Manual - The Molecular Materials Research Center
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1. gt al T e 2 amp Ei e ee Figure 2 IGM I O Interface When using the InstruTech s power Supply PS501A connect the power supply only to the Analog connector Do not connect the InstruTech PS501A power supply to the RS485 Com connector Caution Use only one InstruTech power Supply PS501A Do not connect two Instrutech PS501A power supplies to the IGM Simultaneously This will result in power supply and instrument damage DO NOT PLUG InstruTech PS 501 into RS 485 Comm Figure 3 InstruTech Power Supply PS501A Connection InstruTech Inc page 8 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module The IGM allows for operation of the unit including turning the gauge filaments on off selecting emission current and turning Degas on off using digital inputs RS485 communication commands or the front panel push buttons Digital Inputs using the Analog Connector When using the Analog I O connector fabricate a cable to 9 pin D connector according to digital input signals and pin assignments as described below Table 1 381401 I O Analog Connector PIN NUMBER PIN DESCRIPTION 1 Gauge On Off input signal The gauge filament is activated Operational by applying a continuous ground This will activate the IGM and will turn on the Filament The gauge is turned off by removing the ground 2 Power ground 3 An2. The following chart shows the graphical results of table 5 and formulas above Pressure is plotted on the X axis with a log scale the output signal is plotted on the Y axis on a linear scale Log Linear Analog Voltage to Pressure 10 0 VDC See Conditions which causes the output to switch to gt 10VDC These conditions are listed under the Analog Output section on this page 9 0 8 0 7 0 6 0 5 0 4 0 Output Signal Volts dc 3 0 2 0 1 0 0 0 r 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 Pressure Torr Figure 7 Plot of the formulas and data for the log linear output signal InstruTech Inc page 15 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Activating the IGM Turning the Filaments on Before you activate the gauge filament make sure you understand all instructions and information provided in this manual You can activate the IGM gauge filaments turned on and operating by one of the following three methods 1 Front Panel push buttons This is achieved by first selecting Front Panel in the INPUT CNTRL submenu of the SETUP UNIT menu Then access the UNIT ON OFF in the FP OPERATE submenu of the SETUP UNIT and select On to turn the gauge filament on 2 Digital Input This is achieved by first selecting DIGI RS485 in the IN
3. address offset upper ae Power up the filament and start reading pressure SET ADDR OFFSET TOGGLE MODULE STATUS TOGGLE DEGAS STATUS Start a degas cycle or turn off SET EMISSION Choose 4mA or 100 STATUS emission current SET FILAMENT Choose Filament 1 or 2 SET OVER PRESSURE SETPOINT Set 100 overpressure turn off point SET TRIP POINT 1 READ MODULE STATUS READ TRIP POINT 1 Set the turns on below pressure point for relay 1 and set the turns off above pressure point for relay 1 Find out if filament is powered up and gauge is reading Read the turns on below pressure point for relay 1 and read the turns off above pressure point for relay 1 XX_Y RESPONSE eg 01_7 60E 02 lt CR gt xXxSAxx lt CR gt xx_PROGM_OK lt CR gt eg 01SA04 lt CR gt xxIGy lt CR gt eg 01IG1 lt CR gt y 1 Turn ON y 0 Turn OFF xxDGy lt CR gt eg 01DG1 lt CR gt Y 1 Turn ON y 0 Turn OFF xxSEy lt CR gt eg 01SE1 lt CR gt y 1 4mA y 0 100 xxSFy lt CR gt eg 01SF1 lt CR gt y 1 for F1 y 2 for F2 xxSOy yyE yy lt CR gt eg 01SO04 00E 02 lt CR gt xxSLzy yyEzyy lt CR gt eg 01SL 4 00E 02 lt CR gt eg 01SL 5 00E 02 lt CR gt xxIGS lt CR gt xx_0_IG_OFF lt CR gt eg 01IGS lt CR gt xx_1_IG_ON lt CR gt xxRLz lt CR gt eg 01RL lt CR gt eg 01RL lt CR gt xx_PROGM_OK lt CR gt
4. s power supply components Danger When the IGM is turned on 180 V is present at the power supply and other components such as the ion gauge and the cable Furthermore voltages as high as 480 V are present during Degas InstruTech Inc page 5 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module It is the user s responsibility to ensure that the electronic signals from the device Analog relays etc are used in a safe manner Always double check the system set up before using these signals to automate your process Overpressure Warning Install suitable protective devices such as relief valves or rupture disks that will limit the level of the pressure to less than what the vacuum system can withstand In cases where an equipment failure could cause a hazardous situation always implement a fail safe operation An example is the use of a pressure relief valve in an automatic backfill operation where a malfunction could result in high internal pressures The gauge should not be exposed to pressures above 1000 Torr Installation Mechanical The IGM is intended for indoor use only and it can be mounted anywhere in the system in any physical attitude Mount the IGM as close as possible to the pressure you want to measure Long or restricted tubing will create a pressure difference error between your process and the gauge and cause a delay in response to pressure changes Mounting the IGM too close
5. xx_PROGM_OK lt CR gt xx_PROGM_OK lt CR gt xx_PROGM_OK lt CR gt xx_PROGM_OK lt CR gt xx_PROGM_OK lt CR gt a _y yyEzyy lt CR gt eg 01_7 60E 02 lt CR gt READ DEGAS Find out if the module is xxDGS lt CR gt xx_0 DG_OFF lt CR gt STATUS currently degassing eg 01DGS lt CR gt xx_1_DG_ON lt CR gt READ EMISSION STATUS Find out emission current level READ MODULE Finds out the cause of the xxRS lt CR gt STATUS controller shutdown eg 01RS lt CR gt xxSES lt CR gt eg 01SES lt CR gt xx_0 1MA_EM lt CR gt xx_4 0MA_EM lt CR gt xx_00_ ST_OK xx_01_OVPRS xx_02 EMISS InstruTech Inc page 23 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE VERSION of the firmware eg 01VER lt CR gt eg 0105041 00 xxFAC lt CR gt eg 01FAC lt CR gt SET FACTORY DEFAULTS Force unit to return ALL settings back to the way the factory programmed them before shipment Set the communications RATE baud rate for RS485 and RS232 SET NO PARITY Set the communications to NO parity 8 bits for the RS485 and RS232 SET ODD Set the communications to ODD parity 7 bits for the RS485 and RS232 SET EVEN Set the communications to EVEN parity 7 bits for the RS485 RS232 UNLOCK COMM If the UNL command is PROGRAMMING enabled by the TLU UNL command the UNL command must be exec
