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TPS-bench - Agilent Technologies

1. Postava 6 Zah jenie erpania TPS bench User Manual 87 901 009 01 B 233 322 14 Navod na Obsluhu peci lne jednotky Vypnutie TPS bench Syst m je mo n vypn voli om Pumping jeho prepnut m do polohy 0 riadiace zariadenie zostane zapnut a ak je do syst mu pripojeny mera bude mo n pokra ovat v od itavani tlaku aj pri vypnut ch v vev ch Alternat vne je mo n syst m vypn hlavn m vyp na om jeho prepnut m do polohy 0 D jde k pln mu vypnutiu syst mu a nebude mo n od ta tlak ani vykon va in oper cie N dzov zastavenie TPS bench je mo n bezpe n n dzovo zastavi vytiahnut m nap jacieho k bla zo z str ky o sp sob vypnutie v vevy a riadiaceho zariadenia peci lne jednotky Platforma TPS bench m e by u vate sky prisp soben v z vislosti na pecifick ch potreb ch kedy bude modelu pridelen peci lne slo S v nimkou pecifick ch pr padov ktor maj pecifick dokument ciu tento n vod je aplikovate n na peci lne jednotky ozna en MXXXX napr klad 969 8204M2001 234 322 TPS bench User Manual 87 901 009 01 B Udrzba Navod na Obsluhu 14 V v va TPS compact nevy aduje dnou dr bu s v jimkou v m ny Tip seal pre verzie s
2. Figur 4 Aktivering av systemet 152 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 a Innkoblingen av systemet ved bruk av Hovedbryteren s rger for strgmtilfgrsel til turbopumpens controller men b de turbopumpen og Foreline pumpen forblir avslatte Aktiveringen av systemet gjor det mulig for controlleren starte avlesning av trykkets data gjennom Full Range Gauge FRG 700 ekstrautstyr hvis denne er koblet til koblingsporten for gauge som befinner sge p baksiden av systemet Gauge port RU rR Seriell port Figur 5 Gauge tilkobling Det er mulig sette systemet i gang ved hjelp av valgbryteren kalt Pumping Etter ha satt velgeren Pumping i posisjon 1 vil turbopumpen og Foreline pumpen starte Bryter for pumping Figur 6 Start av pumping TPS bench User Manual 87 901 009 01 B 153 322 9 Instruksjon Manual Spesialenheter Stoppe TPS bench Det er mulig sl av systemet ved hjelp av valgbryteren Pumping ved sette den i stillingen 0 controlleren vil forbli
3. Posta 6 Uruchomienie pompowania TPS bench User Manual 87 901 009 01 B 201 322 12 Podrecznik Instrukcji Jednostki specjalne Zatrzymanie TPS bench System mo na wy czy za pomoc prze cznika Pumping ustawiaj c go w polo eniu 0 sterownik pozostanie w czony i je eli do systemu pod czony jest przyrz d pomiarowy mo liwy b dzie dalszy odczyt ci nienia nawet przy wy czonym pompa Alternatywnym sposobem wy czenia systemu jest wykorzystanie wy cznika g wnego ustawiaj c go w po o eniu 0 System wy czy si ca kowicie i nie b dzie mo liwy ani odczyt ci nienia ani inne operacje Zatrzymanie Alarmowe W celu wy czenia TPS bench w warunkach zagro enia mo na od czy kabel zasilania od gniazda sieciowego spowoduje to wy czenie pompy oraz sterownika Jednostki specjalne Platforma TPS bench mo e by dostosowana do potrzeb odpowiednio do r nych wymaga uzyskuj c w ten spos b specjalne numery modelu Z wyj tkiem szczeg lnych przypadk w podanych w specjalnej dokumentacji niniejsza instrukcja ma zastosowanie do wszystkich zespo w specjalnych z oznaczeniem MXXXX na przyk ad 969 8204M2001 202 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 Konserwacja System TPS compact nie wymaga Zadnej konserwac
4. Voli Pumping 5 o 1 Turbo V JML AG LS a Postava 6 Zah jen erp n TPS bench User Manual 87 901 009 01 B 217 322 13 N vod k Pou it Specialni jednotky Vypnuti vyv vy TPS bench Syst m je mo n vypnout voli em Pumping jeho p epnut m do polohy 0 dic za zen z stane zapnuto a kdy bude do syst mu p ipojen m i bude mo n pokra ovat v ode t n tlaku i p i vypnut ch v v v ch Alternativn je mo n syst m vypnout hlavn m vyp na em jeho p epnut m do polohy 0 Dojde k pln mu vypnut syst mu a nebude mo n ode tat tlak ani vykon vat dal operace Nouzov zastaven TPS bench je mo n bezpe n nouzov zastavit vyta en m nap jec ho kabelu ze z suvky co zp sob vypnut v v vy a dic ho za zen Speci ln jednotky Platforma TPS bench m e b t u ivatelsky p izp sobena v z vislosti na specifick ch pot eb ch kdy bude modelu p id leno speci ln slo S v jimkou specifick ch p pad kter maj specifickou dokumentaci lze tento n vod aplikovat na speci ln jednotky ozna en MXXXX nap klad 969 8204M2001 218 322 TPS bench User Manual 87 901 009 01 B Udrzba N vod k Pou it 13 V v va TPS compact nevy aduje dnou dr
5. 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC TPS bench User Manual 87 901 009 01 B 303 322 17 Technical Information Letter Protocol Description Command READ PUMP STATUS Source PC Destination Controller with address 3 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command REAL SERIAL TYPE Source PC Destination Controller with address 3 in 485 mode 02 83 35 30 34 30 03 38 31 STX ADDR WINDOW RD ETX CRC Source Controller Destination PC 02 83 35 30 34 30 31 03 42 30 STX ADDR WINDOW RD DATA ETX CRC 304 322 TPS bench User Manual 87 901 00
6. Figur 2 134 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 Om sp nningen fran elf rs rjningen r kompatibel med systemets kan elkabeln kopplas till eluttaget av typ IEC320 som sitter p systemets bakre panel se figuren Uttaget har en f stkl mma f r att undvika oavsiktliga frankopplingar av elkabeln Anv nd kl mman f r att f sta elkabeln 4 Ay vi c S ds 3 Gl k gt y F stkl mma N gt E K x st y DI Elkabel Figur 3 Anslutning av f rs rjningen a Tillf r r tt spanning till systemet med hj lp av elkabeln Systemet r utrustat med en huvudstr mbrytare termisk brytare som kan skydda systemets komponenter mot verbelastningar eller kortslutningar St ll brytaren p l get 1 f r att s tta igang TPS modellen Huvudbrytare med termiskt skydd QL 5 Figur 4 Aktivering av systemet TPS bench User Manual 87 901 009 01 B 135 322 8 Bruksanvisning Anv nding Aktiveringen av systemet med huvudstr mbrytaren f rs rjer turbopumpens kontrollenhet men b de turbopumpen och Foreline pumpen f rblir sl ckta Aktiveringen av systemet g r att kontrollenheten b rjar att l
7. Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns WARNING Avoid impacts or harsh movements of the pump when in operation The bearings may become damaged and damages to the persons or the things could be taken place CAUTION Use inert gas free from dust particles or humidity like Nitrogen for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure TPS bench User Manual 87 901 009 01 B 261 322 16 Instructions for Use Use WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pumping system in presence of explosive gases Switching on and Use of TPS Bench a After TPS bench unpacking perform a brief visual analysis of the system to be sure that no sign of damages due to transportation is present critical parts are TMP flange Forepump fastening brackets system front panel and the system wheels Check the system voltage on the Agilent label stuck on the system electronic units case Part Number PN mu a Serial Number SN Far Electrical Data Figure 2 If the voltage provided by your electrical supplier is compatible with the system voltage you can connect the provided power cord to the IEC320 electrical socket on the rear side of the
8. Figur 1 OBSERVER Komponenter som ska uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd 130 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 Normal p verkan fr n atmosf ren kan inte skada TPS bench Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den Modellerna i denna instruktionsbok grundar sig p plattformen med Agilent pumpsystem som kallas TPS bench Skillnaderna som inf rts p de olika modellnumren motsvarar den turbomolekyl r pumpen och foreline pumpen som integrerats i den specifika modellen ut ver sp nningen som till mpas f r systemet Skillnaderna mellan de olika modellerna p TPS bench g ller endast systemets prestanda medan funktionen och anv ndningsproceduren r de samma f r samtliga TPS bench Informationen som ges g ller f r hela plattformen alla modeller oberoende av den specifika turbomolekyl r pumpen foreline pumpen eller str mf rs rjningen TPS bench User Manual 87 901 009 01 B 131 322 8 Bruksanvisning Installation Installation OBSERVER Ta bort tejpen och dra ut skyddsproppen f rst n r turbopumpen ska anslutas till systemet Installera och eller anv nd inte pumpsystemet i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva g
9. Pou iti y ty sa T gt P idr ovac ANG pruzina amp S M e AD Nap jeci kabel Postava 3 Nap jec p vod P ipojte syst m k vhodn mu nap t prost ednictv m nap jec ho kabelu Syst m je vybaven hlavn m vyp na em tepeln m jisti em schopn m chr nit sou sti syst mu p ed p et en m nebo zkratem P ed zah jen m innosti s TPS bench p epn te vyp na do polohy 1 Hlavn vyp na s tepelnou ochranou O 0 IE SHOE o E Postava 4 Aktivace syst mu 216 322 TPS bench User Manual 87 901 009 01 B N vod k Pouziti 13 Po zapnut syst mu prost ednictv m hlavn ho vyp na e bude dic za zen v v vy turbo nap jen ale v v va turbo a tak v v va foreline z stanou vypnut Aktivace syst mu umo uje dic mu za zen zah jit ten daje o tlaku prost ednictv m voliteln ho p slu enstv Full Range Gauge FRG 700 je li toto p ipojeno ke spojovac mu portu gauge na zadn stran syst mu Port m c ho 4 pr stroje N gt S riovy port Postava 5 P ipojen m ic ho p stroje Syst m je mo n spustit prost ednictv m voli e nazvan ho Pumping Po p epnut voli e Pumping do polohy 1 se spust v v va turbo a v v va foreline
10. 17 Technical Information Turbo Pumping System Connection 284 322 TPS bench is always provided with inlet screen fitted on Agilent suggest not to remove the TMP inlet screen to avoid accidents involving the pumping system tool and or pumping system users The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump with CFF flange dimensions are in inches mm ISO 63 CFF 2 75 CFF 4 5 E B 2 76 70 00 amp pe 5 1 7 I A 7 ESET i KF 40 2 09 53 00 I 0 24 6 00 CFF 6 ISO 100 0 47 12 00 DIMENSIONS inches mm Figure 13 TPS bench User Manual 87 901 009 01 B Technical Information 17 High Vaccum Flange Connection To connect the Turbo pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure REMOVE OUTER RING O RING PROTECTIVE 4 w EDGE TURBO PUMP V Figure 14 Then fix the two flanges with the clamps or claws as shown in the figure CLAMPING SCREV O RING NA K N RE TURBO PUMP PROTECTIVE V EDGE Figure 15 For ConFlat flange connections we recommend u
11. 296 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 Tab 11 BYTES MEANING 1 2 Pump cycles number integer coded in 2 bytes eZ p e 4 7 Run up time in seconds long coded in 4 bytes 8 Deat time 0 N01 YES E f c AA OPK 10 Soft Start mode 0 NO 1 YES CRC When the configuration parameters have to be changed send a Request string a string with 9 characters of the following type H data CRC The following parameters can be changed Tab 12 BYTES MEANING 1 Speed threshold 2 5 6 7 8 TPS bench User Manual 87 901 009 01 B 297 322 17 Technical Information Letter Protocol Description When the Request is I Status readings the Answer will contain a string of 2 characters with the following parameters Tab 13 BYTES MEANING 1 MSB LSB XXXXXX 0 STOP 1 WAITING INTERLOCK 2 STARTING 3 NORMAL OPERATION 4 5 HIGH LOAD 6 FAILURE 7 APPROACHING LOW SPEED R2 status 0 OFF 1 0N RI status O OFF 1 0N When the Request is J Numerical readings the Answer will contain a string of 5 characters with the following parameters Tab 14 BYTES MEANING 1 Current 0 255 scaled D TW ei mit hou inn zi i rr l ad A Pump temperature C 0 254 temperature reading 255 fail 5 CRC 298 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 When the Reques
12. ATZE Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare il sistema di pompaggio in presenza di gas esplosivi Accensione ed Uso del TPS bench Dopo aver disimballato il TPS bench assicurarsi che il sistema non abbia tracce di danneggiamenti dovuti al trasporto parti critiche sono flangia della pompa staffe di fissaggio della pompa di Foreline pannello frontale e ruote del sistema mediante un ispezione visiva Verificare la tensione d ingresso riportata sull etichetta Agilent incollata alla chassis dell unit elettronica del sistema Aud Numero di modello PN P 2 pam Numero di serie SN FANI Dati elettrici lt IN 6 Figura 2 Sela tensione fornita dall alimentazione elettrica compatibile con quella del sistema si pu procedere a collegare il cavo d alimentazione elettrica alla presa elettrica di tipo IEC320 presente sul pannello posteriore del sistema vedi figura La presa dotata di una molla di ritenzione posta al fine d evitare disconnessioni accidentali del cavo d alimentazione usare la molla per agganciare il cavo d alimentazione TPS bench User Manual 87 901 009 01 B 23 322 1 Istruzioni per l uso Uso Ad sj 7 d tj gt AIN A y Molla di ritenzione Ap Cavo di alimentazione Figura 3 Colleg
13. 17 Technical Information Electrical Connections Electrical Connections Input Power Connector The following figure shows the input power connector 4 tunt gt ru ARS Retention N Y Spring ex Sl g s Power cord plug Figure 18 Connection to Main Gauge Serial Line Connection Gauge port dave Serial port Figure 19 Gauge Connection 288 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 Gauge Connector TPS bench is equipped with new generation gauge reading card able to drive read a Agilent Full Range Gauge FRG 700 The FRG 700 Full Range Gauge is a combined technologies gauge Inverted Magnetron plus Pirani Gauge FRG 700 measure from 5x10 mbar to atmosphere 3 8x10 Torr to atmosphere and its temperature range goes from 5 C to 55 C 41 181 F Pressure data is available on two independent reading channels 1 Serial communication line Win 224 2 TMP controller display Pressure gauge can be connected disconnected from the TPS bench during normal operation IDENTIFICATION SIGNAL COMMON m 25VDC P MAX ZW COMMON SIGNAL Figure 20 Gauge Connector TPS bench User Manual 87 901 009 01 B 289 322 17 Technical Information Electrical Connections 290 322 92 3 6 KF 40 18 0 70 CFF
14. d nn n m r m ll tavalla TPS bench User Manual 87 901 009 01 B 171 322 10 Ohjek sikirja H vitt minen H vitt minen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta El saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan sopimusehdot 172 322 TPS bench User Manual 87 901 009 01 B TPS bench User Manual 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz 174 ltal nos inform ci 175 T rol s 177 El k sz t s telep t sre 178 Telep t s 180 Haszn lat 182 A TPS bench bekapcsol sa s haszn lata 183 A TPS bench kikapcsol sa 186 V szle ll t s 186 Speci lis egys g 186 Karbantart s 187 Megsemmis t s 188 Az eredeti utas t s ford t sa tle Agilent Technologies 173 322 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van r
15. Gebrauch Wenn die durch die Stromspeisung gelieferte Spannung mit der Spannung des Systems kompatibel ist kann man das Stromkabel an die Steckdose IEC320 am hinteren Paneel des Systems anschlief en siehe Abbildung Die Steckdose ist mit einer R ckhaltefeder ausgestattet um plotzliche Trennung des Speisekabels zu vermeiden die Feder ben tzen um das Stromkabel zu befestigen AMAS R chhaltefeder M Speisekabel Dem System mittels Speisekabel die korrekte Spannung geben Abbildung 3 Anschluss der Speisung Das System ist mit einem Hauptschalter Thermoschalter ausgestattet der die Bestandteile des Systems gegen berlastungen oder Kurzschl sse sch tzt Den Schalter auf die Position 1 stellen um mit dem TPS bench arbeiten zu k nnen Hauptschalter mit Thermoschalter cn Abbildung 4 Aktivierung des Systems TPS bench User Manual 87 901 009 01 B Gebrauchsanleitung 2 Die Aktivierung des Systems durch den Hauptschalter liefert dem Controller der Turbopumpe Speisung aber die Turbopumpe wie die Forelnepumpe bleiben ausgeschaltet Die Aktivierung des Systems erm glicht dem Controller das Lesen des Druckwerts ber den zus tzlichen Full Range Gauge FRG 7
16. Holdefjeder 2 Forsyningsledning Figur 3 Tilslutning af str mforsyning Forsyn anl gget med den korrekte sp nding ved hj lp af forsyningsledningen Anl gget er udstyret med hovedafbryder termisk afbryder som er i stand til at beskytte systemets bestanddele mod overbelastninger eller kortslutninger Stil afbryderen i position 1 for at begynde operationerne med TPS bench anordningen Hovedafbryder med termisk beskyttelse O o Figur 4 Aktivering af system TPS bench User Manual 87 901 009 01 B Istruktionsbog 7 a Systemets aktivering ved brug af hovedafbryderen forsyner turbopumpens styreenhed med strgm men turbopumpen og Foreline pumpen vedbliver slukket Systemets aktivering giver styreenheden mulighed for at starte afl sning af trykveerdien ved hj lp af Full Range Gauge FRG 700 anordningen ekstraudstyr hvis dette er tilsluttet gauge forbindelsesporten der sidder bag p anl gget ja M leinstrument port Seriel port Figur 5 Tilslutning af m leinstrument a Det er muligt at starte anl gget ved hj lp af Pumping afbryderen Efter at have stillet afbryderen Pumping i position 1 starter b de turbopumpen og Foreline pumpen
17. Ma 34010 0 Pokud pou v te erpac syst m pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn Zapnut a pou v n v v vy TPS bench Po vybalen TPS bench se vizu ln kontrolou ujist te Ze se syst m b hem p epravy nepo kodil kritick mi stmi jsou p ruby v v vy konzoly pro upevn n v v vy Foreline eln panel a kola syst mu Zkontrolujte vstupn nap t uveden na t tku Agilent p ilepen m na r mu elektronick jednotky syst mu slo modelu PN ZO N TI gt V robn slo SN EY ANTA 4 Ik L Udaje elektrick ho rozvodu N Postava 2 Kdy je nap ti v elektrick siti vhodn pro napajeni syst mu je mo n p ipojit nap jac kabel elektrick ho nap jen do z suvky elektrick ho rozvodu typu IEC320 kter se nach z na zadn m panelu syst mu viz obr zek Z suvka m p idr ovac pru inu aby se zabr nilo n hodn mu odpojen nap jec ho kabelu pou ijte pru inu pro p ipojen nap jec ho kabelu TPS bench User Manual 87 901 009 01 B 215 322 13 Navod k Pou iti
18. Problems on main connection Na Check possible fuses on main line Main switch placed on position Move the Main Switch on position ege me Check the vacuum system critical points valves flanges plastic pipes TMP Vent Valve not properly Check if the vent valve is screwed closed completely down Leak on vacuum system connected to the inlet flange Check the Vent valve sealing o ring Leak on Vent Valve RR positioning and intactness TMP stopped and the Controller Move the TPS bench in an area shows the message Pump Overtemp Room temperature higher than 35 C 95 F where the room temperature is lower than 35 C 95F TPS bench User Manual 87 901 009 01 B 315 322 17 Technical Information Appendix 2 316 322 TPS bench User Manual 87 901 009 01 B XE Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are n
19. Przygotowanie do instalacji 194 Instalacja 196 Uzytkowanie 198 Wtaczenie i obstuga systemu TPS bench 199 Zatrzymanie TPS bench 202 Zatrzymanie Alarmowe 202 Jednostki specjalne 202 Konserwacja 203 Przetworstwo odpadow 204 Ttumaczenie instrukcji oryginalnej RES Agilent Technologies 189 322 12 Podrecznik Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obstugi posiadaja wysoka energie kinetyczna spowodowana bardzo wysoka pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nalezy obowiazkowo przestrzega zalecen dotyczacych instalacji opisanych w niniejszej instrukcji obstugi 190 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 Og lne informacje Ta aparatura jest przeznaczona do uzytku zawodowego Uzytkownik musi przeczyta bardzo uwaznie niniejsza instrukcje ka da dodatkowa informacje dostarczona przez firme Agilent przed u ytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialno ci w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w pr
20. bu s v jimkou v m ny Tip seal pro verze s v v vami scroll nebo s dopl ov n m v m nou oleje pro verze s v v vami Rotary Vane Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby NEBEZPE Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte va e m stn servisn st edisko spole nosti Agilent Ne vr t te za zen v robci na opravu nebo v m nu za repasovan za zen musite vyplnit list Health and Safety Zdravi a bezpe nost p ilo en k tomuto n vodu a zaslat jej m stn prodejn kancel i P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami TPS bench User Manual 87 901 009 01 B 219 322 13 N vod k Pou it Likvidace Likvidace Vyznam loga WEEE nachazejiciho se na St tku Ni e uvedeny symbol odpovida sm rnicim CE pojmenovanym WEEE Tento symbol platny jen pro staty Evropske Unie ur uje e vyrobek ktery je takto ozna en NESMI byt likvidovan spole n s ostatnimi domacimi nebo prumyslovymi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b
21. p sl tt og hvis en gauge er tilkoblet systemet vil det v re mulig fortsette lese av trykkket ogs n r pumpene er sl tt av En annen mate sl av systemet p er bruke Hovedbryteren ved sette den i posisjonen 0 Systemet vil sl seg fullstendig av og det vil ikke v re mulig hverken lese av trykk eller utfgre andre inngrep Nodstopp For stanse TPS bench i ngdstopp er det mulig koble fra strgmkabelen fra nettets stikkontakt dette vil medfgre at pumpen og controlleren sl s av Spesialenheter Plattformen TPS bench kan brukertilpasses i henhold til de enkelte behov og dermed oppn spesifikke modellnummere Med unntak av spesifikkke tilfeller utstyrt med spesifikk dokumentasjon kan dette h ndboken brukes for alle spesialenheter merket med MXXXX for eksempel 969 8204M2001 154 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 Vedlikehold TPS compact er vedlikeholdsfri bortsett fra utskifting av Tip seal for versjonene utstyrt med scrollpumper og etterfylling oljeskift for versjonene med pumper Rotary Vane Alt arbeid p systemet m kun utfgres av autorisert personell hw KIES For noearbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents Fgr systeme
22. rjestelm n sy tt m j nnite sopii yhteen j rjestelm n j nnitteen kanssa kytke s hk johto IEC320 tyyppiseen s hk pistokkeeseen joka sijaitsee j rjestelm n takapaneelissa katso kuva Pistoke on varustettu pid tysjousella joka on asennettu est m n virtajohdon satunnaista irtoamista k yt jousta johdon kiinnitt mist varten ui i N p Pid tys jousi amp 41 AD Virtajohto Kuva 3 Virtaliit nt Syota j rjestelm n j nnitteelt n oikeaa virtaa virtakaapelin kautta J rjestelm on varustettu p katkaisimella l mp katkaisin joka suojaa j rjestelm n osia ylikuormituksilta tai oikosuluilta Aseta katkaisin asentoon 1 aloittaaksesi TPS benchn k yt n P katkaisin l mp suojauksella Kuva 4 J rjestelm n aktivoiminen 168 322 TPS bench User Manual 87 901 009 01 B Ohjek sikirja 10 Kun j rjestelm kytket n p lle p katkaisimella virtaa sy tet n turbopumpun ohjaimelle mutta sek turbopumppu ett foreline pumppu pysyv t pois p lt J rjestelm n aktivoinnin my t ohjain aloittaa painearvon luennan valinnaisen Full Range Gaugen FRG 700 avulla jos se on kytketty mittausla
23. suoraan tai joustavan liitoksen kautta Sis nmenossa olevalla ISO laipalla varustettu turbopumppu on liitett v vastalaippaan liittimien avulla Seuraavassa taulukossa kuvataan jokaista liitintyyppi kohti tarvittavien liittimien m r ja niiden kiristysmomentit 164 322 TPS bench User Manual 87 901 009 01 B Ohjek sikirja 10 Tab 1 LAIPPA KIINNIKE M R KIRISTYS MOMENTTI 150 63 Kaksoiskiinnike kierteitys M10 4 22 Nm ISO 100K Kaksoiskiinnike kierteitys M10 4 22 Nm Turbopumppu ConFlat sis ntulolaipalla tulee kiinnitt tyhji kammioon sopivien Agilentin mekaanisten varusteiden avulla Lis tietoja l ytyy Technical Information liitteest TPS bench ei voida kiinnitt perustansa kautta Ks Technical Information liitett lis varusteiden asentamista varten TPS bench User Manual 87 901 009 01 B 165 322 10 Ohjek sikirja K ytt K ytt T h n kappaleeseen on kirjattu t rkeimm t k yttotoimenpiteet Ennen j rjestelm n k ytt tarkista ett kaikki s hk ja paineilmaliit nn t on tehty oikein Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 120 C tta VAROITUS lk k ytt k pumppausj rjestelm ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla VAROITUS lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l
