Eon-LT™ Monitor Manual 3.0.11
Contents
1. Activating Relay 1 and Relay 2 The Relay 1 and Relay 2 butions IT KE permit manual contral of the relays Exiting Eon LT Software Eon LT sofware can be ented from any screen Simpy press th Exit buton TERT aden prem Ed a chapter eres oe nar Status 6 Status Screen Navigate to the Status screen by selecting the Status buton n the Screen Selection tol bar The Status screen displays reaime information on the progress of the process Data for each sensor is represented heath layer frequency material rate fciness and percentage complete Important infomation such as source power and temperature is also displayed Health Layer Material Frequency Rate and Thickness Layer Te name ofthe layer being applied Material When the sensor is bing used during a deposition to apply material tho indicator wil fash rod informing the user that the sensor is being used to cont the selected source for the material being applied During tis process the material being appied is also displayed Frequency Sensor frequency Fate Rate of deposition Thickness Thickness of deposition ape to sensor Zero Sensor ie The Zara Sensor buttons aisi Senor zero comesponding sensor thickness to Temperatures TCI Te curent temperature of the sensor body which is connected through TCT T2 Axillary thermocouple conection Manually Zeroing individual Sensors Clck the Zaro Sensor button hat correspon2. Appendix B Quick Into Sereen Selection Tool Bar Adding a Process Renaming a Process Deleting a Process Edi the Name Rate and Thickness of a Process Adding a Layer to a Process Copy a Layer Re ordering the Layers Changing Properties of a Layer Layer Properties List Removing a Layer Deleting a Layer Changing the Matenal for a Layer Vertical Too Bar setings Appendix C Safety Handling amp Support About Eon TY LabVIEW Interface Software Updates inspection amp initial Setup Waranty Appendix D Tooling Factor Eon LT at a Glance 1 This guide dascrbas Eon LT monitor with temperature control 3rd generation and Eon LT software version 30 11 Eon LT Connectors Eon LT Front Eon LT Back WARNNG ka re GR Ra ad a UN bgm ana outputa Seo proper epoca D manai anan mem EI quet Mwn pa WARNING Oriy the provided power supply aho be used vi Eo LT tgs iano porary Wara pan y Accessories The Eor LT ships with a variety of accessories Power supply and cable Input 100 200 VAC 50 80Hz 2A Output 24V 375A DON Max GT External oscillator optional Replaces the Eon LT intemal oscilator Phoenix EonT quick reference guide Instructs user in quickly assembling and inlegrating Eon LT into existing system Cher EandT ats Glance Getting Started 2 Eon LT System As The folowing guide wil describe in detai haw to integrate the Eor LT mo
3. Restore Defaults pa The Restore Defaults bution A reinstates al of the setings to defaut values This command is often used f ne curent setings are producing undesired Period Control The Period conto tuner s used to adjust data collection frequency in increments of 0 1 seconde The period ange s 100 milseconde to 1 second For precision adjustment moving the slider LE produces an indicator showing the carent value 15 ony ors 00 sors toe Log fles wil stil be recording in kl angstoms Relay Control Tho Relay Control panel featuras two relays with ide stings Manual When Manual is selected the relay remains in its present state T close um on ar apen tarn of the relay at wil Sensor Zeroing Zero Sensor 2 ra va m za vam ru ras Before Log Pressing Log button zeros the sensor Vertical Tool Bar Using the Vertical Tool Bar Lika the Screen Section toi bar he vertical tol bar is always avaiable Use the erica tol bar to start a deposition abort a process record a og zero the sensors activate the relays or ext Eor LT software Logging Eon LT Status on LT status can be logged to a manitor log from any screen Passing tha Log bution savas a monitor log to the monitor log save folder PUBIKIEON LOGSIMONITORING aa Zeroing the Sensors Tha sensors can be zeroed from any screen Pressing the Zero Al Thickness button zeros Sensor 1 and Sensor2 at ance
