Lab User Manual - UW NNIN Washington Nanofabrication Facility
Contents
1. UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING Wafer Handli Een 12 Cassettes Tweezers er Cleanroom Dry Box Storage Space sesssssscceccsssseceessssesseesensseseeeseseeseeseensesensensaeeeeseseeeeeseeseesaeaeeeneseeseeseeneess 13 Exiting the Cle amr OOM EENS 13 Working with CCAS scsi cea ceaccece ced csseancietsactactendsnsseazscndcsiatuaicnenstenebiedbtbeteecnsuande 15 Understanding Hazards sssssssssssesssesseesessssessseseesseseeeeesesseeseeesesaneenenneees Error Bookmark not defined General Guidelines ccscssececnesenenesesssseceseneeesenecenssenenenesnnseenseneereeneneneseneers Error Bookmark not defined SE Error Bookmark not defined See Error Bookmark not defined Error Bookmark not defined Error Bookmark not defined OX dIZETS isinai eris i ASi ENNE N Error Bookmark not defined el Error Bookmark not defined NeW Materials Requests sssssssesssssssesssesessseenseesanseeeeeseeserseeeeesaneeeennacaenesnseaes Error Bookmark not defined Wet Bench Types Error Bookmark not defined Avoiding FUMES ciceesninccesecesenccsosscsecedssenencoeectensncceeenddoncecstensoccenedv ennenceesnvecneed Error Bookmark not defined Personal Protective Equip Ment scssscsesssseeeesessesesesessaeeeeseseeeeeeneeees Error Bookmark not defined Donning PPE gester Error Bookmark not defined Wearing E Error Bookmark not defined Doffing PPE eegene EEGENEN Error Bookmark not defined Labele er2. Then if possible call 9 1 1 Tell them what happened Stay on the scene to help personnel respond to the emergency Do not fight any chemical fires yourself unless they are very small and you are trained by EH amp S to manage them safely 24 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING e Norisk of fire spill and vapor contained in the room but someone is injured or exposed Call 9 1 1 only If someone has been exposed to a chemical begin decontamination and or first aid as soon as possible Evacuate the room and wait for emergency personnel to arrive e Everyone is safe but there is a large chemical spill Contact the lab staff or call the EH amp S Spill Advice Line during normal hours at 206 543 0467 Call 9 1 1 after normal business hours and ask for EH amp S chemical spill advice EH amp S will advise you on how to clean up your spill or will call the UW s spill cleanup contractor to clean up the spill for you at the lab s expense Only attempt to clean small spills for which your training and experience are appropriate If you feel comfortable and are properly trained there is a spill cart is located in the tool gray area for any chemical spill that is not considered a HAZMAT emergency Spill carts contain acid and base neutralizers HF spill kits mercury spill kits caution tape for clearing an area and personal protective equipment Personal protective equipment includes nitrile and neoprene gloves aprons and face s
3. is imperative that you avoid tracking mud dirt and leaves into the labs PANTS You must wear long pants that run from your shirt to your ankles Shorts short pants capris skirts and dresses are not allowed During warmer weather you may bring with you a pair of lightweight hospital scrub style pants to wear over your shorts You can purchase inexpensive scrub pants from the WNF staff for this purpose You can either purchase a pair of scrub pants from WNF staff or need to return home to change into acceptable attire SHIRTS Your shirt must cover your shoulders and reach from the top of your arms to your pants Tank tops halter tops and spaghetti strap tops are not acceptable SAFETY GLASSES Safety glasses must be worn at all times in all labs The WNF provides safety glasses or you may choose to purchase your own glasses provided that they meet ANSI Z87 1 2003 standards You are allowed to remove your safety glasses when using optical microscopes but remember to put them back on when you step away from the microscope Safety glasses are not acceptable for chemical protection face shields must be worn during chemical use Please refer to the Personal Protective Equipment PPE section for details in chemical protection protocols CONTACT LENSES Consistent with recent recommendations from the American Chemical Society contact lenses are allowed in WNF laboratories provided that safety glasses are also worn at all times In the case o
4. contamination or particulates Never leave a mess if you find one either clean it ask the responsible parties to clean it or notify staff Report equipment problems and notify staff and other users if you have made a mistake or may have caused contamination Share space and respect equipment reservations Ask questions if you are unsure The lab operates effectively when everyone is cordial follows instructions and communicates LABORATORY ITEM AND ACTIVITY RESTRICTIONS The following table lists items and activities that are restricted in all laboratory spaces cleanroom and non cleanroom This is not an exhaustive list be sure to ask if you have questions Partial List of Prohibited Items Activities Allowed Items Activities Food or drink gum cough drops mints etc Cell phones headsets Smoking Cameras no flash in yellow rooms Offensive or obscene materials or media Laptops PDAs e readers music players VISITORS Visitors are not allowed in lab spaces without approval If you want to bring visitors into lab spaces you must submit an online Visitor Request Form at least two days before the visit For each approved visitor you will be assessed a fee to cover cleanroom consumables An active WNF user must escort each visitor during his or her entire time in laboratory spaces and is responsible for the visitor s actions and safety Visitors are to abide by all safety measures expected of laboratory users and a
5. nearest exit Do Not Use Elevators e Report to the nearest designated evacuation assembly point s Do not re enter until authorized to do so fe Fire Alarm Control Panel is located in Electrical Vault Room 116B on First Floor AE reng Health and Safet MASON ROAD EVACUATION ASSEMBLY POINTS Assemble after an evacuation so the evacuation warden yellow hat can accounted for you and so you can lend assistance as needed The primary evacuation assembly point EAP for Fluke Hall and the WNF is the N21 parking lot located to the north of Fluke Hall The secondary evacuation points are the E1 parking lot Husky Union Building yard If the Evacuation Director finds the primary EAP unsuitable then evacuees will be moved to the secondary EAP The Area of Safe Refuge is located in the north lobby of the first floor CHEMICAL EMERGENCIES SPILL RESPONSE In order to become an onsite user you are required to complete the UW EH amp S Managing Laboratory Chemicals online training course This training outlines chemical handling and emergency procedures If you cause or encounter a chemical spill respond accordingly based on the following scenarios e Risk of fire or spills that could spread out of the room Pull the nearest fire alarm This alerts the local fire and police departments that there is an emergency at your location and sounds the alarm in the building for everyone to evacuate Leave the building helping others as necessary
6. open in the hood behind the cascade bath at the back of BATH6 Strip to evaporate After the solvent residue has evaporated fill the bottle half full with DI water and dump down a water drain Repeat this process three times Acid and base bottles must also be rinsed by filling the bottle half full with DI water emptying the bottle into a water drain and repeating at least three times After rinsing dry the outside of the bottle with wipes use a black marker to cross out the label and then write Rinsed 3x in at least two different locations on the bottle Set the empty rinsed dry and labeled bottle in the bottom shelf of the blue photoresist stripper cabinet DISPOSING SOLVENTS To dispose of used solvent empty it into a solvent drain or into an appropriate waste container A list of solvents allowed into the solvent drains is posted on the hood Clean the chemical container with an acetone soaked wipe and then wipe thoroughly with isopropanol IPA Remove the label with acetone or IPA do not bring a solvent squirt bottle into a plastic bench rinse with DI at any of the plastic benches and return the container to the drying rack DISPOSING ACIDS AND BASES Almost all acids and bases can be disposed into sinks in the plastic benches that drain to the neutralization system Run the faucet so the solution will be diluted at least ten to one with DI water while carefully dumping the acid or base into the sink Avoid splashing Take
