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User Manual PZ252E

1. GD Damage due to bending of the tantalum electrodesl The P 1xx xxT models are equipped with tantalum electrodes than can be bent if handled improperly gt Make sure that you do not touch the tantalum electrodes during unpacking and handling NOTICE aD Damage due to scratches on the surface of the piezo actuator The surface of the piezo actuator is scratch sensitive Scratches on the surface can cause damage to the piezo actuator gt Do not use metal tools to install the piezo actuator gt When installing the piezo actuator make sure that the ceramic or polymer insulation or end surfaces of the piezo actuator cannot be scratched during installation and operation NOTICE Heating up of the P 1xx during operation The heat produced during operation of the P 1xx can affect your application gt Install the P 1xx so that your application is not affected by the dissipating heat P 1xx Piezo Actuator PZ252E Version 1 0 0 2 5 Installation P I INFORMATION Ground loops can occur when the shield of the connecting cable of the P 1xx is connected to an actuator case that is additionally grounded via a separate protective earth conductor gt Ifa ground loop occurs contact our customer service department p 45 INFORMATION Normally shear actuators are not preloaded mechanically because shear stress inside the actuator cannot be compensated Light preloading can be useful when the width of th
2. 10 20 30 Length L Tolerance 0 3 mm Electrical capacitance Tolerance 20 measured at 1 Vpp 1 kHz RT Axial resonant frequency Measured at 1 Vpp unloaded unclamped The value is halved for unilateral clamping Piezo ceramic type PIC255 Standard connections PTFE insulated wire leads 100 mm AWG 32 0 49 mm Operating voltage 250 to 250 V Operating temperature range 20 to 85 C Standard mechanical interfaces Ceramic passive PZT Outer surface Epoxy resin Custom designs or different specifications on request Active Travel Surface Length Max Axial Electrical Axial Axes AxB ID L Shear Stiffness Capacitance Resonant Load Frequency um mm mm N N um nF kHz P 151 03H X 3 16x 16 10 5 5 200 8870 30 210 P 151 05H X 5 16x 16 10 7 5 200 640 49 155 P 151 10H X 10 16x 16 10 12 200 400 89 100 P 153 10H XYZ 10x 10x10 16x16 10 40 20 120 89 89 160 30 Displacement At 250 to 250 V tolerance 10 20 30 Length L Tolerance 0 3 mm Electrical capacitance Tolerance 20 measured at 1 Von 1 kHz RT Axial resonant frequency Measured at 1 Von unloaded unclamped The value is halved for unilateral clamping Piezo ceramic type PIC255 Standard connections PTFE insulated wire leads 100 mm AWG 32 0 49 mm Operating voltage 250 to 250 V Operating temperature range 20 to 85 C Standard mechanical interfaces Ceramic passive PZT Outer surface Epoxy resin Custom designs o
3. e g case or surrounding mechanical system must be connected to a protective earth conductor If the protective earth conductor is missing or not properly connected dangerous touch voltages can occur on the overall system in case of malfunction or failure of the system If touch voltages exist touching the overall system can result in serious injury or death from electric shock gt Before start up connect the overall system to a protective earth conductor in accordance with the applicable standards Do not remove the protective earth conductor during operation If the protective earth conductor has to be temporarily removed e g for modifications reconnect the overall system to the protective earth conductor before starting it up again 6 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 2 Safety During operation the P 1xx is subject to voltages up to 250 V The protective polymer layer of the piezo actuator does not protect against electric shock Touching the live parts of the P 1xx can result in serious injury or death from electric shock gt Do not touch the piezo actuator during operation gt Electrically insulate the piezo actuator from the surrounding mechanical system to prevent direct or indirect contact with live parts Observe the clearances and creepage distances required for the operating voltage and observe the standards applicable to your application Mechanical forces c
4. is required for installation or operation gt Ifthe shorting clamp has been removed Ensure adequate protection against touching live parts Short circuit the stranded wires of the P 1xx using a 10 kQ discharge resistor or discharge the piezo actuator p 38 in a suitable manner before reconnecting the shorting clamp NOTICE Destruction of the piezo actuator due to excessive loads Excessive loads can destroy the P 1xx gt Do not exceed the maximum compressive stress of 15 MPa gt Avoid tensile stress NOTICE Destruction of the piezo actuator due to mechanical overload Torques bending forces and lateral forces can destroy the piezo actuator gt Avoid torques bending forces and lateral forces on the piezo actuator gt Do not exceed the maximum shear load according to the data table p 47 gt Establish contact over as large an area as possible on the end surfaces of the piezo actuator and select opposing surfaces with an evenness of only a few micrometers Minor unevenness can be compensated by full surface gluing for example 20 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation NOTICE D Damage due to tensile stress on the stranded wires of the piezo actuators Impermissible forces on the stranded wires if applicable can damage the piezo actuator gt Avoid tensile stress on the stranded wires of the piezo actuator NOTICE
5. 1 1 3 Symbols and Typographic Conventions nn eee eee a 2 1 4 Se idi A d A 3 1 5 Other Applicable Documents near nr nanna 3 1 6 Downloading Manuals nanna iei 3 2 Safetv 5 2 1 Intended USE ee ccsccancsssnerces sdrcenaydanceectnaatencetadeecensdaveticnnanexveuhadtaclietardewehstevacuvbanneveliaacs 5 2 2 General Safety Instructions eee eee eee eee eee eee eee eee 6 2 3 Organizational H nn nanna amar nanna nm mnn 7 3 Product Description 9 3 1 lee Ee 9 3 2 Produ t EE 12 3 3 Prodiu ti Lapel issir ek pepe f i EA 13 3 4 Direction of Motion and Polartv sese sese eee eee 14 3 5 Scope of Delivery nanna nanna nanna nt tn 15 3 6 Suitable Electronics anna 15 3 7 Operating Principle of a Shear Actuator nn 16 3 8 Technical ET 16 4 Unpacking 17 5 Installation 19 5 1 General Notes on Installation nn 19 5 2 Mounting the P TIXX sessirnar naana aa aAA enn added ener a 24 5 3 Applying the l Qaddis nien niuia Raa a NANEN 24 5 4 Connecting the P 1xx to the Electronics nn 25 5 4 1 Connecting the P 1xx to Electronics with LEMO Socket eee 27 5 4 2 Connecting the P 1xx to Electronics with Sub D Mix Socket 29 10 ll 12 Start Up and Operation 6 2 Calculating the Power Requirement for Sinusoidal Operation EC Declaration of Conformity 6 1 General Notes on Start Up and Operation 6 3 Operating the P Ixn nn nn nanna nanna nm 6 4 Discharging the P 1XX LL nanna T 6 5 Short Circuiting the Pe
