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Operating Instructions Alcatel Adixen ADP/ADS Dry Pumps

1. If the incident is still present call Alcatel customer service 2 2 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 90 Gas temp Alert Check the thresholds Check the flowrate the kind and the concentration of pumped gases Check that the exhaust pipe is not clogged Check the display e ambient when pump is stopped e 100 C in continuous operation Check the wiring and the sensor the resistance between pins 1 amp 2 of J6 must be between 100 and 160 Q J6 unpluged e 07C 100 Q lt 20 C 107 8 0 50 C 119 4 Q 80 C 130 9 Q e 100 C 138 5 Q e 157 C 160 Q If the sensor is OK there is another problem on the M3 call Alcatel customer service Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition O1 May 98 D 91 Pump temp Alert Check the thresholds Check the display e ambient when pump is stopped e 100 C in continuous operation Check the wiring and the sensor the resistance between pins 1 amp 2 of J6 must be between 100 and 160 Q J6 unpluged 0 C 100 Q 20 C 107 8 Q 50 C 119 4 Q e 80 C 130 9 Q e 100 C 138 5 Q e 157 C 160 Q Check the cooling circuit If the sensor is OK there is another problem on the M3 call Alcatel customer service Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 M
2. B 170 Installation of silencer heating kit During the silencer heating kit installation take all A the necessary precautions regarding the pumped gases before to open the exhaust circuit of the pump Refer also to the safety instructions related to maintenance Section D 00 The electrical power supply of the kit is not monitored by the M3 controller in case of an emergency stop the belt stays powered Take the necessary precautions related to electrical safety Remove the silencer from the pump Install the two heating belts 1 using the tightening cords Install the two insulation Sleeves 2 Check the electrical compatibility between the kit and the mains voltage e Remount the silencer on the pump e Connect the belts 1 to the power supply 3 after wiring the cables on the plugs if necessary provided with the kit or recovered on the old belts in the case of maintenance e Connect the power supply 3 to the installation e Set the power supply switch to I The heating kit will be used during pumping of condensable gases Caution Heating temperature 130 C Take all the necessary precautions regarding burn risks Alcatel High Vacuum Technology User s Manual ADP ADS Edition O1 May 98 Edition 04 May 98 C 10 Start up of the M3 monitoring system Study the safety instructions see B 00 The keyboard is used to control the pump and configure the parameters The pu
3. C Initial config mbar Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 MAINTENANCE MENU l gt f OPERATING TIME STO RAGE CHANGE CODING LAST ALERTS LAST ALARMS CONFIGURATION C 30 M3 Monitoring system function table MAINTENANCE TIME OVERHAUL ADP ADP LP BEARINGS INSPECT SILENCER OVERHAUL ROOTS DISPLAY INPUT THE NEW CODE DISPLAY LAST 10 ALERTS DISPLAY LAST 10 ALARMS LIST OF CUSTOMIZED PARAMETERS Technical modifications reserved Alcatel High Vacuum Technology User s Manual ADP ADS Initial Config 1000 34000 h 8500 h 1000 17000 h 8500 h 1000 17000 h 2500 h 1000 34000 h 8500 h Using gt and a key input the new code a and valide with 3 3 Edition 04 May 98 A Check the rotational direction of the pump upon first Start up See B 130 a gt C 40 Use of the M3 monitoring for pumping operation Study the safety precautions voir B 00 The performances and the operational safety of this product are guaranteed provided that it is used in normal operating conditions e Pre adjustements to ensure a gas purge as soon as the pumping starts set the Select CMD Purge menu on disabled to startup or stop the gas purge during pumping set the Select CMD Purge menu on valid The purge will start or stop by pressing the PURGE key to startup the Roots at the same time
4. D 100 AW ater flow Alen D110 M otor temp Alert OF ala M D 120 Analogic input Alert or ala M D 130 El logic E2 logic Alert or alarm noces D 140 Valve option Alert and alarm ccccsssseeeeeeeeeeeeees D 150 Varia tor laliiikaxesetiwitatsntipotatcah osiaactalagauntcaladelund D 160 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 E Maintenance instructions Contents ADP ADS User s manual Maintenance precautions Service Centers icca E10 PUMP draining ccccceccceccecceeessseteeveeeeeeeeeeeeeeeeeeeeeeeeens E 20 Silencer MAINtENANCE cnn E 30 Electropneumatic valve maintenance withdrawal E 40 Freeing up the ADP ccce E50 Safety instructions concerning product installation operation and maintenance O ur ALCATEL products are designed and tested to provide maximum safety However in order to obtain the best level of safety the following must be observed the users manual during product transport installation operation and maintenance the safety instructions signalled with the following symbol Symbol Meaning Users of this equipment should be alert to level of hazards identified by this symbol W arnings are used when failure to observe instructions Or precautions could result in significant damage to equipment and or in injury to humans Alcatel High Vacuum Technology User s Manual ADP ADS 3 3 Dea
5. D 80 Pressure Alert and alarm N2 Purge Alert and alarm Exhaust pressure higher Check the nitrogen pressure setting according to than threshold section B 120 Pressure Alert and alarm e Check that the silencer the pipe to exhaust are not clogged If the defect still remains call Alcatel customer service Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 D 80 Pressure Alert and alarm N2 Purge Alert and alarm Exhaust pressure level between 500 mbar and threshold set N2 Purge Alert and alarm Without Nitrogen flow Either check the connection the display and nitrogen pressure sensor option setting idem exhaust pressure too high see page 1 2 If there is no N2 pressure check nitrogen supply connections electrovalve and the coil and its connection If the incident is still present there is another problem on the M3 call Alcatel customer service With Nitrogen flow Check nitrogen supply electrovalve and its coil sensor option The flowmeter is connected Check the nitrogen detector setting instead if E2 Log Check the nitrogen detector wiring by shunting pins 23 amp 24 of J5 The defect disappears Check the wiring NO Problem on M3 Call Alcatel customer service Exhaust pressure Check that the sensor is properly connected 500 mbar Test the connection and the display idem exhaust pressure too high see page 1 2
6. W Transmission SPEED 9600 bauds W Data Length 8 bits W Parity NONE W Stop bit 1 Connector wiring RS232 485 Reception data RS 232 RD TD Transmission data RS 232 GND Ground V RS 485 9 pin male DB connector for V RS 485 serial link Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 Examples of possible connection Link RS232 with a single monitoring system M3 Multiple serial link RS232 Serial link RS485 2 2 B 150 RS 232 or RS 485 link wiring Several M3 monitoring systems may be connected on a single link The multiple link is obtained by creating a loop Connect terminals 7 and 8 when the monitoring system is at the end of the line The commands and messages reception syntax is dealt with in a special chapter Contact Alcatel Alcatel High Vacuum Technology User s Manual ADP ADS Edition O03 May 97 Edition O1 May 98 B 170 Installation of silencer heating kit To avoid the condensation of pumped gases and therefore the clogging of the silencer during the pump operation wich processes such as Aluminum etching Polysilicon LPCVD or PECVD N itrid Alcatel proposes a silencer heating kit including e two heating belts 1 e two insulation sleeves 2 e a connection box 3 e a mains cable 4 Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 Installation and electrical connection
7. SETTING MENU MAINTENANCE MENU OPERATING TIME MAINTENANCE MENU OPERATING TIME STO RAGE CHANGE CODING y STO RAGE PUMPING STOPPED 03 23 98 18 24 80 3 3 Edition 04 May 98 Purpose of sensors C 20 Setting the M3 monitoring system parameters Purge sensor Gas Temperature sensor Non TC version Pump Temperature sensor on TC version Motor power sensor E Analogic sensor El and E2 logic sensors Alcatel High Vacuum Technology User s Manual ADP ADS Signals insufficient gas purge during an alert tme and stops pumping at the end of the alarm time Signals exhaust overpressure when the pressure reaches 1450 mbar silencer clogged and stops the pump at 1990 mbar Signals a gas temperature variation at the exhaust with an alert 1 when the temperature is less than the alert 1 threshold an alert 2 when the temperature is greater than the alert 2 threshold without stopping the group Allows to regulate ADP temperature Signals a pump temperature variation an alert when temperature Is less than the alert threshold and an alarm when temperature is greater than alarm threshold Monitors the power consumed by the machine by generating an alert followed by an alarm as soon as the power Is greater than each of its thresholds the pump is stopped immediately when the alarm threshold is exceeded Allows to monitor a voltage on an input contact with 2 adjustable thresholds A
8. adjustment B 70 Inert gas purge connection N2 plug The N2 flowrate will be adjusted with the pressure regulator according to the process see section B 120 The flowmeter is used to display the overall purge flow rate Pressure Pressure E gauge regulator PRESSURE L L Purge gas Flow meter panel flowmeter Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 03 May 97 Function Operation Location Adjustment B 80 Nitrogen purge flow sensor This sensor is used to warn the user when the N2 flow comes under a preset value during harsch processes using dangerous gases SiH4 for example The gas flow rate through the detector carries along a float which acts on the contact of the electrical box This contact closes when the flow rate value is higher than the flow rate set on the sensor O therwise the contact opens and set off an alarm PURGE FLOW To get access to the flowmeter remove the side cover from the pump N2 outlet Sy First set the parameter N2 FLOWRATE OPTION to be valid in the DEFINITION menu of the M3 monitoring system The setting of the sensor is done by sliding the moving part contact along the controller body For this loosen the screws fixing this moving part on the body Adjust the electrical box in the upper position Set the minimum N itrogen flo