7. the situation Look for a Medic Alert bracelet or necklace on the person requiring help e Have someone call 9 1 1 If you are alone yell as loudly as possible for help If you are unable to summon help you have to call 9 1 1 first and then return and assist the person to the best of your ability e When calling 9 1 1 give the operator as much information as possible Le type of emergency what help is needed exact address building name room number telephone number information from Medic bracelet or necklace and victim information Don t hang up until you are told to do so by the 9 1 1 operator e Do not move the victim For additional information visit www ehs washington edu ohshsplans firstaidplan pdf UTILITIES OVERVIEW Our primary utilities are a deionized DI water plant an acid waste neutralization AWN system a fume scrubber and burn box for lab exhaust and a hazardous material HAZMAT emergency system The deionized water plant supplies 18 3 MQ cm water to spray guns cascade rinse tanks and spin rinse driers The AWN neutralizes aqueous waste that has been disposed in the drains in the wet processing area and the HAZMAT system monitors three pyrophoric gases silane dichlorosilane and anhydrous ammonia Compressed nitrogen and compressed air are also fed to lab spaces for various uses Compressed dry air CDA is supplied via a house compressor and is used primarily for pneumatic controls on a variety of equip
8. think clearly e Keep your workspaces clean and organized e Wear personal protective equipment If you are exposed to a chemical other than hydrofluoric acid discussed in the next section do the following e Stay calm Move out of the contaminated area e Get the chemical off Fast dilution is key If the chemical is on skin or soaking through your clothing go to the safety shower Pull the handle on the safety shower and do not worry about getting the floor wet Stay in the shower for a minimum of 15 minutes taking off all clothing necessary to minimize exposure to the chemical Do not be modest as your life may depend on removing soiled garments Get coworkers to help shield you or cover you up If the chemical is in your eyes use the eyewash holding your eyes open in the water for 15 minutes 25 W UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING e Get a coworker to call 9 1 1 as soon as possible Have them explain the situation to emergency personnel e If possible obtain an MSDS SDS to give to emergency personnel You must inform WNF staff if you have had an exposure to a dangerous chemical If a hospital visit is needed it is always valuable to take the material safety data sheet MSDS for the chemical to the hospital because the proper medical care can be better determined with the MSDS HYDROFLUORIC ACID EXPOSURE Hydrofluoric Acid HF is among the most dangerous chemicals in the WNF and the medical treatment
9. Health Center Dial 206 543 0462 After normal business hours EH amp S may be reached through the UWPD using the EH amp S Duty Officer system EH amp S maintains guidelines and provides training consultation and support for building emergencies EH amp S is also available to provide consultation and support for hazardous material spills and releases temporary controls and other general information to the Seattle Fire Department SFD UWPD and UW departments Facilities Services FOMS amp ATC 20 Dial 206 685 1411 Routine and emergency services essential services are covered 24 hours a day Facilities Services maintains a 24 hour a day 7 days a week response unit called FOMS or Unit 2 The FOMS respond automatically to all fire alarms and other emergencies to provide support for the UWPD and SFD This support includes but is not limited to the operating resetting of the fire alarm system operating the heating ventilation and air conditioning systems HVAC and the shutdown of steam water electrical and other utilities 20 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING UW Emergency The primary EOC is For a major local or regional emergency the Operations Center located in UW Tower UW President may request activation of the EOC 4333 Brooklyn Ave NE University s Emergency Operations Center Room C 140 The EOC Information on missing persons second
10. Materials Request Visitor Request etc USING THE FACILITY Users are classified as either UW internal students faculty staff or business unit with a UW budget number or external non UW External users are further categorized as academic other academic institutions US governments and agencies and certified non profit organizations or industrial all other for profit organizations As a user facility the most common paradigm is for individuals to process their devices in person onsite users An alternative approach is contract facility staff to perform limited scope fabrication processes remote users ONSITE USERS While working at the WNF you will learn a variety of processes and gain valuable skills After a lab orientation and wet bench training you will sign up for equipment training as needed We advise finding a mentor or consulting with staff to ensure proper cleanroom technique especially if you plan to repeat or expand upon an established process REMOTE USERS WNF staff engineers are available to conduct limited scope process work on a best effort time and materials basis for remote users Due to the experimental nature of most contract processes we cannot provide product guarantees but will work closely with clients to determine project feasibility to provide cost estimates and attempt to obtain mutually satisfactory results Remote users will be assessed a fee for sample shipping BECOMING A USER Before bec
11. WASHINGTON NANOFABRICATION FACILITY User Manual Version 6 29 July 2015 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING TABLE OF CONTENTS BERGEN CEN OI aac scsi anann ennnen ANAONA nsina ne spitalune shu neat A NAA Ninna ERARA AE 4 General Information sssssssussssuennsnununnnnnnnnnnnnnunnnnunnnnnunnnnannunnnnannnnnnnunnnnannannnnnnnnnn annan nnn ananman anann 5 Website and Contacts Using the Fea Cay ee Onsite USGrsisivadaincucsanitiiwiwad han i een icc ae lee ed ae 5 Rem te UWS e 2st cee EE 5 Becoming WS CL E Reports and Acknowledgements GUTE RE TE 6 User and Staff Meetings eebe SEENEN 6 Intellectual Property and SCCUIItY ccscseccsssseseeeseesssseeensseseeeeeseeseeceeneesaeaeeeeeseeeeeseeeeesaneeeeneceeeeseenteseneeeeanee 6 Facility Information E 7 TT LC H OLED GES tege eer erte eebe 7 Non cleanroom Laboratories momenter 7 Cleanroom Laboratory ics eat aaa ienei da a adnate 7 Equipment Capabilities Laboratory Policies and ProcedureS sss ssssssussssnsueunnnnunununnnnunnennnunnennnunnnnnnunnnnnnannnnnnannnnnna 8 Priorities Code of Conduct Laboratory Item and Activity Restrictions Visitors splina GLASS E E A O ET Contact Lenses Cleanroom Policies and Procedures sssssssssssusunsuenunnnnunnnnnununnunnnnnnnunnnnannununnnnnnnnunnnn ann nnnnn 11 Personal Effects Storage ssssessessessrserrenenrenss Cleanroom Item Activity Restrictions GO WINE ee GL AN TOON POCO oo PaE EE A A A
12. aking photoresist and occasionally for heating solutions Do not touch hotplate surfaces Use extreme care when hotplates are used in proximity to flammable solvents or other liquids Do not spill on hotplates or spray water on hotplates and do not heat high vapor pressure solvents For example do not heat up acetone or isopropanol It is acceptable to remove hotplates from a wet bench if you need more room or if you feel more comfortable working without one in the hood If you need to heat an organic solvent or material in a bottle e g SU 8 heat the container in a water bath not directly on a hotplate LEAVING WORKSPACES After using a bench or other workspace clean up all chemicals chemical containers wipes and other materials samples tape markers notes personal effects etc Always leave wet bench surfaces clean and dry within comfortable arms reach and as organized as possible It is not necessary to clean out the cascade rinse tanks or the very back of the bench tops 19 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING EMERGENCY PROCEDURES You are strongly encouraged to read the WNF Emergency Evacuation Operations Plan This document has detailed information for most emergencies some of which are not covered here e g bomb threats anthrax threats civil demonstrations etc as well as evacuation options for persons with disabilities You are also encouraged to be familiar with the information found at websites li
