User Manual MP128E - Physik Instrumente
Contents
1. cceeeeeeeeeeeeeeeeeeeeeeeaaees 21 6 Start Up and Operation 23 6 1 General Notes on Start Up and Operation ccccccseeceeceeeeeeeeeeeeeeseeeeeenaeeees 23 6 2 Starting Up the Rotation Stage uuuss0220400nennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnen nn 26 6 3 Operating Parameters of the Q 622 uuuaneeesenssssnnnnnnnnneeneeennnnnnnnnnnnnnnnnnnnnnnnnnnnn 27 Maintenance 29 7 1 General Notes on Maintenance cccccceccececcecceccececceccucceceeeueeecneceeeeeseeeeeneeees 29 7 2 Performing a Maintenance RUN ccccccsseeceeceeeeecaeeeeeeseseeeeeaseeesaaeeeessaeeeeesaaes 29 7 3 GlEaning TNE Q522 ss sais stz scan thealescsdsteaqcecbsasousessedeusdesabenndstesecadbiaisadiecsadeeddsaabenncetee 29 Troubleshooting 31 Customer Service 33 Technical Data 35 10 1 SCC IC AO WS ee ee Ieieeainsadeneacaseasubipesannctoemeae 35 10 1 1 Data Table a nee nn ee en euere 35 10 1 2 Maximum Ratings nennen een poemeamaeisiend 36 10 1 3 Ambient Conditions and Classifications ccccceceececceceeeeceeeeees 37 10 2 Operating Times een ASEAN AE E 37 10 3 DIMENSION e EE E A AEE EE a een 38 10 4 Pin ASSIIONMEN een een Nena 39 Old Equipment Disposal 41 EC Declaration of Conformity 43 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ccccescececeeeeeeeeeseeeeeeeeeeeaaaseeeeeeees 1 Symbols an2. ccccceseeceeeeessseeeeeeaeeeeeees 1 1 2 Symbols and Typographic CONVentions cccccsccsccccceeeeeceeeeeeeeeeeeeesaeeeeeeeaeeeeees 1 1 3 DS FN eta een ee Bene E E E E 2 1 4 FOUE Seine E E E ee Ener 2 1 5 Other Applicable DOCUMENTS ccccccceceeseeeeeeeeeeeeeeeaeeseeeeeeeeessueeeeeeeeeeeessaaneeess 3 1 6 Downloading Manuals ccccseeeeccceesececeeeeeeeneeeeeeseaseeesseeeeeseauseeesseeeessaneeeenaaeees 3 2 Safety 5 2 1 WETS USE ee tere ee 5 2 2 General Safety Instructions sss2220024000000RRnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnee nn 5 2 3 Organizational MEASUMES cccccssseeceecceeeseceeecaaeseceeecaeeseceeseeeaeeeeesseaaeeeeeessaeeeess 6 3 Product Description 7 3 1 FOCI VIEW aissei iie Een ee 7 3 2 Product CADANG secies Ep a E O 8 3 3 Scope of Delivery nee ee ee een een 9 3 4 Suitable Drive Electronics 200002220000200nnnnnnnnnennnnnnnnnnnnnnennnnnnn nennen 10 4 Unpacking 11 5 Installation 13 5 1 General Notes on Installation u000ss002000040000nn nn nnnnnnnnnnnnennnnnnnnnnnnnnnnn 13 5 2 Mounting the Q 622 on a Surface and Connecting Itto a Protective Earth CORAU OR ea ee ee re 14 5 3 Setting Up a Multi Axis System 2222200s2220nnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnn nennen 18 5 4 Affixing the Load to the Q 622 cacaanannneesnnnnnnnnnneeenesssnnnnnnnnnnnnnnnnnnnnnnnnnee essen 19 5 5 Connecting the Q 622 to the Drive Electronics
3. lf you need a suitable adapter contact our customer service department p 33 Connecting the Q 622 to E 870 drive electronics with a Mini DIN 4 socket 1 Connect the Q 622 with the adapter cable Connect the Sub D 15 m connector of the Q 622 with the connector of the adapter cable Sub D 15 f 2 Connect the adapter cable with the drive electronics Connect the Mini DIN 4 connector of the adapter cable with the Mini DIN 4 socket of the drive electronics 3 Take suitable measures to prevent the adapter cable from being accidentally disconnected Connecting the Q 622 to E 870 drive electronics with a connector strip gt Connect the Q 622 to the connector strip of the drive electronics with a suitable adapter 22 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccccsseseeeeeeeeeseaeeeeeeceeeeessaeeeeeeeeees 23 Starting Up the Rotation Stage cccccccccccsssscccceseceeceeeeceeceseceeseegeeesseeeeesseeeeeseaeeeeeas 26 Operating Parameters Of the Q 622 ununueeesssnnnnnnnnnnenesnnnnnnnnnnnnneesnnnnnnnnnnnnsesnnnnnnnnn 27 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected lf a protective earth conductor is not or not properly connected dangerous touch
4. gt Ensure sufficient ventilation at the mnie nee Deca eee of installation NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the Q 622 gt Only operate the Q 622 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 36 for which the Q 622 is specified gt Only operate the Q 622 when the operating voltage is properly connected see Pin Te nn p 39 Operating frequency too high NOTICE An operating frequency that is too high can cause damage to the Q 622 gt Only operate the Q 622 with controllers drivers and original accessories from PI gt Do not exceed the operating frequency range p 36 for which the Q 622 is FOR NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the rotation stage gt When the Q 622 is not used switch off the electronics 24 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Destruction of the piezo actuator by electric flashovers The use of the Q 622 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electr