24. tables By means of the Main Switch you provide power to the system activating the TMP controller and its ability to read pressure by means of an optional gauge if connected a TMP Controller The integrated controller is a solid state frequency converter which is driven by a single chip microcomputer and is composed of a PCB which includes a power supply with a 3 phase AC output analogical and input output section microprocessor and digital section The controller recognizes the mains presence and converts the single phase AC mains supply into a 3 phase medium freguency output which is reguired to power the pump a Pumping Selector TPS bench versions equipped with TV81M or TV301 include an electrical selector named Pumping on the left side of the front panel It is aimed to pumps management ON OFF By means of Pumping selector you are able to start pumping activating the pumping effect of TMP an Foreline pump 274 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 a Gauge Control Unit optional If needed is possible to order a special version of TPS bench equipped with an optional gauge controller named Agilent XGS 600 By means of XGS 600 is possible to manage a couple of gauges to monitor pressure on system foreline by means of a convector gauge 1x10 Torr to atm and high vacuum pressure by means of a IMG 100 1x10 to 5x10 Torr a 3 Electrical Devices Box It is a metal box co
25. 103 322 6 Bedrijfshandleiding Gebruik Als de spanning van het elektrische voedingsnet compatibel is met die van het systeem kan de elektrische voedingskabel op het contact type IEC320 op het achterpaneel van het systeem worden aangesloten zie figuur Het aansluitcontact is voorzien van een borgveer om onvoorziene afkoppeling van de voedingskabel te voorkomen gebruik de veer om de voedingskabel vast te zetten Borgveer S A Voedingskabel Figuur3 Aansluiting van de voeding Sluit de juiste spanning op het systeem aan door middel van de voedingskabel Het systeem is uitgerust met een hoofdschakelaar thermische schakelaar die dient om de componenten van het systeem tegen overbelasting of kortsluiting te beschermen Zet de schakelaar in de stand 1 om met de TPS bench te gaan werken Hoofdschakelaar met thermische beveiliging C Figuur4 Inschakeling van het systeem 104 322 TPS bench User Manual 87 901 009 01 B Bedrijfshandleiding 6 Bij inschakeling van het systeem via de hoofdschakelaar wordt de controller van de turbopomp gevoed maar zowel de turbopomp als de foreline pomp blijven uit Door inschakeling van het systeem kan de controller
26. 125 S kerhetsanvisningar f r Molekyl ra turbopumpar 126 Allm n Information 127 F rvaring 129 F rberedelser f r installationen 130 Installation 132 Anv nding 133 Speciella enheter 137 Underh ll 138 Bortskaffning 139 Instruksjon Manual 141 Sikkerhetsanvisninger for Turbomolekyl re pumper 142 Generell informasjon143 Lagring 145 TPS bench User Manual 87 901 009 01 B Contents Klargjgre til installasjon 146 Installasjon 148 Bruk 150 Spesialenheter 154 Vedlikehold 155 Kassering 156 10 Ohjek sikirja 157 Turbomolekyylipumppujen Turvaohjeet 158 Yleisi tietoja 159 Varastointi 161 Valmistelut asennusta varten162 Asennus 164 K ytt 166 Erityisyksik t 170 Huolto 171 H vitt minen 172 11 Felhaszn l i K zik nyv 173 Biztons gi tmutat Turb molekul ris szivatty khoz 174 ltal nos inform ci 175 T rol s 177 El k sz t s telep t sre 178 Telep t s 180 TPS bench User Manual 87 901 009 01 B 9 322 Contents 10 322 12 13 Haszn lat 182 Speci lis egys g186 Karbantart s 187 Megsemmis t s 188 Podrecznik Instrukcji 189 Wskaz wki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 190 Og lne informacje 191 Magazynowanie 193 Przygotowanie do instalacji 194 Instalacja 196 U ytkowanie 198 Jednostki specjalne 202 Konserwacja 203 Przetworstwo odpadow 204 N vod k Pouziti 205 Bezpe nostn n vod pro Turbomolekularni v v vy 206 Vseobe
27. 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TPS bench User Manual 87 901 009 01 B TPS bench TPS bench TPS bench User Manual 87 901 009 01 B 3 322 TPS bench 4 322 TPS bench User Manual 87 901 009 01 B Contents 1 Contents Istruzioni per l uso 13 Indicazioni di Sicurezza per Pompe Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 20 Uso22 Unita Speciali 27 Manutenzione 27 Smaltimento 28 Gebrauchsanleitung 29 Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine Informationen 31 Lagerung 33 Vor der Installation 34 Installation 36 Gebrauch 38 Spezialein
28. 969 8200 Turbo Pump TV81M TV81M TV81M 220V 50Hz 1x10 8mbar 7 5x10 9Torr Base Pressure i n a nn He Pumping Speed L s 65 Start up time lt 1 min Operating Position On a flat floor Ambient Temperature 5 C to 35 C Bakeout Temperature max 80 C on Inlet Flange Compliance with SEE CE CERTIFICATE OF CONFORMITY Installation category Il Pollution Degree 2 Serial Communication kit St 20 C to 70 C 278 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 Tab 5 Characteristic 969 8215 969 8214 969 8216 Turbo Pump TV81M TV81M TV81M TMP Flange IS068 IS068 1808 Forepump suit DSIO2 I DS OO m Voltage oO Base Pressure 1x10 mbar 7 5x10Torr No Pumping Speed L s 7 He Pumping Speed L s 65 Ha Pumping Speed L s oo 50 TMP Rotational Speed 80000 rpm Start up time lt 1 min Operating Position On a flat floor Ambient Temperature OO 5 C to 35 C Bakeout Temperature UE max 80 C on Inlet Flange Protection Breaker 14A Compliance with SEE CE CERTIFICATE OF CONFORMITY Installation category I Pollution Degree 2 Serial Communication kit T Plus CT 20 70 According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the com pletion of test dome bake out with a Turbopump fitted with
29. B 241 322 15 Priro nik za Navodila Uporaba 248 322 Zaporna vzmet 3 2a Napajalni kabel Slika 3 Priklop napajanja S pomo jo napajalnega kabla vzpostavite pravilno napetost sistema Sistem je opremljen z glavnim stikalom termi no stikalo ki komponente sistema iti pred preobremenitvami in kratkimi stiki Stikalo pritisnite v polo aj 1 da za nete delo s TPS bench Glavno stikalo s termi no za ito ecnore ZI Slika 4 Vklop sistema TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 Ob vklopu sistema s pomo jo glavnega stikala vzpostavite napetost kontrolerja turbomolekularne rpalke toda tako turbomolekularna rpalka kot rpalka foreline ostaneta ugasnjeni Z vklopom sistema lahko pri ne kontroler brati podatke o tlaku s pomo jo merilnika Full Range Gauge FRG 700 ki je na voljo kot dodatna oprema e je slednji povezan z merilnim priklju kom ki se nahaja na zadnji strani sistema Priklju ek za i i merilnik me Way TLS IN Ma PS SN XI Serijski S prikliu ek Slika 5 Priklop merilnika a Sistem je mogo e zagnati s pomo jo izbirnega stikala poimenovanega Pumping Po obratu stikala Pumping v polo aj
30. DE APERTO ISO 63 Grampo duplo com rosca M10 4 22 Nm ISO 100 K Grampo duplo com rosca M10 4 22 Nm A turbobomba com flange de entrada ConFlat deve ser fixada c mara de vacuo atrav s de parafusos especificos da mec nica Agilent Para ulteriores detalhes consultar o ap ndice Technical Information O TPS bench n o pode ser fixado por interm dio da sua pr pria base Para a instala o dos acess rios opcionais consultar Technical Information TPS bench User Manual 87 901 009 01 B 85 322 5 Manual de Istruc es Utilizac o Utilizac o Neste par grafo s o descritos os principais procedimentos operacionais Antes de usar el sistema controlar gue todas las conexiones el ctricas y neum ticas se hayan realizado correctamente Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 120 C ATENCAO Nunca activar o sistema de bombeamento se o flange de entrada n o estiver ligado c mara de v cuo ou n o estiver fechado com o flange de fecho ATENCAO Nao tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s ATENCAO Evitar colis es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos e poderia verificar se les es A s pessoas ou s coisas 86 322 TPS bench User Manual 87 901 0
31. Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other DIFFUSION PUMPS Heater failure Doesn t reach vacuum Vacuum leak Electrical problem Cooling coil damage Other Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the fina
32. Etter ha pakket ut TPS bench sjekk at systemet ikke har spor etter skader grunnet transport de kritiske delene er pumpens flense festebgyle for Foreline pumpen frontdeksel og systemhjulene gjennom en visuell kontroll Kontrollere inngangsspenningen som st r p etiketten Agilent og som er klistret fast til chassis p systemets elektroniske enhet KRAN pa j Modelnummer PN PL 2 gt j Seriennummer SN EY NG ira Me Elektriske data MN a lt S N A 5 Figur 2 TPS bench User Manual 87 901 009 01 B 151 322 9 Instruksjon Manual Bruk Hvis spenningen til strgmtilfgrselen er forenlig med systemets er det mulig koble den str mf rende kabelen til til el uttaket av typen IEC320 som finnes p systemets bakre del se figuren Uttaket er utstyrt med en koblingsfjar som er satt p for unng uhensiktsmessige frakoblinger av stramkaleben Bruk fj ren for hekte el kabelen fast A Holdefj r A Tilfgrsels ledning Figur 3 Tilkobling av tilfgrsel S rg for rett spenning til systemet ved hjelp av elkabelen Systemet er utstyrt med en hovedbryter overlastbryter som er i stand til beskytte systemets deler mot overlast og kortslutninger Sett velgeren i posisjon 1 for starte med bruk av TPS bench Hovedbryter med beskyttelse mot
33. Information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fran Agilent fore anv ndning av utrustningen Agilent tar inget ansvar f r skador som helt eller delvis beror p sidos ttande av instruktionerna ol mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala foreskrifter Systemet TPS bench best r av en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar en styrenhet och en huvudpump Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen astadkoms med hj lp av en h gvarvig turbin som drivs av en elektrisk trefas h geffektmotor De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical Information TPS bench User Manual 87 901 009 01 B 127 322 8 Bruksanvisning Allm n Information I bruksanvisningen anv nds f ljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finns risk f r svara personskador Mudo Detta varningsmeddelande visas framf r procedurer som m st
34. N R2 Set Point Type 0 Freq 1 Power 2 Time 3 lt Normal 4 Pressure 172 R W N R2 Set Point Value Hz W s 174 R W L R2 Set Point Segnal Activation Type high level active 1 low level active 175 R W N R2 Set front Mysteresis in of R2 Valve 176 R A R2 Set Point Pressure Valve Valid in win 171 4 Format XX E X X Where X 0 to 9 s or 200 R N Pump current in mA dc 201 R N Pump voltage in Vdc 202 R N Pump power in W pump current x pump voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intik 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 TPS bench User Manual 87 901 009 01 B 307 322 17 Technical Information Letter Protocol Description Data Description Admitted Values Error code Controller Air Temperature C Bit description see the following figure Pressure reading Format X X E XX Rotation Frequency rpm Cycle time in minutes zeroed by the reset 0 to 999999 command 301 R N Cycle number zeroed by the reset 0 to 9999 command 302 R N Pump life in hours zeroed by the reset 0 to 999999 command 320 Reserved to Agilent service to 399 400 R A CRC EPROM QE QE8XXXX where XXXX are variable 402 R A CRC Param PA PA8XXXX where XXXX are variable 404 R A CRC Parameter structure XXXX 500 Reserved to Agilent service 503 R W N RS 485
35. Pumping kontakt le Figur 6 Start af pumping TPS bench User Manual 87 901 009 01 B 121 322 7 Istruktionsbog Specielle enheder Stop af TPS bench a Deter muligt at slukke anl gget ved brug af Pumping afbryderen ved at flytte den i position 0 styreenheden vedbliver t ndt og hvis der er et m leinstrument der er tilsluttet systemet er det muligt at forts tte afleesningen selv hvis pumperne er slukket En anden m de at slukke for systemet er at bruge Hovedafbryderen ved at flytte den til position 0 Systemet slukkes fuldst ndigt og afl sning af trykv rdier samt andre operationer er ikke l ngere mulige N dstop For at aktivere n dstoppet med TPS bench enheden er det muligt at fjerne forsyningsledningen fra stikd sen det medf rer slukning af pumpe og af styreenhed Specielle enheder TPS bench serien kan tilpasses afh ngigt af forskellige krav med specifikke modelnumre Med undtagelse af specifikke tilf lde der er ledsaget med en specifik dokumentation kan denne manual anvendes til alle de specielle enheder m rket med MXXXX for eksempel 969 8204M2001 122 322 TPS bench User Manual 87 901 009 01 B Istruktionsb
36. accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves AVERTISSEMENT gt gt PI viter tout choc ou d placement de la turbopompe lorsqu elle est en marche Cela pourrait endommager les paliers et provoquer de graves dommages aux personnes et aux choses 54 322 TPS bench User Manual 87 901 009 01 B Mode d emploi 3 Pour le refoulement l air de la pompe utiliser un gaz inerte d pourvu de poussi re particules ou humidit Ex azote La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bars au del de la pression atmosph rique AYERS AU Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typiques de chaque gaz Ne pas utiliser le syst me de pompage en pr sence de gaz explosifs Mise en marche et utilisation du TPS bench Apr s avoir d ball le TPS bench v rifiez visuellement que le syst me n a pas subi de d g ts pendant le transport les parties critiques sont la bride de la pompe les pattes de fixation de la pompe primaire foreline facade avant et roues du syst me V rifiez la tension d alimentation indiqu e sur l tiquette Agilent coll sur le ch ssis de l unit lectronique du syst me And sa j Num ro du mod le PN El La gt W ds Num ro de s rie SN i J AN
37. address 0 to 31 default 0 504 R W L Serial type select 0 lt RS 232 1 RS 485 default 0 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 308 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 7 6 5 4 3 2 1 0 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 26 Windows N 206 Bit Description TPS bench User Manual 87 901 009 01 B 309 322 17 Technical Information Pumping System Component Info Pumping System Component Info Here following the complete list of the TPS bench Part numbers By clicking on the PN referred to your system specific information about single components integrated in your TPS bench will be showed beside the picture For each component PN component name and user manual reference are reported For specific information about one of integrated components please contact Agilent Service department ask ing for the specific user manual Tab 19 969 8200 969 8202 969 8203 9698200 969 8208 969 8212 969 8213 969 8214 TV81M 15063 969 8901 87 900 983 01 DS42 TV81 AG 949 9309 969 8988 87 900 977 01 87 900 9
38. antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem As notas cont m informac es importantes destacadas do texto 80 322 TPS bench User Manual 87 901 009 01 B Manual de Istruc es 5 Armazenagem Para garantir o nivel M ximo de funcionalidade e fiabilidade dos sistemas de bombagem Agilent devem ser observadas as seguintes prescric es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 2 n o condensante a aoaccionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start o tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedi o CUIDADO Se por uma raz o qualquer o periodo de armazenagem for superior ser necessario enviar o sistema de bombeamento para o fabricante Para mais informac es contactar o representante local da Agilent TPS bench User Manual 87 901 009 01 B 81 322 5 Manual de Istruc es Preparac o para a instalac o Preparac o para a instalac o O TPS bench fornecido numa embalagem protectora especial se esta apresentar sinais de danos que poderiam ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para n o de
39. applicabile a tutte le unit speciali marcate con MXXXX ad esempio 969 8204M2001 Manutenzione Il TPS bench non richiede alcuna manutenzione ad eccezione della sostituzione del Tip seal per le versioni equipaggiate con pompe scroll o il rabbocco cambio olio per le versioni con pompe Rotary Vane Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare gualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent Prima di rispedire al costruttore un sistema per riparazioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche TPS bench User Manual 87 901 009 01 B 21 322 1 Istruzioni per l uso Smaltimento Smaltimento 28 322 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido sol
40. be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale TPS bench User Manual 87 901 009 01 B 267 322 16 Instructions for Use Disposal 268 322 TPS bench User Manual 87 901 009 01 B TPS bench User Manual e e 17 0 Technical Information e o s s Description of the TPS 271 1 Turbopump Description 273 2 Front Panel 274 3 Electrical Devices Box 275 Technical Specification 278 TPS bench Outline 282 Turbo Pumping System Connection Vaccum Inlet Flange 283 Inlet Screen Installation 283 High Vaccum Flange Connection 285 High Vaccum Flange Connection Configurations 287 Electrical Connections 288 Input Power Connector 288 Gauge Serial Line Connection 288 Gauge Connector 289 J2 Serial Connector 290 Connector Examples 291 Serial Communication Description 293 Original Instructions tle Agilent Technologies 269 322 17 Technical Information Disposal Letter Protocol Description 293 Window Protocol 299 Description 299 Communication Format 299 Communication Protocol 299 Examples 302 Window Meanings 305 Pumping System Component Info 310 Accessories and Spare Parts 311 Appendix 1 312
41. beginnen met het aflezen van de drukwaarde via de optionele Full Range Gauge FRG 700 als deze op de gauge poort aan de achterkant van het systeem is aangesloten 4 Gauge poort Nave Seri le poort Figuur5 Aansluiting van de gauge Het systeem kan worden gestart via de keuzeschakelaar Pumping Nadat de keuzeschakelaar Pumping in de stand 1 is gezet worden de turbopomp en de foreline pomp gestart Keuzeschakelaar Pumping Figuur6 Pompen starten TPS bench User Manual 87 901 009 01 B 105 322 6 Bedrijfshandleiding Speciale units Afzetten van de TPS bench Het systeem kan worden gestopt via de keuzeschakelaar Pumping door hem in de stand 0 te zetten de controller blijft ingeschakeld en indien een gauge op het systeem is aangesloten kan de druk ook worden afgelezen als de pompen uit staan a Het systeem kan ook worden uitgeschakeld door middel van de hoofdschakelaar door hem in de stand 0 te zetten Het systeem wordt dan volledig uitgeschakeld zodat geen drukmetingen of andere bewerkingen meer mogelijk zijn Noodstop Om de TPS bench onder noodomstandigheden te stoppen kan de voedingskabel uit de contactsto
42. bench User Manual 87 901 009 01 B 83 322 5 Manual de Istruc es Instala o Instalac o Remover a etigueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema 84 322 N o instalar e ou usar o sistema de bombeamento em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio gue sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C a humidade relativa 0 95 n o condensante Na presenca de campos electromagn ticos o sistema de bombeamento deve ser protegida atrav s de blindagens adequadas O TPS m vel dever ser posicionado sobre uma superficie plana Colocar o TPS m vel em posic o est vel conectando a flange de entrada da turbo bomba a uma contra flange capaz de resistir a um torque de 50 Nm ao redor do pr prio eixo directamente ou por meio de uma conexdo flexivel A turbo bomba com flange de entrada ISO deve ser conectada contra flange por meio de terminais A tabela a seguir descreve para cada tipo de terminal o n mero de terminais necess rios e com qual torque de aperto devem ser apertados TPS bench User Manual 87 901 009 01 B Manual de Istru es 5 Tab 1 FLANGE TIPO DE GRAMPO N TORQUE
43. condensing In the presence of magnetic fields the pumping system must be protected using a ferromagnetic shield The TPS bench have to be placed on a flat floor Place the TPS bench in a stable position connecting the inlet flange of the turbopump to a counter flange capable of withstanding a torque of 50 Nm around its axis directly or by means of a flexible hose The turbopump with ISO inlet flange must be connected to the counter flange by means of clamps The following table shows for each fixing device the necessary number of clamps and the relevant fixing torque Tab 1 FLANGE FIXING DEVICE N FIXING TORQUE ISO 63 M10 clamps 4 22 Nm ISO 100 K M10 clamps 4 22 Nm The turbopump with ConFlat inlet flange must be fixed to the vacuum chamber by means of the appropriate Agilent hardware See the appendix Technical Information for a detailed description The TPS bench cannot be fixed by means of its base 260 322 For installation of optional accessories see Technical Information TPS bench User Manual 87 901 009 01 B Use Instructions for Use 16 This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections are properly connected before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 120 C Never use the pumping system when the turboinlet flange is not connected to the vacuum chamber or is not blanked
44. directement ou au moyen d un raccord flexible La turbopompe bride d entr e ISO doit tre reli e la contrebride au moyen de mors Le tableau ci dessous indique pour chaque type de mors le nombre de mors et le couple de serrage TPS bench User Manual 87 901 009 01 B Mode d emploi 3 Tab 1 COUPLE DE BRIDE TYPE DE COLLIER N SERRAGE Collier double filet M10 gt 22 Nm Collier dou La turbopompe bride d entr e ConFlat doit tre fix e la chambre a vide a l aide des l ments m caniques Agilent pr vus a cet effet Pour tout autre d tail se reporter a l appendice Technical Information Le TPS bench ne peut tre fix par sa base Pour l installation des accessoires en option se reporter Technical Information TPS bench User Manual 87 901 009 01 B 53 322 3 Mode d emploi Utilisation Utilisation Ce paragraphe pr sente les principales proc dures op rationnelles Avant de sortir v rifiez que tous les raccordements lectriques et pneumatiques ont t correctement effectu s Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 120 C AVERTISSEMENT Ne jamais faire fonctionner le syst me de pompage si la bride d entr e n est pas reli e la chambre vide ou si elle n est pas ferm e avec la bride de fermeture AVERTISSEMENT Eviter de toucher la turbopompe ainsi que ses
45. do cabo de alimenta o usar a mola para enganchar o cabo de alimentac o gt Mola I de retenc o S Xr st 2 i Cabo de alimentacao Figura 3 Conex o da alimentac o a Fornecer a tens o correcta ao sistema por meio do cabo de alimenta o O sistema equipado com um interruptor principal interruptor t rmico capaz de proteger os componentes do sistema contra sobrecargas ou curtos circuitos Colocar o interruptor na posi o 1 para comecar a operar com o TPS movel Interruptor principal com protecc o t rmica Figura 4 Activac o do sistema TPS bench User Manual 87 901 009 01 B Manual de Istru es 5 A activa o do sistema por meio do interruptor Principal fornece alimenta o ao controller da bomba turbo mas tanto a bomba turbo quanto a bomba de foreline permanecem desligadas A activac o do sistema permite ao controller iniciar a leitura do dado de press o por meio do Full Range Gauge FRG 700 opcional se este ltimo estiver conectado na porta de conex o do medidor colocada na parte traseira do sistema Porta do gauge Porta serial Figura 5 Conex o do gauge poss vel arrancar o sistema por meio do se
46. do systemu Nie instalowa i lub u ytkowa zespotu pompujacego w otoczeniach wystawionych na czynniki atmosferyczne deszcz mr z nieg pyly gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dziatania obowiazkowo nale y przestrzega nastepujace warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura od 5 C do 35 C a wzgl dna wilgo 0 95 bez opar W obecnosci p l elektromagnetycznych zesp t pompyjacy musi by odpowiednio zabezpieczony przez odpowiednie ekranowanie TPS bench nalezy ustawi na ptaskiej powierzchni Ustawi TPS bench w pozycji stabilnej taczac kotnierz wej ciowy turbopompy z przeciwko nierzem kt rego wytrzyma o na moment wok w asnej osi wynosi co najmniej 50 Nm bezpo rednio lub za pomoc z czki elastycznej Turbopompa z ko nierzem wej ciowym ISO musi by po czona z przeciwko nierzem za pomoc zacisk w W poni szej tabeli podano dla ka dego typu zacisku ilo koniecznych zacisk w oraz moment potrzebny do ich zamocowania 196 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 Tab 1 KO NIERZ TYP ZACISKU Nr MOMENT DOKR CENIA 150 63 Podw jny zacisk z gwintem M10 4 22 Nm ISO 100K Podw jny zacisk z gwintem M10 4 22 Nm Turbopompa z ko nierzem wej ciowym ConFlat musi by zamocowana do komory pr niowej poprzez odpowiednie drobne uk ad
