4155C Data Sheet
Contents
1. 10s 480ccs sampling interval lt 2ms 0 5 100 s 2ms sampling interval Stress Force Characteristics SMU VSU and PGU output can be forced for the user specified period Stress time set range 5000s to 31 536 000s 365 days Resolution 100s 500 s stress time 10s 10ms 10s lt stress time 31 536 000s Burst pulse count 1 65 535 PGU only Trigger FIM ALSEDIAL SLD Avsteta a maba VAKI SWCCp Sweep type linear or logarithmic Sweep direction Single or double sweep Hold time Initial wait time or wait time after VAR is set 0 to 655 35s with 10ms resolution Delay time Wait time from VARI step to the start of the measurement 0 to 65 535s with 100 s resolution Page 6 Arithmetic and Analys Functions Arithmetic Functions User Functions Up to six USER FUNCTIONS can be defined using arithmetic expressions Measured data and analyzed variables from graphics analysis marker cursor and line data can be used in the computation The results can be displayed on the LCD Arithmetic Operators LGT logarithm base 10 LOG logarithm base e EXP exponent DELTA DIFF differential INTEG integration MAVG moving average SQRT ABS absolute value MAX MIN AVG averaging COND conditional evaluation Physical Constants Keyboard constants are stored in memory as follows q Electron Charge 1 602177 E 19 C k Boltzman s Constant 1 380658 E 23 g Dielectric C2. Windows 95 Format Tree structured function panel Panel mode for hardware configura tion and manual parameter setting Parameter mode for variable definition and I O configuration Accessory Specifications Specification Condition The supplemental information and typical PGU port signal transfer charac teristics wet bulb temperature 2Y C Ut not using floppy disk drive Storage 5 to 90 RH non condensing and wet bulb temperature 39 C Altitude Operating 0 to 2 000 m 6 561 ft Storage 0 to 4 600 m 15 091 ft Power requirement 90V to 264V 47 to 63 Hz Maximum VA HP 4155B or 4156B 450VA HP 41501B 350 VA Regulatory Compliance EMC EN55011 1991 Group 1 Class A EN50082 1 1992 Safety CSA C22 2 NO 1010 1 1992 TEC 1010 1 1990 A2 EN61010 1 1993 Dimensions HP 4155B and 4156B 235mm H 426mm W 600mm D HP 41501B 190mm H 426mm W 600mm D Weight approx HP 4155B and 4156B 21kg HP 41501B 16kg option 412 HPSMU 2 PGU HP 4155B and HP 4156B Furnished Accessories Triaxial cable 4 ea HP 4155B Kelvin triaxial cable 4 ea HP 4156B Coaxial cable 4 ea Interlock cable 1 ea Keyboard ea User manual set Sample application program disk 1 ea Sample VEE program disk ea VXIplug amp play drivers disk for the HP 4155B amp HP 41568 1 ea VXIplug amp play drivers disk for the HP E5250A 1 ea Page 9 HP 16442A Test Fixtui entries in the following specif
3. 3 Voltage measurement input resistance current source output resistance 10 inA range Current compliance setting accuracy for opposite polarity InA to 10nA range V I setting accuracy 12 of range 100nA to 100mA range V I setting accuracy 2 5 of range Current mA 2 40 100 Voltage V Page 4 HP 41501B SMU and Pulse Generator Expander HPSMU High Power SMU Specifications Voltage Range Resolution and Accuracy HPSMU Voltage Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Current 2V 100 V 0 03 900 lt V 2 V 0 02 700 lt V 1A 20V ImV 0 03 4mV 20xV 0 02 2mV 1A 40V 2mV 0 03 7mV 40xV 0 02 3mV 500mA 100V 5mV 0 04 15mV 100V 0 03 5mV 125mA 200V 10mV 0 04 30mV 200 V 0 035 10mV 50mA Current Set Set Meas Meas Max Range Reso Accuracy Reso Accuracy Vv 1nA 100fA 0 5 3pA 2fA Vout 10fA 0 5 3pA 2fA Vout 200V 10nA 1pA 0 5 7pA 20fA Vout 10fA 0 5 5pA 20fA Vout 200V 100nA 10pA 0 12 50pA 200fA Vout 100fA 0 1 30pA 200fA Vout 200V 410A 100pA 0 12 4 400pA 2pA Vout 1pA 0 1 200pA 2pA Vout 200V 10cA IMA 4 0 12 5nA 20pA Vout 10pA 0 1 3nA 20pA Vout 200V 100xA l0nA 0 12 40nA 200pA Vout 100pA 0 1 20nA 200pA Vout 200V timA 100nA 0 12 500nA 2nA Vout InA etl ato OOTA TAA VOUN 200V 10mA lxA 0 12 40cA 20nA Vout 10nA 0 1 2xA 20nA Vout 200V 100m l0xA 0 12 50 xA 200nA Vout 100nA 0 1 30x