4. bings up the Backup screen On the Backup screen cick on the item you wish to save Restoring backed up settings Selecting tho Restore buton 99 apens the Restore screen The user can now restore depositon processes heating cycles and general settings by clicking on the appropriate buto Note The restoration process wil overwrite any ofthe current settings you restore Sensor Alerts M The Sensor Alerts A seting providas the opton of enabling or disabling the crystal aura alerts which occur when the crystal frequency aris out ofthe 5 MH2 6 MHz range Although itis recommended that the sensor alerts generally remain enabled the user can disable the notifications in the instanoe that the crystal being used In a testing we tha end of th logs recorded by Eon LT sofware peclalzod name to Note if a log recording is already underway he logging must be reslanied fr the new namato taka fect Note Naming restrictions buat into Micrasoft Windows wil prevent log recording ihe folowing characters ara used 213 Eon LT software raises a prompt 1o wam the User that the name is invalid Log les with incorect characters in the name wil not sava Removing the invalid character makes the warning disappear Opening saved lg files Selecting the Open Log Fol TUR opens the foidar to which the logs are currently being saved By default ii location is Public Dacuments EON_LOGS
5. You can then manualy enter your custom Density and Z Factor settings in the Layer Properties List Note als that whenever you manual change Density and Z Factor settings to an unisied material he sofware wil automaticaly class the material as Gusto Layer Properties Defined The folowing i a ato setings that deines the parameters of the deposition All setings must be set correct forthe software to function propery Materials The material being appSed during ihe deposition process This entry tums Custom if the Density or Z Factor is modified by the user In ardar to prevent mismatch Density The density of the selected material being applied lt ZFactor Acoust impedance factor which is used to compensate for dense materials and is predefined based on the selected material Tooting 4 The geometric relationship between the substrate and the positioning of the sensor Chaptara Program Co w Settings Settings Screen Ck the Settings button inthe Sereen Selection tol bar to access the Setings screen Use tabs to select settings operations The Settings screen enables user ta perform numerous tasks such as backing up and restoring settings opening the log folder adjusting period and managing relays and sensor zeroing settings Backup 8 Restore Tha Backup and Restore commands enable the usar io sav heating cycles and general setings In Eon LT sofware deposition processes Selecting Backup EMOS
6. contain the same password ick OK to save new Sereen Le screen settings or Cancel to retum t original IMPORTANT Leaving password folds empty DOES NOT disable the Sereen Lock Attempting i access a locked screen wil continue to produce a passport prompt Leave field blank and cick OK to proceed to the Sereen Lock menu To disable the Screen Lock uni any locked screens Ww Coking OK saves screen lack and password settings Resetting Password To raset the Sean Lock controls password click on the Screen Lock button IB and enter the folowing code into password prompt 45647kyawx942721ysha When the Screen Lock screen appears enter a new password into the password ids Troubleshooting 10 Specifications 11 Process Display CE TIT 5001585900001 Hwn Temas rer C Communications ese ear Inputs and Outputs ETO One Hal Dupax 2 Ty K Comers Chapt Specie a Phoenix Eon LT System A i i Phoenix Eon LT System Configuration Rendering Ilustrates basie connactens of Phoenix Ean LT system wo weed Probe Syriam x Quick Info B j Screen Selection Tool Bar The Screen Selection Tool Bar is the collection of butions used to access the various Screens in which th user wil be working The butions consist of Status Graph Program and Settings Adding a process 1 Press the Program button to enter the programming scree
7. ofthe Name and selecting it from the ist of layers 5 Enter the desired Rate in s and the Thickness in KA Cick OK Note The name cannot be left blank Typing the name of a layer that is already created wil use that layer settings Copy Layer 1 Click the Program button to entar Iha Program sereen 2 Select an existing layer and press Copy to produce a copy in the is Re Ordering the layers Tre and drag the layer to the desired location in iho st 2 Layers aro executed in numerical order from tap to bottom Changing properties of a layer Press the Program buton onthe bottom ofthe seren Selec he process in the Process List containing the layer that requires edhing From the Process Layers list select the layar to be edid Double click on the Property to be edited In he naw window that opens enter the new value for the property Press OK Note If an incorrect value is entered for the property selected a notiication window wil appear displaying the acceptable values for that propery spend ck Commands p Layer property list Materials The material being applied duing the depositon process This entry tums to Custom ih Density or Z Factor is moded by he user Density glem 3 The density oe selected material bing appted o ZFactor Acoustic impadance factor which s used to compensate for dense materials and is predefined based on the selected mater Tooling x4 me geometric relationship between the s
