TURBO.DRIVE 400 - Ideal Vacuum Products, LLC
Contents
1. Seal leak check process Replace fan Switch on water cooling Ensure max ambient temperature of 45 C Improve cooling Check the ultimate pres sure of the backing pump and install a bigger backing pump if req Seal leak check process Replace fan Switch on water cooling Ensure min ambient tem perature of 0 C Reduce water cooling 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Operation P227 Designation Meaning Possible cause Remedy Bit 7 8 not used 9 10 il Overload The pump Forevacuum pres Check the ultimate pres warning speed has sure too high sure of the backing pump dropped under and install a bigger the normal backing pump if req Heat Gas flow too high Seal leak check process 12 not used 13 14 Power supply Supply voltage Intermediate circuit voltage failure during voltage too low or warning active opera maximum time for tion of the generator operation pump was exceeded P4 Umax or DC power supply WAS Ama voltage below 24V Mains voltage failure 15 Fan voltage has failed 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 39 Operation 3 3 Switching on Switch on the DC power supply The yellow LED at the fre quency converter lights up Switch on the turbomolecular pump at the frequency con verter E via pins 7 and 8 of the socket REMOTE X1 For exam ple via a remote control or with the aid of the plug with integrated ON OFF switch see Section 1 5 Acc2. 61 82 83 Designation Run up time error Motor tem perature error Pump error Bearing tem perature war ning top Fan voltage has failed Motor tempe rature low warning Meaning The pump has not reached the normal operating fre quency after the maximum run up time The motor temperature has exceeded the shutdown threshold Pump couldn t be identified or no pump is connected Troubleshooting Possible Cause Forevacuum pressure too high Gas flow too high Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Pump not con nected correctly to frequency converter Hardware defective Remedy Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check pro CESS Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check pro Cess Replace fan Switch on water cooling Check connection between pump and frequency converter Contact Oerlikon Leybold Vacuum Service Shut down yes yes no no no 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 51 Troubleshooting Error Designation Meaning Possible Cause Remedy Shut code down 84 Motor over no temperature warning 101 overload The pump Forevacuum Check the ultimate no warning speed has pressure too pressure of the dropped under
3. C C Operation rw Format Description r w r w r w u16 i16 i16 i16 i16 i16 i16 i16 116 u16 Switch on temperature for fan when P29 0 3 For P125 gt P122 the normal operation relay is energised Actual value of the bearing temperature Exceeding the bearing temperature warning threshold results in a warning Actual value of the bearing temperature Falling below the motor temperature lower warning threshold results in a warning Falling below the motor temperature lower error threshold causes the pump to be switched off Exceeding the bearing temperature error threshold causes the pump to be switched off Exceeding the motor temperature error threshold causes the pump to be switched off 0 Cooling fan off 19 Cooling fan on Is used for the reduction of the maximum consumption current e g for adaptation of low performance power supplies Note values 100 reduce the pump performance and increase the run up time Intermediate circuit 0 current Standby frequency 0 Enable standby 0 150 1200 0 0 1A Hz r r w r w i16 u16 u16 Actual average intermediate circuit current of the converter Standby operation frequency setpoint 0 normal speed P24 1 standby speed P150 17200492_002_A5 04 2011 Oerlikon Leybold Vacuum 33 Operation No 171 174 176 179 180 182 34 Designation Min
4. INSPueis ye si duund jusaseid s 10113 DE Jo OAnoe onssed Jo sok Ou OU dois epouu Buneiado jeuuou eu ui si dun Jo uooJ SNSSEd SNIOE UO Ou sak sak pels Bulyesgje0oe si dund Jo Seuse j owssed oNissed UO OU OU soh pels pes ye snf Jo Jo oNSSEd onssed UO OU OU OU pels jeu e10jeq epouu Buneiado ewou eu ui sem duund dog Jeye snr Jo Seusej ewssed anissed Jo OU sok sok dois 6uneJejeoep si dund Jo Seusej ewssed onssed Jo OU OU sok dois Buneedo jou duung Jo JO oNissed oNissed Jo OU OU OU dois KouenbaJl juiodies pah usb NOLYH3dO JO 06 jeubls HOHH3 SNIVLS HOHH3 WIWHON eAup jueseid Aousnbey Bunmeloi dois qa qa Kelay Kejed JOJOW Sog JEUUON dung uelS opoui fureisdo ejep 1ndino snjejs eyep Indu snjejs Aejoy 9 Installation 3 Operation 3 1 Start up The TURBO DRIVE 400 offers the possibility of gently run ning in pumps which were not operated for a period bet ween 6 and 12 months For this set the parameter P119 Bearing run in function to 1 thereafter start this function through the start command All three LEDs will flash rapidly during acceleration the green LED flash more slowly The run can be cancelled by revoking the start command Pausing is not possible After a completed run in the pump stops The LEDs con tinue to flash Parameter 119 remains set after the run and needs to be set manually to O In all the entire bearing run in process may take up to 4 hours Turbomolecular pumps whi
5. Max Default Unit r w Format Description Error code memory O 65535 0 r u16 Indexed parameter for storing the most recent 40 error codes The individual error memory entries are accessed via this parameter with additional index number The last error code is accessed with index O and the oldest with index 39 See Section 5 Troubleshooting for the error codes Error rotor frequency O 65535 0 Hz r u16 Actual speed when error occurred Access analogously as for parameter 171 Error operating hours O 0 h r u32 Operating hours when error 2147483647 occurred Access analogously as for parameter 171 Fallback PZD1 O 65535 1024 rw u16 Response when cancelling the control rights or in the case of a communication interruption of the bus adapter Behaviour in case bit 10 in the control word of the bus adapter is cancelled or when interrupting the communication between converter and bus adapter see also P182 Here it is assumed that the respective bus adapters perform a cyclic communication on the USS side so that the respective converter electronics is capable of detecting a communication interruption The bits in parameter 179 represent an equivalent to the control word in the USS protocol The actions linked to these bits are run provided bit 10 in the control word USS protocol for bus adapter is cancelled or if there are interruptions in the communication between converter and bus adapter Here bit 10 is of special significance Bit 10 2
