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ANT180-L Series Stage User`s Manual

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1. 2 11 1 Optional Features 2 2 lt 2 eee eile ec ec e te bcems oed icri s elc oes 2 1 1 2 Model Numbers 3 12 Ee D os So oie eee a aids ne ee ae on Se Petts get oes Se e 4 1 3 Safety Procedures and Warnings 2 22 0 ooo 5 1 4 EC Declaration of Incorporation 2 22 0 22222 c cece cece cece cece cece eccccceccccceeeeeeeeees 7 Chapter 2 Installation 9 2 1 Unpacking and Handling the 1 9 2 2 Shipping Bracket 22 2 2 222 c ce ccc cece cece cece araroa oronro nann 10 2 3 Preparing the Mounting 11 2 4 Securing the Stage to the Mounting 12 2 5 Attaching the Payload to the 1 14 2 6 Electrical Installation 15 Chapter 3 Operating 17 3 1 Environmental Specifications 2 2 22 2 22 00 co ccc ce 17 3 2 Accuracy
2. 21 Load Capability of ANT180 260 L 22 Load Capability of ANT180 360 L Stages 22 ANT180 L Series Limit Switch Wiring 22 0 0 2 cc cceeceeeecccceeeecccccceceeececceceeeeees 23 LNAS Encoder Option Limit Wiring 2 0 0 0 2 cc ccceeeeececcccececcccccccececcececceeeeees 24 www aerotech com V List of Figures vi ANT180 L Series Stage User s Manual www aerotech com ANT180 L Series Stage User s Manual List of Tables List of Tables Table 1 1 Model Numbering System for ANT180 L 3 Table 3 1 Environmental Specifications 17 Table 3 2 ANT180 L Series Specifications 00 22 cece cccccceeeeeccccecceceececcceeceeeeceeeees 18 Table 3 3 BLM 142 A Motor Specifications 2c cccccccccccccececcccceceeccceeceeeeeeeeeeeeees 19 Table 3 4 LNAS Encoder Option Limit Signals 2 0 0 0 2 cc cece ee ccccceceecccccccececccccceeeeerees 24 Table 3 5 Motor Connector Pin Assignments 25 Table 3 6 Feedback Connector Pin Assignments 02 cece cece cece ee eeeeeeeceeeececeeeeeeeees 25 Table 3 7 Connector Wiring Pinout Descriptions 2 2 0 0 eee cece cec
3. Ae 15 1 oraret reni edd hen tee 30 Preparing the Mounting Surface 11 Declaration 7 5 4 5 safety 5 Securing the Stage to the Mounting Surface 12 Electrical 15 service 29 End of Travel Limits 18 LNAS Encoder Option 24 Standard 2 Environmental 17 1 temperature 17 inspection schedule 29 U L Unpacking and Handling the Stage 9 limit 5 23 Linear Cross Roller Bearings 2 M lubricants vacuum 5 2 recommended Lu 30 vacuum 27 vacuum operation 27 l bricalioni 30 Warhilgs 2 5
4. 310 2 Values shown 100 C rise above 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 5 All performance and electrical specifications 10 6 Maximum winding temperature is 125 C 4 Force constant and motor constant specified at stall 7 Ambient operating temperature range 0 C 25 C Consult Aerotech for performance in elevated ambient temperatures www aerotech com Chapter 3 19 Operating Specifications ANT180 L Series Stage User s Manual 3 4 Load Capability It is recommended that application loads be symmetrically distributed whenever possible i e the payload should be centered on the stage table and the entire stage should be centered on the support structure With the stage lying flat horizontal and the application load vertically applied and symmetrically distributed the maximum vertical load carrying capacity of ANT180 L stages is 30 kg If cantilevered loads are applied refer to Figure 3 1 to find the loading condition then Figure 3 2 through Figure 3 5 to find the maximum allowable load Figure 3 1 Stage Loading Conditions 20 Chapter 3 www aerotech com ANT180 L Series Stage User s Manual Operating Specifications Load kg 0 1 1 1 1 1 j 0 50 100 150 200 250 300 350 400 Distance of load C G from tabletop center mm Figure 3 2 Load Capability
5. WARNING NOTE Mounting the stage requires passing the screws near the magnetic tracks mounted to the car riage Use caution when mounting with magnetic hardware or use non magnetic hardware that will not be attracted to the tracks NOTE Donot attempt to manually move the stage if it is connected to a power source Figure 2 3 Mounting Hole Locations 12 Chapter 2 www aerotech com ANT180 L Series Stage User s Manual Installation Figure 2 4 Cover Removal www aerotech com Chapter 2 13 Installation ANT180 L Series Stage User s Manual 2 5 Attaching the Payload to the Stage To prevent damage to the stage or parts test the operation of the stage before any payload is mounted to the stage tabletop Proceed with the electrical installation and test the motion control system in accordance with the system documentation Document all results for future reference For information on electrical connections refer to the Electrical Installation section later in this chapter the documentation of the motion control system delivered with the stage and the wiring drawings in Chapter 3 Operating Specifications The payload must be flat rigid and comparable to the stage in quality NOTE For valid accuracies the mounting interface should be flat within 1 um per 50 mm Refer to Section 3 4 for information on cantilevered loads and load positioning NOTE Donot attach a payload to the stage table with screws that are too lo
