User`s Manual - Newport Corporation
Contents
1. Direct Current DC Direct Current Symbol This symbol indicates that the equipment is suitable for DC power only The Agilis system is DC power only Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider CY Newport xpenence Soluborrs vil EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components EDH0224En5010 12 09 General Warnings Observe these general warnings when operating or servicing this eguipment Read all warnings on the unit and in the operating instructions Do not use this eguipment in or near water Route cables so they are not likely to be damaged Do not use liquid or aerosol cleaners use only a damp lint free cloth To avoid explosion do not operate this equipment in an explosive atmosphere General Cautions Observe these cautions when operating or servicing this equipment Use only specified replacement parts Follow precautions for static sensitive devices when handling this equipment This product should only be powered as described in this m2. 12 09 Agilis Series Piezo Motor Driven Components Returns Errors Syntax Parameters Description Range Input tests Description Returns EDH0224En5010 12 09 1ZP Reset step counter to zero 1PR100 Move 100 steps Needed to move out of the limit MV4 Move to positive limit and stop 1PH If reply is PH1 or PH3 then 1TP Tell number of steps The average step size in forward direction at the defined step amplitude is equal to the total available travel range see data sheet divided by the return of the TP command NOTE Individual steps may not be 100 repeatable NOTE When using a too low value for the step amplitude the sequence may take a very long time and may not be very repeatable No return if jog mode is defined If the sign takes place of nn this command returns the current jog mode 0 Noerror 2 _ Axis out of range must be I or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be 4 3 2 1 0 1 2 3 or 4 5 _ Not allowed in local mode controller must be in remote mode 6 Notallowed state controller must be in state 0 or 3 PA Absolute move xxPAnn or xxPA xx Axis number nn Target position in 1 1000th of the total travel xx lor2 Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be ready Check target pos
3. Tell number of steps xxTP XX Axis number xx lor2 Check controller is in remote mode Check the axis 1 or 2 Check the status of the axis must not be 3 Check that parameter is not specified Returns the number of accumulated steps in forward direction minus the number of steps in backward direction since powering the controller or since the last ZP zero position command whatever was last NOTE The step size of the Agilis devices are not 100 repeatable and vary between forward and backward direction Furthermore the step size can be modified using the SU command Consequently the TP command provides only limited information about the actual position of the device In particular an Agilis device can be at very different positions even though a TP command may return the same result TPnn where nn is the number of accumulated steps in forward direction minus the number of steps in backward direction as Integer 0 No error 2 _ Axis out of range must be I or 2 3 Parameter must not be specified 5 Not allowed in local mode controller must be in remote mode 6 Notallowed state axis must not be in state 3 TS Get axis status xxTS XX Axis number xx lor2 Check the axis 1 or 2 Check that parameter is not specified Returns the status of the axis Possible returns are Error code Description 0 Ready not moving 1 St
4. None e Termination Character CR LF CAUTION In order to communicate through the RS232 or RS485 protocols provide the power supply through the J2 connector and configure the selection jumpers accordingly CAUTION Mating connectors or equivalent can be used GO Newport EDH0224En5010 12 09 28 Experience Soltions Agilis Series Piezo Motor Driven Components 5 5 LED Indication The LED can display green or orange to show states Green Orange Solid No axis in the limit I or 2 axes in the limit No axis moving No axis moving Blinking No axis in the limit I or 2 axes in the limit I or 2 axes moving I or 2 axes moving CAUTION If there is no communication please check the led status and check if the jumpers are correctly configured 5 6 Agilis Util Software The Agilis Util software provides access to all functions either on the AG UC2 and AG UC8 controllers The Agilis Util software provides access to all functions of the Agilis controller It is compatible with PC s with a minimum of 64 MB of RAM and Windows 98 2000 NT or XP operating system To install the Agilis Util software load the distribution CD The program gives you the option of where to load the files or you can use the default directory C Program Files Newport AGILISTools AGILIS UC2 User Tool After installation is complete reboot your PC and open AgilisUserTool by double clicking on the newly created icon The foll
5. PH Tell limit status 19 PR RRE MOV e 20 Koss Reset controlli ee 20 DIS Ke D OO so seo D 21 SU Set step amplitude or get step amplitude setting 21 TE Get error of previous command 227 TP gt T m Ear 29 IS S L PN T T 25 VE Get controller firmware version 24 AP Zero POS sg 24 5 0 AG UC8 amp AG UC8PC Multi Axis Piezo Controllers 25 SUI DENN edel 25 32 Modes or e E 25 29 Motor SC IC CLO vs E 25 5 4 Communication Type Selection Available on AG UCSPC Only 26 54L BENIN 28 54 2 R5232 COMMUNI CANON En cents tes cocsee tenace create 28 5 4 3 R5455 Communication ME 28 OP D AO OR 29 30 AIS DS ON ARR N N 29 AS CE COA EE 33 Vaid TL 33 DOT VICE CN 35 CN5 Newport iv Agilis Series Piezo Motor Driven Components Warranty IO Newport Newport Corporation warrants this product to be free from defects in material and workmanship for a period of year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned tran
6. Range Input tests Description Returns Errors IO Newport ASCII Command Set NOTE Both AG UC8 and UCSPC controllers feature the same set of commands as the AG UC2 controller so please refer to chapter 4 7 4 for details on available commands The CC command is the only command specific to the AG UC8 UC8PC multi axes controllers see details of this command below CC Change channel CCnn or CC nn Channel number nn Ito4 Check the controller is AG UCS Check controller is in remote mode Check there is no background task MA PA Check the current state of both axes must be 0 Check channel number must be integer This command is specific to AG UC8 The piezo actuators are selected by pairs which are grouped in four channels This command changes the selected channel None 0 No error 1 Unknown command only available on AG UC8 2 Must not specify any channel 3 Wrong format for nn must be integer 4 Wrong value for nn must be between 0 and 4 included 5 Notallowed in local mode controller must be in remote 6 Notallowed state both axes must be in state 0 33 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components GO Newport EDH0224En5010 12 09 34 bites Agilis Series Piezo Motor Driven Components Service Form Name Company __ Address Item s Being R
