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1. EnergyMax PC File Settings View Help j 0438B10R Start Data Collection Tutorial Synchronization Procedure Taking a Synchronized A B Ratiometric Reading Sensor cable EnergyMax USB System Components USB cable connector Operation EnergyMax USB and EnergyMax RS sensors can be synchronized for greater accuracy when performing A B ratiometry measure ments The purpose of synchronization mode is to ensure that data being reported by multiple sensors is correlated sequentially when triggered by a common triggering event To accomplish synchronization EnergyMax USB and RS sensors are designed with the following features The sensor units are stackable and automatically activate a common trigger bus when stacked together The electronics module on the bottom of the module stack takes control of the trigger bus Each measurement made during a trigger event is sequentially numbered This procedure explains how to connect two EnergyMax USB or EnergyMax RS sensors to your PC and take a synchronized A B ratiometric reading using the EnergyMax PC software Follow all laser safety procedures The lasers must be switched OFF or shuttered before running the procedure presented in this section 1 Connect the system components the following figure shows system components for both EnergyMax USB and Ener gyMax RS sensors select the one that s appropriate for your system
2. EnergyMax RS System Components Sensor cable Meterless sensor power cable connector Power supply cable connector RS 232 cable connector 4 to 20 VDC power supply 27 EnergyMax USB RS User Manual Start the EnergyMax PC application EnergyMax RS sensors only Click Add a RS 232 Serial Port on the Setting dropdown menu EnergyMax RS sensors only On the Add Serial Sensor menu select the Com Port and Baud Rate parameters and then click the OK button Select the highest baud rate supported by the computer File Settings View Help Sel Resolution gt Se Trigger gt Log File Format gt Turbo Higher Data rate Dual Sensor Synchronization Set Y Axis Add a RS 232 Serial Port Note This COM port willbe queried as a Coherent sensor and ifthe query is unsuccessful it will not be added to the list To remove this sensor from the list please restart the EnergyMax program Before continuing this procedure make sure the sensors are not stacked ww Steps 5 through 9 verify that range and trigger threshold are independently working for each sensor prior to synchronizing Select the sensor serial number from the Select Sensor dropdown menu In the example at right the selected sensor 15 0438B 10R Press the Start Data Collection button and then turn ON the laser 28 irneroy Max PC File Settings View Help
3. Error queuing occurs as explicitly defined elsewhere in this section If handshaking is OFF e All command and query responses will behave as explicitly defined elsewhere in this section Baud Rate Selects the transmit and receive baud rates together when the device has an RS 232 serial host port The command has no effect when the device has a USB host port The query returns the currently selected baud rate Command SYSTem COMMunicate SERial BAUD DEFault 9600 19200 38400 57600 115200 Default 9600 Query SYSTem COMMunicate SERial BAUD Reply 9600 19200 38400 57600 115200 If SCPI message handshaking is enabled the new baud rate takes effect after the handshake is transmitted If SCPI message hand shaking is disabled the new baud rate takes effect immediately Programming and system errors occasionally occur while testing or debugging remote programs and during measurement Error strings follow the SCPI Standard for error record definition lt error code gt lt quoted error string gt The host queries for errors in two steps 1 The host queries for the number of error records available N 2 The host queries times for the error records Errors are stacked up to 20 deep In the case of error overflow the last error in the error list is an indication of error overflow Possible error strings are shown in Table 12 below 42 Host Interface Table 12 Error Codes and Description Strings Unrec
4. Units can share triggers to provide synchronized measure ments for applications such as ratiometry Software Features Sensor Overview Select Sensor UB1 0438811 Energy 31 7 nJ Wavelength nm 532 Reset ix 1 1 00 Mean 32 1nJ Min 313nJ Std Dev 307 pJ Max 327nJ Dose Rep Rate 2 15uJ Count 167 File Settings View Help E Smooth 100ms Fluence Area 1 00 KHz Description TX COHERENT Trace 1 Energy Sensor 1 317nJ Sensor 2 900nJ Math 1 06e 07 119 158 166 Samples OF Mean Setup _ Turbo Active Display Inactive Energy Measurement Range Trigger Level 0 20 Low 1 901E Gain Correction Decimation OFF 1 000 Collection Mode Interval 6 0 10 4 L OFF Log Datato Fie Sample Collection 1 Fixed Continuous Time interval Streaming Sample Size 100 EnergyMax PC applications software is supplied free with every EnergyMax sensor and includes the following features Trending tuning histogram at data rate up to 1 kHz Statistics mean minimum maximum and standard deviation dose fluence and missed pulses e Ability to log data to a file at up to 10 kHz in Turbo mode Operate multiple devices simultaneously and perform synchronized ratiometry A B analysis Trend and log results to file For system integration and for implementations involving customer written softw
5. 7 5 cm on all sides the top and the bottom Seal the shipping carton with shipping tape or an industrial stapler Ship the product to Coherent Inc 27650 SW 95th Ave Wilsonville OR 97070 Attn RMA add the RMA number you received from Coherent Customer Service 62 Frequently Asked Questions APPENDIX A FREQUENTLY ASKED QUESTIONS This appendix provides answers to common questions regarding Coherent EnergyMax sensors Q What if I exceed the average power specification A Use of a sensor beyond its average power specification will result in increased error and can result in damage to the sensor if the temperature gets too hot Optional EnergyMax heat sinks are available to increase the average power specification of certain sensors for more information about heat sinks trefer to Increasing Average Power With Heat Sinks p 13 Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heat sink may cause permanent damage to the sensor Q What if I exceed the repetition rate specification A Use of EnergyMax sensors beyond the repetition rate spec ification will result in additional measurement error Increased repetition rate also increases the average power so do not apply more average power than can be handled by the sensor Q What if I exceed the maximum energy specification A EnergyMax sensors contain an active circuit
6. 65 MaxBlack 6 MaxBlack with diffusers 8 MaxUV 9 Quantum 10 Environmental regulations 1 RoHS compliance 1 Waste Electrical and Electronic Equipment WEEE 2002 1 Extended warranty 62 F Frequently asked questions 65 H Heat sinks 13 Host interface 39 I Increasing average power with heat sinks 13 Interface Host 39 150 9001 2000 59 Item part numbers 6 L Label Waste Electrical and Electronic Equipment WEEE 2002 1 LED status indicators Limited warranty 61 Linearity 16 M MaxBlack coating 6 MaxBlack EnergyMax sensors 6 MaxBlack EnergyMax sensors with diffusers 8 Maximum Average power 6 Energy 65 Energy density 6 Pulse width 6 Repetition rate 6 MaxUV EnergyMax sensors 9 Measurement linearity 16 Average power 16 Energy 16 Pulse width 17 Repetition rate Messages Received by the sensor Sent by the sensor 39 21 29 16 39 EnergyMax USB RS User Manual N NIST traceability 59 Noise equivalent energy 6 O Obtaining service 63 Operating the software Optical calibration Method 60 Ratiometric method 61 Optical calibration method Calibration fundamentals 60 Calibration verification 61 EnergyMax NIST traceable optical calibration 60 Recertify once a year 60 21 P Post and stand assembly viii Power measurements taking 26 Preface vii Product overview Diffuse metallic EnergyMax sensors 7 MaxBlack EnergyMax sensors 6 MaxBlack EnergyMax sensors with diffusers 8 MaxUV EnergyMax sensors 9 Quantum E
7. Calibration VeriticatOt cst rapt etc 59 Limited see tare seca d S Un UN A 59 Extended Macnee Qa Seo eta tre Aaa aie Anish aan 60 Warranty Limitations 60 Obtaining Services bis ide cue 61 Product Shipping InstructiongS Nt 62 OO SO ON Ud b cst D D cos Table of Contents LisT OF TABLES MaxBlack EnergyMax Sensor Specifications Ne 6 Diffuse Metallic EnergyMax Sensor Specifications Ne 7 MaxBlack EnergyMax Sensor With Diffusers Specifications sss 8 MaxUV EnergyMax Sensor Specifications pe 9 Quantum EnergyMax Sensor Specifications Ne 11 Aver ge Power 13 Avaliable Heat STHKS 14 EnergyMax Damage Thresholds Capabilities pp 15 Wavelength Compensation Accuracy Nt 18 EnergyMax USB RS LED Light ConditionS pt 21 Host Command Quick Reference et 38 Error Codes and Description Strings Nt 43 Measurement Data Record Formats Statistics Mode 51 Measurement Data Record Formats Statistics Mode 51 51 Operational Parameters 41 ce vero e reet ten 54 Coherent Service eq xtd amete gto ua BARN ad TUER satan RS ARN RR RR NS IRR 61 LisT OF FIGURES Postand Stand
8. Disconnect All Rescan v 0438B10R 0388B10R Start Data Colle EnergyMax PC File Settings View Help Start Data Collection Operation 7 Select the appropriate Measurement Range High or Low and adjust the Trigger Level to achieve a good measurement For information on setting the trigger level refer to 100 f Steaming Internal Triggering 23 Measurement Range High 1 152E 06 Decimation 1 8 Turn OFF the laser and verify the sensor is not triggering on baseline noise If it is triggering on baseline noise increase the trigger level 9 Repeat steps 5 through 8 for the second sensor and then continue to step 10 below 10 Open the Select Sensor dropdown menu and select the faster sensor that is the sensor with the fastest higher repetition rate specification 11 Stack the sensors together with the faster sensor positioned on the bottom of the stack The faster sensor must be on the bottom of the stack to prop erly trigger Since the faster sensor obtains a trigger first it is important that this faster trigger be used to control the trigger bus Slower sensor mn top Faster sensor P on bottom 12 Select Dual Sensor Synchronization ile Settings View Ip from the Setting dropdown menu Sel Resolution 4 Se Trigger Calculated Ratio Data in Data Log Turbo Higher Data rate Set Y Axis Ad
9. nm 45 EnergyMax USB RS User Manual Gain Compensation Enable Disable State Enables or disables gain compensation which is committed to persistent storage when it is changed Command CONFigure GAIN COMPensation DEFault OFF ON Default OFF Query CONFigure GAIN COMPensation Reply OFFJON Factor Sets the gain compensation factor which is committed to persistent storage when it is changed The gain compensation factor has no units Error 101 is raised if the gain compensation factor is less than 0 001 or greater than 100 000 0 Command CONFigure GAIN FACTor DEFault 0 001 100000 0 gt Default 1 0 Query CONFigure GAIN FACTor Reply lt gain compensation factor gt Range Select Selects the meter measurement range expressed in Joules Ener gyMax USB and RS sensors have two energy ranges Maximum or high range and Minimum or low range Range selection can be accomplished in two ways 1 Express the maximum expected energy measurement in Joules and the sensor firmware will select the best range 2 Select either the maximum or minimum range from within the EnergyMax PC software The measurement range is selected by expressing the maximum expected measurement which must be greater than 0 0 The granted full scale range value is the lowest available full scale range that can measure the maximum expected measurement For example if the list of available ranges is 3 mJ and 30 mJ the m