6. Do H gt Caution If you intend to use Nitrogen as the default gas even though the gas in use is not Nitrogen you can select N2 from the menu but you must manually apply a gas sensitivity correction factor to the displayed measurement and outputs Refer to section on Gas Sensitivity Correction Factor INPUT CNTL Factory default DIGI RS485 This allows the user to turn the filaments on off select emission current and turn Degas on off using digital inputs RS485 communication commands or the front panel push buttons DIGI RS485 The DIGI RS485 allows the application of actual digital inputs or RS485 communication to operate the IGM The default state of the DIGI RS485 selection is Digital inputs This requires application of digital inputs to pins 1 pin 6 and pin 8 of the Analog DSUB Analog 9 pin connector to operate the IGM see table 1 User should verify the DIGI RS485 is selected in the INPUT CNTRL submenu of the SETUP UNIT menu When operating in the Digital Input mode all other inputs are ignored To change from Digital Input to RS485 communication mode use the RS485 DSUB RS485 9 pin connector see table 2 User should verify DIGI RS485 is selected in the INPUT CNTRL submenu of the SETUP UNIT menu In order to operate in the RS 485 mode the user must send an RS485 set command which will cause the IGM to automatically switch to RS 485 mode Note A set command such as turn filament on off must be sent to the IGM in order for
7. a 88 InstruTech Inc Miniature lonization Vacuum Gauge IGM 401 Module The Hornet User s Manual May 2007 Rev 1 06 1475 S Fordham St Longmont CO 80503 Phone 303 651 0551 Fax 303 678 1754 E mail info instrutechinc com Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Table of Contents Introduction General Information Page l Description 3 _ Specifications _ 8 Safety _General_ _ Service and Operation Electrical _ Overpressure out A Installation Mechanical Dimensions nector 8 Pinouts RS485 Connector amp Pinouts Setup amp Operation RS485 Interface RS485 Commands 23 Service amp Maintenance Calibration 26 Warranty i Trademarks amp Acknowledgements InstruTech Inc page 2 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Introduction General Information Description The InstruTech IGM 401 module provides the basic signal conditioning required to turn a lonization vacuum gauge into a complete measuring instrument The module provides a log linear analog output RS485 interface and one setpoint relay In addition a built in display provides a convenient user interface for setup and operation of the vacuum gauge Specifications measurement range signal 1x 10 to 5x 10 Torr 1 3x 10 to 6 7x 10 mbar 1 3x 10 to6 7 Pa display OLED Grap
8. the gauge to auto switch to RS485 Sending read commands such as read gauge pressure will not accomplish this task When operating in the RS485 mode all other inputs are ignored Note To turn off RS 485 interface the reset command must be sent to the IGM or power must be turned off and on This will reset INPUT CNTL to DIGI RS485 factory default setting with the default state of this selection being the Digital inputs again FRONT PANEL This allows the user to turn the filaments on off select emission current and turn Degas on off using the front panel push buttons This is achieved by selecting Front Panel in the INPUT CNTRL submenu of the SETUP UNIT menu In this case the FRONT PANEL overrides any other input and the D G RS485 inputs are ignored If Front Panel is selected the FP OPERATE submenu will appear in the SETUP UNIT menu Access FP Operate submenu next InstruTech Inc page 20 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module FP OPERATE Appears in the SETUP UNIT menu only after FRONT PANEL is selected in the INPUT CNTL menu The following screen will appear if FP OPERATE is selected UNIT ON OFF Factory default OFF Access setting to turn the gauge filament on or off EMISSION SEL Factory default 100UA Acess setting to change emission current to 4 ma or 100 UA DEGAS ON OFF Factory default OFF Access setting to turn Degas on or off SETUP IG DEGAS TIME Factory de
9. to a gas source or pump will also cause errors in the readings Note You can install the IGM in the upside down mounting position if desired The data can be flipped on the display screen by selecting the FLIP SCREEN option from the SETUP DISP menu discussed later in this manual Don t mount the IGM near a source of heating or cooling such as heaters or air conditioning vents Don t mount the IGM above evaporation source as the vapors could result in sensor contamination measurement error or sensor failure Don t mount the IGM where it will be subjected to excessive vibration such as on mechanical pumps Vibrations may cause noisy readings and reading errors due to induced cooling of the sensor Shield the IGM near ion or electron sources such as an electron beam or in a sputtering system Don t mount the IGM near strong magnetic fields These conditions can result in measurement error Fittings follow the fitting manufacturer s recommendations and note the following The IGM is available with the following flanges e NW416KF NW25KF NW40KF 9 1 33 Mini Conflat 2 75 Conflat rotatable For safety purposes the housing of the gauge must be grounded to the vacuum chamber When using the KF flanges metal clamps must be used to ensure proper grounding Do not attempt to modify your flange in order to use non metallic type of flange clamps Use all metal vacuum fittings when operating pressures are expected to be below 1