6. Warranty and Field 31 Appendix B Technical 33 US D ML mt M DA TA eee 35 Reader s 37 www aerotech com lii Table of Contents ANT180 L Series Stage User s Manual 17 www aerotech com ANT180 L Series Stage User s Manual List Of Figures List of Figures Figure 1 1 Figure 1 2 Figure 2 1 Figure 2 2 Figure 2 3 Figure 2 4 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 3 5 Figure 3 6 Figure 3 7 ANT180 L Linear Positioning Stage sssssssssssssssssseee eese 1 ANT180 L Dimensions sssssssssssssses se sessili riii liil 222222222222 4 Shipping Bracket Used on ANT180 L 2 22 eee cee cece ec ccccccececcccccccececcccceeeeeeees 10 Mounting to a Flat Surface 0 2 2 ccc ccc cccc ccc ceecccccceeeccccccceeeececcceeeeeeeees 11 Mounting Hole Locations 2 00 ccccc eee cceccececcccccccceccccccecceececcceeeeeeeecceeeees 12 End Cover Removal 2 2 0 ceeeccccccceccccccccececcccccceececcccceceeeecccceceeeeeeeeees 13 Stage Loading Conditions cece ee e eese sess 20 Load Capability of ANT180 160 L Stages 21 Load Capability of ANT180 210 L Stages
7. 2011 www aerotech com Chapter 1 7 Overview ANT180 L Series Stage User s Manual 8 Chapter 1 www aerotech com ANT180 L Series Stage User s Manual Installation Chapter 2 Installation This chapter describes the installation procedure for the ANT 180 L stage including handling the stage prop erly preparing the mounting surface to accept the stage securing the stage to the mounting surface attach ing the payload and making the electrical connections Installation must follow the instructions in this chapter Failure to follow these instructions could result in injury and damage to the equipment WARNING 2 1 Unpacking and Handling the Stage Carefully remove the stage from the protective shipping container Use compressed nitrogen or clean dry air to remove any dust or debris that has collected during shipping Visually inspect the stage for damage If any damage has occurred during shipping report it immediately Remove stage shipping brackets Set the stage on a smooth flat and clean surface This is a simple yet very important step in maintaining the integrity of the stage Each stage has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate this label and record the infor mation for later reference Improper stage handling could adversely affect the stage s performance Therefore use care when moving the
8. Continuous 110 5 N 110 5 N 110 5 N 110 5 N 30k Load Capacity 2 8 g g 2 20kg 20kg Stage Mass 12 8 kg 17 6 kg 224 kg MTBF Mean Time Between Failure 30 000 hours 1 Certified with each stage 2 Axis orientation for on axis loading is listed 3 Specifications are for single axis systems measured 25mm above the table top Performance of multi axis systems is payload and workpoint dependent Consult factory for multi axis or non standard applications 4 PLUS requires the use of an Aerotech controller 5 Specifications are LNAS and LTAS only Consult factory for specifications regarding LT X50 option 18 Chapter 3 www aerotech com ANT180 L Series Stage User s Manual Operating Specifications Table 3 3 BLM 142 A Motor Specifications roars ators Performance Specifications 1 9 Electrical Specifications 5 BEMF Constant Line Line Max V mis Viin s 40 96 1 04 Continuous Current No cooling 2 Amprms 3 10 2 19 in s Peak Current Stall 19 44 13 75 Force Constant Sine Drive 35 63 8 01 5013911133 Motor Constant 2 10 53 2 37 Resistance 25 C Line Line 10 90 Inductance Line Line Thermal Resistance No cooling Maxumum Bus Voltage 340 Mechanical Specifications Magnetic Pole Pitch 30 48 1 20 1 Performance is dependent upon heat sink configuration system cooling conditions and ambitent temperature d Bos
9. L Series Limit Switch Wiring The input to the controller is seen as a logic 0 typical 0 4V 12 8 mA when no limit condition is present When the limit switch is activated a 5V source through a pull up resistor on the controller causes a logic 1 typically 4 8 5 V to be seen by the controller input See Figure 3 6 for a diagram of limit switch wiring Www aerotech com Chapter 3 23 Operating Specifications ANT180 L Series Stage User s Manual 3 5 2 Limit Operation with the LNAS Encoder Option The limit signals provided by the encoder with the LNAS encoder option are nonstandard These two signals do not directly indicate end of travel limits There are two TTL compatible open collector signals capable of driving 8mA Table 3 4 describes these two signals Table 3 4 4 5 Encoder Option Limit Signals Sigma Internal Encoder Signal Name CCW LMT EOT Limit indicator non directional As shown in Figure 3 7 if the CCW LMT signal is true the CW LMT signal will indicate which end of travel limit is active Controller Stage Limit State Diagram Limit 1 F No Limit CCW HOMING CCW LMT 24 CW LMT 42 HOMING Center of Travel HM LMT 22 No Connection Figure 3 7 LNAS Encoder Option Limit Wiring 24 Chapter 3 www aerotech com ANT180 L Series Stage User s Manual Operating Specifications 3 6 Standard Wiring ANT180 L stages come equipped with motor and feedback connectors comple
