Pressure Controllers User`s Manual
Contents
1. PRESSURE TRANSDUCER UPC 1630 N PRESSURE BALLAST gt BALLAST SEQUENCE PUMP PRESSURE LOAD DOWN TRANSFER UP LOAD WAFER RAMP WAFER RAMP WAFER k E ISOLATION VALVE i 7 x ATMOSPHERE PRESSURE gt EAS VAC U U M gt 100 MILLITORR PUMP Cl H H y START TIME PRESSURE CONTROLLERS USER S MANUAL 4 3 Backside Wafer Cooling This application uses helium gas to transfer thermal energy from the wafer to the wafer chuck reducing the wafer temperature during process Precise pressure control and valve tuning are critical in this application Over pressurizing the backside of the wafer may dislodge it from the chuck Caution should be used when applying the UPC to pressure control systems where the pressure can build up and become static requiring no further gas flow to maintain the desired pressure condition This type of system is called a dead head The addition of a needle valve or other type of bypass makes the tuning of this type of system easier Once the UPC valve tuning is complete the bypass flow can be reduced or eliminated depending on the leakage around the wafer in the chuck Test the pressure control tuning during each step of the bypass flow reduction PROCESS CHAMBER NEEDLE UNIT VALVE UPC 1630 Pressure Controller SKIN E TICS 500 PSI MAX mo VACUUM PUMP2. CAPACITANCE MANOMETER PROCESS CONTROLLER PRESSURE CONTROLLERS USER S MANUAL 12 5 SPECIFICATIONS Performance Pressure Control Response 0 5 to 8 sec user selectable with a manual 8 position rotary switch Performance Flow Meter Output Accuracy 1 Full scale Repeatability 0 15 Full scale Linearity 0 9 Full scale Cal gas Inlet Pressure Coefficient 0 0025 Full scale psi N3 Amb Temp Coef Zero 0 05 Full scale C Span 0 05 Full scale C Leak Integrity Model 1630 1 x 10 Atm cc sec He Model 8130 1 x 10 Atm cc sec He Zero Drift lt 0 6 per year Specifications Gases He No Ar Standard Flow Range 10 sccm to 30 sim He equivalent Flow Measurement Range 2 100 Full scale Pressure Control Range 1 to 100 Torr Valve Leak Rate lt 1 Full scale Ambient Temperature Range O 50 C 32 122 F Max Operating Pressure 2 45 kg cm 35 psi Max Overrange Pressure 35 kg cm 500 psi Proof Pressure 105 kg cm 1500 psi Pressure Differential Range 7 to 50 psid Warm up Period 30 minutes Mounting Position HOV Valve Normally Closed Electrical Characteristics Input Output Signal Setpoint Input 100 mV to 10 Vdc or 5Vdc standard corresponding to the range of the external pressure transducer Pressure Transducer Input 0 10 Vdc or 0 5 Vdc proportional to pressure Output Monitor 0 5 Vdc linearly proportional to
3. The Pump Ballast application replaces slower mechanical servo valve systems in controlling chamber pressure The pressure can be controlled at any level above the base pressure of the vacuum pump The ballast gas provides a buffer zone preventing back streaming of contaminants into the process chamber Measurement of the ballast gas flow rate provides a monitor of the performance of the vacuum pump A decrease in the flow rate relates to a reduction in pump speed indicating a possible need for service UPC 1630 URS 20P BALLAST GAS PROCESS CHAMBER ISOLATION VALVE BALLA gt st INJECTOR _ PRESSURE TRANSDUCER VACUUM PUMP PRESSURE CONTROLLERS USER S MANUAL PRESSURE TRANSDUCER 10 4 2 Load Lock This application uses ballast gas to ramp up and down the load lock chamber pressure to prevent the disturbance of particles This application does require the pressure setpoint of the UPC to ramp up and down from an external control source WAFER WAFER gt BN gt URS 20P LOAD LOCK PROCESS CHAMBER CHAMBER