6. The bottom side of the fre quency converter must not be allowed to attain too high temperatures see technical data Max magnetic induction levels are 15 mT max radioactive radiation spec is 10 rad 10 Gy The frequency converter must only be used in rooms within buildings It must not be operated in explosive gas atmo spheres The frequency converter and the connecting lines must be protected against exposure to sprayed and condensing water During operation the frequency converter may attain temperatures up to 75 C We recommend that the unit be installed so that it can not be touched inadvertently Owing to the small quantity of combustible material and the proven safety of the instrument by testing in accordance with EN 61010 the risk through fire and burning can almost completely be excluded 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Installation Heat sink and forced cooling required Operation possible without additional cooling Ambient temperature Motor current Parameter 5 Fig 2 1 Cooling requirements for the TURBO DRIVE 400 when fitted separately 2 3 Mounting the frequency converter The frequency converter may be affixed with the aid of the enclosed M4 sliding nuts The bottom side of the frequency converter must be cooled sufficiently Ensure an adequate supply and discharge of cooling air For special requirements please contact us 17200492 0
7. 16 17 18 19 20 23 24 25 Converter type Software version Actual frequency Actual intermediate circuit voltage Actual current Actual electrical power Actual motor temperature 0 0 0 0 0 10 Save data command 0 Actual converter temperature Motor temperature warning threshold Nominal motor current Maximum frequency 750 10 0 5 Minimum frequency O Critical frequency Pump type Setpoint frequency Normal operation 0 0 0 35 65535 65535 10000 65535 1500 150 65535 150 65535 150 150 60 1200 1200 1200 255 1200 99 0 0 30 Oyo 90 Min Max Default Unit C C 0 1 A Hz Hz Hz Hz rw Format Description r r r r r w r w u16 us2 u16 u16 u16 u16 i16 i16 i16 i16 u16 u16 u16 u16 u16 u16 u16 136 Turbo Drive 400 XX yy version zz correction index Actual rotor frequency Actual intermediate circuit voltage of the converter Actual motor current Actual drive input power Actual value of the motor temperature A write command with any value saves temporary data into nonvolatile memory Actual heat sink temperature of the converter Exceeding the motor temperature warning threshold results in a warning Maximum permissible motor current Highest permissible frequency Lowest permissible frequency Minimum frequency level When the pump is acceler
8. 2011 Oerlikon Leybold Vacuum 49 Troubleshooting Error code CO 50 Designation Overspeed warning Pass through time error Bearing temperature error Short circuit error Converter temperature error Meaning The actual fre quency exceeds the setpoint by over 10 Hz The pump has not reached the minimum speed after the maximum run up time has elapsed The maximum permissible bearing tem perature was exceeded Overtempera ture at the power output stage or within the frequency converter Possible Cause Frequency con verter defective Forevacuum pressure too high Gas flow too high Rotor blocked Forevacuum pressure too high Gas flow too high Fan defective Water cooling switched off Ambient tempe rature too high Poor cooling Remedy Contact Oerlikon Leybold Vacuum Service Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check pro cess Check if the rotor turns freely Contact Oerlikon Leybold Vacuum Service if the rotor is damaged or blocked Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check pro cess Replace fan Switch on water cooling Ensure max ambient temperature of 45 C Improve cooling 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Shut down yes yes yes yes Error code
9. 300 H TW 220 150 15 S SL 300 Nominal voltage Max power consumption 190 W Max peak current input side SAN 8ADC Required power output from the power supply 2 200 W When operating a TW 70 H TW 250 S SL 80 Nominal voltage Max power consumption 140W Max peak current input side 24 V 6ADC Required power output from the power supply 2 150 W Max length of the DC cable shielded at 3 x 1 5 mm at 3 x 2 5 mm Relay output rating Ambient temperature during operation storage Relative air humidity Overvoltage category Contamination grade Temp of the cooling surface For Part Nos 800073V0004 Power consumption Type of protection Weight approx 8 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 5m 20m 42 V 0 5 A 5 45 C 154 70 C 5 to 85 non condensing I 2 5 55 C 5 50 C lt 20 W IP 20 0 7 kg Description Profibus version 20 50 SEET SERVICE X5 See REMOTE X1 ERROR 15 9 HEATSINK 18 2 63 8 Fig 1 5 Dimensional drawing for the frequency converter dimensions in mm 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum 9 Description 10 1 4 Ordering data Frequency converter TURBO DRIVE 400 with RS 232 C interface 800073V0002 with RS 485 C interface 800073V0003 with Profibus interface 800073V0004 wiht USB interface 800073V00
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11. Software 12 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Installation 2 Installation 2 1 Conforming utilization The TURBO DRIVE 400 supplies power to the TW series turbomolecular pumps and is used to control their opera tion The TURBO DRIVE 400 is suited for operation of the follo wing pumps TURBOVAC TW 70 H TURBOVAC TW 220 150 5 TW 220 150 15 5 TW 400 300 25 S TURBOVAC TW 250 S TURBOVAC TW 290 H TURBOVAC TW 300 TW 300 H B TURBOVAC SL 80 SL 300 Other pumps may only be operated after approval from Oerlikon Leybold Vacuum or if the operation of such pumps is expressly permitted in the Operating Instructions for the specific pump The TURBO DRIVE may only be operated with power supply units which meet PELV Safety Extra Low Voltage requirements The TURBO DRIVE must only be opened by certified Oerlikon Leybold Vacuum Service Centres Opening by unauthorised personnel voids warranty 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 13 Installation 14 CAUTION AN 2 2 Operating environment See also Chapter 1 3 Technical Data Places of installation up to 1000 m above sea level 3300 ft are possible without restrictions At altitudes over 1000 m heat dissipation by the ambient air is impaired Please con sult us If the TURBO DRIVE 400 has been integrated in the pump itis cooled by the pump As to the cooling requirements for the separately fitted TURBO DRIVE see Fig 2 1
