IMS User Manual - Newport Corporation
Contents
1. e UK 13 70 348 Bl 2 Interface plate position 5 of the EQ180 bracket Y ND Newport cea este 17 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages i 0 Maintenance 11 2 11 3 EDH0183En1040 06 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The ILS stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The ILS stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your ILS stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disa2. Sub D25 male Connection Connection Connector M IMSPP M IMSCC amp M JMSCCHA 9 ee N C N C 10 5 N C N C 11 NC N C 12 N C N C 1 5 Phase 1a N C 2 i i JL N C 3 c3 E Phase 1b N C 4 N C N C js 5 Phase 2a Motor q_a Motor 7 i Phase 2b Motor 8 E T E a E a T N C Motor Y 14 9 Ground Ground 1 16 c 0 V logic 0 V logic 13 X X X X Mechanical Zero 1 Mechanical Zero 19 Y E Y i Y Encoder Phase A Encoder Phase A 23 1 i Lo Encoder Phase A Encoder Phase A 20 Y Y Y Y Encoder Phase B Encoder Phase B 24 l i Encoder Phase B Encoder Phase B 15 Index Pulse Index Pulse 25 e 75 eE 628 We Index Pulse Ae Index Pulse s 17 i 1 End of Run End of Run nee GNE X LX 3 End of Run 2 End of Run 2 21 m 5 V Encoder 5 V Encoder 22 X X z F X X 0 V Encoder 0 V Encoder Connector i NEN i ___ Connector Connector Cap Cap Cap The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Newport Stage Mechanical Zero Stage End of Run lin Max 10 mA lin max 16 mA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 kQ 0 25 W resistor must be connected between pins 13 and 21 Encoder and Index Pulse ar
3. 3 3 2 Mechanical Specifications sus 4 3 3 Load Specification Definitions RRRRLRLRLRL 4 3 4 Load Characteristics and Stiffness sese D STONES URSINI D A0 DVE ea niaaa ee 6 4 1 Stepper Drive Version sisccnsscsacspnvacedassedacesonssincnsapbaaesnacanndeeaesseseseecensaubhedees 6 4 0 DC Servo Drive Versions ss 6 SA OO gan Eo area Ee doe rte 7 5l UEDOUP Motor CharACIeriISTiCS nsc encre 7 5 2 Command Signals for the Stepper Motor 7 5 3 UE51182 Motor CharacteristiCcs 7 5 4 Command Signals for the DC Motor ss 1 SES a dius ier tT Um 8 5 6 Feedback Signal Position eto ere pao os xs es s desuo t oL qo Dispo o bus uus 8 D 2 SNNT et EN 9 6 0 Connection to Newport Controllers 10 6 1 Warnings on Controllers oie sete etna oe re rh ERe EUR E PEE bbs UE Eae des ae 10 oA C ONTECO le dedu m n Nep REM P MEUS MED eire 11 0 11 64 MMCABELE 2 Cable nre th FEY EU pen ee ee vx esae aae sve esee so dus es ou vs 11 6 5 MCAB 3 Cable nn E RbrPEEU Rr AES Ur Fa IIS Ane ae esque on 12 CY Newport Experience Solutions iii EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages EDH0183En1040 06 15 7 0 Connection to Non Newport Electronics 13 re eode E 13 8 0 Dimensions 14 Od ON
4. RoHS Compliant QAD Newport EDH0183En1040 06 15 2 Experience Solutions IMS Series High Performance Long Travel Linear Stages m Characteristics 5 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest i
5. EOR Limit Mechanical i Zero i Index Pulse ALLLEBLLLLLLEEELL LL T T Index Pulse l lt Stage Travel Range gt Motion Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source 5 6 Feedback Signal Position Encoder PhaseA Encoder Phase A Encoder Phase B Encoder Phase B Direction amp Motion gt Direction The incremental sensor consists of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport Stage Encoder Phase Pin 19 Encoder Phase A Pin 23 Encoder Phase B Pin 20 Encoder Phase B Pin 24 i Output Signals Index Pulse Phasel 4 Pin 15 Index Pulse Phase Pin 25 n 5 V 5 Encoders ed w Power Supp CY Newport EDH0183En1040 06 15 8 Experience Solutions IMS Series High Performance Long Travel Linear Stages Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circui
