Sapphire capacitance diaphragm gauge User`s Manual Models
Contents
1. Allowable cable length 10 m max Items Specifications Event relay ratings Number of relays 3 Certifications UL CSA Contact form 1c both NO and NC contacts Maximum load 1A 30 Vdc resistance load Minimum load 10 uA 10 mVdc 19 Mechanical service life 50 million cycles min Electrical service life 100 thousand cycles min with 1 A 30 Vdc resistance load Event relay functions Event relay 1 Pressure low limit direct action default setting 9 Setting value is assigned by model No Operating hysteresis 0 5 FS Always operates together with pressure during warm up or abnormal status Hysteresis cm ee Tseipoini 0 Pressure FS Event relay 2 Pressure low limit direct action Setting value is assigned by model No Operating hysteresis 0 5 FS Always operates together with pressure during warm up or abnormal status Hysteresis lt gt 2 Wo fsetpoint 0 Pressure FS Event relay 3 ON if warm up complete and OFF if warm up not complete or if status abnormal Event relay LED Green when event relay ON off when event relay OFF Standards compliance CE marked EN61326 EN55011 Accessories sold separately ET 2 w 4 wn At the allowable pressure the performance level of this unit can be maintained However if the SPG is repeatedly subjected to the allowable pressure adjust the zero point periodically2. At the marginal pressure this unit will continue to function If the SPG is subjected to the marginal pressure readjust the zero point If more accurate measurement is required return the unit to Azbil Corporation for calibration If the marginal pressure is exceeded the proper operation of this unit can no longer be guaranteed In this case replace the unit with a new one The burst pressure is the pressure at which this device will break To avoid an accident never apply pressure equaling or exceeding the burst pressure Use an appropriate power supply with a rated current exceeding the max power current value PID control is used to regulate the temperature and keep the rate of current supplied to the heater as constant as possible Additionally the maximum power current is varied depending on the power voltage so that power consumption remains constant even during warm up irrespective of the power voltage Self heating models E External Dimensions SPGSA standard model l Al lo o oyj 0 0 0 0 y 912 7 H NW16 coupling type 8 VCR coupling type ety 185 5 A NX 53 5 53 5 lo o Xx 2 2 a S Je aee 1 2 inch gauge port coupling type IDF 2S ferrule coupling type SLP SP5J60 Smart Loader Package with communication cable 6 Since a negative voltage is generated inside this unit a negative volt
3. Factory calibration of this device assumes that no temperature difference exists For details refer to T Takaishi and Y Sensui Trans Faraday Soc 59 1963 2503 E Zero point adjustment e Adjust the zero point before using this device Zero point adjustment should be done with a sufficient vacuum 1 20 000 or less of the selected pressure range span 1 hour or longer after the power was turned on after warm up is complete e For accurate measurement periodic adjustment of the zero point is recommended e When the zero point is adjusted the bias adjustment values inside the device are updated The updated bias adjustment value is added to the pressure measurement which is then output The factory setting for the bias adjustment value is 0 Adjust the zero point in either of the two ways described below Auto zero point adjustment 1 Apply a vacuum with a pressure of 1 20 000 or less of the selected pressure range 2 Keep the auto zero point adjustment button pressed for 3 s After zero point adjustment e If the bias adjustment value is within 5 FS the status LED flashes green three times e If the bias adjustment value is between 5 and 20 FS the status LED flashes orange three times CJ Handling Precautions Auto zero point adjustment cannot be done in the following cases even if the button is pressed Before warm up is complete e If an error occurs If the required bias adjustment val
4. Issued in Apr 2011 V URL http www azbil com 2nd Edition Issued in July 2012 V
5. OFF 0 Pressure FS 0 Pressure FS Normal status OFF Abnormal status ON Normal status ON Abnormal status latch OFF Deviation high low limit Direct action Normal status OFF Abnormal status latch ON Deviation Deviation 4 Warm up done ON ON b r Warm up in progress or abnormal status OFF Warm up done OFF OFF to int OPE Warm up in progress or abnormal status ON Hysteresis Setpoint Hysteresis Warm up done ON In progress OFF a0 Pressure FS Abnormal status OFF latch Warm up done OFF In progress ON be oy hailed status ON ihe Deviation high low limit Reverse action Deviation Deviation Pressure high limit direct action 1 Pressure low limit direct action ON f ii i Pressure high limit reverse action OFF Pressure low limit reverse action Hysteresis Setpoint Hysteresis Deviation high low limit Direct action 0 Pressure FS Deviation high low limit Reverse action 1st order filter time constant Instrumentation O to 10V output simulation Event simulation INSTALLATION Note e This device was calibrated at the factory in a vertical position Shift of the zero point may have occurred depending on the mounting angle In such a case accuracy can be recovered by adjusting the zero point after installation Vertical installation is recommended to prevent contaminants e Always use t
