RTP Work Instruction Gary
Contents
1. This machine is designed for rapid thermal processing with firxa temperature controlled by the pyrometer Thermocouples are used only for the pyrometer and heating uniformity calibration Thermocouples location e TC1 is located in the centre of carrier wafer lamp groups 1 1 and 1 2 e TC2 if installed is in the right hand side and measures the temperature in the front rear zone lamp groups 2 1 and 2 2 e TC3 if installed is in the front and measures the temperature in the left right zone lamp groups 3 1 and 3 2 Check the Thermocouple radio button in ALL process steps Getting 3 very good contacts with 3 TCs is not so easy Manufacturer recommends to bend them and to install them like springs or like the S letter Changing and creating PID table PID parameters can be changed manually The following figure shows an effect on temperature profile of changing the P and parameters D 0 79 for all profiles 750 650 o F 550 65 7 317 450 setpoint 350 10 20 30 40 t sec The auto tune procedure is differ from that one described in the manufacturer User s Manual The temperature controller button is no more in the process window To create new PID table follow this procedure 1 Open the PIMS software and then click on Maintenance Mode and Manual Heating 2 Write the coefficient factors to 0 5 Select the TC mode 3 Write O for thermoco2. To create a new recipe press the command button New To open an existing recipe select a recipe file and click Open Enter e Recipe name e Operator s name e Comment optional e Select a pyrometer calibration table from the drop down menu 8inch for the 8 inch Si carrier wafer Sinch for the 6 inch Si carrier wafer Once the recipe information is entered click Edit and enter or correct you recipe step by step Fill the following screen for all recipe steps Edit step Pyro Calib inch 1 Do not exceed the following process durations recommended by the manufacturer T lt 500 180 min T lt 7000 60min T lt 1000 30min T lt 11000 15min T lt 12000 5min For the uniform wafer heating set the correction power coefficients in your recipe Central Zone 1 00 Front Rear zone 1 40 Left Right zone 1 00 Check the Pyrometer radio button in ALL process steps Recipe example 1 Primary vacuum 60s To make the chamber becomes a vacuum 2 N 240s 500sccm vacuum off To fill the chamber with N total volume of the chamber is 2 L 3 Primary vacuum 60 s 4 O2 240s 500 sccm Filling the chamber for getting ready for oxidation process 5 20 s under pyrometer regulation temperature rises to 800 with the O flow of 100 sccm to maintain pressure inside the chamber as 1 atm 6 Ramp up 10 s pyrometer temperature regulation rises from 800 to 9008 O 2 flow 1
3. the machine during the process lf you have found any process fault or if the power stays at 100 more than 5 sec click the Stop button on the PC screen to stop the process Do mot use the Emergency Shutdown Button on the machine After Processing After the cooling cycle has finished save the process historical file Use default name of history file Always save the process history file even at the emergency stop You can find your history files in C Program Files Jipelec JetFirst200C historicals copy them on your USB drive open and analyse them in Excel The historical will be saved on the hard disk in the directory Historical When process has been saved or if saving not needed press Exit to return to main menu Check that the pressure is around 1000 mbar which means that the chamber can be opened If not go to Maintenance gt Vacuum and click Purge flow on to fill the chamber Open the chamber lid Remove your samples from atop the silicon carrier wafer Close the lid Go to Maintenance gt Vacuum and click Low vacuum to pump the chamber When the Primary vacuum gauge shows the pressure around zero click Exit Closing down the RTP System _ Click Exit in the Main Menu Shut down the PC Turn the RTP off by pressing the red off button shown Finally close all gas 6 valves on the wall Off button Operation with temperature control by thermocouples JETFIRSI
4. 00 sccm 7 Oxidation process 180 s Temp 900 O 2 flow 100sccm 8 Ramp down 10s 900 to 5008 O 2 flow 100 sccm 9 Ramp down 10s 500 to 0 O 2 flow 100 sccm Click Save recipe to save the recipe Click Display recipe to display the recipe Choosing a PID table Before progressing to the Processing Menu it is imperative that you access the PID temperature control table From the Main Menu click PID temperature controller Temperature controller Tempetature zones 1 3 Temperature zones 4 6 Temperature zones 7 8 Exit Channel 1 PID table Teroersture readout aprodT Cne Temperaiure setpairt Ras Powe Autotuning Sutoture 1 Contiolresporse parameters Digta fite 0 Offset added to the measure Loca Remote Run Automatic Menua Apply all yellow setpoints by a Run Contiol resporse parameters Stop Temperature zone 3 Lecal A S Remote gt ry amp eee gt ae Automatic sate c gt Manual me NAK alarm D Contiol resporec parameters 7 parse p 4 Communicators Click Browse and choose the Waf8Inch Pyro Reg pid file this is the PID table for 8 or 6 inch Si carrier wafer and temperature control by pyrometer Once open click Apply all yellow setpoints There are 8 temperature zones The values must be the same between the two columns in all 8 zon
