washington state university cleanroom user manual
Contents
1. e Whenever possible store wafers in covered containers Labware Teflon cassettes are the heavy white cassettes located on the table next to the spin rinse dryer Teflon cassettes are used only in the spin rinse dryer and for wafer etching and cleaning Do not use Teflon cassettes for wafer storage Polyethylene cassettes may be used for temporary storage while processing wafers All cassettes must remain inside the Washington State University Cleanroom amp Microfabrication Facility do not use inside storage boxes Return all cassettes to their proper storage space when done using them If you need to purchase wafer cassettes or wafer boxes for your own use contact the lab manager Use dedicated glassware when available If glassware is unlabeled it is general purpose Users may bring in their own glassware if contamination is a concern but the glassware must be removed from the cleanroom back to their own lab when they are finished with it All labware must be cleaned and dried before being returned to the shelf When leaving chemicals unattended three items MUST be written on the glassware with a Sharpie or on a cleanroom wipe placed under the glassware e Name of chemical s WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL e User s name e Date and time poured All chemicals must be disposed of properly when work is completed Chemicals are not allowe2. metal first aid box in the gowning room Contact the laboratory staff regarding any injury For serious acid burns or other injuries contact emergency help 9 911 Chemical Exposure Immediately remove affected clothing and flush the area with large volumes of water for a minimum of 15 minutes Use the emergency showers or eye wash stations as necessary The emergency shower and eye wash station is located next to the cleanroom entrance Hydrofluoric Acid HF HF burns are extremely serious and result in massive tissue damage HF burns may not cause discomfort until long after exposure If a user contacts HF or suspects they have contacted HF e Flush the area well with water for 5 minutes e Apply calcium gluconate gel to the affected area e Contact emergency help 9 911 and continue rinsing A tube of calcium gluconate gel is located in the BOE hood in the cleanroom Personal Protection Equipment PPE General lab apparel is not sufficient protection from the chemicals used in the laboratory Additional PPE is provided in addition to general laboratory apparel for users protection when handling chemicals Eye and Face Protection Eye protection must be worn when working with chemicals Safety glasses with side shields are provided in the gowning room e Contact lenses are discouraged e Safety glasses must be worn over prescription eyeglasses e Face shields must be worn over safety glasses when handling larger amou
3. Acetone and IPA MAY NOT be poured down any other sink in the cleanroom e Other chemical wastes are disposed of in dedicated disposal bottles clearly listing the chemical contents Dedicated disposal bottles are located underneath the spin coater hood Chemical Bottle Disposal Notify the laboratory staff to restock any chemicals in the cleanroom by email phone or note on the whiteboard in the outer room Empty chemical bottles are disposed of in the following manner Acid Base AZ developer bottles 1 Rinse bottles three times with water 2 Deface original label and label MT empty with a permanent marker 3 Place bottles in the tray on top of the black acids cabinet Solvent bottles 1 Rinse bottles three times with water 2 Deface original label and label MT empty with a permanent marker 3 Place bottles in the tray on top of the black acids cabinet Photoresist bottles 1 Rinse bottles with a small amount of acetone to remove the bulk of residual photoresist 2 Dispose of the acetone waste in the acetone isopropanol sink in the solvent hood 3 Deface original label with a permanent marker 4 Place bottles in the tray on top of the black acids cabinet Other wastes 1 Place wastes in the marked waste containers DO NOT mix acids bases caustics oxidizers or solvents together 2 Once a waste container is full place the container in the tray on top of the black acids cabinet for disposal CRYOGENI
