HR2 Ultrasonic Motor User Manual
Contents
1. Secure the terminal between the two lock washers Connect the other end of this cable to the electrical network ground 5 Connect the motor to its driver according to the instructions given in the following section 2 2 4 Motor Connections This section describes the motor connector pinout and the connections to each of the available drivers Make sure the driver is set to operate with the HR2 motor series CAUTIONS Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion Extending the motor cable will not damage the motor however it Will affect its performance Nanomotion Ltd Page 17 of 30 Preparation and Installation 2 2 4 4 Motor Connector Pinout IN WARNING Do not remove the cover of the motor or disassemble its connector High voltage inside CAUTION Do not set power on unless the motor is mounted and preloaded The motor driver connection is a standard 9 contacts D type female connector whose pinout is given below Motor Connector Pinout Direction 1 Common Direction 2 Screen lao nin olo a oloa Figure 8 Motor Connector NOTE Pins 6 and 1 on the motor connector are shorted This is done for safety reasons driver voltage is disabled un2. carefully clean the ceramic strip with a Q Tip soaked with IPA without dismounting the motor General remarks 1 The procedure should be repeated if the motor is disconnected and then reinstalled 2 Do not perform run in in a vacuum environment Nanomotion Ltd Page 19 of 30 3 3 1 Specifications Specifications General These specifications apply to the standard motor driven by the AB1A Driver Box The motor features a linear voltage response The motor and driver can be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Nanomotion Ltd Figure 11 Block Diagram of the Motor and Driver Where Vin Command to the driver 10 to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor similar to back EMF N x sec m Vel Motor velocity m Sec M Moving mass kg S Laplace variable 1 sec Page 20 of 30 Specifications A block diagram of a typical HR2 Driver Motor Sub system is shown below A command voltage of 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the HR2 motor s Figure 12 Block Diagram of a typical HR2 Driver Motor Sub system Velocity Force Dr V Command Nanomotion Ltd Page 21 of 30 Specifications 3 2 Specification Parameters 3 2 1 Perfor
3. the defect arises from faulty material parts or workmanship and iii the Purchaser returns the affected product to a location designated by NM These provisions constitute the exclusive remedy of the Purchaser for product defects or any other claim of liability in connection with the purchase or use of NM products This warranty policy applies only to NM products purchased directly from NM or from an authorized NM distributor or representative This warranty shall not apply to i products repaired or altered by anyone other than those authorized by NM ii products subjected to negligence accidents or damage by circumstances beyond NM control iii product subjected to improper operation or maintenance i e operation not in accordance with NM Installation Manuals and or instructions or for use other than the original purpose for which the product was designed to be used The warranty stands only when the motors are used with the NM drivers amplifiers NM shall not in any event have obligations or liabilities to the Purchaser or any other party for loss of profits loss of use or incidental increased cost of operation or delays in operation special or consequential damages whether based on contract tort including negligence strict liability or any other theory or form of action even if NM has been advised of the possibility thereof arising out of or in connection with the manufacture sale delivery use repair or performance of th