10. 51 0551 or e mail us at info instrutechinc com If it becomes necessary to return the module to InstruTech for service or calibration please call or e mail us for a return authorization number For the safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot work on gauges that have been exposed to hazardous materials Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within eighteen 18 months unless otherwise noted after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER anda return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not bee
11. PUT CNTRL submenu of the SETUP UNIT menu Then apply a continuous ground to pin 1 of the Analog 9 Pin D connector located on the top the module 3 By RS 485 commands This is achieved by first selecting DIGI RS485 in the INPUT CNTRL submenu of the SETUP UNIT menu Then sending an RS485 command to turn filament on will automatically switch the module to the RS485 mode Initiating filament to turn on will result in only one attempt to activate the gauge filament operational If this is unsuccessful the input must be reset back to off before another attempt is made to turn it on again See messages on display for possible causes If the problem persists consider the following possible causes e Insufficient power if ITI s power supply is not used e System pressure exceeding the overpressure shut down limit or pressure is at a value at which the emission can not be achieved e Contamination e See messages on display for other possible causes Note The filament gauge is turned off by one of the following three methods 1 Front Panel push buttons If this mode was selected previously for operating the module then simply turn off the gauge filament by accessing the UNIT ON OFF in the FP OPERATE submenu of the SETUP UNIT 2 Digital Input If this mode was selected previously for operating the module then turn off the gauge filament by removing the ground from pin 1 of the Analog 9 Pin D connector 3 By RS 485 commands If this mode was
12. Tech s RS 485 connector is a 9 pin female connector If you are replacing an RS 485 version of Granville Phillips Micro lon and would like to use your existing cable a 9 pin female to male gender changer is required Please can contact InstruTech or your local connector suppliers to obtain this part InstruTech Inc page 10 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Setup and Operation Turning On Power to IGM Connect power to IGM using the designated pins 4 and 2 as shown in Table 1 The display will show Unit Status Off This indicates the display is on but the gauge filaments have not been activated and operational yet Read this instruction manual in its entirety before activating the gauge filaments Refer to Activating the IGM section for further instructions on activating operating the gauge filaments Gas Sensitivity Correction Factor InstruTech gauges and modules are calibrated for No Warning Read the following information very carefully if you intend to use a gas other than Nitrogen or air The IGM offers the user the choice to use the factory default Nz or select from a table of 16 most commonly used gases in the menu Using Nitrogen as the default gas If you intend to use Nitrogen as the default gas even though the gas in use is not Nitrogen you can select N2 from the menu but you must manually apply a gas sensitivity correction factor to the display
13. alog Output log linear 0 to 9 Vdc 1V decade 4 Power Input 20 28 Vdc at 14 Watts Protected against power reversal transients and over voltages 5 Degas Status output signal This is an output signal to other external instruments to confirm Degas is on or off Signal Open collector transistor ground emitter rated at 40 V max VCE 50 mA max Transistor off degas off transistor on degas on 6 Degas On Off Input signal The Degas is initiated by applying a ground The degas cycle will last for 2 10 minutes based on user setting even if ground is removed The ground must be removed to start cycle again 7 Analog Signal Ground Use only as analog output ground 8 Emission Current Applying ground changes emission current from 0 1 ma 100 to 4 ma 9 Gauge Status This is an output signal to other external instruments to confirm Gauge Filament is on or off Signal Open collector transistor ground emitter rated at 40 V max VCE 50 mA max Transistor off Gauge off transistor on Gauge on Degas Status Input Power Analog Output Power Ground Gauge On Off 9 Gauge Status 9 CMO 8 Emission Range ff 7 Analog Output Ground lt a amp 6 6 Degas On Off Figure 4 IGM401 Analog 9 Pin male I O Connector Note If you are replacing a GP Micro lon module first determine if you are using the Analog Output or the RS485 Digital version of Micro l
14. ed measurement and outputs The following table provides some typical correction factors To correct the measurements divide the measured pressure by the correction factors Table 3 Gas Sensitivity Correction Factors Gas Sensitivity Gas Sensitivity Correction Factor Correction Factor He 0 18 H2O 1 12 Ne 0 30 NO 1 16 D2 0 35 Ar 1 29 H2 0 46 CO 1 42 N2 1 00 Kr 1 94 Air 1 00 SF 2 50 O gt 1 01 Xe 2 87 CO 1 05 Hg 3 64 Example A The IGM is selected for Nitrogen The gas in use is helium The measured pressure is displayed at 4x10 Then the actual pressure of Helium is 4 x 10 0 18 2 22 x10 Torr of Helium Selecting a specific gas other than Nitrogen If a specific gas other than Nois selected from the menu the IGM will automatically apply the conversion factor to the measurement The specific gas symbol will also be displayed along with its measurement value In this case no correction factor needs to be applied to IGM s measurements The user must ensure all operators are aware the display measurement represents the true measurement value specific to the selected gas InstruTech Inc page 11 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Emission Current IGM provides a choice of 4 ma or 100UA 0 1 ma emission current As a general rule in clean applications and operating at higher pressure ranges 5 x 10 Torr to 2 5
