User Manual
Contents
1. OFF 5705060 B Introduction 1 3 Advanced Energy Non lonizing A 1030 NRTL 5 NATEG GS Label 1155 USER SAFETY Do not attempt to install or operate this equipment without having proper training first Make sure this unit is properly grounded Ensure all cables are connected and are tight Verify that input line voltage and current capacity are correct before turning the generator Use proper ESD precautions DO NOT BE CARELESS AROUND THIS EQUIPMENT AN WARNING RISK OF DEATH OR BODIL Y INJURY Disconnect all sources of input power before working on this unit or system 1 4 Introduction 5705060 B RFDS 2K 2V GENERATOR PRODUCT SAFETY AND COMPLIANCE Directives ELECTROMAGNETIC COMPATIBILITY EMC 89 336 EEC EC Council directive on the approximation of the laws of the Member States relating to electromagnetic compatibility EMC Directive with amendments 47 CFR Part 18 Code of Federal Regulations Limits and Methods of Measure ment of Radio Interferance Characteristics of Industrial Scientific and Medical Equipment SAFETY 73 23 EEC EC Council directive on the harmonization of the laws of the Member States re2. Line Voltage 187 to 229 Vac 208 Vac nominal 3 with ground Line Frequency 50 to 60 Hz Line Current 15 A maximum at full rated RF output power Overcurrent Protection 20 A circuit breaker Output Power 2000 W nominal into loads of lt 2 1 VSWR 1500 W nominal into loads of lt 3 1 VSWR See Figure 3 1 for output power limits Regulation 1 of setpoint or 3 W whichever is greater into a 50 Q load Frequency 13 56 MHz 0 005 Response Time lt 20 ms rise and fall time from RF on or RF off Load Mismatch The generator operates continuously into any load mismatch without failure 5705060 B Specifications 3 1 Advanced Energy Table 3 2 Electrical Specifications Harmonics At full rated output all harmonics are lt 55 dBc below the RF output signal when operated into a 50 Q non reactive load Spurious Signals Non harmonic spurious and noise signals are lt 40 dBc Transient Response Less than 0 1 change in output power for a 10 change in the ac line voltage Delivered Power Watts 2500 2000 1500 1000 500 Maximum Power 180 Degree Phase Angle Guaranteed Power All Phase Angles 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 Magnitude of the Reflection Coefficient Figure 3 1 RFDS 2K 2V Power Derating Curve 3 2 Speci
3. 1 1 Read RTS 1 1 Overview of the Manual 0 KK KK KK KK KK KK KK KK KK KK KK k 1 1 Interpreting the Manual 1 1 Type Conventions der Gas Galea alaya y ad Gell lya y 1 1 e A A H HH HH HHH 1 2 User Safety o n sa AWR Spe WEKA SEREKE n E RANE l as 1 4 Product Safety and Compliance W K KK KK KK KK KK KK KK KK KK KK 1 5 DICE CAVE 0 SE 1 5 Electromagnetic Compatibility EMC KK KK KK KK KK KK KK 1 5 Sale EC CE CE EE 1 5 Standard Si ae aran ie e SR a 1 5 Chapter 2 Theory of Operation ccc cece cece cece cece cere rere ences 2 1 General Description 2 1 RegulationiiMod 4 44 53 moteado 2 1 COON N ra Me a HH HHH e 2 1 Ambient Operating Temperature 2 1 E 2 2 Interl ck SA SS ti o SS 2 2 Protection ccc spos ri a HH HH ld HH esr aed 2 2 Theory Of Operation 2 2 PUE A tate ES did a 2 3 Auxiliary Supply Z responsis cevenau tarap EE Eea a a Ea 2 3 Inverter 3 LE 2 3 R Mod le 4 0 RES as s0 4ew ee 2 3 bina aC iia a Da E EH 2 4 Power Amplified 4b 2 4 Output Tank filter 4c 4 Power Measurement System 5 KK KK KK KK KK KK KK KK KK KI 2 4 Control and Logic 6 kk kk KK KK KK KK KK K KK KK KK KK KK KK KK KH 2 4 Chapter 3 Specifications sk ks a e eee eee eee e eee e eee ee ee sos 3 1 Physical Specifications Se 3 1 Electrical Specifications nese saa l K k ka bl N EW
4. 22 OVERTEMP SHUTDOWN D Digital Output This signal is connected to the collector terminal of an opto coupled NPN transistor the emitter terminal is connected to pin 9 A low impedance between pins 22 and 9 indicates that the generator has turned off RF power because the internal temperature is too high and also turns on the ALARM LED An overtemperature fault will not allow RF to be turned on If the overtemperature fault occurs while the RF STATUS D signal is active RF is turned off Check the cooling water flow and temperature as well as consulting Chapter 7 to assist you in clearing this fault Note If the temperature in the unit continues to rise a second thermal limit may be reached at which point all power to the unit is shut off 23 10 INTERLOCK Refer to pin 10 for a description 5705060 B Connectors Controls and Indicators 4 5 Advanced Energy Table 4 1 User Port Pin Description Table Signal Pin 24 Return Pin 11 Signal Name AC ON D Signal Type Digital Output Description This signal is connected to the collector terminal of an opto coupled NPN transistor the emitter terminal is connected to pin 11 A low impedance state between pins 24 and 11 indicates that ac power has been applied all three phases are present the interlock is satisfied the main contactor is closed and the ac voltage to the main power inverter is
5. Other Technical Problems en 7 4 Returning Units For Repair 7 4 Warranty Information 7 5 Warranty Claims 3 2 2 ccs nan sada W Mines alte diaya e viv shee WA yal a 7 5 Authorized R t t asociarse 7 6 Uperadine Units 34 yu y sa A a as 7 6 Wartahty SCE ES 7 6 5705060 B RFDS 2K 2V GENERATOR Chapter 1 Introduction Read This Pas y n seus aa and 1 1 Overview of the Manual ASS 1 1 Interpreting the Manual SO 1 1 ESEN SAND DM MN tl 1 4 Product Safety and Compliance 1 5 READ THIS PAGE We know that some of you want to start the generator now and that you don t feel you have the time to read the entire manual Following are sub sections you need to read in order to get started Overview of the Manual and Interpreting the Manual are short sections intended to guide you through the manual Overview of the Manual explains the organization of the manual so you can more quickly find what you need Interpreting the Manual explains the type conventions what it means when a word appears in capitalized italic type for instance and what the icons symbols mean OVERVIEW OF THE MANUAL The main table of contents is an outline of the major topics covered in the manual It contains only the chapter titles and the first heading levels within each chapter so you can skim it and get an idea of what is contained without being overwhelmed by several heading levels W
