InstruTech®, Inc.
Contents
1. DC Power Input The VGC301 accepts DC power from 12 to 30 Vdc 2 W If the user prefers to use AC power InstruTech offers the series PS301 optional power supplies with various AC Plugs 2 pin pluggable terminal strip Mating connector Phoenix p n 1803578 or InstruTech p n 000327 pin number pin description 1 12 to 30 V 2 ground InstruTech Inc Page 10 Instruction Manual Remote I O amp Interface Connector 9 pin D sub female Mating connector InstruTech p n 000263 000264 VGC301A Controller pin number pin description 4 Wire RS485 pin description 2 Wire RS485 1 RS485 RDA Input RS485 DATA A Input output 2 RS485 RDB Input RS485 DATA B Input output 3 RS485 TDA Output 4 RS485 TDB Output 5 RS232 TX RS232 TX 6 RS232 RX RS232 RX 7 analog signal output analog signal output non linear linear or log linear non linear linear or log linear 8 signal ground signal ground 9 relay disable relay disable 1 The relays are disabled by applying a continuous ground to pin 8 9 This will prevent any switching of the relay contactors during operation of the VGC301 Relay Connector 6 pin pluggable terminal strip Mating connector Phoenix p n1803617 or InstruTech p n 000347 pin number pin description 1 relay 1 common 2 relay 1 NC 3 relay 1 NO 4 relay 2 common 5 relay2. 10 3 Log Linear Analog Output Output Volts Pressure Torr 10 10 107 10 10 10 10 The VGC301 also provides a linear 0 10 Vdc analog output The linear output voltage can be any value between 10 mV and 10 V corresponding to displayed pressure between 1 mTorr and 1000 Torr However the useful range of the linear analog output is three decades For example if the minimum pressure selected is 1 mTorr 1 0 x 10 Torr with a corresponding minimum voltage output of 0 01 volts then maximum pressure selected to correspond to a maximum voltage output of 10 volts should not exceed 1 0 Torr If your application requires the analog output to cover a pressure range exceeding three decades then consider using the non linear or the log linear analog output Note that an analog output of less than 0 01 volts to near O volt may indicate a damaged or faulty sensor InstruTech Inc Page 19 Instruction Manual VGC301A Controller 7 1 Non Linear Analog Output Torr mTorr Non Linear analog output for selected gases Engineering units in Torr mTorr 0 375 0 375 0 3750 0 375 0 375 0 376 0 376 0 377 0 378 0 381 0 38 0 386 0 387 0 392 0 396 0 40 0 417 0 425 0 429 0 4800 0 470 0 47 0 521 0 5660 0 54 0 59 0 6370 0 6790 0 7050 0 5440 0 7780 0 7640 0 72 0 74 1 009 0 944 0 96 10680 1 141 1 315 1 265 1 38 1 664 1 9140 1 469 1 81 2 1720 1 5360 2 2570 2 2470 1 97 2 33 2 631 3 02 371 3 4800 5 7740 4 225
3. 6 843 4 6110 5 5920 4 8300 3 6130 4 1660 42470 6 89 4 643 5 6330 4 8600 3 6320 4 1900 42710 6 920 4 66 5 6580 4 8770 3 6450 4 2030 42860 6 942 4 706 57130 4 9190 3 6740 42370 4 3210 7 000 4 745 5 7620 4 9550 3 6900 4 2700 4 3540 7 056 Values listed under each gas type are in volts 4 o 5 w a o o 6 103 o ba 3 5 223 5 329 5 419 7 7 4 o 3 5 LA F D o 6 342 kal 9 3 3 700 Tor 5494 760 Torr 5534 5 558 5 614 4 o Q o 4 o E 3 o o eo 6 519 h w o o kal o 0 m 1 m 2 5 1 m 2 m 5 20 m 50 m 00 m 00 00 m 1 2 841 5 10 20 50 00 00 00 00 00 00 00 60 00 0 4 o 3 jur eo o o 6 642 Note By design these values are identical to the outputs from Brooks Automation Inc Granville Phillips Convectron gauges Mini Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor InstruTech Inc Page 20 Instruction Manual VGC301A Controller 7 2 Non Linear Analog Output mbar Non Linear analog output for selected gases Engineering units in mbar True Pressure N2 Ar
4. KK kk KA AH 27 Ee 28 QI et E 28 EE LE Le e 28 9 3 NEE E 28 10 Factory Service and Re Eke keke keka k ke kek kake ke KA KAKA A KAKA A KA KA E KA KAKA KA KA HA KA KA HAA 29 11 NEES EEN see 29 InstruTech Inc Page 2 Instruction Manual VGC301A Controller 1 Introduction General Information 1 1 The VGC301 vacuum gauge controller is a convenient and inexpensive power supply and readout instrument for the InstruTech CVG101 Worker Beem convection enhanced Pirani vacuum gauge sensor or a Granville Phillips 275 Convectron The 1 8 DIN housing can be used as a bench top or mounted in a cutout in an instrument panel The VGC301 is powered by user supplied 12 to 30 Vdc 2 W or by the InstruTech series PS301 optional power supplies Description Thermal conductivity gauges measure pressure indirectly by sensing the loss of heat from a sensor to the surrounding gases The higher the pressure of the surrounding gas the more heat is conducted away from the sensor Pirani thermal conductivity gauges maintain a sensor usually a wire at some constant temperature and measure the current or power required to maintain that temperature A standard Pirani gauge has a useful measuring range of about 10 Torr to 10 Torr By taking advantage of convection currents that are generated above 1 Torr convection enhanced Pirani gauges increase the measuring range to just above atmosphere The VGC301 signals and relay functions are the same as
5. RR A ee dr kk 7 2 3 2 Electrical Interface and CONE eenegen 8 2 4 Overpressure and use with hazardous gases EE kk keke kk ek kk ke a k k Ka KE KA anawania 8 2 5 Gases other than Nitrogen EE 8 Ch E TE 9 3 1 Mechanical Installation EE 9 3 2 Electrical Installation Erkek keke keke keke wania KAKE KA KE KAKE KA HEKA HARA KA a KA HK HHR 10 3 2 1 roli e 10 3 2 2 Electrical Conte EDITO yy rb rb Vd NO NU EAR UR DEMNM DUM 10 4 Setup and Opetati E 12 4 1 User E 12 4 2 Millan la PRETIUM RSS 12 43 Return to Factory Default Settings eere kk eda ENEE e EE cepa K auda awana 14 5 Using the gauge with different gases iiu eset niter keke der aai keke wazima ka KAKA KA KAKA A KA Kl KA KA KAKA KA KA KA RAA 15 ME M gOyo zrzrzPmrm o 17 6 1 Display Tor ul ETT ET 17 6 2 Display TEE 18 InstruTech Inc Page 1 Instruction Manual VGC301A Controller 7o Analog ee E 19 7 1 Non Linear Analog Output Torr mTOFF Lhb AU lu keke eke k lek k ke mwana 20 7 2 Non Linear Analog Output mar 21 7 3 Log Linear Analog Output TOT tire reir tpm tak ke kek k rna cen nd eura KA KAKA KA KA awana 22 7 4 Log Linear Analog Output mbar s x eene nennen keke kake ke k saa KA KA KAKE KA KAKA KA sa KA KA KA aon 24 8 RS485 NED tee CN 26 8 1 Device Specific Serial Communication Info 26 8 2 RS485 RS232 Command Protocol Summary EiuE cba miti tinm kr