13. anteed and are only available as space permits NON CLEANROOM LABORATORIES Fluke Hall Rooms 115 and 135 access non cleanroom laboratory spaces The Oxford Atomic Layer Deposition tool and the Soft Lithography Area primarily for microfluidics and processing with polydimethylsiloxane PDMS are accessed through Room 115 from the main corridor on the first floor The back end of line processing room which contains equipment for dicing wire bonding electroplating laser cutting and inspection is located through Room 135 west of the offices CLEANROOM LABORATORY The cleanroom is located in Room 125 In addition to policies that apply to all laboratories the cleanroom has specific rules for contamination control and safety Most of the particulate sensitive processes and equipment are located within the cleanroom as well as most wet chemicals EQUIPMENT CAPABILITIES A complete and updated equipment list can be found on the website at http coral engr washington edu tools lab WNF Equipment is separated into the following categories e Photolithography laser direct write spin coating adhesion promotion contact lithography hotplates and ovens e Nanolithography electron beam lithography and nanoimprint lithography e Chemical Vapor Deposition CVD Furnaces plasma enhanced chemical vapor deposition PECVD atmospheric furnaces for thermal oxidation doping and annealing and rapid thermal annealing e Metallization electro
14. ary EOC building emergencies first aid and other location is Lander Hall needs during a large scale emergency must be Room L 135 provided to the EOC by using campus telephone systems computer See Emergency Communications in Section 1 or by runner if the telephone systems fail FIRE ALARM SYSTEM The building fire alarm system is continuously monitored by a contracted service and in a backup capacity by the UWPD Communication Center All alarms result in an automatic response by Seattle Fire Department UWPD and Facilities Services FOMS unit Manual fire alarm pull stations are located on each floor and are shown on the Fluke Hall floor maps below SIMPLEX DIALER HAZARDOUS MATERIALS ALARM SYSTEM As an H5 occupancy zone we have a toxic and pyrophoric gas monitoring system that is continuously monitored by a contracted service Simplex Grinnell In an alarm event the monitoring service calls staff members prioritized by residential proximity to Fluke Hall to ensure as timely a response as possible during non business hours There are several different cases in which a HAZMAT alarm can trigger If there is a low level gas detection event or if a HAZMAT pull station has been used the yellow strobes in the cleanroom will activate and you are required to exit the cleanroom Low level alarms and manual pull stations will not immediately call the Seattle Fire Department If there is a building fire the manual fire pull s
15. at someone is your buddy if they happen to be in the lab You must explicitly notify them that you need a buddy and they must accept that responsibility Your buddy may not leave until chemical operations are completed and you have cleaned up 15 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING CHEMICAL CLASSES AND STORAGE ACIDS Acids are substances that donate protons when dissolved in water Acids are used for etching metal and cleaning wafers are generally corrosive and can be toxic or water reactive e g sulfuric acid Acids are stored in the blue corrosives cabinets on the northeast side of the photolithography room and in BATH1 Piranha BATH2 RCA BATH3 HF BOE Metal etchants are also stored in the HOOD1 HFok and HOOD2 noHF BASES Bases accept protons and can increase the hydroxide ion concentration when dissolved in water Many photoresist developers are dilute bases and some concentrated bases can be used to etch silicon Bases are stored in the upper gray cabinets on the northeast end of the photolithography room and in BATH4 KOH TMAH OXIDIZERS Oxidizers are agents that are easily reduced and generally supply oxygen to chemical reactions Examples in the lab include hydrogen peroxide and nitric acid Oxidizers can react violently with organic chemicals SOLVENTS Although the term solvent refers to any liquid used to dissolve another material in a cleanroom setting solvents are typically organic
16. ated by federal funding sources and greatly appreciated BILLING The WNF is a non profit business unit within the University of Washington that charges time and materials on a cost reimbursement basis with monthly invoices Academic pricing is achieved through UW state and federal grants and subsidies Industrial rates are set for cost recovery UW Management Accounting and Analysis MAA mandates an annual rate proposal to ensure cost recovery Rates are a function of cost of operation labor and materials and utilization if the user base grows and utilization increases costs decrease Furthermore the rate structure falls into four tiers basic low mid and high consistent with the NMAF Users of the WNF are eligible to use NMAF characterization capabilities under a single purchase order but will receive a separate monthly invoice from each facility Due to the nature of work at the facility it is not possible to issue binding quotations for projects Many projects have unanticipated changes in scope and processes based on experimental results so a not to exceed purchase order is recommended to account for possible changes with minimum logistical overhead CONSULTING Staff engineers are readily available for Critical Design Reviews CDRs These consulting sessions are a venue to discuss project concepts process flows or specific technical issues Current or potential users are encouraged to hold discussions with staff on a r
17. bring into the cleanroom are primary sources of particulate contamination In addition to the table above that applies to all WNF lab spaces the table below lists items that can and cannot be brought into the cleanroom Minimize contamination by only bringing items necessary for your research into the cleanroom Partial List of Prohibited Items Activities Allowed Items Activities Cardboard fiberboard wooden containers Plastic items plastic boxes plastic containers Paper paper notebooks books magazines etc Cleanroom paper cleanroom notebooks Pencils erasers Pens Over the ear headphones Ear bud headphones keep at low volume Hats coats scarves bags backpacks etc Over the ear if fully under hood at low volume Makeup cosmetics Laptops e readers cell phones Running jogging GOWNING PROCEDURES Proper gowning is important to maintain garment and facility cleanliness Gowning will be demonstrated for you during your cleanroom orientation You can also see proper technique here http www cintas com CleanroomResources popups gowning index html To enter the cleanroom swipe your keycard to unlock the gowning room door Even if someone else opens the door for you you must also swipe your keycard to indicate your entry into the cleanroom CORAL tracks the real time user list for emergency response accountability It is imperative that you swipe out of the lab when you leave otherwise EMS p
18. dical Emergencies ncnccssccscssssesccesessnececeessenencerssnesnecensenseneeesesseseenoneeneneceesnenenenesenesneceeserneneeenesseseens Utilities OVO NEIEN ACK O WIGS CIC IIS eisiceseiretatecceiensntacdedtnerscesnectundcsavisnendrsseenetsatarennescnispeleeanumnlsintantcntee UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING INTRODUCTION The Washington Nanofabrication Facility located in Fluke Hall on the University of Washington Seattle Campus is an open access facility for micro and nano scale research development prototyping and fundamental science The 15 000 square foot lab represents more than 20 million in facilities and equipment and is the largest public access fabrication facility in the Pacific Northwest As a member of the National Nanotechnology Infrastructure Network NNIN an integrated network of user facilities supported by the National Science Foundation NSF we strive to enable rapid advancements in science engineering and technology The WNF offers a full range of semiconductor processing and packaging capabilities including photo and electron beam lithography wet and dry etch sputter deposition evaporation chemical vapor deposition atomic layer deposition annealing dicing wafer and flip chip bonding metrology and inspection By bridging academia local start ups established businesses and professional organizations the WNF promotes local economic and job growth by fostering innovation Additional
