4 Installation Procedure - Ideal Vacuum Products, LLC
Contents
1. 10 10 1074 CURRENT A 1075 10 1077 1051 10 9 10 8 1077 10 8 10 5 1074 PRESSURE mbar Figure 8 Pressure vs current diagram Vaclon Plus 300 pumps User Manual 87 900 103 01 F 57 90 5 Technical Information Plus 300 Noble Diode Vaclon Plus 300 Noble Diode O m N zi a m m Ta 0 o z a 5 Oo N z 10 8 1077 PRESSURE mbar Figure 9 Pumping speed vs pressure for Nitrogen Ar PUMPING SPEED L SEC 10 8 1077 PRESSURE mbar Figure 10 Pumping speed vs pressure for Argon 50 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 x l Z Lu x g D o 10 9 1077 PRESSURE mbar Figure 11 Pressure vs current diagram Vaclon Plus 300 pumps User Manual 87 900 103 01 F 59 90 5 Technical Information Drawing Outline Drawing The fo2. Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Vaclon Plus 300 Starcell G m e e a m m A 0 o z a a N z 10 8 10 7 PRESSURE mbar Figure 4 Pumping speed vs pressure for Nitrogen After Saturation Ar PUMPING SPEED L SEC 10 8 1077 PRESSURE mbar Figure 5 Pumping speed vs pressure for Argon Vaclon Plus 300 pumps User Manual 87 900 103 01 F 55 90 5 Technical Information Plus 300 Starcell x zZ LLI x a D o 10 8 10 PRESSURE mbar Figure 6 Pressure vs current diagram 56 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Vaclon Plus 300 Diode B e o After Saturation e o N e o O m 2 a m ul O f o z Cu 3 Oo N z c e 10 8 107 PRESSURE mbar Figure 7 Pumping speed vs pressure for Nitrogen 1071
3. Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 103 01 F Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p
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5. Flange Connection VACUUM CHAMBER NUT Pal WAS DOUBLE END STUD 5 16 24 UNF WASHER NUT VACION Figure 20 Stud mounting kit 70 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Control Unit Connection WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or before removing it be sure the main power is removed from the control unit To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off Make sure that the pump is well connected to the grounded vacuum system Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely To disconnect the coaxial high voltage cable from the controller slide the safety locking sleeve very little sleeve travel is required from the control unit and at the same time pull on the male end of the cable conne
6. Pumping Element 78 Exchange of the High Voltage Feedthrough 79 Leakage Current Check 80 High potting 81 Pump Troubleshooting 82 Vaclon Plus Pump Replacement Parts and Accessories 83 Vaclon Plus Pump Controllers 84 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Description of the Vaclon Pump The Agilent Vaclon Plus 300 pumps are ion pumps and are available in three types StarCell Noble Diode Diode They operate in the pressure range from 107 to below 10 mbar Virtually all gases and vapors can be pumped successfully with the ion pump The pumping speed will vary depending on the system pressure the gas type and the applied operating voltage The latter can be optimized using Agilent controllers to achieve the lowest possible operating pressure The Vaclon Plus StarCell pump allows starting from as high as 5x10 mbar because ions are prevented from bombarding the system and pump walls at starting pressures and have high speed for inert gases The Vaclon Plus Diode and Noble Diode pumps require a lower starting pressure i e 10 mbar The tantalum in the Noble Diode pump enhances the noble gas pumping capacity although it somewhat reduces the high getterable gas pumping speed that the standard diode pump provides The Vaclon Plus StarCell is the latest variation of the Triode configuration Its patented design makes this ion pump the only one that can handle a high amount of Nobl
7. before removing it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the main power from the control unit to allow capacitors to discharge completely Vaclon Plus pumps are maintenance free In case of life time expiry or premature failure of the pump please contact your nearest Agilent sales service office for repair The Vaclon Plus 300 pumps are designed with exchangeable high voltage feedthrough and pump elements Vaclon Plus 300 pumps User Manual 87 900 103 01 F 77 90 5 Technical Information 78 90 Exchange of Pumping Element Remove the internal high voltage connections 1 2 j Remove the internal high voltage connections Remove the element holding brackets Pull the element out of the pocket and remove it through the inlet flange Clean the internal part of the pump with the appropriate solvent Put in the new element through the inlet flange Make sure that the element is fixed at its rear by the two press formed buttons of the element pocket and at its front by the element holding clamp Reattach the high voltage connections and test for continuity from the feedthrough Place a blank flange over the pump inlet and leak check it with a leak detector Bake out the blanked off pump while it is operating and leave i