15. fault 2 The length of time in minutes degassing will run after it is initiated Degas cycle can be selected from 2 to 10 minutes OVER PRESS 4 Factory default 17 30E 03 TORR This allows the user to set the pressure at which the gauge will turn off when the emission current is running at 4 ma Any value higher than 7 30E 03 TORR can not be set OVER PRESS 100 Factory default 5 00E 02 TORR This allows the user to set the pressure at which the gauge will turn off when the emission current is running at 0 1 ma 100 Any value higher than 5 00E 02 TORR can not be set SENSITIVITY Factory default Actual Sensor sensitivity Factory pre set based on individual tube calibration All sensor tubes are marked with their specific sensitivity value Also user adjustable between 2 to 99 using the display commands Caution User assumes all risks if sensitivity is set to a value not matching the actual sensor sensitivity marked on the sensor tube FILAMENT NUM Factory default FILAMENT 1 Allows user to select which filament to operate Filament 1 or Filament 2 Note It is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive Filament not operating for an extended length of time can cause failure of that Filament This will be more problematic in dirty applications RLY LO TRIP Factory default 1 00E 06 TORR This setpoint corresponds to the turn on points for the relay The relay wi
16. gs are used when operating below 1 0E 07 TORR lon gauge can not be turned on Pressure exceeds 1 30E 03 TORR at 4 decrease pressure below ma emission required value Pressure exceeds 5 0E 02 TORR at decrease pressure below 0 10 ma 100uUA emission required value Emission Control not functioning switch to the other filament replace lon gauge sensor tube due to possible filament failure or contamination Research Screen shows filament Filament is open switch to the other filament or Voltage is present but filament current replace sensor stays at 0 Research Screen shows filament Filament is contaminated or burned out switch to the other filament or Voltage and filament current are replace sensor present but gauge is shutting off Unable to initiate Degas System pressure above 5 0 x10 decrease pressure below the required value Voltage to Filament too high Filament contaminated or near end of switch to the other filament or its life replace sensor Setpoint does not actuate Incorrect setup check setpoint setup InstruTech Inc page 26 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Sensor Replacement The IGM module is factory calibrated for the specific lon gauge sensor tube installed in it If the gauge sensor fails for any reason it can be replaced with a new one The sensitivity of the new sensor must be re programmed in the IGM electronics Follow all instructions below in order to re
17. hical Display 3 digits plus 2 digits exponent bright yellow materials exposed to gases Dual Filaments Coated Iridium lon Collector Tungsten Grid Tantalum Enclosure 316 304 stainless steel sensitivity Factory pre set Also user adjustable between 2 to 99 using the display X ray limit lt 5 10 emission current 0 1 4 degas 4 Watts e beam overpressure protection Gauge turns off at factory default setting of 5 X 10 Torr internal gauge volume 1 0 in 16 4 cm operating temperature 0 to 40 C bakeout temperature 200 C sensor only electronics removed humidity 0 to 95 RH non condensing weight 0 6 Lbs 0 27 kg with NW25 KF flange mounting Orientation Any digital Interface RS 485 output signals analog Output filament amp Degas Log linear 0 to 9 Vdc 1V decade Degas amp Filament on off status are determined by an open collector transistor or via RS 485 digital communications protocol setpoint relay adjustment Single pole double throw SPDT 1A at 30 Vdc resistive or ac non inductive Adjust value using the front panel push buttons or RS 485 commands input signal Degas and Filament on off amp emission current are set by continuity to ground using digital inputs via RS 485 commands or by using the front panel push buttons filament selection User selectable between filament 1 or 2 using the front panel p
18. ll turn on when the pressure drops below this setting RLY HI TRIP Factory default 5 00E 06 TORR This setpoint corresponds to the turn off points for the relay The relay will turn off when the pressure rises above this setting RELAYTEST Factory default ON This allows the user to manually turn the relay on and off to test wiring and ensure polarity is as desired InstruTech Inc page 21 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module VENT DETECT Factory default ON When VENT DETECT is ON it provides a quick vent protection of the filaments in the event of a system dump to atmosphere In rare cases this protection could cause the filament not to start properly after filaments have been shut down If such is the case you can change the VENT DETECT setting to Off so the filament can receive full power in spite of conditions NOTE User should turn VENT DETECT OFF only if vent to atmosphere can either be prevented or the gauge can be turned off by external means FIL USAGE Factory default all at 29 0 This allows the user to view how many hours each filament has been turned on and how many minutes degassing has been applied to each Filament The Display in this screen provides the following data F1 H Number of hours Filament 1 has been in use F2 H Number of hours Filament 2 has been in use D1 M Number of minutes Filament 1 has been degassed D2 M Number