8. to the Program 2 Conto screen to egin FC EN creating your processes oe Chapter 3 Kamara Chapar Setong sissa vrs am sien naal simply update eaves when instaling sofware Usa only the provided USB cable Ensure that the software has boen fly installed before connecting Eon LT to your PC Reboot PC folowing Eor LT sofware installation Program Control 3 Program Control Screen Ce the Program button in the Contro Menu to access the Program screen With this screen you wil be able to create a new process edit or delete an existing process as well as add or ramova layers and layer properties i new process Selecting the New button located below the Process List lows you to create and name a naw process hepar Programs Coe Delete a process Pressing delete wil permanenty delts a process Once deleted a process is only recoverable it was backed up prior Renaming a process Doubi cick a process in tna Process Layers List Layers List Open the Layers List ick a process name Layers List displays the current layer sociated with a process Set the rate thickness name and onder of the layers Add a layer Cick a process name Select a layer Singe cik Edit layer name Double click a layer Modify the name rate andlar thickness Click Copy Layer Select an existing layar and press Copy t produce a copy In the ist Change order of layers On th La
9. EON LT pc based monitor user guide for vers 3 0 11 software CIGOLNA a a P 15 E 7 7 7 E E E m a a a a a a Contents Chapter 1 Eon T ata Glance Eon LT Connectors Accessories Chapter 2 Getting Started Eon LT System Assembly Chapter 3 Program Control Program Contro Sereen Process List Layer List Layer Properties List Layer Propertias Defined Chapter 4 Settings Settings Screen Backup amp Restore Sensor Alerts kog Restore Defaults Period Cont Relay Contro Sensor Zeroing Chapter 5 Vertical Tool Bar Aborting a Process Logging Eon LT Status Zeroing tho Sensors Acivaing Relay 1 and Relay 2 Exiting EanLT Sofware a 24 25 25 25 2 ar z 2 2 28 2 2 Contents Chapter 6 Status Status Sereen Heath Layer Material Frequency Rate and Thickness Zero Sensor Temperatures ManualyZering Individual Sensors Chapter 7 Green Status Bar Status Indicators and Remote Process Control Chapter 8 Graphs Graph Screen Adjusting Y Values Graphs Color Key Chapter 9 Screen Lock Fassword Protect Eon LT Screens Screen Lock Button Locking a Sereen Seting a Naw Password Resetting the Password Chapter 10 Troubleshooting Chapter 11 Specifications Process Display Commuricatons Inputs and Outputs SESSSSESSSESRSRER RE a a2 2 a2 2 2 a a Contents Appendix A Phoenix Eon LT System Phoanis Eon LT System Configuration
10. Eon LTO Wit the abilty to sensa deposi on and temperature with high precision the Ecr LT thin fim menor is one of the newest advancements in Thin Fim depostion monitors The Eon LT provides features that help improve measurement accuracy for bettar process control LabVIEWS Interface The Eor LT offers a simple LabVIEW interface that provides an operating environment that is inultve eficient and impressive The Eor LT is easy to set up right out ofthe box Software Updates The Eor LT interface software can be upgraded on sito to provide sofware improvements There wil be noificatons when these updates become valable Inspection amp intl Setup Examine Eon LT for any signs of physical damage Also make sure th the tamper evident labets are intact In order to ensure safe comect operation of your Eon LT pleas falow the stap by stap instructions presented in the Eon LT Quick Sart guide included with your product Warranty or LT i warranted io the o ginal purchaser to be free of any manufacturing related defects far one year rom the date of purchase Colnalec reserves the right to repair or replace th unit afiar inspection Agpenaik Sat Handling Suppo B Contact Colnatec Support 51W Guadalupe Road Sule Zi Gibert AZ 85233 80 638 1440 supporcolnalec com spend ise Handling amp Support Tooling Factor D Source Index ewin Retay and Relay 22 Asang laya a premis 38 Agang a
