User Manual MP41E - Physik Instrumente
Contents
1. 10 945 T Limit SWIICNES 10 3 6 2 Reference Point 10 4 Unpacking 13 5 Installation 15 5 1 General Notes on Installation cccccccsceesecceeeeseeseeeeeeeeeeseeeeeseceeeeessaeeseeeeeeeeaaas 15 5 2 Mounting the Stage on a Surface 15 5 3 the Load 17 5 4 Mounting Stacked 18 5 4 1 Stacking an XY System 18 94 2 20 10 11 12 13 Start Up 6 1 General Notes on 6 2 Starting up the 11 Operation 7 1 General Notes on 73 2 Operating Parettie apod 7 2 1 M 11x Entries in the Stage Database 7 2 2 Operating Parameters of the Models with DC Gear Motor 7 2 3 Operating Parameters of the Models with Stepper Motor Maintenance Troubleshooting 9 1 Possible Causes and 9 2 Displacing the Moving Platform Manually Customer Service Technical Data mE TU TERT Te BIO ENT T UU Tm TT 11 2 1M 110 Micro Translation Stage2. 11 2 2M 111 Micro Translation Stage 11 2 3M 112 Micro Translation Stage 11 2 4M 11x Adapter TLS LEITET T T TU TT 11 3 1Model DC Gear Motor 11 3 2Stepper Motor with Gear 25 11 4 Suitable Controllers eeeeeeeeeseseeeeeeeeeeeeeeeennn nnn Old Equipment Disposal EC Declaration of Conformity 47 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this 1 Symbols and Typographic 1 Other Applicable Documents seeeeeseesssssseeeeenn nnne 2 1 1 Goal and Target Audience of this Manual This manual contains information on the intended use of the M 11x It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures For updated releases of this user manual or if you have any questions contact our customer service department see p 33 1 2 Symbols and Typographic Conventions The symbols
3. 25 7 1 General Notes on Operation INFORMATION Unsuitable settings made to the servo control parameters may impair the performance of the M 11x The consequences of this may be expressed as follows Vibrations The position is not precisely approached Settling time is too long gt Ifthe performance of the M 11x is not satisfactory please check the settings for the servo control parameters of your controller 7 2 Operating Parameters 7 2 1 M 11x Entries in the Stage Database The stage has to be connected to an appropriate motor controller see p 44 For some motor controllers you have to select the connected stage from a stage database in the respective host software The following table shows the stages and their names in the stage database M 11x Micro translation stage MP41E Version 4 0 0 25 7 Operation P adapter box PWM PWM parameter Reference 2 l in the stage Pe Stage point Signal to stage Deviating parameters eee database switch available analog available Analog M 11x 1DG NEW like M 11x 1D except reference point switch parameter analog PWM via C 842 AP1 M 11x 1DG PWM like M 11x 1DG except PWM via C 842 AP1 11 106 like M 11x 1DG NEW M 11x 2DG not available pw via C g42AP1 M 11x 2DG PWM like M 11x 2DG except adapter box PWM PWM parameter analog available Analog M 11x 2DG NEW like M 11x 2DG except reference point switch parame
4. cap screws M3x6 DIN 7984 1 Allen wrench 2 0 for hex head cap screws 1 Allen wrench 1 5 for manual shifting of moving platform during remedial actions MP41 User manual this document in printed form M 11x Micro translation stage MP41E Version 4 0 0 3 Product Description P 3 5 Accessories Order Description Number M 110 01 Adapter plate for the installation of the stage to honeycomb tables metric or imperial Adapter brackets for the vertical installation of M 11x to other M 11x stages to create XZ or XYZ systems for M 110 stage as Z stage for M 111 stage as Z stage for M 112 stage as Z stage C 842 AP1 Adapter box PWM analog to operate M 11x stages with PWM signals To order please contact our customer service department see p 33 3 6 Technical Features 3 6 1 Limit Switches The M 11x is equipped with non contact Hall effect limit switches Each limit switch sends an overtravel signal on a dedicated line to the controller The controller then stops the motion If the controller does not stop the motion in time the stage runs into the hard stop For further details refer to the Specifications section see p 35 3 6 2 Reference Point Switch The M 11x is equipped with a direction sensing reference point switch which is located close to the positive limit switch This sensor provides a TTL signal indicating whether the stage is on the positive or negative side of the reference poi