4. D the Valve Test Point output to either pin 2 Power Common or pins B amp C Signal Common Consult your company policy on purging of gas lines and equipment for specific purge times and procedures Purge the UPC and gas lines with nitrogen or other inert gas for a minimum of 30 minutes before removal when toxic corrosive or reactive gases have been used 3 6 Removal of the UPC Purge the UPC and gas line as outlined in the Purging section Close all gas supply line valves upstream of the UPC Bleed off any residual pressure that might remain Close any valves downstream of the UPC Remove the card edge electrical connector Using the appropriate procedure outlined in the Connecting Gas Lines section disconnect the gas lines to the UPC If applicable remove the two mounting screws used to mount the UPC After removal cover the fittings with appropriate covers to prevent damage to the sealing surfaces Important Purging of the UPC and gas line is necessary before removal when toxic corrosive or reactive gases have been used PRESSURE CONTROLLERS USER S MANUAL 5 3 7 Tuning Procedure The UPC 1630 8130 is an advanced pressure control instrument capable of very fast response over a wide operating range The controller responds to input from a system pressure measurement device and adjusts flow of gas to increase or decrease the system pressure to the desired level This system interaction requires tuning to adjust the response of the
5. required flow rate Valve Off External TTL signal Auto Shut off Setpoint lt 0 9 full scale commands off Standard No disable option Power input 15 Vde 250 mA max 15 Vde 250 mA max Power Consumption 5 watts Mating Connector 20 contact cardedge PRESSURE CONTROLLERS USER S MANUAL 13 Mechanical Characteristics Surface Finish Model 1630 16u inch Ra 104 inch Ra optional Model 8130 32u inch Ra Fittings 1 4 VCR 8130 and 1630 downported B C W or Z 1630 only Materials Wetted Components 316L SS K M45 Nickel 304 Valve Position Normally Closed Weight 1 4 Kg 3 08 Ibs Calibration Traceability National Institute of Standards and Technology N IST Standard Temperature and Pressure 0 C and vacuum exhaust Specifications subject to change without notice WARRANTY Model 1630 3 years Model 8130 2 years PRESSURE CONTROLLERS USER S MANUAL UNITED STATES Austin TX Sales amp Service Celerity 200 C Parker Drive 600 Austin TX 78728 Tel 1 512 247 9092 Fax 1 512 246 5590 Beaverton OR Sales amp Service Celerity 9665 SW Allen Blvd Ste 113 Beaverton OR 97005 Tel 1 503 643 5564 Fax 1 503 520 8834 Tempe AZ Sales Celerity 1320 West Auto Drive Tempe AZ 85284 Tel 1 480 763 2134 Fax 1 480 763 2210 Milpitas CA Corporate Celerity 1463 Centre Pointe Drive Milpitas CA 95035 Tel 1 408 946 3100 Voice 1 408 934 6301 Yorba Linda CA Sales amp Servic
6. to a higher number In turn the response may be speeded up until overshoot or oscillation occurs by turning the switch to a lower number Then slow the response to leave some margin of safety It is preferable to operate the pressure controller as fast as reasonably possible for best control capability The response is adjusted by selecting the appropriate Rotary switch position The Rotary switch selects the different parameters of a PID loop which determines the response of the pressure controller Each time the switch position is changed power to the UPC must be interrupted to reset the microprocessor and read the new setting of the switch If the microprocessor is not reset the new switch setting will not take effect The power cable to the UPC must be removed and reconnected each time a new switch position is selected PRESSURE CONTROLLERS USER S MANUAL 6 4 Once the Rotary switch is set test the control capability over the operating range desired The system should operate for a long period without need of adjustment The UPC 1630 8130 has seven preset valve response curves that are user selectable through the Rotary switch Most applications will use switch positions 3 6 Position 7 is used for digital communications and PID programming Positions 8 amp 9 are duplications of switch settings of O amp 1 respectively Switch position O is the fastest valve response setting Switch position 6 is the slowest valve response setting If you a