11. ar 2 Select Logs tab 2 Enter text to append a log flename Note Using the characters 5 wil cause the fename to be invad and can prevent logs fram being recorded Restore Default Settings 1 2 a Press the Settings buton on the Screen Selection tool bar Press the Restore Defaults button on the setngs sereen A prompt wil appear waring the user that selecting OK wil retum all settings toa defaut state Force Relays to shutoff when a process is started 1 Press the Setings bution on the Screen Selection tol bar 2 Inthe Relay Control section check Start Shut for the desired relay you wish to shuto on process start Set when relays activate during deposition process 1 2 Press the Settings buton on the Screen Selection tol bar Inthe Relay Control section select the round radio button associated with the step during the deposition process when the relay shouid activate Manual The relays wil not activate during the depositon process automatically but can stil be controlled by the Relay bution Start At the start of each layermatealin the process the relay wil activate and will deactivate at 1e end of each material Predeposit The relay wi activate during the predeposit phase of the depositan process for sach layerimaterial The relay wil then shutoff at tne end of the deposition process Auto Dapostion The relay wil activate during the dwell phase just before the PID activation This allo
12. ds to the sensor to be zeroed Chapt siss Green Status Bar Status Indicators and Remote Process Control Afizd menu avatabla rom any screen the Green Status bar servas a vanoly of display ang control functions E n Status Indicator Displays process Eon LT is curently performing Information updates in realtime as Eon LT performs each task Time Indicator Displays the runtime of the curent active process The Time Indicator also retains the run time of ina last completed or aborted process Remoto Process Control When a process is selected the Status screen will display tha frst material to run on each sensor If no materials are selected to ba measured by ne of the sensors the sensor wil display None in the Layer and Material indicator man a Graphs Graph Screen To view tho Graphs screen cick on Graphs in the Screen Selection tol bar The Graphs screen features ina graphs for frequency temperature rate power and thickness Unike rea ia data daa in graph orm can provide the user with a comprehensive historical perspective on a developing deposition process Adjusting Min Max Range of Graphs ick anywhere on a graph to produce the range adjustment window Graphs The graphs provide a visual representation of data gathered by Eon LT The folowing data is presented by the graphs Frequency Displays frequency over tim in Hz Rate Displays the rate of the material application over tma i
13. n Press the New bution located beneath the Process List Enter the desired name for the process Select the process type Sequential or Codepostton Cix OK This process is now selectable through the Process List or the Remote Process Control panel on the Green Status bar Note in order for the program to update the source power the user must entar a new Value and then cick away fram the Source Power indicator Renaming a process 1 Press the Program button on the Screen Selection tool bar 2 Double click the procoss you wish to rename 3 In the new window enter the new name for the proces Field must not be left blank Name must not already exist 4 Ciek OK Deleting a Process 1 Pres the Program button in the horizontal oo bar 2 On the Process List select the Process to be delete 3 Press the delete kay rec beneath he Process List Edit the namelratelthickness of a process 1 lick the Program button to enter the Program screen 2 Cick he process that has the layer to edit 3 Double cick he layer to be ediad 4 Modify the name rata andor thickness 5 Chek OK to save changes Adding a layer to a process 1 Press the Program button to access the Program screen 2 Select he process from the process list This wil open the Process Layers ist 2 Press the New buton under the Process Layers st Enter a new name to create a new layer or select a layer that has already baen created by clicking th arrow on right