5. Jetfirst RTP System User s Operating Notes This is not a comprehensive guide for use of the Jetfirst RTP machine and not a User s Manual of the Jetfirst RTP This is short reminder notices and operating tips for references only made by other users PCMDI AC COS sees ascertain ceca antec tae ned A os eae e ces tae hoc eae nccateee A ete l apor AG MTOM AOD e E E cca aeuusensesetcianeceaies 2 Annealing ambient and 2aSe ccccccssssssssseeccccesseeesssseecccccssaeeessseececcesseeeesseseeeceeessaegesseeeeseeeessaeeesses 2 Maxkim m temperatures and dural ONS oie caceesenccsnscncacemosunucsashieraseucenacsasanceaceedenaeseskdouaceednisaedesaneencrauaiee 2 A EEE E E os sate E E E E A A A E 3 Man e E E E E A E E E E E ieee teens euseeioes 3 eI TNS NAC TIC E E T E E T 3 Crem aid E A COIS e E E T 5 Ty TiN A T E E A E A 7 boada Sa e E E E A E E E E ce acaseretoe ss 7 Ka E n E E A EE T 9 AT POCE I E E E E a eaeeieeccaoasehannemseneeeass 9 Closing down the RTP Systemi as cceeesssdisareenateretiedatacesncbeseideletaceen Seusasedabagesncbereideloiaaess Mausiedaiadeancleuwsdess 9 Operation with temperature control by thermocouples ssseeeessssssssseeressssssseeerrssssssssscerssssssssseeeess 9 Chanoine and Cre at PID TANS sersan acon cue saiawlennccseive E o adedloe onsets qsadet doce sass accdeulevoee 10 Equipment access You can use the equipment without supervision if you are a Qualified Operator only No one is allowed to use the e
6. bove are only for the first reference Use your notes from the Semiconductor Device Fabrication Module books NU Library Google etc to be able to answer on simple questions 6 Request the clean room manager for final training and test session Important information e This machine is designed for rapid thermal processing with temperature controlled by the pyrometer e Thermocouples are used only for the pyrometer and heating uniformity calibration e Always keep the central thermocouple pulled down to the level of bottom plate e The pyrometer correctly measures temperatures from 350 e Always save the process history file even at the emergency stop You can find your history files in C Program Files Jipelec JetFirst200C historicals copy them on your USB drive open and analyse them in Excel Annealing ambient and gases NH3 is currently unavailable When there is no leak in vacuum chamber the pump rate is from 1000 bar to 9 9E 5 in O h 7 min from 9 9e 5 to 9 9E 6 in 1 h 50 min lf you send a gas in the chamber under turbo pumping called secondary pumping in the recipe and if the pressure is increasing too much the turbo pump is stopped and the turbo gate valve is closed at pressures higher than 50 mbar If you are pumping with turbo pump and start heating under turbo pumping there is no restriction for the temperature because you have no heat convection due to the gases Maximum temperatures and durations Do not exceed
7. es lf the values are not the same not uncommon then change manually the value in the left column and click apply all yellow setpoints again re entering more than once if this is necessary Click Exit Loading samples From the Main Menu go to Processing choose your recipe and click Download recipe The associated calibration table is also downloaded Click Start processing The system will ask for sample loading Start processing Load the sample Sa ST it iStart ssing Open the chamber in Lift the lid by lifting this bar upwards Install in the platen 6 pins 8 short pins and 3 longer metal pins for 8 inch wafer or Install in the platen 3 quarts shaped pin if annealing 6 inch wafer Ai j Platen prior to and after loading the 8 inch wafer To anneal small samples they can be placed atop the silicon carrier wafer NOTE do not place the sample on the centre as it will block the pyrometer and the TC Make sure the thermocouple TC does not touch the wafer Close the chamber carefully and slowly Processing When samples are loaded click on Start Process once more The screen will display the process form and the process starts immediately After each process there will be a compulsory cooling and venting cycle for 4 minutes During the process the chamber is locked and remains locked until the cooling cycle has finished You have to stay at