7. USB 921600 JS3 COM Selection Header Connector COM External Power Supply Pin Description 1 RS232 Rx 2 RS232 Tx 3 RS485 Tx 4 RS485 Tx 5 RS485 Rx 6 RS485 Rx 7 GND 8 GND 9 Power supply 5 V 10 Power supply 5 V WARNING Never plug anything on the USB cable when power is supplied through the external J2 connector CN5 Newport comer Seen 27 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components 5 4 1 USB Communication Using a Type A mini USB Cable Install the software supplied with the CD on your PC and check that JS3 jumpers are set on pins 9 amp 10 and 11 12 Apply the following settings to the COM port of your PC e Baud Rate 921600 e Data Bits 8 e Parity None e Stop Bits I e Flow Control None Termination Character CR LF 5 4 2 RS232 Communication Install the software supplied with the CD on your PC and check that JS1 jumpers are set on pins 1 amp 2 and 3 amp 4 Apply the following settings to the COM port of your PC Baud Rate 115200 e Data Bits 8 e Parity None e Stop Bits I e Flow Control None Termination Character CR LF 5 4 3 RS485 Communication Install the software supplied with the CD on your PC and check that JS2 jumpers are set on pins 5 amp 6 and 7 amp 8 Apply the following settings to the COM port of your PC Baud Rate 115200 e Data Bits 8 e Parity None e Stop Bits I e Flow Control
8. declare that the accompanying product identified with the C mark complies with requirements of the Electromagnetic Compatibility Directive 2004 108 EC TYPE OF EQUIPMENT Electrical equipment for measurement control and laboratory use STANDARDS APPLIED Compliance was demonstrated to the following standards to the extent applicable NF EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Class A This equipment meets NF EN 55011 2003 Class A NF EN 61000 4 2 2001 NF EN 61000 4 3 2002 NF EN 61000 4 4 2005 NF EN 61000 4 5 2001 NF EN 61000 4 6 2003 NF EN 61000 4 11 2004 IEC 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use 03 25 09 Dominique DEVIDAL Quality Manager Zone Industrielle 45340 Beaune la Rolande France EDH0224En5010 12 09 vi Agilis Series Piezo Motor Driven Components Safety Precautions Definitions and Symbols The following terms and symbols are used in this documentation CE Mark European Union CE Mark The CE mark indicates that the equipment has been designed and tested to comply with all applicable European Union CE regulations C US CSA Mark qi C US CSA Mark The presence of the C US CSA mark indicates that the equipment has been designed tested and certified as complying with all applicable US and Canadian safety standards
9. is not active PH3 Limit switch of channel 1 and channel 2 are active NOTE If the device has no limit switch the return is always PHO Errors 0 No error 2 Axis must not be specified 3 Parameter must not be specified 5 Notallowed in local mode controller must be in remote mode QD Newport basere S s 19 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components Syntax Parameters Description Range Input tests Description Returns Errors Syntax Parameters Input tests Description Returns Errors EDH0224En5010 12 09 PR Relative move xxPRnn or xxPR xx Axis number nn Number of steps xx lor2 nn Signed integer between 2 147 483 648 and 2 147 483 647 equivalent to long integer in C 2 7 2 1 Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis Check the number of steps has to be integer can be negative Starts a relative move of nn steps with step amplitude defined by the SU command default 16 None 0 No error 2 _ Axis out of range must be I or 2 3 Wrong format for nn must be integer 5 Notallowed in local mode controller must be in remote mode 6 Notallowed state controller must be in state 0 RS Reset controller RS None Check that axis is not specified Check that parame
10. the step amplitude in the forward direction If the parameter is negative it will set the step amplitude in the backward direction NOTE The step amplitude is a relative measure The step amplitude corresponds to the amplitude of the electrical signal sent to the Agilis motor There is no linear correlation between the step amplitude and the effective motion size In particular too low a setting for the step amplitude may result in no output motion Also the same step amplitude setting for forward and backward direction may result in different size motion steps Also the motion step size corresponding to a step amplitude setting may vary by position load and throughout the life time of the product The step amplitude setting is not stored after power down The default value after power up is 16 This step size is used with the commands PR JA1 JA4 MV1 and MV4 but not with JA2 JA3 MV2 and MV3 JA2 JA3 MV2 MV3 use the maximum step amplitude equivalent to xxSU50 setting QAD Newport posten dom 21 EDHO224En5010 12 09 Agilis Series Piezo Motor Driven Components Returns No return if step amplitude is specified If takes place of nn this command returns the step amplitude setting in forward direction If takes place of nn this command returns the step amplitude setting in backward direction Errors 0 Noerror 2 Axis out of range must be I or 2 3 Wrong
11. v v PH Tell limit status v v v v v PR Relative move v v v RS Reset v v v v v v v ST Stop motion v v v v v v SU Set step amplitude v v v v TE Get error v v v v v v v TP Tell number of steps v v v v v TS Get status v v v v v v v VE Firmware version v v v v v v v ZP Zero position v v v NOTE Commands MA MV and PA require that the device has an electrical limit switch e g model AG LS25 AG M050L and AG M100L CO Newport EDH0224En5010 12 09 14 Agilis Series Piezo Motor Driven Components Syntax Parameters Description Range Input tests Description Returns Errors Syntax Parameters Description Range Input tests Description IO Newport JA Start jog motion or get jog mode xxJAnn or xx JA xx Axis number nn Jog mode or xx Il1to2 nn 4 3 2 1 0 1 2 34 Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis Check jog mode integer ranging between 4 and 4 Starts a jog motion at a defined speed or returns jog mode Defined steps are steps with step amplitude defined by the SU command default 16 Max amplitude steps are equivalent to step amplitude 50 4 Negative direction 666 steps s at defined step amplitude 3 Negative direction 1700 steps s at max step amplitude 2 Negative direction 100 step s at max step amplitude 1 Negative direction 5 st