6. atmosphere calibration affect the displayed value and the output signal Zero calibration optimizes performance of the gauge when operating at a low pressure range of 1 x 10 Torr to 1 x 10 Torr If your minimum operating pressure is higher than 1 x 10 Torr it is not normally necessary to perform calibration at zero and thus span calibration should be adequate If you are able to evacuate your system to below 1 x 10 Torr it is always a good practice to check and set zero if necessary This will also improve performance in cases where gauge contamination is causing higher readings than 1 x 10 Torr even though the system has been evacuated to below 1 x 10 Torr Care should be exercised when using gases other than nitrogen N air 9 2 Maintenance In general maintenance is not required for your InstruTech sensor and controller Periodic performance checks may be done by comparing the sensor to a known reference standard 9 3 Troubleshooting Indication Possible Cause Possible Solution Display is off blank Readings appear very different from expected pressure Readings are noisy or erratic The process gas is different from the gas Correct readings for different gas thermal used to calibrate the CVG101 gauge conductivity See section 5 on using the gauge with different gases CVG101 gauge has not been calibrated or has been calibrated incorrectly Check that zero and span are adjusted correctly Loose cables or conn
7. 1301 Gol Gol 1301 130 1301 130 1 69 1 69 2 0 0010 2 000 1 845 Lal 2 000 2041 Lem me 2 176 2114 1 845 2 362 2 000 2491 2 49 2 380 2 176 2 51 2 845 02778 2 544 2 88 0 0100 3 000 2 820 2 908 oe nl 2 681 aen 3 130 3 083 2 851 zs 3 346 2978 3476 sl 3 386 3149 3483 0 1000 4 000 3 808 3 914 3 988 4 029 zem 4 155 4 134 4 083 3 845 4201 1 0000 Sol 4 778 4 973 4 987 Aal 4 602 5 021 sol 5 190 el 5 204 2 e e ouv Witz 10 0000 6 000 sel sol sol 5 696 5 250 soi 5 530 8 041 6 332 6 446 100 0000 7 000 5 946 sol _z 320 5 966 5 438 zeg 5 80 8 041 5 87 8 04 8 04 5 92 8 04 8 04 5 96 8 04 5 99 6 029 1000 0000 8 000 6 512 sol sol ol 5 706 6 045 6 104 sol sol 8 041 Values listed under each gas type are in volts The log linear output signal and pressure are related by the following formulas P 10 V logio P 5 where P is the pressure in torr and V is the output signal in volts An analog output of less than 0 01 volts to near O volt indicates a damaged or faulty sensor The chart on the following page shows the graphical results of the table and formulas given above for nitrogen True pressure N is plotted on the X axis with a log scale The output signal is plotted on the Y axis on a linear scale InstruTech Inc Page 22 Instruction M
8. 2 NC 6 relay 2 NO Gauge cable assembly P N CB421 1 XXXF is a custom cable assembly provided in different lengths from InstruTech for connecting the VGC301 controller to InstruTech CVG101 Worker Bee or Brooks Automation Inc Granville Phillips 275 Convectron vacuum gauge sensor The cable pin to pin connection is shown below VGC301 pin number connects to CVG101 gauge pin number P N CK431 01 CVG101 molded plastic connector NC cable shield 3 NC O 00 N 1 RB QO N JS InstruTech Inc Page 11 Instruction Manual VGC301A Controller 4 Setup and Operation 4 1 User Interface Basics The user interface is designed for easy operation and a Programming soft keys natural progression of setup parameters This section gives a brief explanation of operation for added clarity There are four soft keys located on the front panel two on each side of the display These keys are used to select and program the various functions available During programming of the VGC301 the display will identify what function each key represents To begin programming press any one of the four keys The display will indicate a choice of functions Press the key indicated by the function on the display to continue with the programming of the parameter desired After setting the various parameters press the SAVE EXIT key to save
9. 4 696 4 341 4 798 4 783 4 828 4 553 4 893 1 0000 5 000 4 784 4 962 4 987 4 982 4 614 5 044 5 037 5 174 4 867 5 201 2 0000 5 301 5 064 5 324 5 288 5 249 4 865 5 250 5 255 5 579 5 192 5 517 5 0000 5 699 5 404 6 070 5 695 5 550 5 141 5 447 5 471 7 288 5 696 5 877 10 0000 6 000 5 633 8 125 6 008 5 743 5 309 5 556 5 602 8 125 6 252 6 374 20 0000 6 301 5 815 8 125 6 337 5 886 5 433 5 621 5 675 8 125 7 608 7 409 50 0000 6 699 5 969 8 125 6 862 6 002 5 514 5 680 5 722 8 125 8 125 7 930 100 0000 7 000 6 045 8 125 7 282 6 065 5 548 5 751 5 780 8 125 8 125 8 125 200 0000 7 301 6 093 8 125 7 526 6 157 5 606 5 851 5 877 8 125 8 125 8 125 300 0000 7 477 6 131 8 125 7 625 6 253 5 654 5 918 5 950 8 125 8 125 8 125 400 0000 7 602 6 178 8 125 7 705 6 353 5 679 5 962 6 000 8 125 8 125 8 125 500 0000 7 699 6 237 8 125 7 786 6 448 5 710 5 996 6 038 8 125 8 125 8 125 600 0000 7 778 6 295 8 125 7 861 6 532 5 734 6 025 6 070 8 125 8 125 8 125 700 0000 7 845 6 349 8 125 7 928 6 611 5 754 6 050 6 097 8 125 8 125 8 125 760 0000 7 881 6 380 8 125 7 965 6 658 5 765 6 063 6 112 8 125 8 125 8 125 800 0000 7 903 6 399 8 125 7 988 6 687 5 772 6 072 6 122 8 125 8 125 8 125 900 0000 7 954 6 488 8 125 8 042 6 766 5 787 6 092 6 146 8 125 8 125 8 125 1000 0000 8 000 6 494 8 125 8 092 6 847 5 799 6 111 6 167 8 125 8 125 8 125 1100 0000 8 041 6 539 8 125 8 125 6 936 5 812 6 128 6 187 8 125 8 125 8 125 1200 0000 8 079 6 580 8 125 8 125 7 028 5 822 6 146 6 204 8 125 8 125 8 125 13
10. BAUD Factory default 19 200 This sets the baud rate for the RS485 and the RS232 serial communications The baud rate can be set to various values through the serial interface or via the front panel soft keys The parity can only be changed through the serial interface command set When this occurs the current setting will be shown in the list of choices and can be re selected if changed RS485 Type Factory default 2 WIRE Selects 2 wire or 4 wire configuration for RS485 interface ANALOG TYPE Factory default LOG Select NONLIN for non linear S Curve or LOG for log linear or LINEAR analog output See Analog Output section SET LINEAR Factory default 0 01 VOLTS to 10 VOLTS corresponding to 1 mTORR to 1 TORR This will take the user to four different screens to setup the linear analog output See Analog Output section a Setthe minimum pressure b Setthe minimum voltage corresponding to the minimum pressure c Set the maximum pressure d Set the maximum voltage corresponding to the maximum pressure The linear output voltage can be any value between 0 01 Vdc and 10 Vdc corresponding to pressures between 1 mTorr and 1000 Torr INFO This screen shows the unit firmware version 4 3 Return to Factory Default Settings You can reset all values to the original factory default settings by simultaneously pressing the upper left and upper right soft keys The user will then be prompted to Set Factory Defaults