6. Applying the Load Mechanical coupling of the P 1xx to a load is done by gluing the piezo actuator p 24 to the mechanical system to be moved or to a flexure joint depending on the application INFORMATION Diagrams showing how to couple the P 1xx to a load can be found in General Notes on Installation p 19 Prerequisites v You have read and understood the general notes on installation p 19 v The P 1xx is discharged p 38 and short circuited p 40 24 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation Tools and accessories Suitable adhesive e g cold hardening epoxy resin adhesive When using a flexure joint Suitable flexure joint Applying the load gt Apply the load evenly If the piezo actuator is coupled in a milling pocket gt Ensure that there is full area contact at the end surface of the piezo actuator For this purpose choose the dimensions of the milling pocket correspondingly or make free cuts in the milling pocket 5 4 Connecting the P 1xx to the Electronics Models with stranded wires Z top L la a 1 X E mmm X Y J U CO top 2 Fi e S ei l x l kd A bottom bottom bottom Figure 11 Models with stranded wires Axis and cable assignment Connection for ground black stranded wire Voltage connection red stranded wire XYZ X Y and Z axes P 1xx Piezo Actuator PZ252E
7. Leier 12 Product en ME 12 Direction of Motion and Pelan A 14 Scope of Siz THH 15 Suitable Geer 15 Operating Principle of a Shear Actuator sena nanna 16 Te hini al TEE 16 3 1 Model Overview Description PICA Shear X piezo actuator 1 um travel range 3 mm x 3 mm cross section PICA Shear X piezo actuator 3 um travel range 3 mm x 3 mm cross section PICA Shear X piezo actuator 5 um travel range 3 mm x 3 mm cross section PICA Shear X piezo actuator 1 um travel range 5mm x 5mm cross section PICA Shear X piezo actuator 3 um travel range 5mm x 5mm cross section PICA Shear X piezo actuator 5 um travel range 5mm x 5mm cross section PICA Shear X piezo actuator 3 um travel range 10 mm x 10 mm cross section PICA Shear X piezo actuator 5 um travel range 10 mm x 10 mm cross section PICA Shear X piezo actuator 10 um travel range 10 mm x 10 mm cross section P 1xx Piezo Actuator PZ252E Version 1 0 0 9 3 Product Description l Description PICA Shear X piezo actuator 3 um travel range 16 mm x 16 mm cross section PICA Shear X piezo actuator 5 um travel range 16 mm x 16 mm cross section PICA Shear X piezo actuator 10 um travel range 16 mm x 16 mm cross section PICA Shear XY piezo actuator 1 um x 1 um travel range 3mm x 3mm cross section PICA Shear XY piezo actuator 3 um x 3 um travel range 3mm x 3mm cross section PICA Shear XY piezo actuator 1 um x 1 um travel range 5mm x 5
8. Version 1 0 0 25 5 Installation P I Models with tantalum electrodes Figure 12 Models with tantalum electrodes X axis and polarity of the electrodes Connections for ground vertical electrode stack with larger number of electrodes Voltage connections vertical electrode stack with smaller number of electrodes X X axis Connection of the P 1xx to the electronics depends on the electronics p 15 used When using electronics with LEMO socket see Connecting the P 1xx to Electronics with LEMO Socket p 27 When using electronics with Sub D Mix socket see Connecting the P 1xx to Electronics with Sub D Mix Socket p 29 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation 5 4 1 Connecting the P 1xx to Electronics with LEMO Socket PICA Shear Figure 13 P 1xx PICA Shear actuator left to LEMO connector right PICA Shear P 1xx shear actuator Voltage connection with red stranded wire Ground with black stranded wire LEMO LEMO connector Voltage connection with female contact Ground with male contact Cable shield actuator side B Cable shield connector side Prerequisites You have read and understood the general notes on installation p 19 N If the P 1xx is not short circuited The P 1xx is discharged p 38 XN The electronics are switched off s Only P 1xx xxT The tantalum electrodes of the piezo actuato
9. and its vicinitv can heat up during operation Touching the P 1xx and surrounding parts can result in minor injuries from burning gt gt Cool the P 1xx so that the temperature of its surface and surrounding parts does not exceed 65 C If sufficient cooling is not possible Make sure that the hot P 1xx and its surrounding parts cannot be touched If sufficient cooling and protection against contact are not possible Mark the danger zone in accordance with the legal regulations Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation NOTICE Destruction of the piezo actuator due to electric flashovers The use of the P 1xx in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the P 1xx in environments that can increase the electrical conductivity gt Only operate the P 1xx within the permissible ambient conditions and classifications p 51 gt Prevent the piezo actuator from coming into contact with liquids If liquid cooling is to be used contact our customer service department p 45 gt Protect the piezo actuator from
10. devices and software tools which are mentioned in this documentation are described in their own manuals The latest versions of the user manuals are available for download p 3 on our website E 413 Piezo Amplifier PZ199E user manual E 500 Modular Piezo Controller PZ62E user manual 1 6 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading gt Contact our customer service department p 45 INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals PI website gt Follow the corresponding instructions for downloading P 1xx Piezo Actuator PZ252E Version 1 0 0 1 About this Document P I Downloading freely accessible manuals 1 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding product categorv Go to the corresponding product code The available manuals are displaved Click the desired manual and save it on the hard disk of your PC or on a data storage medium Downloading password protected manuals 1 2 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the us
11. is not connected to the electronics Only for P 1xx without connector delivery state 10kQ discharge resistor not included in scope of delivery touchable parts must be adequately insulated for the operating voltage range p 49 of the actuator Only for P 1xx with connector p 25 Electronics p 15 from PI or suitable shorting plug available on request Discharging a P 1xx connected to the electronics gt Set the piezo voltage to 0 V on the electronics Discharging a P 1xx not connected to the electronics If the P 1xx does not have a connector 1 Ensure adequate protection against touching live parts 2 Short circuit the stranded wires of the P 1xx for at least a few seconds using a 10 KO discharge resistor If the P 1xx has a connector p 25 gt Connect the voltage connector of the P 1xx to the switched off PI electronics which has an internal discharge resistor for at least a few seconds gt Alternative Connect a suitable shorting plug with integrated discharge resistor to the voltage connector of the P 1xx for at least a few seconds P 1xx Piezo Actuator PZ252E Version 1 0 0 39 6 Start Up and Operation I 6 5 Short Circuiting the P 1xx INFORMATION The models P 1xx xxT must only be discharged when the tantalum electrodes have made contact and are equipped with stranded wires The P 1xx must be discharged p 38 and short circuited before demounting e g before cleaning and tran