10. plot the spectral characteristics of each sensor Figure 6 plots the percent absorption of each coating by wavelength Figure 7 plots also by wavelength the spectral sensitivity of sensors that contain diffusers The spectral sensitivity is a function of the transmission of the optic and the absorption of the coating and is normalized to the calibration wavelength 0 1 1 10 20 Wavelength um Figure 6 Spectral Absorption of EnergyMax Sensor Coatings 19 EnergyMax USB RS User Manual 1 8 1 6 1 4 1 2 0 48 0 8 0 6 0 4 0 2 Sensitivity Normalized to Calibration Wavelength 0 1 1 Wavelength um The J 50MB IR is calibrated at both 1064 and 2940 nm Figure 7 Spectral Sensitivity of EnergyMax Sensors With Diffusers 20 Operation OPERATION In this section LED status indicator this page Powering EnergyMax RS sensors page 22 Pyroelectric Watts mode page 22 Triggering page 23 Internal Triggering mode page 23 Setting the wavelength page 24 Tutorial Measuring energy With a EnergyMax sensor page 25 Tutorial Synchronization page 27 Tutorial Turbo mode page 32 Using the software page 34 LED Status A blue LED light is
11. AR Sets the meter measurement mode type Q aN Q ONFigure MEASure STATistics Sets the statistics processing mode Q aN ONFigure MEASure STATistics Queries the statistics processing mode Q aN ONFigure DECimation Sets the pulse decimation rate gt n ONFigure DECimation Queries the pulse decimation rate Q AR n ONFigure DIA Meter Sets the aperture diameter Q AR ONFigure DIAMeter Queries the aperture diameter N Figure WAV Elength NFigure WAV Elength NFigure GAIN COMPensation ONFigure GAIN COMPensation Queries the gain compensation setting Sets the current wavelength gt Queries the current wavelength iN alala gt CN Enables or disables gain compensation Q IN ON Q ONFigure GAIN FACTor Sets the gain compensation factor Q AB CN ONFigure GAIN FACTor Queries current gain compensation factor Q EN CN ONFigure RANGe SELect Selects the meter measurement range gt ON Q ONFigure RANGe SELect Queries the meter measurement range Statistics Mode Control gt 38 Host Interface Table 11 Host Command Quick Reference Sheet 2 of 2 Sets the statistics batch size Queries the statistics batch size Selects the action to be taken at the end of a statistical batch Queries the action to be taken at the end of a statistical batch Terminates the current statistical batch and start a new one
12. After calibration each sensor is tested to verify the calibration The result of this verification is presented on the second page Each sensor contains two gain stages Each stage is calibrated and tested in this manner Coherent Inc the warrants its laser power and energy meters and sensors products Products to the original purchaser the Customer that the product is free from defects in materials and workmanship and complies with all specifications active at the time of purchase for a period of twelve 12 months Coherent Inc will at its option repair or replace any product or component found to be defective during the warranty period This warranty applies only to the original purchaser and is not transfer able 59 EnergyMax USB RS User Manual Extended Warranty Warranty Limitations Coherent Inc the Company offers original purchasers the purchasing laser power and energy meters and sensors products Products an extended twelve 12 month warranty program which includes all parts and labor In order to qualify for this warranty a Customer must return the Product to the Company for recalibration and recertification The Company will recertify the Product provide software upgrades and perform any needed repairs and recalibrate the Product for a fixed service fee as estab lished by the Company from time to time and in effect at the time of ser
13. Assen LY s ceo eo em App te eq e duet i isa utut de cu Waste Electrical and Electronic Equipment Label sees 1 Spectral Sensitivity Curves for Quantum EnergyMax Sensor sss 10 Pytoelecttic Current and Voltage Re5pOonse u e eed tec ise pode Ned renda ge E 15 Photo Sensitivity Temperature Characteristics pt 17 Spectral Absorption of EnergyMax Sensor Coatings pp 19 Spectral Sensitivity of EnergyMax Sensors With Diffusers pp 20 Averdge Power DISBEAtll Ja dies Asians reperies been esee hades er pore TRUCO ev edi edens aes 22 Internal Trigger ixi re eene i ans 24 External Trigger Input Circuitry 35 EnergyMax USB Standard Cable Ne 30 Ratiometric Method of Optical Calibration pp 59 EnergyMax USB RS User Manual vi Preface U S Export Control Laws Compliance Publication Updates Symbols Used in This Document Preface This manual contains user information for the Coherent EnergyMax meterless energy sensors For complete software installation instructions refer to the EnergyMax USB RS Software Installation and Quick Start Guide 1186241 inside the CD case that shipped with your product It is the policy of Coherent to comply strictly with U S export control laws Export and re export of lasers manufactured by Coherent are subject to U S Export Administration Regulations which are administered
14. Diffuser in the model name incorporate a DUV quartz diffuser for increased coating damage resistance Both sensors accept a user installable optional heat sink refer to Increasing Average Power With Heat Sinks p 13 which can extend the maximum energy or average power range These heat sinks allow 25 mm sensors to be used up to 18W average power and 50 mm sensors to be used up to 43W average power both at 193 nm Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heat sink may cause permanent damage to the sensor Table 4 MaxUV EnergyMax Sensor Specifications alibration Uncertainty Energy Linearity Cable Length m i able Type Item Number J 50MUV 248 J 25MUV 193 W DIFFUSER W O DIFFUSER H H 3 sensor cable 1 USB RS cable USB 1191449 1191448 USB EnergyMax USB RS User Manual Quantum The Quantum EnergyMax sensor incorporates a Silicon photodiode EnergyMax Sensor contains a large 10 mm clear aperture and operates at a repetition Energy J rate from single pulse up to 10 kHz every pulse The main difference between a Quantum EnergyMax sensor and other Coherent EnergyMax sensors is its sensitivity A Quantum EnergyMax sensor is capable of measuring considerably smaller signals than the rest of the EnergyMax sensor line because
15. Heat SIS eet ie ce eorpora einig ease dg 13 Pyroelectric Technology eos Soi cis UU M 14 pamase Thresholds n oss c e ona Ro 15 Measurement 16 Emery Linearity 16 R petition us 16 Average Power Linearity Ne 16 Temperature Linearity of Quantum EnergyMax Sensors pp 17 Pulse Width EMS ALITY aeo des qose e e om teen 17 Spectral Response 3e coiere dra quse dere ey AR ER GU ERU KR Aan dana Aiud 17 Applying Wavelength Compensation Accuracy ppp 18 Operation a a Pm 21 LED Stat s tete du d 21 Powering Energy Max RS Sensors Nt 22 Pytoclecthio Watts Mode udo erai cu pon ducali ides Rat duas 2 MANS STING o s os essc p ROT e eiie TD RP UBI A du Qu auget idu 23 Internal Triggering Mode s uen 23 iii EnergyMax USB RS User Manual Setting the Wavelength aun eai 24 Tutorial Measuring Energy With a EnergyMax Sensor esee 25 Tutorial 27 Procedure Taking a Synchronized Ratiometric Reading 27 Tutorial Mode ete ier vare editae t 32 Procedure Usitig Turbo MUde urget e te rdi Pp SR uicti aset da a des bed 32 Using the SOFUWale oa odas iD ale e de E 34 Special POP CS DR 35 Understanding the External Trigger Circuit
16. RoHS Printed in the U S A Part No 1186243 Rev AA
17. and make use of the damage test slide Q Can I use the sensor at a wavelength other than the one it was calibrated at A Yes EnergyMax sensors contain a wavelength compensa tion table in the circuitry inside the sensor Plug the sensor into your meter and go to the wavelength setup Enter the wave length of your laser and the sensor will correct for any spectral and or transmission changes due to wavelength tefer to Figure 6 p 19 for more information 64 Index INDEX A Active area diameter 6 ANSI 7540 59 Average power Increasing with heat sinks 13 Linearity 16 Ratings 13 Specification 65 C Cable length 6 Cable length extending 25 Calibration Facilities and capabilities 59 Fundamentals 60 Uncertainty 6 Verification 61 Wavelength 6 Calibration and warranty 59 Coherent calibration facilities and capabilities Extended warranty 62 Limited warranty 61 Obtaining service 63 Optical calibration method 60 Product shipping instructions Warranty limitations 62 Coherent Calibration facilities and capabilities Service centers 63 Compliance RoHS 1 U S export control laws 59 64 59 vil D Damage Test slide Thresholds 15 Declaration of Conformity 2 Description 3 Post and stand assembly viii Unpacking and inspection Diffuse metallic EnergyMax sensors 7 E Energy Linearity Range 6 EnergyMax NIST traceable optical calibration EnergyMax sensors Diffuse metallic 7 16 60
18. and one or more slaves Unbussed devices will always return MAST 49 EnergyMax USB RS User Manual Measurement Data Collection Measurement data can be collected in two ways 1 Configuring the data item select and receiving measurement data records from the Data Streaming Transmission Interface 2 Querying the last data record generated Data Item Select Data items that appear in a measurement data record are selectable Selections differ based on measurement and statistics modes Statistics Mode Off Selects the statistics mode of transmit data items which takes effect immediately if statistics mode is off The data argument is a comma separated list of one or more tokens shown below At least one token must be specified The tokens may be specified in any order Command CONFigure ITEMselect PULS PER FLAG SEQ Query CONFigure ITEMselect Reply one or more of PULS PER FLAG SEQ Statistics Mode On Selects the statistics mode of transmit data items which takes effect at the end of the current statistical batch if statistics mode is on The data argument is a comma separated list of one or more tokens shown below At least one token must be specified The tokens may be specified in any order Command CONFigure STATistics ITEMselect MEAN MIN MAX STDV DOSE MISS SEQ Query CONFigure STATistics ITEMselect Reply one or more of MEAN MIN MAX STDV DOSE MISS SEQ Last Data Record Query Gets the last recorded
19. being used to the calibration temperature Add 1 to 2 C for sensor elec tronics Typ 15 1 0 0 5 0 1 0 5 190 400 600 800 1000 Wavelength nm Figure 5 Photo Sensitivity Temperature Characteristics There is a small amount of pulse width linearity error when using a sensor at its maximum specified pulse width This error is less than 1 At pulse widths less than 10 us this error is negligible and is less than 0 5 The J SOMB IR sensor has a slightly higher pulse width linearity specification of 1 5 All pyroelectric EnergyMax sensors incorporate a diffuse coating to minimize specular reflections which eliminate spurious beams that can re enter the laser cavity In addition all EnergyMax sensors include the convenience of onboard electronics that contain built in wavelength compensation factors Enter the wavelength of the laser being measured within the PowerMax PC software or via a host command and the sensor 17 EnergyMax USB RS User Manual Applying Wavelength Compensation Accuracy output will be automatically compensated Wavelength compensa tion results in an additional error factor when engaged and when the sensor is being used at a wavelength different from the wavelength at which it was calibrated The accuracy is based upon the sensor coating Overall measurement accuracy is a combination of calibration uncertainty found in the sensor
20. contained within the EnergyMax USB and EnergyMax RS connectors to provide health and status informa Indicator ion Table 10 EnergyMax USB RS LED Light Conditions LED LiGHT CONDITION No light visible If the EnergyMax USB sensor is connected to the PC or in the case of an EnergyMax RS sensor if it is connected to a power source but there are no visible lights the sensor is not powering up properly Test the sensor on another USB port and if that does not solve the problem contact Coherent for service refer to Table 17 p 61 for contact information Light is on Sensor is functioning Lights flashing The LED flashes for 50 msec with each pulse measurement At high repetition rates it may not appear to be flashing but will appear brighter than when measurements are not occurring 21 EnergyMax USB RS User Manual Powering EnergyMax RS Sensors Pyroelectric Watts Mode The EnergyMax RS sensor is powered via a 4 to 20 VDC power supply input This power can be applied with either an external power supply not included as shown below or input through Pin 1 of the DB 9 connector An optional external power supply can be ordered using part number 1105557 EnergyMax RS System Components Sensor cable Meterless sensor power cable connector Power supply cable connector USB or RS 232 cable connector 4 to 20 VDC power supply EnergyMax pyroelectric sensors can measure average