19. dusty Unless you have a very specific reason you should never touch your wafers with your hands However for some processes such transferring wafers with freshly spun thick photoresist e g SU 8 2100 to a hotplate it may be appropriate to carefully transfer your wafer by lifting it gently from the edges with a doubled gloved hand never pinch with your thumb and index finger Another example would be to avoid transferring tweezer marks to a hard mask if you plan to do anisotropic silicon wet etching Again change your outer gloves immediately if they become contaminated for any reason CLEANROOM DRY BOX STORAGE SPACE Each research group or company is assigned one dry box section for storage of active wafers photomasks and necessary lab supplies Additional dry box space is available for a monthly rental fee Lab storage is intended for active materials not archival storage You are not permitted to store chemicals or other hazardous materials in your dry box evaporation sources and crucibles are allowed You cannot store any items that are incompatible with cleanroom protocols e g cardboard or paper If you need special chemical storage please make a formal request to the WNF staff https www wnf washington edu lab user portal issues suggestions In addition to access from the cleanroom you can access your storage dry box without gowning by going through the non cleanroom office work space in Room 135 Walk past t
20. e Error Bookmark not defined Pouring Chemicals sesscssssssssseeesesseseessessssneeeneesaneneeeseeseeseeesssaeeeeeanseeesesesees Error Bookmark not defined Chemical Bottle Clean up scecssssssssssssssssseeeessneeeseseeseeseeeeesaeeenesnseeesesesees Error Bookmark not defined Disposing Solvents wisiccsiccccasisieccosicdecececessnsencocetendsceesevcencecensudecdecetenoenctisvsontees Error Bookmark not defined Disposing Acids and Base s ssssssssesssssnusnunnunnunnununnunnnnnunnnnnnnnnnnnnnnnnnnnn nennen nna Error Bookmark not defined Handling Small E UE Error Bookmark not defined Hotplate Sale ty scicccscccsccctccccctescsccentvanueceeessnssucedtestecsessvarueienessndscecetecrendeedsvcotcecs Error Bookmark not defined Leaving Workspaces sesssssssssssseeceessssesseessesseseneesanseeeeeseeseeseeeeesaeeeessnsseeneseseaes Error Bookmark not defined Emergency PIO COO UT ES ciaicsaciacsastiscatusinsbiaiescunsannutectsnisetasaniccsanseaiiidatdeacaseuasaastaneddeceiasniiees Em rgency COMMUNICATIONS eseu eege SEENEN Re Fire Alarm SV Stein is eebe eebe erer Simplex Dialer Hazardous Materials Alarm System EV ACU ati ON PLA EEN Fluke Hall TE FIO OT ee veier eE Fluke Ee Fl K EM Evacuation Assembly Points Chemical Emergencies eege EE e UR TE Chemical Exp ostires use Hydrofluoric Acid Exposure isisisi savnes a eden detent a EE HAZMAT Emergencies UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING Other Me
21. e cassettes to carry and process your wafers except in cases where using a cassette would result in excessive and unnecessary chemical usage Although you can orient wafers 12 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING in your cassette however you please they are generally positioned starting from the H bar horizontal bar with the polished surface facing away from the H bar Cassette to cassette transfers are the easiest method to transfer a large number of wafers First set the filled cassette on a flat surface then flip an empty receiving cassette upside down and mate the two cassettes using the dimples and holes Grab both cassettes compress them together and then slowly tilt both until the wafers roll from the donor cassette to the receiving cassette TWEEZERS Only handle wafers with wafer tweezers Only touch tweezer handles do not touch the shovel or pincer gripping end Ensure your tweezers are compatible with the chemicals your processing requires Use care to avoid gouging equipment e g hotplates or RIE chucks Pick up wafers from the major flat whenever possible When carrying wafers it is advisable to hold your other hand under the wafer in case you drop it Clean your tweezers regularly GLOVES Do not touch the front or back surfaces of your wafers Your gloves are always contaminated to some extent Brand new gloves can have plasticizer residues or you may have accidentally touched something dirty or
22. earest designated evacuation assembly point Geecccccccccccee Do not re enter until authorized to do so F D RTO Er emmmer fe Fire Alarm Control Panel is located in Electrical Vault Room 116B on First Floor 3 Environmental Health and Safety MASON ROAD Note Avoid the chemical storage room and gas bunkers Evacuate to the east and north not to the south 22 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING FLUKE HALL 2 FLOOR Plan Key You Are Here Evacuation Route Exit D DI Fire Alarm Control Pe nel Symbol of Accessibility Restroom Fire Extinguisher Fire Alarm Area of Refuge In Case of Emergency Gil Sound fire alarm Assist persons with disabilities Exit the building usin the nearest exit Do Not Use Elevator Report to the neares designated evacuatic assembly point Do not re enter until authorized to do so Fire Alarm Control Pane is located in Electrical Vi Room 116B on First Flo E errant nean ae MASON ROAD gt NORTH Ge occccccces 23 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING FLUKE HALL 382 FLOOR onge N Ea H You Are Here Evacuation Route Exit DI Restroom tT Fire Extinguisher DI Fire Alarm Fa Fire Alarm Control Panel Symbol of Accessibility Area of Refuge In Case of Emergency s Sound fire alarm e Assist persons with disabilities e Exit the building using the
23. east side of the gowning room and are also available through CORAL You also need to know evacuation routes and locations of eyewashes shower stations and fire extinguishers GENERAL SAFE PRACTICES e Do not taste touch or smell any chemicals e Do not mix heat dispose or otherwise use chemicals in an unauthorized manner e Work with chemicals in an exhausted fume hood or wet bench e Use chemicals only in wet benches where they are approved e Never mix acids and solvents e Never dispose of solvents down water drains or water down solvent drains e Change your gloves if they might be contaminated e Label your chemicals e Do not place or store chemicals above the level of the wet bench surface e Never remove chemicals from the lab without permission e Use chemicals and cleanroom wipes sparingly e Do not interrupt users working with chemicals e Ifyou are unsure of handling or safety procedures ask questions BUDDY SYSTEM Most chemicals used for cleaning and etching wafers are very dangerous so it is required that another authorized cleanroom user accompany you while you are working at the wet benches A buddy is required for all wet processing performed in wet benches on the north side of the photolithography room All dry processes are permitted without a buddy however it is recommended that you coordinate lab activities to ensure that at least one other person is in the vicinity You may not assume th
24. egular basis to work through processes and to troubleshoot problems Independent CDRs can be scheduled as needed by contacting the lab director or engineering staff USER AND STAFF MEETINGS User meetings are held every Monday afternoon These are open forums for registered lab users to discuss issues pertaining to the laboratory instrumentation and processing To ensure a timely response to issues and concerns the WNF staff meets when the user meeting is adjourned If you cannot attend the weekly meeting please contact the lab director or engineering staff for alternative solutions INTELLECTUAL PROPERTY AND SECURITY While working in the WNF you will not have intellectual property IP restrictions or entanglement with the University of Washington Many clients execute an NDA in order to protect their IP use of the UW pre approved form will expedite the NDA process Occasionally staff will engage in collaborative development campaigns with users In these cases general processing techniques that are not IP specific may be shared with the general user base but applications and full process flows will not be shared unless given explicit permission UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING FACILITY INFORMATION SPACE DESIGNATIONS OFFICES Offices are located in Fluke Hall Rooms 135 and 136 Office provisions are made on a discretionary basis by the director primarily for heavy onsite full time users but are not guar
