HR4 Ultrasonic Motor User Manual March 2005
Contents
1. DIRECTION OF MOTION GND PAN SCREW 21 50 2 A qus NOM M3x0 5 TYPx2 x N n gt N pss S 5 ASS 40 5 1 4 40 1 3 FRONT COVER FRONT COVER BACKWARD BACKWARD 413 0 6 0 2 POWER CABLE 3 FRONT COVER FRONT COVER 72 FOR HR4 1 V FORWARD FORWARD 41 9 REF M4x0 7 NOTES S 1 PRELOAD RELEASE ECCENTRICS SHOULD T 4 THREADS NS M EG MOUNTING REMAIN ACCESSIBLE AFTER MOUNTING 9 5 2 ALL DIMENSIONS REFER TO A MOTOR m CORRECTLY MOUNTED AGAINST ALUMINA STRIP e 3 ALL DIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 N e FINGER TIPS 03 05 3 2 copy of layout drawing 4 30 100 20 TYPx2 3 ECCENTRICS Figure 3 6 Dimensions for Standard and High Vacuum Motors 3 6 Chapter 3 Specifications 3 3 2 Dimensions for Ultra High Vacuum Motors DIRECTION OF en 25 8 10 7 0 2 2 46 6 14 3 0 2 2 FINGER TIPS 3 05 4 THREADS FOR MOUNTING PRELOAD RELEASE ECCENTRICS M3x0 5 2 THREADS FOR GROUND L 13 lt t o e 40 5 1 4 gt FRONT COVER FRONT COVER HON BACKWARD BACKWARD 41 3 0 6 0 2 FRONT COVER FRONT COVER FORWARD FORWARD 41 9 REF NOTES 1 PRELOAD RELEASE ECCENTRICS SHOULD REMAIN ACCESIBLE AFTER MOUNTING 2 ALL DIMENSIONS REFER TO A MOTOR CORRECTL2. 2 4 2 2 2 Mounting the 2 7 2 2 3 Motor Grounding LL RA GEA eene eene enne nennen nnne nnne 2 9 2 2 4 Motor Connections dedre Nd nemen nnnm nnne nnns 2 10 2 2 4 1 Motor Connector nemen 2 10 2 2 4 2 System Electrical Configuration ssssseseennn 2 11 2 2 5 1 Motor RUN IN i eee s e ete er e ens 2 12 SPECIFICATIONS 722 2266 E 3 1 3 1 cL 3 1 3 2 Specification 3 3 3 2 1 reet d egeo 3 3 3 2 2 Electrical tme prete ager nes 3 3 3 2 3 Environmental an nre eee eeu epis 3 3 3 2 4 Physical Dimensions nn nnne 3 3 3 2 5 Performance Envelope with the AB5 3 4 3 2 6 Performance Envelope with the AB1A AB2 ABA drivers 3 6 3 3 SCHEMALICS omui reete 3 6 3 3 1 Dimensions for Standard and High Vacuum 3 6 3 3 2 Dimensions for Ultra High Vacuum 3 7 3 3 3 Mounting Base Dimensions 3 8 HR4 Motor User Manual 1 1 1 1 2 Introduction About the Motor The HR4 motors are h
3. WARNING Do not remove the cover of the motor or disassemble its connector High voltage inside CAUTION Do not set power on unless the motor is mounted and preloaded The motor driver connection is a standard 9 contacts D type female connector whose pinout is given below Motor Connector Pinout Direction 1 Common Direction 2 Screen OI oua Figure 2 8 Motor Connector NOTE Pins 6 and 1 on the motor connector are shorted This is done for safety reasons driver voltage is disabled unless pins 1 amp 6 are shorted when motor is connected HR4 Motor User Manual 2 10 Chapter 2 Preparation and Installation For Ultra High Vacuum motor The HR4 1 U motor does not have an outlet cable or a connector Instead there are 3 TFE jacketed wires extending outside the motor 1 black wire 1 red and 1 white wire The red and white wires are direction 1 and 2 respectively and the black wire is the common Also the safety shorting between pins 1 and 6 is not implemented and should be preformed by the user WARNING Since there is no cable shielding the HR4 1 U motor case to the ground it must be grounded by means of connection to the network ground Please refer to section 2 2 3 in the manual for detailed instructions 2 2 4 2 System Electr
4. Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent Aspects of the HR4 motors and relevant applications are protected by the following patent and patent applications e US 5453653 e US 5714833 e US 5696421 e US 5616980 e US 5682076 HR4 Motor User Manual Definition of Terms Warnings and Cautions Preface NOTE Additonal usefull information CAUTION Identifies conditions or practices that could result in damage to this product or other property WARNING Identifies conditions or practices that could result in personal injury damage to the product or other property WARNINGS Do not remove the cover of the motor or disassemble its connector High voltage inside Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor CAUTIONS a Arrows on motor indicate direction of motion Align accordingly Do not set power on unless motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips ar
5. 89 336 EEC as amended by 92 31 EEC and 93 68 EEC Harmonized Standards to which conformity is declared EN 50081 2 1993 EN 55011 1991 Generic Emission Standards Class A for radiated emission and Class B for conducted emission EN 50082 2 1995 Generic Immunity Standard NOTE UHV motors are designed for convenient interface to the UHV setup The motors are therefore supplied with three open electrical leads Whereas standard motors comply with CE regulations and the UHV motors have the same internal design as standard motors the UHV motors are supplied as components and CE conformity in both EMI and Safety must be implemented as part of the UHV system design April 2000 This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd HR4 Motor User Manual Preface Preface Warranty Patents This Installation Manual is designed to help the reader install and operate the various types of Nanomotion s HR4 Piezoceramic Motors This manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical dimensions as well as the mechanical and electrical installation procedures for these motors The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty
6. against the ceramic drive plate Released position Figure 2 7 Released Position 5 Ground the motor according to the following section 2 2 3 Motor Grounding Warning Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 Prepare a grounding wire and terminal connection with the following specifications Terminal diameter for an screw Wire diameter minimum 18 AWG Wire length maximum of 2 meter 2 Open the motor ground screw figures 3 5 amp 3 6 and connect the Ground connection prepared in step 1 Secure the terminal between the two lock washers 4 Connect the other end of this cable to the electrical network ground 5 Connect the motor to its driver according to the instructions given in the following section HR4 Motor User Manual 2 9 Chapter 2 Preparation and Installation 2 2 4 Motor Connections This section describes the motor connector pinout and the connections to each of the available drivers Make sure the driver is set to operate with the HR4 motor series CAUTIONS Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion Extending the motor cable will not damage the motor however it will affect its performance 2 2 4 4 Motor Connector Pinout
7. sec m 1 to 2 V driver dependant Better than 100nm see application notes 20 000 hours under nominal operating conditions 270Vrms 39 6KHz sine wave 320 mA rms 15W 0 50 C 40 C 70 0 80 non condensing 107 Torr guaranteed only after baking 10 19 Torr guaranteed only after baking 120 C 140 C for ultra high vacuum motor 42mm 46 6mm 15mm 73 gr HR4 Motor User manual 3 3 Chapter 3 Specifications 3 2 5 Performance Envelope with the AB5 driver Due to the AB5 s unique features the EOP of the motor when being driven by it is significantly different than with all other Nanomotion drivers In order to avoid damaging the motor it is important to adhere to the EOP as depicted in the following graph and table Force vs Velocity at varying working regimes 200 0 100 300 Velocity mm sec Duty Cycle Max Operation time sec Ambient Ambient Vacuum Curve 2976 d Rr Vacuum Break Off Break On Break On a 100 100 56 unlimited 500 b 100 100 54 unlimited 450 C 100 100 45 unlimited 280 d 100 100 33 unlimited 170 e 99 99 23 unlimited 100 f 53 58 15 170 66 g 33 48 11 77 44 h 17 28 6 5 32 25 Figure 3 3 EOP with ABS HR4 Motor User manual 3 4 Chapter 3 Specifications As described in the AB5 s manual when operating it in the Brake Off mode the motor consumes power at all times
8. NANOMOT ON ro March 2005 P N MSP4 458 000 A Nanomotion Ltd POB 223 Yokneam 20692 Israel Tel 972 4 959 0862 Fax 972 4959 0995 Web Site www nanomotion com E mail nano nanomotion com Limited Warranty Nanomotion hereinafter NM warrants the product other than software manufactured by it to be free from defects in material and workmanship for a period of time of one year except those parts normally considered as consumable expendable components such as motor conditioning brushes The warranty commences thirty 30 days from the date of shipment NM warrants those parts replaced under warranty for a period equal to the remaining warranty coverage of the original part NM s sole and exclusive obligation under this warranty provision shall be to repair or at its sole option exchange defective products or the relevant part or component but only if i the Purchaser reports the defect to NM in writing and provides a description of the defective product and complete information about the manner of its discovery within ten 10 days of its discovery ii NM has the opportunity to investigate the reported defect and determines that the defect arises from faulty material parts or workmanship and iii the Purchaser returns the affected product to a location designated by NM These provisions constitute the exclusive remedy of the Purchaser for product defects or any other claim of liability in connection with the purchase or use of