9. in order to reduce the exhaust noise level Anti noise seal delivered separately When pumping on aggressive gases the exhaust must be connected to a stack or an evacuation duct In this case do not fit the anti noise seal M ake sure that the pressure at the exhaust does not exceed 1200 mbar Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 Exhaust connection At inlet pump Inlet isolation valve accessory B 90 Connection to the pumping circuit DN 40 ISO KF Pneurop Several fitting accessories are available in Alcatel catalog Make sure that the parts or containments connected to the inlet of our pumps withstand a negative pressure of 1 bar with reference to the atmospheric pressure In order to prevent foreign bodies from entering the pump leave the blank off flange in place at the pump inlet and remove it at the time of use see section B 130 This accessory avoids a reverse flow of particles to the chamber when the pump is stopped Connect the valve directly on the pump inlet flange using connecting accessories Connect the valve to the chamber Connect the electrical cable to the inlet valve exhaust valve connector at the rear of the M3 monitoring system Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 Edition 04 May 98 Customer electrical installation protection B 110 Pump Power supply A Study the preliminary precautions
10. option 9 Pressure regulator Cooling system 10 Water electrovalve 11 Water flowmeter Accessories 12 Isolation valve This sensor 8 is used to warn the user when the N gt flow comes under a preset value during harsch processes SiH for example Alcatel High Vacuum Technology User s Manual ADP ADS 3 3 Edition 04 May 98 2 types of monitoring system Monitoring system M1 M1 Remote monitoring system Monitoring system M3 A 40 Types of monitoring systems M1 Solid state monitoring without neutral gas control M3 monitoring driven by a microprocessor Parameters monitored e Water flow failure Electrical overloading Monitoring system M1 can be remote controlled This is a unit separated from the frame 5 or 10 meters cable for the remote control and monitoring of the pump 5 or 10 meters e Monitoring system controlled by microprocessor e LCD display of parameters and messages e Memorization of the 10 latest alerts and alarms e RS 232 RS 485 N ETW ORK links This monitoring system can directly be interfaced with most of the production equipments Parameters monitored e Water flow failure e Purge flow failure Electrical overloading Purge flow and exhaust pressure Exhaust gas temperature ADP motor power W ater flow rate Maintenance Time Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 03 May 97 A 50 Dry pum
11. wiring the terminals on Remote connector see B 140 e Units containing control circuits are designed to guarantee normal safety conditions taking into account their usual operating environment use in Cabinet In specific cases of use on a table take care not to insert objects in the ventilation louvers when handling units e When switching off an item of equipment containing capacitors loaded with over 60VDC or 25 VAC take precautions at the access to the connector pins single phase motors fiting with mains filter frequency converter monitoring system etc e The machines are designed so as to prevent any thermal risk to the user s Safety However specific operating conditions may generate on the pump temperatures justifying particular attention on the part of the user external surfaces gt 70 C Hot surfaces which can cause serious burns when touched are signalled with specific label A Hot surface Hot surface near the label pump body silencer e Alcatel has no control over the types of gases passing through this pump These are entirely under the control of the process user and or the hardware systems integrator Frequently process gases are toxic flammable corrosive explosive an otherwise reactive Since these gases can cause serious injury or death it is very important to plumb the exhaust of the pump to the facility s hazardous gas exhaust system which incorporates appropriate filters scrubbers etc to
12. 00 e ACCESS THE DRIVING SHAFT BEARING Remove the protective cover 1 and remove the O ing by removing the three M4 x 10 CHc Screws Using the box wrench move the driving shaft in both directions of rotation untl free rotation Is obtained Clean the O ing and grease it lightly with vacuum grease Reinstall the O ving and the protective cover RESTART THE PUMP Restart by pressing the START switch on the monitor Alcatel High Vacuum Technology User s Manual ADP ADS 1 1
13. 1001 102136 Fitting See section B 30 Silencer heating kit Principle This device is to be installed on the silencer in order to avoid the gases condensation particularly in processes such as Aluminum etching Polysilicon etching LPCVD or PECVD N itrid Part Number 110 115 V 105038 220 240 V a 105037 Fitting See section B 170 Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 Modifications reserved Characteristics N ominal flow rate 50 60 Hz Technical characteristics 25 30 418 501 15 18 68 80 1136 1336 40 47 A 70 ADS 151 ADS301 ADS501 ADS801 ADS 1001 140 165 270 310 460 510 2338 275614509 5177 7682 8517 82 97 160 182 271 300 680 750 950 1000 11356 12525 15835 16670 400 442 500 589 Rotation speed mbar torr mbar torr 1 102 7x 103 9 103 6 7 x 102 3000 3600 3 103 2 2 x 103 8 104 6x 104 3 103 2 2 x103 8 104 6 x104 9 104 6 7x104 2 10 1 5 x 10 2 10 1 5 x 10 6 104 4 5 x104 5 4 6 104 4 5 x104 1200 900 200 480 0 to 90000 0 to 90 Gear box fluid capac 0 35 30 to 100 0 75 1 1 ll W eight std version Weight mod version Without nitrogen supply According to processes see B120 See pumping curves at the chapter G 160 353 130 287 40 40 40 40 63 40 63 4 240 529 210 463 340 748 280 622 365 805 310 683 38
14. A Study the safety instructions related to maintenance See D 00 W hen a problem occurs the user is informed by the relevant fault indicator light which goes on the audible warning buzzer the fault contacts on the REMOTE connector at the rear of the monitoring system which close the stopping of the pumping although the STO P command has not been given the display of fault message on the screen of the M3 monitoring system a message via the RS 232 or RS 485 link on a micro computer Location of electrical components M3 Monitoring unit Rear panel CB1 circuit breaker CB2 Ext 24V circuit breaker RT ADP and Roots power circuit breakers TRL Int transformer Int internal ADS opened Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 Preventive maintenance with monitoring system M1 Maintenance time monitoring with monitor system M3 Maintenance operations 2 2 D 10 First level of maintenance The overall operating time of the machine can be read on the front of the monitoring units M1 This is also used to calculate the operating time of the various components which require maintenance The replacement frequency of certain components depends directly on the type of process used See section D 20 Depending on the maintenance parameters programmed when the operating time before maintenance has expired the screen display alternates between opera
15. Alcatel High Vacumm Technology User s Manual ADP ADS 1 1 Edition 04 May 98 E 30 Silencer maintenance Consult the standard precautions before intervention see Section D 00 For quicker interventions and special precaution during cleaning it is recommended to replace all the parts equipped silencer and outlet tube and repair the replaced parts on a bench ny hen the silencer is maintained avoid any contact with the reaction by products deposit powder strongly corrosive wear gloves even a breathing mask The ADP pump silencer repair work frequency depends on the process used Refer to the maintenance frequency tables See Section D 20 SILENCER REPLACEMENT Remove the side covers See section B 20 and remove the silencer backplate located on the rear panel of the pumping unit Disconnect the silencer from the pump exhaust connector by removing the clamping ring and the seal support ring Access via one of the side openings located at the bottom of the frame Remove the assembly silencer and outet tube from the rear of the machine Reinstall a complete assembly equipped silencer and outlet tube Reinstall the backplate to the rear of the pumping unit and the side covers Perform the maintenance of the replaced parts on a bench SEE Fouo 2 Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 Silencer maintenance Refer to the special precautions before any intervention see
16. Dry pump operational principle Tightness at motor side The vacuum tightness is shaft passage ensured by the motor design with builtin jacket This system provides total Safety regarding leaks outside the pump and requires no maintenance 1 Built in jacket 2 Motor housing 3 Electrical rotor The pump is fitted with a antisuckback valve in the silencer preventing the exhaust being sucked back The pump in a pumping ann Process installation chamber INLET PRESSURE Secondary pumping SECONDARY VACUUM F ATMOSPHERIC PRESSURE Alcatel High Vacuum Technology User s Manual ADP ADS 3 3 Edition 04 January 98 A 60 The accessories Isolation valve Principle This valve avoids a reverse flow of particles to at pump inlet the chamber and increases tightness when the pump is switched off It allows also to isolate the running pump from the process Part Number Several models are available in Alcatel catalog M anual valve electropneumatic Consult us Fitting See section B 90 Ant vibration pads Principle This device significantly reduces the vibration rate transmitted to the floor Vibration force to the floor by pad lt 0 5N Available tll 150Hz PartNumber ADP 101838 ADPMD 101942 ADS 151 301 501 101840 ADS 151 301 501 MD 101941 ADS 801
