Helmholtz Nanoelectronic Facility
Contents
1. It is not allowed to use wet chemical processing without a proper introduction and instruction by a staff member All wet chemical processing has to be performed inside the designated wet bench When performing wet chemical processing it is obligated to use personal safety protection like proper chemical gloves and personal safety equipment e Itis prohibited at all time to take chemicals inside or outside the cleanroom yourself e Before handling hazardous substances find out the dangerous properties by reading Safety Data Sheets or publications of the manufacturer e t is prohibited to perform chemical processing that is not described in a procedure run sheet e All containers on wet benches MUST be labeled with the user s name institute and what chemi cal is in the container the safety symbols and date Otherwise the solution will be disposed of Initials for your name are NOT sufficient e Dispose your own chemicals in the designated waste containers when ready e Make mention if chemicals are running out 10 Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM Particularly dangerous substances must be replaced by less dangerous substances whenever pos sible Any person who intends to bring chemicals into HNF must obtain approval from HNF staff No further action is required for common chemicals that are listed at the front of HNF s MSDS bind er However if the chemical does not appear on the common chemical list the per2. 7 SAFETY POLICY When starting work at HNF and therefore at the Research Centre there is one top priority for every new member of staff proper instruction about safety and health protection at the place of work This is re quired by the law on occupational safety You are therefore obliged to thoroughly understand and careful ly apply the information given to you by your supervisors and by FZJ After all this concerns nothing less than your own health and safety and that of your new colleagues e Each person working in a laboratory has to learn about locations and functions of the safety de vices as well as escape routes fire alarms and emergency plans e Escape and rescue routes have to be kept free at all time e There are fire extinguishers in the immediate vicinity of the equipment and workspaces o Powder extinguishers in all corridors o CO fire extinguishers at the ends of the central corridor in the cleanroom e Used fire extinguishers including those with a damaged seal must be submitted immediately af ter use for refilling and then returned immediately to their place e Respirators are allowed only for special work e g with toxic gases e Emergency shower and eyewash can be found in the wet areas and disposal areas next to the doors They are checked once a month The review is documented For safety rules and behavior see Lecture HNF Cleanroom renewal pdf on the HNF website gt downloads 7 1 CHEMICAL PROCESSING RULES
3. Ay J LICH FORSCHUNGSZENTRUM Helmholtz Nanoelectronic Facility www hnf tz juelich de USER MANUAL Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM A CONTENT INTRODUCTION anne 1 DUTIES OF ANY USER esas casita ac aw scat satis cnc nee anne 2 2a PROCEDURE AT WORK ieee haces nee ee denen Ae veteran oe nn Eee ee 2 2 2 REPORT OF PROCESS PARAMETERS AND DATA cceccccececcececccceccececcccececsaceceaceceeeceacecsacecsacecsasecsaceceaceceaceceaeenss 2 2 3 ACKNOWLEDGEMENTS CO AUTHORSHIP AND PHOTOCREDIT POLICY cscescecesceceececesceseecuseeeeeeseeeeseeeseeeseeeess 2 2 4 STORAGE N THE FACH TV ee nats isin oe cians conus IE aia 3 2 5 TOUR asec eects ocean eer eect ecient espe ee a ecclesiastics nee 3 HNF ACCESS AND RED CARDING cccccccccccccccccccccccccccccccccccccccccccccccceccccccccccccccccccccecccccceccccccecccccsecs 4 3 1 PC ESS IRE GST A TION a ee ne ee ee 4 3 2 ECT ONG RE een ee ee nee ee een 5 3 3 OPENING HOURS ccceccececcccscecccceccececcececcsceaceceaeeceacecsacecsacecsaeeceaeessaeeseneecseecsacecsaeeseeececeecsaeeseceecseeceueecs 5 RED CARDING SUSPENSION PENALTY cscccsssccsssccssccnsscccsccssssccsccccsscscesessenscscessenssscescensssescesssseeccs 6 GUIDELINES FOR THE USE OF EQUIPMENT cccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccecs 7 5 1 CII Nr RELE a AE ea Dean nern ee ann 7 5 2 BOOKING EQUIPMENT u een 7 CLEAN BEHAVIOUR RULE