6. When warm up is complete the status LED turns green C Handling Precautions This device does not satisfy specifications for accuracy during the warm up period after the power has been turned ON before the self heating temperature has stabilized Always use this device after warm up is complete e If any problem with the operating environment power voltage ambient temperature etc is detected during the self diagnosis of this device the status LED starts to flash red If this occurs turn off the power and check the instrumentation status If any internal error is detected during the self diagnosis of this device the status LED lights up red If this occurs turn off the power and contact the azbil Group Do not apply a pressure to this device that exceeds the marginal pressure Doing so might cause device failure Take appropriate measures so that no contaminant enters this device Otherwise a measurement error or device failure might occur Take appropriate measures so that no foreign matter flows into this device If it does measurement error or device failure could result For the pressure range characterized by molecular flow and intermediate flow if the self heating temperature of this device is different from the temperature inside the chamber to be measured a minute pressure difference occurs due to thermal transpiration To achieve especially accurate measurement this must be taken into account
7. Without this sheet Azbil Corporation cannot start repair work Please note that if the sheet is incomplete Azbil Corporation may request the customer to resubmit it Safety Sheet To Azbil Corporation To use photocopy this page Statement by the End User required prior to repair work attest to the safety of this device based on the following evidence check the applicable box Model number Date code _ Hazardous substances have been purged or flushed completely This device has been used only with clean dry inert gas such as air N2 Ar and He Serial number Name Date Department Company Phone Approved by supervisor Comments or supplementary information Do not fill in for Azbil Corporation internal use only Dealer Agent Salesperson Information Date Name Company Department Phone Date Name Company Department Phone Important Notice Depending upon the degree of contamination of the device Azbil Corporation reserves the right to refuse repair Handling of personal information We will use your personal information provided to us by this sheet only for the purposes of providing after sales services to you eo az bi I Specifications are subject to change without notice 09 Azbil Corporation Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan 1st Edition
8. accordance with local regulations Temperature coefficients Temperature coefficients at zero Self heating temperature range Pressure range zero 0 004 FS C 0 008 FS C No self heating or less than 160 C 200 Pa or more Less than 200 Pa 0 008 FS C 0 016 FS C 160 C or more 200 Pa or more Less than 200 Pa Temperature coefficients span 0 02 rdg C Resolution 1 10000 FS Operating temperature range SPG5A standard model Self heating models Non self heating models 0 to 60 C 10 to 45 C Cooling air with a velocity of 0 5 m s or more is required at 35 C or more SPG6A extra high temperature model Self heating models 10 to 65 C when mounted vertically 10 to 70 C when mounted horizontally Cooling air with a velocity of 0 5 m s or more is required at 45 C or more Operating humidity range 10 to 90 RH without condensation Storage temperature and humidity range 20 to 80 C 10 to 95 RH without condensation Response time 35 ms Gas contacting materials Sapphire Inconel SUS316L Internal capacity 4 6 cm3 1 2 inch gauge port coupling type 7 cm 8VCR coupling type 7 cm NW16 coupling type 5 cm IDF 2S ferrule coupling type Allowable pressure 200 kPa abs Models with pressure range of 100 kPa or more 110 kPa abs Models with pressure range of less than 100 kPa
9. input power supply do not connect the power COM and output COM together Also take care to avoid any wrong wiring that may cause a short circuit in other equip ment If the wiring is connected incorrectly current from the power supply will also flow through the output line and the voltage drop from wiring resistance may cause a measurement error 3 The FG is electrically continuous with the case but is insulated from the power COM output COM and other terminals Note Event relay connection OFF ON NO a NO When the power supply is COM COM turned off the event relay is NC NG turned off ADJUSTMENT AND START UP CAUTION e The surface of this device is very hot while the power is ON and for a while after the power has been turned OFF To avoid a burn do not touch it during this period When removing this device turn the power OFF and allow sufficient time for it to cool If there is a chance that work personnel will come in contact with this device after installation take appropriate countermeasures Self heating models e Do not the block ventilation holes Doing so might cause fire or device failure Do not use the relays in this device beyond their recommended service life Doing so could cause fire or device failure Turning the power ON Use this device after warm up is complete 1 hour or more after turning the power ON e If warm up is not finished the status LED is orange e