6. at the output of the generator It is scaled to represent 0 to 2500 W 1 V 250 W 3 16 DELIVERED PWR Analog This 0 to 10 Vdc signal monitors MONITOR A Output the level of delivered power as measured at the output of the generator It is scaled to represent 0 to 2000 W 1 V 200 W Accuracy is 1 of setpoint or 3 W whichever is greater into a 50 Q load The impedance between pin 3 and pin 16 should be no less than 2 Q 4 17 RF PWR OND Digital This signal is connected to the Input anode of an opto coupler LED through a kQ 1 W resistor the cathode is connected to pin 17 RF power is enabled when a voltage of 4 to 30 Vdc is applied across pins 4 and 17 RF power is disabled when the voltage across pins 4 and 17 is less than 1 5 Vdc 5 18 SETPOINTA Analog This 0 to 10 Vdc signal controls Input the level of delivered power It is scaled to represent 0 to 2000 W 1 V 200 W When operating into a 50 Q non reactive load the generator s accuracy is 1 of the level between 300 and 2000 W Between 30 and 300 W the accuracy is 3 W 6 19 24 VOLT DC 24 Vde 24 Vdc regulated output 50 mA maximum current 8 RESERVED Reserved for future use 4 2 Connectors Controls and Indicators 5705060 B RFDS 2K 2V GENERATOR Table 4 1 User Port Pin Description Table Signal Pin 10 Return Pin 23 Signal Name INTERLOCK Signal Type Descriptio
7. power requested by the SETPOINT S control voltage between pins 5 and 18 The rear panel ALARM LED lights when this condition exists The maximum current through pins 14 and is limited to 12 mA the maximum differential voltage is limited to 45 Vdc the minimum differential voltage is 0 5 Vdc and the maximum common mode voltage between pins 14 and 1 to chassis ground is 50 V 19 6 and 13 POWER SUPPLY RETURN Refer ence This signal is a dedicated ground that returns to the internal system and chassis ground and finally to protective earth ground 20 RF STATUS D Digital output This signal is connected to the collector terminal of an opto coupled NPN transistor the emitter terminal is connected to pin 7 A low impedance between pins 20 and 7 indicates that the RF output is enabled and also lights the RF ON LED The maximum current through pins 20 and 7 is limited to 12 mA the maximum differential voltage is limited to 45 Vdc the minimum differential voltage is 0 5 Vdc the maximum common mode voltage between pins 20 and 7 to chassis ground is 50 V 4 4 Connectors Controls and Indicators 5705060 B RFDS 2K 2V GENERATOR Table 4 1 User Port Pin Description Table Signal Pin 21 Return Pin Signal Name CHASSIS GROUND Signal Type Description This pin is tied to the same chassis ground reference that pin 19 is connected to
8. B RFDS 2 2V GENERATOR Chapter r Troubleshooting Check SE Akra RI a Rie a erase ined EYA hes 7 1 Fault Indication A KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK KK k 7 1 Limit Indications a wi st a Wla an EAE e Be la i 7 2 Troubleshooting Guide iria dt as 7 2 Other Technical Problems ee 7 4 Warranty Information ws cae ooo Sat kk KK KK KK BES oe KK KK KK KK 7 5 CHECK FIRST Power Off Checks 1 Check for visible damage on the unit cables and connectors 2 Check to ensure that all connectors are installed correctly and tightly fastened 3 Check input power to be sure that it is present and meets specifications 4 Check ground connections and ensure that they are adequate and secure Power On Checks 1 Check input power connection to ensure the proper power is being supplied the unit 2 Check LEDs and determine that the proper ones are lit FAULT INDICATION The RFDS 2K 2V generator has three thermal sensors to protect its circuitry and to alert you to overtemperature conditions within the generator Two of these sensors when tripped result in a partial shutdown of the generator If either of these sensors activates the RF power is turned off the RF ON LED goes out and the ALARM LED lights to indicate that a problem exists Additionally the OVERTEMP signal in the user interface pins 22 and 9 activate to alert the system to the condition After the unit cools down this alarm condition may be rese
9. Energy Industries Inc Phone 508 371 1381 228 Oak Hill Circle Fax 508 371 0569 Concord MA 01742 USA Advanced Energy Industries GmbH Phone 49 711 77927 0 Raiffeisensstrasse 32 Fax 49 711 7778700 70794 Filderstadt Bonlanden Germany Advanced Energy Industries Japan KK Phone 81 3 32351511 TOWA Edogawabashi Fax 81 3 32353580 Building 347 Yamabuki cho Shinjuku ku Tokyo Japan Advanced Energy Industries United Phone 44 1869 321622 Kingdom Fax 44 1869 325004 Suite 412 Market Court Victoria Road Bichester Oxon OX6 7QB UK 5705060 B Troubleshooting 7 5 Advanced Energy WARRANTY INFORMATION Warranty Claims Advanced Energy products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory please see warranty statement below for details In order to claim shipping or handling damage you must inspect the delivered goods and report such damage to AE within 30 days of your receipt of the goods Please note that failing to report any damage within this period is the same as acknowledging that the goods were received undamaged For a warranty claim to be valid it must be made within the applicable warranty period e include the product serial number and a full description of the circumstances giving rise to the claim have been assigned a return authorization number see below by AE Customer Service A