5. Design resolution Min incremental motion Backlash Unidirectional repeatability Pitch Yaw Max velocity Mechanical properties Drive screw Thread pitch M 110 1DG M 110 12S M 111 1DG M 111 12S M 112 1DG M 112 12S 5 15 25 5 15 25 Rotary encoder 2048 0 0069 0 038 0 05 0 05 0 1 0 1 50 150 50 150 150 150 1 15715 1 1 1 Leadscrew Leadscrew 0 4 0 4 1 11 Micro translation stage M 110 2DG M 111 2DG M 112 2DG 5 15 25 Rotary encoder 2048 0 0086 0 2 0 5 50 150 150 1 571272 Recirculating ballscrew 0 5 M 110 22S 111 22 112 22 5 15 25 0 046 0 2 0 5 50 150 150 1 1 71 Recirculating ballscrew 0 5 Version 4 0 0 Units mm Cts rev um um um um urad mm s mm 35 11 Technical Data Gear ratio Motor resolution Max load Max push pull force Max holding force Max lateral force Drive properties Motor type Operating voltage Electrical power Current consumption Limit and reference switches Miscellaneous Operating temperature range Material Mass Recommended controller driver M 110 1DG M 111 1DG M 112 1DG 28 44444 1 30 30 20 10 10 15 10 10 DC motor gearhead to 12 0 52 1 75 1 75 160 320 320 Hall effect 20 to 65 Al black anodized 0 3 0 4 0 5 C 863 single axi
6. Normal motor operation high 5 V Overtravel low 0 V Reference Point Switch Specifications Type Supply voltage Signal output Signal logic M 11x Micro translation stage Magnetic Hall effect sensor 5 V GND supplied by the motor controller through the motor connector TTL level Direction sensing by means of different signal levels on the left and right side of the reference point switch The signal level changes from 0 to 5 V when the reference point switch is passed 1 Version 4 0 0 37 PI 11 Technical Data 11 2 Dimensions 11 2 1 M 110 Micro Translation Stage Decimal places are separated by commas in the drawings 20 5 25 005 Figure 7 110 micro translation stage dimensions M 11x Micro translation stage 38 Version 4 0 0 MP41E PIEZO NANO POSITIONING WWW PI WS 11 2 2 M 111 Micro Translation Stage Decimal places are separated by commas in the drawings 25 0 05 20 0 05 11 Micro translation stage 20 5 19 5 0 5 07 4 5 5 11 Technical Data M3 Vy 6 20 0 05 42 5 16 44 70 62 Figure 8 M 111 xx
7. the countersinks for mounting are accessible in the base body refer to the user manual of the motor controller and the arrows in the figure 3 Mount the stage with two of the included screws 4 Ensure that the screw heads do not protrude from the countersunk mounting holes 16 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Affixing the Load Screws that are too long The M 11x can be damaged by screws that are too long Note the depth of the mounting holes in the moving platform see p 38 gt Only use screws of the correct length for the respective mounting holes z D 111 106 amp 111106X S N 4031389005 Be gt B calum 2 m Figure 3 Threaded holes in the moving platform Prerequisites You have read and understood the General Notes on Installation see p 15 Tools and Accessories Size screws in appropriate length see 38 Suitable wrench M 11x Micro translation stage MP41E Version 4 0 0 17 5 Installation P Affixing the Load 1 Choose the mounting position so that the six M3 threaded holes in the moving platform see arrows in the figure can be used for affixing the load 2 Affix the load to the moving platform using the screws 5 4 Mounting Stacked Systems 5 4 1 Stacking an XY System The stages can be combined at will to a stacked XY system E E E a F k