12. HOLES C BORED FOR 8 32 M4 SCREWS a OPTIC MOUNTING NYLON TIP SET SCREW 5 64 OR 2MM HEX 9 50 OPTICS 1 2 Y 322 50 127 Y 50 e 12 7 D 1 27 re 32 2 gt OPTIC MOUNTING NYLON TIP SET SCREW 5 64 OR ZMM HEX 01 OPTICS EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components 2 0 AG LS25 xx Linear Stages 2 1 Specifications AG LS25 AG LS25 27 Travel range 0 47 in 12 mm 1 06 in 27 mm Minimum incremental motion um 0 05 0 1 Absolute positioning accuracy um 100 250 Maximum speed mm s gt 0 5 with no axial load 0 4 with no axial load gt 0 2 with 1 7 N axial load 0 15 with 1 7 N axial load Max normal load capacity N 3 max 40 mm cantilever 2 5 max 40 mm cantilever Holding force N 3 3 Axial load capacity N 2 1 5 Pitch Yaw urad 200 200 Material Stainless steel Limits Mechanical hard stops and precision electrical limits switch Weight oz g without cable 2 5 70 without cable 4 4 125 with cable 3 4 95 with cable 5 3 150 Cable 1 2 m length 4 wire mini Din connector Can extend cable length using AG MD4 1 5 extension cable Life time gt 1000 m gt 500 000 cycles of 1 mm motion D The step size for forward and backward direction is adjustable With default settings the step size for the forward direction varies from the step size for the backward direction and may be larger than 50 nm Individual step
13. Piezo Motor Driven Components User s Manual Newport Experience Solutions Agilis Series Piezo Motor Driven Components GO Newport EDH0224En5010 12 09 bites Agilis Series Piezo Motor Driven Components Table of Contents 1 0 1 1 1 2 2 0 2 22 3 0 3 1 3 2 4 0 4 1 4 2 4 3 4 4 4 5 4 6 4 7 IO Newport VIN IN FUD TEN EE V Danes PrO PE vau aug VI VS and Ee Vili Piezo Motor Driven Components ecce eee eee ee eee eee etes eee eee sone 1 AG M050 and AG M100 Optical Mounts eee e ee eee eee eene 2 S D CO LLI as anda DT 2 WTC VS as va GO SA EEE Ud RR Ede 2 AG LS25 xx BE 3 EIERE 3 Dim SOS 3 AE GE NE a Ss 3 CE 4 2 2 3 AG LS25 27 Inserter for 1 Diameter Optics as 4 AG PR100 Rotation Stage cccccsscccsssccsssccssscccsssccssscccsssccssscessscesess 5 PS CMC 18 010 gids ne i EEE 5 NNN 5 AG UCZ Piezo NEE 6 DSC OR 8 0 T UE 6 MT NN 6 EE 6 1 dd 7 USB CommunicatiON SEERE 8 NNN va ona ms us as s m te 9 e HE SN 12 GER EE 17 2 1 2 MN 13 A S DMA BIEN TOT T 14 414 Command Set SUMIMALY deeg 14 JA Start jog motion or get jog mode eee aa 15 MA Measure current position aaa 15 ME ANN 16 MR CL OT MORE MOJE iae ee 17 iii EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components EDH0224En5010 12 09 MV Mowe to lmit E 17 PA Absolute ue 18
14. ame as though you were pressing the push buttons on the physical controller See also chapter 4 4 for details IO Newport EDH0224En5010 12 09 10 Experience Souton Agilis Series Piezo Motor Driven Components A right mouse click in the window opens the main menu again With Select controller you can select a new controller from the list When selecting a different controller the new controller is set to remote mode and the previous controller is set back to local mode NOTE When running several Agilis Util applications in parallel it is possible to select the same controller from different applications However this will generate an error as one controller can only be in remote mode to one application at any given time NOTE The Agilis Util software will not detect controllers that are connected to the computer after communication is first opened To operate a new controller connected to your computer close all Agilis Util applications and start them again NOTE In order to manage all connected controllers and open applications the Agilis Util software uses a temporary file AgilisDevices TMP that is located in the same folder as the Agilis Util software In the unlikely event of a computer crash while an Agilis Util software is open this temporary file might not be removed from your computer If this is the case please delete this file manually and start your application again When selecting Relative mov
15. anual There are no user serviceable parts inside the Agilis system components If this equipment is used in a manner not specified within this manual the protection provided by the equipment may be impaired Manual Conventions The following conventions are used in this manual Acronyms appear on the first occurrence enclosed in parentheses following their definition An acronym is a word formed from the initial letters of a string of words Example Read Only Memory ROM Italics or boldface text are used as an alternative to quotation marks to highlight special text such as keyboard keys onscreen buttons or text entries Examples Press Enter AU command IO Newport Vili Agilis Series Piezo Motor Driven Components Warnings and Cautions PLEASE READ THE FOLLOWING RECOMMENDATIONS CAREFULLY BEFORE USING YOUR AG UC2 CONTROLLER FOR THE FIRST TIME CAUTION Do not place any Agilis component in a hostile environment such as X Rays hard UV or in a vacuum environment Do not place a vacuum compatible Agilis component V6 in a hostile environment or in a vacuum environment less than 10 hPa CAUTION Do not leave this actuator in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging WARNING Do not introduce anything in the holes of AG UC2 or AG UC8 controll
16. e from the main menu the following window appears Relative move Channel 1 Channel 2 Number of steps 0 0 gt gt lt lt gt gt Relative move screen When selecting Terminal from the main menu the following window will appear In the Terminal screen all ASCII commands can be used see chapter 4 6 for details Terminal EJ Terminal screen When selecting Status from the main menu the following window will appear For status information please refer to the TS command details QAD Newport Experience Solutions 1 1 EDH0224En50 1 0 mm 1 2 09 Agilis Series Piezo Motor Driven Components Agilis status x Channel 1 0 Channel 2 0 Status screen When selecting Controller Version from the main menu the following window will appear Agilis version x Agilis uc2 v1 0 0 Controller version screen When selecting About from the main menu the following window will appear Experience Solutions About screen 4 7 ASCII Command Set This section describes the two letter ASCII commands that may be used to configure and operate the AG UC2 controller when the controller is connected to a computer These commands work with LabView Visual Basic C or any other computer application that can issue ASCII commands via a computer COM port Newport s Agilis Util application described in previous section of this ma