10. LED indicates that ac power is available within the unit all three phases are present the main contactor is energized the ac voltage to the inverter section is within the allowable voltage range and all interlock criteria are satisfied The unit is ready to supply RF output power RF ON This green LED indicates that RF power is on Depending on the selected setpoint value RF power may or may not be present at the output connector ALARM This green LED indicates that the unit is unable to satisfy the requested setpoint power due to some limit or alarm condition in the generator Some of the conditions that can cause an alarm are high VSWR over temperature and internal power limits FRONT PANEL The front panel is a blank panel Everything required for operation is on the rear panel REAR PANEL D Output Control Hochspannung Ne ADVANCED E ENERGY 3 PE 208 V 50 60Hz 5KW CE RF On Lebensgefahr Input Danger High Voltage XX Or aE Ce z 1117 Figure 4 5 Rear panel drawing 4 8 Connectors Controls and Indicators 5705060 B RFDS 2K 2V GENERATOR Chapter 5 Installation And Setup Setin Vs anes ig See E NN 5 1 E E Rk ne 5 1 Spacing Requirements 0 ii vate sane KK KK KK KK KK KK KK KK KK KK we 5 2 Connecting Cooling Watert sia kk KK KK KK KK KK KK KK KK KK KK 5 3 Connecting Input Power osc sos ed Se KK KK KK KK KK KK KK KK
11. lit lit lit 5705060 B Troubleshooting 7 3 Advanced Energy OPERATING CONDITIONS Signal LED Signal Status LED State Normal Operation High VSWR Loads Overtemperature CHECK If the unit cannot achieve the requested setpoint power due to mismatched loads Verify the power setpoint for the resulting VSWR or reflection coefficient is within the limits of the power derating curve If the unit has shut off RF power due to a high temperature condition but the generator has not completely shut down Check for proper water flow and temperature 2 gpm minimum at 25 C maximum When the internal temperature is brought back to its operating range the overtemperature condition can be cleared You must toggle pin 4 low and then high to turn RF output back on A second overtemperature fault latches the auxiliary supply in the generator completely off This latching occurs when either no water or inadequate water is flowing in the generator and the system is unattended After the generator has cooled off reset the circuit breaker to clear this fault OTHER TECHNICAL PROBLEMS For technical support contact Advanced Energy Industries Inc Customer Support 1625 Sharp Point Drive Fort Collins CO 80525 Phone 970 221 4670 Fax 970 221 5583 Email support ftc1 aei com Returning Units for Repair Before returning any product for repair and or adjustment FIRST FOLLOW ALL TROUBLE
12. protection circuits e Excessive internal temperature may be caused by lack of proper cooling water flow excessive ambient operating temperature or other causes Any combination of input AC line phase drop out Input line brown out under voltage or over voltage THEORY OF OPERATION 2 2 Theory of Operation 5705060 B RFDS 2K 2V GENERATOR Figure 2 1 and the following paragraphs provide a description of the high level operation of your RFDS 2K 2V generator Ac J 1 3 4 5 RF an Input Inverter RF Module PA Measurement Out 4 4A Driver Exciter z di i 4B Power Amplifier 2 4COutput Tank Filter Auxiliary Supply 6 E Sal gonto al Interface 8 Logic Figure 2 1 REDS 2K 2V block diagram INPUT 1 In the input section 208 Vac 3 9 line voltage is routed through a circuit breaker and line filter to a 3 contactor and the input of an auxiliary supply 2 The contactor when closed delivers the line voltage to a diode bridge where it is rectified to 300 Vdc The 300 Vdc bus is provided to the inverter section 3 AUXILIARY SUPPLY 2 The auxiliary supply provides dc power to control and logic circuits throughout the generator Its switching design operates at 230 kHz and generates approximately 250 W of power at 30 Vdc 15 Vdc and 5 Vdc It also supplies limited 24
13. system is calibrated using a computerized test station 2 4 Theory of Operation 5705060 B RFDS 2K 2V GENERATOR CONTROL AND LOGIC 6 The control and logic module accepts analog and digital commands from the operator and processes internal feedback signals to control the generator It also provides status information to the operator The control and logic module monitors the delivered power signal from the measurement system and compares it to the requested setpoint Any resulting error signal is used to adjust the variable 0 to 200 Vdc output of the power inverter 3 and hence the output of the power amplifier 4B 5705060 B Theory of Operation 2 5 RFDS 2K 2V GENERATOR Chapter 3 Specifications PITY STC Mth erate n ye ipa tsa cence Ay Roa Wout ead eo wae RE nA 3 1 Blecttieal ans A hi a a HHHH HH HH Nas PES 3 1 Environmental 3 titi A eh sete Se lk he ation BS 3 3 PHYSICAL SPECIFICATIONS Table 3 1 Physical Specifications Size 12 5 cm H x 17 8 cm W x 38 1 cm D 4 9 in Hx 7 in W x 15 in D with rubber feet 3M Weight 11 8 Kg 26 lb maximum Connector Cable Specifications RF Output Connector HN Female AC Power Input 3 meter 4 wire 10 AWG with Marinco 3015P Crimp or equivalent User Port Connector 25 pin subminiature D female Coolant Connectors 0 25 in female NPT ELECTRICAL SPECIFICATIONS Table 3 2 Electrical Specifications Input Power Specifications
14. E h kl da av sal 3 1 Environmental Specifications 3 3 Chapter 4 Connectors Controls and Indicators 0 ccc cece kk kk kk kk k 4 1 Connectors and DIS sasare raiar a gees A Rhee ada 4 1 User Port 2 0 acento EE A LER ond 4 1 Switches Controls and Indicators 4 7 5705060 B iii Advanced Energy Controls And Switches 4 7 Indicators Dem HH e HH EEE 4 7 Front Panel oni yed ra a kan ya a Av a than oe anand 4 8 ReariPane No N DD DD a ia 4 8 Chapter 5 Installation And Setup ccc cece kk kk KK KK k ee 5 1 Setting UD SC ia Eya di aya ieee aoe hades ade od 5 1 Unpacking LOS 5 1 CN N NNn gt aNNRMRMRnNNEN EInDEEnNREnaREnERnaRaEBE DJ DD 5 1 Spacing Requirements 0 0 0 cece KK KK KK KK KK KK KK KK kk kk 5 2 Connecting Cooling Water 0 0 0 0 KK KK KK KK KK KK KK KK KK KK KK K 5 3 Connecting Input Power 5 3 Connecting Output Power 5 3 Chapter 6 Operation ES 6 1 First time Operation ii 6 1 SE KER O ASS 6 1 Chapter 7 Troubleshooting 0 ccc ccc ccc e werner eee eee 7 1 Check First oraire Dm bm 7 1 Power Off Check cui cs xa sae ieee ho Seo en Ga ray ee wes 7 1 Power On Checks sa as nimete stni ea KAN N oi 7 1 Fault Indication 7 1 Limit Indication AO et Li Seek lan veda ce eb d l sn Whee 7 2 Troubleshooting Guide 7 2