4. all data appearing on the LCD can be output via HP IB parallel printer port or network interface to supported HP plotters or printers PCL HR PCL high resolution PCL and HP GL formats are supported selectable HP Instrument BASIC HP Instrument BASIC is a subset of HP BASIC Functions Arithmetic operation binary operation string manipulation logical operation array operation program flow control event initiated branching program editing and debugging support mass storage operation instrument control real time clock softkey operation and graphics HP 4145B automatic sequence program ASP typing aid HP 4145B ASP like syntax softkeys are available in HP Instrument BASIC An Data Storage Mass storage device Built in 3 5 inch flexible disk drive Media 3 5 inch 2HD or 2DD diskette Format type HP LIF and DOS User area 1 44Mbyte 2HD or 720Kbyte 2DD File types Auto start program file initial setup file measurement setup file measurement setup result file stress setup file customize file hard copy data file and HP Instrument BASIC program and data file Format of data made by HP BASIC program Data made by HP BASIC program and data made by HP Instrument BASIC program are compatible Network mass storage device An NFS mountable mass storage device File types Auto start program file initial setup file measurement setup file measurement setup result file stress setup fil
5. can be stored One plane can be overlaid onto the current data Marker Marker to min max interpolation direct marker and marker slip Cursor Long and short direct cursor Line Two lines normal mode grad mode tangent mode and regression mode Scaling Auto scale and zoom Page 7 Maximum number of files allowed per directory on network mass storage device 199 Data storage supplemental data 2HD DOS format Available bytes 1457K byte File size Measurement setup 3843 byte Stress setup 601 byte Measurement setup result Typical data 15387 byte VARI 101 VAR2 5 Customized system setup 1661 byte Hardcopy data 30317 byte Monochrome PCL 75DPI file Hardcopy data 38702 byte monochrome TIFF file Note For LIF format the total number of files is limited to 199 Repeating and Auto mating Test Instrument Control HP 4155B and 4156B function control Internal or external computer controls the OD A146R and OD A15AR Functiane Graphics Display X Y or X Y1 Y2 plot of source current voltage measured current voltage time or calculated USER FUNCTION data List Display Measurement data and calculated USER FUNCTION data are listed in conjunction with VARI step number or time domain sampling step number Up to eight data sets can be displayed Display 8 4 inch diagonal color active matrix LCD 640 dot H 480 dot V Hard Copy Functions Graphics Hard Copy Measured data and
6. or PGU is two Page 2 3 Ambient temperature change less than 1 C after auto calibration execution 4 Integration time medium or long 5 Filter ON for SMUs 6 Kelvin connection for HRSMU HPSMU and GNDU 7 Calibration period 1 year HP 4156B Precision Semiconductor Parameter Analyzer HRSMU High Resolution SMU Specifications Voltage Range Resolution and Accuracy HRSMU Voltage Set Set Range Reso Accuracy 2V 100V 0 02 400 lt V 0 02 3mV 20V ImV Meas Meas Max Reso Accuracy Current 2V 0 01 200xV 100mA 20 V 0 01 1mV 100mA Voltage Current Compliance Limiting The SMU can limit output voltage or current to prevent damaging the device under test Voltage OV to 100V 40V 100V 2mV SmV 1 100mA Vout 2 100mA Vout 0 025 6mV 0 03 15mV L 20V 50mA 20V lt Vout 40V 4UxcV 0 015 2mV K 100xV 0 02 5mV 2 L 20V 50mA 20V lt Vout 40V 20mA 40V lt Vout 100V Current Range Resolution and Accuracy HRSMU Current Set Set Range Reso Accuracy 10pA 10fA 4 400fA 100pA 10fA 4 400fA InA 100fA 40 5 0 7pA 1f A Vout l0nA IpA 0 5 4pA 10fA Vout 100nA 10pA 0 12 40pA 100fA Vout tloA 100pA 0 12 400pA 1pA Vout 10cA InA 0 07 4nA 10pA Vout 100 lt A 10nA 4 0 07 40nA 100pA Vout 1mA 100nA 0 06 400nA 1nA Vout 10mA loA 0 06 4cA 10nA Vout 100m 10 xA 0 12 40 A 100n