12. high backing pump and the normal install a bigger operation backing pump if req ihresnod Gas flow too Seal leak check pro high cess 103 Supply Intermediate DC supply vol Check the voltage at no voltage circuit voltage tage below 24V the power supply warning too low or and if required set up maximum time correctly for generator operation was Mains voltage Remedy the cause exceeded has failed e the mains power ailure 106 overload error The pump Forevacuum Check the ultimate yes speed has pressure too pressure of the dropped under high backing pump and the minimum install a bigger speed backing pump if req Gas flow too Seal leak check pro high cess 114 Motor under The minimum Ambient tempe Ensure min ambient yes temperature permissible rature too low temperature of 0 C error motor tempe ratur temet E ue Reduce water cooing attained 9 52 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Error code 116 117 126 126 143 Designation Permanent overload error Motor current error Bearing tem perature sen sor error top Motor tem perature sen SOr error Overspeed error Meaning The speed of the pump has dropped below the normal operation threshold and has stayed there for a lon ger period of time Motor current less than nominal cur rent Bearing tem perature sen sor defective Motor tem perature sen sor defective Troubleshooting Possi
13. 0 The control rights are returned to the next lower priority level All other bits are not relevant Bit 10 2 1 The control rights remain unchanged The actions linked to the other bits are run Resp delay time 0 20 10 ms rw ul16 Response delay time Pause time between received and transmitted USS protocol string of the frequency converter s serial interface RS232 and RS485 We recommend not to change the default setting 10ms Watchdog timer USS O 65535 10 O1s rw u16 Delay when cancelling the control rights of the bus adapter and time out in the case of a communication interruption Defines the time characteristic when cancelling bit 10 in the control word of the USS protocol or when an interruption in the communication between bus adapter and converter and electronics is detected Handling when cancelling bit 10 or when there is an interruption on the communication side of the USS bus adapter is the same Value 0 0 Indefinite time delay In this way a change of the control right is inhibited Values 0 1 6553 5 A change in the control right corresponding to the setting of parameter 179 is only effected after the time span defined through parameter 182 has elapsed 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum No 183 184 227 247 248 249 303 Designation Max passing time Converter operating hours Warning bits 1 Vent on frequency Vent off frequency Generator operation Actual operati
14. 02 A5 04 2011 Oerlikon Leybold Vacuum 15 Installation NOTICE WARNING AN NOTICE 16 2 4 Connecting the pump In the case of a separately fitted TURBO DRIVE 400 connect the pump using the connecting cable The pump may be operated only with a suitable fre quency converter and suitable connecting cables Route all cables so as to protect them from damage Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power switched off yel low power LED off Otherwise there is the risk of damaging the TURBO DRIVE 400 2 5 Connecting the power supply The frequency converter must only be connected to power supplies which meet the requirements for func tional extra low voltage with positive isolation in accor dance with IEC 364 VDE 0100 Part 410 or local regu lations PELV The power supply must meet the requirements given in Section 1 3 Peak currents in the kHz range may be pre sent on the DC side The power supply should have a cur rent limiter of the current regulated type Connect the frequency converter to the 24 V DC power supply or to the TURBO CONTROL 300 or to the TURBO POWER 300 via the 24 V DC cable Ensure correct polarity Pin 1 24 VDC Ping OV Pin3 GND The frequency converter is equipped with an internal 8 AT slow blow fuse It can only be replaced by Oerlikon Leybold Vacuum staff Connect the power su
15. 08 Connecting cable pump frequency converter 1 0 m long 152 47 B 2 5 m long 864 49 3 0 m long 864 40 5 0 m long 864 50 1 5 Accessories OEM power supply with screw terminals SITOP 24 V 10 A 120 230 VAC 50 60 Hz 152 50 E supplies the TURBO DRIVE 400 with 24 V DC ll other power supplies on request 24 V DC cable TURBO DRIVE 400 OEM power supply 3m 200 12 732 5m 200 12 733 10m 200 12 734 20 m 200 12 735 Mains cable for power supply 2 m long with EURO plug 800102V0001 with US plug 5 15P 800102V1001 17200492_002_A5 04 2011 Oerlikon Leybold Vacuum Description Power supply unit plug and play TURBO POWER 300 800100V0002 eX E supplies the TURBO DRIVE 400 with 24 V DC No off E plug amp play cables E desktop unit or rack mountable 100 240 V AC 24V POWER OUT TURBO POWER 300 54 250V 24V DC Power cable TURBO DRIVE 400 TURBO POWER 300 1m 800094V0100 3m 800094V0300 5m 800094V0500 10m 800094V1000 20m 800094V2000 Mains cable for TURBO POWER 300 3 m long with EURO plug 800102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 Power supply and control unit o sm E TURBO CONTROL 300 800100V0001 EE E J ll supplies the TURBO DRIVE 400 with 24 V DC SC E plug amp play cables SS E desktop unit or rack mountable E with power switch E with start stop switch for the turbomolecular pump ll remote control li status LEDs and status r
16. 16 u16 u16 u16 u16 3 2 6 Specific parameter data for the pumps Type of Pump Nominal pump designation and setpoint setpoint frequency frequency level P23 P18 P24 P19 P20 O IW 220 150 TW 220 150 15 750 1 TW 400 300 258 TW 250 200 40 800 2 TW 2508 860 3 TW 70H 1200 4 TW 290 H TW 300 TW 300 H 1000 5 SL 80 1200 6 SL 300 1000 650 375 650 375 750 340 910 340 890 375 910 340 890 375 Minimum Minimum Max frequency motor current P17 6 0 6 0 5 0 5 0 5 0 5 0 5 0 rw Format Description Catalogue number of the converter One ASCII char per index Product name of the converter One ASCII char per index Only for DeviceNet purpose Serial number of the converter One ASCII char per index Active Profibus address Currently pending error See Chapter 5 Troubleshooting Bearing Motor Max Max temp temp bearing motor warning warning temp temp threshold threshold P132 P133 P126 P16 80 100 70 95 80 100 70 95 67 100 60 95 67 90 60 85 80 63 70 58 36 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Operation Type of Pump Standby frequency pump designation Hz P23 P150 O TW 220 150 TW 220 150 15 700 1 TW 400 300 258 TW 250 200 40 700 2 TW 2508 800 3 TW 70H 910 4 TW 290 H TW 300 TW 300 H 960 5 SL 80 910 6 SL 300 960 Run in sequence bearing run in function Type of Pump Run in Run in Run in Run in Run in Run in pump designation speed 1 time 1
17. 98 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 info vacuum oerlikon com LV 11139 2011