4. in a neat and clean condition Users must wear safety gear appropriate for the process for example when working with acids the user should wear the gloves apron and a face shield provided Do not allow solvents and acids to mix Plan your processes to eliminate this possibility All acid work must be done in acid benches All chemicals not in their original container and chemicals supplied by the user must be labeled with the contents date name of user and contact information Markers and labels are provided in the laboratory for this purpose Users must store and dispose of chemicals properly Waste containers are provided for every type of chemical waste generated in the cleanroom All users are responsible for politely reminding fellow laboratory users of safe laboratory practice if fellow users are seen engaging in activities that may endanger themselves The observer is responsible for immediately reporting the incident to the laboratory staff WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL Laboratory Access The following steps describe the order in which a person can become a user in the Washington State University Cleanroom 1 Contact the laboratory manager Joshah Jennings at joshah jennings wsu edu or 509 335 8145 The laboratory manager will provide a description of the laboratory facilities fee structure user agreement and the feasibility of
5. not to let the legs or arms drag the floor Put on cleanroom gloves Carefully put on first glove touching the outside of this glove as little as possible Put on the second glove using the previously gloved hand taking care not to touch your skin with the gloved hand Be sure to pull the cuff of the gloves over the sleeve of the coverall so that any particles falling from your sleeves are trapped in the gloves Make sure you step on the sticky mat at the entrance to the cleanroom to remove any dirt on your shoe covers NOTE Eye safety glasses are only necessary if you will be using chemicals while in the cleanroom Degowning Degown in reverse order of the gowning procedure Coveralls may be used for 6 entrances into the cleanroom All other garments are single use and should be disposed of after degowning l 2 Remove gloves and dispose in waste container Remove cleanroom coveralls and hang up on hanger Remove face mask and hair cap and dispose in waste container Remove shoe covers while standing on sticky mat at gowning room entrance and dispose in waste container Lab Cleanliness Users must assume primary responsibility for the laboratory housekeeping Staff will work to make sure all facilities are in place to maintain the cleanroom and strive to improve capabilities when possible Users need to Put away all tools Leave wet benches dry and organized when complete Throw away all used wipes and other disposabl
6. research in the laboratory 2 Register as a laboratory user with the laboratory manager 3 Register for and attend a laboratory orientation session All laboratory users MUST attend one of these sessions which are held as needed The session provides an overview of the laboratory and its capabilities Laboratory safety rules and protocol are covered The session includes a tour of the laboratory 4 Obtain access to the cleanroom via your WSU Cougar Card You will have to provide your WSU ID number for access 5 Register for training classes for specific equipment you will need in the lab Fees Laboratory fees are divided into three categories user fees equipment fees and work performed by laboratory staff Each category may be further divided for academic and industrial users Laboratory orientation sessions are provided at no charge to new users User fee e University and non profit 199 13 per user per month three month minimum e For profit Organizations By arrangement Fee includes cleanroom garments general laboratory supplies chemicals and gases used in standard processes Equipment fees THIN FILM SPUTTERING SYSTEM e University and non profit 96 53 per machine cycle e For profit Organizations 350 00 per machine cycle The fee for each machine cycle includes one pump down sputter and vent cycle The fee includes the use of sputter target materials that we normally stock Non stocked materials will
7. ATION FACILITY USER MANUAL LABORATORY POLICIES amp PROCEDURES Established laboratory policies provide everyone with a safe and successful working environment Laboratory users are expected to follow the policies in this section Laboratory users are part of a larger community that exists in a shared facility Laboratory users are responsible for eguipment operation and correct chemical handling procedures Laboratory staff members are available to provide any necessary training 10 TEN LABORATORY RULES All users of this facility agree to abide by the rules and policies of the Washington State University Cleanroom Manual Cleanroom users are encouraged to ask laboratory staff members any questions Users may only use equipment for which they are authorized Laboratory staff will provide all training on all equipment Users will report all equipment and facility problems to laboratory staff Repair and maintenance of equipment and facilities is performed or authorized by laboratory staff ONLY Laboratory staff must approve all new chemicals and equipment brought into the laboratory An MSDS must be provided for all new chemicals No food or drink in the cleanroom or gowning area A capped bottle of water may be brought into the gowning area Users are encouraged to wash their hands immediately upon leaving the laboratory Users must maintain a clean work environment be considerate of fellow users and leave their work environment