21. essere ene 35 Extending Cable Length setas eiiis depu tad ette ia a aa aaia 36 Host Interface NI 37 OVELVIC WY ic e 37 Message 37 Messages Received by the Sensor Nt 37 Messages Sent by the Sensor 4 ea ro retro Gna toa 37 Host Command Quick Reference et 38 SCEL Interface SOC iT urere nies uat iaa 40 Syntax and Notation Conventions Ne 40 Commands and iv tape e Redi aoe ARTAS AAE E AAAA ine nla 40 SCPI Common Commands eee tene teet er tem tun eed E an 40 System ODDO esie anl i 41 Error Record Reporting and Collection pp 42 Measurement setup and 44 Statistics Mode 47 Trigger sera open t dept dtes citi a lc E VEN ed td 48 Measurement Data Collection di raa te en t baa ee el aede 50 Data Streaming Transmission Interface Gating RN 52 S nsor Morna 52 Calibration a E e A mM M 53 Data Streaming Transmission Interface Section pt 53 Operational PatambetsbS E a i a 54 Host Interface intense Da bero rera tete ev Y e atri Perd 54 Calibration and Warranty sse 57 Coherent Calibration Facilities and Capabilities pp 57 Optical Calibration Method OA Ee PAS 58 EnergyMax NIST Traceable Optical Calibration RN 58 Recerumby Once d Ye 58 Calibration Fundamentals 58
22. it utilizes a photodiode rather than a pyroelectric element Due to the quantum nature of their response photodiode sensors are inherently more sensitive than pyroelectric sensors which are thermal based One consequence of this extra sensitivity is the possibility of measurement error or noise from stray modulated light sources for example stray reflections or room lights in a laboratory environment For this reason Quantum EnergyMax sensors are designed for use with a small integrated input beam tube which limits the field of view of the sensor aperture This tube is removable for alignment purposes and custom applications The following chart plots the minimum and maximum measurable energy across all wavelengths This chart can be used to determine the measurable energy range for wavelengths other than that in the specifications table 532 nm 10 pJ J 10Si HE 100 nJ 10 nJ 1nJ e 100 pJ 10 pJ 1 pJ 200 400 600 800 1000 1200 1400 1600 1800 Wavelength nm Figure 3 Spectral Sensitivity Curves for Quantum EnergyMax Sensor The output of the Silicon and Germanium photodiodes used in the Quantum EnergyMax sensors varies greatly by wavelength The sensors contain spectral compensation to account for this varia Description tion Trefer to Spectral Response 17 so that measurements are still accurate when used at wavelengths ot
23. of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heat sink may cause permanent damage to the sensor Table 1 MaxBlack EnergyMax Sensor Specifications Energy Range 1 6 mJ to 2J 400 uJ to 500 mJ 850 uJ to 1J 50 uJ to 50 mJ 12 uJ 20 mJ 500 nJ to 600 uJ Noise Equivalent Energy 160 uJ 40 uJ lt 85 uJ lt 1 2 uJ Wavelength Range hm 0 19 to 12 33 3 7 319 4 TU Density Diffuser Calibration Wavelength nm Calibration Uncertainty 96 Energy Linearity 96 Cable Length m Cable Type 500 at 1064 nm 10 ns MaxBlack 3 sensor cable 1 USB RS cable USB and RS 1191444 1191443 1191442 1191441 1191436 1191435 1191432 1191431 1191429 1191428 Diffuse Metallic EnergyMax Sensors Description Diffuse Metallic EnergyMax sensors feature broad wavelength coverage 190 nm to 2 1 um and large active area up to 50 mm This series of EnergyMax sensors consists of three different models that allow measurement over a wide range of wavelengths beam diameters average power levels and repetition rates These sensors feature a unique diffused metallic coating which offers significantly higher damage resistance than traditional metallic coatings and produces very little specular reflectance thus eliminating spurious beams that can
24. re enter the laser cavity The 25 mm and 50 mm sensors accept a user installable optional heat sink refer to Increasing Average Power With Heat Sinks p 13 which can extend the energy and or repetition rate range These heat sinks allow the J 25MT 10K HZ to be used up to 30W average power and J SOMT 10KHZ to be used up to 50W average power Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heat sink may cause permanent damage to the sensor Table 2 Diffuse Metallic EnergyMax Sensor Specifications ensor Coating Diffuser nergy Linearity Cable Length m Q able Type Z 3 o e USB RS 0 000 Calibration Wavelength nm 1064 Calibration Uncertainty J 50MT 10KHZ J 25MT 10KHZ J 10MT 10KHZ 400 uJ 17 90 uJ to 100 mJ 300 to 200 uJ Diffuse Metallic No 3 sensor cable 1 USB RS cable USB and RS 1191417 1191446 1191445 1191433 EnergyMax USB RS User Manual MaxBlack EnergyMax Sensors With Diffusers These sensors are specifically designed for high energy and high peak power lasers operating at relatively low repetition rates such as those based on Nd YAG Ruby Ho YAG and Erbium The J 50MB YAG sensor can be used with beams up to 35 mm in diam eter and can work at 1064 nm 532 nm 355 nm and 266 nm without th
25. single USB sensor Contact Coherent for advice related to particular hubs we have tested in house RS sensors Use a standard off the shelf RS 232 straight through extension cable to extend the length 36 Overview Message Terminators Messages Received by the Sensor Messages Sent by the Sensor Host Interface HOST INTERFACE In this section Overview this page Message terminators this page Host command quick reference page 38 SCPI interface section page 40 Data streaming transmission interface section page 53 Operational parameters page 54 Host interface glossary page 54 This section defines the host interface of the EnergyMax USB RS meterless energy sensor and includes high level commands responses and behavior that a user or host computer can expect from the sensor The low level interface which covers RS 232 USB and other types of communication methods is not presented in this section except where it directly impacts the high level interface Messages between the sensor and the host computer are comprised entirely of ASCII string characters with the exception of the Data Streaming Transmission Interface which sends unsolicited uniquely coded out of band data transmissions Strictly binary messages are not supported All message strings passing through the host interface are terminated to signal the end of a message string Messages received by the sensor must be te
26. specification tables and the wave length compensation accuracy tefer to Table 9 below The combined accuracy is based upon practices outlined in the National Institute of Standards Guidelines for Evaluating and Expressing Uncertainty NIST Technical Note 1297 1994 Edition The combined accuracy of the measurement is calculated by using the law of propagation of uncertainty using the root sum square square root of the sum of squares sometimes described as summing in quadrature where Measurement Accuracy Jr W where U Percent Calibration Uncertainty and W Wave length Accuracy Example 1 J 10SI HE used at 355 nm U 3 W 5 Measurement Accuracy 32 52 9 25 5 8 Example 2 J 10MB LE used at 532 nm U 2 W 2 Measurement Accuracy 4 22 42 V4 4 2 8 Table 9 Wavelength Compensation Accuracy Sheet 7 of 2 CALIBRATION WAVELENGTH COMPENSATION ACCURACY WAVE SENSOR FOR WAVELENGTHS OTHER THAN THE LENGTH CALIBRATION WAVELENGTH NM All Multipurpose sensors MaxBlack coating 1064 nm AII High Rep Rate sensors Diffuse metallic coating J 50MB YAG 3 Absorption 0 9 0 8 0 7 0 6 0 5 0 4 0 3 0 2 0 1 Technical Description Table 9 Wavelength Compensation Accuracy Sheet 2 of 2 CALIBRATION WAVE LENGTH NM WAVELENGTH COMPENSATION ACCURACY FOR WAVELENGTHS OTHER THAN THE CALIBRATION WAVELENGTH Figure 6 below and Figure 7 p 20
27. that will satu rate if the applied energy is too high There is some headroom above the maximum specification the amount of headroom is dependent upon sensor responsivity and varies from 5 to 25 depending on the individual sensor but the maximum level should not be exceeded Another implication of using a sensor above its rated energy is the potential of high energy density damaging the coating Q What if I exceed the pulse width specification A Although there is some headroom built into the specifica tion using an EnergyMax sensor with a laser that has a pulse width longer than the specified maximum pulse width will result in increased measurement error For example if you use the sensor with double the maximum pulse width the result will be an additional 2 to 3 error 63 EnergyMax USB RS User Manual Why isn t there a minimum pulse width specification A These pyroelectric energy sensors can function with pulse widths as short as nanoseconds picoseconds or even femto seconds and still measure correctly As described in the previous answer the maximum pulse width specification is important and is limited by the fall time of the sensor so Coherent only specs the maximum not the minimum pulse width As the pulse width gets shorter the only change that happens is that the damage threshold on the energy sensors decreases When using really short pulses pay close attention to the damage threshold specifications
28. 108 Start Data Colle Disconnect All Rescan 0438B10R 388B10R Measurement Range High 1 152E 06 Trigger Level Decimation 5 00 1 Collection Mode Sample Size Time Interval 100 Streaming File Settings View Help Sel Resolution gt Se Trigger gt Calculated Ratio Data in Data Log Dual Sensor Synchronization Set Y xis Add a RS 232 Serial Port The Turbo Active Display Inactive indicator light will turn green to indicate that the software is now in Turbo mode Measured values will show data EK File Settings View Help 0438B10R Start Data Collection Trending Histogram Tuning Synchronized Trending GS COHERENT 1 00 0 800 00 3 Off 600 00 3 5 400 00 3 15 400 00E Wavelength nm 532 Reset 200 00 3 Smooth 100ms Fluence Area 1 1 00 0 0 00 0 1 i 1 0 20 40 59 79 Mean StdDev xot Samples No data No data poem Autoscale Turbo Indicator Light i Mode Turbo Active Display Inacti Min Max M R urbo Active Display Inactive fe Energy easurement ange No data data Power High 1 152E 06 w Trigger Level OFF Log Data to File g 5 lt Dose Rep Rate f Fluence Deom 5 00 OFF 1 000 No data No data Sample Collection 1 Count Fixed Sample Size Time Interval Interval 0 1 Co
29. O EVENT SHALL THE COMPANY BE LIABLE FOR ANY INDIRECT INCIDENTAL OR CONSEQUENTIAL DAMAGES IN CONNECTION WITH ITS PRODUCTS 60 Calibration and Warranty Obtain ing In order to obtain service under this warranty Customer must notify Service the Company of the defect before the expiration of the warranty period and make suitable arrangements for the performance of service The Company shall in its sole discretion determine whether to perform warranty service at the Customer s facility at the Company s facility or at an authorized repair station If Customer is directed by the Company to ship the product to the Company or a repair station Customer shall package the product to protect from damage during shipping and ship it to the address specified by the Company shipping prepaid The customer shall pay the cost of shipping the Product back to the Customer in conjunction with recalibration and recertification the Company shall pay the cost of shipping the Product back to the Customer in conjunction with product failures within the first twelve months of time of sale or during an extended twelve month warranty period A Returned Material Authorization number RMA assigned by the Company must be included on the outside of all shipping packages and containers Items returned without an RMA number are subject to return to the sender For the latest Customer Service information refer to our website www Coherent com Detailed instruct