17. Ise L 0 80 L SoG IL ADS 1001 LSS T 0 80 L 2a OST Proceed to oil filling when the pump is stopped Remove the fill cap Fill the pump with oil Do not exceed the indicated quantities The oil level should be in the middle of the sight glass For this to be accurate waita few minutes for the oil to settle over all internal surfaces Replace the fill cap See location page 2 Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 B 50 Filling the machine oil housings Location 1 Filling front Roots housing 2 Front Roots housing level sight glass 3 ADP filling 4 ADP housing oil level sight glass 5 Rear Roots housing filling 6 Roots housing oil level sight glass Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition O03 May 97 B 60 Connection to the cooling circuit Water characteristics In order to limit corrosion and fouling of the motor cooling coils itis recommended to use cooling water with the following characteristics W Treated fresh water or non aggressive industrial water W pH between 7 5 and 11 W Hardness lt 7 milli equivalent dm E Resistivity gt 1500 Q cm W Solid pollution lt 100 mg dm M Temp from 10 to 25 C W Pressure range between 3 and 7 bars absolutes W Pressure A inlet outlet 3 bars mimimum If the above mentioned characteristics are not respected install a filter to the c
18. as the ADP set the Roots control menu on disabled to start up or stop the Roots while the ADP is running set the Roots control menu on valid The Roots will start or stop by pressing the ROOTS key e Startup the pumping by pressing START the monitoring system performs the following operations opening the inlet valve if preselection has been validated ADP pump startup opening the water valve data capture and sensor processing opening the purge gas valve if preselection has been validated Roots pump startup 15 H N2 ROOTS CHECK PRESSURE 940 MBAR GAS TEMP ADP TEMP ADP POW ER Atthe same time the operating parameters are shown The pumps are equipped with an exhaust pressure monitoring sensor When this is not used it is the responsibility of the user to prevent the risks related to excess pressure of the installation Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 Operation monitoring Pumping shut down C 40 Use of the M3 monitoring for pumping operation During Operation the user is warned of an operating incident by one or more fault are displayed on the screen alternating with monitoring parameters W hen these faults are parameter programmable the monitoring system triggers the alert phase followed by the alarm phase The period for these phases is programmable indicators light and buzzer sounded if option selected th
19. devices provided for this purpose lifting rings handle etc Remove the pump Itis highly recommended to from the crate used a hoist Lift the pump by its three hoisting rings Apply just enough upward tension to take the weight off the base of the pump Hoisting a ring ADP 81 ADS 151 ADS 301 ADS 501 ADS 801 1212 550 ADS 1001 1377 620 Prepare the pump Screw the leveling pads of the frame and lower the pump on the wheels Remove any additional packages from the crate and set aside These packages will contain cables accessories and so forth To prevent humidity from entering the pump during transport the pump is pressurized with dry nitrogen before shipment The inlet and exhaust are sealed with blank off flanges which should not be removed until the pump is ready to be used exhaust seals should be left in place Our equipment can be stored without particular storage precautions pump pressurized in nitrogen and sealed at an ambient temperature between 20 C and 70 C Equipment storage T If the pump is going to be put into storage the inlet and Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 Edition O3 May 97 Positioning the pump B 20 Positioning the pump in the pumping installation Pump performance will depend on the kinds of accessories used and the quality of the mechanical connections such as pump fitt
20. with liquid no fan clean room compatible cooling safe no gas leak quiet multi voltage bi frequency 50 60 Hz Genuinely dry pump guaranteed by design guaranteed by testing Residual gas spectrum free from hydrocarbon peaks Vertical pumping Reliability MTBF gt 50 000 hours Easy maintenance interchangeables parts may be performed by user Pump designed for all Several equipments are available for semi conductor s processes applications corrosives CVD or clean processes 2 versions Standard or modular Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition O3 May 97 A 20 The various versions of ADP ADS Series One Standard version The Standard Series pumps are fully integrated in a compact and covered frame which includes the monitoring system the flowmeter panel the facilities panel an OEM interface panel and the RS 232 485 serial link FRONT VIEW _ Inlet port ____________ M onitoring system Flowmeter panel ____ i Co REAR VIEW 1 l SS IN OUT lo Y Utilities panel OO O E O EM Interface option RS 232 485 Exhaust port Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 A 20 The various versions of ADP ADS Series One Standard version continued 1 Pumpinc Systems ADP or ADS In an ADS a Roots pump is combined with an ADP 2 Silence
21. 0 Equipped silencer available Ref 100210 Silencer cartridge control in Silencer cartridge 040095 LP bearing __ Minor kit Consult Included in replacement 31 81 090576 Alcatel full overhaul Full overhaul Major kit 31 040162 Consult Major kit 81 061925 Alcatel ALCATEL 113 oil 064657 0 5 L Full overhaul Major kit 151 100068 051940 Major kit 301 601 090839 ALCATEL 113 oil 064657 0 5 L Qty 2 for 301 amp 601 x Full overhaul 12 H Major kit 101109 ALCATEL 113 oil 064657 ok 0 5 L Qty 6 A ADP 31 ADP 81 Maintenance Testing and cleaning time not incluede A B ADS 151 301 501 Maintenance For oil filling see section B 50 A C ADS 801 1001 Maintenance Maintenance times can change according to processes and equipments used High Vacuum Technology User s Manual ADP ADS 3 3 Edition O03 May 97 D 30 Diagnosis and troubleshooting Pump does notstart cee D 40 The pump is running and then is showing an alert or alarm message followed by the pumps stopping D 50 The pump is running no message D 60 Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 40 Pump does not start INCIDENT CAUSE The display is not lighting up No mains or no display NO Isolating switch is off NO CB1 breaker switched off NO Other problem The keyboard is not working Alcatel High Vacuum Techno
22. 0 844 340 748 Alcatel High Vacuum Technology User s Manual ADP ADS 550 1212 620 1377 0 100 40 100 40 160 40 lt 70 1 3 2 3 Dimensions Standard version A 70 Technical characteristics DIMENSIONS IN INCHES Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 A 70 Technical characteristics Dimensions Modular version INLET 200 EXHAUST DIMENSIONS IN MILLIMETERS ADP 31MD ADP 81MD ADS 151MD ADS 301MD ADS 501MD DIMENSIONS IN INCHES pete to tw Pe ADP 31MD ADP 81MD ADS 151MD ADS 301MD ADS 501MD Alcatel High Vacuum Technology User s Manual ADP ADS 3 3 Edition O03 May 97 B 00 Safety instructions e The machines must be connected to an electrical installation in compliance with the decree 88 1056 dated 14 Novembre 1988 e Our products are designed to comply with current EEC regulations Any modification of the product made by the user Is liable to lead non compliance with the regulations or even to put into doubt the EMC ElectroM agnetic Compatibility performance and the safety of the product ALCATEL declines any responsability for such operations e Before any ma
23. EMOTE plug 1 3 Control Inputs Monitoring system M3 2 3 B 140 Remote control plug connection M3 monitoring NOTE The contact is considered to be closed if the DC voltage between 5 and 30 V Is applied These contacts can be supplied by terminals 47 OV and 49 12V S1 OPEN Remote control valid Keyboard locked S1 CLOSE Keyboard valid Remote control locked S2 On ADP switching off S3 On ROOTS switching off if the selection Roots control has been validated S4 Purge Switching on off if the selection Purge control has been validated in the helo menu with keyboard Monitoring system before V2 02 version N ote If the remote control receives an order from the RS232 keyboard and remote control are locked Only LOC order transmitted by the RS232 allows to enable keyboard or remote control Contact Alcatel Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 Edition O3 May 97 B 140 Remote control plug connection M3 monitoring Available outputs of Monitoring system M3 Dry contacts 250 V 1 A 100 VA Contact These contacts open in the presence of a fault 1 ADP working 14 15 2 ROOTS working 16 17 3 Purge flow rate and ADP working 8 9 4 Exhaust pressure fault P gt 1450mbar 39 40 5 Purge fault 37 38 6 Temperature fault T gt 50 C 35 36 4 Fault O ne of the parameters at alert threshold 2 3 5 Fault Alarm
24. Edition 04 May 98 load DOWMOaded fF Q0 On Tdeat vacuum products a p 505 872 0037 PLEASE NOTE We do sell the related products within this literature but we are not connected in any way with the manufacture of your product We provide this literature for the products we sell and service They are intended to provide users with the manufactures instructions to operate the equipment in a safe manner www idealvac com CONTENTS ADP ADS User s manual A Introduction ADP ADS Series O Ne oicciccccccesssssseeseeseeeeeeeeeennernrnees A 10 The various versions of ADP Series O ne acces A 20 ADP ADS Serie O ne Dry pumps for semi conductor s INUSUY ccceeeseeesessetesrererervvaees A 30 Types of monitoring SYStEMS A 40 Dry pump operational principle eessen A 50 ThE ACCESSOTICS e A 60 Technical characteristics A 70 B Start up Safety instruCtiONS cccceeececccceeennrersreeeeeeeeeeeeeeeenens B 00 Unpacking Storage ccccccccccssssssseseseseeeeeeeseetntnrees B 10 Positioning the pump in pumping installation B 20 Installing anti vibration padS n B 30 Modular version LAyOUt ceecee B 40 Filling the pump Oil HOUSINGS o n B 50 Connection to the cooling circuit essscccccccccccccc B 60 Inert gas purge connection N2 plug aossen B70 Nitrogen purge floW Sensor nccc B 80 Connection to the PUMPING circuit se eeee sees ee eeeee ees B 90 Electropneumatic e