8. C Cryogenic hazards exist in the laboratory Laboratory users should familiarize themselves with cryogenic materials to avoid injury WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 14 CLEANROOM MICROFABRICATION FACILITY USER MANUAL Liquid Nitrogen LN LN is used throughout the lab LN has a sufficiently low temperature 196 C 77 K to burn skin from freezing and to crack the flooring Laboratory users should take all necessary precautions when working with or around LN e Only containers designed for transporting LN are allowed e Use special Cryo Gloves provided when handling LN2 Do not use the Cryo Gloves for any other reason ELECTRICAL Electrical hazards exist in the laboratory Electrical hazards result from the improper use of electrical equipment or the use of damaged electrical equipment Laboratory users are expected to conduct themselves in a safe manner when using high voltage equipment and follow these basic guidelines e Laboratory staff or WSU Physical Plant personnel only will perform all electrical wiring and maintenance e Report all problems to laboratory staff e Do not overload circuits e Use equipment shielding properly to avoid radio frequency RF burns e Do not bypass any safety features e Know the locations of the emergency offs EMOs circuit breakers and electrical disconnects associated with the equipment in use EMOs can be found on most major pieces of proce
9. WASHINGTON STATE UNIVERSITY CLEANROOM USER MANUAL Center for Materials Research THIS NOTEBOOK IS PRINTED ON CLEANROOM PAPER AND IS PERMITTED INSIDE THE CLEANROOM CLEANROOM MICROFABRICATION FACILITY USER MANUAL TABLE OF CONTENTS INTRODUCTION ss esse sesse ds ee ee ee dee Se Ge Ge Ge Ge eed Ge ee doe Ge de de de de eN oe deed ee 2 CONTACTS RR RE RE RE E OE NE EE EE EE 3 LABORATORY POLICIES amp PROCEDURES ccccssssssssssssssssssssssssssssssssssssssssssssessees 4 WEN LABORATORY RULES ccccscocessoscccossesctessseosecosssscecdesoascsesesctess eoccesssescesosseasecessescbessbeosecsosescuceescs 4 LABORATORY ACCESS esse ee ee ee ee ee ee ee ee ee ee Ee 5 OE EE N E 5 TRAINING ee ee ee ee ee ee ee ee ee ee ee EE 6 RESTRICTIONS esse ee ee ee ee ee ee ee 6 RESERVATION SHEETS AND LOGBOOKS ee esse ee ee ee 7 GOWNING ees ee ee ee ee ee ee ee ee 7 DEGOWNING ees ee ee ee ee ee ee 8 LAB CLEANLINESS ccccccccccccccssssssecceccceceseesssceccecceseeaaneesess 8 CLEANROOM ETIQUETTE esse esse ee ee ee ee ee ee ee ee ee ee ee ee ee ee ee ee ee ee 9 WAFER HANDLING ee esse ee se ee ee ee ee ee ee ee ee ee ee Ee 9 TAB WARE see vor Ee EES aa ee ee DS ED de GP Ee Ee Nee ee 9 EQUIPMENT ao bero esse ees ese ee ee ee ee ee ee ee ee ee ee ee 10 LABORATORY SAFETY ccccsssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssssscess 11 CHE MICA ES cassis iccsdiscsscasscscccssesesscs
10. Y www cmr wsu edu cleanroom SEPTEMBER 2008 18 CLEANROOM MICROFABRICATION FACILITY USER MANUAL CREDITS This manual with permission is based on the Microfabrication Laboratory User Manual distributed by the Washington Technology Center at University of Washington WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 19
11. arest fire alarm and evacuate the building immediately e Do not panic if clothing is ignited Immediately proceed to the nearest safety shower to extinguish the burning clothing GASES Several toxic and pyrophoric gases may be used in the laboratory Extensive training is required to handle these gases Laboratory users should familiarize themselves with the hazards of working with these gases and of their locations in case of an emergency Compressed Gas Cylinders Only laboratory staff members are permitted to handle compressed gas cylinders The highly pressurized contents pose a serious health risk Contact the laboratory staff if a cylinder needs replacement or a problem with the equipment develops WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 16 CLEANROOM MICROFABRICATION FACILITY USER MANUAL DISCIPLINARY ACTIONS The safety rules and policies at the WSU Microfabrication Facility are necessary in order to maintain a safe working environment Many of these guidelines are simply common sense and require consideration of other laboratory users Others require specific knowledge of proper equipment use chemical handling or lab procedure It is the responsibility and obligation of ALL users to be fully aware of safety policies and to be trained by WSU Microfabrication Facility staff on particular pieces of equipment chemical handling and lab procedure required for their work All policies and guidelines are