17. ected controller You can now fully operate the controller from the software You can select another pair of motors by scrolling down and selecting from channel 71 to channel Z4 as shown below AGILIS 1 UCS Channel 1 When selecting Relative move from the main menu the following window opens Relative motion AGILIS 1 UC8 Channel 1 Channel 2 Number of steps pe Og Relative move screen IO Newport Experience Solutions 31 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components When selecting Terminal from the main menu the following window will open In the Terminal screen all ASCII commands can be used see chapter 4 6 for details Terminal AGILIS 1 UC8 ES Terminal screen When selecting Status from the main menu the following window will open For status information please refer to the TS command details Agilis status AGILIS 1 UC8 ES Channel 1 Channel 82 Status screen When selecting Controller Version from the main menu the following window will open Agilis controller version AGILIS 1 _ AG UC8 v2 1 1 UK Controller version screen When selecting About from the main menu the following window will open About screen CO Newport EDH0224En5010 12 09 32 Agilis Series Piezo Motor Driven Components 5 7 Syntax Parameters Description
18. epping currently executing a PR command 2 Jogging currently executing a JA command with command parameter different than 0 3 Moving to limit currently executing MV MA PA commands 0 Noerror 3 Parameter must not be specified 23 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components Syntax Parameters Input tests Description Returns Errors Syntax Parameters Description Range Input tests Description Returns Errors EDH0224En5010 12 09 VE Get controller firmware version VE None Check that axis is not specified Check that parameter is not specified Returns the firmware version of the controller Returns the firmware version of the controller 0 No error 2 Axis must not be specified 3 Parameter must not be specified ZP Zero position xxZP XX Axis number XX lor2 Check controller is in remote mode Check the axis 1 or 2 Check the status of the axis must be 0 Check that parameter is not specified Resets the step counter to zero See TP command for further details None 0 Noerror 2 Axis out of range must be I or 2 3 Parameter must not be specified 5 Notallowed in local mode controller must be in remote mode 6 Notallowed state axis must not be in state 3 ND Newport 2 4 Experience Solutors Agilis Series Piezo Motor Driven Component
19. eps s at defined step amplitude 0 No move go to READY state 1 Positive direction 5 steps s at defined step amplitude 2 Positive direction 100 steps s at max step amplitude 3 Positive direction 1700 steps s at max step amplitude 4 Positive direction 666 steps s at defined step amplitude No return if jog mode is specified If the sign takes place of nn this command returns the current jog mode 0 No error 2 Axis out of range must be I or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be 4 3 2 1 0 1 2 3 or 4 5 Notallowed in local mode controller must be in remote mode 6 _ Notallowed state controller must be in state 0 or 2 MA Measure current position xxMA XX Axis number xx lor2 Check controller is in remote mode Check the current state of the axis Check the axis 1 or 2 Starts a process to measure the current position see below During the execution of the command the USB communication is interrupted After completion the communication is opened again The execution of the command can last up to 2 minutes 15 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components Returns Errors Syntax Parameters Input tests Description Returns Errors EDH0224En5010 12 09 NOTE The MA command functions properly only with devices that feature a lim
20. ers or spill any liquid on the product WARNING Do not switch on AG UC2 or AG UCS controllers before connecting all the cables WARNING Do not connect anything to AG UC2 or AG UCS controllers except the cables provided by Newport for this specific product CAUTION Our vacuum compatible Agilis components V6 are delivered equipped with a vacuum compatible cable but a not vacuum compatible connector So the customer has to cut the cable to use one part in vacuum environment and the other part to go from his feed through to the controller Customer has in charge to connect both part of this cut cable on its feed through WARNING Do not use AG UC2 or AG UCS controllers after the unit experiences abnormal conditions that may compromise safety and functionality Newport cannot be held liable if the above recommendations are not followed CAUTION AG UCSPC boards are very likely to be damaged by electrostatic discharge ESD Please use ESD protective measures when unpacking and handling these devices QAD Newport Nach ix EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components GO Newport EDH0224En5010 12 09 x dl miren Agilis Series Piezo Motor Driven Components Piezo Motor Driven Components Agilis Agilis components Newport s new piezo motor driven components take a completely new design approach to the adjustments needed for many laser setups Agilis components p
21. es Agilis Controller versions are able to control up to 8 piezoelectric motors Multi Axes Agilis controllers drive piezoelectric motors by pairs The CC command allows selecting the desired motor For example to control motor number 8 Axis 2 on channel 4 one has to select pair number 4 with the command CC4 and then use the index of the second motor of the pair for example 2PR500 to execute a relative move of 500 steps Communication Type Selection Available on AG UC8PC Only The AG UC8PC controller is able to communicate through 3 different protocols USB RS232 or RS485 The board has a dedicated USB connector and a HE10 connector where the two RS protocols are available see below table for connector pins assignment Standard Mini USB Connector COM Selection Header Connector COM External Power Supply IO Newport Experience Solutions 26 Agilis Series Piezo Motor Driven Components On the AG UC8PC version jumpers on the electronic board do the communication type selection For each communication type only one set of jumpers should be placed at a time Jumper Set COM JS1 1 amp 2 3 amp 4 RS232 JS2 5 amp 6 7 amp 8 RS485 JS3 9 amp 10 11 amp 12 USB The required connections schemes depending on the jumper location is indicated on the figure below Communication parameters are indicated in the table below Protocol Speed Jumper RS232 115200 JS1 RS485 115200 JS2