10. is used as an interlock signal e Do not connect multiple Smart Loader cables connected to multiple SPG5A 6A units to one personal computer at the same time The current coming from other circuits might cause an output value indication error to occur E WIRING Connector pin assignments D sub 15 pin Pin Name No 1 Eventrelay3 COM 6 _Eventrelay3 NO 8 Eventrelay3 NC _ 9 Event relay 2 NO Event relay 2 NC Pat Event relay 1 COM Output COM 2 Example of external connection 15 Vdc dual power supplies Deiv AO 7 Power supply is Power supply COM DC15V 5 Power supply w n 24 Vdc single power supply om 7 Power supply DC24V Lr Power supply COM 5 Power supply wo il o 2 Output Receiving instrument 12 Output COM 13 Load t Jt 11 Event Load 30 Vde relay 1 or less i ae er tea came meee 9 Load b Jt 4 Event LLoad 30 Vdc gt relay 2 or less 10 6 Load HST J 1 Event Load 30 Vdc N relay 3 or less 8 L 15 FG Ground Connector hood Shield 1 If using a single 24 Vdc input power supply connect the power COM to the power 2 The power COM and output COM are internally connected If using a single 24 Vdc
11. sub 15 pin connector male Set screw 4 40UNC A DN AL evi Q amp os us Loader jack zero auto 48 YO Zero point YY adjustment button up Status LED 1 Not available for non self heating models Event relay LED Auto zero point adjustment button Zero point adjustment button down E Smart Loader communication function This device can be monitored and its parameters changed easily Operation charts for pressure interlock of event relays from a PC using the SLP SP5J60 Smart Loader Package CF For more detail refer to the manual for the Smart Pressure high limit Direct action Pressure low limit Direct action Loader Package CP UM 5499E Hysteresis Hysteresis P i ON ON 4 gt ressure monitor 7 a a ij SPG internal status monitor OFF OFF e Temperature of electronics circuit and of sensor head DC Setpoint t t Setpoint supply voltage Alarm status failure status 0 Pressure FS 0 Pressure FS Bias compensation Ratio compensation Pressure high limit Reverse action Pressure low limit Reverse action Oto 10V 0to 10V output 0 V pressure for 0 10 V output H i ysteresis Hysteresis output 10V pressure for 0 10 V output ON gt ON gt settings Conditions for 0 10 V output a E 0 10 V output value abnormal status OFF int OFF Event relay Always OFF Setpoint Setpoint settings Normal status ON Abnormal status
12. 300 kPa abs Marginal pressure 2 3 Burst pressure 700 kPa abs Input power supply Voltage range 15 Vdc 10 dual power supplies or 24 Vdc 10 single power supply Allowable ripple voltage 0 5 Vp p max Power consumption power Power consumption Power current current 4 5 Self heating temperature During normal operation During warm up 15 Vdc supply 24 Vdc supply Non self heating model 3 W max 3 W max 0 12 A max 0 14 A max 125 C 10 W max 14W max 0 6 A max 0 7 A max 150 C 12 W max 16 W max 0 6 A max 0 8 A max 160 C 13 W max 17 W max 0 7 A max 0 8 A max 180 C 15 W max 19 W max 0 8 A max 0 9 A max 200 C Signal voltage Allowable load resistance Measurement output range Output during warm up or abnormal status 16 W max 0 to 10 Vdc 10 KQ min 0 5 to 11 Vdc 6 23 W max Output signal Output depends on the measured pressure 0 9 A max 7 1 1 A max 1 0 connector D sub 15 pin connector male retaining screw 4 40UNC Mass 450g 1 2 inch gauge port coupling type 520 g 8 VCR coupling type 470g NW16 coupling type 650 g IDF 2S ferrule coupling type Warm up time 30 min nominal 1 h max Zero point adjustable range 20 FS Coupling As specified in the model selection table Leak rate 1x10719 Pa m3 s or less Mounting angle Unrestricted 8
13. 6A and setting of its parameters from aPC e Equipped with three event relays Relay settings can be changed easily with the Smart Loader Package SLP SP5J60 sold sepa rately e Conformity to IEC directives CE marked compliance with EN61326 and EN55011 E Model selection table Pe uf m IV V vi vi Basic ype Additional Pressure Self heating coupling Event 1 Event 2 Example SPG5AT11HD500500 model No YPS function range temperature ping setting setting Sapphire capacitance diaphragm gauge Standard model Extra high temperature model Event configuration model Refer to the table on the left Without self heating function Pressure FS pressure ranges Pressure FS pressure ranges 125 C code absolute pressure code absolute pressure 150 C 160 C 180 C 200 C 1 2 inch gauge port 8 VCR female equivalent SUS316L with electrolytic grinding NW16 IDF 2S ferrule 1 2 inch gauge port with traceability certificate 8 VCR female equivalent SUS316L with E Part names electrolytic grinding with traceability certificate NW16 with traceability certificate IDF 2S ferrule with traceability certificate XO FS Always OFF if NNN is specified FS Always OFF if NNN is specified For details about other pressure ranges contact the Sales Dept at Azbil Corporation D