25. ersonnel will assume you are in the lab in an emergency If your keycard does not unlock the door you may not enter the cleanroom If you have completed all access requirements and your access card does not work please see or email lab administration in Fluke Hall Room 215 to troubleshoot access issues Entering the cleanroom without swiping your keycard or when your keycard is disabled is a violation of both lab and university policy e Before entering the cleanroom make certain you meet the dress code requirements e Before stepping beyond the first bench put on a pair of blue shoe covers a bouffant hair net enclosing as much of your hair as possible and a first pair of nitrile cleanroom gloves e If you do not have a cleanroom suit already on a hanger select a hood cloth face veil coverall and pair of boots in your appropriate size from the shelves e Put on the cleanroom hood with the seams facing inward and then snap the cloth face veil inside the hood Some of the hoods are packaged inside out so check that you are putting the hood on correctly 11 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING e Verify placement of the face veil using the mirror on the wall Some of the hoods have a pair of snaps under the chin There are multiple snaps on the hoods and face veils so you can adjust and find positions that provide maximum cleanliness and comfort The face veil needs to completely cover your mouth and nose resting
26. f an eye exposure emergency rinse at the emergency eyewash station with contacts in place and remove them while flushing CORAL CORAL Common Object Representation for Advanced Laboratories originally built by Stanford and MIT and extended here at the UW is software used to measure and control the use of user facilities The WNF uses UW CORAL Web Front End an interface layer that allows users and administrators to use the UW CORAL installation without having to install any application on their computer or UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING mobile device The interface is usable for basic tasks on a mobile device though some functionality requires a desktop or laptop computer The key features of UW CORAL are listed below User Registration Instrument Restrictions Instrument Scheduling Instrument Problem Reporting Use Monitoring Review and Corrections Billing and Reporting You will be given a short introduction to CORAL in your lab orientation Additional information is located at http coral engr washington edu doco EQUIPMENT POLICIES RULES You must be trained and officially qualified before using any equipment Do not use equipment for unapproved purposes Tool owners must authorize all new processes Your reservation will be void if you have not enabled the tool within 15 minutes of your start time You must report equipment problems or damage in CORAL Do not use equipment that ha
27. for exposure is specialized and differs from that of most other chemicals HF exposure is very serious as it can cause severe burns metabolic imbalances pulmonary edema and cardiac arrhythmias As little as 100 mL is potentially lethal if untreated HF and Buffered Oxide Etch BOE will not necessarily cause an immediate burning sensation so respond quickly if you have had an exposure even if you do not feel any immediate pain e In the event of skin contact remove clothing and flush the affected area for a maximum of 5 minutes While rinsing have someone call 9 1 1 Put on double nitrile gloves and then apply calcium gluconate gel located on the HF wet benches to the contaminated skin This will help to neutralize fluorine ions e In the event of eye contact use the eyewash for 15 minutes Do not use calcium gluconate in your eyes Call 9 1 1 Emergency personnel will treat eyes with a solution of calcium gluconate mixed with saline e In the event of inhalation Call 9 1 1 Move to fresh air and wait for medical assistance If you are aiding someone experiencing HF exposure wear black neoprene gloves that offer the highest protection from HF or double nitrile gloves if those are not available The University of Washington EH amp S provides details on HF hazards exposures spill cleanup storage etc in a document that can be found at http www ehs washington edu manuals focus hf pdf A much more thorough examination of HF a
28. g unnecessarily with the chemical gloves and treat them as though they were contaminated For example do not touch face shields sashes controllers or any other equipment with the chemical gloves and do not leave the photolithography room while wearing chemical gloves It is acceptable to leave your chemical gloves on the edge of a wet bench while you work elsewhere The apron must fully cover your shoulders at all times i e make sure it is tied around the neck and do not let it slip off while you work Wearing PPE is not an excuse to act in an unsafe manner Do not ever put your hands or fingers into a chemical bath and always avoid splashing or spilling chemicals Also PPE provided by the WNF is only for temporary protection It will not protect you from a spill splash or mist for a prolonged period of time DOFFING PPE Rinse and dry the chemical gloves remove them and hang them up Hang face shields and avoid scratching the plastic Lastly remove the apron and be careful to avoid ripping it If condensation has accumulated in the apron use a wipe to dry the inside Do not leave the apron inside out LABELING Prior to filling all chemical containers must be properly labeled even if you do not intend to walk away You must include your name the chemical name and the date If you plan to leave chemicals out after leaving the room a phone number or email and an expected time of disposal must also be provided Water mus
29. he back end process room turn left and follow that corridor to the end To enter this maintenance and storage gray space you must put blue shoe covers over your shoes and step on the tacky mats Before touching your dry box or items inside put on a pair of cleanroom gloves You must clean any materials you bring into the cleanroom by wiping with IPA and cleanroom wipes located at the entrance to this gray space EXITING THE CLEANROOM e When you exit the cleanroom sit on the inner bench and remove your outer gloves and your white cleanroom boots Leave your blue shoe covers in place while in the gowning room and avoid putting your blue shoe covered foot down in the cleanroom areas or your white boot down in the middle gowning area 13 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING In the middle gowning room area remove your coverall first and your hood second leaving the hairnet blue shoe covers and inner gloves in place While removing the coverall do not allow the sleeves or upper part of the suit to touch the floor Place your coverall on your hanger Snap your hood to the collar snap of your cleanroom suit with the outside facing outward and on the outside of the suit Snap your boots to the legs of your coverall Clip your ID clip to the suit If you do not have an ID clip ask a WNF staff member for a labeled clip Continue to reuse the same gown upon each entry On Monday evening or Tuesday morning all gowns are sent ou
30. hields Additionally HAZMAT Level B suits are available on the spill cart for staff use only Contact staff for large spills gt 100 mL or spills outside of a wet bench Do not clean spills that occur outside of the fume hood that may require specialized respiratory protection e g large acid or solvent spills including any HF spills Regardless of the size of spill contact the staff and report the spill details and if how it was cleaned Once the spill is handled properly and everyone is okay the events need to be reported and discussed to improve spill prevention and evaluate the response as a laboratory group Also if you are involved in a spill you must fill out an Online Accident Reporting System OARS accident report on the EH amp S website State and federal law requires that all accidents and near misses be reported The University of Washington also has committees that track accidents on campus in order to assess and improve campus safety CHEMICAL EXPOSURES Working with chemicals is dangerous Even common mistakes like dropping a container or leaving a reaction unattended for just a minute can have serious consequences when chemicals are involved Work carefully and deliberately keep in mind what to do if things go wrong Read the MSDS for all chemicals you plan to use to ensure you are aware of hazards and emergency procedures Avoid exposures by following the rules below e Don t work with chemicals when you re too tired to