6. 1 I Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 2 To obtain arcsec units divide urad value by 4 8 M CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 um 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings M IMS CC M IMS PP M IMS CCHA Specified Speed mm s 100 200 Specified Acceleration mm s 400 600 Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D 90 D Cantilever distance QW Newport EDH0183En1040 06 15 4 Experience Solutions IMS Series High Performance Long Travel Linear Stages ND Newp ort Experience Solutions 3 4 Load Characteristics and Stiffness 3 9 Stage Weights Weights indicated into the below table are average values Cz Normal centered load capacity Cx Cx Axial load capacity kax Compliance in roll kay Compliance in pitch kaz Compliance in yaw Q Off
7. High Performance Long Travel Linear Stages RAN Te O OHS r ce Compliant NC USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed IMS Series High Performance Long Travel Linear Stages Warranty A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used EDH0183En1040 06 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified loa
8. 400 500 and 600 mm travel ranges RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the IMS stage M IMS400 translation stage CY Newport Experience Solutions 1 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages 20 Description The IMS Series linear stage complements the M ILS Series by providing longer linear travel ranging from 300 600 mm The stages feature robust designs with high performance but without high cost making them cost effective solutions for precision industrial and laboratory applications Using the same industry proofed technology as the ILS Series the IMS series features a FEM optimized aluminum extruded body that is highly stiff while minimizing the bending effect caused by different thermal expansion coefficients of the aluminum body and the steel rails Smooth running recirculating ball bearing slides with ball separators provide accurate linear motion and avoid ball cage migration found on linear ball bearings or crossed roller bearings A highly stiff backlash free 5 mm pitch ball screw ensures rapid movements with fast step and settling times while minimizing heating and extending the lifetime of the stage Position measurements are read on a 4000 pts rev rotary encoder mounted directly on the ball screw to avoid screw coupling errors For more demanding precision positioning requirements the
9. 23 78 96 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MCAB 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MCAB 5 7 m MCAB 7 or 10 m MCAB 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk QW Newport 1 2 Experience Solutions IMS Series High Performance Long Travel Linear Stages Dn Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a M IMS stage when it is used with non Newport controllers WARNING Newport guarantees CC compliance of the M IMS stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a M IMS stage is used with non Newport controllers
10. IMS Series is available with a highly interpolated linear scale providing 0 1 um resolution feedback The completely closed design of the IMS Series with an upper rigid cover prevents damage to the drive train underlining its robustness and long lasting values M IMS stages also feature a motor side mounted origin for Two M IMS stages and one EQ180 repeatable initialization limit switches to prevent over travel and bracket in an XZ configuration elastomeric end of run dampers for smooth emergency braking For optimal performance we recommend the use of our motion controllers The IMS Series stages are supplied with a 5 meter cable for connection to our motion controllers 2 1 Design Details Base Material Extruded Aluminum Bearings Double row recirculating ball bearings with caged balls Drive Mechanism Backlash free ball screw Drive Screw Pitch mm 5 Feedback CC PP Screw mounted rotary encoder 4 000 pts rev index pulse CCHA Linear steel scale 20 um signal period 0 1 um resolution Limit Switches Optical Origin Optical approx 8 mm from motor side limit Motor CC CCHA DC servo motor UE51182 PP 2 phase stepper motor UE56UP 1 Full Step 20 Encoder pulses In order to close the loop on the encoder it is needed to drive these motors in micro step modus with at least 20 micro steps per full step Cable 5 m long motor cable included NOTE This product complies with the RoHS directive Restriction of Hazardous Substances