14. CP UM 5671E See Sapphire capacitance diaphragm gauge User s Manual Models SPG5A and SPG6A Thank you for purchasing the SPG5A or SPG6A This manual contains information for ensuring correct use of the SPG5A 6A It also provides necessary infor mation for installation maintenance and troubleshoot ing This manual should be read by those who design and maintain devices that use the SPG5A 6A Be sure to keep this manual nearby for handy reference Please read the Terms and Conditions from the follow ing URL before ordering or use http www azbil com products bi order html NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is for bidden The information and specifications in this manual are sub ject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions If you should find an error or omission please contact the azbil Group In no event is Azbil Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2011 2012 Azbil Corporation All Rights Reserved SAFETY PRECAUTIONS Safety precautions are for ensuring safe and correct use of this product and for preventing injury to the operator and other people or damage to property You must observe these safety precautions Also be sure to read a
15. age output is available even with only a single output power supply 7 The conditions and voltage can be changed using the Smart Loader 8 This unit was calibrated at the factory in a vertical position Shift of the zero point may have occurred depending on the mounting angle In such a case accuracy can be recovered by adjusting the zero point after installation Vertical installation is recommended to prevent contaminants from accumulating on the sensor unit 9 The event relay functions can be changed using the Smart Loader 10 The minimum load specification is an estimate of the minimum load at which the event relay is able to open and close This value can vary depending on the frequency of operation environmental conditions and the expected reliability level Before actual use a check of the relay s operation using the actual load is recommended SPG6A extra high temperature model Unit mm NW16 coupling type ie jii s i maar 8 VCR coupling type E 1 2 inch gauge port coupling type IDF 2S ferrule coupling type IMPORTANT NOTE If it is necessary to send this device back to Azbil Corporation for repair photocopy the following Safety Sheet fill in the required items and return the sheet with the unit The Safety Sheet is intended to ensure that the customer s product is safe for repair personnel and for the environment
16. ce that work personnel will come in contact with this device after installation take appropriate e Not subject to strong electromagnetic fields e Not an explosive atmosphere and not near flammable fluids Or Stes countermeasures Self heating models E Installation e When wiring the power for this device be sure to install a When connecting this device to the piping always use the master cut off switch for the electrical power within easy specified couplings and gaskets and check for leaks after reach of the operator installation is complete There are no limitations on mounting angle However since a zero shift may occur at some angles be sure to adjust the zero point after installation e Before wiring mounting or removing the SPG5A 6A be sure to turn the power OFF E Wiring Precautions Handling Precautions a Ta e Before starting the wiring work check the model No of this Vibration may move the SPG s pressure sensitive device and the connector pin assignments see page 4 Make diaphragm causing the pressure reading to fluctuate sure that the wiring is correct Therefore take appropriate measures so that this device f is not subject to vibration In particular guard against e Devices or systems to be connected to the SPG5A 6A must vibration that would move the device along its axis have basic insulation sufficient to withstand the maximum e g up and down vibration if the device is mounted operating voltage lev
17. els of the power supply and input ve rtically output components When installing attach the coupling firmly taking care e Use a power supply suitable for instrumentation and make not to apply any force to the case Application of force sure that noise does not adversely affect this device to the case might break the device e Use a power supply with a rated current equal to or greater For a model with a VCR coupling check the cautions in than the maximum power current specified on p 6 of this the instruction manual from the coupling manufacturer document and be sure you understand them fully before starting e Use shielded cables for the wiring the installation work a ae e Be sure to connect a ground wire to the frame ground e This is a precision instrument Do not drop it or bump it against any object Application of any shock to this e Use a power supply connectors and cables with appropriate device might adversely affect its performance ratings for voltage current etc Make sure that the voltage at the connector of this device is within the specified power e If there is a chance that the temperature will exceed voltage range the operating ambient temperature range install an appropriate cooling fan e Take care not to wire incorrectly Wrong wiring may cause device failure e This device does not function for up to 10 s after the power has been turned on Great care should be taken when the relay output from this device