31. hin your suit e g cell phone go into a gray area to do so CLEANROOM PROTOCOL All users must help maintain the integrity usability and effectiveness of the cleanroom Even if your project is not sensitive to particulates or other contamination you must follow all cleanroom protocols at all times e If your gloves are torn soiled or otherwise contaminated immediately remove the outer pair and put on new gloves e Never touch doorknobs telephones equipment controls microscopes or other common objects with contaminated gloves Cross contamination can permanently damage equipment and expose other users to chemical hazards e Tacky mats are placed throughout the lab to reduce airborne particulates Do not step over or bypass the tacky mats e Do not leave items strewn about the lab Use your assigned dry box storage space Items left in the lab will be moved to the lab lost and found in the east gray space After one week unclaimed items will be discarded or reclaimed e Ifyou need something from under your suit do not unzip your suit in the cleanroom Move to a gray area gowning room or maintenance storage chase to open your suit If you intend to use the retrieved item in the cleanroom space it must be wiped with IPA e Do not sit or lean on equipment or tables e Do not shake hands in the cleanroom e Use all materials e g wipes and chemicals sparingly to keep costs down WAFER HANDLING CASSETTES Whenever possible us
32. ke www washington edu emergency www washington edu safety www ready gov If you find yourself involved in a major emergency do not be shy or embarrassed about calling for help or pulling the fire alarm If possible when emergency personnel arrive approach them tell them that you were involved with the incident and be ready to explain what happened EMERGENCY COMMUNICATIONS TELEPHONES Use a cell phone or the campus telephone system to report emergencies In case of a system failure or a power failure campus phones will not function However the emergency single line phone located outside Fluke Hall on the northeast side of the building designated with a blue light may still function Similar emergency phones part of the UW s Emergency Communications System ECS are strategically located in nearly 200 locations throughout campus To dial campus numbers from campus phones simply dial the last five digits of the number To dial other local 206 area code numbers dial 9 followed by the seven digit number Contact Information Emergency Resource Purpose and Responsibilities UW Police Department UWPD Bryant Building 1117 NE Boat Street Emergency Assistance Dial 9 1 1 Non Emergency Assistance Dial 206 685 8973 UWPD maintains an Emergency Communications Center 24 hours a day 7 days a week Call 9 1 1 for emergencies of any kind Environmental Health and Safety EH amp S 201 Hall
33. l restrictions for each bench 16 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING AVOIDING FUMES Fume hoods are designed to limit your exposure to chemical fumes and are equipped with pressure gauges and sash height sensors to ensure safety and proper operation Although the benches are designed to turn off during exhaust outages check the pressure sensors to make sure the pressure is within the acceptable limit Many fumes in the lab are toxic corrosive or carcinogenic so it is important to only work under the sash for very brief periods of time and only when absolutely necessary PERSONAL PROTECTIVE EQUIPMENT You are required to use additional personal protective equipment PPE when working in the wet benches on the north side of the photolithography room and when transferring chemicals to and from the corrosives cabinet DONNING PPE PPE consists of three items that should be donned in the following order a chemical apron a face shield and chemical gloves Check all items for damage before use Look for cracks or pinholes in gloves tears or holes in aprons and scratches or cracks in face shields If any gear is damaged e g ripped apron or gloves discard it and use another item Rinse damaged items with DI and dry before disposing Use care when putting on aprons to avoid ripping the seams and make sure the apron sleeves are fully tucked under the chemical gloves WEARING PPE Do not touch anythin
34. liquids that are flammable or combustible We use acetone isopropyl alcohol methanol n methyl pyrrolidone dimethyl sulfoxide and a variety of others Photoresists are usually photoactive polymers suspended in organic solvents such as propylene glycol monomethyl ether acetate PGMEA or cyclohexanone Solvents and photoresists are stored in the yellow flammables cabinets on the east wall of the photolithography room Photoresist strippers and solvent waste containers are kept in the blue cabinet next to the southeast emergency exit of the photolithography room NEW MATERIALS REQUESTS Before bringing a new chemical into the cleanroom you must submit a New Materials Request Form an SDS and a Standard Operating Procedure to the WNF website which will be sent to the lab manager and the lab safety manager for approval We do not permit long term storage of any personal chemicals in the facility or wet benches without explicit permission WET BENCH TYPES The photolithography room has metal stainless steel and plastic chlorinated polyvinylchloride wet benches Organic solvents such as acetone isopropanol and SU 8 developer are not allowed on the plastic benches because they will dissolve the working surfaces Acids and bases are not allowed on metal benches More detailed restrictions are available in the documentation for individual benches that can be found in CORAL You are responsible for understanding the specific requirements and chemica
35. ly staff engineers provide foundry services through which fabrication and characterization can be performed for customers both in the US and internationally University researchers and industry clients are active in a wide range of applications and research areas including e Silicon Photonics e Biosensors e Micro and Nano ElectroMechanical Systems MEMS NEMS e Microfluidics e Electrochemical Sensors e Genomic Sequencing e Mono and Bilayer Semiconductor Devices e g graphene e Basic Physics and Materials Investigations e Advanced Packaging and De packaging e Flexible Electronics The WNPF s sister site the Nano and Molecular Analysis Facility NMAF located in the Molecular Engineering and Sciences Building on the UW campus houses leading edge instruments for nano scale characterization Equipment capabilities include scanning transmission electron and scanning electron microscopy confocal Raman and fluorescence microscopy ellipsometry and atomic force microscopy A complete list of tools and contact information for the NMAF can be found at http www washington edu research maf UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING GENERAL INFORMATION WEBSITE AND CONTACTS Up to date contacts news and information about the WNF can be found at our website https www wnf washington edu which has links to start a project to contact staff and to download forms User Agreement Non Disclosure Agreement New
36. ment To maintain cleanliness the WNF has high efficiency particulate attenuation HEPA filters in the ceiling throughout the cleanroom Lab air is a mix of external air from the supply fans and air from recirculation units ACKNOWLEDGEMENTS This document was created using information from the Washington Technology Center User Manual the Microfabrication Facility User Manual and user manuals from the Cornell Nanofabrication Facility the Lurie Nanofabrication Facility the Stanford Nanofabrication Facility and the Center for Nanoscale Systems at Harvard The UW EH amp S website and training documentation were also used extensively sometimes word for word 28