25. L Exhaust q 1 LP1 2 LP2 3 LP3 4 HP4 5 HP5 Gas injection calibrated jets with valves 6 Gas electrovalve 7 Gas flowmeter 8 N2 flow sensor optional 9 Pressure regulator Cooling system 10 W ater electrovalve 11 Water flowmeter 12 Water flow sensor Accessories 13 Isolation valve Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 Very corrosives processes TC CVD type ADP 81 ADS 151 301 501 801 1001 equipment N2 flow sensor optional A 30 ADP ADS Series One dry pumps for semi conductor s industry Several models are available for the CVD processes which are generating lots of quantities of particles and condensable gases BPSG TEOS LPCVD nitride Compared to the previous version the main differences are the following nitrogen injection and cooling circuit are optimized to avoid deposition and condensation ADP temperature controlled device extra protections of ball bearings against process particulates are used in ADP and Roots Note The TC version Temperature Controlled includes an optimized cooling circuit and a temperature regulation on the ADP These functions can be installed on equipment for corrosive processes without CVD option Neutral gas amp Exhaust G 1 LP1 2 LP2 3 LP3 4 HP4 5 HP5 N eutral gas injection 6 Shutoff valve 7 Gas flowmeter 8 N2 flow sensor
26. NO Sensor not connected Check the wiring gas 170 C NO Problem on the platinium See D 91 sensor 4 9 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING 0 ADP motor gt 65 a eon Alcatel High Vacuum Technology User s Manual ADP ADS 5 9 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING Alert or alarm Purge N 2 Alert and alarm are swit ched on according to the delays programmed in M3 configuration 6 9 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING Alcatel High Vacuum Technology User s Manual ADP ADS 7 9 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING ee a ee 8 9 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stoppi
27. OC N2 date when the monitoring PUMPING tiia l have been set for transport 02 02 98 11 32 54 y Press the ke SET M3 VERSION 2 03 Valid the code with the key Acces code can be personalized see C 30 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 Setting Observations Initializing the equipment by updating the clock Set the STORAGE menu to save the internal parameters during transport or prolonged storage Action Observations Press the key repeatedly to have access to the SETTING MENU Validate with the key gt W ith the key move through the menu to DATE TIME Validate with the key Decrease or increase the selected parameter using the keys Q gt Validate the setting using the key SEY This action validates the setting and moves onto the next parameter Validate the settings and return to the main menu with the key Press the key repeatedly to have access to the STORAGE Validate with the key Press the key SET Pumping cannot be started Seconds counter is blocked Alcatel High Vacuum Technology User s Manual ADP ADS C 10 Start up of the M3 monitoring system Display Observations DEFIN ITIO N SETTING MENU MAINTENANCE MENU O PERATIN G TIME PURGE PRESS SENSOR SERIAL UN K DATE TIME TEM PERATURE UN IT DATE TIME MM DD AA 02 02 98 HH MM SS Ii 32 54 DEFINITION
28. RT followed by STOP on the front panel The flush is performed after the machine is stopped e to wear gloves protective glasses and if necessary a breathing mask to ventilate the premises well e not to dispose of residue but if necessary to have it destroyed by a qualified organization Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 D 00 Safety instructions related to maintenance e Certain gases can become corrosives and toxic when trapped in oil Always wear protective gloves when handling used and dirty pump oil drain it into a closable container and do not breathe the fumes of the oil Always use fully self contained breathing apparatus e When the silencer is maintained avoid any contact with the reaction by products deposit powder strongly corrosive wear gloves even a breathing mask Cleaning procedure can produce violent reactions and dangerous gas releases We recommend to ventilate the premises well and disassemble the equipment under a suction hood e Always dispose of used dirty oil or sub products properly and in compliance with all local state and federal environmental laws and regulations A After a complete maintenance operation on the pump or on the installation itis recommended to perform a tightness test with helium Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 10 First level of maintenance
29. Section D 00 PART CLEANING AND CARTRIDGE REPLACEMENT Complete silencer with cartridge Part No 100210 E 30 wove ae a ps XN z4 E n S OXI ae 7 io ie wo a ol D sos BO YEY lt lt gt 2 1 RAKE SOS ae a Kae ee x7 ES ea VR o we VER 1 S77 e E Vv ys AN F V yN DN aes on A WAX Le KAS ATA 7 A eat SOTA 1 oo ee LORRY ENE lt 3 Aq 5 Bae aS eS pee ea 1 TS an ma Ae STC ene 2 ye An a SS yt A 2 gt yt I Z Saer AS no NA ie 7 FAS Ea aS SoS es Z Ne NGA 14 ea es ae Z T VON A X WS Y ese Sy Se a EENG A moj Nee S Sd hee a a oN ears lt La ag OP A T ey ee A a SS oN oe a oe E Parts to be replaced Silencer maintenance kit Part No 040095 items 2 3 4 Separate the outlet tube from the silencer Remove the cover assembly Soak the silencer body in a bath of hot water and remove the deposit located inside the silencer Remove the cartridge and the Borelly washer Loosen and remove the lock nuts and the nuts to release the stop valve 5 Remove the two O ings 3 and 4 Clean all the parts in a bath of hot water using a cloth if necessary Dry in the air or with compressed air Position the Borrelly washer Reassemble the other parts by replacing the O rings 3 and seals 2 3 1 and install a new cartri
30. See B 00 All the electrical connections required for operation have been done in the factory However the user must make the electrical connection of the main power supply connect the remote monitoring system options MAIN CIRCUIT BREAKER RATING Minimum value ADP 31 81 ADP 81V ADS 151 301 501 ADS 801 1001 LV 15A 20A 20A 25A HV 10A 15A 15A 20A For any change of power supply voltage in relation to the initial configuration contact Alcatel Customer Service Cutt off rating of main pump switch 200 to 415 V 50 kA 460 V 20 kA 480 V 10 kA The main switch on the monitoring front panel can be locked with a catch hook attached to the emergency stop button Even if the main switch is locked in the 1 position the disconnecting function remains operational Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 B 110 Pump Power supply Standard version The pump is supplied with a female connector which is connected to the electrical connector at the lower part of the frame Connect the mains to the power supply connector using a4x 4mm Then connect the connector on the pump frame Ground phase 3 phase 2 phase 1 6 3 2 1 5 4 Female connector 6 pins Ground Rear of pump Check the rotational direction of the pump at the first pump start up See section B 130 Modular version Mains connector is located on the electrical box lower face The connection has to be carr
31. alid Disabled PURGE CONTROL SELECT Valid Disabled THERMO CONTROLLED Valid Disabled FLOW N2 OPTION Valid Disabled O ther menus next page Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 SETTING 2 3 M3 Monitoring system function table PURGE FLOW SENSOR TEMP SENSOR ADP POWER SENSOR ANA INPUT SENSOR E1 LOGIC SENSOR E2 LOGIC SENSOR PURGE FLOW PROLONGED PURGE PRESS SENSOR SERIAL LIN K DATE TIME TEMPERATURE UNIT PRESSURE UNIT Technical modifications reserved Alert time Alarm time If Thermo controlled Disabled Alert 1 threshold Alert 2 threshold If Thermo controlled valid Alert threshold Alarm threshold Alert threshold Alarm threshold Alert threshold Alarm threshold Alert time Alarm time Alert time Alarm time 0 to 120 min 600 to 900 mbar Type Echo Address Speed Parity Stop bit Time Date menu Celsius Fahrenheit mbar hPa Torr PSI C 30 0 to 60 min Disabled 0 to 60 min Disabled 0 to Alert 2 Alertl to 170 C 20 to Alarm threshold Alert threshold to 130 C 500 to Alarm threshold Alert to 5000 W 0 to Alarm threshold Alert threshold to 10 000 mV 0 to 60 min Disabled 0 to 60 min Disabled 0 to 60 min Disabled 0 to 60 min Disabled Initial config 10 min Initial config 860 mbar RS232 RS485 N ETW ORK Valid Disabled 0 to 999 300 9600 Even None O dd 1 or 2 Initial config
32. ance with the EEC AN safety rules is guaranteed normal range 10 it is recommended to take precautions as regards of the risk of tlting during product handling installation and operation Removing the shipping braces Keep the flanging components in order to dispatch the equipment if required 1 Release the pump s from the frame before use e Remove these bars and the threaded rods which hold them SECUR NU P Transversal bar Or ae Screw Modular version The shipping braces are also used as hoisting device Failure to remove the shipping braces could later cause the pump to seize as a result of a strain exerted by the braces Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 ADP ADS Standard version ADP ADS Modular version B 30 Y EB gt E lt lt Anti vibration pads The ADP ADS pumps can be equipped with anti vibration pads which are mounted beneath the pump near the locking feet e Remove the covers as described in section B 20 e Raise the pump using the 4 screws jacks e Screw into the previous holes the 4 anti vibration pads e Screw the screw jacks so that the machine rests on the pads Force transmitted to the ground by each support lt 0 5 N for frequencies lt 150 Hz In order to limit the transmission of vibrations along the pipes it is recommended to use flexible connecti