47. explosivos bench a Despu s de desembalar el TPS m vil asegurarse de que el sistema no presente signos de da os debidos al transporte las piezas cr ticas son la brida de la bomba los soportes de fijaci n de la bomba de previo el panel frontal y las ruedas del sistema realizando una inspecci n visual Controlar la tensi n de entrada presente en la etiqueta Agilent fijada al chasis de la unidad electr nica del sistema N mero de modelo PN N mero de serie SN Datos el ctricos d E Figura 2 TPS bench User Manual 87 901 009 01 B 71 322 4 12 322 Manual de istrucciones Uso Sila tensi n suministrada por la alimentaci n el ctrica es compatible con la tensi n del sistema se puede conectar el cable de alimentaci n el ctrica a la toma de corriente tipo IEC320 presente en el panel trasero del sistema v ase la figura La toma cuenta con un muelle de retenci n para evitar la desconexi n accidental del cable de alimentaci n utilizar el muelle para enganchar el cable de alimentaci n NI 8 s Wiuelle de retenci n 4 i Cable de alimentaci n Figura 3 Conexi n de la alimentaci n Suministrar la tensi n correcta al sistema mediante el cable de alimentaci n a El sistema est equipado con un Interruptor Principal interruptor t rmico capaz de proteger los componentes del sistema contra sobrecargas o cortocircuitos Colocar el interruptor en
48. gt Pridrziavacia I pruzina N L y ATE i 2 AT Nap jaci k bel Postava 3 Nap jac pr vod a Pripojte syst m ku vhodn mu nap tiu prostredn ctvom nap jacieho k bla Syst m je vybaven hlavn m vyp na om tepeln m isti om schopn m chr ni s asti syst mu pred pre a en m alebo skratom Pred zah jen m innosti s TPS bench prepnite vyp na do polohy I Hlavn vyp na s tepelnou ochranou O O I SE l o Postava 4 Aktiv cia syst mu 232 322 TPS bench User Manual 87 901 009 01 B N vod na Obsluhu 14 Po zapnut syst mu prostredn ctvom hlavn ho vyp na a bude riadiace zariadenie v vevy turbo nap jan ale v veva turbo ako aj vyveva foreline zostan vypnut Aktiv cia syst mu umo uje riadiacemu zariadeniu zah ji tanie daja o tlaku prostredn ctvom voliteln ho prislu enstva Full Range Gauge FRG 700 ak je toto pripojen k spojovaciemu portu gauge na zadnej strane syst mu Port m c ho 3 stroj OJ pac p stroje Na 1 ds dell Meji gt 1 AE N amp 21 S riovy port Postava5 Pripojenie meracieho pr stroja Je mo ne spustit system prostredn ctvom voli a nazvan ho Pumping Po prepnuti voli a Pumping do polohy 1 sa spusti vyveva turbo a vyveva foreline Voli Pumping a lo
49. hazardous materials present in the product Print Name Authorized Signature 22411414 Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next pag Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 Agilent Technologies Vacuum Products Division Reguest for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Vacuum leak High voltage problem Solenoid failure Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Damaged flange SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe Doesn t reach vacuum Over temperature Pump seized Other Section 6 ADDITIONAL TERMS Error code on display Other
50. improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il TPS bench un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto integrata dal relativo controller e dalla pompa primaria Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit mossa da un motore elettrico trifase ad alto rendimento Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information TPS bench User Manual 87 901 009 01 B 15 322 1 Istruzioni per l uso Informazioni Generali Questo manuale utilizza le seguenti convenzioni NIN messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali mania ali messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 16 322 TPS bench User Manual 87 901 009 01 B Istruzioni per
51. installation d crites dans ce manuel 46 322 TPS bench User Manual 87 901 009 01 B Mode d emploi 3 Indications g n rales Cet appareillage a t concu en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non form d op rations non autoris es ou d emploi contraire aux r glementations nationales sp cifiques Le TPS bench est un syst me int gr constitu d une pompe turbomol culaire con ue pour des applications de vide pouss et ultrapouss et dot e d un contr leur et d une pompe primaire Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de pompage est obtenu gr ce une turbine tournant vitesse lev e mue par un moteur lectrique triphas haut rendement Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information TPS bench User Manual 87 901 009 01 B 47 322 3 M
52. la posici n 1 para comenzar a operar con el TPS m vil Interruptor principal con protecci n t rmica 5 5 H ba blo o Figura 4 Activaci n del sistema TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 La activaci n del sistema mediante el Interruptor Principal suministra la alimentaci n al controlador de la turbobomba pero tanto sta como la bomba de apoyo permanecen apagadas La activaci n del sistema permite al controlador comenzar con la lectura del dato de presi n mediante el Full Range Gauge FRG 700 opcional si este ltimo est conectado a la tapa de conexi n del indicador ubicada en la parte trasera del sistema Puerto del gauge Puerto serial Figura 5 Conexi n del gauge Se puede poner en marcha el sistema mediante el selector denominado Pumping Despu s de colocar el selector Pumping en la posici n 1 la bomba y la bomba de apoyo se pondr n en marcha Selector Pumping Figura 6 Puesta en marcha del bombeo TPS bench User Manual 87 901 009 01 B 73 322 4 Manual de istrucciones Unidades especiales Parada del TPS bench Se puede apagar el sistema mediant
53. m pou vate na vy erp vanie toxick ch hor av ch alebo radioaktivnych plynov dodr iavajte prosim pozadovan postupy pre likvidaciu jednotliv ch plynov Nepou vajte v vevu v pritomnosti v bu n ch plynov Zapnutie a pou itie zariadenia TPS bench Po odbalen TPS bench sa vizu lnou kontrolou uistite e sa syst m po as prepravy nepo kodil kritick mi as ami s pr ruby v vevy konzoly pre upevnenie v vevy Foreline eln panel a koles syst mu prostredn ctvom vizu lnej kontroly Skontrolujte vstupn nap tie uveden na t tku Agilent prilepenom na r me elektronickej jednotky syst mu slo modelu PN CL V robn slo SN daje elektrick ho rozvodu Postava 2 Ak je nap tie v elektrickej sieti vhodn pre nap janie syst mu je mo n pripoji nap jac k bel elektrick ho nap jania do z suvky elektrick ho rozvodu typu IEC320 ktor sa nach dza na zadnom paneli syst mu vi obr zok Z suvka m pridr iavaciu pru inu aby sa zabr nilo n hodn mu odpojeniu nap jacieho k bla pou ite pru inu pre pripojenie nap jacieho k bla TPS bench User Manual 87 901 009 01 B 231 322 14 N vod na Obsluhu Pouzitie ub s
54. mp tila saattaa aiheuttaa henkil iden loukkaantumisia VAROITUS gt P PI V ltt k turbopumppuun kohdistuvia iskuja tai sen kkin ist liikuttamista sen ollessa k ynniss Laakerit voisivat vahingoittua joka saattaisi johtaa henkil tai omaisuusvahinkoihin 166 322 TPS bench User Manual 87 901 009 01 B Ohjek sikirja 10 P stett ess pumppuun ilmaa tulee k ytt jalokaasua jossa ei ole p ly hiukkasia tai kosteutta esim typpi Sis njohtavan paineen siihen sopivan aukon l pi t ytyy olle alle 2 baaria paitsi atmosf rinen paine Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppausj rjestelm r j hdysherkkien kaasujen l hell TPS bench n k ynnistys ja k ytt Kun TPS bench on purettu pakkauksesta varmista silm m r isen tarkistuksen avulla ett j rjestelm ss ei n y kuljetuksesta syntyneit vikoja kriittiset osat ovat pumpun laippa Foreline pumpun kiinnityskannattimet etupaneeli ja j rjestelm n renkaat a Tarkista sis nmenon j nnite joka lukee j rjestelm n elektronisen yksik n runkoon kiinnitetyss Agilent tarrassa Mallin numero PN r Sarjanumero SN Er S hk tiedot Kuva 2 TPS bench User Manual 87 901 009 01 B 167 322 10 Ohjek sikirja K ytt Jos s hk j
55. navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi TPS bench je integriran sistem s turbomolekularno rpalko za visoko in ultravisoko vakuumsko uporabo ki je povezana s pripadajo im upravljalcem in primarno rpalko Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine ki jo vodi visoko u inkovit 3 fazni elektri ni motor Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information TPS bench User Manual 87 901 009 01 B 239 322 15 Priro nik za Navodila Splo ne informacije Navodila so napisana po naslednjem standardnem protokolu SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo pomebne informacije iz besedila 240 322 TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 Shranjevanje Da bi jam ili najve ji mo ni nivo uporabnosti in zanesljivosti rpalnih sistemov Agilent je potrebno upo tevati slede a pravila a Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih sp
56. rendszer bekapcsol sa TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 A rendszer f kapcsol val t rt n bekapcsol sa t pot biztos t a turb szivatty vez rl j nek de a turb szivatty s a Foreline szivatty kikapcsolva maradnak A rendszer bekapcsol s val a vez rl elkezdi a nyom sadatok olvas s t a v laszthat Full Range Gauge FRG 700 seg ts g vel ha ez ut bbi r van csatlakoztatva a rendszer h ts r sz n l v gauge csatlakoz portra Gaugeport Serialport bra 5 Gaugecsatlakoztat s a Ellehet ind tani a rendszert az un Pumping kapcsol val A Pumping kapcsol 1 helyzetbe hoz s t k vet en a turb szivatty s a Foreline szivatty beindul Pumping kapcsol AJ H B bra 6 A szivatty z s elindul sa TPS bench User Manual 87 901 009 01 B 185 322 11 Felhaszn l i K zik nyv Speci lis egys g A TPS bench kikapcsol sa a A rendszert ki lehet kapcsolni a Pumping kapcsol val 07 helyzetbe hoz ssal a vez rl bekapcsolva marad s ha a gauge a rendszerhez van csatlakoztatva kikapcsolt szivatty k mellett tov bbra is le lehet olvasni a nyom st A rendszer k
57. s protiprirobnico ki lahko prenese navor 50 Nm okrog lastne osi neposredno ali s pomo jo fleksibilnega spoja Turbomolekularna rpalka z vhodno prirobnico ISO mora biti povezana s protiprirobnico s pomo jo sponk Slede a preglednica opisuje tevilo potrebnih sponk za vsako vrsto sponke in zatezni moment za vija enje slednjih 244 322 TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 Tab 1 PRIROBNICA NAPRAVA ZA PRITRJEVANJE N NAVOR ISO 63 M10 dr ala 4 22 Nm ISO 100 K M10 dr ala 4 22 Nm Turbo rpaklo z dovodno ConFlat prirobnico je treba fiksirati na vakuumsko le i e s pomo jo primerne Agilent strojne opreme Za dodatne informacije glejte prilogo Technical Information TPS bench a ni mo pritrditi s svojo osnovo Za namestitev opcijski dodatkov glej Technical Information TPS bench User Manual 87 901 009 01 B 245 322 15 Priro nik za Navodila Uporaba Uporaba Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema preverite ali so vse elektri ne in pnevmatske povezave pravilno izvedene Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 120 C SVARILO rpalnega sistema ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajte Visoka temperatura lahko povzro i opekline SVARILO Preprecit
58. system see picture The socket is provided with a retention spring to avoid accidental disconnection of power cord plug use the spring to fasten the power cord plug 262 322 TPS bench User Manual 87 901 009 01 B Instructions for Use 16 u c AA v 4 gt Retention Ni s N Spring R s gt 3 4 ATA Power cord plug Figure 3 Connection to main Provide the correct voltage to the system through the power cord The system is equipped with a main switch thermal breaker able to protect the system components against overload or short circuits Move the breaker switch to the position 1 to start operating with the TPS bench Main switch with thermal protection ZE Figure 4 System activation TPS bench User Manual 87 901 009 01 B 263 322 16 Instructions for Use Use The system activation by means of the Main Switch provides voltage to TMP controller but both TMP and Foreline pump continue to be switched off The system activation allows the TMP controller to start reading the pressure data through the optional FRG 700 Full Range Gauge if it is connected to the gauge connection port on the rear side of the system Gauge port Serial port Figure 5 Gauge connectio
59. szelep h m rs klete nem haladhatja meg a 120 C ot VESZELY Soha ne haszn lja a szivatty z rendszert amikor a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz vagy nincs kiiktatva VESZELY Ne rintse meg a turb szivatty t vagy annak tartoz kait a melegit si folyamat k zben Magas h m rs klet g st okozhat VESZELY Ne mozditsa el s vigy zzon ne tk zz n semmi a turb szivatty hoz m k d s k zben A csap gyak megs r lhetnek s anyagi k r vagy szem lyi s r l s t rt nhet FIGYELEM Haszn ljon port l szemcs kt l vagy nedvess gt l mentes semleges g zt pl nitrog nt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt 182 322 TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 Amikor a szivatty t m rgez gy l kony vagy radioakt v g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty z rendszert robban g zok jelenl t ben A TPS bench bekapcsol sa s haszn lata Miut n kicsomagolta a TPS bencht gy z dj k meg gondos megtekint ssel arr l hogy a rendszer nem szenvedett k rosod st a sz ll t s sor n a kritikus r szek az al bbiak a szivatty karima a Foreline szivatty r gz t kengyelei a
60. the maximum level of performance and reliability of Agilent pumping systems the following guidelines must be followed a when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing a the turbomolecular pumps must be always soft started when received and operated for the first time by the customer a the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pumping system has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations TPS bench User Manual 87 901 009 01 B 257 322 16 Instructions for Use Preparation for Installation Preparation for Installation CAUTION The TPS bench is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Figure 1 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or o
61. to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Data Type Logic L 300 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 a lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 17 Response Type Response Response Description Length Value Logic 1 byte after a read instruction of a logic window Numeric 6 bytes after a read instruction of a numeric window Alphanumeric 10 bytes after a read instruction of an alphanumeric window ACK 1 byte 0x6 the command execution has been successfully completed NACK 1 byte 0x15 the command executio
62. vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise TPS bench User Manual 87 901 009 01 B Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist f r den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mifsachtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell TPS bench ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuumanwendungen integriert mit einem entsprechenden Controller und der Prim rpumpe besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine erreicht die von einem Hochleistungsdrehstrommotor angetrieben wird In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten TPS bench User Manual 87 901 009 01 B 31 322 2 Gebrauchs
63. z merili kupopordajne pogodbe 252 322 TPS bench User Manual 87 901 009 01 B TPS bench User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 254 General Information 255 Storage 257 Preparation for Installation 258 Installation 260 Use 261 Switching on and Use of TPS Bench 262 TPS Bench Switching off 265 Emergency Stop 265 Modified Standard265 Maintenance 266 Disposal 267 Original Instructions RES Agilent Technologies 253 322 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 254 322 TPS bench User Manual 87 901 009 01 B Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring du
64. zasilania Doprowadzi prawidtowe napiecie do systemu za pomoca kabla zasilajacego System jest wyposa ony w wytacznik gl wny wytacznik termiczny kt ry zapewnia ochrone element w systemu przed przecia eniem lub zwarciem Ustawi wytacznik w potozeniu 1 w celu rozpoczecia pracy z TPS bench Wytacznik gtowny z zabezpieczeniem termicznym 5 o Posta 64 Uruchomienie systemu 200 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 Uruchomienie systemu za pomoc wy cznika g wnego powoduje doprowadzenie zasilania do sterownika turbopompy ale zar wno turbopompa jak i pompa foreline pozostaj wy czone Uruchomienie systemu umo liwia sterownikowi rozpocz cie odczytu ci nienia przez opcjonalny Full Range Gauge FRG 700 je eli przyrz d ten jest pod czony do portu przyrz du pomiarowego znajduj cego si w tylnej cz ci systemu Port przyrz du dy p pomiarowego PA i E all Me AR s RL Port szeregowy Posta 65 Podtaczenie przyrzadu pomiarowego gauge System mo na uruchomi za pomoc prze cznika Pumping pompowanie Po ustawieniu prze cznika Pumping w po o eniu 1 uruchamia si turbopompa oraz pompa foreline Prze cznik Pumping
65. 00 zu beginnen wenn dieser an dem Anschlusstor des Gauge im hinteren Teil des Systems angeschlossen ist gt Gauge Halter E al Me Serielles Tor Abbildung 5 Anschluss des Gauge a Es ist m glich das System ber den Wahlschalter Pumping zu starten Nachdem der Wahlschalter Pumping auf die Position 1 gestellt wurde starten die Turbopumpe und die Forelinepumpe Pumping Wahlschalter Abbildung 6 Pumpenstart TPS bench User Manual 87 901 009 01 B 41 322 2 Gebrauchsanleitung Spezialeinheiten Stoppen des TPS bench a Es ist m glich das System durch den Wahlschalter Pumping abzuschalten indem er auf 0 gestellt wird der Controller bleibt eingeschaltet und wenn ein Gauge am System angeschlossen ist kann das Lesen des Drucks auch bei abgeschalteter Pumpe fortgef hrt werden Eine alternative Methode zum Abschalten des Systems ist die Anwendung des Hauptschalters durch Verstellen auf 0 Das System schaltet sich vollst ndig ab und es sind keine Druckablese noch andere Vorg nge m glich Not Aus Um das TPS bench im Notfall abzuschalten kann das Stromkabel aus der Netzsteckdose gezogen werden das ruft das Abschalten der Pumpe und des Controllers hervor Spezialeinheiten Das Angebot TPS bench kann je nach Wunsch und Bedarf individuell gestaltet werden wodurch spezifische Modellnummern erhalten werden Aufser in den durch die
66. 01 B 147 322 9 Instruksjon Manual Installasjon Installasjon dS ein Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet Ikke installer eller bruk pumpesystemet i miljger som utsettes for regn sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 35 C relativ fuktighet 0 95 uten kondens Ved magnetfelt m pumpesystemet beskyttes av dertil egnede skjermer TPS bench m plasseres p en jevn rett overflate Sett TPS bench i stabil stilling ved koble turbopumpens inngangsflense til en motflense som er i stand til motst et dreiemoment p 50 Nm rundt sin egen akse direkte eller ved et dreibart koblingsstykke Turbopumpen med ISO inngangsflense m kobles til motflensen ved hjelp av klemskruer Fglgene tabell beskriver for hver type klemskrue antallet p krevde klemskruer og hvilken momentngkkel som skal brukes for stramme dem 148 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 Tab 1 FLENS TYPE KLEMME ANT STRAMME MOMENT 150 63 Dobbel klemme gjenge M10 4 22 Nm ISO 100 K Dobbel klemme gjenge M10 4 22 Nm Turbopumpen med ConFlat inngangsflens skal festes til vakuumkammeret ved hjelp av de spesielle l sedelene fra Agilent For detaljer henvises det til Tec
67. 09 01 B Manual de Istruc es 5 CUIDADO Para a saida de ar da bomba utilizar g s inerte sem poeiras particulas ou humidade p ex Azoto A press o de entrada atrav s da porta especifica deve ser inferior a 2 bars al m da press o atmosf rica ATENCAO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados tipicos para cada gas Nao usar o sistema de bombeamento na presenca de gases explosivos Acendimento e Utilizacao do TPS bench Ap s ter desembalado o TPS m vel certificar se de que o sistema n o tenha marcas de danos devido ao transporte s o partes cr ticas flange da bomba estribos de fixa o da bomba de Foreline painel dianteiro e rodas do sistema por meio de uma inspec o visual Verificar a tens o de entrada informada na etiqueta Agilent colada no chassi da unidade electr nica do sistema N mero de modelo PN L N mero de s rie SN z Dados el ctricos Figura 2 TPS bench User Manual 87 901 009 01 B 87 322 5 88 322 Manual de Istruc es Utiliza o Se a tens o fornecida pela alimenta o el ctrica for compativel com a do sistema possivel conectar o cabo de alimenta o el ctrica na tomada el ctrica do tipo IEC320 presente no painel traseiro do sistema ver figura tomada equipada com uma mola de reten o posicionada para evitar desconex es acidentais
68. 1 se turbo rpalka in rpalka foreline za eneta Izbirno stikalo za rpanje Slika 6 Zagon rpanja TPS bench User Manual 87 901 009 01 B 249 322 15 Priro nik za Navodila Posebne enote Izklop TPS bench a Sistem je mogo e izklopiti s pomo jo izbirnega stikala Pumping s pomikom slednjega v polo aj 0 kontroler ostane vklju en in e je na sistem priklju en merilnik se merjenje tlaka lahko nadaljuje tudi z izklopljenima rpalkama Drugi na in za izklop sistema je uporaba glavnega stikala s pomikom slednjega v polo aj 0 Sistem se v celoti ugasne in ne merjenje tlaka ne druge funkcije niso ve mogo e Zaustavitev v sili Za ustavitev sistema TPS beneh v sil izvlecite napajalni kabel iz omre ne vti nice s tem se rpalka in kontroler izklopita Posebne enote Platformo TPS bench lahko prikrojite lastnim potrebam in eljam z izdelavo posebnih tevilk modelov Z izjemo posebnih primerov s prilo eno specifi no dokumentacijo je ta priro nik uporaben pri vseh posebnih enotah z oznako MXXXX na primer 969 8204M2001 250 322 TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 Vzdrzevanje Zariadenie TPS compac
69. 2 75 24 0 94 Figure 21 FRG 700 gauge dimension J2 Serial Connector This connector provides the connection for RS 232 and serial line J2 Pin out 20000 O da OOOGJ CZ 9 Figure 22 TPS bench User Manual 87 901 009 01 B Technical Information 17 Tab 8 PIN N SIGNAL NAME ojo jo ais au in o o z O Connector Examples 5 5 2 2 TV301AG RG Rack Controller 3 3 Figure 23 RS 232 Connection TPS bench User Manual 87 901 009 01 B 291 322 17 Technical Information Electrical Connections 292 322 PC HOST 0 TURBO CONTROLLER B CONTROLLER B Figure 24 RS 485 Connection The communication port mating connector is supplied with the RS 232 PCB AMP Cannon or equivalent 15 pin D type male connector For example the Transmit data signal from controller pin 2 must be connected to the host computer s receive data line pin 2 and vice versa Consult the host computers instruction manual for its serial port connections Agilent cannot guarantee compliance with FCC regulations for radiated emissions unless all external wiring is shielded with the shield being terminated to the metal shroud on the 0 subconnector The cable should be secured to the connector with screws TPS bench User Manual 87 901 009 01 B Technical Information 17 Serial Communication Description This unit can comunicate by two dif
70. 3 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 901 009 01 B Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
71. 86 01 Figure 27 310 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 Accessories and Spare Parts Tab 20 Description Part number Mains cable NEMA Plug 3m long 969 9958 Mains cable European Plug 3m long Serial cable and Navigator Software Inlet screen 150 100 Heater band 120 V Heater band 220 V Vibration isolator ISO 100 Vibration isolator CF 6 TPS bench User Manual 87 901 009 01 B 311 322 17 Technical Information Appendix 1 Appendix 1 The following three pages gathered in the Appendix 1 are intended as a Quick Reference Manual of the product they contain the basic information needed to start operating with TPS bench These pages are intended as a separate document and if needed can be printed separately and attached in paper format to the TPS bench for a quick reference work in the field The Appendix 1 is applicable to following models Tab 21 969 8212 969 8213 969 8214 969 8215 969 8216 Basic information about the system activation and system components management is reported here following 1 After TPS bench unpacking perform a brief visual analysis of the system to be sure that no sign of damages due to transportation is present critical parts are TMP flange Forepump fastening brackets system front panel 2 Check the system voltage on the Agilent label stuck on the system electronic units case Part Number PN I