4. ICH FORSCHUNGSZENTRUM 8 NO GOES IN HNF e Copper in any form is totally forbidden in HNF cleanroom e Pure Perchloric acid in any concentration is totally forbidden in HNF building e Smoking in the HNF Building is totally forbidden 12 Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 9 IMPORTANT PHONE NUMBERS 9 1 EMERGENCY TELEPHONE NUMBERS e Phone 77 e Identify yourself e Report the type of emergency e Report the location HNF 02 14 Entrance E1 9 2 PROBLEMS WITH THE BOOKING SYSTEM Jurgen Moers Phone 2344 Mail j moers at fz juelich de W Albrecht Phone 6364 Mail w albrecht at fz juelich de 9 3 TECHNOLOGY QUESTIONS Jurgen Moers Phone 2344 Mail j moers at fz juelich de W Albrecht Phone 6364 Mail w albrecht at fz juelich de 9 4 CLEANROOM PROBLEMS IN GENERAL Bernd Hermanns Phone 3193 Mail b hermanns at fz juelich de 9 5 gt SAFETY R Benczek Phone 96836 Mail r benczek at fz juelich de B Hermanns Phone 3193 Mail b hermanns at fz juelich de 13
5. S ccccccccccccccccccccccccccccccccccccccccccccccccccccecccccccccccccecccccccccccccecccecccccceccoscceces 9 SAFEIY POLY ee een 10 71 CHEMICAL PROCESSING RULES sa aaa aaa aaa a aan ee ae 10 7 2 SAFETY OEEO TE ee En nee we ois ater esse ees ee ee meee ne Sees 11 NO GOESIN HNP aan ee 12 IMPORTANT PHONE NUMBER cccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccccecceccecccecs 13 9 1 EMERGENCY TELEPHONE NUMBERS ccecccceccccccccccccccccececcecencecencecencecenceceececenceceacecenceeeaceceaceceaceseaceneaceneas 13 9 2 PROBLEMS WITH THE BOOKING SYSTEM a anne 13 9 3 TECHNOLOGY QUESTION en ee nie reise ee me 13 9 4 CLEANROOM PROBLEMS IN GENERAL sccecececececcececececcccscecececcncecececeacececeseucucecececeacececeseucuceceeeeeaceceeeesaeeceeees 13 9 5 SPREE M Vccttecueuteeoccascautsauin tote act lterdcaxtnceuscnsaaarawmbcat E dante tae hateasaddanebagieucan suatueasedastacmmsccucenae 13 Copyright Forschungszentrum J lich 2015 The information contained in this document is developed by the HNF Of fice and are valid from the date of publication HNF does not guarantee that any information contained here in is error free or up to date HNF MAKES NO WARRANTIES EXPRESS IMPLIED OR STATUTORY BY PUBLISHING THIS DOCUMENT Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 1 INTRODUCTION Welcome as a user of the cleanroom It is the main cleanroom Facility of Forschungszen
6. a useris 15 min late for their reserved time on equipment the reserved time may be claimed by anyone in the lab You must finish your process in a timely manner Avoid to run into someone else s timeslot Users are obliged to enter the used parameters of the equipment in the Phoenix system no later than one week after use Special permission must be given to any user that wishes to reserve a piece of equipment for more than 24 hours Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 6 CLEAN BEHAVIOUR RULES The following rules have to be obeyed Following these rules will lead to proper cleanroom behaviour e Follow cleanroom dressing procedure Only enter the cleanroom with cleanroom clothing the provided nitrile gloves and safety glases e Always use cleanroom clothing in the appropriate way when working inside the cleanroom and be sure your own clothes are covered properly by the cleanroom clothing e Only place your cleanroom clothing on one of the hangers Do not leave the clothing lying around Always attach your name card to make your cleanroom suit personal and for recog nition inside the cleanroom e Do not forget to log off leaving the cleanroom e Atall times it is prohibited to open your cleanroom suit inside the cleanroom e Do not store your cleanroom suit unnecessary when not working in the cleanroom for a long er period Put your suit in the dirty laundry bin in that case e Itis prohibited to take dus
7. ager The cleanroom is open within the core working time of FZJ 8 00 am 16 30 pm Mo Fr Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 4 RED CARDING SUSPENSION PENALTY Not obeying the cleanroom rules is a serious offence It will have an effect on the cleanroom conditions or on the safety of all other cleanroom users The number of repeated violations will affect the severity of the penalty All technicians working for HNF and the cleanroom management are members of the facility support staff and are obliged to report all violations including names to the facility manager The facility support staff may also enforce a cleanroom exclusion for the day on which the safety violation is observed After the first violation An official warning is given and possible cleanroom exclusion for up to one week After the second violation A second official warning is given and three weeks of cleanroom exclusion After the third violation Permanent cleanroom exclusion EXAMPLES OF VIOLATIONS e User do not follow the instruction of HNF staff e Violation of working safety security policies and cleanroom regulations e Damage of equipment due to violation of the work rules after sufficient instruction or unauthor ized changes to equipment e Violation of access arrangements e Use of equipment without training and without booking e Using Materials and Chemicals not allowed in HNF e Not enter promptly the process paramete