8. ging software you will see the Main Menu which offers 6 operating commands Recipes to create modify display or delete a recipe Processing to load a recipe and run a process Enable O by turning switch Maintenance for manual control of the system clockwise Historical to display saved process history Configuration to enter calibration tables configuration parameters etc Exit to return to Windows and to terminal control Click on Parameters in the top left corner Click Maintenance Enter password 123456 Under Maintenance Menu click on Valves Control you will see the Valves Control screen as below The valve status Indicator is e Red the valve is closed or fans are OFF e Green the valve is open or fans are ON Click these three buttons one by one for checking During checking the corresponding component will run and the button is green when making sure the component is working well click the button again and the button will change to red You will see the top green light always on independently on clicking the cooling button Nevertheless click this button to hear that the lamp cooling fans are on and off Click Purge to allow chamber to be open once the pressure is about 1000 mbar click Purge again to stop it Click Exit Creating and editing a recipe Click Recipes in the Main Menu You will see E eS Heading
9. or the second zone 400 or other Always slowly increase the temperature by 50 steps 15 Do the same auto tuning sequence for each zone you need
10. quipment without direct supervision until after final check out Training is required before using the Jettfirst RTP machine To obtain training 1 Read thoroughly through the EECE Cleanroom web pages allthe information concerning the machine 2 Fill COSHH forms for ALL gases used in the machine and send their electronic copies to the clean room manager 3 Read the User s Manual and these User s Notes 4 Check in the equipment booking calendar when the machine is going to be used and attend several sessions carried out by qualified operators to become familiar with machine layout location and operation of handles knobs switches valves etc 5 Before requesting training from the clean room manager please make sure that you are familiar with following terms tools devices processes sccm symbols for standard cubic centimetres per minute Many similar abbreviations are in use These are units of flow rate for gases and the term standard indicates that the flow rate assumes a standard temperature and a standard pressure of 1 atmosphere For natural gas a standard temperature of 60 F 15 6 is used e bar atmosphere atm Torr Pound force per square inch psi e Pirani gauge e Penning gauge Pressure regulator gas Mass flow controller thermal Vacuum pump Turbomolecular pump Rotary vane pump e Roughing pump Thermocouple Pyrometer PID controller Please note the links a
11. the following process durations recommended by the manufacturer T lt 500 180 min T lt 700 60min T lt 10000 30min T lt 1100 0 15min T lt 12000 5min Process cooling water From now until further notice the RIP machine has the cooling water running always Do not touch the water valves on the wall In the Maintenance gt Valve Control you will see the top green light always on independently on clicking the cooling button Nevertheless click this button to hear that the lamp cooling fans are on and off Heating uniformity For the uniform wafer heating set the correction power coefficients in your recipe Central Zone 1 00 Front Rear zone 1 40 Left Right zone 1 00 Starting the machine Emergency Shutdown Button Valves in closed position 7 iA Purging N2 _ F Compressed air Cooling j Cooling water in Open all gas valves Ultrahigh pure UHP N forming gas line is always set for N Request CR technician or CR manager to change setting if you plan to use the forming gas FG Until further notice the RIP machine has the cooling water running always Do not touch the water valves on the wall All valves are open h Enable Os by turning switch clockwise if you are going to anneal in oxygen Press the green on button Start the computer and click on Jetfirst icon to run the Jeifirst managing software After running the Jetfirst mana
12. uple setpoint and click on Start You can hear the power contactor Starting on 4 Then at the bottom left of the window click on Temperature controller 5 With the Browse button select the PID table you want to use It appears in yellow in the left column Click on Apply all yellow setpoint button and check that the yellow values are now in the black column in the right If not do it again 6 On temperature setpoint write O it appears in yellow and click on enter 7 On the right click on Local Button and check the green led Local is ON 8 Then in temperature setpoint write 50 and check that the furnace starts to heat and regulate closed to 50 9 Then increase the temperature setpoint 50 by 50 up to the first zone limit 300 When this temperature is reached click once on Auto tune button The Auto tune led will be green during the sequence 10 Wait for the auto tune led going back to black colour At this moment new PID parameters appear 11 With the browse button call again the PID table used it appears in yellow 12 In temperature zone 1 write in yellow the new parameters found Do not click on enter On temperature setpoint write O in yellow too no enter The parameters have to stay in yellow Then click on save button and record the new table you can choose a new name 13 Then write again 300 in the setpoint By the way the furnace keeps the same temperature 14 Then go on to increase the temperature f
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