4. 1 4 nanonorion A Johnson Electric Company HR2 Ultrasonic Motor User Manual D N MSP2458000 00 REV B September 2008 Nanomotion Ltd POB 623 Yokneam 20692 Israel Tel 972 73 2498000 Fax 972 73 2498099 Web Site www nanomotion com E mail nano nanomotion com Copyrught and Limited Warranty Copyright April 2000 This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd Limited Warranty Nanomotion hereinafter NM warrants the product other than software manufactured by it to be free from defects in material and workmanship for a period of time of one year except those parts normally considered as consumable expendable components such as motor conditioning brushes The warranty commences thirty 30 days from the date of shipment NM warrants those parts replaced under warranty for a period equal to the remaining warranty coverage of the original part NM s sole and exclusive obligation under this warranty provision shall be to repair or at its sole option exchange defective products or the relevant part or component but only if i the Purchaser reports the defect to NM in writing and provides a description of the defective product and complete information about the manner of its discovery within ten 10 days of its discovery ii NM has the opportunity to investigate the reported defect and determines that
5. OR HR2 I V JUNE NE NE 155305 N o v mc S GND PAN SCREW d 25 7 0 4 M3x0 5 M3x0 5 NOTES 4 THREADS FOR MOUNTING 1 ALL DIMENSIONS ARE IN MM 2 GENERAL TOLERANCE 70 1 copy of layout drawing MSP2 M30 L00 20 Figure 16 Dimensions for Standard and High Vacuum Motors Page 28 of 30 Specifications 3 3 2 Dimensions for Ultra High Vacuum Motors FINGER TIPS 3 05 DIRECTION ut OF MOTION E GND PAN SCREW xp M3x0 5 gu zz ED eU Qm A a q zi Q mw q 410 2 d o 8 ES p M 0 25 5 0 2 Ne e __ AVZREF FREE 5NOM 40 5 REF PRELOADED M2x0 4 38 7 0 2 VIEW A 2 THREADS o FOR TERMINAL 3 FREE BLOCK MOUNTING i 1 8 0 05 o 1 3 PRELOADED usos eas TU Og CN N 4 THREADS ms x z 4 FOR MOUNTING Mx i Mae ec NOTES Z 1 ALL DIMENSIONS ARE IN MM E 2 GENERAL TOLERANCE 0 1 a QI gt TYPx2 1 A copy of layout drawing SP2U M10 LOO 20 PRELOADED Nanomotion Ltd Figure 17 Dimensions for Ultra High Vacuum Motors Page 29 of 30 Specifications 3 3 8 Mounting Base Dimensions STAGE lt CARRIAGE MOTOR MOUNTING SURFACE P d SHOULD BE FIXED TO STAGE BASED Figure 18 Base Layout Nanomotion Ltd Page 30 of 30
6. aracennee 11 2 2 Motor InstallatiOn etienne Deere treno creant E Ten rene Eoi eros 11 2 2 1 Bonding the Driving Plate to the Stage ssssseeeee 12 202 Mournt nggBe MOLOI ue bem ditti e ti t ttem bd ee ahr el 15 2 2 0 MOtOr Grounding iis rr 17 2 2 4 Motor Connections ccccccecccececcceeeeeeeeeeeeeeeeaaeeaaeeeeeeeeeeeaaaeaseeeeeeeeeeeaaeaneees 17 2 2 4 1 Motor Connector PInOULb s ossia og RE eod Carpe Leon oe erent 18 2 24 2 System Electrical Configuration 22 acci cere cene cicer cene c ren cccoerrcenenie 19 2 2 9 Motor RUPDEIT iid reete tiet rina debo detti dep uut po etie de dened de IARE S Pe RR 19 Bi SPECIFICATIONS xit oit up dt tn ata eit athe teat usa NES 20 3 1 rnIicme 20 3 2 Specification Parameters eeeeeeeeeeeeeeeeeeeeeee eene nenne nennen nnn 22 3 2 1 Performante sipres ete pee do o a fob rag ue do rk eb cats 22 3 2 2 Electrical eee ORE EE EXE PARE TR UTER EXE EUREN TRE EERLKR 22 3 2 3 Environmerital ui t n eee eee tieniti deti 22 3 2 4 Physical DIMENSIONS oq eo Ee teo Eod sexes ed 22 3 2 5 Performance Envelope with the AB5 Criver ccccccccececeeeeeeeeeeeeeeeeeeeeeeeeeees 23 3 2 6 Performance Envelope with AB1A AB2 AB4 ccccccccccsseessssseeeceeeeeeeeeaes 25 3 3 SOC TNS TACOS vile winigd tania waren as teed wa ecngd an aaa Ext ER CE wk E 28 3 3 1 Dimensions f
7. dhere to the EOP as depicted in the following graph and table Force vs Velocity at varying working regimes 8 6 f g 8 4 B e 2 c b 0 a 0 100 200 300 Velocity mm sec Nanomotion Ltd Page 23 of 30 Specifications Duty Cycle 96 Max Continuous Operation time sec Ambient Ambient Vacuum Curve exe oe pen Vacuum Break Off Break On Break On a 100 100 56 unlimited 500 b 100 100 54 unlimited 450 C 100 100 45 unlimited 280 d 100 100 33 unlimited 170 e 99 99 23 unlimited 100 f 53 58 15 170 66 g 33 48 11 TT 44 h 17 28 6 5 32 25 Figure 13 EOP with AB5 As described in the AB5 s manual when operating it in the Brake Off mode the motor consumes power at all times even when the control command voltage is zero thereby reducing the thermal EOP If Break Off mode is desired while working in vacuum the following operating regime must be maintained within the specific duty cycle stated in the chart once the maximal continuous operation time has elapsed the motor must be disabled and allowed to cool off for at least 400 seconds For example looking at curve C in vacuum with the break off after 280 seconds of working at the 4596 duty cycle specified the motor must be disabled for at least 400 seconds to cool off This is true also if a smaller duty cycle is maintained Nanomoti