8. dust and other undesirable materials Before breaking the pinch off seal consult the inspection procedure see preceding paragraph Vent the ion pump by opening the pinch off tubulation in a clean area free from smog dust pollen etc Venting with dry nitrogen gas is further recommended This can be done by placing a clean polyethylene bag over the ion pump flange Small pumps can be placed inside of the bag Purge the bag with clean dry nitrogen for several minutes then reach into the bag and release the internal vacuum using pliers to open the copper tube pinch off Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushing air as the pump is opened The pinch off seal is extremely sharp Be careful when opening Watch your fingers Use appropriate procedures to maintain the clean condition of the pump and vacuum system Unscrew the main flange bolts and lift the blank flange with the help of a bolt screwed into the available threaded hole Remove the ConFlat flange and the copper gasket plate Some particles of copper oxide may adhere to the outer edge of the flange gasket Be careful not to allow them or any other foreign materials to fall into the pump Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Connect the ion pump to the vacuum chamber with a short length and large diameter tubulation in or der to retain as mu
9. of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and they are very difficult to remove even by baking High voltage feedthrough is leaking lon pump leakage current causing higher pressure reading Correction procedure Reduce pressure to 105 mbar recommended 104 mbar minimum Leak check the vacuum system with a helium leak detector With the system under vacuum pump for several days or heat to 100 150 C for up to 15 hours Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see section BAKEOUT OPERATION Vaclon Plus 300 pumps User Manual 87 900 103 01 F Symptom 7 System fails to achieve desired UHV vacuum pressure 8 System fails to achieve desired UHV vacuum pressure Possible cause System not fully baked Water vapor limits base pressure System not appropriately cleaned for UHV Excessive outgassing from walls limits base pressure Technical Information 5 Correction procedure Bake the system walls thereby accelerating the desorption process Baking mobilizes the vapours so they can be cracked and pumped by discharge see section BAKEOUT OPERATION Clean all components for UHV and bake the system Vaclon Plus Pump Replacement Parts and Accessories Tab 3 a 919 1610 Part Number Noble Diode
10. 919 1620 Starcell 919 1640 With heaters installed 120 V pe Double ended Double ended with heaters 120 V installed 220 V 919 1611 919 1612 919 1651 e 919 1621 919 1622 919 1661 oe Cables and accessories HV rad Resist cable with interlock Vaclon Plus 300 pumps User Manual 87 900 103 01 F 929 0705 oo 919 1641 919 1642 a 919 1681 83 90 a 5 Technical Information 84 90 Plus Pump Controllers Pumping elements q ty 4 needed 919 9040 Replacement parts HV Feedthrough 919 9045 919 9030 Heaters power 480 W 120V Copper gasket for 6 inlet flange 10 pack Individually sealed Nut and bolt set for 6 inlet flange Copper gasket for 1 1 3 CF feedthrough flange 10 pack individually sealed Nut and bolt set for 1 1 3 CF feedthrough flange 8 32x3 4 25 919 0075 FG 0600 CI FB 0450 C12 For a complete overview of Agilent s extensive vacuum product line please refer to the Agilent Vacuum Catalogue Vaclon Plus Pump Controllers The following controller series are available to supply the Vaclon Plus pumps MiniVac Dual AUHV Please refer to the Agilent Vacuum Catalogue to choose the correct controller for each pump Vaclon Plus 300 pumps User Manual 87 900 103 01 F XE Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At
11. Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely CZ J Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 AD
12. DRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc GE Agilent Technologies ay Pi e90 KEE EE cet E e e e A Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e
13. Vaclon Plus 300 pumps User Manual 009 Installation Procedure e e e General Information 40 Preparation for Installation 41 Installation 43 Use 45 Operating Procedure 46 Maintenance 48 Disposal 48 Original Instructions for more info CLICK HERE deal M vacuum products 13 Agilent Technologies 39 90 www idealvac com 4 Installation Procedure Information General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Vaclon Plus series pumps are ion pumps commonly used to create ultra high vacuum due to their cleanliness ability to pump different gases and maintenance and vibration free operation The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if
