Newport 850F Manual - Artisan Technology Group
Contents
1. A rtisan Artisan Technology Group is your source for quality TecmoogyGroup new and certified used pre owned equipment FAST SHIPPING AND SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT DELIVERY Experienced engineers and technicians on staff Sell your excess underutilized and idle used equipment TENS OF THOUSANDS OF at our full service in house repair center We also offer credit for buy backs and trade ins IN STOCK ITEMS www artisantg com WeBuyEquipment 7 EQUIPMENT DEMOS HUNDREDS OF InstraV ea REMOTE INSPECTION LOOKING FOR MORE INFORMATION MANUFACTURERS Remotely inspect equipment before purchasing with Visit us on the web at www artisantg com 7 for more our interactive website at www instraview com information on price quotations drivers technical LEASING MONTHLY specifications manuals and documentation RENTALS ITAR CERTIFIED an Aa tia Contact us 888 88 SOURCE sales artisantg com www artisantg com AD Newport 850F Series Linear Actuators User s Manual This manual describes the operation of Newport 850F Series Linear Actuators When purchased with a Newport controller the 850F is fully compatible with the MotionMaster family of controllers and the PMC200 Series controllers If you have purchased the 850F for use with your exist ing Newport controller please read carefully the section below listing your controller for compatibility and upgrade information The 850F actuator incorp2. 12 FOOT CABLE 9 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com IAE Service Form Photocopy and return to Newport Newport Corporation U S A Office 714 863 3144 FAX 714 253 1800 Name RETURN AUTHORIZATION Company Please obtain prior to return of item Address Country Date P O Number Phone Number Item s Being Returned Model Serial Description Reason for return of goods please list any specific problems Please complete the below as appropriate List all control settings and describe problem Attach additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether power is turned on or not Describe signal source If source is a laser describe output mode peak power pulse width repetition rate and energy density Where is the measurement being performed factory controlled laboratory out of doors etc What power line voltage is used Variation Frequency Ambient Temperature Variation F Rel Humidity Other Any additional information If special modifications have been made by the user please describe below 10 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com rtisan Technolog
3. anywhere along the lead screw For full 2 inch 50mm travel remove the half nut completely and store it in a safe place for future use in case shorter travel is desired Figure 3 The half nut s ramped corner triggers the Figure 4 Place the half nut on the leadscrew to set positive limit switch the approximate travel 5 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com 3 1 3 Replace the Coarse Travel Indicator Window After inspecting the half nut placement to ensure that it is fully seated on the lead screw replace the lid and tighten the four 2 56 screws Be sure to tighten the screws completely for proper operation Figures 5 amp 6 If the lid is loose the half nut may ride up off of the lead screw at the end of travel and defeat the purpose of the limit switch resulting possibly in damage to the actuator or the equipment it is moving Figure 5 Replace the actuator lid after seating Figure 6 Tighten all four screws securely for the half nut on the lead screw Er Actuator Mounting proper operation The actuator may be mounted using either the 3 8 inch brass mounting sleeve or by attachment using the clearance holes in the actuator body When using the brass mounting sleeve the actuator may be mounted to a wide variety of Newport components in one of four ways 1 Unscrew the retaining nut and insert the