8. the maintenance manual which you can obtain from our customer service department M 11x Micro translation stage MP41E Version 4 0 0 29 PIEZO NANO POSITIONING WWW PI WS 9 Troubleshooting 9 Troubleshooting In this Chapter Possible Causes and Remedies ccceccececcecceccececceccucueceecuececeucuccuuaecaeeeesaeaeseeeaenass 31 Displacing the Moving Platform Manually 32 9 1 Possible Causes and Remedies Increased wear Warped base body gt Mount the M 11x on a flat surface recommended Reduced accuracy evenness 10 um Functional Motor controller has Load the parameters from the impairment after been replaced stage database that system modification Wiese has been correspond to the combination of motor controller and M 11x model see p 25 replaced with another model The stage no The moving platform has Move the moving platform longer moves become stuck at the end manually away from the end of the travel range of the travel range see p 32 If the problem that occurred with your system is not listed in the table above or it cannot be solved as described contact our customer service department see p 33 M 11x Micro translation stage MP41E Version 4 0 0 31 9 Troubleshooting P I 9 2 Displacing the Moving Platform Manually The moving platform of the stage can be manually displaced for remedial measures Figure 6 Manual displacement of mov
9. PI MP41E M 11x Micro translation stage User Manual Version 4 0 0 Date 15 03 2011 This document describes the following products M 11x 1DG Translation Stage DC Motor Gearhead 11 20 Translation Stage DC Motor Gearhead Recirculating Ballscrew 11 12 Translation Stage Stepper Motor 11 22 Translation Stage Stepper Motor Recirculating Ballscrew x stands for travel range 0 5mm 1 15mm 2 25 Physik Instrumente GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING 5 Physik Instrumente GmbH amp Co KG is the owner of the following company names and trademarks PI amp PIC PICMA PlLine amp PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation 2010 Physik Instrumente GmbH amp Co KG Karlsruhe Deutschland The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the Source First printing 15 03 2011 Document number MP41E BRo Release 4 0 0 M 11x UserManual MP41E 400 Subject to change without notice This manual is superseded by any new release The latest rele
10. Screws that are too long The M 11x can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform see p 38 gt Only use screws of the correct length for the respective mounting holes INFORMATION The displacement of the moving platform of the stage during mounting has to be controlled with a suitable motor controller gt Connect the stage to a suitable controller prior to mounting 18 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 4 Stacked XY systems 1 X system 2 Y system Prerequisites v You have read and understood the General Notes on Installation see p 15 Tools and Accessories 2 included screws and Allen wrench see 9 Stacking an XY System 1 Mount the X system see p 15 2 Connect the Y system to an appropriate motor controller see p 23 3 Displace the moving platform Y system so that the countersinks for mounting are accessible in the base body refer to the user manual of the motor controller 4 Rotate the Y system by 90 and position it on the X system It is possible to rotate again by 180 for a different orientation of its cable exit M 11x Micro translation stage MP41E Version 4 0 0 19 5 Installation P 5 Mount the Y system using the included screws the relevant threaded holes see arrows in the figure of the X system see p 17 5 4 2 Stac
11. and typographic conventions used in this manual have the following meanings Hazardous situation Light injuries may result from non observance gt Action to be taken to avoid the hazard Hazardous situation If not avoided the hazardous situation will result in damage to the equipment Action to be taken to avoid the hazard M 11x Micro translation stage MP41E Version 4 0 0 1 1 About this Document p INFORMATION Information to facilitate operation and handling tips and tricks and so on Symbol Meaning 1 Action consisting of several steps whose sequential order 2 must be observed gt Action consisting of one or several steps whose sequential order is irrelevant B List item see p 5 Cross reference to page 5 1 3 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals For the latest versions of the user manuals contact our customer service department see p 33 C 843 DC Servo Motor Controller MS77E User Manual C 863 Mercury Servo Controller MS173E User Manual C 663 Mercury Step Controller MS138E User Manual 2 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter 3 General Safety Instructions nennen nennen nnn 3 2 1 Intended Use The M 11x is a laboratory device a