15. K 5 3 Connecting Output Power 6 5 Seat de KK KK KK KK KK KK KK KK ass 5 3 SETTING UP Unpacking Unpack and inspect your generator carefully Check for obvious physical damage If no damage is apparent proceed with the unit connections If you do see signs of shipping damage contact Advanced Energy Industries Inc and the carrier immediately Save the shipping container for submitting necessary claims to the carrier GROUNDING The RFDS 2K 2V provides an RFI ground mounting lug A suitable chassis ground connection made to this mounting lug prevents or minimizes radio frequency interference Note For more information about grounding refer to AE Application Notes titled Grounding p n 5600031A 5705060 B Installation And Setup 5 1 Advanced Energy SPACING REQUIREMENTS 3 65 92 7 mm JS o E Ez 3 e E ka Es b a 2 3 i e 9 1 25 31 75 mm e 125 31 75 mm 125 PA 61 75 mm j 1 50 o 38 1 mm 1 o e o E E 8 lo 3 E E z 3 k E io 35 32 00 33 ge e o Eh a Se gt 8 23 ee e Y E E 5 lo o E E g o e3 5 mm 4 90 124 5 mm Left Side 5 2 Installation And Setup 5705060 B RFDS 2K 2V GENERATOR CONNECTING COOLING WATER This generator is water cooled Do not operate it until water is con
16. SHOOTING PROCEDURES If after following these procedures you still have a problem or if the procedure instructs you to call AE Customer Service and discuss the problem with a representative Be prepared to give the serial number of the unit and the reason 7 4 Troubleshooting 5705060 B RFDS 2K 2V GENERATOR for the proposed return This cousultation call allows Customer Service to determine whether the problem can be corrected in the field or if the unit needs to be returned Such technical consultation is always available at no charge If you return a unit without first getting authorization from Customer Service and that unit is found to be functional you will be charged a re test and calibration fee plus shipping charges To ensure years of dependable service Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide All parts and labor carry our standard 18 month warranty If you have any other questions please call an AE office at Advanced Energy Industries Inc Phone 970 221 0108 World Headquarters Fax 970 221 5583 1625 Sharp Point Drive Fort Collins CO 80525 USA Advanced Energy Industries Inc Phone 512 719 3939 8403 Cross Park Drive Suite 2D Fax 512 719 4319 Austin TX 78754 USA Advanced Energy Industries Inc Phone 408 263 8784 491 Montague Expressway Fax 408 263 8992 Milpitas CA 95035 USA Advanced
17. User Manual ADVANCED ENERGY RFDS 2K 2V GENERATOR November 1997 Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins Colorado 80525 970 221 4670 support ftc1 aei com 5705060 B ADVANCED ENERGY NWARNING Read this entire manual and all other publications pertaining to the work to be performed before installing operating or maintaining this equipment Practice all plant and product safety instructions and precautions Failure to follow instructions can cause personal injury and or property damage All personnel who work with or who are exposed to this equipment must take precautions to protect themselves against serious or possibly fatal bodily injury Advanced Energy Industries Inc AE provides information on its products and associated hazards but it assumes no responsibility for the after sale operation of the equipment or the safety practices of the owner or user This equipment produces or uses potentially lethal high voltage high current radio frequency RF energy NEVER DEFEAT INTERLOCKS OR GROUNDS All information herein is subject to periodic updates Inquiries concerning this manual should be directed to AE Information provided by AE is believed to be correct and reliable However no responsibility is assumed by AE unless otherwise expressly taken ADVANCED sa registered trademark of Advanced Energy Industries Inc ENERGY Advanced Energy is a registered trademark o
18. Vdc and 15 Vdc power to the control connector for external use INVERTER 3 The inverter provides variable amplitude dc power to the RF power amplified 4B It uses MOSFET transistors as switches to convert the 300 Vdc bus from the input section to a variable 0 to 200 Vdc signal A 0 to 10 Vdc analog signal from the control section 6 regulates the dc voltage At full rated power this section must supply up to 4000 W to the power amplifier 4B 5705060 B Theory of Operation 2 3 Advanced Energy RF MODULE 4 The RF module converts dc energy from the inverter to 13 56 MHz and efficiently delivers it to a 50 Q load It consists of three sections mounted on a single heat sink the driver exciter 4A the power amplified 4B and the output tank filter 4C The RF module uses a space and power efficient design that is made possible by a patented RF amplifier developed at Advanced Energy Industries Inc DRIVER EXCITER 4A The hybrid driver ecxciter provides a buffered 13 56 MHz signal capable of driving the power amplifier 4B It contains three stages of amplifiction The driver exciter is designed to drive extremely low impedance loads and is short circuit protected to prevent damage due to mishandling or failures in succeeding stages It can provide at least twice the power required to drive the power amplifier to its full rated output power POWER AMPLIFIER 4B The power amplifier PA uses the dc power from t
19. conditions resulting in high VSWR This condition may indicate a problem in the chamber or that the load match between the generator and the load is not operating properly This may also cause the following conditions e maximum dissipation allowd within the power amplified section internal overvoltage at the main supply rail or the power amplified terminals internal maximum current limit TROUBLESHOOTING GUIDE OPERATING CONDITIONS Signal LED Signal Status LED State Normal Operation High VSWR Loads Overtemperature SETPOINT Not active An open circuit Active A low impedance Not active An open circuit exists STATUS D high impedance between between pins 1 amp 14 between pins I amp 14 pins 1 amp 14 indicates the indicates the generator is not generator is producing the producing the requested requested setpoint setpoint REFLECTED Analog voltage between Analog voltage between Analog voltage between pins 2 PWR pins 2 8 15 is 0 to 10V pins 2 8 15 is gt 4V amp 15 is 0 V indicating 0 W MONITOR A indicating 0 to 2500W of indicating reflected power is reflected power reflected power 1V 250W greater than 1000W VSWR of the load exceeded the operating parameters of the generator 7 2 Troubleshooting 5705060 B RFDS 2K 2V GENERATOR OPERATING CONDITIONS Signal LED Signal Status LED State Normal Operation High VSWR Loads Overt