33. ay 98 D 100 Consumption Alert and alarm Consumed power higher than alert or alarm thresholds Invert two phases on mains plug J1 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 CAUSE Insufficent water flow No water flow Water flow OK D 110 Water flowrate Alert TRO UBLESHO OTING Check the flowmeter setting according to section B 120 Check that the electrovalve the flowmeter or the pipes are not clogged Check that there is no leak Either check the water supply and the connections Check the connection and the water valve coil condition Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 120 Motor temp Alert or alarm ADP motor temperature Check the water flowrate in the pump see D 110 higher than the thresholds Check the motor temperature Check the sensor and the wiring by shunting pins 21 amp 22 of J5 o ee Check the sensor and the connection by shunting pins 19 amp 20 of J5 ee Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 130 Analogic input Alert or alarm Wiring or display problem Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 140 E1 logic Alert or alarm or E2 logic Alert or alarm Sensor or connection problem El logic Shu
34. con oxide and doped oxide CVD 501 mn 1 bar 90 C BPSG PECVD using TEO S Silicon oxide and doped oxide CVD 701 mn 1 5 bar 90 C BPSG LPCVD using TEOS Silicon nitride PECVD CVD 701 mn 1 5 bar 90 C Silicon nitride LPCVD CVD 90I mn 2 bar 100 C cold trap at the oulet of the furnace can be useful no heating of the line between the cold trap and the pump Should the layer be thick gt 1500A please contact Alcatel Worldwide Technical Support for dry pumps Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition O03 May 97 Check the rotational direction of the pump at the first pump start up B 130 Checking the rotational direction A Study the preliminary precautions See B 00 Before using the pump check that the connections AN defined in the start up chapter have been made Also make sure that all the oil levels are visible at the center of the indicator Remove the guards blocking the intake and exhaust and if applicable purge holes these components prevents foreign bodies from entering the pump during transport and storage It is dangerous to leave them on a pump in operation e Remove the blank off flange on the inlet port e Fit a pressure gauge at the pump inlet e Set the main switch on I When inspecting the direction of rotation of the Roots AN pump at installation provide protection against the risk of compression related to t
35. dge Alcatel 4 with new High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 E 30 Silencer maintenance Edition 04 May 98 Setting Observations Accessing the parameter programming The programming made at the factory is protected by an acceess code which disables the entry of new parameters Access in the MAINTENANCE menu Acces to chosen parameter menu Reset the parameter Action Observations Press the key Press the key until the code is obtained Valid the code with the key Press the key repeatedly to access to MAINTENANCE MENU Valid with the key Press the key repeatedly to access the chosen MENU SET yw WwW E a Press the key and pressing The fresh screen appears Press the key repeatedly Co to reset the delay Valid with the key Alcatel High Vacuum Technology User s Manual ADP ADS dd Display Observations ACCESS CODE DEFIN ITIO N SETTING MENU MAINTENANCE MENU OPERATING TIME OVERHAUL ADP ADP LP BEARINGS INSPECT SILENCER OVERHAUL ROOTS e eee o Y COUNTER SET DURATION 0 H MAXI 17000 H MINI 1000 H 3 3 Edition O3 May 97 E 50 Freeing up the ADP lf after a prolonged stop the ADP does not restart using the function START because of sub products deposed inside the pump it is possible to free it up manually Consult the standard precautions before intervention See Section D
36. e fault contacts on the REMOTE connector at the rear of the monitoring unit are closed pumping is stopped A list of incidents is given in the chapter D JN Avoid moving a pump in operation Press the STOP key the monitoring system performs the following operations pump stopping water valve closing injection of purge gas is continued during the shutdown phase if programmed when the pump is fitted with an exhaust valve or inlet valve this valve is closed when pumping stops W hen the stoppage is caused by a power cut automatic restarting is possible if AUTOMATIC RESTARTING has been enabled When the pump has been configurated for automatic restart after a power failure it is the responsibility of the user to take all the measures required to prevent risks resulting from this type of operation M3 monitor enables other operating modes particularly control by PC via RS 232 interface and RS 485 see section B 150 or the remote control via the connector Remote see section B 140 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition O3 May 97 Pump equipped with the M1 monitoring system and in local mode Remote monitoring unit M1 Stopping pumping C 50 Use of the M1 monitoring system Study the safety precautions see B 00 For the first pump start up check the rotational direction of the pump see B 130 e Set the main swi
37. enance frequency For processes 2 See section B 120 Description Time Equipment required M required Descrip tion Part y IC Comments number 0 Silencer cartridge Equipped l silencer available control 1 Silencer cartridge 040095 arr LP bearing Minor ki a inor KIt Consult lt lt replacement T 31 81 090576 Alcatel m Full overhaul Major kit 31 Consult d Major kit 81 A EALE ALCATEL 113 oil 0 5 L z Full overhaul Major kit 151 100068 051940 E Major kit 301 601 090839 3 M ALCATEL 113 oil 064657 7 0 5 L Qty 2 for 301 i amp 601 2 oil fillings O for 301 et601 xX mn Full overhaul 12 H Major kit 101109 ke ALCATEL 113 oil 064657 6 oil fillings 8 0 5 L Qty 6 i y O g A ADP 31 ADP 81 Maintenance Testing and cleaning time not included A B ADS 151 301 501 Maintenance For oil filling see section B 50 A C ADS 801 1001 Maintenance Maintenance times can change according to processes and equipments used 1 With TC version and silencer heating the maintenance of the silencer can be extanded to 8500 h 2 3 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 20 Maintenance frequency For processes 3 See section B 120 ADP 31 ADP 81 Roots 151 301 601 Roots 1001 1501 Alcatel Description z z z Tme Equipment required 7 iiaii Description Part ja IC Comments number
38. et of the furnace can be useful no heating of the line PROCESSES 3 Should the layer be thick gt 1500A please contact Alcatel Worldwide Technical Support for dry pumps between the cold trap and the pump Pump version non CVD non CVD non CVD non CVD non CVD non CVD non CVD non CVD non CVD non CVD CVD CVD CVD CVD CVD CVD Alcatel High Vacuum Technology User s Manual ADP ADS Nitrogen No 201 mn 0 2 bar No 25l mn 0 3 bar 25l mn 0 3 bar 251 mn 0 3 bar 351 mn 0 6 bar 351 mn 0 6 bar 351 mn 0 6 bar 451 mn 1 bar 351 mn 0 6 bar 501 mn 501 mn 1 bar 1 bar 501 mn 1 bar 701 mn 1 5 bar 701 mn 1 5 bar 901 mn 2 bar B 120 Water 100I h 100I h 601 h 601 h 601 h 40l h 601 h 401 h 1001 h 601 h 601 h 601 h 601 h 40l h 401 h 401 h P 1 Maintenance P 2 Maintenance P 3 Maintenance 1 2 PROCESSES 2 PROCESSES 3 B 120 Water flowrate and gas purge according to main semiconductor processes TC Pump setting Pump Processes Pump version Nitrogen temperature e Metal etch heated piping and non CVD 351 mn 0 6 bar 90 C exhaust lines advised e Poly etch non CVD 351 mn 0 6 bar 80 C Polysilicon LPCVD and PECVD CVD 45l mn 0 8 bar 80 C Silicon oxide PECVD and LPCVD CVD 501 mn 1 bar 80 C using Silane e Si mono Epitaxy CVD 501 mn 1 bar 80 C Sili
39. he rotating machine on the inlet Caution A non powered Roots can be driven by another pump in rotation risk of compression e Startup the pump by pressing START and stop it after a few seconds if the pressure indicated is less than 5 10 mbar the rotational direction is correct if the pressure increases invert two phases at the mains input female connector e Connect the pumping circuit N ote In the case of an ADS 801 or ADS 1001 do not start the Roots Note We can also check that the pump is forcing back at the exhaust after that the blank off flanges have been removed from inlet and exhaust lf not invert two phases Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition O03 May 97 Monitoring system M3 Remote control REMOTE Alcatel High Vacuum Technology User s Manual ADP ADS B 140 Remote control plug connection M3 monitoring Study the preliminary precautions See B 00 with dry contact outputs it is the responsibility of the customer to use these outputs in compliance with safety standards When units containing control circuits are equipped Remote contro function allows to e Remote control of pumping functions START STO P Emergency stop PURGE e Copy out with dry contacts 250V 1A 100VA the monitoring parameters These contacts can be used to control automatisms Wiring of the cover plug to put if the remote control is not used R
40. ied out as defined previously in page 1 2 3 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 B 110 Pump Power supply Connectors of remote Remote set electrical box is set electrical box connected by means of a 5 meters extension cable 1 Mains connector 2 Roots supply ADS 3 Remote control 4 Sensors information n 1 5 RS 232 RS 485 6 Interface connector 7 ADP supply Sensors information n 2 Check the rotational direction of the pump at the first start up See B 130 Alcatel High Vacuum Technology User s Manual ADP ADS 3 3 Edition 04 May 98 Water flowrate and gas purge according to main semiconductor processes Standard pump setting no TC Processes Load lock If possible chlorine degassing Sputtering Dielectric etch Stripping with plasma O2 trap can be useful proposed by some manufacturers Resist and polyamid etch trap can be useful proposed by some manufacturers PROCESSES 1 e o o e M etal etch heated piping and exhaust lines advised Poly etch lon implant source Tungsten LPCVD Titanium and Titanium nitride PECVD Polysilicon LPCVD and PECVD Silicon oxide PECVD and LPCVD using Silane PROCESSES 2 Silicon oxide and doped oxide BPSG PECVD using TEO S Silicon oxide and doped oxide BPSG LPCVD using TEO S Silicon nitride PECVD Silicon nitride LPCVD cold trap atthe oul