18. evice after installation take appropriate countermeasures Self heating models e Do not use the relays in this device beyond their recommended service life Doing so could cause fire or device failure OVERVIEW The SPG5A 6A is a capacitance diaphragm vacuum gauge that uses a sapphire capacitance pressure sensor to achieve high accu racy and reliability compact size and light weight Self heating and non self heating models are available On self heating mod els the heating temperature can be selected The SPG5A 6A is especially suited for use in semiconductor manufacturing It fea tures the following e A single crystal sapphire pressure sensing medium offering excellent corrosion resistance ability to withstand high temper atures and excellent mechanical characteristics The capacitive measurement design provides high repeatability even when used in a high temperature environment e Small size and light weight achieved by micromachining tech nology e Advanced signal processing technology contributing to excel lent temperature characteristics and linearity of measurement e Microprocessor based digital PID providing fast warm up time and stable sensor temperature control Self heating models A wide range of supply power voltages e Easy zero point adjustment with automatic adjustment button or up down zero adjustment buttons e SLP SP5J60 Smart Loader Package sold separately for easy monitoring of the SPG5A
19. he specified couplings and gaskets After the from accumulating on the sensor unit B8 piping work has been completed check that there are no E_ a in Aeron Tn Install the device in a location with the following Z CAUTION characteristics e Wire the SPG5A 6A properly according to the standards e Not subject to high or low temperature humidity given in this document using the specified power source e Free from sulfide gas or other corrosive gases and installation methods Not doing so might result in fire or device failure lo o e Use the SPG5A 6A within the operating ranges recommended in the specifications for temperature humidity voltage atmosphere etc Using it outside these ranges might cause fire or device failure e Little dust or soot Appropriate protection from direct sunlight wind and rain e Do not allow wire clippings shavings water etc to enter the Little mechanical vibration or shock case of this device They could cause fire or device failure e Not near high voltage lines welding machines or other e The surface of this device is very hot while the power sources of electrical noise is ON and for a while after the power has been e At least 15 meters away from a high voltage ignition device turned OFF To avoid a burn do not touch it during for a boiler this period When removing this device turn the power OFF and allow sufficient time for it to cool If there is a chan
20. nd understand the contents of this user s manual e The burst pressure is the pressure at which this device will break To avoid an accident never apply pressure exceeding the burst pressure e Use the SPG5A 6A within the operating ranges recommended in the specifications temperature humidity voltage atmosphere etc e Do not use this device in explosive atmospheres or near flammable fluids or steam e Always use the specified couplings and gaskets After the piping work has been completed check that there are no gas leaks before operating the device e When wiring the power for this device be sure to install a master cut off switch for the electrical power within easy reach of the operator e Wire the SPG5A 6A properly according to the standards given in this document using the specified power source and installation methods Not doing so might result in fire or device failure e Do not allow wire or solder clippings water etc to enter the case of this device They could cause fire or device failure e Do not the block ventilation holes Doing so might cause fire or device failure e The surface of this device is very hot while the power is ON and for a while after the power has been turned OFF To avoid a burn do not touch it during this period When removing this device turn the power OFF and allow sufficient time for it to cool e If there is a chance that work personnel will come in contact with this d