12. be supplied by the user DEEP REACTIVE ION ETCHER e University and non profit 65 36 per machine cycle e For profit Organizations 350 00 per machine cycle Laboratory staff are available to process work on a contract basis for 33 56 per hour with a 1 hour minimum and charged in 1 4 hour increments This arrangement is appropriate for any researcher unable to conduct the work themselves or for a small job where using the time and WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL skills of laboratory staff is more cost effective These reguests are considered on a case by case basis Training Laboratory staff provides all training on all eguipment Observing an authorized user does NOT constitute training Only laboratory staff can authorize and train users on equipment Equipment training sessions are held as needed Training typically consists of three sessions a basic training session a demonstration session and a follow up session Users should read the operating procedure prior to the first training session for that piece of equipment Operating procedures for every piece of equipment in the cleanroom are posted online at http www cmr wsu edu node 13 1 The basic training session is taught by laboratory staff and should take about 30 minutes The trainee is required to read the equipment operating procedure which will be available online prior to the i
13. d to be left overnight without permission from the lab manager In this case the user should also include a phone number on the glassware and the expected date through which the chemical will be used General purpose tweezers wafer scribers razor blades timers and pens are located in small plastic bins in the cleanroom Please return them promptly when done using them Equipment Equipment can be used only for its designed purpose and in a manner for which it was intended Operating procedures if available are posted next to each piece of equipment in the cleanroom Operating procedures can also be found online at http www cmr wsu edu node 13 Any malfunction of the equipment must be reported immediately to the laboratory staff Three items must occur to alert staff and other users to the problems absolutely do not attempt to fix the problem yourself as you could easily cause further damage e If staff members are unavailable leave a message through email and or voice mail e Write a description of what occurred in the equipment logbook e Place a notice on the machine reading Equipment Down Permission from the laboratory staff is necessary before introducing any non standard substrates or materials into the equipment Allowed materials and substrates are also listed in the operating procedure for each piece of equipment Repairing or altering any piece of equipment without authorization from the laboratory staff is stric
14. e equipment e Ifa user does not start using any piece of equipment within 15 minutes of the start of the reservation the user forfeits the entire reservation e Users must completely fill out a log sheet for any equipment that has a logbook Gowning Laboratory users must be appropriately attired before entering the cleanroom area Cleanroom garments shall be worn only within the cleanroom complex except under emergency conditions Do not wear soiled dirty or lint producing street clothes under cleanroom garments Limit the use of cosmetics colognes and perfumes in the cleanroom and gowning areas as much as possible With the exception of shoe covers the gown up procedure should always proceed from the top of the body then down 1 Make sure you step on the sticky mats at the entrance to the cleanroom gowning area several times to remove any excess dirt off your shoes 2 Put on shoe covers while still standing on the sticky mat Make sure laces are tucked into the shoe covers 3 Stow any outside garments or materials not suitable to take into the cleanroom in the lockers in the gowning area WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL Put on hair cap so that ears and sideburns are covered Make sure long hair is fully tucked into the cap Put on face mask or beard cover so that it covers both mouth AND nose Put on cleanroom coveralls being careful