7. ONTROLLERS USER S MANUAL 1 different pressure sensing technologies thermocouple ionization strain gauge capacitance manometers and MEMS The pressure sensor output voltage range determines the setpoint voltage range Important The pressure sensor output and the setpoint voltage input must be the same range The microprocessor converts the setpoint and pressure voltages into 12 bit digital values The PID algorithm then commands the servo valve to either open or close as needed to set and maintain the commanded pressure value The flow meter monitors the flow rate through the UPC The flow meter responds to changes in the control loop but does not control the flow as in a mass flow controller The flow rate measurement is useful in determining process parameters repeatability trouble shooting and changes in the control system The gas flow rate cannot be directly related to pressure control The position of the UPC valve is dependent on how much gas is required to produce the desired pressure condition 3 INSTALLATION INSTRUCTIONS 3 1 Mounting The UPC 1630 8130 pressure control valve is attitude insensitive It can be mounted in any attitude If you are using the flow meter section it is best to order the UPC 1630 8130 in one of two attitude configurations available The HOV attitude configuration is applicable to most mounting positions of horizontal and vertical Inlet Up and Inlet Down The HOS attitude configuration also covers h
8. UNIT Pressure Controllers User s Manual Elastomer Seal ontroller Pr o En Covered vy A perry A 04 CELERIT Y 199 001 0008 REV C 2 04 Contents 1 GENERAL DESCRIPTION 0 0000 EEN NENNEN ER A e NN 1 2 THEORY OF OPERATION lt 25 252 2 os a Ee EES EES a o ees x 1 3 INSTALLATION INSTRUCTIONS o ooooooooo ees 2 SN Rei TI ts a a a Se e 2 3 2 Connecting Gas LINES EE 3 3 3 Fitting lightening Spe ificatio S A coe Geen va eee ge dee at ica 3 3 4 Flow Meter Zeroing 4 IO PUR BINS uni di see ale dd Ald dared era td id dodo Beare Gao bs 5 3 6 Removalo the UPC coman tor APE OES AE Ea Ad Se A eS OL Oe Od Bee 6 5 3 7 Turning Procedure ee eee eee eens 6 3 8 Recommended Test Equipment 6 39 Procedure ocupada oye dk ble ee we vated bette eee tote GG ate nd Poss 6 SE Fa H IIe EE 6 3 11 Tuning Using UPCTune Software 8 3 12 Programming the UPC corran aras lid dias 9 A APPLICATIONS ien a a A NEEN RA A AAA Roe 10 4 1 Pump BallastinB 224 02 204 8e8 6hbetd pedi e a a dech ben eb it eed 10 AZ LOA LOCK oa eke honed o EEEEEEEEEE 11 4 3 Backside Wafer Cooling eee eee eee 12 5 SPECIFICATIONS 12 22 2406 2244 iii via deeb eke bh bbe aceon eee Re ees 13 6 WARRANTY crias iria ebb ae ei tet tewe hd eid tie eee ares e 14 7 MANUFACTURING SALES AND SERVICE LOCATIONS 0 000 cee ee eee ees 15 Pressure Controllers User s Manual 1 GENERAL DESCRIPTION The UPC Series pressure c
9. a Tel 82 31 708 2522 Fax 82 31 708 2524 Singapore Sales amp Service Celerity Singapore Pte Ltd BLK 164 Kallang Way 07 28 29 JTC Bldg Singapore 349248 Tel 65 6744 7041 Fax 65 6744 1867 Taiwan Taipei Sales SCH Electronic Co Ltd 7th FI No 128 Sec 3 Ming Shen E Rd Taipei Taiwan 10445 Tel 886 22 713 6090 Fax 886 22 717 2072 Taiwan Hsinchu Sales and Service SCH Electronic Co Ltd 0 169 2 1 section Kang Le Rd HsinFeng Hsiang Hsinchu Hsien Taiwan Tel 886 3 559 0988 Fax 886 3 559 2220 Taiwan Tainan Sales amp Service SCH Eleectronic Co Ltd o 139 Min Tsu Rd Hsin shi Tainan County Taiwan Tel 886 6 599 9889 Fax 886 6 599 9816 15
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11. controller to match the response of the system The basic tuning procedure is designed to allow the technician to tune the controller on the system for the best performance Once the UPC 1630 8130 is tuned operation is highly repeatable 3 8 Recommended Test Equipment A storage oscilloscope is preferable with dual channel capability 3 9 Procedure Setup 1 Mechanically install the UPC 1630 8130 Pressure Controller into the system as it will be used 2 Connect the electrical interface cable to the power supply and interface electronics The interface electronics must have the ability to turn the controller ON and OFF with a zero set point 3 Connect the pressure transducer to the interfacing electronics or directly to Pins 5 and B or C on the pressure controller 4 Connect the oscilloscope Channel One to the pressure transducer Connect the oscilloscope Channel Two to Pins D and F on the pressure controller 6 Set up the oscilloscope Channel One 0 10 VDC Channel Two 0 15 VDC Time Scale 1 10 Seconds Oo 3 10 Tuning 1 Adjust the inlet pressure to the normal operating pressure that will be used 2 Switch the pressure controller to the off position 3 Leaving the Rotary switch in the factory set position test the response and stability of the controller by turning it ON and OFF monitoring the oscilloscope If the turn ON response shows large overshoot or oscillation then slow down the response by turning the switch