14. axis z 0 mm Vaclon Plus 300 pumps User Manual 87 900 103 01 F 61 90 5 Technical Information Magnetic Field 1000 600 200 0 200 600 distance from flange center mm Figure 15 Stray magnetic field from flange along Y axis z 0 mm 1000 600 200 0 200 600 distance from flange center mm Figure 16 Stray magnetic field from flange along X axis z 100 mm 62 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 n I 1000 600 200 0 200 600 distance from flange centre mm Figure17 Stray magnetic field from flange along Y axis z 100 mm Bx m oc By Bz 400 600 800 1000 1200 distance from flange center mm Figure 18 Stray magnetic field from flange along Z axis Vaclon Plus 300 pumps User Manual 87 900 103 01 F 63 90 5 Technical Information Plus Pump Installation Vaclon Plus Pump Installation Inspection Procedure Vaclon Plus pumps are evacuated baked out sealed and leak checked at below 1x10 mbar prior shipping The following information and procedures can be used to optimize the vacuum integrity of a Vaclon Plus pump befo
15. ch pumping speed as possible Proceed as follows 1 Inspect the mating flanges for cleanliness and absence of scratches on the knife edge 2 Place a new copper gasket between pump flange and vacuum chamber flange 3 Bolt mating flanges of the pump to the chamber with the screws provided with the ion pump For flanges over NW 35 2 75 o d also mount washers below the nuts and screw heads 4 Use silver plated screws or apply high temperature lubricant to the screw threads Lubrication simplifies sealing and disassembly A recommended lubricant is Fel Pro C 100 Lubrication is essential to prevent galling of the nut and screw after bakeout 5 Attach the nuts and tighten each one to 6 11 Nm 4 5 8 ft Ibs of torque After tightening a nut always tighten the opposite nut with respect to the center of the flange This will partially close the gap between the flange faces 6 Repeat the sequential tightening for two more cycles 1 Continue tightening the bolts until the flange faces meet and a pronounced increase in torque is felt Note that it s not possible to install the screws from the lower side but only from the upper side of the flange To allow complete flexibility in the installation a stud mounting kit is available see Fig 20 For ordering information refer to the VacIon Plus Pump Replacement Parts and Accessories paragraph Vaclon Plus 300 pumps User Manual 87 900 103 01 F 69 90 5 Technical Information t
16. cing inside the pump as whiskers are burned away If arcing occurs wait at this voltage until the current is stable again Then slowly increase voltage again in steps up to a maximum voltage The maximum voltage may be applied to the pump for a period of about 15 seconds This should effectively remove any whiskers or sharp edges on the pump cathode WARNING Voltages developed in the High Potter power supply are potentially lethal Use caution during operation and ensure correct grounding connection Vaclon Plus 300 pumps User Manual 87 900 103 01 F 81 90 5 Technical Information Troubleshooting Pump Iroubleshooting Tab 2 Symptom 1 Slow starting 2 Slow starting more than 30 minutes 3 Slow pump down due to long exposure of viton parts to air 4 Slow pump down due to absorption of vapours on pump and system walls 6 Current higher than expected at any given pressure 82 90 Possible cause Starting vacuum pressure too high Air leaks which limit pressure to above 10 9 mbar and cause longer starting time Viton releases considerable gas after long exposure to air A bell jar system which reached 2 x 108 mbar in 24 hours after 30 minutes air exposure will only reach 1 x 107 mbar in 24 hours after 20 hours air exposure Vapours and gases admitted to a system are absorbed on the walls of the system and pump Subsequent reduction in pressure depends on the rate