4. 850F into the mount Either use a Spanner wrench to tighten the nut or if space permits gently rotate the actuator body while holding the nut stationary with the fin gers or a small screwdriver to tighten the whole assembly When the mount has a set screw the retaining nut is not used J ust insert the actuator and tighten the set screw In rare cases when neither of the above two mounting methods can be used it might be necessary to partially disassemble the device the actuator is being used in When access to the retaining nut side is reached simply follow method 1 above For panel mounting in panels up to 1 2 thick drill a 3 8 hole Insert actuator and tighten retaining nut 6 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com The 850F is equipped with a knob for manual coarse positioning except low speed versions 850F LS Approximate position in both inches and millimeters can be read using the scales on the window and the scribe mark on the lead screw nut A small amount of resistance should be felt when turning the knob This is a result of back driving the gearhead motor assembly and is normal Attempt to turn the knob smoothly avoiding abrupt starts and stops to minimize the chance of damaging the motor gearhead Power to the motor must be off while executing a manual move or damage may result to the gearhead If excessive resistance is felt w
5. TOR OFF MF command the I O bits on the UIB which control the power relays must be toggled manually using the DEFINE BITS BO CLEAR BITS CB and SET BITS SB commands Refer to the MM2000 user manual and the data sheet included with the UIB for more details Caution Failure to manually toggle the I O bits on the UIB for controllers with firmware version 1 4 or earlier will leave power applied to the motor after the MOTOR OFF command has been issued Do 2 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com not try to manually adjust actuator position with power applied to the motor or damage will result to the gearhead Manual positioning should not require more torque to turn the knob with the actuator cable attached than with it unplugged If you re unsure about the effort required unplug the actuator to compare the feel of the knob before proceeding 2 1 3 MM2000RX Rack Mounted PC Card Controller Existing MM2000RX controllers are incompatible with the 850F Factory upgrades may be done on a Special request basis New MM2000RX con trollers may be purchased to be compatible with the 850F on a special request basis Please call Newport for the latest information 2 1 4 MM3000 Motion Controller Driver The MM3000 is completely compatible with the 850F Series actuators All that is required is to configure the controller with the proper driver card and adjust the servo par
6. a hard stop within its range of travel a translation stage s or mirror mount s end of travel for exam ple aslip clutch releases to prevent damage to the gearhead The clutch is designed to slip just below the motor s maximum torque The motor should be stopped as soon as possible to prevent overheating in this high torque condition 1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ae Controller Interfaces These actuators are powered by a low inertia DC motor to provide smooth movement with low acoustic and mechanical noise Submicron resolution is obtained with a precision rolled and electropolished stainless steel lead screw driven through a low backlash reduction gear The overall drive train backlash of 15um can be compensated by Newport controllers Bi directional repeatability to 1 0 um can be achieved through this feature The motor has an ironless rotor to permit fast response due to its low inertia The brushes are precious metal plated for long life The factory lubrication has a vapor pressure of 10 Torr at 25 C 2 1 1 MM1000DC DCS750 The 850F Series actuators incorporate many new features such as travel limit switches and manual actuation not found in previous Newport actua tors like the 850 850A and 850B Series Additionally since the 850F uses a higher torque motor the servo parameters required for smooth operation are different than for previ
7. aa biasing iv Section 1 Introduction 000 ccs eaaa anane e eee eaaa naen anaa anana 1 Section 2 Description i00aeeaaaan anaa an aaa nee e maeman anaa aana anana e anana 1 2 1 Controller Interface asas nara aapa naa ga akan ag ag ia nan Aan anak Na aaa Waaa Nia Kaja Aa aa dnai we 2 2 1 1 MMLOOODC DCS150 ara asa aapa saa Na ANNA daa NE NANA AKA Ya daa ia na Ya a PANA Ka 2 2 1 2 MM2000 PC Card Motion Controller sssseseee nen enen eaaa nean na nan 2 2 1 3 MM2000RX Rack Mounted PC Card Controller essees 3 2 1 4 MM3000 Motion Controller Driver ccccccscscsssscsesssrseeecen 3 2 1 5 MM4000 Motion Controller Driver cccccsssesssessesrsssseseereen 3 2 1 6 PMC100 Single Axis Controller s0s0nasesena nana nenanem anane neran nn nean 3 2 1 7 PMC200 PMC200 P Dual Axis Controller esseere 3 2 1 8 PMC400 Multi Axis Controller Driver ssaaa sanane en anana nean nanas 4 2 1 9 Non Newport Control er Sasana aana aga ap aaa a aa ba Ga Nan a a Ka Angan TEN Nga ah 4 Section 3 Installation Set up and Operation 010110 4 3 1 Setting the Travel LIMES ras asana ancients Gide aaa aan aa NGE dad 4 32 Actuator MOUNTING 3 sudan ga ar alaa ANAN Ba Da a a GA a KE aa AA 6 3 3 Manual Operations ass raa aana dada a da a Da a ar daa LAN aga a Sea aa san KT a a NG 7 3 4 High and Low Speed Versiongs 0seranaerenena anana namane n nenen n ngena nenen 7 3 5 Vacuum Compat