19. manual are the property of the following companies Micro lon are registered trademarks of Brooks Automation Helix Technology Corp Granville Phillips Conflat and Mini Conflat are registered trademarks of Varian Vacuum Technology Cajon and VCR are registered trademarks of the Swagelok Company Teflon is a registered trademark of DuPont InstruTech Inc page 28
20. n of process gases with sensor elements or B an accumulation of material on the sensor elements Sensors that fail due to contamination are not covered under warranty Electrical conditions Danger When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors are maintained at earth ground This applies to all products that come in contact with the gas Danger An electrical discharge through a gas may couple dangerous high voltage directly to any ungrounded conductor A person may be seriously injured or killed by coming in contact with an exposed ungrounded conductor at a high voltage potential This applies to all products that may come in contact with the gas Proper Grounding Verify that the vacuum port on which the module is mounted on is electrically grounded This is essential for safety as well as proper operation The gauge and or case of the module must be connected to earth ground Use a ground lug on the flange if necessary Danger In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system Danger The power supply used in the IGM is subject to high voltages which could cause severe injury or death In order to prevent electric shock and bodily harm user should wait for at least 5 minutes after power is removed before touching IGM
21. n operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER Trademarks amp Acknowledgements These trademarks used throughout this
22. nnect the cable from the IGM 3 Use 3 32 size Allen Wrench to remove the 4 40 socket head cap screws as shown below 4 Detach the metal enclosure and the electronic from the sensor 5 The black plastic cap attached to the gauge tube and the end plate does not have to be removed for Bakeout BAKEOUT SENSOR STAYS ON VACUUM SYSTEM E 4 40 X SOCKET ELECTRONICS AND HEAD CAP SCREW ENCLOSURE NEED TO BE 4 EACH REMOVED BEFORE BAKEOUT Figure 6 Bakeout InstruTech Inc page 14 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Analog Output Table 5 Log Linear Analog Output The log linear output signal and pressure are related by Pressure Torr Voltage the following formulas 10 10 00 P 10 19 V logio P 10 1 09 1 0 where P is the pressure in Torr and V is the output l 1 signal in Volts 1 0E 08 2 0 1 0E 07 3 0 The output voltage is zero when pressure is at 1 0E 10 1 0E 06 40 The output voltage will switch to above 10 Vdc 1 0E 05 2 0 under the following conditions 1 0E 04 6 0 1 The gauge is turned off 2 The pressure exceeds 1 30 x10 Torr at 4ma 1 0E 03 7 0 emission current 1 0E 02 8 0 3 The pressure exceeds 5 0 x10 Torr at 0 1 ma 100 emission current 5 05 02 8 698 4 The pressure exceeds 3 0 x10 Torr during Degas Filament if off gt 10
23. o not use this device in an explosive atmosphere or in the presence of flammable gases or fumes Do not use this device to measure the pressure of explosive or combustible gases or mixtures The sensor filaments operate at incandescent temperatures and could become an ignition source InstruTech gauges and modules are calibrated for Nitrogen See page 8 for explanation Ensure the IGM is properly connected to earth ground Do not turn on Filaments when pressure exceeds 1 30 x10 Torr at 4ma emission current Do not turn on Filaments when pressure exceeds 5 0 x10 Torr at 0 1 ma 100UA emission current Ensure vacuum level is at or less than 5 0 x10 Torr before attempting to initiate Degas Use the appropriate power source of 20 to 28 Vdc at 14 W Turn off power to the IGM before attempting to service the module Do not touch any of the gauge tube pins when under vacuum Turn off power to the IGM before detaching the electronics from the sensor for sensor replacement or bakeout purposes Turn off power to the IGM if a cable or plug is damaged or the product is not operating normally according to this instruction manual Contact a qualified InstruTech technician for any service or troubleshooting condition that may not be covered by this instruction manual Do not use if IGM has been dropped or the enclosure has been damaged Contact a qualified InstruTech technician for possible return to InstruTech for evaluation InstruTech Inc
24. of minutes Filament 2 has been degassed The usage numbers are non resetable The user should record the usage time when replacing the lon gauge sensor SETUP COMMS BAUD RATE Factory default 19200 8 N 1 This sets the baud rate for the RS485 communications The baud rate can be set to many other values through the serial interface command set The parity can also be changed When this occurs the current setting will be shown in the list of choices and can be re selected if changed ADDR Factory default 1 This is the lower nibble of the one byte RS485 device address e g Setting this to a 5 would make the address be 0x05 in hex a 15 would be OxOF in hex if the address offset is equal to 0 ADDR OFFSET Factory default 0 This is the upper nibble of the one byte RS485 address e g Setting this to a 5 with ADDR 0 would make the address 0x50 a 15 would be OxF0 SERVICE INFO Provide Software Version number OP TIME Provides information on how long the unit has been on regardless of Filament operation InstruTech Inc page 22 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module RS485 Interface RS485 Command Protocol Summary Note Note This protocol was designed to be 100 compatible with the Micro lon COMMAND BRIEF DESCRIPTION COMMAND SYNTAX Read the current xxRD lt CR gt pressure in Torr eg 01RD lt CR gt READ Set the communications RS485