10. and Temperature Effects 0 00 17 3 3 Basic Specifications 00000000 ce cee eee cece ee eeeeeeeeeeeeeeeeeeees 18 3 4 Load annaa 20 3 5 Limit 23 3 5 1 Limit Switch Wiring 23 3 5 2 Limit Operation with the LNAS Encoder 24 3 6 Standard Wiring 0 222222 cece cece cece ccc cece ccc cece eee e e eee esse esses esee esses sesso 25 3 7 Vacuum Operation ____ _ 27 3 7 1 Special Guidelines 27 Chapter 4 29 4 1 Service and Inspection Schedule 22 2 2 cece cece cccccceececcccececececcccceeeeecccceeeees 29 4 2 Cleaning and Lubrication ccc ccc 30 4 2 1 Recommended Cleaning Solvents 30 4 2 2 Important Notes on Lubrication 2 0 0 0 ccc cece eccecccccceeeccecccccceeececceeees 30 4 2 3 Lubrication and Cleaning Process 30 Appendix A
11. debris 4 Apply athin continuous film of lubricant to the exposed v channels of the bearing rails on both ends of the stage A good quality natural bristle artist s brush makes an excellent applicator Do not use any applicator that could scratch or otherwise damage the v channels 5 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides The stage table should move freely with little resistance Repeat steps 2 through 4 for any areas covered by the original table position Restore power to the stage drive the stage table back to its original position to redistribute lubricants 30 Chapter 4 www aerotech com ANT180 L Series Stage User s Manual Warranty and Field Service Appendix A Warranty and Field Service Aerotech Inc warrants its products to be free from defects caused by faulty mate rials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing or issuing credit at its option for any products that are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or sub sequently provided or whether or not Aerotech s products are specifically designed and or manufact
12. lubrication and cleaning process 30 WINING EIE ED 23 lubrication 29 Wiring 25 www aerotech com Index 35 ANT180 L Series Stage User s Manual Index 36 Index www aerotech com Reader s Comments ANT180 L Series Stage Manual P N EDS153 April 15 2011 Revision 1 02 00 Please answer the questions below and add any suggestions for improving this doc ument AEROTECH Is the manual Adequate to the subject 11555 Well organized Clearly presented Well illustrated i How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples C T SmwPeWbes Nam seria erp Name Aerotech Subsidiary Email Order Maiyourcommentsto Farto Aerotech Inc 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 U S A service aerotech com
13. of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be deter Returned Product War mined If upon Aerotech s examination a warranted defect exists then the prod ranty Determination uct s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an airfreight return the product s will be shipped collect Warranty repairs do not extend the original warranty period After Aerotech s examination the buyer shall be notified of the repair cost At such Returned Product time the buyer must issue a valid purchase order to cover the cost of the repair and Non warranty Deter freight or authorize the product s to be shipped back as is at the buyer s mination expense Failure to obtain a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement com ponents are warranted for one year from date of shipment At times the buyer may desire to expedite a repair Regardless of warranty orout Rush Service of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval www aerotech com Appendix A 31 Warranty and Field Service ANT180 L Series Stage User s Manual On site Warranty Repair On s
14. the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER 4 1 Service and Inspection Schedule Lubricant inspection and replenishment in ANT180 L series stages depends on conditions such as duty cycle speed and the environment Inspect the stage once per month until a trend develops for the appli cation Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces In general lubricate stages operating in a clean environment annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris lubrication every six months is rec ommended If the application process uses only a small portion of travel for most of the duty cycle it is recommended that the stage be periodically driven through full travel to redistribute the lubrication in the bearings The motor is completely non contact and requires no lubrication www aerotech com Chapter 4 29 Maintenance ANT180 L Series Stage User s Manual 4 2 Cleaning and Lubrication 4 2 1 Recommended Cleaning Solvents For standard cross roller bearings Kluberplex BEM 34 132 grease is recommended For high speed applications i e near max speed at a duty cycle of 5096 frequent maintenance with stand ard lubricants is required If a solvent is necessary for cleaning the stage use isopropyl alcohol 4 2 2 Important Notes o