37. n beam evaporation sputtering electroplating e Dry Etch parallel plate reactive ion etching RIE inductively coupled plasma etching ICP RIE fluorine and chlorine chemistries deep silicon etching Bosch DRIE plasma ashing e Metrology scanning electron microscopy profilometry stylus and optical spectral reflectance optical microscopy e Back End of Line dicing wire bonding flip chipping screen printing laser cutting wafer bonding e Wet Processing wafer cleaning anisotropic silicon etching resist stripping oxide etching UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING LABORATORY POLICIES AND PROCEDURES PRIORITIES 1 Safety You are responsible for your safety and for those around you Do not work in the facility when you are tired sick medicated or intoxicated Read and understand the safety information in this manual in equipment protocols and in safety data sheets 2 Facility and Equipment Integrity Never compromise the equipment or facilities for your research Understand and abide by equipment restrictions If you damage or contaminate equipment while straying from equipment protocols you will be liable for property and equipment damages that may include staff time spare parts vendor services or equipment replacement 3 Your Research CODE OF CONDUCT Assume responsibility for the lab Always follow safety equipment and cleanliness protocols even if your work is not sensitive to
38. nd of first aid and medical procedures can be found at http www51 honeywell com sm hfacid common documents HF_medical_book pdf HAZMAT EMERGENCIES Pull one of the yellow HAZMAT alarm boxes if you believe there is an immediate danger to anyone in the lab If you feel unsure about the danger find another user to immediately contact staff for an assessment while keeping other users out of the area e In the event of a HAZMAT alarm all building occupants are required to rally to the building lobby on the north side of Fluke Hall on the first floor e Ifthe chemical spill endangers other people outside your workspace or might cause a fire pull the nearest fire alarm to initiate evacuation and call the local fire department e Call 9 1 1 as soon as you are safe to let emergency personnel know what happened Stay available to help emergency personnel e Ifthe spill caused serious injury or exposure call 9 1 1 e Move away from the accident scene and help keep others away 26 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING e Do not walk into or touch any of the spilled substance Try not to inhale gases fumes and smoke If possible cover mouth with a cloth while leaving the area e Stay away from accident victims until the hazardous material has been identified e Try to stay upstream uphill and upwind of the accident e Authorities may decide to evacuate an area for your protection Again it is important to stay calm li
39. oming a user we suggest scheduling a meeting with staff to discuss your project and optionally to see the facility Next you will need to complete the registration process on the new user Site at https coral prod engr washington edu tomcat UserInduction WNF html This website will direct you through the induction process In short the process involves determining your role UW or external remote etc and then entering contact and billing information and a project proposal After reading and understanding this User Manual you must complete and return the appropriate Facility Use Agreement either UW or Non UW Optionally you can complete a Non Disclosure Agreement NDA Lastly you will also be required to complete a variety of online and in person training explained in more detail on the website REPORTS AND ACKNOWLEDGEMENTS As a provision of the NNIN program we are required to submit and an annual report on active projects Occasionally WNF staff may request input in compiling publication lists and highlighting research in our labs Additionally you are required to acknowledge work conducted at the WNF in your publications and UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING presentations A suggested acknowledgment is Part of this work was conducted at the Washington Nanofabrication Facility a member of the NSF National Nanotechnology Infrastructure Network Your cooperation in response to these requests is mand
40. on the bridge of your nose where your safety glasses rest e Place your safety glasses outside of your hood and on the bridge of your nose where the face veil rests e Put on the cleanroom coverall suit do not to drag the suit on the floor in the process Hold the sleeves in your hand while putting your feet into the suit to prevent the sleeves from touching the floor Your first pair of gloves should be tucked under the cuffs of the suit e Tuck the bottom of the hood into the suit zip up your suit and snap the top snap on your suit Use the mirror on the wall to verify that the hood is correctly positioned inside the cleanroom suit and that both your mouth and nose are covered e Siton the second bench and put on your white cleanroom boots tucking the legs of the suit into the boot Connect the strap across the top of the foot and tighten it snugly Snap the top of the boot to the back of the suit leg Avoid putting your clean white cleanroom boot down on the gowning room side of the bench and avoid putting your blue bootie covered foot down on the cleanroom side of the bench e Put another pair of gloves on over the top of the gloves you initially put on double glove These should extend outside the sleeves of the coverall e Using an IPA squirt bottle moisten a cleanroom wipe and wipe down all the items you bring into the cleanroom e Once inside the cleanroom do not open or unzip your cleanroom suit If you need to access something wit
41. re not allowed to operate any laboratory equipment or perform any chemical operations Visitors are not allowed in the facility after normal hours or as buddies to meet the buddy system requirement DRESS CODE The WNF dress code applies to all laboratory areas cleanroom and non cleanroom It is based on industry wide best practices for working in areas containing hazardous materials and emphasizes UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING covering as much skin as possible to contain sloughed skin particles You will be denied access to laboratory spaces if you are not dressed according to the following rules HYGIENE You and your clothing should be clean i e free of dust or dirt before entering lab spaces Avoid clothing that sheds fibers such as wool fur fake fur mohair etc Dirty or shedding clothes contaminate everyone s work even in non cleanroom spaces Make up and cosmetics are not allowed in lab spaces SHOES You must wear shoes that completely enclose the heel toes and top of your feet Socks or stockings are required Sandals open weave shoes or shoes that expose the top of the foot are not allowed High heels and deep treaded shoes that hold mud or dirt are also not allowed Despite the substantial wet weather in the Pacific Northwest your shoes should be clean and dry before entering the labs It is preferable that you bring a clean dry change of dedicated lab shoes that you do not wear outside It
42. rson is on fire yell STOP DROP ROLL e Evacuate via the nearest stairwell or grade level exit Do not block exit doors or wedge them in an open position The doors must remain closed to keep smoke out and maintain safety for evacuation and fire personnel Leaving doors open makes the stairwells dangerous and unusable Persons with physical disabilities have several options see Appendix D e Go to your pre determined Evacuation Assembly Point EAP You may have two or more EAP s depending on the size of the building Immediately report to an Evacuation Warden so that he or she can accurately track which occupants were able to evacuate Evacuation Wardens will report to the Evacuation Director e If you are trapped by smoke stay low cover your mouth with a wet cloth stay near a window open it but do not break it hang something out the window to let fire personnel know you are there and put something in the cracks around the door phone 9 1 1 if possible OTHER MEDICAL EMERGENCIES There is a First Aid and CPR guide located in all first aid kits These guides give detailed steps in the event of a heart attack CPR choking bleeding poisoning and burns as well as other injuries EH amp S recommends First Aid CPR training for a handful of building volunteers to assist with medical emergencies associated with building evacuation and emergencies 27 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING e Stay calm Assess