15. e prohibited from the laboratory because they do not provide any protection from potential chemical spills Use of contact lenses in the laboratory is discouraged as chemicals can become trapped between your eye and the lens causing permanent damage Because of the potential exposure to chemicals working in the laboratory while pregnant is not advisable The following materials are prohibited from the cleanroom to prevent particulate contamination WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL e Food and Drink exception A capped bottle of water may be brought into the gowning area e Cardboard e Packing materials e Pencils e Paper Only cleanroom paper and notebooks are allowed in the cleanroom Any non cleanroom paper must be put in a plastic sleeve before being brought into the cleanroom Cleanroom notebooks can be obtained from the lab manager Non cleanroom paper is allowed in the gowning area Reservation Sheets and Logbooks e All users must log in and out of the cleanroom in the Cleanroom User Log located in the gowning area e Users may reserve a piece of equipment up to one week in advance using the Sputter Reservation sheet or the Cleanroom Equipment Reservation sheet e Ifa piece of equipment has not been reserved then it may be used on a first come first serve basis All users must verify that the equipment has not been reserved before using th
16. ense is recorded in the individual s user record Third Offense The individual would be expelled from the laboratory WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 17 CLEANROOM MICROFABRICATION FACILITY USER MANUAL Non Safety Violations First Offense The user would receive an e mail notice from a WSU Microfabrication Facility staff member A copy would be sent to the laboratory manager If the individual were unaware of the rule that had been violated a warning would be given If the offense was more severe the individual would meet with the staff member and the laboratory manager and the offense would be recorded in the individual s user record Second Offense The user would receive an e mail notice from a WSU Microfabrication Facility staff member A copy would be sent to the laboratory manager and the users advisor manager The user would meet with the appropriate staff member and the Laboratory Manager to determine corrective action The offense is recorded in the individual s user record Third Offense The individual would meet with the staff member Laboratory Manager and their advisor manager The group would decide upon corrective action This action may include suspension from a piece of equipment or from the laboratory The offense is recorded in the individual s user record Fourth Offense The individual would be expelled from the laboratory WASHINGTON STATE UNIVERSIT
17. es in the correct waste container when finished Clean up all minor spills immediately or contact staff for major spills Properly dispose of all chemicals poured out by the user when finished WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL e Never open your gown in the cleanroom Never touch your skin with your gloves If you do put on clean gloves immediately Failure to follow simple housekeeping rules such as the above will constitute a safety violation and the user will be punished accordingly Good housekeeping will result in a safe environment for all users and give the user strong reputation for doing good work Cleanroom Etiquette e No eating chewing or smoking shall be allowed in any environmentally controlled areas e Be aware of supplies Users should notify cleanroom staff immediately if they notice that we are running low on supplies e Do not remove dedicated items from the cleanroom without the permission of cleanroom staff e Ifyou turn it ON remember to turn it OFF For example the hotplates or the nitrogen valves on the mask aligner and BOE Wafer Handling e Never sneeze cough or spit toward your wafers even with a mask Resulting spots are non removable e Never speak towards your wafer e Avoid passing anything over your wafer that may release particles i e don t look down on your wafer don t cover the wafer with your hand