17. ctor to remove it from the socket on the control unit Vaclon Plus 300 pumps User Manual 87 900 103 01 F 11 90 5 Technical Information Interlock Safety Interlock The Vaclon Plus pump feedthrough in conjunction with the cable P N 929 0705 0707 0708 and 0709 when used with the Agilent MidiVac DUAL and 4UHV control units allows the operation of the High Voltage Cable Safety Interlock feature When the high voltage cable connector is disconnected from the Vaclon Plus pump feedthrough the high voltage is automatically switched off by the control unit Heater Installation 72 90 The heating element Fig 21 is composed of two plates to be fixed to the pump case It is advisable to make a 10 15 minutes initial operation of the heater in a ventilated room to allow the evaporation of residual internal alloying elements To install the element proceed as follows Fig 22 1 Before removing the pole pieces mark their position and orientation for an easier assembly later on 2 Position the heating plate 1 inserting the threaded pins positioned on the pump jacket into the holes of the plate Be sure that the written heating plate side is towards you J Position the other heating plate 2 in the same way as the heating plate 1 4 Reinstall the pole pieces Position the connection box 3 on the upper side of the pump in an oppose position of the HV feedthrough with respect to the flange and fix it t
18. d sufficient to achieve full bakeout regeneration if the standard European heaters 230 Vac are operated at 240 Vac thus preventing overheating 3 Bakeout the VacIon pump for 24 hours If the pump is used in heavy gas load applications it is recommended to bakeout the pump for a longer period 4 Waituntil the pump cools down to room temperature and recovers its base pressure before using it in the application WARNING Do not touch the pump during the heating and cooling phases The high temperature may cause serious damage Vaclon Plus 300 pumps User Manual 87 900 103 01 F 75 90 5 Technical Information Procedure Operating Procedure 76 90 1 10 Using a clean roughing pump evacuate the system to a minimum starting pressure as stated by the technical specification 10 mbar or less is recommended To reach this pressure the use of an oil free turbo molecular roughing pump is recommended When starting an ion pump a slight increase in vacuum pressure is normal as the internal components are heated and outgassed If possible leave the roughing pump connected to the system while starting the ion pump This will make the startup faster and easier Connect the control unit to a suitable power source and switch the power on Switch on high voltage to the pump and observe the current and voltage Fastest starting is obtained using a high applied voltage 7 kilovolts for example The applied voltage may be r
19. e Gases better than Noble Diode and Triode and Hydrogen comparable to the Diode A positive polarity high voltage supply is required to operate Diode and Noble Diode pumps A negative polarity high voltage supply is required to operate StarCell pumps since the anode is grounded and the cathode is held at negative potential The inlet ConFlat flange is a 8 NW 150 Vaclon Plus 300 pumps User Manual 87 900 103 01 F 51 90 5 Technical Information of the Vaclon Pump Fig 2 shows the Vaclon Plus 300 pump Fig 3 shows the main assemblies of the pump Figure 2 Vaclon Plus 300 pump Inlet flange High voltage connector Element Figure 3 Pump main assemblies 52 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Technical Specification The following table details the main technical specifications of the Vaclon Plus 300 pumps Tab 1 Specification s StarCell Nob
20. educed later to optimize pumping and achieve the lowest vacuum pressure If started at 10 mbar the voltage will start at approximately 800 volts and increase to full voltage as the pump starts operating The current will start at several milliamps and slowly decrease to microamps or nanoamps as low vacuum pressure is achieved When first starting the pump if the voltage de creases instead of increasing reduce the vacuum pressure then start the ion pump again When the pump reaches its full operating volt age you may close the roughing valve If the pump does not start after 30 minutes of pumping see the section PUMP TROUBLE SHOOTING Once the pump reaches its base pressure with stable voltage and current the ion pump may be baked at high temperature if required per the section titled BAKEOUT OPERATION To stop the ion pump simply switch off the high voltage The pump surfaces will continue to pump for a few minutes depending on the system pressure Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 11 When venting the pump use clean dry nitrogen This will avoid water absorption on the pump surfaces and make subsequent pump downs easier Maintenance WARNING The high voltage present in the high voltage cable which connects the control unit to the ion pump Can cause severe injury or death Before mounting the high voltage connector of the cable on the pump high voltage feedthrough or