41. ings As these pumps are typically used in a corrosive atmosphere their reliability will depend on proper installation and maintenance When assembling the vacuum circuit make sure to provide necessary maintenance accessories such as shut off valves on the inlet exhaust and purge lines For safety reasons use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used Determine where the pump will be placed Refer to the technical specifications section for dimensions if needed section A Use a hoist to handle the pump lifting it by the three hoisting rings The pump must be operated in the horizontal position with the pumping axis vertical and the inlet opening upwards Each pump is equipped with a locking screw jack on each corner Lock the pump by adjusting these jacks so that all four feet are resting solidly on the floor See section B30 for installing Anti vibration Pads Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 B 20 Positioning the pump in the pumping installation Remove pump covers Unfasten the toggle joints located on the top of the cover 1 e Unfasten the lateral fastening and raise the cover by the handles 2 Toggle joints 2 3 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 03 May 97 Edition O3 May 97 Risk of tilting Even when compli
42. insure that the exhaust meets all air and water pollution control regulations e The enclosures have to be exhausted with a volumetric flow rate of 86 CFM with a duct static pressure of 0 35 w g as measured 2 0 from the duct connection to the cabinet The size of the exhaust duct is 4 the material can be PVC except for flammable gases for wich Stainless steel is strongly advised Alcatel High Vacuum Technology User s Manual ADP ADS Edition 03 May 97 Edition O3 May 97 B10 Unpacking Storage Risk of tilting Even when compliance with EEC safety AN rules is guaranted normal range 10 it is recommended to take precautions as regards the risk of tilting during product handling installation and operation 2 0 uter crate lt jnner crate Pump Standard oo Palett mm 50 inch 2 A B C ADP 31 81 SD and MD 1350 53 500 38 980 19 7 ADS 151 301 601 Stand MD 1350 53 1150 45 520 20 1 ADS 801 1001 1900 74 6 1520 58 810 32 If the equipment has been damaged take necessary AN steps with the carrier and inform Alcatel if necessary In all cases Alcatel recommends that the packaging be saved in the event that the equipment must be transported or put into prolonged storage Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 B10 Unpacking Storage For all equipment handling use the
43. intenance operation is perfomed by a maintenance technician who has not received safety training EMC electrical safety chemical pollution etc isolate the product from the various energy sources electricity compressed alr etc e The EMC perfomance of the product is obtained on the condition that the installation complies with the EMC rules In particular in disturbed environments it is essential to use shielded cables and connections for interfaces Stabilize the power supply line with meshing from the power supply source to a distance of 3m from the product inlet e When the main switch is set to 0 a part of the equipment remains energized Live circuits are exposed and accidental contact is possible Energized electrical Work Hot Work in compliance with SEMI S2 93 Type 4 Before any maintenance operation disconnect the main electrical cable A Risk of electrical shock Switch off the pump and disconnect the main cable Do not operate inside if your are not trained and authorized Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 B 00 Safety instructions e The EMO device is a pump EMO nota system EMO so it shuts only this part of the equipment To allow the pump to start turn the EMO button clockwise and pull it To control the system EMO itis necessary to wire the corresponding contacts on the Emergency plug see B 140 Either you can stop the pump from the system EMO by
44. llows to monitor a logic sensor during an alert time and stop pumping at the end of the alarm time 1 2 C 20 Setting the M3 monitoring system parameters Summary table of censors UNIT THRESHOLD FACTORY monitoring parameters CONFIGURATION Max and Min Mini Maxi Alert Alarm thresholds Purge sensor mbar 600 900 860 min 0 60 0 Disabled Gas temperature sensor C 0 170 a P 160 Pump 0 sensor TC C 20 130 110 120 M otor power sensor W 500 5000 2500 4000 E analogical sensor mV 0 10000 Disabled Disabled E1 logic sensor min 0 60 Disabled Disabled E2 logic sensor min 0 60 Disabled Disabled The pump may be started The operation monitoring depends on the fault programming However the M3 monitoring system may be customized according to the current application by programming the parameters pump stopped of the various menus listed on C 30 Temperature regulation occurs 10 C below the alert threshold 2 2 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 C 30 M3 Monitoring system function table Initial configuration bold DEFINITION INLET VALVE OPTION Valid Disabled ANA INPUT SELECT Valid Disabled E1 LOGIC INPUT Valid Disabled E2 LOGIC INPUT Valid Disabled SYSTEM SELECTION ADS151 ADS301 ADS501 ADS801 1001 ADP81 ADP81V ADP31 ADS501V AUTOMATIC RESTARTING Valid Disabled ROOTS CONTROL Valid Disabled gt BUZZER CONTROL SELECT V
45. logy User s Manual ADP ADS TRO UBLESHO OTING Check power supply Switch iton Version before 96 12 Push on the red button untill zero and release Since 97 01 Push on the blue button untill zero Check the calibration Switch iton Call Alcatel customer service Call Alcatel customer service 1 4 INCIDENT Pressing on Start does not start up the pump Roots is not running Roots does not run and Roots message is displayed ADP does not run 2 4 CAUSE TRO UBLESHO OTING Problem on M3 Call Alcatel customer service ADP plug Check the connection bad connected NO Defective management Call Alcatel customer service board Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 40 INCIDENT CAUSE Messages on the display Message STO CK Pump in storage mode Message REM On Remote mode No RP plug or bad connection Alarm Breaker KM 2 Roots KM2 Contactor a Alarm Breaker RT1 ADP RTL breaker a Alarm Breaker RT2 Roots RT2 breaker ae See next page 4 4 Alcatel High Vacuum Technology User s Manual ADP ADS TRO UBLESHO O TING Set the main switch on 0 then set it again on 1 Check the condition and the connection of the contactor See D 70 Switch it on Check Its rate See D 70 Check ADP mechanical condition Switch it on Check It
46. me the electrical box can be set remote to 5 meters from the pump if necessary Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 A 30 ADP ADS Series One dry pumps for semi conductor s industry The ADP ADS range is designed for three types of applications Clean processes This concerns all applications for clean pumping particle free and non corrosive gases load lock pumping for example No nitrogen purge needed ADP 31 ADP 81 ADS 151 301 501 equipment Exhaust C 10 Water electrovalve 12 Water flow sensor 11 Water flowmeter 13 Isolation valve accessory Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 Corrosive processes 2 3 A 30 ADP ADS Series One dry pumps for semi conductor s industry This concerns all applications for pumping chlorinated fluorinated crystallizable or condensable gases for example ion implantation etching epitaxy This version contains a nitrogen injection system in all the pump s stages It is used to help evacuate pollutants produced by the process dilute the harmful gases present in the compression stages and protect the mechanical parts of the pump Gas injection at the different stages of the pump The neutral gas usually nitrogen injection system is used to decrease the concentration of process gases and the condensation of gases in the pump Inlet v Cc KN
47. mote control buttons i W ith inhibition of remote control buttons 2 ith switch A ae 8 7 6 5 4 3 2 1 D e td ie FG OGTT O O OQO 25 24 23 22 21 20 19 18 17 16 15 14 d The remote control STOP button will stop the ADP but it will restart as the push button is released Alcatel High Vacuum Technology User s Manual ADP ADS 1 4 Available outputs of Monitoring system M1 State of Emergency Monitoring system M1 2 4 amp 58 8 Emergency stop W ith external power supply Dry contacts 250 V 1 A 100 VA These contacts open in the presence of a fault Two contacts available for each fault type Available outputs Contact 1 Contact 2 1 Major faults RT1 switched off 12 13 8 21 2 Pump working KM 1 switched off 9 22 6 19 3 Temperature faults DoC 10 11 7 20 W ATER VALVE M O TO R TEM P EM ERG EMERGENCY Plug Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 Edition O3 May 97 M1 Monitoring system on modular ADP Remote control REMO TE Control Inputs Monitoring system M1 B 141 Remote control plug connection M1 monitoring If the remote control is not used put REMOTE plug the cover plug wired like W ithout inhibition of ON remote control buttons fifi iG Emergency stop Stop W ith inhibition of remote contro butto
48. mp s manual control keys are located keyboard Indicators Parameter selection and configuration keys The SET key Is used to have access to the pull down menu to read or modify parameters The functions of the symbol Functions parameter selection Used to have access to and configuration keys Parameter setting mode the parameter setting mode access key Used to exit the various menus without validating the functions Used have access to the next or previous menu the next or previous parameter Selection keys in the displayed menu Used to select or adjust the value of the parameter selected previously Configuration Used to validate the selection of validation key a menu parameter or value An insulating film protects the keys Do not use hard objects such as pens screwdrivers etc which could damage the key Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 Setting Observations Power ON Main switch of M3 to I Accessing to the parameter programming The programming made at the factory is protected by an access code which disables the entry of new parameters 2 3 C 10 Start up of the M3 monitoring system The M3 monitoring system has been configured in the factory according to the options and accessories defined during the order Acton Observations Display Observations Display of the pump running time the pump status and the 75H L
