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Brooks Instrument SLA7900 User Manual

1. I INLET 1 00 254 OUTLET f oo DETAIL 10 87 856 I 3 aa ls To 187 4 75 16 17 4 0 4 3 29 7 37 CBORE x 0 024 0 61 DEEP 2 PLACES 3 622 THRU 4 PLACES 92 00 MEM Outline drawing is identical to the MFC except without the valve 1 4 MVCR CONNECTION 5 PIN MALE MICRO DEVICENET CONNECTOR M12 X 1 OUTSIDE THREAD SEE DETAIL 1 4 MVCR a CONNECTION 3 92 OUTLET OL LO 1 12 28 6 50 12 7 92 3 488 124 0 8 32 UNC 2B X 0 18 4 6 DEEP MOUNTING HOLES 950 24 13 2 PLACES Zur 750 19 08 INCH MM MFM Outline drawing is identical to the MFC except without the valve DETAIL Figure 1 7 Model SLA7950D MFC DeviceNet Digital I O with VCR Fittings Section 1 Introduction Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 15 PIN MALE D CONNECTOR SEE DETAIL ZER
2. 50 92 gt 124 28 4 124 0 8 32 UNC 2B J y x0 18 alper 950 24 13 D CONNECTOR CONNECTIONS MOUNTING HOLES PIN FUNCTION 2 PLACES 0 VALVE OVERRIDE FLOW SIGNAL OUT POWER SUPPLY 13 5 VDC TO 27 VDC POWER SUPPLY COMMON NOT CONNECTED SETPOINT IN SIGNAL COMMON SETPOINT COMMON NIC A Jg T 750 INCH MM 9 08 t 1 900 MFM Outline drawing is identical to the MFC except without the valve ooo junio 9 PIN MALE D CONNECTOR a SEE DETAIL Le ZERO BUTTON OUTLET 9 PIN MALE D CONNECTOR DETAIL D CONNECTOR CONNECTIONS FUNCTION VALVE OVERRIDE FLOW SIGNAL OUT POWER SUPPLY 13 5 VDC TO 2 POWER SUPPLY COMMON 15V SETPOINT IN SIGNAL COMMON SETPOINT COMMON N C 10 87 Zz E 856 21 74 16 17 4 0 4 3 29 7 37 C BORE X 0 024 0 61 DEEP 187 4 75 2 PLACES THRU 4 PLACES 92 00 ooft n MFM Outline drawing is identical to the MFC except without the valve Figure 1 3 Model SLA7950S MFC Analog I O 9 pin D Connector with Downport Connections C seal Section 1 Intro
3. Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series Dear Customer We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device Every day flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low flow applications Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals oil and gas fuel cell research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service We recommend that you read this manual in its entirety Should you require any additional information concerning Brooks products and services please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www BrooksInstrument com Yours sincerely Brooks Instrument Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual Cont
4. 1 Remove power from the SLA7950S 2 Remove cover ofthe SLA7950S by removing the screw on the top of the device and sliding the cover upwards 3 Plug the converter onto the desired communications port of your PC 4 Plug the 9 pin D connector on the cable to the converter 5 Plug the cable onto the service port as shown in Figure B 4 6 Restore power to the SLA7950S L Figure B 4 Connecting to the SLA7950S Service Port B 4 Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AHG August 2009 Using the Zero Drift Diagnostic Configuration Tool Important The ZDDCT will only connect to SLA7950S MFC s that have been purchased with the Zero Drift Diagnostic feature Configuring the ZDD using the Zero Drift Diagnostic Configuration Tool ZDDCT is accomplished in 4 easy steps 1 Select Communications Port 2 Select Product 3 Configure the ZDD parameters 4 Send the configuration to the device The ZDDCT main panel is shown in Figure B 5 Some helpful tips on using this application are Holding the cursor over a control for 1 second will reveal help about that control For pull down type boxes hold mouse pointer over the pull down arrow 6 The user will be limited to entering valid values for each control To determine the range of valid values for a control activate the control s help as described above To reveal the About window right click on the main window
5. f Part Number 541B022AAG SLA7900 Series August 2009 3 3 Features AE AAA Note All Model SLA7950 mass flow controllers are configured at the factory according to customer order and do not require adjustment Not all features are available on all instruments The Model SLA7950 is a full featured digital MFC The Model SLA7950 performs much like a traditional analog MFC but with improved accuracy step response and valve control The analog interface matches that of Brooks popular analog MFCs so the Model SLA7950 can be retrofitted into tools using analog MFCs Other versions of the Model SLA7950 can provide a variety of digital protocols for example DeviceNet The Model SLA7950 is capable of storing up to 10 different sets of gas calibration data Each set includes a calibration curve PID controller settings valve performance data and information about the calibration conditions The Model SLA7950 can contain calibrations for different gases or for the same gas at multiple conditions pressures full scale flow rates Section 3 5 Analog Mode of Operation describes more information about the data contained in the calibration table and how to access the data Calibrations will appear in the calibration table in the same order as they appeared on the Model SLA7950 customer order unless otherwise specified The first listed gas will appear as calibration 1 the second as calibration 2 and so on Note that unless specified otherwise o
6. sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektromagnetisk kompabilitet EMC direktiv 89 336 EEC Speciell h nsyn m ste emellertid tas vid val av signalkabel som ska anv ndas tillsammans med CE m rkt utrustning Kvalitet p signalkabel och anslutningskontakter Brooks levererar som standard kablar av h g kvalitet som motsvarar de krav som st lls f r CE godk nnande Om man anv nder en annan signalkabel ska kabeln i sin helhet vara sk rmad till 100 D eller runda typer av anslutningskontakter ska vara sk rmade Kabelgenomf ringar ska vara av metall alternativt med metalliserad sk rmning Kabelns sk rm ska i bada ndar vara ansluten till kontakternas metallk por eller genomf ringar med 360 graders sk rmning Sk rmen ska avslutas med en jordf rbindelse Kortkontakter r som standard ej metalliserade kablar som anv nds m ste vara 100 skarmade f r att verensst mma med CE certifieringen Sk rmen ska avslutas med en jordf rbindelse F r elektrisk anslut
7. Part Number 541B022AAG f August 2009 SLA7900 Series 2 7 Gas Connections A AAA A A Ee Standard inlet and outlet connections supplied on the Model SLA7900 Series are 1 4 M VCR or Downport surface mount per Semi 2787 or Semi F82 0304 Prior to installation ensure all piping is clean and free from obstructions Install piping in such a manner that permits easy access to the instrument if removal becomes necessary 2 8 In Line Filter su ss Gees It is recommended that an in line filter be installed upstream from the mass flow controller to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter 1 to 5 sipm 1010 30 sipm 30 to 50 slom 40 micron 2 9 Installation CAUTION When installing the Mass Flow Controller or Meter care should be taken that no foreign materials enter the inlet or outlet of the instrument Do not remove the protective end caps until the time of installation CAUTION Any sudden change in system pressure may cause mechanical damage to elastomer materials Damage can occur when there is a rapid expansion of fluid that has permeated elastomer materials The user must take the necessary precautions to avoid such conditions Recommended installation procedures a The SLA7900 Series device should be locate
8. The out of box default setting is 125K baud For more complete details on these switches reference the DeviceNet supplement instruction manual X DeviceNet MFC eng Part Number 541BO59AHG Analog or DeviceNet Version What is the purpose of the recessed push button on the side of the MFC This push button is used to start a self zero function Do NOT press this button unless you are performing this function as described in the Section 3 5 F ACAUTION The sensor of the Model 7850 and Model 7860 is not removable Do not attempt to disassemble or remove the sensor from the body Removing the two hold down screws may cause irreparable damage to the sensor tube and leakage of the process gas Installation and Operation Manual Section 4 Maintenance amp X TMF SLA7900 MFC eng Troubleshooting Part Number 541B022AAG f August 2009 SLA7900 Series Table 4 1 Sensor Troubleshooting SENSOR SCHEMATIC 1234567 Heater Connector Upstream u Temperature Sensor Su Downstream Temperature Sensor Sd 4 Sensor Common Flex Circuit Wire Numbers Remove the sensor connector from the PC Board for this procedure OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter If either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an onmmeter reading will be obtained Pin 4 to Pin 2 Nominal 1100 ohms reading depending on Pin 4 to Pin 3 temperature and ohmmeter current P
9. and thus prevent false drift detection The user can configure the interlock delay to any value in the range of 1 to 99 9 minutes Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AHG August 2009 The user may specify the error limit that the Zero Drift Diagnostic will allow before notifying the user that a zero drift has been detected The error limit can be set to any value in the range 0 5 to 100 of full scale The SLA7950S has a temperature zero drift specification of 0 035 per C Therefore it is possible for the flow signal drift to exceed a user specified error limit of 0 5 with a 14 28 C change in temperature as compared to the temperature of the device when it was last zeroed To prevent undesired drift detection a feature is provided which adjusts the allowable error limit for temperature as shown in Figure B 3 When this feature is enabled the Zero Drift Diagnostic will never detect drift if the drift does not exceed the zero drift specification of 0 035 per C Figure B 3 is an example of effect of the Adjust Error Limit for Temperature feature Inthis example the user has specified an error limit value of 1 of full scale Ifthe Adjust Error Limit for Temperature feature is disabled flow signal values that exceed 1 pink and yellow areas would be detected as drift However ifthe Adjust Error Limit for Temperature feature is enabled then the flow values that exceed 1
10. 2 11 Operation Check Procedure Analog I O A A A Mount the MFC in its final orientation Apply power to the MFC and allow approximately one hour for the instrument to warm up and stabilize its temperature c Do NOT supply gas to the MFC Ensure that the differential pressure across the MFC is zero d Check the MFC zero The analog output signal should be equivalent to 0 0 0 2 FS 0 000 0 010 Vdc If the zero exceeds one of these limits follow the re zeroing procedure in Section 3 5 f Turn on the gas supply A positive flow signal may be present due to valve leak thru At 0 setpoint the flow signal output lt 0 5 FS g If flow signal at 0 setpoint is gt 0 5 then there is too much leak through across valve seat and orifice MFC would need to be reworked to adjust valve shutoff h Supply a setpoint voltage between 1 and 5 Vdc i Check the MFC analog output signal The output voltage signal should match the setpoint voltage 20mV within 10 seconds after the setpoint is changed If flow output signal does not match setpoint and pressure settings are correct this could indicate a problem in the MFC A secondary issue could be the gas type When checking with a surrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas Example Checking an MFC calibrated for 100 sccm SF6 sulfur hexafluoride The sensor factor using N nitrogen is 0