15. ANT180 L Series Stage User s Manual P N EDS153 Revision 1 02 00 Dedicated to the Science of Motion Aerotech Inc 101 Zeta Drive n Pittsburgh PA 15238 AEROTECH Phone 412 963 7470 Fax 412 963 7459 www aerotech com Product Registration Technical Support Revision History Register online at http www aerotech com prodreg cfm United States Headquarters Phone 412 967 6440 Fax 412 967 6870 Email service aerotech com United Kingdom Phone 44 118 940 9400 Fax 44 118 940 9401 Email service aerotech co uk Germany Phone 49 911 967 9370 Fax 49 911 967 93720 Email service aerotechgmbh de Japan Phone 81 0 47 489 1741 Sales Phone 81 0 47 489 1742 Service Fax 81 0 47 489 1743 Email service aerotechkk com jp China Phone 852 3793 3488 Email saleschina aerotech com Revision 1 02 00 April 15 2011 Revision 1 01 00 November 5 2010 Revision 1 00 00 January 19 2010 Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies Aerotech Inc 2011 ANT180 L Series Stage User s Manual Table of Contents Table of Contents Table of es acne eee iii LiStiOf FIQUIOS ERR EE V Eist or Tables E ee een ee Se vii Chapter 1 1 1 1 Standard 1
16. POWER D aA CONNECTOR A STAGE HAS SLOTTED COUNTERBORED HOLES TO ACCOMODATE BOTH METRIC AND ENGLISH MOUNTING PATTERNS D MOUNTING STAGE NOMINAL C HARDSTOP STAGE MODEL PATTERN Stace voos renin TRAVEL TRAVEL LENGTH mm in De a 45 awreosoi ss o DIMENSIONS MILLIMETERS Figure 1 2 ANT180 L Dimensions 4 Chapter 1 www aerotech com ANT 180 L Series Stage User s Manual Overview 1 3 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and damage to the equipment This manual and any additional instructions included with the stage should be retained for the lifetime of the stage A DANGER gt DANGER gt DANGER gt DANGER WARNING WARNING WARNING www aerotech com Chapter 1 5 To minimize the possibility of electrical shock and bodily injury or death disconnect all elec trical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circuit is in use ensure that no person comes in contact with the circuitry when the stage is connected to a power source To minimize the possib
17. cleaned vented stainless steel fasteners when securing the stage 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vac uum compatible lubricants could result in excessive motor operating temperatures Because of this consider all continuous torque ratings to be 40 to 60 lower than the value specified for operation in nor mal atmospheric environment Reduce motor usage accordingly 5 Forvacuum applications the recommended lubricant is a small quantity of Braycote 602EF grease or a substitute of equal quality Baking vacuum components between 100 and 125 C for 24 to 48 hours significantly reduces outgassing at initial pump down to vacuum pressure and evaporates water vapor that impregnates porous surfaces on the aluminum surfaces and Teflon cables Aerotech recommends that customers bake out vacuum systems when first installing them in the vacuum chamber www aerotech com Chapter 3 27 Operating Specifications ANT180 L Series Stage User s Manual 28 Chapter 3 www aerotech com ANT180 L Series Stage User s Manual Maintenance Chapter 4 Maintenance This chapter will cover information about intervals between lubrications detail the lubrication and inspection process and cover which lubricants are recommended for use NOTE The bearing area must be kept free of foreign matter and moisture otherwise the performance and life expectancy of the stage will be reduced To minimize
18. e cccccecececcccccecececccceeees 26 Table B 1 Current Changes 1 02 00 rre rere 33 Table B 2 Archived Changes 2 2 eee cece cece mI Imre 34 www aerotech com vii List of Tables ANT180 L Series Stage User s Manual viii www aerotech com ANT180 L Series Stage User s Manual Overview Chapter 1 Overview The ANT180 L series linear mechanical bearing positioning stages are designed to provide excellent per formance and high load capacity over long travel ranges The compact and powerful design compliments out standing accuracy repeatability resolution and stability ANT180 L stages are offered in two accuracy grades and can be ordered as multi axis systems This manual describes Aerotech s ANT 180 L series positioning stage Figure 1 1 shows a typical ANT180 L linear positioning stage This chapter introduces standard and optional features of the ANT180 L explains the model numbering sys tem and gives general safety precautions Figure 1 1 ANT180 L Linear Positioning Stage NOTE Aerotech continually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Www aerotech com Chapter 1 1 Overview ANT180 L Series Stage User s Manual 1 1 Standard Features The ANT180 L series stages incorporate lin