12. e Celerity 22600 Savi Ranch Parkway Yorba Linda CA 92887 Tel 1 714 279 3500 Fax 1 714 921 0804 EUROPE Europe Head Office Ireland amp UK Sales amp Service Celerity Fluid Systems Ireland Limited Ballycoolin Business Park Blanchardstown Dublin 15 Ireland Tel 353 18 247 100 Fax 353 18 247 101 Sales penglish celerity net Germany amp Austria Sales Celerity Tel 49 811 9988 770 Fax 49 811 9988 771 Mobile 49 160 9497 7238 Sales akeppel celerity net Germany Service ESL Elektronik GmbH Am Mitterfeld 35 D 85622 Weissenfeld Germany Tel 49 89 9049 0381 Fax 49 89 9049 0382 France Switzerland Spain amp Portugal Sales Celerity Tel 33 474 182 544 Fax 33 474 182 543 Mobile 33 689 872 027 Sales dmeneghel celerity net PRESSURE CONTROLLERS USER S MANUAL 7 MANUFACTURING SALES AND SERVICE LOCATIONS Benelux Sales Celerity Tel 32 5531 0240 Fax 32 5531 0244 Mobile 32 474 905 007 Sales mlambelin celerity net Israel Sales AVBA Engineers Ltd Ramat Gabriel Industrial Park P O Box 690 Migdal Haemek 10500 Israel Tel 972 66 442575 Fax 972 66 442577 Italy Sales Microcontrol Electronic s r l Via Guiba 11 20132 Milano Italy Tel 39 02 28314420 Fax 39 02 2871777 Norway amp Iceland Sales NorGruppen As Civ Ing Helge Ingeberg AS Gamle Drammensvei 94 Lierporten PO Box 100 N 3420 Lierskogen Norway Tel 47 32 8535 50 F
13. itch 4 m Switch E Swiieh q 100 Setpoint 10 Seconds MFts O002 0D04 Switch 6 Figure 2 Response profiles Responses for switch positions 0 6 3 11 Tuning Using UPCTune Software Should your application require resetting of the UPC PID tuning parameters you will require the UPCTune CD and programming cable p n 955 001 0029 1 Create a file folder on the hard drive of the computer being used called UPCTUNE 2 Insert the UPCTUNE CD into CD drive 3 Copy all of the files from the CD to the UPCTUNE file folder 4 From the hard drive folder run Setup exe and follow the instructions 5 If you receive a Version Conflict warning it is best to keep your current file To do this click on the Yes box 6 After Setup is completed successfully click on the OK box to finish To place the UPCTune icon on the Windows Desktop 1 Open Windows Explorer 2 The UPCTune software is normally located at C Program Files UPCTUNE 3 Right mouse click on the UPCTune exe icon and highlight Create Shortcut 4 Highlight the Shortcut to UPCTune exe icon with your mouse and drag to your Windows Desktop Double clicking on the UPCTune icon will start the program Warning for Windows 2000 users Windows 2000 users will have a window open attempting to install Microsoft Office 2000 Premium Click the Cancel box each time it appears to start UPCTune This is a bug with Vis
14. ontrollers are used to control the flow of gas in maintaining a preset pressure in a chamber They offer the user precision pressure control over a wide pressure control range in pressure sensitive processes and applications The UPC 1630 8130 pressure controllers utilize the proven technology of Unit mass flow controllers in the control of pressure The solenoid proportional control valve has a wide dynamic range with high reliability and only one moving part The IsoSensor thermal mass flow sensor provides a stable indication of gas flow through the pressure controller The UPC 1630 8130 require 15 VDC for power and interface to most power supplies used for mass flow controllers The UPC 1630 8130 with its wide dynamic control range can be used in many applications from 1 Torr to 50 psig when coupled to the appropriate pressure sensor The user must select the appropriate sensor for their application Most pressure sensors with a 0 1 Vdc to 0 10 Vdc output can be used with the UPC 1630 8130 Increased pressure resolution is achieved through increasing the voltage output or decreasing the pressure range of the sensor The UPC 8130 with Viton elastomer seals is appropriate for general pressure control and pump ballasting applications using inert and non corrosive gases The UPC 1630 with metal seals is used in applications flowing process or corrosive gases and where particle contamination is an issue The UPC 1630 also offers better leak integri