11. NS SAS ea esse op LUE ee Ee eden 14 8 2 M IMS Stages Top Plate Interface 15 8 3 M IMS Stages without Top Plate Interface 15 9 0 XY Assemblies 16 10 0 Accessory EQ180 Bracket 17 11 0 Maintenance 1 seen 18 LET DVT a E A ET m MEME 18 IB RED SR RE ER RE E 18 IB CARDIO E E E 18 SEVICE FOT E E E D E E RS 19 QAD Newport iv Experience Solutions IMS Series High Performance Long Travel Linear Stages EC Declaration of Conformity PR LP TR CR CR CS ER LR QT RSS NRA AIN lt gt ORES PX w CSSS gt e lt IMS Series EC Declaration of Conformit following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du bois sauvage F 91055 Evry FRANCE Hereby declares that the machinery e Description IMS Function High Performance Translation stages Models M IMS300 CC CCHA PP M IMS400 CC CCHA PP M IMS500 CC CCHA PP M IMS600 CC CCHA PP the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2004 108 EC relating to electro magne
12. UIDISTANT AT 60 DEPTH 31 8 179 2 0 3 0 4 0 50 2 48 75 3 62 100 6 0 63 92 150 Y 4 CLEARANCE HOLES FOR T M6 SCREW BACK SIDE 4 HOLES M4 THD Tom TU ON 3 94 x2 95 100 x 75 lt i DEPTH 31 8 37 HOLES 1 4 20 M6 THD 2 48 gt DEPTH 39 10 63 4 0 e 100 T 6 14 i 1 56 gt DIMENSIONS IN INCHES MILLIMETERS 8 3 M IMS Stages without Top Plate Interface Sometimes it is necessary to remove the top plate interface of a M IMS stage to make an XY assem bly for example To do that just unscrew the 4 CHc M6 x 0 63 16 on sqr 5 91 150 screws at the 4 corners of the plate with the wrench supplied with the stage Both IMS and M IMS stages will then have the same following interfaces o OO i 4 HOLES M6 THD ON SOR 5 91 150 USABLE DEPTH 47 12 4 HOLES 1 4 20 THD ON 6 00 x 5 00 152 4 x 127 0 L USABLE DEPTH 47 12 oO oO 7 09 b 180 gi QW Newport Experience Solutions 1 5 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages m XY Assemblies ATTENTION All configurations of XY travel ranges are possible However it is recommended to place the IMS stage with the longer travel range at the bottom T
13. center load for stages with a typical drive unit installed M IMS300 M IMS400 M IMS500 M IMS600 3 meter MMCABLE 3 Cable 3 meter MCAB 3 Cable Weight Ib kg 37 4 17 0 41 0 18 7 45 0 20 3 48 4 22 0 1 54 0 7 1 32 0 6 600 N 30 N 1 urad Nm 0 2 urad Nm 1 urad Nm Oy Qy Cz 1 D 90 and Qy must be Cx D cantilever distance in mm between the center of the mass of the load and the bearings center Distance between top surface and bearings center 66 mm The weight variation between drive units is not very significant EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages EDH0183En1040 06 15 4 1 4 2 m Drive Stepper Drive Version One stepper motor configuration is available M IMS PP This version is equipped with a 4000 pts rev rotary encoder located direct ly on the screw and is driven in micro step Micro Step Drive This is the drive for stepper or pulse driven motors transmitted by the electronic unit which entails a theoretical movement of the motor by one fraction of a full step For these translation stages the micro step is equiva lent to 1 20 of the full step Stepper Motor Performance Specifications Resolution Speed um mm s MSIE M IMS PP 1 25 100 UE56UP DC Servo Drive Versions Two DC motor configurations are available e One version equipped with a 4000 pts rev rotary encoder located direct
14. d Carriage speed higher than specified speed Improper grounding Connectors must be properly secured 3 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings QW Newport ii Experience Solutions IMS Series High Performance Long Travel Linear Stages Table of Contents VET IN PR M ii EC Declaration of ConfOrtmilty cseccdasccancussesvsondessesadvsseovesscasteedsesensecntsnosevaseseeeosess V Denniiiogs and VOI se nana ne eee eo OU TUE MERC vi Warnings PE ta pesssiqiesmdbII I tuU TRUPH FUNERIS Ever UM MENU AIE SEAI AEAT vii COS a at de ere en E A dat ne eee et AN viii 1 0 Introduction 1 20 D CO ee ee E er 2 USE alb cuc 2 3 0 Characteristics esee 3 SP MED nios A p