5. Two locating holes with 1 5 mm H7 and three M2 mounting holes are available in the surface The holes for accommodating the screws have to be sufficiently conductive to ensure the proper functioning of the protective earth conductor For applications with great temperature changes The surface should have the same thermal expansion properties as the Q 622 e g surface made of aluminum The evenness of the surface is lt 2 um v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations 16 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS Tools and accessories RPS22 5005 screw set from the scope of delivery of the Q 622 p 9 21 5 m6 x 3 dowel pins ISO 8734 for use as locating pins 3 M2x5 socket head cap screws ISO 4762 Suitable screwdriver Mounting the Q 622 on a surface and connecting it to a protective earth conductor 1 Introduce the two locating pins into the locating holes on the bottom side of the Q 622 see figure above or in the surface 2 Place the Q 622 on the surface so that the locating pins are inserted into the corresponding locating holes on the other side 3 Mount the Q 622 on the surface with three M2 screws a Manually turn the moving platform of the Q 622 until one of the three counter sunk holes in the base body is accessible b Introduce the screw into the counter su
6. be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 6 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Product VIEW ernennen ara a E ae ae re RESET E 7 POOU GE LANs ee nee ee ee ee ee 8 Cope Or ICH VETV eee ene a no rer een 9 Suitable Drive Electronics un44n44nnnnnennennennennennnnnn ann ann nam ann ann nennen nennen nn nne nennen 10 3 1 Product View Figure 1 Q 622 product view 1 Moving platform 2 Base body 3 Motor cable for connection to the electronics The arrow in the figure shows the positive direction of motion Q 622 Miniature Rotation Stage MP128E Version 1 0 0 7 3 Product Description K l 3 2 Product Labeling Figure 3 Q 622 Position of the product labeling example view 8 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description A 113064246 Serial number example individual for each Q 622 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers LD Warning sign Observe manual Old equipment disposal p 41 mo je jocemmimk Symbol for the protective earth conductor marks the position of the holes via which the Q 622 is to be connected to the protective earth conductor 3 3 S
7. data Maximum Operating Maximum Maximum Power Operating Consumption Frequency 36 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the Q 622 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Er fM Procciondass I Degree of protection IP20 according to IEC 60529 10 2 Operating Time The operating time and the operating frequency in step mode affect the lifetime of the rotation stage In order to prevent overheating and high wear the operating time with the given operating frequency and 100 duty cycle must not exceed the values given in the following table Operating Frequency in Hz Operating Time 48 V 0 2 A 20000 10 s max 10000 20 s max lt 1000 120 s max For the relevant parameters see Starting Up the Rotation Stage p 26 and the user manual of the electronics used Q 622 Miniature Rotation Stage MP128E Version 1 0 0 37 10 Technical Data r I With 100 duty cycle without heat dissipation 10 3 Dimensions Dimensions in mm Signs that are used to separat
8. IEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the Q 622 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 Q 622 Miniature Rotation Stage MP128E Version 1 0 0 43
9. PI MP128E Q 622 Miniature Rotation Stage User Manual Version 1 0 0 Date 24 02 2015 This document describes the following product Q 622 900 Q Motion Rotation Stage gt 360 Rotation Range without Position Sensor for Open Loop Operation 5 mNm Torque 22 mm Turntable Diameter Piezoelectric Inertia Drive Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2015 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 24 02 2015 Document number MP128E KSch version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual
10. apod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals PI website gt Follow the corresponding instructions for downloading Download freely accessible manuals 1 Open the website http www pi portal ws 2 Click Downloads 3 Click the corresponding product category 4 Go to the corresponding product code Q 622 Miniature Rotation Stage MP128E Version 1 0 0 3 1 About this Document I The available manuals are displayed 5 Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 Insert the product CD in the PC drive 2 Switch to the Manuals directory on the CD 3 Inthe Manuals directory open the Release News file including releasenews in the file name 4 Find the user name and the password in the section User login for software downloaa in the Release News 5 Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer 6 Log in with the user name and the password from the Release News 7 Inthe directory of the corresponding product go to the Manuals sub directory 8 Copy the desired manual to the hard disk of your PC or to a data storage medium 4 Ver