49. ng INCIDENT CAUSE TRO UBLESHO OTING Alcatel High Vacuum Technology User s Manual ADP ADS 9 9 Edition 04 May 98 INCIDENT CAUSE TRO UBLESHO OTING Bad vacuum or no vacuum Mechanical noise Damaged ball bearings Maintenance ADP Call Alcatel customer service NO Rotors seizing Maintenance ADP Call Alcatel customer service NO Unsynchronized gears Maintenance ADP Call Alcatel customer service No N2 purge Bad configuration Reset M3 configuration or set the purge manually Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 70 Breaker Alarm Breaker KM2 Alarm Check the breaker CB2 on M3 rear panel Roots KM2 Contactor f the message still remains call Alcatel customer service Breaker RTL Alarm a E Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 Breaker KM1 Alarm ADP KM1 contactor Breaker EMO Alarm Emergency stop e Check CB2 breaker at the rear of M3 see D 10 e Check the strap presence between the pins 41 42 43 and 44 on remote plug see B 140 e If the defect still remains call Alcatel customer service e Check that the emergency stop button is not tripped unlock it by rotating 1 4 of turn e If the defect still remains call Alcatel customer service Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98
50. ns W ith switch 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 GOJOR O00 0 0 OfO 0 0 OC C 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 eG Oo OO OO i Oro OS O OIO O O QO O Q oood 5 36 37 38 39 40 41 42 43 44 45 46 47 48 49 5 E ul H Emergency stop ON OFF switch The remote control STOP button will stop the ADP but it will restart as the push button is released Alcatel High Vacuum Technology User s Manual ADP ADS 3 4 Available outputs of Monitoring system M1 State of Emergency Monitoring system M1 4 4 B 141 Remote control plug connection M1 monitoring W ith external power supply 24VDC Emergency stop Dry contacts 250 V 1A 100 VA These contacts open in the presence of a fault Two contacts available for each fault type Available outputs Contact 1 Contact 2 1 Major faults RT1 switched off 12 13 8 21 2 Pump working KM 1 switched off 8 10 14 15 3 Temperature faults ee iene 5 7 35 36 W ATER VALVE M O TO R TEMP EM ERG EMERGENCY Plug Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 Edition O03 May 97 B 150 RS 232 or RS 485 link wiring At the first power on the user will find the initial configuration set at factory The settings can be modified through the M3 corresponding menu The initial configuration of the serial link is as follows W Type RS 232
51. nt the sensor a Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 150 Valve option Alert and alarm Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 04 May 98 D 160 Variator Alarm Configure on ADS 801 1001 ADS 501V or ADP 81V Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition O03 May 97 E 20 Pump draining Roots front and rear casings Study the safety precautions before intervention See sheet D 00 Certain gases become corrosive and toxic when trapped in oil Always wear protective gloves when handling used and dirty pump oil drain into a closable container and do not breathe the fumes of the oil Always use fully self contained breathing apparatus A Always dispose of used or dirty oil or sub products properly and in compliance with all local state and federal environnemental laws and regulations Housing oil replacement Unfasten the fill plug in order to eliminate any excess pressure in the housing fio Remove the drain plug and allow the used oil to flow into a container capacity 0 5 litre fill plug oil level indicator drain plug Caution the Roots is equipped with 2 housings Repeat the operation for each housing Replace the drain plug and the remove the fill plug Introduce the quantity of new oil required see Section B 50
52. older pumps by ordering P N 104527 See page B 20 High Vacuum Technology User s Manual ADP ADS 1 2 B 40 Modular version Layout e l Exhaust Exhaust gt 5 basics modules for 8 pumps configurations Inlet a E OEM interface Utilities panel Flowmeter panel EXHAUST Some location examples 4 WATER amp N2 4 POWER SUPPLY SUPPLIES m INLET cen s VA es ee FLOW METER PANEL CONFIGURATION A CONFIGURATION F 2 2 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 03 May 97 Edition 04 May 98 Oil quantities Filling procedure B 50 Filling the machine oil housings Caution The pumps are delivered without an oil charge the oil is found in separate containers Similarly it is recommended to drain the pump before redispatching the equipment For machines wich use lubricants it is recommended to request the manufacturer for the safety data sheets concerning the product used The pump is tested using synthetic fluid Alcatel 113 W hen pumping corrosive gases we recommend synthetic fluid Alcatel 113 Mineral and synthetic oils cannot be used together Contact Alcatel or your service agent before making any changes O IL FILING REAR FRONT TOTAL RooTS RooTs CAPACITY HOUSING HOUSING HOUSINGS ADP ADP 31 81 0 351 0 35 L ADS 151 i 02 5a 0 151 0 75 L ADS 301 i 0 45 L 0 251 1 051 ADS 501 j 0 45 1 0 25 1 IO S ADS 801
53. omatic control systems see section B 140 2 2 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 03 May 97 Edition 04 May 98 D 00 Safety instructions related to maintenance This chapter describes the main preventive maintenance Operations and provides a guide for first diagnosis in the event of an incident Standard precautions before any maintenance operation Before performing a maintenance operation switch off the pump by setting the main switch to 0 and disconnect the mains cable CAUTION before any operation check the pumping conditions of the installation toxicity corrosion possible radioactivity of the pumped gases AN Product tightness is guaranteed upon leaving the factory for normal operating conditions Itis the responsibility of the user to ensure that the level of tightness is maintained when pumping dangerous gases Depending on the case we recommend e to purge the installation with dry nitrogen The flush is performed automatically when the pump is stopped normal stop or due to a fault if a maintained level of purge gas has been programmed Otherwise proceed as follows If the pump is remote controlled remove the connections on the REMOTE connector at the rear of the monitor and connect the plug connector supplied with the machine instead Adjust the parameters of the M3 monitor and program a maintained level of purge gas for 10 minutes Press STA
54. on accessories at the inlet and exhaust side expanding type ae pi On the modular version e Screw the delivered angle into the frame holes after removing the shipping braces AAU U e Install the anti vibration pads as shown opposite Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 03 May 97 Alcatel Stabilizer kit for modular ADS Positioning in pumping installation B 40 Modular version Layout Main modules layout electrical box flowmeter panel water and gas utilities customer interface fit the customer choice among factory set configurations O ther layouts are possible see the following page Sensor box To modify the modules layout some rules have to be followed Pump s cannot change its their orientation with respect to the frame The sensor box located under the pump has to be set facing the silencer For safety reasons the modular ADS are now ue with a Stabilizer to avoid any risk of eee toppling over It consists of two supports one either side of the frame equipped with rollers at the bottom They slide into a A housing and are bolted into place during transport The housing is bolted to one end of the frame W hen pump is installed the supports are stored legs up and fixed by means of two bolts This kit is a part of modular pumps marked with a serial number upper than 973187 It can be fitted to retrofit on
55. ooling connection Standard version connections REAR VIEW 1 4 NPT 1 4 Gas pt coo 1 4 NPT 1 4 Gas HG co ALCATEL supply Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 B 60 Connection to the cooling circuit Modular version connections REAR VIEW N2 OUT O W ater IN IN OUT Waterflowrate adjustment W aterflowrate N2 FLOW PRESSURE ATTA Flowmeter panel N eedle tap The water flow will be adjusted according to the processes with the needle tap see section B120 2 2 Alcatel High Vacuum Technology User s Manual ADP ADS Edition O03 May 97 Edition 04 May 98 Nitrogen characteristics Standard version connections SS REAR FACE Modular version connections e B 70 Inert gas purge connection N2 plug A filtered dry nitrogen supply is required It should have the following characteristics M Dew point lt 22 C E Dust lt lu m MOil lt 0 1 PPM W Pressure between 3 and 7 bar absolute WE Flowrate per pump 100 min Customer supply 1 8 Gas 1 8 Gas ALCATEL supply REAR FACE boas Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 2 2 N2 flowrate
56. p operational principle Multi stage Roots The ADP pump consists of 5 Roots type stages principle The two rotors rotate without touching each other The three stages on the low pressure side are called LP stages and the two stages on the high pressure side are called HP stages Inlet W ater Exhaust Stage 1 Stage 2 Stage 3 Stage 4 Stage 5 LP1 LP2 LP3 HP4 HP5 Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 2 3 Tightness with environment Tightness at low pressure side Tightness at high pressure side A 50 Dry pump operational principle The pump bearings on the low pressure side are fitted with ceramic ball bearings lubricated with fluorinated grease which resists high temperatures and the possible corrosion due to the application An overpressure zone is created around the bearing by injecting a neutral gas Purge LP1 The grease works in a less severe vacuum and thus lasts longer This pressurization also prevents pumped gases from migrating towards the bearings Neutral gas purging for the bearings is imperative for corrosive processes The bearings are lubricated by oil splashing The oil sump is sealed from stage HPs by a trap and a deflector This trap is also used as a heat barrier as a pumped gas barrier to recover fluid Alcatel High Vacuum Technology User s Manual ADP ADS Edition O3 May 97 Edition O3 May 97 A 50