8. ameters per the specifications included in the controller documentation 2 1 5 MM4000 Motion Controller Driver The MM4000 is completely compatible with the 850F series actuators All that is required is to configure the controller with the proper driver card and adjust the servo parameters per the specifications included in the controller documentation 2 1 6 PMC100 Single Axis Controller Existing PMC100 controllers are incompatible with 850F actuators Please call Newport for the latest information regarding upgrades for the PMC100 2 1 7 PMC200 PMC200 P Dual Axis Controller PMC200 Series Controllers using version 3 1 or earlier firmware are incom patible with 850F Series actuators and require an upgrade The firmware version is displayed on power up Please call Newport for the latest infor mation regarding upgrades PMC200 Series Controllers using version 4 0 or later are compatible with the 850F Series actuators and include the proper interface to handle the limit switches and manual knob Servo parameters may be set by selecting type 850F in the controller setup menu There is also a menu to toggle motor power off for manual positioning An adapter cable P N 21731 01 must be ordered for each 850F actuator 3 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Caution Failure to toggle motor power off before attempting to manually position the 850F will result in da
9. ar ratio 262 That is a standard speed actuator has a coupling ratio of 20 000 High speed actuators have a coupling ratio of 1 685 8 Low speed actuators have a coupling ratio of 127 768 4 The units of the coupling ratio parameter are encoder quadratures per millimeter For MotionMaster controllers use the CO command to compensate for the differing gearhead ratios 7 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Caution Actuators with gearhead ratios greater than 485 1 are more sus ceptible to damage when crashed into a hard stop For high gearhead ratios the motor s momentum appears to be extreme ly high when moving at full speed The mechanical limit switch es will prevent a crash due to over travel but will not prevent the actuator from hitting a hard stop within the travel range the end of run on atranslation stage or mirror mount for exam ple Be sure to adjust the travel limits Section 3 1 such that the limit switches are activated before the actuator reaches the end of stage travel A slip clutch has been implemented in the drive train to minimize the probability of damage if a hard stop is encountered but special care should be taken to avoid crash ing the actuator 3 5 Vacuum Compatible Versions Standard speed 850F actuators can be ordered to operate cleanly within a vacuum environment The following describes the alterations that make the sta
10. artisantg com 7 for more our interactive website at www instraview com information on price quotations drivers technical LEASING MONTHLY specifications manuals and documentation RENTALS ITAR CERTIFIED an Aa tia Contact us 888 88 SOURCE sales artisantg com www artisantg com
11. d and acceleration settings 5 Ib 2 3 kg at full shaft extension 18 Ib 8 kg standard and low speed actuators 5 Ib 2 3 kg high speed actuators 12 foot 3 6 m cable integral to actuator terminated with 25 pin male Dsub connector O F to 120 F Black clear anodized aluminum Special order vacuum compatible versions for operation to 10 Torr temperature range restricted as stated above Note Backlash can be compensated by MotionMaster and PMC200 Series Controllers Cumulative monotonic error due to leadscrew pitch error or mounting errors can be compensated via the CO command in MotionMaster controllers and the coupling ratio parameter in PMC200 Series Controllers iv Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com A rtisan Artisan Technology Group is your source for quality TecmoogyGroup new and certified used pre owned equipment FAST SHIPPING AND SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT DELIVERY Experienced engineers and technicians on staff Sell your excess underutilized and idle used equipment TENS OF THOUSANDS OF at our full service in house repair center We also offer credit for buy backs and trade ins IN STOCK ITEMS www artisantg com WeBuyEquipment 7 EQUIPMENT DEMOS HUNDREDS OF InstraV ea REMOTE INSPECTION LOOKING FOR MORE INFORMATION MANUFACTURERS Remotely inspect equipment before purchasing with Visit us on the web at www