22. es the fastest motion at 1700 amp step amplitude E A steps s The middle button provides 100 steps s D h speed Kam motion at steps s i e and max amp jo step amplitude Mounting holes for 1 4 M6 screws IO Newport Experience Solutions EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components Connector identification Limit switch detected Change reverse step size Low speed at 5 steps s and defined step amplitude Medium speed at 100 steps s and max step amplitude Reverse jog High speed at 1700 steps s and max step amplitude us LJ N ce YUL BEBE EDH0224En5010 12 09 Left Right Channel Channel Y Y Mounting holes for 1 4 M6 screws ER BEB nnm Change forward step size High speed at 1700 steps s and max step amplitude Medium speed at 100 steps s and max step amplitude Low speed at 5 steps s and defined step amplitude Forward jog O Step amplitude size adjustment buttons NOTE When using the step amplitude buttons you must be able to sense the motion Hence you either must be in the high sensitivity range of your application or you need to use an external feedback sensor like a quad cell or an autocollimator to sense the motion of the mirror mount There are 2 step size adjustment buttons for each channel Forward upper button and reverse lower button buttons control the step amp
23. eturned Model Description Reasons of return of goods please list any specific problems __ Return authorization Please obtain prior to return of item Your Local Representative Tel EDH0224En5010 12 09 Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 949 253 1461 or 800 222 6440 x31461 e mail sales newport com Technical Support Tel 949 253 1406 or 800 222 6440 x31406 e mail tech Onewport com Service RMAs amp Returns Tel 949 253 1694 or 800 222 6440 x31694 e mail istd service Onewport com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde Bat B ZI Bois de l pine BP189 91006 Evry Cedex France Sales Tel 433 0 1 60 91 68 68 e mail france Onewport fr com Technical Support e mail tech europe newport com Service amp Returns Tel 33 0 2 38 40 51 55
24. ewport Experience Solutions EDH0224En5010 12 09 4 Agilis Series Piezo Motor Driven Components 3 0 AG PR100 Rotation Stage 3 1 Specifications Optics diameter 1 0 in 25 4 mm Max optics thickness 0 40 in 10 mm Travel range 360 continuous Minimum incremental motion 5 urad 1 arcsec Maximum speed 2 s Wobble 100 urad Limits None Weigh 135 g Graduation 3 Cable 1 2 m length 4 wire mini Din connector Can extend cable length using AG MD4 1 5 extension cable D The step size for forward and backward direction is adjustable With default settings the step size for the forward direction varies from the step size for the backward direction and may be larger than 5 urad Individual steps are not 100 repeatable 3 2 Dimensions 3 HOLES 8 32 THD USABLE DEPTH 17 4 5 Aperture 1 1 16 20 UN 2B THD 3 HOLES M4 THD USABLE DEPTH 17 4 5 4 PIN CABLE 2 07 1 8 MINI DIN CONNECTOR LENGTH 45 1140 IO Newport mmm pes Sae 5 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components 4 0 AG UC2 Piezo Controller EDH0224En5010 12 09 4 1 4 2 4 3 te EX AG UC2 Agilis controller Description The Agilis AG UC2 controller provides convenient push button remote control and USB computer control of Agilis components For each axis two rows of push buttons are available for step size settings precise low speed adjustments and fast coar
25. format for nn must be integer 4 Wrong value for nn must be an integer between 50 and 50 not zero 5 _ Not allowed in local mode controller must be in remote mode 6 Notallowed state controller must be in state 0 TE Get error of previous command Syntax TE Parameters None Input tests Check that axis is not specified Check that parameter is not specified Description Returns the error code of the previous command Each command generates an error code including 0 for NO ERROR This error code can be queried with the TE command For a safe program flow it is recommended to always query the command error after each command execution The following error codes are defined Returns Error code of the previous command The following error codes are defined Error code Description 0 No error 1 Unknown command 2 Axis out of range must be 1 or 2 or must not be specified 3 Wrong format for parameter nn or must not be specified 4 Parameter nn out of range 5 Not allowed in local mode 6 Not allowed in current state Errors 0 Noerror 2 Axis must not be specified 3 Parameter must not be specified gt Newport EDH0224En5010 12 09 22 m Agilis Series Piezo Motor Driven Components Syntax Parameters Description Range Input tests Description Returns Errors Syntax Parameters Description Range Input tests Description Returns Errors IO Newport TP
26. it switch like models AG LS25 AG M050L and AG M100L Returns the distance of the current position to the limit in 1 1000th of the total travel 0 Noerror 2 _ Axis out of range must be I or 2 3 Wrong format for nn must be integer 5 Notallowed in local mode controller must be in remote mode 6 Notallowed state controller must be in state 0 Count steps to limit pe mg Lount steps from limit to limit Move to initial position Process of position measurement ML Set to local mode ML None Check that axis is not specified Check that parameter is not specified Sets the controller to local mode In local mode the pushbuttons on the controller are enabled and all commands that configure or operate the controller are disabled To go to remote mode use the MR command At power up the controller is always in local mode None 0 No error 2 Axis must not be specified 3 Parameter must not be specified IO Newport 16 Ad tert Agilis Series Piezo Motor Driven Components Syntax Parameters Input tests Description Returns Errors Syntax Parameters Description Range Input tests Description IO Newport MR Set to remote mode MR None Check that axis is not specified Check that parameter is not specified Check the current state of the two axes need to be 0 Sets the controller to re
27. ition must be integer between 0 and 1000 included Starts a process to move to an absolute position see below During the execution of the command the USB communication is interrupted After completion the communication is opened again The execution of the command can last up to 2 minutes NOTE The PA command functions properly only with devices that feature a limit switch like models AG LS25 AG M050L and AG M100L None ND Newport 1 8 Experience Solutors Agilis Series Piezo Motor Driven Components Errors 0 Noerror 2 _ Axis out of range must be I or 2 3 Wrong format for nn must be integer 4 Wrong value for nn must be between 0 and 1000 included 5 Notallowed in local mode controller must be in remote mode 6 Not allowed state controller must be in state 0 Move to limit zj Count steps between limits Move back to limit Move nn 1000 steps between limits PH Tell limit status Syntax PH Parameters None Input tests Check controller is in remote mode Check that axis is not specified Check that parameter is not specified Description Returns the limits switch status of the controller Returns Possible returns are Description PHO No limit switch is active PHI Limit switch of channel 1 is active limit switch of channel Z2 is not active PH2 Limit switch of channel Z2 1s active limit switch of channel 1