14. n A s Thickness Displays the thickness of material application over time in IKA Temperature Displays the temperature over time in PC Power Displays the power of the sources and heater over time in percentages in c Color Key The Color Key ilaya th color values representing the various devices being dopicad on each graph Chapt Gee a Screen Lock 9 Password Protect Eon LT Screens The Eon LT Screen Lock enables the user ta lack any sorsen that appears on the Screen Selecton tool bar Locking a screen helps ensure that the contrals and settings an each sereen remain secure and under password protection Screen Lock Button 8 To access the Screen Lock controls cick on the Sereen Lock buton is already in place the password prompt appears Ia password Entering the correct password wil ext to he Sereen Lock screen Ifa password is NOT already in place the Screen Lock screen appears Use these controls to lock and unlock screens and change the Screen Lock password 9 Somme Locking a Screen On the Screen Lock seren select th screens to ba locked Selecting a sereen ight Lee SoS T ick OK to engage Screen Lock protection When clicked on the protected screens wal now generate a password prompt Setting a New Password Tha user may keep an existing password or entar a now password using the password controls In order for a new password to be accepted the Password and Re Type Password folds must
15. nitor into a basic QCM configuration The QCM depicted below is the Coinalec Phoenix sensar head featuring temperature monitoring technology See Appendix A for connection map of a fly assembled Phoenix Eon LT system 4 Connecting to acm Connect SMA Coaxial Cab wacu a Spin cable in place using cable shaft unt resistance is z Tett Twisting cable sha past point of resistance may damage cable Rol fngerip over connector to tighten 2 Connecting to EonaT Connect QCM to Eon LT Connect BNC extension catie io SMA which than connects to the BNC adaptar cabia using the provided BNC unin Then connect the other erd ofthe BNC extension cable to the Eor LT coaxial input eihar sensor 1 or 2 Connecting Eon LT to PC 1 Install Eon LT Software onto PC Insert the accompanying i Eon LT software CD into dic drive Follow prompts to instal sofware onto PC 2 RS 232to Eon LT Plug RS 232 connector into female serial port on rear panel Tighten integrated 2 RS 232 cable to USB Adapter Plug the oher end ofthe RS 232 cable into the USB 10 R5 232 adapter Tighten integrated screws Chapt Seting Ste 4 Plug USBAo RS 232 Adapter into PC Plug USB and ofthe USB 1o 6 232 adaptor into PC 5 Connect Power to Eon um Plug Eon LT power adapterini AC outst Than plug DC connector into the on Start Eon LT Software Star Eon LT software and loading navigate
16. ol bar Note Eon LT status can be logged to a monitor log from any screen Pressing the Log utton saves a monitor lg othe monitor og save folder PubicDacumantsieon logaimonitoing Zeroing Both Sensors Manually 7 Press the Zero All Thickness buton on the Sereen Selection ool bar Activating Relays Manually 1 The relays can bo activated from any sereen 2 On the Seen Selection ool bar toggie the Relay button to activate the sayo Exiting Eon LT Software LET software can ba exited from any sereen 2 Press the Ext Button 3 When prompted press Exit again Settings Note Al sings are automaticaly updated and saved as soon as tho are changed Adjusting Eon LT period readings 1 Prass the Selings button on the Screen Selection tol bar 2 Select General tab 2 Chek and drag tha marker on iha Period control to adjust the period time in increments of 100m Changing Thickness Units KA A 1 Press the Settings buton on Screen Selection col bar 2 Select General iab 3 Select the desired thickness measurement units DisablefEnable Sensor Failure Alerts 1 Press the Settings bution on the Screen Selection tol ba 2 Select Alerts tab 3 Check or uncheck the checkmark box of the corresponding sensor to enable or disable failure alerts Checked Shows sensor failure alerts 3 Unchecked Hides sensor faure alerts Append a Log Name to Log fles 1 Press the Settings button on the Screen Selection tol b
17. peme 25 37 str Vien 27 pen gaen 1 28 ranges ba rii rain 37 Coupon 2 pus Dupay 5 20 20 UT 07 89 V011 12 43 3415 18 47 18 19 20 21 22 2 24 25 20 21 222 98 3 32 29 34 38 38 3 0 38 40 81 42 A4 COET Frepuney 922242128 Index p Crh 2115 pasyang Graph seen 27 ingatang Capas 30 layer 13 14 152122 38 37 40 Layer Properes Defn 18 Layer rerio Lit 13 15 18 Ling Semen 30 Log 0920212820 40 Lo fes 19 38 Legi Ee LT San 2t Mars 15 YR 22 26 28 20 38 37 40 Index Power poy 7 pn H mew 52 22 30 30 40 Res Conr 20 40 Saang a Nen Passer 30 Sanga 17 10 10 20 35 30 40 Sito pins 2 Saws NG 2 23 2626 26 a830 Supp 41 42 43 Systm Congaaton 36 Index Pression LT 6 834 risers 4 23 2 27 2 34 3940 Treg 32 p Waray 4 42 Copyright 2014 Coinatec AN information contained within is Technical manual and accompanying pages are copyright of Coal All rights reserved Itis a breach of copyright if this echnical manual is copied distribute or reproduced in whole or part using any means whatsoever wihout the prior writen approval of Coinatec Cohataz gives no condition or waranty expressed or implied atout be finess of this technical manual or accompanying hardware product Conatec reserves the ight to make changes to this technical manual or accompanying hardware or design without notice to any Person or company Colnatec shall not be labie for any indirec