7. 12 4xA 20nA Vout 100m 10 xA 0 12 50xA 200nA Vout Meas Meas Reso Accuracy 10fA 0 5 3pA 2fA Vout 10fA 0 5 5pA 20fA Vout 100fA 0 1 30pA 200fA Vout IpA 0 1 200pA 2pA Vout 10pA 0 1 3nA 20pA Vout 100pA 0 1 20nA 200pA Vout InA 0 1 300nA 2nA Vout 10nA 0 1 2 lt A 20nA Vout 100nA 0 1 30ecA 200nA Vout 1 100V lout 20mA 40V 20mA lt Iout 50mA 20V 50mA lt Iout 100mA Vout is the output voltage in volts Tout is the output current in amps For example accuracy specifications are given as of set measured value 0 1 plus offset value 30pA 200fA Vout for the 100nA range The offset value consists of a fixed part determined by the set measuremet range and a proportional part that is multiplied by Vout VSU Specifications Same as HP 4156B VSU VMU Specifications Same as HP 4156B VMU MPSMU Measurement and Output Range 100 Max Current 100mA 100mA 2 Max 100V 100V 100V 100V 100V 100V 100V 100V 100 40 20 50 100 Output terminal connection Single triaxial connector non Kelvin no remote sensing Voltage Current Compliance Limiting The SMU can limit output voltage or current to prevent damaging the device under test Voltage OV to 100V Current 1pA to 100mA Compliance Accuracy Same as the current voltage settling accuracy MPSMU Supplemental Informa tion Typical voltage source output resistance 0
8. 16K byte Variable stack area 500K byte Common variable area 600K byte Note The memory size for common variable is decreased when hard copy or disk operation is performed Trigger Input External trigger input starts a sweep or sampling measurement or can be used as a trigger input for continuing an HP Instrument BASIC program Input Level TTL level negative or positive edge trigger Output External trigger can be generated by the following events start of each sweep measurement step start of each pulse SMU output while the stress source is forcing and Instrument BASIC trigger out command execution Output Level TTL level negative or positive logic HP 4145B Data Com patibility and HP 4145B Syntax Commands Setup and data file Measurement setup and data from the HP 4145B can be loaded network External keyboard Compatible PC style 101 key keyboard mini DIN connector Interlock and LED connector R BOX control connector Trigger in out SMU PGU selector control connector HP 41501B Sample Application Programs Flash EEPROM test TDDB Constant I Electromigration test V Ramp Test J Ramp Test SWEAT GO NO GO Test HCI degradation test Sample VEE Program Vth measurement using the HP 4155B or HP 4156B the E5250A and a wafer prober VXIplug amp play Drivers VXIplug amp play drivers for the HP 4155B and HP 4156B Supported VXIplug amp play operating systems Windows NT
9. A 200nA Vout EI 100x lt A 0 5 500xA 2xA Vout locA 0 5 300cA 2 lt A Vout 2 1 200V lout 50mA 100V 50mA lt Iout 100mA 2 200V lout 50mA 100V 50mA lt Iout 125mA 40V 125mA lt Iout 500mA 20V 500mA lt Iout 1mA Vout is the output voltage in volts Tout is the output current in amps For example accuracy specifications are given as of set measured value 0 1 HPSMU Measurement plus offset value 30pA 200fA Vout for the and Output Range 100nA range The offset value consists of a 1000 fixed part determined by the set measuremet range and a proportional part that is multiplied by Vout 500 PGU Pulse Generator Unit Specifications ae Modes Pulse or constant 200 100 40 20 Amplitude 0Vpp to 40Vpp Window 40 0V to 40 0V Maximum current 200mA pulse width Ims average current 100mA 100mA Pulse width 1 0ccs to 9 99s Minimum resolution 100ns Pulse period 2 0cs to 10 0s Minimum resolution 100ns Delay Os to 10s Minimum resolution 100ns Transition time 100ns to 10ms Minimum resolution Ins Output impedance 50 or low impedance 1 Burst count range 1 65535 50 125 500 1000 Output terminal connection Dual triaxial connectors Kelvin remote sensing Voltage Current Compliance Limiting Voltage OV to 200V Current 1pA to 1A Compliance Accuracy Same as the current voltage settling accuracy HPSMU Supplemental Informa tion Maximum allowable c