8. e NM products Without limiting the generality of the preceding sentence NM shall not be liable to the Purchaser for personal injury or property damages Nanomotion Ltd Page 2 of 30 CE Compliance Nanomotion Ltd CE Compliance The motors and drivers comply to the following directive Safety IEC 61010 1 1990 EMC 89 336 EEC as amended by 92 31 EEC and 93 68 EEC Harmonized Standards to which conformity is declared EN 50081 2 1993 EN 55011 1991 Generic Emission Standards Class A for radiated emission and Class B for conducted emission EN 50082 2 1995 Generic Immunity Standard NOTE UHV motors are designed for convenient interface to the UHV setup The motors are therefore supplied with three open electrical leads Whereas standard motors comply with CE regulations and the UHV motors have the same internal design as standard motors the UHV motors are supplied as components and CE conformity in both EMI and Safety must be implemented as part of the UHV system design Page 3 of 30 Definition of Terms and Warnings Preface Warranty This Installation Manual is designed to help the reader install and operate the various types of Nanomotion s HR2 piezoceramic Motors This manual assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical dimensions as well as the mechanical and electrical insta
9. e following page Nanomotion Ltd Page 13 of 30 Preparation and Installation 4 Referring to the figure below apply two drops of epoxy adhesive on the center of the Ceramic driving plate upper surface about 2cm apart The Epoxy must bond between the plate and the stage Recommended adhesive Emerson amp Cuming ecobond 24 for vacuum applications 3M 2216 epoxy or CIBA GEIGEY Arldite Radite for non vacuum applications NOTE Be sure the epoxy contacts the upper surfaces of the plate and the stage carriage but does not flow over the Ceramic plate front surface Alumina Plate Figure 4 Securing the Ceramic Driving Plate to the Stage 5 Allow the required time period for curing according to the Epoxy manufacturer specifications 6 Mount the motor according to the following section Nanomotion Ltd Page 14 of 30 Preparation and Installation 2 2 2 Mounting the Motor After bonding the Ceramic driving plate to the stage loosely mount the motor so it faces the Ceramic driving plate according to the instructions in this section NOTE The motor does not have an up or down side and may be mounted on either surface so that the cable protrudes from either the left or the right side Mounting Base Allen key For M3 M3 socket head screws Figure 5 Accessories for mounting 1 Align the motor to the four holes on the motor mounting surface 2 Secure the motor to the surface usin
10. erformance envelope An example for using the above graph and table A vacuum application requires 4N at a velocity of 20mm sec The graph shows that this point of operation corresponds to curve c The table shows that curve c and a vacuum environment require that a duty cycle of 26 will not be exeeded while maintaining a maximum continuous operation time of 107 seconds Vacuum application note Heat dissipation mechanism is by radiation to the motor case and by conduction through the fingers Hence the motor and the ceramic drive strip bases must both be thermaly designed to dissipate 0 5W each per motor with a temperature rise of 15 C maximum Also the temperature of all parts in contact with the motor and with the ceramic drive strip should not exeed 40 C Nanomotion Ltd Page 27 of 30 3 3 Schematics Dimensions for Standard and High Vacuum Motors Specifications 3 3 1 FINGER TIPS 3 05 E RM Na D 4 7 15 6 0 2 41 7 REF FREE 40 5 REF PRELOADED 38 7 0 2 1 8 t 0 05 PRELOADED 3 FREE nS wo Id B Z Q N 4 2 LY SEO Z t 25 TYPx2 9 5 REF PRELOADED 10 7 REF FREE Nanomotion Ltd DIRECTION Lu OF MOTION IN i iS D EB POWER i i i US CABLE 3 ol oS S Q 5 EN 62 F