72. 9 01 B Technical Information 17 Window Meanings Tab 18 N Read Data Description Admitted Values Write Type 000 R W L Start Stop in remote Front mode the Start 1 window is a read only Stop 0 001 R W L Low Speed Activation No 0 008 R W L Remote default or Serial configuration Remote Serial 0 default 1 100 RW L Soft Start write only in Stop condition YES 1 N0 0 101 R W N R1 Set Point type 0 Frequency 1 Power 2 Time 3 Normal 4 Pressure default 3 102 R W N R1 Set Point valve expressed in Hz W or s default 900 103 R W N Set Point delay time between the pump 0 to 99999 default 0 start and the set point check seconds 104 R W L Set Point signal activation type the signal 0 high level active can be high level active or low level 1 low level active active default 0 105 R W N Set point hysteresis in of value 0 to 100 default 2 106 R W L Water cooling 0 NO 1 YES 107 R W L Active Stop write only in stop 0 NO 1 YES 108 R W N Baud rate 600 0 1200 1 2400 2 4800 3 9600 4 default 4 109 W L Pump life cycle time cycle number reset To reset write 1 110 R W L Interlock type default 1 Impulse 0 Continuous 1 TPS bench User Manual 87 901 009 01 B 305 322 17 Technical Information Letter Protocol Description N Read Data Description Admitted Values 111 R W L Analog output type output
73. 901 009 01 B Technical Information 17 Tab 9 CHARACTER ASCII CONVERTED ASCII FOR CRC CALCULATION A 41h CRC BFh p CRC BER C 43 h CO CRC BDh m CRC BEN E 4 5 h ee CRC Bis ska 46h CRC BAh G 47h A CRC B R n i rr O E z CRC B7h a nn CRC BR lt 0 CRC B5h AC K 0 6h Se E un RU KC RR SA CRC FAh NACK mr SM a EBh Answer after a request from the host the Turbo V 301 controller will answer in one of the following ways ACK NACK a Message TPS bench User Manual 87 901 009 01 B 295 322 17 Technical Information Letter Protocol Description When the Request is A B C D F the Turbo V 301 controller will Answer the ACK or NACK When the Request is E the Answer will contain the complete set of the following parameters Tab 10 BYTES MEANING 1 MSB LSB Qe XXX 0 STOP 1 WAITING INTERLOCK 2 STARTING 3 NORMAL OPERATION 4 5 HIGH LOAD 6 FAILURE 7 APPROACHING LOW SPEED 2 5 Cycle Time 6 9 Pump Life 10 11 Pump Temperature 14 17 Freguency lt vem EE a roma ANN e EEE em A TT NUN n s The values for current and voltage are given as numbers scaled from 0 to 255 where 0 corre sponds to 0 V and 255 to the full scale voltage 130 V or current 2 5 A When the Reguest is G the Answer will contain a string of 11 characters with the following parameters
74. De turbopomp met ISO inlaatflens moet met behulp van klemmen aan de contraflens worden bevestigd Onderstaande tabel geeft voor elk klemtype het aantal benodigde klemmen en het aanhaalkoppel waarmee ze vastgezet moeten worden 100 322 TPS bench User Manual 87 901 009 01 B Bedrijfshandleiding 6 Tab 1 FLENS KLEMTYPE NR AANHAAL KOPPEL ISO 63 Dubbele klem met M10 schroefdraad 4 22 Nm ISO 100 K Dubbele klem met M10 schroefdraad 4 22 Nm De turbopomp met ConFlat inlaatflens moet aan de vacu mpomp worden bevestigd met behulp van de speciale mechanische bevestigingselementen van Agilent Zie voor meer informatie de bijlage Technical Information De TPS bench kan niet met behulp van zijn eigen basis worden bevestigd Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn TPS bench User Manual 87 901 009 01 B 101 322 6 Bedrijfshandleiding Gebruik Gebruik In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Controleer alvorens het systeem te gebruiken of alle elektrische en pneumatische aansluitingen correct tot stand zijn gebracht Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 120 C bedragen WAARSCHUWING Laat het pompsysteem nooit draaien als de inlaatflens niet op de vacu mkamer is aangesloten of als de afsluitflens niet gesloten is WAARSCHUWING Raak de turbopomp en event
75. In tal cia In tal cia POZOR Neodstra ujte lepiacu p sku a ochrann kryt sk r ne pripoj te turbov vevu k syst mu erpac syst m nein talujte ani nepou vajte v prostred vystavenom vonkaj m vplyvom d sneh Tad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny tlak 2 bary nad rov ou atmosf rick ho tlaku a teplota od 5 C do 35 C relat vna vlhkos O 95 bez kondenz cie V pr tomnosti magnetick ho po a mus by erpac syst m chr nen feromagnetick m t tom TPS bench mus by umiestnen na rovn povrch Umiestnite TPS bench do stabilnej polohy pripojen m vstupnej pr ruby turbov vevy k protipr rube schopnej odol va kr tiacemu momentu 50 Nm vo svojej osi priamo alebo nepriamo prostredn ctvom pru n ho spoja Turbov veva so vstupnou pr rubou ISO mus by pripojen k protipr rube prostredn ctvom svoriek Nasleduj ca tabu ka popisuje pre ka d druh svorky potrebn po et svoriek a pr slu n u ahovac moment 228 322 TPS bench User Manual 87 901 009 01 B N vod na Obsluhu 14 Tab 1 s x UPEVNOVAC KR TIACI PR RUBA UPEV OVAC MECHANIZMUS PO ET MONIN 150 63 Svorky M10 4 22 Nm ISO 100K Svorky M10 4 22 Nm Turbovyveva so vstupnou prirubou ConFlat musi byt pripoj
76. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istru es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 901 009 01 B 05 2011 TPS bench Models 969 8200 969 8202 969 8203 969 8204 969 8208 969 8212 969 8213 969 8214 969 8215 969 8216 Instruksjon manual Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji N vod k pouziti N vod na obsluhu Priro nik za navodila User Manual E Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 009 01 B Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantabil
77. PS bench User Manual 87 901 009 01 B 211 322 13 N vod k Pou it Instalace Instalace POZOR P ed p ipojen m turbomolekularni vyv w do syst mu nesundavejte adhezni a ochrann viko erpac syst m neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem a teplota od 5 C do 35 C relativni vlhkost 0 95 bez sr en V p tomnosti magnetick ch pol se erpac syst m mus chr nit feromagnetick m st n n m TPS bench mus b t um st n na rovn povrch Um st te TPS bench do stabiln polohy p ipojen m vstupn p ruby turbov v vy k protip rub schopn odol vat kroutic mu momentu 50 Nm ve sv ose p mo nebo nep mo prost ednictv m pru n ho spoje Turbov v va se vstupn p rubou ISO mus b t pripojena k protip rub prost ednictv m svorek N sleduj c tabulka popisuje pro ka d druh svorky pot ebn po et svorek a p slu n utahovac moment 212 322 TPS bench User Manual 87 901 009 01 B N vod k Pouziti 13 Tab 1 P RUBA PRICHYTNE ZA ZEN PO ET UTAHOVAC MOMENT ISO 63 Spony M10 4 22 Nm ISO 100K Spony M10 4 22 Nm Turbomolekul rn v v v
78. Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepr ft hat 44 322 TPS bench User Manual 87 901 009 01 B TPS bench User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 46 Indications g n rales 47 Stockage 49 Pr paration pour l installation 50 Installation 52 Utilisation 54 Mise en marche et utilisation du TPS bench 55 Arr t du TPS bench 58 Arr t d urgence 58 Unites speciales 58 Entretien 59 Mise au rebut 60 Traduction de la mode d emploi originale kai Agilent Technologies 45 322 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires Normes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e A3 E33 Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d
79. Serial Number SN 7 5 Electrical Data Figure 28 312 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 3 Ifthe voltage provided by your electrical supplier is compatible with the system voltage you can connect the provided power cord to the IEC320 electrical socket on the rear side of the system see picture The socket is provided with a retention spring to avoid accidental disconnection of power cord plug use the spring to fasten the power cord plug N 6 Retention Spring Kr amp Na A A Power cord plug Figure 29 Connection to main 4 Provide the correct voltage to the system through the power cord 5 The system is equipped with a main switch thermal breaker able to protect the system components against overload or short circuits Move the breaker switch to the position 1 to start operating with the TPS bench Main switch with thermal protection Figure 30 System activation TPS bench User Manual 87 901 009 01 B 313 322 Technical Information 6 The system activation by means of the Main Switch provides voltage to TMP controller but both TMP and Foreline pump continue to be switched off The system activation allows the TMP controller to start reading the pressure data through the optional FRG 700 Full Range Gauge if it is connected to the gauge connection port on the rear side of the system Gauge port
80. TPS bench switching off 315 Appendix 2 315 270 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 Description of the TPS bench The TPS bench pumping system consists of a turbomolecular pump with an integrated controller and a forepump It is available in twenty eight models which differ in the TPM size high vacuum flange foreline pump and voltage The models are Tab 2 TPS bench 220 V P N TMP Flange Foreline 969 8203 TV301 150100 SH110 5 N TT m NE Tab 3 TPS bench 110 V P N TMP Flange Foreline 969 8212 TV301 150100 SH110 969 8213 969 8214 969 8215 TPS bench User Manual 87 901 009 01 B 271 322 17 Technical Information Description of the TPS bench TMP fan 3 Foreline Eront Panel Main Switch TMP Controller Pumping Selector Gauge Control Unit i Optional w m Dampers Figure 7 272 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 1 Turbopump Description The turbopump consists of a high frequency motor driving a turbine fitted with many bladed stages and Macrotorr stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength light alumi num alloy and is machined from a single block of aluminum The turbine blades have five different angles from 44 to 12 while the Macrotorr stages are in the form of discs The turbine rot
81. Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotaci n podr a ser liberada LLA Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 62 322 TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas El TPS bench es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vac o integrada por el respectivo controlador y la bomba primaria El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear liguidos o part culas s lid
82. Uso Uso En este apartado se citan los procedimientos operativos principales Antes de usar el sistema controlar que todas las conexiones el ctricas y neum ticas se hayan realizado correctamente Durante el posible calentamiento de la c mara de vacio la temperatura de la brida de entrada no ha de ser superior a 120 C iADVERTENCIA No hacer funcionar nunca el sistema de bombeo si la brida de entrada no est conectada a la c mara de vac o o no est cerrada con la brida de cierre iADVERTENCIA No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas iADVERTENCIA gt gt Evitar los golpes o bruscos desplazamientos de la turbobomba cuando est en marcha Los rodamientos se podr an da ar y se podr an verificar da os a las personas o a las cosas 70 322 TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 CUIR Para el env o al aire de la bomba utilizar gas inerte exento de polvo particulas y humedad por ej nitr geno La presi n de entrada a trav s de la respectiva puerta debe ser inferior a 2 bares por encima de la presi n atmosf rica Uv AEM Cuando la bomba se utiliza para bombear gases t xicos inflamables o Encendido y Uso del TPS radioactivos seguir los procedimientos apropiados t picos de cada gas No usar el sistema de bombeo cuando haya gases
83. Vare Serial port Figure 31 Gauge connection 7 Itis possible to start pumping by means of the selector named Pumping As soon as the Pumping selector is moved to the position 1 the TMP and Foreline pump will be switched on Pumping selector Figure 32 Start pumping TPS bench User Manual 87 901 009 01 B Technical Information 17 TPS bench switching off Appendix 2 Tab 22 Symptom You can switch the pumps off by using the pumping selector moving it to position 0 the TMP controller will remain ON and if a gauge is connected to the system it will be possible to continue reading the pressure even if pumps are off An alternative mode for switching the pumps off is the use of Main Switch move it to position 0 The system will be completely switched off and no reading or operation will be possible If an emergency situation occurs is possible to switch the pumps and the controller off even disconnecting the mains cable emergency stop Troubleshooting Table Possible cause Action System doesn t start Turbo pump is not able to reach the Normal Operation Status Check the connection of main plug
84. a ConFlat flange When the TPS bench has been stored at a temperature less than 5 C wait until the TPS bench has reached the above mentioned temperature TPS bench User Manual 87 901 009 01 B 279 322 17 Technical Information Technical Specification Tab 6 Characteristic 969 8203 969 8208 TV301 TV301 150100 150100 Turbo Pump TMP Flange Base Pressure 1x10 8mbar 7 5x10 9Torr _Nz Pumping Speed L s 250 H2 Pumping Speed L s 200 TMP Rotational Speed 56000 pm Start up time lt 3 min Bakeout Temperature max 80 C on Inlet Flange Protection Breaker 14A Compliance with SEE CE CERTIFICATE OF CONFORMITY Installation category Il Pollution Degree 2 Serial Communication kit T Plus Md TI Ti E 1 177 Storage Temperature 280 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 Tab 7 Characteristic 969 8212 969 8213 Turbo Pump TV301 TV301 CTMP Flange 150100 180100 Forepump SH110 DS102 Voltage ZVO 110V 60Hz Base Pressure 1x10mbar 7 5x10Torr No Pumping Speed L s 250 He Pumping Speed L s 220 Hz Pumping Speed L s o 200 TMP Rotational Speed 56000 rpm Start up time lt 3 min Operating Position On a flat floor Ambient Temperature OO 5 C to 35 C _ Bakeout Temperature p max 80 C on Inlet Flange Protection Breaker 14A SEE CE CERTIFICATE OF CONFORMITY Ser
85. a se vstupn p rubou ConFlat se mus p ipevnit k vakuov komo e pou it m p slu n ho materi lu firmy Agilent Viz podrobn popis v p loze Technical Information V v vu TPS bench nelze p ipevnit pomoc jej podstavy Chcete li informace o dopl kov m p slu enstv viz Technical Information TPS bench User Manual 87 901 009 01 B 213 322 13 Navod k Pou iti Pou iti Pou iti Tento odstavec popisuje podrobnosti zakladnich pracovnich postupu Pred pou itim syst mu zkontrolujte zda byla spravn zrealizovana v echna elektrick a pneumatick zapojen P i zah v n vakuov komory teplota vstupn p ruby nesm p ekro it 120 C erpac syst m nikdy nepou vejte nebude li vstupn p ruba p ipojen k vakuov komo e NEBEZPE B hem zah v n se turbov v vy ani jej ho p slu enstv nedot kejte Vysok teplota m e zp sobit pop leniny NEBEZPE NEBEZPE P edch zejte n raz m i posun m turbomolekul rni v v vy b hem jej ho chodu Mohlo by doj t k po kozen lo isek a tak ke zran n osob i kod m na v cech Pro odv tr n v v vy pou vejte inertn plyn bez prachu stic a vlhkosti nap dus k Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem 214 322 TPS bench User Manual 87 901 009 01 B N vod k Pouziti 13
86. a turbo e la pompa di foreline si avvieranno TPS bench User Manual 87 901 009 01 B 25 322 1 Istruzioni per l uso Uso Selettore Pumping lo O Figura 6 Avvio del pompaggio Arresto del TPS bench possibile spegnere il sistema mediante il selettore Pumping spostandolo in posizione 0 il controller rester acceso e se un gauge collegato al sistema sar possibile continuare la lettura della pressione anche a pompe spente Un modo alternativo di spegnere il sistema quello d usare l Interruttore Principale spostandolo in posizione 0 Il sistema si spegner completamente e non saranno possibili n letture di pressione n altre operazioni Arresto di Emergenza Per arrestare in condizioni di emergenza il TPS bench possibile staccare il cavo di alimentazione dalla presa di rete ci provocher lo spegnimento della pompa e del controller 26 322 TPS bench User Manual 87 901 009 01 B Istruzioni per l uso 1 Unita Speciali La piattaforma TPS bench pu essere personalizzata in funzione delle diverse esigenze ottenendo specifici numeri di modello Ad eccezione di casi specifici forniti di specifica documentazione questo manuale
87. ak ldi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkr t nemzeti szabv nyoknak megfelel en TPS bench User Manual 87 901 009 01 B 187 322 11 Felhaszn l i K zik nyv Megsemmis t s Megsemmis t s 188 322 A c mk n jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad TPS bench User Manual 87 901 009 01 B TPS bench User Manual 00 e 0 12 Podrecznik Instrukcji Wskaz wki dotyczace bezpieczeristwa dla Pomp Turbomolekularnych 190 Og lne informacje 191 Magazynowanie 193
88. al 87 901 009 01 B 107 322 6 Bedrijfshandleiding Afvalverwerking Afvalverwerking 108 322 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd TPS bench User Manual 87 901 009 01 B TPS bench User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper 110 Generel Information 111 Opbevaring 113 Forberedelse fgr installation 114 Installation 116 Anvendelse 118 Start og anvendelse af TPS bench 119 Stop af TPS bench 122 Ngdstop 122 Specielle enheder 122 Vedligeholdelse 123 Bortskaffelse 124 Overs ttelse af originalinstruktionerne GE Agilent Technologies 109 322 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i neerveerende brugsanvisning har en s
89. al Information Il TPS bench non pu essere fissato tramite la sua base Per l installazione degli accessori opzionali vedere Technical Information TPS bench User Manual 87 901 009 01 B 21 322 1 Istruzioni per l uso Uso Uso In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema verificare che tutti i collegamenti elettrici e pneumatici siano stati realizzati correttamente Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 120 C AVVERTENZA Non far funzionare mai il sistema di pompaggio se la turboflangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura AVVERTENZA Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone AVVERTENZA Evitare urti o spostamenti della turbopompa quando in funzione cuscinetti potrebbero danneggiarsi e potrebbero verificarsi danni alle persone o alle cose ATTENZIONE Per la mandata all aria della pompa utilizzare gas inerte esente da polvere particelle o umidit es Azoto La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica 22 322 TPS bench User Manual 87 901 009 01 B Istruzioni per l uso 1
90. al unit marked as MXXXX i g 969 8204M2001 TPS bench User Manual 87 901 009 01 B 265 322 16 Instructions for Use Maintenance Maintenance The TPS bench does not require any maintenance except Tip seal replacement for versions equipped with scroll pumps and oil filling up change for versions with Rotary Vane Pumps Any work performed on the system must be carried out by authorized personnel Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center Before returning the system to the constructor for repairs the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping 266 322 If a system is to be scrapped it must be disposed of in accordance with the specific national standards TPS bench User Manual 87 901 009 01 B Instructions for Use 16 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT
91. amento dell alimentazione a Fornire la tensione corretta al sistema mediante il cavo d alimentazione a Il sistema equipaggiato con un interruttore principale interruttore termico in grado di proteggere i componenti del sistema contro sovraccarichi o corto circuiti Porre l interruttore in posizione 1 per cominciare ad operare con il TPS bench Interruttore principale con protezione termica Tum srar TTT o E ccnare z MOTTO 2 Figura4 Attivazione del sistema 24 322 TPS bench User Manual 87 901 009 01 B Istruzioni per l uso 1 L attivazione del sistema mediante l Interruttore Principale fornisce alimentazione al controller della pompa turbo ma sia la pompa turbo sia la pompa di foreline restano spente L attivazione del sistema permette al controller d iniziare la lettura del dato di pressione attraverso il Full Range Gauge FRG 700 opzionale se quest ultimo collegato alla porta di connessione gauge posta nella parte posteriore del sistema Porta gauge Porta seriale Figura5 Collegamento del gauge possibile avviare il sistema mediante il selettore denominato Pumping Dopo aver portato il selettore Pumping nella posizione 1 la pomp
92. anleitung Allgemeine Informationen In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermaf en hervorgehoben WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 32 322 TPS bench User Manual 87 901 009 01 B Lagerung VORSICHT Gebrauchsanleitung 2 Zur Garantie der h chsten Funktionst chtigkeit und Zuverl ssigkeit der Agilent Pumpsysteme m ssen die folgenden Vorschriften eingehalten werden W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C a Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start ingangzusetzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum Falls die Lagerdauer aus verschiedentlichen Gr nden die genannte Frist berschreiten sollte ist das Pumpensystem an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlich
93. as El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad movida por un motor el ctrico trif sico de alto rendimiento A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n m s detallada TPS bench User Manual 87 901 009 01 B 63 322 4 Manual de istrucciones Informaci n general Este manual utiliza las convenciones siguientes MINA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una ejecuci n especifica que de no realizarse correctamente podr a provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaci n importante extra da del texto 64 322 TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 Almacenamiento ATENCI N Para garantizar el nivel m ximo de funcionalidad y fiabilidad de los sistemas de bombeo Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deber n superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomolecu
94. aser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift a maximitryck 2 bar over atmosf riskt tryck a temperatur fr n 5 C till 35 C a relativ luftfuktighet 0 95 utan kondens TPS bench skall placeras p en plan yta St ll TPS bench p en stabil position och koppla turbopumpens ing ngsfl ns till ett kontrafl ns som kan motst ett tdragningsmoment p 50 Nm runt den egna axeln direkt eller med hj lp av en flexible koppling Turbopumpen med ISO ing ngsfl ns skall kopplas till kontrafl nset med hj lp av kl mmor Tabellen nedan beskriver f r varje typ av kl mma antalet kl mmor som beh vs och med vilket tdragningsmoment de skall dras t Tab 1 FL NS TYP AV KLAMMER ANT ATDRAGNINGSMOMENT ISO 63 Dubbel klammer g nga M10 4 22 Nm ISO 100K Dubbel klammer g nga M10 4 22 Nm Turbopumparna med intagsfl ns ConFlat ska f stas vid vakuumkammaren med hj lp av Agilent f stdelar F r detaljer h nvisas till bilaga Technical Information TPS bench systemet kan inte fastsp nnas med sin egen bas Installation av tillbeh rsutrustning beskrivs i Technical Information 132 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 Anv nding Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan systemet anv nds kontrollera att alla el och tryckluftsanslutningar genomf rts rik
95. astointiaika on 10 kuukautta toimitusp iv st HUOMIO Jos varastointiaika on jostain syyst pidempi pumppausj rjestelm tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta TPS bench User Manual 87 901 009 01 B 161 322 10 Ohjek sikirja Valmistelut asennusta varten Valmistelut asennusta varten TPS bench toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti TPS bench n putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta Kuva 1 ieu Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta 162 322 TPS bench User Manual 87 901 009 01 B Ohjek sikirja 10 TPS bench ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen Tassa k ytt ohjeessa osoitetut mallit perustuvat Agilent pumppausj rjestelm arkkitehtuuriin jota kutsutaan nimell TPS bench Eri malleihin liittyv t n
96. atentamente o presente manual de instru es e todas as informa es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por opera es n o autorizadas ou pelo uso contr rio s normas nacionais espec ficas O TPS bench um sistema integrado constitu do por uma bomba turbomolecular para aplica es de alto e ultra alto v cuo equipado com os respectivos controller e bomba prim ria O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o apropriado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade movida por um motor el ctrico trif sico de alto rendimento Nos seguintes par grafos est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information TPS bench User Manual 87 901 009 01 B 79 322 5 Manual de Istruc es Informac es gerais Este manual utiliza as seguintes conven es ATENCAO As mensagens de atencao chamam a atenc o do operador para um procedimento ou uma pratica especifica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As mensagens de cuidado s o visualizadas