11. 27 therefore the equivalent N needed is 100 0 27 370 4 sccm This may require a pressure increase to make this flow rate 2 9 2 10 Section 2 Installation Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 2 12 Electrical Interface DeviceNet 1 0 Power and network signals are interfaced to the MFC through the standard 5 pin Micro connector on the device This connector is specified in the DeviceNet Specification Vol 1 Section 9 3 6 3 and is defined as a male sealed micro style connector The figure below illustrates the electrical connections to the device DETAIL Figure 2 7 5 pin Shielded Cable Hookup Diagram Voltage I O Versions Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 2 Installation SLA7900 Series 2 13 Operation Check Procedure DeviceNet 1 0 RA AAA A OTT a b Mount the MFC in its final orientation Apply power to the MFC and allow approximately one hour for the instrument to warm up and stabilize its temperature Do NOT supply gas to the MFC Ensure that the differential pressure across the MFC is zero Check the MFC zero The output signal should be equivalent to 0 0 0 2 FS in the appropriate DeviceNet units of measure UOM If the zero exceeds one of these limits follow the re zeroing procedure in Section 3 5 Turn on the gas supply A positive
12. De tilh rende flatkabler m v re utf rt med fullstendig 100 skjerming som kobles til elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruc es Refer ncia Certificac o CE do Equipamento de Fluxo de Massa Data S Janeiro de 1996 O equipamento el ctrico electr nico Brooks com a marca CE foi testado com xito nos termos do regulamento da Compatibilidade Electromagn tica directiva CEM 89 336 EEC Todavia ao seleccionar se o cabo de sinal a utilizar com equipamento contendo a marca CE ser necess rio ter uma atenc o especial Qualidade do cabo de sinal buchas de cabo e conectores A Brooks fornece cabo s de qualidade superior que cumprem os requesitos da certificac o CE Se fornecerem o vosso pr prio cabo de sinal devem utilizar um cabo que na sua totalidade seja isolado com uma blindagem de 100 Os conectores tipo D ou Circulares devem ser blindados com uma blindagem met lica Se tal for necess rio deve utilizar se buchas met licas de cabo para o isolamento do aperto do cabo O isolamento do cabo deve ser ligado a blindagem ou bucha met lica em ambas as extremidades em 360 A blindagem deve terminar com a ligac o massa Os conectores Card Edge
13. Flow Part Number Low High ACIFE Wire Mesh S110Z275BMG S110Z278BMG S110Z280BMG S110Z283BMG S110Z285BMG S110Z286BMG S110Z287BMG S110Z290BMG S110Z292BMG S110Z317BMG S110Z226BMG S110Z417BMG D G J M P Q R U W 1 3 5 Materials BMG 316 Stainless Steel Electropolished NOTES If two sizes are allowed because of overlap select the larger size Restrictor size not required to enter order Installation and Operation Manual Section A X TMF SLA7900 MFC eng CE Certification of Mass Flow Equipment Part Number 541B022AAG f August 2009 SLA7900 Series Dansk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Emne Till g til instruktions manual Reference CE meerkning af Masse Flow udstyr Dato Januar 1996 Brooks Instrument har gennemf rt CE m rkning af elektronisk udstyr med succes i henhold til regulativet om elektrisk st j EMC direktivet 89 336 EEC Der skal dog g res opmaerksom p benyttelsen af signalkabler i forbindelse med CE m rkede udstyr Kvaliteten af signal kabler og stik Brooks lever kabler af h j kvalitet der im dekommer specifikationerne til CE m rkning Hvis der anvendes andre kabel typer skal der benyttes et sk rmet kabel med hel sk rm med 100 daekning Forbindelses stikket type D eller cirkul re skal v re sk rmet med metalhus og eventuelle PG forskruninger skal enten v re af metal eller metal sk r
14. Likewise the all digital electronics is adaptable and allows the SLA7900 Series to serve as a direct replacement for existing analog products bringing with them greatly improved accuracy and reliability Broad Array of Communication Options Brooks offers traditional 0 5 volt and 4 20 mA analog options as well as RS 485 digital communications S protocol based on HART Brooks also offers control interface with DeviceNet a high speed up to 500k baud digital communication network Brooks communication capabilities and device profiles have been certified by the ODVA Open DeviceNet Vendor s Association Other network protocols are in development Talk to your Brooks representative about your specific needs Section 1 Introduction SLA7900 Series 1 4 Specifications Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Reduced Cost of Ownership The SLA7900 Series allows multi gas and multi range capabilities to reduce customer inventory Storage and pre programming of up to 10 gas calibrations easily permits users to switch between different gases and ranges on a single device Also the greater control range provided by the coplanar valve gives users the option to decrease the number of parts needed to control their entire process either analog or digital modes reducing measurement errors resulting from property differences between process gases and the calibration gas Z
15. alarm condition To clear this condition the MFC must be zeroed or the power cycled Safe State is defined as valve closed and flow signal set to 0 0 The default value for Safe State Enable is Disabled B 7 Section B Zero Drift Diagnostic on SLA7950S SLA7900 Series Step 4 Press the Send button to send the configuration B 8 tothe device The parameters inthe SLA7950S will be updated with the values as configured during step 3 When the parameters have all been successfully written and verified the following dialog box will appear Device successfully configured Errors are unlikely to occur during this process however if an error is encountered a dialog box will be displayed detailing the nature of the problem Verify thatthe device is still connected properly and that the device is still powered Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AHG August 2009 Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until
16. and elastomeric seals gaskets O rings and valve seats may change with age exposure to process fluid temperature and or pressure WARNING If it becomes necessary to remove the instrument from the system power to the device must be disconnected 4 1 Section 4 Maintenance amp Installation and Operation Manual Troubleshooting X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 4 2 Troubleshooting WARNING If it becomes necessary to remove the flowmeter from the system after exposure to toxic pyrophoric flammable or corrosive gas purge the flowmeter thoroughly with a dry inert gas such as Nitrogen before disconnecting the gas connections Failure to correctly purge the flowmeter could result in fire explosion or death Corrosion or contamination of the flowmeter upon exposure to air may also occur A CAUTION It is important that this device only be serviced by properly trained and qualified personnel ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of internal circuit boards or devices Analog or DeviceNet Version This section contains suggestions to help diagnose MFC related problems in the gas distribution system and answers commonly asked questions Failure of the flow rate or flow signal to achieve th
17. critical fault has occurred in the MFC Please contact the factory for instructions 4 3 4 4 Section 4 Maintenance amp Troubleshooting Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 DeviceNet Version What is the purpose of the LED s on top of the SLA7900 Series MFC There are two LED s on top of a DevcieNet version MFC The LED labeled MOD is used to indicate Module status This LED should normally be lit GREEN If the MOD LED is lit RED this signifies a critical fault has occurred in the MFC Please contact the factory for instructions The LED labeled NET is used to indicate NETWORK status Note the NET LED can have 4 distinct operational states For more complete details on these LED s reference the DeviceNet supplement instruction manual X DeviceNet MFC eng Part Number 541B059AHG What is the purpose of the Rotary Switchess on top of the SLA7900 Series MFC Two of the rotary switches are labeled ADDRESS These two switches are used to configure the MAC ID of MFC when used on the DeviceNet network MAC ID stands for Media Access Control Identifier and is used to set the unique address of the device on the network The possible range of addresses is 00 to 63 The out of box MAC ID setting is 63 The third rotary switch is labeled RATE This switch sets the baud rate of the MFC for communicating over the DeviceNet network
18. de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Installation and Operation Manual Section A X TMF SLA7900 MFC eng CE Certification of Mass Flow Equipment Part Number 541B022AAG f August 2009 SLA7900 Series Norsk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Vedr rende Vedlegg til handbok Referanse CE sertifisering av utstyr for massestromsm ling og regulering Dato Januar 1996 Til den det angar Brooks Instrument elektrisk og elektronisk utstyr p f rt CE merket har gjennomg tt og best tt pr ver som beskrevet i EMC forskrift om elektromagnetisk immunitet direktiv 89 336 EEC For opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering Dersom kunden selv velger kabel m kabel med fullstendig 100 skjerming av lederene benyttes D type og runde plugger og forbindelser m v re utf rt med kappe i metall og kabelnipler m v re utf rt i metall for jordet innfesting av skjermen Skjermen i kabelen m tilknyttes metallet i pluggen eller nippelen i begge ender over 360 tilkoblet elektrisk jord Kort kantkontakter er normalt utf rt i kunststoff
19. held to 15 Vdc the valve will be forced to its most open state 3 3 3 4 Section 3 Operation SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 F Zeroing the MFC Self zero It may be desirable to re zero the flow sensor if it is operated at its temperature extremes or if it is positioned in an attitude other than that specified on the customer order Note Before zeroing the instrument zero pressure differential MUST be established across the device If there is pressure across the instrument during the zero process any detected flow through the sensor will be misinterpreted as the zero flow reading This will result in calibration inaccuracy during normal operation Once zero differential pressure is established and verified press the recessed momentary push button Self zero button located on the side of the device see Fig 3 2 to start the Self zero function The zero process requires approximately 500 milliseconds During this time the device will set its output signal to 0 0 Vdc ZERO BUTTON Figure 3 2 Externally Accessible Adjustment Installation and Operation Manual Section 3 Operation X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series READOUT PRE y DEVICE SOURCE MODEL SLA7900 Series 5 VOLT FLOW Ee FLOW SIGNAL REFERENCE SENSOR AMPLIFIER OUTPUT FLOW V ERROR CONT
20. provide cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 degrees The shield should be terminated to an earth ground See Appendix A for CE Certification of Mass Flow Equipment 2 5 Section 2 Installation Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 For a DeviceNet unit 11 25 Vdc power and communication I O are supplied via the standard 5 pin Circular Micro Connector SIDE SUB D 15 PIN PIN COLOR Flow Signal 0 1 5 volt Output 6 9 3 I 14 6 Not Connected BLUE Setpoint 0 4 20 mA Input 5 3 _ Setpoint 0 1 5 volt Input ta 9 ower Supply Common GRN BIK 8 10 Flow Signal Common Output ORG BLK Brooks Read Out Models 0151 0152 0154 0254 Figure 2 1 15 pin D Connector Shielded Cable Hookup Diagram Voltage i S Setpoint v Note 2 0QO000000 Input 090000 Ret Power Supply 13 5 27 Vdc Com Voltage Output Signal Output Return Indicator or Receiver Voltage Signal Setpoint and Output Notes 1 The returns for the command input and current output are not isolated from power supply common 2 Tie cable shields to ground at one end only MFC only 3 Current and Voltage I O may not be used simultaneously