11. Choose Yes or No InstruTech Inc Page 14 Instruction Manual VGC301A Controller 5 Using the gauge with different gases A thermal conductivity gauge senses heat loss which depends on the thermal conductivity of the gas surrounding the sensor Since different gases and mixtures have different thermal conductivities the indicated pressure readings and outputs will also be different InstruTech convection gauges and most other thermal conductivity gauges are calibrated using nitrogen N2 When a gas other than N air is used correction must be made for the difference in thermal conductivity between nitrogen N and the gas in use The charts and tables on the following pages indicate how different gases affect the display and output from an InstruTech convection gauge A WARNING Using a thermal conductivity gauge with gases other than that for which it is calibrated could result in death or serious injury Be sure to use gas correction data in this manual when measuring pressures of gases other than N air For N the calibration shows excellent agreement between indicated and true pressure throughout the range from 10 to 1000 Torr At pressures below 1 Torr the calibration curves for the different gases are similar The difference in readings at these low pressures is a constant a function of the difference between thermal conductivities of the gases At pressures above 1 Torr indicated pressure readings may diverge significantl
12. at support instrutechinc com If you intend to also return the vacuum gauge sensor used with the controller for the safety of our employees you must download complete and submit a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot accept gauges that have been exposed to hazardous materials 11 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within five years unless otherwise noted after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty
13. damaged InstruTech Inc Page 6 Instruction Manual VGC301A Controller Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised 2 2 Safety Precautions Service and operation Ensure the enclosure of the VGC301 is connected directly to a good quality earth ground Ensure that the vacuum port on which the CVG101 vacuum gauge tube is mounted is electrically grounded Use an appropriate power source of 12 to 30 Vdc 2 W or use InstruTech series PS301 optional power supplies Turn off power to the unit before attempting to service the controller Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual Contact qualified InstruTech service personnel for any service or troubleshooting condition that may not be covered by this instruction manual It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and inst
14. does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 29 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail
15. mbar 6 66 3 26 17 9 6 63 4 45 1 70 3 26 3 49 327 6 98 10 0 13 3mbar 13 3 5 33 OP 13 7 6 62 2 37 3 94 4 51 OP 28 6 37 1 26 6 mbar 26 6 7 73 OP 29 7 8 78 3 05 4 42 4 95 OP 778 473 66 6 mbar 66 6 10 4 OP 103 10 9 3 42 5 05 5 51 OP OP 1012 133 mbar 133 11 7 OP 278 12 3 3 65 6 23 6 54 OP OP OP 266 mbar 266 13 0 OP 393 16 3 4 42 7 98 8 55 OP OP OP 400 mbar 400 15 0 OP 506 22 5 4 78 9 18 10 0 OP OP OP 533 mbar 533 17 9 OP 646 29 8 5 25 10 1 11 2 OP OP OP 666 mbar 666 21 4 OP 805 38 2 5 61 11 0 12 2 OP OP OP 800 mbar 800 25 0 OP 973 48 5 5 91 11 8 13 2 OP OP OP 933 mbar 933 29 0 OP 1140 61 4 6 19 12 5 14 2 OP OP OP 1011 mbar 1011 31 5 OP 1250 71 8 6 33 13 0 14 7 OP OP OP 1060 mbar 1060 33 4 OP 1320 79 1 6 45 13 2 15 1 OP OP OP 1190 mbar 1019 37 9 OP OP 105 6 65 13 9 16 0 OP OP OP 1330 mbar 1330 43 3 OP OP 147 6 77 14 7 16 9 OP OP OP Values listed under each gas type are in mbar Notes 1 OP Owverpressure indication display will read overpressure Examples 1 Gas used is nitrogen Display shows pressure measurement of 13 3 mbar True pressure of nitrogen is 13 3 mbar 2 Gasusedisargon Display shows pressure measurement of 11 7 mbar True pressure of argon is 133 mbar 3 Gas used is CO Display shows pressure measurement of 0731 mbar True pressure of CO is 0666 mbar InstruTech Inc Page 18 Instruction Manual 7 Analog Output The VGC301 provides eith
16. 0 3 6700 2 7340 3 2040 3 3300 6 3610 4 60 3 8010 7 3140 4 6200 3 9030 2 9660 3 3080 3 4140 540 4 0370 4 9160 4 0710 3 0750 3 4300 3 50900 Tess 5 0260 4 1540 3 1340 3 6180 3 6600 Tea es True Total Pressure 0 morr 0375 SD ji Er oO I 5 o 0 375 0 375 0 376 0 378 0 381 0 388 0 40 0 375 0 376 0 378 0 382 0 389 0 403 0 438 0 492 0 584 0 796 1 053 1 392 2 014 0 375 0 0 376 0 379 0 384 Torr Torr 0 392 Torr Torr Torr Torr C N e e eo e M o 3 o F F o o E F 3 o 9 9 un is o o o o N i K i e e eo E M o o o o o o PP w o o uju a eo 3 zi o 9 3 LD H o 3 o 3 eo o eo o 0 417 20 mTorr 052 50 mTor 0 68 0 878 N N De 0 484 0 608 0 768 1 00 co o i N SERI H ojo ojojo 3 o 9 9 3 N o o N 500 mTorr 1 683 Torr T w 3 313 o 3 A oo 5 ol 3675 20 Tor 4576 50 Tor 4846 100 Tor 4944 5 019 300 Tom 5111 kal 9 4 699 5 172 5 583 5 720 5 860 e COD uju 4 o 3 p 4 o E a A o CH 1 1 155 5 1 o E ni i a N w e 4 o A 3 CH o 4 19 6 661 4 28 6 72 4 3860 5 3150 4 6210 3 4660 4 0160 40880 6 767 4 4770 54220 4 7080 3 5260 4 0760 41510 6 80 4 5500 5 5150 4 7750 3 5730 4 1240 42030
17. 00 0000 8 114 6 624 8 125 8 125 7 140 5 828 6 164 6 222 8 125 8 125 8 125 1333 0000 8 125 6 636 8 125 8 125 7 169 5 830 6 169 6 228 8 125 8 125 8 125 Values listed under each gas type are in volts The log linear output signal and pressure are related by the following formulas P 10 V logio P 5 where P is the pressure in mbar and V is the output signal in volts An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor The chart on the following page shows the graphical results of the table and formulas given above for nitrogen True pressure N is plotted on the X axis with a log scale The output signal is plotted on the Y axis on a linear scale InstruTech Inc Page 24 Instruction Manual VGC301A Controller Log Linear Analog Output Voltages vs Pressure mbar Volts 0 0001 0 0010 0 0100 0 1000 1 0000 10 0000 100 0000 1000 0000 10000 0000 Pressure mbar Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page InstruTech Inc Page 25 Instruction Manual VGC301A Controller 8 8 1 RS485 RS232 serial communications Device Specific Serial Communication Info The standard VGC301 model provides RS232 RS485 serial communications The following information and the RS485 RS232 command protocol summary listed on the next page should be used to se