10. A Vout 1 The accuracy is applicable when offset cancellation has been performed 2 The offset current specification is multiplied by one of the following factors depending upon the ambient temperature and humidity RH Relative Humidity Humidity RH Temperature 5 60 60 80 5 C to 18 C 2 2 18 C to 28 C I 2 28 C to 40 C 2 2 3 100V lout 20mA 40V 20mA lt Iout 50mA 20V 50mA lt Iout 100mA Vout is the output voltage in volts Tout is the output current in amps For example accuracy specifications are given as of set measured value 0 04 plus offset value 200nA 1nA Vout for the 1mA range The offset value consists of a fixed part determined by the set measuremet range and a proportional part that is multiplied by Vout or Vout 100 VSU Voltage Source Unit Specifications VSU Output Range Voltage Meas Meas Range Reso Accuracy 20V ImV 0 05 of setting 10mV 1 1 Specification is applicable under no load current Max Output Current 100mA Meas Accuracy 4 20fA 1 A Vout 100 ate 4 40fA 10fA Vout 100 172 0 5 0 4pA 1fA Vout 2 0 5 2pA 10fA Vout 0 1 20pA 100fA Vout 0 1 200pA 1pA Vout 0 05 2nA 10pA Vout 0 05 20nA 100pA Vout 0 04 200nA 1nA Vout 0 04 2 lt A 10nA Vout 0 1 20 lt A 100nA Vout Meas Reso 1fA 1fA 10fA 10fA 100fA IpA 10pA 100pA InA 10nA 100nA Output terminal connection Dual triaxial conne
11. Spectrum Way Mississauga Ontario L4W 5G1 905 206 4725 Europe Hewlett Packard European Marketing Centre P O Box 999 1180 AZ Amstelveen The Netherlands 31 20 547 9900 Japan Hewlett Packard Japan Ltd Measurement Assistance Center 9 1 Takakura Cho Hachioji Shi Tokyo 192 Japan Tel 81 426 56 7832 Fax 81 426 56 7840 Latin America Hewlett Packard Latin American Region Headquarters 5200 Blue Lagoon Drive 9th Floor Miami Florida 33126 USA 305 267 4245 4220 Australia New Zealand Hewlett Packard Australia Ltd 31 41 Joseph Street Blackburn Victoria 3130 Australia 1 800 629 485 Asia Pacific Tel 852 2599 7777 Fax 852 2506 9285 Taiwan 886 2 717 9524 Korea 822 769 0800 a Singapore 65 1800 292 8100 Hewlett Packard Company 1997 Data subject to change Printed in USA 7 97 5965 9619E
12. This is the html version of the file http Avwww home agilent com agilent redirector jspx action ref amp cname AGILENT EDITORIAL amp ckey 590534 amp lc eng amp cc US G o o g I e automatically generates html versions of documents as we crawl the web To link to or bookmark this page use the following url nttp www google com search q cache rmxXR sr_ OJ www home agilent com agilent redirector jspx 3Faction 3Dref 26cname 3DAGILENT_EDITORIAL 2 6ckey 3D590534 261c 3Deng 26cc 3DUSthp 41501b amp hl en amp ct clnk cd 5 amp gl us Google is neither affiliated with the authors of this page nor responsible for its content These search terms have been highlighted hp 41501b Page 1 This literature was published years prior to the establishment of Agilent Technologies as a company independent from Hewlett Packard and describes products or services now available through Agilent It may also refer to products services no longer supported by Agilent We regret any inconvenience caused by obsolete information For the latest information on Agilent s test and measurement products go to www agilent com find products Or in the US call Agilent Technologies at 1 800 452 4844 8am 8pm EST HP 4155B Semiconductor Parameter Analyzer HP 4156B Precision Semiconductor Parameter Analyzer Technical Data Specifications July 1997 Introduction Basic Functions The HP 4155B and HP 4156B functions 1 Set measurement and or stress condit
13. a VARI b where a is the user specified ratio and b is the user specified offset value CONSTANT A source unit can be set as a constant voltage or current source depending on the unit PULSE One of the SMUs can be set as a pulse source Pulse width 0 5ms to 100ms 100ccs resolution Pulse period Sms to 1s pulse width 4ms 100s resolution SMU pulse setting accuracy supplemental information at fixed range measurement except multi channel measurement Width 0 5 50ccs Period 0 5 100s Trigger output delay for pulsed measurement 0 32 7ms with 100s voltage current sweep and sampling time domain measurements are available Voltage Current Sweep Measurement Characteris tics Each SMU and VSU can sweep using VARI primary sweep VAR2 subordinate sweep or VARI synchronous sweep Linear scale no limit mode log scale and thinned out modes 560s 720s at thinned out mode to 1s range 80ccs resolution 1s to 65 535s range 2ms resolution Note The following conditions must be set when initial interval is less than 2ms Number of measurement channels 1 Measurement ranging fixed range w m Stop condition disable Hold time Initial wait rime 0 03s to 655 35s 100s resolution Sampling measurement stop condition A condition to stop the sampling can be defined Sampling interval setting accuracy supplemental data 0 5 10s sampling interval 480s 0 5