12. operating voltage operating frequency and or operating time so that the maximum operating temperature of the piezo actuator is not exceeded see Ambient Conditions and Classifications p 51 and Maximum Ratings p 49 If necessary cool the piezo actuator gt Monitor the temperature of the piezo actuator with a temperature sensor Y P 1xx Piezo Actuator PZ252E Version 1 0 0 35 6 Start Up and Operation NOTICE D Destruction of the piezo actuator due to rapid cooling If cooling is too fast the resulting thermomechanical load can destroy the piezo actuator gt Ensure that the piezo actuator cools down slowly to room temperature gt Connect additional cooling systems only after the piezo actuator has cooled down to room temperature NOTICE Uncontrolled oscillation D Oscillation can cause irreparable damage to the piezo actuator Oscillation is indicated by a humming and can be caused by the following Achange in the load and or dynamics requires the servo control parameters to be adjusted The piezo actuator is operated near its resonant frequency If you notice oscillation gt In closed loop operation immediately switch off the servo mode gt In open loop operation immediately stop the piezo actuator INFORMATION The positive direction of motion p 12 corresponds to the expansion direction of the piezo actuator when a positive voltage is applied 6 2 Calcu
13. side B to the connector shell Connect the connector of the P 1xx to the corresponding connection on the electronics Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation 5 4 2 Connecting the P 1xx to Electronics with Sub D Mix Socket PICA Shear K030B0266 1 e i s b 2 b 3 Figure 14 P 1xx PICA Shear actuator left to KO30B0266 connecting cable right PICA Shear P 1xx shear actuator Voltage connection with red stranded wire Ground with black stranded wire K030B0266 Connecting cable with Sub D Mix connector 5W1 1 Red wire of the connecting cable Voltage connection Black wire of the connecting cable Ground Cable shield of the connecting cable Prerequisites You have read and understood the general notes on installation p 19 N If the P 1xx is not short circuited The P 1xx is discharged p 38 S The electronics are switched off lt Only P 1xx xxT The tantalum electrodes of the piezo actuator are contacted electrically by welding or by gluing with conductive glue and connected to stranded wires as follows Voltage connection with red stranded wire Ground with black stranded wire Tools and accessories KO30BO266 connecting cable in the scope of delivery of the electronics Suitable soldering iron Suitable solder Suitable cable tools P 1xx Piezo Actuator PZ252E Version 1 0 0 29 5 I
14. suitable products C 11888 E 413 00 Piezo amplifier for PICA shear actuators 250 to 250 V bench top device E 413 0E Piezo amplifier for PICA shear actuators 250 to 250 V OEM module E 500 Modular piezo amplifier configuration example High voltage piezo amplifier for PICA HVPZT 3 channels with PC interface and display consisting of 1 x E 500 00 19 case for modular piezo controller system 1 to 3 channels 3 x E 508 00 HVPZT piezo amplifier module 3 to 1100 V 1 channel 1 x E 517 13 Interface display module 24 bit D A TCP IP USB RS 232 IEEE488 3 channels gt To order contact our customer service department p 45 gt Before selecting electronics calculate the power requirements of your application p 36 P 1xx Piezo Actuator PZ252E Version 1 0 0 15 3 Product Description l 3 7 Operating Principle of a Shear Actuator Figure 5 P 1xx Principle of shear motion AL refers to the travel range 3 8 Technical Features PICA shear actuators P 1xx are PICA shear actuators for static and dvnamic applications Thev offer a response time in the microsecond range and subnanometer resolution The PICA shear actuators are manufactured as stacks of piezo ceramic disks Due to their high stiffness thev are ideal for scanning applications microscopv precision mechanics switching applications and are suitable for use in a crvogenic environment 16 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZ
15. to unilaterally clamped piezo actuators and are calculated as follows A third of the shear resonant frequency of the unloaded piezo actuator operation when not clamped on both sides divided by two Maximum operating frequency without load considering thermal aspects column B In order to prevent the maximum permissible operating temperature from being exceeded the operating frequency of the unloaded uncooled piezo actuator must not exceed the specified frequency when the operating voltage is 500 V peak to peak In the case of smaller amplitudes of the operating voltage and or the use of cooling measures higher operating frequencies are possible Maximum power consumption Power consumption of the unloaded uncooled piezo actuator operated at a voltage of 500 V peak to peak with the operating frequency from column B of this table Piezo Maximum Operating Maximum Operating Frequency without Load Maximum Power Actuator Voltage Range A 7 Consumption Without Considering After Considering After Considering Thermal Aspects Thermal Aspects Thermal Aspects 007 W P 1xx Piezo Actuator PZ252E Version 1 0 0 49 10 Technical Data P I Piezo Maximum Operating Maximum Operating Frequency without Load Maximum Power Actuator Voltage Range A Consumption Without Considering After Considering After Considering Thermal Aspects Thermal Aspects Thermal Aspects A A WW 50 Version 1 0 0 PZ252E P 1xx Piezo Actuato
16. your application contact our customer service department p 45 Prerequisites v You have read and understood the general notes on start up and operation p 31 v You have installed p 19 the P 1xx correctly and connected it to the electronics p 25 v You have provided suitable electronics that can supply the required currents p 36 v You have read and understood the user manual of the electronics used Operating the P 1xx gt For starting up and operating the P 1xx follow the instructions in the manual of the electronics p 15 used 6 4 Discharging the P 1xx INFORMATION The models P 1xx xxT only need to be discharged when the tantalum electrodes have made contact and are equipped with stranded wires The P 1xx must be discharged in the following cases When the P 1xx is not in use but the electronics remain switched on to ensure temperature stability lfthe stranded wires of the P 1xx are to be short circuited without discharge resistor e g with a shorting clamp p 12 If the connecting cable of the P 1xx is accidentally pulled out of the electronics during operation 38 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation Prerequisites v You have read and understood the general notes on installation p 19 v You have read and understood the general notes on start up and operation p 31 Tools and accessories If the P 1xx