30. Terminates the current statistical batch if a batch is in progress 47 Trigger Parameters ORE E Beea ee E 2 Selects the trigger Source ooj oo TRIGger LEVel TRIGger LEVel Sets the trigger level oo Queries the trigger level Selects the external trigger edge oo TRIGger SLOPe TRIGger DELay Queries the external trigger edge Selects the external trigger delay time oo Queries the external trigger delay time oo TRIGger SEQuence TRIGger BUS PMODe BUS NBUS TRIGger BUS PMODe Sets the sequence ID No Sets the trigger bus participation mode Queries the trigger bus participation mode 3 S a E S 3 Q zs amp iw S S Q Q 9 E CONFigure ITEMselect Selects the statistics mode of transmit data items 5 0 5 Data Streaming Transmission Interface Gating Sensor Information s 39 EnergyMax USB RS User Manual SCPI Interface Section Syntax and Notation Conventions Commands and Queries SCPI Common Commands Unless otherwise specified all SCPI commands and queries follow the syntax and notation conventions specified by the SCPI Standard For more information refer to the SCPI Standard found on the IVI Foundation website The base 10 numeric data format specification is used heavily in this section Unless otherwise
31. User Manual EnergyMax USB RS Sensor System COHERENT User Manual EnergyMax USB RS Sensor System COHERENT 27650 SW 95th Ave Wilsonville OR 97070 EnergyMax USB RS User Manual This document is copyrighted with all rights reserved Under the copyright laws this document may not be copied in whole or in part or reproduced in any other media without the express written permission of Coherent Inc Permitted copies must carry the same proprietary and copyright notices as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all the material purchased may be sold given or loaned to another person Under the law copying includes translation into another language Coherent the Coherent Logo and EnergyMax are trademarks or registered trademarks of Coherent Inc National Instruments and LabVIEW are trademarks of National Instruments Corporation Every effort has been made to ensure that the data given in this document is accurate The information figures tables specifications and schematics contained herein are subject to change without notice Coherent makes no warranty or representation either expressed or implied with respect to this document In no event will Coherent be liable for any direct indirect special incidental or consequential damages resulting from any defects in its documentation Technical Support In the U S Should you experien
32. all transmitted bytes 53 EnergyMax USB RS User Manual Oper ational The following table shows all operational parameters after a reset Parameters cycle and the factory state Table 16 Operational Parameters i fi Pulse only Pulse only Casa ce ff ff 1 Current wavelength persistent Last granted setting The defaul wavelength Gain compensation factor persistent i i ff ax i 00 f sure mo mies qmuews Wavelength correction cursor O start O start Host Interface Message The transmission of a properly terminated string from Gloss ary host to sensor or from sensor to host Reset cycle The reception of a reset command or the action of disconnecting power and then connecting power to the sensor Either event sets all non persistent operational parameters to their default settings Ignored command query A defined response for commands or queries in which no internal or external action is taken and the command or query is dropped The meter responds to ignored commands queries as if the command or query was never sent 54 Host Interface Factory settings Persistent settings typically set by the manufac turer They are parameters whose access is restricted by password Factory settings do not include operational parameters Missed pulse A measured pulse that registers with a peak value that does not exceed the baseline value Missed pulses are detectable only under external trigger condi
33. are EnergyMax sensors provide an in depth command set that is easy to access e USB sensors connect on Virtual COM port thus supporting simple ASCII host commands communication for remote interfacing National Instruments LabVIEW drivers are supplied for easy LabVIEW integration Coherent EnergyMax sensors are known as smart sensors that is they incorporate onboard electronics that automatically correct for pyroelectric sensor temperature as well as built in wavelength compensation factors This section gives an overview of each of the five types of sensors that comprise the EnergyMax Family MaxBlack Diffuse Metallic MaxBlack With Diffusers MaxUV and Quantum EnergyMax USB RS User Manual MaxBlack EnergyMax Sensors The MaxBlack EnergyMax series consists of six different models that allow measurement over a wide range of wavelengths beam diameters average power levels and repetition rates All MaxBlack EnergyMax sensors feature the MaxBlack coating which offers significantly better damage resistance and mechanical durability characteristics compared to black paint coatings The 25 and 50 mm diameter sensors accept user installable optional heat sink refer to Increasing Average Power With Heat Sinks p 13 which can extend the energy and or repetition rate range These heat sinks allow 25 mm sensors to be used up to 15W average power and 50 mm sensors to be used up to 24W average power Use
34. at sink 1123432 Large heat sink Increases average power handling on 50 mm aperture EnergyMax sensors Pyroelectric Unlike all other thermal sensors pyroelectrics measure the rate of change of the sensor temperature rather than the temperature value Technolog itself As a result the response speed of the pyroelectric is usually limited by its electrical circuit design and the thermal resistance of the absorptive coating In contrast other thermal sensors such as thermopiles and bolometers are limited by slower thermal response speeds typically on the order of seconds Pyroelectrics respond only to changing radiation that is chopped pulsed or otherwise modu lated so they ignore steady background radiation that is not changing with time Their combination of wide uniform spectral response sensitivity and high speed make pyroelectrics ideal choices for a vast number of electro optic applications Technical Description The EnergyMax sensor line uses a pyroelectric element to measure the energy in a laser pulse It does this by producing a large electrical charge for a small change in temperature The active sensor circuit takes the current from the sensor element and converts it to a voltage that the instrument can measure The figure below shows the relationship between the current response of the pyroelectric element and the output voltage of the sensor circuit The relationship between the current response and the output v
35. aximum expected measurement is 10 mJ and the granted range is 30 mJ The granted full scale range is the top range available if the maximum expected measurement exceeds the top range value Using the MAX and MIN parameters on the query result in obtaining either the maximum full scale reading or the minimum range full scale reading respectively 46 Statistics Mode Control Host Interface Command CONFigure RANGe SELect lt maximum expected measurement gt MA Ximum MINimum Default not applicable Query CONFigure RANGe SELect MA Ximum MINimum Reply lt granted full scale range gt Sets statistics calculation parameters to be used in the statistics oper ating mode Batch Size Sets the statistics batch size which takes effect at the end of the current statistical batch The batch size units are pulses rounded to the nearest integer Command CONFigure STATistics BSIZe DEFault 2 1000000000 Default 100 Query CONFigure STATistics BSIZe Reply 2 99999 Restart Mode Selects the action to be taken at the end of a statistical batch When statistics mode is on selecting AUTomatic will begin a new batch at the next measured pulse Selecting MANual requires the start command to begin a new batch when statistics mode is on refer to the CONFigure STATistics STARt command under Batch Initia tion and Termination below Command CONFigure STATistics RMOde DEFault MANuall AUTomatic Default MAN
36. by the Commerce Department In addition shipments of certain components are regulated by the State Department under the Inter national Traffic in Arms Regulations The applicable restrictions vary depending on the specific product involved and its destination In some cases U S law requires that U S Government approval be obtained prior to resale export or re export of certain articles When there is uncertainty about the obligations imposed by U S law clarification should be obtained from Coherent or an appropriate U S Government agency To view information that may have been added or changed since this publication went to print connect to www Coherent com This symbol is intended to alert the operator to the presence of dangerous voltages associated with the product that may be of sufficient magnitude to constitute a risk of electrical shock This symbol is intended to alert the operator to the presence of important operating and maintenance instructions vii EnergyMax USB RS User Manual Unpac king and All components of the Coherent EnergyMax USB RS sensor system Inspection are carefully tested and inspected before shipping Save the inner carton to store the components when not in use and to ship the components to Coherent for calibration Inspect each of the following items for damage The EnergyMax sensor Post and stand components refer to Figure 1 below Damage test slide only included with sensors
37. ce difficulties with your product or need technical information visit our website www Coherent com You can obtain additional support by either telephoning our Technical Support Hotline at 1 800 343 4912 or e mailing our Support Team at support instruments Coherent com Telephone coverage is available Monday through Friday except U S holidays If you call outside our office hours your call will be taken by our answering system and will be returned when the office reopens If there are technical difficulties with your product that cannot be resolved by support mechanisms outlined above e mail or telephone Coherent Technical Support with a description of the problem and the corrective steps attempted When communicating with our Technical Support Department via the web or telephone the model and serial number of the product will be required by the Support Engineer responding to your request Outside the U S If you are located outside the U S visit our website for technical assistance or telephone our local Service Representative Representative phone numbers and addresses can be found on the Coherent website www Coherent com Coherent provides web and telephone technical assistance as a service to its customers and assumes no liability thereby for any injury or damage that may occur contemporaneous with such services These support services do not under any circumstances affect the terms of any warranty agreement between Coh
38. cord is permanently removed from the error queue The queued error record count decrements by one 43 EnergyMax USB RS User Manual Measurement Setup and Control Command none Query SYSTem ERRor NEXT lt error record count gt Default not applicable Reply lt next available error record s gt All Error Query Queries all error records in the error queue at the time of the query No reply is transmitted if there are no error records available After completion of the reply transmission The error queue is empty The queued error record count is zero Command none Query SYSTem ERRor ALL Reply all available error record s gt All Error Clear Clears all error records in the error queue Command SYSTem ERRor CLEar Query none Measurement Mode Sets the meter measurement mode to select either power Watts or energy Joules measurement mode Command CONFigure MEASure DEFault J W Default J Joules mode Query CONFigure MEASure TY PE Reply Statistics Mode This command sets the statistics processing mode to either off or on Command CONFigure MEASure STATistics DEFault JOFF ON Default OFF Query CONFigure MEASure STATistics Reply OFFJON 44 Host Interface Variable Decimation Sets the pulse decimation rate which takes effect at the end of the current decimation cycle The decimation rate units are expressed pulses rounded to the nearest integer Pulse meas