11. ard Current 0 2 A during backward ID 0x1F000300 motion Operating frequency PIShift Frequency 20000 Hz in step mode ID 0x1F000400 Duty cycle of the PIShift Charge Cycle 1 current source during D 0x1F000500 the output of one period of the modified sawtooth signal in step mode Q 622 Miniature Rotation Stage MP128E Version 1 0 0 27 6 Start Up and Operation i I Number of steps that PIShift Steps per Second 20000 the rotation stage ID 0Ox1F000600 moves per second with the set operating frequency 28 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance u uunnsenneennnnnnnnnnnnnnnnnnnnn nenn nenn nenn nenn nenn nenn nenn nennen 29 Performing a Maintenance RUN ccccsssccccssseeeccesseecceeeeeccseseeecsegecesseseeessaneeessaaeess 29 Cleaning he GQ 0 amen eee eae EEE EINER EEE nen ee tere eee ERS Nene 29 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance Improper maintenance can lead to misalignment and failure of the Q 622 gt Only loosen screws according to the instructions in this manual 7 2 Performing a Maintenance Run The maintenance run must comprise at least one full rotation of the moving platform of the Q 622 gt Perform the maintenance run after every 10 million steps 7 3 Cleaning the Q 622 Prerequisites v You
12. changes in position with vertical mounting If the load exceeds the maximum torque of the drive when the rotation stage is mounted vertically unintentional changes in the position of the moving platform occur Unintentional changes in position of the moving platform can damage the drive the load or the environment gt When a rotation stage is mounted vertically make sure that the installed load is lower than the maximum torque of the drive p 35 Q 622 Miniature Rotation Stage MP128E Version 1 0 0 13 5 Installation gt I Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable NOTICE gt Keep the Q 622 free from lubricants gt Keep the Q 622 free from dirt and condensation NOTICE Damage from unsuitable cables Unsuitable cables can damage the electronics gt Only use cables provided by PI for connecting the Q 622 to the electronics INFORMATION The positive direction of motion is a counterclockwise rotation 5 2 Mounting the Q 622 on a Surface and Connecting It to a Protective Earth Conductor NOTICE Fe Protruding screw heads eo Protruding screw heads can damage the Q 622 gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion 14 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS NOTICE Warpi
13. cking list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned Q 622 Miniature Rotation Stage MP128E Version 1 0 0 11 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation cccccccccccccscseseseeeceeeeeeeeaeeeeeeeeeeseeeaeeseeeeeesssaaaaeeeeeeees 13 Mounting the Q 622 on a Surface and Connecting It to a Protective Earth Conductor ss RAS secession cl cece stay ec nscettecctearialnals euptanetreene HINRSEHEIELERHERTREBUEVERRE SSR 14 Setting Up a Multi Axis System uuessssssssnennneesnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 18 Affixing the Load to the Q 622 uuunaessnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnssnnnsnnsssso 19 Connecting the Q 622 to the Drive Electronics uuuuu44404sennennnnnnnnnnnnnnnnnnnnnnnen 21 5 1 General Notes on Installation NOTICE Heating up of the Q 622 during operation An The heat produced during operation of the Q 622 can affect your application gt Install the Q 622 so that the application is not impaired by the dissipated heat gt Ensure sufficient ventilation at the place of installation gt Make sure that the complete bottom side of the Q 622 is in contact with the surface on which the Q 622 is mounted NOTICE Unintentional
14. cope of Delivery ee Q 622 Rotation stage according to order RPS22 5005 Screw set for mounting the Q 622 consisting of 21 5 m6 x 3 A2 dowel pins ISO 8734 3 M2x5 A2 socket head cap screws ISO 4762 7202500042 Adapter cable for connection to the E 870 drive electronics 0015 Sub D 15 f to Mini DIN 4 m 0 3 m MP128E Manual for Q 622 rotation stage Q 622 Miniature Rotation Stage MP128E Version 1 0 0 9 3 Product Description i 3 4 Suitable Drive Electronics E 870 10 PIShift Piezomotor PiezoMike Drive Electronics 1 Channel OEM Board E 870 11 PlIShift Piezomotor PiezoMike Drive Electronics 1 Channel OEM Board with Connector Strip E 870 1G PlShift Piezomotor PiezoMike Drive Electronics 1 Channel Bench Top Device E 870 21 PIShift Piezomotor PiezoMike Drive Electronics 2 Channels OEM Board with Connector Strip E 870 2G PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device E 870 41 PIShift Piezomotor PiezoMike Drive Electronics 4 Channels OEM Board with Connector Strip E 870 4G PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device gt To order contact our customer service department p 33 10 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 1 Unpack the Q 622 with care 2 Compare the contents against the items covered by the contract and against the pa
