User`s Manual
Contents
1. Direction pegoeo vO ECO Direction Motion Direction The incremental sensor consists of a optical scale and an encoder head When the sensor shaft turns the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector Newport User Stage Encoder Phase A Pin is 4 gt LE Encoder Phase A Pin 423 i eS Y Encoder Phase B_ Pin 20 b Output Signals mai pe Encoder Phase B Pin 24 1 gt i T 5V45 Encoders i T ee Power Suppl Pin 22 ov ply Encoders are differential pair type RS422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 respectively D Newport Experience Solutions 7 EDH0199En2020 01 12 MFA Series Miniature Linear Stages 5 7 EDH0199En2020 01 12 Pinouts The 25 pin Sub D connections for MFA PPD and MFA CC stages are given in the following table UE16PP UE1724SR MFA PPD MFA CC 1 Phase 1 1 N C 2 N C 2 N C 3 Phase 1 3 N C 4 N C 4 N C 5 Phase 2 5 Motor 6 N C 6 Motor 7 Phase 2 7 Motor ai 8 Motor 8 Motor fos 1 g N C 9 N C o 10 N2. Miniature Linear Stages cS RoHS re Compliant USER S MANUAL Newport Experience Solutions For Motion Think Newport MFA Series Miniature Linear Stages Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used r N NS EDH0199En2020 01 12 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load Carriag
3. 3 5 REMARK For MFA CCV6 vacuum compatible stages to 10 hPa max speed and load capacity have to be divided by two Stage Weights The weight indicated is the average value for stages with their cable installed Weight Ib kg MFA 1 3 0 6 The weight variation between drive units is not very significant 4 0 Drive 4 1 4 2 gt Newport Experience Solutions DC Motor Drive Version One DC motor driven configuration is available MFA CC DC Motor Performance Specifications Resolution Speed Mot otor um mm s MFA CC 0 0174 2 5 UE1724SR REMARK For MFA CCV6 vacuum compatible stages to 10 hPa max speed and load capacity have to be divided by two Stepper Drive Version Stepper motor driven stages are offered in one half step drive version MFA PP amp MFA PPD Micro Step Drive This is the drive for stepper or pulse driven motors transmitted by the electronic unit which entails a theoretical movement of the motor by one fraction of a full step For these translation stages the micro step is equiva lent to 1 64 of the full step Stepper Motor Performance Specifications Resolution Speed Mot otor um mm s MFA PP 0 3 E16PP MFA PPD 0 00757 i UE16 D Micro step driving 5 EDH0199En2020 01 12 MFA Series Miniature Linear Stages EW Motor 5 1 UE16PP Motor Characteristics Motor Angle by Micro Step Current Resistance Inductance Newpor
4. C 10 N C O 7 11 N C 11 N C o 12 N C 12 N C a 13 N C 13 Mechanical Zero z o 14 N C 14 Shield Ground 5 061 3 15 N C 15 N C vem 16 N C 16 0 V logic 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 N C 19 Encoder Phase A 20 N C 20 Encoder Phase B 21 5 V 21 Encoder Power 5 V 22 OV 22 0 V Encoder 23 N C 23 Encoder Phase A 24 N C 24 Encoder Phase B 25 N C 25 N C The 9 pin Mini DIN connection for the MFA PP stage is given in the following table UE16PP MFA PP End of Run Phase la 5 V Phase 2b N C Phase 2a Phase 1b OV End of Run SIDA SO OT BR D D D Newport Experience Solutions MFA Series Miniature Linear Stages 6 0 Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operat ing the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way o If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e If y