57. r Customer you have just purchased an Alcatel dry pump We thank you and are proud to include you in our customers This product has benefited from Alcatel s many years of experience in semiconductor processes and dry pumping For optimum performance and to obtain full satisfaction from this equipment we recommend that you study this manual before any intervention on your pump in particular the chapter on installation and start up MANUAL REFERENCE 100 448 EDITION 04 May 1998 ADP ADS Series One dry pumps APPLICATIONS e ALL SEMICONDUCTORS PRO CESSES Stripping Etching PECVD LPCVD MOCVD Epitaxy e SCIENTIFIC RESEARCH ADVANTAGES Easily adaptable to processes Tested design Vertical pumping Clean room compatible Advanced monitoring system functions Low noise level Low operating cost Easy maintenance and repairs Anti vibration frame Compact SPECIAL FEATURES M ulti stage Roots technology water cooled multi voltage motors builtin monitoring system remote optional anti dust sound proof aesthetic covers easily removed incorporated purge line N 2 Quick connection Modular design and interchangeable parts Easy to transport N etwork compatible Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition 03 May 97 A 10 ADP ADS Series One Multi stage pump with well known technology Roots technology reliability Sealed motor
58. r with check valve function 3 Compact frame May be equipped with anti vibration pads 4 Utilities panel with Quick Connectors for all utilities W ater gas purge power 5 Two types of monitoring system M1 or M3 integrated The monitoring system M 1 may be remote optional 6 Flowmeter panel with water and purge gas flow rate settings 2 3 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 03 May 97 Edition O3 May 97 Modular Version For specific uses Alcatel has developped a modular version from the series One which offers in addition of standard version the following characteritics A 20 The various versions of ADP ADS Series One Footprint and volume minima Total flexibility of use due to its modular possibilities of installation e No cover for easy integration e Guaranteed accessibility for preventive maintenance and repair The MD Series is composed of a pumping unit on its frame and various modules Flowmeter panel gas purge and cooling water e Utilities panel gas purge and cooling connections Electrical box including monitoring M1 or M3 e OEM interface panel Remote control By design these modules can be fitted to the pump frame in the best suitable position chosen by the user Apart from its mounting in the different possible positions on the pump fra
59. s rate See D 70 Check ADP mechanical condition 3 4 D 40 INCIDENT CAUSE TRO UBLESHO OTING a ae 4 4 Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING ee ee Alcatel High Vacuum Technology User s Manual ADP ADS INCIDENT Consumption Alert Consumption Alarm D 50 CAUSE TRO UBLESHO OTING 8 gas higher than See D 90 alert threshold 2 NO Sensors not connected Check the connection 0 gas 170 C NO Problems on See D 90 platinium sensor Consumption higher than alert threshold or no power Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING Alcatel High Vacuum Technology User s Manual ADP ADS D 50 The pump is running and then is showing an alert or alarm message followed by the pump stopping INCIDENT CAUSE TRO UBLESHO OTING Pump temp Alert Pump 6 higher than See D 91 alert threshold NO Problem on the platinium See D 91 sensor Pump temp Alarm Pump 9 higher than See D 91 alarm threshold
60. tch to I actuate the START switch the pumping starts the water valve opens and the green indicator light goes on The hour counter is only increased when the pump is operating e Adjust the water flow rate see section B 120 Rear view The remote monitoring unit is connected to the unit located on the frame via a 5 or 10 m cable connected at the front In this case all controls are made from the remote unit The frame mounted unit only contains the main switch the emergency stop and the monitoring system indicator lights Actuate the STOP switch the water valve closes the pumping stops J N Avoid moving a pump in operation The user is informed of any incidents by the fault indicator light which goes on red e the audible warning buzzer e the fault contacts on the REMOTE connector at the rear of the monitoring system which close stopping of the pumping although the STOP command has not been given Alcatel High Vacuum Technology User s Manual ADP ADS 1 2 C 50 Use of the M1 monitoring system The M1 monitoring system The remote control function is performed by means of the can be remote controlled REMOTE remote control connector at the rear of each fixed monitoring unit It is used for e The remote control of the pump START STO P Emergency Stop functions e Copying monitoring parameters in dry contact form 250 V 1 A 100 VA These contacts may be used for controlling aut
61. threshold reached unit stop 4 5 6 Pump fail Alarm signal detected 1 34 and ADP working These contacts close in the presence of a defect 1 Fault O ne of the parameters at alert threshold 12 13 2 Fault Alarm threshold reached unit stop 11 10 State of Emergency The front panel emergency stop button copy out contact is Monitoring system M3 available between 1 and 2 contacts of emergency plug at the rear of the monitoring system U2 MOTOR TEM P PURGE ANA IN PUT V O PTIO N 7 ROOTS CONT ALVE EMERGENCY Plug Alcatel High Vacuum Technology User s Manual ADP ADS 3 3 Edition O3 May 97 M1 Monitoring system M1 Remote monitoring Remote control REMO TE Controls Input Monitoring system M1 B 141 Remote control plug connection M1 monitoring A Study the preliminary precautions See B 00 When units containing control circuits are equipped with dry contact outputs it is the responsibility of the AN customer to use these outputs in compliance with safety standards Remote contro function allows to e Remote control of pumping functions START STO P Emergency stop PURG E e Copy out with dry contacts 250V 1A 100VA the monitoring parameters These contacts can be used to control automatisms If the remote control is not used put REMOTE plug the cover plug wired like W ithout inhibition of re
62. ting parameters and the message ALERT MAIN TENANCE the FAULT indicator is lit Press the SET button during pumping and the operating times for components are displayed in turn This information can be red at any time using the Operating time menu Perform maintenance on the relevant parts See Section E Alcatel High Vacuum Technology User s Manual ADP ADS Edition 04 May 98 Edition 04 May 98 D 20 Maintenance frequency For processes 1 See section B 120 Description I 3 Time Equipment required Specifi M ee Description aa i Comments number 0 LP bearing __ Minor kit Consult 4 replacement 30 min 31 81 090576 Alcatel OW O lt i Full overhaul 10 H Major kit 31 040162 Consult m 12 H Major kit 81 061925 a ALCATEL 113 oil 064657 tk 0 5 L z Full overhaul Major kit 151 100068 051940 p Major kit 301 601 090839 m ALCATEL 113 oil 064657 A 0 5 L Qty 2 for 301 J amp 601 2 oil fillings a for 301 et601 x A Full overhaul 12 H Major kit 101109 ALCATEL 113 oil 064657 6 oil fillings Us xX z 0 5 L Qty 6 y O 4 A ADP 31 ADP 81 Maintenance Testing and cleaning time not included A B ADS 151 301 501 Maintenance For oil filling see section B 50 A C ADS 801 1001 Maintenance Maintenance times can change according to processes and equipments used Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 D 20 Maint
63. wrate to be detected with the corresponding purge pressure See B 120 Adjust the position of the moving part from top to bottom until the PURGE FLOW is displayed on the screen of M3 monitoring Fix it with the screws Check the good operation by increasing the purge pressure to a level higher than the one to be detected then reduce this pressure until the purge alert is triggered N ote if this triggering pressure corresponds to the minimum required one N2 inlet Electrical box Alcatel High Vacuum Technology User s Manual ADP ADS 1 1 Edition O3 May 97 At the exhaust pump Preliminary precautions Ant noise seal B 90 In order to prevent moisture from entering the pump before its installation it is pressurized beforehand with nitrogen and sealed with blank off flanges The vacuum pump is also a compressor incorrect use may be dangerous Study the user manual before commissioning the pump First of all remove the plug at the exhaust Provide maintenance accessories for vacuum circuit mounting inlet and exhaust isolation valves purges It is recommended to connect the pump exhaust to a flue gas evacuation pipe For safety reasons use at pump inlet as well as exhaust accessories with materials and tightness compatible with pumped gases Antinoise seal For free exhaust tests inert gas pumping an antinoise seal Supplied with the pump can be fitted on to the silencer exhaust
64. xhaust valve connection withdrawal B 100 PUMP POWEF SUPDIY secc B 110 W ater flowrate and gas purge according to processes B 120 Checking the rotational direction ccce B 130 Remote control plug connection M3 monitoring B 140 Remote control plug connection M1 monitoring B 141 RS 232 or RS 485 link WINng esseere B 150 Use of the Serial link Service Centers B 160 Installation of silencer heating kit B170 Alcatel High Vacuum Technology User s Manual ADP ADS 1 3 C Operation D Maintenance O bB Contents Startup of the M3 monitoring SyYSteM cn C10 Setting the M3 monitoring system parameters i C 20 M3 Monitoring system function table C 30 Use of the M3 monitoring SySt M scce C 40 Use of the M1 monitoring System ccccceceeeeeeeeeee ees C 50 Safety instructions related to maintenance s D 00 First level of Maintenance ccce D 10 Maintenance frequency eerren D 20 Diagnosis and troubleshooting ccccceeeeeeeererseeeeeeens D 30 Pump doesnot darlene neaina nadia dieasaccnies D 40 The pump is running and then Is showing an alert or alarm message followed by pump stopping D 50 PUMP is running N message ccccececececeeeeeeeeeeeeeeees D 60 Breakers n Ala Mera E TN D 70 Pressure Purge N 2 Alertand alarm neccen D 80 G as temp Alet nassssisisririrrrrerrrrrrrerrrrrrrrrrreren D 90 Pump temp Alert aec D 91 Consumption Alert and alarm n

Operating Instructions Alcatel Adixen ADP/ADS Dry Pumps

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