21. signal which matches the setpoint Flow rate in excess of 100 at zero setpoint 6 Valve Override pin set to open If valve override VOR pin is active the valve will be forced open or closed Set this pin to its normal level before setting a setpoint Flow Flow signal unstable 7 Model SLA7950 Series MFC performance is tuned during calibration at the conditions specified on the order If the conditions in use inlet and outlet pressure temperature attitude gas or mixture type are different or become different over time the MFC may not perform as it did when it left the factory DeviceNet Version Only Failure of the flow rate or flow signal to achieve the setpoint 8 Specifically for a DevcieNet MFC there may be problems associated with the network communication link One common problem is due to data type mismatches of the Input Output NO Assemblies For proper communication over the DeviceNet network the MFC must be set up with the same NO Assembly as the network master Confirm these NO settings are correct Note this information and all other detailed DeviceNet information is available in the DeviceNet supplement instruction manual X DeviceNet MFC eng Part Number 541B059AHG Questions Analog Version What is the purpose of the LED on top of the SLA7900 Series MFC The LED on top of the MFC should normally be lit GREEN This signifies the MFC is in proper working mode If the LED is lit RED this signifies a
22. the Zero Drift Diagnostic The user may select Disabled Warning or Alarm When set to Warning the Alarm LED will display the specified flash code in Green when drift has been detected When set to Alarm the Alarm LED will display the specified flash code in Red Flash Code This parameter sets the code that is flashed on the Alarm LED when a drift condition has been detected The code is displayed as a set of flashes at a second interval followed by a 1 second interval To determine the alarm type observe the Alarm LED until the 1 second interval occurs then count the number of flashes before the next 1 second interval The default value for Flash Code is 13 Latching Enable If selected the warning alarm condition will displayed even ifthe Zero Drift condition goes away This latched warning alarm condition is cleared at the end of each Interlock Delay Installation and Operation Manual Section B X TMF SLA7900 MFC eng Zero Drift Diagnostic on SLA7950S Part Number 541B022AHG August 2009 SLA7900 Series Contact Enable If selected a warning alarm condition will cause the open collector output at pin 3 of the device s 15 pin D connector to be active closed Note that the alarm output is shared among all alarms and that other alarms may also be configured to activate the alarm output If this is the case it is not possible to detect the type of alarm that activated the alarm contact by monitoring the
23. title bar and select About ZDDCT Installation and Operation Manual Section B X TMF SLA7900 MFC eng Zero Drift Diagnostic on SLA7950S Part Number 541B022AHG August 2009 SLA7900 Series Zero Drift Dignostic Configuration Tool Step 1 Select Communication Port COM1 D Step 2 Select Product SLA79505 v Step 3 Configure Enable 1 D Flash Code 13 Latch Enable jo y Contact Enable jo Error Limit 1 Adjust Error Limit jo v For Temperature Alarm Delay 11 0 Interlock Delay 15 0 Safe State Enable 1 Step 4 Send Figure B 5 About ZDDCT Window Step 1 Begin the configuration of the Zero Drift Diagnostic by selecting the appropriate serial communications port The ZDDCT automatically detects all available COM ports and displays them in the Select Communications Port pull down box Select the COM port that the SLA7950S MFC to be configured is connected to The ZDDCT supports USB to RS 232 communications ports as well as all built in COM ports If the desired COM port is not displayed in the pull down box verify that the COM port is not in use by another application The status of all installed COM ports can be verified in the Windows Device Manager B 5 Section B Zero Drift Diagnostic on SLA7950S SLA7900 Series Step2 Selectthe type of Brooks MFC to be configured by using the Select product pull down The ZDDCT will attempt to co
24. 2 6 Figure 2 2 Common Electrical Hookups for 15 pin D Connector Voltage I O Version Installation and Operation Manual Section 2 Installation X TMF SLA7900 MFC eng Part Number 541B022AAG f August 2009 SLA7900 Series SETPOINT CONTROLLER 0 4 20 mA Current Source with 0 4 20 mA Non Isolated Loop Power Supply Flow Signal Output 4 Hun 1 j Customer SP COM 0 Load 9 PWRCOM gt I I I I I I I I I I Note Setpoint common flow signal output common and power supply common are connected internally in the MFC Reference Brook s device specifications for power supply voltage and setpoint input impedance Input The 4 20 mA setpoint signal is driven into the MFC input using a controlled source Output The 4 20 mA output signal is sourced by the MFC into the customer load Figure 2 3 Recommended Wiring Configuration for Current Signals Non Isolated Power Supply SETPOINT CONTROLLER 0 4 20 mA Current Source with 0 4 20 mA Isolated Loop Power Supply Flow Signal 3 4 a Output o p Customer 1 SP COM gt Load PWRCOM Note Setpoint common flow signal output common and power supply common are connected internally in the MFC Reference Brook s device specifications for power supply voltage and setpoint input impedance Input The 4 20
25. AIL ZERO BUTTON gt 15 PIN MALE D 110 6 CONNECTOR DETAIL 3 63 92 2 INLET OUTLET 1 00 1 00 25 4 25 4 428 D CONNECTOR CONNECTIONS El 0 84 FUNCTION SETPOINT COMMON INPUT gt FLOW SIGNAL 0 1 5 VDC OUTPUT TTLALARM OPEN COLLECTOR OUTPUT FLOW SIGNAL 0 4 20 MA OUTPUT 46 17 4 0 4 3 POWER SUPPLY 13 5 VDC TO 27 VDC 29 7 37 C BORE SETPOINT 0 4 20 MA INPUT eet esl DEEP SETPOINT 0 1 5 VDC INPUT 3 622 POWER SUPPLY COMMON FLOW SIGNAL OUTPUT COMMON 92 0d REFERENCE 5 VDC OUTPUT VALVE OVERRIDE INPUT CALIBRATION SELECT INPUT RS 485 B INPUT OUTPUT RS 485 INPUT OUTPUT 856 21 74 2r to A 187 4 75 THRU 4 PLACES HO ik MFM Outline drawing is identical to the MFC except without the valve Figure 1 5 Model SLA7950S MFC Analog I O 15 pin D Connector with Downport Connections C seal Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 5 PIN MALE MICRO DEVICENET CONNECTOR M12 X 1 OUTSIDE THREAD SEE DETAIL Section 1 Introduction SLA7900 Series ZERO BUTTON 29 ra
26. Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Brooks Models SLA7950 SLA7960 Mass Flow Controllers 8 Meters Model SLA7950S Analog I O Model SLA7950S 9 pin D Connector 4 5 Analog VO VCR Fittings 15 pin D Connector VCR Fittings Model SLA7950D Digital VO DeviceNet Downport BROOKS www BrooksInstrument com INSTRUMENT Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Essential Instructions Read this page before proceeding Brooks Instrument designs manufactures and tests its products to meet many national and international standards Because these instruments are sophisticated technical products you must properly install use and maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into your safety program when installing using and maintaining Brooks Products Read all instructions prior to installing operating and servicing the product If this instruction manual is not the correct manual please see back cover for local sales office contact information Save this instruction manual for future reference If you do not understand any of the instructions contact your Brooks Instrument representative for clarification Follow all warnings cautions and instructions marked on and supplied with the product Inform and
27. Less than 0 1 of rate per C Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 1 Introduction SLA7900 Series RATINGS Pressure Equipment Directive PED 97 23 EC See Table 1 Table 1 PED Rating Mass Flow Flow Ranges Pressure PED Module H Controller N2 Equivalent Ratings Category Models Min f s Max f s Unit Bar SLA7950 3 0 50 000 sccm 100 Bar SEP SLA7960 Mounting Attitude Sensitivity 0 2 of FS maximum deviation after rezeroing Valve Leak By lt 0 5 F S Leak Integrity Inboard to Outboard less than 1x10 atm scc sec Helium max Ambient Temperature Limits Operating 0 C to 65 C 32 F to 149 F Non Operating 25 C to 100 C 13 F to 212 F Maximum Operating Pressure Range 1500 psig 10 342 kPa maximum 150 psig 106 2 kPa and below recommended for best performance Differential Pressure Range 5 50 psid broader depending on customer conditions consult factory for details 34 5 344 7 kPa 259 2586 torr Particulate Zero particles per cubic foot greater than 0 1 microns under process conditions Less than 4 particles per cubic foot greater than 0 02 microns under process conditions PHYSICAL CAUTION It is the user s responsibility to select and approve all materials of construction Careful attention to metallurgy engineered materials and elastomeric materials is critical to sa
28. O BUTTON r 15 PIN MALE D 112 3 CONNECTOR DETAIL 3 93 8 OUTLET I 1 12 28 6 Y i D 219 5 56 THRU 4 PLACES rn 591 D CONNECTOR CONNECTIONS 15 og FUNCTION Beal gt SETPOINT COMMON INPUT FLOW SIGNAL 0 1 5 VDC OUTPUT 1 181 TTLALARM OPEN COLLECTOR OUTPUT gt FLOW SIGNAL 0 4 20 MA OUTPUT 30 00 PN POWER SUPPLY 13 5 VDC TO 27 VDC y 0 W SEAL DOWNPORT NOT CONNECTED PER SEMI 2787 4 SETPOINT 0 4 20 MA INPUT W SEAL DOWNPORT SETPOINT 0 1 5 VDC INPUT PER SEMI 2787 4 POWER SUPPLY COMMON FLOW SIGNAL OUTPUT COMMON REFERENCE 5 VDC OUTPUT VALVE OVERRIDE INPUT CALIBRATION SELECT INPUT RS 485 B INPUT OUTPUT RS 485 A INPUT OUTPUT Installation and Operation Manual Section 2 Installation X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series 2 1 General AAA A zz zw Ze This section provides installation instructions for the Brooks SLA7900 Series Figures 1 1 through Figure 1 7 show the SLA7900 series dimensions gas connections and electrical connection locations for an MFC 2 2 Receipt of Equipment FER ee When the instrument is received the outsid
29. ROL AMPLIFIER VALVE VALVE OVERRIDE OVERRIDE INPUT LOGIC POWER SUPPLY Figure 3 3 Flow Control System Block Diagram 3 6 Section 3 Operation SLA7900 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Installation and Operation Manual Section 4 Maintenance amp X TMF SLA7900 MFC eng Troubleshooting Part Number 541B022AAG August 2009 SLA7900 Series 4 1 Overview No routine maintenance is required on the SLA7900 Series devices If an in line filter is used the filtering elements should be periodically replaced This section provides the following information e Troubleshooting e Gas Conversion Factors e Orifice Sizing e Restrictor Sizing WARNING METER CONTROLLER SEAL COMPATIBILITY Products in this manual may contain metal or elastomeric seals gaskets O rings or valve seats It is the user s responsibility to select materials that are compatible with their process and process conditions Using materials that are not compatible with the process or process conditions could result in the Meter or Controller leaking process fluid outside the pressure boundary of the device resulting in personnel injury or death It is recommended that the user check the Meter or Controller on a regular schedule to ensure that it is leak free as both metal