5. MSM OMS esana a a A ee aA 3 32 Mechanical Specifications ica sssrscessrnntraeneteinnenneinertrerensnndtestet 4 3 3 Load Specification Definitions 4 3 4 Load Characteristics and Stiffmess oe eeeceeeeseeseeeeeeeeeeeeeteeeeeeeeeneeees 4 3D Stage Weight serrer E EEEE EE 5 40 Diye eean aanaeio KEEA OSKAN ERRETES 5 4 1 DC Motor Drive Version ses 5 4 2 Stepper Drive V rsiomM sissssseinisenremeneeeneerenenemenites 5 5 0 MONO a na io 6 5 1 UE16PP Motor Characteristics cccccceesecsesceesesscesseesseseesseeseeseeeeeees 6 5 2 Command Signals for the Stepper Motor 6 5 3 UE1724SR Motor Characteristics ss 6 5 4 Command Signals for the DC Motor c ccccecccssesesceesceseesseeseeseeeeeeees 6 D gt S ns r POSitiON ys serca annin ni ans inter adnan 7 5 6 Feedback Signal Position for the MFA CC ccccccccccesssseeseeseeeeeeeeeees 7 5 1 PINOUtS ssaaiinnis nen hi REE E EAEE ET 8 6 0 Connection to Newport Controllers 9 6 1 Warnings on Controllers sisi reins same ia iaa 9 6 2 COMME CH OM E E EE E E E covvestcancesieet 10 7 0 Connection to Non Newport Electronics 11 Gel MPA CC Stag ESen a a o e e e a EE 11 eX MPAPP Stat OS iina E R O A 12 gt Newport Experience Solutions iii EDH0199En2020 01 12 MFA Series Miniature Linear Stages 8 0 Dimensions 12 8 1 MFA Stages essseseessessersesseesrssseseessessresssseessesereresseestesstseeseesseesessoese
6. with our Newport NSC200 controller driver NSC200 Single Axis Low Power Motion Controller Driver Dimensions 8 1 MFA Stages MFA PP 9 PIN MINI DIN CONNECTOR 4 TAPPED HOLES 79 4 HOLES M2 THD 4 40 M3 gt 20 USABLE DEPTH 12 3 E CLR 20 MFA PPD amp MFA CC 25 PIN SUB D CONNECTOR mj lt 42 y 6 HOLES M3 THD 87240 36 USABLE DEPTH 20 5 A F 98 222125 lt 1 89 48 25 4 CABLE LENGTH 9 8 FT 3 M 79 20 N 39 10 k k Lg lt 5 96 133 5 177 2 HOLES M3 THD s USABLE DEPTH 20 5 D Newport EDH0199En2020 01 12 12 Experience Solutions MFA Series Miniature Linear Stages 8 2 8 3 8 4 A Newport ce Soluti MFA BK Plate The MFA BK top plate is used for XZ and XYZ assemblies with MFA stages 38 31 4 TAPPED HOLES 9 65 1 TT T lt 8 M2 CLR 4 7 A Ras 1 42 79 LN 36 20 g ST VA Ts ee PR 2 TAPPED HOLES 121 79 4 40 M3 CLR 30 65 20 lt 2 17 55 M MFA TP Top Plates 4 TAPPED HOLES C CLR ON O 1 42 x 79 oe 6 gt NE y F P CS A Li gt 1 26 32 Fe o0 KA lt B gt me 2 48 6
7. 1006 Evry Cedex France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport fr com Service amp Returns Tel 33 0 2 38 40 51 55
8. 3 gt DIMENSIONS THREAD in mm D MFATP oy gog 440 832 M MFA TP 50 600 ma js MFA BP Base Plate 4 TAPPED HOLES 24 4 HOLES 9 26 9 7 5 4 40 M3 CLR fae M3 ae i 6 7 2 98 x 1 00 75 8 x 25 4 e eye 417 Y o O 1 42 79 0 79 1 97 36 20 20 50 1 0 07e Ol dE en 1 f 8 HOLES M3 THD lt 36 m 3 50 89 gt NOTE These plates are not included with MFA stages and must be ordered separately 13 EDH0199En2020 01 12 MFA Series Miniature Linear Stages 9 0 Maintenance 9 1 9 2 EDH0199En2020 01 12 RECOMMENDATION It is recommended to contact Newport s After Sales Service to define the appropriate maintenance for your application Maintenance The MFA stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The MFA stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your stage to Newport s After Sales Service after every 2000 hours of use for lubrication and maintenance If your MFA stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassem
9. ble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your stage to Newport once a year for recalibration to its original specifications D Newport 1 4 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems D Newport Experience Solutions 1 5 EDH0199En2020 01 12 Newport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail rma service newport com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde B t B ZI Bois de l pine BP189 9
10. e speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions MFA Series Miniature Linear Stages Table of Contents Warranty ses os rhin entrent sers en etsee menaces anale nent sed dt en eae ete ententes ii EC Declaration Of COM Oriy se RAR eatin v D finitons and Sy Mi DONS sirenaren naa a Ea a aaa vi Warnm s and Cations einasi eaea vi Wars Airis an E E E E TAa vii CIONS irra A R din viii 1 0 InPORUCHON 6 scsiciicesiacsiniaiaiscaoniuxadineunnomimen 1 2 0 Description s iiijcnninunGakmcnauuvnedn dais 2 2 1 Design Details sienne nimes ann RAEE E ETa 2 3 0 Characteristics cccccccecceccessssescessssseesssessesseessesssesseesensees 3 el