25. ommands This is achieved by first selecting DIGI RS485 in the INPUT CNTRL submenu of the SETUP UNIT menu Then sending an RS485 command to degas will automatically switch the module to the RS485 mode Degas will automatically turn off after 2 minutes when using factory default settings The user can however reprogram the IGM for a Degas cycle to last anywhere between 2 to 10 minutes The IGM will continue to display the measured operating pressure while Degas is proceeding Degas will automatically turn off if the pressure exceeds 3 0 x10 Torr during the Degas cycle Degas can be interrupted by turning off the Filament It is not recommended to run Degas for more than 30 minutes every 4 hours InstruTech Inc page 13 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Bakeout A chamber bake may be performed for new systems or after routine maintenance The sensor can be baked out to 200 C as long as the sensor fitting uses Metal O rings For sensor fittings using elastomer O rings the maximum bakeout temperature is limited to the maximum temperature rating of the elastomer O ring Ensure the temperature of the sensor tube and the vacuum fitting to the sensor is at the same or above the chamber temperature The electronic module must be removed from the sensor if the bake out temperature is to exceed 70 C To bake out the sensor use the following procedure 1 Turn off power to the IGM 2 Disco
26. on module Then simply plug your existing cable into one of the two appropriate 9 pin connectors on the end of the InstruTech module InstruTech Inc page 9 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module RS485 Interface When using the RS 485 I O connector fabricate a cable to 9 pin D connector according to signals and pin assignments as described below Table 2 IGM401 85465 I O Connector PIN NUMBER PIN DESCRIPTION 1 Setpoint relay Normally Open 2 Power Input 20 28 Vdc at 14 Watts Protected against power reversal transients and over voltages Caution Do not connect InstruTech s power supply PS501 A to the RS485 Com Connector PS501 A must be connected to the Analog connector shown in page 9 No connection Power ground Setpoint relay Normally Closed RS 485 Input Setpoint Relay Common No connection 00 NI gt O1 A RS 485 Input Setpoint Relay N O Power Input No Connection Power Ground Setpoint Relay N C 1 4 5 6 RS 485 Input 8 7 Setpoint Relay Common BoE Pk ae 8 No Connection 5 222 5 9 RS 485 Input 5 7 Figure 5 IGM401 RS 485 Comm 9 Pin female I O Connector Note The RS 485 version of Granville Phillips Micro lon is provided with a 9 pin male connector The Instru
27. ory default MENU TO EXIT GAS TYPE Factory default N2 INPUT CNTL Factory default DIGI RS485 Factory default is Digital Input FP OPERATE Appears only when FRONT PANEL is selected in INPUT CNTL above UNIT ON OFF Factory default OFF EMISSION SEL Factory default 100UA DEGAS ON OFF Factory default OFF SETUP IG DEGAS TIME Factory default 2 OVER PRES 4 Factory default 1 30E 03 TORR OVER PRESS 100 Factory default 5 00E 02 TORR SENSITIVITY Factory default Actual Sensor sensitivity nominal 8 12 FILAMENT NUM Factory default FILAMENT 1 RLY1 LO TRIP Factory default 1 00E 06 TORR RLY1 HI TRIP Factory default 5 00E 06 TORR RELAY 1 TEST Factory default OFF VENT DETECT Factory default ON FIL USAGE Factory default all at OM zero minutes SETUP COMMS BAUD RATE Factory default 19200 8 N 1 ADDR Factory default 1 ADDER OFFSET Factory default SERVICE MENU INFO Factory default FIRMWARE VERSION OP TIME Factory default TOTAL TIME OPERATIONAL lt MINUTES gt 0 Note The above correspond to the GP Micro lon modules factory setting If you are replacing a GP Micro lon module you do not need to change any of the parameters programmed in the factory If you wish to make any changes refer to the next section for menu item explanations InstruTech Inc page 18 Instruction Manual InstruTech IGM 401 IGM loniza
28. page 4 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module It is highly recommended to periodically alternate operating Filaments 1 and 2 An inactive Filament not operating for an extended length of time can cause failure of that Filament This will be more problematic in dirty applications After servicing this product ensure that all safety checks are made by a qualified service person Replacement Parts When replacement parts are required ensure that the parts are specified by Instrutech Inc Unauthorized substitutions or non qualified parts may result in fire electric shock or other hazards and will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture This product is not waterproof and careful attention must be paid to not spill any type of liquid onto this product Due to the possibility of corrosion under certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and grounding Do not use if the grounding or electrical insulation has been compromised The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings and total gauge failures are all possible indications of gauge contamination Contaminations can generally be characterized as either A a reactio
29. place the sensor tube in the field If you prefer you can contact the factory for return authorization and the replacement of the sensor can be done at the factory Sensor Filament Functionality The IGM Electronics detects whether or not the Filaments are functional Should any if the Filaments fail the IGM display will show the following F1 Open indicating Filament number 1 has failed F2 Open indicating Filament number 2 has failed Sensor Replacement To replace the sensor use the following procedure Turn off power to the IGM Disconnect the cable from the IGM Remove the IGM401 from the vacuum system Use 3 32 size Allen Wrench to remove the 4 40 socket head cap screws as shown below Detach the metal enclosure and the electronics from the sensor Replace sensor Reprogram new sensor s sensitivity NOOR SENSOR REPLACEMENT SENSOR END PLATE af m Sill 4 40 X 2 SOCKET ELECTRONICS HEAD CAP SCREW AND ENCLOSURE 4 EACH Figure 9 IGM401 Sensor Replacement InstruTech Inc page 27 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Factory Service and Support If you need help setting up operating or troubleshooting your module you are welcome to call us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 6