30. Transitioning the MFCto safe state is an option available only for the Zero Drift Diagnostic alarm When the Transition to safe state option is enabled and drift is detected the MFC will transition to a safe state which for the SLA7950S means thatthe valve will be closed and the flow signal will be setto zero The Alarm LED will flash the Zero Drift Diagnostic alarm flash code in red and the Status LED will flash red To return the device to normal operational mode press the zero button Afterthe zero operation completes successfully the Status LED will change to solid green and the alarm LED will turn off assuming no other alarms are currently active B 3 Section B Zero Drift Diagnostic on SLA7950S SLA7900 Series Installing the Zero Drift Diagnostic Configuration Tool The Zero Drift Diagnostic Configuration Tool is supplied as a single self installing executable file ZDDCT exe The ZDDCT requires Windows XP Windows 2000 or Windows 95 Run this file and follow the Install Wizard directions When installation is complete run the tool from the Start menu choose All Programs then Brooks Instrument and then select ZDDCT Connecting the Zero Drift Diagnostic Configuration Tool to your SLA7950S MFC Connecting a SLA7950S to a Personal Computer RS 232 serial port requires Brooks cable kit S778D023ZZZ This kit includes a 3 wire cable and a RS 232 converter Follow the procedure below to connectthe SLA7950S to your PC
31. able Hookup Diagram Voltage I O Version urr nennen 2 8 2 6 Common Electrical Hookups for 9 pin D Connector Voltage I O Version 2 8 2 7 5 in Shielded Cable Hookup Diagram Voltage I O Version 2 10 3 1 Flow Sensor Operational Diagram sisi 3 2 3 2 Externally Accessible Adjustment ss 3 4 3 3 Flow Control System Block Diagram sien 3 5 4 1 Bench Troubleshooting Circult czech acces eee tien ellie ea 4 6 B 1 Recommended Shutoff Valve Configuration nennen eenen vene nerennnenrenenneeevennverennnervenneeee nennen B 1 B 2 ZBB lnterlock Timing een hannie nee danken eten ata ketenen B 2 B 3 Error Lis D i eee oleae eee B 3 B 4 Connecting to the SLA7950S Service Port sisi B 4 B 5 About ZDDCT WindOW sche diene en RM Ness B 5 Tables Table Page Number Number 11 PED PRAM EE 1 3 2 1 Recommended Filter Size winner a 2 3 41 Sensor Troubleshooting u ren ee einen 4 5 42 enee e 4 7 4 3 Model SLA7900 Series Standard Restrictors ssssmmusssrrssssrssrerrssrrrssnrrsnnrrssnr rss rn o nn rra nn KRK KKR RR SAR oo 4 8 Installation and Operation Manual Section 1 Introduction X TMF SLA7900 MFC eng Part Number 541B022AAG i August 2009 SLA7900 Series 1 1 Scope ee ef Thank you for purchasing a Brooks Instrument SLA7900 Series device This manual Part Number 541B022AHG is a complete installation and operation manual for your device 1 2 Purpose KSE The Brooks SLA7900 Series are mass flow measurement devices design
32. ale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Onderwerp Addendum voor Instructie Handboek Referentie CE certificering voor Mass Flow Meters amp Controllers Datum Januari 1996 Dames en heren Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit EMC wetgeving volgens 89 336 EEC Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten Kwaliteit van de signaalkabel en kabelaansluitingen Brooks levert standaard kabels met een hoge kwaliteit welke voldoen aan de specificaties voor CE certificering Indien men voorziet in een eigen signaalkabel moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 100 D of ronde kabelconnectoren moeten afgeschermd zijn met een metalen connector kap Indien kabelwartels worden toegepast moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360 met de metalen connectorkap of wartel verbonden worden Het scherm moet worden verbonden met aarde Card edge connectors zijn standaard niet metallisch De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 100 om te voldoen aan
33. ally connected together on the PC board Analog UO Versions e Signal Common e Signal Output Voltage or Current e 13 5 27 Vdc Supply e Setpoint Input Voltage or Current e Setpoint Common e Supply Common e Chassis Ground via unit body Refer to Section 1 for pin connections Refer to Figures 2 1 2 2 2 3 2 4 2 5 2 6 and 2 7 for electrical I O connections The Brook s MFC acts as a current sink to a setpoint input signal The 0 4 20 mA setpoint signal should be driven into the MFC input by a controlled current source Reference Brook s device specifications for the setpoint input impedance The Brook s MFC acts as the current source when providing a 0 4 20 mA output signal to the load The output signal is driven by the MFC into the customer load Reference Brook s device specifications for maximum load capacity ANOTICE The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention is required when selecting the signal cable to be used with CE marked equipment Brooks supplies high quality cables which meet the specifications for CE certification If you provide your own signal cable you should use a cable which is completely screened with a 100 shield D Connectors should also be shielded using a metal shield If applicable metal cable glands must be used to
34. and exceed the allowable drift due to temperature pink area would be detected as drift Setpoint Flow Signal Flow interlock Delay Alarm Anunciated Error Limit Alarm Delay Figure B 2 ZDD Interlock Timing B 2 Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AHG August 2009 Section B Zero Drift Diagnostic on SLA7950S SLA7900 Series B or 1 4 1 0 1 0 1 4 Tzero 40 re zero event Customer adjustable error limits 0 5 to 1 0 Diagnostic Triggered Thermal error limits DISABLED Diagnostic Triggered Thermal error limits ENABLED Every time customer re zeros the device Tzero moves to reflect ambient conditions at the time of the Tzero 40 Figure B 3 Error Limits Once drift beyond the allowed limits has been detected the SLA7950S alarms are utilized to notify the user The Zero Drift Diagnostic alarm allows the user several options to configure howthe user is notified The options are 1 Flash the Alarm LED red for alarm green for warning 2 Activate the alarm output pin 3 3 Transition the MFC to safe state Flashingthe alarm LED and closingthe alarm contactare standard alarm features on the SLA7950S When drift is detected the alarm LED will flash the Zero Drift Diagnostic alarm flash code 13 unless changed by the user The alarm contact will also be closed if the option is enabled
35. d in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for access to Self zero function push button c Install in such a manner that permits easy removal if the instrument requires servicing 2 3 Section 2 Installation Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 ACAUTION When used with a reactive sometimes toxic gas contamination or corrosion may occur as a result of plumbing leaks or improper purging Plumbing should be checked carefully for leaks and the instrument purged with clean dry N before use d The SLA7900 Series device can be installed in any position However mounting in orientations other than the original factory calibration see calibration data sheet supplied with the instrument can result in a 0 2 maximum full scale shift after rezeroing ACAUTION Use caution when installing surface mount downported controllers Most metal seals can not be reused after compression Follow the seal manufacturers recommendations for installation Tighten the mounting screws in 10in Ib 1 1 n m increments such that the seal undergoes uniform compression Final torque values depends on the screw and hardware material and lubrication e When installing a mass flow controller with 1 4 m VCR end fittings and with full scale flow rates of 10 slpm or greater be aware that sharp abrupt angles in the sys
36. d with a 100 shield D or Circular type connectors used should be shielded with a metal shield If applicable metal cable glands must be used providing cable screen clamping The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees The shield should be terminated to a earth ground Card Edge Connectors are standard non metallic The cables used must be screened with 100 shield to comply with CE certification The shield should be terminated to a earth ground For pin configuration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto S Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipos de Brooks el ctricos electr nicos en relaci n con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magn tica EMC directiva 89 336 EEC Sin embargo se requiere una atenci n especial en el momento de seleccionar el cable de se al cuando se va a utilizar un equipo con marca CE Calidad del cable de se al prensaestopas y conectores Brooks suministra cable s de alta calidad que cumple las especificaciones de la certificaci n CE Si usted adquiere su propio cable de se al deber a usar un cable que est completamente protegido en su conjunto con un apa
37. duction Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 114 MVCR 1 4 MVCR CONNECTION CONNECTION 15 PIN MALE 15 PIN MALE D D CONNECTOR CONNECTOR DETAIL SEE DETAIL D CONNECTOR CONNECTIONS FUNCTION SETPOINT COMMON INPUT OUTLET FLOW SIGNAL 0 1 5 VDC OUTPUT S TTLALARM OPEN COLLECTOR OUTPUT OJO FLOW SIGNAL 0 4 20 MA OUTPUT or RUE POWER SUPPLY 15 VDC TO 28 VDC NOT CONNECTED 2 SETPOINT 0 4 20 MA INPUT L 50 k 363 923 SETPOINT 0 1 5 VDC INPUT gt 10 e 127 POWER SUPPLY COMMON ss 488 140 gt FLOW SIGNAL OUTPUT COMMON i REFERENCE 5 VDC OUTPUT 8 32 UNC 2B a gt VALVE OVERRIDE INPUT X 0 18 4 6 DEEP sel lu 13 a 52 CALIBRATION SELECT INPUT MOUNTING HOLES RS 485 B INPUT OUTPUT I 2 PLACES d ha H RS 485 A INPUTIOUTPUT IN A JE i INCH 750 Mu 1905 190 4826 MFM Outline drawing is identical to the MFC except without the valve y 15 PIN MALE D CONNECTOR SEE DET
38. e in thousandths of an inch When changing the gas operating pressure inlet or outlet or flow range consult the factory for re sizing information Table 4 2 Orifice Capacities Orifice Size inches Minimum Flow Rate sccm 0 C 21 1 C 0 0013 5 3 5 7 0 002 12 5 0 003 39 2 0 004 82 5 0 0055 190 0 007 374 0 010 748 0 014 1364 0 020 2673 0 032 6490 0 048 12980 0 062 22000 0 078 30000 0 093 42500 0 120 69300 Inlet Pressure 10 psig Outlet Pressure 10 inches of water 0 4 psig or less Note Flow Rate based on Nitrogen 4 5 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion ofthe controller It creates a pressure drop which is linear with flow rate This diverts asample quantity ofthe process gas flow through the sensor Each restrictor maintains a ratio of sensor flow to restrictor flow however the total flow through each restrictor is different Different restrictors active area have different pressure drops and produce controllers with different full scale flow rates For a discussion of the interaction of the various parts of the controller you are urged to review Section 3 2 Theory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop versus flow characteristics will be altered and it must be cleaned or replaced lt may also be necessary to replace the restrictor assembly
39. e packing case should be checked for damage incurred during shipment If the packing case is damaged the local carrier should be notified at once regarding his liability Areport should be submitted to your nearest Product Service Department Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www Brooksinstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs Brooksinstrument com Fax 31 0 318 549 309 E mail BrooksEu Brooksinstrument com Remove the envelope containing the packing list Outside of your clean area carefully remove the equipment from the packing case Make sure spare parts are not discarded with the packing material Inspect for damaged or missing parts This device has been assembled calibrated and double vacuum bagged in a Class 100 clean room In your semi clean area remove the outer bag only Pass your SLA7900 Series Ultra Clean Metal Seal Mass Flow Device into your clean area Remove the second clean room compatible bag only when the equipment is ready to be tested and or installed in your clean system 2 3 Recommended Storage Practice AE Er Eee ee EE If intermediate o