18. A5 04 2011 Oerlikon Leybold Vacuum 47 Maintenance 48 4 Maintenance The frequency converter is maintenance free Repairs must only be done by Oerlikon Leybold Vacuum If required clean the frequency converter of dust with a dry cloth When removing a defective frequency converter from an installation please note the information given in Chapter 3 4 During all work on the pump which is being driven by the frequency converter the system must be protected against being switched on For this disconnect the DC power supply 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Troubleshooting 5 Troubleshooting Before you start searching for the source of the problem you should carry out a few simple checks Are the connections in good working order M Mains connection EH DC power supply to the frequency converter M Connector cable between the frequency converter and the pump Is the forevacuum pressure sufficient After having removed the cause for the error reset the error message at the TURBO DRIVE E n case of error code 8 by switching the mains power off H n case of the other errors by applying a STOP signal via the socket REMOTE X1 or a reset sequence via the serial interface or by switching the mains power off The error codes can only be read if a serial interface is pre sent The following table has been provided as a guide when determining the causes of errors 17200492 002 A5 04
19. D oe Q dewoso SERVICE X5 Sites REMOTE X1 HEATSINK Fig 1 3 Front side of TURBO DRIVE 400 with additional RS 485 interface O Shot USB connection TURBO DRIVE TD 400 e X106 00000 Q 20000 O 0000 e Q 0000 O SERVICE X5 SINIS REMOTE X1 ERROR HEATSINK O Abb 1 4 FTURBO DRIVE 400 front panel with additional USB interface 6 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Description 1 Description 1 1 Design and function The TURBO DRIVE 400 supplies power to the TW and SL series turbomolecular pumps and is used to control their operation The TURBO DRIVE 400 is either integrated in the pump or itis separate and linked to the pump by means of a connecting cable The TURBO DRIVE 400 requires a supply voltage of 24 V DC It is equipped with interfaces for programmable con trols REMOTE and an optional interface for serial commu nication 1 2 Standard equipment Included with the delivery are the DC connector Hirose HS16P 3 four moving nuts MA for affixing the frequency converter and the Operating Instructions 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum 7 Description 1 3 Technical data Supply voltage Residual ripple 3 96 Output Voltage Power Frequency 24V pe 10 0 24V 3 160 W O 1500 Hz When operating a TW 300 TW
20. Error Turbomolecu lar pump does not start ERROR LED does not light Turbomolecu lar pump produces loud running noises and vibra tions Troubleshooting Possible Cause Interface protocol error No communication via the serial interface REMOTE connector X1 connected wrongly REMOTE and SERVICE connectors mixed up Wrong Profibus address set Rotor out of balance Bearing defective Shut down Remedy Use USS protocol Connect bus as shown in Section 3 2 Connect as shown in Fig 2 6 Connect correctly Set address between O and 126 Balance the rotor no Replace the bearing 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 55 Troubleshooting Error code 56 Error Turbomolecu lar pump does not reach ulti mate pressure Running pump can not be stopped via X1 Possible Cause Measurement instrument defective Measurement sensors soiled Leaks at the equipment lines or the pump Pump soiled Forevacuum pump pro vides insufficient pumping speed or ultimate pressure which is too high Frequency parameters programmed wrongly Pump has been started via the serial interface the interface controls the pump Remedy Shut down Inspect the measurement no sensor Clean or replace the sensors Check for leaks Clean the pump Check the ultimate pres sure of the forevacuum pump and install a higher capacity vacuum pump if necessar
21. K TURBO DRIVE TD 400 00000 0600 REMOTE K1 920 STATUS OWER 000009 00090 SEAVICE X5 RROR HEATSINK 9 AO eZ e Ch Cl O x AE AE MANG CE L I Me OO noh CO 39 D gos S LS oo o9 e P ce SO MS eS SA NG oe CARS 9 cO e Green LED STS off flashes slowly 1 s flashes fast 3 s On Yellow LED PWR off flashes on Red LED ERR off flashes on Fig 1 1 TURBO DRIVE 400 front and rear side 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Pump at standstill 3 Hz Start command is present about 10 s after start Running up or running down Normal operation No supply voltage Supply voltage too low or too high Supply voltage is present No error no warning Warning is present pump can be operated possibly with some restrictions Fault is present pump stopped or can not be operated 5 Description SN A Xo ot e xo od My SN OE N oe SH MEE NES ee ee GAD od O x i e One O 00000000 DRIVE amp 3 24V DC wa A HEAT SINK HEAT SINK y Fig 1 2 Rear side of TURBO DRIVE 400 with additional Profibus interface Selector switch for setting the bus dg des buie SEN in the hexadecimal forma TURBO DRIVE
22. V DC 1 6 7 TxD RxD 3 TxD RxD 4 9 5 TL Fig 3 3 Pin assignment for the socket at the frequency converter for RS 485 interface male 26 17200492 002 Ap 04 2011 Oerlikon Leybold Vacuum 3 2 2 RS 485 interface Standards Protocol Transmission rate Response delay Adaress range Max cable length Type of cable Differential voltage levels see also Standards Interface connector ISO IEC 8482 EIA 485 acc to VDIAVDE 3689 19200 baud fixed default setting 10 ms parameter 180 Dau TS 50 m with bus termination 2 wire twisted pair twisted pair cable logic O transmitter 1 5 5 V receiver gt 0 3 V logic 1 transmitter 1 5 5 V receiver 0 3 V 9 way Sub D type socket on the instrument male thread UNC4 40 Note After having changed the bus address through the rotary switch see Fig 1 3 the frequency converter must be switched off yellow power LED off and then on again so as to enable the new address setting Bus addresses over 15 can only be set via Parameter 37 Refer also to Operating Instructions GA 05 281 Operation 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 27 AAI OgunL snq GEY SH 9U JO uonoeuuoo ke Du JjAIlHd Oaun L 8 SX sx 8 Sx 4 SX gAlHd ogun o A 0 awan O 06 GX O OZH 9 d Sa axy
23. ating this frequency must be reached within the maximum passing time P183 Setpoint of the rotor frequency Setpoint of the frequency dependent normal operation level 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 31 Operation No Designation Min Max Default Unit r w Format Description 27 Current norm oper 5 60 20 0 1A rw ui6 Motor current dependent normal operation level If P29 0 1 Defines the normal operation level Normal operation if P5 lt P27 Parameter cannot be changed during operation of the system 29 Relay function X1 0 8 0 rw Uu16 If required special functions can be assigned to the normal operation and the error relay Field O specifies the function for normal operation 0 Frequency dependent 1 Motor current dependent 2 Fieldbus controlled 3 Trigger current bearing temperature P122 4 Venting function P247 P248 5 Pump at standstill f lt 3 6 Start command is present 7 Ready for switch on STW Bit1 8 No mains power failure or no generator operation P303 Bit 4 21 generator operation Field 1 specifies the function for the error relay 0 Energised when an error is present 1 Deenergised when an error is present 2 Fieldbus controlled 3 Venting function 32 Max run up time 30 2000 720 S rw ul16 Max permissible time during which the pump must attain the normal operation threshold P24 P25 with the start signal present 36 Start delay time O0 255 O 0 1m