30. ressure shut down values Table 4 Factory set overpressure shut down values Emission Current Overpressure Shut Overpressure Shut Overpressure Down Torr Down mbar Down Pascals 4ma 1 30 x107 1 73 x107 1 73 x107 100uA 0 1 ma 5 00 x107 6 66 x107 6 66 Degas Degas is used to rid the gauge sensor tube of contaminants Degas is achieved by applying Electron Bombardment EB to the grid The intervals at which Degas should be applied vary for each application The sensor s performance will normally improve after each Degas cycle Degas must be applied while the gauge filament is activated and operating Ensure vacuum level is at or less than 5 0 x10 Torr before attempting to initiate Degas Power during Degas is about 4 watts higher than the normal operating pressure Degas can be selected by one the of the following three methods 1 Front Panel push buttons This is achieved by first selecting Front Panel in the INPUT CNTL submenu of the SETUP UNIT menu Then select DEGAS ON OFF in the FP OPERATE submenu of the SETUP UNIT InstruTech Inc page 12 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module 2 Digital Input This is achieved by first selecting DIGI RS485 in the INPUT CNTRL submenu of the SETUP UNIT menu Then Degas can be initiated by applying a continuous ground to pin 6 of the Analog 9 Pin D connector located on the top the IGM Then sending an 3 By RS 485 c
31. return 4 _isaspace 5 Allcommands sent to the module start with a character and all responses from the module start with a or a character This protocol was designed to be 100 compatible with the Micro lon gt InstruTech Inc page 25 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Service amp Maintenance Calibration Every InstruTech module is calibrated prior to shipment using Nitrogen Care should be exercised when using gases other than nitrogen Nz See Section on Gas Sensitivity Correction Factor Troubleshooting Indication Possible Cause Possible Solution Display is off blank No power check cable connections and verify that power is being supplied The connector may not be wired check cable connections and correctly verify that power is being supplied Readings appear very different from Sensor not in the proper location to ensure the sensor is located in expected pressure measure system pressure appropriate location The process gas is different from the apply Gas sensitivity correction gas Nitrogen used to calibrate the factor if applicable See Table 3 IGM or select the appropriate gas from the IGM display menu Sensor has been dropped causing replace the lon gauge sensor mechanical damage tube The gauge sensor tube is contaminated degas the sensor Leak in the vacuum system Re check for leak in the system Re check that all metal O rin
32. s 1 00 x10 Torr Pressure unit is based on selected units in SETUP UNIT menu Emission current is 4 00E 3 amps lon current is 4 00 E 11 amps Filament Voltage is 1 5 Vdc and Filament current is 1 9 amps Neagtive ee Emission current value amps PT 1 OOE 9 4 Measured Pressure lon current IE 4 00E 3 Pa IC 4 00E 11 Filament Voltage Vdc FVI 1 5 1 9 Filament current amps InstruTech Inc page 19 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module FLIP SCREEN Factory default NORMAL This allows the user to select a NORMAL display or have the data displayed UPSIDE DOWN When the IGM is mounted upside down this is used to invert the display screen 180 degrees for user convenience Note When Upside Down is selected the user has to save the setting and exit the menu before the measured values are displayed upside down SETUP UNIT UNITS Factory default TORA Select from Torr mbar or Pascal Units selected are used for all other settings DEFAULTS Factory default MENU TO EXIT The module can be returned to the original factory settings by using the ENTER Key to set factory defaults Note You must re enter the actual sensor sensitivity value marked on the sensor tube GAS TYPE Factory default N2 Use the UP and DOWN Keys to select from a table of 16 common gases Gas choices are as follow No Alr Oo CO H20 NO Ar Kr SFs Xe Hg He Ne
33. selected previously for operating the module then initiate send RS0485 command to turn off filament InstruTech Inc page 16 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module User Interface The menus within the IGM user interface have been designed for easy operation and a natural progression of setup parameters The following sections give a brief explanation of the features for added clarity Figure 8 GM401 Interface The four buttons below the display are the programming buttons During programming of the IGM the display will identify what function each button represents To begin programming press the MENU key Press the Enter key to access the parameters and save the new settings Press the UP and DOWN key to select the desired menu and change the parameters Press the MENU Key to return to the previous menu or press repeatedly to return to the main screen To continue setting additional parameters scroll with the UP and DOWN keys until you reach the desired parameter InstruTech Inc page 17 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Factory Set Default Parameters The following is a summary of all factory set default values in IGM s display menu SETUP DISP CONTRAST Factory default 57 MODE Factory default NORMAL FLIP SCREEN Factory default NORMAL SETUP UNIT UNITS Factory default TORA DEFAULTS Fact