20. emperature DELIVERED Analog voltage between Analog voltage between Analog voltage between pins 3 PWR pins 3 amp 16 is 0 to 10V pin 3 8 16 is gt 2V amp 16 is gt 2V indicating delivered MONITOR A Indicating delivered power indicating delivered power power level of 500W or greater level is 0 to 2000W level of 500W or greater 1V 200W RF STATUS D Active Low impedance Active Low impedance Inactive A high impedance between pins 7 amp 20 between pins 7 amp 20 between pins 7 amp 20 indicates indicates RF output enabled indicates RF output enabled RF output is disabled OVERTEMPD Not Active Open circuit Not Active Open circuit Active A low impedance between high impedance between high Impedance between pins 9 and 22 indicates the pins 9 and 22 indicates pins 9 and 22 indicates internal temperature of the normal temperature normal temperature generator has exceeded its safe operating temperature AC ON D Active A low impedance Active A low impedance Active A low impedance between between pins 11 amp 24 between pins 11 amp 24 pins 11 amp 24 indicates ac input indicates 1 ac input voltage indicates ac input voltage is voltage is on is on 2 interlocks are on interlocks are satisfied satisfied and 3 ac power is and ac power is applied to applied to main switching main switching power power supply and is within supply specifications AC ON LED lit lit lit RF ON LED lit lit not lit ALARM LED not
21. f Advanced Energy Industries Inc Microsweep is a registered trademark of Advanced Energy Industries Inc Sparc is a registered trademark of Advanced Energy Industries Inc Sparc le is a registered trademark of Advanced Energy Industries Inc Arc Check is a trademark of Advanced Energy Industries Inc Arc Out is a trademark of Advanced Energy Industries Inc Astral is a trademark of Advanced Energy Industries Inc Fixed Match is a trademark of Advanced Energy Industries Inc GenCal is a trademark of Advanced Energy Industries Inc Matchless is a trademark of Advanced Energy Industries Inc Pinnacle is a trademark of Advanced Energy Industries Inc Sparc vs is a trademark of Advanced Energy Industries Inc Starburst is a trademark of Advanced Energy Industries Inc 1997 Copyright by Advanced Energy Industries Inc All rights reserved Without written permission no part of this manual covered by copyright herein may be reproduced or copied in any form or by any means graphic electronic or mechanical including photocopying recording taping or information and retrieval systems Written permission must be granted by Advanced Energy Industries Inc 1625 Sharp Point Drive Fort Collins Colorado 80525 RFDS 2K 2V GENERATOR Chapter 1 Introduction
22. fications 5705060 B RFDS 2K 2V GENERATOR ENVIRONMENTAL SPECIFICATIONS Table 3 3 Climatic Conditions Temperature Relative Humidity Air Pressure Class 3K3 Class 3K3 Class 3K3 Operating 5 C to 40 C 5 to 85 note 1 86 kPa to 106 kPa 41 F to 104 F 1 g m to 25 g m 860 mBar to 1060 mBar Class 1K4 Class 1K3 Class 1K4 Storage 25 C to 55 C 5 to 95 86 kPa to 106 kPa 13 F to 131 F 1 g m to 29 g m 860 mBar to 1060 mBar Class 2K3 Class 2K3 Class 2K3 Transportation 25 C to 55 C ote 4 950 note 2 70 kPa to 106 kPa 13 F to 131 F 60 g m note 3 700 mBar to 1060 mBar Note 1 Non Condensing Note 2 Maximum relative humidity when the unit temperature slowly increases or when the unit temperature directly increases from 25 to 30 C Note 3 Maximum absolute humidity when the unit temperature directly decreases from 70 to 15 C Note 4 The unit may be subjected to a maximum temperature of 70 C 158 F if the cumu lative exposure does not exceed 24 hours Table 3 4 Environmental Specifications Coolant Medium Requirements Temperature 15 C to 30 C 59 F to 86 F inlet temperature Flow Rate 7 57 lpm 2 gpm minimum 5705060 B Specifications 3 3 Advanced Energy Table 3 4 Environmental Specifications Pressure 100 psi maximum inlet pressure Contaminates The following specifications are recommended f
23. he inverter 3 to boost the signal from the exciter 4A to the required output level The PA consists of two AE proprietary hybrid modules The efficient operation of this section results in low heat dissipation which allows a compact arrangement of components The PA has a built in 65 headroom for reliability when operated into plasma loads It uses a new class of operation patented by AE OUTPUT TANK FILTER 4C This section removes unwanted harmonics generated by the power amplifier and matches the impedance of the amplifier to a 50 Q load The planar photolithographic techniques used in the output tank circuitry eliminate air coils and their associated variability due to operating conditions or manufacturing tolerances This provides the RFDS 2K 2V generator with extremely stable and consistent operating characteristics POWER MEASUREMENT SYSTEM 5 This section provides stable precise analog signals representing the delivered and reflected power measured at the output connector The measurement system consists of a microstrip directional coupler and an RF to dc converter The directional coupler samples the forward and reflected power and has a flat coupling coefficient that provides accurate power measurement into any load The RF to dc converter provides the linearizer with constant dc voltages proportional to the forward and reflected power which are stable over wide variations of load impedance and temperature The measurement