39. d RS 232 Serial Port E Use Windows Localization for Numerics 13 Select the Synchronized Trending tab 1 00E 0 800 00 3 500 00 3 40000 3 200 00 3 0 00 0 n 0 20 40 59 Autoscale Samples Setup Master None 29 EnergyMax USB RS User Manual 14 Click the Setup button Trending Histogram Tuning Synchronized Trending 1 00E 0 800 00 3 800 00 3 40000E 3 20000E3 0 00 0 h 0 2 40 Autoscale Samples This will display the Sync Configuration xi Setup menu The sensor chosen in step 10 above which is the faster of the two sensor2 sensors is automatically listed as Sensor 1 wem a in this setup panel and will subsequently be listed as the Master serial number in the Synchronized Trending chart 15 Press the Select Sensor 2 button to xi display the Synch Configuration Screen Sensor 1 a Sensor 2 b D438B10R Synchronization This will display the Synch Configuration xj screen Select Synch Sensor 16 Pick the second slower sensor from xj the dropdown menu and then press the OK button to return to the Synch Select mr gensor Configuration Setup screen Cancel 30 17 Enter the math operation that is desired default is an A B ratiometric calculation which is shown in this example and then click
40. d sensor combinations Note that 10 mm aperture sensors do not accept heat sinks 25 mm aper ture sensors accept small and medium heat sinks and 50 mm aper ture sensors accept large heat sinks Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heat sink may cause permanent damage to the sensor Table 6 Average Power Ratings Sheet 1 of 2 ome we aw sw pow aw f 3 mp 13 EnergyMax USB RS User Manual Table 6 Average Power Ratings Sheet 2 of 2 HEAT SINK Hesse we mw EA aaron f xe sw sw w 1 3w Wm wem bsmuvaw wo Dimer 28 o Low aw 1 Average power ratings are based upon testing at the listed wavelength not applicable for Quantum EnergyMax sensors 2 50 mm EnergyMax sensors are compatible with the large heat sink 3 25 mm EnergyMax sensors are compatible with small and medium heat sinks 4 10 mm EnergyMax sensors do not have a heat sink available Table 7 below lists the different heat sinks that are available for EnergyMax sensors Table 7 Available Heat Sinks ITEM NAME DESCRIPTION NUMBER 1123430 Small heat sink Increases average power handling on 25 mm aperture EnergyMax sensors 1123431 Medium he
41. data items are the same units as the power or energy measurements from which they were calculated The power mean min lt max gt lt stdv gt and dose data items are zero if any constituent pulse measurement in the batch is not measureable due to an error for example peak or baseline clipping The flags data item which communicates qualification informa tion is reported with each data message Qualification information which includes various error conditions is reported in a string containing one ASCII character for each qualification that is asserted If the qualification character is present the qualification is asserted If the qualification condition character is absent the quali fication is not asserted Each character present has a unique meaning as described in the following table Table 15 Flag Character Definitions QUALIFICATION CHARACTER QUALIFICATION MEANING Peak clip error statistics mode off only Baseline clip error statistics mode off only M Missed pulse external trigger only statistics mode off only a Dirty batch statistics mode on only 51 EnergyMax USB RS User Manual Data Streaming Transmission Interface Gating Sensor Information The host has control over when measurement data is transmitted from the data streaming transmission interface Transmission is enabled after an INITiate command Transmission 15 disabled after an ABORt command While transmission is
42. data to the software a decimation of 3 sends 1 3 of the data and so on 2 Enter Turbo mode to log all of the data to a file Turbo mode allows the user to continue to collect data for every pulse and save it directly to a file at the fastest rate that the sensor will allow This higher repetition rate logging capability is accom plished by disabling the calculation and display elements of the soft ware including the live display statistics and batch count and plot ting This tutorial explains how to use the Turbo mode within EnergyMax PC software Follow all laser safety procedures The lasers must be switched OFF or shuttered before running the procedure presented in this section 1 Connect the system components the following figure shows system components for EnergyMax USB EnergyMax USB System Components Sensor cable Meterless sensor power cable connector USB or RS 232 cable connector 32 2 Start the EnergyMax PC application 3 Select the sensor serial number from the Select Sensor dropdown menu In the example at right the selected sensor is 0438B 10R 4 Select the appropriate Measurement Range High or Low and adjust the Trigger Level to achieve a good measurement For information on setting the trigger level refer to Internal Triggering Mode p 23 5 Click Turbo on the Setting dropdown menu Operation File Settings Yiew Help 04388
43. e need to change or self calibrate diffusers or any other accesso ries Both sensors combine a MaxBlack coating and a diffuser to produce superior damage resistance characteristics This combina tion enables operation with lasers that produce either very high energy per pulse or very high peak fluences Use of EnergyMax sensors at average power levels beyond the base model average power specification without the optional heat sink may cause permanent damage to the sensor Table 3 MaxBlack EnergyMax Sensor With Diffusers Specifications Diffuser Qo Cable Type i 14 0 at 1064 nm 10 ns gt 100 at 2940 nm 100 us ensor Coating Cable Length m 2 8 at 532 nm 10 ns 0 75 at 355 nm 10 ns 1 0 at 266 nm 10 ns alibration Wavelength nm alibration Uncertainty 20 nen Linear 3 3 sensor cable 1 USB RS cable USB and RS 1191437 1191440 1191430 1 Modified sensors with higher repetition rate energy range and or pulse width are avail able Contact Coherent MaxUV EnergyMax Sensors Description These sensors are specifically optimized for use with ArF lasers operating at 193 nm and lasers operating at 248 nm and feature high accuracy and large active areas up to 50 mm The EnergyMax series utilizes a unique coating called MaxUV that delivers superior long term damage resistance Two of the 50 mm diameter models labeled as with
44. enabled measurement data records are transmitted immediately as they are generated Initiate Command Enables data streaming interface transmission This command is ignored if data streaming interface transmission is already enabled Command INITiate Query none Abort Command Disables data streaming interface transmission This command is ignored if data streaming interface transmission is already disabled Command ABORt Query none The sensor can be queried for information for the purposes of unit identification and quality control Serial Number The query which is always available gets the serial number Query SYSTem INFormation SNUMber Reply lt quoted serial number gt Part Number The query which is always available gets the serial number Query SYSTem INFormation PNUMber Reply lt quoted part number gt Model Name The query which is always available gets the model name Query SYSTem INFormation MODel Reply lt quoted model name gt Calibration Date The query which is always availale gets the calibration date Query SYSTem INFormation CDATe Reply lt quoted calibration date gt 52 Calibration Data Streaming Transmission Interface Section Host Interface Manufacturing Date The query which is always available gets the manufacturing date Query SYSTem INFormation MDATe Reply lt quoted calibration date gt Default Wavelength The query which is always available ge
45. energy meters and sensors as well as environmental factors can have an adverse effect on accuracy and can also result in wear and or damage to parts critical to maintaining optimum performance EnergyMax USB RS sensors contain the analog to digital conver sion peak detection and gain stages integrated into the sensor cable The electronics and sensor are calibrated together as a system using the following calibration principles Coherent performs an optical calibration using a ratiometric substi tution method to remove laser energy variation as a source of error and to eliminate dependence on the absolute value of the beam splitter ratio as diagramed in the figure shown below By introducing a beamsplitter each laser pulse can impinge on two sensors and the ratio of two sensor outputs can be measured on each pulse This ratio is independent of the actual pulse energy 58 Calibration Verification Limited Warranty Calibration and Warranty The actual calibration involves calculating ratios with respect to the reference sensor for the working standard and then for the Unit Under Test UUT Ld U U T Reference Sensor Does not depend Working on splitter Standard Figure 12 Ratiometric Method of Optical Calibration To produce a ratio a sample comprised of 15 seconds of data is taken and then averaged and is then used to calculate the final cali bration factor
46. energy range of an Ener gyMax sensor 15 3 Within 10 to 90 of the energy range spec ification the sensors are typically linear to 2 The J SOMB IR has a slightly higher energy linearity specification of 3 5 Repetition rate linearity is 1 In practice the actual error is often much less than 1 The pyroelectric crystal is sensitive to temperature at a rate of approximately 0 2 per degree Celsius change in temperature Historically this has limited the average power to which a sensor can be exposed This circuit allows measurement of higher pulse energy at faster repetition rates than ever before and enables the use of removable heat sinks EnergyMax sensors have less than 2 error when used at maximum average power and have less than 0 5 undershoot when hit with the full power rating In practice many EnergyMax sensors have typical average power linearity error of less than 1 Temperature Linearity of Quantum EnergyMax Sensors Pulse Width Linearity Spectral Response Temperature Coefficient C Technical Description The Silicon Quantum EnergyMax sensor J 10SI HE has a temper ature linearity component due to a photo sensitivity temperature characteristic that varies by wavelength as shown in the figure below In practice the error is less than 1 unless the sensors are used in a very hot environment To calculate A C compare the temperature of the environment within which the sensor is
47. erent and the buyer Operating a Coherent product with any of its interlocks defeated is always at the operator s risk Table of Contents TABLE OF CONTENTS vil U S Export Control Laws Compliance Ne vii Publication Updates nnr EEE A EAA AARTE E vii Symbols Used in This Document vii Unpacking and Inspection age qp uaa Idus Vili Post and Stand ASssemb1y ioi d ue viii VEI n NEN as tit aed PTT 1 Environmental Regulations edo teet ere tee cit un dle ert Meere een led eade deua 1 RoHS 1 Waste Electrical and Electronic Equipment WEEE 2002 1 Declaration ai e est i Etats 2 I user eL PH 3 Introduction siie setas 3 POMC DOV CRVICW ctl hte ania ines Soa 4 PEO UIC Te CUE Sosy a NE m ae a 4 Software Features iar emu 5 Sensor OVervie W 5 Max Black Eneroy Max SenSOTS s oko desea uen eoe 6 Diffuse Metallic EnergyMax Sensors 7 MaxBlack EnergyMax Sensors With Diffusers pp 8 MaxUV EnergyMax Sensors 9 Quantum Energy SeDsOE s 10 Technical Description sole adhe das 13 Increasing Average Power With