40. e setpoint 1 Insufficient pressure drop across the SLA7900 series MFC low or no pressure If there is not enough pressure differential across the MFC it is impossible for the MFC s orifice to pass the full scale flow rate To check for this condition compare the actual inlet outlet pressure drop with that specified on the order Increase the pressure if necessary 2 If pressure settings are correct and flow signal does not match setpoint a secondary issue could be the gas type If checking the MFC with a surrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas 4 2 Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 4 Maintenance amp Troubleshooting SLA7900 Series 3 Setpoint is below minimum MFCs may have a settable low flow cutoff for the setpoint command If setpoint is below this value then MFC will not attempt to control 4 Clogged sensor tube If the MFC sensor tube is clogged the flow signal will be very low or zero while the actual flow will be at the valve s maximum rate Flow signal matched setpoint but actual flow is not correct 5 Clogged restrictor If the MFC restrictor becomes clogged a much larger portion of the flow stream will pass through the sensor rather than going straight through the restrictor The symptom of this condition is a substantially reduced actual flow with a flow
41. ed for accurately measuring and rapidly controlling flows of gases This instruction manual is intended to provide the user with allthe information necessary to install operate and maintain the Brooks SLA7900 Series devices This manual is organized into the following sections Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance amp Troubleshooting Section A CE Certification Section B Zero Drift Diagnostic on SLA7950S Back Cover Warranty Local Sales Service Contact Information It is recommended that this manual be read in its entirety before attempting to operate or repair the Brooks SLA7900 Series devices 1 3 Description FESTE EFT ee eel Brooks Instrument s SLA7900 Series is a 1 125 wide profile high purity metal sealed thermal mass flow measurement and control instrument which offers unparalleled flexibility and performance The SLA7900 Series MFC is designed for use in advanced gas handling systems The result is the most accurate repeatable and responsive MFC on the market today Superior Valve Technology The coplanar valve offers unmatched performance Due to its simplified construction the valve exhibits superior repeatability stability and response time Highly Adaptable Configurations The 1 125 body offers a compact space saving footprint The SLA7900 Series is easily retrofitable to existing gas box designs that utilize the traditional 1 5 MFC body platform
42. educate your personnel in the proper installation operation and maintenance of the product Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes Connect all products to the proper electrical and pressure sources To ensure proper performance use qualified personnel to install operate update program and maintain the product When replacement parts are required ensure that qualified people use replacement parts specified by Brooks Instrument Unauthorized parts and procedures can affect the product s performance and place the safe operation of your process at risk Look alike substitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 inch falls under the Pressure Equipment Directive PED The Directive is applicable within the European Economic Area EU plus Norway Iceland and Liechtenstein Pressure equipment can be traded freely within this area once the PED has been complied with e Section 1 of this manual contains important safety and operating instructions related to the PED directive Meters described in this manual are in compl
43. ents X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series Paragraph Page Number Number Section 1 Introduction dels SCOPE ee eee eee ee 1 1 122 RUIDOSO Auen 1 1 1 3 Desorption isin AAA AU eee ia dat 1 1 1 4 ee 1 2 Section 2 Installation 221 Generale ra ee el ee nee E Sr 2 1 2 2 Recemptof Equpmentuu munnun ee en en rd 2 1 2 3 Recommended Storage Practice sise 2 1 2 4 Return Shipment A ren ne rest annee dde 2 2 2 5 Transit Precautions miii dois 2 2 2 6 Removal from Storage siennes 2 2 2 1 Gas Connections see a ANERE ees needed ton ad 2 3 2 8 IN LIN FII N nannten mn A nn Nr niet 2 3 2 9 Installation 2 3222 A ON en ren ni en mi ie 2 3 2 10 Electrical Interface Analog I O iii 2 5 2 11 Operation Check Procedure Analog I O issus 2 9 2 12 Electrical Interface DeviceNet I O sisi 2 10 2 13 Operation Check Procedure DeviceNet UO 2 11 2 14 DeviceNet Features iii 2 11 Section 3 Operation gal Generale a ana A A nine 3 1 3 2 Theory of Operation for Flow Measurement 3 1 CC NR EE 3 2 3 4 Adaptive Valve Control iii 3 3 355 Analog Mode of Operations ii ER EES 3 3 Section 4 Maintenance amp Troubleshooting 41 COVEIVIQW EE 4 1 4 2 Tro blesh60ting 2 2 2 22 ae Ree A aen di SDR SKA ANGER 4 2 4 3 Gas Conversion Factors issues 4 5 4 4 Office SIZING nee dude pass A A tie dae eee enter 4 7 4 5 Besttietor Sizing u nee ii NE states 4 7 Section A CE Certification CE Certifica
44. ercentage of gas 1 by volume P percentage of gas 2 by volume P percentage of gas n by volume Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Mixture 100 Factor 20 80 945 1 386 876 Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen It is generally accepted that the mass flow rate derived from this equation is only accurate to 5 The sensor conversion factors given in Table 4 3 are calculated based on a gas temperature of 21 C and a pressure of one atmosphere The specific heat of most gases is not strongly pressure and or temperature dependent However gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat caused by pressure and or temperature PRESSURE PRESSURE SHUT OFF GAUGE GAUGE VALVE CN CN AS x N r Y GAS gt D FLOW SUPPLY MEASURING DEVICE PRESSURE SHUT OFF REGULATOR VALVE Figure 4 1 Bench Troubleshooting Circuit Installation and Operation Manual Section 4 Maintenance amp X TMF SLA7900 MFC eng Troubleshooting Part Number 541B022AAG f August 2009 SLA7900 Series 4 4 Orifice Sizing BEE The flow controller s orifice is factory sized to a preselected gas operating pressure and flow range Note that the orifice is marked with its siz
45. ero Drift Diagnostic Option The Zero Drift Diagnostic is an advanced diagnostic now offered on the 7950S MFC and 7960S MFM which detects and alerts the user when the flow sensor zero drifts by more than user specified limits This unique feature monitors the flow signal during no flow conditions and then utilizes the alarms to notify the user when an out of limits condition has been detected Zero drift can be accurately detected because Brooks MFCs have the ability to monitor both positive and negative flow signals This diagnostic gives the user a higher level of confidence that the process has not shifted Brooks products have long been revered for their resistance to zero drift over long periods of time Now Brooks is the first MFC supplier to prove their stability WARNING Do not operate this instrument in excess of the specifications listed below Failure to heed this warning can result in serious personal injury and or damage to the equipment PERFORMANCE CHARACTERISTICS Flow Ranges Models SLA7950 SLA7960 Any range from 0 3 sccm to 0 50 slpm N eq Control Range Turndown 100 1 for any FS range from 1 50 slpm Turndown 50 1 for FS range below 1 slpm Accuracy 1 0 of rate including linearity 20 to 100 F S 0 2 of F S below 20 full scale Repeatability 0 20 of rate Settling Time lt 1 sec for all step changes above 5 FS Temperature Sensitivity Zero Less than 0 035 F S per C Span
46. fe operation Materials of Construction 316L Vacuum Arc Remelt VAR 316L and high alloy ferritic stainless steel External internal seals Nickel Valve seat 17 7PH stainless steel standard Process Connections Integral 1 4 male VCR CS Seal SEMI 2787 5 or SEMI F82 0304 R1 1 C Seal SEMI 2787 1 or SEMI F82 0304 R1 2 W Seal SEMI 2787 3 or SEMI F82 0304 R1 3 1 3 Section 1 Introduction Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Outline Dimensions Refer to Figures 1 1 through 1 7Electrical Characteristics Electrical Connections Analog UO option 9 pin D connector or 15 pin D Connector male DeviceNet I O option 5 pin Micro Connector male RS 485 option 15 pin D Connector male Analog I O Pin Connections for 9 pin D Connector Function 9 pin D conn Override Input Flow Signal 0 5 volt Output Power Supply 13 5 Vdc to 27 Vdc 4 Power Supply Common Setpoint 0 5 Vde Input 6 Setpoint Command Input 8 NotConnected fs Analog I O Pin Connections for 15 pin D Connector Not Connected f 6 Setpoint 0 1 5 Vde Input 38 Power Supply Common 9 ow Signal Common Output mA Reference 5 Voo Output TT Valve Override Input 12 alibration Select Input RS 485 Common B 14 RS 485 Common A Power Supply Voltage Analog UO or RS 485 option with val
47. flow signal may be present due to valve leak thru At 0 setpoint the flow signal output lt 0 5 FS If flow signal at 0 setpoint is gt 0 5 then there is too much leak through across valve seat and orifice MFC would need to be reworked to adjust valve shutoff Provide the proper UOM setpoint beween 20 and 100 FS to the MFC Check the MFC output signal UOM It should match the setpoint UOM value within 0 2 FS in less than 10 seconds after setpoint change If flow output signal does not match setpoint and pressure settings are correct this could indicate a problem in the MFC A secondary issue could be the gas type When checking with a surrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas Example Checking an MFC calibrated for 100 sccm SF6 sulfur hexafluoride The sensor factor using N nitrogen is 0 27 therefore the equivalent N needed is 100 0 27 370 4 sccm This may require a pressure increase to make this flow rate 2 14 DeviceNet Features rar gt mm Information regarding DeviceNet capability for the Brooks SLA7900 Series is available in the DeviceNet Supplemental Instruction manual X DPT DeviceNet SLA7000 MFC eng 2 11 Section 2 Installation SLA7900 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Installation and O
48. iability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards Visit www Brooksinstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under in situ conditions and the results will be traceable to the relevant international quality standards CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers end users and maintenance persons Please contact your nearest sales representative for more details HELP DESK In case you need technical assistance Americas 1 888 554 FLOW os Europe 31 0 318 549 290 Rn Asia 81 0 3 5633 7100 Due to Brooks Instrument s commitment to continuous improvement of our products all specifications are subject to change without notice TRADEMARKS Brooks Instrument LLC Brooks Instrument LLC DeviceNet Open DeviceNet Vendors Association Inc DAR Tinas HART Communications Foundation ODVA Open DeviceNet Vendors Association Inc VER nnn eten Cajon Co WINDOWS varieren stenen arenden Microsoft C