14. able resistance when using Kelvin connection Force 0 7 100mA to 1A Force 10 100mA Sense 10 Typical voltage source output resistance Force line non Kelvin connection 0 2 Voltage measurement input resistance current source output resistance 10 1nA range Current compliance setting accuracy for opposite polarity InA to 10nA range V I setting accuracy 12 of range 100nA to 1A range V I setting accuracy 2 5 of range Current mA Voltage 20 40 100 200 Pulse DC Output Voltage and Accuracy PGU Set Voltage Parameter Range Base 20V 40V Pulse 20V 40V Resolution 4mV 8mV 4mV 8mV Note DC output is performed by the Base parameter Accuracy 1 of Base 50mV 1 of Pulse 1 of Base 50mV 1 of Pulse 3 of Base 50mV 3 of Base 50mV Pulse parameter accuracy Period 2 2ns Width 3 2ns Delay 2 40ns Transition time 5 10ns Trigger output Level TTL Timing Same timing and width as PGU1 pulse output PGU Supplemental Information Overshoot 5 of amplitude 10mV 50 output impedance to 50 load Pulse width jitter 0 2 100ps Pulse period jitter 0 2 100ps Maximum slew rate 100V ccs 50 output impedance to 50 load Noise 0 2 of range DC output MPSMU Specifications Same as HP 4155B MPSMU GNDU Ground Unit Specifications Output Voltage OV4100V Maximum sink current 1 6A Output terminal connection Si
15. ce 10aF Maximum slew rate 0 2V cs Current limit 120mA typical Output Noise 1mV rms typical o Resolution and Accuracy Diff V Meas Meas Range Reso Accuracy 0 2V gy 0 03 100 V 1 3cV Vi 2V 2V 0 02 1mV 13 lt V Vi Max Common Mode Voltage 20V Note Vi is the input voltage of VMU2 in volts Input leakage current OV 500pA Typical Measurement noise 0 01 of range p p Typical Differential mode measurement noise 0 005 of range p p Typical HP 4155B Semiconductor Parameter Analyzer MPSMU Medium Power SMU Specifications Voltage Range Resolution and Accuracy MPSMU Voltage Set Set Range Reso Accuracy 2V 100 lt V_ 0 03 900 lt V 0 3 Iout 20V ImV 0 03 4mV 0 3 Iout 40V 2mV 0 03 7mV 0 3 Iout 100V 5mV 0 04 15mV 0 3 Iout 1 100mA Vout 2 100mA Vout L 20V 50mA 20V lt Vout 40V L 20V 50mA 20V lt Vout 40V 20mA 40V lt Vout 100V Meas Meas Reso Accuracy 2V 0 02 700 lt V 0 3 Iout 20V 0 02 2mV 0 3 Iout 40V 0 02 3mV 0 3 Iout 100ccV 0 03 5mV 0 3 Iout Current Range Resolution and Accuracy MPSMU Current Set Set Range Reso Accuracy InA 100fA 0 5 3pA 2fA Vout 10nA IpA 0 5 7pA 20fA Vout 100nA 10pA 0 1 2 5 0pA 200fA Vout tloA 100pA 0 12 400pA 2pA Vout 10 lt A InA 0 12 5nA 20pA Vout 100 lt A 10nA 4 0 12 40nA 200pA Vout 1mA 100nA 4 0 12 500nA 2nA Vout s10mA 1 A 0
16. ctors Kelvin remote sensing HRSMU Measurement and Output Range 100 40 VMU Voltage Monitor Unit Specifications VMU Measurement Range Resolution and Accuracy Meas Reso 2 V 20 V VMU Differential Mode Range Meas Accuracy 0 02 200 V 0 02 ImV Voltage Range 2V 20V Max 100V 100V 100V 100V 100V 100V 100V 100V 100V 100V 100 50 20 100 Current 100fA to 100mA Compliance Accuracy Same as the current voltage settling accuracy HRSMU Supplemental Informa tion Maximum allowable cable resistance when using Kelvin connection Force Sense 10 Typical voltage source output resistance Force line non Kelvin connection 0 2 Voltage measurement input resistance current source output resistance 10 10pA range Current compliance setting accuracy for opposite polarity 10pA to 10nA range V I setting accuracy 12 of range 100nA to 100mA range V I setting accuracy 2 5 of range Current mA 2 40 100 Voltage Page 3 For example accuracy specifications are given as of set measured value 0 02 plus offset value ImV 13 lt V Vi for the 2V range The differential mode offset value consists of a fixed part determined by the measurement range and a proportional part that is multiplied by Vi VMU Supplemental Information Input Impedance 1G VSU Supplemental Information Output resistance 0 2 Maximum load capacitan