24. ax JO OS sunu ejqeo JeDuo 10 GK Jopeuiuo sng 6 JOJVEUILUI9 SNG 6 y JO UONEANDE 101 Sur sunu ejqeo uo 104 O 06 l cor Operation 04 2011 Oerlikon Leybold Vacuum 17200492 002 A5 28 Operation 3 2 3 Profibus DP The Profibus DP used has been defined in the standards EN 50170 and VDI VDE 3689 For more information on the Profibus system The New Rapid Way to Profibus DP Manfred Popp Profibus Nutzerorganisation e V Haid und Neu Str 7 76131 Karlsruhe Germany P N 4 072 www profibus com Upon request we shall be pleased to provide detailed infor mation on the hardware and the protocol used for the data Refer also to Operating Instructions GA 05 281 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 29 Operation 3 2 4 USB Interface X106 Transmission rate 19 200 Baud Response delay time 10 ms default parameter 180 Address range non addressable Maximum cable length 5m Interface connector USB B Notice the USB interface has been electrically separated from the converter and is supplied from the side of the USB host with a current of approximately 15 mA Via the protec tion diode separation with respect to 33 V is maintained 30 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 3 2 5 Parameter list Operation specific values for each pump see table of pumps Chapter 3 2 6 r readable w writable No Designation 1 2 3 4 01 11
25. ble Cause Forevacuum pressure too high Gas flow too high Cable fault Faulty connector Sensor defect ive short circuit or broken cable Sensor defect ive short circuit or broken cable Shut down Remedy Check the ultimate pressure of the backing pump and install a bigger backing pump if req yes Seal leak check pro cess Contact Oerlikon Leybold Vacuum Service yes Contact Oerlikon Leybold Vacuum Service yes Contact Oerlikon Leybold Vacuum Service yes yes 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 53 Troubleshooting Error Error Possible Cause code Yellow power No DC power LED is not on DC power miswired Frequency converter defective div Red LED Warning message flashes See Section 3 2 6 Warning codes for the possible reasons of the warning Remedy Shut down Check cables and power supply Ensure correct polarity of the DC cable Replace frequency conver ter The following may damage the freq conver ter E Disconnection of the DC cable while the pump was still rotating E Non compliance with the note related to connecting several pump to a single power supply The pump can continue to no run as long as operation limits are only exceeded for a short time In case of longer exceeding send pump and frequency con verter to the OLV service 54 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Error code
26. cerlikon leybold vacuum deal cuum products va gt CW www idealvac com TURBO DRIVE 400 Frequency Converter for Turbomolecular Pumps Operating Instructions 17200492 002 A5 Part Numbers 800073V0002 800073V0003 800073V0004 800073V0008 Contents 2 Important Safety Information 1 Tel 1 2 1 3 1 4 1 5 2 2 2 2 2 9 2 4 29 2 6 3 3 1 3 2 3 2 1 3 2 2 3 2 3 3 2 4 3 2 5 3 2 6 3 2 7 3 3 3 4 3 5 3 6 3 7 3 8 3 9 3 10 3 11 3 12 Description Design and function Standard eguipment Technical data Ordering data Accessories Installation Conforming utilization Operating environment Mounting the frequency converter Connecting the pump Connecting the power supply Relay status Operation Start up Interfaces RS 232 C interface SERVICE X5 HS 485 interface Profibus DP USB interface X106 Parameter list Specific parameter data for the pumps Warning codes for parameter 227 Switching on Shutting down Emergenoy shut down Setting pumping speed and rotational speed Operation at reduced current Changing the frequency dependent normal operation level 44 Changing the maximum permissible run up time 45 Changing the start delay time Selecting relay functions Reading the error memory 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 46 47 47 Contents Safety Information 4 Maintenance 48 5 Troubleshooting 49 6 Waste Disposa
27. ch were not operated for a peri od of over 12 months should be returned to us For more information on this please contact your local sales partner 22 17200492 002 Ap 04 2011 Oerlikon Leybold Vacuum Operation 3 2 Interfaces The frequency converter has a RS 232 interface as stan dard SERVICE X5 and is optionally equipped with serial interfaces M RS 485C E Profibus DP B USB The TURBO DRIVE 400 is configured through the parame ters according to the parameter list Pxxx denotes parame ter value xxx The PC software TURBO DRIVE Server allows convenient access by the user to the parameters of the frequency con verter It can be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation gt Download Software Interfaces priority level The optional interface has the highest priority level followed by the Service interface X5 The Remote input X1 has the lowest priority level See also parameter 179 in Section 3 2 4 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 23 Operation Applications which can be implemented with the aid of the serial interface Application Networking of several pumps and other equipment Automation Avoidance of warnings and warnings before overload operation and early detection of a failing pump Standby operation Troubleshooting Slow pressure control by changing the pumping speed Reducing the maximum motor current Starting th
28. e pump with a delay if several consumers are connected to the same PSU Frequency converter as a simple pressure gauge since motor current is dependent on the vacuum conditions Lowering the normal operation threshold Benefits to the customer Savings relating to the costs for signalling cables Savings related to repetitive manual work E Precise planning for maintenance E Improved reliability of sensitive production processes in a vacuum E Extending the service life for the ball bearings E Cutting energy consumption Quick analysis of problems Dispensing with a flow controller Cost savings through smaller power supply units if peak loads can be reduced Cost savings through smaller power supply units if peak loads can be reduced Dispensing with pressure gauges Normal operating mode is attained faster processes can be started faster How to do it With Field Bus systems like Profibus For example by a control computer Monitoring of E Motor current P5 E Ball bearing temperature P125 or P127 E Motor temperature P7 E Frequency converter temperature P1 1 Reducing the rotor s frequency through P24 Reading of error memories P171 P174 and P176 error code speed operating hours for error Changing the rotor frequency through parameter 24 With P139 motor current reduction factor With P36 delay Monitor motor current P5 second function for Normal Operation relay relay