49. iance with EN directive 97 23 EC module H Conformity Assessment All Brooks Instrument Flowmeters fall under fluid group 1 Meters larger than 25mm or 1 inch are in compliance with category II Ill of PED Meters of 25mm or 1 inch or smaller are Sound Engineering Practice SEP ESD Electrostatic Discharge ACAUTION This instrument contains electronic components that are susceptible to damage by static electricity Proper handling procedures must be observed during the removal installation or other handling of circuit boards or devices Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or other safe suitable means before any printed circuit card or other internal device is installed removed or adjusted 3 Printed circuit cards must be transported in a conductive container Boards must not be removed from protective enclosure until immediately before installation Removed boards must immediately be placed in protective container for transport storage or return to factory Comments This instrument is not unique in its content of ESD electrostatic discharge sensitive components Most modern electronic designs contain components that utilize metal oxide technology NMOS SMOS etc Experience has proven that even small amounts of static electricity can damage or destroy these devices Damaged components even though they appear to function properly exhibit early failure
50. ield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strumentazione elettrica ed elettronica prodotta da Brooks Instrument soggetta a marcatura CE ha superato con successo le prove richieste dalla direttiva per la Compatibilita Elettomagnetica Direttiva EMC 89 336 EEC E richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE Qualita dei cavi di segnale e dei relativi connettori Brooks fornisce cavi di elevata qualita che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 100 I connettori sia di tipo D che circolari devono possedere un guscio metallico Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360 e questo vale per entrambe le estemita Lo schermo deve essere collegato ad un terminale di terra I connettori Card Edge sono normalmente non metallici II cavo impiegato deve comunque avere una schermatura del 100 per soddisfare la certificazione CE Lo schermo deve essere collegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manu
51. in 5 to Pin 1 Nominal 1000 ohm reading Pin 6 to Pin 7 Nominal 580 ohm reading 4 3 Gas Conversion Factors A FF ee If a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relation between the output signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two gases or by sensor conversion factor Consult factory or nearest Brooks Instrument rep for a list of sensor conversion factors To change to a new gas multiply the output reading by the ratio of the gas factor for the desired gas by the gas factor for the calibration gas used Factor ofthe New Gas Factor of the Calibration Gas Actual Gas Flow Rate Output Reading x 4 5 Section 4 Maintenance amp Installation and Operation Manual Troubleshooting X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Example The controller is calibrated for Nitrogen The desired gas is Carbon Dioxide CO The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 74 55 5 sccm of CO In order to calculate the conversion factor for a gas mixture the following formula should be used 100 100 100 P P P Sensor u Sensor Sensor Conversion Conversion Conversion Factor Factor Factor Sensor Conversion Factor Where P p
52. ith a dry inert gas such as Nitrogen before disconnecting gas connections Failure to correctly purge the instrument could result in fire explosion or death Corrosion or contamination may occur upon exposure to air All flow instruments returned to Brooks requires completion of Form RPROO3 1 Brooks Instrument Decontamination Statement along with a Material Safety Data Sheet MSDS for the fluid s used in the instrument Failure to provide this information will delay processing by Brooks personnel Copies of these forms can be downloaded from the Brooks website www Brooksinstrument com or are available from any Brooks Instrument location listed above 2 5 Transit Precautions Tg cc nn To safeguard against damage during transit transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit 2 6 Removal from Storage Ze mm Upon removal of the instrument from storage a visual inspection should be conducted to verify its as received condition If the instrument has been subject to storage conditions in excess of those recommended See Section 2 3 it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes To maintain an instrument s ultraclean integrity this service should be performed by the factory or one of the certified service centers Installation and Operation Manual Section 2 Installation X TMF SLA7900 MFC eng
53. leak by flow through the device while the Zero Drift Diagnostic is active as the flow signal is used to detect a zero drift condition Since the SLA7950S valve is not a shutoff type valve the user must have shutoff valves upstream and downstream of the device that are closed whenever setpoint is 0 The recommended configuration is shown in Figure B 1 The recommended shutoff valves will prevent false drift detection that could result due to normal leak by flow Figure B 1 Recommended Shutoff Valve Configuration B 1 Section B Zero Drift Diagnostic on SLA7950S SLA7900 Series Theory of Operation The Zero Drift Diagnostic actively monitors for drift by monitoring the flow signal during known no flow conditions The SLA7950S uses a zero setpoint value to define a no flow condition However since flow does not stop instantly when the setpoint is set to zero monitoring for drift is delayed for a time period known as the interlock delay as shown in Figure B 2 When the setpoint first becomes zero and the user shutoff valves close there will be some differential pressure across the MFC valve Leak by flow will occur until the pressure across the valve equalizes The length of time that is required for the pressure to equalize will depend upon the volume in the users system between the MFC and the shutoff valves The purpose of the interlock delay is to allow the differential pressure across the MFC to equalize become zero
54. mA setpoint signal is driven into the MFC input using a controlled source Output The 4 20 mA output signal is sourced by the MFC into the customer load Figure 2 4 Recommended Wiring Configuration for Current Signals Isolated Power Supply 2 7 Section 2 Installation Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Analog I O Pin Connections for 9 pin D Connector Valve Override Input 7 Figure 2 5 9 pin D Connector Shielded Cable Hookup Diagram Voltage 1 0 Version Power Supply 15 Vde Voltage V Setpoint Input Voltage Output Indicator or Receiver mM Signal Output Common Voltage Signal Setpoint and Output Notes 1 The commons for the setpoint input and signal output are not isolated from power supply common 2 The cable shields should connect to ground at one end only 2 8 Figure 2 6 Common Electrical Hookups for 9 pin D Connector Voltage I O Version Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 2 Installation SLA7900 Series The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention is required when selecting the signal cable to be used with CE marked equipment
55. met Sk rmen skal forbindes i begge ender til stikkets metalhus eller PG forskruningen og have forbindelse over 360 grader Sk rmen b r v re forbundet til jord Card Edge stik er standard ikke af metal der skal derfor ligeledes benyttes et sk rmet kabel med hel sk rm med 100 d kning Sk rmen b r v re forbundet til jord Forbindelse af stikket venligst referer til vedlagte instruktions manual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung fur MassedurchfluBgerate Datum i Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Vertr glichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Ger te elektrische elektronische Komponenten das CE Zeichen Bei der Auswahl der Verbindungskabel f r CE zertifizierte Ger te sind spezielle Anforderungen zu beachten Qualit t der Verbindungskabel Anschlu stecker und der Kabeldurchf hrungen Die hochwertigen Qualit tskabel von Brooks entsprechen der Spezifikation der CE Zertifizierung Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten da eine 100 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m glich sollten Kabeldurchf hrungen mit Anschlu m glichkeiten f r die Kabelabschrimung verwendet
56. mmunicate with the connected device verify that the device has the ZDD feature enabled and will then read and display the ZDD configuration parameters If the ZDDCT cannot communicate with the connected device the error window shown below will be displayed Verify that the device is powered that the device is properly connected and that the device is connected to the selected serial port Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AHG August 2009 Communication to the device could not be established Verify that the device is properly connected and that the proper communications port has been selected Press OK to retry or Cancel to Exit Ifthe ZDDCT detects thatthe connected device does not have the ZDD feature enabled the error window shown below will be displayed Contact your Brooks Instrumentrepresentative to find out how to enable the ZDD feature in your device The Model Code of the connected device is SLA79505 This model code does not match known valid model codes for the type of device selected in the Select Product box Verify the model codes of the connected device Step 3 Configure the parameters that control the B 6 functionality of the ZDD features The effect of each configuration parameter on the functionality of the Zero Drift Diagnostic along with the range of valid values is detailed below Enable Enables the reporting of drift beyond allowed limits detected by
57. n o s o em geral met licos e os cabos utilizados devem ter um isolamento com blindagem a 100 nos termos da Certificac o CE A blindagem deve terminar com ligac o a massa Relativamente configurac o da cavilha queiram consultar o Manual de Instru es A 5 A 6 Section A Installation and Operation Manual CE Certification of Mass Flow Equipment X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Suomi Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asia Lis ys K ytt ohjeisiin Viite Massam r mittareiden CE sertifiointi P iv m r Tammikuu 1996 Brooksin CE merkill varustetut s hk iset laitteet ovat l p issyt EMC testit direktiivi 89 336 EEC Erityist huomiota on kuitenkin kiinnitett v signaalikaapelin valintaan Signaalikaapelin kaapelin l piviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita jotka t ytt v t CE sertifikaatin vaatimukset Hankkiessaan signaalikaapelin itse olisi hankittava 100 sti suojattu kaapeli D tai Circular tyyppisen liitimen tulisi olla varustettu metallisuojalla Mik li mahdollista tulisi kayttaa metallisia kaapeliliittimi kiinnitett ess suojaa Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa p iss 360 n matkalta Suojan tulisi olla maadoitettu Card Edge Connector it ovat standarditoimituksina ei metallisia Kaapeleiden t ytyy olla 100