15. e differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 QW Newport Experience Solutions 1 3 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages Dimensions 8 1 M IMS Stages MODEL SHOWN IMS300 DIMENSIONS IN INCHES AND MILLIMETERS 75 2 1 81 30 L2 gt 5 91 150 mad SUB D25M CONNECTOR 5 91 150 n1x2 CLEARANCE HOLES FOR M6 THD SCREW n2x2 CLEARANCE HOLES FOR 1 4 20 THD SCREW 5 0 127 EDH0183En1040 06 15 5 0 127 gt lt 5 0 127 gt lt MODEL METRIC nl n2 TRAVEL L1 L2 M IMS300 4 4 11 81 300 26 30 668 20 20 513 M IMS400 4 4 15 75 400 30 24 768 24 13 613 M IMS500 4 6 19 69 500 34 17 868 28 07 713 M IMS600 6 6 23 62 600 38 11 968 32 01 813 QW Newport Experience Solutions IMS Series High Performance Long Travel Linear Stages 8 2 M IMS Stages Top Plate Interface 5 HOLES M5 THD ON 96 85 174 5 HOLES M5 THD 95 39 137 EQUIDISTANT AT 60 EQUIDISTANT AT 60 5 HOLES M4 THD DEPTH 35 9 DEPTH 35 9 ON 93 62 92 EQ
16. he maximum travel range of the top level IMS stage depends on the cantilever load and dynamic specifications to reach FIXING OF STAGES 4 CHC M6 x 35 SCREWS SCREWING TORQUE 7 N M CY Newport EDH0183En1040 06 15 1 6 Experience Solutions IMS Series High Performance Long Travel Linear Stages 10 0 Accessory EQ180 Bracket Newport s EQ180 bracket to order separately is ideal for mounting our IMS Series of linear stages and RV120 or RV160 rotation stages for stable and stiff muti axis positioning systems INTERFACE PLATE m E 15 4 HOLES 9 26 6 6 ON SQR 5 91 150 ad 9 HOLES M5 THD UE US URN poy DEPTH 47 12 0685 6 69 74 748 T 170 190 02 36 60 00 6 0 0 0 0 e Y 1 18 gt 30 lt p E 1 97 50 a 5 91 150 5 91 150 r o T le 5 91 x F 150 5 91 E 150 E o o d e 5 91 150 3 POSITIONS 5 91 6 10 155 150 13 70 348 J o 21 85 555 2x4 HOLES M6 THD DEPTH 12 4 92 2x4 HOLES M6 THD DEPTH 12 125 Y NM A n PEN 7 54 191 5 5 91 150 gt
17. in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user CY Newport EDH0183En1040 06 1 5 vi Experience Solutions IMS Series High Performance Long Travel Linear Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage i
18. ly on the screw M IMS CC e One version equipped with a and linear scale M IMS CCHA DC Motor Performance Specifications Resolution Speed um mm s MOTO M IMS CC 1 25 200 UE511S2 M IMS CCHA 0 1 QW Newport 6 Experience Solutions IMS Series High Performance Long Travel Linear Stages m Motor 5 1 UE56UP Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport C Phase A 2 mH Utilization UE56UP 1 8 2 2 0 77 1 58 Micro Step 5 2 Command Signals for the Stepper Motor Phase 1 Direction Phase 2 Direction amp Motion gt Direction 5 3 UE511S2 Motor Characteristics Motor Nominal Max RMS Max Peak Resistance Inductance Voltage V Current A Current A Q mH UE511S2 48 2 4 1 57 1 04 5 4 Command Signals for the DC Motor Motor v Motor v Motor v Motor v Displacement gt Direction Direction Displacement Direction In the above drawings Motor signal is referred to Motor signal D When the stage moves in Direction the Motor voltage is higher than Motor voltage 2 When the stage moves in Direction the Motor voltage is lower than Motor voltage CY Newport Experience Solutions 1 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages 5 5 Sensor Position Home Position EOR Limit LLL i
19. ncrement that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com CY Newport Experience Solutions 3 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages 3 2 Mechanical Specifications PP CC HA Travel Range mn 300 400 500 and 600 MIM um 1 25 0 2 Uni directional Repeatability um 125 0 5 Bidirectional Repeatability um 2 5 or 1 25 1 or 0 5 On Axis Accuracy um IMS300 10 or 5 8 or 4 IMS400 12 5 or 6 25 11 01 35 5 IMS500 15 or 7 5 12 5 or 6 25 IMS600 20 or 10 15 or 7 5 Maximum Speed mm s 100 200 200 Pitch 10 urad IMS300 150 or 75 IMS400 150 or 75 IMS500 150 or 75 IMS600 250 or 125 Yaw urad IMS300 100 or 50 IMS400 150 or 75 IMS500 150 or 75 IMS600 150 or 75 MTBF h 20000