17. e customize file and hard copy data file HP IB program HP IB programs for the HP 4145B can be used when the HP 4145B command set is selected Note There is a possibility that HP IB programs for the HP 4145B will need to be modified Interfaces HP IB interface SH1 AH1 T6 L4 SR1 RL1 PPO DCI DT1 Cl C2 C3 C4 C11 E2 Parallel interface Centronics RJ45 Ethernet IEEE 802 3 1OBASE T for a 10Mbps CSMA CD local area As we FEAF 1JJD Auu PAF 1IUD LULICLULIS via HP IB interface Command sets SCPI command set HP FLEX command set HP 4145B command set Program Memory Using the HP 4155B 4156B HP FLEX command set the user can store program code in the HP 4155B or the HP 4156B Maximum number of subprograms is 256 8 bit External instrument remote control Control external equipment via HP IB interface Page 8 General Specifications Temperature range Operating 10 C to 40 C if using floppy disk drive 5 C to 40 C if not using floppy disk drive Storage 22 C to 60 C Humidity range Operating 20 to 80 RH non condensing and wet bulb temperature 29 C if using floppy disk drive 15 to 80 RH non condensing and stow i anan er HP 4145B ASP file cannot be read by the HP 4155B and 4156B Remote control HP Instrument BASIC is remote controllable from an external computer via the HP IB interface HP Instrument BASIC memory area supplemental data Program text area
18. ications are not warranted but provide useful information about the functions and performance of the instruments 23 C 5 C 50 RH HP 16440A SMU Pulse Generator Selector The HP 16440A switches either an SMU or PGU to the associated output port You can expand to 4 channels by adding an additional HP 16440A The channel 1 PGU port provides PGU OPEN function which can disconnect the PGU by opening a semiconductor relay The HP 16440A cannot work without two pulse generator units of the HP 41501A B SMU and Pulse Generator Expander Channel configurations Two channels CH1 CH2 CH1 INPUT ports 2 SMU and PGU PGU port has additional series semiconductor relay OUTPUT port 1 CH2 INPUT ports 2 SMU and PGU OUTPUT port 1 Voltage amp Current Range Input port Max V Max I SMU 200 V 1 0 A PGU 40V 0 2A AC peak Supplemental Information at 23 C 5 C 50 RH SMU port leakage current lt 100fA 100V SMU port residual resistance typical 0 2 SMU port stray capacitance typical 1MHz Force Common 0 3pF Force Guard 15pF Guard Common 130pF PGU port residual resistance 3 4 PGU port OFF capacitance typical SpF PGU port OPEN capacitance typical 700pF 1MHz Vin Vout 0V Overshoot lt 5 of pulse amplitude 20ns leading and trailing time 50 pulse generator source impedance 50pF and 1M in parallel load General Specifications Dimensions 50 mm H 250 mm W 275 m
19. ions Control measurement and or stress execution Perform arithmetic calculations 7 Display measured and calculated results on the LCD display Perform graphical analysis 7 Store and recall measurement setups and measurement and graphical display data Dump to printers or plotters for hard copy output Hardware Specification Condition The supplemental information and typical entries in the following specifi cations are not warranted but provide useful information about the functions and performance of the instruments The measurement and output accuracy Perform measurement and analysis with the built in HP Instrument BASIC 1 Self test Auto calibration Configuration HP 4155B HP 4156B 4xMPSMU 4xHRSMU 2xVMU 2xVMU 2xVSU 2xVSU HP 41501B Optional 2xPGU Option HPSMU Option or GNDU 2xMPSMU Option are specified at the rear panel connector terminals when referenced to the Zero Check terminal under the following conditions 1 23 C 5 C double between 5 C to 18 C and 28 C to 40 C if not noted otherwise 2 After 40 minutes warm up SMU Source Monitor Unit HRSMU High Resolution SMU 1fA 2 V to 100mA 100V MPSMU Medium Power SMU 10fA 2 lt V to 100mA 100V HPSMU High Power SMU 10fA 2 lt V to 1A 200V VMU Voltage Monitor Unit VSU Voltage Source Unit PGU Pulse Generator Unit 1 channel GNDU Ground Unit 1 Minimum number of installable MPSMU