28. litude adjustment The default step size at power on 1s a medium step size Pressing and holding a button initiates the amplitude selection beginning with a very low step amplitude With every next step a slightly large step amplitude is used When the button is released the last step amplitude is saved until power up or the next adjustment is made During the first couple of steps you may not sense any motion as the step amplitude might be too low to result in consistent motion Hence release the button only when sensing a real motion Test the new step amplitude at different positions When results are inconsistent repeat the step amplitude adjustment and select a larger step amplitude To restore the default step amplitude power down the controller and then power it up NOTE As in any open loop system the step size is not always consistent Agilis technology can provide the required sensitivity but not necessarily repeatable steps in an open loop condition However a feedback sensor is recommended to fully utilize the functionality and sensitivity of the Agilis mirror mount system 6 A red LED indicates a detected limit switch 4 5 USB Communication Using a Type A A USB Cable Install the software supplied with the CD on your PC Apply the following settings to the COM port of your PC Baud Rate 921600 Data Bits 8 Parity None Stop Bits 1 Flow Control None Termination Character CR LF CO Newpor
29. mote mode In remote mode all commands are enabled and the pushbuttons on the controller are disabled To go to local mode use the ML command None 0 No error 2 Axis must not be specified 3 Parameter must not be specified 6 The two axis must be in state 0 MV Move to limit xxMVnn or xxMV xx Axis number nn Jog mode or xx lor2 nn 4 3 2 1 0 1 2 3 4 Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be 0 or 3 Check jog mode integer ranging between 4 and 4 or 7 Starts a jog motion at a defined speed to the limit and stops automatically when the limit is activated See JA command for details NOTE The MA command functions properly only with devices that feature a limit switch like models AG LS25 AG M050L and AG M100L NOTE No motion will be executed when the limit switch is active NOTE The MV 4 and MV4 commands are useful to calibrate the average step size at a certain step amplitude by counting the number of steps between the limits in forward and reverse direction They are used as part of the MA and PA commands In order to measure the number of steps between the limits you can use the following sequence of commands IMV 3 Move to the negative limit 1PH If reply is 1PH1 or 1PH3 then 1SUnn nn value of step amplitude you want to use 17 EDH0224En5010
30. nge the controller name by simple typing into the Controller Name field but you can not change the serial number The serial number is a unique identifier of the controller hardware The controller names are saved in a file on the PC So when connecting the same controller to the same PC the same controller name is displayed Select a controller from the list and click Connect When connected the controller is in remote mode and the push buttons on the physical controller are disabled The software window now looks like the following Channel Channel 1 2 Y Y Set step amplitude of channel 1 in forward direction Value must be Controller between 1 and 50 The default value AGILIS UC2 1 name is 25 See command SU Set step amplitude or get step amplitude setting for more details Set step amplitude of channel 1 in reverse direction CU High speed jog with 1700 steps s at max step amplitude Medium speed jog with 100 steps s at max step amplitude Forward mim m Low speed jog with 5 steps s at defined step amplitude default 25 O E Green LED indicates controller is in m im remote mode and OK A red LED f indicates an error Move cursor vo e Click here to close the application over the LED to get error information Agilis Util screen with a connected controller You can now fully operate the controller from the software The function of the jog buttons is exactly the s
31. nual uses these commands 4 7 1 Syntax The AG UC2 is a command driven controller The general format of a command is a two letter ASCII character preceded axis parameters and followed by parameters specific to the command gt Newport EDH0224En5010 12 09 12 Agilis Series Piezo Motor Driven Components IO Newport 4 7 2 Command format mann nn Axis number 1 or 2 AA Command name xx Optional or required value or to query current value Both upper and lower case characters are accepted Depending on the command it can have an optional or required prefix nn for the axis number 1 or 2 and or a suffix xx value or a Blank spaces Blanks are allowed and ignored in any position including inside a numerical value The following two commands are eguivalent but the first example might be confusing 2 PR1 000 2PR1000 Command terminator Commands are executed as the command terminator CRLF carriage return line feed ASCII 13 and ASCII 10 is received The controller will analyze the received string If the command is valid and its parameters are in the specified range it will be executed Otherwise it will memorize an error After the execution of the command all remaining characters in the input string if any will be ignored In particular it is not possible to concatenate several commands on a single string from the PC Each command will properly handle the memorizati
32. on of related errors that can be accessed with the TE command Operating Modes The Agilis AG UC2 provides two modes of operation In local mode default mode after powering up the controller the push buttons are enabled and all commands that configure or operate the controller are disabled Only commands that are used to monitor or diagnose the controller are enabled In remote mode all push buttons are disabled and all ASCII commands are enabled To go from local mode to remote mode use the command MR To go from remote mode to local mode use the command ML 13 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components 4 7 3 State Diagram The AG UC2 uses different states for each axis Not all commands are accepted in all states see sections Command Set Summary for details r Y Y Initial 4 E cn Stepping Jogging Moving to Limit N ST JA ST MV ST PR JA Y MA MV PA Y 0 Ready Vu The numbers represent the values of the status that can be gueried with the TS command Shown are only transitions made by command Internal transitions like from STEPPING to READY attheendofa PRcommand are not shown State diagram 4 7 4 Command Set Summary Short State Type Modes Name Description 0 1 2 3 Set Query Local Remote JA Jog v v v v v MA Measure position v v v ML Local mode v v v v v v v MR Remote mode v v v v MV Move to limit v v v v v PA Absolute move v