29. elays 24V DC Control cable TURBO DRIVE 400 TURBO CONTROL 300 1m 800091V0100 3m 800091V0300 5m 800091V0500 10m 800091V1000 f 20m 800091V2000 lt Mains cable for TURBO CONTROL 300 3 m long e with EURO plug 800102V0002 with US plug 6 15P 800102V1002 with UK plug 800102V0003 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 11 Description Mechanical accessories Plug for connector REMOTE with integrated ON OFF switch for the pump Sub D plug 9 way 152 48 Heat sink for frequency converter 8001 10V0001 Top hat rail adaptor mounting aid for TURBO DRIVE 400 and TURBO POWER 300 800110V0003 Accessories for serial interfaces USB driver the Windows driver can be downloaded from www oerlikon com after selecting menu item www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software PC software Turbo Drive Server for Windows 95 and higher CD ROM E Display change save and compare parameter lists ll Integration of customer s software E Record parameter data 800110V0102 new parameter library for TURBO DRIVE 400 is required please ask us for a quotation The software can also be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download Software GSD file for Profibus DP upon request The software can also be downloaded from www oerlikon com in the menu Oerlikon Leybold Vacuum Documentation Download
30. er supply unit it may make sense to start the pumps one after the other One way of achieving this is to enter a start delay time differing from O To set up the start delay time proceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 36 Start delay time The possible values for parameter 36 can be varied within the limits of O to 25 5 minutes 0 to 265 So as to retain the value saved for parameter 36 when switching the pump off the parameter value needs to be saved permanently For this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanently 46 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Operation 3 11 Selecting relay functions See parameter 29 3 12 Reading the error memory The TURBO DRIVE 400 is capable of permanently saving up to 40 error events The error codes are saved under parameter number 171 In addition to each error code the following is also saved E Rotor frequency at the point of time when the error event in parameter 174 occurred M The corresponding number of operating hours in para meter 176 Access to each of the 40 groups of values is accomplished with the aid of an index value which needs to be stated besides the parameter number when accessing via the pro tocol in accordance with VDI VDE 3689 The range of index numbers ranges from O to 39 17200492 002
31. essories E by a start command via the interface The turbomolecular pump accelerates The green LED flashes When the pump reaches normal operation the green LED lights up permanently After a mains power failure the pump can run up automati cally once more 40 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Operation 3 4 Shutting down Switch off the pump at the frequency converter MH via contacts 7 and 8 of the socket REMOTE X1 E apply a stop command via the interface M for the power supply units offered or recommended by Oerlikon Leybold Vacuum switch off the DC voltage After switching off the green status LED will flash until the rotor of the turbomolecular pump is at standstill This may take several minutes With the DC power supply off the turbomolecular pump will act as a generator supplying the frequency converter with energy as indicated by the yellow power LED If a failure occurs the turbomolecular pump will be shut down automatically The red LED at the frequency conver ter lights up To shut down the frequency converter switch the pump off and wait until the rotor of the turbomolecular pump has arrived at standstill green status LED off Then switch the mains power off and wait until the yellow power LED is off Then only disconnect any cable connec tions 3 5 Emergency shut down The emergency shutdown facility of a system controller must be capable of shutting the pump down as deta
32. iled in Chapter 3 3 The rotor of the turbomolecular pump may be stopped faster by venting the pump for this refer to the Operating Instructions for the pump 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 41 Operation 3 6 Setting pumping speed and rotational speed For the purpose of reducing the pumping speed of the pump because of application requirements or for other rea sons it can make sense to reduce the rotational speed In order to permanently reduce the speed we recommend the following procedure With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 24 Setpoint frequency The possible values for para meter 24 will depend on the type of pump connected Parameter 18 Nominal pump frequency defines the maxi mum value and parameter 19 Minimum setpoint frequency for the pump defines the minimum value So as to retain the value saved for parameter 24 when switching the pump off the parameter value needs to be saved permanently For this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanently Parameters which are typical for the specific type of pump see Chapter 3 2 5 are reset to the factory defaults after having changed the type of pump and when switching on the power supply voltage again The rotational speed of the pump may be changed during operation also with the aid of a Windows PC and the PC s
33. in rw ui6 Delays the start of the pump to allow leadtime for the fore vacuum pump for example 38 Start counter O 65535 0 r u16 Increments each time when passing through the critical speed range 37 RS485 address 0 31 0 rw u16 Parameterizable RS485 address The address is specified either through the address switch or a value entered here provided the address switch is set to O A change of this parameter setting will only be effective after the power supply has been switched off and on 119 Bearing run in 0 1 0 rw u16 O deactivated function 1 new pump type starts with run in sequence Run in using the run in sequence specified through the pump table without run up time monitoring a min at b Hz c min at d Hz in total 4 stages for mechanical pumps 32 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum No 122 125 126 127 128 181 132 133 134 139 140 150 151 Designation Min Normal TMS 20 Bearing temperature 10 Bearing temperature 10 warning threshold Bearing temperature 10 Motor temperature 10 lower warning threshold Motor temperature 10 lower error threshold Bearing temperature 10 error threshold Motor temperature 10 error threshold Enable cooling fan 0 on turbopump Current reduction 30 factor Max Default Unit 70 150 150 150 150 150 150 150 19 100 40 10 19 100 C C C C C C