8. al feasibility The HNF Office implements the recom mendations of the HNF Board of Directors It coordinates the work of HNF Office Facility Manager Simone Filser Dr Wolfgang Albrecht Telephone 49 2461 61 1856 Telephone 49 2461 61 6364 Fax 49 2461 61 96418 Fax 49 2461 61 96418 E Mail s filser fz juelich de E Mail w albrecht fz juelich de 3 1 ACCESS REGISTRATION e Use the web based registration of the Livingdatabase Phoenix on the HNF web page After this we will contact you to regulate the administrative and financial responsibilities e Prepare a detailed run sheet of your process project You have to upload the run sheet during the registration process An example of a normal run sheet is on our website e Fillin the right locations in the online registration under Work description You can apply for Cleanroom SEM FIB area Nanocluster Optical Lab E Beam Lab e The system will send you a mail livingdatabase fz juelich de The registration is only done if you confirm the registration by the link in the mail e While experts checking your run sheet you will get an invitation to do a safety exam The safety exam is based on the Lecture HNF Beginners and Lecture HNF Cleanroom renewal You can find the lectures on the HNF website gt downloads e The system will let us know if you pass the exam and send us your exam results When we get the info we will send you your invitation to the cleanroom intr
9. edgements will suffice 2 4 STORAGE IN THE FACILITY There is a limited amount of storage for user samples and materials in the clean room Ask the staff for use There is no storage outside the clean room All items in the cleanroom should be clearly labeled with the user s name and the user s institute The staff periodically disposes of things left unlabeled or belonging to inactive users All samples or masks not stored in your bin at the end of the day will be placed in the lost and found box The items in the lost and found box will be disposed of at two week intervals At the end of each calendar year an inventory of all storage boxes of the users is made All storage cases that are not assigned to a user after two requests for identification will be disposed of 2 5 TOURS Guided tours for groups of all kinds in the HNF are welcome Groups can only enter the HNF after consul tation with the management of HNF Our experience is that tours with more than 15 participants are dif ficult During a tour without entering the clean room no special safety precautions must be taken Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 3 HNF ACCESS AND RED CARDING The access is coordinated by the HNF Office it is the first contact for users in scientific and technical mat ters HNF Office organizes the application process the acceptance of applications for scientific projects and the assessment of their scientific and technic
10. les will be provided during the equipment course e Itis not allowed to use equipment if you are not instructed and permitted to operate the equip ment e It is not allowed to use the equipment without a reservation in the Living Database e It is not allowed to make hardware or software modifications in any way e Keep the equipment and working area clean e Report any faults or defects to the responsible technician immediately An extensive list with all equipment and responsible technicians can be found on the HNF website Misuse of equipment and unauthorised use of equipment will result in a penalty No device or instrument may be removed without permission from the management of the HNF 5 2 BOOKING EQUIPMENT HNF equipment is reserved through Livingdatabase Each user receives an accepted HNF user account for the booking system On equipment that is in heavy demand the HNF reserves the right to implement spe cial booking rules to the instrument to ensure fair access to all users Equipment Rules No use of equipment without prior booking Equipment must be booked through the Livingdata base Phoenix Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM A momentarily unused equipment can be booked through two terminals in the cleanroom Before using equipment you will be prompted to confirm the booking After confirmation the booking is mandatory and cannot be cancelled any more Only the equipment manager can If