12. ar type 0 250 900 250 17066 1706 1706 666666 1365 333333 active low active low AM 1524 A 0 25 AM 1524 A 0 25 12 5 12 5 250 15 A Planetary design 15 A Planetary design When the motor has stopped we advise to change to a reduced quiescent current after a current delay time 28 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 8 Maintenance 8 Maintenance Damage due to improper maintenance The M 11x can become misaligned as a result of improper maintenance gt Do not loosen any sealed screws Depending on the operational conditions and the period of use of the stage the following maintenance measures are required Spread lubricant gt evenly distribute the existing lubricant perform a maintenance run across the entire travel range after 5000 hours of operation or after 2 years at the latest gt Ifyou operate your stage continuously on a small travel range 20 96 of the entire travel range perform a maintenance run every 2000 motion cycles across the entire travel range Lubrication Under laboratory conditions the stage needs extra lubrication in exceptional cases only For continuous industrial use the lubrication intervals must be defined individually gt Do not lubricate the M 11x without consulting our customer service department see p 33 gt To lubricate follow the instructions given
13. ase is available for download on our website http www pi ws PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this Manual esses 1 1 2 Symbols and Typographic Conventions 1 1 3 Other Applicable Documents nennen nnns 2 2 Safety 3 201 IMendod U Saas e 3 2 2 General Safety INStrUCTIONS cccccccccssseeeeeeeeeeeeeeeseeeeeeeeeeseeseeeeeeeeseueeaseeeeeeeesaaas 3 2 2 1 Organizational nennen nennen nnn nnn 4 2 2 2 Safety Measures During Installation ne 4 2 2 3 Safety Measures During 5 2 2 4 Safety Measures During Operation 5 2 2 5 Safety Measures During 6 3 Product Description 7 3 1 Features and 7 3 2 Model Overview cccccccccceesececceeececceesceeceeceeseeseeeeseeseesseueeesseeeesseeeesseaeeesseeeeesas 8 SE POUC dc RT 9 3 4 Scope sina asas aaa ana 9 33 RTI T 10 3 6 Technical
14. important information serious or fatal injury as well as property damage can result gt Only install and operate the M 11x after having read and understood this user manual Personnel Qualification Only authorized and qualified personnel must install operate maintain and clean the M 11x 2 2 2 Safety Measures During Installation The M 11x can be damaged by screws that are too long and parts that are wrongly mounted When mounting the M 11x on a surface make sure that the mounting screws do not interfere with the motion of the stage The screw heads must not protrude from the counter sunk holes Note the depth of the mounting holes in the moving platform Only use screws of the correct length for the respective mounting holes Only mount the M 11x and the loads on the M 11x using the mounting fixtures holes intended for this purpose 4 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 2 3 Safety Measures During Start Up A motorized stage can generate powerful forces depending on the gear ratio Faulty motor controllers can cause unintentional motor motions and run the stage to the hard stop When connecting the stage to the motor controller for the first time the stage can perform an unintentional motion gt Do not place any objects in areas where they can get caught by moving parts gt place any objects in the gap between the platform and the ba
15. industrial purposes To protect the application non contact Hall effect limit switches and direction sensing reference point switches are used The stages can be assembled as compact XY and XYZ systems for multi axis motion M 11x Micro translation stage MP41E Version 4 0 0 7 3 Product Description P 3 2 Model Overview There are 12 standard versions of M 11x available They differ in terms of drive type and travel range Ordering Information Translation stage 0 Travel Range 5mm DG DC Motor Gearhead 1 Travel Range 15 mm 28 Stepper Motor with Gear 2 Travel Range 25 mm head 1 Leadscrew 2 Ball screw Ask about custom designs SS ee eee MEM kee A ___ Mrs MTM 1 8 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 3 Product View 4 3 5 111 106 PartNo M 111106X S N 4031389005 1 2 Figure 1 Product view example M 111 1DG Base body Moving platform Cable for the connection to the motor controller Motor aA O N 3 4 Scope of Delivery Order Item s Number Stage according to order see 8 C 815 38 Motor cable 3 m 15 pin D sub connector 000018146 Screw set 4