58. n the customer order Model SLA7950 s containing a single calibration will have that calibration stored in calibration 1 TMF principle of measurement T2 Downstream gt Temperature ZZ Sensor per if equipped Inlet gnr Outlet Flow A amp B Flow A 8 B Restrictor Flow B Figure 3 1 Flow Sensor Operational Diagram Installation and Operation Manual Section 3 Operation X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series 3 4 Adaptive Valve Control SSS E E eas Seen EE The Model SLA7950 offers a feature called adaptive valve control which allows the instrument to learn about the process gas and operating conditions If multiple calibrations are being used the adaptive valve control procedure must be performed separately for each calibration This function is disabled on MFC s when they are shipped The adaptive valve control process requires that the process gas be supplied to the Model SLA7950 at the pressure and temperature which will exist during the process If the system conditions have changed so substantially that the Model SLA7950 becomes unstable the adaptive valve control algorithm determines new gains which will stabilize the instrument and restore the step response to the factory performance level 3 5 Analog Mode of Operation NOTE Read Section 3 3 Features before reading this section A Functional Description The analog interface is consistent with other Bro
59. ning till kontaktstiften h nvisas till medf ljande instruktionsmanual Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AHG August 2009 Section B Zero Drift Diagnostic on SLA7950S SLA7900 Series Zero Drift Diagnostic on Brooks Model SLA7950S Introduction The Zero Drift Diagnostic is an advanced diagnostic now offered onthe SLA7950S MFC which detects and alerts the user when the flow sensor zero drifts by more than user specified limits This unique feature monitors the flow signal during no flow conditions andthen utilizesthe SLA7950S alarms to notify the user when an out of limits condition has been detected Zero drift can be accurately detected because Brooks MFCs have the ability to monitor both positive and negative flow signals This diagnostic gives the user a higher level of confidence that the process has not shifted Brooks products have long been revered for their resistance to zero drift over long periods of time Now Brooks is the first MFC supplier to prove their stability A configuration tool application is provided that allows the user to customize the Zero Drift Diagnostic using a personal computer connected to the SLA7950S service port Installation and user instructions for the configuration tool are covered at the end of this document Installation Recommendations In order to utilize this diagnostic feature the user must take some precautions to guarantee that there is no
60. ntallamiento del 100 Cuando utilice conectores del tipo D 6 Circular deber an estar protegidos con una pantalla met lica Cuando sea posible se deber n utilizar prensaestopas met licos provistos de abrazadera para la pantalla del cable La pantalla del cable deber ser conectada al casquillo met lico prensa y protegida en ambos extremos completamente en los 360 Grados La pantalla deber conectarse a tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deber n ser protegidos con un apantallamiento del 100 para cumplir con la certificaci n CE La pantalla deber conectarse a tierra Para ver la configuraci n de los pines Por favor consultar Manual de Instrucciones adjunto Installation and Operation Manual Section A X TMF SLA7900 MFC eng CE Certification of Mass Flow Equipment Part Number 541B022AAG f August 2009 SLA7900 Series Fran ais Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Sujet Annexe au Manuel d Instructions R f rence Certification CE des Debitmetres Massiques a Effet Thermique Date S Janvier 1996 Messieurs Les quipements Brooks lectriques lectroniques portant le label CE ont t test s avec succ s selon les r gles de la Compatibilit Electromagn tique directive CEM 89 336 EEC Cependant la plus grande attention doit tre apport e en ce qui concerne la s lection du c ble utilis pou
61. oks analog MFCs This includes a 0 5 volt setpoint input 0 5 volt flow signal output and Valve Override input Before operating the SLA7900 Series apply power and warm up the instrument for approximately one hour After warm up apply gas pressure then proceed by following the instructions in the following sections B Analog Setpoint This input allows the user to establish the MFC setpoint The usable range of this input is from 0 to 5 5 Vdc which corresponds to 0 to 110 of the MFC full scale flow rate Setpoints below 50 mV will be treated as 0 volt setpoints For setpoints below 0 Vdc the MFC behaves as if a 0 Vdc setpoint is present Setpoints above 5 5 Vdc will cause a setpoint of at least 110 FS C Analog Flow Signal This output is used to indicate the flow signal The range of this signal is from 0 5 to 5 5 Vdc with the range of 0 to 5 5 Vdc corresponding to a calibrated flow signal of O to 110 of the full scale flow rate A negative flow signal indicates reverse flow through the device but is NOT calibrated The analog flow signal is capable of resolving signals to 1 0 mV D Valve Override This input allows the valve to be forced to its most closed state or its most open state regardless of setpoint If this input is not electrically connected the MFC will operate according to the current values of the MFC setpoint If this input is held at O Vdc or 15Vac the valve will be forced to its most closed state If this input is
62. only the alarm contact Caution mustbe taken when connecting to the open collector output to guarantee that the input current to pin 3 must be limited to 25 mA closed and applied voltage must be less than 30 Vdc open The default value for Contact Enable is Disabled Error Limit The maximum allowable drift in percent of Full Scale that may occur without the Zero Drift Diagnostic causing an alarm or warning to be annunciated The range of valid values is 0 5 to 100 The default value for Error Limit is 1 0 Adjust Error Limit for Temperature When enabled the Error Limit will be adjusted to the device s Zero Temperature Drift specification so that the alarm will not be annunciated if the device is operating within the published Zero Temperature Drift specification The default value for Adjust Error Limit for Temperature is Enabled Alarm Delay Number of seconds that the warning alarm condition mustbe active before the warning alarm is indicated on the Alarm LED and Alarm contact The default Alarm Delay value is 1 second Interlock Delay The time in minutes after setpoint transitions to zero before the Zero Drift Diagnostic begins monitoring the flow signal for values that exceed the Error Limit The valid range of values is 0 0 to 99 9 minutes The default Interlock Delay value is 5 minutes Safe State Enable If Enabled the MFC will transition to a Safe State when the Zero Drift Diagnostic annunciates the
63. or operations including Accurate setpoint adjustment and flow output measurement including units of measure selection Valve Override controller only e Flow Totalizer Alarm status and settings e Soft Start Control controller only Reference the Brooks document S protocol Communication Command Description for Smart IF for more details regarding the capabilities of the RS 485 communication interface Smart DDE Model 0162 offers a user friendly and powerful Dynamic Data Exchange software program between the Brooks Digital mass flow products and Windows based high level applications software Remote power supply 7 Remote or Internal Brooks Digital Mass Flow RS 485 RS 232 Xx Meters and Controllers Converter provided with digital communications RS 485 multi point interconnection Figure 1 1 General Wiring Section 1 Introduction SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 DeviceNet Communications The Brooks Digital Series is also available with DeviceNet communication capability DeviceNet is an open digital protocol capable of high speeds and easy system connectivity Brooks Instrument has several of its devices available on this popular networking standard and is a member of ODVA Open DeviceNet Vendors Association the governing standard body for DeviceNet DeviceNet is similar to the RS485 standard in that it is a m
64. orporation Brooks Instrument Brooks Instrument Brooks Instrument 407 West Vine Street Neonstraat 3 1 4 4 Kitasuna Koto Ku P O Box 903 6718 WX Ede Netherlands Tokyo 136 0073 Japan Hatfield PA 19440 0903 USA T 31 0 318 549 300 T 81 0 3 5633 7100 T 215 362 3700 F 31 0 318 549 309 F 81 0 3 5633 7101 F 215 362 3745 E Mail BrooksEu Brooksinstrument com E Mail BrooksAs Brooksinstrument com E Mail BrooksAm Brooksinstrument com www Brooksinstrument com BROOKS Copyright 2009 Brooks Instrument LLC All rights reserved Printed in U S A INSTRUMENT
65. peration Manual Section 3 Operation X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series 3 1 General ee IIA After the device has been properly installed in the process it is ready for operation When initiating flow slowly open the valve to avoid a flow surge A bypass is helpful in bringing the flow on smoothly Avoid starting a pump to supply the flowmeter without the use of a valve upstream of the flowmeter AWARNING Before operating the flowmeter ensure all fluid connections have been properly tightened and where applicable all electrical connections have been properly terminated 3 2 Theory of Operation for Flow Measurement SS O eee ee ee A The thermal mass flow measurement system consists of two components the restrictor and the flow sensor Figure 3 1 contains a diagram of the flow stream through the MFC with an enlarged view of the flow sensor Gas flow entering the MFC is separated into two paths one straight through the restrictor and the other through the flow sensor This is represented in Figure 3 1 where the total flow A B enters the MFC and is separated into streams A and B The streams are joined again at the far side of the restrictor The separation of the flow streams is caused by the restrictor During flow conditions there will be a pressure differential across the restrictor which forces gas to flow in the sensor The pressure difference caused by the restrictor varies linearl
66. r oy Tov KaAwdlou HETUQOPAG ou GY UUTOG TO onoio ka d to np kKerra va xpnoyorompBe pe Spyava rov p povv o onua CE Jov ryta Tov KaAMdion o partos TAY STOMODAT Y KAL TOV ouvd gu v T Brooks kat kav va rpounBede vymAng not rnrag kO ta oroia zAnpobv TIC podiaypag s ya mororoinon CE Lav n Emoy tou KaAMdiou G LUTOG YIVEL aNd OAG ap xel va xpnoyoromoete aAd ro to omoio va p pet eEwrepik nAnpes rA yua kal va nap yet Oopakion 00 h c v ecpot t xov D Kuiduxol tev kandiov TP TEL va Ewpakitovrai ue ETOAAIKH Omp k on E v giva epapu cino ap rel va xpnormorov vral UETO AKO tumoddintes KOAM LOV zov va IAB TOVV axpod xty o vSzons Tov MAEYUATOG TOV adwSiov o TAEYUG TOV KaAwdionv ap xel va GUV ETOL GTO HETOAAUK mepiBanpa otov TomobAinty Kat va Omparileran KOL ota o xpa kar 360 noipec Bop rion ap rer va kata yel oe K NOIO aKPOSEKTH ye mons 1 SOVEESHLOL KAPT V Eivar UN HETAAAKOI Ta KAAMNSIO zov XPTIGYIOETOLOLVIGL HP TEL x p pouv nAtyna Owopaxiayns 100 ya va vzakovovv orv motonoinon CE Jwp kion TP REL va KATAANYEL GE K TOLO AKPOSEKTN yeiwmonc la mv lartafn tov axpodexr v TIAPAKAXO LE avapepGette STO EOHKASIOTO yxewi o O ny wv A 3 A 4 Section A Installation and Operation Manual CE Certification of Mass Flow Equipment X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Italiano Brooks Instrument 407 West Vine St Hatf