97. bsluhy 206 322 TPS bench User Manual 87 901 009 01 B N vod k Pouziti 13 VSeobecn informace Toto za zen je ur eno pro odborn ky U ivatel by si m l p ed pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch TPS bench je integrovan syst m pro aplikace vy aduj c vysok a velmi vysok vakuum vybaven hlavn turbomolekul rn v v vou a p slu n m regul torem Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na poh n n vysoce v konn m trojf zov m elektromotorem N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information TPS bench User Manual 87 901 009 01 B 207 322 13 N vod k Pou it V eobecne informace Tento manual pou iva nasledujici standardni protokol 4 34 4H IM V stra n hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti
98. ciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta el momento de la instalaci n en el sistema para evitar su posible contaminaci n por polvo Los modelos citados en este manual de instrucciones se basan en la plataforma para sistemas de bombeo Agilent denominada TPS m vil las diferencias aportadas por los distintos n meros de modelo corresponden a la bomba turbomolecular y a la bomba de previo integrada al modelo espec fico como as tambi n a la tensi n aplicable al sistema Las diferencias entre los distintos modelos del TPS m vil respectan s lo a las prestaciones del sistema mientras que el funcionamiento y los procedimientos de uso son los mismos para todos los TPS m vil La presente informaci n es aplicable a toda la plataforma todos lo modelos independientemente de la bomba turbomolecular espec fica de la bomba de previo o de la alimentaci n el ctrica TPS bench User Manual 87 901 009 01 B 67 322 4 Manual de istrucciones Instalaci n Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo en el momento de conectar la turbobomba al sistema 68 322 No instalar ni o utilizar el sistema de bombeo en lugares expuestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos ni en ambientes sujetos a riesgo de explosi n o incendio Durante el funcionamiento es necesario que se respeten las condicio
99. cn informace 207 Uskladn ni 209 Priprava kinstalaci 210 Instalace 212 Pouziti 214 Specialni jednotky 218 TPS bench User Manual 87 901 009 01 B Contents Udr ba 219 Likvidace 220 14 Navod na Obsluhu 221 Bezpe nostn n vod pre Turbomolekularne v vevy 222 V eobecn inform cie 223 Uchov vanie 225 Pr prava na in tal ciu 226 In tal cia 228 Pou itie 230 peci lne jednotky 234 dr ba 235 Likvid cia 236 15 Priro nik za Navodila 237 Varnostna navodila za Turbomolekularne rpalke 238 Splo ne informacije 239 Shranjevanje 241 Priprava za monta o 242 Monta a 244 Uporaba 246 Posebne enote 250 Vzdr evanje 251 Odlaganje opadkov 252 TPS bench User Manual 87 901 009 01 B 11 322 Contents 12 322 16 Instructions for Use 253 Safety Guideline for Turbomolecular Pumps 254 General Information 255 Storage 257 Preparation for Installation 258 Installation 260 Use 261 Modified Standard 265 Maintenance 266 Disposal 267 17 Technical Information 269 Description of the TPS bench 271 Technical Specification 278 TPS bench Outline 282 Turbo Pumping System Connection 283 Electrical Connections 288 Letter Protocol Description 293 Pumping System Component Info310 Accessories and Spare Parts 311 Appendix 1 312 Appendix 2 315 TPS bench User Manual 87 901 009 01 B TPS bench User Manual Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari 14 In
100. ctrique Ceci entra ne l arr t de la pompe et du contr leur Unites speciales La plateforme TPS bench peut tre personnalis e en fonction des exigences en obtenant des num ros de mod le sp cifiques A Vexception de cas particuliers accompagn s d une documentation sp ciale ce manuel s applique a toutes les machines estampill es MXXXX exemple 969 8204M2001 58 322 TPS bench User Manual 87 901 009 01 B Entretien Mode d emploi 3 Le TPS bench n exige aucun entretien particulier Vexception du remplacement du Tip seal pour les versions quip es de pompes scroll ou le remplissage vidange de l huile pour les versions avec pompe Rotary Vane Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent Avant de renvoyer une pompe au constructeur pour r paration remplir et faire parvenir au bureau Agilent de votre r gion la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son liminat
101. dejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 Postava 1 Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu TPS bench User Manual 87 901 009 01 B N vod k Pouziti 13 V norm ln m prost ed se v v va TPS bench nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem Modely uveden v tomto n vodu vych zej z platformy erpac ch syst m Agilent nazvan TPS bench p i em rozd ly zaveden r zn mi sly model se vztahuj na turbomolekul rn v v vu a na v v vu foreline integrovanou ve specifick m modelu a na nap t aplikovateln na syst m Rozd ly mezi r zn mi modely TPS bench se vztahuj pouze na v konnost syst mu zat mco innost a postupy pro pou it jsou stejn pro v echny TPS bench Uveden informace jsou aplikovateln na celou platformu v echny modely nez visle na technick ch daj ch turbomolekul rn v v vy v v vy foreline nebo elektrick ho nap jen T
102. delser derimod er funktionen og brugsm den de samme for alle TPS bench modellerne De angivne oplysninger geelder for hele serien alle modeller uanset den specifikke molekyl re turbopumpe foreline pumpen eller den elektriske strgmforsyning TPS bench User Manual 87 901 009 01 B 115 322 7 Istruktionsbog Installation Installation dee Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet 116 322 Install r og anvend ikke pumpeanl gget i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift max tryk 2 bar over det atmosf riske tryk a temperatur fra 5 C til 35 C a relativ luftfugtighed 0 95 ikke kondenserende Hvis pumpeanl gget er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes TPS bench skal hvile p en jeevn overflade Anbring TPS bench i stabil position og forbind turbopumpens indtagsflange til en modflange der er i stand til at modst et tilsp ndingsmoment 50 omkring aksen direkte eller ved brug af en bgjelig kobling Turbopumpen med ISO indtagsflange skal tilsluttes modflangen ved hjeelp af klemmer Fglgende tabel beskriver for hver type klemme antallet klemmer der skal bruges samt deres tilspaendingsmoment TPS bench User Manual 87 901 009 01 B Istruktio
103. denominada WEEE Este s mbolo v lido apenas para os pa ses da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e elimina o ap s a oportuna verificac o dos termos e condic es do contrato de venda TPS bench User Manual 87 901 009 01 B TPS bench User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 94 Algemene informatie 95 Opslag 97 Uitpakken 98 Installatie 100 Gebruik 102 Inschakeling en gebruik van de TPS bench 103 Afzetten van de TPS bench 106 Noodstop 106 Speciale units 106 Onderhoud 107 Afvalverwerking 108 Vertaling van de originele instructies tle Agilent Technologies 93 322 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vri
104. diff rences entre les mod les de TPS bench concernent uniquement les prestations du syst me tandis que le fonctionnement les proc dures d utilisation sont les m mes pour tous les TPS bench Les informations donn es sont applicables l ensemble de la plateforme tous les mod les ind pendamment de la pompe turbomol culaire de la pompe primaire ou de l alimentation lectrique TPS bench User Manual 87 901 009 01 B 51 322 3 Mode d emploi Installation Installation atv Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me 52 322 Ne pas installer et ou utiliser le syst me de pompage dans des milieux expos s aux agents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes a pression max 2 bars au del de la pression atmosph rique temp rature de 5 C 35 C a humidit relative 0 95 non condensante En pr sence de champs magn tiques le syst me de pompage doit tre prot g e l aide d crans appropri s Le TPS bench doit tre install sur une surface plane Placez le TPS bench en position stable en reliant la bride d entr e de la turbopompe une contrebride capable de r sister un couple de 50 Nm autour de son axe
105. e 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if reguesting a billable service 3A O Non Billable L Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade consignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this reguirement presents a problem The eguipment listed above check one O HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed toxic O Corrosive L Reactive O Flammable L Explosive O Biological L Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or
106. e 969 8200 969 8204 969 8208 969 8213 969 8214 and 969 8216 INTERSTAGE INLET RELIEF INTERSTAGE OLUME DISCHARGE VALVE VALVE Figure 9 A metal rotor is located eccentric into a round pumping chamber TPS bench User Manual 87 901 009 01 B Technical Information 17 Two sliding vanes are placed in the rotor The vanes are pushed toward the stator wall either by springs To make high pressure ratios achievable the principal requirement of these pumps is that the inlet and discharge always remain separated This separation is achieved placing the rotor in close proximity to the stator the near contact line being placed between the inlet and discharge and spring loading the blades so that they remain in contact with the stator In addition oil is used to seal the end surfaces of the vanes and along the entire length of the two vanes as well as across the ends of the rotor As said the rotor in such pumps are placed inside the stator Oil is used in these pumps for a variety of purposes to effect a seal between the inlet and discharge areas to lubricate to fill the space under the discharge valve to serve as a heat transfer medium and keep the rotor temperature within acceptable range to flush particulate matter out of the pump TPS bench User Manual 87 901 009 01 B 271 322 17 Technical Information Technical Specification Technical Specification Tab 4 Characteristic 969 8202 969 8204
107. e el selector Pumping desplaz ndolo a la posici n 0 el controlador permanecer encendido y si hay un indicador conectado al sistema se podr continuar con la lectura de la presi n incluso con el sistema apagado Una manera alternativa para apagar el sistema es utilizar el Interruptor Principal desplaz ndolo a la posici n 0 El sistema se apagar completamente y no se podr leer la presi n ni realizar otras operaciones Parada de Emergenica Para parar el TPS m vil en condiciones de emergencia se puede desconectar el cable de alimentaci n de la toma de la red esto apagar la bomba y el controlador Unidades especiales La plataforma TPS m vil se puede personalizar de acuerdo con las distintas necesidades obteniendo n meros de modelo espec ficos A excepci n de casos especiales provistos de documentaci n espec fica este manual se puede aplicar a todas las unidades especiales con marcado MXXXX por ejemplo 969 8204M2001 74 322 TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 Mantenimiento El TPS bench no necesita ning n mantenimiento a excepci n de la sustituci n del Tip seal para las versiones equipadas con bombas scroll o con llenado cambio de aceite para las versiones con bombas de paleta rotativa Toda intervenci n deber ser realizada por personal autorizado Antes de realizar cualquier operaci n en el sistema desconectarlo de la alimentaci n dis
108. e f ljas exakt f r att inte risk f r maskinskada ska uppst Detta visar p viktig information i texten 128 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsforhallanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet O till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift for f rsta gangen a De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet ls dao Om lagringstiden av n gon anledning r l ngre m ste pumpsystemet skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information TPS bench User Manual 87 901 009 01 B 129 322 8 Bruksanvisning F rberedelser f r installationen F rberedelser f r installationen TPS bench levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppstatt under transporten Se till att TPS bench inte tappas eller uts tts for stotar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd
109. e pumpeanl gget tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant TPS bench User Manual 87 901 009 01 B 113 322 7 Istruktionsbog Forberedelse far installation Forberedelse for installation TPS bench leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at TPS bench ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om miljgbeskyttelse Figur 1 use ple Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse 114 322 TPS bench User Manual 87 901 009 01 B Istruktionsbog 7 Normal atmosf risk p virkning kan ikke skade TPS bench Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer stgv i pumpen Modellerne der er beskrevet i denne instruktionsbog stammer fra Agilent pumpesystem serien ben vnt TPS bench Forskellene som de forskellige modelnumre indfgrer henviser til foreline pumpen der er indbygget i den specifikke model ud over sp ndingen der er kr vet for anl gget Forskellene mellem de forskellige TPS bench modeller vedrgrer derfor udelukkende systemets y
110. e to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The TPS bench is an integrated system with a turbo molecular pump for high and ultra high vacuum applications associated with its relevant controller and its primary pump The system can pump any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine driven by a high performance 3 phase electric motor The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information TPS bench User Manual 87 901 009 01 B 255 322 16 Instructions for Use General Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 256 322 TPS bench User Manual 87 901 009 01 B Instructions for Use 16 Storage In order to guarantee
111. ecifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalni sistem vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum TPS bench User Manual 87 901 009 01 B 241 322 15 Priro nik za Navodila Priprava za monta o Priprava za monta o POZOR TPS bench je dobavljen v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 Slika 1 Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito 242 322 TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 Normalna izpostavljenost na okolje ne more po kodovati TPS bench a Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom Modeli navedeni
112. em z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu TPS bench User Manual 87 901 009 01 B TPS bench User Manual 13 Navod k Pouziti Bezpe nostni n vod pro Turbomolekul rni vyv vy 206 Vseobecn informace 207 Uskladn ni 209 Priprava k instalaci 210 Instalace 212 Pou iti 214 Zapnuti a pou ivani vyv vy TPS bench Vypnuti vyvawy TPS bench 218 Nouzov zastaveni 218 Speci ln jednotky 218 dr ba 219 Likvidace 220 Preklad originalniho n vodu 215 tle Agilent Technologies 205 322 13 N vod k Pou it Bezpe nostn n vod pro Turbomolekul rn v v vy Bezpe nostn n vod pro Turbomolekul rn v v vy Turbomolekul rn v v vy jak jsou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie 33724415188 Pokyny k instalaci uveden v tomto n vodu mus b t p sn dodr ov ny za elem prevence po kozen za zen a zran n o
113. en k vakuovej komore pomocou vhodn ho hardware zna ky Agilent Podrobn inform cie sa nach dzaj v dodatku Technical Information TPS bench nemozno upevnit pomocou jej z kladnej dosky O in talacia doplnkovej vybavy pozri priru ku Technical Information TPS bench User Manual 87 901 009 01 B 229 322 14 N vod na Obsluhu Pou itie Pou itie T to as popisuje z kladn sp soby pou itia zariadenia Pred pou it m syst mu skontrolujte i boli spr vne zrealizovan v etky elektrick a pneumatick zapojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 120 C NEBEZPE E Nikdy nepou vajte erpac syst m ak vstupn priruba nie je pripojen k v kuovej komore alebo nie je zablendovan NEBEZPE E V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani Ziadneho prislu enstva Vysok teploty mo u sp sobi pop leniny NEBEZPE E Nepremiest ujte turbov vevu ak je v innosti a chr te ju pred n razmi aby nedo lo k po kodeniu lo sk o my mohlo vies k razom alebo k majetkov m kod m gt gt bl POZOR Pre vyplach vyvevy pouzivajte inertny plyn zbaveny prachu astic a vlhkosti napr dusik Tlak na ventila nom vstupe musi byt ni i nez 2 bary pretlakov 230 322 TPS bench User Manual 87 901 009 01 B N vod na Obsluhu 14 Nd ZADANIA Ak erpac syst
114. en Agilent Vertreter TPS bench User Manual 87 901 009 01 B 33 322 2 Gebrauchsanleitung Vor der Installation Vor der Installation VORSICHT Modell TPS bench wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell TPS bench ist vorsichtig auszupacken wobei es vor dem Herunterfallen und vor St fsen und Vibrationen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem f3 zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz Abbildung 1 Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den bloBen H nden angefaRt werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Modell TPS bench kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 34 322 TPS bench User Manual 87 901 009 01 B Gebrauchsanleitung 2 Die in dieser Gebrauchsanleitung angegebenen Modelle unterliegen dem Angebot der Agilent Pumpensymsteme TPS bench die durch die verschiedenen Modellnummern aufgef hrten Unterschiede beziehen sich auf die Turbomolek lpumpe und die Foreline Pumpe die im spezifischen Modell integriert ist sowie auf die im System vorhandene Spannung Die Unterschiede
115. ennyez d s b rmely form j t Az ebben a haszn lati k zik nyvben szerepl t pusok az n TPS mobil Agilent szivatty rendszer azonoss g n alapulnak a k l nb z sz m t pusok k z tti k l nbs gek a turbomolekul ris szivatty ra s az adott t pusba integr lt foreline szivatty ra valamint a rendszerhez haszn lhat fesz lts gre vonatkoznak A TPS mobil k l nb z t pusai k z tti k l nbs gek csak a rendszer teljes tm ny re vonatkozik a m k d s s a haszn lati m d azonos minden TPS t pusn l Az ismertetett inform ci k a teljes sk l ra alkalmazhat k valamennyi t pusra a turbomolekul ris szivatty foreline szivatty vagy elektromos t p specifikumokt l f ggetlen l TPS bench User Manual 87 901 009 01 B 179 322 11 Felhaszn l i K zik nyv Telep t s Telepit s FIGYELEM Ne t vol tsa el az ntapad s v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt Ne telep tse valamint ne haszn lja a szivatty z rendszert atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s Z bar a l gk ri nyom s felett h m rs klet 5 C t l 35 C ig relat v p ratartalom O 95 nem kondenz l M gneses mez k jelenl t ben a sz
116. er a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta TPS bench User Manual 87 901 009 01 B TPS bench User Manual Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 78 Informac es gerais 79 Armazenagem 81 Preparac o para a instalac o 82 Instalac o 84 Utilizac o 86 Acendimento e Utilizac o do TPS bench 87 Paragem do TPS bench 90 Paragem de Emerg ncia 90 Unidade especial 90 Manutenc o 91 Eliminac o 92 Tradu o das instru es originais em Agilent Technologies 77 322 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares Indica es de Seguran a para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rota o pode ser liberada ATEN AO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 78 322 TPS bench User Manual 87 901 009 01 B Manual de Istru es 5 Informa es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler
117. er van Agilent TPS bench User Manual 87 901 009 01 B 97 322 6 Bedrijfshandleiding Uitpakken Uitpakken De TPS bench wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de TPS bench niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 Figuur 1 viole eo Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacu m in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming 98 322 TPS bench User Manual 87 901 009 01 B Bedrijfshandleiding 6 De TPS bench kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen De in deze handleiding aangegeven modellen zijn gebaseerd op het pompsysteem platform van Agilent dat TPS bench wordt genoemd de verschillen van de diverse modelnummers hebben betrekking op de turbomoleculaire pomp en de foreline pomp die in het specifieke model is ingebouwd evenals de op het
118. eriat ten nadaje sie catkowicie do recyklingu zgodny jest z dyrektywa UE 855 399 dotyczacej ochrony srodowiska Posta 1 UWAGA Aby unikna problem w odgazowywania nale y nie dotyka gotymi rekoma cze ci przeznaczonych do pro ni Nalezy zawsze stosowa odpowiednie rekawice ochronne lub odpowiednie zabezpieczenie 194 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 System TPS bench nie moze by uszkodzony poprzez wystawienie go na dziatanie atmosfery Mimo to zaleca sie aby pompa do momentu jej instalacji na systemie pozostata zamknieta w celu unikniecia zanieczyszczenia jej pytem Modele przedstawione w niniejszej instrukcji bazuja na platformie system w pompowania Agilent o nazwie TPS bench ro ne numery modelu dotycza pompy turbomolekularnej oraz pompy foreline wbudowanej w specjalny model a tak e napiecia jakie mo na stosowa w systemie R znice pomiedzy modelami TPS bench dotycza tylko parametr w systemu natomiast dziatanie i procedury obstugi sa takie same dla wszystkich TPS bench Podane informacje maja zastosowanie dla catej platformy wszystkie modele niezale nie od tego czy jest to pompa turbomolekularna pompa foreline czy o zasilaniu elektrycznym TPS bench User Manual 87 901 009 01 B 195 322 12 Podrecznik Instrukcji Instalacja Instalacja UWAGA Usuna ta me klejaca i zdja korek zabezpieczajacy tylko w momencie potaczenia pompy
119. es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packagi
120. ferent protocol a protocol old system letter Window protocol new system These two protocols can be used as well with 232 or 485 media Please use Window protocol for new development Letter Protocol Description The default protocol is Window Communication format 8 data bit a no parity 1 stop bit a The baud rate is programmable via front panel from 600 to 9600 baud The controller is factory set for 9600 baud operation Communication protocol Host Master Turbo V 301 Controller Slave The communication is performed in the following way Host Turbo V 301 Controller TPS bench User Manual 87 901 009 01 B 293 322 17 Technical Information Letter Protocol Description Request CRC Answer CRC Figure 25 Request is an ASCII character identifying the action that must be performed by the controller or the requested information Allowed ASCII characters A z START B STOP JC z Low Speed ON D Low Speed OFF JE Reguest for operational parameters FH Pump times zeroing OG Parameters reading H Parameters writing I Request for operating status U Reguest for numerical reading K Reguest for counters reading CRC corresponds to the sum with inverted sign of all the preceding bytes e g the START command A in ASCII code 41 inverted it will be FF 1 41 BF 294 322 TPS bench User Manual 87
121. fica este manual pode ser aplicado a todas as unidades especiais marcadas com MXXXX por exemplo 969 8204M2001 90 322 TPS bench User Manual 87 901 009 01 B Manual de Istruc es 5 Manutencao O TPS compact n o reguer qualquer manuten o com excep o da substitui o do Tip seal para as vers es eguipadas com as bombas scroll ou o abastecimento troca de leo para as vers es com bombas Rotary Vane Todas as operac es devem ser efectuadas por pessoal autorizado iADVERTENCIA Antes de executar gualguer operac o no sistema deslig lo da rede de alimentac o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at gue a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servico de assist ncia Agilent Antes de reenviar ao fabricante um sistema para as repara es indispens vel preencher e enviar ao escrit rio de vendas local a ficha Seguranca e Saude anexa ao presente manual de instruc es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso uma bomba deva ser eliminada actue em conformidade com as normas nacionais espec ficas TPS bench User Manual 87 901 009 01 B 91 322 5 Manual de Istruc es Eliminac o Eliminac o 92 322 Significado do log tipo WEEE presente nos r tulos O s mbolo abaixo indicado aplicado de acordo com a directiva CE
122. formazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 20 Uso 22 Accensione ed Uso del TPS bench 23 Arresto del TPS bench 26 Arresto di Emergenza 26 Unita Speciali 27 Manutenzione 27 Smaltimento 28 Traduzione delle istruzioni originali tle Agilent Technologies 13 322 1 Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata Yd rA Per evitare danni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 14 322 TPS bench User Manual 87 901 009 01 B Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso
123. frontlemez s a rendszer kerekei Ellen rizze a rendszer elektromos egys g nek v z ra ragasztott Agilent c mk n szerepl bemeneti fesz lts get S W Tipusszam PN 4 Sorozatsz m SN Z N Elektromos adatok S EA SIN RL 2 bra 2 Ha az elektromos h l zat fesz lts ge megfelel a rendszer nek az elektromos t pk bel csatlakoztathat a rendszer h ts panelj n l v IEC320 t pus elektromos konnektorba l sd az br t A konnektor visszatart rug val van ell tva a t pk bel v letlen sz tcsatlakoz s nak megakad lyoz s ra Haszn lja a rug t a t pk bel csatol s hoz TPS bench User Manual 87 901 009 01 B 183 322 11 Felhaszn l i K zik nyv Haszn lat 184 322 KB W 4 k VING Visszatart N i E S 7 rug A T pk bel bra 3 A t pcsatlakoztat s A t pk belen kereszt l biztos tsa a megfelel fesz lts get a rendszernek a A rendszer olyan f kapcsol val h kapcsol val rendelkezik amely k pes a rendszer elemeit a t lterhel st l vagy a r vidz rlatt l meg vni A kapcsol t tegye 1 es helyzetbe ahhoz hogy m k dtetni kezdhesse a TPS bencht F kapcsol h v delemmel bra 4 A
124. funktion till olika krav och f specifika modellnummer Med undantag av s rskilda fall som ges i en specifik dokumentation g ller denna handbok f r alla speciella enheter som markerats med MXXXX t ex 969 8204M2001 TPS bench User Manual 87 901 009 01 B 137 322 8 Bruksanvisning Underhall Underh ll TPS compact r underh llsfritt f rutom bytet av Tip seal f r versioner utrustade med scroll pumpar eller p fyllning byte av olja f r versionerna med pumparna Rotary Vane Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad Innan systemet l mnas in till tillverkaren f r reparation m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med systemet Skrotning av systemet ska ske enligt g llande lagstiftning 138 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 Bortskaffning Betydelse av logotypen WEEE p etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de l
125. g 7 ii Til pumpens luftafl b anvendes inaktiv luftart der er fri for stav partikler eller fugtighed eksempelvis kv lstof Indgangstrykket gennem den s rlige bning skal v re under 2 bar over det atmosf riske tryk GEIN N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Start og anvendelse af TPS bench Efter at have udpakket TPS bench udf r en visuel kontrol for at udelukke at systemet viser tegn p skader der kan v re opst et under transporten de kritiske punkter er pumpeflangen Foreline pumpens fastsp ndingsb jler frontpanelet og anl ggets hjul Kontroller indgangsspeendingen der er angivet p Varain skiltet der sidder p stellet af systemets elektroniske enhed 7 ARN W Modelnummer PN El RA gt Seriennummer SN a E gt Elektriske specifikationer CI SV ra Figur 2 TPS bench User Manual 87 901 009 01 B 119 322 7 120 322 Istruktionsbog Anvendelse Hvis netforsyningens sp nding stemmer med anl ggets forsyning er det muligt at tilslutte forsyningsledningen til den elektriske stikdase af IEC320 type der sidder pa systemets bagpanel jf figuren Stikdasen er udstyret med en lasefjeder der har som formal at undga utilsigtede frakoblinger af forsyningsledningen fjederen bruges til at tilkoble forsyningsledningen N N
126. heiten 42 Wartung 43 TPS bench User Manual 87 901 009 01 B 5 322 Contents 6 322 Entsorgung 44 Mode d emploi 45 Normes de s curit pour Pompe Turbomol culaires 46 Indications g n rales 47 Stockage 49 Pr paration pour l installation 50 Installation 52 Utilisation 54 Unites speciales 58 Entretien 59 Mise au rebut 60 Manual de istrucciones 61 Indicaciones de Seguridad para Bombas Turbomoleculares 62 Informaci n general 63 Almacenamiento 65 Preparaci n para la instalaci n 66 Instalaci n 68 Uso 70 Unidades especiales 74 Mantenimiento 75 Eliminaci n 76 TPS bench User Manual 87 901 009 01 B Contents 5 Manualdelstruc es 77 Indicac es de Seguranca para Bombas Turbomoleculares 78 Informac es gerais 79 Armazenagem 81 Preparac o para a instalac o 82 Instalac o 84 Utilizac o 86 Unidade especial 90 Manutenc o 91 Eliminac o 92 6 Bedrijfshandleiding 93 Veiligheidsinstructies voor Turbomoleculaire pompen 94 Algemene informatie 95 Opslag 97 Uitpakken 98 Installatie 100 Gebruik 102 Speciale units 106 Onderhoud 107 Afvalverwerking 108 7 Istruktionsbog 109 Sikkerhedsanvisninger for Molekyl re turbopumper 110 TPS bench User Manual 87 901 009 01 B 7 322 Contents 8 322 Generel Information 111 Opbevaring 113 Forberedelse fgr installation 114 Installation 116 Anvendelse 118 Specielle enheder 122 Vedligeholdelse 123 Bortskaffelse 124 Bruksanvisning
127. hnical Information TPS bench m ikke festes gjennom fundamentet For installasjon av tilleggsutstyr vises det til Technical Information TPS bench User Manual 87 901 009 01 B 149 322 9 Instruksjon Manual Bruk Bruk Alle instruksjoner for korrekt bruk finnes i dette avsnittet For bruk av systemet kontroller at alle de elektriske og pneumatiske koblingene er blitt korrekt utfgrt Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 120 C WONING NIER Ikke start pumpesystemet hvis inngangsflensen ikke er koplet til vakuumkammeret eller ikke er lukket med lukkeflensen WONING GIJN Ikke beror turbopumpen eller noe av tilleggsutstyret under oppvarmingen De hoye temperaturene kan fore til brannskader DOM KAR Unng st t eller bra bevegelser av turbopumpen n r den er i bruk Lagrene kan kunne skades og det kan kunne oppst skade p personer eller gjenstander 150 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 islen Bruk fukt st v og partikkelfri inaktiv gass f eks kvelstoff ved forsyning av pumpen Trykket ved inngangen m ikke vere mindre enn 2 bar over atmosf risk trykk AVES RR N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene folges Pumpesystemet skal ikke brukes i eksplosjonsfarlige miljger Starte og bruke TPS bench a
128. i C t risti lectri CH K ELA aract ristiques lectriques S A Figure 2 TPS bench User Manual 87 901 009 01 B 55 322 3 Utilisation 56 322 Mode d emploi Sila tension de l alimentation lectrique est compatible avec celle du syst me vous pouvez brancher le c ble d alimentation dans la prise lectrique de type IEC320 situ e l arri re du syst me cf figure La prise est dot e d un ressort de maintien vitant les d branchements accidentels du c ble lectrique utiliser le ressort pour accrocher le c ble d alimentation m Ressort de ie i maintien s R a Raccordement de l alimentation Cable d alimentation Figure 3 a Alimenter la machine la tension prescrite l aide du cable d alimentation Le syst me est dot d un interrupteur principal disjoncteur thermique destin prot ger les composants lectriques contre les surcharges ou les court circuit Placez l interrupteur en position 1 pour commencer utiliser le TPS bench Interrupteur principal protection thermique Figure4 Mise en marche du systeme TPS bench User Manual 87 901 009 01 B Mode d emploi 3 La mise en marche du syst me avec l interrupteur principal alimente galement le contr leur de la turbopompe mais la pompe turbo et la pompe primaire restent l arr t La mise en marche du syst me permet au contr leur de c
129. i udarce ali premike turbo rpalke ko le ta deluje LeZaji se namre lahko po kodujejo kar lahko povzro i kodo loveku in predmetom Za prezra evanje rpalke uporabljajte ist plin brez prahu del kov ali vla nosti kot du ik Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere 246 322 TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 SVARILO Pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalnega sistema ne uporabljajte v prisotnosti eksplozivnih plinov Vklop in uporaba TPS bench a Potem ko ste TPS bench vzeli iz embala e vizualno preverite ali so na njem prisotne morebitne po kodbe ki bi nastale med prevozom kriti ni deli so prirobnica rpalke stremena za pritrditev rpalke foreline prednja plo a in kolesa sistema Preverite vhodno napetost ki je navedena na nalepki Agilent prilepljeni na ohi je elektronske enote sistema tevilka modela PN E Serijska tevilka SN Elektri ni podatki Slika 2 Ce je elektri na napetost zdru ljiva z napetostjo sistema lahko elektri ni napajalni kabel vtaknete v vti nico tipa IEC320 na zadnji plo i sistema glej sliko Vti nica ima zaporno vzmet ki prepre uje nenamerni odklop napajalnega kabla uporabite vzmet za priklop napajalnega kabla TPS bench User Manual 87 901 009 01
130. ia Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 76892
131. ial Communication kit Il 2 T Plus Storage Temperature 20 C to 70 C According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange When the TPS bench has been stored at a temperature less than 5 C wait until the TPS bench has reached the above mentioned temperature TPS bench User Manual 87 901 009 01 B 281 322 17 Technical Information TPS bench Outline TPS bench Outline The following figure shows the TPS bench outline 969 8216 amp 969 8214 amp 969 8200 969 8204 2 5 63 6 36 906 2 9 747 969 8213 amp i 969 8212 amp 969 8208 i 969 8203 30 76 8 36 90 6 3 6 90 6 as 87 7 36 906 969 8215 amp 969 8202 30 76 8 282 322 Figure 10 TPS bench User Manual 87 901 009 01 B Technical Information 17 Turbo Pumping System Connection Vaccum Inlet Flange Inlet Screen Installation Figure 11 Figure 12 The inlet screens mod 969 9300 969 9309 and 969 9302 prevent the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump TPS bench User Manual 87 901 009 01 B 283 322
132. ige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger TPS bench User Manual 87 901 009 01 B 111 322 7 Istruktionsbog Generel Information I brugsanvisningen anvendes fglgende standardrubrikker AVASIN Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udfgres preecist efter anvisningerne modsat fald er der risiko for sveere personskader ibi Denne advarselsmeddelelse vises for procedurer der skal f lges n je for ikke at risikere maskinskader Dette g r opm rksom p vigtig information i teksten 112 322 TPS bench User Manual 87 901 009 01 B Istruktionsbog 7 Opbevaring For at sikre maksimal sikkerhed og driftssikkerhed af Agilent pumpe systemerne er det ngdvendigt at overholde fglgende forskrifter S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra O til 95 2 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang a De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen diste e Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at send
133. ikapcsol s nak m sik m dja a f kapcsol haszn lata 0 helyzetbe hoz ssal A rendszer teljesen kikapcsol s nem lehet sem a nyom st leolvasni sem m s m veletet v gezni V szle ll t s V sz eset n a TPS bencht gy lehet le ll tani hogy kih zza a t pvezet ket a h l zati dug b l ami a szivatty s a vez rl kikapcsol s t fogja eredm nyezni Speci lis egys g A TPS bench alapot a k l nb z ig nyeknek megfelel en testre lehet szabni ez ltal specifikus tipusszamok nyerhet k A specifikus dokument ci val rendelkez specifikus esetek kiv tel vel ez a k zik nyv az sszes MXXXX jelz s speci lis egys gre alkalmazhat MXXXX p ld ul 969 8204M2001 186 322 TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 Karbantart s A TPS compact nem ig nyel karbantart st kiv ve a Tip seal cser j t a scrollszivatty val felszerelt v ltozatokn l vagy az olajadagol cser l cser j t a Rotary Vane szivatty s v ltozatn l A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n forduljon a Agilent szervizk zponthoz Miel tt jav t sra vissz
134. ilaisten vaatimusten perusteella saamalla aikaan erityisi mallinumeroita Lukuun ottamatta erityisell dokumentaatiolla varustettuja m r ttyj tapauksia t t k ytt ohjetta voidaan soveltaa kaikissa erityisiss yksik iss jotka on merkitty MXXXX esimerkiksi 969 8204M2001 170 322 TPS bench User Manual 87 901 009 01 B Huolto Ohjek sikirja 10 TPS compact ei vaadi lainkaan huoltoa tipseal tiivisteen vaihtamista lukuun ottamatta malleissa jotka on varustettu scroll pumpuilla tai ljyn lis yksell vaihdolla Rotary Vane pumpuilla varustetuissa malleissa Mahdolliset toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains
135. ion conform ment aux r glementations nationales concernant la gestion des d chets TPS bench User Manual 87 901 009 01 B 59 322 3 Mode d emploi Mise au rebut Mise au rebut 60 322 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en uvre le processus de collecte et mise au rebut TPS bench User Manual 87 901 009 01 B TPS bench User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 62 Informaci n general 63 Almacenamiento 65 Preparaci n para la instalaci n 66 Instalaci n 68 Uso 70 Encendido y Uso del TPS bench 71 Parada del TPS bench 74 Parada de Emergenica 74 Unidades especiales 74 Mantenimiento 75 Eliminaci n 76 Traducci n de las instrucciones originales RES Agilent Technologies 61 322 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Indicaciones de Seguridad para Bombas
136. itteen liit nt porttiin j rjestelm n takaosassa Mittauslaitteen portti b s es e Ik gt S 1 CS A s Sarjaportti Kuva 5 Mittauslaitteen liitt minen Voit k ynnist j rjestelm n Pumping nimisen valitsimen kautta Kun olet asettanut Pumping valitsimen asentoon 1 turbopumppu ja foreline pumppu k ynnistyv t Pumping valitsin Kuva 6 Pumppauksen k ynnist minen TPS bench User Manual 87 901 009 01 B 169 322 10 Ohjek sikirja Erityisyksik t TPS bench n pys ytt minen a J rjestelm voidaan sammuttaa Pumping valitsimen kautta siirtamalla se asentoon 0 ohjain j p lle ja jos mittauslaite on kytketty j rjestelm n paineenarvon lukemista voidaan jatkaa my s pumput sammutettuina a Vaihtoehtoinen tapa sammuttaa j rjestelm on k ytt p katkaisinta siirt m ll se asentoon 0 J rjestelm sammuu kokonaan eik paineiden luenta eiv tk muut toimenpiteet ole mahdollisia H t pys ytys H t tilanteessa TPS bench voidaan pys ytt kytkem ll virtajohto irti verkosta joka saa aikaa pumpun ja ohjaimen sammumisen Erityisyksik t TPS bench arkkitehtuuri voidaan yksil llist er
137. ity and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR
138. iva CEE 85 399 per la tutela dell ambiente Figura 1 Onde evitare problemi di degasamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata 18 322 TPS bench User Manual 87 901 009 01 B Istruzioni per l uso 1 Il TPS bench non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere I modelli indicati in questo manuale d istruzioni sono basati sulla piattaforma sistemi di pompaggio Agilent denominata TPS bench le differenze introdotte dai vari numeri di modello sono relative alla pompa turbomolecolare ed alla pompa di foreline integrata nello specifico modello oltre alla tensione applicabile al sistema Le differenze tra i diversi modelli del TPS bench riguardano solo le prestazioni del sistema mentre il funzionamento e le procedure d uso sono le medesime per tutti i TPS bench Le informazioni riportate sono applicabili all intera piattaforma tutti i modelli indipendentemente dalla specifica pompa turbomolecolare pompa di foreline o alimentazione elettrica TPS bench User Manual 87 901 009 01 B 19 322 1 Istruzioni per l uso Installazione Installazione Partir Staccare l adesivo e togliere il tappo di protezione solo al momento del collegament
139. ivatty z rendszert v deni kell ferrom gneses pajzs seg ts g vel A TPS bencht v zszintes s kra kell helyezni Tegye a TPS bencht stabil helyzetbe csatlakoztassa a turb szivatty bemeneti karim j t egy 50 Nm nyomat knak ellen ll ellenkarim hoz a saj t tengelye k r l k zvetlen l vagy egy flexibilis csatlakoz seg ts g vel Az ISO bemeneti karim s turb szivatty t szor t kkal kell az ellenkarim hoz csatlakoztatni Az al bbi t bl zat tartalmazza szor t t pusonk nt hogy h ny szor t sz ks ges s milyen z r nyomat kkal kell z rni 180 322 TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 Tab 1 KARIMA R GZIT ESZK Z N R GZ T NYOMAT K 150 63 M10 kapcsok 4 22 Nm ISO 100 K M10 kapcsok 4 22 Nm A ConFlat bemeneti karim s turb szivatty t a megfelel Agilent hardverrel kell r gz teni a v kuumkamr hoz R szletes le r s rt l sd Technical Information ATPS bench nem r gz thet az alapj n kereszt l Opcion lis tartoz kok telep t s hez v lassza a Technical Information TPS bench User Manual 87 901 009 01 B 181 322 11 Felhaszn l i K zik nyv Haszn lat Haszn lat Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat Miel tt a rendszert haszn lja ellen rizze hogy valamennyi elektromos s hidraulikus csatlakoz s megfelel en k sz lt A v kuumkamra meleg t se k zben a bemeneti
140. ixar cair o TPS bench e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente Figura 1 Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposic o do v cuo Utilizar sempre luvas ou outra protecc o adequada 82 322 TPS bench User Manual 87 901 009 01 B Manual de Istru es 5 TPS bench n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumulac es de p Os modelos indicados neste manual de instru es est o baseados na plataforma de sistema de bombagem Agilent denominada TPS m vel as diferen as introduzidas pelos diferentes n mero de modelo s o relativas bomba turbomolecular e bomba de foreline integrada no modelo espec fico al m da tens o aplic vel ao sistema As diferencas entre os diferentes modelos do TPS m vel dizem respeito apenas aos rendimentos do sistema enquanto que o funcionamento e o procedimento de uso s o os mesmos para todos os TPS m vel As informac es apresentadas s o aplic veis em toda a plataforma todos os modelos independentemente da bomba turbomolecular espec fica da bomba de foreline ou da alimenta o el ctrica TPS
141. jek sikirja Turbomolekyylipumppujen Turvaohjeet Turbomolekyylipumppujen Turvaohjeet T ss k ytt ohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergia saattaa vapautua VAROITUS T ss k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 158 322 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi TPS bench User Manual 87 901 009 01 B Ohjek sikirja 10 Yleisi tietoja T m laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k ytt ohjeiden t ydellisest tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st TPS bench on kokonaisj rjestelm joka muodostuu valvojalla ja p pumpulla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pu
142. ji z wyjatkiem wymiany Tip seal dla wersji wyposazonej w pompy scroll lub uzupe nienia wymiany oleju w przypadku wersji z pompami Rotary Vane Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGROZENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nalezy odtaczy go od zasilania otworzy odpowiedni zawor dla wlotu powietrza odczeka az do catkowitego zatrzymania wirnika i odczeka az temperatura powierzchni pompy bedzie wynosita ponizej 50 C W przypadku uszkodzenia mozliwe jest skorzystanie z serwisu naprawczego firmy Agilent Przed wysytka do konstruktora systemu do naprawy nalezy obowiazkowo wypetni i przekaza do miejscowego biura sprzedazy karte Bezpiecze stwo i Zdrowie zataczona do niniejszej instrukcji Jeden egzemplarz kopia karty musi by wto ony do opakowania systemu przed jego wysytka Jezeli system musi by poddany rozbi rce nalezy przystapi do jego eliminacji zgodnie z obowiazujacymi krajowymi normami w meritum sprawy TPS bench User Manual 87 901 009 01 B 203 322 12 Podrecznik Instrukcji Przetworstwo odpadow Przetworstwo odpadow 204 322 Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad raz
143. jkomen ANUS N A Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 94 322 TPS bench User Manual 87 901 009 01 B Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De TPS bench is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen en een primaire pomp bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine die aangedreven wordt door een elektrische draaistroommotor met hoog rendement In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical Information TPS bench User Manua
144. kter by v p pad nedodr en mohly zp sobit v n raz POZOR Pozor hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen Pozn mky obsahuj d le it informace p evzat z textu 208 322 TPS bench User Manual 87 901 009 01 B N vod k Pou it 13 Uskladn n Pro zaru en maxim ln rovn funk nosti a spolehlivosti v v vov ch syst m Agilent je t eba respektovat n sleduj c p edpisy Pri p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C a Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn vyv vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln a skladovatelnost turbomolekul rni vyv vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty erpac syst m mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent TPS bench User Manual 87 901 009 01 B 209 322 13 N vod k Pou it P prava k instalaci P prava k instalaci POZOR 210 322 V v va Mini Task se dod v ve speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn pro
145. l 87 901 009 01 B 95 322 6 Bedrijfshandleiding Algemene informatie Deze handleiding maakt van de volgende symbolen gebruik NAVE HI Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht 96 322 TPS bench User Manual 87 901 009 01 B Opslag VOORZICHTIG Bedrijfshandleiding 6 Om een zo goed mogelijke werking en betrouwbaarheid van de pompsystemen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van O tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum Indien om een willekeurige reden de opslagtijd langer is moet het pompsysteem weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordig
146. l repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austr
147. l uso 1 immagazzinamento Per garantire il massimo livello di funzionalit ed affidabilit dei sistemi di pompaggio Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante a jl cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta a il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione agaia ra Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre rinviare il sistema di pompaggio in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent TPS bench User Manual 87 901 009 01 B 17 322 1 Istruzioni per l uso Preparazione per l installazione Preparazione per l installazione ATTENZIONE II TPS bench viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il TPS bench e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla dirett
148. lares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente En caso de superarse por cualquier motivo el periodo m ximo permitido de almacenamiento ser necesario devolver el sistema de bombeo al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent TPS bench User Manual 87 901 009 01 B 65 322 4 Manual de istrucciones Preparaci n para la instalaci n Preparaci n para la instalaci n El TPS bench se suministra en un embalaje especial de protecci n si se observan dafios que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el TPS bench y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con lo dispuesto por la directiva CEE 85 399 para la preservaci n del medio ambiente Figura 1 ATENCI N Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada 66 322 TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 El TPS bench no puede da arse permane
149. lector denominado Pumping Ap s ter colocado o selector Pumping na posi o 1 a bomba turbo e a bomba de foreline s o activadas Selector Pumping Figura 6 Arranque da bombagem TPS bench User Manual 87 901 009 01 B 89 322 5 Manual de Istruc es Unidade especial Paragem do TPS bench poss vel desligar o sistema por meio do selector Pumping deslocando o para a posic o 0 o controller permanecera aceso e se um medidor estiver conectado ao sistema sera possivel continuar a leitura da press o mesmo com a bomba desligada Um modo alternativo de desligar o sistema usar o interruptor Principal deslocando o para a posi o 0 O sistema se desligar completamente e n o sera possivel nem leituras de press o nem outras opera es Paragem de Emergencia Para parar em condic es de emerg ncia o TPS m vel poss vel desconectar o cabo de alimentacao da tomada de rede isto provocara o desligamento da bomba e do controller Unidade especial A plataforma TPS m vel pode ser personalizada em fun o das diferentes exig ncias obtendo n meros espec ficos de modelo Com excepc o de casos espec ficos fornecidos de documentac o espec