11. elle B P 29 eS F 45340 Beaune La Rolande France Q Ne complies with all the relevant provisions of the Directive 2006 42 EC on machinery A Fa 4 complies with all the relevant provisions of the Directive 2004 108 EC relating to electro Ce magnetic compatibility amp LE se was designed and built in accordance with the following harmonised standards e NF EN 61326 1 2006 Electrical equipment for measurement control and LS laboratory use EMC requirements Part 1 General requirements A e NF EN 55011 2007 Class A Q was designed and built in accordance with the following other standards LS NF EN 61000 4 2 i NF EN 61000 4 3 9 e NF EN 61000 4 4 NF EN 61000 4 5 LS NF EN 61000 4 6 Gr P s9 oe ORIGINAL DECLARATION Ce s9 Done in Beaune La Rolande on 09 June 2011 NA Dominique DEVIDAL MA A Quality Director Q Ne v EDH0199En2020 01 12 MFA Series Miniature Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complyi
12. essesee 12 8 2 MABE PIE eaa E nba tiiiinsiiea isin era tines 13 8 3 VE MPACTP Top Plates ss sn coecaesite ou a carters dede 13 8 4 MFA BP Base Plate essences 13 9 0 Maintenance ooo cssessssesseeseeteseeeeseeeseeeeseeeesesees 14 9 1 Ma intenanC se ianitieh tresse antininein a ates 14 92 ROP AM soe sce RE 14 9 3 Calibrationiasiidiievacaiiiniiaaniediviee naiensiiides EEE naa 14 Service FOr ocu E E E E ARS 15 QD Newport EDH0199En2020 0 1 1 2 iv Experience Solutions MFA Series Miniature Linear Stages EC Declaration of Conformity NS 6S OS x ONS D NY S ONG NAA NS A YX aw SA gt Newport Experience Solutions SY DOSS Ke SLOAN ISIE Y b he 5 2 MEFA Series PK amp N sa OR EC Declaration of Conformity ewport LE following Annex II 1A Experience Solutions Q Ie Q of Directive 2006 42 EC on machinery F2 gt Gr Ie The manufacturer lt ES MICRO CONTROLE Spectra Physics fe a a 1 rue Jules Guesde ZI Bois de l Epine BP189 age K F 91006 Evry FRANCE QC Hereby declares that the machinery L ve ON e Description MFA CO e Function Miniature Linear Stages Models MFA CC CCV6 PP PPD we ms the technical file of which was compiled by oD Mr Dominique DEVIDAL Quality Director le MICRO CONTROLE Spectra Physics Zone Industri
13. ges may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE MFA are ESP compatible stages Enhanced System Performance is Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely D Newport 1 0 Experience Solutions MFA Series Miniature Linear Stages 7 0 Connection to Non Newport Electronics WARNING Newport takes no responsibility for improper functioning or damage of a stage when it is used with any non Newport controllers 7 1 MFA CC Stages WARNING Newport guarantees the C compliance of the MFA translation stages only if they are used with Newport cables and controllers Nevertheless the figure below indicates the recommended wiring when a MFA CC stage is used with non Newport controllers Sub D25 male Connection Connection Connector MFA PPD MFA CC 9 a L 1 N C N C 10 i T 1 N C N C fc N C N C 12 N C N C 1 Phase 1 N C 2 N C N C 3 1 i _ Phase 1 N C 4 ae TSi i 1 N C N C X ta 4 x 5 i 1 Phase 2 Motor 6 N C Motor 11 TT 1 Phase 2 Motor 8 7 i T N C Moto
14. guaranteed um 2 5 or 1 25 2 or 1 On Axis Accuracy guaranteed um 8 or 4 Maximum Speed mm s 0 3 MFA PP 25 1 0 MFA PPD Pitch guaranteed urad 200 or 100 Yaw guaranteed urad 100 or 50 MTBF 10 000 h at a 1 kg load with a 20 duty cycle 1 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values 2 After backlash compensation 3 To obtain arcsec units divide mrad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D 20 D Cantilever distance Load Characteristics and Stiffness Cz Normal centered load capacity 50 N Cx Cx Axial load capacity 10N kax Compliance in roll 60 prad Nm kay Compliance in pitch 10 urad Nm Q Off center load D Cantilever distance in mm Q lt Cz 1 D 20 D Newport 4 Experience Solutions MFA Series Miniature Linear Stages
15. iature Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point by using the manual knob as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0199En2020 0 1 1 2 viii Experience Solutions MFA Series Miniature Linear Stages Miniature Linear Stages MFA Series 1 0 Introduction This manual provides operating instr