15. orizontal positions and where the UPC is mounted horizontally on its side Using the UPC flow meter in an attitude other than what it is calibrated for will cause a small zero shift Refer to the Flow Meter Zeroing section for further details Two 8 32 threaded mounting holes are located on the bottom side of the UPC base block It is recommended that these attachment points are used especially in vertical mounted application The UPC can also be held in place by the gas lines when stainless steel or other metal lines are used When using plastic or other gas lines the threaded mounting holes must be used to hold the UPC in place 9 PIN D CONNECTOR STANDARD 20 PIN CARDEDGE or 15 PIN D OPTION 1 25 KEYWAY ole TOP LABEL INCLUDES MODEL RANGE GAS SERIAL NUMBER 751 do 1 119 1 _ CALIBRATION DATA LABEL 4 00 a 5 5 4000 6 69 9 137 2 2 X 8 32 UNC 2B x 18 4 6 DP MOUNTING HOLES SERIAL A BLOCK PART NUMBER NUMBER i LABEL seo I Y 24 9 0 49 1 12 4 eeng a S 75 119 1 Dr z 94 ot o 1 RB 39 23 9 1 1 48 4 88 1124 0 27 6 X XX dimensions in inches 76 2 XX X dimensions in millimeters PRESSURE CONTROLLERS USER S MANUAL 2 3 2 Connecting Gas Lines It is important to follow the proper installation procedure when attaching the gas lines to the fittings of the UPC The available fittings on the UPC have different specifications for correct installation Connec
16. pressure signal input range dictates what the pressure setpoint range must be Setpoint Input Voltage range 0 10 VDC The setpoint input and the pressure signal must be the same voltage range Flow Meter Output 0 5 VDC output The flow meter output is proportional to flow 15 VDC Power Any low noise power supply with a minimum supply current of 250mA Most MFC power supplies can be used to power the UPC 20 Pin Cardedge UPC Pressure Controller 3 4 Flow Meter Zeroing Zeroing of the flow meter is normally not necessary Should the pressure controller be mounted in a different attitude than what it was calibrated for a small zero shift could occur Before any zero adjustment is started power must be applied to the UPC for a minimum of 30 minutes The UPC must be given a zero setpoint and where practical gas flow to the UPC turned off The zero adjustment potentiometer is located at the top of the PCB cover can on the inlet fitting side There is a label over the hole to the zero potentiometer indicating the proper location Remove the center section of the zero label to reveal the hole and zero potentiometer Using a small flat blade screw driver adjust the potentiometer until the flow reading is zero PRESSURE CONTROLLERS USER S MANUAL 4 D HCODHEGD KIRKA 3 5 Purging Purging of the UPC is necessary after installation and before removal To force the UPC valve to its full open position for purging connect pin
17. re unable to tune the UPC to your application with the seven preset response curves contact a Unit Applications Engineer for assistance Important Do not leave the Rotary switch in position 7 This switch setting is for digital communications and programming of PID values Always interrupt power to force the microprocessor to read the Rotary switch during the tuning operation TOP VI S For Tuning Response CARDEDCE SEBES ERSISBEIISBEIS aa ei eS a Se ie a alle sl sa El E eye a pu 2 7 yo Um pian mE on 4 BCD 5W ICH M lE EVE El oS ou 09 Cs Cp HE NET HI 6h SS 88 5 e D He D SCH E Frae POR e POS COVER For Plotting Response Figure 1 Using the BCD switch on the 347 PCB Position 7 is for data communications PRESSURE CONTROLLERS USER S MANUAL 7 Seriol Number MFC elec End Seale Output Valve Vds n Press Ave Prabe 2A Time Out Press Resp Xdur SverShoat Response SetPoint Trigger Switen O Switch 1 1 00 oa 8 00 49 00 Switch 2 p Gwitels 4 Pp Sw