9. NM products This warranty policy applies only to NM products purchased directly from NM or from an authorized NM distributor or representative This warranty shall not apply to i products repaired or altered by anyone other than those authorized by NM ii products subjected to negligence accidents or damage by circumstances beyond NM control iii product subjected to improper operation or maintenance i e operation not in accordance with NM Installation Manuals and or instructions or for use other than the original purpose for which the product was designed to be used The warranty stands only when the motors are used with the NM drivers amplifiers NM shall not in any event have obligations or liabilities to the Purchaser or any other party for loss of profits loss of use or incidental increased cost of operation or delays in operation special or consequential damages whether based on contract tort including negligence strict liability or any other theory or form of action even if NM has been advised of the possibility thereof arising out of or in connection with the manufacture sale delivery use repair or performance of the NM products Without limiting the generality of the preceding sentence NM shall not be liable to the Purchaser for personal injury or property damages HR4 Motor User Manual CE Compliance Copyright The motors and drivers comply to the following directive Safety IEC 61010 1 1990
10. R4 Motor User Manual 2 4 Chapter 2 Preparation and Installation 1 Clean the bonding region on the stage using a suitable agent such as Acetone or Methanol 2 Peel off the self adhesive backing paper on the Ceramic driving plate The self adhesive tape is compatible with high vacuum applications 3 Referring to the figure below place the plate in position verifying that There is a maximum of 3 5mm between the lower edge of the Ceramic driving plate and the motor mounting surface There is a minimum of 12 0mm between the upper edge of the Ceramic driving plate and the motor mounting surface Ceramic driving plate Mounting Surface D Figure 2 3 Ceramic Driving Plate Position Continued on the following page HR4 Motor User Manual 2 5 Chapter 2 Preparation and Installation 4 Referring to the figure below apply two drops of epoxy adhesive on the center of the Ceramic driving plate upper surface about 2cm apart The Epoxy must bond between the plate and the stage Recommended adhesive Emerson amp Cuming ecobond 24 for vacuum applications 2216 epoxy or CIBA GEIGEY Arldite Radite for non vacuum applications NOTE Be sure the epoxy contacts the upper surfaces of the plate and the stage carriage but does not flow over the Ceramic plate front surface Ceramic Plate Figure 2 4 Securing the Ceramic Driving Plate to the Stage 5 Allow the required time period for curing acc
11. Y MOUNTED AGAINST ALUMINA STRIP 3 ALL DIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 copy of layout drawing SPAU M10 LOO 20 Figure 3 7 Dimensions for Ultra High Vacuum Motors HR4 Motor User Manual 3 7 Chapter 3 Specifications 3 3 3 Mounting Base Dimensions STAGE CARRIAGE 2 75 REF A CERAMIC PLATE MOTOR MOUNTING SURFACE SHOULD BE FIXED TO STAGE BASE 10 7 0 1 25 8 0 1 2 2 Q 1 Figure 3 8 Base Layout HR4 Motor User Manual 3 8
12. e not subjected to mechanical shocks n Be sure that the distance of the motor to the plate enables the motor finger tip to contact the driving plate otherwise the motor might be damaged during operation 7 The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness n Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation from Nanomotion Extending the motor cable will not damage the motor however it will affect its performance HR4 Motor User Manual Preface Table of Contents INTRODUCTION Eee 1 1 1 1 Aboutthe Motor n nene eter etait enti 1 1 1 2 Vacuum MOtOLs ien eer eee GE ee Der etie Lacan 1 1 1 3 HR4 System Parts 2 iieri 1 2 LE E fEl o aT EE E eC 1 2 1 5 Installation and Servicing 2 ccccceseeceeeeeeeeeeeeeeeee 1 2 PREPARATION AND 2 1 2 1 Pr paration cecinere 2 1 2 4 1 Mounting Base Ten use eei de tete d eee rte Eva Pe Pec ede tes 2 2 2 1 2 Limiting Stage Motions zian eifant F R SEES E nennen nnne 2 3 2 2 Motor Installation iecore nance nisin Min anita es 2 4 2 2 1 Bonding the Driving Plate to the
13. even when the control command voltage is zero thereby reducing the thermal EOP If Break Off mode is desired while working in vacuum the following operating regime must be maintained within the specific duty cycle stated in the chart once the maximal continuous operation time has elapsed the motor must be disabled and allowed to cool off for at least 400 seconds For example looking at curve C in vacuum with the break off after 280 seconds of working at the 45 duty cycle specified the motor must be disabled for at least 400 seconds to cool off This is true also if a smaller duty cycle is maintained HR4 Motor User manual 3 5 Chapter 3 Specifications 3 2 6 Performance Envelope with the AB1A AB2 AB4 drivers The following graph illustrates motor velocity as a function of the applied driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance Motors velocity VS command 300 0 250 0 4 200 0 150 0 100 0 50 0 0 0 Velocity mm sec 0 1 2 3 4 5 6 7 8 9 10 Command V Figure 3 4 Motor Velocity vs Command The motor operates horizontally at room temperature and low duty cycle 1096 It interfaces an Ceramic Strip according to Nanomotion Specifications and a cross roller high quality slide HR4 Motor User manual 3 6 Chapter 3 Specifications The following graph and table are desi