34. tion Vacuum Gauge Module Menu Item Explanations SETUP DISP SET CONTRAST Factory default 57 This function sets the display contrast Use the ENTER KEY to access the CONTRAST menu and use the UP and DOWN Keys to select a number between 1 and 120 The contrast setting of 120 provides the highest contrast brightest and 1 the lowest Select the ENTER KEY again to save the value selected Note Factory default setting optimizes display life MODE Factory default NORMAL Use the ENTER KEY to access the MODE menu and use the UP and DOWN Keys to select a NORMAL or a RESEARCH mode Select the ENTER KEY again to save the desired mode Normal This mode displays the most commonly used variables These are the measured pressure the pressure unit the gas symbol and filament and relay status All these variables will be displayed on the main screen simultaneously In the following example the measure pressure is 6 45 x10 Torr Filament 1 is on gas is Nitrogen and Relay 1 is on Neagtive Exponent Indicates Filament 1 is on 6 45 Oe Measured Pressure E Indicates Pressure Unit Gas Symbol Fil 1 TORR gt RLY 4 Indicates Relay 1 is On Note RLY 1 disappears from the screen in its entirety when relay is turned off RESEARCH This mode displays the measured pressure emission current ion current filament Voltage and filament current In the following example the measure pressure i
35. ush buttons or via RS 485 commands Connector 9 pin D InstruTech Inc page 3 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Safety Instrutech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions Failure to comply with these safety procedures may result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of the installation and intended use of the instrument Instrutech Inc disclaims all liability for the customer s failure to comply with these requirements Although every attempt has been made to consider most possible installations Instrutech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact Instrutech at the address shown on page 1 of this manual Service and Operation Do not modify this product or substitute any parts without authorization from a qualified InstruTech technician Return the product to an Instrutech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made D
36. uted in sequence prior to the SB SPN SPO and SPE commands Not sending the UNL will yield a response of 2xx_COMM_ERR lt CR gt If UNL is not enabled then a response would be 2xx_SYNTX_ER lt CR gt The TLU command will toggle the state of the UNL function When the response is UL_ON then UNL is required to execute SB SPN SPO and SPE When response is UL_OFF then UNL is not required and sending a UNL will generate a 2xx_SYNTX_ER lt CR gt Reset the device as if power was cycled required to complete some of the commands TOGGLE UNL FUNCTION TLU RESET xx_PROGM_OK lt CR gt xxSByyyyy lt CR gt xx_PROGM_OK lt CR gt eg 01SB19200 lt CR gt xXxSPN lt CR gt eg 01SPN lt CR gt xx_PROGM_OK lt CR gt xxSPO lt CR gt xx_PROGM_OK lt CR gt eg 01SPO lt CR gt xxSPE lt CR gt xx_PROGM_OK lt CR gt eg 01SPE lt CR gt XXUNL lt CR gt eg 01UNL lt CR gt xXxTLU lt CR gt eg 01TLU lt CR gt xxRST lt CR gt eg 01RST lt CR gt xx_PROGM_OK lt CR gt xx_1_UL_ON lt CR gt xx_0_UL_OFF lt CR gt No response InstruTech Inc page 24 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Commands marked with an asterisk will not take effect until after RESET command is sent or power is cycled NOTES 1 All Responses are 13 characters long 2 xx is the address of the device 00 thru FF 3 lt CR gt 8 a carriage
37. x 10 Torr 1 33 x 107 mbar 1 33 x 10 Pascals InstruTech Inc page 6 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module IGM Dimensions Fitting NW16KF NW25KF NW40KF 1 1 3 MiniConflat 2 3 4 Conflat 2 80 71mm 2 67 68mm 3 22 82mm dimension A 1 45 37mm 1 85 47 mm 1 70 Figure 1 IGM401 Dimensions InstruTech Inc page 7 Instruction Manual InstruTech IGM 401 IGM lonization Vacuum Gauge Module Installation Electrical Grounding Be aware that some vacuum fittings especially those with O rings do not produce a good electrical connection between the gauge and the chamber it is connected to Be sure the vacuum gauge and the rest of your vacuum system are properly grounded to protect personnel from shock and injury Good recommended practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech IGM will directly replace most GP Micro lon modules using existing cables and electronics The IGM offers the user the choice to operate the unit using the Front panel push buttons the Analog interface or an RS485 Interface There are two 9 pin D connectors located on the IGM of which one should be used according to user s interface requirements Selection of one interface overrides the other interface See INPUT CNTL under SETUP UNIT on page 20 for more details
38. x 10 Torr the 100uA 0 1 ma emission is preferred At lower operating pressures 1 x 10 Torr to 1 x 10 Torr the 4 ma emission should be used The emission current can be selected by one of the following three methods 1 Front Panel push buttons This is achieved by first selecting Front Panel in the INPUT CNTL submenu of the SETUP UNIT menu Then select EMISSION SELECT in the FP OPERATE submenu of the SETUP UNIT 2 Digital Input This is achieved by first selecting DIGI RS485 in the INPUT CNTL submenu of the SETUP UNIT menu Then applying ground to pin 8 of the Analog 9 pin D connector located at the top of the module will change emission current from 100 0 1 ma to 4 ma 3 By RS 485 commands This is achieved by first selecting DIGI RS485 in the INPUT CNTL submenu of the SETUP UNIT menu Then sending an RS485 command to change emission current will automatically switch the module to the RS485 mode Note When using diffusion pumps there is a possibility of the oil vapors entering the gauge sensor tube This can form an insulator on the internal components of the sensor which can lead to instability in controlling the emission In this case the 4 ma emission current should be selected Overpressure shut down The IGM is provided with factory set default values for overpressure shut down The gauge will shut off automatically should the pressure reach or rise above the pressure shut down value Refer to table 4 below for overp
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