19. ear anti creep cross roller bearings a linear motor and a non con tact linear encoder These features allow the ANT180 L series stages to provide excellent performance in speed accuracy resolution repeatability and reliability The linear cross roller bearings offer excellent stiffness high load carrying capabilities and minimal friction for smooth movement The cross roller bearings also incorporate a system to prevent cage creep and keep the rollers centered in the bearing rails The ANT 180 L series stages are driven by a linear motor The brushless linear motor uses an ironless forcer which means there is zero cogging and there are no attractive forces resulting in unsurpassed smoothness of motion A moving magnet track design eliminates the need for cable management improving long term reliability ANT180 L stages have four standard travel lengths 160 mm 210 mm 260 mm and 360 mm All ANT180 L stages contain integrated 25 pin D feedback and hi power D motor connectors This allows for fast and simple connections and freedom from flying leads exiting the stage 1 1 1 Optional Features ANT180 L stages can be ordered as a single axis or as part of a standard multi axis configuration An optional customer air line can also be added to a multi axis system which delivers a 6 mm hose to the table top of the top axis Cable management and connectorization for a Z or Theta axis is also a standard option Aerotech offers three enc
20. he repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Pittsburgh PA Fax 412 963 7459 15238 2897 Appendix A www aerotech com ANT180 L Series Stage User s Manual Technical Changes Appendix B Technical Changes Table B 1 Current Changes 1 02 00 Section s Affected General Information Section 3 5 2 Added section www aerotech com Appendix B 33 Technical Changes ANT180 L Series Stage User s Manual Table B 2 Archived Changes Section s Affected General Information 1 01 00 Section 1 4 Added section 1 01 00 Section 3 1 Added section Chapter 2 Installation Sec Added safety information and warnings tion 2 1 Section 2 4 Sec tion 2 6 and Section 1 3 1 01 00 Section 3 6 Added note about current requirements of motor and ground wires 34 Appendix B www aerotech com Index ANT180 L Series Stage User s Manual Index M A model 9 Attaching the 14 Motor 2 Motor 18 B Multi axis 5 30 BLMC 142 18 brushless linear motor 2 operating conditions 17 Cc Optional 2 Cables eoe Sao LE E
21. ications 3 7 Vacuum Operation Aerotech can specially prepare the ANT 180 L series stage for operation in vacuum environments Aerotech offers two vacuum preparation options one for low vacuum for use in atmospheric pressures to 10 3 torr and one for high vacuum preparation for environments from 1073 to 10 torr As part of this preparation attention to detail during modification cleaning and assembly results in stages with optimal performance in vacuum applications Preparation techniques for stages that will operate in a vacuum include e Lubrication with vacuum compatible lubricants e Use of materials fasteners and coatings with vacuum outgas performance compatible with the level of vacuum specified e Forhigh vacuum stages elimination of situations that may allow gases to become temporarily trapped during pump down e Extensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene bag 3 7 1 Special Guidelines To ensure that the stage will continue to perform well in the vacuum environment follow the guidelines listed below in addition to standard handling installation and lubrication guidelines outlined earlier in this manual Do not remove the stage from the sealed bag until it is ready for use 2 Always handle the stage in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use
22. ility of bodily injury or death disconnect all electrical power prior to making any mechanical adjustments Moving parts of the stage can cause crushing or shearing injuries All personnel must remain clear of any moving parts Improper use of the stage can cause damage shock injury or death Read and understand this manual before operating the stage If the stage is used in a manner not specified by the manufacturer the protection provided by the stage can be impaired Stage cables can pose a tripping hazard Securely mount and position all stage cables to avoid potential hazards Overview A A A A A A 2 2 2 2 2 2 Z Z 2 2 2 Z ANT180 L Series Stage User s Manual Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and damage to the equipment Use care when moving the stage Manually lifting or transporting stages can result in injury Only trained personnel should operate inspect and maintain the stage This stage is intended for light industrial manufacturing or laboratory use Use of the stage for unintended applications can result in injury and damage to the equipment Before using this stage perform an operator risk assessment to determine the needed safety requ