11. mission of the HNF required If the chemical has not been used previously in the facility the staff member and the user must determine the safety concerns develop procedures for safely working with this chemical MSDS material Data Safety Sheets sheets for chemicals used at the HNF are organized alphabet ically in binders which are located next to the clean room wardrobe area A sign shows the loca tion of the binders MSDS sheets for the most common chemicals in use at the HNF have been compiled into a single binder for easier access Not following these rules will have a direct effect on the safety of yourself and your colleagues Breaking the rules will result in a penalty 72 SAFETY DELEGATE The safety officer of the HNF acts as advisor on all safety issues Individuals are hereby invited to inform the HNF staff or the safety officer on all risks and any safety compromising behavior in their workspace The objective is Hazard identification and design of appropriate guidelines Examination of error messages and suggestions for corrections Recommendation of changes in the HNF User Guideline Security information updates Maintaining the responsiveness of HNF with accidents and emergencies Check the safety instructions Ensuring compliance with WHMIS legislation by the user Monthly review of emergency equipment Security Officer Mr Rainer Benczek Phone 6805 email r benczek fz juelich de 11 Date 1 Oct 15 WA Ay J L
12. oduction e After participation of the cleanroom introduction you can start to contact the equipment manag er for equipment instructions e Be prepared for a flexible approach Many new users change their plan of attack significantly once they arrive and become better acquainted with the facility its staff and capabilities Keep your run sheet up to date If you change your process and use different or new materials or chemi cals you have to download the new version in the Livingdatabase System gt my user details and need the written clearance of the HNF Office Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 3 2 ELECTRONIC KEYS Each accepted user of HNF receives an electronic key to enter the building and the cleanroom The follow ing rules apply Entering and leaving the building exclusively via the entrance E1 Access keys may not be sold or given to other people Should a user be encountered with a for eign key he and the owner of the key are excluded indefinitely from using the HNF The electronic key must be returned after finishing work or leaving the HNF for more than 3 month Visitors need a permission of the HNF Office to enter the building or shall be accompanied by an HNF staff member 3 3 OPENING HOURS Working with hazardous materials or chemicals in the HNF is permitted within the core working time of the FZJ Working outside the official working hours requires a written permission of the Facility Man
13. r data in Phoenix e Using a foreign E key e Intimidation of other users over their work area in the laboratory damage to equipment of other users etc e Etc Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 5 GUIDELINES FOR THE USE OF EQUIPMENT A part of the equipment of tHNF is only run by equipment managers another part of the equipment in the facility is hands on equipment for users Each major instrument is under the charge of a staff member referred as equipment manager The equipment manager will train users on that instrument When the equipment manager is satisfied the user will be authorized to use the system without further supervision Much of the equipment in the facility is highly complex and delicate Each instrument necessarily has rules and operational procedures which are set by the equipment man ager to assure the continued operation of the instrument Violation of these procedures or carelessness in operation can result in damage to the equipment down time and considerable expense Consequently careless or damaging use of equipment will result in suspension of user privileges either for a specific in strument or the facility as a whole see chapter 4 3 5 1 EQUIPMENT RULES Use of cleanroom equipment is only allowed after an extensive course These courses are given only by the responsible technician Use of equipment is subject to special rules depending on the type of equip ment The additional ru
14. s FZJ The Waste Disposal Regulations FZJ The applicable health and safety guidelines HNF regards the nature of the work carried out by any individual user as confidential and shall make eve ry reasonable attempt to prevent breaches of that confidentiality HNF does not accept responsibility for the consequences of any breach of the confidentiality by third parties who by any means gain illegitimate access to information from HNF Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM 2 DUTIES OF ANY USER e Visitors need a permission of the HNF Office to enter the building or shall be accompanied by an HNF staff member e All exterior doors have to be kept closed All doors leading from the stairs to the floors or into the workrooms laboratories or clean rooms are fire doors and must always be closed The doors do not close automatically in case of fire alarm e Keep cleanroom doors closed at all times The supply and exhaust air works only with closed doors e Eating and drinking are prohibited in all rooms except in room 6003 Food and beverages cannot be stored in HNF e Smoking is strictly forbidden throughout the HNF e Report disruptions in the technical building equipment ventilation heating plumbing electrical water gas immediately to 3193 or the HNF Office Tel 6364 e Atthe entrance coats and jackets have to be hung on the coat racks Lockers deposit boxes are available in the lobby for free The HNF is no