20. m D Weight approx 1 1kg HP 16441A R BOX HP 16441A R BOX adds a selectable series resistor to the SMU output You can select the resistor from the setup page and the voltage drop due to the series resistor is automatically compensated for in the measurement result Measurement limitations with the HP 4155B 56B and R BOX 1 jf you measure device characteristics including negative resistance over 1M with the HP 4155B 56B and R BOX there is a possibility that they cannot be measured There is a possibility that the HP 4155B 56B cannot perform measurements because of DUT oscillations even with the R BOX Whether oscillation occurs or not depends upon the DUT and measurement conditions Number of SMU channels that can add resistor 2 Resistor values 1M 100k 10k 0 each channel Resistance accuracy 0 3 at 23 C 5 C between input output terminal Maximum voltage 200V Maximum current 1A 0 selected Kelvin connection Kelvin connection is effective only when 0 is selected Supplemental Information at 23 C 5 C 50 RH Leakage current lt 100fA 100V General Specifications Dimensions 72 mm H 250 mm W 270 mm D Weight approx 1 6kg Channel Information SMU 6 channels 1 triaxial connector channel 3 channels 1 Kelvin triaxial connector channel VSU 2 channels 1 BNC connector channel VMU 2 channels 1 BNC connector channel PGU 2 channels 1 BNC connect
21. ngle triaxial connector Kelvin remote sensing HRSMU MPSMU and HPSMU Supplemental Information Maximum capacitive load 1000pF Maximum guard capacitance 900pF Maximum shield capacitance 5000pF Maximum guard offset voltage 1mV Functions Measurement Set up Setting l Fill in the blanks using front panel or full size external keyboard 1 Accuracy is specified at leading edge trailing edge los Pulse Range and Pulse Parameter PGU Range Period Width 1 2ecs 100ccs locs 1000s 2 100ccs 1000s locs 999ocs 3 Ims 10ms 0 01ms 9 99ms 4 10ms 100ms 0 1ms 99 9ms 5 100ms 1000ms Ims 999ms 6 1s 10s 0 01s 9 99s Page 5 Delay Set resolu 0 100ccs 0 l 0 1000ccs los 0 10ms 10 0 100ms 100x 0 1000ms Ims 0 10s 10m Note Pulse width is defined when leading time is equal to trailing time PGU2 must be set in the same range as PGU1 Leading Trailing Edge Times PGU Range Set Restrictions 100ns 1000ns Ins 0 5ocs 100cs 10ns 5 0ccs 100 0ecs 100ns 50ocs 1000s locs 0 5ms 10 0ms 10ccs Restrictions Pulse width lt Pulse Period Delay time lt Pulse period Leading time lt Pulse width 0 8 Trailing time lt Pulse period Pulse width 0 8 Period width and delay of PGU1 and PGU2 must be in the same range Leading time and trailing time for a PGU must be in the same range GNDU Supplemental Information Load Capacitance locF Cable resistance Force 1 Se
22. nse 10 Noise characteristics typical Filter ON Voltage source noise 0 01 of V range rms Current source noise 0 1 of I range rms Voltage monitor noise 0 02 of V range p p Current monitor noise 0 2 of I range p p Measurement The HP 4155B and HP 4156B can perform dc or pulsed force measure and stress force For dc Accuracy 5 10ns 5 10ns 5 10ns 5 10ns 5 10ns Output overshoot typical Filter ON Voltage source 0 03 of V range Current source 1 of I range Range switching transient noise typical Filter ON Voltage ranging 250mV Current ranging 10mV Maximum slew rate 0 2V cs VARI Primary sweep controls the staircase dc or pulsed voltage or current sweep Maximum number of steps 1001 for one Load settings from floppy disk or via the LAN port Program using internal HP Instrument BASIC or via HP IB HELP Function 7 Library Default measure setup Vce Ic Vds Id Vgs Id and Vf If are pre defined softkeys User defined measurement setup library Auto file load function on power up VAR2 Subordinate linear staircase or linear pulsed sweep After primary sweep is completed the VAR2 unit output is incremented Maximum number of steps 128 VARI Staircase or pulse sweep synchronized with the VAR1 sweep Sweep is made with a user specified ratio and offset value VARI output is calculated as VARI
