly terminated 3 2 Theory of Operation for Flow Measurement The thermal mass flow measurement system consists of two components the restrictor or bypass and the flow sensor Figure 3 1 is diagram of the flow stream through the device with an enlarged view of the flow sensor Gas flow entering the device is separated into two paths one straight through the restrictor and the other through the flow sensor This is represented in Figure 3 1 where the total flow A B enters the device and is separated into streams A and B The streams are joined again at the far side of the restrictor The separation of the flow streams is caused by the restrictor During flow conditions there will be a pressure differential across the restrictor that forces gas to flow in the sensor The pressure difference caused by the restrictor varies linearly with total flow rate The sensor has the same linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the device
165. t conducteur Les cartes ne doivent enlev es de cette enveloppe protectrice qu au dernier moment juste avant installation Les cartes retir es doivent tre imm diatement plac es dans un r cipient de protection pour le transport le stockage ou le retour usine Observations Brooks Instrument n est pas le seul proposer des produits comportant des composants sensibles aux d charges lectrostatiques La plupart des produits lectroniques modernes contiennent des composants qui utilisent des technologies oxydes m talliques NMOS SMOS etc L exp rience d montre que d infimes quantit s d lectricit statique suffisent endommager ou d truire ces appareils Les composants endommag s m me s ils semblent fonctionner correctement tombent rapidement en panne Appendix C Essential Instructions Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 German Wichtige Anweisungen Bitte zuerst lesen Brooks Instrument entwickelt produziert und testet seine Produkte derart dass sie viele nationale und internationale Standards erf llen Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt Die folgenden Anweisungen m ssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden wenn Sie Brooks Produkte installieren bedienen und warten Um die entspr
166. t tyto za zen U po kozen ch sou stek jakkoli zd nliv pracuj c ch bezchybn doch z brzy k poru e Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Dansk Grundl ggende vejledninger L s disse f r anvendelse Brooks Instruments designer fremstiller og afpr ver sine produkter s ledes at de tilpasser sig b de de indenrigs og internationale standarder Disse udstyr b r installeres bruges og repareres omhyggeligt s at de kan virke tilsvarende deres normale anvendelsesperiode De f lgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation e For at garantere den passende kapacitet er udstyrets installation anvendelse opdatering programmering kun tilladt for kvalificeret personale Alle vejledninger skal l ses f r produktets installation anvendelse og reparation e Hvis denne manual ikke er den passende udgave kontakt venligst jeres leverand r for yderligere information e Det anbefales at gemme denne manual for senere brug OBS Udstyret m ikke anvendes til andet end det er angivet i brugsanvisningen Hvis denne regel brydes kan der forekomme alvorlige personskader eller brist p udstyret Hvis vejledningerne ikke er forst elig kontakt venligst Deres Brooks repr sentant for at afklare problemet som er opst et Overhold alle regler som er
167. tallation Section 3 Operation Section 4 Maintenance and Troubleshooting Section 5 Product Description Code Appendix A GF100 Series Gas Table Appendix B GF100 Series Patents Appendix C Essential Instructions Warranty Local Sales Service Contact Information It is recommended that this manual be read in its entirety before attempting to operate or repair these devices Section 1 Introduction Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 1 3 Product Support References Refer to www BrooksInstrument com for Brooks sales and service locations and to obtain other documents that support the GF100 Series Those documents include Brooks MultiFlo Configurator Quick Start Manual X SW MultiFlo Config QS eng part Number 541B 167 AAG Brooks GF 100 Series data sheets DS TMF GF100 Series MFC eng DS TMF GF135 Series MFC eng DS TMF GF121 Series MFC eng 1 4 Notice and Caution Statements Warning caution and notice statements are located throughout this manual in the ANSI format A WARNING statement indicates a potentially hazardous situation which if not avoided COULD result in death or serious injury A CAUTION statement indicates a potentially hazardous situation which if not avoided MAY result in minor or moderate injury It may also be used to alert against unsafe practices A NOTICE statement describes specific information that reguires special attention
168. tavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose Visus gaminius junkite prie tinkam elektros ir sl gio altini e Eksploatacija 1 l tai junkite sraut sistem L tai atidarykite proceso vo tuvus kad i vengtum te srauto antpl d i 2 Patikrinkite ar n ra nuot kiu aplink srauto matuoklio leidimo ir i leidimo jungtis Jei nuot ki n ra sukurkite sistemoje darbin sl g Prie atlikdami prie i ros darbus b tinai pa alinkite sl g proceso linijoje Jei reikia pakeisti dalis u tikrinkite kad kvalifikuoti darbuotojai naudot Brooks Instrument nurodytas pakaitines dalis Netinkamos dalys ir proced ros gali pakenkti gaminio veikimui ir kelti pavoj saugiai j s proceso eksploatacijai Tik pana iai atrodantys pakaitalai gali s lygoti gaisr elektros pavojus ar netinkam veikim e U tikrinkite kad visos rangos durel s b t u darytos o apsauginiai dang iai u d ti kad i vengtum te elektros sm gio ir su eidim i skyrus kai kvalifikuoti darbuotojai atlieka prie i ros darbus A SP JIMAS naudojant skysto srauto renginius jei d l kokios nors prie asties prireikia u daryti alia renginio esan ius leidimo ir i leidimo vo tuvus i renginio reikia i leisti vis skyst To nepadarius galimas iluminis skys io pl timasis galintis sugadinti rengin ir su eisti mon s Europos sl gin s rangos direktyva PED Visa sl gi
169. the GF100 Series really zero 9 Zero Drift nu Improper zero of the GF100 Series GF100 Series aging or sensor stabilization Excessive Valve leakage Zero is not correct Installation and Operation Manual Section 4 Maintenance 8 Troubleshooting X TMF GF100 Series MFC eng Part Number 541B137AAG i November 2015 GF100 Series Table 4 2 GF100 Series Troubleshooting Guide Continued Symptoms amp Possible Causes 10 Calibration Drift EI G6565g86 gff8fg Gas box temperature too high Zero is not correct Is it linear offset 11 GF100 Series indicates Overshoot AA If the tool is idle for an extended period of time high inlet pressure or contamination will cause overshoot on first use 12 OEM tool indicates the wrong full scale A value for GF100 Series Older version of Multiflo Configurator used to program GF100 Series 13 GF100 Series dumps large volume of gas into chamber when setpoint is commanded from the tool The tool is commanding a setpoint before the pneumatic valves are opened GF100 Series and pneumatic timing may be offset GF100 Series overshoots GF100 Series flow output Cable resistance causing offset in the too s Check GF100 Series zero display 4 7 4 8 Section 4 Maintenance 8 Troubleshooting GF100 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 Installation and Operation Ma
170. ti no izpra njenje ESD A OPOZORILO Naprava vsebuje take sestavne dele ki so naklonjeni k po kodbi od stati ne elektrike Treba se je dr ati ustreznih postopkov pri odstranjevanju vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov Posotpek rokovanja 1 napravo je treba izklopiti iz elektri nega toka Osebo je treba ozemljiti zapestnim pa ekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala jemala ali nastavila kartico za tokovni krog ali drugo notranjo opremo 3 Tiskane kartice tokovnega kroga je treba izporo iti v konduktivni embala i Karte so odstranjive izklju no neposredno pred vlogom iz za itne embala e ven Izjemljeno kartico nemudoma staviti v za itno embala o za gibanje skladi enje ali po iljanje nazaj Opombe Nije poseben pojav da se v napravi nahajajo ob utljivi sestavni deli na elektrostati no pra njenje ESD V ve em delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo NMOS SMOS itd Izkustva potrjujejo da majhna stati na elektrika more po kodovati ali uni iti ta sredstva O kodovani rezervni deli e na videz dobro delajo naka ejo za etno napako Installation and Operation Manual Appendeix C Essential Instructions X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 GF100 Series Spanish Instrucciones b sicas z iL alos primero EI Brooks Instrument
171. to ltimo puede provocar la dilataci n t rmica del l quido lo que puede da ar al equipo y conducir a da os personales Directriz Europea de los Equipos de Presi n PED Todos los equipos de presi n con una presi n interna que supere a 0 5 bar g con tama o mayor a 25 mm o 1 pulgada entran el mbito de la Directriz Europea de los Equipos de Presi n PED El cap tulo Datos T cnicos del manual incluye las instrucciones respecto a las directivas de PED Los instrumentos de medici n indicados en el Manual responden a las EN directivas 97 23 EC Todos los fluj metros Brooks pertenecen a la categor a 1 del grupo de fluidos Los instrumentos de medici n m s grandes que 25 mm o 1 pulgada est n en conformidad con las categor as I II o III de PED Los instrumentos de medici n m s peque os que 25 mm o 1 pulgada siguen la Pr ctica Aceptada de Ingenier a SEP Directriz Europea respecto a la Compatibilidad Electromagn tica EMC Las instalaciones de Brooks Instrument el ctricas electr nicas merecedores de la categor a CE cumplieron con xito las pruebas que verifican las exigencias de la compatibilidad electromagn tica directiva de EMC 2004 108 EC Al mismo tiempo se ha de prestar una especial atenci n en la selecci n de los cables de se al utilizados con los equipos marcados con CE Calidad de los cables de se al piezas de uni n de cable y conectores El Brooks Instrument ofrece cables de alta calidad que res