34. l 57 EC Conformance Declaration 59 Obligation to Provide Information Before installing and commissioning the TURBO DRIVE carefully read these Operating Instructions and follow the information so as to ensure optimum and safe working right from the start The Oerlikon Leybold Vacuum TURBO DRIVE 400 has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions The TURBO DRIVE must only be operated in the proper condi tion and under the conditions described in the Operating Instructions It must be operated and maintained by trained personnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to our nearest office DANGER indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING indicates a potentially hazardous situation which if not avoided could result in death or serious injury CAUTION indicates a potentially hazardous situation which if not avoided could result in minor or moderate injury NOTICE DANGER WARNING CAUTION 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum 3 Safety Information NOTICE NOTICE is u
35. mply with the applicable EC Council Directives This declaration becomes invalid if modifications are made to the product without agreement of Oerlikon Leybold Vacuum GmbH Compliance with the EMC Directives requires that the components are installed within a system or machine in a manner adapted to EMC requirements Product designation Frequency converter Type designation TD400 Catalogue No 800073V0002 03 04 05 06 07 08 The product complies to the following European Council Directives Directive on Low Voltage 2006 95 EC Directive on Electromagnetic Compatibility 2004 108 EC The following harmonised standard has been applied EN 61010 1 2001 incl correction 1 11 2002 and correction 2 1 2004 St raussendung Festigkeit EN 55011 2007 class B EN 55011 2009 A1 2010 class B EN 61326 1 2006 05 class B EN 61000 6 3 2007 class B EN 61000 6 2 2005 Documentation Officer Herbert Etges Tel 49 0 221 347 0 Fax 49 0 221 347 1250 E Mail documentation vacuum oerlikon com Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Germany Cologne dated 20 4 2 Cologne dated Z644 Y E P 4 H a De Y y PS a r Monika Mattern Klosson Harald Udelhoven Head of Research amp Development Head of Quality Management 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 99 cerlikon leybold vacuum wwwW oerlikon com 04 11 Oerlikon Leybold Vacuum GmbH Bonner Strasse 4
36. ng status Min Max Default Unit O 1800 500 S r u16 0 0 0 01h r u32 2147483647 0 65585 00 r u16 O 1200 300 Hz r w ul6 O 1200 5 Hz rw ul6 0 1 1 rw ul16 0 65535 0 r u16 Operation rw Format Description Max permissible time during which the pump must with the start signal present have passed through the critical speed range between 60 Hz and P20 Counts the operating hours of the converter during active pump operation Active warnings described bit per bit See Section 3 2 6 Frequency at which the venting valve shall be switched on in the event of a mains power failure Power failure venting can be enabled through P240 Frequenoy at which the venting valve shall be switched off in the event of a mains power failure Power failure venting can be enabled through P240 O inactive 1 active Bit O Normal operation Bit 1 Ready for switch on Bit 2 Speed is increasing Bit 3 Speed is dropping Bit 4 Generator operation Bit 5 Standby Bit 6 reserved Bit 7 reserved 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 35 Operation No Designation Min Max Default Unit 312 Catalog number 0 of converter 313 Product name 0 Index 0 10 usable 0 315 Serial number of 0 converter Index O 10 usable 127 CHAR B000xxVOOOX 127 ID 400 CHAR 127 CHAR 127 CHAR XXXXXXXXXXX 918 Act Profibus addr 0 65535 0 947 Current error number O 65535 0 r u16 u
37. oftware TURBO DRIVE Server However we here recommend a PLC compliant solution with the aid of the Profibus The speed can be set over the Profibus in two ways E by changing parameter 24 within the limits defined by parameters 19 and 18 or E by transfer as the main setpoint for this also refer to VDI VDE 3689 42 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Operation 3 7 Operation at reduced current Not all applications require that the TURBO DRIVE 400 be operated at its maximum current Operation at reduced current will allow operation off a smaller power supply unit or to operate two or more turbomolecular pumps off a power supply unit which in practice is just not strong enough to supply the maximum current for several connec ted pumps However this will increase the run up time and the maximum gas throughput and backing pressure specifi cations are reduced For this proceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 139 Current reduction factor The possible values for parameter 139 can be varied within the limits of 30 to 100 96 of parameter 17 current dependents on the type of connected pump The newly entered current reduction fac tor will only be active after switching off and on again So as to retain the value saved for parameter 139 when switching the pump off the parameter value needs to be saved permanently For
38. pply to the mains 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Installation Pin 3 GND Shielding Pin1 24V Pin2 0V Fig 2 2 Pin assignment of the DC connector X4 Model Hirose HS16P 3 In the case of an integrated 24 V DC TURBO DRIVE 400 the DC cable connecting cable is omitted with shielding max 20m Fig 2 3 Connecting the pump and the power supply 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 17 Installation ZH 09 0S A Ove 001 D Md Iouoo 9160 eiqeuuue4BoJug 00 TOHINOO OCL eur pue dund out HuljosuuOD pa Du papuo si ejqeo Gurpeuuoo eui 007 ANHA OSHNL Dop Dou ue JO eseo eui UI 04 2011 O Oerlikon Leybold Vacuum 17200492 002 A5 18 Installation ZH 09 05 OV A Orc 004 9 qeo Jewog Od A vc D 00 HAMOd OHHNL eui pue dund y Buljosuu0g G z Du pauo si ejqeo 6urjeuuoo eui 00v ANHOA OSHNL pereJBeiul ue JO eseo eu UI 04 2011 Oerlikon Leybold Vacuum 19 17200492 002 A5 00v ANAOG OSHANL li 9 8 00v 3AIHQd Ogun il N 1HVLS PSSO DO dOLS uedo 19e1u025 S12e U09 BIA uoneiodo z ojduiex3 IN bd Installation N co 1HVIS A va dOLS A0 Old E BIA uonea4edg
39. sed to notify users of installation operation Afi programming or maintenance information that is important but not hazard related We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Operating Instructions for further use Important Safety Information WARNING The frequency converter must only be connected to power supplies which meet the requirements for func tional extra low voltage with positive isolation in accor dance with IEC 364 VDE 0100 Part 410 or local regu lations PELV During operation the frequency converter may attain temperatures up to 75 C We recommend that the unit be installed so that it can not be touched inadvertently P P Inside the unit there is the risk of suffering burns from hot components The pump may be operated only with a suitable fre quency converter and suitable connecting cables Ensure correct polarity Route all cables so as to protect them from damage Disconnect and connect the cable connections only while the pump is turning no longer green status LED off and with the mains power switched off yellow power LED off Otherwise there is the risk of damaging the TURBO DRIVE 400 4 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Description O 24VDC KA DRIVE K3 Q 00000000 0000000 EAT SINK HEAT SIN