16. ing platform Tools Allen wrench 1 5 mm see p 9 Displacing the Moving Platform Manually gt Turn the screw accessible from the side of the stage carefully and only as far as necessary using the Allen wrench see figure The rotary motion is directly transferred to the lead screw or the ball screw 32 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 10 Customer Service 10 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Software version of driver or host software if present Operating system on host PC if present The latest versions of the relevant user manuals for your system are available for download on our website http www pi ws M 11x Micro translation stage MP41E Version 4 0 0 33 PIEZO NANO POSITIONING WWW WS 11 Technical Data In this Chapter 11 Technical Data PECCO FUN 35 38 42 Suitable Controllers 44 11 1 Specifications Motion and positioning Travel range Integrated sensor Sensor resolution
17. ion of the motor controller stop the motion immediately gt Ensure that the platform approaches the end of the travel range at low velocity gt Set your control signal in such a way that the moving part does not stop abruptly or tries to continue moving at the end of the travel range gt Determine the maximum velocity for your application M 11x Micro translation stage MP41E Version 4 0 0 23 6 Start Up P 6 2 Starting up the M 11x Prerequisites You have read and understood the General Notes on Start Up see p 23 Accessories Appropriate motor controller see p 44 Host computer Host software Starting up the M 11x 1 Connect the motor controller to a host computer and install the host software see the user manual of the motor controller and the respective software manual 2 Connect the stage to the motor controller 3 Start up the motor controller see user manual of the motor controller 4 Configure the motor controller in the host software for the connected stage see p 25 You can find a detailed description in the respective software manual 5 Initiate a few motion cycles for testing 24 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 7 Operation 7 Operation In this Chapter General Notes on Operation nennen nnne nnne nnn nnns nnn 25 ODeraurd P
18. king a Z System To construct a Z system the M 11x models can be combined as follows XYZ system Mounting a stage to an XY system see 18 XZ system Mounting a stage to an X system Screws that are too long The M 11x can be damaged by screws that are too long Note the depth of the mounting holes in the moving platform see p 38 gt Only use screws of the correct length for the respective mounting holes INFORMATION The displacement of the moving platform of the stage during mounting has to be controlled with a suitable motor controller gt Connect the stage to a suitable controller prior to mounting 20 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Figure 5 XYZ System 1 xX system 4 Zsystem 2 Ysystem 5 Counter nut 3 Adapter bracket Prerequisites v You have read and understood the General Notes on Installation see 15 M 11x Micro translation stage MP41E Version 4 0 0 21 5 Installation PI Tools and Accessories Appropriate adapter bracket and matching screws see p 10 Stacking a Z System 1 2 Mount the X system see p 15 When mounting an XYZ system Mount the Y system on the X system see p 18 Affix the adapter bracket in the threaded holes of the X system or the Y systems see p 17 Connect the Z system to an appropriate motor controller see p 23 Displace the moving platform Z sys