11. g four M3 screws and spring washers inserted from the underside of the mounting surface Do not tighten yet 3 Adjust the distance between the motor and the Ceramic driving plate as follows Place the 1 8 mm spacer between the motor surface that faces the Ceramic driving plate and the Ceramic driving plate Gently press the motor against the Ceramic plate to the thickness of the spacer Lightly screw the four motor screws and then remove the spacer Fully tighten the motor screws at a torque of 0 5 to 0 7Nm 4 Ground the motor according to the following section Nanomotion Ltd Page 15 of 30 Insert M3 screws Do not tighten yet Insert spacer between motor and ceramic drive strip Press the motor against the spacer and tighten the screws Pull spacer out Nanomotion Ltd Preparation and Installation Figure 6 Inseting screws Figure 7 Spacing and tightening Page 16 of 30 Preparation and Installation 2 2 3 Motor Grounding IN Warning Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 Prepare a grounding wire and a terminal connection with the following specifications Terminal diameter for an M3 screw Wire diameter minimum 18 AWG Wire length maximum of 2 meter 2 Open the motor ground screw figures 15 amp 16 and connect the ground connection prepared in step 1
12. hat the motor and specifically the finger tips are not subjected to mechanical shocks 7 Be sure that the distance of the motor to the plate enables the motor finger tip to contact the driving plate otherwise the motor might be damaged during operation 7 The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness 7 Reducing the length of the supplied motor cable may damage the motor Do not attempt to shorten the cable without prior confirmation by Nanomotion 7 Extending the motor cable will not damage the motor however it will affect its performance Page 5 of 30 Table of Contents Table of Contents 1 INTRODUCTION m 7 1 1 AD Out the Motora erare ira cocaveasseschcuctbeessnsvesctveccoeseenasesstenctocesensvesstvesesteseesves 7 1 2 V cuum MO OTS A 7 1 3 HR2 System Parts a don Qc aD ata dea GGG OQ GG DC RC GR CIR T 8 1 4 Harald an ond n once ao cro n cna he B Xo SERE 8 1 5 Installation and Servicing eren n tnnt rrr 8 2 PREPARATION AND INSTALLATION ceeeeeeeeeeeeeee nennen nennen nennen nnne nnns 9 2 1 PreparatlonyicscsieisicescericesssecavesscertcestaetelesscentcestasteYesisentcoecaetovasnvestiescastelestvesarees 9 2 Mountirig Bas rra cores vie aerate ea deu re Aeon aoe endl 10 2 1 2 Limiting Stage Motion 21 certe aet an te oneslieceratiaccomeatiaeacetus
13. isk for rotary applications see section 2 2 1 d One of the following drivers AB1A AB2 ABA AB5 NOTE For the first 4 driver options use a standard off the shelf DC Controller with a servo rate of 10KHz or higher You may consult Nanomotion for the recommended controller The option for NCD Driver Controller Box consists of a driver and an integrated controller CAUTIONS Do not set power on unless the motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical shocks Installation and Servicing Nanomotion Ltd It is recommended to follow the installation instructions in this guide when mounting and installing the motor The HR2 does not contain any user serviceable parts Page 8 of 30 Preparation and Installation 2 Preparation and Installation 2 1 Preparation Nanomotion Ltd For optimal motor performance it is recommended to use the Ceramic driving plates provided by Nanomotion These driving plates have been specifically designed to work with Nanomotion motors Substituting this plate with any other material might reduce motor performance or damage the motor NOTE The instructions given in this section refer to the standard ceramic driving plates provided by Nanomotion Nanomotion can not guarantee perfor