18. ials Research Microfabrication Facility is home to a 1 100 sq ft cleanroom laboratory located in the Engineering Research Teaching Laboratory building on the Washington State University Pullman campus This facility offers advanced microfabrication and characterization capabilities in 1 100 sq ft of cleanroom space The laboratory supports the processing of microelectromechanical systems MEMS microfluidic micro optic and sensor devices on 3 diameter substrates Available processes include photolithography thin film deposition oxidation boron diffusion wet amp dry etching wire bonding and micro measuring Advanced processing capabilities include soft lithography techniques for patterning elastomeric materials In line with the Washington State University Cleanroon Microfabrication Facility s mission to promote industry university collaboration the cleanroom is available to industry and academic researchers alike for research technology and process development and prototype manufacturing projects The WSU Cleanroom and Microfabrication Facility operates as a service center under the direction of the Center for Materials Research About the Center for Materials Research The Center for Materials Research was established at WSU in 1993 to strengthen interdisciplinary collaboration between various faculty as well as to facilitate research and education in the materials area It is administered in the College of Sciences and the C
19. it is a good idea to let someone know where you are and when to expect you back Restrictions Open toed shoes sandals sleeveless shirts and shorts are prohibited from the laboratory because they do not provide any protection from potential chemical spills Use of contact lenses in the laboratory is discouraged as chemicals can become trapped between your eye and the lens causing permanent damage Because of the potential exposure to chemicals working in the laboratory while pregnant is not advisable CHEMICALS A variety of chemical hazards exist in the laboratory Laboratory users are expected to educate themselves about chemicals take the necessary precautions associated with chemicals and conduct themselves in a safe manner when handling chemicals Material Safety Data Sheet MSDS The MSDS provides information about the chemical substances within a product safe handling procedures first aid measures and procedures to be taken when the product is accidentally spilled or released e MSDSs are located in a notebook in the gowning area e All chemicals must have an MSDS e New chemicals must be approved by the lab manager and be accompanied by an MSDS e Review the MSDS for unfamiliar products WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 11 CLEANROOM MICROFABRICATION FACILITY USER MANUAL First Aid Minor cuts abrasions and chemical burns can be treated with first aid supplies located in the
20. ntroductory session Safety precautions and proper equipment operation are described and demonstrated The trainer will show the trainee the basics of how to run the tool but will not run an actual process Users should feel free to ask any questions during this session 2 The second session of training includes an actual process run demonstrated by a staff member At this time the user can provide samples to take advantage of the demonstration to get early results Users are encouraged to take notes during this session 3 The follow up session is where the user demonstrates the ability to operate the equipment competently with the user s own samples Laboratory staff will provide assistance to ensure the safe and proper operation of the equipment The laboratory staff may quiz laboratory users The follow up session must be completed within one month of the basic training session or the user will have to repeat the basic training session If the user can demonstrate the knowledge and ability to operate the equipment the user will become an authorized user and be added to the user list for that equipment If the user fails to demonstrate the knowledge and ability to operate the equipment the user and the laboratory staff member will discuss the problems encountered and schedule a second follow up session If the user fails a second time the user must attend another basic training session Restrictions Open toed shoes sandals and shorts ar