15. d Typographic Conventions ccccccccccccccecssesseecceeeeeeeueeeeeeeeeeessueaeeeeeeeees 1 B TION AE E E E E E E E MEER REN taal EEE taut INNEREN asin EN 2 POIO e E E 2 Other Applicable DOCUMENHS ccccccecceseeeeeeceeeeeseaeeeeeeceeeeeesaeeseeeceeeeeesaaeeeeeeeeeeeeeaas 3 Downloading Manuals eiascncaceasecsananssiseacadsmssieitsasientectasautansnsaGhactdanele tsinnnedieasawinnannaiieacndaanieart 3 1 1 Goal and Target Audience of this User Manual This user manual contains the information needed for the intended use of the Q 622 Basic knowledge of motion control concepts and applicable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual r i Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation Q 622 Miniature Rotation Stage MP128E Version 1 0 0 1 1 About this Document gt I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning 1 Action consisting of several steps whose sequential 2 order must be observed gt Action consisting o
16. d operation p 23 The Q 622 has been installed properly p 13 The E 870 drive electronics has been properly installed and all connections on the E 870 have been set up see E870T0001 Technical Note or E870T0002 Technical Note 26 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation Starting up the Q 622 with E 870 drive electronics 1 Make sure that the parameters of the E 870 drive electronics have been correctly set see Operating Parameters of the Q 622 p 27 2 Provide the control signal required for operating the system Details can be found in the E870T0001 or E870T0002 Technical Note 3 If necessary Adapt the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 to your application see also Operating Time p 37 6 3 Operating Parameters of the Q 622 The following table lists the settings for the parameters of the E 870 drive electronics Further information on the parameter settings is found in the Operating Time section p 37 Parameter Parameter in E 870 Drive Electronics in E 870 Drive Electronics De EN TEE voltage ae Upper Supply Voltage upper limit ID 0x1F000000 Operating voltage PIShift Lower Supply Voltage lower limit ID 0x1F000100 Charging current PIShift Forward Current 0 2 A during forward ID 0x1F000200 motion Charging current PIShift Backw
17. e decimal places Depth and diameter of holes Period All other dimensions Comma Figure 8 Q 622 900 38 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment Connector Sub D 15 m The Sub D 15 m connector transmits the signals of the drive Motor Motor The sign indicates that the corresponding pin has not been assigned The cable shield is connected to the connector shell Q 622 Miniature Rotation Stage MP128E Version 1 0 0 39 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany Q 622 Miniature Rotation Stage MP128E Version 1 0 0 41 12 EC Declaration of Conformity P
18. espective mounting holes Figure 7 Black arrows indicate locating holes for alignment of the load whereas white arrows indicate threaded holes for affixing the load Prerequisites v You have read and understood the general notes on installation p 13 v You have properly mounted the Q 622 on a surface p 14 or on a Q 522 stage p 18 The Q 622 is not connected to the drive electronics You have prepared the load so that it can be affixed to the moving platform for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 38 The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast four points are provided for affixing the load on the moving platform 20 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS If you use locating pins for aligning the load You made two or three locating holes of 1 5 mm H7 for accommodation of locating pins Tools and accessories 4to6 M2 screws of suitable length p 38 Suitable tools for fastening the screws Optional 2 to 3 locating pins of suitable length for locating holes with 1 5mm H7 Affixing the load to the Q 622 1 Align the load on the Q 622 so that the mounting holes in the load and the holes in the moving platform overlap If you use locating pi
19. f one or several steps whose sequential order is irrelevant List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the rotation stage is mounted horizontally The contact point of the load is in the center of the platform 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Description E 870 10 E 870 11 E 870 21 E87010001 Technical Note E 870 41 Piezomotor PiezoMike Drive Electronics OEM Board 1 to 4 Channels E 870 1G E 870 2G E 870 4G E870T0002 Technical Note Piezomotor PiezoMike Drive Electronics Bench Top 1 to 4 Channels 1 6 Downloading Manuals INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 33 INFORMATION For some products e g Hex