17. 6 mm cross section PICA Shear XYZ piezo actuator 10 um x 10 um x 10 um travel range 16 mm x 16 mm cross section Versions with inner hole Description P 151 03H PICA Shear X piezo actuator 3 um travel range 16 mm x 16 mm cross section ID 10 mm P 151 05H PICA Shear X piezo actuator 5 um travel range 16 mm x 16 mm cross section ID 10 mm P 151 10H PICA Shear X piezo actuator 10 um travel range 16 mm x 16 mm cross section ID 10 mm P 153 10H PICA Shear XYZ piezo actuator 10 um x 10 um x 10 um travel range 16 mm x 16 mm cross section ID 10 mm Versions for cryogenic and UHV environments PICA Shear X piezo actuator 1 um travel range 3 mm x 3 mm cross section vacuum compatible to 10 hPa operating temperature to 269 C PICA Shear X piezo actuator 3 um travel range 3 mm x 3 mm cross section vacuum compatible to 10 hPa operating temperature to 269 C PICA Shear X piezo actuator 1 um travel range 5 mm x 5 mm cross section vacuum compatible to 10 hPa operating temperature to 269 C PICA Shear X piezo actuator 3 um travel range 5 mm x 5 mm cross section vacuum compatible to 10 hPa operating temperature to 269 C P 1xx Piezo Actuator PZ252E Version 1 0 0 11 3 Product Description l 3 2 Product View The figure serves as an example and can differ from vour model 3 9 74 K Figure 1 Example of product view 1 Lateral surface Protective polymer layer epoxy res
18. O TECHNOLOGY WWW PICERAMIC COM 4 Unpacking 4 Unpacking NOTICE Destruction of the piezo actuator due to contamination Contamination on the surface of the P 1xx can result in the destruction of the piezo actuator by electric flashovers during operation gt When handling the piezo actuator wear powder free nitrile or latex gloves and suitable protective goggles gt Prevent the ceramic insulation or polymer insulation from coming into contact with conductive liquids e g finger sweat and conductive materials e g metal dust gt Ifthe piezo actuator has been accidentally contaminated clean it in accordance with the instructions in Cleaning the P 1xx p 41 NOTICE SIK Damage due to bending of the tantalum electrodes The P 1xx xxT models are equipped with tantalum electrodes that can be bent if handled improperiv gt Make sure that you do not touch the tantalum electrodes during unpacking and handling 1 Unpack the P 1xx with care 2 Compare the contents with the items listed in the contract and the packing list 3 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact PI Ceramic immediately 4 Keep all packaging materials in case the product needs to be returned P 1xx Piezo Actuator PZ252E Version 1 0 0 17 PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation 5 Installation In this Chapter General Notes on Installation
19. PI PZ252E P 1xx Piezo Actuator User Manual Version 1 0 0 Date 29 06 2015 This document describes the following products P 111 P 151 VA WW is PICA Shear Actuators Travel ranges up to 10 um A lt e sey wm a This document also applies to custom A w vf Dad e we products from the PICA Shear Actuator product line PI Ceramic GmbH Lindenstrasse 07589 Lederhose Germany Phone 49 36604 882 0 Fax 49 36604 882 4109 Email info piceramic com PIEZO TECHNOLOGY WWW PICERAMIC COM PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PIO PIC PICMA PiLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Pilnano 2015 PI Ceramic GmbH Lederhose Germany The text photographs and drawings in this manual are protected by copyright With regard thereto PI Ceramic GmbH retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 29 06 2015 Document number PZ252E CBo Version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO TECHNOLOGY WWW PICERAMIC COM Contents 1 About this Document 1 1 1 Objective and Target Audience of this User Manual 1 1 2 Validity for Custom Products 2 eee
20. Switch off the electronics before you reconnect the piezo actuator 34 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIG COM 6 Start Up and Operation NOTICE D Reduced lifetime due to permanently high voltage and high air humidity The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the piezo actuator This applies in particular to operation in a humid environment gt When the P 1xx is not in use but the electronics remain switched on to ensure temperature stability discharge the P 1xx p 38 gt Reduce offset voltages to a minimum gt Protect the piezo actuator against moisture by means of hermetic sealing or the supply of dry air gt Make sure that the air humidity in the vicinity of the P 1xx does not exceed the relative humidity specified in Ambient Conditions and Classifications p 51 NOTICE D Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the P 1xx gt Do not exceed the operating voltage range p 49 for which the P 1xx is specified gt Operate the P 1xx only when the operating voltage is properly connected see Connecting the P 1xx to the Electronics p 25 NOTICE l Destruction of the piezo actuator due to overheating Overheating can destroy the piezo actuator gt Adjust the
21. an damage or misalign the P 1xx gt Avoid impacts that affect the P 1xx Do not drop the P 1xx Prevent torques and lateral forces on the P 1xx Do not use metal tools during installation VV V WV Do not exceed the maximum permissible stress and load capacities according to the specifications p 47 2 3 Organizational Measures User manual gt Always keep this user manual available with the P 1xx The latest versions of the user manuals are available for download p 3 on our website gt Add all information from the manufacturer to the user manual for example supplements or technical notes gt If you give the P 1xx to other users also include this manual as well as all other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing important information serious or fatal injury as well as damage to the equipment can result gt Only install and operate the P 1xx after you have read and understood this user manual P 1xx Piezo Actuator PZ252E Version 1 0 0 7 2 Safetv P I Personnel qualification The P 1xx may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 8 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 Product Description In this Chapter dee Re UE 9