24. hen you turn to a chapter a table of contents lists each sub heading in the chapter and its page number INTERPRETING THE MANUAL Type Conventions To help you quickly pick out what is being discussed the manual presents certain words and phrases in type that are different from the rest of the text Pin and signal names appear in capitalized italics RF PWR ON CMD D Labels that are on the unit switches indicators etc generally appear in boldface capital letters MODIFY Exceptions are port names which simply begin with a capital letter User port 5705060 B Introduction 1 1 Advanced Energy Functions are printed in boldface lowercase letters analog input filtering Symbols A DANGER This symbol warns you of imminent physical hazard to you if proper procedures are not followed AN WARNING This symbol calls your attention to a condition or situation that could cause injury to you or damage to equipment The following symbols appear on labels on your unit Short circuit protected 1024 Protective earth ground General danger Refer to Manual CE label 1 2 Introduction 5705060 B RFDS 2K 2V GENERATOR Warning Labels PART 0060 76128 TAIWAN Q JAPAN KOREA PART 0060 76188 TAIWAN Q JAPAN KOREA PART 0060 18004 TAIWAN Q JAPAN KOREA HAZARDOUS VOLTAGE Contact may cause electric shock or burn Turn off a
25. ical problems 7 4 output CEX Drive port 4 7 output power 3 1 output tank filter 4c 2 4 overcurrent protection 3 1 overview of the manual 1 1 P physical specifications 3 1 power amplified 4b 2 4 power measurement system 5 2 4 power off checks 7 1 power on checks 7 1 product safety and compliance 1 4 protection 2 2 R read this page 1 1 rear panel drawing 4 8 regulation 3 1 response time 3 1 returning units for repair 7 4 RF module 4 2 3 RF output connector 3 1 RFDS 2K 2V power derating curve 3 2 5705060 B Index i Advanced Energy S safety 1 4 serial host port 4 7 setting up 5 1 size 3 1 spacing requirements 5 2 specifications 3 1 spurious signals 3 2 standards 1 4 start up 6 1 switches 4 7 symbols 1 2 T theory of operation 2 1 theory of operation 2 2 transient response 3 2 troubleshooting 7 1 troubleshooting fault tree 7 2 troubleshooting guide 7 2 troubleshooting table 7 2 type 1 1 type conventions 1 1 U unpacking 5 1 upgrading units 7 6 user port 4 1 user port connector 3 1 user port pin description table 4 2 user safety 1 4 W warranty 7 6 warranty claims 7 5 warranty information 7 5 weight 3 1 Index ii 5705060 B
26. ired The unit is water cooled with no provisions or requirements for forced air cooling Regulation Mode The RFDS 2K 2V regulates by delivered power as measured at the output of the generator Cooling Cooling is to be accomplished by way of water cooling only The unit must operate normally with inlet water temperatures up to 25 C 77 F The minimum flow rate required to operate with an inlet water temperature of 25 C 77 F must be no less than 7 57 liters 2 gallons per minute The cooling system must be capable of handling line pressures up to 100 psi 6 9 bars Ambient Operating Temperature The RFDS 2K 2V operates reliably with an ambient air temperature range of 5 to 40 C This assumes minimum water flow and maximum water temperature conditions 5705060 B Theory of Operation 2 1 Advanced Energy Humidity The RFDS 2K 2V operates in a non condensing 15 to 85 relative humidity environment Critical components and assemblies are conformally coated to prevent damage due to moisture build up Interlock The RFDS 2K 2V provides connections through its 25 pin User port interface for a single loop through interlock string A contact resistance of 3 Q or less between the interlock pins enables the unit Protection The RFDS 2K 2V protects itself from damage under the following conditions Any unmatched load condition at the unit output Output power fold back limiting occurs as required by the generator
27. lating to electrical equipment designed for use within certain voltage limits LVD Low Voltage Directive with amendments Standards This device has been designed to meet the following Safety and EMC standard s EN 50082 2 EN 50178 EN 55011 Class A Group 2 CISPR 11 VDE 0160 CSA C22 2 No 107 1 M91 UL 1012 This device must be installed and used only in compliance with the standards listed in addition to VDE 0113 EN 60204 IEC 204 and applicable requirements e e e e e For more information refer to the letter of conformance US or declaration of conformity EU accompanying the product 5705060 B Introduction 1 5 Advanced Energy 1 6 Introduction 5705060 B RFDS 2K 2V GENERATOR Chapter 2 Theory of Operation General Description an 2 1 Theory of Operation A A kk KK KK KK KK KK KK KK KK KK GAS 2 2 GENERAL DESCRIPTION The RFDS 2K 2V is a 13 56 MHz RF generator designed to regulate its output power based on delivered power The unit is designed to deliver a nominal 2 kW into a 2 1 VSWR load and 1 5 kW into a 3 1 VSWR load The RFDS 2K 2V has internal protection limits permitting safe and reliable operation into all load conditions The unit is controlled through a 25 pin analog digital user port There is no operator control panel provided on this unit AC power for the RFDS 2K 2V is supplied from a 4 wire 3 q with ground 208 Vac nominal power source No neutral connection is requ
28. ll warranty work will be performed at an authorized AE service center see list of contacts at the front of the manual You are responsible for obtaining authorization see details below to return any defective units prepaying the freight costs and ensuring that the units are returned to an authorized AE service center AE will return the repaired unit freight prepaid to you by second day air shipment or ground carrier for local returns repair parts and labor will be provided free of charge Whoever ships the unit either you or AE is responsible for properly packaging and adequately insuring the unit Authorized Returns Before returning any product for repair and or adjustment call AE Customer Service and discuss the problem with them Be prepared to give them the serial number of the unit and the reason for the proposed return This consultation call will allow Customer Service to determine if the unit must actually be returned for the problem to be corrected Such technical consultation is always available at no charge Units that are returned without authorization from AE Customer Service and that are found to be functional will not be covered under the warranty see warranty statement below That is you will have to pay a retest and calibration fee and all shipping charges Upgrading Units AE s products are continually changing as ways to improve them are discovered AE is happy to upgrade older units so that they reflect recen