21. nts of acids or bases Hand Protection Hand protection must be worn at all times Check gloves prior to use and rinse them thoroughly when done Go to the gowning area and dispose of gloves if they develop holes or become heavily contaminated e White nitrile gloves are used generally e Green rubber gloves are provided for use with strong acids such as HF WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 12 CLEANROOM MICROFABRICATION FACILITY USER MANUAL Body Protection Body protection must be worn when working directly with chemicals General laboratory coveralls do not protect against chemical burns e Black rubber chemical splash aprons are provided for handling large volumes of acids or caustics Storage Store and return all chemical bottles to their corresponding chemical cabinets Stored chemicals are separated into the following categories e Acids e Bases e Flammables e Solvents Handling Be aware of the following guidelines when handling or transporting chemicals If a user must leave while a process is in progress clearly label the process containers with the users name date time phone number and chemicals involved e Use appropriate chemical containers e Clearly label and properly store all chemicals e Never pour a chemical back into its reagent bottle dispose of excess chemicals or store them in a clean labeled container e Wipe up any drips with a Texwipe and di
22. ollege of Engineering and Architecture and involves over 25 researchers from various disciplines Dr Kelvin Lynn was hired as Center Director in 1996 he was a Brookhaven physicist for 23 years He holds the WSU Boeing Chair in Advanced Materials Science He is a Fellow of the American Physical Society and world renowned for his research in positron annihilation The Center offers the opportunity for funding sources to interact with WSU s cutting edge researchers in specific disciplines and receive an interdisciplinary answer to research questions The Center its faculty and WSU address a wide variety of research questions with some of today s most current scientific equipment For more information visit http www cmr wsu edu or call 509 335 1131 WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY CONTACTS Laboratory Staff Email Joshah Jennings joshah jennings wsu edu Laboratory Manager Laboratory Phone ETRL 002 Cleanroom EME 224A Old Cleanroom Environmental Health amp Safety EH amp S Chemical Spills Exposure Odors Building Facilities Facilities HVAC electrical Emergency After Hours Police Emergency University Police Non emergency WASHINGTON STATE UNIVERSITY SEPTEMBER 2008 USER MANUAL Phone 509 335 8145 509 335 5852 509 335 7590 509 335 3041 509 335 9000 9 911 509 335 8548 www cmr wsu edu cleanroom CLEANROOM MICROFABRIC
23. sacscccsssescsenseascessdesucscnsncscccssdecoesssuascscnsssecesbsoessasssdeesseseesseccosses 11 MATERIAL SAFETY DATA SHEET MSDS esse sesse 11 FIRS TEA ID cet cates ee De ee ee EE Ge ee De De oe EG ee de De 12 PERSONAL PROTECTION EQUIPMENT PPE 00008 12 STORAGE oie ee ee ed ces Ge ee ee ee ee Ee Ee oe sd do 13 HANDLING siese oe Ee Se eed ee Ee Ee ee ee De T deep ee Ee de iS 13 SPES OER ER EE EE n Ee Re ED Pe ae Ee 13 IDISPOS AU RE RR EE SE E Ee De OE De ee ee EO Ee 14 CHEMICAL BOTTLE DISPOSAL iese ee esse ee ee ee ee ee ee ee 14 CRYOGENIC oe de ee ee ee be ee ER De Ee Ee Ee De ei EE ee dee ee 14 LIQUID NITROGEN IM das sees ede wee ee 15 ELEGTRIGAE sesse dee es ese deed N es ede ode dee we eed see de ve eed gee oe oe se ge ee de oge de Pe ee ee Ge eg 15 dd ORE EE EE EK RE EE E 15 FIRE PREVENTION ee ee esse ee ee see ee ee ee ee ee ee ee ee ee Ge 15 FIRE PROCEDURE ccccccccccccccscsssssecccccccesseesssececesceeseuaeesees 16 GASES ENE EE RE EE EE N EEE 16 COMPRESSED GAS CYLINDERS ese ee ese ee ee ee ee ee ee 16 DISCIPLINARY ACTIONS ses see old Va ss dd ge Ke AG ge Ke Ge GR Ges ede sone N SAFETY VIOLATIONS ee ee ese ese ee ee ee see ee ee ee ee ee 17 NON SAFETY VIOLATIONS ees ese ee ee ee see ee ee ee ee ee ee 18 CORTEIDETS RT EE EE ER LN WASHINGTON STATE UNIVERSITY www cimr wsu edu cleanroom SEPTEMBER 2008 CLEANROOM MICROFABRICATION FACILITY USER MANUAL INTRODUCTION The Center for Mater
24. spose of in the appropriate waste container e Perform chemical work and keep open chemicals inside the exhausted wet benches e Do not leave chemical bottles on the floor or sitting unattended on the wet benches Warning Always Add Acid AAA to water and Never Add Water NAW to acid Always add hydrogen peroxide H202 to sulfuric acid H SO4 when making piranha solution Spills Spills inside a wet bench may be washed away with the water spray nozzle Spills outside a wet bench require the following e Drips of non hazardous materials may be wiped up with a Texwipe and discarded in the trash e Large spills approaching liter require notification of the laboratory staff and the use of absorbent and neutralization materials found in the spill kit The spill kit is located on top of the supply rack in the gowning area e Major spills of 2 liters or more require full laboratory evacuation and notification of the spill response team by dialing 9 911 WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 13 CLEANROOM MICROFABRICATION FACILITY USER MANUAL Disposal Clean up completely and dispose of solutions properly when finished with a process e Rinse water is disposed of using the sink drains e Acids bases and hydrogen peroxide are disposed of in their respective labeled waste containers e Acetone and isopropanol IPA wastes are disposed of in the appropriately labeled sink in the solvent hood