40. speed2 time2 speed3 time3 P23 Hz s Hz s Hz s 0 TW 220 150 TW 220 150 15 100 3600 300 5400 300 5400 1 TW 400 300 25S TW 250 200 40 100 3600 300 5400 300 5400 2 TW 2508 100 3600 300 5400 500 5400 3 TW 70 H 180 3600 350 5400 600 5400 4 TW 290 H TW 300 TW 300 H 200 3600 430 5400 580 5400 5 SL 80 180 3600 430 9400 980 9400 6 SL 300 200 3600 430 9400 980 9400 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 37 Operation 3 2 7 Warning codes for parameter 227 P227 Designation Bit 0 38 Meaning Motor tempe The motor rature war ning Converter temperature warning Bearing over temperature warning Motor under temperature warning not used Overspeed warning temperature has passed the warning thres hold Overtempera ture at the power output stage or within the frequency converter The permissi ble warning threshold for the bearing temperature was exceeded The minimum permissible motor tempe rature warning threshold is not reached Possible cause Forevacuum pres sure too high Gas flow too high Fan defective Water cooling switched off Ambient temperature too high Poor cooling Forevacuum pres sure too high Gas flow too high Fan defective Water cooling switched off Ambient temperature too low Pump cooling too high Remedy Check the ultimate pres sure of the backing pump and install a bigger backing pump if req
41. switches as soon as the motor current threshold is tripped Adjust second function P29 Set motor current thresh P27 Reduce frequency threshold through P25 24 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Operation UG ole 1 4 and 6 9 are Oo internally TxD 2 O 7 connected and RxD 3 O must not be ay Ss O18 used 0J9 GND 5 O Fig 3 1 Pin assignment for the socket at the frequency converter female SERVICE X5 1 4 and 6 9 are 2 ch 2 internally TxD RxD connected and g i must not be RxD i TxD used 3 3 5 5 GND A GND TURBO DRIVE xU Shield SERVICE X5 9 pin IBM PC HS 232 interface Fig 3 2 Providing a RS 232 connection 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 25 Operation 3 2 1 RS 232 C interface SERVICE X5 Standards DIN 66020 Protocol acc to VDI VDE 3689 Transmission rate 19200 baud Response delay default setting 10 ms parameter 180 Address range non addressable Max cable length 5m Interface connector 9 way Sub D type socket on the instrument female thread UNC4 40 Note If on the controlling side an RS 232 interface in accordance with the PC standard with a 9 pin Sub D male connector is present then a straight through cable as shown in Fig 3 2 may be used Refer also to Operating Instructions GA 05 281 Links for activation of the bus terminator 0 5 A 24
42. this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanently 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 43 Operation 3 8 Changing the frequency dependent normal operation level Depending on the quality of the vacuum which needs to be provided by the turbomolecular pump it may make sense to reduce the frequency dependent normal operation thres hold so that the ready status can be attained faster by the vacuum system The factory default of 90 96 represents a good compromise so that a change will hardly ever be required For this proceed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 25 Frequency dependent normal operation level The possible values for parameter 25 can be varied within the limits of 35 to 99 96 of parameter 24 nominal speed depends on the type of connected pump So as to retain the value saved for parameter 25 when switching the pump off the parameter value needs to be saved permanently For this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanently 44 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum Operation 3 9 Changing the maximum permissible run up time In vacuum systems at a high backing pressure or with increased quantities of gas during the run up phase the run up time for the turbomolecular pump ma
43. y Check parameters Disconnect the DC supply no or connect serial interface and stop via bus 17200492 002 A5 04 2011 O Oerlikon Leybold Vacuum Waste Disposal 6 Waste Disposal The equipment may have been contaminated by the pro Contamination cess or by environmental influences In this case the equip ment must be decontaminated in accordance with the rele vant regulations We offer this service at fixed prices Further details are available on request Contaminated parts can be detrimental to health and CAUTION environment Before beginning with any work first find out whether any parts are contaminated Adhere to the A relevant regulations and take the necessary precautions when handling contaminated parts Separate clean components according to their materials and dispose of these accordingly We offer this service Further details are available on request This product complies with the European Community RoHS compliance Regulation 2002 95 ROHS Restriction of Hazardous Substances 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 97 Notes 58 17200492 002 AS 04 2011 Oerlikon Leybold Vacuum cerlikon leybold vacuum EC Declaration of Conformity The manufacturer Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Germany Tel 49 0 221 347 0 info vacuum oerlikon com herewith declares that the products specified and listed below which we have placed on the market co
44. y be longer This will then cause the frequency converter to output an error message The maximum permissible run up time is changed as follows With the aid of a Windows PC and the PC software TURBO DRIVE Server change the setting for the parame ter 32 Maximum run up time The possible values for parameter 32 can be varied within the limits of P183 to 2000 seconds The default setting is 720 seconds As a rule no value below 720 seconds should be entered as this would give rise to unnecessary error messages If a signifi cantly higher value than 720 seconds is required this may indicate that the turbomolecular pump is being overloaded For this reason in such a case the temperature data from the frequency converter and the turbomolecular pump parameter 7 motor temperature 11 frequency conver ter temperature 125 127 bearing temperature should be specially monitored during application trials So as to retain the value saved for parameter 32 when switching the pump off the parameter value needs to be saved permanently For this enter any value for example 1 for parameter 8 Thereafter changed parameters will be saved permanently 17200492 002 A5 04 2011 Oerlikon Leybold Vacuum 45 Operation 3 10 Changing the start delay time Generally it will make sense to let the turbomolecular pump run up immediately after applying the start command However when operating two or more turbomolecular pumps off a single pow
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