22. be exceeded For operation of the P 1xx suitable electronics that provide the required operating voltages are required The electronics are not included in the scope of delivery of the P 1xx We recommend the use of suitable electronics p 15 from PI P 1xx Piezo Actuator PZ252E Version 1 0 0 5 2 Safetv I I 2 2 General Safety Instructions The P 1xx is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the P 1xx gt Only use the P 1xx for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the P 1xx Temperature changes and compressive stresses can induce charges in the P 1xx piezo actuator After disconnection from the electronics the piezo actuator can stay charged for several hours Touching the live parts of the P 1xx can result in serious injury or death from electric shock gt Do not touch the P 1xx unless it is discharged p 38 gt When handling the piezo actuator wear powder free nitrile or latex gloves and suitable protective goggles gt Keep the piezo actuator short circuited p 40 when it is not connected to the electronics gt Do not disassemble the piezo actuator The system in which the P 1xx is integrated
23. ct Description l 3 4 Direction of Motion and Polarity Models with stranded wires Figure 3 Models with stranded wires example view from above Direction of motion and the polarity of the shear actuator clamped to the bottom A P 1xx models without inner hole B P 1xx models with inner hole Connection for ground black stranded wire Voltage connection red stranded wire XYZ X Y and Z direction of motion when applying positive voltage Models with tantalum electrodes Figure 4 Models with tantalum electrodes example view Direction of motion and polarity of the shear actuator clamped to the bottom Connections for ground vertical electrode stack with larger number of electrodes Voltage connections vertical electrode stack with smaller number of electrodes X X direction of motion when applying positive voltage 14 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 5 Scope of Delivery Description Piezo actuator according to order p 9 Short instructions for piezo actuators without case Additional scope of delivery for models with stranded wires INYY 0005 Shorting clamp 2 5 mm for the stranded wires of the piezo actuator one shorting clamp per axis 3 6 Suitable Electronics To operate a P 1xx you need electronics The device is selected depending on the type of application The table below lists the
24. d p 40 After cleaning the P 1xx gt Dry the P 1xx completely in a drying cabinet recommended duration 30 minutes at 40 C Prerequisites v The P 1xx is discharged p 38 and short circuited p 40 v The P 1xx is disconnected from the electronics P 1xx Piezo Actuator PZ252E Version 1 0 0 41 7 Maintenance PI Cleaning the P 1xx gt gt gt Touch the piezo actuator only with powder free nitrile or latex gloves Do not use acetone When necessary clean the surfaces of the P 1xx with a cloth that is slightly dampened with a mild cleanser e g ethanol or isopropanol When cleaning in an ultrasonic bath Reduce the energy input to the necessary minimum Only use isopropanol as cleaning fluid Observe the maximum cleaning time of 2 minutes After cleaning dry the P 1xx completely in a drying cabinet recommended duration 30 minutes at 40 C 42 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 8 Troubleshooting 8 Troubleshooting No or limited motion Cable not connected gt Check the cable connections correctly Excessive load Do not exceed the maximum compressive stress of 15 MPa Avoid tensile stress Piezo actuator is Contact our customer service depolarized due to department p 45 overheating or reverse polarity Piezo actuator moves in Reverse polarity of Contact our customer service the opposite direction the piezo actuato
25. e resonant frequency The resonant frequencies specified in the data tables p 47 apply to operation of the piezo actuator when it is unloaded and not clamped on both sides In an arrangement with unilateral clamping the value must be halved Dynamic forces generated during operation do not exceed the maximum compressive stress capability of the piezo actuator of 15 MPa and do not result in tensile stress gt If your application involves operation of the piezo actuator with greater loads contact our customer service department p 45 NOTICE Damage due to steep edges in the control signal If the actuator does not have a preload steep edges in the control signal can trigger strong dynamic forces which damage the piezo actuator Steep edges can occur for example when digital wave generators are switched on gt Avoid steep edges in the control signal on actuators with low preload NOTICE Damage after reconnecting due to a charged piezo actuator The piezo actuator can remain charged if its connecting cable is pulled out of the electronics during operation Reconnecting a charged piezo actuator to electronics during operation can cause a mechanical impulse that will damage the piezo actuator gt Do not pull the connecting cable of the piezo actuator out of the electronics during operation If the connecting cable of the piezo actuator is accidentally pulled out of the electronics during operation gt
26. e shear actuator is greater aspect ratio length width gt 1 1 or in the event of additional lateral forces gt If preloading is required contact our customer service department p 45 The following figures are to help vou avoid mounting errors Figure 6 Prevention of lateral forces and torques Figure 7 Avoiding tensile stress 22 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 5 Installation an Figure 8 Prevention of an irregular load application 1 Tensile stresses Figure 9 Full area contact of the piezo actuator A Figure 10 Mechanical or thermal loads electrically charge the piezo actuator Mount only when short circuited P 1xx Piezo Actuator PZ252E Version 1 0 0 23 5 Installation P I 5 2 Mounting the P 1xx P 1xx piezo actuators are glued to metal or ceramic surfaces Prerequisites v YOU have read and understood the general notes on installation p 19 v The P 1xx is discharged p 38 and short circuited p 40 Tools and accessories Grease free and even surface Suitable adhesive e g cold hardening epoxy resin adhesive Mounting the P 1xx gt Glue the piezo actuator to the surface Apply the thinnest possible layer of adhesive During the hardening process maintain the operating temperature range p 51 specified for the piezo actuator Observe the temperature expansion coefficients of the materials involved 5 3
27. er name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer Log in with the user name and the password from the Release News In the directory of the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PIGERAMIC COM 2 Safety 2 Safety In this Chapter IU ee 5 General Safety Instructions snanar 6 Organizational e T anna amar H eaaa aaa aai aa 7 2 1 Intended Use The P 1xx is intended to be used in an environment which is free of dirt oil and lubricants In accordance with its design the P 1xx is intended for integration into a mechanical system and for the following applications Positioning of loads Dynamic positioning Vibration damping Depending on the model the motion is performed as follows P 111 P 121 on one axis horizontally X P 141 P 151 P 112 P 122 jon two axes horizontally X Y P 142 P 152 P 123 P 143 jon two axes horizontally and on one axis vertically X Y Z P 153 The operator is responsible for standards compliant integration of the P 1xx into the overall system When mounting the maximum shear load according to the data table p 47 may not