29. mp lock out system before servicing ENEE o Hi jR EE EA ERAS o HEAVY OBJECT Can cause muscle strain or back injury Use lifting aids amp proper lifting techniques when removing or replacing o RBBB o NON IONIZING RADIATION RF EXIST INSIDE Exposure may cause tissue damage Turn off power amp lockout source before servicing PY ZF ase ERS SIRF o REE SSSA eae o Hes ello RE l e SSE azao QU qu AAPA Ads aa Hel AZ A Zt Set AF0 HAH SEA QIS LIC HHIH OA ARAS ZTP MS RE ZIZ YALL D 238 AHAN OIL Gal AF 4 9L BLI EL Zel FE PHA 5022 5 TPL YHE 72S NEAL Q RF
30. n Pins 10 and 23 form a system interlock loop These pins must be connected together with less than 3 Q series resistance for the main contactor to close as well as a coaxial connector properly installed on the output RF connector in order to provide power to the inverter An open interlock approximately 5 Q will not allow the RF to be turned on If the interlock is opened when RF STATUS D is active RF turns off the 34 contactor opens and the rear panel AC ON and RF ON LEDs go out To restore RF power it is only necessary to satisfy the interlock It takes approximately 0 5 s to restore RF power after the interlock is satisfied As the series resistance between pins 23 and 10 increases the time needed to engage the interlock also increases A resistance greater than 5 Q will not satisfy the interlock 12 RESERVED Reserved for future use 13 19 15 VOLT DC 15 Vde 15 volt regulated output 50 mA maximum current 5705060 B Connectors Controls and Indicators 4 3 Advanced Energy Table 4 1 User Port Pin Description Table Signal Pin 14 Return Pin 1 Signal Name SETPOINT STATUS D Signal Type Digital Output Description This signal is connected to the collector terminal of an opto coupled NPN tranisistor the emitter terminal is connected to pin 1 A low impedance between pins 14 and 1 indicates that the generator cannot produce the
31. nected and the cooling requirements are met A WARNING If you connect the cooling water on multiple units in series be sure that input water temperature to all units is less than the maximum input water temperature Connect the input and output water connections and tighten securely Turn on the water and ensure that there are no leaks Be sure that the flow rate and temperature are within the minimum specifications required to operate your RFDS 2K 2V generator Note Keep the water cooling system running as long as the rear circuit breaker is on Overheating can occur even if RF is not being produced because the auxiliary power supply is also water cooled CONNECTING INPUT POWER A DANGER Before making any input line power connection turn off building circuit breakers supplying input power to the RFDS 2K 2V Also ensure that the circuit breakers on the rear panel are in the OFF position Check to be sure the input power is within the specifications shown in Chapter 3 Insert the twist lock Hubbel connector from the generator into the source power and twist the connector to secure CONNECTING OUTPUT POWER A WARNING RISK OF DEATH OR BODILY INJURY Disconnect all sources of input power before working on this unit or anything connected to it Be sure that the input power is turned off at the circuit breakers on the generator Install the output power cable connector After tightening
32. or the water used to cool the RFDS 2K 2V pH between 7 and 9 Total chlorine lt 20 ppm Total nitrate lt 10 ppm Total sulfate lt 100 ppm Total dissolved solids lt 250 ppm Total hardness expressed as calcium carbonate equivalent less than 250 ppm Specific resistivity of 2500 Q cm or higher at 25 C Total dissolved solids TDS as estimated by the following TDS lt 640 000 specific resistivity Q cm 3 4 Specifications 5705060 B RFDS 2K 2V GENERATOR Chapter 4 Connectors Controls and Indicators Connectors and Pins 4 1 Switches and Indicators 4 7 ROGER 4 8 RearPan horie ayn 41n al w sa a ya huna a Guh ke be na s n a hn Oy beh ee ek 4 8 CONNECTORS AND PINS User Port Pin 1 SS O060000600 1045 User Port 25 pin subminiature D shielded female Signal Characteristics Unless othrwise specified all analog signals are 0 to 10 V all digital input signals drive opto coupler LEDs 4 to 30 V required for LED turn on and all digital output signals are opto coupled open collector signals with return lines non referenced to ground 45 V dc and 12 mA maximum 5705060 B Connectors Controls and Indicators 4 1 Advanced Energy Table 4 1 User Port Pin Description Table Signal Return Signal Name Signal Description Pin Pin Type 2 15 REFLECTED PWR Analog This 0 to 10 Vdc signal monitors MONITOR A Output the reflected power as measured
33. responsibility for determining the cause and nature of the failure and the seller s determination with regard thereto shall be final 5705060 B Troubleshooting 7 7 RFDS 2K 2V GENERATOR Numerics 73 23 EEC 1 4 89 336 EEC 1 4 A ac power input 3 1 ambient operating temperature 2 1 authorized returns 7 6 auxiliary supply 2 2 3 C check first 7 1 climatic conditions 3 3 connecting cooling water 5 3 connecting input power 5 3 connecting output power 5 3 connector cable specifications 3 1 connectors and pins 4 1 connectors controls and indicators 4 1 control and logic 6 2 4 controls 4 7 controls and switches 4 7 coolant connectors 3 1 coolant contaminates 3 4 coolant flow rate 3 3 coolant pressure 3 4 coolant requirements 3 3 coolant temperature 3 3 cooling 2 1 D directives 1 4 driver exciter 4a 2 4 E electrical specifications 3 1 electromagnetic compatibility emc 1 4 enhanced operation 6 2 environmental specifications 3 3 F fault indication 7 1 first time operation 6 1 frequency 3 1 front panel 4 8 G general description 2 1 grounding 5 1 H harmonics 3 2 humidity 2 2 I indicators 4 7 indicators 4 7 input 1 2 3 input power specifications 3 1 installation and setup 5 1 interlock 2 2 interpreting the manual 1 1 inverter 3 2 3 L limit indication 7 2 line current 3 1 line frequency 3 1 line voltage 3 1 load mismatch 3 1 O operation 6 1 other techn