14. less pins 1 amp 6 are shorted when motor is connected For Ultra High Vacuum motor Nanomotion Ltd The HR2 2 U motor does not have an outlet cable or a connector Instead there are 3 TFE jacketed wires extending outside the motor 1 black wire 1 red and 1 white wire The red and white wires are directions 1 and 2 respectively and the black wire is the common Also the safety shorting between pins1 and 6 is not implemented and should be preformed by the user IN WARNING Since there is no cable shielding the HR2 2 U motor case to the ground it must be grounded by means of connection to the network ground Please refer to section 2 2 3 in the manual for detailed instructions Page 18 of 30 Preparation and Installation 2 2 4 2 System Electrical Configuration The Motor is to be operated by one of Nanomotion s drivers Following is the two possible configurations Nanomotion s Driver Without an Integrated LC me LC circuit Box Figure 9 Connection to a driver using an external LC box Nanomotion s Driver With an Integrated Internal LC circuit Figure 10 Connection to a Driver with internal LC circuit 2 2 5 Motor Run In Run in of the motor is important to reduce wear rate of the system and to increase its lifetime The required run in conditions are as follows velocity 100 mm sec Duty cycle 50 Duration 4 hours When the run in is completed
15. llation procedures for these motors The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determined after inspection of any defective item by Nanomotion or an approved agent Nanomotion Ltd Page 4 of 30 Definition of Terms Warnings and Cautions Nanomotion Ltd Definition of Terms and Warnings NOTE Additonal usefull information CAUTION Identifies conditions or practices that could result in damage to this product or other property IN WARNING Identifies conditions or practices that could result in personal injury damage to the product or damage to other property A WARNINGS Do not remove the cover of the motor or disassemble its connector High voltage inside Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor CAUTIONS 7 Arrows on motor indicate direction of motion Align accordingly 7 Do not set power on unless motor is mounted and preloaded 7 Do not immerse the motor in any liquid or cleaning agent 7 Use only a clean cloth to wipe the motor 7 Be sure t
16. mance Maximum Allowable Velocity Dynamic Stall Force Static Holding Force Non Energized Stiffness Nominal Preload on Stage Kf Kfv Offset Attainable Resolution Nominal Lifetime 3 2 2 Electrical Maximal Voltage Maximal Current consumption Maximal Power Consumption 3 2 3 Environmental Ambient Temperature Storage Humidity Vacuum level high vacuum motors Vacuum level ultra high vacuum motors Maximum Baking Temperature for vacuum motors 3 2 4 Physical Dimensions Length Width Height Weight Nanomotion Ltd 250 mm sec 7 to 9 N 7 N reference value 1 4 to 1 8 N u 36 N 1 to 2 N Volt command driver amp command dependant 24 to 36 N e sec m 1 to 2 V Driver dependant Better than 100 nm see application notes 20 000 hours under nominal operating conditions 280Vrms 39 6KHz sine wave 250 mA rms 10W 0 50 C 40 C 70 C 0 80 non condensing 107 Torr guaranteed only after baking 1010 Torr guaranteed only after baking 120 C 140 C for ultra high vacuum motor 40 5mm 25 7mm 12 7mm 40 60gr high amp ultra high vacuum motors standard motor Page 22 of 30 Specifications 3 2 5 Performance Envelope with the AB5 driver Due to the AB5 s unique features the EOP of the motor when being driven by it is significantly different than with all other Nanomotion drivers In order to avoid damaging the motor it is important to a
17. mance attained by plates purchased from other sources Page 9 of 30 Preparation and Installation 2 1 4 Mounting Base Prepare a base with four oval holes as described in Section 3 2 8 Mounting Base Dimensions The base should be positioned perpendicular to the Ceramic driving plate that is bonded to the stage If necessary refer to the schematic for motor dimensions CAUTION The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Stage Carriage Ceramic Driving Plate location Stage Base 4x oval holes Figure 1 Motor Mounting Base The mounting base dimensions diagram refers to the front surface of the Ceramic driving plate For driving plate dimensions please refer to the price list The four screws securing the motor to the mounting surface will be inserted from its underside Any protrusion of the screws might interfere with motion on another axis Nanomotion Ltd Page 10 of 30 Preparation and Installation 2 1 2 Limiting Stage Motion The provided ceramic driving plate should not exceed the stage It must be supported by a solid even backing along all its length in order to avoid breaking when motor is pressed against it The Ceramic driving plate should also be at least 10 mm longer than the stage travel length otherwise the motor finger tips might be damaged If the above requirements are not met limit the