14. gned to help the user determine the correct performance envelope of operation so as to not overheat and damage the motor Force Vs Velocity at various work regimes 15 Z 10 8 5 5 0 0 100 200 300 Velocity mm sec max continuous max continuous max continuous Duty Cycle peration time Duty Cycle operation time Duty Cycle operation time 87 seconds 62 seconds 56 seconds Figure 3 5 Performance envelope at various work regimes How to define a performance envelope An example for using the graph and table A vacuum application requires 5N at a velocity of 700mm sec The graph shows that this point of operation corresponds to curve The table shows that curve d and a vacuum environment require that a duty cycle of 17 will not be exeeded while maintaining a maximum continuous operation time of 72 seconds Vacuum application note Heat dissipation mechanism is by radiation to the motor case and by conduction through the fingers Hence the motor and the ceramic drive strip bases must both be thermaly designed to dissipate 1W each per motor with a temperature rise of 15 C maximum Also the temperature of all parts in contact with the motor and with the ceramic drive strip should not exeed 40 C HR4 Motor User manual 3 7 3 3 Schematics 3 3 1 Dimensions for Standard and High Vacuum Motors
15. hocks 1 5 Installation and Servicing It is recommended to follow the installation instructions in this guide when mounting and installing the motor The HR4 does not contain any user serviceable parts HR4 Motor User Manual 1 2 2 Preparation and Installation 2 1 Preparation For optimal motor performance it is recommended to use the Ceramic driving plate provided by Nanomotion These driving plates have been specifically designed to work with Nanomotion motors Substituting this plate with any other material might reduce motor performance or damage the motor NOTE The instructions given in this section refer to the standard ceramic driving plates provided by Nanomotion Nanomotion can not guarantee performance attained by plates purchased from other sources HR4 Motor User Manual 2 1 Chapter 2 Preparation and Installation 2 1 1 Mounting Base Prepare the base as described in Section 3 3 3 Mounting Base Dimensions The base should be positioned perpendicular to the Ceramic driving plate that is bonded to the stage If necessary refer to the schematic for motor dimensions CAUTION The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Stage Carriage Ceramic Driving Plate location Mounting Base 4 x holes Figure 2 1 Motor Mounting Base The mounting base dimensions diagram refers to the front
16. ical Configuration The Motor is to be operated by one of Nanomotion s drivers Following is the two possible configurations Nanomotion s Driver Without an Integrated LC 1 1 mo LC circuit Box Figure 2 9 Connection to a driver using an external LC box Nanomotion s Driver With an Integrated Internal LC circuit Figure 2 10 Connection to a Driver with internal LC circuit HR4 Motor User Manual 2 11 2 2 5 Motor Run In Chapter 2 Preparation and Installation Run in of the motor is important to reduce wear rate of the system and to increase its lifetime The required run in conditions are as follows e velocity 100 mm sec e Duty cycle 50 e Duration 4 hours When the run in is completed carefully clean the ceramic strip with a Q Tip soaked with IPA without dismounting the motor General remarks 1 The procedure should be repeated if the motor is disconnected and then reinstalled 2 Do not perform run in in a vacuum environment HR4 Motor User Manual 2 12 3 3 1 Chapter 3 Specifications Specifications General These specifications apply to the standard motor driven by the AB1A Driver Box The motor features a linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Figure 3 1 Block Diagram of the Motor and Driver Where Vin Command to the driver 10