20. have disconnected the rotation stage from the electronics Cleaning the rotation stage gt When necessary clean the surfaces of the rotation stage with a cloth that is lightly dampened with a mild cleanser or disinfectant gt Do not use any organic solvents Q 622 Miniature Rotation Stage MP128E Version 1 0 0 29 8 Troubleshooting PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting Functional Drive electronics Drive electronics from PI impairment after has been replaced gt Set the parameters in the E 870 Control PC system modification The rotation stage program so that they correspond to the has been replaced combination of drive electronics and Q 622 model for details see Operating Parameters of the Q 622 p 27 and E870T0001 or E870T0002 Technical Note No or limited motion The cable is not Check the connecting cable connected correctly or is defective Excessive load Reduce the load Observe the information in the Technical Data section p 35 When a rotation stage is mounted vertically make sure that the installed load is lower than the maximum torque of the drive Parameters of the Check the settings for the parameters of the drive electronics drive electronics for details see Operating incorrectly set Parameters of the Q 622 p 27 and E870T0001 or E870T0002 Technical Note Operating voltage too Provide an operating voltage of 48 V low Unfavorable operating Adapt the operating fre
21. ic flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the Q 622 in environments that can increase the electric conductivity gt Only operate the Q 622 within the permissible ambient conditions and classifications p 37 NOTICE Damage from collisions Collisions can damage the rotation stage the load to be moved and the environment gt Make sure that no collisions are possible between the rotation stage the load to be moved and the environment in the motion range of the rotation stage gt Do not place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if an electronics malfunction occurs NOTICE Considerable wear due to high operating frequency Os A high operating frequency in step mode can cause considerable wear on the mechanical system gt Reduce the value of the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 on the drive electronics see user manual of the electronics gt Reduce the operating time with a high operating frequency p 37 gt Stop the motion immediately if an electronics malfunction occurs NOTICE Increased wear due to small working range gt If you on
22. ing voltages The drive electronics is not in the scope of delivery of the Q 622 PI offers suitable drive electronics see p 10 2 2 General Safety Instructions The Q 622 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the Q 622 gt Only use the Q 622 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety Q 622 Miniature Rotation Stage MP128E Version 1 0 0 5 2 Safety Fr I The operator is responsible for the correct installation and operation of the Q 622 2 3 Organizational Measures User manual gt Always keep this user manual available by the Q 622 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the Q 622 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the Q 622 after having read and understood this user manual Personnel qualification The Q 622 may only
23. ly move the Q 622 over a small working range lt 20 perform at least one full rotation of the moving platform at regular intervals Q 622 Miniature Rotation Stage MP128E Version 1 0 0 25 6 Start Up and Operation i I INFORMATION The drive electronics is adapted via parameters to the Q 622 Changing parameter values can cause undesirable results gt Only operate the Q 622 when the parameters of the drive electronics have been correctly set see Operating Parameters of the Q 622 p 27 INFORMATION The PIShift drive develops noises in step mode The noise development depends on the current step frequency 6 2 Starting Up the Rotation Stage INFORMATION If the parameters of the drive electronics are not adapted to the Q 622 and the application load orientation of the Q 622 the Q 622 will either not move or not move satisfactorily gt Only operate the Q 622 when the parameters of the drive electronics have been correctly set see Operating Parameters of the Q 622 p 27 gt Pay particular attention to the parameter settings for operating voltage and operating frequency INFORMATION The values of the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 should be identical for optimum drive performance Further information can be found in the user manual of the electronics Prerequisites v You have read and understood the general notes on start up an