48. experiment with an automated control and data acquisition system These meterless sensors are particularly attractive to system builders because their small size allows them to be easily embedded within instrumentation and their RS 232 or USB communications capabil ities facilitate automated operation by a host computer EnergyMax USB RS User Manual Product Overview Product Features Coherent EnergyMax PC application software provides a virtual instrument interface for sensors that enable the operator to take laser energy readings log data and compute measurement statistics Users can also write their own software using host interface commands that control all aspects of energy meter operation Able to measure every pulse up to 10 kHz and stream this data over the host port USB only RS 232 capable of measuring every pulse up to 10 KHz and streaming data over host port at a rate of 1 kHz EnergyMax USB provides direct USB high speed 2 0 connec tion to PC Power provided via USB connection EnergyMax RS provides RS 232 connectivity Power input provided via 4 to 20 VDC input Fast 14 bit A D converter supports measurement accuracy similar to that found in LabMax TOP meter Up to five digits of measurement resolution Each sensor incorporates a unique spectral compensation curve for accurate use at wavelengths that differ from the cali bration wavelength External and internal triggering available
49. gger Figure 9 Internal Trigger Threshold The trigger is synchronous with the leading edge of the pulse but the actual peak is determined algorithmically by sampling the input signal near the trigger From the trigger point forward the algorithm searches for peaks and from the trigger point back it searches for a baseline The wavelength should always be set for accurate power measure ments This can be done either in the EnergyMax PC application software or over the host port via a host command 24 Operation Tutorial This tutorial explains how to connect a EnergyMax USB or Ener gyMax RS sensor to your PC and begin taking energy measure Meas unung ments using the EnergyMax PC software Energy With a EnergyMax Sensor Follow all laser safety procedures The laser must be switched OFF or shuttered before running the tutorial presented in this section For instructions on communicating with the sensor directly via host commands refer to Host Interface p 37 Verify the laser is switched OFF or shuttered before starting this tutorial 1 Install the EnergyMax PC software for details refer to the EnergyMax USB RS Software Installation and Quick Start Guide 1186241 that shipped with your system 2 Connect the system components the following figure shows system components for both EnergyMax USB and Ener gyMax RS sensors select the one that s appropriate for your system Ener
50. gyMax USB System Components EnergyMax RS System Components Sensor cable Sensor cable Meterless sensor power cable connector Power supply cable connector RS 232 cable connector USB cable E c connector I 4 to 20 VDC power supply 25 EnergyMax USB RS User Manual Confirm that the blue LED is lit Start the EnergyMax PC software EnergyMax RS sensors only Click Add a RS 232 Serial Port on the Setting dropdown menu EnergyMax RS sensors only On the Add Serial Sensor menu select the Com Port and Baud Rate parameters and then click the OK button Select the highest baud rate supported by the computer Select the sensor serial number from the Select Sensor dropdown menu In the example at right the selected sensor is 04385 10R Press the Start Data Collection button and then turn ON the laser to begin taking energy measurements 26 File Settings view Help Sek Resolution gt Se Trigger gt Log File Format gt Turbo Higher Data rate Dual Sensor Synchronization Set Axis py Anl x Note This COM port wil be queried as a Coherent sensor and if the query is unsuccessful it will not be added to the list To remove this sensor from the list please restart the EnergyMax PC program File Settings View Help Disconnect All Rescan v 0438B10R 388B10R Start Data Colle
51. her than the calibration wavelength Table 5 Quantum EnergyMax Sensor Specifications Max Max Pulse Width us 1 Max Rep Rate pps 10000 Calibration Uncertainty 3 Linearity 3 3 sensor cable 1 USB RS cable USB and RS Cable Length m Cable Type Item Number USB 1191434 RS 1191427 11 EnergyMax USB RS User Manual Technical Description TECHNICAL DESCRIPTION In this section Increasing average power with heat sinks this page Pyroelectric technology page 14 Damage thresholds page 15 Measurement linearity page 16 Spectral response page 17 Increasin 9 Using a heat sink increases the average power handling capability of Avera ge Power EnergyMax sensors These power levels are achieved by combining active temperature compensation circuitry and enhanced thermal With Heat Sinks management techniques Maximum average power is wavelength dependent because absorption changes with wavelength Maximum average power is inversely proportional to the spectral absorption E The 25 mm and 50 mm aperture sensors accept optional heat sinks that users can install by mounting them on the back of the sensor The heat sinks expand the average power handling capability as outlined below Average power specification is dependent upon coating and wavelength The following table provides average power ratings for several wavelength an
52. ions Edge Select Selects the external trigger edge The selected trigger edge is the external trigger event Command TRIGger SLOPe DEFault POSitive NEGative Default POSitive 48 Host Interface Query TRIGger SLOPe Reply POS NEG Delay Selects the external trigger delay time The internal trigger happens at the time marked by the external trigger delay time after the selected external trigger edge The trigger delay time units are microseconds Command TRIGger DELay DEFault 0 1000 Default 0 Query TRIGger DELay Reply 0 1000 Set Sequence ID Sets the sequence ID which must be an integer value The sequence ID is used for data synchronization of multiple meters sharing the same trigger signal Command TRIGger SEQuence DEFault 0 16777215 Default 0 Query none Trigger Bus Sets the trigger bus participation mode that is bussed or not bussed The query gets the trigger bus participation mode Command TRIGger BUS PMODe BUS NBUS Query TRIGger BUS PMODe Reply BUSINBUS This commend is used to designate if the device participates in the trigger bus The designated mode must match the physical trigger bus configuration Bus Control Position Gets the trigger bus control position that is master or slave Command None Query TRIGger BUS POSition Reply MAST SLAV Bus position is determined by the physical position of devices stacked in a trigger bus configuration which is one master
53. ions on how to prepare a product for shipping are described under Product Shipping Instructions p 62 Table 17 Coherent Service Centers USA 1 800 343 4912 503 454 5777 info_service Coherent com 49 6071 968 0 49 6071 968 499 info service Coherent com 503 454 5700 503 454 5777 info_service Coherent com 61 EnergyMax USB RS User Manual Product Shipping Instructions To prepare the product for shipping to Coherent 1 Contact Coherent Customer Service refer to Table 17 p 61 for a Return Material Authorization number Attach a tag to the product that includes the name and address of the owner the person to contact the serial number and the RMA number you received from Coherent Customer Service Position the protective cap over the sensor Place the sensor in the original shipping carton and then situate the foam cutout over the sensor to hold it in place during ship ment If the original packing material and shipping carton are not available obtain a corrugated cardboard shipping carton with inside dimensions that are at least 6 in 15 cm taller wider and deeper than the sensor The shipping carton must be constructed of cardboard with a minimum of 375 Ib 170 kg test strength Wrap the sensor with polyethylene sheeting or equivalent material and then cushion the sensor in the shipping carton with packing material or urethane foam on all sides between the carton and the sensor Allow 3 in
54. measurement at the time of the query No reply is transmitted if no measurement has been recorded Command none Query READ Reply lt last measurement record gt The last measurement record is composed of comma delimited data items generated at the same instant The data items presented including a flags item vary depending on the measurement and statistics modes and the data items selected as shown in Table 13 and Table 14 below 50 Host Interface Table 13 Measurement Data Record Formats Statistics Mode Off MEASUREMENT MODE MEASUREMENT RECORD FORMAT lt power gt lt period gt lt flags gt lt sequence ID gt lt energy gt lt period gt lt flags gt lt sequence ID gt Table 14 Measurement Data Record Formats Statistics Mode On MEASUREMENT MODE MEASUREMENT RECORD FORMAT Watts lt power gt lt mean gt lt min gt lt max gt lt stdv gt lt dose gt lt missed gt lt flags gt lt sequence ID gt E E 2 2 Joules lt energy gt lt mean gt lt min gt lt max gt lt stdv gt lt dose gt lt missed gt lt flags gt lt sequence ID gt power is expressed in Watts using the 3 C formatting spec ification lt energy gt and dose are expressed in Joules using the 3E C formatting specification period is expressed in integer microseconds missed is expressed in integer units sequence ID is expressed in integer dimensionless units Statistics
55. nergyMax Sensors Product shipping instructions 64 Publication updates vii Pulse width Linearity 17 Specification 65 Pyroelectric Current and voltage response Technology 14 10 15 Q Quantum EnergyMax sensors R Ratiometric method of optical calibration 61 Recertify once a year 60 Repetition rate Linearity 16 Specification 65 Response spectral 17 Return material authorization number RMA 64 RoHS compliance 1 RS sensors powering 22 10 5 Safety 1 Declaration of Conformity 2 Environmental regulations 1 Service obtaining 63 Shipping instructions product Specifications Diffuse metallic EnergyMax sensor 7 MaxBlack EnergyMax sensor 6 MaxBlack EnergyMax sensor with diffuser 8 MaxUV EnergyMax sensor 9 64 Spectral Absorption of EnergyMax sensor coatings 19 Response 17 Sensitivity of EnergyMax sensors with diffusers 20 Status indicators LED 21 29 Symbols used in this document vii T Technical description 13 Damage thresholds 15 Increasing average power with heat sinks 13 Measurement linearity 16 Pyroelectric technology 14 Spectral response 17 Technology pyroelectric 14 U U S export control laws compliance vii Unpacking and inspection viii W Warranty Extended 62 Limitations 62 Limited 61 Waste Electrical and Electronic Equipment WEEE 2002 1 Wavelength Compensation 18 66 Compensation accuracy 18 Range 6 Wavelength setting 27 66 EnergyMax USB RS User Manual Coherent Inc 4 2011
56. ntinuous 100 Streaming 0 10 33 EnergyMax USB RS User Manual Using the Software 6 Press the Log Data to File folder icon 5 ruso acive Display Inactive 4 m 7 the directory screen appears Shove choose enter file name with Sars Etemp extension for tab delimited CSV E turbo Log File csv extension for comma delimited and then press OK button to dismiss the screen In this example the selected file is Turbo Log File csv 8 Click the OFF ON button to turn ON tubo acive Display Inactive data logging E 9 Click the Start Data Collection button and then turn ON the laser Pee Select Sensor 0438B10R w Start Data Collection Energy During data collection in Turbo mode all of the pulses are saved to the log file and the Turbo Active Display Inactive indicator blinks for every 500 pulses collected All other front panel displays including statistics live display batch counter and the plot window are inactive while Turbo mode is active For detailed EnergyMax PC information refer to the software help inside the application or reference the EnergyMax PC Help file included on the CD 34 Special Topics SPECIAL TOPICS In this section s Understanding the external trigger circuit this page Extending cable length page 36 Understandin g To prevent ground l