19. nical Data 11 3 2 Stepper Motor with Gear 2S Connector D sub 15 pin m not connected so M 11x Micro translation stage MP41E Version 4 0 0 43 11 Technical Data p 11 4 Suitable Controllers The stage must be connected to a suitable motor controller The following motor controllers from PI can be used eae ee Axes per Host PC Multiple Controllers on Controller Interface the Same Host DC gear C 843 2 or4 internal yes separate boards motor bus C 863 1 USB RS 232 yes same interface daisy chain Stepper C 663 1 USB RS 232 yes same interface motor daisy chain The operation of the motor controllers is described in the corresponding user manuals The operating parameters must be adjusted depending on the stage used see p 25 44 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 12 Old Equipment Disposal 12 Old Equipment Disposal Since 13 August 2005 in accordance with the EU directive 2002 96 EC WEEE electrical and electronic equipment can no longer be disposed of in the member states of the EU with other wastes When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulati
20. nt switch 10 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description The rising or falling edge of this signal can be used to indicate a known reference position The difference in the reference points when approached from the positive or the negative side is about 0 2 mm to 0 4 mm See the controller user manual and or associated software manuals for the commands which make use of the reference point signal For further details refer to the Specifications section see p 35 M 11x Micro translation stage MP41E Version 4 0 0 11 PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking 1 Unpack the M 11x with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials You can use it to re package the M 11x in the event the product needs to be returned M 11x Micro translation stage MP41E Version 4 0 0 13 PIEZO 5 1 NANO POSITIONING WWW PI WS 5 Installation Installation In this Chapter General Notes on nennen 15 Mounting the Stage on a nennen enne nnne nnns 15 ARKTO TE LOTO RN RETE E 17 Mounting Stacked eene ennemis 18 General Notes on Ins
21. on after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany M 11x Micro translation stage MP41E Version 4 0 0 45 PIEZO NANO POSITIONING WWW PI WS 13 EC Declaration of Conformity 13 EC Declaration of Conformity M 11x Micro translation stage Declaration of Conformity according ta ISO IEC Guide 22 and EM 45014 Manufacturer Physik Instrumente Pl GmbH amp Co KG Manufacturers Auf der Rormerstrasse 1 Address D 76225 Karlsruhe Germany The manufacturer hereby declares that the product Product Nama Translation Stage Model Numbers ME 1lx xxx Product Options all conforms to the following EMC Standards and normative documents 61000 6 3 EN 61000 6 1 EN 61010 1 EN 12100 August 17 2005 Karlsruhe Germany LA T PPP Dr Karl Spanner President 1 Version 4 0 0 47 13 EC Declaration of Conformity PI 48 Version 4 0 0 MP41E M 11x Micro translation stage
22. s C 843 PCI board for up to 4 axes 110 12 111 12 M 112 12S 28 44444 1 384 30 30 20 10 10 15 10 10 2 phase stepper motor 24 1 5 Hall effect 20 to 65 Al black anodized 0 3 0 4 0 5 C 663 single axis M 110 2DG M 111 2DG M 112 2DG 28 44444 1 30 30 20 10 10 15 10 10 DC motor gearhead to 12 0 52 1 75 1 75 160 320 320 Hall effect 20 to 65 Al black anodized 0 3 0 4 0 5 863 single axis 843 PCI board for up to 4 axes PI 110 22 M 111 22S M 112 22S 28 44444 1 384 30 30 20 10 10 15 10 10 2 phase stepper motor 24 1 5 Hall effect 20 to 65 Al black anodized 0 3 0 4 0 5 C 663 single axis Max 0 25 A phase 24 full steps rev motor resolution with C 663 stepper motor controller thermally limited 36 Version 4 0 0 MP41E Units mA C kg M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 11 Technical Data Limit Switch Specifications Type Supply voltage Signal output Signal logic Magnetic Hall effect sensor 5 V GND supply via the motor connector TTL level The signal level changes when passing the limit switch The signal logic depends on the stage type Models with DC gear motor active high Normal motor operation low 0 V Overtravel high 5 V Models with stepper motor active low