33. owing image of the AG UC2 controller will open H m wm m m m m m m mn m m m Agilis Util screen after start no controller selected QD Newport comer Seen 29 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components A right mouse click in the window opens the main menu im m m m m 1 m H m in im C m D m e c amp Select controler A right mouse click in the window opens the main menu Click Select controller The following window will open Controllers Senal number FTRD ZwB None Select controller FTRDZZWB AGILIS 1 3 Controller name Select controller screen In the figure above one controller has been detected You can change the controller name by simple typing into the field but you can not change the serial number The serial number is a unique identifier referring to the hardware of the controller The controller names are memorized in a file on the PC So when connecting the same controller to the same PC the same controller name is displayed Select a controller from the list and click Connect When connected the controller is ready to work on the default selected channel Channel 1 in the example below EDH0224En5010 12 09 30 CO Newport Agilis Series Piezo Motor Driven Components AGILIS 1 UC Chornel 1 m C wmm mmm m Agilis Util screen with a conn
34. rovide the ultra high adjustment sensitivity and convenient remote operation of a motorized component at the price and size of a manual mount Why Agilis Mechanical friction and the effects of human operation limit the precision of many optical adjustments In theory it is possible to achieve sub ym adjustment sensitivity with very fine mechanics and differential screws However in practice the lateral forces applied to a component during an adjustment often have an excessive effect making alignments lengthy and frustrating Also many optical experiments are extremely sensitive to environmental factors and provide consistent results only when shielded well against external influences Motorized mounts overcome the limits of manual components but are typically costly and bulky restricting their use for systems integration or simple remote operation in tight spaces Agilis components provide a lower cost solution in a miniature size without compromising adjustment sensitivity speed or position stability Agilis components feature Newport s new proprietary non resonant piezo step direct motors The motor is directly coupled to the moving platen When idle spring forces lock the position for true set and forget long term stability Agilis components have a faster adjustment speed than alternative screw driven designs and are free of the problems associated with backlash or hysteresis In contrast to ultrasonic motors the Agilis non re
35. s 5 0 AG UC amp AG UCSPC Multi Axis Piezo Controllers CAUTION AG UCSPC boards are very likely to be damaged by electrostatic discharge ESD Please use ESD protective measures when unpacking and handling these devices 5 1 Description Both Agilis AG UC8 and AG UC8PC controllers provide the capability to drive up to 8 piezoelectric motors They can be powered through the USB port directly from the computer while the AG UCSPC version can also be powered from an external power supply A software utility allows driving the two selected motors at a time and switching from pair to pair A set of ASCII commands and LabViewVI s for all functions are provided 5 2 Modes of Operation Both controllers can be fully operated from a PC either from the suppled Agilis Software Utility see section 5 5 for details or by sending ASCII commands see section 5 6 for details 5 3 Motor Selection Channel 4 lt to Channel 1 Mini USB Axis 2 Axis 1 Axis 2 Axis 1 LED Communication Type Selection Headers Extra Communication and Power Supply Connector AG UCS PC Controller Board CY Newport Experience Solutors 25 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components EDH0224En5010 12 09 5 4 lt Feet M As AGILIS Conmteother s Anina Ce a b CHANNEL 1 CHANNEL 2 CHANNEL 3 CHANNEL 4 Axis 1 Axis 2 Axis 1 Axis 2 Axis 1 Axis 2 Axis I Axis 2 AG UCS Controller Both Multi Ax
36. s are not 100 repeatable For absolute positioning the stage determines the average step size by counting the number of steps between the limits The execution of an absolute positioning command may takes up to 80 s 2 2 Dimensions NOTE For XY assemblies of AG LS25 use 4 x TC M3x4 screws supplied with each stage For mounting AG LS25 stages to B Series adapter plates M SDS25 or M DS25 use 4 x TC M2x4 screws plus washers supplied with each stage 2 2 1 AG LS25 1 02 E 26 a HOLE M4 THD USABLE DEPTH 12 3 1 02 26 l Y d 3 4 CLR HOLES FOR M3 SCREWS 4 HOLES M3 THD ON SOR 79 20 SOR 79 20 USABLE DEPTH 14 3 5 2 CABLES 0 07 1 8 4 PIN MINI DIN CONNECTOR LENGTH 45 1140 g IO Newport Experience Solutions 3 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components 2 2 2 AG LS25 27 1 97 51 HOLE M4 THD 12 12 HOLE 8 32 THD 5 50 13 USABLEDEPTH 12 3 mF 3 USABLE DEPTH 12 3 e 1 38 35 65 16 5 Y HOLE 8 32 THD HOLE M4 THD 6 HOLES M3 THD 2 HOLES C BORED USABLE DEPTH 24 6 USABLE DEPTH 24 6 79 20 SPASING FOR M3 SCREWS USABLE DEPTH 14 3 5 79 20 SPACING 4 PIN 2 CABLES 0 07 1 8 MINI DIN CONNECTOR LENGTH 45 1140 2 2 3 AG LS25 27 Inserter for 1 Diameter Optics AG LS25 27 D ATV UD AG M AJL KR T G MIOQOI IO N
37. se motion Power is supplied through the USB port either directly from the computer or from an independent USB power supply such as the USB CH A software utility allows mimicking remotely the operation of the controller buttons through the computer and selecting and operating a specific Agilis mount as needed A set of ASCII commands and LabViewVI s for all functions are provided as well Modes of Operation The Agilis AG UC2 provides two modes of operation In local mode default setting at power up the push buttons are enabled and most computer functions are disabled see table page 13 The local operation is described in detail in section 4 4 In remote mode all push buttons are disabled and the controller can be fully operated from a PC either from the supplied Agilis Util software see section 4 5 for details or by sending ASCII commands see section 4 6 for details To switch from local to remote mode use the Agilis Util software see section 4 4 for details or send the command MR To switch from remote to local mode either close the Agilis Util software or connect to another controller through the software and send the ML command or disconnect and reconnect the controller to power Getting Started Connect the two cables from the Agilis optical mount to the AG UC2 controller Connect the Agilis controller to a powered USB port or to the USB power supply Newport part number USB CH GO Newport Agilis Series Piezo Mo