18. tion of all gas lines requires the use of two wrenches Important When attaching gas lines always use two wrenches One wrench on the UPC fitting and the second on the tube side nut Failure to follow the outlined procedure can result in fitting damage and gas leakage After installation and prior to use all gas lines and fittings should be thoroughly leak checked and purged 3 3 Fitting Tightening Specifications Swagelok and other ferrule type connections Snug female nut finger tight Then tighten with wrench an additional 1 1 4 turns Hold UPC male fitting with second wrench to prevent torque transfer between fitting and UPC base block VCR Snug female nut finger tight Then tighten with wrench an additional 1 8 to 1 4 turn Hold UPC male fitting with second wrench to prevent torque transfer between fitting and UPC base block Downported Downported UPC 1630 fittings do not require two wrenches Follow seal manufactures recommended torque down procedure Electrical Connections UPC 20 PIN CARDEDGE CONNECTOR PINOUT case no 1 A O10 VOO POWER COMMON IGNAL OUTPUT COMMON 0 5 VDC VALVE 15 VDC al D TEST PT PRESS FDBK 0 10 VDC PRESSURE CONTROLLERS USER S MANUAL Pressure Signal Input Voltage range 0 10 VDC Typical ranges are 0 1 VDC 0 5 VDC and 0 10 VDC Pressure sensors with full scale voltage outputs under one volt are not recommended This would included most non amplified pressure sensors The
19. ty with its all metal seal construction 2 THEORY OF OPERATION The UPC 1630 8130 operates in a downstream pressure control mode where downstream refers to pressure control on the exhaust side of the UPC In this mode the pressure level and gas flow are in phase with each other When the pressure requirement is higher the UPC flow will be higher When the pressure requirement is lower the UPC flow will be lower Applications requiring this type of pressure control include vacuum pump ballast gas control wafer backside cooling and downstream chamber pressure control If your application requires the UPC to control pressure on its upstream side contact a Unit Instruments Applications Engineer The UPC 1630 8130 is composed of a high performance solenoid servo valve a mass flow measurement meter and a microprocessor controlled PID valve control loop The solenoid valve provides proportional control of the gas flow to maintain the required pressure The flow meter provides direct measurement of the gas flow rate The microprocessor compares the desired pressure setting with the actual pressure from the pressure transducer The control valve is then driven further open or closed as directed by the PID algorithm to meet the desired response rate All input and output signal lines to the pressure controller are analog voltages The voltage range for the setpoint and pressure signal is 0 1 to 10 VDC This broad input range allows the use many PRESSURE C
20. ual Basic programs written under Win98 PRESSURE CONTROLLERS USER S MANUAL 3 12 Programming the UPC 1 Remove the two screws holding the cover can to the inlet and out fittings 2 Remove the Warranty sticker and cover can 3 Connect the UPC programming cable 955 001 0029 between the computer serial port and the P3 programming pins located on the 347 PCB See Figure 1 4 Set the rotary switch to position 7 5 Make sure that there is no pressure setpoint voltage being applied to pin A 6 Click on Disconnect from UPC 3 or 4 times or remove power from UPC momentarily 7 Click on Get Tuning Value to upload the current PID values in the UPC Range Typical Values P gain 0 65000 28000 65000 I gain 0 65000 1000 10000 D gain 0 255 1 16 Spt Ramp 0 4095 8 50 E unit Digital UPC Tuning Program lO x Serial Ir Firmware Version I Gain D Gain SptRamp Switch 0 Get Tuning Values Switch 1 Switch 2 Switch 3 Switch 4 Switch 5 Switch 6 v D gt FT Upstream Transducer o Valve Pedestal Send Tuning Values Defaults Fill From Switch 0 6 Data Disconnect From UPC uit Caution Do not change Serial number or Valve Pedestal settings Tuning Functions Decrease response time Oscillations Ramp Setpoint Increase l gain Decrease D gain Increase Spt Ramp PRESSURE CONTROLLERS USER S MANUAL 4 APPLICATIONS 4 1 Pump Ballasting
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