21. els The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Vaclon Plus 300 pumps User Manual 87 900 103 01 F Vaclon Plus 300 pumps User Manual EA d o e 00 ee 5 o9 Technical Information e e j i Description of the Vaclon Pump 51 Technical Specification 53 Vaclon Plus 300 Starcell 55 Vaclon Plus 300 Diode 57 Vaclon Plus 300 Noble Diode 58 Outline Drawing 60 Stray Magnetic Field 61 Vaclon Plus Pump Installation 64 Inspection Procedure 64 Visual Inspection 64 Vacuum Evaluation 65 Short Circuits 66 Typical Installation 67 Inlet Flange Connection 68 Control Unit Connection 71 Safety Interlock 72 Heater Installation 72 Heater Replacement 74 Original Instructions UE Agilent Technologies 49 90 5 Technical Information 50 90 Bakeout Operation 74 Bakeout of Vaclon Pump with the Integral Heaters 75 Operating Procedure 76 Maintenance 77 Exchange of
22. g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or cantainers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the R was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll F
23. g the pump 1 46 90 With a clean roughing pump establish a minimum starting pressure in the vacuum system per the table on page 9 for the type of ion pump Plug the control unit into a suitable power source and switch the power ON Observe the voltage current and roughing pressure If started at 5x10 Torr mbar a controller voltage of approximately 300 to 400 volts is typical A current value near the short circuit current of the control unit could indicate that an unconfined flow discharge exists in the pump and system A temporary rise in roughing pressure will usually be noticed during any starting procedure Allow the roughing valve to remain open after turning on the ion pump until an adequate starting pressure is reached If the ion pump voltage drops after closing the roughing valves reopen the valve for additional rough pumping As the pressure decreases the voltage again will rise and the roughing valve may be closed When the voltage has increased to 2 3 kV place the control unit in the PROTECT condition The system is now automatically protected against pressure increases to 10 Torr mbar when the pump is left unattended If such an increase should occur the control unit will be turned off automatically The pressure in the pump can also be determined by reading the current and converting this reading to pressure with the appropriate pressure versus current graph shown in the appendix Technical Informatio
24. handled by means of suitable moving and handling tools Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation to obtain the specified operation the ambient temperature must be between 0 C and 85 C CAUTION The pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system Vaclon Plus 300 pumps User Manual 87 900 103 01 F 43 90 4 Installation Procedure To avoid injury never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off The pump operation is optimized using one of the special Agilent controllers Dual MidiVac or MiniVac only CAUTION The safety specifications agreement using the pump is guaranteed using the Agilent controller only 44 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Installation Procedure 4 The Vaclon Plus pump can be installed in any position For convenience a pump is usually mounted vertically with the inlet up For mounting other than vertical the pump should be supported using the mounting feet at the bottom of the pump For detailed information about the pump installation see the appendix Tech
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26. ion 5 Typical Installation A typical installation is shown in figure 19 and consists of l 2 Vaclon Plus pump A Valve to seal off the pump from the rest of the svstem if required The control unit A clean roughing pump i e turbo or sorption A thermocouple gauge capable of indicating pressure from atmosphere to 10 mbar range A valve to seal off the roughing pump from the vacuum chamber Roughing lines are usually made of stainless steel or copper tubing or other low vapor pressure material High voltage cable Backing pump diaphragm or scroll Viale FA V Y Xa V Lo A 7 N y f IGI O Roughing Pump f g Diaphragm m g 7 Vacuum Pum p Chamber igh Vacuum Gauge Figure 19 Typical installation Vaclon Plus 300 pumps User Manual 87 900 103 01 F 67 90 5 Technical Information Flange Connection Inlet Flange Connection 68 90 The pump should be mounted allowing a sufficient clearance for installation and removal of the high voltage connector The pump should be kept sealed with its pinch off tubulation until it is ready for attachment to the vacuum system This avoids accumulation of