172. to 15 pin D Brooks Unit B N EX Cable adapter to card edge w out VTP RS485 through RJ11 jacks Unit E IN L R display and overlay 180 orientation FX Cable adapter with 9 pin STEC pin out 8 jack screws w VTP Unit F O G1 9 Pin D with RS485 Unit G JX Cable adapter with 9 pin STEC pin out 8 jack screws w VTP Unit W KX Cable adapter to MKS 15 Pin D Unit K SX 9 pin D with STEC pin out w VTP Unit S Q UX Cable adapter to 15 pin D w VTP Unit 8 TN U DeviceNet Standard Configuration Parameters Poll 10 Poll IO PollIO External Power On Full Scale Full Scale Full Scale Instance Instance State Baud O Connector State Setting Setting Setting Producer Consumer Transition Rate DO DeviceNet 5 Pin Micro Idle Count nteger 6000h 2 7 Executing 500KB D1 DeviceNet 5 Pin Micro Idle Count nteger 6000h 21 7 Executing 500KB D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB D3 DeviceNet 5 Pin Micro Idle Count nteger 6000h 22 7 Executing 500KB D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB D5 DeviceNet 5 Pin Micro Idle Count nteger 6000h 6 8 Executing 500KB D6 DeviceNet 5 Pin Micro Idle Count nteger 7FFFh 3 U Executing 500KB D7 DeviceNet 5 Pin Micro Idle Count nteger 7FFFh 6 8 Executing 500KB D8 DeviceNet 5 Pin Micro Idle Count nteger 6000h 3 7 Executing 500KB D9 DeviceNet 5 Pin Micro Executing Count Integer 60
173. tpoints regulator to achieve proper pressure NOTE If the differential pressure reading is too high voltage to the GF100 Series will be at its maximum value when the setpoint is decreased below the point where flow decreases Is the GF100 Series leaking Check for contamination Test the GF100 Series for leak integrity Replace the Unit GF100 Series if leakage is detected reading oscillates Is the GF100 Series calibrated for the Check the GF100 Series side can label Run gas flowing a flow check to verify If flow is incorrect replace the GF100 Series Is there too much gas pressure Verify that the pressure is correct for across the GF100 Series this gas and range If reguired adjust regulator to achieve proper pressure reading 4 5 4 6 Section 4 Maintenance 8 Troubleshooting Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Table 4 2 GF100 Series Troubleshooting Guide Continued Symptoms 8 Possible Causes Corrective Action 6 Gas flow or GF100 Series pressure reading oscillates Are inlet and outlet pressures stable If outlet pressure is unstable check for no oscillation or hunting a faulty vacuum pump or hunting at a downstream valve NOTE Most GF100 Series calibrated with nitrogen will oscillate Check inlet pressure on tool A faulty with hydrogen or helium pressure regulator can make the GF100 Series appear to oscillate
174. tup Process added 2 8 2 15 Zeroing the GF100 Series es Aa HU aL risale 2 9 2 15 1 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel 2 9 2 15 2 Zeroing GF100 Series Flow from LCD Display Panel conan name aaa 2 10 2 16 Performance Checks AAA 2 11 2 17 Introduction to the MultiFlo Configurator L i 2 11 2 18 Using the MultiFlo Configurator ss 2 11 2 19 Electrical Connections viii ea 2 14 2 19 1 DeviceNet Connections sise 2 14 2 19 2 Analog RS485 Connections ai 2 15 2 20 GF135 Inlet Valve Installation ss 2 17 2 21 GFISS COMMISSIONING 2286 na ea A r nn 2 18 Section 3 Operation 8 1 A a tale ieks d a ro a i 3 1 3 2 Theory of Operation for Flow Measurement cnn naar nana 3 1 Section 4 Maintenance 8 Troubleshooting 4 1 Qd CE 4 1 4 2 MAINTENANCE co 4 1 4 3 Troubleshooting aaa aaa 4 3 4 4 Troubleshooting Ghecklist is 0 ie ii ad aaa i a he EM ee alla 4 3 4 5 GF100 Series Troubleshooting Guide annae 4 4 Section 5 Product Description Code 5 1 OVEMIEW ca oua e a a RO P A O Satan a RS 5 1 Appendix A GF100 Series Gas Table A 1 OVEIMIEW sads bd ds a aj a o SEEREN a e a tate A 1 Contents Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG GF100 Series November 2015 Appendix B GF100 Series Patents B 1 OSTMA A ii B 1 Appendix C Essential Instructions C 1 GIT