23. irements Chapter 1 www aerotech com ANT180 L Series Stage User s Manual Overview 1 4 EC Declaration of Incorporation Manufactorer Aerotech Inc 101 Zeta Drive Pittsburgh PA 15238 USA AEROTECH Nx herewith declares that the product Aerotech Inc ANT180 L Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006 42 EC as amended does therefore not in every respect comply with the provisions of this directive and that the following harmonized European standards have been applied EN ISO 12100 1 2 2003 A1 2009 Safety of machinery Basic concepts general principles for design ISO 14121 1 2007 Safety of machinery Risk assessment Par 1 Principles EN 60204 1 2005 Safety of machinery Electrical equipment of machines Part 1 General requirements and further more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration Authorized Representative Manfred Besold Address Name Position Location Date AEROTECH GmbH S d West Park 90 D 90449 N mberg Alex Weibel Cb Engineer Verifying Compliance Pittsburgh PA April 15
24. ite Non warranty 32 Repair Company Address If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs For warranty field repairs the cus tomer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or pur chased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech cov ering all transportation and subsistence costs and the prevailing labor cost includ ing travel time necessary to complete t
25. n Lubrication When cleaning and or lubricating components of the ANT180 L series stages Be sure to use a clean dry soft lint free cloth for cleaning 2 Take the opportunity during the lubrication procedure to inspect the cross roller bearings for any damage or signs of wear 3 Inapplications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should not be loosened or disassembled 4 Because proper assembly and calibration can only be done at the factory or in the field by a qualified technician do not further disassemble the stage If the stage is disassembled then reassembled a laser interferometer is required for post assembly verification to maintain warranties 4 2 3 Lubrication and Cleaning Process The lubrication and cleaning process is outlined in the steps that follow Before beginning lubrication see Section 4 2 1 for recommended lubricants To minimize the possibility of bodily injury confirm that all electrical power is disconnected prior to making any mechanical adjustments DANGER Remove power to the stage Remove any accumulated dust or debris from the inside of the assembly Remove any dirty or dried lubricant from the v channels of the linear bearing rails Use a clean lint free cloth with a side to side motion You can use swab soaked in Isopropyl Alcohol to remove stubbom
26. ng Mounting screws should not project more than 7 mm 276 into the stage table top 14 Chapter 2 www aerotech com ANT180 L Series Stage User s Manual Installation 2 6 Electrical Installation Electrical installation requirements will vary depending on stage options Installation instructions in this sec tion are for stages equipped with standard Aerotech linear motors intended for use with an Aerotech motion control system Contact Aerotech for further information regarding stages that are otherwise configured Aerotech motion control systems are adjusted at the factory for optimum performance When the ANT 180 L series stage is part of a complete Aerotech motion control system setup involves connecting a stage and motor combination to the appropriate drive chassis with the cables provided Connect the provided cables to the motor and encoder connectors on the stage the number and location of the connectors can vary depend ing on the options purchased Labels on the drive indicate the appropriate connections Refer to your drive manuals and documentation for additional installation and operation information In some cases if the sys tem is uniquely configured a drawing showing system interconnects is supplied An integral linear motor comes mounted to all ANT180 L stages The electrical wiring from the motor and encoder are integrated into two main connectors at the factory Refer to Section 3 6 for standard motor wir ing and connect
27. o a Flat Surface NOTE To maintain accuracy the mounting surface should be flat within 5 um over the entire stage foot print NOTE The stage base is precision machined and verified for flatness prior to stage assembly at the fac tory If machining is required to achieve the desired flatness it should be performed on the mounting sur face rather than the stage base Shimming should be avoided if possible www aerotech com Chapter 2 11 Installation ANT180 L Series Stage User s Manual 2 4 Securing the Stage to the Mounting Surface The ANT180 L stage is designed to be mounted using either M6 or 74 20 socket head cap screws SHCS on standard Metric or English hole pattems respectively ANT180 160 L stages mount using four SHCS while all stages of longer travel mount with eight SHCS Figure 2 3 shows the location of the mounting holes Although access holes are provided through the carriage it may be necessary to remove the stage end cov ers to help guide the mounting hardware into the correct counterbored hole Refer to Figure 2 4 for the loca tion of the end covers and mounting hardware Holes are provided in the carriage tabletop to allow access to these holes when the carriage is moved to both ends of travel Use 25 mm or 1 long screws to achieve 2x diameter thread engagement Torque the mounting screws to 5 4 N m 4 ft lb The stage must be mounted securely Improper mounting can result in injury and damage to the equipment