12. d by adjusting your controller s servo parameters 8 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com 5 0 Connector Pin Assignments WIRE COLOR PIN CONNECTION NC 1 NC _ 2 NC 3 NC 4 BLACK 5 MOTOR 6 7 MOTOR WHITE 6 8 NC 9 NC 10 NC 11 NC 12 NC _ 13 SHIELD GND 14 SHIELD GROUND NC 15 16 ORANGE 17 FORWARD LIMIT SWITCH GRAY 18 REVERSE LIMIT SWITCH YELLOW 19 CHANNEL A GREEN 20 CHANNEL B RED 21 5 12V DC 5ma 5V DC BLUE 22 GROUND NC 23 NC 24 NC 25 6 0 Drawing 4 84 E 122 9 g P 3 25 3 J ee lies 82 6 22 4 CBORE CLR HOLE FOR WA 0 52 1 4 20 M6 CAP SCREW pe 13 2 0 25 64 _ 0 88 MIN 24 5 00 i a a 2 09 53 1 90 375 9 5 1 38 OTO 00 187 35 1 4 4 8 5d a G pgn PEPP Q 0 31 7 9 ag 7 O al 0 44 gt 3 3 8 32 M4 CLR HOLE 11 2 Shop eas Lem 2 PLACES 16 lt 3 8 40 THREAD 25 PIN D TYPE CONNECTOR WITH
13. e actuator and or the stage Actuators are shipped with the travel limit set to less than 1 2 inch 12mm to prevent accidental over travel in most instances 3 1 1 Remove the Coarse Travel Indicator Window Find aclean flat surface to disassemble the actuator Tapped hole optical tables are not recommended since many of the parts are small and may drop into the table Using the manual knob adjust the actuator to the 4 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com zero position as read on the coarse position scale as shown in Figure 1 Remove the four 2 56 flat head screws holding the indicator window lid place them to the side and gently pry off the lid Figure 2 Figure 1 Remove the indicator window lid with Figure 2 Approximate travel range markings the actuator in the zero position assist in quick travel adjustment 3 1 2 Reposition the Half Nut to the Desired Travel After removing the lid laser marked lines indicating approximate travel ranges can be seen Remove the half nut by lifting it from the lead screw Note its orientation with respect to the lead screw since it only fits one way Figure 3 Approximate travel is set by replacing the half nut onto the lead screw with its center scribe mark aligned to one of the markings on the actuator body Figure 4 These marks are only an aid to determining travel The half nut may be placed
14. hile trying to turn the manual knob then check to verify motor power is off If you are still unsure disconnect the actuator cable completely and com pare the turning resistance It should be approximately the same as when the cable is attached with the motor power off Caution As long as the cable remains attached the encoder count is pre served and when power is reapplied to the motor the new encoder count is updated to be the current position in the con troller Incompatible and non Newport controllers which do not properly implement this feature may cause the actuator to jump to a previous position upon power on and this may result in damage to the attached equipment if a crash occurs Eri High and Low Speed Versions 850F actuators are also available with two alternate speed ranges This is accomplished through use of different gearbox ratios and motors with dif ferent torque characteristics as listed below Model Gearbox Motor Relative Encoder Speed Resolution Standard Speed 850F 850F VC 261 409912 1 1624 1x 05um High Speed 850F HS 22 0335039 1 1624 12x 59321um Low Speed 850F LS 1669 99476 1 1516 16x 00783um PMC200 Series Controllers accommodate the differing gear ratios via the special actuator coupling ratio parameter The procedure for setting this parameter is documented in your controller s manual The coupling ratio can be calculated by the following simple formula Coupling Ratio 20 000 ge