27. le Diode Diode domu Cd KA m Us 2 0 0 0 0 0 0 o I Operating life at 1 x 10 mbar hours 80000 80000 50000 Max starting current 0000 400 mA Max baking current 8 mA DEED UU Protect current 100 mA E Operating voltage max 7000Vde 7000Vdc 10 96 10 96 Wie MT 5m PTT E E _ Ultimate pressure Below 10 mbar Inet flange O 8 CFF NW 150 AISI3O4ESR Internal volume litres 18 6 D _ MM i Temperature limits C Pump 400 Magnet 350 Flange 500 poem iy HIS RC CT DEM cR mE m Tantalum Ande 000 0 AISIBBMSST ae Oa S Do V Tested according to ISO DIS 3556 1 1992 Vaclon Plus 300 pumps User Manual 87 900 103 01 F 53 90 5 Technical Information 54 90 Specification Figures 4 to 11 show the pumping speed vs pressure diagrams for saturated and unsaturated pumps and the pressure vs current diagrams for the same pump The diagrams are for pumps con trolled by means of a Dual controller The pumping speed of a newly regenerated 1 e baked sputter ion pump decreases during operation until it reaches a stabilized level known as saturation nominal pumping speed To saturate the Vaclon Plus 300 pumps it normally requires an amount of gas equal to 10 mbar liters Consequently pumps can operate for extended periods of time at low pressures in the non saturated state if they are properly conditioned
28. ll materials to which product s pumped or was exposed L Toxic LI Corrosive LI Reactive L Flammable DI Explosive CL Biological LI Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next page for suggestions of failure terms Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Pg 2 3 AE Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizo
29. llowing figure shows the outline drawing for the Vaclon Plus pump Figure 12 Vaclon Plus pump outline drawing 60 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Stray Magnetic Field Curves of stray magnetic field strength along the centre line of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 14 15 16 17 and 18 where Bx is the magnetic field along X axis By is along Y axis and Bz is along Z axis Figure 13 Vaclon Plus pump axis identification Gauss anne 0 JT s a RUE A A 1 2 A 1 l Legend 3 i Bx l li Bv ka Bz 4 1000 600 200 0 200 600 1000 distance from flange center mm Figure 14 Stray magnetic field from flange along X
30. measurement check the pump leakage cur rents as follows 1 2 3 Turn off the pump control unit Remove the pump magnet Turn on the pump control unit and wait for cur rent stabilization The current reading should not be higher than 300 nA Make sure that the control unit and the high voltage cable leakage current is negligible If leakage current comes from the pump per form high potting per the following procedure then recheck the pump and install the magnet If it is not possible to high pot the pump the pressure reading is biased by the leakage current value Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 High potting A constant pump current when no vacuum leak exists is often caused by field emission currents which prevent the use of the pump current as a UHV pressure indicator To reduce this field emission current high potting should be performed High potting is the term used to describe the application of higher than normal operating voltage 8 kV AC max 50 mA for the purpose of burning off whiskers sharp edges on the pump cathode High potting should be done under vacuum and preferably without pump magnets installed to reduce the drawn current High potting must be done carefully and in voltage steps since uncontrolled arcing inside the pump can cause permanent damage Therefore slowly increase the applied voltage and watch the current meter for indication of ar
31. n of this manual Vaclon Plus 300 pumps User Manual 87 900 103 01 F Installation Procedure 4 The steps on the pressure current charts are a characteristic of the Dual step voltage operation When the current drawn by the Vaclon pump reaches the specified values the controller will change the high voltage output to a lower applied voltage 7 When venting the pump use dry nitrogen This will avoid water vapor absorption on the pump walls WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases WARNING When the heating element is installed do not touch the pump during the heating and cooling phases The high temperature may cause a serious damage Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning Vaclon Plus 300 pumps User Manual 87 900 103 01 F 47 90 4 Installation Procedure Maintenance Disposal 48 90 The Vaclon Plus series pump does not require any maintenance Any work performed on the pump must be carried out by authorized personnel Before carrying out any work on the pump disconnect it from the High Voltage supply If a pump is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE logo found in lab