21. on pressed for 30 s or longer The zero point is adjusted after 3 s and the bias value is reset after 30 s The status LED then flashes alternately green and orange three times Lit alternately red Because of the device conditions auto zero point and orange 3 adjustment and manual zero point adjustment times 0 3 s 0 3s cannot be done For the device conditions see each Handling Precautions of auto zero point adjustment and manual zero point adjustment The bias adjustment value has been reset Lit alternately green and orange 3 times 0 3 s 0 3 Alternating green The event relay is latched 1 and orange with occasional red 1 9 s 0 1 s Lit alternately green and red 0 3 s 0 3 s The device is not powered up 1 Latching of the event relay must be set up with the Smart Loader sold separately 2 Output can be manually controlled with the Smart Loader sold separately MAINTENANCE AND TROUBLESHOOTING E Maintenance Maintenance and inspection e Check that the status LED is green during operation Output is manually controlled 2 e Check periodically that there are no leaks in the piping e Adjust the zero point periodically Cleaning e Use a soft dry cloth e Do not use any organic solvent such as paint thinner or benzene Part replacement Do not disassemble the SPG5A 6A or attempt to replace any of its parts E Alarm displays and corrective actions The follo
22. the selected pressure range 2 The 0 10 V output voltage changes when the up down zero adjustment button is pressed Adjust the output voltage to 0 When the button is pressed the speed at which the 0 10 V value changes depends on how long the button is pressed Keep it pressed for a long time to do a quick rough adjustment Afterwards press it repeatedly for a short time to make fine adjustments e During adjustment using the up down zero point butt on e If the bias adjustment value is within 5 FS the status LED flashes green e If the bias adjustment value is between 5 and 20 FS the status LED flashes orange e The status LED stops flashing about 3 s after the up down zero point adjustment button is released and the bias adjustment value is then set e Zero adjustment is restricted to the range in which the bias adjustment value is 20 FS If the bias adjustment value reaches 20 FS as the up down zero point adjustment button is pressed the status LED flashes red C Handling Precautions Manual zero point adjustment cannot be done in the following cases even if the button is pressed Before warm up is complete If an error occurs Ifthe pressure value exceeds the measurement range In these cases the status LED flashes alternately red and orange three times Resetting of bias adjustment value To reset the bias adjustment value to its factory setting keep the auto zero point adjustment butt
23. ue is beyond E Status LED display operation Lit green Normal operation status after warm up Warm up in progress device temperature is not yet stable Lit red Abnormal status a problem with the device Lit orange Abnormal status operating environment problem such as excessive ambient temperature or wrong power voltage Automatic zero point adjustment by pressing the auto zero point adjustment button is complete and the bias adjustment value is within 5 FS 3 orange flashes Automatic zero point adjustment by pressing the 0 3 s 0 3 s auto zero point adjustment button is complete The bias adjustment value is between 5 and 20 FS The zero point is being adjusted with the up down zero point adjustment buttons The bias adjustment value is within 5 FS Flashing orange The zero point is being adjusted with the up down 0 1 s 0 1 s zero point adjustment buttons The bias adjustment value is between 5 and 20 FS During zero point adjustment with the up down zero point adjustment buttons the bias adjustment value reached the maximum adjustable range of 20 FS Flashing red 0 3 s 0 3 s 3 green flashes 0 3 s 0 3 s Flashing green 0 1 s 0 1 s Flashing red 0 1 s 0 1 s 20 FS In these cases the status LED flashes alternately red and orange three times Manual zero point adjustment 1 Apply a vacuum with a pressure of 1 20 000 or less of
24. wing table shows the alarm displays and corrective actions to take if there is a problem Status LED Flashing red Status Possible Causes Temperature of electronic circuits Temperature of sensor head Heater temperature error Self heating control error Wrong supply power voltage Action Turn off the power and check the power voltage ambient temperature and other operating conditions Failure e Heater wire break Turn off the power and E Troubleshooting Status LED does Check that the wiring is connected correctly not light up eCheck that the power voltage and polarity are correct Output value fluctuates e Check that the wiring Adjust the zero point contact the azbil Group or your dealer agent or salesperson The device needs to be repaired by Azbil Corporation Memory failure Electronic circuit failure Important notice If you send this device to Azbil Corporation for repair fill out the Safety Sheet on page 8 and include it with the device SPECIFICATIONS Items Specifications Pressure range Self heating temperature Accuracy As specified in the model selection table 0 25 of rdg No self heating or self heating temperature under 160 C 0 5 of rdg Models with self heating temperature of 160 C or more is connected correctly DISPOSAL When disposing of this device dispose of it appropriately as industrial waste in
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