18. 08 3 414 5 406 5 172 66 6 mbar 4 8464 4 037 4 916 4 071 3 075 3 43 3 509 6 159 5 583 133 mbar 4 9449 4 122 5 026 4 154 3 134 3 618 3 66 6 483 5 72 266 mbar 5 019 4 192 5 106 4 336 3 269 3 827 3 883 6 661 5 86 400 mbar 5 1111 4 283 5 2 4 502 3 384 3 938 4 005 6 726 533 mbar 5 2236 4 386 5 315 4 621 3 466 4 016 4 088 6 767 6 103 666 mbar 5 3294 4 477 5 422 4 708 3 526 4 076 4 151 6 803 800 mbar 5 4194 4 55 5 515 4 775 3 573 4 124 4 203 6 843 6 342 933 mbar 5 4949 4 611 5 592 4 83 3 613 4 166 4 247 6 89 1010 mbar 5 534 4 643 5 633 4 86 3 632 4 19 4 271 6 92 1060 mbar 5 5581 4 663 5 658 4 877 3 645 4 203 4 286 6 942 6 519 1190 mbar 5 6141 4 706 5 713 4 919 3 674 4 237 4 321 7 1330 mbar 5 6593 4 745 5 762 4 955 3 69 4 270 4 354 7 056 6 642 Values listed under each gas type are in volts Note By design these values are identical to the outputs from Brooks Automation Inc Granville Phillips Convectron gauges Mini Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 0 01 volts to near 0 volt indicates a damaged or faulty sensor InstruTech Inc Page 21 Instruction Manual VGC301A Controller 7 3 Log Linear Analog Output Torr Log Linear analog output for selected gases Engineering units in Torr Torr 1301 1 301 1 301 1 000 1 000 1 00 1301 1301
19. 1 700 250 EINE 2 D 3 9 5 23 5 3 S S 32 4 40 5 97 2 a EE sisis E 3 S E ka N 690 136 262 BETIR m 359 105 Le p ass o Leo 1 62 3 33 245 262 246 524 753 2 96 L3 op fas _ 272 332 372 OP 379 414 oP 468 491 oP 599 642 OP 689 752 oP 7 63 e or OP OP OP OP OP OP OP 700 1 28 1 78 2 29 2 57 2 74 3 32 3 59 3 94 4 21 E PEE o Jo o o J 9 K R E 9 9 2 8 28 8 86 9 42 9 76 9 95 10 5 5 08 11 1 4 65 4 75 4 84 461 53 9 59 4 735 1000 Notes 1 OP overpressure indication display will read over pressure 2 Display auto ranges between Torr and mTorr at 1 Torr E 9 9 a NJS S oln ojo N Examples 1 Gas used is nitrogen N Display shows pressure measurement of 10 Torr True pressure of nitrogen is 10 Torr 2 Gasusedis argon Ar Display shows pressure measurement of 600 mTorr True pressure of argon is 1 Torr 3 Gas used is oxygen O Display shows pressure measurement of 486 mTorr True pressure of oxygen is 500 mTorr InstruTech Inc Page 17 Instruction Manual VGC301A Controller 6 2 Display mbar The table below shows the displayed readings at various pressures for selected gases when engineering units selected is in mbar Displayed Pressure Readings vs True Pressure for selected gases Enginee
20. 7 Instruction Manual VGC301A Controller A WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 3 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used in a safe manner Always double check the system set up before using any signals to automate your process Perform a hazardous operation analysis of your system design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage 2 4 Overpressure and use with hazardous gases A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding InstruTech gauges should not be used at pressures exceeding 1000 Torr absolute pressure In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The CVG101 vacuum gauge tube connected to the VGC301A controller is not intended for use at
21. He 02 CO KR Freon12 Freon22 D Ne CH 0 mbar 0 3751 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0 375 0001 mbar 0 3759 0 3757 0 376 0 376 0 376 0 376 0 376 0 376 0 376 0 3757 0 3766 0003 mbar 0 3768 0 376 0 377 0 377 0 377 0 377 0 378 0 378 0 377 0 3763 0 378 0006 mbar 0 3795 0 378 0 379 0 38 0 381 0 377 0 382 0 381 0 381 0 3782 0 3825 0013 mbar 0 384 0 381 0 382 0 384 0 385 0 379 0 388 0 388 0 386 0 381 0 3896 0027 mbar 0 3927 0 387 0 389 0 392 0 395 0 384 0 401 0 4 0 396 0 388 0 403 0067 mbar 0 4174 0 403 0 409 0 417 0 412 0 395 0 437 0 432 0 425 0 405 0 438 0133 mbar 0 4555 0 429 0 441 0 453 0 462 0 415 0 488 0 48 0 47 0 433 0 492 0266 mbar 0 5226 0 477 0 497 0 521 0 536 0 451 0 581 0 566 0 549 0 484 0 584 0660 mbar 0 6819 0 595 0 637 0 679 0 705 0 544 0 778 0 764 0 727 0 608 0 796 0 13 mbar 0 878 0 745 0 814 0 868 0 9 0 668 1 009 0 99 0 944 0 768 1 053 0 26 mbar 1 1552 0 962 1 068 1 141 1 179 0 847 1 315 1 291 1 265 1 002 1 392 0 66 mbar 1 6833 1 386 1 589 1 664 1 668 1 194 1 826 1 805 1 914 1 469 2 014 1 33 mbar 2 2168 1 818 2 164 2 195 2 172 1 536 2 257 2 247 2 603 1 976 2 632 2 66 mbar 2 8418 2 333 2 939 2 814 2 695 1 921 2 647 2 666 3 508 2 631 3 313 6 66 mbar 3 6753 3 028 4 387 3 672 3 316 2 429 3 029 3 09 5 059 3 715 13 3 mbar 4 2056 3 48 5 774 4 225 3 67 2 734 3 204 3 33 6 361 4 605 4 699 26 6 mbar 4 5766 3 801 7 314 4 62 3 903 2 966 3 3
22. I InstruTech Inc VGC301 Convection Vacuum Gauge Controller User Manual InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000363 108 Copyright 2012 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Convectron and Granville Phillips are registered trademarks of Brooks Automation Inc Chelmsford MA p n 000363 108 Instruction Manual VGC301A Controller Table of Contents 1 Introduction General Information kk kk k keka AKA KEKE KAKE KE A KAKA A KA manana 3 1 1 DITO To IO u cm 3 WE ge en E 3 1 3 DIIMO MSIONS AAA M 4 Tab Part NUMDETS E 4 2 Important Safety InformatiOn vire l k EE 6 2 1 Safety Precautions Gelplal usse nene era kek kek k keke kk kk ka KA KAKA KA KA KAKA KA KA KA KA KA KA KA KA 6 2 2 Safety Precautions Service and operation L kk kek kk kk K k ek k Kake A KAKA KA KA 7 2 3 Electrical COndiL O E 7 2 3 1 Proper Eguipment Grounding iic i i i beo ped Uri peut RU Pe Hag band ed Rx ken k UN hak
23. KF NWAOKF 1 1 3 in Mini CF NW16CF Mini Conflat 2 3 4 in CF NW35CF Conflat 1 4 in Cajon 4VCR female 1 2 in Cajon 8VCR female P N CB421 1 10F CB421 1 25F CB421 1 50F Consult Factory CVG101GA CVG101GB CVG101GC CVG101GD CVG101GE CVG101GF CVG101GG CVG101GH InstruTech Inc Page 5 Instruction Manual VGC301A Controller 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the controller If you have any questions about the safe installation and use of this product please contact InstruTech 2 1 Safety Precautions General Hazardous voltages are present with this product