175. ument progetta fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali Tali apparecchiature devono essere installate messe in esercizio e tenute in manutenzione in maniera adeguata affinche operino in conformita alle loro normali specifiche di funzionamento Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante installazione il funzionamento e la manutenzione dei prodotti Brooks Instrument e Per garantire un adeguato rendimento l installazione il funzionamento l aggiornamento la programmazione e la manutenzione del prodotto devono essere eseguiti esclusivamente da personale specializzato Leggere tutte le istruzioni prima del installazione utilizzo e manutenzione del prodotto Se questo manuale non quello relativo al Vostro prodotto cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni Conservare il presente manuale per future consultazioni A ATTENZIONE Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d Uso L inosservanza pu causare gravi lesioni alle persone e o danni all apparecchiatura e Qualora le istruzioni del manuale non siano chiare contattare un rappresentante della Brooks Instrument per chiarire il problema e Rispettare tutti gli avvisi le istruzioni e gli avvertimenti riportati sul apparecchiatura o forniti insieme ad essa
176. uous improvement of our products all specifications are subject to change without notice TRADEMARKS BrOOKS civic Brooks Instrument LLC DeviceNet Open DeviceNet Vendors Association Inc Hastelloy trt Haynes International MultiFlO ssa ra Brooks Instrument LLC ODVA nn Open DeviceNet Vendors Association Inc VER iia Cajon Co Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 ITW Japan Ltd P O Box 903 6718 WX Ede Netherlands 1 4 4 Kitasuna Koto Ku Hatfield PA 19440 0903 USA T 31 0 318 549 300 Tokyo 136 0073 Japan T 215 362 3700 F 31 0 318 549 309 T 81 3 5633 7100 F 215 362 3745 E Mail BrooksEu BrooksInstrument com F 81 3 5633 7101 E Mail BrooksAm Brooksinstrument com E Mail Sales Japan BrooksInstrument com www BrooksInstrument com BROOKS Copyright 2015 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
177. ur prior to zeroing This insures that the GF100 Series is in its use attitude and is operating at normal temperature If the GF100 Series is subjected to a vacuum purge for more than one minute turn off the GF100 Series ie provide a zero setpoint for a time period of twice the vacuum purge time 2 Refer to Figure 2 1 Open the upstream shut off valve 5 and close the downstream shut off valve 7 This eliminates a pressure drop across the GF100 Series and subseguent leakage from the PID control valve inside the GF100 Series 8 Provide a 100 setpoint to the GF100 Series for no longer than 60 seconds This egualizes the pressure across the PID control valve 4 Refer to Figure 2 1 Close the upstream shut off valve 5 to prevent any pressure effects from the regulator 3 5 Close the GF100 Series and wait two minutes 6 Read the output signal of the GF100 Series This output signal is the initial flow in percent of full scale The output signal should be 0 0 Installation and Operation Manual X TMF GF100 Series MFC eng Part Number 541B137AAG November 2015 2 15 Zeroing the GF100 Series Section 2 Installation GF100 Series 0 1 If the output signal is too high re zero the GF100 Series as described in Section 2 15 Many high density gases exhibit slight changes in zero output as a function of inlet pressure Gases such as tungsten hexafluoride and many fluorocarbons are especially sensitive to this problem Si
178. yt ss ja huollossa on noudatettava soveltuvia m r yksi ja ohjeita lis ksi mainitut ohjeet on huomioitava ty suojelun ohjeistuksessa Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkil saa asentaa k ynnist p ivitt ohjelmoida ja huoltaa laitteita Lue kaikki k ytt ohjeet koskien tuotteen asennusta k ytt ja huoltoa Jos k ytt ohje on puutteellinen lis tietoja saa paikalliselta j lleenmyyj lt Yhteystiedot l ytyv t oppaan kansilehdest S ilyt ohjeet A VAROITUS K ytt ohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja arvoja ei saa ylitt Rajoitusten laiminly nti voi aiheuttaa tuotteen rikkoutumisen ja tai vakavan henkil vahingon vaaran e Jos ohjeissa on ep selvyytt ota yhteytt Brooks Instrumentin edustajaan ongelman selvitt miseksi e Noudata kaikkia laitteessa olevia tai siihen liittyvi ohjeita m r yksia ja varoituksia e Laittteen asennuksessa on noudatettava erityisi asennusohjeita sek voimassa olevia paikallisia ja kansainv lisi m r yksi Laitteet saa yhdist vain soveltuvaan s hk ja paineverkkoon e Asennusohjeita 1 P st virtaus hitaasti j rjestelm n Avaa venttiilit hitaasti jotta virtaus pysyy tasaisena 2 Tarkista ettei virtausmittarin sis n ja ulosmenon vieress ole vuotoa Jos j rjestelm ss ei ole vuotoa aseta oikea k ytt paine e Tarkista ett laitteeseen menev paine on katkaistu ennen laitteen k

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