57. ognized command query The command or query is not recognized Invalid parameter The command or query parameter is invalid Error 350 is raised when the error queue becomes full Non Queue overflow errors are replaced by Queue overflow errors when there is exactly one available storage location in the error queue No additional errors are added to the error queue if the error queue is full Error 310 is raised when the firmware detects an unexpected or unrecoverable error This error condition includes unrecoverable hardware faults Error 100 is raised when the device receives an unrecognized command or query Error 101 is raised when the device receives a command or query with one or more invalid data parameters Error 102 is raised when the device receives a command or query for which no valid data exists Error Count Query Queries the number of error records in the error queue at the time of the query Command none Query SYSTem ERRor COUNt Reply lt count of error records stored in integer format gt Error Query Queries the next error record s in the error queue More than one error record may be queried using the optional lt error record count gt parameter which must be an integer value A single error record is returned if lt error record count gt is not specified No reply is trans mitted if no error records are available As the meter transmits each error record The error re
58. oltage response is fixed so the calibrated peak voltage of the output is the integrated energy of the laser pulse 253 203 153 Voltage V 4A Current uA Voltage Current 103 53 0 T T T T 3 2000 2400 2800 3200 3600 4000 Time us Figure 4 Pyroelectric Current and Voltage Response Dam age The following table lists the damage threshold for different types of Thresholds EnergyMax sensors at several wavelengths Table 8 EnergyMax Damage Thresholds Capabilities Sheet 1 of 2 DAMAGE THRESHOLD mJ cm WAVELENGTH nm NENNEN J 25MB LE 40 7 7 4 5 0 J 10MB HE 40 17 170 140 25 500 15 EnergyMax USB RS User Manual Table 8 EnergyMax Damage Thresholds Capabilities Sheet 2 of 2 DAMAGE THRESHOLD mJ cm J 10MB LE aaa J 25MUV 193 200 260 J 25MT 10K HZ 150 200 200 390 50 9 1 Not applicable for Quantum EnergyMax sensors Measurement Linearity Energy Linearity Repetition Rate Linearity Average Power Linearity Coherent has designed the EnergyMax sensor line to greatly diminish several linearity effects common in pyroelectric energy sensors The outcome of this design effort is enhanced performance that is now better than at any time in the history of pyroelectric pulsed laser energy measurement Energy linearity across the entire specified
59. oop noise from interfering with accurate measurement the external trigger input is optically isolated from the the External EnergyMax internal ground by an optocoupler The following figure gy Trigger Circuit shows a simplified schematic of the external trigger input circuitry 3 3V SMB Receptacle Optoisolator 499 Q o3 3010 To trigger 3 3V CMOS logic gt 12 5 mA m 85 Figure 10 External Trigger Input Circuitry To provide proper functionality of the circuit the source of the external trigger pulse should meet the following requirements Logic Active high or low Select corresponding triggering edge using the TRIG SLOP POS or TRG SLOP NEG commands Level 5V TTL or CMOS logic Width gt 1 us Load current gt 12 5 mA 35 EnergyMax USB RS User Manual Extendin g USB sensors The EnergyMax USB cable is 3 meters in length from the sensor to the electronics module and approximately 1 meter in Cable Leng th length from the electronics module to the USB or RS 232 connector 3 meters uncoiled length 1 meter uncoiled length Figure 11 EnergyMax USB Standard Cable USB hubs can be employed to extend the length of the cable The USB standard allows for up to five hubs connected in series with 5 meter cables connecting the hubs thus providing a maximum range of 27 5 meters There are also active 5 meter USB extension cables on the market that perform as if they were a USB hub but for just a
60. power from a series of pulses Selecting the power measurement mode will change the EnergyMax software to display and trend data based on average power readings Average power is calculated by measuring the energy of the pulses and dividing by the periods between them and thus requires at least two pulses to make a power measurement Each subsequent pulse defines the period for the previous pulse until the last pulse see figure below The last pulse in a pulse burst will not yield a power measurement since the period after the last pulse is indeterminate This method allows more accurate tracking of initial average power transients for pulsed lasers Figure 8 Average Power Diagram When measuring the average power of a laser burst or continuous pulse train the frequency of the pulses must be greater than or equal to 1 Hz and less than or equal to the maximum repetition rate capa 22 Triggering Internal Triggering Mode Operation bility of the pyroelectric sensor Multiple bursts separated by one second or less are treated as a single burst and accordingly the gap between bursts appears as a lower power Short bursts with rep rates greater than 1 kHz may not yield a power measurement EnergyMax sensors can be triggered externally via the Ext Trig connector This is particularly useful in an electrically noisy envi ronment EnergyMax sensors can be set to synchronize with either the positive or negative transition of
61. rly zero Strict quality inspections during many stages of calibration and testing assure a precise and accurate instru ment that is NIST traceable and CE marked The benefit to our customers is that instruments calibrated by Coherent will consis tently perform as expected under their actual use conditions We are a registered ISO 9001 2000 company our products are NIST trace able and our calibration labs are fully ANSI Z540 compliant In addition to the technological advantage we also strive to deliver the best service in the industry with a knowledgeable and responsive staff and rapid turnaround 57 EnergyMax USB RS User Manual Optical Calibration Method EnergyMax NIST Traceable Optical Calibration Recertify Once a Year Calibration Fundamentals Coherent provides a NIST U S National Institute of Standards and Technology traceable calibration certificate with every sensor that is shipped The calibration factor of an EnergyMax USB RS energy sensor specifies the magnitude of the pulse output for one joule optical input Coherent laser power and energy meters are precision instruments capable of delivering very accurate measurements as well as providing many years of useful service To maintain this high level of performance and to ensure compliance with your quality and ISO certification it is important to have your measurement system serviced and recertified once per year Extended use of laser power and
62. rminated by a carriage return decimal 13 Line feed characters decimal 10 are discarded so message terminator flexibility can be attained A command or query is considered incomplete without the terminator The maximum length of any message received by the sensor is limited to 200 bytes All messages sent by the sensor and defined in this section are termi nated by a carriage return and line feed pair 37 EnergyMax USB RS User Manual Host Command The following table gives a brief description of all host commands Quick For detailed information about a specific command go to the page referenced in the right hand column Reference Table 11 Host Command Quick Reference Sheet 1 of 2 SCPI INTERFACE SCPI Common Commands ea D SYSTem COMMunicate SERial BAUD Selects the transmit and receive baud rates together when the 42 device has an RS 232 serial host port SYSTem COMMunicate SERial BAUD Queries the currently selected baud rate Error Record Reporting and Collection SYSTem ERRor COUNt Queries the number of error records in the error queue at the 43 time of the query SYSTem ERRor NEXT Queries the next error record s in the error queue SYSTem ERRor ALL Queries all error records in the error queue at the time of the query SYSTem ERRor CLEar Clears all error records in the error queue Measurement Setup and Control ONFigure MEASure TYPE ONFigure MEASure TYPE Queries the meter measurement mode type gt
63. s the firmware date having the form lt 3 character month name gt lt day of the month gt lt year gt The reply string is not quoted Example identification string Coherent Inc EnergyMax RS V1 3 Jul 10 2009 Note The quotes are not transmitted The system commands and queries access functionality that is exclusive of sensor measurement functions These commands can be sent at any time without affecting a measurement in progress System Restore Restores all user settings to the factory state refer to Table 16 p 54 Command SYSTem RESTore Query none Message Handshaking Selects the state of SCPI message roundtrip handshaking Command SYSTem COMMunicate HANDshaking ON OFF Reply OK if ON is selected otherwise no reply is sent Query SYSTem COMMunicate HANDshaking Reply ON OFF If handshaking is ON Empty commands commands with only whitespace charac ters reply with OK r n Valid commands with valid data reply with OK r n e Valid queries with valid data reply as explicitly defined else where in this section followed by OK Wn 41 EnergyMax USB RS User Manual Error Record Reporting and Collection Valid commands or queries which result in an error reply with ERR lt n gt r n where lt n gt is the error code number refer to Error Record Reporting and Collection p 42 e Unrecognized commands or queries reply with ERR100 r n
64. se of this directive is to minimize the disposal of WEEE as unsorted municipal waste and to facilitate its separate collection Figure 2 Waste Electrical and Electronic Equipment Label EnergyMax USB RS User Manual Declaration of Conformity D141394 Revision Declaration of Conformity We Coherent Inc 27650 SW 95 Ave Wilsonville Oregon USA 97070 declare under sole responsibility that EnergyMax USB and EnergyMax RS meet the intent of Directive 2004 108 EC for Electromagnetic Compatibility Compliance was demonstrated per testing to EN61326 1 2006 Electromagnetic Compatibility Product Family Standard for Measurement Control and Laboratory Equipment to include the following test specifications as of August 2009 EN55011 2007 Class A Radiated Emissions EN55011 2007 Class A Conducted Emissions EN61000 3 2 2000 Powerline Harmonics EN61000 3 3 1995 A1 2001 A2 2005 Powerline Voltage Fluctuation and Flicker IEC61000 4 2 2001 Electrostatic Discharge Performance Criteria B EN61000 4 3 A1 2008 Radiated Immunity Performance Criteria A EN61000 4 4 2004 Electrical Fast Transient Immunity Performance Criteria B EN61000 4 5 2006 Electrical Slow Transient Immunity Performance Criteria B EN61000 4 6 Ed3 2008 Conducted RF Immunity Performance Criteria A EN61000 4 11 2006 Power Line Dropout JAIR Date hy DiF ctor of Engineering _ 7 Coherent Inc Page 1 of 1 nt LSM Division In
65. specified numeric data items are repre sented as Integer values Non scientific notation floating point values Scientific notation floating point values upper or lower case E For example the following data values are functionally equivalent 31230 31256 0 3 1256E4 31 256E3 3 1256E 4 Unless otherwise specified non numeric data items typically referred to as strings are not quoted Enumerated values must exactly match using the long form short form comparison rules defined under the SCPI Standard The SCPI Standard specifies a standard set of common commands All common commands and queries start with an asterisk Reset Command RST Resets all operational parameters to their power on states Reset does not affect calibration settings Command RST Query none 40 System Options Host Interface Identification Query IDN Queries the meter identification string such as model name firm ware version and firmware date Query IDN Reply Coherent Inc EnergyMax type lt version gt _ firmware date gt The dash sign separates all fields within the reply string The first field is always Coherent Inc The second field is the product name EnergyMax plus the type USB or RS The third field is the version number having the format V lt major gt lt minor gt lt optional qualifier characters gt The fourth field i