17. igh precision ceramic motors Designed and manufactured by Nanomotion Ltd the HR4 motors combine unlimited stroke with high resolution in compact dimensions Among its applications are microscopy precision motion robotics etc The motors provide a linear response to the input voltage The operation of the motor and driver resembles that of a DC motor driven by a voltage amplifier The specifications described in this chapter apply only to the motor driven by AB1A Driver Minor differences may result if AB2 AB4 or AB5 are used Vacuum Motors Applications of the Nanomotion motors for vacuum and high vacuum environments include wafer inspection and metrology scanning stages and lithography The HR4 V and HR4 U motors are constructed of materials that have been selected and designed for high vacuum compatibility HR4 Motor User Manual 1 1 Introduction 1 3 HR4 System Parts A complete set for a single axis will comprise of the following a HR4 Motor b Ceramic Driving Plate for linear applications or Ceramic Driving Ring Disk for rotary applications see section 2 2 1 c One of the following drivers a AB1A a AB2 ABA a AB5 1 4 Handling CAUTIONS Do not set power on unless the motor is mounted and preloaded Do not immerse the motor in any solvent or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical s
18. ording to the Epoxy manufacturer specifications 6 Mount the motor according to the following section HR4 Motor User Manual 2 6 Chapter 2 Preparation and Installation 2 2 2 Mounting the Motor 1 Retract the motor using a 3mm flat screwdriver turn both of the two preload setting screws counter clockwise until the turn is completed and the slot is in the position illustrated below NOTE the motor is usually supplied with the preload screws already retracted If so please continue to step 2 Retracted position Figure 2 5 Retracted Position Continued on the following page HR4 Motor User Manual 2 7 Chapter 2 Preparation and Installation Stage Carriage Mounting Base Stage Base 77 P Ceramic Driving Plate Figure 2 6 Mounting the Motor 2 While making sure not to exert any force on the fingers place the motor on the mounting base and loosely secure it using four M4 screws and spring washers inserted from the underside of the mounting base Do not tighten yet 3 Gently press the motor against the ceramic driving plate until it just contacts it and tighten the four screws of Step 2 at a torque of 0 5 0 7 Nm HR4 Motor User Manual 2 8 Chapter 2 Preparation and Installation 4 Release the preload setting screws using again the 3mm flat screwdriver turn both screws clockwise until the turn is completed and the slot is in the position illustrated below The motor is now correctly mounted
19. surface of the ceramic driving plate For driving plate dimensions please refer to the price list The four screws securing the motor to the mounting surface will be inserted from its underside Any protrusion of the screws might interfere with motion on another axis HR4 Motor User Manual 2 2 Chapter 2 Preparation and Installation 2 1 2 Limiting Stage Motion The provided ceramic driving plate should not exceed the stage It must be supported by a solid even backing along all its length in order to avoid breaking when motor is pressed against it The Ceramic driving plate should also be at least 20 mm longer than the stage travel length otherwise the motor finger tips might be damaged If the above requirements are not met limit the stage travel distance using end stops HR4 Motor User Manual 2 3 Chapter 2 Preparation and Installation 2 2 Motor Installation The installation procedure consists of Bonding the Ceramic Driving plate to the stage Mounting the motor Grounding the motor a Connecting the motor to its driver 2 2 1 Bonding the Driving Plate to the Stage The Driving Ceramic Plate interfaces between the motor finger tips and the stage and provides the required friction Bond the driving plate to the stage surface interfacing with the motor finger tips according to the instructions given in this section Stage Cermic Driving Plate Figure 2 2 Bonding the Ceramic Driving Plate H
20. to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor similar to back EMF N x sec m Vel Motor velocity m Sec M Moving mass kg S Laplace variable 1 sec HR4 Motor User Manual Chapter 3 Specifications A block diagram of a typical HR4 Driver Motor Sub system is shown below A command voltage of 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the HR4 motor NN Figure 3 2 Block Diagram of a typical HR4 Driver Motor Sub system V Motor Velocity Force I gt V Command HR4 Motor User manual 3 2 Chapter 3 Specifications 3 2 Specification Parameters 3 2 1 Performance Maximum Allowable Velocity Dynamic Stall Force Static Holding Force Non Energized Stiffness Nominal Preload on Stage Kf Kfv Offset Attainable Resolution Nominal Lifetime 3 2 2 Electrical Maximal Voltage Maximal Current consumption Maximal Power Consumption 3 2 3 Environmental Ambient Temperature Storage Humidity Vacuum level high vacuum motors Vacuum level ultra high vacuum motors Maximum Baking Temperature for vacuum motors 3 2 4 Physical Dimensions Length Width Height Weight 250 mm sec 15 to 18 N 14 N reference value 2 3 to 2 8 72 N 2 to 4 N Volt driver amp command dependant 60 to 72 N e
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