38. sonant motor concept makes small adjustments more predictable with its 50 nm incremental motion capability ideal for ultra sensitive optical alignments Agilis components must be driven by the AG UC2 AG UC8 or AG UC8PC controllers AD Newport 1 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components 1 0 NOTE The V6 versions are vacuum compatible up to 10 hPa 1 2 Rear View AG MO50L V6 2 x 2 cable Rear View AG M100L V6 2 x 2 cable AG M050 and AG M100 Optical Mounts Specifications AG M050 0 5 in 12 7 mm 0 16 to 0 24 in 4 to 6 mm Optics diameter Allowable thickness of optics Angular range 2 Adjustment sensitivity 2 urad Absolute positioning Accuracy Repeatability V 0 05 with models AG M050L and AG M100L Weight 25g Cable length AG M100 1 0 in 25 4 mm 0 16 to 0 24 in 4 to 6 mm I urad 0 05 85 g 1 2 m length 4 wire mini DIN connector Can extend cable length using AG MD4 1 5 extension cable D Max position deviation before an MA command measure absolute current position and after a PA command move to absolute position 9 Available with models AG MOSOL V6 and AG M100L V6 only Dimensions Models AG M050N V6 Rear View gt Gan Le AG MO50N 18 2 x 1 cable 45 P 2 HOLES C BORED FOR 8 32 M4 SCREWS Models AG M100N V6 Rear View AG M100N 2 x 1 cable 2
39. sportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part This warranty also does not apply to fuses This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages Copyright 2009 by Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual is provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings v EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components EU Declaration of Conformity Agilis Series Universal AG UC2 Agilis 2 Axis Hand Held and Computer Controlled Controller Newport 8 AG UC8 amp AG UC8PC Multi Axis Controllers AG MxxN V6 Piezo Motor Driven Optical mounts AG PR100 Piezo Motor Driven Rotation Stage AG LS25 xx Piezo Motor Driven Linear Stages AG MxxL V6 Piezo Motor Driven Optical Mounts with End of Runs Experience Solutions Year C mark affixed 2009 EC Declaration of Conformity We
40. t Agilis Series Piezo Motor Driven Components 4 6 Agilis Util Software The Agilis Util software provides access to all functions of the Agilis controller It is compatible with PC s with a minimum of 64 MB of RAM and Windows 98 2000 NT or XP operating system To install the Agilis Util software load the distribution CD The program gives you the option of where to load the files or you can use the default directory C Program Files Newport AGILISTools AGILIS UC2 User Tool After installation is complete reboot your PC and open AgilisUserTool by double clicking on the newly created icon The following image of the AG UC2 controller will appear m m m m RR wmm mmm w im amp Agilis Util screen after start no controller selected A right mouse click anywhere in the window opens the main menu except on keys or on the red cross Sent controber im Jm O m ces m m D m m m m m m m m e c A right mouse click in the window opens the main menu CO Newport hi nietos 9 EDH0224En5010 12 09 Agilis Series Piezo Motor Driven Components Click Select controller The following window will open Controllers Select a controller Serial number Controller name FTUSPZZV AGILIS UC2 1 None None No selected controller Select a controller screen In the figure above one controller has been detected You can cha
41. ter is not specified Resets the controller All temporary settings are reset to default and the controller is in local mode None 0 No error 2 Axis must not be specified 3 Parameter must not be specified ND Newport 2 0 Experience Solutors Agilis Series Piezo Motor Driven Components ST Stop motion Syntax xxST Parameters Description xx Axis number Range xx Lor Input tests Check controller is in remote mode Check the axis 1 or 2 Check that parameter is not specified Description Stops the motion on the defined axis Sets the state to ready Returns None Errors 0 Noerror 2 _ Axis out of range must be I or 2 3 Parameter must not be specified 5 _ Not allowed in local mode controller must be in remote mode SU Set step amplitude or get step amplitude setting Syntax xxSUnn or xxSU or xxSU Parameters Description xx Axis number nn Signed step amplitude or or Range xx lor2 nn Integer between 50 and 50 included except zero Input tests Check controller is in remote mode Check the axis 1 or 2 Check the current state of the axis must be 0 Check the format of the step amplitude has to be an integer between 50 and 50 included except zero Description Sets the step amplitude step size in positive or negative direction If the parameter is positive it will set
42. tor Driven Components Type A USB connector Qu ef ei e e lt _ lt BW Axis 2 Axis 1 Right Left AG UC2 controller connectors USB CH USB power supply with changeable international power outlet adapters 4 4 Local Operation Jog buttons Left Right Channel Channel There are 6 jog buttons for each channel Holding down any of the 6 buttons for less than one second Y Y results in a single step motion at the defined step Y amplitude Otherwise holding a button for more than Connector d TE l h identification a second results in continuous motion at the designated button speed Change forward O On each row of buttons the upper three buttons mE Step size are assigned to the forward motion When the Limit switch 2 lowest of the three button positions is pressed detected E E B A J TER and held for more than one second the motor g is at 1700 steps s moves at 5 steps s The medium button moves Change and max the piezo at 100 steps s The fastest forward reverse step size step amplitude motion at 1700 steps s is performed with the top E mana Led oy button position re SH aa ds The remaining three lower buttons on each row and AU J 1 ee Tw are assigned to the reverse motion direction The P LES 3 RI ple ad third highest button position enables 5 steps s is gd A spang and defined speed when pressed and held The lowest button RV E K step amplitude position provid
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