32. nents must be compatible with the bakeout temperature The heating must be approximately even on all surfaces or evaporated water will condence on the colder surfaces resulting in an incomplete bake and preventing achievement of UHV vacuum pressure Leave the pump control unit on and monitor the pressure Agilent recommends that current during bake not exceed 50 mA if this value is exceeded turn the bakeout off and then on again when low pressure is restored To control the heaters and to monitor the high pressure limit during bakeout an automatically controlled relay may be used Bake the Vaclon Plus pump for at least 24 hours Longer bakeout periods are recommended when the pump has been used with heavy gas loads or when UHV pressure 10 mbar or less is desired Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 4 Asthe pump and system cool down to room temperature a drop in pressure should be observed Note that the ion pump can be also baked when switched off into an external turbo pump through a bakeable isolation valve Bakeout of Vaclon Pump with the Integral Heaters 1 The integral heaters are to be powered with the appropriate voltage Please refer to the inscription on the heaters to apply correct voltage 2 The integral heaters are designed to provide a temperature of 250 C to 300 C when the pump is wrapped in a 3 fold aluminium foil A three layer foil wrapping is advisable an
33. nical Information Use All the instructions for the correct use of the VacIon Plus pumps are contained in the control unit manual Read the manual carefully before using the pump Rough pumping down to 1x10 Torr mbar is recommended for the most rapid starting Roughing with an oil sealed mechanical pump is not desirable but when used a trap in the roughing line is recommended to reduce pressure due to water vapor and oils from the mechanical pump Be careful to minimize the time that this pump is open to the system and ion pump since mechanical pump vapors will start diffusing into the system at pressures below 1x10 Torr mbar and cause contamination In systems where oils must be completely eliminated turbopump roughing pumps should be used Hygroscopic deposits and hydrogen absorption into titanium may cause starting times to increase with age During exposure to air the deposits of titanium compound absorb water vapor In subsequent start ups pump heating causes release of the water vapor and some previously pumped hydrogen thus the starting time may be lengthened Vaclon Plus 300 pumps User Manual 87 900 103 01 F 45 90 4 Installation Procedure Procedure Operating Procedure Check that the controller HV polarity is correct for the pump positive polarity for Diode pumps and negative for StarCell or Triode pumps Refer to the relevant pump control unit instruction manual and follow the procedure below when operatin
34. not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 40 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Installation Procedure 4 Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Vaclon Plus 300 pumps User Manual 87 900 103 01 F 41 90 4 Installation Procedure Preparation for Installation Figure 1 42 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Installation Procedure 4 Installation WARNING The pump is heavy and must be
35. ntal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Clagging ee OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High valtage prablem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum ver temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree
36. o the pump case Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 IxxxV xxxW IxxxV xxxW D 919 XX 60 919 XXX ADE IN ITA ADE IN ITAL Figure 21 Heating element Figure 22 Heating element installation Vaclon Plus 300 pumps User Manual 87 900 103 01 F 73 90 5 Technical Information Replacement Heater Replacement To replace the heater element proceed as follows 1 2 3 4 Disconnect the pump from the high voltage Disconnect the heater element from the main supply Disconnect the heater plates from the pump case Disconnect the heater connection box from the upper side of the pump Install the new heater elements as described in the paragraph HEATER INSTALLATION Bakeout Operation 74 90 When a Vaclon pump does not reach the desired base pressure and there are no leaks it is necessary to bake the system This is done by heating the pump and all the components in the system and is generally required to achieve base pressure less than 10 mbar 1 Heat the pump body and the system with a bakeout oven unit or heating strips to temperatures between 150 C and 220 C 220 C is the maximum allowable for most bakeable high voltage cables This temperature is high enough to degas the pump surfaces of water vapor without damaging the magnet and high voltage connector Note that the system compo