23. s Chapter Features and Applications 5a parasti rea hA sd pU UP M NCMO REA 7 Model 8 9 COE OF E r 9 PC CESS OSS 10 Technical Features 10 3 1 Features and Applications M 11x micro translation stages are extremely compact motorized stages with travel ranges of up 5 15 or 25 mm They are equipped with precision linear bearings with a guidance accuracy of lt 0 5 um M 11x 1DG and 11 12 With M 11x 1x models the stage is driven by a small DC gear motor DG or stepper motor 2S via a backlash compensated screw nut system and a gearhead The DC gear motor is equipped with a rotary encoder that can achieve a design resolution of up to 0 007 um per impulse The low adhesion and low friction combination with a high resolution encoder allows for the most minute increments of 50 nm at speeds of up to 1 5 mm s The M 11x 1x models with stepper motor have been designed for open loop control and do not have an encoder In combination with a high resolution C 663 stepper motor controller the design resolution is 14 nm per step M 11x 2DG and M 11x 22S For M 11x 2x models instead of the lead screw a ball screw generates the precision motion with reduced friction The design has been optimized for high duty cycles and is well suited for
24. s defined by DIN EN 61010 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the M 11x is intended for single axis positioning adjusting and shifting of loads at various velocities The intented use of the M 11x is only possible with a suitable motor controller see p 44 The motor controller is not included in the scope of delivery of the M 11x 2 2 General Safety Instructions The M 11x is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the M 11x gt Only use the M 11x for its intended purpose and only use it if it is in a good working order Head the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the M 1 1x M 11x Micro translation stage MP41E Version 4 0 0 3 PI 2 2 1 Organizational Measures User Manual gt Always keep this user manual next to the M 11x when using the M 11x If the user manual is lost or damaged contact our customer service department see p 33 gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt Only use the device on the basis of the complete user manual If your user manual is incomplete and is therefore missing
25. se body gt Keep your fingers at a safe distance from the motion range of the stage The collision of a moving part with the end of the travel range as well as high acceleration may cause damage to or considerable wear on the mechanics gt Inthe event of a malfunction of the motor controller stop the motion immediately gt Ensure that the platform approaches the end of the travel range at low velocity gt Set your control signal in such a way that the moving part does not stop abruptly or tries to continue moving at the end of the travel range Determine the maximum velocity for your application Ensure that the automatic limit switch halt is supported by or activated at the motor controller 2 2 4 Safety Measures During Operation Unsuitable settings made to the servo control parameters may impair the performance of the M 11x The consequences of this may be expressed as follows Vibrations The position is not precisely approached Settling time is too long gt Ifthe performance of the M 11x is not satisfactory please check the settings for the servo control parameters of your controller M 11x Micro translation stage MP41E Version 4 0 0 5 PI 2 2 5 Safety Measures During Maintenance The M 11x is precisely aligned gt Donot loosen any sealed screw 6 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description Product Description In thi
26. tallation INFORMATION Stages with DC gear motors are equipped with integrated signal drivers for cable lengths of x 10 m between stage and motor controller Mounting the Stage on a Surface Protruding screw heads Protruding screw heads can damage the M 11x Ensure that the screws are completely fastened and that the screw heads do not protrude from the counter sunk holes so that they do not interfere with the stage motion Warping of the base body Incorrect mounting can warp the base body Warping of the base body will increase wear and reduce accuracy gt Mount the M 11x on a flat surface recommended evenness 10 M 11x Micro translation stage MP41E Version 4 0 0 15 5 Installation P I INFORMATION The displacement of the moving platform of the stage during mounting has to be controlled with a suitable motor controller gt Connect the stage to a suitable controller prior to mounting DOR 111 106 Part No 111106 alo S N 4031389005 Figure 2 Positions of the mounting holes left mounting hole is partially covered by the moving platform Prerequisites v You have read and understood the General Notes on Installation see p 15 Tools and Accessories 2 included screws and Allen wrench see p 9 Appropriate motor controller see p 44 Mounting the M 11x 1 Connect the stage to an appropriate motor controller see p 23 2 Displace the moving platform so that