28. he live parts of the P 1xx can result in serious injury or death from electric shock gt Do not touch the piezo actuator during operation gt Electrically insulate the piezo actuator from the surrounding mechanical system to prevent direct or indirect contact with live parts Observe the clearances and creepage distances required for the operating voltage and observe the standards applicable to your application P 1xx Piezo Actuator PZ252E Version 1 0 0 31 6 Start Up and Operation I DANGER Risk of electric shock if the protective earth conductor is not connected A The system in which the P 1xx is integrated e g case or surrounding mechanical system must be connected to a protective earth conductor H the protective earth conductor is missing or not properly connected dangerous touch voltages can occur on the overall system in the event of malfunction or failure of the system If touch voltages exist touching the overall system can result in serious injury or death from electric shock gt gt Before start up connect the overall system to a protective earth conductor in accordance with the applicable standards Do not remove the protective earth conductor during operation If the protective earth conductor has to be temporarily removed e g for modifications reconnect the overall system to the protective earth conductor before starting it up again Burning from hot surface A The surface of the P 1xx
29. in 2 End piece model dependent P 1xx xx and P 1xx xxH Ceramic passive PZT P 1xx xxT Ceramic Al2Os 96 96 pure 3 Stranded wires for models P 1xx xx and P 1xx xxH Not shown here Contact strips at the stranded wire exits 4 Tantalum electrodes connecting lugs of models P 1xx xxT Contacting with conductive adhesive or by welding Figure 2 INYY 0005 shorting clamp Front side for clamping the stranded wires left and rear side of the clamp right 12 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description 3 3 Product Labeling Depending on the model the product labeling is affixed to the following areas Models with stranded wires On the black stranded wire of the piezo actuator Models with tantalum electrodes On the bag that contains the piezo actuator on delivery The product labeling includes the following information 215003005 Country of origin Germany WWW PICERAMIC COM P 1xx Piezo Actuator Description Data matrix code example contains the serial number Product name example the characters following the period refer to the model Serial number example individual for each P 1xx Meaning of the places counting from left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive numbers Country of origin Manufacturer s address website Manufacturer s logo PZ252E Version 1 0 0 13 3 Produ
30. lating the Power Requirement for Sinusoidal Operation gt Calculate the average current requirement for sinusoidal operation using the following formula la f C Upp gt Calculate the peak current requirement for sinusoidal operation using the following formula Imax f C Upp 36 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation Required average current of the amplifier source sink A Required peak current of the amplifier source sink A Operating frequency Hz Capacitance of the piezo actuator F As V Operating voltage peak to peak V P 1xx Piezo Actuator PZ252E It is essential that the power supply can supply enough current The operating frequency may not exceed one third of the resonant frequency The resonant frequencies specified in the data tables p 47 apply to operation of the piezo actuator when it is unloaded and not clamped on both sides In an arrangement with unilateral clamping the value must be halved See Data Table p 47 for the small signal capacitance of the piezo actuator For large signal conditions a safety factor of 70 should be added to the small signal capacitance Version 1 0 0 37 6 Start Up and Operation I 6 3 Operating the P 1xx INFORMATION To determine the optimum operating parameters e g operating frequency operating voltage operating time and load for
31. mm cross section PICA Shear XY piezo actuator 3 um x 3 um travel range 5mm x 5mm cross section PICA Shear XY piezo actuator 5 um x 5 um travel range 5mm x 5mm cross section PICA Shear XY piezo actuator 3 um x 3 um travel range 10 mm x 10 mm cross section PICA Shear XY piezo actuator 5 um x 5 um travel range 10 mm x 10 mm cross section PICA Shear XY piezo actuator 10 um x 10 um travel range 10 mm x 10 mm cross section PICA Shear XY piezo actuator 3 um x 3 um travel range 16 mm x 16 mm cross section PICA Shear XY piezo actuator 5 um x 5 um travel range 16 mm x 16 mm cross section PICA Shear XY piezo actuator 10 um x 10 um travel range 16 mm x 16 mm cross section PICA Shear XYZ piezo actuator 1 um x 1 um x 1 um travel range 5mm x 5mm cross section PICA Shear XYZ piezo actuator 3 um x 3 um x 3 um travel range 5mm x 5mm cross section PICA Shear XYZ piezo actuator 1 um x 1 um x 1 um travel range 10 mm x 10 mm cross section 10 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 3 Product Description Description PICA Shear XYZ piezo actuator 3 um x 3 um x 3 um travel range 10 mm x 10 mm cross section PICA Shear XYZ piezo actuator 5 um x 5 um x 5 um travel range 10 mm x 10 mm cross section PICA Shear XYZ piezo actuator 3 um x 3 um x 3 um travel range 16 mm x 16 mm cross section PICA Shear XYZ piezo actuator 5 um x 5 um x 5 um travel range 16 mm x 1
32. moisture by means of hermetic sealing or the supply of dry air gt Inthe air pressure range between 1 hPa and 500 hPa Do not operate the P 1xx or operate it only at reduced voltage max 200 V gt For operation in vacuum below 0 1 hPa Do not operate the P 1xx during evacuation gt If the P 1xx is to be operated in a special gas atmosphere contact our customer service department p 45 NOTICE Destruction of the piezo actuator due to dynamic forces During dynamic operation dynamic forces can be generated that lead to mechanical overload of the piezo actuator Dynamic forces can cancel preloading of preloaded piezo actuators Dynamic operation at too high loads or dynamic operation without preloading can destroy the piezo actuator gt Do not exceed the maximum compressive stress of 15 MPa gt Avoid tensile stress gt Do not exceed the maximum shear load according to the data table p 47 gt If preloading is required contact our customer service department p 45 P 1xx Piezo Actuator PZ252E Version 1 0 0 33 6 Start Up and Operation NOTICE Destruction of the piezo actuator due to excessive operating frequencies An excessive operating frequency can cause thermal and mechanical overload thereby destroying the piezo actuator gt Select the operating frequency so that the following conditions are met The operating frequency of the piezo actuator does not exceed one third of th