24. anual VGC301A Controller Log Linear Analog Output Voltage vs Pressure Output Signal Volts 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page InstruTech Inc Page 23 Instruction Manual VGC301A Controller 7 4 Log Linear Analog Output mbar Log Linear analog output for selected gases Engineering units in mbar True Pressure mbar N Ar He O CO KR Freon12 Freon22 D Ne CH 0 0001 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 1 000 0 0002 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 1 301 0 0005 1 699 1 699 1 699 1 699 1 699 1 523 1 699 1 699 1 699 1 699 1 699 0 0010 2 000 1 903 1 938 2 000 2 028 1 668 2 125 2 125 2 080 1 903 2 167 0 0020 2 301 2 146 2 204 2 301 2 355 1 970 2 487 2 487 2 392 2 166 2 523 0 0050 2 699 2 524 2 602 2 699 2 672 2 370 2 883 2 855 2 778 2 551 2 893 0 0100 3 000 2 820 2 908 2 991 3 012 2 675 3 172 3 136 3 082 2 849 3 186 0 0200 3 301 3 188 3 208 3 294 3 345 2 979 3 473 3 434 3 385 3 150 3 484 0 0500 3 699 3 512 3 607 3 693 3 741 3 372 3 863 3 837 3 779 3 543 3 886 0 1000 4 000 3 809 3 928 3 989 4 033 3 671 4 157 4 136 4 082 3 844 4 197 0 2000 4 301 4 103 4 217 4 288 4 325 3 963 4 445 4 424 4 393 4 148 4 500 0 5000 4 699 4 495 4 634 4 686
25. are eg 01VER lt CR gt eg 0105041 00 SET FACTORY Force unit to return ALL settings xxFAC lt CR gt xx_PROGM_OK lt CR gt DEFAULTS back to the way the factory eg 401FAC lt CR gt parity 8 bits for the RS485 and RS232 SET BAUD RATE Set the communications baud rate xxSByyyyy lt CR gt xx PROGM OK CR for RS485 and RS232 eg 01SB19200 lt CR gt SET NO PARITY Set the communications to NO xxSPN lt CR gt xx_PROGM_OK lt CR gt eg 01SPN lt CR gt SET ODD PARITY Set the communications to ODD parity 7 bits for the RS485 and RS232 xxSPO lt CR gt eg 01SPO lt CR gt xx_PROGM_OK lt CR gt complete some of the commands SET EVEN Set the communications to EVEN xxSPE lt CR gt xx_PROGM_OK lt CR gt PARITY parity 7 bits for the RS485 eg 01SPE lt CR gt RS232 RESET Reset the device required to xxRST lt CR gt No response eg 01RST lt CR gt 1 Commands marked with a under the BRIEF DESCRIPTION column will not take effect until after RESET command is sent or power is cycled InstruTech Inc Page 27 Instruction Manual 9 Service 9 1 Calibration VGC301A Controller Every InstruTech CVG101 sensor is calibrated prior to shipment using nitrogen N However you can calibrate the instrument by adjusting zero and span atmosphere using the procedure described previously in section 4 2 titled Programming Zero and span
26. during normal operation The product should never be operated with the enclosure removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages is provided A WARNING There are no operator serviceable parts or adjustments inside the product enclosure Refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of gualified InstruTech service trained personnel Return the product to an InstruTech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made A WARNING Source power must be removed from the product prior to performing any servicing After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts are required ensure that the parts are specified by InstruTech Inc Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is
27. e 9 pin D sub female mating connector provided as part of the gauge cable analog output and serial communications interface 9 pin D sub male relay outputs 6 pin pluggable terminal block mating connector included power 2 pin pluggable terminal block mating connector included CE compliant RoHS compliant Page 3 Instruction Manual VGC301A Controller 1 3 Dimensions 50mm 1 95 96mm 3 8 91mm 3 58 1 4 Part Numbers P N VGC301 Convection Vacuum Gauge Controller VGC301A Optional PS301 Power Supply for VGC301 controller with North American AC Plug why PS301 A ji 1 with Universal European AC Plug A PS301 EU with UK AC Plug Ad PS301 UK with China AC Plug ste P301 C with Australian AC Plug wy PS301 SP This variation of the PS301 power supply may PS301 UX be used when an AC plug that is not listed above is required The conventional IEC60320 AC power entry receptacle allows use with any user supplied AC mains power cord set available worldwide InstruTech Inc Page 4 Instruction Manual Part Numbers continued Vacuum Gauge Cable For connecting the CVG101 Worker Bee vacuum gauge sensor to the VGC301 controller InstruTech CVG101 Worker Bee Convection Vacuum Gauge Sensor VGC301A Controller 10ft 3 m 25 ft 8 m 50 ft 15 m over 50 ft or custom lengths Combination 1 8 in NPT male 1 2 in tube use 1 8 NPT male or 1 2 O D O ring compression NW16KF NW25
28. ections Check and tighten connections Contamination Inspect the CVG101 for signs of contamination such as particles deposits discoloration on gauge inlet Return to factory for possible cleaning Vibration Ensure gauge is not mounted where excessive vibration is present Gauge cannot be calibrated zero and span can t be adjusted Setpoint does not actuate Display shows Sensor Bad Display shows overpressure Atmospheric pressure reads too high and can t be set to correct value Atmospheric pressure reads too low and can t be set to correct value InstruTech Inc Contamination Return the CVG101 to factory for possible cleaning Sensor failure for other cause Replace the CVG101 Sensor wire damaged Replace the CVG101 System pressure over 1000 Torr Reduce pressure Faulty electronics Repair or replace the VGC301 electronics Contamination Return the CVG101 to factory for possible cleaning Sensor wire damaged Replace the CVG101 Sensor wire damaged Replace the CVG101 Contamination Return the CVG101 to factory for possible cleaning Page 28 Instruction Manual VGC301A Controller 10 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the controller for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us