15. t generating materials like uncoated wood paper card box of rusted and materials inside the cleanroom Also styrene foam is not allowed Only use exclu sively special cleanroom paper e Do not eat or drink inside the cleanroom Chewing gum is also not allowed e No make up perfume cologne aftershave or scented lotions may be worn in the clean room e lf you have a cold we ask you not to enter the Clean room Blowing your nose is not possible in the clean room If we find you have a serious cold we have to ask you to leave the clean room e Sandals shoes with high heels or shoes with metal eyelets are not allowed in the clean room e Do not smoke inside the cleanroom Do not smoke just before entering the cleanroom wait at least 3 hours before entering e Wearing contact lenses is prohibited e Do not open emergency exits unnecessary The supply and exhaust air works only with closed doors e It is not allowed to run inside the cleanroom Always move calm and in a controlled manner e Always keep your workspace clean Store materials in the personal cleanroom box Do not leave materials lying around e Personal listening devices MP3 mobile phones etc are not permitted Tablet computers may be used in the clean room with a protective cover if they have access to the Wireless LAN network of the Research Center e Orders by the support staff have to be obeyed at all time Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM
16. t responsible for the items in the entrance and in the lockers deposit boxes e Entering the HNF behind the entrance is only permitted wearing overshoes 2 1 PROCEDURE AT WORK e The own workplace and all community facilities are to be kept in good condition e All workplaces should be cleaned up regularly e The necessity of chemicals to remain in the laboratory has to be revised on a regular basis Un necessary chemicals are to be removed or disposed of 2 2 REPORT OF PROCESS PARAMETERS AND DATA The HNF has a system for reporting process parameter and data named Livingdatabase Phoenix Each user of the clean room is required to enter promptly its process parameter data within one week in Phoe nix Any breach of obligation gt see red card policy 2 3 ACKNOWLEDGEMENTS CO AUTHORSHIP AND PHOTOCREDIT POLICY To ensure that the HNF and its staff are recognized for their efforts there is a policy that describes the situations where the HNF and its staff should be acknowledged in papers and presentations Plus if a HNF Date 1 Oct 15 WA Ay J LICH FORSCHUNGSZENTRUM staff member has made a significant contribution to a project a co authorship must be made on the re spective papers For papers a suggested acknowledgement reads This work was performed in part at the Helmholtz Nanoelectronic Facility of Forschungszentrum Juelich In presentations listing the Helmholtz Nanoelec tronic Facility along with your acknowl
17. trum Juelich The facility will guarantee a ISO 2 cleanroom together with a couple of important behaviour and safety rules It is important for each and every one to follow these rules to ensure a clean and healthy working envi ronment In the HNF caustic corrosive toxic explosive carcinogenic flammable and asphyxiating chemicals and gases are used In the interest of your own safety and the safety of others you should read this manual carefully and follow the procedures described Any questions or concerns should be directed towards a HNF staff member HNF expects to users of all user levels that they aware the dangers of the activities for which they are re sponsible that they warn people at risk and that they take care to protect the health and safety of other users All users are bound to rules or measures in the interest of health safety and welfare of all Don t abuse them The policies outlined in this document will change as the facility will grow Many of these procedures and policies will be adapted to the larger user community that the HNF will support in future You will find all rules and policies on the web page www hnf fz juelich de In addition to these laboratory regulations the following regulations apply The statutory provisions Chemicals Act Hazardous Substances Act etc The Guidelines for Laboratories GUV R 120 The relevant Technical Rules for Hazardous Substances TRGS The General Safety Regulation
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