27. tem so that the countersinks for mounting are accessible in the base body refer to the user manual of the motor controller Orient the Z system so that the counter nut 5 is at the top see figure Mount the Z system with two of the included screws to the adapter bracket Ensure that the screw heads do not protrude from the countersunk mounting holes 22 Version 4 0 0 41 11 Micro translation stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 Start Up In this Chapter General Notes On 23 MD OPTED TEE 24 6 1 General Notes on Start Up Unintentional motion of stage while connecting it to the motor controller gt Do place any objects in areas where they can get caught by moving parts gt Do not place any objects in the gap between the platform and the base body Keep your fingers at a safe distance from the motion range of the stage Collision of the moving platform with the hard stop When the limit switches are deactivated the motion of the moving platform is aborted by the hard stop and the M 11x can be damaged gt Do not deactivate the limit switches in the software gt Test limit switch operation at low velocities only Avoid collisions of the ________ OAO platform with the hard stop Damage or major wear to the mechanical system as a result of high acceleration gt Inthe event of a malfunct
28. ter adapter box PWM except PWM parameter PWM via C 842 AP1 M 11x 2DG NEW Pd like M 11x 2DG NEW adapter box PWM except PWM parameter analog X 0 1 or 2 according to product labeling see p 8 Models with 3 or 4 digit serial numbers do not have a reference point switch 26 Version 4 0 0 MP41E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 7 2 2 Operating Parameters of the Models with DC Gear Motor Recommended start values Max acceleration 1456355 impulses s Max velocity mm s Max velocity impulse s M 110 1DG 1 M 111 1DG 1 5 M 112 1DG 1 5 M 110 1DG 145635 M 111 1DG 218453 M 112 1DG 218453 1165084 M 110 2DG 1 5 M 111 2DG 1 75 M 112 2DG 1 75 M 110 2DG 174762 M 111 2DG 203889 M 112 2DG 203889 Hardware properties Impulses mm 145635 555555 116508 444444 Limit switch polarity active high active high M 11x Micro translation stage MP41E Version 4 0 0 7 Operation 27 7 Operation PI 7 2 3 Operating Parameters of the Models with Stepper Motor Parameter Recommended start values Quiescent current mA Run current mA Current delay time ms Max motor current mA Max acceleration step s Max velocity steps s Max velocity mm s Hardware properties oteps mm Limit switch polarity Motor serial type Full step resolution steps revolution Phase resistance ohm Phase current bipolar mA Ge
29. x micro translation stage dimensions MP41E Version 4 0 0 39 11 Technical Data 11 2 3 M 112 Micro Translation Stage Decimal places are separated by commas in the drawings 74 EL 1 E 27 ZZ gt E S TES Ln Hes ff Gye 35 iss SAH PI Figure 9 M 112 xxx micro translation stage dimensions in mm 40 Version 4 0 0 MPA1E M 11x Micro translation stage PIEZO NANO POSITIONING WWW PI WS 11 Technical Data 11 2 4 M 11x Adapter Bracket Decimal places are separated by commas in the drawings M3 a S Qm LO T LO N 2 5 8 5 13 5 7 5 13 5 18 5 Figure 10 M 11x Adapter bracket dimensions 1 10 02 M 110 03 M 110 04 M 11x Micro translation stage MP41E Version 4 0 0 41 11 Technical Data P 11 3 Pin Assignments 11 3 1 Model DC Gear Motor DG Connector D sub 15 pin m Inm 9 Motor Input Motor Input Limit switch negative side Limit switch positive side 6 GND limit switch and logic Encoder A A with RS 422 data transfer A with RS 422 data transfer Encoder B B with RS 422 data transfer 8 B with RS 422 data transfer 42 Version 4 0 0 41 11 Micro translation stage PIEZO NANO POSITIONING WWW PI WS 11 Tech
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