25. ss equipment e Warning Do not grab an electrocution victim the rescuer can be electrocuted Disable the power immediately by opening the appropriate circuit breaker or disconnect Laboratory users are not obligated to rescue electrocution victims FIRE Fire hazards exist in the laboratory Laboratory users are expected to educate themselves about the potential fire hazards associated with the chemicals and processes they are using in the laboratory to avoid injury Fire Prevention Fires in the laboratory can result from the ignition of any combustible material including flammable gases and solvents The ignition of chemical solutions on hot plates is a major cause of laboratory fires e Always use a water bath to heat flammable organics e Avoid water around electrical appliances WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 15 CLEANROOM MICROFABRICATION FACILITY USER MANUAL e Keep paper and other combustible materials away from ovens or furnaces e Keep rags and wipes soaked in any chemical away from heat to avoid auto ignition Fire Procedure Users should remain calm and conduct themselves in an orderly fashion when responding to a fire alarm CO and H O fire extinguishers are located in the laboratory however laboratory users are not obligated to fight fires e Know the location of fire exits fire routes fire alarm pull boxes and safety showers located on the laboratory map e Pull the ne
26. subject to revision dependent upon laboratory procedural changes Be aware of new or changing lab guidelines Please encourage safety and proper lab usage among the other lab users and report any serious violations of the guidelines to the WSU Microfabrication Facility staff The following procedures will be used to discipline individuals who do not comply with the rules and policies Violations may be either safety or non safety related e Safety violations include activities that endanger either the safety of the individual or other users of the facility e Non safety related violations include activities that do not comply with rules regulations or policies intended for the organized and efficient operation of the facility For each offense which is deemed unique by the Safety Officer or WSU Microfabrication Facility Staff the following systems will be used Safety Violations First Offense The individual will meet with the Safety Officer If the individual was unaware of the rule that had been violated a warning would be given If the offense was more severe the individual would meet with the Safety Officer and the Laboratory Manager and the offense would be recorded in the individual s user record Second Offense The individual would meet with the Safety Officer Laboratory Manager and their advisor manager and the group would decide upon appropriate corrective action This action may include suspension from the lab The off
27. tly prohibited Users may reserve equipment using the Sputter Reservation sheet or Cleanroom Equipment Reservation sheet located in the gowning area You must indicate the time period equipment needed and process you will be running in the reservation log If you do not show up within 15 minutes of the start time that you reserved your reservation is cancelled and any user then has priority over you for that time period Report any complaints and abuses to the laboratory manager WASHINGTON STATE UNIVERSITY www cmr wsu edu cleanroom SEPTEMBER 2008 10 CLEANROOM MICROFABRICATION FACILITY USER MANUAL LABORATORY SAFETY The following safety rules are for laboratory users protection Laboratory users are urged to use common sense when thinking about safety and how their actions will affect other laboratory users These rules must be read understood and practiced at all times Laboratory staff members are available to answer any questions Remember there is no excuse for not following these safety rules Awareness Please report any safety problems or potential safety problems to the laboratory staff User input and observations are appreciated in maintaining a safe and healthy environment Buddy System The laboratory is open outside the normal working hours of the laboratory staff Working with another individual is highly recommended for your safety If you are going to be in the cleanroom alone late at night or over the weekend
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