150. len bruker fglgende standardprotokoll nu O18 Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader isla Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan fore til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten 144 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 Lagring For garantere maksimalt niv for funksjonalitet og driftssikkerhet til pumpesystemet Agilent m en fglge forskriftene nedenfor Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra O til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato FORSIKTIG Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpesystemet returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon TPS bench User Manual 87 901 009 01 B 145 322 9 Instruksjon Manual Klargjgre til installasjon Klargjore til installasjon TPS bench leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontak
151. mppaamiseen Pumppaus saadaan aikaan korkealla nopeudella py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen s hk moottori Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information TPS bench User Manual 87 901 009 01 B 159 322 10 Ohjek sikirja Yleisi tietoja T m k sikirja k ytt seuraavanlaisia merkint j VANNES Varoitus merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen Huomautukset sis lt v t t rke tekstiss k sitelty tietoa 160 322 TPS bench User Manual 87 901 009 01 B Ohjek sikirja 10 Varastointi Noudata seuraavassa annettuja ohjeita Agilent pumppausj rjestelmien parhaan ja luotettavan toiminnan takaamiseksi Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt a l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun var
152. n It is possible to start pumping by means of the selector named Pumping As soon as the Pumping selector is moved to the position 1 the TMP and Foreline pump will be switched on Figure 6 264 322 Pumping selector Start pumping TPS bench User Manual 87 901 009 01 B Instructions for Use 16 TPS Bench Switching off You can switch the pumps off by using the pumping selector moving it to position 0 the TMP controller will remain ON and if a gauge is connected to the system it will be possible to continue reading the pressure even if pumps are off a An alternative mode for switching the pumps off is the use of Main Switch move it to position 0 The system will be completely switched off and no reading or operation will be possible Emergency Stop If an emergency situation occurs is possible to switch the pumps and the controller off even disconnecting the mains cable emergency stop Modified Standard TPS bench platform is suited to be tailored in according to many different needs so special TPS bench PNs can be released Except some specific cases provided with a specific documentation this User Manual is applicable to all speci
153. n den Gegenflansch geschlossen werden Die folgende Tabelle beschreibt f r jede Klemmenart die Anzahl der notwendigen Klemmen und mit welchem Anzugsmoment sie angezogen werden m ssen TPS bench User Manual 87 901 009 01 B Gebrauchsanleitung 2 Tab 1 FLANSCH KLEMMSCHELLE ANZ ANZUGSMOMENT 150 63 Doppelschelle mit Gewinde M10 4 22 Nm ISO 100 K Doppelschelle mit Gewinde M10 4 22 Nm Turbopumpen mit ConFlat Eingangsflansch sind mit dem speziellen Agilent Befestigungsmaterial an die Vakuum kammer anzuschliefen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TPS bench kann nicht mittels seines Sockels befestigt werden F r die Installation der Optionsteile siehe im Anhang Technical Information TPS bench User Manual 87 901 009 01 B 37 322 2 Gebrauchsanleitung Gebrauch Gebrauch In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Bevor das System ben tzt wird pr fen ob alle Strom und Pneumatikanschl sse korrekt ausgef hrt wurden W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 120 C nicht berschreiten Das Pumpensystem darf nicht in Betrieb genommen werden wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlu flansch verschlossen ist W hrend des Aufheizens d rfen weder die Pumpe noch eventuelle heiBe Zubeh rteile ber hrt werden Es besteht Verb
154. n has been failed Unknown 1 byte 0x32 the specified window in the command is Window not a valid window Data Type Error 1 byte 0x33 the data type specified in the command Logic Numeric or Alphanumeric is not accorded with the specified Window Out of Range 1 byte 0x34 the value expressed during a write command is out of the range value of the specified window TPS bench User Manual 87 901 009 01 B 301 322 17 Technical Information Letter Protocol Description Response Type Response Response Description Length Value Win Disabled 1 byte 0x35 the specified window is Read Only or temporarily disabled for example you can t write the Soft Start when the Pump is running Examples Command START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 302 322 TPS bench User Manual 87 901 009 01 B Command SOFT START ON Source PC Destination Controller Technical Information 17
155. nder som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor TPS bench User Manual 87 901 009 01 B 139 322 8 Bruksanvisning Bortskaffning 140 322 TPS bench User Manual 87 901 009 01 B 3E Agilent Technologies TPS bench User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Generell informasjon 143 Lagring 145 Klargj re til installasjon 146 Installasjon 148 Bruk 150 Starte og bruke TPS bench 151 Stoppe TPS bench 154 N dstopp 154 Spesialenheter 154 Vedlikehold 155 Kassering 156 Oversetting av den opprinnelige samsvarserkl ringen 142 141 322 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Sikkerhetsanvisninger for Turbomolekyl re pumper Turbomolekyl rpumpene som er beskrevet i den fglgende Bruksanvisningen har et hgyt kinetisk energiniv som skyldes den hgye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil
156. nes ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C a humedad relativa 0 95 no condensadora Cuando existan campos electromagn ticos el sistema de bombeo ha de protegerse mediante pantallas adecuadas El TPS bench puede ser instalado en cualquier posici n El TPS m vil se debe colocar sobre una superficie plana Colocar el TPS m vil en una posici n estable uniendo la brida de entrada de la turbobomba a una contrabrida capaz de resistir a un par de 50 Nm alrededor de su eje directamente o mediante un racor flexible La turbobomba con brida de entrada ISO debe estar unida a la contrabrida mediante tornillos La siguiente tabla describe para cada tipo de brida la cantidad de tornillos necesarios y el par de apriete para ajustarlos TPS bench User Manual 87 901 009 01 B Manual de istrucciones 4 Tab 1 BRIDA TIPO DE MORDAZA N PAR DE APRIETE 150 63 Mordaza doble con rosca M10 4 22 Nm ISO 100 K Mordaza doble con rosca M10 4 22 Nm La turbobomba con brida de entrada ConFlat ha de fijarse a la c mara de vacio mediante los accesorios mec nicos especificos Agilent Para m s detalles v ase el anexo Technical Information El TPS bench no puede fijarse utilizando su base Para instalar los accesorios opcionales v ase Technical Information TPS bench User Manual 87 901 009 01 B 69 322 4 Manual de istrucciones
157. ng or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 v Agilent Technologies Vacuum Products Division Reguest for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Referenc
158. nsbog 7 Tab 1 FLANGE KLEMMETYPE ANT DREJNINGS MOMENT ISO 63 Dobbelt klemme med M10 gevind 4 22 Nm ISO 100K Dobbelt klemme med M10 gevind 4 22 Nm Turbopumpen med ConFlat indl bsflange skal tilsluttes p vakuumkammeret ved hjeelp af Agilent monteringsudstyret I bilaget Technical Information findes yderligere detaljer TPS bench kan ikke fastggres i fundamentet Der henvises til bilaget Technical Information for oplysninger vedrgrende installation af ekstraudstyret TPS bench User Manual 87 901 009 01 B 117 322 7 Istruktionsbog Anvendelse Anvendelse Dette afsnit beskriver de vigtigste driftsprocedurer Fer systemet tages i brug kontroller at alle elektriske og pneumatiske tilslutninger er korrekt udfgrt I forbindelse med opvarmning af vakuumkammeret ma indlobsflangens temperatur ikke overstige 120 C ADVARSEL Pumpen m aldrig aktiveres hvis indlobsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hjeelp af lukkeflangen ADVARSEL Ror aldrig turbopumpen eller dens tilbehor i forbindelse med opvarmningsprocedurerne Den hoje temperatur kan resultere i skade p personer ADVARSEL Undg st d eller pludselige bev gelser af turbopumpen mens den er aktiveret Der er risiko for beskadigelse af lejerne og det kan medfore skader p personer eller ting 118 322 TPS bench User Manual 87 901 009 01 B Istruktionsbo
159. ntaining all the electrical equipments useful to manage the vacuum components integrated in the TPS bench The rear panel of the Electrical Box is equipped with a Main socket IEC 320 electrical socket for pumping system power cable connection except the model 969 8433 equipped with an integrated power cable a Gauge Port Fireware connector for active gauge FRG 700 connection see Chapter Gauge Connector 3 Foreline Pumps Description TPS bench can be equipped both with a dry pump scroll type or with an oil sealed Rotary Vane Pump TPS bench versions equipped with a scroll pump are free of contaminating agents and therefore are suitable for applications requiring clean vacuum TPS bench versions equipped with scroll pumps are 969 8202 969 8203 969 8212 and 969 8215 The scroll pump principle of operation is described here following Scroll pump creates vacuum using a simple dual scroll mechanism in which one of the nested scrolls orbits about the other creating moving zones of captured gas Gas enters the scroll set at the perimeter and is displaced and compressed toward the center hub where it is exhausted TPS bench User Manual 87 901 009 01 B 275 322 17 276 322 Technical Information Description of the TPS bench Gas enters scroll set Gas is displaced and compressed toward Gas exhausted center hub at center hub Figure 8 TPS bench versions equipped with RVPs ar
160. o della turbopompa al sistema Non installare e o utilizzare il sistema di pompaggio in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C umidit relativa 0 95 non condensante In presenza di campi elettromagnetici il sistema di pompaggio deve essere protetto tramite opportuni schermi Il TPS bench deve essere posizionato su una superficie piana Porre il TPS bench in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia capace di resistere ad una coppia di 50 Nm attorno al proprio asse direttamente o per mezzo di un raccordo flessibile La turbopompa con flangia di ingresso ISO deve essere collegata alla controflangia per mezzo di morsetti La seguente tabella descrive per ogni tipo di morsetto il numero di morsetti necessari e con quale coppia di serraggio stringerli 20 322 TPS bench User Manual 87 901 009 01 B Istruzioni per l uso 1 Tab 1 COPPIA DI FLANGIA TIPO DI MORSETTO N SERRAGGIO 22 Nm La turbopompa con flangia di ingresso ConFlat deve essere fissata alla camera da vuoto per mezzo dell apposita minuteria meccanica Agilent Per ulteriori dettagli vedere l appendice Technic
161. o per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita TPS bench User Manual 87 901 009 01 B TPS bench User Manual Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen 30 Allgemeine Informationen 31 Lagerung 33 Vor der Installation 34 Installation 36 Gebrauch 38 Einschaltung und Gebrauch von Modell TPS bench 39 Stoppen des TPS bench42 Not Aus 42 Spezialeinheiten 42 Wartung 43 Entsorgung 44 bersetzung der Originalanleitungen ES Agilent Technologies 29 322 2 Gebrauchsanleitung Sicherheitshinweise f r Turbomolekularpumpen Sicherheitshinweise f r Turbomolekularpumpen 30 322 Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine grof e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden Um Sch den am Ger t zu
162. o wa ne informacje wyciagniete z tekstu 192 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 Magazynowanie By zagwarantowa maksymalny poziom funkcjonalno ci i dziatania system w pompujacych Agilent powinny by przestrzegane nastepujace zasady podczas transportu przesuniecia i magazynowania pomp nie moga by przekroczone nastepujace warunki srodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w sposob Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesiecy od daty wysytki Je eli z jakiegokolwiek powodu czas magazynowania jest dtu szy nale y odesta zespot pompujacy do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa sie z miejscowym przedstawicielem firmy Agilent TPS bench User Manual 87 901 009 01 B 193 322 12 Podrecznik Instrukcji Przygotowanie do instalacji Przygotowanie do instalacji System TPS bench jest dostarczany w specjanym ochronnym opakowaniu w przypadku sladow uszkodzen do kt rych mogtoby doj podczas transportu nalezy skontaktowa sie z miejscowym biurem sprzedazy Podczas operacji rozpakowywania nalezy zwr ci szczeg lna uwage aby nie spowodowa upadku systemu TPS bench ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Mat
163. ode d emploi Indications g n rales Cette notice utilise les signes conventionnels suivants Maui Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale qui effectu e de fa on impropre risque de provoquer de graves l sions unfall Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage Les notes contiennent des renseignements importants extrapol s du texte 48 322 TPS bench User Manual 87 901 009 01 B Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des syst mes de pompage Agilent il est indispensable de respecter les instructions suivantes Letransport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition f r in En cas de d passement du temps de stockage le syst me de pompage doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone TPS bench User Manual 87 901 009 01 B 49 322 3 Mode d emploi P
164. og 7 Vedligeholdelse TPS compact behover ikke nogen vedligeholdelse med undtagelse af Tip seal pakningen for de versioner der er udstyret med scroll pumper eller med p fyldning udskiftning af olie til de versioner med Rotary Vane pumper Ethvert indgreb skal foretages af autoriseret personale AVON SRR Inden der foretages noget som helst indgreb p systemet skal str mmen forst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilfaelde af skader p systemet kontaktes et Agilent reparationsveerksted Inden systemet sendes til reparationsv rkstedet skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love TPS bench User Manual 87 901 009 01 B 123 322 7 Istruktionsbog Bortskaffelse Bortskaffelse 124 322 Betydningen af WEEE logoet p markaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun geeldende for EU landene viser at produktet som det sidder p IKKE ma bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opf
165. ommencer lire la valeur de pression du manom tre Full Range Gauge FRG 700 optionnel si ce dernier est reli au port de raccordement situ l arri re du syst me 2 Port manom tre 4 all Jej Port s rie Figure5 Branchement du manometre Il est alors possible de d marrer le syst me l aide du s lecteur d nomm Pumping en position 1 La pompe turbo et la pompe primaire d marrent S lecteur Pumping Figure 6 Demarrage du pompage TPS bench User Manual 87 901 009 01 B 57 322 3 Mode d emploi Unites speciales Arr t du TPS bench a Pour arr ter le pompage placez le s lecteur Pumping en position 0 Le contr leur reste sous tension et si un manom tre a t reli au syst me il est possible de lire la valeur de pression m me lorsque les pompes sont l arr t a Une autre mani re d arr ter le pompage consiste placer l interrupteur principal sur la position 0 Le syst me s arr te compl tement et il n est plus possible ni de lire la pression ni d effectuer une autre op ration Arr t d urgence Pour arr ter le TPS bench en cas d urgence il est possible de d brancher le c ble d alimentation de la prise le
166. or is supported by permanently lu bricated high precision ceramic ball bearings in stalled on the forevacuum side of the pump The static blades of the stator are fabricated in stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are fabricated in aluminum alloy During normal operation the motor functions with a power feed at 54 Vac three phase at 1330 Hz TV81M 963 Hz TV301 or 700 Hz TV551 To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a resid ual vibration amplitude less than 0 01 um TPS bench User Manual 87 901 009 01 B 273 322 17 Technical Information Description of the TPS bench 2 Front Panel The TPS bench front Panel is the system user interface where all controller elements are located In particular it contains a Main Switch It is a protection thermal switch able to provide electrical power to the system protecting all the devices integrated in the system against overcurrents or shortcircuits The nominal current of the switch is fitted in according to the system configuration see configuration
167. ordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten TPS bench User Manual 87 901 009 01 B TPS bench User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar 126 Allm n Information 127 F rvaring 129 F rberedelser f r installationen 130 Installation 132 Anv nding 133 Start och anv ndning av TPS bench 134 Att st nga av TPS bench 137 N dstopp 137 Speciella enheter 137 Underhall 138 Bortskaffning 139 vers ttning av originalinstruktionerna Kai Agilent Technologies 125 322 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 126 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 Allm n
168. ornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uj na d le it inform cie z textu 224 322 TPS bench User Manual 87 901 009 01 B N vod na Obsluhu 14 Uchovavanie Aby sa zaistila maximalna funk nost a spol ahlivost erpac ch s stav Agilent je potrebn dodr iava nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy postupova pomaly a postupne a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hokolvek d vodu vypr as skladovatelnosti zariadenia vr te erpac syst m do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis TPS bench User Manual 87 901 009 01 B 225 322 14 Navod na Obsluhu Priprava na in talaciu Priprava na in talaciu Zariadenie TPS bench je dodan v peci lnom ochrannom obale Ak je balenie po koden o sa mo e sta napr klad po as prepravy obratte sa na zastupenie spolo nosti Agilent Po a
169. ot addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Ze d LT Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS TEL N FAX N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc DATE CORRECTIVE ACTION PLAN ACTUATION LOG N by AGILENT VPD XXX Code for dialing Italy from your country
170. p worden gehaald waardoor de pomp en de controller worden uitgeschakeld Speciale units Het TPS bench platform kan op verschillende behoeften worden aangepast waardoor specifieke modelnummers worden verkregen Met uitzondering van specifieke gevallen voorzien van specifieke documentatie is deze handleiding van toepassing op alle speciale units aangeduid met MXXXX bijvoorbeeld 969 8204M2001 106 322 TPS bench User Manual 87 901 009 01 B Bedrijfshandleiding 6 Onderhoud De TPS bench is onderhoudsvrij behalve de vervanging van de Tip seal bij de uitvoeringen met scroll pompen of het olie bijvullen verversen bij de uitvoeringen met Rotary Vane pompen Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk TPS bench User Manu
171. poner la bomba en presi n atmosf rica abriendo la v lvula respectiva y esperar hasta que el rotor se pare completamente y que la temperatura superficial de la bomba se reduzca a menos de 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent Antes de enviar al fabricante un sistema para su reparaci n es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se deber introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales espec ficas TPS bench User Manual 87 901 009 01 B 75 322 4 Manual de istrucciones Eliminaci n Eliminaci n 76 322 Significado del logotipo WEEE presente en las etiquetas El s mbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este s mbolo v lido s lo para los pa ses miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder prove
172. r paration pour l installation Pr paration pour l installation ATTENTION Le TPS bench est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le TPS bench et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Figure 1 Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e 50 322 TPS bench User Manual 87 901 009 01 B Mode d emploi 3 Le TPS bench ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation Les mod les d crits dans ce manuel d instructions sont bas s sur la plateforme des syst mes de pompage Varan d nomm e TPS bench les diff rences entre les diff rents mod les concernent la pompe turbomol culaire et la pompe primaire int gr e dans le mod le ainsi que la tension lectrique du syst me Les
173. rennungsgefahr Die Turbopumpe darf w hrend des Betriebes keinen St en oder ruckartigen Bewegungen ausgesetzt werden Die Lager k nnten besch digt werden und Personen oder Gegenst nden Schaden zugef gt werden 38 322 TPS bench User Manual 87 901 009 01 B Gebrauchsanleitung 2 Wotte pe F r die Bel ftung der Pumpe staub partikel und feuchtigkeitsfreies Inertgas z B Stickstoff verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen WARNUNG Wenn das Pumpensystem zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die f r das jeweilige Gas vorgeschriebenen Vorg nge und Ma nahmen zu befolgen Das Pumpensystem darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Einschaltung und Gebrauch von Modell TPS bench a Nachdem das TPS bench ausgepackt wurde mit dem Auge pr fen ob das System Besch digungen aufgrund des Transports aufweist die kritischen Teile sind Pumpenflansch Befestigungsb gel der Foreline Pumpe vorderes Abdeckung und die R der des Systems Die Eingangsspannung auf der Etikette Agilent am Geh use der Elektronik des Systems pr fen CU s Modellnummer PN O p Seriennummer SN TN gt Elektrische Daten z PIIN s Abbildung 2 TPS bench User Manual 87 901 009 01 B 39 322 2 40 322 Gebrauchsanleitung
174. s tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina biztos tja A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben TPS bench User Manual 87 901 009 01 B 175 322 11 Felhaszn l i K zik nyv ltal nos inform ci Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja VESZ LY A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet dia lada A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak 176 322 TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 T rol s A Agilent szivatty rendszerek maxim lis m k d si szintj nek s megb zhat s g nak biztos t s hoz tartsa be a k vetkez el r sokat szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relativ p ratartalom O 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l
175. s vybalovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven narazu alebo prudk mu otrasu alebo vibraciam Obalovy material zlikvidujte predpisanym sposobom Material je 100 recyklovateln a spl a po iadavky smernice EEC 85 399 Postava 1 POZOR Ak chcete predist problemom s odply ovanim nechytajte komponenty ktor bud vystaven vakuu holymi rukami V dy pou ivajte rukavice alebo inu vhodn ochranu 226 322 TPS bench User Manual 87 901 009 01 B N vod na Obsluhu 14 Be n vystavenie okolit m podmienkam nem e TPS bench po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii kontamin cie prachom Modely uveden v tomto n vode vych dzaj z platformy erpac ch syst mov Agilent nazvanej TPS bench pri om rozdiely zaveden r znymi slami modelov sa vz ahuj na turbomolekul rnu v vevu a na v vevu foreline integrovan v pecifickom modeli a na nap tie aplikovate n na syst m Rozdiely medzi r znymi modelmi TPS bench sa vz ahuj len na v konnos syst mu zatia o innos a postupy pre pou itie s rovnak pre v etky TPS bench Uveden inform cie s aplikovate n na cel platformu v etky modely nez visle od technick ch dajov turbomolekul rnej v vevy v vevy foreline alebo elektrick ho nap jania TPS bench User Manual 87 901 009 01 B 227 322 14 N vod na Obsluhu