23. onstant of Vacuum 8 854188 E 12 Engineering Units The following unit symbols are also available on the keyboard f 10 pado ndo uora d0 m K 10 M 10 G 0 IS resolution lt pulse width Sampling Time Domain Measurement Characteris tics Displays the time sampled voltage current data versus time Maximum sampling points 10 001 linear Sampling mode linear log and thinned out Note The thinned out mode is similar to reverse log sampling Sampling measurement continues by thinning out older data until the sampling completion condition is satisfied Sampling interval range and resolution Linear scale auto mode 60s to 480ccs range 20s resolution 480ccs to 1s range 80s resolution 1s to 65 535s range 2ms resolution Data Variable Display Up to two user defined parameters can be displayed on the graphics screen Read Out Function The read out functions are built in functions for reading various values related to the marker cursor or line Automatic Analysis Function On a graphics plot the markers and lines can be automatically located using the auto analysis setup Parameters can be automatically determined using automatic analysis user function and read out functions User Variable Display the data on the LCD via HP IB or HP Instrument BASIC Output Display Display Modes Graphics and list HYF 41995 41905 OULpULs a gale trigger while st
24. or channel GNDU 1 channel 1 triaxial connector INTLK 6 pin connector Supplemental Information at 23 C 5 C 50 RH SMU channel Leakage current 10pA max 200V Force or Sense Common Stray capacitance 15pF max Force or Sense Common Stray capacitance 3pF typical Force or Sense Other SMU Residual resistance 60m typical Force Sense Guard capacitance 70pF max Force or Sense Guard VSU channel residual resistance 60m typical VMU channel residual resistance 60m typical PGU channel characteristic impedance 50 typical GNDU channel residual resistance 40m typical Force Sense General Specifications Temperature range Operating 5 C to 40 C Storage 40 C to 70 C Humidity range Operating 5 to 80 RH no condensation Storage 5 to 90 RH at 65 C no condensation Dimensions 140 mm H 260 mm W 260 mm D Weight approx 2 5kg 10 Page 10 For more information on Hewlett Packard Test amp Measurement products applications services and current sales office listings visit our web site at http www hp com go tmdir You can also contact one of the following centers and ask for a test and measurement sales representative Semiconductor Test Web Site http www hp com go semiconductor United States Hewlett Packard Company Test and Measurement Call Center P O Box 4026 Englewood CO 80155 4026 1 800 452 4844 Canada Hewlett Packard Canada Ltd 5150
25. ress channels are forcing stress Knob Sweep In the knob sweep mode sweep range is controlled instantaneously with the front panel rotary knob Only the Channel Definition page needs to be defined Standby Mode SMUs in Standby remain programmed to their specified output value even as other units are reset for the next measurement Other Characteristics Limited auto ranging voltage current compliance power compliance automatic sweep abort functions self test and self calibration Text Hard Copy Print out setup information or measured data list as ASCII text via HP IB parallel printer port or network interface to supported HP plotters or printers PCL HR PCL and HP GL formats are supported selectable Hard Copy File Hard copy output can be stored to an internal or external mass storage device instead of sending it to a printer or plotter The data can be stored in PCL HR PCL TIFF HR TIFF high resolution TIFF or HP GL formats Hard Copy via Network Interface The network interface has lpr client capability High Resolution HR Mode This file mode is available for cases where an extremely clean print out or plot is desired Note High resolution mode takes signifi cantly greater CPU time to generate so its use is recommended for final reports only Analysis Capabilities Overlay Graph Comparison A graphics plot can be stored and later recalled as an overlay plane Four overlay planes
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