66. that do not have a built in diffuser window Heat sink if ordered optional accessory Advise Coherent immediately of any shortages or damage tefer to Obtaining Service p 61 A Returned Material Authorization RMA will be issued for any damaged sensor tefer to Product Shipping Instructions p 62 Post and Stand Assembly Post Holder TIE e SSF in SHC Screw supplied Hex Key supplied oa Figure 1 Post and Stand Assembly Vili Environmental Regulations ROHS Compliance Waste Electrical and Electronic Equipment WEEE 2002 Safety SAFETY Carefully review the following safety information to avoid personal injury and to prevent damage to this product or any equipment connected to it There are no user serviceable parts in Coherent EnergyMax sensors For service information refer to Obtaining Service p 61 Do not operate the system if its panels are removed or any of the interior circuitry is exposed Do not operate the system in wet or damp conditions or in an explosive atmosphere Do not operate the system if there are suspected failures Refer damaged units to qualified Coherent service personnel These Coherent products are RoHS EU Restriction of Hazardous Substances compliant The European Waste Electrical and Electronic Equipment WEEE Directive 2002 96 EC is represented by a crossed out garbage container label Figure 2 below The purpo
67. the OK button to complete setup 18 Press the Reset button in the Front panel 19 Click the Start Data Collection button and then turn ON the lasers 20 View the ratiometric data being trended This data can be logged to a file using the Log Data to File dialog 31 Operation 5 Configuration Setup xi Select Sensor 2 Sensor 1 a Sensor 2 b 0438B10R 0388B10R cancer Eormula Help Energy No data Wavelength nm EneroyMax PC File Settings View Help Select Sensor 0438B10R w Start Data Collection Energy Trending Histegrem Tuning Synchronized Trending 1 06E 6 850 65E 9 645 30E 9 439 95 9 a 234 60E 3 2925E 9 V Autoscale Samples EnergyMax USB RS User Manual Tutorial Turbo Mode Procedure Using Turbo Mode At high repetition rates above approximately 1 to 2 kHz the sensor is able to capture and measure every single pulse as well as send data to the computer Most dual core and quad core computers faster than 2 GHz can process the data and analyze every pulse even at high repetition rates using the full graphical and statistical features of the software As the repetition rate increases however the soft ware will eventually reach a point at which it may miss some of the pulses When that happens there are two options 1 Enter a Decimation factor a decimation factor of 2 sends 1 2 of the
68. this external signal When a reliable external trigger is not available an EnergyMax sensor can be set to use its own internal circuitry to extract a trigger from the incoming signal This is called Internal Triggering discussed below Internal triggering refers to finding a trigger automatically from the incoming signal The trigger level setting helps filter out low level noise that can cause false triggering from the sensor The trigger level is a percentage of the energy level listed for the measurement range that is currently selected So if a measurement range of 50 mJ is selected in the software and a trigger level of 1 is entered the trigger threshold will be 0 5 mJ This means that any values above 0 5 mJ will be captured as a valid reading and any values below 0 5 mJ will be ignored as noise Using the combination of the measurement range selection and the trigger level setting can help the sensor accu rately measure without picking up noise or false triggers in the read ings 23 EnergyMax USB RS User Manual 15 10 8 Trigger Level Setting the Wavelength 5 In the following figure the internal trigger threshold has been set to 8 shown as a dashed line Pulse A will definitely not generate a reliable trigger Pulse B may generate a trigger but not reliably Pulses C and D will definitely generate reliable triggers Definitely will not trigger May trigger but not reliable Definitely will tri
69. tions 55 EnergyMax USB RS User Manual 56 Calibration and Warranty CALIBRATION AND WARRANTY Coherent Calibration Facilities and Capabilities In this section Coherent calibration facilities and capabilities this page Optical calibration method page 58 Limited warranty page 59 Extended warranty page 60 Warranty limitations page 60 Obtaining service page 61 Product shipping instructions page 62 As the largest laser manufacturer in the world Coherent has been able to build state of the art calibration facilities containing the widest possible range of laser types and technologies This enables us to perform instrument and sensor calibration under virtually any combination of wavelength power and operating characteristics Sensors are calibrated against NIST traceable working standard sensors which are in turn calibrated against NIST calibrated golden standard sensors These working and golden standards are main tained with the utmost care recalibrated annually and verified even more regularly We maintain multiple NIST calibrated standards at many laser wavelengths to support the growing calibration needs of our customers Optical calibration is a core competency at Coherent and we strive to continually improve our methods precision and repeatability Additionally most of the calibrations are performed with highly automated systems thus reducing the possibility of human error to nea
70. troduction Description DESCRIPTION In this section Introduction this page Product overview page 3 Sensor overview page 5 MaxBlack EnergyMax sensors page 6 Diffuse Metallic EnergyMax sensors page 7 MaxBlack EnergyMax sensors with diffusers page 8 MaxUV EnergyMax sensors page 9 Quantum EnergyMax sensor page 10 EnergyMax USB RS sensors contain miniaturized meter electronics that are integrated within the sensor cable The entire range of Coherent high performance EnergyMax sensors is available in this form factor with either RS 232 or USB 2 0 connectivity enabling the measurement of the energy per pulse or average power of pulsed lasers from the nanojoule to the multi joule level over wavelengths from the deep ultraviolet through the far infrared and from single pulses to repetition rates of 10 kHz with measurement of every pulse Multiple EnergyMax sensors can share a trigger internal or external for synchronized operation such as to enable pulse ratio metry Furthermore EnergyMax USB RS sensors significantly reduce the overall cost of ownership by eliminating the need to purchase a sepa rate more costly meter with each sensor and by reducing annual calibration costs associated with integrating the electronics into the sensor These products are also useful in the lab and research setting because they can be used as standalone instruments with a computer or integrated smoothly into any
71. ts the default wavelength Query SYSTem INFormation WAV Elength Reply default wavelength in nm All commands and queries contained in this section are used exclu sively by the factory for calibration purposes Error 100 will be raised if a valid password has not sent since the last reset cycle if any command or query contained in this section except the password command is received The Data Streaming Transmission Interface is an out of band inter face in which data messages are transmitted from the sensor to the host only Gating of the data streaming transmissions is controlled by the INITiate ABORt command described under Data Streaming Transmission Interface Gating p 52 Data streaming transmission messages are ASCII formatted but not strictly The high bit mask 0x80 which is always set for all bytes of all data streaming transmission messages including the termina tors allows host software to easily differentiate between data streaming transmission messages and SCPI reply messages The host may operate using the rule that if the high bit is set on any byte received from the sensor it is part of a data streaming transmission message Data streaming transmission messages are immediately sent to the host in ASCII text form as pulse measurements are generated Each message conforms to the last measurement data record format as described under Last Data Record Query p 50 but with the high bit set in
72. ual Query CONFigure STATistics RMOde Reply MAN AUT Batch Initiation and Termination Start a New Batch Terminates the current statistical batch and starts a new one Command CONFigure STATistics STARt Query none The command is ignored if statistics mode is off Stop a Batch 47 EnergyMax USB RS User Manual Trigger Parameters Terminates the current statistical batch if a batch is in progress Command CONFigure STATistics STOP Query none The command is ignored if statistics mode is off or a batch is not in progress Trigger Source Selects the trigger source Command TRIGger SOURce DEFault INTernal EXTernal Default INTernal Query TRIGger SOURce Reply INT IEXT The trigger source setting has no effect on devices positioned as slaves in trigger bussed configurations All slaves receive their trig gers from the trigger bus Internal Trigger Level Sets the trigger level expressed as a percentage of full scale capa bility Command TRIGger LEVel DEFault 0 01 30 0 Default 5 Query TRIGger LEVel Reply 0 01 30 0 The trigger level setting has no effect when external triggering is selected or on devices positioned as slaves in trigger bussed config urations All slaves receive their triggers from the trigger bus External Trigger The external trigger settings has no effect when internal triggering is selected or on devices that are positioned as slaves in trigger bussed configurat
73. urement data is selected for processing ranging from as frequent as 1 pulse processed per 1 measured to as infrequently as 1 pulse processed per 99999 measured Pulse processing includes statistics processing and transmission output Command CONFigure DECimation DEFault 1 99999 Default 1 Query CONFigure DECimation Reply 1 99999 Aperture Diameter Sets the aperture diameter Command CONFigure DIAMeter lt DEFault aperture diameter in mm gt Default 10 mm Query CONFigure DIA Meter Reply lt aperture diameter in mm gt Wavelength Sets the current wavelength which is committed to persistent storage when it is changed If the requested wavelength is greater than the upper wavelength limit the current wavelength is set to the upper wavelength limit Likewise if the requested wavelength is less than the lower wavelength limit the current wavelength is set to the lower wavelength limit The minimum and maximum allowed wavelength may also be named as data arguments The query gets the current maximum or minimum allowed wavelengths depending on the optional query data argument Command CONFigure WAVElength MINimum MAXimum requested wavelength in nm gt Query CONFigure WAVElength MINimum MA Ximum Reply if MINimum MAXimum is not specified granted wavelength in nm Reply if MAXimum is specified allowed maximum wavelength in nm Reply if MINimum is specified allowed minimum wavelength in
74. vice If the product cannot be recertified due to damage beyond repair parts obsolescence or other reasons the Customer may be informed that an Extended Warranty program is not available for the Product If the Product fails and is returned to the Company within one year following the date of recalibration and recertification service the Company will at its option repair or replace the Product or any component found to be defective If the Product must be replaced and the Product is no longer available for sale Coherent reserves the right to replace with an equivalent or better Product This warranty applies only to the original purchaser and is not transferable The foregoing warranties shall not apply and Coherent reserves the right to refuse warranty service should malfunction or failure result from Damage caused by improper installation handling or use Laser damage including sensor elements damaged beyond repair Failure to follow recommended maintenance procedures Unauthorized product modification or repair Operation outside the environmental specifications of the product Coherent assumes no liability for Customer supplied material returned with Products for warranty service or recalibration THIS WARRANTY IS EXCLUSIVE IN LIEU OF ALL OTHER WARRANTIES WHETHER WRITTEN ORAL OR IMPLIED COHERENT SPECIFICALLY DISCLAIMS THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE IN N

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