20. nder the following circumstances e f the power cord or any attached cables are frayed or damaged in any way e f the power plug is damaged in any way e f the unit is exposed to rain excessive moisture or liquids are spilled on the unit e f the unit has been dropped or the case is damaged e f you suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts QW Newport 1 0 Experience Soluti
21. ons IMS Series High Performance Long Travel Linear Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables Our stages are delivered with a MMCABLE 3 or MCAB 3 3 meter cable according to the M IMS stage you bought This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers The cable supplied with your M IMS stage is given in the following table Stages Supplied Cable M IMS PP MMCABLE 3 M IMS CC MCAB 3 M IMS CCHA 6 4 MMCABLE 3 Cable 2 60 66 gt DISCONNECTED LOCKING KNOBS 7 amp J STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 97 50 CABLE IN MOTION 24 72 120 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable F
22. or applications where the standard 3 meter cable MMCABLE 3 included with your rotation stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application CY Newport Experience Solutions 1 1 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages 6 5 EDH0183En1040 06 15 These cables are specially shielded and terminated with Newport s standard SUB D25 connectors They are available in 5 m MMCABLE 5 7 m MMCABLE 7 or 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the rotation stages 25 PIN SUB D lt FEMALE 25 PIN SUB D 2 1 MALE 54 E1050A T COD 5V T AND MILLIMETERS DIMENSIONS IN INCHES This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 V coming from the controller through the long cable MCAB 3 Cable lt 2 28 58 DISCONNECTED LOCKING KNOBS gt amp J STAGE SUB D25 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE 21 50 38 CABLE IN MOTION
23. s not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit CY Newport Experience Solutions vii EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum en
24. ssemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your ILS stage to Newport once a year for recalibration to its original specifications T QAD Newport Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems CY Newport Experience Solutions 1 9 EDH0183En1040 06 15 Newport Experience Solutions Visit Newport Online at www newport c om North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
25. tic compatibility was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 February 2015 Dominique DEVIDAL Quality Director Exper ience Solutions V EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result
26. ts to use are 26LS32 or MC3486 5 7 Pinouts The SUB D25 connection for the M IMS stages is given in the following table M IMS PP M IMS CC amp M IMS CCHA UE56UP UE51182 1 Phase la 1 N C 2 N C 2 N C 3 Phase 1b 3 N C 4 N C 4 N C 5 Phase 2a 5 Motor 6 N C 6 Motor 7 Phase 1b 7 Motor 8 N C 8 Motor 9 N C 9 N C alo 5 1 10 N C 10 N C E o 11 N C 11 N C 12 N C 12 N C x 13 Mechanical Zero 13 Mechanical Zero T 14 Shield Ground 14 Shield Ground 15 Index Pulse I 15 Index Pulse I 5 O gt 16 0 V logic 16 0 V logic 17 End of Run 17 End of Run 18 End of Run 18 End of Run 19 N C 19 Encoder Phase A 20 N C 20 Encoder Phase B 21 N C 21 Encoder Power 5 V 22 N C 22 0 V Encoder 23 N C 23 Encoder Phase A 24 N C 24 Encoder Phase B 25 Index Pulse I 25 Index Pulse I QW Newport de 9 EDH0183En1040 06 15 IMS Series High Performance Long Travel Linear Stages m Connection to Newport Controllers 6 1 EDH0183En1040 06 15 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug u
27. vironment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year CY Newport EDH0183En1040 06 15 viii Experience Solutions IMS Series High Performance Long Travel Linear Stages High Performance Long Travel Linear Stages IMS Series m Introduction This manual provides operating instructions for the stage that you have purchased in the IMS Series e M IMS PP e MJIMS CC e MJIMS CCHA IMS Series linear stages 500
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