24. mation ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website Q 622 Miniature Rotation Stage MP128E Version 1 0 0 33 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter IC CC ION Seen aa an Dane en ae nee nee 35 CS AA Tide aS 37 DIMENSION essen ae re En een gene nee ae ne rede 38 PASSIONE I rasen ee een ee Dan ee ed 39 10 1 Specifications 10 1 1 Data Table Preliminary Data Motion and positioning Active axis Rotation range Resolution Min incremental motion Maximum velocity open loop Mechanical properties Load capacity Holding torque de energized Torque Length Width Height Turntable diameter Q 622 Miniature Rotation Stage MP128E Version 1 0 0 35 10 Technical Data I Preliminary Data Q 622 900 unit Tolerance Drive properties ft inertia drive Miscellaneous a ae Operating temperature range Cable length Connector Recommended controller Ask about custom designs Open loop The Q 622 stage series replaces the RPS 22 series The specifications were determined on a surface with an evenness of 2 um 10 1 2 Maximum Ratings The Q 622 rotation stage is designed for the following operating
25. ng of the Q 622 due to mounting on uneven surfaces Mounting the Q 622 on an uneven surface can warp the Q 622 Warping reduces the accuracy gt Mount the Q 622 on an even surface The recommended evenness of the surface is lt 2 um gt For applications with great temperature changes Only mount the Q 622 on surfaces that have the same or similar thermal expansion properties as the Q 622 INFORMATION The contact of the Q 622 with the protective earth conductor is made as follows gt Three counter sunk holes in the base body of the Q 622 gt Suitable conductive screws p 9 gt Protective earth conductor connected to the surface on which the Q 622 is mounted INFORMATION gt Observe the applicable standards for mounting the protective earth conductor Q 622 Miniature Rotation Stage MP128E Version 1 0 0 15 5 Installation PI Figure 4 Bottom side of the Q 622 Two of the four available locating holes can be used for alignment on a surface Figure 5 Top side of the Q 622 The rotation stage is mounted on a surface with three screws Prerequisites v You have read and understood the general notes on installation p 13 v The Q 622 is not connected to the drive electronics v You have provided a suitable surface for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 38 The surface must be connected to a protective earth conductor
26. ng pins into the selected locating holes on the bottom side of the Q 622 or in the moving platform of the Q 522 see figure above 2 Place the Q 622 on the Q 522 so that the locating pins are inserted into the corresponding locating holes on the other side 3 Mount the Q 622 on the Q 522 with three M2 screws a Manually turn the moving platform of the Q 622 until one of the three counter sunk holes in the base body is accessible b Introduce the screw into the counter sunk hole c Tighten the screw with a maximum torque of 35 Ncm d Make sure that the screw head does not protrude from the counter sunk hole e Repeat the steps a to d for the other two counter sunk holes in the base body of the Q 622 4 Check that the Q 622 fits on the Q 522 without backlash 5 4 Affixing the Load to the Q 622 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platform can damage the Q 622 gt For affixing type and mass of the load observe the maximum permissible forces according to the specifications p 35 gt Avoid tilting torques at the moving platform Q 622 Miniature Rotation Stage MP128E Version 1 0 0 19 5 Installation gt I NOTICE Screws that are too long The Q 622 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 38 gt Only use screws of the correct length for the r
27. nk hole c Tighten the screw with a maximum torque of 35 Nem d Make sure that the screw head does not protrude from the counter sunk hole e Repeat the steps a to d for the other two counter sunk holes in the base body of the Q 622 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 5 Check that the Q 622 fits on the surface without backlash Q 622 Miniature Rotation Stage MP128E Version 1 0 0 17 5 Installation I 5 3 Setting Up a Multi Axis System In a stacked X 8Z system the Q 622 can be mounted as a 0Z axis on a Q 522 X axis Figure 6 Mounting a Q 622 on a Q 522 Prerequisites v You have read and understood the general notes on installation p 13 v The stages are disconnected from the electronics v You have properly mounted the Q 522 stage on a surface and connected it to a protective earth conductor See user manual of the Q 522 v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories RPS22 5005 screw set from the scope of delivery of the Q 622 p 9 21 5 m6 x 3 dowel pins ISO 8734 18 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS 3 M2x5 socket head cap screws ISO 4762 Suitable screwdriver Setting up a multi axis system 1 Insert the two locati