176. sa av trycket genom Full Range Gauge FRG 700 tillval om m taren r kopplad till uttaget f r m tare som sitter bak p systemet M tarens port Serieport Figur 5 Anslutning av m taren Det g r att starta systemet med v ljaren som kallas Pumping Efter att v ljaren Pumping st llts p l get 1 starta turbopumpen och Foreline pumpen V ljaren Pumping Figur 6 Start av pumpningen 136 322 TPS bench User Manual 87 901 009 01 B Bruksanvisning 8 Att st nga av TPS bench a Det g r att sl cka systemet med v ljaren Pumping genom att flytta den till l get 0 Kontrollenheten f rblir t nd och om mataren r kopplad till systemet g r det att forts tta avlasningen av trycket ven med sl ckta pumpar a Ett alternativt s tt att sl cka systemet r att anv nda huvudstr mbrytaren genom att st lla den p l get 0 Systemet sl cks helt och det g r inte att l sa av trycket eller utf ra andra operationer N dstopp F r ett n dstopp av TPS bench g r det att koppla fr n elkabeln fr n str muttaget vilket medf r att pumpen och kontrollenheten sl cks Speciella enheter Plattformen TPS bench kan anpassas i
177. sing Agilent hardware TPS bench User Manual 87 901 009 01 B 285 322 17 Technical Information Turbo Pumping System Connection To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Attach the units and tighten each one in turn Repeat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock 286 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 High Vaccum Flange Connection Configurations m T SE Rama a j gi CFF 4 1 2 BASEPLATE z x WITH TAPPED HOLES lt o n a 5 CFF 4 1 2 J l Figure 16 Figure 17 TPS bench User Manual 87 901 009 01 B 287 322
178. spezifische Dokumentation genannten Fallen ist dieses Handbuch f r alle speziellen Einheiten geeignet die mit MXXXX gekennzeichnet sind zum Beispiel 969 8420M2001 42 322 TPS bench User Manual 87 901 009 01 B Wartung Gebrauchsanleitung 2 TPS bench ist wartungsfrei auf er der Austausch des Tip seal bei den Ausf hrungen mit Scroll Pumpen oder l auff llen Wechsel f r die Ausf hrungen mit Rotary Vane Pumpen Eventuelle Eingriffe d rfen nur durch autorisiertes Fachpersonal ausgef hrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe ber ffnung des entsprechenden Ventils bel ften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service Bevor Fa Agilent ein System zur Reparatur das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der einschl gigen nationalen Vorschriften zu erfolgen TPS bench User Manual 87 901 009 01 B 43 322 2 Gebrauchsanleitung Entsorgung Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende
179. systeem toegepaste spanning De verschillen tussen de TPS bench modellen hebben alleen betrekking op de prestaties van het systeem terwijl de werking en de gebruiksprocedures voor alle TPS bench modellen hetzelfde zijn De vermelde informatie is van toepassing op het hele platform alle modellen onafhankelijk van de specifieke turbomoleculaire pomp foreline pomp of elektrische voeding TPS bench User Manual 87 901 009 01 B 99 322 6 Bedrijfshandleiding Installatie Installatie hp Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden Het pompsysteem mag niet ge nstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn a max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C a relatieve vochtigheid 0 95 niet condenserend In aanwezigheid van magnetische velden moet het pompsysteem op passende wijze afgeschermd worden De TPS bench moet op een vlakke ondergrond geplaatst zijn Bevestig de TPS bench in een stabiele positie en monteer de inlaatflens van de turbopomp op een contraflens die tegen een koppel van 50 Nm rond de eigen as bestand is direct of door middel van een flexibele aansluiting
180. t is K Counters readings the Answer will contain a string of 11 characters with the following parameters Tab 15 BYTES MEANING 1 4 Cycle time On request a sample program in QBasic language is available by Agilent Window Protocol Description Communication Format 8 data bit a no parity a 1 stop bit a baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER a Controller SLAVE The communication is performed in the following way TPS bench User Manual 87 901 009 01 B 299 322 17 Technical Information Letter Protocol Description 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt Where When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character a lt STX gt Start of transmission 0x02 a lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph COM Command 0x30 to read the window 0x81
181. t med det lokale salgskontoret N r TPS bench pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse Figur 1 SST ein Fora unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr 146 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 Normale miljgmessige belastninger kan ikke gdelegge TPS bench Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedstgving Modellene som angis i denne bruksanvisningen baserer seg p plattformen av pumpesystemer fra Agilent kalt TPS bench Forskjellene som inntroduseres av de forskjellige modellnumrene gjelder for den turbomolekyl re pumpen og for den innebygde foreline pumpen i den spesifikke modellen foruten spenningen som kan benyttes i systemet Forskjellene mellom de forskjellige modellene i TPS bench gjelder bare systemets ytelser mens driften og fremgangsm tene ved bruk forblir de samme for alle TPS bench Opplysningene som gis gjelder hele plattformen alle modeller uavhengig av den spesifikke turbomolekyleere pumpen foreline pumpen eller strgmtilfgrselen TPS bench User Manual 87 901 009
182. t nevy aduje Ziadnu udr bu svynimkou vymeny Tip seal pri izvedbah s spiralnimi rpalkami ali dolivanja zamenjave olja pri izvedbah z rotacijskimi rpalkami Vane Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru napake kontaktirajte va lokalni Agilent servisni center Preden vrnete sistem v popravilo morate izpolniti in dodati Health and Safety obrazec ki je prilo en tem navodilom ter ga poslati v lokalno prodajno pisarno Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi TPS bench User Manual 87 901 009 01 B 251 322 15 Priro nik za Navodila Odlaganje opadkov Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov ele nato ko se je seznanil s pogoji in
183. t returneres til produsenten for reparasjon m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser TPS bench User Manual 87 901 009 01 B 155 322 9 Instruksjon Manual Kassering Kassering Betydningen av symbolet p logo WEEE p etikettene Symbolet som vises nedenunder er anvendt i henhold til EC direktivet kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det st r p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverandgren av anordningen som kan veere et firma eller en forhandler som sgrger for oppsamling og kassering etter ha kontrollert avtaler og betingelser i kjopekontrakten 156 322 TPS bench User Manual 87 901 009 01 B TPS bench User Manual 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet 158 Yleisi tietoja 159 Varastointi 161 Valmistelut asennusta varten 162 Asennus 164 Kaytt 166 TPS bench n k ynnistys ja k ytt 167 TPS bench n pys ytt minen170 H t pys ytys 170 Erityisyksik t 170 Huolto 171 H vitt minen 172 Alkuper isen ohjeiden k nn s RES Agilent Technologies 157 322 10 Oh
184. t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku 220 322 TPS bench User Manual 87 901 009 01 B TPS bench User Manual 14 Navod na Obsluhu Bezpe nostn n vod pre Turbomolekularne vyvevy V eobecn inform cie 223 Uchov vanie 225 Priprava na in tal ciu 226 In tal cia 228 Pou itie 230 Zapnutie a pou itie zariadenia TPS bench 231 Vypnutie TPS bench 234 N dzov zastavenie 234 peci lne jednotky 234 dr ba 235 Likvid cia 236 Preklad origin lneho n vodu 222 RES Agilent Technologies 221 322 14 Navod na Obsluhu Bezpe nostn n vod pre Turbomolekul rne vyvevy Bezpe nostne navod pre Turbomolekularne vyvevy Turbomolekularne vyvevy ak s nasledovne popisovan obsahuj velk mno stvo kinetickej energie vd aka vysokej ota avej rychlosti v kombinacii s konkretnym objemom ich rotorov V pripade syst movej poruchy napr pri kontaktu rotora statora alebo pri zrucaniu rotora sa mo e uvolnit rota na energia 3372115088 Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 222 322 TPS bench User Manual 87 901 009 01 B N vod na Obsl
185. ther appropriate protection 258 322 TPS bench User Manual 87 901 009 01 B Instructions for Use 16 Normal exposure to the environment cannot damage the TPS bench Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust The models reported on this User Manual are based on the Agilent pumping system platform named TPS bench differences introduced by different PNs are related to TMP and Forepump integrated in the specific system and to the main voltage applicable to the system The differences between the different TPS bench PNs affect just systems performance operation and using procedure is the same for every TPS bench The information reported is applicable to the entire platform all PNs apart from specific TMP Forepump or main voltage TPS bench User Manual 87 901 009 01 B 259 322 16 Instructions for Use Installation Installation CAUTION Do not remove the adhesive and protective cap before connecting the turbopump to the system Do not install or use the pumping system in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure a temperature from 5 C to 35 C a relative humidity 0 95 non
186. tigt Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 120 C VARNING S tt aldrig ig ng pumpsystemet om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador VARNING Undvik st tar eller pl tsliga r relser av pumpen under drift Lagren skulle kunna f rst ras och skador p personer eller p f rem l kan intr ffa TPS bench User Manual 87 901 009 01 B 133 322 8 Bruksanvisning Anv nding OBSERVER Anv nd delgas fri fr n damm partiklar och fukt t ex kv ve f r luftning av pumpen Trycket vid inloppet f r vara h gst 2 bar ver atmosf riskt tryck VARNING D pumpen anv nds f r pumpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpsystemet i n rheten av explosiva gaser Start och anv ndning av TPS bench a Efter att ha packat upp TPS modellen se till att det inte uppst tt skador p systemet under transporten kritiska delar r pumpens fl ns Foreline pumpens f stkonsoler frampanel och hjul genom att g ra en synkontroll Kontrollera insp nningen p Agilents etikett som sitter p den elektroniska enhets ram Modelnummer PN Seriennummer SN Ie Eldata
187. tor kinetisk energi der skyldes den hgje omdrejningshastighed kombineret med deres rotorers specifikke veegt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes WONING KIN For at undg materielle skader samt at operatorerne kommer til skade er det strengt nodvendigt neje at overholde installeringsvejledningen i denne brugsanvisning 110 322 TPS bench User Manual 87 901 009 01 B Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren bgr l se denne brugsanvisning og anden yderligere information fra Agilent for udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som felge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler TPS bench systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed og hovedpumpe Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine Turbinen drives af en elektrisk trefasemotor med h j effekt De f lgende afsnit indeholder oplysningerne der er n dvend
188. tveszi s el sz r zemelteti Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz ll t s d tum t l FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty z rendszert vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez TPS bench User Manual 87 901 009 01 B 177 322 11 Felhaszn l i K zik nyv El k sz t s telep t sre El k sz t s telep t sre FIGYELEM A TPS bench ot k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak bra 1 G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet 178 322 TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 A k rnyezetnek val norm l kitetts g nem tudja k ros tani a TPS bench ot M gis aj nlatos z rva tartani a rendszerbe val telep t sig igy megakad lyozva a por ltali sz
189. uele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken WAARSCHUWING gt gt gt Vermijd stoten of bruuske verplaatsingen wanneer de turbopomp in werking is De lagers kunnen beschadigen en er kunnen letsels aan personen of schade aan voorwerpen worden veroorzaakt 102 322 TPS bench User Manual 87 901 009 01 B VOORZICHTIG Bedrijfshandleiding 6 Gebruik voor de luchttoevoer naar de pomp inert gas zonder stof vaste deeltjes of vocht bijv stikstof De inlaatdruk via de hiervoor bestemde poort moet minder van 2 bar boven de atmosferische druk bedragen WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik het pompsysteem niet in aanwezigheid van explosieve gassen Inschakeling en gebruik van de TPS bench Controleer de TPS bench na het uitpakken visueel op transportschade van het systeem kritieke onderdelen zijn flens van de pomp bevestigingssteunen van de Foreline pomp voorpaneel en wielen van het systeem Controleer de ingangsspanning op het Agilent etiket dat op de behuizing van de elektronische unit van het systeem is geplakt Modelnummer PN a E N N Seriennummer SN Fl ANTA d kA gt Elektrische gegevens Figuur 2 TPS bench User Manual 87 901 009 01 B
190. uhu 14 V eobecne informacie Toto zariadenie je ur en pre profesion lnych pracovnikov Skor nez za nete zariadenie pou ivat pre itajte si navod na pou itie a v etky dal ie pokyny spolo nosti Agilent Spolo nost Agilent nenesie iadnu zodpovednost za ak kolvek udalosti zapri inen postupom ktory nie je v sulade dokonca ani v iasto nom sulade s tymito pokynmi zapr inen nespr vn m pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo akymkol vek postupom ktor je V rozpore so pecifick mi tandardmi danej krajiny TPS bench je integrovan syst m s turbov vevou pre ur en pre aplik cie pou vaj ce vysok alebo ve mi vysok vakuum spojen s pr slu n m kontroln m modulom a v vevou prim rneho v kua Syst m doka e vy erpat lubovol ny typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje velmi r chla turb na poh an vysokov konn m 3 f zovym elektrick m motorom Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uju bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information TPS bench User Manual 87 901 009 01 B 223 322 14 N vod na Obsluhu Vseobecn inform cie N vod na pou itie obsahuje tieto tandardn ozna enia 4171114118 Nebezpe ie maj s stredi poz
191. umerot viittaavat turbomolekyyliseen pumppuun ja foreline pumppuun joka on integroitu erityiseen malliin j rjestelm ss k ytetyn j nnitteen lis ksi TPS benchn eri mallien v liset erot koskevat ainoastaan j rjestelm n suorituskyky toiminnan ja k yt n ollessa samat kaikissa TPS bench malleissa Annettuja tietoja voidaan soveltaa koko arkkitehtuuriin kaikki mallit erityisest turbomolekyylisesta pumpusta foreline pumpusta tai virransy t st riippumatta TPS bench User Manual 87 901 009 01 B 163 322 10 Ohjek sikirja Asennus Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n Pumppausj rjestelm ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen a l mp tila 5 C 35 C suhteellinen kosteus O 95 ei tiivist v Mik li l sn on magneettikentti tulee pumppausj rjestelm suojata t h n tarkoitukseen olevilla suojilla TPS bench on asetettava tasaiselle pinnalle Aseta TPS bench vakaaseen asentoon kytkem ll turbopumpun sis nmenon laippa vastalaippaan joka kest 50 Nm v nt momentin akselinsa ymp rill
192. v vevami scroll alebo s dopl ovan m v menou oleja pre verzie s v vevami Rotary Vane Ak kol vek pravy a opravy syst mu mus vykona autorizovan person l NEBEZPE E Sk r ne za nete okolvek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak Ze otvorite prislu ny ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyhladajte servisn stredisko spolo nosti Agilent Pred odoslan m zariadenia vyrobcovi treba vyplni dotazn k Zdravie a Bezpe nos pripojen k n vodu na pou itie a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn t v s lade so pecifick mi predpismi danej krajiny TPS bench User Manual 87 901 009 01 B 235 322 14 N vod na Obsluhu Likvid cia Likvid cia V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vatela aby sa skontaktoval s dod vatel om pr stroja i u je to v robca alebo predajca za elom jeho lik
193. v tem uporabni kem priro niku temeljijo na platformi rpalnih sistemov Agilent imenovani TSP mobile Razlike med razli nimi tevilkami modelov se poleg napetosti sistema nana ajo na turbomolekularno rpalko in rpalko foreline vgrajeno pri dolo enem modelu Razlike med posameznimi modeli TPS bench se nana ajo samo na izkoristke sistema medtem ko so delovanje in postopki uporabe enaki pri vseh modelih TPS bench Navedene informacije veljajo za celotno platformo vsi modeli ne glede na specifi no turbomolekularno rpalko rpalko foreline ali elektri no napajanje TPS bench User Manual 87 901 009 01 B 243 322 15 Priro nik za Navodila Monta a Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem rpalni sistem name ajte in uporabljajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere temperatura od 5 C od 35 C Relativna vla nost 0 95 brez kondenza V prisotnosti magnetnih polje za ite rpalni sistem s feromagnetnim itom Sistem TPS bench postavite na ravno povr ino Namestite ga tako da bo stabilen pri emer vhodno prirobnico na turbomolekularni rpalki pove ite
194. va nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 174 322 TPS bench User Manual 87 901 009 01 B Felhaszn l i K zik nyv 11 Altalanos inform ci A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A TPS bench egy integr lt rendszer turb molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagytelje
195. ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt AP KIN For unng skader p utstyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manualen f lges noye 142 322 TPS bench User Manual 87 901 009 01 B Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren bgr lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppfglging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser TPS bench systemet best r av en turbo molekul r pumpe for bruk i hgy eller ultrahgye vakuumanlegg en styreenhet og en hovedpumpe Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe vaesker eller faste partikler Pumpingen oppn s med en hgyhastighetsturbin koplet til en trefaset elektrisk motor De fglgende avsnitt inneholder all informasjon som er ngdvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information TPS bench User Manual 87 901 009 01 B 143 322 9 Instruksjon Manual Generell informasjon Denne manua
196. vid cie pod a zmluvn ch podmienok predaja 236 322 TPS bench User Manual 87 901 009 01 B 15 TPS bench User Manual Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke 238 Splo ne informacije 239 241 Priprava za monta o 244 246 Vklop in uporaba TPS bench a Izklop TPS bench a 250 250 Shranjevanje 242 Montaza Uporaba Zaustavitev v sili 250 251 Odlaganje opadkov Posebne enote Vzdr evanje 252 Prevod navodil v izvirniku 247 tle Agilent Technologies 237 322 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 238 322 TPS bench User Manual 87 901 009 01 B Priro nik za Navodila 15 Splo ne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh
197. voltage signal 0 frequency proportional to frequency or power 1 power default 1 2 Pump temperature 3 Pressure 117 R W N Low Speed frequency Hz 250 to Maximum rotational frequency win 121 default 700 120 R W N Rotational frequency setting Hz 900 to Maximum rotational frequency win 121 default 963 122 R W L Set vent valve on off on closed On 1 Off 0 default 1 123 Reserved to Agilent service 124 125 R W L Set the vent valve operation Automatic 0 see note 1 On command 1 see note 2 126 R W N Vent valve opening delay 0 to 65535 corresponding expressed in 0 2 sec to 0 to 13107 sec 130 Reserved to Agilent service 147 R W N Vent open time 0 infinite See vent connector paragraph 1 bit 0 2 sec 155 R N Power limit applied watt Read the maximun allowable power 157 R W N Gas load type 0 N2 Select the gas load to the pump 1 Av 161 R W N Pressure Reading Connection Factor 0 to 10 See GAUGE CONNECTOR for more details 0 0 10 1 N2 162 R W A R1 Set Point Pressure Valve Valid if min 101 4 Format X X E XX Where X 0 to 9 s or 306 322 TPS bench User Manual 87 901 009 01 B Technical Information 17 N Read Data Description Admitted Values Write Type 163 R W N Pressure unit of measure 0 mBar 1 Pa 2 Torr 167 R W A Stop speed reading 0 disable Activates deactivates the pump speed 1 enable reading after Stop command 171 R W
198. wej ciowe poprzez odpowiedni wlot musi by ni sze od 2 barow ponad cisnienie atmosferyczne ZAGROZENIE Kiedy pompa jest zastosowana do pompowania gaz w toksycznych tatwo palnych lub radioaktywnych nalezy wykona odpowiednie procedury typowe dla kazdego z gaz w Nie stosowa zespotu pompujacego w obecnosci gaz w wybuchowych Wiaczenie i obstuga systemu TPS bench Po rozpakowaniu TPS bench sprawdzi czy nie ma sladow uszkodzenia systemu spowodowanych przez transport czesci krytyczne to kotnierz pompy wsporniki do mocowania pompy Foreline panel przedni oraz kota systemu przeprowadzajac kontrole wzrokowa Sprawdzi napiecie wej ciowe podane na etykiecie Agilent naklejonej na podstawie jednostki elektronicznej systemu Numer modelu PN BE Numer seryjny SN EY Dane elektryczne Posta 62 TPS bench User Manual 87 901 009 01 B 199 322 12 Podrecznik Instrukcji Uzytkowanie Je eli napiecie zasilania elektrycznego jest zgodne z podanym dla systemu mo na podtaczy kabel zasilania elektrycznego do gniazda typu IEC320 kt re znajduje sie na tylnym panelu systemu patrz rysunek Gniazdo posiada spre yne blokujaca ktorej celem jest uniemo liwienie przypadkowego odtaczenia kabla zasilania spre yne wykorzysta do zamocowania kabla zasilajacego aro S Li eu gt Sprezyna NY zabezpieczajac f AT 82 Kabel zasilajacy Posta 63 Pod czenie
199. y mechaniczne firmy Agilent W celu dodatkowych informacji nale y zapozna si z dodatkiem Technical Information System TPS bench nie mo e by mocowany poprzez w asn podstaw Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information TPS bench User Manual 87 901 009 01 B 197 322 12 Podrecznik Instrukcji Uzytkowanie Uzytkowanie W tym paragrafie zostaly przedstawione gl wne procedury operacyjne Przed rozpoczeciem korzystania z uktadu nale y sprawdzi czy wszystkie podtaczenia elektryczne i pneumatyczne sa wykonane poprawnie Podczas ewentualnego nagrzania komory pr niowej temperatura na kolnierzu nie mo e przekroczy 120 C ZAGROZENIE Absolutnie nie wolno uruchamia zespotu pompujacego w przypadku gdy kotnierz wej ciowy nie jest podtaczony do komory lub nie jest zamkniety z kotnierzem zamkniecia ZAGROZENIE Nie dotyka turbopompy i jej ewentualnych akcesoriow podczas operacji nagrzewania Wysoka temperatura moze spowodowac uszkodzenia ciata na osobach ZAGROZENIE Podczas funkcjonowania turbopompy nalezy unikat uderzen i jej przemieszczania tozyska moga ulec uszkodzeniu i moze dojs do uszkodzenia Os b lub rzeczy 198 322 TPS bench User Manual 87 901 009 01 B Podrecznik Instrukcji 12 UWAGA Dla wlotu do powietrza pompy zastosowa obojetny gaz bez pytu lub innych czastek i bez wilgoci np Azot Ci nienie
200. zwischen den verschiedenen Modellen des TSP mobile beziehen sich nur auf die Leistungen des Systems w hrend der Betrieb und das Anwendungsverfahren bei allen TPS bench gleich sind Die aufgef hrten Informationen sind im ganzen Angebot anwendbar alle Modelle unabh ngig von der spezifischen Turbomolek lpumpe Foreline Pumpe oder mit Stromspeisung TPS bench User Manual 87 901 009 01 B 35 322 2 Gebrauchsanleitung Installation Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei AnschluB der Turbopumpe an das System abnehmen 36 322 Das Pumpensystem darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C a Relative Luftfeuchtigkeit O 95 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist das Pumpensystemdie Pumpe entsprechend abzuschirmen Das System TPS bench in eine stabile Position stellen und den Eingangsflansch der Turbopumpe mit einem Gegenflansch verbinden der einem Drehmoment von 50 Nm um die Achse widersteht direkt oder ber ein flexibles Anschlussst ck Die Turbopumpe mit Eingangsflansch ISO muss mit Klemmen a
201. zypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych TPS bench jest zintegrowanym systemem sk adaj cym si z pompy turbomolekularnej dla zastosowania wysokich i ultra wysokich pr ni odpowiedniego sterownika i z g wnej pompy System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information TPS bench User Manual 87 901 009 01 B 191 322 12 Podrecznik Instrukcji Og lne informacje W tej instrukcji zastosowano nastepujace umowne znaczenia ZAGROZENIE Komunikaty niebezpieczenstwa przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowa powa ne uszkodzenia ciata Komunikaty zwiekszonej uwagi sa wyswietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury Sa t

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