33. n Maintenance 7 1 General Notes on Maintenance 7 2 Cleaning the aE geed EENS EENS eda Troubleshooting Customer Service Technical Data TOA SPSCHICATONS six a p i a b a e ees ddedegegtt Ze 10 1 1 Data Table ii iii ia a a a oi a ieai 10 1 2 Maximum d EE 10 1 3 Ambient Conditions and Classifications ee 10 2 Dimensi ns i e a N e a Old Equipment Disposal PIEZO TECHNOLOGY WWW PICERAMIC COM 1 About this Document 1 About this Document In this Chapter Objective and Target Audience of this User Manual 1 Validity f r Custom Products 210 sesttvtees dtagegEEA EEGEN aani EES vd 1 Symbols and Typographic Conventions eee eee eee eee eee ee eee eee eee 2 PIQUIOS T 3 Other Applicable Documents 3 Downloading EU 3 1 1 Objective and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P 1xx x stands for the different models p 9 Basic knowledge of drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Validity for Custom Products This user manual also applies to custom products from the PICA Shear Actuator product line if nothing else is stated in their accompanying documentation The product line is stated on the delivery note of the custom product The properties of custom products may differ from those stated in this manual P 1xx Piezo Actuat
34. nanna 19 Mounting the P e inu a AAAA een etait 24 Applying Mo LO ad EE 24 Connecting the P 1xx to the Electronics eee eee eee eee 25 5 1 General Notes on Installation DANGER A Dangerous voltage and residual charge in piezo actuators Temperature changes and compressive stresses can induce charges in the P 1xx piezo actuator After disconnection from the electronics the piezo actuator can stay charged for several hours Touching the live parts of the P 1xx can result in serious injury or death from electric shock gt Do not touch the P 1xx unless it is discharged p 38 gt When handling the piezo actuator wear powder free nitrile or latex gloves and suitable protective goggles gt Keep the piezo actuator short circuited p 40 when it is not connected to the electronics gt Do not disassemble the piezo actuator P 1xx Piezo Actuator PZ252E Version 1 0 0 19 5 Installation P NOTICE D Destruction of the piezo actuator due to rapid discharging If the P 1xx has stranded wires and is not connected to the electronics the stranded wires must be short circuited to prevent the piezo actuators from charging during temperature fluctuations and compressive stress Unsuitable short circuiting leads to an abrupt contraction of the piezo actuator due to excessively fast discharging Abrupt contraction can destroy the piezo actuator gt Remove shorting clamps p 15 connected to the stranded wires only when this
35. nstallation 30 PI Connecting the P 1xx to electronics with D Sub Mix socket 1 If the P 1xx is short circuited separate the short circuited stranded wires of the P 1xx from each other If a shorting clamp p 15 or a discharge resistor is connected remove this component from the stranded wires Solder the stranded wires of the P 1xx to the wires of the connecting cable as shown in the connection diagram above During soldering pay attention to the polarity of the P 1xx Insulate the soldered joint between the cables Connect the cable shield of the connecting cable to the actuator case If there is no actuator case cut the shield on the actuator side and insulate it Connect the connector of the P 1xx to the corresponding connection on the electronics Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation 31 Calculating the Power Requirement for Sinusoidal Operation sss eee eee eee e 36 Operating the P21 XX eresas aa E AEREA EEE enacted cs 38 Discharging the GK TEE 38 Short Gircuiting th P 1 E 40 6 1 General Notes on Start Up and Operation DANGER A Dangerous voltage in piezo actuators during operation During operation the P 1xx is subject to voltages up to 250 V The protective polymer layer of the piezo actuator does not protect against electric shock Touching t
36. or PZ252E Version 1 0 0 1 1 About this Document P 1 3 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual DANGER A Imminently hazardous situation If not avoided the hazardous situation will result in death or serious injury gt Actions to take to avoid the situation AN Dangerous situation Failure to observe can result in minor injuries or damage to the equipment gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation INFORMATION Information for easier handling tricks tips etc Symbol Meaning 1 Action consisting of several steps whose sequential order 2 must be observed gt Action consisting of one or several steps whose sequential order is irrelevant u List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface 2 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 1 About this Document 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The
37. quipment Disposal 11 Old Equipment Disposal In accordance with EU law electrical and electronic equipment may not be disposed of in EU member states via the municipal residual waste Dispose of your old equipment according to international national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH 8 Co KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente PI GmbH amp Co KG Auf der Roemerstr 1 D 76228 Karlsruhe Germany P 1xx Piezo Actuator PZ252E Version 1 0 0 53 PIEZO TECHNOLOGY WWW PICERAMIC COM 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P 1xx an EC Declaration of Conformity has been issued in accordance with the following European directives 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below RoHS EN 50581 2012 If an electrical operating device is designed to be integrated into another electrical operating device The operator is responsible for standards compliant integration of the electrical device into the overall system P 1xx Piezo Actuator PZ252E Version 1 0 0 55
38. r PIEZO TECHNOLOGY WWW PICERAMIC COM 10 Technical Data 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications for the P 1xx must be observed Area of application Air pressure Relative humidity Operating temperature Storage temperature Transport temperature Overvoltage category Degree of pollution For indoor use only gt 500 hPa or lt 1 hPa Maximum relative humidity 50 Continuous operation with high static voltage in humid environments significantly reduces piezo actuator lifetime gt Observe the information on lifetime in General Notes on Start Up and Operation p 31 Models P 1xx xx and P 1xx xxH 20 C to 85 C Models P 1xx xxT 269 C to 150 C 20 C to 80 C 20 C to 80 C The P 1xx is intended for installation in devices that fulfil the following classifications Protection class Degree of protection P 1xx Piezo Actuator according to IEC 60529 IP20 PZ252E Version 1 0 0 51 10 Technical Data P I 10 2 Dimensions Dimensions in mm lt A 0 4 lt B 0 4 Figure 15 P 1xx xx and P 1xx xxH with inner hole A B L see data table for ID The number of axes and wires depends on the type lt B 0 4 L 0 3 Figure 16 P 1xx xxT A B L see data table lt A 2 5 when cross section 3 x 3 52 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 11 Old E