16. ifference between actual position values obtained for a given target posi tion when approached from opposite directions Minimum Incremental Motion Sensitivity The smallest increment of motion a device is capable of delivering consis tently and reliably Resolution The smallest increment that a motion device can be commanded to move and or detect Resolution The smallest increment that a motion device can be commanded to move and or detect Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made sys tematically with test equipment in an air conditioned room 20 C A linear cycle with 21 data points on the travel and 4 cycles in each direc tion gives a total of 164 points 3 EDH0199En2020 01 12 MFA Series Miniature Linear Stages 3 2 3 3 3 4 EDH0199En2020 01 12 Guaranteed Specifications Guaranteed maximum performance values are verified per the Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or on the Newport web site at www newport com Mechanical Specifications MFA PP and MFA PPD MFA CC Travel Range in mm 1 25 Minimum Incremental Motion Linear um 0 1 0 1 Uni directional Repeatability guaranteed um 0 5 0 3 Bi directional Repeatability
17. ing emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Exerce Stns vii EDH0199En2020 01 12 MFA Series Min
18. m repeatability Cable m 1 5 included Vacuum Compatibility Vacuum compatible versions are available up to 10 hPa using DC motor MFA CCV6 Maximum load speed and acceleration are halved RoHS Compliant NOTE This product complies with the RoHS directive Restriction of Hazardous Substances D Newport Experience Solutions MFA Series Miniature Linear Stages 3 0 Characteristics 3 1 QD Newport Experience Solutions Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of the position precision and repeatability of the machine tools with CNC This standard gives the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for lin ear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis D
19. ng with all applicable European Union CE regulations and recommendations European Union CE Mark ATTENTION This stage is a Class A device In a residential environment this device can cause radioelectric interferences In this case suitable measurements must be taken by the user of this device Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider gt Newport EDH0199En2020 0 1 1 2 vi Experience Solutions MFA Series Miniature Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer be
20. ou suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle con tact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts D Newport Experience Solutions 9 EDH0199En2020 01 12 MFA Series Miniature Linear Stages EDH0199En2020 01 12 6 2 ESP COMPATIBLE Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Sta
21. r Y Li 1 y 4 DE E Ground 1 it i A 16 Ot a N C 0V logic 13 i 1 gt NC Mechanical Zero 19 1 1 1 N C Encoder Phase A 23 L 1 N C Encoder Phase A 20 r N C Encoder Phase B 24 m 1 1 NC Encoder Phase B 15 4 1 N C N C 25 L l 1 N C N C 7 End of Run End of Run 2 18 At A End of Run 2 End of Run 2 21 1 1 5V 5 V Encoder 22 Wa a me a 1 OV 0 V Encoder Connector Connector Connector Ca OE SS Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Stage Mechanical Zero Stage End of Run lin Max 10 mA ln max 16 mA V max 30 V V max 5 6 V is not used a 1 kKQ 0 25 W resistor must be connected gt between pins 13 and 21 SE If the Mechanical Zero output i Encoder and Index Pulse are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport Experience Solutions 1 1 EDH0199En2020 01 12 MFA Series Miniature Linear Stages 7 2 MFA PP Stages WARNING MFA PP stages are equipped with a 9 pin mini DIN non standard connec tor and must only be used