15. ible VersSIO0nS saa ia aia pa wa pagan dasa a eba GA AD a a Aa Ang a wai ah 8 Section 4 Maintenance and Service ucts 8 41 MalntenanG Qi ria ingak pa aa a ahaaa Ja ae San aa aaa aaa E AE aa a aa e an a aa aia 8 Section 5 Connector Pin Assignments 9 Section 6 Drawing scan dricidomreiinsaioninneenananidene 9 Section 7 Service Form sssssssseserirrrrressresssssssrrrsrrrrrrrrennrensnnernnrrnnns 10 iii Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Specifications Encoder Resolution Standard Actuators High Speed Actuators Low Speed Actuators Part Number 05000 um 850F 850F VC 59321 um 850F HS 00783 um 850F LS Nominal Gearbox Ratio and Maximum Speed Standard Actuators High Speed Actuators Low Speed Actuators Backlash Accuracy Bidirectional Repeatability Encoder Absolute cyclic pitch error Time to reach full speed Max Side Load Max Axial Load Cable Temperature Range Actuator Case Vacuum Compatibility 262 1 ratio 1624 motor 400 um sec 22 1 ratio 1624 motor 4750 um sec 1670 1 ratio 1516 motor 55 um sec lt 15 micron typical with external load of 2 Ibs 1 kg minimum lt 0 1 of travel cumulative Better than 1 micron when backlash is compensated by controller standard actuators Magnetic 2KHz open collector quadrature output 5V to 12V supply lt 1 micron lt 50 msec at max spee
16. ive during the warranty period the product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California USA You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or 90 days whichever is longer This warranty does not apply to defects resulting from modification or misuse of any product or part This warranty also does not apply to dam age from use with a non Newport motion controller driver This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particu lar use Newport Corporation shall not be liable for any indirect special or consequential damages 1995 Newport Corporation Irvine California U S A IN 10955 1 98 ji Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisanig com Table of Contents Page Warranty sasa as sanan inanan AAN SANE TA NGADANG TA E iota am iii banat ii Table of COMTGMES saa anaa agan a s ea RN Na a A a TAL aiaa ae Baran EN ag Na wn iil SPCCIHICGE ONS sera aaa eins aig iets aa aa gag a GA ANA Na ia NG a a E a
17. mage to the motor gearhead Manually positioning should not require more torque to turn the knob with the actuator attached than with it unplugged If you are unsure about the effort required unplug the actuator to compare the feel of the knob before proceeding 2 1 8 PMC400 Multi Axis Controller Driver The PMC400 Controller Driver has been phased out and is not supported to drive 850F Series actuators 2 1 9 Non Newport Controllers If you are using a non Newport controller driver please refer to the con nector pinout provided Note that in order to utilize the manual knob fea ture power must be removed from the motor open circuit Failure to do SO properly may result in dynamic braking on the motor and cause damage to the gearhead invalidating your warranty Ey Installation Set up and Operation The actuators are shipped in sturdy foam cushioned boxes Please inspect the actuators and or controllers immediately and notify the carrier if dam age is obvious The actuator includes extra flat head case screws a wrench to access the travel limit adjustment and a retaining nut for actua tor mounting Ea Setting the Travel Limits Before mounting the 850F actuator follow the directions below to adjust the travel limits such that the actuator will trigger one of its limit switches before encountering any external hard stop such as the end of travel of a translation stage Failure to do this may result in damage to th
18. ndard actuators vacuum compatible The high vacuum model of the 850F Series Linear Actuator model 850F VC incorporates the following features 1 a ek Teflon coated cable from actuator attached to six foot standard cable Unanodized aluminum body without label No fastener sealing compound The window material is removed Special lubricant with vapor pressure of 10 Torr at 39 C Oy OD ee we NM Vented motor gearhead encoder cavities 4 0 Maintenance and Service This section describes maintenance and adjustment procedures which may be performed by the user Caution Do not attempt to adjust the actuator mechanical assembly in any way other than outlined above See Setting the Travel Limits Any attempt to disassemble the actuator will cause a misalignment Call the factory before you try to adjust repair or alter any of the 850F Series actuators without factory provid ed instructions Any unauthorized attempts to adjust repair or alter the actuators or controllers will invalidate your warranty No scheduled maintenance is required for this product The actuator should be cared for and handled as any fine instrument Keep the unit clean and free of moisture solvents or other foreign matter Sometimes general wear and tear can cause the actuator s performance to degrade indicating a need for service Very often such problems as the actuator moving on its own and the actuator lacking thrust can be correcte