29. ept for moisture content Water vapor can significantly change the response of a thermal gauge and correction should be made as you would for any other gas Other contaminants If your gases condense coat or corrode the sensor the gauge calibration and response to different gases will change Generally if the gauge can be calibrated zero and span settings these changes are small enough to be ignored If you can t set zero and span the gauge should be replaced or return to factory for evaluation and possible cleaning InstruTech Inc Page 15 Instruction Manual VGC301A Controller Convection Vacuum Gauge Indicated vs True Total Pressure Test Gases N2 Ar He 1000 100 o o True Total Pressure Torr capacitance manometer 0 01 0 001 4 0 0001 0 001 0 01 0 1 1 10 100 1000 Indicated Pressure Torr convection gauge 8 CVG N2 4 Convectron N2 CVG Ar x Convectron Ar Convectron He e CVG He Gas Correction Chart The Y axis of the above chart is actual pressure as measured by a capacitance manometer a diaphragm gauge that measures true total pressure independent of gas composition The X axis is the pressure reading indicated by the convection gauge under test This chart shows readings for an InstruTech convection gauge CVG and Granville Phillips Convectron gauge to illustrate that the difference i
30. er a non linear log linear or a 0 10 Vdc linear analog output signal Non Linear Output The first Convectron gauge controllers produced a non linear output signal of 0 375 to 5 659 Vdc for O to 1000 Torr of N roughly in the shape of an S curve as shown atright Granville Phillips adopted the same output curve for most of their Mini Convectron modules and controllers with non linear output although in recent years some Granville Phillips controllers may output variations of the original S curve The non linear output from InstruTech convection gauges modules and controllers duplicates the original S curve of 0 375 to 5 659 Vdc for 0 to 1000 Torr The tables shown in section 7 1 and 7 2 contain the lookup data for converting the non linear output voltage into pressure values for nitrogen and various other gases Log Linear Output Many InstruTech modules and controllers also provide a log linear output signal as an alternative to the non linear signal described above This output shown at right is a 1 Volt per decade signal that may be easier to use for data logging or control The table shown in section 7 3 and 7 4 contain the lookup data and provides the formulas for converting the log linear output voltage into pressure values for nitrogen and various other gases Linear 0 10 Vdc Analog Output VGC301A Controller Non Linear Analog Output Output Volts Pressure Torr 103 10 107 10 10 10
31. found on similar convection gauge controllers from other manufacturers The VGC301 Controller CVG101 vacuum gauge tube and gauge cable can be directly interchanged with Brooks Automation Inc Granville Phillips 375 controller 275 Convectron gauge and gauge cable Remote interface relay and power connectors are different 1 2 Specifications measurement range signal 1 0 x 10 to 1000 Torr 1 3x 10 to 1333 mbar 1 3x 10 Pa to 133 kPa Bright OLED 4 digits user selectable Torr mbar or Pa 4 digits from 1100 Torr to 1000 Torr 3 digits from 999 Torr to 10 0 mTorr 2 digits from 9 9 mTorr to 1 0 mTorr 1 digit from 0 9 mTorr to 0 1 mTorr Torr mbar or Pa user selectable display display engineering units display update rate 0 5 sec weight 9 oz 250g temperature operating Oto 40 C storage 40 to 70 C humidity 0 to 95 relative humidity non condensing altitude operating 6 560 ft 2 000 m max storage 41 000 ft 12 500 m max analog output user selectable serial communications housing input power setpoint relays connectors RF EMI protection environmental InstruTech Inc a log linear 1 to 8 Vdc 1 V decade or b linear 0 to 10 Vdc c non linear S curve 0 375 to 5 659 Vdc RS232 and 2 wire 4 wire RS485 ASCII protocol 1 8 DIN panel mount enclosure aluminum extrusion 12 30 Vdc 2 W two single pole double throw relays SPDT 1A at 30 Vdc resistive or ac non inductive gaug
32. gt SET ADDR Set the communications RS485 xxSAxx lt CR gt xx_PROGM_OK lt CR gt OFFSET address offset upper nibble H eg 01SA20 lt CR gt SET SPAN Set the span or atmosphere xxTSy yyEzyy lt CR gt xx_PROGM_OK lt CR gt calibration point eg 01TS7 60E 02 SET ZERO Set the zero or vacuum calibration xxTZy yyEzyy lt CR gt xx_PROGM_OK lt CR gt point eg 01TZ0 00E 04 lt CR gt SET TRIP POINT Set the turns on below pressure xxSLzy yyEzyy lt CR gt xx_ PROGM_OK lt CR gt eg 01SL 4 00E 02 lt CR gt eg 01SL 5 00E 02 lt CR gt SET TRIP POINT 2 Set the turns on below pressure point for relay 2 and set the turns off above pressure point for relay 2 xxSHzy yyEzyy lt CR gt eg 01SH 4 00E 02 lt CR gt eg 01SH 5 00E 02 lt CR gt xx_PROGM_OK lt CR gt programmed them before shipment H READ TRIP Read the turns on below xxRLz lt CR gt xx_y yyEzyy lt CR gt POINT 1 pressure point for relay 1 and eg 01RL lt CR gt eg 01_7 60E 02 lt CR gt read the turns off above eg 01RL lt CR gt pressure point for relay 1 READ TRIP Read the turns on below xxRHz lt CR gt xx_y yyEzyy lt CR gt POINT 2 pressure point for relay 2 and eg 01RH lt CR gt eg 01 7 60E 02 CR read the turns off above eg 01RH lt CR gt pressure point for relay 2 READ SW Read the revision number of the xxVER lt CR gt xx_mmnnv vv VERSION firmw
33. in the blank for maximum indicated pressure for the gas you use so that an operator using the gauge will not exceed a safe pressure InstruTech Inc Page 16 Instruction Manual VGC301A Controller 6 Display 6 1 Display Torr mTorr The table below shows the displayed readings at various pressures for selected gases when engineering units selected is in Torr mTorr Displayed Pressure Readings vs True Pressure for selected gases Pressures shown in bold italic font in the shaded areas are in mTorr Pressures shown in normal font and in non shaded areas are in Torr True Total Freon12 Pressure 0 mror 01 mror 02 mio 05 __mrorr 1 mror 2 mTorr 5 _mrorr 10 mTorr 100 20 mrorr 50 mTorr 100 mTorr 200 mrorr 125 155 194 500 mTorr 312 435 486 1 Tor 100 EEN 2 Tor 200 171 5 Torf 500 3 34 10 Torr 100 LEE 103 497 20 Tor 200 580 op 223 659 L0 Tor 50 0 785 oP 776 822 85s or 209 925 979 OP 29 123 113 op 380 169 135 op 45 224 161 op 604 287 pies o 7o 36 4 op 859 oP 94 op 99 op oP op o D 3 o ha A N t N c 2 9 3 ki N 3 S S N S in 0 3 0 4 3 S S Em 20 SIE S S SS ba lt N 3 2 9 11 0 97 13 1 198 222 492 972 147 SE 12 1 1 34 sno 348 m 12
34. info instrutechinc com www instrutechinc com p n 000363 108