28. ns to align the load a Insert the locating pins into the locating holes in the moving platform or the load b Place the load on the moving platform so that the locating pins are inserted into the corresponding locating holes on the other side 2 Affix the load using the screws Maximum torque 35 Ncm 3 Check that the load fits on the moving platform of the Q 622 without backlash 5 5 Connecting the Q 622 to the Drive Electronics INFORMATION The Q 622 and the drive electronics can be delivered as a pre configured system gt Ifa connection assignment is given on the labels of the Q 622 and or drive electronics observe this assignment when connecting the Q 622 Prerequisites v You have read and understood the general notes on installation p 13 v You have installed the E 870 drive electronics v You have read and understood the user manual of the drive electronics Q 622 Miniature Rotation Stage MP128E Version 1 0 0 21 5 Installation gt I v The drive electronics is not connected to the supply voltage Tools and accessories lf the drive electronics has a Mini DIN 4 socket models E 870 x1 E 870 xG 7202500042 0015 adapter cable included in the scope of delivery p 9 If the drive electronics has a connector strip model E 870 10 Suitable adapter from Sub D 15 f to the connector strip The pin assignment of the J10 connector strip 2x4 pin can be found in the E870T0001 Technical Note
29. quency for the step mode frequency for step for details see Starting Up the Rotation Stage mode p 26 and E870T0001 or E870T0002 Technical Note Warped base body gt Mount the Q 622 on an even surface The recommended evenness of the surface is 2 um Q 622 Miniature Rotation Stage MP128E Version 1 0 0 31 8 Troubleshooting P I Unfavorable load Observe the maximum torque when affixing the mounting load p 19 The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Unsuitable ambient Only operate the Q 622 in a clean environment conditions and within the permissible ambient conditions p 37 Wear of the drive Replace the Q 622 and make sure that the operating parameters of the electronics are adapted to the rotation stage Drive is blocked Carefully release the blockage by manually turning the moving platform back and forth Contact our customer service department p 33 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 33 32 Version 1 0 0 MP128E Q 622 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following infor
30. sion 1 0 0 MP128E Q 622 Miniature Rotation Stage 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter Mendod USG nenn ae nee ee ee nee 5 General Safety Instructions 0uss002200040000neennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnn 5 Organizational Measures uuussss0000nnnnnneeennnnnnnnnnnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 6 2 1 Intended Use The Q 622 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the Q 622 is intended for positioning adjusting and rotation of loads in a rotational axis at different velocities in interval operation The Q 622 uses a PIShift piezomotor as a drive When at rest the drive is self locking requires no current generates no heat and maintains its position The Q 622 can be mounted in any orientation The specifications of the Q 622 apply to horizontal mounting p 35 The Q 622 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment The Q 622 is not intended for continuous operation For further information on the operating conditions of the Q 622 see Technical Data p 35 The intended use of the Q 622 is only possible in combination with suitable drive electronics that provides the required operat
31. voltages can occur on the Q 622 in the case of malfunction or failure of the system If touch voltages exist touching the Q 622 can result in minor injuries from electric shock gt Connect the Q 622 to a protective earth conductor p 14 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the Q 622 to the protective earth conductor before Starting it up again Burning from hot surface The surface of the Q 622 and its vicinity can heat up during operation Touching the Q 622 and surrounding parts can result in minor injuries from burning gt Cool the Q 622 so that the temperature of its surface and surrounding parts does not exceed 65 C gt If sufficient cooling is not possible Make sure that the hot Q 622 and its Surrounding parts cannot be touched gt If sufficient cooling and protection against contact are not possible Mark the danger zone in accordance with the legal regulations Q 622 Miniature Rotation Stage MP128E Version 1 0 0 23 6 Start Up and Operation i I NOTICE Overheating during continuous operation The highest velocity is achieved at maximum operating frequency however the Q 622 can overheat during continuous operation as a result gt Observe the recommended operating time according to the operating frequency in step mode p 37
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