18. t special consequential or incidental damages esuting rom the use ofthis technical manual or he accompanying hardware or design whether caused tough December 2014 Colnatec s negligence or otherwise Ver 30 11
19. ubetate and the posiioing of ha sensor Removing a Layer 1 Press he Program button in the Screen Selection tol bar 2 From the process Ist select the Process win the layer that needs io be removed 3 Inthe Process Layers et select the layer that needs to be removed 4 Pross Remove directly beneath the Process Layers ist Note Removing the layer only removes the layer from the Process Layars ist The layer con be re added to the list by pressing New and selecting the layer from the dropdown menu See Adding a Process on the frst page of tis append Deleting a Layer 7 Press the Program bution on Screen Selection tool bar to enter the Program 2 Select a process that contains the layer to be deleted 3 After selecting the Layer from the Process Layers ist press Permamentty Delete Layer to delete the layer Waring This acton wal permanent delete the layer om ALL processes The layer wil also be deleted rom the ist of layers Thera is no way to recover a layar once itis deleted Changing the material for a layer 1 In the Program screen select the layer wit he material ta ba changed 2 Doubis cck on the Material row 3 Inthe new window select a new materia 4 Click OK Note When ating Density or Z Factor the material value defaut to Custom to prevent cantradictons from occuring between the material and the material values Vertical tool bar Logging the status ofthe Eon LT 1 Pros the Log bution on the vertical to
20. ws the dwell me to occur between shutters release and PID activation Setting when Eon LT automatically zeros sensor thickness 1 2 Press the Settings buton on the Screen Selection tol bar Inthe Sensor Zeroing menu checkmark each seting associated withthe sensor nat is to have its thickness automaticaly zeroed 7 Before Log Eon LT zeros thickness when Lag buon is pressed 7o Start Pressed Eon LT zeros thickness when Star buton la pressed o start a new deposito Belore Layer Eon LT zeros thickness engages during the process Belore PID Eor LT zeros thiciness each time a naw ayerimatrial activates the PID ich time a new layerimaterial Safety Handling amp Support C i WARNING AI elecrial components ara lo ba considered extremely dangerous if tampered within any way Cohatec is nat ible for any injury resulting rom product misuse modifeation or disassembly WARRANTY LABEL Ife warranty label has boon tampered wih VOID wil appear where the warranty label was originally placed If tis is visible t he me of aal tie important that you contact Conatec immediately aer receiving the product Aependu Sat Handling A Support D anne YOUR NEW con r FOR ANY signs OF PHYSICAL DAMAGE ALSO ENSURE THAT THE TAMPER EVIDENT LABELS ARE INTACT Balore sping ynu Eon Ti was crat ard eto ty Conaoc ome gn gly aca Uh sian t Kana b ipa o ace ener Pa yn pint ag ned ngen i ue va About
21. yers List click and hod a layer drag the layer up or dw the ist and release the layer where desired Remove Layer On the Layers List ck and hold a layar drag the layer up or down the ist and release the layer where desired Ghwglrs Program Coe u Create new ayer Select New buton located below the Layers List You can also use an existing layer by typing inthe layer name ar pressing the dropdown arrow to reveal a ist of cumentiy avaliable layers Layer Properties List Entar or change values for layers The Layar Property Value window allows you to enter or change the value of a layar property Note Material Source and Sensor operate fren than the other tems sted on the Layer Properties Ls Open Layer Property Value window Double ick a layer property at any time even during a process run Enter a value and cick OK or Cancel Permanent remove layer Use the Permanently Remove Layer button to delete a selected layer A deleted layer is removed from ALL processes including those not selected Once deleted a layer is only recoverable if it was backed up pror hepar Pn cent Select a material Ser down and click onthe Material ow to open the Materials List Select the applicable material and double ciick a material or ck OK The corract density and Z Facio is automaticaly set uminum Guru Fluoride urn Nie mr Onide Ifthe material being applied in your process is unlisted select Custom and cick OK
Download Pdf Manuals
Related Search