34. t by toggling the RF PWR ON command pins 4 and 7 During this type of overtemperature alarm the SETPOINT STATUS signal pins 14 and 1 do not go active because the RF power is disabled 5705060 B Troubleshooting 7 1 Advanced Energy If the third temperature sensor is tripped the generator is completely shut down to protect its critical circuits When this fault occurs the ac circuit breaker remains on but none of the internal power circuits are active The generator must be allowed to cool down and then the circuit breaker must be toggled to restore operation Because of the nature and locations of the three temperature sensors it is possible that this shutdown sensor may trip before the other two sensors If this happens no LED or system warning is given because all power in the generator is disabled Overtemperature conditions are usually the result of cooling water problems If an overtemperature fault occurs check to make sure that the minimum water flow requirement is being met and that the maximum inlet water temperature has not been exceeded LIMIT INDICATION The ALARM LED lights whenever the generator cannot achieve the setpoint power level This condition is also reported through the remote interface pins and 14 Limits are non latching they do not shut off power and will reset once the condition causing the alarm clears Several possible conditions can trigger the alarm condition including external load
35. t improvements The fee for upgrading a unit will be a percentage of the current list price based on the age of the 7 6 Troubleshooting 5705060 B RFDS 2K 2V GENERATOR unit Such an upgraded unit will carry a 6 month warranty which will be added to any time remaining on the original warranty Contact Customer Service for specifics on getting an older unit upgraded to the current revision level Warranty The seller makes no express or implied warranty that the goods are merchantable or fit for any particular purpose except as specifically stated in printed AE specifications The sole responsibility of the Seller shall be that it will manufacture the goods in accordance with its published specifications and that the goods will be free from defects in material and workmanship The seller s liability for breach of an expressed warranty shall exist only if the goods are installed started in operation and tested in conformity with the seller s published instructions The seller expressly excludes any warranty whatsoever concerning goods that have been subject to misuse negligence or accident or that have been altered or repaired by anyone other than the seller or the seller s duly authorized agent This warranty is expressly made in lieu of any and all other warranties express or implied unless otherwise agreed to in writing The warranty period is 12 months after the date the goods are shipped from AE In all cases the seller has sole
36. the connector install the locking bracket and tighten the captive screw to secure the bracket and connector 5705060 B Installation And Setup 5 3 Advanced Energy 5 4 Installation And Setup 5705060 B RFDS 2K 2V GENERATOR Chapter 6 Operation First Time Operation can id es Hk See BS WES WOR EE 6 1 FIRST TIME OPERATION Start up Before doing anything further be sure the setup of the RFDS 2K 2V is completed including the installation of any termination plugs that are required A DANGER The RFDS 2K 2V can operate without being hooked up to either a chamber or a dummy load You are exposed to high voltage output from the unit if you do not hook the output to either a dummy load or a chamber Note If using a dummy load connect the RFDS 2K 2V to it with a RG 393 cable and an appropriate load If you are going to connect the generator to your chamber be sure to satisfy all chamber conditions for operation The following steps will aid you in setting up your generator initially 1 Make sure the power in power out and User port connectors are installed 2 Turn on the source power circuit breakers 3 Turn on the generator power circuit breakers The AC ON LED should come on 4 Select the proper operation mode and power level through the User port When the proper power is being produced the RF ON LED should come on 5705060 B Operation 6 1 Advanced Energy 6 2 Operation 5705060
37. within the specified voltage range The AC ON LED also lights The maximum current through pins 24 and 77 is limited to 12 mA the maximum differential voltage is limited to 45 Vdc the minimum differential voltage is 0 5 Vdc the maximum common mode voltage between pins 24 and 77 to chassis ground is 50 V 25 RESERVED Reserved for future use 0 to 10 Vdc RFDS 2K 2V 100 K Figure 4 1 Differential analog inputs 1113 4 6 Connectors Controls and Indicators 5705060 B RFDS 2K 2V GENERATOR R gt 20K R lt 500 K Ground reference at receiving end necessary 1114 Oto 10 Vdc Figure 4 2 Differential analog outputs RFDS 2K 2V 1K 1W 4 to 30 Vde ON lt 1 5 Vde OFF 1115 Figure 4 3 Digital inputs optically isolated RFDS 2K 2V 470 Q Signal 5 Vdc ON lt 1 5 Vdc OFF Max current 12 mA Max Voltage 45 V Max Reverse Voltage 5 V 1 Return 1116 Figure 4 4 Digital outputs optically isolated SWITCHES CONTROLS AND INDICATORS Controls and Switches The RFDS 2K 2V does not have an operator control panel All power control and water connections are made at the front of the unit Indicators Three status LEDs are visible from the rear of the unit for monitoring the following functions 5705060 B Connectors Controls and Indicators 4 7 Advanced Energy Table 4 2 Status LEDs AC ON This green
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