19. orates a versatile design which can be configured with travel limits from as little as approximately 1 32 inch to 2 inches 0 8mm 50mm enabling it to be used on a wide variety of Newport trans lation stages and mirror mounts Mechanical limit switches cut motor power preventing accidental over travel The actuator incorporates a man ual actuation knob for coarse adjustment with the motor power off To provide accurate motion the actuator s 3 16 inch diameter plunger is non rotating The standard gearbox ratio actuator can produce a maximum thrust in excess of 25 pounds 11 kg but when operating continuously over many cycles the maximum load is rated at 18 pounds 8kg The actuator s internal structure is a precision rolled leadscrew with a pitch of 32 3885 threads per inch The pitch of the leadscrew has been chosen to provide exactly 05um encoder resolution when combined with the standard gearbox ratio see table section 3 4 Production variations about this average figure can be compensated by Newport controllers via software commands allowing the user to limit cumulative monotonic inac curacies to within 0 005 A non rotating low friction Turcite nut engages the leadscrew and pushes the plunger A brass half nut is used to trigger a travel limit in the extended position while the lead screw nut trips the limit at full retraction The limit switches are repeatable to approximately 40um CAUTION If the actuator encounters
20. ous actuators For these reasons controllers sold before the introduction of the 850F may not be compatible and will require a special interface adapter Some controllers have been phased out and are not supported for the 850F The MM1000DC Controller Driver formerly DCS750 has been phased out and is not supported to drive 850F Series actuators 2 1 2 MM2000 PC Card Motion Controller The MM 2000 controller drives up to four 850F actuators via Newport s Universal Interface Box UIB P N 21463 01 and using firmware version 1 4 or later The controller firmware version may be displayed by using the VE command Note that since the actuators are using the computer s internal power supply there is a limitation of 2 axes which may move simultane ously Future versions of the UIB will incorporate an external power sup ply for applications requiring 3 or more axes of simultaneous movement The UIB provides relays to cut motor power for manual knob use and firmware version 1 4 or later provides commands to properly enable man ual positioning and keep track of encoder counts during a manual move The UIB may be purchased as an option when ordering an MM2000 con troller and the proper version of the firmware is assured To upgrade an existing MM 2000 controller with firmware version 1 4 or earlier the UIB must be purchased separately The existing firmware may be used with the following work around for manual actuation When sending the MO
21. y Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com WORLDWIDE HEADQUARTERS GERMANY NEWPORT CORPORATION Tel 06151 3621 0 1791 Deere Avenue Fax 06151 362150 Irvine CA 92606 ITALY In U S 800 222 6440 Tel 02 924 5518 Tel 714 863 3144 Fax 02 923 2448 Fax 714 253 1680 NETHERLANDS INTERNET Tel 030 6592111 tech newport com Fax 030 6592120 BELGIUM Tel 016 402927 Fax 016 40 2227 SWITZERLAND Tel 01 744 50 70 Fax 01 744 50 77 CANADA In Canada 800 267 8999 Uig T Tel 905 567 0390 el 2 Fax 905 567 0392 Fax 2 507 9268 FRANCE UNITED KINGDOM Tel 01 60916868 Tel 01635 521757 Fax 01 60916869 Fax 01635 521348 ND Newport Visit Newport Online at http www newport com Newport Corporation Irvine California has been certified compliant with ISO 9002 by IN 10955 1 98 Certificate No FM 27207 the British Standards Institution Printed in the USA on recycled paper Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com GO Newport 850F Series Linear Actuators User s Manual N N WN A N N N N Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of one year from the date of ship ment If found to be defect
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