28. oder options for the ANT180 L series The LTAS option selects a standard accu racy amplified sine output encoder with a 20 um signal period The LTX50 option selects a standard accu racy 0 1 micron line driver output encoder with a 20 um signal period The LNAS option selects a high accuracy amplified sine output encoder with a 4 um signal period For vacuum applications two vacuum preparation options are available one compatible with low vacuum environments down to 10 torr and the other for high vacuum 1073 to 1078 torr Contact Aerotech for more details on optional features and configurations 2 Chapter 1 www aerotech com ANT180 L Series Stage User s Manual Overview 1 1 2 Model Numbers Stage model number example ANT 180 210 L LTX50 XY AIR The tables below list the available options in the order they appear in the example above Aerotech con tinually improves its product offerings and listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Table 1 1 Model Numbering System for ANT180 L Stages www aerotech com Chapter 1 3 Overview ANT1 80 L Series Stage User s Manual 1 2 Dimensions M6X1 0 V6 23X ANT180 160 210 31X ANT180 260 360 co A ANT180 260 L AND ANT180 360 L ONLY ca s 180 E H fr q L M6 1 4 20 FEEDBACK AND STAGE MOUNTING MOTOR
29. of ANT180 160 L Stages 35 hp Ls 30 25r 20 ua sc 15 10 Sr og L X 0 50 100 150 200 250 300 350 400 Distance of load C G from tabletop center mm Figure 3 3 Load Capability of ANT180 210 L Stages www aerotech com Chapter 3 21 22 Operating Specifications Load kg Load kg ANT180 L Series Stage User s Manual 1 j 50 100 150 200 250 300 350 400 Distance of load C G from tabletop center mm Figure 3 4 Load Capability of ANT180 260 L Stages 1 L 1 1 L 50 100 150 200 250 300 350 400 Distance of load C G from tabletop center mm Figure 3 5 Load Capability of ANT180 360 L Stages Chapter 3 www aerotech com ANT 180 L Series Stage User s Manual Operating Specifications 3 5 Limit Switches ANT 180 L series stages are provided with two EOT end of travel limit switches The limit switches signal when the stage has reached its maximum useable travel distance in both directions 3 5 1 Limit Switch Wiring Limit switches are open collector TTL compatible devices that change output states when the stage approaches its maximum travel distance Since they are open collector devices they may be interfaced to 24 Volt logic inputs Feedback Connector 1 38DG 24 VIO Common 24 GRN CW Limit 24 WHT N C Switch Controller N C Switch 24 GRY CCW Limit Figure 3 6 ANT180
30. or pin outputs Never connect or disconnect any electrical component or connecting cable while power is applied or serious damage may result WARNING The stage s protective ground is integrated into the motor and encoder connector If you are using cables other than those provided by Aerotech you must connect the pin listed as the ground in Section 3 6 to a ground connection WARNING www aerotech com Chapter 2 15 Installation ANT180 L Series Stage User s Manual 16 Chapter 2 www aerotech com ANT180 L Series Stage User s Manual Operating Specifications Chapter 3 Operating Specifications The surrounding environment and operating conditions can affect the performance and service life of the stage This chapter provides information on ideal environmental and operating conditions Also included are instructions for estimating load capability given various loadings 3 1 Environmental Specifications The environmental specifications for the ANT 180 L are listed in the following table Table 3 1 Environmental Specifications Ambient Operating 10 to 35 C 50 to 95 F Temperature The optimal operating temperature is 20 C 2 C 68 F 4 F If at any time the operating tem perature deviates from 20 C degradation in performance could occur Contact Aerotech for information regarding your specific application and environment Storage 0 to 40 C 32 to 104 F in original shipping packaging Humidity Ope
31. racy The severity of temperature effects on all stage specifications depends on many different environmental conditions including how the stage is mounted Contact the fac tory for more details The thermal expansion coefficient of the encoder scale depends on the option purchased For LT stages this value is 3 25 ppm C For LN stages this value is 7 5 Travel will increase or decrease at this rate as the encoder scale temperature deviates from 20 C 68 F www aerotech com Chapter 3 17 Operating Specifications ANT180 L Series Stage User s Manual 3 3 Basic Specifications Basic ANT 180 L series positioning stage specifications are shown in Table 3 2 Resolution is dependent on encoder resolution and controller interpolation All ANT180 L travels are equipped with a BML 142 A linear motor as standard Specifications for the BLM 142 A motor are given in Table 3 3 Table 3 2 ANT180 L Series Specifications ANT180 ANT180 ANT180 ANT180 Mechanical Specifications 160 L 210 L 260 L 360 L Accuracy 1 4 i HN tom im im im Resolution 3m 3m Repeatabi 09 Straightness 1 25 um 1 75 um Flatness 1 25 um 1 75 um hao sec 16arcsec 500 500 500 500 Maximum Speed mm sec mm sec mm sec mm sec Maximum Acceleration 2 g 20 m s no Load Speed Stability See graph for typical performance Settling Time See graph for typical performance Maximum Force