18. on Ltd Page 24 of 30 Specifications 3 2 6 Performance Envelope with AB1A AB2 AB4 The following graph illustrates motor velocity as a function of the applied driver command voltage Allowing up to 30 mm sec variations use it as a reference and as a guideline for expected motor performance Motors velocity VS command 300 0 250 0 200 0 150 0 100 0 50 0 0 0 Velocity mm sec 0 1 2 3 4 5 6 7 8 9 10 Command V Figure 14 Motor Velocity vs Command The motor operates horizontally at room temperature and low duty cycle lt 10 It interfaces a Ceramic Strip according to Nanomotion Specifications and a cross roller high quality slide Nanomotion Ltd Page 25 of 30 Specifications The following graph and table are designed to help the user determine the correct performance envelope of operation so as to not overheat and damage the motor Force Vs Velocity at various work regimes 8 g Zo 9 4 c B LR 0 fF 100 200 300 Velocity mm sec Lo 2 00 Vacuum Jj C max continuous max continuous max continuous ad Duty Cycle operation time Duty Cycle operation time Duty Cycle operation time 137 93 87 seconds 70 62 seconds 50 56 seconds Figure 15 Performance envelope at various work regimes Nanomotion Ltd Page 26 of 30 Specifications How to define a p
19. or Standard and High Vacuum Motors seeeesssss 28 3 3 2 Dimensions for Ultra High Vacuum Motors sssseeeenn 29 3 3 3 Mounting Base DImernsioris iiuu cete nietos eio etec eite ceto nino tent ccontace 30 Nanomotion Ltd Page 6 of 30 Introduction 1 Introduction 1 1 About the Motor The HR2 motors are high precision ceramic motors Designed and manufactured by Nanomotion Ltd the HR2 motors combine unlimited stroke with high resolution in compact dimensions Among its applications are microscopy precision motion robotics etc The motors provide a linear response to the input voltage The operation of the motor and driver resembles that of a DC motor driven by a voltage amplifier The specifications described in this chapter apply only to the motor driven by AB1A Driver Minor differences may result if AB2 AB4 or AB5 are used 1 2 Vacuum Motors Nanomotion Ltd Applications of the Nanomotion motors for vacuum and high vacuum environments include wafer inspection metrology scanning stages and lithography The HR2 V and HR2 U motors are constructed of materials that have been selected and designed for high vacuum compatibility Page 7 of 30 1 3 1 4 1 5 Introduction HR2 System Parts Handling A complete set for a single axis will comprise of the following a HR2 Motor b 1 8mm spacer c Ceramic Driving Plate for linear applications or Ceramic Driving Ring D
20. stage travel distance using end stops 2 2 Motor Installation The installation procedure consists of the following n Bonding the Ceramic Driving plate to the stage 7 Mounting the motor Grounding the motor n Connecting the motor to its driver Nanomotion Ltd Page 11 of 30 Preparation and Installation 2 2 1 Bonding the Driving Plate to the Stage The Driving Ceramic Plate interfaces between the motor finger tips and the stage and provides the required friction Bond the driving plate provided by Nanomotion to the stage surface interfacing with the motor finger tips according to the instructions given in this section Stage Alumina Driving Plate Figure 2 Bonding the Ceramic Driving Plate Nanomotion Ltd Page 12 of 30 Preparation and Installation 1 Clean the bonding region on the stage using a suitable agent such as Acetone or Methanol 2 Peel off the self adhesive backing paper on the Ceramic driving plate The self adhesive tape is compatible with high vacuum applications 3 Referring to the figure below place the plate in position verifying that There is a maximum of 2 0mm between the lower edge of the Ceramic driving plate and the motor mounting surface There is a minimum of 11 0mm between the upper edge of the Ceramic driving plate and the motor mounting surface Alumina driving plate Mounting Surface gt D Figure 3 Ceramic Driving Plate Position Continued on th
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