43. s been enabled by other lab users Disable equipment when you are finished You must submit a Billing Adjustment Request found under User Portal on the WNF website every time you need staff to adjust your billing If you require an adjustment because you forgot to disable an instrument you will be charged a fee EMERGENCY MANUAL OFF EMO Most tools have EMO switches that will disable all power to the system and should only be used in emergencies Using an EMO can be detrimental to equipment so you should carefully distinguish process instabilities and uncommon runs from emergency situations If you notice electrical arcing smell or see smoke or determine your health is in immediate danger do not hesitate to use the EMO switch Flickering plasma unusual etch rates or a system that will not pump to the expected vacuum are not emergencies that warrant the use of an EMO 10 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING CLEANROOM POLICIES AND PROCEDURES PERSONAL EFFECTS STORAGE While you are working in the labs or cleanroom store all personal items such as coats knapsacks bicycle helmets books etc in the alcove just opposite the cleanroom entry door near the central restrooms Do not bring any of these items into the gowning room or cleanroom This is a short term storage items left for prolonged periods may be disposed or reclaimed CLEANROOM ITEM ACTIVITY RESTRICTIONS People and the items they
44. sten carefully and follow all instructions e If you are told to evacuate make sure the evacuation order applies to you and to understand if you are to evacuate immediately or if you have time to pack some essentials Do not use your telephone e If you are told to evacuate immediately quickly and calmly take your personal belongings and medications close and lock your windows shut off all vents lock the door e Return to building only when authorities say it is safe FIRES Fire extinguishers are located throughout the lab You are advised to take the EH amp S fire extinguisher course Only attempt to fight small fires i e wastebasket sized for which your training and experience are appropriate assuming you can do so safely e When an alarm sounds on your floor or area begin immediate evacuation following your floor plan Close doors behind you e Ifyou discover a fire activate the nearest pull station and call 9 1 1 Then you may attempt to put it out if it is small no larger than a wastebasket and you have called 9 1 1 If the fire is too large or you are uncomfortable or unfamiliar with the proper use of a fire extinguisher simply close the door and evacuate e Ifthe fire alarm does not work call 9 1 1 and notify occupants verbally of the emergency and the need to evacuate Evacuation Wardens or another responsible party needs to confirm that all occupants are notified e Ifyou are on fire STOP DROP ROLL If another pe
45. t be labeled If the chemical is not regularly used in the cleanroom e g it was brought in after approval from the lab staff list all hazards 17 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING POURING CHEMICALS Assume that all chemical bottles are contaminated Use a bottle carrier when transferring chemicals to and from storage locations Immediately before pouring always recheck the chemical label and make sure the chemical container you intend to use is set flat on the wet bench surface Do not try to pour small volumes from gallon jugs instead transfer chemicals from gallon jugs to graduated cylinders or beakers and then pour again from this secondary container Use good judgment and do not overfill containers i e do not fill them so close to the top that moving the container or disposing the chemical is unsafe Never return poured chemicals to their original container Use containers that are compatible with your chemicals For example some chemicals or solutions such as piranha a mixture of sulfuric acid and hydrogen peroxide cannot be stored in closed containers even for brief periods of time because it outgases and could cause an explosion Also hydrofluoric acid cannot be used with glassware because it will dissolve the container CHEMICAL BOTTLE CLEAN UP Use chemicals in partially used bottles before opening new bottles Properly clean empty chemical bottles before disposal Leave empty solvent bottles
46. t for laundering The first time you enter the cleanroom after a garment change get a new cleanroom suit and locate your nametag If your cleanroom garment becomes soiled do not place it back on the coat rack where it can contaminate other garments Instead place the garment in the laundry bin and get a new suit on your next entry You must swipe your keycard each time you exit the cleanroom This is required so that there will be an accurate record of who must be accounted for in an emergency 14 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING WORKING WITH CHEMICALS UNIVERSITY OF WASHINGTON LABORATORY SAFETY MANUAL The WNF is a laboratory space located on the University of Washington s Seattle Campus As such we must follow rules outlined in the University of Washington Laboratory Safety Manual put together by Environmental Health and Safety EH amp S This manual can be found at http www ehs washington edu manuals lsm lsm pdf You are responsible for understanding this laboratory safety manual and abiding by its rules Additionally there are several EH amp S online safety courses you must complete to become a lab user UNDERSTANDING HAZARDS Do not use or handle any chemical until you read and understand its label and safety datasheet SDS Understand the hazards handling storage disposal and emergency procedures for every chemical you use SDSs are located at or below the Right to Know Workstation at the south
47. tations have been used or the HAZMAT system detects a high level leak the Seattle Fire Department will immediately be notified Someone with knowledge of the lab will likely be required to advise them of a how to understand the alarm panels b where the readout locations correspond to and possibly c what response is necessary Other events such as pressure or flow variations in the gas cabinets can trigger problems with the detection system that do not require evacuation but can render equipment unusable If there is trouble with the detection system hazardous process gases will automatically be shut down In this case staff will be notified and will work to correct the problem and get the detection system and impacted tools operational in a timely manner 21 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING EVACUATION PLAN The floor plans below identify exits and exit routes for the building Occupants should go to the nearest exit during and evacuation If access to the nearest exit is obstructed an alternate exit should be taken FLUKE HALL 157 FLOOR mee N oe H ie You Are Here Evacuation Route b Exit tit Restroom F Fire Extinguisher DI Fire Alarm f Fire Alarm Control Panel Symbol of Accessibility D Area of Refuge In Case of Emergency Sound fire alarm e Assist persons with disabilities Exit the building using the nearest exit Do Not Use Elevators e Report to the n
48. the chemical container to the south side of the room and remove the label with acetone or IPA on a wipe and then return it to the drying rack HANDLING SMALL SPILLS Attempt only to clean small spills for which your training and experience are appropriate provided you can do so safely without taking unnecessary risks Large spills or spills outside of wet benches should be treated as emergencies Refer to the Chemical Emergencies section of this manual 18 UNIVERSITY of WASHINGTON COLLEGE OF ENGINEERING Clean small solvent spills with lint free wipes and dispose them in the red solvent waste can Then use acetone and IPA with wipes to clean the metal surface Clean acid or base spills in plastic benches by thoroughly rinsing the working surface with DI from a spray gun Use care to avoid getting water in staff maintained baths Do not wipe up chemicals directly with cleanroom wipes without first rinsing and diluting the spill thoroughly This is of particular concern with highly oxidizing agents e g hydrogen peroxide or nitric acid because of the potential fire hazard After rinsing the surface use a plastic scraper to move the water into the cracks between bench panels or into the sink not into baths Once you are sure that there is only water left on the surface dry the remaining drops of water with a wipe to leave a clean dry surface Wipes are expensive use sparingly HOTPLATE SAFETY Hotplates are used extensively for b
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