67. r long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following conditions a Within the original shipping container b Stored in a sheltered area preferably a warm dry heated warehouse c Ambient temperature 21 C 70 F nominal 32 C 90 F maximum 45 F 7 C minimum d Relative humidity 45 nominal 60 maximum 25 minimum 2 1 2 2 Section 2 Installation Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 2 4 Return Shipment rn erre Prior to returning any instrument to the factory visit the Brooks website www Brooksinstrument com for a Return Materials Authorization Number RMA or contact one of the following locations Brooks Instrument 407 W Vine Street P O Box 903 Hatfield PA 19440 USA Toll Free 888 554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm Brooksinstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAsOBrooksInstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Instrument must have been purged in accordance with the following WARNING Before returning the device purge thoroughly w
68. r v hiculer le signal d un appareil portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blinde 100 Les connecteurs D ou de type circulaire doivent tre reli s la terre Si des presse toupes sont n cessaires ceux ci doivent tre m talliques avec mise la terre Le blindage doit tre raccord aux connecteurs m talliques ou aux presse toupes sur le pourtour complet du c ble et chacune de ses extr mit s Tous les blindages doivent tre reli s la terre Les connecteurs de type card edge sont non m talliques Les c bles utilis s doivent tre blind s 100 pour satisfaire la r glementation CE Tous les blindages doivent tre reli s la terre Se r f rer au manuel d instruction pour le raccordement des contacts Greek Brooks Instrument a IIpoo0 jkn oro Eyxa pid o O nyu v 407 West Vine St rikd Ilotonoinen CE tov Opy vov M rpuons Mapoxiig M tas Hatfield PA 19440 ponnvia lavou amp puoc 1996 U S A Cupiec koi K pioi Ta pyava nAeKktpika nAEKtpoviKd mo Brooks ta oroia p povv to gun CE xovv MITVXOG Eieyydei c upova pe Tous Kavov sno g mo HAektpo Mayvnrwrc Zvu ar rntag EMC vripextiBa 89 336 EEC Inwo nnore XPEI ETAL edikt TPOGOXN Kata Tv e
69. tem piping directly upstream of the controller may cause a small shift in accuracy If possible have at least ten pipe diameters of straight tubing upstream of the mass flow controller A CAUTION Since the Model SL7850 control valve is designed as a control valve only it may not provide positive shut off A separate shut off valve may be installed downstream for that purpose It should be noted that a small amount of gas may be trapped between the downstream side of the mass flow controller and the shut off valve which will result in a surge upon actuation of the shut off valve This surge can be reduced in magnitude either by locating the controller and the shut off valve closer together or by moving the shut off valve upstream of the controller Installation and Operation Manual Section 2 Installation X TMF SLA7900 MFC eng Part Number 541B022AAG f August 2009 SLA7900 Series 2 10 Electrical Interface Analog I O The setpoint signal is supplied as a 0 1 to 5 Vdc or 0 4 20 mA analog signal All signals are supplied via the 15 pin D Connector For an analog unit the minimum set of connections which must be made to the MFC and MFM includes 13 5 27 Vdc supply common and a setpoint signal The Brooks Digital electrical interface is designed to facilitate low loss quiet signal connections Separate returns commons are supplied for the analog setpoint analog flow signal and the power supply These commons are electric
70. the expiration of the earlier of twelve 12 months from the date of initial installation or eighteen 18 months from the date of shipment by Seller Products purchased by Seller from a third party for resale to Buyer Resale Products shall carry only the warranty extended by the original manufacturer All replacements or repairs necessitated by inadequate preventive maintenance or by normal wear and usage or by fault of Buyer or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions or by abuse accident alteration misuse improper installation modification repair storage or handling or any other cause not the fault of Seller are not covered by this limited warranty and shall be at Buyer s expense Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world to provide rapid response and support Each location utilizes primary standard calibration equipment to ensure accuracy and rel
71. tion of Mass Flow Equipment iii A 1 Section B Zero Drift Diagnostic on SLA7950S sur nette ae in B 1 Warranty Local Sales Service Contact Information Back Cover Contents Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 Figures Figure Page Number Number 1 1 General Wiring TE 1 5 1 2 Model SLA7950S MFC Analog I O 9 pin D Connector with VCR Fittings nnee eenn 1 7 1 3 Model SLA7950S MFC Analog I O 9 pin D Connector with Downport Connections C seal 1 7 1 4 Model SLA7950S MFC Analog I O 15 pin D Connector with VOR Fittings nanne 1 8 1 5 Model SLA7950S MFC Analog I O 15 pin D Connector with Downport Connections C seal 1 8 1 6 Model SLA7950D MFC DeviceNet Digital I O with Downport Connections C seal 1 9 1 7 Model SLA7950D MFC DeviceNet Digital I O with VCR Fittings nnen nennen nennen eenen 1 9 1 8 Model SLA7950S MFC 15 pin D Connector Analog with 1 5 Downport Connections W seal 1 10 2 1 15 pin D Connector Shielded Cable Hookup Diagram Voltage I O Version ssmmnssssssssrrssrersrsrernrssrrrn nana 2 6 2 2 Common Electrical Hookups for 15 pin D Connector Voltage I O Version 2 6 2 3 Recommended Wiring Configuration for Current Signals Non Isolated Power Supply 2 7 2 4 Recommended Wiring Configuration for Current Signals Isolated Power Supply 2 7 2 5 9 in D Connector Shielded C
72. ulti drop connection that allows a maximum of 64 devices to be connected on the same network Baud rate selections for DeviceNet products are 125K 250K and 500K and can be selected via MAC ID switches mounted on the device The DeviceNet communication link also provides access to many of the Brooks Digital Series functions for control and monitor operations including Accurate setpoint adjustment and flow output measurement including units of measure selection e PID Settings controller only Valve Override controller only e Calibration Gas Select Soft Start Control controller only Depending on the type of device you ve purchased reference one of the following Brooks documents for more details regarding the capabilities of the DeviceNet protocol X DPT DeviceNet SLA7000 MFC eng for Mass Flow Controllers X DPT DeviceNet SLA7000 PC eng for Pressure Controllers X DPT DeviceNet SLA7000 RT eng for Remote Transducers Installation and Operation Manual Section 1 Introduction X TMF SLA7900 MFC eng Part Number 541B022AAG f August 2009 SLA7900 Series 1 4 MVCR 1 4 MVCR CONNECTION CONNECTION 9 PIN MALE D CONNECTOR SEE DETAIL ZERO BUTTON 9 PIN MALE D 92 CONNECTOR DETAIL O TT il OUTLET
73. ve 4 2 4 6 VIN 27 Vdc Valve Full Open DeviceNet UO option with valve 6 3 VIN 25 Vdc Valve Full Open Standard temperature and pressure are in accordance with SEMI Standard E12 96 0 C and 101 32 kPa 760 torr Within 2 of rate or 0 5 FS which ever is greater per SEMI E17 91 For flows above 30 sipm N eq 30 psid minimum required Installation and Operation Manual Section 1 Introduction X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series RS 485 Communications The Brooks Digital Series is equipped with RS 485 communication capability Refer to Table 1 3 Analog I O pin connections that enables the device to communicate via a personal computer for process control Baud rate selections for the Brooks Digital Series related to RS 485 are 1200 2400 4800 9600 19200 and 38400 baud and can be selected via the Brooks Service Suite The RS 485 is essentially a multi drop connection It allows a maximum of 32 devices to be connected to a computer system IBM compatible PC s are not equipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 network to a standard pc The RS 485 bus a daisy chain network meaning that the wires are connected at the units as in Figure 1 1 This form of multi drop capable communication provides access to many of the Brooks Digital Series functions for control and monit
74. werden Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchf hrungen ber den vollen Umfang von 360 anzuschlie en Die Abschirmung ist mit dem Erdpotential zu verbinden Platinen Steckverbindunger sind standardm ige keine metallgeschirmten Verbindungen Um die Anforderungen der CE Zertifizierung zu erf llen sind Kabel mit einer 100 igen Schirmababdeckung zu verwenden Die Abschirmung ist mit dem Erdpotential zu verbinden Die Belegung der Anschlu pins k nnen Sie dem beigelegten Bedienungshandbuch entnehmen A 1 A 2 Section A Installation and Operation Manual CE Certification of Mass Flow Equipment X TMF SLA7900 MFC eng Part Number 541B022AAG SLA7900 Series August 2009 English Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date S January 1996 The Brooks electric electronic equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility EMC directive 89 336 EEC Special attention however is required when selecting the signal cable to be used with CE marked equipment Quality of the signal cable cable glands and connectors Brooks supplies high quality cable s which meets the specifications for CE certification If you provide your own signal cable you should use a cable which is overall completely screene
75. when the mass flow controller is to be calibrated to a new flow rate Restrictor assembly replacement should be performed only by trained personnel Consult Factory Service center 4 7 Section 4 Maintenance amp Troubleshooting SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Restrictors The SLA7900 Series MFC uses two types of restrictor assemblies depending on full scale flowrate and expected service conditions 1 Wire mesh for Nitrogen equivalent flow rates above 3 4 slpm These restrictor assemblies are made from a cylinder of wire mesh and are easily cleaned if they become contaminated in service 2 Anti Clog Laminar Flow Element A C L F E This type of restrictor assembly is used for Nitrogen equivalent flow rates less than 3 4 slom If a mixture of two or more gases is being used the restrictor selection must be based on a Nitrogen equivalent flow rate of the mixture Example The desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Mixture 100 Factor 20 80 945 1 386 876 Nitrogen equivalent flow 20 945 21 16 slpm Nitrogen In this example a Size 4 Wire Mesh Assembly would be selected Table 4 3 Model SLA7900 Series Standard Restrictors scom nitrogen Equivalent ow PartNumber SCCM Nitrogen Equivalent
76. y with total flow rate The sensor has the same linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the MFC A B constant The full scale flow rate of the MFC is established by selecting a restrictor with the correct pressure differential for the desired flow The flow sensor is a very narrow thin walled stainless steel tube Onto this tube are built upstream and downstream temperature sensing elements on either side of a heating element Constant power is applied to the heater element which is located at the midpoint of the sensor tube During no flow conditions the amount of heat reaching each temperature sensor is equal so temperatures T1 and T2 Fig 3 1 are equal Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor The temperature difference T2 T1 is directly proportional to the gas mass flow The equation is DT AxPxCpxm Where DT Temperature difference T2 T1 K A Constant of proportionality S K kJ P Heater Power Cp specific heat of the gas at constant pressure kJ kg K m Mass Flow kg s Abridge circuit and a differential amplifier interpret the temperature difference and generate an electrical signal directly proportional to the gas mass flow rate 3 1 3 2 Section 3 Operation Installation and Operation Manual X TMF SLA7900 MFC eng

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