37. re installation Visual Inspection Inspect the pump and magnet for physical damage which may have occurred during shipment Inspect the pinch off seal If it is open the pump is at atmospheric pressure WARNING The pinch off seal is extremely sharp Be careful A Vaclon Plus pump that has been exposed to atmosphere during shipment or while in storage will operate properly if it has not been damaged The pump is not harmed by such exposure although it is good practice to keep it under vacuum when not in use to exclude dust and the accumulation of water vapor from the environment 64 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Vacuum Evaluation The ion pump is shipped in an evacuated condition Before removing the shipping flange for installation on a vacuum system it is recommended that the pump be started briefly to verify vacuum integrity and proper operation To verify the vacuum integrity of the new pump before venting 1 Connect the pump to the control unit as directed in the instruction manual of the control unit WARNING The high voltage which is present in the ion pump from the control unit can cause severe injury or death Be sure that the high voltage cable is proper connected to the ion pump and its power unit Make sure that the pump is well grounded 2 With the main power switch in the OFF position plug the control unit into a suitable power
38. ree 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 FIA Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only LI Taxable LI Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A L Non Billable _ Billable mmm New PO hard copy must be submitted with this form 3B L Exchange L Repair L Jupgrade L Iconsignment Demo L Jcalibration L IEvaluation L Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR LI HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for a
39. source Turn the power to ON Observe the reading for an indication of one of the following conditions a Ifthe pump is free of leaks and is at a low pressure the pressure indication shall within 10 minutes fall to or below the 10 mbar range as the volume of gas is pumped b Ifthe pressure inside the pump is at or near atmospheric level an arc may strike inside the high voltage feedthrough giving a popping sound and the pump current will fluctuate If this occurs turn the power OFF immediately 5 Ifthe vacuum integrity has been lost the pump should be leak checked with a mass spectrometer leak detector before installation on the system Vaclon Plus 300 pumps User Manual 87 900 103 01 F 65 90 5 Technical Information Plus Pump Installation Short Circuits If there is a short circuit between the anode and cathodes in the pump or cathode to pump body the short circuit current of the control unit will be drawn and low voltage will be indicated If a short circuit exists in the control unit or high voltage cable and connector low voltage will also be observed when the high voltage connector is disconnected from the pump refer to the control unit manuals An ohm meter reading on the pump feedthrough may not be effective in finding a short Short circuits may be caused by mechanical shock to the pump If the pump is shorted contact Agilent 66 90 Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Informat
40. t to cool down then verify that the base pressure is below 10 mbar Vaclon Plus 300 pumps User Manual 87 900 103 01 F Technical Information 5 Exchange of the High Voltage Feedthrough CAUTION The high voltage feedthrough contains a ceramic insulator that can be damaged If excessive force is applied in torque in bending or in tension When installing or removing the feedthrough the applied torque should not exceed 2 Nm Rotate the feedthrough gently when making the threaded connection to avoid excessive force 1 Remove the 6 bolts of the Mini ConFlat flange connection see Fig 23 Remove the cable connection disc Gently relieve the feedthrough from the metal gasket connection and turn the feedthrough counterclockwise until it is completely detached from the internal high voltage threaded connection 4 Replace the feedthrough and the copper gasket making sure that the feedthrough is connected to the pumps internal connector Check that the feedthrough is not shorted 5 Bake out the pump while it is operating and leave it to cool down then verify that the base pressure is below 10 mbar Figure 23 High voltage feedthrough connection Vaclon Plus 300 pumps User Manual 87 900 103 01 F 19 90 5 80 90 Technical Information of the High Voltage Feedthrough Leakage Current Check If the pump current reading is to be used as pres sure
41. to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Tec
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