35. n or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO unless accurate conversion data for N to other gas is properly used Refer to sections titled Using the gauge with different gases Display and Analog Output for a more complete discussion InstruTech Inc Page 8 Instruction Manual VGC301A Controller A WARNING Do not use the convection gauge connected to this device in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire in the gauge normally operates at 125 C but if malfunction should occur the wire temperature could exceed the ignition temperature of certain combustible gases and gas mixture This could cause an explosion which could result in serious injury or death 3 Installation 3 1 Mechanical Installation The VGC301 is designed for use on a bench top or it may be mounted in an instrument control panel 50mm 1 i 96mm 3 8 91mm 3 58 92mm 3 62 To mount the VGC301 in a panel 1 Make a cutout in your instrument control panel as shown in the drawing above Be sure to allow clearance behind the panel for the instrument as well as connectors and cables at the rear of the instrument 2 Gently pry the front panel bezel loose and remove 3 Slide the VGC301 into the panel hole cutout 4 On either side of
36. n the response for both of these types of gauges is virtually indistinguishable CAUTION Do not assume this data applies to other convection gauges which may or may not be the same Refer to the table on the next page and note the following examples Ex A If the gas is nitrogen N2 when the true total pressure is 500 Torr the gauge will read 500 Torr Ex B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr Continuing to backfill your system attempting to increase the reading up to 760 Torr you will over pressurize your chamber which may present a hazard Ex C If the gas is helium He the gauge will read 999 Torr when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people and product CAUTION What these examples illustrate is that using gases other than nitrogen N2 without using accurate gas conversion data and other proper precautions could result in injury to personnel and or damage to equipment Suggested precautions when using gases other than nitrogen N Install a pressure relief valve or burst disk on your chamber to protect it from overpressure Post a warning label on your gauge readout that states Do Not Exceed Torr Indicated Pressure fill
37. pressures above 20 psia 1000 torr DO NOT exceed 35 psig lt 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure AN CAUTION If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure atmospheric pressure side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmospheric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases 2 5 Gases other than Nitrogen air A WARNING Do not attempt to use with gases other than nitrogen N or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitroge
38. r analog output pressure settings in the newly programmed units of measure InstruTech Inc Page 12 Instruction Manual VGC301A Controller SET ATM 1 To set the atmospheric pressure reading also known as the span adjustment flow nitrogen gas or air into your closed vacuum chamber to allow the pressure to rise to a known value above 400 Torr Alternatively if your local uncorrected barometric pressure air is known simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure 2 Go to the SET ATM screen When the desired pressure is stable adjust the displayed pressure reading on the VGC301 to the known value using the INCR increase or DECR decrease keys Press the SAVE EXIT key to save the new atmospheric span pressure value It is good practice to perform the sequence of checking and adjusting span ATM then zero VAC and then finally re checking the span setting to ensure that the circuitry is properly balanced for use in measuring pressure throughout the intended measurement range SP1 ON and SP2 ON Factory default 100 mTORR These setpoints correspond to the pressures at which the relays will turn on energize The relays will turn on when the pressure is below the programmed pressure value If you are unable to increase the values of SP1 ON or SP2 ON you must first go to SP1 OFF or SP2 OFF and increase those values to a number higher than the values of SP1 ON or SP2 ON you are tr
39. ring units in mbar True Pressure N3 Ar He O CO KR Freon12 Freon22 D Ne CH 0 mbar 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0001 mbar 0001 0001 0001 0001 0001 0001 0001 0001 0001 0001 0001 0003 mbar 0003 0003 0003 0003 0003 0003 0003 0003 0003 0003 0003 0006 mbar 0006 0006 0006 0006 0006 0004 0006 0006 0006 0006 0006 0013 mbar 0013 0009 0011 0013 0015 0005 0020 0020 0017 0009 0023 0027 mbar 0027 0019 0021 0027 0031 0013 0041 0041 0032 0020 0044 0067 mbar 0067 0044 0053 0067 0059 0031 0101 0093 0080 0047 0102 0133 mbar 0133 0088 0107 0129 0146 0064 0195 0179 0161 0095 0203 0260 mbar 0260 0174 0214 0263 0295 0126 0398 0362 0323 0187 0405 0666 mbar 0666 0431 0539 0655 0731 0313 0966 0919 0799 0463 0 100 0 130 mbar 0 130 0857 0 110 0 120 0 140 0623 0 190 0 180 0 160 0 100 0 210 0 260 mbar 0 260 0 160 0 210 0 250 0 270 0 120 0 360 0 340 0 330 0 180 0 410 0 666 mbar 0 666 0 410 0 570 0 640 0 650 0 280 0 810 0 790 0 91 0 470 1 04 1 33 mbar 1 33 0 790 1 5 1 29 1 26 0 530 1 39 1 38 2 06 0 990 2 13 2 66 mbar 2 66 1 51 2 95 2 58 2 27 0 930 2 15 2 21 5 50 2 11 4 43 6 66
40. ructions for returning the product to InstruTech for evaluation 2 3 Electrical Conditions A WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity A person could be seriously injured or killed by coming in contact with an exposed ungrounded electrical conductor at high voltage potential This condition applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel 2 3 1 Proper Equipment Grounding A WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuum processes Verify that the vacuum port on which the CVG101 vacuum gauge tube is mounted is electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The CVG101 vacuum gauge tube and enclosure of the VGC301 controller must be connected directly to a good quality earth ground Use a ground lug on the CVG101 gauge vacuum connection flange if necessary InstruTech Inc Page