22. small incremental motion with high dynamic speed range and good repeatability The MFA PP and MFA PPD stepper motor versions are more economical solutions for less demanding applications Travel limit switches prevent bearing damage from accidental over travel MFA stages feature an all steel construction that provides a higher stiff ness to weight ratio and lower thermal expansion compared to aluminum designs The result is superior performance in a smaller footprint The smooth motion of the MFA linear stages is further accentuated by Newport s proprietary double row linear ball bearing design with bearing ways that are directly machined into the structural frame of the stage Compared to other solutions that use commercial bearings MFA linear stages have a higher load capacity and stiffness with low pitch and yaw errors Another benefit of Newport s integrated bearing ways is the availability of 4 widely spaced mounting holes for base mounting and XY assemblies This provides better stress distribution and allows for more rigid multi axis combinations than other designs that provide only line contact with 2 mounting holes Design Details Base Material Stainless steel Bearings Double row linear ball bearings Drive Mechanism Backlash compensated leadscrew Feedback MFA CC Motor mounted rotary encoder 2 048 cts rev MFA PP None Limit Switches Optical switches Origin Uses motor side limit for homing typically lt 5 m
23. t C A Q mH Utilization UE16PP 0 23 0 25 12 5 5 5 Micro Step 5 2 Command Signals for the Stepper Motor Phase 1 Direction Phase 2 Direction Motion gt Direction 5 3 UE1724SR Motor Characteristics Nominal Max RMS Max Peak Resistance Inductance Motor Stage Voltage V Current A Current A Q mH UE1724SR MFA CC 24 0 15 0 21 54 6 1 19 5 4 Command Signals for the DC Motor Motor v ooo Motor v Motor v Displacement Direction Direction Displacement Motor v 0 COC De Direction oce e 900 OC In the above drawings Motor signal is referred to Motor signal H When the stage moves in Direction the Motor voltage is higher than Motor voltage H When the stage moves in Direction the Motor voltage is lower than Motor voltage gt Newport EDH0199En2020 0 1 1 2 6 Experience Solutions MFA Series Miniature Linear Stages 5 5 Sensor Position lt Home Position EOR Limit RS DS i Actuator Travel Range Displacement gt Direction End of Run are TTL type 5 V 5 16 mA max CAUTION End of Run are active signals and should not be connected to any other source Use appropriate TTL type receivers 5 6 Feedback Signal Position for the MFA CC Encoder Phase A Encoder Phase A Encoder Phase B Encoder Phase B em 900 OC
24. uctions for the stage that you have purchased in the MFA Series e MFA CC e MFA CCV6 e MFA PP e MFA PPD REMARK Vacuum compatible stages to 10 hPa In this case max speed and load capacity have to be divided by two MFA CC miniature linear stage RECOMMENDATION We recommend you read carefully the chapter Connection to electron ics before using the MFA stage MFA stages in an XYZ configuration D Newport Experience Solutions 1 EDH0199En2020 01 12 MFA Series Miniature Linear Stages 20 Description EDH0199En2020 01 12 2 1 Designed for space limited applications and compact multi axis assemblies MFA Series linear stages supply very high resolution single axis translation in a low cost motorized package Typical applications for this stage are fiber optic alignment laser diode research bio medical applications and inspection systems MFA linear stages are available in two versions The MFA CC with a DC motor features an integrated gear box and a motormounted high resolu tion 2 048 cts rev rotary encoder The highresolution position feedback and low friction mechanical design ensures ultra smooth motion with 100 nm sensitivity The DC motor supplies an optimized output torque that per mits the use of a lower ratio step down gear allowing for faster motion with higher reliability and lower backlash Hence the MFA CC is the recom mended choice for applications that require
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