39. r are contacted electrically by welding or by gluing with conductive glue and connected to stranded wires as follows Voltage connection with red stranded wire Ground with black stranded wire P 1xx Piezo Actuator PZ252E Version 1 0 0 27 5 Installation 28 PI Tools and accessories Suitable connector LEMO FGG OB 701 CJA 1173 available on request Shielded 2 wire cable not included in scope of deliverv which complies with the voltage and current specifications of the electronics p 15 to be connected and meets the applicable standards with regard to the conditions of use Suitable soldering iron Suitable solder Suitable cable tools Connecting the P 1xx to electronics with LEMO socket 1 If the P 1xx is short circuited separate the short circuited stranded wires of the P 1xx from each other If a shorting clamp p 15 or a discharge resistor is connected remove this component from the stranded wires Solder the stranded wires of the P 1xx and the LEMO connector with the wires of the shielded cable as shown in the connection diagram above When soldering pay attention to the polarity of the P 1xx The red connection is positive in contrast to the other connection Connect the cable shield a Connect the cable shield on the actuator side A to the actuator case If there is no actuator case cut the shield on the actuator side and insulate it b Connect the cable shield on the connector
40. r department p 45 p 14 to that specified when voltage increases If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 45 P 1xx Piezo Actuator PZ252E Version 1 0 0 43 PIEZO TECHNOLOGY WWW PICERAMIC COM 9 Customer Service 9 Customer Service For inquiries and orders call PI Ceramic phone 49 36604 882 0 or send us an email info piceramic com gt If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present gt If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on our website P 1xx Piezo Actuator PZ252E Version 1 0 0 45 PIEZO TECHNOLOGY WWW PICERAMIC COM 10 Technical Data In this Chapter Specifications Dimensions 10 1 Specifications 10 1 1 Data Table Travel um Active axis X P 111 01 f P 111 03 3 P 111 05 5 P 121 01 li P 121 03 3 P 121 05 5 P 141 03 3 P 141 05 5 P 141 10 10 P 151 03 3 P 151 05 5 P 151 10 10 Active axes XY P 112 01 1x 1 P 112 03 3x 3 P 122 01 1x1 P 122 03 3
41. r different specifications on request Active Travel Surface Length Max Axial Electrical Axial Axis AxB L Shear Stiffness Capacitance Resonant Load Frequency Um mm N N um nF kHz P 111 01T X 1 3 mm x 3 mm 2 2 20 110 2 x 0 25 530 P 111 03T X 3 3 mm x 3 mm 4 4 20 55 6 x 0 25 260 P 121 01T X 1 5mm x 5mm 2 2 50 310 2 x 0 70 530 P 121 03T X 3 5mm x 5mm 4 4 50 150 6 x 0 70 260 Displacement At 250 to 250 V measured at RT Value is reduced at lower temperatures Tolerance 30 Length L Tolerance 0 3 mm Electrical capacitance Tolerance 20 measured at 1 Vpp 1 kHz RT Axial resonant frequency Measured at 1 V unloaded unclamped The value is halved for unilateral clamping Piezo ceramic type PIC255 Standard connections Possible with Ta contacting with conductive adhesive or welding Operating voltage 250 to 250 V Operating temperature range 269 to 150 C Bake out only when short circuited Standard mechanical interfaces Ceramic Al2O3 96 pure Outer surface Epoxy resin Custom designs or different specifications on request 48 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 10 Technical Data 10 1 2 Maximum Ratings P 1xx piezo actuators are designed for the operating data specified in the table below Additional information on the maximum ratings table Maximum operating frequency without load without considering thermal aspects column A The values apply
42. sportation of the P 1xx as well as for modifications Prerequisites v You have read and understood the general notes on installation p 19 v You have discharged p 38 the P 1xx and disconnected it from the electronics Tools and accessories Only for P 1xx without connector delivery state Suitable shorting clamp in the scope of delivery p 15 of models P 1xx xx and P 1xx xxH Only for P 1xx with connector p 25 Suitable shorting plug available on request Short circuiting the P 1xx If the P 1xx does not have a connector gt Short circuit the stranded wires of the discharged P 1xx with a suitable shorting clamp If the P 1xx has a connector p 25 gt Connect a suitable shorting plug with integrated discharge resistor to the voltage connector of the P 1xx 40 Version 1 0 0 PZ252E P 1xx Piezo Actuator PIEZO TECHNOLOGY WWW PICERAMIC COM 7 Maintenance 7 Maintenance In this Chapter General Notes on MaintenanCe ennennennen en nnnnnnnn nn nn nr nar nn nnnn tran ana nrzrnznzzzzznznza 41 Cleaning the PIXX Aessen GEESS a B AAEE Ga 41 7 1 General Notes on Maintenance The P 1xx is maintenance free 7 2 Cleaning the P 1xx NOTICE Destruction of the piezo actuator due to electric flashovers If the piezo actuator comes into contact with liquids it can be destroyed by electric flashovers Before cleaning the P 1xx gt Ensure that the P 1xx is discharged p 38 and short circuite
43. x3 P 122 05 5x5 P 142 03 3 x3 P 142 05 5x5 P 142 10 10x10 P 152 03 3x3 P 152 05 5x5 P 152 10 10x10 Active axes XYZ P 123 01 1x1x1 P 123 03 3 x3 x 3 P 143 01 1x1x1 P 143 03 3x3x3 P 143 05 5x5x5 P 153 03 3x 3x3 P 153 05 5x5x5 P 153 10 P 1xx Piezo Actuator Surface AxB LengthL mm 3 mm x 3 mm 3 5 3 mm x 3 mm 5 5 3 mm x 3 mm 7 5 5 mm x 5 mm 3 5 5mmx5mm 5 5 5mmx5mm 7 5 10 mm x 10 mm 5 5 10 mm x 10mm 7 5 10mm x 10mm 12 16 mm x 16 mm 5 5 16 mm x 16 mm 7 5 16mm x 16mm 12 3 mm x 3 mm 5 3 mm x 3 mm 9 5 5 mm x 5 mm 5 5 mm x 5 mm 9 5 5 mm x 5 mm 14 10 mm x 10 mm 9 5 10mm x 10mm 14 10 mm x 10 mm 23 16 mm x 16 mm 9 5 16 mm x 16mm 14 16 mm x 16 mm 23 5 mm x 5 mm 7 5 5 mm x 5 mm 15 5 10 mm x 10mm 7 5 10 mm x 10 mm 15 5 10 mm x 10 mm 23 16 mm x 16 mm 15 5 16 mm x 16 mm 23 10x10x10 16mm x16mm 40 PZ252E Max Shear Load 100 300 100 60 Axial Stiffness N um 170 10 Technical Data Electrical Axial Capacitance Resonant Frequencv nF kHz 0 5 330 15 210 2 5 155 1 4 330 4 2 210 7 155 17 210 28 155 50 100 43 210 71 155 130 100 0 5 0 5 230 1 5 1 5 120 1 4 1 4 230 4 2 4 2 120 7 7 85 17 17 120 28 28 85 50 50 50 43 43 120 71 71 85 130 130 50 1 4 1 4 2 9 155 4 2 4 2 7 3 75 5 6 5 6 11 155 17 17 29 75 28 28 47 50 43 43 73 75 71 71 120 50 130 130 230 30 Version 1 0 0 47 10 Technical Data I Travel range At 250 to 250 V tolerance

User Manual PZ252E

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