41. t serial communications with the device 10 11 12 Default settings are 19 200 baud rate 8 data bits No Parity 1 stop bit Factory default 19 200 8 N 1 The baud rate can be set to different values through the serial interface command set or the front panel push buttons The parity can be changed only through the serial interface command set and the number of data bits will change according to the parity selected The stop bit is always 1 All Responses are 13 characters long xx is the address of the device 00 thru FF CR is a carriage return _ iS a space The z in the set or read trip point commands is a or The plus is the turns on below point and the minus is the turns off above point All commands sent to the controller start with a character and all responses from the controller start with a character This protocol was designed to be 10096 compatible with the Granville Phillips Mini Convectron A valid address must be used even in RS232 commands Factory default 1 InstruTech Inc Page 26 Instruction Manual 8 2 RS485 RS232 Command Protocol Summary VGC301A Controller 1 point for relay 1 and set the turns off above pressure point for relay 1 COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ Read the current pressure in Torr xxRD lt CR gt xx_y yyEzyy lt CR gt eg O1RD lt CR gt eg 01_7 60E 02 lt CR
42. the VGC301 are two screw mounting brackets When the screws in the front of the instrument are turned counterclockwise the hold down brackets recess out of the way into the VGC301 housing When these screws are turned clockwise the brackets rotate out 90 behind the panel Tighten these screws until the brackets hold the VGC301 in place against the panel 5 Pressthe front panel bezel back in place InstruTech Inc Page 9 Instruction Manual VGC301A Controller 3 2 Electrical Installation 3 2 1 Grounding A Be sure the vacuum gauge and your vacuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings may not produce a good electrical connection between the gauge and the chamber it is connected to 3 2 2 Electrical Connections A good recommended practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech VGC301 may replace similar controllers from other manufacturers such as the Granville Phillips 375 controller Many of these other controllers employ the same 9 pin and 15 pin D connectors but they do not all use the same signal pinout configurations If you wish to use your existing cables be sure to check compatibility with the tables on the next page Rewire your cables as necessary Remote 1 0 amp interface connector e COMM Vout Q D gauge relay DC Power connector connector Input
43. the new setting and return to the main screen To continue setting additional parameters scroll forward with the MORE key until you reach the desired parameter 4 2 Programming SET VAC When operating in units of either mbars mbar or pascals Pa you must perform SET ATM before setting the vacuum reading SET VAC See SET ATM below Failure to do so will result in improper operation of the gauge If you change units of measure or reset to factory defaults then this same procedure must be followed again if the units of measure are being set to either mbar or Pa 1 To properly set the vacuum reading zero point with the CVG101 installed on your vacuum system the gauge should be evacuated to a pressure below 1 x 10 Torr 2 Go to the SET VAC screen When the vacuum system pressure is below 1 X 10 Torr press the PRESS TO SET VAC key The zero point displayed pressure reading with gauge exposed to vacuum is now set UNITS Factory default TORR This should be the first parameter that is set This will be the units of measure Torr mbar Pa that are used for all other settings If your VGC301 has been previously configured and relay setpoints and linear analog output pressure settings have been programmed changing units of measure will return the relays setpoints and the linear analog output pressure settings to factory default setting values in Torr In this case you must reprogram the relay setpoints and linea
44. y At these higher pressures convection currents in the gauge become the predominant cause of heat loss from the sensor and calibration depends on gauge tube geometry and mounting position as well as gas properties Generally air and N are considered the same with respect to thermal conductivity but even N and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N you may see readings change by 30 to 40 Torr after the chamber is opened and air gradually displaces the N in the gauge For most other gases the effect is much more significant and may result in a hazardous condition as described below Other considerations when using gases other than N air Flammable or explosive gases A WARNING InstruTech convection gauges are neither intrinsically safe nor explosion proof and are not intended for use in the presence of flammable or explosive gases or vapors Under normal conditions the voltages and currents in InstruTech convection gauges are too low to cause ignition of flammable gases However under certain failure conditions sufficient energy could be generated to cause flammable vapors or gases to ignite or explode Thermal conductivity gauges like the InstruTech convection gauges are not recommended for use with flammable or explosive gases Moisture water vapor In some processes lyophilization for example the gas composition may not change significantly exc
45. ying to set SET SP1 OFF and SET SP2 OFF Factory default 200 mTORR These setpoints correspond to the pressures at which the relays will turn of de energize The relays will turn off when the pressure is above the programmed pressure value If you are unable to decrease the values of SP1 OFF or SP2 OFF you must first go to SP1 ON or SP2 ON and decrease those values to a number lower than the values of SP1 OFF or SP2 OFF you are trying to set RS485 ADDR Factory default 1 This is the lower nibble of the one byte RS485 device address Assuming the address offset ADDR OFFSET is equal to 0 setting the ADDR to a 5 will make the address be 0x05 in hexadecimal A 15 will set the ADDR to OxOF in hexadecimal Note that the address ADDR must be used even when sending RS232 commands RS485 OFFSET Factory default 0 This is the upper nibble of the one byte RS485 address Assuming the address ADDR is 0 setting the address offset ADDR OFFSET to a 5 will make the address be 0x50 hexadecimal Setting the address offset to 15 will make the device address be OxFO hexadecimal eee BINARY ADDRESS 1 ADDRESS Pre ONE BYT E 1 ADDRESS DECIMAL BINARY HEXADECIMAL ADDR OFFSET ADDR rUpper nibble4 pLower nibble4 1 0000 0001 01 5 0000 0101 05 15 0000 1111 OF 16 0001 0000 FO InstruTech Inc Page 13 Instruction Manual VGC301A Controller
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