32. rating 40 percent to 60 percent RH The optimal operating humidity is 50 percent RH Storage 30 percent to 60 percent RH non condensing in original packaging Altitude Operating 0 to 2 000 m 0 to 6 562 ft above sea level dE Contact Aerotech if your specific application involves use above 2 000 m or below sea level Vibration Use the system in a low vibration environment Excessive floor or acoustical vibration can affect stage and system performance Contact Aerotech for information regarding your specific appli cation Dust Expo The ANT180 L stages are not suited for dusty or wet environments This equates to an ingress sure protection rating of IPOO Indoor use only Do not expose the stage to environments or conditions outside the specified range of oper ating environments Operation in conditions other than those specified can cause damage to the equipment WARNING 3 2 Accuracy and Temperature Effects The accuracy specification of ANT180 L series stages is measured at the center of travel 25 mm above the tabletop with the stage in a horizontal position The stage is assumed to be fully supported by a mounting sur face meeting or exceeding the specification in Section 2 3 Extreme temperature changes could cause a decrease in performance or permanent damage to the stage Aerotech stages are designed for and built in a 20 C 68 F environment Any deviation from standard oper ating temperature will affect stage accu
33. stage Manually lifting or transporting stages can result in injury WARNING Lift the stage only by the base WARNING www aerotech com Chapter 2 9 Installation ANT180 L Series Stage User s Manual 2 2 Shipping Bracket Aerotech provides a shipping bracket to prevent unwanted stage motion and potential damage from occur ring during shipment or transport The bracket is red anodized aluminum and it must be removed from the stage before it can operate Figure 2 1 depicts the shipping bracket as it is used to constrain an ANT 180 L stage Figure 2 1 Shipping Bracket Used on ANT180 L NOTE After removing the shipping bracket you should retain it for future use In the event the stage requires service at the factory the shipping bracket should be reattached to ensure the stage ships safely 10 Chapter 2 www aerotech com ANT180 L Series Stage User s Manual Installation 2 3 Preparing the Mounting Surface The mounting surface should be flat to 5 um and have adequate stiffness in order to achieve the maximum performance from the ANT 180 L When an ANT180 L series stage is mounted to a warped surface the stage can be distorted as the mounting screws are tightened see Figure 2 2 Any distortion will decrease the over all accuracy of the stage Adjustments to the mounting surface must be done before the stage is secured Mounting to a Flat Surface Mounting to a Curved Surface Exaggerated Figure 2 2 Mounting t
34. tely wired and integrated into the stage For reference connector pin assignments and general wiring information are given in the following tables Pin assignments are defined in Table 3 7 Table 3 5 Motor Connector Pin Assignments 622 6 6 JJo 5 RESERVED MTR B 4 RESERVED Pin 3 5 RESERVED MTR SHLD 4 FRM GND Table 3 6 Feedback Connector Pin Assignments 13 9 5 1 A iria O06 DO 25 22 18 14 5 MKR N LIMIT COMMON meoo vA SSCS Pac HC www aerotech com Chapter 3 25 Operating Specifications ANT180 L Series Stage User s Manual Table 3 7 Connector Wiring Pinout Descriptions PinOutput Hc Effect Brushless motor commutation rack output TTL line driven signal with rotary motor H Marker Incremental encoder output pulse given once per revolution Typically used for home ref erence cycle S MKR N Incremental encoder output either the compliment of Marker with a line driven TTL type encoder or 2 5 V DC bias level with amplified sine wave type encoder C MKR Sine Incremental encoder output either TTL line driven or amplified sign wave type signal SIN N Incremental encoder output Compliment of sin W 5V T THERM Positive lead for motor thermistor to motion controller S 26 Chapter 3 www aerotech com ANT180 L Series Stage User s Manual Operating Specif
35. ured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its prod ucts shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum Laser Products period of one year from date of shipment This warranty covers defects in work manship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier Return Procedure by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty with out first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance

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